Measuring Microscopes MF / MF-U

Optical Measuring
Measuring Microscopes
MF/MF-U Series
Catalog No. E14003(4)
MF
Series
Standard Measuring Microscopes
*Motor-Driven Z-axis
MF-U
Series
Universal Measuring Microscopes
*Motor-Driven Z-axis
2
Lineup
Manual MF-A/B Models
Motor-Driven Z-axis MF-J Models
Motor-Driven X/Y/Z-axes MF-G Models
Manual MF-UA/UB/UC/UD Models
Motor-Driven Z-axis MF-UJ/UK Models
Motor-Driven X/Y/Z-axes
MF-UE/UF/UG/UH Models
3
Attainment of Reduction in Measurement Time
Z-axis Motor Drive & Vision Unit
Simple Focus Adjustment
Ultra-high Speed AF Function
The ultra-high speed AF function has been installed
to allow focusing on a surface to be measured at a
speed of about one second.
Freedom from burdensome focus adjustment even
on a workpiece with many asperities allows the
operator to perform stress-free measurement,
drastically reducing operator's fatigue.
Application example: Cumulative total time of 3mm stepheight measurement 10 times
90 seconds
Manual
50 seconds
Z-axis motor drive
45%
reduction
50秒
* The amount of time saved is dependent on the particular workpiece and therefore this
result is offered as an example but does not guarantee performance in all cases.
Simplified Measurement
One-click Tool
The concurrent use of the vision unit as a vision
measurement system allows simplified measurement
of an edge by merely one click. Moreover, since
many data points can be obtained at a time with just
one click, this will drastically speed up measurement
and reduce data spread compared with the
conventional method of "measuring data points one
by one with cross hairs".
One-click circle tool
One-click box tool
* Vision unit: Option
Easy Positioning
Quick Release Function
FREE
This series is equipped with a manual stage
that provides intuitive positioning and has
a quick release function that enables rapid
movement between measuring points that are
a large distance apart.
LOCK
Rapid p
osition
4
ing is e
asily se
lected
Quick release
wheel
Amazing Speed-up
5
Feature
Excellent Observability and Operability
Ultra-wide View Field and High Magnification Observation
Field Number: 24
Lineup of a Wide Range of Objectives
This measuring microscope series has achieved an industryleading wide field of view of ø24mm (when using 1x
objective).
The objectives available provide a choice of ultralow magnification, for excellent flare suppression, to
high magnification that approaches the resolution
limit possible with optical wavelengths, allowing the
customer to select an optimal magnification depending
on the intended use.
A Camera Port on All Models
All models are equipped with a C-mount port as
standard to which a compatible camera is attachable.
The port allows a vision measurement system or an
observation-specific digital camera to be mounted.
Intuitive Operation
Quick Release Mechanism
The manual stage provides intuitive positioning and can
be easily moved rapidly between measuring positions
on a workpiece by using the quick release function on
each axis. Just free a Quick Release Wheel and move the
stage by pushing and pulling. Lock the wheel to continue
measurement with fine feed. Very effective for traversing
between widely separated positions.
Vision Unit
The vision unit allows anyone to perform simplified
measurement of an edge with just one click.
Also, using the vision unit eliminates the need for
burdensome parallel alignment of a workpiece and data
point detection with cross hairs, thus allowing quick
inspection of dimensions.
6
FREE
Rapid p
osition
ing is e
LOCK
asily se
lected
Quick Release
Wheel
High-accuracy Measurement and Reliability
Best-in-Class Accuracy
As of April, 2016
Example
X/Y Axis: (2.2+0.02L) μm
All models have achieved best-in-class accuracy
performance. Since the accuracy of the whole system is
ensured by conformity to the inspection method of JIS B
7153, any model enables high-accuracy measurement.
Any measuring microscope that achieves this accuracy
performance (close to JIS Class 0) will be a great asset to
the customer's quality control improvement program.
Measuring
Error
Reference) Measuring accuracy of
each axis of a JIS B 7153 measuring
microscope (at 20°C)
Grade 0: (2+0.01L)μm or less
Grade 1: (4+0.02L)μm or less
L: measured length (mm)
0
m
220m
Grade 1 error limits
Typical X-axis performance
Measuring range
Extraordinary Reliability
30
0m
220mm
Precisely because measuring microscopes in this series are
widely used in widely different industries, Mitutoyo offers
a choice of stage size from 100x100mm to maximum-inclass 400x200mm. The customer can choose the optimal
size for the application with accuracy performance
guaranteed.
m
A Wide Choice of Stage Size
Y axis
200mm
300mm
X axis 400mm
~ Traceability to National Standards ~
Use of Master Gages Traceable to National Standards
Measurement results obtained from these microscopes are traceable to
national standards to guarantee compliance with quality control systems.
This is achieved through ensuring that all Mitutoyo master calibration
gages and facilities are themselves traceable to national standards.
National standard
Secondary standard
Working standard
Working standard
National Metrology Institute of Japan, National Institute of
Advanced Industrial Science and Technology
(NMIJ/AIST)
The atomic clock synchronized to UTC and the optical frequency comb
Mitutoyo Utsunomiya Measurement Standards Calibration Center
(JCSS accredited calibration laboratory No. 0031)
Iodine stabilized He-Ne laser for length purposes with 633nm wavelength
Mitutoyo Utsunomiya Measurement Standards Calibration Center
Stabilized He-Ne laser for length purposes with 633nm wavelength, for actual use
Optical interferometer
Standard and reference scales
Measuring microscopes
7
Feature
MF Series
– User-friendly Standard Model –
Reduction in Magnification Error due to Variation in Point of Focus
Telecentric Optical System
In order not to change the observing magnification even at low
magnification (10x or less) where the objective's precise working
distance is difficult to accurately reproduce because of a wide
focal depth, this series has adopted the telecentric optical system
that reduces the magnification error due to slight variation in
working distance.
Also, the MF series objectives are manufactured with a more
accurate magnification due to Mitutoyo's unique specification
that surpasses JIS Standards. This optimizes comparative
measurement with a reticle.
Safe Operation
Ultra-long Working Distance
An ultra-long working distance is ensured in the entire
lineup of a wide variety of objectives between 1x and
100x. This practically eliminates any risk of collision with
a workpiece even when surface asperities are present.
Easy Change of Magnification
Sliding Nosepiece
The MF series usually allows only a single objective to be
mounted which needs to be replaced for every magnification
change. The sliding nosepiece allows up to two objectives to
be mounted.
In the case of measurement that needs frequent magnification
change, this nosepiece design drastically improves workability.
(Refer to page 20 for details)
8
Working distance
61.0mm
77.0mm
61.0mm
51.0mm
長作動距離
20.0mm
13.0mm
6.0mm
Objective
ML1x
ML3x
ML5x
ML10x
ML20x
ML50x
ML100x
Manual (2- or 3-axis)
Motor Drive
Z-axis Motor Drive
Camera
Counter
Port
Camera
Counter
Port
Zerosetting
Quick
Release
Zerosetting
Quick
Release
FS
Objective
Tilting
FS
Objective
Tilting
XY
Motor
Z-axis
Motor
XY
Motor
Z-axis
Motor
Vision
AF
Remote
Vision
AF
Remote
LAF
Power
Turret
LAF
Power
Turret
Camera Counter
Port
Zerosetting
Quick
Release
FS
Objective
Tilting
XY
Motor
Z-axis
Motor
Vision
AF
Remote
LAF
Power
Turret
Low-profile digital display possible to install
Camera Camera port for mounting a digital camera
Port (standard equipment on all models)
Counter on the left or right side and adjust tilt angle to
Zero- Handy zero-set switch that minimizes the
setting operator's hand motion
Quick
stage positioning
Release
Possible to mount an objective that enables
FS
Objective various observation methods.
(Only for the MF-U series)
Tilting to suit to the operator's physique
XY
Motor-driven stage retains high accuracy
Motor
Z-axis
Z-axis motor drive for fast Z-axis focusing
Motor
suit the operator
Quick-release mechanism that allows rapid
(Only for manual XY stage models)
Tilting optical tube that can adjust the eyepoint
(Standard-equipped in the MF-U series)
Vision auto focus function that speeds up
Vision measurement by reducing the operator's
AF
focusing error
LAF
Laser auto focus function enables excellent
trackability
Remote
Remote control box that enables handy
operation
Motor-powered turret enables faster operation
Power when several objectives are required for
Turret
measurement
Key
Standard-equipped function
Not supported
9
Feature
MF-U Series
– Universal Model Dealing with Diverse Observation Methods –
Clear Observation Image
Detection of Microscopic Flaws and Asperities
Apochromat Lenses
Diverse Observation Methods
This series provides a clear observation image with excellent
color quality, ultra-long working distance for high operability
and apochromatic design that eliminates chromatic aberration.
A choice of observation method such as dark-field observation,
simple polarized observation and differential interference
observation in addition to bright-field observation of magnified
images are selectable depending on the intended use.
Ordinary observation (bright-field)
Differential interference : Allows observation of microscopic asperities hard to detect with
ordinary bright-field observation.
Ordinary observation (bright-field)
Dark-field: Allows highlighted observation of microscopic abnormalities such as flaws and contamination
by using diffused light.
Polarization Unit
Used when performing simple
polarized observation.
It is also recommended to use this unit
for increasing image contrast during
use of a low-magnification lens.
10
Differential Interference Unit
Used when performing differential
interference observation.
This unit is used in combination with
the polarization unit.
Manual (2- or 3-axis)
Motor Drive
Z-axis Motor Drive
Camera
Counter
Port
Camera
Counter
Port
Zerosetting
Quick
Release
Zerosetting
Quick
Release
FS
Objective
Tilting
FS
Objective
Tilting
XY
Motor
Z-axis
Motor
XY
Motor
Z-axis
Motor
Vision
AF
Remote
Vision
AF
Remote
LAF
Power
Turret
LAF
Power
Turret
Camera Counter
Port
Zerosetting
Quick
Release
FS
Objective
Tilting
XY
Motor
Z-axis
Motor
Vision
AF
Remote
LAF
Power
Turret
Low-profile digital display possible to install
Camera Camera port for mounting a digital camera
Port (standard equipment on all models)
Counter on the left or right side and adjust tilt angle
Zero- Handy zero-set switch that minimizes the
setting operator's hand motion
Quick
stage positioning
Release
Possible to mount an objective that enables
FS
various observation methods.
Objective
(Only for the MF-U series)
Tilting suit the operator's physique
XY
Motor-driven stage retains high accuracy
Motor
Z-axis
Z-axis motor drive for fast Z-axis focusing
Motor
to suit the operator
Quick-release mechanism that allows rapid
(Only for manual XY stage models)
Tilting optical tube that can adjust the eyepoint to
(Standard-equipped in the MF-U series)
Vision auto focus function that speeds up
Vision measurement by reducing the operator's
AF
focusing error
LAF
Laser auto focus function enables excellent
trackability
Remote
Remote control box that enables handy
operation
Motor-powered turret enables faster operation
Power when several objectives are required for
Turret
measurement
View of icons
Standard-equipped function
Not supported
Selectable as an option
11
Optional
Accessories
Camera/Images
Vision Unit
System example
Reduction of Variation / Improvement in Efficiency
The vision unit allows anyone to perform simplified measurement of an edge with just one click.
Also, using the vision unit eliminates the need for burdensome workpiece orientating and data point detection with cross hairs, thus allowing
quick inspection of dimensions.
About
90% reduction in variation
About
Unit: µm
Unit: µm
12
10
70% reduction in average measurement time
120
10µm
8
80
6
60
4
30 seconds
40
1µm
2
105 seconds
100
20
0
0
Measuring
microscope only
Measuring microscope
& vision unit
Measuring
microscope only
Measuring microscope
& vision unit
Measurement results and measurement times when measuring a width of about 20mm thrice (continuous reciprocation)
Measurement with the measuring microscope only
Max. value (mm)
Min. value (mm)
Variation (mm)
Measurement time (sec)
Operator A
20.0863
20.0846
0.0098
76
Operator B
20.0849
20.0842
0.0047
150
Operator C
20.0811
20.0837
0.0053
89
Max. value (mm)
Min. value (mm)
Variation (mm)
Measurement time (sec)
20.0863
20.0837
0.0105
105
Operator B
20.0811
20.0837
−0.0026
25
Max. value (mm)
Min. value (mm)
Variation (mm)
Measurement time (sec)
20.0849
20.0837
0.0012
28
平均測定時間も約30%に短縮
(105秒→30秒弱に)
Measurement with the measuring microscope & vision unit
Max. value (mm)
Min. value (mm)
Variation (mm)
Measurement time (sec)
Operator A
20.0847
20.0846
0.0001
36
単位:µm
Operator B
20.0849
20.0842
0.0007
23
単位:µm
12
120
10
Simplified Report/Storage Function
100
8
80
6
This series has the functions to perform tolerance verification
of measurement/calculation results, various statistical processing for 60each item and image
バラつきを約11.4%まで減少
load/storage, enabling storage of measurement results and
4 images at measured points.
(10µm→1µm台に)
40
Since measurement results can also be outputted in the CSV
format, this allows smooth creation of inspection table.
2
平
(
20
0
12
測定顕微鏡
のみ
測定顕微鏡
&画像ユニット
0
測定顕微鏡
のみ
測
&
Optional
Accessories
Camera/Images
Vision Unit
Dedicated Software - QSPAK Simple/Universal Mode Switching (EZ/PRO)
In the EZ mode for Simple & Operation guidance display, this software allows even a beginner to perform measurement without any confusion using the
easy-to-understand measurement icons and guidance function. Also, it supports the needs of more advanced measurement by the ability to switch to
the PRO mode where the full functions of QSPAK are supported.
EZ mode (Simple measurement mode)
PRO mode (Universal measurement mode)
Simple Edit of Measurement Program (Smart Editor)
This function simply enables program correction/edit by only selecting an item you want to edit from among existing programs.
Editing light conditions with the dialog box
Editing the nominal value/tolerance with the dialog box
Editing a circle tool on the video window
Edge Detection Functions
Outlier Removal Function···················Removes outliers such as burrs and chips.
Dual-area Contrast Tool·······················Automatically adjusts the light intensity of two areas to the optimum.
Auto Trace Tool·····································Automatically detects contour data while predicting the next one.
To perform contour analysis and contour tolerancing, use 2-dimensional analysis software (FORMTRACEPAK-AP).
13
Optional
Accessories
Camera/Images
Vision Unit
Dedicated Software - QSPAK -
System example
Simplified Multi-point Measurement (One-click Tool)
A mere click on an edge allows correct measurement, avoiding the
variation inherent in conventional multi-point measurement.
The function to remove outliers such as burrs and chips can be used
concurrently.
One-click circle tool
One-click box tool
Graphics Function
This function automatically displays the current position, coordinate
system, measurement feature and measurement result on the graphics
window to prevent an omission or error of measurement from occurring.
It also enables you to grasp which portion of the whole workpiece is
observed by importing 2-dimensional CAD data*.
* Optional software (For details refer to Page 15.)
Navigation Function (Quick Navigation)
Once a measurement program is created, anyone can measure a
workpiece just as well as skilled personnel by merely following the
navigation instructions at the next measuring point.
(1) The next measuring point is
indicated with red cross hairs.
14
(2) Approaching the measuring point,
the red cross hairs and green cross
hairs come close to each other.
(3) When both cross hairs overlap one
another while indicating the target
point, press the Input button to
complete the measurement.
Optional
Accessories
Camera/Images
Optional Software
2-dimensional Analysis Software - FORMTRACEPAK-AP FORMTRACEPAK-AP allows contour analysis and comparative verification with the nominal value, making use of the point group data acquired with the
auto trace tool.
Form analysis can be performed seamlessly from measured
images with simple operations.
Contour tolerancing against the nominal value is also enabled.
For example, the software allows over-pin diameter measurement
by defining virtual circles with a given diameter around a gear.
Example of gear contour matching, and an over-pin diameter analysis
Example of form analysis
Effective use of CAD model - QS-CAD I/F -
Early detection of process irregularities - MeasurLink -
2-D CAD model data (DXF-, or IGES-formatted) can be imported into
QIPAK. Conversely, QIPAK measurement results can be converted into
2-D CAD model data. The design value for each measurement item is
automatically entered. Since the graphics window makes the present
location easy to identify, the operator can quickly move the stage a given
point in the 2D CAD model.
Statistical data can be displayed in real-time, making early detection of
process irregularities possible. Early identification of an out-of-control
situation enables rapid remedial action to be taken when necessary.
Examples of remedial action
• Mold repair or cycle-timing change
• Cutting tool adjustment or replacement.
Current position
15
Optional
Accessories
Camera/Images
System example
Specifications
Vision Unit 10D
Order No.
Magnification of optical system
Image detection
Resolution
Measuring accuracy for each axis
(in a 20°C environment)
Accuracy (in a 20°C environment)
PC system*
Software*
Applicable model
359-763
0.5X: when a microscope is attached (0.5X: when using a TV adapter)
High sensitivity 1/2-inch CMOS color camera with 300 million pixels
0.1μm
Depends on measuring microscope
Depends on measuring microscope
Reference: when using a 3X ML objective (performing an inspection using our standard sample)
Screen-internal measuring accuracy: ±2.5μm or less
Screen-internal repeatability (2s): ±1μm or less
Windows 7
QSPAK Vision Unit
MF D / MF-U D
* Software (QSPAK) and calculation processor are required separately.
Calibration Chart
Calibration Chart
This chart is used for pixel-size correction of the CCD, and autofocus accuracy and optical-axis offset corrections for each selected
magnification.
* The function may be limited depending on the lens.
For detailed information, contact a Mitutoyo sales office.
Order No. 02ATN695
Others
C-mount Adapter
0.5x TV Adapter (including C-mount Adapter)
This adapter is used to mount a C-mount compatible
digital camera on the microscope main unit.
This adapter is used to mount a C-mount compatible digital
CCD camera on the microscope main unit, thereby making
an observation area on the monitor close to the real field of
view through the objective.
Order No. 970441
16
Order No. 375-054
Optional
Accessories
Camera/Images
Calculation processing
Data Processing Applications
2-dimesinal Data Processing Unit
QM-Data200
Foot Switch
264-155
QM-Data200 allows various data processing
operations and creation of measurement
programs without needing any other data
processing unit.
Resolution: 0.1µm
Program function: Creation, execution and editing of
measurement procedures
Statistical processing: Measurement items, number of data, maximum
value, minimum value, mean value, standard
deviation, range, histogram and statistics by
measurement function (statistics by command)
TFTLCD (with LED backlight)
Display: Tilting mechanism: Installed
Order No.: 12AAJ088
Application:Foot switch for data transfer
A measurement result can be
transferred to the data processing
unit by stepping on the switch
while holding the feed wheels.
Order No.:
Application:
Thermal printer
DPU-414
Manufactured by SII
Specifications
Thermal Printer DPU-414
Connected to QM-Data 200 Please contact with your local Mitutoyo sales office.
Order No.
contact with your local Mitutoyo sales office.
Counter display printing Please
Note: Combined use with footswitch No. 12AAJ088
Printing method
Dot-matrix thermosensitive
Number of printing digits
40 digits (9 normal characters (7 dot matrix)
Printing speed
Maximum 52.5 normal characters/s
External dimensions
160mm(W)×170mm(D)×65.5mm(H) (printer)
Printer cable, printing paper (1 roll), AC adapter (for
Standard accessories
100V)
Spare goods Printing paper (5 rolls) No. 908353 (5 rolls)
Printout example
17
Optional
Accessories
Eyepieces/Optical Tubes
Eyepieces
Eyepieces
Order No. (1 piece)
Order No. (2 pieces)
Magnification
Field number
Applicable model
WF10×/24
378-866-5
378-866
10×
24
WF15×/16
378-857-5
378-857
15×
16
MF / MF-U
Eyepieces
Digital Protractor Eyepiece
Order No.375-043
Order No.176-313
Fixed
index line
WF20×/12
378-858-5
378-858
20×
12
Rotating
scale line
Vernier scale
Main scale/31˚ >31˚35´
Vernier/35˚
Main
scale
The angle reading scale is built in, allowing angle measurement by simply rotating a
scale line between the features to be measured.
An angle can be measured by merely rotating the cross hairs. (Digital display.)
Optical Tubes
Optional accessories required for MF
Standard-equipped Tilting Optical Tube (MF-U Dedicated Standard Option)
Tilting optical tube that can adjust the eyepoint to suit the operator's physique
allows comfortable measurement.
0 to 30°
Monocular Tube
Order No.
Magnification
Field number
Applicable model
176-392
10×
24
Required for MF
Binocular Tube
Order No.
Magnification
Field number
Applicable model
18
176-393
10×
24
Required for MF
Focus Detector Unit Focus Pilot
Model No.
FP-05
FP-05U
Order No. 375-057 (Green) 375-058 (Red) 375-067 (Green) 375-068 (Red)
Green LED or Red LED
• Concentric circle pattern
• Slit pattern
Light source · The focal point is the positon where the top and bottom of the pattern are aligned.
· Pattern selection and brightness adjustment are enabled according to
the surface status of a workpiece.
· Observation with a wide field of view on a video monitor is available
using 0.5x optical system (with a CCD camera mounted separately).
Focusing
Approximately 1.5μm (when using a 20x lens)
reproducibility * In-company measured reference value of a sample
Applicable
MF
MF-U
model
Optional
Accessories
Eyepieces/Optical Tubes
For MF D
Reticles
Chain line type
For MF-U D
No.12AAG838 (MF D)
No.12AAG878 (MF-U D)
90° chain lines
Chain line pitch: 0.2 to 0.2
Line width: 7µm
No.12AAG836 (MF D)
No.12AAG877 (MF-U D)
90° chain line
Chain line pitch: 0.2 to 0.2
Line width: 5µm
No.12AAG873 (MF D)
No.12AAG876 (MF-U D)
90° chain lines
Chain line pitch: 0.2 to 0.2
Line width: 3µm
Graduation line type
No.12AAG839 (MF C / MF D)
No.12AAG879 (MF-U D)
90° solid lines, 45° chain lines
Chain line pitch: 0.2 to 0.2
Line width: 5µm
No.12AAG840 (MF C / MF D)
No.12AAG880 (MF-U D)
No.12AAG841 (MF C / MF D)
No.12AAG881 (MF-U D)
No.12AAG845 (MF D)*1
No.12AAG846 (MF D)*1
90° chain lines, 60° chain lines
Chain line pitch: 0.2 to 0.2
Line width: 5µm
Zeiss type pattern
Chain line pitch: 0.2 to 0.2
Line width: 5µm
(Use these reticles with an eyepiece that has 10X magnification.)
0 10 20 30 40 50 60 70 80 90 100
No.12AAG842 (MF D)*1
Cross haired graduation lines
0.1/20mm
Line width: 7µm
No.12AAG843 (MF D)*1
Concentric circles with
graduation lines
ø1.2 to ø18
Line width: 7µm
No.12AAG844 (MF D)*1
Graduation lines
0.1/10mm
Line width: 10µm
Graduation lines
0.05/5mm
Line width: 10µm
Grid lines
1mm
10mm
Line width: 10µm
Comparison measuring type
(This is the comparison chart specific to a 3X ML objective. Use this with an eyepiece that has 10X magnification.)
0.25
0.3
0.35
0.4
1.25
0.1
0.15
0.2
0.25
0.3
0.4
0.5
0.6
1.5
0.45
0.5
1.75
0.6
80
72
64
56
48
0.8
44
1.0
40
0.7
36
2.0
0.8
RACK GEAR 14.5°
1.0
No.12AAG847 (MF D)*2
Metric coarse screw thread
p = 0.25 to 1.0
Line width: 7µm
No.12AAG848 (MF D)*2
Metric coarse screw thread
p = 1.25 to 2.0
Line width: 7µm
No.12AAG849 (MF D)*2
Involute gear reference rack
m = 0.1 to 1.0, pressure angle: 14.5°
Line width: 7µm
No.12AAG850 (MF D)*2
Involute gear reference rack
m = 0.1 to 1.0, pressure angle: 20°
Line width: 7µm
13
20
12
18
10
14
Unified coarse screw thread
24 to 14
Line width: 7µm
No.12AAG853 (MF D)*2
Unified coarse screw thread
13 to 10
Line width: 7µm
28
No.12AAG851 (MF D)*2
Unified coarse screw thread
80 to 28
Line width: 7µm
(included as standard)
11
16
No.12AAG852 (MF D)*2
32
Reticle for digital protractor eyepiece
METRIC THREAD
24
RACK GEAR 20°
No.12AAG854 (MF D)*2
Concentric circles with cross hairs
0.01" to 0.20"
Line width: 7µm
90° solid lines, 45° chain lines
Chain line pitch: 0.2 to 0.2
Line width: 7µm
Each reticle includes an insertion unit. Since the insertion unit is specific to the model, select applicable reticles for your microscope.
19
Optional
Accessories
Objectives
Objectives for MF Series
ML Objectives
Numerical View field with View field with Resolving
Magnification Aperture
CCD camera
Power
eyepiece
(mm)*
(NA)
(μm)
(mm)
ML 1×
375-036-2
1×
0.03
ø24
6.40×4.80
9.2
ML 3×
375-037-1
3×
0.09
ø8
2.10×1.60
3.06
ML 5×
375-034-1
5×
0.13
ø4.8
1.28×0.96
2.12
ML 10×
375-039
10×
0.21
ø2.4
0.64×0.48
1.31
ML 20×
375-051
20×
0.42
ø1.2
0.32×0.24
0.65
ML 50×
375-052
50×
0.55
ø0.48
0.13×0.10
0.5
ML 100×
375-053
100×
0.70
ø0.24
0.06×0.05
0.4
* View field with CCD camera is a view field when using Mitutoyo Vision Unit (P12-P16).
Model No.
ML Objectives
Order No.
Compatible observation method: Bright-field observation
Advantage: A measurement error is reduced with the correct magnification.
The telecentric optical system is adopted for a magnification of 10x or less to
reduce measurement error due to an out-of-focus condition.
Sliding Nosepiece (Factory-set Option)
Two ML objectives can be mounted, allowing stress-free change of
magnification.
· Parfocal Type (Order No. 176-370-1)
Identical focal lengths of mounted objectives eliminates the need for
refocusing after every objective change.
Magnification
Type (Order No. 176-370-2)
·
The magnifications of both mounted objectives are guaranteed.
This is the recommended nosepiece to use when a reticle is mounted in the
optical tube.
20
Working Depth of
distance Focus ±D.F.
(mm)
(μm)
61.0
306
77.0
34
61.0
16.3
51.0
6.2
20.0
1.6
13.0
0.9
6.0
0.6
Objectives for the MF-U Series
FS objectives
M Plan Apo Objectives
Compatible observation method: Bright-field
observation, simple polarized observation,
differential interference observation
Advantage: Plan apochromat lenses free of
spherical aberration/chromatic aberration
are adopted to obtain images with
excellent color reproducibility without
blur over the entire field of view.
G Plan Apo Objectives
Compatible observation method:
Observation through a cover glass
Advantage: Correction design is performed
so as to obtain optimal observation
images when observing through the
glass.
(Corrected on the basis of BK7 and
a cover glass thickness of 3.5mm.
Custom order of other glass material
and thickness is also available.)
BD Plan Apo Objectives
Compatible observation method: Bright-field
observation, dark-field observation, simple
polarized observation, differential interference
observation
Advantage: Dark-field observation is also supported
while maintaining the performance of the M
Plan Apo objective series.
Model No.
Order No.
M Plan A po 1×
M Plan A po 2×
M Plan A po 5×
M Plan A po 7.5×
M Plan A po 10×
M Plan A po 20×
M Plan A po 50×
M Plan A po 100×
M Plan A po SL 20×
M Plan A po SL 50×
M Plan A po SL 80×
M Plan A po SL 100×
M Plan A po SL 200×
M Plan A po HR 50×
M Plan A po HR 100×
G Plan A po 20× (t3.5)
G Plan A po 50× (t3.5)
378-800-3
378-801-6
378-802-6
378-807-3
378-803-3
378-804-3
378-805-3
378-806-3
378-810-3
378-811-3
378-812-3
378-813-3
378-816-3
378-814-4
378-815-4
378-847
378-848-3
Model No.
Order No.
BD Plan Apo 2×
BD Plan Apo 5×
BD Plan Apo 7.5×
BD Plan Apo 10×
BD Plan Apo 20×
BD Plan Apo 50×
BD Plan Apo 100×
BD Plan Apo SL 20×
BD Plan Apo SL 50×
BD Plan Apo SL 80×
BD Plan Apo SL 100×
BD Plan Apo HR 50×
BD Plan Apo HR 100×
378-831-7
378-832-7
378-830-7
378-833-7
378-834-7
378-835-7
378-836-7
378-840-7
378-841-7
378-842-7
378-843-7
378-845-7
378-846-7
Numerical View field View field with Resolving Working
Depth of
Magnification Aperture with eyepiece CCD camera Power
distance Focus ±D.F.
(mm)
(mm)
(μm)
(NA)
(μm)
(mm)
1×
0.025
ø24
6.40×4.80
11
11.0
200
2×
0.055
ø12
3.20×2.40
5
34.0
100
5×
0.14
ø4.8
1.28×0.96
2
34.0
40
7.5×
0.21
ø3.2
0.85×0.64
1.3
35.0
26.67
10×
0.28
ø2.4
0.64×0.48
1
34.0
20
20×
0.42
ø1.2
0.32×0.24
0.7
20.0
10
50×
0.55
ø0.48
0.13×0.10
0.5
13.0
4
100×
0.70
ø0.24
0.06×0.05
0.4
6.0
2
20×
0.28
ø1.2
0.32×0.24
1
30.5
10
50×
0.42
ø0.48
0.13×0.10
0.7
20.5
4
80×
0.55
ø0.3
0.08×0.06
0.6
15.0
2.5
100×
0.70
ø0.24
0.06×0.05
0.5
13.0
2
200×
0.62
ø0.12
0.03×0.02
0.4
13.0
1
50×
0.75
ø0.48
0.13×0.10
0.4
5.2
4
100×
0.90
ø0.24
0.06×0.05
0.3
1.3
2
20×
0.28
ø1.2
0.32×0.24
1
Air conversion29.42 10
50×
0.50
ø0.48
0.13×0.10
0.6 Air conversion13.89
4
Numerical View field View field with Resolving Working Depth of
Magnification Aperture with eyepiece CCD camera Power distance Focus ±D.F.
(mm)
(mm)*
(μm)
(mm)
(μm)
(NA)
2×
0.055
ø12
3.20×2.40
5
34.0
100
5×
0.14
ø4.8
0.96×1.28
2
34.0
40
7.5×
0.21
ø3.2
0.85×0.64
1.3
34.0
26.7
10×
0.28
ø2.4
0.64×0.48
1
34.0
20
20×
0.42
ø1.2
0.32×0.24
0.7
20.0
10
50×
0.55
ø0.48 0.13×0.10
0.5
13.0
4
100×
0.70
ø0.24 0.06×0.05
0.4
6.0
2
20×
0.28
ø1.2
0.32×0.24
1
30.5
10
50×
0.42
ø0.48 0.13×0.10
0.7
20.0
4
80×
0.50
ø0.3
0.08×0.06
0.6
13.0
2.5
100×
0.55
ø0.48 0.13×0.10
0.4
13.0
2
50×
0.75
ø0.24 0.06× 0.05
0.3
5.2
4
100×
0.90
1.3
2
* SL: Super long working distance model HR: High Resolution model
* View field with CCD camera is a view field when using Mitutoyo Vision Unit (P12-P16).
Turret
Manual turret for BrightManual turret for
field and dark-field (4 ways) Bright-field (4 ways)
Electric turret for Brightfield and (4 ways)
Supported observation
Bright field (M Plan Apo/G Plan Apo)
Bright and dark field (BD Plan Apo)
For normal model
378-018
176-211
378-016
378-216
176-212
For LAF model
176-410
176-412
Driving method
Manual
Electric
Manual
Electric
Number of ways
4
4
5
4
4
* When using the turret without parfocal mechanism and objectives, it is recommended to concurrently use "Parfocal Adjustment SIMM Set" (for bright-field observation: Order No.
378-089, for dark-field observation: Order No. 378-090).
Order No.
21
Optional
Accessories
Rotary tables
Rotary table with Fine Wheel (A)
Rotary table with Fine Wheel (B)
Order No.: 176-305
Application: Workpiece orientating/positional fine-adjustment
External dimension: 280 (W)×280 (D)×23.7 (H)mm
Tabletop: ø240mm, 360° rotation, no angle scale
Mass: 5.5kg
Effective glass diameter (mm): ø182
Applicable model: Size 1010, 2010 (MF/MF-U series)
*Option:172-197 Swivel Center Support
176-107 Holder with Clamp
172-378 V-block with Clamp
Order No.: 176-306
Application: Workpiece orientating/positional fine-adjustment
External dimension: 342 (W)×342 (D)×23.2 (H)mm
Tabletop: ø270mm, 360° rotation, no angle scale
Mass: 6.5kg
Effective glass diameter (mm): ø238
Applicable model: Size 2017, 3017, 4020 (MF/MF-U series)
*The V-block with Clamp, Swivel Center Support and Holder with Clamp can NOT be
mounted on the table.
ide d
outs
ge g
lass
ø 24
5 (sta
282
342
2
58
ø6
(96.361)
(103.945)
C
4-
ø28
19
13
(137.618)
220
342
Turning knob
(0.7) 9.5 13
23.2
8
0
tive
fec
(ef
38
ø2
r)
ete
iam
s d 270
ø
las
g
ge
sta
Turning knob
22.5
23.7
M6
Clamp screw
ø184
(Table inside diameter)
ge
sta
ive
ect
(eff
82
ø1
(103.945)
2-M6 depth 8
ø5
280
256
220
ø 220
uts ø 240
ide
dia
me
ter
)
13 10.5(0.2)
12
so
ter)
me
dia
side
le in
(tab
8
las
41
19 13
13
eg
ø2
ø28
Clamp
screws (2)
˚
tag
2-M6 depth 8
24
120
ø1
88
(s
Clamp screws (2)
iame
r)
ete
iam
7
37˚ 0
ter)
2-ø7 hole,
Lip: ø14, counter sink depth: 4
220
ss d
280
31
29˚
gla
30
M6
Clamp screw
Stage Adapter
2-6.6 drill ø11 counter sink depth 12
25
50
Order No.: Stage Adapter: 176-304
Stage Adapter B: 176-310
Application: Used when setting the workpiece fixture on the stage.
External dimensions for one piece:
50 (W)×340 (D)×15 (H)mm
*Note) Adapter B is 280 (D)
Mass: Stage Adapter: 1.5kg
Stage Adapter B: 1.2kg
15
13
7
176-304 Stage Adapter
12
(12)
45°
64
(152)
64
A
3.5 3
Part A dimensions
176-310 Stage Adapter
22
7
15
(13)
(7)
256
280
12
13
25
50
2-6.6 drill ø11counter sink
45°
—
—
2010
2
176-304
Stage Adapter
176-310
Stage Adapter B
Note: Not required for model 1010.
2017
3017
4020
Not applicable Applicable
Applicable Not applicable
3.5 3
T-groove dimensions
N=2
Stage size
1010
29
282
340
29
Optional
Accessories
Others
Holder with Clamp
V-block with Clamp
Swivel Center Support
Order No.: 176-107
Application: Used to clamp a thin workpiece such as
a PCB or pressed part.
Maximum clamp length: 35mm
External dimensions: 62 (H)×152 (W)×38 (D)mm
Mass: 0.4kg
Order No.: 172-378
Maximum clamping diameter: ø25mm
Height from the mounting surface to the center: 38-48mm
Application: Used to mount a cylindrical-form workpiece.
External dimensions: 117 (H)×90 (W)×45 (D)mm
Mass: 0.8kg
*Note: Size 2010 is used with stage adapter B. Sizes
2017, 3017, and 4020 are usable with stage adapter
*Note: Size 2010 is used with stage adapter B. Sizes
2017, 3017, and 4020 are usable with stage adapter
Order No.: 172-197
±10° for swivel position
Maximum angle index: 1°
Application: Used to mount a center-machined workpiece for
measurement of screw pitch diameter, depth, etc.
Maximum horizontal clamping size: ø80×140mm
Maximum clamping size when inclined 10°: ø65×140mm
Mass: 2.5kg
87
45
75
ø12
16 31
74
93
ø28
66
12
42
20
48.5
117
125
42.8
Negative type scale
75
ø12
220
33.6
37.9
48.5
117
41
45
Positive type scale
87
55.5
43
)
x
ma )
(
5
ø2 min
4
ø(
ø28
150
200
31
74
93
42
90 (87 (0)°
取付用T溝寸法
66
20
12
75(70∼80可能)
16
105
152
11
2-6.6×11.6長穴
13
7
52.5
9
1.5
9 20(9)
38
220
Vibration Damping
Stand
240
5
8
(44) 75
35
T溝詳細
Clamping workpiece dimensions
Mounting Stand (for Microscope)
45
10
3 2
Stage Micrometer
13
125
4-6.8穴
15
7
150
200
37.9
24
33.6
42.8
90° 2.5
T-groove dimensions
ax)
5(m in)
2
ø (m
ø4
11
Permissible 70 - 80
90
120
84
240
5
8
45
10
15
52.5
41
105
152
1.5
9 20 (9)
38
75
*Note: Size 2010 is used with stage adapter B. Sizes
2017, 3017, and 4020 are usable with stage adapter
2-6.6×11.6 long hole
13
7
4-6.8 hole
55.5
43
(44)
9
T-groove
dimensions
35
13
3 2
7
120
84
90
支持可能ワーク詳細図
Order No.: 375-056
Scale length: 1mm
Minimum graduation: 0.01mm
Scale accuracy: 1+L(μm) L: length between any two lines (mm)
External dimensions: 76(W)×26(D)
Mass: 16g
Order No.: 176-309
Application: Microscope main unit mounting stand
Maximum loading: 300kg
External dimensions: 1200 (W)×900 (D)×650 (H)
Mass: Approximately 50kg
Applicable model: MF/MF-U
*Note: After purchasing the product, we perform calibration.
For details, contact your neatest Mitutoyo Sales Office.
*Note: When specifying a microscope with the Vision
Unit, we recommend selecting the large mounting stand
No. 02ATE760, which has external dimensions of 1,800
(W)×900 (D)×740 (H).
Order No.: 176-308
Application: Microscope vibration isolation table
Supporting method: Spring pad
Maximum loading: 200kg
External dimensions: 750 (W)×550 (D)×36 (H)
Mass: 36kg
Applicable model: MF/MF-U
23
Optional
Accessories
Internal light source
LED Illumination Unit
The LED illumination unit has a longer operating life than a halogen bulb.
This reduces running costs and saves the trouble of replacing the bulb. Also,
a quick response to light control allows stress-free search for the illumination
condition best suited to a workpiece.
For MF series: Transmitted/Reflected illumination Set Order No. 176-445
For MF-U series: Transmitted/Reflected illumination Set Order No. 176-446
For transmitted
illumination
Order No.176-445
Halogen Illumination Unit
Select this illumination unit when measuring a low-reflectivity workpiece
rather than the standard LED illumination unit.
For MF series: Transmitted/Reflected illumination Set Order No.176-447
For MF-U series: Transmitted Order No.176-448
Reflected 100W (Standard) Order No.176-315
150W (High brightness) Order No.176-316
Order No.176-447
Order No.176-316
Illumination filter
Select the optimal filter depending on the intended use.
GIF filter: Emphasizes contrast in the image.
LB filter: Converts the warm-colored halogen light to a more natural color.
ND filter: Reduces illumination intensity without changing the observation
condition (color temperature) in spite of the fact that halogen light
becomes redder when darkened by decreasing the voltage.
ND2: Light intensity 1/2 (transmission factor 50%) ND8: Light
intensity 1/8 (transmission factor 12.5%)
Light source
LED
illumination
Halogen
illumination
Applicable
model
MF
MF-U
Order No.
MF
176-447
176-445
176-446
176-448
MF-U
176-315
176-316
24
Illumination
method
Transmitted/
reflected
Transmitted/
reflected
Transmitted
Reflected
(100W)
Reflected
(150W)
GIF
LB80
ND2
ND8
12AAA645
—
—
—
12AAA645
12AAA646
12AAA643
12AAA644
12AAG806
12AAG807
—
—
—
—
—
—
For reflected
illumination
Optional
Accessories
External light source
LED Ring Light
For MF series : Order No.176-367-2 (Standard)
: Order No.176-371 (Specific to Sliding Nosepiece)
For MF-U series : Please contact with your local Mitutoyo Sales Office.
This illumination unit provides a high image contrast for observation
of deep-color resins, PCBs and small-diameter cylinders, thus providing
optimal performance for vision measurement. Even if the brightness of
illumination is changed, no color will change.
* The ring light illumination is compatible with ML objectives of 10x or less. If
an objective with a magnification of more than 10x is used, there is a risk of
difficulties in observation due to insufficient light intensity.
Mounted on MF series
LED Ring Light /
Fiber-Optic Ring Light
Mounted on MF-U series
Dual swan-neck light pipe
Vertical Transmitted Illumination
Fiber-Optic Ring Light
Dual swan-neck light pipe
For MF series: Order No. 176-366 (Standard)
For MF and MF-U series: No. 176-343
The Fiber-Optic Ring Light is the best unit to use when a bright, shadowless
image is required. This illumination is best suited to observation at high
magnifications and vision measurement.
This illumination unit highlights the features of a workpiece surface by
applying oblique light to it, forming shadows which aid viewing. Highbrightness spot lighting is also available by the concurrent use of the
standard-supplied condenser lens.
* The ring light illumination is compatible with ML objectives of 10x or less. If an
objective with a magnification of more than 10x is used, there is a risk of difficulties
in observation due to insufficient light intensity.
25
Specifications
MF Series
Main unit
Without Z-axis scale
With Z-axis scale
Measuring accuracy*2 (X and Y axes, when not loaded)
Minimum reading
Optical tube
Observation
Incline angle
Observation image
Observation method
Eyepiece
Objective
Feed mechanism
Max. workpiece height
Measurement range
Max. table loading
Stage
Feed mechanism
Swiveling angle
Internal light • LED Illumination Unit
source
• Halogen Illumination Unit
External light source
Main unit
Dimensions
Control unit
(W×D×H)
Control unit for illumination unit
Z axis
Output
Mass
Max. power
Manual
2010
2017
3017
4020
MF-A2010D
MF-A2017D
MF-A3017D
MF-A4020D
176-862*1
176-863*1
176-864*1
176-865*1
MF-B2010D
MF-B2017D
MF-B3017D
MF-B4020D
176-867*1
176-868*1
176-869*1
176-870*1
(2.2+0.02L) µm L: measuring length (mm)
High accuracy digital scale is mounted
1/0.5/0.1μm switchable
Monocular or binocular
TV camera port for all models (observation/TV camera = 50/50)*4 is provided as standard
Reticle (broken cross-hair, line width: 5μm) is provided as standard
Various reticles are optional.
Angle of column: 25°
Erect image
Bright-field observation
10X (eyepiece field number: 24) is provided as standard
15X, 20X, Angle eyepieces 10X, Digital angle eyepieces 10X are optional.
3X (working distance: 77mm) is provided as standard
1X, 5X, 20X, 50X, 100X, a pair of sliding nosepieces*5 are optional.
Coaxial coarse and fine feed, handles on both sides (coarse: 30mm/rotation, fine: 0.2mm/rotation)
150mm
220mm
100×100mm
200×100mm
200×170mm
300×170mm
400×200mm
10kg
20kg
15kg
Manual and Quick-release mechanism (zero-set switch is incorporated)
—
±5°
±3°
White LED (transmitted/vertical reflected), no step modulated light
12V50W halogen (transmitted/vertical reflected), no step modulated light
Ring light and dual swan-neck light pipe are optional.
562×730×667mm
624×745×667mm
632×892×782mm
682×892×782mm
757×907×782mm
—
1010
MF-A1010D
176-861*1
MF-B1010D
176-866*1
114×360×96mm
Approx. 70kg
consumption*3
• Required optional accessory
RS-232C output, USB output for Vision Unit
Approx. 75kg
Approx. 150kg
Approx. 160kg
LED: 45W Halogen: 160W
AC power input connector: 100-240V
Approx. 165kg
*1 To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for KC, C and No suffix are required for PSE.
*2 Measured in conformance with JIS B 7153
*3 Optional accessory is NOT target (Main unit and required optional illumination are target)
*4 C mount is required separately.
*5 A pair of Sliding Nosepieces are factory-installed option.
26
Motor-Driven Z-axis Models
Main unit
With Z-axis scale
Measuring accuracy*2 (X and Y axes, when not loaded)
Minimum reading
Optical tube
Observation
Incline angle
Observation image
Observation method
Eyepiece
Objective
Feed mechanism
Max. workpiece height
Measurement range
Max. table loading
Stage
Feed mechanism
Swiveling angle
Internal light • LED Illumination Unit
source
• Halogen Illumination Unit
External light source
Main unit
Dimensions
Control unit
(W×D×H)
Control unit for illumination
unit
Output
Mass
Z axis
Max. power
consumption*3
Motor-Driven X/Y/Z-axis Models
2017
3017
4020
2017
3017
4020
MF-J2017D
MF-J3017D
MF-J4020D
MF-G2017D
MF-G3017D
MF-G4020D
176-891*1
176-892*1
176-893*1
176-781*1
176-782*1
176-783*1
(2.2+0.02L) µm L: measuring length (mm)
High accuracy digital scale is mounted
1/0.5/0.1μm switchable
Monocular or binocular
TV camera port for all models (observation/TV camera = 50/50)*4 is provided as standard
Reticle (broken cross-hair, line width: 5μm) is provided as standard
Various reticles are optional.
Angle of column: 25°
Erect image
Bright-field observation
10X (eyepiece field number: 24) is provided as standard
15X, 20X, Angle eyepieces 10X, Digital angle eyepieces 10X are optional.
3X (working distance: 77mm) is provided as standard
1X, 5X, 20X, 50X, 100X, a pair of sliding nosepieces*5 are optional.
Motor drive (Maximum measuring speed: 20mm/s), lower limit setting (for collision avoidance with a workpiece)
220mm
200×170mm
300×170mm
400×200mm
200×170mm
300×170mm
400×200mm
20kg
15kg
20kg
15kg
Manual and Quick-release mechanism (zero-set switch is incorporated)
Motor drive (Maximum measuring speed: 40mm/s)
±5°
±3°
±5°
±3°
White LED (transmitted/vertical reflected), no step modulated light
12V50W halogen (transmitted/vertical reflected), no step modulated light
Ring light and dual swan-neck light pipe are optional.
632×892×782mm
682×892×782mm
757×907×782mm
632×892×782mm
682×892×782mm
757×907×782mm
355×364×106.5mm
114×360×96mm
Approx. 160kg
Approx. 170kg
RS-232C output, USB output for Vision Unit
Approx. 175kg
Approx. 160kg
Approx. 170kg
LED: 275W Halogen: 390W
AC power input connector: 100-240V
Approx. 175kg
• Required optional accessory
*1 To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for KC, C and No suffix are required for PSE.
*2 Measured in conformance with JIS B 7153
*3 Optional accessory is NOT target (Main unit and required optional illumination are target)
*4 C mo unt is required separately.
*5 A pair of Sliding Nosepieces are factory-installed option.
27
Specifications
MF-U Series
Main unit
Without Z-axis scale
BF (bright-field)
With Z-axis scale
BD (bright-field/
dark-field)
Without Z-axis scale
With Z-axis scale
Manual
2010
2017
3017
4020
MF-UA2010D
MF-UA2017D
MF-UA3017D
MF-UA4020D
176-872*1
176-873*1
176-874*1
176-875*1
MF-UB2010D
MF-UB2017D
MF-UB3017D
MF-UB4020D
176-877*1
176-878*1
176-879*1
176-880*1
MF-UC2010D
MF-UC2017D
MF-UC3017D
MF-UC4020D
176-882*1
176-883*1
176-884*1
176-885*1
MF-UD2010D
MF-UD2017D
MF-UD3017D
MF-UD4020D
176-887*1
176-888*1
176-889*1
176-890*1
(2.2+0.02L) µm L: measuring length (mm)
High accuracy digital scale is mounted
1/0.5/0.1µm switchable
Tilting optical tube is provided as standard
TV camera port for all models (observation/TV camera = 50/50)*4 is provided as standard
Reticle (broken cross-hair, line width: 5μm) is provided as standard
Various reticles are optional.
1010
MF-UA1010D
176-871*1
MF-UB1010D
176-876*1
MF-UC1010D
176-881*1
MF-UD1010D
176-886*1
Measuring accuracy*2 (X and Y axes, when not loaded)
Minimum reading
Optical tube
Observation
Incline angle
Observation image
Observation method
Eyepiece
Turret
Bright-field (BF)
Bright-field/dark-field (BD)
Feed mechanism
Max. workpiece height
Measurement range
Max. table loading
Objective
Z axis
Stage
Angle of column: 0-30°
Erect image
Bright-field observation / dark-field observation (Only for MF-UC and MF-UD types)
Simple polarization and differential interference are optional.
10X (eyepiece field number: 24) is provided as standard
15X, 20X are optional.
Manual, motor drive
M Plan Apo, G Plan Apo series
BD Plan Apo series
Manual handles on both sides (coarse: 30mm/rotation, fine: 0.2mm/rotation)
150mm
220mm
100×100mm
200×100mm
200×170mm
300×170mm
400×200mm
10kg
20kg
15kg
Feed mechanism
Manual and Quick-release mechanism (zero-set switch is incorporated)
Swiveling angle
—
• LED Illumination Unit
Internal light
source
• Halogen Illumination Unit
External light source
Output
Main unit
Dimensions
(W×D×H)
Control unit
Control unit for illumination unit
Mass
Max. power
consumption*3
• Required optional accessory
562×730×667mm
±5°
White LED (transmitted/vertical reflected), no step modulated light
12V50W halogen (transmitted), no step modulated light
12V100W (vertical reflected), no step modulated light
15V150W (vertical reflected), no step modulated light are optional.
Dual swan-neck light pipe are optional.
RS-232C output, USB output for Vision Unit
624×745×667mm
632×892×782mm
682×892×782mm
±3°
757×907×782mm
—
114×360×96mm
Approx. 70kg
Approx. 75kg
Approx. 150kg
Approx. 160kg
Approx. 165kg
LED: 55W Halogen: 190W (vertical reflected 12V100W) and 240W (vertical reflected 15V150W)
AC power input connector: 100-240V
*1 To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for KC, C and No suffix are required for PSE.
*2 Measured in conformance with JIS B 7153
*3 Optional accessory is NOT target (Main unit and required optional illumination are target)
*4 C mount is required separately.
28
Main unit
2017
BF
(bright-field)
With Z-axis scale
BD (bright-field/
With Z-axis scale
dark-field)
Measuring accuracy*2 (X and Y axes, when not loaded)
Minimum reading
Optical tube
Observation
Motor-Driven X/Y/Z-axis Models
Motor-Driven Z-axis Models
3017
4020
Standard
2017
3017
Standard
4020
2017
3017
4020
MF-UJ2017DMF-UJ3017DMF-UJ4020D MF-UG2017D MF-UG3017D MF-UG4020D MF-UE2017D MF-UE3017D MF-UE4020D
176-792*1
176-895*1
176-896*1
176-784*1
176-785*1
176-786*1
176-790*1
176-791*1
176-792*1
MF-UK2017D MF-UK3017D MF-UK4020D MF-UH2017D MF-UH3017D MF-UH4020D MF-UF2017D MF-UF3017D MF-UF4020D
176-897*1
176-898*
176-899*1
176-787*1
176-788*1
176-789*1
176-793*1
176-794*1
176-795*1
(2.2+0.02L) µm L: measuring length (mm)
High accuracy digital scale is mounted
1/0.5/0.1μm switchable
Monocular or binocular
TV camera port for all models (observation/TV camera = 50/50)*4 is provided as standard
Reticle (broken cross-hair, line width: 5μm) is provided as standard
Various reticles are optional.
Incline angle
Observation image
Angle of column: 0-30°
Erect image
Bright-field observation / dark-field observation (Only for MF-UC and MF-UD types)
Observation method
Simple polarization and differential interference are optional.
10X (eyepiece field number: 24) is provided as standard
Eyepiece
15X, 20X are optional.
Turret
Manual, motor drive*5
Bright-field (BF)
M Plan Apo, G Plan Apo series
Objective
Bright-field/dark-field (BD)
BD Plan Apo series
Feed mechanism
Motor drive (Maximum measuring speed: 20mm/s), lower limit setting (for collision avoidance with a workpiece)
Z axis
Max. workpiece height
220mm
Measurement range
200×170mm 300×170mm 400×200mm 200×170mm 300×170mm 400×200mm 200×170mm 300×170mm 400×200mm
Max. table loading
20kg
15kg
20kg
15kg
20kg
15kg
Stage
Manual and Quick-release mechanism
Feed mechanism
Motor drive (Maximum measuring speed: 40mm/s)
(zero-set switch is incorporated)
Swiveling angle
±5°
±3°
±5°
±3°
±5°
±3°
LED Illumination Unit
White LED (transmitted/vertical reflected), no step modulated light
Internal light
12V50W halogen (transmitted), no step modulated light
source
Halogen Illumination Unit
12V100W (vertical reflected), no step modulated light
15V150W(vertical reflected), no step modulated light are optional.
External light source
Dual swan-neck light pipe are optional.
Output
RS-232C output, USB output for Vision Unit
Main unit
632×892×782mm 682×892×782mm 757×907×782mm 632×892×782mm 682×892×782mm 757×907×782mm 608×790×846mm 658×790×846mm 733×790×846mm
Dimensions
Control unit
355×364×106.5mm
(W×D×H)
Control unit for illumination unit
114×360×96mm
Mass
Approx. 160kg Approx. 170kg Approx. 175kg Approx. 160kg Approx. 170kg Approx. 175kg Approx. 165kg Approx. 175kg Approx. 180kg
Max. power consumption*3
LED: 285W Halogen: 420W (vertical reflected 12V100W) and (vertical reflected 15V150W) AC power input connector: 100-240V
• Required optional accessory
*1 To denote your AC power cable add the following suffixes to the order No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for KC, C and No suffix are required for PSE.
*2 Measured in conformance with JIS B 7153
*3 Optional accessory is NOT target (Main unit, required optional illumination, and control unit are target)
*4 C mount is required separately.
*5 RS-232C cable (No. 12AAA807) is required when you select a motorized LAF model and a power turret .
29
External camera system
Diagram
C mount
970441
0.5 x adapter unit Focus pilot FP-05
(with C mount)
Green(375-057)/Red(375-058)
375-054
MF Series
Reticle
Eyepiece
10x
2pcs.
378-866
1pc.
378-866-5
Digital protractor eyepiece
176-313
Protractor eyepiece
375-043
Eyepiece
15x
2pcs.
378-857
1pc.
378-857-5
Eyepiece
20x
2pcs.
378-858
1pc.
378-858-5
Monocular unit
176-392
Camera / Images
P12 - 17
Binocular unit
176-393
MF
Eyepiece / Optical tube
Rotary table / Others
Size 1010
V-block with clamp
172-378
30
Stage adapter B
176-310
Swivel center support
172-197
P21, 22
Size 2017/3017/4020
Size 2010
Rotary table with fine feed
wheel (A) 176-305
P21, 22
Stage adapter
176-304
Holder with clamp
176-107
Rotary table with fine
feed wheel (B) 176-306
Vision unit 10DSet
•Vision unit
•Data processor
•Main software
Required option for Motor-Driven Z-axis models
Vision AF cable (12AAN358)
Required option
Calibration chart (02ATN695)
QS Calibration chart (02AKW001)
Foot switch (12AAJ088)
External control cable
(12AAD128)
External control cable
(12AAG888)
Filter
•GIF Filter (12AAG806)
•LB80 Filter (12AAG807)
Fiber-Optic Ring
(176-366)
Dual swan-neck
(176-343)
LED Ring
(176-367-2)
LED Ring (for FS Objectives)
(176-371)
Sliding Nosepiece
•176-370-1
•176-370-2
Various ML objectives
Objectives
P. 20
External light source
P. 25
LED illumination unit 176-445
Filter
•GIF Filter
(12AAA645)
Internal light source
Transmitted
P. 24
Reflected
Control unit
Halogen illumination unit 176-447
Transmitted Reflected
Data processing
Filter
•GIF Filter
•ND2 Filter
(12AAA645) (12AAA643)
•LB80 Filter •ND8 Filter
(12AAA646) (12AAA644)
Control unit
P. 17
External printer cable
(12AAA804)
RS-232C cable (12AAA807)
External printer
Thermal printer
(12AAD032)
QM-Data200 (264-155)
Foot switch
(12AAJ088)
31
Diagram
External camera system
C mount 0.5 x adapter unit
970441 (with C mount)
375-054
Focus pilot FP-05
Green (375-067)/Red (375-068)
MF-U Series
Reticle
Eyepiece
10x
2pcs.
378-866
Eyepiece
15x
2pcs.
378-857
Bright-field (UA/UB/UE/UG/UJ)
Adjustable turret
4 holes 378-018
(For LAF: 176-410)
Camera / Images
Eyepiece
20x
2pcs.
378-858
P. 11-16
Dark-field (UC/UD/UF/UH/UK)
Aligning motor driver
5 holes 378-216
Motor turret 4 holes
176-212
Turret 4 holes
176-211
(For LAF: 176-412)
Eyepiece / Optical tube
P. 17, 18
MF-U
RS-232C cable
(12AAA807)
Objectives for bright-field Connect to Vision unit*
Differential interference unit
5X,10X (378-080)
20X (378-079)
50X,SL20X (378-078)
100X,SL80X,SL50X (378-076)
Objectives for bright-field/darkfield
Size 1010
Size 2010
Rotary table with fine
feed wheel (A) 176-305
32
P. 21
Analyzer
Rotary table / Others
V-block with clamp
172-378
Objectives
Polarization unit 378-092
Polarizer
Size 2017/3017/4020
Stage adapter B
176-310
Swivel center support
172-197
P. 21, 22
Stage adapter
176-304
Holder with clamp
176-107
Rotary table with fine
feed wheel (B) 176-306
*
Vision unit 10DSet
•Vision unit
•Data processor
•Main software
Required option for Motor-Driven Z-axis models
Vision AF cable (12AAN358)
Required option
Calibration chart (02ATN695)
QS Calibration chart (02AKW001)
Foot switch (12AAJ088)
External control cable
(12AAG888)
External control cable
(12AAD128)
Filter
•GIF Filter (12AAG806)
•LB80 Filter (12AAG807)
Dual swan-neck
(176-343)
External light source
P. 24
Reflected
100W fiber
(176-315)
Internal light source
P. 23
LED illumination unit 176-446
Halogen illumination unit
176-448
Transmitted
Filter
•GIF Filter
(12AAA645)
Control unit
Transmitted Reflected
Data processing
150W fiber
(176-316)
Control unit
Filter
•GIF Filter
(12AAA645)
•LB80 Filter
(12AAA646)
•ND2 Filter
(12AAA643)
•ND8 Filter
(12AAA644)
P. 16
External printer cable
(12AAA804)
External printer
Thermal printer
(12AAD032)
RS-232C cable (12AAA807)
QM-Data200 (264-155)
Foot switch
(12AAJ088)
33
Dimensions
MF Series
Manual Models *Common dimensions for MF-A and MF-B models.
Unit: mm
MF-B1010D
MF-B2010D
96
259
96
259
327
249
78
168
360
234+50
168
210
215
551
727+50
300+50
16
121
114
MF-B2017D
168
360
269+100
168
210
215
551
742+50
355+100
16
121
MF-B3017D
259
96
96
259
327
249
78
78
114
168
360
281+100
168
270
621
889+85
351+100
255
168
114
360
281+150
16
121
MF-B4020D
96
259
79
247
464
782
360
327
249
78
168
114
360
305+200
34
168
270
452+200
79
247
247
464
464
782
782
79
360
327
249
360
114
79
667
422
200
205
417
667
79
360
360
327
249
78
621
904+100
255
16
121
168
270
401+150
621
889+85
255
16
121
Motor-Driven Z-axis Models
Unit: mm
MF-J3017D
259
96
259
249
114
168
360
281+100
464 - 684
247
464 - 684
247
782
782
360
249
96
360
MF-J2017D
168
215
270
255
16
621
889+85
351+100
114
121
168
360
281+150
270
168
215
401+150
255
16
621
889+85
121
MF-J4020D
259
96
247
464 - 684
782
360
249
168
360
305+200
114
270
168
215
452+200
255
621
904+100
16
121
Motor-Driven X/Y/Z-axis Models
Unit: mm
MF-G3017D
96
330 - 244
249
100
168
360
280
205
782
247
247
114
168
270
255
16
114
215
328
100
210.5 - 430.5
782
210.5 - 430.5
360
249
96
330 - 244
360
MF-G2017D
85 48
621
120.3
150
MF-G4020D
168
360
280
255
168
215
378
150
85 48
270
255
621
16
120.3
96
330 - 244
360
210.5 - 430.5
247
782
249
114
200
168
360
280
305
168
270
255
16
215
428
200
100 48
621
120.3
35
Dimensions
MF U Series
Manual Models *Common dimensions for MF-UA, MF-UB, MF-UC, and MF-UD models.
MF-UB2010D
259
259
96
171
171
667
570
667
565
168
360
234+50
205
200
114
96
356
231
125
360
356
231
125
360
MF-UB1010D
Unit: mm
168
210
215
551
727+50
300+50
16
121
114
MF-UB2017D
168
360
269+100
168
210
215
551
742+50
355+100
16
121
MF-UB3017D
96
259
96
259
114
168
360
281+100
247
247
612
612
782
782
171
171
360
356
231
125
360
356
231
125
168
270
621
889+85
351+100
255
16
121
114
MF-UB4020D
96
259
247
612
782
171
360
356
231
125
168
114
360
305+200
36
168
270
452+200
621
904+100
255
16
121
168
360
281+150
168
401+150
270
621
889+85
255
16
121
Motor-Driven Z-axis Models *Common dimensions for MF-UJ and MF-UK models.
MF-UJ2017D
259
Unit: mm
MF-UJ3017D
259
96
96
231
247
247
782
612 - 832
782
612 - 832
360
360
231
114
168
360
281+100
270
168
215
255
16
351+100
114
120
621
889+85
MF-UJ4020D
259
168
360
281+150
168
215
401+150
270
255
16
120
621
889+85
96
247
782
612 - 832
360
231
114
168
360
305+200
270
168
215
452+200
255
16
120
621
904+100
Motor-Driven X/Y/Z-axis Models (standard models) *Common dimensions for MF-UG and MF-UH models.
MF-UG2017D
MF-UG3017D
96
330 - 244
96
330 - 244
231
247
168
85 48
428
215
270
255
621
16
120.3
150 114
247
25
168
205
360
782
261 - 481
782
261 - 481
105
105
360
231
75
114
100
Unit: mm
168
255
168
378
150
85 48
215
270
255
621
16
120.3
MF-UG4020D
330 - 244
96
261 - 481
247
782
105
360
231
200
114
168
305
168
428
200
100
215
47.7
270
255
621
16
120.3
37
Dimensions
MF-U Series
Motor-Driven X/Y/Z-axis Models (LAF models) *Common dimensions for MF-UA, MF-UB, MF-UC, and MF-UD models.
MF-UF2017D
Unit: mm
MF-UF3017D
96
360
188
105
360
105
231
846
323 - 543
846
313 - 227
96
188
231
323 - 543
313 - 227
75
114
100
168
360
205
168
270
100
328
215
85 48
255
16
114
120.3
621
150
MF-UF4020D
313 - 227
96
188
323 - 543
247
846
105
360
231
114
200
38
168
360
305
270
168
428
200
100 48
215
255
621
247
247
25
16
120.3
168
360
255
270
168
378
150
85 48
215
255
621
16
120.3
Dimensions
Stage Top View *Common dimensions for all models.
Unit: mm
20-M6 depth 14
ø11.5 countersink 90°
Cross-recessed flat head screw attached
250
25 70 25
220
280
25 70 25
220
290
350
Size 3017
300x170mm
20-M6 depth 14
ø11.5 countersink 90°
Cross-recessed flat head screw attached
20-M6 depth 14
ø11.5 countersink 90°
Cross-recessed flat head screw attached
370
240
20.2
20.2
240
25 70 25
282
300
342
270
25 70 25
220
282
350
410
25 70 25
220
450
332
510
20-M6 depth 14
ø11.5 countersink 90°
Cross-recessed flat head screw attached
25 70 25
282
300
342
240
440
30
Size 4020
400x200mm
25 70 25
282
300
342
Size 2017
200x170mm
25 70 25
220
256
280
180
25 70 25
220
256
280
180
Size 2010
200x100mm
150
Size 1010
100x100mm
20-M6 depth 14
ø11.5 countersink 90°
Cross-recessed flat head screw attached
25 70 25
220
520
382
610
39
140 1702 (4) A-(CH)HS, Printed in Japan
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Vision Measuring Systems
Form Measurement
Optical Measuring
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