Optical Measuring Machines Measuring Microscopes Hyper MF / MF-U CATALOG No. E4267-176 Measuring Microscopes So Accurate They Defy Common Sense Concept Core Technology Ergonomic Design Inspecting complex microstructures of everdecreasing size demands ever-higher accuracy from measuring microscopes used to satisfy the manufacturing and quality control principle of ‘Observation plus Measurement’. Mitutoyo is committed to providing microscopes that meet this requirement as well as exceeding users’ expectations in terms of sophisticated functionality and ergonomic features that allow fatigue-free use over extended periods of time. Over many years Mitutoyo has made significant contributions to the technologies that are key to the core technology of manufacturing industry: measurement. The experience and expertise gained is reflected in the design and manufacture of each individual component of these microscopes and can be seen most clearly in their sublime integration of optics, mechanics, and electronics. The microscope main unit has been designed with the emphasis on user friendliness and ease of operation. Mitutoyo has executed the mechanical design to allow easy operation. Even after extended use, its fatigue-fighting design still provides a comfortable work-experience for the operator. 2 World's Highest Measuring Accuracy World's Highest Measuring Accuracy* µm 2 Measuring accuracy in the X- and Y-axes at full stroke surpasses class 0 of the JIS Standard for measuring microscopes (B7153-1995). This makes these microscopes ideal for high accuracy measurement of precision molds or cutting tools that require the best resolution, or for inspecting sub-miniature semiconductor/ electronic parts such as wafers and integrated circuits. 1.5 1 0.5 0 -0.5 -1 -1.5 -2 0 25 50 75 100 125 150 175 200 225 250 *As of April, 2004 Large, Highly Accurate XY Stage Mitutoyo uses a type of linear guideway on the large XY stage that is highly regarded for excellent straightness and stability. This is one key element in the strategy to maximize geometrical accuracy - another is FEM analysis. Our designers used FEM techniques extensively during the design phase to ensure stage stability was optimal in any measurement situation. Thus, the foundations for achieving the highest measuring accuracy were laid. More about the XY Stage Highly Accurate Digital Scales The XY stage is a massive, highly stable design created using mechanical techniques developed over Mitutoyo’s long years of experience in manufacturing precision measuring microscopes. Maximum stage loading is 30kgf (66lbf) and a range of useful fixtures is available that includes a wafer holder and swivel-center support. FEM analysis of the XY stage 3 These microscopes are equipped with highly accurate digital glass scales on all three axes. Mitutoyo produces glass scales in an underground laboratory where the temperature and humidity are constant throughout the year. The XY (stage) and Z (optical tube) displacements are displayed digitally. Excellent Operability and Solid Reliability FS Optical System The FS optical system is respected more than ever before for its ability to enable measurement, observation and analysis with a leading-edge combination of long working distance and high NA. This optical system ensures high operability when measuring deep holes, steps, etc., or when setting up workpieces for measurement. Tilting Optical Tube* LAF Optical Tube* Front Operation To reduce fatigue due to extended use, it is important that the operator use a microscope in an unforced posture. The eyepiece unit allows stepless adjustment of tilt angle so that, no matter what their physique, operators can always adjust the viewing position for comfortable working during any measuring task. The LAF (Laser AF) optical tube can be selected as an option. The LAF system achieves high repeatability when measuring minute steps, etc., enabling difficult measurements with minimum fatigue. Controls are arranged to fall within easy reach of the operator on two control panels at the front of the microscope. This allows the operator to concentrate on measurement without having to look away from the eyepieces. Membrane technology makes the switches very durable. * Available for model MF-U only * Available for model MF-U only. Left control panel Right control panel 4 Measuring with Hyper MF - an Emotional Experience Traceability to National Standards Cross-hair Reticle How accurately the reticle can be aligned with a workpiece feature is a very important feature in a measuring microscope. Taking ocular resolution into account, the thin-line reticle has been standardized on a broken, 90° cross hair with a line width of 5µm*. This allows precise positioning of the reticle. 3µ m * Cross-hair reticles of 3µm and 7µm line width are also available. Fiber-optic Cold Light Illumination A fiber-optic cold light illuminator and an IR absorption filter greatly reduce thermal effects on the instrument and workpiece that would otherwise have an adverse effect on measuring accuracy. Telecentric illumination is used for reflected light observation and Koehler illumination for viewing contours. Both systems use an aperture diaphragm for even, glare-free illumination with good image contrast. System Extensibility A video port is standard on the optical tube, thereby allowing a digital camera unit and various vision analysis units to be added to a system. Mitutoyo intends to enhance international calibration services by collaboration with laboratories that have received the accreditation of ISO/IEC 17025 (ISO/IEC Guide 25) from JCSS and RvA NKO (Nederlandse Kalibratie Organisatie). Additionally, ISO9000 accredited Mitutoyo production plants and service divisions supply high-quality products and services. National Metrology Institute of Japan/National Institute of Advanced Industrial Science and Technology National Standard * Organizational names are those at the time of accreditation and may differ from current names. (NMIJ/AIST) Mitutoyo Tsukuba Calibration Center Secondary Standard (JCSS Accredited Calibration Laboratory No.0031) Mitutoyo Laboratory Miyazaki Plant Reference (JCSS Accredited Calibration Standard Laboratory No.0030) Mitutoyo Utsunomiya Calibration Center Mitutoyo Hiroshima Calibration Center (JCSS Accredited Calibration Laboratory No.0078) (JCSS Accredited Calibration Laboratory No.0109) Mitutoyo Kiyohara Calibration Center (JCSS Accredited Calibration Laboratory No.0067) Mitutoyo Kiyohara Techno Service Center (RvA Accredited Calibration Organization No.K132) Step Gage Standard/Reading Scale Digital Color Vision System DV-520 (Microscope main unit: MF-UA1010TH) 5 Inspection/ Calibration Equipment Gauge Block Step Gage Standard Scale/Reference Scale Optical Equipment Main Specifications Highest-in-Class Measuring Accuracy Large, Highly Accurate XY Stage Handles Wide-field, Heavyweight Workpieces MF/MF-U MF/MF-U Mitutoyo has achieved a measuring accuracy of ± (0.9 + 3L/1000)µm (L: Measured length in mm) in both X- and Y-axes. This performance surpasses Class 0* of JIS B7153:1995, Measuring Microscopes, and allows support of ultra-precise inspection and measurement of the smallest visible features to those extending across the full measuring range of these microscopes. * Class 0: (2 + 0.01L) µm or less, L: Measured length (mm) The pressures for diversification and upsizing of workpieces are increasing in various industrial fields, such as semiconductors, electronics, precision automotive parts and tools. These microscopes not only have the accuracy for the smallest workpiece but also have the power to handle larger components such as lead frames, precision cutting tools and molds. 150mm/ 5.91” 30Kgf 250mm/7.87” 150mm/5.91” Three-axis Motor-driven Joystick Ensures High Operability from High Remote-controlled Objective MF/MF-U Magnification Change Speed to Ultra-Low speed The X, Y, and Z axes are driven and controlled with one joystick that serves as the nerve center of front operation. Speed control is possible from high-speed traverse of the stage to ultra low-speed, minute positioning of a workpiece. Also, the lock mechanism is provided for each X, Y, and Z axis to support high-accuracy pitch measurement by single-axis displacement. The primary target is assumed to concentrate the operator on a workpiece. MF-U The power turret in the optical tube is controlled with membrane switches on the left front panel. LEDs indicating each lens position on the upper part of the optical tube are linked to rotation of the turret so that the operator can see the current magnification at a glance. Power Turret Drive Switches Left control panel 6 Laser Auto Focus LAF Optical Tube The laser auto focus function provides high accuracy and high repeatability and brings significant advantage to the inspection of minute steps, multi-layer board detail, etc. A powerful function that helps avoid operator error and ensures high productivity. MPlanApo 50 X MPlanApo 100 X LAF is available both in BF and BD optical tubes. LAF Effective in the Smallest Area An LAF spot diameter of ø1µm or less is achieved using an objective with a magnification of 50X or more. This performance supports a wide range of measurement tasks. Objective Spot diameter The spot diameters are a logical value determined by calculation. MplanApo 2X 16µm/630µinch MplanApo 5X 6µm/240µinch MplanApo 10X 3µm/120µinch MplanApo 20X 1.5µm/60µinch MplanApo 50X 0.8µm/3µinch MplanApo 100X 0.6µm/2µinch Selectable LAF Functions Providing a choice of the Just Focus (JF) mode that functions quickly at the current point of interest and the Tracking Focus (TF) mode that tracks the focusing position to retain sharp focus as the stage moves has improved measurement efficiency. The AF function delivers highly repeatable focusing on areas with different surface textures and slopes. Laser Beam Class The LAF (factory-fit option) function uses a low-power laser that corresponds to Class 2 (visible light) of JIS C6802/1997, Safety of Laser Products. Visible Semiconductor Laser 690nm Image graphic of AF optical path 7 Main Unit Specifications Hyper MF Model name No. Optical tube HyperMF 176-401 Standard reticle (built-in) Pupil distance adjustment Optical path transfer ratio Angle from horizontal Video port Observation image Eyepiece Magnification Objective (option) Turred Hyper MF-U ML objective Bright field (BF) Bright/dark field (BD) Bright field (BF) Bright/dark field (BD) Focusing unit Maximum workpiece height Measuring accuracy*4 Drive method Illumination Contour illumination Surface illumination Stage Measuring range (X-axis x Y-axis) Measuring accuracy*5 (at no load on X- and Y-axis) Top face dimensions Effective dimensions of stage glass Swivel range Maximum loading Drive method Detector unit Digital display Resolution Display axes Data processing unit Control unit Joystick lock Fine pitch Data output Digital display reset HyperMF-U 176-402 (Bright field/bright field LAF/bright and dark field / bright and dark field LAF)*1 90˚ broken cross-hair (line width: 5µm) Note: Not selectable for HyperMF-U Siedentopf type Adjustment range: 51 to 76mm/ 2.01” to 2.99” Observation/video camera = 50/50 25˚ Manual tilting Standard equipment Erect image 10X, 15X, 20X Monocular unit (with one eyepiece) or Provided with two 10X eyepieces binocular unit (with two eyepieces) selectable 1X, 3X (standard accessories), 5X, 10X, 20X, 50X, 100X M Plan Apo, M Plan Apo SL, G plan Apo BD Plan Apo, BD Plan Apo SL (Centering, parfocal, manual control, 4-way/manual control, 4-way with sensor/centering, motor-driven control, 5-way with sensor*2) ((Manual control, 4-way/manual control, 4-way with sensor/ motor-driven, 4-way with sensor*3 ) 150mm/ 5.91” ± (1.5+10L/1000) µm L: Measured length in mm Motor-driven control with the joystick Koehler illumination, aperture diaphragm built-in, 12V 50W halogen bulb, 100-step light adjustment, fiber-optic cold light illumination Telecentric illumination, variable aperture diaphragm mechanism, 12V 100W halogen bulb, 100-step light adjustment, fiber-optic cold light illumination 250mmX150mm/ 9.84”X5.91” ± (0.9+3L/1000) µm L: Measured length in mm 460mmX350mm/ 18.11”X13.78” 300mmX200mm/ 11.81”X7.87” ±3˚ 30kgf/ 66lbf Motor-driven control with the joystick High-accuracy digital scale (Patent registered) 0.01µm/ .0004µinch X, Y, and Z axes QM-DATA200 or Vision Unit Illumination brightness controller LAF (Just focus) LAF (Tracking focus) Turret remote-control External dimensions Microscope main unit (WXDXH) Mass Power supply Power unit Microscope main unit Power unit (with LAF installed) (with LAF installed) (with the power turret installed) 880mmX913mmX730mm/ 34.65”X35.94”X28.74” 880mmX913mmX770mm/ 34.65”X35.94”X30.31” 160mmX476mmX381mm/ 6.30”X18.74”X15” Approx. 250kg/ 551.2lb Approx. 255kg/ 562.2lb 14kg/ 30.86lb 100, 110, 120, 220, 230, 240VAC 50/60Hz Maximum power consumption 700W *1, 2, 3: Factory-fit option *4, 5: The measuring accuracy conforms to JIS B 7153. Upon bulb replacement, order the contour illumination halogen bulb 12V 50W (No.02APA527) or surface illumination halogen bulb 12V 100W (No.517181). The high-brightness specification bulb (No.12BAD602) is also available as a 12V 100W bulb. 8 System Configuration Common Optional Accessories Hyper MF/MF-U System Diagram 0. Hyper MF-U Hyper MF Data Processing Unit (Essential Option) Vision unit QM-Data200 Hyper MF Hyper MF-U 1 Dimensions Data Processing System 2D Calculating System Features • Powerful 2D measurement capabilities with graphic display functions that make the most of the lar ge LCD screen • Graphical help on the screen guides the operator during measurement sequences. • Measurement results are displayed automatically • Measurement procedures (Part Programs) can be learnt by the system and easily repeated with position navigation help on screen • Frequently-used combination measurements (e.g. circle-to-circle) are single-key operations • The Automatic Identification (AI) function recognizes the feature type automatically, making preselection unnecessary • Macros to initiate learned measuring sequences can be created at a keystroke • Custom menus to suit specific requirements can be created • Tolerance comparisons and various statistical evaluation options are possible for every measurement result. • Measurement results can be output to MS Excel* in table form (CSV) • Measurement results and Part Programs can be stored on the floppy-disk drive available as an optional accessory • A free-standing table version with tilting device is available • The next measurement can be started even while the last is printing out QM-Data 200 System * MS-Excel is a r egistered trademark of Microsoft Corporation. Specifications Order No. Display languages Measurement value unit Resolution Programming function Statistical processing Number of elements in memory Element call Element key-in Display unit Input connector Output connector Measurement result file output Power supply Maximum power consumption External dimensions Mass 264-140 (Free-standing operation) Japanese, English, German, Italian, Spanish, Portuguese, Chinese, and Korean Length: mm, angle: degree/degree, minute, second (selectable) 0.1µm Create/run/edit measuring procedures Measurement item, quantity of data, maximum value, minimum value, mean, standard deviation, range, histogram Maximum 1000 elements Point, line, circle, distance, ellipse, square hole, slotted hole, point and angle of intersection Point element, line element, circle element Monochrome graphic LCD (320 x 240 dots, backlighted) (1) RS-232C : Connected to the counter on the main unit. (2) X, Y, Z: Linear scale input (for the types with no counter) (3) OPTOEYE: OPTOEYE edge signal (for connecting OPTOEYE M2) Note: Available only if linear scale input is used. (4) FS:Connected to the foot switch. (1) RS-232C : Connected to an external PC (measurement results) (2) PRINTER: Connected to the printer/external printer (measurement results) (3) FD: Connected to the FDD unit (measurement result file, measuring procedure file) RS-232C output (CSV format, MUX-10 format) 100 to 240VAC, 50/ 60Hz (AC adapter used) 24W (excluding optional accessories) approx. 260 x 242 x 310 mm (including the stand) / 10.24” x 9.53” x 12.20” approx. 2.2kg/ 4.85lbs Printer Dimensions 196/ 7.72” 50˚ 310/ 12.20” 260/ 10.24“ 210/ 8.27“ 242/ 9.53” Order No. 12AAA799 • Used for saving/reading files of part programs, user macros, measurement results, etc. [Optional accessories] Order No. 12AAD032 30˚ FDD Unit Order No.908353 Printer paper (5 rolls) • Used to print measurement * An external printer (color/monochrome) compatible results. with ESC/P is also available. Printer control code system: ESC/P, compatible with MS-DOS. Pin-out: 24 pins ESC/P printer cable: 2m (Order No.12AAA804)- - - Option Receipt printer print example Print method Number of print digits Print speed External dimensions (WxDxH) Standard accessories 10 Serial-matrix thermosensitive method 40 digits Maximum 52.5cps (normal character) 160x170x65.5 mm (printer main unit) / 6.30”x6.69”x2.58” Printer cable, printer paper (1 roll), AC adapter (for 100V) Features • Automatic edge detection tool and measurement macro icons enable single-key measurement • Graphics and measurement navigation function support ease of use • Image capturing/saving function • Tolerancing calculation results and statistical processing for each item • Measurement results can be exported to MS-Excel* in CSV format (allows unique inspection sheets to be created on the same PC) • Supports total measurement on a single screen. • Automatic light equalizing function faithfully reproduces illumination conditions Vision Unit System * MS-Excel is a registered trademark of Microsoft Corporation. Measuring a Workpiece Feature 1) Display the feature to be measured on the monitor, adjust the illumination and focus with the microscope main unit, and then select the feature and the edge detection tool. (2) Click in the vicinity of the feature with the mouse to automatically detect its edge and perform the measurement/calculation. (3) The measurement results for the feature selected are displayed on the monitor. Specifications Order No. 359-680 Optical system 0.5X (0.5X video adapter built-in) when Mitutoyo measuring microscope is installed Image detecting unit High-sensitive 1/3” CCD colour camera External dimensions of CCD camera 100X58X89mm/ 3.94”X2.28”X3.50” Mass of CCD camera 0.4kg/.88lb Monitor magnification/monitor visual field Approx. 63 X /3.1 X 2.3mm/ 2.48” X /.12” X .09” (at the use of 3X lens) when Mitutoyo measuring microscope is installed Resolution 0.01µm/ .4µinch Measuring accuracy Depends on the accuracy of the measuring microscope. PC CPU Pentium 4 2.26GHz 256MB memory Display 15 inch LCD OS MS-W indows XP* Software Maximum power consumption QSPAK Max. 400W * MS-Windows XP and MS-Excel are registered trademarks of Microsoft Corporation. The PC configuration and specifications are subject to change without notice. 11 Lens and Illumination Eyepieces Monocular unit MF Binocular unit No.176-302 No.176-303-1 With one eyepiece 10 x /24 With two eyepieces 10 x /24 Double-image eyepiece Eyepiece MF MF/MF-U Part name WF10 x /24 No.(1-piece pack) 378-856-5 No.(2-piece pack) 378-856 Magnification 10 x Field number 24 MF No.375-044 Aids accurate measurement of hole-to-hole distances, hole diameters and sections using the double image generated when the feature under inspection is not aligned with the optical axis of the microscope. • Magnification: 10X • Field number: 22 WF15 x /16 WF20 x /12 378-857-5 378-858-5 378-857 378-858 15 x 20 x 16 12 Rotary template eyepiece MF No.176-357 Uses a template to superimpose screw thread forms (metric UST, Unified Screw Thread), concentric circles, and crosshairs on the workpiece image for quick and efficient measurement by comparison. • Magnification: 10X • Field number: 21 Protractor eyepiece MF ISO metric screw 0.25, 0.3, 0.35, 0.4, 0.45, 0.5, 0.6, 0.7, 0.75, 0.8, pitch (for 3X objective) 0.9, 1, 1.25, 1.5, 1.75, 2, 2.5, 3, 3.5, 4 ISO unified screw thread/ 80, 75, 64, 56, 48, 44, 40, 36, 32, 28, 24, 20, inch (for 3X objective) 18, 16, 14, 13, 12, 11, 10, 9, 8, 7, 6 Concentric circles with cross hairs (for 3X objective) No.375-043 Measures angles between workpiece edges by successive alignment with two crosshairs whose separation is adjustable and calibrated through 360°. • Magnification: 10X • Field number: 21 • Resolution: 5’ Dotted-line cross scale Digital protractor eyepiece ø1, ø2, ø3, ø4, ø5 60˚, 90˚ MF No.375-040 Measures angles between workpiece edges by successive alignment with reticle crosshairs whose rotation is digitally calibrated. Switching or resetting the resolution is controlled with the standard accessory counter. Data output to an RS-232C equipped PC is possible. • Magnification: 10X • Field number: 18 • Reticle: 90° solid line, 45° broken line • Angular resolution: 0.00° or 1' • Power supply: 9VAC, 500mA • Maximum power consumption: 4W • Maximum angle value: ±369.99° or ±369°59' 12 Objective ML objective Model name No. Magnification Numerical aperture N.A. W orking distance WD Focal depth MF ML1X ML3X 375-036 375-037 1X 3X 0.03 0.07 59mm/ 2.32” 72.5mm/ 2.85” 306µm/12.05µ inch 56µm/ 2.20µinch FS objective Bright field (BF) ML5X 375-034 5X 0.11 59.5mm/ 2.34” 23µm/ .91µinch ML10X 375-035 10 X 0.18 44mm/ 1.93” 8µm/ .31µinch ML20X 375-051 20 X 0.42 20mm/ .99” 1.6µm/ .06µinch ML50X 375-052 50 X 0.55 13mm/.51” 0.9µm/ .04µinch ML100X 375-053 100 X 0.7 6mm/ .24” 0.6µ m/ .02µinch MF-U Model name No. Magnification Numerical aperture N.A. W orking distance WD Focal depth MplanApo1X MplanApo2X 378-800 378-801 1X 2X 0.025 0.055 11mm/.43” 34mm/ 1.33” 440µm/17.32µ inch 91µm/ 3.58µinch MplanApo5X 378-802-2 3X 0.14 34mm/ 1.34” 14µm/ .55µinch MplanApo10X 378-803-2 10 X 0.28 33.5mm/ 1.32” 3.5µm/ .14µinch MplanApo20X 378-804-2 20 X 0.42 20mm/ .79” 1.6µm/ .06µinch MplanApo50X 378-805-2 50 X 0.55 13mm/ .51” 0.9µm/ .04µinch MplanApoHR50X 378-814 50 X 0.75 5.2mm/ .20” 0.48µm/ .02µinch Model name No. Magnification Numerical aperture N.A. W orking distance WD Focal depth MplanApoSL20X 378-810-2 20 X 0.28 30.5mm/ 1.20” 3.5µm/ .14µinch MplanApoSL80X 378-812-2 80 X 0.5 15mm/ .59” 1.1µm/ .04µ inch MplanApoSL100X 378-813 100 X 0.55 13mm/ .51” 0.9µm/ .04µinch MplanApoSL200X 378-816 200 X 0.62 13mm/ .51” 0.7µm/ .03µinch GplanApo20X(t3.5) 378-847 20 X 0.28 29.42mm/ 1.16” 3.5µm/ .14µinch GplanApo50X(t3.5) 378-848 50 X 0.5 13.89mm/ .55” 1.1µ m/ .04µinch BDplanApo50X 378-835 50 X 0.55 13mm/ .51” 0.9µm/ .04µinch BDplanApoHR50X 378-845 50 X 0.75 5.2mm/ .20” 0.48µm/ .03µinch BDplanApo100X 378-836 100 X 0.7 6mm/ .24” 0.6µ m/ 02µinch FS objective MplanApoSL50X 378-811-2 50 X 0.42 20.5mm/ .81” 1.6µm/ .09µinch Bright/dark field (BD) MplanApo100X 378-806-2 100 X 0.7 6mm/ .24” 0.6µm/ .02µinch MplanApoHR100X 375-815 100 X 0.9 1.3mm/ .05” 0.34µm/ .01µ inch MF-U Model name No. Magnification Numerical aperture N.A. W orking distance WD Focal depth BDplanApo2X 378-831 2X 0.055 34mm/ 1.34” 91µm/ 3.58µinch BDplanApo5X 378-832 5X 0.14 34mm/ 1.34” 14µm/ .55µinch BDplanApo10X 378-833 10 X 0.28 33.5mm/ 1.32” 3.5µm/ .14µ inch BDplanApo20X 378-834 20 X 0.42 20mm/ .79” 1.6µm/ .06µinch Model name No. Magnification Numerical aperture N.A. W orking distance WD Focal depth BDplanApoSL20X 378-840 20 X 0.28 30.5mm/ 1.20” 3.5µm/ .14µinch BDplanApoSL50X 378-841 50 X 0.42 20mm/ .79” 1.6µm/ .06µinch BDplanApoSL80X 378-842 80 X 0.5 13mm/ .51” 1.1µm/ .04µ inch BDplanApoSL100X 378-843 100 X 0.55 13mm/ .51” 0.9µm/ .04µinch BDplanApoHR100X 378-846 100 X 0.9 1.3mm/ .05” 0.34µm/ .01µinch Illumination Oblique surface illuminator MF Twin fiber-optic Fiber-optic illuminator MF/MF-U ring-light MF No.172-351 No.176-416 No.176-417 This uses the surface illumination light source in the microscope main unit. The light equalizing function and condenser lens are included. 12V 100W This uses the surface illumination light source in the microscope main unit. The light equalizing function and condenser lens are included. 12V 100W This uses the surface illumination light source in the microscope main unit. The light equalizing function and condenser lens are included. 12V 100W * 10X lens or less is applicable. * 10X lens or less is applicable. LED ring-light No.176-367 (White LED) No.176-368 (Green LED) Position is adjustable so as to be appropriate for the light equalizing function and working distance. 12V 7.7W, outside diameter: 70mm/2.76”. * 10X lens or less is applicable. 13 LED ring-light MF (for FS Objectives) MF-U No.78829 (White LED) Position is adjustable so as to be appropriate for the light equalizing function and working distance. 12V 7.7W, outside diameter: 70mm/ 2.76”. * 10X lens or less is applicable. Main Optional Accessories Digital Color Vision 3D Vision Combination Program VCPAK C-mount compatible highdefinition digital color vision system. Allows anyone to easily capture and save high quality images from the microscope. Three types: 5.2Mpixel, 2.1Mpixel, and 0.5Mpixel. This system is based on an omnifocal image focused in the whole visual field of the microscope to greatly improve observation at small depths of focus. It also enables 3D vision display. •Main functions Image filing, on-screen manual measurement, white balance, comments on an image, scale display, etc. No.176-380: DV-50CL (LCD spec) No.176-384: DV-210L (LCD spec) No.176-382: DV-520L (LCD spec) * On-screen manual measurement requires the calibration chart (No.02AKN020) separately. Polarization Unit DIC Unit •Main functions High-quality digital imaging, real-time vision combination, combination by capturing a maximum of 256 sheets of images, adoption of universal image file formats (JPEG, BMP, TIFF, DIB), thumbnail display of saved images, noise reduction function, etc. Centering, Illumination Filter Parfocal Turret Power Turret (for BF) No.378-092 Bright field (BF) Bright and dark field (BD) No.378-080: For 5X, 10X No.378-079: For 20X No.378-078: For 50X, SL20X No.378-076: For 100X, SL80X, SL50X No.12AAA643:ND2 No.12AAA644:ND8 No.12AAA645:GIF No.12AAA646:LB80 No.378-018 Objectives: Up to 4 Visual field adjustment range: ± 0.5mm / .02” Parfocal adjustment range: ±0.5mm / .02” V Block with Clamp Swivel Center Support Holder with Clamp No.176-411 Ojectives: Up to 5 Visual field adjustment range: ±0.5mm/.02” Positioning accuracy: 2σ=3µm/120µinch Drive life: 1,000,000 movements Wafer Holder Center Support No.172-378 Maximum clamp diameter: ø25mm/.98” Mass: 0.8kg/ 1.76lb * Stage Adapter A is used together. A tilt angle of ±10˚ can be supported. Minimum reading of angle: 1˚ Maximum support size: ø80 x 140mm/ 3.15” x 5.51” in horizontal orientation ø65x140mm/ 2.56”x5.52” at a tilt angle of 10˚ Mass: 2.5kg/ 5.51lb * Stage Adapter A is required. No.176-107 Maximum workpiece thickness: 35mm/ 1.38” Mass: 0.4kg/ .88lb * Stage Adapter A is required. No.176-414 Wafer size: 3 to 8 inches Rotary Holder (No.378-363) attached Mass: 3.2kg/ 7.06lb No.176-415 Maximum support length: 250mm/9.84” Maximum support diameter: ø150mm/5.91” Maximum diameter allowing external apex observation: ø140mm/ 5.51” Effective stroke of the center-clamping mechanism: 22mm/ .87” Mass: 13kg/ 28.66lb Rotary table with Vibration Stage Adapter A fine feed knob (B) Damping Pad No.176-304 2 pieces pack Mass: 1.5kg/ 3.31lb No.3176-306 Effective glass diameter: ø240mm/ 9.45” Rotary table rotation angle: Approx. 51.5˚ (per full turn of the fine feed knob) Mass: 6.5kg/ 14.33lb 14 No.176-419 Spring pad type Float unit material: SUS304 WxDxH = 800x900x49mm/ 31.50”x35.43”x1.93” Mass: 58kg/ 127.9lb Machine Stand No.176-418 Max. loading: 400kgf/ 881.8lbf WxDxH = 1100x900x650mm/ 433.07”x35.43”x26.59” Mass: 45kg/99.21lb Measuring Microscope Line-up Demand for measuring microscopes that can perform observational tasks as well as measurement is increasing rapidly in various sectors of industry such as semiconductors, electronic parts, precision auto parts and tools. The following summarizes Mitutoyo's line-up of measuring microscopes actively participating in many industries. Mitutoyo intends to widen the appeal of measuring microscopes that can determine miniscule part dimensions on a workpiece and make them serve as the Basic Machine for non-contact measurement. High-accuracy Measuring Microscopes Hyper MF/MF-U Series name Optical tube HyperMF HyperMF-U Standard Metallurgical microscope (finite distance compensation) (finite distance compensation) Hyper MF Hyper MF-U Measuring range (X·Y·Z) Control system/ reading unit Resolution Data processing unit Video port 250·150·150mm 3-axis motor-driven with Joystick/digital scale 0.01 QM-DATA200/vision unit Standard equipment Measuring Microscopes MF-A/UA Series name MF-A Optical tube MF-UA HyperMF MF-A/UA Standard Metallurgical microscope (finite distance compensation) (finite distance compensation) Measuring range (X·Y·Z) Control system/ reading unit Resolution Data processing unit 50·50·150/100·100·150/200·100·150/ 200·170·220/300·170·220mm Manual/digital scale 0.1/0.5/1µm QM-DATA200/vision unit Video port Standard equipment Series name TM Toolmaker's Microscope TM Optical tube Standard (finite distance compensation) Measuring range (X·Y·Z) TM-505R Control system/ reading unit Resolution Data processing unit Video port 15 50·50·115/100·50·107mm Manual/micrometer head 1(MHD head) QM-DATA200 None Coordinate Measuring Machines Vision Measuring Systems Surface-, Form- and Contour Measurement Optical Measuring Sensor Systems Hardness Measuring Digital Scale and DRO Systems Small Tool Instruments and Data Management Mitutoyo Corporation 20-1, Sakado 1-Chome, Takatsu-ku, Kawasaki-shi, Kanagawa 213-8533, Japan Phone (044) 813-8230 Fax (044) 813-8231 http://www.mitutoyo.co.jp 52.330409 (1) CNE, Printed in Japan Note: All our product details, in particular the illustrations, drawings, dimension and performance details and other technical specifications contained in this publication are to be considered to be appr oximate average values. To this extent, we reserve the right to make changes in design, technical data, dimensions and weight. Our specified standards, similar technical rules and technical specifications, descriptions and illustrations of the pr oducts are correct at the time of printing. The current version of our general terms and conditions also apply. Only offers which we have submitted can be considered to be definitive.