TW1600

TW1600
TURBOVAC T 1600,
T 1601, TW 1600
Turbomolecular pump
with integrated frequency converter
Incorporation Declaration & Operating Instructions
17200039_002_A1
Part Nos.
800040Vxxxx
800041Vxxxx
Contents
Page
2
0
Important Safety Information
5
0.1
Mechanical hazards
5
0.2
Electrical hazards
6
0.3
Thermal hazards
7
0.4
Hazards caused by materials and substances
7
0.5
Danger of ignition
8
0.6
Dangers in connection with safety-related
measures and precautions
8
0.7
Risk of damaging the pump
8
1
Description
10
1.1
Standard equipment
10
1.2
Technical data
11
1.3
Ordering data
12
2
Transport and storing
15
3
Installation
16
3.1
Conforming utilization
16
3.1.1 Non-conforming utilization
16
3.2
Operating environment
17
3.3
Attach the pump to the vacuum chamber
18
3.4
Forevacuum connection
22
3.5
Connect the cooling
23
3.6
Connect the purge gas and venting valve
23
3.7
Electrical connection
25
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
Contents
4
Operation
27
4.1
Media compatibility / purge gas
27
4.2
Start-up
27
4.3
Interfaces
28
4.3.1 Control connector X1
28
4.3.2 RS 232 service interface
33
4.3.3 Profibus DP
34
4.4
Switching on
49
4.5
Shutting down
50
4.6
Venting
50
4.7
Bakeout
51
4.8
Removing the pump from the system
52
5
Maintenance
53
5.1
Cleaning
53
5.2
Oerlikon Leybold Vacuum service
54
6
Troubleshooting
55
7
Waste disposal
57
EC Incorporation Declaration
59
EC Declaration of Conformity
60
Index
63
Original installation and operating instructions.
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
3
Safety Information
NOTICE
Obligation to Provide Information
Before installing and commissioning the TURBOVAC, carefully read these
Operating Instructions and follow the information so as to ensure optimum
and safe working right from the start.
The Oerlikon Leybold Vacuum TURBOVAC has been designed for safe and
efficient operation when used properly and in accordance with these
Operating Instructions. It is the responsibility of the user to carefully read and
strictly observe all safety precautions described in this section and throughout the Operating Instructions. The pump must only be operated in the
proper condition and under the conditions described in the Operating
Instructions. It must be operated and maintained by trained personnel only.
Consult local, state, and national agencies regarding specific requirements
and regulations. Address any further safety, operation and/or maintenance
questions to our nearest office.
DANGER
DANGER indicates an imminently hazardous situation which, if not
avoided, will result in death or serious injury.
WARNING
WARNING indicates a potentially hazardous situation which, if not
avoided, could result in death or serious injury.
CAUTION
CAUTION indicates a potentially hazardous situation which, if not avoided,
could result in minor or moderate injury.
NOTICE
NOTICE is used to notify users of installation, operation, programming or
maintenance information that is important, but not hazard related.
We reserve the right to alter the design or any data given in these Operating
Instructions. The illustrations are not binding.
Retain the Operating Instructions for further use.
4
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Safety Information
0
Important Safety Information
0.1
1
Mechanical hazards
Avoid exposing any part of the human body to the vacuum.
2
The pressure in the pump must not exceed 1.4 bar (absolute).
3
The pump is intended for generating a vacuum only. If there is a risk of
an overpressure within the system and the pump, then the pump must
be protected against this, by way of an overpressure safety valve, for
example.
4
Vent the pump only up to atmospheric pressure.
5
When using the pump with a purge gas valve, protect the purge gas
supply such that in the event of a malfunction no overpressure can
occur within the system.
6
The pump must be firmly mounted to the vacuum chamber. If the
mounting is not sturdy enough, pump blockage could cause the pump
to break loose; internal pump components could be thrown in all
directions. Never operate the pump (in bench testing, for example)
without proper flanging to the vacuum chamber. Observe the information in Section 3.3.
7
We recommend to change the rotor after 80,000 hours of operation
or after 20,000 starts/ stops or cycles at the latest.
Due to high-speed and temperature, the service life of the rotor is limited. If the rotor is changed too late, it may be destroyed. Thus in the
flange mounts high forces and torque conditions can occur. The
mounting screws for the pump may be torn off. When using clamped
flange connections at the housing or with components above the
housing, sudden twisting of the entire pump can be experienced.
8
Turbopumps as described in the following operation manual contain a
high portion of kinetic energy due to their high rotational speed in
combination with the specific rotor mass. In case of a malfunction of
the system, for example rotor/stator contact or even a rotor crash, the
rotational energy is released.
9
To avoid the destruction of the equipment and to prevent injuries of the
operating staff the leading European manufacturers of vacuum pumps
strictly recommend to follow the installation instructions as given in this
manual.
WARNING
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
5
Safety Information
WARNING
6
0.2
1
Electrical hazards
The electrical connections must only be provided by a trained electrician as specified, for example, by the regulations EN 50110-1.
Observe local regulations.
2
The frequency converter must be protected by a suitable mains power
isolating facility or a mains switch.
3
Lethal voltages are present at the mains connections. Before starting
with any maintenance and service work, de-energise (lockout/tagout)
the product first.
4
In order to prevent in the event of a malfunction contact with dangerously high voltages, the pump must be connected to protective
ground.
5
Unplug any connectors only when the mains voltage is switched off
and the pump does no longer turn.
6
Unauthorized device conversion and modifications are prohibited for
safety reasons.
7
Hazardous voltages are present within the frequency converter. When
coming into contact with these, death or severe injury can result. After
the pump has arrived at standstill, disconnect the frequency converter
from the mains power and prevent it against being switched on inadvertently (lockout/tagout) before opening it. Basically there is no reason
why the frequency converter should be opened. There are no user serviceable parts inside.
8
Lay connecting lines so that they cannot be damaged. Protect the
lines against humidity and contact with water. Avoid any heat stress on
the line due to unfavourable laying conditions.
9
Suitably support the connecting lines so that the pumps are not
exposed to any major mechanical stress.
10
Do not expose pump, frequency converter and the connections to
dripping water. Note the information on the IP type of protection.
11
When storing pump, frequency converter and connecting lines in a
humid atmosphere, these can suffer corrosion. Corrosion gives rise to
conductive deposits which in turn can cause short-circuits and reduce
the insulation levels of electrical components
12
Transport pump, frequency converter and connecting cables only in
their original packaging so as to avoid any mechanical damage which
in turn may reduce air gaps and creepage distances.
13
When applying external voltages above 42 V to the connection terminals, observe the applicable VDE safety regulations!
14
Make the electrical connections only after pump and accessories (e.g.
air cooler) have been installed mechanically.
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
Safety Information
0.3
1
Thermal hazards
Handle the equipment only while vented and cooled down.
2
During operation of the pump certain areas can get so hot (80 °C
max.) so that there is the risk of suffering burns. Protect hot parts
against being touched.
3
Note the warning information on the housing surface. If these warning
notices have been removed, covered or obstructed, include corresponding additional warning notices.
0.4
1
Hazards caused by materials and substances
The pump is not suited for pumping of reactive or corrosive media.
If the rotor is attacked by process gases, it can suffer destruction.
Thus in the flange mounts high forces and torque conditions can
occur. The mounting screws for the pump may be torn off. When
using clamped flange connections at the housing or with components
above the housing, sudden twisting of the entire pump can be experienced.
2
When pumping dusty media, use a dust filter.
3
If low concentration corrosive or reactive gases are being pumped,
then operate the pump with purge gas.
4
Some media (such as aluminum trichloride) can sublime inside the
pump and form deposits. Thick deposits reduce the play between
moving parts to the point that the pump could seize. In some processes deposits can be prevented by heating the pump. Please consult
us in case such problems arise.
5
Please consult us as to which types of pump are required for specific
processes and applications.
6
The forevacuum line must be tight. Hazardous gases can escape at
leaks or the gases being pumped can react with air or humidity.
A leak search will always be required after having installed the pump
and after service work on the vacuum.
Upon delivery the pump has an integral leak rate of < 5 · 10-7 mbar·l/s.
When pumping toxic gases we recommend a leak search on a regular
basis.
7
If the pump has previously handled hazardous gases, implement the
proper precautionary measures before opening the intake or exhaust
connection.
Before opening the pump, purge it for a longer period of time with an
inert gas.
If necessary, use gloves, a respirator and/or protective clothing and
work under an exhaust hood. Firmly seal off the pump.
When shipping the contaminated pump for servicing, please also state
the type of hazard. For this you must use a form which we have prepared for you.
CAUTION
DANGER
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7
Safety Information
CAUTION
CAUTION
NOTICE
8
8
Contaminated parts can be detrimental to health and environment.
Before beginning with any work, first find out whether any parts are
contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.
0.5
1
Danger of ignition
During operation the pressure inside the turbomolecular pump is so
low that there is no danger of ignition (at pressures below about 100
mbar). A hazardous condition will be created if flammable mixtures
enter the hot pump at pressures above 100 mbar. During operation
the pump can reach temperatures as high as 120°C internally, and at
parts of the outside surfaces 80 °C. Sparks could occur in case of
damage to the pump and these could ignite explosive mixtures.
Also note the safety information provided by the gas supplier.
0.6
Dangers in connection with safety-related
measures and precautions
The frequency converter is not equipped with its own emergency shut
down switch. Such a facility needs to be provided from the side of the
system.
1
0.7
1
Risk of damaging the pump
Never touch the rotor. Touching the rotor may cause injury and
damage the rotor bearing.
2
Foreign objects which enter the pump through the intake would cause
serious damage to the rotor. That’s why we recommend installing an
inlet screen. Damages caused during operation without the inlet
screen are excluded from warranty.
3
The contact surfaces of pump housing, vacuum system and centering
ring must be free of grease and dry so as to ensure sufficient stability
in case the rotor seizes.
4
The interface connectors have UNC 4-40 threads. Do not use connectors with M3 treads.
5
Disconnect and connect the cable connections only while the pump is
turning no longer (green status LED off) and with the mains power
switched off (power LED off). Otherwise there is the risk of damaging
the frequency converter.
6
Exposure of the pump to accelerating forces must be avoided or
reduced to such an extent that the rotor unit will not be excited by
vibrations. In the case of critical applications you must consult our
Applications Dept. first.
7
The frequency converter contains electrostatically sensitive devices
(ESD)!
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
Description
T 1600 and TW 1600
with ISO-F flange
T 1600 and TW 1600
with CF flange
T 1601
with ISO-F flange
Fig. 1.1 TURBOVAC
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
9
Description
1
Description
The TURBOVAC T 1600, T 1601 and TW 1600 are turbomolecular pumps
featuring lifetime lubricated ceramics ball bearings. They have been engineered to pump vacuum chambers down to pressures in the high-vacuum
range.
The T 1601 has a frequency converter housing which is sealed against condensate water. This allows the use of the pump with higher ambient humidity
and higher ambient temperatures. The TW 1600 has an additional compound stage.
The frequency converter required for operation has been integrated in the
pump itself. Operation of the TURBOVAC requires the use of a suitable
backing pump.
1.1 Standard equipment
The TURBOVAC is shipped in a sealed PE bag which also contains a desiccant. The desiccant will remain effective for about 1 year.
Included with the pump are:
n for the ISO-F high-vacuum connection: inlet screen, centering ring, support ring and O-ring
n for the KF foreline connection: centering ring, clamping ring and a DN 40
KF O-ring
n for the ISO-K foreline connection: centering ring
n for the pumps equipped with a Profibus interface: a disk with the basic
instrument data file (GSD)
n a mains cord with Euro plug
n accessories for the cooling water connection: 2 adaptors G 3/8“ – hose
nipple LW 13 (Ref. No. 272 75 202), 2 gaskets (Ref. No. 200 11 600)
The purge gas connection has been sealed off. A gas filter (Part No. 200 18
515) with an adaptor for screwing in have been included.
————————————PE=Polyethylene
10
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
Description
1.2
Technical data
TURBOVAC
High vacuum port
DN
T 1600
T 1600
T 1601
TW 1600
TW 1600
200 ISO-F
250 ISO-F/
250 CF
250 ISO-F
200 ISO-F
250 ISO-F/
250 CF
Max. permissible high vacuum pressure (pHV)
for continuous operation1)
mbar
5·10-2
Pumping speed for N2
at pHV < 10-3 mbar
l·s-1
1280
1550
1550
1000
1420
Forevacuum port
DN
40 KF
40 KF / 63 ISO-K
40 KF
40 KF
40 KF
Max. permissible forevacuum pressure (pVV)
at the forevacuum port for N2
for continuous operation1)
mbar
5·10-1
5·10-1
5·10-1
9
9
1500
25
1500
25
1500
25
440
7.4
440
7.4
10 to 40
50 to 104
10 to 40
50 to 104
Max. gas throughput for N2
for continuous operation1)
sccm
mbar·l·s-1
Nominal speed
= nominal frequency
rpm
Hz
30,000
500
Minimum speed
rpm
18,000
Run-up time without load
min
< 10
Weight
approx. kg
Purge gas port
40
G
1/4“
Purge gas
Purge gas requirement
dry ambient air or N2
sccm
mbar·l·s-1
36
0.6
Max. purge gas pressure, abs.
bar
1.0 - 1.5
Max. humidity in the purge gas
ppm
10
Cooling water connections
G
3/8“
Cooling water requirement
See Section 3.5
Voltage range, nominal
mains frequency
V
Hz
85 - 265
50 / 60
Power consumption
maximum
while running up
during normal operation without gas load
VA
VA
VA
1200
700
300
Load rating for the relay outputs, max.
V/A
48 / 0.5
Noise level
dB(A)
39
Ambient temperature
during operation
while shelved
°C
°F
°C
°F
Relative humidity of the air (non-condensing)2) %
Protection
IP
10 to 40
50 to 104
10 to 40
50 to 104
10 to 45
50 to 113
- 15 to + 60
5 to 140
5 to 85
5 to 85
5 to 95
5 to 85
5 to 85
54
54
67
54
54
1) The maximum values stated in the Technical Data section are individual values which must not be related to other maximum
values stated. For example, the maximum gas load must not be utilised at the maximum forevacuum pressure. The settings for
safe operation are provided in Fig. 1.3 "Throughput as a function of the inlet pressure”.
2) More details in Applied technical standard IEC 721-3-3 3K3/ 3Z1/ 3B1/ 3C1/ 3S2/ 3M1
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
11
Description
1.3 Ordering data
TURBOVAC T 1600
Part No.
DN 250 ISO-F / DN 40 KF
800040V1444
DN 250 ISO-F / DN 63 ISO-K
800040V1544
DN 200 ISO-F / DN 40 KF
800040V1144
DN 200 ISO-F / DN 63 ISO-K
800040V1244
DN 250 CF / DN 40 KF
800040V1844
TURBOVAC T 1600 with PROFIBUS
DN 250 ISO-F / DN 40 KF
800040V2444
DN 250 ISO-F / DN 63 ISO-K
800040V2546
DN 200 ISO-F / DN 40 KF
800040V2144
DN 250 CF / DN 40 KF
800040V2844
TURBOVAC T 1601 with PROFIBUS
DN 250 ISO-F / DN 40 KF
800040V4444
TURBOVAC TW 1600 with PROFIBUS
DN 200 ISO-F / DN 40 KF
800041V2144
800041V2148 (painted black)
DN 250 ISO-F / DN 40 KF
800041V2444
DN 250 CF / DN 40 KF
800041V2844
Seal kit
Mains cord with US plug
Ref. No. 200 09 763
on request
Accessories for RS 232 interface
PC software "Turbo.Drive Server" for Windows 95
and better, CD ROM
n Display, change, save and compare parameter lists
n Integration of customer’s software
n Record parameter data
Part No. 800110V0102
The software can also be downloaded from www.oerlikon.com by selecting
Oerlikon Leybold Vacuum → Documentation → Download Software.
12
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
Description
10
Saugvermögen
Pumping
speed
Ixs
4
-1
10
N2
Ar
He
H2
3
TURBOVAC T 1600 / T 1601
2
10 8
6
4
2
10
1
10
-5
2
4
6 8 -4
10
10
-3
10
-2
10
-1
1
mbar
InletEinlass-Druck
pressure
10
Saugvermögen
Pumping
speed
Ixs
4
N2
Ar
-1
10
10
3
TURBOVAC TW 1600
10
2
8
6
4
2
10
1
10
-5
2
4
6 8 -4
10
10
-3
10
-2
10
-1
1
mbar
InletEinlass-Druck
pressure
10
Fig. 1.2 Pumping speed curves
10
mbar x I/s
2
TW 1600-N2
Limit Line TW 1600-N2
-1
T 1600-N2
T 1600/
T 1601
Throughput
Durchsatz
Limit Line T 1600-N2
10
1
10
0
10
WA 501/ D 65 B
TW 1600
-1
8
6
4
2
10
-2
10
-5
2
4
6 8
10
-4
10
-3
10
-2
10
-1
Inlet pressure
Einlass-Druck
10
0
10
1
mbar
10
2
Fig. 1.3 Throughput as function of the inlet pressure
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
13
Description
Ø d1
DN1
h3
h2
h1
93
h
136
,5°
°
57
61
313
DN2
17
,5
35
b
21
15
5
5
d1
h
h1
h2
h3
b
α
285
440
315
275
255
177
15°
DN 200 ISO-F / DN 63 ISO-K 285
440
315
275
255
182
15°
T 1600
DN 200 ISO-F / DN 40 KF
DN 250 ISO-F / DN 40 KF
335
413
288
248
228
177
15°
DN 250 ISO-F / DN 63 ISO-K 335
413
288
248
228
182
15°
DN 250 CF / DN 40 KF
305
428
303
263
243
177 5.625°
DN 250 CF / DN 63 ISO-K
305
428
303
263
243
182 5.625°
335
413
288
248
228
177
15°
DN 200 ISO-F / DN 40 KF
285
440
315
275
255
177
15°
DN 250 ISO-F / DN 40 KF
335
413
288
248
228
177
15°
DN 250 CF / DN 40 KF
305
428
303
263
243
177 5.625°
T 1601
DN 250 ISO-F / DN 40 KF
TW 1600
Fig. 1.4 Dimensional drawings for the TURBOVAC; dimensions in mm
14
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
Transport and storing
2
Transport and storing
Remove the equipment from the transportation box and keep the packaging.
Make sure that the product has not been damaged during transportation. If
this unit is damaged contact your carrier and inform Oerlikon Leybold
Vacuum if necessary. For storage of the product, use the packaging provided.
Keep the packaging
NOTICE
Be careful not to damage the sockets and connections during transportation.
Do not stand below the pump while connecting or removing the turbomolecular pump.
CAUTION
When moving the pump you must use the crane eyes provided on the pump.
The turbomolecular pump is shipped in a sealed PE bag with desiccant. Do
not open the sealed package until immediately before installing.
Do not remove the covers and blanking flanges until you are ready to make
the connections, to ensure that the turbomolecular pump is installed under
the cleanest possible conditions.
Turbomolecular pumps which were not operated for a period of over 12
months should be returned to us. For more information on this please
contact your local sales partner.
Do not store pump and accessories in a moist atmosphere so as to prevent
these items from suffering corrosion.
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
15
Installation
3
Installation
3.1 Conforming utilization
The turbomolecular pump is intended for generating a vacuum. It is suited for
non-corrosive processes only.
The turbomolecular pump must be bolted to a rigid vacuum system and
connected to a suitable backing pump.
The turbomolecular pump must only be operated with correspondingly specified frequency converters, the special connecting cables and mounting bolts.
Both pump and frequency converter are intended for being operated within
closed rooms.
The use of any accessories which have not been specified by Oerlikon
Leybold Vacuum is only allowed after approval by Oerlikon Leybold Vacuum.
3.1.1 Non-conforming utilization
Non-conforming utilizations for both pump and frequency converter are
among others:
n Pumping of gases and vapours for which the materials of the pump are
unsuitable.
n Operation in connection with processes in which GaAr (gallium arsenide)
is being pumped.
n Pumping of gas mixtures with an oxygen content of > 21%.
n Pumping of corrosive gases and dust containing gases without reverting
to purge gas operation.
n Pumping of condensable vapours without suitably controlling the temperature of the pump. Upon compression within the pump, these vapours
may condense or form deposits.
n Pumping of dusts and solids without the use of suitable screens and filters.
n Operation at an inadmissibly high forevacuum pressure.
n Operation at inadmissibily high gas loads.
n Utilization of both pump and frequency converter in explosion hazard
areas.
n Non-compliance of the specified maintenance and servicing intervals for
both pump and frequency converter.
n Operation of the pump and drive electronics in environments which
demand protection type IP 54 (T 1600 and TW 1600) or IP 67 (T 1601) or
higher and where the installation site is over 1000 m the above sea level.
n Utilization in systems and pump systems in which the pressure may
exceed 1.4 bar abs.
n Operation with an inadequately mounted pump.
n Operation without having flanged the pump to the system or without
having connected it to a suitable backing pump.
16
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Installation
n Operation with additional heat sources involving thermal radiation, thermal
conduction via the high vacuum or the forevacuum flange, strong magnetic fields or very hot process gases, for example.
n Use in systems in which impact stress and vibrations or periodically
occurring forces affect pump, frequency converter and cables.
n Operation on moving system or system components (locks or movable
pump systems, for example).
n Operation at vibration absorbers and vacuum components (gate valves,
valves) which are not capable of sustaining the specified deceleration
torque should the pump rotor seize.
n Stepping on pump, add-on parts, drive electronics, flanges and cables to
climb onto the system.
n Fitting of add-on parts to the forevacuum flange which cause an inadmissible high load.
n Removing, covering or obstructing warning notices.
n Standstill or storing of pump and drive electronics without suitable sealing-off and drying. Storing in a humid atmosphere can cause corrosion.
n Conversions, manipulations and maintenance work by personnel not
authorised by Oerlikon Leybold Vacuum.
Any non-conforming utilisation of pump, frequency converter and accessories can result in severe injury and cause damage to components.
3.2 Operating environment
The maximum permissible ambient temperature is 45 °C (113 °F). Do not
expose the pump or the frequency converter to dripping or spraying water.
If the pump is used within a magnetic field, the magnetic induction at the surface of the pump housing may not exceed:
B = 5 mT if impinging radially and
B = 15 mT if impinging axially.
WARNING
Ambient temperature
Magnetic field
Install shielding equipment as appropriate if these values are exceeded.
The standard pump version without frequency converter is resistant to radiation up to 103 Gy.
Radiation
Places of installation up to 1000 m above sea level (3300 ft) are possible
without restrictions. At altitudes over 1000 m heat dissipation by the ambient
air is impaired. Please consult us.
Places of installation
The frequency converter must not be operated in explosive gas atmospheres.
——————————————
1 mT (milliTesla) = 10 G (Gauß)
1 Gy (Gray) = 100 rad
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
17
Installation
High-vacuum flange
Forevacuum flange
Purge gas connection
(here with screwed on filter)
Sub-D connector X7,
for RS 232 interface
Connection for the
water cooling
Sub-D connector for
Profibus
Sub-D connector X1 for
remote control
Mains connection X10
STOP push-button
START push-button
Fig. 3.1
Connections and controls
3.3
Attach the pump to the vacuum chamber
NOTICE
Never touch the rotor. Touching the rotor may cause injury and damage
the rotor bearing.
WARNING
The high-vacuum flange must be solidly mounted to the vacuum chamber. Observe Safety Information 0.1.6.
Remove the transport seal from the intake flange and remove the desiccant.
Pay attention to maximum cleanliness when connecting.
Set the pump slowly and cautiously onto the flange! Axial shocks may
damage the bearings.
18
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Installation
Correct
NOTICE
Leave the inlet screen installed
as shown.
Installing the inlet screen upside
down may lead to contact between inlet screen and rotor
during fast venting of the pump
Wrong
Fig. 3.2 Inlet screen
If the pump should suddenly seize, an ensuing deceleration torque of up to
4500 Nm will have to be absorbed by the system.
Torque when the
rotor seizes
In most applications the pump is flanged to the high-vacuum flange at the
apparatus. The pump can be mounted and operated in any desired attitude.
Use exclusively flange connecting components and fittings which have been
manufactured in accordance with DIN 28403, DIN 28404, ISO 1609 (KF- and
ISO-K flange connections) or ISO 3669 (CF flange connections).
The flange material to which the pump is bolted, must have at operating temperature a minimum strength specification of 150 N/mm2.
Operation with vibration absorber
The pump is precision balanced and is generally operated without a resonance damper. To decouple extremely sensitive equipment and to prevent
transfer of external vibrations to the pump a special resonance damper is
available for mounting at the high-vacuum flange.
In this case mount the turbomolecular pump separately. A vibration absorber
cannot reliably sustain the high deceleration torque in case of a rotor seizure.
If additional mounting is not possible, then the pump must be protected by a
suitable shield during operation.
If several turbomolecular pumps are installed to the vacuum chamber of the
same system, there is the risk of interference (vibration interference between
the pumps). If such a risk exists please contact Oerlikon Leybold Vacuum
Application Support.
Vibration influence
The standard mounting arrangement for the pump is adequate to ensure
earthquake protection. If required mount the system to the floor or the walls.
Earthquake protection
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
19
Installation
DN 200/250 ISO-F flange connection with clearance hole
Nut
Number of bolts
ISO-F flange
Minimum bolt
strength
Vacuum sealing disk consisting
of centering ring and O-ring
with outer support ring
ISO-F flange
12 x M10
yield strength
> 600 N/mm2
Recommended bolt
M10 x 50
Bolt quality
stainless steel bolts
8.8 or
A4-80
Fastening torque
35+5 Nm
Bolt
The fastening torque levels apply
to lubricated threads.
Number of bolts
12 x M10
Minimum bolt strength
yield strength
> 600 N/mm2
Minimum screw-in
depth L2
21,5
L1
L2
DN 200/250 ISO-F flange connection with blind hole thread
13 mm for steel
18 mm for aluminium
Recommended
bolt
M10 x 35
M10 x 40
Bolt quality
stainless steel bolts
8.8 or
A4-80
Fastening torque
35+5 Nm
Fig. 3.3 Mounting the DN 200/250 ISO-F high-vacuum flange
Install an inlet screen
NOTICE
Foreign objects which enter the pump through the intake would cause
serious damage to the rotor. That’s why we recommend to use the
installed inlet screen. Damages caused during operation without the inlet
screen are excluded from warranty.
When installing the pump, make sure that the inlet screen is not bent. If the
inlet screen touches the rotor, the pump will be damaged upon starting it.
If dust could pass from the vacuum chamber into the pump, then a micropore filter must be installed between the vacuum chamber and the pump.
Flange mounting for ISO-F flanges
When flanging on the high vacuum connecting flange, place the O-ring on
the centering ring. The O-ring must remain in place smooth and untwisted.
Thereafter put the outer ring in place.
Mount the turbomolecular pump according to Fig 3.3 and tighten the bolts
crosswise step-by-step.
20
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Installation
DN 250 CF flange connection with clearance hole
49
Copper gasket
Bolt with washer and nut
Pump housing with
CF flange
Number of bolts
32 x M8
Minimum bolt strength
yield strength
> 450 N/mm2
Recommended
bolt
M8x60 – ISO 4014
Bolt quality
stainless steel bolts
8.8 or
A2(A4)-70
Fastening torque
15+2 Nm
The fastening torque levels apply
to lubricated threads.
DN 250 CF flange connection with blind hole thread
Number of bolts
32 x M8
Minimum bolt strength
yield strength
> 450 N/mm2
24,5
L1
L2
Copper gasket
Stud bolt with washer
and nut
Pump housing with
CF flange
Minimum screw-in
depth L2
Recommended bolts
for steel flanges
12 mm for steel
M8x35 – DIN 835
L1 = 51 mm
Bolt quality
stainless steel bolts
8.8 or
A2(A4)-70
Fastening torque
15+2 Nm
Fig. 3.4 Mounting the DN 250 CF high vacuum flange
The contact surfaces of pump housing, vacuum system and centering
ring must be free of grease and dry so as to ensure adequate strength in
case the rotor should seize.
NOTICE
When using clamped flange connections with components above the
housing or when reducing the diameter (e.g. from DN 200 to DN 160),
sudden twisting of the entire pump can be experienced.
WARNING
Flange mounting for CF flanges
Before fitting, check to ensure that the sealing edge is undamaged. Do not
touch the copper gasket and the sealing edge with your bare hands.
The contact surfaces of pump housing, vacuum system and centering
ring must be free of grease and dry so as to ensure adequate strength in
case the rotor should seize.
NOTICE
Mount the turbomolecular pump according to Fig 3.4 and tighten the bolts
crosswise step-by-step.
When the pump shall be baked out, the threads of the bolts should have
been lubricated with a high temperature lubricant.
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21
Installation
Owing to the deformation of the copper gasket, the fastening torque of all
bolts must be checked once more after having completed the installation
work.
CAUTION
During operation the pump can get so hot that there is the risk of suffering burns (up to approximately 80 °C). Protect the hot parts against
being touched.
3.4 Forevacuum connection
The high vacuum pressure level which can be achieved is a function of the
volume of gas flow Q to be pumped and the forevacuum pressure.
Forevacuum pump
We recommend using dry-running Scroll vacuum pumps or TRIVAC rotary
vane pumps for this purpose.
Connect the clean forevacuum line. The connecting flanges must be clean
and undamaged. The cross section of this line must be so wide that safe
operation of the pump can be ensured.
DANGER
The forevacuum line must be tight. Hazardous gases can escape at leaks
or the gases being pumped can react with air or humidity.
Observe Safety Information 0.4.5.
Fig. 3.8 is a schematic diagram of a pump system incorporating a turbomolecular pump and a TRIVAC forevacuum pump with an anti-suckback valve.
Safety valve
A separate safety valve must be provided for oil-sealed forevacuum pumps
without an anti-suckback valve. The safety valve prevents oil flowing back
from the forevacuum pump into the turbomolecular pump when the system is
not running.
Adsorption trap
To ensure that the forevacuum space at the turbomolecular pump is kept
largely free of oil vapors during operation, as well, we recommend installing
an adsorption trap in the forevacuum line. Alternatively purge the forevacuum
line with inert gas. In this case the pressure in the forevacuum line must be
over 10-2 mbar.
Provide a roughing line to achieve the shortest cycle times.
Ensure that the pump is sufficiently isolated against vibrations generated by
the forevacuum pump.
No forces from the piping system may be allowed to affect the turbomolecular pump. Support the piping correspondingly or decouple through flexible
joints.
22
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Installation
3.5 Connect the cooling
The TURBOVAC needs to be cooled with water.
Cooling water specifications
Feed temperature
15 - 42 °C
59 - 108 °F
Feed pressure
3 - 7 bar absolute
Cooling water requirement
Appearance
See Fig. 3.5
colourless, clear, free of oils and greases
Sediments
< 250 mg/l
Particle size
< 150 µm
pH value
Overall hardness (total alkaline earths)
7 - 8.5
max. 20°dH
German hardness scale
(= 3.57 mmol/l)
Connecting the cooling water
Screw on the cooling water lines.
Adjust the cooling water temperature so that the formation of condensate is
avoided. The T 1601 is not sensitive to condensate.
Avoid formation of condensate
The cooling water supply must be switched on and off together with the
pump.
3.6 Connect the purge gas and venting valve
Regarding suitable gases, refer to Section 4.1, for the venting facility, refer to
Section 4.6.
The TURBOVAC is equipped with a purge gas and venting valve.
The purge gas and venting valve can only be opened via control connector
X1 or the Profibus interface. Thus when operating the pump via the START
and STOP push-buttons no purge gas and venting gas may be admitted into
the pump via the purge gas valve.
When having to decide which gases need or not need to be pumped with
purge gas we are available to provide assistance.
When operating the pump with purge gas, the pump needs to be vented via
the purge gas valve after having shut down the pump, see Section 4.6.
Consider the additional purge gas flow when selecting a suitable backing
pump.
The pressure in the pump must not exceed 1400 mbar (0.4 bar overpressure). Observe Safety Informations 0.1.2 to 0.1.5.
WARNING
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23
Installation
60
l/h
Cooling water flow
50
40
30
20
10
0
15
20
25
30
35
40
45
°C
Cooling water temperature
Fig. 3.5 Cooling water requirements
Maximum relative humidity
20 %
30 %
40 %
45
°C
50 %
Maximum ambient temperature
40
Minimum coolant inlet temperature at
which condensation does not yet
occur, as a function of maximum room
temperature and maximum relative
humidity.
Example:
25 °C
Max. ambient temperature
Min. coolant inlet temperature 17 °C
⇒ Max. relative humidity
60%
60 %
70 %
35
80 %
90 %
100 %
30
25
20
5
10
15
20
Minimum coolant inlet temperature
Fig. 3.6 Dewpoint diagram
24
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25
°C
30
Installation
61
73,5
T 1600 and TW 1600
T 1601
Fig. 3.7 Pump side plug of the mains cord
3.7
Electrical connection
Observe Safety Informations 0.2.
WARNING
In the case of all electrical connections the plugs can be protected against
coming loose on their own when using the right kind of plug.
Insert the mains cord at X10 and connect it to the mains.
Mains cord
In order to protect the mains cord against coming loose, use the supplied
mains cord or a plug in line with the recommendations provided in Fig. 3.7.
T/TW 1600
Compliance with IP 54 is only ensured with all plugs in place and only when
using suitable plugs.
Compliance with protection
T 1601
The plugs are sealed on delivery. Remove the caps only when a plug is used.
The plugs on the cables must be suitable for the type of protection IP 67.
When no operation with purge gas is required you may operate the pump via
the START and STOP pushbuttons; see Section 4.
How to connect the control connector X1 is described in Section 4.3.1.
When the pump is being operated via the control connector X1, it can no
longer be operated via the START and STOP pushbuttons.
Control connector X1
For information on the Profibus interface see Section 4.3.3. When the pump
is being operated via the Profibus interface, it can no longer be operated via
the START and STOP pushbuttons or via the control connector X1.
Profibus
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25
Installation
1
2
3
4
5
6
7
8
9
10
Turbomolecular pump
Forevacuum gauge port
Forevacuum pump
Resonance damper
Adsorption trap
Forevacuum valve
Purge gas and venting valve
High-vacuum valve
Valve in the roughing pump line
Frequency converter
— — — —
Roughing line;
recommend to achieve the shortest
possible cycle times
Fig. 3.8 Schematic of a turbomolecular pump system
Normal
operation
LED
is green
Pump
has
stopped
—
LED flasLED
hes 1x red
flashes
& 2x green 2x red and
1x green
LED flashes 1x red
&1x green
LED
flashes red
2 3 4 ..
1
LED
flashes
green
Fault
1
Run-up
or shut
down
Warning
2 3 4 ..
.
Normal
.
Operating
mode
LED
LED
is red
LED mains (power)
Lights up green when
applying mains power
TURBOVAC is ready to operate
STOP push-button
START push-button
Fig. 4.1 LEDs and controls
26
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Operation
4
Operation
The pump may be operated in three different ways:
1. Via the START and STOP push-buttons. However, in this mode no
purge gas may be admitted and the pump can not be vented via the
purge gas valve.
2. Via control connector X1; see Section 4.3.1. When the pump is being
operated through the control connector X1, it can then no longer be operated using the START and STOP push-buttons.
3. Via the Profibus interface; see Section 4.3.3. When the pump is being
operated through the Profibus interface, it can then no longer be operated
using the START and STOP push-buttons nor can it be controlled through
the control connector X1.
4.1 Media compatibility / purge gas
The TURBOVAC is suitable for pumping air and clean gases.
If reactive gases in low concentrations must be pumped operate the pump
with purge gas.
We would be glad to consult with you as regards the media which can safely
be handled with this unit.
Install a micropore filter when pumping media which contains dust.
Suited gases
Suited for venting or purging are all gases,
n which will not cause corrosion or pitting in aluminium and steel and
n which in connection with process deposits in the pump will not cause corrosion or sticking.
For venting and as the purge gas we recommend inert gases like nitrogen or
argon. The temperature of these gases should be between 5 °C and 80 °C,
max. relative humidity should not exceed 10 ppm.
The gas must be clean.
In individual cases and after consultation also dry, filtered, oil-free air or filtered ambient air may be used (filter mesh < 1µm).
Change the filters after some time, at least annually.
4.2 Start-up
Turbomolecular pumps which were not operated for a period of over 12
months should be returned to us. For more information on this please
contact your local sales partner.
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
27
Interfaces
2 3 4 ..
.
1
2 3 4 ..
.
1
Terminals for the shield
13
25
1
14
Control connector X1;
pin assignments see page 21
Fig. 4.2 Control connector X1
4.3
Interfaces
4.3.1 Control connector X1
Observe the compliance with the type of protection, see Section 3.7.
Connect control connector X1. The pin assignments are provided on next
page. Given in Fig. 4.3 is an example of how to connect a remote control
unit. Instead of switches, relays may also be used in the remote control unit.
For an overview on the relays see below.
NOTICE
Pin 6 (+15 V) is not protected against external voltages exceeding 15 V.
Observe the EMC requirements when connecting the control cables.
Shield
28
In the case of exceptionally high electromagnetic interference levels we
recommend that you additionally connect the shield of the control cables to
the shield terminals. For this strip the insulation on the control cable by about
1 cm and connect the cable at this point to the terminal.
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
Interfaces
X1
Remote control via contacts
(switch, key or relay)
1 REMOTE
2 START
ST
AR
T
ST
O
P
3 STOP
and error reset
4
Input reference ground for
control inputs
5
Reference ground for + 15 V
high level (Pin 6 of X1)
6 + 15 V
R
G
E
15 VENT
PU
VE
N
T
14 PURGE
Pump
Terminal for the shield
Connection to a PLC
X1
The resistor between pin 3 and pin 6 (1 to 2 kOhm) is optional.
1 REMOTE
With the resistor in place the pump will be shut down when
the control cable is interrupted or when the controller fails,
without the resistor, the pump will continue to run.
2 START
3 STOP
1 - 2 kΩ
and error reset
4
Input reference ground for
control inputs
5
Reference ground for + 15 V
high level (Pin 6 of X1)
6 + 15 V
14 PURGE
PLC with 0/24 V level
(0 = low, 24 V = high)
15 VENT
Pump
Terminal for the shield
Fig. 4.3 Example of how to connect a remote control
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
29
Interfaces
Relay functions
Pin Relay
Possible cause
18
Warning n.o.
Motor power of the pump is too great due to
excessively high pressures or gas throughput.
19
Warning com.
20
Warning n.c.
Because of excessive loading the pump is not
able to maintain its nominal speed.
The temperature at one bearing is too high.
The temperature of the motor is too high.
The self test of the frequency converter which
is run upon applying the mains power will indicate that maintenance is due.
“Too high” means that the measured values are significantly higher than those for normal operation and that in the case of further operation the operator will
have to expect that the pump will
shut down.
The relay is energised when one
or more warnings are present.
Upon applying the mains power it was found
that the clock is faulty (possibly an exhausted
battery).
8
Fault n.o.
Pump was overloaded for quite some time.
9
Fault com.
The minimum speed was not attained within a
certain time.
21
Fault n.c.
Speed has dropped below the minimum.
As soon as this relay picks up the
pump is shut down.
Note: The relay picks up when
the pump is in undisturbed operation.
Motor or bearing temperatures have exceed
the limit.
Internal electrical fault.
10
Normal n.o.
11
Normal com.
23
Normal n.c.
Rotor speed has attained 95% of its nominal
speed (= normal operation).
The relay picks up as soon as the
normal operation threshold is
attained.
Speed of the pump < 3 Hz
(Pump has arrived at standstill)
The relay picks up when the
pump has arrived at standstill
(f < 3 Hz).
12
Pump running n.o.
13
Pump running com.
25
Pump running n.c.
30
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
Interfaces
Pin assignment for the control connector X1 (female)
Assignment
Description for the signal
1
Floating control input
Remote control [H]
must be [H] so that the inputs Start [H], Stop [H],
purge gas [H], venting [H] are enabled,
disables START/STOP via the push-buttons
2
Floating control input
Start [H]
High pulse from prog. cont. starts the pump (pulse
3
Floating control input
Stop [H]
4
Floating
Reference ground for the floating control inputs
5
Power supply ground
Reference ground for prog. cont. H level (pin 6)
6
Prog. cont. H signal
Prog. cont. H level with reference to pin 5,
7
Analog output
Programmable analog output, range: 4 to 20 mA
adjustable to; bearing temperature top / bottom, motor current, speed
default: bearing temperature top (4 mA = 0 °C / 20 mA = 100 °C)
Set-up: see parameter 30 (function) and parameter 31 (range),
can be set up through Profibus interface or service PC via RS 232 (X7)
8
N.O. contact
Error relay
General error indication; active when no error is present
9
Common contact
Error relay
General error indication
10
N.O. contact
Normal operation relay
Full speed almost reached; activated when setpoint
frequency has been reached
11
Common contact
Normal operation relay
Full speed almost reached
12
N.O. contact
Pump running relay
Active at speeds < 3 Hz
13
Common contact
Pump running relay
Active at speeds < 3 Hz
14
Floating control input
purge gas [H]
Prog. cont. H activates purge gas valve
15
Floating control input
Venting [H]
Prog. cont. H activates venting valve
16
Not used
17
Analog ground
Reference ground for analog input and output (pin 7 and pin 24)
18
N.O. contact
Warning relay
General error indication; active when warning is present
19
Common contact
Warning relay
General error indication
20
N.C. contact
Warning relay
General error indication; active when no warning is present
21
N.C. contact
Error relay
General error indication; active when no error is present
22
Floating control input
Standby [H]
Enables standby speed (standby speed is defined
through parameter 150; see list of parameters)
23
N.C. contact
Normal operation
Full speed almost reached; active when setpoint
relay frequency has been reached
24
Analog input
(see Fig. 4.4)
Speed setpoint
0 V = minimum speed (parameter 20, default 300 Hz)
10 V = nominal speed (parameter 24, default 500 Hz)
Input open : Nominal speed, proportional increase
25
N.C. contact
Pump running relay
Active at speeds < 3 Hz
S
Shield
Connected to chassis ground and PE
Caution: do not use for potential equalisation or ground connection.
Pin
Prog. cont. = programmable control
≥ 1 s)
High pulse from prog. cont. stops the pump (pulse ≥ 1 s)
≥ +15 V, 80 mA max.
[H] = SPS high level 13 ... 30 V
[L] = SPS low level 0 ... 5 V
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31
Interfaces
600
Hz
500
Speed
400
300
200
100
0
–2
0
2
4
6
8
10
V
12
Voltage
+
10 V
5 kΩ
Pin 24 is connected to an internal + 10 V supply via
a 5 k protective resistor resulting in a current of
approx. 2 mA at 0 V at pin 24. Design the control
supply correspondingly.
Ω
24
17
Pump
Fig. 4.4 Analog input
Controlling the pump’s speed
The TURBOVAC is equipped with an analog input for adjusting the pump’s
speed.
If pin 24 is not connected the normal operation speed is 500 Hz as default.
Through pin 24 you may set the normal operation speed to values between
300 and 500 Hz. No further adjustments are necessary on the pump when
wanting to use this analog input.
NOTICE
32
A dynamic speed adjustment is not permissible. The setpoint speed may
be set up only once within the given limits.
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
Interfaces
1
TxD 2
RxD 3
6
7
8
4
GND 5
9
Abb. 4.5 Pin assignment for the socket at the frequency converter (female)
(2)
(2)
(3)
(3)
(5)
(5)
TxD
RxD
GND
TURBO.DRIVE
TURBOVAC
RxD
TxD
GND
Shield
Controller
PC, for example
Fig. 4.6 Providing a RS 232 connection
4.3.2 RS 232 service interface
The integrated frequency converter is equipped with an RS 232 interface.
It is configured through the parameters according to the parameter list.
Observe the compliance with the type of protection, see Section 3.7.
The PC software "TURBO.DRIVE Server" allows convenient access by the
user to the parameters of the frequency converter.
Standards
Protocol
DIN 66020
acc. to VDI/VDE 3689
Transmission rate
9600 baud fixed
Address range
non-addressable
Max. cable length
Nominal voltage level
(see also “Standards”)
Interface connector
5m
at the receiver
logic "0": 3 ... 15 V
logic "1": - 3 ... - 15 V
9 way Sub-D type,
socket on the instrument (female)
thread UNC4-40
Note: If on the controlling side an interface in accordance with the PC standard with a 9-pole Sub-D socket is present, then a commercially available
straight through cable may be used.
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33
Interfaces
4.3.3 Profibus DP
Upon request the TURBOVAC pump may be equipped with a field bus interface Profibus DP. Through this interface, process automation equipment may
easily be hooked up in a network.
The field bus system Profibus DP is described in the standard EN 501 70
(corresponding to the previous standard DIN 19245 Part 1 and Part 3). The
engineering and functional features of the Profibus DP have been laid down
here. In the case of Profibus DP a difference is made between master and
slave units. In this case the master units define the data traffic. They transmit
data to the assigned slaves and request data from these. There exists the
possibility of operating one or several masters in a system.
The TURBOVAC pump is a slave unit and thus responds when queried by
the master. Thus it only supplies data when requested by the master to do
so.
GSD - Basic instrument data file
Documented in the GSD file are the capabilities and the scope of the performance offered by a Profibus DP unit. The file format has been laid down in
the standard so that software tools of different manufacturers may be used.
The current GSD file is on a disk which has been included with the pump. In
addition, the contents of the GSD file are documented in the Annex to these
Operating Instructions.
Connection
Observe the compliance with the type of protection, see Section 3.7.
Connect the Profibus via the Profibus DP interface; see Fig.4.7.
Terminating resistor
At the ends of the bus, a terminating resistor must be connected. This is
done by means of a special connector. The connections required for this are
present in the interface plug. For this refer to the standard.
Use the bus cable SIEMENS-SINEC-L2 for the bus.; P/N.6XV1830-0AH10.
34
Transmission rate
(in kBits/s)
Max. length of a
segment (in m)
9.6 - 93.75
1200
187.5
1000
500
400
1500
200
3000 - 12000
100
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
Interfaces
1
1
234.
..
234.
..
1
2
Bit:u
Rnxg
/:TR
M
Ga
x+x
ro s
/T
uns
x+
de z
fo u
r pP
inin
66
SSc
hih
ei
BLinLe
e
ldrm
/P/
EPE
Terminals for the shield
3
4
5
Pins3,3,5,5,66,and
8: 8:
Pins
potentialgetrennt
floating
8
9
Chassis:
PEPE
Gehäuse:
A-
Le
itLu
++
55
inn
V
eg
A: :R
Rxx
//TT
xx––
6 7
Profibus DP interface
Fig. 4.7 Profibus DP interface
The length of a segment may be extended by using RS-485 repeaters; for
example SINEC L2 Repeater RS 485; P/N 6GK1510-OAC00.
In the case of exceptionally high electromagnetic interference levels we
recommend that you additionally connect the shield of the bus cables to the
shield terminals. For this strip the insulation on the bus cable by about 1 cm
and connect the cable at this point to the terminal.
Supported Baud rates
9.6 k Baud
19.2
k Baud
45.45 k Baud
93.75 k Baud
187.5
k Baud
500
k Baud
1.5
M Baud
3
M Baud
6
M Baud
12
M Baud
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35
Interfaces
1
2 3 4 ..
.
.
1
RS 232
2 3 4 ..
LEDs
X1
High Byte Low Byte
Address switch
Fig. 4.8 Setting up the slave address
The baud rate is adjusted automatically. No parameter or switch needs to be
set.
Extended user parameter data are not required.
The sync. mode and the freeze mode are supported.
Slave address
The slave address is set up through two address switches; see Fig. 4.8.
These address switches may be accessed after removing the transparent
Plexiglas cover. After having set up the address, fit the Plexiglas cover once
more so as to maintain the IP 54 protection rating specified for the pump.
The address switches are set according to hexadecimal codes resulting in a
range from 03hex to 7Ehex (7Ehex = 126dec).
The address which has been set up will only become effective after switching
the unit on.
36
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Interfaces
Configuration (PPO types)
For the TURBOVAC, several different protocol types (PPO types) have been
implemented.
PPO type 1
Number of input and output data 6 words each = 12 byte
Identifier = 0xF3, 0xF1 (net. data assignment see VDI/VDE standard 3689,
page 29).
For the way in which the control and status words are assigned in accordance with VDI/VDE standard 3689 page 14 to page 16; see Fig. 4.9 and 4.10.
Byte 0
Parameter order or reply and 3 most
significant bits of the parameter number
Byte 1
Parameter number (Low byte)
Byte 2
Parameter index for error data
(P171 ... P174, otherwise always 0
Byte 3
Not used
Byte 4 to 7
Parameter value (high .... low)
Byte 8 and 9
Control and status word, same as for PPO type 6
Byte 10 and 11
Setpoint or actual value
(target speed; bit 6 of the control word must be set to „1“).
In the case of the word definition, the high byte is transmitted first
(Motorola standard).
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37
Interfaces
PPO type 6
Number of input and output data 1word each = 2 byte
Identifier = 0x00, 0xF0 (1 control word + 1 status word).
Control word for TURBOVAC
Bit
0
1, 2, 3, 4, 5
*Start/Stop pump
Not used
6
*Enable set point —(enable the principal setpoint (speed) in the
case of PPO type 1; set always to „0“ in the case of PPO type 6)
7
*Acknowledge error
8
*Standby speed
9
Not used
10
Enable process data (bit 0, 6, 7, 8, 11, 12)
11
*Purge gas ON
12
*Venting ON
13/14/15
Not used
* In order to activate the control function through the Profibus interface, bit
10 must be set in the case of PPO types 1 or 6. Control via the control
connector X1 or via the push-buttons is then disabled.
Status word from the TURBOVAC
Bit
38
0
Ready to switch on
1
Always 0
2
Operation enabled — (converter active)
3
Error active
4
Not used
5
Not used
6
Switch on lock
7
Temperature warning
8
Not used
9
Not used
10
Normal operation
11
Pump is running (speed over 3 Hz)
12
Maintenance is required
13
Overload warning
14
Not used
15
Not used
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
Interfaces
Parameter / Identifier / Value
PKE
IND
PWE
Process data
PZD1 PZD2 PZD3
STW HSW HSW PZD4 PZD5 PZD6 PZD7 PZD8 PZD9 PZD10
ZSW HIW HIW
(MSW) (LSW)
1st
2nd
3rd
4th
1st
2nd
3rd
4th
5th
6th
7th
8th
9th 10th
word word word word word word word word word word word word word word
PPO 1
PKE
Parameter identifier
PPO 6
IND
Index
PPO 7
PWE
Parameter value
STW
Control word
ZSW
Status word
HSW Principal setpoint
HIW
Principal actual value
Fig. 4.9 Parameter process data object (PPO Types)
0
1st word
‰ Byte 0 and 1
0
2nd word
‰ Byte 2 and 3
Parameter identifier
Bit no.
15
14
13
12
11
10
Order or reply
identifier
Parameter number
Parameter index
Bit no.
15
8
7
Array index
Parameter value
Parameter value High
(PWE1)
3rd word
Parameter value Low
(PWE2)
4th word
‰ Bytes 4 to 7
Note: Parameter values having a length of 16 bits are transmitted through parameter value low (PWE2).
Fig. 4.10 Structure of the parameter range (PKW = parameter identifier value)
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
39
Interfaces
PPO type 7
Number of input and output data 1 byte each
Identifier = 0x00, 0xB0 (1 control byte and 1 status byte)
Control byte for the TURBOVAC
Bit
0
*Start/Stop pump
1
Not used
2
Enable process data (bit 0, 4, 5, 6 and 7)
3
Not used
4
*Purge gas ON
5
*Venting ON
6
*Go to standby speed
7
*Acknowledge error
Status byte from the TURBOVAC
Bit
0
Normal operation has been attained
1
Pump is running (speed over 3 Hz)
2
Maintenance is required
3
Error active
4
Not used
5
Not used
6
Overload warning
7
Temperature warning
* In order to activate the control function through the Profibus interface, bit 2
must be set in the case of PPO type 7. Control via the control connector X1
or via the push-buttons in then disabled.
Parameter range (PKW)
Through the PKW feature it is possible to process the following:
n Operation and observation of parameters (write/read)
n Transmission and acknowledgement of spontaneous messages
The parameter range always comprises 4 words; see Fig. 4.10.
40
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Interfaces
Parameter identifier (PKE) (1st word)
The parameter identifier (PKE) is always a 16 bit value. The bits 0 to 10 (PNU)
contain the number of the desired parameter. For the meaning of each parameter see list of parameters.
Bit 11 = 0 (reserved)
Bits 12 to 15 (AK) contain the order or reply identifier.
Meaning of the order identifier for the order message (master → main
electronics or converter)
Order
identifier
0
No order
1
Query parameter value
2
3
4
5
6
7
8
9
Reply identifier
positive
negative
Meaning
0
7 or 8
1 or 2
7 or 8
Change parameter value
(word)
1
7 or 8
Change parameter value
(double word)
2
7 or 8
3
7 or 8
3
7 or 8
4 or 5
7 or 8
Change parameter value
(array, word) 2)
4
7 or 8
Change parameter value
(array, double word) 2)
5
7 or 8
Query number of array elements
6
7 or 8
Query descriptive element
(not for 181 35)
1)
Change descriptive element
(not for 181 35)
Query parameter value
(array) 2)
10
11
12
13
14
15
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41
Interfaces
Meaning of the order identifier for the reply message (main electronics or converter → master)
Reply
identifier Meaning
0
No reply
1
Transmit parameter value (word)
2
Transmit parameter value (double word)
3
Transmit descriptive element
4
Transmit parameter value (array, word) 2)
5
Transmit parameter value (array, double word) 2)
6
Transmit number of array elements
7
Order can not be executed (with error number)
8
Not authorised for PKW interface
1)
9
10
11
12
13
14
15
Depending on the order identifier only certain reply identifiers are possible. If
the reply identifier has a value of 7 (order can not be executed), then an error
number will be available under parameter value 2 (PWE 2).
Parameter index IND (2nd word)
The index complies to the Profibus standard VDI/VDE 3689.
—————————
1)
2)
42
The desired element of the parameter description is stated in IND (2nd word).
The desired element of the indexed parameter is stated in IND (2nd word).
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
Interfaces
Parameter list
No. Designation
Range
Unit
Default
Type
Access
-
-
0
-
100 - 102
-
102
u16
r
02.01.01 - 6.55.35
0.00.00
2.03.16
u16
r
0 - 510
Hz
0
u16
r
0
Not used
1
Unit identifier
2
Software version
3
Actual value of the frequency
4
Intermediate circuit voltage Uzk
0 - 100.0
0.1 V
591
u16
r
5
Actual value of the motor current
0 - 100.0
0.1 A
0
u16
r
6
Power
0 - 6553.5
0.1 W
0
u16
r
7
Actual value of the motor temperature
0 - 250
°C
23
s16
r
11
Actual value of the converter temperature
0 - 100
°C
29
s16
r
12
Operating mode
0 = Key pad or control connector
1 = Serial interface
2 = Serial interface and STOP push-button
0-2
-
0
3 Bits
r/w
13
Remote/local
0 = Local (key pad)
1 = Remote (control connector)
0-1
-
0
1 Bit
r
16
Warning temperature for the motor
0 - P133
°C
80
u16
r
17
Nominal current for the motor
0 - 31.9
0.1 A
80
u16
r
18
Nominal frequency
0 - 500
Hz
500
u16
r
19
Minimum frequency
P20 - P18
Hz
300
u16
r
20
Frequency threshold for run-up until
minimum frequency;
shutdown frequency at overload
0 - P19
Hz
280
u16
r
Motor current threshold: is checked after
P32 seconds for P17 x P12;
in case the current is exceeded:
overload warning
1 - 100
%
73 for T 1600/T 1601
100 for TW 1600
u16
r
22
Run-up time until shut down frequency (P20)
0 - P32
s
23
Pump model (T 1600 = 20)
20 - 30
-
24
Setpoint frequency
P19 - P18
25
Nominal operating factor of the setpoint
frequency P24 but > P20
21
30
Mode for the analogue output
0 = Bearing temperature, top
1 = Bearing temperature, bottom
2 = Motor current
3 = Frequency
31
Ranging S factor for the analogue output 1.0
450 for T 1600/T 1601 u16
420 for TW 1600
r
20/21
u16
r
Hz
500
u16
r/w
35 - 99
%
95
u16
r/w
0-3
-
0
u16
r/w
0 - 2.0
0.1
10
u16
r/w
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43
Interfaces
No. Designation
Range
Unit
600 - 3600
s
Default
Type
Access
32
Max. run-up time; max. overload time
34
General status;
Bit 0: bearing change
36
Start delay time
0 - 1200
s
-
u16
r/w
38
Number of start bits
0 - 65535
-
-
u16
r
40
Number of all errors
0 - 65535
-
-
u16
r
41
Number of errors relating to overloads
0 - 65535
-
-
u16
r
42
Number of errors relating to motor temp.
0 - 65535
-
-
u16
r
43
Number of errors relating to mains failures
0 - 65535
-
-
u16
r
44
Number of operating hours for the pump
0 - 167772.16
0.01 h
-
u32
r
50
Part No. of the pump
0 - 16777216
-
-
u32
r
52
Serial number of the pump
0 - 16777216
-
-
u32
r
54
Manufacturing date
0 - 1677.72.16
0.00.00
-
u32
r
56
Service date
0 - 1677.72.16
0.00.00
-
u32
r
58
Service identifier
0 - 16777216
-
0
u32
r
60
Operating hours counter
at last maintenance
0 - 167772.16
0.01 h
0
u32
r
62
Repair date
0 - 1677.72.16
0.00.00
-
u32
r
64
Repair identifier
0 - 16777216
-
0
u32
r
66
Operating hours since last repair
0 - 167772.16
0.01 h
0
u32
r
72
Inspector identifier
0 - 16777216
-
-
u32
r
84
Serial number for the converter
0 - 65535
-
-
u16
r
85
Serial number for the power supply unit
0 - 65535
-
-
u16
r
86
Option converter 1
0 - 65535
-
0
u16
r
87
Option converter 2
0 - 65535
-
-
u16
r
125
Bearing temperature top, actual value
0 - 100
°C
21
u16
r
126
Warning temperature bearing top
70
u16
r
127
Bearing temperature bottom, actual value
23
u16
r
128
Warning temperature bearing bottom
0 - P132
65
u16
r
131
Shut down temperature bearing top
0 - 100
75
u16
r
132
Shut down temperature bearing bottom
0 - 100
70
u16
r
133
Shut down temperature motor
0 - 140
100
u16
r
44
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
0 - 65535
0 - P131
0 - 100
-
800 for T 1600/T 1601 u16
720 for TW 1600
0
°C
°C
°C
°C
°C
°C
u16
r/w
r
Interfaces
No. Designation
Range
Unit
Default
Type
Access
P20 - P24
Hz
350
u16
r/w
150
Standby speed
151
Enable standby
0 = Normal operation
1 = Standby speed
0-1
-
0
u16
r/w
152
Acknowledge maintenance of moving parts
Write „1“ and reset to „0“ within 1 minute
0-1
-
-
u16
r
153
Acknowledge bearing exchange
Write „1“ and reset to „0“ within 1 minute
0-1
-
-
u16
r
160
Set clock:
Write „1“ and reset to „0“
0-1
-
0
u16
r
161
Real time seconds
0 - 59
-
-
u16
r
162
Real time minutes
0 - 59
-
-
u16
r
163
Real time hours
0 - 23
-
-
u16
r
164
Real time days
1 - 31
-
-
u16
r
165
Real time months
1 - 12
-
-
u16
r
166
Real time years
1991 - 2089
-
-
u16
r
167
Real time clock
0 - 2359
-
-
u16
r
168
Real time date
01.01.00 - 31.12.99
-
-
u32
r
171
Error number (0..39)
See Section “Error Memory”
0 - 55
-
-
u16
r
172
Error date (0..39)
See Section “Error Memory”
0 - 31.12.99
-
-
u32
r
173
Error time (0..39)
See Section “Error Memory”
0 - 23.59
-
-
u16
r
174
Error frequency (0..39)
See Section “Error Memory”
0 - 510
Hz
-
u16
r
227
Warning_bits1
See Section “Error Memory”
0 - 65535
-
-
s16
r
228
Warning_bits2; reserved
0 - 65535
-
-
s16
r
918
Active Profibus address
3 - 126
-
-
947
Current error number
0 - 55
-
0
967
Control word (USS, Profibus)
-
-
-
968
Status word (USS, Profibus)
-
-
-
Access: r: read only; r/w: read and write
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45
Interfaces
Error memory
No. Description
Shut down
Remark/Condition (P = parameter)
0
No error
—
1
Overload (load limit has been exceeded)
no
P3 < P25 x P24
2
Motor temperature too high
yes
P7 > P133
3
A mains failure has occurred
no
Mains failure during pump operation
4
Converter temperature too high
yes
P11 > 74 °C
5
The pump has been running at overspeed
no
P3 > (P24 + 10 Hz)
6
Speed has fallen below shutdown frequency
threshold at overload
yes
P20 > P3
7
Max. run-up time has been exceeded
yes
(P3 > P25 x P24) not reached in P32
8
Error in the communication
identifying the pump
yes
Internal electronic error
Temperature at bearing 1 top too high
yes
P125 > P131
10
Temperature at bearing 2 bottom too high
yes
P127 > P132
16
Max. overload time has been exceeded
yes
(P3 < P25 x P24) for longer than P32
17
No motor current
yes
19
Run-up time exceeded
yes
P20 not reached in P22
25
Overload operation
no
P5 > P17 x P21
26
Short circuit in the temperature sensor
for the top bearing
yes
P125 < 1 °C
Short circuit in the temperature sensor
for the bottom bearing
yes
P127 < 1 °C
Short circuit in the temperature sensor
for the motor
yes
P7 < 1 °C
29
Maintenance of moving parts is required
no
The TURBOVAC will indicate this warning every
48,000 operating hours.
This maintenance can only be done by Oerlikon Leybold
Vacuum Service.
31
Max. overload time has been exceeded
yes
P5 > P17 x P21 for longer than 2 x P32
9
27
28
43 to
55
Internal error
46
yes
If you experience one of the error codes 43 to 55,
you should check operation of the TURBOVAC
for safety reasons.
Please contact us in such a case.
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Interfaces
Real time clock - error memory
In pump memory block 8, the past 40 errors are saved (ring counter). This
block contains 8 bytes indicating the following (sequence MSB → LSB)
The parameter 171 (with index 0 to 39) contains the error number; see
Section „Error memory“.
The parameter 172 (with index 0 to 39) contains the date of the error (day,
month, year) in decimal code (140201 indicates Feb. 14 (20)01).
The parameter 173 (with index 0 to 39) contains the time of the error (hour,
minute) in decimal code (1345 is 13.45 hours).
Processing of the data relating to the internal clock is ensured until the year
2090.
The parameter 174 (with index 0 to 39) contains the frequency at which the
error occurred.
If one of the parameters 171 to 174 under an index is queried for the first
time, the data for this index need to be requested from the pump’s memory
first. This results in slight delay for the first access. All further accessing to
this index is performed at full speed until there are new entries in the error
memory.
Warnings relating to parameters
The parameter 227 (Warning_bits 1) has been assigned as follows:
P227
Bit Meaning
Remark
0
Motor temperature*
if P7 > P16
1
Converter temperature*
if P11 > 64
2
Temperature bearing 1 (top)*
if P125 > P126
3
Temperature bearing 2 (bottom)*
if P127 > P128
4
—
not used
5
PK communication
read or write
6
Overspeed
if P3 > (P24 + 10 Hz)
7
—
not used
8
Overload
P32 seconds after starting
if P5 > (P17 x P21)
9
Maintenance for
moving parts
if P44 >
(P60+48000h)
10
Bearing change
(Bearing temperature warning)
if P127 – P125 > 10 °C
or P125 – P127 > 6 °C
* The temperatures stated are the upper warning levels. For the warning to be erased,
the temperatures need to be reduced by 10%.
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47
Interfaces
Acknowledging errors
An error can only be acknowledged if
n the cause for the error no longer persists (for example because the pump
has cooled down)
n the frequency of the pump has dropped below 25 Hz and
n no Start command is present.
Checklist: Control the pump via Profibus
n Profibus connected correctly?
n Profibus address set?
n Correct GSD file used? (Annex)
n Profibus slave “pump” integrated correctly?
n Bit “Enable process data” set (Bit 10 at PPO Type 1 or 6, Bit 2 at PPO
Type 7) in order to activate the control function through the Profibus interface?
n Start or stop the pump by setting or resetting Bit 0 in the control word!
48
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Operation
103
Cut-in pressure
mbar
102
101
100
0
25
50
Sv = Pumping speed of the backing pump (m3·h-1)
V = Volume of the vessel (m3)
75
Sv / V
100
h
-1
125
Fig. 4.11 Determining the cut-in pressure for a TURBOVAC when evacuating large volumes
4.4 Switching on
Open the cooling water and purge gas supplies.
Large vessels must first be evacuated by the backing pump or a backing
pump system.
In the case of smaller vessels the cut-in pressure for the TURBOVAC may be
taken from Fig. 4.11.
Starting pressure
If SV / V > 75 [h-1] then both TURBOVAC and the backing pump may be
switched on simultaneously.
Operate the START push-button or start the pump via the interface.
Avoid the influences of shock and vibration when the pump is running.
Exposure of the pump to accelerating forces must be avoided or reduced
to such an extent that the rotor unit will not be excited by vibrations. In
the case of critical applications you must consult our Applications Dept.
first.
NOTICE
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49
Operation
4.5 Shutting down
Operate the STOP push-button or switch the pump off via its interface.
Venting
In order to avoid any damaging back-diffusion of aggressive gases or particles the pump should be vented after shut-down.
When the system is not operating, ensure that neither ambient air nor cleaning media can enter the pump.
Formation of condensate
Immediately after switching off the TURBOVAC also shut off the cooling water
supply so as to prevent the formation of condensate by the pump.
4.6 Venting
Refer to Section 4.1 for suited gases.
Venting methods
There are three different methods of venting the turbomolecular pump.
In the case processes requiring a purge gas, the pump must be vented via
the purge gas and venting valve when shutting the pump down.
When additionally venting the vacuum chamber, the venting function of the
purge gas and venting valve must be opened before opening the chamber
valve. This will ensure the presence of a higher pressure in the area of the ball
bearings compared to the remaining vacuum area. This will prevent particles,
dust or aggressive gases from being forced through the bearings into the not
yet vented motor chamber of the pump.
Cautious venting of the pump is possible from the high vacuum side, since
here the bearing forces will be lowest. When doing so, no free jet of gas must
be allowed to form on the rotor so as to avoid exposing the rotor to additional forces.
When venting the pump through its foreline connection, neither oil nor particles may be entrained in the gas flow from the forevacuum side into the
pump.
Speed
Pressure rise curve
Particles
Speed of the pressure rise
All turbomolecular pumps may be vented at full speed. However, the pressure must not increase faster than specified through the pressure rise curve.
The pump must be vented significantly slower when there is the risk of particles entering into the pump from the process. During venting, the flow must
be of the laminar type in both the vacuum chamber and the turbomolecular
pump.
The speed of the pressure rise during venting of the running pump will greatly
influence the load on the rotor/stator pack and the bearings. The slower the
pump is vented, the longer the service life of the bearings will be.
The pump must not be vented to pressures above atmospheric pressure.
50
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Operation
103
mbar
Forevacuum pressure
102
10
1
10-1
10-2
0
5
10
15
20
25
s
30
Time
Fig. 4.12 Maximum rise in pressure
4.7 Bakeout
For TURBOVACs with CF flange
If pressures in the range of 10-8 mbar or below are to be developed, the
vacuum chamber and the components installed therein will have to be baked
out. In addition, the TURBOVAC can be baked out using the flange heater
provided for this purpose.
Protect the rotor against intensive, direct heat radiation. When baking out at
the forevacuum side – at a sorption trap, for example – ensure that the components attached direct are not heated to more than 100 °C (212 °F).
The forevacuum pump must be in operation so as to eliminate the vapors
liberated at the sorption trap.
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51
Operation
4.8 Removing the pump from the system
Shut down the pump and vent as described in Sections 4.5 and 4.6.
DANGER
If the pump has previously handled hazardous gases, implement the proper precautionary measures before opening the intake or exhaust connection.
Observe Safety Informations 0.4.6.
If the pump previously handled corrosive gases, then allow the purge gas to
flow for as long as possible before detaching the pump from the system.
Disconnect the pump only when it has come to a full stop.
Hazardous gases
Deposits
Desiccant
The pumps may be contaminated with process gases. These gases may be
toxic and hazardous to health. In addition, deposits with similarly dangerous
properties may have formed. Many of these gases and deposits form acids
when they come into contact with humid air. This will result in serious corrosion damage to the pump.
To avoid health hazards and corrosion damage when the pumps are
detached from the system, fasten a container of desiccant under the transport cover of the high-vacuum connection and then close the pump immediately at all flange connections. Store the pump, with a desiccant, in an airtight PE bag.
We recommend to use the seal kit for the TURBOVAC; Ref. no. see Section
1.3.
Corrosion damage due to faulty packing will nullify the guarantee.
Pack the pump so that it cannot be damaged during shipping and storage.
Pay particular attention to protection for the flanges and the electrical plug.
Observe the instructions in Section 5.2 if you forward the pump to Oerlikon
Leybold Vacuum.
52
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Maintenance
5
Maintenance
We recommend a standard bearing exchange after 20 000 to 25 000 hours
of operation.
We recommend to change the rotor after 80,000 hours of operation or after
20,000 starts/ stops or cycles at the latest.
Standard bearing exchange
Rotor exchange
Such maintenance works can only be done by the Oerlikon Leybold Vacuum
Service. If required contact the Oerlikon Leybold Vacuum service center
nearest to your location. You can find the address on our internet page
www.oerlikon.com.
At high pump loads - for example during cyclic operation, at high gas
throughputs or at high ambient temperatures - the aforementioned maintenance work should be carried forward. Please consult Oerlikon Leybold
Vacuum for recommendations.
Observe Safety information 0.1.7.
WARNING
Depending on the degree of contamination of the purge gas used the filter
will clog and will have to be exchanged (our experience indicates that this will
become necessary after 1 to 6 months).
Purge gas filter
When an adsorption trap is used, regenerate or renew the adsorption agent
regularly; refer to the operating instructions provided with the trap.
Adsorption trap
5.1 Cleaning
If required clean the turbomolecular pump of dust with a dry cloth.
Cleaning the frequency converter internally
The converter essentially requires no servicing since it contains no components which could be adjusted.
Depending on the installation particulars and the ambient conditions, the
converter may collect grime (dust, moisture) on the inside. Such contamination can lead to malfunctions, overheating or short circuits and will have to be
avoided to the maximum extent possible. The Oerlikon Leybold Vacuum
Service Department can clean the converter. We recommend adhering to a
cleaning interval of about five years.
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
53
Maintenance
Contamination
Form
5.2 Oerlikon Leybold Vacuum service
Whenever you send us in equipment, indicate whether the equipment is contaminated or is free of substances which could pose a health hazard. If it is
contaminated, specify exactly which substances are involved. You must use
the form we have prepared for this purpose.
A copy of the form has been reproduced at the end of these Operating
Instructions: “Declaration of Contamination for Compressors, Vacuum Pumps
and Components”. Another suitable form is available from www.oerlikon.com
→ Oerlikon Leybold Vacuum → Documentation → Download Documents.
Attach the form to the equipment or enclose it with the equipment.
This statement detailing the type of contamination is required to satisfy legal
requirements and for the protection of our employees.
We must return to the sender any equipment which is not accompanied by a
contamination statement.
54
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Troubleshooting
6
Troubleshooting
Fault
Possible cause
Remedy
TURBOVAC will
not start.
Mains power has not been applied or is out of
limit.
Check mains voltage and mains cord.
The message
„Warning“ is indicated.
The self test of the frequency converter which is
run upon applying the mains power will indicate
that maintenance is due.
We recommend that you have the bearings
exchanged after 20,000 to 25,000 operating hours
and the rotor after 80,000 operating hours.
Contact us for more information on this.
The “warning” may be indicated after less operating
hours; it may be ignored in this case.
Upon applying the mains power it was found
that the clock is faulty (possibly an exhausted
battery).
Contact Oerlikon Leybold Vacuum Service.
The temperature at one bearing is too high.
Check the cooling water supply. Possibly plan with
OLV an exchange of the bearings.
The temperature of the motor is too high.
Check loading of the pump and reduce the load to
acceptable levels. Check cooling water supply.
Motor power of the pump is too great due to
excessively high pressures or gas throughput.
Check loading of the pump and reduce the load to
acceptable levels. Check cooling water supply.
Because of excessive loading the pump is not
able to maintain its nominal speed.
Check loading of the pump and reduce the load to
acceptable levels.
Internal electrical fault.
Contact Oerlikon Leybold Vacuum Service.
The minimum speed was not attained within a
certain time.
Check loading of the pump and reduce the load to
acceptable levels.
Speed has dropped below the minimum.
Check loading of the pump and reduce the load to
acceptable levels.
Pump was overloaded for quite some time.
Check loading of the pump and reduce the load to
acceptable levels. Contact OLV Service.
Motor or bearing temperatures have exceeded
the limit.
Contact Oerlikon Leybold Vacuum Service.
Unbalanced rotor.
Balance the pump (OLV Service only).
Failed bearing.
An exchange of the bearings is required (Oerlikon
Leybold Vacuum Service only).
Pump is running at the resonance frequency of
the remaining system.
Change the mass of the system or fit vibration
absorbers for decoupling the vibrations.
The
TURBOVAC shuts
down with the
message “Fault”.
The TURBOVAC
produces a lot of
noise and vibrations.
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
55
Troubleshooting
Fault
Possible cause
Remedy
The TURBOVAC does not
attain its ultimate pressure.
Faulty vacuum gauge.
Check the vacuum gauge.
Contaminated gauge head.
Clean the gauge head or replace it.
Leak in the system, lines or the pump.
Leak search.
Contaminated pump.
Have the pump cleaned (OLV Service only).
Backing pump system does not provide enough
pumping speed or its base pressure is too high.
Check ultimate pressure of backing pump; if required install a larger backing pump system.
Forevacuum pressure is too high.
Check the backing pump; if required install a larger
backing pump system.
Quantity of gas too great / leak in the system.
Seal off the leak; if required install a larger backing
pump.
Profibus connected wrongly.
Connect Profibus correctly, see Fig. 4.7.
Terminating resistor forgotten.
Install terminating resistor.
Wrong bus cable used.
Use SIEMENS-SINEC-L2 bus cable.
High electromagnetic interference levels.
Connect the shield of the bus cables to the shield
terminals.
Profibus address for the pump or for one of the
pumps set wrongly.
Set Profibus address correctly: 03hex to 7EHex.
Wrong GSD file used.
Use correct GSD file (Annex)
Profibus slave “pump” integrated wrongly.
Integrate Profibus slave “pump” correctly.
Bit “Enable process data” not set.
Set bit “Enable process data” (Bit 10 at PPO Type 1
or 6, Bit 2 at PPO Type 7) in order to activate the
control function through the Profibus interface.
Bit 0 in the control word not set or set wrongly.
Start or stop the pump by setting or resetting Bit 0
in the control word.
Connectors are corroded because they are not
suitable or are not connected water-tight.
Connect the connectors in compliance with the
required type of protection (IP 54 or IP 67), see
Section 3.7.
Pump cannot
be controlled
via Profibus or
control is not
reliable.
56
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Disposal
7
Waste disposal
The equipment may have been contaminated by the process or by environmental influences. In this case the equipment must be decontaminated in
accordance with the relevant regulations. We offer this service at fixed prices.
Further details are available on request.
Contaminated parts can be detrimental to health and environment. Before
beginning with any work, first find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.
Contamination
WARNING
Separate clean components according to their materials, and dispose of
these accordingly. We offer this service. Further details are available on
request.
When sending us any equipment, observe the regulations given in Section
“5.2 Oerlikon Leybold Vacuum service”.
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
57
Our products comply with the requirements of the EC Machinery Directive (up
to December 28, 2009: 98/37/EG, from December 29, 2009: 2006/42/EG )
and fulfil the corresponding regulations laid down in the Low Voltage Directive
(LVD) (2006/95/EG) und Electromagnetic Compatibility (EMC) Directive
(2004/108/EG).
An Incorporation Declaration in accordance with the EC Machinery Directive
(2006/42/EG) is provided on the next page.
Should you require a separate copy of the Incorporation Declaration with the
current date, then please request it from
[email protected]
In order to be able to send you the proper Incorporation Declaration, we
require the part number and the serial number of the corresponding product
as well as your full address.
You can contact our technical documentation officer – Mr. Herbert Etges –
best through the following e-mail address
[email protected] .
Oerlikon Leybold Vacuum GmbH
Bonner Straße 498
D-50968 Köln
Tel.: +49-(0)221-347 1234
Fax: +49-(0)221-347 1245
[email protected]
58
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
59
60
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
Notes
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
61
Declaration of Contamination of Compressors, Vacuum Pumps and Components
The repair and / or servicing of compressors, vacuum pumps and components will be carried out only if a correctly completed declaration has
been submitted. Non-completion will result in delay. The manufacturer can refuse to accept any equipment without a declaration.
A separate declaration has to be completed for each single component.
This declaration may be completed and signed only by authorized and qualified staff.
Customer/Dep./Institute :
Address :
Person to contact:
Phone :
End user :
Reason for return:
Fax:
A. Description of the product:
Failure description:
Material description :
Catalog number:
Serial number:
Type of oil (ForeVacuum-Pumps) :
B.
1.
2.
3.
4.
Condition of the equipment
Has the equipment been used
Drained (Product/service fluid)
All openings sealed airtight
Purged
If yes, which cleaning agent
and which method of cleaning
1) If answered with “No”, go to D.
applicable please mark
Repair:
chargeable
warranty
Exchange:
chargeable
warranty
Exchange already arranged / received
Return only:
rent
loan
for credit
Calibration:
DKD
Factory-calibr.
Quality test certificate DIN 55350-18-4.2.1
Additional parts:
Application-Tool:
Application- Process:
No1)
Yes
No
Contamination :
toxic
corrosive
flammable
explosive 2)
radioactive 2)
microbiological 2)
other harmful substances
No1)
Yes
C. Description of processed substances (Please fill in absolutely)
1. What substances have come into contact with the equipment ?
Trade name and / or chemical term of service fluids and substances processed, properties of the substances
According to safety data sheet (e.g. toxic, inflammable, corrosive, radioactive)
X
a)
b)
c)
d)
Tradename:
Chemical name:
2. Are these substances harmful ?
3. Dangerous decomposition products when heated ?
If yes, which ?
2)
No
Yes
Components contaminated by microbiological, explosive or radioactive products/substances will not be accepted without written
evidence of decontamination.
D. Legally binding declaration
I / we hereby declare that the information supplied on this form is accurate and sufficient to judge any contamination level.
Name of authorized person (block letters) :
Date
17200001_002_A1
62
signature of authorized person
© Oerlikon Leybold Vacuum
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
firm stamp
Index
A
I
T
accelerating forces 8, 49
ignition 8
torque 5, 7, 17, 19, 20, 21, 22
address 4, 33, 36, 45, 48, 53, 56, 58,
64
inlet screen 8, 10, 19, 20
adsorption trap 22, 26, 53
M
venting 19, 23, 26, 27, 31, 38, 40, 50
ambient temperature 11, 17, 24
magnetic field 17
vibration 17, 19, 49, 55
B
mains cord 10, 12, 25, 55
media 3, 7, 27, 50
bakeout 51
N
baud rate 35, 36
normal operation 11, 30, 31, 32, 38, 40,
45
compound stage 10
contamination 53, 54, 57
control connector 23, 25, 27, 28, 31, 38,
40, 43
cooling water 10, 11, 23, 24, 49, 50, 55
corrosion 6, 15, 17, 27, 52
crane eyes 15
cut-in pressure 49
W
water 6, 10, 11, 17, 18, 23, 24, 49, 50,
55, 56
backing pump 10, 16, 23, 49, 55
C
V
O
overpressure 5, 23
oxygen 16
P
particles 50
PE bag 10, 15, 52
PLC 29
pressure rise 50
D
deposits 6, 7, 16, 27, 52
desiccant 10, 15, 18, 52
protection 6, 11, 16, 19, 25, 28, 33, 34,
36, 52, 54, 56
pump’s speed 32
dimensional drawings 14
purge gas 5, 7, 10, 11, 16, 18, 23, 2527, 31, 38, 40, 49, 50, 52, 53
E
push-button 18, 26, 43, 49, 50
error memory 45-47
R
F
radiation 17, 51
fault 26, 30, 55, 56
filter 7, 10, 18, 20, 27, 53
forevacuum connection 2, 22
frequency converter 6, 8, 10, 16, 17, 26,
30, 33, 53, 55
relay 11, 29, 30, 31
remote control 18, 28, 29, 31
rotor exchange 53
RS 232 3, 12, 18, 31, 33, 36
S
H
seal kit 12, 52
hazardous gases 7, 22, 52
shield 19, 28, 29, 31, 33, 35, 56
high-vacuum connection 10, 52
shocks 18
high-vacuum flange 18-20
standard bearing exchange 53
17200039_002_A1 - 10/2009 - © Oerlikon Leybold Vacuum
63
Sales and Service
Germany
Europe
Oerlikon
Leybold Vacuum GmbH
Bonner Strasse 498
D-50968 Cologne
Phone: +49-(0)221-347 1234
Fax: +49-(0)221-347 1245
[email protected]
www.oerlikon.com
Belgium
Oerlikon
Leybold Vacuum Nederland B.V.
Belgisch bijkantoor
Leuvensesteenweg 542-9A
B-1930 Zaventem
Sales:
Phone: +32-2-711 00 83
Fax: +32-2-720 83 38
[email protected]
Service:
Phone: +32-2-711 00 82
Fax: +32-2-720 83 38
[email protected]
Spain
Oerlikon
Leybold Vacuum Spain, S.A.
C/ Huelva 7
E-08940 Cornellà de Llobregat
(Barcelona)
Sales:
Phone: +34-93-666 43 11
Fax: +34-93-666 43 70
[email protected]
Service:
Phone: +34-93-666 46 16
Fax: +34-93-685 43 70
[email protected]
France
Oerlikon
Leybold Vacuum France S.A.
7, Avenue du Québec
Z.A. de Courtaboeuf 1 - B.P. 42
F-91942 Courtaboeuf Cedex
Sales and Service:
Phone: +33-1-69 82 48 00
Fax: +33-1-69 07 57 38
[email protected]
[email protected]
Sweden
Oerlikon
Leybold Vacuum Scandinavia AB
Box 9084
SE-40092 Göteborg
Sales and Service:
Phone: +46-31-68 84 70
Fax: +46-31-68 39 39
[email protected]
[email protected]
Visiting/delivery address:
Datavägen 57B
SE-43632 Askim
Oerlikon
Leybold Vacuum GmbH
Sales Area North/Northeast
Branch Office Berlin
Industriestrasse 10b
D-12099 Berlin
Phone: +49-(0)30-435 609 0
Fax: +49-(0)30-435 609 10
[email protected]
Oerlikon
Leybold Vacuum GmbH
Sales Area South/Southwest
Branch Office Munich
Karl-Hammerschmidt-Strasse 34
D-85609 Aschheim-Dornach
Phone: +49-(0)89-357 33 9-10
Fax: +49-(0)89-357 33 9-33
[email protected]
[email protected]
Oerlikon
Leybold Vacuum GmbH
Sales Area West & Benelux
Branch Office Cologne
Bonner Strasse 498
D-50968 Cologne
Phone: +49-(0)221-347 1270
Fax: +49-(0)221-347 1291
[email protected]
Oerlikon
Leybold Vacuum GmbH
Service Competence Center
Emil-Hoffmann-Strasse 43
D-50996 Cologne-Suerth
Phone: +49-(0)221-347 1439
Fax: +49-(0)221-347 1945
[email protected]
Oerlikon
Leybold Vacuum GmbH
Mobil Customer Service
Emil-Hoffmann-Strasse 43
D-50996 Cologne-Suerth
Phone: +49-(0)221-347 1765
Fax: +49-(0)221-347 1944
[email protected]
Oerlikon
Leybold Vacuum
Dresden GmbH
Service Competence Center
Zur Wetterwarte 50, Haus 304
D-01109 Dresden
Service:
Phone: +49-(0)351-88 55 00
Fax: +49-(0)351-88 55 041
[email protected]
Oerlikon
Leybold Vacuum France S.A.
Valence Factory
640, Rue A. Bergès
B.P. 107 640
F-26501 Bourg-lès-Valence Cedex
Service:
Phone: +33-4-75 82 33 00
Fax: +33-4-75 82 92 69
[email protected]
Great Britain
Oerlikon
Leybold Vacuum UK LTD.
Silverglade Business Park
Leatherhead Road Unit 2
KT9 2QL Chessington, Surrey
(London)
Sales:
Phone: +44-13-7273 7300
Fax: +44-13-7273 7301
[email protected]
Service:
Phone: +44-20-8971 7030
Fax: +44-20-8971 7003
[email protected]
Italy
Oerlikon
Leybold Vacuum Italia S.r.l.
Via Trasimeno 8
I-20128 Milano
Sales:
Phone: +39-02-27 22 31
Fax: +39-02-27 20 96 41
[email protected]
Service:
Phone: +39-02-27 22 31
Fax: +39-02-27 22 32 17
[email protected]
Switzerland
Oerlikon
Leybold Vacuum Schweiz AG
Leutschenbachstrasse 55
CH-8050 Zürich
Sales:
Phone: +41-44-308 40 50
Fax: +41-44-302 43 73
[email protected]
Service:
Phone: +41-44-308 40 62
Fax: +41-44-308 40 60
[email protected]
America
USA
Oerlikon
Leybold Vacuum USA Inc.
5700 Mellon Road
USA-Export, PA 15632
Phone: +1-724-327-5700
Fax: +1-724-325-3577
[email protected]
Sales:
Eastern & Central time zones
Phone: +1-724-327-5700
Fax: +1-724-333-1217
Pacific, Mountain, Alaskan &
Hawaiian time zones
Phone: +1-408-436-2828
Fax: +1-408-436-2849
Service:
Phone: +1-724-327-5700
Fax: +1-724-325-3577
Latin America
Oerlikon
Leybold Vacuum USA Inc.
Brazilian Office
Av. Dória 360 cj. 12 Campo Belo
04635-070 São Paulo SP BRAZIL
Sales:
Phone: +55 11-3554 3117
Fax: +55 11-3554 3117
[email protected]
LV_10332_2009
Oerlikon
Leybold Vacuum USA Inc.
5700 Mellon Road
USA-Export, PA 15632
Phone: +1-724-327-5700
Fax:
+1-724-325-3577
[email protected]
P.R. China
Oerlikon
Leybold Vacuum (Tianjin)
International Trade Co. Ltd.
Beichen Economic
Development Area (BEDA),
No.8 Western Shuangchen Road
Tianjin 300400
China
Sales and Service:
Phone: +86-22-2697 0808
Fax: +86-22-2697 4061
Fax: +86-22-2697 2017
[email protected]
[email protected]
[email protected]
Oerlikon
Leybold Vacuum
(Tianjin) Co. Ltd.
Beichen Economic
Development Area (BEDA),
No.8 Western Shuangchen Road
Tianjin 300400
China
Sales and Service:
Phone: +86-22-2697 0808
Fax: +86-22-2697 4061
[email protected]
[email protected]
[email protected]
Oerlikon
Leybold Vacuum (Tianjin)
International Trade Co. Ltd.
Shanghai Branch:
No.33
76 Fu Te Dong San Road
Waigaoqiao Free Trade Zone
Shanghai 200131
China
Sales and Service:
Phone: +86-21-5064-4666
Fax: +86-21-5064-4668
[email protected]
[email protected]
[email protected]
Oerlikon
Leybold Vacuum (Tianjin)
International Trade Co. Ltd.
Guangzhou Office and
Service Center
1st F, Main Building
Science City Plaza,
No.111 Science Revenue,
Guangzhou Science City
(GZSC) 510663, Guangzhou,
China
Sales:
Phone: +86-20-223 23 980
Fax:+86-20-223 23 990
[email protected]
[email protected]
[email protected]
Oerlikon
Leybold Vacuum (Tianjin)
International Trade Co. Ltd.
Beijing Branch:
1-908, Beijing Landmark Towers
8 North Dongsanhuan Road
Beijing 100004
China
Sales:
Phone: +86-10-6590-7622
Fax: +86-10-6590-7607
[email protected]
[email protected]
India
Oerlikon
Leybold Vacuum India Pvt Ltd.
EL 22, J-Block
MIDC Bhosari
Pune 411026
India
Sales and Service:
Phone: +91-20-3061 6000
Fax: +91-20-2712 1571
[email protected]
[email protected]
10.09
Netherlands
Oerlikon
Leybold Vacuum Nederland B.V.
Proostwetering 24N
NL-3543 AE Utrecht
Sales and Service:
Phone: +31-(30) 242 6330
Fax: +31-(30) 242 6331
[email protected]
[email protected]
Asia
Oerlikon
Leybold Vacuum GmbH
Bonner Strasse 498
D-50968 Cologne
Phone: +49-(0)221-347 0
Fax:
+49-(0)221-347 1250
[email protected]
Japan
Oerlikon
Leybold Vacuum
Japan Co., Ltd.
Headquarter
23-3, Shin-Yokohama
3-chome
Tobu A.K. Bldg. 4th Floor
Kohoku-ku
Yokohama-shi 222-0033
Sales:
Phone: +81-45-471-3330
Fax: +81-45-471-3323
[email protected]
[email protected]
Oerlikon
Leybold Vacuum
Japan Co., Ltd.
Osaka Sales Office
3F, Shin-Osaka Terasaki
No.3 Bldg.
1-5-28 Nishi-Miyahara
Yodogawa-ku, Osaka-shi
Osaka 532-0004
Phone: +81-6-6399-6271
Fax: +81-6-6399-6273
[email protected]
[email protected]
Oerlikon
Leybold Vacuum
Japan Co., Ltd.
Tsukuba Technical Service Center
Kogyo Danchi
21, Kasuminosato,
Ami-machi, Inashiki-gun
Ibaraki-ken, 300-0315
Service:
Phone: +81-298 89 2841
Fax: +81-298 89 2838
[email protected]
[email protected]
South Korea
Oerlikon
Leybold Vacuum Korea Ltd.
3F. Jellzone 2 Tower
Jeongja-dong 159-4
Bundang-gu Sungnam-si
Gyeonggi-do
Bundang 463-384, Korea
Sales:
Phone: +82-31 785 1367
Fax: +82-31 785 1359
[email protected]
Service:
623-7, Upsung-Dong
Cheonan-Si
Chungcheongnam-Do
Korea 330-290
Phone: +82-41 589 3035
Fax: +82-41 588 0166
[email protected]
Singapore
Oerlikon
Leybold Vacuum
Singapore Pte Ltd.
1 Science Park Road
Singapore Science Park 2
#02-12, Capricorn Building
Singapore 117528
Sales and Service:
Phone: +65-6303 7000
Fax: +65-6773 0039
[email protected]
[email protected]
Taiwan
Oerlikon
Leybold Vacuum Taiwan Ltd.
No 416-1, Sec. 3
Chunghsin Road., Chutung
Hsinchu County 310
Taiwan, R.O.C.
Sales and Service:
Phone: +886-3-500 1688
Fax: +886-3-583 3999
sa[email protected]
[email protected]
www.oerlikon.com/
leyboldvacuum
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