datasheet for MMR901 by Mitsumi

datasheet for MMR901 by Mitsumi
MITSUMI
Pressure Sensor of Digital Output
Pressure Sensor of Digital Output
MMR901XA
Outline
This product is a compact piezoresistive pressure sensor that makes use of MEMS*1 technology.
AD converter and outputs a highly precise pressure value as a
It is equipped with a 16-bit resolution
digital value. As interface, an SPI*2 interface is used to communicate to a microcomputer. Thanks to the builtin
temperature sensor and EEPROM*3 data, the dedicated software running on the external microcomputer can
correct the property fluctuation caused due to variation in temperature.
*1 MEMS
: [Micro-Electro-Mechanical Systems]
*2 SPI
: [Serial Peripheral Interface]
*3 EEPROM : [Electronically Erasable and Programmable Read Only Memory]
Features
(Unless otherwise specified, Topr=+25°C)
(1) Small package :
(2) Mounting of a
pressure value
7.0 (W) ×7.0 (D) ×7.2 (H) mm
ADconverter (16-bit resolution) allows the product to output a highly precise
(3) The built-in temperature sensor and correction data written on the EEPROM can correct the temperature
*Any calculation function is not built into the product.
(4) Data output rate suitable for detection of the pulsating waveforms synchronized with heart beats
(approximately 200 Hz)
(5) Specifications
Pressure type
Gauge pressure (Based on atmospheric pressure)
Pressure medium
Air (no condensation)
Pressure detecting method
Piezoresistive method
Maximum load pressure
80kPa (600mmHg)
Operating pressure range
0~40kPa (300mmHg)
Resolution
3.3Pa (0.025mmHg)
Accuracy
±266Pa (±2mmHg)
Power supply voltage range
+2.4~+3.6V(+3.0V typ.)
Current consumed when pressure is measured
Max. 690µA
Standby current consumption
Max. 2µA
Output type
16-bit digital
Conversion time
5.12msec
Operating temperature range
5~45ºC
Applications
(1) for Sphygmomanometer
• Any products mentioned in this catalog are subject to any modification in their appearance and others for improvements without prior notification.
• The details listed here are not a guarantee of the individual products at the time of ordering. When using the products, you will be asked to check their specifications.
MITSUMI
Pressure Sensor of Digital Output
Block Diagram
IC1 MM3901(MEMS Sensor)
VDD
IC2 MM3509 (Sensor I/F IC)
VDD
MEMS
Pressure
Sensor
CS
SCLK
PreAmp.
DIN
SPI
Delta Sigma Digital
Modulator Filter
MUX
VDD
DOUT
ADRDY
Temp.
Sensor
TCK
EEPROM
MOEN
MOSCF
IMON
GND
GND
INN
Dimensions
INP
(Unit : mm)
6.0
1.0 PRESSURE OPENING
9
8
7 (0.15)
13
6
14
5
7.0
12
2.5
6.0
11
10
1
3
2
14-R0.25 PLATED THROUGH HOLE
4
2.5
7.0
1
3
4
5
14
7.2±0.5
R0.5
2
6
13
1.15
12
11
10
9
0.9
2.5 +0.1
-0.0
5.0±0.1
C0.4
0.5 ATMOSPHERIC PRESSURE OPENING
7
8
0.8
0.05 M
1.27
• Any products mentioned in this catalog are subject to any modification in their appearance and others for improvements without prior notification.
• The details listed here are not a guarantee of the individual products at the time of ordering. When using the products, you will be asked to check their specifications.
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