MicroE Systems | Mercury 1000 | User manual | Data Sheet
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The MicroE Systems Mercury 1000 is a versatile and precise measurement tool designed to provide accurate linear and rotary position feedback. With a resolution of up to 0.1µm and a repeatability of ±0.5µm, it excels in applications demanding high precision. Its compact size and IP67-rated housing make it suitable for integration into space-constrained environments, while its rugged construction ensures reliable operation in harsh industrial settings.
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Mercury
TM
3000
Smart Encoder Systems
Programmable Interpolation in Integer Steps to 0.020
μm
Reflective Linear and Rotary Encoder Systems
Next Generation Ruggedized
Design Replaces Mercury 3100
New design for more robust performance
Sensor the size of a Dime
Resolution
Linear: 5μm to 0.020μm
Rotary: 6,600 to 16.8 M CPR
Accuracy
Linear: ± 1μm available
± 3μm to ± 5μm standard
Rotary: Up to ± 2.1 arc-sec
Output
A-quad-B and Index Pulse
The New Mercury 3000 encoder represents the next level of encoder performance. With programmable interpolation, smallest sensor size, easiest alignment, and superior noise immunity, the M3000 delivers Best-in-Class performance.
Imagine what you can do with this!
The new Mercury 3000 can reduce the cost and size of your system, and improve its performance all at once! MicroE Systems’ Mercury 3000 kit encoders are smaller, higher performance, faster to install, and easier to set up and align than any other encoder. The tiny sensor fits into very tight spaces and works in both linear and rotary applications.
New features
• New metal enclosure for SmartPrecision ™ electronics
Best-in-Class noise immunity for harsh environments
Shorter length for smaller, tighter cabinets
Frame mounting compatible for easy installation
Robust metal housing with easy access locking screws
• Double shielded long life cable
• CE compliant
Standard features
• Smallest sensor- 1/3 the size of other encoders
• Revolutionary bolt-in alignment for many applications
• Advanced SmartPrecision electronics built into shielded D-sub connector
• A-quad-B output with programmable interpolation in integer steps for resolutions to 0.020µm (linear); 16.8M CPR (rotary)
• LED set up indicators for sensor alignment and index location
• Bi-directional index signal is repeatable to encoder resolution
Table of Contents
System & Sensor pg 1-5
SmartPrecision Electronics pg 6-7
SmartPrecision Software pg 8
O
rdering Information
Optional features pg 10
• Glass scale length or diameter
Linear lengths from 5mm to 2m
Rotary diameters from 12mm to 108mm
• Cable length of 0.5m,1m, 2m, or custom
• SmartPrecision Software
System Configurations
Standard and Optional Equipment
M3000 Smart Encoder Systems
Standard Equipment
M10
Encoder Sensor
Same for linear and rotary scales.
Sensor Cable
The standard cable is double shielded and available in lengths of
0.5m, 1m or 2m.
A 15 pin high density
D-sub connector mates to the customer controller.
SmartPrecision ™ Electronics
Module
New Metal Enclosure Provides
Best-in-Class Noise Immunity
M3000
Optional Equipment
RS 232 Interface
Adapter
The adapter provides connections to a PC, the encoder system and the controller.
SmartPrecision ™ Software
The software module enables all programmable and diagnostic features plus displays encoder output and signal strength.
See page 8 for details.
Page 2 of 10
Broader Alignment Tolerances,
Increased Standoff Clearance, Smallest Sensor and More
Why Mercury Encoders Make It Easier To Design High Performance Into Your Equipment
M errc
± 2°
Brra nd gn me ntt T olle nc
± 0.5° ± 0.006°
Brra nd
Eliminate the Frustration of Touchy
Encoder Alignment
Mercury Solves this Problem for Good
Fussy alignment is no longer a concern. With Mercury’s patented PurePrecision ™ optics, advanced SmartPrecision ™ electronics and LED alignment indicators, you can push the sensor against your reference surface, tighten the screws and you’re finished. Try that with brand X or Y.
This performance is possible thanks to relaxed alignment tolerances, particularly in the theta Z axis. Mercury offers a
± 2° sweet spot– that’s a 300% improvement over the best competitive encoder. And that will result in dramatic savings in manufacturing costs.
No other commercially available encoder is easier to align, easier to use, or easier to integrate into your designs.
Alignment Tolerance Comparison**
Mercury*
Z Standoff
Y
± 0.15mm
± 0.20mm for linear
Brand X
± 0.1mm
± 0.1mm
Brand Y Mercury vs. Best Competitor
± 0.1mm
Mercury is 50% better unspecified Mercury is 100% better theta X theta Y
± 1.0°
± 2.0° unspecified ± 1.0°
± 0.1° theta Z ± 2.0°
*Measured at a constant temperature for one axis at a time with all other axes at their ideal positions.
**Based on published specifications
± 1.0°
Mercury Can Reduce System Size and Cost
Mercury’s sensor height is 44% shorter than competitive encoders, making it easy to fit into your design. This reduction can also cut total system weight and cost by allowing the use of smaller motors and stages. Safe system operation is also enhanced thanks to Mercury’s generous standoff clearance– 200% greater than other encoders.
And its standoff tolerance is 50% greater than the best alternative.
This significantly relaxes mechanical system tolerances, while reducing system costs.
M cu
Brra nd
Mercury is 100% better
Mercury is 300% better
Stta nd Clle arra nc e
2.4mm*
± 0.15mm
0.8mm
± 0.1mm
Mechanical Dimension Comparison**
Mercury Brand X Brand Y Mercury vs.
Best Competitor
Sensor Z height 8.4mm
23mm 15mm 44% better
Standoff clearance 2.4mm
0.5mm
0.8mm
200% better
Standoff tolerance ± 0.15mm ± 0.1mm ± 0.1mm
50% better
System height 11.7mm
28.5mm 15.8mm
26% better
**Based on published specifications
Brra nd
0.5mm
± 0.1mm
* Dimensions shown illustrate encoder system standoff clearance; see Mercury
Encoder Interface Drawings for correct design reference surfaces.
Page 3 of 10
System Specifications
Resolution and Maximum Speed
Mercury 3000 systems have programmable interpolation from x4 to x1024 in integer steps.
Below is a table of sample values.
Linear - 20μm grating pitch
Interpolation Resolution x4 x10 x20 x40 x80 x100 x200 x400 x1000
5.000µm/count
2.000µm/count
1.000µm/count
0.500µm/count
0.250µm/count
0.200µm/count
0.100µm/count
0.050µm/count
0.020µm/count
To calculate desired linear interpolation multiplier, use the following equation
Interpolation Multiplier = Grating Period (20µm) / Desired Resolution (µm/count)
Maximum Speed*
7200mm/s
7200mm/s
7200mm/s
7200mm/s
7200mm/s
5760mm/s
2880mm/s
1440mm/s
576mm/s
Rotary - 20μm grating pitch
Rotary Fundamental
Glass Scale Resolution
Diameter
Interpolation
Note: The range of available values is x4 to x1024 in integer steps; example values below.
0.472” [12.00mm] 1650 CPR
0.750” [19.05mm] 2500 CPR
1.250” [31.75mm] 4096 CPR
2.250” [57.15mm] 8192 CPR
4.250” [107.95mm] 16384 CPR interpolated resolution (CPR) x4
6,600 x100 x256 x1024
165,000 422,400 1,689,600 interpolated resolution (arc-sec/count)** 196.4 7.85 3.08 0.767
interpolated resolution (µrad/count)** 952 maximum speed* (RPM)
38.0
13090 10470
14.86
3.79
4090 1020 interpolated resolution (CPR) x4
10,000 interpolated resolution (arc-sec/count)**129.6
x100
250,000 640,000 2,560,000
5.18
x256 x1024
2.03 0.506
interpolated resolution (µrad/count)** 628.3
maximum speed* (RPM) 8640
25.1
6912
9.8
2700
2.5
675 interpolated resolution (CPR) x4
16,384 x100 x256 x1024
409,600 1,048,576 4,194,304 interpolated resolution (arc-sec/count)** 79.1 3.16 1.24 0.309
interpolated resolution (µrad/count)** 383.5
maximum speed* (RPM) 5273
15.3
4219
6.0
1.5
1648 412 interpolated resolution (CPR) x4
32,768 interpolated resolution (arc-sec/count)** 39.6 x100
819,200 2,097,152 8,388,608
1.58 x256 x1024
0.618 0.154
interpolated resolution (µrad/count)** 191.7
maximum speed* (RPM) 2637
7.7
2109
3.0 0.7
824 206 interpolated resolution (CPR) x4
65,536 interpolated resolution (arc-sec/count)** 19.7 x100
1,638,400 4,194,304 16,777,216
0.791 x256 x1024
0.309 0.0772
interpolated resolution (µrad/count)** 95.9
maximum speed* (RPM) 1318
3.83
1054
1.5 0.4
412 103
*Maximum speed produces an encoder quadrature output of up to 28.8 million states per second.
** Resolution values shown are approximate. To calculate exact resolution values, convert from CPR (Counts Per Revolution) to the desired units.
Note: Specifications assume XOR function which is available in all standard controllers.
To calculate desired rotary interpolation multiplier, use the following equation
Interpolation Multiplier = Desired Resolution (CPR) / Fundamental Scale Resolution (CPR)
All Specifications are subject to change. All data is accurate to the best of our knowledge. MicroE Systems is not responsible for errors.
Page 4 of 10
System Specifications
System
Grating Period 20µm
Signal Period 20µm
System Resolution 5µm - 0.020µm in integer interpolation steps (factory set or user programmed using MicroE SmartPrecision Software)
Linear accuracy*
Interpolation accuracy: Better than ± 0.12µm over any 20µm movement
Long-travel accuracy: ±1µm accuracy available - consult MicroE
Better than ± 3µm for scales up to 130mm
Better than ±5µm for scales 155mm to 1m
Better than ±5µm per meter for scales 1m or more
*Maximum peak to peak error over the specified movement when compared to a NIST-traceable laser interferometer standard, used at room temperature and with MicroE interpolation electronics.
Rotary Accuracy* Scale O.D.
12.00mm
Microradians Arc-Seconds
±100 ±21
19.05mm
31.75mm
57.15mm
±63 ±13
±38
±19
±7.8
±3.9
107.95mm
±10 ±2.1
*Based on ideal scale mounting concentricity
Sensor Size
W: 12.70mm
L: 20.57mm
H: 8.38mm
0.500"
0.810"
0.330"
Operating and Electrical Specifications
Power Supply 5VDC ±5% @ 330mA (30mA for sensor)
Temperature
Operating:
Storage:
Humidity:
0 to 70°C
-20 to 70°C
10 - 90% RH non-condensing
EMI:
Shock:
CE Compliant
1500G 0.5 ms half sine (Sensor)
Sensor Weight: 5.0g (Sensor without cable)
Cable: Double Shield. Maximum length 2m. Diameter: 3.6mm (0.142”)
Flex Life: 20 x 10 6 cycles @ 20mm bending radius
Mechanical Information - Sensor
.272
.166
6.91
4.22
A A
19.7 [500] or 39.4 [1000] or 78.7 [2000] ±.50 [12.7]
.058
1.47
.142 [3.61]
CABLE DIAMETER
All Specifications are subject to change. All data is accurate to the best of our knowledge. MicroE
Systems is not responsible for errors.
B
.083
2.11
.155
3.94
.500
12.70
.334
8.5
2X
THRU.
.106
2.69
.810
20.57
.650
16.5
.13
3.4
.037
0.94
.405
10.29
.24
6.2
.345
8.75
.080
2.03
C
Page 5 of 10
SmartPrecision
TM
Electronics Module
The Mercury 3000 encoder system includes a SmartPrecision electronics module. This compact, fully-featured signal processing system performs the following functions:
• Interpolation - up to 1024X with 28.8 million quadrature states / sec.
• Programmable interpolation level and output bandwidth
• Accuracy optimization - sensor signals are automatically optimized to improve system accuracy and maximize repeatability
• Signal strength indication - red / yellow / green LEDs assist during setup and provide diagnostics at a glance
• Index centering - centers the bi-directional index output pulse for repeatability to +/-1LSB
• Low Signal/Over Speed alarm
• Power-indicating LED
• Computer interface - for programming and data acquisition using
SmartPrecision software
• Superior EMI / RFI immunity - CE compliant
• Mounting options - all electronics are within the EMI-shielded connector housing and can be screwed directly into a mating connector that is bulkhead mounted, or the module may be mounted to the frame of your motion system and connected using an extension cable
Programmable Interpolation
The electronics module has programmable interpolation that is selectable over the range x4 to x1024 in integer steps, providing output resolutions that can be matched to your application requirements. This feature provides linear resolutions from 5µm to
0.020µm in convenient increments (e.g. x200 interpolation = 0.1µm) and rotary resolutions from 6,600 CPR to 16.8M CPR. Specify the interpolation value at the time of ordering or select the interpolation at your site using SmartPrecision Software.
Programmable Maximum Output Frequency
For encoder applications combining high resolution and high speed, the SmartPrecision electronics module supports up to 28.8 million quadrature state changes per second**. By specifying the maximum output frequency to match your controller's capability - ranging from
900,000 up to 28.8 million quadrature state changes per second - the
Mercury encoder system will never produce encoder counts faster than your controller can read them. Specify the encoder’s maximum output frequency at the time of ordering or select the setting at your site using MicroE's SmartPrecision Software.
* The electronics module’s serial computer programming interface can be translated to be RS-232 compatible using the MicroE SmartPrecision Computer Interface Adapter or a voltage translation circuit of your own design.
** “Quadrature state changes per second" is the reciprocal of "dwell time" or "edge separation". For example, 28.8 million states per second = 0.035µsec dwell time.
All Specifications are subject to change. All data is accurate to the best of our knowledge.
MicroE Systems is not responsible for errors.
SmartPrecision module enclosure provides “Best-in-Class” noise immunity for high noise environments.
Mercury 3000 Outputs:
11
12
13
14
15
7
8
9
10
5
6
3
4
1
2
15-pin high density Male D-sub connector
PIN FUNCTION
Reserved - Do not connect
Serial programming interface -transmit*
Serial programming interface -receive*
A- quadrature
A+ quadrature
Reserved - Do not connect
Reserved - Do not connect
Reserved - Do not connect
B- quadrature
B+ quadrature
Alarm
+5VDC
Ground
I+ index
I- index
Note: Contact MicroE for pin assignments and software protocols for the high speed serial output version.
Page 6 of 10
Mechanical Information - electronics module
2.11 [53.5]
2.03 [51.5]
1.89 [48.0]
1.50 [38.1]
.75 [19.1]
2.18 [55.4]
Ø.13 [Ø3.3]
PIN 1 PIN 5
.85 [21.5]
.10 [2.4]
.46 [11.6]
PIN 15
Male D-sub connector
Maximum Quadrature Output Frequency
Output Frequency
7.2MHz
3.6MHz
1.8MHz
900kHz
450kHz
225kHz
A-quad-B Output Rate
28.8M quadrature states / sec
14.4M quadrature states / sec
7.2M quadrature states / sec
3.6M quadrature states / sec
1.8M quadrature states / sec
900k quadrature states / sec
Dwell Time (or edge separation)
0.035µsec
0.069µsec
0.139µsec
0.278µsec
0.555µsec
1.111µsec
Output Signals
Quadrature TTL
Signal Termination for
A-Quad-B and Index
Pins 4 & 5
Pins 9 & 10
A+
B+
Pins 14 & 15* I+
Mercury
3000 encoder
Cable Zo=120
Ω
*Note: The index pulse may be aligned with A- or B- at some interpolation values.
120
Ω
Customer
Electronics
All Specifications are subject to change. All data is accurate to the best of our knowledge.
MicroE Systems is not responsible for errors.
Page 7 of 10
SmartPrecision Software for
Mercury 2000 and 3000 Encoder Systems
SmartPrecision Software makes Mercury the industry’s easiest to use encoder. It helps you program, set up, use, and diagnose Mercury
2000 and 3000 encoders with the click of a mouse. Compatible with
Windows 95, 98, ME,
NT, 2000, and XP.
Program Mercury Encoder Electronics
• Set interpolation in integer steps from x4 to x256 (Mercury 2000) or x4 to x1024 (Mercury 3000)
• Set maximum output frequency to match your controller
Install Mercury Encoder System
• Align sensor using Signal Level display and Encoder Signal data plot
• Locate index and see when sensor is over the scale’s index mark
• Verify sensor output over length of scale using the Signal Strength plot
Monitor Mercury Encoder Operation
• Read encoder position in engineering units of your choice
• Read the encoder's hour meter to monitor system usage
• Capture alarms while system operates unattended
Diagnose Mercury Encoder Performance
• Capture signal data and email it to MicroE for rapid diagnostic support
• Monitor alarms, view the alarm history log
System Description
The SmartPrecision Software system includes Software on CD, a computer interface adapter, computer cable, and a power adapter.
The encoder signal plot, or Lissajous plot, reveals the underlying strength and uniformity of the sensor’s output.
How to Order SmartPrecision Software
To Purchase the SmartPrecision Software system, use this Model
Number: SSWA120 for 120 VAC, 60Hz US Standard 2-prong plug or SSWA220 for 220 VAC, 50 Hz European Std. 2-prong plug
All Specifications are subject to change. All data is accurate to the best of our knowledge.
MicroE Systems is not responsible for errors.
Page 8 of 10
Scale Specifications
Standard and Customized Scales
MicroE Systems offers a wide array of chrome on glass scales for the highest accuracy and best thermal stability. Easy to install, standard linear and rotary scales meet most application requirements. Customized linear, rotary, and rotary segment scales are available where needed. All scales include an optical index. Mercury's glass scales save time by eliminating motion system calibrations or linearity corrections required by other encoders, and provide better thermal stability than metal tape scales.
Options include:
• Standard linear: 18mm - 2m
• Standard rotary: 12mm - 107.95mm diameter, with or without hubs
• Custom linear*: special lengths, widths, thickness, index mark locations and special low CTE materials
• Custom rotary*: special ID's, OD's (up to 304.8mm), index mark outside the main track and special low CTE materials
• Mounting of hubs for rotary scales: MicroE Systems can mount and align standard, custom, or customer-supplied hubs
• Rotary segments*: any angle range; wide range of radius values
*Custom scales or rotary segments are available in OEM quantities. Contact your local MicroE Systems sales office.
Standard Short Linear Scales
130mm and Shorter
Key: inches[mm]
0.036 [0.9]
Scale Length
0.250 [6.35]
Model
Scale Length
Measured Length
End Index
L18
0.709 [18]
0.512 [13]
Center Index
L30
1.181 [30]
0.984 [25]
Measured Length is always 5 mm less then total length
L55
2.165 [55]
1.969 [50]
Specifications
Accuracy
L80
3.150 [80]
2.953 [75]
Material
Typical CTE
Index
L105
4.134 [105]
3.937 [100]
±3µm standard
±1µm available
Soda lime glass
8ppm/°C
Center or End
L130
5.118 [130]
4.921 [125]
Custom scales available
Standard Long Linear Scales
155mm and Longer
Key: inches[mm]
0.098 [2.5]
Scale Length
0.787 [20.00]
Measured Length is always 5 mm less then total length
Center Index
Specifications
Accuracy
Material
Typical CTE
Index
±5 µm <1m
±5 µm/m >1m
Soda lime glass
8ppm/°C
Center or End
End Index
Scale length 6.102 [155] 8.858 [225]
L325
12.795 [325]
L425
16.732 [425]
L525 L1025 L2025
20.669 [525] 40.354 [1025] 79.724 [2025]
Measured length 5.906 [150] 8.661 [220] 12.598 [320] 16.535 [420] 20.472 [520] 40.157 [1020] 79.528 [2020]
Custom scales available
All Specifications are subject to change. All data is accurate to the best of our knowledge.
MicroE Systems is not responsible for errors.
Standard Rotary Scales
HUB THICKNESS
SCALE
PATTERN
SCALE O.D.
MOUNTING
HOLES
Key: inches[mm]
Model No. Scale Outer
Diameter
R1206
R1910
R3213
0.472 [12.00]
0.750 [19.05]
1.250 [31.75]
R5725 2.250 [57.15]
R10851 4.250 [107.95]
Scale Inner
Diameter
0.250 [6.35]
0.375 [9.52]
0.500 [12.70]
1.000 [25.40]
2.000 [50.80]
HUB I.D.
OPTICAL DIAMETER
Optical
Diameter
0.413 [10.50]
0.627 [15.92]
1.027 [26.08]
2.053 [52.15]
4.106 [104.30]
Custom scales available
Hub Inner
Diameter
+.0005/-0.0000
0.1253 [3.18]
0.1253 [3.183]
0.2503 [6.358]
0.5003 [12.708]
1.0003 [25.408]
Specifications
Material
Typical CTE
Soda lime glass
8ppm/°C
Hub
Thickness
Fundamental
CPR
0.040 [1.02]
0.040 [1.02]
0.050 [1.27]
0.060 [1.52]
0.080 [2.03]
1650
2500
4096
8192
16384
How to Order Mercury 3000 Encoder Systems
To specify your Mercury encoder with the desired scale, level of interpolation, maximum output frequency, cable length and software, consult the chart below to create the correct part number for your order. Call MicroE Systems’ Rapid
Customer Response team for more information [508] 903-5000.
Example (Linear Encoder): M3000-M10-1024-1-L55-C1
Example (Rotary Encoder): M3000-M10-1024-1-R1910-HA
M3000 Cable Length Interpolation -
Maximum Output
Frequency -
M05 = 0.5 m
M10 = 1.0 m
M20 = 2.0 m
4 = 4x
5 = 5x
1024 = 1024x
1 = 7.2 MHz
2 = 3.6 MHz
3 = 1.8 MHz
4 = 900 kHz
5 = 450 kHz
6 = 225 kHz
Scale Model
Lxxx or Rxxxx
How to Order SmartPrecision Software
SmartPrecision Software
SSWA120 for 120 VAC, 60Hz
US Standard 2-prong plug or
SSWA220 for 220 VAC,
50 Hz European Std. 2-prong plug
Scale Mounting
For linear scales:
T = Tape mounting
C1 = 3 scale clamps *
C2 = 10 scale clamps **
Hubs for Rotary Scales:
NH = Without Hub
HE = for R1206
HA = for R1910
HB = for R3213
HC = for R5725
HD = for R10851
* 3 clamps for linear scales up to 130mm
** 10 clamps for linear scales 155mm or longer
All Specifications are subject to change. All data is accurate to the best of our knowledge. MicroE Systems is not responsible for errors.
DS-M3000 Rev E
© 2006 MicroE Systems crro E S mss – World Headquarters: 8 Erie Drive • Natick • MA 01760 www.microesys.com • [email protected] • T. [508] 903-5000 • F. [508] 655-7084
Page10 of 10
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Table of contents
- 1 Encoder overview
- 2 System configuration
- 3 Alignment & mechanical advantages
- 4 System specifications
- 5 System specifications & sensor mechanical info
- 6 SmartPrecision electronics module (interpolator)
- 7 Mechanical info for SmartPrecision module &quad O/P frequencies
- 8 SmartPrecision software
- 9 Short & long linear scale dimensions
- 10 Rotary scales & ordering info