343 Mini-Ion Modules with RS-485 Digital Interface Installation, Operation and Maintenance Instructions for use on 20343039

Series 343
Granville-Phillips® Mini-Ion® Vacuum Gauge
Module with RS-485 Digital Interface
Instruction Manual
Instruction manual part number 343050
Revision 101 - January 2013
Series 343
Granville-Phillips® Mini-Ion® Vacuum Gauge
Module with RS-485 Digital Interface
This instruction manual is for use with Mini-Ion Module 
catalog number 20343039-EU.
Customer Service/Support
For customer service within USA, 8 AM to 5 PM
Mountain Time Zone, weekdays excluding holidays:
Granville-Phillips
6450 Dry Creek Parkway
Longmont, CO 80503 USA
Phone:
+1-800-776-6543
Phone:
+1-303-652-4400
FAX:
+1-303-652-2844
Email:
co-csr@brooks.com
Brooks Automation, Inc.
15 Elizabeth Drive
Chelmsford, MA 01824 USA
Phone:
+1-978-262-2400
For customer service, 24 hours per day, 7 days per week,
every day of the year including holidays within the USA:
Phone: +1-800-367-4887
www.brooks.com
Instruction Manual
© 2013 Brooks Automation, Inc. All rights reserved.
Granville-Phillips® and Mini-Ion® are registered trademarks of Brooks Automation, Inc.
All other trademarks and registered trademarks are the properties of their respective owners.
Table of Contents
Table of Contents
Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
Safety Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5
.............................................................................. 8
Chapter 1
1.1
1.2
1.3
1.4
1.5
1.6
1.7
1.8
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
General Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9
Power Supply Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
Component Description. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.4.1 Input/Output Connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11
1.4.2 Power Indicator Lamp . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
1.4.3 Address Selector Switch. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12
Emission Current . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Overpressure Shutdown. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Degas Cycle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 13
Installation and Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 15
Grounding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
I/O Cable Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 16
Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
2.3.1 Firmware Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 17
2.4 Resetting Data Communication Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 19
2.5 Calculating a Gas Sensitivity Correction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.6 Very-High and Ultra-High Vacuum Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 20
2.6.1 Mini-Ion Vacuum Gauge Module for Process Chamber Baking . . . . . . . . . . . . . . . . . . . 20
Chapter 2
2.1
2.2
2.3
Chapter 3 RS-485 Digital Interface Specifications and Protocol . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3.1 Interface Configuration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3.2 Command Syntax . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3.2.1 Command Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 23
3.3 Receive/Transmit Timing . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 30
Service and Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Service Guidelines. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 31
Troubleshooting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 33
Mini-Ion Vacuum Gauge Module Ion Gauge Continuity Test. . . . . . . . . . . . . . . . . . . . . . . . . . . 34
Mini-Ion Vacuum Gauge (with Digital Interface) Module Initialization . . . . . . . . . . . . . . . . . . . 36
4.4.1 Initialization . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 36
4.5 Degas Cycle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
4.5.1 Digital Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 37
4.6 Fuse Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 38
4.7 Mini-Ion Vacuum Gauge Module Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 39
Chapter 4
4.1
4.2
4.3
4.4
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Series 343 Mini-Ion Vacuum Gauge Module
January, 2013
Table of Contents
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Series 343 Mini-Ion Vacuum Gauge Module
January, 2013
Safety
Safety Instructions
START BY READING THESE IMPORTANT SAFETY INSTRUCTIONS AND NOTES collected here
for your convenience and repeated with additional information at appropriate points in these
instructions.
These safety alert symbols in this manual or on the Product rear panel, mean caution
− personal safety, property damage or danger from electric shock. Read these
instructions carefully.
In these instructions the word “product” refers to the Mini-Ion Vacuum Gauge Module and all of its
approved parts and accessories.
NOTE: These instructions do not and cannot provide for every contingency that
may arise in connection with the installation, operation, or maintenance of this
product. Should you require further assistance, please contact Granville-Phillips at
the address on the title page of this manual.
This product has been designed and tested to offer reasonably safe service provided it is installed,
operated, and serviced in strict accordance with these safety instructions.
Failure to comply with these instructions may result in serious personal injury, including
death, or property damage.
These safety precautions must be observed during all phases of operation, installation, and service
of this product. Failure to comply with these precautions or with specific warnings elsewhere in this
manual violates safety standards of design, manufacture, and intended use of the instrument.
Granville-Phillips disclaims all liability for the customer's failure to comply with these
requirements.
The service and repair information in this manual is for the use of Qualified Service
Personnel. To avoid shock, do not perform any procedures in this manual or perform any
servicing on this product unless you are qualified to do so.
•Read Instructions – Read all safety and operating instructions before operating the product.
•Retain Instructions – Retain the Safety and Operating Instructions for future reference.
•Heed Warnings – Adhere to all warnings on the product and in the operating instructions.
•Follow Instructions – Follow all operating and maintenance instructions.
•Accessories – Do not use accessories not recommended in this manual as they may be
hazardous.
To reduce the risk of fire or electric shock, do not expose this product to rain or moisture.
Objects and Liquid Entry − Never push objects of any kind into this product through
openings as they may touch dangerous voltage points or short out parts that could result in a
fire or electric shock. Be careful not to spill liquid of any kind onto the products.
5
Series 343 Mini-Ion Vacuum Gauge Module
January, 2013
Safety
Do not substitute parts or modify instrument.
Because of the danger of introducing additional hazards, do not install substitute parts or
perform any unauthorized modification to the product. Return the product to a service
facility designated by Granville−Phillips for service and repair to ensure that safety features
are maintained. Do not use this product if it has unauthorized modifications.
Damage Requiring Service
Disconnect the product from all power sources and refer servicing to Qualified Service Personnel
under the following conditions:
a. When any cable or plug is damaged.
b. If any liquid has been spilled onto, or objects have fallen into, the product.
c. If the product has been exposed to rain or water.
d. If the product does not operate normally even if you follow the operating instructions.
Adjust only those controls that are covered by the operation instructions. Improper
adjustment of other controls may result in damage and will often require extensive work by
a qualified technician to restore the product to its normal operation.
e. If the product has been dropped or the enclosure has been damaged.
f. When the product exhibits a distinct change in performance. This indicates a need for
service.
Replacement Parts − When replacement parts are required, be certain to use the replacement
parts that are specified by Granville−Phillips, or that have the same characteristics as the
original parts. Unauthorized substitutions may result in fire, electric shock or other hazards.
Safety Check − Upon completion of any service or repairs to this product, ask the Qualified
Service Person to perform safety checks to determine that the product is in safe operating
order.
Finite Lifetime − After ten years of normal use or even non−use, the electrical insulation in
this product may become less effective at preventing electrical shock. Under certain
environmental conditions which are beyond the manufacturer’s control, some insulation
material may deteriorate sooner. Therefore, periodically inspect all electrical insulation for
cracks, crazing, or other signs of deterioration. Do not use if the electrical insulation has
become unsafe.
Be aware that when high voltage is present in any vacuum system, a life threatening electrical
shock hazard may exist unless all exposed conductors are maintained at earth ground.
This hazard is not peculiar to this product.
Be aware that an electrical discharge through a gas may couple dangerous high voltage
directly to an ungrounded conductor almost as effectively as would a copper wire connection.
A person may be seriously injured or even killed by merely touching an exposed ungrounded
conductor at high potential.
This hazard is not unique to this product.
6
Series 343 Mini-Ion Vacuum Gauge Module
January, 2013
Safety
Proper Grounding:
All components of a vacuum system used with this or any similar high voltage product must
be maintained at earth ground for safe operation. 
Be aware that grounding this product does not guarantee that other components of the
vacuum system are maintained at earth ground.
Verify that the vacuum port to which the Mini−Ion Module is mounted is electrically
grounded. It is essential for personnel safety as well as proper operation that the envelope of
the gauge be connected to a facility ground. Use a ground lug on a flange bolt if necessary.
All conductors in, on, or around the vacuum system that are exposed to potential high voltage
electrical discharges must either be shielded at all times to protect personnel or must be
connected to earth ground at all times.
Danger, High Voltage – The high voltages present within the Power Supply are capable of
causing injury or death. To avoid electric shock, wait 3 minutes after power is removed before
touching any component within the Power Supply. This will permit charged capacitors to
discharge.
Danger, high voltage – 180V is present in the Power Supply, on the cable, and at the ion gauge
when the gauge is turned on. Voltages as high as 250V peak are present during degas.
Install suitable devices that will limit the pressure to the level that the vacuum system can
safely withstand. In addition, install suitable pressure relief valves or rupture disks that will
release pressure at a level considerably below the pressure that the system can safely
withstand.
Suppliers of pressure relief valves and pressure relief disks are listed in the Thomas Register under
“Valves, Relief”, and “Discs, Rupture”.
Confirm that these safety devices are properly installed before installing the product. In addition,
check that:
(1) the proper gas cylinders are installed,
(2) gas cylinder valve positions are correct on manual systems, and
(3) the automation is correct on automated gas delivery systems.
Vacuum gauges with compression fittings may be forcefully ejected if the vacuum system is
pressurized.
Caution: If the overpressure shutdown point is increased from the factory settings, an excess
pressure rise may go undetected—resulting in possible gauge and/or vacuum system damage.
Consult the factory if in doubt.
It is the installer's responsibility to ensure that the automatic signals provided by the product are
always used in a safe manner. Carefully check manual operation of the system and the set point
programming before switching to automatic operation.
Where an equipment malfunction could cause a hazardous situation, always provide for fail-safe
operation. As an example, in an automatic backfill operation where a malfunction might cause high
internal pressures, provide an appropriate pressure relief device.
The fumes from solvents such as trichloroethylene, perchloroethylene, toluene, and acetone can
be dangerous to health if inhaled. Use only in well ventilated areas exhausted to the outdoors.
Acetone and toluene are highly flammable and should not be used near an open flame or
energized electrical equipment.
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Series 343 Mini-Ion Vacuum Gauge Module
January, 2013
Safety
This Page Intentionally Left Blank
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Series 343 Mini-Ion Vacuum Gauge Module
January, 2013
Chapter 1
1Introduction
1.1 General Description
The Mini-Ion Vacuum Gauge Module, shown in Figure 1-1, is a modular instrument that is capable
of measuring vacuum pressures from less than 5 x 10-8 Torr to 5 x 10-2 Torr — N2 equivalent (or air).
The Mini-Ion Vacuum Gauge Module does not have external controls or adjustments and is
available in RS-485 digital interface and analog versions.
The Mini-Ion Vacuum Gauge Module is a small rugged unit that has a wider measurement range,
more burnout resistance and generates less heat than typical glass gauges. Additional benefits
include:
•Compact, Convenient, Cost Saving Vacuum Measurement
•Rapid response during Pumpdown
•Cooler Operation
•Easy Compatibility with Computer Controlled Processes
The RS-485 digital interface version provides industry-standard digital RS-485 communications over
networks as well as direct connections to a personal computer. The setpoint relay, filament, and
degassing of the gauge tube can be easily selected via the RS-485 digital interface.
The setpoint relay can be used to control various devices such as; safety interlock, valve, digital
input for a scanner, or programmable logic controller. The setpoint relay trip points can be set to
customized pressure settings to turn power ON or OFF to the appropriate device.
1.2 Specifications
Refer to Figure 1-1 for the dimensions of the Mini-Ion Vacuum Gauge Module with RS-485 Digital
Interface.
2.60 in
(66.04 mm)
2.80 in
(71.12 mm)
3.00 in
(76.20 mm)
0.80 in
(20.32 mm)
MOUNTING FLANGE
Figure 1-1
Mini-Ion Vacuum Gauge Module Dimensions.
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Series 343 Mini-Ion Vacuum Gauge Module
January, 2013
1 Introduction
Refer to Tables 1-1 and 1-2 for performance and physical specifications of the Mini-Ion Vacuum
Gauge Module. Refer to Table 1-3 for RS-485 communication parameters.
Table 1-1
Performance Specifications.
Parameter
Specification
Measurement Range
5 x 10-8 to 5 x 10-2 Torr for N2 or air.
NOTE: For use below 1 x 10-7 Torr, the use of a metal seal is recommended.
Overpressure Protection
Gauge tube turns off if pressure rises above 5 x 10-3 Torr.
Emission Current
100 µA, 2mA.
Operating Voltage and Power
+24 VDC, ±15%, 0.5 Amperes, 12 Watts maximum.
NOTE: Customer supplied power supply.
Degas
Electron bombardment, approximately 2.5 watts with 2 minute timer.
Setpoint Relay
Single pole-double throw relay (SPDT).
Silver alloy-gold clad contacts.
1A, 30 VDC, resistive load or AC non-inductive.
Table 1-2
Physical Specifications.
Parameter
Specification
Vacuum Connections
O-ring - NW16KF flange.
Electrical Connection
9 pin D connector.
Weight
13 oz.
Case Material
Aluminum extrusion.
Gauge Tube Replacement
Field replaceable using only Phillips-type screwdriver.
Electrical Safety
Metal enclosure which houses 180 V supply will require use of a metal flange clamp
to assure ground continuity to system.
Operating Temp Range
0 oC to 40 oC.
Non-operating Temp Range
-40 oC to 70 oC.
Table 1-3
RS-485 Communication Parameters.
Parameter
Default Value
Range of Values
Baud Rate
19,200
300, 600, 1200, 2400, 4800, 9600, 14,400, 19,200, 28,000
Data Format
8 bits
7-8
Parity
None
none, even, odd
Stop Bits
1
N/A
10
Series 343 Mini-Ion Vacuum Gauge Module
January, 2013
1 Introduction
1.3 Power Supply Requirements
The customer supplied power supply should provide operating voltage and current to the Mini-Ion
Vacuum Gauge Module as specified in Table 1-1 on page 1-10.
1.4 Component Description
The top plate of the Mini-Ion Vacuum Gauge Module with RS-485 Digital Interface is shown in
Figure 1-2 and described in the following paragraphs.
Mini-Ion VACUUM GAUGE MODULE
GRANVILLE-PHILLIPS
Input/Output Connector
POWER
ADDRESS
Figure 1-2
Power Indicator Lamp
Address Selector Switch
Mini-Ion Vacuum Gauge Module Top Plate.
1.4.1 Input/Output Connector
The Input/Output Connector provides a connection to the Mini-Ion Vacuum Gauge Module for 24
VDC Input power and various gauge signals. Refer to Figure 1-3 for pin assignments.
PIN 5 - Setpoint Relay - N.C.
PIN 9 - RS-485 (+) Input
PIN 4 - Power Ground (-)
PIN 8 - No Connection
PIN 3 - No Connection
PIN 7 - Setpoint Relay Common
PIN 2 - Power Input (+)
PIN 6 - RS-485 (–) Input
PIN 1 - Setpoint Relay N.O.
MALE PINS
Figure 1-3
Mini-Ion Vacuum Gauge Module Input/Output Connector Pin Assignments.
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Series 343 Mini-Ion Vacuum Gauge Module
January, 2013
1 Introduction
1.4.2 Power Indicator Lamp
The Power Indicator lamp illuminates RED when power is applied and ion gauge is OFF; 
GREEN when ion gauge is ON.
1.4.3 Address Selector Switch
The Address Selector Switch determines the network address for the Mini-Ion Vacuum Gauge
Module. The switch position must be set to the appropriate network address for each Mini-Ion
Vacuum Gauge Module on the network.
1.5 Theory of Operation
The functional parts of a typical ionization gauge are the filament (cathode), grid (anode) and ion
collector, which are shown in Figure 1-4. These electrodes are maintained by the gauge controller
at +30, +180, and 0 volts, relative to ground, respectively.
Filament
Ion Collector
Grid
Figure 1-4
Ion Gauge Schematic.
The filament is heated to such a temperature that electrons are emitted, and accelerated toward the
grid by the potential difference between the grid and filament. Most of the electrons eventually
collide with the grid, but many first traverse the region inside the grid many times.
When an energetic electron collides with a gas molecule an electron may be dislodged from the
molecule leaving it with a positive charge. Most ions are then accelerated to the collector.
The rate at which electron collisions with molecules occur is proportional to the density of gas
molecules, and hence the ion current is proportional to the gas density (or pressure, at constant
temperature).
The amount of ion current for a given emission current and pressure depends on the ion gauge
design. This gives rise to the definition of ion gauge sensitivity, frequently denoted by K:
K = ion current/(emission current x pressure)
When used with nitrogen or air, the Mini-Ion Vacuum Gauge Module has a sensitivity of 5.2/Torr.
Refer to Section 2.5 for more information.
The Mini-Ion Vacuum Gauge Module controller varies the heating current to the filament to
maintain a constant electron emission, and measures the ion current to the collector. The pressure is
then calculated from these data.
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Series 343 Mini-Ion Vacuum Gauge Module
January, 2013
1 Introduction
The Mini-Ion Vacuum Gauge Module degas cycle is accomplished by increasing the emission
current to 10 mA and raising the grid bias to 250 VDC resulting in an increased temperature of the
grid to drive off adsorbed gas.
1.6 Emission Current
There are two ranges of emission current available. Either 100 microamperes or 2 milliamperes are
available as determined by the digital interface. While either range can be used continuously, the
following guidelines are suggested. For operation in the higher pressure ranges with a clean system
100 microamperes emission is satisfactory. This will give a theoretical longer filament life and
allows usage to where the gauge pressure reading overlaps with other type transducers such as the
Convectron or capacitance manometer. For operation in the lower pressure ranges the 
2 milliampere range should be used to give a more accurate pressure reading.
Internal circuitry corrects the pressure output data for the emission current selected. There is a
problem with all ion gauges when used in systems which have the potential for diffusion pump oil
vapor to enter the gauge tube.
This oil vapor deposits on the grid forming an insulator and preventing emission resulting in higher
and higher filament power being required and ultimate inability to control emission. In this
situation the 2 milliampere position is recommended.
1.7 Overpressure Shutdown
Overpressure shutdown is programmable by use of the computer interface. This has been preset at
5 x 10-3 Torr.
1.8 Degas Cycle
Pump oil, other organic compounds, or metal coatings from a sputtering process can cause
electrical current leakage between the ion gauge tube elements. When contamination occurs,
system base pressure readings may begin to rise which is an indication that a degas cycle will have
to performed.
The removal of gas from the gauge tube is accomplished by electron bombardment (EB) heating of
the grid. Pressure reading during a degas cycle is provided. Note that in order to activate the degas
circuit, the IG ON circuit must be first activated. This assures that there is a vacuum in the system
prior to the degas cycle. Also note that the degas circuit will turn off if the IG ON circuit is turned
off.
Due to the small size of the gauge, power during a degas cycle is approximately 2.5 watts above
operating power and is turned off automatically after a two minute period.
Refer to Section 4.5 for more information on performing a degas cycle.
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Series 343 Mini-Ion Vacuum Gauge Module
January, 2013
1 Introduction
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Series 343 Mini-Ion Vacuum Gauge Module
January, 2013
Chapter 2
2Installation
and
Configuration
This chapter provides the information required to install the RS-485 digital interface version of the
Mini-Ion Vacuum Gauge Module.
The flowchart in Figure 2-1 highlights the major tasks for installing the Mini-Ion Vacuum Gauge
Module (with RS-485 digital interface) and refers to the appropriate installation procedures within
this chapter.
The Mini-Ion Vacuum Gauge Module can be mechanically mounted anywhere in a system in any
attitude. It should be mounted in a location with free air flow and ambient temperature less than
40 oC.
START
Install Mini-Ion Vacuum Gauge
Module on Vacuum Chamber.
(Refer to Installation on page
Install Input/Output Cable
Connector on customer provided
I/O cable.
(Refer to Installation on page 2-17)
Connect Input/Output Cable
Connector to Mini-Ion Vacuum
Gauge Module
(Refer to Installation on page 2-17)
Reset Data Communication
Parameters*
(Refer to Resetting Data
Communication Parameters on
page 2-19)
Power ON and Firmware
Configuration
(Refer to Firmware Configuration
on page 2-17)
Calculate the gas sensitivity
correction for the gas being
measured.
(Refer to Calculating a Gas
Sensitivity Correction on page 2-20)
END
* Should only be performed if host computer
and gauge data communication parameters are
not the same.
Figure 2-1
Mini-Ion Vacuum Gauge Module Installation (RS-485 Digital Interface).
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Series 343 Mini-Ion Vacuum Gauge Module
January, 2013
2 Installation and Configuration
2.1 Grounding
The Mini-Ion Vacuum Gauge Module converts the input power to +180 VDC for the grid supply
(+250 VDC during degas). For safety, the outer housing of the gauge must be grounded to the
vacuum chamber. This is accomplished by the use of a metal flange clamp for the NW type flanges.
Due to the O-ring seal, grounding cannot be assumed through the fitting. The groove in the KF
flange of the Mini-Ion Vacuum Gauge Module has been designed to prevent the use of a nonmetallic type of flange clamp. Do not alter the groove or a non-metallic flange clamp to attempt
usage.
2.2 I/O Cable Connections
The I/O connector is used to operate the Mini-Ion Vacuum Gauge and provide connections for the
setpoint relay. Refer to Table 2-1 on page 2-17 for RS-485 connector pin assignments.
When no device is transmitting, the state of the RS-485 network will be indeterminate if no bias
resistors exist because all RS-485 outputs will be tri-stated. To prevent potential problems with
induced noise from external sources, bias resistors should be added somewhere on the RS-485
network. A 4.7K ohm resistor from the (-) RS-485 line to power ground and 4.7K ohm resistor from
the (+) RS-485 line to a 5 VDC source will force the network into a known state while outputs are
tri-stated.
NOTE: The information in Figure 2-1 on page 2-15 applies only to a Mini-Ion
Vacuum Gauge Module P/N 20343039-EU with RS-485 digital interface.
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2 Installation and Configuration
2.3 Installation
Use the following procedure to install the Mini-Ion Vacuum Gauge Module (with RS-485 digital
interface) on the vacuum system.
Reasonable care should be taken to install the Mini−Ion Vacuum Gauge Module where it is
protected from physical damage.
Mini−Ion Vacuum Gauge Module grid supply voltages reach 250 VDC during degas cycles.
Use a metal flange clamp for NW type flanges to ensure the exterior module housing is
grounded to the vacuum chamber.
NOTE: If an NW type flange is being used, ground the Mini-Ion Vacuum Gauge
Module to the vacuum chamber by installing a metal flange clamp.
1.
Connect the Mini-Ion Vacuum Gauge Module to the vacuum system flange using the
appropriate gasket and mounting hardware.
2.
Install the supplied connector on the customer supplied Input/Output cable according to the
pin assignments in Table 2-1.
Table 2-1
Pin
RS-485 Digital Interface I/O Connector Pin Assignments.
Function
1
Setpoint relay - N. O.
2
Input power 24 VDC ±15%, 12 W max.
3
No connection
4
Power ground
5
Setpoint relay - N. C.
6
RS-485 (-)
7
Setpoint relay - common
8
No connection
9
RS-485 (+)
3.
Connect the Input/Output cable to the connector on the Mini-Ion Vacuum Gauge Module.
4.
Proceed with Section 2.3.1 Firmware Configuration.
2.3.1 Firmware Configuration
Use the following procedure to configure the Mini-Ion Vacuum Gauge Module (with RS-485 digital
interface) and obtain a vacuum chamber pressure reading.
1.
Set the address switch on the Mini-Ion Vacuum Gauge Module to the correct position for the
vacuum chamber on which it is installed.
2.
Turn the Mini-Ion Vacuum Gauge Module power supply ON.
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Series 343 Mini-Ion Vacuum Gauge Module
January, 2013
2 Installation and Configuration
3.
If required, change the host computer data communication parameters to the Mini-Ion
Vacuum Gauge Module default settings as shown in Table 1-3.
NOTE: The Mini-Ion Vacuum Gauge Module communication parameters can be
changed later to match those of the host computer. Refer to Section 2.4 Resetting
Data Communication Parameters on page 2-19 for more information.
4.
Allow the vacuum chamber to acclimate to the correct vacuum pressure.
NOTE: Refer to Section 3.2.1 for additional information on the commands
entered in Steps 5. through 8.
NOTE: The address switch is set to the 01 position for demonstration purposes.
5.
Enter the SE command at the host computer for the desired emission current setting as follows:
a.
Enter #01SE2 — for 2.0 milliampere emission current.
Enter #01SE0 — for 0.1 milliampere emission current.
The Mini-Ion Vacuum Gauge Module should respond with *01_PROGM_OK.
b.
NOTE: The values 1.00E-04 and 2.00E-04 in Step 6. are for demonstration
purposes only. Substitute the appropriate values for your relay setpoints.
6.
Enter the appropriate SL command at the host computer to establish the setpoint at which the
setpoint relay will turn ON or OFF as follows:
a.
Enter #01SL+1.00E-04 — to turn the setpoint relay ON when the pressure is less than
1.00E-04 Torr.
Enter #01SL-2.00E-04 — to turn the setpoint relay OFF when the pressure is more than
2.00E-04 Torr.
The Mini-Ion Vacuum Gauge Module should respond with *01_PROGM_OK.
b.
7.
Enter the IG command at the host computer to turn the Mini-Ion Vacuum Gauge Module ON
as follows:
c.
Enter #01IG1 to turn the gauge ON.
Enter #01IG0 to turn the gauge OFF.
The Mini-Ion Vacuum Gauge Module should respond with *01_PROGM_OK.
d.
8.
Enter the RD command at the host computer to read the Mini-Ion Vacuum Gauge Module
pressure response as follows:
a.
Enter #01RD — the response will be 9.99E+09 for 5 seconds after executing #01IG1
command, then a valid pressure response will be sent.
Overpressure shutdown parameters should not be changed from the default value. If set too
low, the Mini−Ion Vacuum Gauge Module might turn off below chamber operating pressure.
If set too high, inaccurate readings or Mini−Ion Vacuum Gauge Module damage may occur.
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Series 343 Mini-Ion Vacuum Gauge Module
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2 Installation and Configuration
2.4 Resetting Data Communication Parameters
NOTE: This procedure should only be performed if the default Mini-Ion Vacuum
Gauge Module communication parameters are the same as the host computer.
Use the following procedure to change the data communication parameters of the Mini-Ion
Vacuum Gauge Module to match the host computer.
NOTE: Only perform Step 1. or 2. or 3. based upon the data format and parity of
the host computer.
1.
Enter the SB command at the host computer to change the baud rate as follows:
Enter #01SBXXXX — where XXXX equals one of the following baud rates: 300,600,
1200, 2400, 4800, 9600, 14400, 19200, or 28000.
The Mini-Ion Vacuum Gauge Module should respond with *01_PROGM_OK.
a.
2.
For a data format of eight (8) bits and parity of none, enter the SPN command at the host
computer as follows:
Enter #01SPN
The Mini-Ion Vacuum Gauge Module should respond with *01_PROGM_OK.
a.
3.
For a data format of seven (7) bits and odd parity, enter the SPO command at the host
computer as follows:
Enter #01SPO
The Mini-Ion Vacuum Gauge Module should respond with *01_PROGM_OK.
a.
4.
For a data format of seven (7) bits and even parity, enter the SPE command at the host
computer as follows:
Enter #01SPE
The Mini-Ion Vacuum Gauge Module should respond with *01_PROGM_OK.
a.
NOTE: The Mini-Ion Vacuum Gauge Module must be reset or the power must be
cycled 
ON/OFF to begin using the new data communication values.
5.
To reset the Mini-Ion Vacuum Gauge Module, enter the RST command at the host computer
as follows:
Enter #01RST
The Mini-Ion Vacuum Gauge Module will be reset and there will be no response.
a.
6.
Proceed with Section 2.5 Calculating a Gas Sensitivity Correction on page 2-20.
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Series 343 Mini-Ion Vacuum Gauge Module
January, 2013
2 Installation and Configuration
2.5 Calculating a Gas Sensitivity Correction
If measuring a gas other than nitrogen or air, refer to Table 2-2 and the following example to
calculate the gas sensitivity correction for the gas being used.
1.
Table 2-2
Ion Gauge Sensitivity Ratios.
Gas
Ratio
N2
1.00
He
0.18
Ne
0.30
Ar
1.29
Kr
1.94
Xe
2.87
H2
0.46
The Mini-Ion Vacuum Gauge Module indicates a pressure of 5 x 10-5 Torr. If the gas type is known
to be neon, then perform the following calculation:
5 x 10-5 Torr
0.30
2.
= 1.67 x 10-4 Torr of Neon
Enter the calculated gas sensitivity correction into the host computer.
2.6 Very-High and Ultra-High Vacuum Measurement
To obtain the best results, Granville-Phillips recommends the following suggestions when
measuring vacuum pressures below 1 x 10-7 Torr:
•Use only all-metal vacuum fittings
•Degas the Mini-Ion Vacuum Gauge Module grid. Refer to Section 4.5 for more information.
•A process chamber bake to 100 to150 ºC is often required. Refer to Section 2.6.1 Mini-Ion
Vacuum Gauge Module for Process Chamber Baking on page 2-20 for more information.
2.6.1 Mini-Ion Vacuum Gauge Module for Process Chamber Baking
NOTE: The Mini-Ion Vacuum Gauge Module tube can be removed from the
module without interrupting the vacuum within the process chamber.
The temperature of the Mini−Ion Vacuum Gauge Module cannot exceed 70ş C. The module
electronics must be removed from the gauge tube before baking the chamber at temperatures
higher than 70ş C.
To prevent electrical shock, shut down electrical power before servicing the Mini−Ion
Vacuum Gauge Module. Do not touch any gauge pins while the gauge tube is under vacuum
or connected to a controller.
1.
Turn Mini-Ion Vacuum Gauge Module power OFF.
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Series 343 Mini-Ion Vacuum Gauge Module
January, 2013
2 Installation and Configuration
2.
Remove the Input/Output connector from the module.
3.
Remove the four Phillips head screws from the gauge collar plate as shown in Figure 2-2.
4.
While holding the flange, gently pull the Mini-Ion Vacuum Gauge Module away from the
gauge collar plate as shown in Figure 2-2. The gauge tube and plate will disconnect from the
module.
NOTE: When baking the process chamber, make sure the temperature of the
Mini-Ion Vacuum Gauge Module tube and the associated vacuum plumbing is
raised to the same temperature as the process chamber. DO NOT EXCEED 200 ºC.
Mini-Ion Vacuum Gauge Module
Alignment Notch
Gauge Pins
Alignment Notch
Gauge Collar Plate
Flange
Phillips-Head Screws (4)
Figure 2-2
Module Removal for Baking Process Chamber.
5.
Bake the process chamber at the desired temperature for the specified period of time (200 ºC
max.). Once the chamber has cooled to below 70º C, perform Steps 6. through 11.
6.
Align the notches on the gauge collar plate and the Mini-Ion Vacuum Gauge Module as shown
in Figure 2-2.
7.
Gently insert the gauge and collar plate into the Mini-Ion Vacuum Gauge Module until the
tube pins are inserted into the tube socket.
8.
Insert and tighten all four Phillips head screws.
9.
Install the Mini-Ion Vacuum Gauge Module to the vacuum system.
10.
Connect the Input/Output connector to the Mini-Ion Vacuum Gauge Module.
11.
Turn Mini-Ion Vacuum Gauge Module power ON and verify communication.
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Series 343 Mini-Ion Vacuum Gauge Module
January, 2013
NOTES
22
Series 343 Mini-Ion Vacuum Gauge Module
January, 2013
Chapter 3
3RS-485
Digital Interface
Specifications and Protocol
This chapter provides the syntax and description of the commands used in the Mini-Ion Vacuum
Gauge Module with RS-485 digital interface P/N 343033-EU.
3.1 Interface Configuration
Default - 19.2 KB 8 bits
1 stop bit, no parity
Address = 01
3.2 Command Syntax
Command from host must include a start character, address, data and terminator.
(Start character)(address)(data)(terminator)
• The start character is #.
• The address is two ASCII digits representing the Hex address of the module. This address will
also be displayed on the front panel in a hex format. For example: 0F Hex is address 15
Decimal.
• The data field is explained in the command descriptions. All alpha characters can be upper or
lower case.
• The terminator character is control M or Hex 0D for a carriage return, signified by CR.
• A space character is signified by _.
• All data fields responses will contain 13 characters, upper case alpha characters.
• A response of ?01_SYNTX_ER CR is caused by an incorrect character string from the host.
NOTE: The speed of the response from the Mini-Ion Vacuum Gauge Module
varies depending on the type of command being carried out. Refer to Section 3.3
Receive/Transmit Timing on page 3-30.
3.2.1 Command Descriptions
RD
Definition:
Read Mini-Ion Vacuum Gauge Module pressure response.
Example:
From computer: #01RD CR
From Mini-Ion Vacuum Gauge Module: *01_9.34E-06 CR
NOTES:
The response will be 9.99E+09 for 5 seconds after the gauge is turned ON then valid pressures
will be sent. A response of 9.99E+09 will be sent if the ion gauge is OFF.
IG
Definition:
Control Mini-Ion Vacuum Gauge Module status.
Example:
From computer: #01IG1 CR
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Series 343 Mini-Ion Vacuum Gauge Module
January, 2013
3 RS-485 Digital Interface Specifications and Protocol
From Mini-Ion Vacuum Gauge Module: *01_PROGM_OK CR
NOTES:
IG1 = turn ON Mini-Ion Vacuum Gauge Module.
IG0 = turn OFF Mini-Ion Vacuum Gauge Module.
Initial RD reading will be 9.99E+09 for 5 seconds, then valid pressure readings will be
received if emission status is OK.
DG
Definition:
Control degas (10 mA) status.
Example:
From computer: #01DG1 CR
From Mini-Ion Vacuum Gauge Module: *01_PROGM_OK CR
NOTES:
DG1 = turn ON degas.
DG0 = turn OFF degas.
Another possible response is ?01_COM_ERR CR. This response occurs if the Mini-Ion
Vacuum Gauge Module is OFF. The Mini-Ion Vacuum Gauge Module must be ON before
starting degas. Degas will run for a maximum of 2 minutes then turn OFF automatically.
SE
Definition:
Control emission status.
Example:
From computer: #01SE2 CR
From Mini-Ion Vacuum Gauge Module: *01_PROGM_OK CR
NOTES:
SE2 = 2 mA emission.
SE0 = 0.1 mA emission.
2 mA emission is used to get accurate readings at pressures below 1e-6 Torr, 0.1 mA emission
is used to get extended gauge life above 2e-4 Torr. This programming is non-volatile, the
setting selected will remain in effect even if power is cycled.
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Series 343 Mini-Ion Vacuum Gauge Module
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3 RS-485 Digital Interface Specifications and Protocol
SO
Definition:
Set over pressure setpoint.
Example:
From computer: #01SO5.00e-03 CR
From Mini-Ion Vacuum Gauge Module: #01_PROGM_OK CR
NOTES:
The Mini-Ion Vacuum Gauge Module will turn OFF if the pressure is greater than this value.
The factory setting for a Mini-Ion Vacuum Gauge Module is 5.00e-3 Torr. This programming is
non-volatile. The setting selected will remain in effect even if power is cycled.
Another possible response is ?01_SYNTX_ERR. This is caused by the use of the wrong
notation in the command data field.
To obtain optimum filament life, Mini−Ion Vacuum Gauge Modules equipped with tungsten
filaments should not be operated above 5x10−3 Torr in air.
SA
Definition:
Set offset address
Example:
From computer: #01SA20 CR
From Mini-Ion Vacuum Gauge Module: *01_PROGM_OK CR
NOTES:
The address switch setting is added to this Hex value.
Example:
Address switch is set at 2 and offset value is 20 Hex, then the module address is 
22 Hex. The operating address will not change until the power is cycled or 
RST is sent.
SL
Definition:
Set setpoint 1 trip point.
Examples:
From computer: #01SL+1.00E-04 CR
From Mini-Ion Vacuum Gauge Module: *01_PROGM_OK CR
From computer: #01SL-2.00E-04 CR
From Mini-Ion Vacuum Gauge Module: *01_PROGM_OK CR
NOTES:
The above example will turn ON or energize the relay when the pressure is less than 1.00E-04
TORR, for nitrogen. The relay will turn OFF when the pressure goes above 2.00E-04 TORR.
The '-' value from the computer sets the relay OFF point and the '+' value set the relay ON
point. The above example turns on the relay below the setpoint. To turn ON the relay above
the setpoint, the '-' value must be lower than the '+' value. SL+ SL- may be set for the same
pressure. If this is done, the second SL_ command will determine the relay logic. SL+ sent last
will generate a *01_+MIN_HYS response and the relay will energize BELOW the setpoint. SLsent last will generate a *01_-MIN_HYS response and the relay will energize ABOVE the
setpoint.
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Series 343 Mini-Ion Vacuum Gauge Module
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3 RS-485 Digital Interface Specifications and Protocol
RL
Definition:
Read setpoint 1 trip point.
Example:
From computer: #01RL-CR
From Mini-Ion Vacuum Gauge Module:*01-9.80E-02 CR
NOTES:
RL+ reads setpoint ON value. The value begins with a plus sign.
RL- reads setpoint OFF value. The value begins with a minus sign.
IGS
Definition:
Read Mini-Ion Vacuum Gauge Module Status.
Examples:
From computer: #01IGS CR
From Mini-Ion Vacuum Gauge Module: *01_0_IG_OFF CR
From computer: #01IGS CR
From Mini-Ion Vacuum Gauge Module: *01_1_IG_ON_ CR
DGS
Definition:
Read Mini-Ion Vacuum Gauge Module Degas Status.
Examples:
From computer: #01DGS CR
From Mini-Ion Vacuum Gauge Module: *01_0_DG_OFF CR
From computer: #01DGS CR
From Mini-Ion Vacuum Gauge Module: *01_1_DG_ON_CR
SES
Definition:
Read Emission Status.
Examples:
From computer: #01SES CR
From Mini-Ion Vacuum Gauge Module: *01_0.1MA_EM CR
From computer: #01SES CR
From Mini-Ion Vacuum Gauge Module: *01_2.0MA_EM CR
RS
Definition:
Read Controller Status.
Example:
From computer: #01RS CR
From Mini-Ion Vacuum Gauge Module: *01_00_ST_OK CR
NOTES:
The response is dependent on the cause of gauge shutdown.
00_ST_OK indicates normal user control.
01_OVPRS indicates overpressure condition caused gauge shutdown. See SO command to
control overpressure setpoint.
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Series 343 Mini-Ion Vacuum Gauge Module
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3 RS-485 Digital Interface Specifications and Protocol
02_EMISS indicates emission control failure. Causes include gauge failure due to broken
filament or contamination or pressure over 1 Torr.
04_HIVLT indicates high voltage power to gauge failed. Causes include gauge failure due to
mechanical damage or electrical leakage current due to contamination.
08_POWER indicates power to controller was interrupted.
The number value for each status indication represents a bit weight in the hexadecimal
representation of this binary number. It is possible to have multiple bits set and cause a response
like 06 EMISS. This indicates a HIVOLT and a EMISS failure. The status will remain the
same with repeated queries from the computer until the Mini-Ion Vacuum Gauge Module is
turned ON. Turning ON the Mini-Ion Vacuum Gauge Module will cause the status to be reset to
00.
VER
Definition:
Read Mini-Ion Vacuum Gauge Module firmware version.
Example:
From computer: #01VER CR
From Mini-Ion Vacuum Gauge Module:*01_13016-00 CR
NOTE:
In this example, 13016 is the Granville-Phillips internal part number, 00 is the revision. Larger
revision numbers indicate newer versions of firmware.
FAC
Definition:
Set factory default
Example:
From computer: #01FAC CR
From Mini-Ion Vacuum Gauge Module: *01_PROGM_OK CR
NOTES:
This can be used when a Mini-Ion Vacuum Gauge Module is not responding properly.
Cycle power or send RST after doing this function.
FAC will cause default communication and transducer parameters to be programmed:
Base Address = 00
Baud rate = 19200, data format = 8 bits, no parity, 1 stop bit
RS-485 operation
SB
Definition:
Set baud rate
Example:
From computer: #01SB2400 CR
From Mini-Ion Vacuum Gauge Module: *01_PROGM_OK CR
NOTES:
Will continue to operate at old baud rate until power is cycled or RST command is sent.
Max. baud rate is 28000. Allowable baud rates are: 28000, 19200, 14400, 9600, 4800, 2400,
1200, 600, 300.
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Series 343 Mini-Ion Vacuum Gauge Module
January, 2013
3 RS-485 Digital Interface Specifications and Protocol
SPN
Definition:
Set parity to 8 bits, none
Example:
From computer: #01SPN CR
From Mini-Ion Vacuum Gauge Module: *01_PROGM_OK CR
NOTE:
Will continue to operate at old format until power is cycled or RST command is sent.
SPO
Definition:
Set parity to 7 bits, odd
Example:
From computer: #01SPE CR
From Mini-Ion Vacuum Gauge Module: *01_PROGM_OK CR
NOTE:
Will continue to operate at old format until power is cycled or RST command is sent.
SPE
Definition:
Set parity to 7 bits, even
Example:
From computer: #01SPE CR
From Mini-Ion Vacuum Gauge Module: *01_PROGM_OK CR
NOTE:
Same as SPN.
RST
Definition:
Reset module
Example:
From computer: #01RST CR
NOTE:
The RST command will reset the module as if the power had been cycled. RST has no
response. Communication is re-enabled in 2 seconds.
UNL
Definition:
Unlock Interface Speed and Framing Programming
Example:
From computer: #01UNL CR
From Mini-Ion: 01_PROGM_OK_CR
NOTES:
If the UNL command is enabled by the TLU command, the UNL command must be executed
in sequence prior to any of these commands: SB, SPN, SPO and SPE when enabled.
If any of these commands are attempted without the UNL command, a response of 
?01_COM-ERR CR will be generated.
If UNL is not enabled by TLU command, response to UNL will be ?01_SYNTX_ER.
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Series 343 Mini-Ion Vacuum Gauge Module
January, 2013
3 RS-485 Digital Interface Specifications and Protocol
TLU
Definition:
Toggle UNL Function
Example:
From computer: #01TLU CR
From Mini-Ion: *01_1_UL_ON_CR
From computer: #01TLU CR
From Mini-Ion: *01_1_UL_OFF_CR
NOTES:
The TLU command will toggle the state of the UNL function.
When response is UL_ON, then UNL is required to execute SPN, SPO, SPE, or SB functions.
When response is UL_OFF, then UNL is not required and any attempt to execute UNL will
generate a ?01_SYNTX_ER.
TLU programming is non-volatile, the setting selected will remain in effect even if power is
cycled.
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Series 343 Mini-Ion Vacuum Gauge Module
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3 RS-485 Digital Interface Specifications and Protocol
3.3 Receive/Transmit Timing
The speed of the response from the Mini-Ion Vacuum Gauge Module varies depending on the type
of command being carried out. All commands will cause a response to begin in less than 100 msec.
RECEIVED
DATA
TIME
TRANSMITTED
DATA
Receive/Transmit Timing.
Figure 3-1
NOTE: The Mini-Ion Vacuum Gauge Module will shut off its driver 80 sec after
sending data to the host.
Depending on the selected baud rate, there will be an additional delay for the 13 character
response from the Mini-Ion Vacuum Gauge Module, as noted in Table 3-1.
Table 3-1
Baud Rate and Receive, Transmit Time of Response.
Baud Rate
RX and TX Added Response Time
28,800
19,200
9,600
4,800
2,400
1,200
300
3.3 msec
3.9 msec
5.1 msec
7.5 msec
13.0 msec
22.0 msec
79.0 msec
Depending on the command sent, there will be the additional delays noted in Table 3-2.
Table 3-2
Additional Response Time.
Command
Time Added
FAC
105 msec
RD
0 msec
RST
No Response
All other commands
17 msec
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Series 343 Mini-Ion Vacuum Gauge Module
January, 2013
Chapter 4
4
Service and Maintenance
4.1 Service Guidelines
The procedures in this section provide instructions for normal service issues that may be required
during use of the Mini-Ion Vacuum Gauge Module.
Because the Mini-Ion Vacuum Gauge Module contains static-sensitive electronic parts, the
following precautions must be followed when troubleshooting:
• Use a grounded, conductive work surface. Wear a high impedance ground strap for personnel
protection.
• Use conductive or static dissipative envelopes to store or ship static sensitive devices or
printed circuit boards.
• Do not operate the product with static sensitive devices or other components removed from
the product.
• Do not handle static sensitive devices more than absolutely necessary, and only when
wearing a ground strap.
• Use a grounded, electrostatic discharge safe soldering iron.
NOTE: This product has been designed and tested to offer reasonably safe service
provided it is installed, operated, and serviced in strict accordance with these
safety instructions.
The service and repair information in this manual is for the use of Qualified Service Personnel.
To avoid shock, do not perform any procedures in this manual or perform any servicing on this
product unless you are qualified to do so.
Do not substitute parts or modify instrument.
Because of the danger of introducing additional hazards, do not install substitute parts or
perform any unauthorized modification to the product. Return the product to a service facility
designated by Granville−Phillips for service and repair to ensure that safety features are
maintained. Do not use this product if it has unauthorized modifications.
Disconnect this product from all power sources, and refer servicing to Qualified Service Personnel
if any the following conditions exist:
• The gauge cable, power-supply cord, or plug is damaged.
• Liquid has been spilled onto, or objects have fallen into, the product.
• The product has been exposed to rain or water.
• The product does not operate normally even if you have followed the Operation Instructions.
Adjust only those controls that are covered in the instruction manual. Improper adjustment of
other controls may result in damage and require extensive work by a qualified technician to
restore the product to its normal operation.
• The product has been dropped or the enclosure has been damaged.
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Series 343 Mini-Ion Vacuum Gauge Module
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4 Service and Maintenance
• The product exhibits a distinct change in performance. This may indicate a need for service.
Replacement Parts − When replacement parts are required, be certain to use the
replacement parts that are specified by Granville−Phillips, or that have the same
characteristics as the original parts. Unauthorized substitutions may result in fire, electric
shock or other hazards.
Safety Check − Upon completion of any service or repairs to this product, ask the Qualified
Service Person to perform safety checks to determine that the product is in safe operating
order.
Finite Lifetime − After ten years of normal use or even non−use, the electrical insulation in
this product may become less effective at preventing electrical shock. Under certain
environmental conditions which are beyond the manufacturer’s control, some insulation
material may deteriorate sooner. Therefore, periodically inspect all electrical insulation for
cracks, crazing, or other signs of deterioration. Do not use if the electrical insulation has
become unsafe.
If the module must be returned to the factory for service, request a Return Authorization (RA) from
Brooks Automation / Granville-Phillips. Do not return products without first obtaining an RA. In
some cases a hazardous materials document may be required. The Brooks Automation / GranvillePhillips Customer Service Representative will advise you if the hazardous materials document is
required.
When returning equipment to Brooks Automation / Granville-Phillips, be sure to package the
products to prevent shipping damage. Circuit boards and modules separated from the controller
chassis must be handled using proper anti-static protection methods and must be packaged in antistatic packaging. Brooks Automation / Granville-Phillips will supply return packaging materials at no
charge upon request. Shipping damage on returned products as a result of inadequate packaging is
the Buyer's responsibility. Before you return the module, obtain an RA number by contacting
Granville-Phillips customer service:
• Phone 1-303-652-4400 or 1-800-776-6543 within the USA.
• Phone 1-800-367-4887 24 hours per day, seven days per week within the USA.
• Email co-csr@brooks.com
• For Global Customer Support, go to www.brooks.com, click on Service & Support, then click on
Global Service and Repair Centers to locate the Brooks Automation office nearest you.
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4 Service and Maintenance
4.2 Troubleshooting
The problems presented in Table 4-1 are followed by possible causes and corrective actions.
High voltage is present inside the Mini−Ion Vacuum Gauge Module.
Table 4-1
General Symptoms/Possible Causes.
Symptom
Possible Causes
Unit does not respond to RS485 communication from a
host, but the Power Indicator
lights.
The I/O connector may be wired incorrectly.
Reverse the RS485 (+) and (-) connections.
No bias resistors. 
Bias resistors are missing. Refer to Section 2.2 I/O Cable Connections.
Address rotary switch set to incorrect address position.
Set the switch in the correct address position.
Incorrect baud rate or data format programmed.
Refer to Section 4.4 Mini-Ion Vacuum Gauge (with Digital Interface) Module
Initialization.
Power indicator does not
light.
Power supply disconnected, off, or inadequate for load.
A switching supply may shut down from the current surge upon power up. If a
switching power supply is used, size current limit to two times working load. Refer
to Table 1-1.
The I/O connector may be wired incorrectly.
Refer to Section 2.2 I/O Cable Connections.
Blown fuse. 
This could be caused by wrong wiring or low power supply voltage. Replace the
fuse with a 1 ampere, slow blow Littlefuse 229001, G-P P/N 012084. Refer to
Section 4.6 Fuse Replacement on page 4-38.
Mini-Ion Vacuum Gauge
Module will not stay on
(always reads 9.99e+09,
response to IGS always 0).
Fault condition indicated by reading response to RS. 
Refer to the RS command on Section 3.2 Command Syntax.
Inaccurate pressure reading.
Organic seals. 
If the Mini-Ion Vacuum Gauge Module connection to the vacuum system is sealed
with an organic O-ring the gauge will not read accurately below 1e-7 Torr.
Replace O-ring with a metal seal.
Mechanical damage. 
If the unit is dropped or excessive force is applied to the vacuum connection
during installation, gauge elements my be damaged or pin leaks may occur. Refer
to Section 4.3 Mini-Ion Vacuum Gauge Module Ion Gauge Continuity Test on
page 4-34.
Contamination. 
Pump oil and other organic compounds or metal coating from a sputtering
process can cause electrical current leakage between Mini-Ion Vacuum Gauge
Module elements. 
Degas the Mini-Ion Vacuum Gauge Module by executing the DG command.
Several degas cycles may be required to clean up the Mini-Ion Vacuum Gauge
Module. 
If this does not work, the gauge may be heated externally with the electronics
module removed.
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4 Service and Maintenance
Symptom
Possible Causes
Process control setpoint
does not function as
expected.
The I/O connector may be wired incorrectly. 
Refer to Section 2.2 I/O Cable Connections.
Wrong setpoint values programmed. 
Read SL+ and SL- data. If returned values are wrong, program SL+ and SL- with
proper values.
NOTE: The process control setpoint will always have the COMMON contact
connected to the N.C. contact when the Mini-Ion Vacuum Gauge Module is OFF
or when the unit is not powered.
4.3 Mini-Ion Vacuum Gauge Module Ion Gauge Continuity Test
To prevent electrical shock, turn OFF electrical power before servicing the Mini−Ion
Vacuum Gauge Module. Do not touch any gauge pins while the gauge tube is under vacuum
or connected to a controller.
This test should only be performed while the ion gauge is exposed to atmospheric pressure and the
Mini-Ion Vacuum Gauge Module electronics is removed from the gauge. If a problem with pressure
measurement is traced to the Mini-Ion Vacuum Gauge Module, the gauge may be tested with an
ohm meter. This test can detect open filaments or shorts between gauge elements. This test may not
detect inaccurate pressure measurement due to gauge contamination or vacuum leaks.
1.
Turn OFF power to the module.
2.
Remove the I/O connector from the module.
3.
Remove the Mini-Ion Vacuum Gauge Module from the vacuum system.
4.
Remove the four Phillips head screws from the gauge collar plate as shown in Figure 4-1.
Phillips Head Screws (4)
Flange
Gauge Collar Plate
Alignment Notch
Gauge Pins
Alignment Notch
Mini-Ion Module Electronics
TORR
Figure 4-1
Mini-Ion Vacuum Gauge Module Removal.
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4 Service and Maintenance
5.
While holding the flange, gently pull the Mini-Ion Vacuum Gauge Module away from the
gauge collar plate as shown in Figure 4-1. The gauge tube and plate will disconnect from the
module.
6.
Using a digital multimeter, measure the resistance of the filament between filament pins as
shown in Figure 4-2. The reading should be approximately 0.2 
Collector
Filament
(0.2 )
Figure 4-2
Grid
Mini-Ion Vacuum Gauge Module Pin Identification.
7.
Measure the resistance of filament pins to any other pin or gauge case as shown in Figure 4-2.
The reading should be infinity.
8.
Measure the resistance of Grid pins to any other pin or gauge case as shown in Figure 4-2. The
reading should be infinity.
9.
Measure the resistance of Collector pin to any other pin or gauge case as shown in Figure 4-2.
The reading should be infinity.
NOTE: If the readings obtained during this procedure are not within the values
specified, the gauge should be replaced. Contact Granville-Phillips Customer
Service to order a replacement gauge.
10.
Once the replacement Mini-Ion Vacuum Gauge Module has been received, refer to Section
4.7 Mini-Ion Vacuum Gauge Module Replacement on page 4-39 to install the gauge.
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4 Service and Maintenance
4.4 Mini-Ion Vacuum Gauge (with Digital Interface) Module Initialization
The Mini-Ion Vacuum Gauge Module may have been set to incorrect communication parameters
which may cause communication problems. When these problems occur, the Mini-Ion Vacuum
Gauge Module communication parameters should be initialized to the factory set default values
listed in Table 4-2.
Table 4-2
Mini-Ion Vacuum Gauge Module Default Communication Parameters.
Parameter
Default Value
Baud Rate
19,200
Data Format
8 bits
Parity
None
Stop Bits
1
4.4.1 Initialization
Use the following procedure to initialize the Mini-Ion Vacuum Gauge Module.
To prevent electrical shock, shut down electrical power before servicing the Mini−Ion Vacuum
Gauge Module.
1.
Turn OFF power to the module.
2.
Disconnect the I/O cable from the connector.
3.
Remove the I/O cable connector jack posts from the connector.
4.
Remove the four screws from the Mini-Ion Vacuum Gauge Module top cover and remove the
cover.
Make sure the jumper is only installed between the pins shown in Figure 4−3. Otherwise,
damage to the Mini−Ion Vacuum Gauge Module may occur.
5.
Connect a jumper wire to the pins as shown in Figure 4-3.
Install Jumper
Figure 4-3
Jumper Installation Location (Cover Removed).
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Series 343 Mini-Ion Vacuum Gauge Module
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4 Service and Maintenance
6.
Reconnect the I/O cable.
7.
Turn ON power to the Mini-Ion Vacuum Gauge Module. The Mini-Ion Vacuum Gauge Module
will initialize to the parameters in Table 4-2 on page 4-36.
NOTE: The Mini-Ion Vacuum Gauge Module will not read pressure while the
jumper is installed.
8.
Make sure the address rotary switch on the Mini-Ion Vacuum Gauge Module is set to the
correct address position.
9.
From the host computer, send the following commands to the Mini-Ion Vacuum Gauge
Module:
a.
Enter the #XX command. 
Where XX depends upon the switch position.
Enter the FAC command.
The Mini-Ion Vacuum Gauge Module should respond with *0X_PROGM_OK which indicates
it is communicating properly with the host computer.
b.
10.
Turn OFF power to the Mini-Ion Vacuum Gauge Module.
11.
Remove the jumper.
12.
Disconnect the I/O cable from the connector.
13.
Install the Mini-Ion Vacuum Gauge Module top cover with the previously removed four
screws.
14.
Install the I/O cable connector jack posts on the connector.
15.
Connect the I/O cable to the connector.
16.
Turn ON power to the Mini-Ion Vacuum Gauge Module. It is now ready to be used.
4.5 Degas Cycle
Pump oil, other organic compounds, or metal coatings from a sputtering process can cause
electrical current leakage between the ion gauge tube elements. When contamination occurs,
system base pressure readings may begin to rise which is an indication that a degas cycle will have
to performed.
Once initiated, the degas cycle will apply approximately 4 watts of power to the ion gauge for two
minutes and turn OFF automatically.
NOTE: Depending upon the level of contamination, several degas cycles may be
required to remove the contamination from the ion gauge tube.
Use the appropriate procedure to remove contamination from the ion gauge tube for the digital or
analog interface Mini-Ion Vacuum Gauge Module.
4.5.1 Digital Interface
1.
Turn ON the Mini-Ion Vacuum Gauge Module.
2.
Enter the DG command at the host computer to start a degas cycle on the Mini-Ion Vacuum
Gauge Module as follows:
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Series 343 Mini-Ion Vacuum Gauge Module
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4 Service and Maintenance
a.
Enter #01DG1 to initiate a degas cycle.
Enter #01DG0 to abort a degas cycle.
The Mini-Ion Vacuum Gauge Module should respond with *01_PROGM_OK.
b.
3.
Once the degas cycle is complete, check the system base pressure reading again. If the reading
is still high, repeat this procedure until the system base pressure is within its normal range.
4.6 Fuse Replacement
Use the following procedure to replace the fuse in the Mini-Ion Vacuum Gauge Module.
To prevent electrical shock, turn OFF electrical power before servicing the Mini−Ion
Vacuum Gauge Module.
1.
Turn OFF power to the Mini-Ion Vacuum Gauge Module.
2.
Disconnect the I/O cable from the connector.
3.
Remove the I/O cable connector jack posts from the connector.
4.
Remove the four screws from the Mini-Ion Vacuum Gauge Module top cover and remove the
cover.
5.
Locate the defective fuse as shown in Figure 4-4 and replace it with a new 1 amp, slow blow
fuse.
1 Amp, Slow Blow Fuse
Littlefuse 229001, G-P P/N 012084
Figure 4-4
Position of 1 Amp, Slow Blow Fuse.
6.
Install the Mini-Ion Vacuum Gauge Module top cover with the previously removed four
screws.
7.
Install the I/O cable connector jack posts on the connector.
8.
Connect the I/O cable to the connector.
9.
Turn ON power to the Mini-Ion Vacuum Gauge Module. It is now ready to be used.
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4 Service and Maintenance
4.7 Mini-Ion Vacuum Gauge Module Replacement
To prevent electrical shock, shut down electrical power before servicing the Mini−Ion Vacuum
Gauge Module. Do not touch any gauge pins while the gauge tube is under vacuum or
connected to a controller.
1.
Turn OFF power to the Mini-Ion Vacuum Gauge Module.
2.
Remove the Input/Output connector from the module.
3.
Remove the Mini-Ion Vacuum Gauge Module from the vacuum system.
4.
Remove the four Phillips-head screws from the gauge collar plate as shown in Figure 4-5.
5.
While holding the flange, gently pull the Mini-Ion Vacuum Gauge Module away from the
gauge collar plate as shown in Figure 4-5. The gauge tube and plate will disconnect from the
module.
6.
Align the notches on the replacement gauge collar plate and the Mini-Ion Vacuum Gauge
Module as shown in Figure 4-5.
7.
Gently insert the replacement gauge and collar plate into the Mini-Ion Vacuum Gauge Module
until the tube pins are inserted into the tube socket.
8.
Insert and tighten all four Phillips-head screws.
9.
Install the Mini-Ion Vacuum Gauge Module to the vacuum system.
10.
Connect the Input/Output connector to the Mini-Ion Vacuum Gauge Module.
11.
Turn ON power and verify communication to the Mini-Ion Vacuum Gauge Module.
Phillips Head Screws (4)
Flange
Gauge Collar Plate
Alignment Notch
Gauge Pins
Alignment Notch
Mini-Ion Module Electronics
Figure 4-5
Mini-Ion Vacuum Gauge Module Replacement.
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January, 2013
4 Service and Maintenance
NOTES:
40
Series 343 Mini-Ion Vacuum Gauge Module
January, 2013
.
Series 343
Granville-Phillips® Mini-Ion® Vacuum Gauge
Module with RS-485 Digital Interface
Customer Service/Support
For customer service within USA, 8 AM to 5 PM
Mountain Time Zone, weekdays excluding holidays:
Granville-Phillips
6450 Dry Creek Parkway
Longmont, CO 80503 USA
Phone:
+1-800-776-6543
Phone:
+1-303-652-4400
FAX:
+1-303-652-2844
Email:
co-csr@brooks.com
Brooks Automation, Inc.
15 Elizabeth Drive
Chelmsford, MA 01824 USA
Phone:
+1-978-262-2400
For customer service, 24 hours per day, 7 days per week,
every day of the year including holidays within the USA:
Phone: +1-800-367-4887
www.brooks.com
Instruction Manual
Instruction manual part number 343050
Revision 101 - January 2013