Mitutoyo TM-500 Series User`s manual

MANUAL No.4769AԘ
SERIES No.176
TM-500 Series
TOOLMAKER’S
MICROSCOPE
User s Manual㩷
’
Read this User's Manual thoroughly
before operating the instrument. After reading,
retain it close at hand for future reference.㩷
PREFACE
Thank you for purchasing the Mitutoyo TM-500 series Measuring Microscope.
䃂This User's Manual explains the hardware operations of the Mitutoyo TM-500 series and the
precautions to be observed during operation. To obtain the best possible performance and
longest service life from your TM-500 series Measuring Micro-scope, please read this user's
manual thoroughly. Be sure to read PRECAUTIONS before using this Measuring
Microscope.
䃂After reading this user's manual retain it for future reference.
CONVENTIONS USED IN THIS MANUAL
The following visual cues are used throughout this manual to identify different types of information:
Indicates that the operator should exercise care to avoid danger of fire, explosion, or
personal injury.
DANGER
Indicates that operating the instrument in this manner may damage it or may cause it
to malfunction.
㩷
CAUTION㩷
Draws attention to important information, recommended operation techniques, or
helpful tips.
Gives reference location for further information on topic.
㩷
Highlights installation, measurement, or other procedures.
㩷㩷㩷
PREFACE /CONVENTIONS USED IN THIS MANUAL
i
PRECAUTIONS
(1) Relocation
䃂The Measuring Microscope is a precision instrument. Handle it with care when
transporting/relocating. Do not touch the movable members, which must be secured, during
transportation.
䃂Place a cushioning pad between the Micrometer Head and the XY stage, as shown below, to
prevent the Micrometer Head spindle from hitting the table.
Cushioning pad
(2) Installation
Install the TM-500 in a site with:
䃂 as little dirt, dust, and humidity as possible. Put the supplied dust cover on it if it is not
going to be used for an extended period of time.
䃂no vibrations.
䃂no sudden temperature changes, which may result if the site is subjected to direct sunlight.
(3) Explosive Hazard
䃂Do not operate the Measuring Microscope in the presence of explosive gas.
(4) Power Supply
䃂Depending on the installation site, voltage fluctuation may cause a change in light intensity
or flickering of the illumination bulb. Although this does not affect measurement, use a
voltage stabilizer if a stable light intensity is required.
䃂Use an AC power supply which is isolated from high-voltage, large-current machinery.
High-voltage, large-current machinery often emits a substantial amount of electric noise due
to surge currents, which can adversely affect this measuring system if it draws power from
an AC outlet often provided on such equipment. Therefore, the Measuring Microscope
should draw power from a separate outlet. The power cable of the Measuring Microscope
should run as far apart as possible from such noise sources.
ii
PRECAUTIONS
䃂Only use the power cord that is supplied with the instrument. For a replacement power cord,
contact Mitutoyo.
䃂Only use the supplied replacement fuse or a fuse with identical specifications (type, nominal
voltage and current).
(5) Ground Positively
䃂Ground the Measuring Microscope positively, especially if it must be installed near
equipment emitting substantial amounts of electric noise. To do this connect the grounding
wire from the Measuring Microscope to the body of a piece of equipment, which also must
be grounded. The grounding wire should be as short as possible and should not be wound
into a loop or coil.
(6) Do Not Disassemble
㩷 䃂There are high-voltages inside the Measuring Microscope. Do not attempt to disassemble it
unless otherwise specified.
WARRANTY
In the event that the Mitutoyo Measuring Microscope TM-500 series should prove
defective in workmanship or material, within one year from date of purchase for use, it
will be repaired or replaced, at our option, free of charge upon its prepaid return to us.
PRECAUTIONS/WARRANTY
iii
CONTENTS㩷
PREFACE........................................................................................................................... γ
CONVENTIONS USED IN THIS MANUAL ................................................................... γ
PRECAUTIONS................................................................................................................. δ
WARRANTY ..................................................................................................................... ε
1. Outline .............................................................................................................................. 7
1.1 Description.............................................................................................................. 7
1. 2 Name of Each Part ................................................................................................. 8
2. Installation and Setup ..................................................................................................... 11
2.1 Package Contents .................................................................................................. 11
2.2 Installation Site ..................................................................................................... 11
2.3 Setting-up.............................................................................................................. 12
2.4 Checking and Adjustment..................................................................................... 13
2.4.1 Checking the reticle position against the XY stage movement direction .. 13
2.4.2 Checking the centering of the reticle ......................................................... 13
2.4.3 Adjusting the reticle ................................................................................... 14
3. Measurement .................................................................................................................. 17
3.1 Preparations for Measurement .............................................................................. 17
3.1.1 Precautions for measurement ..................................................................... 17
3.1.2 Replacing the lenses................................................................................... 18
3.1.3 Fixing the workpiece.................................................................................. 18
3.1.4 Illumination modes..................................................................................... 19
3.1.5 Replacing reticles ....................................................................................... 20
3.1.6 Adjusting the diopter.................................................................................. 20
3.1.7 Bringing the measuring surface into focus................................................. 21
3.1.8 Positioning the workpiece .......................................................................... 21
iv
CONTENTS
3.2 Measurement......................................................................................................... 22
3.2.1 Dimensional measurement ......................................................................... 22
3.2.2 Angle measurement.................................................................................... 23
3.2.3 Template matching inspection ................................................................... 24
3.2.4 Step measurement ...................................................................................... 24
4. Maintenance ................................................................................................................... 25
4.1 Cleaning and Lubrication...................................................................................... 25
4.2 Inspection.............................................................................................................. 25
4.3 Replacing Consumable Parts ................................................................................ 27
4.4 Consumable Parts.................................................................................................. 29
5. Troubleshooting.............................................................................................................. 31
6. Specifications ................................................................................................................. 35
7. Optional Accessories ...................................................................................................... 37
8. Reference Diagrams...................................................................................................... 39
SERVICE NETWORK....................................................................................................... 41
CONTENTS
v
vi
CONTENTS
㪈
1.1
Description
Outline㩷
This chapter outlines the Mitutoyo Toolmaker’s Microscope TM-500 series and
gives the name of each part.
The Mitutoyo Toolmaker’s Microscope TM-500 series (TM- 505 and TM-510) are easy-to-use,
compact-size Toolmaker’s Microscopes that feature a vertical supporting column. Designed with
measurement of workpiece contours and inspection of surface features in mind, the TM-500 series
supports a wide range of applications from shop-floor inspection, measurement of tools and
machined parts, to precision measurement of test tools in a measuring room.
z A long vertical working distance (67mm) and erecting image have improved operability.
z The XY stage is mounted on a compact body to support wide travel ranges (50mm㬍50mm
for TM-505, 100mm㬍50mm for TM-510) for effective measurement.
z Fine/coarse focusing can be performed with a single focusing knob.
z The angle dial built into the eyepiece portion of the optical tube allows easy angle
measurement.
1. Outline
7
1.2
Name of Each Part
8
1
9
2
3
10
11
4
12
5
13
6
14
7
1. Eyepiece
2. Diopter adjustment ring
3. Eyepiece mount
4. Optical tube
5. Surface illuminator
6. Objective
7. XY stage
8. Angle dial
9. Angle dial clamp screw
10.Vernier
11.Vernier clamp screw
12.Focusing knob
13.Control panel
14.Power panel
8
1. Outline
13.
Control panel
Power switch
Contour illumination switch
Surface illumination switch
Light control knob
1. Outline
9
14.
Power panel (for standard model)
Surface illuminator
cable connector
GND terminal
The voltage setting
method display
AC inlet
Fuse holder
Voltage selector
Power panel (for CE correspondences)
AC inlet
Fuse holder
Surface illuminator
cable connector
Voltage selector
10
1. Outline
GND terminal
㪉
2.1
Package Contents
Installation and Setup㩷
This chapter lists the contents of the TM-500 series package and describes the
setup and adjustment procedures.
Standard accessories
Name
1.
TM-505R
TM-510
TM-510R
176-138
1
1
1
1
2.
Eyepiece㧔15˜㧕 176-116
1
1
1
1
3.
Lens cap
1
1
1
1
4.
Cross-hair line reticle
1
1
1
1
5.
Surface illuminator
1
1
1
1
6.
Micrometer Head
㧙
2
㧙
2
7.
Mounting screw
㧙
㧙
2*
2*
8.
Reticle setting screw 200624
1
1
1
1
9.
Bulb setter
1
1
1
1
10.
Allen key nominal 3
1
1
1
1
11.
Vinyl cover
1
1
1
1
12.
Spare bulb 㧔24V㧕
1
1
1
1
13.
Objective㧔2˜㧕
511187
176-126
380597
511188
538616
512555
383038
Spare fuse㧔1A㧕not CE
350279
1
1
1
1
Spare fuse㧔1A㧕for CE
384204
1
1
1
1
14.
Power cord
1
1
1
1
15.
Grounding wire
1
1
1
1
16.
User’s Manual
1
1
1
1
17.
2.2
TM-505
Warranty
1
1
1
1
*㧦Keep the mounting screws in the TM-510/510R package. They are provided to install the optional
mounting jigs on the XY stage.
Installation Site
Install the Measuring Microscope in a place which is free from vibration and dust. Exposing the
instrument to vibrations over long periods of time can deteriorate its measuring accuracy. Dust
adversely affects the optical parts, the XY stage, and moving parts.
2. Installation and setup
11
2.3
Setting-up
1. Install the Micrometer Head on the XY stage.
Loosen the hex-socket head screw on the bracket. Fully insert the stem of the Micrometer Head . Then,
tighten the hex-socket head screw with the stem in place.
XY stage
Clamp screw
Bracket
Hex-socket head screw
The clamp screw is provided to secure the spindle of the Micrometer Head. If using a Micrometer Head
with a fitting hole in the stem, insert the stem so the hole is aligned with the clamp screw. If this puts the
scale on the Micrometer head in a poor position for viewing the zero graduation, adjust the scale position
by turning the Micrometer Head sleeve. If using a Micrometer Head with no hole to clamp the spindle,
lightly tighten the clamp screw.
2. Connect the surface illuminator cable to the connector on the power panel, which is at the back of the
Measuring Microscope. Insert the cable firmly into the connector and secure it with the nut.
3. Set the voltage selector plug to the supply voltage as follows.
When the voltage selector on the back panel is as in the
upper left figure, the combination of two slide switches on
the upper and lower sides performs a voltage setup. Set up
the voltage according to the voltage setting method display.
Voltage setting
method display.
Voltage selector
When the voltage selector on the back panel is as in the
lower left figure, remove the fuse holder by turning it
counterclockwise using a screw driver.
Turn the voltage selector with a coin, etc., and align the
rated voltage display with the position of the arrow. Replace
the fuse holder as before.
Voltage selector
12
2. Installation and setup
Fuse holder
2.4 Checking and Adjustment
2.4.1 Checking the reticle position against the XY stage
movement direction
1䋮 Place a small workpiece on the stage glass and bring it into focus.
2䋮 Turn the Micrometer Heads to align an edge of the workpiece with the center of the cross-hair.
3䋮 While turning the Micrometer Head to move the workpiece left and right, turn the angle dial so
that the horizontal cross-hair is oriented to coincide with the direction of the stage movement.
Small workpiece
㪋㪅
Loosen the vernier clamp screw. Align the “0” graduation on the angle dial with that of the
vernier scale. Ensure the margin is sufficient for adjusting the vernier scale position. If space for
adjusting the vernier scale position is limited, re-adjust the vernier scale position by referring to
"2.4.3 (1) Adjusting the reticle to the XY stage movement direction".㩷
㩷
2.4.2 Checking the centering of the reticle㩷
To perform dimensional measurement by turning the angle dial or after replacing the reticle, align the
cross-hair with the center of rotation of the angle dial, as follows.㩷
1䋮 Place a small workpiece on the stage glass and bring it into focus.
2䋮 Turn the Micrometer Heads to align an edge of the workpiece with the center of the cross-hair.
3䋮 Turn the angle dial 180q. Make sure the edge of the workpiece remains within 3μm of the center of the
cross-hair. If it is not within 3μm, adjust the center of the reticle by referring to "2.4.3 (2) Centering
the reticle".
2. Installation and setup
13
2.4.3 Adjusting the reticle㩷
(1) Adjusting the reticle with the XY stage moving direction㩷
㩷
Angle
dial cover
Screws (4 pcs.)
Eyepiece mount
Angle dial
Vernier scale
Angle dial clamp
knob
Vernier scale
clamp knob
Fixing screws (4 pcs.)
㩷㩷㩷㩷㩷
Adjustment screws (4 pcs.)
㩷
㩷
㪈䋮 Remove the clamp knobs from the angle dial and vernier scale.㩷
㪉䋮 Remove the four screws from the angle dial cover and remove the cover.㩷
3㧚 Screw-in the clamp knobs on the angle dial and vernier scale.
4㧚 Approximately center the vernier scale in the adjustable range. Then secure it with the clamp
knob.
5㧚 Align the “0” graduation of the angle dial with that on the vernier scale. Then, secure the angle
dial with the clamp knob.
6㧚 Loosen the adjustment screws and fixing screws (4 pcs. each) so that the eyepiece mount can be
moved manually.
㪎䋮 While looking into the eyepiece, adjust the position of the eyepiece mount so that the horizontal
cross-hair is oriented to coincide with the direction of the stage movement.㩷
8㧚 Temporarily secure the eyepiece mount by lightly tightening the fixing screws.
㪐䋮 Centering the reticle as described in "(2) Centering the reticle" below. Firmly secure the
eyepiece mount by fully tightening the fixing screws.㩷
㪈㪇䋮Remove the clamp knobs from the angle dial and vernier scale.㩷
㪈㪈䋮Replace the angle dial cover and secure it to the optical tube with the four screws.㩷
㪈㪉䋮Screw-in the clamp knobs on the angle dial and vernier scale.㩷
14
2. Installation and setup
(2) Centering the reticle
1䋮 Place a small workpiece on the stage glass. Turn the Micrometer Heads to align an edge of the
workpiece with the center of the cross-hair.
2䋮 Rotate the angle scale disc 180q and read the displacement between the edge of the workpiece
and the center of the cross-hair.
3䋮 Remove the four screws from the angle dial cover and dismount it. Slightly loosen the four fixing
screws.
4䋮 Adjust the eyepiece mount position with the four adjustment screws to minimize the
displacement between the edge of the workpiece and the center of the cross-hair. Centering is
easily performed by moving the eyepiece mount by half the displacement in both the X and Y
directions.
Two pairs of adjustment screws are located at the opposite sides (for adjusting the X and Y
displacements). Adjust the screws in pairs. Loosen one on one side, and then tighten its counterpart
on the other side to adjust the displacement.
5䋮 Turn the Micrometer Heads to align an edge of the workpiece with the center of the cross-hair.
Rotate the angle dial 180q and check the displacement.
6䋮 Repeat steps 1, 2, 4, 5 until the displacement is within 3μm.
7䋮 Confirm that the four adjustment screws are fully tightened.
8䋮 Tighten the four fixing screws and replace the angle dial cover.
1㧚
2㧚
4㧚
Small workpiece
2. Installation and setup
15
16
2. Installation and setup
Measurement㩷
㪊
This chapter describes the preparations for measurement and the
measuring procedures.
3.1 Preparations for Measurement
3.1.1Precautions for measurement
z
Installation site
When selecting an installation site, take vibration, dust and humidity into due consideration.
Vibration can affect measuring accuracy. Dust and humidity can impair optical parts, such as the
objective and prism, and the XY stage and moving parts.
z
Precaution for operation
If focusing, making measurements, or mounting work pieces, take surrounding conditions into
account. Be careful not to bump the objective, stage glass, etc.
z
Objective and Eyepiece
The supplied objective and eyepiece were finely adjusted before shipment.
To maintain performance and accuracy, handle them with care and do not disassemble. Do not
allow the surface of the lens to be scratched or to be exposed to machine oil. If the lens is soiled,
clean it as described in “4.1 Dusting and Applying Oil”.
z
Stage glass
Since workpieces are mounted on it, the stage glass is likely to be scratched or even severely
damaged. Dust the workpiece before placing it on the stage glass. Exercise care so as not to
bump the stage glass with the workpiece. Do not slide the workpiece on the stage.
3. Measurement
17
3.1.2 Replacing the lenses
An objective (2x) and an eyepiece (15x) are provided with a total magnification of 30x.
1䋮 The following objectives and eyepieces are available as optional accessories.
z Eyepiece (10x, 20x)
z 5x Objective (working distance: 33mm), 10x Objective (working distance: 14mm)
2. To mount the eyepiece, insert it into the eyepiece mount. The objective can be screwed into the
optical tube.
Before dismounting the objective, remove the fixture clamping down the surface illuminator from
㩷 the objective. The fixture is attached to the objective. The O-ring is between the fixture and the
objective. Pull down the fixture by gently swinging it back and forth.
3.1.3 Fixing the workpiece
Once the workpiece is mounted, secure it to the stage glass. Use the fixing jigs secured to the
T-groove on the XY stage if required.
The workpiece must be positioned so that the measuring surface faces the objective.䇯
The following optional fixing jigs are available.
1. Swivel center support (No.176-105 for TM-505/505R, 172-197 for TM-510/510R)
Used to secure cylindrical workpieces (with center hole) and screws.
2. V-block (No.172-378)
Used to mount cylindrical workpieces (without center hole).
3. Holder with clamp (No.176-107)
Used to mount thin flat workpieces.
4. Chart clip (for XY stage) No.990561 (for TM-505/505R)
Used to mount thin flat workpieces (securing to the T-grooves on the XY stage).
Swivel center support
No.176-105
No.172-197
V-block
No.172-378
Chart clip䋨for XY stage䋩
No.990561
18
3. Measurement
Holder with clamp
No.176-107
3.1.4 Illumination modes
The TM-500 series supports the following illumination modes. Select appropriate illumination mode
according to your application.
(1) Contour illumination
The contour illumination generates the contour image of a workpiece, and is suited for measurement
and inspection of workpiece contours. The illuminator is equipped with a green filter.
(2) Surface illumination
Surface illumination shows the surface of a workpiece, and is used in observation and inspection of
workpiece surfaces. Adjust the angle and orientation of this illuminator so the workpiece surface can
be observed under optimum conditions.
(3) Simultaneous use of contour and surface illuminations
Both the contour and surface of a workpiece can be observed simultaneously.
Power switch
Contour illumination switch
Surface illumination switch
Light control knob
3. Measurement
19
3.1.5 Replacing reticles
To replace reticles, use the supplied reticle setting screw, as described below.
1. Pull up and remove the eyepiece.
2. Screw the reticle setting screw into the reticle. Pull out the reticle setting screw along with the
reticle.
3. Screw the reticle setting screw into the reticle to be mounted. Insert the reticle into the eyepiece
mount.
The reticle is provided with a positioning pin. Fit the pin in the groove on the eyepiece mount and
insert the eyepiece as far as possible.
4. Remove the reticle setting screw and insert the eyepiece.
Reticle setting screw
Reticle setting screw
Reticle
Reticle
Positioning pin
Positioning pin
3.1.6 Adjusting the diopter
While looking into the eyepiece, turn the diopter adjustment ring until the reticle can be seen
sharply.
Diopter adjustment ring
Focusing knob
20
3. Measurement
3.1.7 Bringing the measuring surface into focus
Bring the measuring surface into focus by moving the optical tube up and down with the focusing
knob. Look into the eyepiece to make sure the cross-hairs are kept in ocular focus during this
focusing operation.
If moving the optical tube, be careful, especially if the workpiece is stepped or is secured with
fixing jigs, not to bump the workpiece.
CAUTION
3.1.8 Positioning the workpiece
Align the measuring direction of the workpiece with the traversing direction of the stage.
䋨䋱䋩Follow the procedure in "2.4.3 (1) Adjusting the reticle with the XY stage moving
direction".
䋨䋱䋩Move the workpiece or the fixing jigs to align the measuring direction of the workpiece with the
cross-hair reticle.
After making the above adjustment, confirm that the workpiece is parallel with the traveling direction
by moving the XY stage.
3. Measurement
21
3.2 Measurement
3.2.1 Dimensional measurement
Align a measuring point on the workpiece with one of the cross-hairs and take the reading from the
Micrometer Head. Then, move the XY stage by turning the Micrometer Head and align another
measuring point with the same cross-hair and take the reading at this point. The difference between
the two readings represents the dimension between the two measuring points.
A Digimatic Head and Digital Counter can be used, in place of the Micrometer Head, for digital
display of the displacement. They also eliminate reading errors. Since the zero-set button zeroes the
counter at any position, the displacement can be read directly.
22
3. Measurement
3.2.2 Angle measurement
Angles are measured with the angle dial, using either of the following two procedures.
(1)
(2)
(1) Align an edge of the workpiece with the cross-hair reticle and align the end edge with the center
of the cross-hair. Turn the angle dial to align the cross-hair with the other edge of the workpiece.
Take readings from the angle dial.
(2) Align two edges of the workpiece with the same cross-hair, one after another, by turning the
angle dial and moving the XY stage. Take readings from the angle dial.㩷
1䋮In both procedures, measuring points on the workpiece are aligned with a cross-hair, one after
another. The angle is determined from the difference in readings.
2䋮The resolution of the angle dial is 1q with the main scale and 6' with the vernier scale.
㩷 㩷 㩷 㩷 㩷 <Reading the angle dial>
Main scale䋺34¡
34¡42㶅
Vernier scale䋺42㶅
3䋮The zero position of the angle dial can be adjusted by turning the vernier scale. This allows the
angle measurement origin to be set to 0.
After turning the vernier scale, check the reticle position. Refer to "2.4.3 (1) Adjusting the reticle
against the XY stage moving direction" if necessary.
CAUTION
3. Measurement
23
3.2.3 Template matching inspection
This Measuring Microscope allows inspection of screw threads and involute gear teeth using the
optional template reticles.
To perform template matching inspection, set the appropriate optional template reticle according to
㩷
the procedure in "3.1.5 Replacing the reticle".
For information about the various template reticles, see "7. Optional Accessories".
3.2.4 Step measurement
Stepped dimensions can be measured using the optional height measurement attachment and a dial
indicator.
This measurement is performed by bringing the measuring faces in focus. A high-precision
measurement cannot be made if using a lens with a large depth of focus. To obtain high-accuracy
CAUTION
measurements, use a high-magnification lens with a shallow depth of focus, as shown below.
䃂30x lens with a depth of focus of approximate 0.12mm
䃂150x lens with a depth of focus of approximate 0.02mm
Attach the height measurement attachment to the top face of the column as shown in the figure below.
Use a gauge block that is appropriate for the optical tube position.
Dial indicator
Mounting screw
Height measurement attachment
Gauge block
Column
24
3. Measurement
㪋
Maintenance
This chapter describes the daily and periodical inspection and maintenance
required to maintain the performance of this microscope.
4.1 Cleaning and Lubrication
(1) Main unit
Periodically apply a thin layer of grease over the slide guide surfaces and rack of the optical tube using
a brush.
(2) XY stage
Apply a thin layer of spindle oil to guide rails. After dusting the stage glass wipe it gently with a soft
cloth.
(3) Eyepiece and objective
Since the optical glass used for lenses is soft and subject to scratches, always use an air-blower or a
feather to dust the lens surface. To remove contaminants such as oil and fingerprints, gently wipe them
in a circular motion with gauze dampened in high-grade alcohol.
4.2 Inspection
To maintain this microscope in prime condition, periodically inspect the parts specified below. If the
microscope is not operating perfectly, inspect it in detail according to the procedure in “5.
Troubleshooting”.
(1)Connecting parts
Turn off the power switch and pull out the power cord from the AC outlet to prevent electric
shocks.
DANGER
z Check the power cord, input connector (AC inlet), voltage selector, GND terminal, surface
illuminator connector, and other joints for looseness and poor connections.
(2)Power and illumination switch and light control knob
z Check the power switch
z Check that the contour and surface illuminators light by turning on the illumination switch.
z Check that the light intensity of each illuminator changes by turning on the light control knob.
4. Maintenance
25
(3)Focusing knob
z Check this knob for any abnormal tightness, play, unevenness, and sound.
(4)XY stage
z Check the stage glass for scratches and contaminants.
z Move the XY stage over the measuring range by hand to check for any abnormal tightness, play,
unevenness, and sound. (Perform the same cheek on the stage by turning the micrometer heads.)
(5)Angle dial
z Loosen the angle dial clamp knob and turn the dial to check for any abnormal tightness, play,
unevenness, and sound.
(6)Field of view
z Look into the eyepiece under contour illumination and check the entire filed of view for
vignetting and uneven illumination.
(7)XY stage feeding accuracy
z This inspection will be affected by the measuring environment, alignment error, and other
adverse conditions. Keeping these factors in mind, check the feeding accuracy by measuring a
workpiece or a standard scale with an appropriate dimension of 5mm.
1. Position a workpiece, for which accurate dimensions are known, on the stage glass and
bring it into focus.
2. Align a measuring point on the workpiece with one of the cross-hairs, according to the
moving direction of the workpiece.
3. Obtain the dimension from the readings on the Micrometer Head. Refer to “3.2.1
Dimensional measurement”.
4. Measure the X- and Y-axis dimensions of the workpiece.
If the difference between the measured and nominal dimensions is less than 5Ǵm (for any 5mm
travel range), the XY stage feeding accuracy is adequate.
(8)Resolution
z Position a workpiece on the XY stage and bring it into focus. Check if any region of the image in
the field of view has poor resolution.
26
4. Maintenance
4.3
Replacing Consumable Parts
(1) Replacing the fuse
When a fuse holder is as in the upper left figure
1. Turn off the contour and surface illumination switches and the
power switch, and the pull out the power cord.
2. Insert a screwdriver in the rectangular hole of the fuse holder
and raise the screwdriver grip, then a latch will separate and the
fuse holder will come out from the front.
3. Replace the fuse, and replace the fuse holder.
When a fuse holder is as in the lower left figure
1. Turn off the contour and surface illuminator switches and the
power switch and pull out the power cord.
2. Insert a screwdriver in the rectangular hole on the fuse holder
and turn it counterclockwise, then a latch will separate and a
fuse holder will come out from the front.
3. Replace the fuse, and replace the fuse holder.
(2)Replacing the stage glass
1. While pushing the stage glass in the direction of the leaf spring, raise the glass at the front edge,
and then remove it.
2. Attach the leaf spring in place and mount new stage glass.
Leaf spring
Stage glass
Since the stage glass is pushed forward with the leaf spring, when you remove the stage glass, be
㩷
CAUTION
careful not to lose the leaf spring.
4. Maintenance
27
(3)Replacing the contour illumination bulb
The bulb remains hot after it has been turned off. Do not replace the bulb until it had cooled down.
㩷
CAUTION㩷
1. Turn off the contour illumination switch and power switch.
2. Remove the stage glass. (See (2) above.)
3. Turn the green filter counterclockwise to remove it.
4. Remove the bulb by turning it counterclockwise with the supplied bulb setter.
5. Mount a new bulb using the bulb setter.
6. Turn on the power switch and contour illumination switch. Check that the bulb lights.
7. Replace the green filter and the stage glass, in this order.
28
4. Maintenance
(4)Replacing the surface illumination bulb
The bulb remains hot after it has been turned off. Do not replace the bulb until it has cooled down.
㩷
CAUTION㩷
1. Turn off the surface illumination switch and power switch.
2. Turn the white filter counterclockwise to remove it.
3. Remove the bulb by turning it counterclockwise with the supplied bulb setter. Mount a new bulb
using the bulb setter.
4. Switch the illuminator select switch knob to the surface illumination.
5. Check that the bulb lights.
6. Turn on the power switch and surface illumination switch. Check that the bulb lights.
7. Replace the white filter.
4.3
Consumable Parts
Order No.
Name
380405
Stage glass 96x96 (for TM-505/505R)
380495
Stage glass 154x96 (for TM-510/510R)
512555
Vinyl cover
383038
Illumination bulb (24V)
350279
Fuse (1A)
for other than CE
384204
Fuse (1A)
for CE
380240
Leaf spring
4. Maintenance
29
30
4. Maintenance
Troubleshooting
㪌
If a problem occurs, diagnose and remedy the problem with the aid of the
following procedures.
(1)The contour illumination bulb will not light.
Check1䋺
Is the power switch turned on?
YES
Check2䋺
No
Turn on the power switch.
Is the contour illumination switch turned on?
YES
No
Turn on the contour illumination switch.
Check3䋺
Is the light control knob properly set?
Turn the knob clockwise to increase the light intensity (if
YES
No
turned fully counterclockwise).
Check4䋺
Is the power cord connected correctly?
YES
Check5䋺
No
Replace the bulb.
No
Replace the fuse.
Is the voltage from the AC outlet normal (supplied)?
YES
Check9䋺
Set the voltage selector to the correct voltage.
Is the fuse normal (conductive)?
YES
Check8䋺
No
Is the bulb normal (conductive)?
YES
Check7䋺
Connect the power cord correctly.
Is the voltage selector set to the correct voltage?
YES
Check6䋺
No
No
Supply power to the outlet.
Is the voltage at the AC inlet on the main unit normal (input)?
YES
No
Replace the power cord.
Contact Mitutoyo.
5. Troubleshooting
31
㩿㪉㪀The surface illumination bulb will not light.
Check1䋺
Is the power switch turned on?
YES
Check2䋺
No
Turn on the power switch.
Is the surface illumination switch turned on?
YES
No
Turn on the surface illumination switch.
Check3䋺
Is the light control knob properly set?
Turn the knob clockwise to increase the light intensity (if
YES
No
turned fully counterclockwise).
Check4䋺
Is the power cord connected correctly?
YES
Check5䋺
No
Replace the bulb.
No
Replace the fuse.
Is the voltage from the AC outlet normal (supplied)?
YES
Check9䋺
Set the voltage selector to the correct voltage.
Is the fuse normal (conductive)?
YES
Check8䋺
No
Is the bulb normal (conductive)?
YES
Check7䋺
Connect the power cord correctly.
Is the voltage selector set to the correct voltage?
YES
Check6䋺
No
No
Supply power to the outlet.
Is the voltage at the AC inlet on the main unit normal (input)?
YES
No
Replace the power cord.
Contact Mitutoyo.
(3)The light intensity of contour illumination cannot be adjusted
(if the contour illumination switch is turn on ).
Check䋺
32
5. Troubleshooting
Is the contour illumination bulb lit?
Refer to "(1) The contour illumination bulb will not light".
YES
No
Contact Mitutoyo.
(4)The light intensity of surface illumination cannot be adjusted
(if the surface illumination switch is turn on ).
Check䋺
Is the surface illumination bulb lit?
Refer to "(2) The surface illumination bulb will not light".
YES
No
Contact Mitutoyo.
(5)The optical tube will not move up and down properly.
If there is any abnormal tightness, play, unevenness, or sound when the optical tube is moved, contact
Mitutoyo. Should this be the case, do not continue to move the optical tube or disassemble it.
(6)The angle dial will not rotate properly.
If there is any abnormal tightness, play, unevenness, or sound when the optical tube is moved, contact
Mitutoyo. Should this be the case, do not continue to move the optical tube or disassemble it.
(7)The XY stage will not properly be fed.
If there is any abnormal tightness, play, unevenness, or sound when the XY stage is fed, contact Mitutoyo.
Should this be the case, do not continue to feed the XY stage or disassemble it. If the feeding accuracy has
deteriorated, determine whether the stage or the Micrometer Head is the problem and contact Mitutoyo.
(8)There is a shadow in the field of view.
Check for:
z Obstruction between the contour illumination bulb and the objective .
z Contaminated reticle.
z Contaminated objective or eyepiece.
If the problem cannot be rectified, contact Mitutoyo.
(9)The resolution in a region of the field of view is poor.
Check for:
z Poor focusing (because of a stepped workpiece).
z Oil soiling the workpiece.
z Improperly mounted objective or eyepiece.
z Contaminated or damaged (such as scratch) objective or eyepiece.
z Contaminated or damaged (such as scratch) reticle.
If the problem cannot be rectified, contact Mitutoyo.
5. Troubleshooting
33
34
5. Troubleshooting
㪍
Specifications
(1)Optical tube
z Optical axis:30qfrom vertical
z Cross-hair reticule supplied
z Adjustable diopter
z Angle dial: Graduation 1q
Angle of rotation 360q
Angle reading 6’ (vernier)
Vernier zero position adjustable
(2)Eyepiece
z Magnification :15˜
z Field number :13
(3)Objective
z Magnification :2˜
z Working distance :67mm (2.63”)
(4)XY stage
Order No.
Dimensions
Stage glass size
Feeding range
㧔if used with gauge block㧕
Maximum height
workpiece
TM-505/TM-505R
TM-510/TM-510R
152˜152mm
240˜152mm
96˜96mm
154˜96mm
50˜50mm
100˜50mm
115mm
107mm
5Kg
5Kg
(5)Transmitted illuminator
z Light source :24V, 2W (special bulb)
z Continuously adjustable light intensity
z Green filter supplied
6. Specifications
35
(6)Surface illuminator
z Light source : 24V㧘2W (special bulb)
z Continuously adjustable light intensity
(7)Mass
TM-505
TM-505R
TM-510
TM-510R
13.5Kg
14.0Kg
14.5Kg
15.0Kg
(8)Main unit dimensions
36
6. Specifications
㪎
Order No.
Optional Accessories
Name
176-105
Swivel-center support㧔for TM-505/TM-505R㧕
172-197
Swivel-center support 㧔for TM-510/TM-510R㧕
176-106
Rotary table㧔for TM-505/TM-505R㧕
172-196
Rotary table 㧔for TM-510/TM-510R㧕
176-107
Holder with clamp
172-378
V-block with clamp
176-203
Twin-bulb surface illumination unit
176-204
Height measurement attachment
176-115
Eyepiece 10˜
176-117
Eyepiece 20˜
176-137
Objective 10˜
176-139
Objective 5˜
176-109
Reticle (Template) Metric screw p=0.25㨪1.0
176-110
Reticle (Template) Metric screw p=1.25㨪2.0
176-111
Reticle (Template) Concentric circles Ǿ0.05㨪4.00mm
176-113
Reticle (Template) Involute gear tooth m0.1㨪1.0, pressure angle 20q
reference rack
Reticle (Template) 55qangle line
176-114
Reticle (Template) 60qangle line
176-120
Reticle (Template) Whiworth screw thread (inch) 60㨪26TPI
176-121
Reticle (Template) Whiworth screw thread (inch)
24㨪18TPI
176-122
Reticle (Template) Whiworth screw thread (inch)
16㨪11TPI
176-123
Reticle (Template) Unified screw thread 80㨪28TPI
176-124
Reticle (Template) Unified screw thread 24㨪14TPI
176-125
Reticle (Template) Unified screw thread 13㨪10TPI
176-112
7. Optional Accessories
37
176-127
Reticle (Template) Unified screw thread NF80㨪28TPI
176-128
Reticle (Template) Unified screw thread NF24㨪14TPI
176-129
Reticle (Template) Unified screw thread NF13㨪10TPI
176-130
Reticle (Template) Involute gear tooth m0.1㨪1.0 pressure 14” 30’ ,
reference rack
176-135
Reticle (Template) Concentric circles Ǿ.01” pitch, maximum diameter Ǿ.2”
176-140
Reticle (Template) ISO metric screw thread p=0.075㨪0.7
176-141
Reticle (Template) ISO metric screw thread p=0.75㨪2.0
176-142
Reticle (Template) ISO unified screw thread 80㨪28TPI
176-143
Reticle (Template) ISO unified screw thread 24㨪14TPI
176-144
Reticle (Template) ISO unified screw thread 13㨪10TPI
990561
Chart clip (for XY stage)
176-366̪
Fiber-optic circular illumination unit
176-344̪
Twin fiber optics illumination unit, twin fiber-optic illuminator
264-140̪
164-161
164-162
ٌ 2D data processing unit QM-Data200
ً
Digimatic micrometer head MHD-50M
Digimatic micrometer head MHD-2̢M
937387
ً Connecting cable (1m): connect between MHD-50M and MUX-10F
965013
ً Connecting cable (2m): connect between MHD-50M and MUX-10F
264-002
ً MUX-10F
ً Connecting cable C: connect between MUX-10F and QM-Data200
̪: The order number differs depending on the shipping destination.
ٌ: When using QM-Data200 it also requires MDH-50M (2 units), connecting cables (2 pcs of either
length), MUX-10F and connecting cable C.
12AAD194
38
7. Optional Accessories
㪏
Reference Diagrams
Top view of XY stage
TM-505/505R
Detail drawing of T-groove
8. Reference Diagrams
39
TM-510/510R
Detail drawing of T-groove
40
8. Reference Diagrams