Terms and Conditions Agreement
Next-Generation Production Environment Sensors
Read and understand this catalog.
Please read and understand this catalog before purchasing the products. Please consult your OMRON representative if you have any questions or
comments.
Series
Warranties.
(a) Exclusive Warranty. Omron’s exclusive warranty is that the Products will be free from defects in materials and workmanship for a period of twelve months
from the date of sale by Omron (or such other period expressed in writing by Omron). Omron disclaims all other warranties,
express or implied.
Air Particle Sensor
(b) Limitations. OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, ABOUT NON-INFRINGEMENT, MERCHANTABILITY
OR FITNESS FOR A PARTICULAR PURPOSE OF THE PRODUCTS. BUYER ACKNOWLEDGES THAT IT ALONE HAS DETERMINED
THAT THE PRODUCTS WILL SUITABLY MEET THE REQUIREMENTS OF THEIR INTENDED USE.
Thermo-Humidity Station
Omron further disclaims all warranties and responsibility of any type for claims or expenses based on infringement by the Products or otherwise of any
intellectual property right. (c) Buyer Remedy. Omron’s sole obligation hereunder shall be, at Omron’s election, to (i) replace (in the form originally shipped with
Buyer responsible for labor charges for removal or replacement thereof) the non-complying Product, (ii) repair the non-complying Product, or (iii) repay or
credit Buyer an amount equal to the purchase price of the non-complying Product; provided that in no event shall Omron be responsible for warranty, repair,
indemnity or any other claims or expenses regarding the Products unless Omron’s analysis confirms that the Products were properly handled, stored, installed
and maintained and not subject to contamination, abuse, misuse or inappropriate modification. Return of any Products by Buyer must be approved in writing
by Omron before shipment. Omron Companies shall not be liable for the suitability or unsuitability or the results from the use of Products in combination with
any electrical or electronic components, circuits, system assemblies or any other materials or substances or environments. Any advice, recommendations or
information given orally or in writing, are not to be construed as an amendment or addition to the above warranty.
ZN-PD-SA
ZN-THX21-SA
Differential Pressure Station
ZN-DPX21-SA
See http://www.omron.com/global/ or contact your Omron representative for published information.
Limitation on Liability; Etc.
OMRON COMPANIES SHALL NOT BE LIABLE FOR SPECIAL, INDIRECT, INCIDENTAL, OR CONSEQUENTIAL DAMAGES, LOSS OF PROFITS OR
PRODUCTION OR COMMERCIAL LOSS IN ANY WAY CONNECTED WITH THE PRODUCTS, WHETHER SUCH CLAIM IS BASED IN CONTRACT,
WARRANTY, NEGLIGENCE OR STRICT LIABILITY.
Further, in no event shall liability of Omron Companies exceed the individual price of the Product on which liability is asserted.
Suitability of Use.
Omron Companies shall not be responsible for conformity with any standards, codes or regulations which apply to the combination of the Product in the
Buyer’s application or use of the Product. At Buyer’s request, Omron will provide applicable third party certification documents identifying ratings and
limitations of use which apply to the Product. This information by itself is not sufficient for a complete determination of the suitability of the Product in
combination with the end product, machine, system, or other application or use. Buyer shall be solely responsible for determining appropriateness of the
particular Product with respect to Buyer’s application, product or system. Buyer shall take application responsibility in all cases.
NEVER USE THE PRODUCT FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY OR IN LARGE QUANTITIES WITHOUT
ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS, AND THAT THE OMRON PRODUCT(S) IS
PROPERLY RATED AND INSTALLED FOR THE INTENDED USE WITHIN THE OVERALL EQUIPMENT OR SYSTEM.
Programmable Products.
Omron Companies shall not be responsible for the user’s programming of a programmable Product, or any consequence thereof.
Performance Data.
Data presented in Omron Company websites, catalogs and other materials is provided as a guide for the user in determining suitability and does not
constitute a warranty. It may represent the result of Omron’s test conditions, and the user must correlate it to actual application requirements. Actual
performance is subject to the Omron’s Warranty and Limitations of Liability.
Thermo-Humidity Station
Change in Specifications.
Product specifications and accessories may be changed at any time based on improvements and other reasons. It is our practice to change part numbers
when published ratings or features are changed, or when significant construction changes are made. However, some specifications of the Product may be
changed without any notice. When in doubt, special part numbers may be assigned to fix or establish key specifications for your application. Please consult
with your Omron’s representative at any time to confirm actual specifications of purchased Product.
Differential Pressure Station
Errors and Omissions.
Information presented by Omron Companies has been checked and is believed to be accurate; however, no responsibility is assumed for clerical,
typographical or proofreading errors or omissions.
Air Particle Sensor
Dust measurement type
Air Particle Sensor
Particle measurement type
OMRON Corporation
Industrial Automation Company
Authorized Distributor:
Make your entire production environment visible
Tokyo, JAPAN
Contact: www.ia.omron.com
Regional Headquarters
OMRON EUROPE B.V.
Sensor Business Unit
Carl-Benz-Str. 4, D-71154 Nufringen, Germany
Tel: (49) 7032-811-0/Fax: (49) 7032-811-199
OMRON ELECTRONICS LLC
One Commerce Drive Schaumburg,
IL 60173-5302 U.S.A.
Tel: (1) 847-843-7900/Fax: (1) 847-843-7787
OMRON ASIA PACIFIC PTE. LTD.
No. 438A Alexandra Road # 05-05/08 (Lobby 2),
Alexandra Technopark,
Singapore 119967
Tel: (65) 6835-3011/Fax: (65) 6835-2711
OMRON (CHINA) CO., LTD.
Room 2211, Bank of China Tower,
200 Yin Cheng Zhong Road,
PuDong New Area, Shanghai, 200120, China
Tel: (86) 21-5037-2222/Fax: (86) 21-5037-2200
Multi-point monitoring of environmental data and central control
© OMRON Corporation 2011 All Rights Reserved.
In the interest of product improvement,
specifications are subject to change without notice.
Printed in Japan
Cat. No. E411-E1-02
0513 (0611) (TA)
Four types of vital
information to maintain
and control clean
environments
By visualizing environmental
Centralized management of
saving.
conditions, it’s easier to maintain and control clean environments.
measured data contributes to quality improvement and energy
Precision measurement of temperature and humidity
along manufacturing lines and around equipment.
Temperature
& Humidity
Thermo-Humidity Station
Essential data for
production environments
P05-06
ZN-THX21-SA (Station)
ZN-THS11-S (Sensor head)
-25 to 60°C (Accuracy: ±0.3°C) 0% to 99% (Accuracy: ±2.5%)
∗ At 25°C, 10% to 85%
Centralized data management
through a LAN network.
Easy network connection through Ethernet.
Centralized management of measured data is
possible immediately after installation, achieving
low-cost operation. Also, data can be logged
automatically at all times, reducing man-hours for
measurement and labor costs. Easy-to-use GUI
allows you to visualize the entire clean
environment.
by PC
Precision measurement of differential pressure
between inside and outside of clean room or booth.
Differential
Pressure Level
Differential Pressure Station
Positive pressure level of clean
booth and clean room.
ZN-DPX21-SA (Station)
ZN-DPS11-S (Sensor head)
P07-08
P11
New Ver.
-500 to 500 Pa (Accuracy: Within ±3%∗ of indicated value)
∗ Zero point accuracy: ±0.2 Pa
Continuously and accurately measures
airborne particle count.
Clearly visualize multiple types of
environmental information
Environmental
Visualization Software
Option
ZN-SW11-S
Air Particle Sensor
Airborne
Particles
Particle measurement
type
Airborne particulates affect
the entire clean environment
P09-10
ZN-PD03-SA
0.3 µm
0.5 µm
1.0 µm
Directly measures falling dust that threatens
product quality.
Generated by people
and equipment
Environmental changes can be tracked
over time and by distribution
by PLC
Air Particle Sensor
Dust
Fallout
Dust measurement
type
ZN-PD50-SA
Dust affects the appearance
and quality of the product
5 (10) µm
20 (30) µm
50 µm
Customers can construct their own unique production
environment monitoring and control systems.
Recommendation: SYSMAC CS/CJ Series Ethernet unit
Note: Some conditions and limitations apply to PLC connection.
Be sure to contact the OMRON Sales Department for details.
P09-10
01
02
Four types of vital
information to maintain
and control clean
environments
By visualizing environmental
Centralized management of
saving.
conditions, it’s easier to maintain and control clean environments.
measured data contributes to quality improvement and energy
Precision measurement of temperature and humidity
along manufacturing lines and around equipment.
Temperature
& Humidity
Thermo-Humidity Station
Essential data for
production environments
P05-06
ZN-THX21-SA (Station)
ZN-THS11-S (Sensor head)
-25 to 60°C (Accuracy: ±0.3°C) 0% to 99% (Accuracy: ±2.5%)
∗ At 25°C, 10% to 85%
Centralized data management
through a LAN network.
Easy network connection through Ethernet.
Centralized management of measured data is
possible immediately after installation, achieving
low-cost operation. Also, data can be logged
automatically at all times, reducing man-hours for
measurement and labor costs. Easy-to-use GUI
allows you to visualize the entire clean
environment.
by PC
Precision measurement of differential pressure
between inside and outside of clean room or booth.
Differential
Pressure Level
Differential Pressure Station
Positive pressure level of clean
booth and clean room.
ZN-DPX21-SA (Station)
ZN-DPS11-S (Sensor head)
P07-08
P11
New Ver.
-500 to 500 Pa (Accuracy: Within ±3%∗ of indicated value)
∗ Zero point accuracy: ±0.2 Pa
Continuously and accurately measures
airborne particle count.
Clearly visualize multiple types of
environmental information
Environmental
Visualization Software
Option
ZN-SW11-S
Air Particle Sensor
Airborne
Particles
Particle measurement
type
Airborne particulates affect
the entire clean environment
P09-10
ZN-PD03-SA
0.3 µm
0.5 µm
1.0 µm
Directly measures falling dust that threatens
product quality.
Generated by people
and equipment
Environmental changes can be tracked
over time and by distribution
by PLC
Air Particle Sensor
Dust
Fallout
Dust measurement
type
ZN-PD50-SA
Dust affects the appearance
and quality of the product
5 (10) µm
20 (30) µm
50 µm
Customers can construct their own unique production
environment monitoring and control systems.
Recommendation: SYSMAC CS/CJ Series Ethernet unit
Note: Some conditions and limitations apply to PLC connection.
Be sure to contact the OMRON Sales Department for details.
P09-10
01
02
Free installation available for any purpose at any place.
Continuous local and multi-point monitoring.
Continuous monitoring of
temperature and humidity in clean room
Thermo-Humidity
Station
Continuous monitoring of
dust generated by machines
Dust measurement type
Multi-point monitoring of
airborne particles,
temperature, and humidity
inside clean room
Continuous monitoring of
differential pressure
in clean booth
Particle
measurement type
Differential Pressure
Station
Centralized management of
production environments
Continuous monitoring of
dust in clean booth
Environmental Visualization Software
Wave Inspire ES
Dust measurement type
Measurement data obtained can help to make all kinds of improve ments.
Example of total manufacturing environment visualization
Quality
Problem
The product
deficiency caused
with the foreign
matter is not
eliminated though
the clean booth is
set.
Example of total manufacturing environment visualization
Maintains the cleanliness of clean environments with heat-emitting equipment
Measurement
Measures airborne particles
and differential pressure at
the same time!
Differential Pressure Station
Result
The heat-emitting equipment added to
the production site made inside of the
booth become a negative pressure.
Correlation between differential pressure
level and particle volume revealed!
[Correlation diagram between differential
pressure level and particle volume.]
Particle volume
Presence
of airborne
particles exceeded
the designated
control value
confirmed, but
cause unclear
20000
Particle measurement type
Abnormal conditions
exceeding control value
Differential pressure
+0.6 Pa
1.0 Pa
15000
0.5 Pa
10000
0 Pa
–0.5 Pa
5000
0
Wave Inspire ES
03
Improvement
–0.3 Pa
Before decreasing
size of booth entrance
–1.0 Pa
After decreasing size
of booth entrance
Positive pressure
restored by modifying
the booth entrance
As fluctuations in air
intake and outtake are a
concern, differential
pressure level will be
continuously monitored
henceforth
Major reduction
in particle volume
contributes to
minimizing
product defects
Energy
conservation
Problem
Clean room air
conditioners consume
an enormous amount of
electricity, and should
be turned off when
facility is not in operation.
However, they cannot be
turned off due to
concerns about product
quality.
Power
consumption
Achieving energy saving through continuous visualization of clean state
Measurement
Continuous monitoring
of temperature and
humidity + particles +
differential pressure!
Improvement
Real-time monitoring of
environmental information when
air conditioners are operating,
stopped, and during unexpected
deliveries
Air conditioning is off
at night and during
holidays when facility
is not in operation.
Thermo-Humidity Station
[Air conditioning operation status and
changes in particle volume]
Pparticle volume
Particle measurement type
Delivery of items
Air conditioning
suddenly goes
into operation
20000
15000
Air conditioning OFF
Air conditioning
ON
10000
Differential Pressure Station
30%
of plant total
Result
With continuous monitoring of environment,
air conditioning can
be turned on at the
time of need and as
much as needed.
Major
reduction
5000
0
24H
24H
24H
24H
24H
Thr
Fri
Sat
Sun
Mon
in electricity consumption
of air conditioning
Wave Inspire ES
04
Free installation available for any purpose at any place.
Continuous local and multi-point monitoring.
Continuous monitoring of
temperature and humidity in clean room
Thermo-Humidity
Station
Continuous monitoring of
dust generated by machines
Dust measurement type
Multi-point monitoring of
airborne particles,
temperature, and humidity
inside clean room
Continuous monitoring of
differential pressure
in clean booth
Particle
measurement type
Differential Pressure
Station
Centralized management of
production environments
Continuous monitoring of
dust in clean booth
Environmental Visualization Software
Wave Inspire ES
Dust measurement type
Measurement data obtained can help to make all kinds of improve ments.
Example of total manufacturing environment visualization
Quality
Problem
The product
deficiency caused
with the foreign
matter is not
eliminated though
the clean booth is
set.
Example of total manufacturing environment visualization
Maintains the cleanliness of clean environments with heat-emitting equipment
Measurement
Measures airborne particles
and differential pressure at
the same time!
Differential Pressure Station
Result
The heat-emitting equipment added to
the production site made inside of the
booth become a negative pressure.
Correlation between differential pressure
level and particle volume revealed!
[Correlation diagram between differential
pressure level and particle volume.]
Particle volume
Presence
of airborne
particles exceeded
the designated
control value
confirmed, but
cause unclear
20000
Particle measurement type
Abnormal conditions
exceeding control value
Differential pressure
+0.6 Pa
1.0 Pa
15000
0.5 Pa
10000
0 Pa
–0.5 Pa
5000
0
Wave Inspire ES
03
Improvement
–0.3 Pa
Before decreasing
size of booth entrance
–1.0 Pa
After decreasing size
of booth entrance
Positive pressure
restored by modifying
the booth entrance
As fluctuations in air
intake and outtake are a
concern, differential
pressure level will be
continuously monitored
henceforth
Major reduction
in particle volume
contributes to
minimizing
product defects
Energy
conservation
Problem
Clean room air
conditioners consume
an enormous amount of
electricity, and should
be turned off when
facility is not in operation.
However, they cannot be
turned off due to
concerns about product
quality.
Power
consumption
Achieving energy saving through continuous visualization of clean state
Measurement
Continuous monitoring
of temperature and
humidity + particles +
differential pressure!
Improvement
Real-time monitoring of
environmental information when
air conditioners are operating,
stopped, and during unexpected
deliveries
Air conditioning is off
at night and during
holidays when facility
is not in operation.
Thermo-Humidity Station
[Air conditioning operation status and
changes in particle volume]
Pparticle volume
Particle measurement type
Delivery of items
Air conditioning
suddenly goes
into operation
20000
15000
Air conditioning OFF
Air conditioning
ON
10000
Differential Pressure Station
30%
of plant total
Result
With continuous monitoring of environment,
air conditioning can
be turned on at the
time of need and as
much as needed.
Major
reduction
5000
0
24H
24H
24H
24H
24H
Thr
Fri
Sat
Sun
Mon
in electricity consumption
of air conditioning
Wave Inspire ES
04
Temperature
& Humidity
Differential
Pressure Level
Particles
Dust
Environmental
Visualization Software Specifications
Thermo-Humidity Station
Temperature and humidity are essential data for quality control on the
manufacturing floor.
Constantly visualize the changes in temperature and humidity at
multiple points.
Highly variable
Temperature
& Humidity
Thermo-Humidity Station is used
at the following places...
Big and legible!
Large and easily viewable LCD display with two rows and five characters in each row.
Start recording with a single push of a button.
Sensor head slot
Heat emission control in various types of
processing equipment
Precision measurement contributes to control severe
temperature and humidity in the processing equipment.
DC cable/
AC adaptor terminal
Precision measurement of temperature and humidity around production lines and equipment.
LAN port
Thermo-Humidity Station
ZN-THX21-SA (Station)
ZN-THS11-S (Sensor head: 1.5 m type)
-25 to 60°C (Accuracy: ±0.3°C)
0% to 99% (Accuracy: ±2.5%)
On the reverse side, there are two types of
holes; for wall-hanging and for fixing.
Magnets are also available (sold separately).
∗ At 25°C, 10% to 85%
20% to 85% (Accuracy: ±2.5%)
Unparalleled measurement
accuracy
Built-in hybrid
logging engine
Precision measurement ensures a temperature
resolution of 0.1°C and humidity accuracy of
plus/minus 2.5%. This enables more precise
control of temperature and humidity, which
contributes to improvement in product quality.
Data can be logged to the unit (SD Card)
while communicating with PC (or PLC)
via LAN. Even in the event of network
error, the unit will continue to record
data. Production technology divisions
can centrally control management via
network while manufacturing floors can
localize control using SD cards.
The station has an alarm output. Unusual
temperature and humidity are made
visible, enabling you to make a quick
response and to make it easy to
systemize manufacturing lines.
Humidity
measurement
accuracy
± 0.3°C
± 2.5%
(at 25°C)
(at 25°C,
10% to 85%)
Temperature and humidity control in
data centers
The Station contributes to heat emission control of
various types of servers in data centers.
Alarm output for immediate
response when trouble
occurs
Temperature
measurement
accuracy
Alarm output
terminal
Easy to hang on wall as well
ZN-THS17-S (Sensor head: Anchored type)
0 to 60°C (Accuracy: ±0.3°C)
SD Card
slot
With back-up using commercially
available AAA batteries, operation
continues even during sudden
power outage
With built-in battery backup, LAN
communication and logging operation
won’t stop even in the event of power
outage or sudden disconnection.
∗ In network mode, operation continues for approximately
two hours on batteries alone. However, battery life will
vary depending on the measurement environment,
battery type, or battery performance.
Bundled with simple, user-friendly PC software
Simple, user-friendly PC software is included as a standard feature
(Station Utility: Setup tool, logging tool, and SD Viewer ES).
Unit setup and data logging are possible via LAN network.
Also, logged data can easily be displayed in the waveform graph.
Setup
Logging
Data display
ity
rd
S D Ca
t
lo
s
id
o-hum
Therm Alert!
Error
Temperature
resolution
0.1°C
Batch setup of multiple units
Indicator light
Manganese batteries cannot be used.
Setting example:
When temperature
exceeds threshold
value, the indicator
light turns on
05
Automatic file output at
regular intervals
Intermittent data files can be integrated to
display in the waveform graph.
To view waveform graphs in real time, and display measured values on a floor plan of the site, it is necessary to
install Wave Inspire ES environmental visualization software.
Calibration service also available
A Certificate of Calibration can be issued upon request. (It is necessary to ship the product back to OMRON.)
To obtain a Certificate of Calibration at time of purchase, please select a type that includes a
Certificate of Calibration.
As the sensor head and station are digitally connected, this calibration service is available only for the
sensor head.
Available
publications
●
Calibration Certificate
●
Inspection Result
●
Traceability Chart
06
Temperature
& Humidity
Differential
Pressure Level
Particles
Dust
Environmental
Visualization Software Specifications
Thermo-Humidity Station
Temperature and humidity are essential data for quality control on the
manufacturing floor.
Constantly visualize the changes in temperature and humidity at
multiple points.
Highly variable
Temperature
& Humidity
Thermo-Humidity Station is used
at the following places...
Big and legible!
Large and easily viewable LCD display with two rows and five characters in each row.
Start recording with a single push of a button.
Sensor head slot
Heat emission control in various types of
processing equipment
Precision measurement contributes to control severe
temperature and humidity in the processing equipment.
DC cable/
AC adaptor terminal
Precision measurement of temperature and humidity around production lines and equipment.
LAN port
Thermo-Humidity Station
ZN-THX21-SA (Station)
ZN-THS11-S (Sensor head: 1.5 m type)
-25 to 60°C (Accuracy: ±0.3°C)
0% to 99% (Accuracy: ±2.5%)
On the reverse side, there are two types of
holes; for wall-hanging and for fixing.
Magnets are also available (sold separately).
∗ At 25°C, 10% to 85%
20% to 85% (Accuracy: ±2.5%)
Unparalleled measurement
accuracy
Built-in hybrid
logging engine
Precision measurement ensures a temperature
resolution of 0.1°C and humidity accuracy of
plus/minus 2.5%. This enables more precise
control of temperature and humidity, which
contributes to improvement in product quality.
Data can be logged to the unit (SD Card)
while communicating with PC (or PLC)
via LAN. Even in the event of network
error, the unit will continue to record
data. Production technology divisions
can centrally control management via
network while manufacturing floors can
localize control using SD cards.
The station has an alarm output. Unusual
temperature and humidity are made
visible, enabling you to make a quick
response and to make it easy to
systemize manufacturing lines.
Humidity
measurement
accuracy
± 0.3°C
± 2.5%
(at 25°C)
(at 25°C,
10% to 85%)
Temperature and humidity control in
data centers
The Station contributes to heat emission control of
various types of servers in data centers.
Alarm output for immediate
response when trouble
occurs
Temperature
measurement
accuracy
Alarm output
terminal
Easy to hang on wall as well
ZN-THS17-S (Sensor head: Anchored type)
0 to 60°C (Accuracy: ±0.3°C)
SD Card
slot
With back-up using commercially
available AAA batteries, operation
continues even during sudden
power outage
With built-in battery backup, LAN
communication and logging operation
won’t stop even in the event of power
outage or sudden disconnection.
∗ In network mode, operation continues for approximately
two hours on batteries alone. However, battery life will
vary depending on the measurement environment,
battery type, or battery performance.
Bundled with simple, user-friendly PC software
Simple, user-friendly PC software is included as a standard feature
(Station Utility: Setup tool, logging tool, and SD Viewer ES).
Unit setup and data logging are possible via LAN network.
Also, logged data can easily be displayed in the waveform graph.
Setup
Logging
Data display
ity
rd
S D Ca
t
lo
s
id
o-hum
Therm Alert!
Error
Temperature
resolution
0.1°C
Batch setup of multiple units
Indicator light
Manganese batteries cannot be used.
Setting example:
When temperature
exceeds threshold
value, the indicator
light turns on
05
Automatic file output at
regular intervals
Intermittent data files can be integrated to
display in the waveform graph.
To view waveform graphs in real time, and display measured values on a floor plan of the site, it is necessary to
install Wave Inspire ES environmental visualization software.
Calibration service also available
A Certificate of Calibration can be issued upon request. (It is necessary to ship the product back to OMRON.)
To obtain a Certificate of Calibration at time of purchase, please select a type that includes a
Certificate of Calibration.
As the sensor head and station are digitally connected, this calibration service is available only for the
sensor head.
Available
publications
●
Calibration Certificate
●
Inspection Result
●
Traceability Chart
06
Temperature
& Humidity
Differential
Pressure Level
Particles
Dust
Environmental
Visualization Software Specifications
Differential Pressure Station
Precision measurement of differential pressure inside and outside of
clean room or booth.
Clearly visualize differential pressure shifts at all times.
Monitor an invasion of
foreign matter
Differential
Pressure Level
Thermo-Humidity Station is used
at the following places...
Big and legible!
Large and easily viewable LCD display with two rows and five characters in each row.
Start recording with a single push of a button.
Positive pressure control in large-scale
clean booths
Sensor head slot
Contributes to control of positive pressure due to
fluctuations in air intake and outtake in the booth and
clogging of FFU filters
DC cable/
AC adaptor terminal
LAN port
Precision measurement of differential pressure inside and outside of clean room or booth.
Differential Pressure Station
ZN-DPX21-SA (Station)
SD Card
slot
Alarm output
terminal
Easy to hang on wall as well
ZN-DPS11-S (Sensor head: 1.5 m type)
On the reverse side, there are two types of
holes; for wall-hanging and for fixing.
Magnets are also available (sold separately).
ZN-DPS15-S (Sensor head: 10 m type)
–500 to 500 Pa (Accuracy: Within ±3%∗ of indicated value)
Control of differential pressure in air
shower rooms
∗ Zero point accuracy: ±0.2 Pa
Effective for control of positive pressure level in air
shower and interlock control after air shower is finished
Ultra wide-range precision
measurement
Built-in hybrid
logging engine
Easily construct a wide
range of control systems
This ensures a range of minus 500 to plus
500 Pa and diffential pressure accuracy
of plus/minus 3%. With more accurate
differential pressure control, clean room
environments can be effectively maintained.
Data can be logged to the unit (SD Card)
while communicating with PC (or PLC)
via LAN. Even in the event of network
failure, the unit will continue to record
data. Production technology divisions
can centrally control management via
network while manufacturing floors can
localize control using SD cards.
Built-in alarm output makes the station
an effective part of all kinds of control
systems.
Measurement
range
Measurement
accuracy
-500 Pa
to
∗
Within
of indicated value
+500 Pa
∗ Zero point
accuracy: ±0.2 Pa
±3%
rd
S D Ca
t
lo
s
Positive pressure level alert for clean
environments
● Automatic control of air conditioning
level based on differential pressure level
●
output
Alarm rential
fe
if
d
e
if th
re is
pressu the
an
th
s
s
le
rd.
standa
●
●
07
Display of differential
pressure trouble alerts
Optimal eco-friendly air
conditioning level in response
to differential pressure level
Simple, user-friendly PC software is included
as a standard feature (Station Utility: Setup
tool, logging tool, and SD Viewer ES). Unit
setup and data logging can be possible via
LAN network. Also, logged data can be
easily displayed in a waveform graph.
Positive pressure level in a clean booth is easily
checked using this Differential Pressure Station.
1
Prepare
2
3
Install
Measure
With back-up using commercially
available AAA batteries, operation
continues even during sudden
power outage
With built-in battery backup feature, LAN
transmission and logging operation won’t
stop even in the event of power outage or
sudden disconnection.
Indicator light
[Air conditioning systems
for clean environments]
Simple visualization software
included as a standard.
∗ In network mode, operation continues for
approximately two hours on batteries alone.
However, battery life will vary depending on
the measurement environment, battery Manganese batteries
type, or battery performance.
cannot be used.
Insert a tube into differential
pressure sensor head.
With head mounted outside
the booth, the hi-side of the
tube is inserted in the booth
(positive pressure side).
Start using immediately
upon purchase.
Dedicated tube
included.
Compact head size
makes it easy to mount
and measure at any time.
Differential pressure levels
inside and outside of the
booth are displayed.
Simply turn on and start
measuring right away.
Calibration service also available
A Certificate of Calibration can be issued upon request. (It is necessary to ship the product back to OMRON.)
To obtain a Certificate of Calibration at time of purchase, please select a type that includes a
Certificate of Calibration.
As the sensor head and station are digitally connected, this calibration service is available only for the
sensor head.
Available
publications
●
CalibrationCertificate
●
Inspection Result
●
Traceability Chart
08
Temperature
& Humidity
Differential
Pressure Level
Particles
Dust
Environmental
Visualization Software Specifications
Differential Pressure Station
Precision measurement of differential pressure inside and outside of
clean room or booth.
Clearly visualize differential pressure shifts at all times.
Monitor an invasion of
foreign matter
Differential
Pressure Level
Thermo-Humidity Station is used
at the following places...
Big and legible!
Large and easily viewable LCD display with two rows and five characters in each row.
Start recording with a single push of a button.
Positive pressure control in large-scale
clean booths
Sensor head slot
Contributes to control of positive pressure due to
fluctuations in air intake and outtake in the booth and
clogging of FFU filters
DC cable/
AC adaptor terminal
LAN port
Precision measurement of differential pressure inside and outside of clean room or booth.
Differential Pressure Station
ZN-DPX21-SA (Station)
SD Card
slot
Alarm output
terminal
Easy to hang on wall as well
ZN-DPS11-S (Sensor head: 1.5 m type)
On the reverse side, there are two types of
holes; for wall-hanging and for fixing.
Magnets are also available (sold separately).
ZN-DPS15-S (Sensor head: 10 m type)
–500 to 500 Pa (Accuracy: Within ±3%∗ of indicated value)
Control of differential pressure in air
shower rooms
∗ Zero point accuracy: ±0.2 Pa
Effective for control of positive pressure level in air
shower and interlock control after air shower is finished
Ultra wide-range precision
measurement
Built-in hybrid
logging engine
Easily construct a wide
range of control systems
This ensures a range of minus 500 to plus
500 Pa and diffential pressure accuracy
of plus/minus 3%. With more accurate
differential pressure control, clean room
environments can be effectively maintained.
Data can be logged to the unit (SD Card)
while communicating with PC (or PLC)
via LAN. Even in the event of network
failure, the unit will continue to record
data. Production technology divisions
can centrally control management via
network while manufacturing floors can
localize control using SD cards.
Built-in alarm output makes the station
an effective part of all kinds of control
systems.
Measurement
range
Measurement
accuracy
-500 Pa
to
∗
Within
of indicated value
+500 Pa
∗ Zero point
accuracy: ±0.2 Pa
±3%
rd
S D Ca
t
lo
s
Positive pressure level alert for clean
environments
● Automatic control of air conditioning
level based on differential pressure level
●
output
Alarm rential
fe
if
d
e
if th
re is
pressu the
an
th
s
s
le
rd.
standa
●
●
07
Display of differential
pressure trouble alerts
Optimal eco-friendly air
conditioning level in response
to differential pressure level
Simple, user-friendly PC software is included
as a standard feature (Station Utility: Setup
tool, logging tool, and SD Viewer ES). Unit
setup and data logging can be possible via
LAN network. Also, logged data can be
easily displayed in a waveform graph.
Positive pressure level in a clean booth is easily
checked using this Differential Pressure Station.
1
Prepare
2
3
Install
Measure
With back-up using commercially
available AAA batteries, operation
continues even during sudden
power outage
With built-in battery backup feature, LAN
transmission and logging operation won’t
stop even in the event of power outage or
sudden disconnection.
Indicator light
[Air conditioning systems
for clean environments]
Simple visualization software
included as a standard.
∗ In network mode, operation continues for
approximately two hours on batteries alone.
However, battery life will vary depending on
the measurement environment, battery Manganese batteries
type, or battery performance.
cannot be used.
Insert a tube into differential
pressure sensor head.
With head mounted outside
the booth, the hi-side of the
tube is inserted in the booth
(positive pressure side).
Start using immediately
upon purchase.
Dedicated tube
included.
Compact head size
makes it easy to mount
and measure at any time.
Differential pressure levels
inside and outside of the
booth are displayed.
Simply turn on and start
measuring right away.
Calibration service also available
A Certificate of Calibration can be issued upon request. (It is necessary to ship the product back to OMRON.)
To obtain a Certificate of Calibration at time of purchase, please select a type that includes a
Certificate of Calibration.
As the sensor head and station are digitally connected, this calibration service is available only for the
sensor head.
Available
publications
●
Calibration Certificate
●
Inspection Result
●
Traceability Chart
08
Temperature
& Humidity
Differential
Pressure Level
Particles
Dust
Environmental
Visualization Software Specifications
Air Particle Sensor
Dust fallout and airborne particles detract
from product quality.
Continuously monitor these two factors to
minimize their effects.
Particles
generated by human body
and equipment
Particles (0.5 µm)
Particles volume
1200
Dust (20 µm)
14
12
1000
10
800
8
600
6
400
4
200
Dust volume
Dust
Fallout
Airborne
2
0
12:00
0
13:00
14:00
15:00
16:00
17:00
18:00
Airborne particles and dust fallout
are not correlated due to differences
in their behavior.
Therefore, it is necessary to
measure both of them separately
and accurately.
Putting the particle type on the wall
of the room, and the dust type in the
vicinity of product processing
equipment, is recommended.
Thermo-Humidity Station is used
at the following places...
Dust control for secondary battery
manufacturing equipment (Dust)
Installation is easy since it can be mounted to DIN rail.
You can measure anywhere.
Simply turn on and start
measuring right away.
Continuously and accurately measures airborne particles.
Directly measures falling dust that threatens product quality.
Air Particle Sensor
Air Particle Sensor
Particle measurement type
Dust measurement type
ZN-PD03-SA
ZN-PD50-SA
0.3 µm
0.5 µm
1.0 µm
5 (10) µm
20 (30) µm
Clean room management in FPD plant
(Particles)
Adjustment of particle diameter
setting is simple
50 µm
Control of carry-in items in automotive
painting process (microparticles)
∗ It cannot be used in explosion-proof painting booths.
Particle measurement type
Dust measurement type
Highly accurate measurement
comparable to particle counters
One unit for measuring dust fallout
and identifying dust sources
Compact design ideal for
continuous monitoring
Wide range of interfaces
allow for extension
A high power suction fan and the internal
structure designed to rectify airflow ensure
a suction rate of 2.83 /min .∗ Accuracy is
close to purpose-specific particle counters
thanks to laser optics design technology
that Omron has cultivated with high
precision displacement sensors.
Funnel-shaped intake and powerful
suction fan efficiently capture falling
dust. Large diameter dust is trapped by a
built-in filter. Moreover, trapped dust can
be collected using two-sided tape
attached inside of the pull-out trap box.
The dust can then be analyzed under
microscope to identify the source.
The number of maintenance times and
chores are reduced as the fan is capable of
longtime operation, and the intermittent
emission mode prolongs the service life of
the laser. Maintenance costs are also
reduced because the product does not use
an external pump that would normally
require frequent replacement.
Inputs and outputs include trigger input,
alarm output x 2, and error output, which
can be used for a variety of purposes
including dust level setting, alarm output,
timed measurement, and so forth.
Compa
ct
size
Integrated airborne particle sensor and thermohumidity sensor also available. Achieve your ideal
temperature and humidity measurement.
Temperature display
Humidity display
Input/O
utput
termin
als
Air Thermo Sensor
Trigger input
Alarm output x 2
Error output
Easily detachable
filter
Triggers can be input to initiate monitoring when necessary
and alarms can be output at desired control levels.
Temperature, humidity and simple dew point can be easily
displayed when connected to an Air Particle Sensor∗. And,
the unit delivers the highest class of sensing performance.
You will benefit from wide measurement ranges and highly
accurate humidity measuring.
Temperature and humidity
measurement type
ZN-TH11-S
Temperature Humidity Simple dew point
∗ There are limitations on the particle sensors that can be connected to the Air Thermo Sensor. Please refer to the
“Specifications / Performance” information.
The dew point can be handily calculated by using the measured values for temperature and humidity.
Calibration service also available
Particles are counted by irradiating the incoming airflow with
a laser and detecting the scattering light from the particles.
∗ Suction rate detected by particle measuring sensor.
Suction rate for dust measuring sensors is 6.0 /min.
09
Small enough to fit into the palm of the hand,
the unit can be easily installed on walls, etc.
Trap box
∗ The larger the size, the more dust it traps.
Some types of dust may penetrate the trap box.
A Certificate of Calibration can be issued upon request. (It is necessary to ship the product back to
OMRON.)
To obtain a Certificate of Calibration at time of purchase, please select a type that includes a
Certificate of Calibration.
CalibrationCertificate
Available
publications
Inspection Result
Traceability Chart
10
Temperature
& Humidity
Differential
Pressure Level
Particles
Dust
Environmental
Visualization Software Specifications
Air Particle Sensor
Dust fallout and airborne particles detract
from product quality.
Continuously monitor these two factors to
minimize their effects.
Particles
generated by human body
and equipment
Particles (0.5 µm)
Particles volume
1200
Dust (20 µm)
14
12
1000
10
800
8
600
6
400
4
200
Dust volume
Dust
Fallout
Airborne
2
0
12:00
0
13:00
14:00
15:00
16:00
17:00
18:00
Airborne particles and dust fallout
are not correlated due to differences
in their behavior.
Therefore, it is necessary to
measure both of them separately
and accurately.
Putting the particle type on the wall
of the room, and the dust type in the
vicinity of product processing
equipment, is recommended.
Thermo-Humidity Station is used
at the following places...
Dust control for secondary battery
manufacturing equipment (Dust)
Installation is easy since it can be mounted to DIN rail.
You can measure anywhere.
Simply turn on and start
measuring right away.
Continuously and accurately measures airborne particles.
Directly measures falling dust that threatens product quality.
Air Particle Sensor
Air Particle Sensor
Particle measurement type
Dust measurement type
ZN-PD03-SA
ZN-PD50-SA
0.3 µm
0.5 µm
1.0 µm
5 (10) µm
20 (30) µm
Clean room management in FPD plant
(Particles)
Adjustment of particle diameter
setting is simple
50 µm
Control of carry-in items in automotive
painting process (microparticles)
∗ It cannot be used in explosion-proof painting booths.
Particle measurement type
Dust measurement type
Highly accurate measurement
comparable to particle counters
One unit for measuring dust fallout
and identifying dust sources
Compact design ideal for
continuous monitoring
Wide range of interfaces
allow for extension
A high power suction fan and the internal
structure designed to rectify airflow ensure
a suction rate of 2.83 /min .∗ Accuracy is
close to purpose-specific particle counters
thanks to laser optics design technology
that Omron has cultivated with high
precision displacement sensors.
Funnel-shaped intake and powerful
suction fan efficiently capture falling
dust. Large diameter dust is trapped by a
built-in filter. Moreover, trapped dust can
be collected using two-sided tape
attached inside of the pull-out trap box.
The dust can then be analyzed under
microscope to identify the source.
The number of maintenance times and
chores are reduced as the fan is capable of
longtime operation, and the intermittent
emission mode prolongs the service life of
the laser. Maintenance costs are also
reduced because the product does not use
an external pump that would normally
require frequent replacement.
Inputs and outputs include trigger input,
alarm output x 2, and error output, which
can be used for a variety of purposes
including dust level setting, alarm output,
timed measurement, and so forth.
Compa
ct
size
Integrated airborne particle sensor and thermohumidity sensor also available. Achieve your ideal
temperature and humidity measurement.
Temperature display
Humidity display
Input/O
utput
termin
als
Air Thermo Sensor
Trigger input
Alarm output x 2
Error output
Easily detachable
filter
Triggers can be input to initiate monitoring when necessary
and alarms can be output at desired control levels.
Temperature, humidity and simple dew point can be easily
displayed when connected to an Air Particle Sensor∗. And,
the unit delivers the highest class of sensing performance.
You will benefit from wide measurement ranges and highly
accurate humidity measuring.
Temperature and humidity
measurement type
ZN-TH11-S
Temperature Humidity Simple dew point
∗ There are limitations on the particle sensors that can be connected to the Air Thermo Sensor. Please refer to the
“Specifications / Performance” information.
The dew point can be handily calculated by using the measured values for temperature and humidity.
Calibration service also available
Particles are counted by irradiating the incoming airflow with
a laser and detecting the scattering light from the particles.
∗ Suction rate detected by particle measuring sensor.
Suction rate for dust measuring sensors is 6.0 /min.
09
Small enough to fit into the palm of the hand,
the unit can be easily installed on walls, etc.
Trap box
∗ The larger the size, the more dust it traps.
Some types of dust may penetrate the trap box.
A Certificate of Calibration can be issued upon request. (It is necessary to ship the product back to
OMRON.)
To obtain a Certificate of Calibration at time of purchase, please select a type that includes a
Certificate of Calibration.
Calibration Certificate
Available
publications
Inspection Result
Traceability Chart
10
Temperature
& Humidity
Environmental
Visualization Software
Differential
Pressure Level
Particles
Environmental
Visualization Software Specifications
Dust
Specifications Thermo-Humidity Station
Ordering Information
Specifications
Main unit
Sensor head
Appearance
Centralized management of environmental information using software
visualizing the workplace environment.
Find solutions to workplace problems by verifying data trends.
Item
Model
Sensor head
1.5 m type
ZN-THS11C-S∗
ZN-THS17-S
Sensor head
Anchored type
Model ZN-THS 11-S (Sensor head: 1.5 m type) ZN-THS 17-S (Sensor head: Anchored type)
Item
ZN-THS11-S
Measurement range
TemperMeasurement precision
ature
Resolution
ZN-THS17C-S∗
∗ Please choose this form when you buy with the calibration certificate.
Contents of Certificate of Calibration Set: Calibration Certificate, Inspection Result, and Traceability Chart
Accessories (Order separately)
Appearance
Air Particle Sensor
Particle
measurement type
Air Particle Sensor
Dust
measurement type
0.1°C
0% to 99%
20% to 85%
±2.5% (at 25°C , 10 to 85%)
0.1%
Approx. 300 g
Weight (packaged)
Instruction sheet
Mounting screw (M3 x 8) x 1
Caps to secure cable
Instruction sheet
Mounting screw (M3 x 8) x 1
ZN-THX21-SA
Station
Differential
Pressure Station
0 to 60°C
±0.3°C (at 25°C)
Zero point
Relative
humidity Span
Resolution
Accessories
Thermo-Humidity
Station
−25 to +60°C
Item
Model
Mounting Magnet ∗1
ZN9-EM01-S
• As performance may deteriorate through the adhesion of impurities or contaminants in the environment on
the sensor surface, calibration is recommended once a year.
-S is exposed over a long period of time at a high humidity of 80% or higher, the
• When ZN-THS1
humidity measurement value may be offset.
In that case, expose the product at room temperature and humidity for 24 hours prior to use.
• When ZN-THS1
-S is transferred rapidly between the places where temperature difference is large,
condensation may occur on the sensor surface.
-S may not work properly.
In that case, the ZN-THS1
When the product becomes wet due to condensation, allow the product to dry in dry, room temperature
environment before use.
• When using the ZN-THS1
-S under conditions with temperature of -20°C or less or with humidity of 90%
or more, acceleration of sensor deterioration may occur.
• To avoid deterioration of sensor, avoid storing the product under high temperature and high humidity for a
long period of time.
• Please don’t use the product in the environment to which organic chemistry material disperses.
Station
Item
Straight type
DC cable (2 m)
(ZN9-ED01-S comes with ZN-THX21-SA)
ZN9-ED01-S
Display
AC Adaptor for ZNX-SA
Power supply voltage: 100 to 240 VAC/50 to 60 Hz
Operating temperature range: 0 to 40°C
Right angle type
ZN9-ED02-S
PSE, CE, UL STD/
A-type plug
ZN9-ACP01-S
Environmental Visualization Software
Wave Inspire ES ∗2 ∗3 ∗4
ZN-SW11-S
ZN-THX21-SA
Model
Sensor that can be connected Thermo-Humidity Sensor Head (ZN-THS
-S)
LCD 7-segment 5-digit 2-step display, auxiliary information indicator display
Measurement interval 10 s, 20 s, 30 s, 1 min, 2 min, 5 min, 10 min, 20 min, 30 min, 1 h
Calculation function
Instantaneous value, maximum value, minimum value, average value
Operating mode
Network connection mode, sleep mode ∗1
air particle sensor (ZN-PD
-S ) connection mode ∗2
Recording mode
Continue ∗3, ring ∗4
Alarm signal output
Output to photocoupler (External power supply: 12 to 24 VDC,
Load current: Max. 45 mA) Alarm hold setting is possible. ∗5
Communications interface Ethernet (10BASE-T, 100BASE-TX)
Communications protocol Socket (TCP), original protocol
OPTION
Environmental Visualization Software
Centralized management
of measured data
ZN SW11 S
ZN-SW11-S
∗1 When the magnet is used, the vibration resistance becomes 55 Hz or less. (Two logger installation screws are
attached.)
∗2 System requirements OS: Windows XP / Windows Vista / Windows 7 (64 Bit not supported)
CPU: compatible Intel processors, 1 GHz or higher. Memory: 1 GB or more (2 GB or more recommended)
∗3 The compliant version is Ver2.1.0 or later
∗4 The maximum number of connectable sensors is 95.
(When one PC is connected with a leased line network . The sampling period is set to 10 minutes.)
The number of possible sensor connections changes by a sampling period, connected number of
PC or PLC, and the network load situation.
Diverse data measured by sensors and stations can
be logged collectively. Measurement data can be
viewed as a list, or measured values can be digitally
represented on a map.
Scale setting for each measured factor
Display of maximums, minimums and
averages
Simultaneously viewing of multiple
windows
Alarm judgment
display
CSV output
Microsoft Excel
transfer function
External storage device SD card with SDHC support ∗7 (measured value saving, set value saving and reading)
Power supply voltage
Battery life
∗9
DC input: 24 VDC ±10%
Battery: 2 AAA batteries ∗8
Approx. 1 year ∗9 (sleep mode)
Approx. 2 hours ∗9 (Network connection mode, air particle sensor
(ZN-PD
-SA) connection mode)
Measurement interval of 10 minutes (with 2 AAA nickel metal hydride
batteries, with SD card not inserted)
Operating temperature range 0 to 60°C
Operating humidity range 20% to 85% (no condensation)
Calibration service
Subject to calibration
Centralized management of manufacturing floor environmental information
Internal storage device Internal memory: Approx. 8,500 data items ∗6
Content
Model
Sensor head
1.5 m type
Calibration Certificate, Inspection Result
Traceability chart
ZN-THS11-CAL
Sensor head
Anchored type
Calibration Certificate, Inspection Result
Traceability chart
ZN-THS17-CAL
∗ If a Certificate of Calibration is required after you purchase the sensor head, use the above model number to order one.
∗ As the sensor head and station are digitally connected, only the sensor head is subject to calibration.
∗ It is necessary to ship the product back to OMRON in Japan.
External Dimensions
Tolerance class IT16 applies to the dimensions unless otherwise specified.
Weight (packaged)
Approx. 500 g
Accessories
Instruction Sheet, Startup Guide, DC cable (straight type), Ferrite core,
CD-ROM ∗10, Alarm output connector ∗11
∗1 Power saving mode. The indicator is always OFF in default setting. (Turns ON with button operation.)
Network communications with host devices cannot be made.
-S ) and enables
∗2 This mode makes one-to-one network connection with Air Particle Sensor (ZN-PD
logging of the particle count value and thermal data simultaneously to the SD card.
Network communications with host devices cannot be made.
∗3 Automatically writes data to the SD card when reaching the upper limit of the internal memory and keeps
recording until the capacity limit of the SD card. If the SD card is not inserted when the internal memory
reaches the upper limit, recording stops. (Data can be output to the SD card by pressing the button after
inserting the SD card.)
∗4 This mode always records the latest measured values for the upper limit of the internal memory. (When the
measured values exceed the upper limit of the internal memory, the data items will be deleted beginning
with the oldest data item.)
∗5 An alarm is shown when exceeding the upper limit value or lower limit value that has been set in threshold
setting mode.
∗6 Air particle sensor connection mode is excluded.
∗7 An OMRON HMC-SD291 SD Memory Card or an SDHC Class 4 or higher memory card is recommended.
∗8 Nickel hydride battery and alkaline battery can be used. Manganese batteries cannot be used.
∗9 Battery life differs depending on measurement environment, sampling, operating mode, battery type or
performance.
∗10 System Requirements for Enclosed PC Software (Station Utility: Setup Tool, Logging Tool, and SD Viewer ES)
OS: Windows XP / Windows Vista / Windows 7 (64 Bit not supported)
CPU: compatible Intel processors, 1 GHz or higher.
Memory: 1 GB or more (2 GB or more recommended)
∗11 The connector is type XW4B-02B1-H1, made by OMRON.
ZN-THX21-SA (Unit: mm)
ZN-THS11-S (Unit: mm)
Vinyl Insulated Round Cable 3.4 Dia.
Standard Length 1.5 m
40
Mounting Screw Holes
2-M3 Hole Depth 4
ZN-THS17-S (Unit: mm)
117.2
44.3
Sensor Head Connector
3
Mounting Screw Holes
DC cable
AC Adaptor Terminal
MODE Key
Item Selection Key
(Up)
Item Selection Key
(Down)
40
60
Reset Switch
70
SD Card Slot
Alarm Output Terminal
45
LAN Port
11
15
ZN9-ACP01-S (Unit: mm)
30.5 8
Maximum, minimum and average
28.2
0.7
2 types of indications
Pop-up message if alarms occur
21.3
16
11
3.5 Dia.
Mounting Hole
REC/STOP/SET Key
24.6
Scale setting for each particle size
16
10.8
Screw Hook Holes
2.4
2-M3
3.5 Dia.
3 Mounting Hole
7.4
The necessary data items can be
selected from amongst large volumes of
logged data to convert to Excel-readable
CSV files.
52.7
59
An alarm will sound when levels exceed
the set control values. The spot where
the trouble has occurred can be
identified by a quick glance.
60
Screw Hook Holes
85.9
Trends by location, time and date are
available at a glance. The maximum,
minimum and average number of particles in a set period of time can also be
displayed.
3.5 Dia.
21.8
Selected data transferred
to Excel
56.8
Mapping of sensor locations
and measurement results
49.4
48.6
Real-time analysis of
measured data
16.7
21
6 Dia.
1800±50
∗ The number of sensors that you can connect to the ZN-SW11-S Environmental Visualization Software will depend on your operating conditions.
11
12
Temperature
& Humidity
Differential
Pressure Level
Particles
Environmental
Visualization Software Specifications
Dust
Specifications Thermo-Humidity Station
Ordering Information
Specifications
Main unit
Sensor head
Appearance
Item
Model
Sensor head
1.5 m type
ZN-THS11C-S∗
ZN-THS17-S
Sensor head
Anchored type
Model ZN-THS 11-S (Sensor head: 1.5 m type) ZN-THS 17-S (Sensor head: Anchored type)
Item
ZN-THS11-S
Measurement range
TemperMeasurement precision
ature
Resolution
−25 to +60°C
0.1°C
Zero point
Relative
humidity Span
Resolution
ZN-THS17C-S∗
0 to 60°C
±0.3°C (at 25°C)
0% to 99%
20% to 85%
±2.5% (at 25°C , 10 to 85%)
0.1%
Approx. 300 g
Weight (packaged)
Accessories
Instruction sheet
Mounting screw (M3 x 8) x 1
Caps to secure cable
Instruction sheet
Mounting screw (M3 x 8) x 1
ZN-THX21-SA
Station
∗ Please choose this form when you buy with the calibration certificate.
Contents of Certificate of Calibration Set: Calibration Certificate, Inspection Result, and Traceability Chart
Accessories (Order separately)
Appearance
Item
Model
Mounting Magnet ∗1
ZN9-EM01-S
• As performance may deteriorate through the adhesion of impurities or contaminants in the environment on
the sensor surface, calibration is recommended once a year.
• When ZN-THS1
-S is exposed over a long period of time at a high humidity of 80% or higher, the
humidity measurement value may be offset.
In that case, expose the product at room temperature and humidity for 24 hours prior to use.
-S is transferred rapidly between the places where temperature difference is large,
• When ZN-THS1
condensation may occur on the sensor surface.
In that case, the ZN-THS1
-S may not work properly.
When the product becomes wet due to condensation, allow the product to dry in dry, room temperature
environment before use.
-S under conditions with temperature of -20°C or less or with humidity of 90%
• When using the ZN-THS1
or more, acceleration of sensor deterioration may occur.
• To avoid deterioration of sensor, avoid storing the product under high temperature and high humidity for a
long period of time.
• Please don’t use the product in the environment to which organic chemistry material disperses.
Station
Item
Straight type
DC cable (2 m)
(ZN9-ED01-S comes with ZN-THX21-SA)
ZN9-ED01-S
Display
AC Adaptor for ZNX-SA
Power supply voltage: 100 to 240 VAC/50 to 60 Hz
Operating temperature range: 0 to 40°C
Right angle type
ZN9-ED02-S
PSE, CE, UL STD/
A-type plug
ZN9-ACP01-S
Environmental Visualization Software
Wave Inspire ES ∗2 ∗3 ∗4
ZN-SW11-S
ZN-THX21-SA
Model
Sensor that can be connected Thermo-Humidity Sensor Head (ZN-THS
-S)
LCD 7-segment 5-digit 2-step display, auxiliary information indicator display
Measurement interval 10 s, 20 s, 30 s, 1 min, 2 min, 5 min, 10 min, 20 min, 30 min, 1 h
Calculation function
Instantaneous value, maximum value, minimum value, average value
Operating mode
Network connection mode, sleep mode ∗1
air particle sensor (ZN-PD
-S ) connection mode ∗2
Recording mode
Continue ∗3, ring ∗4
Alarm signal output
Output to photocoupler (External power supply: 12 to 24 VDC,
Load current: Max. 45 mA) Alarm hold setting is possible. ∗5
Communications interface Ethernet (10BASE-T, 100BASE-TX)
Communications protocol Socket (TCP), original protocol
∗1 When the magnet is used, the vibration resistance becomes 55 Hz or less. (Two logger installation screws are
attached.)
∗2 System requirements OS: Windows XP / Windows Vista / Windows 7 (64 Bit not supported)
CPU: compatible Intel processors, 1 GHz or higher. Memory: 1 GB or more (2 GB or more recommended)
∗3 The compliant version is Ver2.1.0 or later
∗4 The maximum number of connectable sensors is 95.
(When one PC is connected with a leased line network . The sampling period is set to 10 minutes.)
The number of possible sensor connections changes by a sampling period, connected number of
PC or PLC, and the network load situation.
External storage device
SD card (to save measured values and to save/read set values),
Recommended SD card: HMC-SD291 (manufactured by OMRON) ∗7
Power supply voltage
DC input: 24 VDC ±10%
Battery: 2 AAA batteries ∗8
Battery life ∗9
Approx. 1 year ∗9 (sleep mode)
Approx. 2 hours ∗9 (Network connection mode, air particle sensor
(ZN-PD
-SA) connection mode)
Measurement interval of 10 minutes (with 2 AAA nickel metal hydride
batteries, with SD card not inserted)
Operating temperature range 0 to 60°C
Calibration service
Subject to calibration
Content
Operating humidity range 20% to 85% (no condensation)
Model
Sensor head
1.5 m type
Calibration Certificate, Inspection Result
Traceability chart
ZN-THS11-CAL
Sensor head
Anchored type
Calibration Certificate, Inspection Result
Traceability chart
ZN-THS17-CAL
∗ If a Certificate of Calibration is required after you purchase the sensor head, use the above model number to order one.
∗ As the sensor head and station are digitally connected, only the sensor head is subject to calibration.
∗ It is necessary to ship the product back to OMRON in Japan.
External Dimensions
Internal storage device Internal memory: Approx. 8,500 data items ∗6
Tolerance class IT16 applies to the dimensions unless otherwise specified.
Weight (packaged)
Approx. 500 g
Accessories
Instruction Sheet, Startup Guide, DC cable (straight type), Ferrite core,
CD-ROM ∗10, Alarm output connector ∗11
∗1 Power saving mode. The indicator is always OFF in default setting. (Turns ON with button operation.)
Network communications with host devices cannot be made.
-S ) and enables
∗2 This mode makes one-to-one network connection with Air Particle Sensor (ZN-PD
logging of the particle count value and thermal data simultaneously to the SD card.
Network communications with host devices cannot be made.
∗3 Automatically writes data to the SD card when reaching the upper limit of the internal memory and keeps
recording until the capacity limit of the SD card. If the SD card is not inserted when the internal memory
reaches the upper limit, recording stops. (Data can be output to the SD card by pressing the button after
inserting the SD card.)
∗4 This mode always records the latest measured values for the upper limit of the internal memory. (When the
measured values exceed the upper limit of the internal memory, the data items will be deleted beginning
with the oldest data item.)
∗5 An alarm is shown when exceeding the upper limit value or lower limit value that has been set in threshold setting mode.
∗6 Air particle sensor connection mode is excluded.
∗7 If you use an SD card from another manufacturer, use an SDHC Class 4 or higher card. (You must confirm
the operation of the SD card yourself.)
∗8 Nickel hydride battery and alkaline battery can be used. Manganese batteries cannot be used.
∗9 Battery life differs depending on measurement environment, sampling, operating mode, battery type or performance.
∗10 System Requirements for Enclosed PC Software (Station Utility: Setup Tool, Logging Tool, and SD Viewer ES)
OS: Windows XP / Windows Vista / Windows 7 (64 Bit not supported)
CPU: compatible Intel processors, 1 GHz or higher.
Memory: 1 GB or more (2 GB or more recommended)
∗11 The connector is type XW4B-02B1-H1, made by OMRON.
ZN-THX21-SA (Unit: mm)
ZN-THS11-S (Unit: mm)
Vinyl Insulated Round Cable 3.4 Dia.
Standard Length 1.5 m
3.5 Dia.
16
16.7
21
6 Dia.
60
Screw Hook Holes
40
10.8
2.4
Screw Hook Holes
Mounting Screw Holes
2-M3 Hole Depth 4
ZN-THS17-S (Unit: mm)
117.2
44.3
Sensor Head Connector
3
Mounting Screw Holes
3.5 Dia.
3 Mounting Hole
7.4
2-M3
52.7
Reset Switch
59
21.8
Item Selection Key
(Down)
40
60
85.9
MODE Key
Item Selection Key
(Up)
REC/STOP/SET Key
0.7
28.2
24.6
70
SD Card Slot
Alarm Output Terminal
45
LAN Port
11
15
ZN9-ACP01-S (Unit: mm)
30.5 8
49.4
48.6
56.8
DC cable
AC Adaptor Terminal
21.3
16
11
3.5 Dia.
Mounting Hole
1800±50
12
Specifications Differential Pressure Station
Ordering Information
Specifications
Main unit
Sensor head
Appearance
Item
Model
Item
ZN-DPS11-S
Sensor head
1.5 m type
Measurement precision
3%±0.2 Pa of the measured value (at 23°C, 966 mbar)∗
0.1 Pa
No effects (lower than measurement resolution)
Zero point
Temperature
effect
ZN-DPS15-S
ZN-DPS15-S
-500 to 500 Pa
Resolution
ZN-DPS11C-S∗
Sensor head
10 m type
ZN-DPS11-S
Type
Measurement range
Differential
pressure
Less than 0.5% of the specified value/10°C
Span
Operating temperature range
ZN-DPS15C-S∗
0 to 50°C
Applicable gas type
Air, nitrogen
Cable length
1.5 m
Weight (packaged)
Approx. 500 g
Instruction Sheet, air tube 1 m x 2,
mounting screw (M3 x 6) x 2
ZN-DPX21-SA
Station
Accessories
∗ For the precision under a rated environment, an offset less than 0.1 Pa/year may occur.
∗ The accessories tube inside diameter is 4 mm, and the outside diameter is 6 mm.
∗ Please choose this form when you buy with the calibration certificate.
Contents of Certificate of Calibration Set: Calibration Certificate, Inspection Result, and Traceability Chart
Accessories (Order separately)
Appearance
10 m
Station
Item
Model
Item
ZN-DPX21-SA
Model
Sensor that can be connected Fine differential pressure sensor head (ZN-DPS1
Mounting Magnet
∗1
ZN9-EM01-S
Display
-S)
LCD 7-segment 5-digit 2-step display, auxiliary information indicator display
Measurement interval 10 s, 20 s, 30 s, 1 min, 2 min, 5 min, 10 min, 20 min, 30 min, 1 h
Straight type
DC cable (2 m)
(ZN9-ED01-S comes with ZN-DPX21-SA)
Right angle type
AC Adaptor for ZNX-SA
Power supply voltage: 100 to 240 VAC/50 to 60 Hz
Operating temperature range: 0 to 40°C
PSE, CE, UL STD/
A-type plug
ZN9-ED01-S
ZN9-ED02-S
ZN9-ACP01-S
Calculation function
Instantaneous value, maximum value, minimum value, average value
Operating mode
Network connection mode, sleep mode ∗1
air particle sensor (ZN-PD
-S ) connection mode ∗2
Recording mode
Continue ∗3, ring ∗4
Alarm signal output
Output to photocoupler (External power supply: 12 to 24 VDC,
Load current: Max. 45 mA) Alarm hold setting is possible. ∗5
Communications interface Ethernet (10BASE-T, 100BASE-TX)
Communications protocol Socket (TCP), original protocol
Internal storage device Internal memory: Approx. 8,500 data items ∗6
Environmental Visualization Software
Wave Inspire ES ∗2 ∗3 ∗4
ZN-SW11-S
External storage device
∗1 When the magnet is used, the vibration resistance becomes 55 Hz or less. (Two logger installation screws are
attached.)
∗2 System requirements OS: Windows XP / Windows Vista / Windows 7 (64 Bit not supported)
CPU: compatible Intel processors, 1 GHz or higher. Memory: 1 GB or more (2 GB or more recommended)
∗3 The compliant version is Ver2.1.0 or more
∗4 The maximum number of connectable sensors is 95.
(When one PC is connected with a leased line network . The sampling period is set to 10 minutes.)
The number of possible sensor connections changes by a sampling period, connected number of
PC or PLC, and the network load situation.
Calibration service
Subject to calibration
Content
Model
Sensor head
1.5 m type
Calibration Certificate, Inspection Result
Traceability chart
ZN-DPS11-CAL
Sensor head
10 m type
Calibration Certificate, Inspection Result
Traceability chart
ZN-DPS15-CAL
∗ If a Certificate of Calibration is required after you purchase the sensor head, use the above model number to order one.
∗ As the sensor head and station are digitally connected, only the sensor head is subject to calibration.
∗ It is necessary to ship the product back to OMRON in Japan.
Power supply voltage DC input: 24 VDC±10% ∗8
Battery: 2 AAA batteries
Battery life ∗9
Approx. 1 year ∗9 (sleep mode)
Approx. 2 hours∗9 (Network connection mode, air particle sensor
(ZN-PD
-SA) connection mode)
Measurement interval of 10 minutes with 2 AAA nickel metal hydride
batteries, with SD card not inserted)
Operating temperature range 0 to 60°C
Operating humidity range 20% to 85% (no condensation)
Weight (packaged)
Approx. 500 g
Accessories
Instruction Sheet, Startup Guide CD-ROM ∗10, DC cable (straight type),
Ferrite core, Alarm output connector ∗11
∗1 Power saving mode. The indicator is always OFF in default setting. (Turns ON with button
operation.) Network communications with host devices cannot be made.
-S )
*2 This mode makes a one-to-one network connection with Air Particle Sensor (ZN-PD
and enables logging of the particle count value and differential pressure data simultaneously to
the SD card. Network communications with host devices cannot be made.
*3 Automatically writes data to the SD card when reaching the upper limit of the internal memory
and keeps recording until the capacity limit of the SD card. If the SD card is not inserted when
the internal memory reaches the upper limit, recording stops. (Data can be output to the SD card
by pressing the button after inserting the SD card.)
*4 This mode always records the latest measured values for the upper limit of the internal memory.
(When the measured values exceed the upper limit of the internal memory, the data items will be
deleted beginning with the oldest data item.)
*5 An alarm is shown when exceeding the upper limit value or lower limit value that has been set in
threshold setting mode.
*6 Air particle sensor connection mode is excluded.
*7 If you use an SD card from another manufacturer, use an SDHC Class 4 or higher card. (You must confirm
the operation of the SD card yourself.)
*8 Nickel hydride battery and alkaline battery can be used. Manganese batteries cannot be used.
*9 Battery life differs depending on measurement environment, sampling, operating mode, battery
type, or performance.
*10 System Requirements for Enclosed PC Software (Station Utility: Setup Tool, Logging Tool, and SD Viewer ES)
OS: Windows XP / Windows Vista / Windows 7 (64 Bit not supported)
CPU: compatible Intel processors, 1 GHz or more.
Memory: 1 GB or more (2 GB or more recommended)
*11 The connector is type XW4B-02B1-H1, made by OMRON.
Tolerance class IT16 applies to the dimensions unless otherwise specified.
ZN-DPX21-SA (Unit: mm)
ZN-DPS11-S (Unit: mm)
2-3.5 Dia.
Mounting
Hole
Screw Hook Holes
40
Mounting Screw Holes
Mounting Screw Hole
Mounting Screw Holes
2-M3 Hole Depth
117.2
Sensor Head Connector
56.8
49.4
48.6
Item Selection Key
(Down)
40
60
13
ZN9-ACP01-S (Unit: mm)
70
45
0.7
REC/STOP·SET Key
30.5 8
24.6
LAN Port
3.5 Dia.
5.2 Dia.
22.5
15.8
12.6
MODE Key
Item Selection Key
(Up)
21
16.7
Pressure Inlet on Low Pressure Side
Pressure Inlet on High Pressure Side
DC cable/
AC Adaptor Terminal
Reset Switch
44.4
32
10.5
SD Card Slot
Alarm Output Tewrminal
1800±50
Vinyl Insulated Round
Cable 3.4 Dia.
Standard Length 1.5 m
8.7
60
Screw Hook Holes
2-M3
32±0.2
26±0.2
2-M3
2.7
13.9
3.5 Dia.
10.5
26
6 Dia.
59.6
External Dimensions
SD card (to save measured values and to save/read set values),
Recommended SD card: HMC-SD291 (manufactured by OMRON) ∗7
Temperature
& Humidity
Specifications Differential Pressure Station
Specifications
Specifications
ZN-DPS15-S
3%±0.2 Pa of the measured value (at 23°C, 966 mbar)∗
0.1 Pa
Resolution
No effects (lower than measurement resolution)
Zero point
Temperature
effect
0 to 50°C
Applicable gas type
1.5 m
Weight (packaged)
Approx. 500 g
Instruction Sheet, air tube 1 m x 2,
mounting screw (M3 x 6) x 2
ZN-DPX21-SA
Station
Accessories
Accessories (Order separately)
Appearance
Air Thermo Sensor
For temperature / humidity measurement
Model
Item
ZN9-EM01-S
5 µm (10 µm), 20µm (30 µm), 50 µm min. ∗1
Particle concentration
0 to 100,000 particles / cf
0 to 50,000 particles/cf
More than 2.8 Liter/min
More than 6.0 Liter/min
Sample flow rate
ZN-PD50C-SA∗
Status outputs (2 outputs)
ZN-TH11-S
DC cable (2 m)
(ZN9-ED01-S comes with ZN-DPX21-SA)
AC Adaptor for ZNX-SA
Power supply voltage: 100 to 240 VAC/50 to 60 Hz
Operating temperature range: 0 to 40°C
ZN9-ED01-S
Right angle type
ZN9-ED02-S
PSE, CE, UL STD/
A-type plug
Calculation function
Shape
-S)
LCD 7-segment 5-digit 2-step display, auxiliary information indicator display
Instantaneous value, maximum value, minimum value, average value
Rated Voltage
Power supply voltage
100 to 125 VAC
ZN9-ACP02-PSE
Current consumption
AC adaptor (CCC)
100 to 240 VAC
ZN9-ACP02-CCC
Ambient temperature
range
100 to 240 VAC
ZN9-ACP02-KC
Ambient humidity range
Network connection mode, sleep mode
air particle sensor (ZN-PD
-S ) connection mode ∗2
AC adaptor (KC)
Recording mode
Continue ∗3, ring ∗4
AC adaptor (CE)
100 to 240 VAC
ZN9-ACP02-CE
Alarm signal output
Output to photocoupler (External power supply: 12 to 24 VDC,
Load current: Max. 45 mA) Alarm hold setting is possible. ∗5
AC adaptor (UL)
100 to 125 VAC
ZN9-ACP02-UL
Appearance
Accessories
Instruction Sheet, Startup Guide CD-ROM ∗10, DC cable (straight type),
Ferrite core, Alarm output connector ∗11
∗1 Power saving mode. The indicator is always OFF in default setting. (Turns ON with button
operation.) Network communications with host devices cannot be made.
-S )
*2 This mode makes a one-to-one network connection with Air Particle Sensor (ZN-PD
and enables logging of the particle count value and differential pressure data simultaneously to
the SD card. Network communications with host devices cannot be made.
*3 Automatically writes data to the SD card when reaching the upper limit of the internal memory
and keeps recording until the capacity limit of the SD card. If the SD card is not inserted when
the internal memory reaches the upper limit, recording stops. (Data can be output to the SD card
by pressing the button after inserting the SD card.)
*4 This mode always records the latest measured values for the upper limit of the internal memory.
(When the measured values exceed the upper limit of the internal memory, the data items will be
deleted beginning with the oldest data item.)
*5 An alarm is shown when exceeding the upper limit value or lower limit value that has been set in
threshold setting mode.
*6 Air particle sensor connection mode is excluded.
*7 An OMRON HMC-SD291 SD Memory Card or an SDHC Class 4 or higher memory card is recommended.
*8 Nickel hydride battery and alkaline battery can be used. Manganese batteries cannot be used.
*9 Battery life differs depending on measurement environment, sampling, operating mode, battery
type, or performance.
*10 System Requirements for Enclosed PC Software (Station Utility: Setup Tool, Logging Tool, and SD Viewer ES)
OS: Windows XP / Windows Vista / Windows 7 (64 Bit not supported)
CPU: compatible Intel processors, 1 GHz or more.
Memory: 1 GB or more (2 GB or more recommended)
*11 The connector is type XW4B-02B1-H1, made by OMRON.
Tolerance class IT16 applies to the dimensions unless otherwise specified.
ZN-DPS11-S (Unit: mm)
2-3.5 Dia.
Mounting
Hole
Mounting Screw Hole
Sensor Head Connector
56.8
49.4
48.6
Item Selection Key
(Up)
Item Selection Key
(Down)
13
Alarm Output Tewrminal
Approx. 1.7 kg
Filter for cleaning
ZN9-PC1-S
-SA)
Straight type
ZN9-ED01-S
Right angle type
ZN9-ED02-S
Air-intake tube
(Tubing ID: 10 dia., Length 1 m) ×1
Air filter ×1
Funnel ×1
∗1 ( ) is selectable.
∗2 AC adaptor is not bundled.
Air Thermo Sensor
Item
ZN-TH11-S
Supply voltage
12 to 24 VDC ±10% Ripple (p-p): 10% max.
Current consumption
40 mA max.
-25 to 60°C
Temperature Measurement accuracy ±0.3°C (at 25°C)
Range
Resolution
Humidity
< Air Thermo Sensor>
0.1°C
0% to 99%
Measurement accuracy ±2.5% (at 25°C, 10% to 85%)
Resolution
Appearance
Item
Model
Connection cable for air particle sensor
(With RJ-45 connectors at both ends, length: 0.1 m)
ZN9-TL01-S
Connection cable for air particle sensor
(With RJ-45 connectors at both ends, length: 2 m)
ZN9-TL20-S
Connection cable for external device
(With a RJ-45 connector at one end, length: 2 m)
ZN9-TC20-S
0.1%
Indicator
Alarm LED on the body
Alarm threshold
Threshold can be set for temperature, humidity or dew point.
Data update cycle
10 s
) is needed to connect with ZN-PD-S.
Connection cable (Type ZN9-TL
After ZN-TH11-S is kept in high humidity environment (more than 80%) for a long time, humidity
measurement values might shift (approx +3% with 60 hrs).
In that case, the ZN-TH11-S needs to be kept in room temperature and humidity for more than 1 day.
Calibration service
PC Software
Subject to calibration
Appearance
Content
Model
Model
Item
Wave Inspire ES
ZN-SW11-S
∗ System requirements OS: Windows XP / Windows Vista / Windows 7 (64 Bit not supported)
CPU: compatible Intel processors, 1 GHz or higher.
Memory: 1 GB or more (2 GB or more recommended)
The maximum number of connectable sensors is 95.
(When one PC is connected with a leased line network . The sampling period is set to 10 minutes.)
The number of possible sensor connections changes by a sampling period, connected number of
PC or PLC, and the network load situation.
Air Particle Sensor
Calibration Certificate, Inspection Result
Particle measurement type Traceability chart
ZN9-PD03C-S
Air Particle Sensor
Dust measurement type
Calibration Certificate, Inspection Result
Traceability chart
ZN9-PD50C-S
Air Thermo Sensor
Calibration Certificate, Inspection Result
Traceability chart
ZN9-TH11C-S
∗ If a Certificate of Calibration is required after you purchase the sensor head, use the above model
number to order one.
∗ It is necessary to ship the product back to OMRON in Japan.
Tolerance class IT16 applies to the dimensions unless otherwise specified.
ZN-PD03-SA (Unit: mm)
ZN-PD50-SA (Unit: mm)
30
Vinyl Insulated Round
Cable 3.4 Dia.
Standard Length 1.5 m
30
ZN-TH11-S (Unit: mm)
57.9 Dia.
2-3.5 Dia. Mounting Hole
3.5 Dia.
Mounting
Hole
1800±50
120
85
120
85
70
30.5 8
SD Card Slot
DIN track mount / Self standing
16.7
ZN9-ACP01-S (Unit: mm)
45
0.7
LAN Port
3.5 Dia.
5.2 Dia.
REC/STOP·SET Key
24.6
Reset Switch
21
22.5
15.8
12.6
MODE Key
40
60
ZN9-PT8-S
External Dimensions
44.4
32
10.5
Pressure Inlet on Low Pressure Side
Pressure Inlet on High Pressure Side
DC cable/
AC Adaptor Terminal
Installation method
Weight (Packed state)
28.1
16
117.2
IP20
Range
110
Mounting Screw Holes
2-M3 Hole Depth
ABS
Degree of protection
30.7
Screw Hook Holes
Mounting Screw Holes
32±0.2
26±0.2
2-M3
60
Screw Hook Holes
40
ZN9-PT4-S
Exhaust tube (8 m)
DC cable (2 m)
(ZN9-ED02-S comes with ZN-PD
8.7
3.5 Dia.
2-M3
Exhaust tube (4 m)
90.7
43.3
ZN-DPX21-SA (Unit: mm)
6 Dia.
10.5
26
External Dimensions
ZN9-PG2-S
Air Intake (10 Dia.)
LAN Port
10.7
(30.7)
61
85.7
68
26
Air Outlet (10 Dia.)
2-M3
Air Intake
Input/Output
Terminal
Standard Length 1 m
DC cable/
AC Adaptor
Terminal
10.7
(30.7)
61
85.7
68
3
52.7
12
Input/Output
Terminal
DC cable/
AC Adaptor
Terminal
3
90.7
LAN Port
110
∗ If a Certificate of Calibration is required after you purchase the sensor head, use the above model number to order one.
∗ As the sensor head and station are digitally connected, only the sensor head is subject to calibration.
∗ It is necessary to ship the product back to OMRON in Japan.
Change funnel for Dust measurement type
7.4
ZN-DPS15-CAL
ZN9-PF2-S
(14)
Calibration Certificate, Inspection Result
Traceability chart
Approx. 500 g
2.7
13.9
Sensor head
10 m type
ZN-DPS11-CAL
Change filter set for Dust measurement type
30.7
Calibration Certificate, Inspection Result
Traceability chart
ZN9-PF1-S
Operating humidity range 20% to 85% (no condensation)
18
Model
Operating temperature range 0 to 60°C
Weight (packaged)
110 to 55 Hz, 0.3 mm double amplitude, 50 min
Instruction Sheet, DC cable
Approx. 1 year ∗9 (sleep mode)
Approx. 2 hours∗9 (Network connection mode, air particle sensor
(ZN-PD
-SA) connection mode)
Measurement interval of 10 minutes with 2 AAA nickel metal hydride
batteries, with SD card not inserted)
59.6
Sensor head
1.5 m type
Content
20 MΩ min. at 500 VDC
1,000 VAC, 50/60 Hz for 1 min
Materials
Accessories
7.4
Subject to calibration
Change filter set for Particle measurement type
DC input: 24 VDC±10%
Power supply voltage
Battery: 2 AAA batteries ∗8
Calibration service
Operating and storage: 35% to 85% (with no icing or condensation)
Vibration resistance
Model
Item
Operating: 0 to 40°C
Storage: -15 to 50 (with no icing or condensation)
Withstand voltage
Communications interface Ethernet (10BASE-T, 100BASE-TX)
Battery life ∗9
1A MAX
Operating: 0 to 35°C
Insulation resistance
External storage device SD card with SDHC support ∗7 (measured value saving, set value saving and reading)
∗1 When the magnet is used, the vibration resistance becomes 55 Hz or less. (Two logger installation screws are
attached.)
∗2 System requirements OS: Windows XP / Windows Vista / Windows 7 (64 Bit not supported)
CPU: compatible Intel processors, 1 GHz or higher. Memory: 1 GB or more (2 GB or more recommended)
∗3 The compliant version is Ver2.1.0 or more
∗4 The maximum number of connectable sensors is 95.
(When one PC is connected with a leased line network . The sampling period is set to 10 minutes.)
The number of possible sensor connections changes by a sampling period, connected number of
PC or PLC, and the network load situation.
Socket (TCP), original protocol
Clean Level: 4 steps display according to clean level (adjustable)
7-segment main display (red): Measurement value (For particle count,
the three type displays are selectable; particles/cf, particles/liter and
particles/measurement time
With ZN-TH11-S; temperature, humidity and dew point)
7-segment sub-display (green): Threshold particle diameter,
With ZN-TH11-S; t (temperature), rh (humidity), dp (dew point)
Real-time mode (by second) / Cycle mode (by set cycle) / Trigger mode (by trigger)
DC 18 V – 25 V
AC Adaptor: 100 to 240 V / 50 to 60 Hz ∗2
AC adaptor (PSE)
Internal storage device Internal memory: Approx. 8,500 data items ∗6
ZN-SW11-S
Communications protocol
Model
Operating mode
Communications protocol Socket (TCP), original protocol
Environmental Visualization Software
Wave Inspire ES ∗2 ∗3 ∗4
Ethernet (10BASE-T, 100BASE-TX)
Measure Mode
Item (Applicable Standards)
∗1
ZN9-ACP01-S
Photocoupler input
Communications interface
Accessories (Order separately)
Display
Photocoupler output (Status outputs linked with clean levels)
System error status output
Measurement interval 10 s, 20 s, 30 s, 1 min, 2 min, 5 min, 10 min, 20 min, 30 min, 1 h
Straight type
Semiconductor laser
ZN-PD50-SA
<Air Particle Sensor>
ZN-DPX21-SA
Model
Sensor that can be connected Fine differential pressure sensor head (ZN-DPS1
Mounting Magnet ∗1
0.3, 0.5, or 1.0 µm min.
Indicators
Station
Item
Measured particle diameter
∗ Please choose this form when you buy with the calibration certificate.
Contents of Certificate of Calibration Set: Calibration Certificate, Inspection Result, and Traceability Chart
∗ For the precision under a rated environment, an offset less than 0.1 Pa/year may occur.
∗ The accessories tube inside diameter is 4 mm, and the outside diameter is 6 mm.
∗ Please choose this form when you buy with the calibration certificate.
Contents of Certificate of Calibration Set: Calibration Certificate, Inspection Result, and Traceability Chart
ZN-PD03C-SA∗
90° sideways light-scattering method
Trigger Input
10 m
Dust measurement type (ZN-PD50-SA)
Measurement method
Air, nitrogen
Cable length
Particle measurement type (ZN-PD03-SA)
ZN-PD03-SA
Light source
Air Particle Sensor
Dust measurement type
5 µm (10 µm), 20 µm (30 µm), 50 µm min.
Less than 0.5% of the specified value/10°C
Span
Operating temperature range
ZN-DPS15C-S∗
Air Particle Sensor
Particle measurement type
0.3, 0.5, or 1.0 µm min.
6
35
30.2
32.2
3
67.5±0.2
Measurement precision
Item
Model
3.9
Differential
pressure
Air Particle Sensor
Item (Measured particle diameter)
Appearance
-500 to 500 Pa
Measurement range
ZN-DPS11C-S∗
Sensor head
10 m type
ZN-DPS15-S
67.5
76.4
ZN-DPS11-S
Sensor head
1.5 m type
ZN-DPS11-S
Type
38.9
Item
14 Dia.
Model
13.1
Item
Specifications
Sensor
11
Appearance
Air Particle Sensor
Ordering Information
Sensor head
Environmental
Visualization Software Specifications
Dust
2.4
Main unit
Particles
(14)
Ordering Information
Differential
Pressure Level
Mounting
Screw Holes
26
Air Outlet (10 Dia.)
14
Read and Understand this Catalog
Please read and understand this catalog before purchasing the product. Please consult your OMRON representative if you have any questions or comments.
Warranty and Limitations of Liability
WARRANTY
LIMITATIONS OF LIABILITY
OMRON's exclusive warranty is that the products are free from defects in
materials and workmanship for a period of one year (or other period if
specified) from date of sale by OMRON.
OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR
IMPLIED, REGARDING NON-INFRINGEMENT, MERCHANTABILITY, OR
FITNESS FOR PARTICULAR PURPOSE OF THE PRODUCTS. ANY BUYER
OR USER ACKNOWLEDGES THAT THE BUYER OR USER ALONE HAS
DETERMINED THAT THE PRODUCTS WILL SUITABLY MEET THE
REQUIREMENTS OF THEIR INTENDED USE. OMRON DISCLAIMS ALL
OTHER WARRANTIES, EXPRESS OR IMPLIED.
OMRON SHALL NOT BE RESPONSIBLE FOR SPECIAL, INDIRECT, OR
CONSEQUENTIAL DAMAGES, LOSS OF PROFITS OR COMMERCIAL
LOSS IN ANY WAY CONNECTED WITH THE PRODUCTS, WHETHER
SUCH CLAIM IS BASED ON CONTRACT, WARRANTY, NEGLIGENCE, OR
STRICT LIABILITY.
In no event shall the responsibility of OMRON for any act exceed the
individual price of the product on which liability is asserted.
IN NO EVENT SHALL OMRON BE RESPONSIBLE FOR WARRANTY,
REPAIR, OR OTHER CLAIMS REGARDING THE PRODUCTS UNLESS
OMRON'S ANALYSIS CONFIRMS THAT THE PRODUCTS WERE
PROPERLY HANDLED, STORED, INSTALLED, AND MAINTAINED AND NOT
SUBJECT TO CONTAMINATION, ABUSE, MISUSE, OR INAPPROPRIATE
MODIFICATION OR REPAIR.
Application Considerations
SUITABILITY FOR USE
OMRON shall not be responsible for conformity with any standards, codes,
or regulations that apply to the combination of products in the customer's
application or use of the products.
At the customer's request, OMRON will provide applicable third party
certification documents identifying ratings and limitations of use that apply to
the products. This information by itself is not sufficient for a complete
determination of the suitability of the products in combination with the end
product, machine, system, or other application or use.
The following are some examples of applications for which particular
attention must be given. This is not intended to be an exhaustive list of all
possible uses of the products, nor is it intended to imply that the uses listed
may be suitable for the products:
• Outdoor use, uses involving potential chemical contamination or electrical
interference, or conditions or uses not described in this catalog.
• Nuclear energy control systems, combustion systems, railroad systems,
aviation systems, medical equipment, amusement machines, vehicles,
safety equipment, and installations subject to separate industry or
government regulations.
• Systems, machines, and equipment that could present a risk to life or
property.
Please know and observe all prohibitions of use applicable to the products.
NEVER USE THE PRODUCTS FOR AN APPLICATION INVOLVING SERIOUS
RISK TO LIFE OR PROPERTY WITHOUT ENSURING THAT THE SYSTEM
AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS, AND THAT
THE OMRON PRODUCTS ARE PROPERLY RATED AND INSTALLED FOR
THE INTENDED USE WITHIN THE OVERALL EQUIPMENT OR SYSTEM.
PROGRAMMABLE PRODUCTS
OMRON shall not be responsible for the user's programming of a
programmable product, or any consequence thereof.
Disclaimers
CHANGE IN SPECIFICATIONS
PERFORMANCE DATA
Product specifications and accessories may be changed at any time based
on improvements and other reasons.
It is our practice to change model numbers when published ratings or
features are changed, or when significant construction changes are made.
However, some specifications of the products may be changed without any
notice. When in doubt, special model numbers may be assigned to fix or
establish key specifications for your application on your request. Please
consult with your OMRON representative at any time to confirm actual
specifications of purchased products.
Performance data given in this catalog is provided as a guide for the user in
determining suitability and does not constitute a warranty. It may represent
the result of OMRON’s test conditions, and the users must correlate it to
actual application requirements. Actual performance is subject to the
OMRON Warranty and Limitations of Liability.
ERRORS AND OMISSIONS
The information in this document has been carefully checked and is believed
to be accurate; however, no responsibility is assumed for clerical,
typographical, or proofreading errors, or omissions.
DIMENSIONS AND WEIGHTS
Dimensions and weights are nominal and are not to be used for
manufacturing purposes, even when tolerances are shown.
∗ EQUO is trademark of OMRON Corporation in Japan and other countries.
∗ Microsoft and Windows are registered trademarks of Microsoft Corporation in the United States and other countries.
OMRON Corporation
Industrial Automation Company
Authorized Distributor:
Tokyo, JAPAN
Contact: www.ia.omron.com
Regional Headquarters
OMRON EUROPE B.V.
Sensor Business Unit
Carl-Benz-Str. 4, D-71154 Nufringen, Germany
Tel: (49) 7032-811-0/Fax: (49) 7032-811-199
OMRON ELECTRONICS LLC
One Commerce Drive Schaumburg,
IL 60173-5302 U.S.A.
Tel: (1) 847-843-7900/Fax: (1) 847-843-7787
OMRON ASIA PACIFIC PTE. LTD.
No. 438A Alexandra Road # 05-05/08 (Lobby 2),
Alexandra Technopark,
Singapore 119967
Tel: (65) 6835-3011/Fax: (65) 6835-2711
OMRON (CHINA) CO., LTD.
Room 2211, Bank of China Tower,
200 Yin Cheng Zhong Road,
PuDong New Area, Shanghai, 200120, China
Tel: (86) 21-5037-2222/Fax: (86) 21-5037-2200
© OMRON Corporation 2011 All Rights Reserved.
In the interest of product improvement,
specifications are subject to change without notice.
Printed in Japan
CSM_5_1_1013
Cat. No. E411-E1-02
0513 (0611) (TA)
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