OperatingManual SC5 15 30 60D

OperatingManual SC5 15 30 60D
Oil-free Vacuum Pump
SCROLLVAC SC 5 D
SC 15 D
SC 30 D
SC 60 D
Operating Instructions GA01423_002_A2
Part Nos.
133 000
133 001
133 002
133 003
133 004
133 008
133 100
133 101
133 102
Table of contents
Page
General Safety Information
3
1
Description
7
1.1
Design and Operation
7
1.2
Component Designations of the Individual Pump Types
9
1.2.1 Ordering Information
1.3
Technical Data
9
10
1.3.1 Motor Data
11
1.3.2 Dimensions
14
2
Transport and Storage
17
3
Installation
18
3.1
Checking the Product
18
3.2
Ambient Conditions
20
3.3
Setting up the Pump
21
3.4
Electrical Connections
22
3.4.1 Single-phase Motors
22
3.4.2 Three-phase Motors
25
3.5
Connection to the Vacuum System
28
4
Operation
29
4.1
Start-up
30
4.2
Pumping
31
4.3
Purge Gas Operation (pumping of vapours)
31
4.4
Shutdown
33
5
Maintenance
34
5.1
Table - Maintenance
36
5.2
Oerlikon Leybold Vacuum Service
37
5.3
Waste Disposal
37
6
Troubleshooting
38
7
Spare Parts
39
EC Conformance Declaration
40
Declaration of Contamination
42
Figures
The references to diagrams, e.g. (4/1/2) consist of Chapter No., consecutive
Fig. No. within the chapter and the Item No. in the figure in that order.
We reserve the right to modify the design and the specified data. The illustrations are not binding
2
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Safety information
General Safety Information
Indicates procedures that must be strictly observed to prevent hazards to
persons.
Warning
Indicates procedures that must be strictly observed to prevent damage
to, or destruction of the appliance.
Caution
The Oerlikon Leybold Vacuum oil-free scroll vacuum pumps are designed for
safe and efficient operation when used properly and in accordance with this
manual. It is the responsibility of the user to carefully read and strictly observe all safety precautions described in this section and throughout the
manual. This product must be operated and maintained by trained personnel
only. Consult local, state, and national agencies regarding specific requirements and regulations. Address any further safety, operation and/or maintenance questions to your nearest Oerlikon Leybold Vacuum office.
Failure to observe the following precautions could result in serious
personal injury.
Never pump toxic, explosive, flammable, corrosive gases, chemicals,
solvents or powders. Flowing substances, explosion or fire can cause
bodily injury.
Warning
Install the pump in an area without explosive or flammable substances.
Otherwise, it can cause explosion or fire.
Wiring must be done by a qualified electrician. Otherwise there is the risk
of suffering an electric shock.
Prevent short-circuits with a ground fault circuit interruptor (GFCI) of proper capacity.
Failure to do so can result in electric shock or fire.
Ask a specialist to perform repairs. Otherwise there exists the risk that the
pump may fail, is damaged or its service life is severely reduced. Trained
customers may perform maintenance themselves.
Be sure to install a main disconnect switch. Failure to do so can result in
damage, fire, or injury.
Be sure to disconnect the electric source before changing the wiring or
before an inspection. Failure to do so can result in electric shock or
damage by the rotating fan.
Disconnect from mains power
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
3
Safety information
Ensure grounding
Ensure proper grounding of the pump. Otherwise there exists the risk of
suffering an electric shock or igniting a fire.
Do not touch
Never put fingers or foreign matter into the pump's inlet or the clearance
of fan blades. If done, it can cause injury.
Avoid moisture
Install in an area which is not exposed to moisture such as rain or steam.
Exposure to moisture can cause eIectric shock.
Do not alter
Never alter the equipment. Modifications can damage the equipment or
shorten its service life.
Be sure to check wiring diagram before connecting a power supply.
Failure to do so can result in damage.
With a thermal protector
Pumps with single-phase motors have an internal thermal protector.
These motors restart without warning after the protector trips back.
Be sure to switch off the electric power before maintenance or inspection.
Failure to do so can result in electric shock or bodily injury by rotating
objects.
Use at designated temperature
Use at ambient temperatures of 5 - 40 °C (during operation). Operating
outside of this range can cause damage or shorten service life.
Always operate the pump with the fan and terminal covers in place.
Always operate the single-phase pumps with the capacitor cover in place.
Conduct periodic maintenance
Conduct periodic maintenance and inspections. Failure to do so can
cause damage or reduced service life.
Do the maintenance after the pump has fully cooled down. Performing
maintenance on a hot pump can cause burns.
Start or stop after closing isolation valve
4
Be sure to close the isolation valve between pump and vacuum system
(chamber) during startup and shutdown. If this valve is open, debris attached to the inside of pump can be drawn back into the vacuum chamber.
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Safety information
SC 5 D
Single-phase
Terminal cover
Electric
shock
Capacitor
cover
SC 15 D
Single-phase
Capacitor
cover
Terminal cover
Electric
shock
Cover for operating
hours counter
SC 15 D
Three-phase
Terminal cover
Electric
shock
Cover for operating hours
counter
Always keep warning stickers clean. If they become dirty or lost, replace them with new ones.
If you need stickers, contact Oerlikon Leybold Vacuum.
Fig. 0.1 Placement of the warning stickers
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
5
Safety information
SC 30 D
Terminal
cover
Single-phase
Cover for operating
hours counter
Electric
shock
Capacitor cover
SC 30 D
Three-phase
Terminal cover
Electric
shock
Cover for operating hours
counter
SC 60 D
Three-phase
Terminal cover
Electric
shock
Cover for operating hours
counter
Always keep warning stickers clean. If they become dirty or lost, replace them with new ones.
If you need stickers, contact Oerlikon Leybold Vacuum.
Fig. 0.2 Placement of the warning stickers
6
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Description
1
Description
1.1 Design and Operation
The SCROLLVAC vacuum pumps are oil-free vacuum pumps. Each
SCROLLVAC consists of two Archimedes spirals offset within each other by
180 °. Thus several crescent-shaped pockets of different sizes are created.
With the aid of an eccentric drive, the second spiral orbits about the fixed
spiral thereby reducing, respectively increasing the volume of the pockets
whereby the gases are conveyed from outside to inside thereby being compressed.
SC 5 D
Inlet
Fan
Carrying handle
Fan cover
Motor
Fan
Fixed scroll (2)
ON /OFF switch under the cover
Venting connection
Operating hours counter
Orbiting scroll
Fixed scroll (1)
Inlet flange
(DN 25)
Direction indicating arrow
Motor
Fan cover
Venting connection
Exhaust flange
(DN 16)
Motor terminal box
Fig. 1.1 Component designations (SC 5 D)
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7
Description
Motor
Direction indicating arrow
SC 15 D
Inlet flange
DN 25
Carrying handle
Motor terminal box
Fan cover
Venting connection
Outlet flange
DN 16
Operating hours counter
Rubber support
Direction indicating arrow
SC 30 D
Fan cover
Venting connection
Crane eyelet
Motor
Motor terminal box
Inlet flange
DN 40
Outlet flange
DN 25
IN plate
OUT plate
Frame
Fig. 1.2 Component designations (SC 15 D/30 D)
8
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Operating hours counter
Description
SC 60 D
Direction
indicating arrow
Drehrichtungsmarkierung
Motor
Motor
Inlet
flange DNDN
40 40
KFKF
Einlassflansch
Venting
connection
Belüftungsanschluss
Crane
eyelet
Kranöse
Fan
cover
Ventilatorabdeckung
Motor
terminal box
Motoranschlusskasten
Fan opening
Frame
Rahmen
Outlet
flange DN DN
40 KF
Auspuffflansch
40 KF
Operating
hours counter
Betriebsstundenzähler
Fig. 1.3 Component designations (SC 60 D)
1.2
Component Designations of the Individual Pump Types
1.2.1 Ordering Information
SC 5 D, single-phase motor, cable with Schuko plug
SC 15 D, single-phase motor, cable with Schuko plug
SC 30 D, single-phase motor, cable with Schuko plug
Part No.
133 000
133 001
133 002
SC 15 D, three-phase motor
SC 30 D, three-phase motor
SC 60 D, three-phase motor
133 003
133 004
133 008
SC 5 D, single-phase motor, cable with NEMA plug
SC 15 D, single-phase motor, cable with NEMA plug
SC 30 D, single-phase motor, cable with NEMA plug
133 100
133 101
133 102
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
9
Description
1.3
Technical Data
Model
SC 5 D
SC 15 D
SC 30 D
SC 60 D
50 Hz
60 Hz
50 Hz
60 Hz
50 Hz
60 Hz
50 Hz
60 Hz
Displacement
(swept volume)
l · min-1
m3 · h-1
cfm
90
5
3.1
108
6,48
3.8
250
15
8.8
300
18
10.6
500
30
17.6
600
36
21.2
1000
60
35.3
1200
72
42.3
Pumping speed1
l · min-1
m3 · h-1
cfm
80
4,8
2.8
93
6,2
3.6
210
13,6
8
230
16,4
9.6
420
26,3
15.4
500
31,5
18.5
880
52
31.0
1020
62
36.0
Ultimate pressure
Pa
mbar
Torr
#5
# 0.05
# 0.037
# 1.6
# 0.016
# 0.012
# 1.0
# 0.01
# 0.0075
# 1.0
# 0.01
# 0.0075
mbar · l · s-1
1.0 · 10-6
1.0 · 10-6
1.0 · 10-6
1.0 · 10-4
Leak rate3
Max. inlet pressure
Atmospheric pressure
Ambient operating
temperature range
°C
5 - 40
5 - 40
5 - 40
5 - 40
Gas temperature at inlet
°C
max. 50
max. 50
max. 50
max. 50
Inlet connection
DN
25
25
40
40
Exhaust connection
DN
16
16
25
40
20
20
Cooling
Protection class
Air cooling
IP
20
20
Class of equipment
Class 1
Miscellaneous
Water vapour tolerance
at 25 °C, humidity 60 %,
with opened purge gas4
10
With operating hours counter und
purge gas connection
g/day
5
25
25
25
l · min-1
9
10
10
10
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Description
1.3.1 Motor Data
Motor data
SC 5 D
Type
Single-phase induction motor / Motor 4P / totally enclosed
insulation class B IP 44
thermal protector TP 212 - automatic reset type
Power consumption
W
150
Voltage
V
100
115
200
230
2.6
2.1
–
2.2
1.3
1.1
1.6
1.1
–
1740
1430
1730
1440
1740
Rated current
50 Hz
60 Hz
A
A
Speed at
50 Hz
60 Hz
min-1
min-1
1430
1730
≤ 52
dB(A)
≤ 57
Noise level2 at 1m dB(A)
with purge gas open (ON)
Direction of inlet
Vertical
Dimensions (L x W x H)
Weight
mm
308 x 214 x 225
kg
14
Part numbers
133 100
Motor Data
133 000
SC 15 D
Single ph. induction motor 4P
totally enclosed
insulation class B / IP 44
thermal protector TP 212
automatic reset type
Three-phase induction motor5 4P
totally enclosed
insulation class B / IP 44
kW
0.4
0.4
V
100
115
200
230
200
208
230
380
400
415
460
4.8
4.8
4.3
2.6
2.8
2.4
2.4
1.6
1.9
1.9
1.8
0.9
-
0.9
-
1.0
-
1.0
1450
1730
1420
1660
Type
Power consumption
Voltage
Rated current
50 Hz
60 Hz
A
A
Speed at
50 Hz
60 Hz
min-1
min-1
1440
1430
1710 1740 1700
# 58
dB(A)
# 66
Noise level2 at 1m dB(A)
with purge gas open (ON)
Direction of inlet
Dimensions (L x W x H)
Weight
Part numbers
1440 1440
1660 1690
-
1440
1720
Vertical
mm
kg
400 x 252 x 336
25
133 101
370 x 252 x 336
23
133 001
133 003
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
11
Description
Motor Data
SC 30 D
Single-phase induction motor 4P
totally enclosed
insulation class B / IP 44
thermal protector TP 212
automatic reset type
Three-phase induction motor5 4P
totally enclosed
insulation class B / IP 44
kW
0.6
0.6
V
100
115
200
230
200
208
230
380
400
415
460
8.5
10
8.6
4.3
4.8
3.9
4.0
2.7
2.8
2.6
2.5
1.57
-
1.57
-
1.63
-
1.47
Type
Power consumption
Voltage
Rated current
50 Hz
60 Hz
A
A
Speed at
50 Hz
60 Hz
min-1
min-1
1430
1430
1660 1720 1690
dB(A)
dB(A)
# 62
# 70
Noise level2 at 1m
with purge gas open (ON)
1450
1730
1460 - 1470 1470
1740 1740 1760 -
1470
1770
# 60
# 68
Direction of inlet
Horizontal (arranged at the side)
Dimensions (L x W x H)
Weight
mm
kg
Part numbers
443 x 328 x 372 (443 x 298 x 397)
372 x 328 x 372 (372 x 298 x 397)
44
38
133 102
Motor Data
133 002
133 004
SC 60 D
Three-phase induction motor5 4P
totally enclosed
insulation class B / IP44
Type
Power consumption
Voltages
kW
1.4
V
200
208
230
380
400
415
460
5.5
5.8
-5.8
-5.7
3.3
--
3.6
--
3.8
--
-3.5
1470
--
1470
--
Rated current
50 Hz
60 Hz
A
A
Speed at
50 Hz
60 Hz
min-1
min-1
1460 --1730 1740 1750
dB(A)
dB(A)
67
74
Noise level2 at 1m
with purge gas open (ON)
Direction of inlet
Dimensions (L x W x H)
Weight
Part numbers
1470
--- 1760
Horizontal (arranged at the side)
mm
kg
467 x 390 x 421
60
133 008
*Cannot operate at 115V/50 Hz, 208V/50Hz, 230V/50Hz, 460V/50 Hz, 380V/60 Hz or 415V/60 Hz
Note
Note
Note
Note
Note
12
1:
2:
3:
4:
5:
Pumping speed remains unchanged independently of whether the purge gas inlet is open or closed
Noise level is measured at ultimate pressure in an anechoic room
The leak rate is measured when the pump is stopped and the purge gas supply is closed (condition as delivered)
When the pump is delivered, the purge gas inlet is closed
The three-phase motors do not have internal thermal protection. Be sure to install the protection from the side of the remaining system.
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Description
100,00
m3/h
50 Hz with and without Purge
60 Hz with and without Purge
Pumping Speed
SC60D
10,00
SC30D
SC15D
1,00
SC5D
0,10
0,001
0,010
0,100
1,000
Pressure
10,000
100,000
1000,000
mbar
Fig. 1.4 Pumping speed curves of the SCROLLVAC SC 5 D to SC 60 D
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
13
Description
1.3.2 Dimensions
SC 5 D
(Dimensions in mm)
Fig. 1.5 Dimensional drawing of the SC 5 D
14
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Description
SC 15 D
Three-phase
3-phasig
S1-phasig
ingle-phase
(Dimensions in mm)
Fig. 1.6 Dimensional drawing of the SC 15 D
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
15
Description
SC 30 D
Three-phase
3-phasig
Single-phase
1-phasig
(Dimensions in mm)
Fig. 1.7 Dimensional drawing of the SC 30 D
16
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Description
SC 60 D
467
390
133
218
421
285
163
42
55
350
320
168
(Dimensions in mm)
Fig. 1.8 Dimensional drawing of the SC 60 D
2
Transport and Storage
Lift the pump only at the provided handles, respectively crane eyelets.
Warning
Exclusively use lifting facilities with sufficient lifting capability. Never stand
under the hanging pump when it is being moved.
Avoid any other orientations during transportation.
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
17
Installation
SC 5 D
Inlet
Plastic bag
Clamp
Blank flange
O-ring
Silencer
Outlet
O-ring
Blank flange
SC 15 D
Plastic bag
Clamp
Inlet
Clamp
Blank flange
O-ring
Silencer
O-ring
Blank flange
Clamp
Outlet
Fig. 3.1 Product check (SC 5 D / SC 15 D)
Caution
3
Installation
3.1
Checking the Product
Check that the package is right-side-up and then open it.
Check that model of the product is one that you ordered.
Check that there is no damage. If there is any damage, file a damage
claim with the carrier.
Remove inlet blank flange and outlet blank flange. If you operate
the pump with blank flanges in place, it can cause damage.
Check that the silencer for the purge gas inlet is present in the plastic
bag.
18
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Installation
SC 30 D
Plastic bag
Silencer
Blank flange
Inlet
O-ring
Clamp
Clamp
O-ring
Blank flange
Outlet
SC 60 D
Plastic bag
Inlet
Outlet
60 D
1,4
8
60
72
O-ring
Clamp
Blank flange
Fig. 3.2 Product check (SC 30 D / SC 60 D)
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
19
Installation
3.2
Be careful about moisture
Ambient Conditions
Danger of electric shock.
Install in an area which is not exposed to moisture such as rain or steam.
Moisture on electric power connections can cause bodily injury by short
circuit or electric shock.
Warning
Danger of explosion and fire.
Install in an area which is not exposed to explosives, flammable gas, or
other related hazards. Otherwise, the pump can cause an explosion or
fire.
Temperature
Operate at an ambient temperature of 5 °C - 40 °C. Operating outside of
this ambient temperature range can cause damage, fire or failure.
Ensure proper ventilation.
Install in a well-ventilated area. Poor ventilation can cause abnormal
overheating, fire or failure since the scroll pump is air-cooled.
Necessary ventilation air:
Avoid dust
SC 5 D
over 2 m3 · min-1
SC 15 D
over 4 m3 · min-1
SC 30 D
over 8 m3 · min-1
SC 60 D
over 12 m3 · min-1
Install in a proper location. Install in an area which is not exposed to dust or
corrosive gas. Failure to install in a proper location can result in damage or
failure.
Debris can clog silencers reducing the effectiveness of the purge gas.
Avoid direct
sunlight
20
Install in an area which is not exposed to sunshine. Direct sunshine can
cause high temperatures and failure.
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Installation
Angle < 5°
Fig. 3.3 Install on a firm, level floor
3.3
Setting up the Pump
The SC 5 D and SC 15 D are equipped with a carrying handle for transporting. The
SC 30 D and SC 60 D are provided with a crane eyelet for transporting and placement.
Use lifting devices with sufficient carrying capacity. Never stand beneath
the suspended pump while it is being moved.
Warning
The place where the pump is installed should be free of dust or steel, stone
and wood dust. Moreover, the location should be free of corrosive gases.
Install the pump on a stable horizontal floor surface (sloping by no more than
5 °, see Fig. 3.3). Installing the pump on a sloping surface can cause the
pump to fail.
If the floor is unstable, secure the pump by using
■ 4 x dia. 7 mm holes in the pump base (SC 5 D) or
■ 4 x dia. 11 mm holes in the pump base (SC 15 D) or
■ 4 x holes in the pump base for M10 screws and (SC 30 D)
■ 4 x holes in the pump base for M10 screws and (SC 60 D).
When not observing these installation conditions, damage may occur, or
performance or service life may be impaired.
Caution
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
21
Installation
3.4
Warning
Electrical Connections
Wiring must be done by a qualified electrician. Otherwise, electric shock
or fire may occur.
Turn off power
Turn off the incoming main electrical power before wiring the pump.
Failure to do so can cause injury from electric shock.
Check voltage
Check eIectric power and voltage before doing the wiring.
The three-phase motor can be operated off two different mains voltages: either 200/380V 50 Hz or 208/460 V 60 Hz.
The single-phase motor can be operated off two different mains voltages: either 100/200V 50 Hz or 115/208-230V 60 Hz.
Check mains voltage and wiring.
3.4.1 Single-phase Motors
Warning
Be sure to install a reliable main disconnect switch (or breaker) for emergency stop. In addition, shut off the SC 5 D by turning off the switch on
the motor. Failure to do so can cause damage or fire.
The single-phase motor has an internal thermal protector. The motor
restarts without warning after the protector trips back.
CE Requirements
Min. circuit current capacity of conductor is 10 A. Max. branch circuit breaker
is 15 A (industrial rated).
Warning
22
Protect the motor by installing the recommended breaker (refer to Table
1). Failure to do so can cause electrical shock or fire.
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Installation
SC 15 D / SC 30 D
Link (two pieces)
Grounding connection
M5 screw
Connection for the electric power supply
M4 nut
Terminal block
SC 5 D
200-230 V mains connection
(EU wiring)
100-115 V mains connection
(US wiring)
Fig. 3.4 Single-phase connection
Table 1: Single-phase connection
V
Hz
Rated current for the mains circuit breaker - A
SC 5 D
SC 15 D
SC 30 D
100
50
3.0
6.0
10.7
100
60
2.5
6.0
12.5
115
60
2.5
5.4
10.8
200
50
1.5
3.0
5.4
200
60
1.3
3.2
6.0
230
50
1.9
2.7
4.9
230
60
1.3
2.7
5.0
Installation Involving Different Mains Voltages
This vacuum pump must be equipped with a mains circuit breaker in accordance with requirements of EN 60204-1. It is recommended to use a circuit
breaker as main breaker which is suitable for isolation according to EN
60947-2 and is equipped with an operating handle which is lockable in the
OFF position and complies with the other requirements of EN 60947-3.
Remove the terminal cover of the motor and check the terminal block inside.
The wiring diagram is shown inside the terminal cover.
You can change between 100-115 V and 200-230 V connection by changing
the links. If you want to change the connection, remove the four nuts for the
power terminal and change the links as illustrated in Figure 3.4. Two links are
used at the 200-230 V connection. Connect the power cord through the
cable-gland on the bottom side of terminal blocks.
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23
Installation
Viewed from the motor side, clockwise direction of rotation
Direction indicating arrow
Motor
Direction of rotation
Fig. 3.5 Checking the direction of rotation after having provided the wiring
Activate the emergency stop by the main disconnect switch or breaker.
Foreign matter
Inlet
Protect the motor with a breaker.
Use power cord and ground wire rated at greater than 10 A.
Use round type terminal.
Fit cable-gland.
Connect ground wire to ground terminal.
Fig. 3.6 Prevent foreign matter from entering
into the pump
Warning
After each modification of power supply cable wiring a new electrical
safety test has to be done according to the national rules.
Operate pump with inlet open, and check that air comes out from outlet.
If you plan to switch the pump ON-OFF with remote control, check the
pump's rotation direction before connecting it to the vacuum system.
Caution
24
When checking rotation direction, avoid dropping foreign matter into inlet.
Dropping foreign matter into the pump can cause failure.
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Installation
SC 15 D / 30 D / SC 60 D
Mains connection
Nut M4
Links
Terminal block
Grounding connection screw M5
208-230 V connection
(as delivered)
(Asia / USA)
380-460 V connection
(Europe)
Fig. 3.7 Three-phase connection
3.4.2 Three-phase Motors
For SC 15 D / 30 D / 60 D only
Be sure to install a reliable main disconnect switch (or breaker) which
meets the IEC standard for emergency stop. Failure to do so can cause
damage or fire.
Warning
CE Requirements
The 3-phase motor is not protected. External protection must be provided.
■ Min. circuit current capacity of the conductors is:
SC 15 D - 3-phase 7 A
SC 30 D - 3-phase 15 A
SC 60 D - 3-phase 15 A
■ The main circuit breaker must be rated for the following maximum
currents:
SC 15 D - 15 A
SC 30 D - 15 A
SC 60 D - 15 A
Protect the motor by installing the recommended breaker. Failure to do so
can result in injury from electrical shock or fire.
Warning
Use a power cord and ground wire of over 2 mm2 (rated at 7 A, 3-phase for
SC 15 D) / (rated at 15 A, 3-phase for SC 30 D) / (rated at 15 A, 3-phase
for SC 60 D).
When using power cords which are only rated for lower currents, there then
exists the risk of excessively heating the wires (risk of starting a fire).
Firmly fit proper round crimp style terminals to electric cord using the appropriate tool and connect to motor terminal. If the connection is loose, it can
cause bodily injury or electrical fire.
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
25
Installation
Table 2: Three-phase connection
Warning
V
Hz
Rated current for mains power circuit breaker - A
SC 15 D
SC 30 D
SC 60 D
200
50
1.8
3.1
5.9
200
60
2.2
3,2
6.2
208
60
2.2
3.0
6.2
230
60
2.2
2.9
6.1
380
50
1.1
1.8
3.7
415
50
1.2
1.9
4.0
460
60
1.2
1.7
3.9
Be sure to connect the electric cord to the terminals by using cable-gland
the 20 mm dia. hole at motor terminal box. If the connection is loose, it can
cause bodily injury or electrical fire.
Firmly connected the ground cable of the power cord within the motor terminal box. If this connection is loose, this may then cause injury or electric
shock.
You can change to 208-230 V or 380-460 V connection by changing the
links. It is wired to 208-230 V connection when delivered to you. If you want
to change to 380-460 V connection, remove the electric source terminal M4
nuts and change the links as illustrated in Figure 3.8. Connect the power
cord through the cable-gland on the bottom side of terminal box. Connect
L1-L2-L3 to U1-V1-W 1 terminals of the motor, respectively.
Activate the emergency stop by the main disconnect switch or breaker.
Protect the motor with a breaker.
Use a power cord and ground wire rated for currents over 10A.
Use round type terminal.
Fit cable-gland.
Connect ground wire to ground terminal.
Warning
26
After each modification of power supply cable wiring, a new electrical
safety test has to be done according to the national rules.
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Installation
Viewed from the motor side, clockwise direction of rotation!
Direction of rotation
Direction indicating arrow
Motor
Fig. 3.8 Checking the direction of rotation after having provided the wiring
Foreign matter
Inlet
Fig. 3.9 Prevent foreign matter from entering into the pump
Operate the pump with inlet open, and check that air comes out from outlet.
If you plan to switch the pump ON-OFF with remote control, check the
pump's rotation direction before connecting it to the vacuum system.
When checking rotation, avoid dropping foreign matter into the inlet.
Dropping foreign matter into the pump can cause failure.
Caution
If the direction of rotation is wrong, ensure that the incoming power is OFF
and then interchange two of the input leads.
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
27
Installation
Additional purge
gas valve
Vacuum chamber
Vacuum pump
Exhaust line
Inlet
Isolation valve
(automatic valve)
Outlet
Fig. 3.10 Block diagram of the connection to the vacuum system
3.5
■
■
■
■
Connection to the Vacuum System
Inlet
Inlet
Inlet
Inlet
of
of
of
of
the
the
the
the
SC
SC
SC
SC
5 D is DN 25 and the exhaust is DN 16.
15 D is DN 25 and the exhaust is DN 16.
30 D is DN 40 and the exhaust is DN 25.
60 D is DN 40 and the exhaust is DN 40.
■ Install an isolation valve between the vacuum chamber and the pump's
inlet to prevent the drawback of debris from the vacuum pump into the
vacuum chamber during start-up or shutdown.
■ We recommend the use of an automatic valve as isolation valve which
closes during power failure to prevent the drawback of debris from inside
the pump into the vacuum chamber.
■ Install a purge gas valve between the isolation valve and the pump's inlet.
Opening this purge gas valve during operation removes dirt and water
vapour from the pump.
■ Use the clean connecting tubing between vacuum chamber and vacuum
pump. We recommend the use of flexible tubing between the inlet of
pump and the vacuum chamber so that the pump's vibration is not transmitted to the vacuum chamber.
■ When connecting an exhaust line to the outlet of the vacuum pump, we
recommend the following maximum straight length:
SC 5 D: 30 m DN 16 line
SC 15 D: 5 m DN 16 line
SC 30 D: 15 m DN 25 line
SC 60 D: 40 m DN 40 line
■ Make sure that the exhaust line is not clogged during operation.
■ Ensure that the pressure at the pump's exhaust is at atmospheric pressure.
28
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Operation
4
Operation
Warning
Do not pump hazardous gases to humans, or explosive, flammable, toxic
or corrosive gases or substances which contain chemicals, solvents or
powders. Pumping such gases can cause bodily injury from exposure to
harmful substances, explosion or fire.
Never put your fingers or foreign matter into ventilation holes of the fan
cover, motor set or clearance between cooling fans of stage 1 and stage
2. If done, you can injure your fingers or foreign matter can blow into your
eyes.
In order to ensure an adequate air supply, the front side of SCOLLVAC
SC 60 D must not be obstructed.
Caution
Pump clean gas!
SC 5 D / SC 15 D
SC 30 D / SC 60 D
Pump clean gas!
Fig. 4.1 Never pump hazardous gases
Finger, foreign matter
Finger, foreign
matter
Fan cover
Ventilation opening
for the motor
Finger, foreign
matter
Clearance for cooling fins of stage 1 and stage 2
Fig. 4.2 Hazardous points on the pump
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
29
Operation
Terminal
cover
Fan cover
Capacitor cover
Fig. 4.3 Never alter equipment
Never remove or alter safety equipment or covers.
Removing or altering this equipment can cause electric shock or bodily
injury by rotating objects.
Warning
Operate at the pump only with the fan cover and the terminal cover in
place.
Operate in the single-phase pump only with the capacitor cover in place.
4.1
Warning
Start-up
Remove blank flanges from the inlet and outlet before starting the pump.
Operation with blank flanges can cause damage.
If you will be pumping humid air or condensable vapors, open the purge gas
valve (refer to Sec. 4.3) before starting the pump as described below.
The pump takes 6-8 hours to reach its ultimate pressure during its initial
start-up or after a long idle period.
Close the inlet isolation valve and continue operation for further 6-8 hours.
Open the purge gas valve for 3-5 seconds to atmosphere 2-3 times per hour.
While the pump was off, moisture may have entered the pump extending the
time needed to reach ultimate pressure.
Close the isolation valve between the vacuum pump and vacuum chamber
during start-up and shutdown of pump. Otherwise, debris from the pump
can be drawn back into the vacuum chamber.
When restarting a pump that is already at operating temperature, open the
purge gas valve for 3-5 seconds to atmosphere before restarting the pump.
Otherwise, the pump's temperature can become unbalanced causing it to
fail.
30
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Operation
Proceed as follows to start the pump:
1. Close the isolation valve to prevent drawback of debris from the vacuum
pump into vacuum chamber (open the purge gas valve if one is installed).
2. Switch the vacuum pump ON.
3. Open the isolation valve (close purge gas valve if one is installed) and
pump the vacuum chamber.
4.2 Pumping
Operating the pump continuously near its ultimate pressure (for example,
backing a turbomolecular pump) can cause deposits of foreign matter or
moisture in the pump resulting in failure.
Operate the pump with the purge gas valve open (see Sec. 4.3 “Purge Gas
Operation”), or close the isolation valve and open the purge gas valve for 3-5
seconds to atmosphere several times once a day to remove foreign matter
from inside the pump.
Operate at specified temperature
When pumping vapour, the inlet gas temperature must be Iess than 50 °C.
When vapour temperature is more than 50 °C, install a chiller or trap in the
piping between the vacuum chamber and the pump to reduce the inlet
vapour temperature to less than 50 °C. Pumping vapour of over 50 °C can
cause failure.
4.3
Purge Gas Operation (pumping of vapours)
When pumping vapour, open the purge gas port of the SCROLLVAC. If
you pump vapour with the purge gas valve port closed, condensed moisture remains in the pump, resulting in failure.
Caution
Use care to avoid damaging the purge gas valve port (especially the silencer).
When the purge gas valve is open, noise level increases and ultimate
pressure deteriorates slightly.
Purpose of the Purge Gas
The moisture volume drawn into pump varies depending on the temperature
and pressure in the vacuum chamber. Pumping humid gas can result in moisture condensing in the pump. This remaining moisture can cause a deterioration of the ultimate pressure or pump failure. When the vacuum chamber
contains gas with humidity of over 60 % RH, the pump must be operated
with the purge gas valve open. Operating the pump with the purge gas valve
open removes the moisture which allows the pump to reach its ultimate pressure.
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
31
Operation
SC 5 D
SC 15 D
Purge gas port
Remove screw
Screw in
silencer
Screw in
silencer
Remove screw
Purge gas port
SC 30 D
Screw in
silencer
Remove screw
SC 60 D
Remove
screw
Screw in
silencer
Purge gas inlet
Purge gas inlet
Fig. 4.4 Setting up the pump for purge gas operation
Warning
Never change the purge gas conditions during operation (ON/OFF)
Open or close the purge gas valve port only after shutting down the
pump. Opening or closing the purge gas valve during operation can
cause the pump to fail and cause bodily injury.
To open the purge gas supply, shutdown the pump, remove the plug from
the purge gas port and screw the silencer into the purge gas port. (Fig. 4.4).
To close the purge gas valve, shutdown the pump. Remove the silencer from
the purge gas valve port and replace it with the plug. Lightly tighten the plug
with a wrench.
When supplying nitrogen gas or dry air to the purge gas valve port, set the
pressure equivalent to atmospheric pressure while keeping the flow below:
■ 9 l · min-1 for the SC 5 D or
■ 10 l · min-1 for the SC 15 D, SC 30 D and SC 60 D.
Caution
32
Exceeding a purge gas flow of 9 or 10 l/min cause pump failure.
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Operation
4.4 Shutdown
After vapour has been pumped, continue to operate the pump with the purge
gas valve open for over one hour. If you close the purge gas valve port or
stop the pump soon after vapour has been pumped, condensed moisture
remains in the pump, resulting in failure.
■ To prevent the drawback of debris from the vacuum pump into vacuum
chamber during shutdown, close the isolation valve (open the purge gas
valve if one is installed).
■ Switch the vacuum pump off.
When the pump stops, atmospheric air is drawn back from the purge gas
valve port to the inside of pump, and pressure inside pump rises to about
atmospheric pressure. To maintain vacuum in the vacuum chamber and
prevent the drawback of debris from vacuum pump into vacuum chamber, close the isolation valve to the vacuum chamber before shutting off
the pump.
Warning
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
33
Maintenance
5
Maintenance
Caution
Neglecting maintenance and inspection can cause poor performance and
pump failure.
To remove debris accumulated in the vacuum pump, operate the pump
several times for 3-5 seconds (once a day) with its inlet open to atmospheric air (or open the purge gas valve if one is installed).
Warning
Allow the pump to cool down before doing maintenance. Performing
maintenance immediately after shutdown can cause bodily injury such as
burns.
SC 5 D / SC 15 D
Hot
SC 30 D / SC 60 D
Hot
Fig. 5.1
Warning
Be careful of automatic restart
The thermal protection on the single-phase motor automatically resets.
This motor restarts without warning after the protector trips back. Be sure
to switch off the electric power before maintenance or inspection.
Warning
Switch off electric source
Be sure to switch off the electrical power before maintenance or inspection. Failure to do so can cause bodily injury from electric shock or rotating objects.
Caution
More frequent maintenance is required if the ambient temperature is too
high. The maintenance interval is based on 5 - 40 °C ambient temperature and 25 °C average yearly temperature.
Shorten the maintenance interval if the ambient temperature is higher.
Otherwise, the pump may fail prematurely.
The maintenance schedule assumes that the pump is exposed to clean
gas only.
You must shorten the maintenance interval when pumping vapour since
vapour temperature, disposal volume, disposal frequency and substances
in the vapour influence the pump's operation.
34
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Maintenance
SC 5 D / SC 15 D
Fan
Electric shock!
During inspection and
maintenance work
keep the power supply
switched off.
Fan cover
Electric shock!
SC 30 D / SC 60 D
Fan cover
Fan
During inspection and
maintenance work
keep the power supply switched off.
Fan
Fig. 5.2
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
35
Maintenance
5.1 Table - Maintenance
When the maintenance interval has been reached, contact Oerlikon Leybold
Vacuum to arrange the required maintenance. Never disassemble, reassemble or alter the pump yourself. We are not responsible for any accidents caused by disassembly, assembly or alteration which was done by the user or
non-specialist.
Maintenance interval
Where to inspect
Every two years or
every 16,000 hours
After having
pumped vapours
400x
grease / ▲
❍
▲
Tip seal
✽
❍
▲
Seal
✽
❍
▲
O-ring
✽
❍
▲
Exhaust valve
✽
❍
▲
Purge
✽
❍
▲
Pin crank
▲
▲
▲
Stopper
▲
▲
▲
Ball bearing
Vacuum pump itself
Yearly or every
8,000 hours
inside cleaning / ▲
inside cleaning / ▲
inside cleaning / ▲
✽ Small maintenance kit
❍ Large maintenance kit
▲ Replace in case of malfunction
Note 1: Exclusively use the specified DIS grease.
Note 2 : The maintenance interval is the time interval or running hours whichever is reached first.
36
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Remarks
Maintenance
5.2 Oerlikon Leybold Vacuum Service
Whenever you send us equipment, indicate whether the equipment is contaminated or is free of substances which could pose a health hazard. If it is
contaminated, specify exactly which substances are involved. You must use
the form we have prepared for this purpose.
A copy of the form has been reproduced at the end of these Operating
Instructions: “Declaration of Contamination for Compressors, Vacuum Pumps
and Components”. Another suitable form is available from www.oerlikon.com
Æ Oerlikon Leybold Vacuum Systems Æ Documentation Æ Download
Documents.
Contamination
Form
Attach the form to the equipment or enclose it with the equipment.
This statement detailing the type of contamination is required to satisfy legal
requirements and for the protection of our employees.
We must return to the sender any equipment which is not accompanied by a
contamination statement.
The pump must be packed in such a way, that it will not be damaged
during shipping and so that any contaminants are not released from the
package.
5.3 Waste Disposal
The pump may be contaminated by the process or by environmental influences. In this case it must be decontaminated in accordance with the relevant
regulations. We offer this service at fixed prices. Further details are available
upon request.
Contaminated parts can be detrimental to health and environment. Before
beginning to work, find out whether any parts are contaminated. Adhere
to the relevant regulations and take the necessary precautions when
handling contaminated parts.
Warning
Contamination
Warning
Separate clean components according to their materials, and dispose of
accordingly.
If you send equipment to Oerlikon Leybold Vacuum mind the regulations
given in Section 5.2. “Oerlikon Leybold Vacuum Service”.
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
37
Troubleshooting
6
Troubleshooting
If the pump malfunctions, please refer to the following chart for help in solving
the problems. If you cannot solve the problem, please contact Oerlikon
Leybold Vacuum.
Fault
Pump does not rotate.
SC 5 D only
SC 5 D only
Ultimate pressure is insufficient.
Abnormal sound, vibration.
38
Possible cause
Breaker malfunction.
Wiring becomes loose or cut.
Voltage drops.
Motor malfunctions.
Pump malfunctions.
Switch is turned OFF.
ON-OFF switch is damaged.
Thermal protector trips.
Air leaks for pumping.
Moisture or solvent has condensed
in pump.
O-ring is damaged.
Purge gas valve port is clogged.
Connections loose.
The pump is not level.
Foreign matter enters inside of Pump.
Failure of exhaust valve.
Failure of motor.
Failure of pump.
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Remedy
Inspect and repair.
Repair or replace.
Check length and size of cable.
Inspect and repair.
Inspect and repair.
Turn switch ON.
Replace.
Inspect connection
Inspect connection.
Inspect voltage.
Inspect and repair.
Check tightness of piping.
Open inlet to atmosphere and operate
for a few minutes and then operate for
about 24 hours with the inlet closed.
Install a trap or a filter to prevent water
and solvent from entering the pump.
Replace.
Clean silencer. - Replace
Tighten connections.
Level the pump.
Inspect and clean.
Inspect and replace.
Inspect and replace.
Inspect and change resp. replace.
Spare parts
7
Spare Parts
SCROLLVAC
SC 5 D
SC 15 D
SC 30 D
SC 60 D
P/N
EK 870000496
P/N
EK 870000499
P/N
EK 870000497
P/N
EK 870000500
P/N
EK 870000498
P/N
EK 870000501
P/N
EK 870000519
P/N
EK 870000520
P/N
EK 870000502
P/N
EK 870000503
P/N
EK 870000503
P/N
EK 870000521
P/N
E 870000510
P/N
E 870000511
P/N
E 870000512
P/N
E 870000522
Shaft installation kit (Pin Crank Kit)
P/N
EK 870000507
P/N
EK 870000508
P/N
EK 870000509
P/N
EK 870000523
Eccentric shaft
P/N
EK 870000504
P/N
EK 870000505
P/N
EK 870000506
P/N
EK 870000534
Airflush inlet filter
P/N
EK 870000515
P/N
EK 870000515
P/N
EK 870000515
P/N
EK 870000515
Lubricant
P/N
EK 870000524
P/N
EK 870000524
P/N
EK 870000524
P/N
EK 870000524
Maintenance kits
Small maintenance kit
(after 8,000 h)
Large maintenance kit
(after 16,000 h)
Toolkit
Scroll profiled seal (Tip Seal)
Minor Kit
Major Kit
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
39
40
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
EC Declaration of Conformity
We, Oerlikon Leybold Vacuum GmbH, hereby declare that the products specified and listed below
which we have placed on the market, comply with the applicable EC Council Directives.
This declaration becomes invalid if modifications are made to the product without agreement of
Oerlikon Leybold Vacuum GmbH.
Compliance with the EMC Directives requires that the components are installed within a system or
machine in a manner adapted to EMC requirements.
Designation of the products: Scroll type vacuum pump SCROLLVAC
Model:
Part-No.:
SC 5 D
SC 15 D
SC 30 D
SC 60 D
133 000, 133 100
133 001, 133 003, 133 101
133 002, 133 004, 133 102
133 008
The product complies to the following European Council Directives:
•
•
•
EC-Machinery Directive (98/37/EC)
EC-Directive related to electrical equipment designed for use within certain voltage limits
(2006/95/EC)
EC-Directive relating to electromagnetic compatibility, (2004/108/EC)
Related, harmonized standards:
•
EN 1012-2, 1996
Safety requirements for compressors and vacuum pumps –
Part 2: Vacuum pumps
•
EN 60034-1, 2004
Rotating electrical machines –
Part 1: Rating and performance
•
EN 60204-1, 2006
Safety of machinery - Electrical equipment of machines –
Part 1: General requirements
Cologne
Cologne
___________________________
Dr. Ulrich Jung
Head of Research & Developement
Vice President
__________________________
Harald Udelhoven
Head of Quality Management
Oerlikon Leybold Vacuum GmbH
Bonner Straße 498 (Bayenthal)
50968 Köln
Tel.: (0221) 347-0
Fax: (0221) 347-1250
[email protected]
www.oerlikon.com/leyboldvacuum
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
41
Declaration of Contamination of Compressors, Vacuum Pumps and Components
The repair and / or servicing of compressors, vacuum pumps and components will be carried out only if a correctly completed declaration has been submitted. Non-completion will result in delay. The manufacturer can refuse to accept any equipment without a declaration.
A separate declaration has to be completed for each single component.
This declaration may be completed and signed only by authorised and qualified staff.
Customer/Dep./Institute: ________________________________
___________________________________________________
Address
___________________________________________
___________________________________________
Person to contact:
___________________________________
Phone:
__________________ Fax: __________________
End user:
__________________________________________
ý applicable please mark
Reason for return
q Repair q chargeable q warranty
q Exchange q chargeable q warranty
q exchange already arranged / received
Return only: q rent q loan q for credit
Calibration: q DKD q Factory calibration
q Quality test certificate DIN 55350-18-4.2.1
A. Description of the Oerlikon Leybold Vacuum product
Failure description:
Material description: _____________________________________
___________________________________________________
Catalog number:
_______________________________________
Additional parts:
_____________________________________
Serial number:
_______________________________________
Application Tool:
_____________________________________
Type of oil (Forevacuum pumps): ____________________________
___________________________________
Application Process:
__________________________________
B. Condition of the equipment
1.
2.
3.
4.
No1)
Yes
No
Has the equipment been used1)
q
q
Drained (Product/service fluid)
q
q
All openings sealed airtight
q
Purged
q
q
If yes which cleaning agent:
_______________________________________
and which method of cleaning: _______________________________________
1) if answered with “No” go to D.
Contamination:
toxic
corrosive
flammable
explosive2)
radioactive2)
microbiological2)
other harmful substances
No1)
q
q
q
q
q
q
q
Yes
q
q
q
q
q
q
q
C. Description of processed substances (Please fill in absolutely)
1. What substances have come into contact with the equipment:
Trade name and / or chemical term of service fluids and substances processed, properties of the substances; According to safety data sheet
(e.g. toxic, inflammable, corrosive, radioactive)
Tradename:
Chemical name:
a) ______________________________________________________________________________________________________
b) ______________________________________________________________________________________________________
c) ______________________________________________________________________________________________________
d) ______________________________________________________________________________________________________
No
Yes
2. Are these substances harmful?
q
q
3. Dangerous decomposition products when heated?
q
q
If yes, which? ___________________________________________________________________________________________
2) Components
contaminated by microbiological, explosive or radioactive products/substances will not be accepted
without written evidence of decontamination.
D. Legally binding declaration
I / we hereby declare that the information supplied on this form is accurate and sufficient to judge any contamination level.
Name of authorised person (block letters):
____________________________
Date _____________ Signatur of authorised person ___________________________
firm stamp
17200001_002_00 © Oerlikon Leybold Vacuum
42
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
Notes
GA01423_002_A2 - 10/2008 - © Oerlikon Leybold Vacuum
43
Sales and Service
Germany
Oerlikon
Leybold Vacuum GmbH
Bonner Strasse 498
D-50968 Cologne
Phone: +49-(0)221-347 1234
Fax: +49-(0)221-347 1245
[email protected]
www.oerlikon.com
Oerlikon
Leybold Vacuum GmbH
Sales Area North/Northeast
Branch Office Berlin
Industriestrasse 10b
D-12099 Berlin
Phone: +49-(0)30-435 609 0
Fax: +49-(0)30-435 609 10
[email protected]
Oerlikon
Leybold Vacuum GmbH
Sales Area South/Southwest
Branch Office Munich
Sendlinger Strasse 7
D-80331 Munich
Phone: +49-(0)89-357 33 9-10
Fax: +49-(0)89-357 33 9-33
[email protected]
service.vacuum.mn
@oerlikon.com
Oerlikon
Leybold Vacuum GmbH
Sales Area West & Benelux
Branch Office Cologne
Bonner Strasse 498
D-50968 Cologne
Phone: +49-(0)221-347 1270
Fax: +49-(0)221-347 1291
[email protected]
Oerlikon
Leybold Vacuum GmbH
Service Competence Center
Emil-Hoffmann-Strasse 43
D-50996 Cologne-Suerth
Phone: +49-(0)221-347 1439
Fax: +49-(0)221-347 1945
[email protected]
Oerlikon
Leybold Vacuum GmbH
Mobil Customer Service
Emil-Hoffmann-Strasse 43
D-50996 Cologne-Suerth
Phone: +49-(0)221-347 1765
Fax: +49-(0)221-347 1944
[email protected]
Asia
Belgium
Oerlikon
Leybold Vacuum Nederland B.V.
Belgisch bijkantoor
Leuvensesteenweg 542-9A
B-1930 Zaventem
Sales:
Phone: +32-2-711 00 83
Fax: +32-2-720 83 38
[email protected]
Service:
Phone: +32-2-711 00 82
Fax: +32-2-720 83 38
[email protected]
Spain
Oerlikon
Leybold Vacuum Spain, S.A.
C/. Huelva, 7
E-08940 Cornellà de Llobregat
(Barcelona)
Sales:
Phone: +34-93-666 46 16
Fax: +34-93-666 43 70
[email protected]
Service:
Phone: +34-93-666 49 51
Fax: +34-93-685 40 10
[email protected]
France
Oerlikon
Leybold Vacuum France S.A.
7, Avenue du Québec
Z.A. Courtaboeuf 1 - B.P. 42
F-91942 Courtaboeuf Cedex
Sales and Service:
Phone: +33-1-69 82 48 00
Fax: +33-1-69 07 57 38
[email protected]
Sweden
Oerlikon
Leybold Vacuum Scandinavia AB
Box 9084
SE-40092 Göteborg
Sales and Service:
Phone: +46-31-68 84 70
Fax: +46-31-68 39 39
[email protected]
Visiting/delivery address:
Datavägen 57B
SE-43632 Askim
Oerlikon
Leybold Vacuum France S.A.
Valence Factory
640, Rue A. Bergès - B.P. 107
F-26501 Bourg-lès-Valence Cedex
Phone: +33-4-75 82 33 00
Fax: +33-4-75 82 92 69
[email protected]
Great Britain
Oerlikon
Leybold Vacuum UK Ltd.
Unit 2
Silverglade Business Park
Leatherhead Road
UK-Chessington, Surrey KT9 2QL
Sales:
Phone: +44-13-7273 7300
Fax: +44-13-7273 7301
[email protected]
Service:
Phone: +44-20-8971 7030
Fax: +44-20-8971 7003
[email protected]
Switzerland
Oerlikon
Leybold Vacuum Schweiz AG
Leutschenbachstrasse 55
CH-8050 Zürich
Sales:
Phone: +41-44-308 40 50
Fax: +41-44-302 43 73
[email protected]
Service:
Phone: +41-44-308 40 62
Fax: +41-44-308 40 60
[email protected]
America
Italy
Oerlikon
Leybold Vacuum Italia S.p.A.
8, Via Trasimeno
I-20128 Milano
Sales:
Phone: +39-02-27 22 31
Fax: +39-02-27 20 96 41
[email protected]
Service:
Phone: +39-02-27 22 31
Fax: +39-02-27 22 32 17
[email protected]
USA
Oerlikon
Leybold Vacuum USA Inc.
5700 Mellon Road
USA-Export, PA 15632
Phone: +1-724-327-5700
Fax: +1-724-325-3577
[email protected]
Sales:
Eastern & Central time zones
Phone: +1-724-327-5700
Fax: +1-724-333-1217
Pacific, Mountain, Alaskan &
Hawaiian time zones
Phone: +1-480-752-9191
Fax: +1-480-752-9494
Service:
Phone: +1-724-327-5700
Fax: +1-724-325-3577
Netherlands
Oerlikon
Leybold Vacuum Nederland B.V.
Proostwetering 24N
NL-3543 AE Utrecht
Sales and Service:
Phone: +31-(30) 242 6330
Fax: +31-(30) 242 6331
[email protected]
[email protected]
Latin America
Oerlikon
Leybold Vacuum USA Inc.
Brazilian Office
Av. Dória 360 cj. 12 Campo Belo
04635-070 São Paulo SP BRAZIL
Sales:
Phone: +55 11-3554 3117
Fax: +55 11-3554 3117
[email protected]
LV_09951_2008
10.08
Oerlikon
Leybold Vacuum
Dresden GmbH
Zur Wetterwarte 50, Haus 304
D-01109 Dresden
Service:
Phone: +49-(0)351-88 55 00
Fax: +49-(0)351-88 55 041
[email protected]
Europe
Oerlikon
Leybold Vacuum USA Inc.
5700 Mellon Road
USA-Export, PA 15632
Phone: +1-724-327-5700
Fax:
+1-724-325-3577
i[email protected]
Oerlikon
Leybold Vacuum GmbH
Bonner Strasse 498
D-50968 Cologne
Phone: +49-(0)221-347 0
Fax:
+49-(0)221-347 1250
[email protected]
P.R. China
Oerlikon
Leybold Vacuum (Tianjin)
International Trade Co. Ltd.
Beichen Economic
Development Area (BEDA),
No.8 Western Shuangchen Road
Tianjin 300400
China
Sales and Service:
Phone: +86-22-2697 0808
Fax: +86-22-2697 4061
Fax: +86-22-2697 2017
[email protected]
[email protected]
Japan
Oerlikon
Leybold Vacuum
Japan Co., Ltd.
Headquarter
23-3, Shin-Yokohama
3-chome
Tobu A.K. Bldg. 4th Floor
Kohoku-ku
Yokohama-shi 222-0033
Sales:
Phone: +81-45-471-3330
Fax: +81-45-471-3323
[email protected]
[email protected]
Oerlikon
Leybold Vacuum
(Tianjin) Co. Ltd.
Beichen Economic
Development Area (BEDA),
No.8 Western Shuangchen Road
Tianjin 300400
China
Sales and Service:
Phone: +86-22-2697 0808
Fax: +86-22-2697 4061
Fax: +86-22-2697 2017
[email protected]
[email protected]
Oerlikon
Leybold Vacuum
Japan Co., Ltd.
Osaka Sales Office
5-13, Kawagishi-machi
Suita-chi
Osaka 564-0037
Phone: +81-6-6393-5211
Fax: +81-6-6393-5215
[email protected]
[email protected]
Oerlikon
Leybold Vacuum (Tianjin)
International Trade Co. Ltd.
Shanghai Branch:
Add: No.33
76 Futedong San Rd.
Waigaoqiao FTZ
Shanghai 200131
China
Sales and Service:
Phone: +86-21-5064-4666
Fax: +86-21-5064-4668
[email protected]
[email protected]
Oerlikon
Leybold Vacuum (Tianjin)
International Trade Co. Ltd.
Guangzhou Office and
Service Center
1st F, Main Building
Science City Plaza,
No.111 Science Revenue,
Guangzhou Science City
(GZSC) 510663, Guangzhou,
China
Sales:
Phone: +86-20-8723-7873
Phone: +86-20-8723-7597
Fax: +86-20-8723-7875
[email protected]
[email protected]
Oerlikon
Leybold Vacuum (Tianjin)
International Trade Co. Ltd.
Beijing Branch:
1-908, Beijing Landmark Towers
8 North Dongsanhuan Road
Chaoyang District
Beijing 100004
China
Sales:
Phone: +86-10-6590-7622
Fax: +86-10-6590-7607
[email protected]
India
Oerlikon
Leybold Vacuum India Pvt Ltd.
EL-22, J Block
MIDC Bhosari
Pune 411026
India
Sales and Service:
Phone: +91-20-3061 60000
Fax: +91-20-2712 1571
[email protected]
[email protected]
Oerlikon
Leybold Vacuum
Japan Co., Ltd.
Tsukuba Technical Service Center
Kogyo Danchi
21, Kasuminosato,
Ami-machi, Inashiki-gun
Ibaraki-ken, 300-0315
Service:
Phone: +81-298 89 2841
Fax: +81-298 89 2838
[email protected]
[email protected]
Korea
Oerlikon
Leybold Vacuum Korea Ltd.
3F. Jellzone 2 Tower, 159-4
Jeongja-Dong, Bundang-Gu
Sungnam-Si, Gyeonggi-Do
Korea 463-384
Sales:
Phone: +82-31 785 1367
Fax: +82-31 785 1359
623-7, Upsung-Dong
Cheonan-Si
Chungcheongnam-Do
Korea 330-290
Service:
Phone: +82-41 589 3035
Fax: +82-41 588 0166
Singapore
Oerlikon
Leybold Vacuum
Singapore Pte Ltd.
1 Science Park Road
Singapore Science
Park 2
#02-12, Capricorn Building
Singapore 117528
Sales and Service:
Phone: +65-6303 7000
Fax: +65-6773 0039
[email protected]
[email protected]
Taiwan
Oerlikon
Leybold Vacuum Taiwan Ltd.
No 416-1, Sec. 3
Chung-Hsin Rd., Chu-Tung
Hsin-Chu, Taiwan, R.O.C.
Sales and Service:
Phone: +886-3-500 1688
Fax: +886-3-583 3999
[email protected]
[email protected]
www.oerlikon.com
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