LVQ

LVQ
High Purity Chemical Valve Non-Metallic Exterior
Series LVQ
LVC
LVA
Constructed
without screws
screws
LVH
A
PTFE
PVDF
w PFA
LVD
: Ne w
BBooddyy:
m::
hrraaggm
D
Diiaapph
ionn::
ctio
torr sseect
AAccttuuaato
Non-metallic construction without using
metal screws to fasten the body of the actuator.
Actuator section
LVQ
LQ1
LVN
TL/TIL
Body section
LQ3
Space Saving Type
Integral fitting
construction
Hyper fitting/
Series LQ1, LQ2
LQ3 is used.
A
B
A
B
A
Reduction in
dimension
Piping from 8 directions are possible.
Pilot port
y
u
i
t
(mm)
q
45°
r
e
w
Model
LVQ20
LVQ30
Integral fitting construction
Hyper fitting/Series LQ1, LQ3 is used.
Can select female thread.
A
Piping example
Reduction in
dimension
56.5 or40.5
more
70 or49.5
more
61.5
or more
LVQ50 104.5 or64.5
more
LVQ60 114.5 or73.5
more
LVQ40
80
511
Integral Fitting and Flare Integral Fitting T
Types
ypes Available
Availab
Av
ailable
le
Integral Fitting Type
Series LVQ-V/LVQ-S
Hyper Fittings
Series LQ1
(Series LVQ-V )
Series LQ2
(Series LVQ-S )
• Insert bushing
• Quadruple sealing
Flare Integral Fitting Type
Series LVQ-Z
Hyper Fittings
Flare Type
Series LQ3
• Flared grip
• Triple sealing
Manual
Manual Type
Type
2 Types
Types of Handle Operation Selectab
Selectable
le
90 Degree Turn Type
Multi-Turn Type
V Allows quick switching
between valve open/close.
90˚
Valve open
512
Valve closed
V Prevents handle from idle
turning at the final valve
open/closed position and
over-twisting.
V Indicator allows visual
check of the open/close
state of the valve.
V Locknut allows locking at
desired open position.
Guide ring
Eliminates lateral motion of the poppet
which reduces internal leakage.
Piston damper
LVC
Absorbs piston momentum to minimize
impact-induced particle generation.
LVA
LVH
Buffer
Diaphragm (PTFE)
Protects diaphragm from deformation
and damage due to back pressure.
Special diaphragm construction ensures
gentle opening and closing that prevents
the formation of micro-bubbles.
LVD
LVQ
Integral fittings construction LQ1
Minimal residual liquid
Offers quadruple seal construction. Nut
lock mechanism—no additional tightening
required. High flexural strength. Different
tubing sizes can be selected.
Residual liquid is minimized by the tapered
shape and integral fitting construction,
allowing liquid to flow smoothly, achieving
improved swept flow characteristics.
Body (New PFA)
LVN
TL/TIL
LQ3
Compatible with chemicals such as acids,
bases and de-ionized water.
Option
With bypass
With flow rate adjustment
With flow rate adjustment & bypass
With indicator
With indicator & bypass
513
Variations
Integral Fitting Type Series LVQ/LVQH
Applicable tubing O.D.
Flow
Orifice dia. characteristics
Av x 10–6m2(Cv)
Series LVQ
ø4
ø8
ø10
ø16
Series LVQH
ø22
Series
Metric sizes
3
8.4
(0.35)
31.2
(1.3)
45.6
(1.9)
120
(5)
192
(8)
4
6
8
10
Inch sizes
12
19
25 1/8 3/16 1/4 3/8 1/2 3/4
1
LVQ(H)20
LVQ(H)30
LVQ(H)40
LVQ(H)50
LVQ(H)60
With reducer
Basic size
Integral Fitting Type
Space saving/space saving connection Series LVQS/LVQHS
Flow
Orifice dia. characteristics
Av x 10–6m2(Cv)
Series LVQS
ø4
ø8
ø10
ø16
Series LVQHS
ø22
2
8.4
(0.35)
31.2
(1.3)
45.6
(1.9)
120
(5)
192
(8)
Flare Integral Fitting Type
ø4
ø8
ø10
ø16
Series LVQH-Z
ø22
ø8
ø10
ø16
Series LVQHS-Z
ø22
LVQ(H)S60
8.4
(0.35)
31.2
(1.3)
45.6
(1.9)
120
(5)
192
(8)
LVQ-Z/LVQH-Z
Applicable tubing O.D.
Series
3
Series LVQ-T
ø8
ø10
ø16
Series LVQH-T
514
ø22
4
6
8
10
Inch sizes
12
19
25 1/8 3/16 1/4 3/8 1/2 3/4
LVQ30(H)-Z
LVQ40(H)-Z
LVQ50(H)-Z
LVQ60(H)-Z
8.4
(0.35)
31.2
(1.3)
45.6
(1.9)
120
(5)
192
(8)
8.4
(0.35)
31.2
(1.3)
45.6
(1.9)
120
(5)
192
(8)
Metric sizes
LVQ20(H)-Z
Series
LVQS-Z/LVQHS-Z
Fitting size
Series
2
3
4
5
6
LVQ20(H)S-Z
LVQ30(H)S-Z
LVQ40(H)S-Z
LVQ50(H)S-Z
LVQ60(H)S-Z
Series
Flow
Orifice dia. characteristics
Av x 10–6m2(Cv)
ø4
6
LVQ(H)S50
Series
Tube Extension Fitting Type
5
LVQ(H)S40
Flow
Orifice dia. characteristics
Av x 10–6m2(Cv)
ø4
4
LVQ(H)S30
Flare Integral Fitting Type
Space saving/space saving connection
Series LVQS-Z
3
LVQ(H)S20
Flow
Orifice dia. characteristics
Av x 10–6m2(Cv)
Series LVQ-Z
Fitting size
Series
LVQ-T/LVQH-T
Tubing size
Series
Metric sizes
6
LVQ20(H)-T
LVQ30(H)-T
LVQ40(H)-T
LVQ50(H)-T
LVQ60(H)-T
10
12
19
Inch sizes
25 1/4 3/8 1/2 3/4
1
1
INDEX
Air Operated Type
Integral Fitting Type
Hyper Fittings
Series LVQ
LQ1
LQ1, LQ2
Integral Fitting Type
•
P.518
Air Operated Type
Integral Fitting Type
Space Saving/Space Saving Connection
Series LVQS
LQ1
LQ1, LQ2
•
Manual Type
Integral Fitting Type
Hyper Fittings
Series LVQH
•
P.526
LQ1, LQ2
P.535
Manual Type
Integral Fitting Type
Space Saving/Space Saving Connection
Series LVQHS
LQ1, LQ2
•
P.539
Fittings and Special Tools
Air Operated Type
Flare Integral Fitting Type
Hyper Fittings
Series LVQ-Z
P.544
LQ3
Flare Integral Fitting Type
•
Air Operated Type
Flare Integral Fitting Type
Space Saving/Space Saving Connection
Series LVQS-Z
LQ3
•
Manual Type
Flare Integral Fitting Type
Hyper Fittings
Series LVQH-Z
•
Manual Type
Flare Integral Fitting Type
Space Saving/Space Saving Connection
Series LVQHS-Z
•
516
P.545
P.553
LQ3
P.562
LQ3
P.566
Air Operated Type
Tube Extension Fitting Type
Series LVQ-T
LQ1
•
P.571
LVC
Manual Type
Tube Extension Fitting Type
Series LVQH-T
LVA
Integral
Fitting Type
•
•
Flare Integral
Fitting Type
Tube Extension
Fitting Type
INDEX
Air Operated Type for Back Pressure 0.5 MPa
Flare Integral Fitting Type
Hyper Fittings
Series LVQ mmH-Z
Air Operated Type for Back Pressure 0.5 MPa
Integral Fitting Type
Hyper Fittings
Series LVQ mmH
P.578
LVH
LVD
LQ1
LVQ
LQ1, LQ2
LQ1
P.581
LVN
•
Applicable Fluids
High Purity Chemical Valve Non-Metallic Exterior
Specific Product Precautions
TL/TIL
LQ3
LQ3
P.582
P.584
P.585, 586
517
Air Operated Type
Integral Fitting Type
(Hyper Fittings)
Series LVQ
How to Order
LVQ 2 0
S 07
Option (2)
Symbol
Body class
Nil
Symbol Body class Orifice dia.
2
ø4
2
3
ø8
3
4
ø10
4
5
ø16
5
6
ø22
6
Pilot port thread type
Nil
M
R
N
LQ1 integral fitting Connection tubing O.D. 1/8" (ø3)
LQ1 integral fitting Connection tubing O.D. ø4
Rc 1/8
Threaded
NP T1/8
Threaded
J
K
N
P
Applicable option
3 4 5 6 7 8
v v v v v v
— — v v — —
v v v v v v
v v v v v v
Note
24
—
v
— For high temperature
v Buffer material FFKM
v For ammonium hydroxide
High flow spec.
— — — v v — — — — — LVQ6m only
1
v
v
v
v
2
v
—
v
v
Note) Options (2) cannot
be combined with
each other.
Option (1)
Nil
Valve type
0
1
2
N.C.
N.O.
Double acting
Note) Refer to variations
in the table below
for valve type combinations.
None
1 With flow rate adjustment
2
With bypass
3 With flow rate adjustment & bypass
With indicator
4
5 High back pressure (0.42 MPa)
V
S
Fittings
LQ1
LQ2
Body class
2, 3, 4, 5, 6
2, 3, 4, 5
Model
ia
meter
g ou
tside
dia. Millimeter
Va
Inch
lve
typ
Symbol
e
Orifice d
Tubin
Type
Basic type
Connecting
tubing O.D.
2
N.C.
N.C.
Applicable tubing size
Symbol
PB
PA
Body class
3 4 5 6
Metric sizes
03
ø3
04
ø4
06
ø6
08
ø8
10
ø10
12
ø12
19
ø19
25
ø25
Inch sizes
1/8
03
3/16
05
1/4
07
3/8
11
1/2
13
3/4
19
1
25
AB AB
A N.O.
PB
N.C. N.O. Double
Double
acting
acting
With flow
rate
adjustment
PA
B
N.C.
A
N.C.
With bypass
Double
acting
N.C.
With flow
rate
adjustment &
bypass
With reducer
Application
Ports A & B same size
Refer to the
applicable
tubing table
to the left.
Different diameter
tubings can be
selected within the
same body class.
N.C.
A B
A
Double
PB
N.C. Double acting acting
PA
B
A
N.C.
N.C.
With indicator
PA
B
Symbol
Nil
PA
PA
B
Port B (OUT) different dia. size
A
N.C.
N.C.
High
back
pressure
PA
B
A
N.C.
N.C.
With indicator & bypass
PA
B
A
N.C.
518
PA
B
N.O.
Double acting
Basic size
Note) Refer to variations in the
table below for valve type
and option (1) combinations.
Options (1) can not be
combined each other.
Variations
Fitting type
Symbol
6 High back pressure with flow rate adjustment
High back pressure with bypass
7
8 High back pressure with flow rate adjustment & bypass
High back pressure with indicator
9
24
With indicator & bypass
9
v
—
v
v
N.C.
LVQ20
LVQ30
LVQ40
LVQ50
LVQ60
ø4
ø8
ø10
ø16
ø22
6
10
12
19
25
1/4
3/8
1/2
3/4
1
Air Operated Type
Integral Fitting Type
Series LVQ
Standard Specifications
Model
Metric size
Tubing O.D.
Inch size
IN/OUT port
Fitting
type
Pilot port
Orifice diameter
Av x 10-6m2
Flow
characteristics Cv
Withstand pressure (MPa)
Operating pressure Standard
High
<ARB flow>
temperature
Standard
Back pressure High back
pressure
(MPa)
High
LVQ20
LVQ30
LVQ40
LVQ50
LVQ60
6
1/4
10
12
19
25
3/8
1/2
3/4
1
LQ1 or LQ2
LQ1
LQ1
ø4
ø8
ø10
ø16
ø22
8.4
31.2
45.6
120
192(228) Note)
0.35
1.3
1.9
5
8(9.5) Note)
1
–98 kPa to 0.5 MPa
–98 kPa to 0.4 MPa
–98 kPa to 0.3 MPa
0.3 or less
0.2 or less
0.42
0.3 or less
0.2 or less
0 (With water pressure)
0.3 to 0.5 (High back pressure: 0.45 to 0.55)
1/8" (ø3), ø4, Rc 1/8, NPT 1/8
0 to 100
0 to 170
0 to 60
0.08
0.17
0.22
0.70
0.81
temperature
Valve leakage (cm3/min)
Pilot air pressure (MPa)
Pilot port size
Fluid temperature Standard
High
(°C)
temperature
Ambient temperature (°C)
Mass (kg)
Note) ( ) is high flow specification.
Different diameter tubing can be selected (within a body class) by using a nut and
insert bushing (reducer).
With reducer
2
3
4
5
6
LVA
LVH
LVD
LVQ
LQ1
LVN
TL/TIL
LQ3
Different Diameter Tubing Applicable with Reducer
Tubing O.D.
Body
class
LVC
Metric sizes
Inch sizes
3
4
6
8
10
12
19
25
1/8
3/16
1/4
3/8
1/2
3/4
1
V
V
v
—
—
—
—
—
V
V
v
—
—
—
—
—
—
V
V
v
—
—
—
—
—
V
v
—
—
—
—
—
—
—
V
v
—
—
—
—
—
V
v
—
—
—
—
—
—
—
V
v
—
—
—
—
—
V
v
—
—
—
—
—
—
—
V
v
—
—
—
—
—
V
v
Note) Refer to page 544 for information on changing tubing sizes.
Specific Product Precautions
Be sure to read before handling. Refer to front matters 42 and 43 for Safety
Instructions, and pages 585 and 586 for High Purity Chemical Valve NonMetallic Exterior Precautions.
Piping
Caution
1. Connect tubing with special
tools.
Refer to the pamphlet “High-Purity
Fluoropolymer Fittings HYPER FITTING®/Series LQ1, 2 Work Procedure
Instructions” (M-E05-1) for connecting
tubing and special tools. (Downloadable from our web site.)
Caution
2. Tighten the nut to the end
surface of the body. As a guide,
refer to the proper tightening
torques shown below.
Tightening torque for piping
Body class
2
3
4
5
6
Torque (N·m)
LQ1
LQ2
0.3 to 0.4
0.8 to 1.0
1.0 to 1.2
2.5 to 3.0
5.5 to 6.0
1.5 to 2.0
3.0 to 3.5
7.5 to 9.0
11.0 to 13.0
519
Series LVQ
Construction
Basic type
N.C. type
N.O. type
Double acting
type
PB
PB
q
q
q
PA
PA
e
e
A
B
B
w rt
A
e
B
A
B
A
B
A
y
t
r
With reducer
With flow rate adjustment
With bypass
With indicator
i
u
SMC
PA
PA
u
SMC
B
SMC
A
B
B
A
Parts list
No.
Description
Material
1
Actuator section
2
Body
3
Diaphragm
4
Insert bushing
PFA
5
Nut
PFA
6
Collar
7
Flow rate adjuster section
8
Indicator, cover
520
PVDF
PFA
PTFE
PFA
PVDF
PP
B
SMC
A
A
Air Operated Type
Integral Fitting Type
Series LVQ
Dimensions
Basic type, High back pressure spec.
N.C. valve
LVC
Q
LVA
LVH
LVD
LVQ
øE
LQ1
R
P
LVN
Rc 1/8 (NPT 1/8)
Sensor (breathing) port
TL/TIL
LQ1 integral fitting 1/8 (ø3), (ø4)
Pilot port
K
F
Rc 1/8 (NPT 1/8)
Pilot port
SMC
A
B
SMC
A
L
G
J
B
(H)
Pilot port Rc 1/8 (NPT 1/8)
Threaded type
N
D
B
A
C
M
∗ LVQm0-S shown.
LVQm0- VS m Dimensions (N.C. valve)
(mm)
Model
A
B
C
D
E
F
LVQ20- m
LVQ30- VS m
LVQ40- VS m
LVQ50- VS m
LVQ60-Vm∗
25.5
46
31.5
58
33.6
56.5
28.5
57
34.5
69
45.4
77
28.5
57
34.5
69
45.4
82.5
42
84
48
96
75
42
84
48
96
75
V
S
G
H
K
L
M
N
P
21.8
37
5
7
15
31.3
21
25.3
32
50
6
7
20
37.2
25
31.2
109
37.5
55.5
6
7
20
37.2
25
31.2
141
50.2
78.2
10
7
20
50.8
38.5
45
60
88
10
7
20
50.8
38.5
45
Vm
Sm
12
70
77
16.5
83
95
22
95
127
25
130
136.8
32
150
J
Q
R
∗ LVQ60 available only as “V”.
521
LQ3
Series LVQ
Dimensions
With flow rate adjustment, High back pressure spec. with flow rate adjustment
N.C. valve
Dimensions
(Max. S)
(mm)
S
Model
LVQ20- VS n-1
83
LVQ30- VS n-1
LVQ40- VS n-1
LVQ50- VS n-1
LVQ60-Vn-1∗
113.5
119
B
171.5
SMC
A
182.5
∗ LVQ60 available only as “V”.
With bypass, High back pressure spec. with bypass
N.C. valve
B
D
A
LVQ20
C
N
M
. T)
(Max
LVQ30, LVQ40
LVQ50, LVQ60
SMC
V
N
M
V
SMC
B
A
D
B
A
C
U
SMC
(Max. T)
Z
(H)
View Z
∗ LVQm0-S shown.
Dimensions
(mm)
H
Model
A
B
C
D
M
N
T
U
V
Vm
Sm
LVQ20- m-2
LVQ30- VS m-2
LVQ40- VS m-2
LVQ50- VS m-2
LVQ60-Vm-2∗
25.5
46
31.5
58
7
15
34.3
10.6
7
64
77
25.5
51
31.5
63
7
15
36.9
16.5
10
83
95
25.5
51
31.5
63
7
15
37.9
22
10
95
109
38
76
44
88
7
20
64
25
17
130
141
38
76
44
88
7
20
66
32
17
150
V
S
∗ LVQ60 available only as “V”.
522
Air Operated Type
Integral Fitting Type
With flow rate adjustment & bypass
High back pressure spec. with flow rate adjustment & bypass
N.C. valve
Series LVQ
N
M
LVC
D
B
A
C
LVQ20
LVA
LVH
.
(Max
T)
LVD
V
LVQ
LQ1
N
M
(Max. S)
LVQ30, LVQ40
LVQ50, LVQ60
LVN
V
TL/TIL
SMC
B
A
C
LQ3
A
SMC
(Max. T)
U
B
D
SMC
Z
(H)
View Z
∗ LVQm0-S shown.
Dimensions
(mm)
H
Model
A
B
C
D
M
N
S
T
U
V
Vm
Sm
LVQ20- m-3
LVQ30- VS m-3
LVQ40- VS m-3
LVQ50- VS m-3
LVQ60-Vm-3∗
25.5
46
31.5
58
7
15
83
34.3
10.6
7
64
77
25.5
51
31.5
63
7
15
113.5
36.9
16.5
10
83
95
25.5
51
31.5
63
7
15
119
37.9
22
10
95
109
38
76
44
88
7
20
171.5
64
25
17
130
141
38
76
44
88
7
20
182.5
66
32
17
150
–
V
S
∗ LVQ60 available only as “V”.
With indicator, High back pressure spec. with indicator
N.C. valve
(mm)
Model
S
LVQ20- VS m-4
LVQ30- VS m-4
LVQ40- VS m-4
LVQ50- VS m-4
LVQ60-Vm-4∗
70.5
88.5
S
Dimensions
94
134.5
B
SMC
A
144
∗ LVQ60 available only as “V”.
∗ LVQm0-S shown.
523
Series LVQ
Dimensions
Q
Basic type
N.O. valve
øE
LQ1 integral fitting 1/8 (ø3), (ø4)
Pilot port
R
Rc 1/8 (NPT 1/8)
Sensor (breathing) port
Rc 1/8 (NPT 1/8)
Pilot port
Rc1/8 (NPT 1/8)
Breathing port
K
W
(F)
Rc 1/8 (NPT 1/8)
Breathing port
SMC
B
A
SMC
A
L
G
J
B
(H)
Pilot port Rc 1/8 (NPT 1/8)
Threaded type
D
B
A
C
N
M
∗ LVQm0-S shown.
Double acting valve
P
LQ1 integral fitting 1/8 (ø3), (ø4)
Pilot port
Rc 1/8 (NPT 1/8)
Pilot port
R
LQ1 integral fitting 1/8 (ø3), (ø4)
Pilot port
Rc 1/8 (NPT 1/8)
Pilot port
Rc 1/8 (NPT 1/8)
Sensor (breathing) port
B
SMC
A
B
SMC
A
∗ LVQm0-S shown.
LVQn 12 - VS n Dimensions (N.O. valve, double acting valve)
Model
A
B
C
D
E
F
LVQ2 12 - VS n
LVQ3 12 - VS n
LVQ4 12 - VS n
LVQ5 12 - VS n
LVQ6 12 -Vn∗
25.5
46
31.5
58
33.6
81
28.5
57
34.5
69
45.4
99
28.5
57
34.5
69
45.4
42
84
48
96
42
84
48
96
∗ LVQ60 available only as “V”.
524
G
(mm)
H
Vn
Sn
J
K
L
M
N
P
12
70
77
16.5
83
95
21.8
37
5
7
15
31.3
32
50
6
7
20
37.2
104.5
22
95
109
37.5
55.5
6
7
20
75
145
25
130
141
50.2
78.2
10
7
75
154.5
32
150
60
88
10
7
Q
R
W
21
25.3
64
25
31.2
82
37.2
25
31.2
20
50.8
38.5
45
128
20
50.8
38.5
45
137.5
87.5
Air Operated Type
Integral Fitting Type
With bypass
Double acting valve
Series LVQ
N
M
LVQ2
1
2
SMC
LVA
D
B
A
C
LVC
LVH
. T)
(Max
LVD
LVQ
V
LQ1
LVN
SMC
SMC
TL/TIL
N
SMC
SMC
SMC
V
A
B
A
C
U
B
LQ3
M
LVQ3 12 , LVQ4 12
LVQ5 12 , LVQ6 12
D
Z
(Max. T)
(H)
View Z
∗ LVQm0-S shown.
Dimensions (N.O valve, double acting valve)
(mm)
A
B
C
D
M
N
T
U
LVQ2 - n-2
LVQ312 - VS n-2
25.5
46
31.5
58
7
15
34.3
25.5
51
31.5
63
7
15
36.9
LVQ412 - VS n-2
LVQ512 - VS n-2
LVQ612 -Vn-2∗
25.5
51
31.5
63
7
15
38
76
44
88
7
38
76
44
88
7
Model
1
2
V
S
H
V
Vn
Sn
10.6
7
64
77
16.5
10
83
95
37.9
22
10
95
109
20
64
25
17
130
141
20
66
32
17
150
∗ LVQ60 available only as “V”.
525
Air Operated Type
Integral Fitting Type
Space Saving/Space Saving Connection
Series LVQS
How to Order
LVQ 2 0 S
S 07
Option (2)
Symbol
Body class
Nil
Symbol Body class Orifice dia.
2
2
ø4
3
3
ø8
4
4
ø10
5
5
ø16
6
6
ø22
Pilot port thread type
Nil LQ1 integral fitting Connection tubing O.D. 1/8" (ø3)
M LQ1 integral fitting Connection tubing O.D. ø4
R
Threaded
Rc 1/8
N
Threaded
NP T1/8
P
Note
24
—
v
— For high temperature
v Buffer material FFKM
v For ammonium hydroxide
High flow spec.
— — — v v — — — — — LVQ6m only
2
v
—
v
v
3
v
—
v
v
4
v
—
v
v
5
v
v
v
v
6
v
v
v
v
7
v
—
v
v
Nil
N.C.
N.O.
Double acting
Note) Refer to variations
in the table below
for valve type combinations.
1
2
3
4
5
None
With flow rate adjustment
With bypass
With flow rate adjustment & bypass
With indicator
High back pressure (0.42 MPa)
8
v
—
v
v
9
v
—
v
v
Note) Options (2) cannot
be combined with
each other.
Option (1)
Valve type
0
1
2
J
K
N
Applicable option
1
v
v
v
v
6 High back pressure with flow rate adjustment
High back pressure with bypass
7
8 High back pressure with flow rate adjustment & bypass
High back pressure with indicator
9
With indicator & bypass
24
Note) Refer to variations in the
table below for valve
type and option (1) combinations.
Options (1) can not be
combined each other.
Variations
Model
Orifice dia
meter
Applic
able fi
tting s
ize
Valv
e ty
Symbol
p
Body type
S
Space saving connection
Type
Fitting type
Symbol
V
S
Fittings
LQ1
LQ2
e
Basic type
N.C.
N.C.
Body class
2, 3, 4, 5, 6
2, 3, 4, 5
N.O.
Symbol
Fitting size
07
11
13
19
25
2
3
4
5
6
2
Body class
3 4 5 6
Note) Refer to page 527 for How to
order fitting parts.
Select the fittings of the same
size as the one at the valve
side.
PA
A N.O.
PB
N.C. N.O. Double
acting Double
AB
B
Double
acting
Applicable fitting size
PB
PA
AB
acting
With flow
rate
adjustment
PA
B
N.C.
A
N.C.
With bypass
Double
acting
With flow
rate
adjustment &
bypass
N.C.
A
Double
PB
N.C. Double acting acting
B
N.C.
PA
PA
A B
PA
B
A
N.C.
N.C.
With indicator
PA
B
A
N.C.
N.C.
High
back
pressure
PA
B
A
N.C.
N.C.
With indicator & bypass
PA
B
A
N.C.
526
N.C.
LVQ20
LVQ30
LVQ40
LVQ50
LVQ60
ø4
ø8
ø10
ø16
ø22
2
3
4
5
6
Air Operated Type
Integral Fitting Type
Series LVQS
How to Order Fittings for Space Saving
Applicable tubing size
Size
No.
2
2
3
3
3
4
4
5
5
1
2
1
2
3
1
2
1
2
6
6
1
2
Applicable
tubing size (mm)
Reducing
Size Symbol
2
2
2
3
3
4
4
5
5
6
6
6x4
4x3
10 x 8
8x6
6x4
12 x 10
10 x 8
19 x 16
12 x 10
25 x 22
19 x 16
Applicable
tubing size (inch)
A
B
C
A
B
A
B
A
B
A
B
1/4" x 5/32"
3/16" x 1/8"
1/8" x 0.086"
3/8" x 1/4"
1/4" x 5/32"
1/2" x 3/8"
3/8" x 1/4"
3/4" x 5/8"
1/2" x 3/8"
1" x 7/8"
3/4" x 5/8"
Basic size
Reducing
LVC
LVA
LVH
LVD
With reducer
LVQ
Note 1) Select a fitting the same size as the valve fitting.
LQ1
LQ1 E
LQ2 E
S
S
61
21
LVN
TL/TIL
One nut (including insert bushing) of the nuts
is not attached.
LQ3
Type of fitting
E
T
Union elbow
Union tee
Applicable tubing size
SMC
SMC
P
U
Panel mount union
Union
SMC
SMC
Size
No.
Applicable
tubing size (mm)
2
2
3
3
3
4
4
5
5
1
2
1
2
3
1
2
1
2
6x4
4x3
10 x 8
8x6
6x4
12 x 10
10 x 8
19 x 16
12 x 10
Reducing
Size Symbol
2
2
2
3
3
4
4
5
5
Applicable
tubing size (inch)
A
B
C
A
B
A
B
A
B
1/4" x 5/32"
3/16" x 1/8"
1/8" x 0.086"
3/8" x 1/4"
1/4" x 5/32"
1/2" x 3/8"
3/8" x 1/4"
3/4" x 5/8"
1/2" x 3/8"
Basic size
Reducing
With reducer
Note 1) Select a fitting the same size as the valve fitting.
Piping example
LQ2T31-S
(Union tee)
LVQ30S-S11R
Applicable tubing size
1/4" x 5/32"
LQ2E3B-S
(Union elbow)
Applicable tubing size
10 x 8
Example
LVQ30S-S11R
LQ2T31-S (Union tee)
LQ2E3B-S (Union elbow)
1
1
1
Note) For shipment, the valve and fittings are individually
packaged and dispatched together in 1 box.
527
Series LVQS
Standard Specifications
LVQ20S LVQ30S LVQ40S LVQ50S LVQ60S
Model
Connection fitting size
2
3
IN/OUT port
Fitting
type
4
Pilot port
LQ1
ø8
ø10
ø16
ø22
8.4
31.2
45.6
120
192 (228) Note)
0.35
1.3
1.9
5
8 (9.5) Note)
-6
m2
Withstand pressure (MPa)
1
Operating pressure Standard
High
<ARB flow>
–98 kPa to 0.5 MPa
–98 kPa to 0.4 MPa
–98 kPa to 0.3 MPa
temperature
Standard
Back pressure
(MPa)
LQ1
ø4
Orifice diameter
Av x 10
Flow
characteristics Cv
6
5
LQ1 or LQ2
0.2 or less
0.3 or less
High back
pressure
High
temperature
0.42
0.2 or less
0.3 or less
Valve leakage (cm3/min)
0 (with water pressure)
Pilot air pressure (MPa)
0.3 to 0.5 (High back pressure: 0.45 to 0.55)
1/8" (ø3), ø4, Rc 1/8, NPT 1/8
Pilot port size
Fluid temperature Standard
High
(°C)
0 to 100
0 to 170
temperature
Ambient temperature (°C)
0 to 60
0.085
Mass (kg)
0.175
0.223
0.725
0.835
Note) ( ) is high flow specification.
Specific Product Precautions
Be sure to read before handling. Refer to front matters 42 and 43 for Safety
Instructions, and pages 585 and 586 for High Purity Chemical Valve NonMetallic Exterior Precautions.
Piping
Caution
1. Take extra care with the insert bushing when connecting the fittings.
2. Tighten the nut to the end surface of the body. As a guide, refer to
the proper tightening torques shown below.
Tightening torque for piping
Body class
2
3
4
5
6
528
Torque (N·m)
LQ1
LQ2
0.3 to 0.4
1.5 to 2.0
0.8 to 1.0
3.0 to 3.5
1.0 to 1.2
7.5 to 9.0
2.5 to 3.0
11.0 to 13.0
5.5 to 6.0
—
Air Operated Type
Integral Fitting Type
Series LVQS
Construction
Basic type
N.C. type
N.O. type
Double acting type
PB
PB
LVC
q
q
q
LVA
e
e
B
wrt
B
LVH
PA
PA
A
SMC
e
B
A
B
A
SMC
LVD
A
LVQ
B
A
LQ1
LVN
With flow rate adjustment
With bypass
TL/TIL
With indicator
LQ3
y
u
PA
PA
y
B
SMC
A
B
B
A
B
SMC
A
A
Parts list
No.
Description
1
Actuator section
2
Body
3
Diaphragm
4
Insert bushing
5
Nut
6
Flow rate adjuster section
7
Indicator, cover
Material
PVDF
PFA
PTFE
PFA
PFA
PVDF
PP
529
Series LVQS
Dimensions
Q
Basic type, High back pressure spec.
N.C. valve
LQ1 integral fitting 1/8 (ø3), (ø4)
Pilot port
øE
Rc 1/8 (NPT 1/8)
Sensor (breathing) port
P
R
K
F
Rc 1/8 (NPT 1/8)
Pilot port
SMC
B
A
SMC
A
L
G
J
B
(H)
Pilot port Rc 1/8 (NPT 1/8)
Threaded type
N
D
B
A
C
M
∗ LVQm0-S shown.
LVQn0S- VS n Dimensions (N.C. valve)
(mm)
Model
A
B
C
D
E
F
LVQ20S- VS 07
LVQ30S- VS 11
LVQ40S- VS 13
LVQ50S- VS 19
LVQ60S-V25∗
25.5
46
31.5
58
33.6
56.5
12
89
92
28.5
57
34.5
69
45.4
77
16.5
106
112
28.5
57
34.5
69
45.4
82.5
22
120
42
84
48
96
75
127
25
164
42
84
48
96
75
136.8
32
177
∗ LVQ60 available only as “V”.
530
G
H
Vm
K
L
M
N
P
21.8
37
5
7
15
31.3
21
25.3
32
50
6
7
20
37.2
25
31.2
126
37.5
55.5
6
7
20
37.2
25
31.2
168
50.2
78.2
10
7
20
50.8
38.5
45
60
88
10
7
20
50.8
38.5
45
Sm
J
Q
R
Air Operated Type
Integral Fitting Type
Series LVQS
With flow rate adjustment, High back pressure spec. with flow rate adjustment
N.C. valve
Dimensions
(mm)
S
LVQ20S- VS 07-1
LVQ30S- VS 11-1
LVQ40S- VS 13-1
LVQ50S- VS 19-1
LVQ60S-V25-1∗
83
LVC
(Max. S)
Model
113.5
119
171.5
LVA
182.5
∗ LVQm0-S shown.
B SMC A
∗ LVQ60 available only as “V”.
LVH
LVD
LVQ
With bypass, High back pressure spec. with bypass
N.C. valve
LQ1
N
M
LVQ20S
LVN
LQ3
D
B
A
C
TL/TIL
. T)
(Max
LVQ30S, LVQ40S
LVQ50S, LVQ60S
V
N
M
V
B
A
C
U
B SMC A
(Max. T)
D
Z
View Z
Dimensions
Model
V
S
LVQ20S- 07-2
LVQ30S- VS 11-2
LVQ40S- VS 13-2
LVQ50S- VS 19-2
LVQ60S-V25-2∗
(mm)
A
B
C
D
M
N
T
U
V
25.5
46
31.5
58
7
15
34.3
10.6
7
25.5
51
31.5
63
7
15
36.9
16.5
10
25.5
51
31.5
63
7
15
37.9
22
10
38
76
44
88
7
20
64
25
17
38
76
44
88
7
20
66
32
17
∗ LVQm0-S shown.
∗ LVQ60 available only as “V”.
531
Series LVQS
Dimensions
N
M
D
B
A
LVQ20S
C
With flow rate adjustment & bypass
High back pressure spec.
with flow rate adjustment & bypass
N.C. valve
.
(Max
T)
V
(Max. T)
U
B SMC A
D
B
A
1/8
N
M
C
(Max. S)
LVQ30S, LVQ40S
LVQ50S, LVQ60S
V
Z
View Z
∗ LVQm0-S shown.
Dimensions
(mm)
Model
A
B
C
D
M
N
S
T
U
LVQ20S- VS 07-3
LVQ30S- VS 11-3
LVQ40S- VS 13-3
LVQ50S- VS 19-3
LVQ60S-V25-3∗
25.5
46
31.5
58
7
15
83
34.3
10.6
V
7
25.5
51
31.5
63
7
15
113.5
36.9
16.5
10
25.5
51
31.5
63
7
15
119
37.9
22
10
38
76
44
88
7
20
171.5
64
25
17
38
76
44
88
7
20
182.5
66
32
17
∗ LVQ60 available only as “V”.
With indicator, High back pressure spec. with indicator
N.C. valve
(mm)
Model
S
LVQ20S- VS 07-4
LVQ30S- VS 11-4
LVQ40S- VS 13-4
LVQ50S- VS 19-4
LVQ60S-V25-4∗
70.5
88.5
94
134.5
144
∗ LVQ60 available only as “V”.
532
S
Dimensions
B SMC A
∗ LVQm0-S shown.
Air Operated Type
Integral Fitting Type
Series LVQS
Q
Basic type
N.O. valve
LVC
LVA
LQ1 integral fitting 1/8 (ø3), (ø4)
øE
Pilot port
R
LVH
Rc 1/8 (NPT 1/8)
Sensor (breathing) port
LVD
Rc 1/8 (NPT 1/8)
Pilot port
LVQ
Rc 1/8 (NPT 1/8)
Breathing port
LQ1
(F)
Rc 1/8 (NPT 1/8)
Breathing port
W
LVN
K
TL/TIL
B SMC A
J
B SMC A
L
G
LQ3
(H)
Pilot port Rc 1/8 (NPT 1/8)
Threaded type
D
B
A
C
N
M
∗ LVQm0-S shown.
Double acting valve
P
LQ1 integral fitting 1/8 (ø3), (ø4)
Pilot port
R
LQ1 integral fitting 1/8 (ø3), (ø4)
Pilot port
Rc 1/8 (NPT 1/8)
Pilot port
Rc 1/8 (NPT 1/8)
Pilot port
Rc 1/8 (NPT 1/8)
Sensor (breathing) port
B SMC A
B SMC A
∗ LVQm0-S shown.
LVQn 12 S- VS n
Dimensions (N.O. valve, double acting valve)
G
(mm)
H
Model
A
B
C
D
E
F
LVQ2 12 S- VS 07
LVQ3 12 S- VS 11
LVQ4 12 S- VS 13
LVQ5 12 S- VS 19
LVQ6 12 S-V25∗
25.5
46
31.5
58
33.6
81
12
89
92
28.5
57
34.5
69
45.4
99
16.5
106
112
28.5
57
34.5
69
45.4
104.5
22
120
42
84
48
96
75
145
25
164
42
84
48
96
75
154.5
32
177
Vm
K
L
M
N
P
21.8
37
5
7
15
31.3
21
25.3
64
32
50
6
7
20
37.2
25
31.2
82
126
37.5
55.5
6
7
20
37.2
25
31.2
168
50.2
78.2
10
7
20
50.8
38.5
45
128
60
88
10
7
20
50.8
38.5
45
137.5
Sm
J
Q
R
W
87.5
∗ LVQ60 available only as “V”.
533
Series LVQS
Dimensions
With bypass
Double acting valve
D
B
A
LVQ2 S
C
N
M
1
2
.
(Max
T)
LVQ3 12 S, LVQ4 12 S
LVQ5 12 S, LVQ6 12 S
SMC
N
M
V
A
B
A
C
U
B
V
(Max. T)
D
Z
View Z
∗ LVQm0-S shown.
Dimensions (N.O. valve, double acting valve)
(mm)
Model
A
B
C
D
M
N
T
U
LVQ2 12 S- VS 07-2
LVQ3 12 S- VS 11-2
LVQ4 12 S- VS 13-2
LVQ5 12 S- VS 19-2
LVQ6 12 S-V25-2∗
25.5
46
31.5
58
7
15
34.3
10.6
7
25.5
51
31.5
63
7
15
36.9
16.5
10
25.5
51
31.5
63
7
15
37.9
22
10
38
76
44
88
7
20
64
25
17
38
76
44
88
7
20
66
32
17
∗ LVQ60 available only as “V”.
534
V
Manual Type
Integral Fitting Type
(Hyper Fittings)
LVQH
Series
How to Order
LVQH 2 0
LVC
S 07
LVA
1
LVH
Option
Body class
Symbol Body class
2
2
3
3
4
4
5
5
6
6
Symbol
Nil
Orifice dia.
ø4
ø8
ø10
ø16
ø22
K
N
Note) Options cannot be combined with each other.
V
S
Fittings
LQ1
LQ2
Connecting
tubing O.D.
Metric sizes
ø3
03
ø4
04
ø6
06
08
ø8
10
ø10
12
ø12
19
ø19
25
ø25
Inch sizes
03
1/8
05
3/16
07
1/4
11
3/8
13
1/2
19
3/4
25
1
Basic size
Body class
2, 3, 4, 5, 6
2, 3, 4, 5
1
4
Nil
R
LQ3
Threaded
Threaded
NPT 1/8
Rc 1/8
Port B (OUT) different dia. size
Symbol
Nil
Application
Ports A & B same size
Refer to the
applicable
tubing table
to the left.
Different diameter tubings can be selected
within the same body
class.
Variations
Tubin
Model LVQH20 LVQH30 LVQH40 LVQH50 LVQH60
iameter
ø4
ø8
ø10
ø16
ø22
tside
dia. Millim
eter
6
10
12
19
25
Inch
Symbol
1/4
3/8
1/2
3/4
1
g ou
Type
LQ1
TL/TIL
90 Degree turn type
Multi-turn type (with indicator)
Breathing port thread type
Body class
2 3 4 5 6
With reducer
LVQ
Handle operation
Applicable tubing size
Symbol
LVD
LVN
Fitting type
Symbol
Note
Standard
Buffer material FFKM
For ammonium hydroxide
Orifice d
90 Degree
turn type
B
A
B
A
Multi-turn
type
535
Series LVQH
Standard Specifications
LVQH20 LVQH30 LVQH40 LVQH50 LVQH60
Model
Tubing O.D.
Metric size
6
10
12
19
25
1/4
3/8
1/2
3/4
1
ø4
ø8
ø10
ø16
ø22
8.4
31.2
45.6
120
192 (228) Note)
0.35
1.3
1.9
5
8 (9.5) Note)
Inch size
Fitting type
LQ1 or LQ2
Orifice diameter
-6
2
Av x 10 m
Flow
characteristics Cv
Withstand pressure (MPa)
1
Operating pressure <ARB flow>
–98 kPa to 0.5 MPa
–98 kPa to 0.4 MPa
0.3 or less
0.2 or less
Back pressure (MPa)
Valve leakage (cm3/min)
0 (With water pressure)
Fluid temperature (°C)
0 to 100
Ambient temperature (°C)
Mass (kg)
LQ1
0 to 60
LVQHm0-1
0.12
0.27
0.31
1.10
1.16
LVQHm0-4
0.11
0.20
0.22
0.67
0.87
Note) ( ) is high flow specification.
Specific Product Precautions
Be sure to read before handling. Refer to front matters 42 and 43 for Safety
Instructions, and pages 585 and 586 for High Purity Chemical Valve NonMetallic Exterior Precautions.
Piping
Caution
1. Connect tubing with special tools.
Refer to the pamphlet “High-Purity Fluoropolymer Fittings HYPER FITTING®/Series
LQ1, 2 Work Procedure Instructions” (M-E05-1) for connecting tubing and special
tools. (Downloadable from our web site.)
2. Tighten the nut to the end surface of the body. As a guide, refer to
the proper tightening torques shown below.
Tightening torque for piping
Body class
2
3
4
5
6
536
Torque (N·m)
LQ1
LQ2
0.3 to 0.4
1.5 to 2.0
0.8 to 1.0
3.0 to 3.5
1.0 to 1.2
7.5 to 9.0
2.5 to 3.0
11.0 to 13.0
5.5 to 6.0
—
Manual Type
Integral Fitting Type
Series
LVQH
Construction
90 Degree turn type
u
LVC
q
LVA
LVH
LVD
y
e
LVQ
LQ1
LVN
B
w
r
t
A
r
t
TL/TIL
With reducer
LQ3
Multi-turn type (with indicator)
i
B
B
u
A
A
Parts list
No.
Description
Material
1
Actuator section
2
Body
3
Diaphragm
4
Insert bushing
PFA
5
Nut
PFA
6
Collar
7
Handle section
PVDF
8
Indicator, cover
PP
PVDF
PFA
PTFE
PFA
537
Series LVQH
Dimensions
90 Degree turn type
Locked
(Valve closed)
0°
Q
9
Not locked
(Valve open)
Y
Rc 1/8 (NPT 1/8)
Sensor (breathing) port
(F)
ø7
Dimensions
(mm)
LVQH20- m-1
LVQH30- VS m-1
LVQH40- VS m-1
LVQH50- VS m-1
LVQH60-Vm-1∗
25.5
46
31.5
58
79
28.5
57
34.5
69
28.5
57
34.5
69
42
84
48
42
84
48
Model
J
K
LVQH20- m-1
LVQH30- VS m-1
LVQH40- VS m-1
LVQH50- VS m-1
LVQH60-Vm-1∗
21.8
32
V
S
G
Vm
Sm
12
70
77
103
16.5
83
95
108
22
95
109
96
165
25
130
141
96
175
32
150
—
L
M
N
37
5
7
15
21
55
50
6
7
20
25
80
37.5
55.5
6
7
20
25
50.2
78.2
10
7
20
38.5
110
60
88
10
7
20
38.5
110
Q
B
A
(H)
N
M
Y
80
D
F
C
D
G
L
C
A
B
B
A
V
S
J
Model
H
∗ LVQ60 available only as “V”.
∗ LVQm0-S shown.
Multi-turn type (with indicator)
Valve closed direction
Valve open direction
Y
Dimensions
S
Y
LVQH20- VS m-4
LVQH30- VS m-4
LVQH40- VS m-4
LVQH50- VS m-4
LVQH60-Vm-4∗
89.6
50
107.2
50
112.7
50
165
71
174.5
71
∗ LVQ60 available only as “V”.
∗ LVQm0-S shown.
538
(Max. S)
(mm)
Model
B
A
Manual Type
Integral Fitting Type
Space Saving/Space Saving Connection
Series LVQHS
How to Order
LVQH 2 0 S
LVC
S 07
LVA
1
Symbol Body class
2
2
3
3
4
4
5
5
6
6
Symbol
Nil
Orifice dia.
ø4
ø8
ø10
ø16
ø22
K
N
Note
Standard
Buffer material FFKM
For ammonium hydroxide
LVD
LVQ
Note) Options cannot be combined with each other.
Handle operation
Space saving connection
1
4
TL/TIL
90 Degree turn type
Multi-turn type (with indicator)
LQ3
Fitting type
Symbol
V
S
Fittings
LQ1
LQ2
Body class
2, 3, 4, 5, 6
2, 3, 4, 5
Breathing port thread type
Nil
R
Threaded
Threaded
NPT 1/8
Rc 1/8
Applicable fitting size
Symbol
Connecting
tubing O.D.
07
11
13
19
25
1/4
3/8
1/2
3/4
1
2
Body class
3 4 5 6
Note) Refer to page 540 for How to
order fitting parts.
Select the fittings of the
same size as the one at the
valve side.
Variations
Type
LQ1
LVN
Body type
S
LVH
Option
Body class
Model LVQH20S LVQH30S LVQH40S LVQH50S LVQH60S
Orifice d
ia
meter
Conn
ø4
ø8
ø10
ø16
ø22
ection
fi
tt
in
g size
Symb
ol
2
3
4
5
6
90 Degree
turn type
B
A
B
A
Multi-turn
type
539
Series LVQHS
How to Order Fittings for Space Saving
Applicable tubing size
Size
No.
2
2
3
3
3
4
4
5
5
1
2
1
2
3
1
2
1
2
6
6
1
2
Applicable
tubing size (mm)
Reducing
Size Symbol
2
2
2
3
3
4
4
5
5
6
6
6x4
4x3
10 x 8
8x6
6x4
12 x 10
10 x 8
19 x 16
12 x 10
25 x 22
19 x 16
Applicable
tubing size (inch)
A
B
C
A
B
A
B
A
B
A
B
Reducing
1/4" x 5/32"
3/16" x 1/8"
1/8" x 0.086"
3/8" x 1/4"
1/4" x 5/32"
1/2" x 3/8"
3/8" x 1/4"
3/4" x 5/8"
1/2" x 3/8"
1" x 7/8"
3/4" x 5/8"
Basic size
With reducer
Note 1) Select a fitting the same size as the valve fitting.
LQ1 E
LQ2 E
S
S
61
21
One nut (including insert bushing) of the nuts
is not attached.
Type of fitting
E
T
Union elbow
Union tee
Applicable tubing size
SMC
SMC
P
U
Panel mount union
Union
SMC
SMC
Size
No.
Applicable
tubing size (mm)
2
2
3
3
3
4
4
5
5
1
2
1
2
3
1
2
1
2
6x4
4x3
10 x 8
8x6
6x4
12 x 10
10 x 8
19 x 16
12 x 10
Reducing
Size Symbol
2
2
2
3
3
4
4
5
5
A
B
C
A
B
A
B
A
B
Applicable
tubing size (inch)
Reducing
1/4" x 5/32"
3/16" x 1/8"
1/8" x 0.086"
3/8" x 1/4"
1/4" x 5/32"
1/2" x 3/8"
3/8" x 1/4"
3/4" x 5/8"
1/2" x 3/8"
Basic size
With reducer
Note 1) Select a fitting the same size as the valve fitting.
Piping example
LVQH30S-S11R-1
Example
LQ2T31-S
(Union tee)
Applicable tubing size
1/4" x 5/32"
LQ2E3B-S
(Union elbow)
Applicable tubing size
10 x 8
540
LVQH30S-S11R-1
LQ2T31-S (Union tee)
LQ2E3B-S (Union elbow)
1
1
1
Note) For shipment, the valve and fittings are individually
packaged and dispatched together in 1 box.
Manual Type
Integral Fitting Type
Series
LVQHS
Standard Specifications
LVQH20S LVQH30S LVQH40S LVQH50S LVQH60S
Model
Connection fitting size
2
3
Fitting type
4
Orifice diameter
6
Flow
characteristics Cv
LQ1
ø4
ø8
ø10
ø16
ø22
8.4
31.2
45.6
120
192 (228) Note)
0.35
1.3
1.9
5
8 (9.5) Note)
Av x 10-6m2
Withstand pressure (MPa)
1
Operating pressure <ARB flow>
–98 kPa to 0.5 MPa
–98 kPa to 0.4 MPa
0.3 or less
0.2 or less
Back pressure (MPa)
Valve leakage (cm3/min)
0 to 100
Ambient temperature (°C)
0 to 60
LVC
LVA
LVH
LVD
0 (With water pressure)
Fluid temperature (°C)
Mass (kg)
5
LQ1 or LQ2
LVQ
LVQHm0S-1
0.14
0.30
0.33
1.14
1.18
LVQHmS0-4
0.13
0.23
0.24
0.71
0.89
Note) ( ) is high flow specification.
LQ1
LVN
TL/TIL
Specific Product Precautions
LQ3
Be sure to read before handling. Refer to front matters 42 and 43 for Safety
Instructions, and pages 585 and 586 for High Purity Chemical Valve NonMetallic Exterior Precautions.
Piping
Caution
1. Take extra care with the insert bushing when connecting the fittings.
2. Tighten the nut to the end surface of the body. As a guide, refer to
the proper tightening torques shown below.
Tightening torque for piping
Body class
2
3
4
5
6
Torque (N·m)
LQ1
LQ2
0.3 to 0.4
1.5 to 2.0
0.8 to 1.0
3.0 to 3.5
1.0 to 1.2
7.5 to 9.0
2.5 to 3.0
11.0 to 13.0
5.5 to 6.0
—
541
Series LVQHS
Construction
90 Degree turn type
y
q
e
B
w
r
t
A
Multi-turn type (with indicator)
u
B
B
Parts list
No.
Description
Material
PVDF
1
Actuator section
2
Body
3
Diaphragm
4
Insert bushing
5
Nut
6
Handle section
PVDF
7
Indicator, cover
PP
542
PFA
PTFE
PFA
PFA
y
A
A
Manual Type
Integral Fitting Type
Series
LVQHS
Dimensions
90 Degree turn type
Locked
(Valve closed)
0°
9
Q
LVC
LVA
Not locked
(Valve open)
LVH
Y
LVD
LVQ
Rc 1/8 (NPT 1/8)
ø7
Dimensions
(mm)
B
C
D
F
G
LVQH20S- m-1
LVQH30S- VS m-1
LVQH40S- VS m-1
LVQH50S- VS m-1
LVQH60S-Vm-1∗
25.5
46
31.5
58
79
28.5
57
34.5
69
103
28.5
57
34.5
69
108
42
84
48
96
42
84
48
96
Model
J
L
M
N
Q
LVQH20S- VS m-1
LVQH30S- VS m-1
LVQH40S- VS m-1
LVQH50S- VS m-1
LVQH60S-Vm-1∗
21.8
5
7
15
21
55
32
6
7
20
25
80
37.5
6
7
20
25
50.2
10
7
20
38.5
110
60
10
7
20
38.5
110
Vm
Sm
89
92
16.5
106
112
22
120
126
165
25
164
168
175
32
177
—
12
LVN
TL/TIL
B
A
G
L
A
LQ3
(H)
N
M
A
D
80
C
Y
B
V
S
∗ LVQ60 available only as “V”.
∗ LVQm0-S shown.
Multi-turn type (with indicator)
Valve closed direction
Valve open direction
Y
Dimensions
S
Y
LVQH20S- VS m-4
LVQH30S- VS m-4
LVQH40S- VS m-4
LVQH50S- VS m-4
LVQH60S-Vm-4∗
89.6
50
107.2
50
112.7
50
165
71
174.5
71
(Max. S)
(mm)
Model
LQ1
H
J
Model
(F)
Sensor (breathing) port
B
A
∗ LVQ60 available only as “V”.
∗ LVQm0-S shown.
543
Series LVQ
Fittings and Special Tools
Fittings
Changing tubing sizes
The tubing size can be changed within the same body class (body size) by replacing the nut and insert bushing.
Part composition
Component parts
Tubing O.D.
Body
class
Metric sizes
4
6
8
10
12
Nut
Insert
Basic size
Yes
Yes
No
Reducer type
Yes
Yes
Yes
Inch sizes
19
25
1/8
3/16
1/4
3/8
1/2
3/4
1
2
3
Collar (insert assembly)
Caution
4
1. Connect tubing with special tools.
5
Refer to the pamphlet “High-Purity Fluoro polymer Fittings HYPER FITTING®/Series LQ1, 2
Work Procedure Instructions” (M-E05-1) for connecting tubing and special tools. (Downloadable
from our web site.)
6
Changing the tubing size
Example) Changing the tubing from an O.D. 1/4" to O.D. 1/8" in body class 2.
Prepare an insert bushing and nut for 1/8" O.D. tubing (LQ-2U03) and change the tubing size.
(Refer to the section on how to order fitting parts.)
Note) Tubing is sold separately.
Insert bushing
Insert bushing
LQ-2B07
LQ-2B03
Nut
Nut
LQ-2N07
LQ-2N03
Collar
Tubing
Tubing O.D. 1/4"
LQ-2U07
(standard size)
Tubing
Tubing O.D. 1/8"
LQ-2U03
(reducer type)
How to order fitting parts
LQ
2 U 03
∗ Type U is recommended when changing tubing sizes.
Type of fitting
Tubing size
Symbol Applicable fitting
Nil
LQ2
LQ1
1
LQ1, LQ2
Body class
Symbol Body class Applicable fitting
2
2
3
3
LQ1
LQ2
4
4
5
5
LQ1
6
6
Type of part
Symbol
Type of part
U
Nut & insert bushing
B
Insert bushing
N
Nut
Symbol Tubing O.D. Body class Applicable fitting Symbol Tubing O.D. Body class Applicable fitting
03
10
1/8" (ø3)
ø10
04
12
ø4
ø12
4
2
05
11
3/16"
3/8"
LQ1
06
13
ø6
1/2"
LQ2
07
12
1/4"
ø12
LQ1
LQ2
06
13
ø6
1/2"
5
08
19
ø8
3/4", ø19
10
19
ø10
3/4", ø19
3
6
LQ1
07
25
1/4"
1", ø25
11
3/8"
For pilot port
LQ1
LQ1
1 U 03
Body class
Symbol Body class Applicable fitting
1
LQ1
1
Type of part
Symbol
Type of part
U
Nut & insert bushing
B
Insert bushing
N
Nut
544
Tubing size
Symbol
03
04
Tubing O.D.
1/8" (ø3)
ø4
Body class
1
Note) Cannot change to tubing of different
diameter.
Air Operated Type
Flare Integral Fitting Type
(Hyper Fittings)
LVQ-Z
Series
How to Order
LVQ 2 0
LVC
LVA
Z 07
LVH
Option (2)
Body class
Symbol Body class
2
2
3
3
4
4
5
5
6
6
Orifice dia.
ø4
ø8
ø10
ø16
ø22
Symbol
Pilot port thread type
Nil LQ3 integral fitting Connection tubing O.D. 1/8" (ø3)
M LQ3 integral fitting Connection tubing O.D. ø4
R
Threaded
Rc 1/8
N
Threaded
NPT 1/8
Nil
0
1
2
N.C.
N.O.
Double acting
Note) Refer to variations in the table below for
valve type combinations.
1
2
3
4
5
Connecting
Symbol
tubing O.D.
Metric sizes
ø3
03
ø4
04
ø6
06
08
ø8
10
ø10
12
ø12
19
ø19
25
ø25
Inch sizes
07
1/4
11
3/8
13
1/2
19
3/4
25
1
Body class
2 3 4 5 6
Note
LVD
For high temperature
Buffer material FFKM
For ammonium hydroxide
High flow spec.
LVQ6m only
LVQ
9 24
J
K
N
P
Note) Options (2) cannot be comNone
6 High back pressure with flow rate adjustment
bined with each other.
High back pressure with bypass
With flow rate adjustment
7
With bypass
8 High back pressure with flow rate adjustment & bypass
High back pressure with indicator
With flow rate adjustment & bypass 9
With indicator & bypass
With indicator
24
High back pressure (0.42 MPa)
Note) Refer to variations in the table below for valve type
and option (1) combinations.
Options (1) can not be combined each other.
Variations
Model
Tubin
g ou
LQ3 integral fittings
Applicable fitting size
2
Nil
Option (1)
Valve type
1
Applicable option
3 4 5 6 7 8
Type
tside
Orifice d
iameter
Millime
dia.
ter
Va
lve
Symbol
typ
Basic type
e
Inch
LVQ20
LVQ30
LVQ40
LVQ50
LVQ60
ø4
ø8
ø10
ø16
ø22
6
10
12
19
25
1/4
3/8
1/2
3/4
1
N.C.
N.C.
PB
PA
AB
A N.O.
PB
N.O. Double
acting Double
AB
B
N.C.
N.O.
PA
acting
Double acting
With flow
rate
adjustment
PA
B
N.C.
A
N.C.
With bypass
Double
acting
B
N.C.
With flow
rate
adjustment &
bypass
PA
PA
N.C.
A B
A
Double
PB
N.C. Double acting acting
PA
B
A
N.C.
N.C.
With indicator
PA
B
A
N.C.
N.C.
High
back
pressure
PA
B
A
N.C.
N.C.
With indicator & bypass
PA
B
A
N.C.
N.C.
545
LQ1
LVN
TL/TIL
LQ3
Series LVQ-Z
Standard Specifications
LVQ20
Model
Metric size
Tubing O.D.
Inch size
Orifice diameter
Av x 10-6m2
Flow
characteristics Cv
Withstand pressure (MPa)
Operating
Standard
pressure
High
<ARB flow> temperature
Standard
Back
High back
pressure
pressure
(MPa)
High
LVQ60
10
12
19
25
3/8
1/2
3/4
1
ø4
ø8
ø10
ø16
ø22
8.4
31.2
45.6
120
192 (228) Note)
0.35
1.3
1.9
5
8 (9.5) Note)
1
–98 kPa to 0.5 MPa
–98 kPa to 0.4 MPa
–98 kPa to 0.3 MPa
0.3 or less
0.2 or less
0.42
0.3 or less
0.2 or less
0 (With water pressure)
0.3 to 0.5 (High back pressure: 0.45 to 0.55)
1/8" (ø3), ø4, Rc 1/8, NPT 1/8
Pilot port size
Fluid
temperature
(°C)
LVQ50
6
(cm3/min)
Pilot air pressure (MPa)
LVQ40
1/4
temperature
Valve leakage
LVQ30
Standard
0 to 100
High
temperature
0 to 170
0 to 60
Ambient temperature (°C)
0.08
Mass (kg)
0.18
0.22
0.72
0.87
Note) ( ) is high flow specification.
Specific Product Precautions
Be sure to read before handling. Refer to front matters 42 and 43 for Safety
Instructions, and pages 585 and 586 for High Purity Chemical Valve NonMetallic Exterior Precautions.
Piping
Caution
1. Connect tubing with special tools.
Refer to the pamphlet “High-Purity Fluoropolymer Fittings HYPER FITTING®/Flare
Type Series LQ3 Fitting Procedure” (M-E06-4) for connecting tubing and special
tools. (Downloadable from our web site.)
2. Tighten the nut to the end surface of the body. As a guide, refer to the
proper tightening torques shown below.
Tightening torque for piping
546
Body class
Torque (N·m)
2
3
4
5
6
1.6 to 1.8
3.2 to 3.5
5.0 to 5.3
10.0 to 10.5
22.5 to 23.0
Air Operated Type
Flare Integral Fitting Type
Series
LVQ-Z
Construction
Basic type
N.C. type
N.O. type
Double acting type
PB
PB
LVC
LVA
q
q
q
LVH
PA
PA
e
e
LVD
LVQ
e
LQ1
B
B
w
r
A
B
A
B
A
A
B
LVN
A
TL/TIL
LQ3
With flow rate adjustment
With bypass
With indicator
y
t
PA
PA
t
B
A
B
B
A
B
A
A
Parts list
No.
Description
1
Actuator section
2
Body
3
Diaphragm
4
Nut
5
Flow rate adjuster section
6
Indicator, cover
Material
PVDF
PFA
PTFE
PFA
PVDF
PP
547
Series LVQ-Z
Dimensions
Q
Basic type, High back pressure spec.
N.C. valve
øE
(P)
R
Rc 1/8 (NPT 1/8)
Sensor (breathing) port
LQ3 integral fitting 1/8 ( ø3, ø4)
Pilot port
K
F
Rc 1/8 (NPT 1/8)
Pilot port
A
A
B
L
G
J
B
(H)
Pilot port Rc 1/8 (NPT 1/8)
Threaded type
N
D
B
A
C
M
LVQm0-Zmm Dimensions (N.C. valve)
(mm)
Model
A
B
C
D
E
F
LVQ20-Zmm
LVQ30-Zmm
LVQ40-Zmm
LVQ50-Zmm
LVQ60-Zmm
25.5
46
31.5
58
33.6
56.5
12
28.5
57
34.5
69
45.4
77
16.5
28.5
57
34.5
69
45.4
82.5
22
42
84
48
96
75
127
42
84
48
96
75
136.8
548
G
H
J
K
L
M
N
P
75
Q
21.8
37
5
7
15
53.5
21
25.3
R
103
32
50
6
7
20
59.5
25
31.2
114
37.5
55.5
6
7
20
59.5
25
31.2
25
150
50.2
78.2
10
7
20
73
38.5
45
32
167
60
88
10
7
20
73
38.5
45
Air Operated Type
Flare Integral Fitting Type
Series
LVQ-Z
With flow rate adjustment
N.C. valve
Dimensions
(mm)
LVQ20-Zmm-1
LVQ30-Zmm-1
LVQ40-Zmm-1
LVQ50-Zmm-1
LVQ60-Zmm-1
LVC
(Max. S)
S
Model
83
113.5
LVA
LVH
119
171.5
B
A
LVD
182.5
LVQ
LQ1
With bypass
N.C. valve
LVQ20
N
LVN
M
TL/TIL
D
B
A
C
LQ3
. T)
(Max
LVQ30, LVQ40
LVQ50, LVQ60
V
N
M
V
A
(Max. T)
D
A
B
Z
C
U
B
View Z
Dimensions
(mm)
Model
A
B
C
D
M
N
T
U
LVQ20-Zmm-2
LVQ30-Zmm-2
LVQ40-Zmm-2
LVQ50-Zmm-2
LVQ60-Zmm-2
25.5
46
31.5
58
7
15
34.3
10.6
V
7
25.5
51
31.5
63
7
15
36.9
16.5
10
25.5
51
31.5
63
7
15
37.9
22
10
38
76
44
88
7
20
64
25
17
38
76
44
88
7
20
66
32
17
549
Series LVQ-Z
Dimensions
With flow rate adjustment & bypass
N.C. valve
N
LVQ20
D
B
A
C
M
.
(Max
T)
V
N
M
(Max. S)
LVQ30, LVQ40
LVQ50, LVQ60
(Max. T)
D
A
U
B
A
B
C
V
Z
View Z
Dimensions
(mm)
Model
A
B
C
D
M
N
S
T
U
LVQ20-Zm-3
LVQ30-Zmm-3
LVQ40-Zmm-3
LVQ50-Zmm-3
LVQ60-Zmm-3
25.5
46
31.5
58
7
15
83
34.3
10.6
V
7
25.5
51
31.5
63
7
15
113.5
36.9
16.5
10
25.5
51
31.5
63
7
15
119
37.9
22
10
38
76
44
88
7
20
171.5
64
25
17
38
76
44
88
7
20
182.5
66
32
17
With indicator
N.C. valve
(mm)
Model
S
LVQ20-Zmm-4
LVQ30-Zmm-4
LVQ40-Zmm-4
LVQ50-Zmm-4
LVQ60-Zmm-4
70.5
550
S
Dimensions
88.5
94
134.5
144
B
A
Air Operated Type
Flare Integral Fitting Type
Series
LVQ-Z
Q
Basic type
N.O. valve
LVC
LVA
Rc 1/8 (NPT 1/8)
Pilot port
øE
LQ3 integral fitting 1/8 (ø3, ø4)
LVH
R
Pilot port
LVD
Rc 1/8 (NPT 1/8)
Sensor (breathing) port
Rc 1/8 (NPT 1/8)
Breathing port
W
LVQ
LQ1
Rc 1/8 (NPT 1/8)
Breathing port
A
(F)
B
K
J
G
L
TL/TIL
Pilot port Rc 1/8 (NPT 1/8)
Threaded type
A
B
LVN
LQ3
(H)
D
B
A
C
N
M
Double acting valve
(P)
LQ3 integral fitting 1/8 (ø3, ø4)
Pilot port
Rc 1/8 (NPT 1/8)
Pilot port
R
Rc 1/8 (NPT 1/8)
Pilot port
LQ3 integral fitting 1/8 (ø3, ø4)
Pilot port
Rc 1/8 (NPT 1/8)
Sensor (breathing) port
B
A
A
B
LVQm 12-Zmm Dimensions (N.O. valve, double acting valve)
Model
A
B
C
D
E
F
G
J
LVQ212-Zmm
LVQ312-Zmm
LVQ412-Zmm
LVQ512-Zmm
LVQ612-Zmm
25.5
46
31.5
58
33.6
89.5
28.5
57
34.5
69
45.4
107.5
16.5
103
75
28.5
57
34.5
69
45.4
113
22
42
84
48
96
75
153.2
42
84
48
96
75
163
(mm)
K
L
M
N
P
21.8
37
5
7
15
53.5
32
50
6
7
20
59.5
114
37.5
55.5
6
7
20
25
150
50.2
78.2
10
7
32
167
60
88
10
7
12
H
Q
R
W
21
25.3
64
25
31.2
82
59.5
25
31.2
87.5
20
73
38.5
45
128
20
73
38.5
45
137.5
551
Series LVQ-Z
Dimensions
LVQ2 12
N
M
D
B
A
C
With bypass
Double acting valve
. T)
(Max
LVQ3 12 , LVQ4 12
LVQ5 12 , LVQ6 12
V
N
M
V
A
D
B
A
C
U
B
(Max. T)
Z
View Z
Dimensions (N.O valve, double acting valve)
(mm)
Model
A
B
C
D
M
N
T
U
LVQ2 12 -Zmm-2
LVQ3 12 -Zmm-2
LVQ4 12 -Zmm-2
LVQ5 12 -Zmm-2
LVQ6 12 -Zmm-2
25.5
46
31.5
58
7
15
34.3
10.6
7
25.5
51
31.5
63
7
15
36.9
16.5
10
25.5
51
31.5
63
7
15
37.9
22
10
38
76
44
88
7
20
64
25
17
38
76
44
88
7
20
66
32
17
552
V
Air Operated Type
Flare Integral Fitting Type
Space Saving/Space Saving Connection
Series LVQS-Z
How to Order
LVC
LVA
LVQ 2 0 S Z 07
Symbol Body class
2
2
3
3
4
4
5
5
6
6
Orifice dia.
ø4
ø8
ø10
ø16
ø22
Valve type
0
1
2
Symbol
Pilot port thread type
1
2
3
4
5
6
7
8
9
24
None
With flow rate adjustment
With bypass
With flow rate adjustment & bypass
With indicator
High back pressure (0.42 MPa)
LQ3 integral fitting
Type
1/4
3/8
1/2
3/4
1
2
J
K
N
For high temperature
Buffer material FFKM
For ammonium hydroxide
High flow spec.
LVQ6m only
P
Note) Options (2) cannot
be combined with
each other.
PA
Note) Refer to variations in the table below for valve type
and option (1) combinations.
Options (1) can not be combined with each other.
B
N.C.
N.O.
With flow
rate
adjustment
With bypass
N.C.
AB
PA
PA
A B A N.C.
N.C.
N.C.
B
Double
acting
PA
B
With flow
rate
adjustment &
bypass
A N.O.
PB
N.O. Double Double
acting acting
AB
Double acting
PA
PB
PA
N.C.
A B
A
Double
PB
N.C. Double acting acting
PA
B
A
N.C.
N.C.
With indicator
PA
B
A
N.C.
N.C.
High
back
pressure
PA
B
A
N.C.
N.C.
With indicator
& bypass
PA
B
A
LVD
LVQ
LQ1
LVN
TL/TIL
LQ3
High back pressure with indicator
With indicator & bypass
N.C.
N.C.
Body class
3 4 5 6
Note) Refer to page 554 for How to
order fitting parts.
Select the fittings of the
same size as the one at the
valve side.
Note
High back pressure with flow rate adjustment & bypass
Basic type
Applicable fitting size
9 24
Model LVQ20S LVQ30S LVQ40S LVQ50S LVQ60S
Orifice d
iameter
Conn
ø4
ø8
ø10
ø16
ø22
ection
fitting
Valv
size
e ty
Symbol
2
3
4
5
6
pe
Space saving connection
07
11
13
19
25
Applicable option
3 4 5 6 7 8
High back pressure with flow rate adjustment
High back pressure with bypass
Variations
Body type
Connecting
tubing O.D.
2
Nil
Nil LQ3 integral fitting Connection tubing O.D. 1/8" (ø3)
M LQ3 integral fitting Connection tubing O.D. ø4
Rc 1/8
Threaded
R
NPT 1/8
Threaded
N
Nil
Note) Refer to variations
in the table below
for valve type combinations.
Symbol
1
Option (1)
N.C.
N.O.
Double acting
S
LVH
Option (2)
Body class
N.C.
N.C.
553
Series LVQS-Z
How to Order Fittings for Space Saving
LQ3 E
6A
S
One nut of the nuts is not attached.
Type of fitting
E
Union elbow
T
Union tee
Applicable tubing size
P
Panel mount union
Size Symbol Applicable tubing size (inch)
1/4" x 5/32"
2
A
3/8" x 1/4"
3
A
1/2" x 3/8"
4
A
3/4" x 5/8"
5
A
1" x 7/8"
6
A
U
Union
Note 1) Select a fitting the same
size as the valve fitting.
Piping example
LVQ30S-Z11R
Example
LQ3T3A-S
(Union tee)
Applicable tubing size
3/8" x 1/4"
LQ3E3A-S
(Union elbow)
Applicable tubing size
3/8" x 1/4"
554
LVQ30S-Z11R
LQ3T3A-S (Union tee)
LQ3E3A-S (Union elbow)
1
1
1
Note) For shipment, the valve and fittings are individually
packaged and dispatched together in 1 box.
Air Operated Type
Flare Integral Fitting Type
Series
LVQS-Z
Standard Specifications
LVQ20S LVQ30S LVQ40S LVQ50S LVQ60S
Model
Connection fitting size
2
3
4
5
6
Orifice diameter
ø4
ø8
ø10
ø16
ø22
Av x 10-6m2
Flow
characteristics Cv
8.4
31.2
45.6
120
192 (228) Note)
0.35
1.3
1.9
5
8 (9.5) Note)
Withstand pressure (MPa)
Operating
Standard
pressure
High
<ARB flow> temperature
Standard
Back
High back
pressure
pressure
(MPa)
High
1
–98 kPa to 0.5 MPa
–98 kPa to 0.4 MPa
–98 kPa to 0.3 MPa
0.3 or less
LVH
LVD
0.3 or less
0.2 or less
Valve leakage (cm3/min)
0 ( With water pressure)
Pilot air pressure (MPa)
0.3 to 0.5 (High back pressure: 0.45 to 0.55)
LVQ
LQ1
1/8" (ø3), ø4, Rc 1/8, NPT 1/8
Pilot port size
Standard
Fluid
temperature (°C) High
0 to 100
Ambient temperature (°C)
0 to 60
Mass (kg)
LVN
0 to 170
temperature
0.085
0.175
0.223
TL/TIL
0.725
0.835
Note) ( ) is high flow specification.
Specific Product Precautions
Be sure to read before handling. Refer to front matters 42 and 43 for Safety
Instructions, and pages 585 and 586 for High Purity Chemical Valve NonMetallic Exterior Precautions.
Piping
Caution
1. Tighten the nut to the end surface of the body. As a guide, refer to
the proper tightening torques shown below.
Tightening torque for piping
Body class
Torque (N·m)
2
3
4
5
6
1.6 to 1.8
LVA
0.2 or less
0.42 or less
temperature
LVC
3.2 to 3.5
5.0 to 5.3
10.0 to 10.5
22.5 to 23.0
555
LQ3
Series LVQS-Z
Construction
Basic type
N.C. type
N.O. type
Double acting type
PB
PB
q
q
q
PA
A
wert
With flow rate adjustment
B
e
With bypass
A
B
B
1/4·6
1/4·6
1/4·6
B
A
B
1/4·6
PA
A
e
A
With indicator
y
u
PA
PA
B
A
1/4·6
A
1/4·6
1/4·6
B
1/4·6
t
1/4
B
A
Parts list
No.
Description
1
Actuator section
2
Body
3
Diaphragm
4
Plug
5
Nut
6
Flow rate adjuster section
7
Indicator, cover
556
Material
PVDF
PFA
PTFE
PFA
PFA
PVDF
PP
B
A
Air Operated Type
Flare Integral Fitting Type
Series
LVQS-Z
Dimensions
Basic type, High back pressure spec.
N.C. valve
1/4·6
LVC
Q
LVA
LVH
LVD
LVQ
Rc 1/8 (NPT 1/8)
Sensor (breathing) port
øE
LQ1
R
(P)
LVN
LQ3 integral fitting 1/8 (ø3, ø4)
Pilot port
Rc 1/8 (NPT 1/8)
Pilot port
TL/TIL
J
A
L
G
B
1/4·6
A
B
1/4·6
1/4·6
1/4·6
K
F
LQ3
(H)
Pilot port Rc 1/8 (NPT 1/8)
Threaded type
N
D
1/4·6
1/4·6
B
A
C
M
LVQm0S-Zm Dimensions (N.C. valve)
(mm)
Model
A
B
C
D
E
F
LVQ20S-Zm
LVQ30S-Zm
LVQ40S-Zm
LVQ50S-Zm
LVQ60S-Zm
25.5
46
31.5
58
33.6
56.5
28.5
57
34.5
69
45.4
28.5
57
34.5
69
45.4
42
84
48
96
75
42
84
48
96
75
G
H
J
K
L
M
N
P
12
105
77
16.5
82.5
22
127
136.8
Q
21.8
37
5
7
15
53.5
21
25.3
R
137
32
50
6
7
20
59.5
25
31.2
151
37.5
55.5
6
7
20
59.5
25
31.2
25
202
50.2
78.2
10
7
20
73
38.5
45
32
236
60
88
10
7
20
73
38.5
45
557
Series LVQS-Z
Dimensions
With flow rate adjustment, High back pressure spec. with flow rate adjustment
N.C. valve
Dimensions
S
LVQ20S-Zm-1
LVQ30S-Zm-1
LVQ40S-Zm-1
LVQ50S-Zm-1
LVQ60S-Zm-1
83
(Max. S)
(mm)
Model
113.5
1/4·6
171.5
B
1/4·6
119
A
182.5
With bypass, High back pressure spec. with bypass
N.C. valve
N
LVQ20S
D
1/4·6
1/4·6
1/4·6
B
A
C
M
. T)
(Max
LVQ30S, LVQ40S
LVQ50S, LVQ60S
A
U
1/4·6
1/4·6
B
1/4
V
N
M
V
View Z
Dimensions
(mm)
Model
A
B
C
D
M
N
T
U
LVQ20S-Zm-2
LVQ30S-Zm-2
LVQ40S-Zm-2
LVQ50S-Zm-2
LVQ60S-Zm-2
25.5
46
31.5
58
7
15
34.3
10.6
7
25.5
51
31.5
63
7
15
36.9
16.5
10
25.5
51
31.5
63
7
15
37.9
22
10
38
76
44
88
7
20
64
25
17
38
76
44
88
7
20
66
32
17
558
V
D
3/8
(Max. T)
3/8
B
A
C
Z
Air Operated Type
Flare Integral Fitting Type
With flow rate adjustment & bypass
High back pressure spec.
with flow rate adjustment & bypass
N.C. valve
LVQ20S
Series
LVQS-Z
N
M
C
1/4·6
D
A
1/4·6
1/4·6
B
LVC
LVA
LVH
.
(Max
LVD
T)
V
LVQ
LQ1
LVQ30S, LVQ40S
LVQ50S, LVQ60S
LVN
TL/TIL
N
LQ3
M
U
A
D
C
3/8
(Max. T)
1/4·6
1/4·6
B
3/8
B
A
(Max. S)
V
1/4
Z
View Z
Dimensions
(mm)
Model
A
B
C
D
M
N
S
T
U
LVQ20S-Zm-3
LVQ30S-Zm-3
LVQ40S-Zm-3
LVQ50S-Zm-3
LVQ60S-Zm-3
25.5
46
31.5
58
7
15
83
34.3
10.6
V
7
25.5
51
31.5
63
7
15
113.5
36.9
16.5
10
25.5
51
31.5
63
7
15
119
37.9
22
10
38
76
44
88
7
20
171.5
64
25
17
38
76
44
88
7
20
182.5
66
32
17
With indicator, High back pressure spec. with indicator
N.C. valve
(mm)
Model
S
LVQ20S-Zm-4
LVQ30S-Zm-4
LVQ40S-Zm-4
LVQ50S-Zm-4
LVQ60S-Zm-4
70.5
88.5
S
94
1/4·6
134.5
B
A
1/4·6
Dimensions
144
559
Series LVQS-Z
Dimensions
Basic type
N.O. valve
Q
1/4·6
1/4·6
LQ3 integral fitting 1/8" (ø3, ø4)
Pilot port
øE
R
Rc 1/8 (NPT 1/8)
Pilot port
Rc 1/8 (NPT 1/8)
Sensor (breathing) port
Rc 1/8 (NPT 1/8)
Breathing port
G
1/4·6
A
B
A
L
J
1/4·6
1/4·6
B
1/4·6
K
W
(F)
Rc 1/8 (NPT 1/8)
Breathing port
(H)
N
D
1/4·6
1/4·6
B
A
C
M
Double acting valve
LQ3 integral fitting 1/8" (ø3, ø4)
Pilot port
LQ3 integral fitting 1/8" (ø3, ø4)
(P)
Pilot port
Rc 1/8 (NPT 1/8)
Pilot port
R
Rc 1/8 (NPT 1/8)
Breathing port
Rc 1/8 (NPT 1/8)
1/4·6
1/4·6
1/4·6
B
A
1/4·6
Sensor (breathing) port
A
B
LVQm12S-Zm Dimensions (N.O. valve, double acting valve)
Model
A
B
C
D
E
LVQ212 S-Zm
LVQ312 S-Zm
LVQ412 S-Zm
LVQ512 S-Zm
LVQ612 S-Zm
25.5
46
31.5
58
33.6
89.5
28.5
57
34.5
69
45.4
107.5
28.5
57
34.5
69
45.4
42
84
48
96
42
84
48
96
560
F
G
H
J
12
105
16.5
137
113
22
75
153.2
75
163
(mm)
K
L
M
N
P
21.8
37
5
7
15
53.5
32
50
6
7
20
59.5
151
37.5
55.5
6
7
20
25
202
50.2
78.2
10
7
32
236
60
88
10
7
Q
R
W
21
25.3
64
25
31.2
82
59.5
25
31.2
20
73
38.5
45
128
20
73
38.5
45
137.5
87.5
Air Operated Type
Flare Integral Fitting Type
With bypass
Double acting valve
Series
LVQS-Z
LVQ2 12 S
N
M
LVC
1/4·6
D
C
A
1/4·6
1/4·6
B
LVA
LVH
LVD
.
(Max
LVQ
T)
V
LQ1
LVN
TL/TIL
LVQ3 12 S, LVQ4 12 S
LVQ5 12 S, LVQ6 12 S
LQ3
N
M
1/4
D
3/8
(Max. T)
U
1/4·6
1/4·6
A
B
3/8
B
A
C
V
Z
View Z
Dimensions (N.O. valve, double acting valve)
(mm)
Model
A
B
C
D
M
N
T
U
LVQ212 -S-Zm-2
LVQ312 -S-Zm-2
LVQ412 -S-Zm-2
LVQ512 -S-Zm-2
LVQ612 -S-Zm-2
25.5
46
31.5
58
7
15
34.3
10.6
V
7
25.5
51
31.5
63
7
15
36.9
16.5
10
25.5
51
31.5
63
7
15
37.9
22
10
38
76
44
88
7
20
64
25
17
38
76
44
88
7
20
66
32
17
561
Manual Type
Flare Integral Fitting Type
Hyper Fittings
Series LVQH-Z
How to Order
LVQH 2 0
Z 07
1
Body class
Symbol Body class
2
2
3
3
4
4
5
5
6
6
Option
Symbol
Nil
Orifice dia.
ø4
ø8
ø10
ø16
ø22
K
N
Note) Options cannot be combined with each other.
LQ3 integral fittings
Handle operation
1
4
Applicable tubing size
Symbol
Connecting
tubing O.D.
2
Body class
3 4 5 6
90 Degree turn type
Multi-turn type (with indicator)
Breathing port thread type
Metric sizes
03
04
06
08
10
12
19
25
Note
Standard
Buffer material FFKM
For ammonium hydroxide
Nil
ø3
ø4
ø6
ø8
ø10
ø12
ø19
ø25
R
Threaded NPT 1/8
Threaded Rc 1/8
Inch sizes
03
07
11
13
19
25
1/8
1/4
3/8
1/2
3/4
1
Variations
Tubin
Model LVQH20 LVQH30 LVQH40 LVQH50 LVQH60
iameter
ø4
ø8
ø10
ø16
ø22
tside
dia. Millim
eter
6
10
12
19
25
Inch
Symbol
1/4
3/8
1/2
3/4
1
g ou
Type
Orifice d
90 Degree
turn type
B
A
B
A
Multi-turn
type
562
Manual Type
Flare Integral Fitting Type
Series
LVQH-Z
Standard Specifications
LVQH20 LVQH30 LVQH40 LVQH50 LVQH60
Model
Tubing O.D.
Metric size
Inch size
Orifice diameter
Av x 10-6m2
Flow
characteristics Cv
6
10
12
19
25
1/4
3/8
1/2
3/4
1
ø4
ø8
ø10
ø16
ø22
8.4
31.2
45.6
120
192 (228) Note)
0.35
1.3
1.9
5
8 (9.5) Note)
Withstand pressure (MPa)
Operating pressure <ARB flow>
1
–98 kPa to 0.5 MPa
–98 kPa to 0.4 MPa
0.3 or less
0.2 or less
Back pressure (MPa)
Valve leakage (cm3/min)
0 to 100
Ambient temperature (°C)
0 to 60
Mass (kg)
LVA
LVH
LVD
0 (With water pressure)
Fluid temperature (°C)
LVC
LVQ
LVQHm0-1
0.12
0.27
0.32
1.14
1.20
LVQHm0-4
0.11
0.25
0.23
0.72
0.82
Note) ( ) is high flow specification.
LQ1
LVN
TL/TIL
Specific Product Precautions
LQ3
Be sure to read before handling. Refer to front matters 42 and 43 for Safety
Instructions, and pages 585 and 586 for High Purity Chemical Valve NonMetallic Exterior Precautions.
Piping
Caution
1. Connect tubing with special tools.
Refer to the pamphlet “High-Purity Fluoropolymer Fittings HYPER FITTING®/Flare
Type Series LQ3 Fitting Procedure” (M-E06-4) for connecting tubing and special
tools. (Downloadable from our web site.)
2. Tighten the nut to the end surface of the body. As a guide, refer to
the proper tightening torques shown below.
Tightening torque for piping
Body class
Torque (N·m)
2
3
4
5
6
1.6 to 1.8
3.2 to 3.5
5.0 to 5.3
10.0 to 10.5
22.5 to 23.0
563
Series LVQH-Z
Construction
90 Degree turn type
t
q
e
A
B
w
r
Multi-turn type (with indicator)
y
B
B
Parts list
No.
Description
Material
PVDF
1
Actuator section
2
Body
3
Diaphragm
4
Nut
5
Handle section
PVDF
6
Indicator, cover
PP
564
PFA
PTFE
PFA
t
A
A
Manual Type
Flare Integral Fitting Type
Series
LVQH-Z
Dimensions
90 Degree turn type
Locked
(Valve closed)
LVC
Q
°
90
Not locked
(Valve open)
LVA
LVH
Y
LVD
Rc 1/8 (NPT 1/8)
Sensor (breathing) port
ø7
LVQ
F
LQ1
(mm)
Model
A
B
C
D
LVQH20-Zmm-1
LVQH30-Zmm-1
LVQH40-Zmm-1
LVQH50-Zmm-1
LVQH60-Zmm-1
25.5
46
31.5
58
79
28.5
57
34.5
69
103
16.5
103
28.5
57
34.5
69
108
22
114
42
84
48
96
165
25
150
42
84
48
96
175
32
167
Q
(H)
75
Model
J
K
L
M
N
LVQH20-Zmm-1
LVQH30-Zmm-1
LVQH40-Zmm-1
LVQH50-Zmm-1
LVQH60-Zmm-1
21.8
37
5
7
15
21
55
32
50
6
7
20
25
80
37.5
55.5
6
7
20
25
50.2
78.2
10
7
20
38.5
110
60
88
10
7
20
38.5
110
N
M
Y
C
12
LQ3
H
D
G
A
F
B
Dimensions
TL/TIL
A
B
G
L
J
K
LVN
80
Multi-turn type (with indicator)
Valve closing direction
Valve opening direction
Dimensions
(mm)
Model
S
Y
LVQH20-Zm-4
LVQH30-Zm-4
LVQH40-Zm-4
LVQH50-Zm-4
LVQH60-Zm-4
89.6
50
107.2
50
112.7
50
165
71
174.5
71
(Max. S)
Y
B
A
565
Manual Type
Flare Integral Fitting Type
Space Saving/Space Saving Connection
Series LVQHS-Z
How to Order
LVQH 2 0 S Z 07
1
Option
Body class
Symbol Body class
2
2
3
3
4
4
5
5
6
6
Symbol
Nil
Orifice dia.
ø4
ø8
ø10
ø16
ø22
K
N
Note) Options cannot be combined with each other.
Body type
S
Note
Standard
Buffer material FFKM
For ammonium hydroxide
Handle operation
Space saving connection
1
4
90 Degree turn type
Multi-turn type (with indicator)
LQ3 integral fittings
Breathing port thread type
Nil
R
Threaded
Threaded
NPT 1/8
Rc 1/8
Applicable fitting size
Symbol
Connecting
tubing O.D.
2
Body class
3 4 5 6
Inch sizes
07
11
13
19
25
1/4
3/8
1/2
3/4
1
Note) Refer to page 567 for How to
order fitting parts.
Select the fittings of the same
size as the one at the valve
side.
Variations
Model LVQ20S
Orifice d
iameter
ø4
ection
fitting
Symb
s
iz
e
ol
2
Conn
Type
90 Degree
turn type
B
A
B
A
Multi-turn
type
566
LVQ30S
LVQ40S
LVQ50S
LVQ60S
ø8
ø10
ø16
ø22
3
4
5
6
Manual Type
Flare Integral Fitting Type
Series
LVQHS-Z
How to Order Fittings for Space Saving
LQ3 E
6A
S
One nut of the nuts is not attached.
LVC
Type of fitting
E
Union elbow
LVA
T
Union tee
LVH
Applicable tubing size
P
Panel mount union
Size Symbol Applicable tubing size (inch)
1/4" x 5/32"
2
A
3/8" x 1/4"
3
A
1/2" x 3/8"
4
A
3/4" x 5/8"
5
A
1" x 7/8"
6
A
U
Union
LVD
LVQ
LQ1
Note 1) Select a fitting the same
size as the valve fitting.
LVN
TL/TIL
LQ3
Piping example
LVQH30S-Z11R-1
Example
LQ3T3A-S
(Union tee)
Applicable tubing size
3/8" x 1/4"
LQ3E3A-S
(Union elbow)
Applicable tubing size
3/8" x 1/4"
LVQH30S-Z11R-1
LQ3T3A-S (Union tee)
LQ3E3A-S (Union elbow)
1
1
1
Note) For shipment, the valve and fittings are individually
packaged and dispatched together in 1 box.
567
Series LVQHS-Z
Standard Specifications
LVQH20S LVQH30S LVQH40S LVQH50S LVQH60S
Model
Connection fitting size
2
3
4
5
6
Orifice diameter
ø4
ø8
ø10
ø16
ø22
Av x 10-6m2
Flow
characteristics Cv
8.4
31.2
45.6
120
192 (228) Note)
0.35
1.3
1.9
5
8 (9.5) Note)
Withstand pressure (MPa)
Operating pressure <ARB flow>
1
–98 kPa to 0.5 MPa
–98 kPa to 0.4 MPa
0.3 or less
0.2 or less
Back pressure (MPa)
Valve leakage
(cm3/min)
0 (With water pressure)
0 to 100
Fluid temperature (°C)
0 to 60
Ambient temperature (°C)
Mass (kg)
LVQHm0S-1
0.14
0.28
0.34
1.14
1.15
LVQHmS0-4
0.13
0.21
0.25
0.72
0.86
Note) ( ) is high flow specification.
Specific Product Precautions
Be sure to read before handling. Refer to front matters 42 and 43 for Safety
Instructions, and pages 585 and 586 for High Purity Chemical Valve NonMetallic Exterior Precautions.
Piping
Caution
1. Tighten the nut to the end surface of the body. As a guide, refer to
the proper tightening torques shown below.
Tightening torque for piping
568
Body class
Torque (N·m)
2
3
4
5
6
1.6 to 1.8
3.2 to 3.5
5.0 to 5.3
10.0 to 10.5
22.5 to 23.0
Manual Type
Flare Integral Fitting Type
Series
LVQHS-Z
Construction
90 Degree turn type
u
LVC
q
LVA
LVH
LVD
LVQ
LQ1
LVN
A
B
w
e
r
t
TL/TIL
LQ3
Multi-turn type (with indicator)
1/4·6
B
B
u
1/4·6
y
A
A
Parts list
No.
Description
Material
PVDF
1
Actuator section
2
Body
3
Diaphragm
4
Nut
PFA
5
Plug
PFA
6
Indicator, cover
PP
7
Handle section
PVDF
PFA
PTFE
569
Series
LVQHS-Z
Dimensions
90 Degree turn type
Locked
°
90
(Valve closed)
Q
1/4·6
Not locked
(Valve open)
Y
Rc 1/8 (NPT 1/8)
Sensor (breathing) port
F
LVQH20S-Zm-1
LVQH30S-Zm-1
LVQH40S-Zm-1
LVQH50S-Zm-1
LVQH60S-Zm-1
25.5
46
31.5
58
79
28.5
57
34.5
69
28.5
57
34.5
69
42
84
48
42
84
48
G
H
12
105
103
16.5
137
108
22
151
96
165
25
202
96
175
32
236
J
K
L
M
N
21.8
37
5
7
15
21
Q
55
32
50
6
7
20
25
80
37.5
55.5
6
7
20
25
50.2
78.2
10
7
20
38.5
110
60
88
10
7
20
38.5
110
N
M
Y
1/4·6
Model
LVQH20S-Zm-1
LVQH30S-Zm-1
LVQH40S-Zm-1
LVQH50S-Zm-1
LVQH60S-Zm-1
(H)
C
D
1/4·6
C
A
B
B
A
A
80
Multi-turn type (with indicator)
Valve closing direction
1/4·6
1/4·6
Valve opening direction
(mm)
S
Y
LVQH20S-Zm-4
LVQH30S-Zm-4
LVQH40S-Zm-4
LVQH50S-Zm-4
LVQH60S-Zm-4
89.6
50
107.2
50
112.7
50
165
71
174.5
71
570
1/4·6
Model
B
A
1/4·6
Dimensions
(Max. S)
Y
D
(mm)
Model
B
G
L
J
1/4·6
Dimensions
1/4·6
(F)
ø7
Air Operated Type
Tube Extension Fitting Type
Series LVQ-T
How to Order
LVQ 2 0
LVC
LVA
T 07
Symbol Body class Orifice dia.
ø4
2
2
ø8
3
3
ø10
4
4
ø16
5
5
ø22
6
6
Valve type
N.C.
0
N.O.
1
2 Double acting
LVH
Option (2)
Body class
Symbol
Nil
Pilot port thread type
Nil
M
R
N
LQ1 integral fitting Connection tubing O.D. 1/8" (ø3)
LQ1 integral fitting Connection tubing O.D. ø4
Rc 1/8
Threaded
NPT 1/8
Threaded
J
K
N
P
Applicable option
3 4 5 6 7 8
v v v v v v
— — v v — —
v v v v v v
v v v v v v
Note
24
—
v
— For high temperature
v Buffer material FFKM
v For ammonium hydroxide
High flow spec.
— — — v v — — — — —
LVQ6m only
1
v
v
v
v
2
v
—
v
v
Note) Options (2) cannot
be combined with
each other.
Option (1)
Note) Refer to variations
in the table below
for valve type combinations.
5
6
7
8
9
None
Nil
1 With flow rate adjustment
With bypass
2
3 With flow rate adjustment & bypass
With indicator
4
High back pressure (0.42 MPa)
High back pressure with flow rate adjustment
High back pressure with bypass
Symbol
Connecting
tubing O.D.
Body class
2 3 4 5 6
Note) Refer to variations in the
table below for valve type
and option (1) combinations.
Options (1) can not be
combined with each other.
High back pressure with flow rate adjustment & bypass
High back pressure with indicator
Variations
Tubin
g ou
Metric sizes
06
10
12
19
25
ø6
ø10
ø12
ø19
ø25
Type
tside
1/4
3/8
1/2
3/4
1
dia.
Va
lve
Symbol
e
LVQ20
LVQ30
LVQ40
LVQ50
LVQ60
ø4
ø8
ø10
ø16
ø22
6
10
12
19
25
1/4
3/8
1/2
3/4
1
N.C.
N.C.
PA
B
PB
PA
A N.O.
PB
N.O. Double
acting Double
AB
N.C.
N.O.
Double acting
AB
acting
With flow
rate
adjustment
PA
PA
A B A N.C.
N.C.
N.C.
B
With bypass
PA
PA
Double acting
With flow
rate
adjustment &
bypass
N.C.
A
Double
PB
N.C. Double acting acting
B
N.C.
Inch
typ
Basic type
Inch sizes
07
11
13
19
25
Model
iameter
Millime
ter
Orifice d
A B
PA
B
A
N.C.
N.C.
With indicator
PA
B
A
N.C.
N.C.
High
back
pressure
PA
B
A
LVD
LVQ
LQ1
LVN
TL/TIL
LQ3
Tube Extension Fitting
Applicable tubing size
9
v
—
v
v
N.C.
N.C.
571
Series LVQ-T
Standard Specifications
Model
Metric size
Tubing O.D.
Inch size
LVQ20
LVQ30
LVQ40
LVQ50
LVQ60
6
10
12
19
25
1/4
3/8
1/2
3/4
1
Orifice diameter
ø4
ø8
ø10
ø16
ø22
Av x 10-6m2
Cv
Withstand pressure (MPa)
Operating pressure Standard
High
<ARB flow>
temperature
8.4
31.2
45.6
120
192 (228) Note)
0.35
1.3
1.9
1
5
8 (9.5) Note)
Flow
characteristics
Back pressure
(MPa)
–98 kPa to 0.5 MPa
–98 kPa to 0.4 MPa
–98 kPa to 0.3 MPa
Standard
0.3 or less
High back
pressure
High
temperature
0.3 or less
Valve leakage (cm3/min)
Pilot air pressure (MPa)
Pilot port size
Standard
Fluid
temperature (°C) High
temperature
Ambient temperature (°C)
Mass (kg)
0.2 or less
0.42 or less
0.2 or less
0 (With water pressure)
0.3 to 0.5 (High back pressure: 0.45 to 0.55)
1/8" (ø3), ø4, Rc 1/8, NPT 1/8
0 to 100
0 to 170
0 to 60
0.08
0.15
0.16
0.60
0.70
Note) ( ) is high flow specification.
Construction
Basic type
N.C. type
PB
PB
N.O. type
Double acting type
q
q
q
PA
PA
B
B
A
A
B
e w
B
A
A
e
e
With flow rate
adjustment
A
B
With bypass
With indicator
t
r
PA
PA
r
B
B
A
B
A
Parts list
No.
Description
Material
PVDF
1
Actuator section
2
Body
3
Diaphragm
PTFE
4
Flow rate adjuster section
PVDF
5
Indicator, cover
572
PFA
PP
B
A
A
Air Operated Type
Tube Extension Fitting Type
Series
LVQ-T
Dimensions
Basic type, High back pressure spec.
N.C. valve
LVC
Q
LVA
LVH
LVD
LVQ
LQ1
øE
Rc 1/8 (NPT 1/8)
Sensor (breathing) port
(P)
LVN
R
TL/TIL
Applicable tubing
O.D. 1/8" (ø3), ø4
Pilot port
K
F
Rc 1/8 (NPT 1/8)
Pilot port
A
A
B
L
G
J
B
(H)
Pilot port Rc 1/8 (NPT 1/8)
Threaded type
N
D
B
A
C
M
LVQm0-Tm Dimensions (N.C. valve)
(mm)
Model
A
B
C
D
E
F
G
H
J
K
L
M
N
P
LVQ20-Tm
LVQ30-Tm
LVQ40-Tm
LVQ50-Tm
LVQ60-Tm
25.5
46
31.5
58
33.6
56.5
12
111.5
28.5
57
34.5
69
45.4
77
16.5
28.5
57
34.5
69
45.4
82.5
22
42
84
48
96
75
127
42
84
48
96
75
137
Q
21.8
37
5
7
15
31.3
21
25.3
R
136
32
50
6
7
20
37.2
25
31.2
137
37.5
55.5
6
7
20
37.2
25
31.2
25
180
50.2
78.2
10
7
20
50.8
38.5
45
32
189
60
88
10
7
20
50.8
38.5
45
573
LQ3
Series LVQ-T
Dimensions
With flow rate adjustment, High back pressure spec. with flow rate adjustment
N.C. valve
Dimensions
(Max.S)
(mm)
S
Model
LVQ20-Tm-1
LVQ30-Tm-1
LVQ40-Tm-1
LVQ50-Tm-1
LVQ60-Tm-1
83
113.5
119
171.5
B
A
182.5
N
LVQ20
C
M
B
D
A
With bypass, High back pressure spec. with bypass
N.C. valve
.T)
(Max
V
1/8
LVQ30, LVQ40
LVQ50, LVQ60
A
U
B
N
M
V
(Max.T)
D
B
A
C
Z
View Z
Dimensions
Model
LVQ20-Tm-2
LVQ30-Tm-2
LVQ40-Tm-2
LVQ50-Tm-2
LVQ60-Tm-2
574
(mm)
A
B
C
D
M
N
T
U
25.5
46
31.5
58
7
15
34.3
10.6
V
7
25.5
51
31.5
63
7
15
36.9
16.5
10
25.5
51
31.5
63
7
15
37.9
22
10
38
76
44
88
7
20
64
25
17
38
76
44
88
7
20
66
32
17
Air Operated Type
Tube Extension Fitting Type
LVQ-T
N
LVQ20
M
LVC
LVA
B
D
A
C
With flow rate adjustment & bypass
High back pressure spec. with flow rate
adjustment & bypass
N.C. valve
Series
LVH
T)
.
(Max
LVD
LVQ
V
LQ1
LVN
LVQ30, LVQ40
LVQ50, LVQ60
TL/TIL
N
M
LQ3
C
A
(Max.S)
V
(Max.T)
A
U
B
D
B
1/8
Z
View Z
Dimensions
(mm)
Model
A
B
C
D
M
N
S
T
U
LVQ20-Tm-3
LVQ30-Tm-3
LVQ40-Tm-3
LVQ50-Tm-3
LVQ60-Tm-3
25.5
46
31.5
58
7
15
83
34.3
10.6
V
7
25.5
51
31.5
63
7
15
113.5
36.9
16.5
10
25.5
51
31.5
63
7
15
119
37.9
22
10
38
76
44
88
7
20
171.5
64
25
17
38
76
44
88
7
20
182.5
66
32
17
With indicator, High back pressure spec. with indicator
N.C. valve
(mm)
Model
S
LVQ20-Tm-4
LVQ30-Tm-4
LVQ40-Tm-4
LVQ50-Tm-4
LVQ60-Tm-4
70.5
S
Dimensions
88.5
94
134.5
B
A
144
575
Series LVQ-T
Dimensions
Q
Basic type
N.O. valve
Applicable tubing O.D.
øE
1/8" (ø3), ø4
Pilot port
Rc 1/8 (NPT 1/8)
Sensor (breathing) port
R
Rc 1/8 (NPT 1/8)
Pilot port
Rc 1/8 (NPT 1/8)
Breathing port
K
W
(F)
Rc 1/8 (NPT 1/8)
Breathing port
G
A
B
A
L
J
B
(H)
N
D
B
A
C
M
Double acting valve
Applicable tubing O.D.
(P)
1/8" (ø3), ø4
Pilot port
R
Applicable tubing O.D.
Rc 1/8 (NPT 1/8)
Pilot port
1/8" (ø3), ø4
Pilot port
Rc 1/8 (NPT 1/8)
Sensor (breathing) port
Rc 1/8 (NPT 1/8)
Pilot port
A
B
B
A
LVQm 12 -Tm Dimensions (N.O. valve, double acting valve)
Model
A
B
C
D
E
F
LVQ212 -Tm
LVQ312 -Tm
LVQ412 -Tm
LVQ512 -Tm
LVQ612 -Tm
25.5
46
31.5
58
33.6
81
28.5
57
34.5
69
45.4
99
28.5
57
34.5
69
45.4
104
42
84
48
96
75
42
84
48
96
75
576
G
(mm)
H
J
K
L
M
N
P
12
111.5
21.8
37
5
7
15
31.3
16.5
22
136
32
50
6
7
20
137
37.5
55.5
6
7
20
144.5
154.5
25
180
50.2
78.2
10
7
32
189
60
88
10
7
Q
R
W
21
25.3
64
37.2
25
31.2
82
37.2
25
31.2
87.5
20
50.8
38.5
45
128
20
50.8
38.5
45
137.5
Air Operated Type
Tube Extension Fitting Type
With bypass
Double acting valve
LVQ2 12
Series
LVQ-T
N
M
LVA
D
B
A
C
LVC
1/8
LVH
T)
.
(Max
LVD
LVQ
V
LQ1
LVN
LVQ3 12 , LVQ4 12
LVQ5 12 , LVQ6 12
TL/TIL
LQ3
N
M
A
C
V
(Max.T)
A
U
B
D
B
1/8
Z
View Z
Dimensions
(mm)
Model
A
B
C
D
M
N
T
U
LVQ2 12 -Tm-2
LVQ3 12 -Tm-2
LVQ4 12 -Tm-2
LVQ5 12 -Tm-2
LVQ6 12 -Tm-2
25.5
46
31.5
58
7
15
34.3
10.6
V
7
25.5
51
31.5
63
7
15
36.9
16.5
10
25.5
51
31.5
63
7
15
37.9
22
10
38
76
44
88
7
20
64
25
17
38
76
44
88
7
20
64
32
17
577
Manual Type
Tube Extension Fitting Type
Series LVQH-T
How to Order
LVQH 2 0 T 07
1
Option
Body class
Symbol Body class
2
2
3
3
4
4
5
5
6
6
Symbol
Nil
Orifice dia.
ø4
ø8
ø10
ø16
ø22
K
N
Note) Options cannot be combined with each other.
Tube Extension Fitting
Handle operation
1
4
Applicable tubing size
Symbol
Connecting
tubing O.D.
2
Body class
3 4 5 6
90 Degree turn type
Multi-turn type (with indicator)
Breathing port thread type
Metric sizes
06
10
12
19
25
Note
Standard
Buffer material FFKM
For ammonium hydroxide
Nil
ø6
ø10
ø12
ø19
ø25
R
Threaded
Threaded
NPT 1/8
Rc 1/8
Inch sizes
07
11
13
19
25
1/4
3/8
1/2
3/4
1
Variations
Conn
ectio
Type
Model LVQH20-T LVQH30-T LVQH40-T LVQH50-T LVQH60-T
iameter
ø4
ø8
ø10
ø16
ø22
g siz
e Millimete
r
6
10
12
19
25
Inch
Symbol
1/4
3/8
1/2
3/4
1
n fittin
Orifice d
90 Degree
turn type
B
A
B
A
Multi-turn
type
578
Manual Type
Tube Extension Fitting Type
Series
LVQH-T
Standard Specifications
Model
Metric size
Tubing O.D.
Inch size
LVQH20
LVQH30
LVQH40
LVQH50
LVQH60
6
10
12
19
25
1/4
3/8
1/2
3/4
1
Orifice diameter
ø4
ø8
ø10
ø16
ø22
Av x 10-6m2
Flow
characteristics Cv
Withstand pressure (MPa)
Operating pressure <ARB flow>
Back pressure (MPa)
Valve leakage (cm3/min)
Fluid temperature (°C)
Ambient temperature (°C)
8.4
31.2
45.6
120
192 (228) Note)
0.35
1.3
1.9
1
5
8 (9.5) Note)
LVQHm0-1
LVQHm0-4
Mass (kg)
–98 kPa to 0.5 MPa
–98 kPa to 0.4 MPa
0.3 or less
0.2 or less
LVC
LVA
LVH
0 (With water pressure)
0 to 100
0 to 60
LVD
0.12
0.25
0.28
1.04
1.05
0.11
0.18
0.19
0.62
0.73
LVQ
Note) ( ) is high flow specification.
LQ1
Construction
90 Degree turn type
LVN
t
TL/TIL
LQ3
q
e
B
A
w r
y
t
Multi-turn type (with indicator)
B
B
A
A
Parts list
No.
Description
Material
PVDF
1
Actuator section
2
Body
3
Diaphragm
4
Insert bushing
PFA
5
Handle section
PVDF
6
Indicator, cover
PP
PFA
PTFE
579
Series LVQH-T
Dimensions
90 Degree turn type
Locked
°
90
Q
(Valve closed)
Not locked
(Valve open)
Y
Rc 1/8 (NPT 1/8)
Sensor (breathing) port
(F)
ø7
B
(mm)
D
F
58
79
28.5
57
34.5
69
28.5
57
34.5
69
42
84
48
42
84
48
G
H
12
111.5
103
16.5
136
108
22
137
96
165
25
180
96
175
32
189
Model
J
K
L
M
N
LVQH20-Tm-1
LVQH30-Tm-1
LVQH40-Tm-1
LVQH50-Tm-1
LVQH60-Tm-1
21.8
37
5
7
15
21
Q
55
32
50
6
7
20
25
80
37.5
55.5
6
7
20
25
50.2
78.2
10
7
20
38.5
110
60
88
10
7
20
38.5
110
(H)
N
M
Y
D
C
31.5
C
B
46
A
A
25.5
B
Model
LVQH20-Tm-1
LVQH30-Tm-1
LVQH40-Tm-1
LVQH50-Tm-1
LVQH60-Tm-1
A
G
L
J
Dimensions
80
Multi-turn type (with indicator)
Valve closing direction
Valve opening direction
Dimensions
(mm)
Model
S
Y
LVQH20-Tm-4
LVQH30-Tm-4
LVQH40-Tm-4
LVQH50-Tm-4
LVQH60-Tm-4
89.6
50
107.2
50
112.7
50
165
71
174.5
71
580
(Max.S)
Y
B
A
Air Operated Type for Back Pressure 0.5 MPa
Integral Fitting Type
(Hyper Fittings)
Series LVQmmH
How to Order
LVQ 2 0 H
LVC
S 07
Nil
Orifice dia.
ø4
ø8
ø10
ø16
ø22
Note) Refer to variations
in the table below
for valve type and
option combinations.
Options can not
be combined with
each other.
Pilot port thread type
N.C.
N.O.
Double acting
LVH
LVD
LVQ
LQ1
Nil LQ1 integral fitting Connection tubing O.D. 1/8" (ø3)
M LQ1 integral fitting
Connection tubing O.D. ø4
R
Threaded
Rc 1/8
N
Threaded
NPT 1/8
Valve type
0
1
2
None
1 With flow rate adjustment
2
With bypass
3 With flow rate adjustment & bypass
With indicator
4
24 With indicator & bypass
Body class
Symbol Body class
2
2
3
3
4
4
5
5
6
6
LVA
Option
LVN
TL/TIL
Port B (OUT) different dia. size
Note) Refer to variations in
the table below for
valve type combinations.
Fitting type
Symbol Fittings
LQ1
V
LQ2
S
Body class
2, 3, 4, 5, 6
2, 3, 4, 5
Symbol
Nil
Application
Ports A & B same size
Refer to the
applicable
tubing table
to the left.
Different diameter tubings can be selected
within the same body
class.
Variations
Orifice d
Tubin
Basic size
With reducer
Model LVQ20H LVQ30H LVQ40H LVQ50H LVQ60H
iameter
g ou
tside
dia. Millimeter
Va
Inch
lve
Symbol
typ
e
Applicable tubing size
Connecting Body class
Symbol
tubing O.D. 2 3 4 5 6
Metric sizes
03
ø3
04
ø4
06
ø6
08
ø8
10
ø10
12
ø12
19
ø19
25
ø25
Inch sizes
03
1/8
05
3/16
07
1/4
11
3/8
13
1/2
19
3/4
25
1
LQ3
Type
Basic type
ø8
ø10
ø16
ø22
6
10
12
19
25
1/4
3/8
1/2
3/4
1
N.C.
N.C.
PB
PA
PA
A N.O.
PB
N.C. N.O. Double Double
acting
AB
B
N.O.
Double acting
AB
acting
PA
With flow
rate
adjustment
With bypass
ø4
B
N.C.
A
N.C.
Double
acting
B
N.C.
With flow
rate
adjustment &
bypass
PA
PA
A B
A
PB
Double
acting
N.C.
N.C.
Double
acting
PA
B
A
N.C.
N.C.
With indicator
PA
B
A
N.C.
N.C.
With indicator & bypass
PA
B
A
N.C.
N.C.
581
Air Operated Type for Back Pressure 0.5 MPa
Flare Integral Fitting Type
(Hyper Fittings)
Series LVQmmH-Z
How to Order
LVQ 2 0 H Z 07
Option
Body class
Symbol Body class
2
2
3
3
4
4
5
5
6
6
Nil
LQ3
Orifice dia.
ø4
ø8
ø10
ø16
ø22
integral
fittings
Valve type
0
1
2
1
2
3
4
24
N.C.
N.O.
Double acting
Note) Refer to variations in
the table below for
valve type combinations.
None
With flow rate adjustment
With bypass
With flow rate adjustment & bypass
With indicator
With indicator & bypass
Note) Refer to variations in the table
below for valve type and option
combinations.
Options can not be combined
with each other.
Applicable tubing size
Connecting
tubing O.D.
Metric sizes
ø3
03
ø4
04
ø6
06
08
ø8
10
ø10
12
ø12
19
ø19
25
ø25
Inch sizes
07
1/4
11
3/8
13
1/2
19
3/4
25
1
Symbol
2
Body class
3 4 5 6
Pilot port thread type
Nil
M
R
N
Variations
Model LVQ20H
iameter
ø4
tside
dia. Millimete
r
6
Va
Inch
lve
Symbol
typ
1/4
e
Orifice d
Tubin
g ou
Type
Basic type
N.C.
N.C.
PB
PA
N.C.
N.O.
Double acting
PA
A N.O.
PB
N.O. Double Double
acting
AB
B
AB
acting
With flow
rate
adjustment
PA
B
N.C.
A
N.C.
With bypass
Double
acting
N.C.
With flow
rate
adjustment &
bypass
PA
PA
B
A B
A
PB
Double
acting
N.C.
N.C.
Double
acting
PA
B
A
N.C.
N.C.
With indicator
PA
B
A
N.C.
N.C.
With indicator & bypass
PA
B
A
N.C.
582
LQ3 integral fitting Connection tubing O.D. 1/8" (ø3)
LQ3 integral fitting
Connection tubing O.D. ø4
Rc 1/8
Threaded
Threaded
NPT 1/8
N.C.
LVQ30H
LVQ40H
ø8
ø10
ø16
ø22
10
12
19
25
3/8
1/2
3/4
1
LVQ50H LVQ60H
Air Operated Type for Back Pressure 0.5 MPa
Flare Integral Fitting Type
LVQ mmH
Series
Standard Specifications
LVQ20H LVQ30H LVQ40H LVQ50H LVQ60H
Model
Metric size
Tubing O.D.
6
10
12
19
25
Inch size
1/4
3/8
1/2
3/4
1
ø4
ø8
ø10
ø16
ø22
Av x 10-6m2
8.4
31.2
45.6
120
192 (228) Note)
Cv
0.35
1.3
1.9
5
8 (9.5) Note)
Orifice diameter
Flow
characteristics
Withstand pressure (MPa)
1
Operating pressure <ARB flow>
–98 kPa to 0.5 MPa
Back pressure (MPa)
Be sure to read before handling. Refer to
front matters 42 and 43 for Safety Instructions, and pages 585 and 586 for High Purity
Chemical Valve Non-Metallic Exterior Precautions.
LVH
Valve leakage (cm3/min)
0 (With water pressure)
Pilot air pressure (MPa)
0.5 to 0.8
LVD
LVQ
1/8" (ø3), ø4, Rc 1/8, NPT 1/8
Fluid temperature (°C)
0 to 100
Ambient temperature (°C)
0 to 60
0.08
Mass (kg)
0.17
LQ1
0.22
0.70
LVN
0.81
Note) ( ) is high flow specification.
TL/TIL
Dimensions
LQ3
Dimensions will be the same as the standard specifications.
Piping
Different Diameter Tubing Applicable with Reducer (For LVQmmH- VS )
Caution
1. Connect tubing with special tools.
Refer to the pamphlet “High-Purity Fluoropolymer Fittings HYPER FITTING®/Series
LQ1, 2 Work Procedure Instructions” (ME05-1) or “High Purity Fluoropolymer Fittings Hyper Fitting/Flare Type Series LQ3
Fitting Procedure” (M-E06-4A) for connecting tubing and special tools. (Downloadable from our web site.)
Different diameter tubing can be selected (within a body class) by using a nut and
insert bushing (reducer).
With reducer
Tubing O.D.
Body class
Metric sizes
Inch sizes
4
6
25
1/8 3/16 1/4
8
10
12
19
3/8
1/2
3/4
1
2
V
v
—
—
—
—
—
V
V
v
—
—
—
—
3
—
V
V
v
4
—
—
—
V
—
—
—
—
—
V
v
—
—
—
v
—
—
—
—
—
V
v
—
—
5
—
—
—
6
—
—
—
—
V
v
—
—
—
—
—
V
v
—
—
—
V
v
—
—
—
—
—
V
v
Note) Refer to page 544 for information on changing tubing sizes.
2. Tighten the nut to the end surface
of the body. As a guide, refer to the
proper tightening torques shown
below.
Tightening torque for piping
Body
class
2
3
4
5
6
Torque (N·m)
LQ1
LQ2
0.3 to 0.4 1.5 to 2.0
0.8 to 1.0 3.0 to 3.5
1.0 to 1.2 7.5 to 9.0
2.5 to 3.0 11.0 to 13.0
5.5 to 6.0
LVA
0.5 or less
Pilot port size
Specific Product Precautions
LVC
LQ3
1.6 to 1.8
3.2 to 3.5
5.0 to 5.3
10.0 to 10.5
22.5 to 23.0
583
Applicable Fluids
Material and fluid compatibility check list
for air operated chemical valves
Chemical
Acetone
Ammonium hydroxide
Compatibility
Note 1, 2)
Note 2)
Isobutyl alcohol
Note 1, 2)
Isopropyl alcohol
Note 1, 2)
Hydrochloric acid
Ozone (dry)
Hydrogen peroxide Concentration 5% or less, 50°C or less
Ethyl acetate
Note 1, 2)
Butyl acetate
Note 1, 2)
Nitric acid (except fuming nitric acid) Concentration 10% or less
Note 2)
DI water
Sodium hydroxide Concentration 50% or less
Nitrogen gas
Super pure water
Toluene
Note 1, 2)
Hydrofluoric acid
Note 2)
Sulfuric acid (except fuming sulfuric acid)
Note 2)
Table symbols
Phosphoric acid Concentration 80% or less
: Can be used
: Can be used in certain conditions
: Cannot be used
The material and fluid compatibility check list provides reference values as a guide only.
Note 1) Since static electricity may be generated, implement suitable countermeasures.
Note 2) Use caution as permeation may occur. The permeated fluid may effect the parts of other materials.
• Compatibility is indicated for fluid temperatures of 100°C or less.
• The material and fluid compatibility check list provides reference values as a guide only, therefore we do not guarantee the application to our product.
• The data above is based on the information presented by the material manufacturers.
• SMC is not responsible for its accuracy and any damage happened because of this data.
584
Series LVQ
High Purity Chemical Valve Non-Metallic Exterior
Specific Product Precautions 1
Be sure to read before handling.
Design & Selection
Warning
Piping
Caution
1. Confirm the specifications.
Give careful consideration to operating conditions such as the
application, fluid and environment, and use within the operating ranges specified in this catalog.
2. Fluids
Operate after confirming the compatibility of the product's component materials with fluids, using the check list on features
page 584. Contact SMC regarding fluids other than those in
the check list.
Operate within the indicated fluid temperature range.
3. Maintenance space
Ensure the necessary space for maintenance and inspections.
4. Fluid pressure range
Keep the supplied fluid pressure within the operating pressure
range shown in the catalog.
5. Ambient environment
Operate within the ambient operating temperature range. After
confirming the compatibility of the product's component materials with the ambient environment, operate so that fluid does
not adhere to the product's exterior surfaces.
6. Liquid seals
When circulating fluid
Provide a relief valve in the system so that fluid does not get
into the liquid seal circuit.
1. Preparation before piping
Before piping is connected, it should be thoroughly blown out
with air (flushing) or washed to remove chips, cutting oil and
other debris from inside the pipe.
Install piping so that it does not apply pulling, pressing, bending or other forces on the valve body.
2. Use the tightening torques shown below for the
threaded pilot port.
Torque (N·m)
Rc, NPT 1/8
0.8 to 1.0
4. Refer to the pamphlet “High-Purity Fluoropolymer
Fittings HYPER FITTING®/Series LQ1, 2 Work Procedure Instructions” (M-E05-1) or “High Purity Fluoro
polymer Fittings Hyper Fitting/Flare Type Series
LQ3 Fitting Procedure” (M-E06-4) for connecting
tubing and special tools. (Downloadable from our
web site.)
Since static electricity may be generated depending on the fluid being used, implement suitable countermeasures.
Mounting
Warning
2. Instruction manual
Mount and operate the product after reading the manual carefully and understanding its contents. Also keep the manual
where it can be referred to as necessary.
LVD
LVN
In the case of threaded pilot port, do not pipe the metallic fittings which can cause damage to the thread part.
7. Countermeasures for static electricity
After mounting, perform suitable function and leak tests to confirm that the mounting is correct.
LVH
LQ1
3. Use of metal fittings
1. If air leakage increases or equipment does not operate properly, stop operation.
LVA
LVQ
Operating port tightening torque
Operating port
LVC
Operating Air Supply
Warning
1. Use clean air.
Do not use compressed air which includes chemicals, synthetic oils containing organic solvents, salt, or corrosive gases,
etc., as this may cause damage or malfunction.
585
TL/TIL
LQ3
Series LVQ
High Purity Chemical Valve Non-Metallic Exterior
Specific Product Precautions 2
Be sure to read before handling.
Operating Environment
Warning
Warning
1. Do not use in a location having an explosive atmosphere.
2. Do not operate in locations where vibration or impact occurs.
3. Do not use in locations where radiated heat will be
received from nearby heat sources.
Maintenance
Warning
1. Maintenance should be performed in accordance
with the procedures in the instruction manual.
Incorrect handling can cause damage or malfunction of machinery and equipment, etc.
2. Before removing equipment or compressed air supply/exhaust devices, shut off the air and power supplies, and exhaust compressed air from the system.
Further, when restarting equipment after remounting or replacement, first confirm safety and then
check the equipment for normal operation.
3. Perform work after removing residual chemicals
and carefully replacing them with DI water or air,
etc.
4. Do not disassemble the product. Products which
have been disassembled cannot be guaranteed.
If disassembly is necessary, contact SMC.
5. In order to obtain optimum performance from
valves, perform periodic inspections to confirm that
there are no leaks from valves or fittings, etc.
Caution
1. Removal of drainage
Flush drainage from filters regularly.
586
Precautions on Usage
1. Operate within the ranges of the maximum operating pressure and back pressure.
Caution
1. Please note that when the product is shipped from
the factory, gases such as N2 and air may leak from
the valve at a rate of 1cm3/min (when pressurized).
2. When operated at a very low flow rate, the series
LVQ with flow rate adjustment may vibrate, etc. depending on the operating conditions. Therefore, operate it after careful examination of the flow rate,
pressure and piping conditions.
3. In the series LVQ, water hammering may occur depending on the fluid pressure conditions. In most
cases, improvement is possible by adjusting the pilot pressure with a speed controller, etc., but the
flow rate, pressure and piping conditions should be
reviewed.
4. To adjust the flow rate for the series LVQ with flow
rate adjustment, open gradually starting from the
fully closed condition.
Opening is accomplished by turning the adjustment
knob counter clockwise.
Additionally, do not apply any unreasonable force to
the adjustment knob when nearing a fully opened or
closed state. This may result in deformation of the
orifice sheet surface or damage to the threaded part
of the adjustment knob.
It is in the fully closed condition when the product is
shipped from the factory.
5. After a long period of nonuse, perform a test run before beginning regular operation.
6. Since the LVQ is packaged in a clean room use sufficient care in handling when opened.
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