MEMS Mass Flow Sensor
D6F-P
A Compact, High-performance Flow
Sensor with Dust Segregation Structure.
• Built in Dust Segregation System (DSS) with cyclone flow
structure, diverts particulates from sensor element.
• High resolution and repeatability, even at low flow rates.
• Barbed ports with connector or PCB terminals, or manifold
mount with connector versions.
• Built in voltage regulator, temperature compensation and
amplified output. Measure up to 200 LPM with a bypass setup.
• High accuracy of ± 5% FS.
• RoHS Compliant
Ordering Information
Description
Flow Sensor
Cable Connector Assembly
Case
PBT
---
Calibration Gas
(See note 1.)
Air (See note 2.)
Flow Range
---
0-0.1 LPM
0-1 LPM
---
Mounting
Method
Flange mount
Connection
Model
Lead terminals
Manifold mount
---
Connector
Connector
---
D6F-P0001A1
D6F-P0010A1
D6F-P0010A2
D6F-P0010AM2
D6F-CABLE2
Note: 1. Can be calibrated for different gas types. Consult your Omron representative.
2. Dry gas must not contain large particles, eg dust, oil, mist.
3. Cable Assembly “D6F-CABLE2”, used with D6F-P0010A2 and D6F-P0010AM2, is sold separately.
Specifications
■ Characteristics
Models
Flow Range (See note 1.)
Calibration Gas (See note 2.)
Flow Port Type
Electrical Connection
Power Supply
Current Consumption
Operating Output Voltage
Output Voltage Limits (Min and Max.)
Accuracy and Temperature Characteristics
Repeatability (Reference (typical))
Case Material
Degree of Protection
Withstand Pressure
Pressure Drop (Reference (typical))
Operating Temperature
Operating Humidity
Insulation Resistance
Dielectric Strength
Weight
Response Time (Reference (typical))
D6F-P0001A1
D6F-P0010A1
D6F-P0010A2
D6F-P0010AM2
0 to 0.1 L/min.
0 to 1 L/min.
Air
barbed fitting maximum outside dia. 4.9 mm
manifold mount
Lead terminal
Connector (3 wire)
4.75 to 9.45 VDC
Max. 15 mA (no load, Vcc = 5 VDC)
0.5 to 2.5 VDC
0 VDC min. and 3.1 VDC max. (Lead resistance 10 kΩ)
± 5% F.S. max. of detected characteristics at 25 °C, within -10 to +60 °C (typical test results within ±2% F.S.)
± 1.0% F.S.
± 0.4% F.S.
PBT
IP40
50 kPa (7 psi)
0.19 kPa
0.48 kPa
-10 to +60°C (1 LPM versions) and -33 to +75°C (0.1 LPM version) with no icing or condensation
(Storage: -40 to +80°C with no icing or condensation)
35 to 85% RH with no icing or condensation (Storage: 35 to 85% RH with no icing or condensation)
20 MΩ (500 VDC between lead terminal and the case)
500 VAC, 50/60 Hz for 1 minute. (Leakage current typ. Max. 1mA) between lead terminals and case.
8.5 g
8.0 g
150 msec
Note: 1. Volumetric flow rate at 0°C, 101.3 kPa.
2. Dry gas. (must not contain large particles, dust, oil, mist)
MEMS Mass Flow Sensor
D6F-P
7
■ Absolute Maximum Rating
Item
Power supply voltage
Output voltage
Symbol
Vcc
Vout
Rating
10
4.0
Unit
VDC
VDC
■ Output Voltage Characteristics
D6F-P0001A@
D6F-P0010A@
3.0
Output Voltage (V)
Output Voltage (V)
3.0
2.5
2.0
1.5
1.0
0.5
0.0
2.5
2.0
1.5
1.0
0.5
0.0
0
0.02
0.04
0.06
0.08
0.10
0
0.25
Flow Rate (L/min)
0.5
0.75
1
Flow Rate (L/min)
D6F-P0001A@
Flow Rate (LPM)
Output Voltage (VDC)
0.00
0.50 ± 0.10
0.02
0.90 ± 0.10
0.04
1.30 ± 0.10
0.06
1.70 ± 0.10
0.08
2.10 ± 0.10
0.10
2.50 ± 0.10
D6F-P0010A@
Flow Rate (LPM)
Output Voltage (VDC)
0.00
0.50 ± 0.10
0.25
1.60 ± 0.10
0.50
2.10 ± 0.10
0.75
2.31 ± 0.10
1.00
2.50 ± 0.10
Note: 1. Mass flow converted into volumetric flow rate, SLM (standard liters per minute) at 0°C, 1 atmosphere.
2. 0 to 0.5 VDC output indicates a negative flow direction.
3. Measurement condition: Power supply voltage of 5.0 ± 0.1VDC, ambient temperature of 25 ± 5 °C and ambient humidity of 35% to 75% RH.
■ Repeatability. (Typical test results)
(5 Samples, D6F-P0010A@, repeated 10 times each)
1.0
0.8
Repeatability (%F.S.)
0.6
0.4
0.2
0.0
-0.2
-0.4
-0.6
-0.8
-1.0
0.0
0.3
0.5
Flow Rate(lpm)
8
MEMS Mass Flow Sensor
D6F-P
0.8
1.0
Dimensions
Note: All units are in millimeters unless otherwise indicated.
Lead terminals with Flange Mount
D6F-P0001A1 / D6F-P0010A1
23.3
Label: Gives model and lot numbers.
11.7
2.6 dia.
Two, 4.9 dia.
10
MADE IN JAPAN
D6F
27.2
7.3
Two, 1.1 dia.
7.6±0.2
14
Two 3-dia.
through holes
XG8V-0344
Connector
Made by OMRON
7.2
GND
Label
16.2
6
2.54
1.7
6
1.2
9.8
A
17.2
13.5
Two, R1.4
Vcc
5.08
Detailed View of A
2.8 dia.
Three lands,
Dia.: 1.3
4.76
Three through holes
Dia.: 0.8
2.54
Vout
1.5
13.2
13.5
5.08
Recommended Dimensions
for Connector Mounting Holes
(Bottom View)
7.2
4.76
Connector with Flange Mount
D6F-P0010A2
7.3
11.7
23.3
10
MADE IN JAPAN
A
8.5
7.6±0.2
14
16.2
6
8.5
Label: Gives model
and lot numbers.
Label
D6F
27.2
Two, 4.9 dia.
Two, 1.1 dia.
2.6 dia.
Note: 1. Use M3 or M2.6 pan screw or tapping screw
with an equal diameter for installation. And
bind tight with 0.59N·m or less torque.
1.2
1.7
17.2
Two, R: 1.4
13.5
1.5
3.Vcc
2.8 dia.
2. Use an attached connector. Manufactured
by JST Mfg Co., Ltd. (Japan) for A2 and
AM2 types.
• Pressure welding connector
Socket: 03SR-3S
Wire: AWG#30
OR
• Crimp type connector
Contact: SSH-003T-P0.2|
Wire: AWG#32 to #28
• Housing: SHR-03V-S
2.Vout
13.2
1.GND
Detailed View of A
Connector with Manifold Mount
D6F-P0010AM2
22
18
6.7±0.1 *1
8
2
0
Two, 4 -0.05 dia.
B
3. O-rings are not attached. 4mm ID tube
recommended for D6F-P0010A1 and
D6F-P0010A2 types.
27.2
1+0.1
0
14±0.05
A
D6F
22
MADE IN JAPAN
3.5 dia.
6.4 9.6
2-C0.3
1. GND
2.7±0.1
2. Vout
0.3±0.1
3. Vcc
0.3±0.1
Detailed View of A
Antirotain groove
Detailed View of B Label
Connector
Applicable Cable for D6F-P0010A@2 (Optional - sold separately)
part number: D6F-CABLE2
Black wire White wire
1. GND
2. Vout
15±3
Red wire
(5)
180±10
3. Vcc
MEMS Mass Flow Sensor
D6F-P
9
Packaging
TYPE D6F-P
3
1
No.
1
2
3
Material
CCNB
Polyethylene
CCNB
95
2
Item
Sock liner
Tray (25pcs)
Box (100 pcs)
Display seal
240
218
Application Information and Examples
■ Bidirectional Dust Segregation System
The D6F-P series has a patented dust segregation design. The flow path incorporates dual centrifugal chambers, in which particulate matter follows
in the outer path, away from the MEMS sensor chip regardless of the flow direction. Note, standard products are calibrated for unidirectional flow,
as indicated in note 3 of the “Output Characteristics” table, above. Contact Omron for bidirectional calibration options.
sensing element
Bypass Setup
HVAC Application
When used in a bypass set-up, as illustrated below, the D6F-P mass
flow sensors can measure flow rates far beyond the 1 LPM in-line rating. The pressure differential required to pull airflow through the sensor can be accomplished by installing a flow restrictor between the
two ports or through the use of a flow cross in large ducts, as shown
in the HVAC application.
The D6F-P mass flow sensor is ideal for damper control in variable
air volume systems, where low flow rates are difficult to measure with
differential pressure sensors.
Note: Be sure to read the precautions and information common to all D6F sensors, contained in the Technical User’s Guide, “D6F Technical Information”
for correct use.
10
MEMS Mass Flow Sensor
D6F-P
MEMO
MEMS Mass Flow Sensor
D6F-P
All sales are subject to Omron Electronic Components LLC standard terms and conditions of sale, which
can be found at http://www.components.omron.com/components/web/webfiles.nsf/sales_terms.html
ALL DIMENSIONS SHOWN ARE IN MILLIMETERS.
To convert millimeters into inches, multiply by 0.03937. To convert grams into ounces, multiply by 0.03527.
OMRON ON-LINE
OMRON ELECTRONIC
COMPONENTS LLC
Global - http://www.omron.com
USA - http://www.components.omron.com
55 E. Commerce Drive, Suite B
Schaumburg, IL 60173
847-882-2288
Cat. No. X305-E-1a
09/13
MEMS Mass Flow Sensor
Specifications subject to change without notice
D6F-P
Printed in USA
Mouser Electronics
Authorized Distributor
Click to View Pricing, Inventory, Delivery & Lifecycle Information:
Omron:
D6F-P0010A2 D6F-P0010A1 D6F-P0010AM2 D6F-P0001A1