Omega FMA-100 and FMA-200 Owner Manual
Below you will find brief information for Mass Flow Controller FMA 100, Mass Flow Meter FMA 200. The FMA-100 and FMA-200 are designed for the measurement and control of gas mass flow. These flow meters and controllers rely on a large diameter thermal mass flow sensor which is virtually clog-proof. The unique straight sensor tube has access ports at either end, permitting easy cleaning.
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ME FMA-100, -200 MY Mass Flow Controller & MY Mass Flow Meter e e e 908 — Ÿ Se Y | IS9XVW | — SU3EWANIVIYIS EHYENIT-NON| °N | НУЗМП 001-0 SONVE EN-YW3 ON T300W РВК | wm YO3INO An OMEGA Technologies Company (СЕ OMEGA] Operator’s Manual [= OMEGA Au OMEGA Technologies Company Servicing USA and Canada: Call OMEGA Toll Free USA Canada One Omega Drive, Box 4047 976 Bergar Stamford, CT 06907-0047 Laval (Quebec) H7L 5A1 Telephone: (203) 359-1660 Telephone: (514) 856-6928 FAX: (203) 359-7700 FAX: (514) 856-6886 Sales Service: 1-800-826-6342 / 1-800-TC-OMEGASM Customer Service: 1-800-622-2378 / 1-800-622-BEST>M Engineering Service: 1-800-872-9436 / 1-800-USA-WHENSM TELEX: 996404 EASYLINK: 62968934 CABLE OMEGA Servicing Europe: United Kingdom Sales and Distribution Center 25 Swannington Road, Broughton Astley, Leicestershire LE9 6TU, England Telephone: 44 (0455) 285520 FAX: 44 (0455) 283912 The OMEGA Complete Measurement and Control Handbooks & Encyclopedias Mm Temperature w Data Acquisition Systems w Pressure, Strain & Force »* Electric Heaters # Flow and Level # Environmental Monitoring # pH and Conductivity and Control Call for Your FREE Handbook Request Form Today: (203) 359-RUSH y Oxygen Service Caution pes р En C A OMEGA is not liable for any damages or personal injury whatsoever resulting from the use of flow meters or controllers for oxygen gas. Although OMEGA does clean its mass How meters and controllers prior to shipment, we make no claim or warranty that their cleanliness renders them safe for oxygen service. Customers must clean mass flow meters or controllers to the degree that they require for their oxygen flow applications. 7’ Instructions Unpacking Instructions Remove the Packing List and verify that you have received all equipment. If you have any questions about the shipment, please call the OMEGA Customer Service Department at 1-800-622-2378 or (203) 359-1660. When you receive the shipment, inspect the container and equipment for any signs of damage. Note any evidence of rough handling in transit. Immediately report any damage to the shipping agent. The carrier will not honor any claims unless all shipping material is saved for their examination. After examining and removing contents, save packing material and carton in the event reshipment is necessary. TABLEOF A CONTENTS /4 и .... 000000008 “ OOLOCELOETECON TEEN PO TEO 1-1 Purpose .... Ss Principle of Operation... ren nenne ee Een 1-2 1.3 Specifications monos 1-5 1.3.1 FMA-200 Mass Flow Meters 1-5 1.32 FMA-100 Mass Flow Controllers 1-7 2. Installation . sone 0000008 ..0...................[... e coscocococcad” | 2.1 Mechanical Installation 2-1 22 Plumbing Connections 2-1 2.3 Electrical Connections. . 2-3 2.3.1 20-Pin Edge Card Connector Pin Assignments..................- 2-5 3. Oper ation.... PT... ® 00000000000000508008 + етот торе ceed" 1 3.0.1 Over-Range Indication 3-1 3.0.2 Cold Sensor Lockout Circuit 3-1 3.1 Output Options, Meters and Controllers 3-2 32 Control Operation 3-2 3.2.1 Set Point Input Signal 3-2 3.2.1.1 Local Set Point Potentiometer 3-3 3.2.2 Auto Shut-Off 3-3 3.2.3 Valve Off, TTL Compatible (Pin J) Electromagnetic Valves 34 3.24 Valve Monitor Purge Function (Pin D) .. 3-4 3.2.5 Soft Start Option, Electromagnetic Valves 3-5 4. K Factors and Gas Tables ........o0occccococecoocenccocaococccccccoee ...... -1 4.1 For a Single Gas ….……….siemensenenesensenennensennesnnnnne 4-1 4.2 For Dual-Gas Mixtures 4-4 5. Maintenance ++... r.00005000000050000000005008 005000000 50000000005800008 co... = 1 5.1 Electronics Maintenance 5-1 52 Flow Path Maintenance 5-1 5.2.1 Laminar Flow Element.... 5-1 5.2.2 Sensor Maintenance ....... 5-2 5.2.3 Valve Maintenance.................recemecccccooccecocen reee canne acero ee 5-5 LS CONTENTS / 4 и 6. Calibration Procedure .….…... tttdé0000000HOSHHHHHHHHOHE +=... 00... 6-1 6.1 FMA-200 Mass Flow Meter Calibration Procedure............ 6-1 6.2 FMA-100 Calibration Procedure ...........—.......-.seccioronccncenene 6-3 6.2.1 Piston Tube Calibration Procedure..... 6-4 6.2.2 Transfer Standard Calibration Procedure..... 6-5 6.3 Response Adjustment. 6-6 7. Trouble-Shooting 0000000000$ ... 00.4... .......... A | 7.1 General 7-1 72 Trouble-Shooting Guide.. 7-1 Index of Appendix A. FMA-200 Schematic ... .. . A-1 B. FMA-100 Schematic . B-1 C. FMA-100 Low Flow Exploded View, Mechanical ............. C-1 D. List of Bypasses and Orifice Sizes, Low Flow .................... D-1 E. Mounting Dimensions, Mass Flow Meters and Controllers „E-1 F. Recommended Wire Gauges for Flow Meters and Controllers . F-1 G. Conversion of Flow Rate to Other T and P Conditions ....G-1 Introduction This manual covers operation and maintenance of the OMEGA® FMA-100 Mass Flow Controller and FMA-200 Mass Flow Meter. Read the sections on Specifications, Installation, Operation and Maintenance before attempting to operate the device. Calibration of these instruments is performed on a primary standard calibration system. Sections pertaining to K-factors and Calibration are not essential reading, but may offer insight into how the instrument operates. If you are attempting to use a primary standard calibration device to re-calibrate your flow meter or controller yourself, an understanding of these sections will be essential. A Trouble-Shooting Section is included to assist you with any difficulties either in the initial installation or maintenance of your instrument. Using this section will often save you time and effort, and lead you directly to the problem. If it does become necessary to contact us, having read the Trouble-Shooting Section prior to the call will facilitate our communication. We do not recommend the use of a transfer standard method of calibration with any of these instruments, as this will make an accurate calibration of less than 1% (of full scale) technically impossible. For the device to operate at peak performance, it must be calibrated on a primary standard. 1.1 Purpose The FMA-100 and FMA-200 are designed for the measurement and control of gas mass flow. These flow meters and controllers rely on a large diameter thermal mass flow sensor which is virtually clog- proof. The unique straight sensor tube has access ports at either end, permitting easy cleaning. All wetted surfaces are constructed of 316 stainless steel. Viton seals are standard. Controllers incorporate an electromagnetic proportional control valve. 1-1 E Introduction These instruments utilize precision analog circuitry with a five breakpoint linearizer, providing highly accurate calibration specifications. Available in a card-edge configuration, the FMA-100 and FMA-200 series has proven it can operate in a variety of exacting and extreme conditions. 1.2 Principle of Operation The operating principle of the FMA-100/200 is based on heat transfer and the first law of thermodynamics. The process gas enters the instrument's flow body and divides into two flow paths, one through the sensor tube, the other through the laminar flow element. RR OT == SENSOR | | || TUBE P, Po — — — — m ть L LAMINAR FLOW BYPASS фт, + <, fxm (1+ Msm)=km, Figure 1-1 Flow Paths Here, a pressure drop P,-P, is created, forcing a small fraction of the total flow to pass through the sensor tube (m1), which is then monitored. A straight sensor tube is mounted on the side of the laminar flow path. Two resistance temperature detector (RTD) coils around the sensor tube direct a constant amount of heat (H) into the gas stream. Introduction u CONSTANT HEAT, H FIRST LAW OF THERMO. (HEAT IN = HEAT OUT) Figure 1-2 Measuring Sensor Flow In actual operation, the gas mass flow carries heat from the upstream coil to the downstream coil. The resulting temperature difference (AT) is detected by the RTD coils. т Та AY a, | @ ‘ T т, ‹ р 4 ma T Ta AE. N T, m-o Ta 0 X L Figure 1-3 Sensor Temperature Distribution 1-3 E Introduction Figures 1-2 and 1-3 show the mass flow through the sensor tube as inversely proportional to the temperature difference of the coils. The coils are legs of a bridge circuit with an output voltage in direct proportion to the difference in the coils’ resistance; the result is the temperature difference (AT). Two other parameters, heat input (H) and coefficient of specific heat (C,) are both constant. Although the output is not intrinsically linear with mass flow, as is often claimed, it is nearly linear over the normal operating range. The FMA-100/200 provides precision circuitry with a five breakpoint linearizer to assure a 0.5% full scale linearity specification. LINEAR RANGE Figure 14 Output Signal In the case of a mass flow controller, once the gas flows through the monitoring section, it is then controlled by the built-in servo-control valve, a proprietary high-efficiency electromagnetic valve. The normally closed valve is similar to an on/off solenoid valve, except that the current to the valve coil—and hence the magnetic field—is modulated so that the ferromagnetic valve armature (or valve plug) assumes the exact height above the valve’s orifice required to maintain the valve’s command flow. The result is nearly infinite resolution. All controllers can be provided with a “Soft-Start’ option for those processes that require it. 1-4 1.3 Specifications (All specifications are subject to change without notice, due to continuous improvements in design and manufacture.) 1.3.1 FMA-200 Mass Flow Meters Flow Ranges (! Low Flow Body 0-10 SCCM to 0-10 SLMÍ?I Gases Specify when ordering. Output Signal Linear 0-5 Vdc standard; 1000 ohms minimum load resistance Input Power FMA-200 Transducer: +15 Vdc of 80 mA, 1.2 Watts; -15 Vdc at 10 mA, 0.15 Watts Accuracy +1% of full scale induding linearity over 15-25°C and 10-40 psia (0.70 to 2.8 kg/em?); +2% of full scale including linearity over 5-50°C and 5-150 psia (0.35 to 10 kg/cm?), special calibration with +1% full scale accuracy at a specific temperature and pressure is available Repeatability +0.2% of full scale Temperature Coefficient 0.1% of full scale per 1°C, or better Pressure Coefficient 0.1% of full scale per 1 psi (0.07 kg/cm?), or better 1-6 7 Introduction Response Time 300 ms time constant; 1 second (typical) to within +2% of final value over 25 to 100% of full scale Pressure Drop 0.08 psi (0.006 kg/em?, 6 em of water) differential maximum Gas Pressure 500 psi (35 kg/cm?) gauge maximum; 30 psi (2 kg/cm?) gauge optimum. Leak Integrity 5 x 10° SCCS helium maximum to outside environment Temperature Range 5 to 50°C, gas and ambient Wetted Materials 316 stainless steel; Viton O-rings standard; Neoprene and 4079 Kal-Rez O-rings optional, others on special order Gas Fittings Swagelok, in 1/4", 3/6", 1/2" sizes Net Weight 1.41 lb (3.11 kg) (1) Flow ronges specified are for an equivalent flow of N, at 760 mm Hg and 21.1°C or 70°F. 2} For certain gases only. Confirm with factory. Trademarks: Viton, Neoprene, Kal-Rez—E.l. DuPont de Nemours and Co.; Swagelok, VCO, VCR-C Fitting Co. 1.3.2 Model FMA-100 Mass Flow Controllers Flow Ranges!" Low Flow Body 0-10 SCCM to 0-10 SIMI?) Gases Specify when ordering. Output Signal Linear 0-5 Vdc standard; 1000 ohms minimum load resistance input Power FMA-100 Controller: +15 Vdc ot 80 mA, 1.2 Waits and -15 Vde at 175 mA, 2.6 Watts Accuracy +1% of full scale induding linearity over 15-25°C and 10-60 psia (0.70 to 2.8 kg/cm?); £2% of full scale including linearity over 5-50°C and 5-150 psia (0.35 to 10 kg/cm?), special calibration with +1% full scale accuracy at a specific temperature and pressure is available Repeatability +0.2% of full scale Temperature Coefficient 0.1% of full scale per 1°C, or better Pressure Coefficient 0.01% of full scale per 1 psi (0.07 kg/em?), or better Introduction Response Time 300 ms time constant; 1 second (typical) to within +2% of final value over 25 to 100% of full scale; 1.5 second time constant AP Required 5-50 psi {0.35-3.5 kg/cm?) differential standard; 30 psi (2 kg/cm?) differential optimum Gas Pressure 500 psi (35 kg/cm?) gauge maximum, 30 psi (2 kg/cm?) gauge optimum Leak Integrity 5 x 10° SCCS helium maximum to outside environment Temperature Range 5 to 50°C, gas and ambient Wetted Materials 316 stainless steel; Viton O-rings and valve seats standard; Neoprene and 4079 Kal-Rez optional; PFA Teflon valve seats optional; others on special order Gas Fittings Swagelok, in 1/4", 3/8", 1/2" sizes Net Weight 2.00 lb (4.41 kg) Control Valve Orifice Diameter Low Flow Bodies: 0.010, 0.020, 0.040, 0.055, 0.063, 0.073, 0.094, 0.125 in. Introduction Command Signal 0.5 Vde; greater than 20 Megohms input impedance Control Range 2-100% of full scale; auto shut-off below 2% (other shut off values available); shut off circuit may be disabled (consult factory) Valve Leak Rate 1 x 104 SCCS helium maximum (1 Flow ranges specified are for an equivalent flow of N, at 760 mm Hg and 21.1°C or 70°F. (2) For certain gases only. Confirm with factory. Trademarks: Viton, Neoprene, Kal-Rez—E.. Dupont de Nemours and Co.; Swagelok, VCO, VCR-Crawford Fitting Co. # Introduction | Notes Installation 2.1 Mechanical Installation To ensure a successful installation, inlet and outlet tubing should be in a clean state prior to plumbing the transducer into the system. The shipping caps covering the inlet/outlet fittings should not be removed until immediately prior to installation. Do not locate the transducer in areas subject to sudden temperature changes, drafts, or near equipment radiating significant amounts of heat. Allow adequate space for cable connectors and wiring. Be sure the arrow on the side of the transducer points in the direction of flow. If the flow meter or controller is to be mounted in any position other than horizontal and was not calibrated specifically for your application, the transducer will require a zero adjustment for proper operation. Contact OMEGA for instructions on how to proceed, or follow zero adjust in Section 6.1. 2.2 Plumbing Connections Flow meters and controllers using the Low Flow Body have specially constructed inlet fittings containing a filter screen and threads for mounting the laminar flow element. These fittings should not be removed or exchanged unless the transducer is to be cleaned and re-calibrated. See Figure 2-1. "O”-RING CD 4 LAMINAR INLET FITTING FLOW ELEMENT (SWAGELOK* SHOWN) ———————D INLET FILTER SCREEN — FLOW Figure 2-1 Low Flow LFE E Installation Transducers are supplied with 1/4" compression fittings. For the first installation of 1/4" to 1" (6 mm to 25 mm) Swagelok fittings: 1. Insert the tubing into the fitting. Make sure that the tubing rests firmly on the shoulder of the fitting and that the nut is finger tight. Scribe the nut at the 6 o' dock position. While holding the fitting body steady with a backup wrench, tighten the nut 1-4 tums, watching the scribe mark make one complete revolution and continue to the 9 o'clock position. For 1/16", Ye" and 3/6" (2, 3 and 4 mm) sizes, fighten 3/4 turn from finger tight. After initial installation, reconnect fittings using a wrench so that the nut seats tightly against the fitting. CAUTION Do not mix or interchange parts of tube fittings made by different manufacturers. Finally, check the system's entire flow path thoroughly for leaks before proceeding to the Operations Section. Cr WARNING IF the gas contains any particulate matter, an in-line filter is recommended. When installing flow controllers, there can be no restrictions (such as valves, tubing or piping internal diameters, reducers, efc.) upstream or downstream of the FMA-100 less than the valve orifice diameter. Failure to comply with this requirement will result in severely impaired performance and possible oscillations in flow controllers. FN All instruments are leak-tested prior to shipping. To check your installation, test fittings only. If liquid enters the sensor compartment or flow body, your warranty may be found invalid. Minimum Restriction Diameter Flow Ranges Relative to N2 (Valve Orifice Diameter), Inches Electromagnetic Valves: 0-10 to 0-1000 SCCM 0.020 0-2 to 0.5 SIM 0.040 0-10 SIM 0.040 2.3 Electrical Connections Meters and controllers require a +15 Vdc and a -15 Vdc power supply and a readout device. Additionally, controllers require a 0-5 Vdc setpoint input. Meters and controllers are connected to the power supply, setpoint control and readout signals through a 20-pin card-edge connector. Many installations will include a power supply / readout display (with front-panel mounted setpoint controls when required). This insures a high quality, integrated system for flow monitoring and control. Moreover, all functions will be easily accessible to you, providing you with the most versatile system available. 2-3 2-4 Installation CASE El Al SET COM | 2 B| COM vouT | 3] C| com +15 [4 D | TEST VREF |6 F| -15 7 G +15 “el Г 4-20 E E COM [10 J| OFF _ 10 | J | Figure 2-2 Pin Assignments GNT 0 ; Installation 2.3.1 20-Pin Edge Card Connector Pin Assignments PIN NO. NG NEO) Chassis Ground Common/Output Low Output High +15 Vdc Supply No Connection +5 Vdc for Local setpoint Not Available-Connector Key +15 Vdc Supply No Connection OW lo IN a lo |N |O IN | — o Common > Command Setpoint Input (0-5 Vdc) B Common & / C Common Valve Test Point (Electromagnetic Valve) Purge © No Connection -15 Vdc Supply Not Available-Connector Key No Connection ! No Connection y 3 Valve OF wha V4) Le A pr 725 / LX 10) In | Voltage при as à setpoint O Y Ц volts р 7 Installation Notes 2-6 | Operation 3.0.1 Over-Range Indication Once the transducer has been installed and the system has undergone a complete leak check, apply power and allow at least 15 minutes of warm-up time prior to use. When power is first applied, the output signal from the transducer will remain fixed at a much higher than normal level until the sensor warms up to its normal range of operating temperature. When the sensor reaches its minimum operating temperature, the output signal will resume a normal zero reading. See Section 3.0.2 for further details. Once the sensor has been allowed to properly warm up, the transducer is ready for operation. Since the output signal is linear, flow can be read directly. The normal response time of a transducer is 1 second to within 2% of final value. In systems using mass flow meters, where it is possible for overflow conditions to occur, insert a valve or critical orifice in the line to limit the flow to approximately 25% above the full scale range of the meter. Doing this greatly decreases the recovery time from overflow conditions. 3.0.2 Cold Sensor Lockout Circuit The mass flow meter and the mass flow controller incorporate an over-range circuit. In the case of a controller, if a fault condition is detected that could result in uncontrolled flow (with the valve wide open), the safety circuit will automatically close the valve. The circuit operates by monitoring the temperature of the sensor elements and forcing the output signal to a fixed high level when temperature falls below a preset limit. There are several conditions under which this could occur: ° Operation at a temperature below that for which the instrument is rated 3-1 Operation ° Power failure while running at or near full scale. Upon resumption of power, the valve will remain closed until minimum operating temperature is again reached. . Sensor failure The operation of this circuit can be verified by observing the signal output during power up. In some instances, this circuit may be undesirable. The cold sensor lock-out circuit and/or over-range indicator can be disabled by removing CR1 from the main circuit board (refer to Appendices A, B and C). 3.1 Output Options, Meters and Controllers Standard output for FMA-100/200 meters and controllers is a 0-5 Vdc signal, which directly corresponds to the 0-100% mass flow full scale range. 3.2 Control Operation 3.2.1 Setpoint Input Signal The setpoint input signal is a direct linear representation of 0-100% of the mass flow full scale value. (A 0 Vdc setpoint will cause a condition of 0% flow to occur and a 5.00 Vdc setpoint will cause a flow condition equivalent to 100% of flow to occur.) When the command (setpoint) signal is applied, the flow controller will respond to changes in the setpoint in 1 second to within 2% of final value. The standard setpoint command is 0-5 Vdc. 3-2 TO PIN 6 TO PIN A TOPINZ, B,C, OR 10 Figure 3.1 Local Setpoint Potentiometer 3.2.1.1 Local Setpoint Potentiometer A highly regulated +5 Vdc output signal is available at Pin 6 of the 20-pin card-edge connector for the connection of a local (stand alone) setpoint potentiometer. Any potentiometer value between 5K and 100K may be used. One leg of the potentiometer is connected to the +5 Vdc reference (VREF), the other leg is connected to common (Pin B), and the wiper of the potentiometer is connected to the setpoint input (Pin A). If the setpoint input is not connected to some type of command control device, the valve on/off switch must be activated in the off position. If no setpoint command is present on a controller when powered-up and the valve is not switched off, the valve will drift wide open. 3-3 . 3.2.3 3-4 Auto Shut-Off All flow controllers are normally provided with an Auto Shut-Off feature that will close the valve at a command signal level of 2% of full scale, or less. Valve Off, TIL Compatible (Pin J) Electromagnetic Valves For all models equipped with an electromagnetic valve, on/off control is provided via a TTL level switch. This option can be utilized manually by connecting an on/off switch between Pins 10 and J of the 20-Pin card-edge connector. Normal operation resumes when Pin J is brought high or left floating. Valve Monitor Purge Function (Pin D) During normal operation, the mass flow controller's valve voltage can be monitored by connecting a voltmeter between Pin D and Pin F of the 20-Pin card-edge connector. The voltage at Pin D is normally negative. The valve purge function will be activated when Pin D is connected to ground. When this occurs, the valve is driven fully open regardless of the setpoint input. Furthermore, the purge function will override any valve-off function. Purging non-reactive gases: Purge the FMA-100/200 with clean, dry nitrogen or argon for a minimum of 2 hours. Purging reactive gases: One of the following methods may be used: Cycle purge. This is done by alternately evacuating and purging the FMA-100/200 for 2 to 4 hours with clean, dry nitrogen or argon. or Purge the FMA-100/200 with clean, dry nitrogen or argon for 8 to 24 hours or Evacuate the FMA-100/200 for 8 to 24 hours. K-Factors and Gas Tables The following tables provide K-factors and thermodynamic properties of gases commonly used with mass flow controllers and meters. The purpose of these tables is two-fold: 4.1 For a Single Gas ° Calibrating an “actual” gas with a reference gas. This is particularly useful if the actual gas is not a common gas or if it is toxic, flammable, corrosive, etc. ° Interpreting the reading of a flow meter or flow controller which has been calibrated with a gas other than the actual gas. In applying the tables, the following fundamental relationship is used: Q1/Q = К/К (1) Where: Q = The volumetric flow rate of the gas referenced to standard conditions of 0°C and 760 mm Hg (SCCM or SLM), K = The “D” factor defined in equation (6) below, (9, = Refers to the “actual” gas, and (), = Refers to the “reference” gas. The K-factor is derived from the first law of thermodynamics applied to the sensor tube, as described in Figure 1.2, page 3: m CpAT N H = (2) Where: H = The constant amount of heat applied to the sensor tube, m = The mass flow rate of the gas (gm/min), Cp = The coefficient of specific heat of the gas (Cal/gm); C, is given in the Table (at 0°C), AT = The temperature difference between the downstream and upstream coils, and N = A correction factor for the molecular structure of the gas given by the following table: 4-1 4-2 / K-Factors and Gas Tables Minimum Restriction Diameter Flow Ranges Relative to N2 {Valve Orifice Diameter), Inches Electromagnetic Valves: 0-10 to 0-1000 SCCM 0.020 0-2 to 0.5 SIM 0.040 0-10 SIM 0.040 The mass flow rate, M, can also be written as: m = pQ 3) Where: p = the gas mass density at standard conditions (g/1); p is given in the tables (at 0°C, 760 mm Hg). Furthermore, the temperature difference, AT, is proportional to the output voltage, E, of the mass flow meter, or: AT = aE (4) Where: a = A constant. If we combine equations (3) and (4), insert into equation (2), and solve for Q, we get: О = 6N/pC-) (5) Where: b = H/aE = a constant if the output voltage is constant. For our purposes, we want the ratio of the flow rate, Q,, for an actual gas to the flow rate of a reference gas, Q,, which will produce the same output voltage in a particular mass flow meter or controller. K-Factors and Gas Tables We get this by combining equations (1) and (5): Q1/Q2 = К/К, = (N1/p1Cp1)(N2/p2Cp2) (6) Please note that the constant B cancels out. Equation (6) is the fundamental relationship used in the accompanying tables. For convenience, the tables give “relative” K-factors, which are the ratios K1/K2, instead of the K-factors themselves. In the third column of the tables, the relative K-factor is Kactual/ Kreference» Where the reference gas is a gas very close molecularly to the actual gas. In the fourth column, the relative K-factor is Kactual/ KN> where the reference gas is the commonly used gas, nitrogen (N>). The remaining columns give Cy and p, enabling you to calculate K; /K; directly using Equation (6). In some instances, K,/K» from the tables may be different from that which you calculate directly. The value from the tables is preferred because in many cases it was obtained by experiment. Each OMEGA FMA-100/200 mass flow meter and controller is calibrated with primary standards using the actual gas or a molecularly equivalent reference gas. The calibration certificate accompanying your instrument will cite the reference gas used. Example 1 An FMA-100/200 is calibrated for nitrogen (N,), and the flow rate is 1000 SCCM for a 5.000 Vdc output signal. The flow rate for carbon dioxide at a 5.000 Vdc output is: Uco! On = Keop/ Kip» Or Осо»= (0.74/1.000)1000 = 740 SCCM 4-3 A K-Factors and Gas Tables Example 2 An FMA-100/200 is calibrated for hydrogen (Hz), and the flow rate is 100 SCCM for a 5.000 Vdc output signal. The flow rate for nitrous oxide (N,0) is found as follows: | Qnz0/QH2 = Kn20/KHz, OT Qnpo = (0.71/1.101) 100 = 70.3 SCCM Note that the K-factors relative to nitrogen must be used in each case. Example 3 We want an FMA-100/200 to be calibrated for use with dichlorosilane (SiH,CL,) at a 100 SCCM full scale flow. We wish to use the preferred reference gas Freon-14 (CF). What flow of CF, must we generate to do the calibration? OsiHyCL2/Qcra = KsiHaCL2/ÉCF4 100/Qcr, = 0.869 Qcr,=100/0.869 = 115 SCCM 4.2 For Dual-Gas Mixtures 4-4 Equation (6) is used for gas mixtures, but we must calculate N/p Cp for the mixture. The equivalent values of p, Cp, and N for a dual gas mixture are given as follows: The equivalent gas density is: p = (m/mr)p; + (m2/ MT) P2 Where: m 7= ту + m» = Total mass flow rate (gm/min), ()ı = Refers to gas #1, and ()= Refers to gas #2. The equivalent specific heat is: Cp = FiCpi + F2Cp2 K-Factors and Gas Tables Where: Fy =(mp;)/(m1p) and Fz = (mpy)/(m 1p). The equivalent value of N is: М = (та 1/ пот) N, + (m3/ MT) N2 The equivalency relationships for p, Cp, and N for mixtures of more than two gases have a form similar to the dual-gas relationship given above. Y A Please note that if you have a mass flow meter calibrated for a gas such as methane and wish fo use the K-factors fo measure a gas such as air, that the inaccuracy of the measurement can range from +5 to 10%. The use of K- factors is, at best, only a rough approximation and should not be used in applications that require better than +5 to 10% accuracies. Also certain gases, in similar “families” will work exceptionally well with K-factors; however, those instances are only true when similar thermal properties of the gas are present. 4-5 4-6 K-Factors and Gas Tables Actual Gas Acetylene C,H, Air Allene (Propadiene) C,H, Ammonia NH, Argon Ar Arsine AsH, Boron Trichloride BCI, Boron Trifluoride BF, Bromine Br, Boron Trbromide Br, Bromine Pentafiuoride BrF, Bromine Trifluoride BrF, Bromotrifloromethane (Freon-13 B1) CBrF, 1,3-Butadiene CH, Butane CH,, 1-Butane CH, 2-Butane C,H, CIS 2-Butane C,H, TRANS Carbon Dioxide CO, Carbon Disulfide CS, Carbon Monoxide CO Carbon TetrachlorideCCl, Carbon Tetrafluoride {Freon-14) CF, Carbonyl Fluoride COF, Carbonyl Sulfide COS Chiorine CL, Chiorine Trifluoride CIF, Chiorodifluoromethane (Freon-22) CHCIF, Chloroform СНС, Chioropentafluoroethane {Freon-115) C,CIF, Chlorotrifluromethane (Freon-13) CCIF, Cyanogen C,N, Cyanogen Chioride CICN Cychiopropane C,H; Deuterium D, Diborane BH, Dibromodifiuoromethane CBr,F, Dichlorodifiuoromethane {Freon-12) CCLF, Dichlorofiuoromethane (Freon-21) CHCLF Dichiloromethytsitane (CH3),SiCl, Dichiorosilane SiH,Cl, Dichliorotetrafivoroethane (Freon-114) C,CLF, 1,1-Difluoroethylene {Freon-1132A) CHF, Ret. Gas C,H. Na CHCIF, №0 KFacior KFactor Rel.to Relative Ref. Gas .973 1.00 .934 1.028 1.000 943 ‚891 1.108 1.140 826 565 ‚826 804 695 ‚565 652 .704 632 1.042 1.007 1.000 673 1.000 ‚907 .869 1.000 847 521 826 ‚7526 1.024 1.00 1.00 ‚956 413 1.021 .760 913 543 869 478 N2 ‚30 ‚324 74 1.00 31 42 8888% Cp (Caÿg) 4036 240 352 492 ‚1244 ‚1167 ‚1279 1778 ‚0539 0647 ‚1369 ‚1161 1113 „3514 4007 ‚3648 ‚336 ‚374 2016 1428 ‚2488 ‚1655 1654 .1710 ‚1651 314 .1650 .1544 .1309 .164 153 2613 3177 A722 15 075 ‚1432 140 „1882 150 .1604 224 Density Elastomer (9/7) O-Ring" Valve @ 0°C Seat 1.162 1.293 1.787 KR ‚760 NEO NEO 1.782 3.478 KR 5.227 KR KR 3.025 KR 7.130 11.18 KR 7.803 KR 6.108 KR 6.644 2.413 2.593 NEO KR 2.503 NEO KR 2.503 NEO KR 2.503 1.964 3.397 1.250 6.860 KR 3.926 KR 2.945 2.680 3.163 KR 4.125 KR 3.858 KR 5.326 KR 6.892 KR 4.660 KR 2.322 2.742 KR 1.877 KR 1.799 1.235 KR 9.362 KR 7.76 KR 5.395 KR 4.952 KR 5.758 KR 4.506 KR 7.626 KR 2.857 KR K-Factors and Gas Tables Actual Gas Ref. KFactor KFactor Cp Density Elastomer Gas Rel. to Relative (Calg) ot) O-Ring* Valve Rel. Ges N2 ec Seat Dimethylamine (CH,),NH CHCIF, -804 .37 366 2.011 KR Dimeyl Ether (CH,),O CHCIF, 847 .39 ‚3414 2.055 KR 2.2-Dimethylpropane C,H,, CHCIF, 423 22 3914 3.219 KR Ethane C,H, CHCIF, 1.086 50 ‚4097 1.342 Ethanoi C,H,O CHCIF, 856 39 ‚3395 2.055 KR EthylAcetylene CH; CHCIF, .703 32 3513 2.413 KR Ethyt Chloride C,H,Cl CHCIF, 84 39 244 2.879 KR Ethylene C,H, C,H, 1.000 60 1365 1.251 Ethylene Oxide C;H,) CHCIF, 1.130 52 268 1.965 KR Fluorine F, М, ‚980 98 ‚1873 1.695 KR Fluoroform (Freon-23) CHF, CHCIF, 1.086 50 176 3.127 KR Freon-11 CCLF CHCIF, 717.33 1357 6.129 KR Freon-12 CCI,F, CHCIF, .760 35 .1432 5.395 KR Freon-13 CCIF, CHCIF, 826 138 ‚153 4.660 KR Freon-13 81 CFrF, CHCIF, 804 37 ‚1113 6.644 KR Freon-14 CF, CHCIF, 1.000 42 .1654 3.926 Freon-21 CHCLF CHCIF, 913 42 .140 4.952 KR Freon-22 CHCIF, CHCIF, 1.000 46 .1544 3.858 KR Freon-113 CCLFCCIF, CHCIF, 434 20 .161 8.360 KR Freon-114 C,CLF, CHCIF, 478 22 160 7.626 KR Freon-115 C,CIF, CHCIF, 521 24 .164 6.892 KR Freon-C318 CF, CHCIF, 369 A7 185 8.397 KR Germane GeH, C,H, .950 57 .1404 3.418 Germanium Tetrachloride CHCIF, 586 27 .1071 9.565 KR GeCL, Helium He He 1.000 1.454 1.241 .1786 Hexafluoroethane CzF, CHCIF, 521 .24 .1834 6.157 KR (Freon-116) Нехапе С.Н, CHCIF, 391 ‚18 ‚3968 3.845 KR Hydrogen H, H, 1.000 1.01 3.419 .0899 Hydrogen Bromide HBr N; 1.000 1.00 .0861 3.610 KR Hydrogen Chioride HCI N, 1.000 1.00 ‚1912 1.627 KR KR H MOS N, 1.000 1.00 KR Hydrogen Cyanide HCN N; 1.070 76 ‚3171 1.206 KR Hydrogen Fluoride HG N, 1.000 1.00 3479 893 KR KR Hydrogen lodide HI N, 1.000 1.00 ‚0545 5.707 KR Hydrogen Selenide H,Se N,O 1.112 .79 .1025 3.613 KR Hydrogen Sulfide H,S мо 1.126 80 .2397 1.520 KR lodine Pentafluoride IF, CHCIF, 543 25 ‚1108 9.90 KR Isobutane CH(CH,), CHCIF, 586 .27 3872 2.67 KR isobutylene C,H, CHCIF, 630 .29 .3701 2.503 KR Krypton Kr Ar 1.002 1.453 .0593 3.739 Methane CH, №0 1.014 72 5328 .715 Methanot CH,OH C,H, 976 58 3274 1.429 Methyl Acetylene C,H, CHCIF, 94 43 3547 1.787 KR Methyl Bromide CH,Br C,H, 966 58 1106 4.236 Methyl Chloride CH,CI C,H, 1.050 63 ‚1926 2.253 KR Methyl Fluoride CH,F C,H, 957 68 .3221 1.518 KR Methyl Mercaptan CH,SH CHCIF, 1.130 52 ‚2459 2.146 KR Methyl Trichiorositane CHCIF, 543 25 .164 6.669 KR (CH,) SiCl, Molybdenum Hexafluoride CHCIF, ‚456 21 .1373 9.366 KR MoF, Monoethylamine C,H,NH, CHCIF, .760 35 387 2.011 KR Monomethylamine CH,NH, CHCIF, 850 51 4343 1.386 KR 4-7 K-Factors and Gas Tables Actual Gas Neon NE Nitric Oxide NO Nitrogen N, Nitrogen Dioxide NO, Nitrogen Trifluoride NF, Nitrosyl Chloride NOCI Nitrous Oxide NO Octafluorocyctobutane (Freon-C318) CF, Oxygen Difluoride OF, Oxygen O, Ozone O, Pentaborane BH, Pentane CoHl, —* Perchioryl FluorideCIO,F Perfluoropropane C,F, Phosgene COC, Phosphine PH, Phosphorous Oxychloride POCI, Phosphorous Pentafluoride PH, Phosphorous Trichloride РС, Propane C,H, Propylene C,H, Silane SiH, Silicon Tetrachioride Sulfur Dioxide So, Sultur Hexafluoride SF, Sulturyt Fluoride SO,F, Teos (Freon-11)CCLF Trichlorisiiane SiHCl, 1,1,2-Trichloro-1,2,2 Trifluorethane (Freon-113) CCLFCCIF, Trisobutyt Aluminum (CHA Titanium Tetrachloride TiCl, Trichloro Ethylene CHCl, Trimethylamine (CH,),N Tungsten Hexasfuoride WF, Uranium Hexafluoride UF, Vinyl Bromide CH,CHBr Vinyl Chloride CH,CHCI Xenon Xe Ret. Gas Ar № N, №0 CHCIF, CH, NO CHCIF, C,H, № N, CHCIF, CHCIF, CHCIF, CHCIF, CHCIF, N,O CHCIF, CHCIF, CHCIF, CHCIF, CHCIF, CH, CHCIF, CHCIF, N,0 CHCIF, CHCIF, N, CHCIF, CHCIF, CHCIF, CHCIF, CHCIF, CHCIF, CHCIF, CHCIF, CHCIF, CHCIF, CHCIF, CHCIF, Ar KFactor KFactor Rel. to Relative Ref. Gas N2 1.006 1.46 .990 .99 1.000 1.00 1.042 74 1.043 ‚48 1.016 61 1.000 71 .369 47 1.050 ‚63 1.000 1.00 446 446 ‚565 ‚26 ‚456 21 .847 .39 .369 .174 ‚956 ‚44 1.070 .76 .782 .36 652 30 652 30 ‚782 36 .891 41 1.000 60 608 28 .760 35 ‚900 .717 717 132 061 .586 27 £95 32 .608 28 552 .25 434 20 1.000 46 1.043 48 ‚993 1.44 Cp Den (Calg) (9/7) @ 0°C 246 2328 2485 ‚1933 1797 ‚1632 185 1917 2193 ‚38 398 1514 197 .1394 2374 1324 ‚1610 1250 3885 ‚3541 ‚3189 ‚1270 1691 .1488 .1592 .182 .1357 .1380 ‚161 508 .120 .163 .3710 1.339 1.25 2.052 3.168 2.920 8.397 2.406 1.427 2.144 2.816 3.219 4.571 8.388 4.418 1.517 6.843 5.620 6.127 1.967 1.877 1.433 7.580 4.643 2.858 6.516 4.562 4.64 6.129 6.043 8.360 Elastomer EPDM KR 8.848 8.465 5.95 2.639 0810 13.28 .0888 15.70 ‚1241 4.772 ‚12054 2.788 0378 5.858 KR KR KR 3333 KR KR KR KR KR KR KR KR KR KR KR KR KR KR KR KR KR Teflon PFA KR KR KR ” Maintenance 5.1 Electronics Maintenance The electronic components in both the FMA-100 and FMA-200 essentially require no maintenance. If repair or recalibration is needed, return the instrument to OMEGA: This is usually the most cost effective and reliable means. 5.2 Flow Path Maintenance The flow path of the FMA-100/200 is a 316 stainless steel (wetted magnetic parts of solenoid valve are 430F stainless steel) with Viton, Neoprene, or Kal-Rez seals. Inspect and clean flow path periodically as required. № 5 When toxic or corrosive gases are used, purge unit 5.2.1 thoroughly with inert dry gas before disconnecting from gas line. Never return a gas mass flowmeter/ controller to OMEGA or any other repair/ calibration facility without fully neutralizing any toxic gases trapped inside. If the unit is to be returned to the factory and has been used with a toxic or corrosive gas, enclose a MSDS (Material Safety Data Sheet) with the unit upon its return. (Please see Section 3.2 for purge methods). Laminar Flow Element The laminar flow element (LFE) is a precision flow divider which diverts a preset amount of flow through the sensor tube. The LEE is made of precision machined 316 stainless steel. The particular LFE used depends on the gas and flow range of the instrument and is identified by the number scribed on its downstream end. # Maintenance “O"-RING O” O 4 LAMINAR INLET FITTING FLOW ELEMENT (SWAGELOK SHOWN) FLOW INLET FILTER SCREEN — Figure 5-1 Low Flow LFE Low Flow Body LFE—For low flow transducers, the LFE may be accessed by unscrewing the main inlet fitting and removing it from the flow body. The LFE is screwed into the inlet fitting, which has been specially machined for this purpose. An inlet filter screen is held in place in the inlet fitting by the LFE. Disassemble by holding the fitting steady with a wrench and unscrewing the LFE with a medium flat-tipped screwdriver. 5.2.2 Sensor Maintenance The FMA-100/200 sensor tube is straight and has a relatively large 0.031" LD., thus making inspection and cleaning much easier than the small-1.D., U-shaped sensor tubes commonly used in other flow controllers. СООО AUTION A Do not remove the sensor compariment cover plate except for sensor or O-ring replacement; doing so can alter calibration. Sensor maintenance consists of inspecting the sensor flow path and checking the sensor for proper electrical function. Maintenance [ 1] 4] L 0.028" TO 0.030" DIA. ACCESS PORTS CLEANING ROD / Figure 5.2 Sensor Cleaning Ports To access the sensor for inspection or cleaning: 1. Remove the two socket head access port plugs with a 1/4" Allen wrench. Visually inspect the sensing ports and sensor. 2. Rod out the sensor using a 0.020” to 0.028” diameter piece of piano wire. In cases where solids are deposited in the sensor, return the unit to the factory for complete cleaning and recalibration. 3. We recommend a final flush with Freon TF and drying with dry nitrogen. A Maintenance CIRCUIT BOARD SENSOR COVER « L sensor ACCESS PORT INSULATING BLANKET® *BE SURE TO INSTALL SNUGLY AROUND SENSOR TUBE 5-4 Figure 5-3 Sensor Compartment To check the electrical integrity of the sensor windings: 1. Remove the two 4-40 Phillips head screws located on top of the electronics enclosure and slide the enclosure up and off. Locate the black, red, and white wires connecting the sensor to the main circuit board. Connect one lead of an ohm meter to the white wire and measure the resistance between the red and white wires and the black and white wires. These readings should each be approximately 40 ohms. Low or zero ohms on either reading indicates a short circuit. High or infinite ohms readings indicates an open circuit. Measure the resistance between the case {metal part of the flow body) and any one of the sensor wires. This reading should be two Megohms or greater. Incorrect readings will require sensor replacement and re-calibration. Maintenance 5.2.3 Valve Maintenance The FMA-100/200 electromagnetic valve requires no maintenance under normal operating conditions other than an occasional cleaning. Use of certain corrosive gases may require frequent replacement of the valve plug and O-rings. This indicates a need for a different elastomer. Viton is standard, with Neoprene, Kal-Rez, and PFA Teflon offered as options. Please contact OMEGA if you encounter media compatibility problems. Do not attempt any valve adjustments while the meter is “on-line” with any dangerous gas. Thoroughly leak-test the FMA-100 following valve adjustment. Low Flow Body Valve—Cleaning can often be accomplished by opening the valve, using the purge function and flushing in both directions. Alternatively, manually open the valve by loosening the 6-32 lock nut on top of the valve and turning the adjustment screw fully counterclockwise. Read the valve adjustment section in Section 6.0, Calibration. Disassemble the electromagnetic valve as follows: 1. Refer to Appendix D, Model FMA-100 Exploded View, for help in locating valve parts. 2. To disassemble the low and medium flow valve, remove the two 4-40 Phillips head screws on fop of the enclosure. Remove the enclosure by sliding it up and off. 3. Remove the metal cap on top of the valve by inserting a flat tip screwdriver into the slots provided and prying upward. PS Maintenance С А If the 54” nut {item 27, page 49) is not plastic, call OMEGA at once for a free plastic replacement nut. Do not tighten the 5/5" nut with more than 10 in lbs torque. 4. Using a $% nut driver, loosen and remove the 3/' nut at the top of the valve. Remove the coil, coil enclosure and warp washer. The small circuit board may be separated from the main one to ease removal of the coil. To separate, first remove the plastic #4 mounting screw located in the center of the main circuit board and carefully pull the two boards apart. 5. Remove the four 4-40 socket head cap screws at the base of the valve. Separate the valve from the flow body. There are three O-rings sealing the valve assembly: one between the base and the flow body, one under the valve seat (orifice), and one on the top adjusting screw inside the valve. Inspect the O-rings for damage and replace as necessary. It is good practice to replace all O-rings whenever the valve is disassembled. 6. Inspect the valve seat and plug for corrosion or roughness and replace as necessary. Re-assemble in reverse order of disassembly and leak check before placing the FMA-100 back in operation. 5-6 ? Calibration Procedure Calibration of flow meters and controllers, in keeping with the requirements of Mil Std 45662-A, requires a calibration standard of at least four times better than the desired claimed accuracy. This leaves one to choose calibration devices with an accuracy of better than 0.25%. Most calibrations can be done using dry nitrogen and the “K” factor tables included in this manual. The calibration procedure is essentially the same for both meters and controllers. Flow meters require a metering valve for setting a constant flow rate; controllers are calibrated while in the control mode. In the following procedures, please refer to the Appendix. 6.1 FMA-200 Mass Flow Meter Calibration Procedure Calibration checks and minor adjustments to the zero and span may be made via the access ports in the enclosure. To adjust linearity (such as when installing a different bypass to change range) go to Step 4. 1... Warm Up: Plug in the instrument to be calibrated and allow at least 30 minutes warm up time before attempting any adjustments. 2. ero Adjust: Rotate to open the zero and span access doors. Using a voltmeter connected to the meter output pins, adjust the zero potentiometer (R5) for zero volts at zero flow (4 mA for 4-20 mA outputs). 3. Check Full Scale: Generate full scale flow using a metering valve in line with the unit under test. Compare the indicated flow rate with the flow standard reading. If they agree to within +10%, adjust the span potentiometer (R10) for exact agreement. If the readings do not agree within +10%, attempt to determine the cause of disagreement. Possibilities are: - e Leaks in the system or in the flow meter * Wrong or improper use of “K” factor y ’ Calibration Procedure e Wrong or improper correction for temperature and pressure e Partially clogged or dirty sensor tube * Replacement of parts in the flow signal path This completes the calibration procedure. To adjust linearity, go to Step 4. | 4. Adjusting Linearity: Remove the two black 4-40 Phillips head screws on the top of the meter enclosure near the edge connector. Pull the enclosure up and off the meter. Orient the meter so that the component side of the circuit board is facing you. Plug in the meter and allow to warm up for at least 30 minutes. 5. Zero Adjust: Connect a volimeter to the meter output pins and adjust the zero potentiometer (R5) for zero volts at zero flow (A mA for 4-20 mA outputs). 6. Calibrate 25%: Use the calibration standard to set a flow rate of 25% of full scale. Adjust R10 for 1.25 volts (8 mA outputs) at the output of the meter. 7. Calibrate 50%: Increase the flow rate to 50% of full scale. If the output is 2.5 volts +25 mV or 12 mA £0.08 mA, no adjustment is necessary. If the output is beyond these limits, adjust R23 for the proper reading. {See Figure 6-1) 8. Calibrate 75% and 100%: Set the flow to 75% of full scale. If the output is outside the limits set in Step 7, adjust R25 for the correct reading. Repeat this procedure for 100% flow using R27. Repeat Steps 6 through 8 at least one more time. 6-2 Calibration Procedure : — R16 COMPENSATION U || w— RS ZERO — R27 ~ 100% a— R25- 75% 1— R23—- 50% a R10 SPAN о e JUL Figure 6-1 Potentiometer Location 6.2 FMA-100 Calibration Procedure There are two ways a flow controller can be calibrated, depending on the type of calibration standard used. Transfer standards normally give a continuous real time readout of the flow rate. This allows calibration of a flow controller in a minimum amount of time. Transfer standards are not the most accurate calibrators available, but they are adequate in some cases. Primary standards such as positive displacement piston-tubes and bubble meters are extremely accurate but have several disadvan- tages when manually operated. They are difficult to use, require manual temperature and pressure corrections, and give the flow readout after the fact. This presents a problem for flow controllers, since an unknown flow has to be measured, adjusted and measured again until the desired accuracy is achieved. The following procedures detail the steps necessary to calibrate an FMA-100 using each type of these standards. Inlet and outlet pressures must be set up to match actual operating conditions. 6-3 % Calibration Procedure 6.2.1 Piston Tube Calibration Procedure 1. Disable Valve: Open the electromagnetic valve by turning the valve adjustment screw counterclockwise until it stops. The mass flow controller can then be calibrated as a flow meter. Follow Steps 1 through 8, FMA-100 Calibration Procedure and then continue with Step 2 below. 2. Adjust Valve: (Complete Steps 1 through 8, FMA-100 Calibration Procedure, before beginning this step.) Generate a small flow through the mass flow controller and close the valve by turning the adjustment screw dockwise until the flow just stops. Connect a voltmeter negative lead to P, (-15) and positive lead to pin 8 of U, on the FMA-100 printed circuit. With an upstream pressure of 30 PSIG, apply a 0.50 volt setpoint and adjust the valve screw for 5.50 volts on the volimeter. Apply a 5.00 volt setpoint and check that the valve voltage does not exceed 11.0 volts across P, and P,. This value will vary depending on the full scale flow rate. In the control mode, turn R10 clockwise to DECREASE the flow; turn counterclockwise to INCREASE the flow. Record the final value on the calibration sheet. A. Calibrate 25%: Turn the setpoint down to 1.25 volts (25% of full scale). Measure the flow. It should be within £50 millivolis of the setpoint value. Re-adjust R,, only if necessary. 5. Calibrate 50%: Increase the setpoint to 2.50 volts (50% of full scale). Measure the flow. Adjust R23 if necessary. Calibration Procedure 6.2.2 Calibrate 75% and 100%: Repeat Step 5 for 75% and 100%, adjusting R25 and R27 respectively, if the readings are out of tolerance. Record the measured values on the calibration sheet. This completes the Piston Tube Calibration Procedure. Transfer Standard Calibration Procedure This procedure assumes that the transfer standard provides a continuous real time readout of flow and is of sufficient quality to maintain the unit being calibrated at its specified accuracy. Calibration checks and minor adjustments to the zero and span may be made via the access ports in the enclosure. If the linearity needs adjustment (as in changing range), remove the enclosure. 1. Warm Up: Plug in the MFC to be calibrated and allow at least 30 minutes warm up fime before attempting any adjustments. Zero Adjust: Rotate to open the zero and span access doors. Using a voltmeter connected to the meter output pins, adjust the zero potentiometer (R5) for zero volts at zero flow (4 mA for 4-20 mA outputs) | Adjust Valve: Generate a small flow through the mass flow controller and close the valve by turning the adjustment screw clockwise until the flow just stops. Connect a voltmeter negative lead to P, (-15) and positive lead to pin 8 of U, on the FMA-100 printed circuit. With an upstream pressure of 30 PSIG, apply a 0.50 volt setpoint and adjust the valve screw for 5.50 volts on the volimeter. Apply a 5.00 volt setpoint and check that the valve voltage does not exceed 11.0 volts across P, and P,. This value will vary depending on the full scale flow rate. All medium and some high flow valves operate from 10 to 22 volts across P, and P, depending on the gas and full scale range. 6-5 f/ Calibration Procedure 4. Check Full Scale: Adjust the setpoint for 5.00 volts and read the flow rate from the transfer standard. Adjust R10 if necessary. In the control mode, turn R10 clockwise to DECREASE the flow; turn counterclockwise to INCREASE the flow. Record the final value on the calibration sheet. 5. Calibrate 25%: Turn the setpoint down to 1.25 volts (25% of full scale). Allow 30 seconds for unit to stabilize. Read the flow from the transfer standard. It should be within +50 millivolts of the setpoint value. Re-adjust R10 only if necessary. 6. Calibrate 50%: Increase the setpoint to 2.50 volts (50% of full scale). Allow 30 seconds for unit to stabilize. Read the flow from the transfer standard. Adjust R23 if necessary. Record the final value on the calibration sheet. 7. Calibrate 75% and 100%: Repeat Step 6 for 75% and 100%, adjusting R25 and R27 respectively, if the readings are out of tolerance. Record the measured values on the calibration sheet. This completes the calibration procedure. Repeat Steps 5 through 7 at least one more time. 6.3 Response Adjustment Speed of response can be adjusted using R16. This adjustment is primarily for trimming the shape of the output to more closely approximate a square wave. This adjustment is similar to trimming an oscilloscope probe for best response. The purpose of the response adjustment is to match the 0-5 Vdc output signal to the actual flow. The response is set at the factory and in most cases needs no further adjustment. Response adjustment is not recommended unless done by qualified service personnel with proper equipment. For special cases please consult the factory service department. Calibration Procedure Equipment Required: * Digital Storage Oscilloscope or Two Channel Strip Chart Recorder with a response of better than 0.33 seconds to within + 1% of full scale Delta P-producing Laminar Flow Element (Sized for the flow range of interest) * Pressure Transducer with voltage output to monitor Laminar Flow Element (Transducer response better than 0.1 sec to +1% of full scale) e Bypass Valve Manifold to produce step response in flow to meter under test * Flow Metering Valve * Source of compressed gas (Type of gas depends upon application) Basic Adjustment Procedure, Flow Meter: 1. Using the Bypass Valve Manifold, apply a step change in flow (0 to 63% of full scale) to the meter under test and observe the shape of the output signal. 2. To correct for overshoot, turn the adjustment potentiometer op Turning the adjustment pot fully in either direction may cause the output signal to “latch-up”. Begin with the pot in the center position and adjust out in small increments. Basic Adjustment Procedure, Flow Controller: Apply a step change in flow by raising the setpoint to 63% of full scale or by using the Valve-Off function, (see Section 3.2.3). Observe the output signal of both the flow controller and the pressure transducer/laminar flow element (located directly downstream of the flow controller under test). Adjust R16 for the best response of both signals. 6-7 6-8 Calibration Procedure Turning the adjustment pot fully in either direction may cause the output signal to “latch-up”. Begin the procedure with the pot in center position and adjust out in small increments. Due to the interaction of the control valve and sensor, increasing the speed of the sensor signal (clockwise rotation of R16) has the effect of slowing the valve response. The effect may not be observable in the DC output signal, but can be seen in the pressure transducer/ laminar flow element output signal. Ÿ Trouble-Shooting 7.1 General When you suspect that the mass flow controller or meter is not operating correctly, make these few simple checks before dismantling for repair: - 1. Ensure that there are no leaks in the line. 2. Ensure that all cables are plugged in and are in good condition. 3. Ensure that the power supply is of the correct polarity and voltage. Check for adequate pressure differential across the controller. 5. Double check connector pinouts when replacing another manufacturer's mass flow controller. 7.2 Trouble-Shooting Guide This guide is provided to help locate the section of the controller at fault. It is not intended to be an all inclusive repair manual. In the case of major repairs, return the unit to the factory for service. Trouble-Shooting FMA-100s 7 & Symptom Possible Cause Corrective Action FMA-200s With Doesn't respond to set Low or no gas pressure | Set correct gas pressure Electro- point Ma gnetic Faulty cable or Correct or replace connector Set point is below 2% of | Increase set point or full scale -| disable auto shut-off circuit (see Section 3.2) Flow does not match No gas pressure Set correct gas pressure set point Inlet filter screen clogged | Clean or replace Ground loop Separate signal and power commons Qut of adjustment Adjust R22 balance on the FMA-100. Consult factory No output Clogged sensor Clean or replace sensor PCB defective Repair or replace PCB Inlet filter screen Clean or replace screen Wiil not zero Gas leak Find and correct leaks Application requires high pressure and non- horizontal mounting Re-zero meter Change in composition of gas Gas leak PCB defective LFE dirty Inlet filter screen clogged Incorrect inlet conditions (high flow and NPT models only) PCB defective Repair or replace PCB Reads full scale with no | Defective sensor Return to factory for flow or with valve shut replacement Gas leak Find and correct leaks Out of calibration Dirty or clogged sensor | Clean or replace sensor See “K” factor tables Find and correct leaks Repair or replace PCB Clean LFE Clean or replace screen Re-plumb meter correctly (see Section 2.4) ’ FMA-200 Schematic LIT _ 840 PM OUTS - CTR TE oT es es er a REE 3 REIS $ x E ur Sev {RoE 002997979 9 AA 88880608 SE Ty ST TE et 45 ¿Tios ' PAT 7 |AS 4 $ 4 d Y Y Y o oe O LO) O o O ® 1 = M lu” DATED сны АН. о Я, МАЙ тиб та > 7 US" A II 1 ТТ, ТТ ] ¡ee xicas 9 1727 e] FW bu à 4 ou 3 9 ALL + + Bh eee camo + IE New Prat No 510042. RA [| >— Л ЧЕХ. $ +. 110 ¡A-J a — ae cima PY 7 у +15 +5. ® Zn (ces SENSOR 23 a lockouTr cRi bat ees San R19 J o” RNS HC 242222 ® 4-20 mA OUT DS FAB Dwá &8303- 036 Bev. L Note: Apo NOT INSTALL wi 4wZ2Z WITH {ermine ween CABLE VERSION OVER 15 FT. raactions Me sagen ERR ald PHP PS ET Flow CoNTROLLEAR APPROVALS CAT LOCA DIAG LOADING DIAGRAM wo Treas] SYEMTc | ag CARD CALL 2:8 Pian - | [2203 ¿24 | bo NOT SCALE DRAWING [attr 1 OF 1 " FMA-100 Schematic — == LTR ОКТ К HE APPROVED | А | №» Paar No 52-0 MA SI — $ | UPDATED MATO AT wa ADDED NOTES: ADDED SET POINT Cl SOFT START TABLES w 17 ten | Leg +15 0-SV © FLOW RI 4 SIGNAL 1K A Y | C | aS TIP 3 | ac TTY RM R19 Rl 470 332K #74 A e = | ® ® Na VALVE TEST Raid R32 "Sa nA Ge] © со ДУ BOLEHO1G UJ © ` CR Valve VALVE OFF —> Into) ~ loon TYP. PZ CRG +5 (1200) A © s R3S R36 AN = 100K,IT 49,9K NOTES : ® RAJA ST ra, 0520) 0:5v © ' 4.20 mA | 234 FOR 39 VOLT vALVE DRVE, CHANGE C5 TO 47uf 3357 TANTALUM. [A] $ SV VALVE DRIVE USE RI6 ЗО МОСТ VALVE DRIVE JSES RIE 4 RI. ION COL: RIG-RIT=4.70 KW i L ¿5A COL: Rib=RIT=1.0Q %W COLLECTOR CF GI CONNECT TO +15 FOR 30VAT VALVE DRIVE VERSIONS. 30 VOLT VALVE DRIVE DRIVE TRANSISTORS ARE REMOTE MOUNTED FOR HEATING SINKING. 4 8 © | ; LOW SET PONT SOFT START RESPONSE DROP OUT CAT. TIME ce | {EF m Ц Zi, RIZ STR RESP. |. lof - г Oh = 5 SEC. | О. Go rx [TK = ToEC 154 uz O 3x Task “10SEC. (22. 47. Ask =16SEC | 33,0 Ne SO iw 5% | erax T2ASEC [a semen tino SS + + #2 AL SCHEMATIC < Ci Ei IR re {= Vila. yg! LOADING DIAG ue [72g 925M [prawmg no TREY DO NOT SCALE DRAWING _ [suit 1 OF | ITEM NO. 2 3 4 5 6 7 8 9 0 BO ко NS NS BD ij ji ji a já jr > 33 ITEM NO. =O Qe Laminar Flow Element Valve Seat OMEGA PART NO. DESCRIPTION 86-003 Sensor Compartment Sub Assembly 52-0061 Circuit Board 41-0485 Flow Body 31-001-018 “O-Ring 41-0018 Sleeve 31-0001-008 “0”-Ring 40-0074 Inlet Filter 41-0350 Spider Spring 41-0019-01 Valve Plug 41-0017 Helical Spring 31-0001-906 “O”-Ring 42-0027 PCB Base Plate 41-0016 Adjustment Screw 31-0001-003 “O”-Ring 41-0015 Spacer 35-0149 Soc. Hd. Cap Screw 41-0022 Valve Assembly 35-0347 Hex Nut 35-0065 Warp Washer 29-0105 Coil 35-0339 Pan Hd. Phil. Screw 35-0236 Standoffs 35-0101 Hex Hd. Nut 41-0021 Standoff | 52-0060 Printed Circuit Board 41-0006 Coil Enclosure 45-0015 Hex Nut 42-0026 Valve Cap 42-0095 Electronics Enclosure 35-0028 Pan Hd. Phil Screws 47-0009 Cable 47-0123 Cable 84-0001-01 Valve Plug Asm DESCRIPTION Fitting Valve Spring, Bottom Valve Spring, Top y FMA-100 Low Flow Exploded View, Mechanical PRE Sew wos Wig 00 eo zr a Perey wed | gy wean ° - ATO -99 *N IVF PIN = — — "ай мыли ld]. Être 9 C-1 List of Bypasses and Orifice Sizes, Low Flow LFE and Valve Orifice Sizes for Mass Flow Controllers Low Flow Body Maximum Flow, Orifice Size, Inches LFE, SCCM of N, at Part No, | Orifice Size, Part No. 21°C, 760mm Hg Inches 41-0023-011 15 41-0012-01/02 0.010 or 0.020 41-0023-021 30 41-0012-01/02 0.010 or 0.020 41-0023-031 41 41-0012-01/02 0.010 or 0.020 41-0023-041 68 41-0012-01/02 0.010 or 0.020 41-0023-05 1 106 41-0012-01/02 0.010 or 0.020 41-0023-061 134 41-0012-01/02 0.010 or 0.020 41-0023-071 191 41-0012-01/02 0.010 or 0.020 41-0023-081 279 41-0012-01/02 | 0.010 or 0.020 41-0023-091 569 41-0012-02 0.020 41-0023-101 710 41-0012-02 0.020 41-0023-111 1043 41-0012-02 0.020 41-0023-121 1383 41-0012-02 0.020 41-0023-131 1538 41-0012-02 0.020 41-0023-141 2187 41-0012-02 0.020 41-0023-151 3830 41-0012-03 0.040 41-0023-161 5852 41-0012-03 0.040 41-0023-171 8482 41-0012-03 0.040 41-0023-181 11,241 41-0012-03 0.040 41-0023-191 11,583 41-0012-04 0.055 J; Mounting Dimensions, Mass ’ Flow Meters and Controllers 2» — ola ° : mi - В E: к Ed 3 gl 3 1 +3 = | oo 6: $ 5 © al Side View Bottom Outlet End View 1/4"O.D. Tube | Swagelok Fitting Type (9/16"-18 Thd.) Dim. “L” 5.02 Table Mounting Dimensions, FMA-200 Mass Flow Meters an SR 3 E a : + | ite 3 8 | Tile 8 1 ЧЕ $ еч Nm = Y 3 I T la Е E Li A | 5 = z 3 Ё © 3 L 8 wd o EE Side View Bottom Outlet End View 1/4"O.D. Tube | Swagelok Fitting Type (9/16°-18 Thd.) Dim. “L” 5.02 Table Mounting Dimensions, FMA-100 Mass Flow Controllers Recommended Wire Gauges for Flow Meters and Controllers Using the correct wire gauge for cabling runs to FMA-100 controllers insures proper operation in most installations. For very long cable runs (<150'), consider a local power supply. Also, the low flow range controllers can be run more economically over long cables than the high flow models. FMA-200 flow meter cable requirements are independent of range. TABLE I FMA-100/200 (AII Ranges) Distance Recommended Min. in Feet Wire Gauge 25 34 50 32 100 28 200 26 300 24 500 22 Table II FMA-100/200 Low Flow Distance Recommended Min. Wire Gauge in Feet Pins 2 &F All Others 25 30 34 50 28 32 75 26 28 100 26 28 125 24 26 150 24 26 r Conversion of Flow Rate to Other T and P Conditions The flow rate of your instrument is referenced to certain “standard” conditions of temperature and pressure. Unless otherwise specified in your order, these standard conditions are 21°C (70°F) and 760 mm of mercury (1 atmosphere). If you wish to convert to other “standard” conditions or to find the “actual” conditions in the pipe where your instrument is installed, use the following relationship: P, T, (1) ( ),= The standard conditions under which your instrument was calibrated, ( ),= The new standard conditions or the actual temperature and pressure conditions in the pipe, Q; = The gas mass flow rate referenced to the calibrated standard conditions (SCCM or SLM), Q, = The gas mass flow rate referenced to the new standard or actual conditions (SCCM or SLM—"5" means “standard”; ACCM or ALM—”A” means “actual”, P = Absolute pressure (kg/cm, or psia), and T = Absolute temperature (°K or °R) (°K = °С + 273, °К = °F + 460) Example 1: Changing “Standard” Conditions If your instrument has a flow rate reading of 10.00 SLM and was calibrated at standard conditions of 70°F (21°C) and 1 atmosphere (14.7 psia), and if you wish to convert this reading to standard conditions of 32°F (0°C) and 1 atmosphere, then you would use Equation (1) as follows: 14.7 460 + 32 Q, == > (10.0) = 9.28SLM 14.7 460 + 70 So, you can see that the flow rate referenced to 0°C will be approximately 7% lower than when referenced to room conditions of 21°C. ES Conversion of Flow Rate to Other T and P Conditions Example 2: Finding the “Actual” Flow Rate If the flow rate and calibrated standard conditions are as given in Example 1 and you wish to find the actual flow rate at 100°F and 30 psig, then you would use Equation (1) as follows: _ 14.7 460 + 100 14.7 + 30 460 + 70 , (10.00) = 3. 47SLM ia E e EEE E EE REE WARRANTY FREE EA a OMEGA v warrants this unit to be free of defects in materials and workmanship and to give satisfactory service for a period of 13 months from date of purchase. OMEGA Warranty adds an additional one (1) month grace period to the normal one (1) year product war- ranty to cover handling and shipping time. This ensures that our customers receive maxi- mum coverage on each product. If the unit should malfunction, it must be returned to the factory for evaluation. Our Customer Service Department will issue an Authorized Return (AR) number immediately upon phone or written request. Upon examination by OMEGA, if the unit is found to be defective it will be repaired or replaced at no charge. However, this WARRANTY is VOID if the unit shows evidence of having been tampered with or shows evidence of being damaged as a result of excessive corrosion; or current, heat, moisture or vibration; improper specification; misapplication; misuse or other operating conditions outside of OMEGA's control. Components which wear or which are damaged by misuse are not warranted. These include contact points, fuses, and triacs. We are glad to offer suggestions on the use of our various products. Nevertheless, OMEGA only warrants that the parts manufactured by it will be as specified and free of defects. OMEGA MAKES NO OTHER WARRANTIES OR REPRESENTATIONS OF ANY KIND WHATSOEVER, EXPRESSED OR IMPLIED, EXCEPT THAT OF TITLE AND ALL IMPLIED WARRANTIES INCLUDING ANY WARRANTY OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE ARE HEREBY DISCLAIMED. LIMITATION OF LIABILITY: The remedies of buyer set forth herein are exclusive and the total liability of OMEGA with respect to this order, whether based on contract, warranty, negligence, indemnification, strict liability or otherwise, shall not exceed the purchase price of the component upon which liability is based. In no event shall OMEGA be liable for consequential, incidental or spe- cial damages. Every precaution for accuracy has been taken in the preparation of this manual; however, OMEGA ENGINEERING, INC. neither assumes responsibility for any omissions or errors that may appear nor assumes liability for any damages that resuit from the use of the prod- ucts in accordance with the information contained in the manual. SPECIAL CONDITION: Should this equipment be used in or with any nuclear installation or activity, buyer will indemnify OMEGA and hold OMEGA harmless from any liability or damage whatsoever arising out of the use of the equipment in such a manner. ques zo RETURN REQUESTS / INQUIRIES sas Direct all warranty and repair requests/inquiries to the OMEGA ENGINEERING Customer Service Department. Call toll free in the USA and Canada: 1-800-622-2378, FAX: 203-359-7811; International: 203-359-1660, FAX: 203-359-7807. BEFORE RETURNING ANY PRODUCT(S) TO OMEGA, YOU MUST OBTAIN AN AUTHO- RIZED RETURN (AR) NUMBER FROM OUR CUSTOMER SERVICE DEPARTMENT (IN ORDER TO AVOID PROCESSING DELAYS). The assigned AR number should then be marked on the outside of the return package and on any correspondence. a FOR WARRANTY RETURNS, please have | FOR NON-WARRANTY REPAIRS OR CALI- the following information available BRATION, consult OMEGA for current BEFORE contacting OMEGA: repair/calibration charges. Have the foilow- 1. P.O. number under which the product ing information available BEFORE contacting was PURCHASED, OMEGA: 2. Model and serial number of the product | 1. P.O. number to cover the COST of the under warranty, and repair/ calibration, 3. Repair instructions and/or specific 2. Model and serial number of product, and problems you are having with the 3. Repair instructions and/or specific product. problems you are having with the product. OMEGA's policy is to make running changes, not model changes, whenever an improve- ment is possible. This affords our customers the latest in technology and engineering. OMEGA is a registered trademark of OMEGA ENGINEERING, INC, © Copyright 1994 OMEGA ENGINEERING, INC. All rights reserved. This documentation may not be copied, photocopied, reproduced, translated, or reduced to any electronic medium or machine-readable form, in whole or in part, without prior written consent of OMEGA ENGINEERING, INC. OMEGA... 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Key features
- Large diameter thermal mass flow sensor
- Straight sensor tube with access ports
- 316 stainless steel wetted surfaces
- Viton seals standard
- Controllers incorporate an electromagnetic proportional control valve
- Precision analog circuitry with a five breakpoint linearizer
Frequently asked questions
The FMA-100 and FMA-200 are designed for the measurement and control of gas mass flow.
The operating principle of the FMA-100/200 is based on heat transfer and the first law of thermodynamics. The process gas enters the instrument's flow body and divides into two flow paths, one through the sensor tube, the other through the laminar flow element.
The standard output for FMA-100/200 meters and controllers is a 0-5 Vdc signal, which directly corresponds to the 0-100% mass flow full scale range.
The wetted materials are 316 stainless steel; Viton O-rings standard; Neoprene and 4079 Kal-Rez O-rings optional, others on special order.
Remove the two socket head access port plugs with a 1/4” Allen wrench. Visually inspect the sensing ports and sensor. Rod out the sensor using a 0.020” to 0.028” diameter piece of piano wire. In cases where solids are deposited in the sensor, return the unit to the factory for complete cleaning and recalibration. We recommend a final flush with Freon TF and drying with dry nitrogen.