TriScrollTM 300 Inverter Dry Scroll Vacuum Pump

Vacuum Products Division
TriScrollTM 300
Inverter
Dry Scroll
Vacuum Pump
Manual No. 699904355
Revision C
October 2009
INSTALLATION AND
OPERATION MANUAL
TriScroll™ 300 Inverter
Dry Scroll Vacuum Pump
TriScroll is a trademark of Agilent, Inc.
Copyright 2009
Agilent, Inc.
TriScroll 300 Inverter Vacuum Pump
Table of Contents
Declaration of Conformity
Warranty ...................................................................viii
Warranty Replacement and Adjustment..............viii
Instructions for Use ..................................................... 1
General Information ................................................. 1
Storage ................................................................. 1
Unpacking and Inspection........................................ 1
Installation Requirements ......................................... 2
Safety ................................................................... 2
Operation................................................................. 4
Startup Procedure ................................................. 4
Shutdown Procedure ............................................ 4
Maintenance ............................................................ 4
Technical Information ................................................. 5
Pump Electrical Controller........................................ 8
Technical Specifications ....................................... 9
Serial Interface Specification RS485 and RS232.. 10
Gas Ballast ............................................................. 12
Bearing Purge......................................................... 12
Purge Kit ................................................................ 12
Isolation Valve Kit .................................................. 12
CT-100 Speed Control Kit....................................... 14
VPI and CT100 Speed Control Kit........................... 15
Exhaust Silencer Kit ................................................ 16
Vibration Isolation Kit............................................. 16
HEPA Inlet filter...................................................... 16
Troubleshooting ..................................................... 17
Maintenance .......................................................... 18
General Information ........................................... 18
Related TriScroll Manuals................................... 18
Maintenance and Tooling Kits ............................ 19
Factory Service Options...................................... 20
Accessories......................................................... 20
Contacting Agilent.............................................. 20
iii
TriScroll 300 Inverter Vacuum Pump
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TriScroll 300 Inverter Vacuum Pump
List of Figures
Figure Caption
1
2
3
4
5
6
7
8
9
10
11
List of Tables
Page
Table
Interface Drawing with Dimensions . . . . . . . 6
Pumping Speed Curves . . . . . . . . . . . . . . . . . 6
TriScroll 300 Inverter Vacuum Pump . . . . . . . 7
Inverter Interface . . . . . . . . . . . . . . . . . . . . . . 7
Driving Frequency vs. Analog Input . . . . . . . . 9
T+ Pumps List . . . . . . . . . . . . . . . . . . . . . . . 11
T-Unknown Pump . . . . . . . . . . . . . . . . . . . . 12
Isolation Valve Position . . . . . . . . . . . . . . . . 13
Pumping Speed Percentage Drop . . . . . . . . . 14
VPI and CT100 Kit . . . . . . . . . . . . . . . . . . . 15
Serial Number Location . . . . . . . . . . . . . . . 15
1
2
3
4
5
6
7
8
9
10
11
12
Title
Page
Power Cord Selection .................................... 3
Circuit Breaker Requirements......................... 3
Specifications ................................................ 5
P1 Interlock ................................................... 8
J2-Serial Port .................................................. 8
T-Plus Software Variables .............................. 8
Status LEDs .................................................... 9
Troubleshooting Chart ................................. 11
Other Related Manuals ................................ 12
Maintenance and Tooling Kits ..................... 13
Factory Service Options ............................... 14
Accessories .................................................. 14
v
TriScroll 300 Inverter Vacuum Pump
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Declaration of Conformity
Declaration of Conformity
Konformitätserklärung
Déclaration de Conformité
Declaración de Conformidad
Verklaring de Overeenstemming
Dichiarazione di Conformità
We
Wir
Nous
Nosotros
Wij
Noi
Agilent, Inc.
121 Hartwell Avenue
Lexington, MA, 02421-3133 USA
declare under our sole responsibility that the product,
erklären, in alleniniger Verantwortung, daß dieses Produkt,
déclarons sous notre seule responsabilité que le produit,
declaramos, bajo nuestra sola responsabilidad, que el producto,
verklaren onder onze verantwoordelijkheid, dat het product,
dichiariamo sotto nostra unica responsabilità, che il prodotto,
TriScroll Inverter Vacuum Pumps (PTS03001INV, PSS06001INV)
to which this declaration relates is in conformity with the following standard(s) or other normative documents.
auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.
auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).
al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).
waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.
a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.
98/37/EEC, Machinery Directive
EN 1012-2:1996
EN 1050:1996
EN 60204-1
73/023/EEC, Low Voltage Directive
EN 60034 part 1
EN 61010-1:2001
Compressors and vacuum pumps safety reqmts; Part 2 vacuum pumps
Safety of machinery - principles for risk assessment
Electrical equipment of industrial machines; general requirements
Rotating electrical machines - Part 1: Rating and performance
Safety requirements for electrical equipment for measurement, control and
laboratory use
89/336/EEC, Electromagnetic Compatibility Directive
EN 61000-4-2
Testing and measurement techniques - Electrostatic discharge immunity test
EN 61326:1997/A3:2003
Electrical equipment for measurement, control and laboratory use
John Ehmam
Operations Manager
Agilent, Inc.
Vacuum Products Division
Lexington, Massachusetts, USA
March 2003
TriScroll 300 Inverter Vacuum Pump
Warranty
Products manufactured by Seller are warranted against
defects in materials and workmanship for twelve (12)
months from date of shipment thereof to Customer, and
Seller’s liability under valid warranty claims is limited, at
the option of Seller, to repair, to replace, or refund of an
equitable portion of the purchase price of the Product.
Items expendable in normal use are not covered by this
warranty. All warranty replacement or repair of parts shall
be limited to equipment malfunctions which, in the sole
opinion of Seller, are due or traceable to defects in
original materials or workmanship. All obligations of
Seller under this warranty shall cease in the event of
abuse, accident, alteration, misuse, or neglect of the
equipment. In-warranty repaired or replaced parts are
warranted only for the remaining unexpired portion of the
original warranty period applicable to the repaired or
replaced parts. After expiration of the applicable warranty
period, Customer shall be charged at the then current
prices for parts, labor, and transportation.
Reasonable care must be used to avoid hazards. Seller
expressly disclaims responsibility for loss or damage
caused by use of its Products other than in accordance
with proper operating procedures.
Except as stated herein, Seller makes no warranty, express
or implied (either in fact or by operation of law), statutory
or otherwise; and, except as stated herein, Seller shall
have no liability under any warranty, express or implied
(either in fact or by operation of law), statutory or
otherwise. Statements made by any person, including
representatives of Seller, which are inconsistent or in
conflict with the terms of this warranty shall not be
binding upon Seller unless reduced to writing and
approved by an officer of Seller.
viii
Warranty Replacement and Adjustment
All claims under warranty must be made promptly after
occurrence of circumstances giving rise thereto, and must
be received within the applicable warranty period by
Seller or its authorized representative. Such claims should
include the Product serial number, the date of shipment,
and a full description of the circumstances giving rise to
the claim. Before any Products are returned for repair
and/or adjustment, written authorization from Seller or its
authorized representative for the return and instructions
as to how and where these Products should be returned
must be obtained. Any Product returned to Seller for
examination shall be prepaid via the means of
transportation indicated as acceptable by Seller. Seller
reserves the right to reject any warranty claim not
promptly reported and any warranty claim on any item
that has been altered or has been returned by
non-acceptable means of transportation. When any
Product is returned for examination and inspection, or for
any other reason, Customer shall be responsible for all
damage resulting from improper packing or handling, and
for loss in transit, notwithstanding any defect or
non-conformity in the Product. In all cases, Seller has the
sole responsibility for determining the cause and nature of
failure, and Seller’s determination with regard thereto
shall be final.
If it is found that Seller’s Product has been returned
without cause and is still serviceable, Customer will be
notified and the Product returned at its expense; in
addition, a charge for testing and examination may be
made on Products so returned.
3/1/00
TriScroll 300 Inverter Vacuum Pump
Instructions for Use
General Information
Unpacking and Inspection
This equipment is designed for use by professionals. The
user should read this instruction manual and any other
additional information supplied by Agilent before
operating the equipment. Agilent will not be held
responsible for any events that occur due to
non-compliance with these instructions, improper use by
untrained persons, non-authorized interference with the
equipment, or any action contrary to that provided for by
specific national standards.
The TriScroll™ 300 is a dry, scroll vacuum pump. This
pump is suitable for pumping air or inert gases. The pump
is not intended to pump toxic, corrosive, explosive, or
particulate-forming gases.
The following paragraphs contain all the information
necessary to guarantee the safety of the operator when
using the equipment. Detailed information is supplied in
“Technical Information” on page 5.
This manual uses the following standard safety protocol:
The shipping container is a double carton.
CAUTION
NOTE
2. Slit open the inner box.
3. Lift the pump with the plywood base out of the inner
box.
4. Remove the four bolts securing the pump frame to
the plywood base.
5. Locate the NW16 exhaust fitting and set it aside.
6. Inspect the pump for damage.
If there is shipping damage, contact the freight carrier
and your local Agilent sales office immediately.
7. Save the carton and packing materials.
Total weight of the package, including the pump, is
approximately 33.6 kg (74 lbs).
WARNING
When unpacking the pump, be sure
not to drop it, and avoid any kind of
sudden impact or shock vibration
to it.
WARNING
The TriScroll 300 weighs 26 kg
(57 lbs). To avoid injury, use proper
lifting techniques when moving the
pump.
NOTE
Normal exposure to the environment cannot damage the pump.
Nevertheless, it is advisable to keep
the pump inlet closed until the
pump is installed in the system.
The warning messages are for
attracting the attention of the operator to a particular procedure or practice which, if not followed correctly,
could lead to serious injury.
The caution messages are displayed
before procedures, which if not followed, could cause damage to the
equipment.
The notes contain important
information taken from the text.
Storage
When transporting and storing the pump, the following
environmental requirements should not be exceeded:
Temperature:
–20 °C to 60 °C (–4 °F to 140 °F)
Relative humidity:
0 to 95% (non-condensing)
1
DRAFT 6/5/11
WARNING
1. After opening the outer box, remove the foam packing.
TriScroll 300 Inverter Vacuum Pump
Installation Requirements
CAUTION
Safety
Do not remove or modify any safety or insulating
equipment from the pump. To do so may create a serious
safety hazard and may void the warranty.
DRAFT 6/5/11
WARNING
2
❑ This pump is designed to pump
air and inert gases only; it is not
designed to pump explosive, flammable, toxic, or corrosive gases.
They can cause bodily injury,
explosion, or fire.
❑ Install in an area that is not
exposed to rain, steam, or excessive
humidity. They can cause electric
shock, short circuits, and severe
bodily injury.
❑ Before inspecting or servicing the
pump, be sure the electrical supply
is disconnected.
❑ Consult a qualified electrician
whenever wiring the pump.
Although the pump can pump trace
particulates normally found in the
atmosphere, it is not designed for
process solids, chemicals, powders,
solvents, condensates, or other particulates. They can damage the
equipment, degrade its performance,
or shorten its useful life.
Single and three phase pumps operate in a clockwise direction when
viewed from the motor end. (Note
the arrow on the pump frame.)
Improper rotation can cause permanent damage to the pump.
During operation, the following
conditions should not be exceeded:
environmental
Temperature:
+5 °C to +40 °C (+41 °F to +104 °F)
Relative humidity:
0 to 95% (non-condensing)
CAUTION
Do not block the fan ducts because
the pump can become overheated.
A pump surface temperature in
excess of 55 °C (131 ° F) is potentially damaging. If such conditions
are observed, turn pump off and
allow to cool. Disassemble, inspect
for damage, and repair if necessary.
CAUTION
To reduce the risk of electric shock,
do not expose to rain; store indoors.
TriScroll 300 Inverter Vacuum Pump
Power Cord
WARNING
Several power cord options are available from your
Agilent dealer. Descriptions of the available power cords
and their ordering numbers are given in Table 1.
The pump must be connected to the
power supply using a high voltage
IEC-320 type power cord of at least 10
A capacity.
Do not modify the plug provided; if it
does not fit the outlet, have the proper
outlet installed by a qualified electrician.
Connect the product only to an outlet
that has the same configuration as the
plug.
Table 1 Power Cord Selection
Country
Power Cord Specification
Order
Do not use an adapter with this
product.
Europe
10 A / 220-230 VAC, 2.5 m 656494220
Denmark
10 A / 220-230 VAC, 2.5 m 656494225
Extension Cords
Switzerland
10 A / 230 VAC, 2.5 m
656494235
UK/Ireland
13 A / 230 VAC, 2.5 m
656494250
India
10 A / 220-250 VAC, 2.5 m 656494245
Israel
10 A / 230 VAC, 2.5 m
656494230
North
America
10 A / 230 VAC, 2.5 m
656494255
If you must use an extension cord with this product:
❑ Agilent recommends using only extension cords
with a minimum of 16-gauge wire and a
maximum length of 25’ (7.6 m).
❑ Use only a 3-wire extension cord that accepts the
plug.
❑ Ensure the extension is in good condition.
Grounding Instructions
This product should be grounded. In the event of an electrical short circuit, grounding reduces the risk of electric
shock by providing an escape wire for the electric current.
This pump is equipped with a power cord that has a
grounding wire with an appropriate grounding plug. The
plug must be inserted into an outlet that is properly
installed and grounded in accordance with all local codes
and ordinances.
Ensure the extension cord is rated high enough to carry the
current the products draws. An undersized cord causes a
drop in line voltage, resulting in loss of power and
overheating.
Circuit Breakers
WARNING
Protect against short circuits by installing a circuit breaker of the proper
capacity.
Table 2 lists the circuit breaker capacity required for the
pump. Locate the switch or circuit breaker near the pump.
Table 2
PTS03001INV
Breaker capacity
Circuit Breaker Requirements
200-240 VAC
50/60 Hz
10 A
100-115 VAC
50/60 Hz*
20 A
* Inverter with P/N S4897001 only
3
DRAFT 6/5/11
NOTE
Check with a qualified electrician or
serviceman if the grounding instructions
are not completely understood, or if
you are in doubt as to whether the
product is properly grounded.
TriScroll 300 Inverter Vacuum Pump
Operation
Maintenance
In order to reach ultimate vacuum, the pump must be left
running for about one hour with the inlet sealed.
Unlike conventional oil-sealed pumps, Agilent’s dry scroll
pumps do not have fluid to cleanse them of accumulated
dust and debris. Run the pump periodically at atmosphere
for a minute or two to flush out the pump. Flush the pump
regularly and adjust this schedule according to your
specific conditions.
Personnel responsible for pump operation and
maintenance must be well-trained and aware of the
accident prevention rules.
WARNING
❑ Death may result from contact
with high voltages. Always take
extreme care and observe the accident prevention regulations in force.
❑ When the machine is powered
up, be careful of moving parts and
high voltages.
❑ If you have to perform maintenance on the pump after a considerable time in operation, allow the
pump to cool as the temperature of
the outer surface may be in excess of
55 °C (131 °F).
❑ Always disconnect your power
supply to the pump before beginning
maintenance work.
NOTE
Before returning the pump to the
factory for repair, the “Health and
Safety” sheet attached to this instruction manual must be completed and
sent to the local sales office. A copy
of the sheet must be inserted in the
pump package before shipping.
Startup Procedure
1. Be sure that the vacuum system isolation valve is
closed.
DRAFT 6/5/11
2. Turn on power to the pump.
NOTE
Pump operation is interlock dependent. The provided mating connector must be plugged into P1 to start
the pump.
NOTE
When the controller is switched on,
an electronic self-test occurs, during
which an orange LED illuminates for
one second and the turns off for two
seconds. During this time, the pump
will not start.
This self-test time is not required if
the pump is already powered, as
when remotely or serially operated.
3. Open the isolation valve.
Shutdown Procedure
1. Close the vacuum system isolation valve.
This prevents debris in pump from being transported
into the vacuum system.
2. Turn off power to the pump.
4
If a pump is to be discarded, it must be disposed of in
accordance with specific national and local standards.
TriScroll 300 Inverter Vacuum Pump
Technical Information
Specifications
Model
TriScroll™ 300 Inverter Dry Scroll Vacuum Pump (PTS03001INV)
Interface dimensions
See Figure 1 on page 6
Peak pumping speed
250 l/m, 15m3/hr (8.9 cfm)
See Figure 2
Media
Clean air. No toxic, corrosive, explosive or particulate forming gases
Ultimate pressure (Torr)
1.0 x 10−2 Torr (1.3 x 10−2 mbar)
Maximum inlet pressure
1.0 atmosphere (0 psig)
Maximum outlet pressure
1.1 atmosphere (1.5 psig)
Inlet connection
NW25
Exhaust connection
Female 1/4" National Pipe Thread (NW16 adapter provided)
Gas ballast
Female 1/4" National Pipe Thread (40 Micron sintered filter provided)
Ambient operating temperature
5 °C to 40 °C (41 °F to 104 °F)
Storage temperature
–20 °C to 60 °C (–4 °F to 140 °F)
Motor rating
0.67 HP (0.5 kW)
Operating voltage
50-60 Hz:200-240 VAC Single-phase / 100-120 VAC Single Phase* ±10%
DRAFT 6/5/11
Table 3
*Inverter with P/N of S4897001 ONLY
Motor line current
200 VAC; 5 A
240 VAC; 4.2 A
Motor thermal protection
Automatic
Operating speed
35-65 Hz Factory setting: 62 Hz, 1800 RPM
Cooling system
Air-cooled
Weight
Pump only: 26 kg (57 lbs)
Shipping weight: 33.6 kg (74 lbs)
Noise level (per ISO 11201)
Variable with frequency, 55-68 dB(A)
Vibration level at inlet (per ISO 10816-1)
Variable with frequency
Main fuse
Type H; 10 A, 250 V (Littlefuse 0216010.HxP or equivalent)
Installation and storage
Installation category 2, indoor usage and storage
Pollution degree
2
CSA/CUS compliance
CAN/CSA-C22.2 No. 61010-1-04
U/L 61010-1, second edition
Altitude
2000 m
5
DRAFT 6/5/11
TriScroll 300 Inverter Vacuum Pump
Figure 1
Interface Drawing with Dimensions
Figure 2 Pumping Speed Curves
6
TriScroll 300 Inverter Vacuum Pump
4
3
1
2
9
1.
Cowling Screws; M5 (3)
2.
3.
4.
5.
6.
7.
8.
9.
10.
11.
Cowling
Inlet (NW25)
Inlet Screen
NW16 Exhaust Adapter (Not shown)
Bearing Purge Port (1/4" National Pipe Thread)
Pump Frame
Frame Screws; M6 (4)
Gas Ballast Port (1/4" National Pipe Thread)
Mounting Holes; 11 mm diameter thru (8)
Rubber Feet (4)
DRAFT 6/5/11
11
8
7
6
10
Figure 3 TriScroll 300 Inverter Vacuum Pump
4
3
2
1
1. Power Connector (IEC 320)
2. On/Off Switch
3. Serial Port J2
4. Interlock Port P1
Figure 4
Inverter Interface
7
TriScroll 300 Inverter Vacuum Pump
Pump Electrical Controller
DRAFT 6/5/11
The pump is powered by an inverter that converts single
phase line power into 3-phase power that drives an
induction motor at a user selectable frequency.
Several operational variables are modifiable through the
J2 serial port when using Agilent T-Plus software. A
number of additional system variables are also viewable.
Pump operation is interlocked through the P1 connector.
Pins 4 and 5, and Pins 8 and 9, must be connected
together to enable operation. A prewired connector is
supplied with the pump and should be plugged into P1.
If the pump requires more than 750 Watts to run at the set
frequency, the pump will be power limited and the output
frequency will be reduced. This mode is known as
autotuning.
At pump start, the drive frequency is ramped up over
several seconds. This provides for smooth starting and
eliminates large in-rush currents.
8
TriScroll 300 Inverter Vacuum Pump
Technical Specifications
Table 4
❑ Input voltage: 200 -240 V/100-120 V*,
50 - 60 Hz
* Inverter with P/N S4897001 only
❑ Max frequency: 65 Hz, factory set @ 62Hz
❑ Normal Operation maximum power: 750 W
❑ Protection level: IP 20
Table 4
PIN
#
P1 Interlock
SIGNAL NAME
IN/OUT
1
VPI relay contact 1
Out
2
0-10 V remote control
In
3
No Connection
4
Start (-) - Connect to Pin 5
SIGNAL NAME
IN/OUT
5
Groundout
Out
6
VPI relay contact 2
Out
7
No Connection
8
Start (+) - Connect to Pin 9 In
9
24 V
Out
Remote speed setting allows you to control rotational
speed using a 0-10 V analog input:
❑ Vin > 9 V: Driving frequency will be the full
speed (factory set @62 Hz)
❑ Vin <1 V: Driving frequency will be the
minimum speed (35 Hz)
DRAFT 6/5/11
In
PIN
#
P1 Interlock
Figure 5 Driving Frequency vs. Analog Input
NOTE
Pump operation is interlock dependent. The provided mating connector must be plugged into P1 to start
the pump.
9
TriScroll 300 Inverter Vacuum Pump
Serial Interface Specification RS485 and
RS232
Table 6
WIN
Table 5
DRAFT 6/5/11
PIN
#
J2 - Serial Port
TYPE
+ 5 V out
2
TX (RS232)
3
RX (RS232)
4
Spare
5
GND
6
A+ (RS485)
7
Spare
8
B- (RS485)
9
Spare
Physical level: RS232 or RS485
Maximum baud: 9600, 8 data bit, no parity, 1 stop bit.
DESCRIPTION
000
Logical
Start/Stop
(1=START; 0=STOP)
001
Logical
Low Speed
[0=OFF / 1=ON]
008
Logical
Remote/Serial Configuration
(1=REMOTE; 0=SERIAL)
102
Numerical
Set Point Value
(Hz)
105
Numerical
Set Point Hysteresis(%)
[0-100]
108
Numerical
Baud Rate
(0-4)
[600-1200-2400-4200-9600]
117
Numerical
Low Speed Adjust
(Hz)
120
Numerical
Rotational Frequency Setting
[Hz] (High speed adjust)
200
Numerical
Bus Current
[mA]
201
Numerical
3 Phase Voltage
[Vrms]
202
Numerical
Power
[W]
203
Numerical
Driving Frequency
[Hz]: (current driving
frequency)
205
Numerical
Status:
SIGNAL NAME
1
T-Plus Software Variables
❑
❑
❑
❑
❑
10
0=stop
2=ramp
3=autotuning
5=normal
6=fail
TriScroll 300 Inverter Vacuum Pump
WIN
206
T-Plus Software Variables (Continued)
TYPE
Numerical
DESCRIPTION
Error Code:
❑
❑
❑
❑
❑
❑
❑
❑
Bit 7: motor block
Bit 6: short circuit
Bit 5: undervoltage
Bit 4: spare
Bit 3: power fail
Bit 2: controller overt
Bit 1: pump overt
Bit 0: spare
Table 7
Status LEDs
LED STATUS
CONTROLLER STATUS
Off
Stop
Green flashing
Ramp or Autotuning
Green
Normal Operation
Red
Fail
Orange + Off
Reset + selftest
211
Numerical
Controller Temperature
[°C]
216
Numerical
Environment Temperature
[°C]
When the controller is switched on,
an electronic self-test occurs, during
which an orange LED illuminates for
one second and the turns off for two
seconds. During this time, the pump
will not start.
300
Numerical
Cycle Time
[min]
This self-test time is not required if
the pump is already powered, as
when remotely or serially operated.
301
Numerical
Cycle Number
302
Numerical
Pump Life
[h]
319
Alphanumeric
Controller Model
323
Alphanumeric
Controller Serial Number
325
Alphanumeric
Electrical Modification Level
500
Logical
Monitor Mode (write only)
503
Numerical
RS485 Serial Address Setting
[0-31]
504
Logical
Serial Type Select
(0=RS323; 1=RS485)
NOTE
Using T-Plus Software To Change The Target
Frequency
1. Install T-Plus software on your PC by running
setup.exe.
2. Using a 9-pin serial cable, connect your PC to the J2
serial port on the inverter (Figure 4).
3. Start the pump using the On/Off switch. The provided
Interlock Connector must be installed in P1.
4. Start the T-Plus software and Figure 6 appears.
Figure 6 T+ Pumps List
5. Click Open Control Panel and Figure 7 appears.
11
DRAFT 6/5/11
Table 6
TriScroll 300 Inverter Vacuum Pump
6. Open the Speed Settings directory, and click Target
Frequency.
Gas Ballast
The pump incorporates an automatic gas ballast to
prevent water and other condensates from accumulating
within the pump. The standard configuration is a sintered
filter installed in the 1/4" National Pipe Thread gas ballast
port (item 9 on Figure 3 on page 7). This allows enough
atmospheric air to enter the pump in order to purge
condensates while not effecting pump ultimate pressure
or pumping speed.
For applications where the ingress of atmospheric air is
undesirable, dry nitrogen at a flow rate of ≈5 lpm can be
bled into the gas ballast port. See “Purge Kit” below.
Blocking of the gas ballast port is not recommended.
Bearing Purge
DRAFT 6/5/11
Figure 7 T-Unknown Pump
7. Enter the desired operating frequency into Insert New
Value. This must be an integer between 35 and 65.
8. Click Send. The pump immediately tries to change to
the new target frequency. If the pump requires more
than 750 Watts to attain the target frequency, the
pump is power limited and will run at a lower
frequency (auto-tuning mode). This condition will
continue until the power required drops below 750
Watts.
The target frequency is stored in the inverter even
when power to the pump is removed.
A 1/4" National Pipe Thread bearing purge port (item 6 on
Figure 3 on page 7) protects the main crankshaft bearings
in applications where large amounts of water are being
pumped. In the standard configuration, this port is sealed.
To enable the bearing purge, dry nitrogen at a flow rate of
≈5 lpm can be bled into the bearing purge port. This gas
supply should be maintained at 2 psig or less and must be
kept below 5 psig. See “Purge Kit” below.
Purge Kit
A purge kit (Agilent part number PTSPURGEKIT) to
properly purge either the bearing purge or the gas ballast
is available. This kit contains a flow meter and all
necessary valving and tubing.
Isolation Valve Kit
Scroll pumps return to atmospheric pressure quickly
when shut off. Thus, the installation of a fast acting,
automatic, normally closed isolation valve is strongly
recommended to prevent pump debris from being
transported back into the vacuum chamber when the
pump is turned off:
❑ The opening of this valve must occur ≥ 350 ms
after pump startup.
❑ Valve closing must occur ≤ 250 ms after pump
shut off.
Use an NW25 or an NW40 valve and mount it as close as
possible to the pump inlet. Mounting to the pump inlet is
ideal.
Agilent offers a variety of manual, electromagnetic and
electropneumatic controlled vacuum valves for vacuum
applications. The Agilent Vacuum Pump Isolation (VPI)
Valve is highly recommended for vacuum pump isolation
applications (Figure 8).
12
TriScroll 300 Inverter Vacuum Pump
NOTE
Use the provided VPI valve kit only
with Agilent TriScroll inverter pumps
using inverters with part numbers
S4896001Z and/or S4897001.
See manual (P/N 699912117) for
installation details.
DRAFT 6/5/11
When used with the TriScroll inverter pump, the VPI
Valve status is controlled by motor operation. The VPI
Valve:
❑ Opens when the pump is running and
❑ Closes when it is stopped due to switch off or
overload protection.
This VPI kit includes a 24 VDC VPI valve, a
communication cable, a 24 VDC power supply, and a
splitter cord. The order numbers for NW25 and NW40
inlets are VPI25INV24DC and VPI40INV24DC,
respectively.
Figure 8 Isolation Valve Position
13
TriScroll 300 Inverter Vacuum Pump
CT-100 Speed Control Kit
❑ Below the lower set point value (SP2), the scroll
Agilent offers an optional speed control kit (P/N#:
PTSCNTRLKIT1 for an NW25 port, and PTSCNTRLKIT2
for an NW40) for use with the TriScroll inverter pumps
(P/N#: TS0X00INVXX), which allows automatic switching
from full pumping speed to a lower speed. Operation at
lower speed reduces noise and can extend maintenance
intervals.
This speed control kit consists of a CT-100 Active Rough
Vacuum Gauge, a communication cable, a 24 VDC
power supply, a power splitter cord, a tee, a centering
ring, and a clamp.
Two set points can be set on the CT100 gauge. When the
pressure is:
❑ Over the high set point (SP1), the inverter drives
the pump at full speed*.
❑ Higher than set point 2, but lower than set point
is driven at minimum speed**.
DRAFT 6/5/11
1, the driving frequency is: (full speed +minimum
speed)/2.
Set points are user-selected. For a faster pumpdown,
lower SP1 and the pump can stay longer at full speed. For
quieter operation, increasing SP2 and the pump runs
longer at the lower frequency.
* Full speed: customized frequency setting via Agilent
T-plus software if used. Factory setting is 62 Hz.
** Minimum speed: 35 Hz
Pumping speed changes compared with factory setting,
but the effect is less at lower inlet pressures. Figure 9
shows the pumping speed percentage drop at peak
pumping speed and at 100 mTorr inlet pressure.
Figure 9
Pumping Speed Percentage Drop
Please refer to manual (P/N 699904375) for installation and operation details.
14
TriScroll 300 Inverter Vacuum Pump
VPI and CT100 Speed Control Kit
DRAFT 6/5/11
Agilent’s combination VPI and CT100 speed control kit (Agilent P/N PTSCNTRLKIT3 for NW25 and PTSCNTRLKIT4 for
NW40), consists of the CT-100 Active Rough Vacuum Gauge, Communication Cable, 24 VDC Power Supply, Power
Splitter Cord, Tee, Centering Ring(s), Clamp(s), and a VPI valve (Figure 10).
Figure 10 VPI and CT100 Kit
For the speed control kit with a VPI valve, the pump inverter serial number starts with an A (Figure 11).
Figure 11
Serial Number Location
Refer to manual (P/N 699904375) for installation and operation details.
15
TriScroll 300 Inverter Vacuum Pump
Vibration Isolation Kit
In certain applications it is desired to lower the noise
level emitted by the pump. For these cases, Agilent offers
Exhaust Silencer Kits (P/N EXSLRTRISCROLL, Manual
P/N: 699904380), which breaks up noise pulsation in the
discharge line.
The Exhaust Silencer Kits contain two basic components,
as well as installation hardware. A cylindrical resonator
chamber has been selected to attenuate the frequencies
associated with the exhaust gas pulsation noise. The
resonator is then plumbed to an exhaust muffler/filter.
This muffler provides the majority of the actual noise
reduction. It also contains an integral 5-micron paper
filter element to capture any tip seal debris. This paper
filter is replaceable; the recommended service interval is
whenever the pump tip seal or module maintenance is
performed.
Replacement polyester filter element rated 99% efficient
at the 5-micron particle size, P/N: REPLSLR FILTER,
A set of vibration isolation mounts (P/N PTSVIBISOKIT,
Manual P/N: 699904385) are available for Agilent scroll
pumps. These are used in place of the standard feet
installed on the pump for applications that require
minimal vibration transmission from the pump to the
installation. They can be used alone, or with inlet flexible
bellows to provide pump isolation.
The vibration isolation mounts in the Vibration Isolation
Kit have been designed to ensure the lowest vibration
level transmitted at the base of the pump.
Vibration level in every direction (axis), transmitted to the
surface the pump sits on, is reduced by a significant
amount. Typical vibration reduction levels are 86% for
the TriScroll 300 pump.
The TriScroll Vibration Isolation Kit consists of (4)
vibration isolation mounts. They have a M6 metric
threaded screw to attach to the TriScroll frame; the screw
is provided.
These mounts increase the height of the TriScroll pumps
by 0.75" compared to the standard mounting feet.
DRAFT 6/5/11
Exhaust Silencer Kit
HEPA Inlet filter
Agilent now offers inlet filters for the scroll pumps, which
protect the pump from ingested particles, and keep
particles from migrating out of the pump. These HEPA
filters provide a rated 99.97% efficiency in trapping
particles > 0.3 microns.
NW 25 Inlet Trap with HEPA filter insert: P/N#:
#SCRINTRPNW25.
Replacement HEPA filter element (NW25 or NW40):
P/N#: # RPLHEPAFILTER1.
16
TriScroll 300 Inverter Vacuum Pump
Troubleshooting
Table 8 contains a list of possible problems, their probable causes, and corrective actions.
Problem
Pump won’t start
Poor ultimate pressure
Troubleshooting Chart
Probable Cause
Corrective Action
P1 interlock missing
Plug in connector (provided).
Wrong input voltage
Plug inverter into 200-240 VAC 50/60 Hz
Circuit breaker open
Close breaker.
Identify cause of overload.
Motor thermal protector open
Allow motor to cool.
Identify cause of overload.
Main fuse open
Inspect and replace fuse (Type H, 10 A, 250 V
(Littlefuse 0216010.HxP or equivalent)).
Wiring loose or cut
Repair or replace.
Excessive voltage drop
Check size and length of power supply cable.
Defective motor
Inspect. Contact Agilent.
System leak
Locate and repair leak.
Water in pump
Flush pump with air or dry nitrogen.
Gas ballast plugged
Replace breather vent. Contact Agilent.
Solvent in pump
Flush pump with air or dry nitrogen.
Install trap or filter.
Seals worn out
Replace tip seals. (Table 10 and Table 11 on
page 19 list maintenance kits and service
options.)
Poor conductance to pump
Replumb with shorter and/or larger diameter
tubing.
Pump makes hammering noise Pump overheated
Debris in pump
DRAFT 6/5/11
Table 8
Check ambient temperature.
Check ventilation to pump.
Check inlet screen.
Flush pump.
Disassemble pump and inspect. (Table 10 and
Table 11 on page 19 list maintenance kits and
service options.)
17
TriScroll 300 Inverter Vacuum Pump
Maintenance
General Information
Agilent TriScroll 300 Inverter pumps are designed to provide years of trouble-free service if maintenance procedures and
intervals are observed. Bearing grease replenishment and tip seal replacement is recommended when pump base pressure
has risen to an unacceptably high level for your application. Bearings, rotary seals and o-rings should also be replaced if
the pump exhibits humming or grinding noises from the bearings. Main bearing life may be shortened if your application
requires the pumping of high quantities of water vapor. Use of the bearing purge kit (PTSPURGEKIT) mentioned earlier will
keep this water from impacting bearing life.
Maintenance should be performed in accordance with procedures, tooling and materials specified in the manuals listed
below.
Related TriScroll Manuals
Other manuals related to tip seal replacement, pump module replacement, and major maintenance of the TriScroll 300
Inverter pumps are listed in Table 9.
Table 9
DRAFT 6/5/11
Title
Other Related Manuals
Applicable TriScroll Model
Part Number
Tip Seal Replacement Manual
All TriScroll 300 Series models
699904280
Pump Module Replacement Manual
All TriScroll 300 Series models
699904285
Major Maintenance Manual
All TriScroll 300 Series models
699904260
18
TriScroll 300 Inverter Vacuum Pump
Maintenance and Tooling Kits
Material and tooling required to perform maintenance on TriScroll pumps is provided in kit form. A description of each kit
and ordering information is provided in Table 10.
Table 10
Contents
Applicable TriScroll Model
Major Maintenance Kit
All bearings, bearing seals, bearing
lubricant, O-rings, and tip seals required
to rebuild TriScroll 300 series pumps.
All TriScroll 300 Series models
PTSS0300MK
Maintenance Tool Kit
All fixtures and tools required to perform
any maintenance on TriScroll 300 Series
pumps.
All TriScroll 300 Series models
PTSS0300TK
Tip Seal Tool Kit
All tools required to change the tip seals
on the TriScroll 300 Series pumps.
All TriScroll 300 Series models
PTSTSTKIT
Replacement Tip Seal Set
Replacement tip seals and static O-rings
for TriScroll 300 Series pumps.
All TriScroll 300 Series models
PTSS0300TS
NOTE
Part Number
DRAFT 6/5/11
Description
Maintenance and Tooling Kits
After tip seal replacement, the
TriScroll 300 Inverter pump may
require up to 24 hours run time to
achieve full rotational speed.
19
TriScroll 300 Inverter Vacuum Pump
Factory Service Options
Table 11 lists the service options that Agilent offers for the TriScroll 300 Inverter pump.
Table 11
Factory Service Options
Factory Service Options
Part Number
Advance Exchange TriScroll 300 Pump Module Only
EXPTS0300SC
Service/Rebuild TriScroll 300 Inverter Pump
PTS0300KMA
Accessories
The accessories listed in Table 12 are available for use with the TriScroll 300 Inverter pump. Contact your local Agilent
office to place an order. A list of offices is included on the rear cover of this manual.
DRAFT 6/5/11
Table 12
Accessories
Purge Kit
PTSPURGEKIT
Exhaust Extension
S4707002
Exhaust Filter Kit
PTS300EXFIL
Isolation Valve Kit
VPI25INV24DC
CT100 Speed Control Kit
PTSCNTRLKIT1
Exhaust Silencer Kit
EXSLRTRISCROLL
Vibration Isolation Kit
PTSVIBISOKIT
HEPA Inlet Filters
SCRINTRPNW25
Contacting Agilent
In the United States, you can contact Agilent Customer Service at 1-800-882-7426. See the back cover of this
manual for a listing of our sales and service offices.
Visit our web site at: http://www.chem.agilent.com/en-US/Products/Instruments/vacuum/pages/default.aspx.
20
TriScroll 300 Inverter Vacuum Pump
Req
uest for Return Health and
Safety Certification
Vacuum Products Division
Instructions for returning products
Dear Customer:
Please follow these instructions whenever one of our products needs to be returned.
1) Complete the attached Request for Return form and send it to Agilent Technologies (see below), taking particular care to identify
all products that have pumped or been exposed to any toxic or hazardous materials.
2) After evaluating the information, Agilent Technologies will provide you with a Return Authorization (RA) number via email or fax,
as requested.
Note: Depending on the type of return, a Purchase Order may be required at the time the Request for Return is submitted. We
will quote any necessary services (evaluation, repair, special cleaning, eg).
3) Important steps for the shipment of returning product:
x Remove all accessories from the core product (e.g. inlet screens, vent valves).
x Prior to shipment, drain any oils or other liquids, purge or flush all gasses, and wipe off any excess residue.
x If ordering an Advance Exchange product, please use the packaging from the Advance Exchange to return the defective
product.
x Seal the product in a plastic bag, and package product carefully to avoid damage in transit. You are responsible for loss or
This page intentionally left blank.
damage in transit.
x Agilent Technologies is not responsible for returning customer provided packaging or containers.
x Clearly label package with RA number. Using the shipping label provided will ensure the proper address and RA number
are on the package. Packages shipped to Agilent without a RA clearly written on the outside cannot be accepted and will
be returned.
4) Return only products for which the RA was issued.
5) Product being returned under a RA must be received within 15 business days.
6) Ship to the location specified on the printable label, which will be sent, along with the RA number, as soon as we have received
all of the required information. Customer is responsible for freight charges on returning product.
7) Return shipments must comply with all applicable Shipping Regulations (IATA, DOT, etc.) and carrier requirements.
RETURN THE COMPLETED REQUEST FOR RETURN FORM TO YOUR NEAREST LOCATION:
EUROPE:
Fax:
00 39 011 9979 330
Fax Free: 00 800 345 345 00
Toll Free: 00 800 234 234 00
vpt-customercare@agilent.com
NORTH AMERICA:
PACIFIC RIM:
Fax:
1 781 860 9252
Toll Free: 800 882 7426, Option 3
vpl-ra@agilent.com
please visit our website for individual
office information
http://www.DJLOHQW.com
Pg 1/3
TriScroll 300 Inverter Vacuum Pump
Vacuum Products Division
Request for Return Form
(Health and Safety Certification)
Please read important policy information on Page 3 that applies to all returns.
1) CUSTOMER INFORMATION
Company Name:
Contact Name:
Tel:
Email:
Fax:
Customer Ship To:
Customer Bill To:
Europe only: VAT reg. Number:
USA/Canada only:
2) PRODUCT IDENTIFICATION
Product Description
Agilent P/N
Agilent S/N
Taxable
Non-taxable
Original Purchasing Reference
3) TYPE OF RETURN (Choose one from each row and supply Purchase Order if requesting a billable service)
3A.
Non-Billable
3B.
Exchange
Billable
Repair
New PO # (hard copy must be submitted with this form):
Upgrade
Consignment/Demo
Calibration
Evaluation
Return for Credit
4) HEALTH and SAFETY CERTIFICATION This page intentionally left blank.
AGILENT TECHNOLOGIES CANNOT ACCEPT ANY PRODUCTS CONTAMINATED WITH BIOLOGICAL OR EXPLOSIVE HAZARDS,
RADIOACTIVE MATERIAL, OR MERCURY AT ITS FACILITY.
Call Agilent Technologies to discuss alternatives if this requirement presents a problem.
The equipment listed above (check one):
HAS NOT pumped or been exposed to any toxic or hazardous materials. OR
HAS pumped or been exposed to the following toxic or hazardous materials. If this box is checked, the following
information must also be filled out. Check boxes for all materials to which product(s) pumped or was exposed:
Toxic
Corrosive
Reactive
Flammable
Explosive
Biological
Radioactive
List all toxic/hazardous materials. Include product name, chemical name, and chemical symbol or formula:
________________________________________________________________________________________________________
NOTE: If a product is received at Agilent which is contaminated with a toxic or hazardous material that was not disclosed, the customer will be held responsible for all
costs incurred to ensure the safe handling of the product, and is liable for any harm or injury to Agilent employees as well as to any third party occurring as a result of
exposure to toxic or hazardous materials present in the product.
Print Name:
Authorized Signature: ……………………….
Date:
5) FAILURE INFORMATION:
Failure Mode (REQUIRED FIELD. See next page for suggestions of failure terms):
Detailed Description of Malfunction: (Please provide the error message)
Application (system and model):
I understand and agree to the terms of Section 6, Page 3/3.
Print Name:
Authorized Signature: ……………………….
Pg 2/3
Date:
TriScroll 300 Inverter Vacuum Pump
Vacuum Products Division
Request for Return Form
(Health and Safety Certification)
Please use these Failure Mode to describe the concern about the product on Page 2.
APPARENT DEFECT/MALFUNCTION
- Does not start
- Does not spin freely
- Does not reach full speed
- Mechanical Contact
- Cooling defective
- Bad feedthrough
TURBO PUMPS and TURBO CONTROLLERS
POSITION
PARAMETERS
Power:
- Noise
- Vertical
Current:
- Vibrations
-Horizontal
Temp 1:
-Leak
-Upside-down
-Overtemperature
-Other:
Temp 2:
-Clogging
………………….
OPERATING TIME:
ION PUMPS/CONTROLLERS
- Poor vacuum
- Main seal leak
Rotational Speed:
Inlet Pressure:
Foreline Pressure:
Purge flow:
VALVES/COMPONENTS
- Bellows leak
- Vacuum leak
- High voltage problem
- Solenoid failure
- Damaged flange
- Error code on display
- Other
- Damaged sealing area
-Other
- Cannot calibrate
LEAK DETECTORS
-No zero/high backround
INSTRUMENTS
- Gauge tube not working
- Display problem
- Vacuum system unstable
- Cannot reach test mode
- Communication failure
- Degas not working
- Failed to start
- Other
- Error code on display
- Other
SCROLL AND ROTARY VANE PUMPS
This
page
- Pump doesn’t start
- Noisy pump
(describe)
DIFFUSION PUMPS
intentionally
left blank.
- Heater failure
- Electrical problem
- Doesn’t reach vacuum
- Over temperature
- Doesn’t reach vacuum
- Cooling coil damage
- Pump seized
- Other
- Vacuum leak
- Other
Section 6) ADDITIONAL TERMS
Please read the terms and conditions below as they apply to all returns and are in addition to the Agilent
Technologies Vacuum Product Division – Products and Services Terms of Sale.
x
Customer is responsible for the freight charges for the returning product. Return shipments must comply with all
applicable Shipping Regulations (IATA, DOT, etc.) and carrier requirements.
x
Customers receiving an Advance Exchange product agree to return the defective, rebuildable part to Agilent Technologies
within 15 business days. Failure to do so, or returning a non-rebuildable part (crashed), will result in an invoice for the
non-returned/non-rebuildable part.
x
Returns for credit toward the purchase of new or refurbished Products are subject to prior Agilent approval and may incur
a restocking fee. Please reference the original purchase order number.
x
Units returned for evaluation will be evaluated, and a quote for repair will be issued. If you choose to have the unit
repaired, the cost of the evaluation will be deducted from the final repair pricing. A Purchase Order for the final repair price
should be issued within 3 weeks of quotation date. Units without a Purchase Order for repair will be returned to the
customer, and the evaluation fee will be invoiced.
x
A Special Cleaning fee will apply to all exposed products per Section 4 of this document.
x
If requesting a calibration service, units must be functionally capable of being calibrated.
Pg 3/3
TriScroll 300 Inverter Vacuum Pump
This page intentionally left blank.
Agilent Technologies
Vacuum Product Division
United States & Canada
Agilent Technologies
Vacuum Products Division
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Toll-Free: 080 222 2452
Fax: +82 2 3452 2451
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Tel.: +44 (0) 1865 291570
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Fax: +33 (0) 1 69 86 29 88
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Vacuum Products Division
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H/P: +601 2213 1253
Fax: +603 6733 8121
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