Varian 979 Helium Mass Spectometer Leak Detector

Model 979 Series
Helium
Mass Spectrometer
Leak Detector
OPERATIONS MANUAL
idealvac.com
Manual No. 699909979
Revision K
September 2003
(505)872-0037
idealvac.com
DRAFT 9/15/03
vacuum technologies
DRAFT 9/15/03
Model 979 Series
Helium Mass Spectrometer Leak Detector
Contra-Flow, ConvecTorr, and TriScroll are trademarks or registered trademarks of Vacuum Technologies.
Alconox is a registered trademark of Alconox, Inc.
Apiezon is a registered trademark of M&I Materials Ltd.
Loctite and PST are registered trademarks of Loctite Corporation.
Scotch-Brite is a trademark of 3M.
Copyright 2003
Varian Vacuum Technologies
Model 979 Series Helium Mass Spectrometer Leak Detector
Warranty
Products manufactured by Seller are warranted against defects in materials and workmanship for
twelve (12) months from date of shipment thereof to Customer, and Seller’s liability under valid warranty claims is limited, at the option of Seller, to repair, to replace, or refund of an equitable portion of
the purchase price of the Product. Items expendable in normal use are not covered by this warranty. All
warranty replacement or repair of parts shall be limited to equipment malfunctions which, in the sole
opinion of Seller, are due or traceable to defects in original materials or workmanship. All obligations of
Seller under this warranty shall cease in the event of abuse, accident, alteration, misuse, or neglect of
the equipment. In-warranty repaired or replaced parts are warranted only for the remaining unexpired
portion of the original warranty period applicable to the repaired or replaced parts. After expiration of
the applicable warranty period, Customer shall be charged at the then current prices for parts, labor,
and transportation.
Except as stated herein, Seller makes no warranty, express or implied (either in fact or by operation of
law), statutory or otherwise; and, except as stated herein, Seller shall have no liability under any warranty, express or implied (either in fact or by operation of law), statutory or otherwise. Statements made
by any person, including representatives of Seller, which are inconsistent or in conflict with the terms of
this warranty shall not be binding upon Seller unless reduced to writing and approved by an officer of
Seller.
Warranty Replacement and Adjustment
All claims under warranty must be made promptly after occurrence of circumstances giving rise thereto,
and must be received within the applicable warranty period by Seller or its authorized representative.
Such claims should include the Product serial number, the date of shipment, and a full description of
the circumstances giving rise to the claim. Before any Products are returned for repair and/or adjustment, written authorization from Seller or its authorized representative for the return and instructions as
to how and where these Products should be returned must be obtained. Any Product returned to Seller
for examination shall be prepaid via the means of transportation indicated as acceptable by Seller.
Seller reserves the right to reject any warranty claim not promptly reported and any warranty claim on
any item that has been altered or has been returned by non-acceptable means of transportation. When
any Product is returned for examination and inspection, or for any other reason, Customer shall be
responsible for all damage resulting from improper packing or handling, and for loss in transit, notwithstanding any defect or non-conformity in the Product. In all cases, Seller has the sole responsibility for
determining the cause and nature of failure, and Seller’s determination with regard thereto shall be
final.
If it is found that Seller’s Product has been returned without cause and is still serviceable, Customer will
be notified and the Product returned at its expense; in addition, a charge for testing and examination
may be made on Products so returned.
Items Not Covered by the Warranty
Examples of items not normally covered under warranty include ion sources, TC gauges, O-rings, spectrometer tube cleaning and overhaul, mechanical pump oils, vacuum system overhauls, and obvious
abuse or customer error. These items are considered normal maintenance for this type of equipment.
3/1/00
iii
DRAFT 9/15/03
Reasonable care must be used to avoid hazards. Seller expressly disclaims responsibility for loss or
damage caused by use of its Products other than in accordance with proper operating procedures.
DRAFT 9/15/03
Model 979 Series Helium Mass Spectrometer Leak Detector
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Model 979 Series Helium Mass Spectrometer Leak Detector
Table of Contents
Declaration of Conformity ................................................................................................................ xiii
Preface .............................................................................................................................................xiv
Hazard and Safety Information ..................................................................................................xiv
Solvents .................................................................................................................................xv
Equipment, General ..............................................................................................................xvi
Power and Static .................................................................................................................. xvii
Vacuum Equipment and Cleanliness ....................................................................................xix
O-ring Care ............................................................................................................................xx
Spectrometer Tube ...............................................................................................................xxi
Gross Leak Option ................................................................................................................xxi
Pumps ...................................................................................................................................xxi
Vacuum Technologies Services ................................................................................................ xxii
Contacting Vacuum Technologies ............................................................................................ xxii
Section 1. Introduction to the Model 979 Series ............................................................................. 1-1
1.1 The Model 979 .................................................................................................................... 1-1
1.1.1 Model 979 Series Configurations ................................................................................ 1-1
1.2 Unpacking the 979 ............................................................................................................... 1-7
1.2.1 Unpacking Instructions................................................................................................ 1-7
1.2.2 Removing the 979 from the Skid................................................................................. 1-8
1.2.3 Removing Loose Packing ........................................................................................... 1-8
1.3 Services Required for Operation.......................................................................................... 1-9
1.3.1 Power .......................................................................................................................... 1-9
1.3.2 Helium ....................................................................................................................... 1-10
1.3.3 Recommended Additional Services .......................................................................... 1-10
1.4 Preparation for Operation .................................................................................................. 1-10
1.5 Installation.......................................................................................................................... 1-11
1.5.1 Bench System Installations ....................................................................................... 1-11
1.6 Storage .............................................................................................................................. 1-12
1.7 Front Panel Displays and Controls .................................................................................... 1-12
1.8 Rear Panel Controls........................................................................................................... 1-14
1.8.1 System Control and Communication Panel .............................................................. 1-14
1.8.2 Power Control and Circuit Breakers.......................................................................... 1-15
1.9 Universal Remote Option................................................................................................... 1-17
1.10 Specifications................................................................................................................... 1-18
v
DRAFT 9/15/03
Warranty ............................................................................................................................................iii
Warranty Replacement and Adjustment ......................................................................................iii
Items Not Covered by the Warranty .............................................................................................iii
DRAFT 9/15/03
Model 979 Series Helium Mass Spectrometer Leak Detector
Section 2. Operating the 979 Leak Detector ................................................................................... 2-1
2.1 Initial Startup and Shutdown ............................................................................................... 2-1
2.1.1 Startup ........................................................................................................................ 2-1
2.1.2 Calibration ................................................................................................................... 2-1
2.1.3 Shutdown .................................................................................................................... 2-1
2.2 Operator Interface................................................................................................................ 2-2
2.2.1 Sniffer Set-Up Procedure ............................................................................................ 2-5
2.2.2 Key Switch .................................................................................................................. 2-5
2.3 Touch Panel Menus ............................................................................................................. 2-6
2.3.1 Contrast Adjustment of the Touch Panel Display ....................................................... 2-6
2.3.2 Changing Variables in Touch Panel Screens ............................................................. 2-6
2.3.3 Selecting Options in Touch Panel Screens................................................................. 2-7
2.4 979 Touch Panel Home Screen........................................................................................... 2-8
2.4.1 Digital Leak Rate......................................................................................................... 2-8
2.4.2 Test Port Pressure ...................................................................................................... 2-9
2.4.3 Leak Detector Status .................................................................................................. 2-9
2.4.4 Leak Detector Condition ............................................................................................. 2-9
2.4.5 Reject Status Indicator ................................................................................................ 2-9
2.4.6 SYS INFO and MENUS Touch Screen Boxes ............................................................ 2-9
2.5 979 System Information Screen......................................................................................... 2-12
2.6 First Menu Selection Screen.............................................................................................. 2-14
2.6.1 Calibrated Leak Set-Up............................................................................................. 2-14
2.6.1.1 Selecting Internal or External Calibrated Leak for Calibration ..................... 2-15
2.6.1.2 Selecting Full or Fast Calibration Routine .................................................... 2-15
2.6.2 Reject and Audio Set Points ..................................................................................... 2-16
2.6.2.1 Changing and Enabling Set Point Values .................................................... 2-16
2.6.3 Auto Sequencer Set-Up ............................................................................................ 2-17
2.6.3.1 Auto Sequencer Set-Up Controls ................................................................. 2-18
2.6.4 Rough Pump Set-Up................................................................................................. 2-19
2.6.4.1 Selecting Rough Only or Split Flow Mode .................................................... 2-19
2.6.4.2 Inputting the Rough Pump and Forepump Sizes ......................................... 2-20
2.6.4.3 VENT LOCK Function .................................................................................. 2-20
2.6.5 Leak Rate Ranging Set-Up ....................................................................................... 2-20
2.6.5.1 Range Stop and Manual Range Set-Up and Control ................................... 2-21
2.6.5.2 Selecting Fine Test or Gross Test Only Mode ............................................. 2-22
2.6.5.3 System Sensitivity ........................................................................................ 2-22
2.6.6 Output Control Set-Up .............................................................................................. 2-24
2.6.6.1 Leak Rate Analog Output Voltage Selection ................................................ 2-24
2.6.6.2 Bargraph Display Set-Up ............................................................................. 2-24
2.6.6.3 Serial Communications Protocol Set-Up ...................................................... 2-26
2.6.7 Transfer Pressure Set-Up ......................................................................................... 2-26
2.6.8 NEXT and BACK Boxes............................................................................................ 2-27
2.7 Second Menu Selection Screen......................................................................................... 2-28
2.7.1 Units Set-Up.............................................................................................................. 2-28
2.7.1.1 Leak Rate and Test Port Pressure Units Selection ...................................... 2-28
vi
Section 3. Service ........................................................................................................................... 3-1
3.1 Version ................................................................................................................................ 3-1
3.1.1 Manual Zeroing and Calibrate..................................................................................... 3-3
3.1.1.1 AUTO-ZERO < 0 ............................................................................................ 3-3
3.1.1.2 Gain ................................................................................................................ 3-4
3.1.1.3 Offset .............................................................................................................. 3-4
3.1.2 Manual Spectube Tuning ............................................................................................ 3-4
3.1.2.1 Changing Manual Tuning Parameters ............................................................ 3-5
3.1.2.2 Repeller .......................................................................................................... 3-5
3.1.2.3 Emission Current ............................................................................................ 3-5
3.1.2.4 Ion Voltage ..................................................................................................... 3-6
3.1.2.5 Variable Focus Voltage .................................................................................. 3-6
3.1.2.6 Suppressor Voltage ........................................................................................ 3-6
3.1.2.7 Fixed Focus Voltage ....................................................................................... 3-6
3.1.2.8 Filament Selection .......................................................................................... 3-6
3.1.3 Manual Valve Control.................................................................................................. 3-7
3.1.4 System Initialize Set-Up .............................................................................................. 3-9
3.1.5 Gauge Calibration Procedures.................................................................................... 3-9
3.1.5.1 System Pressure Gauge Calibration Procedure .......................................... 3-10
3.1.5.1.1 Vacuum (Low Pressure) Calibration............................................... 3-10
3.1.5.1.2 Atmospheric Calibration ................................................................ 3-11
3.1.5.2 Test Port Pressure Gauge Calibration Procedure ........................................ 3-11
3.1.5.2.1 Vacuum (Low Pressure) Calibration............................................... 3-12
3.1.5.2.2 Atmospheric Calibration ................................................................ 3-12
Section 4. Maintenance .................................................................................................................. 4-1
4.1 Daily Maintenance .............................................................................................................. 4-4
4.1.1 Sensitivity Check......................................................................................................... 4-4
4.2 Recalibrate the Internal Calibrated Leak.............................................................................. 4-4
4.3 Spectrometer Tube Overhaul............................................................................................... 4-4
4.3.1 Removing the Spectrometer Tube Assembly.............................................................. 4-5
4.3.2 Removing the Button TC........................................................................................... 4-11
4.3.3 Removing the Ion Source.......................................................................................... 4-13
4.3.4 Removing the Preamplifier........................................................................................ 4-15
4.3.5 Remove the Magnetic Poles ..................................................................................... 4-16
4.3.6 Examining and Cleaning the Spectrometer Parts ..................................................... 4-17
4.3.7 Reassembly .............................................................................................................. 4-19
4.4 Ion Source Replacement Outside of Annual Maintenance ................................................ 4-20
4.4.1 Reassembly .............................................................................................................. 4-21
4.5 Mechanical Pump .............................................................................................................. 4-22
4.5.1 Oil-Sealed Pump Fluid Change................................................................................. 4-22
4.5.2 TriScroll Pump Tip Seal Replacement ...................................................................... 4-22
4.6 979 Spare Parts List .......................................................................................................... 4-22
4.7 979 Accessory Item List..................................................................................................... 4-24
vii
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Model 979 Series Helium Mass Spectrometer Leak Detector
Model 979 Series Helium Mass Spectrometer Leak Detector
Appendix A. Rear Panel Interface Connectors ...............................................................................A-1
A.1 Optically Isolated Outputs....................................................................................................A-1
A.2 Optically Isolated Inputs ......................................................................................................A-3
A.3 Non-Isolated Serial and Analog Interfaces ..........................................................................A-4
A.4 Remote Control Connector..................................................................................................A-5
DRAFT 9/15/03
Appendix B. Communications Protocol ..........................................................................................B-1
B.1 Protocol (RS-232)................................................................................................................B-1
B.2 Communicating with RS-232 ...............................................................................................B-2
B.2.1 Windows HyperTerminal Set-Up Instructions ............................................................B-2
B.2.2 Printing with HyperTerminal ......................................................................................B-4
Appendix C. Introduction to Leak Detection ...................................................................................C-1
C.1 Leak Testing—Why is it Needed? .......................................................................................C-1
C.2 Classes of Leak Detection...................................................................................................C-1
C.3 Terminology.........................................................................................................................C-2
C.4 Various Methods of Testing for Leaks.................................................................................C-3
C.5 Helium Mass Spectrometer Leak Detection (MSLD)...........................................................C-4
C.5.1 Principles of Mass Spectrometry ...............................................................................C-4
C.5.2 Application as a Leak Detector ..................................................................................C-4
C.5.3 The Nature of Flow in a Vacuum ...............................................................................C-4
C.5.4 Facts About Leak Rates ............................................................................................C-5
C.6 Leak Detection Methods......................................................................................................C-5
C.6.1 Test Piece Evacuated (Figure C-1a and Figure C-1b) ..............................................C-6
C.6.2 Test Piece Pressurized (Figure C-2) .........................................................................C-6
C.6.3 Test Piece Already Sealed (Figure C-3) ....................................................................C-7
C.7 Mass Spectrometer Leak Detector—Simplified Description................................................C-8
Index ................................................................................................................................................. I-1
viii
Model 979 Series Helium Mass Spectrometer Leak Detector
1-1
1-2
1-3
1-4
1-5
1-6
1-7
1-8
1-9
1-10
1-11
2-1
2-2
2-3
2-4
2-5
2-6
2-7
2-8
2-9
2-10
2-11
2-12
2-13
2-14
2-15
2-16
2-17
2-18
3-1
3-2
3-3
3-4
3-5
3-6
3-7
3-8
3-9
3-10
4-1
4-2
979 Bench Mount Unit ........................................................................................................ 1-1
Single, Oil-Sealed Mechanical Pump Configuration on Two-Wheel Cart ........................... 1-2
Single, Dry Mechanical Pump Configuration on Two-Wheel Cart ...................................... 1-3
Single, Dry Mechanical Pump Configuration on Four-Wheel Cart...................................... 1-4
Dual, Oil-Sealed Mechanical Pump Configuration on Four-Wheel Cart ............................. 1-5
Dual, Dry Mechanical Pump Configuration on Four-Wheel Cart ........................................ 1-6
970 Bench System Installation.......................................................................................... 1-11
Front Panel Displays and Controls ................................................................................... 1-12
System Control and Communication Panel ...................................................................... 1-14
Power Control and Circuit Breakers.................................................................................. 1-15
Universal Remote Option.................................................................................................. 1-17
979 Front Panel .................................................................................................................. 2-2
979 Touch Panel Home Screen.......................................................................................... 2-6
979 Touch Panel Home Screen.......................................................................................... 2-8
Leak Rate Displayed on Home Screen: 0.6E-09 atm cc/sec .............................................. 2-8
Bar Graph Display: 0.6 x 10-09 atm cc/sec ......................................................................... 2-8
System Information Screen, Typical Display .................................................................... 2-12
First Menu Selection Screen............................................................................................. 2-14
Calibrated Leak Set-Up Screen ........................................................................................ 2-14
Reject and Audio Set Points Screen................................................................................. 2-16
Auto Sequencer Set-Up Screen........................................................................................ 2-17
Rough Pump Set-Up Screen ............................................................................................ 2-19
Leak Rate Ranging Set-Up Screen................................................................................... 2-20
Output Control Set-Up Screen .......................................................................................... 2-24
Leak Detector Logarithmic Output Voltage ....................................................................... 2-25
Leak Detector Linear Output Voltage................................................................................ 2-25
Transfer Pressure Set-Up Screen..................................................................................... 2-26
Second Menu Screen ....................................................................................................... 2-28
Units Set-Up Screen ......................................................................................................... 2-28
Second Menu Screen ......................................................................................................... 3-1
Version Screen ................................................................................................................... 3-1
Service Menu Screen.......................................................................................................... 3-2
Manual Zeroing and Cal Screen ......................................................................................... 3-3
Manual Spectube Tuning Screen........................................................................................ 3-4
Manual Valve Control Screen ............................................................................................. 3-7
979 Vacuum System Diagram ............................................................................................ 3-8
System Initialize Set-Up Screen ......................................................................................... 3-9
Gauge Calibration Screen................................................................................................... 3-9
979 Touch Panel Home Screen........................................................................................ 3-10
Front Panel ......................................................................................................................... 4-6
Front View of the Spectrometer Tube Assembly ................................................................ 4-7
ix
DRAFT 9/15/03
List of Figures
DRAFT 9/15/03
Model 979 Series Helium Mass Spectrometer Leak Detector
4-3
4-4
4-5
4-6
4-7
4-8
4-9
4-10
4-11
4-12
4-13
4-14
4-15
4-16
4-17
4-18
4-19
4-20
4-21
4-22
4-23
4-24
A-1
A-2
A-3
A-4
C-1a
C-1b
C-2
C-3
C-4
C-5
x
Removing the Connectors .................................................................................................. 4-7
Wing Nut ............................................................................................................................. 4-8
KF-25 Quick Clamp ............................................................................................................ 4-8
Magnet Body Bracket Screws............................................................................................. 4-9
Magnet Assembly Slotted Screws .................................................................................... 4-10
Tuning Magnet Set Screws............................................................................................... 4-10
Button TC Assembly ......................................................................................................... 4-11
Removing the Button TC .................................................................................................. 4-11
Button TC Wires (View with Header on) ........................................................................... 4-12
Removing the Ion Source ................................................................................................. 4-13
The Ion Source ................................................................................................................. 4-14
Ion Source Cavity ............................................................................................................. 4-14
Ground Slit Plate............................................................................................................... 4-15
Removing the Preamplifier ............................................................................................... 4-15
Magnetic Pole Piece ......................................................................................................... 4-16
Removing the O-ring from Magnetic Pole Piece............................................................... 4-16
Removing the Second Magnetic Pole Piece..................................................................... 4-17
Discolored Ground Slit Plate............................................................................................. 4-17
Discolored Ground Magnet Pole Piece............................................................................. 4-18
VacuSolv Cleaning Wipe .................................................................................................. 4-18
Inspecting the O-ring ........................................................................................................ 4-19
Spectrometer Tube Reassembly ...................................................................................... 4-19
System Control and Communication Panel ........................................................................A-1
Optically Isolated Output Circuit Sketch .............................................................................A-2
Optically Isolated Input Circuit Sketch ................................................................................A-3
979 COM Cable Wiring Diagram ........................................................................................A-4
Test Piece Evacuated: Tracer Probe Used to Locate Leak ................................................C-6
Test Piece Evacuated and Hooded with Helium Atmosphere to
Determine Overall Leak Rate .............................................................................................C-6
Test Piece Pressurized: Detector Probe Used to Locate Leak...........................................C-6
Test Piece Sealed with Helium or Mixture of Helium and Other Gases:
Bell Jar Used to Determine Overall Leak Rate ...................................................................C-7
Mass Spectrometer Leak Detector .....................................................................................C-8
Magnetic Separation Principle ............................................................................................C-9
Model 979 Series Helium Mass Spectrometer Leak Detector
1-1
2-1
2-2
2-3
2-4
2-5
2-6
3-1
3-2
4-1
4-2
4-3
4-4
4-5
A-1
A-2
A-3
A-4
B-1
B-2
B-3
B-4
C-1
979 Series Specifications................................................................................................. 1-18
Sniffer Mode Sensitivity Range (Full Scale)....................................................................... 2-5
979 Operating States ....................................................................................................... 2-10
979 Condition States........................................................................................................ 2-10
System Information Screen Conditions............................................................................ 2-12
979 Standard Sensitivity Leak Detector........................................................................... 2-23
979 High Sensitivity Leak Detector .................................................................................. 2-23
979 Valve State Table - Single Mechanical Pump System................................................ 3-7
979 Valve State Table - Dual Mechanical Pump System .................................................. 3-8
Scheduled Maintenance .................................................................................................... 4-3
As-Required Maintenance ................................................................................................. 4-3
Tools and Parts Required for Spectrometer Tube Overhaul.............................................. 4-5
979 Spare Parts ............................................................................................................... 4-22
979 Accessory Item List................................................................................................... 4-24
Summary Table of Optically Isolated Outputs ....................................................................A-2
Summary Table of Optically Isolated Inputs ......................................................................A-3
Summary Table of Non-Isolated I/O ..................................................................................A-4
Summary Table of Non-Isolated Serial and Power ............................................................A-5
Internal Operating Parameters ...........................................................................................B-5
Non-Volatile Operating Parameters ...................................................................................B-7
Spectrometer Operating Parameters .................................................................................B-9
Leak Detection Actions ......................................................................................................B-9
Decimal Notation ............................................................................................................... C-2
xi
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List of Tables
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Model 979 Series Helium Mass Spectrometer Leak Detector
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Declaration of Conformity
Declaration of Conformity
Konformitätserklärung
Déclaration de Conformité
Declaración de Conformidad
Verklaring de Overeenstemming
Dichiarazione di Conformità
We
Wir
Nous
Nosotros
Wij
Noi
Varian, Inc.
Vacuum Technologies
121 Hartwell Avenue
Lexington, MA, 02421-3133 USA
declare under our sole responsibility that the product,
erklären, in alleniniger Verantwortung, daß dieses Produkt,
déclarons sous notre seule responsabilité que le produit,
declaramos, bajo nuestra sola responsabilidad, que el producto,
verklaren onder onze verantwoordelijkheid, dat het product,
dichiariamo sotto nostra unica responsabilità, che il prodotto,
Model 979 Series Helium Mass Spectrometer Leak Detector
to which this declaration relates is in conformity with the following standard(s) or other normative documents.
auf das sich diese Erklärung bezieht, mit der/den flogenden Norm(en) oder Richtlinie(n) übereinstimmt.
auquel se réfère cette déclaration est conforme à la (auz) norme(s) ou au(x) document(s) normatif(s).
al que se refiere esta declaración es conforme a la(s) norma(s) u otro(s) documento(s) normativo(s).
waamaar deze verklaring verwijst, aan de volende norm(en) of richtlijn(en) beantwoodt.
a cui se rifersce questa dichiarazione è conforme alla/e sequente/I norma/o documento/I normativo/i.
89/336/EEC Electromagnetic Compatibility Directive
EN61326:1997 . . . . . . . . . . . . . . . . Measurement Control and Laboratory Equipment EMC Requirements
EN61010A-1:2001 . . . . . . . . . . . . . Safety Requirements for Electrical Equipment for Measurement, Control and
Laboratory Use, Part 1, General Requirements
Frederick C. Campbell
Operations Manager
Vacuum Technologies
Varian, Inc.
Lexington, Massachusetts, USA
May 2003
Model 979 Series Helium Mass Spectrometer Leak Detector
Preface
Hazard and Safety Information
Some common international symbols used in this manual and the equipment itself are
shown below.
DRAFT 9/15/03
°l
OFF Power Switch Position
Earth Ground
ON Power Switch Position
Hot Surface
AC – Alternating Current
Dangerous Voltage, Risk of
Electrical Shock
This manual uses the following standard safety protocol:
NOTE
The notes contain important information taken from the text.
CAUTION
The caution messages are displayed before procedures, which
if not followed, could cause damage to the equipment.
WARNING
The warning messages are for attracting the attention of the
operator to a particular procedure or practice which, if not
followed correctly, could lead to serious injury.
Operators and service personnel must be aware of all hazards associated with this equipment. They must know how to recognize hazardous and potentially hazardous conditions,
and know how to avoid them. The consequences of unskilled, improper, or careless operation of the equipment can be serious. This product must only be operated and maintained
by trained personnel. Every operator or service person must read and thoroughly understand
operation/maintenance manuals and any additional information provided by Vacuum
Technologies. All warning and cautions should be read carefully and strictly observed. Consult local, state, and national agencies regarding specific requirements and regulations.
Address any safety, operation, and/or maintenance questions to your nearest Vacuum
Technologies office.
xiv
Model 979 Series Helium Mass Spectrometer Leak Detector
Solvents
CAUTION
The mechanical components of leak detectors are typically
cleaned with alcohol, methanol, or other solvents.
When heated, sprayed, or exposed to high-temperature
equipment, these solvents become flammable and explosive,
causing serious injury or death. Do not use these solvents near
a high-temperature source. Ventilate the working area with a
blower and work in a large, well-ventilated room.
CAUTION
Do not clean any aluminum parts with Alconox ®. Alconox is
not compatible with aluminum and will cause damage.
NOTE
During reassembly, always use Loctite® PST®
(teflon-impregnated pipe thread compound) on pipe threads.
DRAFT 9/15/03
Alcohol, methanol, or other solvents are irritants, narcotics,
depressants and/or carcinogens. Their inhalation and/or
ingestion may produce serious side effects. Prolonged or
continued contact with the skin will result in absorption
through the skin and moderate toxicity. Always ensure that
cleaning operations are carried out in large, well-ventilated
rooms, and wear eyeshields, gloves, and protective clothing.
xv
Model 979 Series Helium Mass Spectrometer Leak Detector
DRAFT 9/15/03
Equipment, General
xvi
WARNING
The leak detector is not designed for use with hazardous gases.
Verify that the system to be tested has been purged of all
hazardous gases prior to using the leak detector.When testing a
system that contained hazardous gases, the exhaust of the leak
detector should be connected to a scrubbed or toxic
containment exhaust. Exposure to hazardous gases could result
in serious injury or death.
WARNING
Equipment tightness is guaranteed for normal operating
conditions when the equipment leaves the factory. It is the
user’s responsibility to maintain the level of tightness
particularly when pumping dangerous products.
CAUTION
The performance and operating safety of this equipment can
only be guaranteed if it is operated according to normal
conditions of use.
CAUTION
Always allow at least 4 inches of clearance adjacent to the
ventilation holes at the front, back and bottom of the equipment
enclosure.
Model 979 Series Helium Mass Spectrometer Leak Detector
Power and Static
WARNING
Electrical insulation must include the appropriate branch circuit
(at least 20 A), with long time delay and a reliable earth ground.
Do not use an extension cord.
Disconnect power from the 979 before performing any
maintenance procedure that requires physically disconnecting
any part of the system.
Use only the power cord that was provided with your leak
detector. The use of extension cords is not recommended and
could result in damage to the equipment and loss of warranty.
CAUTION
Vacuum Technologies strongly recommends the use of surge
protection to improve the immunity of the 979 Series leak
detectors against unidirectional transients caused by the
following phenomena:
❑ Switching phenomena in the power network (e.g., switching
of capacitor banks)
❑ Faults in the power network
❑ Indirect lightning strokes
CAUTION
Many components of the 979 are static sensitive devices.
Vacuum Technologies recommends that you wear a grounding
device when performing any maintenance on the 979 and
especially when performing maintenance of static sensitive
parts.
xvii
DRAFT 9/15/03
To avoid electric shock, connect the product power cord to a
grounded power receptacle. A protective ground connection by
way of the grounding conductor in the power cord is essential
for safe operation.
Model 979 Series Helium Mass Spectrometer Leak Detector
WARNING
This equipment is designed to meet current EEC regulations:
LVD (Low Voltage Directive, 73/23/EEC) and EMC
(Electromagnetic Compatibility, 89/336/EEC Directive) for
Installation Category II, Pollution Degree II environment for
Industrial, Scientific, Measuring and Process Control electrical
equipment.
❑ Any modifications on the part of the user are liable to cause
non-compliance with regulations or affect the EMC
performance and the safety of the product. Vacuum
Technologies cannot be held responsible for consequences
resulting from such intervention.
❑ The equipment can be damaged by incorrect mains AC
DRAFT 9/15/03
supply voltages, the Radio Frequency (RF) and Electrostatic
Discharge (ESD) energy inputs that can exceed the
maximum ratings, operating in very high temperatures or
without adequate ventilation, immersion in liquids, and
physical abuse.
❑ All electrical connections must be performed by a qualified
electrician and must comply with national and local codes.
❑ Ensure that the electrical installation conforms with your
local safety requirements.
❑ Electrical installation must include the appropriate branch
circuit (at least 20 A) with long time delay and reliable earth
ground. Do not use an extension cord.
❑ Use only the power cord that was provided with your leak
detector. The use of extension cords is not recommended
and could result in damage to the equipment and loss of
warranty.
❑ To avoid electric shock, connect the product power cord to
a grounded power receptacle. A protective ground
connection by way of the grounding conductor in the power
cord is essential for safe operation.
❑ Before powering the unit the first time, verify that the unit is
configured to operate for the local mains supply voltage.
❑ Opening the enclosure may expose hazardous voltages.
Always disconnect the power cord and interface cables
before opening the enclosure. Do not touch the power
inlet’s contacts for at least 10 seconds after disconnecting
the power cord.
xviii
Model 979 Series Helium Mass Spectrometer Leak Detector
CAUTION
This equipment generates, uses, and can radiate RF energy and
if not installed and used in accordance with the instructional
manual, may cause harmful interference to radio
communications.
When this equipment is operated in a commercial environment
operation is subject to the following two conditions:
❑ This equipment may not cause harmful interference, and
❑ This equipment must accept any interference received,
including interference (RF and ESD) that may cause
undesired operation.
Operation of this equipment in a residential area is also likely to
cause harmful radio communications interference in which
case the user will be required to correct the interference at his
own expense.
Vacuum Equipment and Cleanliness
Cleanliness is vital when servicing the leak detector or any vacuum equipment. There are
some techniques that are more important in leak detector servicing than in general vacuum
work:
CAUTION
Do not use silicone oil or silicone grease.
Use powder-free butyl or polycarbonate gloves to prevent skin
oils from getting on vacuum surfaces.
Do not clean any aluminum parts with Alconox ®. Alconox is
not compatible with aluminum and will cause damage.
NOTE
Normally, it is unnecessary to use vacuum grease. However, if it
must be used, avoid silicone types, and use it sparingly.
Apiezon® L grease is recommended (Vacuum Technologies Part
No. 695400004).
xix
DRAFT 9/15/03
This equipment may need to be reset after RF and/or ESD events
by cycling the Power Switch/Circuit Breaker on the back panel
of the unit.
Model 979 Series Helium Mass Spectrometer Leak Detector
O-ring Care
When removing, checking or replacing O-rings, keep in mind the following:
NOTE
CAUTION
Vacuum Technologies recommends replacing all O-rings
during routine maintenance or during any maintenance
procedure requiring that O-rings be removed.
Remove O-rings carefully with your fingers. Do not use metal
tools for this task. This prevents scratching of any sealing
surfaces.
❑ Wipe all O-rings clean with a lint-free cloth before
installation to ensure that no foreign matter is present to
impair the seal.
❑ Do not use grease or other substance on O-rings that will
DRAFT 9/15/03
come in contact with the spectrometer tube.
❑ Do not use alcohol, methanol or other solvents on O-rings.
To do so causes deterioration and reduces their ability to
hold a vacuum.
❑ If applicable, apply a small amount of Apiezon® L grease
and wipe the O-rings “shiny” dry.
NOTE
xx
Due to the effective cleaning nature of VacuSolv solvent and
its residue-free properties, Vacuum Technologies’ Component
and Spectrometer Tube Cleaning Kit
Part Number 670029096), used in accordance with the kit
instructions, is recommended for cleaning the spectrometer
tube components. The kit can also be used for fine cleaning of
other parts in the leak detector’s vacuum system such as valves
and fittings. No rinsing steps or high-temperature drying is
required following cleaning with VacuSolv. Although
appropriate precautions are advised, VacuSolv is compatible
with most materials and does not contain toxic chemicals or
CFCs (chlorofluorocarbons).
Model 979 Series Helium Mass Spectrometer Leak Detector
CAUTION
The spectrometer tube operates at a very high vacuum
produced by the high vacuum pump. Service of the
spectrometer tube requires that this vacuum be vented to the
atmosphere.
CAUTION
Do not use grease or other substance on O-rings that will come
in contact with the spectrometer tube.
CAUTION
If the spectrometer tube magnet comes in contact with a
magnetic surface, the magnet may lose its gauss, causing the
spectrometer tube to lose sensitivity.
WARNING
Store the Ion Source in a cool, dry area in a tightly sealed
container. Wash hands thoroughly after handling the Ion Source
and especially before smoking or eating.
Gross Leak Option
If the Gross Leak option is installed, heed the following:
CAUTION
Do not make any alterations to the Gross Leak. Do not touch
the knurled nut on the Gross Leak.
The Gross Leak is calibrated at the factory and if any alteration
is made, the Gross Leak must be returned to the factory for
recalibration. For returns, contact Vacuum Technologies
Customer Service at 1-800-8VARIAN.
Pumps
WARNING
To avoid injury, use proper lifting techniques when moving
pumps. Your system may have pumps that require two people
to move them safely.
xxi
DRAFT 9/15/03
Spectrometer Tube
Model 979 Series Helium Mass Spectrometer Leak Detector
WARNING
The vacuum pumps are also compressors; incorrect operation
may be dangerous. Study the “Mechanical Pump Operation
Manual” enclosed with your pump before starting pumps.
The pumps are designed to prevent any thermal risk for user
safety. However, specific operating conditions may generate
temperatures >70 °C.
DRAFT 9/15/03
Hot oil will burn the skin. Service of the pumps in this area
must be performed by authorized personnel only. Stand back
from mechanical pump before starting.
CAUTION
Check the oil level often. Do not allow oil-based mechanical
pumps to run when oil level is below LOW mark. Damage to
pumps can occur if operated with no oil.
WARNING
To avoid injury, wait until the turbo pump is completely
stopped before disconnecting it from the vacuum system.
Vacuum Technologies Services
The following are two of the many services that Vacuum Technologies offers its customers.
Please see our catalog, or contact us to learn of the services that are available. Contact
Vacuum Technologies Customer Service at 1-800-8VARIAN for details.
❑ Rebuilt spectrometer tubes are available on an exchange basis.
❑ NIST-traceable calibrated leak testing and verification services.
Contacting Vacuum Technologies
In the United States, you can contact Vacuum Technologies Customer Service at
1-800-8VARIAN.
Internet users:
❑ Send email to Customer Service & Technical Support at
vpl.customer.support@varianinc.com
❑ Visit our web site at www.varianinc.com/vacuum
❑ Order on line at www.evarian.com
See the back cover of this manual for a listing of our sales and service offices.
xxii
Model 979 Series Helium Mass Spectrometer Leak Detector
Section 1. Introduction to the Model 979 Series
1.1 The Model 979
The 979 uses Vacuum Technologies’ Platform leak detector electronics architecture to operate the spectrometer assembly, control the mechanical and high vacuum pumps, control the
valve block, and provide leak rate and system status information to the operator interface.
1.1.1 Model 979 Series Configurations
This section contains outline drawings of the various configurations of the 979 Series leak
detector.
Figure 1-1 shows the outline drawing and physical dimensions of the stand-alone,
bench-mount 979 Series Leak Detector.
Figure 1-1
979 Bench Mount Unit
1-1
DRAFT 9/15/03
The Model 979 is a wide-range Helium Mass Spectrometer Leak Detector. It is
comprised of a turbomolecular high vacuum pump, spectrometer tube, valve block,
Vacuum Technologies’ Platform leak detector electronics, and an operator interface in a
stylish, yet rugged housing. The 979 is available as a stand-alone, bench-mount unit or as
a single or dual, dry or oil sealed mechanically pumped leak testing station on a cart.
Outline drawings for each configuration are shown in Section 1.1.1 “Model 979 Series
Configurations”.
Model 979 Series Helium Mass Spectrometer Leak Detector
DRAFT 9/15/03
Figure 1-2 shows the outline drawing and physical dimensions of a single, oil sealed
mechanically pumped leak testing station with the 979 Series Leak Detector on a two-wheel
cart.
Figure 1-2
1-2
Single, Oil-Sealed Mechanical Pump Configuration on Two-Wheel Cart
Model 979 Series Helium Mass Spectrometer Leak Detector
Figure 1-3
DRAFT 9/15/03
Figure 1-3 shows the outline drawing and physical dimensions of a single, dry mechanically
pumped leak testing station with the 979 Series Leak Detector mounted on a two-wheel
cart.
Single, Dry Mechanical Pump Configuration on Two-Wheel Cart
1-3
Model 979 Series Helium Mass Spectrometer Leak Detector
DRAFT 9/15/03
Figure 1-4 shows the outline drawing and physical dimensions of a single, dry mechanically
pumped leak testing station with the 979 Series Leak Detector on a four-wheel cart.
Figure 1-4
1-4
Single, Dry Mechanical Pump Configuration on Four-Wheel Cart
Model 979 Series Helium Mass Spectrometer Leak Detector
Figure 1-5
DRAFT 9/15/03
Figure 1-5 shows the outline drawing and physical dimensions of a dual, oil sealed
mechanically pumped leak testing station with the 979 Series Leak Detector on a four-wheel
cart.
Dual, Oil-Sealed Mechanical Pump Configuration on Four-Wheel Cart
1-5
Model 979 Series Helium Mass Spectrometer Leak Detector
DRAFT 9/15/03
Figure 1-6 shows the outline drawing and physical dimensions of a dual, dry mechanically
pumped leak testing station with the 979 Series Leak Detector on a four-wheel cart.
Figure 1-6
1-6
Dual, Dry Mechanical Pump Configuration on Four-Wheel Cart
Model 979 Series Helium Mass Spectrometer Leak Detector
1.2 Unpacking the 979
The 979 leak detector is carefully packed onto a resiliently mounted skid and enclosed by a
heavy cardboard container banded to the skid. Upon receipt, inspect the container for evidence of damage in shipment. Do not discard any evidence of rough handling. When opening the container, refer to the unpacking instructions located on the outside of the shipping
container. Factory packing provides for maximum protection during shipment. However,
inspect the leak detector and related items immediately. Report any damage to the carrier
without delay.
The following items are included in the shipment:
❑ Model 979 Series Operations Manual
❑ Model 979 leak detector configured and completely assembled as ordered
❑ All necessary power cords
❑ Any optional equipment ordered
❑ Any manuals for optional equipment purchased.
1.2.1 Unpacking Instructions
To unpack the 979 leak detector and remove it from the skid:
1. Inspect the container for evidence of damage in shipment. Do not discard any evidence
of rough handling.
Report any damage to the carrier and to Vacuum Technologies Customer Service at
1-800-8VARIAN without delay.
2. Carefully remove the outer shipping container.
3. Inspect the leak detector and related items immediately for any indication of shipping
damage.
4. Carefully cut the strapping holding the leak detector on the skid.
5. Remove any loose boxes or packages and put them aside.
Keep the original packing for re-use in the event that it is necessary to return the leak
detector to Varian Vacuum Technologies.
6. Carefully remove the front brace by removing the two lag bolts.
7. Carefully remove the plastic bag covering the leak detector.
The leak detector can now be removed from the skid.
1-7
DRAFT 9/15/03
❑ Pump manuals (for the purchased configuration)
Model 979 Series Helium Mass Spectrometer Leak Detector
1.2.2 Removing the 979 from the Skid
There are two methods for removing the 979 from the skid. Both methods require two
people. The second method involves removing the Skid-Mates (the blue donut-shaped
mounts at the front of the skid) from the skid.
WARNING
Handle the leak detector carefully and properly in the following
steps. Personal injury or damage to the leak detector could
result from improper handling. The 979 is heavy and can cause
personal injury if not handled carefully when removing it from
the skid.
Method 1
1. With the assistance of a helper, carefully roll the leak detector toward the front of the
skid.
2. Lift the front end of the unit and gently lower it onto the floor.
DRAFT 9/15/03
3. Lift the rear of the unit and roll it on the front casters until it is clear of the skid.
4. Gently lower the rear end onto the floor.
Method 2
1. Using the brace removed in Step 6 of Section 1.2.1 “Unpacking Instructions” as a lever,
carefully raise the front edge of the skid between 1" and 2".
2. While a helper holds the leak detector against the back brace, unscrew and remove the
front two Skid-Mates by turning them in a counterclockwise direction.
3. Make sure the helper is still holding the leak detector against the back of the skid, then
gently lower the front of the skid to the floor.
4. Carefully and slowly roll the leak detector off the skid and onto the floor.
1.2.3 Removing Loose Packing
Once the 979 is off the skid, take out and remove all loose packing from the leak detector.
1-8
Model 979 Series Helium Mass Spectrometer Leak Detector
1.3 Services Required for Operation
1.3.1 Power
Depending upon the configuration you ordered, the mains power supply requirements for
the 979 Series leak detector are:
❑ 100 VAC, 20 A, 50 Hz / 115 VAC, 20 A, 60 Hz, or
❑ 230 VAC, 20 A, 50/60 Hz
CAUTION
Mains supply voltage fluctuations shall not exceed ±10% of the
nominal voltage.
Transient overvoltages shall not exceed values according to
Installation Category (Overvoltage Category) II of the
UL3101-1 Standard.
DRAFT 9/15/03
Fixed mains socket-outlet shall be connected to PROTECTIVE
EARTHING system.
For indoor use only, Pollution Degree II in accordance with
UL3101-1 Standard.
CAUTION
Vacuum Technologies strongly recommends the use of surge
protection to improve the immunity of the 979 Series leak
detectors against unidirectional transients caused by the
following phenomena:
❑ Switching phenomena in the power network
(e.g., switching of capacitor banks)
❑ Faults in the power network
❑ Indirect lightning strokes
WARNING
Use only the power cord that was provided with your leak
detector. The use of extension cords is not recommended and
could result in damage to the equipment and loss of warranty.
1-9
Model 979 Series Helium Mass Spectrometer Leak Detector
1.3.2 Helium
For testing products, or leak checking the 979, welding grade helium in a standard cylinder
with pressure regulating valve and hose is required.
1.3.3 Recommended Additional Services
The following additional services are recommended, especially in the case of clean room
use:
❑ A roughing/foreline pump exhaust hose to the outside of the room using the
connection on pump exhausts. This can help reduce the particulate count and the
helium background signal.
DRAFT 9/15/03
❑ When using oil lubricated mechanical pumps, an oil mist eliminator can be used on
the exhaust port of the mechanical pump to reduce the oil mist from the exhaust. Oil
mist eliminators can, however, become saturated with oil causing slower pumping
speeds and higher helium backgrounds in the leak detector. The replacement time
interval of the oil mist eliminator is determined by whether the user frequently
operates at elevated roughing pressures, pumps on large volumes, or frequently
cycles the system. Refer to Section 4.6 “979 Spare Parts List” on page 4-22 and
Section 4.7 “979 Accessory Item List” on page 4-24 for the mist eliminator and
replacement cartridge part number.
1.4 Preparation for Operation
Pre-operational set up is minimal for the 979 Series leak detector.
Oil sealed vacuum pumps are shipped with the proper initial charge of oil. On the front of
the roughing and forepumps is an oil level sight glass. The oil level should be in the middle
of the glass when the pump is not running. Check the oil level after running the pump for at
least 10 minutes. For additional information, see the Mechanical Pump Operation Manual
that was enclosed with your pump.
1-10
Model 979 Series Helium Mass Spectrometer Leak Detector
1.5 Installation
The 979 Series leak detector is delivered completely assembled as ordered. Locate the
979 close to its power source and be sure there is at least four inch clearance for proper
ventilation, and sufficient room for the operator to safely maneuver to perform testing.
Additional ventilation requirements for your specific application as discussed in
Section 1.3.3 “Recommended Additional Services” on page 1-10 must also be provided at
this point.
NOTE
Refer to Section 1.5.1 “Bench System Installations” on
page 1-11 for instructions on bench system installations, which
require some customer configuration.
Figure 1-7 represents the process for installation of a bench system version of the 959/959D.
Note, cut the 3/4" black tubing into 2 equal lengths for use as shown.
Foreline
Connector
Figure 1-7
970 Bench System Installation
1-11
DRAFT 9/15/03
1.5.1 Bench System Installations
Model 979 Series Helium Mass Spectrometer Leak Detector
1.6 Storage
If the leak detector is not used immediately, it can be stored as received without special
precautions. A dry, relatively dust-free area is preferred. The required environmental
conditions for storage are:
❑ 0% to 95% relative humidity, non-condensing
❑ −20 °C (−4 °F) to +60 °C (+140 °F) ambient temperature
1.7 Front Panel Displays and Controls
DRAFT 9/15/03
The 979 front panel leak rate display and control buttons are located on the front right-hand
side of the leak detector (Figure 1-8). The panel features large, color coded and clearly
labeled buttons, and a large, easy to read bar graph display. A brief description of the
control buttons follows. A more detailed discussion is included in Section 2 “Operating the
979 Leak Detector” on page 2-1.
➀
11
12
➂
➆
➃ ➉
Figure 1-8
1-12
➁
➇
➈
➅
➄
Front Panel Displays and Controls
Model 979 Series Helium Mass Spectrometer Leak Detector
➀ Leak Rate Display
The large bar graph displays the leak rate in one of two forms:
❑ A mantissa on the bar and a numerical exponent
❑ Just the bar as a logarithmic bar graph display
➁ Pressure Displays
Two smaller bar graphs display the pressures in the spectrometer
tube and the test port. The small bar graphs change color to
indicate more or less favorable conditions.
➂ Audio Volume
A pair of buttons are provided to change the volume level of the
audio leak rate indication.
Control
➃ Sniffer On/Off
The SNIFFER ON/OFF button toggles the 979 into and out of
SNIFFER mode. The LED illuminates when SNIFFER mode is
enabled.
➄ Vent
The VENT button advances the 979 to the vented state. The
LED indicator illuminates while the 979 is in the vented state.
➅ Test/Hold
When in VENT or HOLD, pressing the TEST/HOLD button
automatically advances the 979 through roughing, then through
the various test states, depending on the achievable test port
pressures and leak rates. The green LED above the button illuminates when the 979 is in a test state. When in TEST, pressing the
TEST/HOLD button automatically advances the 979 to the HOLD
state. The yellow LED below the button illuminates when the 979
is in the HOLD state.
➆ Zero
The ZERO button is functional only in the test state. The ZERO
function zeros the leak rate in the current valve test state. The LED
illuminates while the zero function is taking place.
➇ Read Standard Leak
The READ STANDARD LEAK button is functional only in the test
state. This function is used to verify calibration by exposing the
optional internal calibrated leak or the external calibrated leak to
the system.
➈ Calibrate
The CALIBRATE button initiates the calibrate function using either
the optional internal calibrated leak or an external leak in the test
port, as dictated by the parameters set on the Calibrated Leak
Set-Up screen (see Section 2.6.1 “Calibrated Leak Set-Up” on
page 2-14). The LED illuminates to indicate that calibration is
taking place.
➉ Key Switch
This three-position key switch, SET-UP/RUN/SERVICE, allows for
access and control of operational parameters, as well as service
related functions.
1-13
DRAFT 9/15/03
The label for the bar graph changes to indicate the current mode of
operation.
Model 979 Series Helium Mass Spectrometer Leak Detector
11
Under
The UNDER range light indicates that the measured helium leak
rate is currently less than the minimum displayable value. The light
may flash briefly as the system recovers from a leak indication and
the displayable leak rate approaches zero. If the AUTO-ZERO < 0
is turned on, the UNDER light may also flash briefly as the system
resets the zero point to a lower value. Refer to Section 3.1.1.1
“AUTO-ZERO < 0” on page 3-3.
The 979 does not display a leak rate while the UNDER light is on.
If this light stays on for more than a few seconds, recalibrate the
system to set operating parameters to the correct zero value. This
situation can take place if the 979 was not fully warmed up before
calibration was initiated.
DRAFT 9/15/03
12
Over
The OVER range light indicates that the system is saturated with
helium and the measured leak rate is higher than the maximum
displayable value.
1.8 Rear Panel Controls
1.8.1 System Control and Communication Panel
The system control and communication panel (Figure 1-9) is located on the lower left
section of the rear panel.
➄
➀
➁
➂
➅
Figure 1-9
1-14
➃
System Control and Communication Panel
Model 979 Series Helium Mass Spectrometer Leak Detector
➀ I/O connector
The I/O connector is a 37-pin female D-type connector. Access to
all discrete input/output functions, RS-232, reject set points, and
analog leak rate output signals are available at this connector. A
detailed summary of information related to I/O communications is
provided in Appendix B “Communications Protocol”.
➁ Foreline Pump
The KF25 foreline pump connection is used to connect the
fore/roughing pump of a single mechanical pump configuration,
or the dedicated forepump of a dual pump configuration.
➂ Remote Control
Input
➃ Control Logic
➄ Sniffer Inlet
➅ System Vent Port
A 9-pin female D-type connector is provided to connect the
optional remote control device (Part Number L9558301). The
operation procedure for the optional remote is outlined in the
Remote Control Operation Manual (Part Number 699909915).
Not currently used.
Not currently used.
Not currently used.
DRAFT 9/15/03
Connection
1.8.2 Power Control and Circuit Breakers
The 979 power entry control and circuit breaker module is located on the lower right
section of the rear panel (Figure 1-10). The label above this panel contains information
regarding the connections on this panel.
➄
➅
➆
➀
➁
➃
Figure 1-10
➂
Power Control and Circuit Breakers
1-15
Model 979 Series Helium Mass Spectrometer Leak Detector
➀ Main Power
Switch/Circuit
Breaker
➁ Power Input Filter
Connector
DRAFT 9/15/03
The main power input connector accepts the power cord that is
provided with the leak detector. The power cord is rated for 20 A
service and must not be modified to plug into a lower rated receptacle.
➂ Forepump Power
The 20 A forepump power output connector accepts the mating
connector from the fore/roughing pump of a single mechanical
pump configuration, or the mating connector from the dedicated
forepump of a dual mechanical pump configuration.
➃ Rough Pump
The 20 A rough pump power output connector accepts the mating
connector from the dedicated roughing pump of a dual mechanical
pump configuration. This connection is not used on the single
mechanical pump configuration.
Power
➄ Roughing Valve
Power
➅ Rough Valve
Circuit Breaker
➆ Turbo Pump
Circuit Breaker
1-16
The power entry module contains the main power ON/OFF switch/
circuit breaker. The 979 may be powered down in any state. Upon
power down, all internal valves close in order to protect and maintain the cleanliness of the vacuum system.
The roughing valve power output connector accepts the mating
connector from the roughing valve in dual mechanical pump configurations.
❑ 3.0 A (100 VAC / 115 VAC)
❑ 1.5 A (230 VAC)
❑ 3.0 A (100 VAC / 115 VAC)
❑ 1.5 A (230 VAC)
Model 979 Series Helium Mass Spectrometer Leak Detector
1.9 Universal Remote Option
Figure 1-11
DRAFT 9/15/03
The Universal Remote shown in Figure 1-11 allows the operator limited control of the
979 Series Leak Detector at a distance of up to 25 feet from the unit. The Universal
Remote is connected through the port labeled Varian Remote Control on the rear panel
(see Figure 1-9 on page 1-14). For operation instructions, refer to the Universal Remote
Instruction Manual provided with the remote.
Universal Remote Option
1-17
Model 979 Series Helium Mass Spectrometer Leak Detector
1.10 Specifications
The specifications for the 979 Series Leak Detector are provided in Table 1-1.
Table 1-1
979 Series Specifications
Specifications
979 Helium Mass Spectrometer Versions
System Sensitivity
Standard Sensitivity
High Vacuum Pump Type,
Air-cooled,
maintenance-free
DRAFT 9/15/03
Rough/Fore Pump
High Sensitivity
Vacuum Technologies Turbomolecular Pump
Wet (Oil-sealed)
Dry (TriScroll)
Wet (Oil-sealed)
Dry (TriScroll)
Rough Pump Type
—
SD-451
—
TS-620
—
SD-451
—
TS-620
Free Air Displacement
l/min, 60/50 Hz
—
410/342
—
500/420
—
410/342
—
500/420
Fore Pump Type
DS-302
DS-302
TS-620
TS-320
DS-302
DS-302
TS-620
TS-320
Free Air Displacement,
l/min, 60/50 Hz
285/237 285/237 500/420 250/210 285/237 285/237 520/420 250/210
Minimum Detectable Leak,
atm-cc/sec
5 x 10–10
5 x 10–11
Leak Units
atm-cc/sec, mbar-l/sec, torr-l/sec, Pa-m3/sec
Response Time
Less than 0.5 second, in accordance with AVS Standard 2.1.
Amplifier Drift
Less than 5% of full scale of the most sensitive range, in accordance with AVS
Standard 2.1.
Noise Level
Less than 5% of full scale, peak-to-peak, in accordance with AVS Standard 2.1.
Calibration
Fully automated tuning and calibration using the internal or external calibrated
leak. The fast calibrate feature allows the standard version to calibrate in less
than 20 seconds and the high sensitivity version to calibrate in less than
1 minute.
Zero Control
Selectable mode background elimination with unique AUTOZERO<0 feature.
Leak Indication
A 50-segment bar graph (linear or log) indicator displays leak rates
automatically; alphanumeric indication on LCD display. A leak can also trigger
an audible alarm frequency that varies in proportion to the size of the leak,
dedicated volume control and programmable audio threshold. Analog voltage is
proportional to the leak rate.
1-18
Model 979 Series Helium Mass Spectrometer Leak Detector
Table 1-1
979 Helium Mass Spectrometer Versions
Pressure Indication
Test port and spectrometer pressure bar graph displays and test port pressure
alphanumeric indication on LCD display.
Spectrometer Tube
Sensitivity optimized design, header mounted ion source with dual thoria-coated
iridium filament, preamplifier, ConvecTorr®, and vacuum gauge.
Automatic Valve
Sequencing
Microprocessor-controlled valve operation provides automatic system cycling.
Safety Interlocks
A valve system design that completely protects the high-vacuum system under
test against pressure surge and power interruption.
Cycle Time
Blanked port can be cycled to the fine leak test in 4 seconds. An auto sequencer
feature provides clear accept/reject signals and allows programming of a
complete test cycle (START/ROUGH/TEST/VENT).
Test Port
NW25; A 11/8" (28 mm) ID Compression Port is available as an accessory.
Remote I/O Capabilities
Interface (DB-37S) with optically isolated (5-24 VDC) outputs and inputs,
Non-isolated Serial RS-232 interface, and Non-isolated Analog output (0-10 V).
Non-isolated Remote Control (DB-9S) interface.
Accessories (optional)
Universal Remote (part # L9558301) with 25 foot cord, External Calibrated Leak,
and Power Probe.
Recommended Operating Ambient Conditions
Installation
Indoor use only. Altitude up to 2000 m (6,400 feet). Installation (Overvoltage)
Category II, Pollution Degree II according to UL3101-1 Standard
Temperature
+12 °C (54 °F) to +40 °C (104 °F) for Wet Version
(w/oil-sealed mechanical pumps)
+5 °C (41 °F) to +40 °C (104 °F) for Dry Version
(w/TriScroll™ mechanical pumps)
Humidity
Maximum relative humidity (HR) 80% for temperatures up to +31 °C (88 °F)
decreasing linearly to 50% HR at +40 °C (104 °F). No hoarfrost, dew, percolating
water, rain, solar irradiation, etc.
Air Pressure
75 kPa (563 Torr) to 106 kPa (795 Torr)
Storage Ambient
Conditions
Relative humidity: 0% to 95%, non-condensing. Temperature:
−20 °C (−4 °F) to +60 °C (140 °F)
Power Requirements
100 VAC, 20 A, 50 Hz / 115 VAC, 20 A, 60Hz or 230 VAC, 20 A, 50/60 Hz.
Start-Up current for “Wet” version up to 85 A peak for up to 10 seconds at
temperature less then 20 °C (68 °F).
Note: 1. Input voltage cannot be modified by customer
Note: 2. No extension cord can be used.
1-19
DRAFT 9/15/03
Specifications
979 Series Specifications (Continued)
Model 979 Series Helium Mass Spectrometer Leak Detector
Table 1-1
Specifications
979 Series Specifications (Continued)
979 Helium Mass Spectrometer Versions
EMC
89/392/EEC Directive; EN61326:1997.
Dimensions
See Outline Drawings (Figure 1-1 on page 1-1 to Figure 1-6 on page 1-6).
Weight
50 lb. (23 kg) net – stand-alone, bench-mount unit.
180 lb. (82 kg.) net – wet 1-pump 979 version with
DS-302 oil-sealed pump on a two wheel cart.
DRAFT 9/15/03
243 lb. (111 kg) net – wet 2-pump 979 version with
DS-302 and SD-451 oil-sealed pumps on a four-wheel cart.
1-20
Model 979 Series Helium Mass Spectrometer Leak Detector
Section 2. Operating the 979 Leak Detector
2.1 Initial Startup and Shutdown
2.1.1 Startup
Plug the leak detector power cord into an appropriate receptacle and place the power
switch on the rear power control panel in the l position.
2.1.2 Calibration
The 979 is capable of performing an automated calibration routine using either an internal
calibrated leak (factory installed), or an external calibrated leak placed into the test port.
Refer to Section 2.6.1 “Calibrated Leak Set-Up” on page 2-14 for proper set-up of the 979
for auto-calibration.
After starting the 979, a calibration routine must be executed. If using the internal calibrated
leak, a calibration is performed by pressing the TEST button on the front panel to place the
system in test mode, then pressing the CALIBRATE button on the front panel to perform an
automated calibration of the system.
Calibration can be verified by pressing the READ STANDARD LEAK button on the front
panel when in TEST mode. Press the READ STANDARD LEAK button again to return to TEST
mode.
If an external leak is to be used, first press the VENT button to vent the leak detector and
then install a calibrated leak into the test port. Press the TEST button to place the leak
detector in Fine Test mode. Verify the correct leak rate value for the external leak by going to
the Calibrated Leak Set-Up screen (Section 2.6.1 “Calibrated Leak Set-Up” on page 2-14).
Once in Fine Test, press the CALIBRATE button to perform an automated calibration.
When calibration is complete, the leak detector reverts to a Fine Test mode of operation to
allow for calibration verification.
2.1.3 Shutdown
Shutting down the 979 is as simple as moving the power switch on the rear panel to
the position. The system may be in any mode when shut down. It bears noting, however,
that when the system is shut down, all valves in the system close, so if the system is not in
VENT mode, the test port remains under vacuum and may be difficult to open.
°
2-1
DRAFT 9/15/03
When the SYSTEM READY indication appears on the home screen, the leak detector is
ready for operation. If the 979 is being started after a long period of being off (several hours),
it may take up to 30 minutes to stabilize and provide reliable, quantitative leak rate
readings.
Model 979 Series Helium Mass Spectrometer Leak Detector
2.2 Operator Interface
DRAFT 9/15/03
The front panel of the Model 979 is shown in Figure 2-1. Operation controls include
buttons for AUDIO VOLUME, SNIFFER, ZERO, READ STANDARD LEAK, CALIBRATE,
TEST, HOLD and VENT functions. In addition to the basic control buttons, the 979 utilizes a
touch panel display for the initial set-up of the leak detector. An access key switch is also
provided to prevent unauthorized changes to the system set-up variables.
Figure 2-1
979 Front Panel
Press the TEST/HOLD button when in VENT mode to automatically advance the
979 through roughing and then into the test state. The optimum sampling mode
is automatically selected, depending on the system configuration and set-up,
and the achievable test port pressure and leak rate. The TEST indicator LED,
located above TEST, illuminates when the 979 is in a test state.
If the TEST/HOLD button is pressed while the 979 is in the test state, the unit
advances to the HOLD state and the HOLD indicator LED, located below
HOLD, illuminates. When in HOLD mode, the test port valve V6 is closed,
isolating the test port and any test objects or fixturing from the leak detector
vacuum system. The test port pressure gauge is located on the test port side of
V6 and subsequently a rise in test pressure may be observed while in this mode.
While in TEST or HOLD, pressing the TEST/HOLD button causes the machine to
alternate between the two states.
Press the VENT button to isolate the test port from the leak detector vacuum
system and vent the test port to the atmosphere. The VENT indicator LED,
located above VENT, remains lit while the 979 is in the vented state.
2-2
Model 979 Series Helium Mass Spectrometer Leak Detector
The ZERO button is only active while the leak detector is in the test state. Press
the ZERO button to cause the 979 to read the background leak rate signal plus
electronic noise signal for the current flow rate (for example, mid-stage), store
the reading in memory, and then reset the zero reference point on the leak rate
display. The ZERO indicator LED lights while zeroing is taking place.
Subsequent test measurements include both helium from the real leak and
helium from background conditions. The 979 automatically subtracts the
recorded background signal from the measurement and displays the real leak
rate only.
Pressing the ZERO button while you are introducing helium
tracer gas to the test object could result in the suppression of a
real leak. Only use the ZERO button after the helium tracer gas
source has been removed.
When used correctly, the ZERO capability of the 979 is very powerful. It allows
for testing to sensitivity levels that are below the system background. This feature
also reduces test cycle times by reducing the amount of time required for
background levels to naturally clean up or by allowing for testing to begin at
relatively high test pressures.
The READ STANDARD LEAK button is only functional while the leak detector is
in a test state. The READ STANDARD LEAK button activates the optional internal
calibrated leak, allowing verification of the system calibration. When the system
is in READ STANDARD LEAK mode, its LED indicator lights.
Press the READ STANDARD LEAK button to isolate the test port from the system,
evacuate the calibrated leak manifold, and expose the leak to the spectrometer
tube. Compare the displayed leak rate value to the calibrated leak value.
Because the test port is isolated from the forepump and rough pump in this
mode, a slight increase in test port pressure may be indicated on the test port
pressure bar graph display.
The CALIBRATE button is used to perform an automated calibration based upon
the parameters set on the Calibrated Leak Set-Up screen (Section 2.6.1
“Calibrated Leak Set-Up” on page 2-14). CALIBRATE causes the 979 to rough
out and expose the internal standard leak to the system or, if EXTERNAL LEAK is
set during configuration, verifies that the test port is roughed out and exposed to
the system. The variable focus is scanned, then the ion voltage is scanned to find
the peak signal. The system notes the leak rate reading, then the leak is turned
off and the system is zeroed. Finally, a gain is calculated from the leak rate
reading to make the signal match the value of the calibrated leak and the system
is returned to TEST mode. The CALIBRATE indicator LED lights while calibration
is taking place.
2-3
DRAFT 9/15/03
NOTE
Model 979 Series Helium Mass Spectrometer Leak Detector
The Audio leak rate indication volume is controlled by the two buttons labeled
HI and LOW and with up and down arrows. Press the HI arrow button to
increase the volume of the tone. Press the LOW arrow button to decrease the
volume of the tone.
When the leak rate bar graph display is set to LINEAR mode (Section 2.7.1
“Units Set-Up” on page 2-28), the audio signal increases from a low to high
pitch as the leak rate increases within each decade. The pitch cycles low to high
as it passes through each decade.
When the leak rate bar graph display is set to LOG mode, the audio signal
increases from a low to high pitch as the leak rate increases through the entire
bar graph scale. The LOG mode display setting is often desirable in sniffer
applications so the audio response corresponds directly to the size of the leak.
DRAFT 9/15/03
The SNIFFER ON/OFF button is used to toggle the 979 leak detector in and out
of SNIFFER mode. The SNIFFER indicator LED illuminates when SNIFFER mode
is enabled.
When the leak detector is in VENT mode, press the SNIFFER ON/OFF
button to start the test cycle. This automatically locks the leak detector into
CONTRA-FLOW™ LEAK mode, auto-ranging through four decades down to the
most sensitive range available for the current leak detector configuration.
If the leak detector is in TEST mode, pressing the SNIFFER ON/OFF button
performs the same function, with the exception of performing the test cycle start
sequence.
When in SNIFFER mode, press the SNIFFER ON/OFF button to switch the leak
detector back into the currently configured normal TEST mode.
2-4
Model 979 Series Helium Mass Spectrometer Leak Detector
2.2.1 Sniffer Set-Up Procedure
1. Vent the 979 and insert a Vacuum Technologies Power Probe
(Part Number K9565306) into the test port. Refer to the product catalog for additional
Power Probe configurations.
2. Set Range Stop to 10 - 07 (See Figure 2-12 on page 2-20).
3. Monitor the test port pressure reading on the touch panel display and adjust the Power
Probe flow valve for a test port pressure of 1 to 2 Torr.
4. Press ZERO to suppress the helium background signal.
Table 2-1 shows sniffer mode sensitivity.
Sniffer Mode Sensitivity Range (Full Scale)
Standard Sensitivity
High Sensitivity
10−4 to 10−7
10−5 to 10−8
All values in this table are at test port pressures between 1 and 2 Torr.
2.2.2 Key Switch
The 979 Key Switch allows three different levels of access to the touch panel system
controls—RUN, SET-UP or SERVICE. Two different keys are provided with the leak detector:
❑ Key T008 operates the switch in either the RUN or SET-UP positions.
The T008 key is intended for use by a line supervisor or engineer and allows most
parameters to be changed, but does not allow any operation that could damage the
unit.
❑ Key T009 operates the switch in RUN, SET-UP or SERVICE positions.
The T009 key is intended for service personnel and those who are very familiar with
the operation of the unit. Operations such as manually changing the valves can only
be performed when the key switch is in the SERVICE position. A first-level operator
would not have a key and would be able to operate the 979 with the key switch in
the RUN position only (key removed). No changes to the operating parameters are
allowed when the key switch is in the RUN position.
2-5
DRAFT 9/15/03
Table 2-1
Model 979 Series Helium Mass Spectrometer Leak Detector
2.3 Touch Panel Menus
The 979 Leak Detector uses a touch panel display for the initial set-up and configuration of
the leak detector. Once the leak detector is set up and configured for a specific application,
basic operation is controlled primarily by the clearly labeled buttons described in the previous section. The touch panel Home screen is shown below in Figure 2-2 and discussed in
detail in Section 2.4 “979 Touch Panel Home Screen” on page 2-8.
979
LEAK RATE: X.XXE-XX atm-cc/sec
T.P. PRESSURE: X.XE-XX Torr
REJECT# 2,4
SYSTEM READY
DRAFT 9/15/03
SYS INFO
Figure 2-2
MENUS
979 Touch Panel Home Screen
2.3.1 Contrast Adjustment of the Touch Panel Display
Press the upper left or right corner of the Touch Panel Home Screen to change the contrast.
2.3.2 Changing Variables in Touch Panel Screens
Touching the box that contains the variable to be changed causes the first digit of the
variable to be highlighted.
To change a variable in the Touch Panel Screens:
1. Touch the box for the parameter you want to
change to highlight the digit.
2. Touch the UP or DN arrow to change the value of
the highlighted digit.
2-6
Model 979 Series Helium Mass Spectrometer Leak Detector
3. Touch the NXT arrow to select the next digit to be
changed and set its value by repeating step 2.
4. Touch the OK box to accept changes and store the new value of the parameter into the
memory of the leak detector. Touch DONE to exit the screen and return to the previous
menu screen.
NOTE
Touching the ESC box before touching OK or BACK causes the
selected parameter to revert to its previously stored value.
2.3.3 Selecting Options in Touch Panel Screens
Many parameters are set via toggle boxes that you touch to switch between values or
modes. For example, Manual Range can be set to ON or OFF by touching the toggle box to
switch between displaying ON and OFF. In all cases, the information displayed in the box is
the selected value. Most screen values do not change until you press OK, but some changes
are immediate, such as the selection of units from the UNITS Set-Up screen or the selection
of the Linear or Logarithmic display from the OUTPUT CONTROL Set-Up screen.
2-7
DRAFT 9/15/03
To change any digit, touch the box containing the parameter you want to change and
then touch the NXT arrow to scroll to that digit and change it, as indicated in step 2.
Model 979 Series Helium Mass Spectrometer Leak Detector
2.4 979 Touch Panel Home Screen
The 979 Touch Panel Home Screen displays a summary of the following status and
configuration settings:
❑ Digital Leak Rate Display
❑ Test Port Pressure
❑ Leak Detector Status (not shown) ❑ Condition Indication (not shown)
❑ Reject Status Indicator
❑ System Ready Indicator
❑ SYS INFO touch screen box
❑ MENUS touch screen box
Two touch screen buttons, SYS INFO and MENUS, access or change the configuration as
shown in Figure 2.3.
979
DRAFT 9/15/03
LEAK RATE: X.XXE-XX atm-cc/sec
T.P. PRESSURE: X.XE-XX Torr
REJECT# 2,4
SYSTEM READY
SYS INFO
Figure 2-3
MENUS
979 Touch Panel Home Screen
2.4.1 Digital Leak Rate
The Digital Leak Rate (Figure 2.4) displayed on the touch panel Home screen correlates
directly with the bar graph leak rate display (Figure 2.5). The units for the measurements are
user selectable from the Units Set-Up screen (see Section 2.7.1 “Units Set-Up” on
page 2-28).
LEAK RATE: 0.6E-09 atm cc/sec
Figure 2-4
Leak Rate Displayed on Home Screen: 0.6E-09 atm cc/sec
Figure 2-5
2-8
Bar Graph Display: 0.6 x 10-09 atm cc/sec
Model 979 Series Helium Mass Spectrometer Leak Detector
2.4.2 Test Port Pressure
The Test Port Pressure value displayed on the touch panel Home screen represents the test
port pressure as measured by a thermocouple device mounted on the valve block just
below the test port. The pressure transducer and associated electronics provide reliable and
repeatable measurements, protecting the leak detector from damage due to over-pressure
conditions. The test port pressure gauge is not intended to provide precise, absolute pressure measurements. Use an external pressure transducer if the test process requires accurate
monitoring of the test object pressure. The units for the measurements are user selectable
from the Units Set-Up screen (Section 2.7.1 “Units Set-Up” on page 2-28).
2.4.3 Leak Detector Status
2.4.4 Leak Detector Condition
The Leak Detector Condition (not shown in Figure 2.4) is displayed below the Leak Detector Status and indicates the current condition of the leak detector. Under normal operating
conditions this line is blank. The 979 leak detector conditions are detailed in Table 2-3 on
page 2-10.
2.4.5 Reject Status Indicator
A REJECT status indicator displays below the Leak Detector Condition on the left-hand center of the Home screen when any of the four independent set points are enabled and have
been activated (see Section 2.6.2 “Reject and Audio Set Points” on page 2-16). If all set
points are disabled or are not active, then this indicator is not present.
2.4.6 SYS INFO and MENUS Touch Screen Boxes
Two touch screen boxes are displayed on the bottom of the Home screen. Touch the
SYS INFO box on the left-bottom of the Home screen to display the System Info screen,
which is discussed in the next section.
Touch the MENUS box on the right-bottom of the Home screen to display the First Menu
Selection screen. The First Menu Selection screen is discussed in Section 2.6 “First Menu
Selection Screen” on page 2-14.
2-9
DRAFT 9/15/03
Leak Detector Status (not shown in Figure 2.4) is displayed just below the test port pressure
reading and indicates the current operating state of the 979. The normal operating states are
detailed in Table 2-2 on page 2-10.
Model 979 Series Helium Mass Spectrometer Leak Detector
Table 2-2
DRAFT 9/15/03
Display
979 Operating States
Description
CALIBRATING
Indicates that the leak detector is currently performing a calibration routine. The leak
detector reverts to HOLD mode while calibrating to the internal leak standard.
FINE TEST
Indicates that the leak detector is in FINE TEST mode. When in FINE TEST mode
the test port valve opens and the leak detector is ready for fine leak testing.
GROSS TEST
Indicates that the leak detector is in GROSS TEST mode. When in GROSS TEST
mode the test port valve closes and the GROSS LEAK valve and ROUGHING
valves are open. While testing in this mode, the majority of the gas introduced into
the test port is swept away through the roughing pump, and a small sample is
introduced to the system through the GROSS LEAK needle valve. Gross leak
testing capability is only provided on dual pump configurations.
HOLD
Indicates that the leak detector is in HOLD mode. When in HOLD mode the test port
valve and the roughing valve are closed, isolating the test port and any test objects
or fixturing from the leak detector vacuum system.
ROUGHING
Indicates that the leak detector is currently ROUGHING the test port and any
attached test objects or fixturing attached to the test port.
STD LEAK
Indicates that the optional internal calibrated leak standard valve opens and the leak
detector is reading the leak value. The leak detector reverts to HOLD mode while
reading the internal leak standard.
VENTED
Indicates that the test port is vented to atmosphere. The test port and all objects
attached to the test port are isolated from the internal vacuum system of the 979.
Table 2-3
Display
979 Condition States
Description
[BLANK]
This line is blank under normal operating conditions.
BACKING
Indicates that the leak detector is momentarily backing the foreline of
the high vacuum pump during an extended rough period. This
condition will only be present on single pump configurations.
BOTH FILAMENTS BURNT OUT
Indicates that both filament 1 and filament 2 of the ion source have
burnt out.
CAL OK
Indicates that the calibration routine was executed successfully.
CALIBRATION PREP
Indicates that the leak detector is preparing for a calibration routine.
FILAMENT 1 BURNT OUT
Indicates that filament 1 of the ion source has burnt out. Filament 2 will
automatically light, if it is still good, and the leak detector will display a
flashing C in the leak rate exponent indicating that a calibration routine
is required.
2-10
Model 979 Series Helium Mass Spectrometer Leak Detector
Table 2-3
Description
FILAMENT 2 BURNT OUT
Indicates that filament 2 of the ion source has burnt out. Filament 1 will
automatically light, if it is still good, and the leak detector will display a
flashing C in the leak rate exponent indicating that a calibration routine
is required.
FILAMENT WAIT
Indicates that the system is lighting the filament.
Flashing C on exponent display
Indicates that the leak detector requires calibration.
GAIN TOO HIGH
Indicates that the gain value required to calibrate the leak detector
during the calibration routine is greater than the maximum allowable
value. This is generally the result of the system sensitivity being too
low.
GAIN TOO LOW
Indicates that the gain value required to calibrate the leak detector
during the calibration routine is less than the minimum allowable value.
This is generally the result of the system sensitivity being too high.
NO FOCUS PEAK
Indicates a tuning/calibration failure due to the system not detecting a
focus peak during the auto-tuning routine.
NO ION PEAK
Indicates a tuning/calibration failure due to the system not detecting an
ion peak during the auto-tuning routine.
OFFSET WAIT
Indicates that the system is setting the OFFSET value.
REJECT
Indicates a test object failure during an Auto Sequencer Test cycle.
See Section 2.6.3 “Auto Sequencer Set-Up” on page 2-17.
STABILIZATION WAIT
Indicates that the system is waiting for the electronics to stabilize
before completing the start-up routine.
STD LEAK PREP
Indicates that the optional internal calibrated leak is being roughed
before it is introduced directly to the system for calibration verification.
SWITCHING FILAMENTS
Indicates that the system is momentarily in the process of switching
from a burnt out filament to the next available filament.
SYSTEM PRESSURE WAIT
Indicates that the system (spectrometer tube) pressure is too high to
light the ion source filament.
SYSTEM READY
Indicates that the system is ready for testing. This message will only
be present during the initial start-up and is cleared after the first test
cycle.
ZEROING
Indicates that the leak detector is in the process of Zeroing out a
background signal. The Zero routine is only initiated automatically
during the start up and calibration routines, or manually when the
operator presses the ZERO button on the front control panel.
ZEROING WAIT
Indicates that the system is setting the initial zero values during the
start-up routine.
2-11
DRAFT 9/15/03
Display
979 Condition States (Continued)
Model 979 Series Helium Mass Spectrometer Leak Detector
2.5 979 System Information Screen
The System Info screen, shown in Figure 2-6, displays details of the current leak detector
set-up and operating conditions. The left-hand column displays filament status, reject set
point status, turbo status, gross leak configuration, auxiliary rough pump set-up, auto
sequencer status, and audio set point status. The right-hand column displays the calibrated
leak setting, leak rate range settings, and the sensitivity configuration. Table 2-4 describes
the displayed system information in detail.
SYSTEM INFO
979
LEAK RATE: X.XXE-XX atm-cc/sec
T.P. PRESSURE: X.XE-XX Torr
REJECT# 2,4
SYSTEM READY
DRAFT 9/15/03
SYS INFO
FIL 2 ON
REJECTS# 1,2,3,4
GROSS LEAK INSTALLED
INT. CAL LEAK
AUTO RANGING
RANGE STOP: -7
ROUGH PUMP: ROUGH ONLY
AUTO SEQUENCER: OFF
HIGH SENS
BACK
MENUS
Figure 2-6
System Information Screen, Typical Display
A touch screen box labeled BACK is located on the lower right-hand of the System Info
screen. Touch this box to return to the 979 Home screen.
a
Table 2-4
CONDITION
AUDIO SET POINT
AUTO SEQUENCER
CALIBRATED LEAK
2-12
System Information Screen Conditions
DISPLAY
DESCRIPTION
AUDIO SET POINT: ACTIVE
Audio Set Point is active.
AUDIO SET POINT: INACTIVE
Audio Set Point is inactive.
AUTO SEQUENCER: ON
Auto Sequencer (automatic test cycle)
is enabled.
AUTO SEQUENCER: OFF
Auto Sequencer (automatic test cycle)
is disabled.
INT CAL LEAK
System is set up to calibrate to the
internal standard leak.
EXT CAL LEAK
System is set up to calibrate to an
external standard leak.
Model 979 Series Helium Mass Spectrometer Leak Detector
System Information Screen Conditions (Continued)
CONDITION
GROSS LEAK
DISPLAY
DESCRIPTION
GROSS LEAK: INSTALLED
Gross leak installed–standard on dual
pump configurations.
GROSS LEAK: NOT INSTALLED
Gross leak not installed.
FIL 1 OFF
Filament 1 is selected and not lit.
FIL 1 ON
Filament 1 is selected and lit.
FIL 2 OFF
Filament 2 is selected and not lit.
FIL 2 ON
Filament 2 is selected and lit.
AUTO RANGING
System is set up to auto range through
leak rate scale.
MANUAL RANGING
System is set up for manual range
control.
RANGE STOP
RANGE STOP -[EXP]
System is set up so that the most
sensitive leak rate range displayed is
10-[EXP].
REJECT SET POINT
REJECT# 1,2,3,4 ACTIVE
Reject set points displayed are active;
this line is blank when all set points are
disabled or inactive.
ROUGH PUMP (Dual pump
configuration only)
ROUGH PUMP: ROUGH ONLY
Dedicated rough pump is connected to
the test port only during the roughing
cycle.
ROUGH PUMP: SPLIT FLOW
Dedicated rough pump is connected to
the test port during rough and test
cycles, providing additional pumping
capacity during test.
HIGH SENS
Leak detector is configured for high
sensitivity testing. This line is blank
when the leak detector is configured for
standard sensitivity testing.
ION SOURCE FILAMENT
LEAK RATE RANGE
SYSTEM SENSITIVITY
2-13
DRAFT 9/15/03
Table 2-4
Model 979 Series Helium Mass Spectrometer Leak Detector
2.6 First Menu Selection Screen
Touch the MENUS box on the Home screen to display the Main Menu screen (Figure 2-7).
The Main Menu screen displays the screens available for performing general set-up of the
979. Touching the BACK box from this screen displays the Home screen. Touching the
NEXT box calls up the Second Menu screen. Many menus contain toggle boxes that switch
between selections each time you touch them. The value or selection that is displayed when
you touch OK is what is set (Section 2.3.3 “Selecting Options in Touch Panel Screens” on
page 2-7). Other menus contain parameters. Change their values by following the procedure in Section 2.3.2 “Changing Variables in Touch Panel Screens” on page 2-6.
The screens available through the Main Menu screen are described in this section.
979
CAL
LEAK
SET-UP
ROUGH
PUMP
SET-UP
NEXT
REJECT &
AUDIO SET
POINTS
LEAK RATE
RANGING
SET-UP
TRANSFER
POINTS
SET-UP
AUTO
SEQUENCER
SET-UP
OUTPUT
CONTROL
SET-UP
BACK
LEAK RATE: X.XXE-XX atm-cc/sec
DRAFT 9/15/03
T.P. PRESSURE: X.XE-XX Torr
REJECT# 2,4
SYSTEM READY
SYS INFO
MENUS
Figure 2-7
First Menu Selection Screen
2.6.1 Calibrated Leak Set-Up
Touch the CAL LEAK SET-UP box to display the Calibrated Leak Set-Up screen, shown in
Figure 2-8. It is used to set the values of the Internal and External Calibrated leaks, to select
whether to use an internal or external calibrated leak standard for calibration, and to select
either FULL or FAST CALIBRATION mode.
CALIBRATED LEAK SET-UP
CAL
LEAK
SET-UP
ROUGH
PUMP
SET-UP
NEXT
REJECT &
AUDIO SET
POINTS
LEAK RATE
RANGING
SET-UP
TRANSFER
POINTS
SET-UP
AUTO
SEQUENCER
SET-UP
OUTPUT
CONTROL
SET-UP
BACK
INTERNAL LEAK VALUE: X.XE-XX
EXTERNAL LEAK VALUE: X.XE-XX
Figure 2-8
2-14
USE
INT
LEAK
OK
USE
FULL
CAL
DN
UP
NXT
Calibrated Leak Set-Up Screen
ESC
DONE
Model 979 Series Helium Mass Spectrometer Leak Detector
2.6.1.1 Selecting Internal or External Calibrated Leak for Calibration
Touch the USE INT/EXT LEAK box to switch between selecting whether the 979 performs an
automated calibration to the optional internal calibrated leak or to an external calibrated
leak placed in the test port.
2.6.1.2 Selecting Full or Fast Calibration Routine
FULL CALIBRATION
The calibration routine performs a thorough tuning process and a
system gain adjustment (calibration). The full tuning process
involves independently scanning the ion source chamber voltage
and the variable focus voltage, optimizing each value for a maximum helium signal. Once the tuning process is complete, the system gain is adjusted to bring the leak detector into calibration.
FAST CALIBRATION
During fast calibration, the leak detector compares the leak rate
signal with the calibrated leak value and, if the gain adjustment
required to bring the system into calibration is within the allowable
value, the full tuning operation is omitted.
The Calibration routine may be executed without removing the test object or test fixture
from the test port on single mechanical pump configurations, and on dual mechanical
pump configurations set in ROUGH ONLY mode.
NOTE
A test port cap must be in place (isolating the test port) while
performing the Calibration routine on Dual Mechanical Pump
Configurations set in SPLIT FLOW mode.
2-15
DRAFT 9/15/03
Touch the USE FULL/FAST CAL box to switch between FULL CALIBRATION and
FAST CALIBRATION modes.
Model 979 Series Helium Mass Spectrometer Leak Detector
2.6.2 Reject and Audio Set Points
Touch the REJECT & AUDIO SET POINTS box to display the Reject and Audio Set Points
screen (Figure 2-9). From this screen set the parameters to enable/disable, display and/or
change the value of the four reject set points and the audio set point.
CAL
LEAK
SET-UP
ROUGH
PUMP
SET-UP
REJECT &
AUDIO SET
POINTS
LEAK RATE
RANGING
SET-UP
AUTO
SEQUENCER
SET-UP
OUTPUT
CONTROL
SET-UP
REJECT AND AUDIO SET POINTS
NEXT
TRANSFER
POINTS
SET-UP
BACK
OFF
REJECT SET POINT #2: X.XE-XX
ON
REJECT SET POINT #3: X.XE-XX
OFF
REJECT SET POINT #4: X.XE-XX
OFF
AUDIO SET POINT: X.XE-XX
ON
DN
UP
Figure 2-9
DRAFT 9/15/03
REJECT SET POINT #1: X.XE-XX
NXT
ESC
OK
DONE
Reject and Audio Set Points Screen
2.6.2.1 Changing and Enabling Set Point Values
2-16
REJECT SET POINTS
Set REJECT SET POINTS 1 through 4 so that the set points activate
when the measured leak rate value exceeds the set point value.
When a reject set point activates, the word REJECT is displayed on
the Home screen of the touch panel along with the number of the
reject set point that has been activated. The status of the reject set
points are also available at the I/O communications port and upon
inquiry through the RS-232 line (see Appendix B “Communications
Protocol”). Disable individual reject set points using the ON/OFF
buttons located to the right of each set point field.
AUDIO SET POINT
The AUDIO SET POINT control is used to activate the audio tone
when the measured leak rate value exceeds the threshold value
(leak rate pass/fail specification) set by the operator. When the
audio set point control is set to ON, the audio tone frequency
increases as the size of the measured leak increases beyond the set
point. The audio volume control is located on the front panel (see
Figure 1-8 on page 1-12) and is discussed in Section 2.2 “Operator
Interface” on page 2-2.
Model 979 Series Helium Mass Spectrometer Leak Detector
2.6.3 Auto Sequencer Set-Up
Touch the AUTO SEQUENCER SET-UP box to display the Auto Sequencer Set-Up screen
Figure 2-10. Auto sequencer provides the ability to set up the 979 so that it automatically
runs through a complete test cycle (START/ROUGH/TEST/VENT), passing or failing the test
part per the test specification entered by the user. The auto sequencer set-up controls
include test object rough time, test time, and auto sequencer on/off. A Pass or Fail condition
is determined based upon the reject set point selected by the user and/or achievement of the
pressure transfer set points within the period of time specified in Rough Time.
AUTO SEQUENCER SET-UP
ROUGH
PUMP
SET-UP
NEXT
REJECT &
AUDIO SET
POINTS
LEAK RATE
RANGING
SET-UP
TRANSFER
POINTS
SET-UP
AUTO
SEQUENCER
SET-UP
OUTPUT
CONTROL
SET-UP
BACK
Figure 2-10
ROUGH TIME (SECS): XXX
TEST TIME (SECS): XXX
DN
UP
NXT
OK
OFF
ESC
DONE
Auto Sequencer Set-Up Screen
The auto sequencer pass or fail leak rate value is selected through the Reject Set Point
screen. The pass/fail criterion is based on the reject set point that is enabled (ON). If more
than one set point is enabled, then the pass/fail criterion is based on the most stringent reject
set point value.
A Pass condition is indicated by the system reverting to the VENT mode upon completion of
the test cycle. A Fail condition is indicated by the system reverting to the HOLD mode, and
all operating buttons being disabled except VENT. A failed condition also results in
REJECTED being displayed on the Home screen of the touch panel, and a reject set point
activation upon completion of the test cycle. The status of the reject set points are available
at the I/O port and upon inquiry through the RS-232 line (see Appendix B “Communications
Protocol”).
Upon the completion of an automated test cycle, the 979 captures the leak rate signal measured just prior to the end of the automated test cycle. This leak rate is displayed on the front
panel and held at the analog output I/O port on the back of the leak detector until the next
test cycle is initiated. This allows the end user to record the actual leak rate value for each
test object.
2-17
DRAFT 9/15/03
CAL
LEAK
SET-UP
Model 979 Series Helium Mass Spectrometer Leak Detector
2.6.3.1 Auto Sequencer Set-Up Controls
ROUGH TIME
The ROUGH TIME variable determines the amount of time that the
leak detector is allowed to evacuate the test object to the tolerable
test transfer pressure. In AUTO SEQUENCER mode, the 979 transfers into test as soon as the tolerable transfer pressure is met. It does
not wait for the total rough time allotted if it is not required. If the
tolerable test transfer pressure is not achieved within the
pre-selected rough time, the system aborts the cycle and goes into
HOLD mode.
The ROUGH TIME value can be determined empirically and
should reflect the typical time required to rough your test object to
the tolerable test pressure. Failure to achieve the tolerable test pressure within the pre-selected rough time is an indication of a gross
leak in your test object or test fixturing or that time allowed was
insufficient.
DRAFT 9/15/03
TEST TIME
The TEST TIME variable determines the amount of time that the
leak detector remains in test before it compares the measured leak
rate with the selected reject set point. Sufficient time must be
allowed for the leak rate reading to stabilize before the system
makes a pass/fail decision. This is a function of the part configuration and the leak rate specification. In AUTO SEQUENCER mode,
the 979 remains in test for the entire duration of the preselected test
time.
The ON/OFF box located to the right of the TEST TIME box provides the capability to enable
and disable the Auto Sequencer feature.
2-18
Model 979 Series Helium Mass Spectrometer Leak Detector
2.6.4 Rough Pump Set-Up
Touch the ROUGH PUMP SET-UP box to display the Rough Pump Set-Up screen
(Figure 2-11), which provides the end user with the ability to select the function of the dedicated rough pump on a dual pump system. The dual pump version of the 979 can be configured so that the dedicated rough pump is connected to the test port only during the
roughing cycle, or so that it is connected to the test port during the rough and test cycles.
ROUGH PUMP SET-UP
CAL
LEAK
SET-UP
ROUGH
PUMP
SET-UP
NEXT
REJECT &
AUDIO SET
POINTS
LEAK RATE
RANGING
SET-UP
TRANSFER
POINTS
SET-UP
AUTO
SEQUENCER
SET-UP
OUTPUT
CONTROL
SET-UP
BACK
ROUGH ONLY
ROUGH PUMP SIZE 400 LPM
FORE PUMP SIZE 300 LPM
Figure 2-11
Rough Pump Set-Up Screen
2.6.4.1 Selecting Rough Only or Split Flow Mode
The first toggle box in the Rough Pump Set-Up screen is used to select the function of the
dedicated rough pump: ROUGH ONLY, SPLIT FLOW, and NOT INSTALLED.
ROUGH ONLY
In ROUGH ONLY mode, the dedicated roughing pump pumps on
the test port only during the roughing phase of the test cycle. Once
the test object reaches the tolerable test transfer pressure, the
roughing valve closes and the dedicated rough pump is isolated
from the test object.
SPLIT FLOW
In SPLIT FLOW mode, the dedicated rough pump continues to
pump on the test object after the tolerable test transfer pressure has
been achieved. Split flow testing provides additional pumping
capacity on the test object during the test cycle. Use this mode for
systems with potentially high gas load or net volumes greater than a
few liters. In SPLIT FLOW MODE a test port cap must be in place
(isolating the test port) while performing an autocalibration routine
to the optional internal calibrated leak.
NOT INSTALLED
Always select this mode for single mechanical pump systems.
To change the rough pump operation, the system must be in VENT mode and the front panel
key switch in the SET-UP or SERVICE position.
2-19
DRAFT 9/15/03
DONE
Model 979 Series Helium Mass Spectrometer Leak Detector
2.6.4.2 Inputting the Rough Pump and Forepump Sizes
The next two toggle boxes are used to select the ROUGH PUMP SIZE and the FORE PUMP
SIZE on dual mechanical pump systems.
❑ Touch the ROUGH PUMP SIZE box to select either 400 LPM or 600 LPM.
❑ Touch the FORE PUMP SIZE box to select 300 LPM or 600 LPM.
It is important to set these values correctly when the 979 is configured for split-flow testing.
This allows for direct readings of leak rate.
2.6.4.3 VENT LOCK Function
DRAFT 9/15/03
Turning the VENT LOCK function ON disables the VENT button. This ensures that a user
does not vent a system unintentionally. The function status remains unchanged after a
system power down. The VENT LOCK function is inactive when the AUTO SEQUENCER
feature is enabled.
❑ Touch the VENT LOCK box to toggle the status to ON or OFF.
❑ Touch DONE to return to the previous menu screen.
2.6.5 Leak Rate Ranging Set-Up
Touch the LEAK RATE RANGING SET-UP box to display the Leak Rate Ranging Set-Up
screen (Figure 2-12). From this screen, set up and enable the RANGE STOP and MANUAL
RANGE functions and select USE FINE TEST or GROSS TEST ONLY.
LEAK RATE RANGING SET-UP
CAL
LEAK
SET-UP
ROUGH
PUMP
SET-UP
NEXT
REJECT &
AUDIO SET
POINTS
LEAK RATE
RANGING
SET-UP
TRANSFER
POINTS
SET-UP
AUTO
SEQUENCER
SET-UP
OUTPUT
CONTROL
SET-UP
BACK
RANGE
STOP
10-XX
MANUAL
STOP
10-XX
OFF
OFF
DN
NXT
USE
FINE
TEST
VENT LOCK OFF
ESC
UP
Figure 2-12
2-20
OK
Leak Rate Ranging Set-Up Screen
DONE
Model 979 Series Helium Mass Spectrometer Leak Detector
2.6.5.1 Range Stop and Manual Range Set-Up and Control
RANGE STOP
The RANGE STOP feature configures the 979 so that it only
auto-ranges down to the pre-selected decade entered in the range
stop variable field. For example, if range stop was enabled and the
range stop setting was 10-07, then the most sensitive range that the
leak detector displays is full-scale 10−7 atm cc/sec.
To enable or disable RANGE STOP, touch the ON or OFF box
under the desired function.
MANUAL RANGE
The MANUAL RANGE feature configures the 979 so that it only
displays the pre-selected decade entered in the manual range
variable field. For example, if the manual range feature was
enabled and the manual range variable was set to 10-06, then the
leak rate decade displayed on the LED bar graph during testing will
be the 10-06 atm cc/sec range only. This feature is useful when the
test operator is only concerned with monitoring the leak rate measurement within a single decade.
To enable or disable MANUAL RANGE, touch the ON or OFF box
under the desired function.
2-21
DRAFT 9/15/03
This feature is useful when a product specification is more
than one decade less stringent than the actual sensitivity of the
leak detector. If the leak detector is capable of displaying full
scale 10−9 atm cc/sec but the test specification is only in
the 10−7 atm cc/sec range, then setting the range stop to
10-08 atm cc/sec reduces the test cycle time by eliminating
the need for the leak detector to reach its most sensitive scale
during each test cycle.
Model 979 Series Helium Mass Spectrometer Leak Detector
2.6.5.2 Selecting Fine Test or Gross Test Only Mode
Touch the USE FINE TEST (GROSS TEST ONLY) box to toggle the leak detector between a
fine test (normal) operating mode and a gross leak test only mode.
FINE TEST MODE
When USE FINE TEST (normal operating mode) is displayed, the
leak detector automatically tests for gross leaks and then transfers
into fine test if no gross leaks are detected.
GROSS TEST ONLY
When GROSS TEST ONLY is displayed (this feature is only available on dual mechanical pump configurations), the leak detector
does not transfer into FINE TEST mode. This feature is useful for
qualifying parts that have an unusually high rate of gross leak failures prior to fine leak testing.
2.6.5.3 System Sensitivity
DRAFT 9/15/03
Table 2-5 and Table 2-6 show sensitivity matrixes for performing Fine and Gross tests using
standard and high sensitivity configurations.
2-22
High Sensitivity
System
The High Sensitivity 979 system can achieve 10−10 atm cc/sec
(5E-11 MDL) sensitivity. This sensitivity can be achieved at a
transfer pressure of 100 mTorr. High ambient helium background
conditions may prevent 10−10 atm cc/sec testing at relatively
high pressures. The maximum detectable leak capability in the
CONTRA-FLOW mode for single rough/forepump configurations
is 9.9 x 10−5atmc/sec (full-scale reading on 10−5 range).
Standard Sensitivity
System
The Standard Sensitivity 979 System can achieve 10−9 atm cc/sec
(5E-10 MDL) sensitivity. This sensitivity can be achieved at a
transfer pressure of 100 mTorr. High ambient helium background
conditions may prevent 10−9 atm cc/sec testing at relatively
high pressures. The maximum detectable leak capability in the
CONTRA-FLOW mode for single rough/forepump configurations
is 9.9 x 10−4 atm cc/sec (full-scale reading on 10−4 range).
Model 979 Series Helium Mass Spectrometer Leak Detector
Table 2-5
979 Standard Sensitivity Leak Detector
Test
Fine
Range
Valve Path
Transfer Pressure
Gross (2 Pump)
–9
–8
–7
–6
–5
MS*
MS
MS/CF
MS/CF
CF**
100 mTorr 100 mTorr
100 mTorr / 100 mTorr /
5 Torr
5 Torr
5 Torr
–4
–3
–2
–1
CF/GL GL***
GL
GL
5 Torr
atm
atm
atm
*MS – MIDSTAGE
**CF – CONTRA-FLOW
Table 2-6
979 High Sensitivity Leak Detector
Test
Fine
Gross (2 Pump)
Range
–10
–9
–8
–7
–6
–5
–4
–3
–2
Valve Path
MS1
MS
MS/CF
MS/CF
CF2
CF/GL
CF/GL
GL3
GL
atm
atm
atm
Transfer Pressure
1 Pump4
Transfer Pressure
4
2 Pump
100 mTorr 100 mTorr
100 mTorr 100 mTorr
5 Torr
/ 5 Torr
/ 5 Torr
100 mTorr 100 mTorr
100 mTorr 100 mTorr
2 Torr 2 Torr / atm
/ 2 Torr
/ 2 Torr
1 MS
– MIDSTAGE
2 CF
– CONTRA-FLOW
3
GL – GROSS LEAK
4
Contra-flow tranfers settings are as follows:
5 Torr
❑ Single pump systems (no gross test): 5 Torr max.
❑ Two pumps (has gross test): 2 Torr max.
2-23
DRAFT 9/15/03
***GL – GROSS LEAK
Model 979 Series Helium Mass Spectrometer Leak Detector
2.6.6 Output Control Set-Up
Touch the OUTPUT CONTROL SET-UP box to display the Output Control Set-Up screen
(Figure 2-13). From this screen, select the desired leak rate output, BARGRAPH DISPLAY
mode, and the RS-232 communication protocol.
OUTPUT CONTROL SET-UP
CAL
LEAK
SET-UP
ROUGH
PUMP
SET-UP
NEXT
REJECT &
AUDIO SET
POINTS
LEAK RATE
RANGING
SET-UP
TRANSFER
POINTS
SET-UP
AUTO
SEQUENCER
SET-UP
OUTPUT
CONTROL
SET-UP
LINEAR
BARGRAPH
DISPLAY
DONE
SERIAL PORT
BACK
Figure 2-13
DRAFT 9/15/03
IV/DEC
LOG
OUTPUT
9600
BAUD
1 STOP
BIT
NO
PRTY
Output Control Set-Up Screen
2.6.6.1 Leak Rate Analog Output Voltage Selection
Touch the Output toggle box located at the top left of Output Control Set-Up screen to
switch the output voltage at the I/O port on the back of the leak detector between
1V/DEC LOG OUTPUT and LINEAR ANALOG OUTPUT.
1V/DEC LOG
OUTPUT
The output voltage conversion chart is displayed in Figure 2-14.
LINEAR ANALOG
OUTPUT
The output voltage conversion chart is displayed in Figure 2-15.
2.6.6.2 Bargraph Display Set-Up
Touch the Bargraph Display toggle box to switch the bar graph display between
LOG BARGRAPH DISPLAY mode and LINEAR BARGRAPH DISPLAY mode.
2-24
LOG BARGRAPH
DISPLAY
In the LOG BARGRAPH DISPLAY mode, the 50-segment bar graph
display represents the entire leak rate range of the leak detector,
spanning from 10−11 atm cc/sec to 100 atm cc/sec. The numerical
display, located to the upper right of the bar graph, is not lit in this
mode.
LINEAR BARGRAPH
DISPLAY
In the LINEAR BARGRAPH DISPLAY mode, the 50-segment bar
graph display represents the mantissa value of the leak rate, spanning from 0 to 10. The numerical display, located to the upper right
of the bar graph, indicates the leak rate exponent value. This mode
offers exceptional resolution within a decade.
Figure 2-14
DRAFT 9/15/03
Model 979 Series Helium Mass Spectrometer Leak Detector
Leak Detector Logarithmic Output Voltage
Figure 2-15
Leak Detector Linear Output Voltage
2-25
Model 979 Series Helium Mass Spectrometer Leak Detector
2.6.6.3 Serial Communications Protocol Set-Up
The Output Control Set-Up screen also allows for the selection of RS-232 communication
parameters, BAUD RATE, STOP BITS, and PARITY (see Appendix B “Communications
Protocol”).
2.6.7 Transfer Pressure Set-Up
Touch the TRANSFER POINTS SET-UP selection box to display the Transfer Pressure Set-Up
screen (Figure 2-16). From this screen set the test transfer pressures for each testing mode.
The factory default settings are shown in Figure 2-16.
CAL
LEAK
SET-UP
ROUGH
PUMP
SET-UP
TRANSFER PRESSURE SET-UP
NEXT
GROSS LEAK XFER:
7.5E+2
OK
DRAFT 9/15/03
CONTRAFLOW LEAK XFER 5.0E-0
REJECT &
AUDIO SET
POINTS
LEAK RATE
RANGING
SET-UP
TRANSFER
POINTS
SET-UP
AUTO
SEQUENCER
SET-UP
OUTPUT
CONTROL
SET-UP
BACK
Figure 2-16
DN
UP
NXT
ESC
DONE
Transfer Pressure Set-Up Screen
The transfer pressure settings may be adjusted to lower values for specific applications. The
979 has pre-programmed upper transfer pressure limits that are slightly greater than the
default settings. These limits prevent the operator from inadvertently setting the 979 to transfer into test at too high a pressure, resulting in excessive spectrometer tube contamination or
ion source filament failure. Touch DONE to return to the previous menu.
If you make changes to the settings, touch OK to load the new values into memory and then
touch DONE to return to the previous menu.
Touching the ESC box before touching OK or DONE causes the selected parameter to revert
to its previously stored value.
2-26
Model 979 Series Helium Mass Spectrometer Leak Detector
GROSS LEAK XFER
The GROSS LEAK XFER set point determines the test pressure cross
over point at which the 979 transfers into the GROSS LEAK TEST
mode from Roughing mode. In the GROSS LEAK TEST mode, the
majority of the sampled gas is pumped away through the dedicated
roughing pump while a small sample of gas is introduced into the
leak detector through a throttle valve. Gross leak testing is a standard feature available on dual mechanical pump configurations
only.
2.6.8 NEXT and BACK Boxes
Touch the NEXT box on the First Menu screen to display the Second Menu selection screen.
The operations of the Second Menu screen are discussed in Section 2.7 “Second Menu
Selection Screen”. Touch the BACK box to return to the Home screen.
2-27
DRAFT 9/15/03
CONTRA-FLOW LEAK The CONTRA-FLOW LEAK XFER set point determines the test
XFER
pressure cross over point at which the 979 transfers into the
CONTRA-FLOW LEAK test mode from Roughing mode or
Gross Leak Test mode. In the CONTRA-FLOW LEAK test mode, the
gas sample is pumped through the leak detector and swept across
the high vacuum pump foreline. The CONTRA-FLOW LEAK test
mode allows for relatively high sensitivity testing at exceptionally
high test pressures.
Model 979 Series Helium Mass Spectrometer Leak Detector
2.7 Second Menu Selection Screen
DRAFT 9/15/03
The Second Menu screen (Figure 2-17) displays the screens available for performing general
set-up and service functions. Touch the BACK box from this screen to display the First Menu
screen. Touch the NEXT box to display the Home screen. UNITS SET-UP is described in this
section. The VERSION and SERVICE menus are discussed in Section 3 “Service”. These
menus include procedures that are generally performed outside of day-to-day operations.
CAL
LEAK
SET-UP
ROUGH
PUMP
SET-UP
NEXT
UNITS
SET-UP
NEXT
REJECT &
AUDIO SET
POINTS
LEAK RATE
RANGING
SET-UP
TRANSFER
POINTS
SET-UP
SERVICE
MENUS
VERSION
AUTO
SEQUENCER
SET-UP
OUTPUT
CONTROL
SET-UP
BACK
Figure 2-17
BACK
Second Menu Screen
2.7.1 Units Set-Up
Touch the UNITS SET-UP box to display the Units Set-Up screen (Figure 2-18).
UNITS SET-UP
UNITS
SET-UP
NEXT
LEAK RATE
PRESSURE
SERVICE
MENUS
VERSION
USE
atm-cc/sec
USE
Torr
BACK
Figure 2-18
DONE
Units Set-Up Screen
2.7.1.1 Leak Rate and Test Port Pressure Units Selection
Select the leak rate and test port pressure units to be displayed on the leak rate bar graph
and the digital touch screen display.
2-28
LEAK RATE UNITS
Touch the LEAK RATE units toggle box to switch the leak rate units
between atm-cc/sec, mbar-l/sec, Torr-l/sec, and Pa-m3/sec.
PRESSURE UNITS
Touch the PRESSURE units toggle box to switch the test port pressure units between Torr, mbar, and Pa.
Model 979 Series Helium Mass Spectrometer Leak Detector
Section 3. Service
This section discusses the VERSION and SERVICE menus, which are accessed from the
Second Menu screen (Figure 3-1). These menus provide access to information and procedures that are generally outside of day-to-day operations. Most of these functions should be
performed by trained service personnel as they significantly affect the performance of the
Model 979.
UNITS
SET-UP
NEXT
SERVICE
MENUS
VERSION
DRAFT 9/15/03
Touch the BACK box from this screen to display the First Menu screen. Touch the NEXT box
to display the Home screen.
BACK
Figure 3-1
Second Menu Screen
3.1 Version
The VERSION screen (Figure 3-2) provides system software revision information.
VERSION
UNITS
SET-UP
SERVICE
MENUS
NEXT
VERSION
AAXX.XX
XXXXXX
AAXX.XX
XXXXXX
BACK
1-800-882-7426
Figure 3-2
Version Screen
3-1
Model 979 Series Helium Mass Spectrometer Leak Detector
Touch the VERSION box to display the revision and checksum of the main CPU and the
front panel CPU software. Inquiry of the checksum information takes several seconds.
Approximately 15 seconds after the revision data is displayed in full, the VERSION screen
automatically reverts to the Second Menu screen.
CAUTION
The controls available through the Service Menu screens
significantly affect the performance of the 979 and must only be
accessed by trained service personnel.
CAUTION
Many of the values for the parameters included in the Service
Menus are calculated when the 979 performs functions such as
CALIBRATE and ZERO. Changing these values can cause
unreliable test results.
DRAFT 9/15/03
Touch the SERVICE MENUS box to display the Service Menu screen (Figure 3-3). This
screen shows the functions that may be performed as part of a troubleshooting or
maintenance routine. To return to the Second Menu screen, touch the BACK box from the
Service Menu screen. Values and options are changed in the same manner as the First Menu
screens. For review, see Section 2.3.2 “Changing Variables in Touch Panel Screens” on
page 2-6 and Section 2.3.3 “Selecting Options in Touch Panel Screens” on page 2-7.
UNITS
SET-UP
NEXT
MANUAL
ZEROING &
CALIBRATE
SERVICE
MENUS
VERSION
MANUAL
SPEC TUBE
TUNING
3-2
GAUGE
CAL
SYSTEM
INIT
SET-UP
BACK
Figure 3-3
MANUAL
VALVE
CONTROL
Service Menu Screen
BACK
Model 979 Series Helium Mass Spectrometer Leak Detector
3.1.1 Manual Zeroing and Calibrate
Touch the MANUAL ZEROING and CALIBRATE box to display the Manual Zeroing and Cal
screen (Figure 3-4), which provides control over the leak detector AUTO-ZERO < 0 feature
and allows for viewing and adjusting the spectrometer tube Gain.
MANUAL
ZEROING &
CALIBRATE
MANUAL ZEROING AND CAL
MANUAL
VALVE
CONTROL
AUTO-ZERO <0
ACTIVE
GAIN: X.X
GAUGE
CAL
SYSTEM
INIT
SET-UP
BACK
OFFSET: XX
DN
UP
Figure 3-4
NXT
ESC
DONE
Manual Zeroing and Cal Screen
3.1.1.1 AUTO-ZERO < 0
Touch the AUTO-ZERO < 0 toggle box to switch the Auto Zero < 0 feature between Active
and Inactive. The display in the touch screen box indicates the current setting.
ACTIVE
AUTO-ZERO < 0, when activated, automatically adjusts the zero
reference point back up to zero when the helium background level
drops below the previously set zero reference point. This feature
ensures that the leak detector maintains calibration after a previously zeroed background signal naturally cleans up.
When the AUTO-ZERO < 0 feature is in the process of re-adjusting the zero reference point,
the UNDER light indicator located on the left end of the bar graph illuminates. This light
indicates that the measured helium leak rate is currently less than the minimum displayable
value. The light may flash briefly as the system recovers from a leak indication and the displayable leak rate approaches zero. If the AUTO-ZERO < 0 is turned on, the UNDER light
may also flash briefly as the system resets the zero point to a lower value. The 979 does not
display a leak rate while the UNDER light is on. If this light stays on for more than a few seconds, recalibrate the system to set operating parameters to the correct zero value. This situation can take place if the 979 had not been fully warmed up before a previous calibration
was initiated.
INACTIVE
When AUTO-ZERO < 0 is inactive, the leak detector does not
automatically adjust the zero reference point back up to zero
when the helium background level drops below the previously set
zero reference point. When this occurs, the UNDER light remains
lit, indicating that the background level is below the previously set
zero reference point. Press the ZERO button on the front panel to
readjust the zero reference point manually. This clears the UNDER
light indication.
3-3
DRAFT 9/15/03
MANUAL
SPEC TUBE
TUNING
Model 979 Series Helium Mass Spectrometer Leak Detector
3.1.1.2 Gain
Touch the GAIN box to manually adjust the calibration gain. The gain parameter is used to
calibrate the leak detector to a known helium source. The gain parameter is adjusted after
the leak detector has been tuned to helium.
Typical gain values range from 0.5 to 5.0. The gain value is automatically set during the
Calibration routine. The higher the gain, the more noise shows up in the least sensitive
range.
3.1.1.3 Offset
The variable displayed in the OFFSET box represents the current value of the preamplifier
offset. This value is used by the service technician to evaluate the condition of the preamplifier. The normal operating range is between 35 and 80. If this value is outside of the range,
contact your local Vacuum Technologies service representative.
DRAFT 9/15/03
3.1.2 Manual Spectube Tuning
Touch the MANUAL SPECTUBE TUNING box to display the Manual Spectube Tuning
screen (Figure 3-5). This screen is used to manually adjust the parameters of the Ion Source
in the spectrometer tube for a maximum helium signal.
MANUAL SPECTUBE TUNING
MANUAL
ZEROING &
CALIBRATE
MANUAL
VALVE
CONTROL
UP
FIL
1
ACTV
REPELLER V: XXX.X
EMISSION I: X.XXX
MANUAL
SPEC TUBE
TUNING
GAUGE
CAL
SYSTEM
INIT
SET-UP
BACK
Figure 3-5
3-4
ION V: XXX.X
OK
DN
VAR FOCUS: XXX.X
SUPRESSOR: XXX.X
FIXED FOCUS: XXX.X
Manual Spectube Tuning Screen
ESC
DONE
Model 979 Series Helium Mass Spectrometer Leak Detector
3.1.2.1 Changing Manual Tuning Parameters
To change a manual tuning parameter:
1. Touch the box for the desired parameter.
When you touch the box containing the desired variable, a highlighted indicator
appears to the right of the numbers.
2. Touch the UP or DN arrow to change the parameter value.
NOTE
Do not touch the ESC box before touching the OK box. This
causes the selected parameter to revert to its previously stored
value.
4. Touch DONE to exit the screen and return to the previous menu screen.
3.1.2.2 Repeller
The REPELLER (Voltage) box displays the current Repeller Voltage value of the Ion Source in
the spectrometer tube and allows for manual adjustment of this parameter. The repeller voltage parameter is used to tune the leak detector, maximizing the leak detector output for a
peak helium signal. The repeller voltage parameter is adjusted before the leak detector is
calibrated to helium. This parameter is not adjusted automatically during the Calibration
routine.
Typical Repeller Voltage values range from 320 VDC to 360 VDC.
3.1.2.3 Emission Current
The EMISSION adjustment box displays the value of the existing Emission current of the Ion
Source in the spectrometer tube and allows for the adjustment of this parameter. The emission current parameter is used to tune the leak detector, maximizing the leak detector output for a peak helium signal. The emission current parameter is adjusted before the leak
detector is calibrated to helium. This parameter is not adjusted automatically during the Calibration routine.
Typical Emission current values range from .7 mA to 1.4 mA.
NOTE
To obtain a maximum Helium peak signal, adjust emission
current during a manual tune.
3-5
DRAFT 9/15/03
3. Touch the OK box to accept the changes and to store the new parameter value in the
leak detector memory.
Model 979 Series Helium Mass Spectrometer Leak Detector
3.1.2.4 Ion Voltage
Touch the ION VOLTAGE box to display the current ion voltage value of the Ion Source in
the spectrometer tube. This value can also be manually adjusted. The ion voltage parameter
is used to tune the leak detector, maximizing the leak detector output for a peak helium signal. The ion voltage parameter is adjusted before the leak detector is calibrated to helium.
Typical ion voltage values range from 230 VDC to 270 VDC. The ion voltage value is automatically adjusted and set during the Calibration routine.
3.1.2.5 Variable Focus Voltage
DRAFT 9/15/03
The VAR FOCUS Voltage adjustment box displays the current Variable Focus Voltage value
of the ion source in the spectrometer tube and allows for the adjustment of this parameter.
The variable focus voltage parameter is used to tune the leak detector, maximizing the leak
detector output for a peak helium signal. The variable focus voltage parameter is adjusted
before the leak detector is calibrated to helium.
Typical Variable Focus Voltage values range from 180 VDC to 200 VDC.
3.1.2.6 Suppressor Voltage
The SUPPRESSOR indicator displays the current Suppressor Voltage value in the
preamplifier in the spectrometer tube. The suppressor voltage parameter is not variable.
This parameter cannot be changed by the operator.
3.1.2.7 Fixed Focus Voltage
The FIXED FOCUS Voltage indicator displays the current Fixed Focus Voltage value of the
ion source in the spectrometer tube. The fixed focus voltage parameter is not variable and
cannot be changed by the operator.
3.1.2.8 Filament Selection
The Filament Selection box switches between FIL 1 ACTIVE and FIL 2 ACTIVE. The filament
selection can be performed manually, or it will occur automatically in the event that the
current operating filament burns out. Execute a calibration routine each time the operating
filament is changed.
FILAMENT
SELECTION
In the event that the current operating filament burns out, the 979
automatically switches over to the next available filament. The
change is indicated on the touch screen display and the leak rate
exponent display flashes a C, indicating that calibration is required.
NOTE
3-6
We recommended that you replace the ion source as soon as it
is convenient after the spare filament has been put into use. See
Section 4.4 “Ion Source Replacement Outside of Annual
Maintenance” on page 4-20.
Model 979 Series Helium Mass Spectrometer Leak Detector
3.1.3 Manual Valve Control
Touch the MANUAL VALVE CONTROL box to display the Manual Valve Control screen
(Figure 3-6), which provides manual control of the valves in the 979 vacuum system for
troubleshooting purposes. See Figure 3-7 on page 3-8 for an illustration of the 979 Vacuum
System.
Manipulation of the valves through the Manual Valve Control
screen should only be done by persons who are extremely
familiar with the 979 Series leak detector as damage to critical
components (e.g., spectrometer tube) could occur.
CAUTION
MANUAL
VALVE
CONTROL
MANUAL
SPEC TUBE
TUNING
GAUGE
CAL
SYSTEM
INIT
SET-UP
BACK
OPEN VENT VALVE
CLOSED
CLOSE CONTRAFLOW VALVE
OPENED
CLOSE TEST PORT VALVE
OPENED
CLOSE FORELINE VALVE
OPENED
CLOSE MIDSTAGE VALVE
OPENED
OPEN STD LEAK VALVE
CLOSED
DONE
Figure 3-6
Manual Valve Control Screen
To change the state of a specific valve, touch the box corresponding to that valve. The
valve changes state and the box changes from OPEN to CLOSE. Touch DONE to return to
the maintenance menu screen. The valve state displayed to the right of each valve control
box represents the current state of the corresponding valve. The normal operating states of
valves for single mechanical and dual pump systems are provided in Table 3-1 and
Table 3-2 on page 3-8, respectively.
Table 3-1
979 Valve State Table - Single Mechanical Pump System
979 Operating State
V1
V2
V4
V5
V6
V7
VENT
O*
C**
C
O
C
C
ROUGH
C
O
C
C
O
C
CONTRA-FLOW
C
O
C
O
O
C
MIDSTAGE
C
C
O
O
O
C
SNIFF MODE
C
O
C
O
O
C
*O – Open
**C – Closed
3-7
DRAFT 9/15/03
MANUAL VALVE CONTROL
MANUAL
ZEROING &
CALIBRATE
Model 979 Series Helium Mass Spectrometer Leak Detector
Table 3-2
979 Valve State Table - Dual Mechanical Pump System
979 Operating State
V1
V2
V4
V5
V6
V7
V8
VENT
O*
C**
C
O
C
C
C
ROUGH
C
O
C
C
C
C
C
GROSS TEST
C
O
C
O
C
C
O
CONTRA-FLOW
C
O
C
O
O
C
C
MIDSTAGE
C
C
O
O
O
C
C
SNIFF MODE
C
O
C
O
O
C
C
DRAFT 9/15/03
*O – Open
**C – Closed
GROSS LEAK
OPTION
TEST
PORT
GROSS LEAK OPTION
P
ROUGH
VALVE
ROUGH
PUMP
NEEDLE VALVE
V1 VENT
V8 GROSS
LEAK VALVE
TEST PORT
TC
SYSTEM
TC
V6 TESTPORT
SPEC
TUBE
V7 (3 WAY)
V4 MIDSTAGE
CAL LEAK
V2
V5 FORELINE
P
Figure 3-7
3-8
TURBO
PUMP
FORE
PUMP
979 Vacuum System Diagram
Model 979 Series Helium Mass Spectrometer Leak Detector
3.1.4 System Initialize Set-Up
Touch the SYSTEM INIT SET-UP box to display the System Initialize Set-Up screen
(Figure 3-8), which allows for the front panel push buttons to be enabled or disabled, and
displays the current status of the buttons.
SYSTEM INITIALIZE SET-UP
MANUAL
VALVE
CONTROL
MANUAL
SPEC TUBE
TUNING
CTRL PNL ENABLED
GAUGE
CAL
SYSTEM
INIT
SET-UP
BACK
DONE
Figure 3-8
System Initialize Set-Up Screen
The CTRL PNL ENABLED toggle box switches between enabling and disabling the front
panel push buttons. Touch the CTRL PNL ENABLED box to disable the front panel push buttons. Touch the box a second time to enable the push buttons. Touch DONE to exit the current screen and return to the previous menu.
3.1.5 Gauge Calibration Procedures
Touch the GAUGE CAL box to display the Gauge Calibration screen (Figure 3-9), which
provides the ability to perform a calibration on either the system pressure thermocouple
(button TC) or the test port thermocouple gauge.
NOTE
The calibration of the test port thermocouple (TC) gauge is
factory set and requires the use of a reference TC and a PC.
GAUGE CALIBRATION
MANUAL
ZEROING &
CALIBRATE
MANUAL
VALVE
CONTROL
SYSTEM TC ZERO
SYSTEM TC ATM
MANUAL
SPEC TUBE
TUNING
GAUGE
CAL
SYSTEM
INIT
SET-UP
TEST PORT TC ZERO
TEST PORT TC ATM
SYSTEM P IS:
BACK
X.XXE-X
TEST PORT P IS: X.XXE-X
DONE
Figure 3-9
Gauge Calibration Screen
3-9
DRAFT 9/15/03
MANUAL
ZEROING &
CALIBRATE
Model 979 Series Helium Mass Spectrometer Leak Detector
3.1.5.1 System Pressure Gauge Calibration Procedure
This procedure allows for calibration of the system pressure thermocouple gauge. Both the
Vacuum and Atmospheric Calibrations procedures must be performed in the order written.g
3.1.5.1.1 Vacuum (Low Pressure) Calibration
1. Verify that the leak detector is in the SYSTEM READY condition on the Home Screen
(Figure 3-10) and that a test port cap is in place.
979
LEAK RATE: X.XXE-XX atm-cc/sec
T.P. PRESSURE: X.XE-XX Torr
REJECT# 2,4
SYSTEM READY
DRAFT 9/15/03
SYS INFO
Figure 3-10
MENUS
979 Touch Panel Home Screen
2. Place the service key (T009) into the key switch and set the key switch to the SERVICE
position (see Figure 1-8 on page 1-12).
3. If the system is not already in VENT mode, press the VENT button.
4. Press the TEST button and verify that the leak detector transfers to FINE TEST mode,
displaying 10−9 atm cc/sec or lower.
5. Wait approximately five minutes for the vacuum system pressure to stabilize.
6. Move to the GAUGE CALIBRATION screen (Figure 3-9 on page 3-9) if you are not
already there.
7. Touch the SYSTEM TC ZERO box.
❑ A CAL OK indication, to the right of the SYSTEM TC ZERO box, confirms that the
calibration was successful.
❑ A FAILED message indicates that the calibration was not successful. This could be
the result of a defective or contaminated thermocouple gauge, or that the actual
pressure was substantially greater than 1 mTorr.
8. Touch DONE to leave the screen and return to the previous menu.
3-10
Model 979 Series Helium Mass Spectrometer Leak Detector
3.1.5.1.2 Atmospheric Calibration
Calibration of the system pressure thermocouple (TC) gauge to atmosphere is only required
if the system TC gauge tube is replaced or if calibration appears to be off.
1. Upon replacement of the system TC, unplug the mechanical pump(s) from the back of
the 979 before powering up the leak detector.
2. Turn the power ON to the 979 and go to the Gauge Calibration touch screen menu.
3. Place the service key (T009) into the key switch and set the key switch to the SERVICE
position.
4. Touch the SYSTEM TC ATM box.
❑ A CAL OK indication to the right of the SYSTEM TC ATM box confirms that the
calibration was successful.
the result of a defective or contaminated thermocouple gauge, or that the actual
pressure was not at or near atmosphere.
5. Power down the leak detector.
6. Plug the mechanical pumps into the appropriate receptacles and turn the power
back on.
3.1.5.2 Test Port Pressure Gauge Calibration Procedure
This procedure allows for calibration of the test port pressure thermocouple gauge. Both the
Vacuum and Atmospheric Calibrations procedures must be performed in the order written.
The vacuum calibration is factory set. Do not change this setting unless you have the appropriate equipment.
NOTE
The calibration of the test port thermocouple (TC) gauge is
factory set and requires the use of a reference TC and a PC.
3-11
DRAFT 9/15/03
❑ A FAILED message indicates that the calibration was not successful. This could be
Model 979 Series Helium Mass Spectrometer Leak Detector
3.1.5.2.1 Vacuum (Low Pressure) Calibration
1. Verify that the leak detector is in the SYSTEM READY condition (Figure 3-10 on
page 3-10) and that a test port cap is in place.
2. Place the service key (T009) into the key switch and set the key switch to the SERVICE
position.
3. If the system is not already in VENT mode, press the VENT button.
4. Press the TEST button and verify that the leak detector transfers to FINE TEST mode,
displaying 10−9 atm cc/sec or lower.
5. Wait approximately 15 minutes for the vacuum system pressure to stabilize.
6. Touch the TEST PORT TC ZERO box.
❑ A CAL OK indicator, to the right of the TEST PORT TC ZERO box confirms that the
calibration was successful.
DRAFT 9/15/03
❑ A FAILED message indicates that the calibration was not successful.
A FAILED message can result from a defective or contaminated thermocouple gauge,
or the fact that the actual pressure was not at or near zero.
7. Touch the DONE button to leave the screen and return to the previous menu.
3.1.5.2.2 Atmospheric Calibration
1. Place the service key (T009) into the key switch and set the key switch to the SERVICE
position.
2. If the system is not already in VENT mode, press the VENT button.
3. Wait approximately ten seconds for the test port pressure to stabilize. Move to the
Gauge Calibration screen (Figure 3-9 on page 3-9).
4. Touch the TEST PORT TC ATM box.
❑ A CAL OK indication, to the right of the TEST PORT TC ATM box, confirms that the
calibration was successful.
❑ A FAILED message indicates that the calibration was not successful. This could be
the result of a defective or contaminated thermocouple gauge, or that the actual
pressure was not at or near atmosphere.
5. Touch DONE to leave the screen and return to the previous menu.
3-12
Model 979 Series Helium Mass Spectrometer Leak Detector
Section 4. Maintenance
This maintenance section does not cover overhaul of the entire vacuum system. It does
cover maintenance that may have to be performed on a daily or as-required basis or, if the
item has not required maintenance, on an annual preventive basis.
If your 979 leak detector requires service that is not covered in this section, contact Vacuum
Technologies Customer Service at 1-800-8VARIAN.
Important Reminders
In addition to the safety notes at the beginning of this manual, heed the following notes,
cautions, and warnings when performing maintenance.
WARNING
Disconnect power from the 979 before performing any
maintenance procedure that requires physically disconnecting
any part of the system.
Cleanliness is vital when servicing the leak detector or any vacuum equipment. There are
some techniques more important in leak detector servicing than in general vacuum work:
CAUTION
Do not use silicone oil or silicone grease.
Use powder-free butyl or polycarbonate gloves to prevent skin
oils from getting on vacuum surfaces.
Do not clean any aluminum parts with Alconox ®. Alconox is
not compatible with aluminum and will cause damage.
NOTE
Normally, it is unnecessary to use vacuum grease. However, if
it must be used, avoid silicone types, and use it sparingly.
Apiezon® L grease is recommended (Vacuum Technologies Part
No. 695400004).
4-1
DRAFT 9/15/03
Like other sensitive test equipment, a mass spectrometer leak detector requires periodic
maintenance to ensure continued reliable operation. After prolonged use, the leak detector
accumulates contaminants from even the cleanest of products tested. These contaminants
eventually impair operation. A thorough disassembly and cleaning of the entire vacuum
system, which includes the valve block and spectrometer tube, restores normal operation.
For heavy production use, more frequent overhauls may be needed. Conversely, lighter use
may permit a longer period between overhauls. In most cases, this work is done by user
maintenance personnel, but it may also be done by Vacuum Technologies under the terms
of a service contract.
Model 979 Series Helium Mass Spectrometer Leak Detector
When removing, checking or replacing O-rings:
CAUTION
Remove O-rings carefully with your fingers. Do not use metal
tools for this task. This prevents scratching of any sealing
surfaces.
Wipe all O-rings clean with a lint-free cloth before installation
to ensure that no foreign matter is present to impair the seal.
Do not use grease or other substance on O-rings that will come
in contact with the spectrometer tube.
DRAFT 9/15/03
Do not use alcohol, methanol or other solvents on O-rings. To
do so causes deterioration and reduces their ability to hold a
vacuum.
4-2
NOTE
If applicable, apply a small amount of Apiezon L grease and
wipe the O-rings “shiny” dry.
NOTE
Due to the effective cleaning nature of VacuSolv solvent and its
residue-free properties, Vacuum Technologies’ Component and
Spectrometer Tube Cleaning Kit (Part Number 670029096),
used in accordance with the kit instructions, is recommended
for cleaning the spectrometer tube components. The kit can
also be used for fine cleaning of other parts in the leak
detector’s vacuum system such as valves and fittings. No rinsing
steps or high-temperature drying is required following cleaning
with VacuSolv. Although appropriate precautions are advised,
VacuSolv is compatible with most materials and does not
contain toxic chemicals or CFCs (chlorofluorocarbons).
Model 979 Series Helium Mass Spectrometer Leak Detector
For simplicity, the maintenance functions in this section are grouped by recommended
frequency, as shown in Table 4-1, based on assumed everyday use.
Table 4-1
Calibration check
Daily
12 Months
Section 4.1 “Daily Maintenance” on
page 4-4
X
Recalibrate the
internal calibrated leak
Spectrometer tube overhaul
Refer to
X
Section 4.2 “Recalibrate the Internal
Calibrated Leak” on page 4-4
X
Section 4.3 “Spectrometer Tube
Overhaul” on page 4-4
These functions can be carried out at routine intervals, as indicated. The 979 must be calibrated to verify sensitivity at least once a day. However, other functions may be carried out
either more or less often, depending on the frequency of use.
Maintenance functions that may be required on a demand basis, such as changing an Ion
Source after filament failure, are listed in Table 4-2.
Table 4-2
Function
As-Required Maintenance
Most Common Symptom
Refer to
Spectrometer tube cleaning
Loss of sensitivity, increase in
background, high ion voltage
(> 300 VDC), required to tune the leak
detector.
Section 4.3 “Spectrometer
Tube Overhaul” on page 4-4
Ion source replacement
Filament failure (as soon as convenient
after second filament is in use).
Section 4.4 “Ion Source
Replacement Outside of
Annual Maintenance” on
page 4-20
Tuning adjustments
Use of a calibrated leak in the field other
than the one tested at the factory, or if
calibration is not successful.
Section 3.1.2 “Manual
Spectube Tuning” on page 3-4
Mechanical Pump
Fluid Change
Persistent, high helium background
signal. Fluid contamination (dirty brown
color indicates burnt or contaminated
fluid, milky white consistency indicates
high water vapor content in fluid).
Section 4.5 “Mechanical Pump”
on page 4-22
Mechanical Pump Tip Seal
Replacement
Pump base pressure has risen to an
unacceptable high level for the particular
application.
Section 4.5 “Mechanical Pump”
on page 4-22
4-3
DRAFT 9/15/03
Description
Scheduled Maintenance
Model 979 Series Helium Mass Spectrometer Leak Detector
4.1 Daily Maintenance
4.1.1 Sensitivity Check
1. Press the READ STANDARD LEAK button.
2. Compare the value displayed on the HOME screen (Section 2.4 “979 Touch Panel
Home Screen” on page 2-8) to the value of the known calibrated leak displayed on the
SYSTEM INFORMATION screen (Section 2.5 “979 System Information Screen” on
page 2-12) or in the CALIBRATED LEAK Set-Up screen (Figure 2-6 on page 2-12).
3. If the values do not match, press the CALIBRATE button to perform an automated
calibration and then repeat step 1. If specification is still not met, Manual Tuning may
be required. See Section 3.1.2 “Manual Spectube Tuning” on page 3-4.
DRAFT 9/15/03
4.2 Recalibrate the Internal Calibrated Leak
Helium calibrated leaks typically degrade at 3 percent per year. The calibrated leak supplied with your 979 must be checked at least once a year to ensure it is at the value stated
on its tag. Failure to check the leak could result in unreliable testing. You can arrange for
testing and re-calibration at a lab of your choice.
Vacuum Technologies provides NIST-traceable calibrated leak testing and verification services. You can contact Customer Service at 1-800-8VARIAN to arrange for recalibration.
4.3 Spectrometer Tube Overhaul
Spectrometer tube overhaul consists of removing, cleaning, and re-installing the 979 Spectrometer Tube. There are four basic sub-assemblies in the spectrometer tube. Table 4-3 lists
the tools and parts required during overhaul. Removal instructions follow in the order
below.
❑ Thermocouple Button (TC)
❑ Ion Source
❑ Preamplifier
❑ Magnetic Assembly
4-4
Model 979 Series Helium Mass Spectrometer Leak Detector
Table 4-3
Tools and Parts Required for Spectrometer Tube Overhaul
Tools
Screwdrivers Slotted and Phillips
Gloves
Butyl or polycarbonate, powder-free
Parts
Part Number
Description
82850302
Ion Source
R1266301
Button TC
670029096
Vacuum Technologies Spectrometer Tube Cleaning Kit
CAUTION
Use powder-free butyl or polycarbonate gloves to prevent skin
oils from getting on vacuum surfaces.
4.3.1 Removing the Spectrometer Tube Assembly
WARNING
Disconnect power from the 979 before performing any
maintenance procedure that requires physically disconnecting
any part of the system.
The spectrometer tube operates at a very high vacuum produced by the high vacuum pump.
Service of the spectrometer tube requires that this vacuum be vented to the atmosphere.
Perform this procedure every twelve months, or sooner if required. Access to the spectrometer tube is gained by removing the 2 Phillips screws from the front panel and dropping the
top of the front panel down.
NOTE
Rebuilt spectrometer tubes are available from Vacuum
Technologies on an exchange basis. Contact the Vacuum
Technologies Service Center (1-800-8VARIAN) for details.
4-5
DRAFT 9/15/03
O-rings (Parker 2-025 V747-75 Black) – (supplied with Ion Source, Button TC and
Preamplifier)
Model 979 Series Helium Mass Spectrometer Leak Detector
1. Remove the 2 Phillips screws 1 from the Model 979 front panel (Figure 4-1).
2
DRAFT 9/15/03
1
Figure 4-1
Front Panel
2. Lean the top of the front panel forward 2 to allow access to the spectrometer tube
assembly. Be careful not to place tension on the front panel display PCB harness.
4-6
Model 979 Series Helium Mass Spectrometer Leak Detector
3. The spectrometer tube is located in the center front of the 979 just behind the front
panel (Figure 4-2).
Figure 4-2
➁
➂
Front View of the Spectrometer Tube Assembly
In addition to the three connectors on the top of the unit, indicated by ➀ in Figure 4-2,
and the ground cable ➁, the spectrometer tube is attached by a KF-25 (ISO NW-25)
quick clamp ➂ and a wing nut located below the tube (not shown in this view).
4. Remove the three connectors from the top of the spectrometer tube (Figure 4-3). The
connector cables are labeled TC, Ion Source, and Preamplifier. If the cables are not
labeled, label them now for future reference.
➀
Figure 4-3
Removing the Connectors
4-7
DRAFT 9/15/03
➀
Model 979 Series Helium Mass Spectrometer Leak Detector
5. Disconnect the ground cable from the spectrometer tube magnet by removing the screw
➀ with a slotted screwdriver (Figure 4-3 on page 4-7).
6. Remove the wing nut ➀ located underneath the shelf below the spectrometer tube
(Figure 4-4).
➀
DRAFT 9/15/03
Figure 4-4
Wing Nut
7. Remove the KF-25 (ISO NW-25) quick clamp ➀ to disconnect the spectrometer tube
from the 979 vacuum system (Figure 4-5).
➀
Figure 4-5
4-8
KF-25 Quick Clamp
Model 979 Series Helium Mass Spectrometer Leak Detector
8. Lift the spectrometer tube up and off of the tray and lay it down on a clean
non-magnetic surface.
CAUTION
If the spectrometer tube magnet comes in contact with a
magnetic surface, it may become de-magnetized causing the
spectrometer tube to lose sensitivity.
Do not remove the 6 magnet body bracket screws ➀ shown in
Figure 4-6 while performing maintenance on the spectrometer
tube.
DRAFT 9/15/03
CAUTION
➀
Figure 4-6
Magnet Body Bracket Screws
4-9
Model 979 Series Helium Mass Spectrometer Leak Detector
9. Remove the 2 slotted screws ➀ that mount the spectrometer tube magnet assembly to
the spectrometer tube body (Figure 4-7).
DRAFT 9/15/03
➀
Figure 4-7
Magnet Assembly Slotted Screws
10. Carefully slide the magnet assembly off of the spectrometer tube body.
If the magnet assembly does not slide off easily, it may be necessary to loosen the tuning
magnets ➀ by backing out the set screws ➁ located on both sides of the assembly
(Figure 4-8). Do not remove the set screws and tuning magnets completely.
➁
➀
Figure 4-8
4-10
Tuning Magnet Set Screws
Model 979 Series Helium Mass Spectrometer Leak Detector
4.3.2 Removing the Button TC
1. Remove the 4 Phillips screws ➀ that hold the Button TC header (Figure 4-9).
Figure 4-9
DRAFT 9/15/03
➀
Button TC Assembly
2. Remove the Button TC header ➁ (Figure 4-10) by pressing down on the Button TC
center post ➀ and lifting the header ➁ up and off of the Button TC ➂.
➁
➀
➂
Figure 4-10
Removing the Button TC
4-11
Model 979 Series Helium Mass Spectrometer Leak Detector
3. If the header and Button TC come up together, hold one hand under the Button TC to
catch it, and push down on the center post to remove the header from the Button TC. Be
careful not to damage the sensing wire.
CAUTION
The sensing wire on the bottom side of the Button TC is
approximately 3 mils thick. Care must be taken not to damage
this wire.
DRAFT 9/15/03
4. Remove the Button TC carefully and place it sensing wire ➀
Figure 4-11, (contact pin side down) on a clean surface.
side up as shown in
➀
Figure 4-11
Button TC Wires (View with Header on)
5. Carefully remove the O-ring.
4-12
Model 979 Series Helium Mass Spectrometer Leak Detector
WARNING
Store the Ion Source in a cool, dry area in a tightly sealed
container. Wash hands thoroughly after handling the Ion Source
and especially before smoking or eating.
CAUTION
Use powder-free butyl or polycarbonate gloves to prevent skin
oils from getting on vacuum surfaces.
NOTE
The ion source is typically replaced during the normal
maintenance procedure. A new and clean ion source provides
optimum sensitivity and system performance.
See Section 4.4 “Ion Source Replacement Outside of Annual
Maintenance” on page 4-20 when replacing the ion source
outside of annual maintenance.
1. Remove the 4 Phillips screws that hold the ion source header piece, repeating steps 1, 2,
and 3 (Section 4.3.2 “Removing the Button TC” on page 4-11) to release the ion source.
2. Remove the ion source from the spectrometer tube body (Figure 4-12).
Figure 4-12
NOTE
Removing the Ion Source
Dark carbon-like deposits around the ion source filament and/
or a rainbow-like discoloration on the inside walls of the ion
source cavity indicate that the spectrometer tube has been
operated at too high a pressure. This can occur from a system
pressure leak or from transferring into test at too high a
pressure.
4-13
DRAFT 9/15/03
4.3.3 Removing the Ion Source
Model 979 Series Helium Mass Spectrometer Leak Detector
3. Examine the ion source (Figure 4-13) and cavity (Figure 4-14) for deposits and
discoloration. When examination is completed, dispose of it properly or return it to
Vacuum Technologies for exchange.
DRAFT 9/15/03
Figure 4-13
The Ion Source
4. Looking into the ion source cavity (Figure 4-14) you will see the ground slit plate ➀.
➀
Figure 4-14
4-14
Ion Source Cavity
Model 979 Series Helium Mass Spectrometer Leak Detector
5. Remove the ground slit plate (Figure 4-15) by placing a thin, slotted screwdriver snug
into the slot and carefully twisting and prying with the screwdriver.
Figure 4-15
A locking screwdriver designed to grab onto the slot of a screw
will work very well for this procedure.
4.3.4 Removing the Preamplifier
CAUTION
The preamplifier is a static sensitive device. Wear a grounding
device while the preamplifier is being handled.
1. Remove the 4 Phillips screws that hold the preamplifier header piece, repeating steps 1,
2, and 3 to release the preamplifier (Section 4.3.2 “Removing the Button TC” on
page 4-11) to release the preamplifier.
2. Carefully remove the preamplifier from the spectrometer tube body (Figure 4-16) and
place it carefully on a clean, safe, non-magnetic surface.
Figure 4-16
Removing the Preamplifier
4-15
DRAFT 9/15/03
NOTE
Ground Slit Plate
Model 979 Series Helium Mass Spectrometer Leak Detector
4.3.5 Remove the Magnetic Poles
1. Remove the 4 slotted screws ➀ to free the magnet pole piece ➁ (Figure 4-17).
➀
➁
Figure 4-17
Magnetic Pole Piece
DRAFT 9/15/03
2. Pick up the spectrometer tube body and tilt it over to remove the magnetic pole piece.
3. Remove the O-ring from the magnetic pole piece and place both the O-ring and the
magnetic pole piece on a clean surface (Figure 4-18).
Figure 4-18
4-16
Removing the O-ring from Magnetic Pole Piece
Model 979 Series Helium Mass Spectrometer Leak Detector
4. Repeat steps 1, 2, and 3 (Section 4.3.5 “Remove the Magnetic Poles” on page 4-16) to
remove the second magnetic pole piece (Figure 4-19) from the other side of the
spectrometer tube body.
Removing the Second Magnetic Pole Piece
4.3.6 Examining and Cleaning the Spectrometer Parts
1. Using the Scotch-Brite™ pad from the spectrometer tube cleaning kit, polish away any
discolored areas inside the spectrometer tube cavity.
2. Using the Scotch-Brite pad, polish away any discolored areas of the ground slit plate
(Figure 4-20).
Figure 4-20
CAUTION
Discolored Ground Slit Plate
The ground slit plate is very thin. Take care not to bend or
disfigure it during cleaning.
4-17
DRAFT 9/15/03
Figure 4-19
Model 979 Series Helium Mass Spectrometer Leak Detector
3. Using the Scotch-Brite pad, polish away any discolored areas of the magnetic pole
pieces (Figure 4-21).
Figure 4-21
Discolored Ground Magnet Pole Piece
DRAFT 9/15/03
4. Using the VacuSolv presaturated cleaning wipes and swabs (Figure 4-22), thoroughly
wipe down all surfaces of the spectrometer tube body, magnetic pole pieces, and
ground slit plate.
Figure 4-22
CAUTION
VacuSolv Cleaning Wipe
The sensing wire on the bottom side of the Button TC is
approximately 3 mils thick. Care must be taken not to damage
this wire.
5. Examine the Button TC, taking care not to damage the wires. If there is no damage, it
may be reused after it is properly cleaned.
NOTE
If you were seeing false system pressure readings prior to
overhaul, it may be best to replace the Button TC whether or
not you detect any physical signs of damage.
6. To clean the Button TC properly, soak it in liquid VacuSolv (or acetone) followed by an
isopropyl alcohol rinse. Air dry the Button TC thoroughly before re-assembling into
spectrometer tube.
4-18
Model 979 Series Helium Mass Spectrometer Leak Detector
7. Carefully wipe down and inspect all O-rings before reusing. Replace all damaged
O-rings (Figure 4-23).
Figure 4-23
Vacuum Technologies recommends replacing all O-rings
during routine maintenance or during any maintenance
procedure requiring that the O-rings be removed.
4.3.7 Reassembly
1. Carefully reassemble the spectrometer tube (Figure 4-24) in the reverse order of these
instructions.
NOTE
The preamplifier assembly has a slot ➀ that must be aligned
with the alignment pin ➁ in the preamplifier cavity of the
spectrometer tube body.
The ground slit plate has a hole in it that must be aligned with
the hole on the bottom of the spectrometer tube body ion
source cavity ➂.
CAUTION
The ion source must be aligned so that its alignment pin ➃ falls
in the center of this hole.
A short could result at power up if the alignment pin touches
the sides of the alignment hole.
➀ ➁
➂
Figure 4-24
➃
Spectrometer Tube Reassembly
4-19
DRAFT 9/15/03
NOTE
Inspecting the O-ring
Model 979 Series Helium Mass Spectrometer Leak Detector
4.4 Ion Source Replacement Outside of Annual Maintenance
DRAFT 9/15/03
The ion source has two filaments. The spare is automatically turned on when Filament 1
burns out, or manually by touching the filament selector box located on the MANUAL
SPECTUBE TUNING screen (Figure 3-5 on page 3-4). Calibration may be necessary to
obtain maximum sensitivity after changing filaments. It is recommended that the ion source
be replaced as soon as convenient after the spare filament has been put into use. Replacement takes about 3 minutes.
WARNING
Store the Ion Source in a cool, dry area in a tightly sealed
container. Wash hands thoroughly after handling the Ion Source
and especially before smoking or eating.
CAUTION
Use powder-free butyl or polycarbonate gloves to prevent skin
oils from getting on vacuum surfaces.
Tools: Phillips screwdriver
Parts: Ion Source
1. Turn off the main power switch located on the back of the 979 leak detector.
2. Remove the 2 Phillips screws from the front panel of the leak detector and drop the top
of the front panel down (Figure 4-1 on page 4-6). Be careful not to place tension on the
PCB harness.
3. Remove the ion source connector at the spectrometer tube.
4. Vent the spectrometer tube by turning the knurled nut on the turbo pump 1/4 turn
counterclockwise.
5. Remove the 4 Phillips screws that secure the ion source header (Figure 4-9 on
page 4-11).
6. Remove the ion source header by pressing down on the center post and lifting the
header up and off of the ion source.
4-20
Model 979 Series Helium Mass Spectrometer Leak Detector
7. Gently slide the ion source out of the spectrometer tube body (Figure 4-12 on
page 4-13).
NOTE
Dark carbon-like deposits around the ion source filament
and/or a rainbow-like discoloration on the inside walls of the
ion source cavity indicate that the spectrometer tube has been
operated at too high a pressure. This can occur from a system
pressure leak or transferring into test at too high a pressure.
8. Examine the ion source (Figure 4-13 on page 4-14) and cavity for deposits and
discoloration. If either is discolored or dirty contact Vacuum Technologies Customer
Service at 1-800-8VARIAN.
If Customer Service recommends a complete spectrometer tube overhaul, follow the
procedure in Section 4.3 “Spectrometer Tube Overhaul” on page 4-4.
4.4.1 Reassembly
1. Replace the ion source (see Figure 4-24 on page 4-19).
NOTE
CAUTION
The ground slit plate has a hole in it that must be aligned with
the hole on the bottom of the spectrometer tube body ion
source cavity ➂ (Figure 4-24).
The ion source must be aligned so that its alignment pin ➃
(Figure 4-24) falls in the center of this hole.
A short could result at power up if the alignment pin touches
the sides of the alignment hole.
2. Replace the ion source header. Align the grooves with the legs on either side of the
center post and to the back of the spectrometer tube. Tighten the 4 Phillips screws.
3. Replace the ion source connector. It is keyed to go on only one way.
4. Close the vent on the turbo pump by turning the knurled nut 1/4 turn clockwise.
5. Close the front cover being careful not to pinch any wires. Replace and tighten the 2
Phillips screws.
4-21
DRAFT 9/15/03
9. When examination is completed, properly dispose of the ion source or return it to
Vacuum Technologies for exchange.
Model 979 Series Helium Mass Spectrometer Leak Detector
4.5 Mechanical Pump
Most pumps require regular maintenance. Oil gets contaminated over time and has to
be replaced. In a system with dry pumps, tip seals have to be checked for wear. The roughing and forepumps of the system must be maintained at the intervals recommended to
ensure reliable leak detection by the Model 979.
4.5.1 Oil-Sealed Pump Fluid Change
Refer to the Mechanical Pump Operation Manual, provided with the Model 979 Leak
Detector. See Section 4.7 “979 Accessory Item List” for the replacement oil part number.
DRAFT 9/15/03
4.5.2 TriScroll Pump Tip Seal Replacement
Refer to the TriScroll Tip Seal Replacement Manual, provided with the tip seal set. See
Section 4.6 “979 Spare Parts List” for the appropriate tip seal set part number. When performing a tip seal replacement, the exhaust filter should also be replaced. See Section 4.6
“979 Spare Parts List” for the replacement exhaust filter part number.
4.6 979 Spare Parts List
Table 4-4
979 Spare Parts
Assembly
Part Number
Ion Source
82850302
Button TC (System)
R1266301
Preamplifier
L9030301 (Std Sensitivity)
R1003301 (High-Sensitivity)
Test Port Thermocouple Gauge (TC), Model 531
F0472301
Spectrometer Tube Magnet Assembly
K3023301
Spectrometer Tube Assembly Exchange Program
EXL9713302 (Standard Sensitivity)
EXL9713303 (High Sensitivity)
Spectrometer Tube Cleaning Kit
670029096
Calibrated Leak (Low 7 Range)
Call Vacuum Technologies
4-22
Model 979 Series Helium Mass Spectrometer Leak Detector
979 Spare Parts (Continued)
Assembly
Part Number
Calibrated Leak (Low 8 Range)
Call Vacuum Technologies
Main Power Supply
659077039
Ion Source Controller PCB
L9539302
Digital Interface PCB
L9536301
Preamplifier Driver PCB
L9524301
Gauges PCB
R0395301
Brain PCB
Call Vacuum Technologies.
Power Supply PCB
L9255301
979 I/O PCB
Call Vacuum Technologies
Touch Screen Assembly
Call Vacuum Technologies
Front Housing
Call Vacuum Technologies
Rear Housing
Call Vacuum Technologies
V70D Turbo Pump Exchange Program
Call Vacuum Technologies
V70LP Turbo Pump Exchange Program
Call Vacuum Technologies
Tip Seal Set, TriScroll 300 Series Primary Pump
PTSS0300TS*
Maintenance Tool Kit, TriScroll Primary Pump
PTSS0600TK
Tip Seal Set, TriScroll 600 Series Primary Pump
PTSS0600TS*
Exchange TriScroll 620 Pump Module
EXPTS0620SC
Exchange TriScroll 320 Pump Module
EXPTS0320SC
Oil Mist Eliminator Cartridge (Qty: 2)
949-9394
Exhaust Filter
110420110
DRAFT 9/15/03
Table 4-4
*Requires Maintenance Tool Kit for installation.
4-23
Model 979 Series Helium Mass Spectrometer Leak Detector
4.7 979 Accessory Item List
Table 4-5
979 Accessory Item List
DRAFT 9/15/03
Assembly
Part Number
LDNW25 Inlet Adapter Kit
LDNW25INADKIT
Flapper Box, NW25 Flange
L6241302
Power Probe, 10’ Length (NW25 Flange)
K9565306
Power Probe, 25’ Length (NW25 Flange)
K9565307
Spare Tip Filters for Power Probe (Qty: 10)
K9565303
Throttle Valve (NW25 Flange)
R1947301
Elite-Z Mechanical Pump Fluid
695409005
Calibrated Leak, 10−5, 10-6 (NW25 Flange)
F8473320
Calibrated Leak, 10−7 (NW25 Flange)
F8473321
Calibrated Leak, 10−8 (NW25 Flange)
F8473322
Calibrated Leak, 10−9 (NW25 Flange)
F8473323
Calibrated Leak, 10−10 (NW25 Flange)
F8473324
Oil Mist Eliminator (NW25 Flange)
949-9395
4-24
Model 979 Series Helium Mass Spectrometer Leak Detector
Appendix A. Rear Panel Interface Connectors
The system control and communication panel (Figure A-1) is located on the lower left
section of the rear panel. This appendix discusses the I/O ➀ and the Remote Control
➁ interfaces.
➀
Figure A-1
DRAFT 9/15/03
➁
System Control and Communication Panel
The I/O connector provides:
❑ Optically isolated (5 VDC to 24 VDC) discrete I/O interface
❑ Non-isolated Serial RS-232 interface
❑ Non-isolated analog (0 V to 10 V) output for the 979 Series Leak Detectors.
The Remote Control connector provides:
❑ Non-isolated serial interface and power connection for the Universal Remote
A.1 Optically Isolated Outputs
Table A-1 on page A-2 provides the output information for the I/O discrete connections.
Figure A-2 on page A-2 shows the output circuit sketch. Level outputs are optically isolated
emitter followers with 10 Ohm series resistors, and a 14 mA max drive current (24 VDC
max).
A-1
Model 979 Series Helium Mass Spectrometer Leak Detector
Table A-1
DRAFT 9/15/03
Pin
Output Name
Summary Table of Optically Isolated Outputs
Momentary
or Level
Description
2
PWR
NA
Customer-supplied +5 VDC to +24 VDC for all P101 outputs.
3
REJ 1
Level
Active when Leak Rate is greater than set point #1.
4
REJ 2
Level
Active when Leak Rate is greater than set point #2.
5
REJ 3
Level
Active when Leak Rate greater than set point #3.
6
REJ 4
Level
Active when Leak Rate greater than set point #4.
7
START OUT
Level
Active High when 979 in Rough Mode.
8
VENT OUT
Level
Active High when 979 in Vent Mode.
9
TEST OUT
Level
Active High when 979 in Test Mode.
10
BUSY OUT
Level
Active High when 979 in Busy Mode.
11
WAKE UP OUT
Level
Active High when 979 in Wake Up Mode.
12
NOT READY OUT Level
Active High when 979 in Not Ready Mode.
13
SPARE OUT
Spare Output.
Level
979 Series
Customer
I/O-2
PLC
I/O-3
I/O-4
+
5-24 VDC
I/O-12
I/O-13
Figure A-2
A-2
Optically Isolated Output Circuit Sketch
Model 979 Series Helium Mass Spectrometer Leak Detector
A.2 Optically Isolated Inputs
Table A-2 provides the input information for the I/O discrete connections.
Figure A-3 shows the input circuit sketch. Level inputs are optically isolated 5 VDC to
24 VDC, 3600 Ohm resistive loads, and require a 200 ms minimum pulse width.
Pin
Input Name
Summary Table of Optically Isolated Inputs
Momentary
or Level
Description
1
Input Common
N/A
Customer-supplied GND for all P101 inputs.
21
START IN
Momentary
>200 ms High Pulse to initiate 979 Roughing Mode.
22
VENT IN
Momentary
>200 ms High Pulse to initiate 979 Vent Mode.
23
HOLD IN
Momentary
>200 ms High Pulse to initiate 979 Hold Mode.
20
SPARE_IN_5
24
AUTOCAL
Momentary
>200 ms High Pulse to initiate an AUTOCAL cycle.
25
ZERO
Momentary
>200 ms High Pulse to initiate a ZERO function.
26
SPARE_IN_3
Spare input 3.
27
SPARE_IN_4
Spare input 4.
DRAFT 9/15/03
Table A-2
Spare input 5.
Customer
979 Series
I/O-21
I/O-27
+
5-24 VDC
I/O-1
Figure A-3
Optically Isolated Input Circuit Sketch
A-3
Model 979 Series Helium Mass Spectrometer Leak Detector
A.3 Non-Isolated Serial and Analog Interfaces
Table A-3 provides non-isolated RS-232 serial interface and non-isolated analog output
information. Figure A-4 shows the cable wiring diagram from a standard RS-232 9 Pin
connection to the 979 D Sub 37P.
RS-232 serial I/O connections are referenced to the chassis ground and are not
isolated. Electrical characteristics comply with EIA/TIA Standard EIA/TIA-232-E.
Table A-3
DRAFT 9/15/03
Pin
Input Name
Summary Table of Non-Isolated I/O
Signal Spec
Description
15
RxD
RS-232 Spec Receiving Data to the 979.
16
RTS
RS-232 Spec Request to Send from the 979.
17
TxD
RS-232 Spec Transmitted Data from the 979.
18
CTS
RS-232 Spec Clear to Send to the 979.
19
GND
RS-232 Spec Signal Common.
33
Analog Output
0-10 VDC
Analog voltage updated in Test mode.
34
Analog Ground
AGND
Return for analog voltage.
D Sub-37P
D Sub-9S
2
3
5
Figure A-4
A-4
16
18
17
15
19
979 COM Cable Wiring Diagram
Model 979 Series Helium Mass Spectrometer Leak Detector
A.4 Remote Control Connector
The D Sub 9S connector provides a non-isolated serial interface and a power connection for
the Universal Remote unit.
Table A-4 provides non-isolated serial and power information.
Pin
Input Name
Summary Table of Non-Isolated Serial and Power
Signal Spec
Description
2
RxD2
RS-232 Spec Receiving Data from the Universal Remote.
3
TxD2
RS-232 Spec Transmitted Data to the Universal Remote.
5
+24 RET
PWR GND
Common for power and signals.
9
+24 V
PWR
+24 VDC power for the Universal Remote.
DRAFT 9/15/03
Table A-4
A-5
DRAFT 9/15/03
Model 979 Series Helium Mass Spectrometer Leak Detector
This page intentionally left blank.
Model 979 Series Helium Mass Spectrometer Leak Detector
Appendix B. Communications Protocol
This appendix defines the technical specifications for the RS-232 protocol to be used with
the 979 Leak Detector.
B.1 Protocol (RS-232)
RS-232 ports operate at 9600 baud, 8 bits, no parity, and one stop bit.
The maximum length of the input is 80 characters; if no carriage return has been received
before the 80th character, execution of the command string begins anyway. Words that
begin with the ? character are inquiries for the controlling device to determine the current
state or value of a leak detector parameter.
Words that begin with PUT are commands for the controlling device to set the current state
or value of a volatile leak detector parameter. Words that begin with INIT- are commands
for the controlling device to set non-volatile leak detector parameters. Other commands do
not require a parameter and do not begin with any special character(s).
Successful inquiries respond with data, followed by a space, then: ok<CR><LF>, as specified in the tables of this appendix. Unsuccessful inquiries respond with the offending
inquiry followed by a space, then: #?<CR><LF> (line feed, <LF>).
Inquiries, parameters, and commands can be concatenated. Each word or numeric parameter is followed by one or more spaces. The string is terminated by a <CR>, which causes
execution to begin. Successful strings respond with the specified data for the input inquiries
in the order the inquiries were issued, followed by: ok<CR><LF>. Unsuccessful strings
respond with the first offending command followed by a space, then: #?<CR><LF>. All
commands and inquiries following the failed word are ignored; all parameters are discarded.
Table B-1 on page B-5, Table B-2 on page B-7, Table B-3 on page B-9, and Table B-4 on
page B-9 outline the available control and query commands.
B-1
DRAFT 9/15/03
All characters transmitted to the leak detector are echoed by the leak detector. Commands,
inquiries, and strings of both commands and inquiries must be terminated by a carriage
return <CR>; the carriage return is echoed as a space character.
Model 979 Series Helium Mass Spectrometer Leak Detector
B.2 Communicating with RS-232
The RS232 Protocol is intended for diagnostic purposes and initial set-up inquires. The
RS232 connection is located on the rear D-sub 37 pin connector (refer to Table A-3 on
page A-4 and Figure A-4 on page A-4).
The 979 RS232 port is not an interrupt-driven port. It is configured as DTE (Data Terminal
Equipment), therefore the 979's RS232 Protocol cannot be sent as strings.
NOTE
When programming with virtual instrumentation programs such
as LabView, TestPoint, or Visual Basic, try one the following
two methods:
❑ The intended command must be transmitted one character
DRAFT 9/15/03
at a time with a minimal delay time of 50 milliseconds
between each character and terminating the command with
a carriage return (CR).
❑ The intended command must be transmitted one character
at a time, then wait for the echoed response from the 979
before transmitting the next character and then terminating
the command with a carriage return (CR).
Windows 95 and later versions contain a serial communications program called
HyperTerminal, a useful tool in establishing communication between the 979 and a PC.
B.2.1 Windows HyperTerminal Set-Up Instructions
To set up Windows HyperTerminal:
1. Click Start.
2. Select Programs>Accessories>Communications>HyperTerminal.
3. Double-click Hypertrm.exe.
The Connection Description dialog box appears.
4. Enter a name and choose an icon for the connection, for example: 979 RS232.
5. Click OK.
The Connect To dialog box appears.
6. Select a COM port from the Connect Using: the pull down list.
The Com Properties/Port Setting dialog box appears.
B-2
Model 979 Series Helium Mass Spectrometer Leak Detector
7. Configure the following settings:
❑ Bits per second (baud rate) – 9600
❑ Data bits: – 8
❑ Parity: – None
❑ Stop bits: – 1
❑ Flow Control: – None
8. Click OK.
9. Select Properties from the File menu.
The Properties window appears.
10. Configure the following settings on the Connect To tab:
❑ Connect using – Verify the COM port is correct.
DRAFT 9/15/03
❑ Click Configure and verify the port settings are correct.
11. Ensure that the Settings tab is configured as follows:
❑ Terminal keys radio button selected.
❑ Ctrl+H radio button selected.
❑ Auto detect selected from the Emulation pull-down list.
❑ ANSI entered in the Telnet terminal ID.
❑ 500 set in the Background buffer lines field.
12. Click ASCII Set-Up.
The ASCII Set-Up dialog box appears.
13. Ensure that the settings are as follows:
❑ Line delay – 0 milliseconds
❑ Character delay - 0 milliseconds
❑ ASCII Receiving – Wrap lines that exceed terminal width
The cursor begins blinking.
14. Type some simple commands:
❑ ?LEAK
❑ ?ALL
❑ ?SETUP
B-3
Model 979 Series Helium Mass Spectrometer Leak Detector
B.2.2 Printing with HyperTerminal
The easiest way to print information captured in HyperTerminal is to choose Print from the
File menu. However, this method only prints information currently displayed on the screen.
Screen information can also be highlighted, copied and pasted into Microsoft Word or
Excel.
To capture large amounts of data that exceeds the terminal screen limits, use the Transfer
menu Capture Text option:
1. Select Transfer>Capture text.
The Capture text dialog box appears.
2. Click Browse.
The Select Capture File dialog box appears.
3. Navigate to a location, enter a file name and select a file type:
DRAFT 9/15/03
❑ .txt text file (Notepad)
❑ .doc (Word)
❑ .xls (Excel)
4. Click Save.
The Capture Text dialog box reappears.
5. Click Start to log data.
6. Select Transfer>Capture Text>Stop to end text capture.
7. Open the file where the data was stored and select File>Print.
Example
You can use the above procedures to poll the 979 leak rate using HyperTerminal and
capture the text. To do this:
1. Type the command: XYZZY.
If received correctly, the 979 responds ok.
2. Type the command: ?LEAK 1 SECS CR ?ESC.
This command polls the leak rate every second. The time is set in seconds.
3. Press ESC to abort polling.
4. Select Transfer>Capture Text.
5. Browse to a folder and file using the Capture Text dialog box and click Start.
6. Select Transfer>Capture Text> Stop to abort data logging.
B-4
Model 979 Series Helium Mass Spectrometer Leak Detector
Table B-1 lists inquiries that are used to determine internal operating parameters.
All inquiries, except VER, begin with ? and end with <CR>.
Table B-1
Internal Operating Parameters
Response
?ALL
Nine lines. Each begins with a <cr><lf>. The first line reports the filament bias
voltage. The second line reports the ion chamber voltage. The third line reports
the variable focus voltage. The fourth line reports the repeller voltage. The fifth
line reports the fixed focus voltage. The sixth line reports the suppressor
voltage. The seventh line reports the emission current. The eighth line reports
the value of the offset variable. The ninth line reports the gain value.
?AZ<0
Reports the status of the Auto-zero < 0 function. Enabled or Disabled.
?BACKGROUND
Reports the value of the helium background.
?CALOK
Reports the status of the last calibration.
?CL-XFER
Reports the currently stored contra-flow mode crossover pressure.
?EMISSIONCURRENT
Reports the emission current.
?EXPONENT
A two-character (minus followed by one digit) number indicating the
current manual-mode exponent. The exponent is within the least sensitive range
(as reported by ?RANGE) and the three lower (more negative exponent)
ranges. See also INIT-EXPONENT.
?EXTLEAK
Reports the currently stored value of the external standard leak.
?FILAMENTBIAS
Reports the filament bias voltage.
?FIXEDFOCUS
Reports the fixed focus voltage.
?GAIN
A three-character number consisting of a two-digit gain factor with a
decimal point after the first digit. This inquiry is used for reporting the value of
the gain.
?GL-XFER
Reports the currently stored gross leak crossover pressure.
?INTEXT
Indicates which leak, INTERNAL or EXTERNAL has been selected for use
during calibration.
?IONCHAMBER
Reports the ion chamber voltage.
?LEAK
A six-character number consisting of a two-digit leak rate mantissa with decimal
point after the first digit followed by E − then a single digit, which is the leak rate
range exponent (e.g., 1.3E−4).
?LPV
Reports the current Leak Rate, Pressures and Valve state.
?OFFSET
A number representing the offset value as a percent of full scale. 50 represents
mid-scale.
B-5
DRAFT 9/15/03
Inquiry
Model 979 Series Helium Mass Spectrometer Leak Detector
Table B-1
Internal Operating Parameters (Continued)
DRAFT 9/15/03
Inquiry
Response
?PRESSURES
Two lines. Each begins with a <cr><lf>. The first line consists of the words test
port TC followed by a number in milliTorr. The second line consists of the words
system TC followed by a number in mTorr.
?RANGE
A two-character (minus followed by one digit) number indicating the current
exponent of the least sensitive range of detectable leak. The reported leak rates
are in this range and three lower (more negative exponent) ranges. See also
INIT-RANGE.
?RANGESTOP
Reports the value of the Rangestop variable.
?REJECT
A seven-character number consisting of a two-digit reject leak rate mantissa
with a decimal point after the first digit followed by E− then a two-digit exponent
(e.g., 7.0E−05). This inquiry is used for reporting the reject leak rate most
recently input using INIT-REJECT.
?>REJECT
Reports the status of reject set point #1.
?xREJECT
(Where x is a number from 1 to 4 or the letter A) a seven-character number
consisting of a two-digit reject leak rate mantissa with a decimal point after the
first digit followed by E − then a two-digit exponent (e.g., 7.0E−05). This inquiry
is used for reporting the reject leak rate most recently input using
INIT-xREJECT. NOTE:?REJECT and ?1REJECT refer to the same variable.
?REPELLER
Reports the repeller voltage.
?ROUGH
Reports the currently stored Test Sequencer rough time.
?RSONOFF
Reports the status of the Rangestop function. Enabled or Disabled.
?SEQONOFF
Reports the status of the Auto Sequencer. Enabled or Disabled.
?SETUP
Seven lines. Each begins with a <cr><lf>. The first line reports the turbo pump
speed as Low or Off. The second line reports the selected manual leak rate
range, and the ranging method as auto or manual. The third line reports the
least sensitive leak rate range. The fourth line reports the reject set point leak
rate. The fifth line reports the calibration standard leak rate. The sixth line
reports the DAC output method as Linear, Log(2V), or Log(3V). The seventh line
reports the active filament status as One or Two, followed by Lit or Out.
?STDLEAK
A seven-character number consisting of a two-digit calibration standard leak
rate mantissa with a decimal point after the first digit followed by E–, and then by
a two-digit exponent (e.g., 1.3E-07). This inquiry is used for reporting the
calibration standard leak rate most recently input using INIT-STDLEAK.
?SUPPRESSOR
Reports the suppressor voltage.
?TEST
Reports the currently stored Test Sequencer test time.
B-6
Model 979 Series Helium Mass Spectrometer Leak Detector
Table B-1
Internal Operating Parameters (Continued)
Inquiry
Response
?TURBO
Three lines. Each begins with a <cr><lf>. The first line consists of the words
turbo followed by either Ok or Not Ok. The second line consists of the words
turbo followed by either Fault or No Fault. The third line consists of the words
“turbo speed” followed by Off or Slow.
?VALVESTATE
Reports the current mode of the valves: Vent, Hold, Rough, etc.
?VARIABLEFOCUS
Reports the variable focus voltage.
VER
One line, which reports a date in the form LA02.00 followed by a six-digit
hexadecimal checksum.
WHYNOCAL
Reports the calibration failure diagnostics.
Table B-2
Command
Non-Volatile Operating Parameters
Parameter
INIT-AZ<0
Preceded by 0 or 1, sets the status of Auto-zero < 0. 0 = off, 1 = on.
INIT-CL-XFER
Preceded by X.XE-XX, sets the value of the contra-flow mode crossover
pressure in Torr.
INIT-DAC
Preceded by a number 0 to 255, sets the offset of the leak rate output voltage
DAC.
INIT-DISPLAY
Preceded by LOG or LINEAR, sets the large bar graph to a log or linear display.
INIT-EMISSION
A four-digit number of microamps, in the range 0300 to 2000, which sets the
emission current of the ion source.
INIT-EXTLEAK
Same as INIT-STDLEAK, but for the value of the external leak.
INIT-FILAMENT
A single digit, either 1 or 2, which sets the operating filament in the ion source.
INIT-FOCUS
A three-digit number of volts, in the range 150 to 400, which sets the variable
focus voltage of the ion source.
INIT-GAIN
A two-digit number with a decimal point after the first digit, in the range 1.0 to
6.0, which sets the position of a variable gain (digi-pot) device used for adjusting
the helium signal to match a calibration standard leak.
INIT-GL-XFER
Preceded by X.XE-XX, sets the value of the gross leak crossover pressure in
Torr.
B-7
DRAFT 9/15/03
The commands listed in Table B-2 are used to set non-volatile operating parameters. The
current value of the operating parameter is changed to the new value.
Model 979 Series Helium Mass Spectrometer Leak Detector
Table B-2
Non-Volatile Operating Parameters (Continued)
DRAFT 9/15/03
Command
Parameter
INIT-ION
A three-digit number of volts in the range 200 to 350, which sets the ion voltage
of the ion source.
INIT-LINEAR
None. The leak rate analog output voltage becomes linear.
See Section 2.6.6 “Output Control Set-Up” on page 2-24 and Figure 2-15 on
page 2-25.
INIT-1LOG
None. The leak rate analog output voltage becomes logarithmic at 1 volt per
decade. See Section 2.6.6 “Output Control Set-Up” on page 2-24 and
Figure 2-14 on page 2-25.
INIT-2LOG
None. The leak rate analog output voltage becomes logarithmic at 2 volts per
decade.
INIT-3LOG
None. The leak rate analog output voltage becomes logarithmic at 3 volts per
decade.
INIT-OFFSET
A two-digit number, in the range 00 to 99, which sets the percentage of the
offset variable used for nulling the preamplifier.
INIT-RANGESTOP
Preceded by XX, sets the value of the most sensitive range exponent.
INIT-REJECT
A two-digit leak rate mantissa with a decimal point after the first digit followed by
E–, and then by a two-digit exponent: the helium leak rate number in atm cc/sec.
Values outside the working range of the leak detector are not stored.
INIT-1REJECT
Same as INIT-REJECT.
INIT-2REJECT
Same as INIT-1REJECT, but for Reject Set Point #2.
INIT-3REJECT
Same as INIT-1REJECT, but for Reject Set Point #3.
INIT-4REJECT
Same as INIT-1REJECT, but for Reject Set Point #4.
INIT-AREJECT
Same as INIT-1REJECT, but for the Audio Reject Set Point.
INIT-REPELLER
A three-digit number of volts, in the range 300 to 600, which sets the repeller
voltage of the ion source.
INIT-ROUGH
Preceded by XXX, sets the Auto Sequencer rough time in seconds.
INIT-STDLEAK
A two-digit leak rate mantissa with a decimal point after the first digit followed by
E–, and then by a two-digit exponent: the helium leak rate number in atm cc/sec
of the calibration standard leak. Values outside the working range of the leak
detector are not stored.
INIT-TCTPZERO
Preceded by a number (XXX) of mTorr representing the test port pressure at the
time of the command. Used to calibrate the low-pressure end of the test port TC
to a known pressure higher than zero.
INIT-TEST
Preceded by XXX, sets the Auto Sequencer test time in seconds.
B-8
Model 979 Series Helium Mass Spectrometer Leak Detector
The commands listed in Table B-3 are used to cause an immediate change in the spectrometer operating parameters. These Commands Do Not Change The Non-volatile Operating
Parameters.
Table B-3
Spectrometer Operating Parameters
Parameter
PUT-EMISSION
A four-digit number of microamps, in the range 0300 to 2000, which sets the
emission current of the ion source.
PUT-EXPONENT
A three-character number indicating the exponent of the range of leak in
MANUAL mode. Acceptable values are 0 through −10. Unacceptable values are
not stored.
PUT-FOCUS
A three-digit number of volts, in the range 150 to 400, which sets the variable
focus voltage of the ion source.
PUT-GAIN
A two-digit number with a decimal point after the first digit, in the range 1.0 to
6.0, which sets the position of a variable gain (digi-pot) device used for adjusting
the helium signal to match a calibration standard leak.
PUT-ION
A three-digit number of volts, in the range 200 to 350, which sets the ion voltage
of the ion source.
PUT-OFFSET
A two-digit number, in the range 00 to 99, which sets the percentage of an offset
variable.
PUT-RANGE
A two-character number indicating the exponent of the least sensitive range of
detectable leak. Acceptable values are 0 through –6. Unacceptable values are
not stored.
PUT-REPELLER
A three-digit number of volts, in the range 300 to 600, which sets the repeller
voltage of the ion source.
The commands listed in Table B-4 are used to cause certain leak detection actions.
Table B-4
Leak Detection Actions
Command
Action
AUTO
Initiates auto-ranging mode. Success is indicated by the normal ok response.
CALIBRATE
Tunes, then adjusts the gain so that the current helium signal causes the current
leak rate measurement to be the same as was most recently input using
INIT-STDLEAK. Success is indicated by the normal ok response.
DECREMENT
Subtracts 1 from the Manual Ranging leak rate exponent (making it more
negative). Success is indicated by the normal ok response. Does nothing in
auto-ranging mode. Does nothing upon reaching the most sensitive range.
DISABLE-RANGESTOP
Disables the Rangestop function.
ENABLE-RANGESTOP
Enables the Rangestop function.
B-9
DRAFT 9/15/03
Command
Model 979 Series Helium Mass Spectrometer Leak Detector
Table B-4
Leak Detection Actions (Continued)
DRAFT 9/15/03
Command
Action
EXTERNAL
Uses an external Calibrated Leak (in the test port). For Autocalibrate operations.
FPEAK
Adjusts the variable focus voltage to cause a maximum response to helium.
IDLE
Turns off the turbo and spectube and waits for a RUN command.
INCREMENT
Adds 1 to the Manual Ranging leak rate exponent (making it less negative).
Success is indicated by the normal ok response. Does nothing in auto-ranging
mode. Does nothing upon reaching the least sensitive range.
INTERNAL
Uses an internal Calibrated Leak. For calibrate operations.
KEEP
Causes the leak detector to close most valves and enter the HOLD state.
MANUAL
Sets to manual ranging mode. Success is indicated by the normal ok response.
NOSNIFF
Disables the internal sniffer mode.
ROUGH
Causes the leak detector to begin a roughing and testing sequence.
RUN
Starts the turbo and spectube after IDLE command.
SNIFF
Enables the internal sniffer mode.
SYTCATM
Sets the current system thermocouple reading to represent atmospheric
pressure. Success is indicated by the normal ok response.
SYTCZERO
Sets the current system thermocouple reading to represent a pressure that is
too low for a thermocouple to read. Success is indicated by the normal ok
response.
TPTCATM
Sets the current test port thermocouple reading to represent atmospheric
pressure. Success is indicated by the normal ok response.
TPTCZERO
Sets the current test port thermocouple reading to represent a pressure which is
too low for a thermocouple to read. Success is indicated by the normal ok
response.
TUNE
Adjusts the ion source voltage to cause a maximum response to helium.
VENT
Causes the leak detector to vent the test port to the atmosphere.
ZERO
Sets the current leak rate measurement to be 0.0 atm cc/sec in the most
sensitive range.
B-10
Model 979 Series Helium Mass Spectrometer Leak Detector
Appendix C. Introduction to Leak Detection
C.1 Leak Testing—Why is it Needed?
Even with today's complex technology, it is, for all practical purposes, impossible to
manufacture a sealed enclosure or system that can be guaranteed leak proof without
first being tested. Through the use of modern mass spectrometer leak testing techniques,
as implemented by the 979 Series Helium Leak Detector, leak rates in the 10−9 std cc/sec
range can be reliably detected. The discussion that follows provides a brief summary of
specific information pertinent to the overall subject of leak detection.
There are four general classes of leak detection:
Hermetic Enclosures
(or parts thereof)
These are tested to prevent entrance of contaminants or loss
of fluid that would affect performance of the enclosed unit. Examples: electronic devices, integrated circuits, sealed relays, motors,
ring pull tab can ends, and multipin feedthroughs.
Hermetic Systems
These are tested to prevent loss of fluid or gas within. Examples:
hydraulic systems and refrigeration systems.
Evacuated Enclosures
(or parts thereof)
These are tested to prevent too-rapid deterioration of vacuum
with age. Examples: TV picture tubes, bellows sensing elements,
full-panel opening can ends, etc.
Vacuum Systems
These are tested to minimize inleakage and allow attainment of
better vacuum or higher gas removal ability at any given vacuum
(absolute pressure).
C-1
DRAFT 9/15/03
C.2 Classes of Leak Detection
Model 979 Series Helium Mass Spectrometer Leak Detector
C.3 Terminology
The following terminology has application throughout this manual:
DRAFT 9/15/03
Flow
std cc/sec
One cubic centimeter of gas per second at a pressure differential of
one standard atmosphere (760 torr at 0 °C).
atm cc/sec
One cubic centimeter of gas per second at ambient atmospheric
pressure and temperature (used interchangeably with std cc/sec
because the difference is insignificant for leak testing purposes).
Rate-of-Rise
In vacuum systems, this is defined as the rate of increase of absolute pressure per unit time with the vacuum pump isolated from the
system, and is the sum of actual inleakage and internal outgassing.
Rate of rise is usually expressed in torr or microns (millitorr) per
hour. The flow rate should be expressed in torr-liters/second.
Conversions
1 std cc/sec*0.76 torr-liter/sec
1 torr-liter sec*1.3 std cc/sec
1 atm cc/sec9.7 x 104 micron cubic feet per hour or practically
105 micron CFH (µCFH)
1 µCFH or practically 10−5 std cc/sec
*for practical purposes, equal
Numerical Notation,
Exponential System
Most leak rates of commercial significance are very small fractions
of an std cc/sec. Therefore negative powers of ten are used as a
convenient system of numerical shorthand.
Table C-1 shows the relationship of exponents and multipliers (to the base 10) to the
arithmetic form, and the equivalent result.
Table C-1
Multiplier x 10n
C-2
Decimal Notation
Arithmetic Form
Result
1 x 102
=
1 x 10 x 10
=
100
1 x 10
1
=
1 x 10
=
10
1 x 10
o
=
1
=
1
1 x 10
−1
=
1 x 1/10
=
.1
1 x 10
−2
=
1 x 1/10 x 1/10
=
.01
5 x 10
−3
=
5 x 1/10 x 1/10 x 1/10
=
.005
1 x 10
−3
=
1 x 1/10 x 1/10 x 1/10
=
.001
Model 979 Series Helium Mass Spectrometer Leak Detector
C.4 Various Methods of Testing for Leaks
Water Immersion
(Air Bubble
Observation)
This method is good to approximately 10−3 std cc/sec, and can be
more sensitive if internal pressure is increased or vacuum is created
above water pressure. This method is limited because of the difficulty in differentiating between leakage bubbles and surface desorption bubbles. It is used to test industrial items such as valves,
hydraulic components, castings, automotive and air conditioning
components.
Dye Penetrant
A special dye, applied to one side of a surface suspected to contain
a leak, seeps through the leak and appears on the other side. This
method can take an hour or more for a 10−4 std cc/sec leak to show
up. This test is inexpensive but destructive in some applications, as
well as slow and messy.
Ultrasonic
This method is good to approximately 10−3 std cc/sec. This method
tests for ultrasonic sounds coming from a gas leak and is used for
testing of high pressure lines.
Halogen
(sensitive to
halogen elements
or compounds,
especially
refrigerant gases)
This method is good to approximately 10−5 std cc/sec in most current applications, but extendable to 10−9 std cc/sec under some
limited situations. It is critically dependent on operator judgement
if leaks are below 10−5 std cc/sec and requires constant flow of
fresh air in the test area because of the tendency of trace gas to
hang in the area. The detector used in this method is sensitive to a
variety of gases from external sources such as cigarette smoke and
solvent fumes.
Radioisotope
This method is useful only for testing hermetically sealed cavities. It
has approximately the same range as the helium method but it
involves an expensive installation (from four to ten times the cost of
a helium installation depending on the degree of isolation of radiation required). It also requires a radiation safety officer.
Helium
This method is good to 10−11 std cc/sec, and is capable of finding
leaks of any size larger. It is useful for testing hermetic seals, vacuum enclosures, and vacuum systems, and is the most versatile of
industrial and laboratory leak detection testing methods.
C-3
DRAFT 9/15/03
There are many methods of testing for leaks in enclosures—either systems or containers.
The more commonly used methods along with the range of accuracy provided are listed
below:
Model 979 Series Helium Mass Spectrometer Leak Detector
C.5 Helium Mass Spectrometer Leak Detection (MSLD)
Helium is an excellent trace gas because it is the lightest of the inert gases and as a consequence readily penetrates small leaks. In addition, its presence in the atmosphere is minute
(5 PPM or 4 millitorr absolute). Helium is easily detected by a simple mass spectrometer
(helium has a mass of 4 so that adjacent peaks of 3 and 6 are easily separated by this technique). Also, helium is readily available at reasonable cost, and is completely non-toxic and
non-reactive. The basic principles of the helium MSLD technique are discussed below.
DRAFT 9/15/03
C.5.1 Principles of Mass Spectrometry
A mass spectrometer sorts gases by their molecular weights (mass number) to determine the
quantity of each gas present. With the helium MSLD, the point of interest is primarily in
helium and the mass spectrometer tube is relatively simple. The principle is to ionize the
gases in vacuum, accelerate the various ions through a fixed voltage, and then separate the
ions by passing them through a magnetic field. A slit, properly placed, allows only helium
ions to pass through and be collected. The resulting current is amplified and a leak rate bar
graph indicates the presence and amount of helium.
C.5.2 Application as a Leak Detector
A mass spectrometer leak detector consists of a spectrometer tube, the electronics to operate
and interpret it, and a high vacuum system to maintain proper vacuum. In addition, means
are provided for connecting a test object, a rough vacuum pump, and a system of roughing
and test valves is provided to evacuate the test object for connection to the spectrometer
tube; or, if it is a sealed object containing helium, to evacuate a chamber containing the test
object.
C.5.3 The Nature of Flow in a Vacuum
It should be noted that the purpose of the vacuum system is to support operation of the analyzing spectrometer tube. Helium molecules entering through a leak individually reach the
spectrometer tube in a few milliseconds. Helium molecules as well as molecules of other
gases are continuously removed by the vacuum system turbo pump. If helium is continuously applied to a leak, the concentration in the spectrometer tube will rise sharply at first,
then reach equilibrium when it is being pumped out at the same rate as it is entering. When
helium is completely removed from the leak, the input will drop to zero while the residual
helium is pumped out of the system. Thus, a leak is indicated by a rise in the output signal
of the spectrometer tube.
C-4
Model 979 Series Helium Mass Spectrometer Leak Detector
C.5.4 Facts About Leak Rates
Visualizing Leaks in
Everyday Terms
10−5 std cc/sec: approximately 1 cc/day
10−7 std cc/sec: approximately 3 cc/year
Audible or Visual
Detection by Observer
a. Bubbles rising
in water
10−4 std cc/sec or larger
b. Audible Leaks
10−1 std cc/sec or larger
Studies indicate that almost all leaks at joints are about
5 x 10−7 std cc/sec (about 1 cc/month) or larger. This is true of
ceramic-to-metal, plastic-to-metal seals, welded, soldered and
brazed joints. Some long-path leaks may be slightly smaller. Diffusion of helium through glass may be as high as 10−8 std cc/sec per
square centimeter of surface area.
Variation in Leak Sizes Leaks unintentionally built-in at joints during manufacture may
vary from hour to hour and day to day. Breathing on a
10−6 std cc/sec leak provides enough moisture to close it temporarily; perhaps for several days. Atmospheric particles can close a
leak of this size. Never depend on an accidentally made leak to
remain constant. Manufacturing standard leaks for calibration purposes requires special techniques.
C.6 Leak Detection Methods
Most leak detection methods depend on the use of a tracer gas passing through the leak and
being detected on the other side (for example, visual detection of air bubbles in water).
The mass spectrometer leak detector operates with helium as a tracer and is widely used
because it combines high sensitivity with production testing capability. The three basic
methods in common use are described below.
C-5
DRAFT 9/15/03
Sizes of Leaks in
Man-Made Joints
Model 979 Series Helium Mass Spectrometer Leak Detector
C.6.1 Test Piece Evacuated (Figure C-1a and Figure C-1b)
The object to be tested is evacuated by the leak detector roughing pump, then valved into
the spectrometer vacuum system. The surface of the test object is then probed with a small
jet of helium to locate individual leaks, or surrounded by helium (hooded) for an overall
leak check.
Test
Piece
Leak
Detector
DRAFT 9/15/03
Figure C-1a
Leak
H
e
l
i
u
m
Test Piece Evacuated: Tracer Probe Used to Locate Leak
Hood
Test Piece
Leak
Leak
Detector
Figure C-1b
H
e
l
i
u
m
Test Piece Evacuated and Hooded with Helium Atmosphere to
Determine Overall Leak Rate
C.6.2 Test Piece Pressurized (Figure C-2)
;
Leak
Leak
Detector
Figure C-2
C-6
Test
Piece
H
e
l
i
u
m
Test Piece Pressurized: Detector Probe Used to Locate Leak
Model 979 Series Helium Mass Spectrometer Leak Detector
A sampling probe is connected to the leak detector. The object to be tested is filled with
helium at the desired test pressure and the probe is moved over its surface. Some of the
helium escaping from a leak is captured through the probe and enters the leak detector, thus
locating the leak.
Sensitivity of this type of testing is limited to about 10−7 std cc/sec, since most of the escaping helium diffuses into the surrounding atmosphere. The sensitivity is also limited by operator technique and variation in ambient helium concentration in the vicinity of the testing.
An alternative to probing is to enclose the object and probe the enclosure for a change in
helium content.
C.6.3 Test Piece Already Sealed (Figure C-3)
Sealed unit
containing
Helium
Leak
Detector
Figure C-3
Test Piece Sealed with Helium or Mixture of Helium and Other Gases:
Bell Jar Used to Determine Overall Leak Rate
Sometimes it is necessary to leak check a completely sealed object. This may be done by
placing helium inside the object before sealing (either 100% or mixed with other gas used
for backfilling). The object is then placed in a vacuum chamber connected to the leak
detector. Helium escaping from the object into the vacuum chamber is detected by the
spectrometer tube. Sensitivity depends on the partial pressure of helium in the object.
If the presence of helium in the finished object is undesirable, units already sealed may first
be placed in a container that is then pressurized with helium for a specific time at a known
pressure. Helium will enter the object through any leaks and may be detected later, as
described in the previous paragraph. Gross leaks may sometimes not be detected, since all
helium entering through a large leak may be lost prior to testing. Also, spurious signals may
be given by helium not entering the object, but entering surface fissures and remaining long
enough to be detected.
C-7
DRAFT 9/15/03
Leak
Model 979 Series Helium Mass Spectrometer Leak Detector
C.7 Mass Spectrometer Leak Detector—Simplified Description
Each Model 979 consists basically of an analytical sensing tube called a spectrometer tube,
electronics to operate the tube, and a vacuum system to maintain a very high vacuum
within this tube (usually less than 0.1 millitorr or about one ten-millionth of ordinary atmospheric pressure). In addition, a rough vacuum pump and a system of valves is provided to
enable test cycles to be carried out (see Figure C-4).
Test
Piece
Spectrometer
Tube
DRAFT 9/15/03
Electronics
and
Leak Indicator
Vacuum
System
979
Figure C-4
Roughing
Pump
Mass Spectrometer Leak Detector
In the spectrometer tube, gas molecules are ionized (given a positive electrical charge) by
bombarding them with electrons from a hot thoriated iridium filament. The ions, thus
formed, are accelerated into a magnetic field where the mass 4 (helium) ions are deflected
90 degrees (see Figure C-5). Only helium ions reach the collector.
An extremely stable electrometer provides an electron current to the collector, which neutralizes the current produced by the collection of helium ions. The feedback current is presented on the leak rate bar graph. Since this current is directly proportional to the number of
helium ions striking the collector per unit time, the panel leak rate bar graph directly reflects
the concentration of helium in the vacuum system at any time. Any helium entering the system causes an increased concentration of helium within the spectrometer tube, which is
reflected as an increase on the leak rate bar graph. In addition to the electrometer, the electronics also provides suitable voltages to operate the spectrometer tube and controls and
instrumentation for the vacuum system.
C-8
Model 979 Series Helium Mass Spectrometer Leak Detector
Test pieces are generally rough pumped (or, if pressurized, the chamber in which they are to
be tested is rough pumped) by a mechanical vacuum pump before they are connected to
the spectrometer tube. This prevents overloading the vacuum pumping system.
Magnetic Field deflects
Helium Ions 90°, other ions
more or less than 90°
To
Preamplifier
Heavier
Ions
Figure C-5
DRAFT 9/15/03
Lighter
Ions
Helium Ions pass
through slit and Collector
are collected
Magnetic Separation Principle
C-9
DRAFT 9/15/03
Model 979 Series Helium Mass Spectrometer Leak Detector
This page intentionally left blank.
Model 979 Series Helium Mass Spectrometer Leak Detector
Index
About the Model 979 1-1
Analog output 2-24
1 V per decade log 2-24, 2-25
Conversion charts 2-24, 2-25
Linear 2-24, 2-25
Logarithmic 2-25
Non-isolated A-4
atm cc/sec vs. std cc/sec C-2
Atmospheric calibration 3-11
System pressure gauge 3-11
Test port 3-12
Audio set points variable 2-16
Audio volume control 1-13
Auto sequencer 2-17
Controls 2-18
Disable 2-18
Enable 2-18
Set-up screen 2-17
Auto-filament selection 3-6
Auto-zero <0 3-3
Active 3-3
Inactive 3-3
Under light indicator 3-3
D
Daily maintenance 4-4
Decimal notation table C-2
Dedicated rough pump 2-19
Not installed selection 2-19
Digital leak rate 2-8
Bar graph display 2-8
Home screen leak rate display 2-8
Disable auto sequencer 2-18
Disable range stop 2-21
Discrete I/O
Input circuit sketch A-3
Output circuit sketch A-2
Discrete I/O Optically isolated circuit sketch
Input A-3
Displays and controls on front panel 1-12
Dual mechanical pump configuration 2-19
Gross test only 2-22
Dye penetrant C-3
B
Bar graph display 2-8
Bar graph display set-up 2-24
Bench System Installations 1-11
Button TC 4-11
C
Calculating leak rate C-6
Calibrate button 1-13
Calibrated leak set-up 2-14
Calibrated leak set-up screen 2-14
Calibrating the 979 2-1
Changing variables 2-6
Circuit breakers 1-15, 1-16
Forepump 1-16
Rough pump 1-16
Rough valve 1-16
Turbo pump 1-16
DRAFT 9/15/03
Circuit Sketch
Discrete I/O input A-3
Discrete I/O output A-2
Cleaning
Button TC 4-18
Ground slit plate 4-17
Magnetic Pole Pieces 4-18
O-rings 4-19
Spectrometer tube 4-17
Communication panel 1-14
Communications protocol 2-26, B-1
Condition indication 2-8
Condition states table 2-10
Contra-Flow leak xfer 2-27
Conversion chart
Linear output voltage 2-25
Logarithmic output voltage 2-25
Conversions C-2
A
E
Emission current 3-5
Typical 3-5
Enable auto sequencer 2-18
Enable range stop 2-21
Evacuated enclosures C-1
I-1
Model 979 Series Helium Mass Spectrometer Leak Detector
External calibration selection 2-15
Gross leak xfer 2-27
Gross test only mode 2-22
F
DRAFT 9/15/03
Fast calibration 2-15
Filament selection 3-6
Auto-filament selection 3-6
Fil 1 active 3-6
Fil 2 active 3-6
Fine test (normal) mode 2-22
First menu selection screen 2-14
Auto sequencer set-up 2-17
Back 2-27
Cal leak set-up 2-14
Leak rate ranging set-up 2-20
Next 2-27
Output control set-up 2-24
Rough pump set-up 2-19
Transfer points set-up 2-26
Fixed focus voltage 3-6
Flow C-2
Foreline pump connection 1-15
Forepump
Circuit breaker 1-16
Power 1-16
Forepump size selection 2-20
Front panel 1-12, 2-2
Front panel displays and controls 1-12
Audio volume control 1-13
Calibrate button 1-13
Key switch 1-13
Leak rate display 1-13
Pressure displays 1-13
Read standard leak button 1-13
Sniffer On/Off button 1-13
Test/Hold button 1-13
Vent button 1-13
Zero button 1-13
Front panel push buttons
Disable 3-9
Enable 3-9
Full calibration 2-15
G
Gain factor parameter 3-4
Gauge calibration 3-9
Atmospheric 3-11
System pressure 3-11
Test port pressure 3-11
Vacuum (low pressure) 3-10
Gauge calibration screen 3-9
I-2
H
Halogen C-3
Helium C-3
Helium for sealing C-7
Helium mass spectrometer leak detection C-4
Hermetic
Enclosures C-1
Systems C-1
High sensitivity 2-23
Home screen 2-6, 2-8
Condition indication display 2-8
Digital leak rate display 2-8
Leak detector condition 2-9
Leak detector status 2-9
Leak detector status display 2-8
MENUS selection 2-8, 2-9
Reject status indicator 2-9
Reject status indicator display 2-8
SYS INFO selection 2-8, 2-9
System ready indicator display 2-8
Test port pressure 2-9
Test port pressure display 2-8
I
I/O connector 1-15, A-1
Location A-1
Optically isolated output A-2
Optically isolated output circuit sketch A-2
Initial startup and shutdown 2-1
Input
Discrete I/O, circuit sketch A-3
Installation 1-11
Bench System 1-11
Internal calibration selection 2-15
Internal operating parameters B-5
Ion source 4-13
Auto-filament selection 3-6
Emission current 3-5
Fil 1 active 3-6
Fil 2 active 3-6
Filament selection 3-6
Fixed focus 3-6
Replacement 4-17, 4-20
Suppressor voltage 3-6
Variable focus voltage 3-6
Ion voltage
Repeller voltage 3-5
Set parameter 3-6
Typical 3-6
Manual zeroing and calibrate (Cal) screen 3-3
Mass spectrometer leak detector C-8
Mass spectrometry principles C-4
Mechanical pump maintenance 4-22
Oil-sealed pump 4-22
TriScroll pump 4-22
Menus
Touch panel 2-6
Touch screen boxes 2-9
MENUS box 2-8
Model 979 series configurations 1-1
Dual, dry mechanical pump on a
four-wheel cart 1-4, 1-6
Dual, oil-sealed mechanical pump on a
four-wheel cart 1-5
Single oil-sealed mechanical pump on a
two-wheel cart 1-2
Single, dry mechanical pump on a
two-wheel cart 1-3
Stand-alone bench-mount 1-1
Model 979, about 1-1
K
Key switch 1-13, 2-5
Run 2-5
Service 2-5
Set-Up 2-5
L
Leak detection action commands B-9
Leak detection methods C-5
Leak detector
Condition 2-9
Status 2-8, 2-9
Leak rate C-5, C-6
1 V per decade log output 2-24
Analog output voltage selection 2-24
Linear analog output 2-24
Ranging 2-20
Leak rate display 1-13
Leak rate ranging set-up 2-20, 2-21
Leak rate units 2-28
Leak rate units selection 2-28
Leak test methods C-3
Leak Testing C-1
Leak types C-1
Linear analog output 2-24, 2-25
Linear bar graph display 2-24
Locate leak by probe C-6
Locate leak with tracer probe C-6
Log bar graph display 2-24
Log output (1V/Dec) 2-24
Logarithmic output 2-25
Low pressure calibration 3-10
System pressure gauge calibration 3-10
Test port 3-12
N
Non-isolated interfaces A-4
Analog A-4
RS-232 Serial A-4
Non-volatile operating parameters B-7
Normal operating mode 2-22
Numerical notation-exponential system C-2
O
Offset, preamplifier 3-4
Normal range 3-4
Operating parameters
Internal B-5
Non-volatile B-7
Operating states table 2-10
Operator interface, front panel 2-2
Optically isolated circuit sketch
Output A-2
Output control 2-24
Output control set-up screen 2-24
Overhaul
Spectrometer tube 4-4
M
Magnetic poles 4-16
Magnetic separation principle C-9
Maintenance 4-1
As-required 4-3
Daily 4-4
Scheduled 4-3
Manual range configuration 2-21
Manual spectube tuning screen 3-4
Manual valve ctrl screen 3-7
Manual zeroing 3-3
P
Panel displays and controls 1-12
Parameters
Internal operating B-5
Non-volatile operating B-7
I-3
DRAFT 9/15/03
Model 979 Series Helium Mass Spectrometer Leak Detector
Model 979 Series Helium Mass Spectrometer Leak Detector
Power control and circuit breakers 1-15
Circuit breakers 1-16
Forepump power 1-16
On/Off switch 1-16
Rough pump power 1-16
Roughing valve power 1-16
Preamplifier 4-15
Preparation for operation 1-10
Pressure displays 1-13
Pressure units selection 2-28
Principles of mass spectrometry C-4
Probe to locate leak C-6
DRAFT 9/15/03
R
Radioisotope C-3
Range stop
Disable 2-21
Enable 2-21
Range stop configuration 2-21
Rate-of-rise C-2
Read standard leak button 1-13
Rear panel controls 1-14
Rear panel interface connectors A-1
Reassembly of spectrometer 4-19
Recalibrate the Internal Calibrated Leak 4-4
Reject and audio set points screen 2-16
Reject set points variable 2-16
Reject status indicator 2-8, 2-9
Remote control connector A-1, A-5
Non-isolated power A-5
Non-isolated RS-232 A-5
Universal remote A-5
Remote control input 1-15
Removing
Button TC 4-11
Ion source 4-13
Magnetic poles 4-16
Preamplifier 4-15
Removing the 979 from the skid 1-8
Repeller voltage 3-5
Typical 3-5
Replacement of ion source 4-17, 4-20
Rough only mode selection 2-19
Rough pump
Circuit breaker 1-16
Power 1-16
Size selection 2-20
Rough pump set-up 2-19
Rough pump set-up screen 2-19
Rough time variable 2-18
I-4
Rough valve
Circuit breaker 1-16
Roughing valve power 1-16
RS-232 Serial non-isolated A-4
S
Scheduled maintenance 4-3
Sealing with helium C-7
Second menu screen 2-28, 3-1
Second menu selection screen 2-28
Service 3-2
Version 3-1
Selecting options 2-7
Sensitivity Check
via Optional front control panel 4-4
Serial communications protocol 2-26, B-1
Serial connector
Remote control non-isolated RS-232 A-5
Service 3-1
Service menu screen 3-2
Service menu selection screen
Gauge cal 3-9
Manual spectube tuning 3-4
Manual valve control 3-7
Manual zeroing and calibrate (Cal)
screen 3-3
System init set-up 3-9
Services required for operation 1-9
Additional services 1-10
Helium 1-10
Power 1-9
Shutdown 2-1
Single mechanical pump, as pertains to
rough pump 2-19
Sniffer
Mode sensitivity ranges 2-5
On/Off button 1-13
Set-up 2-5
Sniffer inlet 1-15
Spare parts 4-22
Spec tube tuning 3-4
Spectrometer tube
Overhaul 4-4
Spectrometer tube maintenance 4-17, 4-19
Spectrometer tube overhaul 4-4
Split flow mode selection 2-19
Standard sensitivity 2-23
Startup 2-1
std cc/sec vs. atm cc/sec C-2
Storage requirements 1-12
Model 979 Series Helium Mass Spectrometer Leak Detector
Transfer pressure set-up screen 2-26
Turbo pump
Circuit breaker 1-16
U
Ultrasonic C-3
Units set-up screen 2-28
Universal remote
Connection A-5
Option 1-17
Unpacking instructions 1-7
Unpacking the 979 1-7
V
Vacuum calibration 3-10
System pressure 3-10
Test port 3-12
Vacuum flow C-4
Vacuum system diagram 3-7, 3-8
Vacuum systems C-1
Valve control, manual 3-7
Variable focus voltage 3-6
Typical 3-6
Vent button 1-13
Version screen 3-1
W
Water immersion C-3
T
Test piece
Already sealed C-7
Evacuated C-6
Pressurized C-6
Test port pressure 2-8, 2-9
Units 2-28
Test port pressure gauge calibration 3-11
Atmospheric 3-12
Vacuum (low pressure) 3-12
Test time variable 2-18
Test/Hold button 1-13
Testing for leaks C-1
Touch panel home screen 2-6, 2-8
Touch panel screen
Changing variables 2-6
Touch panel screen menus
Selecting options 2-7
Tracer probe to locate leak C-6
Transfer point set-up
Contra-Flow leak 2-27
Gross leak 2-27
Transfer pressure 2-26
DRAFT 9/15/03
Suppressor voltage 3-6
SYS INFO
Touch screen boxes 2-9
SYS INFO box 2-8
System control and communication
panel 1-14, 1-15
Control logic 1-15
I/O and Varian remote control A-1
I/O connector 1-15, A-1
Remote control input 1-15
Sniffer inlet 1-15
System vent port 1-15
System information screen (SYS INFO) 2-12
System information screen, typical
display 2-12
System initialize set-up 3-9
Enable front panel push buttons 3-9
System initialize set-up screen 3-9
System pressure gauge calibration 3-10
Atmospheric 3-11
Vacuum (low pressure) 3-10
System ready
Touch panel home screen 3-10
System ready indicator 2-8
System sensitivity 2-22
System vent port 1-15
Z
Zero button 1-13
Zeroing 3-3
Zeroing and Cal screen 3-3
I-5
DRAFT 9/15/03
Model 979 Series Helium Mass Spectrometer Leak Detector
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Sales and Service Offices
Sales and Service Offices
Argentina
Varian Argentina Ltd.
India
Varian India PVT LTD
United States
Varian Vacuum Technologies
Sucursal Argentina
Av. Ricardo Balbin 2316
1428 Buenos Aires
Argentina
Tel: (54) 1 783 5306
Fax: (54) 1 786 5172
101-108, 1st Floor
1010 Competent House
7, Nangal Raya Business Centre
New Delhi 110 046
India
Tel: (91) 11 5548444
Fax: (91) 11 5548445
121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: (781) 861 7200
Fax: (781) 860 5437
Benelux
Varian Vacuum Technologies
Rijksstraatweg 269 H,
3956 CP Leersum
The Netherlands
Tel: (31) 343 469910
Fax: (31) 343 469961
Brazil
Varian Industria e Comercio Ltda.
Avenida Dr. Cardoso de Mello 1644
Vila Olimpia
Sao Paulo 04548 005
Brazil
Tel: (55) 11 3845 0444
Fax: (55) 11 3845 9350
Canada
Central coordination through:
Varian Vacuum Technologies
121 Hartwell Avenue
Lexington, MA 02421
USA
Tel: (781) 861 7200
Fax: (781) 860 5437
Toll Free: (800) 882 7426
Italy
Varian Vacuum Technologies
Via F.lli Varian, 54
10040 Leini, (Torino)
Italy
Tel (39) 011 997 9 111
Fax (39) 011 997 9 350
Japan
Varian Vacuum Technologies
Sumitomo Shibaura Building, 8th Floor
4-16-36 Shibaura
Minato-ku, Tokyo 108
Japan
Tel: (81) 3 5232 1253
Fax: (81) 3 5232 1263
Korea
Varian Technologies Korea, Ltd.
Shinsa 2nd Building 2F
966-5 Daechi-dong
Kangnam-gu, Seoul
Korea 135-280
Tel: (82) 2 3452 2452
Fax: (82) 2 3452 2451
China
Varian Technologies - Beijing
Mexico
Varian S.A.
Room 1201, Jinyu Mansion
No. 129A, Xuanwumen Xidajie
Xicheng District
Beijing 1000031 P.R. China
Tel: (86) 10 6641 1530
Fax: (86) 10 6641 1534
Concepcion Beistegui No 109
Col Del Valle
C.P. 03100
Mexico, D.F.
Tel: (52) 5 523 9465
Fax: (52) 5 523 9472
France and Wallonie
Varian s.a.
Taiwan
Varian Technologies Asia Ltd.
7 avenue des Tropiques
Z.A. de Courtaboeuf – B.P. 12
Les Ulis cedex (Orsay) 91941
France
Tel: (33) 1 69 86 38 13
Fax: (33) 1 69 28 23 08
14F-16 No.77, Hsin Tai Wu Road Sec. 1,
Hsi Chih, Taipei Hsien
Taiwan, R.O.C.
Tel: (886) 2 2698 9555
Fax: (886) 2 2698 9678
Germany and Austria
Varian Deutschland GmbH
Alsfelder Strasse 6
Postfach 11 14 35
64289 Darmstadt
Germany
Tel: (49) 6151 703 353
Fax: (49) 6151 703 302
07/03
UK and Ireland
Varian Ltd.
28 Manor Road
Walton-On-Thames
Surrey KT 12 2QF
England
Tel: (44) 1932 89 8000
Fax: (44) 1932 22 8769
Other Countries
Varian Vacuum Technologies
Via F.lli Varian, 54
10040 Leini, (Torino)
Italy
Tel: (39) 011 997 9 111
Fax: (39) 011 997 9 350
Customer Support and Service:
North America
Tel: 1 (800) 882-7426 (toll-free)
vtl.technical.support@varianinc.com
Europe
Tel: 00 (800) 234 234 00 (toll-free)
vtl.technical.support@varianinc.com
Japan
Tel: (81) 3 5232 1253 (dedicated line)
vtj.technical.support@varianinc.com
Korea
Tel (82) 2 3452 2452 (dedicated line)
vtk.technical.support@varianinc.com
Taiwan
Tel: 0 (800) 051 342 (toll-free)
vtw.technical.support@varianinc.com
Worldwide Web Site,
Catalog and On-line Orders:
www.varianinc.com
Representatives in most countries
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