Varian Agilent XGS-600 Controller Instruction Manual

NOTICE: This document contains references to Varian.
Please note that Varian, Inc. is now part of Agilent
Technologies. For more information, go to
www.agilent.com/chem.
vacuum technologies
Manual No. 699908400
Revision B
August 2009
INSTRUCTION MANUAL
DRAFT 11/4/09
XGS-600™ Gauge
Controller
XGS-600 Gauge Controller
Copyright 2009
Varian, Inc.
XGS-600 Gauge Controller
Warranty
Products manufactured by Seller are warranted against defects in materials and workmanship for twelve
(12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty
claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of the
purchase price of the Product. Items expendable in normal use are not covered by this warranty. All
warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole
opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of
Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of
the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the repaired or replaced parts. After expiration of
the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,
and transportation.
Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of
law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any warranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements made
by any person, including representatives of Seller, which are inconsistent or in conflict with the terms of
this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of
Seller.
Warranty Replacement and Adjustment
All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,
and must be received within the applicable warranty period by Seller or its authorized representative.
Such claims should include the Product serial number, the date of shipment, and a full description of
the circumstances giving rise to the claim. Before any Products are returned for repair and/or adjustment, written authorization from Seller or its authorized representative for the return and instructions as
to how and where these Products should be returned must be obtained. Any Product returned to Seller
for examination shall be prepaid via the means of transportation indicated as acceptable by Seller.
Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on
any item that has been altered or has been returned by non-acceptable means of transportation. When
any Product is returned for examination and inspection, or for any other reason, Customer shall be
responsible for all damage resulting from improper packing or handling, and for loss in transit, notwithstanding any defect or non-conformity in the Product. In all cases, Seller has the sole responsibility for
determining the cause and nature of failure, and Seller’s determination with regard thereto shall be
final.
If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will
be notified and the Product returned at Customer’s expense; in addition, a charge for testing and examination may be made on Products so returned.
3/1/00
DRAFT 11/4/09
Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or
damage caused by use of its Products other than in accordance with proper operating procedures.
XGS-600 Gauge Controller
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XGS-600 Gauge Controller
Contents
Preface .............................................................................................................................................. v
Hazard and Safety Information ................................................................................................ v
EMC Warnings ....................................................................................................................... vi
Introduction ................................................................................................................................... 1-1
Backwards Compatibility ...................................................................................................... 1-1
Part Number Scheme ............................................................................................................ 1-1
XGS-600 Front and Back Description.................................................................................... 1-2
Unit Dimensions ................................................................................................................... 1-3
Installation ..................................................................................................................................... 2-1
Connect the Unit................................................................................................................... 2-1
Operational Screens.............................................................................................................. 3-1
Service and Troubleshooting ...................................................................................................... 4-1
Troubleshooting .................................................................................................................... 4-5
Appendix A. XGS-600 Gauge Specifications ............................................................................. A-1
Instrument Specifications ......................................................................................................A-1
Board Specifications/Descriptions .........................................................................................A-3
I/O Pin Assignments ..............................................................................................................A-6
XGS-600 vs MultiGauge and SenTorr Backwards Compatibility Detail..................................A-9
Appendix B. ASCII Serial Commands ........................................................................................ B-1
Appendix C. BCD Serial Commands .......................................................................................... C-1
Appendix D. Gas Correction Factor Table ................................................................................. D-1
i
DRAFT 11/4/09
Operating Instructions ................................................................................................................. 3-1
XGS-600 Gauge Controller
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Declaration of Conformity
Konformitätserklärung
Déclaration de Conformité
Declaración de Conformidad
Verklaring de Overeenstemming
Dichiarazione di Conformità
We
Wir
Nous
Nosotros
Wij
Noi
Varian, Inc.
121 Hartwell Avenue
Lexington, MA, 02421-3133 USA
declare under our sole responsibility that the product,
erklären, in alleniniger Verantwortung, daß dieses Produkt,
déclarons sous notre seule responsabilité que le produit,
declaramos, bajo nuestra sola responsabilidad, que el producto,
verklaren onder onze verantwoordelijkheid, dat het product,
dichiariamo sotto nostra unica responsabilità, che il prodotto,
XGS-600 Gauge Controller
to which this declaration relates is in conformity with the following standard(s) or other normative documents.
auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.
auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).
al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).
waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.
a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.
EN 55011 (1991) . . . . . . . . . . . . . . . . . . . . . . . Group 1 Class A ISM emission requirements
EN 61010-1 (1993) . . . . . . . . . . . . . . . . . . . . . Safety requirements for electrical equipment for measurement, control,
and laboratory use incorporating Amendments Nos 1 and 2.
EN 61000-3-2 (2006) . . . . . . . . . . . . . . . . . . . . Limits for harmonic current emissions
(equipment input current up to and including 16A per phase).
EN 610000-3-3 (2005) . . . . . . . . . . . . . . . . . . . Limitation of voltage fluctuations and flicker in low-voltage supply
systems for equipment with rated current up to and including 16A.
EN 61326 (1997/A1; 1998/A2; 2001/A3) . . . . . EMC requirements for Electrical equipment for measurement, control and
laboratory use — General Use.
EN 61326 (1997/A1; 1998/A2; 2001/A3) . . . . . EMC requirements for Electrical equipment for measurement, control and
laboratory use
EN 61000 - 4-2 (2001) . . . . . . . . . . . . . . . . . . . Electrostatic Discharge Immunity
EN 61000 - 4-4 (2004) . . . . . . . . . . . . . . . . . . . Electrical Fast Transient Immunity
EN 61000 - 4-5 (2005) . . . . . . . . . . . . . . . . . . . AC Lightning Surge Immunity
John Ehmam
Operations Manager
Varian, Inc.
Lexington, Massachusetts, USA
August 27, 2008
XGS-600 Gauge Controller
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XGS-600 Gauge Controller
Preface
Hazard and Safety Information
WARNING
The warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not
followed correctly, could lead to serious injury.
CAUTION
The caution messages are displayed before procedures, which
if not followed, could cause damage to the equipment.
NOTE
DRAFT 11/4/09
This manual uses the following standard safety protocols:
The notes contain important information.
This product must only be operated and maintained by trained personnel. Board
installation/replacement requires a properly trained service technician.
Before operating or servicing equipment, read and thoroughly understand all operation/
maintenance manuals provided by Varian. Be aware of the hazards associated with this
equipment, know how to recognize potentially hazardous conditions, and how to avoid
them. Read carefully and strictly observe all cautions and warnings. The consequences of
unskilled, improper, or careless operation of the equipment can be serious.
In addition, consult local, state, and national agencies regarding specific requirements and
regulations. Address any safety, operation, and/or maintenance questions to your nearest
Varian office.
v
XGS-600 Gauge Controller
EMC Warnings
EN 55011 Class A Warning
This is a Class A product. In a domestic environment this product may cause radio
interference in which case the user may be required to take adequate measures.
The XGS-600 was tested with Varian manufactured gauge cables whose pigtails are
connected to the XGS-600 ground stud, and with I/O cables (for remote control, serial
communications and set points) employing combined foil-braid shields and metal shell
connectors with the shields connected to the XGS-600 chassis. Compliance with FCC Part
15 rules and the European Union's EMI requirements cannot be assured unless Varian
supplied gauge cables and foil-braid shielded I/O cables with metal shell connectors are
used. Failure to install the unit in this way may result in the failure to meet the requirements
for radiated emissions and susceptibility.
This device complies with Part 15 of the FCC rules. Operation is subject to the following
two conditions: (1) This device may not cause harmful interference, and (2) this device must
accept any interference received, including interference that may cause undesirable
operation.
vi
NOTE
The equipment has been tested and found to comply with the
limits for a Class A digital device, pursuant to Part 15 of the FCC
rules. These limits are designed to provide reasonable
protection against harmful interference when the equipment is
operated in a commercial environment. This equipment
generated, uses, and can radiate radio frequency energy and, if
not installed and used in accordance with the instruction
manual, may cause harmful interference to radio
communications. Operation of this equipment in a residential
area is also likely to cause harmful radio communications
interference in which case the user will be required to correct
the interference at his own expense.
NOTE
It has been observed that transient electromagnetic phenomena
(electrostatic discharges and power line voltage spikes and/or
surges) can cause the XGS-600 to interrupt a measurement
cycle with an error or a blank screen. If this occurs, power
cycle the XGS-600 in order to repeat the measurement.
DRAFT 11/4/09
FCC
XGS-600 Gauge Controller
Chapter 1: Introduction
You can view up to 8 gauges on one screen and can employ as many as 5 ion gauges or
12 convection gauges in one unit. With its simple user interface (designed to be operated
without a manual) and its many standard features (8 set points, serial communication,
universal voltage and pressure units), vacuum measurement is simplified. And where speed
is necessary for certain critical applications it was designed to process a signal in less than
20 milliseconds. These are just some of the many features that make the XGS-600, a unique
and powerful device. Once you have used the XGS-600, we trust that you, too will find that
it is not only a convenient and economical tool in your vacuum system but an
indispensable one as well.
Read this manual carefully to discover all the capability of this device, but if you don't have
time, simply turn it on and navigate through the screens to get started.
Backwards Compatibility
The XGS-600 is designed to be backward compatible with the SenTorr and MultiGauge
instruments. Refer to page A-9 for a full description.
Part Number Scheme
Description
Part Number
XGS-600 Vacuum Controller, without cards
Configure your XGS-600 Controller with cards – constructing your part number:
XGS600H0M0C0
XGS600HXMXCX
1 Refer to the Gauge Selection Chart to help determine the gauge you need
2 Choose the number of HFIG** cards you want; place after the ”H”; will be 0 to 4
3 Choose the number of IMG* cold cathode cards you want; place after the “M”; will be 0 to 5
4 Choose the number of Dual Convection Gauge Cards; place after the “C”; each card
runs two convection type gauges, will be 0 to 6
Note:
• The XGS-600 has 6 gauge card slots permitting a total of 6 cards.
• Up to four slots can be used for HFIG** cards. If four of these are chosen, one IMG* card or up to two
Dual Convection Gauge Cards may be selected also.
• Up to five slots can be used for IMG* cards. If five of these are chosen, no additional gauge cards may be selected.
• All six slots may be used for Dual Convection Gauge Cards.
** HFIG = Hot Filament Ion Gauge
* IMG = Inverted Magnetron Gauge
1-1
DRAFT 11/4/09
Congratulations on your purchase of the XGS-600. This product represents a major advance
in the simplicity, functionality and performance of vacuum gauge controllers. It was
conceived after extensive interviews with end users in a variety of applications. Its design
incorporates the latest in electronics and is CE and CSA certified and RoHS compliant. It is
compact, taking only ½ rack and it is simply without peer in terms of its capacity, usability
and capability.
XGS-600 Gauge Controller
XGS-600 Front and Back Description
The display is biased so as to be best viewed from directly in front or slightly above.
1
2
Figure 1-1
XGS-600 Front Panel
DRAFT 11/4/09
5
7
6
3
4
Figure 1-2
Table 1-1
Item
Description
Backplate Connections
Front/Rear Panel Components
Page
1
Display
See “Screen Flow” on page 3-1.
2
Keypad/Navigation Keys
See“General Navigation and Data Entry” on page 3-2.
3
Set Point Outputs
See “Set-Point Connector Pin Assignments” on page A-7.
4
Serial Communication Connector “Serial Connector Pin Assignments” on page A-8.
5
Gauge Board Slots (6)
See “Board Specifications/Descriptions” on page A-3.
6
On/Off Power Switch and
AC Power Plug Receptacle
See “Connect the Unit” on page 2-1.
7
Ground Connection
See “Connect the Unit” on page 2-1.
1-2
XGS-600 Gauge Controller
Unit Dimensions
DRAFT 11/4/09
Figure 1-3 shows the unit dimensions with mm in brackets.
Figure 1-3
XGS - 600 Dimensions
1-3
XGS-600 Gauge Controller
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XGS-600 Gauge Controller
Chapter 2: Installation
Each XGS-600 unit is inspected and carefully packed prior to shipment. If the unit arrives
damaged, save the packing materials and immediately notify the carrier. Because the
packing materials are designed specifically for this instrument, always use them when
transporting the unit. The shipping container is packed with the following contents:
❑ XGS-600 gauge controller
❑ AC line cord
❑ Operating manual
❑ Rubber feet, adhesive
The unit comes shipped with sensor boards configured according to customer requirements.
Do not block air vents. Allow approximately 3/4" clearance at
each side of the enclosure for proper air flow.
CAUTION
1. Plug the AC line cord into the receptacle on the rear panel of the unit and into the
power source. Keep power off while connecting the remaining cables.
2. Connect gauge and I/O cables depending on controller configuration according to
Figure 2-1:
I/O Connector
Gauge Connection
BA Gauge
Power Connector
Gauge Connection
CNV1, 3, 5, 7, 9, B
I/O Connector
I/O Connector
Gauge Connection
CNV2, 4, 6, 8, A, C
Gauge Connection
Hot Filament Board
Convection Board
Figure 2-1
NOTE
IMG Board
Gauge Board Rear Connections
When installing and HFIG cable, make sure to connect the pig
tails from the ground cable to the ground stud. See item 7 in
Figure 1-2.
2-1
DRAFT 11/4/09
Connect the Unit
XGS-600 Gauge Controller
3. Turn on the unit using the rear panel power switch.
Gauges and accessories are available for the XGS-600
controller such as rack mount hardware, gauge and I/O
cables, and a tilt stand. See Table 2-1 and Table 2-2.
NOTE
Table 2-1
XGS-600 Accessories
Cables
DRAFT 11/4/09
Cable Description
Part Number
10 ft
'
25 ft.
50 ft.
UHV-24/UHV-24p Teflon UHV,
bakeable to 250° C
R32463010
R32463025
R32463050
UHV-24/UHV-24p Standard,
non-bakeable
R32453010
R32453025
R32453050
Glass BA Gauge Standard,
non-bakeable
R32443010
R32443025
R32443050
Ion Gauge Extension
75 ft
R32473065
MBA-l00 Gauge
R32483010
R32483025
R32483050
IMG-100 Gauge
R03113010
R03113025
R03113050
IMG-UHV Gauge
R03413010
R03413025
Thermocouple Gauge
L91313010
L91313025
L91313050
ConvecTorr Gauge, Non-Bakeable
L91223010
L91223025
L91223050
XGS-600 I/O
R32493010
R32493025
R32493050
Other Accessories
65 ft
Part No.
90 ft
100 ft
R32473090
R03113075
R03413065
R03113100
R03413100
L91313075
L91313100
L91223100
Special Order
Power Cord Selection
Part No.
HFIG** PCB, Field Install
R3075301
Europe, 1OA /220-230 VAC, 2.5 Meter
656494220
IMG* PCB, Field Install
R3080301
Denmark, 10A/220-230 VAC, 2.5 Meter
656494225
Thermocouple/Convector Gauge card
PCB, Field Install
R3084301
Switzerland, 10A/230 VAC, 2.5 Meter
56494235
Tilt Stand Accessory
R3124301
UK/Ireland, 13A/230 VAC, 2.5 Meter
656494250
Center Rack Mount Kit
L6423301
India, 10A/220-250 VAC, 2.5 Meter
656494245
Off-Center Rack Mount Kit
L6422301
Israel, 10A/230 VAC, 2.5 Meter
656494230
Dual Mount Rack Mount Kit
L6426301
Japan, 12A/100 VAC, 2.3 Meter
656494240
Four Channel TC Cable Adapter
R3299301
MHV-SHV Adapter
648072683
North America, 15A/125 VAC, 2.0 Meter
656458203
North America, 10A/230 VAC, 2.5 Meter
656494255
2-2
XGS-600 Gauge Controller
Table 2-2
Gauge Selection Chart
Convection
Hot Filament
Cold Cathode
C
H
M
Gauge
Type
Recommendation
Gauge Characteristics
✔
ConvecTorr
Best overall convection gauge
for accuracy repeatability,
secure connection
• Stainless steel
• Pipe thread, KF and CFF
• Locking bayonet connector
✔
536
Same vacuum performance
as the ConvecTorr but
without bayonet connector
• Stainless steel
• Pipe thread, KF and CFF
✔
531
Most economical rough
gauge
• Lowest cost
• Mild steel
• Pipe thread
✔
572 (glass)
Most popular general purpose
HV gauge (hot filament)
• Measures to 1 x 10-9 Torr
• Tungsten filaments - More accurate and repeatable
• Glass - Can see when it is on
✔
563 (glass)
Best general purpose HV
gauge (hot filament) for
overall performance and
reliability
• Measures to 1 x 10-9 Torr
• Thoriated iridium filament More robust with better burnout resistance
• Glass - Can see when it is on
• Platinum coating - Provides higher performance in the
10-4 range and a measure of EMI shielding
✔
571 (glass)
Same as 563 without
platinum coating
• Less expensive than the 563
✔
MBA-100
(one
filament,
metal case)
Break resistant HV gauge
(hot filament)
• Measures to 10-9 Torr
• General purpose hot filament with metal housing (not
glass) , so it will not break
• Uses less power than glass gauges.
• Well shielded
• Available in tungsten and thoriated iridium filament
(see 572 and 563 above)
Most durable and fastest
responding HV gauge (cold
cathode)
• General purpose-measures to 2 x 10-9 Torr
• Small, reliable, extremely rugged - Will not burn out
• Very fast response - < 20 milliseconds
• Less accurate and repeatable than hot filament
• Longer starting in high vacuum than a hot filament
• Can be cleaned
MBA-200
(two
filaments,
metal case)
✔
IMG-100
Inverted
Magnetron
Continued on next page
2-3
DRAFT 11/4/09
High 10-3 to 10-9
Rough ATM to 10-3
Vacuum Regime
Controller Gauge Card
XGS-600 Gauge Controller
Table 2-2
Gauge Selection Chart (Continued)
Convection
Hot Filament
Cold Cathode
Vacuum Regime
Controller Gauge Card
C
H
M
Ultra High 10-9 to 10-12
DRAFT 11/4/09
✔
Gauge
Type
Recommendation
Gauge Characteristics
IMG-300
Inverted
Magnetron
Most durable and fastest
responding UHV gauge
(cold cathode)
• Measures to 1 x 10-11 Torr
• Bakeable with magnet to 250 °C
• Bakeable without magnet to 450 °C
• Reliable, rugged, will not burn out
• Can be cleaned
✔
UHV-24
(nude)
Most popular UHV gauge
(hot filament)
• Measures to 1 x 10-10 Torr
• Bakeable with magnet to 250 °C
• Thoriated iridium filaments run cooler - less outgassing
• Dual tungsten filaments run hotter More outgassing but measurements are more accurate
and repeatable
✔
UHV-24p
(nude)
UHV gauge providing the
highest vacuum reading
• Same as UHV-24 except it measures to 2 x 10-11 Torr
BA Cross Reference
The XGS-600 controller is compatible with many competitor gauges. Table 2-3 indicates
which Varian gauge setting should be used for each of these gauges. See “Sensor Setup
Screen” on page 3-9.
Table 2-3
GP
ETI
MDC
BA Cross Reference
Huntington
Kurt Lesker
Duniway
Select Sensor model 572 for the following:
274012
4336-TP/1
TP-100
G100TF
T-075-N
274013
4336-TP
TK-100
G075TK
T-075-P
274015
4336-TK
TK-100-F
274016
4336-TK/1
T-075-K
T-100-N
274017
T-100-K
274018
T-100-P
274021
T-CFF-133
T-CFF-275
T-KF25
T-KF40
2-4
XGS-600 Gauge Controller
Table 2-3
GP
ETI
BA Cross Reference (Continued)
MDC
Huntington
Kurt Lesker
Duniway
Select Sensor model 571 for the following:
274002
4336-P
IGT-075
IP-100
G075F
I-075-N
274003
4336-K
IGT-100
IK-100
G100F
I-075-P
274005
4336-F
IK-100-F
G100KQF25
I-075-K
274006
4336-P/1
IP-150
G100KQF40
I-100-N
274008
4336-F/1
IK-150
G075N
I-100-K
274020
4336-K/1
IK-150-F
G100K
I-100-P
274032
8140
I-CFF-133
274028
I-CFF-275
274043
I-KF25
DRAFT 11/4/09
I-KF40
Select Sensor model UHV24 for the following:
274022
8130
UHTT
IGT-T
G8130
T-NUDE-F
274023
8130T
UHIR
IGT-TI
G8130T
I-NUDE-F
G8140
I-075-NC
G8120
I-075-KC
G8140-DI
I-100-NC
G100K-PT
I-100-KC
G100F-PT
IC=CFF-275
274041
BATT
274042
BAIR
Select Sensor model 563 for the following:
I-NUDE-BAC
Select Sensor model 564 for the following:
GX100-564F
I-164-K
GX100-564K
I-164-N
GX100-564N
I-164-275
I-164-KF25
I-164-KF40
2-5
XGS-600 Gauge Controller
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XGS-600 Gauge Controller
Chapter 3: Operating Instructions
Operational Screens
Screen Flow
Figure 3-1 shows the screen flow.
Main
See page 3-3
Press SETPTS
Press LARGER
Setpoints
Press SETUP
Press EXIT
DRAFT 11/4/09
Press EXIT
Large Font
See page 3-18
See page 3-7
Sensor Setup
Press Exit
See page 3-9
Press SYSTEM SETUP
System Setup
Press EXIT
See page 3-15
Press RESET SCREEN
Reset
Press EXIT
See page 3-17
Figure 3-1
Screen Flow
3-1
XGS-600 Gauge Controller
General Navigation and Data Entry
DRAFT 11/4/09
Use navigation keys to locate cursor on an area of interest (ex. data entry,
gauge control or screen navigation soft key). Only fields that are user-variable
are accessible by the cursor. Hold the key pressed for faster cursor movement.
+
-
Press the + or - keys to increment/decrement the field value through all
options. Hold the key pressed for fast increments/decrements.
OK
Use the OK key to accept the selected option or data.
Examples:
Turning a gauge on:
a. Cursor over to the control field for a gauge.
b. Press + or - keys to view control options (ON, OFF, etc).
c. Press OK.
Modifying a number:
a. Cursor over to the number.
b. Press + or - keys to increment/decrement number.
c. Press OK.
Navigating to another screen:
a. Cursor over to the screen navigation soft key (usually lower right corner of
screen).
b. Press OK.
NOTE
3-2
Escape keys: While scrolling through options or data using the
+/- keys, you can escape without accepting new data by
pressing any cursor navigation key. The original data is kept
and displayed.
XGS-600 Gauge Controller
Main Screen
Figure 3-2 shows the main screen, which appears at power up.
NOTE
The sequence of gauge rows follows the board installation
sequence from left to right (when viewed from the front).
Use this screen to:
❑ View a list of installed sensors.
❑ View real-time pressure readings and status by sensor.
❑ Turn an ion gauge on/off or calibrate a Convection gauge.
❑ View the setpoint status.
Sensor ID’s
DRAFT 11/4/09
Auto-On Indicator
Pressure Readings
Soft keys
Figure 3-2
Main Screen
Soft Keys
SETPTS
Select to open the Set Point screen (page 3-7).
SETUP
Select to open the Sensor Setup screen (page 3-9) and other setup
screens.
LARGER
Select to open the Large Font screen (page 3-18).
NOTE
The NEXT key appears if there are more than eight gauges. Use this
key to move to the next Main screen with the additional gauges.
3-3
XGS-600 Gauge Controller
Sensor ID’s
Lists the five-character User Label configured on the “Sensor Setup
Screen” on page 3-9.
Auto-On Indicator
Indicates Auto-On has been set up, using the Sensor Setup screen,
between a convection and an ion gauge(s). The same symbol
appears next to both the convection and the ion gauge showing the
link between the two.
In the screen shown, convection gauge CNV2 has been set up to
trigger both ion gauges HFIG1 and HFIG2.
Multiple Auto-ON setups are possible, with a different symbol
shape for each Convection gauge.
See “Sensor Setup Screen” on page 3-9 for Auto-ON details.
Pressure Reading
Displays the gauge pressure reading. The pressure units, as selected
in the System Setup screen, appear at the top of the column:
❑ Convection gauge readings always appear, as they are
DRAFT 11/4/09
always on.
❑ For ion gauges,
- - - appears when a gauge is first turned
on, until the software determines a valid reading.
See Table 4-1 on page 4-5 for error messages displayed in this
column.
If an ion gauge error message appears in the pressure reading
column and the control column indicates OFF, clear the error as
follows:
1. Press OK or reselect OFF in the control column.
2. Scroll to ON option to turn the gauge on.
3-4
XGS-600 Gauge Controller
Control
Use this column to input operational commands to the system. The
options available are:
Hot Filament Gauges:
❑ OFF
❑ FIL1 ON
❑ FIL2 ON
❑ DEGAS 1 ON (See section below)
❑ DEGAS 2 ON
❑ DEGAS OFF
Convection Gauges:
❑ CAL
❑ OFF
❑ ON
Degas (HFIG only):
To activate the DEGAS function, select DEGAS1 ON or
DEGAS2 ON depending on which filament is currently on.
Emission has to be on before Degas starts, and the pressure reading
must be below 1E-5T (or equivalent in other units). When Degas
times out (approximately 25 minutes), the field reverts to FIL1 or
FIL2, whichever filament is in use.
NOTE
Degas Limitations: All gauges operate simultaneously, but only
two hot filament gauges can degas at the same time. Additional
degasses are not allowed by the system.
To terminate degas manually, select Degas OFF. The field reverts to
Fil1 or Fil2. Turning off degas momentarily turns off emission.
CAL (CNV only):
Convection TC gauges are calibrated using this control. The
XGS-600 uses Varian's Smart Cal, which automatically determines
whether to perform a vacuum calibration or atmosphere calibration
based on the pressure presented to the sensor.
3-5
DRAFT 11/4/09
Inverted Magnetron Gauges:
XGS-600 Gauge Controller
NOTE
Convection gauge calibration at atmosphere depends on
orientation. Be sure to install the gauge sensor in final
orientation before calibrating.
To calibrate:
1. Cursor down to the CAL control for the required gauge.
2. Present either vacuum or atmospheric pressure to the gauge.
(Allow the gauge to stabilize for 15 minutes after first power up.)
3. Press OK.
DRAFT 11/4/09
Vacuum calibration defaults to 1E-4T and atmosphere calibration
defaults to 760T (or equivalents in mbar and Pa). See “System Setup
Screen” on page 3-15 for modifying atmospheric pressure to your
regional value. See “Sensor Setup Screen” on page 3-9 for selecting
gas type. See “Convection Gauge Board” on page A-4 for activating
the same calibration using rear-panel I/O controls, and “ASCII
Serial Commands” on page B-1.
It is normal for the vacuum reading of Convectorr and TC gauges to
fluctuate somewhat when at high vacuum after calibration.
Typically, you can expect the readings to be anywhere from 1.0E-4
Torr to ~3.0E-4 Torr with an occasional reading as high as 1.0E-3
Torr (or equivalent mbar and Pa).
SET-PTS (Set Points)
Displays the setpoints activated. The setpoints are numbered on the
Set Point screen (page 3-7).
The setpoint number appears if all following conditions met:
❑ The setpoint is assigned to the sensor,
❑ The setpoint screen is set to AUTO for that setpoint,
❑ And the setpoint has been activated.
3-6
XGS-600 Gauge Controller
Set Point Screen
To open this screen select SETPTS on the Main screen.
Set Point #
This number corresponds to the sequence of eight rear panel Set
Point outputs. This is also the number that appears on the Main
screen if the setpoint is activated. These are fixed numbers and not
user changeable.
SETPT
Select an available gauge in this list to assign to a Setpoint #. Only
two set points are allowed per sensor. If two setpoints are already
assigned to a sensor, that sensor does not appear in the list of
options for this field.
NONE is available as a choice. If selected, all pressures and delays
are set to zero and OFF.
ON
Select a Setpoint On pressure value. If the sensor pressure falls
below this value, the rear panel output activates (voltage low) and
the Setpoint # appears on the Main screen next to that sensor. The
ON reading must be a lower pressure than the OFF reading or an
error (ERR) warning appears in the rightmost column. Once valid
settings are entered, ERR changes to AUTO.
See “XGS-600 Gauge Specifications” on page A-1 for setpoint
output specifications and setpoint connector pin-outs.
ON DELAY
If a delay is required between the time the sensor detects the
Setpoint ON pressure value and the outputs activates (rear panel,
Main screen indicator and serial communication), select a delay
time in seconds. Example: A setting of 1.2 results in a delay of
approximately 1.2 seconds.
3-7
DRAFT 11/4/09
Figure 3-3 Set Point Screen
XGS-600 Gauge Controller
OFF
Select a Setpoint OFF pressure value. If the sensor pressure rises
above this value, the rear panel output de-activates (voltage high)
and the Setpoint # clears from the Main screen. The OFF reading
must be a higher pressure than the ON reading or an error (ERR)
warning appears in the rightmost column. Once valid settings are
entered, ERR changes to AUTO.
OFF DELAY
If a delay is required between the time the sensor detects the
Setpoint OFF pressure value and the output, de-activates (rear
panel, Main screen indicator and serial communication), select a
delay time in seconds. Example: A setting of 1.2 results in a delay
of approximately 1.2 seconds.
AUTO/ON/OFF
Options include:
❑ AUTO indicates the setpoint state is determined by
comparing the pressure to the setpoint limits. This is the
default setting and is used to enable the setpoint.
DRAFT 11/4/09
❑ OFF and ON are override values, which can also be used for
manual testing. Selecting OFF or ON does not clear
pressure/time settings.
EXIT SOFT KEY
3-8
Select to return to the main screen (page 3-3).
XGS-600 Gauge Controller
Sensor Setup Screen
To open this screen select SETUP on the Main screen.
Sensor Setup Screen: HFIG and IMG Sensors
DRAFT 11/4/09
Figure 3-4
Figure 3-5
Sensor Setup Screen: CNV (Convection) Sensors
See Table 3-1 on page 3-11 for default values. Fields that are unavailable have
- - -.
3-9
XGS-600 Gauge Controller
Sensor ID
Use this field to select the sensor to view its setup parameters.
Displays the unique system-assigned gauge identification. Scroll
through this list to select a sensor and the remainder of fields on the
screen populate with its present settings.
Possible sensor ID’s are:
❑ HFIGx for Hot Cathode Ion Gauge boards using BA or UHV
sensors.
❑ CNVx for Convection boards (TC/ConvecTorr)
❑ IMGx for IMG Gauge boards
DRAFT 11/4/09
where x indicates the number of the transducer attached. The
number is system-assigned based on the sequence of board
installation, left to right (when viewed from the front). Convection
boards have two sensors per board. When more than 4 convection
boards are installed, the 10, 11, and 12 channels are designated
CNVA, CNVB, and CNVC, respectively.
User Label
Use this field to enter your label for this sensor that appears on all
other screens and serial communication. This field has a maximum
of five (5) characters and any alphanumeric character is available
for use.
User Labels that begin with HFIG, CNV or IMG are not allowed to
avoid confusion with Sensor ID’s.
If no User Label is selected, the default is the Sensor ID. When a
System Reset is initiated, this label is reset to the sensor ID.
Sensor Model
NOTE
3-10
Use this field to configure the particular model of sensor attached
to a board.
If Sensor Model is changed, all fields resort to default values.
XGS-600 Gauge Controller
Default Setup Values by Ion Gauge Type
Default Emis
Current (ma)
Default
Sensitivity
Overpressure
limit (mT)+
Default
Degas Power
(mA)
Number of
Filaments
MBA100
0.1
25
1-10*
1
1
MBA200
0.1
25
1-10*
1
2
571
4
10
1-10*
10
1
572
4
10
1
10
2
563
4
10
1-10*
10
1
564
0.1
6
1-10*
10
1
UHV24 (default)
4
25
1
10
2
UHV24p
4
20
1
10
2
N/A
2.0
10
(Hi Voltage
stays ON)
N/A
N/A
N/A
2.5
10
(Hi Voltage
stays ON)
N/A
N/A
HFIG
Sensor Model
IMG 100 (default)
IMG 300
DRAFT 11/4/09
Table 3-1
+ Not a user-variable setup parameter
* If Emission Current is set:
❑ Less than 0.7 mA, overpressure is 10 mT (or equivalent in mbar or Pascal).
❑ Greater than 0.7 mA, overpressure is 1 mT (or equivalent in mbar or Pascal).
AUTO-ON IF GAUGE This field is active for HFIG and IMG gauges only. Use this field
along with < (is less than) to select a Convection gauge and assign a
pressure level below which AUTO-ON engages.
When Auto-On is activated, you cannot manually turn on or off the
ion gauge; it is controlled by the assigned convection gauge.
to deactivate Auto On.
Select
---
< (is less than)
Use this field with Auto-ON to enter pressure (max allowed 1T) at
which to trigger the ion gauge. There is a hysteresis of 5mT built in
to the software to prevent fluctuating ion gauge emission from
triggering on/off. For example, if this field is set to 3E-3T, Auto-ON
turns on the ion gauge at 3E-3T and off at 8E-3T.
3-11
XGS-600 Gauge Controller
ANALOG OUTPUT
Use this field to select either the FAST or SLOW analog output.
Select:
❑ FAST and the output is updated every 10 msec.
❑ SLOW and the update is every 250 msec.
The default setting is FAST for the IMGs, SLOW for hot filament and
rough gauges.
SENSITIVITY
This field is active for HFIG and IMG gauges only. Use this field to
raise or lower the sensitivity.
EMIS CURRENT (mA)
This field is active for HFIG gauges only. Use this field to configure
the EMIS Current. See Table 3-1 on page 3-11 for sensor default
values.
DRAFT 11/4/09
NOTE
Changing the Sensor Model, defaults Sensitivity and Emission
Current settings.
GAS CORRECTION
(HFIG and IMG gauges) Use this field to enter a correction for
various gas types. For an ion gauge, enter a nominal value from
Appendix D “Gas Correction Factor Table”.
GAS TYPE
(Convection gauges) Use this field to enter a gas type by name.
Select Air, Argon or Helium (“Helium Measurement Capability” on
page 3-14).
SYSTEM SETUP
Select to open the System Setup screen (page 3-15).
EXIT
Select to return to the Main Screen (page 3-3).
Selecting Emission Current for Hot Filament Ion Gauges
When the gauge model number is selected, the XGS-600 automatically selects a default
emission current value that works for most applications. However there are reasons why
you may want to select another value based upon your application.
❑ If you are using a gauge at pressures higher than 1.0E-4 Torr, the gauge performs
better and lasts longer at low values of emission current. In general, for this pressure
range, use 0.1ma.
❑ If you are using the gauge in the UHV range, the default emission setting may not
result in a large enough ion current to measure reliably. In this case, increase the
emission current to the maximum setting of 10 ma. However, there will be more
out-gassing which could adversely affect the system pressure. So, a compromise
between the emission current setting and filament out-gassing must be made. Try to
use the lowest emission current setting that provides good measurement results.
3-12
XGS-600 Gauge Controller
❑ If you have had your gauge calibrated, it would have been done at a specific
emission current. You should enter that value into the emission current setting of the
XGS-600.
based on the pressure that is measured. If the emission current is set to values greater
than or equal to 1.1 ma, the controller applies the full value when the measured
pressure is below 1.0E-5 Torr, and 1/10th of that value when the pressure is above
that level. There is an algorithm to minimize hunting. However, depending upon the
vacuum system, it may still be possible for the gauge to hunt for the proper emission
current setting when at or near 1E-5T. This is caused by the fact that when the
emission current is raised as the pressure goes down, the filament outgases at a
higher rate, causing the pressure to increase a bit. Sometimes it is possible for the
pressure to increase enough that the controller reduces the emission current, which
eliminates the source of gas. This causes the pressure to decrease to where the
controller again raises the current, and the system can get stuck in this cycle. You can
defeat this by setting the emission current to 1.0 ma or less, so the XGS-600
maintains that constant emission current at all pressures.
HFIG Smart Overpressure Protection
Hot filament ion gauges all exhibit non-linearity at high pressure such that they give
readings lower than the actual pressure. For gauges that are rated up to 10 mTorr or higher,
operating the BA gauge at low emission current can minimize this measurement error.
Unfortunately, many applications require operating the gauge at emission currents that
would result in poor measurement accuracy at high pressure, thereby compromising the
ability to provide effective overpressure protection.
XGS-600 adjusts the overpressure limit based upon the emission current. When the
emission current is 0.7ma or less, the gauge's full high pressure range can be used. If,
however, the emission current is set to higher values, XGS-600 protects the gauge by turning
off the filament at 1 mTorr. Overpressure Protection uses the same fast pressure signal that is
used for fast set points, and is displayed by the P>MAX error message.
Setting the Auto-ON Pressure Level
When enabling the Auto-ON feature, the XGS-600 defaults the threshold pressure to
5 mTorr. If the convection gauge is installed so that it is measuring the same high vacuum
chamber as the ion gauge, this is a good value to use. However, in many applications users
may want to monitor the high vacuum pump's fore-line pressure instead. In this application,
the foreline may never get down as low as 5 mTorr, especially if a large volume of gas is
being pumped. The XGS-600 allows you to program a threshold pressure as high as 1 Torr.
When Auto-ON is being used, the gauge overprotection feature is still active to protect the
high vacuum gauge.
3-13
DRAFT 11/4/09
❑ The XGS-600 employs a feature that automatically changes the emission current
XGS-600 Gauge Controller
Helium Measurement Capability
Helium has been added to Air and Argon selections in Gas Correction in the Gauge Setup
screen for roughing gauges. This selection allows the controller to read correctly when the
predominant gas is helium. However, it is important to recognize the performance
limitations of heat loss gauges when used with helium. These are:
❑ Poor performance above 200 Torr - The signal to noise ratio at this high pressure
range is very small, therefore stability, resolution, and accuracy are much worse than
a direct pressure gauge such as a CDG, silicon diaphragm gauge, or even a bourdoin
tube. Repeatability and drift is typically several hundred Torr. Performance below
200 Torr is about the same as when measuring in air.
❑ The maximum cable length is about half that when measuring air or argon. The
maximum recommended cable length using standard cables is 150’.
DRAFT 11/4/09
❑ The maximum number of rough gauge channels is reduced. Every gauge channel
setup for helium is equivalent to two channels when set for air or argon. Therefore,
the maximum number of convection cards, if all are set to helium, is three (six
channels).
Selection of Analog Output Response Time
The Gauge Setup screen now has a line for selecting between a FAST or SLOW analog
output response time. When FAST is selected, the analog output response time is ~10
msecs, while the SLOW selection is ~ 250 msecs. The original XGS-600 release was always
slow. The fast mode is useful for applications where you want to log and inspect the events
that lead up to a fast set-point release or if they want to use the analog output for their own
interlock purposes and bypass the XGS-600 set point outputs. When the fast response time
is selected, the signal is necessarily somewhat noisier and less accurate than the slow
version.
The default settings are FAST for the IMGs and SLOW for hot filament and rough gauges.
3-14
XGS-600 Gauge Controller
System Setup Screen
Use this screen to set values for overall system operation.
Figure 3-6
System Setup Screen
UNITS
Select: Torr (default), Pascal or mbar. Once the units are changed,
the values throughout the system are updated to the new units.
SETUP LOCKOUT
Toggle this to ON to make all fields on the SYSTEM SETUP and
SENSOR SETUP screen display-only (except for this field). This
provides a layer of security to prevent inadvertent changes.
AUTO FILAMENT
ADVANCE (HFIG
Boards)
For two-filament HFIG sensors, if Auto Filament Advance is
selected, Filament 2 is automatically engaged if Filament 1 has an
open filament error (NO FIL1). FIL2 ON then appears on the main
screen. Auto filament advance can occur when emission is first
turned on or during gauge operation. Auto advance does not
advance from Filament 2 to Filament 1. If an open filament error
occurs on Filament 2, instead the NO FIL2 error appears and
emission is turned off.
3-15
DRAFT 11/4/09
To open this screen select SYSTEM SETUP on the Sensor Setup screen.
XGS-600 Gauge Controller
ATMOSPHERE VALUE Sets the Atmosphere value to be used in Convection gauge
(Convection Boards)
calibration. See “Main Screen” on page 3-3 for the calibration
procedure.
SERIAL MODE
Select between RS232, RS485, and BCD communications.
When RS232 or RS485 is selected, the communication protocol is
ASCII (see “ASCII Serial Commands” on page B-1) and the only
difference being the use of either the RS232 or RS485 transceivers.
DRAFT 11/4/09
When BCD is selected, the communication is a packed-BCD type
using only the RS232 transceiver. This protocol is described in
“BCD Serial Commands” on page C-1 and is substantially
backwards compatible with older Multigauge controllers running
Px.x EPROMs.
SERIAL BAUD RATE
Selects between baud rate options: 9600 (default) and 19200.
RS485 ADDRESS
Set the RS485 address (default 00) as used in the first two
characters of all serial protocol commands (see “ASCII Serial
Commands” on page B-1).
REMOTE INPUTS
ACTIVE WHEN
Use this to select either active LO (default) or active HI logic for the
HFIG and IMG board on-off and degas (HFIG only) inputs. When
the input is in the active state, the gauge is turned on. The active HI
selection provides backwards compatibility with Multigauge and
Sentorr applications. See “XGS-600 vs MultiGauge and SenTorr
Backwards Compatibility Detail” on page A-9 for a description of
differences.
RESET SCREEN
Select to open the Software Versions screen which incudes the
system reset function (page 3-17).
EXIT
Select to return to the Main Screen (page 3-3).
Notes on Serial Communications
There are three selections for serial communications:
❑ RS232
❑ RS485
❑ BCD
The RS232 and RS485 modes are ASCII protocols. Refer to Appendix B “ASCII Serial
Commands” for the list of commands and the command protocol. These are largely
backwards compatible with Multigauge using software revisions Ax.x (ie: A2.4 for example)
and all Sentorr controllers.
The pins for RS232 and RS485 are contained in the same connector housing. See
Appendix A “XGS-600 Gauge Specifications” for the pin specifications.
3-16
XGS-600 Gauge Controller
The BCD selection is a so-called packed-BCD protocol that was used on older Multigauge
controllers using software revisions Px.x (ie: P3.3 for example).
Sentorr never used the BCD protocol.
NOTE
This protocol can only use the RS232 transceiver and is intended
for applications that require the XGS-600 to operate in older
systems, where it is impossible to modify the system's software.
While this provides enhanced backwards compatibility with most
applications, due to differences between the Multigauge and
XGS-600 controllers it cannot guarantee backwards compatibility
with ALL applications. See Appendix C “BCD Serial Commands”
for the list of commands and command protocols.
Software Versions Screen
This screen shows the software versions on a board-by-board basis.
Figure 3-7
DRAFT 11/4/09
To open this screen select RESET SCREEN on the System Setup screen.
Software Versions Screen
SYSTEM RESET
Use this to perform a full reset of user-defined variables, reverting
the system to as-shipped (factory-set) state.
EXIT
Select to return to the Main Screen (page 3-3).
3-17
XGS-600 Gauge Controller
Large Font Screen
To open this screen select LARGER on the Main screen.
Figure 3-8
Large Font Screen
DRAFT 11/4/09
The leftmost column shows the User Label as configured on the Sensor Setup screen. You
can select which transducers appear on this screen by moving the cursor to the User Label
and using the +/- modify keys.
EXIT
3-18
Select to return to the Main Screen (page 3-3).
XGS-600 Gauge Controller
Auto-On Feature Activation Procedures
1. Use Arrows to highlight setup and press OK:
2. Use Arrow down button to highlight sensor ID:
A. Use + or - button to change which sensor to use Auto-On with
NOTE: Only HFIG and IMG gauges can be set with this function.
B. Press OK once you have selected which HFIG or IMG gauge to
turn on automatically.
3-19
XGS-600 Gauge Controller
3. Use Arrow button to scroll down and highlight the
AUTO ON IF GAUGE ----- <IE-3.
A. Use + or - buttons to select which sensor to use as a setpoint for
the auto on feature.
NOTE: When the analog board is installed, any of the active type
gauges, or CDG, can be used to turn on/off an Ion Gauge.
B. When sensor has been chosen, press the OK Button.
C. You now have the option to change the vacuum setpoint on which
the HFIG turns on.
D. Press OK.
4. Use the
3-20
button and highlight the EXIT and press OK.
XGS-600 Gauge Controller
Chapter 4: Service and Troubleshooting
It is possible to replace sensor boards in the field for repair or to change the unit's
configuration to meet new application requirements. Because the slot spacing is different for
slots 5 & 6, you must follow the instructions below when installing the sensor boards.
Board Configuration Rules
REAR
FRONT
DRAFT 11/4/09
6
5
4
3
2
1
Figure 4-1
XGS-600 Slot Numbers
❑ Slots are numbered from left to right as viewed from the front of the XGS-600.
❑ Option slots 1 though 4 are “Long, High Profile Slots” and can accommodate any
board. HFIG boards are “Long, High Profile” boards and can only be installed in slots
1 through 4.
❑ Option slots 5 and 6 are “Short, Low Profile” slots and can accommodate only
convection or IMG boards, with the following restrictions:
❍ An IMG board may NOT be installed in slot 5 if any other board is installed in
slot 4.
❍ An IMG board may NOT be installed in slot 6 if any other board is installed in
slot 5.
4-1
XGS-600 Gauge Controller
Examples:
❑ You want to install 5 IMG boards:
❍ IMG boards are installed into slots 1, 2, 3, 4, and 6. Slot 5 remains empty. Do not
install any board into slot 5.
❑ You want to install 4 IMG and 2 CNV boards:
❍ IMG boards are installed in slots 1, 2, 3, and 4; CNV boards are installed in slots 5
and 6.
DRAFT 11/4/09
Sensor Board Replacement Procedure
WARNING
Only trained service personnel should attempt this work.
Disconnect the XGS-600 mains connection by unplugging the
IEC power cord from the back of the unit before removing the
unit's cover.
CAUTION
Wear an ESD bracelet and observe all appropriate precautions
to avoid damage to PCBs.
CAUTION
When these boards are assembled certain components are bent
over intentionally. Do not straighten them.
1. Turn off and unplug the line cord (AC mains).
2. Remove the cover by unscrewing the two Philips head screws.
3. If removing an HFIG board, unplug the yellow connector near the front panel. It may
require some effort to unplug. Do not pull on the wires, pry the yellow plastic connector
instead.
4-2
XGS-600 Gauge Controller
4. Lift the sensor board by the tab at the rear panel (Figure 4-2). Once the board is
disengaged from the board connector, pull the board out of the end guide.
Board
Connector
(male)
Tab
Figure 4-2
To ensure safety and proper operation, no slot opening can be
left unfilled. Install a filler plate by installing the two hooks into
the case bottom and snapping in the foot.
Contact Varian if additional fillers are needed.
DRAFT 11/4/09
WARNING
Tab and Main Board Connector
5. Install the replacement board:
a. Place the end of the board into the end guide (Figure 4-3).
End Guide
HFIG Plug
HFIG Power Cable
Figure 4-3
End Guide and HFIG Connector
b. Guide the board down as straight as possible onto the connector on the main
board. Figure 4-4 shows the connector on the base of all three board types.
Board Connector (female)
Figure 4-4
Sensor Board Connector: Bottom View
4-3
XGS-600 Gauge Controller
c. Locate the rear panel portion of the board into its slot, press down the tab and
exert gentle pressure until it clicks into place.
CAUTION
Do not force the board down. If too much pressure is required
the connector pins are not aligned.
d. Insert the yellow HFIG plug into the connector (HFIG boards only). See
Figure 4-3. This connector is keyed.
e. Inspect the installation to ensure the board is seated properly and not touching
any adjacent boards.
6. Replace the covers:
a. Push the cover straight in under the lip at the XGS front bezel.
DRAFT 11/4/09
b. Replace the two Philips head screws.
c. The cover must be flat and fully seated. It may be necessary to adjust the boards
and filler plates slightly for the cover to fully engage. The cover should drop on
front of the filler plate.
7. Plug the unit back in and turn on the power switch.
NOTE
Any board-specific settings must be reprogrammed.
Most Sensor setup and Set point user settings stay with the
board. This means if the removed board is used elsewhere,
most settings will be saved. However, if a new board is
installed, you will have to reprogram the settings.
4-4
XGS-600 Gauge Controller
Troubleshooting
Error Codes
Error Message
Meaning
General Error Code
Cause
Action
BD COM
Board Comm:
Internal
communication
error
Motherboard and sensor 1. Cycle power to unit
board stopped
2. Return unit for repair
communicating
GRIDLO
(HFIG bds only)
Grid voltage is too
low
❑ Pressure is too high
HITEMP
(HFIG and IMG bds
only)
NOFIL1
(HFIG bds only)
causing a glow discharge
❑ HFIG board failure
Internal temperature ❑ Fan failure
❑ XGS ventilation
is above 75° C
openings blocked
❑ Internal temperature
above 75° C
Filament is open or
cable disconnected
Second filament is
open or cable
disconnected
2. Replace gauge
1. Allow unit to cool
2. Check that fan is
operating
3. Ensure that there is
adequate ventilation around
the unit
❑ Filament failure
1. Use second filament
❑ Ion gauge cable not
2. Replace BA gauge
connected
NOFIL2
(HFIG bds only)
1. Check BA gauge for grid
to filament short or grid to
housing short
❑ Filament failure
❑ Ion gauge cable not
connected
3. Check that cable is
installed
1. Replace BA gauge
2. Check internal sensor
board connections
3. Check that cable is
plugged in
Open
(CNV bds only)
P>MAX
(HFIG bds only)
No Convection
sensor detected
❑ Cable not
Pressure is above
the maximum
operating point for
the gauge
❑ System vented from
connected
❑ Sensor failure
vacuum with gauges
on
❑ Attempted to turn
gauges on with vacuum near overpressure limit
1. Check cable
2. Replace sensor
1. Turn gauges off before
venting system or use
AUTO-ON
2. Wait for vacuum to
improve before turning on
ion gauges
4-5
DRAFT 11/4/09
Table 4-1
XGS-600 Gauge Controller
Tips
Varian offers reference ionization B/A gauges, which are sealed off at approximately 5E–6
Torr/6.6E–4 Pa, as well as a Convection gauge simulator which can switch between
atmosphere and vacuum simulation. These devices are extremely helpful in troubleshooting
a vacuum system problem by isolating the defective component.
NOTE
These reference gauges and stimulators are not NIST traceable
calibrated gauges, and should not be used for calibration.
Troubleshooting Table
DRAFT 11/4/09
Table 4-2
Troubleshooting
Problem
Cause
Action
Hot filament gauge hunts or
cycles around 1E-5Torr (1E-3Pa)
Auto emission adjustment
occurs at this pressure.
Increased filament power causes
a rise in pressure. Condition will
clear as system pressure
decreases.
If taking pressure measurements
in this range, reduce emission
current setting for the gauge to
1.0 mA or less to turn off feature
1. Check that cable is attached
IMG displays readings in the –11 ❑ IMG cable not plugged in
Torr range when the pressure is ❑ IMG has not started
2. Sometimes IMG’s are hard to
❑ IMG took a long time to start start when turned on at high
known to be higher
vacuum
Sometimes after a long time
period the reading becomes
3. Raise pressure
correct
4. Clean or replace IMG
HFIG bd reads UHV when
pressure is know to be higher
❑ Emission current not estab-
lished due to worn out Th-Ir
filament
❑ Collector cable unplugged
❑ HFIG board failure
1. Check collector connection at
gauge (glass BA) and at XGS-600
2. Replace gauge or filament
3. Return unit for repair/replace
HFIG bd
ERR appears in rightmost
column of setpoint screen
Setpoint OFF pressure is < than
ON pressure
Correct pressure entries so the
setpoint ON pressure is less than
the OFF pressure
Duplicate message appears
when trying to enter a User
Label
❑ Label is the same as another
Create a different entry
User Label not accepted
❑ User input violates User
4-6
User Label
Label rules
See “Sensor Setup Screen” on
page 3-9 for User Label rules
XGS-600 Gauge Controller
Table 4-2
Problem
Cannot turn HFIG or IMG on
using the keypad
Troubleshooting (Continued)
Cause
❑ Auto-ON programmed for
that gauge
❑ The keypad is locked out
Action
1. This is the correct response
2. If manual control is desired,
turn off AUTO-ON
3. Unlock keypad
Cannot turn on Degas
1. Pressure is above 1E-5T
1. Pump down before degas
2. Attempted to turn on Degas2
while running Fil1
2. Change operation to Fil2
before attempting to degas that
filament
3. Attempted to degas third
gauge
3. XGS-600 will only degas two
gauges at a time
The front panel display indicates Time delay = 0.0, 0.1
the setpoint triggers/releases at a
slightly different pressure than
what is programmed
XGS-600 uses a less accurate
pressure measurement for
setpoint delays of <= 0.1 secs to
obtain fastest responsiveness
Changes to baud rate, comm.
mode, units, keypad lockout, or
ATM value do not take effect
Did not exit System Setup screen After making changes, exit the
after making changes
screen for the changes to take
effect
Unit does not respond to RS232
or RS485 commands
1. XGS600 in wrong serial mode 1. Change serial comm to RS232
or RS485, select proper baud
or incorrect baud rate
rate, set RS485 address in
2. Incorrect wiring
General Setup screen
3. Incorrect terminal settings
2. Check wiring
3. Check that terminal has
correct # of data, start/stop bits,
etc.
Display goes blank followed by
a refill of the screen. Operation
is otherwise normal.
Screen refreshes approximately
every 20 minutes
XGS-600 refreshes the entire
screen periodically to update.
No action required.
One or more ion gauge
A major EMI disturbance or
channels (HFIG and IMG)
other anomaly has caused a
appear to restart, sometimes a
sensor board watchdog timeout
BDCOMM message appears first
This is how the XGS-600
recovers from hard and soft
errors. No action required.
BDCOMM message appears on
one or more channels and stays
Cycle AC (mains) power to the
unit OFF and ON again to
recover
A major EMI disturbance or
other anomaly has caused a
non-recoverable software error
4-7
DRAFT 11/4/09
4. Finish a degas before
attempting to start a third
XGS-600 Gauge Controller
Table 4-2
DRAFT 11/4/09
Problem
Troubleshooting (Continued)
Cause
Action
IMG reads 10 mT
Pressure is greater than 10 mT
Wait for pressure to drop into
operating range or use Auto-On
feature to control IMG
Display goes blank
A major EMI has caused a
display or software error
Cycle AC (mains) power to
the unit OFF and ON again
to recover, or wait for the
automatic screen refresh
(every 20 minutes)
Convection or TC readings
fluctuate when first at HI VAC
but then quiet down
This is normal behavior of the
None
Convectorr and TC gauges when
doing a pumpdown.
Convection or TC readings
fluctuate in excess of 1 mT
continuously when at Hi VAC
Possible defective gauge.
Replace gauge
Convection or TC readings
unstable at atmosphere when
measuring Helium
This is normal performance for
thermal loss gauges in helium
Refer to “Helium Measurement
Capability” on page 3-14 for
performance limits when
measuring helium
4-8
XGS-600 Gauge Controller
Appendix A. XGS-600 Gauge Specifications
Instrument Specifications
Table A-1 provides the XGS-600 instrument specifications.
Table A-1
General XGS-600 Gauge Specifications
Specification
Display
Description
Type: Backlit dot matrix monochrome LCD
Backlight: White LED
Small Font mode: Up to 8 channels displayed simultaneously
Keypad
5 button membrane with positive tactile feedback
Serial Communication
ASCII protocol: RS232 and RS485, no parity
BCD protocol: RS232
RS485 address range: 00 - FF
Baud Rate: 9600 or 19600
Set-Point Outputs
Type: 8 open collector type, ground referenced outputs
DRAFT 11/4/09
Large Font mode:Up to 2 channels displayed, readable from 15 feet
Voltage Rating: 32 VDC max
Current Rating: 50 mA max
Output Voltage:
Vout 50 Gnd
Von @ 5 mA = 0.6 Vmax
Von @ 25 mA = 0.75 Vmax
Von @ 50 mA = 0.90 V
Programming capability:
Can assign up to 2 outputs per gauge channel
Separate "make" and "break" pressure levels
Independent time delays on "make" and "break" of 0.0 to 9.9 seconds
Manual override capability of each set point output
Response Time: 20 msec max (when delay = 0.0)
Chassis
Dimensions: ½ rack, 2U high, 11" deep
Material: Grey Polycarbonate
Ventilation:Internal fan with plenum and over-temperature sensing
Fuse Rating
5A Fast Blow
A-1
XGS-600 Gauge Controller
Table A-1
General XGS-600 Gauge Specifications (Continued)
Specification
Description
Mains Power and Cordage
Voltage: 100-120, 200-240 VAC ±10% 50/60 HZ, 2A
Available worldwide IEC cords
Environmental/Installation
Storage Temperature: -15 to 70° C
Operating Temperature: CSA certified 5 to 40° C, at 5 to 95% RH,
non-condensing
Installation Category: 2
Pollution Degree: 2
Indoor use
Altitude: Up to 2000 m
DRAFT 11/4/09
Regulatory Approval
A-2
CE Certified:
Safety:
EN61010
Emissions:
EN6100-3-2 : 2006
EN6100-3-2 : 2005
EN61326: 1997/A1: 1998/A2: 2001/A3: 2003
EN55011
FCC Part 15 subpart J
Certified to CSA1010 for US and Canada
RoHS Compliant
WEEE labeled
XGS-600 Gauge Controller
Board Specifications/Descriptions
HFIG Board
The HFIG board operates all Varian hot filament gauges and most other available
Bayard-Alpert type hot filament ionization gauges including nude UHV types. The board
can be set up for all Varian hot filament gauges and allows you to set gauge emission
current, sensitivity value, and gas correction factor. The UHV range and E-Beam degas are
standard, as is dual filament control, remote I/O control of emission and filament selection,
and 0 to 10 V analog output.
Table A-2
HFIG Gauge Specifications
Description
Supported Gauge Heads
❑ Varian 563, 564, 571, 572, UHV24, UHV24p, MBA-100, MBA-200
Displayed Measurement Range*
❑ 5.0E-12 Torr to 1 mTorr (UHV24, UHV24p, 572)
❑ 5.0E-11 Torr to 10 mTorr (563, 571, MBA100, MBA200)
* This represents the ability of the controller to display pressure values
and not the capability of the gauge heads to accurately measure
pressure.
Emission Current
0.1 to 10.0 mA
Sensitivity Input Range
00.1 to 99.9/Torr
Gas Correction Factor Range
0.01 to 9.99
Degas
E-Beam type, 600 V at 10 mA, enabled only when pressure is below
1.0E-05 Torr. Pressure indications displayed during degas. Automatic
shutoff after approximately 25 minutes, or manual shutoff.
Analog Output
❑
❑
❑
❑
❑
❑
Error Detection
❑
❑
❑
❑
Gauge Connector
❑ Collector: SMB coax
❑ Fil and Grid:AMP 5 pos Univ Mate-N-Lok
Range: 0-10 VDC
Slope: 1 V per decade log
Characteristic: output voltage = Log (Pressure) + 11
Output when gauge OFF or Error = 10V
Load Impedance: >10 kOhms
Response Time:
❑ SLOW - 250 msec
❑ FAST - 10 msec
Open Filament
Shorted Grid
Over Temperature
Over Pressure (1mT or 10mT dependant on tube type selected)
A-3
DRAFT 11/4/09
Item
XGS-600 Gauge Controller
Table A-2
HFIG Gauge Specifications
DRAFT 11/4/09
Item
Description
Remote I/O
❑ Connector: 6 pin IEEE 1394 (Firewire type)
❑ Inputs for Emission on/off and DEGAS on/off are user selectable to
be either Active LO or Active HI. Driving the input to the active
state turns on that function.
❑ HI = +5 V max, 2.4 V min
❑ LO = 0.8 V max, 0 V min
❑ Filament Select input: Pin 1 open or driven HI selects Fil1.
Pin 1 grounded selects Fil2.
❑ Status Output goes HI during error condition
❑ Analog Output
Allowable Cable Length
❑ up to 50’ using Varian standard cable
❑ up to 300’ using under 10’ Varian standard cable + Varian extension cable
Convection Gauge Board
The Convection card operates two Thermocouple/Convection gauges and allows you to
calibrate:
❑ To the actual atmospheric pressure value,
❑ To vacuum pressure,
❑ and select calibration for air or argon.
Calibration is Varian's Smart Cal that determines whether a CAL command is for vacuum or
atmosphere. Remote control of calibration and analog output is standard. Each channel has
its own 9-pin Dsub connector.
E
Table A-3
Convection Board Specifications
Item
Description
Supported Gauge Heads
Varian Model, 536, 531, and ConvecTorr
Displayed Measurement Range
1.0E-4 Torr to 1000 Torr
Gas Types
Air, Argon or Helium (see “Helium Measurement Capability” on
page 3-14)
Atmosphere Value Range
500 to 1000 Torr
A-4
XGS-600 Gauge Controller
Table A-3
Convection Board Specifications
Item
Description
Analog Output
❑
❑
❑
❑
❑
❑
Error Detection
Open cable/sensor
Gauge Connector
Dsub9
Remote I/O Connector
6 pin Firewire type
Grounding the input pin activates that function
The Status Output goes hi during an error.
Note: the analog outputs for CNV1 and CNV2 are also available
at pin 7 of their respective Dsub connectors.
Allowable Cable Length
❑ Air/Argon - up to 300 ' using Varian TC or Convectorr cable
❑ Helium - up to 150' using Varian TC or Convectorr cable
IMG Board
The IMG board operates Varian IMG-100 and IMG-300 gauges and allows you to set gauge
sensitivity value, and gas correction factor. The UHV range is standard, as is remote I/O
control of emission and 0 to 10 V analog output.
Table A-4
IMG Board Specifications
Item
Description
Supported Gauge Heads
Varian IMG-100, IMG-300
Measurement Range*
1.0E-12 to 1.0E-02 Torr * (or equiv mbar and Pa)
* This represents the ability of the controller to display pressure values and
not the capability of the gauge heads to accurately measure pressure.
Sensitivity Input Range
00.1 to 99.9
Gas Correction Factor Range
0.1 to 9.9
A-5
DRAFT 11/4/09
Range: 0-10 VDC
Slope: 1 V per decade log
Characteristic: output voltage = Log (Pressure) + 5
Output when gauge OFF or Error = 10 V
Load Impedance: >10 kOhms
Response Time:
❑ SLOW - 250 msec
❑ FAST - 10 msec
XGS-600 Gauge Controller
Table A-4
IMG Board Specifications (Continued)
DRAFT 11/4/09
Item
Description
Analog Output
❑
❑
❑
❑
❑
❑
Error Detection
Over Temperature
Gauge Connector
SHV
Remote I/O Connector
❑ Connector: 6 pin IEEE 1394 (Firewire type)
❑ Input for Emission on/off is user selectable to be either Active LO or
Active HI. Driving the input to the active state will turn on the gauge.
❑ HI = +5 V max, 2.4 V min
❑ LO = 0.8 V max, 0 V min
❑ Status Output goes HI during error condition
❑ Analog Output
Allowable Cable Length
up to 300’ using RG59U
Range: 0-10 VDC
Slope: 1 V per decade log
Characteristic: output voltage = Log (Pressure) + 11
Output when gauge OFF or Error = 10 V
Load Impedance: >10 kOhms
Response Time:
❑ SLOW - 250 msec
❑ FAST - 10 msec
I/O Pin Assignments
Table A-5 through Table A-9 give the I/O pin assignments for the various boards and
connectors.
Table A-5
A-6
IMG Board I/O Pin Assignments
Function
Pin # (J26)
EMIS ON
6
ANALOG OUT
5
STATUS OUT
4
GND
2 + Shield
-
1
-
3
XGS-600 Gauge Controller
Table A-6
HFIG Board I/O Pin Assignments
Function
Pin # (J26)
EMIS ON
6
ANALOG OUT
5
STATUS OUT
4
GND
2 + Shield
FIL 2 SELECT INPUT
1
DEGAS ON INPUT
3
Convection Board I/O Pin Assignments
Function
Pin # (J1)
TC1 ANALOG OUT
5
TC2 ANALOG OUT
3
EXT TC1 CAL IN
1
EXT TC2 CAL IN
6
STATUS OUT
4
GND
2 + Shield
Table A-8
DRAFT 11/4/09
Table A-7
Set-Point Connector Pin Assignments
Function
Pin #
GND
1
SET POINT 1 OUTPUT
2
SET POINT 2 OUTPUT
3
SET POINT 3 OUTPUT
4
SET POINT 4 OUTPUT
5
SET POINT 5 OUTPUT
6
SET POINT 6 OUTPUT
7
SET POINT 7 OUTPUT
8
SET POINT 8 OUTPUT
9
A-7
XGS-600 Gauge Controller
DRAFT 11/4/09
Table A-9
A-8
Serial Connector Pin Assignments
Function
Pin #
+RS485 XFD (DIFF INPUT/OUTPUT)
1
TXD OUTPUT RS232
2
RXD INPUT RS232
3
NOT USED
4
GND
5
NOT USED
6
NOT USED
7
RTS OUTPUT RS232
8
-RS485 XFD (DIFF INPUT/OUTPUT)
9
XGS-600 Gauge Controller
XGS-600 vs MultiGauge and SenTorr Backwards Compatibility
Detail
XGS-600 replaces both MultiGauge and SenTorr rack mount controllers. While the
XGS-600 was designed to be substantially backwards compatible, there are some design
features that prevent the new product from being 100% backwards compatible.
Backwards Compatible Features
There are three board options, they are:
❑ Hot Filament Ion Gauge Board (HFIG)
❑ Inverted Magnetron Board (IMG)
The Hot Filament board replaces both the UHV and BA MultiGauge boards and implements
the SenTorr BA and UHV models. You select the type of sensor being employed and
software takes care of the settings. The ion gauge cable connectors are identical to the
older products.
The Inverted Magnetron board employs the same SHV connector as MultiGauge and
operates both of the IMG100 and the IMG300 (UHV-IMG) as does the current MultiGauge
board.
The Two Channel Convection board has the same gauge cable connectors as the current
MultiGauge Convection card, and the SenTorr xxTC and xx2C models. MultiGauge uses
the Dsub connector for the analog output, as well as for the sensor connections, and this is
supported in XGS-600.
The RS232 serial communications connector and protocol is supported in XGS-600, as
well. However, the RS485 connection is now housed in the same Dsub-9 connector as for
the RS232, and is not backwards compatible with the MultiGauge and SenTorr Mini-DIN
connectors.
Non-Backwards Compatible Features
The significant changes with the XGS-600 vs MultiGauge and SenTorr are the following:
❑ XGS-600 does not have a 4 channel TC card (MG)
❑ The analog outputs are housed in a firewire type connector (as mentioned above, the
two channel Convection board has its analog outputs in the Dsub's as well)
❑ Remote I/O signals are also housed in the same fire-wire connector. There is no I/O
board option as in MultiGauge
❑ The standard non-isolated open-collector set-point outputs are housed in a
9-position Dsub connector. All eight NO outputs share a single ground connected
common pin. MultiGauge and SenTorr provide true isolated relay outputs with
A-9
DRAFT 11/4/09
❑ Two channel Convection Board (CONV)
XGS-600 Gauge Controller
access to C, NC and NO contacts. SenTorr uses terminal block connectors while
MultiGauge uses a 25-position Dsub.
❑ XGS-600 is not available in a Black Box version with a remote mountable display.
Table A-10 list the features compatible for the MultiGauge and SenTorr units.
Table A-10
DRAFT 11/4/09
Feature
XGS-600
Feature Compatibility Table
MultiGauge
SenTorr BA or UHV
SenTorr CC
Hot Filament Gauges All
All
All
n/a
Cold Cathode
Gauges
IMG100
IMG300
(UHV-IMG)
IMG100
UHV-IMG
525CCG
n/a
525CCG
Convection Gauges
2 ch Convection
Bd using (2)
Dsub9
4 ch TC Bd using
DsuB37
2 ch ConvecTorr
using (2) Dsub9
2 ch ConvecTorr
using (2) Dsub9
2 ch ConvecTorr Bd
using (2) Dsub9
2 ch TC
2 ch TC
CDG’s
Not supported
(2) Dual Ch CDG
Bds
n/a
n/a
Rem I/O
Uses Fire-wire
conn on each
board
Needs optional
Remote I/O Bd using
Dsub37
Micro phone jack for
IG control
Micro phone jack for
IG control
Emission/degas
control inputs can
be user selected
to be active LO
(default) or active
HI. CNV CAL
inputs are active
LO. Logic levels
are std TTL logic,
+5V max input.
Uses opto-isolated
active HI inputs
32V max
Uses opto-isolated
active HI inputs
32V max
Uses opto-isolated
active HI inputs
32V max
In Fire-wire conn
of each Bd
Micro phone jack on
each Bd
Micro phone jack
Micro phone jack
Conv Bd also
provides access
pin in Dsub9
2ch and 4ch Conv
bds provide access
in Dsub conn
Std 8 setpoints, 2
per ch using open
collector drivers
in Dsub9
Optional 8 setpoints
using relays using
Dsub25, access to
C,NO,NC contacts
Optional 4 setpoints
using relays using
term block type
conn, access to
C,NO,NC contacts
Optional 4 setpoints
using relays using
term block type
conn, access to
C,NO,NC contacts
Analog Output
Set Points
A-10
XGS-600 Gauge Controller
Feature
Feature Compatibility Table (Continued)
XGS-600
MultiGauge
SenTorr BA or UHV
SenTorr CC
RS232
Std Dsub9 IBM
pinout,
supports MG
protocol
Opt Dsub9, IBM
pinout
Opt Dsub9, IBM
pinout
Opt Dsub9, IBM
pinout
RS485
Std in Dsub9,
supports MG
protocol
Opt with choice of
daisy chain using
MiniDIN or Dsub9
Opt with choice of
daisy chain using
MiniDIN or Dsub9
Opt with choice of
daisy chain using
MiniDIN or Dsub9
BCD (RS232)
Supports older
MG Px.x serial
protocol
applications
Px.x EPROMs
N/A
N/A
Black Box and
Remote Display
option
No
No
Yes
Yes
Table A-11 list the cable compatibility for the MultiGauge and SenTorr units.
Table A-11
Cable
Cable Compatibility Table
XGS-600
MultiGauge
SenTorr BA or UHV
SenTorr CC
UHV Bakeable L6440
Yes
Yes
Yes
N/A
UHV non-bakeable L6441
Yes
Yes
Yes
N/A
Glass BA L6455
Yes
Yes
Yes
N/A
Ion Gauge Extension L6456
Yes
Yes
Yes
N/A
525 CCG L5671*
No
Yes
n/a
Yes
IMG R0341, R0311
Yes
Yes
n/a
No
MBA R1172
Yes
Yes
Yes
n/a
Quad/Dual TC L6475*
No
Yes
No
No
Single TC L9131
Yes
Yes
Yes
Yes
Single Conv L9122
Yes
Yes
Yes
Yes
CDG L9153
No
Yes
No
No
* Adapters are available
A-11
DRAFT 11/4/09
Table A-10
XGS-600 Gauge Controller
This page intentionally left blank.
XGS-600 Gauge Controller
Appendix B. ASCII Serial Commands
Response to serial command inquiries approximately 10 ms, response time defined as time
between receipt of last query character to transmission of first response character. Serial
queries more frequent than 10 per second will compromise system responsiveness.
Command Syntax and Definitions
The command format is:
# {XGS-600 address} {command number} {optional data} {carriage return}
The response format is:
> {optional data} {carriage return}
Command
Description
#
Notes
All commands to the XGS-600 must begin with the character #.
aa
RS485 Address
=00 for RS232 (system default). Max allowable: 20hex
01
Command
Number
Each command is identified by a unique command number, 2 hex
digits, 01-FF.
Sensor Code
=U, signifies User Label is to follow.
User Labels
As found on Sensor Setup screen.
c
Examples:
#00B0UION4UGATE3.2E-03 sets AUTO-ON for ion gauge ION4
using CNV gauge GATE.
n
#0030UGATE1 turns on emissions of sensor User Label Gate1.
#0055UTOP26.00 sets sensitivity for ion gauge with User Label
Top.
Note: If User Label is not defined by user, default User Label is
Sensor ID.
Note: Alternatively, cn can be used to designate a short code instead of User Label, backward
compatible to Multi-Gauge/SenTorr protocol; see separate instructions below (Table B-1 on page B-2)
h
Hex Digit
Used to identify setpoint number or to list status of 8 bits.
B-1
DRAFT 11/4/09
The following characters are used in Table B-1:
XGS-600 Gauge Controller
Command
x
Description
Notes
Data Digit
Termination
All commands sent to the XGS-600 require < CR > termination.
< LF > is ignored so it is possible to use < CR/LF > with RS232 but
not with RS485 as it would cause a collision with the response.
Please note that time to response is extremely quick (10 to 20 ms)
so be ready! Responses are also terminated with < CR >.
< CR >
The XGS-600 sends ?FF as a response if the command or data is invalid, or if the command
length is incorrect. There is no response to a wrong address, or lack of termination
character.
DRAFT 11/4/09
Table B-1 Serial Command Set
Description
Read XGS contents
Response from
XGS-600
Command
#aa01
>hhhhhhhhhhhh
where hh sensor board
codes are:
10 = Hot Filament Ion
Gauge board (HFIG)
3A = Inverted
Magnetron board (IMG)
Notes
Lists two-character
codes identifying the 6
board slots in the
system, following board
installation sequence
from left to right (front
view).
40 = convection board
(CNV)
FE = Empty slot
Read pressure
#aa02cn
>x.xxxE-xx
Read
software revision
#aa05
>hhhh,hhhh . . .
where hhhh represents
revision hh.hh
System Reset
#aa06
>
Read Pressure Dump
#aa0F
>x.xxxE-xx,x.xxxE-xx, .
..
B-2
Revisions shown for
main board, then each
sensor board following
board installation
sequence from left to
right (front view).
All sensor readings in
one command.
Readings follow board
installation sequence
from left to right (front
view).
XGS-600 Gauge Controller
Description
Serial Command Set (Continued)
Response from
XGS-600
Command
Notes
Set pressure units to
Torr
#aa10
>
Set pressure units to
mBar
#aa11
>
Set pressure units to
Pascal
#aa12
>
Read pressure units
#aa13
>xx
where:
xx = 00 is Torr
xx = 01 is mBar
xx = 02 is Pascal
Assign User Label to
Sensor
#aa14cnLABEL
>
where c sensor code
=I for ion gauges HFIG
and IMG
=T for CNVs
n = Sensor Count
counting TCs or ion
gauges from left to right
from the front panel
view.
LABEL= user-defined
1-5 characters.
Label can be any 5 or
fewer characters
(AHZ, 0-9, or space),
except for IMGxx,
HFIGx and CNVxxx,
(where x is any
character) which are
reserved.
Read User Label of
Sensor
#aa15cn
>LABEL
where LABEL is
user-defined 1-5
characters.
If no User Label is
assigned, defaults to
system-assigned Sensor
ID.
Setup Lockout OFF
#aa20
>
Setup Lockout ON
#aa21
>
Read Setup Lockout
status
#aa22
>xx
where:
xx = 00 is OFF
xx = 01 is ON
Set Auto-On
#aaB0cn1cn2x.xE-xx
where cn1 is the Ion
Gauge and cn2 is the
TC.
>
B-3
DRAFT 11/4/09
Table B-1
XGS-600 Gauge Controller
Table B-1
Description
Serial Command Set (Continued)
Response from
XGS-600
Command
Read Auto-On
#aaB1cn
where cn is Ion Gauge.
Notes
>cnx.xExx
where cn is the TC.
DRAFT 11/4/09
Ion Gauge Commands (HFIG and IMG gauges)
Assign Tube Type to
Sensor
#aa16cnxx
>
where xx =
11 for IMG100 (default)
13 for IMG300
51 for MBA100
52 for MBA200
63 for 563
64 for 564
71 for 571
72 for 572
80 for UHV24 (default)
81 for UHV24p
Read Sensor Tube Type
#aa17cn
>xx where xx =
11 for IMG100 (default)
13 for IMG300
51 for MBA100
52 for MBA200
63 for 563
64 for 564
71 for 571
72 for 572
80 for UHV24 (default)
81 for UHV24p
Set Emission OFF
#aa30cn
>
Set Emission ON (Fil 1)
#aa31cn
>
Read Emission status
#aa32cn
>xx
where:
xx = 00 is OFF
xx = 01 is ON
Set Emission ON (Fil2)
#aa33cn
>
B-4
Also used for
single-filament gauges.
XGS-600 Gauge Controller
Table B-1
Description
Serial Command Set (Continued)
Response from
XGS-600
Command
Notes
#aa34cn
>xx
where:
xx = 01 is Filament 1
xx = 02 is Filament 2
Set Auto Fil Advance
Off
#aa35
>
Set Auto Fil Advance
On
#aa36
>
Read Auto Fil Advance
State
#aa37
>xx
where:
xx = 00 is OFF
xx = 01 is ON
Set degas OFF
#aa40cn
>
Set degas ON
#aa41cn
>
Read degas status
#aa42cn
>xx
where:
xx = 00 is OFF
xx = 01 is ON
Read ion gauge gas
correction
#aa50cn
>x.xxx
Set ion gauge gas
correction
#aa51cnx.xxx
>
Read Emission current
#aa52cn
>x.xxx
Least significant two
digits always zero.
Set Emission current
#aa53cnx.xxx
>
Least significant two
digits will be ignored.
Read Sensitivity
#aa54cn
>xx.xx
Always reads in Torr.
Least significant digit is
always zero.
DRAFT 11/4/09
Read Filament Lit
B-5
XGS-600 Gauge Controller
Table B-1
Description
Set Sensitivity
Serial Command Set (Continued)
Response from
XGS-600
Command
#aa55cnxx.xx
>
Notes
This sensitivity value
must always be in Torr
due to xx.xx format
restriction. Note
however the value
displayed on front
panel is in Torr,
mbar, or Pascal.
Least significant digit
will be ignored.
DRAFT 11/4/09
Note: Will overwrite
any factory setting.
Setpoint Commands
Read Setpoint States
#aa03
>00hh
where hh is a hex value
where each bit
represents
setpoints 1 - 8 and
value 0=Off, 1=On
Read assigned setpoints #aa04cn
>00hh
where hh is a hex value
where each bit
represents
setpoints 1 - 8 and
value 0=Not assigned,
1=Assigned
Set Setpoint
OFF/ON/Auto
>
B-6
#aa5Ehx
where h is setpoint
number 1-8 and x is
state:
0 = OFF (manual
override)
1 = ON (manual
override)
3 = Auto
(based on pressure)
Example: #005E83 sets
setpoint #8 to Auto.
Setpoint numbers
correspond to the
numbers on the
Setpoint screen.
XGS-600 Gauge Controller
Description
Serial Command Set (Continued)
Response from
XGS-600
Command
Notes
Read Setpoint
OFF/ON/Auto
#aa5Fh
where h is setpoint
number 1-8
>x
where x is state:
0 = OFF (manual
override)
1 = ON (manual
override)
3 = Auto (based on
pressure)
Set Setpoint On
pressure level
#aa6hcnx.xxxE-xx
where h is setpoint
number 1-8
>
Set Setpoint ON Delay
time
#aaChx.x
where h is setpoint
number 1-8 and x.x is
delay in seconds.
>
Setpoint must first be
assigned to a sensor
using setpoint screen or
command 6h.
C is part of the hex
command number.
Example: #00C31.2 sets
on delay to 1.2 seconds
for setpoint # 3
Set Setpoint Off
pressure
level
#aa7hcnx.xxxE-xx
where h is setpoint
number 1 - 8
>
Setpoint ON level must
be set before OFF level.
Set Setpoint Off Delay
time
#aaDhx.x
where h is setpoint
number 1-8 and x.x is
delay in seconds
>
Setpoint must be
assigned to a sensor.
Read Setpoint On
pressure level
#aa8h
where h is setpoint
number 1 - 8
>x.xxxE-xx
Read Setpoint ON
Delay time
#aaEh
where h is setpoint
number 1-8
>x.x
where x.x is delay in
seconds
Read Setpoint Off
pressure level
#aa9h
where h is setpoint
number 1 - 8
>x.xxxE-xx
B-7
DRAFT 11/4/09
Table B-1
XGS-600 Gauge Controller
Table B-1
Description
Read Setpoint Off
Delay time
Serial Command Set (Continued)
Response from
XGS-600
Command
#aaFh
where h is setpoint
number 1 - 8
Notes
>xx
where x.x is delay in
seconds
DRAFT 11/4/09
CNV Commands
Calibrate CNV
#aaA1cn
where cn is a CNV
>
This command has the
same function as CAL
on the main screen, i.e.
used for both
atmosphere and
vacuum calibrations.
Set Atmosphere Value
#aaA3x.xxxE+xx
where pressure is local
atmospheric value.
>
Same as System Setup
screen Atmosphere
Value.
Read CNV gas type
#aa4Ecn
>x
where:
x=0 for Nitrogen/Air
x=1 for Argon
Set CNV gas type
#aa4Fcnx
where:
x=0 for Nitrogen/Air
x=1 for Argon
>
NOTE
All alpha characters must be upper case.
Notes to owners of Multi-Gauge and SenTorr:
❑ Most commands used by Multi-Gauge and SenTorr are still found in this protocol.
❑ Commands which apply to Multi-Gauge/SenTorr but do not apply to the XGS are
ignored by the XGS-600. There is no response and no error message.
❑ Any commands (ex. # 56-59) referring to a gauge or sensor type that is not supported
by the XGS-600 result in ?FF error message.
B-8
XGS-600 Gauge Controller
Backward-compatible sensor code can still be used in XGS-600 as with Multi-Gauge/
SenTorr protocol:
Command
Entry
c
Description
Sensor Code
Notes
=T for TC/CNV
= I for ion gauge (HFIG or IMG)
Case sensitive.
n
Sensor Count
Counting TCs or ion gauges from left to right from the front
panel view.
Example: #0030I3 turns on the third ion gauge.
To see if communication has been established use a terminal emulator program like
ProComm or Windows 3.xx Terminal or Hyperterminal.
❑ Use the recommended pre-made cinch cable type MDC-6 Pxx w/mini-Din
connector.
Windows HyperTerminal Set-Up Instructions
1. Click Start.
2. Select Programs > Accessories > Communications > HyperTerminal.
3. Double-click Hypertrm.exe. The Connection Description dialog box appears.
4. Enter a name and choose an icon for the connection, for example: XGS-600 RS-232.
5. Click OK. The Connect To dialog box appears.
6. Select a COM port from the Connect Using: the pull-down list. The Com Properties/Port
Setting dialog box appears.
7. Configure the following settings:
❑ Bits per second (baud rate) – 9600 or 19200, whichever is set on XGS-600.
❑ Data bits: – 8
❑ Parity: – None
❑ Stop bits: – 1
❑ Flow Control: – None
8. Click OK.
9. Select Properties from the File menu. The Properties window appears.
10. Configure the following settings on the Connect To tab:
❑ Connect using – Verify the COM port is correct.
B-9
DRAFT 11/4/09
Using HyperTerminal
XGS-600 Gauge Controller
❑ Click Configure and verify the port settings are correct.
11. Ensure that the Settings tab is configured as follows:
❑ Terminal keys radio button selected.
❑ Ctrl+H radio button selected.
❑ Auto detect selected from the Emulation pull-down list.
❑ ANSI entered in the Telnet terminal ID.
❑ 500 set in the Background buffer lines field.
12. Click ASCII Set-Up. The ASCII Set-Up dialog box appears.
13. Ensure that the settings are as follows:
❑ Line delay – 0 milliseconds
❑ Character delay – 0 milliseconds
DRAFT 11/4/09
❑ ASCII Receiving – Wrap lines that exceed terminal width
The cursor begins blinking.
14. Type some simple commands and see if there is a response:
❑ #0001
❑ #0005
❑ #000F
B-10
XGS-600 Gauge Controller
Appendix C. BCD Serial Commands
The response time to serial command inquiries is approximately 10 msec and is defined as
the time between receiving the last query character to transmission of the first response
character. Serial queries occurring more frequently than 10 per second will compromise
system responsiveness.
C.1 Command Format
❑ The data format consists of a start bit (logic 0), 8 data bits, and a stop bit (logic 1).
There is no parity bit.
by one or more bytes to indicate the gauge the command is operating (Card
Information Byte) and the desired pressure or parameter setting, if necessary.
❑ If an invalid command is received the XGS600 returns a one byte response of FFh.
❑ If a command is not completely received within approximately 5 seconds, the
XGS600 ignores the command in process and expect a fully new command.
❑ In all of the following, the suffix H indicates hexadecimal notation.
C.1.1 Card Information Byte
This byte tells the controller which gauge channel to act on for reading pressure or changing
status.
The card information byte consists of two nibbles. The first nibble is the board base address
and is determined by the slot in which the board is installed. The second nibble is a 0 for
HFIG and IMG boards and the Convectorr Gauge number (1,2,3…) for a Convection board.
Since the XGS-600 board installation rules are different than Multigauge, the base address is
not the same as the slot number. This allows maximum backwards compatibility with old
applications. The mapping of slots and addresses is shown in Table C-1 (in the following
instructions slot # refers to the XGS-600 physical slot):
Table C-1
Card Information Byte Mapping
XGS-600 Slot #
BCD base Address
1
2
2
3
3
4
4
5
C-1
DRAFT 11/4/09
❑ All commands are one byte commands that apply to the whole unit or are followed
XGS-600 Gauge Controller
Table C-1 Card Information Byte Mapping (Continued)
XGS-600 Slot #
BCD base Address
5
1
6
6
This means that if a Multigauge had a UHV card installed in MG slot # 3, the HFIG card
would have to be installed in XGS600 slot #2 for its BCD address to also be 3.
C.1.2 Emulation of MG 4 Channel TC CARD
DRAFT 11/4/09
Since XGS-600 does not have a 4-channel TC card, backwards compatibility requires some
way to emulate the 4-channel card. This is accomplished by installing two convection cards
in physically adjacent slots. Doing this allows the second card to be addressed as the third
and fourth channels of the first card and causes the Read Contents command to report the
two cards as a 4-channel TC card installed in the lower numbered slot.
Example1: Convection cards are installed in slot #'s 5 and 6.
a. Read Contents command reports 40h for slot #5 (BCD addr 1).
b. The card installed in slot 5 is addressed as BCD addrs 11 + 12. The card in slot 6
is addressed as BCD addrs 13 and 14.
Example 2: Convection cards are installed in slots 5 and 1.
a. The Read Contents command reports the cards as 48H at BCD addresses 1 and 2.
b. The card installed in slot #5 is addressed as 11 + 12. The card in slot #1 is
addressed as 21 and 22. This maintains compatibility with MG using two
convector cards.
C.1.3 Pressure Information
Pressure information is transmitted in the format of x.xxxExx and requires three bytes. The
first two are the mantissa and the third is the exponent in two's complement notation.
For example:
7.600 E+2 --- {76h} {00h} {02h}
2.145E-7 --- {21h} {45h} {F9h}
OFF
---- {00h} {00h} {00h}
Error codes are transmitted in MG/Sentorr format.
For example:
NO FIL1 is reported as E05
C-2
---- {0Eh} {00h} {05h}
XGS-600 Gauge Controller
P>MAX is reported as E09
---- {0Eh} {00h} {09h}
Parameter information consists of two bytes, where Sensitivity is xx.xx and emission current
and gas correction are x.xxx.
For example:
Sensitivity = 20.00 --- {20h} {00h}
emission current = 3.500ma - {35h} {00h}
C.1.4 Reading All Pressure Channels
You can read all installed gauge channels with a single query command. The number of
returned bytes is three times the number of installed gauges. The gauges are read in the
order of the BCD base address. No separators are sent between bytes.
To maintain compatibility with Multigauge, which only had 5 slots, this command outputs
the ID of cards that are installed in addresses 1-5 only, even if a card is installed in BCD
address 6.
The Multigauge's Porting capability is not supported by the XGS600
C-3
DRAFT 11/4/09
C.1.5 Read MultiGauge Contents Command
XGS-600 Gauge Controller
C.2 Command List
Table C-1 lists all of the Multigauge BCD commands supported by the XGS600. The
XGS600 does not support all old commands.
Table C-2
Command
BCD Command List
Byte # and Syntax
Byte 1 - {card #1-ID}
Read Card Contents
(1 byte)
Byte 1- {01h}
Response
10h = HFIG card set for UHV24 or
UHV24p
Byte 2 - {card #1-ID}
20h = HFIG card set to 564, MBA100,
MBA200
Byte 3 - {card #1-ID}
(5 bytes)
where:
30h = HFIG card set to 572,571,563
DRAFT 11/4/09
Byte # - Response
3Ah= IMG card
40h = emulated 4ch TC card
48h = Convection card
Byte 4 - {card #1-ID}
Byte 5 - {card #1-ID}
FFh = empty slot
Read Pressure
(2 bytes)
Response
(3 bytes)
Byte 1- {02h)
Byte 1 - {mantissa digits 1,2}
Byte 2- {card info byte}
while ---- appears, the response is 3 bytes
of {00h}
Byte 2 - {mantissa digits 3,4}
Byte 3 - {exponent}
Read SW Revision
Byte 1- {05h}
Byte 1 - {0xh}
(1 byte)
Byte 2- {0yh)
Response
where the revision is Px.y
(2 bytes)
Reset to Default
Byte 1- {06h}
(1 byte)
Read Pressure Units
Byte 1- {13h}
(1byte)
Response
(1 byte)
where:
00h = Torr
01h = mBar
02h = Pa
C-4
Byte 1 - {xxh}
XGS-600 Gauge Controller
Table C-2
Command
BCD Command List (Continued)
Byte # and Syntax
Emission OFF
Byte 1- {30h}
(2 byte)
Byte 2- {card info byte}
Emission ON
Byte 1- {31h}
(2 bytes)
Byte 2- {card info byte}
Emission ON Fil2
Byte 1- {33h}
(2 bytes)
Byte 2- {card info byte}
Read Emission Status
Byte 1- {32h}
(2 bytes)
Byte 2- {card info byte}
Response
where
Byte 1 - {xxh}
00h = OFF
DRAFT 11/4/09
(1 byte)
Byte # - Response
01h = ON
02h = ON Fil2
Degas OFF
Byte 1- {40h}
(2 bytes)
Byte 2- {card info byte}
Degas ON
Byte 1- {41h}
(2 bytes)
Byte 2- {card info byte}
Read Degas Status
Byte 1- {42h}
(2 bytes)
Byte 2- {card info byte}
Byte 1 - {xxh}
Response
(1 byte)
where
00h = OFF
01h = ON
Read Emission Curr
Byte 1- {52h}
(2 bytes)
Byte 2- {card info byte}
Byte 1 - mantissa digits 1,2}
Byte 2- {mantissa digits 3,4}
Response
(2 bytes)
Set Emission Curr
Byte 1- {53h}
(4 bytes)
Byte 2- {card info byte}
Byte 3- {mantissa digits 1,2}
Byte 4- {mantissa digits 3,4}
C-5
XGS-600 Gauge Controller
Table C-2
Command
BCD Command List (Continued)
Byte # and Syntax
Read Sensitivity
Byte 1- {54h}
(2 bytes)
Byte 2 - {card info byte}
Byte # - Response
Byte 1- {mantissa digits 1,2}
Byte 2- {mantissa digits 3,4}
Response
(2 bytes)
Set Sensitivity
Byte 1- {55h}
(4 bytes)
Byte 2- {card info byte}
Byte 3- {mantissa digits 1,2}
DRAFT 11/4/09
Byte 4 - {mantissa digits 3,4}
Set TC/Conv to ATM
Byte 1- {A1h}
(2 bytes)
Byte 2 - {card info byte}
Set TC/Conv to VAC
Byte 1 - {A2h}
(2 bytes)
Byte 2 - {card info byte}
Read Pressure All
Byte 1 - {0Fh}
(1 byte)
Byte 1- {mantissa digits 1,2}
Byte 2- {mantissa digits 3,4}
Byte 3- {exponent} ..{ } { } { }
Response
(3 bytes times the
number of gauges)
C-6
Runs from the lowest #
address gauge to the
highest# addr gauge
XGS-600 Gauge Controller
Appendix D. Gas Correction Factor Table
Table D-2 on page D-2 lists relative gauge gas correction factors for various gases. The table
is reproduced for convenience only.
WARNING
The XGS-6000 used with any ion or convection gauge is NOT
considered intrinsically safe, and should not be used with potentially
flammable or explosive gas mixtures.
To automatically convert readings of the XGS-600 Controller, normally calibrated for
nitrogen, to read pressures of the other gasses:
1. Use Sensor Setup to access the GAS CORRECTION function.
2. Enter the correction constant from the table.
The XGS600 multiplies the initial pressure reading by the gas correction constant and
displays the correct adjusted value. The default for Gas Correction is 1.
The correction for different gas species is purely arithmetic. The sensitivity of the tube is
affected by different gases which, in turn, are responsible for the tube output being
manipulated by the pressure equation. There is some loss in resolution of the instrument
when gas correction constants are used. The loss in resolution becomes more apparent as
the correction constants approach 0.5 from either direction.
When the correction constants are 0.1 or 10, the tube output is 1/10 or 10 times normal.
This causes the instrument to lose the high vacuum decade or the near atmosphere decade,
respectively.
D-1
DRAFT 11/4/09
The values are derived by empirical methods substantiated by measurements reported in
literature. This table was compiled and published by Robert L. Summers of Lewis Research
Center, NASA Technical Note TND-5285, National Aeronautics and Space Administration,
Washington, DC, June 1969.
XGS-600 Gauge Controller
DRAFT 11/4/09
Table D-1
D-2
Gas Correction Factor Table
Gas Type
Gas Correction
Factor
Air/Nitrogen
1.00
Acetone
0.28
Argon
0.77
Carbon Dioxide
0.71
Carbon Monoxide
0.95
Chlorine
1.47
Deuterium
2.86
Ethanol
0.28
Ethylene
0.43
Helium
5.56
Hydrogen
2.17
Krypton
0.53
Methane
0.71
Methanol
0.56
Neon
0.30
Nitrous Oxide
0.67
Oxygen
1.00
Water
0.91
Xenon
0.34
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vacuum
DRAFT 11/4/09
XGS-600 Gauge Controller
This page intentionally left blank.
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