MGC-3200 - Kurt J. Lesker Company

Vacuum Gauge Controller
MGC-3200
User Manual
Kurt J. Lesker Company
1925 Rt. 51
Jefferson Hills, PA 15025
USA
Phone: +1-412-387-9200
Fax: +1-412-384-2745
E-mail: gauging@lesker.com
www.lesker.com
p/n 002256-105
Instruction Manual
Important User Information
MGC-3200
There are operational characteristic differences between solid state equipment and
electromechanical equipment. Because of these differences, and because there are a variety of uses for solid state equipment, all persons
that apply this equipment must take every precaution and satisfy themselves that the intended application of this equipment is safe and
used in an acceptable manner.
In no event will Kurt J. Lesker Company (KJLC) be responsible or liable for indirect or consequential damages that result from the use or
application of this equipment.
Any examples or diagrams included in this manual are provided solely for illustrative purposes. Because of the many variables and
requirements imposed on any particular installation, KJLC cannot assume responsibility or liability for any actual use based on the examples
and diagrams.
No patent liability is assumed by KJLC with respect to use of information circuits, equipment, or software described in this manual.
Throughout this manual we use notes, notices and apply internationally recognized symbols and safety messages to make you aware of
safety considerations.
Identifies information about practices or circumstances that can cause electrical or physical hazards which, if precautions are not taken,
could result in death or serious injury, property damage, or economic loss.
CAUTION
CccWARNING
Identifies information about practices or circumstances that can cause electrical or physical hazards which, if precautions are not taken,
could result in minor or moderate injury, property damage, or economic loss.
WARNING
NOTICE
Identifies information that is critical for successful application and understanding of the product.
SHOCK HAZARD
CccWARNING
Labels may be located on or inside the device to alert people that dangerous voltages may be present.
WARNING
Kurt J. Lesker Company
Page 1
Instruction Manual
MGC-3200
Printed in the United States of America
Granville-Phillips®, Convectron® and Mini- Convectron® are registered trademarks of MKS Instruments, Andover, MA.
Conflat® is a registered trademark of Varian, Inc. / Agilent Technologies, Lexington, MA.
Teflon® is a registered trademark of E. I. du Pont de Nemours and Company, Wilmington, DE.
Kurt J. Lesker Company
Page 2
Instruction Manual
MGC-3200
Table of Contents
1
2
3
Introduction / General Information ................................................................................................................... 6
1.1
Description ................................................................................................................................................. 6
1.2
Specifications ............................................................................................................................................. 8
1.3
Dimensions ................................................................................................................................................ 9
1.4
Part Numbers ........................................................................................................................................... 10
Important Safety Information .......................................................................................................................... 11
2.1
Safety Precautions - General ................................................................................................................... 11
2.2
Safety Precautions - Service and operation ............................................................................................. 12
2.3
Electrical Conditions ................................................................................................................................ 13
2.3.1
Proper Equipment Grounding.......................................................................................................... 13
2.3.2
Electrical Interface and Control ....................................................................................................... 13
2.4
Overpressure and use with hazardous gases .......................................................................................... 13
2.5
Gases other than Nitrogen / air ............................................................................................................... 14
Installation ........................................................................................................................................................ 15
3.1
Mechanical Installation - Controller ........................................................................................................ 15
3.1.1
Panel Mount .................................................................................................................................... 15
3.1.2
Rack Mount ...................................................................................................................................... 16
3.1.3
Mechanical Installation - Ionization Gauge ..................................................................................... 17
3.1.4
Mechanical Installation - Convection Gauge ................................................................................... 18
3.2
Electrical Installation................................................................................................................................ 19
3.2.1
Grounding ........................................................................................................................................ 19
3.2.2
Installation ....................................................................................................................................... 19
3.2.3
Connecting the KJLC351 - connector labeled IG .............................................................................. 20
3.2.4
Connecting the KJL275 - connectors labeled CG1 and CG2 ............................................................. 20
3.2.5
Power Connection............................................................................................................................ 21
3.2.6
Relay Connection ............................................................................................................................. 21
3.2.7
Analog Output Connection .............................................................................................................. 21
3.2.8
Analog Input Connection (Capacitance Diaphragm Gauges, etc.) ................................................... 22
Kurt J. Lesker Company
Page 3
Instruction Manual
4
5
6
MGC-3200
3.2.9
Digital I/O Connection...................................................................................................................... 23
3.2.10
RS232 / RS485 Serial Communications Connection ........................................................................ 24
Operation - IG and CG ...................................................................................................................................... 26
4.1
Emission Current ...................................................................................................................................... 26
4.2
Degas........................................................................................................................................................ 26
4.3
IG Filament Material Selection / Venting the Chamber .......................................................................... 27
4.4
IG Overpressure shut down ..................................................................................................................... 28
4.5
Convection Gauge Initial Setup................................................................................................................ 28
Setup and programming ................................................................................................................................... 29
5.1
Applying Power ........................................................................................................................................ 29
5.2
Front Panel Display .................................................................................................................................. 29
5.3
User Interface Basics................................................................................................................................ 30
5.4
Factory-Set Default Parameters .............................................................................................................. 31
5.5
Programming ........................................................................................................................................... 33
5.5.1
SETUP UNIT ...................................................................................................................................... 33
5.5.2
ION GAUGE ...................................................................................................................................... 35
5.5.3
CONVEC GAUGE ............................................................................................................................... 38
5.5.4
RELAYS ............................................................................................................................................. 39
5.5.5
Analog Output.................................................................................................................................. 40
5.5.6
SERIAL COMM .................................................................................................................................. 45
5.5.7
DISPLAY ............................................................................................................................................ 46
Analog Output Charts & Equations (Nitrogen/Air Only) .................................................................................. 48
6.1
Analog Output wide range measurement for IG - CG1 0.5 - 7V (Nitrogen / Air only) ............................ 48
6.2
Analog Output for IG LOG N - 10 (Nitrogen / Air only) ............................................................................ 49
6.3
Analog Output for IG LOG N - 11 (Nitrogen / Air only) ............................................................................ 50
6.4
Analog Output for IG LOG N - 12 (Nitrogen / Air only) ............................................................................ 51
6.5
Analog Output for IG 1.8 - 8.7V (Nitrogen / Air only) ............................................................................. 52
6.6
Analog Output for IG LINEAR (Nitrogen / Air only) ................................................................................. 53
6.7
Analog Output for CG1 or CG2 1 - 8 V (Nitrogen / Air only) ................................................................... 54
6.8
Analog Output for CG1 or CG2 0 - 7 V (Nitrogen / Air only) ................................................................... 55
Kurt J. Lesker Company
Page 4
Instruction Manual
7
MGC-3200
6.9
Analog Output for CG1 or CG2 NON - LIN (Nitrogen / Air only) .............................................................. 56
6.10
Analog Output for CG1 or CG2 LINEAR (Nitrogen / Air only)................................................................... 58
Using the Gauge with different gases .............................................................................................................. 59
7.1
Ion gauge display correction factors for selected gases .......................................................................... 59
7.2
Effects of different gases on convection gauge display........................................................................... 60
7.3
Effect of different gases on analog output .............................................................................................. 64
7.3.1
Ion gauge analog output correction factors for selected gases ...................................................... 64
7.3.2
IG - CG1 0.5 - 7V analog output correction factors for selected gases ........................................... 65
7.3.2.1 IG-CG1 0.5 - 7V analog output correction factors - Ion gauge range ………………………………………65
7.3.2.2 IG-CG1 0.5 - 7V analog output correction factors - Convection gauge range ………………………..66
7.3.3
Convection gauge analog output for selected gases ....................................................................... 67
7.3.3.1
7.3.3.2
7.3.3.3
8
9
CG1 1 - 8 V or CG2 1 - 8 V analog output correction factors - convection gauge …………………. 67
CG1 0 - 7V or CG2 0 - 7V analog output correction factors - convection gauge ……………………68
CG1 NON-LIN or CG2 NON-LIN analog output correction factors - convection gauge ……………..69
Serial Communications ..................................................................................................................................... 70
8.1
Device Specific Serial Communication Info ............................................................................................. 70
8.2
KJLC RS232/RS485 Command Protocol Summary ................................................................................... 71
8.3
KJLC RS232 and RS485 Command Protocol Summary ............................................................................. 72
8.4
RS232 GP 307 and 358 Protocol .............................................................................................................. 76
8.5
RS485 GP 307 and 358 Protocol .............................................................................................................. 78
Service .............................................................................................................................................................. 80
9.1
Calibration................................................................................................................................................ 80
9.2
Troubleshooting - Operation ................................................................................................................... 80
9.3
Troubleshooting - Error Messages ........................................................................................................... 81
9.4
Clearing Error Messages .......................................................................................................................... 81
9.5
Research Screen ....................................................................................................................................... 82
9.5.1
9.6
Research Screen (Diagnostic Display) .............................................................................................. 82
Maintenance ............................................................................................................................................ 84
10 Factory Service and Support............................................................................................................................. 85
11 Warranty........................................................................................................................................................... 85
Kurt J. Lesker Company
Page 5
Instruction Manual
1
MGC-3200
Introduction / General Information
1.1
Description
The MGC-3200 is a Kurt J. Lesker Company (KJLC) vacuum pressure measurement system which is comprised of
the following:




The MGC-3200 Vacuum Gauge Controller
One KJLC351 hot cathode ionization gauge module
One or two KJL275 convection enhanced pirani transducers1
Cables to interconnect the MGC-3200 and point-of-use devices
Typical components of the complete vacuum measurement system are shown in the figure below. The MGC-3200
provides power and operating control for either the KJLC351 ion gauge module. Additionally, it provides power
and operating control for two convection gauges.
KJLC351 Ionization Gauge Module
KJL275 Convection Gauges
(CG1 & CG2)
MGC-3200 Vacuum Gauge Controller
Typical Components of the complete Vacuum Pressure Measurement System
1
The MGC-3200 will also operate the Granville-Phillips® Convectron® convection enhanced pirani vacuum gauge transducer.
Kurt J. Lesker Company
Page 6
Instruction Manual
MGC-3200
When you choose the KJLC351 you will enjoy the benefits of KJLC’s novel design approach for this multiple
transducer vacuum pressure measurement system. Departing from the traditional vacuum gauge controller
approach of the past, the MGC-3200 provides a compact, low power, cost effective solution for controlling the
operation of one ionization gauge (IG) module and two convection enhanced pirani transducers (often referred to
as a Convection Gauge or CG). The traditional controller designs incorporate the IG power supplies and ion
current measurement circuitry inside a separate controller unit requiring connection to the IG transducer via
complex cabling systems. The MGC-3200 system, utilizing the design concept of integrating the power, control
and ion current measurement circuitry inside the KJLC351 device connected at the point of vacuum
measurement, minimizes overall complexity, cost and space requirements.
The MGC-3200, a controller unit capable of controlling multiple gauge transducers, is either rack or instrument
panel mountable. Optional industry standard 19-inch, 2U high rack-mount panels are available to mount the
MGC-3200 into rack enclosures.
NOTICE - For important information about the KJL275 convection gauge and KJLC351 hot cathode ionization gauge products,
please refer to the User Manual for each of these products. Read the User Manuals in their entirety for any device you
intend to connect to the MGC-3200 prior to connecting and using the external devices and cables that the MGC-3200 is
intended to be used with.
Kurt J. Lesker Company
Page 7
Instruction Manual
1.2
MGC-3200
Specifications
-9
-9
-7
measurement range:
(vacuum gauge dependent)
1 x 10 to 1,000 Torr / 1.30 x 10 to 1,333 mbar / 1.3 x 10 Pa to 133 kPa
-9
-2
1 x 10 to 5 x 10 Torr with KJLC351 hot cathode IG
-4
1 x 10 to 1,000 Torr with KJL275 convection gauge CG
display
pressure indication
set-up & programming screen
LED - 3 independent pressure display channels - 3 digit plus 2 digit exponent per channel
OLED - displays state of all setpoint relays, IG emission current, error messages for fault conditions
units of measure
Torr, mbar, Pa - user selectable
functionality
IG
CG
alternate gauge
powers & operates one KJLC351 ionization vacuum gauge module
powers & operates up to 2 KJL275 convection or Granville-Phillips® (GP) Convectron®
displays pressure from an alternate gauge such as a Capacitance Diaphragm Gauge - CDG or other
KJLC modules using the analog input (external power source for these alternate auxiliary devices will
be required).
IG sensor control
IG sensor on/off, degas on/off and emission current can all be controlled via front panel soft-keys,
remote input signals (digital I/O) or serial communications. IG sensor can also be automatically
turned on/off using measurements from one of the user selectable convection or alternate gauges.
remote input signals
(digital I/O)
IG sensor on/off, degas on/off and emission current can also be set by applying momentary
continuity to ground. Also the 9-pin D-sub remote input DIGITAL I/O connector provides pin-pin
compatible signals with the GP 358 controller as well as compatible signals with the GP 307.
setpoint relays
relay contact rating
six single-pole, double-throw (SPDT), user assignable to any of the gauges
5 A at 30 Vdc, 5 A at 250 Vac, resistive load
Caution! The relay contact rating above applies to units shipped after Nov 1, 2015. Serial numbers
15J711C and higher have this new contact rating. Older units shipped before Nov 1, 2015 with serial
numbers 15J710C and lower had a contact rating of 1 A at 30 Vdc resistive, or 1 A at 30 Vac noninductive. Applying a load to older units which draws more than 1 A could cause damage to relays.
three analog outputs, user assignable to any of the gauges
analog output
IG analog output
combination IG + CG analog output
CG analog output
log linear 0 to 10 Vdc, 1 V/decade, various scaling selections also provide output compatibility
with Granville-Phillips® controller models 307, 350 and 358 controllers, or
log Linear 1.7 V to 9.3 Vdc (nominal 1.8 to 8.7 Vdc) 0.8 V/decade, or
linear 0 to 10 Vdc (useable over 3 decades, also compatible with GP 307 controller)
log linear 0.5 to 7 Vdc, 0.5 V/decade
log linear 1 to 8 Vdc, 1 V/decade, or 0 to 7 Vdc, 1 V/decade (also compatible with GP 307, 350, 358),
or, Linear 0 to 10 Vdc (useable over 3 decades), or non-linear analog S-curve 0.375 to 5.659 Vdc
analog input
CDG
KJLC Modules
serial communications
one 0-10 Vdc analog input signal from a CDG when used as an alternate gauge to CG2, or
analog input from one of the following KJLC modules: 275i, 300, 354 and 392
RS485 / RS232 - ASCII protocol
(command protocol compatibility with GP 358 and GP 307 controller is also provided)
status output
IG sensor on/off status message is displayed on the front panel, by serial communications and by SPDT
relay (DIGITAL I/O Connector) rated at 1 A at 30 Vdc resistive, or 1 A at 30 Vac non-inductive.
IG degas on/off status or IG error conditions are displayed on the front panel, by serial
communications and by an open collector transistor output (ground emitter) rated at 40 V max. VCE,
50 mA IC max.
IG filament switching
user selectable between filament 1 or 2 using the front panel soft-keys
IG emission current
100 μA, 4 mA, or automatic switching (auto ranging) between 100 μA and 4 mA
IG degas
3 W, electron bombardment
IG overpressure protection
turns off ion gauge at a factory default setting of 5 x 10 Torr
Kurt J. Lesker Company
-2
Page 8
Instruction Manual
MGC-3200
o
o
temperature
operating; 0 to + 40 C
humidity
0 to 95% relative humidity, non-condensing
altitude
weight
operating; 8,200 ft. (2,500 m) max
1.7 lb. (0.7 kg)
housing
aluminum extrusion - black powder paint finish
input power
20 - 28 Vdc, 36 W protected against power reversal and transient over-voltages
connectors
gauge cable assemblies provided by KJLC
9-pin D-sub male
RS232; 9-pin D-sub female, RS485; 9-pin D-sub male
pluggable terminal block (mating connectors included)
CE compliance
EMC Directive 2014/30/EU, EN55011, EN61000-6-2, EN61000-6-4, EN61326-1, EN61010-1
environmental
RoHS Directive 2011/65/EU
IG & CG
digital I/O
serial communications
analog I/O, setpoint relays, power
1.3
storage; -40 to + 70 C
storage; 41,000 ft. (12,500 m) max
Dimensions
Front View
Side View
Kurt J. Lesker Company
Page 9
Instruction Manual
1.4
MGC-3200
Part Numbers
MGC-3200 Vacuum Gauge Controller
3 channel pressure display vacuum gauge controller. Includes 6 setpoint relays, 3 analog outputs, Digital I/O,
RS232/RS485 serial communications, one analog input from an alternate gauge.
Gauge Cable Length
10 ft. (3 m)
25 ft. (8 m)
50 ft. (15 m)
> 50 ft.
Optional 24 Vdc Power Supply for MGC-3200
Power Input:
100 - 240 Vac, 50-60 Hz
Power Output: 24 Vdc @ 2.5 A (60 W)
Connector:
2-pin pluggable terminal block
to mate with the MGC-3200
Compliance:
CE, RoHS, UL(US/Canada), CCC (China)
MGC-3200
KJLC351 ionization
gauge cable
KJL275 convection
gauge cable
BXC400-1-10F
BXC400-1-25F
BXC400-1-50F
Consult factory
CB421-1-10F
CB421-1-25F
CB421-1-50F
consult factory
With 110 AC cord included
KJLPS301UA
No AC power cord included
KJLPS301UX
Note - The conventional IEC60320 AC receptacle allows use with
any user supplied AC mains power cord set available worldwide
Optional Rack Mount Adapter Aluminum - black powder paint finish
Rack Mount adapter panel for installation of one MGC-3200 as a left-mount or right-mount in a 2U, 19 inch wide
rack.
000849
Rack Mount adapter panel for installation of two MGC-3200 side-by-side in a 2U, 19 inch wide rack.
001007
KJLC351 ionization gauge
KJL275 convection gauge
Kurt J. Lesker Company
See KJLC351 ionization gauge data sheet
See KJL275 convection gauge data sheet
Page 10
Instruction Manual
2
MGC-3200
Important Safety Information
KJLC has designed and tested this product to provide safe and reliable service, provided it is installed and
operated within the strict safety guidelines provided in this manual. Please read and follow all warnings and
instructions.
WARNING
WARNING
To avoid serious injury or death, follow the safety information in this document. Failure to comply with these
WARNING
safety procedures could result in serious bodily
harm, including death, and or property damage.
Failure to comply with these warnings violates the safety standards of installation and intended use of this
instrument. KJLC disclaims all liability for the customer’s failure to comply with these instructions.
Although every attempt has been made to consider most possible installations, KJLC cannot anticipate every
contingency that arises from various installations, operation, or maintenance of the module. If you have any
questions about the safe installation and use of this product, please contact KJLC.
This device meets FCC part 15 requirements for an unintentional radiator, class A.
2.1
Safety Precautions - General
Hazardous voltages are present with this product during normal operation. The product should never be
operated with the covers removed unless equivalent protection of the operator from accidental contact with
hazardous internal voltages is provided.
WARNING! There are no operator serviceable parts or adjustments inside the product enclosure; refer
servicing to service trained personnel.
Do not modify this product or substitute any parts without authorization of qualified KJLC service trained
personnel. Return the product to an KJLC qualified service and repair center to ensure that all safety features are
maintained. Do not use this product if unauthorized modifications have been made.
WARNING! Source power must be removed from the product prior to performing any servicing.
After servicing this product, ensure that all safety checks are made by a qualified service person. When
replacement parts are required, ensure that the parts are specified by KJLC. Substitutions of non-qualified parts
may result in fire, electric shock or other hazards. Use of unauthorized parts or modifications made to this
product will void the warranty.
To reduce the risk of fire or electric shock, do not expose this product to rain or moisture. These products are not
waterproof and careful attention must be paid to not spill any type of liquid onto these products. Do not use
these products if they have been damaged. Immediately contact KJLC to arrange return of the product if it is
damaged.
Kurt J. Lesker Company
Page 11
Instruction Manual
MGC-3200
Due to the possibility of corrosion when used in certain environmental conditions, it is possible that the product’s
safety could be compromised over time. It is important that the product be periodically inspected for sound
electrical connections and equipment grounding. Do not use if the equipment grounding or electrical insulation
has been compromised.
2.2
Safety Precautions - Service and operation
Ensure the enclosure of the MGC-3200 is connected directly to a good quality earth ground.
Ensure that the vacuum port on which the vacuum gauge sensors are mounted is electrically grounded.
Use a power source of 20 - 28 Vdc, 36 W or use KJLPS301UA or KJLPS301UX optional power supplies.
Turn off power to the unit before attempting to service the controller.
Turn off power to the unit if a cable or plug is damaged or the product is not operating normally according to this
instruction manual. Contact qualified KJLC service personnel for any service or troubleshooting condition that
may not be covered by this instruction manual.
It is important that the product be periodically inspected for sound electrical connections and equipment
grounding. Do not use if the equipment grounding or electrical insulation has been compromised.
Do not use if the unit has been dropped or the enclosure has been damaged. Contact KJLC for return
authorization and instructions for returning the product to KJLC for evaluation.
If measured pressure exceeds the thresholds that are defined under the following conditions, the KJLC351 ion
gauge filament will turn off:


The pressure exceeds 5.00 x 10-2 Torr at 100 μA emission current.
The pressure exceeds 1.00 x 10-3 Torr at 4 mA emission current.
During the Degas cycle, if the measured pressure exceeds 3.00 x 10-4 Torr, Degas will turn off but the filament will
remain turned on.
Ensure vacuum level is less than 5.00 x 10-5 Torr before attempting to initiate Degas of the KJLC351 ionization
gauge module.
Do not attempt to turn the IG on if the pressure is near the threshold limits defined here.
Kurt J. Lesker Company
Page 12
Instruction Manual
2.3
MGC-3200
Electrical Conditions
WARNING! When high voltage is present in any vacuum system, a life threatening electrical shock hazard
may exist unless all exposed electrical conductors are maintained at earth ground potential. This applies to all
products that come in contact with the gas contained in vacuum chambers. An electrical discharge within a
gaseous environment may couple dangerous high voltage directly to any ungrounded conductor of electricity.
A person could be seriously injured or killed by coming in contact with an exposed, ungrounded electrical
conductor at high voltage potential. This condition applies to all products that may come in contact with the gas
inside the vacuum chamber (vacuum/pressure containment vessel).
2.3.1 Proper Equipment Grounding
WARNING! Hazardous voltages that could seriously injure or cause death are present in many vacuum
processes. Verify that the vacuum connection ports on which the ion gauge and the convection gauges are
mounted are electrically grounded. Consult a qualified Electrician if you are in doubt about your equipment
grounding. Proper grounding of your equipment is essential for safety as well as intended operation of the
equipment. The vacuum gauge transducers and enclosure of any control module must be connected directly to a
good quality equipment earthing conductor. Use a ground lug on the vacuum connection flange of the pressure
measurement devices if necessary.
WARNING! In order to protect personnel from electric shock and bodily harm, shield all conductors which
are subject to potential high voltage electrical discharges in or around the vacuum system.
2.3.2 Electrical Interface and Control
It is the user’s responsibility to ensure that the electrical signals from this product and any connections made to
external devices, for example, relays and solenoids, are used in a safe manner. Always double check the system
set-up before using any signals to automate your process. Perform a hazardous operation analysis of your system
design and ensure safeguards and personnel safety measures are taken to prevent injury and property damage.
2.4
Overpressure and use with hazardous gases
WARNING! Install suitable protective devices that will limit the level of pressure inside your vacuum
chamber to less than what the vacuum chamber system components are capable of withstanding.
In cases where an equipment failure could cause a hazardous condition, always implement fail-safe system
operation. For example, use a pressure relief device in an automatic backfill operation where a malfunction could
result in high internal pressures if the pressure relief device was not installed on the chamber.
The vacuum gauge transducers used with this product are not intended for use at pressures above 20 psia (1000
torr); DO NOT exceed 35 psig (< 2 ½ bars) pressure inside the sensor. If your chamber goes to higher pressures,
you should install an isolation valve or pressure relief device to protect the gauge tube from overpressure
conditions. With some fittings, actual safe overpressure conditions may be lower; for example, a quick-connect,
O-ring compression fitting may forcibly release the gauge tube from the vacuum chamber fitting with only a few
psi over local uncorrected barometric (atmospheric) pressure.
Kurt J. Lesker Company
Page 13
Instruction Manual
MGC-3200
CAUTION! If the internal pressure of a vacuum gauge device is allowed to increase above local
uncorrected barometric pressure (atmospheric pressure side), vacuum fittings may release and possible
overpressure conditions may cause leaks that would allow the gas inside the gauge tube to release into the
atmosphere of the surrounding environment. Toxic, pyrophoric and flammable gases are examples of
hazardous gases that if allowed to leak out of the vacuum/pressure containment vessel into the atmospheric
environment, could cause bodily injury and possible damage to equipment. Never expose the gauge tube
internal volume to pressure above local atmospheric pressure when using hazardous gases.
2.5
Gases other than Nitrogen / air
WARNING! Do not attempt to use with gases other than nitrogen (N2) or air without referring to correction
factor data tables.
KJLC gauges and modules are calibrated for direct readout of nitrogen or air. Do not attempt to use with other
gases such as argon (Ar) or carbon dioxide (CO2) unless you have applied correction factors to both the displayed
pressure and the analog output to determine the true measured pressure. This is particularly critical when using
convection gauges to measure pressure of gases other than N2/Air.
WARNING! Do not use the KJLC351 in an explosive atmosphere or in the presence of flammable gases,
vapors or fumes. Do not use the KJLC351 to measure the pressure of explosive or combustible gases or gas
mixtures. The sensor filaments operate at incandescent temperatures and could become an ignition source.
This could cause an explosion which could result in serious injury or death.
WARNING! Do not use the KJL275 in an explosive atmosphere or in the presence of flammable gases, vapors
or fumes. Do not use the KJL275 to measure the pressure of explosive or combustible gases or gas mixtures. The
sensor wire in the gauge normally operates at 125 oC, but if malfunction should occur, the wire temperature could
exceed the ignition temperature of certain combustible gases and gas mixture. This could cause an explosion
which could result in serious injury or death.
Kurt J. Lesker Company
Page 14
Instruction Manual
3
3.1
MGC-3200
Installation
Mechanical Installation - Controller
The MGC-3200 is intended for indoor use only.
The MGC-3200 is offered as a space saving half rack design. It may also be used as a bench top device or easily
installed in an instrument panel. Optional EIA-standard rack mount panels are available for either full rack or
dual, side-by-side rack mount installation.
MGC-3200 Vacuum Gauge Controller Installation
3.1.1 Panel Mount
To install the MGC-3200 in a rack or instrument control panel follow the steps outlined below:
1. Make a cutout in your rack panel or instrument control panel as shown in the drawing below. Be sure to allow
clearance behind the panel for the instrument as well as connectors and cables at the back of the instrument.
Optional EIA-standard, 19-inch, 2U height rack mount panels are available from KJLC. The optional rack mount
panels are provided with panel cutouts and mounting holes to allow efficient mounting of your MGC-3200 unit.
Panel Cutout
Kurt J. Lesker Company
Page 15
Instruction Manual
MGC-3200
2. Drill four guide holes on each side of the panel cut out (two on each side) with dimensions as shown in the
panel cut-out drawing above.
3. Slide the MGC-3200 into the panel hole cut-out. Guide the four studs on the back of the MGC-3200 front
panel face plate thru the four holes next to the panel cut-out.
4. Use four # 10-32 Hex Nut (provided with instrument) to tighten the MGC-3200 to the panel.
3.1.2 Rack Mount
Optional EIA-standard 19-inch wide, 2U height rack mount panels available from KJLC:
Single cut-out panel (KJLC p/n 000849) - All dimensions in inches
Dual cut-out panel (KJLC p/n 001007) - All dimensions in inches
The single cut-out and dual cut-out rack mountable panels shown above are available from KJLC. Panel color
matches the front panel of MGC-3200 units. Screws for mounting to rack enclosure are included.
Kurt J. Lesker Company
Page 16
Instruction Manual
MGC-3200
3.1.3 Mechanical Installation - Ionization Gauge
NOTICE - For more detailed information about the KJLC351 hot cathode ionization gauge please refer to the User
Manual for this product.
KJLC351 Hot Cathode Ionization Gauge
Mount the ionization gauge as close as possible to the pressure you want to measure. Long or restricted, small
diameter tubing will create a pressure difference between your process chamber and the gauge. This may cause a
delay in response to pressure changes. Mounting the ionization gauge too close to a gas source inlet may also
cause measurement and control instability.
The ionization gauge can be mounted in any orientation, however, if possible, mount the gauge with port down to
help minimize the effect of any particles or condensation collecting in the gauge.
Do not mount the ionization gauge where it will be subjected to excessive vibration. Vibrations may cause
unstable readings, measurement errors and possible mechanical stress to components in the ionization gauge.
Shield the ionization gauge near ion or electron sources such as an electron beam or in a sputtering system.
For electrical safety purposes the housing of the gauge must be grounded to the vacuum chamber. When using
KF flanges, metal clamps must be used to ensure proper grounding. Do not attempt to modify your flange in
order to use non-metallic-type flange clamps.
Fittings/Flanges - follow the fitting/flange manufacturer's recommendations for installation and use.
Use all metal vacuum fittings with metal seals when operating pressures are expected to be below 1.00 x 10-7 Torr
(1.33 x 10-7 mbar, 1.33 x 10-5 Pa).
Kurt J. Lesker Company
Page 17
Instruction Manual
MGC-3200
3.1.4 Mechanical Installation - Convection Gauge
NOTICE - For more detailed information about the KJL275 convection gauge, please refer to the User Manual for
the KJL275.
Mount the 275 as close as possible to the pressure you want to measure. Long or restricted, small diameter
tubing will create a pressure difference between your process chamber and the gauge. This may cause a delay in
response to pressure changes.
Mounting the 275 too close to a gas source inlet may also cause measurement and control instability. Do not
mount the 275 near a source of heating or cooling, such as heaters or air conditioning vents.
Mount the 275 with its main axis horizontal (see diagram below). Pressure reading errors may occur above 1 Torr
if the unit is not mounted horizontally. Below 1 Torr, mounting position has little to no effect.
For Accurate Measurements Above 1 Torr, Mount the Gauge
Axis Horizontally as Shown Below
Correct Orientation
Incorrect Orientation
Mount the 275 with port down, if possible, to help minimize the effect of any particles or condensation from
collecting in the gauge.
Do not mount the 275 where it will be subjected to excessive vibration. Vibrations may cause unstable readings,
measurement errors and possible mechanical stress to components in the 275.
Flanges/ Fittings - follow the manufacturer's recommendations and note the following:
- NPT fittings: When connecting the device using a NPT fitting, apply a thread sealant compound or wrap the
threaded portion of the tubing with one-and-a-half to two wraps of pipe thread seal tape such as PTFE (Teflon®)
tape and hand tighten the gauge into the gauge port. Do not use a wrench or other tool which may damage the
gauge.
Kurt J. Lesker Company
Page 18
Instruction Manual
3.2
MGC-3200
Electrical Installation
3.2.1 Grounding
Be sure the vacuum gauges and the rest of your vacuum system are properly grounded to protect personnel
from shock and injury. Be aware that some vacuum fittings, especially those with O-rings when not used with
metal clamps, may not produce a good electrical connection between the gauge and the chamber it is connected
to. Use a ground lug on the vacuum connection flange of the pressure measurement device if necessary.
The MGC-3200 control unit should be connected to earth ground via a good quality equipment earthing
conductor. It is encouraged that you connect a separate 12-AWG earthing conductor between a known facility
earth ground connection and the location marked with the earth ground symbol (via the green colored screw
provided) on the back panel of the MGC-3200.
3.2.2
Installation
A good, recommended practice is to remove power from any cable prior to connecting or disconnecting it. The
electrical connections for the MGC-3200 are located on the back panel of the device as shown below.
3 Analog Outputs
Convection Gauges 1 & 2
1 Alternate Gauge Analog Input
Digital I/O
(remote input/output)
6 Setpoint Relays
Ionization Gauge
RS232 / RS485
Serial Comm.
Power
(20-28 Vdc)
Aux. Equipment
Earthing Ground
Kurt J. Lesker Company
Page 19
Instruction Manual
MGC-3200
3.2.3 Connecting the KJLC351 - connector labeled IG
Good, recommended practice is to remove power from any cable prior to connecting or disconnecting it. The
custom cable/connector assembly P/N BXC400-1-XXXF is a custom cable assembly provided in different lengths
from KJLC for connecting the MGC-3200 to the KJLC351 hot cathode ionization gauge module. The programming
parameters for the KJLC351 module are transmitted between the module and the MGC-3200 immediately during
initial Power ON condition. If a KJLC351 module is swapped or a cable from one module is moved and
reconnected to a different module, the MGC-3200 considers the first module connected at power ON to be the
device it is communicating with.
Changing cables from one device to another when power is applied to the module is not only bad electronics
handling procedure, it is not advised and, if done by the user of this equipment, may lead to erroneous
measurement results, a hazardous situation, equipment damage and possible operator injury.
CAUTION! It is always good industry practice to turn off power to the instrument before connecting or
disconnecting cables.
The DE-9 D-subminiature end of the KJLC cable assembly P/N BXC400-1-XXXF for connecting the KJLC351 ion
gauge module to the MGC-3200 should be connected to the KJLC351 module. The mini-DIN connector end of this
cable connects to the connector labeled IG on the back panel of the MGC-3200.
3.2.4 Connecting the KJL275 - connectors labeled CG1 and CG2
P/N CB421-1-XXXF is a custom cable assembly provided in different lengths from KJLC for connecting the
MGC-3200 to KJL275 or MKS Instruments / Granville-Phillips® Convectron® vacuum gauge sensor.
For your reference, the wiring chart for the KJL275 cable provided by KJLC is shown below. Connect the DE-9
D-subminiature connector to MGC-3200 and KJL275 connectors to CG1 or CG2. In addition to KJLC provided
standard cable assembly lengths, KJLC will provide custom length cable assemblies upon request.
MGC-3200 pin number
(9-Pin D Sub.)
1
2
3
4
5
6
7
8
9
Kurt J. Lesker Company
connects to

KJL275 gauge pin number
(KJLC molded, custom connector)
NC
cable shield
3
3
2
5
1
1
NC
Page 20
Instruction Manual
MGC-3200
3.2.5 Power Connection
The MGC-3200 requires an input power of 20 - 28 Vdc, 36 W to operate. One each 2-contact pluggable terminal
strip mating connector is provided for connection to the power contactors. Optional Power Supplies are also
available from KJLC (See the part number section 1.4 of this User Manual).
Power (contacts)
Contact Description
Analog Output Connectors
+
Power input (20-28 Vdc at 36 W)
Power Ground
3.2.6 Relay Connection
A total of six setpoint relays are provided by the MGC-3200. Two each 9-contact pluggable terminal strip mating
connectors are provided for easy connection to the relay contactors. The MGC-3200 back panel relay connectors
are marked RLY1 thru RLY6. Each relay has a contact labeled = (Normally Open), ≠ (Normally Closed) and I
(common).
RLY1 thru RLY6
Contact Description
Relay Connectors
(contacts)
=
Relay #1 to Relay #6 (NORMALY OPEN)
≠
Relay #1 to Relay #6 (NORMALLY CLOSED)
I
Relay #1 to Relay #6 (COMMON)
Caution! The relay contact rating of 5 A at 30 Vdc, 5 A at
250 Vac, resistive load applies to units shipped after Nov 1,
2015. Serial numbers 15J711C and higher have this new
contact rating. Older units shipped before Nov 1, 2015 with
serial numbers 15J710C and lower had a contact rating of 1 A
at 30 Vdc resistive, or 1 A at 30 Vac non-inductive. Applying a
load to older units which draws more than 1 A could cause
damage to relays.
3.2.7 Analog Output Connection
A total of three analog outputs are provided by the MGC-3200. These output voltage signals are proportional to
the displayed pressure for any of the user assigned vacuum gauges. Three each 2-contact pluggable terminal
strip mating connectors are provided for connection to the analog output contactors. The MGC-3200 back panel
analog output connectors are marked AO1, AO2 and AO3. Each connector has a contact labeled + (analog output
signal) and - (analog output ground).
AO1 , AO2, AO3
Contact Description
(contacts)
+
Analog Output #1 to #3 (Signal)
Analog Output Ground #1 to #3 (Signal Return)
Kurt J. Lesker Company
Analog Output Connectors
Page 21
Instruction Manual
MGC-3200
3.2.8 Analog Input Connection (Capacitance Diaphragm Gauges, etc.)
One analog input is provided by the MGC-3200 for using as an alternate gauge to CG2. This input can be accepted
from one capacitance diaphragm gauge or other KJLC vacuum module series 275i, 300, 354 or 392. One each 3contact mating pluggable terminal strip connector is provided for connection to the analog input contactor. The
MGC-3200 back panel analog input connector is marked A1. Each connector has a contact labeled + (analog
input signal) and - (analog input ground) and D (power detect).
A1
(contacts)
+
D
Contact Description
Analog Output Connectors
Analog Input (Signal)
Analog Input Ground (Signal Return)
Detect (power detect)
When using a capacitance manometer/diaphragm gauge or KJLC modules listed above as an ALTERNATE GAUGE
to CG2, the gauge must be connected to the MGC-3200 as shown below. The alternate gauge must be provided
power from an auxiliary power supply capable of providing the power required by the alternate gauge connected
to the MGC-3200. The D contact is used in this configuration to protect the IG from being turned on at high
pressure in case power to the alternate gauge is lost.
An Auxiliary Power Supply is required
for your Alternate Gauge, e.g., a CDG.
Ensure power is applied to your
Alternate Gauge before turning on the
power to MGC-3200.
Kurt J. Lesker Company
Page 22
Instruction Manual
MGC-3200
3.2.9 Digital I/O Connection
The IG can be controlled manually using the front panel soft-keys, via remote input signals using the digital I/O
connector or RS232/RS485 commands. The MGC-3200 can also be configured so that the IG sensor on/off is
controlled by using the pressure measurements from CG1, CG2 or the alternate gauge. If the user prefers digital
I/O as the means of controlling the IG, various control input and status output signals are available from the
9-pin D-sub male DIGITAL I/O connector. The DIGITAL I/O Connector also provides pin-pin compatible signals with
the GP 358 vacuum gauge controller as well as compatible signals with the GP 307.
The DIGITAL I/O Connector provides three different types of signals as listed below:
Signal Type A - Control Input Signals
The IG sensor on/off, degas on/off and emission current selection can be set by applying momentary continuity to
ground. This requires a momentary ground of less than 0.4 Vdc at 10 µA for 25 msec (minimum) be applied. After
this, the input must be allowed to float higher than 3.5 Vdc for 105 msec (minimum) before another low can be
applied.
Input signal: Apply momentary continuity to ground to turn IG sensor on or off
Apply momentary continuity to ground to turn degas on or off
Apply momentary continuity to ground to switch Emission Currents (100 μA or 4 mA)
Signal Type B - Status Output Signal
The IG on/off status relay is also available as both normally open and normally closed to indicate IG is on or off.
This is an output signal to other external instruments to confirm IG filament is on or off. The IG on/off status
relay is a single pole, double-throw (SPDT) relay rated at 1 A, 30 Vdc resistive or 1 A, 30 Vac non-inductive.
Signal Type C - Status output Signal
A degas status or an error condition output signal is also available from the DIGITAL I/O Connector. If
programmed for DEGAS STATUS, this can be used as an output signal to other external instruments to confirm
that degas is on or off. If programmed for an error condition, this can be used as an output signal to other
external instruments to confirm whether any error conditions exist.
Signal: Open collector transistor (ground emitter) rated at 40 V max. VCE, 50 mA IC max.
Transistor on = Degas on or error condition exists, Transistor off = Degas off or no error condition exists
DIGITAL I/O Connector
9-pin (DE-9P) D-subminiature DIGITAL I/0 Connections
Pin Number
1
2
3
4
5
6
7
8
9
Description
IG Sensor on/off
Ground
Emission Current
IG on/off Status relay common
IG on/off status relay - Normally Closed
Relay open = IG on
Degas on/off
Ground
Degas/error status, Low = degas on or error
IG on/off status relay - Normally open
Relay closed = IG on
Kurt J. Lesker Company
DE-9P D-subminiature Connector
Signal Type
A
Pin 9
A
B
B
A
C
B
Pin 1
Page 23
Instruction Manual
MGC-3200
3.2.10 RS232 / RS485 Serial Communications Connection
Either RS232 or RS485 serial communications may be used to send/receive commands to/from the MGC-3200.
There are two DE9 (D-subminiature, shell size E, 9 pole) connectors that allow independent cable connections to
the RS232 and RS485 serial communication ports.
1. RS485 with address, start and stop characters and command/response syntax derived from the KJLC 354
protocol.
2. RS232 with start and stop characters, but no addressing is used. The syntax is the same as the RS485
protocol.
3. RS232 protocol compatible with the Granville-Phillips Series 307 and 358 Controllers.
4. RS485protocol compatible with the Granville-Phillips Series 307 and 358 Controllers.
The RS232 serial port is configured to allow, for example, a 9-pin extension cable, male to female, wired “pin-topin” to be connected from the MGC-3200 to your serial port. DO NOT connect both of the RS232 and RS485
cables to the MGC-3200 at the same time. The MGC-3200 cannot provide both RS232 and RS485 serial
communications at the same time. Only one or the other as programmed by the user.
An extension cable wired pin-to-pin
may be used to connect the RS232
serial port on the MGC-3200
directly to your PC serial port (a
converter may be necessary).
DE-9 Connectors for connections to user
supplied cables for serial communication port –
DE9P (RS485), DE9S (RS232)
RS232 Connector
9-contact (DE-9S) D-subminiature RS232 Connections
Socket Number
1
2
3
4
5
6
7
8
9
DE-9S D-subminiature Connector
Description
No connection
Transmitted Data (OUT)
Received Data (IN)
No connection
Signal Ground
No connection
No connection
No connection
No connection
Pin 9
Pin1
Connect either RS232 or RS485 cable to MGC-3200 - DO NOT CONNECT BOTH AT THE SAME TIME
Kurt J. Lesker Company
Page 24
Instruction Manual
MGC-3200
RS485 Connector
9-pin (DE-9P) D-subminiature RS485 Connections
Pin Number
1
2
3
4
5
6
7
8
9
Description
DATA A (-)
DATA B (+)
No connection
No connection
No connection
Signal Ground
No connection
No connection
No connection
DE-9P D-subminiature Connector
Pin 9
Pin 1
Connect either RS232 or RS485 cable to MGC-3200 - DO NOT CONNECT BOTH AT THE SAME TIME
Kurt J. Lesker Company
Page 25
Instruction Manual
4
MGC-3200
Operation - IG and CG
4.1
Emission Current
4 mA and 100 µA (0.1 mA) are available settings of emission current for the hot cathode ion gauge used in the
KJLC351.
1) In clean applications and when operating at higher pressure ranges (5.00 x 10-6 Torr to 5.00 x 10-2 Torr) the
100 µA emission setting is preferred.
2) At lower operating pressures (1.00 x 10-9 Torr to 5.00 x 10-4 Torr) the 4 mA emission setting should be
used.
3) When using a diffusion pump or other pumps that use fluids, there is a possibility of the pump oil vapors
entering the IG transducer. These vapors may form an insulator on the internal components of the
transducer which can lead to instability or failure in controlling the emission. In this case, 4 mA emission
current may provide improved operating lifetime and measurement performance.
4) The emission current can also be set to automatically switch between 100 μA and 4 mA. This results in
optimal and stable pressure readings over the entire measurement range from low to high vacuum. For
example, if an application requires that pressure measurements be performed by the ion gauge from
pressures lower than 5.00 x 10-6 Torr up to 5.00 x 10-2 Torr, then the user may want to consider selecting
the auto switching feature of the emission current.
4.2
Degas
Degas is used to rid a hot cathode ion gauge sensor of adsorbed gas. Degas is achieved by applying Electron
Bombardment (EB) to the grid. The intervals at which degas should be applied vary for each application. The low
pressure measurement performance of the transducer will normally improve after each degassing cycle.

Degas can only be applied while the filament is turned on and operating.

Ensure that the vacuum pressure is at or less than 5.00 x 10-5 Torr before attempting to initiate degas.

Filament drive power during degas is about 3 watts higher than during normal pressure measurement.

Degas will automatically turn off after 2 minutes when using factory default settings. Degas can be
programmed for duration of 2 to 10 minutes.

The KJLC351 will continue to measure approximate pressure while degas is in progress.

Degas will automatically turn off if the pressure exceeds 3.00 x 10-4 Torr during the degas cycle.

Degas can be interrupted by turning the KJLC351 filament off.
Kurt J. Lesker Company
Page 26
Instruction Manual
4.3
MGC-3200
IG Filament Material Selection / Venting the Chamber
The choice of which filament to use in the KJLC351 is primarily dependent upon the process and process gases the
ion gauge will be used with. For general vacuum applications, dual yttria coated filaments are offered for use with
air and inert gases such as N2, argon, etc. Optional dual tungsten filaments are available for use with gases that
are not compatible with yttria coated iridium filaments.
1) Yttria coated iridium filament
In most general vacuum applications, the yttria coated iridium filament is the best choice.
Yttria coated iridium filaments typically operate at a lower temperature than tungsten filaments and thus have a
lower outgassing rate at UHV and lower chemical reactivity with active gases. Yttria coated iridium filaments
typically have a longer operating life than tungsten filaments in clean applications.
The yttria coated filament can survive occasional accidental start attempts at atmosphere in air, but the overall
life of the filament may be shortened during each occurrence. Good vacuum practice is to use a separate
pressure gauge such as the KJL275 convection gauge to know when to turn on the ion gauge filament.
2) Tungsten filament
Typically, a bare tungsten filament is a better choice in those applications where an yttria coated filament is
quickly damaged due to the gas type in use. For example, processes such as ion implantation may only use
tungsten filaments. Be aware that corrosive applications are hard on any filament and filament life will be
shortened while operating in such environments. Tungsten filaments are easily damaged by exposure to
air/oxygen during accidental system vents or if considerable quantities of water vapor are outgassed during
pump-down and bake-out. It is very important to make sure the tungsten filament is turned off before bringing
the chamber up to atmosphere, especially if air is being used to vent the chamber. The use of pure N2 gas is
highly recommended to vent or purge your vacuum chamber. Testing has shown that tungsten filaments can
withstand limited high pressure excursions when only N2 is present.
Venting with air or other gases containing oxygen can damage the tungsten filaments. If you try to turn on an ion
gauge with tungsten filaments while it is sitting on your desk exposed to room air, you will immediately damage
or destroy the filament beyond repair.
NOTICE
Do not use another gauge to automatically turn off the ion gauge when the ion gauge (IG)
filament in use is constructed of tungsten (yttria coated filament is ok). The response time of other gauges
may not allow for timely turn off of the tungsten filament leading to filament damage. Always turn off the
IG filament manually before pressure is allowed to rise above 1.00 x 10-3 Torr.
Note - Both types of filaments will suffer eventual damage if operated at high pressures. The type and amount of
damage at high pressure is dependent upon the length of operating time, the pressure and the gas present.
Kurt J. Lesker Company
Page 27
Instruction Manual
4.4
MGC-3200
IG Overpressure shut down
The KJLC351 ion gauge module is provided with factory set default values for overpressure shut down. The gauge
will shut off automatically should the pressure reach or rise above the pressure shut down values shown below:
Factory set KJLC351 overpressure shut down values
Emission Current
Overpressure Shut
Overpressure Shut
Overpressure Shut
Down (Torr)
Down (mbar)
Down (Pa)
4 mA
1.00 x 10-3
1.33 x 10-3
1.33 x 10-1
-2
-2
100 µA (0.1 mA)
5.00 x 10
6.66 x 10
6.66
4.5
Convection Gauge Initial Setup
Two of the most important steps for the initial setup of the convection gauges are to set zero (SET VAC) and set
atmosphere (SET ATM) as described in the CONVEC GAUGE section 5.5.3. This will ensure proper operation of
the gauge and accurate pressure measurements. The gauge is calibrated at the factory using nitrogen.
Furthermore, the gauge is also installed in a certain orientation when calibrated at the factory. Without setting
zero and atmosphere after the gauge is installed in your system, the gauge may not display the expected and
correct pressures. This could be caused by the fact that you may be using a different gas than Nitrogen such as air
to setup and calibrate the gauge (most commonly the case) and the gauge orientation is different than the
orientation used at the factory. As such, it is very important to perform your own initial setup and calibration by
setting zero and atmosphere with the gauge installed in your actual system. Please note the following:
Setting Zero (SET VAC)
Setting zero optimizes performance of the gauge when operating at a low pressure range of 1.00 x 10-4 Torr to
1.00 x 10-3 Torr. If your minimum operating pressure is higher than 1.00 x 10-3 Torr, it is not normally necessary to
set zero and thus setting atmosphere should be adequate. If you are able to evacuate your system to below
1.00 x 10-4 Torr, it is always a good practice to check and set zero if necessary. See “SET VAC CG1 or SET VAC CG2”
in CONVEC GAUGE section 5.5.3
Setting Atmosphere (SET ATM)
Setting atmosphere is the most important step for a newly installed gauge. If you prefer to use air to set
atmosphere, vent your vacuum system chamber to expose the gauge to the local atmospheric pressure (air) and
set atmosphere to match your known local uncorrected barometric pressure (air). This is the reading of ambient
air pressure you will expect if you were to vent and open your vacuum chamber to the atmosphere surrounding
the outside of your chamber. At sea level, this pressure is usually near 760 Torr. At elevations above sea level,
the pressure decreases. Check your local aviation authority or airport web sites or your current local weather
conditions online to help find your local uncorrected barometric pressure if you do not have this information. .
See “SET ATM CG1 or SET ATM CG2” CONVEC GAUGE section 5.5.3
Note - Setting zero and atmosphere is normally required only once during the initial setup and maybe checked by
the user periodically. After power has been applied to the gauge during the initial setup, allow five minutes for
the gauge to stabilize (warm-up) before setting zero and atmosphere.
The information presented in sections 4.1 through 4.5, above, is intended as an introduction to the programming
capabilities of the MGC-3200 for use in controlling the selectable parameters and functions of the KJLC351. Refer
to the User Manuals for KJLC351ion gauge module and KJL275 convection gauge sensor for complete operation
and setup instructions of these connected devices.
Kurt J. Lesker Company
Page 28
Instruction Manual
5
MGC-3200
Setup and programming
5.1
Applying Power
Before you turn on power to the MGC-3200 for the first time, ensure the cables from the MGC-3200 to the
KJLC351 and KJL275 convection gauges are connected and secured. Turn on power by pressing the Power key.
5.2
Front Panel Display
Display - Pressure Measurement
The MGC-3200 provides three independent front panel LED displays:
1) IG display represents pressure measurements from the KJLC351 ion gauge module.
2) CG1 display represents pressure measurements from the first convection gauge.
3) CG2/ALT display represents pressure measurements from the second convection or an alternate gauge.
Display - Units of Measure
A yellow LED is illuminated next to the selected engineering unit indicating measurements in Torr, mbar or Pa (the
pascals unit of measure is written as ‘Pa’ on the front panel; millibars unit is written as mbar).
Display - Setup Screen
The MGC-3200 provides an independent setup and programming OLED Setup Screen. This screen is used for set
up, programming and operation of the ion and convection vacuum gauges. Other useful information such as
relay status indicators, emission current and selected IG filament are also displayed in the Setup Screen.
OLED Setup
Screen
Pressure Measurement
Ionization Gauge
Exponent
Sign
Engineering
Units LED
IG sensor turn on/off
& Clear Error Messages
Degas On
Programming Keys
Kurt J. Lesker Company
Pressure Measurement
Convection Gauge 2
or Alternate Gauge
Pressure Measurement
Convection Gauge 1
Page 29
Instruction Manual
5.3
MGC-3200
User Interface Basics
The setup and programming of the MGC-3200 controller is done via the four programming-keys located below the
OLED setup screen on the left hand side of the MGC-3200 front panel. During programming of the MGC-3200, the
OLED display will identify what function each key represents.
To begin programming, press the MENU key. Press the UP and DOWN key to select the desired menu and change
the parameters. Press the ENTER key {this is the ← key with the arrow pointing to the left as viewed from the
front of the MGC-3200} to access the parameters and save the new settings. Press the MENU Key to return to the
previous menu or press repeatedly to return to the main screen. To continue setting additional parameters, scroll
with the UP { ↑ } and DOWN { ↓ } keys until you reach the desired parameter then press ENTER.
IG Emission
Current
MENU key
Selected IG
filament in use
Relay status indicators for relays 1 thru 6
Color filled circle = Relay energized
No color filled circle = Relay not energized
ENTER key
Scroll UP or DOWN with ↑ and ↓ keys
Note - The value of certain menu parameters must be programmed within an allowable range or limit. If the user
tries to program a value that is outside of the allowable range of a specific menu, the setup screen will
momentarily display the message “NO CHANGE”. In this case, the user needs to access the specific menu again,
and enter a correct value that is within the allowable range.
Note - Certain key entry sequences related to IG degas, emission current or switching of filaments may require a
time delay for the MGC-3200 to complete the desired task. This delay is caused by the communications time
needed between the MGC-3200 and the KJLC351 ion gauge module. For example if you press the IG DEGAS key
immediately after you have changed the IG emission current or switched filaments, you may see the message
“DISABLED”. In this case wait at least 20 seconds before initiating degas. In another example, if you try to switch
filaments immediately after degas has been performed, the MGC-3200 may be non-responsive. In this case wait
at least 40 seconds before switching filaments. All other key entry sequences that do not involve IG degas,
emission current or filament switching do not require a wait time.
Kurt J. Lesker Company
Page 30
Instruction Manual
5.4
MGC-3200
Factory-Set Default Parameters
The following is a summary of all factory-set default values in the MGC-3200 setup screen menu.
SETUP UNIT
- UNITS [Factory default = TORR]
- INFO [Factory default = FIRMWARE VERSION]
- SET CG2-ALT [Factory default = CG2]
- ALT GAUGE [Factory default = 10 TORR CDG]
- ALT GAUGE CAL [Factory default = Factory Set Number]
- I - O STATUS [Factory default =DEGAS STATUS]
- DEFAULTS [Factory default = PRESS ENTER TO SET OR MENU TO EXIT (not useable if IG sensor is on)]
ION GAUGE
- EMISS SELECT [Factory default = IE = 100UA]
- AUTO IE TRIP [Factory default = DISABLED]
- SELECT FIL [Factory default = FILAMENT 1]
- DEGAS TIME [Factory default = 2 MINUTES]
- SENSITIVITY [Factory default = 10.00]
- OVER PRES 100 [Factory default = 5.00E-02]
- IG TRIP PRESSURE [Factory default = 1.00E-03]
- IG CONTROL [Factory default = MANUAL MODE]
CONVEC GAUGE
- SET VAC CG1
- SET ATM CG1
- SET VAC CG2
- SET ATM CG2
[Factory default = 0.00E 00]
[Factory default = 7.60E 02 TORR]
[Factory default = 0.00E 00]
[Factory default = 7.60E 02 TORR]
RELAYS
- ASSIGN REL 1
- ASSIGN REL 2
- ASSIGN REL 3
- ASSIGN REL 4
- ASSIGN REL 5
- ASSIGN REL 6
- REL 1 LO TRIP
- REL 1 HI TRIP
- REL 2 LO TRIP
- REL 2 HI TRIP
- REL 3 LO TRIP
- REL 3 HI TRIP
- REL 4 LO TRIP
- REL 4 HI TRIP
- REL 5 LO TRIP
[Factory default =ION GAUGE]
[Factory default =CG1]
[Factory default =CG2]
[Factory default =ION GAUGE]
[Factory default =CG1]
[Factory default =CG2]
[Factory default = 1.00E-06]
[Factory default = 2.00E-06]
[Factory default = 1.00E-01]
[Factory default = 2.00E-01]
[Factory default = 1.00E-01]
[Factory default = 2.00E-01]
[Factory default = 1.00E-06]
[Factory default = 2.00E-06]
[Factory default = 1.00E-01]
Kurt J. Lesker Company
Page 31
Instruction Manual
MGC-3200
- REL 5 HI TRIP [Factory default = 2.00E-01]
- REL 6 LO TRIP [Factory default = 1.00E-01]
- REL 6 HI TRIP [Factory default = 2.00E-01]
- TEST RELAYS
ANALOG OUTPUT
- ANALOG OUT 1 [Factory default = IG - CG1 0.5 - 7V]
- ANALOG OUT 2 [Factory default = CG1 1 - 8 V ]
- ANALOG OUT 3 [Factory default = CG2 1 - 8 V ]
- AOUT CAL 1 [Factory default = Factory Set Number]
- AOUT CAL 2 [Factory default = Factory Set Number]
- AOUT CAL 3 [Factory default = Factory Set Number]
- AOUT LIN 1 [Factory default = 1.00E 00]
- AOUT LIN 2 [Factory default = 1.00E 00]
- AOUT LIN 3 [Factory default = 1.00E 00]
SERIAL COMM
- COMM TYPE [Factory default = RS485]
- BAUDRATE [Factory default = 19200 BAUD]
- FRAMING [Factory default = 8 BITS NONE 1]
- ADDRESS [Factory default = 01]
DISPLAY
- SCREEN SETUP [Factory default = NORMAL]
- SCREEN SAVER [Factory default = ON]
- BRIGHTNESS [Factory default = 0]
Kurt J. Lesker Company
Page 32
Instruction Manual
5.5
MGC-3200
Programming
This section provides detailed information on programming and configuration of various menus and submenus of
the device.
←This key, on the MGC-3200 front panel, is referred to as the ‘ENTER’ key throughout this manual.
From the main menu (press the MENU key if the main menu is not shown), scroll Up ↑ or Down ↓ to
SETUP UNIT then press the ENTER key to access the SETUP UNIT menu for configuring the MGC-3200 general
parameters such as the units of measure, selecting CG2 verses ALTERNATE GAUGE, etc. In certain instances,
during setup of the programmed functions and settings, you may need to press the ENTER key until you reach the
end of a program/setup sequence before pressing the MENU key to return to the main menu or previous setup
screen.
5.5.1 SETUP UNIT
- UNITS [Factory default = TORR]
This allows the user to display the pressure measurements in Torr, mbar or pascals. The user must program
all other programming values according to their requirements.
- INFO [Factory default = FIRMWARE VERSION]
Displays the MGC model or the type of ion gauge (IG) it operates and the firmware version numbers
associated with the Controller. Note that the model is either displayed as 3200 or MODULAR IG depending on
the age of the Controller. The newer units will display the model as MODULAR IG meaning it is a MGC-3200.
- SET CG2 - ALT [Factory default = CG2]
This allows the user to assign the type of gauge to the CG2/ALT display. The user can either assign a second
convection gauge CG2 (same type as CG1 using KJLC’s 275 convection gauge sensor) or an analog voltage
input signal from an alternate gauge. The ANALOG INPUT selection allows processing of one analog input
voltage signal from a capacitance diaphragm gauge (CDG) with a 0-10 Vdc output. Alternatively, the ANALOG
INPUT selection can allow processing of one analog input voltage signal from KJLC vacuum gauge modules
275i, 300, 354 or 392. Note that using a CDG or the KJLC vacuum gauge modules listed above requires the
user to provide an external power source to these devices.
- ALT GAUGE [Factory default = 10 TORR CDG]
Ignore this menu if you have selected CG2 in the SET CG2 - ALT menu above. If you have selected ANALOG
INPUT in the SET CG2 - ALT menu above, the ALT GAUGE menu selection is used to assign the type of
alternate gauge.

Select 10 TORR CDG for a 10 Torr full scale Capacitance Manometer / Diaphragm Gauge (CDG) with a 0-10
Vdc analog output.

Select 20 TORR CDG for a 20 Torr full scale CDG with 0-10 Vdc analog output. Other full scale selections
are 50 TORR CDG, 100 TORR CDG, 200 TORR CDG, 500 TORR CDG, 1000 TORR CDG, 10 mTORR CDG,
Kurt J. Lesker Company
Page 33
Instruction Manual
MGC-3200
20 mTORR CDG, 50 mTORR CDG, 100 mTORR CDG, 250 mTORR CDG, 500 mTORR CDG, 1 TORR CDG,
2 TORR CDG and 5 TORR CDG. Depending on the age of your MGC, not all the above CDG ranges may be
available in your product. Units shipped after January 2017 should have all CDG ranges listed above.

Select ITI LOG CG if you are using KJLC’s convection gauge modules such as the 275i or 300 with a
Log-linear analog output.

Select ITI LOG IG7V if you are using KJLC’s wide range combination gauge modules such as the 392 with a
Log-linear analog output. Units shipped after January 2017 should have this menu selection.

Select ITI LOG IG if you are using KJLC’s ionization gauge module 354 with a Log-linear analog output.

Select ITI NON-LINEA if you are using KJLC’s convection gauge modules such as the 275i or 300 with a
non-linear analog output.
- ALT GAUGE CAL [Factory default = Factory Set Number]
Ignore this menu if you have selected CG2 in the SET CG2 - ALT menu above. If you have selected ANALOG
INPUT in the SET CG2 - ALT menu above, the ALT GAUGE CAL menu selection is used to optimize the analog
input calibration. It is recommended that the user not make this adjustment unless the displayed alternate
gauge pressure (CG2/ALT display channel) do not closely match the expected pressure from the analog input
calculations.
Example - To perform ALT GAUGE CAL if ALT GAUGE menu is selected for a 1000 TORR CDG.
Connect both the CDG and a high resolution voltmeter to the + and - terminals of the MGC Analog Input
Connector labeled AI. With CDG exposed to atmosphere, measure the analog input from the CDG at the
MGC Analog Input Connector and calculate the corresponding pressure. In the ALT GAUGE CAL screen use
the UP or DOWN keys to adjust the displayed pressure by the MGC to match the calculated pressure from the
CDG analog signal. For example, if the analog input signal from the CDG is at 7.600 volts representing 760
Torr for a 1000 TORR CDG, then adjust the ALT GAUGE CAL so that the MGC also displays 760 Torr. For other
CDG ranges always use CDG’s full scale pressure value to perform calibration. For example, if you are using a
100 TORR CDG, evacuate your system pressure to 100 Torr and use the same calibration procedure described
above.
When using the KJLC module 392 as alternate gauges to CG2, use a similar procedure as described for the
1000 TORR CDG above.
Example - To perform ALT GAUGE CAL if ALT GAUGE menu is selected for ITI LOG CG, ITI LOG IG or
ITI NON-LINE. When using other KJLC vacuum gauge modules such as the 275i, 300 or 354 as alternate
gauges to CG2, the analog output signals from these devices can be used to display pressure in the CG2/ALT
display channel. Connect the analog output from these devices to the + and - terminals of the MGC Analog
Input Connector labeled AI. In the ALT GAUGE CAL screen use the UP or DOWN keys to adjust the displayed
pressure by the MGC to match the pressure reading on the display of these devices.
Note - As you adjust the analog output, the number being displayed in the ALT GAUGE CAL screen represents
the millivolts offset from zero volts that is being used internally for the analog input gain adjustment.
Kurt J. Lesker Company
Page 34
Instruction Manual
MGC-3200
- I - O STATUS [Factory default =DEGAS STATUS]
A degas status or an error condition output signal is available from the DIGITAL I/O connector. If selected for
DEGAS STATUS, this can be used as an output signal to other external instruments to confirm that degas is on
or off. If selected for ERROR STATUS, this can be used as an output signal to other external instruments to
confirm whether there is an error condition.
- DEFAULTS [Factory default = PRESS ENTER TO SET OR MENU TO EXIT]
The system can be returned to the original factory settings by using the ENTER key to set factory defaults. You
must re-enter the actual sensor sensitivity value marked on the KJLC351 sensor.
If you reset all values to original factory default settings, you would need to repeat the initial setup procedure
for the convection gauges as described in section 4.5 and reprogram other parameters as required.
Note - The IG filament must be turned off first before setting factory defaults will be accepted by the
MGC-3200.
5.5.2 ION GAUGE
NOTICE Before you activate the ion gauge/filament, make sure you understand all instructions and information
provided in this manual and the User Manual for the KJLC351. Furthermore, you should ensure you have fully
configured the MGC-3200 control unit to your operational requirements before turning the filaments on. Prior
to turning on the ion gauge filament you should ensure the pressure is below the OVERPRESS 100 setting if the
emission current selection is set to 100 μA or below the 1.00 x 10-3 Torr if emission current selected is 4 mA.
CAUTION! Due to the risk of filament failure caused by inadvertent exposure to oxidizing gases or gas
mixtures, never use another gauge to automatically turn off the ion gauge when the ion gauge filament in use is
constructed of tungsten (yttria coated iridium filament is okay). The response time of other gauges may not
allow for timely turn off of the filament leading to filament damage especially for tungsten filaments. Always
turn the tungsten IG filament OFF manually before pressure is allowed to rise above 1.00E-03 Torr.
- EMISS SELECT [Factory default = IE = 100UA]
Use the Up and Down key to select emission current to 4 mA, 100 μA, or AUTO IE. Then press ENTER to save
setting. See section 4.1 for more details about the emission current selection.
- AUTO IE TRIP [Factory default = DISABLED]
The default setting is DISABLED if EMISSION SELECT menu above is set to 4 mA or 100 μA. If the EMISSION
SELECT menu is set to AUTO IE, then the AUTO IE TRIP value allows the user to select the pressure at which
automatic switching of the emission current takes place. The user has the choice of programming the AUTO
IE TRIP value anywhere between 1.00E-06 to 1.00E-04 Torr. For example, if the AUTO IE TRIP value is set to
1.00E-05 Torr, then the ion gauge will operate at the emission current of 100 μA over a pressure range of
5.00E-02 to 1.00E-05 Torr. The emission current will then automatically switch to 4 mA for the lower pressure
range of 1.00E-05 to 1.00E-09 Torr. The user has the choice of programming the AUTO IE TRIP value
anywhere between 1.00E-06 to 1.00E-04 Torr.
Kurt J. Lesker Company
Page 35
Instruction Manual
MGC-3200
- SELECT FIL [Factory default = FILAMENT 1]
Allows the user to select which filament to operate: either Filament 1 or Filament 2.
NOTICE It is highly recommended to periodically alternate operating filaments 1 and 2 if the filaments are the
coated iridium type. An inactive, coated filament not operated for an extended period of time can cause
failure of that filament to establish and maintain emission current. This will become more problematic in
applications where the filament coating may become poisoned by process gas byproducts or materials that
have outgassed from the process materials.
- DEGAS TIME [Factory default = 2 MINUTES]
The length of time, in minutes, degassing will run after it is initiated. The degas cycle can be selected from 2
to 10 minutes in duration.
- SENSITIVITY [Factory default = 10]
All KJLC ion gauge transducers (sensors) are marked with their unique, specific sensitivity value. The user
must program the actual transducer (sensor) sensitivity in this menu. The actual sensitivity value of the
KJLC351 sensor is marked on the sensor mounting plate below the electronic enclosure. The sensitivity value
is designated with the letter “S” and it is a number that normally ranges between 8 and 15. Ion gauge
pressure readings are calibrated for nitrogen. If you use a different species of gas or mixture of gases you will
be required to either make manual corrections to the pressure readout or compensate the reading. The
sensitivity adjustment function of the KJLC351 you are using to measure the pressure of a gas other than
nitrogen/air may be set to compensate the reading. Compensating the pressure reading using the sensitivity
adjustment method may not be possible for certain gases if the sensitivity correction factor results in a
calculated sensitivity outside the adjustment range.
CAUTION! The user assumes all risks if the KJLC351 SENSITIVITY is programmed to a value not matching
the actual transducer (sensor) sensitivity marked on the sensor mounting plate below the electronic
enclosure. Failure to ensure that the MGC-3200 is programmed for the actual sensitivity of the transducer it
is used with may result in pressure readings that are not true pressure. Equipment damage due to incorrect
pressure readings and improper system control functions as a result of incorrect pressure measurement
readings may result.
- OVER PRES 100 [Factory default = 5.00E-02]
This function allows the user to set the pressure at which the gauge will turn off when the emission current is
running at 100 μA.
The overpressure shut down values are adjustable when emission current selected is 100 μA. However, the
overpressure shut down value is factory set to 1.00E-03 Torr when emission current selected is 4 mA and
cannot be changed by the user.
- IG TRIP PRES [Factory default = 1.00E-03]
This setting allows the user to select a pressure value at which CG1 or CG2 or alternate gauge can turn the IG
filament on. This is applicable only when the gauge is operating at 100 μA emission current setting or in the
automatic emission current switching mode (EMISSION SELECT = AUTO IE) and the IG CONTROL mode below
is set to CG1, CG2 or ALT GAUGE.
Kurt J. Lesker Company
Page 36
Instruction Manual
MGC-3200
The IG TRIP PRES value can never be set higher than 5.00E-02 TORR when operating in the 100 μA emission
current setting. The user does not have the choice to select a turn on point for the IG when the 4 mA
emission current has been selected. The IG turn on and off is always set to 1.00E-03 Torr when the emission
current is set for 4 mA.
- IG CONTROL [Factory default = MANUAL MODE]
This function allows the user to choose the source of control for the IG. The IG can be controlled from the
Front Panel (MANUAL MODE), CG1, CG2 or the ALT GAUGE (alternate gauge).
Select MANUAL MODE if you wish to use the front panel programming keys to turn the ion gauge transducer
filament to the on or off state.
Select CG1, CG2 or ALT GAUGE if the pressure measurement from CG1 or CG2 or the Alternate Gauge is to be
used to automatically turn the ion gauge transducer filament on and off.
CAUTION! Never use another gauge to automatically turn off the ion gauge when the ion gauge filament in
use is constructed of tungsten material (a coated filament such as the yttria coated iridium version is okay).
The response time of other gauges may not allow for timely turn off of the tungsten filament leading to
possible filament damage. Always turn the IG filament OFF manually before pressure is allowed to rise
above 1.00E-03 Torr.
When CG1, CG2 or ALT GAUGE is selected in the IG CONTROL menu and the ion gauge emission current is set
to 100 μA, the ion gauge filament will turn on when the pressure measured by CG1, CG2 or Alternate Gauge
drops below the value programmed in the IG TRIP PRES above. The ion gauge filament will turn off when the
pressure measured by CG1, CG2 or Alternate Gauge rises above the value programmed for the IG TRIP PRES.
If the ion gauge emission current is set to 4 mA, the ion gauge filament will turn on when the pressure
measured by CG1, CG2 or Alternate Gauge drops below 1.00E-03 Torr. The ion gauge filament will turn off
when the pressure measured by CG1, CG2 or Alternate Gauge rises above 1.00E-03 Torr.
Note - When CG1, CG2 or ALT GAUGE is selected in the IG CONTROL menu, the user cannot turn on or turn
off the IG filament manually using the IG ON/OFF soft-keys of the front panel, RS232, RS485 or DIGITAL I/O
signals. In this case the IG filament turn on or turn off is automatically controlled by CG1, CG2 or the
Alternate Gauge.
CAUTION! You must be aware of possible risks of inadvertently starting emission (turning the IG
filament to ON) when using an alternate gauge like a capacitance diaphragm gauge as a source of control
for turning the ion gauge on and off. Failure to follow the recommended procedures for ensuring that you
do not inadvertently allow the ion gauge transducer filament to turn on may result in equipment damage.
To minimize the risk associated with this using an alternate gauge to control the ion gauge transducer
filament, follow these recommended steps below precisely:
1) Before selecting ALTERNATE GAUGE in the SETUP UNIT menu, the user should turn off
power to the MGC-3200.
2) Connect the alternate gauge to the MGC-3200.
3) Apply power to the alternate gauge.
Kurt J. Lesker Company
Page 37
Instruction Manual
MGC-3200
4) Next apply power to the MGC-3200.
5) Select ALTERNATE GAUGE in the SETUP UNIT menu.
It is always good industry practice to avoid hot-swapping of Cables.
5.5.3 CONVEC GAUGE
NOTICE - It is important to set vacuum and atmosphere when initially setting up the convection gauges. See
Convection Gauge Initial Setup section 4.5
This programming menu allows the user to set the atmospheric pressure reading (also known as the “span”
adjustment) and vacuum reading (“zero” point) for convection gauges CG1 and CG2. KJLC advises that you first
determine if the ‘span’ (ATM) adjustment of your measurement device is set properly before setting the ‘zero’
(VAC) adjustment. It is good practice to perform the sequence of checking and adjusting ATM (span) then VAC
(zero) and then, finally re-checking the ATM setting to ensure that the circuitry is properly balanced for use in
measuring pressure throughout the intended measurement range. Press the ENTER key to access the CONVEC
GAUGE menu for configuring the convection gauges.
- SET VAC CG1 [Factory default = 0.00E 00]
Press the ENTER key to access the SET VAC CG1 screen.
1. To properly set the vacuum reading (“zero” point), with CG1 installed on your vacuum system, the gauge
should be evacuated to a pressure below 1.00E-04 Torr (0.1 mTorr). [Factory default = 0.00E+0 Torr]
2. When the known vacuum system pressure is below 0.1 mTorr and If you want to set zero at 0.00E+0, then
press the ENTER key repeatedly until the SET VAC CG1 appears on the display again. The zero point
(displayed pressure reading with gauge exposed to vacuum) is now set.
If you want to set the ‘zero’ pressure reading to a number higher than 0.00E+0, then press the UP or
DOWN keys at each of the high-lighted numeral locations until the desired number is reached; then press
the ENTER key repeatedly until the SET VAC CG1 appears on the display again. The new ‘zero point’ is
now set. Due to the nature of circuit operation and transducer electrical control that cover a wide range
of measurement by a convection gauge, it is advised that one first check and adjust, if necessary, the
‘span’ and ‘zero’ to ensure that all measurements made between these two, adjusted settings are as
accurate as possible.
- SET ATM CG1 [Factory default = 7.60E 02 TORR]
Press the ENTER key to access the SET ATM CG1 screen.
Backfill the vacuum vessel /chamber with nitrogen gas to a known pressure between 400 Torr and 1000 Torr.
Alternatively, if your local uncorrected barometric pressure (air) is known, simply vent your vacuum system
chamber to expose the gauge to the local atmospheric pressure. When desired system pressure is stable,
adjust the pressure on the screen to the known value using the UP or DOWN keys. Press the ENTER key to
move to the next digit and use the UP or DOWN keys to decrease or increase the value of that digit. Continue
pressing the ENTER key until the SET ATM CG1 reappears on the display. The new atmosphere point is now
Kurt J. Lesker Company
Page 38
Instruction Manual
MGC-3200
set. For example, if your known local uncorrected barometric pressure is 760 Torr, enter 760 in the SET ATM
screen. The main pressure measurement screen will now display 760 Torr while the gauge is at atmosphere.
- SET VAC CG2 [Factory default = PRESS ENTER TO SET VAC]
- SET ATM CG2 [Factory default = 7.60E 02 TORR]
5.5.4
Same as SET VAC CG1 above, except for CG2
Same as SET ATM CG1 above, except for CG2
RELAYS
Press the ENTER key to access the RELAYS menu for configuring the setpoint relays.
- ASSIGN REL 1 [Factory default =ION GAUGE]
This assigns Relay #1 to the ion gauge, CG1, CG2 or ALT GAUGE (alternate gauge).
- ASSIGN REL 2
- ASSIGN REL 3
- ASSIGN REL 4
- ASSIGN REL 5
- ASSIGN REL 6
[Factory default = CG1] (ASSIGN RELAY 2- 6; same choices as ASSIGN RELAY 1 above)
[Factory default = CG2]
[Factory default = ION GAUGE]
[Factory default = CG1]
[Factory default = CG2]
- REL 1 LO TRIP [Factory default = 1.00E-06]
This setpoint corresponds to the turn on point for Relay #1. Relay #1 will turn on when the pressure drops
below this setting. If you are unable to increase the value of REL 1 LO TRIP (MGC responding with the
message “NO CHANGE”), you must first access the REL 1 HI TRIP menu below and increase that value to a
number higher than the value of the REL 1 LO TRIP you are trying to set. Ensure the REL 1 LO TRIP setpoint
value you are programming is within the measurement range of the specific gauge the relay is assigned to.
- REL 1 HI TRIP [Factory default = 2.00E-06]
This setpoint corresponds to the turn off point for Relay #1. Relay #1 will turn off when the pressure rises
above this setting. If you are unable to decrease the value of REL 1 HI TRIP (MGC responding with the
message “NO CHANGE”), you must first access the REL 1 LO TRIP menu above and decrease that value to a
number lower than the value of the REL 1 HI TRIP you are trying to set. Ensure the REL 1 HI TRIP setpoint
value you are programming is within the measurement range of the specific gauge the relay is assigned to.
- REL 2 LO TRIP
- REL 2 HI TRIP
- REL 3 LO TRIP
- REL 3 HI TRIP
- REL 4 LO TRIP
- REL 4 HI TRIP
- REL 5 LO TRIP
- REL 5 HI TRIP
- REL 6 LO TRIP
- REL 6 HI TRIP
[Factory default = 1.00E-01] (RELAY 2-6 LO TRIP; same info as RELAY 1 LO TRIP above)
[Factory default = 2.00E-01] (RELAY 2-6 HI TRIP; same info as RELAY 1 HI TRIP above)
[Factory default = 1.00E-01]
[Factory default = 2.00E-01]
[Factory default = 1.00E-06]
[Factory default = 2.00E-06]
[Factory default = 1.00E-01]
[Factory default = 2.00E-01]
[Factory default = 1.00E-01]
[Factory default = 2.00E-01]
Kurt J. Lesker Company
Page 39
Instruction Manual
MGC-3200
- TEST RELAYS [Factory default = OFF]
This allows the user to manually toggle the relays on and off to test for correct external circuit wiring and
ensure polarity is as desired. Press ENTER to access the TEST RELAYS menu. Select a specific relay by
pressing the ENTER key so that the relay number is highlighted. Press the UP or DOWN key to energize the
specific relay.
Relays will return to the previous state after exiting the TEST RELAYS menu.
5.5.5 Analog Output
The MGC-3200 provides three analog outputs proportional to the pressure measured by the ionization gauge, the
selected convection gauge (CG1 or CG2) or a continuous, combined output signal from the IG and CG1 (IG - CG1)
for full range measurement. Press the ENTER key to access the ANALOG OUTPUT menu for configuring the analog
outputs.
- ANALOG OUT 1 [Factory default = IG - CG1]
This menu provides various scaling and gauge type selections for Analog Output #1. Use the UP and DOWN
keys to select the desired analog output configuration from the following available choices.
- IG - CG1 0.5 - 7V Log-linear analog output combining IG & CG1 as one signal
- IG LOG N - 10 Log-linear analog output for IG only, output also compatible with GP 307, 350
- IG LOG N - 11 Log-linear analog output for IG only, output also compatible with GP 307, 350, 358
- IG LOG N - 12 Log-linear analog output for IG only, output also compatible with GP 307, 350
- IG 1.8 - 8.7V Log-Linear analog output for IG only
- IG LINEAR
Linear analog output for IG only, output also compatible with GP 307
- ALT LINEAR
Linear analog output if alternate gauge is a CDG or the KJLC module 392
- ALT CG 1-8V
Log-linear analog output if alternate gauge connected is a KJLC 275i or 300
- ALT IG LOGN10 Log-linear analog output if alternate gauge connected is a KJLC 354
- CG1 1 - 8V
Log-linear analog output for CG1
- CG2 1 - 8V
Log-linear analog output for CG2
- CG1 0 - 7V
Log-linear analog output for CG1 , output also compatible with GP 307,350,358
- CG2 0 - 7V
Log-linear analog output for CG2 , output also compatible with GP 307,350,358
- CG1 NON - LIN Non-linear analog output for CG1
- CG2 NON - LIN Non-linear analog output for CG2
- CG1 LINEAR
Linear analog output for CG1
- CG2 LINEAR
Linear analog output for CG2
Select ‘IG - CG1 0.5 - 7V’ as the analog output type to set the analog output voltage proportional to the
pressure measured by the combination of IG plus CG1. This selection combines the analog output from the IG
and CG1 as one signal to provide a log-linear analog output voltage of 0.5 volts to 7 volts with a scaling factor
of 0.5 V/decade of measured pressure. The log-linear output signal and pressure are related by the following
formulas when Pressure Unit of measurement is in Torr and mbar: P = 10 (volts – 5.5) / (0.5) where P is the pressure
in Torr or mbar, and V is the output signal in volts. Refer to section 6.1 for details regarding this type of
output signal.
Kurt J. Lesker Company
Page 40
Instruction Manual
MGC-3200
Select ‘IG LOG N - 10’ as the analog output type to set the analog output voltage proportional to the pressure
measured by the ion gauge only. This selection provides an output voltage that is linear with respect to the
common logarithm of pressure, i.e., log-linear analog output of 0 to 9 volts with a scaling factor of 1 V/decade
of measured pressure. The log-linear output signal and pressure are related by the following formulas when
Pressure Unit of measurement is in Torr and mbar: P= 10(volts – 10) where P is the pressure in Torr or mbar, and
V is the output signal in volts. Refer to section 6.2 for details regarding this type of output signal. This
selection is also compatible with a certain IG analog output scaling from the Granville-Phillips 307 and 350
controllers.
Select ‘IG LOG N - 11’ as the analog output type to set the analog output voltage proportional to the pressure
measured by the ion gauge only. This selection provides an output voltage that is linear with respect to the
common logarithm of pressure, i.e., log-linear analog output of 0 to 10 volts with a scaling factor of 1
V/decade of measured pressure. The log-linear output signal and pressure are related by the following
formulas when Pressure Unit of measurement is in Torr and mbar: P= 10(volts – 11) where P is the pressure in
Torr or mbar, and V is the output signal in volts. Refer to section 6.3 for details regarding this type of output
signal. This selection is also compatible with a certain analog output scaling from the Granville-Phillips 307,
350 and 358 controllers.
Select ‘IG LOG N - 12’ as the analog output type to set the analog output voltage proportional to the pressure
measured by the ion gauge only. This selection provides an output voltage that is linear with respect to the
common logarithm of pressure, i.e., log-linear analog output of 0 to 11 volts with a scaling factor of 1
V/decade of measured pressure. The log-linear output signal and pressure are related by the following
formulas when Pressure Unit of measurement is in Torr and mbar: P= 10(volts – 12) where P is the pressure in
Torr or mbar, and V is the output signal in volts. Refer to section 6.4 for details regarding this type of output
signal. This selection is also compatible with a certain analog output scaling from the Granville-Phillips 307
and 350 controllers.
Select ‘IG 1.8 - 8.7V’ as the analog output type to set the analog output voltage proportional to the pressure
measured by the ion gauge only. This selection provides an output voltage that is linear with respect to the
common logarithm of pressure, i.e., log-linear analog output of 1.8 to 8.7 volts with a scaling factor of 0.8
V/decade of measured pressure. The log-linear output signal and pressure are related by the following
formulas when Pressure Unit of measurement is in Torr P= 10((1.25 ● volts) – 12.875)) where P is the pressure in Torr
and V is the output signal in volts. Refer to section 6.5 for details regarding this type of output signal.
Select ‘IG LINEAR’ as the analog output type to provide a 0-10 Vdc output signal that has a direct linear
relationship to the displayed pressure measured by the ion gauge only. This selection covers 3 decades of
pressure change. For example, if the maximum pressure selected is 1.00E-03 Torr (value programmed for
AOUT LIN 1 or AOUT LIN 2 or AOUT LIN 3 menu below), then the instrument provides a 10 volt analog output
signal when pressure is at 1.00E-03 Torr and the minimum pressure is automatically set to 1.00E-06 Torr, with
a corresponding minimum voltage output of 0.01 volts. If your application requires the IG analog output
voltage to cover a pressure range exceeding three decades, then consider using the log-linear analog outputs.
Refer to section 6.6 for details regarding this type of output signal. This selection is also compatible with a
certain analog output scaling from the Granville-Phillips 307 controller.
Select ‘ALT LINEAR’ only if you have selected ANALOG INPUT in the SET CG2 - ALT menu intended for use with
CDG device or the KJLC 392 as an alternate gauge to CG2. Essentially, this allows retransmission of the same
Kurt J. Lesker Company
Page 41
Instruction Manual
MGC-3200
analog input signal being received by the MGC. Use the analog output information from your CDG or 392 to
drive pressure from this analog output.
Select ‘ALT CG 1-8V’ only if you have selected ANALOG INPUT in the SET CG2 - ALT menu intended for use
with KJLC 275i or 300 convection vacuum gauge module as an alternate gauge to CG2. Essentially, this allows
retransmission of the same analog input signal being received from the 275i or 300. This selection provides
an output voltage that is linear with respect to the common logarithm of pressure, i.e., log-linear analog
output of 1 to 8 volts with a scaling factor of 1 V/decade of measured pressure. The log-linear output signal
and pressure are related by the following formulas when Pressure Unit of measurement is in Torr and mbar:
P= 10(volts – 5) where P is the pressure in Torr or mbar, and V is the output signal in volts.
Select ‘ALT IG LOGN10’ only if you have selected ANALOG INPUT in the SET CG2 - ALT menu intended for use
with the KJLC 354 ionization vacuum gauge module as an alternate gauge to CG2. Essentially, this allows
retransmission of the same analog input signal being received from the 354. This selection provides an output
voltage that is linear with respect to the common logarithm of pressure, i.e., log-linear analog output of 0 to 9
volts with a scaling factor of 1 V/decade of measured pressure. The log-linear output signal and pressure are
related by the following formulas when Pressure Unit of measurement is in Torr and mbar: P= 10(volts – 10)
where P is the pressure in Torr or mbar, and V is the output signal in volts.
Select ‘CG1 1 - 8V’ as the analog output type to set the analog output voltage proportional to the pressure
measured by convection gauge CG1. This selection provides an output voltage that is linear with respect to
the common logarithm of pressure, i.e., log-linear analog output of 1 to 8 volts with a scaling factor of
1 V/decade of measured pressure. The log-linear output signal and pressure are related by the following
formulas when Pressure Unit of measurement is in Torr and mbar: P= 10(volts – 5) where P is the pressure in Torr
or mbar, and V is the output signal in volts. Refer to section 6.7 for details regarding this type of output
signal.
Select ‘CG2 1 - 8V’ for CG2. Same as CG1 1 - 8V above, except for CG2.
Select ‘CG1 0 - 7V’ as the analog output type to set the analog output voltage proportional to the pressure
measured by convection gauge CG1. This selection provides an output voltage that is linear with respect to
the common logarithm of pressure, i.e., log-linear analog output of 0 to 7 volts with a scaling factor of
1 V/decade of measured pressure. The log-linear output signal and pressure are related by the following
formulas when Pressure Unit of measurement is in Torr and mbar: P= 10(volts – 4) where P is the pressure in Torr
or mbar, and V is the output signal in volts. Refer to section 6.8 for details regarding this type of output
signal. This selection is also compatible with a certain analog output scaling from the Granville-Phillips 307,
350 and 358 controllers.
Select ‘CG2 0 - 7V’ for CG2. Same as CG1 0 - 7V above, except for CG2.
Select ‘CG1 NON - LIN’ as the analog output type to set the analog output (non-linear) voltage proportional to
the pressure measured by convection gauge CG1. This produces a non-linear analog output signal of 0.375 to
5.659 Vdc for 0 to 1000 Torr of N2, roughly in the shape of an "S" curve. Refer to section 6.9 for details
regarding this type of output signal. Note - This non-linear analog output is also equivalent to the GranvillePhillips® Mini-Convectron® non-linear S-curve analog output.
Kurt J. Lesker Company
Page 42
Instruction Manual
MGC-3200
Select ‘CG2 NON - LIN’ for CG2. Same as CG1 NON - LIN above, except for CG2.
Select ‘CG1 LINEAR as the analog output type to provide a 0-10 Vdc output signal that has a direct linear
relationship to the displayed pressure measured by CG1 only. This selection covers 3 decades of pressure
change. For example, if the maximum pressure selected is 1.00 Torr (value programmed for AOUT LIN 1 or
AOUT LIN 2 or AOUT LIN 3 menu below), then the instrument provides a 10 volt analog output signal when
pressure is at 1.00 Torr and the minimum pressure is automatically set to 1 mTorr (1.00E-03 Torr), with a
corresponding minimum voltage output of 0.01 volts. If your application requires CG1 or the analog output
voltage to cover a pressure range exceeding three decades, then consider using the log-linear analog output
type. Refer to section 6.10 for details regarding this type of output signal.
Select ‘CG2 LINEAR’ for CG2. Same as CG1 LINEAR above, except for CG2.
- ANALOG OUT 2 [Factory default = CG1 1 - 8V]
- ANALOG OUT 3 [Factory default = CG2 1 - 8V]
(Same selection choices as ANALOG OUT 1 above)
(Same selection choices as ANALOG OUT 1 above)
- AOUT CAL 1 [Factory default = Factory Set]
This has been pre-set in the factory and is used to optimize the analog output calibration. It is recommended
that the user not make this adjustment unless the displayed pressure on the MGC-3200 and the resulting
pressure recorded from the analog output do not match closely.
To perform AOUT CAL 1 adjustment if ANALOG OUTPUT 1 is programmed for IG LOG, IG LINEAR or
ALT IG LOGN10. Connect the IG to the MGC-3200 and connect the MGC-3200 analog output 1 to a high
resolution voltmeter, your system, PLC, etc. Evacuate your vacuum system to a low enough pressure for the
IG to operate. Establish a system pressure so that the displayed IG reading is preferably at the high end of any
decade (for example 9.00E-05 as opposed to 1.00E-05). In the AOUT CAL 1 screen use the UP or DOWN keys
to adjust the analog output to match the corresponding pressure displayed on the IG pressure measurement
display or the CG2/ALT display channel if using a 354 ion gauge modules as an alternate gauge to CG2.
Example: ANALOG OUTPUT 1 is programmed for ‘IG LOG N - 10’. The MGC-3200 IG display is registering a
pressure reading of 9.00E-05 Torr. Based on the equation and table given in section 6.2 the expected analog
output at 9.00E-05 Torr is 5.9542 V. While in the AOUT CAL 1 screen, use the UP or DOWN keys to set the
analog output to 5.9542 V as recorded by your voltmeter. Alternatively, if the IG analog output is used to
display the IG pressure on your PLC or system display console, simply adjust the AOUT CAL 1 so that the IG
pressure displayed by your PLC (pressure established at the high end of any decade preferred) matches the IG
pressure displayed by the MGC-3200. Note - As you adjust the analog output, the number being displayed in
the AOUT CAL 1 screen represents the millivolts offset from zero volts that is being used internally for the
analog output gain adjustment.
To perform AOUT CAL 1 adjustment if ANALOG OUTPUT 1 is programmed for IG - CG1, CG1, CG2, CG1/CG2
NON-LIN, CG1/CG2 LINEAR, ALT CG 1-8V. Connect CG1 or CG2 to the MGC-3200 and connect the MGC-3200
analog output 1 to a high resolution voltmeter, your system, PLC, etc. While in the AOUT CAL 1 screen and
with CG1 or CG2 exposed to atmosphere, use the UP or DOWN keys to adjust the analog output to match the
corresponding pressure displayed on CG1 or CG2 pressure measurement display.
Kurt J. Lesker Company
Page 43
Instruction Manual
MGC-3200
Example: The MGC-3200 ANALOG OUTPUT 1 is programmed for ‘CG1 1 - 8V’. The MGC-3200 CG1 display is
registering a pressure reading of 7.60E+02 Torr. Based on the equation and table given in section 6.7 the
expected analog output at 7.60E+02 Torr is 7.881 V. Use the UP or DOWN keys in the AOUT CAL 1 screen to
set the analog output to 7.881 V as recorded by your voltmeter. Alternatively, if the CG1 analog output is
used to display the CG1 pressure on your PLC or system display console, simply adjust the AOUT CAL 1 while
the gauge is exposed to atmosphere so that the CG1 atmospheric pressure displayed by your PLC matches the
CG1 atmospheric pressure displayed by the MGC-3200. The AOUT CAL can be performed at any pressure
between 400 Torr to 999 Torr (atmosphere recommended). Note - As you adjust the analog output, the
number being displayed in the AOUT CAL 1 screen represents the millivolts offset from zero volts that is being
used internally for the analog output gain adjustment.
To perform AOUT CAL 1 adjustment if ANALOG OUTPUT 1 is programmed for ALT LINEAR:
Connect the CDG to the MGC and connect the MGC analog output 1 to a high resolution voltmeter, your
system, PLC, etc. While in the AOUT CAL 1 screen and with the 1000 TORR CDG exposed to atmosphere, use
the UP or DOWN keys to adjust the analog output to match the corresponding pressure displayed for the
alternate gauge (CG2/ALT display channel).
Example: The MGC ANALOG OUTPUT 1 is programmed for ‘ALT LINEAR’ and a 1000 TORR CDG is connected to
the MGC. The MGC CG2/ALT display channel is registering a pressure reading of 7.60E02 Torr. For a 1000
TORR CDG with a 0-10 VDC output, the expected analog output at 760 Torr is 7.60 volts. Use the UP or DOWN
keys in the AOUT CAL 1 screen to set the analog output to 7.60 V as recorded by your voltmeter.
Alternatively, if the alternate gauge analog output is used to display the pressure on your PLC or system
display console, simply adjust the AOUT CAL 1 while the gauge is exposed to atmosphere so that the alternate
gauge atmospheric pressure displayed by your PLC matches the atmospheric pressure displayed by the
CG2/ALT display channel of the MGC.
For other CDG ranges always use CDG’s full scale pressure value to perform calibration. For example, if you
are using a 100 TORR CDG, evacuate your system pressure to 100 Torr and use the same calibration
procedure described above. For the KJLC 392 module use a similar procedure.
Note - As you adjust the analog output, the number being displayed in the AOUT CAL 1 screen represents the
millivolts offset from zero volts that is being used internally for the analog output gain adjustment.
- AOUT CAL 2 [Factory default = Factory Set] (Same info as AOUT CAL 1 above, except for AOUT CAL 2)
- AOUT CAL 3 [Factory default = Factory Set] (Same info as AOUT CA L1 above, except for AOUT CAL 3)
- AOUT LIN 1 [Factory default = 1.00E00 TORR]
This programming parameter is only used if you have assigned IG LINEAR, CG1 LINEAR or CG2 LINEAR to
ANALOG OUTPUT 1 above. This analog output type provides a 0-10 Vdc output signal that has a direct linear
relationship to the displayed pressure measured by the IG, CG1 or CG2. The AOUT LIN 1 value programmed
here represents the maximum pressure as measured by the IG, CG1 or CG2 corresponding to a voltage output
of 10 volts. This selection covers, at most, a 3 decade range of pressure.
For example, if AOUT LIN 1 is programmed for 1.00E-03 Torr, then the instrument provides a 10 volt analog
output signal when pressure is at 1.00E-03 Torr. Thereafter, minimum pressure is automatically set to
Kurt J. Lesker Company
Page 44
Instruction Manual
MGC-3200
1.00E-06 torr, with a corresponding minimum voltage output of 0.01 volts. If your application requires the IG,
CG1 or CG2 analog output voltage to cover a pressure range exceeding three decades, then consider using the
log-linear analog outputs. Refer to section 6.6 and section 6.10 for details regarding this type of output signal.
- AOUT LIN 2 [Factory default = 1.00E 00 TORR] (Same info as AOUT LIN 1 above, except for AOUT LIN 2)
- AOUT LIN 3 [Factory default = 1.00E 00 TORR] (Same info as AOUT LIN 1 above, except for AOUT LIN 3)
5.5.6 SERIAL COMM
The MGC-3200 provides both RS232 and RS485 serial communications. Press the ENTER key to access the SERIAL
COMM menu for configuring the serial communications.
- COMM TYPE [Factory default =RS485]
The MGC-3200 supports four different protocols listed below (See section 8 for details).
- RS485
- RS232
- GP485
- GP232
RS485 with start and stop characters and address, derived from KJLC 354
RS232 with start and stop characters, like RS485 above but no address
RS485 compatible with Granville-Phillips 307 and 358 controllers
RS232 compatible with Granville-Phillips 307 and 358 controllers
- BAUDRATE [Factory default =19,200]
This sets the baud rate for the RS485 and the RS232 serial communications. The baud rate can be set to
various values listed below.
- 38400 BAUD
- 19200 BAUD
- 9600 BAUD
- 4800 BAUD
- 2400 BAUD
- 1200 BAUD
- 600 BAUD
- 300 BAUD
- FRAMING [Factory default = 8 BITS, NONE 1]
This sets the character framing by providing the user various selections to control the number of characters,
parity and number of stop bits. Character framing can be set to one of the following:
- 8 BITS NONE 1 (This selection sets the character framing to 8 data bits, no parity, 1 stop bit)
- 7 BITS ODD 2
- 7 BITS EVEN 2
- 7 BITS ODD 1
- 7 BITS EVEN 1
- 8 BITS ODD 1
- 8 BITS EVEN 1
Kurt J. Lesker Company
Page 45
Instruction Manual
MGC-3200
- ADDRESS [Factory default = 01]
This sets the two byte RS485 device address. For example, an ADDRESS of 05 will make the address 0x05 in
hexadecimal. An address of 15 will set the ADDRESS to 0x15 in hexadecimal.
5.5.7 DISPLAY
The DISPLAY menu allows the user to configure the OLED setup screen. The user can configure the set-up
screen to normal or research mode for IG, enable or disable screen saver and adjust the display intensity.
Press the ENTER key to access the DISPLAY menu for configuring the setup screen.
- SCREEN SETUP [Factory default = NORMAL]
This menu configures the display mode for the setup screen. The setup screen can be configured to display
the IG parameters in NORMAL or RESEAERCH mode. Use the UP and DOWN keys to select the desired setup
screen mode from the following menu choices.
- NORMAL
- RESEARCH
Normal display mode for IG
Research display mode for IG
Select ‘NORMAL’ if you would like to configure the setup screen to display the IG parameters in the normal
mode shown below.
NORMAL Display Mode
IG Emission
current
Selected IG
filament in use
Relay status indicators for relays 1 thru 6
Color filled circle = Relay energized
No color filled circle = Relay not energized
Select ‘RESEARCH’ if you would like to configure the setup screen to display the IG parameters in the research
mode shown below. This is particularly helpful when troubleshooting IG issues.
RESEARCH Display Mode
Emission current
value (ampere, A)
Ion current
value (A)
Filament
Voltage
Filament voltage (Vdc)
(Vdc)
Filament current (A)
Kurt J. Lesker Company
Page 46
Instruction Manual
MGC-3200
- SCREEN SAVER [Factory default = ON]
The MGC-3200 set-up screen uses an OLED type display which over an extended period of time can start to
show divergence between pixels that are on at all times verses pixels that are not. This could result in pixels
exhibiting a burned-in effect. To minimize the burned-in effect, a screen saver function can be activated by
programming the SCREEN SAVER menu selection to ON. With the screen saver function turned on, the setup
screen changes display appearance every 12 hours. The display will appear in the normal mode with a dark
background color for the first 12 hours and will then switch to a back-lit background color for the next 12
hours. If you like to have the 12 hour period for the normal display mode to start at a specific time of the day,
simply access the SCREEN SAVER menu and change setting to OFF and then ON again. This initiates the screen
saver function immediately.
Note - To increase longevity of the OLED display, KJLC recommends that the screen saver function remains
ON as shipped from the factory.
- BRIGHTNESS [Factory default = 0]
The BRIGHTNESS menu allows the user to select the brightness of the setup screen display. The brightness
setting of 0 provides the lowest brightness (contrast) and 10 the highest.
Note - To increase longevity of the OLED display, KJLC recommends that the brightness function remains at
0 as shipped from the factory.
Kurt J. Lesker Company
Page 47
Instruction Manual
6
MGC-3200
Analog Output Charts & Equations (Nitrogen/Air Only)
This section provides various charts & equations for analog outputs available from the MGC-3200.
6.1
Analog Output wide range measurement for IG - CG1 0.5 - 7V (Nitrogen / Air only)
When the analog output is setup, as described in section 5.5.5 for IG - CG1 0.5-7V, the analog output voltage represents a
combination of the IG and CG1 for wide range measurements. Refer to section 7.3.2 if you are using a gas other than
nitrogen/air.
Analog output: Wide Range Log-linear 0.5 to 7 Vdc, 0.5 V per decade
A) The log-linear output signal and pressure are related by the
following formulas when units of measurement is in Torr and
mbar:
Log-Linear Analog Output (N2 /air only)
Pressure (Torr)
Voltage (VDC)
1.00E-10
0.5
1.00E-09
1.0
1.00E-08
1.5
1.00E-07
2.0
1.00E-06
2.5
1.00E-05
3.0
1.00E-04
3.5
1.00E-03
4.0
Notes: The output voltage will switch to above +11 Vdc under the
following conditions:
1.00E-02
4.5
1) The IG sensor is turned off, any IG fault condition and the
1.00E-01
5.0
1.00E+00
5.5
1.00E+01
6.0
1.00E+02
6.5
1.00E+03
7.0
See Notes
>11
(volts - 5.5)/(0.5)
P = 10
V = ((0.5 X log10(P)) + 5.5
Where P is the pressure in Torr or mbar, and V is the output
signal in volts.
B) The log-linear output signal and pressure are related by the
following formulas when units of measurement is in pascals:
P = 10
(volts - 4.5)/(0.5)
V = ((0.5 X log10(P)) + 4.5
CG1 is damaged or disconnected.
-3
2) The pressure exceeds 1.00 x 10 Torr at 4 mA emission
-2
current or 5.00 x 10 Torr at 100 µA emission current for KJLC351
and CG1 is damaged or disconnected.
3) Any IG or CG faults condition while operating in the IG or
CG range respectively.
The following chart shows the graphical results of table and formulas above for pressure measurements in Torr. Pressure is plotted on the
X-axis with a log scale; the output signal is plotted on the Y-axis on a linear scale.
Log-Linear Analog Voltage to Pressure
8.0
7.0
Output Signal (Volts dc)
6.0
5.0
4.0
3.0
2.0
1.0
0.0
1.0E-10
1.0E-09
1.0E-08
1.0E-07
1.0E-06
1.0E-05
1.0E-04
1.0E-03
1.0E-02
1.0E-01
1.0E+00
1.0E+01
1.0E+02
1.0E+03
Pressure (Torr)
Kurt J. Lesker Company
Page 48
Instruction Manual
6.2
MGC-3200
Analog Output for IG LOG N - 10 (Nitrogen / Air only)
When the analog output is setup, as described in section 5.5.5 for IG LOG N - 10, the analog output voltage represents the
pressured measured by the IG for nitrogen/air only. Refer to section 7.3.1 if you are using a gas other than nitrogen/air.
Analog output: IG Log-linear 0 to 9 Vdc, 1 V per decade
Log-Linear Analog Output (N2 /air only)
Pressure (Torr)
Voltage (VDC)
A) The log-linear output signal and pressure are related by the
following formulas when units of measurement is in Torr and
mbar:
(volts - 10)
P= 10
V= log10(P) + 10
Where P is the pressure in Torr or mbar, and V is the output
signal in volts.
B) The log-linear output signal and pressure are related by the
following formulas when units of measurement is in pascals:
P= 10
(volts - 8)
V= log10(P) + 8
Where P is the pressure in pascals, and V is the output signal in
volts.
Notes: The output voltage will switch to above +11 Vdc under
the following conditions:
1.00E-10
0.0
1.00E-09
1.0
1.0E-08
2.0
1.00E-07
3.0
1.00E-06
4.0
1.00E-05
5.0
1.00E-04
6.0
1.00E-03
7.0
1.00E-02
8.0
5.00E-02
8.698
See Notes
>11
1) The IG sensor is turned off or any IG fault condition.
-3
2) The pressure exceeds 1.00 x 10 Torr at 4 mA emission current
-2
or 5.00 x 10 Torr at 100 µA emission current for KJLC351.
The following chart shows the graphical results of table and formulas above for measurements in Torr. Pressure is plotted on
the X-axis with a log scale; the output signal is plotted on the Y-axis on a linear scale.
Log-Linear Analog Voltage to Pressure
10.0
9.0
8.0
Output Signal (Volts dc)
7.0
6.0
5.0
4.0
3.0
2.0
1.0
0.0
1.0E-10
1.0E-09
1.0E-08
1.0E-07
1.0E-06
1.0E-05
1.0E-04
1.0E-03
1.0E-02
1.0E-01
1.0E+00
Pressure (Torr)
Kurt J. Lesker Company
Page 49
Instruction Manual
6.3
MGC-3200
Analog Output for IG LOG N - 11 (Nitrogen / Air only)
When the analog output is setup, as described in section 5.5.5, for IG LOG N - 11, the analog output voltage represents the
pressured measured by the IG for nitrogen/air only. Refer to section 7.3.1 if you are using a gas other than nitrogen/air.
Analog output: IG Log-linear 0 to 10 Vdc, 1 V per decade
A) The log-linear output signal and pressure are related by the
following formulas when units of measurement is in Torr and
mbar:
(volts - 11)
P= 10
V= log10(P) + 11
Where P is the pressure in Torr or mbar, and V is the output
signal in volts.
B) The log-linear output signal and pressure are related by the
following formulas when units of measurement is in pascals:
P= 10
(volts - 9)
V= log10(P) + 9
Where P is the pressure in pascals, and V is the output signal in
volts.
Notes: The output voltage will switch to above +11 Vdc under
the following conditions:
Log-Linear Analog Output (N2 /air only)
Pressure (Torr)
Voltage (VDC)
1.00E-11
0.0
1.00E-10
1.0
1.00E-09
2.0
1.00E-08
3.0
1.00E-07
4.0
1.00E-06
5.0
1.00E-05
6.0
1.00E-04
7.0
1.00E-03
8.0
1.00E-02
9.0
5.00E-02
9.698
See Notes
>11
1) The IG sensor is turned off or any IG fault condition.
-3
2) The pressure exceeds 1.00 x 10 Torr at 4 mA emission current
-2
or 5.00 x 10 Torr at 100 µA emission current for KJLC351.
The following chart shows the graphical results of table and formulas above for pressure measurements in Torr. Pressure is
plotted on the X-axis with a log scale; the output signal is plotted on the Y-axis on a linear scale.
Kurt J. Lesker Company
Page 50
Instruction Manual
6.4
MGC-3200
Analog Output for IG LOG N - 12 (Nitrogen / Air only)
When the analog output is setup, as described in section 5.5.5, for IG LOG N - 12, the analog output voltage represents the
pressured measured by the IG for nitrogen/air only. Refer to section 7.3.1 if you are using a gas other than nitrogen/air.
Analog output: IG Log-linear 0 to 11 Vdc, 1 V per decade
A) The log-linear output signal and pressure are related by the
following formulas when units of measurement is in Torr and
mbar:
(volts - 12)
P= 10
V= log10(P) + 12
Where P is the pressure in Torr or mbar, and V is the output
signal in volts.
B) The log-linear output signal and pressure are related by the
following formulas when units of measurement is in pascals:
P= 10
(volts - 10)
V= log10(P) + 10
Where P is the pressure in pascals, and V is the output signal in
volts.
Notes: The output voltage will switch to above +11 Vdc under
the following conditions:
1) The IG sensor is turned off or any IG fault condition.
-3
2) The pressure exceeds 1.00 x 10 Torr at 4 mA emission current
-2
or 5.00 x 10 Torr at 100 µA emission current for KJLC351.
Log-Linear Analog Output (N2 /air only)
Pressure (Torr)
Voltage (VDC)
1.00E-12
0.0
1.00E-11
1.0
1.00E-10
2.0
1.00E-09
3.0
1.00E-08
4.0
1.00E-07
5.0
1.00E-06
6.0
1.00E-05
7.0
1.00E-04
8.0
1.00E-03
9.0
1.00E-02
10.0
5.00E-02
10.698
See Notes
>11
The following chart shows the graphical results of table and formulas above for pressure measurements in Torr. Pressure is
plotted on the X-axis with a log scale; the output signal is plotted on the Y-axis on a linear scale.
Kurt J. Lesker Company
Page 51
Instruction Manual
6.5
MGC-3200
Analog Output for IG 1.8 - 8.7V (Nitrogen / Air only)
When the analog output is setup, as described in section 5.5.5, for IG 1.8 – 8.7V, the analog output voltage represents the
pressured measured by the IG for nitrogen/air only. Refer to section 7.3.1 if you are using a gas other than nitrogen/air.
Analog output: IG Log-linear 0 to 9.259 Vdc, 0.8 V per decade
A) The log-linear output signal and pressure are related by the
following formulas:
((1.25*volts) - 12.875)
P (Torr)= 10
((1.25*volts) - 12.75)
P (mbar)= 10
((1.25*volts) - 10.75)
P (pascals) = 10
V= 10.3 + (0.8)*log10(P)
V= 10.2 + (0.8)*log10(P)
V= 8.6 + (0.8)*log10(P)
Where P is the pressure and V is the output signal in volts.
Notes: The output voltage will switch to above +11 Vdc under
the following conditions:
1) The IG sensor is turned off or any IG fault condition.
-3
2) The pressure exceeds 1.00 x 10 Torr at 4 mA emission current
-2
or 5.00 x 10 Torr at 100 µA emission current for KJLC351.
Log-Linear Analog Output (N2 /air only)
Pressure (Torr)
Voltage (VDC)
2.00E-11
1.741
4.20E-11
2.0
7.50E-10
3.0
1.30E-08
4.0
2.40E-07
5.0
4.20E-06
6.0
7.50E-05
7.0
1.30E-03
8.0
5.00E-02
9.259
Filament is OFF
>11
The following chart shows the graphical results of table and formulas above for pressure measurements in Torr. Pressure is
plotted on the X-axis with a log scale; the output signal is plotted on the Y-axis on a linear scale.
Kurt J. Lesker Company
Page 52
Instruction Manual
6.6
MGC-3200
Analog Output for IG LINEAR (Nitrogen / Air only)
When the analog output is setup, as described in section 5.5.5, for IG LINEAR, the analog output voltage
represents the pressure measured by the IG for nitrogen/air only. The Linear analog output type provides a 0-10
Vdc output signal that has a direct linear relationship to the displayed pressure measured by the ion gauge only.
This selection covers 3 decades of pressure change. For example, if ANALOG OUT 1 is programmed for IG LINEAR
and the maximum pressure for AOUT LIN 1 selected is 1.00E-03 Torr, then the instrument provides a 10 volt
analog output signal when pressure as measured by IG is at 1.00E-03 Torr. Furthermore, the minimum pressure is
automatically set to 1.00E-06 torr, with a corresponding minimum voltage output of 0.01 volts.
Constructing a table of these parameters may be useful in documenting the relationship of displayed pressure
(measured by the IG) to the analog output voltage. The following table is representative of a typical setup where
the IG may be used in a limited range of pressure measurement where a direct linear relationship exists between
the displayed pressure (mantissa) and the analog output signal.
Linear Analog Output Voltage - volts
0.01
0.10
1.00
10.00
Measured (Displayed) Pressure - torr
1.00E-06
1.00E-05
1.00E-04
1.00E-03
If your application requires the analog output voltage to cover a pressure range exceeding three decades, then
consider using a log-linear analog output type for the IG.
NOTE - The information discussed above regarding the Linear IG analog output applies only to N2 / air. If you are
using a gas other than N2 / air, refer to section 7.3.1 Apply the Sensitivity Correction Factor by dividing the
pressure derived (from using the Linear IG output discussed above) by the specific Gas Sensitivity Correction
Factor to obtain the true pressure of the specific gas in your vacuum chamber.
Notes: The output voltage will switch to above +11 Vdc under the following conditions:
1) The IG sensor is turned off or any IG fault condition.
2) The pressure exceeds 1.00E-03 Torr at 4 mA emission current or 5.00E-02 Torr at 100 µA emission for KJLC351.
Kurt J. Lesker Company
Page 53
Instruction Manual
6.7
MGC-3200
Analog Output for CG1 or CG2 1 - 8 V (Nitrogen / Air only)
When the analog output is setup, as described in section 5.5.5, for CG1 1 - 8V or CG2 1-8 V, the analog output voltage
represents the pressure measured by CG1 or CG2 for nitrogen/air only. Refer to section 7.3.3.1 if you are using a gas other
than nitrogen/air.
Analog output: Convection Gauge Log-linear 1 to 8 Vdc, 1 V per decade
A) The log-linear output signal and pressure are related by the following formulas
when units of measurement is in Torr and mbar:
(volts - 5)
P = 10
V = log10(P) + 5
Where P is the pressure in Torr or mbar, and V is the output signal in volts.
The output voltage is 1 V when pressure is at 1.00E-04 Torr.
The output voltage is 8 V when pressure is at 1.00E+03 Torr.
B) The log-linear output signal and pressure are related by the following formulas
when units of measurement is in pascals:
P = 10
(volts - 3)
V = log10(P) + 3
Where P is the pressure in pascals, and V is the output signal in volts.
Note - An analog output of above +11 volts indicates a faulty convection gauge or
unplugged gauge cable.
The following chart shows the graphical results of table and formulas above for
pressure measurements in Torr.
Log-Linear Analog Voltage to Pressure
9.000
8.000
Output Signal (Volts dc)
7.000
6.000
5.000
4.000
3.000
2.000
Log-Linear Analog Output
(N2 /air only)
Pressure
(Torr)
Voltage
1.00E-04
1.000
2.00E-04
1.301
5.00E-04
1.699
1.00E-03
2.000
2.00E-03
2.301
5.00E-03
2.699
1.00E-02
3.000
2.00E-02
3.301
5.00E-02
3.699
1.00E-01
4.000
2.00E-01
4.301
5.00E-01
4.699
1.00E+00
5.000
2.00E+00
5.301
5.00E+00
5.699
1.00E+01
6.000
2.00E+01
6.301
5.00E+01
6.699
1.00E+02
7.000
2.00E+02
7.301
3.00E+02
7.477
4.00E+02
7.602
5.00E+02
7.699
6.00E+02
7.778
7.00E+02
7.845
7.60E+02
7.881
8.00E+02
7.903
9.00E+02
7.954
1.00E+03
8.000
1.000
0.000
1.0E-04
1.0E-03
1.0E-02
1.0E-01
1.0E+00
1.0E+01
1.0E+02
1.0E+03
Pressure (Torr)
Kurt J. Lesker Company
Page 54
Instruction Manual
6.8
MGC-3200
Analog Output for CG1 or CG2 0 - 7 V (Nitrogen / Air only)
When the analog output is setup, as described in section 5.5.5, for CG1 0 - 7V or CG2 0-7V, the analog output voltage
represents the pressure measured by CG1 or CG2 for nitrogen/air only. Refer to section 7.3.3.2 if you are using a gas other
than nitrogen/air.
Analog output: Log-linear 0 to 7 Vdc, 1.0 V/decade.
A) The log-linear output signal and pressure are related by the following formulas
when units of measurement is in Torr and mbar:
(volts - 4)
P = 10
V = log10(P) + 4
where P is the pressure in Torr or mbar and V is the output signal in volts.
The output voltage is 0 V when pressure is at 1.00E-04 Torr.
The output voltage is 7 V when pressure is at 1.00E+03 Torr.
B) The log-linear output signal and pressure are related by the following formula
when units of measurement is in pascals:
(volts - 2)
P = 10
V = log10(P) + 2
where P is the pressure in pascals and V is the output signal in volts.
Note - An analog output above +11 volts indicates a faulty convection gauge or
unplugged gauge cable.
The following chart shows the graphical results of table and formulas above for
measurements in Torr.
Kurt J. Lesker Company
Log-Linear Analog
(N2 /air only)
Pressure
(Torr)
Voltage
1.00E-04
0.000
2.00E-04
0.301
5.00E-04
0.699
1.00E-03
1.000
2.00E-03
1.300
5.00E-03
1.700
1.00E-02
2.000
2.00E-02
2.300
5.00E-02
2.700
1.00E-01
3.000
2.00E-01
3.300
5.00E-01
3.700
1.00E+00
4.000
2.00E+00
4.300
5.00E+00
4.700
1.00E+01
5.000
2.00E+01
5.300
5.00E+01
5.700
1.00E+02
6.000
2.00E+02
6.300
3.00E+02
6.480
4.00E+02
6.600
5.00E+02
6.700
6.00E+02
6.780
7.00E+02
6.850
7.60E+02
6.880
8.00E+02
6.900
9.00E+02
6.950
1.00E+03
7.000
Page 55
Instruction Manual
6.9
MGC-3200
Analog Output for CG1 or CG2 NON - LIN (Nitrogen / Air only)
When the analog output is setup, as described in section 5.5.5, for CG1 NON - LIN or CG2 NON - LIN, the analog output
voltage represents the pressured measured by CG1 or CG2 for nitrogen/air only. Refer to section 7.3.3.3 if you are using a
gas other than nitrogen/air.
The first convection enhanced pirani transducer introduced was the Convectron®. The controller for the Convectron®
provided an analog output signal referred to as the “S-curve” which represented the actual voltage applied across the
transducer circuit, proportional to the pressure inside the pressure transducer enclosure. The Granville-Phillips®
Convectron® controllers were designed to output this transducer voltage and in later years, the non-linear voltage applied to
the transducer was scaled to provide various signal spans of the original “S-curve”. The non-linear analog output of the
-4
MGC-3200 duplicates the original S-curve of 0.375 volts at pressure less than 1.00 x 10 torr to 5.659 volts at 1000 torr,
nitrogen or air.
In general, one may use linear interpolation techniques to calculate the pressure using the non-linear analog output voltage
measured at a specific pressure. You may also calculate the N2/air pressure represented by the non-linear analog output
th
voltage for the original “S-curve” using a multi-segment, n order polynomial function calculation listed on the following
page.
Non-Linear Output Voltage vs. Pressure in Torr units for N2 /Air only
Pressure
(Torr)
0.0000
1.00E-04
2.00E-04
5.00E-04
1.00E-03
2.00E-03
5.00E-03
1.00E-02
2.00E-02
5.00E-02
1.00E-01
Voltage
(Vdc)
0.3751
0.3759
0.3768
0.3795
0.3840
0.3927
0.4174
0.4555
0.5226
0.6819
0.8780
Pressure
(Torr)
2.00E-01
5.00E-01
1.00E+00
2.00E+00
5.00E+00
1.00E+01
2.00E+01
5.00E+01
1.00E+02
2.00E+02
3.00E+02
Voltage
(Vdc)
1.1552
1.6833
2.2168
2.8418
3.6753
4.2056
4.5766
4.8464
4.9449
5.0190
5.1111
Pressure
(Torr)
4.00E+02
5.00E+02
6.00E+02
7.00E+02
7.60E+02
8.00E+02
9.00E+02
1.00E+03
Voltage
(Vdc)
5.2236
5.3294
5.4194
5.4949
5.5340
5.5581
5.6141
5.6593
Note - An analog output of above +11 volts indicates a faulty convection gauge or unplugged gauge cable.
Kurt J. Lesker Company
Page 56
Instruction Manual
MGC-3200
th
The equations and coefficients for the n order polynomial equation defined for various pressure measurement ranges for
the Non-linear analog output (S-curve) for CG1 or CG2 for N2/air described above are given in the following table:
For 0 mTorr to about 2 Torr, the Non-Linear Analog Output voltage range of 0.375 to 2.842 volts, use this table.
2
3
4
5
Coefficients for y(x) = a + bx + cx + dx + ex +fx
a
-0.02585
b
0.03767
c
0.04563
d
0.1151
e
-0.04158
f
0.008738
For 2 torr to about 100 torr, the Non-Linear Analog Output voltage range of 2.842 to 4.945 volts, use this table.
++ 2
Coefficients for () = 1++2 +3
a
b
c
d
e
f
0.1031
-0.3986
-0.02322
0.07438
0.07229
-0.006866
For 100 torr to 1000 torr, the Non-Linear Analog Output voltage range of 4.94 to 5.659 volts, use this table.
+
Coefficients for () = 1++2
a
b
c
d
Where y(x) = pressure in Torr,
100.624
-0.37679
-20.5623
0.0348656
x= measured analog output in volts
Example: Measured analog output voltage is 0.3840 V.
From first table shown above use equation:
2
3
4
5
y(x) = a + bx + cx + dx + ex +fx
X = 0.3840 volts
A = -0.02585,
b=0.03767, c=0.04563, d=0.1151, e=-0.04158, f=0.008738
y(x) = Pressure = 1.00E-03 Torr
Kurt J. Lesker Company
Page 57
Instruction Manual
MGC-3200
6.10 Analog Output for CG1 or CG2 LINEAR (Nitrogen / Air only)
When the analog output is setup, as described in section 5.5.5 , for CG1 LINEAR or CG2 LINEAR, the analog output
voltage represents the pressure measured by the CG1 or CG2 for nitrogen/air only. The Linear analog output type
provides a 0-10 Vdc output signal that has a direct linear relationship to the displayed pressure measured by the
CG1 or CG2 only. This selection covers 3 decades of pressure change. For example, if ANALOG OUT 1 is
programmed for CG1 LINEAR and the maximum pressure for AOUT LIN 1 selected is 1.00 Torr, then the
instruments provides a 10 volt analog output signal when pressure as measured by CG1 is at 1.00 Torr.
Furthermore, the minimum pressure is automatically set to 1.00E-03 torr, with a corresponding minimum voltage
output of 0.01 volts.
Constructing a table of these parameters may be useful in documenting the relationship of displayed pressure
(measured by the IG) to the analog output voltage. The following table is representative of a typical setup where
the CG may be used in a limited range of pressure measurement where a direct linear relationship exists between
the displayed pressure (mantissa) and the analog output signal.
Linear Analog Output Voltage - volts
0.01
0.10
1.00
10.00
Measured (Displayed) Pressure - torr
1.00E-03
1.00E-02
1.00E-01
1.00E+00
If your application requires the analog output voltage to cover a pressure range exceeding three decades, then
consider using a log-linear analog output type for CG1 or CG2.
Note - An analog output of above +11 volts indicates a faulty convection gauge or unplugged gauge cable.
Kurt J. Lesker Company
Page 58
Instruction Manual
7
MGC-3200
Using the Gauge with different gases
The following tables and explanation contain important information regarding the use of ionization and
convection gauges when used to measure pressure of gases other than nitrogen /air. For both types of gauge
transducers, corrections must be applied to both the display and analog outputs. This is particularly critical when
using convection gauges at higher pressures than measured by the ion gauge when using gases other than N2/air.
7.1
Ion gauge display correction factors for selected gases
There are two methods that can be used for monitoring the IG display when using gases other than nitrogen/air:
1) If you are using a gas other than N2 / air, you must manually apply a gas sensitivity correction factor to the IG
displayed measurement. Post a label on your ion gauge display showing the correction factor to be used for the
pressure of the gas type you are measuring. The table below provides typical correction factors for ion gauges
when used with gas types other than N2 / air. To correct the display measurements, divide the displayed
measured pressure by the correction factor for the gas type you are measuring:
Ion Gauge Gas Sensitivity Correction Factors for selected gases
Gas
He
Ne
D2
H2
N2
Air
O2
CO
Sensitivity Correction
Factor
0.18
0.30
0.35
0.46
1.00
1.00
1.01
1.05
Gas
H2O
NO
Ar
CO2
Kr
SF6
Xe
Hg
Sensitivity Correction
Factor
1.12
1.16
1.29
1.42
1.94
2.50
2.87
3.64
For example, if the gas in use is argon (Ar) and the ion gauge measured pressure is displayed as 4.00 x 10-7 Torr,
the actual, true pressure of argon is then determined by the following equation:
4.00  10−7
1.29
Torr = 3.10 x 10-7 Torr, Ar
2) Alternatively, you may correct the display for a direct reading of pressure for the type of gas you are using by
adjusting the sensitivity factor for the IG. If you adjust the sensitivity factor for your ion gauge to compensate the
readout of pressure for a gas type other than nitrogen / air, the displayed pressure readout for that device must
be annotated to indicate that the displayed pressure is for the gas type the readout is compensated for.
In the above example, if the N2 sensitivity of the ion gauge being used is 10 torr-1 (“10 per torr”), the sensitivity
factor programmed during setup of the MGC-3200 and KJLC351 could be set for 12.9 (~13) so that the pressure
readout would directly indicate the true pressure of argon. Again, the display line for that particular device
pressure readout would require annotation (a user applied label) so as to not conflict with the gas type
selection/notation of nitrogen (N2).
Kurt J. Lesker Company
Page 59
Instruction Manual
7.2
MGC-3200
Effects of different gases on convection gauge display
Convection gauge operation is based on the physical effect of thermal conductivity of the gas inside the gauge
transducer. The convection gauge senses heat loss in a sensor wire. This heat loss depends on the thermal
conductivity of the gas surrounding the sensor wire. Since different gases, and mixtures, have different thermal
conductivities, the indicated pressure readings and outputs will also be different. KJLC convection gauges (and
most other thermal, heat loss type gauges) are normally calibrated using nitrogen. When a gas other than N2 is
used, correction must be made for the difference in thermal conductivity between N2 and the gas in use. The
charts and tables below indicate how different gases affect the display from an KJLC convection gauge.
For nitrogen gas (N2) the calibration of the convection gauge shows excellent agreement between indicated and
true pressure throughout the range from 10-4 to 1000 Torr. At pressures below about 1 torr, the calibration
curves for the different gases are similar. The difference in readings (between indicated and true pressure) at
these low pressures is usually a constant; a function of the difference between thermal conductivities of the
gases.
At pressures above about 1 torr, indicated pressure readings may diverge significantly from true pressure. At
these higher pressures, convection currents in the gauge become the predominant cause of heat loss from the
sensor. Calibration and performance at pressures higher than about 1 torr depends on gauge tube geometry and
mounting orientation as well as gas properties.
Generally, air and N2 are considered the same as far as thermal conductivity goes, but even these two gases will
exhibit slight differences in readings at higher pressures. For example, when venting a system to atmosphere
using N2, you may see readings change by about 30 to 40 torr after the chamber is opened and air gradually
displaces the N2 in the gauge. This is due to the partial pressure of oxygen (O2) contained in atmospheric air.
Kurt J. Lesker Company
Page 60
Instruction Manual
MGC-3200
The Y- axis of the above chart is actual pressure as measured by a capacitance manometer, a diaphragm gauge
that measures true total pressure independent of gas composition. The X-axis is the pressure reading indicated by
the convection gauge under test. This chart shows readings for an KJLC convection gauge (275) and GranvillePhillips® Convectron® gauge to illustrate that the difference in the response for both of these types of gauges is
virtually indistinguishable.
CAUTION! Do not assume this data applies to other convection gauges which may or may not be the same.
See Table 1 below and note the following examples:
Example A: If the gas is nitrogen (N2), when the true total pressure is 500 Torr, the gauge will read 500 Torr.
Example B: If the gas is argon (Ar), when the true pressure is 100 Torr, the gauge will read about 9 Torr.
If you are backfilling your vacuum system with Ar, when your system reaches a pressure of 760 Torr
true pressure your gauge will be reading about 23 Torr. Continuing to backfill your system, attempting to
increase the reading up to 760 Torr, you will over pressurize your chamber which may present a hazard.
Example C: If the gas is helium (He), the gauge will read 1.10E+03 (overpressure indication) Torr when pressure reaches
about 10 Torr true pressure and opening the chamber to atmosphere prematurely may present other hazards for both
people and product. You probably will not cause damage to your vacuum system, but opening the chamber to
atmosphere with the internal chamber pressure at only 10 torr true pressure, may present other hazards for both
personnel in the proximity and product that may be inside the chamber/vessel.
CAUTION! What these examples illustrate is that using gases other than nitrogen (N2) without using accurate gas
conversion data and other proper precautions could result in injury to personnel and/or damage to equipment.
Suggested precautions when using gases other than N2:

Install a pressure relief valve or burst disk on your chamber to provide protection from the dangers
associated with over pressurizing the chamber.

Post a warning label on your gauge readout such as "Do Not Exceed ____ Torr Indicated Pressure" (fill in
the blank for the gas type you are using) so that an operator using the vacuum chamber system and
connected gauge will not exceed a safe operating pressure.
CAUTION! Do not assume this data applies to other convection gauges, which may or may not be the same.
CAUTION! Risk of over pressurizing a gas containment vessel and attached apparatus exists when using
pressure measurement devices that are calibrated for a specific gas type. Use a pressure relief device to safely
limit the internal pressure of a containment vessel to less than the maximum allowable working pressure rating
for the vacuum/pressure system and all devices attached to the system.
Kurt J. Lesker Company
Page 61
Instruction Manual
MGC-3200
WARNING! Using a thermal conductivity gauge with gases other than that for which it is calibrated could
result in death or serious injury. Be sure to use gas correction data in this manual when measuring pressures of
gases other than N2 / air.
Exercise caution when admitting positive pressures (above local ambient, atmospheric pressure) of gas into any
enclosed volume. Install pressure relief devices on your vacuum / pressure vessel or chamber to limit the
maximum allowable working pressure inside the devices and vessel internal volume to less than the lowest rated
device - in some cases, the maximum allowable working pressure may be dictated by the type of connections or
fittings used to attach devices to your chamber. An O-ring compression fitting type device may be forcibly
released (ejected) from the fitting if internal pressure exceeds the local barometric, ambient pressure.
Kurt J. Lesker Company
Page 62
Instruction Manual
MGC-3200
The table below shows the convection gauge displayed readings at various pressures for several commonly
used gas types:
Table 1 - Displayed pressure readings for convection gauge type devices versus true pressure for selected gases
True
Pressure
(Torr)
1.00E-4
2.00E-4
5.00E-4
1.00E-3
2.00E-3
5.00E-3
1.00E-2
2.00E-2
5.00E-2
1.00E-1
2.00E-1
5.00E-1
1.00E+0
2.00E+0
5.00E+0
1.00E+1
2.00E+1
5.00E+1
1.00E+2
2.00E+2
3.00E+2
4.00E+2
5.00E+2
6.00E+2
7.00E+2
7.60E+2
8.00E+2
9.00E+2
1.00E+3
N2
1.00E-4
2.00E-4
5.00E-4
1.00E-3
2.00E-3
5.00E-3
1.00E-2
2.00E-2
5.00E-2
1.00E-1
2.00E-1
5.00E-1
1.00E+0
2.00E+0
5.00E+0
1.00E+1
2.00E+1
5.00E+1
1.00E+2
2.00E+2
3.00E+2
4.00E+2
5.00E+2
6.00E+2
7.00E+2
7.60E+2
8.00E+2
9.00E+2
1.00E+3
Ar
1.00E-4
2.00E-4
5.00E-4
7.00E-4
1.40E-3
3.30E-3
6.60E-3
1.31E-2
3.24E-2
6.43E-2
1.26E-1
3.12E-1
6.00E-1
1.14E+0
2.45E+0
4.00E+0
5.80E+0
7.85E+0
8.83E+0
9.79E+0
1.13E+1
1.35E+1
1.61E+1
1.88E+1
2.18E+1
2.37E+1
2.51E+1
2.85E+1
3.25E+1
He
1.00E-4
2.00E-4
5.00E-4
8.00E-4
1.60E-3
4.00E-3
8.10E-3
1.61E-2
4.05E-2
8.20E-2
1.65E-1
4.35E-1
9.40E-1
2.22E+0
1.35E+1
OP
OP
OP
OP
OP
OP
OP
OP
OP
OP
OP
OP
OP
OP
O2
1.00E-4
2.00E-4
5.00E-4
1.00E-3
2.00E-3
5.00E-3
9.70E-3
1.98E-2
4.92E-2
9.72E-2
1.94E-1
4.86E-1
9.70E-1
1.94E+0
4.98E+0
1.03E+1
2.23E+1
7.76E+1
2.09E+2
2.95E+2
3.80E+2
4.85E+2
6.04E+2
7.30E+2
8.59E+2
9.41E+2
9.97E+2
OP
OP
CO2
1.00E-4
2.00E-4
5.00E-4
1.10E-3
2.30E-3
4.40E-3
1.10E-2
2.22E-2
5.49E-2
1.07E-1
2.10E-1
4.89E-1
9.50E-1
1.71E+0
3.34E+0
4.97E+0
6.59E+0
8.22E+0
9.25E+0
1.23E+1
1.69E+1
2.24E+1
2.87E+1
3.64E+1
4.61E+1
5.39E+1
5.94E+1
7.95E+1
1.11E+2
Kr
1.00E-4
2.00E-4
3.00E-4
4.00E-4
1.00E-3
2.30E-3
4.80E-3
9.50E-3
2.35E-2
4.68E-2
9.11E-2
2.17E-1
4.00E-1
7.00E-1
1.28E+0
1.78E+0
2.29E+0
2.57E+0
2.74E+0
3.32E+0
3.59E+0
3.94E+0
4.21E+0
4.44E+0
4.65E+0
4.75E+0
4.84E+0
4.99E+0
5.08E+0
Freon12
1.00E-4
2.00E-4
5.00E-4
1.50E-3
3.10E-3
7.60E-3
1.47E-2
2.99E-2
7.25E-2
1.43E-1
2.75E-1
6.11E-1
1.05E+0
1.62E+0
2.45E+0
2.96E+0
3.32E+0
3.79E+0
4.68E+0
5.99E+0
6.89E+0
7.63E+0
8.28E+0
8.86E+0
9.42E+0
9.76E+0
9.95E+0
1.05E+1
1.11E+1
Freon22
1.00E-4
2.00E-4
5.00E-4
1.50E-3
3.10E-3
7.00E-3
1.35E-2
2.72E-2
6.90E-2
1.36E-1
2.62E-1
5.94E-1
1.04E+0
1.66E+0
2.62E+0
3.39E+0
3.72E+0
4.14E+0
4.91E+0
6.42E+0
7.52E+0
8.42E+0
9.21E+0
9.95E+0
1.07E+1
1.11E+1
1.14E+1
1.20E+1
1.27E+1
D2
1.00E-4
2.00E-4
5.00E-4
1.30E-3
2.40E-3
6.00E-3
1.21E-2
2.43E-2
6.00E-2
1.21E-1
2.50E-1
6.87E-1
1.55E+0
4.13E+0
2.46E+2
OP
OP
OP
OP
OP
OP
OP
OP
OP
OP
OP
OP
OP
OP
Ne
1.00E-4
2.00E-4
5.00E-4
7.00E-4
1.50E-3
3.50E-3
7.10E-3
1.41E-2
3.48E-2
7.00E-2
1.41E-1
3.59E-1
7.45E-1
1.59E+0
5.24E+0
2.15E+1
5.84E+2
OP
OP
OP
OP
OP
OP
OP
OP
OP
OP
OP
OP
CH4
1.00E-4
2.00E-4
5.00E-4
1.70E-3
3.30E-3
7.70E-3
1.53E-2
3.04E-2
7.72E-2
1.59E-1
3.15E-1
7.81E-1
1.60E+0
3.33E+0
7.53E+0
2.79E+1
3.55E+2
8.42E+2
OP
OP
OP
OP
OP
OP
OP
OP
OP
OP
OP
Values listed under each gas type are in Torr units
Over Pressure (OP)= 1.10E+03 Torr
When using gases other than nitrogen/air, you must use the above look-up table to determine the true pressures
of selected gases as measured by convection gauges. For example, if the gas you are using in your vacuum system
chamber is predominately argon (Ar), a displayed pressure of 1.14E+00 Torr means the actual true pressure of
argon is 2.00E+00 Torr based on the conversion information provided in the above table.
Example: If the gas is argon (Ar), when the true pressure is 100 Torr, the gauge will read only about 9 torr.
Kurt J. Lesker Company
Page 63
Instruction Manual
7.3
MGC-3200
Effect of different gases on analog output
The following tables and explanation contains important information regarding the use of ionization and
convection gauges on gases other than N2 / Air. For both types of gauges, corrections must be applied to the
analog outputs.
7.3.1 Ion gauge analog output correction factors for selected gases
When using any of the analog outputs assigned to ion gauge only, use the following steps to convert the analog
output to pressure: Ion gauge analog output correction factors for selected gases
A) Refer to section 6 and use the related equation to convert the voltage in your receiving instrument to
pressure. This pressure value is based on nitrogen gas.
B) Apply the Sensitivity Correction Factor for the particular gas you are using to the pressure value obtained
in step A. Use correction factors and example listed below:
Ion Gauge Gas Sensitivity Correction Factors for selected gases
Gas
Sensitivity Correction
Factor
0.18
0.30
0.35
0.46
1.00
1.00
1.01
1.05
He
Ne
D2
H2
N2
Air
O2
CO
Gas
H2O
NO
Ar
CO2
Kr
SF6
Xe
Hg
Sensitivity
Correction Factor
1.12
1.16
1.29
1.42
1.94
2.50
2.87
3.64
Example:
ANALOG OUT 1 selected is IG LOG N-10. The gas in use is argon. Voltage output is 4 volts. Pressure unit is torr.
P (nitrogen) = 10 (volts - 10)
P = 10 (4 - 10)
P = 1.00 x 10-6 Torr (based on nitrogen)
Applying the Sensitivity Correction Factor of 1.29 for argon listed in the table above,
P (argon) =
. ×−
.
= .  × − Torr true pressure of argon gas
The correction factor must be applied to the analog output over the entire pressure range measured by the ion
gauge.
Kurt J. Lesker Company
Page 64
Instruction Manual
MGC-3200
7.3.2 IG - CG1 0.5 - 7V analog output correction factors for selected gases
When using the IG - CG1 analog output mode (Log-Linear 0.5 - 7 V, 0.5 V/decade) for gases other than N2 / Air, the
analog output is interpreted differently over two different pressure ranges as discussed below:
A) Pressure range for KJLC351 from 1.00 x 10-9 Torr to overpressure shut down value listed in section 4.4.
Use the correction factors listed in section 7.3.2.1 below to determine pressure from the voltage for
selected gases (ion gauge range).
B) Pressure range of overpressure shut down value listed in section 4.4 to 1,000 Torr
Use the correction factors listed in section 7.3.2.2 below to determine pressure from the voltage for
selected gases (convection gauge range).
7.3.2.1 IG-CG1 0.5 - 7V analog output correction factors - Ion gauge range
A) When using the IG - CG1 analog output mode (Log-Linear 0.5 - 7 V, 0.5 V/decade) for gases other than N2 /
Air, use the following steps to convert the analog output to pressure for KJLC351 when operating in the
pressure range of 1.00 x 10-9 Torr to overpressure shut down values listed in section 4.4.
B) Refer to section 6.1 and related equation to convert the voltage in your receiving instrument to pressure.
This pressure value is based on nitrogen.
C) Apply the sensitivity correction factor for the particular gas you are using to the pressure value obtained
in step A (Use correction factors and example listed below).
Gas
He
Ne
D2
H2
N2
Air
O2
CO
Ion Gauge Gas Sensitivity Correction Factors for selected gases
Sensitivity
Gas
Sensitivity
Correction Factor
Correction Factor
0.18
H2O
1.12
0.30
NO
1.16
0.35
Ar
1.29
0.46
CO2
1.42
1.00
Kr
1.94
1.00
SF6
2.50
1.01
Xe
2.87
1.05
Hg
3.64
Example: The gas in use is argon. Output voltage is 3 volts. Pressure unit is torr.
P (nitrogen) = 10
P (argon) =
−5.5
0.5
 ×−
.
= 10 (3.0 – 5.5) / (0.5) , P = 1.00 × 10−5 Torr (based on nitrogen)
= .  × − Torr true pressure of argon gas
The same correction factor must be applied over the entire pressure range as measured by the ion gauge.
Kurt J. Lesker Company
Page 65
Instruction Manual
MGC-3200
7.3.2.2 IG-CG1 0.5 - 7V analog output correction factors - Convection gauge range
When using the IG - CG1 analog output mode (Log-Linear 0.5 - 7 V, 0.5 V/decade) for gases other than N2 / Air, use
the following look-up table and information to convert the analog output to pressure when operating in the
pressure range of overpressure shutdown value listed in section 4.4 to 1,000 Torr. The look-up table has been
derived from equation listed in section 6.1
Analog output IG - CG1 when in the pressure range of overpressure shutdown value to 1,000 Torr
True
Pressure
(Torr)
1.00E-3
2.00E-3
5.00E-3
1.00E-2
2.00E-2
5.00E-2
1.00E-1
2.00E-1
5.00E-1
1.00E+0
2.00E+0
5.00E+0
1.00E+1
2.00E+1
5.00E+1
1.00E+2
2.00E+2
3.00E+2
4.00E+2
5.00E+2
6.00E+2
7.00E+2
7.60E+2
8.00E+2
9.00E+2
1.00E+3
N2
4.000
4.151
4.349
4.500
4.651
4.849
5.000
5.151
5.349
5.500
5.651
5.849
6.000
6.151
6.349
6.500
6.651
6.739
6.801
6.849
6.889
6.923
6.940
6.952
6.977
7.000
Ar
3.923
4.073
4.259
4.410
4.559
4.755
4.904
5.050
5.247
5.389
5.528
5.695
5.801
5.882
5.947
5.973
5.995
6.027
6.065
6.103
6.137
6.169
6.187
6.200
6.227
6.256
He
3.952
4.102
4.301
4.454
4.603
4.804
4.957
5.109
5.319
5.487
5.673
6.065
O2
4.000
4.151
4.349
4.493
4.648
4.846
4.994
5.144
5.343
5.493
5.644
5.849
6.006
6.174
6.445
6.660
6.735
6.790
6.843
6.891
6.932
6.967
6.987
6.999
CO2
4.021
4.181
4.322
4.521
4.673
4.870
5.015
5.161
5.345
5.489
5.616
5.762
5.848
5.909
5.957
5.983
6.045
6.114
6.175
6.229
6.281
6.332
6.366
6.387
6.450
6.523
KR
3.801
4.000
4.181
4.341
4.489
4.686
4.835
4.980
5.168
5.301
5.423
5.554
5.625
5.680
5.705
5.719
5.761
5.778
5.798
5.812
5.824
5.834
5.838
5.842
5.849
5.853
Freon12
4.088
4.246
4.440
4.584
4.738
4.930
5.078
5.220
5.393
5.511
5.605
5.695
5.736
5.761
5.789
5.835
5.889
5.919
5.941
5.959
5.974
5.987
5.995
5.999
6.011
6.023
Freon22
4.088
4.246
4.423
4.565
4.717
4.919
5.067
5.209
5.387
5.509
5.610
5.709
5.765
5.785
5.809
5.846
5.904
5.938
5.963
5.982
5.999
6.015
6.023
6.028
6.040
6.052
D2
4.057
4.190
4.389
4.541
4.693
4.889
5.041
5.199
5.418
5.595
5.808
6.695
Ne
3.923
4.088
4.272
4.426
4.575
4.771
4.923
5.075
5.278
5.436
5.601
5.860
6.166
6.883
CH4
4.115
4.259
4.443
4.592
4.741
4.944
5.101
5.249
5.446
5.602
5.761
5.938
6.223
6.775
6.963
Values listed under each gas type are in volts (V).
Example:
The gas in use is O2. Voltage output is 5.144 volts.
True pressure of O2 is 2.00E-01 Torr
Kurt J. Lesker Company
Page 66
Instruction Manual
MGC-3200
7.3.3 Convection gauge analog output for selected gases
If you intend to use any of the analog outputs to represent measurements from CG1 or CG2 for gases other than
N2 / Air, you must also apply corrections to the analog output. Use the following tables to determine pressure
from voltage for gases other than nitrogen or air.
7.3.3.1 CG1 1 - 8 V or CG2 1 - 8 V analog output correction factors - convection gauge
When using the Log-Linear convection gauge analog output mode (Log-Linear 1 - 8 V, 1 V/decade) for gases other
than N2 /, use the following look-up table and information to convert the analog output to pressure. The look-up
table has been derived from the equation provided in section 6.7
Analog Output for Log-Linear CG1 1-8V or CG2 1-8V
True
Pressure
(Torr)
1.00E-4
2.00E-4
5.00E-4
1.00E-3
2.00E-3
5.00E-3
1.00E-2
2.00E-2
5.00E-2
1.00E-1
2.00E-1
5.00E-1
1.00E+0
2.00E+0
5.00E+0
1.00E+1
2.00E+1
5.00E+1
1.00E+2
2.00E+2
3.00E+2
4.00E+2
5.00E+2
6.00E+2
7.00E+2
7.60E+2
8.00E+2
9.00E+2
1.00E+3
N2
1.000
1.301
1.699
2.000
2.301
2.699
3.000
3.301
3.699
4.000
4.301
4.699
5.000
5.301
5.699
6.000
6.301
6.699
7.000
7.301
7.477
7.602
7.699
7.778
7.845
7.881
7.903
7.954
8.000
Ar
1.000
1.301
1.699
1.845
2.146
2.519
2.820
3.117
3.511
3.808
4.100
4.494
4.778
5.057
5.389
5.602
5.763
5.895
5.946
5.991
6.053
6.130
6.207
6.274
6.338
6.375
6.400
6.455
6.512
He
1.000
1.301
1.699
1.903
2.204
2.602
2.908
3.207
3.607
3.914
4.217
4.638
4.973
5.346
6.130
O2
1.000
1.301
1.699
2.000
2.301
2.699
2.987
3.297
3.692
3.988
4.288
4.687
4.987
5.288
5.697
6.013
6.348
6.890
7.320
7.470
7.580
7.686
7.781
7.863
7.934
7.974
7.999
CO2
1.000
1.301
1.699
2.041
2.362
2.643
3.041
3.346
3.740
4.029
4.322
4.689
4.978
5.233
5.524
5.696
5.819
5.915
5.966
6.090
6.228
6.350
6.458
6.561
6.664
6.732
6.774
6.900
7.045
KR
1.000
1.301
1.477
1.602
2.000
2.362
2.681
2.978
3.371
3.670
3.960
4.336
4.602
4.845
5.107
5.250
5.360
5.410
5.438
5.521
5.555
5.595
5.624
5.647
5.667
5.677
5.685
5.698
5.706
Freon12
1.000
1.301
1.699
2.176
2.491
2.881
3.167
3.476
3.860
4.155
4.439
4.786
5.021
5.210
5.389
5.471
5.521
5.579
5.670
5.777
5.838
5.883
5.918
5.947
5.974
5.989
5.998
6.021
6.045
Freon22
1.000
1.301
1.699
2.176
2.491
2.845
3.130
3.435
3.839
4.134
4.418
4.774
5.017
5.220
5.418
5.530
5.571
5.617
5.691
5.808
5.876
5.925
5.964
5.998
6.029
6.045
6.057
6.079
6.104
D2
1.000
1.301
1.699
2.114
2.380
2.778
3.083
3.386
3.778
4.083
4.398
4.837
5.190
5.616
7.391
Ne
1.000
1.301
1.699
1.845
2.176
2.544
2.851
3.149
3.542
3.845
4.149
4.555
4.872
5.201
5.719
6.332
7.766
CH4
1.000
1.301
1.699
2.230
2.519
2.886
3.185
3.483
3.888
4.201
4.498
4.893
5.204
5.522
5.877
6.446
7.550
7.925
Values listed under each gas type are in volts (V).
Example: The gas in use is O2. Voltage output is 4.288 volts. True pressure of O2 is 2.00E-01 Torr
Kurt J. Lesker Company
Page 67
Instruction Manual
7.3.3.2
MGC-3200
CG1 0 - 7V or CG2 0 - 7V analog output correction factors - convection gauge
When using the Log-Linear convection gauge analog output mode (Log-Linear 0 - 7 V, 1 V/decade) for gases other
than N2 /, use the following look-up table and information to convert the analog output to pressure. The look-up
table has been derived from the equation provided in section 6.8
True
Pressure
(Torr)
1.00E-4
2.00E-4
5.00E-4
1.00E-3
2.00E-3
5.00E-3
1.00E-2
2.00E-2
5.00E-2
1.00E-1
2.00E-1
5.00E-1
1.00E+0
2.00E+0
5.00E+0
1.00E+1
2.00E+1
5.00E+1
1.00E+2
2.00E+2
3.00E+2
4.00E+2
5.00E+2
6.00E+2
7.00E+2
7.60E+2
8.00E+2
9.00E+2
1.00E+3
N2
0.000
0.301
0.699
1.000
1.301
1.699
2.000
2.301
2.699
3.000
3.301
3.699
4.000
4.301
4.699
5.000
5.301
5.699
6.000
6.301
6.477
6.602
6.699
6.778
6.845
6.881
6.903
6.954
7.000
Ar
0.000
0.301
0.699
0.845
1.146
1.519
1.820
2.117
2.511
2.808
3.100
3.494
3.778
4.057
4.389
4.602
4.763
4.895
4.946
4.991
5.053
5.130
5.207
5.274
5.338
5.375
5.400
5.455
5.512
He
0.000
0.301
0.699
0.903
1.204
1.602
1.908
2.207
2.607
2.914
3.217
3.638
3.973
4.346
6.130
O2
0.000
0.301
0.699
1.000
1.301
1.699
1.987
2.297
2.692
2.988
3.288
3.687
3.987
4.288
4.697
5.013
5.348
5.890
6.320
6.470
6.580
6.686
6.781
6.863
6.934
6.974
6.999
CO2
0.000
0.301
0.699
1.041
1.362
1.643
2.041
2.346
2.740
3.029
3.322
3.689
3.978
4.233
4.524
4.696
4.819
4.915
4.966
5.090
5.228
5.350
5.458
5.561
5.664
5.732
5.774
5.900
6.045
KR
0.000
0.301
0.477
0.602
1.000
1.362
1.681
1.978
2.371
2.670
2.960
3.336
3.602
3.845
4.107
4.250
4.360
4.410
4.438
4.521
4.555
4.595
4.624
4.647
4.667
4.677
4.685
4.698
4.706
Freon12
0.000
0.301
0.699
1.176
1.491
1.881
2.167
2.476
2.860
3.155
3.439
3.786
4.021
4.210
4.389
4.471
4.521
4.579
4.670
4.777
4.838
4.883
4.918
4.947
4.974
4.989
4.998
5.021
5.045
Freon22
0.000
0.301
0.699
1.176
1.491
1.845
2.130
2.435
2.839
3.134
3.418
3.774
4.017
4.220
4.418
4.530
4.571
4.617
4.691
4.808
4.876
4.925
4.964
4.998
5.029
5.045
5.057
5.079
5.104
D2
0.000
0.301
0.699
1.114
1.380
1.778
2.083
2.386
2.778
3.083
3.398
3.837
4.190
4.616
6.391
Ne
0.000
0.301
0.699
0.845
1.176
1.544
1.851
2.149
2.542
2.845
3.149
3.555
3.872
4.201
4.719
5.332
6.766
CH4
0.000
0.301
0.699
1.230
1.519
1.886
2.185
2.483
2.888
3.201
3.498
3.893
4.204
4.522
4.877
5.446
6.550
6.925
Values listed under each gas type are in volts (Vdc).
Example:
The gas in use is O2.
Voltage output is 3.288 volts.
True pressure of O2 is 2.00E-01 Torr
Kurt J. Lesker Company
Page 68
Instruction Manual
7.3.3.3
MGC-3200
CG1 NON-LIN or CG2 NON-LIN analog output correction factors - convection gauge
When using the Non-Linear convection gauge analog output mode for gases other than N2 /, use the following
look-up table and information to convert the analog output to pressure. The look-up table has been derived from
the equation provided in section 6.9
True
Pressure
(Torr)
0
1.00E-4
2.00E-4
5.00E-4
1.00E-3
2.00E-3
5.00E-3
1.00E-2
2.00E-2
5.00E-2
1.00E-1
2.00E-1
5.00E-1
1.00E+0
2.00E+0
5.00E+0
1.00E+1
2.00E+1
5.00E+1
1.00E+2
2.00E+2
3.00E+2
4.00E+2
5.00E+2
6.00E+2
7.00E+2
7.60E+2
8.00E+2
9.00E+2
1.00E+3
N2
0.3751
0.3759
0.3768
0.3795
0.384
0.3927
0.4174
0.4555
0.5226
0.6819
0.878
1.1552
1.6833
2.2168
2.8418
3.6753
4.2056
4.5766
4.8464
4.9449
5.019
5.1111
5.2236
5.3294
5.4194
5.4949
5.534
5.5581
5.6141
5.6593
Ar
0.375
0.3757
0.376
0.378
0.381
0.387
0.403
0.429
0.477
0.595
0.745
0.962
1.386
1.818
2.333
3.028
3.48
3.801
4.037
4.122
4.192
4.283
4.386
4.477
4.55
4.611
4.643
4.663
4.706
4.745
He
0.375
0.3755
0.3765
0.379
0.382
0.389
0.409
0.441
0.497
0.637
0.814
1.068
1.589
2.164
2.939
4.387
5.774
7.314
O2
0.375
0.376
0.377
0.38
0.384
0.392
0.417
0.453
0.521
0.679
0.868
1.141
1.664
2.195
2.814
3.672
4.225
4.62
4.916
5.026
5.106
5.2
5.315
5.422
5.515
5.592
5.633
5.658
5.713
5.762
CO2
0.375
0.376
0.377
0.381
0.385
0.395
0.412
0.462
0.536
0.705
0.9
1.179
1.668
2.172
2.695
3.316
3.67
3.903
4.071
4.154
4.336
4.502
4.621
4.708
4.775
4.83
4.86
4.877
4.919
4.955
KR
0.375
0.3755
0.3768
0.3772
0.379
0.384
0.395
0.415
0.451
0.544
0.668
0.847
1.194
1.536
1.921
2.429
2.734
2.966
3.075
3.134
3.269
3.384
3.466
3.526
3.573
3.613
3.632
3.645
3.674
3.69
Freon12
0.375
0.376
0.378
0.382
0.388
0.401
0.437
0.488
0.581
0.778
1.009
1.315
1.826
2.257
2.647
3.029
3.204
3.308
3.43
3.618
3.827
3.938
4.016
4.076
4.124
4.166
4.19
4.203
4.237
4.27
Freon22
0.375
0.376
0.378
0.381
0.388
0.4
0.432
0.48
0.566
0.764
0.99
1.291
1.805
2.247
2.666
3.09
3.33
3.414
3.509
3.66
3.883
4.005
4.088
4.151
4.203
4.247
4.271
4.286
4.321
4.354
D2
0.375
0.376
0.377
0.381
0.386
0.396
0.425
0.47
0.549
0.727
0.944
1.265
1.914
2.603
3.508
5.059
6.361
Ne
0.375
0.3757
0.3763
0.3782
0.381
0.388
0.405
0.433
0.484
0.608
0.768
1.002
1.469
1.976
2.631
3.715
4.605
5.406
6.159
6.483
6.661
6.726
6.767
6.803
6.843
6.89
6.92
6.942
7
7.056
CH4
0.375
0.3766
0.378
0.3825
0.3896
0.403
0.438
0.492
0.584
0.796
1.053
1.392
2.014
2.632
3.313
4.699
5.172
5.583
5.72
5.86
6.103
6.342
6.519
6.642
Values listed under each gas type are in volts (Vdc).
Kurt J. Lesker Company
Page 69
Instruction Manual
8
MGC-3200
Serial Communications
8.1 Device Specific Serial Communication Info
The MGC-3200 provides RS232 and RS485 serial communications capability. The following information and the
command protocol summaries listed in the following sub-sections of this chapter can be used to establish serial
communications with the device. Four distinct protocols (COM type) are defined: KJLC RS232 and RS485 protocol
as well as the RS232 and RS485 protocols compatible with GP Series 307 and 358 controllers. The user has access
from the front panel main menu to change settings for COM Type, Baud Rate, Data Bits, Parity, Stop Bits and
device Address (when using RS485).
Baud Rate is selectable at 300, 600, 1200, 2400, 4800, 9600, 19200 or 38400 baud.
Data bits may be set to either 7 or 8.
Parity selection may be set to None, Even or Odd.
Either 1 or 2 Stop Bits may be selected.
The device address when using RS485 can be within the range 00 to FF hexadecimal (Default = 01).
There is a finite period of time between the time a command is sent from a terminal (PC COM Port, for example)
and the point in time in which the MGC-3200 starts to send a response to that command. This delay is dependent
upon the command sent and the baud rate.
The maximum command repetition rate will depend on the length of the command sent and the response
received, as well as the baud rate. The maximum repetition rate for the baud rate you are using can be found in
the following table:
Selected Baud Rate
38400
19200
9600
4800
2400
1200
600
300
Kurt J. Lesker Company
Repetition Rate
38 ms
46 ms
61 ms
93 ms
156 ms
280 ms
530 ms
1030 ms
Receive to Transmit Time
26 μs
52 μs
1.0 ms
2.0 ms
4.1 ms
8.3 ms
16 ms
33 ms
Page 70
Instruction Manual
8.2
MGC-3200
KJLC RS232/RS485 Command Protocol Summary
The following notes are intended to be understood by the user when using KJLC’s RS232 and RS485 command
protocol with the MGC-3200.
1. Default settings are 19,200 baud rate, 8 data bits, No Parity, 1 stop bit.
2. The baud rate can be set to different values using the front panel soft-keys.
3. All Responses are 13 characters long.
4. ‘xx’ is the address of the device (00 thru FF). For RS232, ‘xx’ is replaced with two space characters.
5. <CR> is a carriage return, a non-printable character. Do not enter <CR> from your keyboard. A carriage
return, non-printable character may be entered as the Unicode C0 controls specified value: 0D
hexadecimal (13 decimal). From your keyboard, a key entry sequence of CNTL-M may be used to obtain
the required character for a carriage return when using certain terminal emulator programs.
6. ‘_’ represents a ‘space’ character. Press the space bar on your keyboard. Do not enter a ‘_’ (underscore)
character.
7. All commands sent to the module start with a ‘#’ character, and all normal responses from the module
start with a ‘*’ character. Error responses start with a “?”.
8. A valid address must be used [Factory default = 01] when using the RS485 protocol. The MGC-3200 will
not respond to a command with an invalid address while using RS485.
9. The command syntax examples used in the protocol summary table for ASCII are shown in scientific
notation. However, floating point notation is acceptable as long as a leading digit is entered as ‘0.’ or ‘1.’,
etc. There must be a digit to the left of the decimal point. For example, when constructing the syntax for
the command to set the CGn zero value (e.g., #xxTZn_x.xxE-pp<CR> when using scientific notation), use
either #xxTZn_0.00<CR>, or #xxTZn_0<CR>. A simple ‘0’ is valid for the pressure entry.
Kurt J. Lesker Company
Page 71
Instruction Manual
MGC-3200
8.3 KJLC RS232 and RS485 Command Protocol Summary
The RS232 mode is the same as RS485, except ADDRESS is ignored in RS232 mode and can be eliminated from the command
string or replaced with space characters. Responses will not return ADDRESS; the ADDRESS is replaced with space characters.
All pressure measurement responses are in absolute pressure units as selected by the user.
COMMAND
READ ION GAUGE
PRESSURE
BRIEF DESCRIPTION
Read the current
displayed pressure of the
ion gauge in the same
units of measure on
display
COMMAND SYNTAX
#xxRDIG<CR>
e.g., : #01RDIG<CR>
where, xx = the two digit
address of the device (node)
RESPONSE - EXAMPLES
*xx_y.yyEzpp<CR>
where,
y.yy = mantissa,
z = sign of the exponent +/and pp = the exponent
e.g., : *01_1.53E-06<CR>
When IG is off: *01_1.10E+03
When Hornet is not connected:
*01_9.90E+09
READ CGn
PRESSURE
Read the current pressure
for CGn in the same units
of measure on display
#xxRDCGn<CR>
e.g., : #01RDCG1<CR>
where, n=1 or 2 (CG1 or CG2)
READ AI PRESSURE
Read the current pressure
for AI in the same units of
measure on display
#xxRDAI<CR>
e.g., : #01RDAI<CR>
*xx_ y.yyEzpp <CR>
e.g., : *01_7.60E+02<CR>
When CG is over ranged:
*01_1.10E+03
*xx_ y.yyEzpp <CR>
e.g., : *01_7.60E+02<CR>
When AI is over ranged or not
powered: *01_1.10E+03
READ all Process
Control (PC, or
Relay) states
Read the current state of
all process control
setpoint relays
#xxRL<CR>
e.g., : #01RL<CR>
READ one PC state
Read the current state of
one process control
setpoint
#xxRLn<CR>
where n = 1,2,3,4,5 or 6
e.g., : #01RL1<CR>
Kurt J. Lesker Company
*xx_003F_RL_<CR>
In the example response
above, the ‘F’ represents the
first 4 relays; relays 5 and 6 are
the second digit (the ‘3’) of the
response. This example shows
that all relays are ON, i.e.,
energized. The ‘3F’ would
represent the binary string of
0011 1111, where 0011 is the 3
and 1111 is the F in ‘3F’
A response of 0003 means
that only RL1 and RL2 are ON,
i.e., energized
*xx_0_RL_OFF<CR>
*xx_1_RL_ON_<CR>
Page 72
Instruction Manual
MGC-3200
COMMAND
READ IG on/off
STATUS
BRIEF DESCRIPTION
Find out if Ion Gauge is
turned to ON and gauge is
reading pressure
COMMAND SYNTAX
#xxIGS<CR>
e.g., : #01IGS<CR>
TURN IG ON
Turn the Ion Gauge ON
#xxIG1<CR>
e.g., : #01IG1<CR>
#xxIGy<CR>
where,
Y=1= Turn ON;
y=0= Turn OFF
TURN IG OFF
Turn the Ion Gauge OFF
#xxIG0<CR>
e.g., : #01IG0<CR>
#xxIGy<CR>
where,
Y=1= Turn ON;
y=0= Turn OFF
READ DEGAS
on/off STATUS
Find out if Degas is ON or
OFF
#xxDGS<CR>
e.g., : #01DGS<CR>
TURN ON DEGAS
Turn ON the Ion Gauge
Degas
#xxDG1<CR>
e.g., : #01DG1<CR>
#xxDGy<CR>
where,
Y=1= Turn ON;
y=0= Turn OFF
TURN OFF DEGAS
Turn OFF the Ion Gauge
Degas
SET EMISSION
CURRENT
Choose 4mA or 100uA
emission current
#xxDG0<CR>
e.g., : #01DG0<CR>
#xxDGy<CR>
where,
Y=1= Turn ON;
y=0= Turn OFF
#xxSEy<CR>
e.g., : #01SE1<CR>
where, y=1=4mA; y=0=100μA
Kurt J. Lesker Company
RESPONSE - EXAMPLES
*xx_0_IG_OFF<CR>
*xx_1_IG_ON_<CR>
When Hornet device is not
connected: ?01_INVALID_<CR>
*xx_PROGM_OK<CR>
When IG error exists:
?01_INVALID_<CR>
When IG controlled by CG:
?01_INVALID_<CR>
When Hornet is not connected:
?01_INVALID_<CR>
To clear IG errors send an IG
OFF command: y=0=IG OFF
(this clears IG errors and allows
user to reactivate IG control)
*xx_PROGM_OK<CR>
Even though the IG will already
be OFF, when an IG Error
occurs, sending the IG OFF
command will clear errors
When Hornet device is not
connected: ?01_INVALID_<CR>
*xx_0_DG_OFF<CR>
*xx_1_DG_ON_<CR>
When Hornet device is not
connected: ?01_INVALID_<CR>
When connected to CCM500:
?01_INVALID_<CR>
*xx_PROGM_OK<CR>
When IG off:
?01_INVALID_<CR>
When device does not exist:
?01_INVALID_<CR>
When P > 5E-05 Torr:
?01_INVALID_<CR>
When connected to CCM500:
?01_INVALID_<CR>
*xx_PROGM_OK<CR>
When Hornet device is not
connected: ?01_INVALID_<CR>
When connected to CCM500:
?01_INVALID_<CR>
xx_PROGM_OK<CR>
When Hornet device is not
connected: ?01_INVALID_<CR>
When in Auto Ie mode:
?01_INVALID_<CR>
Page 73
Instruction Manual
COMMAND
READ EMISSION
CURRENT
SET FILAMENT
READ IG STATUS
BRIEF DESCRIPTION
Read emission current
setting to verify the SET
EMISSION CURRENT
command was accepted
Choose Filament 1 or 2
Finds out the cause of the
specified device inactive
reading
MGC-3200
COMMAND SYNTAX
#xxSES<CR>
e.g., : #01SES<CR>
#xxSFy<CR>
e.g., : #01SF1<CR>
where,
y=1 for F1; y=2 for F2
#xxRSIG<CR>
e.g., : #01RSIG<CR>
When Hornet or device is not
connected, response is:
?01_INVALID_<CR>
READ SW VERSION
SET CGn ZERO
Read the part number and
revision number (version)
of the firmware
Set the zero or vacuum
calibration point for CGn
#xxVER<CR>
e.g., : #01VER<CR>
#xxTZCGn <CR>
e.g., : #01TZCG1_0<CR>
e.g., : #01TZCG2_1.23E-02
<CR>
where,
n=1 or 2 (for, CG1 or CG2)
SET CGn SPAN
Set the span or
atmosphere calibration
point for CGn
y.yy = mantissa,
z = sign of the exponent +/and pp = the exponent
#xxTSCGn_y.yyEzpp<CR>
e.g., : #01TSCG1_
7.60E+02<CR>
where,
n=1 or 2 (for, CG1 or CG2)
y.yy = mantissa,
z = sign of the exponent +/and pp = the exponent
Kurt J. Lesker Company
RESPONSE - EXAMPLES
*xx_0.1MA_EM<CR>
*xx_4.0MA_EM<CR>
When Hornet device is not
connected: ?01_INVALID_<CR>
*xx_PROGM_OK<CR>
*xx_00_ST_OK (IG status is OK)
*xx_01_OVPRS (overpressuresystem pressure is too high)
*xx_02_EMISS (Ie control fail)
*xx_04_ FLVLO (low filament
voltage condition)
*xx_08_ FLOPN (selected
filament is open circuit)
*xx_10_ DEGAS (IG is in DEGAS
mode of operation)
*xx_20_ ICLOW (IG collector
current is below normal range)
*xx_40_ FLIHI (filament drive
current is too high)
*xx_mmmmm-vv
e.g., : *01_01306-11 <CR>
*xx_PROGM_OK<CR>
When P > 100 mTorr:
?01_INVALID_<CR>
When device is not connected:
?01_INVALID_<CR>
When requested gauge
number <1 or >2:
?01_SYNTX_ER <CR>
*xx_PROGM_OK<CR>
When P < 400 Torr:
?01_INVALID_<CR>
When requested P < 400Torr:
?01_INVALID_<CR>
When requested P > 1000mT:
?01_INVALID_<CR>
When device is not connected:
?01_INVALID_<CR>
When requested gauge
number <1 or >2:
?01_SYNTX_ER <CR>
Page 74
Instruction Manual
MGC-3200
The following additional commands were implemented for units shipped after January 2017. The first four
parameters shown below are the same parameters displayed if the setup and programming screen is set to
RESEARCH mode.
COMMAND
READ IG EMISSION
CURRENT
BRIEF DESCRIPTION
Read the actual IG
emission current being
measured by the gauge
COMMAND SYNTAX
#xxRDIGE<CR>
(eg: #01RDIGE<CR>)
RESPONSE
*xx_y.yyEzpp<CR>
(eg: *01_1.00E-04<CR>)
When IG is off: *01_0.00E+00
When device does not exist:
*01_0.00E+00
READ IG FILAMENT
VOLTAGE
Read the current IG
filament voltage
#xxRDIGV<CR>
(eg: #01RDIGV<CR>)
*xx_y.yyEzpp<CR>
(eg: *01_2.30E+00<CR>)
When IG is off: *01_0.00E+00
When device does not exist:
*01_0.00E+00
READ IG FILAMENT
CURRENT
Read the current IG
filament current
#xxRDIGA<CR>
(eg: #01RDIGA<CR>)
*xx_y.yyEzpp<CR>
(eg: *01_3.10E+00<CR>)
When IG is off: *01_0.00E+00
When device does not exist:
*01_0.00E+00
READ IG ION
CURRENT
Read the current IG ion
current
#xxRDIGC<CR>
(eg: #01RDIGC<CR>)
*xx_y.yyEzpp<CR>
(eg: *01_4.77E-09<CR>)
When IG is off electrometer
offset voltage is indicated:
*01_9.64E-03
When device does not exist:
*01_0.00E+00
GET FILAMENT
SELECTION
Read current filament
selection
#xxRF<CR>
(e.g., #01SF<CR>)
*xx_FIL SEL1<CR>
*xx_FIL SEL2<CR>
NOTES:
1.
2.
3.
4.
5.
<CR> is a carriage return (0x0D).
<LF> is a line feed (0x0A); this is the terminator character.
The ‘_’ used in certain defined commands represent a space character. Space characters may be omitted
from commands.
GP 307 and 358 protocol response strings are variable length.
Hardware handshake controls do not exist on B-RAX 3200 (e.g., RTS, CTS, DTR).
Kurt J. Lesker Company
Page 75
Instruction Manual
8.4
MGC-3200
RS232 GP 307 and 358 Protocol
RS232 protocol compatible with the GP Series 307 and 358 controller is defined in the following table. Please see qualifying
notes at bottom of table.
COMMAND
BRIEF DESCRIPTION
COMMAND SYNTAX
RESPONSE - EXAMPLES
READ IGn
Read the current IG
DS_ IGn<CR> <LF>
y.yyEzpp<CR><LF>
or, READ IG
pressure in units of Torr
e.g., : DS_ IG1<CR><LF>
e.g., : 1.53E-06<CR><LF>
only,
where, y.yy = mantissa,
1 = fil1, 2 = fil2
or
z = sign of the exponent +/If you have selected
DS_ IG<CR> <LF>
and pp = the exponent
filament 1 to operate with e.g., : DS_ IG1<CR><LF>
the IG ON (see ‘IG ON’
When device is not connected:
below), then enter IG1 in
9.90E+09
the READ IGn command;
When IG is off: 9.90E+09
use IG2 if filament 2 is
turned ON
READ CGn
Read the current CG
DS_ CGn<CR> <LF>
y.yyEzpp<CR><LF>
pressure in units of Torr
e.g., : DS_ CG1<CR><LF>
e.g., : 1.53E+02<CR><LF>
only
where, n = 1 for device CG1 When device is not connected:
and n = 2 for CG2
9.90E+09
When CG is over ranged:
9.90E+09
READ PCs in long
Read the current Process
PCS<CR> <LF>
x,x,x,x,x,x<CR><LF>
form
Control setpoint relay
e.g., : PCS<CR><LF>
e.g., : 1,1,0,0,0,0<CR><LF>
status
Relays 1 and 2 are energized;
o.
order is Relay N 1,2,3,4,5,6
from left to right.
READ PCs in binary Read the current Process
PCS_B<CR> <LF>
x<CR><LF>
form
Control setpoint relay
e.g., : PCS_B<CR><LF>
e.g., : C<CR><LF>
status
The Latin alphabet character
“C” corresponds to binary
01000011 or, 43hex, which
represents relay 1 and relay 2
are energized (ON). Note that
the positions of the relay order
{continued on next page}
in the returned code character
{continued from previous
are reversed from the long
page}
form as described for the READ
PCs in long form command
above.
In binary form, the order is
o.
Relay N 6, 5, 4, 3, 2, and 1 as
read from left to right.
READ individual PC Read the current
PCS_n<CR> <LF>
s<CR><LF>
individual Process Control e.g., : PCS_1<CR><LF>
where, s=state of relay:
setpoint relay status
1 = ON; 0 = OFF
e.g., : 1<CR><LF> (PC Relay 1
is energized, or 0 when not)
Kurt J. Lesker Company
Page 76
Instruction Manual
COMMAND
IG ON
MGC-3200
BRIEF DESCRIPTION
Turn specified IG filament
ON
Note that the functions of
IG ON/OFF and Filament
Selection are combined in
the single IG ON/OFF
command. When turning
the IG to ON, the specific
filament chosen is selected
when sending the IG
ON/OFF commands.
Turn specified IG filament
OFF
COMMAND SYNTAX
IGn_ON<CR> <LF>
e.g., : IG1_ON<CR><LF>
where,
n = 1 = fil1, 2 = fil2
RESPONSE - EXAMPLES
OK<CR><LF>
e.g., : OK<CR><LF>
When IG is already ON:
INVALID
When device is not connected:
INVALID
IGn_OFF<CR> <LF>
e.g., : IG1 OFF<CR><LF>
where,
n = 1 = fil1, 2 = fil2
IG DEGAS ON
Turn IG Degas ON
DG_ON<CR> <LF>
e.g., : DG ON<CR><LF>
OK<CR><LF>
e.g., : OK<CR><LF>
When IG is already OFF:
INVALID
When device is not connected:
INVALID
OK<CR><LF>
e.g., : OK<CR><LF>
When Degas is already ON:
INVALID
When device is not connected:
INVALID
When IG is OFF: INVALID
IG DEGAS OFF
Turn IG Degas OFF
DG_OFF<CR> <LF>
e.g., : DG OFF<CR><LF
IG Degas Status
Detect Degas on/off
status
DGS<CR> <LF>
e.g., : DGS<CR><LF>
IG OFF
OK<CR><LF>
e.g., : OK<CR><LF>
When Degas is already OFF:
INVALID
When device is not connected:
INVALID
1<CR><LF>
e.g., : 1<CR><LF> when IG is
ON, or 0<CR><LF> when off
When device is not connected:
INVALID
NOTES:
6.
7.
8.
<CR> is a carriage return (0x0D).
<LF> is a line feed (0x0A); this is the terminator character.
The ‘_’ used in certain defined commands represent a space character. Space characters may be omitted from
commands.
9. GP 307 and 358 protocol response strings are variable length.
10. Hardware handshake controls do not exist on MGC-3200 (e.g., RTS, CTS, DTR).
Kurt J. Lesker Company
Page 77
Instruction Manual
8.5
MGC-3200
RS485 GP 307 and 358 Protocol
RS485 protocol compatible with the GP Series 307 and 358 controllers is defined in the following table. Please see the
qualifying notes listed at bottom of table.
COMMAND
BRIEF DESCRIPTION
COMMAND SYNTAX
RESPONSE - EXAMPLES
READ IGn
Read the current IG
#xxDS_IGn<CR>
y.yyEzpp<CR>
or, READ IG
pressure in units of Torr
e.g., : #01DS IG1<CR>
e.g., : 1.53E-06<CR>
only
where, n = 1 = fil1, 2 = fil2
where, y.yy = mantissa,
z = sign of the exponent +/or
and pp = the exponent
DS_ IG<CR> <LF>
e.g., : DS_ IG1<CR><LF>
When device is not connected:
9.90E+09
When IG is off: 9.90E+09
READ CGn
Read the current CG
#xxDS_CGn<CR>
y.yyEzpp<CR>
pressure in units of Torr
e.g.,: #01DS CG1<CR>
where, y.yy = mantissa,
only
where,
z = sign of the exponent +/n = 1 or 2 (CG1 or CG2)
and pp = the exponent
READ PCs long
form
Read the current PC
setpoint status
#xxPCS<CR>
e.g., : #01PCS<CR>
READ PCs binary
form
Read the current PC
setpoint status
#xxPCS_B<CR>
e.g. , : #01PCS B<CR>
READ individual PC
Read the current
individual PC setpoint
status
#xxPCS_x<CR>
e.g., : #01PCS_1<CR><LF>
IG ON
Turn specified IG filament
ON
#xxIGn_ON<CR>
e.g., : #01IG1 ON<CR>
where,
n = 1 = fil1, 2 = fil2
IG OFF
Turn specified IG filament
OFF
#xxIGn_OFF<CR>
e.g., : #01IG1 OFF<CR>
n = 1 = fil1, 2 = fil2
Kurt J. Lesker Company
e.g., : 1.53E+02<CR>
When device is not connected:
9.90E+09
When CG is over ranged:
9.90E+09
x,x,x,x,x,x<CR>
e.g., : 1,1,0,0,0,0<CR> (Relays
1 and 2 are energized; Relays 3
- 6 are not energized)
x<CR>
e.g., : C<CR> (where ‘C’ is the
Unicode character C,
expressed as 01000011 in
binary notation or 43
hexadecimal)
x<CR>
e.g., : 1<CR> (where ‘1’
indicates PC 1 is energized; 0
when not)
OK<CR>
e.g., : OK<CR>
When IG already ON: INVALID
When device is not connected:
INVALID
OK<CR>
e.g., : OK<CR>
When IG already OFF: INVALID
When device is not connected:
INVALID
Page 78
Instruction Manual
MGC-3200
COMMAND
IG DEGAS ON
BRIEF DESCRIPTION
Turn IG Degas ON
COMMAND SYNTAX
#xxDG_ON<CR> <LF>
e.g., : #01DG_ON<CR
IG DEGAS OFF
Turn IG Degas OFF
#xxDG_OFF<CR>
e.g.,: #01DG_OFF<CR>
IG Degas Status
Detect Degas on/off
status
#xxDGS<CR>
e.g., : #01DGS<CR>
RESPONSE - EXAMPLES
OK<CR>
e.g., : OK<CR>
When Degas already ON:
INVALID
When device is not connected:
INVALID
When IG is OFF: INVALID
OK<CR>
e.g., : OK<CR>
When Degas already OFF:
INVALID
When device is not connected:
INVALID
1<CR>
e.g., : 1<CR> (or 0 when off)
When device is not connected:
INVALID
NOTES:
1. <CR> is a carriage return (0x0D).
2. The ‘_’ used in certain defined commands represent a space character. Space characters may be omitted from
commands.
3. GP 307 and 358 protocol response strings are variable length.
Kurt J. Lesker Company
Page 79
Instruction Manual
9
9.1
MGC-3200
Service
Calibration
Every KJLC module is calibrated prior to shipment using nitrogen. Care should be exercised when using gases
other than nitrogen (N2) / air (see previous sections regarding the use of gases other than N2/air).
9.2
Troubleshooting - Operation
Indication
Possible Cause
Possible Solution
Display on MGC-3200 controller indicates
OFF
No power
Check cable connections and verify that
power is being supplied
The connector may not be wired correctly
Check cable connections and verify that
power is being supplied
Sensor not in the proper location on
vacuum system
Ensure the sensor is located in
appropriate location on vacuum chamber
The process gas is different from the gas
(Nitrogen) used to calibrate the KJLC351
Apply gas sensitivity correction factor if
applicable
Sensor has been dropped causing
mechanical damage
Replace the ion gauge sensor tube
The gauge sensor tube is contaminated
Degas the sensor or replace the sensor
Leak in the vacuum system
Re-check for leak in the system. Re-check
that all metal seals are used when
-7
operating below 1.00 x 10 TORR
Readings appear very different from
expected pressure
-3
Decrease pressure below required value
Pressure exceeds 5.00 x 10 Torr at 0.10
mA (100 µA) emission current
-2
Decrease pressure below required value
Emission Control not functioning
Switch to the other filament, replace ion
gauge sensor tube due to possible
filament failure or contamination
Research Screen shows filament voltage is
present but filament current stays at 0.00
Filament is open
Switch to the other filament, replace
sensor or electronics
Research Screen shows filament voltage
and filament current are present but gauge
is shutting off
Filament is contaminated or burned out
Switch to the other filament or replace
sensor
Unable to initiate degas
System pressure above 5.00 x 10 Torr
Decrease pressure below the required
value
Voltage to filament too high
Filament contaminated or near end of its
life
Switch to the other filament or replace
sensor
Setpoint does not actuate
Incorrect setup
Check setpoint setup
Ion gauge cannot be turned on
Kurt J. Lesker Company
Pressure exceeds 1.00 x 10 Torr at 4 mA
emission
-5
Page 80
Instruction Manual
9.3
MGC-3200
Troubleshooting - Error Messages
Indication
Possible Cause
Possible Solution
OVERPRESSURE
The calculated pressure is greater than
maximum setting for emission current
Change to 100 µA emission current which
will operate at higher pressures
System pressure too high
Reduce pressure
The ion current (IC) is below the minimum
parameter
Determine source of contamination
Sensor contamination, possible coating on
collector inhibiting ion collection
Replace the Ion gauge sensor tube
Electrometer failure
Contact KJLC
The desired emission current (IE) could not
be established
Switch to 4mA emission current and
attempt repeated filament starts to clean
filament
Gauge contamination, possible coating on
filament or grid surfaces.
Switch to second filament, degas
End of filament life
Replace the Ion gauge sensor tube
System pressure too high
Reduce pressure
LV Failure
The Filament voltage could not be
established; Electronics Failure
Contact KJLC
F1 or F2 OPEN
Filament 1 or 2 is open
Switch to the other filament or replace the
Ion gauge sensor tube
F1 or F2 OPEN
Faulty electronics
Replace electronics
CONNECT IGM
KJLC351 not connected
Plug in KJLC351
Faulty cable
Replace cable
Faulty KJLC351 electronics
Replace KJLC351 electronics
Internal PCB not communicating
Contact KJLC
ION CUR FAIL
EMIS FAIL
COMM IO FAIL
9.4
Clearing Error Messages
Once the cause of the IG error has been determined and resolved, the IG error must be cleared before the IG
filament can be turned on again. To clear errors, simply press the IG ON/OFF key.
Kurt J. Lesker Company
Page 81
Instruction Manual
9.5
MGC-3200
Research Screen
The OLED setup screen of the MGC-3200 can be configured to display important, critical operating parameters of
the KJLC351. These parameters can be displayed in the Research display mode as described below.
9.5.1 Research Screen (Diagnostic Display)
In addition to the normal pressure measurement screen the MGC-3200 provides a diagnostic display screen that
allows you to monitor the measurements of the critical electrical parameters used for measurement of very low
pressures, i.e., high vacuum, made by the ionization gauge.
Over time, the hot cathode (filament) of the ionization gauge may degrade. The KJLC351 coated iridium filaments
are made using yttrium oxide to lower the work function of the heated wire material and enable substantial
emission of electrons from the hot cathode. These electrons are accelerated in an electric field toward the grid
structure of the ionization gauge device. The electron emission is commonly referred to as the ‘Emission Current’.
As the emission current electrons orbit within the electric field formed by the bias voltages applied to the grid,
collector and filament electrodes, the molecules that the gas is comprised of will be ionized by these energetic
electrons.
The positive ions that are created within the grid structure are captured in another electric potential field created
by the grid structure (at +180 Vdc with respect to ground potential) and the collector wire (at zero volts, i.e.,
ground potential). In simple terms, the ions collected by the collector electrode (a small diameter wire within the
grid electrode structure) are measured with an electrometer circuit connected to the collector. The amount of
ion current measured is directly proportional to the density of the gas within the ion gauge transducer. This ion
current is commonly referred to as the ‘Collector Current’.
From the collector current measured, which is directly proportional to the gas density inside the ion gauge
transducer enclosure, the pressure inside the ion gauge transducer can be calculated. The Research display
screen is a very useful diagnostic tool to troubleshoot issues with the sensor or the electronics.
This mode displays the emission current, ion current, filament voltage and filament current. In the following
emission current is 4.00E-3 amperes, Ion current is 4.00E-11 amperes, filament voltage is 1.5 Vdc and filament
current is 1.9 amperes.
RESEARCH Display Mode
Emission current
value (ampere, A)
Ion current
value (A)
Filament
Voltage
Filament voltage (Vdc)
(Vdc)
Filament current (A)
Example - Research Display Mode of Critical KJLC351 Hot-Cathode Ion Gauge Measurement Parameters
Kurt J. Lesker Company
Page 82
Instruction Manual
MGC-3200
The Pressure, Ion Current (Collector Current) and Emission Current are indications that the ionization gauge
transducer is operating and pressure (vacuum) is being measured. In the above example, most of the critical,
measured quantities required for the calculation of measured pressure are displayed. The relationship of these
parameters leads to the calculation of pressure given by P = IC • (IE • S)-1 where IC is the Ion Current, IE is the
Emission Current and S is the Sensitivity of the specific ion gauge sensor.
The pressure indication may be checked by using the displayed values and calculating the pressure as indicated by
the top LED display line on the MGC-3200.
Other important information such as Filament Voltage and Filament Current are also given in the Research display
screen. These values vary widely dependent upon filament design type, material used for constructing the
filament, filament condition and operating emission current. The product of the filament voltage and current is
the power dissipation (V•A) required to maintain the set emission current. The interpretation of these displayed
values is a qualitative measure. The values will change over time dependent upon the pressure, filament coating
condition and possibly even surface properties of the grid electrode. It is a good practice to make note of these
values at initial installation and from time-to-time during the operating lifetime of the ion gauge sensor.
A new KJLC351 may operate at 100 μA emission current with only 3 to 4 watts of power required (e.g., 1.5 V @ 2.0
A). By increasing the emission current to 4 mA, the power requirement may increase to 4 or 5 watts (e.g., 2.0 V @
2 to 2.5 A). Again, the values mentioned here are representative; the actual values you may see for the KJLC351
you are using will be different and will vary over time and from device to device. In general, keeping a record of
the filament heating power (given by the Filament Voltage and Filament Current readings) will aid you in
monitoring the condition of your gauge filaments over time and, perhaps, give you an indication of when to
schedule replacement of either the device or the filament assembly.
In cases where the ion gauge sensor does not turn ON or does not stay in the ON condition after you have made
sure that the pressure is below the maximum permissible pressure for the emission current setting you have
chosen, you will be able to monitor the values displayed in the RESEARCH screen and determine if the turn ON /
stay ON trouble is related to filament condition. There are maximum operating levels for filament voltage and
current; if either of these is exceeded, the KJLC351 control circuitry will sense the condition and force an OFF
condition.
The following table (Research - Ion Gauge Diagnostic Display) is intended to assist you in using the information
provided in this display (when using the KJLC351) as a means to ascertain if the ion gauge transducer is
performing as expected under your vacuum chamber operating conditions. There are various causes of trouble
that at times may make it difficult to use a single measurement parameter as an indicator of what the problem is.
In general, if you have monitored and recorded the values displayed in the Research Screen over time, you may be
able to detect a pattern or trend that, if correlated to a particular failure mode, may prove to be a valuable
indication of probable cause.
The values of filament voltage and current presented below are approximate values that one may see in the
Research Screen. The representative, average values used in this table may vary depending on the condition of
the filament and the vacuum chamber environment. For example, you may see a reading of 2.0 V at 100 μA
emission current with a corresponding filament drive current of 2.1 A. This doesn’t mean that because the
voltage is higher than the value listed (1.5 V) above that there is a problem with the IG. The readings taken should
Kurt J. Lesker Company
Page 83
Instruction Manual
MGC-3200
be viewed with the notion that there may be an indication of reaching end-of-useful filament lifetime if the power
required to sustain emission current continues to increase over time.
Indication
Filament voltage values are
present for several seconds
immediately after turning IG ON,
but then the values are zero
Possible Cause
Filament is contaminated or
filament has reached end-of-useful
operating life for required emission
current setting
Possible Solution
Switch emission current setting from initial
setting and re-start the IG; make several
attempts to establish emission current at both
100 μA and 4 mA.
Switch to second filament or replace ion gauge
sensor
All parameters in the RESEARCH
screen are zero after IG turn ON
is attempted
Failed electronics
Replace the KJLC351 electronics
KJLC351 filament voltage is
greater than 1.7 V and filament
current is greater than 2.5 A with
emission current = 100 μA
Filament nearing end-of-usefuloperating-life
Switch to second filament or replace ion gauge
sensor
KJLC351 filament voltage is
greater than 2.3 V and filament
current is greater than 2.7 A with
emission current = 4 mA
Filament nearing end-of-usefuloperating-life
KJLC351 may be operated at either 100 μA or
4 mA emission current setting. If trouble with
maintaining 4 mA emission current (Ie)
persists, switch to 100 μA emission current.
9.6
Maintenance
In general, maintenance is not required for your KJLC ion gauge module, convection gauge and control unit.
Periodic performance checks may be done by comparing the gauge to a known reference standard. When using
the transducer in gases containing contaminants or materials that react with the filaments of the hot cathode ion
gauge, periodic degas and switching to the alternate filament from time-to-time is recommended for longest
useable transducer lifetime. When the hot cathode (filament) of the ionization gauge transducer is at or near
end-of-life, transducer (sensor) replacement is recommended.
Kurt J. Lesker Company
Page 84
Instruction Manual
MGC-3200
10 Factory Service and Support
If you need help setting up, operating, troubleshooting, or obtaining a return materials authorization number
(RMA number) to return the module for diagnosis, please contact us during normal business hours (8:00am to
5:00pm Eastern Standard Time) Monday through Friday, at 1-412-387-9200 or e-mail us at gauging@Lesker.com.
For the safety of our employees, you must provide a history of the gauge detailing what gases have been used.
We cannot accept gauges that have been exposed to hazardous materials.
11 Warranty
SELLER warrants that its products are free of defects in workmanship and material and fit for the uses set forth in
SELLER's catalog or product specifications, under the normal use and service for which they are intended.
The entire warranty obligation of SELLER is for the repair or replacement, at SELLER's option, of products or parts
(examination of which shall disclose to SELLER's satisfaction that it is defective) returned, to SELLER's plant,
properly identified within five years after the date of shipment from KJLC Plant. BUYER must obtain the approval
of SELLER and a return authorization number prior to shipment.
Alteration or removal of serial numbers or other identification marks renders this warranty void. The warranty
does not apply to products or components which have been abused, altered, operated outside of the
environmental specifications of the product, improperly handled or installed, or units which have not been
operated in accordance with SELLER's instructions. Furthermore the warranty does not apply to products that
have been contaminated, or when the product or part is damaged during the warranty period due to causes other
than ordinary wear and tear to the product including, but not limited to, accidents, transportation, neglect,
misuse, use of the product for any purpose other than that for which it was designed.
THIS WARRANTY IS EXCLUSIVE AND IN LIEU OF ALL OTHER WARRANTIES, EXPRESS OR IMPLIED, INCLUDING ANY
IMPLIED WARRANTY OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE. THIS WARRANTY EXTENDS ONLY
IN FAVOR OF THE ORIGINAL BUYER. THE BUYER'S SOLE REMEDY SHALL BE THE REPAIR OR REPLACEMENT, AS IS
EXPRESSLY PROVIDED HEREIN, OF ANY WARRANTED DEFECTIVE PRODUCT OR PART, AND UNDER NO CIRCUMSTANCE
SHALL SELLER BE LIABLE TO BUYER OR ANYONE ELSE FOR ANY CONSEQUENTIAL DAMAGES TO PERSONS OR PROPERTY,
FOR INCIDENTAL DAMAGES OR LOSS OF TIME, FOR ANTICIPATED OR LOST PROFITS, OR ANY OTHER LOSS INCURRED BY
THE BUYER RELATED TO THE PRODUCT COVERED BY THIS WARRANTY. THIS EXCLUSIVE REMEDY SHALL NOT BE
DEEMED TO HAVE FAILED OF ITS ESSENTIAL PURPOSE SO LONG AS SELLER IS WILLING AND ABLE TO REPAIR OR
REPLACE DEFECTIVE PARTS IN THE PRESCRIBED MANNER. THIS LIMITED WARRANTY MAY NOT BE MODIFIED BY SELLER
UNLESS SUCH MODIFICATION OR WAIVER IS IN WRITING, EXECUTED BY AN AUTHORIZED OFFICER OF SELLER.
Kurt J. Lesker Company
Page 85
Instruction Manual
Kurt J. Lesker Company
MGC-3200
Page 86
Kurt J. Lesker Company
1925 Rt. 51
Jefferson Hills, PA 15025
USA
Phone: +1-412-387-9200
Fax: +1-412-384-2745
E-mail: gauging@lesker.com
www.lesker.com
p/n 002256-105