Omega FMA6500 Series User's Guide
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User’s Guide
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FMA6500
Mass Flow Controller
OMEGAnet ® Online Service Internet e-mail www.omega.com [email protected]
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ISO 9001 Certified
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M44 5BD United Kingdom
Tel: +44 (0)161 777 6611
Toll Free in United Kingdom: 0800-488-48 FAX: +44 (0)161 777 6622 e-mail: [email protected]
It is the policy of OMEGA to comply with all worldwide safety and EMC/EMI regulations that apply. OMEGA is constantly pursuing certification of its products to the European New Approach
Directives. OMEGA will add the CE mark to every appropriate device upon certification.
The information contained in this document is believed to be correct, but OMEGA Engineering, Inc. accepts no liability for any errors it contains, and reserves the right to alter specifications without notice.
WARNING: These products are not designed for use in, and should not be used for, patient-connected applications.
TABLE OF CONTENTS
1.1 Inspect Package for External Damage..............................................
1
1.3 Returning Merchandise for Repair.....................................................
1
2.1 Primary Gas Connections.................................................................
1
2.2 Electrical Connections......................................................................
2
2.3 Communication Parameters and Connections................................
2
3. PRINCIPLE OF OPERATION..................................................
6
4.1 FMA6500 Mass Flow Controllers.....................................................
7
4.2 CE Compliance................................................................................
8
5.1 Preparation and Warm Up................................................................
11
5.4 Set Point Reference Signal .............................................................
12
5.5 Valve OFF Control ..........................................................................
12
5.6 Valve Open/Purge ............................................................................
12
6.2.1 Restrictor Flow Element (RFE)................................................. 14
6.2.4 Valve Maintenance ...................................................................
15
8.3 Troubleshooting Guide....................................................................
18
APPENDIX 1 COMPONENT DIAGRAM......................................................
21
APPENDIX 2 GAS FACTOR TABLE ("K" FACTORS).....................................
25
APPENDIX 3 DIMENSIONAL DRAWINGS..................................................
29
APPENDIX 4 SENDING COMMANDS TO THE FMA6500...............................
APPENDIX 5 EEPROM TABLES: GAS DEPENDENT VARIABLES....................
APPENDIX 6 WARRANTY...........................................................................
42
TRADEMARKS
Omega ®
Buna ®
-is a registered trademark of OMEGA ENGINEERING, INC.
-is a registered trademark of DuPont Dow Elastometers.
Kalrez ® -is a registered trademark of DuPont Dow Elastomers.
Neoprene ® -is a registered trademark of DuPont.
1. UNPACKING THE MASS FLOW CONTROLLER
1.1 Inspect Package for External Damage
Your FMA6500 Mass Flow Controller was carefully packed in a sturdy cardboard carton, with anti-static cushioning materials to withstand shipping shock. Upon receipt, inspect the package for possible external damage. In case of external damage to the package contact the shipping company immediately.
1.2 Unpack the Mass Flow Controller
Open the carton carefully from the top and inspect for any sign of concealed shipping damage. In addition to contacting the shipping carrier please forward a copy of any damage report to Omega 7 directly.
When unpacking the instrument please make sure that you have all the items indicated on the Packing List. Please report any shortages promptly.
1.3
Returning Merchandise for Repair
Please contact an OMEGA 7 customer service representative and request a
Return Authorization Number (AR).
It is mandatory that any equipment returned for servicing be purged and neutralized of any dangerous contents including but not limited to toxic, bacterially infectious, corrosive or radioactive substances.
2.
2.1
INSTALLATION
Primary Gas Connections
Please note that the FMA6500 Mass Flow Controller will not operate with liquids.
Only clean gases are allowed to be introduced into the instrument. If gases are contaminated they must be filtered to prevent the introduction of impediments into the sensor.
Caution: FMA6500 transducers should not be used for monitoring
OXYGEN gas unless specifically cleaned and prepared for such application. For more information, contact Omega 7 .
Attitude sensitivity of the Mass Flow Controller is + 15
F
. This means that the gas flow path of the Flow Controller must be horizontal within those stated limits. Should there be need for a different orientation of the meter, re-calibration may be necessary. It is also preferable to install the FMA6500 transducer in a stable environment, free of frequent and sudden temperature changes, high moisture, and drafts.
Prior to connecting gas lines inspect all parts of the piping system including ferrules and fittings for dust or other contaminants.
1
Be sure to observe the direction of gas flow as indicated by the arrow on the front of the meter when connecting the gas system to be monitored.
Insert tubing into the compression fittings until the ends of the properly sized tubings home flush against the shoulders of the fittings. Compression fittings are to be tightened according to the manufacturer's instructions to one and one quarter turns. Avoid over tightening which will seriously damage the Restrictor Flow
Elements (RFE's)!
FMA6500 transducers are supplied with standard 1/4 inch (FMA6500 up to 10
L/min) or 3/8 inch (FMA6500 15 L/min and greater), or optional 1/8 inch inlet and outlet compression fittings which should not be removed unless the meter is being cleaned or calibrated for a new flow range.
Using a Helium Leak Detector or other equivalent method perform a thorough leak test of the entire system. (All FMA6500's are checked prior to shipment for leakage within stated limits. See specifications in this manual.)
2.2 Electrical Connections
FMA6500 transducers require a +15VDC and -15VDC power supply to operate.
Additionally, a readout panel meter, digital multimeter, or other equivalent device is required to observe the flow signal in analog mode. A variable analog 0-5VDC reference input is required for FMA6500 models to operate in analog mode.
FMA6500 is supplied with a 25 pin "D" connector. Pin diagram is presented in figure b-2.
2.3 Communication Parameters and Connections
Baud rate: 9600 baud
Data bits: 8
Stop bit:
Parity:
1
NON
RS-232 option: Crossover connection has to be established:
Pin 11 (TX) of the “D” connector has to be connected to RX
(pin 2 on the DB9 connector).
Pin 24 (RX) of the “D” connector has to be connected to TX
(pin 3 on the DB9 connector).
Pin 20 (Common) of the “D” connector has to be connected to GND (pin 5 on the DB9 connector).
RS-485 option:
The RS485 converter/adapter has to be configured for: multidrop, 2 wire, half duplex mode. The transmitter circuit has to be enabled by TD or RTS (depending on which is available on the converter/adapter). Settings for the receiver circuit usually should follow the selection made for the transmitter circuit in order to eliminate Echo.
Pin 11 (-) of the “D” connector has to be connected to
T- or R- on the RS-485 converter/adapter.
Pin 24 (+) of the “D” connector has to be connected to
2
T+ or R+ on the RS-485 converter/adapter.
Pin 20 (Common) of the “D” connector has to be connected to GND on the RS-485 converter/adapter.
3
FIGURE b-1, WIRING DIAGRAM FOR FMA6500 TRANSDUCERS.
4
PIN FUNCTION
1
2
+15 VDC Power Supply
0-5 VDC Flow Signal (4-20mA Option)
3 0-5 VDC Set Point Input (4-20mA Option)
4 Force Valve Open Control
5 Force Valve Closed Control
6 (Reserved)
7 (Reserved)
8 Relay No. 1 - Common Contact
9 Relay No. 1 - Normally Open Contact
10 Relay No. 2 - Normally Closed Contact
11 RS485 (-) (Optional RS232 TX)
14 -15 VDC Power Supply
15 Common, Signal Ground For Pin 2
16 Common, Signal Ground For Pin 3
17 (Optional) RS232 Common
18 Common, Power Supply
19 Common
20 Common
21 Relay No. 1 - Normally Closed Contact
22 Relay No. 2 - Common Contact
23 Relay No. 2 - Normally Open Contact
24 RS485 (+) (Optional RS232 RX)
25 Return for Pin 2 (Optional 4-20 mA Only)
FIGURE b-2, FMA6500 25 PIN "D" CONNECTOR CONFIGURATION
Important notes:
In general, "D" Connector numbering patterns are standardized. There are, however, some connectors with nonconforming patterns and the numbering sequence on your mating connector may or may not coincide with the numbering sequence shown in our pin configuration table above. It is imperative that you match the appropriate wires in accordance with the correct sequence regardless of the particular numbers displayed on your mating connector.
Make sure power is OFF when connecting or disconnecting any cables in the system.
The (+) and (-) power inputs are each protected by a 500mA M (medium time-lag) resettable fuse. If a shorting condition or polarity reversal occurs, the fuse will cut power to the flow transducer circuit. Disconnect the power to the unit, remove the faulty condition, and reconnect the power. The fuse will reset once the faulty condition has been removed.
Cable length may not exceed 9.5 feet (3 meters).
5
Use of the FMA6500 flow transducer in a manner other than that specified in this manual or in writing from Omega 7 , may impair the protection provided by the equipment.
3. PRINCIPLE OF OPERATION
The stream of gas entering the Mass Flow transducer is split by shunting a small portion of the flow through a capillary stainless steel sensor tube. The remainder of the gas flows through the primary flow conduit. The geometry of the primary conduit and the sensor tube are designed to ensure laminar flow in each branch.
According to principles of fluid dynamics the flow rates of a gas in the two laminar flow conduits are proportional to one another. Therefore, the flow rates measured in the sensor tube are directly proportional to the total flow through the transducer.
In order to sense the flow in the sensor tube, heat flux is introduced at two sections of the sensor tube by means of precision wound heater sensor coils. Heat is transferred through the thin wall of the sensor tube to the gas flowing inside. As gas flow takes place heat is carried by the gas stream from the upstream coil to the downstream coil windings. The resultant temperature dependent resistance differential is detected by the electronic control circuit. The measured gradient at the sensor windings is linearly proportional to the instantaneous rate of flow taking place.
An output signal is generated that is a function of the amount of heat carried by the gases to indicate mass molecular based flow rates.
Additionally, FMA6500 model Mass Flow Controllers incorporate a microprocessor and non-volatile memory that stores all calibration factors and directly controls a proportionating solenoid valve. The digital closed loop control system of the
FMA6500 continuously compares the mass flow output with the selected flow rate.
Deviations from the set point are corrected by compensating valve adjustments, thus maintaining the desired flow parameters with a high degree of accuracy.
4.
SPECIFICATIONS
FLOW MEDIUM: Please note that FMA6500 Mass Flow Controllers are designed to work with clean gases only. Never try to meter or control flow rates of liquids with any FMA6500.
CALIBRATIONS: Performed at standard conditions [14.7 psia
(1.01 bars) and 70
F
F (21.1
F
C)] unless otherwise requested or stated.
ENVIRONMENTAL (PER IEC 664):
Installation Level II; Pollution Degree II.
6
4.1
FMA6500 Series Mass Flow Controllers
ACCURACY: +1% of full scale, including linearity for gas temperatures ranging from
59 F F to 77 F F (15 F C to 25 F C) and pressures of 10 to 60 psia (0.7 to 4.1 bars).
REPEATABILITY: +0.15% of full scale.
TEMPERATURE COEFFICIENT: 0.1% of full scale/ F C.
PRESSURE COEFFICIENT: 0.01% of full scale/psi (0.07 bar).
RESPONSE TIME: FMA6500 up to 10 L/min: 300ms time constant; approximately
1 second to within +2% of set flow rate for 25% to 100% of full scale flow.
FMA6500 15 L/min and greater: 600ms time constant; approximately 2 seconds to within +2% of set flow rate for 25% to
100% of full scale flow.
GAS PRESSURE: 500 psig (34.5 bars) maximum; optimum pressure is 20 psig (1.4
bars); 25 psig (1.7 bars gauge) for FMA6500 80 L/min and greater.
DIFFERENTIAL PRESSURES REQUIRED: 5 to 50 psig (0.35 to 3.34 bars) differential pressures. Optimum differential pressure is 25 psid (1.7 bars). See Table IV for pressure drops associated with various models and flow rates.
MAXIMUM PRESSURE DIFFERENTIAL: 50 psid for FMA6500 up to 60 L/min, 40 psid for FMA6500 80 L/min and greater.
GAS AND AMBIENT TEMPERATURE: 41 F F to 122 F F (5 F C to 50 F C).
RELATIVE GAS HUMIDITY: Up to 70%.
LEAK INTEGRITY: 1 x 10 -9 sccs He maximum to the outside environment.
ATTITUDE SENSITIVITY: 1% shift for a 90 degree rotation from horizontal to vertical; standard calibration is in horizontal position.
OUTPUT SIGNALS: Linear 0-5 VDC (2000
Ω minimum load impedance); 4-20 mA optional (50-500
Ω loop resistance); 20 mV peak to peak max noise.
Contact Omega 7 for optional RS232 or IEEE488 interfaces.
COMMAND SIGNAL: 0-5 VDC (200K
Ω input impedance); 4-20 mA optional.
TRANSDUCER INPUT POWER: FMA6500 - +15 +5% VDC, 450 mA max, 6.75 watts max; -15 +5% VDC, 450 mA max; 6.75 watts max;
Power inputs are each protected by a 500mA M (medium time-lag) resettable fuse, and an inverse shunt rectifier diode for polarity protection.
7
WETTED MATERIALS: 316 stainless steel, 416 stainless steel, VITON 7 O-rings;
BUNA-N 7 , NEOPRENE 7 or KALREZ 7 O-rings are optional.
Omega 7 makes no expressed or implied guarantees of corrosion resistance of mass flow meters as pertains to different flow media reacting with components of meters. It is the customers' sole responsibility to select the model suitable for a particular gas based on the fluid contacting (wetted) materials offered in the different models.
INLET AND OUTLET CONNECTIONS: 1/4" (FMA6500 up to 50 L/min) or 3/8"
(FMA6500 60 L/min and greater) compression fittings standard; 1/8" or 3/8" compression fittings and 1/4" VCR 7 fittings are optional.
TRANSDUCER INTERFACE CABLE: Flat cable with 25-pin "D" connectors on the ends is standard. Optional shielded cable is available with male/female 25-pin "D" connector ends. [Cable length may not exceed 9.5 feet (3 meters)]
4.2 CE Compliance
Any model FMA6500 bearing a CE marking on it, is in compliance with the below stated test standards currently accepted.
EMC Compliance with 89/336/EEC as amended;
Emission Standard: EN 55011:1991, Group 1, Class A
Immunity Standard: EN 55082-1:1992
8
FLOW RANGES
CODE
02
04
06
08
10
TABLE I FMA6500 LOW FLOW MASS FLOW CONTROLLERS* scc/min [N
2
]
0 to 10
0 to 20
0 to 50
0 to 100
0 to 200
CODE
12
14
16
18
20 std liters/min [N
2
]
0 to 500
0 to 1
0 to 2
0 to 5
0 to 10
TABLE II FMA6500 MEDIUM FLOW MASS FLOW CONTROLLERS*
CODE
23
24
26
28 standard liters/min [N
2
]
15
20
30
50
TABLE III FMA6500 HIGH FLOW MASS FLOW CONTROLLERS*
CODE
40
41
42 standard liters/min [N
2
]
60
80
100
* Flow rates are stated for Nitrogen at STP conditions [i.e. 70 F F (21.1
F C) at 1 atm].
For other gases use the K factor as a multiplier from APPENDIX 2.
9
FLOW RATE
[std liters/min] up to 10
15
20
30
40
50
60
100
TABLE IV PRESSURE DROPS
[mm H
2
O]
720
2630
1360
2380
3740
5440
7480
12850
MAXIMUM PRESSURE DROP
[psid]
1.06
3.87
2.00
3.50
5.50
8.00
11.00
18.89
[mbar]
75
266
138
241
379
551
758
1302
TABLE V APPROXIMATE WEIGHTS
MODEL
FMA6500 up to 10 L/min transmitter
FMA6500 15 L/min and greater transmitter
WEIGHT SHIPPING WEIGHT
2.20 lbs (1.00 kg) 3.70 lbs (1.68 kg)
2.84 lbs (1.29 kg) 4.34 lbs (1.97 kg)
10
5. OPERATING INSTRUCTIONS
5.1 Preparation and Warm Up
It is assumed that the Mass Flow Controller or Controller has been correctly installed and thoroughly leak tested as described in section (2). Make sure the flow source is OFF. Power up the transducer using your own power supply (or switch the POWER switch to the ON position at the front panel of your Process
Controller). Allow the Mass Flow Meter or Controller to warm-up for a minimum of
15 minutes.
During initial powering of the FMA6500 transducer, the flow output signal will be indicating a higher than usual output. This is indication that the FMA6500 transducer has not yet attained it's minimum operating temperature. This condition will automatically cancel within a few minutes and the transducer should eventually zero.
Caution: If the valve is left in the AUTO (control) or OPEN mode for an extended period of time, it may become warm or even hot to the touch.
Use care in avoiding direct contact with the valve during operation.
5.2 Flow Signal Output Readings
The flow signal output can be viewed on the panel meter, digital multimeter, or other display device used as shown in figure b-1.
Analog output flow signals of 0 to 5 VDC or optional 4 to 20 mA are attained at the appropriate pins the 25-pin "D" connector (see Figure b-2) on the side of the
FMA6500 transducer.
Meter signal output is linearly proportional to the mass molecular flow rate of the gas being metered. The full scale range and gas for which your meter has been calibrated are shown on the flow transducer's front label.
For information on the RS485 or optional RS232 interfaces please contact
Omega 7 .
5.3 Swamping Condition
If a flow of more than 10% above the maximum flow rate of the Mass Flow
Controller is taking place, a condition known as "swamping" may occur. Readings of a "swamped" meter cannot be assumed to be either accurate or linear. Flow must be restored to below 110% of maximum meter range. Once flow rates are lowered to within calibrated range, the swamping condition will end. Operation of the meter above 110% of maximum calibrated flow may increase recovery time.
11
5.4 Set Point Reference Signal
FMA6500 flow controllers have a built-in solenoid valve and allow the user to set the flow to any desired flow rate within the range of the particular model installed.
This valve is normally closed when no power is applied.
The set point input in analog mode responds to an analog 0 to 5 VDC reference voltage or 4-20mA reference current. This voltage is a linear representation of 0 to 100% of the full scale mass flow rate. Response time to set point changes are
1 second to within 2% of the final flow over 25 to 100% of full scale.
A variable 0 to 5VDC analog signal may be applied directly to the SET POINT and
COMMON connections of the FMA6500 transducer (see Figure b-1).
If a potentiometer is used to adjust the set point reference signal its value should be between 5K to 100K ohm and it should be capable of at least 10-turns or more for adjustment.
5.5 Valve OFF Control
It may, at times, be desirable to set the flow and maintain that setting while being able to turn the flow control valve off and on again. This can be accomplished via pin 5 on the 25-pin "D" connector. When 0 VDC (LOW) signal is applied (connection via a relay, switch or NPN open collector transistor is permissible), the solenoid valve is not powered and therefore will remain normally closed. Conversely, when the pin is disconnected from 0 VDC ("floating”) the solenoid valve will remain active.
The simplest means for utilizing the VALVE OFF control feature, is to connect a toggle switch between the COMMON and FORCE VALVE CLOSED pins of the
FMA6500 transducer. Toggling the switch on and off will allow for activating and deactivating the solenoid valve.
5.6 Valve Open /Purge
At times, it may be necessary to purge the flow system with a neutralizing gas such as pure dry nitrogen. The FMA6500 transducer is capable of a full open condition for the solenoid valve, regardless of set point conditions. Connecting the
FORCE VALVE OPEN pin (pin 4 on 25-pin "D" connector) to ground will fully open the valve. This connection can be made with a relay, switch or NPN open collector transistor. Conversely, when the pin is disconnected from 0 VDC ("floating”) the solenoid valve will remain active. (Note: in digital mode hardware I/O overrides software command)
The simplest means for utilizing the VALVE OPEN control feature, is to connect a toggle switch between the COMMON and FORCE VALVE OPEN pins of the FMA6500 transducer. Toggling the switch on will cause the valve to open fully and purge the system. Toggling the switch off will allow the solenoid valve to resume normal activity.
Caution: If the valve is left in the AUTO (control) or OPEN mode for an extended period of time, it may become warm or even hot to the touch.
Use care in avoiding direct contact with the valve during operation.
12
5.7 Analog Interface Configuration
The FMA6500 can be configured for the desired range and scaling by selection of analog board (see APPENDIX 1 on page 21) jumpers as follows:
0 to 5 V output: Jumper pins 2 and 3 of JP6.
Jumper pins 2 and 3 of JP3.
Jumper pins 2 and 3 of JP5.
Jumper pins 1 and 2 of JP12.
0 to 5 V input: Jumper pins 2 and 3 of JP2.
Jumper pins 2 and 3 of JP4.
Jumper pins 1 and 2 of JP11.
0 to 10 V output: As for 0 to 5V, but jumper pins 2 and 3 of JP12.
4 to 20 mA output: Jumper pins 1 and 2 of JP6.
Jumper pins 1 and 2 of JP3.
Jumper pins 1 and 2 of JP5.
Jumper pins 1 and 2 of JP12.
4 to 20 mA input: Jumper pins 1 and 2 of JP2.
Jumper pins 1 and 2 of JP4.
Jumper pins 1 and 2 of JP11.
By default the FMA6500 is configured for analog input output ranges set to 0-5V
(unless ordered with special configuration).
6. MAINTENANCE
6.1 Introduction
It is important that the Mass Flow Controller is used with clean, filtered gases only.
Liquids may not be metered. Since the RTD sensor consists, in part, of a small capillary stainless steel tube, it is prone to occlusion due to impediments or gas crystallization. Other flow passages are also easily obstructed. Therefore, great care must be exercised to avoid the introduction of any potential flow impediment.
To protect the instrument a 50 micron (FMA6500 up to 10 L/min) or 60 micron
(FMA6500 15 L/min and greater) filter is built into the inlet of the flow transducer.
The filter screen and the flow paths may require occasional cleaning as described below. There is no other recommended maintenance required. It is good practice, however, to keep the meter away from vibration, hot or corrosive environments and excessive RF or magnetic interference.
If periodic calibrations are required they should be performed by qualified personnel and calibrating instruments, as described in section (7). It is recommended that units are returned to Omega 7 for repair service and calibration.
CAUTION: TO PROTECT SERVICING PERSONNEL IT IS MANDATO-
RY THAT ANY INSTRUMENT BEING SERVICED IS COMPLETELY
PURGED AND NEUTRALIZED OF TOXIC, BACTERIOLOGICALLY
INFECTED, CORROSIVE OR RADIOACTIVE CONTENTS.
13
6.2 Flow Path Cleaning
Before attempting any disassembly of the unit for cleaning, try inspecting the flow paths by looking into the inlet and outlet ends of the meter for any debris that may be clogging the flow through the meter. Remove debris as necessary. If the flow path is not unclogged, then proceed with steps below.
Do not attempt to disassemble the sensor. If blockage of the sensor tube is not alleviated by flushing through with cleaning fluids, please return meter to Omega 7 for servicing.
6.2.1
Restrictor Flow Element (RFE)
The Restrictor Flow Element (RFE) is a precision flow divider inside the transducer, which splits the inlet gas flow by a preset amount to the sensor and main flow paths. The particular RFE used in a given Mass Flow Controller depends on the gas and flow range of the instrument.
6.2.2 FMA6500 up to 10 L/min models
Unscrew the inlet compression fitting of meter. Note that the Restrictor Flow
Element (RFE) is connected to the inlet fitting.
Carefully disassemble the RFE from the inlet connection. The 50 micron filter screen will now become visible. Push the screen out through the inlet fitting. Clean or replace each of the removed parts as necessary. If alcohol is used for cleaning, allow time for drying.
Inspect the flow path inside the transducer for any visible signs of contaminants.
If necessary, flush the flow path through with alcohol. Thoroughly dry the flow paths by flowing clean dry gas through.
Carefully re-install the RFE and inlet fitting, avoiding any twisting and deforming the RFE. Be sure that no dust has collected on the O-ring seal.
Note: Overtightening will deform and render the RFE defective.
It is advisable that at least one calibration point be checked after re installing the inlet fitting - see section (7).
6.2.3 FMA6500 15 L/min and greater
Unscrew the four socket head cap screws (two 10-24 and two 6-32) at the inlet side of the meter. This will release the short square block containing the inlet compression fitting.
The 60 micron filter screen will now become visible. Remove the screen. DO NOT remove the RFE inside the flow transducer! Clean or replace each of the removed parts as necessary. If alcohol is used for cleaning, allow time for drying.
14
Inspect the flow path inside the transducer for any visible signs of contaminants.
If necessary, flush the flow path through with alcohol. Thoroughly dry the flow paths by flowing clean dry gas through.
Re-install the inlet parts and filter screen. Be sure that no dust has collected on the O-ring seal.
It is advisable that at least one calibration point be checked after re installing the inlet fitting - see section (7).
6.2.4 Valve Maintenance (FMA6500)
The solenoid valve consists of 316 and 416 stainless steel, and VITON 7 (or optional NEOPRENE 7 or KALREZ 7 ) O-rings and seals. No regular maintenance is required except for periodic cleaning.
Various corrosive gases may demand more frequent replacement of VITON 7
O- rings and seals inside the valve. Be sure to use an elastomer material, appropriate for your specific gas application.
Set the FMA6500 into PURGE mode, and attempt to flush through with a clean, filtered, and neutral gas such as nitrogen. [Another option for fully opening the valve is to remove the plastic cap on top of the valve, and turn the set screw counterclockwise until it stops. Set valve for the closed position. Apply an inlet pressure of 5 psig and atmospheric pressure at the outlet. If a small flow occurs, turn the set screw on top of the solenoid valve clockwise until the flow through the
FMA6500 just stops.
Note: Removal of the factory installed calibration seals and/or any adjustments made to the meter, as described in this section, will void any calibration warranty applicable.
7. CALIBRATION PROCEDURES
7.1 Flow Calibration
Omega 7 Engineering' Flow Calibration Laboratory offers professional calibration support for Mass Flow meterss and Controllers, using precision calibrators under strictly controlled conditions. NIST traceable calibrations are available.
Calibrations can also be performed at customers' site using available standards.
Factory calibrations are performed using NIST traceable precision volumetric calibrators incorporating liquid sealed frictionless actuators.
Generally, calibrations are performed using dry nitrogen gas. The calibration can then be corrected to the appropriate gas desired based on relative correction [K] factors shown in the gas factor table see Appendix 2. A reference gas, other than nitrogen, may be used to closer approximate the flow characteristics of certain gases. This practice is recommended when a reference gas is found with thermodynamic properties similar to the actual gas under consideration. The appro-
15
priate relative correction factor should be recalculated see section (9). It is standard practice to calibrate Mass Flow meters/Controllers with dry nitrogen gas at
70
F
F (21.1EC), 20 psig (1.4 bars) [25 psig (1.7 bars) for FMA6540, 41] inlet pressure and 0 psig (0 bar) outlet pressure. It is best to calibrate the FMA6500 transducers to actual operating conditions. Specific gas calibrations of non-toxic and non-corrosive gases are available at specific conditions. Please contact Omega 7 for a price quotation.
It is recommended that a flow calibrator of at least four times better collective accuracy than that of the Mass Flow Controller to be calibrated be used. Equipment required for calibration includes a flow calibration standard and a certified high sensitivity multimeter (which together have a collective accuracy of +0.25% or better), an insulated (plastic) screwdriver, a flow regulator (example: metering needle valve) installed upstream from the Mass Flow Controller and a pressure regulated source of dry filtered nitrogen gas (or other suitable reference gas).
The gas and ambient temperature, as well as inlet and outlet pressure conditions should be set up in accordance with actual operating conditions.
7.2 Calibration of FMA6500 Mass Flow Controllers
All adjustments to the FMA6500 calibration and control loop tuning are accomplished using the RS485 (or optional RS232) interface in conjunction with setup and calibration software available from Omega 7 . The sensor zero is automatically adjusted internally whenever the control valve is fully closed (set point less than
2% of full scale) and the unit is warmed up.
FMA6500 Mass Flow meters may be field recalibrated/checked using the setup and calibration program for the same range they were originally factory calibrated for. Flow range changes may require a different Restrictor Flow Element (RFE).
Additionally, a different Solenoid Valve Orifice for the FMA6500 Mass Flow
Controller (see Table VI) may also be required. Consult Omega 7 for more information.
TABLE VI FMA6500 SOLENOID VALVE ORIFICE SELECTION TABLE
ORIFICE PART NUMBER
OR.010
OR.020
OR.040
OR.055
OR.063
OR.073
OR.094
OR.125
FLOW RATE [N
2
]
Under 10 sccm
10 to 1000 sccm
1 to 5 slpm
5 to 10 slpm
10 to 15 slpm
15 to 20 slpm
20 to 50 slpm
50 to 100 slpm
16
8. TROUBLESHOOTING
8.1 Common Conditions
Your Mass Flow Controller was thoroughly checked at numerous quality control points during and after manufacturing and assembly operations. It was calibrated in accordance to your desired flow and pressure conditions for a given gas or a mixture of gases.
It was carefully packed to prevent damage during shipment. Should you feel that the instrument is not functioning properly please check for the following common conditions first:
Are all cables connected correctly?
Are there any leaks in the installation?
Is the power supply correctly selected according to requirements? When several meters are used a power supply with appropriate current rating should be selected.
Were the connector pinouts matched properly? When interchanging with other manufacturers' equipment, cables and connectors must be carefully wired for correct pin configurations.
Is the pressure differential across the instrument sufficient?
For best results it is recommended that instruments are returned to the factory for servicing. See section 1.3 for return procedures.
8.2 Technical Assistance
OMEGA 7 Engineering will provide technical assistance over the phone to qualified repair personnel. Please call our Flow Department at 800-872-9436 Ext.
2298.
17
8.3
Troubleshooting Guide
Indication lack of reading or output output reads at (+) or (-) saturation only
Likely Reason power supply off fuse blown
(FMA6500)
Remedy check connection of power supply disconnect FMA6500 transducer from power supply; remove the shorting condition or check polarities; fuse resets automatically
REMOVE CAUSE OF SHORT CIRCUIT!
filter screen obstructed at inlet flush clean or disassemble to remove impediments or replace occluded sensor tube pc board defect flush clean or disassemble to remove impediments or return to factory for replacement return to factory for replacement valve adjustment wrong fuse blown
(FMA6500) re-adjust valve (section 6.2.4) disconnect FMA6500 transducer from power supply; remove the shorting condition or check polarities; fuse resets automatically
REMOVE CAUSE OF SHORT CIRCUIT!
flow reading does not coincide with the set point
(FMA6500 models only) inadequate gas pressure apply appropriate gas pressure filter screen obstructed at inlet flush clean or disassemble to remove impediments or replace ground loop inadequate gas pressure signal and power supply commons are different apply appropriate gas pressure no response to set point
(FMA6500 models only) cable or connector malfunction set point is too low
(<2% of full scale) valve adjustment wrong unstable or no zero reading gas leak pc board defective check cables and all connections or replace re-adjust set point re-adjust valve (section 6.2.4) locate and correct return to factory for replacement
18
Indication full scale output at
"no flow" condition or with valve closed calibration off
Likely Reason defective sensor gas Leak
Remedy return to factory for replacement locate and repair gas metered is not the same as what meter was calibrated for composition of gas changed gas leak pc board defective
RFE dirty use matched calibration see K factor tables in APPENDIX 2 locate and correct return to factory for replacement flush clean or disassemble to remove impediments
FMA6500 valve does not work in open position occluded sensor tube flush clean or disassemble to remove impediments or return to factory for replacement filter screen obstructed at inlet flush clean or disassemble to remove impediments or replace transducer is not mounted properly incorrect valve adjustment pc board defect cable or connectors malfunction differential pressure too high check for any tilt or change in the mounting of the transducer; generally, units are calibrated for horizontal installation (relative to the sensor tube) re-adjust valve (section 6.2.4) return to factory for replacement check cable and connectors or replace decrease pressure to correct level insufficient inlet pressure
FMA6500 valve does not work in close position incorrect valve adjustment pc board defect cable or connectors malfunction adjust appropriately re-adjust valve (section 6.2.4) return to factory for replacement check cable and connectors or replace orifice obstructed disassemble to remove impediments or return to factory
19
9.
CALIBRATION CONVERSIONS FROM REFERENCE
GASES
The calibration conversion incorporates the K factor. The K factor is derived from gas density and coefficient of specific heat. For diatomic gases:
K gas
=
1 d X C p where d = gas density (gram/liter)
C p
= coefficient of specific heat (cal/gram)
Note in the above relationship that d and C p are usually chosen at standard conditions of one atmosphere and 25 F C.
If the flow range of a Mass Flow Controller or Controller remains unchanged, a relative K factor is used to relate the calibration of the actual gas to the reference gas.
where Q a
Q r
K a
K r
K =
Q a
=
Q r
K
K a r
= mass flow rate of an actual gas (sccm)
= mass flow rate of a reference gas (sccm)
= K factor of an actual gas
= K factor of a reference gas
For example, if we want to know the flow rate of oxygen and wish to calibrate with nitrogen at 1000 SCCM, the flow rate of oxygen is:
Q = Q a
= Q r x K = 1000 X 0.9926 = 992.6 sccm where K = relative K factor to reference gas (oxygen to nitrogen)
20
APPENDIX 1
COMPONENTS DIAGRAMS
FMA6500 DIGITAL PC BOARD
(Primary Side)
21
APPENDIX 1
(CONTINUED)
FMA6500 DIGITAL PC BOARD
(SECONDARY SIDE)
22
APPENDIX 1
(CONTINUED)
FMA6500 ANALOG PC BOARD
(Primary Side)
23
APPENDIX 1
(CONTINUED)
FMA6500 ANALOG PC BOARD
(SECONDARY SIDE)
24
APPENDIX 2
GAS FACTOR TABLE (“K” FACTORS)
ACTUAL GAS
Acetylene C
2
H
2
Air
Allene (Propadiene) C
3
H
4
Ammonia NH
3
Argon Ar
Arsine AsH
3
Boron Trichloride BCl
3
Boron Trifluoride BF
3
Bromine Br
2
Boron Tribromide Br
3
Bromine Pentaflouride BrF
5
Bromine Trifluoride BrF
3
Bromotrifluoromethane (Freon-13 B1) CBrF
3
1,3-Butadiene C
4
H
6
Butane C
4
H
10
1-Butane C
4
H
8
2-Butane C
4
H
8
CIS
2-Butane C
4
H
8
TRANS
Carbon Dioxide CO
2
Carbon Disulfide CS
2
Carbon Monoxide C
O
Carbon Tetrachloride CCl
4
Carbon Tetrafluoride (Freon-14)CF
4
Carbonyl Fluoride COF
2
Carbonyl Sulfide COS
Chlorine Cl
2
Chlorine Trifluoride ClF
3
Chlorodifluoromethane (Freon-22)CHClF
2
Chloroform CHCl
3
Chloropentafluoroethane(Freon-115)C
2
ClF
5
Chlorotrifluromethane (Freon-13) CClF
3
CyanogenC
2
N
2
CyanogenChloride CICN
Cyclopropane C
3
H
5
Deuterium D
2
Diborane B
2
H
6
25
K FACTOR
Relative to N
2
1.00
.31
.42
.5428
.6606
.86
.4016
.4589
.3912
.2418
.3834
.61
.6130
.4584
1.00
.4357
.26
.3855
.3697
.3224
.2631
.2994
.324
.291
.7382
.6026
.5829
1.0000
.4346
.7310
1.4573
.6735
.4089
.5082
.8083
.38
Cp
[Cal/g]
.2488
.1655
.1654
.1710
.1651
.114
.1650
.1544
.1309
.164
.153
.2613
.1739
.3177
1.722
.508
.1369
.1161
.1113
.3514
.4007
.3648
.336
.374
.2016
.1428
.4036
.240
.352
.492
.1244
.1167
.1279
.1778
.0539
.0647
Density
[g/I]
1.250
6.860
3.926
2.945
2.680
3.163
4.125
3.858
5.326
6.892
4.660
2.322
2.742
1.877
1.799
1.235
7.803
6.108
6.644
2.413
2.593
2.503
2.503
2.503
1.964
3.397
1.162
1.293
1.787
.760
1.782
3.478
5.227
3.025
7.130
11.18
ACTUAL GAS
Dibromodifluoromethane CBr
2
F
2
Dichlorodifluoromethane (Freon-12) CCl
2
F
2
Dichlofluoromethane (Freon-21) CHCl
2
F
Dichloromethylsilane (CH
3
)
2
SiCl
2
Dichlorosilane SiH
2
Cl
2
Dichlorotetrafluoroethane (Freon-114) C
2
Cl
2
F
4
1,1-Difluoroethylene (Freon-1132A) C
2
H
2
F
2
Dimethylamine (CH
3
)
2
NH
Dimethyl Ether (CH
3
)
2
O
2,2-Dimethylpropane C
3
H
12
Ethane C
2
H
6
Ethanol C
2
H
6
O
Ethyl Acetylene C
4
H
6
Ethyl Chloride C
2
H
5
Cl
Ethylene C
2
H
4
Ethylene Oxide C
2
H
4
O
Fluorine F
2
Fluoroform (Freon-23) CHF
3
Freon-11 CCl
3
F
Freon-12 CCl
2
F
2
Freon-13 CClF
3
Freon-13B1 CBrF
3
Freon-14 CF
4
Freon-21 CHCl
2
F
Freon-22 CHClF
2
Freon-113 CCl
2
FCClF
2
Freon-114 C
2
Cl
2
F
4
Freon-115 C
2
ClF
5
Freon-C318 C
4
F
8
Germane GeH
4
Germanium Tetrachloride GeCl
4
Helium He
Hexafluoroethane C
2
F
6
(Freon-116)
Hexane C
6
H
14
Hydrogen H
2
Hydrogen Bromide HBr
Hydrogen Chloride HCl
Hydrogen Cyanide HCN
K Factor
Relative to N
2
.5696
.2668
1.454
.2421
.1792
1.0106
1.000
1.000
1.070
.3538
.3834
.3697
.4210
.4252
.4589
.2031
.2240
.2418
.1760
.2170
.50
.3918
.3225
.3891
.60
.5191
.9784
.4967
.3287
.1947
.3538
.4252
.2522
.4044
.2235
.4271
.3714
.3896
Cp
[Cal/g]
.1654
.140
.1544
.161
.160
.164
.185
.1404
.1071
1.241
.1834
.3968
3.419
.0861
.1912
.3171
.3513
.244
.365
.268
.1873
.176
.1357
.1432
.153
.1113
.15
.1432
.140
.1882
.150
.1604
.224
.366
.3414
.3914
.420
.3395
26
Density
[g/I]
3.418
9.565
.1786
6.157
3.845
.0899
3.610
1.627
1.206
5.395
4.660
6.644
3.926
4.592
3.858
8.360
7.626
6.892
8.397
3.219
1.342
2.055
2.413
2.879
1.251
1.965
1.695
3.127
6.129
9.362
5.395
4.592
5.758
4.506
7.626
2.857
2.011
2.055
Actual Gas
Hydrogen Fluoride HF
Hydrogen Iodide HI
Hydrogen Selenide H
2
Se
Hydrogen Sulfide H
2
S
Iodine Pentafluoride IF
5
Isobutane CH(CH
3
)
3
Isobutylene C
4
H
6
Krypton Kr
Methane CH
4
Methanol CH
3
Methyl Acetylene C
3
H
4
Methyl Bromide CH
2
Br
Methyl Chloride CH
3
Cl
Methyl Fluoride CH
3
F
Methyl Mercaptan CH
3
SH
Methyl Trichlorosilane (CH
3
)SiCl
3
Molybdenum Hexafluoride MoF
6
Monoethylamine C
2
H
5
NH
2
Monomethylamine CH
3
NH
2
Neon NE
Nitric Oxide NO
Nitrogen N
2
Nitrogen Dioxide NO
2
Nitrogen Trifluoride NF
3
Nitrosyl Chloride NOCl
Nitrous Oxide N
2
O
Octafluorocyclobutane (Freon-C318) C
4
F
8
Oxygen O
2
Oxygen Difluoride OF
2
Ozone
Pentaborane B
5
H
9
Pentane C
5
H
12
Perchloryl Fluoride ClO
3
F
Perfluoropropane C
3
F
8
Phosgene COCl
2
Phosphine PH
3
Phosphorous Oxychloride POCl
3
Phosphorous Pentafluoride PH
5
K Factor
Relative to N
2
.2554
.2134
.3950
.174
.4438
1.070
.36
.3021
.51
1.46
.990
1.000
.737
.4802
.6134
.7128
.176
.9926
.6337
.446
.9998
.9987
.7893
.80
.2492
.27
.2951
1.453
.7175
.5843
.4313
.5835
.6299
.68
.5180
.2499
.2126
.3512
Cp
[Cal/g]
.3221
.2459
.164
.1373
.387
.4343
.246
.2328
.2485
.1933
.3701
.0593
.5328
.3274
.3547
.1106
.1926
.3479
.0545
.1025
.2397
.1108
.3872
.1797
.1632
.2088
.185
.2193
.1917
.195
.38
.398
.1514
.197
.1394
.2374
.1324
.1610
27
Density
[g/I]
2.144
2.816
3.219
4.571
8.388
4.418
1.517
6.843
5.620
.900
1.339
1.25
2.052
3.168
2.920
1.964
8.397
1.427
2.406
1.429
1.787
4.236
2.253
1.518
2.146
6.669
9.366
2.011
1.386
.893
5.707
3.613
1.520
9.90
3.593
2.503
3.739
.715
Actual Gas
Phosphorous Trichloride PCl
3
Propane C
3
H
8
Propylene C
3
H
6
Silane SiH
4
Silicon Tetrachloride SiCl
4
Silicon Tetrafluoride SiF
4
Sulfur Dioxide SO
2
Sulfur Hexafluoride SF
6
Sulfuryl Fluoride SO
2
F
2
Tetrafluoroethane (Forane 134A) CF
3
CH
2
F
Tetrafluorohydrazine N
2
F
4
Trichlorofluoromethane (Freon-11) CCl
3
F
Trichlorosilane SiHCl
3
1,1,2-Trichloro-1,2,2 Trifluoroethane
(Freon-113) CCl
2
FCClF
2
Triisobutyl Aluminum (C
4
H
9
)AL
Titanium Tetrachloride TiCl
4
Trichloro Ethylene C
2
HCl
3
Trimethylamine (CH
3
)
3
N
Tungsten Hexafluoride WF
6
Uranium Hexafluoride UF
6
Vinyl Bromide CH
2
CHBr
Vinyl Chloride CH
2
CHCl
Xenon Xe
.2031
.0608
.2691
.32
.2792
.2541
.1961
.4616
.48
1.44
K Factor
Relative to N
2
.30
.35
.40
.5982
.284
.3482
.69
.2635
.3883
.5096
.3237
.3287
.3278
.161
.508
.120
.163
.3710
.0810
.0888
.1241
.12054
.0378
Cp
[Cal/g]
.1488
.1592
.1543
.127
.182
.1357
.1380
.1250
.399
.366
.3189
.1270
.1691
8.36
8.848
8.465
5.95
2.639
13.28
15.70
4.772
2.788
5.858
Density
[g/I]
6.127
1.967
1.877
1.433
7.580
4.643
2.858
6.516
4.562
4.224
4.64
6.129
6.043
28
APPENDIX 3
DIMENSIONAL DRAWINGS
FMA6500 UP TO 10 L/MIN MASS FLOW CONTROLLER
NOTES: Omega 7 reserves the right to change designs and dimensions at its sole discretion at any time without notice. For certified dimensions please contact Omega 7 .
29
FMA6500 15 L/MIN AND GREATER MASS FLOW CONTROLLER
NOTES: Omega 7 reserves the right to change designs and dimensions at its sole discretion at any time without notice. For certified dimensions please contact Omega 7 .
30
APPENDIX 4
SENDING COMMANDS TO THE FMA6500
RS485
The standard FMA6500 comes with an RS485 interface. The protocol described below allows for the unit using either a custom software program or a “dumb terminal”.
All values are sent as printable ASCII characters. The start character is always !and the command string is terminated with a carriage return (line feeds are automatically stripped out by the FMA6500:
!<Addr>, <Cmd>,Arg1,Arg2,Arg3,Arg4<CR>
!
WHERE:
Addr
Cmd
Arg1 to Arg4
CR
**
Start character
RS485 device address in the ASCII representation of hexadecimal (00 through FF are valid).**
The one or two character command from the table above.
The command arguments from the table above.
Multiple arguments are comma delimited.
Carriage return character.
Default address for all units is 11.
Several examples of commands follow. All assume that the FMA6500 has been configured for address 15 (0F hex) on the RS485 bus:
1.
To put the unit in digital mode:
The FMA6500 will reply:
2.
To set the flow of 50% of FS:
The FMA6500 will reply:
3.
To get a flow reading:
The FMA6500 will reply:
!0F,M,D<CR>
!0FMD<CR>
!0F,S,50.0<CR>
!0FS50.0<CR>
!0F,F<CR>
!0F50.0<CR>
(Assuming the flow is at 50% FS)
4.
Set the high alarm limit to 5% above Set point: !0F,A,H,5.0<CR>
The FMA6500 will reply: !0FA5.0<CR>
31
32
33
34
35
36
INDEX
9
10
11
7
8
12
13
14
15
5
6
3
4
0
1
2
25
26
27
28
21
22
23
24
16
17
18
19
20
BlankEEPROM
SerialNumber
ModelNumber
SoftwareVer
TimeSinceCalHr
Options
AOutOffset_mA
AddressRS485
AInScaleV
AInOffsetV
AInScale_mA
AInOffset_mA
AoutScaleV
AoutScale_mA
SensorZero
Klag[0]
Klag[1]
Klag[2]
Klag[3]
Klag[4]
Klag[5]
Reserved
Reserved
Reserved
Reserved
Reserved
Reserved
Kgain[0]
Kgain[1]
APPENDIX 5
CALIBRATION TABLE: GAS DEPENDENT VARIABLES
NAME float float float float float float float float float float float float float
DATA
TYPE
NOTES char[10] Do not modify. For internal use only.
char[20] char[20] char[10] float Time since last calibration in hours.
uint Misc. Options.
int float float uint float char[3] Two character address for RS485 only.
float float float float
37
INDEX
37
38
39
34
35
36
29
30
31
32
33
NAME
Kgain[2]
Kgain[3]
Kgain[4]
Kgain[5]
Reserved
Reserved
Reserved
Reserved
Reserved
Reserved
ValveTbl[0][open]
DATA
TYPE float float float float float float float float float float float
NOTES
Index 0: Valve actuation. Must be 0.0.- Do Not Alter
40 ValveTbl[0][valve value] uint Index 0: Valve: D/A value - Do Not Alter
41 ValveTbl[1][flow] float Index 1: Actual valve opening in % FS. Do Not Alter
42 ValveTbl[1][valve value] uint Index 1: Valve D/A counts corresponding to flow. Do Not Alter
43 ValveTbl[2][flow ] float Do Not Alter
44 ValveTbl[2][valve value] uint Do Not Alter
45 ValveTbl[3][flow] float Do Not Alter
46 ValveTbl[3][valve value] uint Do Not Alter
47 ValveTbl[4][flow] float Do Not Alter
48 ValveTbl[4][valve value] uint Do Not Alter
49 ValveTbl[5][flow] float Do Not Alter
50 ValveTbl[5][valve value] uint Do Not Alter
51 ValveTbl[6][flow] float Do Not Alter
52 ValveTbl[6][valve value] uint Do Not Alter
53 ValveTbl[7][flow] float Do Not Alter
54 ValveTbl[7][valve value] uint Do Not Alter
55 ValveTbl[8][flow] float Do Not Alter
56 ValveTbl[8][valve value] uint Do Not Alter
57 ValveTbl[9][flow] float Index 9: Valve fully open. Must be 1.0- Do Not Alter
58 ValveTbl[9][valve value] uint Index 9: D/A count for a fully open valve. Must be 4095.- Do Not Alter
59 AutoTune Time Constant uint Do Not Alter
38
CALIBRATION TABLE: GAS INDEPENDENT VARIABLES
INDEX NAME
104
105
106
107
100
101
102
103
GasIdentifer
FullScaleRange
StdTemp
StdPressure
StdDensity
CalibrationGas
CalibratedBy
CalibratedAt
108
109
110
111
DateCalibrated
DateCalibrationDue
PID_Kp
PID_Ki
112 PID_Kd
113 SensorTbl[0][Sensor Value]
114 SensorTbl[0][Flow]
115 SensorTbl[1][Sensor Value]
116 SensorTbl[1][Flow]
117 SensorTbl[2][Sensor Value]
118 SensorTbl[2][Flow]
119 SensorTbl[3][Sensor Value]
120 SensorTbl[3][Flow]
121 SensorTbl[4][Sensor Value]
122 SensorTbl[4][Flow]
123 SensorTbl[5][Sensor Value]
124 SensorTbl[5][Flow]
125 SensorTbl[6][Sensor Value]
126 SensorTbl[6][Flow]
127 SensorTbl[7][Sensor Value]
128 SensorTbl[7][Flow] float uint float uint float unit float float uint float uint float uint float uint char[20] char[10] char[10] float float float uint
DATA
TYPE char[27] float float float float char[27] char[20]
NOTES
Index 0: Must be 120 (zero value)
Index 0: Must be 0.0 (zero PFS)
A/D value from sensor.
Actual Flow in PFS.
39
INDEX NAME
129 SensorTbl[8][Sensor Value]
130 SensorTbl[8][Flow]
131 SensorTbl[9][Sensor Value]
132 SensorTbl[9][Flow]
133 SensorTbl[10][Sensor Value]
134 SensorTbl[10][Flow]
135
136
137
DATA
TYPE uint float uint float uint float
NOTES
Flow in PFS. Should be 1.0
Note: Values will be available for selected gas only.
40
NOTES:
41
WARRANTY/DISCLAIMER
OMEGA ENGINEERING, INC. warrants this unit to be free of defects in materials and workmanship for a period of 13 months from date of purchase. OMEGA’s Warranty adds an additional one (1) month grace period to the normal one (1) year product warranty to cover handling and shipping time. This ensures that OMEGA’s customers receive maximum coverage on each product.
If the unit malfunctions, it must be returned to the factory for evaluation. OMEGA’s Customer Service
Department will issue an Authorized Return (AR) number immediately upon phone or written request.
Upon examination by OMEGA, if the unit is found to be defective, it will be repaired or replaced at no charge. OMEGA’s WARRANTY does not apply to defects resulting from any action of the purchaser, including but not limited to mishandling, improper interfacing, operation outside of design limits, improper repair, or unauthorized modification. This WARRANTY is VOID if the unit shows evidence of having been tampered with or shows evidence of having been damaged as a result of excessive corrosion; or current, heat, moisture or vibration; improper specification; misapplication; misuse or other operating conditions outside of OMEGA’s control. Components which wear are not warranted, including but not limited to contact points, fuses, and triacs.
OMEGA is pleased to offer suggestions on the use of its various products. However, OMEGA neither assumes responsibility for any omissions or errors nor assumes liability for any damages that result from the use of its products in accordance with information provided by OMEGA, either verbal or written. OMEGA warrants only that the parts manufactured by it will be as specified and free of defects. OMEGA MAKES NO OTHER WARRANTIES OR REPRESENTATIONS OF ANY KIND
WHATSOEVER, EXPRESS OR IMPLIED, EXCEPT THAT OF TITLE, AND ALL IMPLIED WARRANTIES
INCLUDING ANY WARRANTY OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PUR-
POSE ARE HEREBY DISCLAIMED. LIMITATION OF LIABILITY: The remedies of purchaser set forth herein are exclusive, and the total liability of OMEGA with respect to this order, whether based on contract, warranty, negligence, indemnification, strict liability or otherwise, shall not exceed the purchase price of the component upon which liability is based. In no event shall OMEGA be liable for consequential, incidental or special damages.
CONDITIONS: Equipment sold by OMEGA is not intended to be used, nor shall it be used: (1) as a
“Basic Component” under 10 CFR 21 (NRC), used in or with any nuclear installation or activity; or (2) in medical applications or used on humans. Should any Product(s) be used in or with any nuclear installation or activity, medical application, used on humans, or misused in any way, OMEGA assumes no responsibility as set forth in our basic WARRANTY / DISCLAIMER language, and, additionally, purchaser will indemnify OMEGA and hold OMEGA harmless from any liability or damage whatsoever arising out of the use of the Product(s) in such a manner.
RETURN REQUESTS/INQUIRIES
Direct all warranty and repair requests/inquiries to the OMEGA Customer Service Department.
BEFORE RETURNING ANY PRODUCT(S) TO OMEGA, PURCHASER MUST OBTAIN AN
AUTHORIZED RETURN (AR) NUMBER FROM OMEGA’S CUSTOMER SERVICE DEPARTMENT (IN
ORDER TO AVOID PROCESSING DELAYS). The assigned AR number should then be marked on the outside of the return package and on any correspondence.
The purchaser is responsible for shipping charges, freight, insurance and proper packaging to prevent breakage in transit.
FOR WARRANTY RETURNS, please have the following information available BEFORE contacting OMEGA:
1. Purchase Order number under which the product was PURCHASED,
2. Model and serial number of the product under warranty, and
3. Repair instructions and/or specific problems relative to the product.
FOR NON-WARRANTY REPAIRS, consult OMEGA for current repair charges. Have the following information available BEFORE contacting OMEGA:
1. Purchase Order number to cover the
COST of the repair,
2. Model and serial number of the product, and
3. Repair instructions and/or specific problems relative to the product.
OMEGA’s policy is to make running changes, not model changes, whenever an improvement is possible.
This affords our customers the latest in technology and engineering.
OMEGA is a registered trademark of OMEGA ENGINEERING, INC.
© Copyright 2001 OMEGA ENGINEERING, INC. All rights reserved. This document may not be copied, photocopied, reproduced, translated, or reduced to any electronic medium or machine-readable form, in whole or in part, without the prior written consent of OMEGA ENGINEERING, INC.
42
Where Do I Find Everything I Need for
Process Measurement and Control?
OMEGA…Of Course!
Shop online at www.omega.com
TEMPERATURE
5 Thermocouple, RTD & Thermistor Probes, Connectors, Panels & Assemblies
5 Wire: Thermocouple, RTD & Thermistor
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