MITSUMI Pressure Sensor of Digital Output Pressure Sensor of Digital Output MMR901XA Outline This product is a compact piezoresistive pressure sensor that makes use of MEMS*1 technology. AD converter and outputs a highly precise pressure value as a It is equipped with a 16-bit resolution digital value. As interface, an SPI*2 interface is used to communicate to a microcomputer. Thanks to the builtin temperature sensor and EEPROM*3 data, the dedicated software running on the external microcomputer can correct the property fluctuation caused due to variation in temperature. *1 MEMS : [Micro-Electro-Mechanical Systems] *2 SPI : [Serial Peripheral Interface] *3 EEPROM : [Electronically Erasable and Programmable Read Only Memory] Features (Unless otherwise specified, Topr=+25°C) (1) Small package : (2) Mounting of a pressure value 7.0 (W) ×7.0 (D) ×7.2 (H) mm ADconverter (16-bit resolution) allows the product to output a highly precise (3) The built-in temperature sensor and correction data written on the EEPROM can correct the temperature *Any calculation function is not built into the product. (4) Data output rate suitable for detection of the pulsating waveforms synchronized with heart beats (approximately 200 Hz) (5) Specifications Pressure type Gauge pressure (Based on atmospheric pressure) Pressure medium Air (no condensation) Pressure detecting method Piezoresistive method Maximum load pressure 80kPa (600mmHg) Operating pressure range 0~40kPa (300mmHg) Resolution 3.3Pa (0.025mmHg) Accuracy ±266Pa (±2mmHg) Power supply voltage range +2.4~+3.6V(+3.0V typ.) Current consumed when pressure is measured Max. 690µA Standby current consumption Max. 2µA Output type 16-bit digital Conversion time 5.12msec Operating temperature range 5~45ºC Applications (1) for Sphygmomanometer • Any products mentioned in this catalog are subject to any modification in their appearance and others for improvements without prior notification. • The details listed here are not a guarantee of the individual products at the time of ordering. When using the products, you will be asked to check their specifications. MITSUMI Pressure Sensor of Digital Output Block Diagram IC1 MM3901(MEMS Sensor) VDD IC2 MM3509 (Sensor I/F IC) VDD MEMS Pressure Sensor CS SCLK PreAmp. DIN SPI Delta Sigma Digital Modulator Filter MUX VDD DOUT ADRDY Temp. Sensor TCK EEPROM MOEN MOSCF IMON GND GND INN Dimensions INP (Unit : mm) 6.0 1.0 PRESSURE OPENING 9 8 7 (0.15) 13 6 14 5 7.0 12 2.5 6.0 11 10 1 3 2 14-R0.25 PLATED THROUGH HOLE 4 2.5 7.0 1 3 4 5 14 7.2±0.5 R0.5 2 6 13 1.15 12 11 10 9 0.9 2.5 +0.1 -0.0 5.0±0.1 C0.4 0.5 ATMOSPHERIC PRESSURE OPENING 7 8 0.8 0.05 M 1.27 • Any products mentioned in this catalog are subject to any modification in their appearance and others for improvements without prior notification. • The details listed here are not a guarantee of the individual products at the time of ordering. When using the products, you will be asked to check their specifications.
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