SPECEL-2000-VIS-NIR Operating Instructions

SPECEL-2000-VIS-NIR Operating Instructions
Operating Instructions
SpecEl-2000-VIS-NIR
Revision 042009
Read this manual before you attempt to use this instrument
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1
Safety Instructions
Instructions: All the safety and operating instructions should be read before the unit is
operated. Before using the power supply for the first time check for transport
damage.
Warning:
All warnings on the unit and in the operating instructions should be adhered to.
Operating Environment:
Moisture:
The unit is designed for operation in dry rooms only
Ventilation:
The unit should be situated so that its location or position does not interfere with its proper
ventilation
Heat:
The unit should be situated away from radiators, hot bodies, ovens or other heat sources
Power sources:
The unit should be connected to a power supply only of the type described in the operating
instructions or as marked on the unit
Object and liquid entry:
Care should be taken that objects do not fall, or liquids spilled into the enclosure through
openings.
Contents:
Your package should contain
SpecEl-2000-VIS-NIR
SpecEl Power Supply
Power Cable with Country Connector
Computer with Keyboard and Mouse
USB Interface Cable
Serial Interface Cable (male-female)
Serial Interface Cable (female-female)
Software CD
SpecEl-2000-VIS-NIR Operating Instructions
Scout Software CD
Scout Protection Key (USB-Dongle)
Scout Manual
Unpacking:
1. Unpack your new assembly carefully. Dropping this instrument can cause permanent
damage
2. Inspect the outside of the instrument and make sure that there is no damage to your
unit. In case of damage contact the dealer immediately and DO NOT USE THE
INSTRUMENT!
3. Use this instrument in a clean laboratory environment
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Instrument Description and Options
SpecEl-2000-VIS-NIR is a system to extract the thickness and optical data of thin and transparent
layers on different plane substrates
2.1
Description of Measurement Principle
In general ellipsometry is a non-contact, non-destructive, optical techniques for the
characterization of thin films on surfaces. When a surface or interface is struck by polarized light,
ellipsometers measure the change of the reflected light beam by detecting and quantifying the
change in the amplitude ratio and phase induced by the reflection of light on the sample surface.
In case of a spectroscopic ellipsometer like the SpecEl-2000 these changes are measured not
only for different polarization angles but also over a wide range of spectral wavelength.
Spectroscopic Ellipsometer requires neither reference nor reference beam.
3
SpecEl-2000 options
•
Measurement of multi layers (weakly absorbing or transparent) on top of a substrate
•
Highly accurate thickness measurements between 1nm (10Å) up to about 10µm with a
resolution of 0,1nm (1Å).
•
Different solution algorithms
•
Online measurements (optional)
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Optional available Accessories
4.1
SpecEl-2000-VIS-NIR System
Vision-Option
Video microscopy, with Zoom-Objective, integrated light source, frame grabber and Software
Module.
MicroSpot
Reduces the standard spot size of 0,3x1,2mm to a spotsize of 200x400µm, with motorized
z-axes (10mm), and autofocus capabilities. This Option is only useful in combination with the
Option SpecEl-Vision.
Reference
Si-SiO2-Step-Wafer , 5 Steps 0-500nm, Calibrated
4.2
Software SpecEl
SpecEl
User-friendly, simple-to-use 32-bit Windows™2000 / XP Software
For Ex Situ direct measurement of thickness and n & k coefficients, recipe structure,
administrator/user capabilities.
SpecEl-Online
Online software module for In-Situ measurements (requires SpecEl Software) Online display of
XY-graphs and histograms of layer thickness and removal rate. End point detection, on-line check
of layer thickness. Recipe, result list, statistics with ASCII-data transfer.
SpecEl-Vision
Software module for video microscopy, with zoom-objective. Video image is displayed as a
selectable Window in the main SpecEl user screen. (Requires hardware option: Vision-Option with
integrated light source and frame grabber)
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System Setup and Installation
5.1
System Description
2
1
4
3
1
Satellite 1 (sending module, polarizer)
2
Satellite 2 (receiving module, analyzer)
3
Chuck
4
Power switch ON/OFF – for SpecEl light source only
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5.2
Installation
The ellipsometer system consists of the main device, the power supply and the system controller
(PC). Connections between computer and ellipsometer are established through one 9-pin D-Sub
connector cable and one USB-cable that run between the serial port of the PC and the
corresponding plugs on the backside of the system.
Power supply connection between SpecEl and Power Supply
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Back view of PC cable connectors
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Cable connection between SpecEl and PC
1. Connect the USB cable between the PC USB-port and the SpecEl main system
2. Connect the Serial cable from COMport 2 of the PC to the serial port of the SpecEl main
system
3. Connect the Power Unit-EL cable to the SpecEl main system
4. Connect the power cable of the Power Unit
5. Connect the power cable of the PC
6. Connect the power cable of the Mapping-Unit
7. Connect the serial cable from Com port 1 of the PC to the serial port of the Mapping table
Switch On Instruction
After all cables are connected as described above, the PC and the ellipsometer can be switched
on. To avoid problems, PC and ellipsometer should use a common power line connection. Please
tighten all plugs with the corresponding screws to secure proper connection.
Starting Sequence:Wait until the computer is ready with booting. Switch on the SpecEl - light
source [4] at front side of instrument. Now start the SpecEl software by double clicking on the
SpecEl icon
Chuck Height Adjustment
The default height setting is for wafers!
The SpecEl-2000 system accepts a wide range (±1,5mm) of height difference of sample thickness.
If this tolerance is not enough to achieve a good signal, the chuck height can be adjusted by
rotating the bottom part of the stage using the three height adjustment knobs.
Substrate
See chapter 7.2 Fehler! Verweisquelle konnte nicht gefunden werden. for the height
adjustment procedure to get an optimized signal.
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Starting the SpecEl Software Start the program by double clicking on the ElliCalc icon on your
desktop.
First the following dialog box informs you that the instruments is initializing. This takes several
seconds for resetting the motors, etc.
If the SpecEl software does not start after this initialization message, please check that the SpecEl
system has power. If the system was without power, stop the ElliCalc.EXE Software by using the
Task Manager of Windows 2000 / XP (Ctrl + Alt + Del) and start the software again after turning
on.
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6
Software
6.1
The Main User Interface with Scout
The working area on the screen is divided into two sections. A general screen for ellicalc
measurement and in the upper left corner a screen view for scout.
6.2
The Main User Interface without Scout
(File: Load Ellicalc Layer recipe)
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On the right side you find the button edit structure for edit the layer structure
Click with the left mouse button, the edit layer structure button opens.
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Basic features of ellicalc
Basic features of ellicalc
7.1 Init
This button performs 2 tasks:
• initialize the motors for polarizer and analyzer (e.g. end positions)
• automatically set the integration times to good values (so there is no need to press “auto
intensity” directly after an init procedure).
hint:
If you change your sample you may run into saturation of the spectrometer = a (nearly) horizontal
part in some of the measured curves near to the upper limit of the plot.
7.2 Continuous on and adjust sample stage height
Put the reference stepwafer (uncoated position) on the chuck and press the continuous on
button to get the maximum intensity by adjusting the sample stage height.
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7.3 Auto intensity
This option automatically adjusts integration times.
This button has to be pressed if you use a completely different sample (each sample has a
different reflectivity, so a different integration time). Normaly the “init button” already has performed
such an auto intensity procedure.
If your sample is of the same type as your last sample (=has nearly the same reflectivity) it is not
necessary to press this button.
AutoIntensity tries to get 75% of the maximum allowed value.
7.4 Simulate
This routine simulates a spectrum.
• in SCOUT-mode:
from the .sc2-layer recipe data within SCOUT
• in ElliCalc internal mode: from the data in EditStructure (identical to the data in Thinfilm.inifile)
Hint:
If you want to have a short check which structure is simulated at the moment, put the mouse
cursor over the appropriate layer for some seconds and you see the layer thickness.
OR:
Leave your mouse cursor for some seconds over the button SIMULATE and look at the text in the
status bar.
7.5 Measure
This routine measures the ellipsometric spectra of your test device.
If you use a double spectrometer, you had to adjust the crossover wavelength. Below this
wavelength the data are collected from channel A ("master spectrometer"), above this
wavelength they are collected from channel B ("slave spectrometer").
7.6 Analyze
This routine analyzes a spectrum (either
simulated or measured) within the data
extraction limits.
• In SCOUT-mode: SCOUT is doing the
calculations. The structure that is simulated
may only be changed within SCOUT.
• In ElliCalc’s internal mode: ElliCalc is doing
the calculations (only thickness at the
moment)
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Hint:
To have a short check which structure is simulated at the moment, put the mouse cursor over the
appropriate layer for some seconds and you see the layer thickness.
OR:
Leave your mouse cursor for some seconds over the button SIMULATE and look at the text in the
status bar.
7.7 Continuous mode
The continuous button switches between continuous mode (=red button) and “stop continuous”
(button =black). Then there will be a continuous measurement of the signal (necessary to adjust
the height and tilt of your stage !!)
All others buttons of ElliCalc are disabled until you finish the continuous mode.
Fitness
Any extraction of parameters is accompanied by a value of "fitness". This is the sum of the mean
square deviations between measured and simulated curve (normalized to the range of
extraction). The fitness is a rough guide whether your thickness value is "good" or not.
In the file “Thinfilm.ini” you will find 3 entries in section [fit]:
Failure_RedLevel=1
Failure_YellowLevel=0.1
RYG_LevelsAreDisplayed=False
If you change the variable RYG_LevelsAreDisplayed from “False” to “True” (in main menu
“Fitparameters”), the usual rainbow pattern on the screen will disappear and a simple color will
show up.
• If the fitness is below Failure_YellowLevel=0.1 you will see a GREEN color.
• If the fitness is between Failure_YellowLevel=0.1 and Failure_RedLevel=1 you will see a
YELLOW color.
• If the fitness is above Failure_RedLevel=0.1 you will see a RED color
Attention:
If you measure very thick layers (with a good correlation between maxima positions, but bad
correlation between signal heights) you may end up with high values of fitness, but nevertheless
the thickness results may be o.k.
For detailed measurement information, see in the ElliCalc manual!
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8
Lamp Replacement
Lamp Replacement
Replacement of Halogenmodule SpecEl-2000-VIS/NIR-BM
General information for the use of halogen light bulbs.
Lifetime is approx. 1000h
The warm-up time is within seconds for measurement ≥ 50nm (500Ǻ). For high performance and ≤ 50nm
(500 Ǻ) wait approx. 10 min for lamp stabilization)
To save lifetime you can switch on and off the light source by using Light source switch for every
Measurement campaign(it is not necessary to let run the light bulb all the time)
Replacement
1. Shut down all power
2. Disconnect the unit from the power
supply
3. Open the black SpecEl housing by
removing the screws (5x)
1
3
1. Unplug the HL-Module connector
2. Unscrew the two HL-Module
screws
3. Unplug the fiber very carefully
4. Replace complete SpecEl-2000VIS-NIR-HL Module
5. Do all steps again in reverse
direction
6. Calibrate the ellipsometer again.
2
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Order Information:
SpecEl-2000-VIS/NIR-BM
SpecEl-2000-VIS/NIR-B
9
(Halogenlightsource module for replacement
(Replacement of the bulb at the supplier or factory side)
Trouble Shooting
No Correct Measurement
Go to configuration and run the Automatic mode for adapt Integration time and do measuring
again.
− Check recipe
− Check the correct sample stage height , see chapter 7.2 continuous on and adjust sample stage
height and try it again
− Light source may be weak, replace light source , see chapter 8 Lamp Replacement
− If there has been a mains power interruption, restart you PC, switch off and on the SpecEl2000-VIS-NIR system
Calibration (Init)
The calibration needs some time, please wait till the progress bar is ready .
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Contact
Ocean Optics B.V.
Maybachstrasse 11
D-73760 Ostfildern
Germany
11
Phone:
+49 (0)711 34 16 96 0
Fax:
+49 (0)711 34 16 96 85
E-Mail: [email protected]
Warranty
Mikropack GmbH warrants to the Original User of this instrument that it shall be free of any defects
resulting from faulty manufacture of this instrument for a period of 12 months from the original data
of shipment. There are no warranties for the Halogen Bulb (Spare Part: SpecEL-2000-VIS-HM and
SpecEl-2000-VIS-HB).
This instrument should not be used for any Clinical or Diagnostic Purposes. Data generated
is not warranted in any way by Mikropack GmbH. Any defects covered by this Warranty shall be
corrected either by repair or by replacement, as determined by Mikropack GmbH.
There are no warranties which extend beyond the description herein.
This Warranty is in lieu of, and excludes any and all other warranties or representation, expressed,
implied, or statutory, including merchantability and fitness, as well as any and all other obligations
or liabilities of Mikropack GmbH, including, but not limited to special or consequential damages. No
person, firm, or corporation is authorized to assume for Mikropack GmbH. Any additional obligation
or liability not expressed provided for herein except in writing duly executed by an officer of
Mikropack GmbH.
Warranty Handling
Clear with your local distributor the problem or fault.
In case of warranty your local distributor will give you a RMA number.
Send your instrument free of charge and insured to your local distributor.
Please take care of secure and proper packaging. Use a palette!
Your distributor will inform you on delivery time. If there is repair out of warranty you will be
informed about repair cost. The system will be on hold till you have officially ordered the repair.
The system will be send back to you free of transport cost and insured (in case of warranty)
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