Data sheet capaNCDT 6200 - Micro

More Precision
capaNCDT // Capacitive displacement sensors and systems
Modular multi-channel measuring system
capaNCDT 6200
-M
odular, expandable for up to 4 channels
- Ethernet / EtherCAT interface
- Easy configuration using the web browser
-R
esolution up to 0.0005% FSO
- Bandwidth: up to 20kHz
- Digital data rate: 4 x 3.9kSa/s
- Trigger feature
-M
ath functions included (e.g thickness,
differential measurement)
- Synchronous operation supported
System structure
The new capaNCDT 6200 is an innovative measuring system that offers excellent performance at
a very attractive price. Its modular design ensures that you can easily combine up to 4 channels.
The measuring system includes a control unit and a demodulator for each sensor. Its Ethernet
interface supports fast and easy configuration through a web browser. The modulator DL6230 is
available for high resolution measurements. The capaNCDT 6222 is used for high speed measurements up to 20kHz.
The compact controller can be used as benchtop unit, it can be mounted to the wall or on a
tophat rail. The capaNCDT 6200 is compatible with all Micro-Epsilon sensors.
Web interface
The controller is configured by the Ethernet which calls
the web interface. Up to 8 channels can be visualised and
combined arithmetically.
Accessories:
ƒƒsignal output cable
ƒƒpower supply cable
ƒƒDIN rail brackets
ƒƒmounting plates for wall mounting
Trigger
Power supply
12...36 V
Signal conditioning
· Demodulation
· Analog filter adjustable
· Zero point adjustable
· A/D converter
Signal conditioning
· Demodulation
· Analog filter adjustable
· Zero point adjustable
· A/D converter
Power/
internal bus
Oscillator
Sync out
Clock/Sync
(only DT6230)
DT62xx
DL62xx
DL62xx
Sensor
Current
4...20mA
Voltage
0...10V
Sensor
Preamplifier
Voltage
conditioning
Sync in
(only DT6230)
Current
4...20mA
EtherCAT
Microcontroller
Interface
Voltage
0...10V
Block diagram
(only DT6230)
A measuring system consists of:
ƒƒcontrol unit DT62xx
ƒƒdemodulator DL62xx
ƒƒsensor
ƒƒsensor cable
ƒƒpower supply cable
ƒƒEthernet cable EtherCAT cable
ƒƒsignal output cable
Ethernet
14
Preamplifier
15
Controller type DT62x0
Demodulator DL6220
Demodulator DL6230
Resolution static
0.004% FSO
0.0005% FSO
Resolution dynamic
0.02% FSO (5kHz)
0.005% FSO (5kHz)
Bandwidth
5kHz (-3dB)
5kHz (-3dB)
Bandwidth adjustable
5kHz, 20Hz
5kHz, 20Hz
Bandwidth digital output
max. 3.906kSa/s
max. 3.906kSa/s
Linearity (typ.)
≤0.05% FSO
≤0.025% FSO
Max. sensitivity deviation
≤0.1% FSO
≤0.1% FSO
Long term stability
≤0.02% FSO / month
≤0.02% FSO / month
Synchronous operation supported
DT6220 yes (within 4 channel DT6220)
yes (within 4 channel DT6220)
DT6230 yes
yes
Insulator measurement
Temperature stability
Temperature range (operation)
Temperature range (storage)
Supply
no
no
200ppm/°C
200ppm/°C
Sensor
-50 ... + 200°C
-50 ... + 200°C
Controller
+10 … +60°C
+10 … +60°C
-10 … +75°C
-10 … +75°C
DT6220 24VDC (12…36VDC)
24VDC (15…36VDC)
DT6230 24VDC (15…36VDC)
24VDC (15…36VDC)
per DL62x0 1.8W (typ.); 2.0W (max.)
Power consumption
Analog output
Digital interface
1.9W (typ.); 2.2W (max.)
DT6220 3.1W (typ.)
3.1W (typ.)
DT6230 3.8W (typ.)
3.8W (typ.)
0 … 10V (short circuit proof)
0 … 10V (short circuit proof)
4…20mA (load max. 500Ω)
4…20mA (load max. 500Ω)
DT6220 Ethernet
Ethernet
DT6230 Ethernet + EtherCAT
Ethernet + EtherCAT
Sensors
all sensors
all sensors
Sensor cable standard
CC cable ≤ 1m
CCm cable = 1.4m
CCg cable = 2m
CC cable ≤ 1m
CCm cable = 1.4m
CCg cable = 2m
Sensor cable (matched)
double / triple standard cable length
double / triple standard cable length
Trigger
TTL, 5V
TTL, 5V
Number of channels
max. 4
max. 4
FSO = Full Scale Output
Modular multi-channel measuring system
capaNCDT 6200
Controller type DT6222
Demodulator DL6222
Demodulator DL6222/ECL2
Resolution static
0.004% FSO
0.004% FSO
Resolution dynamic
0.05% FSO (20kHz)
0.1% FSO (20kHz)
Bandwidth
20kHz (-3dB)
20kHz (-3dB)
Bandwidth adjustable
20kHz, 20Hz
20kHz, 20Hz
Bandwidth digital output
max. 3.906kSa/s
max. 3.906kSa/s
Linearity (typ.)
≤ 0.1% FSO
≤ 0.2% FSO
Max. sensitivity deviation
≤ 0.1% FSO
≤ 0.1% FSO
Long term stability
≤ 0.02% FSO / month
≤ 0.02% FSO / month
Synchronous operation supported (multiple controllers)
no
no
Insulator measurement
no
no
Temperature stability
200ppm/°C
Temperature range (operation)
200ppm/°C
Sensor -20 ... +200°C
-20 ... +200°C
Controller +10 ... +60°C
+10 ... +60°C
Temperature range (storage)
Supply
-10 … +75°C
-10 … +75°C
24VDC (12…36VDC)
24VDC (12…36VDC)
DT6222 2.8W (typ.)
Power consumption
2.8W (typ.)
per DL6222 1.2W (typ.); 1.4W (max.)
Analog output
1.2W (typ.); 1.4W (max.)
0 … 10V (short circuit proof)
0 … 10V (short circuit proof)
4…20mA (load max. 500Ω)
4…20mA (load max. 500Ω)
Digital interface
Ethernet
Ethernet
Sensors
all sensors
all sensors
Sensor cable standard
CCm1,4x; CCg2,0x
CCm2,8x; CCg4,0x
Sensor cable (matched)
≤ 2.8m (with CCmxx) ≤ 4.0m (with CCgxx)
≤ 2.8m (with CCmxx) ≤ 4.0m (with CCgxx)
Trigger
TTL, 5V
TTL, 5V
Number of channels
max. 4
max. 4
FSO = Full Scale Output
Controller
DT62xx
34
8
Demodulator
DL62xx
DL62xx
DL62xx
DL62xx
25
0.5
0.5
8
8
90
52.3
41.5
8.35
22.5
22.5
0
12.5
0
0
0
3.6
10.5
16
8
125
17
Options
Suitable for articles
2303018
DL6220
2303022
DL6220/ECL2
2303023
DL6220/ECL3
2303029
DL6220/LC
Article number
Description
Explanation
2982044
LC DL62x0 digital
special calibration of linearity
on digital output
○
○
○
•
2982045
LC DL62x0 analog
○
○
○
•
2982046
ECL2 DL6220
-
•
-
•
2982047
ECL3 DL6220
-
-
•
•
2982048
EMR2 DL6220
○
○
○
•
2982049
RMR1/2 DL6220
special calibration of linearity
on analog output
special tuning for double
standard cable length
(CC =2m / CCm =2.8m / CCg =4m)
special tuning for triple
standard cable length
(CC =3 m / CCm =4,2 m / CCg =6 m)
extended measuring range (factor: 2)
contains LC DL62x0 digital and
LC DL62x0 analog
reduced measuring range (factor: 1/2)
contains LC DL62x0 digital and
LC DL62x0 analog
○
○
○
•
Suitable for articles
2303019
DL6230
2303024
DL6230/ECL2
2303025
DL6230/ECL3
2303030
DL6230/LC
Article number
Description
Explanation
2982044
LC DL62x0 digital
special calibration of linearity
on digital output
○
○
○
•
2982045
LC DL62x0 analog
○
○
○
•
2982054
ECL2 DL6230
-
•
-
•
2982055
ECL3 DL6230
-
-
•
•
2982051
EMR2 DL6230
○
○
○
•
2982052
EMR3 DL6230
○
○
○
•
2982053
RMR1/2 DL6230
special calibration of linearity
on analog output
special tuning for double
standard cable length
(CC =2m / CCm =2.8m / CCg =4m)
special tuning for triple
standard cable length
(CC =3m / CCm =4.2m / CCg =6m)
extended measuring range (factor: 2)
contains LC DL62x0 digital and
LC DL62x0 analog
extended measuring range (factor: 3)
contains LC DL62x0 digital and
LC DL62x0 analog
reduced measuring range (factor: 1/2)
contains LC DL62x0 digital and
LC DL62x0 analog
○
○
○
•
Suitable for articles
2303035
DL6222
2303036
DL6222/ECL2
2303038
DL6222/LC
Article number
Description
Explanation
2982045
LC DL62x0 analog
special calibration of linearity
on analog output
○
○
•
2982059
ECL2 DL6222
special tuning for double
standard cable length
-
•
•
2982061
EMR2 DL6222
extended measuring range (factor: 2)
○
○
•
2982062
RMR1/2 DL6222
reduced measuring range (factor: 1/2)
○
○
•
• Articles already contain the option
○ Option available
- No option available
Accessories
Cable CCmx,x / CCmx,x/90
Cable CCgx,x / CCgx,x/90
Low-outgassing cable up to 4m length,
for applications in clean rooms
Low-outgassing cable up to 4.2m length, for
applications in clean rooms, UHV and EUV
Robust cable up to 8m length,
for industrial applications
-100°C to +200°C
-20°C to +80°C (permanent)
-20°C to +100°C (10,000 h)
Temperature -100°C to +200°C
stability
Sensor cable with connector type C
Outer diameter 3.1mm ±0.1mm
Connector type C/90
Ø5.4
Ø6
Cable with connector type B
for sensors CS1 / CS1HP / CS2 / CSE2 / CS3 / CS5 / CS10
8
Cable with connector type C
27
for sensors CS005 / CS028.6/ CS05 / CSE05 / CS08 / CSE1
Version
3.1mm ±0.1mm
3x cable diameter during installation; 7x cable diameter for movement; 12x cable diameter recommend at continous movement
Ø7
Ø9.5
Bending radius
2.1mm ±0.1mm
Standard length 1m
37
13.7
1 x straight / 1 x 90° connector
CCgx,xC 17.5 CCx,xC/90 CCmx,xC/90 CCgx,xC/90
2 x straight connector
±0.1 (CC/ CCg)
Type Ø3.1CCx,xC
CCmx,xC
Ø2.1 ±0.1 (CCm )
Standard 1m
•
•
•
•
1.4m
•
2m
•
•
8m
•
•
•
•
•
•
•
•
•
•
•
•
6m
CCgx,xB/90
•
•
•
•
CCmx,xB/90
•
•
•
•
4.2m
•
•
•
4m
•
1 x straight / 1 x 90° connector
CCx,xB/90
•
•
•
3m
16
2 x straight connector
Ø5,4
CCmx,xB
CCgx,xB
Ø6
•
•
2.8m
•
CCx,xB
16,9
Description
Cable CCx,x / CCx,x/90
13,1
Sensor cable
capaNCDT
Ø4
20
•
•
•
•
•
•
•
Connector type C/90
Sensor cable with connector type C
Ø4
8.6
16,9
8
27
37
13,1
Ø7
Ø9.5
Ø6
Ø5.4
Standard length 1m
13.7
17.5
Ø3.1 ±0.1 (CC/ CCg)
Ø2.1 ±0.1 (CCm )
16
Sensor cable with connector type B
Ø5,4
Ø6
Connector type B/90
Standard length 1m
27
30.5
20.5
Ø7
27
37
Ø9.5
Ø7
Ø9.5
25
37
Ø3.1 ±0.1 (CC/ CCg)
Ø2.1 ±0.1 (CCm )
Ø7
Ø10
Accessories
capaNCDT
MC2.5 Micrometer for sensor calibration, range 0 - 2.5mm, Resolution 0.1µm. Suitable for sensors CS005 to CS2
MC25D Digital micrometer for sensor calibration, range 0 - 25mm, adjustable offset (zero). Suitable for all sensors.
HV/B Vacuum feed through triaxial
UHV/B Vacuum feed through triaxial for ultra-high vacuum
6110
6200
6500
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
PC6200-3/4 Power-/trigger cable, 4 pin, 3m
SCAC3/4 Signal
output
cable,
multi
Sensor
cable
with(necessary
connectorfor
type
B channel applications), 4 pin, 3m Connector type B/90
•
1m3m
SCAC3/5 Signal output cable, Standard
analog,length
5 pin,
Ø7
Ø9.5
Ø7
Ø9.5
CA5 Preamplifier cable 5 pin, 5m
20.5
25
SC6000-1,0 Synchronization cable, 5 pin, 1m
37
Ø3.1 ±0.1 (CC/ CCg)
Ø2.1 ±0.1 (CCm )
27
37
30.5
PS2020 Power supply
for DIN rail mounting; Input 230VAC (115VAC); Output 24VDC / 2.5 A; L/W/H 120x120x40mm
27
•
•
21
UHV/B Vacuum feed triax weldable (Art.-no. 0323346)
HV/B Vacuum feed through (Art.-no. 0323050)
25
2
1.75
25
25
ø9.4
ø9.4
ø9.4
ø13.50h6
25
1.75
Weld seam
M9x0.5 M9x0.5
UHV/B Vacuum feed triax screwable (Art.-no. 0323370)
Weld seam
M9x0.5 M9x0.5
WS11
1.75
Max. leak rate 1x10e-9 mbar · l s-1, compatible withWS11
connector type B
ø13.50h6
ø9.4
ø34 (flange
ø34
standard
(flange CF16)
standard CF16)
6
25
-1
-9
Max. leak rate
1x10e
mbar
· l s-1, compatible
with connector
type B
UHV/B Vacuum
feed
triax
screwable
(Art.-no.
0323370)
UHV/B Vacuum
13.5 feed triax with flange CF16 (Art.-no. 0323349)
13.5
WS11
Max. leak rate 1x10e mbar · l s , compatible with connector type B
ø13.50h6
WS11
-9
-1
Max. leak rate
1x10e-7 feed
mbar · triax
l s-1, compatible
with connector
type B
UHV/B
Vacuum
with flange
CF16 (Art.-no.
0323349)
6
ø9.4
ø9.4
ø13.50h6
Max. leak rate 1x10e mbar · l s , compatible with connector type B
max. 17
-7
25
1.75
9
2
UHV/B Vacuum feed triax weldable (Art.-no. 0323346)
9
max. 17
Ø14
Ø8.8
Ø8.8
34
M10x0.75
Ø14
WS12
WS12
M10x0.75
HV/B Vacuum
feed through (Art.-no. 0323050)
M9x0.5 M9x0.5
34
Max. leak rate 1x10e-9 mbar · l s-1, compatible with connector type B
Max. leak rate 1x10e-9 mbar · l s-1, compatible with connector type B
Max. leak rate 1x10e-9 mbar · l s-1, compatible with connector type B
SCA3/5 Signal output cable (Art.-no. 2902112)
SCA3/4 Signal output cable (Art.-no. 2902104)
Cable length ±1%
approx. 35.6
Ø8.9
Ø7
approx. 35.6
100
43.5
Cable length ±1%
100
CA5 Preamplifier cable (Art.-no. 2903180)
SC6000-1,0 Synchronization cable (Art.-no. 2903473)
Cable length ±1%
Cable length ±1%
11
CA5 Preamplifier cable (Art.-no. 2903180)
Cable length ±1%
10
Ø7
approx. 35.6
10
approx. 35.6
Ø8.9
Ø7
Ø7
Ø8.9
approx. 35.6
CA5 Preamplifier cable (Art.-no. 2903180)
approx. 35.6
Cable length ±1%
10
approx. 35.6
Ø7
Ø4.9 ±0.25 Ø4.9 ±0.25 Ø4.9 ±0.25
Ø7
Ø8.9
SC6000-1,0 Synchronization cable (Art.-no. 2903473)
Cable length ±1%
10
Ø8.9
Ø7
Ø8.9
Cable length ±1%
10
Ø4.3 ±0.25 Ø4.3 ±0.25
43.5
100
43.5
SC6000-1,0 Synchronization
cable (Art.-no. 2903473)
Ø8.9
150
10
approx. 35.6
Ø4.3 ±0.25
Ø5.5 ±0.3 Ø5.5 ±0.3
11
150
Cable length ±1%
Cable length ±1%
Ø5.5 ±0.3
Ø11.5
Ø9
Ø9
Ø11.5
approx. 35.6
10
PC6200-3/4 Power-/trigger cable (Art.-no. 2901881)
11
Ø9
10
Cable length ±1%
PC6200-3/4 Power-/trigger cable (Art.-no. 2901881)
Ø11.5
approx. 35.6
Ø4.3 ±0.25 Ø4.3 ±0.25 Ø4.3 ±0.25
Ø4.3 ±0.25
PC6200-3/4 Power-/trigger cable (Art.-no. 2901881)
10
10
50
150
Cable length ±1%
SCA3/5 Signal output cable (Art.-no. 2902112)
Ø8.9
Ø7
Ø4.3 ±0.25
approx. 35.6
Cable length ±1%
Ø4.3 ±0.25
Ø7
approx. 35.6
50
SCA3/5 Signal output cable (Art.-no. 2902112)
Ø8.9
Ø7
Ø7
10
10
Ø8.9
Cable length ±1%
50
Cable length ±1%
SCA3/4 Signal output cable (Art.-no. 2902104)
Ø7
Ø8.9
Ø8.9
SCA3/4 Signal output cable (Art.-no. 2902104)
Modifications reserved / Y9766319-G031117GKE
High performance sensors made by Micro-Epsilon
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and position
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non-contact temperature measurement
2D/3D profile sensors (laser scanner)
Optical micrometers, fibre
optic sensors and fibre optics
Color recognition sensors, LED analyzers
and color online spectrometer
Measurement and inspection systems
MICRO-EPSILON USA
8120 Brownleigh Dr. · Raleigh, NC 27617 / USA
Phone +1/919/787-9707 · Fax +1/919/787-9706
me-usa@micro-epsilon.com · www.micro-epsilon.com
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