Artisan Technology Group | MDR | Specifications | Artisan Technology Group MDR Specifications

Artisan Technology Group MDR Specifications
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PZ 62E User Manual
E-500/E-501 Series Modular Piezo Controller
Release: 2.15.1
Date: 2013-07-11
This document describes the following products:




E-500 and E-501 Chassis with Power Supply
E-503, E-504, E-505, E-506, E-508 Amplifier Modules
E-509 Sensor / Piezo Servo Control Modules
E-515 and E-517 Display / Interface Modules
© Physik Instrumente (PI) GmbH & Co. KG
Auf der Römerstr. 1 ⋅ 76228 Karlsruhe, Germany
Tel. +49-721-4846-0 ⋅ Fax: +49-721-4846-1019
info@pi.ws ⋅ www.pi.ws
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E-500/E-501 Series PZT Servo Controllers
User Manual PZ 62E
Table of Contents:
1.
About this Document........................................................ 4
1.1.
Goal and Target Audience of this Manual ................................... 4
1.2.
Symbols and Typographic Conventions ...................................... 4
1.3.
Other Applicable Documents ...................................................... 5
1.4.
Downloading Manuals................................................................. 6
2.
Safety ................................................................................. 7
2.1.
Intended Use .............................................................................. 7
2.2.
General Safety Instructions ........................................................ 7
2.3.
Organizational Measures ............................................................ 8
3.
Introduction ....................................................................... 9
3.1.
Model Survey .............................................................................. 9
3.2.
Configuration Example ............................................................. 10
3.3.
Compatibility Note..................................................................... 11
3.4.
Signal Path Diagram ................................................................. 12
3.5.
Maximum Ratings ..................................................................... 13
3.6.
Ambient Conditions and Classifications .................................... 13
4.
Handling .......................................................................... 14
4.1.
Unpacking Checklist ................................................................. 14
4.2.
Safety Measures for Installation, Start-Up and Operation ......... 14
4.3.
Power Connection .................................................................... 16
4.4.
First Electrical Checks .............................................................. 16
4.5.
Connecting Cables ................................................................... 16
4.6.
Starting Operation .................................................................... 17
4.6.1.
Analog Operation ...................................................................... 17
4.6.2.
Computer Controlled Operation ................................................ 17
5.
Module Description ........................................................ 18
5.1.
E-500.00 19” Chassis with Power Supply ................................. 18
5.1.1.
Specifications ........................................................................... 18
5.1.2.
Dimensions ............................................................................... 18
5.2.
E-501.00 9.5”Chassis with Power Supply ................................. 19
5.2.1.
Specifications ........................................................................... 19
5.2.2.
Dimensions ............................................................................... 19
5.3.
5.3.1.
Release 2.15.1
E-503 3-Channel Piezo Amplifier .............................................. 20
Front Panel Elements ............................................................... 20
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E-500/E-501 Series PZT Servo Controllers
User Manual PZ 62E
5.3.2.
Operating Limits ....................................................................... 21
5.3.3.
Specifications ........................................................................... 22
5.3.4.
Pin Assignment......................................................................... 23
5.4.
E-504 High-Power Piezo Amplifier, Energy Recovery ............... 24
5.4.1.
Front Panel Elements ............................................................... 24
5.4.2.
Operating Limits ....................................................................... 25
5.4.3.
Specifications ........................................................................... 26
5.4.4.
Pin Assignment......................................................................... 27
5.5.
E-505 High-Power Piezo Amplifier ............................................ 28
5.5.1.
Front Panel Elements ............................................................... 28
5.5.2.
Operating Limits ....................................................................... 29
5.5.3.
Specifications ........................................................................... 30
5.5.4.
Pin Assignment......................................................................... 31
5.6.
E-506 Linearized Piezo Amplifier, Charge Control .................... 32
5.6.1.
Front Panel Elements ............................................................... 32
5.6.2.
Operating Limits ....................................................................... 33
5.6.3.
Specifications ........................................................................... 34
5.6.4.
Pin Assignment......................................................................... 35
5.7.
E-508 High-Power Piezo Amplifier with 1100 V Output Voltage 36
5.7.1.
Front Panel Elements ............................................................... 36
5.7.2.
Operating Limits ....................................................................... 37
5.7.3.
Specifications ........................................................................... 38
5.7.4.
High-Voltage Actuator Types and Terminology......................... 39
5.7.5.
Pin Assignment......................................................................... 39
5.7.6.
E-508.00 Gain Polarity and Output Range Settings .................. 40
5.8.
5.8.1.
E-509 Signal Conditioner / Servo-Controller Module ................. 42
Front Panel Elements of Modules for Dual-Electrode Capacitive
Sensors .................................................................................... 42
5.8.2.
Front Panel Elements of Modules for PISeca Single-Electrode
Capacitive Sensors ................................................................... 43
5.8.3.
Front Panel Elements of Modules for Strain Gauge Sensors .... 44
5.8.4.
Specifications ........................................................................... 45
5.8.5.
Pin Assignment......................................................................... 47
5.9.
E-515 Display Modules ............................................................. 50
5.9.1.
Front Panel Elements ............................................................... 50
5.9.2.
Specifications ........................................................................... 50
5.9.3.
Pin Assignment......................................................................... 51
5.9.4.
Display Adjustment ................................................................... 52
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E-500/E-501 Series PZT Servo Controllers
5.10.
User Manual PZ 62E
E-517 Computer Interface and Display Module ........................ 54
5.10.1.
Front Panel Elements ............................................................... 54
5.10.2.
Specifications ........................................................................... 55
5.10.3.
Pin Assignment......................................................................... 56
5.11.
6.
Dummy Modules ....................................................................... 57
Integrating Modules in Third-Party Systems ................ 58
6.1.1.
Safety Measures for Integration in Third-Party Systems ........... 58
6.1.2.
Supply Power for the Modules .................................................. 59
6.1.3.
Amplifier Modules: Closing the Circuit ...................................... 59
7.
Maintenance .................................................................... 60
7.1.
Cleaning ................................................................................... 60
7.2.
AC Power and Line Fuses ........................................................ 60
8.
Customer Service ........................................................... 62
9.
Old Equipment Disposal ................................................ 63
10.
Appendix ......................................................................... 64
10.1.
Lifetime of PICMA® Actuators .................................................. 64
10.2.
How to Measure the Amplifier Output of E-504 Modules .......... 65
10.3.
EC Declaration of Conformity ................................................... 66
© Copyright 1996–2013 by Physik Instrumente (PI) GmbH & Co. KG
Release: 2.15.1
File:E-500_user_PZ62E2151.doc
Release 2.15.1
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E-500/E-501 Series PZT Servo Controllers
1.
1.1.
User Manual PZ 62E
About this Document
Goal and Target Audience of this Manual
This manual contains information on the intended use of the E-500/E-501 series piezo
control electronics (referred to as “E-500/E-501 system” in this manual).
It assumes that the reader has a fundamental understanding of basic servo systems as well
as motion control concepts and applicable safety procedures.
The latest versions of the user manuals are available for download (p. 6) on our website.
1.2.
Symbols and Typographic Conventions
The symbols and labels in this manual have the following definitions:
DANGER
Imminently hazardous situation
If not avoided, the hazardous situation will result in death or serious injury.

Actions to be taken to avoid the situation.
NOTICE
Dangerous situation
If not avoided, the dangerous situation will result in damage to the equipment.

Actions to be taken to avoid the situation.
INFORMATION
Information for easier handling, tricks, tips, etc.
Symbol/
Label
Meaning
1.
Action consisting of several steps whose sequential
order must be observed
2.

Action consisting of one or several steps whose
sequential order is irrelevant

List item
p. 5
Cross-reference to page 5
RS-232
Labeling of an operating element on the product
(example: socket of the RS-232 interface)
Warning signs affixed to the product that refer to
detailed information in this manual.
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E-500/E-501 Series PZT Servo Controllers
1.3.
User Manual PZ 62E
Other Applicable Documents
Some of the devices which are mentioned in this documentation are described in detail in
their own User Manuals or Technical Notes. The User Manuals and Technical Notes
relevant for your configuration are included in delivery (see p. 14).
For the latest versions of the User Manuals and Technical Notes contact our customer
service department (see p. 6).
Device
Document
E-517 computer interface and display module
PZ214E User Manual
Software manuals for E-517 are on the E-517 CD
(e.g. the SM148E PIMikroMove manual).
E-509 sensor / servo-control module
PZ77E User Manual
E-802 servo-control submodule
PZ150E User Manual
E-801 sensor submodule
PZ117E User Manual
E-506 charge-controlled amplifier module
E506T0002 Technical Note
Analog controller LabView driver library and
Hyperbit functionality
PZ181E Software Manual
E530B0008 power supply module for E-500
chassis
E530T0003 Technical Note
E531B0005 power supply module for E-501
chassis
E531T0004 Technical Note
Release 2.15.1
www.pi.ws
E500T0011 Technical Note with download
instructions
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E-500/E-501 Series PZT Servo Controllers
1.4.
User Manual PZ 62E
Downloading Manuals
INFORMATION
If a manual is missing on our website or if there are problems in downloading:

Contact our customer service department (info@pi.ws).
The current versions of the manuals are found on our website. To download a
manual, proceed as follows:
1. Open the website http://www.pi-portal.ws.
2. Click Downloads.
3. Click the corresponding category (e. g. E Piezo Drivers & Nanopositioning
Controllers).
4. Click the corresponding product code (e. g. E-517).
An overview of the available file types is shown for the selected product.
5. If (0 Files) is shown in the Documents line, log in as follows to display and download
the documents:
a)
b)
c)
d)
e)
f)
Insert the product CD in the corresponding PC drive.
Open the Manuals directory.
Open the Release News (e. g. E-517_Releasenews_V_x_x_x.pdf) on the CD of
the product.
Find the user name and password in the User login for software download
section in the Release News.
In the User login area on the left margin in the website, enter the user name and
the password in the corresponding fields.
Click Login.
If Documents (0 Files) is still being displayed, no manuals are available:
−
Contact our customer service department (info@pi.ws).
6. Click Documents.
7. Click the desired manual and save it on the hard disk of your PC or on a data storage
medium.
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E-500/E-501 Series PZT Servo Controllers
2.
2.1.
User Manual PZ 62E
Safety
Intended Use
The E-500/E-501 system is a laboratory device according to DIN EN 61010. It is intended to
be used in interior spaces and in an environment which is free of dirt, oil and lubricants.
Corresponding to its design, the E-500/E-501 system is intended for driving capacitive
loads (e. g. piezo ceramic actuators).
The E-500/E-501 system must not be used for purposes other than those named in this
user manual. In particular, the E-500/E-501 system must not be used to drive ohmic or
inductive loads.
The E-500/E-501 system can be used for static as well as dynamic applications.
Capacitive sensors or strain gauge sensors must be used for closed-loop operation. PI
stages intended for closed-loop operation already have the corresponding sensors. Other
sensors can only be used with PI approval.
2.2.
General Safety Instructions
The E-500/E-501 system is built according to state-of-the-art technology and recognized
safety standards. Improper use can result in personal injury and/or damage to the E-500/E501 system.
 Only use the E-500/E-501 system for its intended purpose, and only use it if it is in a
good working order.
 Read the user manual.
 Immediately eliminate any faults and malfunctions that are likely to affect safety.
The operator is responsible for the correct installation and operation of the E-500/E-501
system.
The E-500/E-501 system comes preinstalled and preconfigured. Removing modules from
the chassis can result in personal injury and/or damage to the E-500/E-501 system.
 Only remove modules from the chassis when you are authorized and have the
corresponding qualifications.
 Before removing modules from the chassis, remove the E-500/E-501 system from the
power source by pulling the power plug.
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E-500/E-501 Series PZT Servo Controllers
2.3.
User Manual PZ 62E
Organizational Measures
User Manual
 Always keep this user manual next to the E-500/E-501 system when using the E500/E-501 system.
If the user manual is lost or damaged, contact our customer service department
(info@pi.ws).
 Add all information given by the manufacturer to the user manual, for example
supplements or Technical Notes.
 If you pass the E-500/E-501 system on to other users, also turn over this user manual
as well as other relevant information provided by the manufacturer.
 Only use the device on the basis of the complete user manual. If your user manual is
incomplete and is therefore missing important information, serious or fatal injury as
well as property damage can result.
 Only install and operate the E-500/E-501 system after having read and understood this
user manual.
Personnel Qualification
Only authorized and qualified personnel must install, operate, maintain and clean the E500/E-501 system.
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E-500/E-501 Series PZT Servo Controllers
3.
User Manual PZ 62E
Introduction
Fig. 1: Three-channel system: E-501 chassis with E-509 sensor / piezo servo-control
module, E-503 piezo amplifier module and E-517 interface / display module
3.1.
Model Survey
Chassis
The E-500 and E-501 chassis are based on an EMI-proven chassis with multi-function power
supply and a backplane carrying all connectors to the system amplifiers, servo-controllers and
interface modules. E-500/E-501 systems are assembled to order, and tested with all your
modules installed.
E-500.00
19"-Chassis for Modular Piezo Controller System, 1 to 3 channels, with
E530B0008 Power Supply
E-501.00
9½"-Chassis for Modular Piezo Controller System, 1 to 3 channels, with
E531B0005 Power Supply
Amplifier Modules
E-503.00
Piezo Amplifier Module, -30 to 130 V, three channels
E-503.00S Piezo Amplifier Module, -30 to 130 V, one of three channels is fixed (100 V)
E-504.00F High-Power Piezo Amplifier Module, 1 channel, 280 W peak power, 100 W average
power, -30 to 130 V
E-504.00S High-Power Piezo Amplifier Module, 1 channel, 280 W peak power, 100 W average
power, fixed voltage 100 V
E-505.00
Piezo Amplifier Module, 2 A, -30 to 130 V, 1 channel
E-505.10
Piezo Amplifier Module for switching applications, 10 A, -30 to 130 V, 1 channel
E-505.00S Piezo Amplifier Module, 1 channel, fixed voltage 100 V
E-506.10
High Linearity Piezo Amplifier Module, 30 W average output power, -30 to 130 V,
1 channel
E-508.00
HVPZT Piezo Amplifier Module,+3 to +1100 V, 1 channel
E-508.OE HVPZT Piezo Amplifier Module, OEM version, 400 mA peak current, 1 channel
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E-500/E-501 Series PZT Servo Controllers
User Manual PZ 62E
Sensor and Controller Modules
E-509.S1
Sensor / Piezo Servo-Control Module, SGS sensor, 1 channel
E-509.S3
Sensor / Piezo Servo-Control Module, SGS sensors, 3 channels
E-509.S31 Sensor / Piezo Servo-Control Module, SGS sensors, 3 channels, for NanoCube®
stages
E-509.C1A Sensor / Piezo Servo-Control Module, capacitive sensor, 1 channel
E-509.C2A Sensor / Piezo Servo-Control Module, capacitive sensors, 2 channels
E-509.C3A Sensor / Piezo Servo-Control Module, capacitive sensors, 3 channels
E-509.E3
PISeca Sensor / Piezo Servo-Control Module for Single-Electrode Capacitive Sensor
Probes, 3 Channels
E-509.E03 PISeca Modular Signal Conditioner Electronics for Single Electrode Capacitive
Sensors, 3 Channels
Display and Interface Modules
E-515.01
E-515.03
E-517.i1
E-517.i10
E-517.i3
E-517.i30
3.2.
Display Module for Piezo Voltage and Displacement, 1 channel
Display Module for Piezo Voltage and Displacement, 3 channels
Interface / Display Module, 24 Bit D/A, TCP/IP, USB, RS232, IEEE 488,
1 channel
Interface / Display Module, 24 Bit D/A, TCP/IP, USB, RS232, 1 channel
Interface / Display Module, 24 Bit D/A, TCP/IP, USB, RS232, IEEE 488,
3 channels
Interface / Display Module, 24 Bit D/A, TCP/IP, USB, RS232, 3 channels
Configuration Example
The figure above shows a three-channel configuration example consisting of the following
components:
• E-500.00 chassis with power supply
• Amplifier Slot 1: E-503.00 three-channel amplifier module
• Amplifier Slots 2 and 3: not used, covered with dummy modules
• Contr. Slot 1: E-509.C1A single-channel sensor / servo-control module for capacitive
sensor
• Contr. Slot 2 and 3: E-509.S1 single-channel sensor / servo-control modules for SGS
sensors
• Display/Interface Slot: E-517.i3 three-channel interface / display module
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E-500/E-501 Series PZT Servo Controllers
3.3.
User Manual PZ 62E
Compatibility Note
NOTICE
Overheating or malfunction with improper system configuration!
In March 2011, the backplane of the chassis (E-500.00 or E-501.00) has been changed. The
modules of the E-500/E-501 system have been adapted accordingly.

„New“ chassis and modules: date of manufacture is March 2011 or later

„Old“ chassis and modules: date of manufacture is before March 2011
If old and new components are to be combined in one system, modification of the chassis
and/or modules by PI may be necessary for proper operation. Improper combination of old
and new components in the E-500/E-501 system can cause damage by overheating or
malfunction of the system.
With systems assembled by PI, the proper configuration is ensured. If you want to replace
chassis or modules in your E-500/E-501 system:

Contact our customer service department (p. 62).
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E-500/E-501 Series PZT Servo Controllers
3.4.
User Manual PZ 62E
Signal Path Diagram
The modules of the E-500/E-501 system can be combined in several configurations in an
E-500 or E-501 chassis (see Section 3.2 for an example). The signal path diagram below
shows a usual configuration.
Fig. 2: Interconnections between E-517 digital piezo controller operation module, amplifier
module and E-509 servo module
INFORMATION
The backplane of the chassis (E-500.00 or E-501.00) carries all connectors to the modules of
the system (amplifiers, sensor / servo-control modules, interface /display modules).
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E-500/E-501 Series PZT Servo Controllers
3.5.
User Manual PZ 62E
Maximum Ratings
The E­500/E-501 system is designed for the following operating data:
Model
Maximum Operating
Voltage
Operating
Frequency
Maximum Current
Consumption
System in E500.00 chassis
100 to 240 V~
50-60 Hz
210 VA
System in E501.00 chassis
100 to 120 V~
50-60 Hz
90 VA
50-60 Hz
90 VA
(fuses: 2 x T2AH, 250 V)
(fuses: 2 x T2AH, 250 V
220 to 240 V~
(fuses: 2 x T1AL, 250 V)
3.6.
Ambient Conditions and Classifications
The following ambient conditions and classifications must be observed for the E­500/E-501
system:
Area of application
For indoor use only
Maximum altitude
2000 m
Relative humidity
Highest relative humidity 80 % for temperatures up
to 31 °C
Decreasing linearly to 50% relative humidity at 40°C
Storage temperature
5 °C to 70 °C
Transport temperature
–25 °C to +85 °C
Overvoltage category
II
Protection class
I
Degree of pollution
2
Measurement category
I
Degree of protection
according to IEC 60529
IP20
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E-500/E-501 Series PZT Servo Controllers
4.
Handling
4.1.
Unpacking Checklist
User Manual PZ 62E
The E-500/E-501 system was carefully inspected, both electrically and mechanically, before
shipment. Upon receiving the device, unpack it and check for any obvious signs of physical
damage that may have occurred during transit.
Retain and use the original packing material in case reshipment is necessary.
The following items are shipped with every E-500/E-501 system:
•
•
•
•
Chassis with modules installed.
Power cord
PZ62E User Manual (this document)
E500T0011 Technical Note for GCS LabVIEW driver set for analog controllers
If one or more E-509 modules are installed, you should also have these items:
• PZ77E Manual for E-509
• With all models except for E-509.E03: PZ150E Manual for E-802 Servo-Controller
Submodule
• With E-509.Sx and .S31 models only: PZ117E Manual for E-801 Sensor Submodule
• With E-509.S3 and .S31 models only: E-808.90 sensor monitor cable
• With E-509.CxA models only: PZ106E Manual for Capacitive Sensors
• With E-509.CxA, .E03 and .E3 models only: D-893.32 sensor monitor cable
• With E-509.E03 and .E3 models only: 3214 banana plug for ground connection of the
sensor reference plane
If an E-517 module is installed, you should also have these items:
•
•
•
•
•
•
•
•
4.2.
C-815.34 RS-232 cable
C-815.563 crossover network cable
000011448 USB cable
4347 and 4348 MDR connector for I/O socket
E-517.CD product CD with software and manuals for E-517
PZ214EQU User Manual for E-517, short version
A000T0028 Technical Note for the PI Update Finder
A000T0032 Technical Note for Using the PI Update Finder without Internet connection
Safety Measures for Installation, Start-Up and Operation
Improper installation of the E-500/E-501 system can result in personal injury and/or damage
to the E-500/E-501 system.
 Install the E-500/E-501 system near the power source so that the power plug can be
quickly and easily disconnected from the mains.
 Use the supplied power cord to connect the E-500/E-501 system to the power source.
 If the supplied power cord has to be replaced, use a sufficiently dimensioned
component.
 Only use cables and connections that meet local safety regulations.
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E-500/E-501 Series PZT Servo Controllers
User Manual PZ 62E
High temperatures can overheat the E-500/E-501 system.
 Install the E-500/E-501 system horizontally with 3 cm air circulation area.
 Do not install the E-500/E-501 system vertically since this prevents internal
convection.
 Ensure sufficient ventilation at the installation site.
The E-500.621 chassis uses the same main connectors as the E-500.00 and E-501.00, but
has incompatible pinouts.
 Do not use the modules described in this manual with the E-500.621 chassis.
Oscillations can cause irreparable damage to the piezo actuator connected to the E-500/E501 system. Oscillations are indicated by a humming and can result from the following
causes:
 The load and/or dynamics of operation differ too much from the calibration settings.
 The piezo actuator is operated near its resonance frequency.
If you notice oscillations:
 In closed-loop operation, immediately switch the servo mode off.
 In open-loop operation, immediately stop the piezo actuator.
The E-500/E-501 system performance can be reduced directly after power-on due to
thermal instability.
 Switch the E-500/E-501 system on at least one hour before working with it.
The constant application of high voltage to piezos can lead to leakage currents and
flashovers that destroy the ceramic.
If the E-500/E-501 system is not used, but should remain switched on to ensure the
temperature stability.
 Switch the servo mode off (open-loop operation)
 Set the piezo voltage to 0 V:
−
Analog mode: The input voltage for the target value is 0 V
−
Computer-controlled mode: Corresponding commanding
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E-500/E-501 Series PZT Servo Controllers
4.3.
User Manual PZ 62E
Power Connection
The power connection is located on the rear panel of the chassis. Unless you request
otherwise, the E-500/E-501 system will be set up for the line voltage we believe
predominant in your country.
How to adapt E-500/E-501 system to a different line voltage:
4.4.

If your system uses a 19” chassis (E-500.00), it is equipped with a wide-range power
supply and with fuses that are admissible for both 115 V and 230 V operation. No
settings need be changed when connecting the device to a different line voltage.

If your system uses a 9.5” chassis (E-501.00), it requires new fuses when it is to be
connect to a different line voltage. Replace both fuses as described in “AC Power
and Line Fuses” on p. 60.
First Electrical Checks
Check the device electrically when using it for the first time after unpacking. Perform these
steps:
1. Connect the power cord.
2. Switch the device on without any piezo actuators connected. The power switch is at the
rear next to the power cord socket.
3. Now the green LED on the amplifier module lights up.
4. If an E-517 Interface / Display module is installed:
The display shows the main screen, see E-517 user manual for details.
5. Set the SERVO switch on the E-509 module to OFF.
6. If an E-517 Interface / Display module is installed:
Turn the DC-OFFSET potentiometer and watch the voltage display. The voltage reading
is the current output voltage at the PZT output sockets.
The position values in the display have no meaning, because the piezo actuators and
sensors are not yet connected.
If these steps could be performed without unexpected results, the device has passed the
electrical checks.
4.5.
Connecting Cables
INFORMATION
Each E-509 sensor / servo-control module is calibrated with one particular piezo actuator.
That piezo actuator must always be connected to that same controller channel. Labels on the
rear panel of the device indicate the serial numbers of the piezo actuators that belong with
each channel.
After the system has passed the electrical checks, the piezo actuators can be connected
and the system can be operated. Follow these steps:
1. Switch the device OFF.
2. Connect the piezo actuators.
Each piezo actuator is equipped with cables for the piezo operating voltage and for
the sensor, if present. Connect the first cable to the PZT output socket on the
amplifier module and second with the sensor input socket on the piezo servocontroller.
If capacitive sensors are used, two sensor cables must be connected to the servocontroller. The cable labeled ´T´ must be connected to the T socket (target signal)
and the cable labeled ´P´ to the P socket (probe signal).
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E-500/E-501 Series PZT Servo Controllers
4.6.
Starting Operation
4.6.1.
Analog Operation
User Manual PZ 62E
INFORMATION
The external analog signal can be generated by a computer (e.g. from a data acquisition
board). You can use the PI LabVIEW analog driver to generate the analog signal.

See the E500T0011 Technical Note for how to download the driver set from our website.
1. Turn all DC-OFFSET potentiometers CCW (zero offset).
2. Turn all SERVO switches to OFF (open-loop operation).
Position servo-controllers can be operated in closed-loop (SERVO=ON, control input
is interpreted as target position) and open-loop (SERVO=OFF, control input
determines the output voltage directly) modes.
In closed-loop mode, the servo-control circuit is active and compares the sensor
signal with the target position. Hysteresis effects, nonlinearities and drift effects
are eliminated.
In open-loop mode, the servo-control circuit is deactivated. The device works as a
high-voltage amplifier. The input signal is amplified by the gain factor, and output
to the piezo actuator. The output signal can also be offset manually with the DCOFFSET potentiometer. In open-loop, the position sensor, if installed, is still active
and the real-time position reading is correct.
3. Turn the power on.
The standard screen appears on the display. The current output voltages and
displacements derived from the sensor signals are displayed for all channels.
Because the controller is set to open-loop mode, the sensor reading is not fed
back to control the position. If external forces act on the piezo actuator, its length
will change accordingly and so will the sensor reading.
4. Switch the Servo switches to ON (closed-loop).
Now the displacement is controlled in closed-loop servo-mode. The display shows
the current displacement values, as before.
5. Use the DC-Offset potentiometer to change the expansion.
6. Apply an external analog signal from 0 to +10 volts to control the expansion over the
nominal range.
The expansion of the piezo actuator can be controlled either by the DC-OFFSET
potentiometer or by an analog control input voltage applied to the CONTROL
INPUT socket. In the latter case, the potentiometer setting is used as an offset to
the control input voltage. This allows generation of unipolar output voltages from
bipolar control voltages.
7. Watch the yellow overflow LED on the servo-module. If it lights up, the amplifier output is
being clipped at one of its limits and the current displacement of the piezo actuator no
longer complies with the control signal. Use the ZERO trim potentiometer to adjust the
sensor reading window. Trim the potentiometer until the overflow LED stays dark.
4.6.2.
Computer Controlled Operation
If an E-517 Interface/display unit is installed, remote control via TCP/IP, USB, RS-232 or
IEEE-488 interface is possible. A comprehensive command set allows controlling any
motion of the piezo actuator with maximum resolution (depending on the sensor installed).
See User Manual for the interface unit for details.
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E-500/E-501 Series PZT Servo Controllers
5.
Module Description
5.1.
E-500.00 19” Chassis with Power Supply
5.1.1.
Specifications
5.1.2.
User Manual PZ 62E
Model
E-500.00
Function
19"-Chassis for Piezo Controller System: Amplifier
Modules, Sensor- / Servo-Control Modules, Interface /
Display Modules
Channels
1, 2, 3 (up to 3 amplifier modules)
Dimensions
450 x 132 x 296 mm + handles +feet
Operating Voltage
100 - 240 V~, 50 - 60 Hz
Max. power consumption
210 VA
Internal power supply
E530B0008
Dimensions
Fig. 3: E-500.00 chassis
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E-500/E-501 Series PZT Servo Controllers
5.2.
E-501.00 9.5”Chassis with Power Supply
5.2.1.
Specifications
5.2.2.
User Manual PZ 62E
Model
E-501.00
Function
9.5”-Chassis for Piezo Controller System: Amplifier
Modules, Sensor- / Servo-Control Modules, Interface /
Display Modules
Channels
1, 3 (1 amplifier module)
Dimensions
236 x 132 x 296 mm + handles + feet
Operating Voltage
100 - 120 / 220 - 240 V~, 50 - 60 Hz
Max. power consumption
90 VA
Internal power supply
E531B0005
Dimensions
Fig. 4: E-501.00 chassis
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E-500/E-501 Series PZT Servo Controllers
5.3.
User Manual PZ 62E
E-503 3-Channel Piezo Amplifier
DANGER
High Voltage!
The E-503 amplifier can output up to 130 V. Touching this High Voltage can result in serious
or even lethal injury due to electric shock.
5.3.1.

Only authorized and qualified personnel must install, operate, maintain and clean the E503 amplifier.

Operate a piezo actuator on a “PZT” socket only when it is connected to a protective earth
conductor.
Front Panel Elements
Fig. 6: E-503.00S amplifier module
Fig. 5: E-503.00 amplifier module
Labeling
Type
Function
POWER
LED
Amplifier state:
Green/off

Green: E­503 is ready for normal operation.

Off: The E-500/E-501 system is switched off.
LEMO
PZT
ERA.00.250.CTL
Output of the piezo voltage for the piezo actuator in the stage.
Voltage in the range of -30 to 130 V.
-30 to 130 V
E-503.00S only:
LEMO
ERA.00.250.CTL
Output of the piezo voltage for the piezo actuator in the stage.
Fixed voltage of 100 V for piezo tip/tilt stages.
PZT
100 V
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E-500/E-501 Series PZT Servo Controllers
User Manual PZ 62E
Labeling
Type
Function
CONTROL INPUT
BNC
In analog operation, this control input voltage gives the target
(either as voltage or position, depending on the servo mode).
The input signal should always be in the range of 0 to 10 V
(excursions to -2 or +12 V may cause overflow, especially with
servo on, and reduce actuator lifetime).
The control input range can be shifted using the “DC-OFFSET”
potentiometer.
The control input voltage can also be a computer-generated
analog signal (e.g. from a DAQ board). You can use a PI
LabVIEW Analog Driver set to generate that analog signal.
See “Analog Operation” on p. 17 for details.
10-turn
potentiometer
Adds 0 to 10 V to the “CONTROL INPUT” signal (only relevant
in analog operation, see p. 17 for details)
-2 to +12 V
DC-OFFSET
5.3.2.
Operating Limits
Fig. 7: E-503 operating limits with various piezo loads (open-loop), capacitance is
measured in µF
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E-500/E-501 Series PZT Servo Controllers
5.3.3.
User Manual PZ 62E
Specifications
E-503.00
E-503.00S
Function
Power amplifier
Power amplifier for tip/tilt systems
Channels
3
3
-2 to 12 V
-2 to 12 V
Amplifier
Control input voltage
Channel 3: no control input
Output voltage
-30 to 130 V
-30 to 130 V
Channel 3: 100 V fixed voltage
Peak current per channel, <10 ms
>140 mA (typical 180 mA)
>140 mA (typical 180 mA)
Average current per channel,
>10 ms
>70 mA
>70 mA
Current limitation
Short-circuit-proof
Short-circuit-proof
Voltage gain
10 ±0.1
10 ±0.1 (not with channel 3)
Input impedance
100 kΩ / 1 nF
100 kΩ / 1 nF (not with channel 3)
Piezo connector
3 × LEMO ERA.00.250.CTL
3 × LEMO ERA.00.250.CTL
Analog input / control in
3 × BNC
2 × BNC
DC Offset
3 × 10-turn pot., adds 0 to 10 V to 2 × 10-turn pot., adds 0 to 10 V to
Control In
Control In
Interface and operation
Miscellaneous
Operating temperature range
5 to 50 °C
5 to 50 °C
Overtemp protection
Deactivation at 85 °C
Deactivation at 85 °C
Dimensions
14HP/3U
14HP/3U
Mass
0.9 kg
0.9 kg
Operating voltage
E-500/E-501 system
E-500/E-501 system
Max. power consumption
< 40 W, limited by temperature
< 40 W, limited by temperature
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E-500/E-501 Series PZT Servo Controllers
5.3.4.
User Manual PZ 62E
Pin Assignment
32-pin connector, DIN 41612, male
Row
PIN a
2
Power Fail
4
IN: ch1
6
nc
8
nc
10
nc
12
IN: ch2
14
internal use Bus_A
16
internal use Bus_Vcc
18
nc
20
IN: ch3*
22
GND (measurement)
24
GND
26
IN: +24 V to +27 V
28
IN:-37 V
30
IN:+137 V
32
Protective earth (chassis)
PIN c
OUT: ch1 (BNC+Offset)
OUT: ch1 (monitor of piezo voltage (PZT ÷100)
nc
nc
OUT: ch2 (BNC+Offset)
OUT: ch2 (monitor of piezo voltage (PZT ÷100)
internal use Bus_B
internal use Bus_GND
OUT: ch3 (BNC+Offset)*
OUT: ch3 (monitor of piezo voltage (PZT ÷100)
GND (measurement)
GND
IN: +24 V to +27 V
OUT: -10 V
IN: +137 V
Protective earth (chassis)
* E-503.00S: nc
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E-500/E-501 Series PZT Servo Controllers
5.4.
User Manual PZ 62E
E-504 High-Power Piezo Amplifier, Energy Recovery
DANGER
High Voltage!
The E-504 amplifier can output up to 130 V. Touching this High Voltage can result in serious
or even lethal injury due to electric shock.
5.4.1.

Only authorized and qualified personnel must install, operate, maintain and clean the E504 amplifier.

Operate the piezo actuator on the “PZT” socket only when it is connected to a protective
earth conductor.
Front Panel Elements
Fig. 8: E-504.00F amplifier module
Fig. 9: E-504.00S amplifier module
Labeling
Type
Function
POWER
LED
Amplifier state:
Green/off

Green: E­504 is ready for normal operation.

Off: The E-500/E-501 system is switched off.
E-504.00F only:
DC-OFFSET
E-504.00F only:
10-turn
potentiometer
Adds 0 to 10 V to the “CONTROL INPUT” signal (only relevant
in analog operation, see p. 17 for details)
SMB
In analog operation, this control input voltage gives the target
(either as voltage or position, depending on the servo mode).
The input signal should always be in the range of 0 to 10 V
(excursions to -2 or +12 V may cause overflow, especially with
servo on, and reduce actuator lifetime).
The control input range can be shifted using the “DC-OFFSET”
potentiometer.
The control input voltage can also be a computer-generated
analog signal (e.g. from a DAQ board). You can use a PI
LabVIEW Analog Driver set to generate that analog signal.
See “Analog Operation” on p. 17 for details.
CONTROL INPUT
-2 to +12 V
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E-500/E-501 Series PZT Servo Controllers
User Manual PZ 62E
Labeling
Type
Function
E-504.00F only:
LEMO
Output of the piezo voltage for the piezo actuator in the stage.
Voltage in the range of -30 to 130 V.
ERA.00.250.CTL
PZT
-30 to 130 V
E-504.00S only:
LEMO
ERA.00.250.CTL
Output of the piezo voltage for the piezo actuator in the stage.
Fixed voltage of 100 V for piezo tip/tilt stages.
PZT
100 V
5.4.2.
Operating Limits
Fig. 10: E-504 operating limits with various piezo loads (open-loop), capacitance is
measured in µF
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E-500/E-501 Series PZT Servo Controllers
5.4.3.
User Manual PZ 62E
Specifications
E-504.00F
E-504.00S
Power amplifier with energy
recovery, 1 channel
Power amplifier with energy recovery,
1 channel, for tip/tilt systems
Control input voltage range
-2 to +12 V
-
Output voltage
-30 V to +130 V
100 V
Peak output power < 5ms
280 W
280 W
Average output power
Equivalent to 100 W reactive power
Equivalent to 100 W reactive power
Peak output current < 5 ms
2000 mA
2000 mA
Average output current
1000 mA
1000 mA
Current limitation
Short-circuit-proof
Short-circuit-proof
Voltage gain
10 ±0.1
-
Ripple, noise
5 mVrms / < 10 kHz,
20 mVpp / < 10 kHz
< 30 mVrms / < 100 kHz,
< 100 mVpp / 100 kHz
< 30mVrms / < 100 kHz,
< 100mVpp / 100 kHz
< 150 mVpp / 20 MHz
Function
Amplifier
< 150mVpp / 20 MHz
Base load (internal)*
1.5 µF
1.5 µF
Output impedance
1.5 µH / 0.5 Ω / 1.5 µF
1.5 µH / 0.5 Ω / 1.5 µF
Amplifier step resolution
10 mV
-
Amplifier type
Class D, switching amp (100 kHz)
Class D, switching amp (100 kHz)
Input impedance
100 kΩ
-
Piezo connector
LEMO ERA.00.250.CTL
LEMO ERA.00.250.CTL
Analog input
SMB
-
DC-Offset
10-turn pot., adds 0 to +10 V to
Control In
-
Operating temperature range
+5 to +50 °C
+5 to +50 °C
Dimensions
One 14T slot wide, 3H high
One 14T slot wide, 3H high
Mass
0.9 kg
0.9 kg
Operating voltage
E-500/E-501 system
E-500/E-501 system
Max. power consumption
< 30 W
< 30 W
Interfaces and operation
Miscellaneous
* The internal base load is required to obtain a stable amplifier output voltage when no
external piezo load is connected. The total load is the sum of internal base load and external
piezo load. Note that the amplifier output power is allocated to the internal and external loads
according to their capacitance values. This is of particular importance under large-signal
conditions.
Examples: The small-signal capacitance of the connected piezo actuator is 550 nF, hence its
large-signal capacitance is approx. 1.1 μF (2 * 550 nF). Under large-signal conditions,
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E-500/E-501 Series PZT Servo Controllers
User Manual PZ 62E
approx. 58 W will be allocated to the internal base load (1.5 μF), while approx. 42 W will be
available for the external piezo load.
With a small-signal capacitance of 1 μF, the piezo actuator would have a large-signal
capacitance of 2 μF, and approx. 57 W would be available for it.
5.4.4.
Pin Assignment
32 pin connector, DIN 41612, male
Row
PIN a
2
Power Fail
4
IN: ch1*
6
Piezo voltage GND
8
OUT: piezo voltage
10
n.c.
12
n.c.
14
IN: sync 200 kHz TTL
16
internal use, Bus_Vcc
18
n.c.
20
n.c.
22
GND (measurement)
24
GND (power)
26
IN: +24 to +27 V
28
n.c.
30
n.c.
32
Protective earth (chassis)
PIN c
OUT: ch1 (SMB+Offset)*
OUT: ch1 (monitor)
Piezo voltage GND
OUT: piezo voltage
n.c.
n.c.
internal use, Bus_B
internal use, Bus_GND
n.c.
n.c.
GND (measurement)
GND (power)
IN: +24 to +27 V
n.c.
n.c.
Protective earth (chassis)
* E-504.00S: Pins 2c and 4a are shorted.
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E-500/E-501 Series PZT Servo Controllers
5.5.
User Manual PZ 62E
E-505 High-Power Piezo Amplifier
DANGER
High Voltage!
The E-505 amplifier can output up to 130 V. Touching this High Voltage can result in serious
or even lethal injury due to electric shock.
5.5.1.

Only authorized and qualified personnel must install, operate, maintain and clean the E505 amplifier.

Operate the piezo actuator on the “PZT” socket only when it is connected to a protective
earth conductor.
Front Panel Elements
Fig. 11: E-505.00 and E-505.10 amplifier modules
Labeling
Type
Function
POWER
LED
Amplifier state:
Green/off


Fig. 12: E-505.00S amplifier module
Green: E­505 is ready for normal operation.
Off: The E-500/E-501 system is switched off.
E-505.00 and .10 only: 10-turn
potentiometer
DC-OFFSET
Adds 0 to 10 V to the “CONTROL INPUT” signal (only relevant
in analog operation, see p. 17 for details)
E-505.00 and .10 only: BNC
In analog operation, this control input voltage gives the target
(either as voltage or position, depending on the servo mode).
The input signal should always be in the range of 0 to 10 V
(excursions to -2 or +12 V may cause overflow, especially with
servo on, and reduce actuator lifetime).
The control input range can be shifted using the “DC-OFFSET”
potentiometer.
The control input voltage can also be a computer-generated
analog signal (e.g. from a DAQ board). You can use a PI
LabVIEW Analog Driver set to generate that analog signal.
See “Analog Operation” on p. 17 for details.
CONTROL INPUT
-2 to +12 V
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E-500/E-501 Series PZT Servo Controllers
Labeling
Type
E-505.00 and .10 only: LEMO
ERA.00.250.CTL
User Manual PZ 62E
Function
Output of the piezo voltage for the piezo actuator in the stage.
Voltage in the range of -30 to 130 V.
PZT
-30 to 130 V
E-505.00S only:
LEMO
ERA.00.250.CTL
Output of the piezo voltage for the piezo actuator in the stage.
Fixed voltage of 100 V for piezo tip/tilt stages.
PZT
100 V
5.5.2.
Operating Limits
Fig. 13: E-505 operating limits with various piezo loads (open-loop), capacitance is
measured in µF
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E-500/E-501 Series PZT Servo Controllers
5.5.3.
User Manual PZ 62E
Specifications
E-505.00
E-505.10
E-505.00S
Function
Power amplifier
Power amplifier
Power amplifier for tip/tilt
systems
Channels
1
1
1
Control input voltage
-2 to +12 V
-2 to +12 V
-
Output voltage
-30 to +130 V
-30 to +130 V
100 V
Peak current
2 A (<3 ms)
10 A (<200 µs)
2 A (<3 ms)
Average current
250 mA
250 mA
250 mA
Current limitation
Short-circuit-proof
Short-circuit-proof
Short-circuit-proof
Noise, 0 to 100 kHz
<0.6 mVrms
<1.0 mVrms
<0.6 mVrms
Voltage gain
10 ±0.1
10 ±0.1
-
Input impedance
1 MΩ / 1 nF
1 MΩ / 1 nF
-
Piezo connector
LEMO ERA.00.250.CTL
LEMO ERA.00.250.CTL
LEMO ERA.00.250.CTL
Analog input
BNC
BNC
-
DC Offset
10-turn pot., adds 0 to
10 V to Control In
10-turn pot., adds 0 to
10 V to Control In
-
Operating temperature
range
+5 to +50 °C
+5 to +50 °C
+5 to +50 °C
Overtemp protection
Deactivation at +85°C
Deactivation at +85°C
Deactivation at +85°C
Dimensions
14HP/3U
14HP/3U
14HP/3U
Ground
0.9 kg
0.9 kg
0.9 kg
Operating voltage
E-500/E-501 system
E-500/E-501 system
E-500/E-501 system
Max. power consumptions
55 W
55 W
55 W
Amplifier
Interface and operation
Miscellaneous
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E-500/E-501 Series PZT Servo Controllers
5.5.4.
User Manual PZ 62E
Pin Assignment
32 pin connector, DIN 41612, male
Row
PIN a
2
Power Fail
4
IN: ch1*
6
Piezo voltage GND
8
OUT: piezo voltage
10
n.c.
12
n.c.
14
internal use,Bus_A
16
internal use, Bus_Vcc
18
n.c.
20
n.c.
22
GND (measurement)
24
GND (power)
26
IN: +24 V to +27V
28
IN: -37 V
30
IN: +137 V
32
Protective earth (chassis)
PIN c
OUT: ch1 (BNC+Offset)*
OUT: ch1 (monitor)
Piezo voltage GND
OUT: piezo voltage
n.c.
n.c.
internal use, Bus_B
internal use, Bus_GND
n.c.
n.c.
GND (measurement)
GND (power)
IN: +24 V to +27 V
OUT: -10 V
IN: +137 V
Protective earth (chassis)
* E-505.00S: Pins 2c and 4a are shorted.
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E-500/E-501 Series PZT Servo Controllers
5.6.
User Manual PZ 62E
E-506 Linearized Piezo Amplifier, Charge Control
DANGER
High Voltage!
The E-506 amplifier can output up to 130 V. Touching this High Voltage can result in serious
or even lethal injury due to electric shock.

Only authorized and qualified personnel must install, operate, maintain and clean the E506 amplifier.

Operate the piezo actuator on the “PZT” socket only when it is connected to a protective
earth conductor.
INFORMATION
Standard nanopositioning stages are not suitable for operation with the E-506.10 and cannot
be connected via an adapter!
See the E506T0002 Technical Note for a more detailed description of the E-506.10 chargecontrolled amplifier module.Front Panel Elements
Fig. 14: E-506.10 amplifier module
Labeling
Type
Function
POWER
LED
Amplifier state:
Green/off


OVERTEMP
DC-OFFSET
Green: E­506 is ready for normal operation.
Off: The E-500/E-501 system is switched off.
LED
Overtemp state:
Red/off

Red: Piezo voltage output is deactivated due to overtemp
condition at the piezo actuator (see below)

Off: No overtemp condition
10-turn
potentiometer
Release 2.15.1
Adds 0 to 10 V to the “CONTROL INPUT” signal (only relevant in
analog operation, see p. 17 for details)
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E-500/E-501 Series PZT Servo Controllers
User Manual PZ 62E
Labeling
Type
Function
CONTROL INPUT
BNC
In analog operation, this control input voltage gives the target (either
as voltage or position, depending on the servo mode). The input
signal should always be in the range of 0 to 10 V (excursions to -2 or
+12 V may cause overflow, especially with servo on, and reduce
actuator lifetime).
The control input range can be shifted using the “DC-OFFSET”
potentiometer.
The control input voltage can also be a computer-generated analog
signal (e.g. from a DAQ board). You can use a PI LabVIEW Analog
Driver set to generate that analog signal. See “Analog Operation” on
p. 17 for details.
LEMO
Connection for PT1000 temperature sensor or dummy plug.
-2 to +12 V
TEMP SENSOR
EPL.0S.303.HLN Pinout on p. 35
LEMO
PZT
-30 to +130 V
5.6.2.
Output of the piezo voltage for the piezo actuator in the stage.
EGG.0B.302.CLL Piezo voltage output is deactivated if a temperature of 150 °C is
exceeded at the piezo actuator. Automatic reactivation at a
Pinout on p. 35
temperature < 146 °C
Operating Limits
Fig. 15: E-506 operating limits with various piezo loads (open-loop), capacitance is
measured in µF. The minimum capacitive load is 0.3 µF
Release 2.15.1
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E-500/E-501 Series PZT Servo Controllers
5.6.3.
User Manual PZ 62E
Specifications
E-506.10
Function
Linearized amplifier module, chargecontrolled
Channels
1
Tolerance
Amplifier
Input voltage
-2 to +12 V
Output voltage*
-30 to 130 V
Peak output power, < 2.5 ms
280 W
max.
Average output power
30 W
max.
Peak current, < 2.5 ms
2A
Average current
250 mA
Current limitation
Short-circuit-proof
Ripple, noise 0 to 100 kHz
<0.6 mVrms
Reference capacitance (adjustable)
1 to 280 µF
Input impedance
1 MΩ / 1 nF
Interfaces and operation
Piezo connector (voltage output)
LEMO 2-pin EGG.0B.302.CLL
Analog input
BNC
Display
LEDs for power and piezo overtemp
DC Offset
10-turn pot., adds 0 to 10 V to Control
In
Piezo temperature sensor (input)
PT 1000;
LEMO socket; deactivation of the piezo
voltage output at 150 °C
Miscellaneous
Operating temperature range
+5 to +50 °C
Dimensions
14HP/3U
Mass
0.9 kg
Operating voltage
E-500/E-501 system
Power consumption
55 W
max.
*Max. 85°C, deactivation of the piezo voltage output (internal overtemp protection)
Minimum frequencies* for charge-controlled operation:
Capacitance (piezo actuator)
ftrans
0.33 µF
250 mHz
1.06 µF
80 mHz
6.2 µF
9 mHz
14 µF
4 mHz
* Voltage-controlled operation for lower frequencies
Release 2.15.1
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E-500/E-501 Series PZT Servo Controllers
5.6.4.
User Manual PZ 62E
Pin Assignment
PZT High Voltage
Top pin: Plus
Bottom pin: Return conductor (minus; the actuator
connected must have a floating-ground
construction!)
Housing: Protective earth
PT1000 Temperature sensor
Schematic circuit
diagram of
temperature sensor
LEMO EPL.OS.303.HLN
Temperature sensor socket
Pin 1:
Pin 2:
Pin 3:
Housing:
Temp_SA
Temp_S
GND/PE
Protective earth conductor/GND/PE
32 pin connector, DIN 41612, male
Row
2
4
6
8
10
12
14
16
18
20
22
24
26
28
30
32
PIN a
Power Fail
IN: ch1
Piezo voltage GND
OUT: piezo voltage
n.c.
n.c.
n.c.
IN: -15 V
n.c.
n.c.
GND (measurement)
GND (power)
IN:+24 V to +27 V
IN: -37 V
IN: +137 V
Protective earth (chassis)
Release 2.15.1
PIN c
OUT: ch1 (BNC+Offset)
OUT: ch1 (monitor)
Piezo voltage GND
OUT: piezo voltage
n.c.
n.c.
n.c.
n.c.
n.c.
n.c.
GND (measurement)
GND (power)
IN: +24 V to +27 V
OUT: -10 V
IN: +137 V
Protective earth (chassis)
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E-500/E-501 Series PZT Servo Controllers
5.7.
User Manual PZ 62E
E-508 High-Power Piezo Amplifier with 1100 V Output Voltage
DANGER
High Voltage!
The E-508 amplifier can output up to 1100 V. Touching this High Voltage can result in serious
or even lethal injury due to electric shock.
5.7.1.

Only authorized and qualified personnel must install, operate, maintain and clean the E508 amplifier.

Operate the piezo actuator on the “PZT HIGH VOLTAGE” socket only when it is
connected to a protective earth conductor.
Front Panel Elements
Fig. 16: E-508.00 amplifier module
Fig. 17: E-508.OE amplifier module
Labeling
Type
Function
POWER
LED
Amplifier state:
Green/off

Green: E­508 is ready for normal operation.

Off: The E-500/E-501 system is switched off.
E-508.00 only:
10-turn potentiometer
DC-OFFSET
Release 2.15.1
Adds 0 to 10 V to the “CONTROL INPUT” signal (only relevant
in analog operation, see p. 17 for details)
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E-500/E-501 Series PZT Servo Controllers
User Manual PZ 62E
Labeling
Type
Function
CONTROL INPUT
E-508.00: BNC
In analog operation, this control input voltage gives the target
(either as voltage or position, depending on the servo mode).
Input voltage range:
E-508.OE: SMB

Servo off: ±1/100 of selected output range

Servo on: 0 to 10 V
With E-508.00, the control input range can be shifted using the
“DC-OFFSET” potentiometer.
The control input voltage can also be a computer-generated
analog signal (e.g. from a DAQ board). You can use a PI
LabVIEW Analog Driver set to generate that analog signal.
See “Analog Operation” on p. 17 for details.
See the „Specifications“ table below for the input voltage
range.
PZT
High Voltage
5.7.2.
LEMO
Output of the piezo voltage for the piezo actuator in the stage.
EGG.0B.701.CJL.1173
See the „Specifications“ table below for the output voltage
range.
Pinout on p. 39
Operating Limits
Fig. 18: E-508 operating limits with various piezo loads (open-loop), capacitance is
measured in nF
Release 2.15.1
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E-500/E-501 Series PZT Servo Controllers
5.7.3.
User Manual PZ 62E
Specifications
Function
E-508.00
E-508.OE
Unit
Power amplifier for PICA highvoltage piezos
Power amplifier for PICA highvoltage piezos
Amplifier
Output voltage
3 to
+ 1100 (Standard)
3 to
+ 1100 (Standard)
(-260 to + 780
(-260 to + 780
- 550 to
+ 550
- 550 to
+ 550
+260 to
-780
+260 to
-780
- 3 to
- 1100) (jumperselectable)
- 3 to
- 1100) (factorysettable)
V
Amplifier channels
1
1
Average output power
13
18
W
Peak output power, < 5 ms
50
400
W
Average current
12
18
mA
Peak current, < 5ms
50
400
mA
Amplifier bandwidth, small
signal
6
10
kHz
Amplifier bandwidth, large
signal
50 (200 nF)
70 (200 nF)
Hz
Ripple, noise
0 to 100 kHz
5
20
mVRMS
50 (100 nF)
200 (100 nF)
mVP-P
Current limitation
Short-circuit-proof
Short-circuit-proof
Voltage gain
+100 ±1, -100 ±1 (selectable)
+100 ±1, -100 ±1 (selectable)
Control input voltage
Servo off: ±1/100 of selected
output range
Servo off: ±1/100 of selected
output range
Servo on: 0 to 10 V
Servo on: 0 to 10 V
100
100
Piezo voltage output
LEMO EGG.0B.701.CJL.1173
LEMO EGG.0B.701.CJL.1173
Input
BNC
SMB
DC-Offset
10-turn pot., adds 0 to 10 V to
Control In
-
Operating voltage
E-500/E-501 system
E-500/E-501 system
Operating temperature range
+5 °C to +50 °C output power
10 % derated over 40 °C)
+5 °C to +50 °C (output power
10 % derated over 40 °C)
°C
Mass
0.75
0.75
kg
Dimensions
14 HP/3 U
14 HP/3 U
Input impedance
kΩ
Interfaces and operation
Miscellaneous
Release 2.15.1
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E-500/E-501 Series PZT Servo Controllers
5.7.4.
User Manual PZ 62E
High-Voltage Actuator Types and Terminology
If you order the actuator and controller together, and/or provide PI with sufficient information about
your application, then the actuator connector, output voltage range and gain polarity will be set up as
required.
If you are connecting other actuators or wiring your own connector, read the discussion of actuator
type carefully and any documentation that came with the actuator.
Bipolar Actuators
Here the output voltage swing is so chosen that the actuator sees both negative and positive high
voltages. The output always has one lead at 0 V, and here the other is in a zero-crossing range,
commonly·±500·V.
Unipolar Actuators
The notation of “positive” and “negative” polarity of piezo actuators does not refer to their direction of
motion. Unipolar piezos of any polarity will elongate when a higher voltage is applied to their (+) than
to their (-) terminal.
“Positive” and “negative” refers to the sign of the voltage on the core of the cable.
All standard PI piezo actuators with 2-conductor LEMO connectors have positive polarity.
5.7.5.
Pin Assignment
PZT High Voltage
Type: LEMO EGG.0B.701.CJL.1173
HV OUT:
High-voltage output
PGND:
Power ground
Housing:
Cable shield
32-pin connector, DIN 41612, male
Row
PIN a
2
IN: Power Fail*
4
IN: control
6
nc
8
nc
10
nc
12
nc
14
internal use (Bus_A)*
16
internal use (Bus_Vcc)*
18
nc
20
nc
22
GND (measurement)
24
GND
26
IN: +24 V to +27 V
28
nc
30
nc
32
Protective earth (chassis)
* no connection on E-508.OE
Release 2.15.1
PIN c
OUT: control (E-508.00: BNC+Offset / E-508.OE: SMB)
OUT: monitor of piezo voltage (PZT ÷1000)
nc
nc
nc
nc
internal use (Bus_B)*
internal use (Bus_GND)*
nc
nc
GND (measurement)
GND
IN: +24 V to +27 V
nc
nc
Protective earth (chassis)
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E-500/E-501 Series PZT Servo Controllers
5.7.6.
User Manual PZ 62E
E-508.00 Gain Polarity and Output Range Settings
NOTICE
Damage from electrostatics!
The E-500/E-501 system contains electrostatic sensitive devices (EGB) and can be damaged
if handled improperly.

Avoid touching components, pins and PCB tracks.

Before touching an electronic component, discharge yourself of any electric charges:
−
While working, wear an antistatic wrist strap
or
−
Briefly touch a conducting, grounded object.
Making the gain polarity switch and output range jumper accessible
Only remove modules from the chassis when you are authorized and have the
corresponding qualifications.
1. Remove the E-500/E-501 system from the power source by pulling the power plug.
2. Wait a minute to be sure that any residual voltage has dissipated.
3. Remove the E-508.00 module from the chassis:
a)
b)
Loosen the four Phillips screws on the front panel.
Using the grip at the bottom of the front panel, pull the module out of the chassis.
4. To access settings for gain polarity and output range, remove the rear cover plate from the E508.00 module and slide back the perforated aluminum top.
Perforated Al top
Trim Pots: DO NOT TOUCH
Rear cover plate
Gain polarity switch
Left:
gain = -100
Right (default):
gain = +100
Setting the Gain Polarity Switch
It is important to understand the relation between gain and the Control In range.
With DC-offset = 0 (full CCW), the Control In range is equal to output range (as set below)
divided by the gain.
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E-500/E-501 Series PZT Servo Controllers
User Manual PZ 62E
For example, in open-loop operation, the output range +3 to +1100 V and gain +100 yield a
Control In range of 0 to +11 V.
Setting the Output Range Jumper
Ranges
E
+3 to +1100 V
(factory setting)
D
-260 to +780 V
C
-550 to +550 V
B
-780 to +260 V
A
-1100 to -3 V
To change setting, remove red cap
(shown in Range E position) and
replace over pins corresponding to
desired range.
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E-500/E-501 Series PZT Servo Controllers
5.8.
User Manual PZ 62E
E-509 Signal Conditioner / Servo-Controller Module
INFORMATION
5.8.1.

See the E-509 User Manual (PZ77) for a detailed description.

See also the User Manuals for the E-802 servo-controller submodule (with all E-509
versions) and the E-801 sensor submodule (only with LVDT and strain gauge sensor
versions).
Front Panel Elements of Modules for Dual-Electrode Capacitive Sensors
Fig. 20: E-509.C2A
sensor / servo controller
Fig. 19: E-509.C1A sensor
/ servo controller
Fig. 21: E-509.C3A
sensor / servo controller
Labeling
Type
Function
T
LEMO
Input for the Target sensor signal from the piezo stage.
EPL.00.250.NTD
P
LEMO
Input for the Probe sensor signal from the piezo stage.
EPL.00.250.NTD
ZERO
Trim potentiometer A trimmer adjustment tool can be used on the ZERO potentiometer
for a zero-point adjustment of the sensor. A zero-point adjustment
can be necessary after longer operation (changes in temperature)
or if the load on the piezo stage is changed.
OFL
LED
Overflow state:
Yellow/off

Yellow: Overflow condition, i.e. the amplifier is near its range
limit.

Off: No overflow condition
When the OFL LED comes on, a zero-point adjustment of the
sensor can be necessary. See p. 17 and the E-509 User Manual
(PZ77E) for details.
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E-500/E-501 Series PZT Servo Controllers
Labeling
Type
User Manual PZ 62E
Function
SERVO x ON/OFF Toggle switch
Switch for the servo mode selection of the corresponding channel:
x stands for the
channel number


ON: Servo mode is switched on (closed-loop operation)
OFF: Servo mode is switched off (open-loop operation)
See also “Starting Operation” on p. 17.
SENSOR
MONITOR
LEMO
Output of the monitor signal(s) for the sensor channel(s).
EGG.0B.306.CLL
Pinout on p. 48.
5.8.2. Front Panel Elements of Modules for PISeca Single-Electrode Capacitive
Sensors
Fig. 22: E-509.E3 sensor / servo
controller
Fig. 23: E-509.E03 sensor signal
conditioner
Labeling
Type
Function
Gnd
Banana socket
Ground connection for target plane of the PISeca single-electrode
capacitive sensor.
In
LEMO
Input for the Probe sensor signal of the PISeca single-electrode
ECP.00.650.NLL. capacitive sensor.
543, triaxial
With E-509.E3 only: Toggle switch
Switch for the servo mode selection of the corresponding channel:
Servo x On/Off


x stands for the
channel number
Release 2.15.1
ON: Servo mode is switched on (closed-loop operation)
OFF: Servo mode is switched off (open-loop operation)
See also “Starting Operation” on p. 17.
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E-500/E-501 Series PZT Servo Controllers
Labeling
Type
With E-509.E3 ony: LED
Yellow/off
OFL
User Manual PZ 62E
Function
Overflow state:

Yellow: Overflow condition, i.e. the amplifier is near its range
limit.

Off: No overflow condition
When the OFL LED comes on, a zero-point adjustment of the
sensor can be necessary. See p. 17 and the E-509 User Manual
(PZ77E) for details.
ZERO
Trim
potentiometer
SENSOR MONITOR LEMO
A trimmer adjustment tool can be used on the ZERO potentiometer
for a zero-point adjustment of the sensor. A zero-point adjustment
can be necessary after longer operation (changes in temperature)
or if the load on the piezo stage is changed.
Output of the monitor signals for the sensor channels.
EGG.0B.306.CLL Pinout on p. 48.
5.8.3.
Front Panel Elements of Modules for Strain Gauge Sensors
Fig. 24: E-509.S1 sensor / servo
controller
Fig. 25: E-509.S3 and E-509.S31 sensor /
servo controller
INFORMATION
In the labeling of E-509.S1 and E-509.S3 modules, X stands for S.
INFORMATION
E-509.S31 and E-509.S3N models for use with P-611 NanoCube® stages:
E-509.S31 differs from E-509.S3 only in the settings of the internal E-801 sensor submodule.
E-509.S3N consists of an E-509.S31 module plus a P-611.91 3-channel adapter cable
LEMO/Sub-D 25 (f).
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E-500/E-501 Series PZT Servo Controllers
User Manual PZ 62E
Labeling
Type
Function
OFL
LED
Overflow state:
Yellow/off

Yellow: Overflow condition, i.e. the amplifier is near its range
limit.

Off: No overflow condition
When the OFL LED comes on, a zero-point adjustment of the
sensor can be necessary. See p. 17 and the E-509 User Manual
(PZ77E) for details.
SERVO ON/OFF
Toggle switch
1, 2 and 3 stand for
the channel
numbers
Switch for the servo mode selection of the corresponding channel:

ON: Servo mode is switched on (closed-loop operation)

OFF: Servo mode is switched off (open-loop operation)
See also “Starting Operation” on p. 17.
ZERO
Trim potentiometer A trimmer adjustment tool can be used on the ZERO potentiometer
for a zero-point adjustment of the sensor. A zero-point adjustment
can be necessary after longer operation (changes in temperature)
or if the load on the piezo stage is changed.
SENSOR
LEMO
Input for the signals of the strain gauge sensor of the piezo stage.
ERA.0S.304.CLL
Pin assignment on p. 47.
E-509.S1:
Output of the monitor signal(s) for the sensor channel(s).
BNC
Pin assignment for E-509.S3 on p. 48.
SENSOR
MONITOR
E-509.S3:
LEMO
ERA.0S.303.CLL
5.8.4.
Specifications
E-509.C1A / E-509.C2A / E-509.C3A E-509.S1 / E-509.S3 / E-509.S31
Function
Signal conditioner and servocontroller for piezo mechanics
Signal conditioner and servocontroller for piezo mechanics
Channels
1/2/3
1/3
Servo characteristics
Analog proportional-integral (P-I)
algorithm with notch filter
Analog proportional-integral (P-I)
algorithm with notch filter
Sensor type
2-plate capacitive
SGS
Sensor channels
1 / 2 /3
1/3
Sensor bandwidth
0.3 to 3 kHz (adjustable with
jumper); up to 10 kHz on request
0.3; 1; 3 kHz
Noise factor
0.115 ppm/Hz
-
Thermal drift
< 0.3 mV/C°
< 3 mV /C°
Linearity
<0.05%
<0.2%
Linearization
ILS (Integrated Linearization System) On E-801 submodule
Sensor
Release 2.15.1
½
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E-500/E-501 Series PZT Servo Controllers
User Manual PZ 62E
E-509.C1A / E-509.C2A / E-509.C3A E-509.S1 / E-509.S3 / E-509.S31
Interfaces and operation
Sensor connection
LEMO EPL.00.250.NTD
LEMO ERA.0S.304.CLL
Sensor monitor output
0 to 10 V (±5 V)
0 to 10 V (±5 V)
Sensor monitor socket
LEMO 6-pin FGG.0B.306.CLAD56
BNC (1-ch.) / 3-pin. LEMO
ERA.0S.303.CLL (3-ch.)
Display
Overflow LED
Overflow LED
Operating temperature range
+5 to +50°C
+5 to +50°C
Dimensions
7HP/3U
7HP/3U
Mass
0.2 kg / 0.25 kg / 0.35 kg
0.2 kg / 0.25 kg / 0.35 kg
Operating voltage
E-500/E-501 system, +/-15 V/0.5 A
E-500/E-501 system, +/-15 V/0.5 A
Max. power consumption
4 to 8 W
4 to 8 W
E-509.E03
E-509.E3
Function
Signal conditioner electronics for
PISeca sensors
Sensor / Piezo Servo-Control Module
for PISeca sensors
Channels
3
3
Servo characteristics
-
Analog proportional-integral (P-I)
algorithm with notch filter
Sensor type
PISeca single-electrode, capacitive
PISeca single-electrode, capacitive
Sensor bandwidth
3 kHz
3 kHz
0.3 / 10 kHz (selectable)
0.3 / 10 kHz (selectable)
Measurement range extension
factors*
2 / 2.5 / 5 (option)
2 / 2.5 / 5 (option)
Synchronization
3 synchronized channels
3 synchronized channels
0 to 10 V
0 to 10 V
Miscellaneous
Sensor
Electrical properties
Output voltage
-5 to +5 V, -10 to 0 V (selectable)
Thermal drift
<1 mV / C°
<1 mV / C°
Resolution @ 300 Hz (RMS)
<0.001% of measurement range
<0.001% of measurement range
Resolution @ 3 kHz (RMS)
<0.0025% of measurement range
<0.0025% of measurement range
Linearity @ nominal range
<0.1 % (<0.2% for D-510.020)
<0.1 % (<0.2% for D-510.020)
Sensor connection
3 × LEMO ECP.00.650.NLL.543
socket, triaxial
3 × LEMO ECP.00.650.NLL.543
socket, triaxial
Sensor monitor
0 to 10 V (±5 V)
0 to 10 V (±5 V)
Sensor monitor socket
LEMO 6-pin FGG.0B.306.CLAD56
LEMO 6-pin FGG.0B.306.CLAD56
Display
—
3 × Overflow LED
Supported functionality
ILS (Integrated Linearization System) ILS (Integrated Linearization System)
Interfaces and operation
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E-500/E-501 Series PZT Servo Controllers
User Manual PZ 62E
E-509.E03
E-509.E3
Operating temperature range
+5°C to +40 °C
+5°C to +40 °C
Dimensions
7HP/3U
7HP/3U
Target ground connector
3 × banana socket
3 × banana socket
Operating voltage
E-500/E-501 system
E-500/E-501 system
Miscellaneous
*Extension factors to multiply by the nominal measurement range of the selected sensor
head D-510, to be specified with order
5.8.5.
Pin Assignment
SENSOR socket of E-509.S3 and E-509.S1
Fig. 26: Strain gauge sensor wiring for various piezo actuators
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User Manual PZ 62E
SENSOR MONITOR socket of E-509.S3
LEMO socket ERA.0S.303.CLL
The SENSOR MONITOR socket carries the signals
from all three channels.
Each E-509.S3 comes with the E-808.90 sensormonitor cable. The purpose of this cable is simply to
split up the signals of the SENSOR MONITOR socket
for the three channels.
Fig. 27: Three-pin LEMO
sensor monitor socket
The leads of this open-ended cable are color coded:
white = channel 1,
brown = channel 2,
green = channel 3,
shield = GND.
SENSOR MONITOR socket of E-509.CxA and E-509.Ex
LEMO socket (FGG.0B.306.CLAD56), 6-pin
pin 1
ch1+
pin 2
ch1pin 3
ch2+
pin 4
ch2pin 5
ch3+
pin 6
ch3shield:
GND
Fig. 28 Six-pin
LEMO sensor
monitor socket
Each capacitive sensor version comes with the D-893.32 sensor monitor cable (2 m). The
purpose of this cable is simply to split up the signals of the SENSOR MONITOR socket onto
three separate BNC connectors. The BNC connectors are each labeled with the channel
number.
E-509.S3 32-pin connector, DIN 41612, male
Pin No.
Function
Pin No.
Function
2a
4a
6a
8a
10a
12a
14a
16a
18a
20a
22a
24a
26a
28a
30a
32a
GND
internal use
IN: +15 V
IN: -15 V
internal use*
internal use (Bus_A)
OUT: Display ch2
internal use (Bus_B)
internal use (BUS_Vcc)
IN: Control ch1
IN: Control ch3*
internal use
IN: VC/EC ch2
OUT: Overflow ch1
OUT: Overflow ch3
nc
2c
4c
6c
8c
10c
12c
14c
16c
18c
20c
22c
24c
26c
28c
30c
32c
GND
OUT: ch1 (control)
IN: +15 V
IN: -15 V
internal use
OUT: ch2 (control)
OUT: Display ch1
OUT: Display ch3
internal use (BUS_GND)
OUT: ch3 (control)
IN: Control ch2
internal use
IN: VC/EC ch1
IN: VC/EC ch3*
OUT: Overflow ch2
nc
Note: Pins labeled with "nc" may be used internally and must not be connected externally.
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User Manual PZ 62E
E-509.S1 32-pin connector, DIN 41612, male
Pin No.
Function
Pin No.
Function
2a
4a
6a
8a
10a
12a
14a
16a
18a
20a
22a
24a
26a
28a
30a
32a
GND
internal use
IN: +15 V
IN: -15 V
internal use
internal use (Bus_A)
nc
internal use (Bus_B)
internal use (BUS_Vcc)
IN: Control ch1
nc
internal use
nc
OUT: Overflow ch1
nc
nc
2c
4c
6c
8c
10c
12c
14c
16c
18c
20c
22c
24c
26c
28c
30c
32c
GND
OUT: ch1 (control)
IN: +15 V
IN: -15 V
internal use
nc
OUT: Display ch1
nc
internal use (BUS_GND)
nc
nc
internal use
IN: VC/EC ch1
nc
nc
nc
Note: Pins labeled with "nc" may be used internally and must not be connected externally.
E-509.C1A, E-509.C2A, E-509.C3A, E-509.E3, E-509.E03
32-pin connector, DIN 41612, male
Function on
Pin No.
.C3A, .Ex**
Function on
Pin No.
.C2A
.C1A
*
.C3A, Ex**
2c
.C2A
.C1A
GND
*
*
2a
GND
*
4a
n.c.
*
*
4c
Control signal output
CH1
*
*
6a
+ 15 V
*
*
6c
+ 15 V
*
*
8a
- 15 V
*
*
8c
- 15 V
*
*
10a
n.c.
*
*
10c
n.c.
*
*
12a
internal use
*
*
12c
Control signal output
CH2
*
n.c.
14a
Display CH2
*
n.c.
14c
Display CH1
*
*
16a
internal use
*
n.c.
16c
Display CH3
n.c.
n.c.
18a
internal use
n.c.
n.c.
18c
internal use
*
*
20a
Control signal input
CH1
*
*
20c
Control signal output
CH3
to JP210,
pin 1
n.c.
22a
Control signal input
CH3
to JP210,
pin 2
n.c.
22c
Control signal input
CH2
*
n.c.
24a
n.c.
*
*
24c
SYNC
*
*
26a
Servo ON/OFF, ch2
*
n.c.
26c
Servo ON/OFF, ch1
*
*
28a
overflow CH1
*
*
28c
Servo ON/OFF, ch3
n.c.
n.c.
30a
overflow CH3
n.c.
n.c.
30c
overflow CH2
*
n.c.
32a
n.c.
*
*
32c
n.c.
*
* Same as on E-509.C3A
** E-509.E03 has no servo-controller and hence all servo-related pins are not connected
n.c. : No Connection: may be used on the backplane and must not be connected.
JP210 shorted on E-509.C2A (default): connects CH3 input to CH3 output (i.e. CH3 bypassed)
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*
E-500/E-501 Series PZT Servo Controllers
5.9.
E-515 Display Modules
5.9.1.
Front Panel Elements
Fig. 29: E-515.03 display module
User Manual PZ 62E
Fig. 30: E-515.01 display module
INFORMATION
In the labeling of E-515.01 and E-515.03 display modules, X stands for the supported number
of channels.
Labeling
Type
Function
MICRONS /
VOLTS
Toggle switch
Switch for selection of the signal to be displayed for the channel:
Display with 3 ½ digits
-
5.9.2.

MICRONS: Position (displacement) measured by the sensor

VOLTS: Piezo voltage as output by the amplifier
If adjustment of the display should be necessary, see p. 52.
Specifications
Model
E-515.01
E-515.03
Function
Display Module for Piezo Voltage
and Position
Display Module for Piezo Voltage and
Position
Channels
1
3
Display linearity
0.1%
0.1%
Display
1 x 3½ digits
3 x 3½ digits
Dimensions
21HP/3U
21HP/3U
Mass
0.3 kg
0.3 kg
Operating voltage
E-500/E-501 system
E-500/E-501 system
Operating temperature
+5°C to +50°C
+5°C to +50°C
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5.9.3.
User Manual PZ 62E
Pin Assignment
E-515.01 and E-515.03 32-pin connector, DIN 41612, male
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E-500/E-501 Series PZT Servo Controllers
5.9.4.
User Manual PZ 62E
Display Adjustment
NOTICE
Damage from electrostatics!
The E-500/E-501 system contains electrostatic sensitive devices (EGB) and can be damaged
if handled improperly.

Avoid touching components, pins and PCB tracks.

Before touching an electronic component, discharge yourself of any electric charges:
−
While working, wear an antistatic wrist strap
or
−
Briefly touch a conducting, grounded object.
INFORMATION
If ordered as part of a E-500/E-501 system or if PI is informed about the application, E-515.01
and E-515.03 display modules come preset (range, decimal places).
Making the display adjustment elements accessible
Only remove modules from the chassis when you are authorized and have the
corresponding qualifications.
1. Remove the E-500/E-501 system from the power source by pulling the power plug.
2. Wait a minute to be sure that any residual voltage has dissipated.
3. Remove the E-515 module from the chassis:
a)
b)
Loosen the four Phillips screws on the front panel.
Using the grip at the bottom of the front panel, pull the module out of the chassis.
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User Manual PZ 62E
Fig. 31: Location of display adjustment elements on the E-515.0x display module
Potentiometers:
DIP Switch Settings
Reading adjustments:
Setting the decimal point:
V1–V3:
M1–M3
S1–S3:
S4:
S5–S7:
S8:
S9–S11:
S12:
Voltage channels 1–3
Microns channels 1–3
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Micron channel 3
Volt channel 3
Micron channel 2
Volt channel 2
Micron channel 1
Volt channel 1
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E-500/E-501 Series PZT Servo Controllers
5.10.
User Manual PZ 62E
E-517 Computer Interface and Display Module
INFORMATION

See the E-517 User Manual (PZ214E) for a detailed description.
5.10.1. Front Panel Elements
Fig. 32: E-517.i3 interface / display module, singlechannel E-517.i1 models have identical front panels
but show only one channel in the display
Labeling
Fig. 33: E-517.i30 interface / display module, singlechannel E-517.i10 models have identical front panels
but show only one channel in the display
Type
Function
LCD display
See "Display Screens" in the E-517 user manual for details.
Digital In/Out
MDR14 socket
Digital input and output lines; can be used to trigger external
devices and to send start and synch. signals to the wave
generator(s). See "Digital In/Out Socket" in the E-517 user manual
for the availability of the lines and for pinout.
RS-232
Sub-D 9-pin panel
plug, male
Serial connection to host PC. See "RS-232 Socket" in the E-517
user manual for pinout.
Trackball
Display selection, device configuration and triggering of ONLINE
motion. See "Trackball Functions" in the E-517 user manual for
details.
USB-B socket
Universal Serial Bus for connection to host PC. See "USB
Connection" in the E-517 user manual for more information.
IEEE-488 micro
ribbon socket
General Purpose Interface Bus (GPIB) for connection to host PC.
See "GPIB Connection" in the E-517 user manual for more
information.
RJ45 socket
Network connection over TCP/IP. See "TCP/IP Connection" in the
E-517 user manual for more information.
E-517.i3 and E517.i1 only:
GPIB/IEEE488
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User Manual PZ 62E
5.10.2. Specifications
E-517.i1, E-517.i10
E-517.i3, E-517.i30
Function
Digital operation module
Digital operation module
Channels
1
3
Processor
DSP 60 MHz
DSP 60 MHz
Sampling rate, sensor
25 kHz, 8-times oversampling
25 kHz, 8-times oversampling
Thermal drift
Stability: 0.2 mV
Stability: 0.2 mV
Linearity @ nominal range
0.01%
0.01%
Resolution
DAC: 24 bit, ±12 V
ADC: 18 bit, sampling
DAC: 24 bit, ±12 V
ADC: 18 bit, sampling
Interfaces and operation
Interfaces/communication
Ethernet (TCP/IP), USB, RS-232, Ethernet (TCP/IP), USB, RS-232,
IEEE 488 (E-517.i1 only)
IEEE 488 (E-517.i3 only)
I/O ports
1 trigger input
1 trigger output
5V
MDR14 connector
Command set
PI General Command Set (GCS) PI General Command Set (GCS)
User software
PIMikroMove
PIMikroMove
Software drivers
Lab VIEW drivers, Windows and
Linux Libraries (DLL)
Lab VIEW drivers, Windows and
Linux Libraries (DLL)
Supported functionality
Wave generator, data recorder,
macro programming
Wave generator, data recorder,
macro programming
Display
LCD display for monitor signals
LCD display for monitor signals
(position and voltage), states and (position and voltage), states and
trackball menus
trackball menus
Manual control
Operation via trackball
Operation via trackball
Operating temperature range
+5° to +50° C
+5° to +50° C
Dimensions
21HP/3U
21HP/3U
Mass
0.37 kg
0.37 kg
Operating voltage
E-500/E-501 system;
+5 V, 1 A
±15 V, 0.5 A
E-500/E-501 system;
+5 V, 1 A
±15 V, 0.5 A
3 trigger inputs
3 trigger outputs
5V
MDR14 connector
Miscellaneous
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User Manual PZ 62E
5.10.3. Pin Assignment
32-pin connector, DIN 41612, male
Row
Pin a
Pin c
1
AGND
AGND
2
IN: ch1
OUT: ch1
3
IN: ch2
OUT: ch2
4
IN: ch3
OUT: ch3
5
AGND (analog)
AGND (analog)
6
IN: Sensor Monitor ch1
IN: PZT Monitor ch1
7
IN: Sensor Monitor ch2*
IN: PZT Monitor ch2*
8
IN: Sensor Monitor ch3*
IN: PZT Monitor ch3*
9
AGND (analog)
AGND (analog)
10
nc
nc
11
2
I C SCL
I C SDA
12
nc
nc
13
VC/EC ch1 (servo mode)
Overflow ch1
14
VC/EC ch2* (servo mode)
Overflow ch2*
15
VC/EC ch3* (servo mode)
Overflow ch3*
16
On Target ch1
nc
17
On Target ch2*
nc
18
On Target ch3*
nc
19
nc
nc
20
nc
nc
21
nc
nc
22
nc
nc
23
Sync_100k
Sync_200k
24
nc
nc
25
nc
nc
26
nc
nc
27
nc
nc
28
-15 V
-15 V
29
+15 V
+15 V
30
+5 V (VCC)
+5 V (VCC)
31
GND (VCC)
GND (VCC)
32
AGND (analog)
AGND (analog)
2
nc - no connection
AGND - Analog Ground, isolated from the GND (VCC) (pins 31ac)
* on E-517.i1 and E-517.i10, lines for channels 2 and 3 should not be used
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E-500/E-501 Series PZT Servo Controllers
5.11.
User Manual PZ 62E
Dummy Modules
Your E-500/E-501 system may be equipped with one or more dummy modules:
E-595.00
E-596.00
E-596.10
Replaces E-509.xx sensor modules (all types)
Replaces the E-517 interface / display module (or the E-515 display module), if E-509
modules for SGS sensors are installed
Replaces the E-517 interface / display module (or the E-515 display module), if E-509
modules for capacitive sensors are installed
The purpose of these dummies is to complete the internal circuitry and the front panel of
the chassis.
INFORMATION
Your E-500/E-501 system may be equipped with one or more dummy modules. Do not
operate your E-500/E-501 system when (dummy) modules are removed. Without the dummy
module(s), the system will malfunction because no Control In signal can be feed into the
amplifier module due to the broken circuit.
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E-500/E-501 Series PZT Servo Controllers
6.
Integrating Modules in Third-Party Systems
6.1.1.
Safety Measures for Integration in Third-Party Systems
User Manual PZ 62E
DANGER
High Voltage!

Only authorized and qualified personnel must install, operate, maintain and clean the
modules of the E-500/E-501 series.

Remove the third-party system from the power source before integrating modules of the
E-500/E-501 series.
The amplifier modules of the E-500/E-501 series output up to 130 V (E-503, E-504, E-505, E506) or up to 1100 V (E-508). Touching this High Voltage can result in serious or even lethal
injury due to electric shock.


Operate an amplifier module only when it is installed in a suitable chassis and connected
to a protective earth conductor via pins 32a and 32c of the 32-pin connector, DIN 41612,
male.
−
Make sure that the resistance of the protective earth conductor is < 1 Ω at 25 A on
all interfaces relevant for the function of the protective earth conductor.
−
If the protective earth conductor has to be removed (e.g. in case of system
modifications), reconnect the protective earth conductor before the next start-up of
the module.
When you operate E-504, E-505 or E-506 amplifier modules, do not touch pins 6a, 6c, 8a
and 8c of the 32-pin connector since the piezo voltage is output on these pins (in addition
to the output on the PZT socket of the front panel).
NOTICE
Damage from electrostatics!
The E-500/E-501 system contains electrostatic sensitive devices (EGB) and can be damaged
if handled improperly. When operated without chassis, the modules of the E-500/E-501
system can emit electrical, magnetic or electromagnetic fields which interfere with the
environment.

Avoid touching components, pins and PCB tracks.

Before touching an electronic component, discharge yourself of any electric charges:

−
While working, wear an antistatic wrist strap
or
−
Briefly touch a conducting, grounded object.
When modules of the E-500/E-501 series are installed in a third-party chassis, make sure
that the system complies with the EMC requirements.
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6.1.2.
User Manual PZ 62E
Supply Power for the Modules
The supply power must be stable within a range of 2 % of the nominal value.
For stable supply power with dynamic operation of high piezo loads, the power supply must
be equipped with a sufficiently dimensioned buffer capacitor. The required capacitance of
the buffer can be approximated as follows:
Buffer capacitance = 10 × piezo load
6.1.3.
Amplifier Modules: Closing the Circuit
In order to feed the Control In signal (DC-Offset potentiometer and/or Control Input) into the
amplifier, short the following pins:
E-504, E-505, E-506, E-508  pin 2c to 4a
E-503  pin 2c to 4a; pin 10c to 12a; pin 18c to 20a
Otherwise the output voltage of the amplifier would go to its positive / negative limit.
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E-500/E-501 Series PZT Servo Controllers
7.
Maintenance
7.1.
Cleaning
User Manual PZ 62E
NOTICE
Short circuits or flashovers!
The E­500/E-501 system contains electrostatic sensitive devices that can be damaged by
short circuits or flashovers when cleaning fluids enter the case.

Before cleaning, remove the E­500/E-501 system from the power source by pulling the
power plug.

Prevent cleaning fluid from entering the case.
The housing surfaces of the device can be cleaned using mild detergents or disinfectant
solutions. Organic solvents must not be used.
7.2.
AC Power and Line Fuses
DANGER
Risk of electric shock!
The E-500/E-501 system requires a supply voltage of 100 to 120 VAC or 220 to 240 VAC (line
voltage). Touching the line voltage can result in serious or even lethal injury due to electric
shock.

Remove the power cord from the E-500/E-501 system before you change the line fuses.
INFORMATION
Both line fuses of the E-500/E-501 system are active.

Check both fuses if there is a fault.
The power connection and line fuses are located on the rear panel of the chassis. To
access the line fuses, proceed as follows:
1
Switch off the E­500/E-501 system and remove the power cord.
2
Wait a minute to be sure that any residual voltage has dissipated.
3
Pry open the door that covers the fuse carrier and pry out the fuse carrier (see figures below).
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4
User Manual PZ 62E
Be sure to replace both fuses with fuses of the suitable type:
Model
Line voltage ranges and fuse values
E-500.00
100 to 240 V~ 2 x IEC T2AH, 250 V
E-501.00
100 to 120 V~ 2 x IEC T2AH, 250 V
E-500Kxxx
see product-specific documentation or nameplate label on device
E-501Kxxx
see product-specific documentation or nameplate label on device
220 to 240 V~ 2 x IEC T1AL, 250 V
Note: IEC-standard fuses are designed to carry the nominal current indefinitely. Other fuse rating
standards differ.
5
Reinstall the carrier and close the door
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E-500/E-501 Series PZT Servo Controllers
8.
User Manual PZ 62E
Customer Service
For inquiries and orders, contact your PI sales engineer or send us an e-mail
(mailto:info@pi.ws).
If you have questions concerning your system, have the following information ready:
•
•
•
•
Product codes and serial numbers of all products in the system
Firmware version of the controller (if present)
Version of the driver or the software (if present)
Operating system on the PC (if present)
The latest versions of the relevant user manuals for your system are available for download
on our website (www.pi.ws).
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E-500/E-501 Series PZT Servo Controllers
9.
User Manual PZ 62E
Old Equipment Disposal
In accordance with the applicable EU law, electrical and electronic equipment may not be
disposed of with unsorted municipal wastes in the member states of the EU.
When disposing of your old equipment, observe the international, national and local rules
and regulations.
To meet the manufacturer’s product responsibility with regard to this product, Physik
Instrumente (PI) GmbH & Co. KG ensures environmentally correct disposal of old PI
equipment that was first put into circulation after 13 August 2005, free of charge.
If you have old PI equipment, you can send it postage-free to the following address:
Physik Instrumente (PI) GmbH & Co. KG
Auf der Römerstr. 1
D-76228 Karlsruhe, Germany
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E-500/E-501 Series PZT Servo Controllers
10.
Appendix
10.1.
Lifetime of PICMA® Actuators
User Manual PZ 62E
The following factors which can have an impact on the actuator lifetime must be taken into
consideration: Applied voltage, temperature and relative humidity.
The effect of each individual factor on the lifetime can be read off the diagrams shown
below. The lifetime calculated in hours simply results as the product of all three values read
off the diagrams.
The impact that the applied voltage has, is particularly important. With decreasing voltage
the lifetime increases exponentially. This must always be taken into consideration in an
application. The recommended maximum range of the control input voltage for the E500/E-501 system therefore is -2 to 12 V, resulting in a piezo voltage range of -20 to 120 V.
A control input range of -3 to 13 V is possible (results in -30 to 130 V piezo voltage), but will
reduce the actuator lifetime accordingly.
Fig. 34: Interdependency between the mean MTTF of a PICMA® actuator and the value of
the voltage applied
Fig. 35: Interdependency between the mean MTTF of a PICMA® actuator and the ambient
temperature
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User Manual PZ 62E
Fig. 36: Interdependency between the mean MTTF of a PICMA® actuator and the relative
humidity
Example
The simple formula MTTF = AU * AT * AF provides a quick estimate of the reliability in
hours. In concrete terms: The values for 75% RH ( AF=14), 100 VDC (AU=75) and 45 °C
(AT=100) result in an approximate MTTF of 105,000 h, i.e. more than 11 years (see
markings on the diagrams).
Read the “Tutorial: Piezoelectrics in Positioning” in the PI Catalog for detailed information.
10.2.
How to Measure the Amplifier Output of E-504 Modules
The innovative, efficient circuitry of the E-504 amplifier module reduces power consumption
and heat dissipation, especially in dynamic applications. Working with an internal switching
frequency of 100 kHz, charge is transferred to the piezo actuator using low-loss PWM
techniques. The ripple of the amplifier output is <100 mVpp at 100 kHz. But when
measuring the amplifier output signal with low sampling rate and small bandwidth (e.g. with
a digital oscilloscope), aliasing will occur and distort the measurement result. In digital
signal processing, aliasing refers to an effect that the signal reconstructed from samples is
different than the original continuous signal when the sampling rate is too low. With the E504 amplifier output, this means that a low-frequency signal seems to be measured which
is not present at all.
Example:
When a 91 Hz signal is sampled with 100 Hz sampling rate, the result seems to be a 9.1 Hz
signal (see figure below).
Fig. 37: Signal digitization with too low sample rate (time in 1/100 s): Original signal = 91 Hz
and sampling rate = 100 Hz; the result is mistaked as a 9.1 Hz signal (“Alias”)
To avoid aliasing, the sampling rate must be at least twice as high as the highest frequency
in the signal to be sampled (according to the Nyquist–Shannon sampling theorem). I.e. with
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E-500/E-501 Series PZT Servo Controllers
User Manual PZ 62E
an amplifier switching frequency of 100 kHz, the sampling rate must be 200 kHz or higher.
If the sampling rate provided by your oscilloscope is not high enough, use a low-pass filter
at the oscilloscope input to eliminate frequencies above 100 kHz. Alternatively, you can use
an analog oscilloscope or perform high-resolution measurements in the lower frequency
range.
When following those instructions, you will obtain valid measurement results.
10.3.
EC Declaration of Conformity
For the E-500/E-501, an EC declaration of conformity according to the following European
directives was issued:
2006/95/EC, Low Voltage Directive (LVD)
2004/108/EC, EMC Directive
2011/65/EC, RoHS Directive
The applied standards certifying the conformity are listed below.
Electromagnetic Emission: EN 61000-6-3:2007, EN 55011:2009
Electromagnetic Immunity: EN 61000-6-1:2007
Safety (Low Voltage Directive): EN 61010-1:2010
If electrical equipment is intended to be integrated in other electrical equipment: The user is
responsible for compliant connection of the electrical equipment when implementing the
total system.
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