P5A (PFC-50 piMFC) Mass Flow Controller

P5A (PFC-50 piMFC) Mass Flow Controller
137875-P1
Rev 5, 04/05
MKS Type
πMFCTM Digital
Mass Flow Controller
Instruction Manual
Copyright © 2005 by MKS Instruments, Inc.
All rights reserved. No part of this work may be reproduced or transmitted in any form or by any means,
electronic or mechanical, including photocopying and recording, or by any information storage or retrieval
system, except as may be expressly permitted in writing by MKS Instruments, Inc.
Printed in the United States of America
Baratron® and Mass-Flo® are registered trademarks of MKS Instruments, Inc., Andover, MA
DeviceNet™ is a trademark of Open DeviceNet Vendor Association, Inc., Coral Springs, FL
Kel-F® is a registered trademark of 3M, Minneapolis, MN
Swagelok® and VCR® are registered trademarks of Swagelok Marketing Company, Solon, OH
Protected by U. S. Patents 5314164 and 5461913
Table of Contents
Table of Contents
List of References..............................................................................................................................................iv
Mass Flow Device Safety Information .............................................................................................................1
Symbols Used in This Instruction Manual .................................................................................................................... 1
Symbols Found on the Unit........................................................................................................................................... 1
Safety Procedures and Precautions................................................................................................................................ 1
Sicherheitshinweise für das Massenflussgerät.................................................................................................3
In dieser Betriebsanleitung vorkommende Symbole ..................................................................................................... 3
Erklärung der am Gerät angebrachten Symbole ............................................................................................................ 3
Sicherheitsvorschriften und Vorsichtsmaßnahmen ....................................................................................................... 3
Informations de sécurité pour appareils de mesure/contrôle de débit massique .........................................5
Symboles utilisés dans ce manuel d'utilisation.............................................................................................................. 5
Symboles figurant sur l'unité ......................................................................................................................................... 5
Mesures de sécurité et précautions ................................................................................................................................ 5
Medidas de seguridad del dispositivo de flujo de masa ..................................................................................7
Símbolos usados en este manual de instrucciones......................................................................................................... 7
Símbolos hallados en la unidad ..................................................................................................................................... 7
Procedimientos y precauciones de seguridad ................................................................................................................ 7
マスフロー機器の安全に関する情報......................................................................................................................9
本取扱説明書のマーク................................................................................................................................................... 9
本機器のマーク............................................................................................................................................................... 9
安全対策について .......................................................................................................................................................... 9
질량 유량 장치 안전 정보 ................................................................................................................................11
본 지침 매뉴얼에 사용되는 기호들 ......................................................................................................................... 11
장치에 표시된 기호들 ............................................................................................................................................... 11
안전 절차 및 예방조치 .............................................................................................................................................. 11
Chapter One: General Information ..............................................................................................................13
Introduction ................................................................................................................................................................. 13
How This Manual is Organized................................................................................................................................... 14
Customer Support........................................................................................................................................................ 15
Chapter Two: Installation and Configuration .............................................................................................16
Unpacking ................................................................................................................................................................... 16
Product Location and Requirements............................................................................................................................ 17
Dimensions.................................................................................................................................................................. 18
Installation Procedure.................................................................................................................................................. 27
Chapter Four: Overview ................................................................................................................................41
General Information .................................................................................................................................................... 41
How the πMFC Works ................................................................................................................................................ 42
Operation of the πMFC with Gases other than Nitrogen.............................................................................43
Versions of the πMFC ................................................................................................................................................. 43
Start-Up Procedure for the Analog πMFC .................................................................................................................. 46
i
Table of Contents
Overview of πMFC DeviceNet Digital Operation.......................................................................................................48
DeviceNet Connector ..................................................................................................................................................48
DeviceNet Controls and Indicators..............................................................................................................................49
Power Up .....................................................................................................................................................................49
DeviceNet Protocol......................................................................................................................................................50
Chapter Five: Maintenance ........................................................................................................................... 51
General Information ....................................................................................................................................................51
Zero Adjustment ..........................................................................................................................................................51
Chapter Six: Troubleshooting ....................................................................................................................... 56
Troubleshooting Chart.................................................................................................................................................56
Appendix A: Product Specifications ............................................................................................................. 63
Performance Specifications .........................................................................................................................................63
Mechanical Specifications ..........................................................................................................................................64
Electrical Specifications .............................................................................................................................................64
Appendix B : Model Code Explanation........................................................................................................ 66
Model Code Description..............................................................................................................................................66
ii
List of Figures
List of Figures
Figure 1: 4-VCR Front View - DeviceNet.......................................................................................................18
Figure 2: 4-VCR Front View – 9-Pin Analog..................................................................................................19
Figure 3: 4-VCR Front View – 15-Pin Analog................................................................................................19
Figure 4: 4-VCR Left and Right Side Views – DeviceNet................................................................................20
Figure 5: 4-VCR Left and Right Side Views – 9-Pin D ....................................................................................20
Figure 6: 4-VCR Left and Right Side Views – 15-Pin D ..................................................................................21
Figure 7: 4-VCR Bottom View..........................................................................................................................21
Figure 8: C or W Seal Front View .....................................................................................................................22
Figure 9: C or W Seal Left and Right Views .....................................................................................................23
Figure 10: C and W Seal Top View...................................................................................................................24
Figure 11: C and W Seal Bottom View .............................................................................................................24
Figure 12: Serial Number Label.........................................................................................................................24
Figure 13: DeviceNet Connector Pin Diagram ..................................................................................................49
iii
List of Tables
List of Tables
Table 1: Definition of Symbols Found on the Unit ............................................................................................ 1
Tabelle 2: Bedeutung der am Gerät angebrachten Symbole .............................................................................. 3
Tableau 3: Définition des symboles sur l'unité................................................................................................... 5
Tabla 4: Definición de los símbolos hallados en la unidad ................................................................................ 7
表 5: 本機器に使用されているマークについて ...................................................................................................... 9
표 6: 장치에 표시된 기호들의 정의 .............................................................................................................. 11
Table 7: Network Status LED Indicators ......................................................................................................... 25
Table 8: DeviceNet Communications Connector Pinout ................................................................................. 48
Table 9: Troubleshooting Chart........................................................................................................................ 56
List of References
The documents listed below are referenced throughout this manual.
[1] “DeviceNet Specification, Volume I: DeviceNet Communication Model and Protocol”, Open DeviceNet
Vendors Association, Inc. Release 2.0. ERRATA 4.0
[2] “DeviceNet Specification, Volume II: DeviceNet Profiles and Object Library”, Open DeviceNet
Vendors Association, Inc. Release 2.0. ERRATA 4.0
[3] “Sensor/Actuator Network Common Device Model”, SEMI Standards Document E54.1-0097.
[4] “Sensor/Actuator Network Communications Standard for DeviceNet”, SEMI Standards Draft Document
E54.4-0097.
[5] “Sensor/Actuator Network Specific Device Model for Mass Flow Devices”, SEMI Standards Draft
Document #2253C.
[6] “Sensor/Actuator Network Standard”, SEMI Standards Document E54-0097.
[7] SEMI Standards Document E52-95.
iv
Mass Flow Device Safety Information
Mass Flow Device Safety Information
Symbols Used in This Instruction Manual
Definitions of WARNING, CAUTION, and NOTE messages used throughout the manual.
Warning
The WARNING sign denotes a hazard. It calls attention to a procedure, practice,
condition, or the like, which, if not correctly performed or adhered to, could result
in injury to personnel.
Caution
The CAUTION sign denotes a hazard. It calls attention to an operating procedure,
practice, or the like, which, if not correctly performed or adhered to, could result in
damage to or destruction of all or part of the product.
Note
The NOTE sign denotes important information. It calls attention to a procedure, practice,
condition, or the like, which is essential to highlight.
Symbols Found on the Unit
The following table describes symbols that may be found on the unit.
Table 1: Definition of Symbols Found on the Unit
|
On (Supply)
IEC 417, No. 5007
Off (Supply)
IEC 417, No. 5008
Earth (ground)
IEC 417, No. 5017
Protective Earth (ground)
IEC 417, No. 5019
Frame or Chassis
IEC 417, No. 5020
Equipotentiality
IEC 417, No. 5021
Direct Current
IEC 417, No. 5031
Alternating Current
IEC 417, No. 5032
Both Direct and Alternating Current
IEC 417, No. 5033-a
Class II Equipment
IEC 417, No. 5172-a
Three Phase
Alternating Current
IEC 617-2, No. 020206
Caution (refer to accompanying
documents)
ISO 3864, No. B.3.1
Caution, Risk of Electric Shock
ISO 3864, No. B.3.6
Caution, Hot Surface
IEC 417, No. 5041
Safety Procedures and Precautions
Observe the following general safety precautions during all phases of operation of this instrument.
Failure to comply with these precautions or with specific warnings elsewhere in this manual violates
safety standards of intended use of the instrument and may impair the protection provided by the
equipment. MKS Instruments, Inc. assumes no liability for the customer’s failure to comply with these
requirements.
1
Mass Flow Device Safety Information
DO NOT SUBSTITUTE PARTS OR MODIFY INSTRUMENT
Do not install substitute parts or perform any unauthorized modification to the instrument. Return the instrument to an
MKS Calibration and Service Center for service and repair to ensure that all safety features are maintained.
SERVICE BY QUALIFIED PERSONNEL ONLY
Operating personnel must not remove instrument covers. Component replacement and internal adjustments must be
made by qualified service personnel only.
KEEP AWAY FROM LIVE CIRCUITS
Do not replace components with power cable connected. Under certain conditions, dangerous voltages may exist even
with the power cable removed. To avoid injuries, always disconnect power and discharge circuits before touching them.
USE CAUTION WHEN OPERATING WITH HAZARDOUS MATERIALS
If hazardous materials are used, users must take responsibility to observe the proper safety precautions, completely purge
the instrument when necessary, and ensure that the material used is compatible with sealing materials.
PURGE THE INSTRUMENT
After installing the unit, or before its removal from a system, be sure to purge the unit completely with a clean dry gas to
eliminate all traces of the previously used flow material.
USE PROPER PROCEDURES WHEN PURGING
This instrument must be purged under a ventilation hood, and gloves must be worn to protect personnel. To purge this
instrument properly, it must be purged in both the horizontal base down and horizontal base up configurations as defined
in SEMI specification. Device has trapped volume in pressure sensor where gas which is higher than air but still
hazardous can accumulate.
DO NOT OPERATE IN AN EXPLOSIVE ENVIRONMENT
To avoid explosion, do not operate this product in an explosive environment unless it has been specifically certified for
such operation.
USE PROPER FITTINGS AND TIGHTENING PROCEDURES
All instrument fittings must be consistent with instrument specifications, and compatible with the intended use of the
instrument. Assemble and tighten fittings according to manufacturer's directions.
CHECK FOR LEAK-TIGHT FITTINGS
Before proceeding to instrument setup, carefully check all plumbing connections to the instrument to ensure leak-tight
installation.
OPERATE AT SAFE INLET PRESSURES
This unit should never be operated at pressures higher than the rated maximum pressure (refer to the product
specifications for the maximum allowable pressure).
INSTALL A SUITABLE BURST DISC
When operating from a pressurized gas source, a suitable burst disc should be installed in the vacuum system to prevent
system explosion should the system pressure rise.
KEEP THE UNIT FREE OF CONTAMINANTS
Do not allow contaminants of any kind to enter the unit before or during use. Contamination such as dust, dirt, lint, glass
chips, and metal chips may permanently damage the unit.
ALLOW PROPER WARM UP TIME FOR TEMPERATURE-CONTROLLED UNITS
Temperature-controlled unit will only meet specifications when sufficient time is allowed for the unit to meet, and
stabilize at, the designed operating temperature. Do not zero or calibrate the unit until the warm up is complete.
2
Sicherheitshinweise für das Massenflussgerät
Sicherheitshinweise für das Massenflussgerät
In dieser Betriebsanleitung vorkommende Symbole
Bedeutung der mit WARNUNG!, VORSICHT! und HINWEIS gekennzeichneten Absätze in dieser
Betriebsanleitung.
Warnung!
Das Symbol WARNUNG! weist auf eine Gefahr für das Bedienpersonal hin. Es
macht auf einen Arbeitsablauf, eine Arbeitsweise, einen Zustand oder eine
sonstige Gegebenheit aufmerksam, deren unsachgemäße Ausführung bzw.
ungenügende Berücksichtigung zu Verletzungen führen kann.
Vorsicht!
Das Symbol VORSICHT! weist auf eine Gefahr für das Gerät hin. Es macht auf
einen Bedienungsablauf, eine Arbeitsweise oder eine sonstige Gegebenheit
aufmerksam, deren unsachgemäße Ausführung bzw. ungenügende
Berücksichtigung zu einer Beschädigung oder Zerstörung des Gerätes oder von
Teilen des Gerätes führen kann.
Hinweis
Das Symbol HINWEIS macht auf wichtige Informationen bezüglich eines
Arbeitsablaufs, einer Arbeitsweise, eines Zustands oder einer sonstige Gegebenheit
aufmerksam.
Erklärung der am Gerät angebrachten Symbole
Nachstehender Tabelle sind die Bedeutungen der Symbole zu entnehmen, die am Gerät angebracht sein können.
Tabelle 2: Bedeutung der am Gerät angebrachten Symbole
|
Ein (Energie)
IEC 417, No.5007
Aus (Energie)
IEC 417, No.5008
Erdanschluss
IEC 417, No.5017
Schutzleiteranschluss
IEC 417, No.5019
Masseanschluss
IEC 417, No.5020
Aquipotentialanschluss
IEC 417, No.5021
Gleichstrom
IEC 417, No.5031
Wechselstrom
IEC 417, No.5032
Gleich- oder Wechselstrom
IEC 417, No.5033-a
Durchgängige doppelte oder
verstärkte Isolierung
IEC 417, No.5172-a
Dreileiter-Wechselstrom (Drehstrom)
IEC 617-2, No.020206
Warnung vor einer Gefahrenstelle
(Achtung, Dokumentation beachten)
ISO 3864, No.B.3.1
Warnung vor gefährlicher
elektrischer Spannung
ISO 3864, No.B.3.6
Höhere Temperatur an leicht
zugänglichen Teilen
IEC 417, No.5041
Sicherheitsvorschriften und Vorsichtsmaßnahmen
Folgende allgemeine Sicherheitsvorschriften sind während allen Betriebsphasen dieses Gerätes zu
befolgen. Eine Missachtung der Sicherheitsvorschriften und sonstiger Warnhinweise in dieser
3
Sicherheitshinweise für das Massenflussgerät
Betriebsanleitung verletzt die für dieses Gerät und seine Bedienung geltenden Sicherheitsstandards,
und kann die Schutzvorrichtungen an diesem Gerät wirkungslos machen. MKS Instruments, Inc.
haftet nicht für Missachtung dieser Sicherheitsvorschriften seitens des Kunden.
Niemals Teile austauschen oder Änderungen am Gerät vornehmen!
Ersetzen Sie keine Teile mit baugleichen oder ähnlichen Teilen, und nehmen Sie keine eigenmächtigen Änderungen am
Gerät vor. Schicken Sie das Gerät zwecks Wartung und Reparatur an den MKS-Kalibrierungs- und -Kundendienst ein.
Nur so wird sichergestellt, dass alle Schutzvorrichtungen voll funktionsfähig bleiben.
Wartung nur durch qualifizierte Fachleute!
Das Auswechseln von Komponenten und das Vornehmen von internen Einstellungen darf nur von qualifizierten
Fachleuten durchgeführt werden, niemals vom Bedienpersonal.
Vorsicht vor stromführenden Leitungen!
Ersetzen Sie keine Komponente von Geräten, die an Netzstrom angeschlossen sind. Unter Umständen kann gefährliche
Spannung auch dann bestehen, wenn das Netzanschlusskabel von der Strmversorgung entfernt wurde. Um Verletzungen
vorzubeugen sollten zuerst alle Geräte von der Stromversorgung getrennt und alle Stromkreusläufe entladen werden.
Vorsicht beim Arbeiten mit gefährlichen Stoffen!
Wenn gefährliche Stoffe verwendet werden, muss der Bediener die entsprechenden Sicherheitsvorschriften genauestens
einhalten, das Gerät, falls erforderlich, vollständig spülen, sowie sicherstellen, dass der Gefahrstoff die am Gerät
verwendeten Materialien, insbesondere Dichtungen, nicht angreift.
Spülen des Gerätes mit Gas!
Nach dem Installieren oder vor dem Ausbau aus einem System muss das Gerät unter Einsatz eines reinen Trockengases
vollständig gespült werden, um alle Rückstände des Vorgängermediums zu entfernen.
Anweisungen zum Spülen des Gerätes
Das Gerät darf nur unter einer Ablufthaube gespült werden. Schutzhandschuhe sind zu tragen.
Gerät nicht zusammen mit explosiven Stoffen, Gasen oder Dämpfen benutzen!
Um der Gefahr einer Explosion vorzubeugen, darf dieses Gerät niemals zusammen mit (oder in der Nähe von)
explosiven Stoffen aller Art eingesetzt werden, sofern es nicht ausdrücklich für diesen Zweck zugelassen ist.
Anweisungen zum Installieren der Armaturen!
Alle Anschlussstücke und Armaturenteile müssen mit der Gerätespezifikation übereinstimmen, und mit dem geplanten
Einsatz des Gerätes kompatibel sein. Der Einbau, insbesondere das Anziehen und Abdichten, muss gemäß den
Anweisungen des Herstellers vorgenommen werden.
Verbindungen auf Undichtigkeiten prüfen!
Überprüfen Sie sorgfältig alle Verbindungen der Vakuumkomponenten auf undichte Stellen.
Gerät nur unter zulässigen Anschlussdrücken betreiben!
Betreiben Sie das Gerät niemals unter Drücken, die den maximal zulässigen Druck (siehe Produktspezifikationen)
übersteigen.
Geeignete Berstscheibe installieren!
Wenn mit einer unter Druck stehenden Gasquelle gearbeitet wird, sollte eine geeignete Berstscheibe in das
Vakuumsystem installiert werden, um eine Explosionsgefahr aufgrund von steigendem Systemdruck zu vermeiden.
Verunreinigungen im Gerät vermeiden!
Stellen Sie sicher, dass Verunreinigungen jeglicher Art weder vor dem Einsatz noch während des Betriebs in das
Instrumenteninnere gelangen können. Staub- und Schmutzpartikel, Glassplitter oder Metallspäne können das Gerät
dauerhaft beschädigen oder Prozess- und Messwerte verfälschen.
Bei Geräten mit Temperaturkontrolle korrekte Anwärmzeit einhalten!
Temperaturkontrollierte Geräte arbeiten nur dann gemäß ihrer Spezifikation, wenn genügend Zeit zum Erreichen und
Stabilisieren der Betriebstemperatur eingeräumt wird. Kalibrierungen und Nulleinstellungen sollten daher nur nach
Abschluss des Anwärmvorgangs durchgeführt werden.
4
Informations de sécurité pour appareils de mesure/contrôle de débit massique
Informations de sécurité pour appareils de mesure/contrôle de débit
massique
Symboles utilisés dans ce manuel d'utilisation
Définitions des indications AVERTISSEMENT, ATTENTION, et REMARQUE utilisées dans ce manuel.
Avertissement
L'indication AVERTISSEMENT signale un danger pour le personnel. Elle
attire l'attention sur une procédure, une pratique, une condition, ou toute
autre situation présentant un risque d'accident pour le personnel, en cas
d'exécution incorrecte ou de non-respect des consignes.
Attention
L'indication ATTENTION signale un danger pour l'appareil. Elle attire
l'attention sur une procédure d'exploitation, une pratique, ou toute autre
situation, présentant un risque de dégât ou de destruction partielle ou totale
du produit, en cas d'exécution incorrecte ou de non-respect des consignes.
Remarque
L'indication REMARQUE signale une information importante. Elle attire
l'attention sur une procédure, une pratique, une condition, ou toute autre situation,
présentant un intérêt particulier.
Symboles figurant sur l'unité
Le tableau suivant décrit les symboles pouvant apparaître sur l'unité.
Tableau 3: Définition des symboles sur l'unité
|
Marche (sous tension)
IEC 417, No.5007
Arrêt (hors tension)
IEC 417, No.5008
Terre (masse)
IEC 417, No.5017
Terre de protection (masse)
IEC 417, No.5019
Masse
IEC 417, No.5020
Equipotentialité
IEC 417, No.5021
Courant continu
IEC 417, No.5031
Courant alternatif
IEC 417, No.5032
Courant continu et alternatif
IEC 417, No.5033-a
Matériel de classe II
IEC 417, No.5172-a
Courant alternatif triphasé
IEC 617-2, No.020206
Attention : se reporter
à la documentation
ISO 3864, No.B.3.1
Attention : risque de
choc électrique
ISO 3864, No.B.3.6
Attention : surface brûlante
IEC 417, No.5041
Mesures de sécurité et précautions
Observer les précautions générales de sécurité suivantes pendant toutes les phases d'exploitation de cet
appareil. Le non-respect des ces précautions ou des avertissements du manuel constitue une violation
des normes de sécurité relatives à l'utilisation de l'appareil et peut compromettre la protection assurée
5
Informations de sécurité pour appareils de mesure/contrôle de débit massique
par l'appareil. MKS Instruments, Inc. rejette toute responsabilité en cas de non-respect des consignes
par les clients.
PAS DE REMPLACEMENT DE PIÈCES OU DE MODIFICATION DE L'APPAREIL
Ne pas installer de pièces de remplacement ni effectuer des modifications non autorisées sur l'appareil. Renvoyer
l'appareil à un centre de service et de calibrage MKS pour tout dépannage ou réparation afin de garantir le l'intégrité des
dispositifs de sécurité.
DÉPANNAGE UNIQUEMENT PAR DU PERSONNEL QUALIFIÉ
Le personnel d'exploitation ne doit pas essayer de sortir les composants du boîtier ou faire des réglages internes. Le
dépannage est réservé au personnel qualifié.
ÉLOIGNEMENT DES CIRCUITS SOUS-TENSION
Ne pas remplacer de composants lorsqu’un câble d’alimentation est branché. Dans certaines conditions, des tensions
dangereuses peuvent être présentes même après le retrait du câble d’alimentation. Pour éliminer tout risque de blessure,
procéder toujours à la déconnexion et décharger les circuits avant tout contact physique.
PRÉCAUTION EN CAS D'UTILISATION AVEC DES PRODUITS DANGEREUX
Si des produits dangereux sont utilisés, l'utilisateur est responsable du respect des mesures de sécurité appropriées, de la
purge complète de l'appareil quand elle s’avère nécessaire, et doit s’assurer que les produits utilisés sont compatibles
avec les matériaux d'étanchéité.
PURGE DE L'APPAREIL
Après l'installation de l'unité, ou avant son retrait d'un système, purger l'unité complètement avec un gaz propre et sec
afin d'éliminer toute trace du produit de flux utilisé précédemment.
UTILISATION DES PROCÉDURES APPROPRIÉES POUR LA PURGE
Cet appareil doit être purgé sous une hotte de ventilation. Le personnel doit porter des gants de protection.
PAS D'EXPLOITATION DANS UN ENVIRONNEMENT EXPLOSIF
Pour éviter toute explosion, ne pas utiliser cet appareil dans un environnement explosif, sauf en cas d'homologation
spécifique pour une telle exploitation.
UTILISATION D'ÉQUIPEMENTS ET PROCÉDURES DE SERRAGE APPROPRIÉS
Tous les équipements de l'appareil doivent être conformes à ses spécifications, et compatibles avec l'utilisation prévue de
l'appareil. Assembler et serrer les équipements conformément aux directives du fabricant.
VÉRIFICATION DE L'ÉTANCHÉITÉ DES CONNEXIONS
Vérifier attentivement toutes les connexions des composants pour le vide afin de garantir l'étanchéité de l'installation.
EXPLOITATION AVEC DES PRESSIONS D'ENTRÉE NON DANGEREUSES
Ne jamais utiliser des pressions supérieures à la pression nominale maximum (se reporter aux spécifications de l'unité
pour la pression maximum admissible).
INSTALLATION D'UN DISQUE D'ÉCHAPPEMENT ADAPTÉ
En cas d'exploitation avec une source de gaz pressurisé, installer un disque d'échappement adapté dans le système à vide,
afin d'éviter une explosion du système en cas d'augmentation de la pression.
MAINTIEN DE L'UNITÉ À L'ABRI DES CONTAMINATIONS
Ne pas laisser des produits contaminants pénétrer dans l'unité avant ou pendant l'utilisation. Des produits contaminants
tels que des poussières et des fragments de tissu, de verre et de métal peuvent endommager l'unité de manière
permanente.
RESPECT DU TEMPS D'ÉCHAUFFEMENT APPROPRIÉ POUR LES UNITÉS Á RÉGULATION DE TEMPÉRATURE
Les unités à régulation de température sont conformes à leurs spécifications uniquement quand on leur laisse un temps
suffisant pour atteindre d'une manière stable la température d'exploitation. Ne pas remettre à zéro ou calibrer l'unité tant
que l'échauffement n'est pas terminé.
6
Medidas de seguridad del dispositivo de flujo de masa
Medidas de seguridad del dispositivo de flujo de masa
Símbolos usados en este manual de instrucciones
Definiciones de los mensajes de advertencia, precaución y de las notas usados en el manual.
Advertencia
El símbolo de advertencia indica la posibilidad de que se produzcan daños
personales. Pone de relieve un procedimiento, práctica, estado, etc. que en caso
de no realizarse o cumplirse correctamente puede causar daños personales.
Precaución
El símbolo de precaución indica la posibilidad de producir daños al equipo.
Pone de relieve un procedimiento operativo, práctica, etc. que en caso de no
realizarse o cumplirse correctamente puede causar daños o la destrucción total
o parcial del equipo.
Nota
El símbolo de notas indica información de importancia. Este símbolo pone de relieve
un procedimiento, práctica o condición cuyo conocimiento es esencial destacar.
Símbolos hallados en la unidad
La tabla siguiente contiene los símbolos que puede hallar en la unidad.
Tabla 4: Definición de los símbolos hallados en la unidad
|
Encendido
(alimentación eléctrica)
IEC 417, N° 5007
Apagado
(alimentación eléctrica)
IEC 417, N° 5008
Puesta a tierra
IEC 417, N° 5017
Protección a tierra
IEC 417, N° 5019
Caja o chasis
IEC 417, N° 5020
Equipotencialidad
IEC 417, N° 5021
Corriente continua
IEC 417, N° 5031
Corriente alterna
IEC 417, N° 5032
Corriente continua y alterna
IEC 417, N° 5033-a
Equipo de clase II
IEC 417, N° 5172-a
Corriente alterna trifásica
IEC 617-2, N° 020206
Precaución. Consulte los documentos
adjuntos
ISO 3864, N° B.3.1
Precaución.
Riesgo de descarga eléctrica
ISO 3864, N° B.3.6
Precaución. Superficie caliente
IEC 417, N° 5041
Procedimientos y precauciones de seguridad
Las medidas generales de seguridad descritas a continuación deben observarse durante todas las etapas
de funcionamiento del instrumento. La fMFC de cumplimiento de dichas medidas de seguridad o de las
advertencias específicas a las que se hace referencia en otras partes de este manual, constituye una
violación de las normas de seguridad establecidas para el uso previsto del instrumento y podría anular
7
Medidas de seguridad del dispositivo de flujo de masa
la protección proporcionada por el equipo. Si el cliente no cumple dichas precauciones y advertencias,
MKS Instruments, Inc. no asume responsabilidad legal alguna.
NO UTILICE PIEZAS NO ORIGINALES O MODIFIQUE EL INSTRUMENTO
No instale piezas que no sean originales ni modifique el instrumento sin autorización. Para asegurar el correcto
funcionamiento de todos los dispositivos de seguridad, envíe el instrumento al Centro de servicio y calibración de MKS
toda vez que sea necesario repararlo o efectuar tareas de mantenimiento.
LAS REPARACIONES DEBEN SER EFECTUADAS ÚNICAMENTE POR TÉCNICOS AUTORIZADOS
Los operarios no deben retirar las tapas del instrumento. El reemplazo de los componentes y las tareas de ajuste deben
ser realizadas únicamente por personal autorizado.
MANTÉNGASE ALEJADO DE LOS CIRCUITOS ACTIVOS
No reemplace componentes con el cable de alimentación eléctrica conectado. En algunos casos, puede haber presente
alto voltaje aun con el cable de alimentación eléctrica desconectado. Para evitar lesiones personales, desconecte siempre
el cable y descargue los circuitos antes de entrar en contacto con los mismos.
TENGA CUIDADO CUANDO TRABAJE CON MATERIALES TÓXICOS
Cuando se utilicen materiales tóxicos, es responsabilidad de los operarios tomar las medidas de seguridad
correspondientes, purgar totalmente el instrumento cuando sea necesario y comprobar que el material utilizado sea
compatible con los materiales de sellado.
PURGUE EL INSTRUMENTO
Una vez instalada la unidad o antes de retirarla del sistema, purgue completamente la unidad con gas limpio y seco para
eliminar todo resto de la sustancia líquida empleada anteriormente.
USE PROCEDIMIENTOS ADECUADOS PARA REALIZAR LA PURGA
El instrumento debe purgarse debajo de una campana de ventilación y deben utilizarse guantes protectores.
NO HAGA FUNCIONAR EL INSTRUMENTO EN AMBIENTES CON RIESGO DE EXPLOSIÓN
Para evitar que se produzcan explosiones, no haga funcionar este instrumento en un ambiente con riesgo de explosiones,
excepto cuando el mismo haya sido certificado específicamente para tal uso.
USE ACCESORIOS ADECUADOS Y REALICE CORRECTAMENTE LOS PROCEDIMIENTOS DE AJUSTE
Todos los accesorios del instrumento deben cumplir las especificaciones del mismo y ser compatibles con el uso que se
debe dar al instrumento. Arme y ajuste los accesorios de acuerdo con las instrucciones del fabricante.
COMPRUEBE QUE LOS ACCESORIOS SEAN A PRUEBA DE FUGAS
Antes de proceder con la instalación del instrumento, inspeccione cuidadosamente todas las conexiones de las tuberías
para comprobar que hayan sido instaladas a prueba de fugas.
HAGA FUNCIONAR EL INSTRUMENTO CON PRESIONES DE ENTRADA SEGURAS
No haga funcionar nunca el instrumento con presiones superiores a la máxima presión nominal (en las especificaciones
del instrumento hallará la presión máxima permitida).
INSTALE UNA CÁPSULA DE SEGURIDAD ADECUADA
Cuando el instrumento funcione con una fuente de gas presurizado, instale una cápsula de seguridad adecuada en el
sistema de vacío para evitar que se produzcan explosiones cuando suba la presión del sistema.
MANTENGA LA UNIDAD LIBRE DE CONTAMINANTES
No permita el ingreso de contaminantes en la unidad antes o durante su uso. Los productos contaminantes tales como
polvo, suciedad, pelusa, lascas de vidrio o virutas de metal pueden dañar irreparablemente la unidad.
CALIENTE ADECUADAMENTE LAS UNIDADES CONTROLADAS POR MEDIO DE TEMPERATURA
Las unidades controladas por medio de temperatura funcionarán de acuerdo con las especificaciones sólo cuando se las
caliente durante el tiempo suficiente para permitir que lleguen y se estabilicen a la temperatura de operación indicada.
No calibre la unidad y no la ponga en cero hasta que finalice el procedimiento de calentamiento.
8
マスフ ロー機器の安全に関する情報
マスフロー機器の安全に関する情報
本取扱説明書のマーク
本マニュアルでは警告、注意、ポイントのマークを用いて重要な事項を記載しています。
警告
この表示を無視して誤った取り扱い (手順や使用方法、条件など) をすると、人が重傷
を負う可能性が想定される内容を示しています。必ずお読みください。
注意
この表示を無視して誤った取り扱い (手順や使用方法など) をすると、 製品が損傷する
可能性が想定される内容を示しています。必ずお読みください。
ポイント
この表示は手順や使用方法、条件などに関する重要な情報が記載されていることを示
しています。必ずお読みください。
本機器のマーク
以下の表では、本機器に使用されているマークについて説明いたします。
表 5: 本機器に使用されているマークについて
|
オン (電源)
IEC 417, No. 5007
オフ (電源)
IEC 417, No. 5008
接地 (アース)
IEC 417, No. 5017
保護接地 (アース)
IEC 417, No. 5019
フレームまたはシャーシ
IEC 417, No. 5020
等電位
IEC 417, No. 5021
直流
IEC 417, No. 5031
交流
IEC 417, No. 5032
直流と交流
IEC 417, No. 5033-a
クラス 2 機器
IEC 417, No. 5172-a
三相交流
IEC 617-2, No. 020206
注意 (付属書を参照)
ISO 3864, No. B.3.1
注意 (感電の危険あり)
ISO 3864, No. B.3.6
注意 (表面が熱くなっています)
IEC 417, No. 5041
安全対策について
本機器を使用する際は、必ず以下の安全対策を守ってください。これらの安全対策や本マニュアルの
警告を無視すると、機器本来の用途の安全基準を侵害することになり、機器が提供する保護機能が
損なわれる可能性があります。MKS Instruments, Inc. は、顧客側の安全対策の不履行に対して
は一切責任を負いかねます。
勝手に部品を変えたり、本体を改造しないこと
本機器に代用部品を使用したり、不正な改造を加えないでください。すべての安全システムを正しく機能させるた
めの修理やメンテナンスが必要な場合は、本機器を MKS Calibration and Service Center まで戻してください。
修理は必ず専門の修理サービスを利用すること
オペレータは絶対に本機器を分解しないでください。部品の交換や内部の調整は必ず専門の修理サービスを利
用してください。
9
マスフ ロー機器の安全に関する情報
電流が通じている回路から切断すること
電源ケーブルを接続したままで部品を交換しないでください。特定の状況では、電源ケーブルを取り外した状態
でも危険な電圧が残っている場合があります。感電などの事故を防ぐため、回路に触れる前に必ず電源から切
断し、放電してください。
危険な材料を使用する場合は慎重に機器を使用すること
危険な材料を使用する場合は、使用者は各自の責任の元で適切な安全対策を講じてください。必要に応じて
本機器を浄化してください。また、使用する材料に対するシーリング材の耐久性を確認してください。
機器を浄化すること
本機器を取り付けた後やシステムから取り外す前に、きれいな乾燥ガスで本機器を浄化し、使用した材料を完
全に取り除いてください。
浄化する場合は適切な手順で行うこと
本機器の浄化は換気フードの下で行う必要があります。また、浄化作業を行う人は必ず手袋を着用してください。
爆発の危険性のある環境で機器を使用しないこと
爆発が起きるのを防ぐため、本機器を爆発の危険性のある環境で使用しないでください。ただし、そのような環境
での使用が特別に保証されている場合は除きます。
適切な金具類を使用し、手順に従って金具の締めを行うこと
金具類は本機器の仕様と一致し、機器本来の用途に適合したものである必要があります。金具類の取り付け
や締めは、製造業者の指示に従ってください。
液体の漏れがないよう接続箇所を確認すること
本機器を設定する前に、すべての配管の接続を慎重に確認し、液体が漏れないようにしてください。
安全なインレット圧力で使用すること
定格の最大圧力を超える圧力の下で本機器を絶対に使用しないでください (最大許容圧力については仕様書
を参照)。
適切なバーストディスクを取り付けること
圧力のかかったガスを使用する場合は、万一システムが爆発した場合にシステムの圧力が上昇するのを防ぐため、
真空システムに適切なバーストディスクを取り付けてください。
本機器に異物やゴミが混入しないようにすること
本機器の使用前または使用中に、ほこりやゴミ、繊維、ガラスの破片、金属片などの異物やゴミが混入しないよ
うにしてください。本機器が損傷する可能性があります。
温度調整された機器を十分に温めてから使用すること
温度調整された機器が適切な作動温度にならないうちに使用すると、仕様通りの動作をしないことがあります。
本機器が十分に温まるまでは目盛りをゼロに合わせたり、較正しないでください。
10
질량 유량 장치 안전 정보
질량 유량 장치 안전 정보
본 지침 매뉴얼에 사용되는 기호들
매뉴얼 전체에 사용되는 경고, 주의 및 참고 메시지의 정의.
경고
경고 표시는 위험을 나타냅니다. 이 표시는 올바르게 수행되거나 지켜지지 않을
경우, 사람에게 상해를 입힐 수 있는 절차, 수행지침, 상태 또는 이와 유사한
상황들에 대한 주의를 환기시킵니다.
주의
주의 표시는 위험을 나타냅니다. 이 표시는 올바르게 수행되거나 지켜지지 않을
경우, 제품의 일부나 전체에 손상이나 파손을 일으킬 수 있는 절차, 수행지침 또는
이와 유사한 상황들에 대한 주의를 환기시킵니다.
참고
참고 표시는 중요한 정보를 나타냅니다. 이 표시는 강조할 만한 주요 절차,
수행지침, 상태 또는 이와 유사한 상황들에 대한 주의를 환기시킵니다.
장치에 표시된 기호들
다음 표는 장치에서 볼 수 있는 기호들을 설명합니다.
표 6: 장치에 표시된 기호들의 정의
|
켬 (전원)
IEC 417, No. 5007
끔 (전원)
IEC 417, No. 5008
접지(지면)
IEC 417, No. 5017
보호 접지(지면)
IEC 417, No. 5019
프레임 또는 섀시
IEC 417, No. 5020
등전위성
IEC 417, No. 5021
직류
IEC 417, No. 5031
교류
IEC 417, No. 5032
직류와 교류 모두
IEC 417, No. 5033-a
클래스 II 장비
IEC 417, No. 5172-a
3상 교류
IEC 617-2, No. 020206
주의 (동봉 문서 참조)
ISO 3864, No. B.3.1
주의, 감전 위험
ISO 3864, No. B.3.6
주의, 표면이 뜨거움
IEC 417, No. 5041
안전 절차 및 예방조치
본 기계의 모든 작동 시에 다음의 일반 안전 예방조치를 준수하십시오. 아래 예방조치를
준수하지 않거나 본 매뉴얼의 다른 부분에 있는 특정 경고를 준수하지 않을 경우, 기계
사용 목적의 안전 기준을 위반하는 것이 되며, 장비가 제공하는 보호기능을 손상시킬 수
있습니다. MKS Instruments, Inc.는 고객이 본 요건을 준수하지 않는 경우에 대해서는
어떠한 책임도 지지 않습니다.
부품을 교체하거나 기계를 개조하지 마십시오
11
질량 유량 장치 안전 정보
교체 부품을 설치하거나 기계에 허가되지 않은 어떠한 수정도 가하지 마십시오. 서비스와 수리가
필요한 경우에는 모든 안전 특성이 유지되도록 기계를 MKS 보정 서비스 센터(MKS Calibration and
Service Center)로 보내주십시오.
자격이 있는 사람에게만 서비스를 받으십시오
작동하는 사람은 기계 겉면을 제거해서는 안됩니다. 부품 교체 및 내부 조정은 자격이 있는 서비스
기사에게만 받으실 수 있습니다.
전류가 통하는 회로에서 분리해 보관하십시오
전원 케이블을 연결한 채로 부품을 교체하지 마십시오. 일부 환경에서는 전원 케이블을 제거한
상태라도 위험 전압이 존재할 수 있습니다. 부상을 방지하려면, 전원을 항상 분리하고 회로를
만지기 전에 회로를 방전시키십시오.
위험한 물질과 함께 작동할 때는 주의를 기울이십시오
위험한 물질이 사용되는 경우, 사용자는 필요시 기계를 완전히 청소하여, 적절한 안전 예방조치를
준수할 책임을 지키고, 사용된 물질이 봉인 물질과 함께 사용해도 무방하다고 보증할 수 있어야
합니다.
기계를 청소하십시오
장치를 설치한 후나 시스템에서 장치를 제거하기 전에는 반드시 깨끗한 건조성 기체로 장치를
완전히 청소하여 이전에 사용된 유량 물질의 모든 흔적을 제거하십시오.
청소 시에는 적절한 절차를 사용하십시오
본 기계는 환기 후드 아래에서 청소되어야 하며, 인체 보호를 위해 장갑을 착용해야 합니다.
폭발성 환경에서 작동하지 마십시오
폭발을 방지하려면, 폭발성 환경에서 작동하도록 특별히 승인받지 않은 경우 본 제품을 폭발성
환경에서 작동하지 마십시오.
적절한 조립부품과 조임 절차를 사용하십시오
모든 기계 조립부품은 제품 사양과 일치해야 하고, 기계의 사용 목적에 부합해야 합니다.
제조업체의 지시에 따라 조립부품을 조립하고 조이십시오.
누출방지 조립부품을 점검하십시오
기계 설치를 진행하기 전에 기계의 모든 연관 연결부를 점검해 누출방지 설치가 되었는지
확인하십시오.
안전한 흡입 압력에서 작동하십시오
이 장치는 절대 정격 최대 압력보다 높은 압력에서 작동해서는 안됩니다(최대 허용 압력에
대해서는 제품 사양을 참조하십시오).
적합한 안전 파열판을 설치하십시오
가압 가스 공급원에서 작동시, 시스템 폭발이 시스템 압력 상승을 일으키는 것을 방지하기 위해
적합한 안전 파열판이 진공 시스템에 설치되어야 합니다.
장치를 오염이 없는 곳에 보관하십시오
장치를 사용하기 전이나 사용 중에는 어떠한 종류의 오염 물질도 허용해서는 안됩니다. 먼지, 때,
보풀, 유리 조각, 금속 조각과 같은 오염 물질은 영구적으로 장치를 손상시킬 수 있습니다.
온도 제어 장치의 경우 알맞은 시동 시간을 두십시오
온도 제어 장치는 장치가 설계 작동 온도와 일치하고 이 온도에서 안정화될 수 있도록 충분한
시간을 허용해야만 사양에 맞게 작동합니다. 시동이 완료될 때까지 장치를 영점 설정하거나
보정하지 마십시오.
12
How This Manual is Organized
Chapter One: General Information
Chapter One: General Information
Introduction
MKS Instruments π series digital MFCs represent state-of-the-art technology meeting the advanced process
requirements of next generation toolsets. This unique device integrates thermal sensor technology together
with MKS Baratron® technology through an innovative, real-time feedback control system.
The πMFC include an integrated multifunctional local display and an embedded, web-based user interface.
The device is available in standard 1.125” C-seal, W-seal surface mount or ¼” VCR™ package.
Design Features
Increases Throughput and Performance
♦ Insensitive to upstream and downstream pressure disturbances
♦ Accurate flow control without the need for additional dedicated line pressure regulator.
♦ Enables better chamber matching through increased MFC accuracy of any process gas.
♦ Increases tool uptime through reduction of “No Problem Found” MFC replacements.
♦ Includes embedded diagnostics software that allows users to check MFC functionality without
removing the MFC.
♦ E-diagnostics through embedded Ethernet interface.
Reduce Overall Costs
♦ Reduces MFC inventory through multi-gas, multi-range availability.
♦ Enables reduction in number of gas stick components needed, such as pressure regulators and pressure
transducers.
♦ Minimizes overall footprint of gas delivery module.
Easy to Integrate and Operate
♦ Straightforward configuration and diagnostics through Ethernet interface
Uses standard web browser – no special software required.
Includes remote PC application.
♦ Easy viewing of line pressure, flow rate, gas type, full scale and Ethernet address with big LED
display.
The design of the πMFC incorporates an advanced flow sensor, a control valve, and an optimized bypass. The
latest generation two-element sensing circuit provides accurate, repeatable performance even in low flow
ranges (< 10 sccm). A low temperature effect from ambient temperature change and a low attitude sensitivity
effect are also ensured. Attitude sensitivity is completely accounted for with advanced attitude circuitry. The
optimized sensor/bypass arrangement minimizes the flow splitting error for gases with different properties,
which dramatically improves measurement accuracy when gases other than the calibration gas are used.
13
질량 유량 장치 안전 정보
Model Name( Part Number )
PFC-60(P6A)
PFC-50(P5A)
PI(Pressure Insensitive)
Yes
No
MG(Multi Gas)
Yes
Yes
MR(Multi Range)
No
Yes
Digital Features
The DeviceNet interface ensures interoperability in any DeviceNet mass flow application. In addition, the true
digital calibration and valve control electronics, coupled with standard default 11 point flow calibration,
provide for high flow accuracy over a wide range of setpoints and fast response to even low setpoints.
Reliability
To provide excellent reliability, the design contains a low mechanical and electronic components count and
has successfully passed the following test:
„
STRIFE, including temperature cycling and vibration (sine and random tests)
And with a metal braided, shielded cable, properly grounded at both ends:
„
EMC Directive 89/336/EEC for CE Mark compliance
Cleanliness Features
The πMFCs use only metal for all external seals. The metal seals eliminate gas permeation and ensure
extremely low external leakage under pressure or vacuum conditions relative to atmosphere. The internal
valve control plug is Teflon or sapphire, which are pure, chemically stable, and not prone to out-gassing or
particle generation. The πMFCs mechanical design incorporates minimal wetted surface area and virtual
leaks, assuring rapid dry-down. To further enhance its cleanliness, all internal surfaces are precision machined
to a 5Ra surface finish.. The instrument is assembled and double-packaged in a Class 100 clean room
environment.
How This Manual is Organized
Before installing the device in a system and/or operating it, carefully read and familiarize yourself with
all precautionary notes in the Mass Flow Device Safety Information section at the front of this manual.
In addition, observe and obey all WARNING and CAUTION notes provided throughout the manual.
Chapter One: General Information introduces the product and describes the organization of the manual.
14
Customer Support
Chapter One: General Information
Chapter Two: Installation explains the environmental requirements and describes how to mount the
instrument in your system.
Chapter Four: Overview provides a brief description of the instrument and its functionality, describes how to
use the instrument and explains all the functions and features.
Chapter Five: Maintenance lists any maintenance required to keep the instrument in good working condition.
Chapter Six: Troubleshooting provides a reference should the instrument appears to malfunction.
Appendix A: Product Specifications lists the specifications of the instrument.
Appendix B : Model Code Explanation describes the model code.
Customer Support
Standard maintenance and repair services are available at all of the regional MKS Calibration and Service
Centers. MKS also accepts the instruments of other manufacturers for recalibration using the Primary and
Transfer Standard calibration equipment located at our regional service centers.
If any difficulties arise in the use of your device, or to obtain information about companion products MKS
offers, contact any authorized MKS Calibration and Service Center. If it is necessary to return the instrument
to MKS, please obtain an RMA Number (Return Material Authorization Number) from the MKS Calibration
and Service Center before shipping. The RMA Number expedites handling and ensures proper servicing of
your instrument.
Please refer to the inside of the back cover of this manual for a list of MKS Calibration and Service Centers.
Warning
All returns to MKS Instruments must be free of harmful, corrosive, radioactive, or
toxic materials.
15
Chapter Two: Installation and Configuration
Unpacking
Chapter Two: Installation and Configuration
Unpacking
MKS has carefully packed your device so that it will reach you in perfect operating order. Upon receiving the
unit, however, you should check for defects, cracks, broken connectors, etc., to be certain that damage has not
occurred during shipment.
Note
Do not discard any packing materials until you have completed your inspection and are sure the
unit arrived safely.
If you find any damage, notify your carrier and MKS immediately. If it is necessary to return the unit to
MKS, obtain an RMA Number (Return Material Authorization Number) from the MKS Calibration and
Service Center before shipping. Please refer to the inside back cover of this manual for a list of MKS
Calibration and Service Centers.
Opening the Package
Each device is assembled, leak tested with helium, and calibrated in a cleanroom environment. The
instrument is double-packaged in this environment to ensure maintenance of its particle free condition during
shipment. It is very important to remove the packaging according to good clean room practices. To maintain
at least a minimal level of clean room standards, follow the instructions below:
1. Remove all cardboard and packaging materials. Discard before entering the garmenting room.
2. Remove the outer plastic shipping container in an ante room (garmenting room) or transfer box. Do not
allow this container to enter the clean room.
3. Remove the inner bag in the clean room.
4. Inspect for any damage.
5. Pass the original calculation sheet to the appropriate personnel at your company.
6. Remove plastic Ethernet kit from inner container and DO NOT take them into clean room.
Caution
Only qualified individuals should perform the installation and any user adjustments.
Individuals must comply with all necessary ESD handling precautions while installing
and adjusting the instrument. Proper handling is essential when working with all highly
sensitive precision electronic instruments.
Unpacking Checklist
Standard Equipment:
„
πMFC
„
πMFC Instruction Manual (this book)
„
Ethernet Kit (Surface Mount MFCs only)
„
Adapter cables for 9 pin, 15 pin analog devices (Surface Mount MFCs only)
„
Flow calibration sheet
16
Product Location and Requirements
Chapter Two: Installation and Configuration
Product Location and Requirements
„
Ventilation requirements include sufficient air circulation
„
Ambient operating temperature range: 10° to 50° C (50° to 122° F)
„
Power requirement: 11-25 VDC [320 mA maximum current @ 11 VDC
146 mA @ 24 VDC nominal)]
„
Storage temperature range: -20° to 65° C (-4° and 149° F)
„
Mount the πMFC in an upright position if possible for easy viewing of the display, although any
mounting orientation is satisfactory.
„
Install a separate positive shutoff valve if your system cannot tolerate any leakage through the πMFC.
The internal flow control valve is not a positive shutoff valve so some leakage across the valve may
occur.
Warning
Your corporate policy on handling toxic or hazardous gases supersedes the
instructions in this manual. Comply with your corporate policy. MKS assumes no
liability for the safe handling of such materials.
„
Install the πMFC in a “flowing” system where gas is continually added and evacuated. Do not use the
controller in a “dead-ended” system (a system which cannot remove excess mass). The πMFC can not
vent excess mass to the atmosphere.
„
Warm up time: 1 hour
„
Use high purity gas filters in line upstream of the device.
„
Observe the pressure limits for the flow device.
Controller:
Maximum gas inlet pressure is 150 psig with properly configured valve (consult factory for cases
where inlet pressure is expected to exceed 40 psig).
Operation of the display is limited to 100 psia.
Operational differential pressure is:
1. 10 to 40 psid for 10 to 5000 sccm units
2. 15 to 40 psid for 10000 to 30000 sccm
The standard valve configuration provides control over this pressure range with the outlet at
atmospheric pressure.
For additional information, refer to Appendix A, Product Specifications, page 63.
Meter:
Maximum gas inlet pressure is 150 psig in all cases.
17
Chapter Two: Installation and Configuration
Dimensions
Dimensions
Refer to the applicable drawings, which follow.
.43
3.25
[ 10.9 ]
[ 82.6 ]
MAX
MFC
5.00 MAX
[127.0]
FLOW
2X
.50
[ 12.7 ]
.99 ±0.02
[ 25.1 ±0.5]
.70
3.49
[ 17.7 ]
[ 88.6 ]
4.88
[ 124]
Figure 1: 4-VCR Front View - DeviceNet
18
Dimensions
Chapter Two: Installation and Configuration
Figure 2: 4-VCR Front View – 9-Pin Analog
Figure 3: 4-VCR Front View – 15-Pin Analog
19
Chapter Two: Installation and Configuration
Dimensions
.48
[ 12.2 ]
SEE "PINOUT FOR DEVICENET"
.56
[ 14.3
]
ETHERNET CONNECTOR
4.45±.02
[113.0]
3.18
[80.9]
2X .56
[ 14.3 ]
1.125
± .040
[ 28.58 ±1.01 ]
Figure 4: 4-VCR Left and Right Side Views – DeviceNet
Figure 5: 4-VCR Left and Right Side Views – 9-Pin D
20
Dimensions
Chapter Two: Installation and Configuration
Figure 6: 4-VCR Left and Right Side Views – 15-Pin D
.50 [12.7]
2.49 [63.3]
.19 [4.8]
.75 [19.0]
.75 [19.1]
1.99 [50.6]
#8-3
UNC-2B
4 PLACES
Figure 7: 4-VCR Bottom View
21
.25
Chapter Two: Installation and Configuration
.43
[ 10.9
Dimensions
3.25
[ 82.6 ]
MAX
]
MFC
5.00
[127.0]
MAX.
FLOW
0.99 ±0.02
[ 25.1 ±0.5 ]
4.13 ± .02
[ 104.9 ± 0.5]
Figure 8: C or W Seal Front View
22
Dimensions
Chapter Two: Installation and Configuration
.48
[ 12.2 ]
.56
[ 14.3 ]
RJ45
CONNECTOR
"
T
E
N
E
C
I
V
E
D
R
O
F
T
U
O
N
I
P
"
E
E
S
4.45 ±.02
[113.0]
3.18
[ 80.9]
1.125 ±0.040
[ 28.58 ± 1.01
]
Figure 9: C or W Seal Left and Right Views
23
Chapter Two: Installation and Configuration
Dimensions
ADDRESS
250kb
2
2
4
4
0
0
6
500
kb
125
kb
PGM
RATE
6
8
PGM
LSD
MSD
Figure 10: C and W Seal Top View
4X 0.187 [4.75] THRU (C-SEAL)
4X 0.173 [4.39] THRU (W-SEAL)
1.811
1.811
[ 46 ]
[ 46 ]
.856
[ 21.74]
.428
[ 10.87
Figure 11: C and W Seal Bottom View
Labels
Each MFC has one serial number label and a larger label on the back side. Each label shows the serial
number, the model code, the full scale flow range, and the calibration gas.
www.mksinst.com
P6A053101C6T021
Product: P6A053101C6T021
Serial#
||║||||||||||||│|||||||||||||
7XX04
012345678
Tag 1599
Figure 12: Serial Number Label
24
]
Network Status LED
Chapter Two: Installation and Configuration
Network Status LED ( MOD & NET )
The Network Status LED indicates the status of the communications link. If no problems are detected, the
Network Status LED illuminates a solid green. A red, dark, or flashing green Network Status LED indicates a
fault condition on the network.
Table 7: Network Status LED Indicators
LED Status
Solid Green
Flashing Green
Solid Red
Dark
Meaning
Communications link is OK.
The device is online and connections are established.
The device is online but no connections are established.
The device has passed the Dup_MAC_ID test and is online, but has no established
connections to other nodes.
Critical link failure.
The device has detected an error that prevents network communication (Duplicate
MAC_ID or bus-off.).
Not powered / Not online.
The device has not completed the Dup_MAC_ID test, or the device is not powered;
check the module status LED.
Baud Rate and MAC ID Switches
The baud rate and MAC ID (node address) for your device can be set through software commands using
standard DeviceNet protocol over the network, or manually using the rotary switches located on the top panel
of the device. The baud rate and MAC ID switches allow you to easily configure units without an operational
network, or to network multiple units quickly.
The baud rate and MAC ID rotary switches support an assigned network position, labeled on the device as
“PGM” to indicate software operation.
If the rotary switch is in the network (PGM) position at power-up, the baud rate or address is read from the
non-volatile memory. Any changes to the values must be made over the network; any changes in the rotary
switch positions after power-up are ignored.
If the rotary switch is not in the network (PGM) position at power-up, the baud rate or address is read directly
from the switches.
Note
The DeviceNet General Error Codes are listed in the ODVA DeviceNet Specification,
Volume 1 [1].
Baud Rate Switch
The 4-position rotary switch is used to select the DeviceNet baud rate. The choices are: PGM (the baud rate is
read from the non-volatile memory), 125, 250, and 500 Kb.
The switch positions are numbered in a clockwise direction, to correspond to the increasing address values.
25
Chapter Two: Installation and Configuration
MAC ID Switches
Baud Rate
(Kb)
250
125
500
PGM
MAC ID (Node Address) Switches
Two 10-position rotary switches, shown below, are used to set the MAC ID (node address).
The MAC ID is an integer identification value assigned to each node on the DeviceNet network.
Node Address
(00-63)
Sets most
significant digit
2
4
Sets least
significant digit
0
0
PGM
2
4
6
8
6
The valid MAC ID switch positions are 0 to 63. Use the switch on the left to set the most significant digit
(MSD), that is, the factor of ten (10, 20, 30...60). Use the switch on the right to set the least significant digit
(LSD), that is, the increments of one (1, 2, 3...9). The switch positions are numbered in a clockwise direction,
to correspond to the increasing address values.
Note
Setting the switches to a value that is greater than 63 is the same as setting the rotary switch to
the “PGM” position (the baud rate is read from the non-volatile memory).
Note
The MAC ID switch on the top of the device must be set to the network (PGM) position before
power up in order for changes to be made over the network. Any changes in the rotary switch
positions after power up are ignored.
26
Installation Procedure
Chapter Two: Installation and Configuration
Mounting Hardware
MFCs with in-line fittings (VCR) have six threaded mounting holes located on the bottom or base of the unit:
four #8-32 and two M4. Depending on the hole pattern chosen, use #8-32 UNC-2B or M4 hardware to mount
the instrument. The figures beginning on page 18 show the location and dimensions of the mounting holes for
standard axial fittings.
The C-Seal and W-Seal downmount fittings are designed for device mounting using four M5-0.8 x 30 mm
long socket head cap screws. In addition, C-Seal units may be mounted using 10-32 UNF x 1.25” long socket
head cap screws if your mounting substrate requires.
Gas Flow
The control valve is not a positive shutoff valve. Some leakage across the valve may occur. Refer to
Appendix A, Product Specifications, page 63, for the leak integrity specifications. If necessary, install a
separate positive shutoff valve in your system.
Note
Connect the MFC to your system so that the gas flows in the direction of the flow arrow on the
front of the unit.
Installation Procedure
Install the MFC
Note
DO NOT make any electrical connections to the MFC until directed to do so.
1. The MFC is prepared for cleanroom installation.
Follow standard cleanroom practices to ensure a clean installation:
- discard outer material outside of the cleanroom
- remove the outer packaging in the gray area
-
carry the MFC into the clean area then remove the inner bag and any protective fitting covers just
prior to installation. Remove plastic ethernet kit from inner plastic and DO NOT take them into clean
room.
-
Do not discard calibration sheet
2. Prepare the system according to your facility’s gas handling procedures, including purging of the gas lines
with appropriate purge gas, and notification to equipment personnel and haz/mat teams.
PERSONAL
SAFETY
HAZARDS!
Gas systems can contain toxic, explosive, combustible, corrosive or other gases which
can present life- threatening hazards. ALWAYS use appropriate personal protection
equipment. NEVER open a gas line unless the system has been properly purged of
harmful gases. Certain gas system components may contain hazardous residuals if not
properly prepared. Consult with your facility safety engineers prior to working on any gas
delivery system and notify all personnel in adjacent areas to take appropriate personal
safety precautions BEFORE working on the equipment.
27
Chapter Two: Installation and Configuration
Installation Procedure
3. Prepare the connections fittings:
• Flow clean, dry purge gas across the fittings to minimize particle contamination during installation.
Use only purge gases that are approved for your process.
• Install the MFC and secure according to the fitting manufacturer’s instructions. DO NOT overtighten
connections.
4. Before powering the device, for DeviceNet MFCs:
Set the baud rate for
communications: PGM
(the baud rate is read from
the non-volatile memory),
125, 250, or 500 Kb
(factory default is 500 Kb)
Set the DeviceNet Address:
The address is read on power
up, so it must be set prior to
applying power to the system.
(factory default is 55)
-
5. Verify the power and signal pinouts for the cable leading to the MFC:
For DeviceNet, confirm connections to:
1 = Drain, 2 = V+, 3 = V-, 4 = Can_H, 5 = Can_L
When using Ethernet interface for setup, a crossover cable(similar to null modem) is required when
the πMFC is connected directly to a PC. When the πMFC is on a network with a hub interface, a
standard Ethernet cable should be used.
6. Power up the MFC, then record the IP address, Gas Type and Maximum Flow Rate (Full Scale
Flow Rate) on the calibration sheet.
Note: The MFC’s scrolling display shows the IP address, the Gas Type, and the Maximum Flow
IP Address/
Gas Type/Full Scale
PSIA
KPA
Pressure
Gas Flow Rate
MFC Te mp.
Rate. Press down on the multi-function display to toggle through the various displays.
7. Perform appropriate helium leak checking of your gas lines and πMFC connections to verify the
integrity of the gas seals. You will need to open all pneumatic and pressure control valves including
setting the MFC to 100% flow.
28
Chapter Three: Ethernet Interface Setup, Diagnostics and Configuration
Chapter Three: Ethernet Interface Setup, Diagnostics and Configuration
The Ethernet interface is a supplemental feature that can be used for setup, configuration, and diagnostics. It
is not used to control the πMFC. To access the diagnostic features of the πMFC via the Ethernet port, follow
Step 1 and 2.
Step 1: Install the Java™ Plugin (for single IP address)
The πMFC interface software uses Internet Explorer interface which requires a Java Technology plug-in to
display real-time data plots. If you are installing the πMFC on a network that has web access, AND you are
setting up multiple IP addresses (see “
Option 3: For Multiple IP address setup” on page 36), then you can skip the steps below and access
the web for download at the completion of the Multiple IP address setup procedure. OTHERWISE perform
the following steps:
1. Download the following (2) files from the MKS website (www.mksinst.com/MDsw.html).
The MKS download includes an installation script to properly load the plug-in:
ƒ
Java installer: jinstaller.exe
ƒ
Installation script: InstallPlot.bat
2. Copy the installer and script file to your hard drive, then double-click on the InstallPlot.bat file.
This file connects to the Sun Microsystems download site according to the following command:
ƒ
jinstall.exe http://java.sun.com/update/1.4.2/1.4.2-b28.xm
3. Follow the onscreen prompts to install the Java application.
4. Read the license agreement, select “I accept...”, click “Next” to continue installation.
29
Chapter Three: Ethernet Interface Setup, Diagnostics and Configuration
5. Select the “Typical” installation option and follow the prompts to install the Java plugin.
6. Java plug-in is now complete.
Step 2: Verify the πMFC Configuration
Option 1: Network Automatic Setup
A software script allows you to rapidly create a network connection to the πMFC. Once connected a series of
web- browser type windows allow you to easily monitor and configure the πMFC.
1. Logon to the MKS website and download a copy of the IP setup script, HostIP.cmd.
2. Copy the setup script HostIP.cmd to your C:\ directory. (Use Windows Explorer or similar program.)
3. Connect a crossover network cable to the πMFC and your laptop computer. A crossover cable is
required when the πMFC is connected directly to a PC. When the πMFC is connected to a network using
a hub interface, a standard Ethernet cable can be used.
4. Select “start” “Run..” then enter the word “command” and click OK.
30
Chapter Three: Ethernet Interface Setup, Diagnostics and Configuration
5. At the command prompt, enter the command “C:” or
“CD \” then press Enter. This will bring you to the C:\> prompt.
6. Enter the command “HostIP xx.xx.xx.xx” where the x’s stand for the IP address of your Host PC, then
press Enter. (Note, the first 2 digits have to be exactly the same as the first 2 digits of the πMFC.) The
system will setup a new host IP address and display it
as shown in the example below:
To restore to a dynamic IP address, run the HostIP script with an argument of "auto". “HostIP auto".
7. After running the HostIP command, launch Internet
Explorer, enter "http://xx.xx.xx.xx" in the address field, where
xx.xx.xx.xx stands for the IP address of the πMFC you wish to connect to, then click "Go." Internet
Explorer will open and display the device Monitor screen which displays the device’s Gas Settings
including gas type and scale.
8. Click on a tab at the top of the window to access more advanced features including:
ƒ
ƒ
ƒ
ƒ
ƒ
Plot Screen
Diagnostics Screen
Configuration Screen
Device Screen
DeviceNet Setting Screen
(where applicable, for configuration use only)
31
Chapter Three: Ethernet Interface Setup, Diagnostics and Configuration
Plot Screen
Other screens and their main features are summarized on the following pages.
Diagnostics Screen
The Diagnostics Screen provides a rapid, in-situ diagnostics capability. Click “Run the test” to run basic flow,
pressure, temperature and EEPRom tests.
Configuration Screen
Firmware version and IP address information is displayed on the Configuration Screen. Enter the system
password to change configuration settings. Factory-shipped password is “config.”
32
Chapter Three: Ethernet Interface Setup, Diagnostics and Configuration
Configuration Programming Screen
ƒ
From this screen, you can
ƒ
configure the IP Address,
ƒ
“zero” the device
ƒ
upload new firmware or files
ƒ
change the configuration password
DNet Settings Screen (configuration mode only)
From this screen, you can view the DeviceNet settings for the device.
Option 2: Manual Setup
If you have not setup automatic network script in Option 1, a manual setup is required to access the
Ethernet interface.
1. Connect a crossover network cable to the πMFC and your laptop computer.
A crossover cable is required when the πMFC is connected directly to a PC. When the πMFC is
connected to a network using a hub interface, a standard Ethernet cable can be used.
2. Select My Network Places.
33
MFC
Chapter Three: Ethernet Interface Setup, Diagnostics and Configuration
3. Select View Network Connections.
4. Double-click on Local Area Connection.
5. Select Properties
.
6. Select Internet Protocol (TCP/IP), then select Properties.
34
Chapter Three: Ethernet Interface Setup, Diagnostics and Configuration
7. Select Use the following IP address.
8. Enter the IP address from the πMFC, but change the last two digits to provide a unique address. For
example, if the πMFC address is 192.168.2.68, enter 192.168.2.10.
1. Click on the Subnet mask. The numbers 255.255.255.0 will appear.
2. Close out all dialog boxes by selecting O.K., Close, etc. as required.
3. Launch Internet Explorer and enter the IP address for the πMFC.
35
Chapter Three: Ethernet Interface Setup, Diagnostics and Configuration
Option 3: For Multiple IP address setup
1. Select “start” “Run..” then enter the word “command” and click OK.
2. At the command prompt, enter the command “ipconfig /all” then press Enter.
The data inside the hilighted area (lower section, between IP Address and Primary WINS
Server) are what is needed for the steps below.
3. Open the Local Area Connection by going to Start->Settings->Network and Dialup Connections->Local
Area Connections, or see Manual Setup on page 33 for an alternative method to open the Local Area
Connection.
36
Chapter Three: Ethernet Interface Setup, Diagnostics and Configuration
4. Click Properties button and select Internet Protocol (TCP/IP).
37
Chapter Three: Ethernet Interface Setup, Diagnostics and Configuration
5. Click the Properties button:
•
•
Select “Use the following IP address:”
Type in the IP address, the Subnet mask and the Default gateway fields with values returned from the
“ipconfig /all” query in the DOS command window.
• Select “Use the following DNS server addresses:”
• Type in the Preferred DNS server, the Alternate DNS server fields with values returned from the
“ipconfig /all” query in the DOS command window. An example is shown below.
6. Click the “Advanced …” button, the following window will be displayed:
38
Chapter Three: Ethernet Interface Setup, Diagnostics and Configuration
7. Click “Add…” in the “IP addresses” group.
• Type the IP address and the Subnet mask values you will use to connect to the πMFC then click the
“Add” button.
8. Click “Add…” in the “Default gateways” group. Enter the Gateway value you will use to connect to the
πMFC, then click the “Add” button.
9. More addresses can be added by repeating steps 7 and 8 above.
10. Click the “WINS” tab.
39
Chapter Three: Ethernet Interface Setup, Diagnostics and Configuration
11. Click “Add…”. Type in the WINS server address with the values returned from the “ipconfig /all” query
in the DOS command window, then click “Add.”
Example is shown below:
12. Click all OK buttons and you are ready to have multiple IP addresses in your PC. You can connect both to
the Internet and to your πMFC local network.
For the plot web page to work in the πMFC, a java plugin has to be installed. With the multiple IP addresses
setup in your PC, if the java plugin has NOT been installed in your PC, the IE browser will automatically
connect to the right web site for the downloading.
40
Chapter Four: Overview
Chapter Four: Overview
General Information
Typical Control System Configuration
The πMFC is used in a wide variety of control systems, most of which share several characteristics. The
control system consists of five basic parts:
„
„
Mass flow transducer
Pressure transducer
Control electronics
Control valve
„
Flow system (whose flow is being controlled by the πMFC DeviceNet Mass Flow Controller)
„
„
The πMFC provides the first four components. The mass flow transducer is an MKS design. The Pressure
transducer is used to measure pressure inside the MFC. The πMFC instrument contains the electronics
necessary for flow control. The control valve included in the device is a proportional control valve. The flow
system can be any process whose flow you need to control. In addition, the πMFC is capable of metering the
mass flow of the gas during the flow control operation.
Flow Measurement Overview
The πMFC measures the mass flow rate of a gas and controls the flow rate according to a given setpoint. The
accuracy from 10% to 100% of Full Scale (F.S.) is ± 1% of Reading. For setpoints between 2% and 10%,
πMFC Mass Flow Devices have an accuracy of ±0.2% FS.
Flow Path
Upon entering the πMFC, the gas stream passes first through the metering section of the instrument for its
mass flow to be measured. The gas moves on through the control valve, which regulates the flow rate
according to the given setpoint, and then exits the instrument at the established rate of flow.
The metering section consists of one of the following:
„
A sensor tube for Full Scale ranges < 10 sccm (N2 equivalent)
„
A sensor tube and parallel bypass for ranges > 10 sccm (N2 equivalent)
The geometry of the sensor tube, in conjunction with the specified full scale flow rate, ensures fully
developed laminar flow in the sensing region. The bypass elements are specifically matched to the
characteristics of the sensor tube to achieve a laminar flow splitting ratio which remains constant throughout
each range.
Flow Control Range
The πMFC can control flow over a range of 2 to 100% of full scale flow. This means that a πMFC with a
1000 sccm configuration can control flow from 20 to 1000 sccm, whereas an instrument with a 100 sccm
configuration can control flow from 2 to 100 sccm.
41
Chapter Four: Overview
Measurement Technique
The flow measurement is based on differential heat transfer between temperature sensing heater elements
which are attached to the sensor tube. This senses the thermal mass movement which is converted to mass
flow via the specific heat, Cp, of the gas.
Control Circuitry
The controller employs the above measurement technique and utilizes a control circuit that provides drive
current for the proportioning control valve. The flow controller accepts a setpoint signal, compares it to its
own flow signal, and generates an error voltage. This error signal is then conditioned so that it can reposition
the control valve, thus reducing the control error to zero.
In the normally closed control valve, the πMFC instrument lifts the armature and plug assembly from the
seat to regulate the gas flow rate.
Control Valve
The control valve is a specially constructed solenoid valve in which the armature (moving valve mechanism)
is suspended. The arrangement ensures that no friction is present and makes precise control possible.
How the πMFC Works
The MKS πMFC includes technology improvements in functionality and performance to help users in
semiconductors increase tool throughput and reduce overall system costs. Real-time accurate flow control that
is insensitive to upstream and downstream pressure disturbances is provided through advanced digital
algorithms. Enabling real-time control of process gas flow, accuracy and repeatability are significantly
improved over conventional PID based digital MFC’s.
The πMFC compares the flow reading to the setpoint, and positions the valve to maintain, or achieve, the
setpoint rate. The controller functions as a model based, pressure insensitive flow controller.
Example
Assume that your πMFC is positioned upstream of the process chamber. The πMFC is positioned before the
chamber so it will regulate the flow rate of the gas entering the process chamber.
When the actual flow rate reading is less than the setpoint value, the πMFC opens the valve to increase the
amount of gas entering the system. As the valve opens, assuming adequate differential pressure across the
flow controller, gas enters the process chamber, so the flow rate rises to meet the setpoint value.
When the actual flow rate reading is more than the setpoint value, the πMFC closes the valve to decrease the
amount of gas entering the system. As the valve closes, there is a reduced flow of gas entering the process
chamber, so the flow rate decreases to meet the setpoint value.
Note
The πMFC must have sufficient pressure on its inlet side to achieve the setpoint.
42
Chapter Four: Overview
Operation of the πMFC with Gases other than Nitrogen
The πMFC is unique in MKS flow control technology in that it does not use gas correction factors as other
Mass Flow Controllers do. The operation of the πMFC is based on thermodynamic principals and multicomponent functions have been developed to accurately calculate the non-linear gas flow of non-calibration
gases, with respect to the calibration gas. The current library of gases and functions is in excess of 40 in
number and includes most gases in common usage.
When a gas other than the calibration is selected, the πMFC automatically pulls up the correct functions that
calculate the flow of that gas with respect to the original calibration. This allows the MFC to report the gas
flow for the gas in use immediately and with better accuracy than has previously been available. In
comparison, the typical MFCs use Gas Correction factors for converting the calibration gas flow into the flow
of the gas being used. This leads to inaccuracy in the flow reported to levels as high as 6-10% (of FS).
The πMFC, by using these functions for the various gases, actually reports the flow within the stated accuracy
of the flow controller, but for non-calibration gases. The reported flow from a πMFC using Helium as the
process gas, but not calibrated for Helium, will have the same accuracy for the Helium as it does for Nitrogen,
the calibration gas. Traditional flow controllers and meters using a Gas Correction Factor for Helium
typically have an error in the flow output of as much as 6% of FS.
Versions of the πMFC
The πMFC is available in four communications versions: the 9 Pin D analog communications
version, the 15 Pin D analog communications version, DeviceNet digital communications version,
and the RS-485 version using a 9 pin D connector. Both the 9 and 15 pin D versions accept analog,
0-5 VDC setpoint and output signals. The DeviceNat version uses only DeviceNet digital
communications for routine control.
9 Pin D Connector (Analog Interface)
Pin 1
Valve Open/Close
Pin 2
Flow Output Signal, 0-5 VDC
Pin 3
+11 to +25 VDC :Power
Pin 4
Power Common
Pin 5
No Connection
Pin 6
Setpoint Input, 0-5 VDC
Pin 7
Signal Common
Pin 8
Signal Common
Pin 9
Valve Test Point
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Chapter Four: Overview
Notes:
1. Chassis ground is not available on a separate pin. Instead, it is carried out through the cable shielding. Be
sure that the connector on the other end of the cable is properly grounded to its chassis ground.
2. The 0 to 5 VDC flow signal output comes from pin 2 and is referenced to pin 7 (signal common).
3. Use any appropriate 0 to 5 VDC input signal of less than 1K ohm source impedance referenced to pin 7 as
the setpoint signal to pin 6.
15 Pin D Connector (Analog Interface)
Connector Pinout – Standard Assignments (Model Code B)
Pin Assignment 24 VDC Power Option
Pin 1
Valve Test Point
Pin 2
Flow Signal Output, (0 to +5 VDC)
Pin 3
Valve Close (TTL low)
Pin 4
Valve Open (TTL low)
Pin 5
Power Supply Common Digital Ground (see Note 4 below)
Pin 6
No Connection
Pin 7
+11 to +25 VDC (see Note 4 below)
Pin 8
Setpoint Input (0 to +5 VDC)
Pin 9
Zero Function
Pin 10
Optional Input
Pin 11
Signal Common
Pin 12
Signal Common
Pin 13
No Connection
Pin 14
Pressure Output, (0 to VDC)
Pin 15
Chassis Ground
Notes
1. The No Connection pin assignment refers to a pin with no internal connection.
2. The 0 to 5 VDC flow signal output comes from pin 2 and is referenced to pin 12 (signal common).
3. Any appropriate 0 to 5 VDC input signal of less than 1K ohm source impedance referenced to pin 12 can
be used to supply a setpoint signal to pin 8.
44
Chapter Four: Overview
9 Pin D Connector, RS-485 Communications
Model Code 5, Voltage and Current Pressure Output
Pin 1
Pressure Output, +Voltage or Current
Pin 2
Pressure Output, Voltage or Current Return
Pin 3
+ 11 to 25 VDC Power In
Pin 4
Power Return
Pin 5
Pin 6
RS-485 Return
Pin 7
RS-485 +
Pin 8
RS-485 -
Pin 9
Shield
Interface Cables
As of January 1, 1996, all products shipped to the European Community must comply with the EMC Directive
89/336/EEC, which covers radio frequency emissions and immunity tests. MKS products that meet these
requirements are identified by application of the CE Mark.
This MKS product meets CE Mark requirements, per EMC Directive 89/336/EEC. To ensure compliance
when installed, an overall metal braided shielded cable, properly grounded at both ends, is required during
use. MKS offers a variety of interface cables, listed in Table 12, page 27.
Note
An overall metal braided, shielded cable, properly grounded at both ends, is required to meet
CE Mark specifications.
To order an overall metal, braided, shielded cable, add an S. after the cable type designation. For example, to
order a standard connection cable to connect the 1480/1485 MFC to a power supply with a 15-pin Type D.
connector, use part number CB259-5; for an overall metal braided, shielded cable use part number CB259S-5.
MKS Interface Cables
Power Supply End
MFC End
15-Pin Type “D”
Flying Leads
15-pin Type .D.
CB147-1
CB259-6
CB259-5
9-pin Type .D.
CB147-12
Not Available
45
Chapter Four: Overview
Generic Shielded Cable Description
MKS offers a full line of cables for all MKS equipment. Should you choose to manufacture your own cables,
follow the guidelines listed below:
1. The cable must have an overall metal braided shield, covering all wires. Neither aluminum foil nor spiral
shielding will be as effective; using either may nullify regulatory compliance.
2. The connectors must have a metal case with direct contact to the cable shield on the whole circumference
of the cable. The inductance of a flying lead or wire from the shield to the connector will seriously
degrade the shield.s effectiveness. Ground the shield to the connector before its internal wires exit.
3. With very few exceptions, the connector(s) must make good contact to the devices case (ground). Good
contact. is about 0.01 ohms and the ground should surround all wires. Contact to ground at just one point
may not suffice.
4. For shielded cables with flying leads at one or both ends; it is important to ground the shield at each such
end before the wires exit. Make this ground with absolute minimum length. (A ¼ inch piece of #22 wire
may be undesirably long since it has approximately 5 nH of inductance, equivalent to 31 ohms at 1000
MHz). After picking up the braid ground, keep wires and braid flat against the case. With very few
exceptions, grounded metal covers are not required over terminal strips. If one is required, it will be stated
in the Declaration of Conformity.
5. In selecting the appropriate type and wire size for cables, consider:
ƒ
Voltage ratings.
ƒ
Cumulative I2R heating of all the conductors (keep them safely cool).
ƒ
IR drop of the conductors, so that adequate power or signal voltage gets to the device.
ƒ
Capacitance and inductance of cables that handle fast signals (such as data lines or stepper motor drive
cables).
ƒ
Some cables may need internal shielding from specific wires to others.
Start-Up Procedure for the Analog πMFC
1. Leak test the fittings on the unit using standard helium leak check procedures. Do not proceed to the next
step until you are certain that there is no gas leakage.
2. Plug the power supply/readout cable (MKS or customer-supplied) into the connector (either a 9-pin or 15pin D. type) located at the top of the device. Plug the other end of the cable into an MKS or MKScompatible power supply/readout unit.
3. Apply power to the device.
Once the device is sufficiently warmed-up, you can proceed to zero it. See instructions in Section 5.
Warm Up Time
After installation and power up, allow the MKS πMFC to warm up for a minimum of 30 minutes.
46
Chapter Four: Overview
Zeroing Procedure
Although MKS flow devices are zeroed at the factory prior to shipment, it is normal to check the zero and rezero them, if needed, when they are first installed on the tool.
A mass flow meter or mass flow device will provide a zero output signal under no flow gas conditions.
Zero offset from improper zeroing procedures can contribute to flow measurement inaccuracy. This is more
apparent at the lower end of the device range.
In order to complete a true zeroing of the device, ensure the following conditions are satisfied prior to
beginning the procedure.
ƒ
Device is installed in the orientation intended for final use (i.e. horizontal base down, vertical flow up,
etc.).
ƒ
Device is powered at operating temperature, preferably for 30 or more minutes.
ƒ
Devices subject to ambient temperatures other than room temperature (23º C) should be zeroed under
those conditions.
ƒ
Pressure drop and flow across the device is reduced to zero. Depending on the gas panel configuration,
this may be done by one of the referenced procedures. See Chapter 5 Maintenance for zeroing procedures.
How To Override the Valve (Controllers Only)
The valve override feature enables the control valve to be fully opened (purged) or closed independent of the
setpoint command signal.
If the πMFC is equipped with a 9-pin Type D connector:
To Open the valve, apply a TTL High to Pin 1. To Close the valve, apply a TTL Low to Pin 1 or connect Pin
1 to Signal Ground. Normal Setpoint operation occurs when Pin 1 is allowed to float.
If the πMFC is equipped with a 15-pin Type D connector:
Open the valve by applying a TTL low to pin 4 or connect pin 4 to signal ground (pins 11 or 12).
Override a setpoint to the controller and close the valve by applying a TTL low to pin 3 or connect pin 3 to
signal ground (pins 11 or 12).
Note
To control with a TTL signal, use a tri-stated device.
Priority of the Commands
The πMFC executes commands based on a hierarchical command structure. The highest priority command is
Valve Open, followed by Valve Close, and Setpoint Control. Therefore, if the flow controller is operating
under Setpoint Control, you can send a Valve Open command to force the valve to the full open position.
Note
When both the Valve Close and Valve Open pins are pulled down, the Valve Open
command takes precedence and the valve is moved to the open position.
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Chapter Four: Overview
The Optional Input (Controllers Only)
The standard 15-pin πMFC can control flow based on a 0 to 5 Volt signal from an external sensing device
using the optional input feature (for a 0 to 10 Volt input range, contact the MKS Applications Department). A
common application of this feature is for pressure control using input from a pressure transducer.
To use the optional input feature, route the 0-5 Volt output from the desired external device to the optional
input pin 10.
Note
The 9-pin Type .D. connector does not support the optional input feature. This feature is
only available on the 15-pin Type D connector with standard MKS pinout assignments
Voltage applied to the optional input pin overrides the signal generated by the flow sensor internal to the
πMFC. The control electronics drives the valve so that the optional input signal matches the setpoint. Use the
same pin for the setpoint signal, regardless of whether you are using the optional input or the standard flow
control signal.
Although controlling to the external optional input signal, the metered flow output signal is still provided on
the standard output pin 2.
Overview of πMFC DeviceNet Digital Operation
Your πMFC DeviceNet Mass Flow Device complies with Volume 1 of the ODVA DeviceNet Specification,
Release 2 and the associated SEMI-SIG requirements. A detailed software attribute summary pertaining to the
DeviceNet communications is provided in the πMFC DeviceNet, Instruction manual.
DeviceNet Connector
The πMFC has one 5-pin, male DeviceNet connector that provides the communications interface with the
DeviceNet network, electrical power from the network bus, and shielding for the instrument signals.
Table 8: DeviceNet Communications Connector Pinout
Pin Number
Signal Name
1
2
3
4
5
Drain
V+
VCAN_H
CAN_L
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Chapter Four: Overview
Figure 13: DeviceNet Connector Pin Diagram
Power Requirements
The πMFC requires an input voltage of 11.0 to 25.0 VDC with <500 mA max @ 11 VDC (230 mA @ 24
VDC, nominal). The input voltage, provided by the DeviceNet network, is introduced to the mass flow
controller through the 5-pin micro-style connector located on side of the instrument.
DeviceNet Controls and Indicators
The top panel of the πMFC contains several DeviceNet controls and indicators.
The mass flow device has two standard bi-color (green/red) DeviceNet status LEDs, (Module Status LED and
Network Status LED) located on top of the instrument The power-up sequence of these LEDs conforms to the
requirements in the ODVA DeviceNet Specification, Volume 1 [1].
Unrecoverable Fault Condition
A hardware problem with the EEPROM, or a memory problem with the RAM are major unrecoverable faults.
This fault condition sets its exception status bit, and the Module Status LED illuminates solid red, complying
with Volume I of the DeviceNet Specification.
Note
A major unrecoverable fault prevents operation because the device cannot communicate on the
network. Contact MKS Instruments, Inc. for assistance.
Power Up
At power-up, flow device performs checks on its communications link and internal diagnostic checks of the
EEPROM and RAM. The results of these checks are indicated by the color (green or red) and condition (solid
or flashing) of the status LEDs on top of the instrument. The following LED sequence occurs when the MFC
is powered up (times are approximate):
1. The Module Status LED flashes first GREEN for ¼ second, then RED for ¼ second, then turns OFF.
2. The Network Status LED flashes first GREEN for ¼ second, then RED for ¼ second, then turns OFF.
3. The Module Status LED flashes from GREEN to RED for five seconds while the device is initializing.
The Network Status LED remains OFF.
49
Chapter Four: Overview
4. The Module Status LED illuminates solid GREEN when initialization is complete.
5. When the device establishes communication with other devices on the network, the Network Status LED
illuminates GREEN.
Note
If the power up LED sequence does not function properly, contact MKS for assistance.
See DeviceNet Controls and Indicators, page 49, for more information on the operation of the
Network Status LED and the Module Status LED.
Warm-Up and Zero the MFC
After installation and power up, allow the MFC to warm up for a minimum of 30 minutes, then refer to the
installation section to Zero the MFC.
DeviceNet Protocol
Use this manual with the ODVA DeviceNet Specification Volume I and Volume II [1, 2], and the SEMI
Standards Common and Specific Device Models [3, 4]. Refer to those documents for a complete functional
description of the MFC Mass Flow device.
See πMFC DeviceNet Manual, MKS part number 127923-P1 for specific commands and command
structures.
50
Chapter Five: Maintenance
Chapter Five: Maintenance
General Information
In general, no maintenance is required other than proper installation and operation. Periodically check for
wear on the cables and inspect the enclosure for visible signs of damage. If a mass flow device fails to operate
properly on receipt, check for shipping damage, and check the DeviceNet cable for proper power supply. Any
damage should be reported to the freight carrier and MKS Instruments immediately. If there is no obvious
damage, and the unit fails to operate properly through the DeviceNet network, obtain an RMA Number
(Return Material Authorization Number) before returning the unit to MKS Instruments for service to expedite
handling and ensure proper servicing of your instrument.
Zero Adjustment
For best accuracy and repeatability, you should check the zero output periodically and reset it, if necessary.
Refer to the zero adjustment procedure below.
It is also recommended that the instrument be recalibrated annually if no other time interval has been
specifically established. Refer to the inside of the back cover of this instruction manual for a complete list of
MKS Calibration and Service Centers.
“Zero” the πMFC(flow only)
All MFCs should be zeroed under actual installation conditions prior to use. Very slight offsets in
the zero condition can contribute to flow measurement inaccuracy, especially noticed at the lower
end of the device range.
1. Setup the MFC to the exact process conditions:
ƒ Verify that the MFC is installed in the final equipment and orientation (base up, base down, vertical
flow up, etc.)
ƒ Verify that the MFC is powered at operating temperature for at least 30 minutes.
ƒ If the MFC will be subjected to elevated ambient temperature conditions, verify that these temperatures
have been achieved before continuing.
ƒ Verify that the pressure drop across the MFC is reduced to zero. Depending on the gas panel
configuration, this may be done by one of the following procedures.
A) System has upstream and downstream positive shut off valves
1. Close the upstream valve.
2. Close the downstream valve.
3. Set the MFC to 100% set point.
4. Allow pressure across MFC to equilibrate as flow output approaches zero and stabilizes.
5. To ensure that actual flow remains at zero, keep downstream shut-off valve closed and provide zero
setpoint to the MFC.
6. Wait one minute and adjust zero through the software interface. See DeviceNet commands below.
B) For systems with downstream valve only
1. Zero the MFC at typical operating inlet pressure.
2. Close the downstream valve.
3. Set the MFC to 100% set point.
4. Allow pressure to equilibrate across the MFC as flow output approaches zero and stabilizes.
Provide zero setpoint to the MFC.
5. Wait one minute and adjust zero through the software interface. See DeviceNet commands below.
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Chapter Five: Maintenance
C) For systems with upstream valve only
1. MFC may be re-zeroed with downstream line under vacuum or atmosphere.
2. Close the upstream valve.
3. Set the MFC to 100% set point.
4. The MFC may be evacuated to vacuum or exposed to atmosphere on downstream side. For either
case, the downstream pressure must be kept constant to insure there is no pressure drop across MFC.
5. Allow pressure to equilibrate across MFC as flow output approaches zero and stabilizes.
6. Provide zero setpoint to the MFC.
7. Wait one minute and adjust zero through the software interface. See DeviceNet commands below.
Analog Zeroing Procedure
Although MKS flow devices are zeroed at the factory prior to shipment, it is normal to check the zero and rezero them, if needed, when they are first installed on the tool.
A mass flow meter or mass flow device will provide a zero output signal under “no flow” gas conditions.
Zero offset from improper zeroing procedures can contribute to flow measurement inaccuracy. This is more
apparent at the lower end of the device range.
In order to complete a true zeroing of the device, ensure the following conditions are satisfied prior to
beginning the procedure.
1. Device is installed in the orientation intended for final use (i.e. horizontal base down, vertical flow up,
etc.).
2. Device is powered at operating temperature, preferably for 30 or more minutes.
3. Devices subject to ambient temperatures other than room temperature (23º C) should be zeroed under
those conditions.
4. Pressure drop and flow across the device is reduced to zero. Depending on the gas panel configuration,
this may be done by one of the following procedures.
For Systems With Upstream and Downstream Positive Shut-Off Valves
1. Close both the upstream and downstream shut-off valves.
2. Set the device to 100% setpoint (controllers only).
3. Allow pressure across the device to equilibrate as flow output approaches zero and stabilizes.
4. To ensure that actual flow remains at zero, keep the shut-off valves closed. To the controllers, provide
zero setpoint.
5. Wait one minute and activate the zero function. The zero function may be activated in three different
ways:
ƒ Pressing the Zero button on top of the unit.
ƒ Communicating digitally through the software GUI by clicking the Remote Zero button on the
configuration page, (Password is required).
ƒ “15-pin D” connector option only: Remotely grounding pin 9 to pin 5.
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Chapter Five: Maintenance
For Systems With Downstream Valve Only
1. Zero the device at typical operating inlet pressure.
2. Close the downstream shut-off valve.
3. Set the device to 100% setpoint (controllers only).
4. Allow pressure to equilibrate across the device as flow output approaches zero and stabilizes.
5. Provide zero setpoint to the device (controllers only).
6. Wait one minute and activate the zero function. The zero function may be activated in three different
ways:
ƒ Pressing the Zero button on top of the unit.
ƒ Communicating digitally through the software GUI by clicking the Remote Zero button on the
configuration page, (Password is required).
ƒ “15-pin D” connector option only: Remotely grounding pin 9 to pin 5.
For systems With Upstream Valve Only
1) The device may be re-zeroed with the downstream line under vacuum or atmosphere.
2) Close the upstream valve.
3) Set the device to 100% setpoint (controllers only).
4) The device may be evacuated to vacuum or exposed to atmosphere on the downstream side.
5) For either case, the downstream pressure must be kept constant to ensure there are no fluctuations in
pressure drop across the device, which could induce false flow readings.
6) Allow pressure to equilibrate across the Mass Flow Controller as flow output approaches zero and
stabilizes.
7) Provide zero setpoint to the device (controllers only).
8) Wait one minute and activate the zero function. The zero function may be activated in three different
ways:
ƒ Pressing the Zero button on top of the unit.
ƒ Communicating digitally through the software GUI by clicking the Remote Zero button on the
configuration page, (Password is required).
ƒ “15-pin D” connector option only: Remotely grounding pin 9 to pin 5.
DeviceNet Zeroing Commands
The MFC must be in the executing state then send the zero service with a target value of zero. The following
assumes explicit messaging only using the DeviceNet communication protocol.
1. Place the device in the Executing State through the S-Device Supervisor Object: Note the response Status:
Success
The following DeviceNet Command places the device in an executing state
Service 0x06, Class 0x30, Instance 1
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Chapter Five: Maintenance
2. Verify you are in executing through the S-Device Supervisor Object: Note the response Data (hex): 04
means we are in executing. Attribute 0x0B The following DeviceNet Command is used to verify you are
in executing.
Service 0xE, Class 0x30, Instance 1, Service Data (attribute) 0x0B
You should get response data of 0x04
3. Send the Zero Adjust Service using S-Analog Sensor Object Instance 1 ( Flow )The following DeviceNet
Command Starts the Pressure zero.
Service 0x4B, Class 0x31, Instance 1, Service Data (Target Value) can be Empty Data or Data Type
based value, i.e. 2 byte for integer or 4 byte real value, if a value is used, it must be a target value equal
to zero.
4. The Flow zeroing procedure usually takes several seconds to perform. Recheck your flow to verify zero
has occurred. You can also perform an explicit GET(Service 0x0E) on Class 0x31, Instance 1, Attribute
0x1C, which is the Autozero Status. This attribute’s service data will equal “1” while zeroing is in
progress and equal “0” when the zeroing has completed. It is most important that the device is at a zero
flow, if a high flow is detected by the MFC, then zeroing will not occur.
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Chapter Five: Maintenance
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55
Chapter Six: Troubleshooting
Chapter Six: Troubleshooting
Troubleshooting Chart
Table 9: Troubleshooting Chart
Symptom
PiMFC display does not
light
Possible Cause
Check/Corrective Action
No power
Check power source
Low power
Measure voltage 11-25 VDC (DNet)
Wrong cable
MFC does not respond to
any setpoint
PiMFC display shows 0
pressure
Bad cable connection
Check pin(s) continuity
Bad DNet connection
Verify correct DNet I/O instance
Control circuit failure
Provide setpoint, gas & pressure to
device, run diagnostic using Ethernet
interface.
Low or no power
Check power source, measure voltage
Contamination/Clogged - blocked
MFC device or gas line
Check inlet pressure @ PiMFC. Check
outlet pressure MFC using pressure
gauge. Check outlet pressure
downstream of positive shut off
(pneumatic) valve downstream of MFC.
Check air line to pneumatic valve.
Check for any restriction such as filter or
check valve downstream of MFC.
Closed upstream pneumatic valve
Open valve
Closed or faulty regulator
Check regulator for proper operations
Upstream clog filter
Measure pressure drop across filter to
spec, replace if necessary
No gas supply
Turn on gas source
PiMFC fault pressure transducer
output
Run PiMFC diagnostics
56
Chapter Six: Troubleshooting
PiMFC shows 0 flow when
given setpoint
Downstream valves open to
vacuum, upstream valves closed
Check status of pneumatic valves air
lines & solenoid valves & system pump
Closed upstream or downstream
pneumatic valves
Open valves, check inlet pressure
No gas supply
Turn on gas supply
Upstream clogged filter/component Check flow through of components by
measuring pressure drop across device
PiMFC clogged orifice
Verify MFC inlet pressure, check valve
current for open valve condition. Check
for gas flow downstream of MFC - If
flow does not exist, possible clogged
orifice
PiMFC clogged sensor
Run PiMFC diagnostics. Verify MFC
inlet pressure, check valve current for
open valve condition, check for gas flow
downstream of MFC. If flow present,
possible clogged sensor
PiMFC control circuit failure
Run PiMFC diagnostics. If error results,
contact MKS service center.
PiMFC shows output flow > MFC valve full open
FS (overrange)
PiMFC output signal does
not match setpoint
Check valve current for maximum
condition
Pressure drop across MFC>
specification
Measure upstream pressure &
downstream pressure. Compare to spec.
Faulty valve control
circuit/calibration
Run PiMFC diagnostics using Ethernet
GUI
Possible contamination in valve
assembly
Cycle-purge MFC to clear suspected
contamination
Contamination
Check for partial block orifice or sensor.
Cycle purge MFC to clear contaminant
Inlet pressure/too low
Increase inlet pressure
Outlet pressure too high
Decrease outlet pressure
Control electronics failure, sensor
failure
Run PiMFC diagnostics test
57
Chapter Six: Troubleshooting
MFC output signal ocillates Inlet pressure oscillates
Check for faulty regulator
Inlet pressure too high
Lower inlet pressure
MFC nameplate gas not same as
actual gas
Check gas program using DNet or
Ethernet GUI. Reprogram as necessary
Faulty control circuit
Run PiMFC diagnostic test.
PiMFC output signal
Contaminated bypass
matches setpoint, but actual
gas flow less (as determined
by transfer standard)
Check process chamber pressure.
Compare to normal or reference.
MFC programmed for different gas Compare gas programmed in MFC to
actual gas used. Verify using DNet or
Ethernet interface.
MFC cannot achieve FS
flow
Inlet pressure low
Increase inlet pressure
Outlet pressure high
decrease outlet pressure
Valve contamination
Check valve current for maximum
position
Gas line blockage/contamination
Measure pressure drop across component
suspected of contamination such as filter
or check valve
MFC setpoint in counts > than
100% FS of 24567 counts
Program attributed 6 to 100% = 24567
counts (0x6000)
Output signal matches
MFC valve partial contamination
setpoint @ higher flows, but
will not go to 0
Cycle-purge device, check valve current
Faulty control valve, adjustment or Run PiMFC diagnostics, call MKS
electronics
service center
Inlet pressure too high
Decrease inlet pressure
Device zero offset
re-zero device with known zero flow
conditions
58
Chapter Six: Troubleshooting
MFC has setpoint,
displays inlet line
pressure, output signal
zero
Upstream and/or Downstream
pneumatic valves closed
Check inlet pressure, if normal or
matches regulator, check
downstream valve for closed
position. Open valve(s).
Display powers up, but
MFC does not respond
Bad DNet connection
Check status DNet polled
connection, check network LED
Incorrect MAC ID Address
Check MAC ID on device
Incorrect baud rate setting
Check baud rate on device
Incorrect DNet I/O Instance
Setting
Check I/O setting using DNet
commissioning tool/software
Check tool host
Low power, power supply
Measure current & voltage from
power source
Inlet pressure too high
Decrease inlet pressure
MFC not programmed for
correct gas - actual gas used
different
Check MFC active gas using DNet or
Ethernet interface
PiMFC control parameters set
incorrectly
Contact MKS service center
MFC device zero offset
Re-zero device per instruction
manual
Fault in valve adjustment, gap
between plug & orifice
Contact MKS service center
Pressure output signal
different than confirmed
line pressure
Zero offset in pressure
transducer
Re-zero pressure transducer using
known pressure standard & Ethernet
GUI
LED indicator (color)
State
Indication
Link OK, On-line, Connected
The device in on-line and has
connection in the established state.
MFC output shows large
overshoot or undershoot
Output signal > zero with
confirmed zero flow
condition
- Network status LED
Green
- For a Group 2 only device it means
that this device is not allocated to a
master.
59
Chapter Six: Troubleshooting
Flashing Green
On-line, Not Connected
Device is on-line but has no
connection in the established state.
- The device has passed The
Dup_MAC_ID test, is on-line, but has
no established connections to other
nodes.
- For a Group 2 only device it means
that this device is not allocated to a
master.
Red
Critical Link Failure
Failed communication device. The
device has detected an error that has
rendered it incapable of
communicating on the network
(Duplicate MAC ID, or Bus-off)
Flashing Red
Connection Time-Out
One or more I/O Connections are in
the Timed-Out state.
Flashing Red & Green Communication Faulted and
Received an Identify Comm
Fault Request - Long Protocol
A specific Communication Faulted
device. The device has detected a
Network Access error and is in the
Communication Faulted state. The
device has subsequently received
and accepted an Identify
Communication Faulted Request Long Protocol message.
Off
Device is not on-line
Not Powered/Not On-Line
- The device has not completed The
Dup_MAC-ID test yet
- The device may not be powered,
look at Module Status LED.
- Module Status
Green
Device operational
The device is operating in a normal
condition
Flashing Green
Device in Standby (The Device
Needs Commissioning)
The device needs commisioning due
to configuration missing, incomplete
or incorrect.
Red
Unrecoverable Fault
The device has an unrecoverable
fault; may need replacing.
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Chapter Six: Troubleshooting
Flashing Red
Minor Fault
Recoverable Fault
Flashing Red & Green Device Self Testing
The Device is in Self Test.
Reference the Identity Object in
Volume II for Device states.
Off
There is no power applied to the
device
No power
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Chapter Six: Troubleshooting
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62
Appendix A: Product Specifications
Performance Specifications
Appendix A: Product Specifications
Performance Specifications
Full Scale Flow (N2 equivalent)
10-30000 sccm
Maximum Inlet Pressure
150 psig, limited to maximum differential pressure across MFC.
Normal Operating Pressure Differential (with atmospheric
pressure at the MFC outlet)
10 to 5000 sccm, 10 to 40 psid
10000 to 30000 sccm 15 to 40 psid
Proof Pressure
1000 psig
Burst Pressure
1500 psig
Control Range
2% to 100% of F.S.
Accuracy
± 1% of setpoint for > 10 to 100% F.S.
± 2% of setpoint for 2 to 10% F.S.
Repeatability
± 0.3% of Reading
Resolution
0.1% of Reading
Temperature Coefficients
Zero
Span
<0.05% F.S./°C
<0.08% Reading/°C
Inlet Pressure Coefficient
< 0.02% of Reading./psi
Typical Controller Settling Time (per SEMI Guideline E170600)
< 1.5 second typical above 5% F.S.
Warm-Up Time
(to within 0.2% of F.S. of steady state performance)
< 30 min.
Normal Operating Temperature Range
10°C to 50°C
Storage Humidity
0 to 95% Relative Humidity, non-condensing
Storage Temperature
-20°C to 65°C (-4°F to 149°F)
Pressure Range
0 to 100 psia
Pressure Readout Units
psia, kPa
Pressure Accuracy
1% of Reading
Pressure Resolution
0.1 psia
Temperature Display Range
0 to 100°C
Temperature Readout Units
°C
Temperature Accuracy
± 2°C
Temperature Resolution
0.1°C
63
Mechanical Specifications
Appendix A: Product Specifications
Mechanical Specifications
Fittings (compatible with)
Swagelok, 4 VCR, 1-1/8” surface mount (C-seal, W-seal)
Display
4 digits for value, 4 characters for unit
Leak Integrity
External (scc/sec He)
Through closed valve
Wetted Materials
Standard
< 1 x 10-10
< 1.0% for F.S. at 25 psig inlet to atmosphere
316L S.S. VAR (equivalent to 316 S.S. SCQ for semiconductor quality),
316 S.S. , nickel, KM-45, PTFE
Surface Finish
5 µinches, average Ra
Weight
≤ 2 lbs (0.9 kg)
Electrical Specifications
Analog I/O
Input Voltage Required
+11 to +25 VDC
Max current at start-up (first 5 sec.)
15VDC (±5 %) @ 350 mA
Typical current at steady state
15VDC (±5 %) @ 280 mA
Set Point Command Signal
0 to 5 VDC
Flow Output Signal
0 to 5 VDC
Pressure Output
0 to 10 VDC, 0 to 5 VDC, 4-20mA ; Power Supply greater than 14 VDC is
required for 0-10 VDC and 4-20 mA outputs.
Output Impedance
<1Ω
Connectors
15-pin Type “D”, 9-pin Type “D”
Digital I/O (DeviceNet)
Date Rate/Network Length
Date Rate (User selectable)
125 Kbps, 500 m (1,640 ft)
250 Kbps, 250m (820 ft)
500 Kbps, 100m (328 ft)
Level of Filtering
User software adjustable
Digital Functions (flow)
Select units: counts, slm, sccm % of F.S.
Remote Zero
Set/read flow rate
Flow totalizer and run hours
Valve soft start
Monitor MFC status – valve drive level and trip points (alarm for high flow,
alarm for low flow, warning for high flow, warning for low flow)
Reset factory defaults
Report run time hours
64
Appendix A: Product Specifications
Electrical Specifications
Change user tags and device address
Device Identification Storage includes manufacturer information, model and
serial number, original factory calibration, software and hardware revision
numbers.
Digital Functions (pressure)
Set units
Read pressure
Alarm enable, Warning enable
Alarm settling time, Warning settling time
Alarm trip point high, Warning trip point high
Alarm trip point low, Warning trip point low
Zero adjust
Digital Functions (temperature)
Set units
Read temperature
Alarm enable, Warning enable
Alarm settling time, Warning settling time
Alarm trip point high, Warning trip point high
Alarm trip point low, Warning trip point low
Zero adjust
Data Rate Switch
4 positions: 125, 250, 500K, PGM
(programmable over the network)
MAC ID Switches
2 switches, 10 positions; 0,0 to 6,3 are hardware ID numbers: 7,0 to 9,9 are
software ID numbers; (6,4 to 6,9 are unused and, if selected will default to
hardware ID number 6,3)
Input Power
11 to 25 VDC per DeviceNet specifications ( @ <3.5 watts)
Network Size
Up to 64 nodes
Network Topology
Linear (trunkline/dropline) power and signal on same network cable
Visual Communication Indicators
LED network status (green/red)
LED module status (green/red)
Scrolling LED displays(Flow Gas , pressure, temperature, IP address, Full
scale)
Electromagnetic Compatibility
CE Compliant
65
Model Code Description
Appendix B : Model Code Explanation
Appendix B : Model Code Explanation
Model Code Description
The model code of the MFC defines features of the unit such as device type, flow range, fittings, valve
configuration, connector type, seal material and firmware revision.
CCC
GGG
FFF
Y
W
Z
Configuration Code
Gas Code
Flow Range Full Scale
Fittings
Connector Type
Valve
Reserved For MKS Future Use
DeviceNet Firmware Version
Configuration Code (CCC)
Type πMFC Mass Flow Controller(multigas, multi-range)PFC-50 CCC=P5A.
Type πMFC Mass Flow Controller(multigas, pressure insensitive)PFC-60 CCC=P6A.
Gas Code (GGG)
Gas
Code
Symbol
Acetone
184
C3H6O
Acetylene
042
C2H2
Air
008
Air
Allene
066
C3H4
Ammonia
029
NH3
Argon
004
Ar
Arsine
035
AsH3
Boron Trichloride
070
BCl3
Boron Trifluoride
048
BF3
Bromine
021
Br2
Bromine Pentafluoride
116
BrF5
Bromine Trifluoride
076
BrF3
Bromotrifluoromethane (R-13b1)
080
CBrF3
Butane
117
C4H10
Carbon Dioxide
025
CO2
66
S
VV
Appendix B : Model Code Explanation
Model Code Description
Carbon Disulfide
040
CS2
Carbon Monoxide
009
CO
Carbon Tetrachloride
101
CCl4
Carbon Tetrafluoride (R-14)
063
CF4
Carbonyl Sulfide
034
COS
Chlorine
019
Cl2
Chlorine Trifluoride
077
ClF3
Chlorodifluoromethane (R-22)
057
CHClF2
Chloroform (Trichloromethane)
071
CHCl3
Chloropentafluoroethane (R-115)
119
C2ClF5
Chlorotrifluoromethane (R-13)
074
CClF3
Cyanogen
059
C2N2
Cyanogen Chloride
037
ClCN
Cyclopropane
061
C3H6
Deuterium
014
D2
Diborane
058
B2H6
Dichlorodifluoromethane (R-12)
084
CCl2F2
Dichlorofluoromethane (R-21)
065
CHCl2F
Dichlorosilane
067
SiH2Cl2
1,2-Dichlorotetrafluoroethane (R-114)
125
C2Cl2F4
Difluoroethylene (R-1132a)
064
C2H2F2
Difluoromethane
160
CH2F2
Dimethylamine
085
C2H7N
Dimethylpropane
122
C5H12
Disilane
097
Si2H6
Ethane
054
C2H6
Ethanol
136
C2H6O
Ethyl Acetylene
093
C4H6
Ethyl Chloride
075
C2H5Cl
Ethylene
038
C2H4
Ethylene Oxide
045
C2H4O
Fluorine
018
F2
Germane
043
GeH4
Germanium Tetrachloride
113
GeCl4
Helium
001
He
Hexafluoro Butadiene-1,3
297
C4F6
Hexafluoroethane (R-116)
118
C2F6
Hexafluoropropylene
138
C3F6
Hexane
127
C6H14
Hydrogen
007
H2
Hydrogen Bromide
010
HBr
Hydrogen Chloride
011
HCl
Hydrogen Cyanide
024
HCN
67
Model Code Description
Appendix B : Model Code Explanation
Hydrogen Fluoride
012
HF
Hydrogen Iodide
017
HI
Hydrogen Selenide
023
H2Se
Hydrogen Sulfide
022
H2S
Iodine Pentafluoride
115
IF5
Isobutane
111
C4H10
Isobutylene
106
C4H8
Krypton
005
Kr
Methane
028
CH4
Methanol
176
CH4O
Methyl Acetylene
068
C3H4
Methyl Bromide
044
CH3Br
Methyl Chloride
036
CH3Cl
Methyl Fluoride
033
CH3F
Methyl Mercaptan
047
CH4S
Methylamine
052
CH5N
Methyltrichlorosilane
183
CH3Cl3Si
Molybdenum Hexafluoride
124
MoF6
Neon
002
Ne
Nitric Oxide
016
NO
Nitrogen
013
N2
Nitrogen Dioxide
026
NO2
Nitrogen Trifluoride
053
NF3
Nitrosyl Chloride
141
NOCl
Nitrous Oxide
027
N2O
Octafluorocyclobutane (R-c318)
129
C4F8
Oxygen
015
O2
Oxygen Difluoride
041
OF2
Ozone
030
O3
Pentaborane
142
B5H9
Pentafluorethane
155
C2HF5
Perchloryl Fluoride
072
ClO3F
Perfluoropropane
128
C3F8
Phosgene
060
CCl2O
Phosphine
031
PH3
Phosphorous Oxychloride
102
POCl3
Phosphorous Pentafluoride
143
PF5
Propane
089
C3H8
Propylene
069
C3H6
Radon
003
Rn
Silane
039
SiH4
Silicon Tetrachloride
108
SiCl4
Silicon Tetrafluoride
088
SiF4
68
Appendix B : Model Code Explanation
Model Code Description
Sulfur Dioxide
032
SO2
Sulfur Hexafluoride
110
SF6
Sulfur Tetrafluoride
086
SF4
Sulfuryl Fluoride
087
SO2F2
Tetrafluoroethane (R-134a)
156
C2H2F4
Titanium Tetrachloride
114
TiCl4
Toluene
181
C7H8
Trans-Butene
098
C4H8
Trichloroethane
112
C2H3Cl3
Trichlorofluoromethane (R-11)
091
CCl3F
Trichlorosilane
147
SiHCl3
Trichlorotrifluoroethane (R-113)
126
C2Cl3F3
Trifluoromethane (Fluoroform R-23)
049
CHF3
Trimethoxyborine
131
C3H9BO3
Trimethylamine
109
C3H9N
Tungsten Hexafluoride
121
WF6
Uranium Hexafluoride
123
UF6
Vinyl Bromide
056
C2H3Br
Vinyl Chloride
055
C2H3Cl
Xenon
006
Xe
Flow Range Full Range (FFF)
The MFC’s mass flow full scale range is indicated by a three digit code.
Mass Flow Rate
Ordering
Code(FFF)
10 sccm
101
20 sccm
201
50 sccm
501
100 sccm
102
200 sccm
202
500 sccm
502
1000 sccm
103
2000 sccm
203
5000 sccm
503
10000 sccm
104
20000 sccm
204
30000 sccm
Consult
factory
69
Model Code Description
FittingType (Y)
The fitting options are designated by a letter code.
Fitting Style
Ordering Code
Swagelok VCR-4 male
R
Downport C-Seal per SEMI 2787.1
C
Downport W-Seal per SEMI 2787.3F
H
Connector (W)
The MFC’s connector is designated by a single number code. The MFC is also available with a DeviceNet
connector.
Connector Type
Ordering Code
DeviceNet
6
Digital RS-485
5
9 Pin D(Analog I/O)
A
15 Pin D(Analog I/O)
B
Valve (Z)
The seal material option is designated by a letter code. The MFCs are normally closed valve with the
following seal type.
Seal Material
Ordering Code
Teflon
T
Metal
M, for ranges 10 sccm to 5000 sccm FS, N2
Equivalent only
Reserved For MKS Future Use (S)
Standard = 0
Firmware Version (VV)
The firmware version options are designated by a two digit number code.
Example: The release of firmware version 10.
Seal Material
DeviceNet Only
Note
Ordering Code
21
The default order code is to leave this position blank.
70
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