Omega FMA-8500 Series Owner Manual
Below you will find brief information for Mass Flowmeters FMA-8500 SERIES. The OMEGA® FMA-8500 Series Mass Flowmeters are designed for accurate measurement and control of gas flow, and consist of a flow sensor and an integral electronic signal conditioner.
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http://www.omega.com e-mail: [email protected] FMA-8500 SERIES Mass Flowmeters omega.com' LFEOMEGA- OMEGAnet“ On-Line Service Internet e-mail http://www.omega.com [email protected] USA: ISO 9001 Certified Canada: Servicing North America: One Omega Drive, Box 4047 Stamford, CT 06907-0047 Tel: (203) 359-1660 FAX: (203) 359-7700 e-mail: [email protected] 976 Bergar Laval (Quebec) H7L 5A1 Tel: (514) 856-6928 FAX: (514) 856-6886 e-mail: [email protected] For immediate technical or application assistance: USA and Canada; Mexico and Latin America: Benelux: Czech Republic: France: Germany/Austria: United Kingdom: ISO 9002 Certified Sales Service: 1-800-826-6342 / 1-800-TC-OMEGA** Customer Service: 1-800-622-2378 / 1-800-622-BEST®* Engineering Service: 1-800-872-9436 / 1-800-USA-WHEN™ TELEX: 996404 EASYLINK: 62968934 CABLE: OMEGA Tel: (95) 800-TC-OMEGA>* FAX: (95) 203-359-7807 En Español: (203) 359-7803 e-mail: [email protected] Servicing Europe: Postbus 8034, 1180 LA Amstelveen, The Netherlands Tel: (31) 20 6418405 FAX: (31) 20 6434643 Toll Free in Benelux: 06 0993344 e-mail: [email protected] ul. Rude armady 1868, 733 01 Karvina-Hranice, Czech Republic Tel: 420 (69) 6311627 FAX: 420 (69) 6311114 e-mail: [email protected] 9, rue Denis Papin, 78190 Trappes Tel: (33) 130-621-400 FAX: (33) 130-699-120 Toll Free in France: 0800-4-06342 e-mail: [email protected] Daimlerstrasse 26, D-75392 Deckenpfronn, Germany Tel: 49 (07056) 3017 FAX: 49 (07056) 8540 Toll Free in Germany: 0130 11 21 66 e-mail: [email protected] One Omega Drive, River Bend Technology Centre Northbank, Irlam, Manchester, M44 5EX, England Tel: 44 (161) 777-6611 FAX: 44 (161) 777-6622 Toll Free in England: 0800-488-488 e-mail: [email protected] It is the policy of OMEGA to comply with all worldwide safety and EMC/EMI regulations that apply. OMEGA is constantly pursuing certification of its products to the European New Approach Directives. OMEGA will add the CE mark to every appropriate device upon certification. The information contained in this document is believed to be correct but OMEGA Engineering, Inc. accepts no liability for any errors it contains, and reserves the right to alter specifications without notice. WARNING: These products are not designed for use in, and should not be used for, patient connected applications. SECTION SECTION SECTION SECTION SECTION 1 2 2.1 2.2 2.3 2.4 2.5 2.6 3 3.1 3.2 3.3 3.4 3.5 4.1 4.2 4.2.1 4.2.2 4.2.3 4.2.4 4.3 4.4 4.5 4.6 TABLE OF CONTENTS FMA-8500 Series Mass Flowmeters INTRODUCTION 2220000000 000 a a 0 a a aa au a 6 8 a 000 00 6 1 INSTALLATION 1.222010 R RER R a a a aa ana a ana ua 6 1 Unpacking ....... Le ae a ae a a aan 1 Recommended Storage Practice ......................... 2 Gas Connections ........... i aa a aa 2 Installation Procedure ............ ... ....... .......... 2 In-Line Filter ..... e nenecooaoannonee, 4 Electrical Connections ............ i... 4 OPERATION .........r-eoOaccccoccoocaaanorcarcorcaccocooo 5 Theory of Operation ................... 0.0.0. 5 Operating Procedure .............. 602000000000 eee 7 Zero Adjustment .............. 22.09.0000 aa 7 Calibration Procedure ............. 200000 a a aa 7 Response (Flow Output Signal) ......................... 11 MAINTENANCE ............ocrenccsocccesarecorervorcoo 13 General ....... an annaoonennenrenroerecaa 13 Troubleshooting .................. 900000. enero 13 System Checks ............... a a ea eee a nee 13 Bench Troubleshooting ...................... 0... 13 Sensor Troubleshooting ................................ 15 Cleaning Procedures ................................... 16 Sensor Tubes ......... a LA a a aa a La 17 Disassembly and Assembly ............................. 17 Using the Conversion Tables . ........................... 19 Restrictor Sizing ................ .... iii... 25 SPECIFICATIONS 1.102220 0000 aa aa a aa 0 a aa aa aa aa aa u 00 27 Parts List ..... 00... 0000ñ0ecareraneeever. 29 SECTION 1 INTRODUCTION The OMEGA® FMA-8500 Series Mass Flowmeters are designed for accurate mea- surement and control of gas flow, and consist of a flow sensor and an integral electronic signal conditioner. This combination produces a stable gas flow indica- tion that eliminates the need to continuously monitor and compensate for chang- ing gas pressures and temperatures. The meters feature fast response, superior repeatability, and produce a 0 to 5 VDC output signal linear to the mass flow rate for use in recording, indicating, and/or control purposes. AVAILABLE MODELS MODEL RANGE FMA-8500 0-10 SCCM FMA-8501 0-20 SCCM FMA-8502 0-50 SCCM FMA-8503 0-100 SCCM FMA-8504 0-200 SCCM FMA-8505 0-500 SCCM FMA-8506 0-1000 SCCM FMA-8507 0-2000 SCCM FMA-8508 0-5000 SCCM FMA-8509 0-10 SLM FMA-8510 0-20 SLM SECTION 2 INSTALLATION 2.1 Unpacking Remove the packing list and verify that all equipment has been received. If there are any questions about the shipment, please call OMEGA Customer Service Department at 1-800-622-2378 or (203) 359-1660. Upon receipt of the shipment, inspect the container and equipment for any signs of damage. Take particular note of any evidence of rough handling in transit. Immediately report any damage to the shipping agent. NOTE The carrier will not honor any claims unless all shipping material is saved for their examination. After examining and removing contents, save packing material and carton in the event reshipment is necessary. 2.2 Recommended Storage Practice If intermediate or long-term storage is required, it is recommended that equip- ment be stored in a sheltered area, with an ambient temperature of approxi- mately 70° F and 45% relative humidity. Upon removal from storage, visually inspect the condition of the equipment. If it has been in storage in excess of 10 months, or in conditions in excess of those recommended, all pressure boundary seals should be replaced and the device subjected to a pneumatic pressure test in accordance with applicable vessel codes. 2.3 Gas Connections ‘Standard inlet and outlet connections supplied on the FMA-8500 Series are '/” compression fittings for flow rates up to 10 SLPM, and */s" compression fittings for higher flow rates. When installing the flowmeter, care should be taken that no foreign materials enter the inlet or outlet of the instrument. Do not remove the protective end caps until time of installation. 2.4 Installation Procedure (Refer to Figures 2-1 and 2-2) | WARNING | When used with a reactive or toxic gas, contamination or cor- rosion may occur as a result of plumbing leaks or improper purging. Plumbing should be checked carefully for leaks and the controller purged with dry nitrogen before use. 1. The flowmeter should be located in a clean, dry atmosphere relatively free from shock and vibration. 2. Leave sufficient room for access to the electrical components. 3. Install in such a manner that permits easy removal if the instrument requires cleaning. 4. The flowmeter can be installed in any position. However, mounting orienta- tions other than the original factory calibration will result in +0.5% maximum full scale shift after re-zeroing. 5. When installing flowmeters with full scale flow rates of 10 SLPM or greater, sharp abrupt angles in the system piping directly upstream of the controller may cause a small shift in accuracy. If possible, have at least 10 pipe diameters of straight tubing upstream of the flowmeter. INCHES /MILLIMETERS Span & Zero Adjustments Cr JO ъ——— — — — >| ©. 5.48 139 9/16-18 UNF (Both Ends) 63 Inlet Outlet 15.9 | A у 1.48 1. --1 376 ' Y 2.3 —— A — 58.4 — 18.6 ror _ | 248 | X э—! 37.6 80 20.3 3 ' Вона View 18 | 8- 32UNC7 A x 3/16 Dp. | 1.59 ¿| | —36 a Mtg. Holes (2) "20.4 9.14 5.64 Connection “X** Dim. 1/4" Compression 4.32 Fitting 109.7 1/4” Tube VCO 3.86 98.0 1/4” Tube VCR | A 106.2 3/8” Compression 4.44 Fitting 112.8 Figure 2-1. FMA-8500 Series Dimensions 2.5 In-Line Filter It is recommended that an in-line filter be installed upstream from the flowmeter to prevent the possibility of any foreign material entering the flow sensor or con- trol valve. The filtering element should be periodically replaced or ultrasonically cleaned. Table 2-1 lists the maximum recommended porosity for each flow range. The minimum micron porosity that does not limit the full scale flowrate should be used. TABLE 2-1 MAXIMUM POROSITY MAXIMUM FLOW RATE RECOMMENDED FILTER SIZE 100 SCCM 1 micron 500 SCCM 2 micron 1 to 5 SLPM 7 micron 10 to 30 SLPM 15 micron 2.6 Electrical Connections To insure proper operation, the FMA-8500 must be connected as shown in Figure 2-2. The following minimum electrical connections must be made for new instal- lations: Chassis Ground; 0-5 Volt Signal Common; 0-5 Volt Signal Output; +15 VDC Supply; -15 VDC Supply. 1234567 8 00000000 0000000 9 10 11 12 13 14 15 Figure 2-2. “D” Type Connector Pin Arrangement PIN NO. FUNCTION COLOR CODE 2 0-5 Volt Signal Output White 3 Supply Common Red 5 +15 Vdc Supply Orange 6 -15 Vdc Supply Blue 9 Supply Voltage Common Grn/Blk 10 0-5 Volt Signal Common Org/Blk 14 Chassis Ground Grn/ White Note: 1. Cable shield is tied to chassis ground in meter connector. Make no connection on customer end. 2. All power leads must be connected to power supply. 4 SECTION 3 OPERATION 3.1 Theory of Operation The thermal mass flow sensing technique used in the FMA-8500 works as follows: A precision power supply provides a constant power heat input (P) at the heater, which is located at the midpoint of the sensor tube. Refer to Figure 3-1. At zero, or no flow conditions, the heat reaching each temperature sensor is equal. Therefore the temperatures T1 and T2 are equal. When gas flows through the tube, the upstream sensor is cooled and the downstream sensor is heated, pro- ducing a temperature difference. The temperature difference T2-T1, is directly proportional to the gas mass flow. The equation is: AT=AxPxCpxm Where: T = Temperature difference T2-T1 (°K) Cp = Specific heat of the gas at constant pressure (kJ /kg-"K) P = Heater power (k]/s) m = Mass flow (kg/s) A = Constant of proportionality (5-°K?/k}?) A bridge circuit interprets the temperature difference and a differential amplifier generates a linear 0-5 VDC signal directly proportional to the gas mass flow rate. The flow restrictor shown in Figure 3-1 performs a ranging function similar to a shunt resistor in an electrical ammeter. The restrictor provides a pressure drop that is linear with flow rate. The sensor tube has the same linear pressure drop /flow relationship. The ratio of the restrictor flow to the sensor tube flow remains constant over the range of the meter. Different restrictors have different pressure drops and produce meters with different full scale flow rates. The span adjustment in the electronics affects the fine adjustment of the meter’s full scale flow. The FM A-8500 has the following features incorporated in the integral signal con- ditioning circuit: * Fast response, adjusted by the anticipate potentiometer. This circuit, when properly adjusted, allows the high frequency information contained in the sensor signal to be amplified to provide a faster responding flow signal for remote indication. * Removable cleanable sensor permits the user to clean or replace the sensor. * Output limiting prevents possible damage to delicate data acquisition devices by limiting the output to +6.8 VDC and -.7 VDC. E, MO: WDJÉDIG [pPUOYDISdO 1osuas мо *1-£ 94NB14 YOLOIULS3U 41995 (1 5807] GRIS По) = ‚В, МО XEW M5395 OL *Xosddy = y, MOIJ ‚Я. + Vv. 3.2 Operating Procedure 1. Apply power to the flowmeter and allow approximately 45 minutes for the instrument to warm up and stabilize its temperature. 2. Turn on the gas supply. 3. Shut off flow to the meter and observe the flowmeter's output signal. If the output is not 0 mVdc (+10 mVdc), check for leaks. If none are found, refer to the re-zeroing procedure in Section 3.3. 4. Adjust for the desired flow and assume normal operation. 3.3 Zero Adjustment Each FMA-8500 is factory adjusted to provide a 0 +10 mVde signal at zero flow. The adjustment is made in a calibration laboratory which is temperature con- trolled to 70° F +2° F (21.2° C). After initial installation and warm-up in the gas system the zero flow indication may be other than the factory setting. This is primarily caused by changes in temperature between the laboratory and final installation. The zero flow reading can also be affected to a small degree by changes in line pressure and mounting attitude. To check zero, always mount the flowmeter in its final configuration and allow a minimum of 20 minutes for the temperature of the flowmeter and its environ- ment to stabilize. Using a suitable voltmeter, check the flowmeter output signal. If it differs from the factory setting, adjust it by removing the lower pot hole plug, which is located closest to the flowmeter body. Adjust the zero potenti- ometer (refer to Figure 3-3) until the desired output signal is obtained. 3.4 Calibration Procedure Calibration of the FM A-8500 requires the use of a digital voltmeter (DVM), a flow control valve or mass flow controller to set the flow rate, and a precision flow standard calibrator. It is recommended that calibration be performed only by trained and qualified service personnel. If the flowmeter is to be used on a gas other than the calibration gas, apply the appropriate sensor conversion factor. 1. Adjust the anticipate potentiometer fully clockwise (20 turns). Then adjust the anticipate potentiometer 10 turns clockwise to center the potentiometer. This will provide a rough adjustment of this circuit and make the flow signal stable for calibration. 2. Connect the DVM positive lead to the 0-5V signal output (terminal 3 card edge, pin 2 D-type) and the negative lead to signal common (TP4). Adjust the zero potentiometer for an output of 0 mV £2mV. COMPONENT SIDE OF PC BOARD \ 000. ы О / Ol ah o / / PIN OUT - TOP VIEW Figure 3-2. Calibration Connections . Increase the flow rate until the flow signal output equals 5.000V. Connect the DVM positive lead to the 0-5V signal output (pin 2 of the D-connector) and the negative lead to TP4. Connect the DVM positive lead to TP2 (linearity voltage) and the negative lead to TP4 (signal common). Adjust the linearity potentiometer for an output of 0.0V (zero volts). . Connect the DVM positive lead to the 0-5V signal output (pin 2 of D- Connector) and the negative lead to TP4 (circuit common). Measure the flow rate using suitable volumetric calibration equipment. Adjust the flow rate to the proper full scale flow. Flow signal voltage = measured flow rate x 5.000 full scale flow rate Adjust the span potentiometer until the voltage at pin 2 is 5.000V. . Measure the voltage at TP1. The voltage at TP1 is -100 times the output volt- age of the sensor. This voltage can range from -1.2 to -12 volts, however it is recommended that this voltage stay between 2.0 and 9.0 volts for proper operation. If the recommended voltage range exceeds this, then the desired accuracy and/or signal stability may not be achieved. If one of the limits is reached, check the restrictor sizing. Refer to Section 4-6. - Shut off the flow. Connect the DVM positive lead to flow signal output (terminal 3 card edge, pin 2 D-type) and the negative lead to TP4. Readjust the zero potentiometer for an output of 0 mV +2mV as necessary. Test Points: Circuit Common * Not Used ~ TP2 Lin. Voltage __ ТР1 Sensor Voltage —. (X-100) YY? ejeje О Sensor Span Connector Linearity Anticipate Zero 8 .- a № = = = = «= # gy = = = = = ¿Ne AY * d Figure 3-3. Location of Adjustment Potentiometers 7. Set flow rate for a flow signal output of 50% (2.500V) and measure the actual 10. 11. flow rate. Calculate the error as a percentage of full scale. Full Scale error = 100% Indicate flow rate — Measured flow rate Full scale flow rate Example: What is the percent of full scale error when full scale 15 equal to 100 seem? Measured flow rate = 50.0 SCCM Indicated flow rate = 48.5 SCCM Full scale error = 100 (48.5 -50) = =1.5% 100 . Calculate the TP2 correction voltage: (error recorded in step 7) x 0.450 volts Example: Error = -1.5% TP2 correction voltage = 1.5 x 0.450 = -0.675 volts. New TP2 voltage = 0 volts + (-0.675) = -0.675 volts . Set flow rate for a flow signal output of 100% (5.000V). Connect the DVM positive lead to TP2 and the negative lead to TP4. Adjust the linearity potentiometer for an output equal to the new calculated TP2 voltage. Repeat steps 4, 5, 6, and 7. a) If the error recorded in step 7 is less than 0.5%, then the calibration proce- dure is complete b) If the error is greater than 0.5%, set the flow rate for a flow signal output of 100% (5.000V): Connect the DVM positive lead to TP2 (linearity volt- age) and the negative lead to TP4 (circuit common). Calculate a new TP2 voltage as follows: New TP2 voltage = error recorded x 0.450V + measured TP2 voltage in step 9 Example: Sensor error = 0.7% Measured TP2 voltage = -0.567 volts TP2 correction = 0.7 x 0.450 = 0.315 volts New TP2 correction = 0.315 + (0.567) = -0.252 volts Adjust the linearity potentiometer for an output equal to the new TP2 voltage and then repeat steps 6, 7, and 8. NOTE: The voltage at TP2 can range from -10 to +3 volts, however, it is recom- mended that this voltage stay between -2.5 and +2.5 volts for proper operation. If the recommended voltage range is exceeded, the desired accuracy and/or signal stability may not be achieved. If one of the limits is reached, check the restrictor sizing. Refer to Section 4.6. 10 3.5 Response (Flow Output Signal) To achieve the proper response characteristics, the response compensation circuit must be adjusted. This adjustment is performed by observing the meter’s output signal when flow is suddenly stopped. Place a metering valve upstream of the FMA-8500 to control the flow rate. Also place a fast-acting shut-off valve immediately downstream of the flowmeter. A solenoid valve is ideal for this, but a manual toggle valve will do. Keep the length of interconnecting tubing as short as possible between the valves and the FMA-8500, since the tubing can have a dampening effect on the flow and the gas may not stop flowing the instant the downstream valve is closed as desired. Adjustment of the fast response circuit will not alter the steady state accuracy of the flowmeter as adjusted in Section 3.4. This procedure requires an oscilloscope, chart recorder, or DVM with a sample speed of three samples per second or greater to monitor the rate of change of the output signal during the test. Monitor the output signal at pin 2 of D-connector. TP4 may be used for ground. 1. With the shut-off valve open, adjust the metering valve so that the output voltage of the FMA-8500 is 4.050 to 5.000 VDC. Allow the output to become stable at this setting. 2. Close the shut-off valve to stop the flow. Observe the output signal as it decays. 3. The behavior of the output signal during the transition between 100% and 0% flow indicates the adjustment required of the anticipated potentiometer. Refer to Figure 3-4. a. If the flow singal decays to -0.05 to -.05V, then rises to 0.0V, the anticipate potentiometer is properly adjusted. b. If the flow signal decays rapidly and goes below —- 0.5V before rising to 0.0V, the anticipated potentiometer must be adjusted clockwise and steps 1 and 2 repeated. c. If the flow signal decays slowly and does not go below -0.05V, the antici- pate potentiometer must be adjusted counterclockwise and steps 1 and 2 repeated. 11 FEE A = — —+ == — + ев ADJUST CLOCKWISE (6§170A> 3I811710A 1Nd1N0 TIME ct FR RT Ty - - - [] ..—." * - .. qx" — o —]o— — a— — — «== OEY ADJUSTMENT CORRECT CELI04> 396LT0A 1NdiNO TIME LE E . . ee’ * * qe av сны чи ыы ча = — — += OO COUNTER CLOCKWISE ADJUST i i | | N + © м — ® т q CELIDA> 39%ULICA 1NdiN0 TINE Figure 3-4. Fast Response Adjustment 12 SECTION 4 MAINTENANCE 4.1 General No routine maintenance is required on the FMA-8500 other than an occasional cleaning. If an in-line filter is used, the filtering element should periodically be replaced or ultrasonically cleaned. 4.2 Troubleshooting 4.2.1 System Checks The FMA-8500 is generally used as a component in gas handling systems which can be quite complex. This can make the task of isolating a malfunction in the system a difficult one. An incorrectly diagnosed malfunction can cause many hours of unnecessary downtime. If possible, make the following system checks before removing a suspected defective mass flow controller for bench trouble- shooting or return, especially if the system is new. WARNING | If it becomes necessary to remove the flowmeter from the sys- tem after exposure to toxic, pyrophoric, flammable, or corro- sive gas, purge the flowmeter thoroughly with a dry inert gas such as nitrogen, before disconnecting the gas connections. Failure to correctly purge the flowmeter could result in fire, explosion, or death. Corrosion or contamination of the mass flowmeter upon exposure to air may also occur. 4.2.2 Bench Troubleshooting 1. Properly connect the mass flowmeter to a +15 VDC power supply, and con- nect an output signal readout device (4'/: digit voltmeter recommended) to terminals 2 and 3 (D-type pins 2 and 10). Refer to Figure 2-2. Apply power, and allow the flowmeter to warm up for 45 minutes. Do not connect to a gas source at this time. Observe the output signal and if necessary, perform the zero adjustment procedure (Section 3.3). If the output signal will not zero properly, refer to the sensor troubleshooting section and check the sensor. If the sensor is electrically functional, the printed circuit board is defective and will require replacement. | CAUTION | The FMA-8500 contains electronic components that are suscep- tible to damage by static electricity. Proper handling procedures must be observed during the removal, installation, or other handling of internal circuit boards or devices. Power to unit must be removed, and personnel must be grounded before any printed circuit card is installed, removed or adjusted. Printed circuit cards must be transported in a conductive bag or container. 13 2. Connect the flowmeter to a source of the gas on which it was originally cali- brated. Increase the flow until 100% indication (5.00 VDC) is achieved. Vary the flow rate over the 2 to 100% range and verify that the output signal fol- lows the flow rate. If possible, connect a flow measurement device in series with the mass flowmeter to observe the actual flow behavior and verify the accuracy of the mass flowmeter. If the mass flowmeter functions as described above, it is functioning properly and the problem may lie elsewhere. Table 4-1 lists possible malfunctions which ma troubleshooting. Problem Output stays at 0 volts regardless of flow. Output signal stays at +6.8V and there 1s flow through meter. Meter grossly out of calibration, flow is higher than indicated Meter grossly out of calibration, flow is lower than indicated Meter output oscillates TABLE 4-1 Possible Cause Clogged sensor Defective printed circuit board Defective sensor Partially clogged sensor Partially clogged restrictor Anticipate potentiometer out of adjustment Faulty pressure regulator Defective printed circuit board 14 y be encountered during bench BENCH TROUBLESHOOTING Corrective Action Clean sensor, Refer to cleaning procedure. Replace printed circuit board. Replace sensor assembly. Clean sensor. Replace restrictor. Adjust anticipate potentiometer. Refer to Section 3.4. check regulator output. Replace printed circuit board. Refer to Section 4.4. 4.2.3 Sensor Troubleshooting It is believed that the sensor coils are either open or shorted, troubleshoot using Table 4-2. If any of the steps do not produce the expected results, the sensor assembly is defective and must be replaced. Refer to Section 4.4. for the removal and assembly procedures to use when replacing the sensor. Do not attempt to disassemble the sensor. TABLE 4-2 SENSOR TROUBLESHOOTING 12345 SENSOR SCHEMATIC WIRE SN o o 2900 Or — White 4 Sensor common o — Yellow 1 Heater | Tow > | — Blue 5 Heater common Upstream H — Red 2 temperature sensor (Su) Su Downstream — Black 3 temperature + sensor (Sd) Sd Flex Circuit Wire Numbers OHMMETER CONNECTION RESULT IF ELECTRICALLY FUNCTIONAL ; Open circuit on ohmmeter. If either Yellow “grounay to body heater (yellow), or sensor common (Pin 1 or 4 to body) (white) are shorted, an ohmmeter reading will be obtained. White to red Nomina! 1100 ohms reading. (Pin 4 to Pin 2; White to black Depending on temperature and (Pin 4 to Pin 3) ohmmeter current. x Pin Pa Pina) Nominal 1200 ohm reading. Note: Remove the sensor connector from the PC Board for this procedure. 15 4.2.4 Cleaning Procedures If the flowmeter requires cleaning, use the following procedure. 1. 2. © © N oa>a Remove the unit from the system. Refer to Section 4.4 to disassemble the controller. | CAUTION | Do not soak the sensor assembly in a cleaning solution. If sol- vent seeps into the sensor assembly, it will damage the sensor, or significantly alter its operating characteristics. Use tweezers to push a 0.007" dia. piano wire through the flow sensor tube to remove any contamination. For best results, push the wire into the down- stream opening of the sensor tube (end closest to the control valve). The sen- sor tube can be flushed with a non-residuous solvent (Freon TF is recommended). A hypodermic needle filled with solvent can be used for this purpose. An alternate method for flushing out the sensor is to replace the restrictor ele- ment with a low flow plug resistor. This plug forces all the flow through the sensor and may dislodge any obstructions. Subject the flowmeter to a high differential pressure. Pressurizing the outlet of the flowmeter higher than the inlet may help force the obstruction upstream and out of the sensor tube. Deposits of silicon dioxide may be removed by soaking the internal parts in solution of 5% of hydrofluoric acid (5 parts hydrofluoric acid (HF), 95 parts water, followed by Freon TF). Sintered-type restrictor elements should be replaced, as it is not possible to adequately remove deposits from them. Wire mesh and A.C.L.F.E. type restrictor elements can be cleaned in an ultrasonic bath. Refer to Section 4.6 for the correct restrictor to use. Blow all parts dry with dry nitrogen and reassemble. Refer to Section 4.4. . Purge the assembled flowmeter with dry nitrogen. . Perform the calibration procedure in Section 3.4. . When the flowmeter is re-installed in the system, the connections should be leak tested and the system should be purged with dry nitrogen for 30 minutes prior to startup to prevent the formation of deposits. 16 4.3 Sensor Tube The sensor tube is part of a calibrated flow divider that is designed to operate within a preset gas flow range. The sensor assembly may be removed or replaced by referring to Section 4.4. If the sensor assembly is cleaned and reinstalled, a cal- ibration check should be performed. Refer to Section 3.4. 4.4 Disassembly and Assembly (Refer to Figure 5.2) The FM A-8500 may be disassembled in the field by the user for cleaning, a re- ranging or servicing. The flowmeter should be disassembled and assembled in a clean environment to prevent particulate contamination. Disassemble and assemble as follows: | WARNING | Do not attempt to disassemble the mass flowmeter until pres- sure has been removed and purging has been performed. Hazardous gas may be trapped in the valve assembly which could result in explosion, fire, or serious injury. A. DISASSEMBLY 1. Remove the three screws attaching the electronics cover and loosen the upper jack post on the D-Connector. Remove the electronics cover. | CAUTION | Be careful not to stress the sensor lead wire to sensor assembly junction when removing the sensor connector from the PC Board. If the sensor lead wires are stressed, an opening in the sensor wiring could result. 2. Unplug the sensor connector from the PC Board. Remove the two screws securing the bracket and PC Board. Remove the bracket and PC Board. 3. Remove the two screws and washers securing the sensor assembly. Remove the sensor assembly. Do not attempt to disassemble the sensor assembly. 4. Remove the back-up rings and the sensor assembly O-rings from the flow- meter body. CAUTION: Do not scratch the O-ring sealing surface; using an O-ring removal tool will help prevent this. 5. Remove the adapter fittings from the flowmeter body. 6. Remove the restrictor assembly from the inlet side of the flowmeter body. 17 B. ASSEMBLY It is recommended that all O-rings be replaced during assembly. All O-rings should be lightly lubricated with Halocarbon lubricant prior to their installation. | CAUTION | Do not get Halocarbon lubricant on the restrictor element or hands. This is a special inert lubricant which is not easily removed. 1. Examine all parts for signs of wear or damage; replace as necessary. 2. Place the restrictor O-ring on the restrictor assembly. Screw the restrictor assembly into the inlet side of the flowmeter body, tighten hand tight. | CAUTION | The steps that follow must be performed in this order. Placing the O-rings on the sensor before it is installed will result in damage to the O-rings, causing a leak. 3. Press the lubricated sensor O-ring into the flowmeter body. Press the back-up rings into the O-ring cavity above the O-rings. Be sure that the O-rings are seated squarely and the back-up rings are below the surface of the body. 4. Install the sensor assembly as shown in Figure 5-2 and secure with the two socket head cap screws and washers. Tighten the screws to 28 in-1bs. 5. Install the printed circuit board, secure with bracket, and two screws. Plug the connector from the sensor assembly onto the PC board. The flow arrow on the connector should be pointing in the direction of the flow. 6. Install the electronics cover on the controller and secure with three screws. Tighten the upper jack post on the D-connector. 7. Prior to installation, leak and pressure test the flowmeter to any applicable vessel codes. 18 4.5 Using the Conversion Tables If a mass flowmeter is operated on a gas other than the gas it was calibrated with, a scale shift will occur in the relationship between the output signal and the mass flow rate. This is due to the difference in heat capacities between the two gases. This scale shift can be approximated by using the ratio of the molar specific heat of the two gases, or sensor conversion factor. A list of sensor conversion factors is given in Table 4-3. To change to a new gas, multiply the output reading by the ratio of the gas factor for the desired gas to the gas factor for the calibration gas. Actual gas = Output x factor of the new gas flow rate reading factor of the calibrated gas Example: The flowmeter is calibrated for nitrogen. The desired gas is carbon diox- ide. The output reading is 75 SCCM when carbon dioxide is flowing. 75x 0.78 = 58.50 SCCM In order to calculate the conversion factor for a gas mixutre, the following formula should be used: Sensor 100 Conversion P1 P2 Pn Factor = sensor + sensor + sensor Mixture conversion conversion conversion factor 1 factor 2 factor n Where, P1 = percentage (%) of gas 1 (by volume) P2 = percentage (%) of gas 2 (by volume) Pn = percentage (%) of gas n (by volume) Example: The desired gas is 20% Helium (He) and 80% Chlorine (Cl) by volume. The desired full scale flow rate of the mixture is 20 SLPM. Sensor conversion factor for the mixture is: Mixture 100 Factor = 20 80 = .903 1.39 83 Air equivalent flow = 20/.903 = 22.15 SLPM air It is generally accepted that the mass flow rate derived from this equation is only accurate to +5%. The sensor conversion factors given in Table 4-3 are calculated based on a gas temperature of 21° C and a pressure of one atmosphere. The spe- cific heat of most gases are not strongly pressure and temperature dependent, however gas conditions that vary widely from these reference conditions may cause an additional error due to the change in specific heat from temperaure and/or pressure. 19 89°0 sax Sax SL TT SOD apyms ¡Auogrez LT0 sax sax S'8OI “105 apuon|4 uAUOq1eT 970 ON sax ZTI9 45 3aPHONHEHN3aL UOqIe SE'O ON sax SET TB 199 эрно]едеа] чодзе:) 660 sox Sax POT 67 ОЭ aprxouo]y; UOGIE”) 8Z'0 ON ON v ISLE ‘0D apIXoI(] uoqIeD ECO sax ON 67€ 28 SH"D ausmg 670 sax, ON SIE DOT 075 sueing 14740) sax sax 9:99 ‘419 SPLIONJJII] SUTUIOIg 600 Sax Sal Y LOL “Ig DPIION]FEJUS CI DUTUIOIG 850" ON sex YT os tag apuongu] u010g 70 ON Sax 669'G9 ‘128 apuoy>H] U010g 90 Sax Sax TSE ‘Ho duIs1y ОРТ ON ON €8°0C 17 uosly 610 Sax Sax ES69E HN етлощит\у 870 Sax ON 7809 "HD au y 00'1 ON ON €1°6C (элпухту\) пу 990 Sax ON 80€ 77 HI aua[A359V ‚103284 X 9[0W/Í *un y 1 UOISIOAUO a[qelaue| 4 эхо] pue 2 „SZ je dy [0904$ sen 10SU3G Jed >H123ds SYOLDV1 NOISdIANOD €-7 219V1 20 6€°0 ON ON 697 FL 4199 ZT UO914 8€0 ON ON ET9'ZZ 199 11 UOH 250 ON ON ¿SEIS “IHD ULIOJOLON] I €60 SEN San 66615 I aULON]I 650 SOX SOX 0767 OH apxO SUA Ig 790 Sax ON 877 ET TH 3USJ AU} 670 sax SOL 060201 TD°H®D apHOIYD [AURA GS'O sax oN 9p ES "HD sueur 650 SAR SOX 0767 O“(*HD) BYBAYRWI] 290 sax SOX 8TH Th HN“(ÉHD) SUTUIR AUS] 770 SOA sax 6/`59 CTD°HIS SUPTISOIO[YDICT GS'O sax sex 9FEES Ha aueroqi( 001 Sax ON 7026 ‘a wnuamnag] LSO sax sax 6SEZS IED auedordor>A7 050 sax sk DEE 9E NCD uasoueAD 70 So Sax 95459 TDHO WIOJOIONYD 650 sex Sax ZITZ9 ue apuongH] suvo[yD €8°0 Sax sex ZTE'SE “1D AULIOIYD Lope] я эощу! ау Т UOISI3AU07 ojquurure]] эхо], pue 5 ,s7 38 dy 10945 sen) 10SU3S yea H >IJBads SUOLIVI NOISUIANO? 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It creates a pressure drop which is linear with flow rate. This diverts a sample quantity of the process gas flow through the sensor. Each restrictor maintains the ratio of sensor flow to restrictor flow, however, the total flow through each restrictor is different. Different restrictors (micron porosity and active area) have different pressure drops and produce meters with different full scale flow rates. If the restrictor assembly has been contaminated with foreign matter, the pressure drop vs. flow characteristics will be altered and it must be cleaned or replaced. It may also be necessary to replace the restrictor assembly when the mass flowmeter is to be calibrated to a new full scale flow rate. Restrictor assembly replacement should be performed only by trained personnel. The FMA-8500 flowmeters use three types of restrictor assemblies, depending on full scale flowrate and expected service conditions. 1. Porous sintered metal for air equivalent flow rates up to and including 9.5 SLPM. The porosity ranges from 1-40 microns. This type of assembly is least expensive and should be used when the gas stream will not contain any par- ticulate matter. 2. Sintered wire mesh for air equivalent flow rates above 3.5 SLPM. These restrictor assemblies are made from a cylinder of sintered wire mesh and are easily cleaned if they become contaminated in service. 3. Anti-Clog Laminar Flow Element (ACLFE). This type of restrictor assembly is used for air equivalent flow rates less than 3.4 SLPM. The ACLFE is much more tolerant to particulate contamination than the sintered metal assembly. This is especially important when handling semiconductor gases that tend to precipitate particles. The ACLFE will also improve accuracy when operating at very low pressures. All restrictor assemblies are factory adjusted to prove a 115mm water column pressure drop for a specific flow rate. This corresponds to the desired full scale flow rate. A list of restrictor assemblies used in the flowmeter is shown in Table 4-4. Example: The desired gas is Silane (SiH,). The desired full scale flow rate is 200 SCCM. Sensor conversion factor is 0.68 from Table 4-3. Air equivalent flow = 200/0.68 = 294.1 SCCM air. In this example, a size P restrictor would be selected. Both sintered metal and ACLEFE are available for this size. Either type will work however, since Silane is known to precipitate silicon dioxide particles when contaminated, an anti-clog laminate flow element should be selected for this application. 25 If the calculated flow rate is such that two different size restrictors could be used, always select the larger size. If a mixture of two or more gases are being used, the restrictor selection must be based on the air equivalent flow rate of the mixture. Example: The desired gas is 20% Helium (He) and 80% Chlorine (Cl) by volume. The desired full scale flow rate of the mixture is 20 SLPM. Sensor conversion factor for the mixture is: Mixture 100 Factor = 20 1.39 80 83 = .903 Air equivalent flow = 20/.903 = 22.15 SLPM air. In this example, a size 4 wire mesh assembly would be selected. TABLE 4-4 STANDARD RESTRICTIONS Range sccm Air Equivalent Flow Part Number Size Low High Sintered ACLFE Wire Mesh D 8.022 11.36 5-110-7-296* | S-110-Z-275* E 11.23 15.90 5-110-7-297 5-110-7-276 Е 15.72 22.26 5-110-7-298 S-110-7-277 G 22.01 31.17 5-110-7-299 5-110-7-278 H 30.82 43.64 5-110-7-300 5-110-7-279 J 43.14 61.09 5-110-7-301 5-110-7-280 K 60.40 85.53 5-110-7-302 5-110-7-281 L 84.56 119.7 S-110-7-303 5-110-7-282 M 118.4 167.6 5-110-Z-304 5-110-7-283 N 165.7 234.7 S-110-Z-305 5-110-7-284 P 232.0 328.6 S-110-Z-306 S-110-Z-285 Q 324.8 460.0 S-110-Z-307 5-110-7-286 R 454.8 644.0 S-110-Z-308 S-110-7-287 S 636.7 901.6 S-110-Z-309 5-110-7-288 T 891.4 1262. S-110-Z-310 5-110-7-289 U 1248. 1767. 5-110-7-311 S-110-Z-290 V 1747. 2474. 5-110-7-312 S-110-Z-291 W 2446. 3464. S-110-Z-313 5-110-7-292 X 3424. 4849. S-110-Z-314 S-110-Z-319* Y 4794. 6789. 5-110-7-208 5-110-Z-321 1 6711. 9504. S-110-Z-192 5-110-7-317 2 9396. 13310. 5-110-7-228 3 13150. 18630. 5-110-Z-226 4 18420. 30000. S-110-Z-224 *Materials: BMT = 316 Stainless Steel (ACLFE only) CVA = Hastelloy C (ACLFE and sintered) DCA = Monel R (ACLFE and sintered) BMA = Sintered 316 Stainless Steel (wire mesh and sintered) 26 SECTION 5 SPECIFICATIONS Standard Ranges: Accuracy: Repeatability: Response Time: (Flow Output Signal) Power Requirements: Ambient Temperature Limits: Working Pressure: Output Signal: Temperature Sensitivity: Power Supply Sensitivity: Mounting Attitude Sensitivity: Leak Integrity: Usable Range: Electrical Connection: Pressure Coefficient: 3 SCCM to 30 SLPM (nitrogen equivalent) +1% full scale including linearity at calibration conditions +1.5% full scale including linearity for flow ranges greater than 20 SLPM. 0.25% of rate Less than 3 seconds response to within 2% of full scale final value with a 0 to 100% flow step. +15 Vdc, 35 mA, 1 watt power consumption Operating: 40 to 150° F (5 to 65° C) Non-operating: -13 to +212° F (-25 to 100° C) 4500 psi (31.03 MPa) maximum 0-5 Vdc into 2000 ohms or greater. Maximum ripple 3mV. Zero: less than +0.075% F.S. per * C Span: less than +1% FS. shift over 10-50° C +0.09% full scale per % power supply voltage variation +0.5% maximum full scale deviation after re-zeroing 1 x 10” Atm. scc/sec Helium 50 to 1 D-type, 15-pin connector +.03%/psi up to 200 psi of N 27 soBupyy dass Moj4 04 asuodsay ¡D>IdA] * | -G a4nBiy (SANOS) IWIL QE B2 92 »2 22 62 BT 91 Y he. ao 1 À 1 1 1 1210817 8 9 # € @ Г T | -d == = он === LNd1NO IN MOH ЛУГЦОУ ————— ONVNNOS OISd ST = 3HNSS3Hd LI INI NIDOLLIN 'Wd?S 001 SIINVHI diLS ONVIWNOS Ty = res -001 I1YIS TIN3 JO 1N393Yd 28 5.1 Parts List Y Г © AE PL Figure 5-2. FMA-8500 Series Parts Drawing 29 | TABLE 5-1 REPLACEMENT PARTS LIST Item No. Description Part Number 1 Flowmeter Body 092-7-773-BM% 2 PC Board Assembly (D-Connector) 5-097-Y-847-AAA 3 Sensor Assembly S-774-Z-607-AAA 4 O-ring, Sensor, Size 004 375-B-004-*** 5 Back-Up Ring, Sensor 962-A-027-NZA 6 Screw Sensor-Body /751-Z-107-AA0 7 Lock Washer, Sensor 926-D-006-AW A 8 Screw, Sensor-PC Board-Cover 753-L-056-AWZ 9 Restrictor Assembly and Components (Refer to Section 4.6 for size) 10 O-ring, Restrictor, Size 109 375-B-109-*** 11 Electronics Cover Can (D-Connector) 219-Z-392-EA% 12 Cover Plate 852-Z-213-EA% 13 PC Board Mounting Bracket 079-Z-135-EAA 14 Pot Hole Plug 620-Z-434-SXA Fittings: 1/4" Compression, Swagelok 320-B-136-BMA NS 1/4" Male VCR, Cajon 315-Z-036-BMA 1/4" Male VCO, Cajon 315-Z-035-BMA 15 O-ring, Fitting, Size 906 375-B-906-*** NS O-ring, VCO Gland, Size 010 375-B-010-*** Interconnecting Cables: Length D-type Connector on one end 5 Feet S-124-Z-191-AAA with no termination 10 Feet | S-124-Z-362-AAA NS on other end 25 Feet | S-124-Z-346-AAA 50 Feet | S-124-Z-442-AAA Connector on one end 5 Feet S-124-7-576-AAA NS with Connector for FM A-8500 10 Feet | S-124-Z-577-AAA Series Secondary 25 Feet | S-124-Z-578-AAA Electronics on other end 50 Feet | S-124-Z-579-AAA NS 8-32 Mounting Screw Customer Supplied ** QTA-Viton, SUA-Buna, TTA-Kalrez NS Not shown 30 NOTES 31 OMEGA ENGINEERING, | workmanship for a period of 13 months from date of purchase. OMEGA Warranty adds an additional one (1) month grace period to the normal one (1) year product warranty to cover handling and shipping time. This ensures that OMEGA's customers receive maximum coverage on each product. If the unit should malfunction, it must be returned to the factory for evaluation. OMEGA's Customer Service Department will issue an Authorized Return (AR) number immediately upon phone or written request. Upon examination by OMEGA, if the unit is found to be defective it will be repaired or replaced at no charge. OMEGA's WARRANTY does not apply to defects resulting from any action of the purchaser, including but not limited to mishandling, improper interfacing, operation outside of design limits, improper repair, or unauthorized modification. This WARRANTY is VOID if the unit shows evidence of having been tampered with or shows evidence of being damaged as a result of excessive corrosion; or current, heat, moisture or vibration; improper specification; misapplication; misuse or other operating conditions outside of OMEGA’s control. Components which wear are not warranted, including but not limited to contact points, fuses, and triacs. OMEGA is pleased to offer suggestions on the use of its various products. However, OMEGA neither assumes responsibility for any omissions or errors nor assumes liability for any damages that result from the use of its products in accordance with information provided by OMEGA, either verbal or written. OMEGA warrants only that the parts manufactured by it will be as specified and free of defects. OMEGA MAKES NO OTHER WARRANTIES OR REPRESENTATIONS OF ANY KIND WHATSOEVER, EXPRESSED OR IMPLIED, EXCEPT THAT OF TITLE, AND ALL IMPLIED WARRANTIES INCLUDING ANY WARRANTY OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE ARE HEREBY DISCLAIMED. LIMITATION OF LIABILITY: The remedies of purchaser set forth herein are exclusive and the total liability of OMEGA with respect to this order, whether based on contract, warranty, negligence, indemnification, strict liability or otherwise, shall not exceed the purchase price of the component upon which liability is based. In no event shall OMEGA be liable for consequential, incidental or special damages. CONDITIONS: Equipment sold by OMEGA is not intended to be used, nor shall it be used: (1) as a “Basic Component” under 10 CFR 21 (NRC), used in or with any nuclear installation or activity; or (2) in medical applications or used on humans. Should any Product(s) be used in or with any nuclear installation or activity, medical application, used on humans, or misused in any way, OMEGA assumes no responsibility as set forth in our basic WARRANTY/DISCLAIMER language, and additionally, purchaser will indemnify OMEGA and hold OMEGA harmless from any liability or damage whatsoever arising out of the use of the Product(s) in such a manner. he eh anty and repair requests/inquiries to the OMEGA Customer Service Department. BEFORE RETURNING ANY PRODUCT(S) TO OMEGA, PURCHASER MUST OBTAIN AN AUTHORIZED RETURN (AR) NUMBER FROM OMEGA'S CUSTOMER SERVICE DEPARTMENT (IN ORDER TO AVOID PROCESSING DELAYS). The assigned AR number should then be marked on the outside of the return package and on any correspondence. The purchaser is responsible for shipping charges, freight, insurance and proper packaging to prevent breakage in transit. FOR WARRANTY RETURNS, please have FOR NON-WARRANTY REPAIRS, consult the following information available BEFORE OMEGA for current repair charges. Have the contacting OMEGA: following information available BEFORE 1. P.O. number under which the product was | contacting OMEGA: PURCHASED, 1. P.O. number to cover the COST 2. Mode! and serial number of the product of the repair, under warranty, and 2. Model and serial number of product, and 3. Repair instructions and/or specific 3. Repair instructions and/or specific problems problems relative to the product. relative to the product. OMEGA's policy is to make running changes, not model changes, whenever an improvement is possible. This affords our customers the latest in technology and engineering. OMEGA is a registered trademark of OMEGA ENGINEERING, INC. © Copyright 1996 OMEGA ENGINEERING, INC. All rights reserved. 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Key features
- Accurate gas flow measurement
- Integral electronic signal conditioner
- Stable gas flow indication
- Fast response
- Superior repeatability
- Linear 0 to 5 VDC output signal
- Removable cleanable sensor
- Output limiting
Frequently asked questions
The FMA-8500 Series Mass Flowmeters are designed for accurate measurement and control of gas flow.
The FMA-8500 Series Mass Flowmeters consist of a flow sensor and an integral electronic signal conditioner.
The FMA-8500 Series Mass Flowmeters produce a linear 0 to 5 VDC output signal.
The FMA-8500 Series Mass Flowmeters are designed for accurate measurement of gas flow.
The FMA-8500 Series Mass Flowmeters have a fast response time.