Agilent 4155C Semiconductor

Parameter Analyzer

Agilent 4156C Precision Semiconductor

Parameter Analyzer

Data Sheet

Introduction

Agilent 4155C and 4156C

Basic functions

• Set measurement and/or stress conditions

• Control measurement and/or stress execution

• Perform arithmetic calculations

• Display measured and calculated results on the LCD display

• Perform graphical analysis

• Store and recall measurement setups, and measurement and graphical display data

• Dump to printers or plotters for hardcopy output

• Perform measurement and analysis with built-in instrument BASIC

• Self test, Auto calibration

4155C 4156C

4xMPSMU 4xHRSMU

2xVMU 2xVMU

2xVSU 2xVSU

Desktop

EasyEXPERT

Desktop

EasyEXPERT

Confi guration

The 4155C and 4156C are both furnished with Desktop EasyEXPERT standard edition.

If you want the Desktop EasyEXPERT Plus edition, you can request the B1541A-002 when you order a 4155C or 4156C. For more information about the Desktop EasyEXPERT

Plus, please refer to page 11 of this data sheet.

41501B (Optional)

2xPGU (Option)¹

HPSMU (Option) or

2xMPSMU (Option)¹

GNDU

1. Minimum number of installable MPSMU

or PGU is two.

SMU: Source monitor unit

Display resolution: 6 digits at each current range (0.01 fA display resolution at 10 pA range) 2

HRSMU: High Resolution SMU

(1 fA/2 μV to 100 mA/100 V)

MPSMU: Medium Power SMU

(10 fA/2 μV to 100 mA/100 V)

HPSMU: High Power SMU

(10 fA/2 μV to 1 A/200 V)

VMU: Voltage Monitor Unit

(0.2 μV resolution in differential mode)

VSU: Voltage Source Unit

PGU: Pulse Generator Unit

(1 channel)

GNDU: Ground Unit

2. Accuracy not guaranteed. Minimum guaranteed resolution is 1 fA at 10 pA range.

2

Hardware

Specifi cation Condition

The “supplemental” information and

“typical” entries in the following specifi cations are not warranted, but provide useful information about the functions and performance of the instruments.

The measurement and output accuracy are specifi ed at the rear panel connector terminals when referenced to the Zero Check terminal under the following conditions:

1. 23 °C ±5 °C (double between 5 °C to

18 °C, and 28 °C to 40 °C if not noted otherwise)

2. After 40 minutes warm-up

3. Ambient temperature change less than

±1 °C after auto calibration execution.

4. Integration time: medium or long

5. Filter: ON (for SMUs)

6. Kelvin connection (for HRSMU, HPSMU, and GNDU)

7. Calibration period: 1 year

Agilent 4156C Precision Semiconductor Parameter Analyzer

HRSMU (High Resolution SMU) Specifi cations

Voltage Range, Resolution, and Accuracy (HRSMU)

Voltage

Range

Set Reso.

±2 V 100 μV

±20 V 1 mV

Set Accuracy

±(0.02%+400 μV)

±(0.02%+3 mV)

±40 V 2 mV

±100 V 5 mV

±(0.025 %+6 mV)

±(0.03%+15 mV)

1 100 mA (Vout ≤20 V), 50 mA (20 V<Vout≤40 V)

Meas.

Reso.

2 μV

20 μV

40 μV

100 μV

2 100 mA (Vout ≤20 V), 50 mA (20 V<Vout≤40 V), 20 mA (40 V<Vout≤100 V)

Meas. Accuracy

±(0.01%+200 μV)

±(0.01%+1 mV)

±(0.015%+2 mV)

±(0.02%+5 mV)

Max.

Current

100 mA

100 mA

1

2

Output Terminal/Connection:

Dual triaxial connectors, Kelvin (remote sensing)

Voltage/Current Compliance

(Limiting):

The SMU can limit output voltage or current to prevent damaging the device under test.

Voltage: 0 V to ±100 V

Current: ±100 fA to ±100 mA

Compliance Accuracy: Same as the current

(voltage) settling accuracy.

Current Range, Resolution, and Accuracy (HRSMU)

Current

Range

Set

Reso.

Set Accuracy

±10 pA 10 fA ±(4%+400 fA) 1, 2

±100 pA 10 fA ±(4%+400 fA) 1, 2

Meas.

Reso.

1 fA

Meas. Accuracy

±(4%+20 fA+1 fA×Vout/100) 1, 2

Max. V

100 V

1 fA ±(4%+40 fA+10 fA×Vout/100) 1, 2 100 V

±1 nA 100 fA ±(0.5%+0.7 pA+1 fA×Vout)

±10 nA 1 pA ±(0.5%+4 pA+10 fA×Vout)

2 10 fA ±(0.5%+0.4 pA+1 fA×Vout)

10 fA ±(0.5%+2 pA+10 fA×Vout)

2 100V

100V

±100 nA 10 pA ±(0.12%+40 pA+100 fA×Vout) 100 fA ±(0.1%+20 pA+100 fA×Vout) 100V

±1 μA 100 pA ±(0.12%+400 pA+1 pA×Vout) 1 pA ±(0.1%+200 pA+1 pA×Vout) 100V

±10 μA 1 nA ±(0.07%+4 nA+10 pA×Vout) 10 pA ±(0.05%+2 nA+10 pA×Vout) 100V

±100 μA 10 nA ±(0.07%+40 nA+100 pA×Vout) 100 pA ±(0.05%+20 nA+100 pA×Vout) 100V

±1 mA 100 nA ±(0.06%+400 nA+1 nA×Vout) 1 nA ±(0.04%+200 nA+1 nA×Vout) 100V

±10 mA 1 μA ±(0.06%+4 μA+10 nA×Vout) 10 nA ±(0.04%+2 μA+10 nA×Vout) 100V

±100 mA 10 μA ±(0.12%+40 μA+100 nA×Vout) 100 nA ±(0.1%+20 μA+100 nA×Vout) 3

HRSMU Supplemental Information:

Maximum allowable cable resistance when using Kelvin connection

(Force, Sense): 10 Ω

Typical voltage source output resistance

(Force line/non-Kelvin connection): 0.2 Ω

Voltage measurement input resistance/ current source output resistance:

≥10 15 Ω (10 pA range)

Current compliance setting accuracy for opposite polarity:

10 pA to 10 nA range: V/I setting accuracy ±12% of range

100 nA to 100 mA range: V/I setting accuracy ±2.5% of range

1 The accuracy is applicable when offset cancellation has been performed.

2 The offset current specifi cation is multiplied by one of the following factors depending upon the ambient temperature and humidity (RH = Relative Humidity):

Humidity RH

Temperature

5 °C to 18 °C

18 °C to 28 °C

28 °C to 40 °C

5 - 60

×2

×1

×2

60 - 80

×2

×2

×5

3 100 V (Iout≤20 mA), 40 V (20 mA<Iout≤50 mA), 20 V (50 mA<Iout≤100 mA)

Vout is the output voltage in volts. Iout is the output current in amps.

For example, accuracy specifi cations are given as ±% of set/measured value (0.04%) plus offset value (200 nA+1 nA×Vout) for the 1 mA range.

The offset value consists of a fi xed part determined by the set/measurement range and a proportional part that is multiplied by Vout or Vout/100.

Agilent 4156C Semiconductor Parameter Analyzer

MPSMU (Medium Power SMU) Specifi cations

Voltage Range, Resolution, and Accuracy (MPSMU)

Voltage

Range

±2 V

Set

Reso.

Set Accuracy

100 μV ±(0.03%+900 μV+0.3×Iout)

±20 V 1 mV ±(0.03%+4 mV+0.3×Iout)

±40 V 2 mV ±(0.03%+7 mV+0.3×Iout)

±100 V 5 mV ±(0.04%+15 mV+0.3×Iout)

1 100 mA (Vout ≤20 V), 50 mA (20 V<Vout ≤40 V)

Meas.

Reso.

2 μV

Meas. Accuracy Max.

Current

±(0.02%+700 μV+0.3×Iout) 100 mA

20 μV ±(0.02%+2 mV+0.3×Iout) 100 mA

40 μV ±(0.02%+3 mV+0.3×Iout) 1

100 μV ±(0.03%+5 mV+0.3×Iout) 2

2 100 mA (Vout ≤20 V), 50 mA (20 V<Vout ≤40 V), 20 mA (40 V<Vout≤100 V)

Current Range, Resolution, and Accuracy (MPSMU)

Current

Range

Set

Reso.

Set Accuracy

±1 nA 100 fA ±(0.5%+3 pA+2 fA×Vout)

±10 nA 1 pA ±(0.5%+7 pA+20 fA×Vout)

Meas.

Reso.

10 fA

10 fA

Meas. Accuracy

±(0.5%+3 pA+2 fA×Vout)

±(0.5%+5 pA+20 fA×Vout)

Max. V

100 V

100 V

±100 nA 10 pA ±(0.12%+50 pA+200 fA×Vout) 100 fA ±(0.1%+30 pA+200 fA×Vout) 100 V

±1 μA 100 pA ±(0.12%+400 pA+2 pA×Vout) 1 pA ±(0.1%+200 pA+2 pA×Vout) 100 V

±10 μA 1 nA ±(0.12%+5 nA+20 pA×Vout) 10 pA ±(0.1%+3 nA+20 pA×Vout) 100 V

±100 μA 10 nA ±(0.12%+40 nA+200 pA×Vout) 100 pA ±(0.1%+20 nA+200 pA×Vout 100 V

±1 mA 100 nA ±(0.12%+500 nA+2 nA×Vout) 1 nA ±(0.1%+300 nA+2 nA×Vout) 100 V

±10 mA 1 μA ±(0.12%+4 μA+20 nA×Vout) 10 nA ±(0.1%+2 μA+20 nA×Vout) 100 V

1 ±100 mA 10 μA ±(0.12%+50 μA+200 nA×Vout) 100 nA ±(0.1%+30 μA+200 nA×Vout)

1 100 V (Iout ≤20 V), 40 V (20 mA<Iout≤50 mA), 20 V (50 mA<Iout≤100 mA)

Vout is the output voltage in volts. Iout is the output current in amps.

For example, accuracy specifi cations are given as ±% of set/measured value (0.1%) plus offset value (30 pA+200 fA×Vout) for the 100 nA range.

The offset value consists of a fi xed part determined by the set/ measurement range and a proportional part that is multiplied by Vout.

Output Terminal/Connection:

Single triaxial connector, non-Kelvin

(no remote sensing)

Voltage/Current Compliance

(Limiting):

The SMU can limit output voltage or current to prevent damaging the device under test.

Voltage: 0 V to ±100 V

Current: ±1 pA to ±100 mA

Compliance Accuracy: Same as the current

(voltage) settling accuracy.

MPSMU Supplemental Information:

Typical voltage source output resistance: 0.3 Ω

Voltage measurement input resistance/current source output resistance: ≥10 13 Ω (1 nA range)

Current compliance setting accuracy for opposite polarity:

1 nA to 10 nA range: V/I setting accuracy

±12% of range

100 nA to 100 mA range: V/I setting accuracy ±2.5% of range

100

Current (mA)

MPSMU measurement and output range

50

-100

20

-40 -20 20 40

-20

-50

100

Voltage (V)

-100

VSU and VMU specifi cations are common to both the 4155C and 4156C

VSU (Voltage Source Unit)

Specifi cations

VSU Output Range:

Voltage

Range

Meas.

Reso.

Meas. Accuracy

±20 V 1 mV ±(0.05% of setting +10 mV) 1

1 Specifi cation is applicable under no load current.

Max. Output Current: 100mA

VSU Supplemental Information:

Output resistance: 0.2 Ω (typical)

Maximum load capacitance: 10 μF

Maximum slew rate: 0.2 V/μs

Current limit: 120 mA (typical)

Output Noise: 1 mV rms (typical)

VMU (Voltage Monitor Unit)

Specifi cations

VMU Differential Mode Range,

Resolution, and Accuracy:

Diff V

Range

Meas.

Reso.

Meas.

Accuracy

±0.2 V 0.2 μV ±(0.03%+10 μV+0.3 μV×Vi)

±2 V 2 μV ±(0.02%+100 μV+3 μV×Vi)

Max. Common Mode Voltage: ± 20 V

Note: Vi is the input voltage of VMU2 in volts.

For example, accuracy specifi cations are given as ±% of set/measured value (0.02%) plus offset value (100

μV+3 μV×Vi) for the 2 V range. The differential mode offset value consists of a fi xed part determined by the measurement range and a proportional part that is multiplied by Vi.

VMU Measurement Range,

Resolution, and Accuracy:

Voltage

Range

Meas.

Reso.

Meas.

Accuracy

±2 V 2 μV ±(0.02%+200 μV)

±20 V 20 μV ±(0.02%+1 mV)

VMU Supplemental Information:

Input Impedance: ≥1 GΩ

Input leakage current (@0 V): ≤500 pA

Measurement noise: 0.01% of range (p-p)

(typical) when integration time is 10 PLC

Differential mode measurement noise:

0.005% of range (p-p) (typical) when integration time is short.

3

4

Agilent 41501B SMU and Pulse Generator Expander

HPSMU (High Power SMU) Specifi cations

Voltage Range, Resolution, and Accuracy (HPSMU)

Voltage

Range

±2 V

Set.

Reso.

Set. Accuracy

100 μV ±(0.03%+900 μV)

±20 V 1 mV ±(0.03%+4 mV)

±40 V 2 mV ±(0.03%+7 mV)

±100 V 5 mV ±(0.04%+15 mV)

±200 V 10mV ±(0.045%+30 mV)

Meas.

Reso.

2 μV

Meas. Accuracy

±(0.02%+700 μV)

20 μV ±(0.02%+2 mV)

40 μV ±(0.02%+3 mV)

100 μV ±(0.03%+5 mV)

200 μV ±(0.035%+10 mV)

Max.

Current

1 A

1 A

500 mA

125 mA

50 mA

Current Range, Resolution, and Accuracy (HPSMU)

Current

Range

±10 nA

Set.

Reso.

±1 nA 100 fA ±(0.5%+3 pA+2 fA×Vout)

1 pA ±(0.5%+7 pA+20 fA×Vout)

Reso.

10 fA ±(0.5%+3 pA+2 fA×Vout)

10 fA ±(0.5%+5 pA+20 fA×Vout)

Max. V

200 V

200 V

±100 nA 10 pA ±(0.12%+50 pA+200 fA×Vout) 100 fA ±(0.1%+30 pA+200 fA×Vout) 200 V

±1 μA 100 pA ±(0.12%+400 pA+2 pA×Vout) 1 pA ±(0.1%+200 pA+2 pA×Vout) 200 V

±10 μA 1 nA ±(0.12%+5 nA+20 pA×Vout) 10 pA ±(0.1%+3 nA+20 pA×Vout) 200 V

±100 μA 10 nA ±(0.12%+40 nA+200 pA×Vout) 100 pA ±(0.1%+20 nA+200 pA×Vout 200 V

±1 mA 100 nA ±(0.12%+500 nA+2 nA×Vout) 1 nA ±(0.1%+300 nA+2 nA×Vout) 200 V

±10 mA 1 μA ±(0.12%+4 μA+20 nA×Vout) 10 nA ±(0.1%+2 μA+20 nA×Vout) 200 V

±100 mA 10 μA ±(0.12%+50 μA+200 nA×Vout) 100 nA ±(0.1%+30 μA+200 nA×Vout) 1

±1 A 100 μA ±(0.5%+500 μA+2 μA×Vout)

1 200 V (Iout ≤50 mA), 100 V (50 mA<Iout≤100 mA)

1 μA ±(0.5%+300 μA+2 μA×Vout) 2

2 200 V (Iout ≤50 mA), 100 V (50 mA<Iout≤125 mA), 40 V (125 mA<Iout≤500 mA), 20 V (500 mA<Iout≤1 mA)

Vout is the output voltage in volts. Iout is the output current in amps. For example, accuracy specifi cations are given as ±% of set/measured value (0.1%) plus offset value (30 pA+200 fA×Vout) for the 100 nA range.

The offset value consists of a fi xed part determined by the set/measurement range and a proportional part that is multiplied by Vout.

Output Terminal/Connection:

Dual triaxial connectors, Kelvin (remote sensing)

Voltage/Current Compliance

(Limiting):

Voltage: 0 V to ±200 V

Current: ±1 pA to ±1 A

Compliance Accuracy: Same as the current

(voltage) settling accuracy.

HPSMU Supplemental Information:

Maximum allowable cable resistance when using Kelvin connection:

Force: 0.7 Ω (100 mA to 1 A)

Force: 10 Ω (≤100 mA)

Sense: 10 Ω

Typical voltage source output resistance

(Force line/non-Kelvin connection): 0.2 Ω

Voltage measurement input resistance/ current source output resistance:

≥10 13 Ω (1 nA range)

Current compliance setting accuracy for opposite polarity:

1 nA to 10 nA range: V/I setting

accuracy ±12% of range

100 nA to 1 A range: V/I setting

accuracy ±2.5% of range

1000

Current (mA)

HPSMU measurement and output range

500

125

50

-200 -100 -40 -20 20 40 100 200

-50

-125

Voltage (V)

-500

-1000

PGU (Pulse Generator Unit)

Specifi cations

Modes: Pulse or constant

Amplitude: 0 Vp-p to 40 Vp-p

Window: -40.0 V to +40.0 V

Maximum current:

±100 mA

±200 mA (pulse width: ≤1 ms, average current 100 mA)

Pulse width: 1.0 μs to 9.99 s

Minimum resolution: 100 ns

Pulse period: 2.0 μs to 10.0 s

Minimum resolution: 100 ns

Delay: 0 s to 10 s

Minimum resolution: 100 ns

Transition time: 100 ns to 10 ms

Minimum resolution: 1 ns

Output impedance: 50 Ω or low impedance (≤1 Ω)

Burst count range: 1 – 65535

Pulse parameter accuracy:

Period: ±(2% +2 ns)

Width: ±(3% +2 ns)

Delay: ±(2% +40 ns)

Transition time: ±(5% +10 ns)

Trigger output:

Timing: Same timing and width as

PGU1 pulse output

PGU Supplemental Information

Overshoot: ≤±5% of amplitude ±10 mV (50

Ω output impedance to 50 Ω load)

Pulse width jitter: 0.2% + 100 ps

Pulse period jitter: 0.2% + 100 ps

Maximum slew rate: 100 V/μs (50 Ω output impedance to 50 Ω load)

Noise: 0.2% of range (@ DC output)

Pulse/DC Output Voltage and Accuracy (PGU)

Set

Parameter

Base

Voltage Range Resolution

Pulse

±20 V

±40 V

±20 V

±40 V

4 mV

8 mV

4 mV

8 mV

Note: DC output is performed by the Base Parameter.

Accuracy 1

±(1% of Base +50 mV +1% of Pulse)

±(1% of Base +50 mV +1% of Pulse)

±(3% of Base +50 mV)

±(3% of Base +50 mV)

1 Accuracy is specifi ed at leading edge - trailing edge = 1 μs

Pulse Range and Pulse Parameter (PGU)

Range Period

1 2 μs -100 μs

2

3

100 μs - 1000 μs

1 ms - 10 ms

Width

1 μs - 99.9 μs

1 μs - 999 μs

.01 ms - 9.99 ms

Delay

0 - 100 μs

0 - 1000 μs

0 - 10 ms

4

5

10 ms - 100 ms

100 ms - 1000 ms

0.1 ms - 99.9 ms

1 ms - 999 ms

0 - 100 ms

0 - 1000 ms

6 1 s - 10 s 0.01 s - 9.99 s 0 - 10 s

Note: Pulse width is defi ned when leading time is equal to trailing time.

PGU2 must be set in the same range as PGU1

0.1 μs

1 μs

10 μs

100 μs

1 ms

10 ms

MPSMU Specifi cations

Same as 4155C MPSMU.

GNDU (Ground Unit)

Specifi cations

Output Voltage: 0 V ±100 μV

Maximum sink current: 1.6 A

Output terminal/connection:

Single triaxial connector,

Kelvin (remote sensing)

GNDU Supplemental Information

Load Capacitance: ≤1 μF

Cable resistance:

Force ≤1 Ω

Sense ≤10 Ω

HRSMU, MPSMU, HPSMU

Supplemental Information

Maximum capacitive load: 1000 pF

Maximum guard capacitance: 900 pF

Maximum shield capacitance: 5000 pF

Maximum guard offset voltage: ±1 mV

Noise characteristics

(typical, Filter: ON):

Voltage source noise:

0.01% of V range (rms)

Current source noise:

0.1% of I range (rms)

Voltage monitor noise:

0.02% of V range (p-p)

Current monitor noise: 0.2% of I

Output overshoot (typical, Filter: ON):

Voltage source: 0.03% of V range

Current source: 1% of I range

Range switching transient noise (typical,

Filter: ON):

Voltage ranging: 250 mV

Current ranging: 10 mV

Maximum slew rate: 0.2 V/μs

Leading/Trailing Edge Times (PGU)

100 ns - 1000 ns

0.5 μs - 10 μs

1 ns

10 ns

±(5% + 10 ns)

±(5% + 10 ns)

5.0 μs - 100 μs

50 μs - 1000 μs

0.5 ms - 10 ms

100 ns

1 μs

10 μs

±(5% + 10 ns)

±(5% + 10 ns)

±(5% + 10 ns)

Restrictions:

Pulse width < Pulse Period, Delay time < Pulse period, Leading time < Pulse width × 0.8

Trailing time < (Pulse period - Pulse width) × 0.8

Period, width, and delay of PGU1 and PGU2 must be in the same range. Leading time and trailing time for a PGU must be in the same range.

5

6

Capacitance Calculation Accuracy (Supplemental Data)

Accuracy is derived from the current range, voltage range, capacitance measurement and leakage current measurement integration times, and the guard capacitance of cabling and step voltage. The information in the chart below is based on the following conditions: Voltage Range ±20 V; Voltage Step: 100 mV; Guard Capacitance: 100 pF; Equivalent parallel resistance of DUT: 1 × 10 15 Ω. The ratio of integration times for capacitance measurement and leakage current measurement is 1:1.

HRSMU

Current

Range

10 pA/

100 pA

1 nA

10 nA

Integration

Time

0.5 sec

1 sec

2 sec

0.1 sec

0.5 sec

2 sec

0.1 sec

0.5 sec

2 sec

10 sec

Max. Meas.

Value

Resolution Accuracy

Reading %

100 pF/1 pF 5 fF

2 pF/20 pF 10 fF

4.2

4.3

76 pF/760 pF 20 fF

700 pF 10 fF

4.5 nF

18 nF

40 fF

200 fF

4.3

0.84

0.85

0.93

7 nF

45 nF

180 nF

940 nF

10 fF

40 fF

200 fF

1 pF

0.84

0.85

0.93

1.3

Offset

70 fF

90 fF

130 fF

160 fF

280 fF

740 fF

200 fF

440 fF

1.4 pF

6.2 pF

MPSMU

Current Integration Max. Meas.

Time Value

1 nA 0.1 sec

0.5 sec

2 sec

700 pF

4.5 nF

18 nF

10 nA 0.1 sec

0.5 sec

2 sec

10 sec

7 nF

45 nF

180 nF

940 nF

Resolution Accuracy

Reading %

10 fF 0.91

40 fF

200 fF

10 fF

40 fF

200 fF

1 pF

0.94

1.0

0.91

0.94

1.0

1.6

Offset

170 fF

340 fF

1 pF

180 fF

480 fF

1.6 pF

7.6 pF

Current compliance must be smaller than the current range. The capacitance of the DUT and measurement path must be smaller than the maximum measurement value.

Functions

Measurement Setup

Setting

• Fill-in-the-blanks using front-panel or full-size external keyboard

• Load settings from fl oppy disk or via the

LAN port

• Program using internal Instrument BASIC or via GPIB

• HELP Function

• Library: Default measure setup, Vce-Ic,

Vds-Id, Vgs-Id, and Vf-If are predefi ned softkeys

• User-defi ned measurement setup library

• Auto fi le load function on power-up

Measurement

The 4155C and 4156C can perform dc or pulsed force/measure, and stress force. For dc, voltage/current sweep and sampling (time domain) measurements are available.

Voltage/Current Sweep

Measurement Characteristics

Each SMU and VSU can sweep using VAR1 (primary sweep),

VAR2 (subordinate sweep), or

VAR1 (synchronous sweep).

VAR1

Primary sweep controls the staircase (dc or pulsed) voltage or current sweep.

Maximum number of steps: 1001 for one

VAR1 sweep.

Sweep type: linear or logarithmic

Sweep direction: Single or double sweep

Hold time: Initial wait time or wait time after VAR2 is set: 0 to 655.35 s with 10 ms resolution

Delay time: Wait time from VAR1 step to the start of the measurement: 0 to 65.535 s with 100 μs resolution

VAR2

Subordinate linear staircase or linear pulsed sweep. After primary sweep is completed, the VAR2 unit output is incremented.

Maximum number of steps: 128

VAR1'

Staircase or pulse sweep synchronized with the VAR1 sweep. Sweep is made with a user specifi ed ratio and offset value. VAR1' output is calculated as VAR1' = a × VAR1

+ b, where “a” is the user specifi ed ratio and “b” is the user specifi ed offset value.

CONSTANT

A source unit can be set as a constant voltage or current source depending on the unit.

PULSE

One of the SMUs can be set as a pulse source.

Pulse width: 0.5 ms to 100 ms, 100 μs resolution.

Pulse period: 5 ms to 1 s (pulse width + 4 ms), 100 μs resolution.

SMU pulse setting accuracy

(supplemental information, at fi xed range measurement except multichannel measurement):

Width: 0.5% + 50 μs

Period: 0.5% + 100 μs

Trigger output delay for pulsed measurement: 0 - 32.7 ms with

100 μs resolution (< pulse width).

Sampling (Time Domain)

Measurement Characteristics

Displays the time sampled voltage/current data versus time.

Max. sampling points: 10,001 (linear)

Sampling mode: linear, log, and thinned-out

Note: The thinned-out mode is similar to reverse-log sampling. Sampling measurement continues by thinning out older data until the sampling completion condition is satisfi ed.

Sampling interval range and resolution:

Linear scale (auto mode):

60 μs to 480 μs range:

20 μs resolution

480 μs to 1 s range:

80 μs resolution

1 s to 65.535 s range:

2 ms resolution

Linear scale (no limit mode), log scale, and thinned-out modes:

560 μs (720 μs at thinned-out mode)

to 1 s range: 80 μs resolution

1 s to 65.535 s range:

2 ms resolution

Note: The following conditions must be set when initial interval is less than 2 ms.

• Number of measurement channels: 1

• Measurement ranging: fi xed range

• Stop condition: disable

Hold time:

Initial wait time: 0.03 s to 655.35 s,

100 μs resolution

Sampling measurement stop condition: A condition to stop the sampling can be defi ned.

Sampling interval setting accuracy

(supplemental data):

0.5% + 10 μs (sampling interval

≤480 μs)

0.5% + 10 μs (480 μs ≤sampling

interval <2 ms)

0.5% + 100 μs (2 ms ≤sampling

interval)

C-V Measurement Characteristics

Capacitance is a calculated value derived from the following equation:

C = ———

DV

DQ is the change in charge when DV, the step voltage, is applied by the SMU; DQ is derived from the measurement current

(amps) and the integration time (seconds).

Maximum Measurable Value

Maximum measurable value depends on the current range, integration time, and step voltage (refer to the chart in supplemental data).

Capacitance Calculation Accuracy

Accuracy is dependent on accuracy of the current measurement and voltage measurement and the stray capacitance and leakage current of measurement path, etc. (Refer to the chart in supplemental data).

Zero Offset

Cancels stray capacitance of the fi xtures and test leads.

Leakage Current Compensation

Cancels the infl uence of the leakage current to the capacitance measurement.

Stress Force Characteristics

SMU, VSU, and PGU output can be forced for the user specifi ed period.

Stress time set range: 500 μs to 31,536,000 s (365 days)

Resolution:

100 μs (500 μs ≤stress time ≤10 s)

10 ms (10 s <stress time ≤31,536,000 s)

Burst pulse count: 1–65,535 (PGU only)

Trigger: The 4155C and 4156C output a gate trigger while stress channels are forcing stress.

Knob Sweep

In knob sweep mode, sweep range is controlled instantaneously with the front-panel rotary knob. Only the Channel

Defi nition page need be defi ned.

Standby Mode

SMUs in “Standby” remain programmed to their specifi ed output value even as other units are reset for the next measurement.

Other Characteristics

Measurement Control: Single, append, repeat, and stop

Stress Control: Stress force and stop

SMU Setting Capabilities: Limited autoranging, voltage/current compliance, power compliance, automatic sweep abort functions, self-test, and self-calibration.

Arithmetic and Analysis

Functions

Arithmetic Functions User Functions

Up to six USER FUNCTIONS can be defi ned using arithmetic expressions.

Measured data and analyzed variables from graphics analysis (marker, cursor, and line data) can be used in the computation.

The results can be displayed on the LCD.

Arithmetic Operators

+, -, *, /, ^, LGT (logarithm, base 10),

LOG (logarithm, base e), EXP (exponent),

DELTA, DIFF (differential), INTEG (integration), MAVG (moving average), SQRT,

ABS (absolute value), MAX, MIN, AVG

(averaging), COND (conditional evaluation).

Physical Constants

Keyboard constants are stored in memory as follows:

q: Electron Charge, 1.602177 E-19 C

k: Boltzman’s Constant,

1.380658 E-23

ε (e): Dielectric Constant of Vacuum,

8.854188 E-12

Engineering Units

The following unit symbols are also available on the keyboard: f (10 -15 ), p (10 -12 ), n (10 -9 ), u or µ (10 -6 ), m (10 -3 ), K (10 3 ), M (10 6 ), G (10 9 )

Analysis Capabilities

Overlay Graph Comparison

A graphics plot can be stored and later recalled as an overlay plane. Four overlay planes can be stored. One plane can be overlaid onto the current data.

Marker

Marker to min/max, interpolation, direct marker, and marker slip

Cursor

Long and short, direct cursor.

Line

Two lines, normal mode, grad mode, tangent mode, and regression mode.

Scaling

Auto scale and zoom.

Data Variable Display

Up to two user defi ned parameters can be displayed on the graphics screen.

Read Out Function

The read out functions are built-in functions for reading various values related to the marker, cursor, or line.

7

8

Automatic Analysis Function

On a graphics plot, the markers and lines can be automatically located using the auto analysis setup. Parameters can be automatically determined using automatic analysis, user function, and read out functions.

User Variable

Display the data on the LCD via GPIB or instrument BASIC.

Hard Copy via Network Interface

The network interface has lpr client capability.

High-Resolution (HR) Mode

This fi le mode is available for cases where an extremely clean print-out or plot is desired.

Note: High-resolution mode takes signifi cantly greater

CPU time to generate, so its use is recommended for fi nal reports only.

Output

Data Storage

Display

Display Modes

Graphics and list.

Graphics Display

X-Y or X-Y1/Y2 plot of source current/ voltage, measured current/voltage, time, or calculated USER FUNCTION data.

List Display

Measurement data and calculated USER

FUNCTION data are listed in conjunction with VAR1 step number or time domain sampling step number. Up to eight data sets can be displayed.

Display

8.4-inch diagonal color active matrix LCD,

640 dot (H × 480 dot (V). More than 99.99% of the pixels on an LCD are active.

Hard Copy Functions

Graphics Hard Copy

Measured data and all data appearing on the LCD can be output via GPIB, parallel printer port, or network interface to supported HP plotters or printers. PCL,

HR PCL (high-resolution PCL), and HP-GL formats are supported (selectable).

Text Hard Copy

Print out setup information or measured data list as ASCII text via GPIB, parallel printer port, or network interface to supported HP plotters or printers. PCL,

HR PCL, and HP GL formats are supported

(selectable).

Hard Copy File

Hard copy output can be stored to an internal or external mass storage device instead of sending it to a printer or plotter.

The data can be stored in PCL, HR PCL,

TIFF, HR TIFF (highresolution TIFF), or

HP GL formats.

Mass storage device:

Built-in 3.5-inch fl oppy disk drive

Media: 3.5-inch 2HD or 2DD diskette

Format type: HP LIF and DOS

User area: 1.44 Mbyte (2HD) or

720 Kbyte (2DD)

File types:

Auto start program fi le, initial setup fi le, measurement setup fi le, measurement setup/result fi le, stress setup fi le, customize fi le, hard copy data fi le, and

Instrument BASIC program and data fi le.

Format of data made by the HP BASIC program:

Data made by the HP BASIC program and data made by the Instrument BASIC program are compatible.

Network mass storage device:

An NFS mountable mass storage device

File types:

Auto start program fi le, initial setup fi le, measurement setup fi le, measurement setup/result fi le, stress setup fi le, customize fi le, and hard copy data fi le.

Maximum number of fi les allowed per directory on network mass storage device:

199

Data storage (supplemental data):

2HD DOS format:

Available bytes: 1457 K (byte)

File size:

Measurement setup: 3843 (byte)

Stress setup: 601 (byte)

(Typical data): 15387 (byte)

(VAR1: 101, VAR2: 5)

Customized system setup:

Hardcopy data: 30317 (byte)

(Monochrome PCL 75DPI fi le)

Hardcopy data: 38702 (byte)

(monochrome TIFF fi le)

Note: For LIF format, the total number of fi les is limited to 199.

Repeating and Automating Test

Instrument Control

Agilent 4155C and 4156C function control:

Internal or external computer controls the 4155C and 4156C functions via the

GPIB interface

Command sets:

SCPI command set

Agilent FLEX command set

Agilent 4145B command set

Program Memory:

Using the Agilent FLEX command set, the user can store program code in the 4155C or the 4156C. The maximum number of subprograms is 255 (8 bit).

External instrument remote control:

Control external equipment via the GPIB interface.

Instrument BASIC

Instrument BASIC is a subset of

HP BASIC.

Functions:

Arithmetic operation, binary operation, string manipulation, logical operation, array operation, program fl ow control, event-initiated branching, program editing and debugging support, mass storage operation, instrument control, real-time clock, softkey operation, and graphics.

Agilent 4145B automatic sequence program (ASP) typing aid:

4145B ASP-like syntax softkeys are available in instrument BASIC. A 4145B

ASP fi le cannot be read by the 4155C or

4156C.

Remote control:

Instrument BASIC is remote controllable from an external computer via the GPIB interface.

Instrument BASIC memory area (supplemental data):

Program (text) area: 16 K (byte)

Variable/stack area: 500 K (byte)

Common variable area: 600 K (byte)

Note: The memory size for common variable is decreased when hard copy or disk operation is performed.

Trigger

Input:

External trigger input starts a sweep or sampling measurement or can be used as a trigger input for continuing an

Instrument BASIC program.

Input Level:

TTL level, negative or positive edge trigger

Output:

External edge trigger outputs can be generated by the start of a sweep measurement, the start of each sweep step in a staircase sweep, the start of each pulse leading edge for an SMU in pulse mode, and the issuance of an an

IBASIC trigger out command execution.

In addition, you can set the trigger signal to be active during the Stress Force

State. If you have a 41501A/B with PGU option, you can output a synchronized trigger output through the 41501A/B trigger output.

Output Level:

TTL level, negative or positive logic

4145B Data Compatibility and

Syntax Commands

Setup and data fi le

Measurement setup and data from the

4145B can be loaded.

GPIB program

GPIB programs for the 4145B can be used when the 4145B command set is selected.

Note: There is a possibility that GPIB programs for the

4145B will need to be modifi ed.

Interfaces

GPIB interface:

SH1, AH1, T6, L4, SR1, RL1, PP0, DC1,

DT1, C1, C2, C3, C4, C11, E2

Parallel interface: Centronics RJ45:

Ethernet IEEE 802.3 10BASE-T for a 10

Mbps CSMA/CD local area network

External keyboard:

Compatible PC-style 101-key keyboard

(mini DIN connector)

Interlock and LED connector R-BOX control connector

Trigger in/out

SMU/PGU selector control connector

(41501B)

Sample Application Programs

Flash EEPROM test

TDDB

Constant I (Electromigration test)

V-Ramp test

J-Ramp test

SWEAT

GO/NO-GO test

HCI degradation test

Charging pump test

Sample VEE Program

Vth measurement using the 4155C or

4156C, the E5250A, and a wafer prober.

VXI plug&play Drivers

VXI plug&play drivers for the 4155C and

4156C

Supported VXI plug&play operating systems:

Microsoft Windows 95, 98, NT, 2000

Professional, and XP Professional

Format

Tree-structured function panel.

Panel mode for hardware confi guration and manual parameter setting.

Parameter mode for variable defi nition and

I/O confi guration.

General Specifi cations

Temperature range

Operating:

+10 °C to +40 °C (if using fl oppy

disk drive)

+5 °C to +40 °C (if not using

fl oppy disk drive)

Storage: -22 °C to +60 °C

Humidity range

Operating:

20% to 80% RH, non-condensing and wet bulb temperature ≤29 °C (if using fl oppy disk drive)

15% to 80% RH, non-condensing and wet bulb temperature ≤29 °C (if not using fl oppy disk drive)

Storage: 5% to 90% RH, non-condensing and wet bulb temperature ≤39 °C

Altitude

Operating: 0 to 2,000 m (6,561 ft)

Storage: 0 to 4,600 m (15,091 ft)

Power requirement

90 V to 264 V, 47 to 63 Hz

Maximum VA

4155C and 4156C: 450 VA

41501B: 350 VA

Regulatory Compliance

EMC: EN 61326-1:+A1, AS/NZS 2064.1

Safety:

CSA C22.2 NO.1010.1 (1992), IEC 61010-

1:+A2/EN 61010-1:+A2 UL3111-1:1994

Certifi cation:

CE, CSA, NRTL/C, C-Tick

Dimensions

4155C and 4156C: 235 mm H ×

426 mm W × 600 mm D

41501B: 190 mm H × 426 mm W ×

600 mm D

Weight (approx.)

4155C and 4156C: 21 kg

41501B: 16 kg (option 412, HPSMU + 2 ×

PGU)

4155C and 4156C

Furnished Accessories

Triaxial cable, 4 ea. (4155C)

Kelvin triaxial cable, 4 ea. (4156C)

Coaxial cable, 4 ea.

Interlock cable, 1 ea.

Keyboard, 1 ea.

User manual, 1 set

Sample application program disk, 1 ea.

Sample VEE program disk, 1 ea.

VXIplug&play drivers disk for the 4155C and 4156C, 1 ea.

VXIplug&play drivers disk for the E5250A,

1 ea.

LAN Interface Test Adapter, 1 ea.

9

Accessory Specifi cations

Specifi cation Condition

The “supplemental information” and “typical” entries in the following specifi cations are not warranted, but provide useful information about the functions and performance of the instruments (23 °C ±5

°, 50% RH).

16440A SMU/Pulse Generator

Selector

The 16440A switches either an SMU or

PGU to the associated output port. You can expand to 4 channels by adding an additional 16440A. The channel 1 PGU port provides a “PGU OPEN” function, which can disconnect the PGU by opening a semiconductor relay. The 16440A cannot work without two pulse generator units of the 41501A/B (SMU and Pulse Generator

Expander).

Channel confi gurations:

Two channels (CH1, CH2)

CH1: INPUT ports: 2 (SMU and PGU, PGU port has additional series semiconductor relay)

OUTPUT port: 1

CH2: INPUT ports: 2 (SMU and PGU)

OUTPUT port: 1

Voltage and Current Range

Input port Max. V Max. I

SMU 200 V 1.0 A

PGU 40 V 0.2 A (AC Peak)

Supplemental Information

(at 23 °C ± 5 °C, 50%RH)

SMU port leakage current:

< 100 fA @100 V

SMU port residual resistance (typical):

SMU port stray capacitance (typical

@1 MHz):

Force , Common: 0.3 pF

Force , Guard: 15 pF

Guard , Common: 130 pF

PGU port residual resistance: 3.4 Ω

PGU port OFF capacitance (typical): 5 pF

PGU port OPEN capacitance (typical):

700 pF (@ 1 MHz, Vin - Vout = 0V)

PGU port signal transfer characteristics

Overshoot: <5% of pulse amplitude (@20 ns leading and trailing time,

50 Ω pulse generator source impedance, 50 pF and 1 MΩ in parallel load).

General Specifi cations

Dimensions:

50 mm H × 250 mm W × 275 mm D

Approximate weight: 1.1 kg

16441A R-BOX

The 16441A R-BOX adds a selectable series resistor to the SMU output. You can select the resistor from the setup page, and the voltage drop due to the series resistor is automatically compensated for in the measurement result.

Measurement limitations with the 4155C and 4156C and R-BOX:

If you measure device characteristics including negative resistance over 1

MΩ with the 4155C/4156C and R-BOX, there is a possibility that they cannot be measured. There is a possibility that the 4155C and 4156C cannot perform measurements because of DUT oscillations even with the R-BOX. Whether oscillation occurs or not depends upon the DUT and measurement conditions.

Number of SMU channels that can add a resistor: 2

Resistor values:

1 MΩ, 100 kΩ, 10 kΩ, 0 Ω (each channel)

Resistance accuracy:

0.3% (at 23 °C ±5 °C, between input/ output terminal)

Maximum voltage: 200 V

Maximum current: 1 A (0 Ω selected)

Kelvin connection: Kelvin connection is effective only when 0 Ω is selected.

Supplemental Information (at 23 °C ±

5 °C, 50%RH)

Leakage current: <100 fA @ 100 V

General Specifi cations

Dimensions:

72 mm H × 250 mm W × 270 mm D

Approximate weight: 1.6 kg

16442A Test Fixture

Channel Information

SMU:

6 channels (1 triaxial connector per channel)

3 channels (1 Kelvin triaxial connector per channel)

VSU:

2 channels (1 BNC connector per channel)

VMU:

2 channels (1 BNC connector per channel)

PGU:

2 channels (1 BNC connector per channel)

GNDU:

1 channel (1 triaxial connector)

INTLK: 6-pin connector

Supplemental Information

(at 23°C ± 5°C, 50% RH)

SMU channel:

Leakage current: 10 pA max @200 V

(Force or Sense , Common)

Stray capacitance: 15 pF max

(Force or Sense , Common)

Stray capacitance: 3 pF typical

(Force or Sense , Other SMU)

Residual resistance: 60 mΩ typical

(Force, Sense)

Guard capacitance: 70 pF max

(Force or Sense , Guard)

VSU channel residual resistance:

60 mΩ typical

VMU channel residual resistance:

60 mΩ typical

PGU channel characteristic impedance:

50 mΩ typical

GNDU channel residual resistance:

40 mΩ typical (Force, Sense)

General Specifi cations

Temperature range:

Operating: +5 °C to +40 °C

Storage: -40 °C to +70 °C

Humidity range:

Operating: 5% to 80% RH

(no condensation)

Storage: 5% to 90% RH at 65 °C

(no condensation)

Dimensions:

140 mm H × 260 mm W × 260 mm D

Weight (approx.): 2.5 kg

10

Agilent Desktop EasyEXPERT Software

Introduction

Agilent Desktop EasyEXPERT software makes every user a parametric test expert. The Microsoft® Windows®-based interface is familiar, even to new engineers who have limited experience using parametric measurement instruments.

Its unique task-based approach enables the user to focus on the real task-at-hand

(device characterization) without having to be a specialist at using the instrument hardware. Desktop EasyEXPERT supports all aspects of parametric test, from basic manual measurements to test automation across a wafer in conjunction with a semiautomatic wafer prober.

Features and benefi ts

Prober control

All popular semiautomatic wafer probers are supported by Desktop EasyEXPERT.

You can defi ne wafer, die and module information for probing across an entire wafer. You can also combine wafer prober control with either Quick Test mode or an application test-based test sequence to perform multiple testing on various devices across the wafer.

Automatic data export

Desktop EasyEXPERT has the ability to automatically export measurement data in real time, in a variety of formats. You can save data to any drive connected to the

PC. If you wish, you can export data to a network drive and view test results on your desktop PC at the same time your instruments are performing testing in the lab.

Large application test library

Desktop EasyEXPERT comes with more than 230 application tests conveniently organized by device type, application, and technology. Many of these application tests will run on the 4155 and 4156 without modifi cation. You also can easily edit and customize the furnished application tests to fi t your specifi c needs.

Offl ine capability

Desktop EasyEXPERT can run in either online or offl ine mode. In offl ine mode you can perform tasks such as analyzing data and creating new application tests. This frees up your existing analyzer from being needed for development work and enables you to use it for its primary purpose: making measurements.

GUI-based classic test mode

Desktop EasyEXPERT offers a classic test mode that maintains the look, feel, and terminology of the 4155/4156 user interface. In addition, it improves the

4155/4156 user interface by taking full advantage of the Windows GUI features.

Software Functions

Operation mode

Application test mode, Classic test mode,

Quick test mode

Key Functions

• Categorized and predefi ned application library

• Device defi nition

• Measurement parameter settings

• Save/Recall My Favorite Setups

• Defi ne/customize application library

• Execute measurement (Single/Repeat/

Append)

• Quick test execution

• Save/Recall measurement data and settings

• Test result data management

• Import/Export device defi nition, measurement settings, my favorite setup, measurement data, and application library

• Graph plot display/analysis/printing

• Switching matrix control

• Workspace management

Easy test sequencing

A GUI-based Quick Test mode lets you to perform test sequencing without programming. You can select, copy, rearrange and cut-and-paste any application tests with a few simple mouse clicks. Once you have selected and arranged your tests, simply click on the measurement button to begin running an automated test sequence.

Application Library

Category:

Sample test defi nitions for the following applications. They are subject to change without notice.

Structure, CMOS, Bipolar (BJT), TFT,

Discrete, Nanotechnology, Utility

Supported 4155/4156

Functionality

Desktop EasyEXPERT Standard edition

• Staircase Sweep

Desktop EasyEXPERT Plus edition

The following additional functions are supported.

• I/V-t Sampling except Thinned-out and

Logarithmic modes

• VSU/VMU except differential voltage measurement using VMU

• PGU (41501B)

Each SMU can sweep using VAR1 (primary sweep), VAR2 (secondary sweep), or

VAR1' (synchronous sweep).

Staircase Sweep Measurement Mode

Forces swept voltage or current, and measures DC voltage or current. A second channel can be programmed to output a pulsed bias voltage or current. A third channel can be synchronized with the primary sweep channel as an additional voltage or current sweep source.

Number of Steps for VAR1 and VAR1': 1 to 1001

Number of Steps for VAR2: 1 to 128

Sweep type: Linear or logarithmic

Sweep direction: Single or double sweep

Hold Time: 0 to 655.35 s, 10 ms resolution

Delay Time: 0 to 65.5350 s, 100 μs resolution

Pulsed Sweep Measurement Mode

This mode forces pulsed swept voltage or current, and measures DC voltage or current. A second channel can be programmed to output a staircase sweep voltage or current synchronized with the pulsed sweep output.

11

Staircase Sweep with Pulsed Bias

Measurement Mode

This mode forces swept voltage or current, and measures DC voltage or current. A second channel can be programmed to output a pulsed bias voltage or current. A third channel can be synchronized with the primary sweep channel as an additional voltage or current sweep source.

Sampling (Time Domain)

Measurement Mode

This mode displays the time sampled voltage/current data (by SMU) versus time.

Sampling channels: up to 6

For sampling intervals < 2 ms, the number of sampling channels is 1

Sampling points: 1 to 10,001/

(number of channels)

Sampling mode: linear

Sampling interval range:

60 μs to 2 ms, 10 μs resolution

2 ms to 65.535 s, 1 ms resolution

Hold time: -30 ms to -100 μs, 100 μs resolution

Bias hold time: 0 s

Bias Hold Function

This function is used to keep source output after measurement. Source modules apply the specifi ed bias between measurements in a quick test or application test that defi nes some classic test setups, or a repeat measurement. Also, the source modules change the output value and the unused modules are disconnected when the next measurement is started.

Current Offset Cancel

This function subtracts the offset current from the current measurement raw data, and returns the result as the measurement data. It is used to compensate the error factor (offset current) caused by the measurement path such as the measurement cables, manipulators, or probe card.

Other Measurement Characteristics

Measurement Control:

Single, Repeat, Append, and Stop

SMU Setting Capabilities:

Limited auto ranging, voltage/current compliance, power compliance, automatic sweep abort functions

Arithmetic and Analysis Functions

User Functions

Up to 20 user-defi ned functions can be defi ned using arithmetic expressions.

Measured data and pre-defi ned variables can be used in the computation, and the results can be displayed on the LCD.

Analysis Capabilities

Overlay Graph Comparison

A graphics plot can be stored and overlaid.

Scale

Auto scale and zoom

Marker

Marker to min/max, interpolation, direct marker, and marker skip

Cursor

Direct cursor

Line

Two lines, normal mode, grad mode, tangent mode, and regression mode

Automatic Analysis Function

On a graphics plot, the markers and lines can be automatically located using the auto analysis setup. Parameters can be automatically determined using automatic analysis, user function, and read out functions.

Data Variable Display

Up to 20 user-defi ned parameters can be displayed on the graphics screen.

Analysis Functions

Up to 20 user-defi ned analysis functions can be defi ned using arithmetic expressions.

Measured data, pre-defi ned variables and read out functions can be used in the computation, and the results can be displayed on the LCD.

Read Out Functions

These built-in functions are for reading various values related to the marker, cursor, or line.

Graph Plot

Display Mode

The data display window can be printed.

Only the X-Y graph can be printed.

Graph Plot File

The graph plot can be stored as image data to clip board or mass storage device.

File type: bmp, gif, png, emf

Output

Display Modes

X-Y graph, list display, and parameter display

X-Y Graph Display

X-axis and up to eight Y-axes

Linear and log scale

Real time graph plotting

List Display

Measurement data and calculated user function data are listed in conjunction with VAR1 step number or time domain sampling step number. Up to 20 data sets can be displayed.

Other Functions

Import/Export fi les

File type:

Agilent EasyEXPERT format,

XML-SS format, CSV format

12

System Requirements

The following are the minimum requirement for executing Desktop EasyEXPERT.

Operating System and Service Pack

Processer

Memory

Display

HDD

.NET Framework

IO Libraries

(for online mode)

Supported GPIB I/F

(for online mode)

Microsoft Windows XP

Professional SP2

Intel Celeron 2 GHz

512 Megabytes DDR266

Microsoft Windows

VISTA Business SP1

Vista Certifi ed PC with

1 GB memory

XGA 1024 × 768

(SXGA 1280 × 1024 recommended)

1 GB free space on the C drive, 10 GB (30 GB recommended) free space on a drive for test setup/result data strage.

Microsoft .NET

Framework Ver. 2.0

Redistributable Package

Microsoft .NET

Framework 2.0 SP1

Microsoft .NET

Framework Ver. 3.0

Agilent IO Libraries Suite 15.0

Agilent 82350B

Agilent 82357A

Agilent 82357B

Supported 4155/4156

Parameter Analyzers

4155B, 4156B, 4155C, and 4156C

Supported 4155/4156 fi rmware:

HOSTC: 03.08 or later

SMUC: 04.08 or later

Supported External Instruments

Desktop EasyEXPERT Standard edition

• Supported by switching matrix GUI:

B2200A/B2201A

• Supported by application tests: E5250A

(E5252A), 4284A/E4980A, 81110A,

3458A

Desktop EasyEXPERT Plus edition

• All auxiliary instruments supported by

Desktop EasyEXPERT Standard edition

• Also supported by switching matrix GUI:

E5250A (E5252A)

Setup Converter Tool

In addition to Desktop EasyEXPERT,

Agilent supplies a Setup File Converter tool that runs on any Windows-based PC. This tool can convert 4155 and 4156 measurement setup fi les (fi les of type MES and DAT) into equivalent Desktop EasyEXPERT classic test mode setup fi les.

Attached Software

Prober Control execution fi les

Supported Probers:

Cascade Microtech Summit

12 K or S300

SUSS MicroTec PA200 or PA300

Vector Semiconductor VX-2000

or VX-3000

4155/56 setup fi le converter tool

Supported operating systems:

Microsoft Windows 2000

Professional and XP Home or

Professional

Ordering Information

B1541A

Agilent Desktop EasyEXPERT software and measurement libraries

B1541A-001

Agilent Desktop EasyEXPERT with licenseto-use for standard edition

B1541A-002

License-to-use for Agilent

Desktop EasyEXPERT Plus

13

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Get the latest information on the products and applications you select.

Agilent Direct www.agilent.com/fi nd/agilentdirect

Quickly choose and use your test equipment solutions with confi dence.

Remove all doubt

Our repair and calibration services will get your equipment back to you, performing like new, when promised.

You will get full value out of your Agilent equipment throughout its lifetime. Your equipment will be serviced by Agilenttrained technicians using the latest factory calibration procedures, automated repair diagnostics and genuine parts. You will always have the utmost confi dence in your measurements.

Agilent offers a wide range of additional expert test and measurement services for your equipment, including initial start-up assistance onsite education and training, as well as design, system integration, and project management.

For more information on repair and calibration services, go to www.agilent.com/fi nd/removealldoubt

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07031 464 6333

1890 924 204

972 3 9288 504/544

39 02 92 60 8484

31 (0) 20 547 2111

34 (91) 631 3300

0200-88 22 55

Switzerland

United Kingdom

0800 80 53 53

44 (0) 118 9276201

Other European Countries: www.agilent.com/fi nd/contactus

Revised: October 1, 2008

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Product specifi cations and descriptions in this document subject to change without notice.

© Agilent Technologies, Inc. 2009

Printed in USA, July 7, 2009

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