COHU 5935-1000/T100 User`s manual


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Cohu Electronics

5930 Series Thermal Camera User's Manual

Figure 1

5935-1000/T100 Thermal Camera

with 100mm Lens Installed

Technical Manual 6X-1060

January 3, 2006

Cohu Electronics

3912 Calle Fortunada

San Diego, CA 92123-1827

Phone: 858-277-6700

Fax: 858-277-0221

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Table of Contents

Product Description ....................................................................................................................................... 4

1.1 FPA Description ............................................................................................................................ 4

1.2

1.2.1

Hardware Description ................................................................................................................... 4

FPA Support PCB ......................................................................................................................... 4

2.6

2.6.1

2.6.2

2.7

2.7.1

2.7.2

3.

4.

4.1

4.2

4.3

4.4

1.2.2

1.2.3

1.2.4

1.3

1.4

1.5

1.6

2.

2.1

2.2

2.3

2.4

2.5

2.5.1

2.5.2

Camera Controller PCB ................................................................................................................ 4

Camera Support PCB ................................................................................................................... 5

Camera Power Supply PCB ......................................................................................................... 6

Camera Operation ........................................................................................................................ 6

Lens Options................................................................................................................................. 6

Camera Performance ................................................................................................................... 7

Mechanical Characteristics ........................................................................................................... 8

Installation ..................................................................................................................................... 8

Unpacking and Receiving Inspection............................................................................................ 8

Lens Cleaning. .............................................................................................................................. 8

Electrostatic Discharge (ESD) Precautions. ................................................................................. 9

Tripod Mounting Interface ............................................................................................................. 9

Main Rear Panel Signal Connector .............................................................................................. 9

Camera Main Signal Connector.................................................................................................. 10

Mating Rear Panel Connector .................................................................................................... 11

Main Rear Panel Digital Signal Connector ................................................................................. 11

Camera Digital Signal Connector ............................................................................................... 11

Mating Digital Signal Connector ................................................................................................. 12

Power Input Selection ................................................................................................................. 12

AC Line Input Voltage Connections............................................................................................ 12

24VAC Input Voltage Connections ............................................................................................. 12

Camera Software Features......................................................................................................... 13

Environmental Specifications...................................................................................................... 15

Temperature ............................................................................................................................... 15

Water Resistance........................................................................................................................ 15

Relative Humidity ........................................................................................................................ 15

Shock and Vibration.................................................................................................................... 16

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List of Tables

Table 1 - FPA Support Functions.................................................................................................................. 4

Table 2 - Camera Controller Functions......................................................................................................... 5

Table 3 - Camera Support Functions............................................................................................................ 5

Table 4 - Fixed Focus Lenses....................................................................................................................... 7

Table 5- Camera Performance...................................................................................................................... 7

Table 6 - Main Signal Pin Descriptions ....................................................................................................... 10

Table 7 - Digital Signal Pin Descriptions..................................................................................................... 11

Table 8 - Environmental Cable Clamps ...................................................................................................... 12

Table 9 -Software Features......................................................................................................................... 13

List of Figures

Figure 1 - 5930 Series Thermal Camera ..................................................................................................... 1

Figure 2 - Lens Mechanical Interface............................................................................................................ 7

Figure 3 - Camera Dimensions ..................................................................................................................... 8

Figure 4 - Tripod Mounting Locations ........................................................................................................... 9

Figure 5 - Camera Rear Panel .................................................................................................................... 10

Figure 6 - Voltage Input Selection............................................................................................................... 13

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Product Description

The Cohu 5930 series is a long wavelength (LWIR) Infrared microbolometer based camera system. The embeddable electronics provides the foundation for the processing and signal generation for the camera.

Below is a description of all the different aspects that make up the complete camera assembly.

1.1 FPA Description

The FPA used in the 5930 is an uncooled 320 x 240 matrix or "staring" array of microbolometer detectors (51um square), sensitive in the 8.0-14.0 micron range. The FPA is enclosed in an allmetal evacuated dewar package, and is thermally stabilized by the electronics using a built in TE cooler. The FPA incorporates internal thermal reference detectors that provide compensation for thermal drift and noise.

1.2 Hardware Description

The camera electronics are comprised of four major circuit boards as described below.

1.2.1 FPA Support PCB

The FPA support PCB provides all the interface signals required to control the FPA. The FPA

Support PCB supports all the FPA functions as listed in Table 1.

Table 1 - 5930 SERIES FPA Support Functions

Specifications

FPA Clocks

FPA Biases (DAC adjustable)

3

1

FPA Adjustable Bias Resolution

8 bit

FPA Biases (Fixed)

1

FPA Power Supplies

FPA Video Outputs

FPA Video Offset Range

FPA Video Offset Resolution

FPA Video ADC Resolution

FPA Video ADC Rate

FPA TEC Setpoints

PCB Size

3

1

0 to +3.25V

8 bit

14 bit

7.37500 MHz

2

2" x 2"

1.2.2 Camera Controller PCB

The camera controller PCB provides all the video processing and control functions for the

camera. The camera controller PCB provides all the functions listed in Table 2.

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Table 2

5930 Series Camera Controller Functions

Specifications

FPA Format

FPA Frame Rate

FPA Clock Generation

FPA Adjustable Bias Generation

Nonuniformity Correction

NUC Gain Coefficient Precision

NUC Gain Range

NUC Offset Coefficient Precision

320 x 240

NTSC: 59.94 Hz

PAL: 50 Hz

6

4

2 point gain/offset

16 bit

0 to 2

2

-15

16 bit

-16,384 to +16,383.5

16 bit

NUC Offset Coefficient Range

NUC Offset Refresh Precision

NUC Offset Refresh Range

NUC Tables Possible

-16,384 to +16,383.5

12

5 lines / 7 columns

Defective Pixel Replace Kernal

Intensity Transformation Table

Zone Statistic ROIs

Zone Statistical Computations

Dual 14 in / 16 out

4 Zones

Average, Sigma, Max., Min.

Processed FPA Video Output Precision

16 bit

Processed FPA Video Output Selections

Digitized FPA Video

NUC Corrected Video

Pixel Replaced Video

Intensity Transform Video

PCB Size 2" x 2"

1.2.3 Camera Support PCB

The camera support PCB provides all the power supply conditioning and camera interface

functions. The camera support PCB provides all the functions listed in Table 3.

Table 3 - Camera Support Functions

Power Input Range

Smart Battery Pack Interface

+VhiM Output (Bias Power)

+5.XVM Output (Main Board Power)

Video Encoder Formats

Number of Analog Video Outputs

Digital Output Formats

COM Port Interfaces

COM Port Formats

Oscillator Frequency

External Clock Input Format

External Sync Input Format

Calibration Flag Reference Control

Calibration Flag Reference Setpoint

Calibration Flag Motor Control

Cooling Fan Interface

Motorized Focus Interface

PCB Size

Specifications

+5.8V to +28.2V

1 Wire

+7.0V to +12V @ 300mA

+5.0V to +5.5V @ 5.0A

NSTC or PAL

2 Composite and SVID

LVDS (Serialized 4 Pair)

2

RS232C

RS422 (Differential Full Duplex)

RS485 (Differential Half Duplex)

NTSC: 49.09090 MHz

PAL: 59.00000 MHz

NI: 80.00000 MHz

LVDS

LVDS

Dual Temperature, "Heat Only"

8 bit DAC

PWM

PWM (+5V Level)

+5V "H-Bridge"

2" x 2"

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1.2.4 Camera Power Supply PCB

The camera power supply PCB provides all the power conditioning and external interfaces for the camera. The camera power supply PCB provides the following functions:



Configures the following power inputs based on model selection;



5935 Series: 95-250VAC



5934 Series: 20-28VAC



5932 Series: 11-16VDC



Input power conditioning.



AC Power Fusing.



Power illumination (internal LED).



Configures COM port interface (RS422).



External interface connectors (through cable assemblies) to main Camera electronics

(includes power, COM, analog video and digital video).



Expansion connectors for auxiliary camera functions (not used on base Camera model).

1.3 Camera Operation

This Camera has a multitude of operational and configuration settings which can be adjusted via software control. Typically only a few settings or adjustments require attention once the Camera is embedded into a specific application. A complete list of adjustable settings and software features can be found in Paragraph 3 of this Document.

Cohu Electronics provides a host software application (Camera Control Interface) that can be used for generic camera control and camera setup. For specific information on the capabilities of this application please refer to Cohu CCI manual. Cohu Electronics also sells a developer's software guide for end-users that intend on designing a custom software interface for their own application. Contact the Cohu

’ s Product Manager for more information on how to develop you own application for this camera.

1.4 Lens Options

The camera is equipped with a lens mount with a specific internal thread to accept a series of watertight, fixed focus, f/1.4 Infrared lenses. See Table 4 for the f/1.4 lens options. The lenses are designed with the front lens element sealed for NEMA 4 and IP67 water resistance rating. All these lenses have the front lens element Diamond Carbon Coated for added resistance against weather and scratching.

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Cohu Part

Number

T013

T025

T050

T075

T100

T200

Table 4 - Fixed Focus Lenses

Focal Length Minimum Focus

Distance

13mm

25mm

50mm

75mm

100mm

200mm

2 inches

12 inches

24 inches

30 inches

36 inches

120 inches

Field of View (H x V)

69

º

x 53

º

36

º

x 28

º

18

º

x 14

º

13.5

º

x 10.5

º

9

º

x 7

º

4.5

º

x 3.5

º

The front lens plate has a machined groove designed specifically to interface to an O'Ring

installed on the f/1.4 lenses to ensure the water resistance rating of the camera. See Figure 2 for

lens mounting interface specifications.

1.5

Figure 2 - Lens Mechanical Interface

Camera Performance

The Camera meets the performance parameters listed is Table 5.

Table 5- Camera Performance

Performance Requirement

Non-Uniformity Correction

Noise

NEDT (f/1.4 Optic and FPA)

Operability

Specification

< 0.0025

< 3 Counts

< 100 mKelvin

>99.5%

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1.6 Mechanical Characteristics

The Camera dimensions are as shown in Figure 3. These dimensions show the Camera without

a lens or mating connector. The mating connector adds about 2.0" to the rear of the camera which includes room for the cable's bend radius. The different focal length lenses are larger as they go up in focal length. This will add to the length of the camera depending on the lens focal length.

Figure 3 - Camera Dimensions

2. Installation

This section describes everything from removing the camera from the box to how to connect the camera to external devices.

2.1 Unpacking and Receiving Inspection.

The camera was tested and carefully packed at Cohu Electronics. Upon acceptance by the carrier, they should assume responsibility for its safe arrival. Should you receive this item in damaged condition, claims for shipping damage must be filed against the carrier.

To return the camera to the factory for any other service, please contact Cohu Electronics

Customer Service Department for a Return Authorization Number.

2.2 Lens Cleaning.

The lens provided with this Camera has the front lens element diamond carbon coated. Even though this coating is very tough, the following cleaning procedures should be adhered to. A light dusting of air should be enough to dislodge most dust particles, although small amounts of dust should not affect camera performance. If necessary to clean the front surface, use 75% isopropyl

alcohol and a lens tissue. Use a clean section of tissue with each swipe so as to not drag dirt back on the front lens surface.

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2.3

2.4

Electrostatic Discharge (ESD) Precautions.

The installation procedures in this user's manual do not require entry into the Enclosure of the

Camera. However in the event that the camera needs to be opened as directed by Cohu

Electronics , the following ESD precautions should be followed:



Use a conductive pad on whatever work space used.



Connect the conductive pad to earth ground through a 1M

resistor.



Use a wrist strap connected to earth ground through a 1M

resistor when working with the equipment.



Maintain the relative humidity above 30%. Working on this circuitry with a relative humidity below 30% requires more extreme ESD precautions not specified in this document.



Use antistatic bags to store and transport any electronic components or circuit board assemblies removed from this Camera. Use new antistatic bags as old antistatic bags can lose their static protection after use.

Tripod Mounting Interface

The camera has a tripod mounting plate clamped to the bottom of the Camera. The Tripod mount

has five mounting threads (0.250-20UNC-2B) separated as shown in Figure 4. This provides two

center-to-center mountings, being 1.75

and 1

bolt patterns. Insure the mounting arm/fixture supports one of these mounting bolt patterns.

2.5

Figure 4 - Tripod Mounting Locations

Main Rear Panel Signal Connector

The main signal input/output connector is located on the rear panel of the Camera as shown in

Figure 5.

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Figure 5 - Camera Rear Panel

2.5.1 Camera Main Signal Connector

The main signal connector that is mounted to the rear panel of the Camera is manufactured by

Amphenol and the part number is PT07H-14-18P. This connector is hermetically sealed which means it is gastight therefore exceeds the NEMA 4 and IP67 water resistance rating of the

Camera. This connector is equipped with 18 contacts. See Table 6 for main signal pin

descriptions.

Direction

Table 6 - Main Signal Pin Descriptions

Signal Name Signal Description Pin

Number(s)

G

U

Input

Input

T

B

C

R

P

L

A

K

M

N

S

Input

Input

Input

Input

Input

Input

Output

Output

Input

Output

Output

Chassis

AC Line

Chassis Ground

AC Line high side power input. Camera will function on voltage inputs of 90-250VAC, 47-63Hz.

AC Neutral/24VAC Lo AC Line and 24VAC return (Neutral).

24VAC Hi 24VAC high side power input. Camera will function on voltage inputs of 20-28VAC, 47-63Hz.

+12VDC DC Camera positive power input. The Camera can function on voltage inputs of 11-16VDC.

-12VDC

RX+

RX-

TX+

TX-

Ground

Video

Video Ground

DC Camera power common.

RS422: Camera receive data positive (+).

RS422: Camera receive data negative (-).

RS422: Camera transmit data positive (+).

RS422: Camera transmit data negative (-).

Data/Power Ground

Video

Video Ground

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2.5.2 Mating Rear Panel Connector

The connector that mates with the main signal connector of the Camera is manufactured by

Amphenol and the part number is a PT06A-14-18S-SR. This connector must be manufactured to the assembly procedure provided by Amphenol.

2.6 Main Rear Panel Digital Signal Connector

The main digital signal connector is located on the rear panel of the Camera as shown in Figure

5.

2.6.1 Camera Digital Signal Connector

The digital signal connector that is mounted to the rear panel of the Camera is manufactured by fischer and the part number is DBPE 1031 A019-139. This connector is hermetically sealed which means it is gastight therefore exceeds the NEMA 4 and IP67 water resistance rating of the

Camera. This connector is equipped with 19 contacts. See Table 7 for digital signal pin

descriptions.

11

12

13

14

15

16

17

18

19

Pin

Number(s)

6

7

8

9

10

Direction

Table 7 - Digital Signal Pin Descriptions

Signal Name Signal Description

Input

Input

Input

Input

Input

Input

Output

Output

Output

Output

Output

Output

Output

Output

ExtClk+

ExtClk-

ExtSync+

ExtSync-

ExtClkEn_n

PGND

SprcFpaVid0+

SprcFpaVid0-

SprcFpaVid1+

SprcFpaVid1-

SprcFpaVidSync+

SprcFpaVidSync-

SprcFpaVidClk+

SprcFpaVidClk-

Positive (+) LVDS external clock input.

NTSC: 49.09090 MHz.

PAL: 59.00000 MHz.

Negative (-) LVDS external clock input.

NTSC: 49.09090 MHz.

PAL: 59.00000 MHz.

Positive (+) LVDS external sync input.

Negative (-) LVDS external sync input.

External clock enable. This input determines whether the Camera boots with an external or internal clock.

Low (tied to PGND): external clock, Open: internal clock.

Power Ground.

Positive (+) LVDS serialized 16 bit processed FPA video data bits 0-7.

Negative (-) LVDS serialized 16 bit processed FPA video data bits 0-7.

Positive (+) LVDS serialized 16 bit processed FPA video data bits 8-15.

Negative (-) LVDS serialized 16 bit processed FPA video data bits 8-15.

Positive (+) LVDS serialized digital processed FPA video sync.

Negative (-) LVDS serialized digital processed FPA video sync.

Positive (+) LVDS serialized digital processed FPA video clock.

Negative (-) LVDS serialized digital processed FPA video clock.

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2.6.2 Mating Digital Signal Connector

The connector that mates with the digital signal connector of the Camera is manufactured by fischer and the part number is S 1031 A019-150+. All the signals in this connector are Low

Voltage Differential (LVDS) which requires a mating cable that uses 100

twisted pairs. Belden cable 9808 (7 100

twisted pair with overall foil/braided shield) will work for this application or any equivalent cable.

This connector requires a mating environmental clamp set sold by fischer to ensure the sealing

between the connector and cable used. See Table 8 for fischer environmental cable clamp part

numbers for corresponding cable diameter ranges. The connector and environmental cable clamp must be assembled as described on page N2 in the fischer General Catalogue, Edition 5.

Table 8 - Environmental Cable Clamps

Fischer Part Number:

E3 1031.2/2.7

E3 1031.2/3.2

E3 1031.2/3.7

E3 1031.2/4.2

E3 1031.2/4.7

E3 1031.2/5.2

E3 1031.2/5.7

E3 1031.2/6.2

E3 1031.2/6.7

Cable Diameter Range (mm)

2.2-2.7mm

2.7-3.2mm

3.2-3.7mm

3.7-4.2mm

4.2-4.7mm

4.7-5.2mm

5.2-5.7mm

5.7-6.2mm

6.2-6.7mm

2.7 Power Input Selection

The camera input power is specified by model configuration when originally ordered from Cohu

Electronics, and is delivered to accept the specified voltage configuration of 120VAC, or 24VAC

or 12VDC. Refer to Table 6 for connector pin assignments.

Cohu Electronics offers a suite of field cable assemblies for providing connections from the camera to the users control/monitoring system or transmission backbone. Refer to Cohu

Electronics CA290 series data sheet for selection of the proper cable to meet specific requirements.

2.7.1 AC Line Input Voltage Connections

The Camera is delivered to accept 120VAC or 24VAC Line voltage. If it is determined the ordered/delivered voltage format of the camera system is not the desired voltage level, the input voltage can be changed. A connector should be plugged into header J1 or J2 located as shown in

Figure 6 (Figure 6 is drawn without Transformer Support Plate and mating connectors for clarity).

Warning: Never power the Camera up with a connector plugged into headers J1 and J2 simultaneously. This may provide a risk of electric shock on the main rear panel connector.

2.7.2 24VAC Input Voltage Connections

The Camera can be configured to accept 24VAC instead of AC Line voltage. To accomplish this, the connector plugged into header J1 should be unplugged. The two position connector that is

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lying inside the Camera must be plugged into header J2 as shown in Figure 6 (Figure 6 is drawn

without Transformer Support Plate and mating connectors for clarity).

Warning: Never power the Camera up with a connector plugged into headers J1 and J2 simultaneously. This may provide a risk of electric shock on the main rear panel connector.

Figure 6 - Voltage Input Selection

3. Camera Software Features

The Camera is equipped with a multitude of operational and configuration settings. See Table 9 for all

the software features available in this Camera.

Table 9 -Software Features

Camera Software Feature

Selection of up to 8 Operational Modes

Selection of up to 16 NUC Modes

Automatic Refresh on Operational Mode or NUC Mode

Switch

Automatic Refresh on Camera Boot

Automatic Refresh on Timer

Automatic Refresh on Camera Internal Temperature

Change

Commanded Refresh

Selection of up to 16 Video Color Palettes

Host Application

Control (C) or

Monitor (M)

C

C

C

C

C

C

C

C

Notes

Configured at factory.

Configured at factory.

Configured at factory but user can create custom palettes. Contact

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Camera Software Feature Host Application

Control (C) or

Monitor (M)

Notes

Video Color Bar Enable

Video Polarity Invert

Video Color Gamma Boost

Video Zoom

Video Freeze

Video Disable

Selection of up to 8 Video Overlay Palettes

Commanded Overlay Refresh

Overlay Mode Selection

Foreground and Background Color Selection

Two Standard Reticles with Intensity Readout

One Range Reticle

Configured Lens Select

Focus Control

Zoom Control

Sync Mode Selection

Frame Counter Reset

FPA Temperature

FPA Support Board Temperature

Two Available Internal Remote Temperatures

Calibration Flag Temperature

Fan Mode

Camera Power

Two (AGC/ALC) Automatic Gain and Level Control Modes

Up to 8 Region of Interest Areas

AGC/ALC Brightness

AGC/ALC Contrast

AGC/ALC Low and High Limit Settings

Four AGC/ALC Lag Filter Rates

Multiple Linear AGC/ALC Mapping Settings

Automatic NUC Switching Capability

Reticle Size and Position

Radiometric Capability

Built-In Tests

Camera Operation Statistics

Field Upgradeable Operational Software

Field Upgradeable FPGA Configuration

Production and Manufacturing Information

C

M

C

C

C

C

C

C

C

C/M

C

M

C

C

C

C

C

C

C

C

C

C

C

C

M

C

C

C

C

C

C

C

M

M

M

C

C

C/M

Lumitron for specific information.

Gamma boost built into color palette.

Configured at factory but user can create custom palettes. Contact

Lumitron for specific information.

Designed for use with 100mm lens.

Based on factory configuration.

If hardware is present.

Not yet implemented.

Resets frame header value.

Contact Lumitron for ADC to temperature equation.

Contact Lumitron for ADC to temperature equation.

Contact Lumitron for ADC to temperature equation.

Contact Lumitron for ADC to temperature equation.

Contact Lumitron for ADC to voltage equation.

Linear and Histogram equalization.

Can be disabled.

First ROI reserved for full frame.

Reported in automatic mode, can be set in manual mode.

Reported in automatic mode, can be set in manual mode.

Not yet implemented.

Requires custom OEM software.

Contact Lumitron before upgrading camera operational software.

Contact Lumitron before upgrading

Xilinx FPGA configuration file.

Modification of stored production/manufacturing data reserved for specific OEM

’ s.

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Camera Software Feature

Static Configuration Data

Individual Operational Mode Configuration

Individual NUC Mode Configuration

Motorola DSP Register Settings

Xilinx FPGA Register Settings

Access to DSP Memory

Access to SPI FLASH Memory

Access to NUC FLASH Memory

Access to NVM RAM

Access to Real Time Clock

Access to operational software configuration variables/settings.

Host Application

Control (C) or

Monitor (M)

C/M

C/M

C/M

C/M

C/M

C/M

C/M

C/M

C

C

C

Notes

Modification of factory static configuration data reserved for specific OEM

’ s.

Modification of factory operational mode data reserved for specific

OEM

’ s.

Modification of factory NUC mode data reserved for specific OEM

’ s.

Modification of any DSP registers is not suggested except for advanced users. Changes may prevent camera from operating properly.

Modification of any FPGA registers is not suggested except for advanced users. Changes may prevent camera from operating properly.

Read/Write access reserved for specific OEM

’ s.

Read/Write access reserved for specific OEM

’ s.

Read/Write access reserved for specific OEM

’ s.

Camera operational state is stored in NVM via operational software.

Do not modify directly.

Contact Lumitron for specific information.

4. Environmental Specifications

4.1

4.2

4.3

Temperature

The storage temperature range is -40

º

C to 85

º

C.

The operating temperature range is -40

º

C to 60

º

C.

Water Resistance

The Camera as shipped from factory with Lens meets or exceeds the NEMA4 and IP67 water resistance rating.

Relative Humidity

The Camera as shipped from factory with Lens meets a relative humidity of 10% to 95%, noncondensing.

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4.4 Shock and Vibration

NEMA TS-2 Compliance;

Vibration: 5-30 Hz with 0.5G applied in three perpendicular planes.

Shock: 10G applied in three perpendicular planes

COHU ELECTRONICS WARRANTY

Cohu, Inc., Electronics Division warrants equipment manufactured to be free from defects of material and workmanship. Any part or parts will be repaired or replaced when proven by Cohu examination to have been defective within two years from date of shipment to the original purchaser for standard CCD cameras and one year from date of shipment to the original purchaser for intensified CCD cameras and all other Cohu manufactured products.

Pressurized Housings: Pressurized camera products include a lifetime pressurization warranty. Cohu will re-pressurize at no charge returned environmental cameras not exhibiting evidence of physical damage due to misuse. All warranty repairs will be performed at the factory or as otherwise authorized by

Cohu in writing. Transportation charges to Cohu shall be prepaid by purchaser.

Extended IR Cameras: Cameras utilizing extended infrared (extended IR) sensors found to exceed acceptable white blemish specifications within one month of delivery shall be repaired without charge.

This warranty does not extend to Cohu equipment subjected to misuse, accident, neglect, improper application, or repaired or altered by other than Cohu or those authorized by Cohu in writing. Cameras utilizing extended IR sensors are not warranted for use in areas of elevated levels of cosmic radiation.

Television image pickup tubes, image intensifiers, lenses, and products manufactured by companies other than Cohu are warranted by the original manufacturer.

This warranty is in lieu of all other warranties, express, implied, or statutory, including warranties of fitness for a particular purpose and merchantability, and sets forth buyers sole remedy in connection with such warranties. Cohu, in no event, whether as a result of breach of contract or warranty, tort (including negligence) or otherwise, shall be liable for any penalties regardless of reason; collateral, consequential, incidental, or exemplary damages, including without limitation, any loss of profit or revenues, loss of use of any equipment or goods, or removal or re-installation of equipment without prior written approval.

A Return Authorization (RA) Number must be obtained from Cohu prior to returning any item for warranty repair or replacement.

4/03 man.

Cohu Electronics

3912 Calle Fortunada

San Diego, CA 92123-1827

Phone: 858-277-6700

Fax: 858-277-0221

P

AGE

16

OF

17

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