S530
S530
Parametric Test Systems
• Semiconductor industry’s most
cost-effective fully automatic
parametric testers
• Optimized for use in
environments with a broad
mix of products, where high
flexibility and system speed are
critical
Parametric test systems
Parametric test systems
• Choice of low current or high
voltage system configurations
–– Low current configuration
supports measurement of low
current characteristics such as
sub-threshold leakage, gate
leakage, etc.
–– High voltage configuration
is optimized for monitoring
processes used for GaN, SiC,
and Si LDMOS power devices
• Compatible with popular fully
automatic probe stations
• Instrument options for
sourcing pulses, frequency
measurements, and low voltage
measurements
• Cabled-out tester configuration
maximizes prober interface
flexibility and expands voltage
range
–– Compatible with Keithley’s
Model 9139A Probe Card
Adapter
–– Supports reuse of existing
five-inch probe card libraries
SEMICONDUCTOR
• Proven instrumentation
technology ensures high
measurement accuracy and
repeatability in both the lab
and the fab
Keithley’s S530 Parametric Test Systems can address all the DC and C-V measurements required in
process control monitoring, process reliability monitoring, and device characterization because they
are built on proven sourcing and measurement technology.
Optimized for High-Mix Test Environments
S530 Parametric Test Systems are designed for production and lab environments that must handle a
broad range of devices and technologies, offering industry-leading test plan flexibility, automation,
probe station integration, and test data management capabilities. Keithley has brought more than 30
years of expertise in delivering a wide range of standard and custom parametric testers to customers
around the world to the design of these test solutions.
Simple Software Migration and High Hardware Reuse
S530 systems are designed with capabilities that speed and simplify system startups and maximize
reuse of your existing test resources. For example, the software that controls these systems is compatible with many new and legacy automatic probe stations, so you may be able to eliminate the cost of a
new one. In addition, the S530’s cabled-out configuration typically allows continued use of your existing probe card library. Several optional applications services can help you keep getting the full value
of your existing prober and probe card investments. Keithley can also provide assistance to speed the
development, conversion, or repurposing of your existing test recipes for use with S530 systems.
Semiconductor Industry’s Most Powerful Standard Parametric Test System
Two different system configurations are available to address different parametric test application
environments. The S530 Low Current System, which is configurable from two to eight source measure unit (SMU) channels, provides sub-picoamp measurement resolution and low current guarding
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S530
Table 1. S530 System Selector Guide
20V
200V
Key Range and Offset Performance
1A
1E+0
1E-3
1E-6
1E-9
1E-12
1E-3
1E-2
1E-1
1E0
1E+1
1E+2
1E+3
1000V
20V
• Source up to 1000V or 1A
S530
High Voltage • Use 200V SMU to measure current
System
with femto-amp resolution and picoamp offset
• Use 1000V SMU to measure current
with ten pico-amp resolution and
nano-amp offset
• 3 to 7 SMU channels1
• Options for C-V, pulse sourcing,
frequency measurements, and lowvoltage measurements
• Up to 24 pins full Kelvin plus
connection for chuck
200V
Voltage Source (V)
1A
1E+0
100mA
20mA
1E-3
High Voltage SMU
1E-6
1E-2
1E-1
1E0
1E+1
System Architecture
Each S530 system configuration is made up of
five layers:
• Instruments layer – In addition to SMU
instruments, the S530 offers options for
sourcing pulses or making C-V, frequency, or
low voltage measurements.
1E-9
1E-12
1E-3
Industry’s Most Powerful High
Voltage Parametric Test System
The S530 High Voltage Semiconductor
Parametric Test System is the only parametric
tester available that’s capable of full Kelvin high
voltage performance on up to 24 pins, a capability that’s invaluable for characterizing today’s
higher power devices. The system incorporates
a high voltage SMU that sources up to 1000V at
20mA (20W max.). Two high voltage pathways
allow making either direct high-side current
measurements (in which a single SMU is used
to both source and measure the high side of the
DUT) or higher sensitivity low-side low current
measurements (in which one SMU is used to
source high voltage to the high side of the DUT
and a different SMU is used to force 0V and measure the current of the low side).
1E+2
1E+3
Voltage Source (V)
1. Depending on instrument options within the system.
all the way to the probe card, which makes it ideal for characterizing sub-micron silicon MOS technologies. The S530 High Voltage System, configurable from three to seven SMU channels, can source
up to 1000V for use in the difficult breakdown and leakage tests that automotive electronics and
power management devices demand.
All Series S530 systems are equipped with Keithley’s proven high power SMU instruments, which
provide up to 20W source or sink capability on both the 200V and 20V ranges. This level of power
is essential for complete characterization of the high power devices and circuits prevalent in today’s
mobile devices. Whether the application is testing LDMOS Si or GaN BJTs, this higher power capability provides greater visibility into device performance. That means S530 systems can handle high
power device testing without compromising the low current sub-picoamp sensitivity needed to monitor mainstream device processes. In contrast, competitive parametric test systems are limited to medium power 2W SMU instruments, so they cannot match the S530 systems’ range of applications.
Full Kelvin Standard Configurations
All too often, currents higher than a few milliamps lead to measurement errors as a result of voltage
drops across the interface cables and pathways. To prevent this drop in measurement integrity, both
the low current and high voltage S530 systems provide full Kelvin measurements (also known as
remote voltage sense) at the probe card. Full Kelvin measurements are particularly critical to ensuring measurement accuracy given the 20W capability of the high power SMU instruments used in S530
systems.
• Pathways layer – S530 systems provide
high fidelity signal pathways that can be
dynamically reconfigured to allow any
instrument to be connected to any pin or set
of pins d­ uring test.
• Cable interface layer – All system
interconnects are constructed of fully
shielded and guarded triaxial low leakage,
high voltage cables to ensure higher
measurement ­integrity.
• Probe card adapter (PCA) layer – This layer
extends the shield and guard to the probe
card to ensure measurement integrity.
Also, the PCA provides auxiliary inputs for
instruments that require direct access to the
probe card and must bypass the signal path
switch matrix.
• Probe card layer – This layer includes
the custom cards supplied by your probe
card ­­vendors.
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SEMICONDUCTOR
Current Measure (A)
100mA
Current Measure (A)
Parametric test systems
System Capabilities
• Source up to 200V or 1A
S530
Low Current • Measure current with femto-amp
System
resolution and sub pico-amp offset
• 2 to 8 SMU channels1
• Options for C-V, pulse sourcing,
frequency measurements, and lowvoltage measurements
• Up to 60 pins full Kelvin plus
connection for chuck
Parametric test systems
Parametric Test Systems
S530
Parametric Test Systems
Signal Pathways
The core of each S530 test system is a set of high fidelity signal pathways through the system switch
that direct signals between instruments and test pins. The S530 has eight high fidelity pathways that
can be used to route instruments to pins dynamically. For example, up to eight SMU instruments
can be routed to any pin (or number of pins) at one time. The S530 Low Current System uses switch
matrices that deliver uniform performance across all eight pathways. The S530 High Voltage System
uses switch matrices with specific pathways for high voltage/low leakage measurements and also for
C-V. Refer to models 7174A and 7072-HV data sheets for more details.
System Measurement Options
For a wider range of test structures and measurements, the S530 can be equipped with several measurement options:
Table 2. S530 Pathway Performance
• Pulse Generator Unit – The optional pulse
generator unit supports open load pulse
amplitudes from ±100mV to ±40V, with pulse
widths from 100ns to 1s and pulse transitions
from 50ns to 200ms. Up to six pulse channels
can be added (in increments of two channels).
Add one to three dual-channel units for
applications such as flash memory testing.
CVU
CVU
LO
CHUCK
PGU
PGU
SMU 4
SMU 3
SMU 2
SMU 1
Parametric test systems
Instruments
• Low-voltage measurements – An optional
7½-digit digital multimeter (DMM) augments
the voltage measurement capabilities to allow
both differential and non-differential voltage
measurements from sub-500µV to 400V
(up to 1000V in S530 High Voltage system)
for measuring structures including van der
Pauw, contact chains, metal resistors and
other devices where small voltages must be
measured accurately.
Switch
Matrix
Pathways
Cabling
PIN 48
PIN 47
PIN 44
PIN 46
PIN 45
PIN 43
PIN 41
PIN 42
PIN 40
PIN 39
PIN 38
PIN 37
PIN 11
PIN 12
PIN 9
PIN 10
PIN 7
PIN 6
PIN 8
PIN 4
PIN 5
PIN 3
PIN 1
System Spec
“Plane”
PIN 2
Probe Card Adapter
Probe Card
Every S530 system is made up of five layers: instruments, switch pathways, cable interface,
probe card adapter, and probe card.
SEMICONDUCTOR
• Frequency measurements – For measuring
test structures such as ring oscillators, a
frequency measurement option is available
for the S530. This option uses one port on
the switch matrix and is intended to allow
the user to measure ring oscillator structures.
The option has a frequency range of 10kHz to
20MHz and can measure signals from 10mV
rms to 1V rms.
Proven SMU Technology
All source measurement units (SMU instruments) built into S530 Parametric Test Systems are based
on Keithley’s production-qualified instrument technology to ensure high measurement accuracy
and repeatability and extended hardware life. The SMU instruments are four-quadrant sources, so
they can source or sink current or voltage. In addition to precision sourcing circuits, they include
programmable limits (compliance) across all ranges, which helps protect both devices and probe
tips from damage due to device breakdown. Each SMU also measures both voltage and current while
sourcing, which ensures that parameter calculations reflect actual conditions rather than simply the
programmed conditions.
Ground Unit (GNDU)
All SMU instruments are referenced to the
ground unit or GNDU. During a test, the GNDU
provides both a common reference and a return
path for current sourced by the SMU instruments. The GNDU signal is formed by combining
all the Source LO and Sense LO signals and
referencing them to system ground. The system
can easily be configured for a range of ground
system configurations to accommodate various
probe station ground schemas.
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Parametric test systems
Key
Maximum Maximum
Characteristics Voltage
Current Comments
Limited to 200V max. Provides best low-level signal
Ultra low
200V
1A
Low Current I‑V 1
performance and excellent C-V performance.
leakage
Supports low-level measurements but not quite as low as
2
1300V
1300V
1A
High Voltage I‑V
the Low Current pathway.
Suitable for the majority of parametric tests, except for
2
200V
1A
General-Purpose I‑V
very low current and/or high voltage tests.
Excellent C-V performance but not suitable for DC
200V
1A
C‑V 2
I‑V measurements.
1. Available only on low current system.
2. Available only on high voltage system.
Pathway Type
• Capacitance-Voltage (C-V) Unit – Capable of
measuring a 10pF capacitor at 1MHz with a
typical accuracy of 1%.
S530
Parametric Test Systems
• Low noise performance that helps ensure the integrity of low-level voltage measurements.
• Minimally invasive, low profile design that allows easy camera integration.
Parametric test systems
• 64 inputs – Configurable to support both standard cable connections from the tester and auxiliary
inputs for instruments that bypass the pathway matrix.
• 500V pin-to-pin isolation (1000V when connecting only to every other pin).
High flexibility cabled-out configuration
S530 systems are “cabled-out” configurations to provide the broad interconnect flexibility that highmix fab and lab environments demand. These systems can be interfaced to a variety of probing
solutions, including high performance circular probe cards, cost-effective rectangular edge-connector
probe cards, and even special high performance cards for applications that involve extreme temperatures or demand high durability.
Table 4. S530 System Cabling Options
Cabling Options
Probe Card Type
Standard Keithley
Circular ceramic
9139A PCA (S400-type)
Custom Cabled to
Existing PCA Type
Unterminated Cables
No Cables
Features
Extends driven guard to
probe pin
Benefits
Superior low current measurements.
Supports up to 64 pins; easily configured for
auxiliary inputs for additional instrument
options
Typically for five-inch rectangu- Compatible with existing Reduces migration cost by reusing existing
lar probe cards using edge card probe card library
probe cards
connectors
Cables connected to pathway
Ready to cable to existing Provides recommended cable to optimize
output with unterminated
interface or fixture
system performance
cable ends
Custom probe card
No need to purchase a
Use cable system provided by custom probe
cable solution
card vendor
The Model 9139A Probe Card Adapter has
been trusted by the industry for more than
10 years. Its combination of low current
performance and high voltage capability
makes it the ideal companion to the S530
Parametric Test Systems.
Alternative Probe Card
Adapters (PCAs)
Optional probe card adapters are available
for all S530 configurations. In the simplest
form, the edge connector used to interface to
a rectangular probe card (typically referred to
as five-inch probe cards) is a PCA. This type of
PCA provides the most cost-effective solution for
applications involving mid-range signal levels. If
desired, the Model 9139A PCA can be configured
into any S530 system as an option. This PCA is
designed for interfacing the system to circular
probe cards (from Keithley-approved vendors)
via pogo pin connections. Probe-station-specific
adapter plates can be specified during ordering
to ensure the Model 9139A’s compatibility with a
variety of popular probe stations.
Probe Cards
Unlike testhead-based systems, S530 systems
are easily adaptable for use with a wide range
of probe card types, so you likely won’t need to
System Software
Keithley’s S530 system relies on the Keithley Test
Environment (KTE) software for test development and execution. Hosted a standard industrial PC with a Linux OS, KTE incorporates decades
of Keithley parametric test experience into its
latest generation test system. Measurement
routines and test plans can be easily written,
converted, or re-used, helping you get up and
running faster. That simplifies using your S530
system effectively in conjunction with existing
test systems. S530 software includes all the key
system software operations:
Parametric test systems
• Low offset currents that maximize low current performance.
replace your existing (and expensive) probe card
library. Although Keithley recommends the use
of the Model 9193A PCA and approved probe
card vendors, we recognize you have made a
major investment in your current cards. If probe
card reuse is critical to your capital equipment
strategy, consult an applications team member to
learn about connection options that can protect
your probe card investment.
• Wafer description
• Test macro development
• Test plan development
• Limits setting
• Wafer or cassette level testing with automatic
prober control
• Test data management
User Access Points (UAPs)
for Added Flexibility
User Access Points or UAPs can be used to
modify the operational flow of the test sequence
at key events like “load wafer,” “start test,” “end
cassette,” etc. They are useful for adding system
capabilities like reading wafer cassette RFID
tags or reading wafer IDs using an OCR system.
During test operation, an enabled UAP triggers
the execution of one or more custom operations
defined in a script or executable program.
System Diagnostics and
Reliability Tools
Diagnostics can be performed routinely to
ensure the system is performing as expected
and won’t generate false failures or false
passes. The S530 systems’ diagnostics capability
verifies system functionality quickly and easily.
Key steps in the diagnostics process include
configuration verification, communications
pathway tests, signal pathway testing, and SMU
source-measure tests. Even the cable interface
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SEMICONDUCTOR
Standard 9139A Probe Card Adapter
The standard probe card adapter (PCA) for the S530 parametric test systems is the proven Model
9139A. Several key features and performance advantages have made it the industry’s leading choice of
PCA for more than 20 years:
Parametric Test Systems
and PCA are included in the diagnostics process
to ensure complete system functionality. This
diagnostics process is designed to detect and
localize a wide range of system problems, speed
troubleshooting, and maximize uptime.
reliability industrial controller including the
RAID (Redundant Array of Independent Disks)
option, designed to maintain a mirror of the
master drive at all times. In the event of a drive
failure, the mirror drive becomes the master
and the user is notified that a drive replacement
should be scheduled immediately. With a RAID
mirror drive, a failed drive represents a scheduled repair rather than a downed system.
High Voltage Instrument
Protection Modules
The S530 High Voltage System contains a 1kV
SMU that might be used on one terminal of a
DUT while applying a 200V SMU or the CVU to
another terminal. If a test sequence or a failed
DUT presents too much voltage to one of these
lower voltage instruments, serious instrument
damage is possible. To minimize the potential
for these problems, Keithley engineers have
developed protection modules that prevent
damaging voltages from harming the 200V SMU
instruments and CVU without compromising
their low-level measurement capabilities.
Industrial PC with RAID Mirror Drive
Even the highest quality disk drives are subject
to routine failures, so regular system backups
are critical. S530 systems incorporate a high
Support Services and Contracts
Keithley’s worldwide network of service and
applications professionals provides expert
support services ranging from initial installation
and calibration to repairs and test plan
migration services. These services maximize
system utilization and uptime while reducing
your overall cost of ownership.
• Installation and Probe Station Integration
Services – Includes the setup and verification
of the system, as well as probe station
integration. This includes setting up probe
station communications and installing the
probe card adapter.
• Calibration Services – All S530 Parametric
Test Systems are calibrated onsite by a
certified Keithley field service engineer.1
Keithley provides a range of internationally
recognized accredited calibration services,
including A2LA (American Association
for Laboratory Accreditation) accredited
calibration.2
• Repair Services – Repair services ranging
from on-site service contracts to self-service
module-swaps are available.
• Test Plan Migration Services – Keithley’s
experienced applications engineers are skilled
at converting your existing test plans to the
S530 system software environment. This
includes conversion of data objects like user
test libraries, wafer description files, cassette
plans, etc.
• Correlation Studies – Keithley applications
engineers can perform correlation studies,
comparing your existing parametric test
system’s capability to the S530’s and analyzing
the underlying performance differences.
1. While most components of the system are calibrated on site, certain components are calibrated at one of Keithley’s worldwide network of service facilities.
2.A2LA accredited calibration services are available in the United States and Germany.
Specification Conditions
Condensed Specifications
23°C ±5°C, 1 year.
RH between 5% and 60% after 1 hour warm-up.
System-level specifications are to the end of the Keithley PCA.
All specs are based on 1 year calibration cycle for individual
instruments.
Measurement Specifications @ 1 PLC (Power Line Cycle) unless
otherwise noted.
Capacitance Specifications are typical @ quiet mode.
Low Current System
General I/V Source Specifications
SEMICONDUCTOR
MAXIMUM OUTPUT POWER PER SMU: 20W (four quadrant
source or sink operation).
COMPLIANCE: Compliance resolution and accuracy are determined by the corresponding range used.
MEASURE
Current
Range
1A
100mA
10mA
1mA
100µA
10µA
  1µA
100nA
10nA
1nA
100pA
Max.
Voltage
200 V
200 V
200 V
200 V
200 V
200 V
200 V
200 V
200 V
200 V
200 V
Resolution
10µA
1µA
100µA
10nA
1nA
100nA
10pA
1pA
100fA
10fA
1fA
Voltage
Range
200V
20V
2V
200mV
Max.
Current
100 mA
  1 A
  1 A
  1 A
Resolution
1mV
100µV
10µV
1µV
Capacitance
10pF
100pF
1nF
10nF
100nF
0.03%
0.02%
0.02%
0.02%
0.02%
0.03%
0.03%
0.06%
0.15%
0.15%
0.15%
Accuracy
+  1.5mA+ 1.3pA/V
+ 20.0 µA+ 1.3pA/V
+ 2.5 µA+ 1.3pA/V
+200.0 nA+ 1.3pA/V
+ 25.0 nA+ 1.3pA/V
+ 1.5 nA+ 1.3pA/V
+500.6 pA+ 1.3pA/V
+100.6 pA+ 1.3pA/V
+ 3.6 pA+ 1.3pA/V
+880.0 fA+ 1.3pA/V
+760.0 fA+ 1.3pA/V
SOURCE
Resolution
20µA
2µA
200nA
20nA
2nA
200pA
20pA
2pA
200fA
20fA
Accuracy
0.05% + 1.8 mA + 1.3 pA/V
0.03% + 30.0 μA + 1.3 pA/V
0.03% + 6.0 μA + 1.3 pA/V
0.03% +300.0 nA + 1.3 pA/V
0.03% + 60.0 nA + 1.3 pA/V
0.03% + 5.0 nA + 1.3 pA/V
0.03% +800.6 pA + 1.3 pA/V
0.06% +100.6 pA + 1.3 pA/V
0.15% + 5.6 pA + 1.3 pA/V
0.15% + 2.6 pA + 1.3 pA/V
MEASURE
10kHz
0.50%
0.50%
0.50%
0.50%
1.00%
100kHz
0.50%
0.50%
0.50%
0.50%
1.00%
Accuracy
0.02%+ 50 mV
0.02%+ 5 mV
0.02%+ 480 µV
0.02%+ 355 µV
SOURCE
Resolution
5 mV
500µV
50µV
5µV
Accuracy
0.02%+ 50 mV
0.02%+ 5 mV
0.02%+ 730 µV
0.02%+ 505 µV
1MHz
1.00%
1.00%
4.00%
5.00%
5.00%
MAXIMUM SIGNAL LEVEL: 100mV.
DC VOLTAGE RANGE: ±30V.
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S530 specifications
S530 specifications
S530
S530
Parametric Test Systems
Voltage
Range
1000 V
200V
20V
2V
200mV
Max.
Current
  20 mA
  1 A
  1 A
  1 A
  1 A
MEASURE
Resolution
10mV
1mV
100µV
10µV
1µV
Capacitance
10 kHz
100 kHz
10pF
0.50%
0.50%
100pF
0.50%
0.50%
1nF
0.50%
0.50%
10nF
0.50%
0.50%
100nF
1.00%
1.00%
Using dedicated C-V paths.
MAXIMUM SIGNAL LEVEL: 100mV.
DC VOLTAGE RANGE: ±30V.
Accuracy
0.015%+ 50.2mV
0.015%+ 50.0mV
0.015%+ 5.0mV
0.02  %+ 374.0µV
0.015%+ 324.0µV
1 MHz
3.00%
2.00%
7.00%
5.00%
5.00%
PULSE GENERATOR UNIT OPTION
NUMBER OF CHANNELS PER PGU: 2.
MAXIMUM VOLTAGE: ±40V.
TYPICAL PULSE WIDTH RANGE: 100ns to 1s.
TYPICAL PULSE TRANSITIONS: 50ns to 200ms.
FREQUENCY ANALYSIS OPTION
TYPICAL FREQUENCY MEASUREMENT RANGE:
10kHz to 20MHz.
TYPICAL AMPLITUDE MEASUREMENT RANGE:
10mV RMS to 1V RMS.
LOW-VOLTAGE DMM OPTION
7.5 digit resolution.
LOWEST RANGES: 100mV with 10nV resolution. 1V with 100nV
resolution.
GENERAL
SOURCE
Resolution
50mV
5mV
500µV
50µV
5µV
Accuracy
0.02% +100.2 mV
0.02% + 50.1 mV
0.02% + 5.1 mV
0.02% +680.0 mV
0.02% +680.0 mV
SYSTEM CABINET SIZE: 60.0cm wide × 91.5cm deep ×
190.5cm high (23.7 in. × 36.0 in. × 75.0 in.).
NOMINAL LINE POWER: 100V, 115V, 220V, 240V (50Hz,
60Hz).
POWER CONSUMPTION: Rated at 2.4kVA for the 2kW
power distribution unit.
RECOMMENDED OPERATING CONDITIONS:.
Temperature: 23° ±5°C (73.4°F ±9°F).
Humidity: 30% to 60% relative humidity, non-condensing, after a two hour warm up time.
Refer to S530 Administrative Guide for more system and
facilities details.
S530 specifications
MEASURE
SOURCE
Current
Max.
Range
Voltage Resolution
Accuracy
Resolution
Accuracy
1A
  200 V 10µA 0.03% + 1.5mA+ 0.94 pA/V 20µA 0.05% + 1.8mA+ 0.94 pA/V
100mA
  200 V 1µA 0.02% + 20.0µA+ 0.94 pA/V 2µA 0.03% + 30.0µA+ 0.94 pA/V
20mA
1100 V 100µA 0.04% + 1.2µA+ 0.94 pA/V 500nA 0.05% + 4.0µA+ 0.94 pA/V
10mA
  200 V 100µA 0.02% + 2.5µA+ 0.94 pA/V 200nA 0.03% + 6.0µA+ 0.94 pA/V
1mA
1100 V 10nA 0.03% +200.0 nA+ 0.94 pA/V 50nA 0.03% +300.0 nA+ 0.94 pA/V
100µA
1100 V 1nA 0.03% + 25.0 nA+ 0.94 pA/V 5nA 0.03% + 60.0 nA+ 0.94 pA/V
10µA
1100 V 100nA 0.03% + 1.5 nA+ 0.94 pA/V 500pA 0.03% + 5.0 nA+ 0.94 pA/V
1µA
1100 V 10pA 0.03% +504.1 pA+ 0.94 pA/V 50pA 0.04% +804.1 nA+ 0.94 pA/V
100nA
  200 V 1pA 0.06% +104.1 pA+ 0.94 pA/V 2pA 0.06% +104.1 pA+ 0.94 pA/V
10nA
  200 V 100fA 0.15% + 7.1 pA+ 0.94 pA/V 200fA 0.15% + 9.1 pA+ 0.94 pA/V
1nA
  200 V 10fA 0.15% + 4.4 pA+ 0.94 pA/V 20fA 0.15% + 6.1 pA+ 0.94 pA/V
100pA
  200 V 1fA 0.15% + 4.3 pA+ 0.94 pA/V
1 Specifications using high peprformance pathways. When the general purpose pathways are used:
– Maximum voltage is lilmited to 200V.
– Leakage increases by 3.6pA/V.
– Less accuracy in low er ranges (100pA through 1µA).
SEMICONDUCTOR
S530 specifications
High Voltage System 1
1.888.KEITHLEY (U.S. only)
www.keithley.com
A Greater Measure of Confidence
A Tektronix Company
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