Model 4200-SCS Semiconductor Characterization System The simple choice for complex characterization tasks

Model 4200-SCS Semiconductor Characterization System The simple choice for complex characterization tasks
Model 4200-SCS
Semiconductor Characterization System
The simple choice for complex characterization tasks
device characterization • parametric I-V analysis • stress-meas
The Model 4200-SCS
is the best,
most comprehensive and cost-effective solution for a growing list of applications
• Semiconductor technology development
• Semiconductor process integration
• Incoming inspection
• Failure analysis
• Device reliability and lifetime testing
• Nanotechnology and MEMs research
• Mobile ion characterization
• Doping profile extractions
• High and low k dielectric characterization
• Isothermal testing
• Flash memory testing
• Pulse testing of III-V devices
• Organic LED characterization
• Hall Effect and van der Pauw testing
• Semiconductor device modeling
• High power MOSFET/BJT characterization
• Interface charge trap characterization
• Solar cell/photovoltaic device characterization
ure reliability testing • device modeling • materials research
DC I-V, C-V, and pulse testing in one environment
Expanded capabilities
®
Familiar Windows­­­­­­­ Interface
No training, no floppies
Single-click test sequencing
No programming
Configurable, scalable, upgradable
Works now, grows later
Sub-femtoamp noise
See
more, faster
Optional turnkey configurations
Start testing right out of the box
To learn more about C-V measurements, download a free copy of our application note, “Making I-V and C-V Measurements on Solar/Photovoltaic Cells Using the Model 4200-SCS
Semiconductor Characterization System” from www.keithley.com.
3
a complete, integrated solution:
all from one vendor
Integrated industrial controller and additional RAM ensure high
test throughput, plus system robustness, stability, and security. Industry-standard
Windows-based GUI
minimizes set-up and
integration time.
High speed, high
precision ADC per DC channel eliminates
performance tradeoffs.
Store test setups and results
right on the system with the
high capacity fixed disk drive.
No sorting through floppy
disks to find the desired test.
The integrated CD-RW drive
allows high capacity backup
and data transfer.
Communicate quickly
with a wide range of
PC accessories with the
built-in USB interface.
COMPLETE AND EASY-TO-USE CHARACTERIZATION ENVIRONMENT
• Even infrequent users can begin testing productively right away, without programming assistance, for a lower cost of test and
faster ROI.
• The flexible user interface makes it easy to change parameters on the fly and test devices interactively with just a mouse click.
• KTEI software supports three different test applications packages to expand the Model 4200-SCS’s pulsed testing capabilities
dramatically: 4200-PIV-A for charge trapping and isothermal testing for leading-edge CMOS research, 4200-PIV-Q for higher
power pulse testing in III-V and other higher frequency FET devices, and 4200-FLASH for testing FLASH and embedded
memory devices.
• KTEI makes C-V tests as easy to set up and run as I-V tests. An extensive set of sample programs, test libraries, and built-in
parameter extraction examples are included. The latest software enhancements add support for high power C-V, differential
DC bias, and quasistatic C-V measurements.
• Export test settings, data, and plots to .xls, delimited text, .bmp, .jpg, or .tif file formats.
• Sample tests and projects for a variety of applications are included to simplify startup.
• Factory-supplied drivers for external capacitance meters, switch matrices, pulse generators, and a variety of probers simplify
building configurations for specialized applications.
• Optional drivers for leading modeling software packages let the Model 4200-SCS fit into any lab's test environment.
4
RS-232 port
Standard 10/100 BASE-T network
interface allows easy access to
network files and printers.
Standard parallel printer port
The Model 4200-CVU is an
integrated instrument designed to
plug directly into the chassis, so
it can be controlled through the
system's point-and-click interface,
just like an SMU.
Low noise ground unit with remote sense
SVGA monitor port
Configurable with from 2 to 8 SMUs and optional
sub-femtoamp Remote PreAmps. Adding high
power SMUs won’t restrict SMU capacity.
Additional USB port
Use the GPIB interface to control external instruments
or to allow external control of the 4200-SCS using an
Agilent 4145 style command language.
Choose from 8- or 16-bit dual-channel digital
oscilloscopes for waveform measurements in both
the time and voltage domains. Measure the entire
captured waveform or just a selected portion.
Add up to 4 dual-channel pulse generators to configure
the system for a growing range of pulse applications, from
I-V pulse testing to stress/measure reliability testing using
parallel AC stress on multiple channels.
DC PreAmps can be either remotely or directly mounted on the
probe station. By reducing the signal path between the DUT and
the PreAmp from several feet to inches, the Model 4200-SCS
can eliminate cable effects like parasitic capacitance and leakage
currents, for more accurate low-level DC measurements.
Visit www.keithley.com to download your free Model 4200-SCS Technical Data Booklet.
5
intuitive interface
simplifies device and material characterization and analysis
1
Define a test starting
from any of more than
400 supplied sample
libraries, using the
system’s intuitive pointand-click interface.
2
Click the on-screen Run
button to start the test and view a real-time plot.
3
Export data in Excel workbook or
ASCII formats and plots in .bmp,
.jpg, or .tif formats for either
online or offline analysis. Built-in
Formulator, graphing, and calc sheet
functions simplify complex analyses.
6
automated test sequences without writing code
The Project Navigator organizes tests and controls test sequencing.
Switching between different test setups and accessing test results
is fast and simple. Sequence tests on a single device by clicking on
the device in the Navigator, then clicking the Run button.
Keithley Interactive Test Environment (KITE) is designed to let users
understand device behavior quickly. When running a test sequence,
users can view results and plots for completed tests while the
sequence is still running. As shown here, multiple plots can be viewed
at the same time to get a complete picture of device performance.
Extend the 4200-SCS
with C language test libraries
The User Test Module feature in KITE lets the 4200-SCS
take on advanced test algorithm requirements with
user-written C++ code. These modules give lab users
a “fill in the blank” interface to C language subroutines.
Everything needed to collect, analyze, and report results
is integrated in one application. User Test Modules
support viewing and graphing data in real time to monitor
test progress. The Keithley User Library Tool (KULT),
provided with the 4200-SCS, allows integrating these
subroutines easily into a test sequence. Selected UTMs
also have GUI interfaces to simplify test setups.
7
expand your characterization options:
c-v as easy as i-v
When combined with the Model 4200-SCS’s intuitive point-and-click interface and powerful Keithley Interactive Test
Environment (KITE), the Model 4200-CVU and its supporting software make C-V tests as easy to set up and run as I-V
tests. The system’s flexible, powerful test execution engine makes it simple to combine I-V, C-V, and pulsed tests into the
same test sequence, so the Model 4200-SCS can replace a variety of electrical test tools with a single, tightly integrated
characterization solution.
The 4200-CVU instrument integrates directly into
one of the Model 4200-SCS's instrument slots.
The Model 4200-CVU is an integrated instrument
designed to plug directly into the 4200-SCS chassis,
so it can be controlled through KITE’s point-and-click
interface, just like an SMU, and allow users of any
level of experience to perform C-V testing as if they
were experts. A variety of sample tests, including tests
for MOSCAPs, MOSFETs, and Mobile Ion characterization
are bundled in, as well as common parameter extractions
like oxide thickness, doping density, depletion depth,
and flatband voltage. Operating specs like a frequency
range of 10kHz to 10MHz and measured capacitance
accuracy as low as 0.1% allow the Model 4200-CVU to
outperform anything else in the market.
120.0E–12
Capacitance (F)
100.0E–12
80.0E–12
1N5388A Zener Diode
0 to 180V C-V Sweep
60.0E–12
40.0E–12
20.0E–12
0
20
40
60
80
100
120
140
Voltage (V)
The C-V Power Package can perform measurements
up to 400V (180V in this zener diode example).
160
180
The new C-V Power Package hardware option works in
tandem with the enhanced C-V software tools in KTEI
to make high power C-V measurements at up to 400V
(200V per device terminal). A pair of Remote Bias Tees
and cabling adapters route voltage from two of the
Source-Measure Units installed in the system’s chassis
to bias either or both sides of a semiconductor device.
This higher bias level makes the 4200-SCS ideal for
testing higher power devices, such as MEMs, LDMOS
devices, displays, automotive components, etc. The
package also supports the use of DC currents up to
300mA, making it possible, for example, to measure
capacitance when a transistor is turned on, a useful
capability in device modeling.
To learn more, download a free copy of our new application note, “Using the Model 4200-CVUPWR C-V Power Package to Make High Voltage and High Current C-V Measurements with
the Model 4200-SCS Semiconductor Characterization System” at www.keithley.com.
8
Much of the credit for the Model 4200-CVU’s exceptional measurement accuracy, speed, and efficiency is due to the Model
4200-SCS’s high speed digital measurement hardware and tight hardware and software integration, as well as Keithley’s
adherence to low-noise system design principles. This combination of strengths means the Model 4200-CVU can improve uers’
productivity significantly, whether the task is a simple as setting up a single measurement or running a preset test sequence
with a single mouse-click or as sophisticated as triggering and plotting multiple C-V sweeps. The system’s high speed digital
architecture means the Model 4200-CVU can run and plot C-V sweeps in real time as fast as any competitive C-V meter. Keithley’s
modular system architecture means the Model 4200-CVU can be easily incorporated into any existing Model 4200 system ever
manufactured, or configured into a new 4200-SCS system as an option.
Powerful C-V test libraries and parameter extraction examples
There’s much more to the Model 4200-CVU than hardware and interface software. By building on decades of experience
in C-V test technology, Keithley is backing up the Model 4200-CVU with an extensive set of sample programs, test libraries,
and built-in parameter extraction examples.
•Standard C‑V sweeps for generic MOSFETs, diodes, and capacitors.
1.4E–12
1.2E–12
•MOSFET: Makes a C‑V sweep on a MOSFET device.
1.0E–12
•Lifetime: Determines generation velocity and
lifetime testing (Zerbst plot) of MOS capacitors.
Cp_GD
•MOScap: Measures C‑V on a MOS capacitor.
•PNjunction: Measures the capacitance of a p-n junction or
Schottky diode as a function of the DC bias voltage across the device.
600.0E–15
–1
•Interconnect Capacitance: Measures C‑V of small
interconnect capacitance on wafer.
•Nanowire: Makes C‑V sweep on a two-terminal nanowire device.
•Flash: Performs C‑V measurements on a typical floating gate
Flash memory device.
1
2
3
4
5
6
These test results show how the overlap capacitance
of a device changes as the electric fields on the gate
and drain are adjusted.
5.2E–12
5.0E–12
Capacitance (F)
•I‑V/C‑V switch: Demonstrates using DC SMUs, CVU, and
707A/708A (switch matrix) in one project.
0
VG
•Photo Voltaic cell: Measures both forward and reverse
biased DC characteristics of an illuminated solar cell.
•BJT: Measures capacitance (at 0V bias) between terminals,
including Cbe, Cbc, and Cec.
1.4E–15
800.0E–15
•Mobile Ion: Determines mobile charge using
bias-temperature stress method.
•Capacitor: Performs both a C‑V sweep and a C‑f
sweep on a Metal‑Insulator‑Metal (MIM) capacitor.
Gate to drain capacitance
using CV Differential Bias
at drain voltage of 0.1, 0.5,
and 0.7V
Quasistatic C-V Curve
of MOSFET
4.8E–12
4.6E–12
4.4E–12
4.2E–12
–4
–3
–2
–1
0
1
2
3
4
Voltage (V)
Results of a quasistatic C-V measurement
on a MOSFET with 5pF of gate capacitance.
For more information, download “Using the Ramp Rate Method for Making
Quasistatic C-V Measurements with the Model 4200-SCS Semiconductor
Characterization System” at www.keithley.com.
9
expand your characterization options:
Pulse generation and measurement flexibility
KTE Interactive provides software support for three instruments—a
dual-channel pulse generator card (the Model 4205-PG2) that plugs
into one of the Model 4200-SCS’s slots, just like an SMU, and a choice
of two dual-channel digital oscilloscopes for time- and voltage-domain
measurements. Together, these instruments make it simple and
cost-effective to integrate pulsing, waveform generation, and signal
observation capabilities into the Model 4200-SCS’s test environment.
The 4205-PG2 supports two waveform generation modes in addition
to our standard pulse capability. The Arbitrary Waveform Mode can
generate complex waveforms made up of up to 256K data points
at clock speeds up to 25MHz. The Segment ARB™ Mode (patentpending) simplifies creating, storing, and generating waveforms
made up of up to 1024 user-defined line segments. Each segment
can have a different duration, allowing exceptional waveform
generation flexibility.
Dual-channel pulse generator
The Model 4205-PG2 Dual-Channel Pulse Generator
provides voltage pulses as short as 10ns or up to
±20V (into 50Ω).
Each Model 4200-SCS chassis can support four pulse
generators, for up to eight pulse generation channels.
This instrument expands the system’s applications
significantly, adding charge pumping (including tri-level
charge pumping), parallel AC stress for stress/measure
reliability testing, basic clock generation for test vectoring
and failure analysis, and digital triggering for multi-pin
device testing. A trigger-in capability simplifies
synchronizing the operation of multiple pulse channels.
10
Far Beyond dc
A choice of dual-channel digital oscilloscopes
The system supports two integrated digital oscilloscope
options: the Model 4200-SCP2 offers 8-bit resolution with a
sample rate up to 2.5 gigasamples/second, while the Model
4200-SCP2HR provides 16-bit resolution and a sample rate
up to 400 megasamples/second. Both can be programmed
for automated measurement and data acquisition or used
with the stand-alone GUI application provided to perform
traditional oscilloscope tasks. They provide measurements in
both the time (frequency, rise/fall time) and voltage domains
(amplitude, peak-peak, etc.).
Request a free copy of our white paper, Introducing Pulsing into Reliability Tests
for Advanced CMOS Technologies, at www.keithley.com.
11
complete turnkey
applications packages
To help you tailor your Model 4200-SCS system cost-effectively, Keithley has designed three hardware/software
packages for specific sets of pulse test applications.
4200-PIV-A Pulse I-V Package
Our dual-channel pulse generator is combined with an integrated
digital oscilloscope, specialized interconnect, and software that
controls pulse generation and data acquisition to automate a
variety of pulsed I-V tests. Patented cable compensation and loadline compensation functions are provided, producing DC-like
I-V transistor curves, such as VDS-ID and VGS-ID families of curves
for voltage threshold extraction. This package is ideal for pulsed
I-V testing of devices with charge trapping or self-heating issues,
such as high κ gate dielectric transistors and advanced CMOS
technologies like SOI.
4200-PIV-Q Pulsed I-V, Q Point, Dual-Channel
Pulsing Package
Choose the 4200-PIV-Q for quiescent point pulsing for RF
transistors like HEMT and FET devices in III-V or LDMOS
technologies. Combining multiple pulse generators and a
digital oscilloscope offers a variety of new capabilities, including
dual-channel pulsing (i.e., on both a device’s gate and drain),
higher power pulsing, and pulsing from a non-zero quiescent
point. It’s useful for investigating a variety of dispersion
phenomena and looking at transient effects using a single pulse.
12
4200-FLASH Non-Volatile Memory Test Package
This package tests single flash memory cells or small arrays quickly and easily,
providing four independent (but synchronized) multi-level pulse channels. It includes
all the code and interconnect needed to perform a standard set of flash memory
tests (characterization, endurance, and disturb tests) for NAND or NOR technologies
(including MLC). It can generate program and/or erase cycles using the new Segment
ARB™ wave generator, and tightly control the in-line High Endurance Output Relay,
which can shorten lifetime testing times significantly.
Control external hardware via GPIB with our
built-in drivers
Need to incorporate an external C-meter, switch matrix, prober, or
external pulse generator into your semiconductor characterization
system? Just set the GPIB address, install the GPIB cable, and the
Model 4200-SCS is ready to start testing. The User Test Modules
we supply load external instrument data directly into the system’s
analysis and graphing tools.
Automate testing and wafer stepping with prober
control capabilities
•Control semi-automatic probers from Cascade, Suss, Micromanipulator, and Signatone with the drivers included.
•Use our single-click automation to step easily from die to
die and subsite to subsite while running a test sequence and storing all the data.
13
a variety of applications
compatible with:
Explore nanotechnology applications
With 16 Interactive Test Modules (ITMs) for characterizing the seven most
common nanodevice structures, the sample project and sample tests
included in the Model 4200-SCS bring together the capabilities you need
to create powerful nanotech R&D software applications. They can help
you to focus on your research by slashing the time needed to develop
new applications or to refine them as new test requirements emerge.
The Model 4200-SCS conforms to and supports the new IEEE Standard
P1650™-2005: IEEE Standard Test Methods for Measurement of Electrical
Properties of Carbon Nanotubes.
Supported nanodevices:
• Carbon Nanotube
• BioComponent
• Carbon Nanotube FET
• Nanowire
• Molecular Wire
• Molecular Transistor
• Multi-Pin Nanocell
Data acquisition applications in the modeling lab
We’ve given the Model 4200-SCS the flexibility to interface with ProPlus
Design Solutions’ BSIMProPLUS™package, Agilent’s IC-CAP modeling
application, or Silvaco’s UTMOST III SPICE modeling software via
the system’s built-in GPIB interface. Instrument drivers allow these
packages to control the Model 4200-SCS directly, just like any piece of
instrumentation linked to the modeling station.
Characterize device lifetimes accurately
and economically
The pulse testing option (adding a 4205-PG2
pulse generator) supports AC stress testing of new
materials, failure mechanisms, and clocked devices,
and is controlled through the same point-and-click
interface as DC stress.
14
The stress-measure capabilities included make the Model 4200-SCS
ideal for both packaged level and wafer level reliability testing
applications. The system’s sequencer controls the order of
stress-measure steps, so any 4200-SCS test can be inserted into
the measurement phase. Test sequences are completely userprogrammable and can include both standard Interactive Test Modules,
like Vt-lin, and custom User Test Modules. Multiple tests can be run
during each measure step, and switch controls can isolate individual
devices that were stressed in parallel. Several JEDEC-compliant
sample projects are provided with the system, including projects for
standard WLR tests like Hot Carrier Injection or Channel Hot Carrier,
Negative Bias Temperature Instability, Charge to Breakdown, and
Electromigration. All of these projects are easily customizable to adapt
to specific WLR testing requirements.
comprehensive switching solutions
Integrated switching control
Three different standard switch configurations make it easy to find
the best match for the application. Based on Keithley's six-slot
Model 707A and single-slot Model 708A switch matrix mainframes,
they include all the components, cabling, and instructions needed
to assemble the switch matrix and incorporate it into the 4200-SCS
test environment. Once the switch is installed, users can connect
instrument terminals to output pins in minutes with a simple
"fill-in-the-blank" interface in the Keithley Configuration Utility
(KCON). No need to remember and program row and column
closures—system applications and standard user libraries manage
routing test signals from instruments to DUT pins. A new GUI
simplifies configuring switch connections.
Standard Switch Matrix Configurations
General Purpose
Low Current
Ultra Low Current
<100pA
Uses Model 7071 switch card
<1pA
Uses Model 7072 switch card
<100fA
Uses Model 7174A switch card
• Component ATE
• Best match to the 4200-SCS
without optional PreAmps
• Excellent for remote sense
applications
• Low cost, high density cables
• Expandable from 8×12 to 8×72
• Basic device characterization
• Good match to the 4200-SCS with
or without optional PreAmps
• Local sense, excellent for C-V
meters and pulse generators
• Standard triax cables
• Expandable from 8×12 to 8×72
• High performance device
characterization
• Best match for the 4200-SCS
when equipped with optional PreAmps
• Standard triax cables
• Expandable from 8×12 to 8×72
Request a FREE copy of our new Nanotechnology Measurement Handbook
at www.keithley.com.
15
superior measurements
Automate your characterization applications
Our new Automated Characterization Suite (ACS) option allows the
Model 4200-SCS to interface easily with popular semi-automatic and
fully automatic wafer probers. The ACS software simplifies a variety
of complex system functions, including wafer description, test setup,
interactive prober control, automation, and test summary report
generation. It offers maximum operating flexibility by making it easy
to switch between semi-automatic operation and fully automatic
operation using the same test plan and environment.
ACS Integrated Test Systems are highly
configurable, instrument-based systems
for semiconductor characterization at the
device, wafer, and cassette level.
Integration with a wide range of instrument options
ACS allows easy integration of a wide range of external
instrumentation, including the Model 4200-SCS and Keithley’s
®
Series 2600 System SourceMeter instruments. ACS uses an
open architecture that gives you greater programming flexibility
without compromising ease of use.
For more details on how our new ACS Integrated Test Systems can boost your testing
productivity, contact your Keithley representative or download a copy of our new
ACS brochure at www.keithley.com.
16
Additional device characterization solutions
Use Series 2600 System SourceMeter® instruments to configure
applications that demand fast measurements and/or high
channel counts. Their embedded Test Script Processors ensure
unparalleled system automation and two to four times the
test throughput of competitive products in I-V functional test
applications. The TSP-Link™ master/slave connection seamlessly
integrates multiple Series 2600 SourceMeter channels into a system
that can be programmed and controlled as a single instrument.
Add your choice of Series 2400 SourceMeter instruments for
applications that also demand wide dynamic range: 10pA to 10A,
1µV to 1100V, 20W to 1000W.
For automated testing of electronic products and components,
rely on Series 3700 Switch Systems with optional integrated
DMMs for scalable, instrument-grade switching and multichannel measurements. These LXI Class B-compliant solutions
feature embedded Test Script Processors, so they offer unparalleled system automation, throughput, and flexibility.
Request our free white paper: Pulsed Characterization of Charge-Trapping Behavior
in High k Gate Stacks at www.keithley.com.
17
condensed specifications
current
SPECIFICATIONS
4210-SMU
High
Power
SMU
2
4200-SMU2
Medium
Power
SMU
4200-SMU and 4210-SMU with optional
4200-PA PreAmp Current
Range1
Max.
Voltage
Measure
1 A
100 mA
100 mA
10 mA
1 mA
100 µA
10 µA
1 µA
100 nA
10 nA
1 nA
100 pA
10 pA
1 pA
3
Resolution 21 V
210 V
21 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
210 V
1 µA
100 nA
100 nA
10 nA
1 nA
100 pA
10 pA
1 pA
100 fA
10 fA
3 fA
1 fA
0.3 fA
100 aA
Source
Accuracy
±(% rdg + amps)
0.100 %
0.045 %
0.045 %
0.037 %
0.035 %
0.033 %
0.050%
0.050%
0.050%
0.050 %
0.050 %
0.100 %
0.500%
1.000%
Resolution3
+ 200 µA
+ 3 µA
+ 3 µA
+ 300 nA
+ 30 nA
+ 3 nA
+ 600 pA
+ 100 pA
+ 30 pA
+ 1 pA
+ 100 fA
+ 30 fA
+ 15 fA
+ 10 fA
50 µA
5 µA
5 µA
500 nA
50 nA
5 nA
500 pA
50 pA
5 pA
500 fA
50 fA
15 fA
5 fA
1.5 fA
Accuracy
±(% rdg + amps)
0.100 %
0.050%
0.050 %
0.042 %
0.040 %
0.038 %
0.060%
0.060%
0.060%
0.060 %
0.060 %
0.100 %
0.500%
1.000%
+
+
+
+
+
+
+
+
+
+
+
+
+
+
350 µA
15 µA
15 µA
1.5 µA
150 nA
15 nA
1.5 nA
200 pA
30 pA
3 pA
300 fA
80 fA
50 fA
40 fA
Voltage Compliance: Bipolar limits set with a single value between full scale and 10% of selected voltage range.
voltage
SPECIFICATIONS
Voltage
Range1
Max.
Current
4200-SMU 4210-SMU
200 V 4
20 V
2 V
200 mV
10.5
105
105
105
mA
mA
mA
mA
105 mA
1.05 A
1.05 A
1.05 A
Measure
3
Resolution 200 µV
20 µV
2 µV
1 µV
Source
Accuracy
±(% rdg + volts)
0.015
0.01
0.012
0.012
% + 3
% + 1
% + 150
% + 100
mV
mV
µV
µV
Resolution3
Accuracy
±(% rdg + volts)
5 mV
500 µV
50 µV
5 µV
0.02% + 15 mV
0.02% + 1.5 mV
0.02% + 300 µV
0.02% + 150 µV
Current Compliance: Bipolar limits set with a single value between full scale and 10% of selected current range.
Additional Specifications
Max. Output Power: 22 watts for 4210-SMU and 2.2 watts for 4200-SMU (both are four-quadrant
source/sink operation).
DC Floating Voltage: COMMON can be floated ±32 volts from chassis ground.
Differential Voltage Monitor:
Voltage Monitor (SMU in VMU mode):
Ground Unit
Voltage error when using the ground unit is included in the 4200-SMU, 4210-SMU, and 4200-PA
specifications. No additional errors are intro­duced when using the ground unit.
Output Terminal Connection: Dual triaxial, 5-way binding post.
Maximum Current: 2.6A using dual triaxial connection; 8.5A using 5-way binding posts.
Load Capacitance: No limit.
Voltage
Range
200 V
20 V
2 V
200 mV
Measure
Resolution
200 µV
20 µV
2 µV
1 µV
Measure
Accuracy
±(%rdg + volts)
0.015% + 3 mV
0.01% + 1 mV
0.012% + 110 µV
0.012% + 80 µV
Differential Voltage Monitor is available by measuring with two SMUs in VMU mode, or by using the
low sense terminal provided with each SMU.
Cable Resistance: FORCE ≤1Ω, SENSE ≤10Ω.
Input Impedance: >10 Ω.
13
Input Leakage Current: <30pA.
Measurement Noise: 0.02% of measure­ment range (rms).
18
NOTES
1 All ranges extend to 105% of full scale.
2 Specifications apply on these ranges with or without a 4200-PA.
3 Specified resolution is limited by fundamental noise limits. Measured resolution is 61⁄2 digits on each range. Source
resolution is 41⁄2 digits on each range.
4 Interlock must be engaged to use the 200V range.
condensed ac specifications
4205-PG2 Pulse generator SPECIFICATIONS
Standard pulse: ±20V into 50Ω
±40V into 1MΩ
Period range: 20ns to 1s
Programmable pulse width:10ns
to near DC
Arbitrary (ARB) waveform: Depth: 256K points/channel
Timebase: 20ns/point up to 1s/point, fixed timebase for entire waveform
TM
Segment ARB waveform: Depth: 1024 segments/channel
Time per segment: 20ns to 1s, 10ns increments (each segment can
have a different duration)
4200-PIV-q typical sPECIFICATIONS
Gate and Drain Current Measure: 10µA resolution
Gate: 100mA (into 50Ω)
Drain: 760mA (into 50Ω)
Maximum Current Measure: Sample Rate: 200MS/s
Gate/Base Pulse Source: -20V to +20V into 50Ω
Drain/Collector Voltage Range:
-38V to +38V into 50Ω
Pulse Width: 500ns to 999 ms
4200-flash SPECIFICATIONS
4200-PIV-A SPECIFICATIONS
Pulse Source Voltage Range:
0 to ±20V into 50Ω
0 to ±40V into high impedance.
Resolution: 100nA
Pulse Width:
250ns to 1s
Sample Rate: 1GS/s
Switching time for DUT pin isolation:
100µs
DC Offset: ± 200V on drain
Pulse Source Voltage Range: 0 to ±5V into gate
C-V POWER PACKAGE TYPICAL PERFORMANCE
Pulse Width: Measurement Parameters: Cp-Gp, DCV, timestamp.
Ranging: 1pF to 1nF.
Test Signal: 100kHz to 10MHz, 10mV to
100mV.
DC Voltage Source: ±200V with 5mV resolution.
DC Current: 100mA or 300mA maximum.
40ns to 150ns
4200-CVU SPECIFICATIONS
Measurement Functions: Measurement Parameters: Cp-G, Cp-D,
Cs-Rs, Cs-D, R-jX, Z-theta.
Test Signal: Frequency Range: 10kHz to 10MHz
Minimum Resolution: 10kHz, 1MHz depending on frequency range.
Source Frequency Accuracy: ±0.1%.
Signal Output Level Range: 10mV rms to 100mV rms.
Resolution: 1mV rms.
Accuracy: ±(10.0% + 1mV rms) unloaded (at rear panel).
DC Bias Function:
DC Voltage Bias Range: ±30V
Resolution: 1.0mV.
Sweep Characteristics:
Available Sweep Parameters: DC bias voltage, frequency.
Key digital oscilloscope SPECIFICATIONS
Bandwidth (50Ω): DC to 750MHz
Channels: 2
Maximum sample rate:
1.25 giga-samples per second
per channel
2.5 giga-samples per second one channel interleaved
Typical Cp Accuracy @ 1MHz: 1.0%.
DC Current Sensitivity: 10nA/V.
SMU Bias Terminals Supported: 4.
RAMP RATE QUASISTATIC C-V TYPICAL PERFORMANCE
Measurement Parameters:
Cp, DCV, timestamp.
Ranging: 1pF to 1nF.
Measurement Terminals:
Triaxial guarded.
Ramp Rate: 0.1V/s to 1V/s.
DC Voltage:
±200V.
Typical Cp Accuracy: 5% at 1v/s ramp rate.
On-board memory buffers: Up to 1 mega-sample per channel
Visit www.keithley.com to request a free copy of Overcoming the Measurement Challenges
of Advanced Semiconductor Technologies: DC, Pulse, and RF.
19
4200 SCS
www.keithley.com
Ensure a faster return on your investment
All the support you need
System Development Services. Let us help you maximize
your test productivity by integrating other hardware, such as a
switch or C-V meter, into your Model 4200-SCS system.
Software Services. Short of in-house programmers? We can
develop custom User Test Modules (UTMs) for your application
or review and optimize other software you've already developed.
Implementation Services. We'll get your new system up
and running quickly with services like installation, setup,
configuration, and basic user training.
Consulting Services. Our Applications Engineers can help
you develop test plans, optimize your test processes, or take on
time-consuming measurements challenges.
Training Services. We'll deliver in-depth training on system
operation, making and optimizing measurements, and system
troubleshooting.
Services Contracts. We'll help you avoid unbudgeted
maintenance expenses and ensure ongoing system accuracy and performance.
For applications assistance, call us on our toll-free hotline at 1-888- KEITHLEY (534-8453) from 8:00 am to 8:00 pm ET (U.S.
only). For assistance beyond those hours, send our Applications
Engineering Department a facsimile (440-248-6168) or an e-mail
message ([email protected]). Our worldwide facilities
and affiliates, which offer native language support services.
Ongoing system enhancements ensure ongoing ROI
Keithley has continually enhanced the Model 4200-SCS’s
hardware and software ever since its introduction. This ongoing
commitment assures you of a cost-effective system upgrade path
to address new testing needs as they arise, so you’ll never have to
buy a new parametric analyzer because your old one is obsolete.
The Model 4200-SCS can keep up with the industry’s changing
test needs—making your capital investment stretch further and
improving your ROI.
Download your FREE copies of this literature at
www.keithley.com:
• C-V Characterization of MOS Capacitors Using the Model 4200-SCS Semiconductor Characterization System
• Making I-V and C-V Measurements on Solar/Photovoltaic Cells Using the Model 4200-SCS Semiconductor Characterization System
• Using the Model 4200-CVU-PWR C-V Power Package to Make High Voltage and High Current C-V Measurements with the Model 4200-SCS Semiconductor Characterization System
• Using the Ramp Rate Method for Making Quasistatic Measurements with the Model 4200-SCS Semiconductor C-V Characterization System
Specifications are subject to change without notice.
All Keithley trademarks and trade names are the property of Keithley Instruments, Inc.
All other trademarks and trade names are the property of their respective companies.
A
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M E A S U R E
O F
C O N F I D E N C E
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© Copyright 2008 Keithley Instruments, Inc.
Printed in the U.S.A.
No. 2227
908 7K.GL
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