MacroNode I/O™ User Manual

MacroNode I/O™

User Manual

Control & Information Technology Group

70 Rio Robles Drive

San Jose, CA 95134

Main: 408.750.0300

Fax: 408.750.2990

Manual Rev. 05

08/06

MacroNode I/O ™ User Manual

Copyright

This manual and the software described in it are copyrighted with all rights reserved. Under the copyright laws, this manual and software may not be copied, in whole or part, without the prior written consent of MKS

Instruments. The same proprietary and copyright notices must be affixed to any permitted copies as were affixed to the original. This exception does not allow copies to be made for others whether or not sold, but all of the materials purchased may be sold, given, or loaned to another person.

Under the law, copying includes translating into another language or format.

© MKS Instruments - CIT Products Group, 2006

70 Rio Robles Drive

San Jose, CA 95134

Preface

About this manual

This manual is designed to serve as a guideline for the installation, setup, operation and basic maintenance of the MacroNode device. The information contained within this manual, including product specifications, is subject to change without notice. Please observe all safety precautions and use appropriate procedures when handling the MacroNode product and its related software.

Page 2 of 43

© MKS Instruments CIT Products 2006, All rights reserved


Table of Contents

General Information ..................................................................................................................................... 5

1.1

C ONVENTIONS USED IN THIS U SER M ANUAL .................................................................................... 5

2 Installation and Setup ........................................................................................................................... 6

2.1

S HIPPING B OX C ONTENTS .............................................................................................................. 6

2.2

H ARDWARE D ESCRIPTION .............................................................................................................. 6

2.3

I NSTALLATION ................................................................................................................................ 7

2.4

P OWER AND I/O W IRING ................................................................................................................ 7

2.4.1

Power Supply Wiring............................................................................................................... 7

2.4.2

I/O Mating Connector Information........................................................................................... 8

2.4.3

Analog Expansion I/O Wiring.................................................................................................. 9

2.4.4

Digital Expansion I/O Wiring ................................................................................................. 10

2.4.5

Combo I/O Wiring ................................................................................................................. 11

2.5

D IGITAL I NPUT I NTERFACE E XAMPLE ............................................................................................. 12

2.6

D IGITAL O UTPUT I NTERFACE E XAMPLE ......................................................................................... 12

2.7

A NALOG I NPUTS .......................................................................................................................... 13

2.7.1

Configuring Analog Inputs .................................................................................................... 14

2.8

A NALOG O UTPUTS ....................................................................................................................... 18

2.9

D IAGNOSTIC S ERIAL P ORT ........................................................................................................... 18

2.10

E THERNET C ONNECTOR .............................................................................................................. 19

2.11

S TATUS LED’ S ............................................................................................................................ 19

2.12

R OTARY S WITCHES ..................................................................................................................... 19

2.13

I/O M ONITORING ......................................................................................................................... 20

3 Quick-Start.......................................................................................................................................... 21

Network Configuration ............................................................................................................................... 23

3.1

C ONNECTING TO A COMPUTER VIA TCP/IP.................................................................................... 23

3.2

C ONNECTING VIA A S ERIAL T ERMINAL S ESSION ............................................................................. 24

4 CONTROLweb

TM

User Interface ........................................................................................................ 26

I/O M APPING -M ODBUS /TCP...................................................................................................................... 27

4.1

I/O M APPING -E THERNET IP ......................................................................................................... 29

4.1.1

Assembly Instance 100......................................................................................................... 31

4.1.2


4.1.3


4.1.4


5 TOOLweb™ Interface......................................................................................................................... 35

5.1

TOOL WEB ™ U SER I NTERFACE .................................................................................................... 35

5.1.1

Control Access...................................................................................................................... 35

5.1.2

I/O Bindings .......................................................................................................................... 35

5.1.3

Data Collection Plans............................................................................................................ 36

5.1.4

Data Collection Plan Editing ................................................................................................. 37

5.1.5

Charting Applet ..................................................................................................................... 37

5.1.6

Download Data to Local PC.................................................................................................. 38

5.2

TOOL WEB ™ T OOL S IDE I NTERFACE ............................................................................................ 38

6 Specifications...................................................................................................................................... 39

7 Model Code Description ..................................................................................................................... 42

Page 3 of 43



WARRANTY .............................................................................................................................................. 43

Page 4 of 43



General Information

The MacroNode I/O ™ product line provides high density, compact and economical I/O solutions for Ethernet Networks. The MacroNode supports up to 4 expansion slots of I/O which can be ordered with any arrangement of digital, analog or combination cards. Both Modbus/TCP and

Ethernet/IP networks are supported. Additional data monitoring is available through a standard web browser and the TOOLweb™ tool side Interface (XML over HTTP). The MacroNode package provides DIN rail mounting and easy access to I/O through standard 37-pin D-Sub connectors.

1.1 Conventions used in this User Manual

Warning The WARNING sign denotes a hazard to personnel. It calls attention to a procedure, practice, condition, or the like, which, if not correctly performed or adhered to, could result in injury to personnel.

Caution The CAUTION sign higlights information that is important to the safe operation of the BlueBox, or to the integrity of your files. .

Note The NOTE sign denotes important information. It calls attention to a procedure, practice, condition, or the like, which is essential to highlight.

On screen buttons or menu items appear in bold and italics.

Example: Click OK to save the settings.

Keyboard keys appear in brackets.

Example: [ENTER] and [CTRL]

Pages with additional information about a specific topic are cross-referenced within the text.

Example: (See page xxx)

Page 5 of 43



2 Installation and Setup

This section describes the MacroNode hardware setup as well as the interface with the Ethernet network. I/O connection examples are given in section 2.4.

2.1 Shipping Box Contents

Product

• Power mating connector

LAN Interface

IP Address

Switches

Device Status

I/O Expansion

Figure 1 MacroNode Front Panel

Page 6 of 43


MacroNode I/O ™ User Manual side clearance for ventilation, to maintain an ambient operating temperature of 0 °C to 50°C.

Figure 2 MacroNode DIN Rail Mounting

2.4 Power and I/O Wiring

The MacroNode requires three connections – one to the Ethernet network, one for device power, and one for I/O signals. Ethernet and I/O cables are available from a variety of industrial sources.

2.4.1 Power Supply Wiring

Connect an external 18-30 VDC power supply to the 3-terminal power connector. The connector should be wired according to the labeling on the case.

Pin

1

Signal

18-30 VDC

3 GND

Figure 3 Power Terminal Block

The manufacturer and ordering part number for the power terminal block connector is described in the following table.

Table 1 Terminal Block Ordering Information

Description MFG Part Number

3-pin Terminal Block Weidmuller 1625620000

Page 7 of 43



Description MFG Part Number

37-pin D-SUB with Shell (Terminal Block) Phoenix 2300986

Table 3 Production Mating I/O Connector and Hood

Description

37-pin D-Sub Receptacle (solder cup)

37-pin D-Sub Metal Hood

MFG

Mouser

Mouser

Part Number

523-L77-DC37S

523-17E-1727-2

Caution In order to guarantee proper operation and to prevent damage to the product insure that the chassis ground is properly attached for the application.

Warning

Follow all applicable electrical codes when mounting and wiring any electrical device.

Page 8 of 43



2.4.3 Analog Expansion I/O Wiring

The MacroNode analog expansion board has two 37-pin D-Sub connectors used to access the

I/O points. Each I/O card type has unique pin assignments; the assignments for the analog card are shown in the following figures.

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37

Figure 4a Analog Inputs – Single-ended Mode

Top Side Connector

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37

Figure 4b Analog Inputs – Differential Mode

Top Side Connector

1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19

20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 35 36 37

Note

Figure 5 Analog Outputs

Bottom Side Connector

All Analog power comes from an internal power converter. External pins for +/- 15 volts should be used as reference only. Supplies have limited power and should not be used to drive external loads.

Page 9 of 43



2.4.4 Digital Expansion I/O Wiring

The MacroNode digital expansion board has two 37-pin D-Sub connectors used to access the

I/O points. The +24V power must be supplied by an external source via these connectors. Each

I/O card type has unique pin assignments; the assignments for the digital card are shown in the following figures. All “24 GND” labels are one net; they are not separate ground points.

Figure 6 Digital Top Side Connector

Table 4 Source/Sink Select for Digital Top Connector

Source

Sink

Sink/Source Select

Short Pin 18 to 37


Figure 7 Digital Bottom Side Connector

Table 5 Source/Sink Select for Digital Bottom Connector

Source

Sink




Page 10 of 43



2.4.5 Combo I/O Wiring

The Combo I/O Expansion Card has two 37-pin D-Sub connectors used to access the I/O points. The +24V power must be supplied by an external source via these connectors. The

±15V power is supplied by an internal converter. The pin assignments are shown in the following tables. All “24 GND” labels are one net; they are not separate ground points.

Figure 8 Combo Top Side Connector

Table 6 Digital Source/Sink Select for Combo Top Connector

Source

Sink




Figure 9a Combo – Single-ended Mode - Bottom Side Connector

Table 7 Digital Source/Sink Select for Combo Bottom Connector

Source

Sink




Note All Analog power comes from an internal power converter. External pins for +/- 15 volts should be used as reference only. Supplies have limited power and should not be used to drive external loads

Page 11 of 43



2.5 Digital Input Interface Example

Digital I/O can be ordered as either sinking (active low) or sourcing (active high). Each input circuit includes an indicator LED in series with the detection opto-coupler. The opto-coupler provides isolation between the input and the processing circuitry. The inputs require 1.5 mA in order to turn on.

Vcc

Vcc

V Ref

Digital Input point

LED X

V Ref

Digital Input point

LED X

Vcc

Figure 9 Sinking Input Figure 10 Sourcing Input

Below is an example of how to use the digital input interface for both the sinking and sourcing hardware configurations. The digital I/O circuitry is powered from an external +24-volt power source via the I/O connector.

24V GND +24 V IN

DIO1

Figure 11 Sinking Input

DIO1

Figure 12 Sourcing Input

2.6 Digital Output Interface Example

The individual outputs will support up to a 200 mA load per channel. Each output is thermally protected against short-circuiting (500 mA typically) and includes under voltage protection. The output Fault State is accessible through software. External Schottky diodes are provided for output transient protecton and each I/O point is protected with a self-resetting poly fuse rated for 500 mA.

Outputs default to the OFF condition during power up and processor reset conditions. The figure below shows the output circuitry.

Page 12 of 43



Output

Driver

+24V

DIO X

24_GND

Figure 13 Digital Output

Below is an example of how to interface with the digital outputs for both the sinking and sourcing hardware configurations. The digital I/O circuitry is again powered from an external +24-volt power source via the I/O connector.

+24 V IN

24V GND

-

-

DIO1

DIO1

Figure 14 Sinking Output Figure 15 Sourcing Output

2.7 Analog Inputs

The analog inputs are coupled directly to the processor, and are software selectable for either

12-bit or 14-bit A/D converters. The analog input range is –10V to +10V.

All analog circuitry is powered from an internal ±15 Vdc power source. The +15 V and -15 V power is protected with a self-resetting poly fuse rated at 100 mA.

Table 8 Analog Voltage Conversion Table for 12-bits A/D

Conversion Table

+10 V 0x07FF

5 mV

0 V

-5 mV

-10 V

0x0001

0x0000

0xFFFF

0xF800

Table 9 Analog Voltage Conversion Table for 14-bits A/D


+10 V 0x1FFF

5 V 0x0FFF

0.0012 V 0x0001

0 V 0x0000

-0.0012 V 0xFFFF

-5 V 0xF000

-10 V 0xE000

Page 13 of 43



Card Type

Analog Expansion Card

Combo Expansion Card

Table 10 Number and Type of AI

Number of Inputs Type

16/8

Single-ended/differential

See Figures 4a and 4b in section 2.4.3 for wiring information.

8/4

Single-ended/Differential

Single ended inputs that can also be connected in pairs to create differential inputs.

Particular pairs must be used (input 1-5, 2-6,

3-7, 4-8) if a differential input is required.

2.7.1 Configuring Analog Inputs

Analog inputs can be configured as single-ended, differential mode, and also 12-bit or 14-bit resolution. Below are the commands from serial console:

2.7.1.1 qaio

This command queries the unit for all AIOs status; it provides analog I/O and the slot number where the AIO card for the interested analog inputs resides. The example below shows the command issued on a MacroNode unit with one DIDO card (slot 0) and one analog expansion card (slot 1).

Page 14 of 43



2.7.1.2 caio

This command is used to configure analog inputs to be either single-ended or differential mode. When issued by itself, the command will provide the syntax. Below is the command synopsis. The example below configures analog inputs slot 1 to be single-ended mode. caio slot# IO Type slot#: slot where the analog card resides

IO Type : se (single-ended), diff (differential)

Page 15 of 43



2.7.1.3 qair

This command is used to query the resolution of all analog inputs, whether 12-bit or 14-bit resolution is configured.

Page 16 of 43



2.7.1.4 cair

This command is used to configure analog input resolution to up to 14 bits. Below are the command synopsis and example. cair slot# CFG Res slot# where the analog card for the AI resides.

CFG Res : 12 for 12-bits, 14 for 14-bits resolution.

Page 17 of 43



2.8 Analog Outputs

The analog outputs are implemented using 12 bit D/A’s with a –10V to +10V output range. The output drivers are capable of driving 2 KΩ (5 mA) output loads. Analog outputs default to 0 volt during power up and processor reset conditions.

Table 11 Analog Voltage Conversion Table


+10 V 0x07FF

5 mV 0x0001

0 V

-5 mV

-10 V

0x0000

0xFFFF

0xF800

Card Type

Analog Expansion Card

Combo Expansion Card

Table 12 Number and Type AO

Number of Outputs

8

2

Type

Single-ended outputs

See Figure 5 in section 2.4.3 for wiring information.

Differential outputs

See Figure 9 in section 2.4.5 for wiring information.

2.9 Diagnostic Serial Port

The MacroNode has an RS-232 serial diagnostics interface available. The serial port will also provide access to a proprietary command-line interface, with specific commands to display advanced or detailed status information, and control of configuration parameters including those available via the Web interface, and others that are intended for advanced or factory use, that are not normally exposed via the Web interface.

The command-line interface supports the "help" command, which displays a brief synopsis of all other supported commands, which should be self-explanatory to anyone sufficiently familiar with the controller theory of operation, and the technologies involved (see section 3.2 for how to connect the unit using serial COM port).

The diagnostics serial port is also used to display all legally required Copyright messages, current version information and hardware configuration information during the unit's power-up sequence.

Table 13 Diagnostic Serial Port Connector Pin-Out (DB-9 Female Connector)

Pin

2

RS232 Function

TXD

3 RXD

5 SGND

Page 18 of 43



2.10 Ethernet Connector

The 100/10 BaseT Ethernet Port uses a standard shielded RJ45 connector or Fiber Optic

Channels. Indicators for the Ethernet Port are located on the front panel.

2.11 Status LED’s

The MacroNode has one LED that indicates the unit status and an additional LED that indicates the network status. The function of these LED’s meets the requirements for each network protocol. The following tables describe meaning of the various LED state for each protocol.

Table 14 Modbus/TCP Status LEDs

LED Color Status LED

Off

Solid Red

No power

Not Supported

Solid Amber Booting

Alternating Red-Green Watchdog failure, outputs off

Network LED

No Power

No Network Response (Disconnected)

Network Initializing, configuring DHCP

Network Configuration Error

Alternating Red-Amber I/O failure

Blinking Green

Null network, IP address configuration Error

Alternating Green-Amber Not Supported

Blinking Amber

Not Supported

Unit Okay, Diagnostic Mode, Watchdog Inactive Standing by for Modbus master to connect

Unit Okay, Production Mode, Watchdog Active Modbus master present and active

LED Color

OFF

Solid Green

Blinking Green

Blinking Red

Table 15 Ethernet/IP Status LEDs

Status LED

No Power

Device Operational

Not Supported

Minor Fault-recoverable

Network LED

No Power

Connected

No Connections

Connection Timeout

2.12 Rotary Switches

The Ethernet MacroNode has three rotary switches on the front panel, each switch representing a decimal digit 0 through 9. These three switches serve two purposes:

1. Determines the least significant section of the IP address

2. Determines the operating mode

Table 16 Switch Conditions

Mode Switch Settings Watchdog IP address

Production 000

Production 001-254

Enabled

Enabled

DHCP

192.168.0. (Switch Settings)

Diagnostic 300

Diagnostic 301-554

Disabled DHCP

Disabled 192.168.0. (Switch Settings – 300)

Page 19 of 43



When the unit is in normal (production) mode, the combinations of the rotary switches represent a decimal number between 000 and 254. When the number is between 001 and 254, this number is used to configure the last network segment of the static IP address, with a factory set prefix 192.168.9.xxx, or any other prefix that may be configured through the diagnostic serial port. If the rotary switch combination is set to 000, the unit will obtain an IP address automatically using DHCP protocol.

To set the operating mode to diagnostics mode set the rotary switches to 300 or above. In

Diagnostic mode the watchdog is disabled, and the user is allowed to change the value of the outputs via the Web-based diagnostic pages. Setting the switches to a value of 300 configures the IP address using DHCP, and setting the switches above 300 configures the unit to a static

IP address.

For example: A switch setting of 330 means that the diagnostic mode is set, and the IP address is statically configured to 192.168.9.30.

Note

Rotary switches decimal representation above 554 are reserved and should not be used.

2.13 I/O Monitoring

There are multiple control and data monitoring interfaces for the unit:

• Modbus/TCP or Ethernet/IP control

• Web browser, manual control

• Web browser, configuration and graphical data monitoring

• XML streaming data acquisition, using TOOLweb™ protocol

Page 20 of 43



3 Quick-Start

• Set the IP address switches on the front of the unit to 3 1 0. The unit is now in Diagnostic mode with a static IP address. The units IP address will be 192.168.0.10. Power the

MacroNode by supplying +24 volts to the 3-position terminal block power connector.

• Power the I/O modules by supplying +24V for Digital modules via the I/O connector.

Note Analog +/-15 volts for Analog modules is supplied internally.

• Attach a network cross-over cable between the unit and your PC or use a HUB to build a small network.

• Modify your PC network TCP/IP settings using the computer’s Connection Properties menu to match the following:

PC IP Address: 192.168.0.1

255.255.255.0 PC Netmask:

• Open a web browser window and enter http://192.168.0.10 in the address line. There is a slight delay as the unit transfers content to your local browser. The main Device page is displayed. If you are unable to load the page, check the units switch settings and ensure the IP address of the PC is 192.168.0.1. Also check the Ethernet cable connections to your PC and to the MacroNode.

Figure 16 Device Webpage

The Device page provides current status on the unit and provides basic I/O control and monitoring when the device is in diagnostic mode. Once in production mode, the outputs can no longer be controlled via the webpage.

Page 21 of 43



Cli

Click on the underlined links to view the I/O

Figure 17 I/O links on Homepage

• Selecting the underlined items in the I/O blocks chart will launch secondary I/O pages.

The following figures show the digital and analog input statuses that are displayed after an underlined link is selected.

Figure 18 Digital and Analog Input WebPages

• The digital and analog output WebPages provide basic control of the output points if the unit is in diagnostics mode. The pull down menu allows the user to select the digital output state or to enter in a value for an analog output. There is also a Blinking Output pull down menu that allows the user to put an output into a blinking or oscillating state.

Figure 19 Digital and Analog Output WebPages

• Click on the link for the analog or digital output page. Change the state of one of the outputs by selecting an option from the pull down menu and for the case of analog enter a number within the range of –10V to +10V.

If the output does not come on, check the status and network LEDs on the front of the unit. The module LED should be blinking amber and the network LED should be blinking green. If the states are different, reference the LED status table in section 2.10. Also, check all power connections.

Page 22 of 43



Network Configuration

The MacroNode network settings configure the 100/10 BaseT Ethernet port. The following are factory-default Ethernet settings.

Parameter

IP-Address

Subnet mask

Setting

192.168.0.X

255.255.255.0

Default Gateway None

Note Reading or changing the network settings of an unknown unit is achieved by connecting via a serial terminal session.

3.1 Connecting to a computer via TCP/IP

The Ethernet MacroNode is configured and controlled via its Ethernet port. The following steps show how to configure a Windows PC for first-time communication with a unit.

1) Connect the unit to your PC by using an Ethernet crossover cable for direct point-to-point connection, or connect through an Ethernet switch or hub.

Note

Some 10/100MB Ethernet interfaces may not detect the MacroNode™ when using an Ethernet crossover cable. If you experience problems, connect through an Ethernet switch or hub.

2) Change IP switches on the MacroNode to 3 1 0.

3) Change your PC network TCP/IP settings so that PC resides on same sub network as the

MacroNode I/O™.

Use the following TCP/IP settings:

IP Address:

Subnet Mask:

192.168.0.1

255.255.255.0

Default Gateway: none

4) Open your PC web browser (Netscape, Internet Explorer, or equivalent).

Enter the IP address in the web browser’s address line. http://192.168.0.10

The main page for the MacroNode will open.

Page 23 of 43



3.2 Connecting via a Serial Terminal Session

Connect your computer to the diagnostics port (DB9) using a standard null-modem cable.

Using a terminal program such as Microsoft® HyperTerminal or Tera Term Pro you can now communicate via the diagnostics port of the unit. The serial connection parameters are listed in the following table.

Table 17 Serial Connection Parameters

Parameter Value

Baudrate

Data bits

38400

8

Parity None

Stop bits 1

Flow Control None

Once connected the IP-Address can be changed by typing the menu command and pressing m within 3 seconds: The current the IP address of the unit can be view by just typing menu.

Figure 20 Serial Diagnostics Menu Command

The serial interface provides diagnostics for the device. The help command can be used to display all commands available through the serial interface.

Page 24 of 43



Figure 21 Serial Diagnostics Help Command

Page 25 of 43



4 CONTROLweb

TM

User Interface

The user interface is web based. You can access it by simply browsing to the IP-address of the

CONTROLweb™ node.

Note

Microsoft Internet Explorer versions older than 5.5 may not function as expected due to limitations of the browser.

The main page of the CONTROLweb™ unit shows a top view of the module. This is referenced as the Device tab near the top of the page.

Figure 22 Device Homepage

Dynamic diagnostic details available from this page are:

• Unit data- model number, serial number, and software version

• Operational statistics

• Ethernet load

By selecting an I/O of interest from the main page, a pop-up will appear for each section of I/O.

• Inputs can be read. (dynamic)

• Outputs can be set manually if the unit is in diagnostics mode

Note

The I/O is arranged in blocks, which represent expansion modules. The last block is always a virtual I/O block which can be used in conjunction with the cLogic feature. Please contact MKS for the cLogic API document for more information on implementing the virtual I/O.

Page 26 of 43



I/O Mapping-Modbus/TCP

The Modbus mapping details can be viewed through the web browser interface by clicking on the I/O Mapping Tab from the main page. The figure below is one example of what will appear on the screen. The mapping will change depending on which I/O expansion modules are installed. The last block is not a physical expansion module; it consists of virtual I/O only.

Figure 23 Modbus Data Mapping for unit with 4 expansion modules

The MacroNode IO supports the following MODBUS Functions:

1. ReadDiscreteInputs. As defined in the MODBUS Application Protocol Specification, the device shall support reading one or more discrete inputs via the ReadDiscreteInputs function.

2. ReadCoils. For the purposes of this device, a coil shall be synonymous with a Discrete

Output. As defined in the MODBUS Application Protocol Specification, the device shall support reading one or more coils (discrete outputs) via the ReadCoils function.

3. WriteSingleCoil.

4. WriteMultipleCoils.

5. ReadHoldingRegisters. As defined in the MODBUS Application Protocol Specification, the device shall support reading one or more registers via the ReadHoldingRegisters function.

6. WriteSingleRegister. Is defined to access the HoldingRegisters.

When accessing an IO point, the following method is used.

DI address = Reference of DI Number – 1

For example for DI number = 4 with a reference of 4, the DI address would be 3.

Page 27 of 43



Map this data in your Modbus/TCP scanner.

Note For more details on Modbus, see http://www.modbus.org.

WATCHDOG TIMER

The Modbus/TCP Interface includes a watchdog timer to monitor and react in the event that communications are not maintained between the client and the server within a programmable amount of time. If communications exceed the timeout value (programmed into the Watchdog

Timeout Value Holding Register) a timeout will occur and the Watchdog Timeout Counter register will increment 1 count for every timeout event that occurs. In the event that a timeout occurs the Status LED will alternate between red-amber and green. Once a timeout occurs all outputs are disabled.

The Watchdog Timeout value can be set from 100ms to 65535ms and can be disabled by writing a value of 0 to the register. The Watchdog Timeout Counter increments on each timeout event and is cleared by writing any value to the register.

Note

To ensure that the Watchdog Counter register is cleared the register should be written to during initialization.

Page 28 of 43



4.1 I/O Mapping-Ethernet IP

The Ethernet/IP I/O details can be viewed through the web browser interface by clicking on the

I/O Mapping Tab from the main page. The figure below is one example of what will appear on the screen. The mapping will change depending on which I/O expansion modules are installed.

This page provides information for Instances 100 – 103. The table is broken down by byte number as well as by the bits within said bytes. The byte total is displayed at the bottom of the table. To change the instance, use the Assembly Instance drop down menu at the top of the screen. Instances 100 and 101 do not include the virtual I/O where as instances 102 and 103 do.

Note

The I/O is arranged in blocks, which represent expansion modules. The last block is always a virtual I/O block which can be used in conjunction with the cLogic feature. Please contact MKS for the cLogic API document for more information on implementing the virtual I/O.

Figure 24 Ethernet IP I/O Mapping

Page 29 of 43



Below is an example of one way the expansion slots can be populated and the following sections explains the resulting input and output bytes for this configuration. Note this is only one example of how the expansion slots can be populated. The byte order conforms to the following rules:

• Digital control bytes for each slot always come before the analog control bytes.

• Analog falls on even byte boundaries, a null byte is used for stuffing.

• Analog is always low byte first then high byte.

• Virtual I/O is after physical I/O

{ { { { {

MacroNode I/0 TM

LINK 100M 1

DIDO

2

Tx

LA N

Rx

0

100

8

6

IP

ADD.

10

8

6

0

0

4

2

4

2

1

8

6 4

2

23 24

AIAO

15

1

Combo

2

16

STAT 24V STAT 15V STAT 24V

MOD NET mks

Figure 25 MacroNode with Digital, Analog, and Combo Expansion cards

Page 30 of 43



4.1.1 Assembly Instance 100

Below is an example of Instance 100, which describes the information provided by the unit

(input values). This example demonstrates the fact that digital bytes always appear before analog bytes. Also notice that byte number five is a stuff byte that forces the least significant analog bytes to fall on an even byte boundary. The last line displays the total number of bytes this unit produces.

Digital Inputs

Stuff Byte

Analog Inputs

Figure 26 Instance 100-Input Mapping

Page 31 of 43



Digital outputs

Stuff Byte

Analog outputs

Page 32 of 43


MacroNode I/O ™ User Manual always appear before analog bytes and physical I/O appears before virtual I/O. Also notice that byte number nine is a stuff byte that forces the least significant analog bytes to fall on an even

Physical Digital Inputs

Virtual Digital Inputs

Stuff Byte

Physical Analog Inputs

Virtual Analog Inputs

Page 33 of 43



(Outputs) including the virtual outputs. This example demonstrates the fact that digital bytes always appear before analog bytes and that physical I/O appears before virtual I/O. Also notice

Physical Digital Outputs

Virtual Digital Outputs

Stuff Byte

Physical Analog Outputs

Virtual Analog Outputs

Page 34 of 43



5 TOOLweb™ Interface

TOOLweb™ is a system-wide program for enabling and gathering real time data from multiple elements of a process, and providing this data to factory based modules for analysis, FDC and

APC.

The Ethernet MacroNode uses TOOLweb™ functionality for the following:

• Web based tools for data analysis and debug, directly from the I/O module

• Real time data acquisition, using XML over HTTP

5.1 TOOLweb™ User Interface

TOOLweb™ functions are accessed and configured through the web browser interface. Users must determine the I/O points of interest, those usually referred to as Key Process Variables.

Once these variables are named and scaled, they are available for data collection and analysis.

5.1.1 Control Access

Create the allowed permissions to process data.

Figure 30 Access Control

5.1.2 I/O Bindings

Select the I/O points to be available for TOOLweb™ functions. Each point is selected, given a description, and scaled to meaningful process units. Up to 64 variables can be configured.

Page 35 of 43



Figure 31 Collection Variables

5.1.3 Data Collection Plans

A data collection plan selects the process variables of interest, and the frequency of data collection. Each collection plan can then be viewed using a Charting Applet, or can be downloaded in CSV format to your local PC.

Figure 32 Collection Plan

Page 36 of 43



5.1.4 Data Collection Plan Editing

Create a collection plan, and select the key process variables of interest:

Figure 33 Edit Collection Plan

5.1.5 Charting Applet

Once a data collection plan is configured, you can view the data using a built-in charting applet.

Figure 34 Charting Applet

Page 37 of 43



5.1.6 Download Data to Local PC

Collection plan data can also be downloaded in CSV format:

Figure 35 Collection Plan Data

5.2 TOOLweb™ Tool Side Interface

The tool side interface is relevant when a MacroNode is connected to a BlueBox™ in a semiconductor process tool APC, and e-diagnostic system.

The following messages are supported via the TOOLweb TM tool side Interface:

Message Supported

CapabilitiesRequest/Response Yes

Polling Yes

Tracing Yes

Bulktrace No

Events No

ControlParameter Yes

SetRequest/Response No

The names and units as exposed in the CapabilitesResponse are the same as defined in the channel configuration. Reference the BlueBox™ Manual for additional details on interfacing with

BlueBox™.

Note

Microsoft Internet Explorer 5.0.1 or higher is required. Microsoft Internet Explorer versions less than 5.5 may not function as expected due to limitations of the browser.

Page 38 of 43



6 Specifications

Physical Specifications

Criteria

Dimensions

I/O Connector

Ethernet Connector

RS-232 Connector

Weight

Environmental Specifications

Criteria

Operating Temperature

Storage

Humidity

Functional Specifications

Criteria

BUS Interface

Front Panel Indicators

Rotary Switches

Power Specifications

Criteria

Input

Specifications

4” H x 4” W x 1.5”D plus 0.7” per I/O slot

37-pin male D-sub

10/100 BaseT auto-switched, RJ45 with EMI filter, LED indicators OR Fiber optic connector

TXD, RXD; DB9 connector

600g (1.32 lb)

Specifications

0 to +55°C

-40 to +85 °C

5 to 95% non-condensing

Specifications

Ethernet – Modbus/TCP or Ethernet/IP

Network Status, Module Status, LINK, 100MB

IP address, operating mode

Specifications

Powered from I/O connector

+24VDC@120 mA min

Power Specifications

Criteria

Input

Isolation

Over Current Protection

Each Channel

Total

Specifications

Powered from I/O connector

+24VDC@120 mA min

DC/DC Isolation, 2.5KVrms

1.5A

3.0A

Input/Output Specifications per Card

Criteria Specifications

DIDO Card

Number of Digital I/O

Response Time

Digital Input

Sink

Current sinking

Logic Low Voltage

Logic High Voltage

Source

Current sourcing

24 points (input or output)

50µsec

Active Low1.5 mA min, Max -2.18 mA at Vin=0V

Min 0V to Max 3.6V

Min 4.1V to Max 30V

Active High-1.5 mA min, Max 2.33 mA at Vin=24V

Page 39 of 43



Input Low Voltage

Input High Voltage

Digital Output

Sink

Current sinking

Output OFF Voltage

Output ON Voltage

Source

Current sourcing

Current max

Output ON Voltage

Output OFF Voltage

AIAO Card

Analog Accuracy

Analog Response Time

Analog Input

Analog Output

COMBO Card

Number of Digital I/O

Response Time

Digital Input

Current sinking

Current sourcing

Digital Output

Current sinking

Current sourcing

Current max

Analog Accuracy

Analog Response Time

Analog Input

Analog Output

Min 0V to Max 6V

Min 6.5V to Max 30V

Active low, 200 mA max / channel

Min 23.8V @ 580uA @ R

Min 23.8V @ 1mA @ R

L

L

=240Ω

=120Ω

Max 240mV @ 200mA @ R

Max 133mV @ 100mA @ R

L

L

=120Ω

=240Ω

Active high, 200 mA max / channel

750 mA per 6 DO

Min 23.3V @ 100mA @ R

Min 23.1V

@ 200mA @ R

L

L

=240Ω

=120Ω

Max 0V @ 0uA @ R

L

=120Ω

Max 0V @ 0mA @ RL=240Ω

0.1% Full scale (-10V to 10V)

200 µsec

16 single-ended points or 8 differential points (s/w selectable)

14 bit

1Khz RC filter

8 single-ended points

12 bit

Range (–10 to +10V)

5mA / channel into a 2 KΩ load

16 points (input or output)

50 µsec

Active Low- 1.5 mA min,

Active High-1.5 mA min,

Active low, 200 mA max / channel

Active high, 200 mA max / channel

750 mA per 6 DO

0.1% Full scale (-10V to 10V)

200 µsec

8 single-ended points or 4 differential points (s/w selectable)

14 bit

1khz RC filter

2 differential points

Page 40 of 43



12 bit

Range (–10 to +10V)

5mA / channel into a 2 KΩ load

Page 41 of 43



7 Model Code Description

The Model code of MacroNode defines the features of the Unit for Hardware, software and other options:

BASE OPTIONS SLOT 1 SLOT 2 SLOT 3 SLOT 4

Format: MNOD E

FE

DIDO

AIAO

AI

AIC

COMB

DIDO

AIAO

AI

AIC

COMB

-

Options

-E Ethernet, RJ45

-FE Ethernet,

Slot Designations

-DIDO

-AIAO

-AI

-AIC

-COMB

24 Channel Digital I/O Card

16 Channel Analog In, 8 Channel Analog Out

16 Analog Inputs (Voltage Type Inputs)

8 Analog Inputs (Current Type Inputs)

Combination: 16DIDO, 4AI-DIF, 2AO-DIF

DIDO

AIAO

AI

AIC

COMB

DIDO

AIAO

AI

AI C

COMB

Page 42 of 43



WARRANTY

MKS Instruments, Inc. (MKS) warrants that for one year from the date of shipment the equipment described above (the “equipment”) manufactured by MKS shall be free from defects in materials and workmanship and will correctly perform all date-related operations, including without limitation accepting data entry, sequencing, sorting, comparing, and reporting, regardless of the date the operation is performed or the date involved in the operation, provided that, if the equipment exchanges data or is otherwise used with equipment, software, or other products of others, such products of others themselves correctly perform all date-related operations and store and transmit dates and date-related data in a format compatible with MKS equipment. THIS WARRANTY IS MKS’ SOLE WARRANTY CONCERNING DATE-RELATED

OPERATIONS.

For the period commencing with the date of shipment of this equipment and ending one year later, MKS will, at its option, either repair or replace any part which is defective in materials or workmanship or with respect to the date-related operations warranty without charge to the purchaser. The foregoing shall constitute the exclusive and sole remedy of the purchaser for any breach by MKS of this warranty.

The purchaser, before returning any equipment covered by this warranty, which is asserted to be defective by the purchaser, shall make specific written arrangements with respect to the responsibility for shipping the equipment and handling any other incidental charges with the

MKS sales representative or distributor from which the equipment was purchased or, in the case of a direct purchase from MKS, with the MKS-CIT home office in San Jose, CA

This warranty does not apply to any equipment, which has not been installed and used in accordance with the specifications recommended by MKS for the proper and normal use of the equipment. MKS shall not be liable under any circumstances for indirect, special, consequential, or incidental damages in connection with, or arising out of, the sale, performance, or use of the equipment covered by this warranty.

THIS WARRANTY IS IN LIEU OF ALL OTHER RELEVANT WARRANTIES, EXPRESSED OR

IMPLIED, INCLUDING THE IMPLIED WARRANTY OF MERCHANTABILITY AND THE

IMPLIED WARRANTY OF FITNESS FOR A PARTICULAR PURPOSE, AND ANY WARRANTY

AGAINST INFRINGEMENT OF ANY PATENT.

Page 43 of 43


MacroNode I/O™ User Manual

MacroNode I/O™

User Manual

Copyright

Preface

Table of Contents

General Information

1.1 Conventions used in this User Manual

2 Installation and Setup

2.1 Shipping Box Contents

2.4 Power and I/O Wiring

2.4.1 Power Supply Wiring

2.4.3 Analog Expansion I/O Wiring

2.4.4 Digital Expansion I/O Wiring

2.4.5 Combo I/O Wiring

2.5 Digital Input Interface Example

2.6 Digital Output Interface Example

2.7 Analog Inputs

2.7.1 Configuring Analog Inputs

2.8 Analog Outputs

2.9 Diagnostic Serial Port

2.10 Ethernet Connector

2.11 Status LED’s

2.12 Rotary Switches

2.13 I/O Monitoring

3 Quick-Start

Network Configuration

3.1 Connecting to a computer via TCP/IP

3.2 Connecting via a Serial Terminal Session

4 CONTROLweb

User Interface

I/O Mapping-Modbus/TCP

4.1 I/O Mapping-Ethernet IP

4.1.1 Assembly Instance 100

5 TOOLweb™ Interface

5.1 TOOLweb™ User Interface

5.1.1 Control Access

5.1.2 I/O Bindings

5.1.3 Data Collection Plans

5.1.4 Data Collection Plan Editing

5.1.5 Charting Applet

5.1.6 Download Data to Local PC

5.2 TOOLweb™ Tool Side Interface

6 Specifications

7 Model Code Description

WARRANTY

Related manuals

Cognex

In-Sight I/O Expansion Module

Atop

IO5202

Atop

IO5202

Table of contents