Alcatel CF Series User`s manual

Realization / Publication : Alcatel Vacuum Technology France - Part Number : 102710 – Ed 11– March 2007
ATP SERIES
LES POMPES TURBOMOLECULAIRES
TURBOMOLUECULAR PUMPS
Manuel de l’utilisateur
User’s manual
Alcatel Vacuum Technology, as part of the
Alcatel-Lucent Group, has been supplying
vacuum pumps, helium and hydrogen leak
detection systems, plasma sensors, vacuum
measurement for several years.
Thanks to its complete range of products, the
company has become an essential player in
multiple applications : instrumentation, Research
& Developement, industry and semiconductors.
Alcatel Vacuum Technology has launched Adixen,
its new brand name, in recognition of the
company’s international standing in vacuum
position.
With both ISO 9001 and 14001 certifications, the
French company is an acknowlegded expert in
service and support, and Adixen products have
the highest quality and environmental standards.
With 45 years of experience, AVT today has a
worldwide presence, through its international network
that includes a whole host of experienced subsidiaries,
distributors and agents.
The first step was the founding of Alcatel Vacuum
Products (Hingham- MA) in the United States, thirty
years ago, reinforced today by 2 others US
subsidiaries in Fremont (CA) and Tempe (AZ).
In Europe, AVTF-France headquarters and its
subsidiaries, Alcatel Hochvakuumtechnik (Germany),
Alcatel Vacuum Technology UK (Scotland), Alcatel
Vacuum Technology Benelux (Netherlands), Alcatel
Vacuum Systems (Italy) and more recently Adixen
Sensistor AB in Sueden (in 2007) form the foundation
for
the
European
partner
network.
In Asia, our presence started in 1993 with Alcatel
Vacuum Technology (Japan), and has
been
strengthened with Alcatel Vacuum Technology Korea
(in 1995), Alcatel Vacuum Technology Taiwan (in
2001), Alcatel Vacuum Technology Singapore, Alcatel
Vacuum Technology Shanghai (China) (in 2004)
This organization is rounded off by more than 40
represensatives based in a variety of continents.
GB 02834 – Ed 04 – March- 2007
Thus, whatever the circumstances, the users of Adixen
products can always rely on quick support of our
specialists in Vacuum Technology.
ATP Series Turbomolecular Pumps
Welcome
Dear Customer,
You have just purchased an
Alcatel turbomolecular pump.
We would like to thank you
and are proud to count you
as one of our customers.
GB 00393 - Edition 10 - March 00
This product has benefited
from Alcatel's many years
of experience in the field of
turbomolecular pump design.
In order to ensure the best
possible performance of
the equipment and your
complete satisfaction in
using it, we advise you to
read this manual carefully
before any intervention
on your pump and to pay
particular attention to the
equipment installation and
start-up section.
APPLICATIONS:
• INDUSTRY
Cryogenics, Freeze drying, Vacuum drying, etc.
• INSTRUMENTATION
Mass spectrometry, surface analysis, etc.
• RESEARCH AND DEVELOPMENT
Ultra-high vacuum systems, Particle accelerators, etc.
• VARIOUS
SEMICONDUCTOR PROCESSES
ADVANTAGES:
The reliable and sturdy design of ATP pumps ensures performance suited to the fields of application concerned.
MANUAL REFERENCE: 102 710
EDITION: 11 - April 2007
Alcatel Vacuum Technology France - ATP User’s Manual
1/1
Contents
ATP User’s Manual
Introduction
■ Introduction to the ATP range and
its associated ACT controllers . . . . . . . . . . . ■ A 10
■ Turbomolecular pump operating principle . . . . ■ A 20
■ The differents versions . . . . . . . . . . . . . . . ■ A 30
■ ACT controllers control modes . . . . . . . . . . . ■ A 40
■ Accessories. . . . . . . . . . . . . . . . . . . . . . ■ A 50
■ Integrable controllers . . . . . . . . . . . . . . . . ■ A 60
■ Technical characteristics of pumps . . . . . . . . ■ A 70
■ Dimensions of pumps . . . . . . . . . . . . . . . . ■ A 80
■ Controller technical characteristics. . . . . . . . . ■ A 90
■ Integrable controller technical characteristics
type Board and Brick. . . . . . . . . . . . . . . . ■ A 100
■ Integrable controller technical characteristics
GB 00394 - Edition 10 - March 00
type OEM Board . . . . . . . . . . . . . . . . . . ■ A 110
Alcatel Vacuum Technology France - ATP User’s Manual
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Contents
ATP User’s Manual
Start-up
■ Safety instructions . . . . . . . . . . . . . . . . . . ■ B 10
■ Pump connections to an installation . . . . . . . . ■ B 20
■ Mechanical connections. . . . . . . . . . . . . . . ■ B 30
■ Water cooling connection . . . . . . . . . . . . . ■ B 40
■ ACT 200 T and 600 T electrical connections . . ■ B 50
■ ACT 200 T and 600 T «Remote Control»
connector wiring . . . . . . . . . . . . . . . . . . . ■ B 60
■ ACT 200 T and 600 T controller start-up . . . . ■ B 70
■ ACT 1000 T electrical connections . . . . . . . . ■ B 80
■ ACT 1000 T «Remote Control»
connector wiring . . . . . . . . . . . . . . . . . . . ■ B 90
■ ACT 1000 T controller start-up. . . . . . . . . . . ■ B 100
■ RS 232 or RS 485 serial link wiring . . . . . . . ■ B 110
■ Detailed description of RS commands
■ Functions of integrable controllers
type Board and Brick . . . . . . . . . . . . . . . . ■ B 130
■ Functions of integrable controller
type OEM Board . . . . . . . . . . . . . . . . . . ■ B 140
2/4
Alcatel Vacuum Technology France- ATP User’s Manual
GB 00394 - Edition 10 - March 00
ACT 200 T and 600 T . . . . . . . . . . . . . . ■ B 120
Contents
ATP User’s Manual
Operation
■ First pump start-up / Safety instructions . . . . . . ■ C 10
■ Turbomolecular pump operation
in a pumping application. . . . . . . . . . . . . . ■ C 20
■ Controlling the pump using the controller
front panel . . . . . . . . . . . . . . . . . . . . . . ■ C 30
■ Displaying the data concerning
ACT 200 T and 600 T pumping . . . . . . . . . ■ C 40
■ ACT 200 T and 600 T «Remote Control»
connector «Ext. safety» contact operation . . . . . ■ C 50
■ Controlling the pump using
communication software. . . . . . . . . . . . . . . ■ C 61
GB 00394 - Edition 10 - March 00
Maintenance
■ Diagnosis and troubleshooting
ACT 200 T and 600 T . . . . . . . . . . . . . . ■ D 10
■ Diagnosis and troubleshooting ACT 1000 T . . . ■ D 20
■ ATP 80/100/150/400
Maintenance frequency . . . . . . . . . . . . . . . ■ D 30
■ ATP 900 Maintenance frequency . . . . . . . . . ■ D 40
Alcatel Vacuum Technology France - ATP User’s Manual
3/4
Contents
ATP User’s Manual
Operation sheets
■ Precautions before maintenance . . . . . . . . . . ■ E 10
■ ATP 80/100 Pumps lubrication . . . . . . . . . . ■ E 20
■ ATP 150/400/900 Pumps lubrication . . . . . . ■ E 30
■ ATP 80/100 bearing replacement . . . . . . . . ■ E 40*
■ ATP 150/400/900 bearing replacement . . . . ■ E 50*
■ Cleaning parts . . . . . . . . . . . . . . . . . . . . ■ E 60*
■ Pump running-in for ATP 80/100/150/400 . . ■ E 70
■ Maintenance counters for
ACT 200 T and 600 T controllers . . . . . . . . ■ E 80
■ ATP 900 pump running-in . . . . . . . . . . . . . . ■ E 90
■ Maintenance counters for
Maintenance
components
Appendix
■ Maintenance parts. . . . . . . . . . . . . . . . . . ■ F 10
■ Pumping curves. . . . . . . . . . . . . . . . . . . . ■ G 10
* These chapters are included into the ball bearing replacement manual delivered with
the specific tool.
4/4
Alcatel Vacuum Technology France- ATP User’s Manual
GB 00394 - Edition 10 - March 00
ACT 1000 T controllers . . . . . . . . . . . . . . ■ E 100
Chapter A
ATP User’s Manual
Introduction
■ Introduction to the ATP range and
its associated ACT controllers . . . . . . . . . . . . . . ■ A 10
■ Turbomolecular pump operating principle . . . . . . ■ A 20
■ The differents versions. . . . . . . . . . . . . . . . . . . ■ A 30
■ ACT controllers control modes . . . . . . . . . . . . . ■ A 40
■ Accessories . . . . . . . . . . . . . . . . . . . . . . . . . ■ A 50
■ Integrable controllers . . . . . . . . . . . . . . . . . . . ■ A 60
■ Technical characteristics of pumps . . . . . . . . . . . ■ A 70
■ Dimensions of pumps . . . . . . . . . . . . . . . . . . . ■ A 80
G 00396 - Edition 09 - February 99
■ Controller technical characteristics . . . . . . . . . . . ■ A 90
■ Integrable controller technical characteristics
type Board and Brick . . . . . . . . . . . . . . . . . . ■ A 100
■ Integrable controller technical characteristics
type OEM Board . . . . . . . . . . . . . . . . . . . . . ■ A 110
Alcatel Vacuum Technology France- ATP User’s Manual
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A 10
Introduction to the ATP range and
its associated ACT controllers
ATP turbomolecular
pumps
5 turbomolecular pump models from 80 to 900 l/s
Main characteristics
-
Ceramic ball bearings lubricated with grease;
Adjustable rotation speed between 6000 and 27000 rpm;
Natural convection, air or water cooling;
"C" version for corrosive application with nitrogen purge;
"HPC" high pressure version for semiconductor applications.
GB 00397 - Edition 02 - February 99
ACT Controllers
3 controller models type ACT
The range of ACT controllers offers flexible use and
interfacing:
- Alphanumeric display;
- Membran keyboard;
- Monitoring of testing and
troubleshooting parameters;
- Dry contact interface for
status signals;
Alcatel Vacuum Technology France - ATP User’s Manual
- Optocoupled control inputs;
- RS 232/485 serial links;
- Operation at all voltages
between 85 and 264 V,
50/60 Hz.
1/2
A 10
Introduction to the ATP range and
its associated ACT controllers
The different products
available
Cooling type
The pumps
ATP 80
ATP 80 C
ATP 100
ATP 100 C
ATP 150
ATP 150 C
ATP 400
ATP 400 C
ATP 900
ATP 900 C
Intake flange
DN 63 ISO-K
DN 100 ISO-K
DN 100 ISO-K
DN 160 ISO-K
DN 200 ISO-K
DN 63 CF-F
DN 100 CF-F
DN 100 CF-F
DN 160 CF-F
DN 200 CF-F
x
x
x
x
x
x
x
x
x
x
x
x
natural convection
air
water
The pumps
ATP 400 HPC ATP 900 HPC
Intake flange
DN 100 ISO-K
DN 200 ISO-K
DN 160 ISO-K
DN 200 CF-F
x
x
Water cooling
The controllers
Cable length
ACT 600 T
ACT 1000 T
1 m / 1,5 m
3.5 m / 5 m
10 m / 20 m
1 m / 1,5 m
3.5 m / 5 m
10 m / 15 m / 20 m
3.5 m / 5 m
10 m
x
x
GB 00397 - Edition 02 - February 99
Electronic boards to be
inserted in a rack
ACT 200 T
2/2
Alcatel Vacuum Technology France - ATP User’s Manual
A 20
Turbomolecular pump operating
principle
Functional diagram
In molecular operation, the gas molecules of the vacuum
system arrive at the pump intake. They are trapped
between the rotating disks of the rotor and the stationary
disks of the stator and carried to the exhaust of the pump.
Inlet
Rotor
Stator
Dynamic
seal
The ceramic ball bearings
lubricated with grease enable
the pump to be fitted in any
position.
Exhaust
Motor
GB 00398 - Edition 01 - March 97
The turbomolecular pump in
an installation
At the turbomolecular pump exhaust, the gases are
evacuated to the atmosphere by a primary pump.
Since the ATP compression rate is set by the design, the ATP
limit pressure is given by that of the primary pump used.
INLET
PRESSURE
Chamber
to be
pumped
ATMOSPHERIC
PRESSURE
Primary
pumping
Secondary
pumping
Secondary vacuum
Alcatel Vacuum Technology France - ATP User’s Manual
Primary vacuum
1/1
A 30
The different versions:
Standard, "C" Corrosive, etc.
Standard Version
Pumping of clean, noncorrosive gases
"C" Version
Corrosive applications
As for the entire range, the pump rotation speed is
adjustable, making it possible to produce the optimum
pumping characteristics for the customer's application.
There are two different types of speed:
- the nominal speed which corresponds to the maximum
rotation speed of the pump, or 27000 rpm;
- the reduced speed, or STANDBY speed, adjustable
between 6000 and 27000 rpm.
The inverted dynamic seal creates a high compression rate
between the bearings and the pump exhaust and thus
minimizes the quantity of corrosive gases in contact with
the bearings.
When used with a gas purge for high flow rate
applications, the dynamic seal can, on its own, provide
excellent protection for ultravacuum applications.
GB 00399 - Edition 01 - April 97
Inlet
Exhaust
N2 Purge
Alcatel Vacuum Technology France - ATP User’s Manual
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A 30
The different versions:
"HPC" High Pressure Corrosive
"HPC" Version
Corrosive version for
semiconductor
applications
These pumps are specially designed for high flow rate
applications in semiconductor applications. They provide:
- increased bearing protection;
- effective bearing protection when the purge is stopped
during equipment calibration;
- a reduction in the purge gas flow rate;
- a long bearing service life in the presence of corrosive
gases.
The pumps can be heated by the water circuit to prevent
condensation of the process gases (water circuit
temperature ≤ 65°C).
Inlet
Exhaust
N2 Purge
2/2
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00399 - Edition 01 - April 97
Water circuit
A 40
ACT controllers control modes
Local mode control
The front panel of the unit
comprises:
Parameter selection and
configuration keys
Parameter and message
LCD display
PREVIOUS
Pump status indicator lights
FAULT
Manual control keys
START
STOP
ENTER
STAND BY
ACT 200 T
Remote controls
The remote control with the
REMOTE CONTROL connector
is used:
2
TURBO PUMP CABLE
- for the remote control of
the START, STOP, STANDBY
functions;
- to replicate the monitoring
parameters available in
the form of dry contacts.
REMOTE CONTROL
GB 00400 - Edition 02 - February 99
RS 232 / 485
1 The remote control
0
1
1
2 RS 232 serial link
The RS232 serial link is used to control and monitor
the pump using a computer.
2 RS 485 serial link
The RS485 serial link allows many pump installation in
a network.
The wiring characteristics are given on B 110.
Alcatel Vacuum Technology France - ATP User’s Manual
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A 40
ACT controllers control modes
The ACT 600 T and
ACT 1000 T controllers are
1/2 rack units
ENTER
PREVIOUS
FAULT
START
STOP
STATUS
STAND BY
GB 00400 - Edition 02 - February 99
ACT 600 T
2/2
Alcatel Vacuum Technology France - ATP User’s Manual
A 50
Accessories
Pump accessories
Screen filter
This filter protects the pump against solid particles.
Mesh size 6 mm.
Filter
P/N
ISO-K
CF-F
Compact filter
DN 200
063158
063159
This filter stops particles ≥ 20 microns and is used in the
event of high densities of dust or risks of implosion when
pumping tubes or lamps.
Filter
P/N
ISO-K
Bake-out collar
DN 63
063000
063115
Inlet flange
DN 100
DN 160
056844
056942
056845
056928
DN 63
063214
Inlet flange
DN 100
DN 160
063215
063216
DN 200
062911
This accelerates degassing and reduces the pressure
lowering times.
Pump type
ATP 80 ATP 100 ATP 150 ATP 400 ATP 900
P/N
GB 00401 - Edition 02 - February 99
200/240V
056934 056934 063028 101926 063324
50/60Hz
100/115V
063180 063180 063181 101927 063323
50/60Hz
Air refill
electrovalve system
This is used to refill the pump with air after stopping
pumping or for a power supply cut.
Venting valves
Powered and controlled by the ACT
Exhaust
DN 25
DN 40
101923*
Powered by the mains and
controlled by the ACT
240V
220V
200V
115V
100V
50/60Hz
50/60Hz
50/60Hz
50/60Hz
50/60Hz
063177
056994
063176
063089
063175
063478
063191
063480
063099
063479
* ATP 900 only
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A 50
Accessories
Material
Flange DN 1 / DN 2
ALU*
63 ISO-K / 25 ISO-KF
63 ISO-K / 40 ISO-KF
63 ISO-K / 50 ISO-KF
63 ISO-K / 63 CF-F
100 ISO-K / 40 ISO-KF
100 ISO-K / 40 ISO-KF
100 ISO-K / 50 ISO-KF
100 ISO-K / 50 ISO-KF
100 ISO-K / 63 ISO-K
160 ISO-K / 50 ISO-KF
160 ISO--K / 63 ISO-K
160 ISO-K / 100 ISO-K
160 CF-F / 100 CF-F
200 ISO-K / 63 ISO-K
200 ISO-K / 100 ISO-K
200 ISO-K / 100 ISO-K
200 ISO-K / 160 ISO-K
200 ISO-K / 160 ISO-K
200 ISO-K / 250 ISO-K
200 CF-F / 250 CF-F
* ALU: Aluminium
Power supply cable
●
●
●
●
●
●
●
●
●
●
●
●
●
●
●
●
●
●
●
●
P/N
063268
063269
063270
063267
062900
068912
062901
068911
062902
062904
062905
062906
062903
062725
062907
062909
062908
062910
066659
066660
** S.S.: Stainless Steel
Connection cable between the pump and the controller.
Cable length
1 m
1.5 m
3.5 m
5 m
10 m
15 m
20 m
2/2
S.S.**
P/N
ACT 200 T
ACT 600 T
ACT 1000 T
105185
A458759
101956
101957
101958
A458477
105086
A458885
101812
101810
101811
105303
A458478
105086
A458885
101812
101810
101811
A458478
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00401 - Edition 02 - February 99
Reduction flanges
A 60
Integrable controllers
ACT 200 T Brick
ACT 200 T Board
ACT 600 T Brick
ACT 600 T Board
Electronic boards can be
substitued to the box version
of the controller
ACT 200 T when the pump
has to be integrated in a
complex installation or
equipment.
They provide the functions of
speed variator, logic control
(controlled by serial link or
dry contacts) and power
supply (ACT 200 T Brick
only) and all the necessary
securities.
The Board version must be
supplied with DC.
ACT 200 T Board
ACT 200 T Brick
Also, theses electronic
boards can be substitued
to the box version of
the controller ACT 600 T.
GB 00402 - Edition 03 - March 00
ACT 600 T Board
ACT 600 T Brick
Controller
Board
Brick
Part Number
ACT 200 T
ACT 600 T
101933
103517
102018
103997
Connect the integrable controllers to the pump by ordering
separately the connection cable (see A 50 page 2).
Alcatel Vacuum Technology France - ATP User’s Manual
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A 60
Integrable controllers
Power supply cable
OEM Board / ATP 80-100
Accessories
The integrable controller
“OEM Board” (derivated
from CFV 100 former
controller range) is a simple
PC Board which can easily
integrated in an installation.
It can drive both ATP 80 and
ATP 100 pumps, in local or
by remote control.
To connect the PC Board ,
it is necessary to separately
order specific connection
cable.
Cable lenght
0,5 m
2,5 m
3,5 m
5 m
10 m
P/N
A458755
A458369
A458425
A458423
A458424
Some accessoiries can be connected to the OEM Board
to extand some functions.
OEM Board accessories
Time meter 5 V
Time meter 10 V
Outside light kit
Interface kit
2/2
OEM Board: P/N. P0022E4
P/N
062761
062320
062939
062969
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00402 - Edition 03 - March 00
OEM Board
A 70
Technical characteristics of pumps
Standard version
Model characteristics
Inlet flange
DN
Pumping speed
Compression rate
Rotation speed
Reduced speed
Sound level
Start-up time (0
Exhaust flange
80
N2
He
H2
N2
He
H2
l/s
l/s
l/s
to 27000)
ISO-KF
150
400
900
100 ISO-K 100 CF-F 100 ISO-K 100 CF-F 160 ISO-K 160 CF-F 200 ISO-K 200 CF-F
80
50
40
8x10+7
2500
300
100
60
40
8x10+7
2500
300
400
300
250
7x10+8
1.5x10+4
1x10+3
900
540
300
1x10+9
2x10+4
2x10+3
1min45s
DN 25
140
100
80
7x10+8
1.2x10+4
1x10+3
27000
from 6000
≤ 53
2min
DN 25
1min45s
DN 25
3min
DN 40
3min
DN 40
ATP 80
ATP 100
ATP 150
ATP 400
ATP 900
rpm
rpm
dBA
Standard version characteristics
GB 00403 - Edition 03 - February 99
63 ISO-K 63 CF-F
100
Limit pressure* measured acc.
to Pneurop standard
mbar
5x10-9
5x10-9
5x10-10
8x10-10
5x10-10
Maximum pressure at inlet
in continuous operation**
mbar
1x10-1
1x10-1
1x10-1
2x10-2
1x10-2
Maximum permissible
pressure at exhaust**
mbar
2x10-1
3x10-1
4x10-1
2x10-1
3x10-1
Maximum ambient temperature* °C
50
Flange drying temperature
°C
120
120
100
100
100
natural cooling
kg
3
4.3
3
4.3
Weight air cooling
kg
4
5.3
4
5.3
6.5
9
17.5 18.5
water cooling
kg 3.4
4.4
3.5 4.7
6.5
9
17
18
Recommended primary pump
Pascal 2005 Pascal 2005 Pascal 2005 Pascal 2015 Pascal 2021
* For a water-cooled pump with CF-F flange and exhaust pressure < 1.10-2 mbar.
** The two maximum pressures cannot occur at the same time
Alcatel Vacuum Technology France - ATP User’s Manual
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A 70
Technical characteristics of pumps
Corrosive version «C»
Inlet flange
DN
Pumping speed
Compression rate
Rotation speed
Reduced speed
Sound level
Start-up time (0
Exhaust flange
80
63 ISO-K 63 CF-F
N2
He
H2
N2
He
H2
l/s
l/s
l/s
100
ISO-KF
Corrosives versions Characteristics
Limit pressure* without purge meas.
according to Pneurop standard mbar
Limit pressure* with purge meas.
according to Pneurop standard mbar
N2 purge flow rate
SCCM
Maximum pressure at inlet
in continuous operation**
mbar
Maximum permissible
mbar
pressure at exhaust**
Maximum ambient temperature* °C
Flange drying temperature
°C
ISO-KF
N2 purge flange
air cooling
kg
Weight
water cooling
kg
Recommended primary pump
400
900
100 ISO-K 100 CF-F 100 ISO-K 100 CF-F 160 ISO-K 160 CF-F 200 ISO-K 200 CF-F
80
50
40
8x10+7
2500
300
100
60
40
8x10+7
2500
300
400
300
250
7x10+8
1.5x10+4
1x10+3
900
540
300
1x10+9
2x10+4
2x10+3
1min45s
DN 25
140
100
80
7x10+8
1.2x10+4
1x10+3
27000
from 6000
≤ 53
2min
DN 25
1min45s
DN 25
3min
DN 40
3min
DN 40
ATP 80 C
ATP 100 C
ATP 150 C
ATP 400 C
ATP 900 C
5x10-9
5x10-9
5x10-10
8x10-10
5x10-10
5x10-8
5x10-8
1x10-7
50
1x10-7
1x10-7
1x10-1
1x10-1
5x10-1
2x10-2
1x10-2
2x10-1
120
3x10-1
40
120
2x10-1
40
100
1x10-1
40 50
100
4
5.3
3.4
4.4
2005 C2
4
5.3
3.5 4.7
2005 C2
4x10-1
40
120
DN 16
6.5
6.5
2021 C2
rpm
rpm
dBA
to 27000)
150
9.1
9.2
2033 C2
17.7
17.2
2063 C2
* For a water-cooled pump with CF-F flange and exhaust pressure < 1.10-2 mbar.
** The two maximum pressures cannot occur at the same time
2/3
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00403 - Edition 03 - February 99
Model characteristics
A 70
Technical characteristics of pumps
«HPC» version
HPC version characteristics
Inlet flange
DN
l/s
N2
Pumping speed
Ar
l/s
SF6
l/s
N2
Compression rate
Ar
SF6
Limit pressure without purge meas.
according to Pneurop standard mbar
Limit pressure with purge meas.
according to Pneurop standard mbar
SCCM
N2 purge flow rate
Maximum pressure at inlet
in continuous operation*
mbar
Maximum permissible
pressure at exhaust*
mbar
Rotation speed
rpm
Reduced speed
rpm
Start-up time (0 to 27000)
Maximum ambient temperature
°C
Water circuit temperature
°C
Noise level
dBA
Weight
kg
Recommended primary pump
Exhaust flange
ISO-KF
Purge flange
ISO-KF
Max N2 flux with 2063CP+ SCCM
ATP 400 HPC
ATP 900 HPC
100 ISO-K 160 ISO-K
200 ISO-K
200 CF-F
325
380
365
430
365
430
7x10+6
700
100
700
785
785
1x10+7
2x10+3
200
5x10-8
5x10-8
8x10-6
5x10-5
50
1x10-1
2x10-2
6x10-1
4x10-2
27000
from 6000
2 min
50
≤ 65
≤ 53
9
8.5
17.7
2063 C2 or ADP81
DN 40
DN 16
340
400
450
GB 00403 - Edition 03 - February 99
* The two maximum pressures cannot occur at the same time
Alcatel Vacuum Technology France - ATP User’s Manual
3/3
A 80
Dimensions of pumps
ATP 80, ATP 100
95,4
26,2
20
10
Electrical connector
65
67,
7
°
80,6
Ø 12,1
Water Inlet/Outlet
(Any direction)
For tube diam. 4/6
77,3
ØF
16
H
20
49,5
Ø 129,5
11
DN 25
ISO-KF
H
45,3
1,8
13
24,1
Ø 55,8
R
Ø 113
R
DN 25
ISO-KF
73,6
119,9
Ø 113
C
C
12
ISO-K
ØF
CF-F
N 2 PURGE
DN 16 ISO-KF
A°
102
GB 00404 - Edition 03 - March 00
118
N
ho eq
on les uidi
dia dia stan
m. m. t
D 8,6
Inlet flange
DN 63 ISO-K
DN 63 CF-F
DN 100 ISO-K
DN 100 CF-F
R
130
145
103
123
H
151,5
166,5
124,5
144,5
Alcatel Vacuum Technology France - ATP User’s Manual
C
102
117
75
95
F
95
113,5
130
148,5
N
8
16
D
92,1
130,2
A°
7,5°
18,75°
1/6
A 80
Dimensions of pumps
ATP 150
Water Inlet/Outlet
(Any direction)
For tube diam.4/6
26,2
Ø 12,1
20
°
86,
6
91,5
se
45°
ea
Gr
30°
Ø 130
°
60
210,7
GB 00404 - Edition 03 - March 00
18,75°
87,4
85,4
N2 PURGE
DN 16 ISO-KF
15,5
13,4
17,2
35,5
Ø 149,7
175,9
97
DN 25
ISO-KF
28
221,7
Ø 132
103,2
122,1
DN 25
ISO-KF
49,8
Ø 132
105
123
DN 100 ISO-K
134
116
16
DN 100 CF-F
12
Ø 148,5
nt
ista ,6
uid . 8
eq iam ,2
16 les d .130
ho diam
on
2/6
Alcatel Vacuum Technology France - ATP User’s Manual
A 80
Dimensions of pumps
ATP 400
Water Inlet/Outlet
(Any direction)
For tube diam. 4/6
26,2
91,5
°
86,
6
Ø 12,1
20
se
45°
ea
Gr
30°
E
ØF
CF-F - ASA
ØF
R
ø 189,5
26
60
°
81,3
15,5
A°
97
175,9
GB 00404 - Edition 03 - March 00
DN 40
ISO-KF
106,1
13,4
17,2
DN 40
ISO-KF
83
122,1
H
H
Ø 189,5
C
R
C
E
ISO-K
N
ho equi
on les d dista
dia iam nts
m. . T
D
Inlet flange
DN 100 ISO-K
DN 100 CF-F
DN 160 ISO-K
DN 160 CF-F
ASA 6"
R
181,6
183,1
151,1
168,1
161,1
H
247,4
248,9
216,9
233,9
225,9
C
146,9
148,4
116,4
133,4
125,4
Alcatel Vacuum Technology France - ATP User’s Manual
F
130
148,5
180
198
279,4
E
12
16
12
16
19
N
16
20
8
T
8,6
8,6
20,6
D
130,2
181,1
241,3
A°
3,75°
6°
22,5°
3/6
A 80
Dimensions of pumps
ATP 900
26,2
20
Water Inlet/Outlet
(Any direction)
For tube diam. 4/6
124,2
Ø 12,1
°
se
45°
ea
Gr
30°
ØF
26
83,6
118,2
N2 PURGE
DN 16 ISO-KF
GB 00404 - Edition 03 - March 00
15,5
13,4
DN 40
ISO-KF
A°
134
17,8
81,3
DN 40
ISO-KF
60
°
168
H
R
Ø 240
H
Ø 240
C
R
C
ISO-K
E
E
ØF
CF-F - ASA
t
tan
dis T
qui am.
N e es di . D
hol diam
on
235,1
Inlet flange
DN 200 ISO-K
DN 200 CF-F
ASA 6"
4/6
R
145,8
165,8
177,8
H
211,5
231,5
243,5
C
118,5
138,5
150,4
F
240
253,2
279,4
E
12
20
19
N
24
8
T
8,6
20,6
D
231,9
241,3
A°
7,5°
22,5°
Alcatel Vacuum Technology France - ATP User’s Manual
A 80
Dimensions of pumps
ATP 400 HPC
Water Inlet/Outlet
(Any direction)
For tube diam. 4/6
114
,4
86,
6
20
°
se
45°
ea
Gr
30°
ØF
ISO-K
E
CF-F - ASA
DN 40
ISO-KF
81,3
60
°
11,5
DN 40
ISO-KF
90
85,1
H
C
R
Ø 189,5
A°
9
4,
11
GB 00404 - Edition 03 - March 00
15,5
106,1
N equidis
holes diamtant
on diam. . T
D
Inlet flange
DN 100 ISO-K
DN 100 CF-F
DN 160 ISO-K
DN 160 CF-F
ASA 6"
R
181,6
183,1
151,1
168,1
161,1
Alcatel Vacuum Technology France - ATP User’s Manual
H
247,4
248,9
216,9
233,9
225,9
C
148,4
148,4
116,4
133,4
125,4
F
130
148,5
180
198
279,4
E
12
16
12
16
19
N
16
20
8
T
8,6
8,6
20,6
D
130,2
181,1
241,3
A°
3,75°
6°
37,5°
5/6
A 80
Dimensions of pumps
ATP 900 HPC
Water Inlet/Outlet
(Any direction)
For tube diam. 4/6
20
°
45°
se
ea
Gr
86,
6
149
,6
30°
ØF
CF-F - ASA
E
ISO-K
R
H
N2 PURGE
DN 16 ISO-KF
DN 40
ISO-KF
118,2
A°
1
0,
15
N
ho eq
on les uidis
dia dia tan
m. m. t
D T
Inlet flange
DN 200 ISO-K
DN 200 CF-F
ASA 6"
6/6
R
145,8
165,8
177,8
H
211,5
231,5
243,5
C
118,5
138,5
150,4
F
240
253,2
279,4
E
12
20
19
N
24
8
T
8,6
20,6
D
231,9
241,3
A°
7,5°
22,5°
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00404 - Edition 03 - March 00
15,5
N2 PURGE
DN 16 ISO-KF
81,3
11,5
DN 40
ISO-KF
60
°
8,5
76
70,8
C
Ø 260
Ø 240
A 90
Controller technical characteristics
Electrical characteristics
ACT 200T and ACT 600T
Characteristics
ACT 200T
Weight
kg
Dimensions HxLxP
mm
Nominal voltage
Maximum current
Maximum power
W
Ambient operating temperature
2.6
4
128.4x107x220 128.4x213x245
85-132 V et170-264V 48/63 Hz
5.8 A / 3 A
100
300
T ≤ 50°C
Customer mains circuit breaker rating
ACT 200T
10 A
107
91.4
217
+
PREVIOUS
3
112,5
128.4
122.4
Dimensions
ACT 600T
FAULT
START
STOP
ENTER
STAND BY
ACT 200T
Ø3
+
ENTER
STATUS
STAND BY
128.4
PREVIOUS
122.4
198.1
FAULT
START
Ø3
STOP
ACT 600T
213
112,5
GB 00405 - Edition 03 - February 99
ACT 600T
242
Alcatel Vacuum Technology France - ATP User’s Manual
3
1/2
A 90
Controller technical characteristics
Electrical characteristics
ACT 1000T
Characteristics
ACT 1000T
Weight
Dimensions HxLxP
Power supply
kg
mm
8.5
132.5x219x453
100-120 V 200-240 V
800
T ≤ 50°C
Maximum power
W
Ambient operating temperature
Customer mains circuit breaker rating
Dimensions
50/60 Hz
16 A
ACT 1000T
219
109.5
122.4
132.5
54.75
PREVIOUS
-
+
ENTER
FAULT
START
STOP
STATUS
STAND BY
5
ACT 1000 T
M4
GB 00405 - Edition 03 - February 99
112.5
453
408
100
2/2
Alcatel Vacuum Technology France - ATP User’s Manual
A 100
Integrable Brick & Board controller
technical characteristics
ACT 200 T Brick
97
Pump
Liaison
pompe
link
1
0
TURBO PUMP CABLE
GB 00406 - Edition 04 - March 00
RS
232
RS232
RS485
RS485
SUBDSubd
9pts
mâle
9pts male
RS232/485
103
235
Dimensions
(Board + Power supplying)
ON/OFF
Marche/Arrêt
Fuses
Fusibles
T250V/3.15A
T250V/3.15A (5x20)
(5x20)
Entrée
Mains secteur
40.64
83
Power supplying of
ACT 200 T Brick
Nominal voltage:
Maximum current:
Maximum power:
Alcatel Vacuum Technology France - ATP User’s Manual
115/230 V - 48/63 Hz
5.8 A / 3 A
100 W
1/4
A 100
Integrable Brick & Board controller
technical characteristics
ACT 200 T Board
It can be installed in an Europe size rack:
Height: 100 mm - Depth: 180 mm
Outside depth: 210 mm
Dimensions
90.17
J4
15
2
1
Holesdediam
3 Ø3
Trou
fixation
16
ACT 200 T Board
160.02
Input/Output
Connecteur
connector
Entrées/Sorties
S3
Verte
Green
Yellow
Jaune
Red
Rouge
Yellow
Jaune
Paramétrage
Serial link
liaison
série
setting
J5
Vn
Pump
at speed
Pump
starting
Démarrage
Fault
Défaut
Stand
Stand by
R15
J2
Réglage
Speed
vitesse
setting
Power
supply
Connecteur
connector
alimentation
J1
+
0
+
+
72V
V
15 V
5V
0 V GND
Power supplying of
ACT 200 T Board
Connector : type Molex Series 30-69 P.N. 09 - 91 0700 equipped with 7 contacts P.N. 08 - 050 - 0106
Functions of these integrable controllers (see B 130).
2/4
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00406 - Edition 04 - March 00
DC voltage necessary to supply the board:
+ 72 V / 1.4 A ± 1 V
+ 15 V / 0.25 A ± 100 mV
+ 5 V / 0.4 + 50 mV / - 100 mV
A 100
Integrable Brick & Board controller
technical characteristics
ACT 600 T Brick
145
235
Dimensions
(Board + Power supplying)
45.7
20
0
Mains
Entrée secteur
1
97
103
GB 00406 - Edition 04 - March 00
TURBO PUMP CABLE
LiaisonPump
pompe
link
RS232/485
RSRS232/RS485
232/RS485
Subd9pts
9ptsmâle
male
SUBD
50.8
Fuses
Fusibles
T250/6.3A (5x20)
T250V/6.3A
(5x20)
ON/OFF
Marche/Arrêt
Power supplying of
ACT 600 T Brick
Nominal voltage:
Maximum current:
Maximum power:
Alcatel Vacuum Technology France - ATP User’s Manual
115/230 V - 48/63 Hz
5.8 A / 3 A
300 W
3/4
A 100
Integrable Brick & Board controller
technical characteristics
ACT 600 T Board
ACT 600 T Board
It can be installed in an Europe size rack:
Height: 100 mm - Depth: 180 mm
Outside depth: 210 mm
Dimensions
Holes
diam
3 Ø3
Trou de
fixation
160.02
Input/Output
Connecteur
connector
Entrées/Sorties
90.17
J4
J5
R 15
Speed
Réglage
setting
vitesse
Serial link
Paramétrage
setting
liaison
série
J10
S3
Verte
Green
Yellow
Jaune
Red
Rouge
Yellow
Jaune
Vn
Pump at speed
Demarrage
Pump starting
Fault
Défaut
Stand
Stand by
by
Connecteur
Power
supply J1
alimentation
connector
0 V GND
Connector : type Molex Series 30-69 P.N. 09 - 91 0700 equipped with 7 contacts P.N. 08 - 050 - 0106
Voltages delivered by the board:
+ 72 V / 4 A ± 1 V
+ 15 V / 0.25 A ± 100 mV
+ 5 V / 0.4 A + 50 mV / - 100 mV
Functions of these integrable controllers (see B 130).
4/4
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00406 - Edition 04 - March 00
Power supplying of
ACT 600 T Board
+ 72V
0V
+ 15 V
+5V
A 110
Integrable OEM Board controller
technical characteristics
OEM Board
Installed with M3 screws x 6, or in sliding rail
(in Alcatel unit):
Dimensions: 213 x 98 mm.
Holes diam Ø 3,2
Power
supply
Encombrements
0V
Power on
1
2
ST1
Terre
240V
220V
200V
Fault
115V
< 27000 tr/mn
= 27000 tr/mn
1234
0V
START
+12V
+5V
ST2
97.5
92.7
100V
J3
J5
J6
J4
Pump
cable
J2
STOP
20.3
86.3
86.3
213.2
GB 00407 - Edition 02 - March 00
Power supplying of
OEM Board
A terminal plug with 7 pins, allows to supply the board
110 - 115 - 200 - 220 - 240 V AC, 50/60 Hz.
Secure the power line with an external time-delay fuse
depending on the power supply:
1 A for 100 / 115 V
0.5 A for 200 / 220 / 240 V
Functions of these integrable controllers (see B 140).
Alcatel Vacuum Technology France - ATP User’s Manual
1/1
Chapter B
ATP User’s Manual
Start-up
■ Safety instructions . . . . . . . . . . . . . . . . . . . . . ■ B 10
■ Pump connections to an installation . . . . . . . . . . ■ B 20
■ Mechanical connections . . . . . . . . . . . . . . . . . ■ B 30
■ Water cooling connection . . . . . . . . . . . . . . . . ■ B 40
■ ACT 200 T and 600 T electrical connections . . . ■ B 50
■ ACT 200 T and 600 T «Remote Control»
connector wiring . . . . . . . . . . . . . . . . . . . . . . ■ B 60
■ ACT 200 T and 600 T controller start-up . . . . . . ■ B 70
■ ACT 1000 T electrical connections . . . . . . . . . . ■ B 80
■ ACT 1000 T «Remote Control»
connector wiring . . . . . . . . . . . . . . . . . . . . . . ■ B 90
GB 00408 - Edition 09 - February 99
■ ACT 1000 T controller start-up . . . . . . . . . . . . . ■ B 100
■ RS 232 or RS 485 serial link wiring . . . . . . . . . ■ B 110
■ Detailed description of RS commands
ACT 200 T and 600 T. . . . . . . . . . . . . . . . . . ■ B 120
■ Functions of integrable controllers
type Board and Brick . . . . . . . . . . . . . . . . . . . ■ B 130
■ Functions of integrable controller
type OEM Board . . . . . . . . . . . . . . . . . . . . . ■ B 140
Alcatel Vacuum Technology France- ATP User’s Manual
1/1
B 10
Safety instructions
Before switching on the pump, the user should
study the manual and follow the safety
instructions listed in the compliance certificate
booklet supplied with the pump.
Unpacking
To keep your product in the clean condition in which it left
our factory, we recommend to unpack the pump only on
its assembly site.
It is advisable to keep the packaging.
Storage
• Our equipment can be stored without special
precautions (ambient temperature between 5 and 40° C)
provided that the running-in procedure specified in the
manual is observed for the first operation of the pump.
GB 00409 - Edition 01 - March 97
• The seal kits must be stored away from heat and light
(direct sunlight and ultraviolet radiation) in order to
prevent any hardening of the elastomers.
Installation
Start-up
• Our products are designed to comply with current EEC
regulations. Any modification of the product made by the user
is liable to lead to non-compliance with the regulations, or
even to put into doubt the EMC (electromagnetic compatibility)
performance and the safety of the product. ALCATEL declines
any responsibility for such operations.
Alcatel Vacuum Technology France - ATP User’s Manual
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B 10
Safety instructions
Installation
Start-up
(continued)
• Before any maintenance operations on a product
performed by a maintenance technician who has not
received safety training (EMC, electrical safety, chemical
pollution, etc.), isolate the product from the various energy
sources (electricity, compressed air, etc.).
• The EMC performance of the product is obtained on the
condition that the installation complies with EMC rules.
In particular, in disturbed environments, it is essential to:
- use shielded cables and connections for interfaces,
- stabilize the power supply line with meshing from the power
supply source to a distance of 3 m from the product inlet.
• The units containing control circuits are designed to
guarantee normal safety conditions taking their normal
operating environment into account (use in rack). In specific
cases of use on tables, make sure that no objects enter the
ventilation openings or block the openings when handling the
units.
• When switching off an item of equipment containing
loaded capacitors at over 60 VDC or 25 VAC, take
precautions concerning the access to the connector pins
(single-phase motors, equipment with mains filter, frequency
converter, monitoring unit, etc.).
• When handling the equipment, use the devices provided
for this purpose (hoisting rings, handle, etc.).
2/3
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00409 - Edition 01 - March 97
• Certain controllers can be configured to start up automatically
after a power cut.
In this case, it is the user's responsibility to take all the
precautions required to prevent the risks resulting from this type
of operation.
B 10
Safety instructions
Installation
Start-up
(continued)
• Risk of toppling over: although compliance with EEC
safety regulations is guaranteed (normal range ± 10°), it
is recommended to take precautions against the risk of
toppling over during handling, installation and operation.
• The performance and the operational safety of this
product are guaranteed provided that it is used in normal
operating conditions.
• The vacuum pump is also a compressor: incorrect use
may be dangerous.
Study the user manual before starting up the pump.
• The access to the rotor of a turbomolecular pump with
an unconnected intake is dangerous. Similarly, if the pump
is not switched on, it may be driven by another pump in
operation (risk of cuts).
• Make sure that the parts or chambers connected to the
intake of our pumps withstand a negative pressure of
1 bar in relation to the atmospheric pressure.
GB 00409 - Edition 01 - March 97
• The leaktightness of the products is guaranteed when
they leave the factory for normal operating conditions. It is
the user's responsibility to maintain the level of
leaktightness particularly when pumping dangerous gases.
Alcatel Vacuum Technology France - ATP User’s Manual
3/3
B 20
Pump connections to an installation
In.
In.
The pump can operate in
any position
In.
In.
The connection of the pump
to the installation must be
sufficiently rigid.
The dimensions of the connection parts should be studied
carefully:
Support plate
Spacer
c
GB 00410 - Edition 01 - March 97
For this, reduce the
following as much as
possible:
- dimensions a and b and
the flexibility of the
connection plate;
- the overhang c between
the pump and its anchor
point.
a
b
Some examples of unrecommended connection:
bellows
rigid support
The equipment attachment devices should be sufficiently rigid to prevent
potential risks in the event of failure of a rotary component or a violent shock
on the pump (exceptional phenomena).
For this, use the rotary flange attachment holes.
If the intake flange is attached with grips, use:
- at least 3 grips for secondary pump ≤ 150 l/s;
- at least 6 grips for secondary pump > 150 l/s.
Alcatel Vacuum Technology France - ATP User’s Manual
1/1
B 30
Mechanical connections
Remove the protective parts blocking the intake, exhaust (and, if applicable,
purge) openings; these components prevent foreign bodies from entering the
pump during transport and storage.
It is dangerous to leave them on the pump in operation.
Ambient operating
temperature
Air or natural convection cooled ATP: 0°C < T < 35°C;
Water-cooled ATP: 0°C < T < 50°C.
Inlet
Install the screen filter or compact filter accessory on the
pump; connect the pump to the installation*.
GB 00411 - Edition 01 - March 97
Exhaust
Purge
for C and HPC models
Connect the vent
electrovalve accessory
on the pump.
Connect the pump
to primary pumping
circuit*.
A filtered dry nitrogen
supply with the following
characteristics is required:
- Dew point < 22°C
- Dust < 1µm
- Oil < 0.1ppm
- Absolute pressure of 1
to 1.3 bar.
Connect the nitrogen pipe
to the DN16 purge fitting*.
A built-in safety valve
controls the pressure and
guarantees a flow rate of
50 SCCM.
* Different connection accessories can be found in the ALCATEL catalog.
Alcatel Vacuum Technology France - ATP User’s Manual
1/1
B 40
Water cooling connection
Water characteristics
Connection
It is recommended to use cooling water with the following
characteristics:
- pH between 7.5 and 11
- Hardness < 7 milli-équivalent/dm3
- Resistivity > 1500 Ω.cm
- Solid pollution < 100 mg/dm3
- Max pressure = 7 bars
- Temperature:
10 < T < 25°C (Std and C) and 0 < T ≤ 65°C (HPC).
Connect the cooling
circuit with a rigid
stainless steel or copper
pipe (int. diam. 4 mm ext. diam. 6 mm) (supplied
by customer).
GB 00412 - Edition 01 - March 97
The water flow rate is
0.2 to 1 l/min for water
at 15°C at an ambient
temperature of 25°C.
Alcatel Vacuum Technology France - ATP User’s Manual
1/1
B 50
ACT 200 T and 600 T
electrical connections
If the controller is remote controlled, make the various
connections on the REMOTE CONTROL connector
(see B 60).
If the controller unit is
used in local mode:
the pump can only
operate if the plug is connected
to the REMOTE CONTROL
connector.
(Connector plug delivered with
the controller).
REMOTE CONTROL
connector plug
(factory wiring)
15
1
30
16
44
41
39
31
Wiring viewed on soldered side
Display contrast setting
RS 232 / 485
Connect the RS232/485
serial link cable to the
connector
GB 00413 - Edition 02 - February 99
REMOTE CONTROL
Connect the
electrical venting valve
powered by the mains and
driven by the controller.
(voir B 60).
Connect
the controller to the
pump
using
the cable
Connect the fan
ordered.
(ATP air cooled)
(cable supplied by customer)
TURBO PUMP CABLE
Power
supply
0
1
Fuse access
ACT 200T
ACT 600T
Delayed fuses
3.15 A
250 V
6.3 A
250 V
Connect
the controller to
the mains using the cable
supplied.
(Mains with earth
connection)
Alcatel Vacuum Technology France - ATP User’s Manual
1/1
B 60
ACT 200 T and 600 T
"Remote Control" connector wiring
When the units containing the control circuits are equipped with dry contact
outputs, it is the customer's responsibility to use the outputs in compliance with
safety regulations.
The control by voltage
The inputs are considered to be activated if the AC or DC
voltage applied is between 5 and 30 Volts:
(DB 44 contacts, female connector)
15
1
30
16
44
42
Wiring supplied
by customer
39
5 to 30 V
38
-
37
+
~
=
36
-
35
+
~
=
34
-
33
+
~
=
32
-
31
+
~
=
These inputs can be controlled by external contacts using
the following wiring :
0V
15
1
30
16
44
42
39
38
37
36
35
34
33
32
31
Wiring supplied
by customer
GB 00414 - Edition 03 - February 99
Principle of the input
controlled by voltage
When a voltage is applied on these inputs,
+
_
42
0V
41
40
+ 15 V
50 mA
39
Sub D 44 Pts
ACT female con.
Ext. Safety
31 - 32
When a voltage is applied on these inputs,
the pump is running (see terminal plug wiring).
The wiring of an external contact allows to signal
an external safety when the contact is opened
(i.e. emergency stop).
External
contacts
wired by
the
customer
REMOTE Mode the Remote is validated. The opening of an
external wired contact allows Local mode (pump
33 - 34
control using front panel keypad).
When a voltage is applied on these inputs,
STANDBY Mode the pump rotates at reduced speed. The opening of
an external wired contact allows pump rotation at
35 - 36
nominal speed.
Start/Stop
37 - 38
Alcatel Vacuum Technology France - ATP User’s Manual
When a voltage is applied on these inputs,
the pump starts up and accelerates to reach its
nominal or reduced speed (depending on set
parameters). The opening of an external wired
contact allows pump stopping.
1/2
B 60
ACT 200 T and 600 T
"Remote Control" connector wiring
Signaling using
output contacts:
These are dry contacts (250VAC-1A), their function is to
replicate the data concerning the pump operating status.
15
14
13
12
11
10
9
43
42
41
40
39
8
7
1
30
16
44
OV(-)
OV
31
+ 15 V Max 50 mA
10V(+)
When the output contact is closed, this indicates:
1-2
5-6
7-8
9 - 10
11 - 12
13 - 14
15 - 30
The pimp is in running-in mode.
The pump is operating
Copy of Start command.
This contact can be used to drive
the roughing pump (see C 50).
The standby mode is selected.
No faults are signalled.
The pump has reached its nominal speed.
The venting valve fitted in the pump is closed
(accessory).
44 - 43
2/2
Used to monitor the selected parameter in
the “Set Analog output“ menu (see B 70).
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00414 - Edition 03 - February 99
A 0-10V analog output is used to monitor variations in
certain pump parameters (speed, temperature, etc.)
This data can be used to plot curves.
B 70
ACT 200 T and ACT 600 T
controller start-up
Once the various electrical connections have been made, set
the main switch on the rear panel to "I".
The controller performs a
self-test and identifies the
pumps to which it can be
connected.
The initialization time is
approximately 12 seconds.
Display initialization
■■■■■■■■■■■■■■■■
■■■■■■■■■■■■■■■■
Indicator light test:
they are lit in succession.
The equipment is identified :
the programs versions are
displayed.
FAULT
ATP 80/100
VV:1.10
VE:1.10
The pump operation time and
52H
ORPM
the speed are displayed.
READY TO START!
The parameter setting keys
Parameter setting
access
PREVIOUS
• used to move in the menus, or
from one parameter to another.
• used to select or adjust the value of the selected parameter.
Selection
Validation
ENTER
STATUS
GB 00415 - Edition 02 - Feburary 99
• used to access the parameter setting mode.
• used to exit the various menus without validating the functions.
Configure the parameters
for the application using
the various menus
• used to validate the selection of a menu, parameter or
value.
• used to exit the menus and return to the pump parameter
display (on ACT 600 T ).
Enter the sub-menus by
pressing
PREVIOUS
➧ Access the
parameter
programming.
DISPLAY
SETUP
RUNNING IN
➧ Display the monitored
parameters.
➧ List the faults and the
alerts.
Alcatel Vacuum Technology France - ATP User’s Manual
➧ Select a running-in
cycle;
➧ Start the cycle.
1/4
B 70
ACT 200 T and ACT 600 T
controller start-up
ENTER
0
Enter the access code
ACCESS CODE
Enter the access code and
validate
Configure the 0-10V output
SET ANALOG-OUT
SPEED: 6.75V = 27000rpm
I motor:
ATP 80/100: 2.5A / 10V
ATP 150/400: 5.1A / 10V
θ.PUMP: 0.1V per 1°C
θ.CONT: 0.1V per 1°C
Speed
Modify the STANDBY speed
STANDBY SPEED
6000 to 27000 rpm
12000
Give the authorization to restart
the pump after a power cut
AUTO-STARTING
YES or NO
NO
Activate or disactivate the buzzer
BUZZER
ON or OFF
ON
Select the temperature
measurement unit
TEMPERATURE UNIT
°C or °F
°C
Set the serial link parameters
SET SERIAL LINK
Modify the time before starting
up the pump
SET START DELAY
RS232/RS485/NETWORK
(see sub-menus folio 3 & 4)
0 to 240mn 59s
0mn 0s
Modify the time before opening the
venting valve
TIME TO VENTING
0 to 59mn 59s
0mn 1s
Modify the venting valve opening
time
VENTING TIME
0 to 59mn 59s
0mn 1s
Program the maximum operating
time before regreasing the
bearings
MAINTENANCE
M=0 (1000 to 15000 h)
M=1 (1000 to 30000 h)
M=2 (1000 to 45000 h)
RS232
M=0
5000h
(3 times the maintenance time)
(see E 80)
Ball bearings life time counter
TIME BEARING
0 to 50000 hours
Modify the access code
NEW CODING
0 to 65535
2/4
0 h
0
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00415 - Edition 02 - Feburary 99
DISPLAY
SETUP
RUNNING IN
Factory
configuration
Configuring the controller
B 70
ACT 200 T and ACT 600 T
controller start-up
Serial link setting
ENTER
SET SERIAL LINK
Serial link selection
RS 232
RS 485
NETWORK
Default
values
SPEED
PARITY
DATA-BITS
STOP-BITS
ECHO
SEPARATOR
ADDRESS
SET DATA LOGGER
Transimission speed . . . . . .
Parity . . . . . . . . . . . . . . . .
Data length . . . . . . . . . . . .
Number of STOP bits . . . . . .
Authorizes or does not
authorize the echo of
characters received on the link
Data separating
character . . . . . . . . . . . . .
Number of controller in a
multiple link . . . . . . . . . . . .
Authorizes transmission at pre-set
intervals on the serial link, if ON,
Set the transmission interval
Setting values
9600 bauds 1200 2400 4800 9600
None
None Even Odd
8 bits
7 or 8
1 bit
1 or 2
ON
ON or OFF
44 (comma)
0 to 255
0
0 to 255
OFF
0mn1s
ON or OFF
0 to 4mn59s
or 255 s
. . .
. . .
. . .
None
8 bits
1 bit
None Even Odd
7 or 8
1 or 2
. . .
44 (comma)
0 to 255
. . .
0
0 to 255
Return to Temperature menu folio 2
GB 00415 - Edition 02 - Feburary 99
RS 232
PARITY
DATA-BITS
STOP-BITS
SEPARATOR
ADDRESS
RS 485
NETWORK
Parity . . . . . . . . . . . . .
Data length . . . . . . . . .
Number of STOP bits . . .
Data separating
character. . . . . . . . . . .
Number of controller in a
multiple link . . . . . . . . .
Return to Temperature menu folio 2
Alcatel Vacuum Technology France - ATP User’s Manual
3/4
B 70
ACT 200 T and ACT 600 T
controller start-up
Serial link setting
(continued)
RS 232
ADDRESS
RS 485
NETWORK
Number of controller in a
sequence in the case of the
multiple link . . . . . . . . . . . .
0
0 to 255
GB 00415 - Edition 02 - Feburary 99
Return to Temperature menu folio 2
4/4
Alcatel Vacuum Technology France - ATP User’s Manual
B 80
ACT 1000T electrical connections
Connect the controller to the pump
using the cable
(separately
ordered).
Connect
the
fan (ATP air cooled).
Connect the RS232
serial link cable
to the connector
TURBO PUMP CABLE
RS 232 / 485
0
1
(cable supplied by
customer).
REMOTE CONTROL
DRY CONTACTS
GB 00416 - Edition 01 - March 97
Connect
the controller to the mains
using the cable supplied.
(Mains with earth
connection)
Connect the
venting valve
accessory
(see B 90)
If the unit is
remote controlled,
make the various
connections on the
REMOTE CONTROL
terminal block
(see B 90).
Alcatel Vacuum Technology France - ATP User’s Manual
1/1
B 90
ACT 1000 T "Remote Control"
connector wiring
When the units containing the control circuits are equipped with dry contact
outputs, it is the customer's responsibility to use the outputs in compliance with
safety regulations.
GND
GND
+
GND
-
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
+
The control contacts
GND
-
Ext. safety
1-2
When the contact is closed, an external safety
device is signalled: the motor is stopped and
the controller generates a fault. This contact must
be opened for the pump to operate.
Start/Stop
3-4
When the contact is closed, the pump is started
up and accelerates to reach its nominal or
reduced speed (depending on parameter settings).
If the contact is open, the pump is no longer powered.
When the contact is closed, the remote control mode
REMOTE mode is selected.
If the contact is open, the local mode is selected
5-6
GB 00417 - Edition 01 - March 97
(control using the front panel keypad).
0 -10 V analog output:
STANDBY mode
7-8
Analog output
9 - 10
Alcatel Vacuum Technology France - ATP User’s Manual
When the contact is closed, the reduced speed
rotation mode is selected.
Used to monitor the selected parameter
(see ANALOG OUT menus).
1/2
B 90
ACT 1000 T "Remote Control"
connector wiring
Signaling using output
contacts
These are dry contacts: (250VAC-1A) their function is to
copy the data concerning the pump operating status.
GND
GND
GND
GND
+
-
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20
+
Shut-off
valve
11 - 12
-
The contact is opened when a functional fault
appears or when the "STOP" control is activated.
In the latter case, the pump is reset to
atmospheric pressure.
The contact can be used to control a secondary
shut-off valve in order to retain the pressure in
the chamber when the pump is reset to atmospheric
pressure.
Air inlet valve Venting valve control and power supply (12V).
13 - 14
contact is closed when the pump reaches
Speed 15 - 16 The
the selected speed.
Fault 17 - 18 The contact is open if a fault appears and
the motor is stopped.
The contact is closed when the "START" control is
activated.
The contact can used to control a primary shut-off
valve.
GB 00417 - Edition 01 - March 97
Start 19 - 20
2/2
Alcatel Vacuum Technology France - ATP User’s Manual
B 100
ACT 1000 T controller start-up
Once the various electrical connections have been made, set
the main switch on the rear panel to "I".
The controller performs a
self-test and identifies the
pump to which it is
connected.
The initialization time is
approximately 4 seconds.
Display initialization
■■■■■■■■■■■■■■■■■■■ ■ ■
■■■■■■■■■■■■■■■■■■■ ■ ■
■■■■■■■■■■■■■■■■■■■ ■ ■
■■■■■■■■■■■■■■■■■■■ ■ ■
The equipment is identified,
the program version is
displayed.
ACT 1000 T V2.XX
--------------------------------------------CHECKING PROCEDURE
Indicator light test:
they are lit in succession.
The working screen is
displayed.
FAULT
SEP/20/95
ROT. SPEED
Θ1 PUMP
12:24:54
0 RPM
21°C
The parameter setting keys
Parameter setting
access
PREVIOUS
• used to move in the menus, or
from one parameter to another.
• used to select or adjust the value of the selected parameter.
Selection
Validation
ENTER
STATUS
GB 00418 - Edition 02 - February 98
• used to access the parameter setting mode.
• used to exit the various menus without validating the functions.
Configure the parameters
for the application using
the various menus.
• used to validate the selection of a menu, parameter or
value.
• used to exit the menus and return to the pump parameter
display
Enter the sub-menus
by pressing
PREVIOUS
DISPLAY
PARAMETERS
➧ Access
the parameter
programming
(see folio 2).
➧ Display and/or select
the parameters to be
monitored (see folio 4).
Alcatel Vacuum Technology France - ATP User’s Manual
1/4
B 100
ACT 1000 T controller start-up
PARAMETERS
Factory
configuration
Programming
the parameters
ENTER
Modify the date
DATE
Modify the STANDBY speed
SPEED
Modify the time before starting
up the pump
START
Modify the maximum bearing
operating time
BEARING
Modify the RS232 serial link
RS 232
Configure the 0-10V output
AN.OUT
Return to the factory
configuration (Alcatel reserved)
RESET
ENTER
ENTER
6000 to 27000 tr/mn
12000
DELAY
0 to 59mn 59s
0mn 0s
MAINT
LIMIT
M=0 (5000 to 15000 h)
M=1 (5000 to 30000 h)
M=2 (5000 to 45000 h)
(see details folio 3)
0
5000 h
θ.PUMP
0.1V per 1°C
6,75V = 27000 tr/mn
θ.CONV 0.1V per 1°C
Current 10V for 15000mA
Θ TEMP.
Θ1 PUMP
SPEED
Θ CONV
I.MOTOR
CONTROLLER
Modify the time before
opening the air inlet valve
AIR INLET
Modify the air inlet valve
opening time
Change to storage mode
(the timer is blocked).
STOCK
ENTER
DELAY
0 to 59mn 59s
1s
OPEN
0 to 59mn 59S
1s
ON / OFF
ON*
* At power-up, the storage mode disappears automatically.
2/4
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00418 - Edition 02 - February 98
BEARING
B 100
ACT 1000 T controller start-up
RS232
Factory
Configuration
Serial link setting
ENTER
Transmission speed
SPEED
300 600 1200 2400 4800 9600
9600
Data lenght
DATA
7 or 8
8 bits
Parity
PARITY
None Even Odd
None
Number of STOP bits
STOP
1 or 2
1 bit
Number of controller in
a multiple link
ADDRESS
00 to 999
0
Authorizes or does not
authorize the echo of
characters received on the link
ECHO
ON or OFF
ON
Data separating
character
SEPARATOR
1 to127
Authorizes transmission at pre-set
intervals on the serial link
DATA LOG
START
ON or OFF
DELAY
0 to 240mn 59 s
OFF
1s
Return to AN.OUT menu folio 2
GB 00418 - Edition 02 - February 98
PREVIOUS
ENTER
44
(comma)
Alcatel Vacuum Technology France - ATP User’s Manual
3/4
B 100
ACT 1000 T controller start-up
Configuring the display
screen
DISPLAY
ENTER
The date and time
DATE
The rotation speed
SPEED
in revolutions/minute
The motor current consumption
CURRENT
in mA
The temperature
TEMP
The operating time
SERVICE
Θ1 PUMP
Θ CONV
of the bearings (hours)
of the controller (hours)
GB 00418 - Edition 02 - February 98
BEARINGS
CONTROLLER
of the pump (°C)
of the controller (°C)
4/4
Alcatel Vacuum Technology France - ATP User’s Manual
B 110
RS 232 or RS 485 serial link wiring
At the first power-up, the user finds the default
configuration. The serial link parameters can be modified
by accessing the corresponding unit menu.
The default configuration of the serial link is as follows:
■ Type: RS 232
■ Transmission speed: 9600 baud
■ Data length: 8 bits
■ Parity: NONE
■ Stop bit: 1
RS232/485 connector
wiring
(Reception data) RD
TD (Transmission data)
(Data set ready) DSR
DTR (Data terminal ready)
GND (Ground)
1
2
6
3
7
4
8
5
9
V(+) (RS 485)
V(-) (RS 485)
DB 9 contacts, male connector.
Connection examples:
1
1
6
6
RS232 type serial link
with a single controller
PREVIOUS
5
9
9
5
FAULT
START
STOP
ENTER
STAND BY
GB 00419 - Edition 01 - March 97
ACT 200 T
Multiple RS232 serial link:
several units (up to 255)
can be controlled on a
single link.
The multiple link is obtained by creating a loop:
1
6
RS485 serial link connection:
5
1
6
5
9
1
5
6
9
9
1
5
6
9
1
6
5
9
1
5
6
9
1
5
6
9
Connect terminals 7 and 8 when the controller is at the
end of the line.
See B 120 for the command and message reception syntax.
Alcatel Vacuum Technology France - ATP User’s Manual
1/1
B 120
Detailed description of RS commands
(valid from V1.10 version variable drives)
Conventions applicable
to the syntax of all
commands:
Status values
Error messages
ADR
Syntax
adr = address, from 000 to 255
<CR> Carriage Return (ascii 13)
<LF> Line Feed (ascii 10); between square brackets:
this character is not compulsory.
ok
: command executed correctly
Err0
Err1
Err2
Err3
Err4
:
:
:
:
:
adjustment error (out of bounds)
command error (syntax)
parameter error (e.g. non-hexadecimal character)
context error
checksum error
Specifies the address of the device for networking.
#adrADRaaa<CR>[<LF>]
adr
= address of the device before the command
aaa
= new address of the device
condition : 000 ≤ aaa ≤ 255
Result
#aaa,ok or Err2
GB 00420 - Edition 03 - March 00
This command is used to allocate a specific number to
each of the products making up a network
(loop for RS 232 or parallel for RS 485).
Note : it is important to note down the number
allocated to each device.
BRK
Syntax
Result
Stop the pump by braking (ATP 80/100 series only)
#adrBRK<CR>[<LF>]
#adr,ok
This command is used to brake the motor electrically, which is
particulary effective at high speed. It is currently only available for
the variable drive unit of the ACT 200T Board or ACT 200T cabinet.
Alcatel Vacuum Technology France - ATP User’s Manual
1/10
B 120
Detailed description of RS commands
CKS
Syntax
Enables or disables reply strings checksum
#adrCKSON<CR>[<LF>]
Enables ascii character checksum at the end of
a reply string
or
#adrCKSOFF<CR>[<LF>]
Disables ascii character checksum at the end of
a reply string
Result
#adr,ok,S
#adr,ok
for CKSON
for CKSOFF
This feature allows the user to test if there is any transmit error
with a reply string.
S is a character whose ascii value is the checksum, on 7 bits,
of all the character ascii values from the beginning of the reply
string to the character before S. The 8th bit of S (MSB, Most
Significant Bit) is always 1.
Syntax
Result
Starts the specified running-in cycle
#adrCYC1<CR>[<LF>] to start running-in program 1,
or
#adrCYC2<CR>[<LF>] to start running-in program 2
#adr,ok
Running-in program 1 should be executed after a pump maintenance
operation (change of bearings).
At the end of the program, the pump maintenance parameters are
updated and the «maintenance requested» alert can be cleared.
Program 2 is used after regreasing (ATP series only), or after
prolonged storage (ATH 20/40 only).
2/10
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00420 - Edition 03 - March 00
CYC
B 120
Detailed description of RS commands
DLI
Syntax
Defines the DataLogger transmission interval
#adrDLIxxx<CR>[<LF>]
xxx: DataLogger send interval in seconds
condition: 001 ≤ xxx ≤ 255
Result
See also: DLR
DLR
Syntax
Result
#adr,ok or Err2
Note: if ok, the interval sent is stored in user memory.
Enables DataLogger operation (only with RS232)
#adrDLR<CR>[<LF>]
#adr,sssss,nnnnn,iiii,ttttt,uuuu.o,www,ppp,vvv
Returns current values:
sssss : current speed (in tr/mn)
nnnnn : speed set point (in tr/mn)
iiii
: current (in mA)
ttttt
: pump working speed (in hours)
uuuu.o : (reserved)
www : pwm (reserved)
ppp : pump temperature (°C)
vvv
: variator temperature (°C)
GB 00420 - Edition 03 - March 00
The main characteristics of the pump and its controller are sent over the
RS link, at the rate defined by the DLI command.
See also: DLI, LNG, SEP, SHT
Note: any new characters arriving on the serial port
(RS 232) will cancel the automatic DataLogger transmission.
Alcatel Vacuum Technology France - ATP User’s Manual
3/10
B 120
Detailed description of RS commands
ECH
Syntax
Enables or disables command echoing
#adrECHON<CR>[<LF>]
enables all characters received to be echoed over the serial port
(RS 232 only).
or
#adrECHOFF<CR>[<LF>]
disables all characters received from being echoed over the serial port.
Result
#adr,ok
Comments:
- This command is disabled in RS 485 operation, the value OFF
is required.
- Using a loop-type RS 232 network requires «ECHON» operation.
HDR
Syntax
Defines the start character for a command reply string
#adrHDRnnn<CR>[<LF>]
nnn: 3-digit decimal value of the ascii code of
the corresponding character (with leading zeros).
condition : 020 ≤ nnn ≤ 255
?adr,ok
#adr,ErrX
? is the desired character.
if error
Allows the user to distinguish between the first character in a
«command» string (for which # cannot be changed) and the first
character of a «reply» string.
Affects the first character of ALL replies.
Default value: the hash sign, # (ascii code = 035)
If ok, the selected value is automatically stored in user memory.
IDN
Syntax
Result
Identifies the device which is communicating, and its
software version
#adrIDN<CR>[<LF>]
#adr, VS.... - Vx.zz’
or
#adr, VS.... - Vx.zz for Alcatel pump type»
Returns the type of Variable drive Supervisor, the software version (x),
the software edition (zz), and the type of pump for which this
variable drive is set up.
4/10
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00420 - Edition 03 - March 00
Result
B 120
Detailed description of RS commands
LEV
Syntax
Result
Returns the state of the parameters defined by SET
#adrLEV<CR>[<LF>]
#adr,nnnnn,sssss,aaaa,hhhhh or
#adr,nnnnn rpm,sssss rpm,aaaa mA,hhhhh hours
Returns the current values:
nnnnn : speed set point
sssss : stand-by speed set point
aaaa : current set point
hhhhh : alert level for pump bearing maintenance
Syntax
GB 00420 - Edition 03 - March 00
Result
Complete cabinet only:
#adrLEV10<CR>[<LF>]
#adr,nnnnn,sssss,hhhhh,g,ccccc,eeeee,ddddd,pppp,qqqq
See also: LNG, SEP, SHT
Returns current values:
nnnnn : nominal speed set point (in rpm)
sssss : stand-by speed set point (in rpm)
hhhhh : alert level for pump bearing maintenance (in hours)
g
: regreasing counter
ccccc : pump working time (in hours)
eeeee : electronic working time (in hours)
ddddd : start delay (max 14459 s, that is 240 mn 59 s)
pppp : time to venting (max 3599 s, that is 59 mn 59 s)
qqqq : venting time (max 3599 s, that is 59 mn 59 s)
LNG
Returns the strings sent with the identification sub-strings
Syntax
Result
See also: SHT
#adrLNG<CR>[<LF>]
#adr,ok
CIT>
Allows the parameters returned by the DLR, LEV and SPD commands
to be identified with sub-strings.
Also generates the «CIT>» prompt each time a <CR> character is
received.
Alcatel Vacuum Technology France - ATP User’s Manual
5/10
B 120
Detailed description of RS commands
NSP
Syntax
Result
See also: RPM, SBY
OPT
Syntax
Swithes the speed set point to the nominal speed value
#adrNSP<CR>[<LF>]
#adr,ok
The speed set point for the pump is set to its nominal value.
This configuration is automatically saved in user memory.
This mode of operation prevents the use of the «RPM» command.
Used to select possible user choices
#adrOPT1 n<CR>[<LF>]
choice of parameters on the analog output:
n = 0 : real pump speed
n = 1 : pump current
n = 2 : temperature of pump body
n = 3 : temperature of internal electronics
#adrOPT2 n<CR>[<LF>]
choice of temperature unit:
n = 0 : degrees Centigrade
n = 1 : degrees Fahrenheit
Complete cabinet only:
#adrOPT10 n<CR>[<LF>]
: yes
: no
#adrOPT11 n<CR>[<LF>]
buzzer: n = 0
n = 1
Result
See also: SEL
6/10
: without
: with
#adr,ok
Comment: The choice of the temperature unit affects
the results of the DLR and STA strings and the display
(if cabinet fitted).
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00420 - Edition 03 - March 00
auto-starting:
n = 0
n = 1
B 120
Detailed description of RS commands
RPM
Syntax
Result
Defines the speed set point in stand-by mode
#adrRPM nnnnn<CR>[<LF>] or #adrRPMnnnnn<CR>[<LF>]
#adr,ok or #adr,ErrX
1, out of range; 2, parameters ; 3, context (not in Stand-by mode)
See also: NSP, SBY
SAV
Syntax
Result
Comment: if ok, the new speed is automatically stored in user memory.
Saves the internal parameters in user’s memory
#adrSAV<CR>[<LF>]
#adr,ok
Saves the current context (except for running-in cycles).
If this command is sent when the pump is being supplied,
it can for example allow automatic re-start in the event of
a power cut.
SBY
Syntax
GB 00420 - Edition 03 - March 00
Result
See also: NSP, RPM
Switches the speed set point to the stand-by value
#adrSBY<CR>[<LF>]
#adr,ok
Resets the stand-by speed to its last stored value, and allows
it to be modified if an «RPM» command is sent.
This configuration is automatically stored in user memory.
Alcatel Vacuum Technology France - ATP User’s Manual
7/10
B 120
Detailed description of RS commands
SEL
Syntax
Result
Returns the state of the parameters defined by OPT
#adrSEL<CR>[<LF>]
#adr,a,u
a : Returns choice of parameters on the analog output:
a = 0 : real pump speed
a = 1 : pump current
a = 2 : temperature of pump body
a = 3 : temperature of internal electronics
u : Returns the choice of temperature unit:
u = 0 : degrees Centigrade
u = 1 : degrees Fahrenheit
Syntax
Result
Complete cabinet only
#adrSEL10<CR>[<LF>]
#adr,a,u,s,b
SEP
Syntax
Defines the character which separates the parameters
in a reply
#adrSEPnnn<CR>[<LF>]
nnn: 3-digit decimal value of the ascii code of the desired
character (with leading zeros).
condition : 000 ≤ nnn ≤ 255
Result
#adr,ok or #adr,ErrX if error
Allows the user to select the character which separates
the parameters returned by the DLR, STA and LEV
commands. Default value: comma «,» ascii code = 044
If ok, the selected value is automatically stored in user memory.
8/10
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00420 - Edition 03 - March 00
a : Returns choice of parameters on the analog output:
a = 0 : real pump speed
a = 1 : pump current
a = 2 : temperature of pump body
a = 3 : temperature of internal electronics
u : Returns the choice of temperature unit:
u = 0 : degrees Centigrade
u = 1 : degrees Fahrenheit
s : Returns auto-starting choice:
s = 0 : no
s = 1 : yes
b : Returns buzzer choice:
b = 0 : without
b = 1 : with
B 120
Detailed description of RS commands
SET
Syntax
Defines the internal operating parameters
#adrSET1 hhhhh<CR>[<LF>]
#adrSET2 sssss<CR>[<LF>]
maintenance time
maximum time for start-up
(future)
Complete cabinet only:
#adrSET10 ccccc<CR>[<LF>] : pump working time
#adrSET11 eeeee<CR>[<LF>] :
#adrSET12 g<CR>[<LF>] :
#adrSET13 ddddd<CR>[<LF>] :
#adrSET14 pppp<CR>[<LF>] :
#adrSET15 qqqq<CR>[<LF>] :
Result
See also: LEV
SHT
GB 00420 - Edition 03 - March 00
Syntax
Result
See also: LNG
SPD
Syntax
Result
See also: LNG, SHT
(in hours)
electronic working time
(in hours)
regreasing counter
(0 to 2 max)
start delay (max 14459s,
that is 240mn 59s)
time to venting (max 3599s,
that is 59mn 59s)
venting time (max 3599s,
that is 59mn 59s)
#adr,ok or #adr,ErrX
Returns the transmitted string without the identification
sub-string
#adrSHT<CR>[<LF>]
#adr,ok
The strings sent following DLR, LEV and SPD commands will now be
sent without the parameter identification
sub-strings (e.g; without the units).
Returns the current speed
#adrSPD<CR>[<LF>]
#adr,nnnnn
#adr,nnnnn rpm
Alcatel Vacuum Technology France - ATP User’s Manual
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B 120
Detailed description of RS commands
STA
Syntax
Result
Returns the status of the internal dynamic parameters
#adrSTA<CR>[<LF>]
#adr,xxxxxx,yyyyyy,zzzzzz,sssss,iiii,www,ppp,vvv,ttttt<CR><LF>
adr: address
543210
xxxxxx status bits:
5 - RS echo (1->off)
4 - String long (0) / short (1)
3 - On (1) / Off (0)
2 - reduced or nominal
speed reached(1)
1 - standby (1)
0 - running-in (1)
yyyyyy fault bits:
5 - variable drive temperature
4 - motor temperature
3 - excess current
2 - sensors or start-up
1 - external
0 - pump not connected
zzzzzz alert bits:
5 - reserved (future use)
4 - reserved (future use)
3 - variable drive temperature
2 - motor temperature
1 - start-up time exceeded (future)
0 - operating time exceeded
sssss current speed value in rpm
iiii current value in mA
www reserved (pwm value)
ppp pump temperature value
vvv variable drive temperature
ttttt pump operating time value
TMP
Syntax
Result
Defines the operating state of the turbomolecular pump
#adrTMPON<CR>[<LF>]
#adrTMPOFF<CR>[<LF>]
start pump rotation
stop pump
#adr,ok or #adr,Err3 if the pump is already in the state
requested (context error)
10/10
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00420 - Edition 03 - March 00
Reminder : The «#» character at the start of the
reply string can be set with the «HDR» command.
The «,» character which separates the parameters in the
reply string can be modified with the «SEP» command.
B 130
Functions of integrable controllers
Brick and Board type
Warning
Serial link
RS 232/485
Electronic boards have been designed to comply
with the electrical safety and electromagnetic
compatibility rules but they cannot be the purpose of
a certification as soon as they are sold alone.
It is the user responsibility to ensure the externals shields
which are necessary to be in compliance with ECM and
electrical safety rules
V(+)
V(-)
RD
5
DTR
4
TD
3
2
DSR
1
GND
5
9
4
8
3
7
6
RS 485 Link
RS 232 Link
J4 Serial port
GND
120 Ω (Internal)
9
2
7
1
6
GND
A (or V+)
B (or V-)
Connect 7 to 8
if load impedance
necessary between A et B
5
4
8
RD (Terminal or computer)
TD (Terminal or computer)
3
9
8
2
7
1
6
Screen
Setting
Screen
Using the switch S3 :
ON
8
7
6
5
4
3
2
1
Number of STOP bits
Data length
Parity (Valid if switch 4 is off)
Type of link
Factory configuration :
9600 Bauds, WITHOUT
Parity, 8 bits, 1 Stop bit,
RS232.
Switch
1
2
3
4
8
ON
1 bit
7 bits
ODD
SANS
RS 485
OFF
2 bits
8 bits
EVEN
AVEC
RS 232
GB 00421 - Edition 03 - March 00
Switch
Transmission speed
Operation
Rotation speed setting
9600
4800
2400
1200
5
ON
OFF
ON
OFF
6
ON
ON
OFF
OFF
Refer to the Commands details sheet (B 120).
The potentiometer R15 (See folio 4) has to be set
to a position such as not to exceed the 1/5 of its
full excursion to allow the speed programming from the
serial link.
Alcatel Vacuum Technology France - ATP User’s Manual
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B 130
Functions of integrable controllers
Brick and Board type
Inputs/Outputs
connector
This remote control allows to command START, STOP,
STANDBY at distance, and the copy of the monitoring
parameters .
The connection is done on a female connector
3M He 10 P.N. 34-52-6000 (Not supplied).
Speed
ON
Fault
Stand-by
Reserved
Outputs
Inputs/Outputs connector J5
Inputs
GND
Ext. safety.
Mode
Stand-by
ON/OFF
Analogical output
Not used
Output contacts
signalisation :
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
Dry contacts relay
Tension level resistor
LED diode or indicator
5 to 30 V
Typical applications
They are open collector type outputs (Imax 100mA;
Vmax 30V) whose function is to copy the information
related to the pump status.
Light
Contact
Description
Light indicator status
Green
Speed
1
Nominal speed has
been reached by the
pump.
Start
2
Red
Fault
3
The pump is
starting up.
A fault occurs.
Yellow
Stand-by
4
Flashing : The speed is higher than
the one selected.
Lit : The selected speed is
reached.
Lit : The speed is lower than the
one selected.
Lit : Faulty pump. (See folio 4)
Flashing : Alert is signalled.
Lit : Standby mode is selected.
Yellow
2/4
Standby mode is
selected.
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00421 - Edition 03 - March 00
The light indicator is on when the corresponding output
is valid (low level).
B 130
Functions of integrable controllers
Brick and Board type
Command inputs
Contact
The input is regarded as valid when the external contact
which is connected is closed (Low level: ground connected)
and not valid if the contact is open (High level).
Input status
External safety
10
High: There is an external safety. The LED Fault is lit on,
the pump doesn't start.
Low: Contact connected to ground, necessary for pump's
starting.
Mode
11
High: "Status" mode selected.
Low: "Impulse" mode selected.
This mode is valid for the two following commands .
Stand-by
12
"Status" mode:
High: Nominal rotation
speed mode .
Low: Reduced rotation
speed mode selected.
(stand-by)
"Impulse" mode:
A temporary closing of the
contact allows to alternate
the reduced and nominal
speeds.
Nominal speed
Std-by
GB 00421 - Edition 03 - March 00
Start/Stop
13
"Status" mode:
High: The pump is no
longer powered.
Low: The pump starts and
accelerates.
Std-by
Nominal
speed
"Impulse" mode:
A temporary closing of the
contact allows to alternate
between Start and Stop of
the pump.
Stop
Start
Start
Stop
One analog output
Analog output
14
This output allows to monitor the evolution of some pump
parameters (Speed, température…).
The output parameter selection is done through the RS
232 (See B120). The speed, the current, the temperatures
are available on this output ( Factory configuration
«Speed»).
Alcatel Vacuum Technology France - ATP User’s Manual
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B 130
Functions of integrable controllers
Brick and Board type
Rotation speed setting
The potentiometer R 15 allows to set the rotation speed as
long as its position is further than 1/5 of the full
excursion.
From the maximum position (Fully clockwise screwed),
the speed is defined:
- by the orders comming from serial link during the 4 first
turns (counterclockwise unscrewing) ;
- manually within the limits of stand-by speed range
(See characteristics table), this after the 5th turn
(Speed increases when unscrewing).
Factory configuration: R15 is set for a serial link
configuration with a Standby speed of
12000 RPM.
Faults monitoring
The alerts are indicated by:
- The flashing of the red light indicator ;
- The alternation of HIGH and LOW levels of the output
«FAULT».
They can be identified using the serial link
(See B120, command STA).
Note: Alcatel can provide upon request, a communication
software which allows pump control and monitoring using a
micro-computer (see C 61).
Refer to Diagnosis and Troubleshooting of the manual.
4/4
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00421 - Edition 03 - March 00
The faults are indicated by:
- The lighting of the red light indicator ;
- The switching to the Low level of output «FAULT».
B 140
Functions of integrable controller
OEM Board type
Warning
Local mode operation
Electronic boards have been designed to comply
with the electrical safety and electromagnetic
compatibility rules but they cannot be the purpose of
a certification as soon as they are sold alone.
It is the user responsability to ensure the externals shields
which are necessary to be in compliance with ECM and
electrical safety rules.
Power “ON” and pump “Start/Stop” functions are made
using switches located on the PC Board.
Power
ON
Rotation
speed
Fault
Start
Stop
OEM Board
Red
Yellow
Green
The detection of the pump operation is materialized by
three indicator lights (green, yellow, red) which indicate
the pump status (light ON = 1; Light OFF = 0).
GB 00422 - Edition 02 - March 00
Detection of rotation
START
STOP
Pump
motor
powered
Action on button
Pump
rotation
speed*
1
Before starting
0
0
NO
0
2
Starting
1
0
YES
< 27000
3
Pump at nominal speed
0
0
YES
= 27000
4
Incident**
Overheating due
to pump or converter
0
0
NO
5
Overloading
0
0
YES
6
Pumping stop
0
1
NO
Pilot lights
Yellow Green
Red
0
< 27000
0
* Pump rotation speed in rpm.
** During the pump or converter cooling, the cycles 2,3 (or 5) will be happened again periodically until the user remedies the
overheating.
Alcatel Vacuum Technology France - ATP User’s Manual
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B 140
Functions of integrable controller
OEM Board type
Remote control mode
Depending on P2 power supply cable connector wiring,
the pump Start/Stop and an external safety can be remote
controlled.
0V
J3 connector allows the copy of
the pump status data (equivalent
to light indicators green-redyellow) (voir folio 1).
1
2
Terre
240V
220V
200V
115V
100V
J3
0V
Pump
cable
+12V
+5V
Description
Standard wiring.
A4-A5 : output by contact
ON/OFF
Pump Start/Stop
remote control
(by impulse contacts)
Buttons command.
The buttons of the front of
panel are operational.
Pump Start/Stop
remote control
(by maintained contact)
Outer safety switch wiring
P2 connector wiring*
1
STOP
4
5
START
1
2
3
4
5
1
2
3
4
5
1
2
3
4
5
B
A
Interrupter command.
Closed contact:
pump starts
Opened contact:
pump stops
B
A
Opened contact:
pump stops
No indication by the red
LED.
A4-A5 terminals allows to
switch 250 V - 1 A max.
3
A
B
A
1
Outer control
2
B
2
3
4
5
B
A
250 V 1 A max.
* P2 soldering side view;
B2 and A1 in black are female pins, others are male pins.
2/3
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00422 - Edition 02 - March 00
Without remote control
outer safeties
J2
B 140
Functions of integrable controller
OEM Board type
Fault monitoring
The faults are indicated by red light indicator which signals:
- controller temperature increasing;
- pump temperature increasing;
- incorrect connection between pump and PC Board.
GB 00422 - Edition 02 - March 00
When it is “ON”, the motor is not supplied and the pump
doesn’t run.
Alcatel Vacuum Technology France - ATP User’s Manual
3/3
Chapter C
ATP User’s Manual
Operation
■ First pump start-up /
Safety instructions . . . . . . . . . . . . . . . . . . . . . ■ C 10
■ Turbomolecular pump operation
in a pumping application . . . . . . . . . . . . . . . . ■ C 20
■ Controlling the pump using the controller
front panel . . . . . . . . . . . . . . . . . . . . . . . . . . ■ C 30
■ Displaying the data concerning
ACT 200 T and 600 T pumping . . . . . . . . . . . ■ C 40
■ ACT 200 T and 600 T «Remote Control»
connector «Ext. safety» input operation . . . . . . . . ■ C 50
■ Controlling the pump using
GB 00423 - Edition 09 - February 99
communication software . . . . . . . . . . . . . . . . . ■ C 61
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C 10
First pump start-up
Safety instructions
First pump start-up
When the pump is new, or after a prolonged shut-down
of 3 months or more (under normal storage conditions),
Alcatel recommend operating the pump at atmospheric
pressure for 10 minutes (inlet and exhaust open to
atmosphere) in order to ensure a slow rotation and
grease re-distribution in the pump ball-bearings.
For this operation, inlet and pump exhaust are open to
atmosphere.
The access to the rotor of a turbomolecular pump
with an unconnected inlet is dangerous.
GB 00424 - Edition 01 - March 97
Safety instruction
for use
The pumps are designed so as not to present a
thermal risk for the user's safety. However, specific
operating conditions can generate temperatures which
require particular care to be taken by the user (external
surfaces > 70°C).
Avoid moving or causing a shock on a pump in
operation.
There is a risk of seizing if the pump rotates in an axis
perpendicular to its axis of rotation.
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C 20
Turbomolecular pump operation
in a pumping application
When the pump is new, or after a prolonged shutdown of 3 months or more (under normal storage
conditions), Alcatel recommend operating the pump
at atmospheric pressure for 10 minutes (inlet and
exhaust open to atmosphere) in order to ensure
a slow rotation and grease re-distribution in the
pump ball-bearings.
Example of a 1 valve
assembly
Chamberàto
be
Enceinte
vider
evacuated
E1
ATP
GB 00425 - Edition 01 - March 97
The chamber and pipes are
at atmospheric pressure,
the pumps are switched off,
the valves are closed
PPM
Start-up:
- start up ATP water cooling system;
- open the E1 valve;
- start up the primary pump (PPM);
- start up the ATP, when the pressure in the chamber
is ≤ 1 mbar.
Stop:
- close E1;
- stop the primary pump;
- stop the ATP;
- stop the cooling system.
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C 20
Turbomolecular pump operation
in a pumping application
Example of a 3 valve
assembly
Chamber
be
Enceinte àtovider
evacuated
E3
E2
E1
N2
ATP
PPM
* N2 purge only for "C" and "HPC" models
The chamber is at
atmospheric pressure,
the pumps are operating,
the valves E2 and E3 are
closed, the purge and water
circuits are operating.
2/3
Pre-evacuation of the chamber:
- start up the PPM (primary pump);
- start up the ATP water cooling system;
- open the E2 valve.
The pressure in the chamber ≤ 1mbar, the secondary
pumping can be started up:
- close E2;
- open E1 and E3;
- start up the nitrogen purge*;
- start up the ATP.
Pre-evacuation of the chamber:
- close E1;
- open E2.
The pressure in the chamber is ≤ 1mbar:
- close E2;
- open E1;
- open E3.
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00425 - Edition 01 - March 97
The chamber and pipes are
at atmospheric pressure,
the pumps are switched off,
the valves are closed
C 20
Turbomolecular pump operation
in a pumping application
Refill the chamber with air
Stop pumping
GB 00425 - Edition 01 - March 97
Bake-out collar (accessory)
operation:
Shut off the pumps by closing the E3 valve (E1 remains
open) and open an air inlet on the chamber.
The pumps are shut off by closing the valves.
- close the E3 valve;
- with the ATP and PPM rotating, allow the N2 purge* to
flow approximately 1 hour after pumping corrosive
gases*;
- Stop the ATP;
- Close the E1 valve;
- Stop the PPM. The ATP will be refilled with air if the
accessory is fitted and the relevant menus are
programmed (see B 70 or B 100);
- stop the water cooling circuit.
T < 200 °C
To reach the vacuum
limit quickly, the ATP
can be baked.
In this case, the
temperature on the
pump inlet flange
must be monitored:
T < 120°C.
Dome
Inlet flange
T < 120 °C
Bake-out collar
ATP
Alcatel Vacuum Technology France - ATP User’s Manual
Dome
Exhaust
3/3
C 30
Controlling the pump
using the controller front panel
Rotation indicator lights:
Orange lit
The pump rotation speed
is lower than the
selected speed.
Red lit
The pump is faulty.
This fault is accompanied
by an audible signal (if it
is programmed).
FAULT
Green flashing
The pump rotation speed
is higher than the selected
speed (decrease of the
selected speed during
operation).
Green lit
The pump has reached
the selected speed.
GB 00426 - Edition 01 - March 97
Start-up the pump by
pressing START
The pump is started up to
reach the selected speed.
Orange lit
Standby mode selected
Orange flashing
Running-in procedure
activated
FAULT
The orange rising speed indicator light comes on. When
the pump reaches its selected speed, the orange indicator
light goes off and the green indicator light comes on.
Select the reduced speed
rotation mode by
pressing STAND
BY
Stop the pump by
pressing STOP
The speed selection indicator
FAULT
light comes on. The pump
regulates its speed to reach the value of the programmed
reduced speed (see B 70 or B 100).
The rotation speed monitoring indicator lights go off.
The pump motor is no longer powered, the pump
decelerates.
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C 30
Controlling the pump
using the controller front panel
The valve is automatically controlled during a voluntary
stoppage of the pump if a value other than zero has been
programmed in the "Venting Time" menu. During the entry
of air, the pump can be started up but the valve will be
closed beforehand.
In the event of a power cut, the valve is opened
immediately, without delay, even if it has been
programmed at a value other than zero.
Delayed start-up
It is possible to control the start-up of another pump before
the start-up of the turbomolecular pump. Simply program
a time other than zero in the "SET START DELAY" menu.
When START is pressed, the backing pump is started up
and the ATP is controlled after the delay.
GB 00426 - Edition 01 - March 97
Air inlet valve
accessory
2/2
Alcatel Vacuum Technology France - ATP User’s Manual
C 40
Displaying the data concerning
ACT 200 T and ACT 600 T pumping
Displaying the data
concerning the pumping
DISPLAY
SETUP
RUNNING IN
Pump and controller status
• pump temperature
• pump motor current
• controller temperature
• pump rotation speed
ENTER
ENTER
STATUS
WARNING
ATP
ACT
VER FAULT
BEARINGS
20°C
36°C
1.50A
24000
ENTER
ENTER
Display of the equipment
and the program version
STATUS VER
FAULT
WARNING
BEARINGS
ATP 80 / 100
VV:1.10
VE:1.10
ENTER
ENTER
GB 00427 - Edition 02 - February 99
Successive display of last
10 faults
• number of hours of
operation when the fault
appeared
• record number (1 to 10)
• fault title
Successive display of last
10 alerts
• number of hours of
operation when the alert
appeared
• record number (1 to 10)
• alert title
STATUS
WARNING
VER
FAULT
BEARINGS
400H
FAULT 1
D01:EXTERNAL SAFETY
ENTER
ENTER
420H
WARNING 1
W01:ATH MAINTENANCE
STATUS
VER
FAULT
WARNING
BEARINGS
ENTER
ENTER
Bearing data
• operating time passed
• maximum number of hours
authorized before regreasing
or replacing the bearings
MAINTENANCE :
450H/5000H
STATUS
VER
FAULT
WARNING
BEARINGS
Alcatel Vacuum Technology France - ATP User’s Manual
ENTER
0
Time passed
1/1
C 50
ACT 200 T and ACT 600 T
"Remote Control" connector
"Ext. safety" input operation
This input, which can be used to control an external
contact safety device for the ACT controllers, is controlled
in 2 different ways depending on the value given to
the SET START DELAY parameter accessible in the
configuration menus.
15
8
7
38
37
1
30
44
16
36
35
34
33
32
31
External safety
If SET START DELAY = 0
The external safety input is controlled continuously.
If the “external safety” contact is open, it displays the fault
"EXTERNAL SAFETY", lights up the red fault indicator
light and inhibits the pump start-up. The output contact 7-8
is kept open.
If SET START DELAY ≠ 0
GB 00428 - Edition 02 - February 99
• Before pressing on "START",
the external safety input is not controlled.
• After pressing on "START" and during a delay
- of 4 seconds
if SET START DELAY > 4 s
- or between 1 and 4s if SET START DELAY ≤ 4 s
the external safety input is not controlled.
• After this delay, this input is handled by the ACT.
If the “external safety” contact is open, it displays the
fault "EXTERNAL SAFETY", lights up the red fault
indicator light, opens the output contact 7-8 and inhibits
the pump start-up.
This contact can be used to control the roughing pump
(see wiring example, following page).
Note: In "REMOTE" mode, after an external fault, the pump
must be set to the "STOP" status before starting up again.
Alcatel Vacuum Technology France - ATP User’s Manual
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C 50
ACT 200 T and ACT 600 T
"Remote Control" connector
"Ext. safety" input operation
Wiring example to control a roughing pump
ACT
ATH
Remote control
32
41
39
K1
31
7
8
K1
RP
PPM
GB 00428 - Edition 02 - February 99
K1
2/2
Alcatel Vacuum Technology France - ATP User’s Manual
C 61
Controlling the pump
using communication software
These instructions are validated for ACT 200/200T/600T,
cabinet, Board and Brick version.
Connect the controller
to the micro-computer
(or terminal)
Realize the necessary connections (see B 110).
RS 232/485
RS 232 / 485
REMOTE CONTROL
GB 00429 - Edition 01 - February 99
TURBO PUMP CABLE
PC system requirements
0
1
Communication software is compatible with Windows 3.11,
95 et Windows NT (™ Microsoft).
It require 2 Mo RAM. Communication ports 1 to 4 must be
available.
This application is available on CDRom or
Floppy disk 3”1/2.
Consult us.
Alcatel Vacuum Technology France - ATP User’s Manual
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Chapter D
ATP User’s Manual
Maintenance
■ Diagnosis and troubleshooting
ACT 200 T and 600 T . . . . . . . . . . . . . . . . . ■ D 10
■ Diagnosis and troubleshooting ACT 1000 T . . . . ■ D 20
■ ATP 80/100/150/400
Maintenance frequency. . . . . . . . . . . . . . . . . . ■ D 30
GB 00430 - Edition 08 - February 98
■ ATP 900 Maintenance frequency . . . . . . . . . . . ■ D 40
Alcatel Vacuum Technology France- ATP User’s Manual
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D 10
Diagnosis and troubleshooting
ACT 200 T and ACT 600 T
Default type:
"Warning" Wxx
The "FAULT" signal flashes;
If the buzzer is selected "ON", it is activated;
The controller doesn’t stop the pump.
"Fault" Dxx
The "FAULT" signal lights on;
If the buzzer is selected "ON", it is activated;
The controller stops the pump.
INCIDENT
No event occurs after
power on:
• No display;
• Indicators does not
light.
CAUSE
• No mains current in The controller is not
powered.
the unit.
• Defective power cable.
• Fuses.
GB 00431 - Edition 01 - March 97
REMEDY
• Change the power cable.
• Check the fuses.
• Call the ALCATEL Customer
Service.
The display is different • Call the ALCATEL Customer
from «Ready to start !» Service.
Incoherent display
Inoperative Keyboard
(At starting or during
the pumping)
No light switches on
CONSEQUENCE
Defective lights.
The pump isn’t running Cell seizing.
(pump seizing)
No messages
The pump can be used • Call the ALCATEL Customer
without indicators.
Service.
No message. Check
the pump status.
200T : Imax = 1.2 A
600T : Imax = 0.8 A
Rotation speed : 0 rpm
The controller temperature is increasing and
the warning «ACT
TEMP» can appear
(65°C)
Alcatel - High Vacuum Technology - ATP User’s Manual
• Check the pump rotation
(manually).
• Make the pump maintenance.
• Call the ALCATEL Customer
Service.
1/3
D 10
Diagnosis and troubleshooting
ACT 200 T and ACT 600 T
INCIDENT
CAUSE
WO1 :
GREASING
The authorized limit for
ball bearing maintenance
time has been reached.
(M=0 or M=1)
• Regrease the pump and
initialize the maintenance counter
(see E 80).
Pump maintenance time Bearing must be
changed.
will be reached.
• Call the ALCATEL Customer
Service.
WO3 :
ACT TEMP.
The controller temperature
is high between:
- 60 and 70°C for
ACT 600 T;
- 65 and 75°C for
ACT 200 T;
but does not exceed
the authorized limit.
• Check the controller cooling
circuit:
- Internal fan for ACT 600T;
- Ventilation for ACT 200T.
W04 :
PUMP TEMP.
Pump temperature is
between 75 and 85°C.
• Check the pump ventilation.
REMEDY
GB 00431 - Edition 01 - March 97
WO2 :
PUMP MAINTEN.
CONSEQUENCE
2/3
Alcatel - High Vacuum Technology - ATP User’s Manual
D 10
Diagnosis and troubleshooting
ACT 200 T and ACT 600 T
INCIDENT
CONSEQUENCE
REMEDY
The controller stops the
The external security
contact on the REMOTE motor. The pump can’t
CONTROL connector is restart.
activated.
• Test the external safety devices
(contact 31 - 32);
• Repair the fault and press
START to restart
(see B 60)
Soft counter default.
• Reinitialize the controller with
the main switch (0/1);
• If the fault happens again, call
the ALCATEL Customer Service.
D03 :
ACT TEMP.
Controller temperature
exceeds the authorized
limit 70°C for ACT 600T
or 75°C for ACT 200T
• Check that the cooling circuit
is operating correctly:
- Internal fan for ACT 600T;
- Ventilation for ACT 200T.
D04 :
PUMP TEMP.
The pump motor
temperature exceeds the
authorized limit 85°C.
• Check that the cooling circuit
is operating correctly;
• Reduce the working pressure
or the flowrate.
• If the fault happens again, call
the ALCATEL Customer Service.
D01 :
EXT SAFETY
D02 :
DLY SOFTWARE
GB 00431 - Edition 01 - March 97
CAUSE
D05 :
HALL SENSORS
Not used.
D06 :
START FAULT
Not used.
D07 :
PUMP CURRENT
Motor overcurrent or
Hall sensor default.
Starting current too
high.
• Reinitialize the controller with
the main switch (0/1);
• If the fault happens again, call
the ALCATEL Customer Service.
D08 :
NO CONNECT
Pump not connected.
The pump can’t start
up.
• Check the cable connection.
D09 :
HIGH PRESS.
Not used.
Alcatel - High Vacuum Technology - ATP User’s Manual
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D 20
Diagnosis and troubleshooting
ACT 1000 T
When a defect
appears
The "FAULT" indicator lights, the air inlet valve and/or
the "FAULT" contact on the "Remote Control" connector
are activated.
CAUSE
No event occurs
after power on:
• No display;
• Indicators does
not light.
• No mains current in
the unit.
• Defective power
cable.
• Fuses.
GB 00432 - Edition 01 - March 97
D00 :
SEIZED PUMP
Cell seized.
FAULT
INCIDENT
17-18
13-14 & 11-12
In the following table, we use the signs:
Y Relay contact open;
N Relay contact closed;
■ "FAULT" indicator lit on;
■ "FAULT" indicator lit off.
CONSEQUENCE
REMEDY
■ The controller is not
powered.
• Change the power cable.
• Check the fuses.
• Call the Alcatel Customer
Service.
Y N ■ Check the pump
status: 0RPM.
• Check the pump rotation
(manually).
• Make the pump maintenance.
• Call the Alcatel Customer
Service.
D01 :
POWER
OVERHEAT
Overheat signal by the Y N ■ The controller stops
«powered» sensor in
temporarily the motor.
the unit.
Valves are not
affected.
• Check the controller cooling
circuit (Air admissions and fan).
• Call the Alcatel Customer
Service.
D03 :
MOTOR
CONTROL
OVERHEAT
Overheat signal by the Y N ■ The controller stops
«dimmer switch» sensor
temporarily the motor.
in the unit.
Valves are not
affected.
• Check the controller cooling
circuit (Air admissions and fan).
• Reduce the working pressure
or the flowrate.
• Call the Alcatel Customer
Service.
D04 :
HALL SENSOR
• Hall sensor default.
• Motor out of order.
• Pump no connected.
Y Y
■
Alcatel - High Vacuum Technology - ATP User’s Manual
The controller stops
the motor.
Valves are affected
and the pump can’t
restart.
• Check the cable connection.
• Call the Alcatel Customer
Service.
1/4
D 20
CONSEQUENCE
REMEDY
D05 :
OVERCURRENT
OR SENSOR
• Motor overcurrent or Y Y
hall sensors default.
• Motor out of order.
Pump no connected.
■
The controller stops
the motor.
Valves are affected
and pump can’t
restart.
• Check the cable connection.
• Call the Alcatel Customer
Service.
D06 :
EXT. SAFETY
The external security
Y Y
contact on the connector is activated.
■
The controller stops
the motor.
Valves are affected
and pump can’t
restart.
• Test the external safety devices
(contact 1 - 2);
• Repair the fault and press
START to restart.
Pump overheat.
D21 :
PUMP OVERHEAT
D22 :
CONTROLLER
OVERHEAT
D23 :
HOT PUMP
Y N ■ The controller stops
the motor.
Valves are not
affected.
Overheat signal by the Y N
«management» sensor
in the unit.
T > 60°C.
Pump temperature
exceeds 75°C.
■
The controller stops
the motor.
Valves are not
affected.
N N ■ Fault is displayed
(message).
• Check the pump cooling.
• Reduce the working pressure
or the flowrate.
• Check the controller cooling
circuit (Air admissions and fan).
• Reduce the working pressure
or the flowrate.
• Call the Alcatel Customer
Service.
• Check the pump cooling.
• Reduce the pressure or the
flow.
• If the default is still present the
D21 appears.
NN
■
The «fault» signal
flashes.
• Change the emergency
bearings;
• Call the Alcatel Customer
Service.
• Temperature probe
D26 :
Y Y
NO CONNECT failure.
• Pump no connected.
• Sensor no connected.
■
The controller stops
the motor.
Valves are not
affected.
• Check the cable controller
electrical connection.
• Call the Alcatel Customer
Service.
The bearing life time
D24 :
BEARINGS MUST has been reached.
BE CHANGED
2/4
Alcatel - High Vacuum Technology - ATP User’s Manual
GB 00432 - Edition 01 - March 97
CAUSE
FAULT
INCIDENT
17-18
13-14 & 11-12
Diagnosis and troubleshooting
ACT 1000 T
D 20
CAUSE
FAULT
INCIDENT
17-18
13-14 & 11-12
Diagnosis and troubleshooting
ACT 1000 T
CONSEQUENCE
REMEDY
• Converter memory
D27 :
DATE AND TIME problem.
• STOCK Parameter
activated.
N N ■ The controller supplies
power to the pump
but the display is
incorrect.
• Access the DATE menu and
update the new date.
• Reinitialize the controller with
the main switch (0/1)
• Call the Alcatel Customer
Service.
Writing memory
D28 :
DISABLE EEPROM problem on the
management card.
WRITE
N N ■ The controller supplies
power to the pump
but the data are not
saved.
• Reinitialize the controller with
the main switch (0/1)
• Call the Alcatel Customer
Service.
• Contacter le Service Client.
D29 :
INPUT POWER
• Mains power failure. N Y ■ The pump is not
powered and generate
• Problem on the 72V
power to the controller.
power supply.
The defect appears
briefly before the
power cut.
• Check the cable connection to
the pump and controlle.
• Check the fuses.
• Call the Alcatel Customer
Service.
Reading memory
problem on the
management card.
NN
■
The controller stops
the motor.
• Call the Alcatel Customer
Service.
D37 :
GREASING
BEARING
The bearing relubricated N N
time has been reached.
■
The «fault» signal
flashes.
• Make the relubrication and
reinitialize the maintenance
counter.
GB 00432 - Edition 01 - March 97
D30 :
EEPROM
CHECKSUM
Alcatel - High Vacuum Technology - ATP User’s Manual
3/4
D 20
Diagnosis and troubleshooting
ACT 1000 T
INCIDENT
CAUSE
ACT 1000 T V2.X
-------------
When the controller is
started up, the pump
cannot be identified.
The controller is help
up.
• Call the ALCATEL Customer
Service.
■ ■■■■■■■■■■■■■■■■■■
■ ■■■■■■■■■■■■■■■■■■
■ ■■■■■■■■■■■■■■■■■■
■ ■■■■■■■■■■■■■■■■■■
Converter power
supply problem.
The controller is
blocked.
• Call the ALCATEL Customer
Service.
■ ■■■■■■■■■■■■■■■■■■
The micro board is
not working.
The controller is not
working.
• Call the ALCATEL Customer
Service.
The microprocessor is
running on itself: it is
not able to control the
operating sequency.
Momentaneaously, the
controller is not
working.
• If the speed is zero when the
message appears, wait for the
message disappiars and try
again the starting procedure.
• If the speed is not zero, wait
for running stops and start again
the pump.
• If the message continues, call
the ALCATEL Customer Service.
PUMP MEMORY FAULT
■ ■■■■■■■■■■■■■■■■■■
ACT 1000 T V2.X
-------------
REMEDY
GB 00432 - Edition 01 - March 97
WDOG CONVERTER
CONSEQUENCE
4/4
Alcatel - High Vacuum Technology - ATP User’s Manual
D 30
ATP 80, ATP 100, ATP 150, ATP 400
Maintenance frequency
Intervals for relubrication and the ball bearings replacement
depend on the type of process used.
Housing temperature
measuring point
ATP 80
ATP 100
Use of the pump
Pump curve:
ATP 80 - ATP 80 C
ATP 100 - ATP 100 C
ATP 150 - ATP 150 C
ATP 400 - ATP 400 C
ATP 400 HPC
ATP 150
ATP 400
In continuous operation, at ultimate pressure,
no process.
In cycle less than 1 hour, at maximum inlet pressure,
no process.
In cycle less than 1 hour, at maximum inlet pressure,
with chlorinated or fluorine process.
Relubrication schedule (hours)
16000
14000
12000
10000
8000
GB 00433 - Edition 01 - March 97
6000
4000
Housing temperature (°C)
2000
10
Example
*Maintenance counter
20
30
40
50
For use at 20°C housing temperature, in continuous
operation, at ultimate pressure,
the maintenance frequency is 13000h (t).
t
13000h 1st lubrication
t x 2 26000h 2nd lubrication
t x 3 39000h Disassemble the pump, replace
and condition the ball bearings
Alcatel - High Vacuum Technology - ATP User’s Manual
M*=0
M*=1
M*=2
1/1
D 40
ATP 900
Maintenance frequency
Intervals for relubrication and the ball bearings replacement
depend on the type of process used.
Housing temperature
measuring point
Use of the pump
Pump curve:
ATP 900 - ATP 900 C
ATP 900 HPC
ATP 900
In continuous operation, at ultimate pressure,
no process.
In cycle less than 1 hour, at maximum inlet pressure,
no process.
In cycle less than 1 hour, at maximum inlet pressure,
with chlorinated or fluorine process.
Relubrication schedule (hours)
10000
9000
8000
7000
6000
5000
GB 00434 - Edition 01 - March 97
4000
3000
Housing temperature (°C)
2000
10
Example
*Maintenance counter
20
30
40
50
For use at 20°C housing temperature, in continuous
operation, at ultimate pressure,
the maintenance frequency is 8000h (t).
t
8000h 1st lubrication
t x 2 16000h 2nd lubrication
t x 3 24000h Disassemble the pump, replace
and condition the ball bearings
Alcatel - High Vacuum Technology - ATP User’s Manual
M*=0
M*=1
M*=2
1/1
Chapter E
ATP User’s Manual
Operation sheets
■ Precautions before maintenance . . . . . . . . . . . . ■ E 10
■ ATP 80/100 Pumps lubrication . . . . . . . . . . . . ■ E 20
■ ATP 150/400/900 Pumps lubrication. . . . . . . . ■ E 30
■ ATP 80/100 bearing replacement . . . . . . . . . . ■ E 40*
■ ATP 150/400/900 bearing replacement . . . . . ■ E 50*
■ Cleaning parts . . . . . . . . . . . . . . . . . . . . . . . ■ E 60*
■ Pump running-in for ATP 80/100/150/400. . . . ■ E 70
■ Maintenance counters for
ACT 200 T and 600 T controllers . . . . . . . . . . . ■ E 80
■ ATP 900 pump running-in . . . . . . . . . . . . . . . . ■ E 90
■ Maintenance counters for
GB 00435 - Edition 08 - February 98
ACT 1000 T controllers . . . . . . . . . . . . . . . . . ■ E 100
* These chapters are included into the ball bearing replacement manual delivered with
the specific tool.
Alcatel Vacuum Technology France- ATP User’s Manual
1/1
E 10
Precautions before maintenance
It is important to isolate the machine from the electrical power supply source
before any intervention inside the equipment (for maintenance reasons).
Before any maintenance operation, check the pumping conditions of the
installation: toxicity, possible corrosion of the pumped gases. Depending on the
case, we recommend:
- to purge the pumping installation with dry nitrogen before any intervention;
- to wear gloves, goggles and breathing masks, if necessary;
- to ventilate the room well and disassemble the equipment under a fume hood.
After a complete maintenance operation, it is recommended to perform a
helium leaktightness test.
GB 00437 - Edition 01 - March 97
Similarly, follow all the safety instructions concerning start-up.
Alcatel Vacuum Technology France - ATP User’s Manual
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E 20
ATP 80 and ATP 100
Pumps lubrication
The first lubrication required for the correct operation of ATP
pumps is performed in the factory. Subsequent lubrications
should be performed according to the procedure below and
according to a frequency defined as a function of processes
used (see scales D 30).
Only use the ALCATEL grease contained in the lubrication
syringe (refer to the maintenance component references F 10).
Avoid introducing foreign matter into the pump
during these operations. Lubrication must be
performed with the pump switched off.
Use of the lubrication
syringe
The ATP contains two bearings which must both be
reloaded with grease at each relubrication period.
The syringe is equipped with two jumpers with different
widths and colours (red and black) used to proportion
the grease accurately for each pump bearing.
Lubrication of bearing on
the pumping cell side:
black jumper.
EXHAUST
Lubrication of bearing
opposite the pumping
cell side:
red jumper.
PUMPING CELL
GB 00438 - Edition 01 - March 97
INLET
Alcatel Vacuum Technology France - ATP User’s Manual
1/2
E 20
ATP 80 and ATP 100
Pumps lubrication
Disconnect the pump from the installation.
End cap
Bearing lubrication
3 Remove the end cap by
removing the two attachment
screws. Remove the
compression spring and the
adjustment sleeve
(asymmetrical part, mark
the direction for assembly).
Bearing opposite
the pumping cell
Introduce the syringe equipped with its needle into
the bearing and remove the red jumper.
Always position the syringe needle between
two balls of the bearing so as not to damage
the bearing.
Bearing on pumping
cell side
Introduce the lubrication syringe needle
into the drilled screw located at the center
of the rotor until it comes to a stop
against the screw head. Keep the syringe
pressed down to the bottom of its housing
throughout the operation.
Remove the black jumper from the syringe and introduce
the grease until the plunger comes to a stop.
Remove the syringe.
3 Reassemble the adjustment sleeve (taking care with
the direction), the spring and the end cap with its o-ring.
The relubrication operation is complete.
Execute the pump running-in: see E 70.
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Alcatel Vacuum Technology France - ATP User’s Manual
GB 00438 - Edition 01 - March 97
Distribute the dose of grease in
2 diametrically opposed points, until
the syringe plunger comes to a stop against
the black jumper.
E 30
ATP 150, ATP 400 and ATP 900
Pumps lubrication
The first lubrication required for the correct operation of ATP
pumps is performed in the factory. Subsequent lubrications
should be performed according to the procedure below and
according to a frequency defined as a function of processes
used (see scales D 30 and D 40).
Only use the ALCATEL grease contained in the lubrication
syringe (refer to the maintenance component references F 10).
Avoid introducing foreign matter into the pump
during these operations. Lubrication must be
performed with the pump switched off.
Use of the lubrication
syringe
The ATP contains two bearings which must both be
reloaded with grease at each relubrication period.
The syringe is equipped with two jumpers with different
widths and colours (red and black) used to proportion
the grease accurately for each pump bearing.
Lubrication of bearing on
the pumping cell side:
black jumper.
EXHAUST
Lubrication of bearing
opposite the pumping
cell side:
red jumper.
PUMPING CELL
GB 00439 - Edition 01 - March 97
INLET
Alcatel Vacuum Technology France - ATP User’s Manual
1/2
E 30
ATP 150, ATP 400 and ATP 900
Pumps lubrication
The pump can remain connected to the installation during
lubrication.
End cap
Lubrication of the bearing
opposite the pumping cell
13
Unfasten the lubricating
plug on the end cap side.
Introduce the syringe equipped
with its needle to the bottom
of the housing and remove
the red jumper.
While keeping the syringe
needle at the bottom of its
housing, introduce the grease
until the plunger comes to a stop. Remove the syringe.
Replace the lubricating plug after replacing its o-ring,
contained in the syringe packaging.
13
Unfasten the lubricating
plug on the pumping cell side.
Repeat the same operations,
this time removing the black
jumper from the syringe (keep
the syringe at the bottom of
its housing throughout the
operation).
Remove the syringe and reassemble the lubricating plug
equipped with its new o-ring.
The relubrication operation is complete.
Execute the pump running-in:
see E 70 for ATP 150 and ATP 400, and
see E 90 for ATP 900.
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Alcatel Vacuum Technology France - ATP User’s Manual
GB 00439 - Edition 01 - March 97
Lubrication of the bearing
on the pump cell side
E 70
Pump running-in for
ATP 80, ATP 100, ATP 150, ATP 400
The pump must undergo a
running-in operation
It consists of pump operation cycles at different speeds to
distribute gradually and regularly the grease through
the ball bearings.
Running-in after ball
bearing replacement
Running-in program No. 1
duration ≈ 20 hours
This operation is used to obtain the pump's initial
performance in terms of reliability, noise level, vibration
and power consumption.
Running-in after pump
lubrication
Running-in program No. 2
duration ≈ 2 h 30
This operation is used to fine-tune the distribution of
the grease in the bearings.
The running-in consist to run Start/Stop cycles at different
speeds until a pre-defined rotational speed is reached.
A phase is made of a chain of identical cycles.
Test at pre-defined
rotation speed reached
Pre-defined
rotation
speed
0
t
GB 00443 - Edition 02 - February 99
START
STOP
Cycle diagram
During the running-in, cycle and phase counters are
decremented to display
PROG:1
PH:0
END
CYCLE:0
The running-in is ended.
Alcatel Vacuum Technology France - ATP User’s Manual
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E 70
Pump running-in for
ATP 80, ATP 100, ATP 150, ATP 400
- Let the pump operate 10 minutes at atmospheric pressure.
- Then, connect the primary pump and operate at ultimate
pressure (the cooling has been started up).
- Start the running-in operation as follows:
Running-in procedure
DISPLAY
SETUP
RUNNING IN
ENTER
PROG:1
PH:0
STOP
CYCLE:0
ENTER
PROG:1
PH:0
STOP
CYCLE:0
Selection of running-in
program, 1 or 2.
STOP
CYCLE:0
Selection of start/stop
running-in program.
ENTER
PROG:2
PH:0
ENTER
Displaying the data
concerning the cycle in
progress on the running-in
screen:
PROG:2IN PROGRESS
PH:8
CYCLE:6
FAULT
Orange lit
PREVIOUS
Orange flashing
(Twice)
DISPLAY
SETUP
RUNNING IN
PREVIOUS
Number of hour
of operation
5010H
12000RPM
RUNNING IN…
Current message RUNNING
2/3
Running-in speed which
alternates depending on
the sequences
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00443 - Edition 02 - February 99
Running-in program "2" is
selected. The screen displays
the phases and cycles
corresponding to the successive running-in sequences.
The standby indicator flashes.
E 70
Pump running-in for
ATP 80, ATP 100, ATP 150, ATP 400
If a problem occurs during
running-in
The controller displays:
PROG 2
PH 1
FAULT
CYCLE 2
and the program is stopped. Remedy to the problem and
start again the running-in operation.
During the running-in cycles:
- the START / STOP / STANDBY keys are deactivated;
- access to the SETUP menu is impossible;
- access to the DISPLAY menu is possible.
We advise you against stopping the running-in procedure.
If a power failure occurs
during running-in
The controller displays:
5600H
ORPM
READY TO START !
GB 00443 - Edition 02 - February 99
and the Standby indicator light is lit on. The running-in
operation has been stopped and it must be started again.
Alcatel Vacuum Technology France - ATP User’s Manual
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E 80
Maintenance counters
for ACT 200T and ACT 600T controllers
Principle
The ball bearings can be regreased 2 times before to be
changed.
The maintenance counter allows to account for these
different operations (0-1-2) and to set their frequency limits
(in hours).
When leaving the factory, the «MAINTENANCE» counter
is reset at «0» and the frequency fixed at 5000h:
this can be modified depending on the defined values in
the greasing schedule (see D 30) or on the acquired
know-how.
Maintenance operations are automatically displayed by
the controller since this reset.
The user will have to perform the regreasings or ball
bearing replacement and to increase the maintenance
counter.
Example of operation with a maintenance frequency fixed to 5000h*.
"MAINTENANCE" Counter
"LIMIT" (period in h)
"TIME BEARINGS" Counter
0
1
2
0
5000
10000
15000
5000
5000
10000
15000
W01
W01
W02
1st lubrication
+
Increase
"MAINTENANCE"
counter to 1
+
Start
the running-in
program N° 2**
2nd lubrication
+
Increase
"MAINTENANCE"
counter to 2
+
Start
the running-in
program N° 2**
Bearings
replacement
+
Increase
"MAINTENANCE"
counter to 0
+
Start
the running-in
program N° 1**
0
GB 00444 - Edition 01 - February 99
Message
Maintenance
operation
New
bearings
*The maintenance frequency for regreasing or ball bearing replacement could be modified along the life time of the bearings:
it could be justified by a process evolution, or the user’s know-how.
**In all the cases, wait for the display of running-in «END».
Alcatel Vacuum Technology France - ATP User’s Manual
1/4
E 80
Maintenance counters
for ACT 200T and ACT 600T controllers
Increasing of
the «MAINTENANCE»
counter after regreasing
DISPLAY
SETUP
RUNNING IN
ENTER
Display of the «W01: GREASING» message and
lighting of «Fault» light.
Enter the access code
and valid by ENTER .
ACCESS CODE
0
SET ANALOG OUT.
Access to
menu
by pressing on key
MAINTENANCE
MAINTENANCE :
0
LIMIT
5000
ENTER
ENTER
MAINTENANCE :
1
LIMIT
10000
ENTER
MAINTENANCE :
1
LIMIT
10000
Choice of maintenance
frequency:
- 1 after 1st lubrication.
- 2 after 2nd lubrication.
The frequency has been
increased of 5000h.
However, it is possible to
change the frequency by
pressing on
«W01 » message erasing and
«Fault» light extinction.
PREVIOUS
DISPLAY
SETUP
RUNNING IN
PREVIOUS
5000H
0RPM
READY TO START!
2/4
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00444 - Edition 01 - February 99
MAINTENANCE :
0
LIMIT
5000
E 80
Maintenance counters
for ACT 200T and ACT 600T controllers
Counter resetting after
ball bearing
replacement
DISPLAY
SETUP
RUNNING IN
ENTER
Display of the «W02 : ATP MAINTENANCE» message
and lighting of «Fault» light.
ACCESS CODE
0
SET ANALOG OUT.
Enter the access code
and valid by ENTER .
Access to
menu
by pressing on key
MAINTENANCE
MAINTENANCE :
2
LIMIT
15000
ENTER
MAINTENANCE :
2
LIMIT
15000
Reset of the counter.
ENTER
MAINTENANCE :
0
LIMIT
5000
Possibility to change
the value of frequency.
to validate.
ENTER
MAINTENANCE :
0
LIMIT
5000
PREVIOUS
GB 00444 - Edition 01 - February 99
DISPLAY
SETUP
RUNNING IN
DISPLAY
SETUP
RUNNING IN
ENTER
PROG:2
PH:0
STOP
CYCLE:0
Start the running-in program N°1 and wait for the display of
Running-in «END»
TIME BEARINGS counter is automatically reset to «0» after
program 1 running-in.
«W02» message erasing and «Fault» light extinction.
Alcatel Vacuum Technology France - ATP User’s Manual
3/4
E 80
Maintenance counters
for ACT 200T and ACT 600T controllers
After a ball bearing replacement in our Service Centers,
it is necessary to reset the TIME BEARINGS counter
as
follows:
DISPLAY
SETUP
RUNNING IN
ENTER
Enter the access code and
valid by ENTER .
ACCESS CODE
0
Access to
SET ANALOG OUT.
TIME BEARINGS
menu by pressing
on key
TIME BEARINGS
ACTUAL :
45000
ENTER
TIME BEARINGS
ACTUAL :
45000
TIME BEARINGS
ACTUAL :
0
to validate.
TIME BEARINGS
ACTUAL :
0
PREVIOUS
4/4
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00444 - Edition 01 - February 99
ENTER
Reset of the counter.
E 90
ATP 900 pump running-in
The pump must undergo
a running-in operation
It consists of pump operation cycles at different speeds to
distribute gradually and regularly the grease through
the ball bearings.
Cycles and phases The running-in consist to run Start/Stop cycles at different
speeds until a pre-defined rotational speed is reached.
A phase is made of a chain of identical cycles.
Test at pre-defined
rotation speed reached
Pre-defined
rotation
speed
0
START
t
STOP
Cycle diagram
GB 00445 - Edition 01 - March 99
Running-in procedure - Let the pump operate 10 minutes at atmospheric
pressure.
- Then, connect the primary pump and operate at ultimate
pressure (the cooling has been started up).
- Then, do the following cycles :
Running-in after lubrication
of the ball bearing
1st phase : 6 cycles START/STOP
to
and leave running for 30mn to
2nd phase : 2 cycles START/STOP
to
and leave running for 30mn to
3rd phase : 2 cycles START/STOP
to
and leave running for 30mn to
4th phase : 1 cycle START/STOP
to
and leave running for 30mn to
6000
6000
10000
10000
16500
16500
23000
23000
RPM
RPM
RPM
RPM
RPM
RPM
RPM
RPM
STANDBY menu allows speed adjustment.
Alcatel Vacuum Technology France - ATP User’s Manual
1/2
E 90
ATP 900 pump running-in
Running-in after
ball bearing replacement
1st phase :
2nd phase :
3rd phase :
START/STOP
running for 4h
START/STOP
running for 4h
START/STOP
running for 5h
START/STOP
running for 3h
then for1h
to
to
to
to
to
to
to
to
to
6000
6000
10000
10000
16500
16500
23000
23000
27000
RPM
RPM
RPM
RPM
RPM
RPM
RPM
RPM
RPM
GB 00445 - Edition 01 - March 99
4th phase :
6 cycles
and leave
2 cycles
and leave
2 cycles
and leave
1 cycle
and leave
2/2
Alcatel Vacuum Technology France - ATP User’s Manual
E 100
Maintenance counters
for ACT 1000T controller
Principle
The ball bearings can be regreased 2 times before to be
changed.
The maintenance counter allows to account for these
different operations (0-1-2) and to set their frequency limits
(in hours).
When leaving the factory, the «BEARING MAINT.»
counter is reset at «0» and the frequency fixed at 5000h:
this can be modified depending on the defined values in
the greasing schedule (see D 40) or on the acquired
know-how.
Maintenance operations are automatically displayed by
the controller since this reset.
The user will have to perform the regreasings or ball
bearing replacement and to increase the «BEARING
MAINT.» and «BEARING LIMIT» counters.
Example of operation with a maintenance frequency fixed to 5000h*.
"BEARING MAINT" Counter
"LIMIT" (period in h)
"BEARING LIMIT" Counter
0
1
2
0
5000
10000
15000
5000
0
5000
10000
15000
D37
D37
D24
1st lubrication
+
Increase
"BEARING MAINT"
counter to 1
and
"BEARING LIMIT"
counter to 10000
2nd lubrication
+
Increase
"BEARING MAINT"
counter to 2
and
"BEARING LIMIT"
counter to 15000
Bearings
replacement
+
Increase
"BEARING MAINT"
counter to 0
and
"BEARING LIMIT"
counter to 5000
+
Reset
"BEARING"
counter
GB 00446 - Edition 01 - March 97
Message
Maintenance
operation
New
bearings
*The maintenance frequency for regreasing or ball bearing replacement could be modified along the life time of the bearings:
it could be justified by a process evolution, or the user’s know-how.
Alcatel Vacuum Technology France - ATP User’s Manual
1/3
E 100
Maintenance counters
for ACT 1000T controller
Increasing of the
«BEARING MAINT»
counter after regreasing
ACT 1000T
DISPLAY
V1.XX
PARAMETERS
ENTER
Display of the «D37: GREASING BEARING» message
and lighting of «Fault» light.
PARAMETERS :
SPEED START
RS232 AN.OUT
AIR INLET
DATE
BEARING
RESET
STOCK
Access to
menu
by pressing on key
BEARING MAINT.
PARAMETERS :
SPEED START
RS232 AN.OUT
AIR INLET
DATE
BEARING
RESET
STOCK
ENTER
BEARING :
5000H
------------MAINT :
0
LIMIT :
5000
ENTER
BEARING :
5000H
------------MAINT :
1
LIMIT :
5000
Choice of maintenance
frequency:
- 1 after 1st lubrication.
- 2 after 2nd lubrication.
Increase the limit counter
for frequency maintenance
(i.e. 5000h)
BEARING :
5000H
------------MAINT :
1
LIMIT :
10000
STATUS
«D37» message erasing and
«Fault» light extinction.
2/3
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00446 - Edition 01 - March 97
ENTER
E 100
Maintenance counters
for ACT 1000T controller
«BEARING MAINT»
counter resetting after
ball bearing
replacement
ACT 1000T
DISPLAY
V1.XX
PARAMETERS
ENTER
Display of the «D24 » message and
lighting of «Fault» light.
PARAMETERS :
SPEED START
RS232 AN.OUT
AIR INLET
DATE
BEARING
RESET
STOCK
Access to
BEARING MAINT.
PARAMETERS :
SPEED START
RS232 AN.OUT
AIR INLET
DATE
BEARING
RESET
STOCK
menu by
pressing on key
ENTER
BEARING :
15000H
------------MAINT :
2
LIMIT :
15000
Reset of the maintenance
counter.
ENTER
BEARING :
15000H
------------MAINT :
0
LIMIT :
15000
Possibility to change
the value of frequency
(i.e. 5000h).
GB 00446 - Edition 01 - March 97
ENTER
BEARING :
15000H
------------MAINT :
0
LIMIT :
5000
Reset of the bearing counter.
ENTER
BEARING :
0H
------------MAINT :
0
LIMIT :
5000
STATUS
«D24» message erasing and
«Fault» light extinction.
Alcatel Vacuum Technology France - ATP User’s Manual
3/3
Chapter F
ATP User’s Manual
Maintenance
components
GB 00450 - Edition 08 - February 98
■ Maintenance parts. . . . . . . . . . . . . . . . . . . . . ■ F 10
Alcatel Vacuum Technology France- ATP User’s Manual
1/1
F 10
Maintenance parts
Lubrication syringe
Ready-to-use, it contains the grease load required for
a regreasing operation on the 2 bearings and two BS rings.
Pump type
ATP 80/100
ATP 150
ATP 400/900
P.N.
056993
101924
Necessary tools for pump overhaul (1 + 2 + 3)
1 - Seal kit
It includes all the seals which must be replaced during
the maintenance of the pump with a change of bearings.
Pump type
ATP 80/100
ATP 150
ATP 400
ATP 900
GB 00452 - Edition 02 - March 97
2 - Tool kit
It enables the user to
replace bearings easily.
It includes the ball bearing
replacement manual.
Pump type
ATP 80/100
ATP 150
ATP 400/900
Alcatel Vacuum Technology France - ATP User’s Manual
P.N.
062698
063078
063076
062992
P.N.
101930
1/3
F 10
Maintenance parts
3 - Ceramic bearing kit
The kit contains 1 bearing and a pre-load washer
(not used in the ATP)
Choose the bearings according to the 2 figures marked on
the identification plate, after the pump serial number and
in compliance with the table below, in order to obtain a
correct assembly set.
Shaft diam. reference
ALCATEL - ANNECY
Type : ATP 80
N° série : 85501 2 3
Pump
type
80
100
150
400
900
pumping cell side
side opposite the cell
Reference on identification plate
1
2
3
4
5
066671
066672
066673
066674 066675
066691
066692
066693
066694 066695
First figure 2: For the bearing on the pumping cell side,
the choice of kit is reference 066672;
Second figure 3: For the bearing on the side opposite
the cell, the choice of kit is reference 066673.
2/3
Alcatel Vacuum Technology France - ATP User’s Manual
GB 00452 - Edition 02 - March 97
Example of ATP 80 model pump:
F 10
Maintenance parts
Copper seals
for pumps with
CF-F flanges
Fuses for controllers
GB 00452 - Edition 02 - March 97
Air inlet electrovalves
Flange
type
63 CF-F
100 CF-F
160 CF-F
200 CF-F
Sets of 10 parts
303283
303284
303285
303286
Description
Fuse 5 x 20
T 250V
Fuse 5 x 20
T 250V
Fuse 6 x 32
T 250V
Description
Electrovalve
Electrovalve
Electrovalve
Electrovalve
Electrovalve
Electrovalve
Electrovalve
Silencer
Alcatel Vacuum Technology France - ATP User’s Manual
Qty
ACT 200T
2
3.15A
coil
coil
coil
coil
coil
coil
operator
2
10 sets of 1 part
(Unit packaged)
303290
303291
303292
303293
ACT 600T
ACT 1000T
6.3A
2
16A
240V 50/60
220V 50/60
200V 50/60
115V 50/60
100V 50/60
12V DC
HZ
HZ
HZ
HZ
HZ
Part Num.
038124
038121
038125
038122
038126
038127
038102
075990
3/3
Chapter G
ATP User’s Manual
Appendix
GB 00465 - Edition 08 - February 98
■ Pumping curves. . . . . . . . . . . . . . . . . . . . . . . ■ G10
Alcatel Vacuum Technology France- ATP User’s Manual
1/1
G 10
Pumping curves
Pumping speed versus inlet pressure
Pumping
speed (l/s)
1000
10
-4
900
Inlet pressure (Pa)
-3
10
10
-2
10
-1
1
10
10
2
Gas : N2
ATP900
800
700
600
Upper limits
for continuous operation
(Water cooled pump).
500
400
ATP400
300
GB 00466 - Edition 01 - March 97
200
100
ATP150
ATP100
ATP80
0
10-6
10-5
10-4
10-3
10-2
10-1
1
Inlet pressure (mbar)
Alcatel - High Vacuum Technology - ATP User’s Manual
1/4
G 10
Pumping curves
Pumping speed versus inlet pressure
Pumping
speed (l/s)
1000
10-4
900
Inlet pressure (Pa)
10-3
10-2
10-1
1
ATP900 C
10
102
Gas : N2
800
700
600
Upper limits for continuous
operation
(Water cooled pump).
500
400
ATP400 C
200
100
0
10-6
ATP150 C
ATP100 C
ATP80 C
10-5
10-4
10-3
10-2
10-1
1
Inlet pressure (mbar)
2/4
Alcatel - High Vacuum Technology - ATP User’s Manual
GB 00466 - Edition 01 - March 97
300
G 10
Pumping curves
Pumping speed versus inlet pressure
Pumping
speed (l/s)
1000
10
-4
Inlet pressure (Pa)
10-3
10
-2
10
-1
1
10
2
Gas : N2
900
ATP900 HPC
ATP400 HPC
800 Ar/SF6
700
10
N2
Upper limits
for continuous operation
600
500
Ar/SF6
400
N2
GB 00466 - Edition 01 - March 97
300
200
100
0
10
-6
10
-5
10
-4
10
-3
10
-2
10
-1
1
Inlet pressure (mbar)
Alcatel - High Vacuum Technology - ATP User’s Manual
3/4
G 10
Pumping curves
Flow rate versus inlet pressure
Flow rate
sccm
10
-3
104
Inlet pressure (Pa)
10
-2
-1
1
10
ATP900 HPC
ATP400 HPC
103
10
10
10
2
10
3
Gas : N2
2
Upper limits
for continuous operation
1
10-5
10-4
10-3
10-2
10-1
1
101
Inlet pressure (mbar)
4/4
Alcatel - High Vacuum Technology - ATP User’s Manual
GB 00466 - Edition 01 - March 97
10
CHINA
Alcatel Vacuum Technology, Shanghai
N°82 Lane 887 Zuchongzhi Road
Zhangjiang High-Tech Park,
Shanghai 201203 - P.R. China
Tel. (86) 21 5027 0628
Fax. (86) 21 3895 3815
JAPAN
Alcatel Vacuum Technology Japan
4-3-10 Shimokodanaka,
Nakahara-ku
Kawasaki, Kanagawa 211-0041
Tel. (81) 44-797-5920
Fax. (81) 44-797-5932
SWEDEN
Adixen Sensistor AB.
Box 76 - SE-581 02 Linköping
SWEDEN
Tel. 46 (0)13 35 59 00
Fax. 46 (0)13 35 59 01
FRANCE
Alcatel Vacuum Technology France
98, avenue de Brogny - BP 2069
74009 Annecy cedex
Tel. (33) 4 50 65 77 77
Fax. (33) 4 50 65 77 89
KOREA
Alcatel Vacuum Technology Korea
447 Banwol-dong, Hawsung-si, Kyungkido,
445-330, Korea
Tel. (82) 031-206-6277
Fax. (82) 031-204-6279
TAIWAN
Alcatel Vacuum Taiwan
No. 169-3, Sec.1, Kang-Leh Rd
Song-Lin Village, Hsin-Feng 304
Hsin-Chu County, Taiwan -R.O.C.
Tel. (886) 35599230
Fax.(886) 35599231
GERMANY
Alcatel Hochvakuumtechnik GmbH
Am Kreuzeck 10 - Postfach 1151
97877 Wertheim
Tel. (49) 9342 9610 00
Fax. (49) 9342 9610 30
NETHERLANDS
ALCATEL Vacuum Technology Benelux
Landzichtweg 60
NL 4105 DP Culemborg
THE NETHERLANDS
Tel. (31) 345 478 400
Fax. (31) 345 531 076
UNITED KINGDOM
Alcatel Vacuum Technology UK Ltd
8 Bain Square - Kirkton Campus
Livingston - West Lothian
EH54 7DQ Scotland
Tel. (44) 1 506 418 000
Fax. (44) 1 506 418 002
ITALY
Alcatel Vacuum Systems
Via Trento, 30
20059 Vimercate (Mi)
Tel. (39) 0396 86 38 55
Fax. (39) 039 66 71 25
SINGAPORE
Alcatel Singapore Pte Ltd
49 Jalan Pemimpin
#01-01 APS Industrial Building
577203 Singapore
Tel. (65) 62540828
Fax. (65) 62547018
USA
Alcatel Vacuum Products
67, Sharp Street
Hingham - MA 02043
Tel. (1) 781 331 4200
Fax. (1) 781 331 4230
Alcatel Vacuum Technology France
98, avenue de Brogny - BP 2069 - 74009 Annecy cedex – France - Tel. (33) 4 50 65 77 77 - Fax. (33) 4 50 65 77 89
Web site :www.adixen.com