FS6022

Model FS6022
SIARGO MEMS FLOW SENSOR PRODUCTS
MEMS Mass Flow Sensors
VA.4
© 2011 Siargo Ltd.
MEMS Mass Flow Sensors
Model FS6022
Features
Mass flow range: 0 ~ 250 SLPM, 0 ~ 300 SLPM
Fast response time: 8 ms typical
Highly sensitive in small flow rate
Low power consumption
Specially designed for medical equipment
Sterilizable for reuse
Description
The FS6022 mass flow sensors are manufactured
using Siargo's proprietary MEMS flow sensor and
package technology. The sensors are specially
designed for the application of medical equipment
such as personal ventilators and CPAP machines for
flow monitoring and control with two flow rate ranges
of 0 ~ 250 SLPM and 0 ~ 300 SLPM, respectively. The
compact package design enables a large dynamic
flow range with a flow resistance less than <0.5
cmH2O/L/sec. This package withstands a maximum
pressure of 0.2 MPa (29 psi) without compromising
performance. The mechanical interface is the
standard ISO 22 mm combined male/female medical
connector that allows the sensor to be readily applied
to equipment with a minimal possible dead space.
The FS6022 requires a power supply of 5 Vdc.
FS6022A provides a linearized analog output of 0 to 5
Vdc corresponding with flow rate from 0 to full scale.
While FS6022B provides an analog output of 2.5 ~ 5
Vdc corresponding with 0 ~ positive full scale flow
rate, and 2.5 ~ 0 Vdc corresponding with 0 ~ negative
full scale flow rate. It can also provide a digital
interface through RS232 (TTL) upon requests. The
AMP compatible mechanical connector provides
reliable connection.
The response time of the FS6022 is 8 ms typically,
which allows customers to monitor instant flow rate
variations.
The calibration is generally performed with air at 20 °C
and 101.325 kPa pressure rating. It can nonetheless
be carried out with other gases and conditions upon
requests.
The sensors can be sterilized in medical liquids for
reuse or hygienic purposes. The sensors can also be
applied for various clean gas measurement with low
cost and easy installation. They can be used as a
good alternative to volumetric and/or differential
pressure type flow sensors.
Working Principle
The MEMS sensor chip utilizes the calorimetric principle. It is packaged on a plate installed inside the flow
channel, which provides additional flow conditioning from the boundary layer configuration resulting in a
laminar flow. The mass flow measurement is established as the gas carries heat away from the heater leading
to the redistribution of the temperature field. Accurate flow rate is obtained by calibration with standard gas at
preset conditions.
Flow direction
Time-averaged velocity profile boundary layer
Turbulent
Free stream
Laminar
Sensor
www.siargo.com
FS6022 (VA.4)
1/7
MEMS Mass Flow Sensors
Block Diagram
The functional block diagram is shown in the following
figure. The critical component of the FS6022 is the
MEMS sensor chip that is heavily framed in the figure.
It is powered by the sensor driving circuitry and sends
flow rate related voltage to ADC. The micro-controller
processes (amplifies, filters, etc) the voltage then
converts into flow rate. The flow rate signal is sent out
through analog format.
FS6022
Protection
Filtering
Voltage
Flow
MEMS
Sensor
Chip
Regulator
Sensor
Driving
Circuitry
VCC
GND
EEPROM
ADC
MCU
D/A
I/V
Converter
Vout
Functional block diagram of the FS6022.
www.siargo.com
FS6022 (VA.4)
2/7
MEMS Mass Flow Sensors
1. Sensor Performance
1.1 Performance Specifications
All data unless otherwise noted apply for calibration conditions: air, 20 °C, 101.325 kPa absolute pressure, horizontal
mounting.
Model
Flow Range
FS6022A
FS6022B
0 ~ 250; 0 ~ 300
0 ~ ±250; 0 ~ ±300
> 100 : 1
Turn-down Ratio
Accuracy
SLPM
1
± (2 + 0.5FS)
%
Repeatability
± 0.5
%Reading
Null Shift
± 30
mV
± 0.12
Output Shift
8
Response Time
2
Linear, Analog 0 ~ 5 Vdc
Output
Max. Flow Resistance
3
ms
Linear, Analog 2.5~0/2.5~5 Vdc
<0.5 cmH2O/L/sec
Max. Operation Pressure
Power Supply
%/°C
4
Operating Current
Power Consumption
0.2
MPa
5 ± 1%
Vdc
< 10 (no output load)
mA
< 20
mW
Sourcing: 14
Analog Output Load
mA
Sinking: 11
Working Temperature
5
0 ~ +60
°C
1. To obtain accurate flow measurement, let the sensor warm up 1 minute at power up.
2. For FS6022A, the analog output provides linearized voltage of 0 ~ 5 Vdc corresponding with flow rate of 0 ~ full scale. For FS6022B, the analog
output provides linearized voltage of 2.5 ~ 5 Vdc corresponding with flow rate of 0 ~ positive full scale, and 2.5 ~ 0 Vdc corresponding with flow rate
of 0 ~ negative full scale
3. At 20°C and 50 kPag pressure rating.
4. One 5 Vdc power supply with an accuracy of ±1% is necessary. The minimum supply current must be larger than 10mA.
1.2 Additional Specifications
Mechanical Connection
1
Pins Out
Calibration Options2
Dimension
Weight
Storage Temperature
Humidity
ISO 22 mm
Connector:5 Pins, NS-TECH CD R-5; Cable:SN5-50,0.5 m
Air @ 20 °C, 101.325 kPa
65.3 x 30 x 38.5
mm3
30.0
g
-25 ~ +85
°C
< 95 %RH (No icing or condensation)
1 The cable (Part number: SN5-50, Length: 0.5 m) is shipped with the sensor.
2 The sensor is normally calibrated with air at 20 °C and 101.325 kPa pressure rating. Calibrations at other gases and conditions available upon
request.
www.siargo.com
FS6022 (VA.4)
3/7
MEMS Mass Flow Sensors
1.3 Flow Characteristics
The FS6022A provides an analog output of 0 ~ 5 Vdc
corresponding with 0 ~ full scale flow rate. While the
FS6022B provides an analog output of 2.5 ~ 5 Vdc
corresponding with 0 ~ positive full scale flow rate, and
2.5 ~ 0 Vdc corresponding with 0 ~ negative full scale
Table 1.1: Typical output voltage v.s. flow rate.
Typical Voltage
(Vdc)
Flow Rate
(SLPM)
0
25
50
100
150
200
250
flow rate. Using full scale 250 SLPM and ±300 SLPM
as examples, the typical analog output v.s. flow rate is
illustrated in Table 1.1, Table 1.2 and Figure 1.1, Figure
1.2. The data is obtained at 5.0 Vdc supply.
Table 1.2: Typical output voltage v.s. flow rate.
Flow Rate Typical Voltage
(SLPM)
(Vdc)
0
0.5
1.0
2.0
3.0
4.0
5.0
-300
-250
-200
-150
-100
-50
0
0
0.42
0.83
1.25
1.67
2.08
2.5
Analog Output Voltage (V)
Analog Output Voltage (V)
5.0
4.5
4.0
3.5
3.0
2.5
2.0
1.5
1.0
0.5
0.0
50
100
150
200
+50
+100
+150
+200
+250
+300
2.92
3.33
3.75
4.17
4.58
5.0
Typical Output Curve (±300 SLPM)
Typical Output Curve (250 SLPM)
0
Flow Rate Typical Voltage
(SLPM)
(Vdc)
250
5.0
4.5
4.0
3.5
3.0
2.5
2.0
1.5
1.0
0.5
0.0
-300
-200
Mass Flow Rate (SLPM)
Figure 1.1: The typical analog output curve of
FS6022A with the full scale of 250 SLPM.
-100
0
100
200
300
Mass Flow Rate (SLPM)
Figure 1.2: The typical analog output curve of
FS6022B with the full scale of ±300 SLPM.
1.4 Pressure Drop Characteristics
The FS6022 is packaged with a low pressure drop
design. The pressure drop is measured throughout the
entire measurement range. The results are shown in
Table 1.3 and Figure 1.3.
Flow Rate (SLPM) 0
50
100
150 200 250
Presure Drop (Pa) 0
30
90
180 300 450
400
Pressure Drop (Pa)
Table 1.3: FS6022 pressure drop v.s. flow rate.
500
300
200
100
0
0
50
100
150
200
250
Mass Flow (SLPM)
Figure 1.3: FS6022 pressure drop v.s. flow rate.
www.siargo.com
FS6022 (VA.4)
4/7
MEMS Mass Flow Sensors
2. Electrical Interface
2.1 Pin Definition
The FS6022 provides a 5-pin interface. The output
connecting cable comes with the sensor, upon
request. The sensor pin layout is shown in Figure 2.1
and the cable color code is defined in Table 2.1.
2.2 Pin Description
VCC and GND: The FS6022 requires a power supply
of 5±1% Vdc. The voltage is internally filtered and
regulated to power the circuit. The accuracy of the
power supply will influence the sensor output and the
±1% accuracy requirement should be met to the
specified performance. The sensor consumes less
than 10 mA normally and the minimum supply current
must be larger than 10 mA.
Vout: The analog output pin provides 0 ~ 5 Vdc
corresponding with the specified flow range 0 ~
full scale.
Flow direction
Figure 2.1: FS6022 pin layout.
Table 2.1: FS6022 cable color code.
Pin #
1
Color
Blue
Definition
TX (RS232 TTL)
2
Green
Vout, Analog output
3
4
Red
Black
VCC, Power supply
GND, Ground
5
Yellow
RX (RS232 TTL)
TX and RX: The RS 232 communication is
bidirectional. TX is the transmit pin for RS 232
and it sends out signal from the sensor. RX is the
receive pin and it receives signal. Using these
two pins together with GND pin, the sensor's
operation mode and response time can be
configured, and the voltage as well as flow rate
can be obtained.
3. Mechanical Dimensions and Mountings
3.1 Mechanical Interface
The FS6022 provides standard ISO-22mm medical
connection and can be readily applied to personal
ventilators and/or CPAP machines. The inlet is a male
interface and the outlet is a female one. See Figure 3.1
for details.
3.2 Mechanical Dimensions
The sensor has a total size of 65.3 X 30 X 38.5 mm, as
shown in Figure 3.1.
Figure 3.1: The FS6022 mechanical dimensions.
www.siargo.com
FS6022 (VA.4)
5/7
MEMS Mass Flow Sensors
4. Cleaning and Sterilization
Then rinse the sensor by immersing it under DI
water for 30 min. Change with clean DI water for
another 30 min.
The FS6022 can be sterilized for reuse.
The
sterilization can be performed with liquid, gas and ultra
violet. For autoclave, please contact manufacturer.
The liquid sterilization is described as the following.
Dry the sensor in oven at 65 °C for 120 min.
If sterilize with gas or ultra-violet, simply put the sensor
in the sterilizing environment for 30 min.
Immerse the FLOW CHANNEL of the sensor into
the sterilizing solution. Make sure the entire sensor
body is within the solution but not the electronic cover,
stay in for 30 min.
Notice: During sterilization, the sensor must be
powered off.
5. Ordering Guide
5.1 Sensor Selection
The sensor part number is composed of the product model number and suffix indicating the full scale flow rate,
mechanical connection, output format as well as the application gas. Refer the following for details.
FS6022
Gas (A-air; B - N2O; C - CO2; N - N2; O - O2; R - Ar;
for other gases , please contact manufacturer.)
Output2 ( V - Analog, CV - Both analog and RS232 TTL)
Connection ( ISO - ISO 22mm)
Full scale Flow Rate1 (selectable, 250, 300 SLPM)
Flow direction (A - uni-directional; B - bi-directional)
1 Max. flow rate number only, for example, 250 meaning full scale flow rate of 250SLPM.
2 The sensor shipped with standard analog output. RS232(TTL) is optional.
5.2 Order Contact and Customer Support
The sales offices are listed at the end of this document. For small quantities, the order can be placed either through
Siargo website: www.siargo.com or the convenient sales office. For large quantities, please contact the sales office,
distributors or sales representatives.
Siargo is making every effort to ensure the quality of the products. In case of questions and/or product supports, please
contact customer service listed at the end of the document.
Important Notices
Wetted Materials and Compatibility
The sensor body is made of medical compatible
plastics. The sensor chip comprises of silicon, silicon
nitride and silicon dioxide and the sensor chip surfaces
are passivated with silicon nitride and silicon dioxide.
The electronic sealing is provided by RTV (room
temperature vulcanizing) silicone sealant WR-704
composed of HOCH3 (SiO) nCH3H.
Compliance Statement
All components of this product are RoHS compliant.
The product fully complies with CE norm EN61000-61 through 61000-6-4, EN50081-2 through 50082-2
and EMC directive 89/336/EEC.
www.siargo.com
Cautions for Handling and
Installations
The product at the time of shipment is fully inspected
for product quality and meets all safety requirements.
Additional safety measures during handling and
installation should be applied. To prevent ESD
(electrostatic discharge) damage and /or degradation,
take customary and statutory ESD precautions when
handling. Do power the product with the correct
polarity, voltage & amperage. All precautions and
measures for electrical voltage handling must apply.
The product sealing is ensured to work under working
pressure of 0.2MPa and is leakage proof before the
shipment. But cautions and further leakage test are
important at installation as well since any leakage
could cause severe safety issue.
FS6022 (VA.4)
6/7
MEMS Mass Flow Sensors
This product contains no user serviceable
components. Do not attempt to disassemble,
substitute parts or perform unauthorized modifications
to the product. Doing so will forfeit the terms of the
warranty and cause the liability to any damages
thereafter. It should only be serviced by authorized
personnel. Upon requests, Siargo will provide
necessary technical support and/or training of the
personnel.
Cautions for Product Applications
The product is designed for use with general purpose
gases such as air and nitrogen. It is advised that the
products are best used for non-explosive clean gases.
The sensors cannot be used for gas metrology of
fluoride or fluoride-containing gases. For updates of
the product certification information, please contact
the manufacturer. Use for other gases such as extreme
corrosive and toxic may cause the product
malfunctioning or even severe damages.
Don't expose the product's electronics other than the
inner flow channel to any liquids, the unit does not have
a water proof electronics. For medical sterilization
procedure, please use the reference stated in this
manual. Don't flow gas in conditions that can cause
condensing water vapor to be trapped inside the unit
during operation as the accuracy could be significantly
influenced.
It is suggested to design your application so that
nominal flow rate is approximately 70% of the full scale
flow rating of the sensor. Don't use a sensor with a flow
range at the extreme cases, for instance, don't use a
250 SLPM sensor for a 2.5 SLPM application.
Warranty and Liability
(Effective January 2010)
Siargo warrants the products sold hereunder, properly
used and properly installed under normal
circumstances and service as described in this user
Contact Information
Headquarters
Siargo Ltd.
2041 Mission College Blvd., Suite 250,
Santa Clara, California 95054 USA,
Phone: +01(408)969-0368
Email: info@Siargo.com;
manual, shall be free from faulty materials or
workmanship for 180 days for OEM products, and 365
days for non-OEM products from the date of shipment.
This warranty period is inclusive of any statutory
warranty. Any repair or replacement serviced product
shall bear the same terms in this warranty.
Siargo makes no other warranty, express or implied
and assumes no liability for any special or incidental
damage or charges, including but not limited to any
damages or charges due to installation, dismantling,
reinstallation or any other consequential or indirect
damages of any kind. To the extent permitted by law,
the exclusive remedy of the user or purchaser, and the
limit of Siargo's liability for any and all losses, injuries or
damages concerning the products including claims
based on contract, negligence, tort, strictly liability or
otherwise shall be the return of products to Siargo, and
upon verification of Siargo to prove to be defective, at
its sole option, to refund, repair or replacement of the
products. No action, regardless of form, may be
brought against Siargo more than 365 days after a
cause of action has accrued. The products returned
under warranty to Siargo shall be at user or
purchaser's risk of loss, and will be returned, if at all, at
Siargo's risk of loss. Purchasers or users are deemed
to have accepted this limitation of warranty and liability,
which contains the complete and exclusive limited
warranty of Siargo, and it shall not be amended,
modified or its terms waived except by Siargo's sole
action.
This warranty is subject to the following exclusions:
(1) Products that have been altered, modified or have
been subject to unusual physical or electrical
circumstances indicated but not limited to those
stated in this document or any other actions which
cannot be deemed as proper use of the products;
(2) Siargo does not provide any warranty on finished
goods manufactured by others. Only the original
manufacturer's warranty applies;
(3) Products re-sold to the third parties.
Europe:
IDENTIC Stefanie Trojan
Röhlichstraße
Supplier19in Japan
68723 Oftersheim - Germany
Marubeni Information Systems Co., Ltd.
Device
Solutions Department
Tel:
+49-(0)6202-923778
Mobil:
+49-(0)151-19674551
3-12-18
Shibuya,
Fax:
+49-(0)6202-923779
Shibuya-ku,
Tokyo 150-0002 Japan
Email:
trojan@identic.de
Phone:
+81-3-5778-8661
This document is intended for distribution to customer(s) only. Siargo and its subsidiaries reserve the rights to
change the specifications and/or descriptions without prior notice.
www.siargo.com
FS6022 (VA.4)
7/7