User's Manual Smart Sensor ZS-HL Series 2D CMOS Laser Type

User's Manual Smart Sensor ZS-HL Series 2D CMOS Laser Type
Smart Sensor
2D CMOS Laser Type
ZS-HL Series
User's Manual
Cat. No. Z236-E1-06
Introduction
This manual provides information regarding functions, performance and operating
methods that are required for using the ZS-HL Series.
When using the ZS-HL Smart Sensor, be sure to observe the following:
• The ZS-HL Smart Sensor must be operated by personnel knowledgeable in electrical
engineering.
• To ensure correct use, please read this manual thoroughly to deepen your understanding
of the product.
• Please keep this manual in a safe place so that it can be referred to whenever necessary.
How to Switch the Display Language to English
Turn the power ON with the MENU key held down. This displays the display language
selection screen.
Select Language
1 Japanese
2 English
The Controller will start up with the messages displayed in English when it is next started up.
SECTION 1 FEATURES
SECTION 2 INSTALLATION & CONNECTION
SECTION 3 APPLICATION and SETTING EXAMPLES
SECTION 4 FUNCTIONS AND OPERATIONS USED DURING OPERATION
SECTION 5 SETTINGS FOR FUNCTIONS
SECTION 6 I/O
SECTION 7 USB/RS-232C COMMUNICATION
SECTION 8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
SECTION 9 APPENDIX
User’s Manual
Smart Sensor
2D CMOS Laser Type
ZS-HL Series
Introduction Section 1 Section 2 Section 3 Section 4 Section 5 Section 6 Section 7 Section 8 Section 9
INTRODUCTION Terms and Conditions Agreement(Please Read)
Introduction
Terms and Conditions Agreement
Introduction
Terms and Conditions Agreement
Warranty, Limitations of Liability
Warranties
• Exclusive Warrant
Omron’s exclusive warranty is that the Products will be free from defects in materials and
workmanship for a period of twelve months from the date of sale by Omron (or such other
period expressed in writing by Omron). Omron disclaims all other warranties, express or
implied.
• Limitations
OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, ABOUT
NON-INFRINGEMENT, MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE
OF THE PRODUCTS. BUYER ACKNOWLEDGES THAT IT ALONE HAS DETERMINED
THAT THE PRODUCTS WILL SUITABLY MEET THE REQUIREMENTS OF THEIR
INTENDED USE.
Omron further disclaims all warranties and responsibility of any type for claims or expenses
based on infringement by the Products or otherwise of any intellectual property right.
• Buyer Remedy
OMRON MAKES NO WARRANTY OR REPRESENTATION, EXPRESS OR IMPLIED, ABOUT
Omron’s sole obligation hereunder shall be, at Omron’s election, to (i) replace (in the form
originally shipped with Buyer responsible for labor charges for removal or replacement thereof)
the non-complying Product, (ii) repair the non-complying Product, or (iii) repay or credit Buyer
an amount equal to the purchase price of the non-complying Product; provided that in no event
shall Omron be responsible for warranty, repair, indemnity or any other claims or expenses
regarding the Products unless Omron’s analysis confirms that the Products were properly
handled, stored, installed and maintained and not subject to contamination, abuse, misuse or
inappropriate modification. Return of any Products by Buyer must be approved in writing by
Omron before shipment. Omron Companies shall not be liable for the suitability or unsuitability
or the results from the use of Products in combination with any electrical or electronic
components, circuits, system assemblies or any other materials or substances or
environments. Any advice, recommendations or information given orally or in writing, are not to
be construed as an amendment or addition to the above warranty.
Omron further disclaims all warranties and responsibility of any type for claims or expenses
based on infringement by the Products or otherwise of any intellectual property right.
See http://www.omron.com/global/
or contact your Omron representative for published information.LIMITATIONS OF LIABILITY
Limitation on Liability; Etc
OMRON COMPANIES SHALL NOT BE LIABLE FOR SPECIAL, INDIRECT, INCIDENTAL, OR
CONSEQUENTIAL DAMAGES, LOSS OF PROFITS OR PRODUCTION OR COMMERCIAL
LOSS IN ANY WAY CONNECTED WITH THE PRODUCTS, WHETHER SUCH CLAIM IS
BASED IN CONTRACT, WARRANTY, NEGLIGENCE OR STRICT LIABILITY.
Further, in no event shall liability of Omron Companies exceed the individual price of the Product
on which liability is asserted.
2
ZS-HL
User’s Manual
Introduction
Terms and Conditions Agreement
Suitability of Use
Omron Companies shall not be responsible for conformity with any standards, codes or
regulations which apply to the combination of the Product in the Buyer’s application or use of the
Product. At Buyer’s request, Omron will provide applicable third party certification documents
identifying ratings and limitations of use which apply to the Product. This information by itself is
not sufficient for a complete determination of the suitability of the Product in combination with the
end product, machine, system, or other application or use. Buyer shall be solely responsible for
determining appropriateness of the particular Product with respect to Buyer’s application, product
or system. Buyer shall take application responsibility in all cases.
NEVER USE THE PRODUCT FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE
OR PROPERTY WITHOUT ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN
DESIGNED TO ADDRESS THE RISKS, AND THAT THE OMRON PRODUCT(S) IS PROPERLY
RATED AND INSTALLED FOR THE INTENDED USE WITHIN THE OVERALL EQUIPMENT OR
SYSTEM.
Introduction
Application Considerations
Programmable Products
Omron Companies shall not be responsible for the user’s programming of a programmable
Product, or any consequence thereof.
Disclaimers
Performance Data
Data presented in Omron Company websites, catalogs and other materials is provided as a
guide for the user in determining suitability and does not constitute a warranty. It may represent
the result of Omron’s test conditions, and the user must correlate it to actual application
requirements. Actual performance is subject to the Omron’s Warranty and Limitations of Liability.
Change in Specifications
Product specifications and accessories may be changed at any time based on improvements
and other reasons. It is our practice to change part numbers when published ratings or features
are changed, or when significant construction changes are made. However, some specifications
of the Product may be changed without any notice. When in doubt, special part numbers may be
assigned to fix or establish key specifications for your application. Please consult with your
Omron’s representative at any time to confirm actual specifications of purchased Product.
Errors and Omissions
Information presented by Omron Companies has been checked and is believed to be accurate;
however, no responsibility is assumed for clerical, typographical or proofreading errors or
omissions.
ZS-HL
User’s Manual
3
Introduction
Meanings of Signal Words
Introduction
Meanings of Signal Words
The following signal words are used in this manual.
Indicates a potentially hazardous situation which, if not avoided, will
result in minor or moderate injury, or may result in serious injury or
death. Additionally there may be significant property damage.
Meanings of Alert Symbols
The following alert symbols are used in this manual.
Indicates general prohibitions for which there is no specific symbol.
Indicates the possibility of laser radiation.
Indicates prohibition when there is a risk of minor injury from electrical shock
or other source if the product is disassembled.
Alert statements in this Manual
The following alert statements apply to the products in this manual. Each alert statement also
appears at the locations needed in this manual to attract your attention.
This product is not designed or rated for ensuring safety of persons.
Do not use it for such purposes.
Never look into the laser beam. Doing so continuously will result in visual
impairment.
Do not disassemble the product. Doing so may cause the laser beam to
leak, resulting in the danger of visual impairment.
4
ZS-HL
User’s Manual
Introduction
Precautions for Safe Use
Introduction
Precautions for Safe Use
Please observe the following precautions for safe use of the products.
(1) Installation Environment
• Do not use the product in environments where it can be exposed to inflammable/
explosive gas.
• To secure the safety of operation and maintenance, do not install the product close to
high-voltage devices and power devices.
(2) Power Supply and Wiring
• The supply voltage must be within the rated range (DC24 V ± 10 %).
• Reverse connection of the power supply is not allowed.
• Open-collector outputs should not be short-circuited.
• Use the power supply within the rated load.
• High-voltage lines and power lines must be wired separately from this product. Wiring
them together or placing them in the same duct may cause induction, resulting in malfunction or damage.
(3) Regulations and Standards
• EN61326-1
• Electromagnetic environment : Industrial electromagnetic environment (EN/IEC 613261 Table 2)
• The following condition is applied to the immunity test of this product: There may be
cases that current or voltage output fluctuate within ±3%F.S. when a sensor is experienced electromagnetic interference.
• Notice for Korea Radio Law
A급 기기 (업무용 방송통신기자재)
이 기기는 업무용 ( A급 ) 전자파적합기기로서 판매자
또는 사용자는 이 점을 주의하시기 바라며 , 가정외의
지역에서 사용하는 것을 목적으로 합니다.
(4) Others
• Do not attempt to dismantle, repair, or modify the product.
• Dispose of this product as industrial waste.
ZS-HL
User’s Manual
5
Introduction
Precautions for Correct Use
Introduction
Precautions for Correct Use
Please observe the following precautions to prevent failure to operate, malfunctions, or
undesirable effects on product performance.
(1) Installation Site
Do not install the product in locations subjected to the following conditions:
• Ambient temperature outside the rating
• Rapid temperature fluctuations (causing condensation)
• Relative humidity outside the range of 35 to 85 %
• Presence of corrosive or flammable gases
• Presence of dust, salt, or iron particles
• Direct vibration or shock
• Reflection of intense light (such as other laser beams or electric arc-welding
machines)
• Direct sunlight or near heaters
• Water, oil, or chemical fumes or spray
• Strong magnetic or electric field
(2) Power Supply and Wiring
• When using a commercially available switching regulator, make sure that the FG terminal is grounded.
• If surge currents are present in the power lines, connect surge absorbers that suit the
operating environment.
• Before turning ON the power after the product is connected, make sure that the power
supply voltage is correct, there are no incorrect connections (e.g. load short-circuit)
and the load current is appropriate. Incorrect wiring may result in breakdown of the
product.
• Before connecting/disconnecting the Sensor Head, make sure that the Smart Sensor
is turned OFF. The Smart Sensor may break down if the Sensor Head is connected or
disconnected while the power is ON.
• Use the Extension Cable (provided) for extending the cable between the Sensor Head
and Sensor Controller. The total length varies according to the type of Extension Cable.
- Extension Cable: ZS-XC_A: within 10 m (including Sensor Head cable. Extension
Cable cannot be daisy-chained.)
- Extension Cable: ZS-XC_B(R): within 22 m (including Sensor Head. Up to two
Extension Cables can be daisy-chained.)
- Extension cable for a long distance ZS-XC_ _CR: within 27 m (including Sensor
Head. Digital equalizer ZS-XEQ and the Digital equalizer connection cable ZSXC02D are necessary. The extension cable cannot be daisy-chained.)
• The cable may break at locations when it is made to bend. So, use the robot cable
type Extension Cable (ZS-XC5BR, ZS-XC_ _CR).
• Use only combinations of Sensor Heads and Sensor Controllers specified in this manual.
6
ZS-HL
User’s Manual
Introduction
Precautions for Correct Use
Introduction
(3) Orientation when Installing the Sensor Controller
To improve heat radiation, install the Sensor Controller only in
the orientation shown below.
Do not install the Sensor Controller in the following orientations.
(4) Warming Up
After turning ON the power supply, allow the product to stand for at least 30 minutes
before use. The circuits are still unstable immediately after the power supply is turned
ON, so measured values may fluctuate gradually.
(5) Maintenance and Inspection
Do not use thinner, benzene, acetone or kerosene to clean the Sensor Head and Sensor Controller. If large dust particles adhere to the front filter of the Sensor Head, use a
blower brush (used to clean camera lenses) to blow them off. Do not blow the dust particles with your mouth. To remove smaller dust particles, wipe gently with a soft cloth
(for cleaning lenses) moistened with a small amount of alcohol. Do not use excessive
force to wipe off dust particles. Scratches on the filter may cause errors.
(6) Sensing Objects
The product sometimes cannot accurately measure the following types of objects:
Transparent objects, objects with an extremely low reflection factor, objects smaller
than the spot diameter, objects with a large curvature, excessively inclined objects, etc.
(7) Effect caused by peripheral lights
Do not install the Sensor Head in a place where strong light hits the laser emitter/
receiver section of the Sensor Head. Also, if a workpiece has a shiny surface, the light
from the lighting will be reflected and a malfunction may occur. In such a case, prevent
reflection by, for example, covering the light to stop reflection.
p.2-4
ZS-HL
User’s Manual
7
Introduction
Precautions for Correct Use
Introduction
Editor's Note
Page Format
Title of each section
Header
Overview
Section5
Setting the Filter Function
Setting the Filter Function
Set the conditions for filtering information obtained from the sensor.
Displacement
Waveform
when filter
function is not
set
Smooth
SMOOTH
Spike-like changes are
removed.
Average
value
Changes are smoothed out.
Displacement
Cross-header
Overview of the
cross-header
Changes are extracted to
eliminate displacement value.
Differentiation
0
Section5 SETTINGS FOR FUNCTIONS
Setting SMOOTH
The intermediate value of multiple sets of data can be output as the measurement result.
This function removes any abnormal values such as spiking that occur when the shape of
the workpiece suddenly changes during measurement.
Example: To remove spiking
Measured value
Abnormal values such as spiking that occur when the shape
of the workpiece suddenly changes during measurement.
Time
Index label
Indicates the section
number and title.
Measured value
The smoothing function can remove spikes
Movement through menus
up to setting items
Time
FUN Mode-[FILTER]-[SMOOTH]
Setting
Explanation of options
Description
OFF
The smooth function is not used.
ON
The intermediate value of the past 15 measured values is set as the measurement
result at each sampling cycle.(default value)
When "HI-SPEED" is set in the measurement mode, [OFF] is set.
ZS-HL
User’s Manual
5-11
Supplementary Explanation
Helpful information regarding operation and reference
pages are introduced here using symbols.
*This page has been made purely for explanatory purposes and does not exist.
8
ZS-HL
User’s Manual
Introduction
Precautions for Correct Use
Menu items that are displayed on the Sensor Controller’s LCD screen, and windows,
dialog boxes and other GUI elements displayed on the PC are indicated enclosed by
brackets [aa].
Introduction
 Meaning of Symbols
 Vidual Aids
Indicates points that are important to ensure full product performance, such as operational
precautions and application procedures.
Indicates pages where related information can be found.
Indicates information helpful in operation.
ZS-HL
User’s Manual
9
Introduction
Precautions for Correct Use
Introduction
10
MEMO
ZS-HL
User’s Manual
Introduction
Terms and Conditions Agreement
2
Meanings of Signal Words
4
Meanings of Alert Symbols
4
Alert statements in this Manual
4
Regulations and Standards
5
Precautions for Safe Use
5
Precautions for Correct Use
6
Editor's Note
8
Page Format
CONTENTS
Search from Menu Tree
Section 1 FEATURES
8
11
16
1-1
Introduction of the ZS-HL Series
1-2
System Configuration
1-3
Part Names and Functions
1-4
Sensor Head
1-4
Sensor Controller
1-5
Operation Modes
1-7
Setting Flow
1-8
Section 2 INSTALLATION & CONNECTION
2-1
About Installation and Connection
2-2
Sensor Head
2-2
Measuring Range
2-3
Basic Precautions for Installation
2-4
Connecting the Sensor Head
2-5
Sensor Controller
Installation of Sensor Controller
2-7
2-7
Wiring the I/O cable
2-10
I/O Circuit Diagrams
2-12
SmartMonitor ZS
CONTENTS Section 1 Section 2 Section 3 Section 4 Section 5 Section 6 Section 7 Section 8 Section 9
CONTENTS
2-14
ZS-HL
User’s Manual
11
Introduction
CONTENTS
Operating Environment
2-14
Installation/Uninstallation Method
2-15
Starting and Exiting SmartMonitor ZS
2-19
Section 3 APPLICATION and SETTING EXAMPLES
Measuring Height (basic)
3-2
Measuring the Thickness of Transparent Objects
3-4
Measuring the Vertex 2 (peak) in the Line Beam
3-6
Measuring Multiple Items Simultaneously (Multi-Task)
3-8
Section 4 FUNCTIONS AND OPERATIONS USED DURING OPERATION
4-1
Switching the Display of the Measured Value
4-2
List of Key Operations in RUN Mode
4-4
Zero Reset Operation
4-5
Threshold Setting
4-7
Bank Switching (change of device setup)
Section 5 SETTINGS FOR FUNCTIONS
Basic Operations of Sensor Controller
Displays and Key Operations
Using the Multi-Task Function
4-10
5-1
5-2
5-2
5-4
Switching to Multi-Task Mode
5-5
Selecting Tasks
5-5
Setting for Sensing Conditions
5-6
Setting Measurement Mode
5-6
Setting GAIN
5-7
Setting Head Installation
5-8
Setting the Emitted Light Amount
5-8
Setting Measurement Object
5-9
Setting Mutual Interference Prevention
Setting the Filter Function
ZS-HL
5-11
5-12
Setting SMOOTH
5-12
Setting AVERAGE
5-13
Setting Differentiation
5-13
Setting Output Processing of Sensing Information
12
3-1
User’s Manual
5-14
Introduction
5-14
Setting HOLD Functions
5-18
Setting the Zero Reset Function
5-22
Setting for Measurement of Characteristic Points
5-24
Setting Display Method
5-25
Setting the Digital Display
5-25
Displaying HELP
5-25
Setting the LCD Screen
5-26
Setting the System Environment
5-27
Checking Information
5-27
Setting the Key Lock
5-27
Setting the Sensor Load Method
5-28
Setting the Display Language
5-28
Changing the Way of Obtaining Banks
5-28
Saving the Settings Data
5-29
Clearing the Settings
5-29
Initializing All Settings
5-29
Clearing Banks
5-29
Section 6 I/O
Overview
6-1
6-2
I/O Cable
6-2
Terminal Block Output
6-2
Settings for Linear Output
6-3
Assignment of Linear Output
6-3
Setting Focus
6-4
Correcting Linear Output Values
6-5
Settings for Judgment Output
6-7
Operation Settings at Judgment Output
6-7
Assignment of Judgment Output (For Multi-Task)
6-8
Settings for Terminal Block Output
6-9
Real-Time Parallel Output Unit
6-9
Assignment of Terminal Block Output
6-10
Output Format
6-11
ZS-HL
User’s Manual
CONTENTS Section 1 Section 2 Section 3 Section 4 Section 5 Section 6 Section 7 Section 8 Section 9
Setting the Scaling
13
Introduction
CONTENTS
Setting Focus
6-13
Setting the Update Cycle
6-14
Settings for Processing when Measurement Cannot be Performed
6-15
When Connecting ZS-MDC and ZS-DSU
6-16
Settings for Input Signal
6-17
Settings for the Active Direction of an Input Signal
6-17
Changing the Assignment of Input Signals
6-17
Timing Charts
Section 7 USB/RS-232C COMMUNICATION
Overview
7-1
7-2
USB
7-2
RS-232C
7-3
Connecting Using a USB Cable
7-4
Connection Method
7-4
Setting the Communication Specifications
7-4
Connecting Using a RS-232C Cable
7-5
Connection Method
7-5
Setting the Communication Specifications
7-6
Settings for High-Speed Digital Output
7-7
Timing Charts
7-8
Section 8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
Sensor Head
8-1
8-2
Specifications
8-2
External Dimensions
8-7
Adjusting Mutual Interference
8-15
Spot Diameter
8-19
Usage Width of Line Beam
8-20
Linearity Characteristic by Materials
8-21
Sensor Controller
8-40
Specifications
8-40
External Dimensions
8-42
Accessory
14
6-18
ZS-HL
User’s Manual
8-43
Introduction
8-43
Extension Cable
8-44
Extension Cable (Long-Distance, Flexible Type)
8-45
RS-232C Cable
8-47
Control Link Unit
8-48
Real-Time Parallel Output Unit
8-49
Section 9 APPENDIX
9-1
Troubleshooting
9-2
Error Messages and Countermeasures
9-3
Safety Precautions for Using Laser Equipment
9-4
Requirements from Regulations and Standards
9-6
Summary of Requirements to Manufactures
9-6
Summary of Requirements to User
9-10
Definitions of Laser Classification
9-13
Updating Firmware
Flow of Updating Firmware
CONTENTS
Panel Mount Adapter
9-15
9-15
Index
9-21
Upgrade Information
9-25
Revision History
9-26
ZS-HL
User’s Manual
15
Introduction
CONTENTS
CONTENTS
Search from Menu Tree
 FUN Mode
 For the Single-Task mode
FUN Mode
Settings
SENSING
FILTER
OUTPUT
HOLD
Zero reset
16
ZS-HL
User’s Manual
Option/Range
*Default Value
Pages
MODE
STAND, HI-RESO*, HI-SPEED, HI- p.5-6
SENS
CUSTOM (EXPOSE, SKIP,
LINE)
GAIN
SETTING
LASER
1*, 2, 3, 4, 5
p.5-7
DIFFUSE, REGULAR
p.5-8
AUTO*, RANGE, FIXED
(upper limit 0.1 to 80 %)
p.5-8
OBJECT
NORMAL*, PCB, MIRROR,
GLASS (MODE 1, MODE2),
THICK (MODE 1, MODE2)
p.5-9
SYNC
OFF*,
ON (timing A, timing B)
p.5-11
SMOOTH
AVERAGE
OFF, ON*
p.5-12
1, 2, 4, 8, 16, 32, 64, 128*, 256, 512, p.5-13
1024, 2048, 4096
(When the mode is set to HIGHSPEED mode, the value is from 1 to
256.)
DIFF
OFF*, ON
p.5-13
SCALING
OFF*,
p.5-14
TYPE
OFF*,
TRIGGER
DELAY
EXT*, SELF-UP, SELF-DN
TYPE
OFFSET
STATUS
REAL*, HOLD
ON (AUTO, MAN)
PEAK, BOTTOM,
P-P, AVERAGE,
SAMPLE
p.5-18
OFF*, ON (T-DELAY, T-TIME)
-999.999 to 999.999 (default value:0)
OFF, ON*
p.5-22
Introduction
CONTENTS
I/O SET
JUDGE
ANALOG
TERMINAL
KEEP,
HYS
0 to 999.999 (default value: 0.05 % p.6-7
of Sensor Head measuring range)
TIMER
OFF*, OFF-DLY (1 to 5,000 ms),
ON-DLY (1 to 5,000 ms),
1SHOT (1 to 5,000 ms)
FOCUS
ADJUST
OUT
CLAMP
OFF*, ON
FOCUS
CYCLE
OUT
CLAMP
INFO
COM
(RS-232C)
COM
CLAMP*
p.6-15
p.6-3
OFF*, ON (-999 to 999)
OFF, ON*
(for current output)
p.6-15
4`20 mA (every1 mA), MAX*, MIN
(for voltage output)
-10 V to 10 V (every1 V), MAX*,
MIN
OFF*, ON
p.6-9
1 to 100 (default value: 1)
NONE*, MEASURE, JUDGE
0 to 65535 (default value: 65535)
p.6-15
OFF,
ON*
p.7-7
CONNECT
OFF,
ON*
p.6-16
ACTIVE
MODE
IN0 to IN3 (OFF, ON*)
CHANGE
BANK1*, BANK2, BANK3, BANK4
(if you change the mode to
[THRESH], you can select up to
BANK32.)
p.4-10
MODE
CLEAR
NORMAL*, THRESH
p.5-28
(Initializes bank settings.)
p.5-29
SAVE
INIT
(Saves Sensor Controller settings.)
p.5-29
(Initializes Sensor Controller settings.)
p.5-29
CYCLE
(Displays the current sampling
cycle.)
p.5-27
VERSION
(Displays the Sensor Controller version.)
LENGTH
PARITY
STOP
BAUDRAT
DELIMIT
8 BIT*, 7 BIT
NODE
0 to 16 (default value: 0)
p.7-6
KEYLOCK
SenINFO
ZERORST
MUITI
LANGUAG
OFF*, ON
p.5-27
BANK
SYSTEM
Pages
NO MEAS
DIGITAL
INPUT
Option/Range
CONTENTS
Settings
p.6-17
NORMAL*, BANK
p.7-6
NONE*, ODD, EVEN
1 BIT*, 2 BIT
9600, 19200, 38400*, 57600, 115200
CR*, LF, CR+LF
LOAD*, SAVE
p.5-28
OFF*, ON
p.5-23
OFF*, ON
p.5-5
Japanese*, English
p.5-28
ZS-HL
User’s Manual
17
Introduction
CONTENTS
CONTENTS
 For Multi-Task mode
The menu configuration is changed to one in which multiple characteristic points can
be measured and output simultaneously (up to four characteristic points).
Single-Task mode
SENSING TASK1
I/O SET
FILTER OUTPUT
Multi-Task mode
SENSING TASK1 TASK2 TASK3 TASK4 I/O SET
MEASURE FILTER OUTPUT
This section describes only the parts that are different from those in Single-Task mode.
FUN Mode
TASK1
Settings
SENSING
*Default Value
Option/Range
Pages
(Difference with Single-Task mode)
MODE
([HIGH SPEED] is not displayed.)
–
GAIN
(Same as Single-Task mode)
–
SETTING
LASER
MEASURE
TASK2 to 4
18
ZS-HL
User’s Manual
OBJECT
([THICK] is not displayed.)
–
SYNC
(Same as Single-Task mode)
–
TASKSET
NONE*, AVERAGE, PEAK, BOTTOM, THICK, STEP, K+mX+nY
p.5-24
FILTER
(Same as Single-Task mode)
–
OUTPUT
(Same as Single-Task mode)
–
TASKSET
p.5-24
MEASURE
NONE*, AVERAGE, PEAK, BOTTOM, THICK, STEP, K+mX+nY
FILTER
(Same as Single-Task mode)
–
OUTPUT
(Same as Single-Task mode)
–
Introduction
CONTENTS
TASK1
I/O SET
Select TASK you
want to output.
JUDGE
ANALOG
TERMINAL
BLOCK
INPUT
Option/Range
Pages
(Difference with Single-Task mode)
NON-MEAS
(Same as Single-Task mode)
–
HYS
(Same as Single-Task mode)
–
TIMER
(Same as Single-Task mode)
–
OUT
TASK1*, TASK2, TASK3, TASK4
p.6-8
FOCUS
(Same as Single-Task mode)
–
ADJUST
(Same as Single-Task mode)
–
OUT
TASK1*,
CLAMP LEVEL
(Same as Single-Task mode)
–
FOCUS
(Same as Single-Task mode)
–
CYCLE
(Same as Single-Task mode)
–
OUT
NONE*, Measured value (TASK1 to
TASK4, REPEAT), JUDGE
p.6-10
CLAMP
(Same as Single-Task mode)
–
DIGITAL
TASK1 to TASK4 (OFF, ON)
p.7-7
CONNECT
TASK1*, TASK2, TASK3, TASK4
p.6-16
CONTENTS
Settings
TASK2, TASK3, TASK4, None p.6-3
(Same as Single-Task mode)
–
ZS-HL
User’s Manual
19
Introduction
CONTENTS
CONTENTS
 RUN mode
In RUN mode, you can customize the details that are displayed in the digital displays.
To call up the display customize menu, press the MENU key in RUN mode.
Settings
RUN Mode
Pages
DOT
0 to 5th
p.5-25
(Item whose default value varies
according to the connected Sensor
Head)
ECO
NORMAL*, ECO, OFF
p.5-25
ON/OFF
ON*, AUTOOFF, OFF
p.5-26
B.LIGHT
ON*,
p.5-26
CUSTOM
U- ON/OFF, L- ON/OFF
U- CUSTM, L- CUSTM
(default value: U- OFF, L- OFF)
p.5-26
HELP
–
p.5-25
DIGITAL
LCD
Option/Range
AUTOOFF, OFF
 TEACH Mode
This is the mode for setting the threshold values.
TEACH Mode
20
ZS-HL
User’s Manual
Settings
Option/Range
TEACHING
–
DIRECT IN
–
Pages
p.4-7
Section 1 FEATURES
Section 1
FEATURES
Introduction of the ZS-HL Series
1-2
System Configuration
1-3
Part Names and Functions
1-4
Sensor Head
1-4
Sensor Controller
1-5
Operation Modes
1-7
Setting Flow
1-8
ZS-HL
User’s Manual
1-1
Section 1
Introduction of the ZS-HL Series
Introduction of the ZS-HL Series
Section 1 FEATURES
The ZS-HLDC Series is a 2D COMS laser type displacement sensor. In addition to ZS-L
full-digital processing, it maximizes sensing performance using a multi-task function.
Sensor Head
(1)
LD ON ZERO ENABLE
H
Sensor Controller
P
L
(2)
SmartMonitor ZS
(3)
Personal computer
(1)
Enhanced Variation of Sensor Heads
Suitable as a high-end displacement sensor, it supports a wide range of Sensor Heads.
You can perform a stable measurement using a Sensor Head that is suitable for the
workpiece, from 0.001 µm ultra-high-resolution type to 1500-mm ultra-long-range type.
(2)
Sensor Controller Incorporating Multiple Functions
For one sensing condition, it incorporates a multi-task function that holds up to a
maximum of four kinds of measurement processing as a “task.” Because you can
measure any characteristic point for each task, you can measure and judge multiple
characteristic points simultaneously.
Example: Measure the height and surface fluctuation simultaneously.
Surface fluctuation (TASK2)
Height (TASK1)
(3)
Setting Support Software for Personal Computer “SmartMonitor ZS”
It displays data and specifies the settings for the controller that is connected via
“SmartMonitor ZS” bundled with the Sensor Controller (ZS-HLDC_1A). You can
easily check the sensing status and specify the settings in more detail, which cannot
be done using a controller.
If you use “SmartMonitor ZS Professional,” which is sold separately, you can do logging for a
measured value.
1-2
ZS-HL
User’s Manual
Section 1
System Configuration
System Configuration
Basic configuration
Peripheral devices
Personal computer
Sensor Head
ZS-HLDS_ _ _/LD_ _
Detects a sensing object.
USB
• Communication using commands
• Communication using SmartMonitor
ZS Professional
RS-232C
Section 1 FEATURES
In addition to operations with the basic configuration, ZS-HLDC can support various
measurement applications when combined with numerous peripheral devices.
Programmable controller
ZS-XPT2
CompoNet
LD ON ZERO ENABLE
• Communication using commands
H
P
Sensor Controller
ZS-HLDC_ _
Performs measurements
and outputs the results.
L
Sensor Communication
unit
ZS-CRT
Digital panel meter
(*1)
Linear output
USB
(*1)
High-speed parallel
output
• Compare waveforms and make a judgment
High-speed input board (personal computer)
DATA
SmartMonitor ZS
(Setting support software for personal computers)
ZS-RPD
Power supply
Programmable controller
PARALLEL OUTPUT UNIT
*1: Accessory for the Sensor Controller ZS-HLDC_1A
RS-232C
This setting support software sets
sensing conditions while monitoring
the receiving status, and allows a user
to check the measured value in a time
series graph.
Real-time parallel
Output unit
ZG-RPD_1
• Obtain measurement data quickly
(exclusive to the ZS-HL Series)
Extension cable for Sensor Head
DC24 V (±10 %)
Recommended part
(1) If the number of connections is
1: S82K-01524 (DC24 V, 0.6 A)
(2) If the number of connections is
2 to 3: S82K-05024 (DC24 V, 2.1 A)
(3) If the number of connections is
4 to 10: Prepare as many of the
above power supplies of (1) and
(2) as you need.
ZS-XC_A (1 m, 4 m, 8 m)
ZS-XC_ _B(5 m, 10 m): Up to two cables can be connected.
ZS-XC5BR (5 m): Up to two cables can be connected.
Robot cable type.
Long Extend the cable of Sensor Head
• Extension cable for a long
distance (*2)
ZS-XC_ _CR (15 m, 25 m)
• Digital equalizer
connection cable
ZS-XC02D (*2)
Method of connecting • Digital equalizer ZS-XEQ (*2)
a cable p.2-6
*2: Only the ZS-HLDS___ Sensor Head can be connected to the ZS-XC__CR,
ZS-XC02D, and ZS-XEQ.
The ZS-HLDS2V cannot be connected.
ZS-HL
User’s Manual
1-3
Section 1
Part Names and Functions
Part Names and Functions
Section 1 FEATURES
The following describes the names and functions of parts of the Sensor Head and Sensor
Controller.
Sensor Head
[ZS-HLDS2T]
[ZS-HLDS5T/HLDS10]
(3) Receiver
section
(6) NEAR
indicator
(6) NEAR indicator (2) Emitter section
(5) FAR indicator
(2) Emitter
section
(5) FAR
indicator
(3) Receiver section
(4) Connector
(4) Connector
[ZS-LD10GT/LD15GT]
(2) Emitter section
(3) Receiver section
(5) FAR indicator
(6) NEAR indicator
(4) Connector
[ZS-HLDS60/HLDS150]
[ZS-LD_ _ _/HLDS2VT]
(3) Receiver
section
(6) NEAR indicator
(1) Laser emitter/
receiver section
(5) FAR indicator
(6) NEAR
indicator
(2) Emitter
section
(4) Connector
(4) Connector
Names
1-4
(5) FAR
indicator
Functions
(1)
Laser Emitter/Receiver This is the section that emits the laser beam and receives reflected light.
Section
(2)
Emitter section
(3)
Receiver section
(4)
Connector
ZS-HL
User’s Manual
To be connected to the Sensor Controller
Section 1
Part Names and Functions
Names
Functions
(5)
FAR Indicator
(6)
NEAR Indicator
Section 1 FEATURES
These indicators light up as follows according to the distance between the front of the
Sensor Head and the workpiece.
Both NEAR/FAR indicators are lit up: Measuring center distance ± (measuring range
× 10 %)
NEAR indicator is lit up: Near side within measuring range
FAR indicator is lit up: Far side within measuring range
Both NEAR and FAR indicators are flashing: Outside measuring range
These indicators also double as laser alarm indicators.
- At least one of the indicators will either light up or flash after the Sensor
Head is turned ON.
- Both indicators go out for 15 to 25 seconds after the Sensor Head is turned
ON to indicate that the laser beam is OFF.
- Either of these indicators will light up or flash while the laser beam is being
emitted.
- Both indicators go off when the laser beam is OFF.
Sensor Controller
(13) Sensor Head connector
(1) Laser indicator
(2) Zero Reset indicator
(3) ENABLE indicator
(12) HIGH indicator
(11) PASS indicator
(10) LOW indicator
LD ON ZERO ENABLE
H
P
L
(4) Main display
(5) Sub-display
(6) LCD screen
(7) Control keys
(9) Threshold switch
(8) Mode switch
(14) Coupler
(15) RS-232C connector
(18) USB port
(16) Voltage/Current switch
(17) I/O cable
Names
Functions
(1)
Laser indicator
The Laser indicator is lit while the Sensor Head is emitting a laser beam.
(2)
Zero Reset indicator
The Zero Reset indicator is lit while the zero reset function is enabled.
ZS-HL
User’s Manual
1-5
Section 1
Part Names and Functions
Section 1 FEATURES
Names
Functions
(3)
ENABLE indicator
The ENABLE indicator lights when the Sensor is ready for measurement.
It goes off when measurement is not possible (e.g. when the received light amount is
excessive or insufficient, when the measuring range is exceeded, or when measurement is not being performed in FUN mode).
The ENABLE indicator flashes when a Sensor Head is not connected.
(4)
Main Display
The Main Display shows measured values.
(5)
Sub-display
The sub-display shows thresholds and additional information during measurement.
(6)
LCD screen
RUN mode
: Displays additional information for the main display and the setup
menu for display related information.
TEACH mode: Displays the menu for setting up the thresholds.
FUN mode : Displays the measurement condition setup menu.
(7)
Control keys
The Control Keys are for setting measurement conditions and other information. The
functions assigned to the Control Keys change according to the operating mode.
Key Operations p.4-4, p.5-2
(8)
Mode switch
The Mode Switch selects the operating mode.
RUN mode : Select this mode when performing regular measurement.
TEACH mode: Select this mode when setting the judgment thresholds.
FUN mode : Select this mode when setting measurement conditions.
(9)
Threshold switch
The Threshold Selector switch selects whether to set (or display) the HIGH or LOW
threshold.
(10)
LOW indicator
The LOW indicator is lit while the condition “measured value < LOW threshold” is
satisfied.
(11)
PASS indicator
The PASS indicator is lit while the condition “LOW threshold ≤ measured value ≤
HIGH threshold” is satisfied.
(12)
HIGH indicator
The HIGH indicator is lit while the condition “HIGH threshold < measured value” is
satisfied.
(13)
Sensor Head connector
This connector connects the Sensor Head.
(14)
Coupler
This connector is used to connect two or more Sensor Controllers. It is located on
both sides of the Sensor Controller.
(15)
RS-232C connector
Connect the RS-232C cable when you are connecting the Sensor Controller to a
PLC or a programmable terminal. For the RS-232C cable, please use the following
exclusive products: If you use a cable not included in the exclusive products, a malfunction or breakdown may result.
- For connecting to a PLC or programmable terminal: ZS-XPT2
- For connecting to a personal computer: ZS-XRS2
If you connect the Sensor Controller to ZG-RPD and use it, connect a connector for
ZG-RPD.
(16)
Voltage/Current switch
The Voltage/Current switch selects between voltage output and current output.
Before operating this switch, make sure that the Sensor Controller is turned
OFF. Also, make sure that the load connected to “linear output wire (coaxial) - linear GND wire” satisfies the rating of the set state (voltage or current output) before turning the Sensor Controller ON. Otherwise, the Sensor
Controller may be damaged.
Rating of connected load (I/O Circuit Diagrams) p.2-12
1-6
(17)
I/O Cable
The I/O cable connects the Data Storage Unit to the power supply and external
devices, such as timing sensors or programmable controllers.
(18)
USB port
Connect the USB cable to the USB port to connect to a personal computer.
ZS-HL
User’s Manual
Section 1
Operation Modes
Operation Modes
LD ON ZERO ENABLE
H
P
L
Section 1 FEATURES
The ZS-HL has the following 3 operating modes. Switch to the desired mode before you
start operation.
To switch the operating mode, use the mode switch.
TEACH
FUN
Mode
RUN
Description
RUN Mode
Normal operating mode
TEACH Mode
This mode is for setting the judgment threshold values.
FUN Mode
Mode for setting the measurement conditions.
When you switch the operating mode after changing the measurement conditions, you will be prompted
to save the settings. Save the settings as required. If you turn off the Sensor Controller without saving
these settings, the newly set measurement conditions will be cleared from memory. You can also save
all the settings later on.
Saving the Settings Data p.5-29
ZS-HL
User’s Manual
1-7
Section 1
Setting Flow
Installation & Connection
Section2
INSTALLATION & CONNECTION
Attach a Sensor Head according to the front side
material of the workpiece and the features of the Sensor.
Single-Task
Multi-Task
Switching to Multi-Task Mode
p.5-4
Selecting Tasks
p.5-5
Selecting the Status of Head Installation
p.5-8
Select either regular reflection or diffuse reflection.
Selecting Measurement Mode
p.5-6
Change it when the received light amount is small or when you want to increase the
processing speed. (Usually, select [HI-RESO] of the default values.)
Selecting the Measurement Object
Change it when you measure glass or mirrors. (Usually, select [NORMAL] of the default values.)
Saving the Settings
Setting for output processing
Setting for Measurement
of Characteristic Points
1-8
p.2-2
Turn ON the power.
Setting for measurement conditions
Section 1 FEATURES
Preparation for
measurement
Setting Flow
ZS-HL
p.5-9
p.5-24
When you select Multi-Task mode, specify the setting for each task.
Setting the Scaling
You can correct the display value of the measured value as desired.
Setting HOLD
Set the hold conditions.
Setting the Zero Reset Function
Set zero reset.
Save the Settings Data
Save the data you have set.
User’s Manual
p.5-14
p.5-18
p.5-22
p.5-29
Make sure that you always save the data after you set it.
If you turn OFF the power without saving the data, all the settings data will be cleared.
If You Cannot Perform a
Measurement Smoothly
Operations and Settings as Required
Executing Zero Reset
p.4-6
Threshold Setting
p.4-7
Bank Switching
p.4-10
p.5-8
Adjusting and Setting Sensing
Conditions
Setting the Emitted Light Amount
Setting the Filter Function
Setting SMOOTH
Setting AVERAGE
Setting DIFF
p.5-12
p.5-13
I/O (JUDGE, LINEAR, and OUTPUT
of TERMINAL BLOCK)
Section6 I/O
p.6-2
USB/RS-232C communication
Section7
USB/RS-232C COMMUNICATION p.7-2
Setting Banks
Changing the Way of
Obtaining Banks
Clearing Banks
p.5-28
Setting the Display
Setting the LCD display
HELP
p.5-25
p.5-26
Initializing Settings Data
Checking Information
Setting the Communication
Specifications
Setting Key Lock
Setting the Sensor Load Method
p.5-29
Setting the Display Language
p.5-28
Setting the Display Method
Setting the System Environment
Section 1 FEATURES
Functions Used During
Operation
Section 1
Setting Flow
Setting Mutual Interference Prevention p.5-11
p.5-7
Setting GAIN
p.5-13
p.5-29
p.5-25
p.5-27
p.7-6
p.5-27
p.5-28
When a Problem Occurs...
When The Smart Sensor Does
Not Operate Correctly
Troubleshooting
p.9-2
When An Error Message Appears
Error Messages and
Countermeasures
p.9-3
ZS-HL
User’s Manual
1-9
Section 1
Setting Flow
MEMO
Section 1 FEATURES
1-10
ZS-HL
User’s Manual
Section2
INSTALLATION & CONNECTION
2-2
Sensor Head
2-2
Measuring Range
2-3
Basic Precautions for Installation
2-4
Connecting the Sensor Head
2-5
Sensor Controller
Installation of Sensor Controller
2-7
2-7
Wiring the I/O cable
2-10
I/O Circuit Diagrams
2-12
SmartMonitor ZS
Section2 INSTALLATION & CONNECTION
About Installation and Connection
2-14
Operating Environment
2-14
Installation/Uninstallation Method
2-15
Starting and Exiting SmartMonitor ZS
2-19
ZS-HL
User’s Manual
2-1
Section2
About Installation and Connection
About Installation and Connection
 Checking the installation environment
Read “Important Points on Safety” at the beginning of this manual, and check the
installation environment.
Section2 INSTALLATION & CONNECTION
 Checking the installation site
Read “Notes on Use” at the beginning of this manual, and check the installation site.
 About the power supply
Before installing and connecting the Sensor Controller, be sure to turn it OFF.
Also read “Important Points on Safety” and “Notes on Use” at the beginning of this
manual, and check the power supply and wiring.
Sensor Head
Never look into the laser beam. Doing so continuously will result in
visual impairment.
Never look into the laser beam.
Do not disassemble the product. Doing so may cause the laser beam
to leak, resulting in the danger of visual impairment. Do not disassemble the product.
2-2
ZS-HL
User’s Manual
Section2
Sensor Head
Measuring Range
The ZS-HL Series displays - (minus) for the NEAR side and + (plus) for the FAR side with
the measuring center distance set to 0 (zero).
Example: For the Sensor Head ZS-HLDS2T
Measuring center 0 mm
Measuring range
+1 mm
FAR side
• ZS-HLDS_ _ _ Series
Regular reflection
Measuring center
distance
Measuring range
Diffusive reflection
Measuring center
distance
Measuring range
ZS-HLDS2T
20 mm
±1 mm
5.2 mm
±1 mm
ZS-HLDS2VT
25 mm
±2 mm
–
–
ZS-HLDS5T
44 mm
±4 mm
50 mm
±5 mm
ZS-HLDS10
94 mm
±16 mm
100 mm
±20 mm
ZS-HLDS32
–
–
325mm
±175 mm
ZS-HLDS60
–
–
600 mm
±350 mm
ZS-HLDS150
–
–
1,500 mm
±500 mm
Section2 INSTALLATION & CONNECTION
-1 mm
NEAR side
Measurement center
distance: 20 mm
• ZS-LD_ _ _ Series
Regular reflection
Measuring center
distance
Measuring range
Diffusive reflection
Measuring center
distance
Measuring range
ZS-LD10GT
10 mm
±0.5 mm
–
–
ZS-LD15GT
15 mm
±0.75 mm
–
–
ZS-LD20T/20ST
20 mm
±1 mm
6.3 mm
±1 mm
ZS-LD40T
40 mm
±2.5 mm
30 mm
±2 mm
ZS-LD50/50S
47 mm
±4 mm
50 mm
±5 mm
ZS-LD80
78 mm
±14 mm
80 mm
±15 mm
ZS-LD130
130 mm
±12 mm
130 mm
±15 mm
ZS-LD200
200 mm
±48 mm
200 mm
±50 mm
ZS-LD350
–
–
350 mm
±135 mm
ZS-HL
User’s Manual
2-3
Section2
Sensor Head
Basic Precautions for Installation
Color/shiny surface boundary
Wrong
Right
Section2 INSTALLATION & CONNECTION
Emission axis
Reception axis
Installing near walls
Measurement errors can be reduced by
installing the Sensor Head with the line
formed by the emission and reception axes
parallel to the wall, and painting the wall with
non-reflective black paint.
Wrong
Measuring in narrow grooves
Wrong
Right
Rotating objects
When measuring rotating workpieces, you can
minimize the influence caused by vibration of
the rotating object and positional shifts by
installing the Sensor Head with the line
formed by the emission and reception axes
parallel to the axis of rotation.
Wrong
Measuring stepped workpieces
Wrong
Right
ZS-HL
User’s Manual
Right
Effect caused by peripheral lights
Do not install the Sensor Head in a place
where strong light hits the laser
emitter/receiver section of the Sensor Head.
Also, if a workpiece has a shiny surface, the
light from the lighting will be reflected and a
malfunction may occur. In such a case,
prevent reflection by, for example, covering
the light to stop reflection.
Wrong
2-4
Right
Color/shiny
surface boundary
Right
Section2
Sensor Head
Connecting the Sensor Head
This connector connects the Sensor Head and controller.
Before connecting/disconnecting the Sensor Head, make sure that the Smart Sensor is turned OFF. The
Sensor Controller may break down if it is connected or disconnected while the power is ON.
L
H
Insure lock
Ferrite core
P
LD ON ZERO ENABLE
Insert the Sensor Head connector into the Sensor Controller until it locks in place.
Ferrite core
Attach the ferrite core (provided with the Sensor Head) to both ends of the Sensor Head cable in
advance.
If the ferrite core comes loose from the cable, fasten the ferrite core in place with the Insure Lock
(supplied).
Section2 INSTALLATION & CONNECTION
 Connecting the Sensor Head
 Disconnecting the Sensor Head
L
P
H
LD ON ZERO ENABLE
Pull out the Sensor Head while pressing in the hooks on both sides of the Sensor Head
connector.
• Do not touch the terminals inside the connector.
• All settings on the Sensor Controller will be cleared if the Sensor Head is replaced with a different
type.
ZS-HL
User’s Manual
2-5
Section2
Sensor Head
 Extension Cable
There are three ways to extend a cable.
LD ON ZERO ENABLE
• Entire length within 12 m
L
P
Extension cable
ZS-XC_A_: 1 m, 4 m, 8 m
ZS-XC_B(R): 5 m, 10 m
H
Extension cable
ZS-XC5B(R): 5 m
ZS-XC10B: 10 m
L
Extension cable
ZS-XC5B(R): 5 m
ZS-XC10B: 10 m
H
Cable for the Sensor Head
: 0.5 m, 2 m
P
LD ON ZERO ENABLE
• Entire length within 22 m (Connect extension cables)
• Extended for a long distance (Use a repeater)
Digital equalizer
ZS-XEQ
L
Extension cable
Cable for the Sensor Head
: 0.5 m, 2 m
P
LD ON ZERO ENABLE
Digital equalizer
ZS-XEQ
H
Section2 INSTALLATION & CONNECTION
Cable for the Sensor Head
: 0.5 m, 2 m
Digital equalizer
connection cable
ZS-XC02D: 0.2 m
ZS-XC15CR: 15 m
ZS-XC25CR: 25 m
Table for connecting Extension Cable
Extension Cable
Model
ZS-XC1A
ZS-XC4A
ZS-XC8A
Sensor Head
Length Flexible
Controller
ZS-HLDS_
ZS-LDC_
ZS-HLDC_
1m




No extended connection
allowed
4m




No extended connection
allowed
8m




No extended connection
allowed
5m




Up to two cables allowed
extended connection.
(Max22m)
10m




Up to two cables allowed
extended connection.
(Max22m)




Up to two cables allowed
extended connection.
(Max22m)
ZS-XC5B
ZS-XC10B
ZS-XC5BR
ZS-XC15CR
ZS-XC25CR
2-6
ZS-HL
User’s Manual
Precautions
ZS-LD_
5m

15m



Needs ZS-XEQ,
ZS-XC02D
25m



ZS-XEQ,
ZS-XC02D
Section2
Sensor Controller
• Only the ZS-XC_B(R) cable allows this extended connected. Note, however, that the connection
with the ZS-XC_A cannot be extended.
• The cable may break at locations where it is made to bend. So, use a robot cable type extension
cable (ZS-XC5BR, ZS-XC_ _CR).
• Only the Sensor head ZS-HLDS--- can connect to ZS-XC--CR, ZS-XC02D and ZS.
The ZS-HLDS2V cannot be connected.
• The Sensor Controller supplies the power of Digital equalizer.
This section describes installation of the Sensor Controller, and connection of the I/O
cable.
Before connecting/disconnecting peripheral devices, make sure that the Sensor Controller is turned
OFF. The Sensor Controller may break down if it is connected or disconnected while the power is ON.
Installation of Sensor Controller
„ Installing on the DIN track
The following describes how to attach the 35 mm wide DIN track very quickly and easily.
Section2 INSTALLATION & CONNECTION
Sensor Controller
LD ON ZERO ENABLE
H
P
L
DIN track (sold separately)
PFP-100N (1 m)
PFP-50N (0.5 m)
PFP-100N2 (1 m)
Ferrite core
End plate (sold separately)
PFP-M
In advance, attach the ferrite core (provided with the Sensor Controller) to the input/output cable of
the Sensor Controller.
ZS-HL
User’s Manual
2-7
Section2
Sensor Controller
 Installation procedure
1.
Hook the connector end of the Sensor
Controller onto the DIN track.
Hook on connector
Section2 INSTALLATION & CONNECTION
2.
Hook on I/O cable
Push the Sensor Controller down onto
the DIN track until the hook on the I/O
cable side is locked.
Push down until you hear it snap into place.
Always hook the connector end of the Sensor Controller on the DIN track first. Hooking the I/
O cable end on the DIN track first may impair the mounting strength of the DIN track attachment.
 Removal procedure
1.
Pull the hook on the I/O cable end of the
Sensor Controller downwards.
2.
Lift up the Sensor Controller from the I/O
cable end, and remove it from the DIN
Hook on I/O cable
track.
 Mounting on a panel
The optional Panel Mount Adapters (ZS-XPM1) can be used to mount the Sensor Controller on a panel.
Panel cutout dimensions p.8-43
1.
Push out the Sensor Controller from the
Panel
rear of the panel towards the front.
H
P
L
2-8
ZS-HL
User’s Manual
LD
ON
ZE
RO
EN
AB
LE
Section2
Sensor Controller
2.
Install the small Mount Adapters on the
four holes of the Sensor Controller.
Panel Mount
Adapter
LD
H
P
ON
ZE
RO
L
EN
AB
LE
3.
Install the long Mount Adapters on the
two holes of the small Mount Adapter.
Panel Mount
Adapter
LD
H
ON
ZE
P
RO
EN
L
AB
LE
Panel Mount
Adapter
4.
Install the Sensor Controller with Panel
Section2 INSTALLATION & CONNECTION
Panel Mount
Adapter
Panel
Mount Adapters attached onto the panel
from the front.
H
Take care not to pinch the I/O cable.
5.
P
L
LD
ON
ZE
RO
EN
AB
LE
Hook the hooks of the mounting fixture
onto the two holes of the smaller Mount
Adapters and tighten the screws.
6.
Mounting
fixture
Make sure that the Sensor Controller is
firmly fixed on the panel.
ZS-HL
User’s Manual
2-9
Section2
Sensor Controller
Wiring the I/O cable
The following shows the leads that comprise the I/O cable.
Brown
Blue
Red
Green
Black
Section2 INSTALLATION & CONNECTION
Pink
Gray
Co-axial (black)
Shielded
Yellow
Light blue
Purple
White
Orange
(Cable length: 2 m)
(1)
(1) Power supply
(2) GND
(3) OUT0
(4) OUT1
(5) OUT2
(6) OUT3
(7) OUT4
(8) Linear output
(9) Linear GND
(10) IN0
(11) IN1
(12) IN2
(13) IN3
(14) Unused
Power supply
This connects the 24 VDC (±10 %) power supply. When using a Sensor Controller
with a PNP output, the power supply terminal is also the common I/O terminal for all I/
O except for the linear output.
Supply power from a DC power supply unit that has a countermeasure (safety ultralow voltage circuit) built-in for preventing high voltages from occurring.
Recommended power supply unit p.1-3
Wire the power supply separately from other devices. Wiring them together or placing
them in the same duct may cause induction, resulting in malfunction or damage.
(2)
GND
The GND terminal is the 0 V power supply terminal. When using a Sensor Controller
with an NPN output, the GND terminal is also the common I/O terminal for all I/O
except for the linear output.
(3)
OUT0 (HIGH output)
This outputs judgment results (HIGH).
(4)
OUT1 (PASS output)
This outputs judgment results (PASS).
(5)
OUT2 (LOW output)
This outputs judgment results (LOW).
(6)
OUT3 (ENABLE output)
This turns ON when the Sensor Controller is ready for measurement. This output is
interlocked with the ENABLE indicator.
2-10
ZS-HL
User’s Manual
Section2
Sensor Controller
(7)
OUT4 (BUSY output)
This turns ON during sampling with the hold function enabled.
It allows you to check whether or not the self-trigger is functioning correctly.
It also turns ON during bank switching.
(8)
Linear output
The linear output outputs a current or voltage in accordance with the measured
(9)
Section2 INSTALLATION & CONNECTION
value.
Linear GND
The linear GND terminal is the 0 V terminal for the linear output.
This ground wire must be grounded separately from the blue(0V) ground wire.
Always ground the linear output terminal even when linear output is not used.
(10)-(13) IN0 to IN3
The following input signal assignments can be selected.
• Signal assignments
Signal
When [NORMAL] is selected
(default)
When [BANK] is selected
IN0
External trigger (timing) input
Bank input A
IN1
Reset input
Bank input B
IN2
LD-OFF input
LD-OFF input
IN3
Zero reset input
Zero reset input
Setting the I/O assignments p.6-17
• Signal functions
Signal name
Description
External trigger (timing) input
This timing input is for signal input from external devices. Use it for hold
function timing.
Reset input
This resets all executing measurements and outputs. While a reset is
being input, judgment output conforms to the non-measurement setting. If this reset input switches ON while the hold function is used, the
state in effect before the hold function was set will be restored.
Status indicators p.8-41
LD-OFF input
If this LD-OFF signal is set to ON, the laser will stop emission, causing
a light amount error. While LD-OFF is being input, judgment output
conforms to the non-measurement setting.
Zero reset input
This is used to execute and clear a zero reset.
Bank input A, B
This is used for switching banks. Specify the bank No. in combinations
of A and B. However, if the bank mode is set to [THRESH], the bank
cannot be switched at the external signal input because the number of
banks increases to 32.
External I/O timing chart p.6-18
ZS-HL
User’s Manual
2-11
Section2
Sensor Controller
I/O Circuit Diagrams
 NPN type (ZS-HLDC11)
Brown DC24 V
OUT0
Green OUT1
Load
Load
Black OUT2
Pink
OUT3
Gray
OUT4
Load
Load
DC24 V
Blue GND (0 V)
Internal circuits
Section2 INSTALLATION & CONNECTION
Load
Red
Yellow
IN0
Light blue IN1
Purple
IN2
White
IN3
Orange
Current output
4 to 20 mA
Current voltage/
output selector switch
40 Ω
Co-axial (black) Linear output
Voltage output
10 V
Load
Shielded
2-12
ZS-HL
User’s Manual
Linear GND
Current output: 300 Ω or less
Voltage output: 10 kΩ or more
Section2
Sensor Controller
 PNP type (ZS-HLDC41)
Brown DC24 V
Red
OUT0
Green OUT1
Load
Section2 INSTALLATION & CONNECTION
Black OUT2
Load
Pink
OUT3
Gray
OUT4
Load
DC
24 V
Load
Load
Blue GND (0 V)
Internal circuits
Yellow
IN0
Light blue IN1
Purple
IN2
White
IN3
Orange
Current output
4 to 20 mA
Current voltage/
output selector switch
40 Ω
Co-axial (black) Linear output
Voltage output
10 V
Load
Shielded
Current output: 300 Ω or less
Voltage output: 10 kΩ or more
Linear GND
ZS-HL
User’s Manual
2-13
Section2
SmartMonitor ZS
SmartMonitor ZS
ZS-HL is provided with the SmartMonitor ZS software utility. This utility allows you to set up
sensing functions and monitor the waveforms of measurement results on a personal computer.
Section2 INSTALLATION & CONNECTION
SmartMonitor ZS
(accessory for ZS-HLDC_1A)
USB cable
 Monitoring the measurement state
Checks the measured value of the gang-mounted
controller in the list.
Displays the change of the time series for the measured value in a graph.
 Setting support for functions
Sets the sensing conditions in detail while checking
the receiving status of the Sensor Head (sensitivity).
Displays and sets the settings for the controller
in the list.
Receiving
status
Line bright
If you use SmartMonitor ZS Professional, which is sold separately, you can also do the following:
• Display multiple CH waveforms using multiple controllers.
• Perform logging for the measured value.
Operating Environment
The following describes the operating environment for SmartMonitor ZS. Please check them.
Item
Condition
OS
Windows7 (32 bit / 64 bit)
Windows XP (At least Service Pack 3, 32 bit)
CPU
Intel Pentium Ⅲ at least 1GHz(recommend 2GHz or more)
Memory
At least 1GB
Display
At least 1024 × 768 dots, at least 1.6 million Color
• Windows is a trademark or registered trademark of Microsoft Corporation.
2-14
ZS-HL
User’s Manual
Section2
SmartMonitor ZS
• Other item names or system names are the trademarks or registered marks of other
companies.
Installation/Uninstallation Method
The following describes the preparations for using SmartMonitor ZS.
• Before you install SmartMonitor ZS, quit all other programs that are running. If virus detection software is enabled, installation may take time to complete.
• Log on as an Administrator or a user with system access rights.
• Install SmartMonitor ZS before installing the USB driver.
1.
Turn your PC ON and startup up Windows.
2.
Insert your “SmartMonitor ZS” CD-ROM into the CD-DOM drive on your personal computer.
3.
Auto-run automatically displays the installation screen. Follow the onscreen instructions to install SmartMonitor ZS.
Section2 INSTALLATION & CONNECTION
 Installing SmartMonitor ZS
 Uninstalling SmartMonitor ZS
• Before you uninstall SmartMonitor ZS, quit all other programs that are running. If virus detection
software is enabled, uninstallation may take time to complete.
• Log on as an Administrator or a user with system access rights.
1.
Turn your PC ON and startup up Windows.
2.
Select [Settings]-[Control Panel] from the [Start] menu in the personal computer.
3.
Double-click [Add/Remove Programs].
4.
Select [SmartMonitorZS] from the list and click the [Remove] button.
5.
Click the [Yes] button.
ZS-HL
User’s Manual
2-15
Section2
SmartMonitor ZS
 Installing the USB driver
The USB driver must be installed on the personal computer to establish a connection
between the personal computer and the Sensor Controller by the USB interface.
• The exclusive USB driver must be installed only when the Sensor Controller is connected to the
personal computer for the first time. From the second startup onwards, the USB driver is automatically recognized and does not need to be re-installed.
Section2 INSTALLATION & CONNECTION
• To install the USB driver, log on as an Administrator or a user with system access rights.
• Install SmartMonitor ZS before installing the USB driver.
• The error message “Failed to pass the Windows logo test” is sometimes displayed at USBinstallation. Press the [Continue] button to continue with the installation.
1.
Turn your PC ON and startup up Windows.
2.
Connect the Sensor Controller to the
personal computer by the USB cable.
Attach the ferrite core (provided with the Sensor Controller) to the USB cable (provided with
the Sensor Controller).
Ferrite core
“Detected new hardware” will be displayed on the Windows tool bar,
and the [New Hardware Detection Wizard] dialog box will appear.
2-16
ZS-HL
User’s Manual
Section2
SmartMonitor ZS
3.
Click the [Next>] button.
4.
Select the [Search for a suitable driver for my disk (recommended)] radio
button, and click the [Next>] button.
Section2 INSTALLATION & CONNECTION
5.
Mark the [CD-ROM drives] checkbox, and click the [Next>] button.
• When the Sensor Controller is not detected automatically
Click the [Browse] button and select [USB] folder on the CD-ROM.
• To install on a personal computer not equipped with a CD-ROM drive
Select [Specify directory], and specify the [Program Files]-[OMRON]-[SmartMonitorZS][usb] folder.
ZS-HL
User’s Manual
2-17
Section2
SmartMonitor ZS
6.
Make sure that the optimum driver has been detected, and click the [Next>]
button.
Installation begins.
Section2 INSTALLATION & CONNECTION
When installation ends, the completion message is displayed.
7.
Click the [Finish] button.
The same screen in step 2 is displayed. Repeat the above procedure.
This completes installation of the USB driver.
2-18
ZS-HL
User’s Manual
Section2
SmartMonitor ZS
Starting and Exiting SmartMonitor ZS
 Start-up of SmartMonitor ZS
After installation is completed, start up SmartMonitor ZS by the following procedure.
1.
Make sure that the Sensor Controller is connected to the personal com-
2.
Turn the Sensor Controller ON and set it to the RUN mode.
3.
Select [Programs]-[OMRON]-[SmartMonitorZS] from the Windows [Start]
menu.
 When the connection between the personal computer and
Sensor Controller cannot be established
Check the COM port No. assigned on the personal computer in Device Manager.
1.
Right-click [My Computer] on the Windows desktop and click [Properties].
2.
Click [Device Manager(D)] on the [Hardware] tab.
3.
Open [Port (COM/LPT)], and check which number COM in [OMRON Smart
Section2 INSTALLATION & CONNECTION
puter.
Sensor USB COM] is set to.
4.
Set this COM port No. to the [Communication Settings] screen on SmartMonitor ZS.
If “OMRON Smart Sensor USB COM” is not recognized in Device Manager, re-install the USB driver
and reboot the personal computer.
 Exiting SmartMonitor ZS
Exit SmartMonitor ZS by the following procedure.
1.
Select [File]-[Close] in the SmartMonitor ZS menu bar.
ZS-HL
User’s Manual
2-19
Section2
SmartMonitor ZS
MEMO
Section2 INSTALLATION & CONNECTION
2-20
ZS-HL
User’s Manual
Section3
APPLICATION and SETTING EXAMPLES
3-2
Measuring the Thickness of Transparent Objects
3-4
Measuring the Vertex 2 (peak) in the Line Beam
3-6
Measuring Multiple Items Simultaneously (Multi-Task)
3-8
ZS-HL
User’s Manual
Section3 APPLICATION and SETTING EXAMPLES
Measuring Height (basic)
3-1
Section3
Measuring Height (basic)
Measuring Height (basic)
This section describes the basic setting procedures for measuring height.
Name of the Controller and Key Code
Sensor head
LD ON ZERO ENABLE
Main display
Sub-display
H
P
L
1
2
3
4
Section3 APPLICATION and SETTING EXAMPLES
H
L
FUN
MENU
RUN
TEACH
ESC
SET
height
Setting for sensing conditions
1.
Set the mode switch to FUN.
FUN
2.
Select
measurement
mode
in
[SENSING]-[MODE].
RUN
TEACH
1 STAND
3 H-SPEED
2 HI-RESO
[HI-RESO]: Usually select this menu. A stable measurement can be performed
while the effect of the front side of the workpiece is minimized.
[HI-SENS]: In addition to the effect of [HI-RESO], a measurement is stable even
when the received light amount is insufficient. (black rubber, PCB, etc.)
3.
Select the mounting status of the
Head in [SENSING]-[SETTING].
4.
Select the material of the workpiece in [SENSING]-[OBJECT].
1 DIFFUSE
2 REGULAR
1 NORMAL
3 MIRROR
2 PCB
[NORMAL]: Usually select this menu.
[PCB]
: When a laser beam passes through an object like PCB and there is a
diffused reflection effect.
[MIRROR] : For a mirror
[GLASS] : For glass
3-2
ZS-HL
User’s Manual
Section3
Measuring Height (basic)
Saving the Settings
5.
Set the mode switch to RUN.
FUN
6.
Select [Yes] and save the settings.
RUN
TEACH
Is change saved?
1 YES
2 NO
7.
Section3 APPLICATION and SETTING EXAMPLES
Measurement
Check the measured value.
Measurement center = 0
(-)
(+)
Measured
value
ZS-HL
User’s Manual
3-3
Section3
Measuring the Thickness of Transparent Objects
Measuring the Thickness of Transparent Objects
If you already know the glass thickness, you can adjust the scaling with reference to the
thickness, and easily measure the thickness of a transparent object.
[Points for installation]
Sensor Head
• For regular reflection heads (such as ZS-HLDS2T and ZS-LD20T)
Section3 APPLICATION and SETTING EXAMPLES
By fixing the Sensor Head to a position such that it is kept in
parallel with the front side of the workpiece, you can perform
high-precision measurement. When you install the Sensor Head,
we recommend that you match the front side of the workpiece
with the reference surface of the Sensor Head, and then bring
up the Sensor Head horizontally and install it.
Front side
Backside
Raw glass
Thickness
• For diffuse reflection heads
Adjust the position of the Sensor Head while checking the
display of the emitted light amount and received light amount.
Adjust the position of the Sensor Head such that the emitted
light amount becomes the minimum compared to 1,000 for the
received light amount.
LD POWER:
SUB
Received light amount
Emitted light amount
Switching the Display of the Measured Value p.4-2
Setting for sensing conditions
1.
Set the mode switch to FUN.
FUN
2.
Select [REGULAR] in [SENSING][SETTING].
3.
Select [THICK]-[MODE1] in [SENSING]-[OBJECT].
3-4
1.0%
: BRIGHT
ZS-HL
User’s Manual
RUN
TEACH
1 DIFFUSE
2 REGULAR
1 GLASS
2 THICK
Section3
Measuring the Thickness of Transparent Objects
Setting Scaling
4.
Set the actual workpiece within
the measuring range.
Measuring distance
5.
Measuring range
Select [OUTPUT]-[SCALING]-[ON]-
1 AUTO
[AUTO].
2 MANUAL
6.
Enter the actual size of
the glass thickness.
Value
Digit
INPUT THICKNESS
DIG
VAL SET:OK
Saving the Settings
7.
Set the mode switch to RUN.
FUN
8.
Select [Yes] and save the settings.
RUN
TEACH
Section3 APPLICATION and SETTING EXAMPLES
When you want to execute [SCALING FOR GLASS THICKNESS], set the workpiece within
the measuring range. In the status in which a measurement cannot be performed, you cannot
set the scaling (automatic).
Is change saved?
1 YES
2 NO
Measurement
9.
Check the measured value.
Measured
value
When a measurement is not stable
Select [THICK]-[MODE2] at the step 3. When you select [MODE2], the mode is switched to 2-area measurement mode that executes an adjustment for suitable received light amount for the front side and
back side of the glass respectively. When you use SmartMonitor ZS, you can adjust the area while
checking the received light amount.
Setting Measurement Object p.5-9
ZS-HL
User’s Manual
3-5
Section3
Measuring the Vertex 2 (peak) in the Line Beam
Measuring the Vertex 2 (peak) in the Line Beam
The following describes the setting procedure for measuring a small vertex.
Line beam
Peak
Section3 APPLICATION and SETTING EXAMPLES
1.
Set the mode switch to FUN.
FUN
2.
Select [ON] in [SYSTEM]-[MULTITASK].
The
confirmation
message
RUN
TEACH
1 OFF
2 ON
1 SENSING
3 FILTER
2 MEASURE
1 TASK1
3 TASK3
2 TASK2
4 TASK4
1 OFF
3 PEAK
2 AVERAGE
is
displayed. Select [OK].
Setting peak (TASK1)
3.
Press the MENU key to display the
TOP menu.
4.
Press the ESC key to display the
TASK switching menu, and select
[TASK1].
5.
Select
[PEAK]
[TASKSET].
3-6
ZS-HL
User’s Manual
in
[MEASURE]-
Section3
Measuring the Vertex 2 (peak) in the Line Beam
Saving the Settings
6.
Set the mode switch to RUN.
FUN
7.
Select [Yes] and save the settings.
RUN
TEACH
Is change saved?
1 YES
2 NO
8.
Check the measured value.
Measured
value
You can measure the bottom or step using the same procedure. Select [BOTTOM] or [STEP] at step 5.
Bottom
Step
ZS-HL
User’s Manual
Section3 APPLICATION and SETTING EXAMPLES
Measurement
3-7
Section3
Measuring Multiple Items Simultaneously (Multi-Task)
Measuring Multiple Items Simultaneously (Multi-Task)
If you use the multi-task function, you can measure the height and surface fluctuation
simultaneously. The following describes the procedure for setting “height” for TASK1 and
“surface fluctuation” for TASK2.
Surface fluctuation (TASK2)
Section3 APPLICATION and SETTING EXAMPLES
Height (TASK1)
1.
Set the mode switch to FUN.
FUN
2.
Select [ON] in [SYSTEM]-[MULTITASK].
The
confirmation
message
RUN
TEACH
1 OFF
2 ON
1 SENSING
3 FILTER
2 MEASURE
1 TASK1
3 TASK3
2 TASK2
4 TASK4
1 OFF
3 PEAK
2 AVERAGE
is
displayed. Select [OK].
Setting height (TASK1)
3.
Press the MENU key to display the
TOP menu.
4.
Press the ESC key to display the
TASK switching menu, and select
[TASK1].
5.
Select [AVERAGE] in [MEASURE][TASKSET].
3-8
ZS-HL
User’s Manual
Section3
Measuring Multiple Items Simultaneously (Multi-Task)
6.
Select [AVERAGE] in [OUTPUT]-
1P–P
3 SAMPLE
[HOLD]-[TYPE].
7.
Set the mode switch to TEACH.
FUN
8.
RUN
TEACH
Select [Yes] and save the settings.
Is change saved?
1 YES
2 NO
Set the threshold value.
H
Section3 APPLICATION and SETTING EXAMPLES
9.
2 AVERAGE
L
Value
Digit
Setting surface fluctuation (TASK2)
10.
Set the mode switch to FUN.
FUN
11.
12.
13.
14.
Select [Yes] and save the settings.
RUN
TEACH
Is change saved?
1 YES
2 NO
1 TASK1
3 TASK3
2 TASK2
4 TASK4
1 OFF
3 PEAK
2 AVERAGE
1P–P
3 SAMPLE
2 AVERAGE
Press the ESC key to display the
TASK switching menu, and select
[TASK2].
Select [AVERAGE] in [MEASURE][TASKSET].
Select [P-P] in [OUTPUT]-[HOLD][TYPE].
ZS-HL
User’s Manual
3-9
Section3
Measuring Multiple Items Simultaneously (Multi-Task)
15.
Set the threshold value using the
same steps from 7 to 9.
Measurement
16.
Set the mode switch to RUN.
FUN
Section3 APPLICATION and SETTING EXAMPLES
17.
Select [Yes] and save the settings.
RUN
TEACH
Is change saved?
1 YES
18.
Measure the workpiece
pressing the UP key.
while
2 NO
T r i g g e r ON
SUB:THRESH
Sampling is performed while the UP
key is being pressed.
19.
Check the measured value.
You can check the measured value
Measured
value
for each TASK by switching the
display.
Switching the Display of the Measured Value p.4-2
When a measurement is performed using the actual line, the Sensor Controller can start the measurement by external input or self-trigger.
p.5-19
3-10
ZS-HL
User’s Manual
Section4
FUNCTIONS
AND
OPERATIONS
USED DURING OPERATION
4-2
List of Key Operations in RUN Mode
4-4
Zero Reset Operation
4-5
Threshold Setting
4-7
Bank Switching (change of device setup)
4-10
ZS-HL
User’s Manual
Section4 FUNCTIONS AND OPERATIONS USED DURING OPERATION
Switching the Display of the Measured Value
4-1
Section4
Switching the Display of the Measured Value
Switching the Display of the Measured Value
In RUN mode, You can switch the display for main/sub-display during the operation. You
can check the threshold value and resolution while displaying the measured value
according to the application.
LD ON ZERO ENABLE
Main Display
H
P
Sub-display
L
LCD screen
TEACH
FUN
RUN
ESC
1
2
3
4
H
TEACH
RUN
FUN
SET
Control keys
Section4 FUNCTIONS AND OPERATIONS USED DURING OPERATION
In this mode, measured values are displayed on the main display, and threshold values
and other information are displayed on the sub-display.
MAIN: MEASURE
MAIN: MEASURE
SUB: THRESH
SUB: VORTAGE
When [TERMINAL BLOCK]-[OUTPUT] is set (*3)
• When [JUDGE] is set
• When [MEASUREMENT] is set
MAIN: MEASURE
MAIN: MEASURE
JUDGE
SUB: TERMINAL
1 P 2 E 3 E 4 H (*4)
TK1
For Multi-Task mode (*2)
MAIN: MEASURE
SUB: TASK4 MEASURE
4-2
L
MENU
TK1
MAIN: MEASURE
TK1
SUB: TASK3 MEASURE
*1)
TKx on the LCD screen indicates that the measured value of the current TASKx is displayed in
the main display. Switch TASK that is displayed in the main display by using the function keys.
*2)
It is displayed only in Multi-Task mode. Up to two measured values for tasks can be displayed
in parallel in the main display and sub-display.
ZS-HL
User’s Manual
Section4
Switching the Display of the Measured Value
Details displayed on the sub-display
Display Details
Description
THRESH
Displays the HIGH/LOW threshold values according to the setting of the threshold switch.
VOLTAGE (CURRENT)
Displays the voltage (current) to be linearized. The display details change according to the setting of the current/voltage switch. (Values displayed here are reference values only. These values differ from actual linear output values.)
RESOLU
Displays the fluctuation width (peak to peak) of the measured value over a fixed
amount of time.
BRIGHT
Displays the current received light amount. The current emitted light amount also
is displayed on the LCD upper section. When you attach the Sensor Head, adjust
the position of the Sensor Head so that the emitted light amount is as small as
possible compared to the received light amount (1000).
Inside of the Sensor Controller, the emitted light amount is automatically adjusted
in the range from 0.1 % to 80 % so that the received light amount reaches 1000.
Even if the emitted light amount reaches the maximum 80 %, but the received light
amount is not close to 1000, change the settings to switch the measurement mode
to HI-SENS or to increase the gain to increase the received light amount.
Displays the distance from the Sensor Head to the workpiece.
TASK_ MEASURE
In Multi-Task mode, this menu displays the measurement result for another TASK.
TERMINAL
Displays the value that is output to ZG-RPD.
JUDGMENT RESULT
MAIN: MEASURE
LD POWER:
SUB: RESOLU
SUB: BRIGHT
1.0%
MAIN: MEASURE
TK1 (*1)
SUB: DISTANCE
MAIN: MEASURE
SUB: TASK2 MEASURE
TK1
MAIN: MEASURE
Section4 FUNCTIONS AND OPERATIONS USED DURING OPERATION
DISTANCE
TK1
SUB: TASK1 MEASURE
*3)
The display details vary according to the option for OUTPUT of TERMINAL BLOCK. It is not
displayed when you select [NONE] in [TERMINAL BLOCK]-[OUTPUT].
*4)
JUDGEMENT RESULT is displayed for each TASK (P: PASS, E: ERROR, H: HIGH, L: LOW). In the
screen examples shown above, TASK1 is PASS, TASK2 and TASK3 are ERROR, and TASK4 is HIGH.
ZS-HL
User’s Manual
4-3
Section4
List of Key Operations in RUN Mode
List of Key Operations in RUN Mode
Key
Section4 FUNCTIONS AND OPERATIONS USED DURING OPERATION
4-4
Role
Function keys
In Multi-Task mode, this key switches the task. The key numbers from 1
to 4 correspond to the task numbers.
← LEFT key
→ RIGHT key
Changes sub-display content.
↑UP key
↓ DOWN key
↑UP key
: Executes trigger input.
↓ DOWN key: Executes reset input.
MENU key
Displays the display customize menu.
SET key
Executes a zero reset.
ESC key
Hold down for at least two seconds to cancel a zero reset.
ZS-HL
User’s Manual
Section4
Zero Reset Operation
Zero Reset Operation
When the zero reset function is used, the reference value “0” is registered as the height
and the measured value can be displayed and output as a positive or negative deviation
(tolerance) from the reference value. In RUN mode, the measured value can be reset to 0
at any timing during measurement.
Example 1: Using the height of sensing object registered as the reference value and the
tolerance output as the measured value
Sensor Head
0
(reference value)
Sensing
object
+2 (HIGH threshold value)
Example 2: Using the height of sensing object as the measured value with an offset set to 10
Sensor Head
+8 (LOW threshold value)
10
Sensing
object
+12(HIGH threshold value)
Example 3: Using zero reset to measure steps in sensing object (zero reset at each
measurement)
Sensor Head
This step
is measured.
Zero reset
executed
Zero reset
executed
Section4 FUNCTIONS AND OPERATIONS USED DURING OPERATION
-2 (LOW threshold value)
Zero reset
executed
Direction of movement
ZS-HL
User’s Manual
4-5
Section4
Zero Reset Operation
 Executing/Canceling Zero Reset
When the zero reset function is used, the measured value can be reset to a reference
value of 0 when the ENT key is pressed or an external signal is input.
Executing Zero Reset
1.
Place the reference sensing object in position.
Section4 FUNCTIONS AND OPERATIONS USED DURING OPERATION
4-6
2.
Press the SET key.
Zero Reset indicator
The zero rest indicator illuminates and the
current measured value is registered as 0
(zero).
LD ON ZERO ENABLE
H
P
L
Executing/Canceling by External Signal Input p.6-23
When a zero reset is executed, the linear output becomes the voltage (or current) value at the center of the two preset points. Linear output becomes roughly 0 V (12 mA) when focus is not set.
Canceling Zero Reset
1.
Press and hold the ESC key for 2seconds or
longer.
Setting the Zero Reset Function p.5-22
ZS-HL
User’s Manual
Section4
Threshold Setting
Threshold Setting
Switch to the TEACH mode and set the range in order for the measured value to be
judged as PASS.
Both HIGH and LOW threshold values are set. There are three judgment outputs: HIGH,
PASS and LOW.
HIGH threshold value
Measured value
LOW threshold value
ON
OFF
PASS
ON
OFF
LOW
ON
OFF
(ON when Measurement result
> HIGH threshold value)
(ON when LOW threshold value
≤ Measurement result
≤ HIGH threshold value)
(ON when Measurement result
< LOW threshold value)
There are two ways of setting the threshold value.
Method
Details
TEACHING
(MENU key)
Performs measurement and uses the measurement results to set threshold values.
Position teaching is useful when threshold samples, i.e., with the upper and lower limits, can be obtained beforehand.
DIRECT IN
(L/R/UP/DOWN keys)
The threshold values can be set by directly inputting numerical values. Direct input is
useful when you know the dimensions for an OK judgment or when you want to finetune threshold values after teaching.
• Hysteresis (hysteresis width) can also be set to threshold values. Set hysteresis when judgments are
unstable to prevent chattering.
Setting Judgment Output (HYS) p.6-7
• When setting threshold values while still connected to an external device, set the Sensor Controller’s
LD-OFF input to ON so that the output to the external device remains unchanged. Judgment outputs in
TEACH mode are the same as in RUN mode, i.e., HIGH, PASS, and LOW.
• In Multi-Task mode, you can select the task to be displayed. The function keys correspond to the tasks;
Press the function key for the number of the task to be displayed.
(The currently selected task is displayed as “TKX” on the LCD display.)
TEACHMODE
MENU: TEACHING
Section4 FUNCTIONS AND OPERATIONS USED DURING OPERATION
Output
HIGH
TK1
TASK No.
ZS-HL
User’s Manual
4-7
Section4
Threshold Setting
 TEACHING
Performs measurement and uses the measurement results to set threshold values.
Teaching is useful when threshold samples, i.e., with the upper and lower limits, can be
obtained beforehand.
Sensor Head
Sensor Head
Teaching point
= HIGH threshold value
Threshold sample (upper limit)
Teaching point
= LOW threshold value
Threshold sample (lower limit)
Section4 FUNCTIONS AND OPERATIONS USED DURING OPERATION
Hold, trigger, and scaling settings that have been made before teaching are reflected in
the teaching measurements.
The following describes the operation method using the procedure for setting the HIGH
threshold value as an example.
1.
Set the mode switch to TEACH.
ESC
1
2
3
4
H
2.
L
MENU
TEACH
RUN
FUN
TEACH
FUN
RUN
SET
Switch the threshold switch to “H” to
set the HIGH threshold value.
ESC
1
2
3
4
H
3.
Set the workpiece.
4.
Press the MENU key to apply the set-
L
MENU
TEACH
RUN
FUN
H
SET
ting.
The applied threshold value will be
displayed on the sub-display.
TEACHMODE
MENU: TEACHING
4-8
ZS-HL
User’s Manual
L
Section4
Threshold Setting
 DIRECT IN
The threshold values can be set by directly inputting numerical values. Direct input is
useful when you know the dimensions for an OK judgment or when you want to finetune threshold values after teaching.
The following describes the operation method using, as an example, the procedure for
setting the HIGH threshold value by directly entering it.
1.
Set the mode switch to TEACH.
ESC
1
2
3
H
4
L
TEACH
RUN
FUN
SET
Switch the threshold switch to “H” to
set the HIGH threshold value.
ESC
1
2
3
4
H
3.
TEACH
FUN
RUN
L
MENU
TEACH
RUN
FUN
H
Section4 FUNCTIONS AND OPERATIONS USED DURING OPERATION
2.
MENU
L
SET
Enter the setting value you want to
change.
The
current
measured
value
is
displayed on the main display, and
the offset value is displayed on the
sub-display.
← → : Change the digit,
TEACHMODE
: DIRECT IN
↑ ↓ : Change the value
4.
Press the SET key to apply the setting.
If you want to cancel the threshold value
that is being changed, press the ESC
key.
TEACHMODE
: DIRECT IN
ZS-HL
User’s Manual
4-9
Section4
Bank Switching (change of device setup)
Bank Switching (change of device setup)
ZS-HL can hold up to four sets of settings, which are called a bank. When the device setup
is changed, you can switch the bank externally.
• What is bank?
The settings for measurement
SENSING
FILTER
OUTPUT
I/O SET
are held as one bank.
Threshold value
SENSING
FILTER
OUTPUT
I/O SET
Threshold value
BANK
Section4 FUNCTIONS AND OPERATIONS USED DURING OPERATION
• Example of bank switching for settings
If you register settings of various classes,
Register the different settings
for changing the device setup.
Measuring operation
with the contents set in
BANK2
Setting for product class A
SENSING
FILTER
OUTPUT
I/O SET
Setting for product class B
Threshold value
In Multi-Task
mode
SENSING
TASK1
FILTER
TASKSET
OUTPUT
FILTER
OUTPUT
I/O SET
Switch
to BANK2.
BANK1
BANK2
BANK3
BANK4
Measuring operation
with the contents set
in BANK1
SENSING
Threshold value
BANK2
BANK3
BANK4
It is easy to change the device setup.
TASK4
FILTER
TASKSET
OUTPUT
Threshold value
Threshold value
TASK1 to TASK4 are
specified in the settings
for each bank.
I/O SET
BANK1
If only the “threshold value” is different in the settings for a bank, by changing the mode of the bank, you
can increase the number of banks from 4 to 32.
Selecting the bank mode p.5-28
4-10
ZS-HL
User’s Manual
Section4
Bank Switching (change of device setup)
 Bank Switching by Key Operations
 FUN Mode-[BANK]-[CHANGE]
1.
Select the bank number.
The current bank number is displayed on the
main display.
1 BANK1
3 BANK3
2 BANK2
4 BANK4
- Changing the Assignment of Input Signals p.6-17
- Wiring p.2-10
• You can also switch the bank by entering the CompoWay/F or non-procedural command from SmartMonitor ZS.
• If the bank mode is set to [JUDGMENT VALUE], the bank cannot be switched at the external signal
input because the number of banks increases to 32.
ZS-HL
User’s Manual
Section4 FUNCTIONS AND OPERATIONS USED DURING OPERATION
 Bank Switching by External Signal Input
You need to change the function assignment for input signals.
4-11
Section4
Bank Switching (change of device setup)
MEMO
Section4 FUNCTIONS AND OPERATIONS USED DURING OPERATION
4-12
ZS-HL
User’s Manual
Section5
SETTINGS FOR FUNCTIONS
Basic Operations of Sensor Controller
5-2
Using the Multi-Task Function
5-4
Setting for Sensing Conditions
5-6
5-12
Setting Output Processing of Sensing Information
5-14
Setting for Measurement of Characteristic Points
5-24
Setting Display Method
5-25
Setting the System Environment
5-27
Changing the Way of Obtaining Banks
5-28
Saving the Settings Data
5-29
Clearing the Settings
5-29
ZS-HL
User’s Manual
Section5 SETTINGS FOR FUNCTIONS
Setting the Filter Function
5-1
Section5
Basic Operations of Sensor Controller
Basic Operations of Sensor Controller
Displays and Key Operations
The settings are mainly specified in FUN mode. The LCD screen displays the setup
menus in FUN mode. The No. at the top of each menu corresponds to a function key.
“← → ” displayed at the top right of the LCD screen indicates that the setup menu is made
up of two or more pages. Scroll pages by the LEFT or RIGHT key.
Alphabet characters that appear on the
digital displays
LD ON ZERO ENABLE
Main Display
H
P
Sub-display
L
A
B
C
D
E
F
G
H
I
J
K
L
M
N
O
P
Q
R
S
T
U
V
W
X
Y
Z
LCD screen
ESC
1
2
3
H
Section5 SETTINGS FOR FUNCTIONS
5-2
MENU
Control keys
4
L
TEACH
RUN
FUN
SET
Top menu in FUN mode
The currently selected bank No. will be displayed on
the main display.
The currently selected task No. will be displayed on
the sub-display.
1 SENSING
3 OUTPUT
2 FILTER
Pressing the MENU key in FUN mode returns to the
display.
Key Operations
Key
Role
Function keys
Directly sets the No. preceding the items displayed on the LCD screen.
← LEFT key
→ RIGHT key
The function changes depending on the settings.
- Scrolls pages in list menus.
- Selects the digit of numerical values.
↑ UP key
↓ DOWN key
Changes numerical values during input.
MENU key
Displays the top menu.
SET key
Applies the item you are setting up.
ESC key
Returns to the previous menu.
ZS-HL
User’s Manual
Section5
Basic Operations of Sensor Controller
The following example describes basic operations for changing the measurement mode to
[HI-RESO].
1.
Press function key 1 representing
[SENSING].
2.
Press function key 1 representing
[MODE].
The currently selected No. is displayed
flashing.
3.
1 SENSING
3 OUTPUT
2 FILTER
1 MODE
3 GAIN
2 SETTING
1 STAND
3 H-SPEED
2 HI-RESO
MODE
Complete!
:HI-RESO
Press function key 2 representing
The “Complete!” message is displayed.
4.
Press the MENU key to return to the
top menu.
Pressing the ESC key returns to the
previous menu.
ZS-HL
User’s Manual
Section5 SETTINGS FOR FUNCTIONS
[HI-RESO].
5-3
Section5
Using the Multi-Task Function
Using the Multi-Task Function
In the ZS-HLDC Series, you can set multiple measurement processing for one sensing
condition. This measurement processing is called a “task.”
• Application example: Measure the height and surface fluctuation simultaneously.
Surface fluctuation (TASK2)
Height (TASK1)
Measuring Multiple Items Simultaneously p.3-8
 “Single-Task Mode” and “Multi-Task Mode”
[Single-Task]
OUTPUT
JUDGE
Zero reset
HOLD
FILTER
SCALING
Data flow
SENSING
Section5 SETTINGS FOR FUNCTIONS
You can use the two modes appropriately according to the measurement details; for
standard measurement, you can use “Single-Task mode” that can be set easily, and
when you need detailed settings, for example when you measure and judge multiple
characteristic points simultaneously, you can use “Multi-Task mode”. In “Multi-Task
mode”, four tasks are provided. You can measure and judge multiple characteristic
points simultaneously because you can measure the desired characteristic point such
as peak, bottom, and average for each task.
[Multi-Task]
5-4
ZS-HL
User’s Manual
*OUTPUT
JUDGE
Zero reset
HOLD
SCALING
FILTER
MEASUREMENT POINT
*OUTPUT
JUDGE
Zero reset
HOLD
SCALING
FILTER
Data flow of TASK4
MEASUREMENT POINT
SENSING
Data flow of TASK1
* Output
• Linear output
Select one TASK that you want to output.
• Judgment output
- Select one TASK that you want to output.
- When ZG-RPD is connected, you can
output a judgment for four TASKs.
• Terminal block output
If you connect ZG-RPD, you can
output data for up to four TASKs.
• Digital output (USB/RS-232C)
Continuously outputs four TASKs.
It is used to display a
graph screen or do
logging with SmartMonitor
ZS or external devices.
Section5
Using the Multi-Task Function
Switching to Multi-Task Mode
Select “Single-Task mode” when you perform one measurement processing for one
sensing, and select “Multi-Task mode” when you measure and judge multiple
characteristic points simultaneously.
 FUN Mode-[SYSTEM]-[MULTI-TASK]
Setting
Description
OFF
Single-Task mode is selected. (default value)
ON
Multi-Task mode is selected.
Differences in the menu tree according to the mode p.16
Selecting Tasks
When you set [MULTI-TASK] to ON, select the task number and then specify the various
settings. The following describes the method of selecting the task number.
1.
Press the MENU key to display the
TOP menu.
2.
1 SENSING
3 FILTER
2 MEASURE
Press the ESC key.
The TASK selection menu will be
displayed.
3.
Select the task number.
The currently selected task is displayed
on the sub-display.
1 TASK1
3 TASK3
2 TASK2
4 TASK4
ZS-HL
User’s Manual
Section5 SETTINGS FOR FUNCTIONS
 FUN Mode
5-5
Section5
Setting for Sensing Conditions
Setting for Sensing Conditions
Set the conditions to be used for detecting workpieces by the sensor.
Setting Measurement Mode
 Setting the Measurement Mode
Set the measurement mode according to the measurement details (such as moving
speed and measurement point of workpiece).
Select the measurement mode based on the items (e.g. speed, precision, or sensitivity)
that you want to give priority to in measurement.
 FUN Mode-[SENSING]-[MODE]
Setting
Description
Section5 SETTINGS FOR FUNCTIONS
STAND
This is the standard measurement mode.
(sampling frequency: approx. 500 µs)
HI-RESO
Select this mode to measure workpieces with sensitivity set high. (default
value)
(sampling frequency: approx. 2 ms)
HI-SPEED
Select this mode to measure workpieces at high speed.
However, you cannot select this menu in Multi-Task mode.
(sampling frequency: the fastest speed of approx. 110 µs)
HI-SENS
Select this mode to measure workpieces with sensitivity set high. In this
measurement mode, sensitivity to received light is much better than the
High-Resolution mode as the sampling time is longer.
(sampling frequency: approx. 4 ms)
• In High-Speed mode, the sampling cycle changes according the actual settings. (When only the
average count is set, the sampling cycle becomes the maximum speed (approx. 110 µs).)
Check the actual sampling cycle at [INFO]-[CYCLE] from the top menu.
• In High-Speed mode, the smooth function is changed to OFF. In modes other than High-Speed
mode, the smooth function is changed to ON.
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User’s Manual
Section5
Setting for Sensing Conditions
 Setting Custom Mode
If you cannot perform measurement in the provided measurement modes, use Custom
mode.
You can change additional lines and exposure time, so that a measurement can be performed under conditions suitable for the surface status of the workpiece.
Set in the order of [LINE] → [EXPOSE] → [SKIP].
If you set an additional line, its exposure time is automatically determined. If the light amount is still
insufficient, set the exposure time. When [SKIP] is set to ON in this state, the effective line width is
doubled.
 FUN Mode-[SENSING]-[MODE]
Setting
Description
CUSTOM LINE
Set this item to make it mode difficult (increase the number of additional lines)
(number of
for measurement to be influenced by the state of the workpiece surface, or to
additional lines) measure at a single pinpoint on the workpiece (reduce the number of additional lines).
Range: 1 to 200
(The maximum number of lines changes according to the exposure time setting.)
EXPOSE
Set this item when exposure is insufficient and the exposure time must be
(exposure time) lengthened to increase the amount of received light.
- For Single-Task mode
Range: 0.2 ms to 20 ms
- For Multi-Task mode
Range: 0.5 ms to 20 ms
When the internal measurement time is longer than the exposure
time setting, the exposure time (= sampling cycle) sometimes is
greater than the setting.
Check the actual sampling cycle in [SYSTEM]-[INFO]-[CYCLE].
SKIP
Set this item to extend the measurement line width without changing the measuring time.
The effective line width is doubled when this setting is ON.
Range: ON, OFF
Section5 SETTINGS FOR FUNCTIONS
Usage Width of Line Beam p.8-20
Setting GAIN
You can set the CMOS gain so that even workpieces having an extremely low amount of
reflected light or workpieces having a large tilt can be measured stably.
The measurement resolution sometimes drops when a large gain is set. Also, this function increases the
gain on the light receiving side. Therefore, please note that the Sensor Controller can be easily affected
by ambient light.
 FUN Mode-[SENSING]-[GAIN]
Setting
1, 2, 3, 4, 5
Description
Adjusts the internal gain of the CMOS image sensor. (default value: 1)
1 (gain small) → 5 (gain large)
ZS-HL
User’s Manual
5-7
Section5
Setting for Sensing Conditions
Setting Head Installation
Set how the Sensor Head is installed.
This setting is automatically specified according to the type of the connected Sensor
Head. However, if the Head is installed at an angle and the default value and reflection
angle are changed, change the settings according to the status of the head installation.
 FUN Mode-[SENSING]-[SETTING]
Setting
Description
DIFFUSE
Select this item when the Sensor Head is installed for diffuse reflection sensing.
REGULAR
Select this item when the Sensor Head is installed for regular reflection sensing.
Setting the Emitted Light Amount
Set the amount of light emitted from the Sensor Head to match the state of the workpiece
surface.
Section5 SETTINGS FOR FUNCTIONS
The response may slow down if workpieces having differing reflection factors such as black-and-white
workpieces are measured with FUN mode set to [AUTO]. In this case, narrow the adjustment range by
setting [RANGE]. If this does not increase the response speed to keep up with measurement, select
[FIXED].
 FUN Mode-[SENSING]-[LASER]
Setting
AUTO
RANGE
FIXED
5-8
ZS-HL
User’s Manual
Description
Automatically adjusts the emitted light amount according to the reflection
factor of the workpiece. Note that the response time varies with each measurement. (default value)
UPPER
LOWER
Sets the adjustment range for the AUTO setting.
If the response speed cannot keep up with measurement at the default
value, narrow the range.
Range: 0.1 to 80 % (default: LOWER 0.1 %, UPPER 80 %)
Level
Sensitivity
Color of workpiece
0.1 %
•
•
80 %
Low
Bright
High
Dark
Sets the emitted light amount to a fixed value.
For reference levels, see [RANGE].
Range: 0.1 % to 80 %.
Section5
Setting for Sensing Conditions
Setting Measurement Object
Set the type of workpiece to be measured.
In Multi-Task mode, [THICK] is not displayed.
 FUN Mode-[SENSING]-[OBJECT]
Setting
Description
STAND
Usually, select this setting. (default value)
PCB
Select this setting for workpieces such as PCBs through which light penetrates.
MIRROR
Select this setting for workpieces having a mirror surface.
Glass
Mode1
Select this mode to measure glass at high speed.
(This is not displayed in Multi-Task mode.)
Glass
Select this mode when you want to measure glass stably.
This is effective when measuring the thickness of glass having different reflection
factors on the front side
and the backside
such as backside deposited glass.
(This is not displayed in Multi-Task mode.)
Front side
Backside
Glass with a film
For example, backside
deposited glass.
When MODE2 is selected, two areas are measured and the measured value that is
closer to the Sensor Head is output as the result of the front side of the glass.
When MODE2 is selected, the measurement area is set for the front side and backside of the glass respectively, and an adjustment is performed for a suitable
received light amount for each area.
Mode 1
Mode 2
Section5 SETTINGS FOR FUNCTIONS
Mode2
Automatically
adjusts the
received light
amount.
When you use SmartMonitor ZS, you can adjust the area while checking the
received light amount.
Area of the front side
Received light amount of the front side
Received light amount of the backside
Area of the backside
ZS-HL
User’s Manual
5-9
Section5
Setting for Sensing Conditions
Setting
THICK
Mode1
Description
Select this mode to measure the thickness of glass at high speed.
Measures the thickness between
and .
(This is not displayed in Multi-Task mode.)
Front side
Backside
Mode2
Raw glass
Measure the thickness.
Select this mode when you want to measure the thickness of glass stably.
This is effective when measuring the thickness of glass having different reflection
factors on the front side
and the backside
such as backside deposited glass.
(This is not displayed in Multi-Task mode.)
Front side
Section5 SETTINGS FOR FUNCTIONS
Backside
Glass with a film
Measure the thickness.
For example,
backside deposited glass.
When MODE2 is selected, the measurement area is set for the front side and backside of the glass respectively, and an adjustment is performed for a suitable
received light amount for each area.
Mode 1
Mode 2
Automatically
adjusts the
received light
amount.
When you use SmartMonitor ZS, you can adjust the area while checking the
received light amount.
Area of the front side
Received light amount of the front side
Received light amount of the backside
Area of the backside
When you set GLASS (MODE2) or THICK (MODE2) for the measurement object, the following parameters are initialized.
• SMOOTH
• AVERAGE
When you set [GLASS] or [ THICK], SmartMonitor ZS displays TASK1/2/3 in spite of Multi-Task Mode
OFF. Set [GLASS] or [THICK] of TASK3, and then reflect to the Sensor Controller. Even though you
change the settings of TASK1/2, the Sensor Controller does not be reflected.
5-10
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User’s Manual
Section5
Setting for Sensing Conditions
Setting Mutual Interference Prevention
Mutual interference between two Sensor Heads can be prevented by shifting the laser
beam emission timing. Use this function when Sensor Heads must be set up inside an
area where mutual interference is likely to occur or when a transparent workpiece will be
measured sandwiched between two Sensor Heads.
Sensor Head 1
Timing A
Glass
LD ON ZERO ENABLE
LD ON ZERO ENABLE
H
H
P
P
P
L
L
L
Sensor Head 2
Timing B
 FUN Mode-[SENSING]-[SYNC]
Setting
OFF
ON
Description
The mutual interference prevention function is not used. (default value)
Timing A
Sets the light emission timing to timing A.
Timing B
Sets the light emission timing to timing B.
Section5 SETTINGS FOR FUNCTIONS
LD ON ZERO ENABLE
H
The sampling frequency is changed when the mutual interference prevention mode is enabled.
• 8 times in Standard, High-Resolution and High-Sensitivity modes
• About 15 times in the High-Speed mode
The measurement cycle is also influenced by other settings.
Check the sampling cycle in FUN Mode-[SYSTEM]-[INFO]-[CYCLE].
• The same sensing mode must be set to each controller when the mutual interference prevention mode
is used. When [HI-SPEED] or [CUSTOM] is selected as the measurement mode, the same conditions
must be set. Setting different conditions will result in a sampling cycle on each controller and mutual
interference can no longer be prevented.
• When GLASS (MODE2) or THICK (MODE2) is set, mutual interference prevention function does not
operate.
ZS-HL
User’s Manual
5-11
Section5
Setting the Filter Function
Setting the Filter Function
Set the conditions for filtering information obtained from the sensor.
Displacement
Waveform
when filter
function is
not set
Smooth
SMOOTH
Spike-like changes are
removed.
Average
value
Changes are smoothed out.
Displacement
Differentiation
Changes are extracted to
eliminate displacement value.
0
The intermediate value of multiple sets of data can be output as the measurement result.
This function removes any abnormal values such as spiking that occur when the shape of
the workpiece suddenly changes during measurement.
Example: To remove spiking
Abnormal values such as spiking that occur when the shape
of the workpiece suddenly changes during measurement.
Measured value
Section5 SETTINGS FOR FUNCTIONS
Setting SMOOTH
Time
Measured value
The smoothing function can remove spikes
Time
 FUN Mode-[FILTER]-[SMOOTH]
Setting
Description
OFF
The smooth function is not used.
ON
The intermediate value of the past 15 measured values is set as the measurement
result at each sampling cycle. (default value)
When “HI-SPEED” is set in the measurement mode, [OFF] is set.
5-12
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Section5
Setting the Filter Function
Setting AVERAGE
The average of the measured values obtained based on the preset number of samples
can be output. Select this setting when you want to ignore sudden changes in measured
values.
 FUN Mode-[FILTER]-[AVERAGE]
Setting
Description
1, 2, 4, 8, 16, 32, 64, 128, 256, 512,
1024, 2048, 4096
(When the mode is set to HighSpeed mode, the value is from 1 to
256.)
Sets the average count. (default value: 128)
Setting Differentiation
Example: Differentiation cycle=10 ms
Present value
Sampling
Section5 SETTINGS FOR FUNCTIONS
Use the differentiation function to detect only sudden changes in the measured values that
occur during very short periods of time.
The differentiation function detects changes between the present value and the measured
value that is in effect just before the comparing pitch. The coefficient of this comparing
pitch is defined as the differentiation cycle.
Sampling cycle
Comparison interval 10 ms
Display value
(differentiation result)
 FUN Mode-[FILTER]-[DIFF]
Setting
Description
OFF
The differentiation function is not used. (default value)
ON
Sets the cycle (ms) in which to perform differentiation.
Range: 1 to 500
ZS-HL
User’s Manual
5-13
Section5
Setting Output Processing of Sensing Information
Setting Output Processing of Sensing Information
Set how sensing information is to be processed for outputting the required values.
Setting the Scaling
This setting is used when you want to correct any errors that are generated due to the
installation status of the Sensor Head, and display the corrected value on the main display.
Place an actual sensing object in position for measurement.
There are three setting modes: “manual setting of correction values,” and “one-point
scaling” and “two-point scaling” that automatically set the correction values of a placed
sensing object.
When GLASS mode is selected for the measurement object, the menu used only for
scaling is displayed.
Measuring the Thickness of Transparent Objects p.3-4
Section5 SETTINGS FOR FUNCTIONS
The settings listed below return to the default settings when scaling is set. Set these items after scaling
settings have been completed.
• Zero reset
 Setting One-point Scaling
Measurement is performed at one position and offset values are set for that measurement value.
The offset and increment/decrement inversion (display inversion) can be set.
Example: Displaying the height of the sensing object
Sensor Head
Display value
(mm)
10
Measuring center
distance
-4.5
Measured value
-4.5 mm
5-14
ZS-HL
User’s Manual
Sensing
object
Target display value
10 mm
Measured value
(mm)
-4.5
Section5
Setting Output Processing of Sensing Information
 FUN mode-[OUTPUT]-[SCALING]-[ON]-[AUTO]
1.
Set the sensing object in place, and enter the
desired setting to be used as the offset.
The current measured value is displayed on the
main display, and the offset value is displayed
on the sub-display.
INPUT POINT 1
DIG
VAL SET:OK
2.
Press the SET Key to apply the setting.
3.
Set the decimal point to determine the effective digits.
mal point of the scaling setting.
The position of the decimal point on the display follows the “DOT” setting of the display setup in RUN
mode.
4.
Press the SET Key to apply the setting.
5.
Press the SET key without entering any
value for the second point.
6.
[Select [FORWARD] or [INVERS].
INPUT DOT POINT
DIG
VAL SET:OK
INPUT POINT 2
DIG
VAL SET:OK
CHANGE DIRECTION
1 FORWARD
2 INVERS
Section5 SETTINGS FOR FUNCTIONS
The decimal point set here becomes the new deci-
FORWARD: The larger the distance between the Sensor Head and the sensing object, the
larger the measured value displayed on the Sensor Controller.
INVERS
: The larger the distance between the Sensor Head and the sensing object, the
smaller the measured value displayed on the Sensor Controller.
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User’s Manual
5-15
Section5
Setting Output Processing of Sensing Information
 Setting Two-point Scaling
Measurement is performed at two positions and offset values are set for those measured values.
Example: Correcting display values to match actual distances
Sensor Head
Display value
(mm)
4.0
3.8
Sensing
object
Actual distance:-3.0 mm
Display value:-2.8 mm
-3.0
4.0
Sensor Head
Section5 SETTINGS FOR FUNCTIONS
Sensing
object
Measured
value (mm)
-2.8
-3.0
Actual distance:4.0 mm
Display value:3.8 mm
Separate the two specified points by at least 1 % of the rated measurement range for the connected
Sensor Head.
Example: For the ZS-LD80 (diffuse reflection type)
The two measured points must be separated by at least “30 mm × 0.01 = 0.3 mm” as the measuring
range is “30 mm ±15 mm”.
5-16
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User’s Manual
Section5
Setting Output Processing of Sensing Information
 FUN Mode-[OUTPUT]-[SCALING]-[ON]-[AUTO]
1.
Set the first point by following steps 1 to 4 of
the one-point scaling procedure.
2.
INPUT POINT 1
DIG
VAL SET:OK
Place the sensing object at the position (second point) to perform scaling, and enter the
desired offset value (second point).
Press the LEFT key. The sub-display blinks.
Press the SET Key to apply the setting.
INPUT POINT 2
DIG
VAL SET:OK
 Manual Setting
Enter numerical values for scaling correction values.
 FUN Mode-[OUTPUT]-[SCALING]-[ON]-[MANUAL]
Setting
SPAN
Description
Sets the inclination of the sensor characters as a coefficient.
Range: -2,0000 to 2,0000
Measurement value
(mm)
2.0
Workpiece
displacement
Section5 SETTINGS FOR FUNCTIONS
3.
-2.0
OFFSET
Adds/subtracts a fixed value to or from the measured value.
Range: -999,999999 to 999,999999
Measurement value
(mm)
Workpiece
displacement
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User’s Manual
5-17
Section5
Setting Output Processing of Sensing Information
Setting HOLD Functions
Set the hold conditions for measured values. The hold functions hold any value from the
measured values during the specific period (sampling period), such as the maximum or
minimum value.
 TYPE
Set the hold conditions for measured values.
 FUN Mode-[OUTPUT]-[HOLD]-[TYPE]
Setting
Description
OFF
Hold measurement is not performed. The measured value is output at all
times. (default value)
PEAK
Holds the maximum value during the sampling period. The output
changes at the end of the sampling period and is held until the end of the
next sampling period.
Output
Max. value
Section5 SETTINGS FOR FUNCTIONS
Current
measured value
Sampling period
BOTTOM
Holds the minimum value during the sampling period. The output changes
at the end of the sampling period and is held until the end of the next sampling period.
Min.
value
Current
measured value
Output
Sampling period
P-P
Holds the difference between the maximum and minimum values during
the sampling period. This option is selected mainly when detecting vibration. The output changes at the end of the sampling period and is held
until the end of the next sampling period.
Max. value
Current
measured value
Min.
value
Output
(max. value - min.
value)
Sampling period
AVERAGE
Holds the average measured value during the sampling period. The output changes at the end of the sampling period and is held until the end of
the next sampling period.
Output
(average)
Current
measured value
Sampling period
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User’s Manual
Section5
Setting Output Processing of Sensing Information
Setting
SAMPLE
Description
Holds the measured value at the start of the sampling period. The output
changes at the start of the sampling period and is held until the start of the
next sampling period.
Output
Current
measured value
Sampling period
 Triggers
Set the input method for the timing of the start and end of the measurement period.
 FUN mode-[OUTPUT]-[HOLD]-[TRIGGER]
Setting
EXT
Description
Timing input
ON
OFF
Sampling period
When a delay time is set, the input OFF timing and the end of the
sampling period will not be synchronous. Sampling will end after the
specified sampling period has elapsed.
SELF-UP
The sampling period is the period at which the measured value is greater than
the specified self-trigger level. Hold measurement is possible without a sync
input.
Hysteresis width
(for self-trigger)
Self-trigger level
Measured
value
Sampling period
Sampling period
Section5 SETTINGS FOR FUNCTIONS
Enters the trigger for the start of sampling by using the timing input. The period
that the timing signal is ON is the sampling period.
(default value)
Action point
Return point
When SELF-UP is selected, the following items are subsequently displayed:
• TRG LEVEL
Sets the desired self-trigger level.
Range: -999,999999 to 999,999999
• TRG HYS
Sets the hysteresis width for the self-trigger.
Range: 0 to 999.999999
When a delay time is set, the timing when the measured value
becomes smaller than the self-trigger level and the end of the sampling period will not be synchronous. Sampling will end after the specified sampling period has elapsed.
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Section5
Setting Output Processing of Sensing Information
Setting
SELF-DN
Description
The sampling period is the period at which the measured value is smaller than
the specified self-trigger level. Hold measurement is possible without a sync
input.
Measured value
Hysteresis width
(for self-trigger)
Self-trigger level
Sampling period
Action point
Return point
When SELF-DN is selected, the following items are subsequently displayed:
• TRG LEVEL
Sets the desired self-trigger level.
Range: -999.99 to 999.999
• TRG HYS
Sets the hysteresis width for the self-trigger.
Range: 0 to 999.999
Section5 SETTINGS FOR FUNCTIONS
When a delay time is set, the timing when the measured value
becomes greater than the self-trigger level and the end of the sampling period will not be synchronous. Sampling will end after the specified sampling period has elapsed.
5-20
Set the hysteresis width based on the fluctuations in the measured values around the trigger level.
The hysteresis will be applied from the start of the sampling period and will prevent timing input
chattering.
ZS-HL
User’s Manual
Section5
Setting Output Processing of Sensing Information
 DELAY
A delay time is set to ignore measured values immediately after the timing input. This is
useful for avoiding bounding during device startup and the influence of machine vibration.
The delay time (the delay between timing input and the start of sampling) and the sampling period can be set.
Delay time
Timing input
Sampling period
Delay time
ON
OFF
Ignored
Accepted
 FUN mode-[OUTPUT]-[HOLD]-[DELAY]
Setting
Description
The delay time is not set. (default value)
ON
Sets the delay time.
When ON is selected, the following items are subsequently displayed:
• T-DELAY
Sets the delay time.
Range: 0 to 9000 (ms)
• T-TIME
Sets the sampling period.
Range: 1 to 9000 (ms)
Set so that the “delay time + sampling period” is less than the timing
input ON interval. If the next timing input for measurement is received
before the “delay time + sampling period” has elapsed, that timing
input will be ignored and will not be reflected in the sampling.
ZS-HL
User’s Manual
Section5 SETTINGS FOR FUNCTIONS
OFF
5-21
Section5
Setting Output Processing of Sensing Information
Setting the Zero Reset Function
 TYPE
Set how zero reset is to be executed.
 FUN Mode-[OUTPUT]-[0RESET]-[TYPE]
Setting
REAL
Description
Sets the measured value when a zero reset is executed to zero. (default value)
Measurement of height
from reference surface
Zero reset
HOLD
Reference A
Sets the measured value (hold value) when a zero reset is executed to zero.
This setting is enabled when hold measurement is performed.
Section5 SETTINGS FOR FUNCTIONS
Hold A
(reference)
Measurement of height
from reference surface
Zero reset
Direction of movement
 OFFSET
Set an offset to set the reference value for zero reset to a value other than 0.
 FUN mode-[OUTPUT]-[0RESET]-[OFFSET]
Setting
OFFSET
Description
Sets the reference value.
Range: -999.999 to 999.999 (default value: 0)
 STATUS
Set valid/invalid for the zero reset function.
 FUN mode-[OUTPUT]-[0RESET]-[STATUS]
Setting
Description
ON
When a zero reset input is received externally, a zero reset is executed.
(Default Value)
OFF
Even when a zero reset input is received externally, a zero reset is not executed.
In Multi-Task mode, set ON/OFF for each TASK.
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Section5
Setting Output Processing of Sensing Information
 0RESET MEMORY
You can select whether or not to hold the measured value zero reset level even if the
power is turned OFF.
 FUN Mode-[SYSTEM]-[0RESET]
Setting
Description
OFF
Zero reset is canceled when the power is turned OFF. (default value)
ON
The zero reset level is saved to memory even if the power is turned OFF.
Turn [OFF] zero reset memory if, as in the example below, the zero point is reset for
each measurement.
Example: When the step of the sensing object is measured
Sensor Head
Zero reset
executed
Zero reset
executed
Zero reset
executed
Direction of movement
• If zero reset memory is [ON], the zero reset level data will be written in the Sensor Controller nonvolatile memory (EEPROM) at each zero reset. The EEPROM can be written a maximum of
100,000 times. Writing the zero reset level for each measurement can, therefore, use up the life of
the memory and lead to malfunctions.
• Even if zero reset memory is enabled, the zero reset level will be held also when it is saved. Zero
reset will continue after startup when these functions have been changed.
ZS-HL
User’s Manual
Section5 SETTINGS FOR FUNCTIONS
This step
is measured.
5-23
Section5
Setting for Measurement of Characteristic Points
Setting for Measurement of Characteristic Points
You can measure any measurement points within the range of received light by using the
line beam characteristics and multi-task function. Set this menu when you measure subtle
concavity and convexity in the workpiece or thickness of a transparent object.
The setting for measuring the characteristic points are valid only in Multi-Task mode.
 FUN Mode-[MEASURE]-[Measured value]
Setting
NONE
Does not set measurement points.
AVERAGE
Measures the average position between the peak
and bottom positions of the line beam.
You can measure the distance from the workpiece. (default value)
PEAK
Section5 SETTINGS FOR FUNCTIONS
BOTTOM
Measures the peak position of the line beam.
You can measure the highest position in the line
beam.
Measures the bottom position of the line beam.
You can measure the lowest position in the line
beam.
Line beam
Average
Line beam
Peak
Line beam
Bottom
THICK
STEP
K+mX+nY(calculation)
5-24
Description
ZS-HL
User’s Manual
Measures the thickness of a transparent object
such as glass.
Measures between peak and bottom in the line
beam.
You can detect subtle concavity and convexity in
the workpiece.
Thickness
Line beam
Peak/bottom
Select this to perform logic operations on X and Y with the coefficient freely set. In
addition, you can assign, to TASK, the measurement of characteristic points you
have set, and measure multiple points or perform calculations.
• K range: -999999 to 999999
• m range: -10.0 to 10.0
• n range: -10.0 to 10.0
• X range: NONE, TASK1 to TASK4
• Y range: NONE, TASK1 to TASK4
Section5
Setting Display Method
Setting Display Method
Set what you want to display on the Sensor Controller during measurement in RUN mode.
To set the display method, switch to RUN mode and display the top menu.
Setting the Digital Display
Set what is displayed on the display in RUN mode.
 Number of digits past the decimal point
Set the number of display digits in the main display and sub-display.
When five or less digits are set, the digits are disabled from the rightmost digit first.
 RUN Mode-MENU key-[DIGITAL]-[DOT]
Setting
Description
Sets the number of display digits past the decimal point.
(default value: varies depending on the connected Sensor Controller.)
 Setting the ECO display
Set the brightness of the main display and sub-displays.
 RUN Mode-MENU key-[DIGITAL]-[ECO]
Setting
Description
NORMAL
Sets the display to normal brightness. (default value)
ECO
Suppresses the brightness by reducing current consumption to darken the display.
OFF
Turns the display OFF.
Section5 SETTINGS FOR FUNCTIONS
5th, 4th, 3rd, 2nd, 1st, 0
Displaying HELP
Display Help for the functions assigned to the SET or ESC keys in RUN mode.
 RUN Mode-MENU Key-[HELP]
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User’s Manual
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Section5
Setting Display Method
Setting the LCD Screen
Set how the LCD screen is displayed in RUN mode.
 Setting display ON/OFF
Set whether or not to display the LCD screen.
 RUN Mode-MENU key-[LCD]-[ON/OFF]
Setting
Description
ON
Displays the LCD screen at all times. (default value)
AUTOOFF
Turns the LCD screen display OFF when no operations are performed for one minute.
OFF
Turns the LCD screen OFF.
(This setting is valid only in RUN mode. Note, however, that pressing the MENU key
displays the display customize menu.)
 Setting the backlight ON/OFF
Section5 SETTINGS FOR FUNCTIONS
Set whether or not to turn the LCD screen’s backlight ON or OFF.
 RUN Mode-MENU key-[LCD]-[B.LIGHT]
Setting
ON
AUTOOFF
Turns the backlight OFF when no operations are performed for one minute.
OFF
Turns the LCD screen backlight OFF.
 Customizing the LCD display
Set this item to display customized characters on the LCD screen.
 RUN Mode-MENU key-[LCD]-[CUSTOM]
Setting
Description
UPPER
Set this item to ON to display characters set at [U-CUST] on the upper section of the
LCD screen. (default: U-OFF)
LOWER
Set this item to ON to display characters set at [L-CUST] on the lower section of the
LCD screen. (default: L-OFF)
U-CUSTM
Use this setting to edit characters to display on the LCD screen. (max. 16 digits)
Call up the initial character of each character group using function keys 1 to 4.
1: A to Z
2: a to z
3: KANA (Japanese Characters)
4. Numbers, :, ;, , <, =, >, ?, @
Switch the characters in order using the UP or DOWN key.
Move the digits by the LEFT or RIGHT key.
To clear a character, select a space.
L-CUSTM
5-26
Description
Turns the LCD screen backlight ON at all times. (default value)
ZS-HL
User’s Manual
Section5
Setting the System Environment
Setting the System Environment
Set the system environment.
Checking Information
Displays the sampling cycle and version of Sensor Controller system.
 FUN Mode-[SYSTEM]-[INFO]
Setting
Description
CYCLE
Displays the current sampling cycle.
VERSION
Displays the version of the Sensor Controller system.
The key lock function disables all Sensor Controller keys. Once the keys have been
disabled, no key input will be accepted until the lock is released. This function is useful to
prevent inadvertent changes to settings.
Moving to the key lock menu or moving between menu hierarchies by the MENU or ESC
keys are possible even when the key lock function is ON.
 FUN Mode-[SYSTEM]-[KEYLOCK]
Setting
Description
OFF
Cancels the key lock function. (default value)
ON
Turns the key lock function ON.
ZS-HL
User’s Manual
Section5 SETTINGS FOR FUNCTIONS
Setting the Key Lock
5-27
Section5
Setting the System Environment/Changing the Way of Obtaining Banks
Setting the Sensor Load Method
Set whether or not to load information from the currently connected Sensor Head when the
Sensor Controller is started up.
 FUN Mode-[SYSTEM]-[SenINFO]
Setting
Description
LOAD
Reads the data currently saved on the Sensor Head each time that the Sensor
Controller is started up. (default value)
SAVE
Data is not read from the Sensor Head when the Sensor Controller is started
up if the same Sensor Head at the previous startup is connected.
When the combination of Sensor Controller and Sensor Head is fixed,
selecting “SAVE” sometimes results in the Sensor Controller starting
up more stably depending on the operating environment.
Section5 SETTINGS FOR FUNCTIONS
Setting the Display Language
Set the display language of the LCD screen.
 FUN Mode-[SYSTEM]-[LANGUAG]
Setting
Description
Japanese
Displays menus in Japanese. (default value)
English
Displays menus in English.
Changing the Way of Obtaining Banks
Select the bank contents to be obtained from the settings or judgment value.
 FUN Mode-[BANK]-[MODE]
Setting
5-28
Description
NORMAL
“[SENSING] [MEASUREMENT POINT] [FILTER] [OUTPUT] [I/O SET] that are
set in FUN mode”, and “the threshold value that is set in TEACH mode” are
regarded as bank data. The number of banks is up to four. (default value)
THRESH
“The threshold value that is set in TEACH mode” is regarded as bank data.
The number of banks increases up to 32.
ZS-HL
User’s Manual
Section5
Saving the settings data/Clearing the Settings
Saving the Settings Data
Bank settings and system settings are saved internally on the Sensor Controller.
• The settings of all banks are saved regardless of the currently selected bank No.
• After you have made or changed settings, be sure to save the setup data. All settings will be deleted if
you turn the power OFF without saving the data. A message prompting you to save data will be displayed if you change a mode without saving data after you have changed settings.
 FUN Mode-[SYSTEM]-[SAVE]
Setting
Description
OK
Saves the setup data.
CANCEL
Does not save the setup data.
Clearing the Settings
Return all bank settings and system settings to their factory settings.
The settings of all banks and system settings are initialized regardless of the currently selected bank No.
 FUN Mode-[SYSTEM]-[INIT]
Setting
Description
OK
Initializes the setup data.
CANCEL
Does not initialize the setup data.
Clearing Banks
Section5 SETTINGS FOR FUNCTIONS
Initializing All Settings
“Clearing” initializes the settings of the currently selected bank.
FUN Mode-[BANK]-[CLEAR]
Settings in [SYSTEM] and settings displayed in RUN mode are not initialized.
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User’s Manual
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Section5
Clearing the Settings
MEMO
Section5 SETTINGS FOR FUNCTIONS
5-30
ZS-HL
User’s Manual
Section6
I/O
Overview
6-2
I/O Cable
6-2
Terminal Block Output
6-2
Settings for Linear Output
6-3
Assignment of Linear Output
6-3
Setting Focus
6-4
Correcting Linear Output Values
Settings for Judgment Output
6-5
6-7
6-7
Assignment of Judgment Output (For Multi-Task)
6-8
Settings for Terminal Block Output
6-9
Real-Time Parallel Output Unit
6-9
Assignment of Terminal Block Output
6-10
Output Format
6-11
Setting Focus
6-13
Setting the Update Cycle
6-14
Section6 I/O
Operation Settings at Judgment Output
Settings for Processing when Measurement Cannot be Performed
6-15
When Connecting ZS-MDC and ZS-DSU
6-16
Settings for Input Signal
6-17
Settings for the Active Direction of an Input Signal
6-17
Changing the Assignment of Input Signals
6-17
Timing Charts
6-18
ZS-HL
User’s Manual
6-1
Section6
Overview
Overview
By using the I/O cable and terminal block output of the Sensor Controller, you can output
the measured value or judgment result to external devices, or input a control signal such
as zero reset and LD-OFF from external devices. A predetermined I/O signal is assigned
to each signal line for the I/O cable.
I/O Cable
The I/O cable outputs the measured value or judgment value from the I/O cable of the
controller, and inputs a measurement control signal or zero reset signal.
Output of measured value (linear output)
Settings for Linear Output
p.6-3
Judgment output
Settings for Judgment Output p.6-7
Input of control signal
Section6 I/O
Settings for Input Signal
p.6-17
Wiring p.2-10
Terminal Block Output
When you connect a real-time parallel output unit, the Sensor Controller outputs the
measured value or judgment value in parallel.
DATA
ZS-RPD
PARALLEL OUTPUT UNIT
RS-232C
Connect to the
RS-232C connector.
Real-time parallel
output unit ZG-RPD
6-2
ZS-HL
User’s Manual
Output the measured value (binary data) or judgment.
p.6-9
Section6
Settings for Linear Output
Settings for Linear Output
This section describes the settings required for linear output of the current measurement
result.
Assignment of Linear Output
Sets the output for the linear output line. Depending on the selected task mode, the setting
value differs.
 FUN mode-[I/OSET]-[ANALOG]-[OUT]
• For Single-Task mode
Setting
Description
ON
Linearly outputs the measured value from the controller. (default value)
OFF
Does not output linearly.
• For Multi-Task mode
Description
The measured value of the task selected here is linear-output from the controller.
(default value: TASK1)
NONE
Does not output linearly.
ZS-HL
User’s Manual
Section6 I/O
Setting
TASK1
TASK2
TASK3
TASK4
6-3
Section6
Settings for Linear Output
Setting Focus
For the linear output, because the measured value is converted to a current of 4 to 20 mA
or a voltage of -10 to +10, and is then output, you can freely set the relationship between
the displayed measured value and output value. Match the settings to suit the connected
external device.
Enter the output values for any two current values or voltage values to set the output
range. (default value: OFF)
Example: Set 0 mm to 4 mA and 5 mm to 20 mA. (for current output)
Output current
(mA)
Output current
(mA)
20
20
4
4
0
-5
5
Measured value
(mm)
0
-5
0
5
Measured value
(mm)
Separate the two specified points by at least 1 % of the rated measurement range for the connected
Sensor Head or 40µm or longer.
Section6 I/O
Example: For the ZS-HLDS5T (diffuse reflection type)
The two measured points must be separated by at least “10 mm × 0.01 = 0.1 mm” as the measuring
range is “±5 mm (10 mm)”.
 FUN mode-[I/O SET]-[ANALOG]-[FOCUS]-[ON]
1.
Set the output value (voltage or current
value) of point 1.
The output value is displayed on the main
display.
2.
Press the SET Key to apply the setting.
3.
Set the measured value for point 1.
INPUT POINT 1
CHANGE SET:OK
The measured value is displayed on the subdisplay.
4.
6-4
ZS-HL
User’s Manual
Press the SET Key to apply the setting.
INPUT POINT 1
DIG
VAL SET:OK
Section6
Settings for Linear Output
5.
Set point 2 in the same way as point 1.
INPUT POINT 2
DIG
VAL SET:OK
If the points are not set correctly, check the following:
• Is the measured value set on the sub-display within the measuring range
(with scaling and calculation settings reflected if set)?
• Are the first and second measured points separated by at least 1 % of the rated measuring
range?
• Are the current (or voltage) values for the two points the same?
Correcting Linear Output Values
Range: -999 to 999
Section6 I/O
Discrepancies may occur between the linear output current (or voltage) values set on the
Sensor Controller and the actual current (or voltage) values measured due to the
conditions for the connected external device or other factors. The linear output correction
function can be used to correct this discrepancy.
The output values are corrected by entering the correction value for the current (or
voltage) values for any two points. (default value: OFF)
Set the focus function and select either current or voltage output beforehand. Also, connect the linear
output to an external ammeter or voltmeter.
 FUN mode-[I/O SET]-[ANALOG]-[ADJUST]-[ON]
1.
Set the output value of point 1.
The output value is displayed on the main
display.
2.
Press the SET Key to apply the setting.
INPUT POINT 1
CHANGE SET:OK
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User’s Manual
6-5
Section6
Settings for Linear Output
3.
Set the correction value for point 1.
The measured value is displayed on the subdisplay.
Adjust the correction value on the sub-display
so that the measured value of the ammeter (or
voltmeter) and the output value shown on the
main display are the same.
4.
Press the SET Key to apply the setting.
5.
Set point 2 in the same way as point 1.
INPUT POINT 1
DIG
VAL SET:OK
If the points are not set correctly, check to see if the
current (or voltage) values of points 1 and 2 are the
same.
INPUT POINT 2
DIG
VAL SET:OK
Section6 I/O
6-6
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User’s Manual
Section6
Settings for Judgment Output
Settings for Judgment Output
This section describes the settings for outputting the judgment result using the output
cable.
Operation Settings at Judgment Output
Sets the hysteresis width for the upper and lower limits of judgments and the judgment
output timing.
Threshold Setting p.4-7
 FUN mode-[I/O SET]-[JUDGE]
Setting
HYS
Description
TIMER
Hysteresis
(hysteresis width)
HIGH threshold
value
Measured value
Action
point
Return
point
LOW threshold
value
Output
HIGH
ON
OFF
PASS
ON
OFF
LOW
ON
OFF
Section6 I/O
Set the hysteresis value for the
upper and lower limits of judgments if the HIGH, PASS, or
LOW judgment is unstable near
the threshold values.
Range: 0 to 999.999
(default value: 0.05 % of Sensor
Head measuring range)
Example: For ZS-LD80, 15 µm
(0.005 % of 30 mm) as measuring range is ±15 mm
Set the timing for judgment outputs to match the operation of external devices.
OFF (default
value)
Outputs the judgment as soon as
the judgment result has been
applied.
Measured value
HIGH threshold value
LOW threshold value
HIGH output ON
OFF
PASS output ON
OFF
LOW output ON
OFF
OFF-DLY
After the measurement result
has been applied, delays turning
OFF the PASS output for the
time set to the timer.
Also delays turning ON the HIGH
and LOW outputs for the time set
to the timer.
Range: 1 to 5,000 (ms)
Measured value
HIGH threshold value
LOW threshold value
HIGH output ON
OFF
PASS output ON
OFF
LOW output ON
OFF
: Timer time
ZS-HL
User’s Manual
6-7
Section6
Settings for Judgment Output
Setting
Description
ON-DLY
After the measurement result
has been applied, delays turning
ON the PASS output for the time
set to the timer.
Also delays turning OFF the
HIGH and LOW outputs for the
timer time.
Range: 1 to 5,000 (ms)
Measured value
HIGH threshold value
LOW threshold value
HIGH output ON
OFF
PASS output ON
OFF
LOW output ON
OFF
: Timer time
1 SHOT
When the judgment result
changes to PASS, outputs the
PASS output for the time set to
the timer.
Neither the HIGH nor the LOW
output is output.
Range: 1 to 5,000 (ms)
Measured value
HIGH threshold value
LOW threshold value
HIGH output ON
OFF
PASS output ON
OFF
LOW output ON
OFF
: Timer time
Section6 I/O
Assignment of Judgment Output (For Multi-Task)
Sets which TASK to output.
 FUN mode-[I/O SET]-[JUDGE]-[OUTPUT]
Setting
TASK1
TASK2
TASK3
TASK4
Description
The selected task result is output to the following output lines. (default value:
TASK1)
• HIGH
• PASS
• LOW
• BUSY
When you want to output the judgment of multiple tasks together using Multi-Task mode, you need to
have a real-time parallel output unit.
Settings for Terminal Block Output p.6-9
6-8
ZS-HL
User’s Manual
Section6
Settings for Terminal Block Output
Settings for Terminal Block Output
The following describes the methods for connecting a real-time parallel output unit (ZGRPD_1) and outputting the measured value or judgment result at high speed. The
measured value is converted to 16-bit binary data in the maximum steps of 65536, and is
output.
In Multi-Task mode, you can output all of the judgment results of multiple tasks together.
Real-Time Parallel Output Unit
 Connection of a Real-Time Parallel Output Unit
Hang the hook that is on the rear side of the real-time parallel output unit to the DIN
track and attach it there. Then, connect the connector of the Sensor Controller to the
RS-232C connector of ZS-HLDC_1, and use the Sensor Controller.
ZS-HLDC
Connect to the RS-232C
connector of
the ZS-HLDC.
Connector
Section6 I/O
ZG-RPD
18-pole
terminal block
(detachable)
DIN track
 Alignment of the Terminal Block
ERR indicator
(lit color: red)
ZG-RPD
PARALLEL OUTPUT UNIT
ERR
RS-232C
PWR indicator
(lit color: green)
MADE IN JAPAN
PWR
GATE
DATA 0
RS-232C connector.
Can be used in the same
way as the RS-232C port
on the ZS-HLDC.
1
2
3
4
5
6
7
8
9
10 11 12 13 14 15
Pin Nos.1 to 16
Parallel output
Signal names: D0 to D15
Pin No.17
Gate signal
Signal name: GATE
Pin No.18
not used
[Type of Connectors Used]
• ZG-RPD body side Þ SL 3.5/18/90F-ORG (made by Weidmuller)
• Cable connection side Þ BL 3.5/18F-ORG (made by Weidmuller)
ZS-HL
User’s Manual
6-9
Section6
Settings for Terminal Block Output
 Circuit Specification
The following circuit configuration is employed for the total of 17 outputs including data
output (D0 to D15) and GATE signal.
• ENPN output type (ZG-RPD11)
• EPNP output type (ZG-RPD41)
ZG-RPD41
Load
DC24 V
20 mA(max.)
ZS-HLDC
Internal circuit
Internal circuit
ZG-RPD11
DC24 V
15
5.1
0 V (shared internally
with ZS-HLDC)
15
5.1
24 VDC (shared internally
with ZS-HLDC)
Load
ZS-HLDC GND (0 V) lead
20 mA (max.)
(cable color: blue)
ZS-HLDC GND lead (cable color: blue)
Assignment of Terminal Block Output
Sets the output contents for the real-time parallel output unit. Depending on the selected
mode, the setting value differs.
Section6 I/O
 FUN mode-[I/O SET]-[TERMINAL]-[OUT]
• For Single-Task mode
Setting
Description
NONE
Does not output to the real-time parallel output unit.
Compared to the case when the measured value or judgment is output, the
sampling cycle becomes short.
(Default Value)
MEASURE
Outputs the measured value to the real-time parallel output unit.
JUDGE
Outputs the judgment result to the real-time parallel output unit.
• For Multi-Task mode
Setting
NONE
MEASURE
Description
Does not output to the real-time parallel output unit.
Compared to the case when the measured value or judgment is output, the
sampling cycle becomes short.
(Default value)
TASK1
TASK2
The measured value of the task selected here is output to the real-time parallel output unit.
TASK3
TASK4
REPEAT
JUDGE
6-10
ZS-HL
User’s Manual
Continuously outputs TASK1 to TASK4.
Outputs the judgment result to the real-time parallel output unit.
Section6
Settings for Terminal Block Output
Output Format
 When the measured value is output
The measured value is converted to 16-bit binary data in the maximum steps of 65536,
and is output. The following table lists the correspondence between the measured
value and 16-bit binary data.
Becomes CLAMP-LV when a
measurement error occurs.
Data output value of parallel data
16-bit binary data (in binary)
1111 1111 1111 1111
1100 1110 0010 0000
1011 1110 1000 0000
1010 1110 1110 0000
1001 1111 0100 0000
1000 1111 1010 0000
1000 0000 0000 0001
1000 0000 0000 0000
0111 1111 1111 1111
0111 0000 0110 0000
0110 0000 1100 0000
0101 0001 0010 0000
0100 0001 1000 0000
0011 0001 1110 0000
Measuring range
In decimal
65535
CLAMP-LV
52768
FAR side
48768
44768
40768
36768
32769
CENTER
32768
32767
28768
24768
20768
16768
NEAR side
12768
D15-D12 D11-D8 D7-D4
At default,
data is output
in 40,000
steps from
12,768 to
52,768.
D3-D0
Section6 I/O
Data that is output from a 16-bit terminal block
In the above table,
• 1 indicates that the open-collector output is ON (For NPN type, L level, and for PNP type, H level).
• 0 indicates that the open-collector output is OFF (For NPN type, H level, and for PNP type, L level).
• When Only a Task is Output
b15 b14 b13 b12 b11 b10
b9
b8
b7
b6
b5
b4
b3
b2
b1
b0
Binary data of the measured value
When FOCUS is set, only the measurement that reflects the FOCUS setting is output.
Example: When FOCUS is set for the first point (measured value 0.000 → output value 00000)
and second value (measured value 10.000 → output value 20000).
When the measurement result is 5000, 10000 is output in binary.
b15 b14 b13 b12 b11 b10
0
0
1
0
0
1
b9
b8
b7
b6
b5
b4
b3
b2
b1
b0
1
1
0
0
0
1
0
0
0
0
=10000
Data output value of parallel data
Output value after FOCUS is performed (in decimal) 16-bit binary data (in binary)
65535 1111 1111 1111 1111
50000 1100 0011 0101 0000
40000 1001 1100 0100 0000
30000 0111 0101 0011 0000
20000 0100 1110 0010 0000
10000 0010 0111 0001 0000
0000 0000 0000 0000
0
D15-D12 D11-D8 D7-D4
D3-D0
Level that is output from the 16-bit terminal block
ZS-HL
User’s Manual
6-11
Section6
Settings for Terminal Block Output
• When multiple tasks are output continuously
The TASK number is assigned for the lower 2 bits. Thus, the result is output for the
measured value as data in which 2 bits are rounded up.
b15 b14 b13 b12 b11 b10
b9
b8
b7
b6
b5
b4
b3
b2
b1
Binary data of the measured value
The result rounded up to 2 bits (1/4 the value)
b0
TASK No.
0:TASK1
1:TASK2
2:TASK3
3:TASK4
When FOCUS is set, only the measurement that reflects the FOCUS setting is output.
Example: When FOCUS is set for the first point (measured value 0.000 → output value 00000)
and second value (measured value 10.000 → output value 20000).
When the measurement result is 5000, 10000 is output in binary.
b15 b14 b13 b12 b11 b10
0
0
1
0
0
1
b9
b8
b7
b6
b5
b4
b3
b2
b1
b0
1
1
0
0
0
1
0
0
1
1
10000/4=2500
*Result rounded up to 2 bits (1/4 the value)
=10000
TASK No.
 When the judgment is output
• When Multi-Task is ON
b15 b14 b13 b12 b11 b10
Section6 I/O
Judgment result
for TASK4
b9
b8
Judgment result
for TASK3
b7
b6
b5
b4
b3
b2
b1
b0
Judgment result
for TASK2
Judgment result
for TASK1
b7
b3
• When Multi-Task is OFF
b15 b14 b13 b12 b11 b10
b9
b8
b6
b5
b4
b2
b1
b0
Judgment result
ERROR LOW
b3
Bit
b0,4,8,12
b1,5,9,13
b2,6,10,14
b3,7,11,15
6-12
ZS-HL
User’s Manual
b2
PASS HIGH
b1
b0
Item
Details
HIGH
PASS
LOW
ERROR
Turns ON when the judgment result is HIGH.
Turns ON when the judgment result is PASS.
Turns ON when the judgment result is LOW.
Turns ON when a measurement error occurs.
The judgment result is
expressed in bits in the
order of ERROR, LOW,
PASS, and HIGH from
the left.
Section6
Settings for Terminal Block Output
Setting Focus
Enter the measured values for any two binary output values to set the output range.
(default value: OFF)
Example: Set 0 mm to 0 and 5 mm to 50000. (when ZS-HLDS5 is connected)
Output value
Output value
65535
65535
52768
50000
32767
32767
12768
0
-5
0
5
Measured value
(mm)
0
-5
0
5
Measured value
(mm)
Separate the two specified points by at least 1 % of the rated measurement range for the connected
Sensor Head.
Example: For the ZS-HLDS5T
The two measured points must be separated by at least “10 mm × 0.01 = 0.1 mm” as the measuring
range is “±5 mm (10 mm)”.
Section6 I/O
 FUN mode-[I/O SET]-[TERMINAL]-[FOCUS]-[ON]
1.
Set the binary output value of point 1.
The output value is displayed on the main
display.
2.
Press the SET Key to apply the setting.
3.
Set the measured value for point 1.
INPUT POINT 1
DIG
VAL SET:OK
The measured value is displayed on the subdisplay.
4.
Press the SET Key to apply the setting.
INPUT POINT 1
DIG
VAL SET:OK
ZS-HL
User’s Manual
6-13
Section6
Settings for Terminal Block Output
5.
Set point 2 in the same way as point 1.
INPUT POINT 2
DIG
VAL SET:OK
If the points are not set correctly, check the following:
• Is the measured value set on the sub-display within the measuring range
(with scaling and calculation settings reflected if set)?
• Are the first and second measured points separated by at least 1 % of the rated measuring
range?
• Are the binary output values for the two points the same?
Setting the Update Cycle
Sets the output cycle for the real-time parallel output unit.
 FUN mode-[I/OSET]-[TERMINAL]-[CYCLE]
Setting
Section6 I/O
6-14
1 to 100
Description
Sets the update cycle. (default value: 1)
Outputs the measurement result or judgment result for each of “sampling cycle ×
setting value for the update cycle”.
Checking the Sampling Cycle p.5-27
ZS-HL
User’s Manual
Section6
Settings for Processing when Measurement Cannot be Performed
Settings for Processing when Measurement Cannot be Performed
Set the output methods for linear, judge, and terminal block when a non-measurement
state occurs temporarily due to insufficient received light amount or the reset input state,
for example.
Example: When the waveform skips due to insufficient received light amount
Amount of displacement
State with waveform skip caused
by insufficient light amount
Direction of
workpiece
movement
When [KEEP] is selected
Amount of displacement
As the value before the skip occurred is kept,
this is effective in canceling waveform skip.
 FUN mode-[I/O SET]-[NO_MEAS]
KEEP
Section6 I/O
Setting
Outputs
Linear Output/Terminal Block Output
Judgment Output
The status immediately before measurement is stopped is held and output.
CLAMP
Outputs the set CLAMP value (abnormal
(default value) value).
All OFF
In hold measurement, the output before the first hold value is obtained will be the same as [CLAMP]
even if [KEEP] is set.
 Setting the clamp value
If [CLAMP] is selected for the processing when measurement cannot be performed, set
the clamp value to be output.
• For linear output
 FUN mode-[I/O SET]-[ANALOG]-[CLAMP]
Setting
When current is output: MIN (approximately 2mA), MAX (approximately 25mA, default value), 4 to 20mA (every 1mA)
When voltage is output: MIN (approximately -11V), MAX (approximately 11V, default value), -10 to 10V (every 1V)
• For terminal block output
 FUN mode-[I/O SET]-[TERMINAL]-[CLAMP]
Setting
0 to 65535 (default value: 65535)
ZS-HL
User’s Manual
6-15
Section6
When Connecting ZS-MDC and ZS-DSU
When Connecting ZS-MDC and ZS-DSU
When you transfer information to ZS-MDC or ZS-DSU, the target to be transferred is only
one task. Select the task information to be transferred.
 FUN mode-[I/O SET]-[CONNECT]
• For Single-Task mode
Setting
Description
ON
Transfers to the connection target. (default value)
OFF
Does not transfer.
• For Multi-Task mode
Setting
TASK1
TASK2
TASK3
TASK4
Section6 I/O
6-16
ZS-HL
User’s Manual
Description
Select the task you want to transfer to the connection target.
Section6
Settings for Input Signal
Settings for Input Signal
This section describes the settings for controlling by using external input signals.
Settings for the Active Direction of an Input Signal
Set ON or OFF for an external input signal to an active state for each of the input wires.
 FUN mode-[I/O SET]-[INPUT]-[ACTIVE]
Setting
IN0 to IN3
Description
OFF
The input wire is regarded as active when it is OFF.
ON
The input wire is regarded as active when it is ON. (default value)
Changing the Assignment of Input Signals
You can select the function to be assigned to external input signals IN0 to IN3 from two
patterns.
• If you use SmartMonitor ZS, you can change the function assignments of IN2 and IN3 if [BANK] is
selected. For details, refer to the Help for SmartMonitor ZS.
 FUN mode-[I/O SET]-[INPUT]-[MODE]
Setting
NORMAL
BANK
Description
Select this to use external input function as in standard applications so far. (default
value)
IN0
IN1
IN2
IN3
External trigger
(timing) input
Reset input
LD-OFF input
Zero reset input
Section6 I/O
• These settings are stored in each bank and must be set separately for each bank.
Select this to switch banks using external inputs.
IN0
IN1
IN2
IN3
Bank input A
Bank input B
LD-OFF input
Zero reset input
• Combination of Banks
With the combination of bank inputs A and B, you can select any banks.
Bank input A
Bank input B
Bank to be Selected
OFF
OFF
BANK1
OFF
ON
BANK2
ON
OFF
BANK3
ON
ON
BANK4
• Bank switching is begun 0.5 seconds after the input state changes.
• At most it takes about 30 seconds to switch banks.
• During bank switching the BUSY output becomes ON.
• If the bank mode is set to [JUDGMENT VALUE], the bank cannot be switched at the external signal
input because the number of banks increases to 32.
ZS-HL
User’s Manual
6-17
Section6
Timing Charts
Timing Charts
The following shows the timing charts when communication is performed with external
devices.
The parts in which specific values are stated in the timing chart are the times that do not
depend on the sampling cycle.
 Basic Operation
Laser beam emission
OFF
a
b
ON
Internal processing
a
T1
T8
b
Judgment output
T11
Linear output
Item
Section6 I/O
6-18
Minimum
T1
Time during which the mea- –
sured value is determined
from the laser beam emission
T8
Update cycle of judgment
output
Sampling cycle
T11
Response time of linear
output
–
ZS-HL
User’s Manual
Average
Maximum
Remarks
–
Sampling
cycle × 3
When the measurement is performed continuously and the
amount of light is stable
–
500 µs
It changes depending
on the way the measured value fluctuates.
Section6
Timing Charts
 NORMAL
T2
Trigger input
OFF
ON
Trigger rest input
OFF
ON
T2
T12
T12
T12
Internal processing
T13
T13
T13
Judgment output
BUSY output
OFF
ON
T11
T11
Linear output
OFF
ON
Item
Minimum
Average
Maximum
Minimum time of trigger
input
Sampling
cycle × 4
–
–
T11
Response time of linear
output
–
–
500 µs
Sampling
cycle × 3
–
Sampling
cycle × 4
T13 Response time of judgment Sampling
output and BUSY output
cycle × 4
–
Sampling
cycle × 5
T12 Timing of starting and ending the measurement after
trigger input
It changes depending
on the way the measured value fluctuates.
ZS-HL
User’s Manual
Section6 I/O
T2
Remarks
6-19
Section6
Timing Charts
 Sample Hold
This is the timing charts when the trigger mode is external trigger.
T2
Trigger input
OFF
ON
Trigger rest input
OFF
ON
T2
T12
T12
Internal processing
T13
T13
T13
Judgment output
BUSY output
OFF
ON
T11
T11
Linear output
Item
Section6 I/O
6-20
Minimum
Average
Maximum
T2
Minimum time of trigger
input
Sampling cycle × 4
–
–
T11
Response time of linear
output
–
–
500 µs
Sampling cycle × 3
–
Sampling cycle × 4
T13 Response time of judgment Sampling cycle × 4
output and BUSY output
–
Sampling cycle × 5
T12 Timing of starting and ending the measurement after
trigger input
ZS-HL
User’s Manual
Remarks
It changes depending on the way the
measured value
fluctuates.
Section6
Timing Charts
 PEAK/BOTTOM/P-P/AVERAGE HOLD
This is the timing charts when the trigger mode is external trigger.
The result processed at the timing drawn in diagonal line is the target of hold. For the
sampling period, see the settings for [HOLD].
Setting HOLD Functions p.5-18
T2
Trigger input
OFF
ON
Trigger rest input
OFF
ON
T2
T12
T12
Internal processing
T13
T13
Judgment output
T13
BUSY output
Sampling period
OFF
ON
T11
T11
Linear output
Item
Minimum
Maximum
T2
Minimum time of trigger
input
Sampling cycle
×4
–
–
T11
Response time of linear
output
–
–
500 µs
Sampling cycle
×3
–
Sampling cycle × 4
T13 Response time of judgment Sampling cycle
output, BUSY output
×4
–
Sampling cycle × 5
T12 Timing of starting and ending the measurement after
trigger input
Remarks
It changes depending on the way the
measured value fluctuates.
ZS-HL
User’s Manual
Section6 I/O
Average
6-21
Section6
Timing Charts
 Bank Switching
BANK input
T14
Internal processing
T15
OFF
ON
BUSY output
T16
Judgment output
Item
Minimum
Average
–
Maximum
Remarks
Section6 I/O
T14 Time of receiving bank
switching input
Sampling
cycle × 3
Sampling
cycle × 4
T15 Bank switching time
It changes according to the measurement conditions (*1) as follows:
• When the parameters from (1) to (3) are the same between BANKs:
Within 1s
• When the parameter of (1) is in a mode other than High-Speed mode
and the parameter of (3) is the same between BANKs: Within 3s
• Other cases: Within 15s
(*1) Measurement conditions
(1) Measurement mode (STAND/HI-SPEED/HI-RESO/HI-SENS/CUSTOM)
(2) Scaling
(3) Sensor installation (Regular reflection/diffuse reflection)
T16 Time after the end of bank
switching until the output of
valid data
Sampling
cycle × average number
–
Sampling
Time when the adjustcycle × (15 + ment of light amount is
average num- “automatic”.
ber)
 Laser OFF
T4
Laser OFF input
OFF
ON
T5
T5
T17
Internal processing
OFF
Laser beam emission ON
Judgment output
CLAMP output or KEEP output
Item
Average
Maximum
Time of receiving laser OFF 500 ms
input
–
–
T5
Response time of laser
OFF input
–
–
500ms
Sampling
cycle × average number
–
Sampling
cycle × (15 +
average number)
T17 Time after the canceling of
laser OFF input until the
output of valid data
6-22
Minimum
T4
ZS-HL
User’s Manual
Remarks
It is the time for adjustment of the light
amount and average
number of buffers.
Section6
Timing Charts
 Zero Reset
T6
OFF
ON
Zero reset input
T22
Judgment output
T7
OFF
ON
Zero reset input
Judgment output
Item
Minimum
Average
Maximum
T6
Zero reset input time
50 ms
0.8s
T7
Cancel time of zero reset
input
1s + sampling cycle × 3
1s + sampling cycle × 4
Sampling
cycle × 3
Sampling
cycle × 4
T22 Time after the input of zero
reset until the data output
after the zero reset
Remarks
Operations in FUN Mode and When the Mode is Switched
from FUN to One Other Than FUN
Section6 I/O
Mode
FUN mode
Except for FUN mode
T20
Internal processing
T19
T19
OFF
Laser beam emission
ON
T11
Linear output
Item
T11
Minimum
Average
Maximum
Response time of linear
output
–
–
500 µs
T19 Response time of mode
switching
–
–
Sampling cycle
T20 Determination time of valid
data after mode switching
–
–
Sampling cycle
× (15 + average
number)
Remarks
It changes depending on the way the
measured value
fluctuates.
In FUN mode, the value is not output to the terminal block (ZG-RPD/ZS-RPD). Immediately after the
mode is switched to one other than FUN mode, a clamp value is output until the measured value is
determined.
ZS-HL
User’s Manual
6-23
Section6
Timing Charts
 Terminal Block (ZG-RPD)
 When Judgment and Measured Values of TASK1/2/3/4 are Output
The result of terminal block output is obtained at the falling edge of GATE signal.
Laser beam emission
OFF
ON
Internal processing
T1
T21
T9
T10
T24
OFF
ON
GATE signal
T23
TASK* or Thresh
Terminal block output
Item
Section6 I/O
6-24
Minimum
T1
Time during which the mea- –
sured value is determined
from the laser beam emission
T9
Update cycle of terminal
block output
TASK* or Thresh
Average
–
Sampling cycle × update cycle
TASK* or Thresh
Maximum
Remarks
Sampling cycle × 3 The update cycle
can be set in [I/
OSET]-[TERMINAL BLOCK][CYCLE].
T10 OFF time of GATE signal
The half of update cycle of terminal block output(T9) When the meaHowever, it will be fixed 140 ms if the terminal block surement is peroutput period (T9) is more than 280 ms.
formed
continuously and
the amount of
light is stable
T21 Response time of GATE
signal
320 µs
T23 The data after Gate signal
OFF
Hold time
About 48 μs
T24 ON time of GATE signal
Update cycle of terminal block output(T9)-OFF time
of GATE signal(T10)
ZS-HL
User’s Manual
Section6
Timing Charts
 When Measured Value of Tasks are Output Continuously
Laser beam emission OFF
ON
Internal processing
T1
T18
T21
T9
T10
OFF
ON
GATE signal
Terminal block output
TASK2
TASK3
Item
TASK4
Minimum
T1
Time during which the mea- sured value is determined
from the laser beam emission
T9
Update cycle of terminal
block output
TASK1
TASK2
Average
–
TASK3
TASK4
Maximum
Sampling cycle ×
3
Sampling cycle × update cycle
The half of update cycle of terminal block output(T9)
However, it will be fixed 140 ms if the terminal
block output period (T9) is more than 280 ms.
T18 Update cycle of terminal
block output 2
Sampling cycle × update cycle × (number of
TASKs that have been performed)
T21 Response time of GATE
signal
320 µs
T23 The data after Gate signal
OFF
Hold time
About 48 μs
Remarks
The update cycle
can be set in [I/
OSET]-[TERMINAL BLOCK][CYCLE].
When the measurement is performed
continuously and
the amount of light
is stable
Section6 I/O
T10 OFF time of GATE signal
TASK1
ZS-HL
User’s Manual
6-25
Section6
Timing Charts
 Terminal Block (ZS-RPD)
 When Judgment and Measured Values of TASK1/2/3/4 are Output
The result of terminal block output is obtained at the falling edge of GATE signal.
Laser beam emission
OFF
ON
Internal processing
T1
T21
T10
T9
OFF
ON
GATE signal
TASK* or Thresh
Terminal block output
Item
Minimum
–
TASK* or Thresh
Average
–
Maximum
Remarks
Sampling
cycle × 3
The update cycle can be set
in [I/OSET]-[TERMINAL
BLOCK]-[CYCLE].
T1
Time during which the measured
value is determined from the laser
beam emission
T9
Update cycle of terminal block out- Sampling cycle × update cycle
put
Section6 I/O
T10 OFF time of GATE signal
68 µs
T21 Response time of GATE signal
320 µs
TASK* or Thresh
When the measurement is
performed continuously and
the amount of light is stable
 When Measured Value of Tasks are Output Continuously
Laser beam emission
OFF
ON
Internal processing
T18
T1
T9
T10
T21
OFF
ON
GATE signal
Terminal block output
TASK2
TASK3
Item
TASK4
Minimum
Average
–
TASK2
TASK3
Sampling
cycle × 3
The update cycle can be set
in [I/OSET]-[TERMINAL
BLOCK]-[CYCLE].
T9
Update cycle of terminal block out- Sampling cycle × update cycle
put
68 µs
T18 Update cycle of terminal block out- Sampling cycle × update cycle ×
put 2
(number of TASKs that have been
performed)
6-26
ZS-HL
User’s Manual
320 µs
TASK1
Remarks
Time during which the measured
value is determined from the laser
beam emission
T21 Response time of GATE signal
TASK4
Maximum
T1
T10 OFF time of GATE signal
-
TASK1
When the measurement is
performed continuously and
the amount of light is stable
Section7
USB/RS-232C COMMUNICATION
Overview
7-2
USB
7-2
RS-232C
7-3
Connecting Using a USB Cable
7-4
Connection Method
7-4
Setting the Communication Specifications
7-4
Connecting Using a RS-232C Cable
7-5
Connection Method
7-5
Setting the Communication Specifications
7-6
Settings for High-Speed Digital Output
7-7
Timing Charts
7-8
Section7 USB/RS-232C COMMUNICATION
ZS-HL
User’s Manual
7-1
Section7
Overview
Overview
Using the USB port or RS-232C connector of the Sensor Controller, you can communicate
digitally with external devices such as a personal computer or programmable controller.
Compared to linear output, you can obtain high resolution, highly stable measurement
data.
Communication with external devices using USB or RS-232C is performed in RUN or
TEACH mode. Communication cannot be performed in FUN mode. Also, when a system
error occurs, the Sensor Controller receives a command externally, but does not execute
the setting commands.
Do not perform serial communication during booting up the Sensor Controller.
After output signal ENABLE is ON, start the serial communication.
If you perform serial communication with the Sensor Controller during booting up, it occurs the unexpected operation.
USB
The Sensor Controller can be connected to a personal computer, and the settings can be
changed from the personal computer using SmartMonitor ZS. In addition, the
measurement can be monitored on the personal computer.
Setting
SmartMonitor ZS
Measured value
Section7 USB/RS-232C COMMUNICATION
Personal computer
USB cable
Also, communication can be performed using non-procedural or CompoWay/F
commands.
The protocol is selected automatically, and then the Sensor Controller operates in
accordance with a input command format.
For details on formats for non-procedural and CompoWay/F commands, refer to the
“Communication Command Reference” (provided separately).
Command communication
Obtaining a measurement result
Bank switching
Zero reset
Personal computer
USB cable
Settings for USB Connection p.7-4
7-2
ZS-HL
User’s Manual
Section7
Overview
RS-232C
Connections to the programmable controller, programmable terminal, and personal
computer can be made.
Communication can be performed using non-procedural or CompoWay/F commands.
The protocol is selected automatically, and then the Sensor Controller operates in
accordance with a input command format.
For details on formats for non-procedural and CompoWay/F commands, refer to the
“Communication Command Reference” (provided separately).
Command communication
Obtaining a measurement result
Bank switching
Zero reset
Programmable controller
RS-232C cable ZS-XPT2
Settings for RS-232C Connection p.7-5
Two lines from the USB port and RS-232C connector can be used together for communication. For
example, “data confirmation/analysis” and “data collection/control, change of device setup” can be performed simultaneously.
Control by CompoWay/F
communication
Control by non-procedural communication
USB
Personal computer
[Data collection/control, change of
device setup]
• Obtain the measurement result
• Execute zero reset
• Switch bank
RS-232C
Programmable controller
Note that there are restrictions as described below for communication in which two lines are used
together.
• The command entered first becomes valid, and the command entered next is executed after processing of the first command ends.
• There are restrictions for commands that are allowed to be entered simultaneously from RS-232C and
USB. For details, refer to the “Communication Command Reference” (provided separately).
ZS-HL
User’s Manual
Section7 USB/RS-232C COMMUNICATION
[Data confirmation/analysis]
• Check the SENSING screen
• Check the measured value
• Perform logging for the measured
value
7-3
Section7
Connecting Using a USB Cable
Connecting Using a USB Cable
Connection Method
1.
Install the USB driver to a personal computer.
Installation is required only when USB is connected for the first time.
Installing the USB driver p.2-16
2.
Insert one end of the USB cable into the
USB connector of the controller.
3.
Insert one end of the USB cable into the
USB connector of the external device.
The USB cable is an accessory of the Sensor
Controller ZS-HLDC_1A. Attach ferrite cores
to both ends of the cable.
Section7 USB/RS-232C COMMUNICATION
Ferrite core
Setting the Communication Specifications
Set the communication specifications for the controller according to the communication
specifications for external devices.
 FUN Mode-[SYSTEM]-[COM]
Setting
RS-232C
LENGTH
The settings are ignored.
PARITY
STOP (STOP BIT)
BAUDRAT
DELIMIT
NODE (node No.)
7-4
Range
ZS-HL
User’s Manual
CR, LF, CR+LF (default: CR)
The settings are ignored.
Section7
Connecting Using a RS-232C Cable
Connecting Using a RS-232C Cable
Connection Method
1.
Insert one end of the RS-232C cable into
the RS-232C connector of the controller.
2.
Insert one end of the RS-232C cable into
the RS-232C connector of the external
device.
 RS-232C Cable for Connecting to Programmable Controller/
Programmable Terminal
• ZS-XPT2 (cable length: 2 m)
PT/PLC side
Fitting
1
10
1
2
6
NC
Pin No.
1
Pin No.
1
Signal name
Section7 USB/RS-232C COMMUNICATION
Controller side
3
7
4
8
5
9
Signal name
NC
SD(TXD)
2
2
SD(TXD)
RD(RXD)
3
3
RD(RXD)
RS(RTS)
4
4
RS(RTS)
CS(CTS)
5
5
CS(CTS)
NC
6
6
NC
NC
7
7
NC
NC
8
8
NC
SG(GND)
NC
FG
9
9
SG(GND)
10
Shell
Shell
FG
Note 1: Plug type connector
ZS-HL
User’s Manual
7-5
Section7
Connecting Using a RS-232C Cable
 RS-232C Cable for Connecting to a Personal Computer
• ZS-XRS2 (cable length: 2 m)
Controller side
Personal computer side (PC/AT compatible)
5 4
10
3
2
1
Fitting
1
9 8
7 6
NC
Pin No.
1
Pin No.
1
Signal name
NC
SD(TXD)
2
2
RD(RXD)
RD(RXD)
3
3
SD(TXD)
RS(RTS)
4
4
NC
CS(CTS)
5
5
SG(GND)
NC
6
6
NC
NC
7
7
RS(RTS)
NC
SG(GND)
NC
8
8
CS(CTS)
9
9
NC
Signal name
10
Note: Socket-type connector
Setting the Communication Specifications
Section7 USB/RS-232C COMMUNICATION
Set the communication specifications for the controller according to the communication
specifications for external devices.
 FUN Mode-[SYSTEM]-[COM]
Setting
RS232C
Range
LENGTH
8 BIT, 7 BIT (default value: 8 BIT)
PARITY
NONE, ODD, EVEN (default value: NONE)
STOP
(STOP BIT)
1 BIT, 2 BIT (default value: 1 BIT)
BAUDRAT
9600, 19200, 38400, 57600, 115200 (default value: 38400)
DELIMIT
CR, LF, CR+LF (default: CR)
NODE (node No.)
0 to 16
The node No. refers to the connection group No. as seen from the host
device (PLC). Not only the ZS Series but other multiple devices are connected to the PLC. The No. assigned to devices connected to a PLC
such as this is referred to as a node No.
For details on communication commands, refer to the “Communication Command Reference” (provided
separately).
For the Communication Command Reference, please contact your OMRON representative.
7-6
ZS-HL
User’s Manual
Section7
Settings for High-Speed Digital Output
Settings for High-Speed Digital Output
Of CompoWay I/F or non-procedural communication commands, if you want to use the
FlowDATA command to batch acquire data at high speed, set this setting to ON.
Note, however, that in measurement modes ([High] or [Custom]) having a short sampling
cycle, the sampling cycle changes according to the setting of this digital output.
• This setting automatically is set to ON when the graph display and logging functions of SmartMonitor
ZS are used. For example, if the mode is set to High-Speed mode at this time, the sampling cycle
becomes 1.5 times the sampling cycle.
• When a measurement mode other than [High] or [Custom] is selected, this digital output setting does
not cause the sampling cycle to change.
FUN mode-[I/O SET]-[DIGITAL]
Setting
Description
ON
(default value)
Of the communication commands, the command (FlowDATA) for high-speed batch
acquisition of data is enabled.
Set this to ON to batch acquire data at high speed using communication commands.
Note, however, that in measurement modes ([High] or [Custom]) having a short
sampling cycle, the sampling cycle becomes 1.5 times the sampling cycle when
this setting is set to ON.
OFF
Of the communication commands, the command (FlowDATA) for high-speed batch
acquisition of data is disabled.
When [High] is selected for the measurement mode, this setting automatically
turns OFF, and the sampling cycle becomes the fastest sampling cycle.
Section7 USB/RS-232C COMMUNICATION
In Multi-Task mode, set ON/OFF for each TASK.
ZS-HL
User’s Manual
7-7
Section7
Timing Charts
Timing Charts
 RS-232C
T19
Command to be received
Received
T20
Received
Command to be returned
Item
Compoway/F
T19 Command
transmission communication
time
Non-procedural
communication
T20 Response
transmission
time
Compoway/F
communication
Non-procedural
communication
T21
Average
280/communication baud rate
Remarks
These times change according
to the specifications of the
communication processing on
the personal computer side.
You can set the communication
baud rate in [SYSTEM]-[COM][BAUDRAT].
The Compoway/F communication is for commands for reading
and writing parameter areas.
(number of command characters + 1) × 10/communication
baud rate
330/communication baud rate
(number of response characters + 1) × 10/communication
baud rate
T20 of command processing time changes depending on the command. The following
lists the typical non-procedural commands.
Command
MeasureMEASURE
ment-related DATAGET
SettingDATASET
related
Processing Time
Within 10 ms
Within 10 ms
Approximately 500 ms
*Changes depending on the settings.
 USB
Section7 USB/RS-232C COMMUNICATION
7-8
T19
Command to be received
Received
T20
Received
Command to be returned
Item
T19 Command
transmission
time
T21 Response
transmission
time
T21
Average
Compoway/F
communication
Non-procedural
communication
Compoway/F
communication
Non-procedural
communication
–
(number of command characters
+ 1) × 10/communication baud
rate
–
(number of response characters +
1) × 10/communication baud rate
Remarks
These times change according
to the specifications of the
communication processing on
the personal computer side.
The communication baud rate
depends on the load status of
the personal computer; however, it has the capacity value
of 7 Mbps on average.
T20 of command processing time changes depending on the command. The following
lists the typical non-procedural commands.
Command
MeasureMEASURE
ment-related
DATAGET
SettingDATASET
related
ZS-HL
User’s Manual
Processing Time
Within 1 ms (Other than High-Speed mode)
Within 3 ms (High-Speed mode)
Within 5 ms
Approximately 500 ms
*Changes depending on the settings.
Section8
SPECIFICATIONS
DIMENSIONS
AND
EXTERNAL
Sensor Head
8-2
Specifications
8-2
External Dimensions
8-7
Adjusting Mutual Interference
8-15
Spot Diameter
8-19
Usage Width of Line Beam
8-20
Linearity Characteristic by Materials
8-21
Sensor Controller
8-40
Specifications
8-40
External Dimensions
8-42
Accessory
8-43
8-43
Extension Cable
8-44
Extension Cable (Long-Distance, Flexible Type)
8-45
RS-232C Cable
8-47
Control Link Unit
8-48
Real-Time Parallel Output Unit
8-49
ZS-HL
User’s Manual
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
Panel Mount Adapter
8-1
Section8
Sensor Head
Sensor Head
Specifications
z ZS-HLDS2T/HLDS2VT/HLDS5T/HLDS10/HLDS32/HLDS60/HLDS150
Item
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
8-2
ZS-HLDS2T
ZSHLDS
2VT
(*5)
ZS-HLDS5T
ZS-HLDS10
ZSHLDS
32
ZSHLDS
60
ZSHLDS
150
Optical system
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Regular
reflection
Diffuse
reflection
Diffuse
reflection
Diffuse
reflection
Measurement
center distance
20 mm
5.2 mm 25 mm
50 mm
44 mm
100
mm
94 mm
325
mm
600
mm
1,500
mm
Measuring
range
±1 mm
±2 mm
±5 mm
±4 mm
±20
mm
±16
mm
±175
mm
±350
mm
±500
mm
Light source
Visible semiconductor laser
(wavelength 650 nm, 1 mW max., Class 2)
Beam type
Line beam
Beam diameter
(*1)
20 µm × 1.0 mm
45 µm
× 2.2
mm
Linearity (*2)
±0.05 %F.S.
±0.2 %F.S. ±0.1 %F.S.
Resolution (*3)
0.25 µm
(average 256)
0.6 µm
(average
128)
0.25 µm (average 512)
±0.1
%F.S.
/°C
±0.01 %F.S./°C
Temperature char- ±0.01 %F.S./°C
acteristic (*4)
30 µm × 1.0 mm
Visible semiconductor laser
(wavelength 658 nm, 1 mW
max., Class 2)
60 µm × 3.5 mm
1 µm (average
64)
0.15 mm
× 12 mm
0.3 mm ×
16 mm
(at 500
mm)
1.5 mm
× 40 mm
(at 1500
mm)
±0.05 %F.S.
±0.07 %F.S.
(250 mm to
750 mm)
±0.1 %F.S.
(750 mm to
950 mm)
±0.2 %F.S.
20 µm
(average
64)
8 µm
(average 64)
(at 250 mm)
40 µm
(average 64)
(at 600 mm)
500 µm
(average
64)
Sampling cycle
110 µs (High-Speed mode), 500 µs (Standard mode), 2.2 ms (High-Resolution mode),
4.4 ms (High-Sensitivity mode)
Indicators
NEAR
indicator
Lit near the measurement center, and nearer than the measurement center distance inside the
measuring range.
Flashes when the measurement target is outside of the measuring range or when the received
light amount is insufficient.
FAR
indicator
Lit near the measurement center, and further than the measurement center distance inside the
measuring range.
Flashes when the measurement target is outside of the measuring range or when the received
light amount is insufficient.
ZS-HL
User’s Manual
Section8
Sensor Head
Item
ZSHLDS
2VT
(*5)
ZS-HLDS2T
ZS-HLDS5T
ZS-HLDS10
ZSHLDS
32
Operating ambi- Illumination on received light surface 3,000 lx or less (incandescent light)
ent illumination
ZSHLDS
60
ZSHLDS
150
Illumination
on
receive
d light
surface
1,000 lx
or less
(incandescent
light)
Illumination on
received
light surface
500 lx or
less
(incandescent
light)
Ambient temperature
Operating: 0 to +50 °C, Storage: -15 to +60 °C (with no icing or condensation)
Ambient humidity
Operating and storage: 35 % to 85 % (with no condensation)
Degree of protection
IP64 (IEC60529)
Vibration resistance (destructive)
10 to 150 Hz, 0.7 mm double amplitude, 80 min each in X, Y, and Z directions
Shock resistance (destructive)
150 m/s2 3 times each in six directions (up/down, left/right, forward/backward)
IP67
When the cable length is 0.5 m:
(IEC6052 IP66 (IEC60529)
9)
When the cable length is 2 m:
IP67 (IEC60529)
Materials
Case: aluminum die-cast, front cover: glass
Cable length
0.5 m, 2 m
Weight
Approx. 350 g
Approx. 600 g
IP66 (IEC60529)
Approx. 800 g
F.S.: Full scale of measurement
Model
ZS-HLDS2T
Diffusive reflection
SUS block
Mirror reflection
Glass
ZS-HLDS2VT
-
Glass
ZS-HLDS5T
White alumina ceramic
Glass
ZS-HLDS10
White alumina ceramic
ZS-HLDS32
White alumina ceramic
-
ZS-HLDS60/HLDS150
White alumina ceramic
-
(*3) This is the “peak-to-peak” displacement conversion value of the displacement output in the measurement
center distance when High-Resolution mode and the average number in the table are set (For ZS-HLDS60,
the maximum resolution at 250 mm is also included). The following lists the workpieces.
Model
ZS-HLDS2T
Diffusive reflection
SUS block
Mirror reflection
Glass
ZS-HL
User’s Manual
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
(*1) Defined as 1/e2 (13.5 %) of the center optical intensity in the measurement center distance. The beam
diameter is sometimes influenced by the ambient conditions of the workpiece such as leaked light from the
main beam.
(*2) This is the error on the measured value with respect to an ideal straight line. Linear curve may change
according to the workpiece. The following lists the workpieces.
8-3
Section8
Sensor Head
Model
Diffusive reflection
Mirror reflection
ZS-HLDS2VT
-
Glass
ZS-HLDS5T
White alumina ceramic
Glass
ZS-HLDS10
White alumina ceramic
ZS-HLDS32
White alumina ceramic
-
ZS-HLDS60/HLDS150
White alumina ceramic
-
(*4) Value obtained when the sensor part and object part are fixed with an aluminum jig. (typical example)
(*5) Long distance extension of the ZS-HLDS2V Sensor Head (connection to the ZS-XC_ _CR, ZS-XC02D,
ZS-XEQ) is not possible.
z ZS-LD10GT/LD15GT/LD20T/LD20ST/LD40T
Item
Optical system
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
8-4
ZSZSZS-LD20T
ZS-LD20ST
ZS-LD40T
LD10GT LD15GT
Regular Regular Regular Diffuse
Regular Diffuse
Regular Diffuse
reflection reflection reflection reflection reflection reflection reflection reflection
Measurement center
10 mm
15 mm
20 mm
6.3 mm 20 mm
6.3 mm 40 mm
30 mm
distance
±2.5 mm ±2 mm
Measuring range
±0.5 mm ±0.75 mm ±1 mm
Light source
Visible semiconductor laser (wavelength 650 nm, 1 mW max., Class 2)
Beam type
Line beam
Spot beam
Line beam
Beam diameter (*1)
25 × 900 µm
25 × 900 µm
ø 25 µm
35 × 2,000 µm
Linearity (*2)
±0.1 %F.S.
Resolution (*3)
0.25 µm
0.4 µm
Temperature character- 0.04 %F.S./°C
0.02 %F.S./°C
istic (*4)
Sampling cycle
110 µs (High-Speed mode), 500 µs (Standard mode), 2.2 ms (High-Resolution mode),
4.4 ms (High-Sensitivity mode)
IndicaNEAR
Lit near the measurement center distance, and nearer than the measurement center
tors
indicator
distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the
received light amount is insufficient.
FAR
Lit near the measurement center distance, and further than the measurement center
indicator
distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the
received light amount is insufficient.
Operating ambient illu- Illumination on received light surface 3,000 lx or less (incandescent light)
mination
Ambient temperature
Operating: 0 to +50 °C, Storage: -15 to +60 °C (with no icing or condensation)
Ambient humidity
Operating and storage: 35 % to 85 % (with no condensation)
Degree of protection
IP40 (IEC60529)
Cable length 0.5 m: IP66, cable length 2 m: IP67 (IEC60529)
Vibration resistance
10 to 150 Hz, 0.7 mm double amplitude, 80 min each in X, Y, and Z directions
(destructive)
Shock resistance
150m/s2 3 times each in six directions (up/down, left/right, forward/backward)
(destructive)
Materials
Case: aluminum die-cast, front cover: glass
Cable length
0.5 m, 2 m
Weight
Approx. 350 g
F.S.: Full scale of measurement
ZS-HL
User’s Manual
Section8
Sensor Head
(*1) Defined as 1/e2 (13.5 %) of the center optical intensity in the measurement center distance. The beam diameter is
sometimes influenced by the ambient conditions of the workpiece such as leaked light from the main beam.
(*2) This is the error on the measured value with respect to an ideal straight line. The standard workpiece is
white alumina ceramic (glass in the case of the regular reflection mode). Linearity may change according to
the workpiece.
(*3) This is the “peak-to-peak” displacement conversion value of the displacement output in the measurement
center distance when the number of samples to average is set to 128, and the measuring mode is set to
High-Resolution mode. The workpiece is white alumina ceramics in the diffuse reflection mode and glass in
the regular reflection mode.
(*4) This is the value obtained in the measurement center distance when the sensor and workpiece are fixed by
an aluminum jig. (typical example)
z ZS-LD50/LD50S/LD80/LD130
Item
Optical system
ZS-LD50
ZS-LD50S
ZS-LD80
ZS-LD130
Diffuse
Regular Diffuse
Regular Diffuse
Regular Diffuse
Regular
reflection reflection reflection reflection reflection reflection reflection reflection
Measurement center
distance
Measuring range
Light source
Beam type
Beam diameter (*1)
Linearity (*2)
Resolution (*3)
Temperature characteristic (*4)
Sampling cycle
50 mm
Indicators
NEAR
indicator
Operating ambient illumination
Ambient temperature
Ambient humidity
Degree of protection
Vibration resistance
(destructive)
Shock resistance
(destructive)
Materials
Cable length
Weight
50 mm
47 mm
80 mm
78 mm
130 mm
±5 mm
±4 mm
±5 mm
±4 mm
±15 mm ±14 mm ±15 mm ±12 mm
Visible semiconductor laser (wavelength 650 nm, 1 mW max., Class 2)
Line beam
Spot beam
Line beam
60 × 900 µm
ø 50 µm
60 × 900 µm
600 × 70 µm
±0.1 %F.S.
±0.25 %F.S.
0.8 µm
2 µm
3 µm
0.02 %F.S./°C
0.01 %F.S./°C
0.02 %F.S./°C
110 µs (High-Speed mode), 500 µs (Standard mode), 2.2 ms (High-Resolution mode),
4.4 ms (High-Sensitivity mode)
Lit near the measurement center distance, and nearer than the measurement center
distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the
received light amount is insufficient.
Lit near the measurement center distance, and further than the measurement center
distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the
received light amount is insufficient.
Illumination on received light surface 3,000 lx or less (incandes- Illumination on
cent light)
received light surface 2,000 lx or less
(incandescent light)
Operating: 0 to +50 °C, Storage: -15 to +60 °C (with no icing or condensation)
Operating and storage: 35 % to 85 % (with no condensation)
Cable length 0.5 m: IP66, cable length 2 m: IP67 (IEC60529)
10 to 150 Hz, 0.7 mm double amplitude, 80 min each in X, Y, and Z directions
150m/s2 3 times each in six directions (up/down, left/right, forward/backward)
Case: aluminum die-cast, front cover: glass
0.5 m, 2 m
Approx. 350 g
ZS-HL
User’s Manual
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
FAR
indicator
47 mm
8-5
Section8
Sensor Head
F.S.: Full scale of measurement
(*1) Defined as 1/e2 (13.5 %) of the center optical intensity in the measurement center distance. The beam diameter
is sometimes influenced by the ambient conditions of the workpiece such as leaked light from the main beam.
(*2) This is the error on the measured value with respect to an ideal straight line. The standard workpiece is
white alumina ceramic (In the regular reflection mode on ZS-LD50/LD50S, the standard workpiece is
glass.) Linearity may change according to the workpiece.
(*3) This is the “peak-to-peak” displacement conversion value of the displacement output in the measurement
center distance when the number of samples to average is set to 128, and the measuring mode is set to
High-Resolution mode. The standard workpiece is white alumina ceramic (In the regular reflection mode on
ZS-LD50/LD50S, the standard workpiece is glass).
(*4) This is the value obtained in the measurement center distance when the sensor and workpiece are fixed by
an aluminum jig. (typical example)
 ZS-LD200/LD350S
Item
Optical system
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
8-6
Measurement center
distance
Measuring range
Light source
Beam type
Beam diameter (*1)
Linearity (*2)
Resolution (*3)
Temperature characteristic (*4)
Sampling cycle
Indicators
NEAR
indicator
FAR
indicator
Operating ambient illumination
Ambient temperature
Ambient humidity
Degree of protection
Vibration resistance
(destructive)
Shock resistance
(destructive)
Materials
ZS-HL
User’s Manual
Diffuse reflection
200 mm
ZS-LD200
Regular reflection
200 mm
ZS-LD350S
Diffuse reflection
350 mm
±50 mm
±48 mm
±135 mm
Visible semiconductor laser (wavelength 650 nm, 1 mW max., Class 2)
Line beam
Spot beam
100 × 900 µm
ø 240 µm
±0.1 %F.S.
±0.25 %F.S.
±0.1 %F.S.
5 µm
20 µm
0.02 %F.S./°C
0.04 %F.S./°C
110 µs (High-Speed mode), 500 µs (Standard mode), 2.2 ms (High-Resolution mode),
4.4 ms (High-Sensitivity mode)
Lit near the measurement center distance, and nearer than the measurement center
distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the
received light amount is insufficient.
Lit near the measurement center distance, and further than the measurement center
distance inside the measuring range.
Flashes when the measurement target is outside of the measuring range or when the
received light amount is insufficient.
Illumination on received light surface 3,000 lx or less (incandescent light)
Operating: 0 to +50 °C, Storage: -15 to +60 °C (with no icing or condensation)
Operating and storage: 35 % to 85 % (with no condensation)
Cable length 0.5 m: IP66, cable length 2 m: IP67 (IEC60529)
10 to 150 Hz, 0.7 mm double amplitude, 80 min each in X, Y, and Z directions
150m/s2 3 times each in six directions (up/down, left/right, forward/backward)
Case: aluminum die-cast, front cover: glass
Section8
Sensor Head
Item
Cable length
Weight
ZS-LD200
ZS-LD350S
0.5 m, 2 m
Approx. 350 g
F.S.: Full scale of measurement
(*1) Defined as 1/e2 (13.5 %) of the center optical intensity in the measurement center distance. The beam
diameter is sometimes influenced by the ambient conditions of the workpiece such as leaked light from the
main beam.
(*2) This is the error on the measured value with respect to an ideal straight line. The standard workpiece is
white alumina ceramic. Linearity may change according to the workpiece.
(*3) This is the “peak-to-peak” displacement conversion value of the displacement output in the measurement
center distance when the number of samples to average is set to 128, and the measuring mode is set to the
High-Resolution mode. The standard workpiece is white alumina ceramic.
(*4) This is the value obtained in the measurement center distance when the sensor and workpiece are fixed by
an aluminum jig. (typical example)
External Dimensions
 ZS-HLDS2T
(Unit: mm)
20
4
2- 4.5 mm mounting hole
Operation indicator
65
57
57 0.1
4
2-M4
32
20
4
Receiver section
Reference surface
26.4
Reception axis
12
Measuring center
6.5
65
20
25
56.5
25
Emission axis
Reference
Emitter section surface
Mounting hole dimensions
18.1
20
30.1
Vinyl insulated round cable 6.8 mm
Standard length: 0.5 m, 2 m
42
77.2
51.7
Measuring
center
Emission axis
51.7 0.1
50
78.4
49.3
24.1
13.8
Reception axis
(Unit: mm)
2-M4
24.1 0.1
5.2
4.7
Mounting hole dimensions
ZS-HL
User’s Manual
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
• When used in diffuse reflection (ZS-HLDS2T)
8-7
Section8
Sensor Head
 ZS-HLDS2VT
Measuring center
2- 4.5 mm mounting hole
L (Note 1)
35
15.30
(Unit: mm)
65
8
Reference
surface
4
4.5
8
56 0.1
27.1
30
45
56
65
Emitter
section
Emitter axis
Reception axis
Receiver
section
A (Note 1)
Range
indicator
8
8
4.5
56 0.1
4
M
2Mounting hole dimensions
56
8.5
30.1
42
Vinyl insulated round cable 6.2 mm
Standard length: 0.5 m, 2 m
Connector
Note: L25, A34.5
 ZS-HLDS5T/HLDS10
Reference surface
36
18
(Unit: mm)
Optical axis
4
Operation indicator
8
25
3-M4
9.5
70 0.1
9.5 0.1
69 0.1
(5)
69
100
82
25
9.5
13 Reception
Emitter axis
section A (Note 1) Reference
surface
Receiver
section 3- 4.5 mm mounting hole
92.1
46
16.9
45.1
Mounting hole dimensions
30.1
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
8-8
Emission axis
Measuring center
16.4
22.7
80
72
70
(15)
L (Note 1)
Vinyl insulated round cable 6.8 mm
Standard length: 0.5 m, 2 m
42
(Note 1): In the case of ZS-HLDS5T, L=50, A=30
In the case of ZS-HLDS10, L=100, A=25
ZS-HL
User’s Manual
Section8
Sensor Head
• When used in regular reflection (ZS-HLDS5T)
(Unit: mm)
98.5
67.6
10.3
27
3- 4.5 mm mounting hole
67.6 0.1
27 0.1
3-M4
64.2 0.1
64.2
Measuring
center
110.9
15
30
28.8
18.1
23.1
18.6
Emission axis
Reception axis
18.1 0.1
44.1
Mounting hole dimensions
• When used in regular reflection (ZS-HLDS10)
95.9
68.3
9.3
2- 4.5 mm mounting hole
68.3 0.1
24.2 0.1
25
65.3
12.5
Reception axis
3-M4
65.3 0.1
Emission axis
109.6
Measuring
center
15.2
23.5
37.7
15.6
24.2
(Unit: mm)
15.2 0.1
94.1
Mounting hole dimensions
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
ZS-HL
User’s Manual
8-9
Section8
Sensor Head
 ZS-HLDS32/HLDS60/HLDS150
Optical axis
38
19
Reference surface
75
65
47
L (Note 1)
Receiver section
22.7
(Unit: mm)
5
Operation indicator
8
9.5
28
46
Reception axis
88.75
(5)
25
16.4
Mounting hole dimensions
2
30.1
57
Emitter section
Vinyl insulated round cable 6.8 mm
Standard length: 0.5 m, 2 m
42
(Note 1): In the case of ZS-HLDS60, L=600, A=7
In the case of ZS-HLDS150, L=1500, A=3
 ZS-LD10GT
105
(Unit: mm)
8.5
42
30
15
Connector
30
56
1010
25
Reference
surface
96 0.1
26 0.1
3- 4.5 mounting hole
90
Reception
axis
Emission axis
Measuring
center
ZS-HL
User’s Manual
36
4
26
16
4
M
3-
46 0.1
76 0.1
40
Mounting hole dimensions
85
30
12.50
55
45
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
8-10
17.50
Vinyl insulated round cable 6.2 mm
Standard length: 0.5m, 2m
Emitter
section
3-M4
45 0.1
120
45
115.06
Emission axis
Reference
surface
A (Note 1)
13
102
65 0.1
Measuring
center
Receiver
section
Section8
Sensor Head
 ZS-LD15GT
115
(Unit: mm)
8.5
42
40
25
Connector
12
45
35
15
5
11.5
11.5
16.5
24
44
84
74
55
44
Vinyl insulated round cable 6.2 mm
Standard length: 0.5 m, 2 m
90
Reception
axis
4- 4.5 mounting hole
4- 8 (counter bored 4)
M
4.
50
45
8
Mounting hole dimensions
30
20
20 0.1
40
4-
29 0.1
C
30 0.1
2-
Reference
surface
Emission
axis
Measuring
center
Emitter
section
Receiver
section
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
ZS-HL
User’s Manual
8-11
Section8
Sensor Head
 ZS-LD20T/LD20ST/LD40
2- 4.5 mm mounting hole
L (Note 1)
35
15.30
8
Reference
surface
8
4
4.5
56
Measuring center
30
(Unit: mm)
65
27.1
45
56
65
Emitter section
Emission axis
56
8
4.5
Receiver section
A (Note 1)
0.1
Range indicator
8
Reception axis
4
2-M
Mounting hole dimensions
56
8.5
30.1
42
Vinyl insulated round cable 6.2 mm
Standard length: 0.5 m, 2 m
Connector
(Note 1): In the case of ZS-LD20T/LD20ST, L=20, A=45
In the case of ZS-LD40T, L=40, A=32
• When used in diffuse reflection (ZS-LD20T/LD20ST)
(Unit: mm)
77.8
4.7
6.3
73.2
45
Emission axis
73.2
4
2-M
19.3
20
30.3
Reception axis
30.3
(30
37.6
)
56.4
5
22.
Measuring center
15.3
Mounting hole dimensions
2-
4.5
mm
Mo
69.3
38.4
41.7
(Unit: mm)
gh
u
69.3
Reception axis
n
nti
4
M
2-
38.4
30
ole
73.9
58.4
4.6
32 16
Mounting hole dimensions
11.882
ZS-HL
User’s Manual
15.2
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
8-12
• When used in diffuse reflection (ZS-LD40T)
Emission axis
Measuring center
0.1
Section8
Sensor Head
 ZS-LD50/LD50S/LD80/LD130/LD200/LD350S
15.3
2- 4.5 mm mounting hole
35
11
L (Note 1)
Reference
surface
Measuring center
65
(Unit: mm)
4
8
4.5
8
56
0.1
27.1
Emitter
section
Emission axis
45
56
65
56 0.1
Range indicator
8
Reception axis
8
4.5
Receiver section
A (Note 1)
4
2-M
Mounting hole dimensions
56
8.5
42
30.1
Connector
Note 1: In the case of ZS-LD50/LD50S, L=50, A=28
In the case of ZS-LD80, L=80, A=15
In the case of ZS-LD130, L=130, A=12
In the case of ZS-LD200, L=200, A=8
In the case of ZS-LD350S, L=350, A=5
Vinyl insulated round cable 6.2 mm
Standard length: 0.5 m, 2 m
• When used in regular reflection (ZZS-LD50/LD50S)
(Unit: mm)
16.7
55.4
42.6
1.610
47
(11)
25
42.6
M4
2-
66.8
66.8
71.4
Reception
axis
Reference
surface
Mounting hole dimensions
12.50
• When used in regular reflection (ZS-LD80)
(Unit: mm)
Reception
axis
Reference surface
48.2
0.1
4
0.1
2-M
4.6
42.7
(11)
Measuring
center
15
7.50
Emission
axis
57.8
48.2
62.8
11.9
m
m hole
5
4. ing
t
2- oun
m
62.8
67.4
78
Mounting hole dimensions
7.50
ZS-HL
User’s Manual
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
4.6
Measuring
center
41.2
0
.5
12
Emission
axis
mm ole
4.5 ing h
t
2- oun
m
8-13
Section8
Sensor Head
• When used in regular reflection (ZS-LD130)
ole
128.5
2-
11
mo
4.
49.8
2- M
Reference surface
4.5
6
61.6
Reception
axis
66.1
61.5
35.2
u
m
5m
49.8
6
Measuring
center
n
nti
12
Emission axis
(Unit: mm)
gh
58.4
10.4
Mounting hole dimensions
• When used in regular reflection (ZS-LD200)
(Unit: mm)
200
11
Reception
axis
Reference
surface
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
8-14
ZS-HL
User’s Manual
4
4.5
59.8
64.3
35
8
Measuring
center
4
Emission
axis
m
m le
5 ho
4. ing
t
2- oun
m
52
0.1
4
M
20.1
59.2
52
59.8
8.4
Mounting hole
dimensions
4
Section8
Sensor Head
Adjusting Mutual Interference
When using two or more Sensor Heads next to each other, mutual interference will not
occur if other beam spots are outside the shaded areas in the following diagrams.
- ZS-HLDS2T
- ZS-HLDS5T
(Unit: mm)
(Unit: mm)
1.2
44.5
2
2.3
1.3
55.5
2.2
2.2
2
8
- ZS-HLDS2VT
11
(Unit: mm)
22.8
27.2
9
6
8
9
7
2
4
2
- ZS-HLDS32
- ZS-HLDS10
(Unit: mm)
150
535
79
3
3
20
58
28
4
375
42
8
200
9
14
ZS-HL
User’s Manual
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
121
(Unit: mm)
8-15
Section8
Sensor Head
- ZS-HLDS60
- ZS-HLDS150
1000
1000
(Unit: mm)
2000
215
985
(Unit: mm)
280
10
23
1000
770
65
40
26
23
275
33
625
- ZS-LD20T/LD20ST
75
- ZS-LD40T
1.5
3
5
10
3.5
3.5
35
2
(Unit: mm)
45
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
8-16
22
18
(Unit: mm)
4
6
ZS-HL
User’s Manual
2
4
Section8
Sensor Head
- ZS-LD50/LD50S
- ZS-LD80
(Unit: mm)
61
2.5
102
42
59
(Unit: mm)
2
41
17
13
4
2
18
11 9.5
- ZS-LD130
6
2
- ZS-LD200
8
142
275
107
(Unit: mm)
3
14.5
133
58
20
3
12
22
4
10
36
ZS-HL
User’s Manual
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
165
(Unit: mm)
8-17
Section8
Sensor Head
- ZS-LD350S
201
201
590
(Unit: mm)
15
30
389
26
11
84
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
8-18
ZS-HL
User’s Manual
45
Section8
Sensor Head
Spot Diameter
Measuring range
Far
Measuring center
Measuring center distance
Near
Beam
diameter
Line beams
Beam width
Spot beams
Beam diameter
• ZS-HLDS Series
Beam diameter × beam width (µm)
HLDS2T
HLDS2VT
HLDS5T
HLDS10
Near
90 × 1,000 75 × 2,200 260 × 1,000
Measurement
center
20 × 1,000 45 × 2,200
30 × 1,000
60 × 3500
Far
90 × 1,000 75 × 2,200 260 × 1,000
500 × 3500
HLDS32
500 × 3500 800 × 8000
HLDS60
HLDS150
960 ×
13,000
1,700 ×
33,000
700 ×
10,000
300 ×
21,000
1,500 ×
40,000
2000 ×
12,000
1600 ×
32,000
5,000 ×
60,000
• ZS-LD Series (Line Beam Type)
Beam diameter × beam width (µm)
LD10GT
LD15GT
LD20T
LD40T
LD50
LD80
LD200
LD130
65 × 900 50 × 900 60 × 900 90 × 2,000
90 × 900 300 × 900 430 × 900 220 × 620
Measurement
center
25 × 900 25 × 900 25 × 900 35 × 2,000
60 × 900
Far
65 × 900 50 × 900 60 × 900 100 × 2,000 230 × 900 330 × 900 430 × 900 200 × 570
60 × 900 100 × 900
70 × 600
• ZS-LD Series (Spot Beam Type)
LD20ST
LD50S
LD350S
Near
ø 50 µm
ø 110 µm
ø 370 µm
Measurement
center
ø 25 µm
ø 50 µm
ø 240 µm
Far
ø 40 µm
ø 110 µm
ø 490 µm
ZS-HL
User’s Manual
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
Near
8-19
Section8
Sensor Head
Usage Width of Line Beam
Depending on the measurement mode, the beam width used for the actual measurement differs.
When you use the [CUSTOM] menu, you can specify the setting for performing sensing for the entire
area of the line beam.
Width of
entire beam
Width of beam in actual use
• ZS-HLDS Series
Beam width
HLDS2T HLDS2VT HLDS5T HLDS10 HLDS32 HLDS60 HLDS150
Entire width of beam (mea1,000 2,200 1,000 3,500 1,000 21,000 40,000
surement center)
µm
µm
µm
µm
µm
µm
µm
Width of beam in High-Speed mode (2 lines) 10 µm 30 µm 25 µm 70 µm 360 µm 525 µm 1,143
actual use
µm
Standard mode (9 lines)
45 µm 135 µm 113 µm 315 µm 1,620 2,363 5,144
µm
µm
µm
High-Resolution/High-Sen- 200 µm 600 µm 500 µm 1,400 7,200 10,500 22,860
sitivity mode (40 lines)
µm
µm
µm
µm
When you want The number of lines that
200
150
80
100
55
80
70
to use the entire should be set in the [CUSlines
lines
lines
lines
lines
lines
lines
width of beam
TOM] menu
EXPOSE
11.2 ms 8.4 ms 4.48 ms 5.6 ms 3.08 m 4.48 ms 3.92 ms
• ZS-LD Series
Width of beam
in actual use
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
8-20
Entire width of beam (measurement center)
High-Speed mode (2 lines)
Standard mode (9 lines)
High-Resolution/High-Sensitivity mode (40 lines)
When you want Number of lines that should
to use the entire be set in the [CUSTOM]
beam width
menu
Exposure time
Width of beam
in actual use
Entire width of beam (measurement center)
High-Speed mode (2 lines)
Standard mode (9 lines)
High-Resolution/High-Sensitivity mode (40 lines*)
When you want Number of lines that should
to use the entire be set in the [CUSTOM]
beam width
menu
Exposure time
*
ZS-HL
For ZS-LD130/LD200/LD350S, 20 lines.
User’s Manual
Beam width
LD20T
LD40T
900 µm 2,000 µm
LD10GT
900 µm
LD15GT
900 µm
10 µm
45 µm
200 µm
12 µm
55 µm
240 µm
12 µm
55 µm
240 µm
20 µm
90 µm
400 µm
26 µm
120 µm
520 µm
200 lines
150 lines
150 lines
200 lines
70 lines
11.2 ms
8.4 ms
8.4 ms
11.2 ms
3.9 ms
LD80
900 µm
Beam width
LD130
600 µm
LD200
900 µm
45 µm
200 µm
900 µm
56 µm
250 µm
560 µm
90 µm
400 µm
900 µm
40 lines
22 lines
20 lines
2.2 ms
1.2 ms
1.1 ms
LD50
900 µm
Section8
Sensor Head
Linearity Characteristic by Materials
 ZS-HLDS2T (mode: High-Resolution)
Error (%.F.S.)
 Regular reflection
Inclination angle 0°
0.6
0.4
0.2
Inclination angle 0°
0.0
-0.2
Glass
-0.4
Mirror
-0.6
19.0
19.5
20.0
20.5
21.0
Distance (mm)
Error (%.F.S.)
Error (%.F.S.)
Inclination angle Vertical +0.5°
0.6
0.4
0.2
Inclination angle +0.5°
Glass
-0.4
Mirror
20.0
20.5
21.0
Distance (mm)
Inclination angle Vertical -0.5°
0.4
0.2
-0.6
19.0
Inclination angle -0.5°
Error (%.F.S.)
Error (%.F.S.)
19.5
0.2
0.0
-0.2
20.5
21.0
Distance (mm)
Inclination angle -0.5°
Glass
-0.4
Mirror
20.0
20.5
21.0
Distance (mm)
-0.6
19.0
19.5
20.0
20.5
21.0
Distance (mm)
ZS-HL
User’s Manual
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
Mirror
19.5
20.0
0.4
-0.2
-0.6
19.0
19.5
Inclination angle Horizontal -0.5°
0.6
0.0
Glass
Glass
-0.4
Mirror
-0.4
Inclination angle +0.5°
0.2
-0.2
-0.2
0.6
0.4
0.0
0.0
-0.6
19.0
Inclination angle Horizontal +0.5°
0.6
8-21
Section8
Sensor Head
Error (%.F.S.)
 Diffuse reflection
Inclination angle 0°
0.3
0.2
Inclination angle 0°
0.1
0.0
White ceramic
Black rubber
SUS304
Aluminum
-0.1
-0.2
4.7
5.2
5.7
6.2
Distance (mm)
Inclination angle Vertical +30°
0.3
Error (%.F.S.)
Error (%.F.S.)
-0.3
4.2
0.2
0.1
Inclination angle +30°
0.0
4.7
5.2
-0.3
4.2
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
8-22
ZS-HL
User’s Manual
-1.2
4.2
Inclination angle Vertical -30°
Inclination angle -30°
White ceramic
Black rubber
SUS304
Aluminum
1.2
4.7
5.2
5.7
6.2
Distance (mm)
Inclination angle Horizontal -30°
0.9
0.6
Inclination angle -30°
0.3
0.0
0.0
-0.2
Inclination angle +30°
-0.9
5.7
6.2
Distance (mm)
0.1
-0.1
0.3
-0.6
Error (%.F.S.)
Error (%.F.S.)
0.2
0.6
-0.3
White ceramic
Black rubber
SUS304
Aluminum
-0.2
0.3
0.9
0.0
-0.1
-0.3
4.2
Inclination angle Horizontal +30°
1.2
-0.3
White ceramic
Black rubber
SUS304
Aluminum
4.7
-0.6
-0.9
5.2
5.7
6.2
Distance (mm)
-1.2
4.2
White ceramic
Black rubber
SUS304
Aluminum
4.7
5.2
5.7
6.2
Distance (mm)
Section8
Sensor Head
 ZS-HLDS2VT (mode: High-Resolution)
 Regular reflection
Inclination angle Vertical +0.5°
0.20
Inclination angle 0°
Inclination angle Vertical +1°
0.20
Inclination angle +0.5°
0.00
0.00
Mirror
Inclination angle +1°
24
25
26
27
Distance (mm)
-0.40
23
Inclination angle Vertical -0.5°
0.20
Inclination angle -0.5°
Glass
Mirror
24
25
26
27
Distance (mm)
Inclination angle Vertical -1°
Error (%.F.S.)
0.40
0.40
0.20
Inclination angle -1°
0.00
0.00
-0.20
Glass
-0.40
23
Mirror
24
25
26
27
Distance (mm)
Inclination angle Horizontal +0.5°
0.40
-0.20
-0.40
23
0.20
Inclination angle +0.5°
Glass
Mirror
24
25
26
27
Distance (mm)
Inclination angle Horizontal +1°
Error (%.F.S.)
25
26
27
Distance (mm)
0.20
-0.20
0.40
0.20
Inclination angle +1°
0.00
0.00
-0.20
Glass
24
25
26
27
Distance (mm)
Inclination angle Horizontal -0.5°
0.40
0.20
Inclination angle -0.5°
0.00
Mirror
24
25
26
27
Distance (mm)
Inclination angle Horizontal -1°
0.40
Inclination angle -1°
0.20
0.00
-0.20
-0.40
23
-0.40
23
Glass
Glass
Mirror
24
25
26
27
Distance (mm)
-0.20
-0.40
23
Glass
Mirror
24
25
26
27
Distance (mm)
ZS-HL
User’s Manual
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
-0.40
23
Mirror
-0.20
Error (%.F.S.)
24
Glass
-0.40
23
Error (%.F.S.)
Mirror
0.40
0.00
-0.20
Error (%.F.S.)
Glass
Error (%.F.S.)
-0.20
-0.40
23
0.40
Error (%.F.S.)
Error (%.F.S.)
Error (%.F.S.)
Inclination angle 0°
0.40
8-23
Section8
Sensor Head
 ZS-HLDS5T (mode: High-Resolution)
Error (%.F.S.)
 Diffuse reflection
Inclination angle 0°
0.4
0.2
Inclination angle 0°
0.0
White ceramic
Black rubber
SUS304
Aluminum
-0.2
47.0
49.0
51.0
53.0
55.0
Distance (mm)
Inclination angle Vertical +45°
0.4
Error (%.F.S.)
Error (%.F.S.)
-0.4
45.0
0.2
Inclination angle +45°
0.0
Inclination angle +45°
47.0
49.0
51.0
0.2
Inclination angle -45°
White ceramic
Black rubber
SUS304
Aluminum
-0.2
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
User’s Manual
47.0
49.0
51.0
53.0
55.0
Distance (mm)
Inclination angle Horizontal -45°
0.4
0.2
Inclination angle -45°
0.0
0.0
-0.4
45.0
-0.4
45.0
53.0
55.0
Distance (mm)
Inclination angle Vertical -45°
0.4
White ceramic
Black rubber
SUS304
Aluminum
-0.2
Error (%.F.S.)
Error (%.F.S.)
-0.4
45.0
ZS-HL
0.2
0.0
White ceramic
Black rubber
SUS304
Aluminum
-0.2
8-24
Inclination angle Horizontal +45°
0.4
47.0
49.0
51.0
53.0
55.0
Distance (mm)
White ceramic
Black rubber
SUS304
Aluminum
-0.2
-0.4
45.0
47.0
49.0
51.0
53.0
55.0
Distance (mm)
Section8
Sensor Head
Error (%.F.S.)
 Regular reflection
Inclination angle 0°
0.4
0.2
Inclination angle 0°
0.0
-0.2
Glass
Mirror
42.0
44.0
46.0
48.0
Distance (mm)
Inclination angle Vertical +0.5°
0.4
Error (%.F.S.)
Error (%.F.S.)
-0.4
40.0
0.2
Inclination angle +0.5°
0.0
0.2
Inclination angle +0.5°
0.0
-0.2
-0.2
Glass
44.0
0.2
Inclination angle -0.5°
44.0
46.0
48.0
Distance (mm)
Inclination angle Horizontal -0.5°
0.4
0.2
42.0
Inclination angle -0.5°
0.0
0.0
-0.2
-0.2
-0.4
40.0
-0.4
40.0
46.0
48.0
Distance (mm)
Inclination angle Vertical -0.5°
0.4
Glass
Mirror
Mirror
42.0
Error (%.F.S.)
-0.4
40.0
Error (%.F.S.)
Inclination angle Horizontal +0.5°
0.4
Glass
Glass
Mirror
42.0
44.0
46.0
48.0
Distance (mm)
Mirror
-0.4
40.0
42.0
44.0
46.0
48.0
Distance (mm)
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
ZS-HL
User’s Manual
8-25
Section8
Sensor Head
 ZS-HLDS10 (mode: High-Resolution)
Error (%.F.S.)
 Diffuse reflection
Inclination angle 0°
0.4
0.2
Inclination angle 0°
0.0
White ceramic
Black rubber
SUS304
Aluminum
-0.2
91.0
101.0
111.0
121.0
Distance (mm)
Inclination angle Vertical +45°
0.4
Error (%.F.S.)
Error (%.F.S.)
-0.4
81.0
0.2
0.0
101.0
0.2
Inclination angle -45°
White ceramic
Black rubber
SUS304
Aluminum
-0.2
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
User’s Manual
91.0
101.0
111.0
121.0
Distance (mm)
Inclination angle Horizontal -45°
0.4
0.2
Inclination angle -45°
0.0
0.0
-0.4
81.0
-0.4
81.0
111.0
121.0
Distance (mm)
Inclination angle Vertical -45°
0.4
White ceramic
Black rubber
SUS304
Aluminum
-0.2
Error (%.F.S.)
Error (%.F.S.)
Inclination angle +45°
-0.4
91.0
81.0
ZS-HL
Inclination angle +45°
0.2
0.0
White ceramic
Black rubber
SUS304
Aluminum
-0.2
8-26
Inclination angle Horizontal +45°
0.4
91.0
101.0
111.0
121.0
Distance (mm)
White ceramic
Black rubber
SUS304
Aluminum
-0.2
-0.4
81.0
91.0
101.0
111.0
121.0
Distance (mm)
Section8
Sensor Head
Error (%.F.S.)
 Regular reflection
Inclination angle 0°
0.4
0.2
Inclination angle 0°
0.0
-0.2
Glass
Mirror
-0.4
83.0
88.0
93.0
98.0
103.0
Distance (mm)
Inclination angle Vertical +0.5°
0.4
Error (%.F.S.)
Error (%.F.S.)
78.0
0.2
Inclination angle +0.5°
0.0
Inclination angle Horizontal +0.5°
0.4
0.2
Inclination angle +0.5°
0.0
-0.2
-0.2
Glass
Glass
Mirror
Mirror
-0.4
-0.4
83.0
88.0
93.0
98.0
103.0
Distance (mm)
78.0
Inclination angle Vertical -0.5°
0.4
Error (%.F.S.)
Error (%.F.S.)
78.0
0.2
Inclination angle -0.5°
0.0
83.0
88.0
93.0
98.0
103.0
Distance (mm)
Inclination angle Horizontal -0.5°
0.4
0.2
Inclination angle -0.5°
0.0
-0.2
Glass
-0.2
Glass
Mirror
-0.4
Mirror
-0.4
78.0
83.0
88.0
93.0
98.0
103.0
Distance (mm)
78.0
83.0
88.0
93.0
98.0
103.0
Distance (mm)
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
ZS-HL
User’s Manual
8-27
Section8
Sensor Head
 ZS-HLDS32 (mode: High-Resolution)
Inclination angle 0°
75.0 125.0 175.0
Distance (mm)
Inclination angle Vertical +45°
0.10
0.08
0.06
0.04 Inclination angle +45°
0.02
0.00
-0.02
-0.04
-0.06
-0.08
-0.10
-175.0 -125.0 -75.0
White ceramic
Black rubber
SUS304
Aluminum
-25.0
25.0
75.0 125.0 175.0
Distance (mm)
Inclination angle Vertical -45°
0.10
0.08
0.06
0.04
0.02
0.00
-0.02
-0.04
-0.06
-0.08
Inclination angle -45°
White ceramic
Black rubber
SUS304
Aluminum
-175.0 -125.0
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
8-28
25.0
ZS-HL
User’s Manual
-75.0
-25.0
25.0
75.0 125.0 175.0
Distance (mm)
Error (%.F.S.)
0.10
0.08
0.06
0.04 Inclination angle 0°
0.02
0.00
-0.02
White ceramic
-0.04
Black rubber
-0.06
SUS304
-0.08
Aluminum
-0.10
-175.0 -125.0 -75.0 -25.0
Inclination angle Horizontal +45°
0.10
0.08
0.06
0.04 Inclination angle +45°
0.02
0.00
-0.02
White ceramic
-0.04
Black rubber
-0.06
SUS304
-0.08
Aluminum
-0.10
-175.0 -125.0 -75.0 -25.0
Error (%.F.S.)
Error (%.F.S.)
Error (%.F.S.)
Error (%.F.S.)
 Diffuse reflection
25.0
75.0 125.0 175.0
Distance (mm)
Inclination angle Horizontal -45°
0.10
0.08
0.06
0.04 Inclination angle -45°
0.02
0.00
-0.02
-0.04
-0.06
-0.08
-0.10
-175.0 -125.0 -75.0
White ceramic
Black rubber
SUS304
Aluminum
-25.0
25.0
75.0 125.0 175.0
Distance (mm)
Section8
Sensor Head
 ZS-HLDS60 (mode: High-Resolution)
Error (%.F.S.)
 Diffuse reflection
Inclination angle 0°
0.4
0.2
Inclination angle 0°
0.0
White ceramic
Black rubber
SUS304
Aluminum
Error (%.F.S.)
-0.4
250
450
650
850
950
Distance (mm)
Inclination angle Vertical +45°
0.4
0.2
Inclination angle +45°
Error (%.F.S.)
-0.2
0.0
0.2
Inclination angle +45°
0.0
-0.2
-0.2
White ceramic
Black rubber
450
550
SUS304
Aluminum
650
850
950
Distance (mm)
Inclination angle Vertical -45°
0.4
0.2
Inclination angle -45°
0.0
White ceramic
Black rubber
450
SUS304
Aluminum
650
850
950
Distance (mm)
Inclination angle Horizontal -45°
0.4
0.2
Inclination angle -45°
0.0
-0.2
-0.4
250
-0.4
250
Error (%.F.S.)
-0.4
250
Error (%.F.S.)
Inclination angle Horizontal +45°
0.4
-0.2
SUS304
Aluminum
White ceramic
Black rubber
450
650
850
950
Distance (mm)
-0.4
250
SUS304
Aluminum
White ceramic
Black rubber
450
650
850
950
Distance (mm)
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
ZS-HL
User’s Manual
8-29
Section8
Sensor Head
 ZS-HLDS150 (mode: High-Resolution)
 Diffuse reflection
Error (%.F.S.)
Inclination angle 0°
1.2
0.6
Inclination angle 0°
0.0
-0.6
1200
1400
1600
1800
2000
Distance (mm)
Inclination angle Vertical +45°
1.2
Error (%.F.S.)
Error (%.F.S.)
-1.2
1000
White ceramic
Black rubber
SUS304
Aluminum
0.6
Inclination angle +45°
0.0
1200
1400
1600
Inclination angle Vertical -45°
Inclination angle -45°
0.0
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
User’s Manual
1200
1400
1600
1800
2000
Distance (mm)
Inclination angle Horizontal -45°
1.2
0.6
Inclination angle -45°
1200
1400
White ceramic
Black rubber
SUS304
Aluminum
-0.6
1600
1800
2000
Distance (mm)
ZS-HL
White ceramic
Black rubber
SUS304
Aluminum
0.0
White ceramic
Black rubber
SUS304
Aluminum
-0.6
8-30
-1.2
1000
1800
2000
Distance (mm)
0.6
-1.2
1000
Inclination angle +45°
-0.6
Error (%.F.S.)
Error (%.F.S.)
1.2
0.6
0.0
White ceramic
Black rubber
SUS304
Aluminum
-0.6
-1.2
1000
Inclination angle Horizontal +45°
1.2
-1.2
1000
1200
1400
1600
1800
2000
Distance (mm)
Section8
Sensor Head
 ZS-LD20T (mode: Standard)
 Regular reflection
Inclination angle Horizontal +0.5
0.4
Error (%F.S.)
Error (%F.S.)
Inclination angle 0
0.4
0.2
Inclination angle horizontal 0
0.2
Inclination angle horizontal +0.5
0.0
0.0
-0.2
-0.2
Glass
Glass
Mirror
-0.4
19.0
Mirror
-0.4
19.5
20.0
20.5
21.0
Distance (mm)
19.0
0.2
20.0
20.5
21.0
Distance (mm)
Inclination angle Vertical
0.5
0.4
Error (%F.S.)
Error (%F.S.)
Inclination angle Horizontal -0.5
0.4
19.5
0.2
Inclination angle vertical 0.5
0.0
0.0
-0.2
Glass
Glass
Mirror
Inclination angle horizontal -0.5
-0.4
19.0
-0.2
Mirror
-0.4
19.5
20.0
20.5
21.0
Distance (mm)
19.0
19.5
20.0
20.5
21.0
Distance (mm)
 Diffuse reflection
Inclination angle Horizontal +15
Error (%F.S.)
Error (%F.S.)
Inclination angle 0
0.4
0.2
0.0
Inclination angle horizontal 0
0.2
-0.2
Inclination angle horizontal +15
-0.4
5.8
6.3
5.3
6.8
7.3
Distance (mm)
Inclination angle Horizontal -15
Error (%F.S.)
0.4
Inclination angle horizontal -15
-0.4
5.3
0.2
6.3
6.8
7.3
Distance (mm)
Inclination angle Vertical
15
Inclination angle vertical 15
0.0
0.0
-0.2
0.4
5.8
5.8
White ceramic
Black rubber
SUS304
Aluminum
-0.2
White ceramic
SUS304
Aluminum
6.3
6.8
7.3
Distance (mm)
-0.4
5.3
5.8
6.3
6.8
7.3
Distance (mm)
ZS-HL
User’s Manual
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
-0.4
5.3
Error (%F.S.)
White ceramic
Black rubber
SUS304
Aluminum
0.0
White ceramic
Black rubber
SUS304
Aluminum
-0.2
0.2
0.4
8-31
Section8
Sensor Head
 ZS-LD20ST (mode: Standard)
Inclination angle 0
0.4
0.3
0.2
Inclination angle horizontal 0
Inclination angle Horizontal +0.5
0.4
Error (%F.S.)
Error (%F.S.)
 Regular reflection
0.3
0.2
0.1
Inclination angle horizontal +0.5
0.1
0.0
0.0
-0.1
-0.1
-0.2
-0.2
Glass
Mirror
-0.3
-0.4
19.0
19.5
20.0
20.5
21.0
Glass
Mirror
-0.3
-0.4
19.0
19.5
20.0
Inclination angle Horizontal -0.5
0.4
0.3
0.2
Inclination angle horizontal -0.5
20.5
21.0
Distance (mm)
Inclination angle Vertical
0.4
Error (%F.S.)
Error (%F.S.)
Distance (mm)
0.5
0.3
0.2
Inclination angle vertical 0.5
0.1
0.1
0.0
0.0
-0.1
-0.1
-0.2
-0.2
Glass
Mirror
-0.3
-0.4
19.0
19.5
20.0
Glass
Mirror
-0.3
-0.4
20.5
21.0
Distance (mm)
19.0
19.5
20.0
20.5
21.0
Distance (mm)
 Diffuse reflection
Inclination angle Horizontal +15
Error (%F.S.)
Error (%F.S.)
Inclination angle 0
0.4
0.3
0.2
Inclination angle horizontal 0
0.1
0.3
0.2
Inclination angle horizontal+15
0.1
0.0
0.0
-0.1
-0.1
White ceramic
Black rubber
SUS304
Aluminum
-0.2
-0.3
-0.4
5.3
5.8
6.3
6.8
-0.2
White ceramic
Black rubber
SUS304
Aluminum
-0.3
-0.4
7.3
5.3
5.8
6.3
Distance (mm)
Inclination angle Vertical
Error (%F.S.)
0.4
0.3
0.2
Inclination angle horizontal -15
0.1
15
0.3
0.2
Inclination angle vertical 15
0.1
0.0
0.0
-0.1
-0.2
White ceramic
Black rubber
SUS304
Aluminum
-0.3
5.3
5.8
6.3
6.8
7.3
Distance (mm)
ZS-HL
7.3
0.4
-0.1
-0.4
6.8
Distance (mm)
Inclination angle Horizontal -15
Error (%F.S.)
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
8-32
0.4
User’s Manual
-0.2
White ceramic
Black rubber
SUS304
Aluminum
-0.3
-0.4
5.3
5.8
6.3
6.8
7.3
Distance (mm)
Section8
Sensor Head
 ZS-LD40T (mode: Standard)
 Regular reflection
Inclination angle Horizontal +0.5
0.8
Error (%F.S.)
Error (%F.S.)
Inclination angle 0
0.8
0.4
Inclination angle horizontal 0
0.4
Inclination angle horizontal +0.5
0.0
0.0
-0.4
-0.4
Glass
Glass
Mirror
-0.8
37.5
38.5
39.5
40.5
Mirror
-0.8
37.5
41.5
42.5
Distance (mm)
38.5
0.4
Inclination angle horizontal -0.5
40.5
41.5
42.5
Distance (mm)
Inclination angle Vertical
0.5
0.8
Error (%F.S.)
Error (%F.S.)
Inclination angle Horizontal -0.5
0.8
39.5
0.4
Inclination angle vertical 0.5
0.0
0.0
-0.4
Glass
-0.4
Glass
Mirror
-0.8
37.5
38.5
39.5
40.5
41.5
42.5
Distance (mm)
Mirror
-0.8
37.5
38.5
39.5
40.0
41.5
42.5
Distance (mm)
 Diffuse reflection
Inclination angle Horizontal +15
Error (%F.S.)
Error (%F.S.)
Inclination angle 0
0.4
0.2
Inclination angle horizontal 0
0.0
0.2
29.0
30.0
-0.2
Inclination angle horizontal +15
28.0
31.0
32.0
Distance (mm)
Inclination angle Horizontal -15
Error (%F.S.)
0.4
Inclination angle horizontal -15
31.0
32.0
Distance (mm)
15
Inclination angle vertical 15
0.0
0.0
White ceramic
Black rubber
SUS304
Aluminum
-0.2
-0.4
28.0
30.0
Inclination angle Vertical
0.4
0.2
29.0
29.0
30.0
31.0
32.0
Distance (mm)
White ceramic
Black rubber
SUS304
Aluminum
-0.2
-0.4
28.0
29.0
30.0
31.0
32.0
Distance (mm)
ZS-HL
User’s Manual
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
-0.4
28.0
Error (%F.S.)
White ceramic
Black rubber
SUS304
Aluminum
0.0
White ceramic
Black rubber
SUS304
Aluminum
-0.2
0.2
0.4
8-33
Section8
Sensor Head
 ZS-LD50 (mode: Standard)
 Diffuse reflection
Inclination angle Horizontal +15
Error (%F.S.)
Error (%F.S.)
Inclination angle 0
0.4
0.2
Inclination angle horizontal 0
0.0
-0.4
45.0
Inclination angle horizontal +15
47.0
49.0
51.0
-0.4
45.0
53.0
55.0
Distance (mm)
Inclination angle Horizontal -15
0.4
Inclination angle horizontal -15
White ceramic
Black rubber
SUS304
Aluminum
-0.2
Error (%F.S.)
Error (%F.S.)
0.2
0.0
White ceramic
Black rubber
SUS304
Aluminum
-0.2
0.2
0.4
47.0
49.0
51.0
53.0
55.0
Distance (mm)
Inclination angle Vertical
0.4
0.2
15
Inclination angle vertical 15
0.0
0.0
White ceramic
Black rubber
SUS304
Aluminum
-0.2
-0.4
45.0
47.0
49.0
51.0
White ceramic
Black rubber
SUS304
Aluminum
-0.2
-0.4
45.0
53.0
55.0
Distance (mm)
47.0
49.0
51.0
53.0
55.0
Distance (mm)
 Regular reflection
Inclination angle Horizontal +0.5
Error (%F.S.)
Error (%F.S.)
Inclination angle 0
0.8
0.4
Inclination angle horizontal 0
0.8
0.4
Inclination angle horizontal +0.5
0.0
0.0
-0.4
-0.4
Glass
Glass
Mirror
45.0
47.0
Mirror
-0.8
43.0
49.0
51.0
Distance (mm)
Inclination angle Horizontal -0.5
0.8
0.4
Inclination angle horizontal -0.5
0.0
45.0
47.0
0.4
Inclination angle vertical 0.5
Glass
-0.4
Glass
Mirror
ZS-HL
User’s Manual
0.5
0.8
0.0
-0.4
-0.8
43.0
49.0
51.0
Distance (mm)
Inclination angle Vertical
Error (%F.S.)
Error (%F.S.)
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
8-34
-0.8
43.0
45.0
47.0
49.0
51.0
Distance (mm)
Mirror
-0.8
43.0
45.0
47.0
49.0
51.0
Distance (mm)
Section8
Sensor Head
 ZS-LD50S (mode: Standard)
 Diffuse reflection
Inclination angle Horizontal +15
Error (%F.S.)
Error (%F.S.)
Inclination angle 0
0.4
0.3
0.2 Inclination angle horizontal 0
0.1
0.4
0.3
0.1
0.0
0.0
-0.1
-0.1
-0.2
-0.2
White ceramic
Black rubber
SUS304
Aluminum
-0.3
-0.4
Inclination angle horizontal +15
0.2
45.0
47.0
49.0
51.0
53.0
White ceramic
Black rubber
SUS304
Aluminum
-0.3
-0.4
55.0
45.0
47.0
49.0
51.0
Inclination angle Vertical
Error (%F.S.)
Error (%F.S.)
Inclination angle Horizontal -15
0.4
0.3
0.2 Inclination angle horizontal -15
0.2 Inclination angle vertical 15
0.1
0.0
-0.1
-0.1
-0.4
-0.2
White ceramic
Black rubber
SUS304
Aluminum
45.0
47.0
49.0
51.0
53.0
White ceramic
Black rubber
SUS304
Aluminum
-0.3
-0.4
55.0
15
0.3
0.1
-0.3
55.0
0.4
0.0
-0.2
53.0
Distance (mm)
Distance (mm)
45.0
47.0
49.0
51.0
Distance (mm)
53.0
55.0
Distance (mm)
Inclination angle Horizontal +0.5
Inclination angle 0
0.4
Error (%F.S.)
Error (%F.S.)
 Regular reflection
0.3
0.2
Inclination angle horizontal 0
0.4
0.3
0.2
Inclination angle horizontal +0.5
0.1
0.1
0.0
-0.1
-0.2
-0.2
Glass
Mirror
-0.3
-0.4
43.0
45.0
47.0
49.0
Glass
Mirror
-0.3
-0.4
51.0
43.0
45.0
47.0
Inclination angle Horizontal -0.5
0.4
0.3
0.2
Inclination angle horizontal -0.5
0.1
49.0
51.0
Distance (mm)
Error (%F.S.)
Error (%F.S.)
Distance (mm)
Inclination angle Vertical
0.4
0.5
0.3
Inclination angle vertical 0.5
0.2
0.1
0.0
0.0
-0.1
-0.1
-0.2
-0.2
Glass
Mirror
-0.3
-0.4
Glass
Mirror
-0.3
-0.4
43.0
45.0
47.0
49.0
51.0
Distance (mm)
43.0
45.0
47.0
49.0
51.0
Distance (mm)
ZS-HL
User’s Manual
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
0.0
-0.1
8-35
Section8
Sensor Head
 ZS-LD80 (mode: Standard)
Inclination angle Horizontal +15
Inclination angle 0
0.6
Error (%F.S.)
Error (%F.S.)
 Diffuse reflection
0.4
0.2
Inclination angle 0
0.0
0.6
0.4
0.2
Inclination angle horizontal +15
0.0
White ceramic
Black rubber
SUS304
Aluminum
-0.2
-0.4
-0.6
65
70
75
80
85
White ceramic
Black rubber
SUS304
Aluminum
-0.2
-0.4
-0.6
90
95
Distance (mm)
65
70
0.4
Inclination angle horizontal -15
0.2
80
85
90
95
Distance (mm)
Inclination angle Vertical
Error (%F.S.)
Error (%F.S.)
Inclination angle Horizontal -15
0.6
75
0.0
15
0.6
0.4
0.2
Inclination angle vertical 15
0.0
White ceramic
Black rubber
SUS304
Aluminum
-0.2
-0.4
-0.6
65
70
75
80
85
White ceramic
Black rubber
SUS304
Aluminum
-0.2
-0.4
-0.6
90
95
Distance (mm)
65
70
75
80
85
90
95
Distance (mm)
 Regular reflection
Inclination angle Horizontal +0.5
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
8-36
Error (%F.S.)
Error (%F.S.)
Inclination angle 0
2.0
1.6
1.2
0.8
0.4
0.0
-0.4
-0.8
-1.2
-1.6
-2.0
Inclination angle 0
Glass
Mirror
64
68
72
76
80
2.0
1.6
1.2
0.8
0.4
0.0
-0.4
-0.8
-1.2
-1.6
-2.0
84
88
92
Distance (mm)
Inclination angle horizontal +0.5
Glass
Mirror
64
Glass
64
ZS-HL
User’s Manual
Mirror
Inclination angle horizontal -0.5
68
72
76
80
84
88
92
Distance (mm)
72
76
80
84
88
92
Distance (mm)
Inclination angle Vertical
Error (%F.S.)
Error (%F.S.)
Inclination angle Horizontal -0.5
2.0
1.6
1.2
0.8
0.4
0.0
-0.4
-0.8
-1.2
-1.6
-2.0
68
2.0
1.6
1.2
0.8
0.4
0.0
-0.4
-0.8
-1.2
-1.6
-2.0
0.5
Inclination angle vertical 0.5
Glass
Mirror
64
68
72
76
80
84
88
92
Distance (mm)
Section8
Sensor Head
 ZS-LD130 (mode: Standard)
Inclination angle 0
0.4
Error (%F.S.)
Error (%F.S.)
 Diffuse reflection
0.3
0.2
Inclination angle horizontal 0
0.1
Inclination angle Horizontal +15
0.4
0.3
0.2
Inclination angle horizontal +15
0.1
0.0
0.0
-0.1
-0.1
-0.2
-0.2
White ceramic
Black rubber
SUS304
Aluminum
-0.3
-0.4
115
120
125
130
135
140
White ceramic
Black rubber
SUS304
Aluminum
-0.3
-0.4
145
115
120
125
130
135
Distance (mm)
Error (%F.S.)
Error (%F.S.)
Inclination angle Horizontal -15
0.4
0.3
0.2
Inclination angle horizontal -15
140
145
Distance (mm)
0.1
Inclination angle Vertical
15
0.4
0.3
0.2
Inclination angle vertical 15
0.1
0.0
0.0
-0.1
-0.1
-0.2
-0.2
White ceramic
Black rubber
SUS304
Aluminum
-0.3
-0.4
115
120
125
130
135
140
White ceramic
Black rubber
SUS304
Aluminum
-0.3
-0.4
145
115
120
125
130
135
Distance (mm)
140
145
Distance (mm)
 Regular reflection
Inclination angle Horizontal +0.5
Error (%F.S.)
Error (%F.S.)
Inclination angle 0
1.0
0.5
Inclination angle horizontal 0
1.0
0.5
Inclination angle horizontal +0.5
0.0
0.0
Glass
Mirror
-1.0
118
123
128
133
138
Glass
Mirror
-1.0
143
118
123
128
133
Distance (mm)
Inclination angle Vertical
Error (%F.S.)
Error (%F.S.)
Inclination angle Horizontal -0.5
1.0
Inclination angle horizontal -0.5
0.5
0.0
138
143
Distance (mm)
0.5
1.0
0.5
Inclination angle vertical 0.5
0.0
-0.5
-0.5
Glass
Mirror
-1.0
118
123
128
133
138
Glass
Mirror
-1.0
143
Distance (mm)
118
123
128
133
138
143
Distance (mm)
ZS-HL
User’s Manual
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
-0.5
-0.5
8-37
Section8
Sensor Head
 ZS-LD200 (mode: Standard)
Inclination angle Horizontal +15
Inclination angle 0
0.6
Error (%F.S.)
Error (%F.S.)
 Diffuse reflection
0.4
0.2
Inclination angle 0
0.0
0.6
0.4
Inclination angle horizontal +15
0.2
0.0
White ceramic
Black rubber
SUS304
Aluminum
-0.2
-0.4
-0.6
150
170
190
210
White ceramic
Black rubber
SUS304
Aluminum
-0.2
-0.4
-0.6
230
250
Distance (mm)
150
0.4
0.2
Inclination angle horizontal -15
190
210
230
250
Distance (mm)
Inclination angle Vertical
Error (%F.S.)
Error (%F.S.)
Inclination angle Horizontal -15
0.6
170
0.0
15
0.6
0.4
0.2
Inclination angle vertical 15
0.0
White ceramic
Black rubber
SUS304
Aluminum
-0.2
-0.4
-0.6
150
170
190
210
White ceramic
Black rubber
SUS304
Aluminum
-0.2
-0.4
-0.6
230
250
Distance (mm)
150
170
190
210
230
250
Distance (mm)
 Regular reflection
Inclination angle Horizontal +0.5
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
8-38
Glass
Mirror
Inclination angle 0
152
168
184
200
216
Error (%F.S.)
Error (%F.S.)
Inclination angle 0
2.0
1.6
1.2
0.8
0.4
0.0
-0.4
-0.8
-1.2
-1.6
-2.0
2.0
1.6
1.2
0.8
0.4
0.0
-0.4
-0.8
-1.2
-1.6
-2.0
232
248
Distance (mm)
Glass
Mirror
Inclination angle horizontal +0.5
152
Glass
152
ZS-HL
User’s Manual
Mirror
Inclination angle horizontal -0.5
168
184
200
216
232
248
Distance (mm)
184
200
216
232
248
Distance (mm)
Inclination angle Vertical
Error (%F.S.)
Error (%F.S.)
Inclination angle Horizontal -0.5
2.0
1.6
1.2
0.8
0.4
0.0
-0.4
-0.8
-1.2
-1.6
-2.0
168
2.0
1.6
1.2
0.8
0.4
0.0
-0.4
-0.8
-1.2
-1.6
-2.0
0.5
Glass
Mirror
Inclination angle vertical 0.5
152
168
184
200
216
232
248
Distance (mm)
Section8
Sensor Head
 ZS-LD350S (mode: Standard)
Inclination angle 0
Error (%F.S.)
Error (%F.S.)
 Diffuse reflection
0.4
0.3
0.2
Inclination angle horizontal 0
Inclination angle Horizontal +15
0.4
0.3
0.2
0.0
0.0
-0.1
-0.1
-0.2
White ceramic
Black rubber
SUS304
Aluminum
-0.3
-0.4
Inclination angle horizontal +15
0.1
0.1
215
265
315
365
415
465
-0.2
White ceramic
Black rubber
SUS304
Aluminum
-0.3
-0.4
215
265
315
365
Distance (mm)
Error (%F.S.)
Error (%F.S.)
Inclination angle Horizontal -15
0.4
0.3
0.2
Inclination angle horizontal -15
0.1
415
465
Distance (mm)
Inclination angle Vertical
15
0.4
0.3
0.2
Inclination angle vertical 15
0.1
0.0
0.0
-0.1
-0.1
-0.2
White ceramic
Black rubber
SUS304
Aluminum
-0.3
-0.4
215
265
315
365
415
465
Distance (mm)
-0.2
White ceramic
Black rubber
SUS304
Aluminum
-0.3
-0.4
215
265
315
365
415
465
Distance (mm)
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
ZS-HL
User’s Manual
8-39
Section8
Sensor Controller
Sensor Controller
Specifications
Item
I/O type
ZS-HLDC11
NPN type
ZS-HLDC41
PNP type
Average number of times
1, 2, 4, 8, 16, 32, 64, 128, 256, 512, 1024, 2048, or 4096
Number of connected Sensor Heads
1 per Sensor Controller
External I/F
Connection method
Serial I/O is connector type.
Otherwise, prewired (standard cable length: 2 m)
Serial
I/O
USB2.0
1 port, FULL SPEED[12 Mbps], MINI-B
RS-232C
1 port, max. 115,200 bps
Output 3 judgment outputs:
HIGH/PASS/LOW)
Input
NPN open-collector, 30 VDC,
50 mA max. residual voltage;
1.2 V max.
PNP open-collector
50 mA max. residual voltage;
1.2 V max.
Linear output
Selectable from voltage/current
(selected by slide switch on base)
• At voltage output: -10 to +10 V, output impedance: 40 Ω
• At current output: 4 to 20 mA, max. load resistance: 300 Ω
LDOFF input (LD
forced OFF)
ON: Short-circuited with 0V ter- ON: Supply voltage short-cirminal or 1.5 V max.
cuited or within supply voltOFF: Open (leakage current:
age -1.5 V max.
0.1 mA max.)
OFF: Open (leakage current:
0.1 mA max.)
Zero reset input (execute or cancel zero
reset)
Timing input (sample
cycle specified when
hold function is enabled)
Reset input (reset of
hold state)
Status indicators
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
8-40
Segment display
HIGH (orange), PASS (green), LOW (orange),
LDON (green), ZERO (green), ENABLE (green)
Main display
8-segment red display, 6 digits
Sub-display
8-segment green display, 6 digits
LCD
Setting input
16 digits × 2 rows, color of characters: green, resolution per character: 5 × 8 pixel matrix
Setting keys
Direction keys (UP/DOWN/LEFT/RIGHT), SET key, ESC key,
MENU key, function keys (1 to 4)
Slide switch
Threshold switch (H/L 2-state)
Mode switch (FUN/TEACH/RUN 3-state)
Power supply voltage
21.6 V to 26.4 V (including ripple)
Current consumption
0.5 A max. (when Sensor Head is connected)
Insulation resistance
Across all lead wires and controller case: 20 MΩ (by 250 V megger)
Dialectic strength
Across all lead wires and controller case, 1000 VAC, 50/60 Hz, 1 min
Degree of protection
IP20 (IEC60529)
Noise immunity
1,500 V peak-to-peak, pulse width 0.1 µs/1 µs, rising edge: 1 ns
pulse
Vibration resistance (destructive)
10 to 150 Hz, 0.7-mm double amplitude, 80 min each in X, Y, and Z
directions
Shock resistance (destructive)
300 m/s2 3 times each in six directions (up/down, left/right, forward/
backward)
ZS-HL
User’s Manual
Section8
Sensor Controller
Item
ZS-HLDC11
Ambient temperature
ZS-HLDC41
Operating: 0 to +50 °C
Storage : -15 to +60 °C (with no icing or condensation)
Ambient humidity
Operating and storage: 35 % to 85 % (with no condensation)
Materials
Case: Polycarbonate (PC), Cable sheath: PVC
Cable length
2m
Weight
Approx. 280 g (excluding packing materials and accessories)
z Status indicators for controller
Display
Measurement
mode
RUN/
TEACH
7 segment
display
Status
Normal measurement
Measure- Keep
ment
error
Clamp
Output
Linear
output
Judgment output
Input
Terminal
block output
Trigger/
trigger
reset/
laser OFF
JudgMeasure- Output
ment
according ment
result
result
to the
Previous measurement
value
result
YES
Output
according
to the mode
(measurement result/
judgment
result)
ERROR
Output of
the measured
value:
Clamp level
Judgment
output:
ERROR
Measured value not –
determined
LDOFF
–
FUN
–
Display
according to the
menu
System
error
–
888.888
blinking
Output at
clamp
level
YES
RS-232C/
USB
YES
NO
NO
NO
YES
A command is
received but
is not executed.
The programs incorporated into ZS-HLDC_ _ _ Controllers are considered technology
under the Foreign Exchange and Foreign Trade laws in Japan and therefore require a
license for export from Japan.
Note, however, that permission for service transactions is not required in accordance with
the stipulations of Trade Ministry Directive, Clause No. 9, Item No. 1 Sub-item 10(b).
ZS-HL
User’s Manual
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
Voltage:
Output of
0V
Current:
Output of
12 mA
ERROR
(Output
OFF)
Zero
reset
8-41
Section8
Sensor Controller
External Dimensions
ZS-HLDC11/HLDC41
23.20
(Unit: mm)
60
4.30
3.90
90
4.61
52.50
Heat-resistant PVC 5.2
Standard length 2 m
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
8-42
24.20
18
32.90
13 10
.7
11
ZS-HL
User’s Manual
10.80
Section8
Accessory
Accessory
Panel Mount Adapter
ZS-XPM1/XPM2
When mounting on a panel
(60 n)+12
60 n
(Unit: mm)
13
3
Panel
(140)
90
122
DIN track
Panel
Panel Mount
Adapter
(2) (37.5)
(Note 1)
Note 1: Dimensions are shown for a panel
thickness of 2.0 mm.
Panel cutout dimensions
Panel cutout dimensions
When mounting on a panel, attach
a DIN track on the rear of a Panel
116
1
Mount Adapter to reinforce it.
n: number of gang-mounted controllers (1 to 10)
Item
ZS-XPM1 (for 1st unit)
ZS-XPM2 (for 2nd unit onwards)
Appearance
Applicable controller
ZS Series
Vibration resistance (destructive) 10 to 150 Hz, 0.7-mm double amplitude, 80 min each in X, Y, and Z directions
Shock resistance (destructive)
300 m/s2 3 times each in six directions (up/down, left/right, forward/backward)
Materials
Polycarbonate (PC), etc.
Weight
Approx. 50 g
ZS-HL
User’s Manual
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
(60 n)+8
8-43
Section8
Accessory
Extension Cable
ZS-XC_A/XC_B/XC5BR
L (Note 1)
75
13
(Unit: mm)
8.5
45.9
3.5
28
2-
33
20-pin
Mounting hole
20-pin
Note 1: ZS-XC_A: L=1 m, 4 m and 8 m
ZS-XC_B: L=5 m and 10 m
ZS-XC5BR: L=5 m
28
2-M3
0.1
PVC insulated round cable 6.2 mm dia. core
Mounting hole dimensions
Item
Applicable controller
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
8-44
ZS-XC1A
Note 2: Color of seal
ZS-XC_A: Black
ZS-XC_B(R): Silver
ZS-XC4A
ZS-XC8A
ZS-XC5B
ZS-XC10B
ZS-XC5BR
ZS Series
Applicable Sensor Head
ZS Series
Ambient temperature
Operating: 0 to +50 °C, Storage: -15 to +60 °C (with no icing or condensation)
Ambient humidity
Operating and storage: 35 % to 85 % (with no condensation)
Connection method
Double-end connector
Materials
Case: Polycarbonate (PC)
Weight
Approx.
150 g
Approx.
320 g
Approx.
550 g
Approx.
350 g
Approx.
620 g
Approx.
350 g
Cable length
1m
4m
8m
5m
10 m
5m
ZS-HL
User’s Manual
Section8
Accessory
Extension Cable (Long-Distance, Flexible Type)
 extension cable
ZS-XC_ _CR
(Unit: mm)
L1 (Note)
8.7
12.5
43
Note: In the case of ZS-XC25CR, L1=25,000
In the case of ZS-XC15CR, L1=15,000
Heat-resistant PVC
Item
6.1 20-core
ZS-XC25CR
Cable length
25 m
Applicable Sensor Head/Controller
ZS Series (*1)
ZS-XC15CR
15 m
Ambient temperature
Operating: 0 to +50 °C, Storage: -15 to +60 °C (with no icing or condensation)
Ambient humidity
Operating and storage: 35 % to 85 % (with no condensation)
Vibration resistance (destructive)
10 to 150 Hz, 0.7-mm double amplitude, 80 min each in X, Y, and Z directions
Shock resistance (destructive)
300 m/s2 3 times each in six directions (up/down, left/right, forward/backward)
Materials
Cable sheath: PVC
Weight (excluding packing materi- Approx. 1.4 kg
als and accessories)
Approx. 1.0 kg
(*1) There are restrictions on the Sensor Head/controller you can connect. For details, contact your OMRON
representative.
 Cable for connecting a digital equalizer
ZS-XC02D
(Unit: mm)
42
30.1
30.1
8.5
20 pins
Heat-resistant PVC 6.1 20-core
Item
20 pins
ZS-XC02D
Applicable Sensor Head/Controller
ZS Series (*1)
Ambient temperature
Operating: 0 to +50 °C, Storage: -15 to +60 °C (with no icing or condensation)
Ambient humidity
Operating and storage: 35 % to 85 % (with no condensation)
Vibration resistance (destructive)
10 to 150 Hz, 0.7-mm double amplitude, 80 min each in X, Y, and Z directions
Shock resistance (destructive)
300 m/s2 3 times each in six directions (up/down, left/right, forward/backward)
Materials
Cable sheath: PVC
Weight (excluding packing materi- Approx. 50 g
als and accessories)
(*1) There are restrictions on the Sensor Head/controller you can connect. For details, contact your OMRON
representative.
ZS-HL
User’s Manual
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
8.5
30.1
200
8-45
Section8
Accessory
 Digital equalizer
ZS-XEQ
33
(Unit: mm)
16.50
2M
3
4
11.50
42
33
70
21
0
.5
10
37
Mounting fixtures
3
25.5
37
4.5
15
+1
0
15
+1
0
22
4.5
43
5.5
54
5.5
90
37
4.5
22
15
+1
0
15
+1
0
1
43
4.5
3-R2.25
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
8-46
Item
ZS-XEQ
Applicable Sensor Head/Controller ZS Series (*1)
Ambient temperature
Operating: 0 to +50 °C, Storage: -15 to +60 °C (with no icing or condensation)
Ambient humidity
Operating and storage: 35 % to 85 % (with no condensation)
Vibration resistance (destructive)
10 to 150 Hz, 0.7-mm double amplitude, 80 min each in X, Y, and Z directions
Shock resistance (destructive)
300 m/s2 3 times each in six directions (up/down, left/right, forward/backward)
Materials
Case: Aluminum die-cast
Degree of protection
IEC60529 IP20
Weight (excluding packing materi- Approx. 120 g
als and accessories)
(*1) There are restrictions on the Sensor Head/controller you can connect. For details, contact your OMRON
representative.
ZS-HL
User’s Manual
Section8
Accessory
RS-232C Cable
ZS-XPT2 (for connecting to programmable controller/programmable terminal)
2000 150
(Unit: mm)
100 10
32.20
(20 5)
41
(4)
20
10-pin square connector
8.70
Note 1
9-pin square connector
24.99
32.20
17.60
11.15
5.20
15
Vinyl insulated round cable 3.89 core
(Conductor cross-sectional area: 0.013 m2 / Insulator diameter: 0.38)
Note 1: Plug-type connector.
Lock screw's metric screw thread(M2.6 × 0.45)
ZS-XRS2 (for connecting to a personal computer)
2000
150
(Unit: mm)
32.20
4
20
80
Note 2
9-pin square connector
10-pin square connector
8.70
20
24.99
32.20
11.15
17.60
5.20
41
15
PVC insulated round cable 3.89 mm dia. core
(conductor cross-section: 0.013 mm2/insulator diameter: 0.38)
Item
ZS-XRS2
ZS-XPT2
Applicable controller
ZS Series
Ambient temperature
Operating: 0 to +50 °C, Storage: -15 to +60 °C (with no icing or condensation)
Ambient humidity
Operating and storage: 35 % to 85 % (with no condensation)
Dialectic strength
1,000 VAC, 50/60 Hz for 1 min
Insulation resistance
(destructive)
100 MΩ (by 500 VDC megger)
Vibration resistance
(destructive)
10 to 150 Hz, 0.7-mm double amplitude, 80 min each in X, Y, and Z directions
Shock resistance
300 m/s2 3 times each in six directions (up/down, left/right, forward/backward)
Materials
Cable sheath: PVC
Weight
Approx. 50 g
ZS-HL
User’s Manual
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
Note 2: Socket-type connector.
Lock screw's metric screw thread(M2.6 × 0.45)
8-47
Section8
Accessory
Control Link Unit
ZS-XCN
(Unit: mm)
13.40
11.50
18
39.50
Item
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
8-48
4.60
ZS-XCN
Applicable controller
ZS Series
Ambient temperature
Operating: 0 to +50 °C, Storage: -15 to +60 °C (with no icing or condensation)
Ambient humidity
Operating and storage: 35 % to 85 % (with no condensation)
Vibration resistance
(destructive)
10 to 150 Hz, 0.7-mm double amplitude, 80 min each in X, Y, and Z directions
Shock resistance (destruc- 300 m/s2 3 times each in six directions (up/down, left/right, forward/backward)
tive)
Materials
Polycarbonate (PC), etc.
Weight
Approx. 10 g
ZS-HL
User’s Manual
Section8
Accessory
Real-Time Parallel Output Unit
ZG-RPD11/RPD41
10 28.40
(Unit: mm)
2 mm mounting hole
21
30
10.25 8
7
29.60
15.85
9
11.5
(14.15) 13 (2.85)
66.50
80
89
98
15.65
9
70
32.90
55
(150)*
Item
(*)also a type 2m
35.20
6
30
ZG-RPD11
ZG -RPD41
I/O type
NPN Amplifier Unit
PNP Amplifier Unit
Data output system
16-bit parallel open collector output
Data format
Measurement value data is converted to 40,000 stages of 16-bit binary data before
output. (signal names: D0 to D15)
Data update cycle
Can be set as desired using integer multiples of the sampling cycle. The update cycle
is determined by the following calculation formula:
• (update cycle) = (sampling cycle) × (update coefficient)
The update coefficient parameter can be set by the user as an integer value within the
range 1 to 100. (Ex. When the sampling cycle is 112 µs, the settable range becomes
112 µs to 11.2 ms.)
Signal name
• Binary output: signal name: D0 to D15 (total 16 bits)
• Gate output: signal name: GATE (total 16 bits)
Circuit specification
NPN open-collector,
30 VDC max., 20 mA max.,
residual voltage 1.2 or less
delay time at OFF → ON change: less
than 0.5 µs
(at 24 V, 20 mA)
delay
PNP open-collector,
20 mA max., residual voltage 1.2 V or
less,
delay time at OFF → ON change: less
than 0.5 µs
(at 20 mA)
delay
RS-232C
1 port, max. 115,200 bps
Status indicators
• PWR indicator (lit color: green) → Lit when ZG-RPD is energized.
• ERR indicator (lit color: red) → Lit when an energizing current of 20 mA or more flows
to 1 bit or more of the open collector output (data output: 16 bits, GATE: 1 bit)
Circuit internal power
supply voltage
24 VDC and 3.3 VDC. Power supplied form ZS-HLDC_1 via exclusive connector.
Current consumption
0.5 A or less. Total value including current consumption of ZS-HLDC_1
Insulation resistance
Connected to ZS-HLDC_1, across all lead wires and controller case of the ZS-HLDC_1: 20 MΩ (by 250 V megger)
Dialectic strength
Connected to ZS-HLDC_1, across all lead wires and controller case of the ZS-HLDC_1: 1000 VAC, 50/60Hz 1min
ZS-HL
User’s Manual
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
Parallel output
Synchronization signal Synchronization signal for notifying data determination timing (signal name: GATE).
1-bit open collector output
8-49
Section8
Accessory
Item
ZG -RPD41
10 to 150 Hz, 0.7-mm double amplitude, 80 min each in X, Y, and Z directions
Shock resistance
(destructive)
300 m/s2 3 times each in six directions (up/down, left/right, forward/backward)
Ambient temperature
Operating: 0 to +50 °C, Storage: -15 to +60 °C (with no icing or condensation)
Ambient humidity
Operating and storage: 35 % to 85 % (with no condensation)
Materials
Case: ABS
Weight
Approx. 130 g (excluding packing materials and accessories)
Section8 SPECIFICATIONS AND EXTERNAL DIMENSIONS
8-50
ZG-RPD11
Vibration resistance
(destructive)
ZS-HL
User’s Manual
Section9
APPENDIX
Troubleshooting
9-2
Error Messages and Countermeasures
9-3
Safety Precautions for Using Laser Equipment
9-4
Requirements from Regulations and Standards
9-6
Summary of Requirements to Manufactures
9-6
Summary of Requirements to User
9-10
Definitions of Laser Classification
9-13
Updating Firmware
Flow of Updating Firmware
Index
9-15
9-15
9-21
Section9 APPENDIX
ZS-HL
User’s Manual
9-1
Section9
Troubleshooting
Troubleshooting
This section describes countermeasures for temporary hardware problems. Check the
malfunction in this section before sending the hardware for repair.
Problem
Probable cause and possible countermeasure
Pages
Device restarts during operation. • Is the power supply device connected correctly?
p.1-3
• Does the power supply device conform to the power supply specifications (such as power supply voltage and current consumption)?
Judgments are not output to
external device.
•
•
•
•
Are all cables connected correctly?
Is the signal line disconnected?
Are reset inputs short-circuited?
Are the non-measurement settings in a clamped state, making the
measurement impossible to perform?
p.6-15
No input signal received.
• Are all cables connected correctly?
• Is the signal line disconnected?
p.2-10
No communication with personal
computer.
•
•
•
•
Is the USB cable connected correctly?
Is the RS-232 cable connected correctly?
Are other applications using the ports on the personal computer?
Do the communication conditions match between the personal
computer and controller?
• Has the USB driver been installed?
• Is operation of the controller normal?
• Are you using a personal computer that meets the operating environment?
p.7-2
Strange linear output levels.
• Is the voltage/current switch on the bottom of the Sensor Controller set to the correct position?
• Has the correct selection (voltage/current) been made in the focus
settings?
Linear output levels can be fine-tuned.
p.1-5
The main display remains on [---- • Has a timing input been made with the hold function enabled and
-].
the trigger type set to [EXT]?
• If the hold function is enabled and the trigger type is [SELF-UP] or
[SELF-DN], has the self-trigger level been set to an appropriate
value?
Section9 APPENDIX
9-2
p.2-10
p.6-4
p.5-19
An abnormal distance is displayed when the object is clearly
outside the measuring range.
• This problem may occur due to the characteristics of the sensor.
Make sure that the distance to the sensing object is appropriate.
• This problem is sometimes rectified by setting the emitted light
amount to a fixed distance.
The measured values fluctuate
and are not stable depending on
day and time.
• This problem may be due to temperature characteristics. Execute
zero reset periodically using the standard object to correct this
problem.
p.4-6
Laser is not emitted.
• Is the LD_OFF input line short-circuited?
p.2-10
ZS-HL
User’s Manual
p.5-8
Section9
Error Messages and Countermeasures
Error Messages and Countermeasures
 When [Error] Is Displayed on the Main Display
Display Details
LCD
screen
(upper
section)
Cause
Countermeasure
Overcurrent
Individual or groups of judgment
outputs are short-circuited.
Cancel the load short-circuit.
Dark Error
Insufficient received light amount
from workpiece. Distance measurement error.
For a workpiece with regular reflection
(glass)
• Check the angle at which the Sensor
Head is attached.
For a workpiece with diffuse reflection
• Set to High-Sensitivity mode.
• Set the gain setting to 2 or higher.
Bright Error
Saturated received light amount
from the workpiece. Distance
measurement error.
• Set to High-Speed mode.
• Set the gain setting to 1.
Measure Error
When [NORMAL], [PCB], and
[MIRROR] are set for the measurement object, the number of
surfaces currently being measured is 2 or more.
Alternatively, when [GLASS] is set
for the measurement object, the
number of surfaces currently
being measured is 4 or more.
For a workpiece with regular reflection
(glass)
• Check the angle at which the Sensor
Head is attached.
For a workpiece with diffuse reflection
• Set to GLASS mode.
• Using SmartMonitor ZS, set the
measurement area to the surface
you want to measure.
 When all digits on the main display and sub-display blink
Display Details
LCD screen
Cause
Countermeasure
SYSTEM ERROR
The Sensor Head is not conHEAD COM (EEPROM) nected.
Connect the Sensor Head.
Bank data in the Sensor Control- Hold the UP key down for 3 secler in error
onds, and then hold the DOWN
key down for 3 seconds.
The sensor is turned ON again
and restored after the device is
initialized.
SYSTEM ERROR
MAIN COM
Internal error
Turn the Controller ON again.
 Others
Display Details
LCD upper
section
Disp range Error
Main display ––––––
Cause
The measurement
result exceeds the
number of displayed
digits.
Countermeasure
Change the decimal point digit setting.
Section9 APPENDIX
SYSTEM ERROR
BANK DATA
p.5-25
The sensor is standing When hold is set, start sampling and apply the
by for measurement.
hold value.
ZS-HL
User’s Manual
9-3
Section9
Safety Precautions for Using Laser Equipment
Safety Precautions for Using Laser Equipment
Regarding laser devices, classes that indicate dangerous levels and various safety
standards for dangers are stipulated depending on the country of use.
Follow respective standards and implement safety measures.
Class classification
Standards and Class Classification (*1)
JIS C 6802 (Japan)
EN60825/IEC60825-1 (Europe)
Class2
FDA (the United States)
Class2
Maximum Output of Laser
Beam
1 mW or less
(*1) Because the safety standards differ according to each country, when you use the Sensor Controller in a
country other than Japan, Europe, and the United States, please check the safety regulations and
standards for lasers of the relevant country.
„ Warning Labels
On the head unit, a label that describes the warning in Japanese is attached. When you
use the Sensor Controller in a country other than Japan, replace the label with the
English label that is provided in the head unit.
z When you use a Sensor Controller in the United States
This product is subject to the U.S. FDA (Food and Drug Administration) laser regulations and is classified to Class 2 stipulated in these regulations.
ZS-LD20/LD20S/LD40/LD50/LD50S/LD80/LD130/LD200/LD350S/HLDS2/HLDS5/
HLDS10/HLDS60/HLDS150 have been already applied for CDRH (Center for Devices
and Radiological Health).
Section9 APPENDIX
9-4
Products relevant to FDA are supplied with labels that conform to FDA regulations.
When these products are used in the U.S., replace the warning label on the sensor
body with the FDA labels (supplied) referring to the figure below. Make sure that the
labels are affixed at the correct locations as indicated.
The ZS-HLD_ _ _ is intended to be fitted into a system as a terminal device. Follow the
following technical standards when fitting in the device.
* FDA: 21CFR 1040.10 and 1040.11
ZS-HL
User’s Manual
Section9
Safety Precautions for Using Laser Equipment
Compliance Guide for Laser Products
Laser emitter
section label
Warning label
Laser emitter
section label
Certification label
Warning label
Certification label
 Exporting to a country other than the U.S.
For countries other than Japan and the U.S., warning labels must be replaced by
English ones (supplied with the product).
ZS-LD_ _ _/HLDS2T/HLDS5T/HLDS10
ZS-HLDS60/HLDS150
Section9 APPENDIX
ZS-HL
User’s Manual
9-5
Section9
Requirements from Regulations and Standards
Requirements from Regulations and Standards
Summary of Requirements to Manufactures
 For Europe
EN 60825-1 “Safety of Laser Products, Equipment Classification, Requirements and
User's Guide”
Summary of Manufacturer’s Requirements
Requirements
subclause
Description of
hazard class
Classification
Class 1
Class 1M
Class 2
Class 2M
Class 3R
Class 3B
Class 4
Safe under
reasonably
foreseeable conditions
As for
Class 1
except may
be hazardous if user
employs
optics
Low power;
eye protection normally
afforded by
aversion
responses
As for
Class 2
except may
be more
hazardous
if user
employs
optics
Direct intrabeam viewing may be
hazardous
Direct intrabeam viewing
normally
hazardous
High
power; diffuse reflections may
be hazardous
Protective housing
Section9 APPENDIX
9-6
Required for each laser product; limits access necessary for performance of
functions of the products
Safety interlock in
protective housing
Designed to prevent removal of the panel until
accessible emission values are below that for Class
3R
Designed to prevent removal of the
panel until accessible emission values
are below that for Class 3B
Remote control
Not required
Permits easy addition of
external interlock in laser
installation
Key control
Not required
Laser inoperative when
key is removed
Emission warning
device
Not required
Attenuator
Not required
Give means beside the
On/Off switch to temporarily to block beam
Location controls
Not required
Controls so located that there is no
danger of exposure to AEL above
Classes 1 or 2 when adjustments are
made
Viewing optics
Not
required
Scanning
Scan failure shall not cause product to exceed its classification
Give audible or visible warning when
laser is switched on or if capacitor bank
of pulsed laser is being charged. For
Class 3R only, applies invisible radiation is emitted
Emission from all viewing systems must be below Class 1M AEL
Class label
Required wording
Aperture label
Not required
Service entry label
Required as appropriate to the class of accessible radiation
Override interlock
label
Required under certain conditions as appropriate to the class of laser used
ZS-HL
User’s Manual
Figures A required wording
Specified wording required
Section9
Requirements from Regulations and Standards
Requirements
subclause
Classification
Class 1
Class 1M
Class 2
Class 2M
Class 3R
Class 3B
Class 4
Wavelength range
label
Required for certain wavelength ranges
LED label
Make required word substitutions for LED products
User information
Operation manuals must contain instructions for safe use. Additional requirement apply for
Class 1M and Class 2M
Purchasing and ser- Promotion brochures must specify product classification; service manuals must contain safety
vice information
information
Note: 1. This table is intended to provide a convenient summary of requirements. See text of this standard for complete requirements.
2. For the safety medical laser products, IEC 60601-2-22 applies
3. AEL: Accessible Emission Limit
The maximum accessible emission level permitted within a particular class. For your reference, see ANSI
Z136.1-1993, Section 2.
Symbol and border: black
Background: yellow
Figure A Warning label - Hazard symbol
Legend and border: black
Background: yellow
Section9 APPENDIX
ZS-HL
User’s Manual
9-7
Section9
Requirements from Regulations and Standards
 For U.S.A
FDA (Compliance Guide for Laser Products, 1985, according to 21 CFR1040.10)
Class (see note 1)
Requirements
I
IIa
II
IIIa
IIIb
IV
Performance (all laser products)
Protective
housing
R (see note 2) R (see note 2) R (see note 2) R (see note 2) R (see note 2) R (see note 2)
Safety interlock
R
(see notes 3,4)
R
(see notes 3,4)
R
(see notes 3,4)
Location of
controls
N/A
R
R
R
(see notes 3,4)
R
(see notes 3,4)
R
(see notes 3,4)
R
R
Viewing optics
R
R
R
R
R
R
Scanning
safeguard
R
R
R
R
R
R
N/A
N/A
N/A
R
R
R
Performance (laser systems)
Remote control
connector
N/A
Key control
N/A
N/A
N/A
N/A
R
Emission
indicator
N/A
N/A
R
R
R (see note 10) R (see note 10)
Beam attenuator
N/A
N/A
R
R
R
R
Reset
N/A
N/A
N/A
N/A
N/A
R (see note 13)
Performance (specific purpose products)
Medical
S
S
S
S (see note 8) S (see note 8) S (see note 8)
Surveying, leveling, alignment
S
S
S
S
NP
NP
Demonstration
S
S
S
S
S (see note 11)
(see note 11)
R
R
R
R
R
Labeling (all laser products)
Section9 APPENDIX
9-8
Certification &
identification
R
Protective
housing
D (see note 5) D (see note 5) D (see note 5) D (see note 5) D (see note 5) D (see note 5)
Aperture
N/A
N/A
Class warning
N/A
R (see note 6) R (see note 7) R (see note 9) R (see note 12) R (see note 12)
R
R
R
R
Information (all laser products)
User information
R
R
R
R
R
Product literature N/A
R
R
R
R
R
R
Service
information
R
R
R
R
R
R
Abbreviations:
R:
Required.
N/A: Not applicable.
S:
Requirements: Same as for other products of that Class. Also see footnotes.
NP: Not permitted.
D:
Depends on level of interior radiation.
ZS-HL
User’s Manual
Section9
Requirements from Regulations and Standards
Footnotes:
Note 1: Based on highest level accessible during operation.
Note 2: Required wherever & whenever human access to laser radiation above Class I limits is not needed for product to perform its function.
Note 3: Required for protective housings opened during operation or maintenance, if human access thus gained is
not always necessary when housing is open.
Note 4: Interlock requirements vary according to Class of internal radiation.
Note 5: Wording depends on level & wavelength of laser radiation within protective housing.
Note 6: Warning statement label.
Note 7: CAUTION logotype.
Note 8: Requires means to measure level of laser radiation intended to irradiate the body.
Note 9: CAUTION if 2.5 mW cm2 or less, DANGER if greater than 2.5 mW cm-2.
Note 10: Delay required between indication & emission.
Note 11: Variance required for Class IIb or IV demonstration laser products and light shows.
Note 12: DANGER logotype.
Note 13: Required after August 20, 1986.
Section9 APPENDIX
ZS-HL
User’s Manual
9-9
Section9
Requirements from Regulations and Standards
Summary of Requirements to User
 For Europe
EN 60825-1
Requirements
subclause
Classification
Class 2M
Class 3R
Not required
for visible
Laser safety offi- Not required but recommended for applications that
emission
cer
involve direct viewing of the laser beam
Required for
non-visible
emission
Class 1
Class 1M
Class 2
Not required
Beam attenuator Not required
Section9 APPENDIX
9-10
Class 4
Required
Connect to room or door
circuits
Remove key when not in
use
When in use prevents
inadvertent exposure
Remote interlock Not required
Key control
Class 3B
Indicates
laser is energized
Indicates laser is enerfor non-visi- gized
ble wavelengths
Follow precautions on
warning signs
Emission
indicator device
Not required
Warning signs
Not required
Beam path
Not
required
Specular
reflection
No requirements
Eye protection
No requirements
Protective
clothing
No requirements
Training
No requirements
Class 1M
as for Class
3B
(see note 2)
Class 1M
as for Class
3B
(see note 2)
Not
required
No requirements
Class 1M
as for Class No require3R
ments
(see note 2)
Class 2M
as for
Terminate beam at end of useful length
Class3B
(see note 3)
Class 2M
as for
Prevent unintentional reflections
Class3B
(see note 3)
Not required
for visible
Required if engineering
emission
and administrative proceRequired for dures not practicable and
non-visible
MPE exceeded
emission
Specific
Sometimes
requirerequired
ments
Class 2M
as for
Required for all operator and mainteClass3R
nance personnel
(see note 3)
Note: 1. This table is intended to provide a convenient summary of requirements. See text of this standard for complete precautions.
2. Class 1M laser products that failed condition 1 of table10 of the standard. Not required for Class 1M laser
products that failed condition 2 of table10 of the standard. See the text for details.
3. Class 2M laser products that failed condition 1 of table10 of the standard. Not required for Class 2M laser
products that failed condition 2 of table10 of the standard. See the text for details.
ZS-HL
User’s Manual
Section9
Requirements from Regulations and Standards
 For U.S.A
ANSI Z136.1:1993 “American National Standard for the Safe Use of Lasers” Control
Measures for the Four Laser Classes
Control measures
Engineering Controls
Protective Housing (4.3.1)
Without Protective Housing
(4.3.1.1)
Interlocks on Protective Housing
(4.3.2)
Service Access Panel (4.3.3)
Key Control (4.3.4)
Viewing Portals (4.3.5.1)
Collecting Optics (4.3.5.2)
Totally Open Beam Path (4.3.6.1)
3b
X
4
X




X
X

----MPE
---

----MPE
---

--MPE
MPE
---

--MPE
MPE
---
Limited Open Beam Path (4.3.6.2)
---
---
---
---
X
•
MPE
MPE
X
NHZ
X
NHZ
X
X
MPE
MPE
X
NHZ
X
NHZ
Enclosed Beam Path (4.3.6.3)
Remote Interlock Connector (4.3.7)
Beam Stop or Attenuator (4.3.8)
Activation Warning Systems (4.3.9)
Emission Delay (4.3.9.1)
Indoor Laser Controlled Area
(4.3.10)
Class 3b Laser Controlled Area
(4.3.10.1)
Class 4 Laser Controlled Area
(4.3.10.2)
Laser Outdoor Controls (4.3.11)
None is required if 4.3.1 and 4.3.2 fulfilled
-----------------------------------------
X
X
X
X
X
NHZ
---
Laser in Navigable Airspace
(4.3.11.2)
Temporary Laser Controlled Area
(4.3.12)
Remote Firing & Monitoring
(4.3.13)
Labels
(4.3.14 and 4.7)
Area Posting (4.3.15)
Administrative & Procedural Controls
Standard Operating Procedures
(4.4.1)
Output Emission Limitations (4.4.2)
Education and Training (4.4.3)
Authorized Personnel (4.4.4)
Alignment Procedures (4.4.5)
Protective Equipment (4.4.6)
Spectator (4.4.7)
Service Personnel (4.4.8)
Demonstration with General Public (4.5.1)
---
---
---
---
•
•
•
--X
NHZ
X
---
---
---
---
---
X
---
---
---
---
---
---
---
•
X
NHZ
•
X
NHZ
•

MPE
---

MPE
---

MPE
---

MPE
---
---
---
---
•
X
X
X
X
X
X
---
---
---
•
1
2a
2
3a
X
NHZ
3b
X
NHZ
4
---
---
---
---
•
X
------------
MPE
MPE+
------------
MPE
---
--•
--X
----
MPE
X
LSO Determination
•
X
--X
X
X
--•
--•

X
MPE
X
X
X
X
X
X
X
X
Section9 APPENDIX
Classification
1
2a
2
3a
X
X
X
X
LSO (see note 2) shall establish Alternate Controls
X
ZS-HL
User’s Manual
9-11
Section9
Requirements from Regulations and Standards
Control measures
Laser Optical Fiber Systems
(4.5.2)
Laser Robotic Installations (4.5.3)
MPE
MPE
MPE
---
---
---
---
Eye Protection (4.6.2)
---
---
---
---
Protective Windows (4.6.3)
---
---
---
---
Protective Barriers and Curtains
(4.6.4)
Skin Protection (4.6.5)
---
---
---
---
---
---
---
•
Other Protective Equipment (4.6.5)
Warning Signs and Labels (4.7)
(Design Requirements)
Service and Repairs (4.8)
Modification of Laser Systems
(4.9)
Use may be required
-----
Classification
MPE
X
X
X
NHZ
•
MPE
X
NHZ
•
X
NHZ
X
MPE
X
NHZ
•
---
X
MPE
X
MPE
•
X
NHZ
X
NHZ
LSO Determination
LSO Determination
Note: 1. LEGEND
X:
Shall
•:
Should
---: No requirement
: Shall if enclosed Class 3b or Class 4
MPE: Shall if MPE is exceeded
NHZ: Nominal Hazard Zone analysis required
+:
Applicable only to UV and IR Lasers (4.5.1.2)
2. LSO: Laser Safety Officer
An individual shall be designated the Laser Safety Officer with the authority and responsibility to monitor and
enforce the control of laser hazards, and to effect the knowledgeable evaluation and control of laser hazards.
For your reference, see ANSI Z136.1993, Section 1.3.
Section9 APPENDIX
9-12
ZS-HL
User’s Manual
Section9
Requirements from Regulations and Standards
Definitions of Laser Classification
 For Europe
Laser Product Classifications
EN
Class
Description
Class 1
Lasers which are safe under reasonably foreseeable conditions of operation.
Class 2
Lasers emitting visible radiation in the wavelength range from 400 nm to 700 nm. Eye protection is normally afforded by aversion responses including the blink reflex.
Class 3A
Lasers which are safe for viewing with the unaided eye. For laser emitting in the wavelength range from 400 nm to 700 nm, protection is afforded by aversion responses including the blink reflex. For other wavelengths the hazard to the unaided eye is no greater than
for Class 1. Direct intrabeam viewing of Class 3A lasers with optical aides (e.g., binoculars,
telescopes, microscopes) may be hazardous.
Class 3B
Direct intrabeam viewing of these lasers is always hazardous. Viewing diffuse reflections is
normally safe (see note).
Class 4
Lasers which are also capable of producing hazardous diffuse reflections. They may cause
skin injuries and could also constitute a fire hazard. Their use requires extreme caution.
Note: Conditions for safe viewing of diffuse reflections for Class 3B visible lasers are: minimum viewing distance of
13 cm between screen and cornea and a maximum viewing time of 10 s. Other viewing conditions require a
comparison of the diffuse reflection exposure with the MPE.
 For U.S.A
Comparison of Classifications between FDA and ANSI
Class
FDA definition
Class I/1
Limits applicable to devices that have emissions in the ultraviolet, visible, and infrared
spectra, and limits below which biological
hazards have not been established.
Class IIa/2a
Limits applicable to products whose visible
emission does not exceed Class I limits for
emission durations of 1,000 seconds or less
and are not intended for viewing.
A Class 1 laser is considered to be incapable of producing damaging radiation levels
during operation and maintenance and is,
therefore, exempt from any control measures or other forms of surveillance.
Class 2 lasers are divided into two subclasses, 2 and 2a. A Class 2 laser emits in
the visible portion of the spectrum (0.4 to
0.7 μm) and eye protection is normally
Limits applicable to products that have emis- afforded by the aversion response including
the blink reflex.
sions in the visible spectrum (400 to
710 nm) for emission durations in excess of
0.25 second, providing that emissions for
other durations and/or wavelengths do not
exceed the Class I limits. Class II products
are considered hazardous for direct longterm ocular exposure.
ZS-HL
User’s Manual
Section9 APPENDIX
Class II/2
ANSI description
9-13
Section9
Requirements from Regulations and Standards
FDA definition
ANSI description
Class IIIa/3a
Class
Limits to products that have emissions in the
visible spectrum and that have beams
where the total collectable radiant power
does not exceed 5 milliwatts.
Class IIIb/3b
Limits applicable to devices that emit in the
ultraviolet, visible, and infrared spectra.
Class IIIb products include laser systems
ranging from 5 to 500 milliwatts in the visible
spectrum. Class IIIb emission levels are
ocular hazards for direct exposure throughout the range of the Class, and skin hazards
at the higher levels of the Class.
Class 3 lasers are divided into two subclasses, 3a and 3b. A Class 3 laser may be
hazardous under direct and specular reflection viewing conditions, but the diffuse
reflection is usually not a hazard.
Class IV/4
Exceeding the limits of Class IIIb and are a
hazard for scattered reflection as well as for
direct exposure.
Section9 APPENDIX
9-14
ZS-HL
User’s Manual
A Class 4 laser is a hazard to the eye or skin
from the direct beam and sometimes from a
diffuse reflection and also can be a fire hazard. Class 4 lasers may also produce lasergenerated air contaminants and hazardous
plasma radiation.
Section9
Updating Firmware
Updating Firmware
This section describes how to update the firmware of ZS Series Controllers (such as ZSHLDC/ZS-MDC). Use Warp Engine ZS to update the firmware. Warp Engine ZS is
automatically installed when SmartMonitor ZS is installed.
For the file for updating, please contact your OMRON representative.
• While updating, do not turn off the power of the controller. The controller will not start normally.
• To install the USB driver, log on as an Administrator or a user with system access rights.
Flow of Updating Firmware
Connecting Controller to
a personal computer
Normal?
Installing the USB driver
Installing SmartMonitor ZS
Starting warp engine ZS
Normal?
Setting the connection port
Setting the firmware information
Section9 APPENDIX
Performing update of firmware
Error?
Normal end
Please contact an OMRON
sales representative.
ZS-HL
User’s Manual
9-15
Section9
Updating Firmware
Connecting the Controller to a Personal Computer
1.
Connect the controller to the personal
computer by the USB cable.
The USB driver must be installed when the
controller is connected to the personal
computer for the first time.
Installing the USB driver p.2-16
2.
Turn on the power of the controller.
• Make sure that the power of the controller is connected securely. When the power is turned off while
updating, the controller breaks down and does not run normally.
• Make sure that you turn on the power of the controller only (when it is not connected to other controllers). If you connect two or more controllers, Warp Engine ZS does not start.
Installing SmartMonitor ZS
3.
Install SmartMonitor ZS to a personal computer.
Warp Engine ZS that is used for updating the firmware will be simultaneously
installed.
Installing SmartMonitor ZS p.2-15
Section9 APPENDIX
9-16
Starting Warp Engine ZS
• Start Warp Engine ZS only when the personal computer recognizes the controller normally.
• When you start up ZS-MDC on its own, an error occurs in the controller. However, Warp Engine ZS
should be started up in this state.
ZS-HL
User’s Manual
Section9
Updating Firmware
4.
Select [Programs]-[OMRON]-[SmartMonitorZS]-[WarpEngineZS] from the Windows [Start] menu.
The [WarpEngineZS] screen is displayed.
When the startup of Warp Engine ZS fails,
the following screen is displayed after a
message
appears.
Go
to
“Set
the
connection port”.
Setting the firmware information
5.
Click the [Controller information] button
as required.
The model and version of the controller that
is being connected currently are displayed.
6.
Click the [Loading] button and select the
file in which you want to write.
The model and version of the controller that
is held in the file are displayed.
Performing Update of Firmware
Section9 APPENDIX
7.
Click the [Start upgrade] button in the
displayed [WarpEngineZS] screen.
ZS-HL
User’s Manual
9-17
Section9
Updating Firmware
A message indicating the start of update
appears.
If the message “the model is not the same”
appears when you click the [Start upgrade]
button, it means that the model of the connected controller and the model information in
the specified file do not match. In this case, do
not perform update. The controller will break
down and will not start normally thereafter.
8.
Check the contents of the message and
click the [OK] button.
Update of the firmware will start.
The progress status is displayed during the processing of update. Wait until the
message box indicating that the update has finished normally appears (it takes a
few minutes to complete the update).
• An error may occur on the controller during update; however, please wait.
• If the progress bar stops while update is being performed, or update does not finish normally
even after 10 minutes, there is a possibility that update may have failed.
In this case, contact an OMRON sales representative about the firmware version before
update and the one in the write file.
9.
After update completes, the following
message appears. Follow the instructions on the screen and perform the
operations.
Section9 APPENDIX
9-18
To complete the update of firmware, you need to initialize the controller. If the controller could
not be initialized automatically from Warp Engine ZS, manually initialize it as described in
steps 3 and 4. If the controller is initialized automatically, steps 3 and 4 are not displayed.
10.
ZS-HL
User’s Manual
After you check the message, click the [OK] button.
Section9
Updating Firmware
 Setting the Connection Port
When the startup of Warp Engine ZS fails, the following screen is displayed after a
message appears.
1.
Select [Settings]-[Control Panel] from the [Start] menu in the personal computer and double-click [System].
The [System Properties] screen is displayed.
2.
Click [Device Manager] on the [Hardware] tab.
The [Device Manager] screen is displayed.
Open [Port COM/LPT], and check the COM number in [OMRON Smart Sensor USB COM Drivers (WDM) (COMxx)].
The (COMxx) part indicates the connection port for the controller.
4.
Select the connection port for the controller in [COM Port] and click the
[Set] button.
Warp Engine ZS will start.
ZS-HL
User’s Manual
Section9 APPENDIX
3.
9-19
Section9
Updating Firmware
MEMO
Section9 APPENDIX
9-20
ZS-HL
User’s Manual
Section9
Index
Index
E
Numerics
0RESET MEMORY
1SHOT
5-23
6-8
absolute distance display
ADJUST
AUTO
AUTOOFF
AVERAGE
FILTER
MEASURE
4-2
6-5
5-8
5-26
5-18
5-13
5-24
backlight
bank
CLEAR
MODE
switching
BOTTOM
hold types
MEASURE
BUSY output
5-26
4-10
5-29
5-28
4-11
ECO
emitted light amount display
emitter section
ENABLE
indicator
OUTPUT
EXPOSE
2-6, 8-43,
Extension Cable
EXTERNAL
A
FAR Indicator
Ferrite core
Sensor Controller
Sensor Head
USB
FILTER
FIXED
FOCUS
TERMINAL BLOCK
linear output
FORWARD
FUN mode
5-18
5-24
2-11
5-21
5-13
5-8
7-7
5-25
7-7
4-7
5-25
2-7
2-5
7-4
5-12
5-8
6-13
6-4
5-15
5-2
G
GAIN
Glass
5-7
5-9
H
HIGH
D
DELAY
DIFF
DIFFUSE
DIGITAL
Digital Display
CUSTOM
digital output
DIRECT IN
DOT
1-5
indicator
OUTPUT
HI-RESO
HI-SENS
HI-SPEED
HOLD
DELAY
TRIGGER
TYPE
zero reset types
HYS
1-6
2-10
5-6
5-6
5-6
I/O circuit diagrams
IN
INFO
INIT
input signal
INVERS
2-12
6-17
5-27
5-29
6-17
5-15
5-21
5-19
5-18
5-22
6-7
I
Section9 APPENDIX
CHANGE
4-11
5-24
characteristic points
6-15
CLAMP
7-4, 7-6
COM
6-16
CONNECT
4-2, 5-2
control keys
controller link unit
specifications and external
8-47
dimensions
1-6
coupler
4-2
current display
5-7, 5-25
CUSTOM
5-27, 6-14
CYCLE
1-6
2-10
5-7
8-44
5-19
F
B
C
5-25
4-2
1-4
J
JUDGE
6-7
ZS-L
User’s Manual
9-21
Section9
Index
K
P
K+mX+nY
KEEP
KEYLOCK
5-24
6-15
5-27
LANGUAG
LASER
laser emitter/receiver section
laser indicator
LCD
LCD screen
CUSTOM
name
LD ON
LINE
line beam width
LOW
indicator
OUTPUT
5-28
5-8
1-4
1-5
5-26
panel mount adapter
PASS
indicator
OUTPUT
PCB
PEAK
hold types
MEASURE
P-P
L
M
NEAR Indicator
NON-MEAS
1-5
6-15
OBJECT
OFF
OFFSET
SCALING
zero reset
ON DELAY
OUT0 to 4
OUTPUT
judgment output
linear output
TERMINAL BLOCK
5-9
5-18
O
Section9 APPENDIX
9-22
ZS-L
User’s Manual
5-17
5-22
6-8
2-10
6-8
6-3
6-10
5-18
5-24
5-18
RANGE
5-8
4-2
received light amount display
1-4
receiver section
5-8
REGULAR
4-2
resolution display
RS-232C
cable external dimensions
8-46
7-5, 7-6
cable wiring
communication settings 7-6
1-6
connector
4-2
RUN mode
1-6
2-10
N
1-6
2-10
5-9
R
5-26
5-2
1-5
5-7
8-20
main display
5-2
5-24
MEASURE
4-2
measured value display
Measuring Range
2-3, 8-2, 8-4, 8-5, 8-6
5-9
MIRROR
5-6, 5-7
mode
1-7
mode switch
5-5
Multi-Task
5-4
Multi-Task mode
8-15
mutual interference
mutual interference prevention 5-11
8-42
S
SAMPLE
5-19
5-29
SAVE
5-29
saving
5-15
SCALING
5-20
SELF-DOWN
5-19
SELF-UP
5-28
SenINFO
5-6
SENSING
Sensor Controller
8-41
external dimensions
2-7
Installation
1-5
part names
8-39
specifications
8-40
status indicators
Sensor Head
Adjusting the installation
2-4
position
2-5
Connection
1-6
connector
8-7
external dimensions
Measuring Range
2-3, 8-2, 8-4, 8-5, 8-6
1-4
part names
8-2
specifications
5-8
SETTING
5-4
Single-Task mode
5-7
SKIP
SmartMonitor ZS
Section9
Index
installing
2-15
2-19
Start-up and exiting
2-15
uninstalling
5-12
SMOOTH
5-17
SPAN
8-19
spot diameter
5-22
STATUS
5-24
STEP
4-2, 5-2
sub-display
5-27
system
1-3
system configuration
Z
zero
zero reset
indicator
OFFSET
STATUS
TYPE
1-5
4-5, 5-22
1-5
5-22
5-22
5-22
T
task
5-5
5-5
4-7
4-7
4-2
4-2
5-24
1-6
4-2
6-7
5-11
6-21
6-22
6-18
6-21
6-22
6-19
6-21
6-21
7-8
6-20
6-24
7-8
6-23
5-19
Section9 APPENDIX
selecting
switching
TEACH Mode
TEACHING
terminal block
judgment result display
measured value display
5-10,
THICK
Threshold Selector Switch
threshold value display
TIMER
timing A, B
timing charts
AVERAGE HOLD
bank switching
basic operation
BOTTOM HOLD
laser OFF
NORMAL
PEAK HOLD
P-P HOLD
RS-232C
sample hold
terminal block output
USB
zero reset
TRIGGER
U
USB
communication settings 7-4
2-16
driver
1-6
port
V
VERSION
voltage display
Voltage/Current switch
5-27
4-2
1-6
ZS-L
User’s Manual
9-23
Section9
Index
MEMO
Section9 APPENDIX
9-24
ZS-L
User’s Manual
Section9
Upgrade Information
Upgrade Information
This section explains the information of version upgrade.
Ver.
Ver.1.100
Revised contents
Enable to connect with Real-time parallel Output unit ZG-RPD.
ZG-RPD enables parallel output to a PLC.
Section9 APPENDIX
ZS-HL
User’s Manual
9-25
Section9
Revision History
Revision History
A manual revision code appears as a suffix to the catalog number at the bottom of the front
and back covers of this manual.
Cat. No. Z236-E1-06
Revision code
Section9 APPENDIX
9-26
Revision code
Date
01
2005, Nov.
Original production
02
2007, Jan.
Page 1-3: Changed note 2.
Page 1-4: Reversed location of callouts for receiver and emitter sections.
Page 6-17: Added "CHECK" in middle of page.
Page 7-6: Added note in middle of page.
Pages 8-3 to 8-6: Added "typical example"
Pages 8-7 to 8-9, 8-12, 8-13, and 8-40: Added cable length.
Page 8-19: Changed measurement center value in five locations.
Page 8-29 to 8-37: Changed "high-resolution" to "standard"
Page 8-29: Changed scale in top four charts.
Page 8-39: Added section on export and trade control ordinances.
Page 8-45: Changed two notes.
Page 9-10: Corrected Class 3R cell for eye protection.
02A
2007, Jul.
Page 8-3: Changed table for Note 2.
03
2008, Mar.
• Added Sensor Head ZS-HLDS2VT information.
• Deleted NS SmartMonitor information.
• Minor corrections made.
03A
2012, Mar.
Additions for Notice for Korea Radio Law
04
2014, Aug
• Added Real-time parallel Output unit ZG-RPD information.
(Connectable from Ver.1.100)
• Added Sensor Head ZS-HLDS32 information.
• Minor corrections made.
05
2015, Aug
• Additions corresponding to change of EN standard.
06
2016, April
• Deleted ZS-HLDS2V Sensor Head long distance extension function
ZS-HL
User’s Manual
Revised contents
OMRON Corporation
Industrial Automation Company
Authorized Distributor:
Kyoto, JAPAN
Contact: www.ia.omron.com
Regional Headquarters
OMRON EUROPE B.V.
Sensor Business Unit
Carl-Benz-Str. 4, D-71154 Nufringen, Germany
Tel: (49) 7032-811-0/Fax: (49) 7032-811-199
OMRON ELECTRONICS LLC
2895 Greenspoint Parkway, Suite 200
Hoffman Estates, IL 60169 U.S.A.
Tel: (1) 847-843-7900/Fax: (1) 847-843-7787
OMRON ASIA PACIFIC PTE. LTD.
No. 438A Alexandra Road # 05-05/08 (Lobby 2),
Alexandra Technopark,
Singapore 119967
Tel: (65) 6835-3011/Fax: (65) 6835-2711
OMRON (CHINA) CO., LTD.
Room 2211, Bank of China Tower,
200 Yin Cheng Zhong Road,
PuDong New Area, Shanghai, 200120, China
Tel: (86) 21-5037-2222/Fax: (86) 21-5037-2200
© OMRON Corporation 2005-2016 All Rights Reserved.
In the interest of product improvement,
specifications are subject to change without notice.
Cat. No. Z236-E1-06
0416
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