ALTA Mass Flow Controllers Flow

ALTA Mass Flow Controllers Flow
W W W . M K S I N S T . C O M
Flow Solutions
ALTA™ Mass Flow
Controllers
METAL-SEALED TYPE 1480A
The all-digital MKS ALTA Mass Flow Controller (MFC) includes technology improvements
in functionality and performance to help users in semiconductor and high purity thin-film
applications increase tool throughput and reduce overall system costs. To increase overall
system throughput, the ALTA MFC features fast gas settling times to meet the productivity
demands of next generation process tools. To facilitate better chamber matching, the ALTA
features improved accuracy to 1% of set point.
Cost savings to users are seen through several innovative enhancements. To reduce the
number of MFCs in inventory, users can recall specific MFC gas calibrations and flow
ranges from up to 20 stored gas tables, configuring the ALTA MFC right off the shelf. The
ALTA represents MKS’ ongoing dedication to helping customers increase productivity while
reducing system costs.
Features & Benefits
Increases Throughput and Performance
• Reduces process cycle times due to fast gas settling times
• Enables better chamber matching through increased MFC accuracy
• Increases tool uptime through reduction on “No Problem Found” MFC replace-
ments
— DeviceNet™ versions include embedded diagnostics software that allows users to check MFC function-
ality without removing the MFC
US Patent No. 5,314,164, 5,461,913
Foreign Patents, Patents Pending
Reduces Overall Costs
• Reduces MFC inventory through multi-
gas, multi-range capability
• DeviceNet configuration significantly reduces MFC cabling
• Open standard DeviceNet protocol provides accessibility to key MFC functions, including flow totalizer and selected trip points
Where Technology Meets Production
As a technology leader in MFCs, the ALTA represents what
users want most – cost effective technology and innovation
that meets their production needs and is easy to use.
To enable ease of integration into next generation
or existing process tools, a variety of mechanical
configurations exist, including surface mount and VCR®.
Coupled with its compact size, the ALTA MFC provides
an ideal way to migrate from existing analog MFCs
where reducing MFC inventory and improving process
repeatability are important.
To ensure that customers can easily use the ALTA MFC,
the ALTA gas tables can be configured electronically by the
customer to meet specific application requirements. For
DeviceNet™ configurations, this is performed through the
DeviceNet protocols. On analog I/O versions, these gas
tables are modified through a separate port using an MKS
interface installed on a laptop computer.
Our award winning manufacturing facility is well versed
in producing high quality MFCs to meet the demands
of critical ultra-high purity applications. ALTA MFCs are
manufactured in our Class 100 cleanroom, in accordance
with ISO 9001 procedures. With short lead times to
accomodate your ever changing delivery schedules, the
Afraid of MFC downtime? Reliability has also been
ALTA MFC meets your business requirements as well as
designed into the ALTA. Proven through rigorous stressed
your technical specifications. Designed with production
life (STRIFE) testing, the ALTA is indeed a productionrequirements in mind, the ALTA MFC offers process
worthy MFC.
reliability and gas selection flexibility for all your gas
delivery applications.
Figure 1 —
Figure 2 —
ALTA User Interface Screen illustrating multi-gas and multi-flow capabilities
ALTA Data Acquisition and Control Mode
Specifications
Electrical
Analog I/O
Input Voltage Required
Max. current at start-up (first 5 sec)
Typical current at steady state
Set Point Command Signal
Output Signal
Output Impedance
Connectors
Digital I/O
DeviceNet
Data Rate/Network Length
Level of Filtering Digital Functions
Data Rate Switch
MAC ID Switches
Input Power
Network Size
Network Topology
Visual Communication Indicators
Profibus®
Electromagnetic Compatibility
± 15 VDC (± 5%) @ 350 mA
± 15 VDC (± 5%) @ 250 mA
24 VDC (nominal) @ 300 mA (available on special basis)
0 to 5 VDC
0 to 5 VDC <1Ω
9-pin or 15-pin Type “D”
Data Rate (user selectable)
125 Kbps, 500 m (1,640 ft.)
250 Kbps, 250 m (820 ft.)
500 Kbps, 100m (328 ft.)
User software adjustable
Select units: counts, slm, sccm, % of F.S. Remote Zero
Set/read flow rate
Up to 20 gas calibration tables with gas correction factors and up to 21 points per table
Flow totalizer and run hours
Valve soft start
Monitor MFC status - valve drive level and trip points
Reset factory defaults
Report run time hours
Change user tags and device address
Device Identification Storage includes manufacturer information, model and serial number, original factory calibration, software and hardware revision numbers.
4 positions: 125, 250, 500K, PGM (programmable over the network)
2 switches, 10 positions; 0,0 to 6,3 are hardware ID numbers; 7,0 to 9,9 are software ID numbers (6,4 to 6,9 are unused and, if selected will default to hardware ID number 6,3)
11 to 25 VDC per DeviceNet specification (@ <6 watts)
Up to 64 nodes
Linear (trunkline/dropline) power and signal on same network cable
LED network status (green/red)
LED module status (green/red)
CE Compliant to EMC Directive 2004/108/EC
Specifications
Performance
Full Scale Ranges (N2 equivalent)
10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000, 30000 sccm*
Maximum Inlet Pressure
150 psig
Normal Operating Pressure Differential
(with atmospheric pressure at the MFC outlet)
10 to 5000 sccm
10 to 40 psid
10000 to 30000 sccm
15 to 40 psid
Proof Pressure
1000 psig
Control Range
2% to 100% of F.S.
Accuracy (Per SEMI E17-56)
± 1% of Setpoint for 20 to 100% F.S
(calibration gas)
0.2% of F.S. for < 20% F.S
Repeatability
0.2% of Reading
Resolution
0.1% of F.S.
Temperature Coefficients
Zero
< 0.05% of F.S./°C
Span
< 0.08% of Rdg./°C
Inlet Pressure Coefficient
< 0.02% of Rdg./psi
Typical Controller Settling Time < 1 sec typical above 10% F.S.
(per SEMI Guideline E17-91)
Warm-up Time
< 30 min
(to within 0.2% of F.S. of steady state performance)
Normal Operating Temperature Range
10°C to 45°C
Storage Humidity
0 to 95% Relative Humidity, non-condensing
Storage Temperature
-20° to 65°C (-4° to 149° F)
Mechanical
Fittings (compatible with)Swagelok® 4 VCR®, 1-1/2” surface mount, 1/4” Swagelok
Leak Integrity
External (scc/sec He)
< 1 x 10-10
Through closed valve
< 1.0% of F.S. at 40 psig inlet to atmosphere
(To assure no flow-through, a separate positive shut-off valve is required.)
Wetted Materials
Standard
316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., nickel, KM-45
Valve Seat
Kel-F® plug 50 sccm and below, Teflon® valve plug 100 sccm and above Surface Finish
10µ inch average Ra (1480A)
Weight
less than 2 lbs (0.9kg)
Valve Type Normally Closed
Normally Open
*For Normally Open Valve, Full Scale ranges include all ≥ 100 sccm (N2 equivalent)
Dimensional Drawings & PinOuts
Dimensional Drawing
and PinOuts — 1480A
DeviceNet™ Version
Note: Unless otherwise specified,
dimensions are nominal values in inches
(mm referenced).
Dimensional Drawing and
PinOuts — 1480A Analog
Version, 15 Pin D
(MKS and Alternate)
Note: Unless otherwise specified,
dimensions are nominal values in inches
(mm referenced).
Dimensional Drawings & Pinouts
Dimensional Drawing and PinOuts —
1480A Analog Version, 9 Pin D
Note: Unless otherwise specified, dimensions are nominal
values in inches (mm referenced).
Dimensional Drawings & PinOuts
Dimensional Drawing and PinOuts — 1480A DownMount Version
Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced).
Ordering Information
SEMI Gas Codes
Ordering Code Example: 1480A00411CR16M12
Code
Configuration
1480A
Type 1480A ALTA Mass Controller (10µin)
1480A
Gas To Be Calibrated For: (SEMI Gas Code) See table for additional options
Helium
001
Argon
004
Hydrogen
007
004
Nitrogen
013
Oxygen
015
Flow Rate To Be Calibrated For SCCM (Maximum 30000 SCCM N2 Equivalent)
10 sccm
11C
20 sccm
21C
50 sccm
51C
100 sccm
12C
200 sccm
22C
500 sccm
52C
11C
1000 sccm
13C
2000 sccm
23C
5000 sccm
53C
10000 sccm
14C
20000 sccm 24C
30000 sccm
34C
Fittings (compatible with)
Swagelok 4 VCR Male
¼” Swagelok C-seal W-seal R
S
R
C
H
Valve
Normally Closed
Normally Open - ≥100 sccm N2 1
1
2
Connector
9-pin Type D
A
15-pin Type D B
6
Profibus® (available with Normally Closed Valve only)
4
DeviceNet™6
Seal Materials
Metal with Kel-F plug 50 sccm and below,
M
M
Teflon valve plug 100 sccm and above
Firmware Version
DeviceNet
Normally Closed
12
Normally Open
13
12
Profibus
Normally Closed
14
Unless otherwise specified, MKS will ship firmware
XX
revision current to date of order
Optional Accessories
ALTA Digital Software User Interface Kit (single license)
- Analog I/O version with parallel port PC use*
133730-G2
- Analog I/O version with USB port PC use*
133730-G1
- DeviceNet version with parallel port PC use**
133900-G2
- DeviceNet version with USB port PC use**
133900-G1
- Profibus I/O version with parallel port PC use**
1001067-001
- Profibus I/O version with USB port PC use**
1001077-001
*Kits include PC converter assembly cable and RS-232 PC extension cable.
**Customer must supply DNET/Profibus interface cards, hardware, and cables.
Replacement Parallel Port Key
133897-G2
Replacement USB Port Key
133897-G1
Cabling for 1480A
Cable for use with MKS 246/247 electronics to digital ALTA 15 pin D
CB1480-1-XX
with analog I/O interface; (where XX is desired length in feet)
RS232 PC extension cable 10 ft long (included in kits 133730)
095-103377
RS232 converter assembly cable for use with Digital ALTA MFC with analog I/O 134566-G1
interface and PC (included in kits 133730)
1480 - 11/15
© 2006 MKS Instruments, Inc.
All rights reserved.
MKS Instruments, Inc.
Global Headquarters
MKS Instruments, Inc.
Flow Solutions
2 Tech Drive, Suite 201
Andover, MA 01810
Six Shattuck Road
Andover, MA 01810
Tel:978.645.5500
Tel: 800.227.8766 (in U.S.A.)
Web:www.mksinst.com
Tel:978.975.2350
MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited.
Specifications are subject to change without notice. mksinst™ and ALTA™ are trademarks of MKS Instruments, Inc., Andover,
MA. Teflon® is a registered trademark of E.I. Dupont Co., Inc., Wilmington, DE. Swagelok® and VCR® are registered trademarks
of Swagelok Marketing Co., Solon, OH. Kel-F® is a registered trademark of 3M Company, Minneapolis, MN. DeviceNetTM is
a trademark of the Open DeviceNet Vendor Association, Coral Springs, FL. Profibus® is a registered trademark of Profibus
Organization.
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