W W W . M K S I N S T . C O M Flow Solutions ALTA™ Mass Flow Controllers METAL-SEALED TYPE 1480A The all-digital MKS ALTA Mass Flow Controller (MFC) includes technology improvements in functionality and performance to help users in semiconductor and high purity thin-film applications increase tool throughput and reduce overall system costs. To increase overall system throughput, the ALTA MFC features fast gas settling times to meet the productivity demands of next generation process tools. To facilitate better chamber matching, the ALTA features improved accuracy to 1% of set point. Cost savings to users are seen through several innovative enhancements. To reduce the number of MFCs in inventory, users can recall specific MFC gas calibrations and flow ranges from up to 20 stored gas tables, configuring the ALTA MFC right off the shelf. The ALTA represents MKS’ ongoing dedication to helping customers increase productivity while reducing system costs. Features & Benefits Increases Throughput and Performance • Reduces process cycle times due to fast gas settling times • Enables better chamber matching through increased MFC accuracy • Increases tool uptime through reduction on “No Problem Found” MFC replace- ments — DeviceNet™ versions include embedded diagnostics software that allows users to check MFC function- ality without removing the MFC US Patent No. 5,314,164, 5,461,913 Foreign Patents, Patents Pending Reduces Overall Costs • Reduces MFC inventory through multi- gas, multi-range capability • DeviceNet configuration significantly reduces MFC cabling • Open standard DeviceNet protocol provides accessibility to key MFC functions, including flow totalizer and selected trip points Where Technology Meets Production As a technology leader in MFCs, the ALTA represents what users want most – cost effective technology and innovation that meets their production needs and is easy to use. To enable ease of integration into next generation or existing process tools, a variety of mechanical configurations exist, including surface mount and VCR®. Coupled with its compact size, the ALTA MFC provides an ideal way to migrate from existing analog MFCs where reducing MFC inventory and improving process repeatability are important. To ensure that customers can easily use the ALTA MFC, the ALTA gas tables can be configured electronically by the customer to meet specific application requirements. For DeviceNet™ configurations, this is performed through the DeviceNet protocols. On analog I/O versions, these gas tables are modified through a separate port using an MKS interface installed on a laptop computer. Our award winning manufacturing facility is well versed in producing high quality MFCs to meet the demands of critical ultra-high purity applications. ALTA MFCs are manufactured in our Class 100 cleanroom, in accordance with ISO 9001 procedures. With short lead times to accomodate your ever changing delivery schedules, the Afraid of MFC downtime? Reliability has also been ALTA MFC meets your business requirements as well as designed into the ALTA. Proven through rigorous stressed your technical specifications. Designed with production life (STRIFE) testing, the ALTA is indeed a productionrequirements in mind, the ALTA MFC offers process worthy MFC. reliability and gas selection flexibility for all your gas delivery applications. Figure 1 — Figure 2 — ALTA User Interface Screen illustrating multi-gas and multi-flow capabilities ALTA Data Acquisition and Control Mode Specifications Electrical Analog I/O Input Voltage Required Max. current at start-up (first 5 sec) Typical current at steady state Set Point Command Signal Output Signal Output Impedance Connectors Digital I/O DeviceNet Data Rate/Network Length Level of Filtering Digital Functions Data Rate Switch MAC ID Switches Input Power Network Size Network Topology Visual Communication Indicators Profibus® Electromagnetic Compatibility ± 15 VDC (± 5%) @ 350 mA ± 15 VDC (± 5%) @ 250 mA 24 VDC (nominal) @ 300 mA (available on special basis) 0 to 5 VDC 0 to 5 VDC <1Ω 9-pin or 15-pin Type “D” Data Rate (user selectable) 125 Kbps, 500 m (1,640 ft.) 250 Kbps, 250 m (820 ft.) 500 Kbps, 100m (328 ft.) User software adjustable Select units: counts, slm, sccm, % of F.S. Remote Zero Set/read flow rate Up to 20 gas calibration tables with gas correction factors and up to 21 points per table Flow totalizer and run hours Valve soft start Monitor MFC status - valve drive level and trip points Reset factory defaults Report run time hours Change user tags and device address Device Identification Storage includes manufacturer information, model and serial number, original factory calibration, software and hardware revision numbers. 4 positions: 125, 250, 500K, PGM (programmable over the network) 2 switches, 10 positions; 0,0 to 6,3 are hardware ID numbers; 7,0 to 9,9 are software ID numbers (6,4 to 6,9 are unused and, if selected will default to hardware ID number 6,3) 11 to 25 VDC per DeviceNet specification (@ <6 watts) Up to 64 nodes Linear (trunkline/dropline) power and signal on same network cable LED network status (green/red) LED module status (green/red) CE Compliant to EMC Directive 2004/108/EC Specifications Performance Full Scale Ranges (N2 equivalent) 10, 20, 50, 100, 200, 500, 1000, 2000, 5000, 10000, 20000, 30000 sccm* Maximum Inlet Pressure 150 psig Normal Operating Pressure Differential (with atmospheric pressure at the MFC outlet) 10 to 5000 sccm 10 to 40 psid 10000 to 30000 sccm 15 to 40 psid Proof Pressure 1000 psig Control Range 2% to 100% of F.S. Accuracy (Per SEMI E17-56) ± 1% of Setpoint for 20 to 100% F.S (calibration gas) 0.2% of F.S. for < 20% F.S Repeatability 0.2% of Reading Resolution 0.1% of F.S. Temperature Coefficients Zero < 0.05% of F.S./°C Span < 0.08% of Rdg./°C Inlet Pressure Coefficient < 0.02% of Rdg./psi Typical Controller Settling Time < 1 sec typical above 10% F.S. (per SEMI Guideline E17-91) Warm-up Time < 30 min (to within 0.2% of F.S. of steady state performance) Normal Operating Temperature Range 10°C to 45°C Storage Humidity 0 to 95% Relative Humidity, non-condensing Storage Temperature -20° to 65°C (-4° to 149° F) Mechanical Fittings (compatible with)Swagelok® 4 VCR®, 1-1/2” surface mount, 1/4” Swagelok Leak Integrity External (scc/sec He) < 1 x 10-10 Through closed valve < 1.0% of F.S. at 40 psig inlet to atmosphere (To assure no flow-through, a separate positive shut-off valve is required.) Wetted Materials Standard 316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality), 316 S.S., nickel, KM-45 Valve Seat Kel-F® plug 50 sccm and below, Teflon® valve plug 100 sccm and above Surface Finish 10µ inch average Ra (1480A) Weight less than 2 lbs (0.9kg) Valve Type Normally Closed Normally Open *For Normally Open Valve, Full Scale ranges include all ≥ 100 sccm (N2 equivalent) Dimensional Drawings & PinOuts Dimensional Drawing and PinOuts — 1480A DeviceNet™ Version Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). Dimensional Drawing and PinOuts — 1480A Analog Version, 15 Pin D (MKS and Alternate) Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). Dimensional Drawings & Pinouts Dimensional Drawing and PinOuts — 1480A Analog Version, 9 Pin D Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). Dimensional Drawings & PinOuts Dimensional Drawing and PinOuts — 1480A DownMount Version Note: Unless otherwise specified, dimensions are nominal values in inches (mm referenced). Ordering Information SEMI Gas Codes Ordering Code Example: 1480A00411CR16M12 Code Configuration 1480A Type 1480A ALTA Mass Controller (10µin) 1480A Gas To Be Calibrated For: (SEMI Gas Code) See table for additional options Helium 001 Argon 004 Hydrogen 007 004 Nitrogen 013 Oxygen 015 Flow Rate To Be Calibrated For SCCM (Maximum 30000 SCCM N2 Equivalent) 10 sccm 11C 20 sccm 21C 50 sccm 51C 100 sccm 12C 200 sccm 22C 500 sccm 52C 11C 1000 sccm 13C 2000 sccm 23C 5000 sccm 53C 10000 sccm 14C 20000 sccm 24C 30000 sccm 34C Fittings (compatible with) Swagelok 4 VCR Male ¼” Swagelok C-seal W-seal R S R C H Valve Normally Closed Normally Open - ≥100 sccm N2 1 1 2 Connector 9-pin Type D A 15-pin Type D B 6 Profibus® (available with Normally Closed Valve only) 4 DeviceNet™6 Seal Materials Metal with Kel-F plug 50 sccm and below, M M Teflon valve plug 100 sccm and above Firmware Version DeviceNet Normally Closed 12 Normally Open 13 12 Profibus Normally Closed 14 Unless otherwise specified, MKS will ship firmware XX revision current to date of order Optional Accessories ALTA Digital Software User Interface Kit (single license) - Analog I/O version with parallel port PC use* 133730-G2 - Analog I/O version with USB port PC use* 133730-G1 - DeviceNet version with parallel port PC use** 133900-G2 - DeviceNet version with USB port PC use** 133900-G1 - Profibus I/O version with parallel port PC use** 1001067-001 - Profibus I/O version with USB port PC use** 1001077-001 *Kits include PC converter assembly cable and RS-232 PC extension cable. **Customer must supply DNET/Profibus interface cards, hardware, and cables. Replacement Parallel Port Key 133897-G2 Replacement USB Port Key 133897-G1 Cabling for 1480A Cable for use with MKS 246/247 electronics to digital ALTA 15 pin D CB1480-1-XX with analog I/O interface; (where XX is desired length in feet) RS232 PC extension cable 10 ft long (included in kits 133730) 095-103377 RS232 converter assembly cable for use with Digital ALTA MFC with analog I/O 134566-G1 interface and PC (included in kits 133730) 1480 - 11/15 © 2006 MKS Instruments, Inc. All rights reserved. MKS Instruments, Inc. Global Headquarters MKS Instruments, Inc. Flow Solutions 2 Tech Drive, Suite 201 Andover, MA 01810 Six Shattuck Road Andover, MA 01810 Tel:978.645.5500 Tel: 800.227.8766 (in U.S.A.) Web:www.mksinst.com Tel:978.975.2350 MKS products provided subject to the US Export Regulations. Diversion or transfer contrary to US law is prohibited. Specifications are subject to change without notice. mksinst™ and ALTA™ are trademarks of MKS Instruments, Inc., Andover, MA. Teflon® is a registered trademark of E.I. Dupont Co., Inc., Wilmington, DE. Swagelok® and VCR® are registered trademarks of Swagelok Marketing Co., Solon, OH. Kel-F® is a registered trademark of 3M Company, Minneapolis, MN. DeviceNetTM is a trademark of the Open DeviceNet Vendor Association, Coral Springs, FL. Profibus® is a registered trademark of Profibus Organization.
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