LIQUI-FLOW TM Series L10 / L20 Digital Mass Flow Meters / Controllers... > Introduction

LIQUI-FLOW TM Series L10 / L20 Digital Mass Flow Meters / Controllers... > Introduction
LIQUI-FLOW
TM
Series L10 / L20 Digital Mass Flow Meters / Controllers for Liquids
> Introduction
Bronkhorst High-Tech B.V., the European market leader in thermal
Mass Flow Meters/Controllers and Electronic Pressure Controllers,
has many years experience in designing and ­manufac­turing precise
and reliable measurement and control devices. With a wide range
of instruments, Bronkhorst® offers ­innovative ­solutions for many
different applications in many different m
­ arkets. The instruments are
made to customers’ specification, in v­ arious styles, suitable for use
in laboratory, industrial environment, h
­ azardous areas, semiconductor
processing or analytical equipment.
> LIQUI-FLOWTM series L10 / L20
Bronkhorst High-Tech B.V. has been the pioneer in the field of
micro to low flow liquid metering instruments based on a thermal
measuring principle. The digital LIQUI-FLOWTM Mass Flow Meter
was designed to cover the range between 5 and 1000 g/h (Full Scale) in a compact instrument with a fast response. The Flow Meter is basically a stainless steel tube without any
moving parts or built-in obstructions. The heater/sensor assembly
is arranged around the tube and, by following the anemometric
­principle: a constant difference in temperature (ΔT) is created and
the energy required to maintain the ΔT is dependent of the mass
flow rate. Due to the benefits of the unique patented sensor, the
fluid will be warmed to a maximum of 5°C, thereby making the
L10/L20 series suitable for fluids with low boiling points.
> Liquid flow control
Flow control is achieved by integrating a control valve onto the
body of the Liquid Flow Meter, or by mounting it as a separate
component (in IP65 configuration). This control valve has a purge
connection on top of the sleeve that enables easy elimination of air
or gas when starting up the system. The electronic control function
forms part of the normal circuitry in the liquid flow meter, so the
need for an external controller is eliminated.
> Multi-Bus technology
Bronkhorst High-Tech developed their latest digital instruments
according to the “multi-bus” principle. The basic pc-board on the
instrument contains all of the general functions needed for
­ easurement and control. It has analog I/O-signals and also an
m
RS232 connection as a standard feature. In addition there is the
possibility of integrating an interface board with DeviceNet™,
PROFIBUS DP, Modbus, EtherCAT® or FLOW-BUS protocol.
> General LIQUI-FLOWTM features
u fast and accurate measuring signal
u insensitive to mounting position
u very small internal volume
u suitable for liquids with low boiling points
u for laboratory and OEM applications
u also available for industrial applications, with IP65 housing,
ATEX Cat. 3, Zone 2
> Digital features
u DeviceNetTM, PROFIBUS DP, Modbus-RTU/ASCII, EtherCAT®
or FLOW-BUS slave
u RS232 interface
u alarm and counter functions
> Fields of application
u Semiconductor industry
u HPLC applications
u Chemical industry
u Food & Pharmaceutical industry
u Analytical laboratories
> Technical specifications
Measurement / control system
Accuracy, standard :±1% FS
(based on actual calibration)
Turndown
:L10 Series 1 : 20 (5 ... 100%)
L20 Series 1 : 50 (2 … 100%)
Reproducibility
:±0,2% FS typical H2O
Settling time (controller)
:< 2 seconds
Operating temperature
:5…50°C
Temperature sensitivity
:±0,1% FS/°C
Attitude sensitivity
:negligible
Warm-up time
:30 min for optimum accuracy;
10 min. for accuracy ±2% FS
Mechanical parts
L23 Mass Flow Meter for Liquids
Material (wetted parts)
:Stainless steel 316L / 320; other on request
Process connections
:1/8”, 1/4” or 3 mm, 6 mm OD compression
type; 1/8” or 1/4” face seal male;
other on request
> Models and flow ranges
Purge connection (controller)
:1/16” OD compression type
Liquid Mass Flow Meters; PN100 (pressure rating 100 bar)
Seals
:Kalrez®-6375; other on request
Model min. flow max. flow
Ingress protection (housing)
:IP40 or IP65
L13 / L13I
0,25…5 g/h
5…100 g/h
L23 / L23I
2…100 g/h
20…1000 g/h
Electrical properties
Power supply
Liquid Mass Flow Controllers; PN100 (P-max 100 bar)
:+15…24 Vdc
Model
min. flow
max. flow
100 mA 120 mA
L13V12 / L13I+C2I
0,25…5 g/h
5…100 g/h
24 V 65 mA 85 mA
L23V12 / L23I+C2I
2…100 g/h
20…1000 g/h
285 mA 305 mA
250 mA 270 mA
Max. power consumption: Supply at voltage I/O at current I/O
Meter: 15 V
Controller: 15 V 24 V
Extra for fieldbus:
(if applicable) Indicated ranges are based on H2O.
PROFIBUS DP: add 53 mA (at 15 V) or 30 mA (at 24 V)
Higher pressure ratings are available on special request.
EtherCAT® : add 66 mA (at 15 V) or 41 mA (at 24 V)
DeviceNetTM: add 48 mA (at 24 V)
Analog output/command
Digital communication
:0...5 (10) Vdc or 0 (4)…20 mA
> Model number identification
(sourcing output)
:Standard: RS232;
Options: PROFIBUS DP, DeviceNetTM,
Modbus-RTU/ASCII, EtherCAT®, FLOW-BUS
LNN VNN -A
A
A - NN-A- NNA
Sensor code
Electrical connection IP40 configuration
L13 (I) Meter, max. 100 g/h
Analog/RS232
:9-pin D-connector (male);
L23 (I) Meter, max. 1000 g/h
PROFIBUS DP
:bus: 9-pin D-connector (female);
L13V12 Controller, max. 100 g/h
Internal seals
power: 9-pin D-connector (male);
L23V12 Controller, max. 1000 g/h
K
Factory selected
Kalrez (FFKM)
DeviceNetTM
:5-pin M12-connector (male);
EtherCAT®
: 2x RJ45 modular jack (in/out)
Communication (I/O)
FLOW-BUS/Modbus-RTU/ASCII
:RJ45 modular jack
A RS232 + analog (n/c control)
A 3 mm OD compression type
B
Connections (in/out)
RS232 + analog (n/o control)
B 1/8” Face seal male
Electrical connection IP65 configuration
D RS232 + DeviceNetTM (n/c control)
1 1/8“ OD compression type
Analog/RS232
:8 DIN (male)
E
(n/o control)
2 1/4“ OD compression type
PROFIBUS DP
:bus: 5-pin M12 (female); power: 8 DIN (male)
M RS232 + Modbus (n/c control)
3 6 mm OD compression type
DeviceNetTM
:5-pin M12 (male)
N RS232 + Modbus
(n/o control)
8 1/4” Face seal male
FLOW-BUS/Modbus-RTU/ASCII
:5-pin M12 (male)
P
RS232 + DeviceNetTM RS232 + PROFIBUS DP (n/c control)
9Other
Q RS232 + PROFIBUS DP (n/o control)
Calibration
R
RS232 + FLOW-BUS (n/c control)
Supply voltage
References
S
RS232 + FLOW-BUS (n/o control)
D+15…24 Vdc
T
RS232 + EtherCAT®
(n/c control)
U
RS232 + EtherCAT® (n/o control)
:Verified by NKO, the Dutch calibration
organisation, and traceable to Dutch and
international standards.
Liquids
System
Analog output
:Standard calibration: H2O or IPA (Isopropyl
A 0…5 Vdc
Alcohol); for other liquids apply to factory.
B 0…10 Vdc
:Precision laboratory balances.
F 0…20 mA sourcing
G 4…20 mA sourcing
Technical specifications subject to change without notice.
> Dimensions and weights
Mass Flow Meter
IP65 Mass Flow Controller
Model
A
B
C
H
K
Weight (kg)
C
H
K
L
Weight (kg)
L13 (1/8” OD)
47
98
47
118
25
0,4
L13I+C2I (1/8” OD) 127 178
74
125
29
36
1,4
L23 (1/4” OD)
47
102
47
121
25
0,4
L23I+C2I (1/4” OD) 127 178
74
128
29
36
1,4
Dimensions in mm
Model
A
B
Dimensions in mm
> Industrial style LIQUI-FLOWTM series
The LIQUI-FLOWTM series L10I/L20I digital Liquid Flow Meters /
Controllers for low flow ranges are equipped with a rugged
­‘industrial style’ (IP65) pc-board housing for use in industrial
­environments or even Zone 2 hazardous areas, due to their ATEX category 3 approval. The instruments operate on a thermal,
­thru-flow measuring principle. The flow meter can be connected to a control valve to form a closed control loop. The standard
direct acting valve (model C2I) is normally closed, has a pressure
­capability of 100 bar (1500 psi) and a purge connection for easy
elimination of air or gas.
1/16”
Mass Flow Controller
Model
A
B
C
H
K
L13V12 (1/8” OD)
77
128
47
118
25
Weight (kg)
0,7
L23V12 (1/4” OD)
77
132
47
121
25
0,7
Dimensions in mm
L13I Mass Flow Meter, IP65 configuration
IP65 Mass Flow Meter
Model
A
B
C
H
K
L
L13I (1/8” OD)
47
98
74
125
25
36
Weight (kg)
0,9
L23I (1/4” OD)
47
102
74
128
25
36
0,9
Dimensions in mm
IP65 Mass Flow Meter with close-coupled Control Valve
> Application examples
> Vaporizing
Verifying pumps
LIQUI-FLOWTM flow meters are used in analytical applications in
combination with HPLC pumps, verifying the pump performance or
even, as shown in this example, close-coupled with a gear pump.
Using the integrated PID controller, the setpoint signal continuously
adjusts the rotation speed of the pump.
Liquid Delivery with Vapour Control
The CEM-System (Controlled Evaporation and Mixing) is an
­innovative Liquid Delivery System (LDS) that can be applied for
atmospheric or vacuum processes. The vapour generation system
consists of a liquid flow controller, an MFC for carrier gas and a temperature controlled mixing and evaporation device.
The system is suitable for mixing liquid flows of 0,25-1200 g/h
­resulting in ­saturated vapour flows of 50 mln/min up to 100 ln/min.
This ­vaporizer system can replace bubblers. New opportunities
­created with the CEM-system: mixtures can be evaporated and even solids, dissolved in solvents can be vaporised successfully.
Option 2: flow validation
solvent
reservoir
solvent
reservoir
detector
Features
HPLC column
HPLC pump
pc
Option 1:
flow control
column heater
HPLC injection
valve
process sample in
liquid mass
flow meter/controller
uAccurately controlled gas/liquid mixture (mass flow)
uFast response
uHigh reproducibility
uHandles water, solvents, liquid mixtures
uVery stable vapour flow
uFlexible selection of gas/liquid ratio
uLower working temperature than conventional system
process sample out
GMP validation in food & pharma filling processes
In food and pharmaceutical applications critical filling ­processes
must be very accurately and, above all traceably documented. LIQUIFLOWTM Series L10/L20 are particularly suitable for this task. The
main features of these digital instruments are: high precision, fast
response, compact design and a very small internal volume.
Vapour delivery applications
uCVD (Chemical Vapour Deposition), e.g. for hardening, thin film coating or planarization processes
uTesting/calibration of analyzers with reference gas vapor ­concentrations
uToxic gas effects on protective clothing
uAnalyzers with reference H2O vapour concentrations
uHumidification of fuels
uAnaesthetics
Batch filling process
mass flow meter
inverse flow
pump
3/2-way valve
E-8000
Control panels for:
carrier gas, liquid flow,
temperature and
filling process
Mixing valve
Mass flow
controller
Flow meter
for liquids
filling process
H2O
Gas
Heat
exchanger
filling process
Humidified
atmosphere
reactor,
chamber,
cell
Bronkhorst High-Tech B.V. Nijverheidsstraat 1a, NL-7261 AK Ruurlo The Netherlands
T +31(0)573 45 88 00 F +31(0)573 45 88 08 I www.bronkhorst.com E [email protected]
9.60.021C
©Bht1602-021
solvent
reservoir
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