Data Sheet 7200 Series Capacitance Meter Taking performance to a new peak 7200 Series Capacitance Meter The 7200 is a sophisticated capacitance meter equally suited for demanding R&D, as well as manufacturing applications. Two phase-sensitive detectors are used to extract and display both the parallel capacitance and conductance of the device under test. From the measured parameters the 7200 can calculate and display the equivalent parallel and series resistance, series capacitance, dissipation factor, and quality factor Q. Capacitance can also be displayed as a deviation from a selectable reference standard in % or pF units. The 7200 uses a software filter technique which averages consecutive measurements to achieve a stable display value. Test levels are programmable from 15 to 100 mV, making the 7200 suitable for a wide variety of semiconductor measurements. Up to 99 complete front panel setups can be stored and recalled in internal non-volatile memory. • Capacitance range, 0 to 2000 pF Bias Voltage The 7200 accepts, measures and displays external bias voltage over a range of ±60 V. An internal bias supply is also included and is programmable over a ±60 V range. This bias capability, along with fast responding analog C, G and V outputs, makes the 7200 ideal for C-V and G-V semiconductor plots, as well as DLTS material studies. Automatic Zeroing One key stroke zeros the 7200 for stray capacitance and loss. The 7200 is capable of zeroing up to 2000 pF. As a result, the • Conductance range, 0 to 2000 µS • Test frequency, 1 MHz crystal-controlled • Test level, selectable 15, 30, 50, and 100 mV • External bias ±60 V • Standard programmable internal bias ±60 V • Analog outputs proportional to both C and G and bias • GPIB standard maximum range of the instrument can be effectively increased Bus Operation to 4000 pF by first zeroing the 7200 with a 2000 pF specimen The 7200 is equipped with a full function ieee-488 interface connected to the input. bus. The following can be remotely programmed: all panel functions, including special functions; store and recall panel setups; Special Functions and zero and bias controls. For rapid data transfer, C, G and V A variety of special functions are provided to extend the opera- information is available simultaneously. Front panel setups can tion of the 7200 to meet specific requirements. For example, the be stored and recalled by program location. instrument can be forced to hold a particular measurement or bias range. The averaging filter length can be selected from no averaging up to 500 measurements. Special functions can also be used, in conjunction with external standards, to calibrate the instrument from the front panel or over the ieee-488 interface. 2 Specifications Capacitance Display External Bias Display Capacitance Range 0 to 2000 pF Voltage Range ±60 V Full Scale Ranges 2, 20, 200, 2000 pF Resolution 0.1 V Accuracy 0.25% of reading Accuracy 0.25% of rdg + 4 counts +0.2% of full scale +0.005 pF Resolution 0.001 pF from 0 to 2 pF Internal Bias 0.01 pF from 2 to 20 pF Voltage Range 0.1 pF from 20 to 200 pF 1 pF above 200 pF ±60 volts, programmable from the front panel Accuracy 0.5% of setting + 10 counts Resolution 1 mV for voltages ≤ 20 V Conductance Display 10 mV for voltages > 20 V Conductance Range 0 to 2000 µS Maximum Current Full Scale Ranges 2, 20, 200, 2000 µS 5 mA Rear Panel Connectors Accuracy 2.5% of reading +2.0% of full scale +0.05 µS + 2 (ωC) 2 Analog Out, C Where C is the parallel capacitance in Farads Residual Series Resistance 2Ω maximum Resolution 0.01 µS from 0 to 2 µS 2 volts full scale, source resistance 1000 ohms, linearity 0.1% of reading + 0.05% of full scale Analog Out, G 2 volts full scale, source resis- 0.1 µS from 2 to 20 µS tance 1000 ohms, linearity 0.1% 1 µS from 20 to 200 µS of reading + 0.05% of full scale 10 µS above 200 µS Analog Out, Bias 2 volts full scale Source resistance 1000 ohms Computed Parameters IEEE-488 Complies with IEEE-488-1978 Series Capacitance 0.000 to ±9999 pF Implements AH1, SH1, T6, TEO, Series Resistance 0.00 Ω to ±9.999 MΩ L4, LEO, SR1, RL1, PPO, DC1, DT1, Parallel Resistance ±488.5 Ω to ±9.999 MΩ CO and E1 Dissipation 0.000 to ±999.9 Quality Factor 0.000 to ±999.9 ∆C 0.000 to ±4047 pF ∆% 0.00 to ±99.99% External Bias In ±60 volts max 62.5 mA fuse protected Front Panel Controls and Displays Controls Temperature Influences Keyswitches enable data entry and selection of major functions Operating Temperature 10° C to 40° C Amplitude Error <± 0.017% /° C Displays Vacuum Fluorescent 20-digit display of BIAS LEVEL, Phase Error <± 0.2° /° C TEST LEVEL, CAPACITANCE, LOSS, Warmup Time 2 Hours ADRS AND SPCL Test Signal Frequency 1.0 MHz, crystal-controlled Level Programmable 15, 30, 50 and 100 mV External Bias Voltage Range ±60 V Maximum current 62.5 mA fuse protected 3 Other Specifications Weight 12 lbs (5.4 kg) Power Requirements 100, 120, 220, 240 V AC 50-60 Hz, 35 VA Council Directives 89/336/EEC//93/68/EEC, 73/23/EEC//93/68/EEC & Standards EN55011, EN50082-1, EN61010-1 CE Mark Declares Conformity to European Community (EC) Accessories Rack mount kit, single PIN 950002 Rack mount kit, dual PIN 950001 Wireless Telecom Group Inc. 25 Eastmans Rd Parsippany, NJ United States Tel: +1 973 386 9696 Fax: +1 973 386 9191 www.boonton.com © Copyright 2010 All rights reserved. B/7200/0311/EN Note: Specifications, terms and conditions are subject to change without prior notice.