Guide pour capteurs MEMS Murata

Guide pour capteurs MEMS Murata
!Note • Please read rating and !CAUTION (for storage, operating, rating, soldering, mounting and handling) in this catalog to prevent smoking and/or burning, etc.
• This catalog has only typical specifications. Therefore, please approve our product specifications or transact the approval sheet for product specifications before ordering.
MEMS Sensors &
Sensing Elements
Cat.No.S47E-1
S47E.pdf
Jan.20,2014
S47E.pdf
!Note • Please read rating and !CAUTION (for storage, operating, rating, soldering, mounting and handling) in this catalog to prevent smoking and/or burning, etc.
• This catalog has only typical specifications. Therefore, please approve our product specifications or transact the approval sheet for product specifications before ordering.
Jan.20,2014
Accelerometers
Murata is the global market leader in low-g acceleration sensors for automotive applications.
The extensive accelerometer product range includes high performance analog and digital
accelerometers for both safety critical automotive and industrial applications.
Murata accelerometers are based on the company’s proprietary 3D MEMS technology and offer a
number of excellent product features for the most demanding applications. The sensing element and
the measuring ASIC are assembled in a dual-in-line or dual flat lead plastic package with pins for the
surface mount and re-flow soldering. They are environmentally protected with silicone gel, resulting in
excellent performance and reliability in humid environments and at temperature cycling. In addition, the
robust sensing element design with over damped frequency response enables excellent performance
even in harsh and vibrating environments.
Series
No.
of
Axes
Range
Supply
Voltage
Temperature
Range
Sensitivity
Signal
Bandwidth
Output Type
SCA600
1
±1.5 to ±12.3g
5V
-40 to +125 °C
0.15 to 2V/g
50 to 400Hz
Analog
SCA800
1
±2g
3.3V
-40 to +125 °C
900LSB/g
50Hz
Digital/SPI
SCA1000
2
±1.7g
±4g
5V
-40 to +125 °C
1.2V/g
0.55V/g
50Hz
115Hz
Analog/Digital
SCA2100
2
±2g
3.3V
-40 to +125 °C
900LSB/g
45Hz
Digital/SPI
SCA3100
3
±2g
±6g
3.3V
-40 to +125 °C
900LSB/g
650LSB/g
45Hz
Digital/SPI
SCA100T
2
±12g
5V
-40 to +125 °C
0.17V/g
400Hz
Analog/Digital
Typical
Applications
Automotive safety critical
applications, IMU,
Industrial applications
Automotive security applications,
Industrial applications
For more information, please refer to the product datasheets available online at www.murata.com
Inclinometers
Murata inclination sensors are an optimum choice for high accuracy leveling and inclination
measurement instruments. The highest accuracy is available with the SCA103T series which uses a
differential measurement principle to compensate for all common mode error and noise effects.
With the best shock durability available on the MEMS market, Murata inclinometers provide trouble-free
measurements in moving machines, vehicles, airplanes, construction machines and handheld devices.
Series
No.
of
Axes
Range
Supply
Voltage
Temperature
Range
Sensitivity
Signal
Bandwidth
Output Type
SCA100T
2
±30°,±0.5g
±90°,±1g
5V
-40 to +125 °C
4V/g
2V/g
18Hz
Analog/Digital
SCA103T
1
±15°,±0.26g
±30°,±0.5g
5V
-40 to +125 °C
16V/g
8V/g
18Hz
Analog/Digital
SCA61T
1
±30°,±0.5g
±90°,±1g
5V
-40 to +125 °C
4V/g
2V/g
18Hz
Analog/Digital
SCA830
1
±90°, ±1g
3.3V
-40 to +125 °C
32000 LSB/g
6.25Hz
Digital/SPI
Murata Electronics Oy’s product range also includes inclination modules and sub-assemblies.
For more information, please refer to the product datasheets available online at www.murata.com
Typical
Applications
Levelling instruments
Moving machines
Rotating lasers
Construction levels
S47E.pdf
!Note • Please read rating and !CAUTION (for storage, operating, rating, soldering, mounting and handling) in this catalog to prevent smoking and/or burning, etc.
• This catalog has only typical specifications. Therefore, please approve our product specifications or transact the approval sheet for product specifications before ordering.
Jan.20,2014
Gyroscopes
Murata Electronics Oy develops and manufactures gyroscope components based on the company’s
proven 3D MEMS technology and highly integrated electronics.
Industrial gyros offer a performance level that typically has been available only for expensive module
products. The sensing elements and measuring circuitry are assembled into a pre-molded plastic dualin-line (DIL) package, protected with silicon gel and covered with a stainless steel lid. All products are
RoHS compatible and suitable for lead-free reflow soldering.
Series
SCC1300
SCR1100
No. of Axes
Range
Supply
Voltage
Temperature
Range
1-axis gyro
3-axis
accelerometer
±100°/s,±2.0g
±300°/s,±6.0g
5V analog
3.3V digital
-40 to +125 °C
1-axis gyro
±100°/s
±300°/s
5V analog
3.3V digital
-40 to +125 °C
Signal
Banwidth
Output Type
50LSB/(°/s),
1800LSB/g
18LSB/(°/s),
650LSB/g
50Hz,45Hz
Digital/SPI
50LSB/(°/s)
18LSB/(°/s)
50Hz
Sensitivity
Digital/SPI
Typical
Applications
Platform stabilization
Motion analysis and
control
Guidance and
navigation systems
For more information, please refer to the product datasheets available online at www.murata.com
Pressure Sensing Elements
Murata SCB10H capacitive absolute pressure sensing elements have been designed for applications
that require a small size and ultra low power consumption. The SCB10H pressure sensing elements are
ideal for implantable medical devices thanks to their inherent accuracy, reliability, small size and enabled
low power consumption.
The SCB10H pressure sensing element allows the possibility for volume OEM customers to integrate
pressure measurement functions in an optimal way into their products.
Parameter
Unit
B012
B080
B250
Measuring range
kPa
30 to 120
100 to 800
100 to 2500
Capacitance at min. pressure
pF
7.8
7.5
7.3
Capacitance at max. pressure
pF
11.8
13.4
13.9
Capacitance dynamics
Sensitivity
pF
4.0
5.9
6.6
fF/kPa
55 (@100 kPa)
6.2 (@350 kPa)
1.3 (@100 kPa)
6.5 (@2500 kPa)
Typical Applications
Medical devices
Flow meters
Barometers
Altimeters
For more information, please refer to the product datasheets available online at www.murata.com
EU RoHS Compliant
s
s
s
All the products in this catalog comply with EU RoHS.
EU RoHS is "the European Directive 2011/65/EU on the Restriction of the Use
of Certain Hazardous Substances in Electrical and Electronic Equipment."
For more details, please refer to our website 'Murata's Approach for EU RoHS'
(http://www.murata.com/info/rohs.html).
!Note • Please read rating and !CAUTION (for storage, operating, rating, soldering, mounting and handling) in this catalog to prevent smoking and/or burning, etc.
• This catalog has only typical specifications. Therefore, please approve our product specifications or transact the approval sheet for product specifications before ordering.
S47E.pdf
Jan.20,2014
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