CAUTION
CP-UM-5671E
CAUTION
• Use the SPG5A/6A within the operating ranges
recommended in the specifications (temperature,
humidity, voltage, atmosphere, etc.).
Sapphire capacitance diaphragm gauge
User's Manual
Models SPG5A and SPG6A
• Do not use this device in explosive atmospheres or near
flammable fluids or steam.
• Always use the specified couplings and gaskets. After the
piping work has been completed, check that there are no
gas leaks before operating the device.
• When wiring the power for this device, be sure to install a
master cut-off switch for the electrical power within easy
reach of the operator.
• Wire the SPG5A/6A properly according to the standards
given in this document, using the specified power source
and installation methods. Not doing so might result in
fire or device failure.
• Do not allow wire or solder clippings, water, etc. to enter
the case of this device. They could cause fire or device
failure.
Thank you for purchasing the SPG5A or SPG6A.
This manual contains information for ensuring correct
use of the SPG5A / 6A. It also provides necessary information for installation, maintenance, and troubleshooting.
This manual should be read by those who design and
maintain devices that use the SPG5A / 6A.
Be sure to keep this manual nearby for handy reference.
• Do not the block ventilation holes. Doing so might cause
fire or device failure.
• The surface of this device is very hot while the power is
ON and for a while after the power has been turned OFF. To avoid a burn, do not touch it during this period. When
removing this device, turn the power OFF and allow
sufficient time for it to cool.
Please read the "Terms and Conditions" from the following URL before ordering or use:
http://www.azbil.com/products/bi/order.html
• If there is a chance that work personnel will come in
contact with this device after installation, take appropriate
countermeasures. (Self-heating models)
NOTICE
• Do not use the relays in this device beyond their
recommended service life. Doing so could cause fire or
device failure.
Be sure that the user receives this manual before the product is
used.
OVERVIEW
Copying or duplicating this user’s manual in part or in whole is forbidden. The information and specifications in this manual are subject to change without notice.
The SPG5A/6A is a capacitance diaphragm vacuum gauge that uses
a sapphire capacitance pressure sensor to achieve high accuracy and
reliability, compact size, and light weight. Self-heating and non–selfheating models are available. On self-heating models, the heating
temperature can be selected. The SPG5A/6A is especially suited for
use in semiconductor manufacturing. It features the following:
Considerable effort has been made to ensure that this manual is
free from inaccuracies and omissions. If you should find an error or
omission, please contact the azbil Group.
In no event is Azbil Corporation liable to anyone for any indirect,
special or consequential damages as a result of using this product.
• A single-crystal sapphire pressure sensing medium, offering excellent corrosion resistance, ability to withstand high temperatures,
and excellent mechanical characteristics. The capacitive measurement design provides high repeatability even when used in a hightemperature environment.
© 2011-2013 Azbil Corporation All Rights Reserved.
SAFETY PRECAUTIONS
• Small size and light weight, achieved by micromachining
technology.
Safety precautions are for ensuring safe and correct use of
this product, and for preventing injury to the operator and
other people or damage to property. You must observe these
safety precautions. Also, be sure to read and understand the
contents of this user's manual.
• Advanced signal processing technology, contributing to excellent
temperature characteristics and linearity of measurement.
• Microprocessor-based digital PID, providing fast warm-up time and
stable sensor temperature control. (Self-heating models)
WARNING
• A wide range of supply power voltages.
• The burst pressure is the pressure at which this device
will break. To avoid an accident, never apply pressure
exceeding the burst pressure.
• Easy zero point adjustment with automatic adjustment button or up/
down zero adjustment buttons.
• SLP-SP5J60 Smart Loader Package (sold separately), for easy monitoring of the SPG5A/6A and setting of its parameters from a PC.
• Equipped with three event relays. Relay settings can be changed easily with the Smart Loader Package (SLP-SP5J60, sold separately).
• Conformity to IEC directives; CE-marked; compliance with
EN61326 and EN55011.
1
■■ Model selection table
Ⅰ
Ⅱ
Ⅲ
Ⅳ
Ⅴ
Ⅵ
Ⅶ
Ⅷ
Example:SPG5AT11HD500500
Basic
Additional Pressure Self-heating
Event 1 Event 2
Type
Coupling
model No
function
range temperature
setting setting
SPG
5
6
A
___
R
D
Pressure FS pressure ranges Pressure FS pressure ranges
E
code
code
(absolute pressure)
(absolute pressure)
F
T10
133.32 Pa
P12
100 Pa
G
T20
266.64 Pa
P22
200 Pa
H
T30
399.96 Pa
P32
300 Pa
A
T11
1333.2 Pa
P13
1000 Pa
T21
2666.4 Pa
P23
2000 Pa
D
T12
13332 Pa
P14
10000 Pa
E
T22
26664 Pa
P24
20000 Pa
J
T13
133.32 kPa
P15
100 kPa
For details about other pressure ranges, contact the Sales Dept. at Azbil Corporation.
P
Sapphire capacitance diaphragm gauge
Standard model
Extra high-temperature model *1
Event configuration model
Refer to the table on the left
Without self-heating function
125 °C
150 °C
160 °C
180 °C
200 °C
1/2 inch gauge port
8 VCR (female) equivalent (SUS316L with
electrolytic grinding)
NW16
IDF 2S ferrule
1/2 inch gauge port, with traceability
certificate
8 VCR (female) equivalent (SUS316L with
electrolytic grinding), with traceability certificate
NW16, with traceability certificate
IDF 2S ferrule, with traceability certificate
**.*% FS
Always OFF if “NNN” is specified.
**.*% FS
Always OFF if “NNN” is specified.
S
■■ Part names
T
Y
D-sub 15-pin connector (male)
Set screw (#4-40UNC)
***
***
Status LED
ev1 ev2 ev3
status
zero auto down/ up
Event relay LED
Loader jack
*1 Not available for non–self-heating models.
Zero point
adjustment button (up)
Auto zero point
adjustment button
Zero point
adjustment button (down)
■■ Smart Loader communication function
Operation charts for pressure interlock of event relays
This device can be monitored and its parameters changed easily
from a PC using the SLP-SP5J60 Smart Loader Package.
Pressure low limit (Direct action)
Pressure high limit (Direct action)
For more detail, refer to the manual for the Smart
Hysteresis
Loader Package, CP-UM-5499E
Hysteresis
ON
Pressure monitor
SPG internal status monitor
• Temperature of electronics circuit and of sensor head; DC
supply voltage
• Alarm status, failure status
Adjustment Bias compensation
Ratio compensation
Configuration 0 to 10V 0 to 10V output 0 V pressure for 0-10 V output
output
10 V pressure for 0-10 V output
settings Conditions for 0-10 V output
0-10 V output value (abnormal status)
Event relay Always OFF.
settings Normal status: ON, Abnormal status: OFF.
Normal status: OFF, Abnormal status: ON.
Normal status: ON, Abnormal status: latch OFF.
Normal status: OFF, Abnormal status: latch ON.
Warm-up done: ON,
Warm-up in progress or abnormal status: OFF.
Warm-up done: OFF,
Warm-up in progress or abnormal status: ON.
Warm-up done: ON, In progress: OFF,
Abnormal status: OFF latch.
Warm-up done: OFF, In progress: ON,
Abnormal status: ON latch.
Pressure high limit (direct action)
Pressure low limit (direct action)
Pressure high limit (reverse action)
Pressure low limit (reverse action)
Deviation high / low limit (Direct action)
Deviation high / low limit (Reverse action)
1st order filter time constant
Instrumentation 0 to 10V output simulation
check
Event simulation
Monitoring
ON
OFF
OFF
Setpoint
Pressure
0
FS
0
Hysteresis
FS
Hysteresis
ON
ON
OFF
OFF
Setpoint
Pressure
0
FS
0
Deviation high / low limit (Direct action)
Deviation
Deviation
ON
OFF
Hysteresis
Setpoint
0
Pressure
Hysteresis
FS
Deviation high / low limit (Reverse action)
Deviation
Deviation
ON
OFF
Hysteresis
2
Pressure
Pressure low limit (Reverse action)
Pressure high limit (Reverse action)
0
Setpoint
Setpoint
Pressure
Hysteresis
FS
Setpoint
Pressure
FS
CP-UM-XXXXE
Note
•• This device was calibrated at the factory in a
vertical position. Shift of the zero point may
have occurred, depending on the mounting
angle. In such a case, accuracy can be
recovered by adjusting the zero point after
installation. Vertical installation is
recommended to prevent contaminants
from accumulating on the sensor unit.
INSTALLATION
CAUTION
XXXX
• Use the SPG5A/6A
within the operating ranges
XXXXXXX
recommended in the specifications (for temperature,
User's Manual
humidity, voltage, atmosphere, etc.). Using it outside
these ranges might cause fire or device failure.
• Always use the specified couplings and gaskets. After the
piping work has been completed, check that there are no
gas leaks before operating the device.
8VCR継手
WIRING
■■ Installation locations
CAUTION
Install the device in a location with the following
characteristics:
• Not subject to high or low temperature/humidity.
• Free from sulfide gas or other corrosive gases.
• Little dust or soot.
• Appropriate protection from direct sunlight, wind and rain.
• Little mechanical vibration or shock.
• Not near high voltage lines, welding machines, or other
sources of electrical noise.
• At least 15 meters away from a high voltage ignition device
for a boiler.
• Not subject to strong electromagnetic fields.
• Not an explosive atmosphere, and not near flammable fluids
or steam.
• Wire the SPG5A/6A properly according to the standards
given in this document, using the specified power source
and installation methods. Not doing so might result in
fire or device failure.
• Do not allow wire clippings, shavings, water, etc. to enter
the case of this device. They could cause fire or device
failure.
• The surface of this device is very hot while the power is ON
and for a while after the power has been turned OFF. To avoid a burn, do not touch it during this period. When removing this device, turn the power OFF and allow
sufficient time for it to cool. If there is a chance that work personnel will come in
contact with this device after installation, take
appropriate countermeasures. (Self-heating models)
■■ Installation
• When wiring the power for this device, be sure to install a
master cut-off switch for the electrical power within easy
reach of the operator.
When connecting this device to the piping, always use the
specified couplings and gaskets, and check for leaks after
installation is complete.
There are no limitations on mounting angle. However, since a
zero-shift may occur at some angles, be sure to adjust the zero
point after installation.
■■ Wiring Precautions
• Before wiring, mounting, or removing the SPG5A/6A, be
sure to turn the power OFF.
Handling Precautions
• Before starting the wiring work, check the model No. of this
device and the connector pin assignments (see page 4). Make
sure that the wiring is correct.
• Vibration may move the SPG’s pressure-sensitive
diaphragm, causing the pressure reading to fluctuate.
Therefore, take appropriate measures so that this device
is not subject to vibration. In particular, guard against
vibration that would move the device along its axis
(e.g., up-and-down vibration, if the device is mounted
vertically).
• Devices or systems to be connected to the SPG5A/6A must
have basic insulation sufficient to withstand the maximum
operating voltage levels of the power supply and input/
output components.
• When installing, attach the coupling firmly, taking care
not to apply any force to the case. Application of force
to the case might break the device.
• Use a power supply suitable for instrumentation, and make
sure that noise does not adversely affect this device.
• Use a power supply with a rated current equal to or greater
than the maximum power current specified on p. 6 of this
document.
• For a model with a VCR coupling, check the cautions in
the instruction manual from the coupling manufacturer
and be sure you understand them fully before starting
the installation work.
• Use shielded cables for the wiring.
• This is a precision instrument. Do not drop it or bump
it against any object. Application of any shock to this
device might adversely affect its performance.
• Be sure to connect a ground wire to the frame ground.
• Use a power supply, connectors, and cables with appropriate
ratings for voltage, current, etc. Make sure that the voltage
at the connector of this device is within the specified power
voltage range.
• If there is a chance that the temperature will exceed
the operating ambient temperature range, install an
appropriate cooling fan.
• Take care not to wire incorrectly. Wrong wiring may cause
device failure.
• This device does not function for up to 10 s after the power
has been turned on. Great care should be taken when the
relay output from this device is used as an interlock signal.
• Do not connect multiple Smart Loader cables connected to
multiple SPG5A/6A units to one personal computer at the
same time. The current coming from other circuits might
cause an output value indication error to occur.
3
■■ WIRING
ADJUSTMENT AND START-UP
●● Connector pin assignments (D-sub 15-pin)
Pin
No.
Name
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
Event relay 3 (COM)
Output (+)
Power supply (COM) *1 *2
Event relay 2 (COM)
Power supply (-) *1
Event relay 3 (NO)
Power supply (+)
Event relay 3 (NC)
Event relay 2 (NO)
Event relay 2 (NC)
Event relay 1 (COM)
Output (COM) *2
Event relay 1 (NO)
Event relay 1 (NC)
FG *3
CAUTION
• The surface of this device is very hot while the power
is ON and for a while after the power has been turned
OFF. To avoid a burn, do not touch it during this period.
When removing this device, turn the power OFF and
allow sufficient time for it to cool. If there is a chance that
work personnel will come in contact with this device after
installation, take appropriate countermeasures. (Selfheating models)
• Do not the block ventilation holes. Doing so might cause
fire or device failure.
• Do not use the relays in this device beyond their
recommended service life. Doing so could cause fire or
device failure.
■■ Turning the power ON
Use this device after warm-up is complete, 1 hour or more
after turning the power ON.
• If warm-up is not finished, the status LED is orange.
●● Example of external connection
• ±15 Vdc (dual power supplies)
7
3
5
DC15V
DC15V
• When warm-up is complete, the status LED turns green.
Power supply (+)
Power supply (COM)
Handling Precautions
Power supply (-)
•• This device does not satisfy specifications for accuracy
during the warm-up period after the power has been
turned ON, before the self-heating temperature has
stabilized. Always use this device after warm-up is
complete.
•• If any problem with the operating environment
(power voltage, ambient temperature, etc.) is
detected during the self-diagnosis of this device, the
status LED starts to flash red. If this occurs, turn off the
power and check the instrumentation status.
•• If any internal error is detected during the selfdiagnosis of this device, the status LED lights up red. If
this occurs, turn off the power and contact the azbil
Group.
•• Do not apply a pressure to this device that exceeds
the marginal pressure. Doing so might cause device
failure.
•• Take appropriate measures so that no contaminant
enters this device. Otherwise a measurement error or
device failure might occur.
•• Take appropriate measures so that no foreign matter
flows into this device. If it does, measurement error or
device failure could result.
•• For the pressure range characterized by molecular
flow and intermediate flow, if the self-heating
temperature of this device is different from the
temperature inside the chamber to be measured, a
minute pressure difference occurs due to thermal
transpiration. To achieve especially accurate
measurement, this must be taken into account.
Factory calibration of this device assumes that no
temperature difference exists. For details, refer to T.
Takaishi and Y. Sensui, Trans. Faraday Soc. 59 (1963)
2503.
• 24 Vdc (single power supply)
DC24V
*1
Receiving instrument
Power supply (+)
2
Output (+)
12
Power supply (COM)
Power supply (-)
Output (COM)
13
Load
Event
relay 1
11
Load 30 Vdc
or less
14
9
Load
Event
relay 2
4
Load 30 Vdc
or less
10
6
Load
Event
relay 3
1
Load 30 Vdc
or less
Ground
7
3
5
8
15
Shield
FG
Connector hood
* 1. If using a single 24 Vdc input power supply, connect the power
COM to the power “–“.
* 2. The power COM and output COM are internally connected. If
using a single 24 Vdc input power supply, do not connect the
power COM and output COM together. Also, take care to avoid
any wrong wiring that may cause a short circuit in other equipment. If the wiring is connected incorrectly, current from the
power supply will also flow through the output line, and the
voltage drop from wiring resistance may cause a measurement
error.
* 3. The FG is electrically continuous with the case, but is insulated
from the power COM, output COM, and other terminals.
Note
■■ Zero point adjustment
Event relay connection
• Adjust the zero point before using this device. Zero point
adjustment should be done with a sufficient vacuum
(1/20,000 or less of the selected pressure range span), 1
hour or longer after the power was turned on, after warmup is complete.
• For accurate measurement, periodic adjustment of the
zero point is recommended.
ON
OFF
NO
NO
COM
COM
NC
NC
When the power supply is
turned off the event relay is
turned off.
• When the zero point is adjusted, the bias adjustment values
4
■■ Status LED display operation
inside the device are updated. The updated bias adjustment
CP-UM-XXXXE
value is added to the pressure measurement, which is then
output. The factory setting for the bias adjustment value
XXXX
is 0.
Status LED
XXXXXXX
Adjust the zero point in either of the two ways described
User's Manual
below.
Lit green
Normal operation status (after warm-up)
Lit orange
Warm-up in progress
(device temperature is not yet stable)
Abnormal status (a problem with the device)
Lit red
●● Auto zero point adjustment
Status
Abnormal status (operating environment problem,
such as excessive ambient temperature or wrong
power voltage)
Automatic zero point adjustment (by pressing the
3 green flashes
auto zero point adjustment button) is complete, and
(0.3 s, 0.3 s)
the bias adjustment value is within ± 5 % FS.
3 orange flashes Automatic zero point adjustment (by pressing the
auto zero point adjustment button) is complete. The
(0.3 s, 0.3 s)
bias adjustment value is between ± 5 and ± 20 % FS.
The zero point is being adjusted with the up/down
Flashing green
zero point adjustment buttons. The bias adjustment
(0.1 s, 0.1 s)
value is within ± 5 % FS.
The zero point is being adjusted with the up/down
Flashing orange
zero point adjustment buttons. The bias adjustment
(0.1 s, 0.1 s)
value is between ± 5 and ± 20 % FS.
During zero point adjustment with the up/down zero
Flashing red
point adjustment buttons, the bias adjustment value
(0.1 s, 0.1 s)
reached the maximum adjustable range of ± 20 % FS.
Lit alternately red Because of the device conditions *, auto zero point
adjustment and manual zero point adjustment
and orange 3
cannot be done.
times (0.3 s, 0.3 s)
Flashing red
(0.3 s, 0.3 s)
(1) A
pply a vacuum with a pressure of 1/20,000 or less of
the selected pressure range.
(2) K
eep the auto zero point adjustment button pressed for
3 s. After zero point adjustment:
• If the bias adjustment value is within ± 5 % FS, the
status LED flashes green three times.
• If the bias adjustment value is between ± 5 and ± 20 %
FS, the status LED flashes orange three times.
Handling Precautions
•• Auto zero point adjustment cannot be done in the
following cases even if the button is pressed:
•• Before warm-up is complete.
•• If an error occurs.
•• If the required bias adjustment value is beyond ±
20 % FS.
•• In these cases, the status LED flashes alternately
red and orange three times.
* For the device conditions, see each Handling Precautions
of auto zero point adjustment and manual zero point
adjustment.
●● Manual zero point adjustment
The bias adjustment value has been reset.
Lit alternately
green and orange
3 times (0.3 s, 0.3 s)
Alternating green The event relay is latched. *1
and orange with
occasional red
(1.9 s, 0.1 s)
Output is manually controlled. *2
Lit alternately
green and red.
(0.3 s, 0.3 s)
The device is not powered up.
Off
(1)Apply a vacuum with a pressure of 1/20,000 or less of the
selected pressure range.
(2)The 0-10 V output voltage changes when the up/down
zero adjustment button is pressed. Adjust the output
voltage to 0.
When the button is pressed, the speed at which the 0-10
V value changes depends on how long the button is
pressed. Keep it pressed for a long time to do a quick rough
adjustment. Afterwards, press it repeatedly for a short time
to make fine adjustments.
• During adjustment using the up/down zero point butt on:
• If the bias adjustment value is within ± 5 % FS, the status
LED flashes green.
• If the bias adjustment value is between ± 5 and ± 20 %
FS, the status LED flashes orange.
• The status LED stops flashing about 3 s after the up/
down zero point adjustment button is released, and the
bias adjustment value is then set.
• Zero adjustment is restricted to the range in which the bias
adjustment value is ± 20 % FS. If the bias adjustment value
reaches ± 20 % FS as the up/down zero point adjustment
button is pressed, the status LED flashes red.
*1 Latching of the event relay must be set up with the Smart Loader (sold
separately).
*2 Output can be manually controlled with the Smart Loader (sold
separately).
MAINTENANCE AND TROUBLESHOOTING
■■ Maintenance
●● Maintenance and inspection
• Check that the status LED is green during operation.
• Check periodically that there are no leaks in the piping.
• Adjust the zero point periodically.
●● Cleaning
Handling Precautions
• Use a soft dry cloth.
• Do not use any organic solvent such as paint thinner or
benzene.
•• Manual zero point adjustment cannot be done in the
following cases even if the button is pressed:
•• Before warm-up is complete.
•• If an error occurs.
•• If the pressure value exceeds the measurement range.
In these cases, the status LED flashes alternately red and
orange three times.
●● Part replacement
Do not disassemble the SPG5A/6A or attempt to replace
any of its parts.
●● Resetting of bias adjustment value
To reset the bias adjustment value to its factory setting,
keep the auto zero point adjustment button pressed for
30 s or longer. The zero point is adjusted after 3 s, and the
bias value is reset after 30 s. The status LED then flashes
alternately green and orange three times.
5
■■ Alarm displays and corrective actions
■■ Troubleshooting
The following table shows the alarm displays and corrective
actions to take if there is a problem:
Status LED Status
Flashing
red
Alarm
Red
Failure
Possible Causes
• Temperature of electronic
circuits
• Temperature of sensor head
• Heater temperature error
• Self-heating control error
• Wrong supply power voltage
• Heater wire break
• Memory failure
• Electronic circuit failure
Symptom
Action
Action
Turn off the power
and check the power
voltage, ambient
temperature, and other
operating conditions.
Status LED does • Check that the wiring is connected correctly.
not light up
• Check that the power voltage and polarity are
correct.
Turn off the power and
contact the azbil Group
or your dealer, agent, or
salesperson. The device
needs to be repaired by
Azbil Corporation.
DISPOSAL
Output value
fluctuates
• Check that the wiring is connected correctly.
• Adjust the zero point.
When disposing of this device, dispose of it appropriately as
industrial waste in accordance with local regulations.
Important notice: If you send this device to Azbil Corporation for repair, fill
out the Safety Sheet on page 8 and include it with the device.
SPECIFICATIONS
Items
Pressure range
Self-heating temperature
Accuracy
Temperature coefficients
zero
Temperature coefficients
span
Resolution
Operating temperature
range
Operating humidity range
Storage temperature and
humidity range
Response time
Gas-contacting materials
Internal capacity
Specifications
As specified in the model selection table.
0.25 % of rdg.:
No self-heating or self-heating temperature under 160 °C
0.5 % of rdg.:
Models with self-heating temperature of 160 °C or more
Temperature coefficients at zero
Self-heating temperature range
0.004 % FS / °C
No self-heating or less than 160 °C
0.008 % FS / °C
0.008 % FS / °C
160 °C or more
0.016 % FS / °C
0.02 % rdg. / °C
Pressure range
200 Pa or more
Less than 200 Pa
200 Pa or more
Less than 200 Pa
1/10000 FS
SPG5A (standard model)
Self-heating models: 10 to 45 °C (* Cooling air with a velocity of 0.5 m/s or more is required at 35 °C or more.)
Non–self-heating models: 0 to 60 °C
SPG6A (extra high temperature model)
Self-heating models: 10 to 65 °C (when mounted vertically), 10 to 70 °C (when mounted horizontally)
(* Cooling air with a velocity of 0.5 m/s or more is required at 45 °C or more.)
10 to 90 % RH (without condensation)
-20 to +80 °C, 10 to 95 % RH (without condensation)
35 ms
Sapphire, Inconel, SUS316L
4.6cm3: 1/2 inch gauge port coupling type
7 cm3: 8 VCR coupling type
7 cm3: NW16 coupling type
5 cm3: IDF 2S ferrule coupling type
200 kPa abs : Models with pressure range of 100 kPa or more
Allowable pressure *1
110 kPa abs : Models with pressure range of less than 100 kPa
300 kPa abs
Marginal pressure *2
700 kPa abs
Burst pressure *3
Input power supply
Voltage range: ±15 Vdc ± 10 % (dual power supplies) or 24 Vdc ± 10 % (single power supply)
Allowable ripple voltage: 0.5 Vp-p max.
Power consumption
Power current
Power consumption/ power
Self-heating temperature
current *4 *5
During normal operation
During warm-up
±15 Vdc supply
24 Vdc supply
(Non-self-heating model)
3 W max.
3 W max.
0.12 A max.
0.14 A max.
125 °C
10 W max.
14 W max.
0.6 A max.
0.7 A max.
150 °C
12 W max.
16 W max.
0.6 A max.
0.8 A max.
160 °C
13 W max.
17 W max.
0.7 A max.
0.8 A max.
180 °C
15 W max.
19 W max.
0.8 A max.
0.9 A max.
200 °C
16 W max.
23 W max.
0.9 A max.
1.1 A max.
Output signal
Signal voltage:
0 to 10 Vdc
Allowable load resistance:
10 kΩ min.
Measurement output range:
-0.5 to +11 Vdc *6
Output during warm-up or abnormal status:
Output depends on the measured pressure *7
I/O connector
D-sub 15-pin connector (male), retaining screw #4-40UNC
Mass
450 g : 1/2 inch gauge port coupling type
520 g: 8 VCR coupling type
470 g: NW16 coupling type
650 g: IDF 2S ferrule coupling type
Warm up time
30 min (nominal), 1 h max.
Zero point adjustable range ± 20 % FS
Coupling
Leak rate
Mounting angle
Allowable cable length
As specified in the model selection table.
1×10-10 Pa • m3/s or less
Unrestricted *8
10 m max.
6
Items
CP-UM-XXXXE
Specifications
Event relay ratings
Number of relays:
3
Contact form:
1c (both NO and NC contacts)
Maximum load:
1A-30 Vdc resistance load
Minimum load:
10 µA 10 mVdc *10
Mechanical service life:
50 million cycles min.
Electrical service life:
100 thousand cycles min. (with 1 A, 30 Vdc resistance load)
Certifications:
UL, CSA
Event relay 1: Pressure low limit (direct action)
Setting: value is assigned by model No. Operating hysteresis: 0.5 % FS
Always operates together with pressure during warm-up or abnormal status.
XXXX
XXXXXXX
User's Manual
Event relay functions
default setting *9
Hysteresis
ON
OFF
0
Event relay 2: Setpoint
Pressure
FS
Pressure low limit (direct action)
Setting: value is assigned by model No. Operating hysteresis: 0.5 % FS
Always operates together with pressure during warm-up or abnormal status.
Hysteresis
ON
OFF
0
Setpoint
Pressure
FS
Event relay 3: ON if warm-up complete and OFF if warm-up not complete or if status abnormal
Event relay LED: Green when event relay ON, off when event relay OFF
CE marked (EN61326, EN55011)
SLP-SP5J60 Smart Loader Package (with communication cable)
Standards compliance
Accessories
(sold separately)
*6. Since a negative voltage is generated inside this unit, a negative voltage
output is available even with only a single-output power supply.
*7. The conditions and voltage can be changed using the Smart Loader.
*8. This unit was calibrated at the factory in a vertical position. Shift of the zero
point may have occurred, depending on the mounting angle. In such a case,
accuracy can be recovered by adjusting the zero point after installation.
Vertical installation is recommended to prevent contaminants from
accumulating on the sensor unit.
*9. The event relay functions can be changed using the Smart Loader.
*10. The minimum load specification is an estimate of the minimum load
at which the event relay is able to open and close. This value can vary
depending on the frequency of operation, environmental conditions,
and the expected reliability level. Before actual use, a check of the relay’s
operation using the actual load is recommended.
*1. A t the allowable pressure, the performance level of this unit can be
maintained. However, if the SPG is repeatedly subjected to the allowable
pressure, adjust the zero point periodically.
*2. At the marginal pressure, this unit will continue to function. If the SPG is
subjected to the marginal pressure, readjust the zero point. If more accurate
measurement is required, return the unit to Azbil Corporation for calibration.
If the marginal pressure is exceeded, the proper operation of this unit can no
longer be guaranteed. In this case, replace the unit with a new one.
*3. The burst pressure is the pressure at which this device will break. To avoid an
accident, never apply pressure equaling or exceeding the burst pressure.
*4. Use an appropriate power supply with a rated current exceeding the max.
power current value.
*5. PID control is used to regulate the temperature and keep the rate of current
supplied to the heater as constant as possible. Additionally, the maximum
power current is varied depending on the power voltage, so that power
consumption remains constant even during warm-up, irrespective of the
power voltage. (Self-heating models)
■■ External Dimensions
SPG5A (standard model)
SPG6A (extra high-temperature model)
φ6
φ6
0
14.5
ev1 ev2 ev3
status
status
5
53.5
53.5
ø12.7
ø12.7
53.5
(185.5)
132
(185.5)
132
53.5
ev1 ev2 ev3
zero auto down / up
zero auto down/up
5
14.5
0
NW16 coupling type
NW16 coupling type
8 VCR coupling type
1/2 inch gauge port coupling type IDF 2S ferrule coupling type
25.5
25.5
8 VCR coupling type
25.5
25.5
Unit: mm
1/2 inch gauge port coupling type IDF 2S ferrule coupling type
7
IMPORTANT NOTE: If it is necessary to send this device back to Azbil Corporation for repair, photocopy the
following Safety Sheet, fill in the required items, and return the sheet with the unit.
The Safety Sheet is intended to ensure that the customer’s product is safe for repair personnel and for the
environment.
Without this sheet, Azbil Corporation cannot start repair work. Please note that if the sheet is incomplete, Azbil
Corporation may request the customer to resubmit it.
Safety Sheet
To use, photocopy this page.
To: Azbil Corporation
Statement by the End User (required prior to repair work)
I attest to the safety of this device based on the following evidence (check the applicable box):
Hazardous substances have been purged or flushed completely.
This device has been used only with clean, dry inert gas such as air, N2, Ar, and He.
Model number:
Date code:
Serial number:
Approved by (supervisor):
Name:
Date:
Department:
Company:
Phone:
Comments or supplementary information:
(Do not fill in - for Azbil Corporation internal use only)
Dealer/Agent/Salesperson Information
Date:
Name:
Company:
Department:
Phone:
Date:
Name:
Company:
Department:
Phone:
Important Notice
Depending upon the degree of contamination of the
device, Azbil Corporation reserves the right to refuse repair.
Specifications are subject to change without notice. (09)
Handling of personal information
We will use your personal information provided to us by
this sheet only for the purposes of providing after-sales
services to you.
1-12-2 Kawana, Fujisawa
Kanagawa 251-8522 Japan
URL: http://www.azbil.com
8
1st edition: Apr. 2011 ( V )
3rd edition: June 2013 ( F )
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