Sapphire capacitance diaphragm gauge CAUTION
CP-SP-1351E
CAUTION
Sapphire capacitance diaphragm gauge
User's Manual
Models SPG7A
• Use the SPG7A within the operating ranges recommended
in the specifications (temperature, humidity, voltage, atmosphere, etc.).
• Do not use this device in explosive atmospheres or near
flammable fluids or steam.
• Always use the specified couplings and gaskets. After the
piping work has been completed, check that there are no
gas leaks before operating the device.
• When wiring the power for this device, be sure to install a
master cut-off switch for the electrical power within easy
reach of the operator.
• Wire the SPG7A properly according to the standards given
in this document, using the specified power source and
installation methods. Not doing so might result in fire or
device failure.
Thank you for purchasing the SPG7A.
This manual contains information for ensuring correct use of
the SPG7A. It also provides necessary information for installation, maintenance, and troubleshooting.
This manual should be read by those who design and maintain
devices that use the SPG7A.
Be sure to keep this manual nearby for handy reference.
• Do not allow wire or solder clippings, water, etc. to enter
the case of this device. They could cause fire or device
failure.
• Do not the block ventilation holes. Doing so might cause
fire or device failure.
• The surface of this device is very hot while the power is
ON and for a while after the power has been turned OFF.
To avoid a burn, do not touch it during this period. When
removing this device, turn the power OFF and allow sufficient time for it to cool.
Please read the "Terms and Conditions" from the following URL
before ordering or use:
http://www.azbil.com/products/bi/order.html
NOTICE
• If there is a chance that work personnel will come in contact with this device after installation, take appropriate
countermeasures.
Be sure that the user receives this manual before the product is
used.
• Do not use the relays in this device beyond their recommended service life. Doing so could cause fire or device
failure.
Copying or duplicating this user’s manual in part or in whole is forbidden. The information and specifications in this manual are subject to change without notice.
Considerable effort has been made to ensure that this manual is
free from inaccuracies and omissions. If you should find an error or
omission, please contact the azbil Group.
In no event is Azbil Corporation liable to anyone for any indirect,
special or consequential damages as a result of using this product.
OVERVIEW
The SPG7A is a capacitance diaphragm vacuum gauge that uses a sapphire capacitance pressure sensor to achieve high accuracy and reliability, compact size, and light weight. The SPG7A is especially suited
for use in vacuum freeze-drying process. It features the following:
• A single-crystal sapphire pressure sensing medium, offering excellent corrosion resistance, ability to withstand high temperatures,
and excellent mechanical characteristics. The capacitive measurement design provides high repeatability even when used in a hightemperature environment.
• Small size and light weight, achieved by micromachining technology.
• Advanced signal processing technology, contributing to excellent
temperature characteristics and linearity of measurement.
• Microprocessor-based digital PID, providing fast warm-up time and
stable sensor temperature control.
• A wide range of supply power voltages.
• Easy zero point adjustment with automatic adjustment button or up/
down zero adjustment buttons.
• SLP-SP5J60 Smart Loader Package (sold separately), for easy monitoring of the SPG7A and setting of its parameters from a PC.
• Equipped with three event relays. Relay settings can be changed easily with the Smart Loader Package (SLP-SP5J60, sold separately).
• Conformity to IEC directives; CE-marked; compliance with
EN61326 and EN55011.
© 2012-2013 Azbil Corporation All Rights Reserved.
WARNING
Warnings are indicated when mishandling this product
might result
in deathPRECAUTIONS
or serious injury to the user.
SAFETY
Safety precautions are for ensuring safe and correct use of this
product, and for preventing injury to the operator and other
mishandling
this
product
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of this user's manual.
CAUTION
WARNING
Warnings are indicated when mishandling this product
might result in death or serious injury to the user.
CAUTION
Cautions are indicated when mishandling this product
might result in minor injury to the user, or physical damage
to this product.
WARNING
• The burst pressure is the pressure at which this device will
break. To avoid an accident, never apply pressure exceeding the burst pressure.
E1
■■ Model selection table
I
II
III
IV
V
VI
VII
VIII
Basic
Additional Pressure Self-heating Coupling, Event 1 Event 2
Type
model No
function
range temperature options setting setting
SPG
7
A
___
Pressure
code
T10
T20
T30
T11
T12
T22
T13
FS pressure ranges
(absolute pressure)
133.32 Pa
266.64 Pa
399.96 Pa
1333.2 Pa
13332 Pa
26664 Pa
133.32 kPa
Pressure
code
P12
P22
P32
P13
P14
P24
P15
D
E
F
G
H
FS pressure ranges
(absolute pressure)
100 Pa
200 Pa
300 Pa
1000 Pa
10000 Pa
20000 Pa
100 kPa
J
Y
***
***
For details about other pressure ranges, contact the Sales Dept. at Azbil Corporation.
Example:SPG7AT10DY500500
Sapphire capacitance diaphragm gauge
Standard model
Event configuration model
Refer to the table on the left
125 °C
150 °C
160 °C
180 °C
200 °C
IDF2S ferrule
IDF2S ferrule, traceability certification
**.*% FS
Always OFF if “NNN” is specified.
**.*% FS
Always OFF if “NNN” is specified.
■■ Part names
D-sub 15-pin connector (male)
Set screw (#4-40UNC)
Status LED
ev1 ev2 ev3
status
zero auto down/ up
Event relay LED
Loader jack
Zero point
adjustment button (up)
Auto zero point
adjustment button
Zero point
adjustment button (down)
IDF2S ferrule
■■ Smart Loader communication function
This device can be monitored and its parameters changed easily
from a PC using the SLP-SP5J60 Smart Loader Package.
For more detail, refer to the manual for the Smart Loader
Package, CP-UM-5499E
Operation charts for pressure interlock of event relays
Pressure low limit (Direct action)
Pressure high limit (Direct action)
Hysteresis
Hysteresis
ON
Pressure monitor
SPG internal status monitor
• Temperature of electronics circuit and of sensor head; DC
supply voltage
• Alarm status, failure status
Adjustment Bias compensation
Ratio compensation
Configuration 0 to 10V 0 to 10 V output 0 V pressure for 0-10 V output
output
10 V pressure for 0-10 V output
settings Conditions for 0-10 V output
0-10 V output value (abnormal status)
Event relay Always OFF.
settings Normal status: ON, Abnormal status: OFF.
Normal status: OFF, Abnormal status: ON.
Normal status: ON, Abnormal status: latch OFF.
Normal status: OFF, Abnormal status: latch ON.
Warm-up done: ON,
Warm-up in progress or abnormal status: OFF.
Warm-up done: OFF,
Warm-up in progress or abnormal status: ON.
Warm-up done: ON, In progress: OFF,
Abnormal status: OFF latch.
Warm-up done: OFF, In progress: ON,
Abnormal status: ON latch.
Pressure high limit (direct action)
Pressure low limit (direct action)
Pressure high limit (reverse action)
Pressure low limit (reverse action)
Deviation high / low limit (Direct action)
Deviation high / low limit (Reverse action)
1st order filter time constant
Instrumentation 0 to 10 V output simulation
Event simulation
check
Monitoring
ON
OFF
OFF
Setpoint
Pressure
0
FS
0
Hysteresis
FS
Hysteresis
ON
ON
OFF
OFF
Setpoint
Pressure
0
FS
0
Deviation high / low limit (Direct action)
Deviation
Deviation
ON
OFF
Hysteresis
Setpoint
0
Pressure
Hysteresis
FS
Deviation high / low limit (Reverse action)
Deviation
Deviation
ON
OFF
Hysteresis
E2
Pressure
Pressure low limit (Reverse action)
Pressure high limit (Reverse action)
0
Setpoint
Setpoint
Pressure
Hysteresis
FS
Setpoint
Pressure
FS
INSTALLATION
WIRING
CAUTION
CAUTION
• Use the SPG7A within the operating ranges recommended in the specifications (for temperature, humidity,
voltage, atmosphere, etc.). Using it outside these ranges
might cause fire or device failure.
• Wire the SPG7A properly according to the standards
given in this document, using the specified power source
and installation methods. Not doing so might result in
fire or device failure.
• Always use the specified couplings and gaskets. After the
piping work has been completed, check that there are no
gas leaks before operating the device.
• Do not allow wire clippings, shavings, water, etc. to enter the case of this device. They could cause fire or device
failure.
• The surface of this device is very hot while the power is ON and for a while after the power has been
turned OFF. To avoid a burn, do not touch it during this period. When removing this device, turn the
power OFF and allow sufficient time for it to cool.
If there is a chance that work personnel will come in contact with this device after installation, take appropriate
countermeasures.
■■ Installation locations
Install the device in a location with the following characteristics:
• Not subject to high or low temperature/humidity.
• Free from sulfide gas or other corrosive gases.
• Little dust or soot.
• Appropriate protection from direct sunlight, wind and rain.
• Little mechanical vibration or shock.
• Not near high voltage lines, welding machines, or other sources
of electrical noise.
• At least 15 meters away from a high voltage ignition device for
a boiler.
• Not subject to strong electromagnetic fields.
• Not an explosive atmosphere, and not near flammable fluids or
steam.
• When wiring the power for this device, be sure to install a
master cut-off switch for the electrical power within easy
reach of the operator.
■■ Wiring Precautions
• Before wiring, mounting, or removing the SPG7A, be sure to
turn the power OFF.
• Before starting the wiring work, check the model No. of this device and the connector pin assignments (see page 4). Make sure
that the wiring is correct.
• Devices or systems to be connected to the SPG7A must have
basic insulation sufficient to withstand the maximum operating voltage levels of the power supply and input/output components.
• Use a power supply suitable for instrumentation, and make sure
that noise does not adversely affect this device.
• Use a power supply with a rated current equal to or greater than
the maximum power current specified on p. 6 of this document.
• Use shielded cables for the wiring.
• Be sure to connect a ground wire to the frame ground.
• Use a power supply, connectors, and cables with appropriate ratings for voltage, current, etc. Make sure that the voltage at the
connector of this device is within the specified power voltage
range.
• Take care not to wire incorrectly. Wrong wiring may cause device failure.
• This device does not function for up to 10 s after the power has
been turned on. Great care should be taken when the relay output from this device is used as an interlock signal.
• Do not connect multiple Smart Loader cables connected to multiple SPG7A units to one personal computer at the same time.
The current coming from other circuits might cause an output
value indication error to occur.
■■ Installation
When connecting this device to the piping, always use the specified couplings and gaskets, and check for leaks after installation
is complete.
There are no limitations on mounting angle. However, since a
zero-shift may occur at some angles, be sure to adjust the zero
point after installation.
Handling Precautions
•Vibration may move the SPG’s pressure-sensitive diaphragm,
causing the pressure reading to fluctuate. Therefore, take appropriate measures so that this device is not subject to vibration. In particular, guard against vibration that would move
the device along its axis (e.g., up-and-down vibration, if the
device is mounted vertically).
•When installing, attach the coupling firmly, taking care not to
apply any force to the case. Application of force to the case
might break the device.
•This is a precision instrument. Do not drop it or bump it
against any object. Application of any shock to this device
might adversely affect its performance.
•If there is a chance that the temperature will exceed the operating ambient temperature range, install an appropriate
cooling fan.
Note
•This device was calibrated at the factory in a vertical position.
Shift of the zero point may have occurred, depending on the
mounting angle. In such a case, accuracy can be recovered by
adjusting the zero point after installation. Vertical installation
is recommended to prevent contaminants from accumulating
on the sensor unit.
E3
■■ Wiring
ADJUSTMENT AND START-UP
●● Connector pin assignments (D-sub 15-pin)
CAUTION
Pin
No.
Name
1
Event relay 3 (COM)
2
Output (+)
3
Power supply (COM) *1 *2
4
Event relay 2 (COM)
5
Power supply (-) *1
6
Event relay 3 (NO)
7
Power supply (+)
8
Event relay 3 (NC)
9
Event relay 2 (NO)
10
Event relay 2 (NC)
11
Event relay 1 (COM)
12
Output (COM) *2
13
Event relay 1 (NO)
14
Event relay 1 (NC)
15
FG *3
• The surface of this device is very hot while the power is
ON and for a while after the power has been turned OFF.
To avoid a burn, do not touch it during this period. When
removing this device, turn the power OFF and allow sufficient time for it to cool. If there is a chance that work
personnel will come in contact with this device after installation, take appropriate countermeasures.
• Do not use the relays in this device beyond their recommended service life. Doing so could cause fire or device
failure.
■■ Turning the power ON
Use this device after warm-up is complete, 1 hour or more after
turning the power ON.
• If warm-up is not finished, the status LED is orange.
• When warm-up is complete, the status LED turns green.
Handling Precautions
•This device does not satisfy specifications for accuracy during
the warm-up period after the power has been turned ON, before the self-heating temperature has stabilized. Always use
this device after warm-up is complete.
■■ Example of external connection
●● ±15 Vdc (dual power supplies)
DC15V
DC15V
7
Power supply (+)
3
Power supply (COM)
5
Power supply (-)
•If any problem with the operating environment (power voltage, ambient temperature, etc.) is detected during the selfdiagnosis of this device, the status LED starts to flash red. If
this occurs, turn off the power and check the instrumentation
status.
●● 24 Vdc (single power supply)
DC24V
*1
Receiving instrument
7
Power supply (+)
3
Power supply (COM)
5
Power supply (-)
2
Output (+)
12
Output (COM)
•Do not apply a pressure to this device that exceeds the marginal pressure. Doing so might cause device failure.
•Take appropriate measures so that no contaminant enters
this device. Otherwise a measurement error or device failure
might occur.
13
Load
Event
relay 1
11
Load 30 Vdc
or less
14
•Take appropriate measures so that no foreign matter flows
into this device. If it does, measurement error or device failure
could result.
9
Load
Event
relay 2
4
Load 30 Vdc
or less
10
•For the pressure range characterized by molecular flow and
intermediate flow, if the self-heating temperature of this device is different from the temperature inside the chamber
to be measured, a minute pressure difference occurs due to
thermal transpiration. To achieve especially accurate measurement, this must be taken into account. Factory calibration
of this device assumes that no temperature difference exists.
For details, refer to T. Takaishi and Y. Sensui, Trans. Faraday Soc.
59 (1963) 2503.
6
Load
Event
relay 3
1
Load 30 Vdc
or less
8
15
Ground
•If any internal error is detected during the self-diagnosis of
this device, the status LED lights up red. If this occurs, turn off
the power and contact the azbil Group.
FG
Connector hood
Shield
*1 If using a single 24 Vdc input power supply, connect the power COM
to the power “–“.
*2 The power COM and output COM are internally connected. If using a single 24 Vdc input power supply, do not connect the power
COM and output COM together. Also, take care to avoid any wrong
wiring that may cause a short circuit in other equipment. If the wiring is connected incorrectly, current from the power supply will also
flow through the output line, and the voltage drop from wiring resistance may cause a measurement error.
*3 The FG is electrically continuous with the case, but is insulated from
the power COM, output COM, and other terminals.
■■ Zero point adjustment
• Adjust the zero point before using this device. Zero point adjustment should be done with a sufficient vacuum (1/20,000 or less
of the selected pressure range span), 1 hour or longer after the
power was turned on, after warm-up is complete.
• For accurate measurement, periodic adjustment of the zero
point is recommended.
• When the zero point is adjusted, the bias adjustment values inside the device are updated. The updated bias adjustment value
is added to the pressure measurement, which is then output. The
factory setting for the bias adjustment value is 0.
Note
Event relay connection
ON
OFF
NO
NO
COM
COM
NC
NC
Adjust the zero point in either of the two ways described below.
When the power supply is
turned off the event relay is
turned off.
E4
■■ Status LED display operation
●● Auto zero point adjustment
(1) Apply a vacuum with a pressure of 1/20,000 or less of the
selected pressure range.
(2) Keep the auto zero point adjustment button pressed for 3 s.
After zero point adjustment:
• If the bias adjustment value is within ± 5 % FS, the status
LED flashes green three times.
• If the bias adjustment value is between ± 5 and ± 20 % FS,
the status LED flashes orange three times.
Status LED
Handling Precautions
•Auto zero point adjustment cannot be done in the following cases even if the button is pressed:
•Before warm-up is complete.
•If an error occurs.
•If the required bias adjustment value is beyond ± 20 %
FS.
●● Manual zero point adjustment
(1) Apply a vacuum with a pressure of 1/20,000 or less of the
selected pressure range.
(2) The 0-10 V output voltage changes when the up/down zero
adjustment button is pressed. Adjust the output voltage to
0.
When the button is pressed, the speed at which the 0-10 V
value changes depends on how long the button is pressed.
Keep it pressed for a long time to do a quick rough adjustment.
Afterwards, press it repeatedly for a short time to make fine
adjustments.
• During adjustment using the up/down zero point butt on:
• If the bias adjustment value is within ± 5 % FS, the status
LED flashes green.
• If the bias adjustment value is between ± 5 and ± 20 % FS,
the status LED flashes orange.
• The status LED stops flashing about 3 s after the up/down
zero point adjustment button is released, and the bias adjustment value is then set.
• Zero adjustment is restricted to the range in which the bias
adjustment value is ± 20 % FS. If the bias adjustment value
reaches ± 20 % FS as the up/down zero point adjustment button is pressed, the status LED flashes red.
Status
Lit green
Normal operation status (after warm-up)
Lit orange
Warm-up in progress
(device temperature is not yet stable)
Lit red
Abnormal status (a problem with the device)
Flashing red
(0.3 s, 0.3 s)
Abnormal status (operating environment problem,
such as excessive ambient temperature or wrong
power voltage)
3 green flashes
(0.3 s, 0.3 s)
Automatic zero point adjustment (by pressing the
auto zero point adjustment button) is complete, and
the bias adjustment value is within ± 5 % FS.
3 orange flashes
(0.3 s, 0.3 s)
Automatic zero point adjustment (by pressing the
auto zero point adjustment button) is complete. The
bias adjustment value is between ± 5 and ± 20 % FS.
Flashing green
(0.1 s, 0.1 s)
The zero point is being adjusted with the up/down
zero point adjustment buttons. The bias adjustment
value is within ± 5 % FS.
Flashing orange
(0.1 s, 0.1 s)
The zero point is being adjusted with the up/down
zero point adjustment buttons. The bias adjustment
value is between ± 5 and ± 20 % FS.
Flashing red
(0.1 s, 0.1 s)
During zero point adjustment with the up/down zero
point adjustment buttons, the bias adjustment value
reached the maximum adjustable range of ± 20 % FS.
Lit alternately red Because of the device conditions *, auto zero point
and orange 3
adjustment and manual zero point adjustment
times (0.3 s, 0.3 s)
cannot be done.
* For the device conditions, see each Handling
Precautions of auto zero point adjustment and
manual zero point adjustment.
Lit alternately
The bias adjustment value has been reset.
green and orange
3 times (0.3 s, 0.3 s)
Alternating green The event relay is latched. *1
and orange with
occasional red
(1.9 s, 0.1 s)
Handling Precautions
•Manual zero point adjustment cannot be done in the following cases even if the button is pressed:
•Before warm-up is complete.
•If an error occurs.
•If the pressure value exceeds the measurement range.
In these cases, the status LED flashes alternately red and
orange three times.
Lit alternately
green and red.
(0.3 s, 0.3 s)
Output is manually controlled. *2
Off
The device is not powered up.
*1 Latching of the event relay must be set up with the Smart Loader (sold
separately).
*2 Output can be manually controlled with the Smart Loader (sold separately).
MAINTENANCE AND TROUBLESHOOTING
●● Resetting of bias adjustment value
To reset the bias adjustment value to its factory setting, keep
the auto zero point adjustment button pressed for 30 s or longer. The zero point is adjusted after 3 s, and the bias value is
reset after 30 s. The status LED then flashes alternately green
and orange three times.
■■ Maintenance
●● Maintenance and inspection
• Check that the status LED is green during operation.
• Check periodically that there are no leaks in the piping.
• Adjust the zero point periodically.
●● Cleaning
• Use a soft dry cloth.
• Do not use any organic solvent such as paint thinner or benzene.
●● Part replacement
Do not disassemble the SPG7A or attempt to replace any of
its parts.
E5
■■ Alarm displays and corrective actions
■■ Troubleshooting
The following table shows the alarm displays and corrective actions to take if there is a problem:
Status
LED
Status
Possible Causes
Flashing Alarm • Temperature of electronic
red
circuits
• Temperature of sensor head
• Heater temperature error
• Self-heating control error
• Wrong supply power voltage
Red
Failure • Heater wire break
• Memory failure
• Electronic circuit failure
Symptom
Action
Status LED does • Check that the wiring is connected correctly.
not light up
• Check that the power voltage and polarity are
correct.
Action
Turn off the power
and check the power
voltage, ambient
temperature, and other
operating conditions.
Output value
fluctuates
• Check that the wiring is connected correctly.
• Adjust the zero point.
DISPOSAL
Turn off the power
and contact the azbil
Group dealer, agent,
or salesperson. The
device needs to be
repaired by Azbil
Corporation.
When disposing of this device, dispose of it appropriately as industrial
waste in accordance with local regulations.
Important notice: If you send this device to Azbil Corporation for repair, fill
out the Safety Sheet on page 8 and include it with the device.
SPECIFICATION
Items
Pressure range
Self-heating temperature
Accuracy
Temperature coefficients
zero
Temperature coefficients
span
Resolution
Operating temperature
range
Operating humidity range
Storage temperature and
humidity range
Response time
Gas-contacting materials
Internal capacity
Allowable pressure *1
Burst pressure *2
Input power supply
Power consumption/
power current *3 *4
Output signal
I/O connector
Mass
Warm up time
Zero point adjustable
range
Coupling
Leak rate
Mounting angle
Allowable cable length
Specifications
As specified in the model selection table.
0.25 % of rdg.:
Self-heating temperature under 160 °C
0.5 % of rdg.:
Models with self-heating temperature of 160 °C or more
Self-heating temperature range
Temperature coefficients at zero
0.004 % FS / °C
Less than 160 °C
0.008 % FS / °C
0.008 % FS / °C
160 °C or more
0.016 % FS / °C
0.02 % rdg. / °C
Pressure range
200 Pa or more
Less than 200 Pa
200 Pa or more
Less than 200 Pa
1/10000 FS
10 to 45 °C (* Cooling air with a velocity of 0.5 m/s or more is required at 35 °C or more.)
10 to 90 % RH (without condensation)
-20 to +80 °C, 10 to 95 % RH (without condensation)
35 ms
Sapphire, Inconel, SUS316L
5 cm3
300 kPa
700 kPa abs
Voltage range: ±15 Vdc ± 10 % (dual power supplies) or 24 Vdc ± 10 % (single power supply)
Allowable ripple voltage: 0.5 Vp-p max.
Power consumption
Power current
Self-heating temperature
During normal operation
During warm-up
±15 Vdc supply
24 Vdc supply
10 W max.
14 W max.
0.6 A max.
0.7 A max.
125 °C
12 W max.
16 W max.
0.6 A max.
0.8 A max.
150 °C
13 W max.
17 W max.
0.7 A max.
0.8 A max.
160 °C
15 W max.
19 W max.
0.8 A max.
0.9 A max.
180 °C
16 W max.
23 W max.
0.9 A max.
1.1 A max.
200 °C
Signal voltage:
0 to 10 Vdc
Allowable load resistance:
10 kΩ min.
Measurement output range:
-0.5 to +11 Vdc *5
Output during warm-up or abnormal status: Output depends on the measured pressure *6
D-sub 15-pin connector (male), retaining screw #4-40UNC
650 g
30 min (nominal), 1 h max.
± 20 % FS
As specified in the model selection table.
1×10-10 Pa • m3/s or less
Unrestricted *7
10 m max.
E6
Items
Event relay ratings
Event relay functions
default setting *8
Specifications
Number of relays:
3
Contact form:
1c (both NO and NC contacts)
Maximum load:
1A-30 Vdc resistance load
Minimum load:
10 µA 10 mVdc *9
Mechanical service life:
50 million cycles min.
Electrical service life:
100 thousand cycles min. (with 1 A, 30 Vdc resistance load)
Certifications:
UL, CSA
Event relay 1: Pressure low limit (direct action)
Setting: value is assigned by model No. Operating hysteresis: 0.5 % FS
Always operates together with pressure during warm-up or abnormal status.
Hysteresis
ON
OFF
Setpoint
Pressure
0
Event relay 2: FS
Pressure low limit (direct action)
Setting: value is assigned by model No. Operating hysteresis: 0.5 % FS
Always operates together with pressure during warm-up or abnormal status.
Hysteresis
ON
OFF
Setpoint
Pressure
0
Standards compliance
Accessories
(sold separately)
FS
Event relay 3: ON if warm-up complete and OFF if warm-up not complete or if status abnormal
Event relay LED: Green when event relay ON, off when event relay OFF
CE marked (EN61326, EN55011)
SLP-SP5J60 Smart Loader Package (with communication cable)
*1 At the allowable pressure, the performance level of this unit can be maintained. However, if the SPG is repeatedly subjected to the allowable pressure, adjust the zero point periodically.
*2 The burst pressure is the pressure at which this device will break. To avoid
an accident, never apply pressure equaling or exceeding the burst pressure.
*3 Use an appropriate power supply with a rated current exceeding the
max. power current value.
*4 PID control is used to regulate the temperature and keep the rate of
current supplied to the heater as constant as possible. Additionally, the
maximum power current is varied depending on the power voltage, so
that power consumption remains constant even during warm-up, irrespective of the power voltage.
*5 Since a negative voltage is generated inside this unit, a negative voltage
output is available even with only a single-output power supply.
*6 The conditions and voltage can be changed using the Smart Loader.
*7 This unit was calibrated at the factory in a vertical position. Shift of the
zero point may have occurred, depending on the mounting angle. In
such a case, accuracy can be recovered by adjusting the zero point after
installation. Vertical installation is recommended to prevent contaminants from accumulating on the sensor unit.
*8 The event relay functions can be changed using the Smart Loader.
*9 The minimum load specification is an estimate of the minimum load at
which the event relay is able to open and close. This value can vary depending on the frequency of operation, environmental conditions, and
the expected reliability level. Before actual use, a check of the relay’s operation using the actual load is recommended.
■■ External Dimensions
●● SPG7A
Unit: mm
(φ64 ferrule)
φ6
14.5
0
ev1
ev2
ev3
status
auto
down / up
25.5
(157.5)
132
5
zero
IDF 2S ferrule
E7
IMPORTANT NOTE: If it is necessary to send this device back to Azbil Corporation for repair, photocopy the
following Safety Sheet, fill in the required items, and return the sheet with the unit.
The Safety Sheet is intended to ensure that the customer’s product is safe for repair personnel and for the
environment.
Without this sheet, Azbil Corporation cannot start repair work. Please note that if the sheet is incomplete, Azbil
Corporation may request the customer to resubmit it.
Safety Sheet
To use, photocopy this page.
To: Azbil Corporation
Statement by the End User (required prior to repair work)
I attest to the safety of this device based on the following evidence (check the applicable box):
Hazardous substances have been purged or flushed completely.
This device has been used only with clean, dry inert gas such as air, N2, Ar, and He.
Model number:
Date code:
Serial number:
Name:
Date:
Department:
Company:
Phone:
Approved by (supervisor):
Comments or supplementary information:
(Do not fill in - for Azbil Corporation internal use only)
Dealer/Agent/Salesperson Information
Date:
Name:
Company:
Department:
Phone:
Date:
Name:
Company:
Department:
Phone:
Important Notice
Depending upon the degree of contamination of the
device, Azbil Corporation reserves the right to refuse
repair.
Specifications are subject to change without notice. (09)
Handling of personal information
We will use your personal information provided to us by
this sheet only for the purposes of providing after-sales
services to you.
1-12-2 Kawana, Fujisawa
Kanagawa 251-8522 Japan
E8
URL: http://www.azbil.com
1st edition: Apr. 2012 (M)
2nd edition: June 2013 ( F )
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