induSensor Inductive Displacement Sensors

induSensor Inductive Displacement Sensors
More Precision.
induSENSOR
Linear inductive displacement sensors
2
Inductive displacement and position sensors
Modell
Page
LVDT gauges
4-5
LVDT displacement sensors
6-7
Controller for LVDT sensors / gauges
8-9
LDR displacement sensors
10 - 11
Controller for LDR sensors
12 - 13
LVP displacement sensors
14 - 15
VIP displacement sensors
16 - 17
EDS long-stroke sensors
18 - 19
LVP displacement sensors
for specific applications
20 - 21
-2-
Customer specific modifications
24 - 27
-3-
Customer specific development
28 - 31
-4-
Measuring principles
32 - 33
-5-
Application examples
34 - 35
-1-
3
Inductive displacement sensors with more precision
Electromagnetic displacement sensors from Micro-Epsilon are used extensively in applications for
automated processes, quality assurance, test rigs, hydraulics, pneumatic cylinders, and automotive engineering. The advantages of these displacement sensors are well known and highly valued,
and include ruggedness, reliability under harsh conditions, high signal quality and good temperature stability. The electromagnetic sensors of the induSENSOR series are based on the well-proven
inductive and eddy current principle. They are used successfully both in single and high volume
OEM applications.
LVDT
Gauges
Measurement principle
LVDT
Displacement
Sensors
LDR Sensors
LVP
VIP



LDR

EDS
Controller
Measuring range

integrated

external



up to 5mm



up to 20mm



up to 50mm
up to 100mm
up to 200mm










up to 300mm

up to 400mm

up to 630mm

sleeve

plunger
gauge




pipe
Max. ambient temperature
Max. ambient pressure
up to 85°C



up to 150°C

Option up to 200°C

≤100bar


4 .. 20mA




0.5 ... 4.5VDC
0/2 ... 10VDC


≤450bar
Output signal


up to 150mm
Target
EDS Sensors

LVP
LVDT
VIP Sensors









- 1 - Standard sensors
LVDT series - gauges with external controller
Proven LVDT technology
Measuring ranges ±1 … ±10mm
Excellent price/performance ratio,
especially for high volume applications
Sensor diameter ø8mm
Version with pneumatic push
Probe tips
Article
M2.5
Standard: type 2
5
DTA - 5 G8 - 3 - CA - V
6
Principle: differential
transformator (LVDT)
ø4.5
Excitation AC
M2.5
Option: type 11
2 5
Measuring range ± mm
Function: gauging sensor
ø10
Linearity
3 (±0.3%)
Option: type 13
M2.5
Connection (axial):
CA integral cable (3m)
Gauging sensor option:
V pneumatic push
5
LVDT gauging sensors DTA-xG8 are primarily
used for the measurement and inspection of
work-piece geometry (length, width, diameter,
thickness, depth, height). These new gauges
are available in two basic versions: feather or
pneumatic. The entire housing has a diameter
of 8mm. All gauges include a cable that extends
axially from the housing. Due to its special design, this series offers a very attractive price/
performance ratio, especially for high volumes.
10
4
ø4.5
45°
5
Model
Measuring range
DTA-1G8
DTA-3G8
DTA-5G8
DTA-10G8
DTA-1G8-V
DTA-3G8-V
±1mm
±3mm
±5mm
±10mm
±1mm
±3mm
±5mm
±10mm
0.45µm
0.75µm
1.5µm
53 mV/mm/V
44 mV/mm/V
Linearity
DTA-5G8-V DTA-10G8-V
0.3 % FSO
Repeatability
0.15µm
0.45µm
0.75µm
1.5µm
Temperature stability
0.15µm
250ppm/°C
Temperature range
-20…+80 °C (without bellows) / 0…+80 °C (with bellows)
Diameter
8h9mm
Sensor material
stainless steel / FPM
Connection / pin connector
open ends
Protection class sensor
IP65 (with bellows) / IP54 (without bellows)
Cable output
axial
Sensor cable length
3m
Life cycle MTBF
5 million cycles
Sensitivity
133 mV/mm/V
85 mV/mm/V
53 mV/mm/V
44 mV/mm/V
Electronics
133 mV/mm/V
85 mV/mm/V
MSC710 (page 8 - 9)
FSO = Full Scale Output
DTA-xG8-3-CA
A
Cable diameter ca. 3.1mm
6
8 h9
B
Cable length 3m (open ends)
crimp WS 3.25mm
Model
A (zero position)
B
83mm
64.3mm
DTA-3G8-3-CA
89mm
68.3mm
DTA-5G8-3-CA
118mm
89.5mm
DTA-10G8-3-CA
155mm
121.7mm
A (zero position)
B
DTA-1G8-3-CA-V
95mm
76.3mm
DTA-3G8-3-CA-V
103mm
82.3mm
DTA-5G8-3-CA-V
134mm
105.3mm
DTA-10G8-3-CA-V
170.8mm
137.3mm
DTA-1G8-3-CA
DTA-xG8-3-CA-V
A
for pneumatic connection 3x0.5mm
B
8 h9
Cable diameter ca. 3.1mm
Cable length 3m (open ends)
5
Model
- 1 - Standard sensors
6
LVDT series - displacement sensors with external electronics
Proven LVDT technology
Measuring ranges ±1 … ±25mm
Extremely accurate also under
difficult ambient conditions
Long-term stability
Wear-free
LVDT displacement sensors have a plunger
which moves freely in the sensor housing.
The plunger is joined to the object by a thread
to transfer the movement of the measurement
object. The measurement process in the sensor takes place without contact and is therefore
wear-free. The displacement sensors are mainly used to measure and monitor movements,
displacements, positions, strokes, deflections,
dislocations, etc. in vehicles, machines and
systems.
The high sensor resolution is limited only by the
noise in the sensor electronics. A further advantage of the symmetrically constructed sensors
in the LVDT series is the zeropoint stability of
the systems. The sensors are supplied with an
excitation frequency of 1 to 5 kHz depending on
the measurement range and an excitation amplitude of 2.5 to 5Veff. Matched sensor electronics
are available in this respect. With appropriate
setting possibilities for the excitation frequency
and amplitude, the sensors can also be operated with alternative electronics.
Article
DTA - 10 D - 3 - CA - W
Principle: differential
transformator (LVDT)
Excitation AC
Measuring range ± mm
Function:
displacement sensor
Linearity 5 (±0.5%)
3 (±0.3%)
1.5 (±0.15%)
Options
W welded/sealed housing (water proof up to 5bars)
P pressure resistant housing (up to 100bar)
F pressure resistant mounting flange O-ring seal
H high temperature sensor up to 200°C with
integral teflon cable (only for connection types -CA/-CR)
Connection axial
CA integrial cable (3m)
SA plug connection
Connection radial
CR integral cable (3m)
SR plug connection
7
Model
Connection
DTA-1D-
DTA-3D-
DTA-5D-
DTA-10D-
CA
CA
CA
CA
Measuring range
SA
±1mm
Linearity
SA
±3mm
SA
±5mm
DTA-15D-
SA
CA
CR
±10mm
DTA-25D-
SA
SR
CA
CR
SA
±15mm
±25mm
standard ±0.5%
-
-
-
-
-
300 µm
standard ±0.3%
6µm
18µm
30µm
60µm
90µm
150µm
optional ±0.15%
3µm
9µm
15µm
30µm
45µm
-
Excitation frequency
5kHz
2kHz
Excitation amplitude
1kHz
2.5Veff
5Veff
Sensitivity
133 mV/Vmm
85 mV/Vmm
SR
53 mV/Vmm
44 mV/Vmm
Temperature range
45 mV/Vmm
33 mV/Vmm
-20°C...80°C
Storage temperature
-40°C ... +80°C / +120°C
zero ±50ppm/°C
Temperature stability
Sensitivity ±100ppm/°C
Housing
stainless steel including magnetic shielding
Minimum cable bending radius
20mm
Outer diameter cable
~4.6mm
Protection class
IP 67
40g, 1000 shocks / axis
Shock
100g, 3 shocks / direction
Vibration
10Hz ... 58Hz ±1.5mm / 58Hz ... 500Hz ±20g
Electronics
MSC710 (page 8 - 9)
FSO = Full Scale Output
Sensor types with measuring range up to ±10mm (inner diameter ø2.7mm)
9
10
Ø10
Ø10
l
l
L
10
M2
Ø2
L
Ø2
13
M2
Type - SA with axial plug connection
Type -CA with integral cable
L
9.5
17
15
Sensor types with measuring range ±15mm and ±25mm (inner diameter ø4.8 mm)
L
Type - CR
with integral cable (radial)
Type - CA
with integral cable
Basic model
Connection
Length of housing L
Length of plunger l 1
DTA-1D-
9
L
Type - SR
with radial plug connection
DTA-3D-
DTA-5D-
DTA-10D-
CA
SA
CA
SA
CA
SA
CA
SA
40mm
40mm
57mm
57mm
73mm
73mm
87mm
87mm
19mm
29mm
Housing diameter
30mm
L
Type - SA
with axial plug connection
DTA-15DCA
CR
35mm
SA
~63
Ø14
20.5
11.4
~36
~40
SA
62mm
20mm
Female connector 90°
dimensions apply
for all models
CR
51mm
30
Ø14
CA
143.5mm
10mm
26.5
SR
106.5mm
1) Plunger in zero position (±10% of measuring range ±1 mm)
Female connector 90°
dimensions apply
for all models
DTA-25DSR
- 1 - Standard sensors
MSC710 Sensor controller for LVDT series
Excellent linearity and resolution
Zero and gain adjustable coarse/fine
Excitation frequency 1 ... 10kHz
(selectable)
Compact and robust EMI-proofed
housing
LVDT-sensor
Plunger
Primary coil
Supply
Magnetic core
Signal
Secondary coil
Terminal block
40
Mounting hole Ø4.2
prim+
mid2
prim-
4 3 2
J2
ON
R1
J1
Frequ. J4
1
R2
1
ON
1
Housing dimensions 52 x 50 x 35mm
ON
2
1
Test J3
J5
limit
Cable sleeve
mid1
R3
4 3 2
U
J7
J6
X1Shield
Gain
IU
sec-
1
X4
X3 Shield
sec+
power
Output
Pgnd
Ognd
X5
2
The MSC710 is a single-channel miniature
sensor controller for the operation of inductive displacement sensors based on the LVDT
principle (Linear Variable Differential Transformer). Its compact, but rugged design, makes
it suitable for both industrial and laboratory
applications.
Easily accessible and simple to operate, by
using DIP-switches. The electronic unit can be
matched to a wide range of sensors.
38
8
DIP-switches:
frequency
phase
sensor voltage
test
1
ON
Potentiometer:
zero
gain
offset
9
Model
MSC710-U
MSC710-I
Power supply
18 ... 30 VDC (18 ... 45mA)
Protection
Reverse polarity protection, overvoltage protection
Sensor principle
for LVDT sensors
150 ... 400mV
Sensor excitation
Input impedance
Range
1/2/5kHz (selectable by DIP-switches)
sensor
10kOhm
gain
-20 ...+350% (trimpot)
zero
Output signal
Noise
±50% (trimpot)
2 ... 10 VDC (Ra >1kOhm)
4 ... 20mA (load <500Ohm)
< 1.5mVeff*
< 3µAeff*
< 15mVss
< 30µAss
Linearity
<0.02% FSO
Frequency response
300Hz (-3dB)
Temperature range
Temperature stability
storage
operating
-40°C ... +85°C
0°C ... +70°C
±100ppm / °C
Protection class
IP 65
Weight
80g
Housing material
Electromagnetic compatibility (EMC)
Vibration
Shock
FSO = Full Scale Output
* RMS AC-Measuring, Frequency 3 Hz ... 300 Hz
ABS-plastic
EN 61326-1:2006 (spurious emission)
EN 61326-2-3:2006 (immunity to interference)
EN 60068-2-64 (noise)
EN 60068-2-29 (continous shock)
- 1 - Standard sensors
10
LDR series - linear displacement sensors
No wear and no maintenance
Excellent temperature stability
Operating temperature range up 160°C
Compact design - short installed length
Small sensor diameter
High measurement signal quality
The specific sensor configuration of the linear displacement sensors in the LDR series is
characterized by a short, compact design with
small diameter. Three connections are required as an interface to the sensor. The compact
design and the small sensor diameter facilitate
the installation of the measurement systems in
locations where space is restricted.
Fields of use and applications
The inexpensive LDR sensors are also particularly suitable for large-scale installation under
restricted spatial conditions and in industrial
environments with a high measuring rate.
11
Model
LDR-10-
Connection
LDR-25-
SA
CA
Measuring range
LDR-50-
SA
CA
SA
CA
10mm
25mm
typ. ±0.30% FSO
typ. ±0.35% FSO
typ. ±0.7% FSO
±0.030mm
±0.088mm
±0.35mm
Measuring principle
50mm
LDR - sensor
Linearity
max. ±0.50% FSO
Excitation frequency
16kHz
Temperature range
Temperature stability
8kHz
1Veff
1Veff
2.6Veff
51mV/Vmm
21mV/Vmm
5.5mV/Vmm
Excitation amplitude
Sensitivity
12kHz
SA
storage: -40°C ... +80°C / operation: -15°C ... +80°C
CA
storage: -40°C ... +160°C / operation: -40°C ... +160°C
zero
±30ppm / °C
±40ppm / °C
sensitivity
±100ppm / °C
±150ppm / °C
Housing (material)
ferromagnetic stainless steel
Weight sensor (without plunger)
9g
24g
Weight plunger
14g
1.5g
Sensor cable - minimum bending radius fixed / moved
28g
23g
2.2g
37g
3.5g
8 / 15mm
10 / 30mm
8 / 15mm
10 / 30mm
8 / 15mm
10 / 30mm
3.1mm
1.8mm
3.1mm
1.8mm
3.1mm
1.8mm
Outer cable diameter
Protection class
IP 67
40g, 3000 shocks / axis
Shock
100g radial, 300g axial
Vibration
5Hz ... 44Hz ±2.5mm / 44Hz ... 500Hz ±20g
Electric connection
SA
3-pin connector (accessory cable, article 0157047/047, 3 or 5m)
CA
integral axial cable (shielded), 2m
Electronics
MSC7210 (page 12 - 13)
FSO = Full Scale Output SA = connector axial CA = cable axial
LDR-x-SA
7
A
25*
Model
A
M2
3-Pin connector
Ø3
Plunger
Ø8
M5x0.5
10
LDR-10-SA
47mm
LDR-25-SA
73mm
LDR-50-SA
127mm
* Plunger at start of measuring range
A
6
25*
Model
Plunger
ca. 24
M2
Ø3
10
Ø8
LDR-x-CA
30
Shrink hose
* Plunger at start of measuring range
45
6
A
LDR-10-CA
41mm
LDR-25-CA
67mm
LDR-50-CA
121mm
- 1 - Standard sensors
MSC7210 Sensor controller for LDR series
Rugged die-cast housing
For all sensors in the LDR series
Adjustable excitation frequency
4 ... 33kHz
Zero point and gain can be adjusted
High resolution and linearity
14
Ø16
13
30
89
81.5
Mounting holes
62.5
The MSC7210 is a single-channel electronic
unit for the operation of inductive displacement
transducers according to the LDR principle.
The zero point and gain can be set over a wide
range using trimming potentiometers. Due to
the small size, the electronic unit is versatile in
mounting.
70
12
Ø4.5
Cable fitting
13
Model
MSC7210-U
Power supply
18 ... 30VDC
Protection
polarity reversal and overvoltage protection
Sensor principle
LDR sensor
1000 ... 2600mV
Sensor excitation
Range
4 bis 33kHz (16 steps selectable via DIPswitch)
gain
-20 ... +270% FSO (trimpot)
zero
±70% FSO (trimpot)
Output signal
Noise
2 ... 10VDC
4 ... 20mA
< 1.5mVeff*
< 3µAeff*
<30 µAss
< 15mVss
Linearity
< ± 0.02% FSO
Frequency response
Temperature range
MSC7210-I
300Hz
storage
operating
Temperature stability
Housing material
Electromagnetic compatibility
(EMC)
Protection class
-40°C ... +85°C
0°C ... +70°C
±100ppm / °C
zinc die cast
EN 61326-1:2006 (spurious emission)
EN 61326-2-3:2006 (immunity to interference)
IP 65
test signal: half sine wave
peak acceleration 15g
Shock
shock duration 6ms
test axes x, y, z
No. of impacts per axis: 1000
test signal: sine - sweep
Vibration
frequency: 20 ... 500Hz
test axes x, y, z
No. of frequency cycles per axis: 10
Sensor connection
plugable screw clamp 4-pin
Signal/supply connection
plugable screw clamp 5-pin
FSO = Full Scale Output
* RMS AC measurement, frequency 3Hz ... 300Hz
- 1 - Standard sensors
LVP series - inductive sensors with measuring plunger and integrated electronics
No wear and no maintenance
Linearity 0.25% FSO
Integrated microelectronics
Compact design - short installed length
Shielded against EMI
For use in difficult ambient conditions
The displacement sensors of the LVP series use
a plunger for measurement. They are equipped
with integrated electronics.
An important advantage of the LVP measuring
technique lies in the short length of the installed
sensor. This difference in lengths becomes clear in a direct comparison with an LVDT sensor.
The LVP displacement sensors are ideally suited for tiny installation rooms. With protection
class IP67, the sensors can even be used in
harsh industrial environments.
reduced installation room
14
Comparison of the length of LVDT and LVP series
with identical measuring ranges
15
Model
Measuring range
standard ±0.5% FSO
Linearity
LVP-50
LVP-100
LVP-200
50mm
100mm
200mm
0.25mm
0.5mm
1.0mm
option±0.25% FSO
0.125mm
0.25mm
-
<0.03% FSO
0.015mm
0.03mm
0.06mm
Resolution
Temperature range
-40°C ... +85°C
Temperature stability
zero
±50ppm / °C
sensitivity
±150ppm / °C
Frequency response (-3 dB)
300Hz
Output
4 ... 20mA
Output load
500Ω
Power supply
18 ... 30VDC
Current consumption
max. 40mA
Protection class
IP 67
EN 61326-1:2006 (spurious emission)
EN 61326-2-3:2006 (immunity to interference)
Electromagnetic compatibility (EMC)
40g, 3000 shocks / axis; 100g radial, 300g axial
Shock1
Vibration
5Hz ... 44Hz ± 2.5mm; 44Hz ... 500Hz ±20g
FSO = Full Scale Output
1) Half sinusoid 6 ms
LVP series housing version -GA- (option)
LVP series housing version -ZAM12 x 0.5
A
radial 7-pin connector
A
SW 32
25*
13.9
axial 7-pin
connector
25*
13.9
40
12
Ø12
D
Ø8
M 18x1.5
B
D
Ø8
Ø30.5
B
C
C
Sensor rod
Measuring plunger
Sensor rod
12
40
Measuring plunger
* Measuring plunger start position Iout = 4mA
* Measuring plunger start position Iout = 4mA
Article
LVP - 50 - ZA - 2,5 - SR7 - I
Electrical output
SA7= connector, axial (housing version GA)
SR7= connector, radial (housing version ZA)
Linearity
5 = 0.5% FSO
2.5 = 0.25% FSO
ZA= housing, cylindical (standard)
GA= housing, threaded (option)
Measuring range in mm
Measuring range
A
B
C
D
50
77
M2
10
4
100
138
M3
12
4
200
261
M3
12
4
All data in mm
- 1 - Standard sensors
16
VIP series - displacement sensors with measuring ring and integral electronics
No wear and no maintenance
Linearity 0.25% FSO
Integrated microelectronics
Short and compact design
Rugged encapsulated sensor
construction
For use in difficult ambient conditions
Lateral measurement possible
VIP sensors operate with a contactless moving
ring. There is no mechanical contact between
the measuring element (ring) and the sensor
rod. The sensor therefore operates without any
wear.
Parallel mounting
The optimum ratio of measurement range to
installed length of the sensor reduces the installation space needed for the VIP series.
The parallel connection of the measurement
object and measuring ring facilitates completely new construction and installation options.
Whereas with conventional sensors with an axial measurement path, the length of the plunger
must be added to the actual housing length,
with the VIP series only the housing length has
to be considered during the design.
With protection class IP67, the sensors can
even be used in harsh industrial environments.
Contactles moving ring
Sensor rod
Target movement
VIP
(fixed)
Measuring ring movement
17
Model
VIP-50
VIP-100
VIP-150
Measuring range
50mm
100mm
150mm
Linearity
standard ±0.5% FSO
0.25mm
0.5mm
0.75mm
option ±0.25% FSO
0.125mm
0.25mm
-
<0.03% FSO
0.015mm
0.03mm
0.045mm
Resolution
Temperature range
-40°C ... +85°C
zero
Temperature stability
± 50ppm / °C
sensitivity
±150ppm / °C
Frequency response (-3 dB)
300Hz
Output
4 - 20mA
Output load
500Ω
Power supply
18 - 30VDC
Current consumption
max. 40mA
Protection class
IP 67
EN 61326-1:2006 (spurious emission)
EN 61326-2-3:2006 (immunity to interference)
Electromagnetic compatibility (EMC)
40g, 3000 shocks / axis
Shock1
100g radial, 300g axial
Vibration
5Hz ... 44Hz ± 2.5mm; 44Hz ... 500Hz ±20g
FSO = Full Scale Output
1) Half sinusoid 6ms
VIP series housing version -GA- (option)
Dimensions in mm, not to scale
VIP series housing version -ZADimensions in mm, not to scale
C
40
12
40
Sensor rod
Measuring ring
start position Iout =4mA
VIP- 50 - ZA - 2.5 - SR7 - I
Electrical output
SA7= connector, axial (housing version GA)
SR7= connector, radial (housing version ZA)
Linearity
Sensor rod
12
Measuring ring
start position Iout =4mA
Measuring ring
end position Iout=20mA
Article
5 = 0.5% FSO
2.5 = 0.25% FSO
ZA= housing, cylindical (standard)
GA= housing, threaded (option)
Measuring range in mm
Ø8
Ø12x1
Ø8
Ø12x1
SW 32
13.9
M 18x1.5
Ø 30.5
Ø 30.5
C
Ø12
Measuring range
Measuring range
B
13.9
B
A
radial 7-pin connector
A
axial 7-pin connector
Measuring ring
end position Iout=20mA
Measuring range
A
B
C
50
105
24
11.5
100
175
27
22
150
242
30
33
- 1 - Standard sensors
18
EDS series - long-stroke sensors for hydraulics & pneumatics
Measurement ranges 75 ... 630mm
Linearity ±0.3% FSO
Integrated microelectronics
High pressure resistance
Oil resistant and maintenance-free
Short offset ranges
The sensor elements of the EDS series are
protected by a pressure resistant stainless
steel housing. The sensor electronics and signal conditioning are completely integrated in a
sensor flange.
As a target an aluminum sleeve is used which
is integrated into the piston rod and is passed
without making contact and wearfree over the
sensor rod. Integration in a hydraulic cylinder
Due to the use of the eddy current principle,
no permanent magnets need to be mounted
inside the cylinder.
Due to the rugged design of the long-stroke
sensors of the EDS series, these sensor systems have proven themselves, not only through
the integration in hydraulic and pneumatic cylinders, but especially under harsh industrial
conditions.
Typical applications
Long-stroke sensors in the EDS series are designed for industrial use in hydraulic and pneumatic cylinders for the displacement and position measurement of pistons or valves, e.g. for
the measurement of
- displacement, distance, position, gap
- deflection
- movement, stroke
- filling level, immersion depth, spring travel
Article
EDS - 300 - S - SA7 - I
Electrical output
SR = connector, radial (model F)
SA7 = connector, axial (model S)
Models: S = compact design with alu cap
F = flange housing with mounting holes
Measuring range in mm
EDS series: integration in a hydraulic cylinder
19
Model
EDS-75
Connection
Measuring range
EDS-100
EDS-160
EDS-200
EDS-250
EDS-300
EDS-400
EDS-500
EDS-630
S
S, F
S, F
S
S, F
S, F
S, F
S
S, F
75mm
100mm
160mm
200mm
250mm
300mm
400mm
500mm
630mm
Linearity
±0.3% FSO
0.23mm
0.3mm
0.48mm
0.6mm
0.75mm
0.9mm
1.2mm
1.5mm
1.89mm
Resolution
0.05% FSO
0.038mm
0.05mm
0.08mm
0.1mm
0.125mm
0.15mm
0.2mm
0.25mm
0.315mm
Temperature range
-40°C ... +85°C
Temperature stability
±200ppm / °C
Frequency response (-3 dB)
150Hz
Output
4 - 20mA
Output load
500Ω
Power supply
18 - 30VDC
Current consumption
max. 40mA
Connector
model S
7-pin connector (sensor cable as an option) options radial or axial output
model F
5-pin radial bayonet-connector with mating plug
450bar (sensor rod, flange)
Pressure resistance
Protection class
IP 67
Electromagnetic compatibility
(EMC)
EN 61326-1:2006 (spurious emission)
EN 61326-2-3:2006 (immunity to interference)
Shock1
40g, 3000 shocks / axis
100g radial, 300g axial
Vibration
5Hz ... 44Hz ±2.5mm
44Hz ... 500Hz ±23g
Material
V4A-Steel 1.4571
FSO = Full Scale Output
Model S
1) Half sinusoid 6 ms
Model F
8 (16 EDS-400/EDS-630)
35
a
36.5
Ø42
76
D
l
Ø21f7
Connector radial
d
Ø30
Ø34
axial connector
Alu tube
Sensor rod
32.5
Ø80
56
L
6 mounting holes ø9mm
on pitch circle ø63mm
Meas.
range
Sensor rod
Alu tube
Offset
L
D
l
d
a
75
110
10
110
16
15
100
140
10
140
16
20
160
200
10
200
16
20
200
240
10
240
16
20
250
290
10
290
16
20
300
340
10
340
16
20
400
450
12
500
550
12
630
680
12
450 (S)
460 (F)
18 (S)
550
680 (S)
690 (F)
26 (F)
18
18 (S)
25
25
26 (F)
25
- 1 - Standard sensors
LVP series - displacement sensors with external electronics
The LVP-3, LVP-14 and LVP-25 sensors are
modified versions of the standard LVP sensors. They are designed for specific application areas, and operated with external
electronics in contrast to the standard LVP
series.
Valve stroke sensor in stainless steel housing
Future generations of engines will be able to dispense with mechanical camshafts. The displacement of the electromechanically or electrohydraulically driven inlet and outlet valves of internal combustion engines is acquired by the displacement sensor of the product line LVP-14-F-5-CR and fed
into the control circuit. In this way a variable inlet and outlet control of the valves can be realized.
Ultimately, the fuel consumption is reduced, emission values are improved and the engine power
characteristic is matched to the individual driving situation.
Measuring range
Target (optional)
Linearity
14mm
article 0482273
stainless steel
Temperature stability sensor
±100pmm / °C
8
.3
Ø3
-30°C ... +150°C
IP 67
20
Protection class sensor
Ø12.8
Ø27
0.5% FSO (0.07mm)
Housing
Temperature range sensor
27
2616078
18
Article
LVP-14-F-5-CR
10
Model
Ø13
6
20
Controller
Article
Power supply
Output
Resolution
Frequency response
Dimensions
MSC739VS-U
Ø7
4111009
+10...16VDC
1...9VDC
0,02% FSO
20kHz (-3dB)
Plastic
extension
Sensor
aluminium target
(fixed at the valve)
150 x 64 x 54mm
FSO = Full Scale Output
Combustion engine valve
21
Sensor for needle stroke movements
The compact displacement sensor LVP-3- Z13-5-CA is suitable for acquiring small measurement
ranges with high accuracy. The large free hole for the passage of the core also facilitates large
excessive strokes. The measurement object, realized as a simple aluminum ring, is mounted on
the rod, plunger, pin, needle or other similar part to be measured. In a typical application the displacement sensor LVP-3-Z13-5-CA is used in automatic glue application guns. The continuously
measuring sensor monitors the switching point, also for wear of the needle seating. Additionally, the
continuous measurement offers the option of checking the needle for the correct stroke position.
The small, compact sensor is easy to integrate even in tight installation spaces.
3-pin cable ø1.8
2617014
3mm
Target (included)
ø3 x 30 long with thread M3 and alu sleeve ø4 x 3.3
Linearity
typ. 0.3% FSO (9µm)
Housing
stainless steel
Ø5
Measuring range
Ø3
Article
LVP-3-Z13-CA
Ø13
Model
±100pmm / °C
Temperature range sensor
-40°C ...+150°C
13
IP 67
*Midrange 12mA
Protection class sensor
Electronics
Ø4
Temperature stability sensor
5*
series MSC7210 (page 12 - 13)
FSO = Full Scale Output
Sensor for the acquisition of displacement on rotating shafts
Analog sensors from the series LVP offer a significant improvement to monitor the clamping position of tools. The sensor is integrated into the chuck and directly measures the clamping stroke of the
drawbar. It can be universally used with the most varied types of tool due to an extremely compact
design. The sensor supplies an analog signal according to the stroke motion of the drawbar when
clamping the tool. Consequently, continuous monitoring is possible without the switching point having to be laboriously set mechanically. The miniaturized sensor electronic unit is supplied with 24
VDC and can either be accommodated at the point of measurement or in the control cabinet.
Measuring range
Target (included)
Resolution
Linearity
article 0482219 for shaft diameter 10mm
0.01mm
typical ±1% FSO (0.25mm)
Housing
stainless steel
Sensor
-40° C ...+150° C
IP 67
Medium
air, oil
FSO = Full Scale Output
38
<±0.01% FSO / °C
Protection class sensor
Electronics
Ø13
4
article 0482218 for shaft diameter 8mm
150Hz (-3dB)
Temperature range
5.8
25mm
Dynamics
Temperature stability sensor
Cable
2617008
Ø18
Article
LVP-25-Z20-5-CA-AC
Ø20
Model
Rotating shaft
Target sleeve Ø11.5 mm
series MSC7210 (page 12 - 13)
Pull rod material
31CrMoV9V, no. 1.8519.05
- 1 - Standard sensors
Accessories for VIP, LVP, LDR, EDS and LVDT series
digital micrometer calibration fixture
power supply on DIN rail,
input 100 - 240VAC, output 24VDC / 2.5A
function and linearity inspection certificate incl. protocol
with listed measurement data of the linearity inspection
and documentation
LDR series
C7210-5/3 sensor cable, 5m, with cable connector
C7210/90-5/3 sensor cable, 5m, with 90° cable connector
PC710-6/4
supply/output cable, 6m
LDR-10
LDR-25
LDR-50
plunger
plunger
plunger
Accessories
EDS series
Service
2985001
Connection cable
0157043
C703-5 2902084
C703-5/U
0157050
C703/90-5
2901143
C705-5 2901160
C705-15
Mounting block VIP and LVP series
28
Accessories
Connection cable
0157047
0157048
Supply cable
2901087
Plunger
0800136
0800137
0800138
Linearity inspection
certificate
2
Accessories VIP and LVP series
Connection cable
0157043 C703-5 VIP/LVP/EDS 7-pin connection cable, 5m
2902084
C703-5/U
VIP/LVP/EDS 7-pin connection cable, 5m
for voltage output 1 - 5V
0157050
C703/90-5 VIP-/LVP-/EDS-7-pin connection cable, 5m
with 90° cable connector
2962001
MBS 12/8
mounting set for VIP series
with 3 mounting blocks and 2 adapting rings
0487087
MBS 12/8
mounting block VIP/LVP series
Plunger
0800114 LVP-50
plunger
0800115
LVP-100
plunger
0800116
LVP-200
plunger
Ø1
Accessories
2960031
MC25D
2420062
PS2020
2984026
certificate
Function and linearity inspection for EDS series incl. pressure inspection
and documentation without recalibration
VIP/LVP/EDS 7-pin connection cable for S series, 5m
VIP/LVP/EDS 7-pin connection cable for S series, 5m
for voltage output 1 - 5V
VIP/LVP/EDS 7-pin connection cable for S series, 5m
with 90° cable connector
VIP-/LVP-/EDS -pin connection cable for F series, 5m
VIP-/LVP-/EDS -pin connection cable for F series, 15m
4 mounting holes
for screws
M4 DIN 912
7.5
22
32.5
45
23
Accessories
LVDT series
Sensor cable
2902004
C701-3 sensor cable 3m, with connector
and tin-plated free ends
2902013
C701-6 sensor cable, 6m, with connector
and tin-plated free ends
2902009
C701/90-3 sensor cable, 3m, with 90° connector
and tin-plated free ends
2966002
MSC710 connector set for supply/output cable
2981010
connector mounting and calibration of MSC710
Connection cable
2901087
PC710-6/4supply/output cable, 6 m
2.5
90
°
Flange DTA-F10
SW
3x
M3
0
0.
Ø1
8.0
mounting flange, slotted
for DTA-1D, DTA-3D, DTA-5D, DTA-10D
mounting flange, slotted
for DTA-15D, DTA-25D
Ø25
Flange
0483090.01
DTA-F10
0483083.02
DTA-F20
plunger
plunger
plunger
plunger
plunger
plunger
.2
DTA-1D
DTA-3D
DTA-5D
DTA-10D
DTA-15D
DTA-25D
Ø3
Plunger
0800001
0800002
0800003
0800004
0800005
0800006
Probe tips
0459002
0459001
0459003
0459004
type 2
type 2 hard metall
type 11
type 13
R9
Flange DTA-F20
°
90
3x
Option: type 11 Option: type 13
5
2 5
5
6
ø4.5
M2.5
M2.5
M2.5
ø10
10
Standard probe tip: type 2
ø4.5
45°
.0
Ø20
R15
10,0
SW
3
8
Ø3
M4
.3
Ø4
- 2 - Customer specific modifications
24
Customer specific modifications
Micro-Epsilon also develops sensors for special requirements that are not met by the standard
models, the inductive sensors from the standard range can be suitably modified. A commercial
implementation can already be achieved with medium-sized quantities (depending on the type and
number of changes). The standard induSENSOR models form the basis for the modifications.
Environmental conditions
Depending on the location, environment, and application, different circumstances occur that
require adapted sensors:
 Ambient temperature
 Pressure
 Interference fields
 Dirt, dust, and moisture
 Vibration, shock
 Seawater, IP69K


 

Basic types
Five basic types are available. Measuring ranges and target
versions can be combined, based on these technologies.
Technology
 VIP
 EDS
 LVP
 LDR
 LVDT
Measuring range
to 200mm
to 800mm
to 200mm
to 150mm
to ±100mm
Target
ring
pipe
plunger / probe tip
plunger / probe tip
plunger / probe tip
25
Measuring range / sensor geometry
The installation environments often require an adjustment of the sensor
geometry, of the measuring range, and of the protection class. These
adjustments include changes to the measuring range, sensor length and
width, pressure resistance, target shape, flange and material.
Electronics
The electronics is used for control purposes and for processing the
signals from the inductive sensors.
Depending on the requirements, the electronics can be integrated in
the sensor or remote. The range of functions of the electronics are
specifically defined, and range from simple signal output to complex
arithmetic.
Possible electronics concepts
 Integrated electronics
 External electronics
Type of connection and cables
The type of connection and cable can be defined depending on the
requirements.
 Connector for plugs  Integrated cable with plug
 Integrated cable with open ends
Output signal
Depending on the type of integration, one or more output signal types
are required. Many types of output are available in combination with
the electronics used.
Output signals
 Current
 Voltage
 Switching outputs
 Others on request
- 2 - Customer specific modifications
26
Examples of customer specific modifications
EDS-260-Z-LA-I -3L
Eddy current long-stroke sensor
33
PVC-wire
12
260mm
<±0.3%
18 ... 30Vdc
4 ... 20mA
-40 ... +85°C
Ø48f7
Model Z
Measuring range
Nonlinearity Power supply
Output Temperature range
Special sealing flange
EDS-200-F2-CA10-I-METSO
Eddy current long-stroke sensor
Measuring range
Output
Integrated cable
Special sealing flange
200mm
4 ... 20mA
10m
DTA-1D-CA-U
Miniature sensor with axial cable output
Measuring range
Outer diameter
Sensor cable
±1mm
10mm
length 850mm
27
DTA-6D-20 (07)
Inductive LVDT diplacement sensor
Measuring range ±2 ... ±8mm
Connection140mm flat cable and IDC (insulation
displacement connectors) RM 2.54
DTA-15D-5-CA(03)
Pressure-tight LVDT sensor with welded flange
Measuring range Pressure resistance
Connection
±16mm
pressed, up to 350bar (2min.)
with mounting flange
flat cable axial connector,
approx. 140mm long with plug
EDS-330-F-SRB-I(06)
Eddy current long-stroke sensor
Measuring range Output Power supply Flange housing 330mm
4 - 20mA
18 - 30Vdc
150mm diameter
- 3 - Customer specific sensor development
28
Customer specific sensor development
For exceptional applications with large quantities, Micro-Epsilon develops sensors that are precisely
tailored to customer requirements. The geometry, electronics and packaging are customized to suit
the requirements concerned. Thanks to the high production capacity at Micro-Epsilon, large quantities can be made cost-effectively.
Areas of application
Customized OEM displacement sensors are often developed for areas of applications where the
highest standards apply, such as:
 Applications with high atmospheric pressure
 Environments with high temperatures
 Vacuum
 Explosive hazard environments
 Contaminated installation and measurement rooms
29
Realized OEM examples
143
150
10
16
190
DRA-25D-20-SR-02 / ILU-50-0-10-SR
Inductive differential inductor (plunger)
LDR-85-BUE
Wear-free inductive displacement sensor
KRS 719-400
Miniaturized LVDT displacement sensor
Loading and unbalance detection in washing
machines
Position measurement of valves
For use in textile machines
Measuring range 85mm
External electronics
Installation integrated into damper or external
Integrated electronics
Measuring range 2mm
Shielded sensor
Measuring range 50mm
External electronics
18
25
20
46
DTA-3D-5-CR5-G-HP
Inductive displacement sensor
ISC7001
Subminiature sensor controller
DTA-1D-20-DDV.02
LVDT displacement sensor with coated coil
Detection of the shaft position with hermetically
sealed pumps
Subminiature design 20x25mm
Measurement of a hydraulic valve position
Interfaces 0.5 - 4.5V, PWM (10bit), UART
External electronics
Measuring range 6mm
Resolution 11bit
Measuring range 2mm
ATEX / FM certification
Dipped paint seal
250
56
145
8
KTL gauging sensors
Calibration of robots
EDS-28-G-CA-U
Rugged inductive miniature sensor with
in the cable integrated electronics
EDS/GPS-180-ZA-I(02)
Eddy current long-stroke sensors
with integrated electronics
Speed measurement
Miniature actor for formula 1
Switching output
Measuring range 28mm
Measuring the piston position in the glass
production
Pressure resistance up to 350bar
Measuring range 180mm
High shock- and vibration-resistance
- 3 - Customer specific sensor development
30
Capability in large scale OEM production
Micro-Epsilon has all the required resources
available to supply solutions starting from the
idea through to large-scale production, all from
one source - and at competitive prices. A cohesive process as a better path to large-scale
production. Together with a team of engineers
and customer support staff, performance specifications are converted into concepts and designs according to customized requirements.
All project participants are integrated into the
process. Together with us, you can speed up
your development process, prototype building
and large-scale production. In achieving this,
the complete material logistics is included in
the process from an early stage. A total of over
2,000 man-years of engineering experience
and more than 300 staff are available to you.
At Micro-Epsilon‘s head office, development
projects are initiated and major projects coordinated. The development and marketing of
specific sensors for OEM customers in large
quantities takes place in direct contact with the
development and product specialists.
For the large-scale production of the electronics,
modern and automated production systems for
screen and silk-screen printing are available
with vision systems, automatic SMD assembly
up to BF 0402, reflow soldering in computer
controlled convection ovens, CFC-free washing
in multi-compartment washing systems, automatic die bonding and laser trimming.
31
With production capacities of more than one million sensors p.a. and by utilizing internal company resources, the sensors are very economical. The production equipment available includes the
following:
- CNC lathes and milling machines.
- Fully automatic four-spindle winding machine.
- Arc welding equipment for welding the coil wires.
- Varnish dip system for protecting the coil.
- Automatic inspection system for testing the coil parameters.
- Laser welding and marking systems.
All production systems are supplied in ergonomic and assembly-friendly pack-aging units. In
this respect environmentally friendly and economical reusable pack-aging is used.
Within the scope of Total Quality Management
a 100% check is integrated for numerous measurement and inspection processes.
- 4 - Technology
32
Technology and measuring principle
LVDT gauges and LVDT displacement sensors
LVDT displacement sensors and gauges (Linear Variable Differential Transformer) are constructed
with a primary and two secondary coils, which are arranged symmetrically to the primary winding.
As a measurement object, a rod shaped magnetic core can be moved within the differential transformer. An electronic oscillator supplies the primary coil with an alternating current of constant
frequency. The excitation is an alternating voltage with an amplitude of a few volts and a frequency
between 1 and 10 kHz.
Depending on the core position alternating voltages are induced in the two secondary windings.
If the core is located in its “zero position“, the coupling of the primary to both secondary coils is
equally large. Movement of the core within the magnetic field of the coil causes a higher voltage
in one secondary coil and a lower voltage in the second coil. The difference between the two
secondary voltages is proportional to the core displacement. Due to the differential design of the
sensor, the LVDT series has an output signal which is very stable.
Signal LVDT
+ Signal
- Displacement
100 %
100 %
+ Displacement
- Signal
Linear measuring range
Gauging sensor
Secondary coils
Probe
Probe tip
Slide bearings
Magnetic core
Primary coil
Spring
Displacement sensor
Secondary coils
Plunger
Magnetic core
Plunger
Primary coil
Core extension
LDR displacement sensors
The inductive sensors in the LDR series are constructed as half-bridge systems with center tap. An
unguided plunger moves in the interior of the sensor coil, which consists of symmetrically constructed winding compartments. The plunger is joined to the moving measurement object via a thread.
Due to the movement of the plunger within the coil, an electrical signal is produced which is proportional to the displacement covered. The specific sensor configuration facilitates a short, compact
design with a small diameter. Three connections are required as an interface to the sensor.
Block diagram LDR series
Measuring range
Target
Plunger
Amplifier
>>
Ue
Ua / I a
Measuring principle VIP and LVP series
LVP displacement sensors
With LVP displacement sensors, a core of a soft magnetic material is used as the target, which is
movable within the measuring coil without any physical contact. The measuring coil itself is mounted, hermetically sealed, in an enclosure of ferromagnetic, stainless steel.
The core is firmly connected to a plunger, the length of which corresponds to the measuring range.
The core length, however, does not exceed 20% of the measuring range. The mechanical connection of the LVP sensors is equivalent to that of the well-known LVDT Sensor.
In direct comparison with LVDT position sensors, LVP sensors exhibit an improved ratio of measuring range to overall length. The installation space required can thus be reduced up by 100%.
33
LVP series
Coil
Measuring range
Controller
electronics
Housing
Target (core)
Output
VIP displacement sensors
Displacement transducers in the VIP series operate similar to conventional potentiometers, but
without any sliding contact and are consequently wear-free. The measurement coil is wound as a
single layer on a tube and is hermetically sealed in a stainless steel housing.
An aluminum ring which can be moved along the housing without making contact is used as the
target. Exact guidance is not necessary for the ring. Radial vibrations and tilting of the measurement
object, have no influence on the measurement result and the sensor life. The signal conditioning is
directly integrated into the displacement transducer.
VIP
Measuring range
Coil
Controller
electronics
Target (ring)
Output
EDS long-stroke sensors
The measurement principle of the EDS series is based on eddy current effect. An aluminum (ferrous) sleeve which can be moved along the housing without making contact is used as the target.
If both coils are supplied with an alternating current, then two orthogonal magnetic fields are produced in the sleeve. The measurement coil, wound in one layer, produces a field which has a
magnetic coupling with the target.
The displacement sensor uses a ferrous target sleeve of soft magnetic material, a measurement
coil and a compensation coil. The coils are mounted inside a pressurized stainless steel housing.
The eddy currents then arising in the target form a magnetic field which influences the measurement coil impedance. This changes linearly with the target position. The magnetic field of the compensation coil has in contrast no coupling with the target and the impedance of the compensation
coil is largely independent of the target position.
The electronic circuit generates a signal from the ratio of the impedance of the measurement coil
and the compensation coil and converts the sleeve position into a linear electrical output signal of
4 - 20mA. In achieving this, the temperature effects and the temperature gradient are essentially
eliminated.
Block diagram EDS series
Target (pipe)
Sensor rod
Coil
Integral
controller
Housing
- 5 - Applications
34
Typical applications for inductive displacement and position sensors
Sensors are the eyes and ears of a technical system. The values or states you acquire are processed in the controller or evaluated and appropriate further steps initiated. With the aid of sensors
the measurement object is deflected, moved, set, guided, bent, panned, positioned, tilted, displaced or centered. The following overview shows a small extract of the possibilities for the application of the product group induSENSOR. With inductive sensors in applications, process times are
shortened, operational readiness is extended, operational safety is increased, production yield is
improved, setting up times are shortened and there is a gain in convenience.
•Construction
•Automotive
•Facility management
•Household appliances
•Hydraulics
•Measurement systems
•Medical engineering
•Production plants
•Process technology
•Inspection and testing systems
•Quality control
•Machine tools
Quality control and dimensional inspection
Inductive gauging sensors measure the geometry of work-pieces in quality assurance and
production. The dimensions for inspection are
acquired in appropriate inspection rigs and documented.
Gauging sensors and other sensors are employed for the calibration of the robot axes and for
the determination of the gripping span. Furthermore, with vision4A image processing systems
the position of the handling object in space is
acquired.
The deflection of the probe tip in 3D coordinate
machines is compensated using inductive sensors from Micro-Epsilon.
Hydraulic and pneumatic cylinders
Railway engineering
When taking a bend, the coach body on the vehicle is then tilted towards the inside of the bend with
the aid of hydraulic cylinders. This tilt is acquired with sensors in the EDS series.
Automobile construction
Deflection of hydraulic suspension in commercial vehicles, position of convertible top cylinders as
well as pedal and clutch displacements are typical applications..
Heavy industry
The EDS series is used for the crusher gap control on rock crushers.
Aerospace
In the dynamic control and navigation of aircraft various sensors in the LVDT series are employed
as key elements. Typical applications are in navigation, cockpit simulators, the mechanical turbine
control, antenna positioning, flaps control, rudder trimming, pedal positioning and in the undercarriage.
35
Inspection and testing systems
In inspection and testing systems inductive
sensors acquire deflection, oscillation and vibration of the measurement positions.
In particular, the sensors of the VIP series are
suitable for the measurement range from 50
to 200mm. The requirements with regard to a
small installation volume, wide useful measurement range and insensitivity to measurement
object lateral variations are optimally fulfilled by
sensors in the VIP series.
Construction
Inductive sensors from Micro-Epsilon are used
for continuous measurements in civil engineering. The sensors acquire the movement of
bridge elements or the walls of buildings with
the change of seasons and during renewal.
Machine tools,
Production automation,
Measurement with respect to rotating shafts
To monitor the clamping position of tools a sensor in the VIP series is integrated into the chuck
and directly measures the clamping stroke of
the drawbar. It can be universally used with the
most varied types of tool due to an extremely
compact sensor design.
In automatic screwdrivers inductive sensors
from Micro-Epsilon continuously measure the
penetration depth from 0 to 70 mm, thus monitoring screw joints with different depths on the
same station.
Hydraulic valve
With the classical LVDT sensors and innovative
sensors in the VIP series, Micro- Epsilon offers a
wide selection of systems for the measurement
of the piston position on hydraulic and solenoid
valves. The sensors in the VIP series are particularly characterized by the small installation
space and the high cut-off frequency.
Dosing valve
In automatic dosing valves inductive sensors
monitor the position of the dosing needle and
ensure uniform dosing quality.
Process valve
To control and block the flow of gases and
liquids the spindle drives of process valves are
fitted with Micro-Epsilon displacement sensors.
Production plants
In automated production plant, inductive sensors from Micro-Epsilon monitor the production
tolerance of the products while the process is
running. Other fields of application lie in the
continuous acquisition of flap positions and
slide settings.
Modifications reserved / Y9761177-B031072GKE
High performance sensors made by Micro-Epsilon
Sensors and systems for displacement
and position
Sensors and measurement devices for
non-contact temperature measurement
2D/3D profile sensors (laser scanner)
Measurement and inspection
systems for quality assurance
Optical micrometers, fiber optic sensors
and fiber optics
Color recognition sensors, LED analyzers
and color online spectrometer
MICRO-EPSILON Headquarters
Koenigbacher Str. 15 · 94496 Ortenburg / Germany
Tel. +49 (0) 8542 / 168-0 · Fax +49 (0) 8542 / 168-90
[email protected] · www.micro-epsilon.com
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