Instruction Manual nEXPT Turbopumping Station B723-01-880 Issue A Original

Instruction Manual nEXPT Turbopumping Station B723-01-880 Issue A Original
B723-01-880
Issue A Original
Instruction Manual
nEXPT Turbopumping Station
Description
nEXPT Turbopumping Station
Item Number
B723-01-000
Declaration of Conformity
We,
Edwards,
Manor Royal,
Crawley,
West Sussex, RH10 9LW, UK
declare under our sole responsibility, as manufacturer and person within the EU authorised to assemble
the technical file, that the product(s)
nEXPT Turbopumping Stations
TSXX - XX–00X
The preceding material numbers cover a matrix where the
following features may vary according to:- X denoting a range
of turbomolecular pump inlet flanges, vent options and
electrical supply which may be configured or used with the
following turbomolecular pumps and backing pumps.
Turbomolecular pumps:
EXT75DX
nEXT240D
nEXT300D
nEXT400D
Backing pumps:
E2M1.5
RV5
RV12
XDD1
XDS5
XDS10
to which this declaration relates is in conformity with the following standard(s) or other normative
document(s)
EN ISO 12100-2: 2003
+ A1: 2009
EN1012-2:1996, A1: 2009
EN61010-1: 2001
EN 61326-1: 2006
Immunity, Class A
Emissions
Safety of Machinery. Basic Concepts, General Principles for
Design. Technical Principals.
Compressors and Vacuum Pumps. Safety Requirements,
Vacuum Pumps.
Safety Requirements for Electrical Equipment for Measurement,
Control and Laboratory Use. General Requirements.
Electrical equipment for measurement, control and laboratory
Use. EMC requirements. General requirements.
Control and laboratory use – Part 1: General requirements.
and fulfils all the relevant provisions of
2006/42/EC
2006/95/EC
2004/108/EC
2002/95/EC*
i.e. The product(s) contain less than - 0.1wt% for hexavalent chromium, lead, mercury, PBB and PBDE;
0.01wt% for cadmium - in homogeneous materials (subject to the exemptions allowed by the Directive).
This information relates only to products sold on or after the date of this certificate. Edwards has taken
all reasonable steps to confirm this statement, which is based mainly on information from our suppliers.
Whilst the RoHS Directive does not legally apply to this vacuum equipment, we recognize that component
compliance is relevant to many of our customers.
Note: This declaration covers all product serial numbers from the date this Declaration was signed
onwards.
22.06.2010 Burgess Hill
Barrie Brewster, Technical Manager Scientific Products
Date and Place
This product has been manufactured under a quality system registered to ISO9001
P200-05-120 Issue A
*
Machinery Directive
Low Voltage Directive
Electromagnetic Compatibility (EMC) Directive
Restriction of Certain Hazardous Substances (RoHS) Directive
B723-01-880 Issue A
dcs/8631/0410
Section
Page
1
Introduction ........................................................................................ 1
1.1
1.2
1.2.1
1.2.2
1.2.3
1.2.4
Scope and definitions .................................................................................................... 1
Description................................................................................................................. 2
Overview ................................................................................................................... 2
General description of the nEXPT turbopumping station major components ................................... 2
Electrical protection ..................................................................................................... 2
Accessories ................................................................................................................ 2
2
Technical data ..................................................................................... 5
2.1
2.2
2.3
2.4
2.5
2.6
2.7
2.8
General..................................................................................................................... 5
Electrical data ............................................................................................................ 5
Legislation and standards ............................................................................................... 6
Operating and storage data ............................................................................................. 6
Fuse ratings................................................................................................................ 7
Earth stud.................................................................................................................. 7
Electrical connections ................................................................................................... 7
Connections ............................................................................................................... 7
3
Installation ......................................................................................... 9
3.1
3.2
3.3
3.4
3.4.1
3.5
3.6
3.7
3.8
3.9
3.10
3.11
3.12
3.13
3.14
3.15
3.16
Safety....................................................................................................................... 9
Unpack and inspect ...................................................................................................... 9
Locate the nEXPT turbopumping station............................................................................. 10
Bench-top mounting.....................................................................................................11
Fixing procedure .........................................................................................................12
Fill the rotary pump with oil...........................................................................................12
XDS scroll pump silencer ...............................................................................................13
Fit accessories (optional)...............................................................................................13
Connect the nEXPT turbopumping station to your vacuum system .............................................. 13
Connect to your exhaust extraction system ......................................................................... 13
Connect the electrical supply ......................................................................................... 14
Additional earth bonding ...............................................................................................14
Configure the nEXPT turbopumping station ......................................................................... 14
Commission the installation............................................................................................15
Connecting an active gauge............................................................................................16
Connecting the logic interface ........................................................................................ 16
Connecting the serial interface ....................................................................................... 16
4
Operation ......................................................................................... 17
4.1
4.2
4.3
Use of the backing pump controls .................................................................................... 17
Start-up ................................................................................................................... 17
Shut-down ................................................................................................................ 17
5
Maintenance...................................................................................... 19
5.1
5.2
5.3
5.4
5.5
5.6
Safety...................................................................................................................... 19
Maintenance plan ........................................................................................................19
Inspect the hoses, pipelines and connections....................................................................... 20
Trouble-shooting.........................................................................................................20
Software updates ........................................................................................................20
EXPT TIC controller factory default .................................................................................. 21
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page i
Contents
Contents
B723-01-880 Issue A
Contents
6
Storage and disposal ............................................................................ 23
6.1
6.2
Storage .................................................................................................................... 23
Disposal ................................................................................................................... 23
7
Spares and accessories ......................................................................... 25
7.1
7.2
7.3
7.3.1
Introduction .............................................................................................................. 25
Spares ..................................................................................................................... 25
Accessories ............................................................................................................... 25
BX bakeout band.........................................................................................................25
For return of equipment, complete the HS Forms at the end of this manual.
Illustrations
Figure
1
2
3
4
5
6
7
Page
Components of the nEXPT turbopumping station (typical system shown) ....................................... 3
Equipment dimensions (mm) (XDS and nEXT shown)................................................................ 8
Position the lifting slings/lifting hooks............................................................................... 11
Bench-top mounting.....................................................................................................11
M8 clearance holes ......................................................................................................12
Turbomolecular pump start delay with XDD1 diaphragm pump ..................................................15
EXPT TIC .................................................................................................................. 21
Tables
Table
1
2
3
4
5
6
7
Page ii
Page
Electrical data ............................................................................................................ 5
Operating and storage data ............................................................................................. 6
Fuse ratings................................................................................................................ 7
Earth stud.................................................................................................................. 7
Electrical connections ................................................................................................... 7
Connections ............................................................................................................... 7
Checklist of components ................................................................................................ 9
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B723-01-880 Issue A
Publication title
XDD1 115/230 Diaphragm Pump
Turbo Instrument Controller (TIC)
EXT EXT75DX and EXT255DX Turbomolecular Pump
XDS Scroll Pump
RV Rotary Vane Pumps
nEXT Turbomolecular Pumps
CD ROM Instruction Manual
Publication number
A746-02-885
D397-10-880
B722-40-880
A726-01-880
A652-01-880
B800-00-880
B723-00-879
Associated publications
Publication title
EXT Pump Accessories
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Publication number
B580-65-880
Page iii
Contents
Supplementary publications
B723-01-880 Issue A
This page has been intentionally left blank.
Page iv
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B723-01-880 Issue A
Introduction
1.1
Scope and definitions
This manual provides installation, operation and maintenance instructions for the Edwards nEXPT Turbopumping
Station. You must use the nEXPT Turbopumping Station as specified in this manual.
Read this manual before you install and operate the nEXPT Turbopumping Station. Important safety information is
highlighted as WARNING and CAUTION instructions; you must obey these instructions. The use of WARNINGS and
CAUTIONS is defined below.
WARNING
Warnings are given where failure to observe the instruction could result in injury or death to
people.
CAUTION
Cautions are given where failure to observe the instruction could result in damage to the equipment, associated
equipment and process.
A full list of Supplementary Publications is provided at the end of the Contents list of this manual. A number of these
Supplementary Publications will be supplied with your nEXPT Turbopumping Station. The Supplementary Publications
supplied will be the instruction manuals for the components in your nEXPT Turbopumping Station.
The Supplementary Publications you receive also contain WARNING and CAUTION instructions. When you install and
operate the nEXPT Turbopumping Station, you must refer to these Supplementary Publications and obey all of the
WARNING and CAUTION instructions which they contain.
The units used throughout this manual conform to the SI international system of units of measurement.
The following IEC warning labels appear on the product and in the manual.
Warning – refer to accompanying documentation.
Warning – risk of electric shock.
Warning – hot surfaces.
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 1
Introduction
1
B723-01-880 Issue A
Introduction
1.2
Description
1.2.1
Overview
Your nEXPT Turbopumping Station is a fully automatic pumping system which is suitable for a wide range of
applications. The system is capable of utilising a range of standard Edwards backing pumps and turbomolecular pumps
from a single compact unit. The nEXPT Turbopumping Station is available in two sizes, the size of the equipment base
will depend on which backing pump is fitted. The open system configuration allows easy maintenance of the main
pumping components.
The TIC controller has been configured to operate both the backing pump and the turbomolecular pump plus any
optional accessories which have been fitted. Up to three active gauges can be connected using the convenient gauge
interface incorporated into the system housing. The controller uses a large clear graphic display and easy-to-use
control interface via a touch sensitive keypad. All systems incorporate a RS232/485 interface for control and data
monitoring on a remote PC and a logic interface for interface with associated system hardware.
1.2.2
General description of the nEXPT turbopumping station major components
For the general description of the various products used on the nEXPT Turbopumping Station, click on the appropriate
instruction manual reference against each product type.
Diaphragm pump
Rotary vane pumps
Turbomolecular pumps
Scroll pumps
TIC controller
1.2.3
XDD1 (A746-02-885)
E2M0.7 / E2M1.5 (A371-22-880 Section 1.2)
RV3 / RV5 / RV8 / RV12 (A652-01-880 Section 1.2)
EXT75DX / EXT255DX (B722-40-880 Section 1.2)
nEXT240 / nEXT300 / nEXT400 (B800-00-880 Section 1.2)
XDS5 / XDS10 (A726-01-880 Section 1.2)
Turbo instrument controller (D397-22-880 Section 1.2)
Electrical protection
The nEXPT Turbopumping Station has a double-pole thermal circuit breaker which provides short circuit protection.
The backing pump and TIC Controller both have overload protection.
1.2.4
Accessories
A wide range of standard accessories is available for the major components of the nEXPT Turbopumping Station; refer
to Section 7.
Page 2
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B723-01-880 Issue A
Introduction
Figure 1 - Components of the nEXPT turbopumping station (typical system shown)
1.
2.
3.
4.
5.
6.
7.
8.
9.
Mains ON/OFF
Logic interface (adaptor fitted)
Serial communications port
Mains input
Bakeout band fuse (not fitted)*
Backing pump fuse
TAV vent valve (optional)
Instruction manual holder
Backing pump
*
Refer to Table 3 of manual B723-01-880 for the correct fuse rating.
Baking the turbo pump on the Pumping Station is prohibited. Refer to Section 3.7
for further information.
†
10. Vacuum gauge inputs
11. Backing pump mains supply
12. Earth stud
13. Bakeout band mains supply†
14. Backing pump isolation valve
(Fitted to XDS backing pumps only)
15. Turbomolecular pump
16. TIC controller
17. Locking castors (front and rear)
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 3
B723-01-880 Issue A
This page has been intentionally left blank.
Page 4
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B723-01-880 Issue A
Technical data
Note:
The operating, storage conditions and performance of the nEXPT Turbopumping Station depends on the
major components fitted to the nEXPT Turbopumping Station; refer to the technical data in the appropriate
supplementary publications.
2.1
General
Dimensions
Refer to Figure 2
Mass
Small platform 24.9 to 35.0 kg (E2M/XDD1)
Mass
Large platform 41.2 to 52.5 kg (RV/XDS)
Electrical data
Refer to Table 1
Degree of protection (to IEC34-5: 1981)
IP20
Initial force required to push the nEXPT Turbopumping Station* 3.5 kgf max.
(for systems with castors)
*
Measured under ideal conditions and will increase on uneven floor surfaces, slopes etc.
2.2
Electrical data
Table 1 lists the electrical requirements for the different nEXPT Turbopumping Stations.
Table 1 - Electrical data
Current (A)
Backing pump
TIC
controller
Supply voltage
50/60 Hz
Full load
XDD1
100 W
100
4.67
110-120
4.04
220-240
2.07
100
6.02
200 W
100 W
E2M1.5
200 W
100 W
RV5
200 W
Start*
0.355
110-120
5.14
220-240
2.57
110-120
5.54
14.44
220-240
2.67
6.77
110-120
6.64
15.54
220-240
3.17
7.27
100
8.15
33.94
110-120
7.04
20.875
220-240
3.67
16.87
100
9.5
43.1
110-120
8.14
35.04
220-240
4.17
17.37
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Maximum power
kW
0.49
0.435
0.57
0.575
0.71
Page 5
Technical data
2
B723-01-880 Issue A
Technical data
Table 1 - Electrical data (continued)
Backing pump
TIC
controller
100 W
RV12
200 W
100 W
XDS5/10
200 W
*
Current (A)
Supply voltage
50/60 Hz
Full load
Start*
100
10.35
36.44
110-120
10.24
22.375
220-240
5.27
19.27
100
11.7
45.6
110-120
11.34
37.54
220-240
5.77
19.77
100
10.75
110-120
9.64
220-240
4.87
100
12.1
110-120
10.74
220-240
5.37
Maximum power
kW
0.825
0.96
0.575
0.71
If the nEXPT Turbopumping Station uses a rotary vane pump, the system may draw up to the start current
value shown in Table 1. You must use a slow blow fuse to prevent unnecessary fuse failures, the start
current could typically last for several seconds and generally occurs when the rotary vane pump oil is cold.
2.3
Legislation and standards
The legislation and standards with which the nEXPT Turbopumping Station complies are listed in full on the
Declaration of Conformity shown on the front inside cover of this manual.
2.4
Operating and storage data
Table 2 - Operating and storage data
General items
Reference data
Ambient operating temperature range
0 °C to 35 °C
Ambient storage temperature range
-30 °C to 70 °C
Maximum ambient operating humidity
Max 90% RH non cond at 40 °C
Maximum operating altitude
2000 m max.
Equipment type
Fixed equipment, for indoor use only
Pollution degree
2
Page 6
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B723-01-880 Issue A
Technical data
2.5
Fuse ratings
Table 3 - Fuse ratings
General items
Reference data
BX bakeout band fuse (Heater)
90 to 132 V a.c. electrical supply
1 A, type F 20 mm
180 to 264 V a.c. electrical supply
0.5 A, type F 20 mm
Backing pump
Refer to backing pump documentation
2.6
10 A, type T 20 mm (maximum)
Earth stud
Table 4 - Earth stud
General items
Reference data
Earth stud
M5
2.7
Electrical connections
Table 5 - Electrical connections
General items
Reference data
Electrical supply (refer to Figure 1, item 4)
Inlet plug type
CEE/IEC 320 (16 A)
Backing pump (refer to Figure 1, item 10)
Outlet socket type
CEE/IEC 320
Max power
600 W
Bakeout band (refer to Figure 1, item 12)
2.8
Note:
Outlet socket type
CEE/IEC 320
Max power
150 W
Connections
The connectors listed in Table 6 offer the same functionality as the connectors on the TIC Controller. Refer
to the TIC instruction manual for full details for these connectors.
Table 6 - Connections
General items
Reference data
Active gauge connectors
Connector type
FCC/RJ45, 8-way
Power supply
24 V d.c.
Logic interface
Connector type
25-way sub-miniature ‘D’ type socket
Power supply
24 V d.c.
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 7
B723-01-880 Issue A
Technical data
Table 6 - Connections (continued)
General items
Reference data
Serial communications
Connector type
9-way sub-miniature ‘D’ type socket
Figure 2 - Equipment dimensions (mm) (XDS and nEXT shown)
Turbo Pump
*
Dimensions (mm)
Position A
Position B*
Position C
EXT75DX ISO63
144
380/500
409
EXT75DX NW40
144
380/500
421
EXT75DX CF63
144
380/500
428
nEXT240D ISO100
135.5
380/500
443.2
nEXT240D CF100
135.5
380/500
451.2
nEXT300D ISO100
135.5
380/500
448.7
nEXT300D CF100
135.5
380/500
463.2
nEXT400D ISO160
135.5
380/500
448.7
nEXT400D CF160
135.5
380/500
453.7
380 mm refers to small platforms with XDD1 backing pumps.
500 mm refers to large platforms with XDS/RV backing pumps.
Page 8
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B723-01-880 Issue A
Installation
3.1
Safety
Installation
3
WARNING
Obey the safety instructions given below and take note of appropriate precautions. If you do not,
you can cause injury to people and damage to equipment.
z
When you refer to a manual supplied as a Supplementary Publication, you must obey all of the WARNING and
CAUTION instructions in the manual.
z
A suitably trained and supervised technician must install the nEXPT Turbopumping Station.
z
Check that all the required parts are available and of the correct type before you start work.
z
Ensure that the installation technician is familiar with the safety procedures which relate to the products
pumped. Wear the appropriate safety-clothing when you come into contact with contaminated components.
z
Isolate the other components in your system from the electrical supply so that they cannot be operated
accidentally.
z
Do not reuse O-rings and Co-Seals if they are damaged.
z
Dispose of components, grease and oil safely (refer to Section 6).
z
Take care to protect sealing-faces from damage.
z
Leak-test the system after installation and seal any leaks found.
3.2
Unpack and inspect
Remove the outer cover and all packing materials, remove the protective covers from the inlet and outlet ports,
inspect the system for any damage. If the nEXPT Turbopumping Station is damaged, notify your supplier and the
carrier in writing within three days; state your order number and invoice number. Retain all packing materials for
inspection. Do not use the nEXPT Turbopumping Station if it is damaged. Check that your package contains the items
listed in Table 7. If any item is missing, notify your supplier within three days.
If the nEXPT Turbopumping Station is not to be used immediately, replace the protective covers. Store the nEXPT
Turbopumping Station in suitable conditions as described in Section 6.1.
Table 7 - Checklist of components
Qty
Description
Check (✓)
1
nEXPT Turbopumping Station
❏
1
Instruction Manual Package
❏
1
Logic Interface Interlock D-Connector
❏
1
TMP Flange Inlet Seal
❏
1
Rotary Pump Oil (RV/E2M pumps only)
❏
4
Mounting-pillars (used for bench-top fixing)
❏
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 9
B723-01-880 Issue A
Installation
3.3
Locate the nEXPT turbopumping station
WARNING
Heavy objects can cause muscle strain or back injury. It is advisable to use suitable lifting
equipment when moving the nEXPT Turbopumping Station.
WARNING
For your safety, all four castors must be locked when the equipment is in operation. If you fail to
follow this warning and the turbo pump seizes, the sudden movement of the nEXPT Turbopumping
Station may cause further damage to the equipment and cause injury to people.
WARNING
If you operate your nEXPT Turbopumping Station on a bench-top, you must follow the installation
instructions in Section 3.4.
If you fail to follow these guidelines and the turbo pump seizes, the sudden movement of the
nEXPT Turbopumping Station may cause further damage to the equipment and cause injury to
people.
CAUTION
When lifting the nEXPT Turbopumping Station, do not attempt to support the mass of the system from the
backing pump.
CAUTION
When lifting the nEXPT Turbopumping Station, always use slings with sufficient length to prevent damage of the
system components.
Before attempting to lift the nEXPT Turbopumping Station, move the system (on its pallet) close to the operating
position. Ensure that you provide a firm level base before removing the system from its pallet. It is advisable to
always use mechanical lifting equipment when moving the larger platform nEXTP Turbopumping System. Use slings
around the base of the system from front to back, make sure each sling is routed between the castors or feet and
the base guides to prevent slippage. Alternatively use straps with lifting hooks. Refer to Figure 3 which shows where
to locate the slings or lifting hooks.
CAUTION
When locating the nEXPT Turbopumping Station, care should be taken not to restrict the ventilation grid located
under the base of the system. Failing to observe this may result in over heating of the controller and the
turbomolecular pump.
Page 10
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B723-01-880 Issue A
Installation
Figure 3 - Position the lifting slings/lifting hooks
3.4
Bench-top mounting
The base of the nEXPT Turbopumping Station can be securely fixed to your bench-top using the mounting-pillars
supplied, refer to Figure 4.
Figure 4 - Bench-top mounting
WARNING
Ensure the bench-top you are operating the nEXPT Turbopumping Station on is firmly fixed to a
support or wall and can support the weight of the equipment. Your bench-top must be able to
withstand a destructive torque of up to 4.25 kNm in the unlikely event that the turbo pump seizes.
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 11
B723-01-880 Issue A
Installation
3.4.1
Fixing procedure
1. Drill four M8 clearance holes in your bench-top, refer to Figure 5.
Figure 5 - M8 clearance holes
2. Raise the nEXPT Turbopumping Station and place on blocks if required so that all four castors are accessible.
3. Remove all four castors by unscrewing the M8 nut holding the castor to the base, retain the nuts and washers for
the next stage. We recommend that you should keep the castors in a safe place in case they are required again
in the future.
4. Fit the mounting-pillars into the now vacant holes using the M8 nuts and washers previously used to secure the
castors. Ensure that all four nuts are securely fastened.
5. Locate the nEXPT Turbopumping Station by aligning the mounting-pillars with the holes previously made in your
bench-top, secure the nEXPT Turbopumping Station using M8 bolts (not supplied). It is advisable to use washers
either side of the bench-top surface. Ensure that all four bolts are securely fastened.
3.5
Fill the rotary pump with oil
If the nEXPT Turbopumping Station uses a EM or RV series rotary or rotary vane pump you must fill it with the correct
quantity of oil (supplied with the equipment) before you operate the equipment, as described in the pump Instruction
Manual.
Page 12
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B723-01-880 Issue A
XDS scroll pump silencer
The silencer is used to reduce exhaust noise during pump down and gas ballast operations. This part can be ordered
as an accessory, refer to Section 7.3. To fit the silencer, follow the instructions in manual A505-97-880.
3.7
Fit accessories (optional)
If you wish to fit accessories to the nEXPT Turbopumping Station, fit them now, before you start to install the nEXPT
Turbopumping Station into your vacuum system. Install accessories as described in the instruction manuals supplied
with the accessories. Refer to Section 7 for further information on the accessories available and for specific fitting
instructions to fit the accessories to the nEXPT Turbopumping Station.
Note:
3.8
The use of water coolers and BX bake-out bands on the nEXPT Turbopumping Station is not permitted. If
you wish to fit these accessories, it is advisable to install the turbomolecular pump away from the nEXPT
Turbopumping Station. For further details regarding turbomolecular pump remote mounting please contact
Edwards UK.
Connect the nEXPT turbopumping station to your vacuum
system
WARNING
Connect the turbo pump inlet to your vacuum system before applying power to the nEXPT
Turbopumping Station. This will ensure that the pump cannot operate accidentally causing injury.
WARNING
If you install your vacuum system directly onto the nEXPT turbopumping station, the centre of
gravity of the mass must be above and within 300 mm of the centre line.
The turbo pump can be securely fixed to the vacuum system via the inlet-flange. Make sure that the pump-inlet and
all components fitted to the pump-inlet are clean and dust-free. If the pump-inlet is not kept clean, the pump-down
time may be increased. The inlet connections for the nEXT pump are CF flange and the ISO flange:
z
If the pump has a CF flange, use the copper compression gasket supplied with the pump and use a full
complement of bolts to connect the inlet-flange of the pump to the vacuum system.
z
If the pump has an ISO flange, use the Edwards combined inlet screen and trapped O-ring supplied with the
pump and use a minimum of four claw clamps (each torque to 10 Nm) to connect the inlet-flange of the
pump to the vacuum system. Alternatively, use a rotatable collar and the combined inlet screen and trapped
O-ring supplied with the pump to connect the inlet-flange of the pump to the vacuum system; use a full
complement of bolts with the rotatable collar.
All inlet flange bolts must be re-tightened once the system is under vacuum. Ensure that no torques or other forces
are transmitted to the pump from the vacuum system or the associated pipelines.
3.9
Note:
Connect to your exhaust extraction system
For further information, refer to the instruction manual which corresponds to the backing pump fitted to
your nEXPT Turbopumping Station.
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 13
Installation
3.6
B723-01-880 Issue A
Installation
3.10
Connect the electrical supply
WARNING
Ensure that the electrical installation of the EXPT Turbopumping Station conforms with your local
and national safety requirements. It must be connected to a suitably fused and protected electrical
supply and a suitable earth point.
WARNING
Ensure the mains cord is routed so as not to cause a trip hazard.
Check that your electrical supply is suitable for this equipment. Refer to Table 1 for the electrical requirements for
this equipment. The nEXPT Turbopumping Station is supplied with an electrical cable which includes a moulded
IEC connector fitted at one end, the other end of the cable will be fitted with a moulded plug suitable for connection
to the local electrical supply.
3.11
Additional earth bonding
The electrical supply cable normally provides protective earthing for electrical safety. If this is not the case, or if
additional earth bonding is required, the earth stud located on the base at the rear of the nEXPT Turbopumping
Station should be connected to your vacuum system.
3.12
Configure the nEXPT turbopumping station
As supplied, the TIC Controller has been reconfigured for the TIC Pumping Station to suit most vacuum applications
and will:
When the TIC System ON is selected:
z
Switch on both the backing pump and the turbomolecular pump *.
z
Close the TAV vent valve.
z
Open the backing valve.
When the TIC System OFF is selected:
*
z
Switch off both the backing pump and the turbomolecular pump.
z
Close the backing valve.
z
Open the TAV vent valve (controlled venting) from 100–50% rotational speed, and then open fully from 50% of
full rotational speed.
If your nEXPT Turbopumping Station uses an XDD1 diaphragm pump, the turbomolecular pump drive will be
delayed for two minutes while the backing pump reduces the pressure to a suitable level, this is typical for a
five litre volume and will prevent the turbomolecular pump from running under high pressure for a prolonged
period. This delay is adjustable (refer to the TIC instruction manual) and is recommended for system volumes
>2 litres, refer to Figure 6 to estimate the turbomolecular start delay if you know your system volume.
Page 14
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B723-01-880 Issue A
2
The TAV valve is an optional extra
The TIC Controller factory settings have been changed to provide a standard operation for the nEXPT
Turbopumping Station, if you replace the TIC Controller you should reconfigure the set up options to
suit your application, refer to the TIC instruction manual for further details.
Figure 6 - Turbomolecular pump start delay with XDD1 diaphragm pump
3.13
Commission the installation
WARNING
Do not operate the system with the exhaust pipeline blocked. For example, if your nEXPT
Turbopumping Station uses a rotary vane pump, oil mist may be discharged from the oil mist filter
and cause injury to people.
After you have installed the nEXPT Turbopumping Station, use the following procedure to test the system.
1. Make sure that all the electrical connections are secure.
2. Switch on the electrical supply and your exhaust-extraction system (if available).
3. Turn ON the nEXPT Turbopumping Station using the ON/OFF switch positioned on the rear panel. To start-up the
equipment, refer to the TIC instruction manual. Check that the equipment operates as described in
Section 3.12.
4. Inspect the vacuum, exhaust and pipeline connections and check that there are no leaks. Seal if any leaks are
found.
5. Wait until the turbomolecular pump has reached full speed, then select OFF on the front panel of the TIC
Controller again; check that both pumps stop.
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 15
Installation
Notes: 1
B723-01-880 Issue A
Installation
3.14
Connecting an active gauge
CAUTION
Do not connect Barocel capacitance manometers to the TIC Pumping Station gauge connectors. Doing so will
result in damage to the gauge and will invalidate the warranty.
Up to three compatible active gauges can be fitted to the gauge connectors on the rear inside of the nEXPT
Turbopumping Station housing, refer to Figure 1. Connect the gauges using Edwards active gauge cables to each of
the three sockets, the number indicated above each socket corresponds to the same gauge number shown on the TIC
Controller display. This option is only available if the nEXPT Turbopumping Station uses a TIC turbo and instrument
controller.
Note:
3.15
Only one AIGX gauge can be connected to the TIC Pumping Station gauge connectors at a time.
Connecting the logic interface
CAUTION
Do not earth the logic interface 0 V lines (pins 7, 10, 12, and 13). If you do, you will provide an earth return
path for any electrical fault in the pump-motor and this could damage your Controller or your control
equipment.
CAUTION
Do not connect voltages greater than 24 V to the logic interface.
The logic interface provides a number of signals that can be used for monitoring the status of your vacuum system,
and for controlling certain aspects of its operation. These signals can be broadly divided into three groups, control
inputs, control outputs and status outputs.
The nEXPT Turbopumping Station is supplied with an interlock D-connector connected into the logic interface at the
rear of the equipment. If you do not intend to connect the logic interface to your system you must use the interlock
D-connector, failing to do so will disable a number of control outputs which operate the nEXPT system.
Note:
3.16
The user logic interface on the rear panel offers the same functionality as the logic interface on the TIC
Controller. Refer to the TIC instruction manual for further details of this connector.
Connecting the serial interface
The TIC has two serial communications protocols built in, RS232 and RS485. RS232 is the simplest interface and can
be used to allow a host PC to control the TIC. RS485 allows a host PC to control a small network of TICs.
Note:
Page 16
The user serial interface on the rear panel offers the same functionality as the serial interface on the TIC
Controller. Refer to the TIC instruction manual for further details of this connector.
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B723-01-880 Issue A
Operation
4.1
Use of the backing pump controls
If the backing pump has a mode selector and or gas-ballast control, refer to the appropriate backing pump instruction
manual to optimise the performance of the pump for your application.
4.2
Start-up
Use the following procedure to start the nEXPT Turbopumping Station. If you wish to reconfigure the operation of the
nEXPT Turbopumping Station to suit an application, refer to the TIC instruction manual.
1. Switch on the electrical supply to the nEXPT Turbopumping Station and your exhaust-extraction system (if
available).
2. Turn ON the nEXPT Turbopumping Station using the ON/OFF switch positioned on the rear panel.
3. To operate the equipment components, refer to the TIC instruction manual for full operation.
4.3
Shut-down
Use the following procedure to shut down the nEXPT Turbopumping Station.
1. Refer to the TIC Controller instruction manual to stop the turbomolecular pump (TMP) and backing pump
operation.
2. Switch off the ON/OFF rocker switch located on the equipment rear panel.
3. Remove the electrical mains supply from the equipment.
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 17
Operation
4
B723-01-880 Issue A
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Page 18
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B723-01-880 Issue A
Maintenance
5.1
Safety
WARNING
Obey the safety instructions given below and take note of appropriate precautions. If you do not,
you can cause injury to people and damage to equipment.
z
When you refer to a manual supplied as a Supplementary Publication, you must obey all of the WARNING and
CAUTION instructions in the manual.
z
A suitably trained and supervised technician must maintain the nEXPT Turbopumping Station.
z
Allow the pumps to cool to a safe temperature before you start maintenance work.
z
Check that all the required parts are available and of the correct type before you start work.
z
Ensure that the maintenance technician is familiar with the safety procedures which relate to the products
pumped. Wear the appropriate safety-clothing when you come into contact with contaminated components.
Dismantle and clean contaminated components in a fume-cupboard.
z
Isolate the nEXPT Turbopumping Station and other components in the system from the electrical supply so
that they cannot be operated accidentally.
z
Do not reuse O-rings and Co-Seals if they are damaged.
z
Dispose of components, grease and oil safely (refer to Section 6).
z
Protect sealing-faces from damage.
z
Do not touch or inhale the thermal breakdown products of fluoroelastomer seals. These breakdown products
are very dangerous and may be present if the nEXPT Turbopumping Station has been heated to 260 °C and
above.
z
Leak-test the system after maintenance and seal any leaks found if you have disconnected any vacuum or
exhaust pipeline connections.
5.2
Maintenance plan
The following documents list the minimum maintenance operations necessary to maintain the nEXPT Turbopumping
Station in normal use.
More frequent maintenance may be necessary if the nEXPT Turbopumping Station has been used to pump corrosive
or abrasive gases and vapours. If necessary, adjust the maintenance plan according to your experience.
EXT pumps
Turbomolecular pumps
Backing pumps
Diaphragm pump
Rotary vane pumps
Scroll pumps
EXT75DX (B722-40-880)
nEXT240 / nEXT300 / nEXT400 (B800-00-880)
XDD1 (A746-02-885)
E2M0.7 / E2M1.5 (A371-22-880)
RV5 / RV12 (A652-01-880)
XDS5 / XDS10 (A726-01-880)
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 19
Maintenance
5
B723-01-880 Issue A
Maintenance
5.3
Inspect the hoses, pipelines and connections
1. If the turbomolecular pump on your nEXPT Turbopumping Station is water-cooled:
z
Inspect all of the cooling-water connections and check that they are secure. Tighten any loose connections.
z
Inspect all cooling-water hoses, pipelines and connections and check that they are not corroded or damaged
and that they do not leak. Replace or repair any corroded or damaged component and seal any leaks found.
2. Inspect all of the electrical connections and check that they are secure. Tighten any loose connections.
3. Inspect all of the electrical cables and check that they are not damaged and have not overheated. Replace or
repair any damaged or overheated cable.
4. Inspect all of the vacuum and exhaust connections and check that they are secure. Tighten any loose
connections.
5. Inspect all of the vacuum and exhaust pipelines and check that they are not corroded or damaged and that they
do not leak. Replace or repair any corroded or damaged component and seal any leaks found.
5.4
Trouble-shooting
WARNING
If you remove the turbo pump for maintenance purpose, you must reuse all screws which were
used to secure both the turbo pump and the turbo mounting plate onto the nEXPT Turbopumping
Station. If you have lost or cannot reuse any of these screws, a minimum screw strength of
12.9 M8 x 12-15 for the turbo pump, and 8.8 M8 x 30 for the turbo mounting plate must be used.
If you fail to follow this warning and the turbo pump seizes, the stored energy in the turbo pump
may cause some or all of the screws to fail, this may result in the turbo pump being ejected from
the nEXPT Turbopumping Station main housing.
For trouble-shooting instructions on the nEXPT Turbopumping Station, refer to the following documents:
EXT pumps
Turbomolecular pumps
Backing pumps
Diaphragm pump
Rotary vane pumps
EXT75DX (B722-40-880)
nEXT240 / nEXT300/ nEXT400 (B800-00-880)
Scroll pumps
XDD1 (A746-02-885)
E2M0.7 / E2M1.5 (A371-22-880)
RV5 / RV12 (A652-01-880)
XDS5 / XDS10 (A726-01-880)
TIC controller
TIC controller
Turbo instrument controller (D397-22-880)
5.5
Software updates
The software within the Controller and the TIC PC monitor program will be updated as part of Edwards ongoing
development program. The updates and associated instruction manual can be found by visiting
www.upgrades.edwardsvacuum.com.
Page 20
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B723-01-880 Issue A
EXPT TIC controller factory default
The EXPT TIC controller has been setup to provide optimum control for your Pumping Cart, however, the default
settings can be changed to suit your system control.
Note:
When performing a software update, the TIC will resume back to its original factory default setting, this is
different to the nEXPT Turbopumping Station settings. You may need to upload the Pumping Station settings
or your personal settings using the TIC PC Monitoring software before you perform a software update. Once
the update is complete, you can then download the previous settings back into your TIC controller.
Figure 7 below shows the view screen shortcuts and menu structure for the Pumping Station TIC setup. For details of
navigating and changing system parameters, refer to the TIC instruction manual.
Figure 7 - EXPT TIC
1. A 2 min start delay is recommended
if your Pumping Station has been
configured to use a XDD1
diaphragm pump.
2. This option should be used if your
system uses a DX pump.
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 21
Maintenance
5.6
B723-01-880 Issue A
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Page 22
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B723-01-880 Issue A
Storage and disposal
Note:
6.1
We recommend that you avoid long-term storage of the nEXPT Turbopumping Station. If you will store the
nEXPT Turbopumping Station for several months, refer to the storage instructions in the relevant
instruction manual.
Storage
Use the following procedure to store the nEXPT Turbopumping Station:
1. Shut down the nEXPT Turbopumping Station as described in Section 4.3.
2. Isolate the nEXPT Turbopumping Station from the electrical supply and disconnect it from the vacuum system.
3. Drain the oil from the backing pump (rotary vane pumps only) as described in the instruction manual for the
pump. Refer to the following documents:
Rotary vane pumps
E2M0.7 / E2M1.5 (A371-22-880)
RV5 / RV12 (A652-01-880)
4. Place protective covers over the inlet and outlet-flanges.
5. For the fastest pump-down after the nEXPT Turbopumping Station is re-installed, seal the turbomolecular pump
inside a plastic bag together with a suitable desiccant.
6. Store the nEXPT Turbopumping Station in cool, dry conditions until required for use.
6.2
Disposal
Dispose of the nEXPT Turbopumping Station and any components safely in accordance with all local and national
safety and environmental requirements.
Particular care must be taken with components which have been contaminated with dangerous process substances.
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 23
Storage and disposal
6
B723-01-880 Issue A
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Page 24
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
B723-01-880 Issue A
Spares and accessories
7.1
Introduction
Edwards products, spares and accessories are available from Edwards companies in Belgium, Brazil, Canada, France,
Germany, Hong Kong, Italy, Japan, Korea, Switzerland, United Kingdom, U.S.A. and a worldwide network of
distributors. The majority of these centres employ Service Engineers who have undergone comprehensive Edwards
training courses.
Order spare parts and accessories from your nearest Edwards company or distributor. When you order, state for each
part required:
z
Model and Item Number of your equipment
z
Serial number (if any)
z
Item Number and description of the part.
Fit accessories as described in the Supplementary Publications and in the instruction manual supplied with the
accessory.
7.2
Spares
The spares available for use with the nEXPT Turbopumping Station (including replacement component parts) are
listed in the instruction manuals supplied as Supplementary Publications.
7.3
Accessories
Refer to the Edwards product catalogue for all turbo and backing pump accessories used on the nEXPT Turbopumping
Station.
7.3.1
BX bakeout band
The BX bakeout band should only be used on turbomolecular pumps intended to be used remotely away from the
nEXPT Turbopumping Station. For further details please contact Edwards UK.
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
Page 25
Spares and accessories
7
B723-01-880 Issue A
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Page 26
© Edwards Limited 2010. All rights reserved.
Edwards and the Edwards logo are trademarks of Edwards Limited.
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