YES-1224P CVD Manual

s
Yield Engineering Systems, Inc.
203-A Lawrence Drive
Livermore, CA 94551-5152
1-925-373-8353 (worldwide)
1-888-YES-3637 (U.S. toll free)
Fax: 1-925-373-8354
info@yieldengineering.com
www.yieldengineering.com
YES-1224P Manual
Chemical Vapor Deposition System – With Plasma
•
•
•
•
Installation
Operation
Software
Maintenance
610-10632-01, Revision 0
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900-10580-02
SCOPE: This manual explains in detail how to use
the YES-1224P(E). We hope you find it clear,
concise, and capable of answering any questions
you may have regarding this system. If we can
assist you further, please feel free to contact us at
(925) 373-8353. Our Field Service Department will
be happy to help you.
WARNING!!!
The YES-1224P(E) systems are designed to work
with a wide variety of silanes and process gases.
However, due to the number of usable chemicals
YES cannot guarantee final results of silanes or any
other chemical and does not take responsibility for
any harm either to the system or persons for use of
other chemicals within the system. The operator
must be aware of the potential dangers in mixing
chemicals and choose a compatible solvent when
cleaning the flask/chemical delivery system. Injury
and/or death may be caused by not understanding
associated compatibility, heat, and vapor pressure
issues while using this equipment.
CAUTION!!!
The use of fluorinated compounds will infuse fluorine
into inner chamber component surfaces, and is virtually
impossible to remove. Substrates that are sensitive to
fluorine cannot be processed once these compounds have
been introduced. Contact YES for specifics on the use of
unusual gases.
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Table of Contents
Table of Contents
Table of Contents........................................................................... iii
List of Tables ................................................................................. xi
Introduction................................................................................... 12
Applications ............................................................................. 12
Benefits ..................................................................................... 13
Features .................................................................................... 14
Tool Components..................................................................... 16
Process Overview..................................................................... 17
CVD ....................................................................................... 17
Plasma Cleaning ................................................................... 17
Process Gases & Pressure Control....................................... 18
Plasma Generation................................................................ 18
Options ..................................................................................... 19
Optional Auto LN2 Refill System Power................................ 19
Vacuum Pump........................................................................ 19
Standard Data Collection...................................................... 19
Ethernet Data Collection....................................................... 19
Specifications ........................................................................... 20
Process Exposed Parts .......................................................... 20
Additional Parts..................................................................... 20
Wafer Capacity...................................................................... 20
Slide Throughput ................................................................... 20
Overall Dimensions ............................................................... 20
Cold Trap Capacities ............................................................ 20
System Power......................................................................... 21
Optional Auto LN2 Refill System Power................................ 21
Energy Consumption .............................................................. 21
Mass Balance ........................................................................... 22
Vent Gas Consumption .......................................................... 22
Reactant Gas Consumption ................................................... 22
Installation..................................................................................... 23
Unpacking Check List............................................................. 23
Getting Ready .......................................................................... 24
Location Requirements.......................................................... 24
Light Tower Installation ........................................................ 25
Vacuum Pump Requirements................................................. 25
Oil-Sealed Plasma Vapor Vacuum Pump Installation (Option)
............................................................................................... 26
Dry Scroll Plasma Vacuum Pump Installation (Option)....... 28
Facilities.................................................................................... 29
Facilities Drawing................................................................. 29
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Main System Power ............................................................... 30
Piping .................................................................................... 30
Vapor Line ............................................................................. 30
Chemical Flask...................................................................... 30
Infusion Lines ........................................................................ 31
Bottle Chemical Interface...................................................... 31
Bottle Head Purge Interface.................................................. 31
Vent/Seal Purge Nitrogen...................................................... 31
Bottle Head Purge Nitrogen.................................................. 32
Process Nitrogen ................................................................... 32
Vapor Vacuum ....................................................................... 32
Plasma Vacuum ..................................................................... 32
Pneumatics ............................................................................ 32
Pneumatic .............................................................................. 32
Nitrogen/CDA........................................................................ 32
Anhydrous Ammonia ............................................................. 33
(Process Gas) ........................................................................ 33
Plasma Gases ........................................................................ 33
Pump Exhaust........................................................................ 33
Side Assembly Exhaust .......................................................... 33
Door Seal Purge .................................................................... 33
Vapor Detection..................................................................... 34
Optional LN2 Auto Refill System Supply ............................... 34
Preset Parameter Settings ..................................................... 35
LN2 Auto Refill Program Sequence ...................................... 36
Electrical Oven Power Distribution...................................... 37
Touch Screen Interface.......................................................... 37
System Controller .................................................................. 38
Input/Output List ................................................................... 38
Temperature Control ............................................................. 40
Pressure Control ................................................................... 40
Over Temp Monitor ............................................................... 40
Getting Started .............................................................................. 41
Tool Assembly.......................................................................... 41
Pneumatic Nitrogen/CDA...................................................... 41
Vent/Seal Purge Nitrogen...................................................... 41
Bottle Purge Nitrogen............................................................ 41
Plasma Gases ........................................................................ 41
Vapor Vacuum Accessories ................................................... 41
Plasma Vacuum Accessories ................................................. 42
Exhaust .................................................................................. 42
AC Cord................................................................................. 42
Pump Outlets ......................................................................... 42
Anhydrous Ammonia ............................................................. 43
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Ammonia Pressure................................................................. 43
Source Chemical Purge Regulator........................................ 43
RF Power Supply Cord.......................................................... 43
RF Supply Communications Cable........................................ 43
RF Power Output Cable ........................................................ 44
Start Vapor Vacuum Pump.................................................... 44
Start Plasma Vacuum Pump.................................................. 44
Clean Chamber...................................................................... 44
Set Vent/Seal Purge N2 Pressure........................................... 44
Set Bottle Purge N2 ................................................................ 44
Pressure................................................................................. 44
Adjust Ammonia Pressure (Process Gas).............................. 45
Set Plasma Gas Pressures (Gas 1-3)..................................... 45
Vapor Detection..................................................................... 45
Flask/Chamber Leak Check and Evacuation ........................ 46
Temperature Controller Settings........................................... 47
Temperature Controller Set Points ....................................... 48
Liquid N2 Trap Temp/Volume Alarm Trip Point ................... 49
Pressure Variables ................................................................ 49
Process Variables.................................................................. 50
Installing Fresh Chemical Bottles ......................................... 54
Regulate Bottle Head Purge Pressure................................... 55
Recipe Management .............................................................. 55
Prime Lines Pump 1-2 ........................................................... 56
Preprogrammed Prime Lines Field Values........................... 57
Infusion Volume /Pulse Variables ......................................... 57
Setting Infusion Volume /Pulse Variables ............................. 58
Vapor Cure Procedure .......................................................... 60
Liquid N2 Trap/Thermocouple Installation ........................... 60
Optional LN2 Auto Refill System Assembly ........................... 62
Tool Adjustment...................................................................... 64
Adjust Temp Controller Set Point.......................................... 64
Set Pressure Variables .......................................................... 64
Set Process Variables ............................................................ 65
Process Description....................................................................... 66
Plasma Process Outline........................................................... 66
Chemical Vapor Deposition Outline...................................... 66
Recommended Process Temperature .................................... 67
Process Sequence .................................................................. 67
Establishing a Baseline............................................................ 69
Running a Process ................................................................... 69
With Fresh Chemical Installed.............................................. 69
Running Additional Processes............................................... 70
Running Cleaning Recipe 8 & 9............................................ 70
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Prime Lines After Cleaning Recipe ....................................... 72
Liquid Removal Procedure.................................................... 72
Operator Interface ......................................................................... 73
Operator Controls ................................................................... 73
Main Power Disconnect ........................................................ 73
Emergency Off Buttons.......................................................... 73
Console Cover Interlock........................................................ 73
Console Pressure Interlock ................................................... 73
Touch Screen Panel ................................................................. 74
Panel Buttons and Displays................................................... 74
Push Button ........................................................................... 74
Message Display Button ........................................................ 74
Numeric Display Button ........................................................ 74
Numeric Entry Button............................................................ 74
Go To Button ......................................................................... 74
Operator Panel...................................................................... 77
Operator Panel 2................................................................... 79
Plasma Process Operator Panel ........................................... 81
Recipe Define Panel .............................................................. 83
Alarm Panel........................................................................... 84
Maintenance Panel................................................................ 86
Recipe Setup Panel ................................................................ 87
CVD Recipe Setup Panel (Recipes 1-6)................................. 88
CVD Recipe Setup Panel 2 .................................................... 90
Prime Micro Pumps Panel (Recipe 7)................................... 92
Prime Micro Pumps Panel 2 ................................................ 94
Cleaning Recipe Panel (Recipe 8 & 9).................................. 96
Cleaning Recipe 2 Panel ....................................................... 98
Image Reversal Panel (Recipe 10) ...................................... 100
Plasma Process Setup Panel 1 (Recipes 11-14).................. 102
Plasma Process Setup Panel 2 ............................................ 103
Factory Setup Panel ............................................................ 105
Time-Date Set Up Panel...................................................... 107
Vacuum Panel...................................................................... 108
Output Panel 1..................................................................... 110
Output Panel 2..................................................................... 113
Plasma Process Outputs Panel ........................................... 114
Over Temp Panel................................................................. 116
Prime Pump Recipe Panel................................................... 117
Instrumentation ........................................................................... 118
Plasma Gas Configurations ................................................ 118
Piping Schematic ................................................................... 119
Chamber Heating & Pressure Instrumentation................. 120
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Vacuum Piping & Heating Instrumentation ...................... 120
Chemical Flask 1 Piping Instrumentation .......................... 121
Chemical Flask 2 Piping Instrumentation .......................... 121
Electrical Power Distribution............................................... 122
Chamber Vapor Detection Pressure Gauge........................ 123
Chamber Process Pressure Gauges ..................................... 123
Chamber Temperature Controllers .................................... 123
Vapor Line Temperature Controllers ................................. 123
Vapor Flask Temperature Controllers ............................... 123
Vacuum Line Temperature Controllers ............................. 124
PLC Controller I/O List ....................................................... 124
Push Button Controls............................................................ 128
EMO .................................................................................... 128
Power On............................................................................. 128
Status Indicators.................................................................... 128
Light Tower ......................................................................... 128
Audible Alarm...................................................................... 128
Safety .......................................................................................... 129
Safety Signal Word Definitions............................................ 129
Caution ................................................................................ 129
Warning ............................................................................... 129
Danger................................................................................. 129
Unavoidable hazards............................................................. 130
Type 3 Electrical Hazards ................................................... 130
Type 4 Electrical Hazards ................................................... 130
Type 5 Electrical Hazards ................................................... 130
Chemical Handling................................................................ 131
HMDS .................................................................................. 131
Ammonia.............................................................................. 132
EMO Circuit Description .................................................... 135
EMO Circuit Operation....................................................... 136
Power Outage Recovery ...................................................... 136
Safety Interlocks .................................................................. 137
Material Disposal................................................................ 138
Electrical Disconnect .......................................................... 138
Cabinet Safety Grounding ................................................... 139
RF Power Supply................................................................. 140
Chamber Temperature......................................................... 140
Vacuum Pump Temperature ................................................ 141
EMO Circuit ........................................................................ 141
Maintenance................................................................................ 142
Procedures.............................................................................. 142
Flask/Chamber Leak Check & Evacuation ......................... 142
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Door Seal Replacement ....................................................... 143
Clean Chamber.................................................................... 144
Clean Flask.......................................................................... 144
Source Bottle Removal/Replacement................................... 145
Gas Valve Repair................................................................. 146
Vapor/Vacuum Valve Repair............................................... 147
Vapor Detection Valve Repair............................................. 147
Infusion Valve Service ......................................................... 148
Trap Drain Procedure......................................................... 148
Preventative Maintenance .................................................... 150
Daily Preventative Maintenance ......................................... 150
Daily Cold Trap Maintenance............................................. 151
Weekly Preventive Maintenance.......................................... 152
Monthly Preventive Maintenance........................................ 152
Bi-Annual Preventive Maintenance..................................... 152
Troubleshooting .......................................................................... 153
Process Problems................................................................... 153
Incomplete Image Reversal ................................................. 153
Silylation/CVD Condensation ............................................. 153
Incomplete Cleaning............................................................ 153
Oxidation ............................................................................. 154
Chamber Discoloration ....................................................... 154
Poor Pumping Speed ........................................................... 154
Intermittent or No Plasma ................................................... 154
Alarm List .............................................................................. 155
ATM to TP1 Abort ............................................................... 155
TP1 to TP2 Abort................................................................. 155
TP2 to TP1 Abort................................................................. 155
Base Pres Wait Abort .......................................................... 155
Over Temp Abort ................................................................. 155
Exit Loop Abort ................................................................... 155
Process Pressure Abort ....................................................... 155
Process Pressure Wait Abort............................................... 155
Invalid Recipe Number ........................................................ 155
Vapor Detection Alarm........................................................ 156
Equipment Problems............................................................. 157
Vacuum Chamber Does Not Pump Down ........................... 157
Chamber Fills Slowly or Not at All ..................................... 158
Process Vapor Pressure Does Not Rise .............................. 158
During Image Reversal, NH3 Rises Slowly.......................... 159
Program Sequence Not Operating Properly ....................... 159
Flask, Vapor/Vacuum Line or Chamber Does Not Heat..... 159
Flask, Vapor/Vacuum Line, Chamber Temp Too High....... 160
Plasma Does Not Fire or Fires Intermittently .................... 161
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Appendix..................................................................................... 162
Parts List ................................................................................ 162
Conversion Chart .................................................................. 164
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List of Figures
Figure 1 YES-1224P Components ............................................. 16
Figure 3 Optional Oil-Sealed Pump Dimensions in Millimeters
............................................................................................... 27
Figure 4 Optional Dry Scroll Pump Dimensions in Millimeters
............................................................................................... 28
Figure 12 System Status Panel Architecture .......................... 75
Figure 13 System Status Panel Architecture – Cont................ 76
Figure 14 Operator Setup Panel (Main Screen)....................... 77
Figure 15 Operator Panel 2........................................................ 79
Figure 16 Plasma Process Operator Panel ............................... 81
Figure 17 Recipe Define Panel ................................................... 83
Figure 18 Alarm Panel................................................................ 84
Figure 19 Maintenance Panel .................................................... 86
Figure 20 Recipe Setup Panel .................................................... 87
Figure 21 CVD Recipe Setup Panel (Recipes 1-6).................... 88
Figure 22 CVD Recipe Panel 2 .................................................. 90
Figure 23 Micro Pumps Panel 1 (Recipe 7) .............................. 92
Figure 24 Prime Micro Pumps Panel 2 (Recipe 7)................... 94
Figure 25 Cleaning Recipe Panel (Recipe 8 & 9) ..................... 96
Figure 26 Cleaning Recipe Panel 2............................................ 98
Figure 27 Image Reversal Panel (Recipe 10).......................... 100
Figure 28 Plasma Recipe Setup Panel 1.................................. 102
Figure 29 Plasma Recipe Setup Panel 2.................................. 103
Figure 30 Factory Setup Panel................................................. 105
Figure 31 Time-Date Set Up Panel .......................................... 107
Figure 33 Output Panel 1 ......................................................... 110
Figure 34 Output Panel 2 ......................................................... 113
Figure 35 Plasma Process Outputs.......................................... 114
Figure 36 Over Temp Panel ..................................................... 116
Figure 37 Prime Pump Recipe Panel ...................................... 117
Figure 40 Piping Schematic ..................................................... 119
Figure 46 EMO Circuit ............................................................ 135
Figure 49 Conversion Chart .................................................... 164
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List of Tables
Table 1 PLC Controller Digital Inputs ................................... 124
Table 2 PLC Controller Digital Outputs ................................ 125
Table 3 PLC Controller Analog Inputs .................................. 126
Table 4 PLC Controller Analog Outputs................................ 127
Table 5 PLC Controller Serial Communications................... 127
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Introduction
Introduction
YES-1224P(E) chemical vapor deposition (CVD) system with plasma
cleaning is designed to provide complete parameter control over surface
modification processes.
YES-1224P gives process engineers control over:
•
Amount of liquid
•
Speed of liquid injection
•
Vaporization chamber temperature
•
Vapor line temperature
•
Process vacuum chamber temperature
•
Process starting pressure
•
Exposure time
•
Surface Preparation
•
Plasma process gas pressure
•
Plasma power
•
Plasma process time
Applications
Typical applications include:
•
Surface modification to prevent or promote adhesion
•
Photoresist adhesion for semiconductor wafers
•
Silane/substrate adhesion for microarrays (DNA, gene,
protein, antibody, tissue)
•
MEMS coating to reduce stiction
•
BioMEMS and biosensor coating to reduce "drift" in device
performance
•
Promote biocompatibility between natural and synthetic
materials
•
Copper capping
•
Anti-corrosive coating
•
Low-k treatment to improve hydrophobicity
•
Plasma damaged low-k dielectric repair
•
Decrease R/C time factor by treating and sealing low-k
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Introduction
Benefits
Benefits include:
•
Chemical deposition uniformity
•
Contact angle control within +/- 3 degrees
•
Moisture resistant surface modification
•
More time available between process steps
•
Hexamethyldisilizane (HMDS)/wafer bonds will last for
weeks with no change to surface adhesion
•
Promotes silane/substrate bonds
•
Angstrom-level thickness control
•
Increased MEMS and bioMEMS reliability
•
Reduced chemical usage over wet chemical modification
•
Plasma cleaning ensures all runs start from the same point in
the process
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Introduction
Features
Features of the YES-1224P(E) system include:
1. PLC Control of output with input monitoring
2. 24 Volt DC instrumentation
3. Process abort, complete, and running lights on light
tower
4. Audible alarm
5. Electro polished 316 stainless steel chamber
6. Internal chamber welds
7. Redundant Over-temperature monitoring
8. Preheated N2, process, and plasma gases
9. 0.5 Micron filter for N2 and process gases
10. Four sets of removable, configurable
11. electrodes/process trays of stainless steel construction
12. Chemical Delivery Cabinet with:
•
•
•
•
•
•
•
•
•
•
•
Two Stainless steel heated flash vapor flasks
Quick release flask connections (VCR)
Dual independent flash vapor flask Partlow 1160
Plus temperature control
Larger diameter vapor line tubes to reduce
expansion cooling
Dual independent vapor line Partlow 1160 Plus
temperature control
Micro-pump infuse valves for accurate volume
delivery
Nitrogen blanketed source chemical withdraw
system to inhibit “wetting” of source chemicals
Room temperature chemical storage of supplier
chemical bottles for ease of change
Infusion volume tracking for source bottle level status.
Secondary containment system spill tray to meet
safety requirements
Three plasma gas flow adjustment valves
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Introduction
13. Emergency Machine Off buttons front and rear of main
machine (EMO)
14. Four-zone, Partlow 1160 Plus temperature controlled
chamber heating
15. Partlow 1160 Plus temperature controlled heated
vacuum plumbing to eliminate condensation
16. 5” monochrome touch screen display operator interface
17. Dual heated capacitive manometer chamber pressure
sensors with visual indication on touch screen for
condensation prevention and precise pressure control,
regardless of vapor composition
18. Pressurized control console for NEC compliance
19. RS-485 communications for constant temperature
monitoring and remote set point operations
20. Analog communications for precise pressure,
temperature and plasma output monitoring
21. Vapor detection pressure comparison to ensure chemical
is evacuated before opening the door
22. Vapor trap LN2 temperature feedback for refill prompt
and chemical drain capability
23. Chemical volume tracking for notification of bottle
exchange and trap drain operations
24. Optional automatic LN2 refill system for operator free
cold trap liquid nitrogen level control
25. Dual heated vacuum lines for CVD and plasma process
separation
26. 100-1000 Watt RF power supply, 550VAC nominal
output. Input power integrated through EMO circuit
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Introduction
Tool Components
Figure 1 YES-1224P Components
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Introduction
Process Overview
YES-1224P chemical vapor deposition (CVD) systems provide total
environmental control over the deposition process and accommodates a
variety of functionally diverse silanes, for a variety of processes, on a
variety of surfaces.
YES-1224P gives process engineers control over:
•
•
•
•
•
•
•
•
Amount of liquid
Speed of liquid injection
Vaporization chamber temperature
Vapor line temperature
Process vacuum chamber temperature
Process starting pressure
Exposure time
Surface preparation (using the plasma option)
CVD
1.
CVD/Surface Modification
Complete dehydration followed by CVD coating provides a
superior silane/substrate bond that is stable after exposure to
atmospheric moisture, extending the time available between
process steps. Chemical usage for a vapor deposition process
is typically less than 1% of the amount needed for wet
application processes, significantly reducing waste and
chemical costs.
The CVD process begins with vacuum chamber cycle purges
to dehydrate the product. The chamber is evacuated to low
pressure and refilled with pure nitrogen several times to
completely remove water vapor. Nitrogen is preheated,
which helps heat the product.
Once cycle purges are finished, the YES-1224P system
pumps the chemical directly from the source bottle to the
heated vaporization chamber – without exposing the
chemical to moisture and the environment.
YES-1224P accommodates two chemical source bottles as
well as wide variations of vapor pressures among different
silanes. Processes are easily programmed using the touch
screen operator interface.
Plasma Cleaning
2.
Plasma Cleaning
YES-1224P provides a plasma cleaning option to the YES1224 chemical vapor deposition (CVD) system. Plasma
cleaning prior to silane deposition improves repeatability.
Plasma cleaning the process chamber before each run
ensures all runs start from the same point. Additionally,
plasma prepares the substrate for deposition.
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Introduction
Process Gases & Pressure
Control
YES-1224P(E) comes standard with four process gas connections; a
chamber vent gas, usually nitrogen, and process gas 1 through 3, usually
oxygen, argon, or other gas. Optional mass flow controllers are available
as options. One additional process gas may be added, with or without a
mass flow controller, as an option. YES-1224P(E) has separate vacuum
lines for plasma processing and chemical vapor deposition.
For recipes that do not require constant pressure, gas flows may also be
set to a constant value. Standard upstream process pressure control is
achieved by adjusting the corresponding plasma gas needle valve. The
chamber pressure can adjusted to the desired level required for plasma
striking.
For recipes that do require constant pressure, automatic upstream process
pressure control is an optional feature of the YES-1224P(E). The flow of
process gas into the chamber may be automatically varied, via MFC, to
maintain a constant pressure through the strip or descum process.
Once a substrate is in the chamber, pressure is reduced by a vacuum
pump to a base pressure value. During plasma procesing, process gas,
usually oxygen, flows continuously through the chamber. If additional
process gases with mass flow controllers are installed, the process gases
may be mixed in mass flow ratios specified by recipe parameters.
Plasma Generation
YES-1224P(E) uses a 40 kHz RF power generator.
Plasma is generated between the hot electrode plate and the lower,
grounded electrode plate. Free electrons created in the plasma field are
drawn to ground by the lower plate. Only active ions continue
“downstream” to clean components on the work trays. Electrode sets of
stainless steel allow for an even distribution of the reactants giving
uniform, consistent processing to each and every device. All components
are safely cleaned without changing their electrical properties.
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Introduction
Options
Optional Auto LN2 Refill
System Power
If the optional auto refill system is purchased, a supply tank or facilities
connection must be located within six feet of the tool. YES recommends
a 180 liter liquid nitrogen tank or jacketed transfer line from fab facilities
holding tank with an output pressure of 22 psig. Facilities connection
must be 1/2” AN type male connector to accept 1/2” AN type female
connector on supplied 6 ft transfer line.
Vacuum Pump
YES offers a choice Fomblin® oil sealed for use with the YES-1224P(E)
or an oil-free (dry) scroll pump for use with plasma.
Standard Data Collection
Process data collection may be added to the YES-1224P(E). Additional
software is Microsoft® Office, Industrial SQL®, and Active® factory.
Process data can be trended and retrieved by operator-entered lot
identification number. The data collected for each process run can be
sampled at 1-second intervals and includes:
•
Date and Time
•
Chamber pressure - Mini-Convectron® reading
•
Chamber pressure set point
•
Hot plate temperature
•
Hot plate temperature controller set point
•
Process gas flow rates (MFC option)
•
RF power set point
•
RF power level
•
Process gas and vacuum valve states
Ethernet Data Collection
Same as above with an additional Ethernet port to allow data to be
collected and stored over a host network. The analysis software,
Wonderware® Active Factory, has five seat licenses to allow remote data
access over a network.
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Introduction
Specifications
Process Exposed Parts
The specifications of the YES-1224P(E) are as follows:
Chamber
316 SS electro polished with interior dimensions
of 16" (406 mm) W x 18" (457 mm) D x 16"
(406 mm) H
Tubing
316 SS and PFA
Swagelok® Fittings
316 SS
Gaskets and Seals
Kel-F Nupro® and Vespel® Valve Seats, SST
VCR gaskets
Door Plate
Door Seal
316L Stainless Steel
Aflas® (Kalrez® or Simriz® available)
Micro-pump Fittings
PEEK
Tray Guides
CERAMIC
Additional Parts
14 - 200 Watt Chamber Heaters
2 - 80 Watt Flash Vapor Chamber Heaters
5 - 100 Watt Vacuum Valve and Vapor Line Assembly heaters
24 Volts DC User Accessible Instrumentation
Wafer Capacity
Wafer Capacity
8 cassettes of 6" (150 mm) wafers, 5" (125 mm)
wafers or 4" (100 mm) wafers, or 2 cassettes of
8” (200 mm), 12” (300 mm) wafers
Wafer Throughput
Capacity is dependent upon the process being
undertaken.
Slide Throughput
Slide Throughput
600 slides per hour for CVD
Overall Dimensions
Overall Dimensions
46" (1168.5 mm) W x 42.75" (1086 mm) D x
44.38" (1127 mm) H (not including light tower,
cold trap nor RF supply)
Cold Trap Capacities
6-Inch Cold Trap Capacities
LN2:
Condensate:
1.6 Liters
1.6 Liters
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Introduction
System Power
Domestic:
208 VAC, 60 Hz, 30 amps, 1 phase,
4835 watts
European:
230 VAC, 50 Hz, 30 amps, 1 phase,
5400 watts
Optional Auto LN2 Refill
System Power
Controller:
200-240 VAC +/-10%, 50-60 Hz,
4.2 amps maximum, 1 phase, 850
Watts maximum
Energy Consumption
Power consumption based on standard process: 170°C @ 1000 Watts
Load time is 30 seconds.
Idle
420 Watts
Peak
2100 Watts
Average
1210 Watts
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Introduction
Mass Balance
Vent Gas Consumption
Vent gas should be at least 99.999% pure nitrogen. Nitrogen
consumption based on standard process; 170°C @ 1000 Watts. Load
time is 30 seconds. Peak value is based on the addition of three purge
cycles, to the standard process, to eliminate toxic gases.
Idle
Peak
Average
0 SCF
1.00 SCF
.44 SCF
Reactant Gas Consumption
Reactant gas should be at least 99.999% pure. Reactant gas consumption
based on standard process: 170°C @ 1000 Watts.
Load time is 30 seconds.
Values provided below are based on using an Edwards® XDS35i
vacuum pump:
Idle
Peak
Average
0 SCF
4.2 x 10-3 SCF
4.2 x 10-3 SCF
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Installation
Unpacking Check List
NOTE: Inspect all crates and components of the YES1224P(E) for damage as they are unpacked. If there is
any visible shipping damage, please notify YES
Customer Service at 1 (888) YES-3637.
A standard YES-1224P(E) system will arrive in two pieces: the unit
itself and one box of accessories. However, if you purchased optional
pumps from YES, there will be a third (and possibly fourth) piece. If
you purchased the optional auto LN2 refill system from YES, there will
be a fifth piece.
Take inventory of the system and its accessories to confirm that all the
parts are available before proceeding:
o YES-1224P System
o YES-1224P (E) Operator Manual (including electrical and
piping schematic and facilities documents)
o Partlow 1160+ Controller Manual
o Hydrocarbon Wet Vapor Pump (Optional)
- 8” PVC Vacuum Flex Line with Reinforcing Stainless Steel
Winding
- SST Elbow
- LN2 Trap
- Clamps and Accessories
- Pump Manual
o Dry Plasma Pump (Optional)
- 8” PVC Vacuum Flex Line with Reinforcing Stainless Steel
Winding
- SST Bellows Line
- KF-40 Tee
- Clamps and Accessories
- Pump Manual
NOTE: There is a choice of a dry pump or a
Fomblinizer pump for the plasma side.
o
Auto LN2 Refill System (Optional)
- Refill System Manual
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Getting Ready
Location Requirements
The ideal location will have access to electrical power connections, gas
lines, and scrubbed exhaust ventilation ducts for the vacuum pump and
reactor cooling to allow easy system installation.
Operation of the YES-1224P(E) demands maintenance access to the rear,
left, and front of the system: frequent charging and cleaning of the LN2
trap assembly requires rear access, Source chemical changes and
cleaning procedures require left or front side tool access, and substrate
loading and chamber cleaning operations require front access.
The vacuum line path from the pump to the tool should be as short and
straight as possible. Performance specifications and recommendations for
the vacuum pump are based on the 2.54 cm (1 in) ID, 2.44 m (8 foot)
long, flexible vacuum hose that YES supplies with the vacuum pump
option. For best performance, a customer-supplied vacuum line should
have conductance equivalent to the standard hose.
Figure 2 Recommended Clearances (Door Open, Top View)
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Light Tower Installation
Final Light Tower installation is carried out from the front.
The Light Tower is already connected, but the actual light tower body
needs to be screwed onto the exposed male thread located on the right
front of the console lid.
Vacuum Pump
Requirements
YES does NOT supply the vacuum pump or vacuum hose unless a
vacuum system was purchased from YES as an option (in which case,
the hose would be included).
In general, for the YES-1224P system, either a Fomblin® pump (oil) or
BOC Edward® dry scroll pump is used when carrying out the plasma
operation.
For the CVD operation an additional hydrocarbon pump is required.
Pump requirements:
•
•
A vacuum source with a minimum of 15 scfm with an ultimate
pump down of 1 x 10E-3 Torr (vacuum pump is NOT included
unless purchased as an option from YES)
An 8 ft. vacuum hose (not included unless a vacuum source
option was purchased from YES)
NOTE: If vapor vacuum pump is NOT purchased
through YES, we recommend a condensation trap
be purchased to eliminate pump contamination.
Chemicals entering the pump may cause failures
due to elastomer incompatibilities and
polymerization onto exposed surfaces. Furthermore,
a flexible line will be required for the vacuum pump
connection.
WARNING!!! If the plasma dry pump option is not
purchased through YES, a dry pump or fully
fomblinized pump must be used if there is the slightest
chance that oxygen is used as a reactant. YES also offers
Alcatel 16 and 19 CFM Fomblin® pump options. A
larger pump will be required when high flow capacity is
required.
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Oil-Sealed Plasma Vapor
Vacuum Pump Installation
(Option)
The optional Fomblin® oil-sealed vacuum pump offered with the YES1224P is an Alcatel® model 2021C2 two-stage vacuum pump.
Power requirements are:
100-120VAC, 50/60 Hz, 1 phase, 550 Watts, 5A@110V
200-230 VAC, 50/60 Hz, 1 phase, 4 amps, 550 Watts, 2.6@215V
Power connection is an appliance cord.
Pump weight is 27.9 kg (61.6 lbs).
The optional vapor vacuum pump assembly includes an 8 ft. long, 1.5"
ID PVC vacuum flex line, LN2 trap, fittings, and refill thermocouple
probe.
Install the Vacuum Pump by placing it in a position that makes it easy to
check for correct oil level and topping up of the oil when needed.
Remove the clamp and “O” ring from the pump end of the 8ft PVC
vacuum hose. Molded into the pump’s intake connector frame is an
arrow that points at the connector. Place the “O” ring on this fitting, line
the vacuum hose fitting up with it, then clamp the two together.
Secure the blue oil de-mister unit to the output connector of the pump.
The output connector has an arrow molded into the frame that points
away from it. An “O” ring and clamp lock the de-mister in place. Be sure
that the butterfly nuts on the clamps are firmly tightened.
Secure the other end of the 8ft vacuum line to the aluminum flange at the
rear of the system. A clamp and “O” ring are provided at this end of the
vacuum line for this connection.
Visually confirm that Fomblin® pump oil level is correct (refer to
Alcatel® pump manual provided with the YES-1224P if option was
ordered). If needed, top-up oil, but do not overfill or the second stage of
the pump can be blocked. Second stage failure will result in low vacuum
and a system abort.
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Figure 3 Optional Oil-Sealed Pump Dimensions in Millimeters
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Dry Scroll Plasma Vacuum
Pump Installation (Option)
The optional oil-free (dry) scroll vacuum pump offered with the YES1224P is a BOC Edwards® model XDS35i dry scroll vacuum pump.
Power requirements are:
100-120VAC, 50/60 Hz, 1 phase, 980 Watts, 8.5A@115V
200-230VAC, 50/60 Hz, 1 phase, 1080 Watts, 5.A@215V
Power connection is an appliance cord with plug.
Pump weight is 47.6 kg (105 lbs).
To install the dry scroll pump, plug into an independent power source.
The optional plasma vacuum pump assembly includes an 8 ft. long, 1.5"
ID PVC vacuum flex line, and interconnecting fittings, bellows, and
adapters.
Installation is almost identical to “Oil Sealed Plasma Vapor Vacuum
Pump Installation” mentioned previously.
Figure 4 Optional Dry Scroll Pump Dimensions in Millimeters
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Facilities
This section describes all of the facility requirements to properly set-up
and connect the YES-1224P(E).
Five (5) single-phase receptacles are required: One for the YES1224P(E) main system and one for each optional vacuum pump. Power
for the Auto Refill and the RF Generator is also required. The power
requirements for the standard YES-1224P(E) are below.
Facilities Drawing
Figure 5 YES-1224P Facilities Drawing
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Main System Power
Voltage
Frequency
Phases
Current
Power
YES-1224P
208-250 VAC
50-60 Hz
1
30 Amps
5400 Watts
YES-1224P(E)
208-250 VAC
50-60 Hz
1
30 Amps
5400 Watts
Piping
The YES-1224P(E) side assembly houses the chemical delivery system
and piping to supply ammonia and chemical vapor from the flask to the
oven vacuum chamber.
Vapor Line
The vapor line on a YES-1224P(E) is a 1/2 inch 316 stainless steel tube
that passes directly from the side assembly to the vacuum chamber
sidewall.
The vapor line is heated and insulated. A temperature controller mounted
on the front panel of the control console controls its temperature.
Flow through the vapor line is controlled by a pneumatic shut off valve,
which is mounted to the flask line.
Chemical Flask
The chemical flask is of an all 316 stainless steel construction with a
15.5mL capacity. All connections are located on the flask top to facilitate
removal and servicing of the flask body.
Connections to each flask include a 1/8” infusion tube connection and a
1/2” vapor line connection. All tube connections are VCR type to
facilitate quick removal during maintenance cycles.
The flask has an independently controlled heater sock. It also has three
type J thermocouples clamped to the flask body.
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Infusion Lines
Independent 1/8” PFA lines on each chemical flask top deliver chemicals
from the micro-pump infusion valves. Each infusion valve connects to
individual source bottles using 1/8” PFA tubing for ease of replacement
and visual confirmation of fluid flow.
Bottle Chemical Interface
The chemical interface consists of single 6-inch needle with a
connection. The long needle is connected to a PFA tube, via a
Luer® fitting, and terminates at the inlet of the solenoid driven
pump. The PFA tubing continues to the vapor chamber cap
connected by 1/8 inch swage fitting.
Luer®
barbed
microand is
Bottle Head Purge
Interface
The head purge interface consists of single 1-inch needle with a Luer®
connection. The short needle is connected to a PFA line, via a barbed
Luer® fitting, and terminates at the source bottle cap purge solenoid
located on the regulated four-position purge manifold. This system has
an independent 1/4-inch Swagelok® low-pressure nitrogen connection
on the rear of the side assembly cabinet.
Vent/Seal Purge Nitrogen
15-30 psig of dry, filtered nitrogen is required for purging/venting the
vacuum chamber.
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Bottle Head Purge
Nitrogen
15-30 psig of dry, filtered nitrogen is required for purging the source
chemical bottle head area.
Process Nitrogen
The process nitrogen connection is a 1/4-inch Swagelok® fitting on the
rear of the side assembly cabinet. The rest of the line is 1/4 inch 316
stainless steel tubing. The nitrogen passes through a 0.5 micron filter and
a pneumatic shut-off valve before entering the chamber compartment.
In the chamber compartment, the nitrogen line divides into two equal
lines that pass through heaters attached to the rear of the vacuum
chamber. Each nitrogen branch then divides again to pass into the
chamber through four evenly spaced ports on the rear of the chamber.
Each port has a 100 micron sintered stainless steel filter element in the
chamber wall to diffuse the flow.
Vapor Vacuum
The chamber vacuum line is a 1/2 inch diameter 316 stainless steel tube
leading from the rear of the chamber to a pneumatic vacuum valve
mounted at the middle rear panel of the oven.
The vapor vacuum line is heated and insulated to prevent condensation
of vapor during process. Vapor Vacuum line heater power is provided
via the vacuum line controller located on the control console. See the
maintenance section of this manual for service instructions
Plasma Vacuum
See Facilities for locations.
Pneumatics
The high-pressure nitrogen pneumatic supply connection for the YES1224P(E) oven is a stainless steel 1/4 Swagelok® fitting on the rear of
the oven. Pneumatic gas flows in through a fourteen-position distribution
manifold to 24VDC solenoid valves that control the supply of pneumatic
pressure to each of the pneumatic process valves.
Pneumatic
Nitrogen/CDA
80-100 psig of dry, filtered nitrogen/CDA is required to operate the
pneumatic valves.
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Anhydrous Ammonia
(Process Gas)
The ammonia connection is a recessed 1/4-inch Swagelok® fitting on the
rear of the side assembly cabinet. The rest of the line is 1/4 inch 316
stainless steel tubing. The ammonia passes through a 0.5 micron filter, a
pneumatic shut-off valve, and tees into the nitrogen line, just after the
nitrogen pneumatic shut-off valve.
Regulate the anhydrous ammonia, or other process gas, at 5-10 psig.
Plasma Gases
The YES-1224P(E) has three gas port connections on the right side of the
unit. You may use process gases of your choice. Set plasma gas pressures
to 15-30 psig.
Pump Exhaust
Connect each of the vacuum pump exhausts to the scrubbed house
exhaust. The pump exhaust consists of air, N2 and the silane or other
reaction by-products. Since the system only utilizes metered amounts of
chemical and an LN2 trap to capture by-products, there should be
minimal chemical in the exhaust.
Side Assembly Exhaust
The system requires a house exhaust connection for incidental plumbing
vapor leak evacuation. The unit is fitted with a 3" (75 mm) OD transition
coupling at the rear, right center of the unit. Connect the transition
coupling with a 3" ducting to a house exhaust with a differential pressure
of 0.20 inches of water suction at 20 scfm.
Door Seal Purge
The seal purge system is a tee connection off the bottle purge nitrogen
line, down stream of the 0.5 micron filter. All lines are ¼ inch diameter
stainless steel tubing. The line continues through a pneumatically
actuated bellows valve, through a fine metering valve, and into a fitting
between the inner and outer chamber door seals. The gas flows between
the seals and exits through a 1/3 psig relief valve located on right rear of
the chamber flange.
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Vapor Detection
The vapor detection system consists of a hot wire pressure sensor
connected to the chamber rear via an isolation valve. The line is ¼ inch
diameter stainless steel.
Optional LN2 Auto Refill
System Supply
If the optional auto refill system is purchased, a supply tank or facilities
connection must be located within six feet of the tool. YES recommends
a 180 liter liquid nitrogen tank or jacketed transfer line from fab facilities
holding tank with an output pressure of 22 psig. Facilities connection
must be 1/2” AN type male connector to accept 1/2” AN type female
connector on supplied 6 ft transfer line.
The YES-1224P(E) optional refill system enables the user to manage the
condensate trap LN2 level without intervention. There are many different
applications for this option (see manufactures manual CD-R for detailed
information). The system can be set for inches, mm, or percentage of
active sensor length. YES presets all the parameters of the controller and
displayed units are in percentage of active length (7 inches).
Figure 6 Auto Refill Controller
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Preset Parameter Settings
The preset parameter settings for the unit are:
Parameter
HI
B
A
LO
Pre-Cool Time
Setting
90%
40%
85%
20%
0.2 min
Function
Alarm High Setting Set point
Fill Start Set point
Fill Stop Set point
Alarm Low Setting Set point
Output 2 Activation Time
Timeout
10 min
Max. Fill Cycle Duration
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LN2 Auto Refill Program
Sequence
Once the auto fill controller is turned on, the following program
sequence initiates:
“Output 2” is activated for a predetermined time set by the “Pre-Cool”
parameter, after which “output 2” is de-energized. This is used for precooling the transfer line, venting non-liquid nitrogen gas, and reducing
the evaporation of existing liquid in the condensate trap.
“Output 1” is activated until capacitance sensor reaches setpoint “A”, at
which point “output 1” is de-energized. If level overshoots setpoint A,
and reaches setpoint “HI”, refill controller deactivates solenoids and
alarms until level drops below “HI” parameter.
The controller monitors the level until it reaches setpoint “B”. The refill
system will now reset and restart the pre-cool mode step (reactivates
“output 2”). If for any reason the level drops below the “low” parameter,
the controller will alarm until the level increases above the “low”
parameter setting. The solenoids are not deenergized in this condition.
If “output 1” is energized for a period longer than the “Timeout”
parameter, the controller will alarm. This feature is an alarm for liquid
nitrogen source depletion.
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Electrical Oven Power
Distribution
AC electrical power enters the YES-1224P(E) via a power cord attached
to the rear of the oven control console. The power flows through a main
disconnect circuit breaker mounted on the rear panel.
From the circuit breaker, AC power goes to a 24VDC power supply that
supplies the EMO loop, through an EMO relay, all of the actuators and
controllers that operate the YES-1224P(E). Two additional supplies,
-15VDC and +15 VDC, power the circuitry and heating elements on the
pressure manometers.
AC power also flows through a redundant multi-zone over temperature
monitoring device relay to the SCR power controllers that modulate
heater power to control oven temperature. The heater power relay is
turned on by the system controller and may be turned off either by the
system controller or by the over temperature monitor. The over
temperature monitor uses redundant thermocouples and is factory set to a
value of 251°C.
Activation of one of the two EMO buttons, of the control console
interlock switch, or of the chassis pressurization switch will shut off
power to the heaters and to all control components except the EMO
circuit.
Touch Screen Interface
The touch screen operator interface uses an RS-232 serial
communications line to exchange information with the system controller.
The touchscreen also has an RS-232 connection accessible at the control
console rear panel for downloading application programs. CTC
proprietary software is required for editing and downloading application
programs. Process control software is available from YES as an option.
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System Controller
The system controller that operates the YES-1224P(E) is a CTC 5000
series state logic controller with digital inputs and outputs to control the
system, and analog inputs are used to read a signal from each heated
manometer, for pressure tracking, temperature monitoring, and vapor
detection gauge voltage for HCM comparison (confirmation of chemical
vapor evacuation).
RS-485 communications exchange data with the seven temperature
controllers for temperature tracking/remote set point operations, RS-232
communications exchange data from the touchscreen interface panel to
the PLC, and a TCP/IP Ethernet port is located on the rear of the control
console for program upload/download and process monitoring
operations.
CTC proprietary software is required for monitoring controller function
and for editing and downloading application programs. Process control
software is available from YES as an option.
Input/Output List
Digital Outputs
1 Process Gas Valve
2 Vacuum Valve 1
3 Vent Valve
4 Pump 1 Infuse Valve
5 Pump 2 Infuse Valve
6 Vapor Valve 1
7 Not Used
8 Audible Alarm
9 Light Tower Green Light
10 Light Tower Yellow Light
11 Light Tower Red Light
12 Plasma/Aux Vacuum Valve
13 Vapor Valve 2
14 Remote RF Power
15 Vapor Detection Valve
16 Over temperature Module Reset
17 Unused
18 Unused
19 Source Cap 1 Purge Solenoid
20 Source Cap 2 Purge Solenoid
21 Gas 1
22 Gas 2
23 Gas 3
24 Door Seal Purge Valve
Digital Inputs
1 Over temperature Alarm - Watlow
2 Over temperature Cal 3200
3 RF Set point Confirmation
4 Chamber 0-1000 Torr HCM Temp
5 Chamber 0-100 Torr HCM Temp
6 Not Used
7 Prime Pump 1
8 Prime Pump 2
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Analog Inputs
1
Chamber 0-1000 Torr Pressure
2
Chamber 0-100 Torr Pressure
3
RF Power Level
4
RF Supply Diagnostic
5
Cold Trap Temperature
6
Internal Chamber Monitor Temperature
7
MFC/Gas 1 Flow
8
MFC/Gas 2 Flow
10
MFC/Gas 3 Flow
11
Not Used
12
Not Used
Analog Outputs
1 MFC/Gas 2 Set point
2 MFC/Gas 3 Set point
3 RF Power Set point
4 MFC/Gas 1 Set point
Communication
Comm 1 Touch Screen RS-232 Communications
Comm 2 Heater Controllers RS-485 Communication
TCP/IP Program Download/System Monitor Port
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Temperature Control
The vacuum chamber heaters are divided into a chamber door control
zone, a front chamber perimeter control zone, a middle chamber
perimeter control zone, and a rear chamber wall control zone.
There are six additional temperature zones; 2x vapor flask heat controls,
2x vapor line heat controls, and the 2x vacuum valve heat controls. Each
zone has a panel mounted temperature controller. Each temperature
controller uses a type J thermocouple to sense chamber temperature and
issues a 5VDC pulse width modulated signal to an SCR power control.
The SCR modulates AC power to the appropriate heater zone.
Each temperature controller has a factory adjusted shut-off limit set point
that can be used to shut off the signal to the SCR, and therefore the
heater power, if the chamber reaches a temperature that is unacceptable
to the process.
All heat zones are protected with a global multizone over temperature
monitor. The monitor senses temperature inputs through independent
type J thermocouples and issues a 24VDC signal through a global relay
contact when the temperature is within safe limits.
The two heated capacitive manometers (HCM) have independent selfregulated heating elements, which are powered by the +15VDC and –
15VDC power supplies (30VDC potential).
Instructions for adjusting temperature set points are in the Setup section
of this manual.
Pressure Control
One 0-1000 Torr and one 0-100 Torr heated capacitance manometers
(HCM) are used to sense the vacuum chamber pressure and a 0-100 Torr
HCM is used to sense the flash vapor chamber pressure. Each HCM
transmits a 0-10VDC analog signal to the controller analog card. The
pressure is displayed on various touch screen interface panels.
Instructions for setting the pressure variables are in the Setup section of
this manual.
Over Temp Monitor
The YES-1224P(E) implements a redundant over temp monitor to ensure
oven controller components do not fail in a run away condition. Each
zone contains a redundant J-type thermocouple, which are wired to the
thermocouple input bank of the controller. All heater power wires are
connected in series through the overtime monitor normally open alarm
relay. If any zone exceeds 250°C, the monitor will shut off heater power
and send a signal to the PLC of over temp condition.
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Setup, Adjustment, and Test
Getting Started
Place the unit on a bench or table under laminar flow in a location best
suited to your process operations and device requirements.
The following tools are required to prepare the unit for installation:
Wrenches: 1/2, 9/16, 5/8, 3/8, 7/8
Flat head screwdriver
Tool Assembly
Pneumatic Nitrogen/CDA
Connect the pneumatic nitrogen/CDA with a 1/4" OD line to the
Swagelok® bulkhead fitting located at the back of the unit. Hold the
bulkhead fitting firmly in place with a wrench while tightening the line to
prevent it from twisting and creating a leak. Set regulator pressure to 80100 PSIG.
Vent/Seal Purge Nitrogen
Connect the vent/seal purge nitrogen with a 1/4" OD stainless steel or
Teflon® line. Use two wrenches when tightening the line. Regulate the
static pressure to approximately 20 psig. (The pressure should be
adjusted later so the unit backfills from a 10 Torr vacuum level to
atmospheric pressure in about 3:10 minutes).
Bottle Purge Nitrogen
Connect the bottle purge nitrogen with a 1/4" OD stainless steel or
Teflon® line. Use two wrenches when tightening the line. Regulate the
static pressure to approximately 18 psig. (Confirm the inner two-stage
bottle purge regulator is set to 0.4 to 1 psig. See facilities document for
detailed pictoral).
Plasma Gases
Connect the appropriate plasma gases with a 1/4" OD stainless steel or
Teflon® line. Use two wrenches when tightening the line. Regulate the
static pressure to approximately 18 psig.
Vapor Vacuum Accessories
The vapor vacuum accessories (see facilities drawing for optional
configurations):
1. Connect the stainless elbow to the KF25 vapor vacuum
connection flange on the rear of the oven. Secure the elbow
using the flange clamp and center ring. Confirm screen mesh
centering ring is installed.
2. Connect the KF-25 to KF-40 reducer to the long segment end of
the elbow. Secure the trap using the flange clamp and center
ring.
3. Connect the input side of the LN2 trap to the KF-40 side of the
reducer. Secure the trap using the flange clamp and center ring.
4. Place Supplied trap stand under the LN2 trap
5. Connect one end of the vapor vacuum line to the outlet side of
the LN2 trap. Secure the line using the flange clamp and center
ring.
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6. Connect the other end of the vapor vacuum line to the
hydrocarbon vacuum pump. Secure the line using the flange
clamp and center ring.
7. Connect the K-type thermocouple plug, from the LN2 trap, into
the jack labeled “T/C LN2” on the rear of the control console.
Insert thermocouple rod into the vent hole on the LN2 trap.
8. Fill the LN2 trap with liquid nitrogen. Do not start the pump
motor until this step is complete.
Plasma Vacuum
Accessories
Assemble the plasma vacuum accessories (see facilities drawing for
optional configurations):
1. Connect the KF-40 stainless elbow to the KF40 plasma vacuum
connection flange on the rear of the oven (bottom of vacuum
box). Secure the elbow using the flange clamp and center ring.
2. Connect the KF-40 tee to the KF-40 stainless elbow. Secure the
tee using the flange clamp and center ring.
3. Connect the KF-40 bellows line to the second plasma vacuum
flange (side of vacuum box). Secure the line using the flange
clamp and center ring.
4. Connect the other end of the KF-40 bellows line to the KF-40
tee. Secure the line using the flange clamp and center ring.
5. Connect one end of the plasma vacuum line to the remaining
KF-40 tee connection. Secure the line using the flange clamp and
center ring.
6. Connect the other end of the plasma vacuum line to the
Fomblin® oil or dry scroll vacuum pump. Secure the line using
the flange clamp and center ring.
Exhaust
Connect a scrubbed house exhaust to the ventilation collar. There should
be a 2-15/16" OD tube located at the back of the unit.
AC Cord
Connect the system's AC cord to the specified power.
Pump Outlets
Connect the pump outlets to the scrubbed house exhaust.
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Setup, Adjustment, and Test
Anhydrous Ammonia
Remove the side cover and attach the anhydrous ammonia (or other
process gas) with a 1/4" OD line to the stainless steel Swagelok® fitting
through the back of the Side Assembly. Hold the bulkhead fitting firmly
in place with a wrench while tightening the line to prevent it from
twisting and creating a leak or damaging the recessed fitting bracket (see
facilities for exploded view of bulkhead connections).
Ammonia Pressure
Regulate the ammonia pressure to 5-10 psig (15-30 psig for other process
gas).
Source Chemical Purge
Regulator
Confirm the source chemical purge regulator is set to 0.4-1 psig (The
power will have to be turned on to complete this step. (See facilities
drawing for location).
Replace the side cover on the unit.
RF Power Supply Cord
Connect the plasma RF supply power cord to the rear of the control
console. Twist to lock the connector.
RF Supply
Communications Cable
Connect the plasma RF supply communications cable to the rear of the
control console. Install 4-40 screws to secure the DB-15 connector.
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RF Power Output Cable
Connect the plasma RF power output cable from the rear of the tool to
the plasma RF supply. Twist the BN connector outer fastener until
secure.
Press the “Power On” button on the front panel and hold until the
“Enclosure Pressure OK” indicator light illuminates.
NOTE: Do not place any obstacle within 6 inches of
pressurization fan inlet zone. The positive fan
pressurization interlock may not latch if obstructed.
Start Vapor Vacuum
Pump
Plug in the pump. Turn on the pump power switches. Refer to pump
instruction manuals for proper voltage setting configuration and
ventilation specifications.
WARNING!!! Do not connect vapor hydrocarbon
pump to either plasma pump KF-40 connection on rear
of tool. Exposing this pump to plasma may cause an
explosion and may cause serious injury or death.
Start Plasma Vacuum
Pump
Plug in the pump. Turn on the pump power switches. Refer to pump
instruction manuals for proper voltage setting configuration and
ventilation specifications.
CAUTION: Do not connect plasma Fomblin® or dry
pump to the vapor pump KF-25 connection on rear of
tool. Exposing these pumps to vapor may cause an
immediate pump seizure.
Clean Chamber
Blow out the interior of the chamber using an ionizing nitrogen blowgun.
Set Vent/Seal Purge N2
Pressure
Verify that vent/seal purge nitrogen supply pressure is regulated to 15-30
PSIG.
Set Bottle Purge N2
Pressure
Verify that bottle head purge nitrogen supply pressure is regulated to 1520 PSIG.
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Adjust Ammonia
Pressure (Process Gas)
Verify that the ammonia supply pressure is set to 5-10 PSIG (15-30 psig
for other process gases).
CAUTION: Before handling any chemical or gas,
please carefully read the label and all information
pertaining to that substance.
At room temperature and atmospheric pressure, ammonia is a colorless,
alkaline gas that has a pungent odor and readily dissolves in water. It is
shipped as a liquefied gas under its own vapor pressure of 114 psig (7.9
Bar g) at 70°F (21°C).
Ammonia is considered to be an irritant. Concentrations in the range
between 50 to 100 ppm are not considered harmful but can be a nuisance.
In case of accidental contact, immediately flush the affected area with
water for 15 minutes to ensure all traces of the ammonia have been
completely rinsed away, contact a physician and the poison control
center in your area for information concerning medical treatment.
WARNING!!! Make sure the pressure in the chamber
does not reach atmospheric pressure during the NH3
filling step. The door ONLY provides a vacuum seal. If
the chamber reaches atmospheric pressure, NH3 will
flow freely into the area.
Set Plasma Gas
Pressures (Gas 1-3)
Verify that the plasma gas supply pressures are set to 15-30 PSIG.
CAUTION: Before handling any gas, please carefully
read the label and all information pertaining to that
substance.
Vapor Detection
If the system loses power during a run, when it is powered back up, the
chamber must be purged. This is a result of the vapor detection interlock,
which sets a flag in the PLC when the process gas or vapor valve is
activated. This feature is intended to protect the user from opening the
door when vapor is present in the chamber, and releasing fumes into the
surrounding area.
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Flask/Chamber Leak
Check and Evacuation
The chamber leak check procedure can be used to verify chamber
cleanliness and vacuum integrity. The procedure measures chamber base
pressure and leak back rate. For the best results, base pressure and leak
rate testing should be done after the oven has been at vacuum for several
hours to allow volatile contaminants like water to vaporize and be
removed from the chamber.
With the oven controller in reset mode and operator’s panel active, push
the “Press to Select Recipe” button, enter “0” on the numeric keypad,
and push “enter” then “done”. Press the “Press to Start” button. The
program will open the vacuum valve until the “Press to Reset” button is
pushed.
Wait for the pressure to stabilize with the vacuum valve open. Base
pressure should be under 10 mtorr. If pressure is too high, allow the
chamber to remain at vacuum for a few hours to evaporate volatile
contaminants. It may be necessary to clean the chamber to remove
process residues.
When a satisfactory base pressure has been reached, press the “Press to
Reset” button to close the vacuum valve. Wait 1 or 2 minutes to allow
chamber gas flows to stabilize, then measure the increase in pressure
over a one minute period. Pressure rise rate should be less than 250 mT
per minute. If pressure rise rate is too high, allow the chamber to remain
at vacuum for a few hours to evaporate volatile contaminants and repeat
the test. It may be necessary to clean the chamber to remove process
residues.
If a leak is suspected, further path isolation can be verified by manually
closing the vapor valve after resetting system:
With the oven controller in reset mode and Operator’s panel active; push
the “Goto Alarm Panel”, press the “Enter Access Code” button, enter
1966 on the numeric keypad, and push “enter”. When the maintenance
panel is activated; Press the “Goto Factory Setup Panel” button, press the
“Goto Vacuum Panel”, and press the “Press to Open Vapor Valve”
button to de-illuminate the switch.
Observation of the rate of rise of both the flask and the chamber
pressures to help pinpoint the leak region. Press the “Exit button to return
to the operator panel screen.
When the test is complete: With the oven controller in reset mode and
operator’s panel active, push the recipe select button, enter “15” on the
numeric keypad, push “enter” then “done”. Press the “START” button.
The system will purge the chamber/flask and return the system pressure
to atmospheric levels.
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Temperature Controller
Settings
Heater control for the YES-1224P chamber is divided into seven areas.
Four chamber zones:
DOOR
FRONT
MIDDLE
REAR
Heaters on front of the chamber door
Heaters around front section of chamber
Heaters around middle section of chamber
Heaters on rear chamber wall
Two Vapor flask zones
Two Vapor Line zones
Three Vacuum line zones
The four chamber temperature controllers were pre-calibrated during
testing to display the correct product temperatures at 200°C.
The maximum set point for any controller is 200°C.
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Temperature Controller
Set Points
Press the circular arrow button located on the far right lower side of the
controller until SP is displayed on the display window (press once). Press
and hold the up or down arrow until the desired temperature is displayed.
Press circular arrow button again to activate set point. Allow four hours
for complete warm-up of system if the machine is started from a room
temperature condition.
Figure 7 Partlow 1160 plus Controller
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Liquid N2 Trap
Temp/Volume Alarm Trip
Point
To access the liquid nitrogen trap temperature/volume alarm trip point:
1. On the touch screen, from the operator screen, press the "Goto
Alarm Panel" button to go to the Alarm screen.
2. Press the “Enter Access Code” button, Enter “1966” on the
numeric keypad, and press the “Enter” button to activate the
Maintenance panel screen.
3. Press the “Goto Factory Setup Panel.”
4. Enter the desired cold trap temperature trip point in °C (To
disable the trip point alarm enter 30000. The minimum
temperature entry is -50°C or a –50 numerical entry).
5. The volume alarm trip point should be preset. This value is
dependant on the size of the LN2 trap.
Pressure Variables
Set the pressure variables on the touch screen operator interface panel.
One 0-1000 and one 0-100 torr capacitance manometers (HCM) are used
to sense the vacuum chamber pressure. Each HCM transmits a 0-10VDC
analog signal to individual analog card terminals and the resultant values
are displayed on various touch screen panels.
The five pressure variables have different functions for each of the three
types of process, vapor prime, image reversal, silylation, and chemical
vapor deposition. Recipe 1-6 and recipe 10 are user defined for your
particular application See the process descriptions in The Operation
Section, for details. Recommended values for the five pressure variables
for each process are as follows (in torr):
Process
Vapor prime
Image Reversal
Silylation
CVD
Plasma
PH*
600
600
600
600
600
PL*
10
100
10
10
10
BASE PRO* AB*
1
N/A 20
100
500 600
1
100 500
0.5-1
1-30 500
0.25
0.40 500
* PH = Purge High
PL = Purge Low
PRO = Process
AB = Abort
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To access the pressure variables screens:
1. On the touch screen, from the operator screen, press the "Goto
Alarm Panel" button to go to the alarm screen.
2. Press the “Enter Access Code” button, Enter “1966” on the
numeric keypad, and press the “Enter” button. To activate the
maintenance panel screen.
3. Press the “Goto Recipe Set Up Panel” button, Press the “Goto
Recipe Set Up Panel 2” button.
4. Press the “Press to Select Recipe Number” button and then press
the “Press to Load Recipe” button to load selected recipe
parameters to the PLC.
5. Set each pressure variable by pressing the appropriate display
box and entering the desired value. Press the “Go Back” button
to return to the recipe setup panel 1 screen and finish pressure
variables.
6. Return to recipe setup panel 2 and press the “Press to Save
Recipe” button. Parameters will revert to old saved configuration
if not saved before exiting.
Process Variables
Set the process variables on the touch screen operator interface panel.
Process variables are:
o
o
o
o
o
o
Number of pre-process dehydration cycle purge loops
Number of post-process evacuation cycle purge loops
Process duration
Warm up delay
Plasma power
Plasma Duration
1. On the touch screen, from the operator screen, press the "Go To
Alarm Panel” button to go to the Alarm panel display.
2. Press the “Enter Access Code” button, Enter “1966” on the
numeric keypad, and press the “Enter” button. To activate the
Maintenance panel screen.
3. Press the “Goto Recipe Set Up Panel” button; press the “Goto
Recipe Set Up Panel 2” button.
4. Press the “Press to Select Recipe Number” button and then press
the “Press to Load Recipe” button to load selected recipe
parameters to the PLC.
5. Set each process variable value by pressing the appropriate
display box and entering the desired value. Press “Enter” and
then “Done.”
6. Return to recipe setup panel 2 and press the “Press to Save
Recipe” button. Parameters will revert to old saved configuration
if not saved before exiting.
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Recommended process variable values for each of the process is as
follows:
CVD Process Variables:
Dehydration Cycle Purges:
Warm up delay:
Evacuation Cycle Purges:
Process duration:
3
10*
3
300-2700 seconds
*Large loads may require longer warm up delay times. Check internal
thermocouple temperature and determine warm up time for delay time
setting on repeated loads. 45 minutes for warm up delay is not
uncommon.
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Infusion Variables
Set the infusion variables on the touch screen operator interface panel.
Infusion variables are:
o
o
o
Max number of pulses
Injector pulse time open
Injector pulse time closed
1. On the touch screen, from the operator screen, press the
"Go To Alarm Panel” button to go to the Alarm panel
display.
2. Press the “Enter Access Code” button, Enter “1966” on
the numeric keypad, and press the “Enter” button. To
activate the Maintenance panel screen.
3. Press the “Goto Recipe Set Up Panel” button. Press the
“Goto Recipe Set Up Panel 2” button.
4. Press the “Press to Select Recipe Number” button and
then press the “Press to Load Recipe” button to load
selected recipe parameters to the PLC. Press the “Go
Back” button to return to recipe setup panel 1 screen
5. Set each infusion variable value by pressing the
appropriate display box and entering the desired value.
Press “Enter” and then “Done”.
6. Press the “Goto Recipe select Panel 2” button and press
the “Press to Save Recipe” button to store the new
parameters to the PLC. Parameters will revert to old
saved configuration if not saved before exiting.
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Septum Pierce
Bottle Interface Setup
The bottle interface may be set up for bottles in the range of 25 – 500ml.
1. Attach the barbed Luer® adapter fitting on the line from the
micro-pump to the male Luer fitting on the long needle.
2. Attach the Luer adapter fitting on the line from the regulated
purge manifold to the male Luer fitting on the short needle.
3. Insert the long needle through the septum seal, until needle tip
touches the bottle bottom.
4. Insert the short needle through the septum.
5. Support needles so incidental retraction does not occur.
Figure 8 Septum Interface Setup
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Installing Fresh Chemical
Bottles
The YES-1224P(E) chemical delivery system is located in the side
assembly, behind the small side and front access panel. The chemical
storage tray is capable of holding 2 factory supplied chemical bottles of
25-50 ml capacity. Your system can be set to accept larger bottles
(acceptable bottles are of compatible septum pierce type). Contact YES
for custom size applications.
WARNING!!! Incompatibilities between previously
sourced chemicals and fresh source chemicals of a
different composition may produce undesirable and/or
dangerous effects based on stoichiometric reactions.
It is therefore recommended that a cleaning solvent
(such as toluene, alcohol, etc.) compatible with
previously sourced chemical be run through the system
and vaporized completely before attaching and priming
fresh source materials.
Solvent flush cleaning routines may not be effective for
crossover contamination caused by previously sourced
chemicals of a different composition.
1. Insert a full bottle 1 into the source 1 bottle tray section
2. Pull back on the source 1 bottle clamp to compress the four
springs, until the bottle fits into the three point hold down (bottle
may need to be rotated to fit as some are out of round).
3. Push bottle down so it’s flush to base tray.
4. Confirm needles are properly engaged into septum interface.
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Regulate Bottle Head
Purge Pressure
Confirm the source bottle head purge regulator is set to 0.5-1 psig (see
the facilities section of this manual for an exploded view of side
assembly):
1. From the operator panel press the “Go To Alarm Panel” button
to switch to the alarm panel display.
2. For nitrogen conservation purposes, a positive bottle volume
value initiates the bottle head purge and allows flow through the
small needle. Confirm that there is a positive value stored in the
“Enter source bottle Volume in ml” display. If value is zero;
Press the “Enter source bottle Volume in ml” button, temporarily
enter a positive value on the numerical entry panel, press “Enter”
and then “Done”.
3. Adjust source bottle head purge regulator to above mentioned
pressure.
4. Re-enter “0” into the “Enter source bottle Volume in ml”
display. The nitrogen head purge valve will shut off until prime
sequence is complete.
Recipe Management
A recipe needs to be defined in order to prime the desired pump system,
run product, and clean the system. From the operators panel, press the
“Press to View Recipe Define Panel” to view the recipe types and
associated recipe number. Press the “Exit” button to return to the
Operator’s Panel.
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Prime Lines Pump 1-2
The pump lines will need to be evacuated of gases and replaced with the
liquid chemical in order to achieve a repeatable process. YES should
have set up your system for your chemical. If not, refer to the Setting
Infusion Volumes/Pulse Variables section of this manual.
1. On the touch screen, from the operator screen, press the "Goto
Alarm Panel" button to go to the Alarm screen.
2. Press the “Enter Access Code” button, Enter “1966” on the
numeric keypad, and press the “Enter” button. To activate the
Maintenance panel screen.
3. Press the “Goto Recipe Set Up Panel” button. Press the “Goto
Recipe Setup Panel 2” button. Press the “Press to Select Recipe”
button, enter 7 on the numeric entry pad, press ”Enter” and then
“Done”. Press the “Press to Load Recipe” button to load recipe 7
from the PLC.
4. All fields should be setup for this recipe except for the source 12 bottle volumes. If succeeding bottle replacement volumes are
to remain the same, these fields will never have to be changed.
5. Press the desired “Enter Standard Source Level in ml” button.
Enter new source bottle volume on the numeric keypad, push
“Enter” then “Done”.
6. Press the “Exit” button to return to the Operator’s panel display.
The prime routine can be activated from the buttons located on the left
side of the control console or from the prime recipe panel on the touch
screen.
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Preprogrammed Prime
Lines Field Values
The following list contains the preprogrammed prime lines field values
in case they are inadvertently changed:
Process time
Evacuation purges
Purge pressure high
Base pressure
Purge pressure low
Evacuation time
Abort pressure
Dehydration Purges
60 sec
3
500
1
10 Torr
300 sec
600 Torr
0
Infusion Volume /Pulse
Variables
If YES has NOT calibrated your system for a particular chemical
(chemical volume per pulse and pulse time open/closed variables), the
remaining fields will need to be identified to determine what values
result in the 2 ml of chemical injection required to fill the lines. The
remaining variables and their functions:
Max number of pulses
This is the maximum desired number of pulses required for the process.
Correlates to a desired infusion volume.
Injector pulse time open
Used to tune the volume per pulse rate into a whole number correlation.
Unit is 1/100 seconds.
Injector pulse time closed
Used to allow extra time between open pulses for slower vaporizing
chemicals. Unit is 1/100 seconds.
Volume per pulse
The volume infused per each open pulse of the micro-pump. Once
calibrated, the value stored in this field should never change unless a
different chemical is used. Unit is μL.
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Setting Infusion Volume
/Pulse Variables
The YES-1224 is a vapor pressure oriented process. Volumetric delivery
is important, but the observations of vapor pressure curves of chemicals
is the predominate limiter to a successful process. Infusing chemicals
into the process chamber is limited to the maximum expansion pressure
of a chemical at a particular temperature and the rate in which the
chemical can vaporize. Further increases in volume or infusion rates over
the physical limitations will not generate a beneficial result, as the
chemical can no longer expand or vaporize into the process chamber.
This will only result in condensation in the vapor chamber. Many
chemicals are sensitive to prolonged boiling in the liquid phase and
decay rapidly into solids that may be difficult to remove.
However, volumetric tracking is important to scientists when data is
collected to understand the fundamentals of any laboratory test series. It
is also important to the tracking system of the YES-1224 to control vapor
trap drain, and chemical bottle refill/exchange routines.
The micro-pump factory delivery volume is 20μL/pulse, based on
distilled water and zero pressure differentials. Volume/pulse values will
be different on the YES-1224P(E) as chemical viscosity and pressure
head forces on the system will affect the manufacturers factory delivery
specifications.
Tests can to be done in order to calibrate the pulse to volume ratio.
Selecting a pulse range, running a process, and comparing the remaining
source volume to determine the infusion volume is a simple method.
Special attention needs to be paid as not to exceed the maximum vapor
pressure of a chemical at a particular temperature to prevent vapor
condensation in the chamber.
To Set-up the infusion volume/pulse variables:
1. Consult YES for guidelines on maximum vapor pressure,
maximum volume, and vaporization rate for your particular
chemical. We may have data to eliminate the need for infusion
variables set-up.
2. Confirm line prime routine has been completed.
3. From the Alarm Panel, Press the “Enter Access Code” button,
Enter “1966” on the numeric keypad, and press the “Enter”
button. To activate the Maintenance panel screen.
4. From the Maintenance Panel, push to “Goto Recipe Set Up
Panel” button.
The screen will change to the last saved recipe setup panel.
1. Press the “Goto Recipe Set Up Panel 2” button. Press the “Press
to Select Recipe” button, enter the recipe that requires changes
on the numerical entry pad, press “Enter” and then “Done.”
2. Press the “Press to Load Recipe” button to load the recipe onto
the touch screen. Press the “Go Back” button to access the pulse
times. Make sure to document which recipe you will be
calibrating volume with, as you will need to come back and
readjust parameters.
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3. Push the desired injector “Injector Pulse Time Open” button, and
enter the value “8” on the keypad. Press “Enter” and then
“Done” when data entry is complete.
4. Press the desired injector “Enter Max Number of Pulses” button,
and enter the value “10” on the keypad. Press “Enter” and then
“Done” when data entry is complete.
5. Press the desired “Injector Pulse Time Closed” button, and enter
the value “8” on the keypad. Press “Enter” and then “Done”
when data entry is complete.
6. Press the “Enter Process Pressure” button and enter the value
“300” on the keypad. Press “Enter” and then “Done” when data
entry is complete. This allows full expansion to 300 Torr,
although the max number of pulses is set to 10 from 3b. A
typical expansion pressure would be about 10 Torr, or 1
torr/pulse.
7. Press the “Goto Recipe Set up Panel 2” button and then press the
“Press to Save Recipe” to save the changes.
After parameters are set, press the “Go Back” button twice to return to
the maintenance panel. Press the “exit” button to return to the Operators
panel.
1. Press the “Press to Select Recipe” button. Enter the value for the
desired calibration recipe on the keypad. Press “Enter” and then
“Done” when data entry is complete.
2. Press the “Reset” and then the “Press to Start” button to activate
the recipe.
3. Observe the drop in volume after the run is complete.
The simplest volumetric tracking device would be a graduated cylinder
with septum cork installed. Once the recipe is run, the level drop in the
cylinder will give the volume displacement for 10 pulses. Be sure to
dictate your results, as once verified, these pulse values will be used for
all recipes. The pulse per volume is to be entered into the recipes once
the volume per pulse value is determined.
It may be desirable to tune the volume per pulse rate into a whole
number. Altering the “Injector Pulse Time Open” variable will help
adjust the volume per pulse rate. The longer the open pulse time, the
more chemical will infuse per pulse.
NOTE: The longer the injector is closed, the more
chemical is infused.
After the calibration is complete, replace the calibration bottle with the
standard volume source bottle and rerun the line prime routine. This will
reset the volume counter for bottle level tracking.
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WARNING!!! The process used for HMDS in our
systems also works well using other silanes. However,
YES cannot guarantee results of other silanes or any
other chemical and does not take responsibility for any
harm either to the system or persons for use of other
chemicals within the system. The operator must be
aware of the potential dangers in mixing chemicals and
choose a compatible solvent when cleaning the
flask/chemical delivery system.
Vapor Cure Procedure
NOTE: Since excessive amounts of liquid may be
introduced during this procedure, condensation/wetting
of chemicals may leave residue in chamber and vapor
flask. When vapor curve procedure is complete, it is
recommended that vapor flask be disassembled and
flask/chamber thoroughly cleaned before processing
product.
An important aspect of the CVD or Silylation process is qualifying the
vapor curve of a chemical. Most MSDS data sheets do not include this
information, but analysis of the vapor curve will determine the maximum
allowable process pressure expansion for a given temperature and
volume of chemical. Further allowable increase in process volume will
result in condensation of chemical onto the product, and uniformity
performance will be adversely affected. Last, it is important not to heat
chemical well past their degradation temperature. Doing so will cause
deposition of reactants in the flask and will decrease maintenance cycle
intervals.
Since this procedure is sensitive in nature, please contact YES for
guidelines on qualifying your particular chemical.
Liquid N2
Trap/Thermocouple
Installation
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All the necessary hardware should be supplied if a liquid nitrogen trap is
purchased from YES. Attach the trap as indicated in figure below (see
facilities section of this manual for trap configuration options). Confirm
trap support is in place before tool operation as damage to vacuum
plumbing may occur if trap is unsupported.
Align all vacuum components with clamps loose and tighten. Confirm
trap valves are closed before operation. The manual fill tube is the
smaller OD tube. Attach a funnel to the fill tube for manual fill
operation. Insert the liquid nitrogen monitor thermocouple into the vent
tube and connect the plug into the thermocouple female connector
located on the rear of the control console.
Figure 9 LN2 Trap Installation
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Optional LN2 Auto Refill
System Assembly
The optional auto refill system will need final assembly.
The auto refill system should arrive in two parts; the pre-assembled
plumbing components with solenoid power cords, and the
interconnecting cables, oscillator, and control unit.
The liquid nitrogen supply tank or house supply facilities connection
must be closer than six feet from auto refill flow-thru sensor LN2
connection as jacketed transfer line is 6 feet in length (bends in line will
shorten actual liquid nitrogen supply tank or house supply facilities
connection distance). Longer transfer lines are available upon request,
although the pre-cool time variable and nitrogen consumption will
increase.
Figure 10 Auto Refill Plumbing Components
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Figure 11 Auto Fill Controller
To complete the assembly:
1. Insert the flow-thru sensor through the center vent tube as far
as it will go. Orientate the pre-assembled unit so the pre-cool
vent tube points away from the tool back panel. Tighten the
nylon flow-thru sensor 3/8 male NPT fitting. NOTE: Do
not over tighten fitting.
2. Connect the pre-cool solenoid power cord to 2 on the
controller rear panel.
3. Connect the trap fill solenoid power cord to 1 on the
controller rear panel.
4. Connect one side of the sensor cable to the flow-thru sensor,
and the other side to channel C on the controller rear panel.
Make sure the arrow on the oscillator points toward the
sensor.
5. Connect the line power cord to proper facilities (see
introduction section and/or facilities drawing at the end of
this manual for details).
6. Connect LN2 supply to ½” female AN-type connector (see
facility section and/or facilities drawing at the end of this
manual for details. Turn on LN2 source.
7. Turn on the controller power switch (see operation section
for detailed information on program variables and
sequences).
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Setup, Adjustment, and Test
Tool Adjustment
Adjust Temp Controller Set
Point
Press the circular arrow button located on the far right lower side of the
controller until SP is displayed on the display window (press once).
Press and hold the UP or DOWN arrow until the desired temperature is
displayed. Press circular arrow button again to activate set point. Follow
the same steps to set up the remaining tempearture controllers.
NOTE: Allow four hours for complete warm-up of system if the
machine is started from a room temperature condition.
Set Pressure Variables
Pressure variables are the dehydration high and low, base, process, and
abort pressures.
1. On the Operator’s Panel touch screen, press the "GOTO
ALARM PANEL" button to switch to the Alarm Panel screen.
2. Press the “ENTER ACCESS CODE” button. This will activate a
numeric keypad display. Enter “1966” on the entry pad, press
“Enter,” then “Done.” This will activate the Maintenance Panel.
3. Press the “GOTO RECIPE SET UP PANEL” button, and Press
the “GOTO RECIPE SET UP PANEL 2” button.
4. Press the “PRESS TO SELECT RECIPE NUMBER” button.
Enter recipe to be modified on numerical entry pad, press
“Enter”, and then “Done”. Press the “PRESS TO VIEW
RECIPE” button. This retrieves all recipe information for that
particular recipe.
5. Set each pressure and process variable values by pressing the
appropriate display boxes and entering the desired value on the
numeric keypad.
6. Use the “GO BACK” button on Recipe Setup Panel 2 and the
“GOTO RECIPE SETUP PANEL 2” button on Panel 1 to get the
access to the desired pressure variable buttons.
7. When finished with data entry, press the “GO TO RECIPE SET
UP PANEL 2” button and then press the “PRESS TO VIEW
RECIPE” button. Modify the recipe as necessary.
8. Press the “PRESS TO SAVE RECIPE” button. This will save
the current recipe parameters to the PLC.
Press the “GO BACK” button to return to the Recipe Setup Panel 1 and
press “EXIT” to return to the Operator’s Panel.
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Setup, Adjustment, and Test
Set Process Variables
Process variables are the number of pre-process cycle purge loops, the
number of post-process evacuation exit cycle purge loops/durations, the
process duration, volume per pulse ratio, and pulse time open closed
durations. Screen navigation and variable data entry are performed in the
same manner described above.
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Process Description
Process
Description
In general, a 1224P process is divided into two parts. First is a plasma
cleaning of the substrate. Second is the chemical vapor deposition of the
silane or other substance. The process description is broken into sections
describing each portion of a typical process.
Plasma Process Outline
1. Ensure process shelves are in the proper order (see description of
shelf configuration)
2. Start the YES-1224P system.
3. Allow system to stabilize at the desired process temperature.
4. Load product while oven is hot.
5. Enter the plasma process recipe #.
6. Press Start.
7. The system is evacuated to base pressure (250-400mT).
8. Once the system reaches base pressure, the process gas is turned
on and allowed to reach flow equilibrium (2 minutes).
9. The RF generator is turned on and plasma is established. Plasma
is run for the duration and power set in the recipe.
10. At the end of the plasma process, the system will backfill with
nitrogen.
11. If the recipe is set up to link with a chemical vapor deposition
recipe, the second recipe will start.
Chemical Vapor Deposition
Outline
1. The recipe starts with a pre-heat delay to warm the product to the
chamber temperature.
2. The system is purged of oxygen and moisture through a series of
evacuations and nitrogen back fills.
3. After the dehydration purges are complete, the chamber is
evacuated to a pressure below the vapor pressure of the process
silane.
4. The specified volume of silane is delivered to the micro-pump
while the vapor valve is open. The silane is vaporized and the
vapor passes from the flask into the chamber.
5. The product is exposed to the silane vapor for the specified
process duration.
6. The main vacuum valve is opened at the end of the process
duration.
7. Vapor flows out to the LN2 trap and condenses to prevent pump
contamination.
8. After the vapor is evacuated, the chamber is cycle purged to
remove residual silane vapor.
9. After the cycle purges, the system pumps down to 2 T and
checks to ensure all silane vapors have been removed from the
chamber.
10. The chamber is vented to atmospheric pressure with nitrogen so
that the door can be opened.
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Process Description
Recommended Process
Temperature
Chemicals can be run from temperature up to 200°C depending on
the vapor pressure of your chemical. If process temperature is too
low, condensation may occur in the system resulting in poor
coating qualities.
Temperature Controller Set Points:
Tri-ethoxy silanes (APTES, OTES, etc)
Chamber Front, Middle, Rear Door:
Flask Line Temperature:
Flask Temperature:
150°C
145°C
140°C
Tri-chloro silanes(FTDS, etc)
Chamber Front, Middle, Rear Door:
Flask Line Temperature:
Flask Temperature:
100°C
95°C
90°C
Pressure Variables:
Purge high:
Purge low:
Base:
Abort:
500T
10T
0.5-1.0T
500T
Process Variable:
Number of purge cycles:
Warm up delay: (with no plasma)
Number of evacuation purges
Process Duration
typical)
3
10-30 minutes
3
300-3600 seconds (600
Process Sequence
The following is a typical sequence description:
1. Delay cycle start a number of minutes set by the "Enter
Warm Up Delay in Minutes" variable.
2. Cycle purge chamber a number of times set by the "Enter #
of Dehydrate Purges" process variable.
3. Evacuate chamber to “Purge Pressure Low in Torr” variable.
4. Alarm if “Purge Low Pressure” variable is not reached
within timer setting.
5. Fill chamber with nitrogen “Purge Pressure High in Torr”
variable.
6. Alarm if “Purge High Pressure” is not reached within timer
setting.
7. Evacuate chamber to “Base Pressure” variable.
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Process Description
8. Alarm if “Base Pressure” not reached within timer setting.
9. Inject quantity of chemical specified by “Enter Source 1
Injector Volume in ml” and “Enter Process Pressure”
variables while vapor valve is open.
10. Leave vapor valve open for duration set by "Enter Process
Pressure" process variable.
11. Alarm if pressure does not reach “Enter Abort Pressure in
Torr” within timer setting.
12. Allow product to bake in silane vapor for duration set by
"Enter Process Time in Seconds " process variable.
13. Evacuate chamber to “Enter Purge Pressure Low” variable
using main vacuum valve.
14. Alarm if “Dehydration Low Pressure” not reached within
timer setting.
15. Cycle purge chamber a number of times set by the "Enter #
of Evacuation Purges" process variable.
16. Fill chamber with nitrogen to “Enter Purge Pressure High in
Torr” variable.
17. Alarm if “Purge High Pressure” is not reached within timer
setting.
18. Evacuate chamber “Enter Purge Pressure Low in Torr”
variable.
19. Alarm if “Purge Low Pressure” variable is not reached
within timer setting.
20. Pump chamber down to 2 Torr.
21. Alarm if 2 Torr is not reached within timer setting.
22. Check Vapor detection gauge/HCM voltage comparison set
by “Enter Vapor Detection Value” variable.
23. Once confirmed safe, backfill chamber to atmospheric
pressure.
24. Process complete.
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Process Description
Establishing a
Baseline
The baseline is determined by testing at base pressure without infusing
chemical, typically when the system is new and chemical has never been
infused. Evaluation of the substrate surface characteristics by surface
tension energy or molecular examinations will determine the baseline.
Modifications of the baseline will later be made after infusing chemical,
cleaning, and then retesting. Contact YES for assistance on baseline
parameters for your particular chemical.
Running a Process
With Fresh Chemical
Installed
1. If unit is set up and has been idle for the required warm up
period, skip to step 7.
2. Verify that the YES-1224P(E) facilities have been connected and
that the machine has been set up in accordance with the facilities
installation and setup sections of this manual.
3. Turn on the YES-1224P(E). It may be necessary to release EMO
buttons that might be engaged.
4. Wait for the system controller to finish booting up. The
Operator’s Panel status display will say "Reset State" when the
machine is ready to run.
5. Wait approximately 2 hours for the heated manometer
temperature to reach partial set point (4-hour heat up time total).
6. After 2 hours, verify that all 10 temperature controllers are set to
the correct set points for the intended process. Recommended set
points are listed in the process description section of this chapter
(2 hour total heat up time to 200°C).
7. Verify that the LN2 trap is filled with liquid nitrogen (The small
tube is the fill location). Replace thermocouple rod into vent tube
if removed.
8. Verify that the vacuum pumps are on.
9. Verify source bottle setups have been completed (fresh source
bottles only).
10. Verify that intended recipe fields are entered.
11. Verify that pressure variables are set to the correct values for the
intended process. Recommended set points are listed in the
process description section of this chapter.
12. Verify that the process variables are set to the correct values for
the intended process. Recommended values are listed in the
process description section of this chapter.
13. Verify that the infusion pulse variables are set to the correct
values for the intended process.
14. Place product in the appropriate carriers into the chamber of the
system and close the door.
15. Select desired recipe number from the Operator’s Panel.
16. Ensure that enough time is entered in the “Warm Up Delay” for
product/carriers to reach steady state temperature. Confirm
internal thermocouple reading is at set point value if necessary.
17. Press the START button on the Operator’s Panel to initiate the
program sequence.
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Process Description
18. When the system successfully completes a program, the yellow
COMPLETE light on the light tower will flash. Press the
RESET button on the Touch Screen and unload the product.
19. To run additional product, see next section.
Running Additional
Processes
1. Verify that the LN2 trap is filled with liquid nitrogen (The small
tube is the fill location). Replace thermocouple rod into vent tube
if removed.
2. Select desired recipe number from the Operator’s Panel. No
action is required if running continuous processes.
3. Ensure that enough time is entered in the “Warm Up Delay" for
product/carriers to reach steady state temperature. Confirm
internal thermocouple reading is at set point value if necessary.
4. Press the START button on the Operator’s Panel to initiate the
program sequence.
5. When the system successfully completes a program, the yellow
COMPLETE light on the light tower will flash. Press the RESET
button on the Touch Screen and unload the product.
Running Cleaning Recipe 8
&9
It is recommended that the cleaning recipe be run if the tool will be idle
for a substantial period. Use an appropriate, compatible solvent. Keep in
mind that the infusion variables must be set to infuse the volume
necessary to clean the system. Consult YES for help on infusion variable
setting for your particular solvent.
The cleaning parameters are shared; Bottle 1 (Recipe 8) and Bottle 2
(Recipe 9). When Recipe 8 is selected on the Operator’s Panel, only
Source 1 will deliver. When Recipe 9 is selected, only Source 2 will
deliver.
1. If unit is set up and has been idle for the required warm up
period, skip to step seven.
2. Verify that the YES-1224P(E) facilities have been connected and
that the machine has been set up in accordance with the facilities
installation and setup sections of this manual.
3. Turn on the YES-1224P(E). It may be necessary to release EMO
buttons that might be engaged.
4. Wait for the system controller to finish booting up. The
Operator’s Panel status display will say "Reset State" when the
machine is ready to run.
5. Wait approximately 2 hours for the heated manometer
temperature to reach partial set point (Manometers require 4hour heat up time total).
6. After 2 hours, verify that all six temperature controllers are set to
the correct set points for the intended process. Recommended set
points are listed in the process description section of this chapter
(2 hour total heat up time to 200°C).
7. Verify that the LN2 trap is filled with liquid nitrogen (The small
tube is the fill location). Replace thermocouple rod into vent tube
if removed.
8. Verify that the vacuum pump is on.
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Process Description
9. The solvent bottle volume will have to be entered into the unit.
Determining how much chemical volume/recipe parameters are
needed for proper cleaning is based on factory testing and/or a
baseline comparison. See the establishing a baseline section of
this manual for further details.
10. On the touch screen, from the operator screen, press the "Go To
Alarm Panel" button. Enter “1966” on the numerical entry pad,
press “Enter”, and then “Done” to switch to the Maintenance
Panel.
11. Press the “Goto Recipe Setup Panel” button. Press the “Goto
Recipe Setup Panel 2” button. Press the “Press to Select Recipe
Number” button. Enter “8” or “9” on numerical entry pad, press
“Enter”, and then “Done”. Press the “Press to Load Recipe”
button. This retrieves all recipe information for the cleaning
recipe. Recipes 8 and 9 have the same recipe screen, and
therefore share the same parameters.
12. Press the “Enter Source Bottle Volume in ml” button. Enter a
volume greater than the required solvent volume needed for a
proper cleaning on the numeric keypad. Press “Enter” and then
“Done”. Confirm that the solvent bottle contains this same or
greater entered volume. Press the “Exit” button to return to the
Operator’s Panel display.
13. Insert the cleaning septum bottle into the source bottle tray. See
the equipment setup section of this manual for septum pierce
bottle interface setup instructions.
14. Press the “Press to Select Recipe Number” button. Enter “8” or
“9” on the numerical entry panel. Press “Enter” and then
“Done”. Confirm “8 or 9” is displayed in the recipe select
window. Press “Reset” and then “Start”. The system will run the
process based on the variables preset into recipe 8 & 9 (Selecting
recipe 8 will clean bottle 1 source lines only, and selecting recipe
9 will clean bottle 2 source lines only).
15. When complete, the system will display the message “Process
complete failed to reach process pressure set point”.
16. Press the “Reset” button.
17. On the touch screen, from the operator screen, press the "Go To
Alarm Panel" button to switch to the alarm panel screen.
18. Press the “Enter Source Bottle Volume in ml” button. Enter “0”
on the numeric keypad. Press “Enter” and then “Done.” This will
shut off the bottle head purge valve and limit solvent
evaporation.
Leave the solvent bottle in the tray and do not remove needles until it is
desired to reinstall chemical and continue process.
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Process Description
Prime Lines After Cleaning
Recipe
There are two methods to prime the lines after completing a cleaning
routine:
Prime lines directly after cleaning:
It may be of concern that the standard prime lines recipe, preceded by the
cleaning recipe may cause back contamination, dilution, and or
degradation to source chemical. As the solvent is pushed through the
lines by the solute, a mixing in transition zone may occur. Testing
through YES has shown that the infusion velocity is high enough to
overcome the mixing/back-streaming effect on the chemicals we have
tested, though it is not clear if this is factual with other chemicals.
Purge lines directly after cleaning:
Purging the lines with nitrogen and evacuating lines of solvent prior to
the prime step will minimize the mixing/back-streaming effect, if it is
truly an issue. Exchanging the solvent bottle with an empty septum
pierce bottle and rerunning the cleaning recipe routine will allow the
lines to be purged before initiating the prime lines routine.
Liquid Removal Procedure
If it is realized that, during a process, the chamber pressure reaches or
overshoots the vapor pressure of the chemical injected, condensation will
occur in the chamber and will no longer vaporize onto the product. If the
door would be opened without properly evacuating the condensed liquid,
the chemical may polymerize on the product and chamber walls, etc.
To remove residual condensed liquid:
1. Press the ”Press to Select Recipe Number” button from the
Operator’s Panel
2. Enter “15” on the numerical entry keypad, press “Enter,” then
“Done”.
3. Press “Start” from the Operator’s panel.
4. When the process is complete, push the “Reset” button on the
touch screen.
This evacuation recipe differs from the purge or evacuation loop in that
the system pumps down to a base pressure and remains open for a
predetermined time. The YES-1224P(E) will check for vaporization by
pressure rate of rise tracking, and repeat base pump down until no rate of
rise is detected.
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Operator Interface
Operator Interface
Operator Controls
This section describes the principles and theories involved in the
operation of the YES-1224P(E)
Main Power Disconnect
The main power disconnect switch for the YES-1224P(E) is located on
the right rear of the oven control console. The main disconnect switch
removes all electrical power from the tool.
Emergency Off Buttons
Emergency power off buttons are located on the front and rear of the
control console. The EMO buttons turn off all components on the tool.
Both EMO buttons must be disengaged in order to turn on the machine.
Console Cover Interlock
The control console has an interlock switch for its cover. If the cover is
removed during operation, the YES-1224P(E) will shut off. The switch
can be manually bypassed for maintenance. The cover must be on or the
switch must be bypassed in order to turn on the machine.
Console Pressure Interlock
The control console has a pressure interlock system. If the pressure
differential between the internal console and the surrounding air falls
below .25 IWC, the YES-1224P(E) will shut off. The pressure switch can
be manually bypassed for maintenance using a toggle switch located on
the pressure switch body. The pressure requirements must be satisfied or
the switch must be bypassed in order to turn on the machine. Return the
toggle switch to run mode before installing the console cover, as the
machine will not stay powered up if toggle switch is not returned to the
run mode.
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Operator Interface
Touch Screen Panel
Panel Buttons and
Displays
YES-1224P is operated primarily via a 5 inch monochrome touch screen
operator interface on the front panel of the system (see below). The touch
screen has several screens, and there are five types of buttons or displays
used in the operator interface for the YES-1224P. A flowchart of the
operator interface is presented below. The operation of each screen
follows:
Push Button
A touch screen push button is an area of the screen that displays text and
that will send a value to the system controller when the operator touches
it.
Message Display Button
A message display button is an area of the screen that displays different
text messages depending on the value of a number that is sent to the
touch screen by the system controller. (Touching a message display
button has no effect).
Numeric Display Button
A numeric display button is an area of the screen that displays the value
of a number that is sent to the touch screen by the system controller.
(Touching a numeric display button has no effect).
Numeric Entry Button
A numeric entry button is an area of the screen that displays the value of
a number sent to the touch screen by the system controller. Touching a
numeric entry button causes the touch screen to display a numeric
keypad. When the numeric keypad appears, press the number pads to
enter the desired value. Press the “Enter” button to input the new value,
then press the “Done” button to exit from the numeric keypad. The value
of the displayed number is changed in the system controller memory.
Go To Button
A go to button is an area of the screen that displays the route to an
undisplayed screen. Touching a go to button will cause the display to
change to the indicated screen.
Touch Screen
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Figure 12 System Status Panel Architecture
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Figure 13 System Status Panel Architecture – Cont.
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Operator Interface
Operator Panel
MAIN SCREEN
(Displays Machine
Status)
Figure 14 Operator Setup Panel (Main Screen)
Press to Select Recipe
Number
This push button is used to start the selected recipe and begin your
process.
Press to View Recipe
Define
Pressing this button will take you to the Recipe Define Panel. This panel
shows the action that corresponds to the selected recipe number.
Enter Batch Number
Pressing this button will activate the numeric entry pad. Enter the desired
batch number, press enter, and then done. The touch screen will revert
back to the Operator’s Panel.
Press to Start
Starts program sequence selected by the recipe number setting if the
system controller is in the reset state (shown on the status display). Has
no effect if a program is running.
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Operator Interface
Reset State
The message display shows machine system status.
Internal Chamber
Temperature
A numeric display. Displays the current process chamber space
temperature in oC
Process Chamber Pressure
in Torr
A numeric display. Displays the current process chamber pressure in
Torr.
Press to Reset Button
When the reset button is pressed, the machine stops all activity and goes
back into idle mode. The reset button is pressed to (1) acknowledge
alarms, (2) reset system if process is aborted (in this case, machine will
ring until you press reset), or (3) simply to reset the machine at the end of
a process run. It can also be used to interrupt any process.
Chamber Pressure in Torr
Button
An informational display showing chamber pressure.
GoTo Alarm Panel
Changes screen display to the Alarm Panel (see below for Alarm Panel
detail).
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Operator Interface
Operator Panel 2
STATUS SCREEN
while running a CVD
recipe from start
START
Figure 15 Operator Panel 2
Press to Select Recipe
A numeric entry button. Pressing this button will activate the numeric
entry pad. Enter the desired recipe number, press enter, and then done.
The touch screen will revert back to the Operator’s Panel.
Press to View Recipe
Define
Press this button to activate the Recipe Define Panel. This panel defines
the action that corresponds to the selected recipe number.
Enter Batch #
A numeric entry button to enter batch number. Pressing this button will
activate the numeric entry pad. Enter the desired batch number, press
enter, and then done. The touch screen will revert back to the Operator’s
Panel.
System Status Message
Displays current system status.
Displays the current process chamber space temperature in °C.
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Internal Chamber Temp
Operator Interface
Press to Reset System
Button
When the reset button is pressed, the machine goes back into idle mode.
The reset button is pressed to (1) acknowledge alarms, (2) reset system if
process is aborted (in this case, machine will ring until you press reset),
or (3) simply to reset the machine at the end of a process run.
Process Chamber Pressure
in Torr Button
A numeric display button showing chamber pressure in torr.
GoTo Alarm Panel
Press to change screen display to Alarm Panel.
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Operator Interface
Plasma Process Operator
Panel
STATUS SCREEN
while running a plasma
recipe
START
Figure 16 Plasma Process Operator Panel
Press to Select Recipe
Pressing this button will activate the numeric entry pad. Enter the desired
recipe number, press enter, and then done. The touch screen will revert
back to the Operator’s Panel.
Enter Batch Number
Pressing this button will activate the numeric entry pad. Enter the desired
batch number, press enter, and then done. The touch screen will revert
back to the Operator’s Panel.
System Status Display
Message
Displays system status.
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Displays the current process chamber space temperature in °C.
Internal Chamber Temp
Press to Reset
A push button. Stops execution of a program sequence and returns to the
system controller to the reset state. Turns off alarm state and returns
system controller to the reset state. Turns all outputs off. Has no effect if
the system controller is already in the reset state.
Process Chamber Pressure
in Torr
Displays current process chamber pressure in Torr.
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Recipe Define Panel
From OPERATOR’S
PANEL
Press to view
RECIPE DEFINE
Figure 17 Recipe Define Panel
Recipe Display
Displays process and recipe numbers:
Recipe 0
Recipe 1-6
Recipe 7
installed.
Recipe 8
Recipe 9
Recipe 10
Recipe 11-14
Recipe 15
Recipe 16
For leak check procedures.
User defined CVD process recipes.
Primes system when new chemical source bottles are
For solvent cleaning of bottle 1 lines, may be other than
IPA (must be compatible with silane).
For solvent cleaning of bottle 2 lines, may be other than
IPA (must be compatible with silane).
User defined Image Reversal process recipe.
User defined Plasma Process recipes.
For evacuation if process is interrupted (reset, power
failure, etc). User will be cued when to use this recipe.
For venting if process is interrupted (reset, power failure,
etc). User will be cued when to use this recipe.
Cold Trap Temp in C
Displays the current temperature status of the LN2 trap in °C.
Exit Button
This
button
takes
you
to
the
main
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Operator’s
Panel.
Operator Interface
Alarm Panel
From OPERATOR’S
PANEL
GoTo ALARM PANEL
Figure 18 Alarm Panel
Alarm Window
The message display screen provides useful information to troubleshoot
the possible causes for an aborted process before calling YES. If the
problem continues, note symptoms and call YES field service at +1-925373-8353 (worldwide) or 1-888-YES-3637 (U.S. toll free).
The alarm window supplies the operator a list of current and historic
alarms. Each entry has a brief description of the alarm as well as the
trigger time-date; acknowledge time-date, and the clear time-date. To
acknowledge an alarm simply touch the Alarm Window. An alarm
window menu will appear at the bottom of the panel. Press the “Mode”
button and then use the “Up” or “Down” button to position the pointer
over the alarm to be acknowledged. Press the “ACK” button and the
current time-date will appear in the acknowledge column. To delete the
alarm from the Alarm Window simply press the “Del” button. To exit the
Alarm Window, press the “Done” button.
Enter Source Bottle 1
Volume in ml
A numeric entry and display button. Enter the volume of the newly
inserted source bottle 1. Volume is automatically set when Source #1
Prime button is pushed on the left side of the 1224P.
Enter Source Bottle 2
Volume in ml
A numeric entry and display button. Enter the volume of the newly
inserted source bottle 2. Volume is automatically set when Source #2
Prime button is pushed on the left side of the 1224P.
NOTE: Data entry into source bottle volume fields on this panel are
overwritten by data input in the “Enter Standard Source level in ml”
from Prime Injectors Panel 2 (when prime recipe is initiated in
Recipe 7).
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Enter 0 to Clear Cold Trap
Volume Counter
A numeric entry button. Enter 0 to clear the counter after drain operation
is complete. The amount of chemical in the cold trap is calculated based
on the volume dispensed and assuming 100% trapped. Actual volume
may be less, depending on the solvent contect of chemicals used.
Last Run Process Pressure
A numeric display button. Indicates the previous runs process pressure in
Torr. Used to confirm repeatability of consecutive processes.
Enter Access Code
A numeric entry button. The access code prevents unauthorized access to
the maintenance, system setup, and output screens. After proper code
entry, goes to Maintenance Panel.
Exit Button
This button takes you to the main Operator’s Panel.
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Maintenance Panel
From ALARM PANEL
Enter ACCESS CODE
Figure 19 Maintenance Panel
GoTo Recipe Setup Panel
A go to button. Changes the display back to the Recipe Setup Panel 1.
GoTo Factory Setup Panel
A go to button. Changes the display to the Factory Setup Panel.
Go Back
A go to button. Changes the screen display back to the Alarm Panel.
Exit Button
This button takes you to the main operator’s panel.
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Recipe Setup Panel
From MAINTENANCE
PANEL
GoTo RECIPE SETUP
PANEL
Figure 20 Recipe Setup Panel
GoTo CVD Process Recipe
Setup Panel
Changes the display to the CVD Process Recipe Setup Panel.
GoTo Plasma Process
Setup Panel
Changes the display to the Plasma Process Recipe Setup Panel.
GoTo Prime Injectors
Setup Panel
Changes the display to the Prime Injectors Setup Panel.
GoTo Cleaning Recipe
Setup Panel
Changes the display to the Prime Injectors Setup Panel.
GoTo Image Reversal
Recipe Setup Panel
Changes the display to the Image Reversal Setup Panel.
Go Back Button
Changes screen display to the Maintenance Panel.
Exit Button
Takes you to the main Operator’s Panel.
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CVD Recipe Setup Panel
(Recipes 1-6)
From RECIPE SETUP
PANEL
GoTo CVD Process Recipe
SETUP PANEL
Figure 21 CVD Recipe Setup Panel (Recipes 1-6)
Recipes 1-6 can be used to setup and preprogram chemical vapor
deposition (CVD) process recipes.
Enter Source 1 Injector
Volume in ML
A numeric entry button. Enter the desired volume for Source 1 in mls.
Input range 0-50ml.
Enter Source 2 Injector
Volume in ML
A numeric entry button. Enter the desired volume for Source 2 in mls.
Input range 0-50ml.
Enter Injector #2 Delay
Time in Seconds
Enter the desired time delay for Source 2 in seconds.
Input range 0-99999. Only to be used if both Source 1 and Source 2 are
used during the same recipe.
Enter Process Time in
Seconds
A numeric entry button. Enter desired total process time in seconds.
Timer is initiated when chemical injection begins. Input range 0-99999
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Injector 1 Pulse Time Open
in 1/100 Seconds
Enter desired open time duration for each pulse of Injector 1 in 1/100
seconds. Input range 0-99. Times shorter than 5 may result in pump
malfunction.
Injector 2 Pulse Time Open
in 1/100 Seconds
Enter desired open time duration for each pulse of Injector 2 in 1/100
seconds. Input range 0-99. Times shorter than 5 may result in pump
malfunction.
Enter Warm Up Time
Delay in Minutes
Press to enter the desired silylation warm up delay in minutes. Input
range 0-9999
GoTo Recipe Setup Panel
2
A go to button. Changes screen to the Recipe Set Up Panel 2.
Injector 1 Pulse Time
Closed in 1/100 Seconds
Enter desired closed time duration for each pulse of Injector 1 in 1/100
second. This is to adjust for slow vaporizing chemicals, without overinjecting, when process pressure is the predominant process variable.
Input range 0-99. Times shorter than 5 may result in pump malfunction.
Injector 2 Pulse Time
Closed in 1/100 Seconds
Enter desired closed time duration for each pulse of Injector 1 in 1/100
second. This is to adjust for slow vaporizing chemicals, without overinjecting, when process pressure is the predominant process variable.
Input range 0-99. Times shorter than 5 may result in pump malfunction.
Exit Button
This button takes you to the Main Operator’s Panel.
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CVD Recipe Setup Panel 2
From CVD RECIPE
SETUP PANEL
GoTo RECIPE SETUP
PANEL 2
Figure 22 CVD Recipe Panel 2
Enter # of Dehydrate
Purges
Used to set the preferred number of chamber/vapor flask purge cycles.
Used to eliminate water from chamber/vapor chamber prior to vapor
deposition. This differs from the evacuation purge in that: A dehydration
purge has high and low pressure limits, while an evacuation purge
pumps down to a base pressure and remains open for a desired time.
Input range 0-999.
Enter Base Pressure in Torr
Used to set the process base pressure in Torr. This is the pressure
achieved before infusion begins. Input range 0.05-1.0T. Base pressure
settings below 0.5T may result in excessive pump down delays and
process abort.
Enter Abort Pressure in
Torr
Used to set the desired upper fluid expansion abort pressure in Torr.
Input range 10-700
Press to Select Recipe
Number
Used to set, alter, load, or save the desired recipe.
Enter Purge Pressure Hi in
Torr
Used to set the purge cycle high pressure in Torr. Input range 100-500.
Enter Evac Time in
Seconds
Used to set the time in seconds in which the vacuum valve constantly
stays open to eliminate residual chemical from chamber/vapor chamber.
Input range 0-999.
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Enter Volume Pulse
Multiplier in ml
Used to calibrate chemical volume to pulse ratio. Enter to set the volume
per pulse calibration factor for the chemical. Factors such as, chemical
viscosity, N2 pressure and micropump cycle time will affect this input
value. It is usually set to 0.1
Press to View Recipe
Pushing this button displays previously defined recipe parameters.
Enter Purge Pressure Low
in Torr
Used to set the purge cycle low pressure in Torr. Input range 0.5-100.
Enter # of Evacuation
Purges
Used to set the number of desired evacuation purge cycles. Eliminates
residual chemical from chamber/vapor chamber. Input range 2-999.
Go Back Button
This button takes you to the CVD Recipe Setup Screen 1.
Press to Save Recipe
Overwrites information pertaining to the selected recipe number as
mentioned above. Pushing this button stores current recipe parameters
into the controller.
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Prime Micro Pumps Panel
(Recipe 7)
From RECIPE
SETUP PANEL
GoTo PRIME INJECTORS
SETUP PANEL
Figure 23 Micro Pumps Panel 1 (Recipe 7)
Recipe 7 is used to prime system prior to installing new chemical bottles.
Enter Source 1 Injector
Volume in ml
Used to set desired volume for injector pump 1 in mls.
Input range 0-50ml
Enter Source 2 Injector
Volume in ml
Used to set desired volume for injector pump 2 in mls.
Input range 0-50ml
Enter Process Time in
Seconds
Used to enter desired total process time in seconds. Timer is initiated
when chemical injection begins. Input range 0-99999.
Injector 1 Pulse Time
Opened in 1/100 Seconds
Enter desired open time duration for each pulse of Injector 1 in 1/100
seconds. Input range 0-99.
Injector 2 Pulse Time
Opened in 1/100 Seconds
Enter desired open time duration for each pulse of Injector 2 in 1/100
seconds. Input range 0-99.
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GoTo Recipe Parameter
Panel 2
Changes the screen to the secondary recipe 7 set up panel.
Injector 1 Pulse Time
Closed in 1/100 Seconds
Enter desired closed time duration for each pulse of Injector 1 in 1/100
second. This is to adjust for slow vaporizing chemicals, without overinjecting, when process pressure is the predominant process variable.
Input range 0-99.
Injector 2 Pulse Time
Closed in 1/100 Seconds
Enter desired closed time duration for each pulse of Injector 2 in 1/100
seconds. This is to adjust for slow vaporizing chemicals, without overinjecting, when process pressure is the predominant process variable.
Input range 0-99.
Go Back Button
Takes you to the Recipe Setup Panel.
Exit Button
Takes you to the Main Operator’s Panel.
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Prime Micro Pumps
Panel 2
From PRIME MICRO
PUMPS PANEL 1
GoTo RECIPE
PARAMETER PANEL 2
Figure 24 Prime Micro Pumps Panel 2 (Recipe 7)
Enter Standard Source 1 Level in ml
Enter the volume of the full bottle you are going to insert into the source
1 tray. Input range 0-500ml. This volume will be used when Source 1
Prime button is pressed.
Enter Standard Source 2
Level in ml
Enter the volume of the full bottle you are going to insert into the source
2 tray. Input range 0-500ml. This volume will be used when Source 2
Prime button is pressed.
Enter # of Evacuation
Purges
Enter to set the number of desired evacuation purge cycles. Used to
eliminate residual chemical from chamber/vapor chamber.
Input range 2-999. Usually 3 times is sufficient.
Enter Purge Pressure Hi in
Torr
Enter to set the purge cycle high pressure in Torr. Input range 100-600.
Normally set at 500.
Enter Base Pressure in Torr
Enter to set the process base pressure in Torr. This is the pressure
achieved before infusion begins. Input range 0.1-1. Normally set at 1.
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Enter Volume Per Pulse
Multiplier in ml
Enter to set the volume per pulse calibration factor for the chemical. 1
equates to 0.02 ml using distilled water. Other chemicals will differ
depending on density, viscosity, and pressure head differential. Input
range 0-1.0. Normally set at 0.1
Go Back Button
This button returns you to the previous Recipe 7 setup panel.
Enter Purge Pressure Low
in Torr
Enter to set the purge cycle low pressure in Torr. Input range 0.5-100
Torr. Normally set to 10.
Enter Evacuation Time in
Seconds
Enter to set the time in seconds in which the vacuum valve constantly
stays open to eliminate residual chemical from chamber/vapor chamber.
Input range 0-999. Normally set to 180.
Enter Abort Pressure in
Torr
Used to set the desired upper fluid expansion abort pressure in Torr.
Input range 5-700. Normally set to 100.
Exit Button
This button takes you to the Main Operator’s Panel.
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Cleaning Recipe Panel
(Recipe 8 & 9)
From RECIPE SETUP
PANEL
GoTo CLEANING
RECIPE SETUP PANEL
Figure 25 Cleaning Recipe Panel (Recipe 8 & 9)
Recipes 8 & 9 are used for solvent cleaning of source bottle lines.
Cleaning parameters are shared for pump 1 and 2.
Source Bottle 1 = Recipe 8
Source Bottle 2 = Recipe 9
NOTE: when Recipe 8 is selected on the Operator’s Panel, only Source
1 will deliver. When Recipe 9 is selected, only Source 2 will deliver.
Enter Source 1 Injector
Volume in ml
Enter desired volume for injector pump 1 in mls. Input range 0-50ml.
Enter Source 2 Injector
Volume in ml
Enter desired volume for injector pump 2 in mls. Input range 0-50ml.
Process Time in Seconds
Enter desired total process time in seconds. Timer is initiated when
chemical injection begins. Input range 0-99999.
Injector 1 Pulse Time Open
in 1/100 Seconds
Enter desired open time duration for each pulse of Injector 1 in 1/100
seconds. Input range 0-99.
Injector 2 Pulse Time Open
in 1/100 Seconds
Enter desired open time duration for each pulse of Injector 2 in 1/100
seconds. Input range 0-99.
Enter Warm Up Delay
Used to enter the desired silylation warm up delay in minutes. Input
range 0-9999.
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GoTo Recipe Parameter
Panel 2
Changes the screen to the secondary recipe 8 set up panel.
Injector 1 Pulse Time
Closed
Enter desired closed time duration for each pulse of Injector 1 in 1/100
seconds. This is to adjust for slow vaporizing chemicals, without overinjecting, when process pressure is the predominant process variable.
Input range 0-99.
Injector 2 Pulse Time
Closed
Enter desired closed time duration for each pulse of Injector 2 in
1/100 seconds. This is to adjust for slow vaporizing chemicals,
without over-injecting, when process pressure is the predominant
process variable. Input range 0-99.
Go Back Button
This button takes you to the Recipe Setup Panel.
Exit Button
This button takes you to the Main Operator’s Panel.
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Cleaning Recipe 2 Panel
From CLEANING RECIPE
PANEL
GoTo RECIPE
PARAMETER PANEL 2
Figure 26 Cleaning Recipe Panel 2
Enter # of Dehydration
Purges
Used to set the preferred number of chamber/vapor flask purge cycles.
Used to eliminate water from chamber/vapor chamber. This differs from
the evacuation purge in that: A dehydration purge has high and low
pressure limits, and an evacuation purge pumps down to a base pressure
and remains open for a desired time. Input range 0-999.
Enter Base Pressure in Torr
Used to set the process base pressure in Torr. This is the pressure
achieved before infusion begins. Input range 0.1-10. Normally set at 1.0.
Enter Abort Pressure in
Torr
Press to set the desired upper fluid expansion abort pressure in Torr.
Input range 5-700. Normally set at 100.
Enter Purge Pressure Hi in
Torr
Used to set the purge cycle high pressure in Torr. Input range 100-600.
Enter # of Evacuation
Purges
Enter to set the number of desired evacuation purge cycles. Used to
eliminate residual chemical from chamber/vapor chamber.
Input range 2-999.
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Enter Volume Per Pulse in
ml
This button is used to calibrate chemical volume to pulse ratio. Enter to
set the volume per pulse calibration factor for the chemical. 1 equates to
0.02 ml using distilled water. Other chemicals will differ depending on
density, viscosity, and pressure head differential. Input range 0-1.0.
Normally set at 0.1.
Enter Purge Pressure Low
in Torr
Used to set the purge cycle low pressure in Torr. Input range 0.5-100.
Enter Evac Time in
Seconds
Used to set the time in seconds in which the vacuum valve constantly
stays open to eliminate residual chemical from chamber/vapor chamber.
Input range 0-999
Go Back Button
This button returns the screen to the previous Cleaning Recipe panel.
Exit Button
This button returns to the main Operator’s Panel.
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Image Reversal Panel
(Recipe 10)
From RECIPE SETUP
PANEL
GoTo IMAGE REVERSAL
RECIPE SETUP PANEL
Figure 27 Image Reversal Panel (Recipe 10)
Enter Process Time in
Seconds
Used to set the dwell time, in seconds, desired after the process gas is
delivered into chamber. See the process descriptions for details of how
the process duration variable is used for each process.
Input range 0-99999
Enter Warm Up Delay
Press to enter the desired image reversal or gas treatment warm up delay
in minutes. Input range 0-9999.
Enter # of Purges
Used to set the preferred number of chamber purge cycles. Used to
eliminate residual gases and water vapor from chamber before a
chemical processing step is introduced. Input range 0-999.
Enter # of Evacuation
Purges
Used to set the number of desired evacuation purge cycles. Used to
remove unused process chemicals after the chemical processing step is
complete. Both purge and evacuation cycles use the same purge high and
low pressure set points. Input range 2-999.
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Enter Purge Pressure Hi in
Torr
Used to set the purge cycle high pressure in Torr. Input range 100-600.
Enter Purge Pressure Low
in Torr
Used to set the purge cycle low pressure in Torr. Input range 0.5-100.
Enter Base Pressure in Torr
Used to set the desired process base pressure in Torr. This is the initiated
pressure directly after the infusion step. Input range 0.5-100.
Enter Process Pressure in
Torr
Used to enter the desired upper process gas expansion pressure in Torr.
Input range 1-600.
Enter Abort Pressure in
Torr
Used to enter the desired upper gas expansion abort pressure in Torr.
Input range 5-700.
Go Back Button
This button takes you to the Recipe Setup panel.
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Plasma Process Setup
Panel 1 (Recipes 11-14)
From RECIPE SETUP
PANEL
GoTo PLASMA PROCESS
RECIPE SETUP PANEL
Figure 28 Plasma Recipe Setup Panel 1
Gas Flow Rate in SCCM
Pressing this button will activate the numeric entry pad. Enter the desired
flow rate for Gas #1, press enter, and then done. For MFC equipped
systems, enter flow rate 0-100. For needle valve systems, enter 1 or 0.
Enter Process Time in
Seconds
Enter desired total process time in seconds. Timer is initiated when
chemical injection begins.
Gas #2 Flow Rate in
SCCM
Pressing this button will activate the numeric entry pad. Enter the desired
flow rate for Gas #2, press enter, and then done. For MFC equipped
systems, enter flow rate 0-100. For needle valve systems, enter 1 or 0.
Gas #3 Flow Rate in
SCCM
Pressing this button will activate the numeric entry pad. Enter the desired
flow rate for Gas #3, press enter, and then done. For MFC equipped
systems, enter flow rate 0-100. For needle valve systems, enter 1 or 0.
Enter Recipe Link Number
Enter Recipe # to process upon completion of current recipe.
Exit
Returns to the Operator’s Panel.
GoTo Plasma Recipe Setup
Panel 2
Changes the screen to the Plasma Recipe Setup Panel 2.
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Plasma Process Setup
Panel 2
From PLASMA PROCESS
SETUP
GoTo PLASMA RECIPE
SETUP PANEL 2
Figure 29 Plasma Recipe Setup Panel 2
Enter Base Pressure in Torr
Press this button to activate the numeric entry pad. Enter the desired base
pressure in torr, press enter, and then done. The touch screen will revert
back to the Plasma Recipe Setup Panel 2. Input range 0.05 – 0.5 Torr.
Enter # of Evac Purges
Press this button to activate the numeric entry pad. Enter the desired post
process evacuation purges, press enter, and then done. The touch screen
will revert back to the Plasma Recipe Setup Panel 2. Input range 0-9.
Press to Select Recipe
Number
Press this button to activate the numeric entry pad. Enter the number for
this recipe, press enter, and then done. The touch screen will revert back
to the Plasma Recipe Setup Panel 2.
Enter Process Pressure Hi
Abort Trip Point in mTorr
Press this button to activate the numeric entry pad. Enter the process
pressure hi trip point in Torr, press enter, and then done. The touchscreen
will revert back to the Plasma Recipe Setup Panel 2.
Input range 0.200 – 20.00.
Enter RF Cal Value in
Watts
Press this button to activate the numeric entry pad. Enter the RF
calibration value in watts, press enter, and then done. The touch screen
will revert back to the Plasma Recipe Setup Panel 2.
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Press to View Recipe
Push this button to display previously defined recipe parameters.
Enter Process Pressure
Low Abort Trip Point in
mTorr
Pressing this button will activate the numeric entry pad. Enter the process
pressure low trip point in mTorr, press enter, and then done. The touch
screen will revert back to the Plasma Recipe Setup Panel 2. Input range
0.05 – 0.5.
Go Back Button
Press this button to return to the Plasma Recipe Setup Panel #1.
Press to Save Recipe
Overwrites information pertaining to the selected recipe number as
mentioned above. Pushing this button stores current recipe parameters
into the controller.
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Factory Setup Panel
From MAINTENANCE
PANEL
FACTORY SETUP PANEL
Access Code
Figure 30 Factory Setup Panel
Enter Register Number
A numeric entry button. Enter the system controller memory register
number that will be displayed and may be changed in the "Enter Register
Data" button.
Enter Registered Data
A numeric entry button. Enter a numeric value that is to be permanently
entered into the system controller memory register location displayed in
the "Enter Register Number" button. Register values may need to be
edited to change the settings of program sequence timers or other
program settings.
Caution! It is possible to affect program
performance by changing certain register data.
Cold Trap Volume Alarm
Trip Point in ml
A numeric entry button. Enter the maximum LN2 trap volume capacity in
ml. Input range 0-500ml
Com Loop ON/OFF
Toggle
Toggles activation status of the communications loop.
Go To Setup Panel
Changes the display to the Setup panel screen.
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Go To Vacuum Panel
Changes the display to the Vacuum panel screen.
Enter the desired LN2 trap upper temperature limit in °C. Used for refill
operation indication.
Cold Trap Temp Alarm
Trip Point in C
Go To Output Panel
Changes the display to the Output panel 1.
Go To Plasma Panel
Changes the display to the Plasma panel screen.
Go Back Button
Takes you back to the Maintenance Panel.
Exit Button
This button takes you back to the main operator’s panel.
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Time-Date Set Up Panel
From FACTORY SETUP
PANEL
GoTo SETUP PANEL
Figure 31 Time-Date Set Up Panel
Set System Buttons
Numeric entry buttons used to set date and time on the system.
Set System Contrast Button
This button can be used to set the b/w color contrast for the screen.
However, YES recommends using the contrast shortcut, which can be
accessed from any screen. By simultaneously pressing the upper right
and upper left corners of any screen, a color bar will display. Push the
color bar to alter the screen contrast.
Press Here
Press Here
Color Bar
Go Back Button
This button takes you to the previous panel (service access).
Exit Button
This button takes you to the main operator’s panel.
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Vacuum Panel
From FACTOR SETUP
PANEL
GoTo VACUUM PANEL
Figure 32 Leak Check Panel
Enter Vapor Detect Value
Used to enter acceptable voltage differential between the Heated
Manometer and vapor detection gauge. Consult YES before changing
this value.
GP Pressure Valve
ON/OFF
A push button used to turn pressure valve on/off. Displays current status.
Plasma Vac ON/OFF
A push button used to turn plasma vacuum valve on/off. Displays current
status.
CVD Vac ON/OFF
A push button used to turn the CVD vacuum valve on/off. Displays
current status.
GP Chamber Pressure in
Torr
Displays the current process chamber pressure in Torr from the Granville
Phillips® pressure gauge.
Vapor Valve 1 ON/OFF
Turns the vapor valve 1 on or off and displays current status.
Vapor Valve 2 ON/OFF
Turns the vapor valve 2 on or off and displays current status
Press for Vent ON/OFF
Turns the N2 valve on or off and displays current status.
Vapor Chamber Pressure in
Torr
Displays current chamber pressure in Torr from the GDG gauge.
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Go Back Button
This button takes you back to the Factory Setup Panel.
Exit Button
This button takes you back to the main Operator’s Panel.
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Output Panel 1
From FACTORY SETUP
PANEL
GoTo OUTPUT PANEL
Figure 33 Output Panel 1
CVD Vac On/Off
This button turns the vacuum valve on/off and displays current status for
silane vapor pump.
Vapor Valve 1 On/Off
This push button turns vapor valve 1 on/off and displays current status
(chamber to flask 1).
Gas 1 On/Off
This push button turns gas 1 on/off and displays current status.
Door Seal Purge On/Off
This push button turns the door seal purge on/off and displays current
status.
Plasma Vac On/Off
This push button turns the plasma vacuum on/off and diplays current
status.
Vapor Valve 2 On/Off
This push button turns vapor valve 2 on/off and displays current status
(chamber to flask 2).
Gas 2 On/Off
This push button turns gas 2 on/off and displays current status.
GoTo Micro Pump Output
Panel
Pressing this button takes you to the micro pump output panel.
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CVD Vac On/Off
This button turns the vacuum valve on/off and displays current status.
Vapor Valve 1 On/Off
This push button turns vapor valve 1 on/off and displays current status.
Gas 1 On/Off
This push button turns gas 1 on/off and displays current status.
Door Seal Purge On/Off
This push button turns the door seal purge on/off and displays current
status.
Plasma Vac On/Off
This push button turns the plasma vacuum on/off and diplays current
status.
Vapor Valve 2 On/Off
This push button turns vapor valve 2 on/off and displays current status.
Gas 2 On/Off
This push button turns gas 2 on/off and displays current status.
GoTo Micro Pump Output
Panel
Pressing this button takes you to the micro pump output panel.
N2 On/Off
This push button turns N2 on/off to vent the chamber and displays
current status.
Process Gas On/Off
This push button turns process gas on/off and displays current status.
Gas 3 On/Off
This push button turns gas 3 on/off and displays current status.
Alarm On/Off
Turns the audible alarm on/off and displays current status.
Complete Light On/Off
This push button turns the light tower YELLOW light on/off and
displays current status.
Abort Light On/Off
This push button turns the light tower RED light on/off and displays
current status.
Running Light On/Off
This push button turns the light tower GREEN light on/off and displays
current status.
Process Chamber Pressure
in Torr
Displays current process pressure in Torr.
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Go Back Button
This button takes you to the Factory Setup panel.
Exit Button
This button takes you to the main Operator’s Panel.
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Operator Interface
Output Panel 2
From OUTPUT PANEL
GoTo MICROPUMP
OUTPUT PANEL
Figure 34 Output Panel 2
Press for Pump 1 Infuse
Actuator On/Off
This push button turns pump 1 infuse actuator on or off and displays
current status (for troubleshooting only).
Press for Pump 2 Infuse
Actuator On/Off
This push button turns pump 2 infuse actuator on/off and displays current
status (for troubleshooting only).
CVD Vac On/Off
This push button turns the CVD vacuum valve on/off and displays
current status.
N2 On/Off
This push button turns process N2 valve on/off and displays current
status.
Vapor Valve 1 On/Off
This push button turns the vapor valve 1 on or off and displays current
status (chamber to Flask 1).
Vapor Valve 2 On/Off
This push button turns the vapor valve 2 on or off and displays current
status (chamber to Flask 2).
Process Chamber Pressure
in Torr
Displays current process chamber pressure in Torr.
Go Back Button
This button takes you to the previous Maintenance panel.
Exit Button
This button takes you to the main Operator’s panel.
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Operator Interface
Plasma Process Outputs
Panel
From FACTORY
SETUP PANEL
GoTo PLASMA OUTPUT
PANEL
Figure 35 Plasma Process Outputs
Plasma Vac On/Off
A push button that turns the plasma vacuum valve on/off. Displays
current valve status.
Gas 1 On/Off
A push button that turns the gas 1 valve on/off. Displays current valve
status.
Gas 2 On/Off
A push button that turns the gas 2 valve on/off. Displays current valve
status.
Gas 3 On/Off
A push button that turns the gas 3 valve on/off. Displays current valve
status.
N2 On/Off
A push button that turns the N2 gas valve on/off. Displays current valve
status.
Plasma Pressure Valve
On/Off
A push button that turns the plasma pressure valve on/off. Displays
current valve status.
RF Power On/Off
This button turns RF Power on/off and displays current power
status.
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Operator Interface
Enter RF Power Setting
Press to enter RF power setting. Enter a value between 0-1000 in the
numerical entry display. Press "Enter" and then "Done." This is used to
manually set the RF power supply voltage and compare to "RF Analog
Diagnostic Display" for troubleshooting purposes. Entry units are 0-4000
mV, which corresponds to 0-1000 Watts. (Divide mV by 4 to arrive at a
watt value)
NOTE: RF power operation at improper pressures
may reduce power supply lifetime.
Process Chamber Pressure
in Torr
Displays the current process chamber pressure in Torr.
NOTE: Plasma pressure valve must be turned on.
Go Back Button
Returns to the Factory Setup screen.
Exit
Takes you back to the main Operator’s Panel.
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Operator Interface
Over Temp Panel
Figure 36 Over Temp Panel
System Status Message
Displays system status.
Press to Reset Over Temp
Module
Used to reset the heaters lockout alarm on the over temp module.
Press to Silence Alarm
Used for silence audible alarm – does not clear alarm condition. Has no
effect if the system controller is not in an alarm state.
Press to Reset System
This push button stops execution of a program sequence and returns to
the system controller to the reset state. Turns off alarm state and returns
system controller to the reset state. Turns all outputs off. Has no effect if
the system controller is already in the reset state.
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Operator Interface
Prime Pump Recipe Panel
From START
Displayed only when Recipe 7 is
started
Figure 37 Prime Pump Recipe Panel
Press to Prime Pump 1
Press this button to activate the prime micro pump #1 recipe screen.
Pressing this touch screen has the same effect as pressing Source #1
Prime button on the left side of the 1224P Unit.
Press to Prime Pump 2
Press this button to activate the prime micro pump #2 recipe screen.
Pressing this touch screen has the same effect as pressing Source #2
Prime button on the left side of the 1224P Unit.
Press to Reset
Press this button to stop execution of a program sequence and return the
system controller to the reset state. Turns off alarm state and returns
system controller to the reset state. Turns all outputs off. Has no effect if
the system controller is already in the reset state.
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Instrumentation
Instrumentation
Plasma Gas
Configurations
Figure 38 Plasma Gas Piping - No MFC Option
Figure 39 Plasma Gas Piping - MCF options
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Instrumentation
Piping Schematic
1/4
1/4
1/4
1/4
1/4
1/4
1/4
1/4
1/4
1/4
1/2
1/4
1/2
1/2
1/2
1/4
1/4
1/4
1/2
1/2
1/2
1/2
1/4
1/2
1/2
1/2
1/2
1/2
1/2
1/2
1/2
1/4
1/4
1/4
1/4
1/4
1/8
1/8
1/8
1/8
1/4
1/4
1/8
1/8
1/8
1/4
Figure 40 Piping Schematic
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Instrumentation
Chamber Heating &
Pressure Instrumentation
Figure 41 Chamber Heating & Pressure Instrumentation
Vacuum Piping & Heating
Instrumentation
Figure 42 Vacuum Piping & Heating Instrumentation
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Instrumentation
Chemical Flask 1 Piping
Instrumentation
Figure 43 Chemical Flask 1 Piping
Chemical Flask 2 Piping
Instrumentation
Figure 44 Chemical Flask 2 Piping
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Instrumentation
Electrical Power Distribution
Sheet numbers in the above power distribution diagram refer to the
electrical schematic for the YES-1224P.
Figure 45 Electrical Power Distribution
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Instrumentation
The YES-1224P tool has two separate pressure gauge types on the
chamber. One is used for chamber vapor detection pressure comparrison
and the others are for chamber process pressure measurement.
Chamber Vapor
Detection Pressure Gauge
The chamber vapor detection pressure is measured by a Convectron®
pressure gauge with a measurement range of 1000 Torr to 0.1 mTorr.
Because the Convectron® gauge is sensitive to gas composition, pressure
readings will differ from the pressure measurement from the HCM type.
Chamber Process
Pressure Gauges
Process pressure is measured by one 0-10 and one 0-1000 Torr heated
capacitance manometer (HCM). The HCM pressure reading is not
sensitive to gas composition and the values are displayed on the user
interface panel.
Each heating zone has redundant thermal protection to prevent an
overmperature run away if the primary controller fails. Also, all zones
are monitored via 485 communicatiions.
Chamber Temperature
Controllers
Chamber temperature is controlled via a four zone controller array. The
zones are; door, chamber from perimeter, chamber middle perimeter, and
chamber rear. Each zone is controlled by a partlow 1160 controller
located on the front of the control console.
Each zone has a bolt on type j thermocouple. Thermocouple output
voltage is input to the zone temperature controller. Temperature
controller output changes the amount of power supplied to the chamber
zone heaters.
Vapor Line Temperature
Controllers
Vapor line temperature is controller by partlow 1160 controller located
on the front of the control console. The vapor line has a type j
thermocouple fastened to a thermocouple clamp ring. Thermocouple
output voltage is input to the zone temperature controller. Temperature
controller output changes the amount of power supplied to the vapor line.
Vapor Flask
Temperature Controllers
Vapor flask temperature is controller by partlow 1160 controller located
on the front of the control console. The vapor flask has a type j
thermocouple fastened to a thermocouple clamp ring. Thermocouple
output voltage is input to the zone temperature controller. Temperature
controller output changes the amount of power supplied to the vapor
flask.
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Instrumentation
Vacuum Line
Temperature Controllers
Vacuum line temperature is controller by partlow 1160 controller located
on the front of the control console. The vacuum line has a type j
thermocouple fastened to a thermocouple clamp ring. Thermocouple
output voltage is input to the zone temperature controller. Temperature
controller output changes the amount of power supplied to the vacuum
line.
PLC Controller I/O List
Table 1 PLC Controller Digital Inputs
I/O#
Location –
Card 1
Description
1 Over temperature Alarm-Watlow
TB3-2
2 Over temperature-Cal3200
TB4-2
3 RF Set point Confirmation
TB3-3
4 1000 Torr HCM Over temp
TB4-3
5 100 Torr HCM Over temp
TB3-4
6 Not Used
TB4-4
7 Prime Button 1
TB3-5
8 Prime Button 2
TB4-5
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Instrumentation
Table 2 PLC Controller Digital Outputs
I/O#
Description
Location - Card 2
1 Process Gas Valve
TB5-2
2 Vacuum Valve 1
TB6-2
3 Vent Valve
TB5-3
4 Pump 1 Infuse Valve
TB6-3
5 Pump 2 Infuse Valve
TB5-4
6 Vapor Valve 1
TB6-4
7 Not Used
TB5-5
8 Audible Alarm
TB6-5
I/O#
Description
Location - Card 3
9 Green Light
TB7-2
10 Yellow Light
TB8-2
11 Red Light
TB7-3
12 Vacuum Valve 2
TB8-3
13 Vapor Valve 2
TB7-4
14 Remote RF Power
TB8-4
15 Vapor Detect Valve
TB7-5
16 Over temperature Module Reset
TB8-5
I/O#
Description
Location - Card 4
17 Not Used
TB9-2
18 Not Used
TB10-2
19 Source 1 Purge Solenoid
TB9-3
20 Source 2 Purge Solenoid
TB10-3
21 Plasma Gas 1
TB9-4
22 Plasma Gas 2
TB10-4
23 Plasma Gas 3
TB9-5
24 Door Seal Purge
TB10-5
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Instrumentation
Table 3 PLC Controller Analog Inputs
Location – Card 5
Config
1 1000 Torr HCM Input
TB11-2(+) TB12-2(-)
0-10VDC
2 100 Torr HCM Input
TB11-3(+) TB12-3(-)
0-10VDC
3 RF Power Level
TB11-4(+) TB12-4(-)
0-10VDC
4 RF Supply Diagnostics
TB11-5(+) TB12-5(-)
0-10VDC
Location – Card 6
Config
I/O#
I/O#
Description
Description
5 Cold Trap TC
TB13-2(+) TB14-2(-) 100 mVDC
6 Chamber Monitor TC
TB13-3(+) TB14-3(-) 100 mVDC
Location – Card 7
Config
7 Not Used
TB17-2(+) TB18-2(-)
0-10VDC
8 MFC/Gas 1 Flow
TB17-3(+) TB18-3(-)
0-10VDC
9 MFC/Gas 1 Flow
TB17-3(+) TB18-3(-)
0-10VDC
10 MFC/Gas 1 Flow
TB17-3(+) TB18-3(-)
0-10VDC
Location – Card 8
Config
11 Not Used
TB19-2(+) TB20-2(-)
0-10VDC
12 Not Used
TB20-3(+) TB20-3(-)
0-10VDC
I/O#
I/O#
Description
Description
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Instrumentation
Table 4 PLC Controller Analog Outputs
I/O#
Description
Location – Card 6
Config
1 MFC/Gas 2 Set Point
TB13-4(+) TB14-4(c)
0-10 VDC
2 MFC/Gas 3 Set Point
TB13-5(+) TB14-5(c)
0-10VDC
I/O#
Description
Location – Card 8
Config
3 RF Power Set Point
TB19-4(+) TB20-4(c)
0-10VDC
4 MFC/Gas 1 Set Point
TB19-5(+) TB20-5(c)
0-10VDC
Table 5 PLC Controller Serial Communications
Touch screen
COM1
485 Loop – Heater Controller, Pressure
COM2
Monitor/Upload
TCP/IP
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Instrumentation
Push Button Controls
EMO
An EMO (emergency shut off) button is located on the front deck of the
tool. Pressing the EMO shuts off all power. To restore power, the EMO
must be pulled out and a Power On button pressed.
The EMO circuit disables power from all electrical components
downstream of the circuit. The 24VDC power supply is always active.
When the EMO button is reset and the power on button is pressed, power
flows through two relay coils. The DC contact coil uses one contact for
the downstream 24VDC power and one for the power on button latch,
and the AC contact coil uses both contacts: one for each hot leg of the
208/230 VAC power downstream of the 24VDC power supply AC input.
Power On
Power On button is located on the front panel (green button). The circuit
breaker switch labeled “power disconnect” is on the rear panel.
The Power On button on the front of the system will light up green when
the YES1224P is on.
Status Indicators
Light Tower
The light tower is located on the top of the YES-1224P. Two status
indicator lights, red and green are available to indicate tool status.
Steady Green:
Flashing Green:
Red:
No Light:
Process Running
Process Done
Process Abort
Not Running a Process
Audible Alarm
The audible alarm is located on the rear of the tool. Use of the audible
alarm is configurable by the operator.
Intermittent alarm:
Steady Alarm:
Process Done
Process Abort
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Safety
Safety
NOTE: Read this manual carefully before installing,
using or servicing the YES-1224P system. If there are
any doubts about the safe use of this equipment, contact
the YES Customer Service Department at (888) YES3637.
Warning! Never use combustible liquids or vapors
with the system. Never use combustible solvent to clean
any part of the YES-1224P system.
Safety Signal Word
Definitions
Caution
Caution – Indicates a potentially hazardous situation which, if not
avoided, may result in minor or moderate injury. It may also be used to
alert against unsafe practices (ANSI Z535.4).
Warning
Warning – Indicates a potentially hazardous situation, which, if not
avoided, could result in death or serious injury (ANSI Z535.4).
Danger
Danger – Indicates an imminently hazardous situation, which, if not
avoided, will result in death or serious injury. This signal word is to be
limited to the most extreme situations (ANSI Z535.4).
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Safety
Unavoidable hazards
Type 3 Electrical Hazards
Type 3: Maintenance in areas exposed to live circuits
less than 30V RMS or 240VA with accidental contact
possible.
Control enclosure entrance with power on may be required for electrical
malfunction troubleshooting.
The control enclosure contains circuits with potentials up to 220VAC
and 24VDC. All electrical contacts and terminals in the control enclosure
are shielded from inadvertent contact.
Type 4 Electrical Hazards
Type 4: Maintenance in areas exposed to live circuits
greater than 30V RMS, 240VA, or RF with accidental
contact possible.
The following recommended set up and maintenance procedures require
entrance into the control enclosure while the power is on. Control
enclosure entrance with power on may also be required for electrical
malfunction troubleshooting.
The control enclosure contains circuits with potentials up to 220VAC
and 24VDC. All electrical contacts and terminals in the control enclosure
are shielded from inadvertent contact.
Verify supply voltages and frequencies (set up only)
System power up (set up only)
Type 5 Electrical Hazards
Type 5: Maintenance requiring physical entrance into
energized equipment.
There are no Type 5 electrical hazards on the YES-1224P The YES1224P is too small for physical entrance.
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Safety
Chemical Handling
HMDS
Hexamethyldisilazane (HMDS) Usage and Precautions
ID No. 999-97-3
Description
HMDS is a colorless, clear liquid with an
ammonia-like odor detectable at low
concentration. It is a stable compound
under normal conditions. HMDS reacts
slowly with water, but vigorously with
alcohol, and mineral acids giving off
ammonia.
Avoid skin and eye contact when handling HMDS. It is a corrosive and
can cause burns to the skin and eyes as well as irritation to the upper
respitory system. Goggles, faceshield, gloves, and an apron should be
worn by all personnel handling HMDS.
NOTE: HMDS at room temperature has pressure of
~15 Torr. Heated HMDS at 85°C for silylation has a
pressure of ~100 Torr. Atmospheric pressure is 760
Torr. The YES systems provide a vacuum seal only and
cannot be pressurized above 760 Torr. Above 760 Torr
gases such as N2 would vent out the front door seal.
Concerns of pressurizing the chamber are therefore
unwarranted.
Physical Properties
The most important physical properties of HMDS:
Chemical formula
Molecular weight
Boiling point
Flash point (closed cup)
Vapor pressure
Percent volatile by volume
[(CH3) 3Si] 2NH
161.4
126°C/258.8°F
12.77°C/55°F
~20mm Hg
100%
Effects
The following provides physiological effects of various concentrations of
HMDS in the air:
Least detectable odor
Maximum concentration for prolonged exposure
Maximum concentration for short exposure
Least amount causing immediate eye irritation
HMDS
(ppm)
5
~35
~175
~600
Least amount causing cough
~600
NOTE: Values are based on HMDS concentrations converted to
ammonia when entering the system.
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Safety
HMDS Leak Detection
There are several methods of detecting HMDS leaks.
materials used for leak detection of HMDS are:
Among the
Ammonia test paper
Moistened phenolphthalein or litmus test paper will change color when
exposed to ammonia.
Ammonia Drager tube
When the fumes are detected, the color changes from yellow to blue.
Dilute hydrochloric acid
When the fumes from the dilute hydrochloric acid come in contact with
the ammonia vapor, it will produce a dense white fog.
Handling & Storage
The following are general rules which should be observed when handling
and storing HMDS.
1. Store in a cool, dry area. Store under
nitrogen blanket to increase shelf life.
2. Avoid breathing vapors.
3. Avoid skin contact.
4. Avoid contact with a flame.
5. In case of accidental spillage evacuate the area.
6. Soak up the spill with an absorbent material
and place it in a disposal container.
7. In case of accidental contact with the skin or eyes, flush the area of
contact for 15 minutes and consult a physician.
8. HMDS can build up a static charge. All equipment should be grounded
during the transfer operation.
Ammonia
Ammonia Gas Usage and Precautions
Anhydrous ammonia gas, ID No. 1005
Description
Anhydrous ammonia is classified by the
Interstate Commerce Commission as a
non-flammable gas. Anhydrous ammonia
is a very stable compound under normal
conditions. It reacts with water to form
ammonium hydroxide, commonly known
as aqua ammonia. Ammonia will not
corrode iron, steel or aluminum but reacts
rapidly with copper, zinc, and their alloys.
The combination of ammonia and mercury
could represent a possible explosion.
Ammonia gas is not harmful at low concentrations. The pungent odor of
the gas gives adequate warning of its presence in the air and does
represent a possible panic hazard. Goggles should be worn by all
personnel handling anhydrous ammonia.
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Safety
Physical Properties
The most important physical properties of anhydrous ammonia, shipped
in liquid form under 125 pounds of pressure are:
Molecular symbol
NH3
Molecular weight
17.03
Boiling point
Freezing point
-33.4°C/-28°F
-77.72°C/-107.9°F
Effects
The following provides physiological effects of various concentrations of
ammonia in the air:
Ammonia
(ppm)
Least detectable odor
46.8
Maximum concentration for prolonged exposure
~35
Maximum concentration for short exposure
300 to 500
Least amount causing immediate eye irritation
698
Least amount causing cough
1720
Dangerous for even short exposure
Rapidly fatal for short exposure
2500 - 4500
5000 - 10,000
Ammonia Leak Detection
There are several methods of detecting anhydrous ammonia leaks.
Somee materials used for leak detection include:
Ammonia test paper
Moistened phenolphthalein or litmus test paper will change color when
exposed to ammonia.
Dilute hydrochloric acid
When the fumes from the dilute hydrochloric acid come in contact with
the ammonia vapor, it will produce a dense white fog.
Sulfur tapers
A dense white cloud is produced when the sulfer taper burns and reacts
with the ammonia to form sulfur dioxide.
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Safety
Handling & Storage
The following are general rules which should be observed when handling
and storing ammonia:
27. Ammonia cylinders should be stored in a cool, dry, well
ventilated and, preferably, fire resistant area.
28. When moving the ammonia cylinders do not drop, roll,
slide or cause the cylinders to violently strike each other.
29. If the cylinders are to be stored outside, protect them
from extreme weather conditions and keep them off the
ground to prevent the cylinders from rusting.
30. It is not a safe practice to handle the cylinders by
hooking them on the valve's protective cap. These caps
should only be removed when the cylinder is securely in
place against a wall, a bench, or in a cylinder stand and
ready to be used.
31. Check the valve packing nut to ensure that it is tight.
32. Under no circumstances should any part of the cylinder
reach a temperature of over 120°F.
33. The cylinder should not come in contact with a flame.
34. Before using, read all labeled information and data
sheets associated with the use of anhydrous ammonia.
Determining Empty
Cylinders
The best way to make sure ammonia cylinders are empty is to weigh
them but it is also very inconvenient. Because of the inconvenience
associated with weighing the cylinders, a pressure gauge is usually used
to determine when a cylinder is empty. If the pressure gauge reads under
25 lbs, the cylinder is considered empty.
Returning Empty Cylinders
When returning empty cylinders, use the following procedure:
1.
2.
3.
4.
Close the valve before shipping the cylinder.
Mark or label the cylinder "Empty".
Replace protective cap over fitting.
Store the empty cylinder away from the full cylinders.
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Safety
EMO Circuit Description
Figure 46 EMO Circuit
The YES-1224P emergency power off (EMO) circuit schematic is shown
above. The EMO circuit is 24VDC with an EMO button on the front of
the tool.
The circuit is electrically latched on when the control power disconnect
switch is on and the Power On button is pushed. The electrical latch is
disrupted and the EMO circuit goes off when the EMO button is pushed.
The EMO button must be pulled to release and allow the EMO circuit to
be turned back on. Power is not restored to YES-1224P until a Power
On button is pushed on the front panel.
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Safety
EMO Circuit Operation
The YES1224P EMO circuit functions by removing power from all
power control contactors, relays, and line voltage accessory circuits
when the EMO button is pushed.
Emergency power off buttons are located on the front and rear of the
control console. Both EMO buttons must be disengaged in order to turn
on the machine. When an EMO button is pushed, the EMO circuit goes
off and removes power from all power control contactors and relays and
all line voltage accessory circuits.
Some power conditioning components still have power supplied when
the EMO circuit is off. They are as follows:
24VDC power supply
All power is removed from the tool if the power disconnect switches are
turned off.
Power Outage Recovery
Power is not restored to YES-1224P until the Power On button is pushed
on the front panel.
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Safety
Safety Interlocks
Electrical
To disconnect:
Press the EMO button, turn off main disconnect circuit breaker, and
remove power plug from main facility electrical receptacle. Affix
clamshell over plug to ensure lockout.
To reconnect:
Remove clamshell from system plug, insert power plug into main facility
electrical receptacle, and release EMO button. Press the power on button
to restart tool.
Pneumatic/Reactant Gases
To disconnect:
Turn off facility gas supplies to tool. Vent gases before disconnecting
any pneumatic/reactant gas components from the tool. Remove gas
connections from rear of tool to ensure lockout.
To reconnect:
Connect gas connections to rear of tool. Confirm pneumatic/reactant gas
components are properly connected to tool. Turn on facility gas supplies
to tool.
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Safety
Material Disposal
Wet pumps used on plasma tools require the use of Fomblin® Y-LVAC
25/6 as a lubricant. Thermal decomposition of this lubricant will generate
flouride, which is a corrosive. Wear protective clothing when handling.
Follow state, local, and federal regulations on disposal, recycling,
storage, and transport of this material.
Warning!
Wash hands after handling Fomblin® lubricants. Avoid
Fomblin contact with alkali metals and halogenated
compounds.
Electrical Disconnect
The main power disconnect switch for the YES-1224P is located on the
left side of the control console. The main disconnect switch removes all
electrical power from the tool, including the pump power.
Warning!
Before servicing, engage the EMO button, turn off the main
disconnect and remove plug from facilities. There is no visual
device to indicate when the power has been removed from the
system, other than the position of the main disconnect switch.
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Safety
Cabinet Safety Grounding
Indicators are placed on the tool with the above safety ground symbol, to
designate which fasteners ensure proper and safe grounding of cabinet
panels.
Warning!
Do not operate tool if indicated fasteners are missing or not
fully engaged.
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Safety
RF Power Supply
The RF power generator emits non-ionizing radiation, in the form of
induced current and contact current emissions, below the safe acceptable
level. Frequency is 40 kHz.
RF power generator removal will require two-person lift. Supply and
drawer combined weight is 40 lbs.
Chamber Temperature
Temperature increases in the chamber during the plasma generating
portion of the recipe. The tool implements a maximum allowable
temperature limit set point, primarily to protect susceptible substrates and
control uniformity. Furthermore there is hot plate temperature monitor
message display box on the operator panel of the touch screen interface.
Caution!
Ensure hot plate temperature monitor message display box
indicates safe handling temperate (51°C) before removing
substrates from chamber. The use of protective gloves is
recommended at elevated temperatures.
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Safety
Vacuum Pump
Temperature
Temperatures will increases on the outer vacuum pump housing surfaces
with continued operation.
Caution!
Ensure vacuum pump housing temperature is at a safe handling
temperate (51°C) before touching. Use of protective gloves is
recommended at elevated temperatures.
EMO Circuit
The EMO circuit disables power from all electrical components
downstream of the circuit. The 24VDC power supply is always active.
When the EMO button is reset and the power on button is pressed, power
flows through two relay coils; the DC contact coil uses one contact for
the downstream 24VDC power and one for the power on button latch,
and the AC contact coil uses both contacts; one for each hot leg of the
208/230 VAC power downstream of the 24VDC power supply AC input.
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Maintenance
Maintenance
This section describes techniques required for proper care and
maintenance of the YES-1224P. Refer to the Troubleshooting Section for
assistance in addressing specific process/equipment malfunctions.
Procedures
Flask/Chamber Leak
Check & Evacuation
The chamber leak check procedure can be used to verify chamber
cleanliness and vacuum integrity. The procedure measures chamber base
pressure and leak back rate.
For the best results, base pressure and leak rate testing should be done
after the oven has been at vacuum for several hours to allow volatile
contaminants like water to vaporize and be removed from the chamber.
With the oven controller in reset mode and operator’s panel active:
1.
2.
3.
4.
5.
6.
Push the “Press to Select Recipe” button
Enter “0” on the numeric keypad
Push “enter”
Push “done”
Press the “Press to Start” button.
Program will open the vacuum valve until the “Press to Reset”
button is pushed.
Wait for the pressure to stabilize with the vacuum valve open. Base
pressure should be under 10 mTorr. If pressure is too high, allow the
chamber to remain at vacuum for a few hours to evaporate volatile
contaminants. It may be necessary to clean the chamber to remove
process residues.
When a satisfactory base pressure has been reached, press the “Press to
Reset” button to close the vacuum valve.
Wait 1 or 2 minutes to allow chamber gas flows to stabilize, and then
measure the increase in pressure over a one-minute period. Pressure rise
rate should be less than 10 mTorr per minute. If pressure rise rate is too
high, allow the chamber to remain at vacuum for a few hours to
evaporate volatile contaminants and repeat the test. It may be necessary
to clean the chamber to remove process residues.
If a leak is suspected, further path isolation can be verified by manually
closing the vapor valve after resetting system.
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Maintenance
With the oven controller in reset mode and Operator’s panel active:
1.
2.
3.
4.
5.
6.
Push the “Goto Alarm Panel” button
Press the “Enter Access Code” button
Enter “1966” on the numeric keypad
Push “Enter”
Push “Done”
When the maintenance panel is activated, press the “Goto
Factory Set Up Panel” button
7. Press the “Goto Vacuum Panel”
8. Press the “Press to Open Vapor Valve” button to darken the
switch
Observe the rate of rise of both the flask and the chamber pressures to
help pinpoint the leak region, then press the “Exit” button to return to
the operator panel screen.
When the test is complete, with the oven controller in reset mode and
operator’s panel active:
1.
2.
3.
4.
5.
Push the “Recipe Select” button
Enter 10 on the numeric keypad
Push “Enter”
Press “Done”
Press the START button
The system will purge the chamber/flask and return the system pressure
to atmospheric levels.
Door Seal Replacement
In the event of a door seal failure, the inner door seal will have to be
replaced. It is recommented that both seals be replaced regardless of the
outer seal condition. Failure to change the outer seal may result in
improper functioning of the seal failure alarm. Use only brass, wood, or
plastic removal tools to remove old o-ring.
Caution!
DO NOT use hard metal tools to remove o-rings.
Damage to seal surfaces will result in loss of
vacuum integrity.
Replace the seal, ensuring that there is even tension throughout the seal
upon installation. Non-uniform tension will result in localized “thinning”
of the o-ring cross section and create a leak point.
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Maintenance
Clean Chamber
Clean the chamber walls and door plate with isopropyl alcohol. Use a
squeeze bottle and wash it down. Use a clean room cloth to wipe all
walls, shelves, and lower floor.
If polymerized chemicals are deposited on the chamber walls, try toluene
or compatible solvent. It is our experience that this deposition is virtually
impossible to remove without disassembly and CO2 beadblast or other
conditioning procedures.
Clean Flask
With machine in reset status:
1. Verify all temperature controllers set to 200°C.
2. Allow 2 hours for controlled elements to reach steady state
condition (HCM pressure sensors require 4 hours to heat.
Heating elements activate when system is powered up and
remain on regardless of temperature controller settings. Adjust
steady state heat condition around initial power up time).
3. Run Recipe 10 to eliminate/check for residual chemical.
4. When complete, light tower complete light will flash.
Under usual circumstances, the flask on the YES-1224P(E) should not
have to be disassembled and cleaned. Complete vaporization and
cleaning solution procedures should be adequate in eliminating all
residual chemicals from the vapor flask, valves, syringes, and supporting
plumbing if degradation temperatures are not exceeded.
In the unlikely event of polymerization contamination, flask may need be
disassembled and cleaned with CO2 bead blast or other conditioning
procedures. Furthermore, all infusion/withdraw tubing, and valves will
need to be replaced (see parts list for replacement tubing, valve, and
VCR gasket assemblies).
Vapor curve determination procedure may require flask
disassembly/cleaning as the process could entail condensation of liquids
in the flask.
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Maintenance
Source Bottle
Removal/Replacement
Removal/replacement of the source bottle(s) is not difficult.
1. Open access door on the front of the system (see figure below).
2. Pull both needles out of bottle to be replaced. NOTE: do not
disconnect needles from tubing.
3. Pull spring-loaded clamp back to release bottle.
4. Retract spring-loaded clamp and place new Source Bottle on
shelf. Release clamp to secure bottle.
5. Use needles to penetrate seal in bottle cap. NOTE: be sure the
longer needle is close to the bottom of the bottle. Be sure the
shorter needle is above the fluid surface. (See figure, below).
6. Re-facilitate power to the tool as necessary.
Figure 47 Source Bottle Access Door
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Maintenance
Figure 48 Source Needle Replacement
Gas Valve Repair
The reactant and vent gas valves are normally closed, electrical solenoid
valves. The solenoid valves are turned on or off by outputs from the
PLC. 24VDC is supplied to the solenoid valve. The PLC output connects
the low side of the solenoid coil to the 24VDC return.
Cycle the valve using the output control screen to see if it makes a
clicking noise. If it does, the coil is good. If it does not, check for the
presence of 24VDC across the solenoid terminals with the output ON.
Replace the coil if there is voltage drop but the valve does not actuate.
Make sure the actuator gas pressure is at least 80 psig (minimum).
If the solenoid is operating properly and you suspect that the valve is not
opening or closing properly, remove the valve body. Examine the Kel-F
seat for abrasions or particles that could inhibit proper sealing. If all else
fails, replace the entire sealing assembly. It is highly unlikely that the
valve body needs replacement.
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Maintenance
Vapor/Vacuum Valve
Repair
The vapor and vacuum valves are normally closed, pneumatic valves
actuated by pilot solenoid valves. The solenoid valves are turned on or
off by outputs from the PLC. 24VDC is supplied to the solenoid valve.
The PLC output connects the low side of the solenoid coil to the 24VDC
return.
Cycle the valve using the output control screen to see if it makes a
clicking noise. If it does, the coil is good. If it does not, check for the
presence of 24VDC across the solenoid terminals with the output on.
Replace the coil if there is voltage drop but the valve does not actuate.
Make sure the actuator gas pressure is at least 80 psig (minimum).
If the solenoid is operating properly and you suspect that the valve is not
opening or closing properly, remove the valve body. Examine the
polyimide or CR6100 valve stem for abrasions or particles that could
inhibit proper sealing. Clean buildup off exposed surfaces with
appropriate solvents. Be sure not to use scraping tool that would mar, pit
or scratch sealing surfaces.
If all else fails, replace the stem tip and bonnet seal. It is likely that the
entire valve body need replacement if build up is such that it cannot be
removed or seal surfaces become damaged due to improper cleaning
procedures.
Vapor Detection Valve
Repair
The vapor detection valve is normally a closed, pneumatic valve actuated
by a pilot solenoid valve. The solenoid valves are turned on or off by
outputs from the PLC. 24VDC is supplied to the solenoid valve. The
PLC output connects the low side of the solenoid coil to the 24VDC
return.
Cycle the valve using the output control screen to see if it makes a
clicking noise. If it does, the coil is good. If it does not, check for the
presence of 24VDC across the solenoid terminals with the output on.
Replace the coil if there is voltage drop but the valve does not actuate.
Make sure the actuator gas pressure is at least 80 psig (minimum).
If the solenoid is operating properly and you suspect that the valve is not
opening or closing properly, remove the valve body. Examine the
polyamide or CR6100 valve seat for abrasions or particles that could
inhibit proper sealing. Clean chemical buildup off exposed surfaces with
appropriate solvents. Be sure not to use scraping tool that would mar, pit
or scratch sealing surfaces. If all else fails, replace the entire bonnet
assembly, as seal tip is pressed into bonnet face. It is likely that the entire
valve body need replacement if build up is such that it cannot be
removed or seal surfaces become damaged due to improper cleaning
procedures.
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Maintenance
Infusion Valve Service
The Infusion valves are normally closed pulse solenoid valves. The
solenoid valves are turned on or off by outputs from the PLC. 24VDC is
supplied to the solenoid valve. The PLC output connects the low side of
the solenoid coil to the 24VDC return.
Check for the presence of 24VDC acr.oss the solenoid terminals with the
output on. Replace the coil if there is voltage drop but the valve does not
actuate.
This valve is not serviceable and will need to be replaced upon plugging
or solenoid failure.
Be sure to contact YES on proper hand-tight peek fitting installation
procedures.
Trap Drain Procedure
The YES-1224P vapor collection trap can be drained by two methods.
Method 1 should only be used if continuing to use the same chemical
and trap LN2 full level sustained. Method 1 entails the use of the
drain/relief valve system to which the supplied trap is modified.
Method 2 should be used if unit is to remain idle for any significant
amount of time while LN2 supply is exhausted, or if changing to different
chemical where compatibility issues are present. Method 2 may entail the
removal of the collection trap while the trap is full of residual chemical.
The operator will be cued by the PLC when vapor trap temperature rises,
indicating LN2 depletion.
Method 1:
1. Make sure the system is in the reset state.
2. Confirm vacuum pump power is off.
3. Operator should wear protective equipment for safe LN2 and
chemical protection. Consult MSDS for particular safety devices
required for the handling of your chemical.
4. Use back wrench wile loosening upper purge valve on vapor
trap.
5. Place drain container under plug valve exit and rotate plug valve
pin is orientated inline valve tubing.
6. Close drain, by rotating plug valve pin until orientated
perpendicular to valve tubing, when residual chemical release
rate slows.
7. Use back wrench while tightening upper purge valve on vapor
trap.
8. Refill trap with LN2 using small inlet tube.
9. Restart vacuum pump and check for leaks on trap purge/plug
valve fittings.
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Maintenance
Method 2:
1. Make sure the system is in the reset state.
2. Confirm vacuum pump power is off.
3. Confirm trap ln2 level is completely exhausted. This is indicated
by the absence of exhaust gases emitting from vapor trap vent
tube.
4. Remove thermocouple from the vapor trap vent tube (larger
diameter tube).
5. Steps 4-7 of method 1 may be used to drain most of residual
chemical from trap.
6. Remove centering ring clamp connection from the downstream
side of the trap. Be sure to use protective gear while performing
vapor trap maintenance. Consult MSDS for particular safety
devices required for the handling of your chemical.
7. Support the trap while removing the centering ring clamp
connection from the upstream side of the trap.
8. Transfer trap assembly to a proper-vented disposal site while
holding trap in the upright position.
9. Pour contents into chemical disposal container directly out of
kf-40 connection until most of the chemical is drained.
10. Remove top trap band and separate inner ln2 bowl from outer
chemical reservoir.
11. Clean chemical exposed surfaces with the appropriate solvent.
12. Inspect o-ring for nicks, cracks, hardening, and degradation.
Replace with new o-ring if necessary.
13. Replace inner/outer bowl band strap and tighten
14. Reinstall trap on tool: Inspect centering ring o-rings, Replace if
necessary. Replace and tighten center ring clamps.
15. Reinstall thermocouple to the vapor trap vent tube (larger
diameter tube).
16. Refill trap with LN2 using small inlet tube.
17. Restart vacuum pump and check for leaks on trap purge/plug
valve fittings and vapor trap o-ring.
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Maintenance
Preventative
Maintenance
This section describes how to properly care for and maintain the YES1224P. Refer to the Troubleshooting Section for assistance in isolating
specific equipment malfunctions.
Daily Preventative
Maintenance
1. Check the door gasket for any signs of chipping, excessive wear
or contamination. Change gasket when severely worn. Use only
brass or plastic removal tools to remove old o-ring.
Caution!
DO NOT use hard metal tools to remove o-rings. Damage to
seal surfaces will result in loss of vacuum integrity.
2. Check the chemical source bottle level indicators on the touch
screen interface to ensure there is sufficient chemical to run
product.
3. Check the temperature controller set points (4 process chamber,
flask, flask line, and vacuum line).
4. Check pressure variables.
5. Confirm the process variable values are properly set for recipes
(# of purge loops, # of evacuation loops, process duration, heat
up delay).
6. Check infusion variables.
7. Verify scrubbed house exhaust is operating.
8. Check the vent nitrogen, nitrogen/CDA pressures (15-30 psig
and 80-100 psig respectively) and levels to ensure adequate
supply.
9. Check the ammonia supply pressure in the tank (approx. 114
psig vapor pressure). Pressure gauge on the flow control unit
should read 5-10 psig.
10. Refill LN2 trap with liquid nitrogen. Fill using smaller diameter
tube extruding from trap lid. One fill of 1.6 liters will last
approximately 6 hours for the 6-inch diameter trap, depending
on generated heat load.
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Maintenance
11. Clean out any particles that may have accumulated in the
chamber, with a jet of nitrogen. If necessary, clean the system
chamber with a lint-free cloth immersed in isopropyl alcohol.
Daily Cold Trap
Maintenance
Cold trap maintenance can be handled in two ways:
24 hr production:
Operator must continuously refill of the LN2 trap when cued to
do so (6-inch trap LN2 capacity is 1.6 Liters). Auto-fill systems
are available to eliminate operator intervention. PLC will cue
operator when trap is to be drained. Trap should be disassembled
and cleaned at this point.
WARNING!
Operator MUST change the touch screen panel to
the maintenance panel display and disconnect the
pump if system will be unattended for any length of
time. After the exhaustion of trap LN2 supply trap
reservoir chemicals and residual vapor flask
chemicals will continually vaporize through pump
when LN2 supply is gone, and damage to the pump
may occur.
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Maintenance
Weekly Preventive
Maintenance
1. Perform the Leak Check Program test to check vacuum integrity
(Recipe #0) and compare to previous leak rate. Generally, a leak
rate below 50mTorr/min is acceptable.
2. Check the level of the Fomblin® oil in the vacuum pump and top
off if necessary (dry pumps do not require this service).
3. Observe infusion lines during delivery. Check for the presence of
air bubbles, which would indicate an air leak. Possible leak
points are the needle/Luer® interface, and the finger tight micropump fittings.
NOTE: Do not over tighten finger tight peek micro-pump fittings.
Monthly Preventive
Maintenance
1. Clean the chamber walls and doorplate with isopropyl alcohol.
Use a squeeze bottle and wash it down. Use a clean room cloth
to wipe all wall, shelf, and rail surfaces.
2. If a Fomblin® oil vacuum pump is used, inspect fluid pump
levels.
Bi-Annual Preventive
Maintenance
1. The vapor chamber assembly will have to be disassembled,
cleaned, and reinstalled depending on the chemicals used,
chemical usage, chemical wetting activity, and/or processing
chemicals over the degradation temperature. Furthermore,
withdraw lines may need replacement as chemicals that are
sensitive to wetting may polymerize in withdraw lines if proper
cleaning/chemical change operation procedures are not followed.
2. If a Fomblin® oil pump is purchased through YES, it is
recommended Fomblin oil be changed every six months or 1500
hours of use, whichever occurs first. Recycle old Fomblin oil.
Standard Fomblin Alcatel® 2021 C2 16 cfm pump reservoir
capacity is 1.5 Kg.
NOTE: Refer to your particular vacuum pump operator’s manual for
procedures and maintenance schedule recommendations.
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Troubleshooting
Troubleshooting
This section is intended to assist you in troubleshooting any issues you
may have with your YES-1224P. If you are not able to correct an issue,
please call Yield Engineering Systems’ field service for support at 1-888YES-3637 (U.S. toll free) or +1 925 373-8353 (worldwide).
Process Problems
Incomplete Image Reversal
The most common problem that occurs with Image Reversal is an
incomplete or unstable reversal. This condition can occur for the
following reasons:
•
•
•
•
•
Insufficient warm up time
Insufficient or excessive process times or temperatures
Failure to meet process needs
Improper programming or execution of programming
Equipment malfunctions due to:
o Absence of anhydrous ammonia
o Poor or no vacuum
o Serious leaks
Silylation/CVD
Condensation
The most common problem that occurs with silylation is condensation.
This condition may occur for the following reasons:
•
•
•
•
•
Insufficient warm up time
Exceeding infusion volumes that result in process pressures
equal or greater than the maximum vapor pressure of a chemical
at a given temperature
Temperatures are too low
Improper programming or execution of programming
Equipment malfunctions due to:
o Poor or no vacuum
o Serious leaks
Incomplete Cleaning
This can be as simple as the need for a slightly longer process time, a
higher power setting, or plasma gas pressure adjustment.
If a slow degradation in strip rate is noticed, check the leak rate with
vacuum test procedure (Leak Check Recipe #0) to ensure no ambient air
is entering the system during process.
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Troubleshooting
Oxidation
Some surfaces will oxidize when exposed to either oxygen or air. Silver
epoxy (and silver), for example, will turn black if the product is allowed
to oxidize. This can occur either during an oxygen or air plasma, or after
the process if air is used as a backfill gas while the samples are still
warm from the process cycle.
If blackening occurs, even when nitrogen is used to backfill the chamber,
first check the vacuum integrity of your system by doing a Leak Check
(Recipe #0). If no leak is apparent, then the probable cause of the
blackening is surface oxidation when the sample is exposed to
atmosphere after the process. This can be prevented by extending
evacuation purge cycles to allow cooling of the product before opening
the door. The internal thermocouple may be used to determine the
number of evacuation cycles needed for acceptable thermal oxidation
reduction.
Chamber Discoloration
The chamber interior can turn a white/yellow color if the chamber is too
hot when exposed to atmosphere. This coloration is Aluminum Trioxide,
which is a simple ceramic and the effect is purely cosmetic. Follow the
suggestions for oxidation problems to prevent this buildup.
In certain rare cases, material with a coloring agent that can be
electrostatically charged when plasma cleaned. This electrostatically
charged material may cling to the chamber walls. It may be cleaned off
with isopropyl alcohol.
Poor Pumping Speed
Check the oil level in the pump (Fomblin® pump only). If the pump oil
level is correct, the cause may be that the main vacuum valve is not fully
opening.
Check that the source of pneumatic nitrogen/air input to the system is in
the range 80-100 psig.
Intermittent or No Plasma
This can be caused by:
Incorrect plasma gas pressure settings. Check the plasma gas bottle
pressure is set to around 10psi. Check the needle valves at the rear of the
system.
Too low a power setting (plasma can not be sustained below 100 Watts).
Incorrect load matching between the power supply and the chamber.
If you have altered the load by adding or subtracting electrodes, it may
be necessary to alter the matching transformer settings.
Finally, double check the flow rate settings if your system has MFCs or
the needle valve settings (at the rear of the system) if you have a nonMFC system. The critical parameter is to maintain the chamber pressure
in the 300-700 mTorr range.
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Troubleshooting
Alarm List
ATM to TP1 Abort
The watchdog timer has expired while waiting for the chamber pressure
to reach the “Purge High” variable during initial evacuation of the
chamber.
TP1 to TP2 Abort
The watchdog timer has expired while waiting for the chamber pressure
to reach the “Purge Low” variable while pumping down from the “Purge
High” variable. The alarm can occur during initial pump down or during
cycle purges.
TP2 to TP1 Abort
The watchdog timer has expired while waiting for the chamber pressure
to reach the “Purge High” variable while venting from the “Purge Low”
variable. The alarm can occur during initial chamber vent or during cycle
purges.
Base Pres Wait Abort
The watchdog timer has expired while waiting for the chamber pressure
to reach the “Base Pressure” variable while pumping down from the
“Purge Low” variable. The alarm can occur immediately after the preprocess cycle purges are complete.
Over Temp Abort
The PLC has confirmed temperature is too high and heaters are shut
down.
Exit Loop Abort
Chamber pressure has exceeded the “Abort Pressure” variable during any
process.
Process Pressure Abort
Chamber pressure has exceeded the “Abort Pressure” variable during any
process.
Process Pressure Wait
Abort
In the image reversal or silylation processes, the watchdog timer has
expired while waiting for the chamber pressure to rise to the “Process
Pressure” variable after the process gas valve has been opened.
Invalid Recipe Number
An invalid recipe selection was entered.
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Troubleshooting
Vapor Detection Alarm
Each time the YES-1224P(E) is turned on, the chamber must be
evacuated in the event of a power failure during process. This safety
measure ensures that no residual vapor escapes into the surrounding air.
In the alarm state, no other process will run and the vapor detection
alarm must be cleared before continuing.
To clear the vapor detection alarm:
1. Press the ”Press to Select Recipe Number” button from the
Operator’s Panel
2. Enter “15” on the numerical entry keypad, press “Enter”, then
“Done”.
3. Press start from the Operator’s panel.
4. When the process is complete, push the reset button on the touch
screen.
The vapor detection alarm will clear and the machine will be ready for
use.
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Troubleshooting
Equipment Problems
This section addresses the simplest and most general problems first, then
helps you to isolate specific equipment malfunctions which may be the
cause of the problem.
Vacuum Chamber Does
Not Pump Down
Problem #1: Vacuum chamber does not pump down or pumps
down slowly.
•
Verify that the voltage selector switch on the pump is in the
correct position.
•
Verify that the AC voltage supplied to the pump is within the
limits specified on the pump nameplate.
•
Verify auxiliary receptacle circuit breaker is in the on position if
pump is powered through auxiliary receptacle
•
Verify that the pneumatic nitrogen/CDA supply pressure is at
least 80 psig. The vacuum and gas valves may not open if
pneumatic pressure is too low.
•
Verify internal pump seals are undamaged.
•
Verify interconnecting
damaged/degraded
•
Verify that the chamber door is sealed by sliding a piece of paper
around the seal with the door closed.
•
Verify that the door seals are clean, undamaged, and properly
seated on the chamber.
•
Check chamber for leaks with leak test (Recipe #0).
•
Check for leaks in the vacuum line.
•
Check pneumatic signal to vacuum valve.
•
Check electrical signal to the pneumatic solenoid valve that
actuates the vacuum valve.
vacuum
line
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seals
are
not
Troubleshooting
Chamber Fills Slowly or
Not at All
Problem #2: Chamber fills slowly or not at all.
•
Verify that the pneumatic nitrogen/CDA supply pressure is at
least 80 psig. The vacuum and gas valves may not open if
pneumatic pressure is too low.
•
Verify that the process nitrogen supply pressure are at least 15
psig.
•
Check for clogged gas (0.5 micron) filter by removing the filter
element and running a test process sequence. Replace the filter
element if necessary. Filters are located directly downstream of
the facilities bulkhead connectors within the side assembly
housing.
•
Check pneumatic signal to nitrogen vent valve.
•
Check electrical signal to the pneumatic solenoid valve that
actuates the nitrogen valve.
Process Vapor Pressure
Does Not Rise
Problem #3: Process vapor pressure does not rise to required
level.
•
Check the level of chemical in source bottle(s).
•
Check the age of the HMDS/chemical. The shelf life of an
unopened bottle of HMDS, stored under perfect
environmental conditions, (humidity between 36-40% and
temperature of 70°C +/- 2°C) is not to exceed six months.
Once a bottle has been opened, it should be used within 30
days or properly disposed of. Chemical under the presence
of nitrogen blanket will last much longer.
•
Ensure that the required vapor pressure can be achieved with
chemical, at current temperature settings.
•
Check for plugged infuse lines/valves by confirming fluid
flow when syringe pumps are active. Polymerized chemical
will plug the lines/valves and require replacement or
cleaning.
•
Verify that the flask, vapor line, chamber, and vacuum line
are heating properly. Incorrect temperature settings will also
create a condensation spot and hinder complete vaporization.
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Troubleshooting
•
Verify that the pneumatic nitrogen/CDA supply pressure is
at least 80 psig. The vacuum and gas valves may not open if
pneumatic pressure is too low.
•
Check pneumatic signal to process gas valve.
•
Check electrical signal to the pneumatic solenoid valve that
actuates the process gas valve.
During Image Reversal,
NH3 Rises Slowly
Problem #4: During image reversal process, ammonia pressure
increases slowly.
•
Check the ammonia supply pressure.
•
Replace ammonia filter elements.
Program Sequence Not
Operating Properly
Problem #5: Program sequence does not operate correctly.
•
Check the process pressure set points to ensure that they are
correct.
•
Check the temperature set points to ensure they are correct.
•
Check the process variable settings (# dehydration loops, #
of evacuation loops, process duration) to ensure that they are
correct.
Flask, Vapor/Vacuum Line
or Chamber Does Not Heat
Problem #6: Flask, vapor line, vacuum line, or chamber does not
heat.
•
Check over temperature alarm screen for overheat errors.
•
Verify that the thermocouple temperature sensors are
installed correctly.
•
Check temperature controller settings.
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Troubleshooting
•
Verify that the SSR heater power controllers are receiving
the signal from the temperature controller. There are no
visual indicators on Crydom® models. Measure the voltage
across the output terminals 1 & 3 on the Partlow 1160 plus
temperature controllers and/or across the input terminals on
the Crydom relay. Active state voltage is 4VDC.
•
Verify that AC voltage is correct on the output terminal of
the SSR.
•
Verify thermocouple connectors are correctly connected to
control console panel jacks (look behind upper rear cabinet
access panel).
•
Turn off the power, disconnect the heater and measure its
resistance. Each 200W heater element (chamber and door
heaters) should measure approximately 260Ω. Each 350W
heater element (vapor flask heaters) should measure
approximately 150Ω. Each vapor/vacuum line heater
element should measure approximately 540Ω.
Flask, Vapor/Vacuum Line,
Chamber Temp Too High
Problem #7: Flask, vapor line, vacuum line, or chamber
temperature is too high.
•
If high temperature is due to temporary overshoot on startup
check the PID settings on the temperature controller.
•
Check temperature controller set point value.
•
Check for erroneous offset values entered into controller.
•
Check voltage on output terminal of SSR power controller.
Output voltage should be 0 when input voltage is 0. Replace
SSR if it is not.
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Troubleshooting
Plasma Does Not Fire or
Fires Intermittently
Problem #8: Plasma does not fire or fires intermittently
•
Check that there is a “1” entered into the MFC flow variable if
no MFC options were purchased. A “0” entry disables each gas.
•
Check reactant gas levels and confirm pressure is at least 15
psig.
•
Check plasma power supply power on switch is in the on
position.
•
Check plasma power supply is not set in the local operation
mode, is set in the remote operation mode
•
Check plasma power supply tap setting for proper load match.
•
Check that operating pressure is in the 300-700 mTorr range
(may require gas flow adjustment). Plasma will not fire if
pressure is too high.
•
Check that door is in the closed and locked position.
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Appendix
Appendix
Parts List
702-10672-01
Door Seal Inner
702-10673-01
Door Seal Outer
700-5755-03
Door Sealing Plate
01-780-190-4234 Door Draw Latch
710-10722-01
Active Shelf
710-10723-01
Floating Shelf
710-10724-01
Grounding Shelf
790-5589-01
Touch Screen
440-8477-01
20amp, 277 Volts AC
10KAIC Circuit Breaker
380-2425-01
Amber Pressure OK Lamp
750-5781-01
Control Console
Differential Pressure Switch
790-10730-01
Gauge, Heated Capacitance
Manometer 0-100 Torr
510-5846-01
Controller Partlow® 1160
Plus
480-4611-01
Type-J Thermocouple 120”
480-6231-02
Type-J Thermocouple 120”
Vapor/Vacuum Line Heater
750-5243-01
Type-K LN2 ¼” Trap
Thermocouple 72”
750-4753-03
Vapor/Vacuum Line Heater,
85W, 120” Leads
790-5433-11
PLC CTC 5200
790-10680-01
PLC CTC 5201 Expansion
Controller
01-420-020-1370
3-30 Volts DC Solid-State
Relay (SSR)
560-5966-01
Over temperature Monitor,
8 J-Type T/C Input
750-7177-01
24 Volt DC Humphrey®
Actuator Valve
520-6173-01
Power Supply 15VDC, 10
Amps, 150 W
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Appendix
520-6173-02
Power Supply 24VDC, 6.5
Amps, 150 W
01-480-040-3169
Fuse Holder
440-6232-01
Fuse 7 Amp AGC
440-5590-01
Fuse 6 Amp MDL
710-10619-01
Stainless Steel Vapor Flask
750-10676-01
Sock Heater, 220VAC, 100
Watts
780-5812-02
Encapsulated Viton® Flask
O-ring
420-8301-01
Relay DPDT 24VDC
750-1919-01
Chamber Heater Strip
230VAC, 200 Watts
220-8269-01
Diode 1N4004
700-5773-02
Door Insulation Flexboard
780-1483-01
Foot, Swivel
01-400-140-3446
Switch, Interlock
780-4747-01
Valve, Pneumatic
Vacuum/Vapor
750-4756-01
Fan, 140 CFM, 24 VDC
01-780-60-1166
Filter, .5 Micron
780-6266-01
1-in. Septum Needle
780-6266-06
6-in. Septum Needle
820-4637-14
Micro-pump Delivery Line
Replacement Kit
750-5245-01
Micro-pump
01-780-260-6152
Retainer Gasket ½ VCR
Replacement Kit
750-4769-01
Audible Alarm
820-5248-01
Complete Micro-pump
Delivery Replacement
790-8584-01
Temperature Controller
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Appendix
Conversion Chart
Figure 49 Conversion Chart
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