Confocal displacement measurement systems confocalDT

Confocal displacement measurement systems confocalDT
More Precision
confocalDT // Confocal chromatic measurement system
2
Confocal chromatic displacement and thickness measurement
confocalDT
Wear free measurement and
passive sensor design
Highest precision with
submicrometer resolution
Fast
surface compensation
70kHz
Adjustable measuring rate
up to 70 kHz
Displacement measurement and
thickness measurement
Tiny measurement spot
Configuration via
web interface
The new generation
of confocal chromatic measurement systems
The confocalDT stands for high precision confocal chromatic measurement
technology. The measurement system includes the fastest controller currently available, achieving high precision measurement results in displacement and distance measurement tasks, as well as thickness measurement
of transparent objects. A large range of sensors and different controller
interfaces open versatile fields of application, e.g. in the semiconductor
industry, glass industry, medical engineering and plastics production.
System design
The confocalDT confocal chromatic measurement system includes a controller and a sensor connected via a fibre optic cable. Due to a user-friendly
web interface, the entire configuration process is carried out without using
any additional software.
The range of sensors comprises the universally applicable IFS2405 sensors
and the IFS2402 / IFS2403 miniature sensors. With these miniature sensors,
geometrical features can be measured inside narrow holes and recesses.
Furthermore, the IFS2406 sensors are uses for vacuum applications.
Special features
The controller provides an excellent signal-to-noise ratio and enables high
precision measurement. The fast surface compensation regulates the exposure cycles in order to achieve high signal stability. In contrast to systems
using an oscillating lens, confocalDT is entirely wear-free. The sensors are
designed for passive measurements and do not need any electrical components. They do not give off heat, which makes them suitable for use
in sensitive environments. The unique measuring principle enables high
precision displacement and distance measurements – including on diffuse
and reflecting surfaces. With transparent measurement objects, thickness
measurement is possible.
The web interface for controller configuration opens via Ethernet.
3
Table of content confocalDT
Confocal miniature sensors
Page 6 - 7
confocalDT IFS2402
ƒƒMiniature sensors ø4mm
ƒƒMeasure inside bores and cavities from ø4.5mm
ƒƒRobust steel case
ƒƒAxial or radial (90°) measuring direction
ƒƒDisplacement and position measurement
Precise confocal sensors
Confocal hybrid sensors
Page 8 - 9
confocalDT IFS2403
ƒƒHybrid sensors ø8m
ƒƒDisplacement and position measurement and
one-sided thickness measurement of transparent
materials and multi-layers
ƒƒRobust steel case
ƒƒGradient index lens with relay optics
ƒƒAxial or radial (90°) measuring direction
Page 10 - 11
Confocal sensors (vacuum compatible)
Page 12 - 13
confocalDT IFS2405
ƒƒCompact sensors with large offset
ƒƒDisplacement and position measurement and one-sided
thickness measurement of transparent materials and multi-layers
ƒƒExtreme high spatial resolution
for microscopic surface profiling
confocalDT IFS2406
ƒƒSensors with axial or radial beam path
ƒƒDisplacement and position measurement and one-sided
thickness measurement of transparent materials and multi-layers
ƒƒVery small measurement spot size
ƒƒSubmicrometer resolution
ƒƒVacuum applications
High-End Controller
Controller for measuring rates up to 25kHz Page 16 - 17
Page 14 - 15
confocalDT 2451/2471
ƒƒIFC2471 high-speed applications
with a measuring rate up to 70kHz
ƒƒExcellent signal-to-noise ratio
ƒƒFast surface compensation due to exposure time regulation
ƒƒThickness calibration for precise thickness measurement
confocalDT 2461
ƒƒController with integrated light source
ƒƒHigh-performance optical components
ƒƒFast surface compensation due to exposure time regulation
ƒƒThickness calibration for precise thickness measurement
4
Applications
confocalDT
The confocal measuring principle
Measuring principle
Polychromatic white light is focused onto the target surface by a multilens optical system. The lenses are arranged so that the white light is
dispersed into a monochromatic light by controlled chromatic aberration. A specific distance to the target is assigned to each wavelength
by a factory calibration. Only the wavelength which is exactly focused
on the target is used for the measurement. This light reflected from the
target surface is passed through a confocal aperature onto a spectrometer which detects and processes the spectral changes.
Lenses
Beam
Target
Displacement and intensity measurement
Another option, in addition to displacement measurement, is to perform
measurements using signal intensity. Intensity evaluations are particularly well suited for capturing even the finest structures. The adjacent
example shows a measurement for a planed surface. Intensity evaluations help to display areas that cannot be detected using distance measurements.
Planar surface
Displacement
Intensity
Thickness measurement signal
Thickness measurement of transparent material
Cavity inspection
The unique measuring principle enables one-sided thickness measurement of transparent materials such as glass. The material thickness is
detected to micrometer accuracy using just one single sensor. The controller provides a comprehensive materials database that is editable
and expandable via the web interface. The evaluation of up to 6 peaks
enables measurements of multi-layer objects such as laminated glass.
The miniaturised IFS2402 and IFS2403 sensors include a 90°-version
which is ideal for detecting grooves or inner wall features of small gaps
and cavities.
5
Diameter of stainless steel pipes
Surface scan of of dental samples
Extreme resolution:
surface scan of a chip
Confocal chromatic miniature sensors
confocalDT IFS2402
Miniature sensors ø4mm with axial
or radial (90°) measuring direction
Submicrometer resolution
Displacement and position
measurement
Tiny spot size
Suited for hazardous areas
IFS2402-0.4/1.5/4/10
cable ø2.1
IFS2402/90-1.5/4/10
cable ø2.1
strain-relief
strain-relief
15
15
Ø4
steel
housing
6.25
The miniaturised series optoNCDT 2402 offers
all advantages of the confocal measurement
principle, with only 4mm outer diameter. Due
to a unique and patented lens design, this
compact sensor allows measuring in narrow
cavities and bores. Sensors with axial measuring direction and sensors with 90° beam
exit are available, which can measure radially
in small cavities and bores. For mounting in
magnetic environments sensors with titanium
housing are available.
lense ø1.8
mounting
area
73.25
68
69
flat
mounting
surface
1.94
2.5
4
3
SMR
7.25
steel housing ø4
2
SMR
MR
MR
6
Tolerance ±0.1mm
MR= Measuring Range
Diameter measurement in small bores with IFS2402/90
sensors
SMR = Start of Measuring Range
Dimensions in mm.
7
Sensor model (miniature)
IFS2402-0,4
IFS2402-1,5
IFS2402/90-1,5
IFS2402-4
IFS2402/90-4
IFS2402-10
IFS2402/90-10
400µm
1.5mm
1.5mm
3.5mm
2.5mm
6.5mm
6.5mm
1.5mm
0.9mm
2.5mm
3.5mm 1)
Measuring range
Start of measuring range
approx.
Spot diameter
Linearity
2.5mm
1)
1.9mm
2.5mm
10µm
20µm
20µm
20µm
20µm
100µm
100µm
~0.3µm
1.2µm
1.2µm
~3µm
2µm
13µm
13µm
16nm
60nm
60nm
0.1µm
0.1µm
0.25µm
0.25µm
±8°
±5°
±5°
±3°
±1.5°
±1.5°
≤±0.08 % FSO
Resolution 2)
≤±0.2 % FSO
Weight
15g
Max. tilt (direct reflexion)
±3°
Protection class
IP 40
Operation temperature
+5 ... +70 °C
Storage temperature
-30 ... +70 °C
Sensor cable (fibre optic cable)
length: integral cable 2m; option up to 50m; bending radius: static 30mm; dynamic 40mm
Shock
15g, 6ms
Vibration
2g / 10Hz ... 500Hz
FSO = Full Scale Output
All data at constant ambient temperature (25±2°C) against optical flat; specifications can change when measuring different materials.
1)
Distance from sensor axis
2)
Averaging factor 512
Accessories: mounting adapter
MA2402 for sensors 2402
1.5±0.1
22
ø3
.4
22
ø8
15
12
11
ø4 H9
M4
5
20
4.5
4
4.5
4
3
3
7.5
3
1)
Confocal chromatic hybrid sensors
confocalDT IFS2403
Hybrid sensors ø8mm with axial
or radial (90°) measuring direction
Submicrometer resolution
One-sided thickness measurement
of transparent material
Displacement and position
measurement
Tiny spot size
Suited for hazardous areas
IFS2403-0.4/1.5/4/10
IFS2403/90-1.5/4/10
cable ø2.1
strain-relief
strain-relief
87.5
~ 100
~ 110
cable ø2.1
3.24
79
The combination of a gradient index lens
(GRIN lens) with a relay lens represents a
favorable compromise between the IFS2401
standard sensors and the IFS2402 miniature
sensors. The sensors of the IFS2403 series
with an external diameter of 8mm can still
be used for precise measurement in relatively tight installation situations. Due to the
larger numerical aperture in comparison with
the IFS2402, significantly larger offset and
steeper tilt angles can be realized than for the
miniature sensors.
Sensors with axial measuring direction and
sensors with 90° beam exit are available,
which can measure radially in small cavities
and bores.
ø8
SMR
MR
SMR
MR
8
Measurement in bores with IFS2403/90 sensors
Tolerance ±0.1 mm
MR= Measuring Range
SMR = Start of Measuring Range
Dimensions in mm.
ø8
9
Sensor model (GRIN lens with relay optics)
IFS
2403-0.4
IFS
2403-1.5
Measuring range
Start of measuring range
appr.
Spot diameter
Linearity (displacement measurement)
IFS
2403/90-1.5
IFS
2403-4
IFS
2403/90-4
IFS
2403-10
400µm
1.5mm
1.5mm
4mm
4mm
10mm
10mm
2.5mm
8.0mm
4.9mm 1)
14.7mm
12mm 1)
11mm
8.6mm 1)
9µm
15µm
15µm
28µm
28µm
56µm
56µm
0.3µm
1.2µm
1.2µm
3µm
3µm
20µm
20µm
≤±0.08 % FSO
0.6µm
Linearity (thickness measurement)
2.4µm
≤±0.2 % FSO
2.4µm
6µm
6µm
≤±0.16 % FSO
16nm
Resolution 2)
IFS
2403/90-10
60nm
40µm
40µm
≤±0.4 % FSO
60nm
0.2µm
Weight
0.1µm
0.25µm
0.25µm
±6°
±6°
±6°
25g
Max. tilt (direct reflexion)
±13°
±16°
±16°
±6°
Protection class
IP 40
Operation temperature
+5 ... +70 °C
Storage temperature
-30 ... +70°C
Sensor cable (fibre optic cable)
length: integral cable 2m; option up to 50m; bending radius: static 30mm; dynamic 40mm
Shock
15g, 6ms
Vibration
2g / 10Hz ... 500Hz
FSO = Full Scale Output
All data at constant ambient temperature (25±2°C) against optical flat; specifications can change when measuring different materials.
1)
Distance from sensor axis
2)
Averaging factor 512
Accessories: mounting adapter
MA2403 for sensors 2403
22
11
3.4
1.5±0.1
3
4
M5x0.8
3
M5x0.8
7
4.5
24
4
4.5
18
ø8
12
7.5
3
3
Precise confocal chromatic displacement sensors
confocalDT IFS2405
Robust sensors for various
applications
One-sided thickness measurement
of transparent material
Displacement and position
measurement
Tiny spot size
Submicrometer resolution
Suited for hazardous areas
IFS2405-0.3
IFS2405-1
IFS2405-3
IFS2405-10
IFS2405-30
ø19.2
ø19.2
ø19.2
ø19.2
200
14
ø62
appr. 100
appr. 50
9.5
ø54
10
ø22
ø34
3 appr.20
7.4
ø27
1
ø14.4
Range 113.7
145
appr. 10
Range 81.3
Range 99
6
appr. 6
ø27
0.3
ø10.4
Range 103.3
185
ø19.2
150
154
Range 103
The confocal sensors in the IFS2405 series
are designed for measurement tasks that require maximum precision. These new sensors
excel through their high sensitivity. The high
tilt angle and the relatively large base distance enable a great variety of potential applications. As well as distance measurements for
reflective and transparent surfaces, the sensor can also be used for one-sided thickness
measurement of clear film, boards or layers.
6
ø38.2
30
10
Thickness measurement of rear windows
ø47
11
IFS
2405-0,3
Sensor model
Measuring range
Start of measuring range
appr.
Spot diameter
Linearity (displacement measurement)
IFS
2405-1
IFS
2405-3
IFS
2405-10
0.3mm
1mm
3mm
10mm
30mm
6mm
10mm
20mm
50mm
100mm
6µm
8µm
9µm
16µm
50µm
0.15µm
0.25µm
0.75µm
2.5µm
7.5µm
5µm
15µm
±0.05 % FSO
±0.025 % FSO
0.3µm
Linearity (thickness measurement)
IFS
2405-30
0.5µm
1.5µm
±0.1 % FSO
±0.05 % FSO
Resolution 1)
10nm
28nm
36nm
60nm
180nm
Weight
140g
125g
225g
500g
730g
±34°
±30°
±24°
±17°
±9°
Max. tilt
2)
Protection class
IP 65, front
Operation temperature
+5 ... +70 °C
Storage temperature
-20°C … +70°C
Sensor cable (fibre optic cable)
length: standard 3m; option up to 50m; bending radius: static 30mm; dynamic 40mm
Shock
15g, 6ms
Vibration
2g / 10Hz ... 500Hz
FSO = Full Scale Output
All data at constant ambient temperature (25±2°C) against optical flat; specifications can change when measuring different materials.
1) Average from 512 values at 1kHz, near to the centre of the measuring range
2) Maximum sensor tilt angle that produces a usable signal, near to the centre of the measuring range
Accessories: mounting adapter
MA2400 for sensors 2405 (consisting of a mounting block and a mounting ring)
mounting block
mounting ring
30
20
0
ø5
ø3
4
0
ø7
ø5
4
8
ø7
30
7
20
ø2
20
6
ø4
20
13
20
10
23
19.75
7
MA 2400-27
for sensors
IFS2405-0,3 / -1
10
22
MA 2405-34
for sensor
IFS2405-3
32
MA 2405-54
for sensors
IFS2405-10
36.5
MA 2405-62
for sensors
IFS2405-30
ø6
2
Confocal chromatic sensors for measuring
displacement and thickness
confocalDT IFS2406
Sensors
Sensorenwith
mitaxial
axialem
or
radial
beam Strahlengang
path
oder
radialem
Einsetzbarthickness
zur einseitigen
One-sided
measurement
Dickenmessung
Einsetzbar
Distance
measurement
zur Abstandsmessung
Very
small
measurement
Extrem
kleiner
Messfleckspot size
Submicrometer
Submikrometer resolution
Auflösung
Vacuum
applications
Für VAC-Bereiche
geeignet
IFS2406-2.5/VAC(001)
As well as distance measurements on reflecting or transparent surfaces, the sensor can
also be applied in one-sided thickness measurement of transparent film, plates or layers.
IFS2406/90-2.5/VAC(001)
ø16
ø20
approx.12.6
ø12.8
2.5
Exchangeable
protective glass
approx.
17.2
6.85
ø20
Clamping range 60
77.5 ±2
Clamping range 60
ø16
79.8
89 ±2
The IFS2406 series stands out due to its
compact design and high precision. Due to
its axial and radial measuring directions, the
confocal sensor is suitable for vacuum applications and is extremely versatile in terms of
its use.
7.8
12
20
Exchangeable
protective glass
2.0 thick
2.5
13
IFS
2406-2.5/VAC(001)
Sensor model
Measuring range
Start of measuring range
approx.
Spot diameter
Linearity (displacement and distance measurement)
Linearity (thickness measurement)
Resolution 1)
IFS
2406/90-2.5/VAC(001)
2.5mm
2.5mm
17.3mm
measured from protective glass frame
12.6mm
measured from sensor axis
10µm
10µm
0.75 µm
0.75µm
±0.03 % FSO
1.5µm
1.5µm
±0.06 % FSO
24nm
24nm
Weight (without cable)
105g
130g
Max. tilt
±16°
±16°
2)
Protection class
Operating temperature
Storage temperature
Sensor cable (fibre optic cable)
Shock
Vibration
IP 40, vacuum compatible
+5°C … +70°C
-20°C … +70°C
length: standard 3m; option up to 50m; bending radius: static 30mm; dynamic 40mm
15g, 6ms
2g / 10Hz ... 500Hz
FSO = Full Scale Output
All data based on measurements with an optical cable of 26µm C2401-X(01) fibreglass at constant ambient temperature (25±2°C) against optical flat;
specifications can change when measuring different materials.
1)
Average from 512 values at 1kHz, near to the centre of the measuring range
2)
Maximum sensor tilt angle that produces a usable signal, near to the centre of the measuring range
14
High-End Controller
confocalDT IFC2451/2471
70kHz
The fastest confocal controller
worldwide: up to 70kHz
INTER
FACE
Interfaces: Ethernet / EtherCAT /
RS422 / Analogue
Fast surface compensation
Configuration via
web interface
Submicrometer resolution
Multi layer
thickness measurement
Robust design with
passive cooling
The new confocalDT 2451/2471 high precision controllers are the next generation of
confocal chromatic measuring technology.
Due to their excellent signal/noise ratio, these new models can achieve measuring rates
of 10kHz with white light LEDs (IFC2451) and
70kHz (IFC2471) using an external Xenon light
source.
The new active exposure regulation feature in
the CCD array enables accurate, fast surface
compensation on difficult changing surfaces
during dynamic measurement processes.
Thanks to a user-friendly web interface, the
entire configuration can be carried out without
using any additional software. Data output is
via Ethernet, EtherCAT, RS422 or analogue
output.
All thickness measurement settings are
configured through the web interface. A
number of transparent materials are stored
in the expandable materials database.
confocalDT 2451/2471 systems are used for
complex distance and thickness measurements and can be used with any IFSsensor.
Optical signals are transferred between sensor and controller via optical fibres.
Sensor IFS240x
Distance 1
Distance 1
Thickness
SMR
EtherCAT Conformance tested: IFC2451
MR
15
Controller
Multi peak measurement
Light source
IFC2451
IFC2451MP
IFC2471
IFC2471MP
2 peaks
up to 6 peaks
2 peaks
up to 6 Peaks
internal white LED
Measuring rate
external xenon light source IFX2471
adjustable 10 / 5 / 2.5 / 1 / 0.3 / 0.2 / 0.1kHz
Resolution
adjustable 70 / 50 / 25 / 10 / 5 / 2.5 / 1 / 0.3kHz
Ethernet / EtherCAT
1nm
RS422
18bit
Analogue
16bit
Storage
up to 20 calibration tables for different sensors, menu selection
sync-in / trigger-in, sync-out
error1-out, error2-out
encoder (3x A, B, Index)
EtherCAT/Ethernet
RS422
analogue: current, voltage (16bit D/A converter)
Controller inputs / outputs
sync-in / trigger-in, sync-out
error1-out, error2-out
encoder (3x A, B, Index)
EtherCAT/Ethernet
RS422
analogue: current, voltage (16bit D/A converter)
IFX2471: temperature, light-bulb exchange
EtherCAT
On/Off switch; Button for dark alignment (as well as for reset to factory setting after 10sec)
4x LED for intensity, range, status, supply voltage
Operating elements, controller display
Supply voltage,
power consumption
controller
external light source
24VDC ±15%, ~10W
-
Housing
24VDC ±15%, ~10W
90 … 265VAC, ~100W
Aluminium case for DIN rail mounting
Protection class
IP40
controller
external light source
Operating temperature
5 °C ... 50 °C
-
5 °C ... 50 °C
5 °C ... 40 °C
Storage temperature
-20 °C ... 70 °C
Permissable ambient light
30,000lx
Safety; EMC
Interference emission
Interference resistance
CE
EN 61 000-6-3 / DIN EN 61326-1 (class B)
EN 61 000-6-2 / DIN EN 61326-1
Shock
15 g, 6ms
Vibration
2g / 10Hz ... 500Hz
sensor
Optical fibre cable length
2 ... 50m
xenon light source
-
1m
connector
E2000
EtherCAT, Ethernet
Cable length
(all cables are shielded)
CAT5E; length <100m
supply, RS422, sync./
error
<30m
analogue
<30m
encoder
<3m
Xenon light source IFX2471
218
(can be removed)
fitting panel
for DIN rail
R
76.2
81.2
30
approx. 75
62.2
194.2
184.2
approx. 63
sensor cable
(optical fiber)
120
123.8
min 150
Controller IFC2451/2471
246
124.5
16
Controller with integrated light source
for measuring rates up to 25kHz
confocalDT IFC2461
25kHz
Fast confocal controller:
up to 25kHz
INTER
FACE
Interfaces: Ethernet / EtherCAT /
RS422 / Analogue
Fast surface compensation
Configuration via
web interface
Submicrometer resolution
Multi layer
thickness measurement
Robust design with
passive cooling
confocalDT 2461 systems are used for complex distance and thickness measurements.
The IFC2461 controller is equipped with enhanced, optimised optical components enabling measuring rates up to 25kHz without
having to use an external light source. The
high light intensity enables reliable measurements on difficult surfaces, e.g. on matt black
objects or for multi-layer thickness measurement of glass. The controller can be operated with any IFS sensor and is available as a
standard version for distance measurements
or as a multi-peak version for thickness measurements.
The active exposure regulation feature in the
CCD array enables accurate, fast surface
compensation on difficult changing surfaces
during dynamic measurement processes.
Thanks to a user-friendly web interface, the
entire configuration can be carried out without
using any additional software. Data output is
via Ethernet, EtherCAT, RS422 or analogue
output.
All thickness measurement settings are
configured through the web interface. A
number of transparent materials are stored
in the expandable materials database.
Sensor IFS240x
Distance 1
Distance 1
Thickness
SMR
MR
17
Controller
Multi peak measurement
IFC2461
IFC2461MP
2 peaks
up to 6 peaks
Light source
internal white LED
Measuring rate
adjustable 25 / 10 / 5 / 2.5 / 1 / 0.3 / 0.2 / 0.1kHz
Resolution
Ethernet / EtherCAT
1nm
RS422
18bit
Analogue
16bit
Storage
up to 20 calibration tables for different sensors, menu selection
sync-in / trigger-in, sync-out
error1-out, error2-out
encoder (3x A, B, Index)
EtherCAT/Ethernet
RS422
analogue: current, voltage (16bit D/A converter)
Controller inputs / outputs
EtherCAT
On/Off switch; Button for dark alignment (as well as for reset to factory setting after 10sec)
4x LED for intensity, range, status, supply voltage
Operating elements, controller display
Supply voltage, power consumption
24VDC ±15%, ~10W
Housing
Aluminium case for DIN rail mounting
Protection class
IP40
Operating temperature
5°C ... 50°C
Storage temperature
-20°C ... 70°C
Permissable ambient light
30,000lx
Safety; EMC
Interference emission
Interference resistance
CE
EN 61 000-6-3 / DIN EN 61326-1 (class B)
EN 61 000-6-2 / DIN EN 61326-1
Shock
15 g, 6ms
Vibration
2g / 10Hz ... 500Hz
sensor
Optical fibre cable length
2 ... 50m
connector
E2000
EtherCAT, Ethernet
Cable length
(all cables are shielded)
CAT5E; length <100m
supply, RS422, sync./
error
<30m
analogue
<30m
encoder
<3m
approx. 63
sensor cable
(optical fiber)
120
R
218
(can be removed)
fitting panel
for DIN rail
123.8
Controller IFC2461
76.2
81.2
30
approx. 75
18
Confocal chromatic measurement
confocalDT
System setup
A measuring system confocalDT 2451/2461
consists of:
ƒƒSensor IFS240x
ƒƒController IFC2451/ IFC2461
A measuring system confocalDT 2471
consists of:
ƒƒSensor IFS240x
ƒƒController IFC2471 (for external light source)
ƒƒXenon light source IFX2471
Sensor IFS
EtherCAT, Ethernet, RS422
Vacuum feedthrough
External
light source
IFX2471
Controller
IFC2451
IFC2461
IFC2471
Power supply
Encoder
Analogue output
Customer specific modifications
On occasions, application requirements exceed the performance limits of standard sensors and
controllers. To facilitate such special tasks it is possible to customize the sensor design and to
adjust the controller accordingly. Common requests for modifications include changes in design,
mounting options, customized cable lengths and modified measuring ranges.
Possible modifications
ƒƒSensors with connector
ƒƒ90° cable exit
ƒƒVacuum suited sensors without outgassing
ƒƒReduced sensor length
ƒƒMounting options
ƒƒExtended sensor lance
ƒƒOptical filter for ambient light compensation
ƒƒSensor material
19
Accessories
Fibre optic
Temperature range : -50°C - 90°C
Bending radius: 30/40mm
Accessories light source
IFX2471/Xe/75
external Xenon light source for controller IFC2471 (70 kHz)
IFX2471/Xe/75-light-bulb for IFX2471
IFL2451/LED-light-bulb for IFC2451
IFL2451/LED(003)-light-bulb for IFC2451(003) with cooling element
CL2471-1/Xe
Light source cable, 1m
Acrylate <250 µm
Fibre optical cable (3m, 10m,customer specific length up to 50m)
Armored cable (3m, 10m, customer specific length up to 50m)
Sensor cable for drag chain use, 3m
Sensor cable for drag chain use, 5m
Sheath
PVC: polyvenylchlorid
Tubing
PVDF: polyvenyl-idene-fluorid
strain relief
E2000/APC standard connector
Ø6
Accessories IFS2402/2403
CE2402-X Extension for fibre optical cable (3/10/13/30/50m)
CE2402-X/PT Sensor with armored cable
(3/10m, customer specific length up to 50m)
C2402/Vac/KF16
Vacuum feedthrough, 1 channel
C2405/Vac/6/CF63 Vacuum feedthrough, 6 channel
C2405/Vac/9/CF63
Vacuum feedthrough, 9 channel
Accessories
SC2471-3/USB/IND SC2471-3/IF2008 SC2471-3/CSP SC2471-10/IF2008 SC2471-10/CSP SC2471-10/USB/IND SC2471-20/USB/IND PS2020 EC2471-3/OE Cladding 125 µm
Ø2
Accessories IFS2405
C2401-X C2401/PT-X C2401-3(10) C2401-5(10) Multimode core 50 µm
8.8
Free demo software tool included in delivery
25.5
Connector cable IFC2451/61/71, 3m
Connector cable IFC2451/61/71-IF2008, 3m
Connector cable IFC2451/61/71-CSP2008, 3m
Connector cable IFC2451/61/71-IF2008, 10m
Connector cable IFC2451/61/71-CSP2008, 10m
Connector cable IFC2451/61/71, 10m
Connector cable IFC2451/61/71, 20m
Power supply 24 V / 2,5 A
Encoder cable, 3 m
6
Software
IFD24n1-Tool
Modifications reserved / Y9761149-M011095GKE
High performance sensors made by Micro-Epsilon
Sensors and systems for displacement
and position
Sensors and measurement devices for
non-contact temperature measurement
2D/3D profile sensors (laser scanner)
Optical micrometers, fibre
optic sensors and fibre optics
Colour recognition sensors, LED analyzers
and colour online spectrometer
Measurement and inspection systems
MICRO-EPSILON Headquarters
Koenigbacher Str. 15 ∙ 94496 Ortenburg / Germany
Tel. +49 (0) 8542 / 168-0 ∙ Fax +49 (0) 8542 / 168-90
[email protected] ∙ www.micro-epsilon.com
Micro-Epsilon UK Ltd.
No.1 Shorelines Building · Shore Road · Birkenhead · CH41 1AU
Phone +44 (0) 151 355 6070 · Fax +44 (0) 151 355 6075
[email protected] · www.micro-epsilon.co.uk
Was this manual useful for you? yes no
Thank you for your participation!

* Your assessment is very important for improving the work of artificial intelligence, which forms the content of this project

Download PDF

advertisement