Agilent Technologies | B2902 | Technical data | Agilent Technologies B2902 Technical data

Agilent Technologies B2902 Technical data
Agilent B2900A Series
Precision
Source/Measure Unit

Configuration and Connection
Guide
Agilent Technologies
Notices
© Agilent Technologies, Inc. 2011
Manual Part Number
No part of this manual may be reproduced
in any form or by any means (including
electronic storage and retrieval or translation into a foreign language) without prior
agreement and written consent from Agilent Technologies, Inc. as governed by
United States and international copyright
laws.
B2900-90090
Edition
Edition 1, May 2011


Agilent Technologies, Inc.
5301 Stevens Creek Blvd 
Santa Clara, CA 95051 USA
defined in FAR 2.101(a) or as “Restricted
computer software” as defined in FAR
52.227-19 (June 1987) or any equivalent
agency regulation or contract clause. Use,
duplication or disclosure of Software is
subject to Agilent Technologies’ standard
commercial license terms, and non-DOD
Departments and Agencies of the U.S. Government will receive no greater than
Restricted Rights as defined in FAR
52.227-19(c)(1-2) (June 1987). U.S. Government users will receive no greater than
Limited Rights as defined in FAR 52.227-14
(June 1987) or DFAR 252.227-7015 (b)(2)
(November 1995), as applicable in any
technical data.
Warranty
The material contained in this document is provided “as is,” and is subject to being changed, without notice,
in future editions. Further, to the maximum extent permitted by applicable
law, Agilent disclaims all warranties,
either express or implied, with regard
to this manual and any information
contained herein, including but not
limited to the implied warranties of
merchantability and fitness for a particular purpose. Agilent shall not be
liable for errors or for incidental or
consequential damages in connection
with the furnishing, use, or performance of this document or of any
information contained herein. Should
Agilent and the user have a separate
written agreement with warranty
terms covering the material in this
document that conflict with these
terms, the warranty terms in the separate agreement shall control.
Technology Licenses
The hardware and/or software described in
this document are furnished under a
license and may be used or copied only in
accordance with the terms of such license.
Restricted Rights Legend
If software is for use in the performance of
a U.S. Government prime contract or subcontract, Software is delivered and
licensed as “Commercial computer software” as defined in DFAR 252.227-7014
(June 1995), or as a “commercial item” as
Open Software License
A portion of the software in this product is
licensed under terms of the General Public
License Version 2 (“GPLv2”). The text of
the license and source code can be found
at:
www.agilent.com/find/GPLV2
Contents
1. B2900A Product Configuration
Product Line up of the B2900A Series . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
Options of B2900A Series . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Furnished Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
2. B2900A Accessories
Cables. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Adapters & Connectors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
Test Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
N1295A Device/component Test Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-8
U2941A Test Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
16442B Test Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-10
Other I/F and Interlock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
Rear Panel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
Program and Interface Capabilities . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13
Programming Language . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13
Program Memory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13
LXI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13
USB File System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13
Digital I/O Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-13
Installing the Interlock Circuit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14
Rack Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-15
3. Connection
Connecting to a DUT . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
“2-wire connections” or “4-wire connections”. . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
Floating. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
To use Test Leads . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Connection with Test Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
To use N1295A Test Fixture. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4
To use U2941A Test Fixture. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
To use 16442B Test Fixture . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
Connection with Prober . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
Connecting to Manual Prober. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
2-wire (Non-Kelvin) connection. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-12
4-wire (Kelvin) connection for High Force and High Sense . . . . . . . . . . . . 3-13
4-wire (Kelvin) connection for Low Force and Low Sense . . . . . . . . . . . . . 3-13
Kelvin to non-Kelvin connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-14
Agilent B2900A Configuration and Connection Guide, Edition 1
Contents - 1
Contents
To make connection to reduce leakage current . . . . . . . . . . . . . . . . . . . . . . . .
Guarding . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
To make connection to measure low resistance . . . . . . . . . . . . . . . . . . . . . . . .
Kelvin Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
3-15
3-15
3-16
3-16
4. Ordering Examples
Agilent B2900A for Resistance measurement. . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Agilent B2900A for LED IV Measurement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
Agilent B2900A for LIV Test of Laser Diode. . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
Agilent B2900A for Diode/LED/OLED/Varistor Test . . . . . . . . . . . . . . . . . . . . . 4-5
Agilent B2900A for Characterization of FET & Bipolar Transistor . . . . . . . . . . . 4-6
Agilent B2900A for DC Bias to Network Analyzer . . . . . . . . . . . . . . . . . . . . . . . 4-8
Contents - 2
Agilent B2900A Configuration and Connection Guide, Edition 1
1
B2900A Product Configuration
B2900A Product Configuration
Product Line up of the B2900A Series
1.1 Product Line up of the B2900A Series
The Agilent B2900A Series of Precision Source/Measure Unit provides wider voltage and
current coverage, higher resolution, and graphical user interface for more quicker test,
debug and characterization on the bench top.
The B2900A series consists of four models, the B2901A, B2902A, B2911A and B2912A,
differentiated through their measurement specifications and by the number of SMU
channels (one or two) they support. This makes it easy to select the exact
price/performance point to meet your testing needs.
Table 1-1
B2900A Series Ordering Information
Item
Description
B2901A
Precision Source/Measure Unit, 1ch, 100 fA, 210 V, 3 A DC/10.5 A pulse
B2902A
Precision Source/Measure Unit, 2ch, 100 fA, 210 V, 3 A DC/10.5 A pulse
B2911A
Precision Source/Measure Unit, 1ch, 10 fA, 210 V, 3 A DC/10.5 A pulse
B2912A
Precision Source/Measure Unit, 2ch, 10 fA, 210 V, 3 A DC/10.5 A pulse
Table 1-2
B2900A Series measurement capabilities
Effective set and measure value
Model
Number
of SMU
channels
B2901A
1
B2902A
2
B2911A
1
B2912A
2
Minimum resolution
Set
Measure
1 pA, 1 V
0.1 pA, 0.1V
Maximum
current
Maximum
voltage
± 3.03 A DC,
± 10.5 A
Pulse
± 210 V
0.01 pA, 0.1 V
NOTE
Max number of steps per second and Maximum sample rate are also different between
B2901A/B2902A and B2911A/B2912A. For details, refer to the data sheet of the B2900A series.
Figure 1-1
Agilent B2912A Precision Source/Measure Unit 10 fA, 2ch
1- 2
Agilent B2900A Configuration and Connection Guide, Edition 1
B2900A Product Configuration
Options of B2900A Series
1.2 Options of B2900A Series
This section describes Option items of the Agilent B2900A Series Precision
Source/Measure Unit.
Table 1-3
Option
B2900A Options
Description
OP Instruction
Specify the language of the paper manual if you need
ABA
Paper Manual (User’s Guide), English
• Additional printed paper manual. (English)
• The B2900A series product includes CD-ROM manuals.
ABJ
Paper Manual (User’s Guide), Japanese
• Additional printed paper manual. (Japanese)
• The B2900A series product includes CD-ROM manuals.
AB0
Paper Manual (User’s Guide), Traditional
Chinese
• Additional printed paper manual. (Traditional Chinese)
• The B2900A series product includes CD-ROM manuals.
AB2
Paper Manual (User’s Guide), Simplified
Chinese
• Additional printed paper manual. (Simplified Chinese)
• The B2900A series product includes CD-ROM manuals.
Select calibration options (optional)
AJ6
ANSI Z540 compliant calibration
• ANSI Z540 compliant calibration
UK6
Commercial cal. certificate w/ test data
• Test Data for ISO 9001/2 Commercial Calibration. This option
provides measurement test data for the standard commercial
calibration and test equipment trace information.
Select rack mount kit (optional)
1CM
Rack mount kit
• Rack mount kit for the B2900A series.
• 2U height EIA and 1/2 rack width
Agilent B2900A Configuration and Connection Guide, Edition 1
1- 3
B2900A Product Configuration
Furnished Accessories
1.3 Furnished Accessories
The B2900A is furnished with the accessories listed in the following table.
Table 1-4
B2900A Options
Description
Qty.
Note
Product Reference CD
1
Stores electronic files of user manuals, drivers and software
Agilent I/O Libraries CD
1
Stores driver and installation software for the Agilent I/O library
Quick Reference
1
Printed reference for quick start (English)
Certificate of Calibration
(without test data)
1
Certificate of Calibration without test data. If you need the test data, please specify
option UK6.
USB cable
1
USB cable (1.8 m)
The Product Reference CD stores the following software and drivers.
•
Agilent B2900A Quick I/V Measurement Software - This PC-based software makes
it easy to quickly set up and perform IV measurement and to display the measurement
data in a table pr graph without any programming. The software allows you to control
up to two members of the B2900A series over a GPIB or LAN connection, or one
member via a USB connection using furnished USB cable.
Operating System: Windows 7 (64bit/32bit), XP SP3 (32bit)
Other requirements: Microsoft .NET framework 4.0 or later and Agilent IO Libraries
16.0 or later.
1- 4
•
Agilent B2900A Graphical Web Interface - is a web browser based instrument
control panel. It enables you to set up and perform a measurement easily and quickly
from a web browser using the B2900’s built-in web server. This allows you to control
one B2900A series unit over a LAN connection.
•
IVI-C or IVI-COM drivers - supports Agilent VEE, Microsoft Visual Studio (Visual
Basic, Visual C++, Visual C#), National Instrument LabWindows and LabVIEW. It is
compatible with Windows 7 (64bit/32bit), XP SP2 (32bit) IO Libraries 16.0 or later.
•
LabVIEW driver (VI) - National Instruments LabVIEW 7.0 or later. LabVIEW
drivers are available at NI.COM.
Agilent B2900A Configuration and Connection Guide, Edition 1
2
B2900A Accessories
B2900A Accessories
Cables
2.1 Cables
The B2900A series has banana type output ports with Force, Sense and Guard potential.
However, if you use conversion adapter, you can use BNC type cables or Triaxial cables so
that each SMU channels can connect to dedicated test environment for DUT such as test
fixture or wafer prober. The great variety of available cables can be categorized into mainly
five types:
Table 2-1
•
Banana Test Lead - To simplify the connections, you can use 2-wire connections or
4-wire connections by using banana test leads for connection of DUT. There are many
types of DUT interface.
•
BNC cables - Co-axial type cables. Central signal line is surrounded by shield
potential. However, this is not suitable for ultra low current measurement below nA
level. For these low current measurements, we recommend to use the following
Triaxial cables.
•
Triaxial cables - have three leads - a central conductor for the signal, an encapsulating
conductor that shields the center signal by employing the same voltage thus decreasing
a possible leakage current - and an outer conductor that serves as Common. To use this
cable, Banana to Triaxial adapter is required.
Banana Test Leads for the Agilent B2900A series
Model/Option
U8201A
Description
Additional Information
Combo Test Lead Kit
Couple of test leads, test probes, alligator clips, SMT
grabbers, fine-tips test probes, and banana plugs, CAT III
1000 V, 15 A maximum
Two kits are required for the 4-wire connections.
11059A
Kelvin Probe Set
This kelvin probe set consists of two gold-plated flat
tweezers with special gripping surfaces. This design
assures a very precise contact to the component and very
precise measurements. The ground guard connector
removes ground-related errors.
• Maximum voltage : 42 V
• Termination : 5 signal banana plugs (4-wire
measurement plus ground)
• Cable Length : 0.8 m (31.5 inches)
2-2
Agilent B2900A Configuration and Connection Guide, Edition 1
B2900A Accessories
Cables
Table 2-2
Model/Option
BNC cables for the Agilent B2900A series
Description
16493B-001
Coaxial Cable, BNC(m) to BNC(m), 1.5 m
16493B-002
Coaxial Cable, BNC(m) to BNC(m), 3.0 m
Additional Information
The maximum voltage is 40 V, and Maximum current is 200 mA. The Agilent
16493B Coaxial Cable is designed for use with VSU (Voltage Source Unit), VMU
(Voltage Measurement Unit) or PGU (Pulse Generator Unit) on the Agilent 4155
series Semiconductor Parameter Analyzer.
16493U-001
High current coaxial cable, BNC(m) to BNC(m), 1.5 m
16493U-002
High current coaxial cable, BNC(m) to BNC(m), 3.0 m
The maximum current is 40 A. The 16493U High current coaxial cable is
designed for use with HCSMU (High Current SMU) Module on the Agilent
B1505A Power Device Analyzer/Curve Tracer.
WARNING
Potentially hazardous voltages, up to ±250 V are present at the Force, Sense, and
Guard terminals.
To prevent electrical shock, do not expose these lines.
WARNING
Potentially hazardous voltages of up to ±250 V may be present at the Low Force and
Low Sense terminals also. To prevent electrical shock, use the accessories comply with
the IEC 61010-2-031. The terminals and the extended conductors must be isolated by
using the insulation cap, sleeve, and such.
WARNING
Before turning the B2900A on, connect the Intlk terminal to a switch that turns off
when the shielding box access door is opened.
Before you touch any connections to these terminals, turn the B2900A off, disconnect
the power cable, and discharge any capacitors.
CAUTION
The 16493B Coaxial Cable is designed for use with VSU (Voltage Source Unit), VMU (Voltage
Measurement Unit) or PGU (Pulse Generator Unit) on the Agilent 4155/4156 series. (40 V/200 mA).
For the safety reason, Agilent do NOT recommend to use any BNC type cables which have common
potential on the connector.
CAUTION
Never connect the Guard terminal on the B2900A to any output, including circuit common, chassis
ground, or any other guard terminal. Doing so will damage the SMU.
NOTE
Do not put any conductor on the Low Force and Low Sense terminals of each SMU channels, outer
conductor of the coaxial connectors, Putting conductor of circuit common, chassis ground, or any
potential on causes the measurement error.
Agilent B2900A Configuration and Connection Guide, Edition 1
2- 3
B2900A Accessories
Cables
Table 2-3
Triaxial cables for the Agilent B2900A series
Model/Option
Description
16494A-001
Triaxial Cable, 1.5 m
16494A-002
Triaxial Cable, 3 m
16494A-003
Triaxial Cable, 80 cm
16494A-004
Triaxial Cable, 40 cm
16494A-005
Triaxial Cable, 4 m
Additional Information
CAUTION
The maximum current rating of the 16494A Triaxial cable is 1A. Do not use the triaxial cable with
over 1A. For higher current beyond 1A, It is recommended that U8201A or 11059A with 4-wire
connections.
NOTE
For the lower current measurement, use the 16494A Triaxial cable with low-noise environment. This
cable can maximize the guard effects and minimize the impression of the external noise.
2-4
Agilent B2900A Configuration and Connection Guide, Edition 1
B2900A Accessories
Adapters & Connectors
2.2 Adapters & Connectors
For connecting a DUT, you can choose the connection type 2-wire connection or 4-wire
connections. If you want to simplify the connections, use the 2-wire connections by
connecting the Force terminals only. Then open the Sense terminals. The Force terminals
can be used to apply and measure dc voltage or current.
To make the 4-wire connections, remote sensing, well known as Kelvin connections, uses
both Force and Sense terminals. Connecting the Force and Sense lines together at the
terminal of the DUT minimizes the measurement error caused by the residual resistance of
the test leads or cables. This connection is effective for the low resistance measurement and
the high current measurement.
Before connecting to a DUT, specify suitable connection method on the B2900A series and
select required adapters.
Figure 2-1
B2900A Front Terminals
High Sense, for 4-wire connection
High Force
Guard
Chassis ground
Low Force
Low Sense, for 4-wire connection
Figure 2-2
Simplified SMU Circuit Diagram
2-wire connection
+
-V
+A -
High Force
Low Force
Chassis ground
4-wire connection
+A +
-V
High Force
High Sense
Low Sense
Low Force
Chassis ground
Agilent B2900A Configuration and Connection Guide, Edition 1
2- 5
B2900A Accessories
Adapters & Connectors
NOTE
The following table shows the adapter information provided by Agilent. If you need and adapter
which is not provided, contact a local parts vendor.
Table 2-4
Item number information for adapters used with B2900A series
Model/Option
Description
1253-7217
Plug-Banana Double (black)
1251-2277
Adapter-Banana BNC Jack Plug
N1294A-001
Banana to Triaxial adapter for 2 wire (non-kelvin)
connection
N1294A-002
Banana to Triaxial adapter for 4 wire (kelvin) connection
WARNING
There are potentially hazardous voltages (210 V) present at the High Force, High
Sense, and Guard terminals of Agilent B2900A. To prevent electrical shock, the
following safety precautions must be observed during the use of the B2900A.
•
Use a three-conductor AC power code to connect the cabinet (if used) and the
B2900A to an electrical ground (safety ground).
•
If you do not use the Agilent 16442B Test fixture, you must install and connect
an interlock circuit that opens the interlock terminal when the shielding box
access door is opened.
•
Confirm periodically that the interlock function works normally.
•
Before touching the connections on the High Force, High Sense, and Guard
terminals, turn the B2900 off and discharge any capacitors. If you do not turn
the B2900 off, complete all of the following items, regardless of the B2900
settings on firm periodically that the interlock function works normally.
•
2-6
Additional Information
•
Press the On/Off key, and confirm that the key turns off.
•
Confirm that the On/Off key does not turn red.
•
Open the shielding box access door (open the interlock terminal).
•
Discharge any capacitors connected to a channel.
Warn persons working around the B2900A about dangerous conditions.
Agilent B2900A Configuration and Connection Guide, Edition 1
B2900A Accessories
Adapters & Connectors
CAUTION
Maximum voltage and current
The test fixture and adapters must be used under the following limitations to prevent damage to them.
Agilent N1294A-001 and 002 Banana to Triax adapter:
±250 V maximum, ±42 V maximum for connecting N1295A Small test fixture.
Agilent N1295A Small Test Fixture: ±42 V, 1.05 A maximum
Figure 2-3
Connection Diagram of N1294A-001 Banana to Triaxial adapter for 2 wire
(non-kelvin) connection
Figure 2-4
Connection Diagram of N1294A-002 Banana to Triaxial adapter for 4 wire (kelvin)
connection
Agilent B2900A Configuration and Connection Guide, Edition 1
2- 7
B2900A Accessories
Test Fixture
2.3 Test Fixture
The Agilent offers the following 3 types of test fixture. Each Test fixture have the
specification for maximum voltage and current. For details, refer to the each technical
document or user’s guide.
•
N1295A Device/component Test Fixture - has four triaxial connectors for four
terminal devices as maximum.
•
U2941A Parametric Test Fixture - has three BNC input channels and a common
ground. You can select different types of socket modules for device-under-test (DUTs)
of various pin conjunctions.
•
16442B Test Fixture - designed for testing packaged device and electronic
components. You can mount the suitable socket module on the 16442B, which allows
you to easily connect various devices to measurement units.
2.3.1 N1295A Device/component Test Fixture
The Agilent N1295A is a test fixture which has four triaxial connectors which allows to
make two 2-wire connections or the 4-wire connections. To connect to the B2900A,
16494A Triaxial cables and either N1294A-001 or 002 banana to triaxial adapter are
required.
Table 2-5
N1295A Device/component Test Fixture for the Agilent B2900A series
Model/Option
N1295A
Description
Additional Information
Device/component Test Fixture
The N1295A test fixture furnishes with pin clip wire 4 ea.
and pin plug wire 2 ea.
CAUTION
Maximum voltage and current
The test fixture and adapters must be used under the following limitations to prevent damage to them.
Agilent N1294A-001 and 002 Banana to Triax adapter:
±250 V maximum, ±42 V maximum for connecting N1295A Small test fixture.
Agilent N1295A Small Test Fixture: ±42 V, 1.05 A maximum
NOTE
Shielding
The N1295A is quipped with the lid. To minimize the affect of ambient noise, close the lid when
performing the measurement.
2-8
Agilent B2900A Configuration and Connection Guide, Edition 1
B2900A Accessories
Test Fixture
2.3.2 U2941A Test Fixture
The Agilent U2941A test fixture is designed for semiconductor device testing and has three
BNC type input channels and a common guard. You can select different types of socket
modules for devices-under-test (DUTs) of various pin conjunctions.
To connect to the B2900A, 1253-7217 Plug-Banana Double (black) is required.
Table 2-6
U2941A Parametric Test Fixture
Model/Option
U2941A
Description
Additional Information
Parametric Test Fixture
The following items are shipped as standard with the
U2941A parametric test fixture.
•
•
•
•
•
•
•
•
•
•
•
•
•
•
U2941A-107
Assembly PTFE plate
28-pin dual-in-package (DIP) socket module
0.1-inch universal socket module
0.075-inch universal socket module
0.5-inch universal socket module
Pin plug-to-pin plug cables, black (4 pcs)
Pin plug-to-pin plug cables, red (4 pcs)
Pin plug-to-pin plug cables, blue (4 pcs)
Pin plug-to-miniature clip cables, black (4 pcs)
Pin plug-to-miniature clip cables, red (4 pcs)
Pin plug-to-miniature clip cables, blue (4 pcs)
PCB jumper pin
BNC to two-wire cable, 1m (3 pcs)
CD-ROM for Agilent Parametric Measurement
Manager
BNC to two-wire cable (1 m)
(U2941-61601)
CAUTION
The U2941A includes three BNC to
two-wire cables. If you need
additional cables, select this option.
Maximum voltage and current
The test fixture and adapters must be used under the following limitations to prevent damage to them.
Agilent U2941A Parametric test fixture:
±60 V, 1 A maximum
NOTE
Shielding
The U2941A is quipped with the lid. To minimize the affect of ambient noise, close the lid when
performing the measurement.
NOTE
Ensure that no voltage or current is applied to the U2941A when attaching the socket module.
Agilent B2900A Configuration and Connection Guide, Edition 1
2- 9
B2900A Accessories
Test Fixture
2.3.3 16442B Test Fixture
The Agilent 16442B test fixture is designed for testing packaged devices and electronic
components. You can mount the suitable socket module on the 16442B, which allows you
to easily connect various devices to measurement units.
The 16442B has the following input ports.
• 6 SMU channels (Triaxial connector. It can be used either for 6 non-Kelvin or 3 Kelvin
connectors.)
• 2 VSU channels (BNC connector)
• 2 VMU channels (BNC connector)
• 2 PGU channels (BNC connector)
• 1 GNDU channel (Triaxial connector. It requires the Agilent 16493L GNDU cable.)
• 1 interlock 6-pin connector
Table 2-7
16442B Test Fixture
Model/Option
16442B
Description
Additional Information
Test Fixture for Semiconductor Devices
The following items are shipped as standard with the
16442B test fixture.
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
16442B-010
Blank PTFE board
28-pin dual-in-package (DIP) socket module
0.075-inch universal socket module
0.5-inch universal socket module
Miniature banana to pin plug cables, black (4 pcs)
Miniature banana to pin plug cables, red (4 pcs)
Miniature banana to pin plug cables, blue (4 pcs)
Pin plug to pin plug cables, black (3 pcs)
Pin plug to pin plug cables, red (3 pcs)
Pin plug to pin plug cables, blue (3 pcs)
Miniature banana to miniature clip cables, black (3 pcs)
Miniature banana to miniature clip cables, red (3 pcs)
Miniature banana to miniature clip cables, blue(3 pcs)
Miniature banana to miniature banana, black (3 pcs)
Miniature banana to miniature banana, red (3 pcs)
Miniature banana to miniature banana, blue(3 pcs)
Connection pin set (10 ea)
Accessory case
Add four 1.5 m Triaxial cables
(16494A-001)
16442B-011
(16494A-002)
NOTE
2-10
Add four 3.0 m Triaxial cables
If triaxial cables are required, select
either 16442B-001 or 16442B-011.
To connect to the B2900A series,
N1294A-001 or 002 Banana to
Triaxial adapter is required.
When the Digital I/O interlock terminal is open, the B2900A cannot apply high voltage over ±42 V.
To Perform the high voltage measurement, the B2900A must be connected to the interlock circuit
installed in the 16442B.
Agilent B2900A Configuration and Connection Guide, Edition 1
B2900A Accessories
Other I/F and Interlock
2.4 Other I/F and Interlock
2.4.1 Rear Panel
The Agilent B2900A rear panel provides various interfaces. GPIB, USB2.0 and Ethernet
(LAN) are used for controlling the B2900A remotely with or without programming. The
D-sub 25 pin digital I/O port is general purpose interface. It provides various capabilities
used for external control such as trigger input/output, interlock control and handler control
signals. It supports to build up a system configured from multiple instruments.
The B2900A has the following Interfaces.
•
GPIB Interface
•
USB-B Interface
•
Digital I/O (D-sub 25 pin)
•
Ethernet (10/100 Bast-T LAN)
•
Channel 2 terminal (B2902A and B2912A only)
CAUTION
Never connect the Guard terminal to any output, including circuit common, chassis
ground, or any other guard terminal. Doing so will damage the B2900A.
CAUTION
Maximum current to the chassis ground terminal is 3 A DC.
NOTE
Serial Number
You need the instrument’s serial number when using the Agilent Technologies telephone
assistance program. The serial number label is attached to the bottom of the instrument.
Figure 2-5
B2912A (2-channel model) Rear View
Agilent B2900A Configuration and Connection Guide, Edition 1
2- 11
B2900A Accessories
Other I/F and Interlock
Figure 2-6
Remote control of B2912A by external PC (through USB/LAN/GPIB)
Table 2-8
Item number information for related accessories used with B2900A series
Model/Option
Description
10833A
GBIB cable, 1 m
10833B
GBIB cable, 2 m
10833C
GBIB cable, 4 m
10833D
GBIB cable, 0.5 m
16493G-001
Digital I/O connection cable, 1.5 m
16493G-002
Digital I/O connection cable, 3.0 m
N1294A-011
Interlock cable for 16442B Test Fixture, 1.5 m
N1294A-012
Interlock cable for 16442B Test Fixture, 3.0 m
WARNING
2-12
Additional Information
Potentially hazard voltages of up to  210 V may be present at the High Force, High
Sense, and Guard terminals when the 16442B test fixture lid is closed. To prevent
electrical shock, do not expose these lines.
Agilent B2900A Configuration and Connection Guide, Edition 1
B2900A Accessories
Other I/F and Interlock
2.4.2 Program and Interface Capabilities
Programming Language
The B2900A series supports SCPI (Standard Commands for Programmable Instruments).
•
Default command set: Supports all of the advanced features of the B2900A series
•
Conventional command set: Support industry standard conventional SCPI command
set for basic compatibility.
Program Memory
Program memory allows you to store long strings of SCPI command lines once into the
B2900A series’ volatile memory and then recall those strings multiple times while the
program is executing using a single SCPI command. By storing the command strings in
memory, the time that would have been spent sending those same commands over a
communication bus is eliminated. For tests that utilize lots of repeated code (such as
subroutines), program memory can dramatically reduce test times.
•
Maximum number of characters of program name: 32 with alphabets, numbers,
hyphens, and underscores
•
Maximum memory size: 100 kB (2500 lines typical)
LXI
LXI Class-C compliant. The B2900A series follows specified LAN protocols and adhere to
LXI requirements such as a built-in Web control server and IVI-COM driver.
•
Ethernet: 10/100Base-T
•
USB2.0: USB-TMC488 protocol (rear 1)
•
GPIB: IEEE-488.2 compliant
USB File System
USB 2.0 high-speed mass storage (MSC) class device (front 1)
Digital I/O Interface
DSUB 25 pin female connector for general purpose I/O (GPIO). Can be used for the trigger
input/output terminals or an interface to a handler and so on.
•
Connector: 25-pin female D
•
Input/output pins: 14 open drain I/O bits
•
Absolute maximum input voltage: 5.25 V
•
Absolute minimum input voltage: -0.25 V
•
Maximum logic low input voltage: 0.8 V
•
Maximum logic high input voltage: 2.0 V
•
Maximum source current: 1 mA, Vout = 0 V
•
Maximum sink current: 50 mA, Vout = 5 V
Agilent B2900A Configuration and Connection Guide, Edition 1
2- 13
B2900A Accessories
Other I/F and Interlock
•
5 V power supply pin:
Limited to 600 mA, solid state fuse protected
•
Safety interlock pin:
One active high pin and one active low pin. Activation of both pin enables output
voltage > 42 V.
2.4.3 Installing the Interlock Circuit
The B2900A cannot apply high voltage over ± 42 V when the Digital I/O interlock
terminal is open. To perform high voltage measurement, the B2900 interlock terminal must
be connected to the interlock circuit installed in the measurement environment such as the
shielding box. The interlock circuit is important and necessary to prevent electrical shock
when an user touches the measurement terminals.
Pin 16 and 24 are reserved for the interlock function. If the terminals are open, the
instrument output is limited to ± 42 V. Be sure to connect the terminals to the Agilent
16442B test fixture or another DUT interface before performing measurement. If you do
not use the 16442B, you need to install an interlock circuit as shown in Figure 2-7.
Please refer to the “Installing the Interlock Circuit” in the Agilent B2900A Series User's
Guide for the details.
Figure 2-7
An example of Interlock Circuit
Shielding box
D-sub connector
LED
Negative or
24, 25
24
15, 19
16, 17
15, 19
Access door
Interlock circuit
2-14
14
14
Mechanical switches
17, 18
16
Positive
Dsub cable
22, 23
B2900
Digital I/O
Agilent B2900A Configuration and Connection Guide, Edition 1
B2900A Accessories
Rack Installation
2.5 Rack Installation
Agilent B2900A series can be mounted in a 19-inch EIA rack cabinet. It is designed to fit
in two rack-units (2U) of space.
Remove the handle and the front and rear rubber bumpers before rack mounting the
B2900A. Do not block the air intake at the sides and the exhaust at the rear of the B2900A.
1. To Remove the Bumper
Stretch a corner of the rubber bumper and slide it off.
2. To Remove the Handle
a. Grasp the handle by the sides and pull outward. This allows you to rotate it.
b. Rotate the handle to a vertical position. Then put the instrument horizontally.
c. Pull outward and then lift the handle upward.
c
a
a
b
CAUTION
To put the handle back again, be careful about its direction. Putting it in the wrong
direction may damage it.
3. Attach Rack mount kit. Be sure to use the support rails in the rack cabinet.
To rack mount a single instrument, Order an option 1CM on the B2900A series or the
Agilent 34190A Rack mount Kit (5063-9240).
To rack mount two instruments side-by-side, order the Agilent 34194A Dual lock-link
kit (5061-8769) and the 34191A 2U Dual flange kit (5063-9212).
CAUTION
In order to prevent overheating, do not block the flow of air into or out of the instrument.
Be sure to allow enough clearance at the rear, sides, and bottom of the instrument to permit
adequate internal air flow.
Agilent B2900A Configuration and Connection Guide, Edition 1
2- 15
B2900A Accessories
Rack Installation
2-16
Agilent B2900A Configuration and Connection Guide, Edition 1
3
Connection
Connection
Connecting to a DUT
3.1 Connecting to a DUT
This section describes how to connect a device under test (DUT) to the Agilent B2900A
series.
3.1.1 “2-wire connections” or “4-wire connections”
For connecting a DUT, you can choose the connection type 2-wire connections or 4-wire
connections.
If you want to simplify the connection, use the 2-wire connections by connecting the Force
terminals only. Then open the Sense terminals. The force terminals can be used to apply
and measure dc voltage or current.
For the low resistance measurement and the high current measurement, use the 4-wire
connections. To make the 4-wire connections, remote sensing, well known as the Kelvin
connections, use both Force and Sense terminals. Connecting the Force and Sense lines
together at the terminal of the DUT minimizes the measurement error caused by the
residual resistance of the test leads or cables.
Figure 3-1
2-wire and 4-wire connections
High Sense
High Force
High Force
SMU
DUT
Low Force
SMU
DUT
Low Force
Low Sense
4-Wire
2-Wire
NOTE
Kelvin connections (4-wire) give good measurement results when you force high-current, The
following figure shows the equivalent circuits for Kelvin and non-Kelvin connections.
Figure 3-2
Residual resistance on the Resistance measurement
R DUT
rF1
R DUT
rF2
V
rF2
rS1 rS2
V
(a) non-Kelvin connection
3- 2
rF1
V
(b) Kelvin connection
Agilent B2900A Configuration and Connection Guide, Edition 1
Connection
Connecting to a DUT
3.1.2 Floating
In the default setting, the Low Force and Low Sense terminals are connected to the chassis
ground. However, they can be disconnected from the ground fro the floating
measurements.
This setup is effective for differential voltage measurements which usually require two
channels as shown in the Grounded 2 connection.
Figure 3-3
Grounded and Floating measurement
High Force
High Force
High Force
SMU
Low Force
SMU
DUT
High Force
DUT
Low Force
SMU
DUT
Low Force
SMU
Low Force
Grounded 1
Grounded 2
Floating
CAUTION
Maximum current to the chassis ground is 3 A DC.
WARNING
Potentially hazardous voltages of up to ±210 V may be present at the Low Force and
Low Sense terminals. To prevent electrical shock, use the accessories comply with the
ICE 61010-20-031. The terminals and the extended conductors must be isolated by
using the insulation cap, sleeve, etc.
3.1.3 To use Test Leads
Type of the B2900A source/measure terminals is the banana jack. For connecting a DUT,
the U8201A Combo Test Lead Kit or the 11059A Kelvin Probe Set is available. The
following Figure shows the connections for the two-terminal device measurements.
Figure 3-4
Connecting a Two-Terminal Device
High Sense
High Force
High Force
DUT
DUT
Low Force
Low Force
Low Sense
2-wire connections
4-wire connections
Agilent B2900A Configuration and Connection Guide, Edition 1
3- 3
Connection
Connection with Test Fixture
3.2 Connection with Test Fixture
This section describes how to connect with Test Fixture to the Agilent B2900A
source/measure terminals. For details of each fixture, refer to the user’s guide of each test
fixtures also.
3.2.1 To use N1295A Test Fixture
The Agilent N1295A is a test fixture which has four triaxial connectors which supports
2-wire connections. To connect the N1295A to the B2900A source/measure terminals, the
Agilent N1294A-001 banana to triaxial adapter for the 2-wire connection is required.
•
Connection example for two terminals device
To connect to the N1295A test fixture for the device of two terminals, two 16494A
Triaxial cables are required.
Figure 3-5
Agilent N1295A connection example for the device with two terminals
1
Low Force
2
4
3
DUT
1
4
2
3
High Force
± 42V 1.05 A Max
•
Connection example for three terminals device by 2 channels of SMU
To connect to the N1295A test fixture for the device of three terminals such as Bipolar
Junction Transistor (BJT), four 16494A Triaxial cables are required.
Figure 3-6
3- 4
Connection circuit for BJT (NPN) by 2 channels of SMU
Agilent B2900A Configuration and Connection Guide, Edition 1
Connection
Connection with Test Fixture
Figure 3-7
Agilent N1295A connection example for the BJT (NPN) by 2 channels of SMU
Low Force ch 1
Low Force ch 2
High Force ch 1
High Force ch 2
Emitter
Collector
CAUTION
Base
Maximum voltage and current
The test fixture and adapters must be used under the following limitations to prevent damage to them.
Agilent N1294A-001 Banana to Triax adapter:
±250 V maximum, ±42 V maximum for connecting N1295A Small test fixture.
Agilent N1295A Small Test Fixture: ±42 V, 1.05 A maximum
NOTE
Shielding
The N1295A is quipped with the lid. To minimize the affect of ambient noise, close the lid when
performing the measurement.
NOTE
4-wire connections are not supported on the N1295A and B2900A.
Agilent B2900A Configuration and Connection Guide, Edition 1
3- 5
Connection
Connection with Test Fixture
3.2.2 To use U2941A Test Fixture
The Agilent U2941A test fixture is designed for semiconductor device testing and has three
BNC type input channels and a common guard. You can select different types of socket
modules for devices-under-test (DUTs) of various pin conjunctions. See Agilent U2941A
Parametric Test Fixture Operating Guide for details and accessories of the U2941A.
To connect to the B2900A source/measure terminals, 1253-7217 Plug-Banana Double
(black) is required.
•
Connection example for 2-wire Connections
To connect to the U2941A test fixture for 2-wire connections, one BNC to two-wire
cable (U2941-61601) and one Plug-Banana Double adapter (1253-7217) are required.
Attach the plug-banana double adapter to High Force and Low Force terminals on the
B2900A Channel 1 terminal.
Figure 3-8
Agilent U2941A connection example for 2-wire connections
B2900A
Channel 1
High
Sense
High
Force
1253-7217
Plug-Banana Double (Black)
U2941A
Input Port 1
BNC male inner contact (RED)
Guard
Output +
Low
Sense
Low
Force
Sense +
U2941-61601
BNC to two-wire cable
Chassis
Ground
Guard
GND
Output -
BNC male outer contact (BLACK)
Sense -
Figure 3-9
U2941A Wiring Panel
+
Output
Guard
Sense
1
-
+
Output
Output
Sense
Sense
Guard
-
+
Force
Output
Guard
Sense
2
SMU(± 60V= 1A Max)
Guard
Output
Sense
3
DUT
2-wire connections
3- 6
Agilent B2900A Configuration and Connection Guide, Edition 1
Connection
Connection with Test Fixture
•
Connection example for 4-wire Connections
To connect to the U2941A test fixture for 4-wire connections, two BNC to two-wire
cable (U2941-61601) and two Plug-Banana Double adapter (1253-7217) are required.
Attach the plug-banana double adapters to the B2900A source/measure terminals (High
Force, Low Force, Low Force and Low Sense) as shown in the following figure.
Figure 3-10
Agilent U2941A connection example for 4-wire connections
B2900A
Channel 1
1253-7217
Plug-Banana Double (Black)
U2941A
Input Port 1
BNC male inner contact (RED)
High
Force
Output +
High
Sense
Sense +
Guard
BNC male outer contact (BLACK)
Guard
GND
Output Sense -
BNC male inner
contact (RED)
Low
Force
Chassis
Ground
U2941-61601
BNC to two-wire cable
Low
Sense
BNC male outer contact (BLACK)
Figure 3-11
U2941A Wiring Panel
+
Output
Guard
Sense
1
-
+
Output
Output
Sense
Sense
Guard
-
+
Force
Output
Guard
Sense
2
SMU(± 60V= 1A Max)
Guard
Output
Sense
3
DUT
4-wire connections
WARNING
Dangerous voltage of up to the maximum voltage of SMUs may be present at force,
guard and sense terminals if the Interlock terminal is closed.
WARNING
To avoid electrical shock and instrument damage, do not connect or disconnect
measurement cable during operation.
Agilent B2900A Configuration and Connection Guide, Edition 1
3- 7
Connection
Connection with Test Fixture
3.2.3 To use 16442B Test Fixture
The Agilent 16442B test fixture is designed for testing packaged devices and electronic
components. The 16442B has six triaxial connectors for source/measure unit (SMU), the
GNDU connector for the ground unit of a parameter/device analyzer, the Interlock
connector for the interlock control, and six coaxial (BNC type) connectors for other
instruments. You can mount the suitable socket module on the 16442B, which allows you
to easily connect various devices to measurement units. See Agilent 16442B Test Fixture
User’s Guide for details and accessories of the 16442B.
To connect to the B2900A source/measure terminals, N1294A-001 or 002 Banana to
Triaxial adapter is required.
•
Connection example for 2-wire Connections
To connect to the 16442B test fixture for 2-wire connections, N1294A-001 banana to
triaxial adapter for 2 wire (non-kelvin) connection and two 16494A triaxial cables are
required.
Attach the banana to triaxial adapter to the B2900A source/measure terminals.
Connect the triaxial cables between the adapter and the 16442B as shown in the
following figure.
Figure 3-12
Agilent 16442B connection example for 2-wire connections
Low Force
N1294A-001 Adapter
for the 2-wire connections
High Force
N1294A-011 or 012
Interlock cable for 16442B
1
1
1
Low Force
to SMU 2
2
2
VSU
GNDU
High Force
to SMU 1
2
1
3
2
4
VMU
3
1
5
16494A Triaxial Cable
Figure 3-13
PGU
SMU
Interlock
2
6
16442B Test Fixture
16442B Wiring Panel (2-wire connections)
SMU(±200V= 1A Max)
1
2
3 (Selected)
Force
Sense
Force
Sense
Force
Sense
Guard
Guard
Guard
Guard
Guard
Guard
DUT
2-wire connections
3- 8
Agilent B2900A Configuration and Connection Guide, Edition 1
Connection
Connection with Test Fixture
•
Connection example for 4-wire Connections
To connect to the 16442B test fixture for 4-wire connections, N1294A-002 banana to
triaxial adapter for 4 wire (kelvin) connection and three 16494A triaxial cables are
required.
Attach the banana to triaxial adapter to the B2900A source/measure terminals.
Connect the triaxial cables between the adapter and the 16442B as shown in the
following figure.
Figure 3-14
Agilent 16442B connection example for 4-wire connections
High Sense
N1294A-002 Adapter
for the 4-wire connections
High Force
N1294A-011 or 012
Interlock cable for 16442B
Interlock
1
1
2
2
1
Low Force/Low Sense
to GNDU
VSU
GNDU
2
1
2
4
3
VMU
High Sense
to SMU 2
3
1
High Force
to SMU 1
16494A Triaxial Cable
2
6
5
Figure 3-15
PGU
SMU
Low Force/
Low Sense
16442B Test Fixture
16442B Wiring Panel (4-wire connections)
GNDU
SMU(±200V= 1A Max)
1
2
3 (Selected)
Force
Sense
Force
Sense
Force
Sense
Force
Guard
Guard
Guard
Guard
Guard
Guard
Sense
DUT
4-wire connections
Agilent B2900A Configuration and Connection Guide, Edition 1
3- 9
Connection
Connection with Test Fixture
•
Connection example for three terminals device by 2 channels of SMU
To connect to the 16442B test fixture for three terminals device by 2 channels of SMU,
two sets of N1294A-001 banana to triaxial adapter for 2 wire (non-kelvin) connection
and four 16494A triaxial cables are required.
Attach the banana to triaxial adapter to the B2900A source/measure terminals.
Connect the triaxial cables between the adapter and the 16442B as shown in the
following figure.
Figure 3-16
Agilent 16442B connection example for three terminals device by 2 SMUs
Low Force (Ch 1) to SMU 2
High Force (Ch 1) to SMU 1
Channel 1
Interlock
1
1
N1294A-011 or 012
Interlock cable for 16442B
Channel 2
PGU
SMU
16494A Triaxial Cable
1
VSU
GNDU
2
1
3
Low Force (Ch 2) to SMU 4
VMU
1
5
Figure 3-17
2
4
3
N1294A-001 Adapter
for the 2-wire connections
2
2
2
6
High Force (Ch 2) to SMU 3
16442B Test Fixture
16442B Wiring Panel (BJT (NPN) by 2 channels of SMU)
SMU(±200V= 1A Max)
1
2
3 (Selected)
Force
Sense
Force
Sense
Force
Sense
Guard
Guard
Guard
Guard
Guard
Guard
Collector
Emitter
Base
Connections for BJT (NPN)
CAUTION
Maximum voltage and current
The test fixture and adapters must be used under the following limitations to prevent damage to them.
Agilent N1294A-001 and 002 Banana to Triax adapter:
±250 V maximum, ±200 V maximum for connecting 16442B test fixture.
Agilent 16442B Test Fixture: ±200 V, 1 A maximum for SMU input
3- 10
Agilent B2900A Configuration and Connection Guide, Edition 1
Connection
Connection with Test Fixture
NOTE
Shielding
The 16442B is quipped with the lid. To minimize the affect of ambient noise, close the lid when
performing the measurement.
NOTE
Performing high voltage measurement
When the Digital I/O interlock terminal is open, the B2900A cannot apply high voltage over ±42 V.
To perform the high voltage measurement, the B2900A must be connected to the interlock circuit
installed in the 16442B.
Prepare the N1294A-011 or 012 interlock cable. And connect it between the B2900A Digital I/O
connector and the 16442B Interlock connector. The B2900A can apply the high voltage when the test
fixture lid is closed.
WARNING
Potentially hazardous voltages of up to ±210 V may be present at the High Force,
High Sense, and Guard terminals when the 16442B test fixture lid is closed. To
prevent electrical shock, do not expose these lines.
Agilent B2900A Configuration and Connection Guide, Edition 1
3- 11
Connection
Connection with Prober
3.3 Connection with Prober
This section describes information on how to connect a prober to the B2900A series
Precision Source / Measure Unit.
3.3.1 Connecting to Manual Prober
High Force and Low Force terminal on the N1294A-001 banana to triaxial adapter for
2-wire have FORCE (SENSE), GUARD, and COMMON output as shown Figure 3-18.
High Force and High Sense on the he N1294A-002 banana to triaxial adapter for 4-wire
also have same output terminals as shown Figure 3-18. However, Low Force and Low
Sense of the N1294A-002 banana to triaxial adapter for 4-wire have SENSE, FORCE, and
COMMON as shown in Figure 3-19.
Figure 3-18
High Force, High Sense and Low Force of N1294A-001
Figure 3-19
Low Force & Low Sense terminals on the N1294A-002
2-wire (Non-Kelvin) connection
These instructions apply when all connections are 2-wire (non-Kelvin) connection for
wafer prober. Connect the Agilent 16494A triaxial cables between the N1294A-001
banana to triaxial adapter for 2-wire on the B2900A and the Connector plate. Connect the
triaxial connector on the probe cable as shown in Figure 3-20.
Figure 3-20
Example of 2-wire (non-Kelvin) connection
Shielding box
N1294A
Low Force
Probe cable (triaxial)
Prober
High Force
Triaxial cable
16494A-001 1.5m
or
16494A-002 3.0m
3- 12
DUT
Connector plate
Agilent B2900A Configuration and Connection Guide, Edition 1
Connection
Connection with Prober
4-wire (Kelvin) connection for High Force and High Sense
These instructions apply when all connections are Kelvin. Two probes must contact the
wafer in this connection. Connect two Agilent 16494A triaxial cables between the High
Force and High Sense Terminals on the N1294A-002 banana to triaxial adapter for 4-wire
and the connector plate. Connect the FORCE and SENSE lines to probes separately.
Connect the triaxial connector on the probe cable as shown in Figure 3-21.
NOTE
To prevent oscillations, use triaxial cables as short as possible, if two 16494A triaxial cables with
Kelvin connections are used.
Figure 3-21
Example of 4-wire (Kelvin) connection for High Force and High Sense
Shielding box
N1294A-002
Low Force/Low Sense
High Force
Probe cable (triaxial)
Prober
Probe cable (triaxial)
High Sense
Triaxial cable
16494A-001 1.5m
or
16494A-002 3.0m
DUT
Connector plate
4-wire (Kelvin) connection for Low Force and Low Sense
Connect the triaxial connector using an adapter for GNDU (N1254A-107) as shown in
Figure 3-22. This adapter connects Force Terminal and Sense Terminal to the center
conductor. For parts information for this connection, see Table 3-1.
Figure 3-22
Example of 4-wire (Kelvin) connection for Low Force and Low Sense
Shielding box
Triaxial cable
16494A-001 1.5m
or
16494A-002 3.0m
Adapter for GNDU
N1254A-107
N1294A-002
Low Force/Low Sense
Probe cable (triaxial)
Prober
High Force
Connector plate
DUT
High Sense
Agilent B2900A Configuration and Connection Guide, Edition 1
3- 13
Connection
Connection with Prober
Item number information for 4-wire (Kelvin) connection for the Low terminal
Table 3-1
Description
Qty
Product Number
Part number
Triaxial Cable (1.5 m) - Max 1.0 A
1
16494A-001
N/A
Triaxial Cable (3.0 m) - Max 1.0 A
1
16494A-002
N/A
Triax (m) to Triax (f) adapter
1
N1254A-107
1250-2654
Kelvin to non-Kelvin connection
These instructions apply when the connections up to the Connector Plate are Kelvin, but
the probe is a non-Kelvin connection. Connect two Agilent 16494A triaxial cables between
the N1294A-002 banana to triaxial adapter for 4-wire and the connector plate. Connect the
triaxial connector on the probe cable as shown in Figure 3-23. Connect the FORCE and
SENSE lines on this side of the probe input terminal. A Tee Triaxial BNC adapter can be
used. For parts information, see Table 3-2.
NOTE
To prevent oscillations, use triaxial cables as short as possible, if two 16494A triaxial cables with
Kelvin connections are used.
NOTE
When connecting the cable and tee connector as shown in Figure 3-23, space restrictions make an
adjacent connector unusable. Since three connectors are necessary for a Kelvin connection a
connector plate must be used. Select the correct connector plate for your application.
Figure 3-23
Example of Kelvin to non-Kelvin connection
Shielding box
N1294A-002
Low Force/
Low Sense
Probe cable (triaxial)
High Force
Tee triaxial BNC
1250-1551
DUT
Triaxial cable
16494A-004 0.4m
High Sense
Triaxial cable
16494A-001 1.5m
or
16494A-002 3.0m
Table 3-2
Prober
Connector plate
Item number information for Kelvin to non-Kelvin connection with B2900A
Description
Qty
Product Number
Part number
Triaxial Cable (1.5 m) - Max 1.0 A
2
16494A-001
N/A
Triaxial Cable (3.0 m) - Max 1.0 A
2
16494A-002
N/A
Triaxial Cable (0.4 m)
1
16494A-004
N/A
Triaxial tee-connector
1
N/A
1250-1551
3- 14
Agilent B2900A Configuration and Connection Guide, Edition 1
Connection
Connection with Prober
3.3.2 To make connection to reduce leakage current
To reduce the leakage current caused by connection cables, the guard technique is
effective. Connect the probing needles to the coaxial cables as shown below:
Guarding reduces the leakage current between the instrument and a DUT. This is important
when you measure low current.
1. Cut and trim end of the coaxial cable so that the center conductor does not touch the
outer conductor (connected to the guard terminal).
2. Connect the center conductor to tail of the probing needle. Never connect the outer
conductor to the probing needle. However, the outer conductor should be extended as
close as possible to the probing needle.
3. Connect the outer conductor to the outer conductor of the probing needle if it is a
coaxial probing needle.
The following example connection can be used to reduce the leakage current. Extend the
outer conductor as close as possible to the probing needle, This is also reduces the induced
noise.
Figure 3-24
Cable and Probing needle
Center conductor
Outer conductor
Coaxial cable
Connector plate
Probing needle
Contact pad
Guarding
Guarding reduces the leakage current between the instrument and the measurement point.
This is important when you measure low current.
The following figure shows the theory of guarding. The buffer amplifier (1) keeps the
potential of the guard conductor at the same potential as the force conductor, so current
does not flow between the force and guard conductors. Therefore, the current measured by
the instrument is same as current at the DUT terminal because no current is leaked.
Figure 3-25
Guarding
A
Guard
Force
DUT
Buffer
Agilent B2900A Configuration and Connection Guide, Edition 1
3- 15
Connection
Connection with Prober
3.3.3 To make connection to measure low resistance
When you measure a low resistance, high current flows through the DUT. This high current
increases the measurement error caused by the residual resistance of cables. To cancel the
effect of this resistance, you can use Kelvin connections (4-wire), which means the Force
and Sense lines are extended separately to the DUT.
Connect the probing needles to the coaxial cables as shown below:
1. Cut and trim end of the coaxial cable so that the center conductor does not touch the
outer conductor (connected to the guard terminal).
2. Connect the center conductor to tail of the probing needle. Never connect the outer
conductor to the probing needle. However, the outer conductor should be extended as
close as possible to the probing needle.
3. Connect the outer conductor to the outer conductor of the probing needle if it is a
coaxial probing needle.
4. Perform 1 to 3 for both Force and Sense lines.
5. Contact the probing needles for the Force and Sense lines as close as possible to the
DUT.
The following example connection can be used to measure low resistance. The Sense line
is extended to the probing pad, and contacts the Force line through the pad, so the voltage
drop due to the residual resistance caused by cables and test leads is canceled.
Figure 3-26
Cable and Probing needle
Center conductor
Outer conductor
Force
Probing needle
Sense
Contact pad
Coaxial cable
Connector plate
Contact pad
Kelvin Connection
Kelvin connections give good measurement results when you force high-current. The
following figure shows the equivalent circuits for Kelvin and non-Kelvin connections.
Figure 3-27
Kelvin connection
R DUT
rF1
R DUT
rF2
V
rF2
rS1 rS2
V
(a) non-Kelvin connection
3- 16
rF1
V
(b) Kelvin connection
Agilent B2900A Configuration and Connection Guide, Edition 1
Connection
Connection with Prober
•
For the non-Kelvin connection, the voltmeter measures the voltage drop of resistance
rF1,RDUT, and rF2.
•
For the Kelvin connection, the voltmeter measures the voltage drop of resistance RDUT
only. The impedance of the voltmeter is very high, so the voltage drop of resistances
rS1 and rS2 can be ignored.
The Kelvin connection is effective even when forcing voltage. The voltage drop due to the
residual resistance of the Force line wiring is fed back to the voltage source via a
comparator in the Sense line. The input impedance of comparator is high, and current flow
into the Sense line is very low. So output error is not significant if the Sense line wiring has
a residual resistance of 10  or less. Therefore, the specified voltage appears at the sense
point (point where Sense line contacts Force line).
WARNING
Do not touch the guard terminal with bare hands because you may be shocked by
high voltage. The potential of the guard terminal is equal to the output voltage.
CAUTION
Never connect the Guard terminal to any other output, including circuit common, chassis
ground, or any other guard terminal. Doing so will damage the B2900A.
NOTE
Kelvin connection and non-Kelvin connection
To make the Kelvin connection, use both Force and Sense terminals. Connecting the Force and Sense
lines together at the terminal of the DUT (device under test) minimizes the measurement error caused
by the residual resistance of the connection cables. The Kelvin connection is effective for the low
resistance measurement and the high current measurement.
If you want to simplify the cable connections, use the 2-wire connections by connecting the Force
terminals only. Then open the Sense terminals. This is the non-Kelvin connection. The Force
terminals can be used to force and measure dc voltage or current.
Agilent B2900A Configuration and Connection Guide, Edition 1
3- 17
Connection
Connection with Prober
3- 18
Agilent B2900A Configuration and Connection Guide, Edition 1
4
Ordering Examples
Ordering Examples
Agilent B2900A for Resistance measurement
4.1 Agilent B2900A for Resistance measurement
Making accurate resistance measurements is actually one of the more challenging areas of
measurement science. Many factors can affect the accuracy of a resistance measurement, including
residual test lead resistance, thermal electromotive force and leakage currents in the measurement
path. The B2900A Series possesses a variety of features to address these measurement issues,
including a remote sense function (4-wire connection), offset compensation, and a guard function.
For details, refer to the Technical Overview, Resistance Measurement by B2900A (5990-6633EN).
Table 4-1
Model/Option
Agilent B2901A with basic test leads (2-wire connections)
Quantity
Description
B2901A
1
Precision Source/Measure Unit, 1ch, 100 fA, 210 V, 3 A DC/10.5A pulse
U8201A
1
Combo Test Lead Kit
Table 4-2
Model/Option
Agilent B2901A with basic test leads (4-wire connections)
Quantity
Description
B2901A
1
Precision Source/Measure Unit, 1ch, 100 fA, 210 V, 3 A DC/10.5 A pulse
11059A
1
Kelvin Probe Set
Table 4-3
Model/Option
Agilent B2901A with U2941A Test Fixture (4-wire connections)
Quantity
Description
B2901A
1
Precision Source/Measure Unit, 1ch, 100 fA, 210 V, 3 A DC/10.5 A pulse
1253-7217
2
Plug-Banana Double (black)
U2941A
1
Parametric Test Fixture
Table 4-4
Model/Option
Agilent B2901A with 16442B Test Fixture (4-wire connections)
Quantity
Description
B2901A
1
Precision Source/Measure Unit, 1ch, 100 fA, 210 V, 3 A DC/10.5 A pulse
N1294A-002
1
Banana to Triaxial adapter for 4 wire (kelvin) connection
16442B
1
Test Fixture for Semiconductor Devices
16494A
3
Triaxial Cable
N1294A-011 (012)
1
Interlock cable for 16442B Test Fixture, 1.5 m (3.0 m)
NOTE
4- 2
16494A triaxial cable has several options for cable length. Specify cable option and quantity.
Agilent B2900A Configuration and Connection Guide, Edition 1
Ordering Examples
Agilent B2900A for LED IV Measurement
4.2 Agilent B2900A for LED IV Measurement
The energy efficiencies and durability of light emitting diodes (LEDs) have led to their increased
usage in a variety of applications such as lighting, display panels, etc. This has also spawned research
into new types of LEDs with even higher energy efficiencies and properties tailored for specific
applications. The B2900A Series enables you to make a wide range of current versus voltage (IV)
measurements more accurately and quickly.
Table 4-5
Model/Option
Agilent B2911A with N1295A small test fixture (2-wire connections)
Quantity
Description
B2911A
1
Precision Source/Measure Unit, 1ch, 10 fA, 210 V, 3 A DC/10.5 A pulse
N1294A-001
1
Banana to Triaxial adapter for 2 wire (non-kelvin) connection
N1295A
1
Device/component Test Fixture
16494A
2
Triaxial Cable
Table 4-6
Model/Option
Agilent B2911A with 16442B Test Fixture (2-wire connections)
Quantity
Description
B2911A
1
Precision Source/Measure Unit, 1ch, 10 fA, 210 V, 3 A DC/10.5 A pulse
N1294A-001
1
Banana to Triaxial adapter for 2 wire (non-kelvin) connection
16442B
1
Test Fixture for Semiconductor Devices
16494A
2
Triaxial Cable
Table 4-7
Model/Option
Agilent B2911A and accessories for Manual Prober (2-wire connections)
Quantity
Description
B2911A
1
Precision Source/Measure Unit, 1ch, 10 fA, 210 V, 3 A DC/10.5 A pulse
N1294A-001
1
Banana to Triaxial adapter for 2 wire (non-kelvin) connection
16494A
2
Triaxial Cable
Table 4-8
Model/Option
Agilent B2911A and accessories for Manual Prober (4-wire connections)
Quantity
Description
B2911A
1
Precision Source/Measure Unit, 1ch, 10 fA, 210 V, 3 A DC/10.5 A pulse
N1294A-002
1
Banana to Triaxial adapter for 4 wire (non-kelvin) connection
16494A
3
Triaxial Cable
NOTE
16494A triaxial cable has several options for cable length. Specify cable option and quantity.
Agilent B2900A Configuration and Connection Guide, Edition 1
4- 3
Ordering Examples
Agilent B2900A for LIV Test of Laser Diode
4.3 Agilent B2900A for LIV Test of Laser Diode
The light-current-voltage (LIV) sweep test is a fundamental measurement to determine the operating
characteristics of a laser diode (LD). In the LIV test, current applied to the laser diode is swept and
the intensity of the resulting emitted light is measured using a photo detector (PD).
The B2902A and B2912A have two SMU channels, and each channel possesses accurate IV
measurement capabilities as well as the ability to supply either constant or swept voltage/current. The
B2902A and B2912A excellent choices for laser diode LIV testing.
For details, refer to the Technical Overview, LIV Test of Laser Diode by B2900A (5990-7115EN).
Table 4-9
Model/Option
Agilent B2902A with N1295A small test fixture (2-wire connections)
Quantity
Description
B2902A
1
Precision Source/Measure Unit, 2ch, 100 fA, 210 V, 3 A DC/10.5 A pulse
N1294A-001
2
Banana to Triaxial adapter for 2 wire (non-kelvin) connection
N1295A
1
Device/component Test Fixture
16494A
4
Triaxial Cable
Table 4-10
Model/Option
Agilent B2902A with 16442B Test Fixture (2-wire connections)
Quantity
Description
B2902A
1
Precision Source/Measure Unit, 2ch, 100 fA, 210 V, 3 A DC/10.5 A pulse
N1294A-001
2
Banana to Triaxial adapter for 2 wire (non-kelvin) connection
16442B
1
Test Fixture for Semiconductor Devices
16494A
4
Triaxial Cable
N1294A-011 (012)
1
Interlock cable for 16442B Test Fixture, 1.5 m (3.0 m)
NOTE
4- 4
16494A triaxial cable has several options for cable length. Specify cable option and quantity.
Agilent B2900A Configuration and Connection Guide, Edition 1
Ordering Examples
Agilent B2900A for Diode/LED/OLED/Varistor Test
4.4 Agilent B2900A for Diode/LED/OLED/Varistor
Test
To ensure compliance with manufacturing specifications, single-point pass/fail DC testing must be
performed on packaged devices. Because these tests are also used to identify and remove defective
devices before shipment, their reliability is important to guarantee product quality. In addition, it is
also essential to perform the tests quickly to keep the production throughput high.
The B2900A Series also has many features that make it well-adapted for production test, such as
pass/fail binning, a digital I/O interface for handler control, and code compatibility with standard
single channel SMU products.
Table 4-11
Model/Option
Agilent B2901A and accessories for production test (1 channel)
Quantity
Description
B2901A
1
Precision Source/Measure Unit, 1ch, 100 fA, 210 V, 3 A DC/10.5 A pulse
N1294A-001
1
Banana to Triaxial adapter for 2 wire (non-kelvin) connection
16494A
2
Triaxial Cable
16493G
1
Digital I/O connection cable
Table 4-12
Model/Option
Agilent B2902A and accessories for production test (2 channels)
Quantity
Description
B2902A
1
Precision Source/Measure Unit, 2ch, 100 fA, 210 V, 3 A DC/10.5 A pulse
N1294A-001
2
Banana to Triaxial adapter for 2 wire (non-kelvin) connection
16494A
4
Triaxial Cable
16493G
1
Digital I/O connection cable
NOTE
16494A triaxial cable and 16493G Digital I/O cable have several options for cable length. Specify
cable option and quantity.
Agilent B2900A Configuration and Connection Guide, Edition 1
4- 5
Ordering Examples
Agilent B2900A for Characterization of FET & Bipolar Transistor
4.5 Agilent B2900A for Characterization of FET &
Bipolar Transistor
An SMU combines the capabilities of a current source, a voltage source, a current meter and a
voltage meter along with the capability to switch easily between these various functions into a single
instrument. This gives it the ability to evaluate the IV characteristics of devices across all four
measurement quadrants without the need for any additional equipment. Besides being able to output
and measure voltage or current very accurately, SMUs also possess a compliance feature that allows
a limit to be placed on the voltage or current output to prevent device damage.
Evaluation of FET or bipolar transistor requires applying different voltages and currents with the
constant or the sweep condition to the gate and the drain terminal respectively in order to acquire the
several parameters and characteristics.
Table 4-13
Model/Option
Agilent B2902A with N1295A small test fixture (2-wire connections)
Quantity
Description
B2912A
1
Precision Source/Measure Unit, 2ch, 10 fA, 210 V, 3 A DC/10.5 A pulse
N1294A-001
2
Banana to Triaxial adapter for 2 wire (non-kelvin) connection
N1295A
1
Device/component Test Fixture
16494A
4
Triaxial Cable
Table 4-14
Model/Option
Agilent B2902A with 16442B Test Fixture (2-wire connections)
Quantity
Description
B2912A
1
Precision Source/Measure Unit, 2ch, 10 fA, 210 V, 3 A DC/10.5 A pulse
N1294A-001
2
Banana to Triaxial adapter for 2 wire (non-kelvin) connection
16442B
1
Test Fixture for Semiconductor Devices
16494A
4
Triaxial Cable
N1294A-011 (012)
1
Interlock cable for 16442B Test Fixture, 1.5 m (3.0 m)
Table 4-15
Model/Option
Agilent B2902A with 16442B Test Fixture (4-wire connections for 1 channel)
Quantity
Description
B2912A
1
Precision Source/Measure Unit, 2ch, 10 fA, 210 V, 3 A DC/10.5 A pulse
N1294A-001
1
Banana to Triaxial adapter for 2 wire (non-kelvin) connection
N1294A-002
1
Banana to Triaxial adapter for 4 wire (kelvin) connection
16442B
1
Test Fixture for Semiconductor Devices
16494A
5
Triaxial Cable
N1294A-011 (012)
1
Interlock cable for 16442B Test Fixture, 1.5 m (3.0 m)
4- 6
Agilent B2900A Configuration and Connection Guide, Edition 1
Ordering Examples
Agilent B2900A for Characterization of FET & Bipolar Transistor
Table 4-16
Model/Option
Agilent B2912A and accessories for Manual Prober (2-wire connections)
Quantity
Description
B2912A
1
Precision Source/Measure Unit, 2ch, 10 fA, 210 V, 3 A DC/10.5 A pulse
N1294A-001
2
Banana to Triaxial adapter for 2 wire (non-kelvin) connection
16494A
4
Triaxial Cable
Table 4-17
Model/Option
Agilent B2912A and accessories for Manual Prober (4-wire connections)
Quantity
Description
B2912A
1
Precision Source/Measure Unit, 2ch, 10 fA, 210 V, 3 A DC/10.5 A pulse
N1294A-002
2
Banana to Triaxial adapter for 4 wire (non-kelvin) connection
N1254A-107
2
Triax (m) to Triax (f) adapter. (1250-2654)
16494A
6
Triaxial Cable
NOTE
16494A triaxial cable has several options for cable length. Specify cable option and quantity.
Agilent B2900A Configuration and Connection Guide, Edition 1
4- 7
Ordering Examples
Agilent B2900A for DC Bias to Network Analyzer
4.6 Agilent B2900A for DC Bias to Network Analyzer
The B2900A is the ideal bias source to use with network analyzers for the evaluation of transistor DC
and RF characteristics. The B2900A series supports enhanced trigger functions that enable each step
of a bias sweep it performs to be synchronized with a frequency sweep performed by a network
analyzer.
For details, refer to the Technical Overview, Fast fT-Ic Measurement Using the B2900Aseries
(5990-6895EN).
Table 4-18
Model/Option
Agilent B2902A and accessories for DC Bias to Network Analyzer
Quantity
Description
B2902A
1
Precision Source/Measure Unit, 2ch, 100 fA, 210 V, 3 A DC/10.5 A pulse
1251-2277
2
Adapter-Banana BNC Jack Plug
16493U
2
High current coaxial cable, BNC(m) to BNC(m)
16493G
1
Digital I/O connection cable
NOTE
4- 8
16493U High current coaxial cable and 16493G Digital I/O cable have several options for cable
length. Specify cable option and quantity.
Agilent B2900A Configuration and Connection Guide, Edition 1
Was this manual useful for you? yes no
Thank you for your participation!

* Your assessment is very important for improving the work of artificial intelligence, which forms the content of this project

Download PDF

advertising