CRS39 Analogue Angular Rate Sensor High Performance MEMS Gyroscope Technical Datasheet

CRS39 Analogue Angular Rate Sensor High Performance MEMS Gyroscope Technical Datasheet
CRS39 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
CRS39-01
CRS39-02
Unpackaged
Packaged
Features
1 General Description
• Proven and Robust silicon MEMS vibrating
ring structure
• FOG-like performance
• DTG-like size and performance
• Low Bias Instability (0.2°/h)
• Excellent Angle Random Walk (0.017°/h)
• Ultra-low noise (<0.006°/s rms,)
• Optimised for low rate range environments
(e.g. North Finding)
• Precision analogue output
• Wide range from -10°C to +110°C
• High shock and vibration rejection
• Three temperature sensors for precision
thermal compensation
• MEMS frequency output for precision thermal
compensation
• RoHS Compliant
• Packaged and unpackaged options
CRS39 provides the optimum solution for low angular
rate range applications where bias instability, angle
random walk and low noise are of critical importance.
Applications
•
•
•
•
•
•
•
•
•
Platform Stabilization
Precision Surveying
Downhole Surveying
North Finding
Maritime Guidance and Control
Gyro-compassing and Heading Control
Autonomous Vehicles and ROVs
Rail Track monitoring
Robotics
CRS39 is available in two forms; the unpackaged
version which has been designed for mounting within
a 25mm inside diameter cylinder, and a packaged
version for general applications where ease of
mounting is required.
The outstanding stability, low noise and size of the
CRS39 makes this a viable alternative to fibre-optic
and dynamically tuned gyros.
The latest inductive MEMS gyro sensor element
is combined with precision discrete electronics to
achieve high stability and low noise.
Three on board temperature sensors and the resonant
frequency of the MEMS enable additional external
conditioning to be applied to the CRS39 by the
host, enhancing the performance even further. Test
data for Bias and Scale Factor can be provided with
each gyroscope enabling this compensation to be
implemented without the need for further calibration.
Typical applications include downhole surveying,
precision platform stabilization, ship stabilisation, ship
guidance and control, autonomous vehicles and
high-end AHRS.
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
CRS39-00-0100-132 Rev 3
Page 1
CRS39 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
Vcc
1
2
4.6V (Regulated)
Regulator
Ref (2.4V)
4
Ref
GND
PD
VCO
PLL
3
AGC
Rate_Out
SD
Quad
Real
PP
SP
28kHz
8
FREQ
TMP3
PCB
TMP2
TMP1
7
6
5
TMP3
TMP2
TMP1
C.G.18617
Figure 1.1 CRS39 Functional Block Diagram
75
62
7
24.5
20
7
3
Ø25
6
16
1.8
20
24.5
8-Ø1
1
+
7-2
8
All dimensions in millimetres.
16
4
C.G. 18621
Figure 1.2 CRS39-01 Unpackaged - Overall Dimensions
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 2
CRS39-00-0100-132 Rev 3
CRS39 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
26.7
22.4
99.7
27
CRS39®
MADE IN PLYMOUTH UK
3x Ø 3.5
PT. NO. CRS39-nn-0100
SER NO. XXXXXXX
+
100
All dimensions in millimetres.
C.G. 18661
Figure 1.3 CRS39-02 Packaged - Overall Dimensions
2 Ordering Information
Part Number
Package
Description
Overall
Dimensions
mm
CRS39-01-0100
CRS39-02-0100
Single - axis high performance
MEMS gyro (unpackaged)
Bare PCB assembly is intended
for mounting within the user’s
application such as a tube
(25mm diameter), or other
enclosure.
75 x 24.5 x 19.0
Single - axis high performance
MEMS gyro (packaged)
Packaged inside an aluminum
two-part housing fitted with three
mounting lugs. This version has a
flying lead for attachment into the
user’s system. The length of this
lead is between 230 and 260mm.
100 x 27 x 22.4
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
CRS39-00-0100-132 Rev 3
Page 3
CRS39 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
3 Specification
Unless otherwise specified the following specification
values assume Vdd = 4.9 to 5.25V over the temperature
range -10 to +110°C.
Parameter
Minimum
Typical
Maximum
Notes
Angular Rate Range,
°/s
<-25
–
>+25
–
Bias Setting Error,
Volts
-0.10
±0.03
+0.10
Bias setting error at
+45°C
Bias Variation Over
Temperature, °/h
-500
±200
+500
Referenced to the
setting point at +45°C
Bias Residuals Over
Temperature, °/h
-30
±10
+30
Residual error after
external compensation
(Note 1)
<0.3
As measured using the
Allan Variance method,
at constant ambient
temperature
Bias Instability, °/h
–
0.2
Angle Random Walk,
°/h
–
0.017
<0.03
As measured using the
Allan Variance method,
at constant ambient
temperature
Bandwidth, Hz.
15
25
35
-3dB point
Scale Factor, mV/°/s
79.6
80.0
80.4
Nominal Scale Factor
setting at +45°C
Scale Factor Error over
Temperature, %
-1.0
±0.035
+1.0
Referenced to the
setting point at +45°C
Scale Factor NonLinearity Error, % of
Full Scale
–
0.006
0.05
–
Noise to 10Hz,
°/s rms
–
<0.006
0.01
–
Wideband Noise,
°/s rms
–
<0.03
0.05
–
Start Up Time,
seconds
–
–
0.5
Full performance will
require additional time
for thermal stability
-2.0
0.7
+2.0
Unpackaged
-2.5
–
+2.5
Packaged
Misalignment, °
Note1: Assuming a 5th order polynomial fit for bias over temperature.
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 4
CRS39-00-0100-132 Rev 3
CRS39 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
4 Power Requirements
Parameter
Minimum
Typical
Maximum
Notes
4.9
5.0
5.25
Minimum of 4.9V is
required for internal
regulation
Current, mA
–
80
100
–
Noise
13.5kHz to 14.5kHz
–
–
0.5mV
Power supply
ripple (pk - pk)
Noise
40.5kHz to 43.5kHz
–
–
5.0mV
Power supply
ripple (pk - pk)
Maximum
Notes
Supply Voltage,
Vdd, Volts
5 Frequency and Temperature Output Characteristics
Parameter
Minimum
Typical
Frequency output,
kHz
27.0
28.0
29.0
This signal is 2x
resonant frequency of
the MEMS structure and
can be used to measure
the MEMS temperature
Resonant Frequency
Temperature
Coefficient, Hz/°C
-0.90
-0.80
-0.70
–
TMP1, 2 and 3, Volts
at +40°C
-1.16
-1.06
-0.96
Referenced to Ref.
Temperature Sensor
Temperature
Coefficient, mV/°C
-13.7
-11.7
-9.7
LM20B temperature
sensor
6 Operating and Storage Environmental
Parameter
Minimum
Typical
Maximum
Notes
Operating Temperature
Range °C
-10
–
+110
–
Non-operating
Temperature Range °C
-40
–
+130
–
Operational
Shock, g
–
–
250
For 1.7ms half-sine
Non-operational
Shock, g
–
–
1000
For 1.0ms half-sine
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
CRS39-00-0100-132 Rev 3
Page 5
CRS39 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
7 Typical Performance Characteristics
Graphs showing typical performance characteristics for CRS39 are below.
Note: Typical data is with the device powered from a 5.0V supply, unless
stated otherwise.
Figure 7.1 Allan Variance for CRS39
Figure 7.2 Gyro Cumulative Noise
Figure 7.3 Gyro Spectral Characteristics
Figure 7.4 Bias (°/s) vs Temperature
(Including Setting Error at +45°C)
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 6
CRS39-00-0100-132 Rev 3
CRS39 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
Typical Performance Characteristics Continued
Figure 7.5 Normalized Bias vs Temperature
Figure 7.6 Scale Factor Error (80 mV/°/s Nominal)
vs Temperature
Figure 7.7 Normalized Scale Factor Error
vs Temperature
Figure 7.8 Non-Linearity Error (Max)
vs Temperature
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
CRS39-00-0100-132 Rev 3
Page 7
CRS39 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
Typical Performance Characteristics Continued
Figure 7.9 Non-Linearity Error vs
Applied Rate at -10°C
Figure 7.10 Non-Linearity Error vs
Applied Rate at +45°C
Figure 7.11 Non-Linearity Error vs
Applied Rate at +110°C
Figure 7.12 Ring Frequency Linear Fit
vs Temperature
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 8
CRS39-00-0100-132 Rev 3
CRS39 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
Typical Performance Characteristics Continued
Figure 7.13 Temperature Sensor 1 Output
(Volt ref to 0V) vs Test Temperature
Figure 7.14 Temperature Sensor 1 Output
(Volts ref VRef) vs Test Temperature
Figure 7.15 Bias Variation vs Supply Voltage
(at 45°C)
Figure 7.16 Scale Factor Error vs Supply Voltage
(at 45°C)
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
CRS39-00-0100-132 Rev 3
Page 9
CRS39 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
Typical Performance Characteristics Continued
Figure 7.17 Bias Residuals 3rd Order Fit
vs Temperature
Figure 7.18 Bias Residuals 5th Order Fit
vs Temperature
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 10
CRS39-00-0100-132 Rev 3
CRS39 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
8 Interfacing
INTERNAL
BUFFERS/FILTERS
RECOMMENDED
CONNECTIONS
1
+5V
+5V (4.9V to 5.25V)
Vcc
2
Ground (0V)
GND
Amplifier
100Ω
3
Rate
0.1μF
Amplifier
100Ω
4
+
Differential
Instrumentation
Amplifier
-
Ref
Temperature
Sensor
Voltage Follower
Buffer
0.1μF
470Ω
5
(Note 1)
+
LM20B
TMP1
Temperature
Sensor
Voltage Follower
Buffer
0.1μF
470Ω
6
+
LM20B
TMP2
Temperature
Sensor
Voltage Follower
Buffer
0.1μF
470Ω
7
+
LM20B
TMP3
0.1μF
74HC
1kΩ
8
CMOS Schmitt Gate
(e.g. 74HC14, TS7S14F)
FRQ
390pF
Note 1 : TMP outputs can be input into differential
instrumentation amplifiers referenced to
either Pin 4 (Ref) or Pin 2 (GND)
C.G. 18614
Figure 8.1 Recommended Interfacing
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
CRS39-00-0100-132 Rev 3
Page 11
CRS39 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
The table below provides connection details.
The PCB Pin Number applies to the unpackaged version
of the CRS39. The Wire Colour applies to the colour
coding used in the flying lead for the cased version.
PCB
Pin Number
Wire Colour
Name
Comment
1
Red
Vcc
Power Rail: 4.90 to 5.25 Volts, at 100 mA approx. (200mA inrush)
2
Black
GND
Power Supply and Signal Ground, 0 Volts.
3
White
Rate_Out
Angular Rate output. Nominally centred at 2.40 Volts for zero angular rate.
Scale Factor is 80 mV/°/s. Nominal rate range is ± 25°/s
4
Orange
Ref
Voltage reference. Nominally fixed at 2.40 Volts. This reference is derived
from a precision voltage reference integrated circuit and is used as the
reference for the analogue electronics
5
Brown
TMP1
Temperature sensor output. A National Semiconductor LM20B is used to
measure the temperature. TMP1 is located on the PCB, and is the furthest
temperature sensor from the sensor head
6
Blue
TMP2
Temperature sensor output. A National Semiconductor LM20B is used to
measure the temperature. TMP2 is located on the PCB, and is the
temperature sensor midway between TMP1 sensor and the sensor head
7
Yellow
TMP3
Temperature sensor output. A National Semiconductor LM20B is used to
measure the temperature. TMP3 is located on the PCB, and is the
temperature sensor on the under side of the sensor head
8
Green
FREQ
This is CMOS Digital (74HC series) compatible digital output at two
times the frequency of the sensor head
8.1 Temperature Sensors
The temperature sensors all use the LM20B device,
internally connected as shown in Figure 8.2.
4.6V
U10
4
C37
1608
0.1µF
10%
X7R
2
5
V+
Vout
3
R30
0.5%
1608
25ppm
TMP1
470
GND 1
GND 2
NC
1
C38
3216
0.1µF
5%
CH
LM20BIM7/N0PB
The output at 0°C is typically +1.864V with respect
to GND. The temperature coefficient is typically
-11.7 mV/°C.
The output can be measured with respect to GND or
can be put through a differential input instrumentation
amplifier, referenced to the Ref pin, in which case the
offset at 0°C is typically -0.536V. At +45°C, the output
is typically -1.06V with respect to Ref. The temperature
sensors are not intended for use as a thermometer,
since they are not calibrated on the Celsius scale.
They are intended only as a temperature reference for
thermal compensation techniques.
C.G.18618
Figure 8.2 Temperature Sensors
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 12
CRS39-00-0100-132 Rev 3
CRS39 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
8.2 Rate and Ref Outputs
Both the Rate and the Ref outputs are passed through
a simple RC low pass filter before the output pins.
The resistor value is 100 ohms. The capacitor value
is 0.1μF.
9 Glossary of Terms
ADC
Analogue to Digital Converter
ARW
Angular Random Walk
BW
Bandwidth
It is recommended that the Rate Output (signal High
or +) is differentially sensed using a precision
instrumentation amplifier, referenced to the Ref output
(signal Low or -).
C
Celsius or Centigrade
DAC
Digital to Analogue Converter
DPH
Degrees Per Hour
The Offset of the instrumentation amplifier should be
derived from the host stage (e.g. derived from the
ADC Ref Voltage) or from the signal ground if the
following stage is an analogue stage.
DPS
Degrees Per Second
DRIE
Deep Reactive Ion Etch
EMC
Electro-Magnetic Compatibility
ESD
Electro-Static Damage
8.3 Frequency Outputs
F
Farads
This is CMOS Digital (74HC series) compatible digital
output at two times the frequency of the sensor head.
It is provided to give an indication of the temperature
of the MEMS sensor head. The nominal frequency is
28 KHz with a typical temperature coefficient of
-0.8 Hz/°C.
h
Hour
HBM
Human Body Model
Hz
Hertz, Cycle Per Second
K
Kilo
MEMS
Micro-Electro Mechanical Systems
The signal is protected with a 1Kohm resistor before
being output from the CRS39. It is recommended
that this signal is buffered with a CMOS Schmitt Gate
such as 74HC12, or TC7S14F. The signal can be used
to accurately measure the temperature of the MEMS
structure.
mV
Mili-Volts
NEC
Not Electrically Connected
NL
Scale Factor Non-Linearity
PD
Primary Drive
PP
Primary Pick-Off
RC
Resistor and Capacitor filter
s
Seconds
SF
Scale Factor
SMT
Surface Mount Technology
SOG
Silicon On Glass
SD
Secondary Drive
SP
Secondary Pick-Off
T.B.A.
To Be Announced
T.B.D.
To Be Described
V
Volts
An example of measuring the MEMS temperature is
to use a precision crystal oscillator (operating at a
very high frequency, for example 20, 40 or 60 MHz)
to measure the frequency of the ring by measuring
the time (oscillator clock cycles) to count to a defined
number of ring cycles.
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
CRS39-00-0100-132 Rev 3
Page 13
CRS39 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
10 Part Markings
T.B.A.
11 Internal Construction and Theory
of Operation
CRS39 is available in two basic package
configurations:
• Unpackaged
• Packaged
The uncased version is supplied as a PCBA
comprising of two PCBs vertically stacked. The
Sensor Head is a newly designed head, designed
using dual loop and symmetrical tracking on the
MEMS ring, This design specifically improves noise
and stability over both temperature and life. The user
connects to this device by soldering wires to the
holes on the PCB. The holes are 1mm in diameter,
designed for 20-26 AWG wire.
The cased version comprises the same device but
mounted within an enclosure. This version includes
a fl ying lead for connection to the user’s system.
Silicon MEMS Ring Sensor (Gyro)
The silicon MEMS ring is 6mm diameter by 100μm
thick, fabricated by Silicon Sensing Systems using a
DRIE (Deep Reactive Ion Etch) bulk silicon process.
The ring is supported in free-space by sixteen pairs of
‘dog-leg’ shaped symmetrical legs which support the
ring from the supporting structure on the outside of
the ring.
C.G. 18619
Figure 11.1 Silicon MEMS Ring
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 14
CRS39-00-0100-132 Rev 3
CRS39 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
The bulk silicon etch process and unique patented ring
design enable close tolerance geometrical properties
for precise balance and thermal stability and, unlike
other MEMS gyros, there are no small gaps to create
problems of interference and stiction. These features
contribute significantly to CRS39’s bias and scale factor
stability over temperature, and vibration immunity.
Another advantage of the design is its inherent
immunity to acceleration induced rate error, or
‘g-sensitivity’.
electronic architecture with the frequency controlled
by a Phase Locked Loop (PLL), operating with a
Voltage Controlled Oscillator (VCO), and amplitude
controlled with an Automatic Gain Control (AGC)
system. The primary loop therefore establishes the
vibration on the ring and the closed loop electronics
is used to track frequency changes and maintain the
optimal amplitude of vibration over temperature and
life. The loop is designed to operate at about 14kHz.
ν
Can Lid
Upper Pole
Magnet
Silicon
ν
Pedestal Glass
Can Base
Support Glass
Cos2θ
Vibration
Mode at
14kHz
ν
Lower Pole
C.G. 18620
Figure 11.2 MEMS Sensor Head
The ring is essentially divided into 8 sections with
two conductive tracks in each section. These tracks
enter and exit the ring on the supporting legs. The
silicon ring is bonded to a glass pedestal which in
turn is bonded to a glass support base. A magnet,
with upper and lower poles, is used to create a strong
and uniform magnetic field across the silicon ring. The
complete assembly is mounted within a hermetic can
with a high internal vacuum.
The tracks along the top of the ring form two pairs
of drive tracks and two pairs of pick-off tracks. Each
section has two loops to improve drive and pick-off
quality.
One pair of diametrically opposed tracking sections,
known as the Primary Drive PD section, is used to
excite the cos2 mode of vibration on the ring. This is
achieved by passing current through the tracking, and
because the tracks are within a magnetic field causes
motion on the ring. Another pair of diametrically
opposed tacking sections is known as the Primary
Pick-off PP section is used to measure the amplitude
and phase of the vibration on the ring. The Primary
Pick-off sections are in the sections 90° to those of
the Primary Drive sections. The drive amplitude and
frequency is controlled by a precision closed loop
Zero Radial
Motion
at these
points
ν
C.G 18623
Figure 11.3 Primary Vibration Mode
Having established the cos2 mode of vibration on the
ring, the ring becomes a Coriolis Vibrating Structure
Gyroscope. When the gyroscope is rotated about
its sense axis the Coriolis force acts tangentially on
the ring, causing motions at 45° displaced from the
primary mode of vibration. The amount of motion at
this point is directly proportional to the rate of turn
applied to the gyroscope. One pair of diametrically
opposed tracking sections, known as the Secondary
Pick-off SP section, is used to sense the level of this
vibration. This is used in a secondary rate nulling loop
to apply a signal to another pair of secondary sections,
known as the Secondary Drive SD. The current
applied to the Secondary Drive to null the secondary
mode of vibration is a very accurate measure of the
applied angular rate. All of these signals occur at the
resonant frequency of the ring. The Secondary Drive
signal is demodulated to baseband to give a voltage
output directly proportional to the applied rate in free
space.
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
CRS39-00-0100-132 Rev 3
Page 15
CRS39 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
ν
Fc
Resultant
Radial Motion
Fc = Coriolis Force
ν
ν
Applied Rate
Fc
Fc
ν
C.G 18400
Figure 11.4 Secondary Vibration Mode
The closed loop architecture on both the primary
and secondary loops result is excellent bias, scale
factor and non-linearity control over a wide range
of operating environments and life. The dual loop
design, introduced into this new Sensor Head design,
coupled with improved geometric symmetry results in
excellent performance over temperature and life. The
discrete electronics employed in CRS39, ensures that
performance is not compromised.
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 16
CRS39-00-0100-132 Rev 3
CRS39 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
Notes
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
CRS39-00-0100-132 Rev 3
Page 17
CRS39 Technical Datasheet
Analogue Angular Rate Sensor
High Performance MEMS Gyroscope
Notes
Silicon Sensing Systems Limited
Clittaford Road Southway
Plymouth Devon
PL6 6DE United Kingdom
Silicon Sensing Systems Japan Limited
1-10 Fuso-Cho
Amagasaki
Hyogo 6600891 Japan
T:
F:
E:
W:
T:
F:
E:
W:
+44 (0)1752 723330
+44 (0)1752 723331
[email protected]
siliconsensing.com
+81 (0)6 6489 5868
+81 (0)6 6489 5919
[email protected]
siliconsensing.com
Specification subject to change without notice.
© Copyright 2013
Silicon Sensing Systems Limited
All rights reserved.
Printed in England 07/2013
Date 03/07/2013
CRS39-00-0100-132 Rev 3
DCR No. 710004979
© Copyright 2013 Silicon Sensing Systems Limited. All rights reserved. Silicon Sensing is an Atlantic Inertial Systems, Sumitomo Precision Products joint venture company.
Specification subject to change without notice.
Page 18
CRS39-00-0100-132 Rev 3
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