the Catalog

the Catalog
TURBOVACUUM
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SERVING CLIENTS IN 45 COUNTRIES
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TURBO VACUUM
Turbo Vacuum since 2005, has been the first leading
company to address the increasing demands of the specific
high to ultra-high vacuum industry with products and service.
High Vacuum technology today is a niche sector in the industry
of vacuum producing ultimate pressures to 5 x10 -10 or
two-billionth of atmospheric pressure. Until now high vacuum
was classified as just another segment, grouped into the overall
umbrella of the vacuum world.
Today Turbo Vacuum offers a complete range of cutting edge
turbo pump products and services. We know the challenges of
high/ultra-high vacuum technology and how to reach
performance expectations to meet or surpass any application
requirement. Our niche industry experience, driven by
understanding the application, analyzing the constraints, and
specifying the client's needs has given us the unique ability to
solve and restore any problem.
Throughout the United States and World where industry and
research needs high vacuum technology for their development
or production, Turbo Vacuum will be present. Turbo Vacuum will
be an essential tool in high vacuum system integration,
replacement, service, research and development, drug
discovery, mass spectrometry, semiconductor, and
everyday high vacuum technology driven demands. In the
following pages of this catalog you will discover all the
outstanding high vacuum products which offer a multiple
number of solutions and combinations.
Our goal will be to assist every client with their specific high
vacuum need. We look forward to hearing from you soon.
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table of contents
about us
For assistance please contact us at: 407.563.3881
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1. K YK Y
3. O s ak a
5. O s ak a Magne t i c al l y S us p e nde d
7. A gi l e nt
9. Edw ards
11. Edw ards S T P Magne t i c Be ar i n g
13. Pfe i f fe r
15. A di x e n Pfe i f fe r Magl e v Hyb r i d
17. O e r l i k on L e yb ol d
19. O e r l i k on L e yb ol d MA G
21. EBA R A Magne t i c al l y L e vi t at e d
23. T YH Tur b o Pum p s
25. I ns t ant S ys t e m s
26. He l i um L e ak D e t e c t or
27. vC ar t S t at i ons
29. Gaugi ng
31. Mas s S p e c t rom e t r y
33. O i l -Fre e Bac k i ng Pum p s
35. Hardw are
37. Tur b o R e p ai r K i t s and Manual s
39. Tur b o S e r vi c e s
40. C ont rol l e r S e r vi c e s
41. C onve r s i on C har t
TurboVacuum 2011/2012 Catalog: Effective January 1st, 2011. Prices are subject to change without notice
Terms: net 30 days Payment Remittance Address: TurboVacuum FOB: Shipping Point Minimum Order: $50
Master Card, Visa, and Wire Transfers accepted Shipping Terms: FOB factory OEM and Quantity Discounts:
are available to bonafide customers upon request.
Please contact the National Sales Center for questions at 407-563-3881 or Fax us at 407-563-3950.
www.turbovacuum.com
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TURBO VACUUM
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TECHNICAL SPECIFICATIONS
KYKY Turbo Pumps
F110E
FF620
FF700E
FF1200E
F1300E
F1600E
F2000E
F3500E
ISO 100
CF 100
ISO 160
CF 160
ISO 160
CF 160
ISO 200
CF 200
ISO 200
CF 200
ISO 250
CF 250
ISO 250
ISO 400
600
700
1200
1300
1600
2000
3500
10-9
6 X 10-4
>10-9
6 X 10-4
10-9
6 X 10-3
>10-9
1 X 10-3
10-8
10-3
>10-9
6 X 10-3
>10-8
5 X 10-2
10 - 9
10 - 10
10 - 9
10 - 9
10 - 9
10 - 7
10 - 7
<4.5
<4
<6
<6
<7
6
<20
42,300
36,000
36,000
24,000
24,000
27,000
24,000
15,000
Any
Vertical
+/- 5%l
Any
Vertical
+/- 5%
Any
Vertical
+/- 5%
Any
Vertical
+/- 5%
0.1
0.1
1.5
0.1
1.5
1.5
0.1
KF25
KF40
KF40
KF40
KF40
KF50
KF50
KF100
16
64
42
86
64
103
70
300
FD110A
FD11
FD11
FD11
FD11
FD11
FD11
FD3500KW
$8,900.00
$12,540.00
$9,800.00
$16,500.00
$11,480.00
$22,000.00
$31,850.00
Inlet Flange
KYKY Technology Development Ltd., founded in 1958, was previously called Beijing R&D center,
Chinese Academy of Sciences (CAS). In the year 2000 the former Beijing R&D center of CAS
transitioned into the new company called KYKY. Based on its past forty-eight-year knowledge
accumulation, KYKY is positioned as a hi-tech corporation integrated with scientific instruments. A
leading product of KYKY is the Turbo Molecular pump. The KYKY turbo pump is one of the most
recognized in China and has also has been sold worldwide with a good reputation. The turbo pump
series range from 100 - 3500 liters a second. These turbo pumps are ideal for economical standard
applications requiring simple and reliable high vacuum.
Pumping Speed, L/S
Nitrogen
110
Compression Ration
Nitrogen
Hydrogen
>10-8
5 X 10-2
Ultimate Pressure (mbar)
10 - 8
Features
Startup Time (min)
• Economical
• Ceramic Ball Bearings
• ISO/CF Flange Choice
• Compact Series Allow For Dry Backing Pumps
• Units Provided As Complete Set - Turbo, Controller, Cables, Cooling, Inlet Screen
<2
Rotational Speed (rpm)
Orientation
Backing Pressure (mbar)
ORDERING INFORMATION
F110E
Outlet Flange
FF620
FF700E
FF620EWCI
FF700ACI
FF700EWCI
F1200E
F1300E
F1600E
F2000E
F3500E
Turbo Pump System ISO
Air Cooling
Water Cooling
F110EACI
F110EWCI
F1200EWCI
F1300EWCI
F1600EWCI
F2000EWCI
F3500EWCI
Turbo Pump System CF
Air Cooling
Water Cooling
01
F110EACCF
F110EWCCF
FF620EWCCF
F700ACCF
FF700EWCCF
Weight (lb)
Controller
Complete System Price
F1200EWCCF
F1300EWCCF
www.turbovacuum.com
F1600EWCI
F3500EWCCF
$5,940.00
www.turbovacuum.com
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TURBO VACUUM
For assistance please contact us at: 407.563.3881
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Osaka Turbo Pumps
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TECHNICAL SPECIFICATIONS
Osaka Vacuum's leadership in the field of turbo molecular pumps began in 1970 with their production
of the first turbo pump in Japan. Since then, Osaka has developed the world's first compound
molecular pump. Today, Osaka vacuum continues to bring you the same reliable products as always.
Along with the proven performance of the Osaka pumps, their turbos are designed to handle even
the toughest processes, providing you with pumps you can count on day-after-day and
year-after-year. All units are provided as a complete set with controller and cables to make selection
easy and economical.
TG70
TG220F
TG350F
TG450F
TG800F
TG1100F
TG2400F
ISO 63
CF 63
ISO 100
CF 100
ISO 100
CF 100
ISO 160
CF 160
ISO 160
CF 160
ISO 200
CF 200
ISO 250
CF 250
200
100
N/A
330
200
N/A
450
240
N/A
850
720
N/A
1100
820
N/A
2400
1100
N/A
10 - 8
10 - 8
10 - 9
10 - 9
10 - 9
10 - 9
1
3
3
10
10
1.5
80,000
48,000
46,000
45,000
33,600
33,600
33,600
Any
Any
Any
Any
Any
Any
Any
9
2
3
3
10
10
NW16
NW25
NW25
NW25
NW40
NW40
NW40
10
11
13
15.4
66
66
103
TC76
TC221
TC353
TC353
TC1104
TC1104
TC2403
$10,986.00
$13,541.00
$13,541.00
$22,300.00
$22,300.00
$26,800.00
Inlet Flange
Pumping Speed, L/S
Nitrogen
Helium
Hydrogen
70
45
N/A
Ultimate Pressure (mbar)
Features
10 - 10
• New Design Rotor
• Ceramic Ball Bearings
• Common Parts
• Units Provided As Complete Set - Turbo, Controller, Cables, Cooling, Inlet Screen
Startup Time (min)
2
Rotational Speed (rpm)
Orientation
Backing Pressure (mbar)
ORDERING INFORMATION
Outlet Flange
TG70
TG220F
TG350F
TG450F
TG800F
TG1100F
TG2400F
TG70FRAB
TG70FRNB
TG220FRAB
TG220FRWB
TG350FRAB
TG350FRWB
TG450FBAB
TG450FBWB
TG800FBAB
TG800FBWB
TG1100FBAB
TG1100FBWB
TG2400FBAB
TG2400FBWB
Weight (lb)
Turbo Pump System ISO
Air Cooling
Water Cooling
Turbo Pump System CF
Air Cooling
Water Cooling
03
TG70FRAB
TG70FRNB
TG220FCAB
TG220FCWB
TG350FCAB
TG350FCWB
TG450FCAB
TG450FCWB
www.turbovacuum.com
TG800FCAB
TG800FCWB
TG1100FCAB
TG1100FCWB
TG2400FCAB
TG2400FCWB
Controller
Complete System Price
$6,980.00
www.turbovacuum.com
04
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TURBO VACUUM
For assistance please contact us at: 407.563.3881
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Osaka Magnetically Suspended Turbo Pumps
The Osaka magnetically suspended turbo pumps are designed for a wide range of applications
including heavy-duty processes. These units are completely oil-free. In case of a abnormality in the
primary power supply, levitation is maintained by the controller using a non-battery feature. The
turbo has an automatic Speed/ 5-Axis active electromagnetic control, free of contact surfaces
which provide virtually limitless service life and minimum vibration thanks to the special controller
functions.
TECHNICAL SPECIFICATIONS
TG390M/C
TG420M/C
TG900M/C
TG1300M/C
TG2400M
TIG2200M/C
TIG3300M
ISO 160
CF 160
ISO 160
CF 160
ISO 200
CF 200
ISO 250
CF 250
ISO 250
CF 250
ISO 320
CF 320
400
300
N/A
900
1050
N/A
1300
1200
N/A
2400
1100
N/A
2200
1800
N/A
3200
2200
N/A
10 - 10
10 - 10
10 - 10
10 - 10
10 - 10
10 - 9
2
3
4
5
5
7
7
Any
Any
Any
Any
Any
Any
Any
3
3
3
3
2
2
1.2
NW25
NW25
NW40
NW40
NW40
NW40
NW40
31
31
77
77
105
137
152
TC010M
TC010M
TC010M
TC010M
TC010M
Integrated
Integrated
$26,000.00
$38,000.00
$43,000.00
$61,000.00
$36,500.00
$38,500.00
Inlet Flange
ISO 100
CF 100
Pumping Speed, L/S
Features
Nitrogen
Helium
Hydrogen
• Wide Pressure Range
• Vibration Free
• Mountable In Any Orientation
• Automatic Live 5 – Axis Control
• Energy Saving
• Durable Structure For Air Inrush
• Units Provided As Complete Set - Turbo, Controller, Cables, Cooling, Inlet Screen
• Units With Integrated Controller Power Supply
340
290
N/A
Ultimate Pressure (mbar)
10 - 10
Startup Time (min)
Orientation
Backing Pressure (mbar)
Outlet Flange
ORDERING INFORMATION
TG390M/C
TG420M/C
TG900M/C
TG1300M
TG2400M
TG420MBAB
TG420MBWB
TG900MBAB
TG900MBWB
TG1300MBAB
TG1300MBWB
TG2400MBAB
TG2400MBWB
TIG2200M/C
TIG3300M
Turbo Pump System ISO
Air Cooling
Water Cooling
TG390MBAB
TG390MBWB
Controller
TIG2204MBWC
TIG3300MCWC
Complete System Price
Turbo Pump System CF
Air Cooling
Water Cooling
05
TG390MCAB
TG390MCWB
Weight (lb)
TG420MCAB
TG420MCWB
TG900MCAB
TG900MCWB
TG1300MCAB
TG1300MCWB
www.turbovacuum.com
TG2400MCAB
TG2400MCWB
$24,000.00
TIG2204MCWC
TIG3300MCWC
www.turbovacuum.com
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TURBO VACUUM
For assistance please contact us at: 407.563.3881
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Agilent Technologies Varian Turbo Pumps
Agilent offers a broad range of turbomolecular pumps with from 46 to 7,500 liters/second pumping speed,
including the Navigator and TwisTorr lines. Agilent turbopumps are optimized for high compression ratio for low
base pressure, high pressure differential for high throughput and high foreline pressure. The turbopumps are oil-free,
contamination free, may be operated in any position without stress on materials and have low failure rates, with
typical MTTF in excess of 250,000 hours. Applications for the turbo pumps include high energy physics and research,
nanotechnologies, mass spectrometry, industrial vacuum processing, and semiconductors as well as dedicated
pumps for Scanning Electron Microscope (SEM) work.
Features
• State-of-the-Art MacroTorr Technology
• Designed for Very High Gas Load Operations
• Monolithic Rotors
• Highly Reliable
• Maintenance-Free Ceramic Ball Bearings
• High Speed, High Compression
• On Board Controller with Windows Based Software
Turbo V-Series Navigator and Rack Controllers
The Turbo V-Series controllers are a microprocessor controlled frequency converter with self diagnostic and
protection features that ensure the highest degree of reliability. The compact rack system has multifunction
alphanumeric displays for pump status and error code diagnostics. The front panel has a two line dot matrix
LCD display with back lighting. It displays rotational speed, current, power and bearing temperature. It also
records vacuum cycles, cycle time, current cycle, and total operating hours. The Navigator controllers are
microprocessor controlled frequency converters fully controllable through PC software.
TECHNICAL SPECIFICATIONS
V81-T
V81-M
V301
V304FS
V551
V750
V850
V1001
V2300
NW 40
ISO 63
CF 63
NW 40
ISO 63
CF 63
ISO 100
CF 100
ISO 160
CF 160
ISO 100
CF 100
ISO 160
CF 160
ISO 100
CF 100
ISO 160
CF 160
ISO 160
CF 160
ISO 200
CF 200
ISO 200
CF 200
ISO 250
ISO 250
CF 250
77
65
50
77
65
50
280
230
210
250
255
220
550
600
510
700
600
580
750
690
590
1050
900
920
2050
1800
1500
7 x 108
3 x 103
3 x 102
5 x 108
8 x 104
7 x 103
7 x 108
1 x 105
1 x 104
1011
108
106
1 x 109
1 x 107
1 x 106
1 x 1011
1 x 108
1 x 106
1 x 1011
1 x 108
1 x 106
1 x 109
5 x 107
2 x 106
108
1 x 105
1 x 104
10 - 9
10 - 9
10 - 10
10 - 10
10 - 10
10 - 10
10 - 10
10 - 10
10 - 10
1
1
3
3
5
3
3
4
6
80,000
80,000
56,000
60,000
42,000
SELECTABLE
SELECTABLE
38,000
SELECTABLE
Any
Any
Any
Any
Any
Any
Any
Any
Any
0.1
< 10
4
10
0.1
6
6
0.1
0.1
NW16
NW16
NW16
NW16
NW25
NW25
NW25
NW40
NW40
4
5
12
13
43
35
36
54
120
$3,890.00
$4,675.00
$8,180.00
$8,868.00
$15,015.00
$17,565.00
$19,125.00
$22,050.00
$34,750.00
A68I
A68I
RACK
NAVIGATION
FSAG
RACK
NAVIGATION
RACK
NAVIGATION
RACK
NAVIGATION
$6,376.00
$9,655.00
$10,598.00
$18,770.00
N/A
N/A
Inlet Flange
Pumping Speed, L/S
Nitrogen
Helium
Hydrogen
Compression Ratio
Nitrogen
Helium
Hydrogen
ORDERING INFORMATION
V81-T
V81-M
V301
V304FS
V551
V750
V850
V1001
V2300
Ultimate Pressure (mbar)
Turbo Pump System Complete: Pump, Inlet Screen, Navigation Controller, 2 Main Cables, Serial Cable, Navigation Software, Bracket for Side Mounting
NW Inlet
ISO Inlet
CF Inlet
ISO Inlet
CF Inlet
9698906
9698905
9698907
9698902
9698901
9698903
9698828
9698829
9698830
9698831
9698834
9698835
9698922
9698932
9698834
9698835
9698832
9698833
9698813
9698814
9698818
9698815
9698816
9698819
Startup Time (min)
9698838
9698839
9698841
Rotational Speed (rpm)
Turbo Pumps Only
NW Inlet
ISO Inlet
CF Inlet
ISO Inlet
CF Inlet
9698906
9698905
9698907
9698902
9698901
9698903
Orientation
9698918
9698919
9698920
9698921
X35001120
X35001121
X35001122
X35001123
9698922
9698923
9698924
9698925
9698013
9698014
9698015
9698016
9698831
9698832
9698934
9696000
9696001
Outlet Flange
Controller
Rack 110V
Backing Pressure (mbar)
9698988
9698988
9699537
X350664002
9699544
9699575
969925
9699554
9699539
Weight (lb)
Pump Cable (8m)
9699958
Price
Cooling Kit
Air
Water
9699290
9699823
9699290
9699823
9699299
9699347
9699949
9699337
9699314
9699347
9696503
9699347
9696503
9699347
9699315
9699337
Inlet Screen
NW
ISO
ISO
07
9699309
9699300
9699309
9699300
9699299
9699304
X350068000
9699302
9699299
9699304
www.turbovacuum.com
9699304
9699316
9699350
9699338
Controller
RACK
RACK
NAVIGATION NAVIGATION
Complete System Price
$5,736.00
www.turbovacuum.com
$27,600.00
N/A
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TURBO VACUUM
For assistance please contact us at: 407.563.3881
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Edwards Turbo Pumps
TIC Controller
The new nEXT turbo pumps were designed to combine all the latest technological advances with two
decades of experience based on the tried and trusted EXT/STP turbo pumps. The new nEXT units set the
benchmark for performance, reliability, and end user serviceability, for a scientific turbo. They are
available in three sizes. New technologies employed in the nEXT turbos have enabled the pumps to
be serviced by the end user in the field in less than 10 minutes. Choose from a complete line of
accessories to make integration easy.
Features
Features
• Multiple Drag Stag
• Field Serviceable Lower Bearing
• Permanent Magnetic Upper Bearing
• Built in Drive Unit With Cable
• Mountable Any Configuration
• Exceptional Pumping Speeds And Compression Ratios
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The TIC, (turbo and instrument controller), has been developed with two key objectives in mind. To provide an
alternative to the lower end models in the AGC range, offering enhanced functionality, serial communications
and a powerful PC program as standard. The second is to provide a new end-user/small OEM turbo controller,
able to support the new ranges of 24V DX and EXDC turbos and backing pumps. Taking advantage of the
above developments enabled a new-combined instruments and turbo controller to be developed which
provides the customer with a “one-box” controller for the entire vacuum system.
• Universal Turbo Controller
• Backing Pump Support
• Relay Options
• Simple System Configuration
• Compact Instrument
• Clear, Easy To Use Graphic User Interface
• Universal Power Supply
• Serial Communications
• Windows PC Program
TECHNICAL SPECIFICATIONS
EXT75DX
nEXT240D
nEXT300D
nEXT400D
nEXT556H
NW40
ISO63
CF63
ISO 100
CF 100
ISO 100
CF 100
ISO 160
CF 160
ISO 160
CF 160
61
57
53
240
230
165
300
340
280
400
390
325
540
580
500
1 x 101
1 x 106
1 x 104
1 x 1011
3 x 105
1 x 104
1 x 1011
1 x 106
1 x 105
1 x 1011
1 x 108
5 x 105
1 x 1010
108
106
10 - 9
10 - 10
10 - 10
10 - 10
10 - 10
2
20
20
20
6
90,000
60,000
60,000
60,000
50,000
Any
Any
Any
Any
Vertical/Horizontal
<5
9.5
9.5
10
0.3
NW16
NW25
NW25
NW25
NW25
6
13
14
15
$5,470.00
$8,950.00
$9,400.00
$10,800.00
$15,278.00
T1C
T1C
T1C
T1C
EXC300
$1,429.00
$1,968.00
$1,968.00
$1,968.00
$3,980.00
Inlet Flange
Pumping Speed, L/S
Nitrogen
Helium
Hydrogen
Compression Ratio
Nitrogen
Helium
Hydrogen
Ultimate Pressure (mbar)
ORDERING INFORMATION
EXT75DX
Startup Time (min)
nEXT240D
nEXT300D
nEXT400D
EXT556H
Turbo Pump
NW Inlet
ISO Inlet
CF Inlet
ISO
B722-43-000
B722-41-000
B722-42-000
B812-00-100
B812-00-200
B822-00-100
B822-00-200
B832-00-300
B832-00-400
B777-51-000
B777-02-000
Orientation
Backing Pressure (mbar)
Controller
D397-11-000
D397-21-000
D317-21-000
D397-21-000
D396-14-000
Pump Cable (3m)
D396-18-030
D396-45-000
Air Cooling
B580-53-075
B580-53-185
B580-53-185
B580-53-175
Outlet Flange
Weight (lb)
B580-53-561
Price
Vent Vale
B580-66-010
B580-66-010
B580-66-010
B580-66-010
B580-66-010/011
D400-13-120
D400-13-120
D400-13-120
D400-13-120
N/A
Power Cord
09
Rotational Speed (rpm)
www.turbovacuum.com
Controller
Price
www.turbovacuum.com
10
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TURBO VACUUM
For assistance please contact us at: 407.563.3881
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Edwards STP Turbo Pumps
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SCU Turbo Pump Controller
The first STP magnetically levitated turbo pumps were sold in 1983 worldwide. Today the STP turbo
pumps account for 85% of the semiconductor and process tool market with 80,000 units sold. They
demonstrate exceptional levels of reliability, class leading performance, and low cost of ownership on
the harshest applications. The STP pumps are the first choice for application demanding high up time,
hydrocarbon-free pumping, minimal maintenance and low vibration. The use of magnetically
levitated bearings eliminate the risk of contamination, while ensuring the units resist rapid changes in
gas throughput and mechanical shock.
Features
• Proven Reliability
• Clean Oil-Free Vacuum
• Complete Range 300 – 2650 L/S
• 5 Axis Auto Tuning
• Installation In Any Orientation
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• Full Remote Control Interface
• Includes Inlet Screen and Water Cooling
• Low Noise and Vibration
• Virtually Maintenance Free
• Units With IntergratedController Power Supply
The SCU turbo pump control unit is a fully digital controller, and has perfect
compatibility with the magnetically levitated turbo pumps. The new AVR, Auto
vibration reduction, technology achieves a further reduction in vibration levels, and
the advanced pre-maintenance call function provides advanced notice of precise
maintenance time.
Features
• Universal Controller
• Rotor Imbalance Monitoring
• Back-Up Bearing Daming Monitoring
• Highest Reliability
• Communication Ports
TECHNICAL SPECIFICATIONS
STP301
STP451
STP603
STPA803C
STPA1303C
STPIXR1606
STPA2203C
STPIXA2206C
STPIXA3306C
Inlet Flange
ISO 100
CF 100
ISO 160
CF 160
ISO 160
CF 160
ISO 160
CF 160
ISO 200
CF 200
ISO 160
ISO 200
CF 200
ISO 250
CF 250
ISO 250
CF 250
ISO 250
CF 250
ISO 320
CF 320
440
420
275
650
N/A
550
800
N/A
520
1300
N/A
800
1600
N/A
1200
2200
N/A
1700
2200
N/A
1900
2650
N/A
2300
108
5 x 105
2 x 104
108
N/A
105
108
N/A
103
108
N/A
103
108
N/A
103
108
N/A
104
108
N/A
104
108
N/A
103
10 - 10
10 - 10
10 - 9
10 - 9
10 - 7
10 - 9
10 - 9
10 - 9
6
3
7
7
8
7
8
10
48,000
35,000
32,500
32,500
36,500
27,000
27,000
27,700
Any
Any
Any
Any
Any
Any
Any
Any
0.1
0.1
0.1
0.1
2
0.1
2
2
NW25
NW40
NW40
NW40
NW40
NW40
NW40
NW40
24
53
69
86
86
106
134
136
176
$15,910.00
$18,115.00
$22,940.00
$24,415.00
$30,190.00
$42,000.00
$38,800.00
$36,000.00
$42,000.00
SCU-301-451
SCU-301-451
SCU-800
SCU-800
SCU-800
Integrated
SCU-1600
Integrated
Integrated
$8,400.00
$10,450.00
$10,450.00
$10,450.00
$10,450.00
$10,450.00
$20,600.00
$20,600.00
$20,600.00
Pumping Speed, L/S
N
He
H
300
300
Compression Ratio
N
He
H
108
N/A
2 x 104
Ultimate Pressure (mbar)
10 - 10
Startup Time (min)
3
Rotational Speed (rpm)
ORDERING INFORMATION
STP301
STP451
STP603
48,000
STPA803C
STPA1303C
STPIXR1606
STPA2203C
STPIXA2206C
STPIXA3306C
Orientation
Any
Turbo Pump
ISO
CF
ISO
CF
B748-30-020
B748-31-010
B748-40-030
B748-41-010
YT 39B0030
YT 3902005
YT 36B0040
YT 36B0010
YT 36B0120
YT 36B0030
YT 790Z070
YT 790Z010
YT 790Z040
YT 46B0030
YT 46B0010
Y 1810Z010
Y 1810Z030
YT 820Z020
YT 820Z040
Backing Pressure (mbar)
0.1
Outlet Flange
NW25
Controller
B748-10-030
B748-10-030
B748-10-030
B748-10-030
B748-10-030
B748-10-030
YT 49Z2200
YT 49Z2200
YT 49Z2200
Weight (lb)
Pump Cable (3m)
B707-00-010
B751-30-050
B751-30-020
B751-30-020
B751-30-020
B751-30-020
B751-30-020
B751-30-020
B751-30-020
Price
Power Cord
B707-00-090
PT46-Y0-A01
B707-00-090
PT46-Y0-A01
PT46-Y0-A01
PT46-Y0-A01
B750-30-020
PT46-Y0-A01
PT46-Y0-A01
Controller
Price
11
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12
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TURBO VACUUM
For assistance please contact us at: 407.563.3881
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Pfeiffer Turbo Pumps
For more than 100 years Pfeiffer Vacuum has been one of the leading companies of
high and ultra-high vacuum technology. Pfeiffer’s goal is to provide innovative
products featuring high reliability and optimum physical properties. The most
important instrument for creating high vacuum is the turbomolecular pump, which
was devised at the Pfeiffer factory in 1957 by W. Becker. The new HiPace line of turbo
pumps are equipped with integrated controllers for modular design and maximum
flexibility to assist in making installation easy. The HiPace line ranges from 10-2000 L/s.
DCU Turbo Pump Controller
The Display Control Unit DCU is a universal operating unit for the control and monitoring
of the Pfeiffer turbo pumps. Using the touch pad digital display the controller has
multifunction function capabilities which include standard features such as; on/off,
rotational speed, venting valve control, heating control, backing pump control, air
cooling control, operating hours, vacuum gauge interface, remote control, and
RS232 configuration. The DCU can be installed within standardized rack systems or
used as a bench top instrument.
Features
• Pump and Drive Form a Single Unit
• All Components Connect on the Plug and Play Principle
• Minimal Space Requirements for Entire System
• Integrated Serial Interface Provides Additional Versatility
• Simple and Economical System Solutions
• On Site Bearing Change
• Installation in Any Position
• Corrosive Versions Availabe
ORDERING INFORMATION
HP10
Turbo Pumps
ISO 25
ISO 40
ISO 63
CF 63
ISO 100
CF 100
ISO 160
CF 160
ISOK 200
ISOF 200
ISOK 250
ISOF 250
CF 250
HP80
HP300/C
HP400
HP700
HP1200/C
HP1500/C
HP1800/C
HP2300
HP10
HP80
HP300/C
HP400
HP700
HP1200/C
HP1500/C
HP1800/C
HP2300
10
6
3.7
71
66
55
250
260
220
350
500
460
630
720
580
1250
1300
1100
1450
1350
1150
1450
1650
1700
1900
2050
1850
3 x 106
3 x 103
3 x 102
>1011
4 x 106
1 x 105
>1011
>108
9 x 106
350
500
460
>1011
>108
4 x 106
>108
2 x 105
6 x 103
1 x 108
2 x 105
6 x 103
1x108
3 x 105
2 x 104
>108
3 x 105
2 x 104
10 - 6
10 - 10
10 - 10
10 - 10
10 - 10
10 - 10
10 - 7
10 - 7
10 - 10
1
2
5
2
2
5
2.5
4
8
40,000
-
-
-
-
37,800
37,800
31,500
31,500
Any
Any
Any
Any
Any
-
-
-
-
25
20
15
20
20
2
2
1.8
1.8
NW16
NW16
NW16
NW25
NW25
NW40
NW40
NW40
NW40
5
6
13
24
24
70
64
72
90
$4,517.00
$6,073.00
$12,145.00
$19,344.00
$23,847.00
$32,850.00
$38,497.00
$40,078.00
$53,291.00
DCU110
DCU110
DCU310
DCU400
DCU400
DCU002
DCU002
DCU002
DCU002
$1,579.00
$1,579.00
$2,304.00
$2,175.00
$2,175.00
$900.00
$900.00
$900.00
$900.00
PMP03460
PMP03942
PMP03940
PMP03941
Pumping Speed, L/S
PMP03900
PMP03901
Nitrogen
Helium
Hydrogen
PMP04023
PMP04024
PMP03933
PMP03934
Compression Ratio
PMP03910
PMP03911
PMP04070
PMP04071
PMP04060
PMP04061
PMP04062
PMP03920
PMP03921
PMP03922
DCU Controller
Nitrogen
Helium
Hydrogen
Ultimate Pressure (mbar)
Startup Time (min)
PMC01820
PMC01820
PMC01822
PMC01823
PMC01823
PM061348
PM061348
PM061348
PM061348
PM061350
PM061350
PM061352
PM061352
PM061352
PM051103-T
PM051103-T
PM051103-T
PM051103-T
PM061340
PM061340
PM061343
PM061343
PM061343
PM041815-T
PM041815-T
PM041814-T
PM041815-T
PM061350
PM061350
PM061352
PM061352
PM061352
PM051103-T
PM051103-T
PM051103-T
PM051103-T
P4564309ZE
P4564309ZE
P4564309ZE
P4564309ZE
P4564309ZE
P4564309ZE
P4564309ZE
P4564309ZE
P4564309ZE
PMZ01300
PMZ01302
PMZ01303
PMZ01303
PMZ01303
PMZ01303
DCU Pump Cable
Rotational Speed (rpm)
Rack Controller
Orientation
Rack to Pump Cable
Backing Pressure (mbar)
Power Cord
Outlet Flange
Air Cooling Kit
Weight (lb)
Water Cooling Kit
Price
PM016623
PM016040BT
PM016040BT
PM016221AU
PM016221AU
Inlet Screen
Controller
Vent Valve
Price
PMZ01290
13
TECHNICAL SPECIFICATIONS
PMZ01291
PMZ01291
PMZ01291
www.turbovacuum.com
PMZ01291
PMZ01291
PMZ01135
PMZ01135
www.turbovacuum.com
14
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TURBO VACUUM
For assistance please contact us at: 407.563.3881
H
Adixen Pfeiffer Maglev Hybrid Turbo Pumps
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ACT -M Maglev Controllers
The ATH-M series are hybrid magnetically levitated turbo pumps. These very sophisticated high
performance and extremely robust pumps are recognized as the new reference in the world of large turbo
molecular pumps. The ATH-M magnetically levitated turbo pumps are clean and dry. Because of the
magnetic bearings the units are frictionless, do not require any grease or bearing maintenance and can run
for years without any interruption on a clean process. This relates to a significant lower cost of ownership.
Features
• Automatic 5-Axis balancing
• No Bearing Maintenance
• Low cost of ownership
• Minimum Vibration
• Turbo accepts 5 power failure landings at full speed
• Optional Heated Pump Version (MT)
The ACT M maglev turbo pump controllers are compact and
have highly effective electronic monitoring. They are designed
for the ATH-M turbo pumps. Standard features include
convenient interface, handy keyboard, digital display for reading
rotational speed, pump current consumption, pump and
controller temperatures, and complete automatic balancing system. Remote interface available through
input/output connections and each unit has RS232/RS485 configuration. Inputs include; pump start-stop, standby,
and interlock. Any controller can be switched without a need for tuning or adjustment.
TECHNICAL SPECIFICATIONS
HP300M
HP700M
HP800M
ATH1600M/MT
ATH2300M/MT
ATH2800M
ATH3200M
ISO 100
CF 100
ISO 160
CF 160
ISO 200
CF 200
ISO 200
CF 200
ISO 250
CF 200
IISO 200
CF 200
ISO 250
CF 200
ISO 250
CF 250
ISO 320
CF 320
Inlet Flange
Pumping Speed, L/S
Nitrogen
Helium
Hydrogen
685
600
480
790
625
500
1500
1150
750
2100
2200
1200
2050
2150
1750
2600
2400
1800
1011
107
105
1011
107
105
107
103
102
109
104
103
108
103
104
108
103
104
10 - 10
10 - 10
10 - 9
10 - 9
10 - 8
10 - 8
2
4
4
6
10
10
10
-
-
-
0.01
0.01
0.01
0.01
Any
Any
Any
Any
Any
Any
Any
20
8
8
1.5
1.5
1.5
1.5
NW 16
NW 25
NW 25
NW 40
NW 40
NW 40
NW 40
29
37
40
78
102
176
176
$24,921.00
$27,027.00
$27,472.00
$37,820.00
$46,960.00
$50,300.00
$51,300.00
DCU400
TDCU400
DCU400
ACT1300M
MAG POWER
MAG POWER
MAG POWER
$2,487.00
$2,487.00
$2,487.00
$8,520.00
$10,720.00
$10,720.00
$10,720.00
255
215
170
Compression Ratio
Nitrogen
Helium
Hydrogen
ORDERING INFORMATION
1011
108
105
Ultimate Pressure (mbar)
HP300M
HP700M
HP800M
ATH1600M/MT
ATH2300M/MT
ATH2800M
ATH3200M
Turbo Pump ISO
Air Cooling
PMP03951
Water Cooling
PMP04451
PMP04461
P6562100
Q6562100
U2662100
U2C662100
10 - 10
Startup Time (min)
Vibration Level
Turbo Pump CF
Air Cooling
Water Cooling
PMP03952
PMP04452
PMP04462
P6522100
Orientation
Q6622100
Backing Pressure (mbar)
Controller
PMC01823
PMC01823
PMC01823
114679
114679
114679
114679
PM061352
PM061352
A215300-035-C6-D
A215300-035-C6-D
A215300-035-C6-D
A215300-035-C6-D
P456430926
P456430926
A33 1729
A33 1729
A33 1729
A33 1729
PM016216
PM016220
109200
109200
12128
112132
Outlet Flange
Pump Cable (3m)
PM061352
Weight (lb)
Power Cord
P456430926
Inlet Screen
ISO
CF
PM016210
Price
Controller
Price
15
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16
S
TURBO VACUUM
For assistance please contact us at: 407.563.3881
H
Oerlikon Leybold Turbo Pumps
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Turbotronik Controllers
The turbomolecular pumps from Oerlikon Leybold generate a clean high and ultra-high vacuum. They
have two product lines consisting of the “TMP classic” turbomolecular pumps as well as turbomolecular
pumps with a compound stage, the New SL Premium series. Each unit is fitted with ceramic ball bearings
that allow the turbo pump to be mounted in any orientation. Through the compactness of design and
simplicity of operation these lines of turbo pumps are used in many areas of research and development.
Select a turbo and controller combination that meets your application requirements.
Turbotronik controllers are designed to operate the Turbovac line of pumps. They are a bench top or rack
mountable unit with controls and indicators on the front panel. Operate via push button controls and sense the
pump model via resistance code. A terminal strip for remote control and display functions is provided.
Features
• TMP Classic
• Available in Non-Corrosive and Corrosive Versions
• Proven Reliabilty With Simple Design
• SL Premium Series
TECHNICAL SPECIFICATIONS
TMP50
TMP151
TMP361
TMP1000C
TMP1100C
TW220/150
SL80
SL300
SL700
NW 40
ISO 63
CF 63
ISO 100
CF 100
ISO 100
CF 100
ISO 160
CF 160
ISO 160
CF 160
ISO 250
CF 200
ISO 200
ISO 250
ISO 160
ISO 63
CF 63
ISO 100
CF 100
ISO 160
CF 160
55
48
30
145
135
115
345
340
340
1100
975
900
1100
975
900
60
52
40
65
55
49
270
255
190
690
360
580
2 x 106
109
104
102
1 x 109
6 x 104
3 x 103
109
104
103
109
104
103
1 x 108
2 x 105
4 x 102
10 - 10
10 - 10
10 - 10
10 - 10
10 - 9
10 - 10
10 - 10
10 - 9
2
2
9
9
4
1.5
4
5
-
-
-
-
-
-
-
-
-
Any
Any
Any
Any
Any
Any
Any
Any
Any
10 - 1
10 - 1
10 - 1
0.1
0.1
20
20
NW 16
NW 16
NW 25
ISO 63
ISO 63
NW 16
NW 16
NW 25
NW 25
5
17
26
55
48
21
6
13
33
$3,860.00
$7,460.00
$11,299.00
$22,925.00
$23,170.00
$10,923.00
$4,635.00
$8,235.00
$17,505.00
NT 10
TD 20
TD 20
TD 20
TD 20
TC 400
TC 300
TC 300
TC 700
$1,695.00
$3,332.00
$3,332.00
$3,332.00
$3,332.00
$1,025.00
$1,341.00
$1,341.00
$2,045.00
Inlet Flange
Pumping Speed, L/S
Nitrogen
Helium
Hydrogen
Compression Ratio
ORDERING INFORMATION
TMP50
TMP151
TMP361
TMP1000C
TMP1100C
TW220/150
SL80
SL300
SL700
Nitrogen
Helium
Hydrogen
Ultimate Pressure (mbar)
Turbo Pump NW
10 - 8
85400
Convection
Cooling
Startup Time (min)
Turbo Pump ISO
2
Convection Cooling
Air Cooling
Water Cooling
85631
89670
89672
85536
85539
89483
89480
800002V1236
800002V1435
Rotational Speed (rpm)
800002V3001
800170V3005
800051V3001
Orientation
Turbo Pump CF
Convection Cooling
Air Cooling
Water Cooling
85632
85671
85673
800002V2236
800002V2435
85535
11764
Backing Pressure (mbar)
800002V3002
800170V3006
800051V3002
Outlet Flange
Controller
85901
85721
85722
85721
85721
800100V0001
800100V0001
800100V0001
800101V0001
85765
85765
85765
85765
86440
800091V0100
800091V0100
800093V0100
Weight (lb)
Pump Cable (3m)
12108
Price
Cooling Kit
Air
Water
85406
85408
89408
89408
Included
Included
Included
800136V0001
800135V0001
Inlet Screen
ISO
CF
17
20017170
20017171
20017170
20017171
20018692
20017247
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Controller
Price
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18
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TURBO VACUUM
For assistance please contact us at: 407.563.3881
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Oerlikon Leybold MAG Turbo Pumps
The world-wide success of the TURBOVAC MAG product line results from more than 30 years of experience
of Oerlikon in development and manufacturing of turbomolecular pumps with magnetically levitated rotors.
In 1976 they introduced the 560M turbo. This was the first magnetically levitated turbo which became
commercially available. Most of the MAG turbo pumps are designed with five axes active bearings. The
rotor position is actively controlled by electromagnets in all five degrees of freedom. The MAG turbo
pumps are designed for numerous applications including; semiconductor processes, CVD, PVD, ion
implantation, electron beam microscopy, and areas where corrosive gases are evacuated. The MAG W
300iP/400iP/600iP, integrate a state-of-the-art converter with RS232/RS485 for bearing & drive system,
eliminating the need for a convention bench-top controller solution and interconnecting cable.
TECHNICAL SPECIFICATIONS
Features
MAGW300iP
• 5 Axis Magnetic Bearing Drive System
• Maintenance Free Systems
• High Performance in Any Orientation
• High Degree of Operating Reliability
MAGW400iP
MAGW600iP
MAGW830i/C
MAGW1300C
MAGW1500CT MAGW2000CT
MAGW2200C
MAGW2800C
ISO 160
CF 160
ISO 160
CF 160
ISO 160
CF 160
SO 200
CF 200
ISO 250
ISO 200
CF 200
ISO 250
ISO 250
ISO 200
CF 250
ISO 250
ISO 250
CF 250
365
200
290
550
570
410
760
650
300
1100
1150
920
1100
1150
920
1650
1800
1720
2000
1900
1800
2650
2450
2100
2 x 109
3.2 x 103
9.2 x 104
1 x 1010
3.4 x 104
1.7 x 106
1 x 108
> 108
> 108
> 108
> 105
> 106
10 - 10
10 - 8
10 - 10
10 - 10
10 - 10
10 - 8
10 - 10
10 - 10
-
6
4
6
6
8
10
10
-
-
-
24,000
36,000
36,000
28,000
29,400
28,800
Any
Any
Any
Any
Any
Any
Any
Any
Any
8
6
2
2
2.6
3.5
2
2
NW 16
NW 25
NW 40
NW 40
NW 40
NW 40
NW 40
NW 40
26
26
37
70
70
70
137
106
141
$16,559.00
$17,324.00
$21,800.00
$22,019.00
$25,556.00
$33,140.00
$38,195.00
$36,209.00
$41,365.00
TP500
TP500
Mag Drive S
$1,844.00
$1,844.00
$5,030.00
Inlet Flange
• Extremely Low Vibration and Noise
• Designed for Pumping of Corrosive Gases
• Corrosive and Non-Corrosive Versions Available
ISO 100
CF 100
Pumping Speed, L/S
N
He
H
300
260
190
Compression Ratio
ORDERING INFORMATION
MAGW300iP
MAGW400iP
MAGW600iP
MAGW830i/C
MAGW1300C
MAGW1500CT MAGW2000CT
MAGW2200C
MAGW2800C
Turbo Pumps
ISO 100
ISO 160
ISO 200
ISO 250
CF 100
CF 160
CF 200
CF 250
N
He
H
Ultimate Pressure (mbar)
10 - 10
410300V0505
410400V0505
410400V0505
400100V0005
400110V0011
400110V0021
400026V0002
400027V0002
89417
400081V0011
400081V0021
Startup Time (min)
400000V001
410300V0506
410400V0506
410400V0506
Rotational Speed (rpm)
400100V0041
400110V0051
400030V0002
400006V0021
400006V0021
400035V0011
400035V0011
Orientation
Turbo Controller Mag Drive
400035V0011
400035V0011
400035V0011
400035V0011
Backing Pressure (mbar)
Power Supply TP500
410300Z221
8
410300Z221
Outlet Flange
Connection Cable 3M
41030Z2003
41030Z2003
400036V0008
400036V0008
400036V0008
400036V0008
400036V0008
400036V0008
NW 16
Weight (lb)
Connection Cable 10M
400036V0002
400036V0002
400036V0002
400036V0002
400036V0002
400036V0002
Price
Plug-In Control
12136
12136
12136
12136
12136
12136
Controller
Mains Cable
800102Z1002
800102Z1002
Mag Drive Digital Mag Drive Digital Mag Drive Digital Mag Drive Digital Mag Drive Digital Mag Drive Digital
Price
Vent Valve
85548
19
2 x 109
3.2 x 103
9.2 x 104
85548
800120V0011
800120V0011
800120V0011
www.turbovacuum.com
800120V0011
800120V0011
800120V0011
$14,780.00
$14,780.00
$14,780.00
www.turbovacuum.com
$14,780.00
$14,780.00
$14,780.00
20
TURBO VACUUM
For assistance please contact us at: 407.563.3881
H
EBARA Magnetically Levitated Turbo Pumps
The EMT Series offers five major types of turbomolecular pumps - temperature-controlled, corrosion
resistant, ultra low vibration, radiation resistant, and ultra high vacuum. The units offer a wide pressure
range with maximum back pressure up to 3 Torr.
Temperature controlled models can be offered to reduce the rate of condensation byproduct and
process effluent build up. The patented thermal insulation structure with integrated temperature
management system is the most energy efficient temperature controlled turbomolecular pump on the
market today.
The Ultra high vacuum model pumps efficiently evacuate the lightest gases from high vacuum down to
the ultra high vacuum region by reducing the materials' out gassing and improving the efficiency of
hydrogen compression.
If require the Ultra low vibration model turbo pumps produce less than 1nm vibration amplitude.
• Rotation Speed Control
• Vibration Free
• Safety Standards UL, CE, SEMI, NRTL
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ORDERING INFORMATION
EMT390M
EMT420M
EMT900M
EMT1300M
EMT2400M
EMT3260
EMT420MBAB
EMT420MBWB
EMT900MBAB
EMT900MBWB
EMT1300MBAB
EMT1300MBWB
EMT2400MBAB
EMT2400MBWB
EMT2400MBAB
EMT2400MBWB
EMT420MCAB
EMT420MCWB
EMT900MCAB
EMT900MCWB
EMT1300MCAB
EMT1300MCWB
EMT2400MCAB
EMT2400MCWB
EMT3260MCAB
EMT3260MCWB
Turbo Pump System ISO
Air Cooling
Water Cooling
EMT390MBAB
EMT390MBWB
Turbo Pump ystem CF
Air Cooling
Water Cooling
EMT390MCAB
EMT390MCWB
TECHNICAL SPECIFICATIONS
Features
• Full Magnetic Bearing
• Installation in Any Orientation
• Automatic Calibration
• Units Provided As Complete Set- Turbo, Cables, Cooling, Inlet Screnn
I
EMT390M
EMT420M
EMT900M
EMT1300M
EMT2400M
EMT3260
ISO 100
CF 100
ISO 160
CF 160
ISO 160
CF 160
ISO 200
CF 200
ISO 250
Cf 250
ISO 320
CF 320
340
290
N/A
400
300
N/A
900
1050
N/A
1300
1200
N/A
2400
1100
N/A
3200
3000
2700
10 - 10
10 - 10
10 - 10
10 - 10
10 - 10
10 - 10
2
3
4
5
5
-
Any
Any
Any
Any
Any
Any
3
3
3
3
2
3
NW 25
NW 25
NW 40
NW 40
NW 40
NW 40
31
31
77
77
105
176
ETCO11M
ETCO11M
ETCO11M
ETCO11M
ETCO11M
ETCO20M
$24,900.00
$29,900.00
$32,500.00
$42,500.00
$45,600.00
Inlet Flange
Pumping Speed, L/S
Nitrogen
Helium
Hydrogen
Ultimate Pressure (mbar)
Startup Time (min)
Orientation
Backing Pressure (mbar)
Outlet Flange
Weight (lb)
Controller
Complete System Price
$23,500.00
21
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www.turbovacuum.com
22
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TURBO VACUUM
For assistance please contact us at: 407.563.3881
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TYH Turbo Pumps
TYH Turbo pumps are considered an emerging new economical line developed and manufactured in China.
These compound design units range from 600 - 3600 liters per second. Each new turbo pump is sold as a
complete system consisting of a turbo, controller, cables, inlet screen, and optional air cooling kit. The TYH
turbo pump line is ideal for low cost, standard high vacuum applications. This line foregoes advanced
features to provide an economical solution for high vacuum requirements.
Features
• Economical
• Ceramic Ball Bearings
• ISO/CF Flange Choice
• Air Cooled or Water Cooled Option
• Units Provided As Complete Set - Turbo, Controller, Cables, Cooling, Inlet
Screen
ORDERING INFORMATION
TYB260
TYB600
TYB1200
TYB1600
TYB3600
B260AI
B260WI
B600AI
B600WI
B1200AI
B1200WI
B1600AI
B1600WI
B3600WI
B260ACF
B260WCF
B600ACF
B600WCF
B1200ACF
B1200WCF
B1600ACF
B1600WCF
B3600WCF
Turbo Pump Systems ISO
Air Cooling
Water Cooling
Turbo Pump Systems CF
Air Cooling
Water Cooling
TECHNICAL SPECIFICATIONS
TYB260
TYB600
TYB1200
TYB1600
TYB3600
ISO 100
CF 100
ISO 160
CF 160
ISO 200
CF 200
ISO 250
CF 250
ISO 400
260
600
1200
1600
3600
NA
NA
>109
8 x 103
>104
1 x 104
>109
1 x 104
>108
5 x 103
10 - 8
10 - 8
10 - 8
10 - 8
10 - 6
<4.5
<4.5
<4.5
<6
<10
33,000
24,000
24,000
24,000
12,600
Any
Vertical +/- 5
Vertical +/- 5
Vertical +/- 5
Vertical +/- 5
KF25
KF40
KF40
KF50
ISO100
22
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79
95
220
TC10
TC10
TC10
TC10
TC100
$8,900.00
$9,800.00
$11,200.00
$11,600.00
$24,500.00
Inlet Flange
Pumping Speed, L/S
Nitrogen
Compression Ratio
Nitrogen
Hydrogen
Ultimate Pressure (mbar)
Startup Time (min)
Rotational Speed (rpm)
Orientation
Outlet Flange
Weight (lb)
Controller
Complete System Price
23
www.turbovacuum.com
www.turbovacuum.com
24
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TURBO VACUUM
For assistance please contact us at: 407.563.3881
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Helium Leak Detectors
Instant Systems
Turbo Vacuum has assembled Instant Systems. A selection of high vacuum pumping stations proven, tested,
oil-free, air cooled, multifunctional, and ready to use. Choose a complete plug and play system that can be
integrated into any application where simple ultra clean high vacuum is needed. Applications include; backing
larger turbo pumps, chamber evacuations, instrumentation, research and development.
Features
• Complete Integrated System
• Maximum Reliability
• Compact
• High Pumping Speeds & Gas throughputs
• Global World Voltage Acceptable
• Oil Free
• R5232 Analog Communication
• Vacuum Gauge LED Screen Compatible
• Economical
Compactness and size have always been criteria in detriment to performance for helium leak detecting on
vacuum systems. Turbo Vacuum presents the HLT260 and HLT270. They are economical and user friendly in a
small package great for detecting light traces of gas which are capable of infiltrating a micro opening the size
of 5 x 10-12 mbar. They are portable, highly sensitive, upgradeable for use on large vacuum systems, and have
analog/digital inputs and outputs for the demanding industries such as; Semiconductor, Medical,
Pharmaceutical, Electronics, and Instrumentation. Other advantages include; Simple operation, ISO9001
compatible, Vacuum and sniffing operation, Removable operating unit, Leak rate as a numerical and bargraph
display, Optimum suppression of background signal, Short recovery time, and Rapid results due to high inlet
pressure and high helium pumping speed and color touch screen displays.
Features
• Self Automated
• Easy Integration Into any Vacuum System
• No Contamination
• Color Touch Screen Display
• Modular Design with Adaptable
Pumping Capacity
• Start Stop Operation
• Battery Operated
ORDERING INFORMATION
EXTRIMA
ASM310
ASM142
ASM142D
HLT570
VSPR021
VS FACWB
VS FACWB
VSPD031
Wireless Remote
ORDERING INFORMATION
IS11
Helium Pistol
MT 81
ISO80E
TS75D
IS81
IS301
V010113
MT8140
MT8163ISO
MT8163CF
ISO80E40
ISO80E63ISO
ISO80E63CF
TS75D40
TS75DISO
TS75DCF
V810208
V810209
V810210
Included
10-8 , NW10
V301303
V301304
IS11
SNCIEITI
SNCIEITI
SNCIEITI
BGYY9207-T
K9565306
K9565306
B8116557
B8116557
B8116557
EXTRIMA
ASM310
ASM142
ASM142D
HLT570
VSPR021
VSPD031
NA
NW25
NW25
NW25
NW25
NW25
NW25
MT 81
ISO80E
TS75D
IS81
IS301
5 x 1012
5 x 1012
5 x 1012
5 x 1012
5 x 1012
5 x 1012
1 x 107
1 x 107
1 x 107
5 x 103
5 x 103
5 x 103
Smallest Detectable Leak Rate (mbar)
1 x 107
NW 25
Sniffen Probe, Detectable Leak Rate
NW 40
ISO 63
CF 63
NW 40
ISO 63
CF 63
NW 40
ISO 63
CF 63
NW 40
ISO 63
CF 63
ISO 100
CF 100
77
65
50
71
66
55
61
57
53
79
58
48
250
255
220
1011
1.3 x 107
1.5 x 105
1 x 1011
1 x 108
9 x 105
Pumping Speed, L/S
1 x 107
Detectable Gases
H2
Nitrogen
Helium
Hydrogen
11
6
3.7
Compression Ratio
4HE 3HE
H2
4HE 3HE
H2
4HE 3HE
H2
4HE 3HE
H2
4HE 3HE
H2
4HE 3HE
H2
Cold Start To Ready (minutes)
2
2
3
3
3
3
3
1
<1
<1
<1
0.5
0.5
0.5
NA
15
10
10
18
13
13
NA
Dry / 1
Oil Seal / 6
Dry / 8
Dry / 7.5
Oil Seal / 5
Dry / 3
100-240V
100-240V
115V
115V
115V
115V
115V
$21,630.00
$27,310.00
$22,260.00
$24,520.00
$32,086.00
$22,186.00
$24,431.00
Response Time (seconds)
3 x 106
3 x 103
3 x 102
1011
4 x 106
1 x 105
Inlet Pressure Max (mbar)
Ultimate Pressure (mbar)
10 - 6
10 - 8
10 - 8
10 - 8
10 - 10
10 - 10
Roughing Pump (Flow Rate CFM)
Backing Pump
0.7 PTFE
0.5
0.5
0.7
1-8
1-8
System Voltage
Price
$4,800.00
25
BGS12125-T
TECHNICAL SPECIFICATIONS
Inlet Flange
CFM
112535
Inlet Flange
TECHNICAL SPECIFICATIONS
Nitrogen
Helium
Hydrogen
112535
CT408 Test Leak
Instant Systems
NW
ISO
CF
112535
Sniffen Probe 3M
$8,265.00
$8,620.00
$7,850.00
www.turbovacuum.com
$8,450.00
$10,550.00
Price
www.turbovacuum.com
26
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TURBO VACUUM
For assistance please contact us at: 407.563.3881
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ORDERING MATRIX
vCart
Turbo Vacuum will provide a client's personal selected turbo cart station with
the specific components ideal for fullfilling a portable high vacuum application.
Start by selecting any manufacturer's turbo pump, oil-free backing pump and
optional accessories to create the perfect system. Upon completing selections,
Turbo Vacuum will assemble and test the new station with the chosen items
prior to delivery.
VC
Features
• Portable
• Flexability For Operation
• Ready and Easy to Use
• Create Your Own System
1
• Maximum Options
• Open Componet Design
• Economical
T urb o Pum p
J
1
5
2
Y
3
3
N
4
3
5
T urb o V e nt V a l ve
A. EXT75DX
Y. YES
B. NEXT240D
N. NO
Y
N
7
6
7
2
8
v C ar t P u s h
Han dle
Y. YES
N. NO
C. NEXT300D
D. NEXT400D
4
E. STP301
F. STP451
ORDERING INFORMATION
vCART
Push Handle
vCART Transpertation Case Cover W/4 Latches
TVCART1
TVCARTHDL
TVCARTC
$998.00
$45.00
$970.00
T urb o A i r Co o l i ng
8
E le c t r ic al S u pply
Y. YES
2. 100-120V
N. NO
3. 200-240V
G. TG70
Model
H. TG220
I.
Price
TG350
5
Ba c ki ng Pum p
1. IDP-2
J. TG450
2. IDP-3
K. HP10
L. HP80
3. SH110
M. HP300
4. TS300
Sample Configuration
5. TS600
N. V81M
O. V301
6. NXDS6I
P. V750
7. NXDS10I
8. NXDS15I
2
Inl e t F l a ng e
9. ACP15
1. NW25
2. DN40KF
3. DN40, 275’ CF
4. DN63ISO
5. DN63, 4.5” CF
6. DN100ISO
7. DN100, 6” CF
6
Ba c ki ng Pum p
Is o l a ti o n V a l ve
Y. YES
N. NO
8. DN160ISO
9. DN160, 8” CF
27
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28
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TURBO VACUUM
For assistance please contact us at: 407.563.3881
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Gauging
Turbo Vacuum makes every effort to provide its clients with exceptional turbo systems which include
different types of pumps and their peripherals, including gauging. The goal is to offer a complete,
universal, and comprehensive line of vacuum measurement products. Vacuum measurement is
essential to all vacuum applications. Gauging needs to be diverse ranging from atmospheric
pressure, 1000 mbar to 5x10 -10 mbar, to read your pump performance accurately. Each customers
needs are unique and Turbo Vacuum continuously focuses on understanding these needs in order to
offer new and improved products such as the new vacuum gauges listed below.
Features
Complete Pressure Measuring Systems with 3 Meter Cables, Digital Reader and Sensor Tube.
ORDERING INFORMATION
ORDERING INFORMATION
Atmosphere to 10-4 MBAR
Part Number
Connection
Price
PSG500 NW
PSG500 CF
NW 16
CF 16
$1,640.00
$1,640.00
TPR265 NPT
TPR265 NW
TPR265 CF
1/8" NPT
NW 16
CF 16
$1,435.00
$1,435.00
$1,435.00
APGXNW
NW 16
$1.120.00
PSG550 NWD
NW 16, Display
$675.00
VG200P
1/8" NPT
$520.00
Part Number
Connection
Price
TV90-16
TV80-25
NW16
NW25
$425.00
$425.00
Part Number
Connection
Price
GF16
GF25
GF40
NW16
NW25
NW40
$49.00
$52.00
$68.00
Atmosphere to 10-10 MBAR
Part Number
Connection
Price
PBR260 NW
PBR260 CF
NW 25
CF 25
$2,540.00
$2,540.00
BPG400 NW
BPG400 CF
NW 25
CF 25
$2,510.00
$2,510.00
BPG400D NW
BPG4000D CF
NW25, Display
NW40, Display
$1,780.00
$1,280.00
Atmosphere to 10-2 MBAR
Atmosphere to 10-9 MBAR
Part Number
Connection
Price
PBR251 NW
PBR251 CF
NW 25
CF 25
$2,410.00
$2,410.00
MPG400 NW
MPG400 CF
NW25
CF40
$2,395.00
$2,395.00
Gauge Fitings
WR65 NW
WR65 CF
29
NW25
CF40
www.turbovacuum.com
$1,945.00
$1,945.00
www.turbovacuum.com
30
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For assistance please contact us at: 407.563.3881
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Mass Spectrometry
Turbo Vacuum realizes that Mass Spectrometric measuring methods have become an indispensable
diagnostic aid in numerous branches of process engineering, technology and product development,
medicine and basic scientific research. A vacuum must be generated for operating mass
spectrometers. Conversely development of vacuum technologies has increasingly required the
utilization of small high performance mass spectrometers. Mass Spectrometers require a working
pressure of 1 x 5-5 mbar. Since many processes operate at higher pressures the mass spec cannot be
solely selected based on analyzer, ion source and detector. A coordinated system consists of mass
spec, vacuum pump, and measurement tool.
TECHNICAL SPECIFICATIONS
PRISMAPLUS 200
PRISMAPLUS 300
MS 100
OMNISTAR 320
1 - 100
1 - 200
1 - 300
1 - 100
1 - 200
6 / 100
6 / 100
6 / 100
6 / 100
6 / 100
1.10-12
2.10-12
4.10-12
1.10-12
1.10-12
1.10-3
6.10-4
3.10-4
1.10-3
1.10-3
Faraday
Faraday
Faraday
1.10-4
1.10-4
1.10-4
1.10-4
<20
<50
<10
<10
150
150
150
-
-
CF 40
C F40
CF 40
NW 25
55 Capillary
7
7
7
37
100
$9,792.00
$12,039.00
$14,994.00
$16,980.00
$56,200.00
PRISMAPLUS 100
PRISMAPLUS 200
PRISMAPLUS 300
MS 100
OMNISTAR 100
PTM0S111110
PTM0S211110
PTM0S3111111
V022313
PTM80117121
DN40CF - F
DN40CF - F
DN40CF - F
-
Mass Range
(amu)
System Diameter / Length
(mm)
Detection Limit, MIN
Applications
• Leak Testing of Serial Production Components
• Quantitative Determination of Composition and Purity of Process Gases
• Complex Analysis of Catalytic Reactions on the Surface of Solid Bodies
• Investigation of Biochemical Substance Transformations
(mbar)
Sensitifity For AR
(a/mbar)
Dectector
The PrismaPlus Series for residual gas analysis, leak detections and process - monitoring in the high
vacuum range.
Faraday
Operating Pressure Max
1.10-4
(mbar)
Contribution to Neighboring Mass
Features
(40/41) PPM
• Economical
• Easy System Intergration
• Fast and Error Free Data Transfer Via Fiber Optics
• User Friendly Software
• Selectable Partial Pressures
• High Up-Time Due To Dual Filamer Design
(OC Max)
<10
Operating Temperature/Analyzer
Connecting Flange
Weight (lbs)
PRISMA
Price
The MS 100 and OmniStar gas analysis systems are designed for quantitative gas analysis which include,
non-polar molecules, inert gases etc. Complete mass spectrometry system for turn key operations
with software.
ORDERING INFORMATION
Features
• Analysis Software
• Low Detection Threshold (<1 ppm)
• Temperature Controlled Gas Line
• Software Controlled Valve
• Certain Identification of Unknown Gases
• Measurement of Up to 64 Gas Components
• Low Memory Effects
• Short Response Time
• Online Process Control
• Mass Ranges 1-100 amu, 1-200 amu, 1-300 amu
31
PRISMAPLUS 100
Part Number
Adaptor
MS 100
www.turbovacuum.com
OMNISTAR
* Each unit is complete with easy to use software, R5 - 232 - C cable and adapter, SP 200 mains unit with cable, control plug, installation material.
www.turbovacuum.com
32
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Oil-Free Backing Pumps
A proactive way to ensure the lasting life your high vacuum turbo pumps is to use a ultra clean oil-free backing
pump. The advantages of oil free pumps ensure that your turbo pumps last longer, and allows your system to be
more user friendly. Oil-free backing pumps add the extra safety to prevent oil contamination to your turbo
pump through the foreline with unexpected power loss or system failure. These new style oil free pumps are
reliable, economical and easy to use.
Features
• No particulates generated
• No backstreaming
• Quite and less vibration
• Longer service intervals
• High reliability
• True dry pumping
TECHNICAL SPECIFICATIONS
MP201T
MP601T
2561
MVP020
2581
NW25
NW25
2.86
3.5
3.5
1.5
4
4
115V
115V
115V
40
27
27
6 1/8"
Pumping Speed (CFM)
0.8
Ultimate Pressure (TORR)
<2
Voltage
100-230V
Weight (LBS)
15
ORDERING INFORMATION
Part Number
411543
Price
$2,101.00
MVP070
6 1/4"
6 1/4"
1.5
1.5
<4
< 1.5
110-230V
110-230V
25
36
IDP-2
IDP-3
PKT01100
PKT01210
PKT01310
$2,007.00
$2,251.00
$4,001.00
33
TS300
TS600
NW25
NW25
NW40
ACP15
ACP28
ACP40
NW25
NW25
NW40
8.2
16
23
10-2
10-2
10-2
115V
115V
115V
50
50
N/A
V5SAT
V3SAWA
V4SACA
$7,816.50
$11,664.00
$13,513.00
Inlet Flange
Pumping Speed (CFM)
5.4
13
25
Ultimate Pressure (TORR)
10-2
10-2
10-3
Voltage
115V
115V
115V
Weight (LBS)
43
57
70
ORDERING INFORMATION
Part Number
IDP2001
Price
$1,850.00
Part Number
IDP3B01
SH01101UNIV PTS03001UNIV PTSO6001UNIV
Price
$2,650.00
$4,410.00
$6,105.00
$9,540.00
Part Number
411743
2561B-01
2581B-01
Price
$3,150.00
$1,595.00
$1,895.00
TECHNICAL SPECIFICATIONS
nXDS10i/C
nXDS15i/C
nXDS20i/C
nXDS35i
NW25
NW25
NW25
NW40
7.5
8.9
13
25
0.005
0.005
0.022
7 x 10-2
100-240V
100-240V
100-240V
100-240V
57
56
56
105
TECHNICAL SPECIFICATIONS
PDV250
PDV500
NW25
NW40
7
15
10-2
10-2
100-240V
100-240V
33
49
Inlet Flange
Pumping Speed (CFM)
Ultimate Pressure (TORR)
Voltage
Weight (LBS)
ORDERING INFORMATION
ORDERING INFORMATION
Part Number
A73501983
Price
$5,535.00
SH110
ORDERING INFORMATION
Inlet Flange
NW25
Pumping Speed (CFM)
4
Ultimate Pressure (TORR)
0.015
Voltage
100-240V
Weight (LBS)
58
TECHNICAL SPECIFICATIONS
ORDERING INFORMATION
TECHNICAL SPECIFICATIONS
nXDS6i/C
MVP040
Inlet Flange
NW16
TECHNICAL SPECIFICATIONS
Inlet Flange
NW16
NW16
Pumping Speed (CFM)
1.2
1.8
Ultimate Pressure (TORR)
10-1
10-1
Voltage
115V
115V
Weight (LBS)
21
21
TECHNICAL SPECIFICATIONS
Inlet Flange
NW16
Pumping Speed (CFM)
1.2
Ultimate Pressure (TORR)
1.5
Voltage
115V
Weight (LBS)
22
• Contamination free
• Superior performance
A73701983
A73801983
A724-01-983
$6,920.00
$8,305.00
$9,345.00
$11,525.00
www.turbovacuum.com
Inlet Flange
NW25
Pumping Speed (CFM)
5.8
Ultimate Pressure (TORR)
10-2
Voltage
10/115V
Weight (LBS)
48
DPD020
DPD040
DPD080
NW40
NW40
NW40
11.8
23.5
47
10-2
10-2
10-2
10/115V
10/115V
200/230V
48
53
143
DP020
DP040
DP080
$5,210.00
$7,950.00
$9,980.00
ORDERING INFORMATION
Part Number
A73601983
DPD010
PDV250
PDV500
$7,100.00
$8,950.00
Price
Part Number
DP010
Price
$4,180.00
www.turbovacuum.com
34
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TURBO VACUUM
For assistance please contact us at: 407.563.3881
H
Hardware
SAFETY ISOLATION
VALVE DN 16 - 25
Part #
Description
Price
Part #
Price
Part #
Price
ISV16
NW16
$985.00
$985.00
$6.00
$8.25
$125.00
NW25
ISO63-1000DC
ISO160-250DC
NW16MV
ISV25
CENTERING RING
ASSEMBLY SS-VITON &
CENTERING RING
ASSEMEMBLY W/
SPLINTER SHIELD
35
NW TO PIPE
ADAPTOR
Part #
Price
Part #
Price
Part #
Price
ISO63XISO100CR
ISO63XISO160CR
ISO100XISO160CR
NW40XISO63
NW40XISO100
ISO63XCF450
ISO63XCF600
ISO100XCF600
ISO100XCF450
ISO160XCF800
ISO200XCF1000
NW40XCF450
CF450XCF600
CF450XCF800
CF600XCF800
CF600XCF1000
CF800XCF1000
$200.00
$270.00
$360.00
$125.00
$175.00
$170.00
$250.00
$280.00
$250.00
$335.00
$480.00
$115.00
$375.00
$384.00
$390.00
$625.00
$655.00
NW16075SRV
$5.50
NW16X12NPT
$43.00
NW25100SRV
$7.00
NW16X25NPT
$45.00
NW40100SRV
$9.25
NW25X12NPT
$43.00
NW63250SRV
$45.00
NW25X25NPT
$47.00
NW100400SRV
$58.00
NW25X50NPT
$50.00
NW160600SRV
$74.00
NW25X75NPT
$67.00
NW200800SRV
$100.00
NW25X100NPT
$83.00
NW2501000SRV
$120.00
NW40X12NPT
$46.00
ISO63CRSS
$250.00
NW40X25NPT
$49.00
ISO100CRSS
$300.00
NW40X50NPT
$53.00
ISO160CRSS
$380.00
NW40X75NPT
$70.00
ISO200CRSS
$540.00
NW40X100NPT
$85.00
ISO250CRSS
$650.00
NW40X125NPT
$95.00
ISO320CRSS
$1600.00
NW40X150NPT
$95.00
NW TEES AND
REDUCING TEES
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900 ELBOW
Part #
Price
Part #
Hose Size
Price
Part #
Price
NW25X16CR
$25.00
$43.00
$28.00
$10.00
$16.00
$12.00
$16.00
NW25100E90
NW40X25CR
.50
.50
.75
1.50
$38.00
$28.00
NW1650H
NW2550H
NW2575H
NW40150H
NW16075E90
NW40X16CR
NW40150E90
$60.00
WING - NUT CLAMP
ROTATABLE ISO-K TO
ISO-F ADAPTION
BLANK FLANGE
Part #
Price
Part #
Price
Part #
Price
NW16CW
$5.25
NW16SB
$7.00
ISO 63 BR
$98.00
NW25CW
$7.00
NW25SB
$7.00
ISO 100 BR
$175.00
NW40CW
$8.25
NW40SB
$7.50
ISO 160 BR
$295.00
NW63CW
$25.00
NW63SB
$55.00
ISO 200 BR
$345.00
NW100CW
$35.00
NW100SB
$85.00
ISO 250 BR
$415.00
NW160CW
$40.00
NW160SB
$95.00
NW200CW
$45.00
NW200SB
$175.00
CONFLAT
BOLTS, NUTS AND
COPPER GASKETS
NW TO FEMALE
NPT/VCO
Part #
Price
NW16X25VCO
NW16X50VCO
NW25X25VCO
NW25X50VCO
NW25X75VCO
NW25X100VCO
NW40X25VCO
NW40X50VCO
NW40X75VCO
NW40X100VCO
$53.00
$74.00
$58.00
$74.00
$116.00
$136.00
$63.00
$79.00
$121.00
$141.00
METAL FLEX HOSE
Part #
Description
Price
Part #
Length
Price
450-CG
Copper Gasket, 4.5”/CF63
$6.00
NW16075MH10
10”
$95.00
450-BK
(25) Bolt, Nut & Washer Kit
$22.00
NW25100MH10
10”
$105.00
600-CG
Copper Gasket, 6”/CF100
$9.00
NW40150MH10
10”
$132.00
600-BK
(25) Bolt, Nut & Washer Kit
$22.00
NW16075MH20
20”
$140.00
800-CG
Copper Gasket, 8”/CF160
$15.00
NW25100MH20
20”
$165.00
800-BK
(25) Bolt, Nut & Washer Kit
$27.00
NW40150MH20
20”
$175.00
1000-CG
Copper Gasket, 10”/CF200
$18.00
NW16075MN40
40”
$235.00
1000-BK
(25) Bolt, Nut & Washer Kit
$29.00
NW25100MH40
40”
$265.00
1200-CG
Copper Gasket, 12”/CF250
$45.00
NW40150MH40
40”
$275.00
1200-BK
(32) Bolt, Nut & Washer Kit
$48.00
ISO TO MALE NPT
1/8 , 1/4 , 1/2 , 3/4
TURBO VIBRATION
DAMPER
HIGH VACUUM BALL
VALVE 10-10 TORR
RIGHT ANGLE MANUAL
VALVES
Part #
Price
Part #
Price
Part #
Price
NW16X075T
$60.00
VD63ISO
$710.00
NW16075AP12
$11.50
NW25X100T
$70.00
VD63CF
$1,159.00
NW25100AP12
$12.50
NW40X160T
$78.00
VD1000ISO
$980.00
NW40150AP12
NW25X16T
$71.00
VD100CF
$1,580.00
NW16075AP25
NW40X16T
$80.00
VD160ISO
$1,620.00
NW40X25T
$90.00
VD160CF
Part #
Description
Price
Part #
Description
$14.00
NW160752NWB
NW16
$306.00
NW161075
NW16
$11.50
NW251002NWB
NW25
$325.00
NW251100
NW25
NW25100AP25
$12.50
NW401502NWB
NW40
$350.00
NW401150
NW40
$2,260.00
NW40150AP25
$14.00
ISO632502ISO
ISO63
$650.00
VD200ISO
$3,990.00
NW25100SP50
$24.00
CF4502502CF
CF4.5”/63
$650.00
VD200CF
$4,575.00
NW40150SP50
$31.00
NW40150SP75
$33.00
www.turbovacuum.com
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MANUAL VENT VALVE
NW16
ISO DOUBLE CLAW CLAMP
MISC. INLET FLANGE
ADAPTORS / REDUCERS
HOSE ADAPTOR
ALUMINUM
CONICAL NW TO
NW REDUCER
All vacuum systems require connections such as gauges, valves and pumps. Select hardware that
makes connecting your high system or integration easy and clean. The simpler your connections are,
the less chance there is for a vacuum leak. While these connections have to preserve vacuum
integrity, they also have to be modular to allow flexibly and simplicity. All hardware is new and
contamination free.
I
Price
$247.00
THREAD LOCKER
Part #
Price
5A228
$16.50
$362.00
$443.00
www.turbovacuum.com
36
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TURBO VACUUM
For assistance please contact us at: 407.563.3881
H
Turbo Pump Repair Kits
Turbo Vaccum offers a wide range of Repair kits, Specialty tools, and Repair guides for many of the turbo pumps
used today, obsolete and new. This includes Balzer/Pfeiffer, Leybold, Varian, Edwards and many more not listed
below. Our repair kits are engineered to meet or exceed the specifications of the OEM, giving you the same
quality components needed to repair the pumps yourself. Some repair kits are only available exclusively through
Turbo Vacuum.
Alcatel
Part Number
A80BK
A100BK
A150BK
A400BK
A5010RK
A5011RK
A5011TK
A5080RK
A5150RK
A5400BK
A5400RK
GS101924
GS056993
GS056990
ATPTK
Model
Description
Price
V60
V60
V70
V70
V81
V801
V200
V250
V250
V300
V301
V550
V551
V701
V801
TS300
TS600
TS300
TS600
SH110
IDP2TS
IDP3TS
Tool Kit and Manual
Repair Kit
Tool Kit and Manual
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Tool Kit and Manual
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Majon Repair Kit
Majon Repair Kit
Tip Seal Kit
Tip Seal Kit
Tip Seal Kit
Tip Seal Kit
Tip Seal Kit
$725.00
$510.00
$745.00
$510.00
$645.00
$1395.00
$810.00
$785.00
$685.00
$685.00
$685.00
$810.00
$810.00
$825.00
$995.00
$785.00
$785.00
$230.00
$255.00
$153.00
$120.00
$120.00
TMP150/151
TMP150/151
TMP360/361
TMP360/361
TMP360/361
TMP340M
TMP450
TMP450
TMP600
TMP1000
TMP
Tool Kit and Manual
Repair Kit
Tool Kit and Manual
Beaming Kit
Repair Kit
Repair Kit
Tool Kit and Manual
Repair Kit
Repair Kit
Repair Kit (Bearing not Greased)
Turbo Oil 500 c.c.
$815.00
$850.00
$815.00
$760.00
$850.00
$1985.00
$815.00
$825.00
$825.00
$875.00
$260.00
T6
Grease Syringe (10 PK)
1Kilo
260 ML Turbo Oil
$210.00
$215.00
$245.00
ATP80
ATP100
ATP150
ATP400
5010
5011
5011/5010
5080
5150
5400
5400 / 5401 / 5402
ATP150/400/900
ATP80/100/5081/5011/5100
5400
ATP80/100/150/400/900
Bearing Kit
Bearing Kit
Bearing Kit
Bearing Kit
Repair Kit
Repair Kit
Tool Kit and Manual
Repair Kit
Repair Kit
Bearing Kit
Repair Kit
Grease Syringe
Grease Syringe
Grease Syringe
Tool Kit
$825.00
$825.00
$985.00
$985.00
$695.00
$592.00
$1,870.00
$695.00
$695.00
$550.00
$695.00
$148.00
$148.00
$148.00
$1,840.00
Varian
V60TK
V60RK
V70TK
V70RK
V81RK
V801RK
V200ARK
V250TK
V250RK
V300RK
V301RK
V550RK
V551RK
V701RK
V801RK
VTS300RK
VTS600RK
VTS300
VTS600TS
SH110TS
IDP2TS
IDP3TS
Leybold
L150TK
L150RK
L360TK
L360BK
L360RK
L340MRK
L450TK
L450RK
L600RK
L1000RK
TO5000
Osaka
NTLGI
OSAK-OIL
NTLF-260
TG / TF
* Turbo Vacuum offers Many More Repair Kits that need to be correctly identified with pump.
Call for your specific pump kit.
37
www.turbovacuum.com
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Tool Kits - Include specialty tools and step-by-step instructional CD for repairing.
Repair Kits - Include bearings and seals, and if needed oil wick/felt washer oil.
Bearing Kit - Include bearings.
Pfeiffer
Part Number
B022RK
B050TK
B050RK
B060TK
B060RK
B062TK
B062RK
B064RK
B071RK
B110RK
B170TK
B170RK
B180RK
B190RK
B240RK
B260RK
B270RK
B330TK
B330RK
B510TK
B510RK
B521RK
OC103593A
OC63265
OW0021
TO6034
N5709103
6033AT
6034AT
OC33758
OR143451
OR143452
Model
Description
Price
EXT70
EXT250
EXT255
EXT250/255
XDS5
XDS10
XDS35
EXT250/255
EXT500
STP300C/300H/400
STP301C/451
STPH301/H451
STPH300/H200
STP600/H600C/
STP1000/H1000C
STPH2000C
STP603/C
STP1003/C
STPH803/H1303
STPA803C
STPA1303C
STPA1603C
STPH1301
STPH2001C
STPA2203C
STPA2503C
STPXA2703
STPA2803C
STPA3003C
STPA3503C
SCU
SCU
Repair Kit
Bearing Kit
Bearing Kit
Wick
Tips Seal Kit
Tips Seal Kit
Tips Seal Kit
15PK Replacement Wicks
Bearing Kit
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Replacement Battery
Replacement Battery
$425.00
$525.00
$625.00
$21.00
$276.00
$276.00
$445.00
$89.00
$785.00
$780.00
$780.00
$800.00
$1,140.00
$1,140.00
$1,140.00
$1,860.00
$1,140.00
$1,140.00
$1,140.00
$1,140.00
$1,140.00
$1,140.00
$1,140.00
$1,860.00
$1,980.00
$1,980.00
$1,980.00
$1,980.00
$1,980.00
$1,980.00
$124.00
$241.00
TPD022
TPH/U 050
TPH/U 050
TPH/U 060
TPH/U 060
TPH/U 062
TPH/U 062
TMH/U 064
TMH/U 071
TPH/U 110
TPH/U 170
TPH/U 170
TPH/U 180
TPH/U 190
TPH/U 240
TMH/U 260/261
TPM/U 270
TPH/U 330
TPH/U 330
TPH/U 510
TPH/U 510
TMH/U 520/521
020-071
180-521
TPH/U
050-330
020-521
TPH/U
TPH/U
TOH/U 040 / 050
HP300
HP400/700
Repair Kit
Tool Kit and Manual
Repair Kit
Tool Kit and Manual
Repair Kit
Tool Kit and Manual
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Tool Kit and Manual
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Repair Kit
Tool Kit and Manual
Repair Kit
Tool Kit and Manual
Repair Kit
Repair Kit
Replacement Oil Cartridge
Replacement Oil Cartridge
1 Meter Oil Wick 050-170/330
0.25 L Turbo Oil
Button Cover Removal Tool
1 Liter TL Oil
250ml TL Oil
Felt Disk
Oil Reservior
Oil Reservior
$575.00
$745.00
$685.00
$745.00
$685.00
$745.00
$685.00
$685.00
$685.00
$685.00
$745.00
$785.00
$785.00
$785.00
$785.00
$785.00
$785.00
$840.00
$785.00
$840.00
$810.00
$810.00
$89.00
$89.00
$35.00
$92.00
$115.00
$225.00
$105.00
$23.00
$165.00
$165.00
Edwards
E70RK
E250BK
E255BK
TPG0007
EXDS5TS
EXDS10TS
EXDS35TS
TPE00187
E500BK
STP300RK
STP301RK
STPH301RK
STPH300RK
STP600RK
STP1000RK
STPH2000RK
STP603RK
STP1003RK
STPH803RK
STPA803RK
STPA1303RK
STP1603RK
STPH1301RK
STPH2001RK
STPA2203RK
STPA2503RK
STPXA2703RK
STPA2803RK
STPA3003RK
STPA3503RK
SCU300BAT
SCU1000BAT
www.turbovacuum.com
38
S
TURBO VACUUM
For assistance please contact us at: 407.563.3881
H
Turbo Pump Services
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Turbo Pump Controller Services
Turbo Vacuum is one of the only companies which
provide turbo pump controller services of every
make and model. Many times a turbo pump may
not perform properly due to an electrical problem
with a controller. It is always suggested that a
controller is inspected and tested with your specific
turbo pump if a failure has occurred.
Turbo Vacuum can properly service turbo pumps of all makes and models back to manufactures
original specifications at a substantial savings compared to purchasing new. Turbo pumps are
extremely delicate instruments that require precision bearing installation with critical variables of load,
tolerances, and lubrication. Certain rotor assemblies must be precisely balanced to eliminate noise
and vibration to maximize bearing life. Turbocomp guarantees that our procedures and components
meet or exceed OEM specifications!
Only ultra-precision ceramic bearings are used. To balance rotor assemblies, we utilize a two-plane
dynamic balancer which offers many advantages over a simple vibration analyzer. The unbalance in
turbo pump rotors can only be eliminated by mass correction in at least two planes perpendicular to
the shaft axis. Our two plane dynamic balancer pinpoints the angle and mass of unbalance.
Adjustments are carefully made until the balancer's microprocessor determines the assembly's
residual unbalance is within tolerances.
Turbo Vacuum achieves a Balance Quality Grade of G-1(ISO1940/1 & ANSI S2.19) which provides
superior bearing life. A report showing the specifications to which your pump was balanced is
included with every rebuild.
Features and Benefits
• Complete Decontamination and Cleaning
• Analyzation and inspection
• All Seals, Bearing and wick/grease plugs replaced
• Reassembly with ceramic bearings
• Dual-Plane dynamic balancing
• 48-hour quality control test
• 12-month warranty on most units
• Balance specification reports
• Pump sealed and prepared for use or storage
• Expedite service available on all units
39
Turbo Pumps Serviced
• Alcatel Adixen
• Balzer
• Agilent
• Edwards
• Seiko Seiki
• KYKY
• Oerlikon Leybold
• Osaka
• Pfeiffer
• Sciex Applied Bio
• TYH
• Varian
• Ebara
Each controller is completely repaired and tested to
meet all original manufacture’s specifications.
Controllers are service and tested by trained
electrical technicians using a documented test
procedure. Final testing procedures include a
comprehensive run-up with the appropriate turbo
pump using your controller cables if sent in. A
completed detailed test report and all defective
parts are replaced are returned with each repaired controller.
Features and Benefits
• 10 Day Service Time
• 1 Year Warranty
• Expedite Service Available
• Controller Services are Billed on a Not to Exceed Cost
• All Manufactures and Models
• Detailed Report and Broken Parts Returned
Controllers Serviced
• Alcatel Adixen
• Balzer
• Agilent
• Edwards
• Seiko Seiki
• KYKY
• Oerlikon Leybold
• Osaka
• Pfeiffer
• Sciex Applied Bio
• TYH
• Varian
• Ebara
Turbo Vacuum has reconditioned "Turbo Pumps"
Turbo Vacuum has Reconditioned Controllers of all makes and models available for purchase
www.turbovacuum.com
www.turbovacuum.com
40
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TURBO VACUUM
For assistance please contact us at: 407.563.3881
H
Conversion of Pressure/Vacuum Units Chart
41
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Notes
micron/Millitorr
torr/mm Hg
mbar
inches Hg
atm
760,000
760
1013
0.0
1.0
750,000
750
1000
0.42
0.987
735,600
735.6
981
1.02
0.968
700,000
700
934
2.32
0.921
600,000
600
800
6.32
0.789
500,000
500
667
10.22
0.658
400,000
400
533
14.22
0.526
380,000
380
507
14.92
0.500
300,000
300
400
18.12
0.395
200,000
200
267
22.07
0.264
100,000
100
133.3
25.98
0.132
90,000
90
120
26.38
0.118
80,000
80
106.8
26.77
0.105
70,000
70
93.4
27.16
0.0921
60,000
60
80
27.56
0.0789
51,700
51.7
68.8
27.89
0.068
50,000
50
66.7
27.95
0.0658
40,000
40
53.3
28.35
0.0526
30,000
30
40.0
28.74
0.0395
25,400
25.4
33.8
28.92
0.034
20,000
20
26.7
29.14
0.0264
10,000
10
13.33
29.53
0.0132
7,600
7.6
10.13
29.62
V0.01
1,000
1
1.33
29.88
0.00132
750
0.75
1.00
29.89
0.000987
100
0.1
0.133
29.916
0.000132
10
0.01 (1x10-2)
0.0133
29.9196
0.0000132
1
0.001 (1x10-3)
0.00133
29.91996
0.00000132
0.1
0.0001 (1x10-4)
0.000133
29.91999
0.000000132
micron/Millitorr
torr/mm Hg
mbar
inches Hg
atm
www.turbovacuum.com
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42
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