Vacuum Module:
Vacuum Pump System
Series ZX
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How to Order
Components
Valve unit
N.C. type
Vacuum switch
unit
ZX100
K1
5 L Z
E C
Valve unit
N.O. type
Vacuum switch
unit
ZX100
K3
5 L Z
E C
Valve unit
N.C. type
Filter
unit
ZX100
K1
5 L Z
F
PV/V port size
Valve unit/Combination of supply valve and
release valve
Refer to “Table (1)” on page 13-2-41.
Pilot valve
Nil
Y
Vacuum switch electrical entry
DC: 1 W
Nil (With indicator light: 1.05 W)
AC
DC: 0.45 W
Y∗
(With indicator light: 0.5 W)
Caution
Nil
L
C
CL
∗ 24 VDC and 12 VDC are applicable
to 0.45 W.
When using the AC type, the
DC solenoids are operated via a
rectifier. Therefore, when using
this type, make sure to combine
t h e c o n n e c t o r a s s e m bl y
equipped with a rectifier with the
exclusive solenoids. Using other
combinations could lead to
burned coils or other types of
malfunctions.
• Refer to page 13-2-54 for
ordering the manifold.
• Refer to page 13-2-64 to 65 for
ordering a unit for replacement.
CN
Nil
100 VAC 50/60 Hz
110 VAC 50/60 Hz
24 VDC
12 VDC
6 VDC
5 VDC
3 VDC
Air operated
(K6, K8, J3, J4, D3, D4)
Plug
connector
type
Grommet
type
E
PS
PB
F
Vacuum switch (For general purpose)
Nozzle dia. (ø0.3 to 0.7) With suction
filter
Nozzle dia. (ø0.5 to 1.2)
Only suction filter
Adsorption
confirmation
switch
21
2 outputs/without analog output
22
2 outputs/with analog output
kPa
23 1 output (with trouble detection)/without analog
DP
24 1 output (with trouble detection)/with analog
D
Lead wire length 0.3 m
Without lead wire (Applicable to DC only)
Without connector
Lead wire length 0.3 m
Without lead wire (Applicable to DC only)
Without connector
Lead wire length 0.3 m (Applicable to DC only)
Lead wire length 0.6 m (Applicable to DC only)
Air operated
• Refer to “Table (2)” on page 13-2-41 for
part number of lead wire with connector.
Note) Analog output is available on grommet type only.
Manual operation
Non-locking push type
Locking slotted type
Nil
B
Light/Surge voltage suppressor
None
Nil
With light/surge voltage suppressor
Z
S
∗
With surge voltage suppressor
∗ In the case of AC,
“S” is not available.
Caution
Surge voltage suppressor
Black
Coil
Diode
Red
Coil
Light/Surge voltage suppressor
13-2-40
(Without lead wire)
Vacuum digital pressure switch unit
∗ Applicable to plug connector.
(Connector assembly with rectifier
is attached.)
Note) In the case of “K1” (combination of
supply and release valves), M type
plug connector can not be used.
Connector
type
Lead wire length 0.6 m
Lead wire length 3 m
Lead wire length 0.6 m
Lead wire length 3 m
Without connector
Vacuum switch unit/Filter unit
Electrical entry
L
LN
LO
M
MN
MO
G
H
Nil
Grommet
type
• Refer to “Table (3)” on page
13-2-41 for part number of
lead wire with connector.
Voltage
1∗
3∗
5
6
V
S
R
M5 x 0.8
M6 x 1 (Option)
Using the DC type:
Match the polarity of the connectors according to
the + and – marks on the connectors. Do not
interchange the polarities to prevent the diodes or
the switching elements from becoming burned.
If lead wires are pre-connected, the red wire is +
and the black wire is – .
Using the AC type:
The AC type is not equipped with a surge voltage
suppressor because the rectifier assembly
prevents the generation of surge voltage.
Vacuum Module:
Vacuum Pump System
Table (1) Valve Unit/Combination of Supply Valve and Release Valve
Components
Supply valve
Release valve
Solenoid
(N.C.)
Solenoid
(N.O.)
Air operated
(N.O.)
Air operated
(N.O.)
Solenoid
(N.C.)
Solenoid
(N.C.)
Symbol
Supply valve
Air operated
Solenoid valve
N.C.
N.O.
N.C.
N.O.
(VJ114) (VJ324) (ZX1A) (VJA324)
None
Series
ZX
(Refer to page 13-2-42 for details specifications.)
Release valve
Air operated External release
N.C.
None
ZX1A
(VJA314)
Solenoid valve
N.C.
N.C.
(VJ114) (VJ314)
ZX
ZR
ZM
K1
앬
—
—
—
—
앬
—
—
—
—
ZH
K3
—
앬
—
—
—
—
앬
—
—
—
ZU
External release
K6
—
—
앬
—
—
—
—
—
앬
—
Air operated
(N.C.)
K8
—
—
—
앬
—
—
—
앬
—
—
Nil
ZL
ZY
Without valve module
ZQ
Table (2) Valve Unit/Valve Plug Connector Assembly
Connector assemby part no.
(For DC)
VJ10 20 4A 6
(For 100 VAC)
VJ10 36 1A 6
(For 110 VAC)
VJ10 36 3A 6
How to order
If ordering vacuum module with 600 m or
the longer lead wire, specify both
vacuum module and connector assemby
part numbers.
Ordering example)
ZX100-K15LOZ-EC······ 1 pc.
∗VJ10-20-4A-6·············· 2 pcs.
Lead wire length
Nil
6
10
15
20
25
30
0.3 m (Standard)
0.6 m
1m
1.5 m
2m
2.5 m
3m
Table (3) Vacuum Switch/Plug Connector Assembly
ZS 10 5A
ZP
Lead wire length
Nil
30
50
ZCU
0.6 m
3m
5m
AMJ
Note) If ordering switch with 5 m lead
wire, specify both switch and
lead wire with connector part
numbers.
Ordering example)
ZX100-K150Z-ECN·········1 pc.
∗VJ10-20-4A-6··············· 2 pcs.
∗ZS-10-5A-50················· 1 pc.
Misc.
Vacuum Pump System/Recommended Model (The models below will have faster delivery.)
Model
ZX100-K15LZ-F
ZX100-K15LZ-EC
ZX100-K35MZ-EC
Combination
Lead wire
Light/Surge
Vacuum switch unit Vacuum switch
Release valve Solenoid valve
Supply valve
electrical entry
rated voltage electrical entry voltage suppressor
/Filter unit
(Pilot valve) (Direct operated)
N.C.
N.C.
Suction filter (ZX1-F)
(VJ114)
(VJ114)
With
Plug
light/surge
N.C.
N.C.
connector
24 VDC
Connector type
voltage
(VJ114)
(VJ114)
type
Vacuum switch (ZSE)
suppressor
N.C.
N.O.
(VJ314)
(VJ324)
∗The above models are for short delivery.
ZX100-K15LZ-E
ZF
ZX100-K35MZ-E
13-2-41
Series
ZX
Vacuum Pump System/Combination of Supply Valve and Release Valve
Combination Symbol: K1
Combination Symbol: K6
An N.C. solenoid valve is used for the supply valve. Also, an N.C.
solenoid valve is used for the vacuum release valve.
Application: This combination is used for effecting control in
accordance with electric signals.
Release valve
An external 3 port valve must be provided to serve as the supply
valve. Also, an external 2 port valve (vacuum valve) must be provided
to serve as the vacuum release valve.
Application: This combination is used for effecting control in
accordance with electric signals.
External release port
Pilot port
Supply valve
How to Operate
Valve
Condition
1. Work adsorption
2. Vacuum release
3. Operation stop
How to Operate
Supply valve
Solenoid valve
ON
OFF
OFF
Release valve
Solenoid valve
OFF
ON
OFF
Combination Symbol: K3
Supply valve
Solenoid valve
ON
OFF
OFF
An air operated N.O. valve is used as the supply valve. An air
operated N.C. valve is used for the vacuum release valve.
Application: This combination is used for effecting control in
accordance with electric signals. Because the supply valve is N.O.,
the pressure that is supplied to the ejector is not interrupted during a
power outage; as a result, the state of suction can be maintained.
This type is used for preventing the workpieces from dropping during
Release valve
Pilot port
Release valve
Supply valve
Pilot port
Supply valve
How to Operate
Valve
Condition
1. Work adsorption
2. Vacuum release
3. Operation stop
Release valve
Solenoid valve
OFF
ON
OFF
Combination Symbol: K8
An N.O. solenoid valve is used for the supply valve. Also, an N.C.
solenoid valve is used for the vacuum release valve.
Application: This combination is used for effecting control in
accordance with electric signals. Because the supply valve is N.O.,
the pressure that is supplied to the ejector is not interrupted during a
power outage; as a result, the state of suction can be maintained. This
combination is used for preventing the workpieces from dropping
during power outages.
13-2-42
Valve
Condition
1. Work adsorption
2. Vacuum release
3. Operation stop
How to Operate
Supply valve
Solenoid valve
OFF
ON
ON
Release valve
Solenoid valve
OFF
ON
OFF
Valve
Condition
1. Work adsorption
2. Vacuum release
3. Operation stop
Supply valve
Air operated valve
OFF
ON
ON
Release valve
Air operated valve
OFF
ON
OFF
Vacuum Module:
Vacuum Pump System
Series
ZX
Vacuum Pump System/Construction
ZX
ZR
ZM
ZH
ZU
ZL
ZY
ZQ
Component Parts
No.
q
w
e
r
t
y
u
iNote)
Description
Material
Note
Poppet valve assembly
—
ZX1-PV-O
Release flow rate adjusting needle Stainless steel
Manifold base
Aluminum
Vacuum switch
—
ZSE2, ZSP1
ZX1-VB-D-
Valve unit
—
Interface plate
—
(PV)/(PS PD)
Return spring
Stainless steel
Filter case
Polycarbonate
Component equipment
No.
Supply valve Release valve
Solenoid valve Solenoid valve
1
N.C. (VJ114) N.C. (VJ114)
Solenoid valve Solenoid valve
2
N.O. (VJ324) N.C. (VJ314)
Air operated
Air operated
3
N.O. (VJA324) N.C. (VJA314)
Solenoid valve Air operated
4
Air operated
Solenoid valve
Combination of supply
and release valve
Model
ZX1-VJ114-
N.C. (Normally closed)
N.O. (Normally open)
ZX1A M3
Port size
M3 M3 x 0.5 Pilot port/External
release port
M5 M5 x 0.8
K3, J2
K6
No. 2 and 3 models only are applicable.
Indicate each part number.
Table (2) How to Order Solenoid Valves
Type of actuation
ZX1-VJ114
5 L Z
ZX1-VJ3 2 4
5 L Z
Caution
Turning the vacuum release flow volume adjusting needle clockwise
reduces the vacuum release flow volume; the needle valve is fully
closed when the needle stops turning. Turning the needle 2 full turns
counterclockwise from the fully closed position renders the needle
valve fully open. The needle will fall out if it is turned more than 4 full
turns.
Body option
Nil
M
Pilot valve
Individual exhaust
Common exhaust for
main and pilot valves
Note) In the case of N.C.
type, indicate no
symbol. (Individual
exhaust for Pilot valve)
Pilot valve
DC: 1 W
Nil (With indicator light: 1.05 W)
AC
DC: 0.45 W
Y ∗ (With indicator light: 0.5 W)
Description
Material
Part no.
Pilot valve
—
Refer to “Table (2)”, “(3)”.
Filter element
ZX1-FE
PVF
Note) Caution when handling filter case
1. The case is made of polycarbonate. Therefore, do
not use it with or expose it to the following
chemicals: paint thinner, carbon tetrachloride,
chloroform, acetic ester, aniline, cyclohexane,
trichloroethylene, sulfuric acid, lactic acid,
watersoluble cutting oil (alkalinic), etc.
2. Do not expose it to direct sunlight.
K1, J1
ZX1-VJ31
24-
ZX1-VJA31
24
No.
o
!0
Table (3) How to Order Air Operated Valves
Table (1) How to Order Pilot Valves
1
2
ZF
Replacement Parts
∗ 24 VDC and 12 VDC are applicable to 0.45 W.
Note) Screw length of VJ100 and VJ300 for series ZX
is different from that of the standard model.
<Screw length> VJ100–M1.7 x 15
Manual override
Light/Surge voltage suppressor
Nil Without light/surge voltage suppressor
With surge voltage suppressor
S
Z
With light/surge voltage suppressor
Nil
B
Non-locking push type
Locking slotted type
Electrical entry
Rated voltage
1∗
3∗
5
6
V
S
R
100 VAC
110 VAC
24 VDC
12 VDC
6 VDC
5 VDC
3 VDC
∗ Applicable to plug connector
L
LN
LO
M
MN
MO
G
H
Connector (0.3 m)
Connector (W/o lead wire)
Without connector
Connector (0.3 m)
Connector (W/o lead wire)
Without connector
Grommet (0.3 m)
Grommet (0.6 m)
Note) In the case of ZX1VJ114, M, MN and
MO cannot be used.
13-2-43
ZP
ZCU
AMJ
Misc.
Series
ZX
Valve Unit: ZX1-VB
Refer to page 13-2-10 for details.
Specifications
Unit no.
Components
Operation
Effective area (mm2)
(Cv factor)
Operating pressure range
Max. operating frequency
Operating temperature range
Interface plate symbol
Standard accessory
d
pa
um tion
u
c c
Va nne
co por t
A
K1 (Normally closed)
K3 (Normally open)
ot st
Pilxhau or t
e Ep
P
itch um
sw
m Vacu ly
u
cu ir
pp r t
Va lve a
su po
va pply t PV
su por
PS
57.4∗
11.5∗
1∗∗
79.1∗∗
7∗∗
20∗
20∗
8∗
Manual override
(Non-locking)
Bracket B
(Mounting hole)
(Standard accessory)
Release valve
70∗
Release flow rate
adjusting needle
Interface
plate
(PE port)
1∗
(Mounting hole)
M5 (or M6)
(PV port)
Vacuum supply
pressure port
M5 (or M6)
(A port)
Vacuum pad
connection port
Note) Dimensions ∗: For mounting bracket B ∗∗: For mounting spacer
13-2-44
Manual override
Release flow rate
adjusting needle
Interface
plate
35.4∗
5.4∗
(PS port)
Air supply port
for vacuum
switch valve
(Mounting hole)
Release valve
Supply valve
N.O.
35.4∗
(PE port)
8∗
83.9∗
Supply
valve
Manual override
(Push and turn Bracket B
the locking type (Standard
override.)
accessory)
(PS port)
Air supply port
for vacuum
switch valve
1∗
(Mounting hole)
M5 (or M6)
(PV port)
Vacuum supply
pressure port
5.4∗
7∗∗
11.5∗
1∗∗
t
lot us
Pi xha por t
e E
P
h
itc
m
sw cuu y
m
u ir Va ppl r t
u
c
su po
Va lve ay
V
va ppl r t P
o
u
s p
PS
d
pa
m n
uu ctio
c
Va nner t
co po
A
ZX1-VB
Vacuum switch valve
Vacuum release valve
Pilot type
Direct operated type
Solenoid valve
Air operated
Solenoid valve External
Air
N.C.
N.O.
N.C.
N.C.
N.C.
N.O.
release operated
(VJ114) (VJ324) (ZX1A) (VJA324) (VJ114) (VJ314) (ZX1A) (VJA314)
0.07
0.45
3 (0.17) Main valve
—
0.004
0.025
0.3 to 0.6 MPa
5 Hz
5 to 50°C
(PV) / (PS
PD)
Bracket B/Spacer 2
M5 (or M6)
(V port)
Vacuum pad
connection port
Vacuum Module:
Vacuum Pump System
Suction Filter Unit: ZX1-F
Series
ZX
Refer to page 13-2-12 for details.
Specifications
Unit no.
Operating pressure range
Operating temperature range
Filtration efficiency
Element
Weight
ZX1-F
Vacuum to 0.5 MPa
5 to 50°C
30 µm
PVF
35 g
ZX
Note) If not operated within the specified range of pressure and temperature, trouble may be caused.
ZR
ZM
Vacuum Pressure Switch Unit/ZSE2, ZSE3, ZSP1
ZH
Refer to page 13-2-13 to 13-2-18 for details.
ZU
Vacuum Pressure Switch
High speed response/10 ms
Uses a carrier diffusion
semiconductor pressure
sensor
Vacuum Pressure Switch
Specifications
Unit no.
Fluid
Set pressure range
Hysteresis
Accuracy
Voltage
Port size
Refer to Best Pneumatics Vol.16 for details.
ZSE2-0X
ZSE3-0X
Air
0 to –101 kPa
3% Full span or less
±3% Full span (5 to 40°C)
±1%
±5% Full span (0 to 60°C)
Full span
12 to 24 VDC (Ripple ±10% or less)
M5 x 0.8
Note) If not operated within the specified range of pressure and temperature, trouble may be caused.
ZL
ZY
ZQ
ZF
ZP
ZCU
AMJ
Adsorption Confirmation Switch Adsorption Confirmation Switch
Specifications
Suitable for small size
Unit no.
adsorption nozzle/ø0.3 to ø1.2
Fluid
Operating pressure range
With suction filter
Applicable adsorption nozzle dia.
Hysteresis
Improved wiring: connector
Internal orifice
type
Uses a carrier diffusion
• Filter case
semiconductor pressure
Caution
sensor
Misc.
ZSP1-S
ZSP1-B
Air
–20 to –101 kPa
ø0.3 to ø0.7
ø0.5 to ø1.2
0.5 kPa
ø0.5
ø0.8
1. The case is made of polycarbonate.
Therefore, do not use it with or expose it to
the following chemicals: paint thinner, carbon
tetrachloride, chloroform, acetic ester, aniline,
cyclohexane, trichloroethylene, sulfuric acid,
lactic acid, water-soluble cutting oil (alkalinic),
etc.
2. Do not expose it to direct sunlight.
• Other caution
Caution
It might not be possible to successfully pick a
workpiece if a picking nozzle or a picking pad
that is out of the applicable range is used.
13-2-45
Series
ZX
d
um
cu
Va por t
V
Valve Unit: Type K1
Vacuum switch (ZSE2)
Configuration and combination
Valve unit (K1) + Vacuum switch (ZSE3)
Adsorption confirmation switch (ZSP1)
Filter unit (F)
Model
ZX100
——
K1
——
ot st
Pil hau r t
ex E po
P
h
itc um
sw acu ly
V
m
pp r t
u
su po
cu
Va lve pply PV
va r su r t
ai po
PS
E
D
P
F
pa
on
cti
ne
n
co
Circuit diagram
(Circuits other than those with
vacuum switch are shown as
below.)
Vacuum
switch (E)
Vacuum switch (ZSE2)
ZX100-K1-E
Adsorption
confirmation switch (P)
(Release to
atmospheric
pressure)
Spacer 1
(For side mounting)
Pressure sensor
Pressure setting trimmer
1∗∗
Manual override
41∗
51∗
Filter unit (F)
2-R1.8∗
(Mounting hole)
ø3.6∗
(Mounting hole)
1∗
Supply valve
10∗
19∗
17.6∗
13.6∗
Release valve
Vacuum switch
(PD port)
(Mounting
hole)
(68.6)∗
Release flow rate
adjusting needle
(PE port)
Note) Dimensions ∗: For mounting bracket A ∗∗: For mounting spacer 1.
13-2-46
4∗
(PS port)
Air supply port
for vacuum
Pitch = 10
switch valve
M5 (or M6)
(PV port)
Vacuum supply pressure port
15.5∗
∗∗
Interface
plate
Bracket A
(Standard
accessory)
M5 (or M6)
Vacuum pad
connection port
Vacuum Module:
Vacuum Pump System
Vacuum switch (ZSE3)
ZX100-K1-D
Spacer 1: ZX1-S1
ZX
ZR
Spacer 1
(For side mounting)
DOWN
button
SET button
2-R1.8∗
(Mounting hole)
∗
1 10∗
19∗
2-R1.8∗
(Mounting hole)
ø3.6 ∗ (Mounting hole)
22.6∗
18.7∗
1∗
10∗
19∗
Release valve
(N.C.)
Release flow rate
adjustment needle
Air supply pressure port
(M3, PS port)
ZM
ø3.6
(Mounting hole)
41∗
51∗
1∗∗
UP button
RESET button
ZH
ø3.6∗
(Mounting hole)
17.8∗
ZU
Adsorption confirmation switch
ZL
(Mounting hole)
Interface
plate
ZY
15.5∗
M5
(V port)
Vacuum pad
connection port
ZQ
Adsorption nozzle
piping port
M5 x 0.8
(or M6 x 1)
∗
18∗∗ 4
Supply valve
(N.C.)
ZX
Adsorption confirmation switch (ZSP1)
ZX100-K1-P
Adjustment
needle
Manual override
(Non-locking)
Series
ZF
Pitch = 10
(PE port)
(PV port)
Vacuum supply pressure port
M2.5 x 51
Phillips screw
Bracket A
(Standard accessory)
ZP
2-ø3.3 mounting hole
ZCU
AMJ
Misc.
41∗
51∗
1∗∗
Filter unit (F)
ZX100-K1-F
2-R1.8∗
(Mounting hole)
1∗
10∗
19∗
ø3.6∗
(Mounting hole)
8.8∗
4.8∗
Filter
(Mounting hole)
13-2-47
Series
ZX
Valve Unit: Type K3
Configuration and combination Vacuum switch (ZSE2)
Valve unit (K3) + Adsorption confirmation switch (ZSP1)
Filter unit (F)
Model
ZX100
——
um
cu
Va por t
V
t
ot
Pil hausr t
ex E po
P
e
ly
alv
pp
su
hv
c
t
m
i
u
sw
cu r t
VaV po
um y
cu upplt
P
a
V ir s or
a Sp
P
E
K3 —— P
F
n
tio
ec
nn
o
dc
pa
Circuit diagram
(Circuits other than those with
vacuum switch are shown as
below.)
Vacuum
switch (E)
Adsorption
confirmation switch (P)
Vacuum switch (ZSE2)
ZX100-K3-E
Spacer 1
(For side mounting)
(Release to
atmospheric
pressure)
Pressure sensor
Manual override
(Push and turn
the locking
type override.)
2-R1.8∗
(Mounting hole)
1∗
Supply valve
N.O.
Release valve
51∗
41∗
1∗∗
Pressure setting trimmer
Filter unit (F)
ø3.6∗
(Mounting hole)
10∗
19∗
7.6∗
13.6∗
Vacuum switch
Manual override
(PE port)
M5 (or M6)
(PV port)
Vacuum supply pressure port
Note) Dimensions ∗: For mounting bracket A ∗∗: For mounting spacer 1.
13-2-48
4∗
18∗∗
(PS port)
Air supply port
for vacuum
switch valve
15.5∗
Interface
plate
(82.5)∗
Release flow rate
adjusting needle
2-ø3.3
mounting hole
Bracket A
(Standard accessory)
M5 (or M6)
(V port)
Vacuum pad
connection port
Vacuum Module:
Vacuum Pump System
Series
ZX
1∗∗
Adsorption confirmation
switch (ZSP1)
ZX100-K3-P
41∗
51∗
Spacer 1: ZX1-S1
ZX
Adjustment needle
2-R1.8∗
(Mounting hole)
1∗
10∗
19∗
ZR
ø3.6
(Mounting hole)
ø3.6∗
(Mounting hole)
17.6∗
ZM
13.6∗
ZH
ZU
Adsorption confirmation switch
ZL
ZY
Adsorption nozzle
piping port
ZQ
ZF
18∗∗
15.5∗
15.5∗
M5 x 0.8
(or M6)
ZP
4∗
ZCU
2-ø3.3
mounting hole
AMJ
Bracket A
(Standard accessory)
Misc.
41∗
51∗
1∗∗
Filter unit (F)
ZX100-K3-F
2-R1.8∗
(Mounting hole)
1∗
ø3.6∗
(Mounting hole)
10∗
19∗
8.8∗
4.8∗
Filter unit
(Mounting
hole)
13-2-49
Series
ZX
Pilot
air supply
External release
air supply
Valve Unit: Type K6
d
Vacuum switch (ZSE2)
Configuration and combination
Valve unit (K6)
+ Adsorption confirmation switch (ZSP1)
Filter unit (F)
Model —————— K6 ———————
ZX100
um
cu
Va por t
V
ot st
Pil hau or t
ex E p
P
ly
pp
su
m
uu r t
c
Va V po
P
E
P
F
Circuit diagram
External release port
Pilot port
Vacuum switch (ZSE2)
ZX100-K6-E
Vacuum
switch (E)
(Release to
atmospheric
pressure)
1∗∗
Pressure setting
trimmer
(Circuits other than those with
vacuum switch are shown as
below.)
Adsorption
confirmation switch (P)
Spacer 1
(For side mounting)
M5 x 0.8
Pilot port
pa
on
cti
ne
n
co
41∗
51∗
Pressure sensor
Filter unit (F)
M5 x 0.8
External release port
ø3.6
(Mounting hole)
Vacuum switch
1∗
2-R1.8∗
(Mounting hole)
10∗
19
13.6∗
Vacuum switch
Supply valve
Air operated
Release valve
External release
Release flow rate
adjusting needle
(PE port)
M5 (or M6)
(PV port)
Vacuum supply pressure port
Note) Dimensions ∗: For mounting bracket A ∗∗: For mounting spacer 1.
13-2-50
18∗∗
15.5∗
(63.5)∗
Interface
plate
4∗
M5 (or M6)
2-ø3.3
Mounting hole
Bracket A
(Standard accessory)
(V port)
Vacuum pad
connection port
Vacuum Module:
Vacuum Pump System
Series
ZX
Adsorption confirmation switch (ZSP1)
ZX100-K6-P
Adjusting needle
ZX
51∗
20∗
41∗
1∗∗
Spacer 1: ZX1-S1
ZR
2-R1.8∗
(Mounting hole)
ø3.6∗
(Mounting hole)
17.8∗
1∗ 10∗
ZM
ø3.6
(Mounting hole)
ZH
ZU
19∗
Adsorption confirmation switch
ZL
ZY
ZQ
(63.5)∗
ZF
18∗∗
ZP
ZCU
AMJ
4∗
15.5∗
Adsorption nozzle
piping port
M5 x 0.8
(or M6 x 1)
2-ø3.3
Mounting hole
Bracket A
(Standard accessory)
Misc.
2-R1.8∗
(Mounting hole)
1∗
10∗
19∗
51∗
41∗
1∗∗
Filter unit (F)
ZX100-K6-F
ø3.6∗
(Mounting hole)
8.8∗
4.8∗
Filter unit
(Mounting
hole)
13-2-51
Series
ZX
Air supply
for supply
valve pilot
Air supply
for release
valve pilot
Valve Unit: Type K8
Vacuum switch (ZSE2)
Configuration and combination
Valve unit (K8) + Adsorption confirmation switch (ZSP1)
Filter unit (F)
E
Model
———————— K8 ———————— P
ZX100
F
ot st
Pil hau r t
ex po
PE
lve
va m
ch acuu y
t
i
V ppl r t
sw
su po
um
cu upply
PV
a
V r s rt
ai po
S
P
um
cu
Va por t
V
on
cti
ne
on
c
d
pa
Circuit diagram
(Circuits other than those with
vacuum switch are shown as
below.)
Pilot port
Vacuum
switch (E)
Pilot port
Vacuum switch (ZSE2)
ZX100-K8-E
Adsorption
confirmation switch (P)
Spacer 1
(For side mounting)
Pressure setting
trimmer
1∗∗
Pressure sensor
41∗
51∗
M3 x 0.5
(Pilot port
for supply valve)
(Release to
atmospheric
pressure)
Filter unit (F)
M3 x 0.5
(Pilot port
for release valve)
2-R1.8∗
(Mounting hole)
1∗
ø3.6∗
(Mounting hole)
10∗
19∗
7.6∗
13.6∗
Vacuum switch
63.5∗
Release flow rate
adjusting needle
(PS port)
Air supply port
for vacuum switch
valve
(PE port)
M5 (or M6)
(PV port)
Vacuum supply pressure port
Note) Dimensions ∗: For mounting bracket A ∗∗: For mounting spacer 1.
13-2-52
4∗
15.5∗
Interface
plate
Release valve
(Air operated
VJA314)
18∗∗
Supply valve N.O.
(Air operated
VJA324)
Manual override
(Non-locking)
2-ø3.3
Mounting hole
Bracket A
(Standard accessory)
M5 (or M6)
(V port)
Vacuum pad
connection port
Vacuum Module:
Vacuum Pump System
Series
ZX
Adsorption confirmation switch (ZSP1)
ZX100-K8-P
41∗
51∗
1∗∗
Spacer 1: ZX1-S1
ZX
ZR
Adjusting needle
2-R1.8∗
(Mounting hole)
1∗
ø3.6∗
(Mounting hole)
17.6∗
10∗
19∗
ZM
ø3.6
(Mounting hole)
ZH
13.6∗
ZU
Adsorption confirmation switch
ZL
ZY
ZQ
ZF
18∗∗
ZCU
AMJ
4∗
15.5∗
ZP
2-ø3.3
Mounting hole
M5 (or M6)
Bracket A
(V port)
(Standard accessory) Adsorption nozzle
piping port
41∗
51∗
1∗∗
Filter unit (F)
ZX100-K8-F
2-R1.8∗
(Mounting hole)
1∗
10∗
19∗
ø3.6∗
(Mounting hole)
∗
8.8
4.8∗
Filter unit
(Mounting hole)
13-2-53
Misc.
Series ZX
Made to Order Specifications:
Please consult with SMC for detailed specifications, size and delivery.
1. Valve Unit/Other Combinations of Supply Valve and Release Valve (Ejector unit)
Ejector Unit
If those other than the standard combination of supply valves and release valves (Refer to page 13-2-5.) are required, select from the
following combinations. (Refer to page 13-2-4 for “How to Order”.)
Combination Symbol: K2
External release port
Combination Symbol: K7
An N.C. solenoid valve is used as the
supply valve. Also, an external 2 port
valve (vacuum valve) must be provided
to serve as the vacuum release valve.
Application: The supply pressure is
controlled by electric signals and a
vacuum release is effected by external
air.
An air operated N.O. valve is used as
the supply valve. An N.C. solenoid valve
is used for the vacuum release valve.
Release valve
Pilot port
Supply valve
Supply valve
How to Operate
How to Operate
Valve Supply valve Release valve
Condition
Solenoid valve External 2 port valve
1. Work adsorption
ON
OFF
2. Vacuum release
OFF
ON
3. Operation stop
OFF
OFF
Valve Supply valve Release valve
Condition
Air operated valve Solenoid valve
1. Work adsorption
OFF
OFF
2. Vacuum release
ON
ON
3. Operation stop
ON
OFF
Combination Symbol: K4
Pilot port
Release valve
Supply valve
Combination Symbol: J1
An N.O. solenoid valve is used as the
supply valve. An air operated N.C. valve
is used for the vacuum release valve.
An N.C. solenoid valve is used as the
supply valve. A vacuum release valve
is not used.
Application: The supply pressure is
restricted by electric signals and a
vacuum release is effected by air
signals. Because the supply valve is
N.O., the pressure that is supplied to the
ejector is not interrupted during a power
outage; as a result, the state of suction
can be maintained. This combination is
used for preventing the workpieces from
dropping during power outages.
Application: This combination is used
for effecting control in accordance with
electric signals. A vacuum release is
effected by the intrusion of air between
the silencer, pad, and the workpiece.
This combination is used when there is
no need to accelerate the vacuum
release speed.
Supply valve
How to Operate
How to Operate
Valve Supply valve Release valve
Condition
Solenoid valve Air operated valve
1. Work adsorption
OFF
OFF
2. Vacuum release
ON
ON
3. Operation stop
ON
OFF
Combination Symbol: K5
Valve Supply valve Release valve
Condition
Solenoid valve
1. Work adsorption
ON
2. Vacuum release
OFF
3. Operation stop
OFF
Combination Symbol: J2
An external 3 port valve must be
provided to serve as the supply valve.
Also, an N.C. solenoid valve is used for
the vacuum release valve.
Release valve
An N.O. solenoid valve is used as the
supply valve. A vacuum release valve
is not used.
Application: The supply pressure is
controlled by external air signals and a
vacuum release is effected by the
solenoid valve.
Pilot port
Supply valve
How to Operate
Valve Supply valve Release valve
Condition
External 3 port valve Solenoid valve
1. Work adsorption
ON
OFF
2. Vacuum release
OFF
ON
3. Operation stop
OFF
OFF
13-2-68
Application: The supply pressure is
controlled by external air signals and a
vacuum release is effected by the solenoid
valve. Because the supply valve is N.O.,
the pressure that is supplied to the ejector
is not interrupted during a power outage;
as a result, the state of suction can be
maintained. This combination is used for
preventing the workpieces from dropping
during power outages.
Application: It is used for controlling
the supply pressure through electric
signals. Because the supply valve is
N.O., the pressure that is supplied to
the ejector is not interrupted during a
power outage; as a result, the state of
suction can be maintained. This is
used for preventing the workpieces
from dropping during power outages. A
vacuum release is effected by the
intrusion of air between the silencer,
pad, and the workpiece. This
combination is used when there is no
need to accelerate the vacuum release
speed.
How to Operate
Valve Supply valve Release valve
Condition
Solenoid valve
1. Work adsorption
OFF
2. Vacuum release
ON
3. Operation stop
ON
Series
ZX
Made to Order Specifications:
Please consult with SMC for detailed specifications, size and delivery.
ZX
Combination Symbol: J3
An N.C. solenoid valve is used as the
supply valve. A vacuum release valve
is not used.
Pilot port
ZR
Combination Symbol: D2
Application: The supply pressure is
controlled by external air signals. A
vacuum release is effected by the
intrusion of air between the silencer,
pad, and the workpiece. This is used
when there is no need to accelerate
the vacuum release speed.
An N.C. solenoid valve is used for the
vacuum release valve. An external
supply valve must be provided.
Release valve
Application: The supply pressure is
controlled by the external valve and a
vacuum release is effected by the
solenoid valve.
ZM
ZH
ZU
ZL
ZY
How to Operate
How to Operate
Valve Supply valve Release valve
Condition
External 3 port valve
1. Work adsorption
ON
2. Vacuum release
OFF
3. Operation stop
OFF
Valve Supply valve Release valve
Condition
External valve Solenoid valve
1. Work adsorption
ON
OFF
2. Vacuum release
OFF
ON
3. Operation stop
OFF
OFF
Combination Symbol: J4
Combination Symbol: D3
An air operated N.O. valve is used as the
supply valve. A vacuum release valve is
not used.
Pilot port
Application: The supply pressure is
controlled by external air signals. Because
the supply valve is N.O., the pressure that
is supplied to the ejector is not interrupted
during a power outage; as a result, the
state of suction can be maintained. This is
used for preventing the workpieces from
dropping during power outages. A vacuum
release is effected by the intrusion of air
between the silencer, pad, and the
workpiece. This type is used when there is
no need to accelerate the vacuum release
speed.
Application: The supply pressure is
controlled by the external valve and a
vacuum release is effected by the
external 2 port valve (vacuum valve).
How to Operate
Valve Supply valve Release valve
Air operated valve
Condition
1. Work adsorption
OFF
2. Vacuum release
ON
3. Operation stop
OFF
Valve Supply valve Release valve
External valve Solenoid valve
Condition
1. Work adsorption
ON
OFF
2. Vacuum release
OFF
ON
3. Operation stop
OFF
OFF
Combination Symbol: D4
An N.C. solenoid valve is used for the
vacuum release valve. An external
supply valve must be provided.
Application: The supply pressure is
controlled by the external valve and a
vacuum release is effected by the
solenoid valve.
Pilot port
Release valve
ZF
ZP
ZCU
An external valve must be provided to
serve as the supply valve. Also, an
external 2 port valve (vacuum valve)
must be provided to serve as the
vacuum release valve.
How to Operate
Combination Symbol: D1
Release valve
External release port
ZQ
An external valve must be provided to
serve as the supply valve. An air
operated N.C. valve is used for the
vacuum release valve.
Application: The supply pressure is
controlled by the external valve and a
vacuum release is effected by external
air signals.
How to Operate
How to Operate
Valve Supply valve Release valve
External valve Solenoid valve
Condition
1. Work adsorption
ON
OFF
2. Vacuum release
OFF
ON
3. Operation stop
OFF
OFF
Valve Supply valve Release valve
External valve Air operated valve
Condition
1. Work adsorption
ON
OFF
2. Vacuum release
OFF
ON
3. Operation stop
OFF
OFF
13-2-69
AMJ
Misc.
Series ZX
Made to Order Specifications:
Please consult with SMC for detailed specifications, size and delivery.
1. Valve Unit/Other Combinations of Supply Valve and Release Valve (Vacuum pump system)
Vacuum Pump System
If those other than the standard combination of supply valves (Refer to page 13-2-41.) and release valves are required, select from the
following combinations. (Refer to page 13-2-40 for “How to Order”.)
Combination Symbol: K7
Combination Symbol: K2
External release port
An N.C. solenoid valve is used as the
supply valve. Also, an external 2 port
valve (vacuum valve) must be provided
to serve as the vacuum release valve.
An air operated N.O. valve is used as the
supply valve. An N.C. solenoid valve is
used for the vacuum release valve.
Release valve
Application: The supply pressure is
controlled by electric signals and a
vacuum release is effected by external
air.
Pilot port
Supply valve
Supply valve
How to Operate
How to Operate
Valve Supply valve Release valve
Condition
Solenoid valve External 2 port valve
1. Work adsorption
ON
OFF
2. Vacuum release
OFF
ON
3. Operation stop
OFF
OFF
Combination Symbol: K4
Pilot port
Release valve
Supply valve
Valve Supply valve Release valve
Condition
Air operated valve Solenoid valve
1. Work adsorption
OFF
OFF
2. Vacuum release
ON
ON
3. Operation stop
ON
OFF
Combination Symbol: J1
An N.O. solenoid valve is used as the
supply valve. An air operated N.C. valve is
used for the vacuum release valve.
An N.C. solenoid valve is used as the
supply valve. A vacuum release valve is
not used.
Application: The supply pressure is
controlled by electric signals and a vacuum
release is effected by air signals. Because
the supply valve is N.O., the pressure that
is supplied to the ejector is not interrupted
during a power outage; as a result, the
state of suction can be maintained. This
combination is used for preventing the
workpieces from dropping during power
outages.
Application: This combination is used
for controlling the pressure by electric
signals. Normally, the workpiece is
released due to the air leakage that
occurs between the pad and the
workpiece. However, if there is no air
leakage, the workpiece will not become
detached because the vacuum state is
maintained even when the supply valve
is turned OFF. To effect releasing, an
external 2 port valve (vacuum valve)
must be provided.
Supply valve
How to Operate
How to Operate
Valve Supply valve Release valve
Condition
Solenoid valve Solenoid valve
1. Work adsorption
OFF
OFF
2. Vacuum release
ON
ON
3. Operation stop
ON
ON
Combination Symbol: K5
Valve Supply valve Release valve
Solenoid valve
Condition
1. Work adsorption
ON
2. Vacuum release
OFF
3. Operation stop
OFF
Combination Symbol: J2
An external 3 port valve must be
provided to serve as the supply valve.
Also, an N.C. solenoid valve is used for
the vacuum release valve.
Release valve
An N.O. solenoid valve is used as the
supply valve. A vacuum release valve is not
used.
Application: The supply pressure is
controlled by external air signals and a
vacuum release is effected by the
solenoid valve.
Supply valve
Pilot port
13-2-70
Application: The supply pressure is
controlled by external air signals and a
vacuum release is effected by the
solenoid valve. Because the supply
valve is the N.O., the pressure that is
supplied to the ejector is not
interrupted during a power outage; as a
result, the state of suction can be
maintained. This combination is used
for preventing the workpieces from
dropping during power outages.
Application: Used for controlling with
electric signals. Because the supply N.O.,
the pressure is not interrupted during a
power outage. This prevents the workpieces
from dropping. Normally, the workpiece is
released due to leakage. However, if no air
leakage, the workpiece will not detach
because the vacuum state is maintained
even when the supply valve is turned ON. To
release, an external 2 port valve (vacuum
valve) must be used.
How to Operate
How to Operate
Valve Supply valve Release valve
Condition
External 3 port valve Solenoid valve
1. Work adsorption
ON
OFF
2. Vacuum release
OFF
ON
3. Operation stop
OFF
OFF
Valve Supply valve Release valve
Condition
Solenoid valve
1. Work adsorption
OFF
2. Vacuum release
ON
3. Operation stop
ON
Series ZX
Made to Order Specifications:
Please consult with SMC for detailed specifications, size and delivery.
ZX
Combination Symbol: J3
An N.C. solenoid valve is used as the
supply valve. A vacuum release valve
is not used.
Pilot port
Release valve
Application: The supply pressure is
controlled by external air signals.
Normally, the workpiece is released
due to the air leakage that occurs
between the pad and the workpiece.
However, if there is no air leakage, the
workpiece will not become detached
because the vacuum state is
maintained even when the supply
valve is turned OFF. To effect
releasing, an external 2 port valve
(vacuum valve) must be provided.
An N.C. solenoid valve is used as the
vacuum release valve. A supply valve
is not used.
Application: The supply pressure is
controlled by an external 2 port valve
(vacuum valve) and a vacuum release
is effected by the solenoid.
Valve Supply valve Release valve
Condition
External 2 port valve Solenoid valve
1. Work adsorption
ON
OFF
2. Vacuum release
OFF
ON
3. Operation stop
OFF
OFF
Combination Symbol: D3
External release port
Application: Supply is controlled by
external air signals. Because the valve
is N.O., the pressure is not interrupted
during a power outage. This prevents
the workpieces from dropping. Normally,
the workpiece is released due to
leakage. However, if no leakage, the
workpiece will not detach because the
vacuum state is maintained even when
the valve is turned ON. To release, an
external 2 port valve (vacuum valve)
must be provided.
How to Operate
Valve Supply valve Release valve
Condition
External 2 port valve Solenoid valve
1. Work adsorption
ON
OFF
2. Vacuum release
OFF
ON
3. Operation stop
OFF
OFF
Valve Supply valve Release valve
Condition
Air operated valve
1. Work adsorption
OFF
2. Vacuum release
ON
3. Operation stop
ON
Combination Symbol: D4
Release valve
Application: The supply pressure is
controlled by an external 2 port valve
(vacuum valve) and a vacuum release
is effected by the solenoid.
Pilot port
Release valve
ZF
ZP
ZCU
AMJ
An external 2 port valve (vacuum
valve) must be provided to serve as
the supply valve and the vacuum
release valve.
Application: The supply pressure is
controlled by the external 2 port valve
(vacuum valve) and releasing is also
effected by the extermal 2 port valve.
How to Operate
An N.C. solenoid valve is used as the
vacuum release valve. A supply valve
is not used.
ZU
ZQ
Valve Supply valve Release valve
Condition
External 3 port valve
1. Work adsorption
ON
2. Vacuum release
OFF
3. Operation stop
OFF
Combination Symbol: D1
ZH
ZY
How to Operate
An air operated N.O. valve is used as
the supply valve. A vacuum release
valve is not used.
ZM
ZL
How to Operate
Combination Symbol: J4
Pilot port
Supply valve
ZR
Combination Symbol: D2
An external 2 port valve (vacuum
valve) must be provided to serve as
the supply valve. An air operated N.C.
valve is used for the vacuum release
valve.
Application: The supply pressure is
controlled by the external 2 port valve
(vacuum valve) and vacuum release is
effected by external air signals.
How to Operate
How to Operate
Valve Supply valve Release valve
Condition
External 2 port valve Solenoid valve
1. Work adsorption
ON
OFF
2. Vacuum release
OFF
ON
3. Operation stop
OFF
OFF
Valve Supply valve Release valve
Condition
External 2 port valve Solenoid valve
1. Work adsorption
ON
OFF
2. Vacuum release
OFF
ON
3. Operation stop
OFF
OFF
13-2-71
Misc.
Series ZX
Made to Order Specifications:
Please consult SMC for detailed specifications, size and delivery.
1. Noise Reduction Silencer Assembly/The ejector exhaust style is applicable to the silencer equipped specifications.
ZX1 Nozzle diameter Exhaust style
Valve
Voltage
Electrical entry
–X121
Noise reduction silencer assembly
Reduction in the exhaust noise from the ejector (Silencing effect 8 dB (A) Standard silencer assembly comparison)
Noise reduction
silencer assembly
ZX1-HS1
Ordering example
ZX1101-K35LZ-D23C-X121
P3270147-23
Phillips screw (M2 x 23)
P3200223-2
Noise absorbing material G
P3200224-1
Silencer case F
P3200225
Silencer case E
Noise reduction
silencer assembly
ZX1-HS1
Noise reduction
silencer assemby
ZX1-HS1
Ordering example
∗ ZZX102-R
ZX1101-K35LZ-EC-X121
13-2-72
1 pc.
2 pcs.
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