Manual - Pascal Technologies, Inc

Manual - Pascal Technologies, Inc
B718-00-880
Issue E
Instruction Manual
Seiko Seiki STP A803/A1303 (P036)
Turbomolecular Pump System
(Document number MT-36E-001-D)
Manor Royal, Crawley, West Sussex, RH10 2LW, UK
Telephone: +44(0)1293 528844 Fax: +44(0)1293 533453
http://www.bocedwards.com
MT-36E-001-D
STP-A803/A1303 Series
Turbomolecular Pump
INSTRUCTION MANUAL
(First Edition- d)
Read through the Safety Precautions and
each section of this Manual carefully before
using the STP pump.
Keep this Manual in a place where you can
quickly access it at any time.
BOC Edwards Japan Limited
Dec. 2003
Copyright 2003 BOC Edwards Japan Limited. All rights reserved. Printed in Japan.
STP-A803/A1303 Series Instruction Manual
SAFETY PRECAUTIONS
The Safety Precautions in this Manual constitute guidelines to protect
operators, the STP pump and its peripheral equipment.
To avoid personal injury and prevent product and/or peripheral equipment
damage, observe the Safety Precautions as well as the general safety rules
(your country’s laws, regulations, safety standards and so on).
If the equipment is used in a manner not specified by BOC Edwards, the
protection provided by the equipment may be impaired.
SYMBOLS
The following symbols are used in this manual:
Death or Serious Personal Injury
Failure to follow the guidelines marked with this symbol may result in
death or serious personal injury.
Minor Personal Injury, Product and/or Peripheral equipment Damage
Failure to follow the guidelines marked with this symbol may result in
minor personal injury, product and/or peripheral equipment damage.
NOTICE
Items you must follow during operation and maintenance.
ATTENTION : refer to this manual.
BOC Edwards Japan Limited (hereafter called BOC Edwards) cannot
perfectly anticipate circumstances of all of hazards or problems. The
scope of anticipation is limited to the precautions included in the
and
specified in this manual.
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STP-A803/A1303 Series Instruction Manual
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The STP pump is provided with a high-speed rotor. Secure the STP
pump according to the specified method. Failure to do so may lead
to serious personal injury, product and/or peripheral equipment
damage if any abnormality/error occurs in the rotor.
The STP pump operates at high temperatures while the baking heater
or the Temperature Management System (TMS) unit is in operation.
NEVER touch the STP pump and its peripheral equipment while the
baking heater or TMS unit is in operation.
Operators can burn hands.
Execute the following to prevent an accident caused by the gas.
• Check the properties of the gas to be used, referring to the
Material Safety Data Sheet (MSDS) you obtain from the gas
supplier. (explosive・combustible・toxic・corrosive, etc) And, keep
MSDS and a safety advice of gas supplier.
• Warn of the danger of the gas with the warning label when the use
gas is hazardous chemical materials.
• Always execute gas purge in the pump with the inert gas, and then
exhaust residual gases thoroughly from the STP pump when
removing the STP pump from the vacuum equipment.
• Secure safety by wearing personal protective equipment when
using the gas which might influence damage health. In addition,
take appropriate measure for depending upon the properties of the
gas to be used.
Exhaust residual gas thoroughly when disposing of the STP pump.
If the STP pump is used for any toxic or reactive gas, always clean
the STP pump and dispose of it as industrial waste in accordance
with guidelines given by the national and/or local government.
Residual gas in the STP pump may cause an accident which, for
certain gases, may involve serious injury or death.
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STP-A803/A1303 Series Instruction Manual
◇
◇
◇
◇
◇
NEVER use any gas that is not specified as usable in this Manual.
The use of such gas may corrode the STP pump and damage it.
A hazardous live voltage may exist at connector/terminal that marked
.
DO NOT touch the terminal. Doing so may result in electric shock.
When operating connection/disconnection to connector, always
power OFF the STP pump (switch the breaker "OFF").
Always check the STP pump has stopped, then turn OFF the primary
power (switch the breaker "OFF") before proceeding to any of the
following operations. Failure to do so may cause the STP pump to
rotate accidentally, which may injure operators seriously or result in
electric shock. Moreover, do not remove the connecter while the
pump is rotating. The voltage might be output to connector
according to the rotational speed, and it causes the electric shock or
the failure.
• Connect or disconnect cables;
• Perform maintenance such as replacement of fuses;
• Perform inspections such as deposit and/or the air cooling fan; or
• Perform investigations into probable causes and action/measures
taken in the event of occurrence of a problem.
Do not perform the insulation test (insulation resistance test and
withstand voltage test) to the STP control unit and STP pump.
When performing the insulation test to your equipment, turn "OFF"
the STP control unit. The varistor for the power supply line
protection is installed to the STP control unit. DO NOT perform the
insulation test with the varistor installed. Doing so may result in
product damage.
When "emergency off" (EMO) circuit is installed in the vacuum
equipment, consider the following to stop the STP pump safely when
the EMO circuit operates.
• When the EMO circuit operates, atmosphere might be introduced
in the STP pump depending upon the backing pump. Unite the
exhaust gas system to prevent atmosphere from being introduced
into the STP pump when the EMO circuit operates. (example: shut
the valve) When atmosphere is introduced into the STP pump,
the touch down bearing may not operate normally.
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STP-A803/A1303 Series Instruction Manual
◇
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◇
◇
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◇
When removing or installing the pump or at maintenance and
inspection, follow the precautions below. Failure to do so might
hurt your back or cause injuries due to occurrence of an accident
such as fall.
• Use a crane or the like when lifting the heavy product of 18kg or
more.
• When lifting by hands for unavoidable reason, two or more people
must always conduct it.
• When lifting STP control unit with handles, support bottom of STP
control unit, do not have only handle.
Install the STP control unit not only by fitting it with the front panel
fitting screws but also by supporting it from the bottom side.
Fitting the STP control unit with the screws only cannot sustain its
weight, and therefore resulting in product damage.
Always use the STP pump and STP control unit with same model
name, which are specified on their own nameplate. If you plan to
use the units having different model names, an error massage is
indicated and they may not be used. In the latter case, contact
Service office. If you plan to use the units having the same model
name but different serial numbers, an error message is indicated
when they are used without tuning. And, the tuning is necessary
when the length of the STP connection cable is changed. They may
not function normally when they are used without tuning. Once
tuning is completed, re-tuning is not required unless the
configuration (the STP pump serial number, the STP control unit
serial number, and the STP connection cable length) is changed.
Use the STP connection cable that BOC Edwards has specified.
The use of different cables may result in product damage.
Connect the cables securely. NEVER bend nor place heavy objects
on the cable. Doing so may result in electric shock or product
damage.
NEVER remove the splinter shield from the STP pump. Doing so
may result in product damage.
DO NOT put foreign objects into the STP pump. Doing so may
result in product damage.
Always use the power voltage specified on the nameplate for the
primary power voltage of the STP control unit. Wire the power cable
securely. Incorrect wiring may result in electric shock or product
damage.
The wipes used for clean the flange of the pump might become
hazardous waste depending upon the solvent (alcohol). Dispose of
the contaminated wipes appropriately according to the regulations of
each national and/or local government.
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STP-A803/A1303 Series Instruction Manual
◇
◇
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NEVER turn OFF the primary power (DO NOT switch the breaker
"OFF") while the STP pump is rotating. Doing so may result in
product damage.
Perform investigations into probable causes and remove them before
restarting the STP pump in the event of the occurrence of a problem.
The use of the abnormal STP pump may result in product damage.
DO NOT move the STP pump and the STP control unit while the STP
pump is in operation. Doing so may result in product damage.
5
STP-A803/A1303 Series Instruction Manual
INTRODUCTION
Thank you very much for purchasing BOC Edwards’ turbomolecular pump.
The turbomolecular pump is designed to be installed in the vacuum equipment to
exhaust gases from it.
This manual covers all items necessary to ensure safe installation, operation and
maintenance of the following series of the STP-A803/A1303 turbomolecular
pump:
Model Name
• STP-A803C
• STP-A803CV
Specification
Advanced high-throughput type, chemical specific *1
Advanced high-throughput type, chemical specific,
TMS unit*2 attached
• STP-A803W
Advanced high-throughput type, enhanced chemical
specific*3
• STP-A803WV Advanced high-throughput type, enhanced chemical
specific, TMS unit attached
• STP-A1303C
Advanced high-throughput type, chemical specific
• STP-A1303CV Advanced high-throughput type, chemical specific、
TMS unit attached
• STP-A1303W Advanced high-throughput type, enhanced chemical
specific
• STP-A1303WV Advanced high-throughput type, enhanced chemical
specific, TMS unit attached
For the specifications of other models of the STP-A803/A1303 pump series,
contact BOC Edwards.
In this manual, the above STP-A803/A1303 pump series is collectively referred to
as the "STP pump."
*1 : Chemical specific: STP pump with anti-corrosive treatment
(responding to chlorine, fluorine or other system gases)
*2 : TMS: Temperature Management System
*3 : Enhanced chemical specific: STP pump for which anti-corrosive treatment is improved for the inside of the
pump of the chemical specific type
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STP-A803/A1303 Series Instruction Manual
APPLIED STANDARDS
The STP pump conforms to the following directives and standards:
◇
Applied Directives
• EC Machinery Directive
• EC Electromagnetic Compatibility Directive
• EC Low Voltage Directive
◇
Applied Standards
• EN1012-2
• EN61010-1
• EN61326 (class A)
• EN61000-6-2
◇
Applied Standards (Only a some model)*1
• UL3101-1, 1993 (Electrical Equipment for Laboratory Use; Part 1 :
General Requirements)
PRECAUTIONS
1) No part of this manual may be reproduced in any form by any means without
prior written permission from BOC Edwards.
2) BOC Edwards pursues a policy of continuing improvement in design and
performance of this product. The right is, therefore, reserved to vary
specifications and design without notice. Understand that the product you
purchased and its contents including specifications described in this manual
may differ.
REQUEST
If you find inaccuracies or errors in this manual, advise distributor or the nearest
Service office.
*1
: Contact BOC Edwards about recognized model.
7
STP-A803/A1303 Series Instruction Manual
LIMITED WARRANTY
This WARRANTY applies to the customer to whom BOC Edwards has delivered
this product.
1.
WARRANTY PERIOD:
BOC Edwards warrants this product against defects for a period of two (2)
years from the date of delivery or during the period specified in the
agreement made by and between the customer and BOC Edwards.
2.
ITEM WARRANTED:
1) This warranty applies only to the product delivered from BOC Edwards
to the customer.
2) If any defect is found during this period, BOC Edwards will, at its option,
repair or recondition the product free of charge. The costs for repair or
replacement of the product after the warranty period has passed will be
at your own charge.
3.
DISCLAIMER:
BOC Edwards makes no warranty with respect to any damage occurred
due to any of the following during the warranty period:
1)
Handling, operation or maintenance other than that specified herein;
2)
Failure to follow any of the warnings or cautions enumerated under
or
3)
4)
5)
6)
7)
8)
9)
10)
11)
;
Installation, operation or maintenance using parts which are not
specified by BOC Edwards;
Maintenance personnel other than those authorized by BOC Edwards
or Service office have disassembled, reconditioned, or tampered the
product;
Defect resulting from the not-specified use of the product;
When the product is used under special conditions without
obtaining the written consent of BOC Edwards (Particular gases,
strong magnetic field and the radiation are added to the product.);
Defect resulting from deposit;
Water cooling system defect resulting from water quality used;
Defect resulting from the installation of the product (Exclude the
installation by authorized personnel.);
Deterioration in the external because of use (Discoloration,
scratches and so forth);
Product damage occurred during transport or other factors not
attributable to BOC Edwards;
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STP-A803/A1303 Series Instruction Manual
12)
13)
14)
15)
16)
4.
Product breakage or damage due to natural disasters, fire or other
external factors;
Deterioration in the basic performance due to the use of the product
beyond limits of the use;
Any direct, incidental or consequential damage resulting from the
use of the product;
When continuously operated without overhaul after the WARNING
indication ("WARNING" message) on the LCD display;
Overhaul and replacement of maintenance parts;
SPARE PARTS:
● Fuse and air cooling fan for control unit
● Touch down bearing
● Heater
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STP-A803/A1303 Series Instruction Manual
TABLE OF CONTENTS
SAFETY PRECAUTION
INTRODUCTION
PRECAUTIONS
REQUEST
LIMITED WARRANTY
1 Precautions for Safe Operation of the STP Pump.............................................. 1-1
1.1
1.2
1.3
Usable Gases...................................................................................................................... 1-1
Maintenance and Inspection Precautions........................................................................... 1-1
Labels.................................................................................................................................. 1-1
2 Operation Principle of the STP Pump................................................................. 2-1
3 Unpacking .......................................................................................................... 3-1
3.1
3.2
Unpacking the STP Pump and the STP Control Unit ......................................................... 3-1
Accessories......................................................................................................................... 3-2
4 Installation of the STP Pump.............................................................................. 4-1
4.1
4.2
4.3
Name and Function of Each Part........................................................................................ 4-1
Precautions Before Installation ........................................................................................... 4-3
4.2.1 Operating Environment .......................................................................................... 4-3
4.2.2 Installation Area ..................................................................................................... 4-4
4.2.3 Bench ..................................................................................................................... 4-4
How to Install the STP Pump .............................................................................................. 4-6
4.3.1 Cleaning the Seal................................................................................................... 4-7
4.3.2 STP Pump Installation Positions............................................................................ 4-8
4.3.3 How to Secure the STP Pump ............................................................................... 4-9
4.3.4 Vacuum Piping ..................................................................................................... 4-13
4.3.5 Connecting the Purge Port................................................................................... 4-15
5 Gas Pumping, Cooling and Baking the STP Pump ............................................ 5-1
5.1
5.2
5.3
Gas Pumping ...................................................................................................................... 5-1
5.1.1 How to Introduce a Purge Gas............................................................................... 5-1
Cooling the STP Pump........................................................................................................ 5-2
5.2.1 Water Cooling Method ........................................................................................... 5-2
Baking the STP Pump......................................................................................................... 5-3
5.3.1 Attaching a Baking Heater ..................................................................................... 5-3
6 Installation of the STP Control Unit .................................................................... 6-1
6.1
6.2
6.3
6.4
6.5
Name and Function of Each Part........................................................................................ 6-1
6.1.1 Front Panel............................................................................................................. 6-1
6.1.2 Rear Panel ............................................................................................................. 6-4
Precautions Before Installation ........................................................................................... 6-5
6.2.1 Operating Environment .......................................................................................... 6-5
6.2.2 Insulation Test........................................................................................................ 6-5
6.2.3 Installation Area ..................................................................................................... 6-6
Attaching the STP Control Unit to a Rack........................................................................... 6-7
Cable Connection................................................................................................................ 6-8
6.4.1 Name and Dimensions of Each Cable................................................................... 6-8
6.4.2 How to Connect the Cables ................................................................................. 6-10
Connecting to Semiconductor Equipment ........................................................................ 6-12
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STP-A803/A1303 Series Instruction Manual
6.5.1
6.5.2
Connecting to Power............................................................................................ 6-12
Emergency Off Circuit (EMO Circuit) ................................................................... 6-12
7 How to Start/Stop the STP Pump....................................................................... 7-1
7.1
7.2
7.3
7.4
7.5
7.6
Before Starting .................................................................................................................... 7-1
Start Procedures ................................................................................................................. 7-2
Stop Procedures ................................................................................................................. 7-2
Manual Operation................................................................................................................ 7-3
7.4.1 Powering ON.......................................................................................................... 7-3
7.4.2 Starting the STP Pump .......................................................................................... 7-3
7.4.3 Stopping the STP Pump ........................................................................................ 7-4
7.4.4 Starting the STP Pump after Stopping................................................................... 7-4
7.4.5 Powering OFF ........................................................................................................ 7-4
7.4.6 Starting the STP Pump after a Safety Function Operates ..................................... 7-4
Remote Operation............................................................................................................... 7-5
7.5.1 Powering ON.......................................................................................................... 7-5
7.5.2 Starting/Stopping the STP Pump ........................................................................... 7-5
7.5.3 Starting the STP Pump after Stopping................................................................... 7-6
7.5.4 Powering OFF ........................................................................................................ 7-6
7.5.5 Starting the STP Pump after a Safety Function Operates ..................................... 7-6
Operating the TMS Unit (For use with the TMS unit only) .................................................. 7-7
7.6.1 Starting/Stopping.................................................................................................... 7-7
7.6.2 Temperature Control.............................................................................................. 7-7
8 Remote Input/Output Signal Connector.............................................................. 8-1
8.1
8.2
Input Signal Pins ................................................................................................................. 8-1
Output Signal Pins .............................................................................................................. 8-4
9 Adjustment Methods .......................................................................................... 9-1
9.1
9.2
9.3
Tuning ................................................................................................................................. 9-1
9.1.1 Tuning Method ....................................................................................................... 9-1
9.1.2 Each of data after tuning........................................................................................ 9-2
Confirmation Mode.............................................................................................................. 9-4
Parameter Set Mode ........................................................................................................... 9-6
10 Safety Functions .............................................................................................. 10-2
10.1
10.2
10.3
10.4
10.5
10.6
10.7
10.8
Power Failure .................................................................................................................... 10-2
Abnormal State of Magnetic Bearing ................................................................................ 10-2
Excessive Vibration........................................................................................................... 10-2
Motor Driver Overload....................................................................................................... 10-2
Overheating Inside the STP Pump ................................................................................... 10-2
Overheating Inside the STP Control Unit.......................................................................... 10-2
Overspeed......................................................................................................................... 10-2
Abnormality/Error in the TMS Unit (for Use with the TMS Unit) ....................................... 10-2
11 Troubleshooting, Maintenance, and Inspection................................................ 11-1
11.1
11.2
11.3
11.4
11.5
11.6
Troubleshooting Immediately after an Abnormality/Error Occurs..................................... 11-1
11.1.1 Troubleshooting Power Failure ............................................................................ 11-1
11.1.2 Troubleshooting Other Abnormality/Error ............................................................ 11-1
When Error Message is Displayed on LCD ...................................................................... 11-2
11.2.1 Error Messages.................................................................................................... 11-2
Other Abnormalities .......................................................................................................... 11-8
11.3.1 Abnormalities When Powering ON ...................................................................... 11-8
11.3.2 Abnormalities When Performing the STP Pump Start Operation ........................ 11-8
11.3.3 Other Abnormalities ............................................................................................. 11-9
"WARNING" Message Display Function......................................................................... 11-10
11.4.1 First Damage Limit ............................................................................................. 11-10
11.4.2 Second Damage Limit........................................................................................ 11-11
"ERROR RECORD" Message Display Function ............................................................ 11-11
Maintenance and Inspection ........................................................................................... 11-12
11.6.1 Cleaning and Decontamination.......................................................................... 11-13
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STP-A803/A1303 Series Instruction Manual
11.6.2 Inspecting the Deposit ....................................................................................... 11-14
11.6.3 Overhaul............................................................................................................. 11-15
11.6.4 Transporting for Repair or Overhaul .................................................................. 11-16
12 Storage and Disposal ....................................................................................... 12-1
12.1
12.2
12.3
Storage of the STP Pump ................................................................................................. 12-1
Storage of the STP Control Unit ....................................................................................... 12-1
Disposal ............................................................................................................................ 12-2
13 Specifications ................................................................................................... 13-1
13.1
13.2
Specifications for the STP Pump ...................................................................................... 13-1
Specifications for the STP Control Unit............................................................................. 13-5
UNIT CONVERSION TABLE
ANNEX
MALFUNCTION INFORMATION
SERVICE OFFICE LIST
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STP-A803/A1303 Series Instruction Manual
TABLES
Table 3.1
Table 4.1
Table 4.2
Table 4.3
Table 6.1
Table 7.1
Table 7.2
Table 8.1
Table 8.2
Table 8.3
Table 9.1
Table 10.1
Table 10.2
Table 10.3
Table 10.4
Table 11.1
Table 11.2
Table 11.3
Table 11.4
Table 11.5
Table 13.1
Table 13.2
Accessories ................................................................................................................... 3-2
Tightening torque of bolt ................................................................................................. 4-9
Maximum Torque predicted and Recommended securing bolt for inlet port flange..... 4-10
Number of Claw Clamps by Size of Flange.................................................................. 4-11
Connecting the Power Cable........................................................................................ 6-11
Starting/Stopping the STP Pump during Remote Operation (REMOTE X7).................. 7-5
Reset Operation during Remote Operation (REMOTE X7) ........................................... 7-6
REMOTE X7 Input Signal Pins ..................................................................................... 8-2
REMOTE X7 Output Signal Pins .................................................................................. 8-4
Rated Contacts for Relays CR1 to CR8 ....................................................................... 8-7
Data List.......................................................................................................................... 9-2
States of Lamps and REMOTE Output Signals at a Power Failure ........................... 10-2
Operations of the STP Pump after a Power Recovery ............................................... 10-2
Safety Functions ......................................................................................................... 10-6
Safety Functions (When the TMS Unit is Used) ......................................................... 10-8
Error Messages ............................................................................................................ 11-3
Troubleshooting after Powering ON ............................................................................. 11-8
Troubleshooting When Performing the STP Pump Start Operation............................. 11-8
Troubleshooting While the STP Pump Is Rotating ....................................................... 11-9
Cleaning and Decontamination .................................................................................. 11-13
Specifications for the STP Pump ................................................................................ 13-1
Specifications for the STP Control Unit ..................................................................... 13-5
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STP-A803/A1303 Series Instruction Manual
FIGURES
Figure 2.1
Figure 3.1
Figure 4.2
Figure 4.3
Figure 4.4
Figure 4.5
Figure 4.6
Figure 4.7
Figure 4.8
Figure 4.9
Figure 5.1
Figure 6.1
Figure 6.2
Figure 6.3
Figure 6.4
Figure 6.5
Figure 6.6
Figure 7.1
Figure 8.1
Figure 8.2
Figure 9.1
Figure 9.2
Figure 9.3
Figure 9.4
Figure 13.1
Figure 13.2
Figure 13.3
Figure 13.4
Figure 13.5
Cross Sectional View of the STP Pump ....................................................................... 2-2
Example of Lifting the STP Pump ................................................................................. 3-2
Installation of the STP Pump to the Vacuum Equipment ............................................... 4-6
STP Pump Installation Positions .................................................................................... 4-8
Positions of the Outlet Port on the Horizontally or Slanted Installed STP Pump ........... 4-8
Example of securing the STP pump (When securing the inlet port with bolts).......... 4-10
Shape of Reduced Diameter Shank Bolts .................................................................... 4-11
Example of securing the STP pump
(When securing the inlet port flange with claw clamps) ............................................... 4-12
Example of securing the STP pump
(When installing the damper in the inlet port flange) .................................................... 4-12
Connecting the Purge Port ........................................................................................... 4-15
Attaching Positions of the Cooling Unit and Baking Heater ......................................... 5-4
STP Control Unit Front Panel ......................................................................................... 6-3
STP Control Unit Rear Panel.......................................................................................... 6-4
Peripheral Space of the STP Control Unit ...................................................................... 6-6
Example of Securing the STP Control Unit .................................................................... 6-7
External Dimensions of Each Cable ............................................................................... 6-8
External Dimensions of Each Cable ............................................................................... 6-9
STP Pump Operation Procedures .................................................................................. 7-8
REMOTE X7 Input Signal Pins ..................................................................................... 8-3
REMOTE X7 Output Signal Pins .................................................................................. 8-6
Tuning Procedures ......................................................................................................... 9-3
Confirmation Mode Operation Method ........................................................................... 9-5
Parameter Setting Method.............................................................................................. 9-7
Remote Mode Setting Method ........................................................................................ 9-8
External Appearance of the STP Pump (STP-H803 Series) ...................................... 13-2
External Appearance of the STP Pump (STP-H1303 Series) .................................... 13-3
Label Affixing Positions for the STP Pump ................................................................. 13-4
External Appearance of the STP Control Unit ............................................................ 13-7
Label Affixing Positions for the STP Control Unit ....................................................... 13-8
14
1
Precautions for Safe Operation of the STP Pump
1.1
Usable Gases
The STP series models are chemical specific pumps: chlorine or fluorine system
gases can be used. When you use gases including alkaline metals, but excluding
Li, gases including Ga, Hg, In, or Sn, or HBr, contact BOC Edwards.
◇
To prevent an accident, confirm the characteristics of gases to be
used, referring to the Material Safety Data Sheet (MSDS) you obtain
from the gas supplier.
And, keep MSDS and a safety advice of gas supplier.
CAUTION
◇
◇
1.2
Introduce a dry N2 gas (purge gas) to protect the inside of the STP
pump when using reactive or corrosive. The use of reactive or
corrosive gas may result in product damage.
Cool the STP pump to prevent the STP pump from overheating when
pumping gases.
Maintenance and Inspection Precautions
Perform any maintenance or inspection of the STP pump and the STP control
unit, following Section 11, "Troubleshooting, Maintenance and Inspection."
1.3
Labels
The following labels are affixed to the STP pump and STP control unit.
Read the contents of the labels before operation. For the positions of the labels,
see Section 13, "Label Affixing Position."
1-1
Installation
STP-A803/A1303 Series Instruction Manual
STP-A803/A1303 Series Instruction Manual
1) STP Pump Caution Label
Installation
This label describes precautions for operating the STP pump.
Follow these precautions.
! CAUTION
! 注意
◇必ず指定の型式のケーブ ◇Use only designated type
ルを使用してください。
of cables.
2) STP Control Unit Caution Label
This label describes precautions for operating the STP control unit.
Follow these precautions.
! 注意
! CAUTION
◇ポンプとコントロールユニッ ◇Adjust levitation according
トを異なるNoの組合せで使用 to instruction manual,if pump
する場合、接続ケーブル長を and control unit have different
変更する場合は取扱説明書に serial number or you change
従い調整を行ってください。 connection cable length.
◇必ず指定の型式のケーブルを ◇Use only designated type of
使用してください。
cables.
3) Heavy Product Caution Label
This label is affixed to the product with a weight of 18 kg or more.
Follow the precautions of Section 2, "Unpacking" so as not to cause any
accident during handling.
! 注意
! CAUTION
重量物
Heavy product
kg
kg
取扱注意
Handle with
caution.
1-2
STP-A803/A1303 Series Instruction Manual
This label describes installation of the STP pump.
Install the STP pump according to the precautions of Section 4, "Installation
of the STP Pump."
! 警告
! WARNING
ポンプは取扱説明書の指示 Install pump securely
に従い確実に固定してくだ according to instruction
manual.
さい。
5) STP Control Unit Safety Instruction Label
This label describes instructions before operating the STP control unit.
安全上の指示事項
SAFETY INSTRUCTIONS
使用前に取扱説明書を Read instruction manual
お読みください。
before operation.
6)
Connector Caution Label
◇ This label describes lock of the connector.
◇ This label instructs operators to prevent the connectors from being
disconnected while the STP pump is in operation.
! 注意
! CAUTION
◇コネクタは確実に
ロックしてくださ
い。
◇ブレーカONの時
はコネクタを外さ
ないでください。
◇Lock connector
secureiy.
◇Do not remove
connector while
breaker is ON.
7) Rotational Direction Instruction Label
This label describes the rotational direction of the STP pump.
The STP pump rotates in this direction.
ROTATION
1-3
Installation
4) STP Pump Installation Warning Label
STP-A803/A1303 Series Instruction Manual
8) High Voltage Device Caution Label
Installation
The STP control unit is equipped with a high voltage device.
warns operators to pay attention to the high voltage device.
This label
9) Voltage Rating Label
This label describes the rated voltage of the STP control unit.
Use voltage specified in this label.
200~240V
200V specification
10) Hot Surface Warning Label
This label instructs operators so as not to touch the hot surface of the STP
pump.
The use of the TMS unit may lead to a considerable rise in temperatures
outside the STP pump.
This label warns operators so as not to burn hands.
(only when using the TMS unit)
! WARNING
! 警告
Hot surface.
Can burn hands.
Do not touch.
高温部
やけどします。
触らないでく
ださい。
1-4
STP-A803/A1303 Series Instruction Manual
Operation Principle of the STP Pump
The STP series pump is a series of a magnetically-levitated turbomolecular
pumps, featuring the following:
•
•
•
Oil free
Low vibration
High reliability
The STP pump is configured so that rotor blade (1) and stator blade (2) are
aligned alternately in the axial direction. Gas molecules are pumped from the
inlet port to the outlet port by the high-speed rotation of the rotor.
The STP pump is configured with a screw channel pump and turbine blade
together in the lower side of rotor blade (1) for high-throughput even at a low
vacuum range (a few hundred Pa (a few Torr)).
Rotor blade (1) is supported by the magnetic bearing without mechanical contact.
Therefore, the STP pump requires no lubrication oil unlike conventional
turbomolecular pumps using ball bearings.
The magnetic bearing consists of 5 pairs of active magnetic bearings. The rotor
is supported in the radial direction by 4 pairs of radial direction active magnetic
bearings that consist of radial sensor (3) and radial electromagnet (4). A pair of
axial direction active magnetic bearings consists of axial sensor (5) and axial
electromagnet (6) to support the rotor in the axial direction. Because the rotor
is supported without mechanical contact, it can rotate at low vibration.
There is less heat generated from magnetic bearings because there is no friction.
Therefore the STP pump requires no cooling. However, the STP pump requires
water or air cooling during baking and gas pumping. Taking into consideration
a breakage of magnetic bearings, touch down bearings (7) coated with solid
lubrication have been installed. They do not contact with the rotor during the
rated operation.
A radial sensor, an axial sensor, a rotation sensor and a temperature sensor
always monitor the magnetic bearing as well as the rotor. If an
abnormality/error occurs, the rotor will stop.
2-1
Installation
2
STP-A803/A1303 Series Instruction Manual
(7) Touch down bearing
Installation
(1) Rotor blade
(2) Stator blade
(3) Radial sensor
(4) Radial electromagnet
(7) Touch down bearing
(3) Radial sensor
(5) Axial sensor
(6) Axial electromagnet
Figure 2.1 Cross Sectional View of the STP Pump
2-2
3
Unpacking
3.1
Unpacking the STP Pump and the STP Control Unit
Check the following before unpacking the STP pump and STP control unit.
•
Check the package for bruises, breakage, wetness, and other.
If there is any abnormality/error or it is judged necessary to return the
product, contact BOC Edwards or the selling agency.
•
Check the contents of the package.
See Section 3.2, "Accessories."
◇
◇
◇
◇
◇
◇
◇
The net weight of the STP pump is approx. 39 kg. Use a crane or
other appropriate means to lift the STP pump.
Lift the STP pump with an eyebolt or a similar tool that uses the
fitting hole attached to the inlet port flange.
Lift it with the aid of a suspension tool under the base when
installing the STP pump without fitting hole.
Observe national laws/regulations, safety standards and so on when
lifting the STP pump.
Use a crane or other appropriate means sufficient enough to
withstand the load when lifting the STP pump.
Always lift the STP pump in stable places free of excessive shock or
vibration to prevent it from shaking or dropping.
Have at least two people lift the STP pump when doing so by hand.
Be careful not to scratch the flange of the STP pump.
Before installing the STP pump, check whether or not there are
scratches on the surface.
It is recommended to keep the packaging materials, such as the
corrugated fiberboard container and cushioning material for possible
reuse.
3-1
Installation
STP-A803/A1303 Series Instruction Manual
STP-A803/A1303 Series Instruction Manual
Installation
Figure 3.1 Example of Lifting the STP Pump
3.2
Accessories
Table 3.1 Accessories
Item
STP control unit
Primary power cable*1
STP connection cable*1
Inlet port cover
Outlet port cover
STP connector cover
Blank flange for purge port
Clamping ring for purge port
O-ring washer for purge port
Leg
Rubber foot for leg
Instruction Manual
Q’ty
1
1
1
1
1
1
1
1
1
8
4
Remarks
With a single-side connector
With both-side connectors
KF10
KF10
KF10
4 legs are attached to the STP pump
1
*1 : The standard cable length is 5 m. Both 10 m and 20 m are available. Contact BOC Edwards on other
specifications.
3-2
4
Installation of the STP Pump
4.1
Name and Function of Each Part
(1) Inlet Port Flange (VG*1, ICF*2, ISO, and other)
・ Connected to the vacuum equipment (at the high vacuum side).
(2) Outlet Port Flange (KF*1 40)
・ Connected to the inlet port side of the backing pump.
(3) STP Connector (60 pins)
・ Connected to the STP connection cable.
(4) Purge Port (KF*1 10)
・ Introduces a purge gas.
In order to protect the inside of the STP pump when pumping
reactive or corrosive gases.
The STP pump is delivered with a blank flange attached to this port.
(5) Cooling Water Port (PT∗3 (RC*1) 1/4 Female Screw)
・ Connected to the STP pump cooling water pipe.
This port is used when water cooling the STP pump or using the
TMS∗4 unit.
(6) Temperature Sensor Connector (optional accessory)
・ A temperature sensor is attached.
For use with the Temperature Management System (TMS∗4) unit
only (usually, a connector is not attached).
*1 : JIS
*2 : JVIS
∗3
: Conform to ISO
∗4
: Temperature Management System
4-1
Installation
STP-A803/A1303 Series Instruction Manual
STP-A803/A1303 Series Instruction Manual
Installation
(1) Inlet port flange
(6) Temperature sensor connector
(5) Cooling water port
(2) Outlet port flange
(3) STP connector
(4) Purge port
Figure 4.1 Configuration of the STP Pump
4-2
STP-A803/A1303 Series Instruction Manual
Precautions Before Installation
4.2.1
Operating Environment
◇
Check the properties of the gas to be used, referring to the Material
Safety Data Sheet (MSDS) you obtain from the gas supplier. And,
keep MSDS and a safety advice of gas supplier.
Take measures according to MSDS to prevent an accident when
using toxic, reactive or combustible gases. Dilute the gas to be
used with the inert gas controlled if necessary. And, take measures
according to MSDS to prevent an accident caused by exhaust gas.
◇
The STP series models are chemical specific pumps: chlorine or
fluorine system gases can be used with these models. When you
use gases including alkaline metals, but excluding Li, gases
including Ga, Hg, In, or Sn, or HBr, contact BOC Edwards (See
Section 1.1, "Usable Gases").
If the STP pump is used in an area with radiation, contact BOC
Edwards.
◇
Install the STP pump in a place meeting the following requirements:
Ambient Temperature
0 to 40 °C
Ambient Relative Humidity 30 to 95 % (no dew condensing)
Environment
STP Pump Installation
Equipment Conditions
• A place free of externally-applied mechanical
shock.
• A place free of a heat source
(Keep clear of the heat source or attach a
thermal shield plate).
• A place free of a strong magnetic field
(Range: up to 15 mT (150 G) in the axial
direction, and up to 3 mT (30 G) in the radial
direction with respect to the rotational axis of
the STP pump).
• A place free of a strong electric field.
• A place free of exposure to radiation.
• No discharge of high voltage (more than 500 V)
(If more than 500 V is discharged, contact BOC
Edwards).
• Install the STP pump securely so that foreign
materials will easily fall into the STP pump
(Ex.: Si wafers or samples are positioned above
the STP pump) (To prevent foreign materials
from falling into the STP pump, design a shield
plate with large conductance).
4-3
Installation
4.2
STP-A803/A1303 Series Instruction Manual
4.2.2
Installation Area
Installation
Leave enough space for the following in addition to that for the STP pump:
•
•
Space for maintenance and inspection
Space for connecting cables
◇
The minimum bending radius of the STP connection cable is
100 mm (See Section 13, "External Appearance of the STP Pump"
[bending dimensions of the connection cable]).
DO NOT excessively bend the cables and beware of any obstacles
when installing the STP pump.
Also, leave enough space to install other cables without bending
them excessively.
◇
The L-type STP connection cable is also offered.
Edwards if necessary.
4.2.3
Contact BOC
Bench
A bench must be prepared by the customer to secure the STP pump. The shape
and size of the bench differ depending upon the type of STP pump. Follow the
precautions of the WARNING, CAUTION, or NOTICE (See Section 4.3.3, "How
to Secure the STP Pump").
◇
The STP pump is provided with a high-speed rotor. Any internal
abnormality/error may result in a jump in rotational torque leading to
personal injury or peripheral equipment damage.
Design and secure the bench for the STP pump so that it can
withstand the maximum torque generated due to the occurrence of
an abnormality/error. Refer to Section 4.3.3, "How to Secure the
STP Pump" for abnormal torque.
4-4
◇
Secure the customer-prepared bench and the vacuum equipment on
the floor or peripheral equipment and other equipment in accordance
with the customer application. NEVER move them while the STP
pump is in operation.
◇
Confirm the dimensions by the external appearance of the STP pump
when designing the bench.
The bolt may not be able to be inserted from the lower side of the
inlet port according to the shape of the inlet port flange.
When the external appearance of the STP pump is not in the manual,
contact BOC Edwards.
4-5
Installation
STP-A803/A1303 Series Instruction Manual
STP-A803/A1303 Series Instruction Manual
4.3
How to Install the STP Pump
Installation
Install the STP pump to the vacuum equipment as shown in Figure 4.2.
The STP pump can be
installed through the damper
(optional accessory).
Vacuum Equipment
Inlet Port
Inlet Port Flange
Vacuum Valve
Dry Pump, and other
To Power Supply
Front
Panel
Backing
Pump
Power Cable
STP Control
Unit
STP Connection Cable
Outlet Port
Remote Cable
To Vacuum Equipment Control Circuit
Figure 4.2 Installation of the STP Pump to the Vacuum Equipment
4-6
STP-A803/A1303 Series Instruction Manual
Cleaning the Seal
Inspect the seals of inlet and outlet port flanges for dirt or oil spots before
installing the STP pump to the vacuum equipment.
Take the following measures for cleaning the seals:
• Clean off with a pure gas.
• Wipe with proper solvent (such as alcohol).
◇
◇
◇
◇
A splinter shield is attached to the inlet port flange to prevent foreign
materials from falling into the STP pump.
Always leave the splinter shield attached during operation.
The wipes used for clean the flange of the pump might become
hazardous waste depending upon the solvent (alcohol). Dispose of
the contaminated wipes appropriately according to the regulations of
each national and/or local government.
The splinter shield cannot perfectly prevent foreign materials from
falling into the STP pump.
DO NOT install the STP pump in such a manner that foreign materials
can easily fall into it (for example, Si wafers or samples are
positioned above the STP pump). If installing the STP pump in such
a manner, always attach a shield plate with sufficient conductance
above the STP pump to prevent foreign materials from falling into it.
Foreign materials falling into the STP pump through the splinter
shield may result in product damage.
Be careful not to scratch the flange of the STP pump.
Check whether or not there are scratches on the surface, before
installing the STP pump.
4-7
Installation
4.3.1
STP-A803/A1303 Series Instruction Manual
4.3.2
STP Pump Installation Positions
Installation
The STP pump can be installed vertically, horizontally, upside-down and slanted.
Upside-down
Horizontal
Vacuum
Equipment
Slanted
Vertical
Figure 4.3 STP Pump Installation Positions
When installing the STP pump in a horizontal or slanted position, it is
recommended to install it so that the direction of the outlet port is on a vertical
or horizontal plane in the direction of the gravity.
This makes it possible to reduce the load on the magnetic bearing and the heat
generated by the STP pump.
Outlet Port
Outlet Port
Outlet Port
Figure 4.4
Outlet Port
Direction of Gravity
Positions of the Outlet Port on the Horizontally or
Slanted Installed STP Pump
4-8
STP-A803/A1303 Series Instruction Manual
How to Secure the STP Pump
◇
◇
The STP pump is provided with a high-speed rotor. The worst-case
failure may result in a jump in rotational torque leading to personal
injury or peripheral equipment damage.
The method of securing the STP pump will depend on the installation
requirements. Secure the STP pump to the vacuum equipment as
follows:
Design and secure the mounting for the STP pump so that it can
withstand the maximum rotational torque. Refer to Table 4.2 for
torque in pump abnormality.
with bolts
Refer to "1) When securing the
No
Secure the inlet port
inlet port with bolts"
Refer to "2) When securing the
Damper
with Claw Clamps
inlet port flange with claw
clamps"
Refer to "3) When installing the
Yes
◇
◇
damper in the inlet port flange"
In some cases, the damper and the claw clamper securing cannot be
used depend on the type of the STP pump.
Refer to Table 4.1 for tightening torque of the bolt.
Table 4.1 Tightening torque of bolt
◇
◇
◇
Size of bolt
Tightening torque of bolt (Nm)
M8
12.0
M10
24.1
M12
42.1
When making the leg to secure the base, make them shortened more
than ones attached to the STP pump.
Use a material that has a tensile strength of 600N/mm2 or more.
When securing the base, use stainless steel securing bolts with a
tensile strength class is 70 or more.
When using any securing method other than that specified in this
manual, contact BOC Edwards.
4-9
Installation
4.3.3
STP-A803/A1303 Series Instruction Manual
Installation
stallation
1) When securing the inlet port with bolts
Refer to Table 4.2 for torque in pump abnormality and recommended
securing bolts. Secure the inlet port flange with all of the boltholes of
the size specified in the Inlet Port Flange Standard. Reduced diameter
shank bolts (R.D.S.B.) listed on Table 4.2 are more reinforced bolts over
standard bolts by smoothing the portion to attach flange securing bolts to
the respective face at the equipment side. Refer to Figure 4.6 for Shape
of R.D.S.B. Secure the base with all 8 screw-holes for legs or all 8
attached legs. Follow "CAUTION" on page 4-9 about legs and bolts for
securing the base. Make sure that the recommended securing bolt may
be different depending on the method of securing the base.
Table 4.2 Maximum Torque predicted and Recommended securing bolt for inlet port flange
Model of TMP
STP-A803
Type of flange
Torque in pump
abnormality [Nm]
Base(8 positions)securing
Recommended
securing bolt
for TMP Flange
Type of bolt
Type of steel*1
Strength*1
VG150
ISO160F/ISO160
ICF203
3.0×104
3.0×104
3.0×104
No
Yes
R.D.S.B.*2
Standard
Carbon steel
Alloyed steel
Equivalent to
AMS 6419
Stainless steel
70 or more
Model of TMP
Yes
R.D.S.B.*2
Standard
Carbon steel
Stainless steel
Alloyed steel
Equivalent to
70 or more
AMS 6419
No
Yes
Standard
Standard
Carbon steel
Alloyed steel
Stainless steel
12.9 or more
70 or more
STP-A1303
Type of flange
Torque in pump
abnormality [Nm]
Base(8 positions)securing
Recommended
securing bolt
for TMP Flange
No
Type of bolt
VG200
ISO200F/ISO200/ISO250
ICF253
2.7×104
2.6×104
3.0×104
No
Yes
No
Yes
Standard
Standard
Standard
Standard
Type of steel*1 Stainless steel Stainless steel Stainless steel Stainless steel
Strength*1
70 or more
70 or more
70 or more
No
Yes
Standard
Standard
Stainless steel Stainless steel
70 or more
70 or more
70 or more
Recommended fitting
bolt for flange
Secure the base
(a) When the base is not secured
(b) When the base is secured
Figure 4.5 Example of securing the STP pump
(When securing the inlet port with bolts)
*1
*2
Refer to ISO898-1(JISB1051), ISO3506(JISB1054) and AMS6419(Aerospace Material Specification)
Refer to Figure 4.6 Shape of Reduced Diameter Shank Bolts (=R.D.S.B.)
4-10
STP-A803/A1303 Series Instruction Manual
Refer to the following Figure for the shape of R.D.S.B.
Installation
Equipment
Equipment Installation face
t
t
Space by cantering
Pump Flange
d
r
Pump Flange
M8
M10
M12
r
VG/ICF Flange
ISO_F Flange
Bolt size
d
Type of flange
t
ISO_F flange
2.5 mm or more
ICF flange
1 mm or more
ISO_F flange
3 mm or more
VG flange
1. 5 mm or more
ISO_F flange
3. 5 mm or more
VG flange
2 mm or more
d
r
5.9 mm or more
7.5 mm or more
0.8 mm or more
9.1 mm or more
Figure 4.6 Shape of Reduced Diameter Shank Bolts
◇
Be sure to confirm that the surface of the leveled and smoothed area
(expressed by "d" in the Figure 4.6) is free of crack, depression, and
other damages. Also, when you want to use commercially-available
screws, be sure to thoroughly grind them so as not to leave spiral
seams on their bottom.
2) When securing the inlet port flange with claw clamps
Refer to Table 4.2 for rotational torque.
When securing the inlet port flange with only the claw clamp, the vacuum
equipment cannot withstand the maximum rotational torque generated
by the worst-case failure. To make the vacuum equipment withstand
abnormal torque, secure the base with all 8 screw-holes for legs or all 8
attached legs. Follow "CAUTION" on page 4-9 about legs and bolts for
securing the base.
For the claw clamp-type, use the required number of claw clamps as
specified in Table 4.3. Position the claw clamps evenly on the
circumference.
Table 4.3 Number of Claw Clamps by Size of Flange
Size of Flange
ISO 160 or less
ISO 200 to 250
ISO 320 or more
Number of Claw Clamps
4 or more
6 or more
8 or more
4-11
STP-A803/A1303 Series Instruction Manual
Installation
stallation
Vacuum Equipment
Claw Clamps
Secure the base
Figure 4.7 Example of securing the STP pump
(When securing the inlet port flange with claw clamps)
3) When installing the damper in the inlet port flange
Refer to Table 4.2 for rotational torque.
In case of using a damper, secure the base with all 8 screw-holes for legs
or all 8 attached legs. Follow "CAUTION" on page 4-9 about legs and
bolts for securing the base.
When the base cannot be secured because of the equipment design, install
the pump with a torque restraint like the one shown in Figure 4.8 (b).
◇
◇
Use a damper only at the vertically upright position.
DO NOT remove the bolts and nuts attached to reinforce the damper.
Vacuum Equipment
Vacuum Equipment
Damper Clamps
Secure the base
Hole to prevent
from rotating
Leg
(a) When securing the base
(b) When installing not to rotate
Figure 4.8 Example of securing the STP pump
(When installing the damper in the inlet port flange)
4-12
STP-A803/A1303 Series Instruction Manual
Vacuum Piping
◇
◇
DO NOT open the STP pump through the flange to atmospheric air
while the STP pump is running.
If atmospheric air flows into the STP pump, it may not function
normally.
Depending upon the type of the backing pump used, atmospheric air
may reverse flow into the STP pump when the backing pump stops.
Attach a vacuum valve to the middle of the piping between the STP
pump outlet port flange and the backing pump, and close the vacuum
valve when the backing pump stops.
In order to let the STP pump bring its performance into full play, follow the
precautions below:
1) Be careful not to scratch the flange of the STP pump.
Before installing the STP pump, check whether or not there are scratches on
the surface.
2) Use stainless steel or aluminum alloy tubes with a low gas loss to connect the
vacuum equipment to the STP pump.
3) Take measures for minimizing leakage. It is also necessary to degrease the
tubes as regularly as possible to keep the gas loss as low as possible.
4) It is recommended to use a backing pump of pumping speed 1300 L/min or
more.
However, the pressure at the inlet and outlet ports varies with the flow rate
of gas, capacity of the vacuum equipment, length and material of the piping.
Select a backing pump in accordance with the capacity and starting method
(simultaneous starting, starting after generating roughing vacuum) suitable
for the vacuum equipment you use.
5) Connect the STP pump and the backing pump using stainless steel or
aluminum alloy tubing, flexible tubing, vacuum rubber or Teflon tubing, and
other.
The following measures can be used to avoid the transmission of the vibration
of the backing pump to the STP pump and the vacuum equipment.
• DO NOT place the backing pump on the same floor as the vacuum
equipment.
• Locate the backing pump on a vibration-proof table.
Attain 1/3 or less of the rotational speed of the backing pump, when
adjusting the inherent frequency of the backing pump installed on a
vibration-proof table.
• Attach a weight to the piping from the backing pump, or secure the piping
to a rigid, heavy object free of vibration.
• Use a tube of high flexibility.
4-13
Installation
4.3.4
STP-A803/A1303 Series Instruction Manual
Installation
stallation
6) Depending upon the type of the backing pump used, oil vapor may
contaminate the inside of the STP pump. Some oil viscosity could cause a
malfunction when there is a strong reverse flow of oil.
Take the following measures to ensure the correct flow of oil:
• Attach a vacuum valve to the middle of the piping between the STP pump
outlet port flange and the backing pump.
• Attach an absorption trap adjacent to the vacuum valve.
Piping at the Inlet Port Flange
Attach the inlet port to the high vacuum side.
Maximum working pressure: 13.3 Pa [0.1 Torr] (for water cooled)
Pressure at the inlet port flange
applicable continuously
Piping at the Outlet Port Flange
Attach the outlet port to the inlet port flange of the backing pump
(primary side pump).
Allowable backing pressure: 270 Pa [2 Torr] (for water cooled)
Pressure at the outlet port flange
applicable continuously
◇
◇
Upper pressure is applicable under the following conditions:
• The N2 or other similar gas is vacuumed.
• The backing pump (pumping speed: 1,300 L/min) is used.
To attain the ultimate pressure shown in Table 13.1, "Specifications
for the STP Pump," set the pressure at the outlet port flange to
1.3 Pa (10-2 Torr) or less.
4-14
STP-A803/A1303 Series Instruction Manual
Connecting the Purge Port
When pumping reactive or corrosive gases, introduce a dry N2 gas or other gas into
the STP pump in order to protect the inside of the STP pump.
As shown in Figure 4.9, introduce a dry N2 gas through the electromagnetic vent.
valve, needle valve or similar valve (must be prepared by the customer) from the
purge port.
For instructions on how to introduce the purge gas, see Section 5.1, "Gas Pumping."
◇
When not introducing the purge gas, close the purge port with the
blank flange (attached at delivery).
Dry Gas N2 or Other
Purge Port KF10
Figure 4.9 Connecting the Purge Port
4-15
Installation
4.3.5
5
Gas Pumping, Cooling and Baking the STP Pump
5.1
Gas Pumping
◇
When pumping gases, they may remain in the STP pump. Introduce
a purge gas and then exhaust all gasses.
Residual gases in the STP pump may cause an accident when the
STP pump is removed.
Confirm the characteristics of gases to be used, referring to the
Material Safety Data Sheet (MSDS) you obtain from the gas supplier.
◇
The STP series models are chemical specific pumps; chlorine or
fluorine system gases can be used with these models. When you
use gases including alkaline metals, but excluding Li, gases
including Ga, Hg, In, or Sn, or HBr, contact BOC Edwards.
Cool the STP pump to prevent the STP pump from overheating when
pumping gases
◇
5.1.1
How to Introduce a Purge Gas
◇
When pumping reactive or corrosive gases, introduce a purge gas to
protect the inside of the STP pump. Doing so may result in product
damage.
Connect a needle valve or a similar part to the purge port and introduce a dry N2
gas or other gas to perform a gas purge (See Section 4.3.5, "Connecting the Purge
Port").
◇
◇
◇
The proper amount of the gas purge is approx. 3.4×10 -2 Pa·m3/sec
(20SCCM).
The allowable gas pressure ranges from zero [atmospheric
pressure] to 4.9×104Pa [gauge pressure] (zero [atmospheric
pressure] to 0.5 kgf/cm2 [gauge pressure]).
High-pressure at the inlet port may result in a noise. This is no
abnormality/error.
5-1
Installation
STP-A803/A1303 Series Instruction Manual
STP-A803/A1303 Series Instruction Manual
5.2
Cooling the STP Pump
Installation
When pumping gases, cool the STP pump.
Also, when performing baking, always cool the STP pump.
If the TMS unit is used, cool the STP pump with the method specified for the
TMS unit.
5.2.1
Water Cooling Method
Connect the cooling water pipe to the cooling water port in accordance with
Figure 5.1.
The female screw PT (Rc)1/4 is used in the cooling water port.
Secure the connection hose to prevent water leakage.
Use cooling water under the following conditions:
Amount of water:
2 L/min
Temperature:
5 to 25 °C
Water pressure:
2.9×105 Pa (3 kgf/cm2) or less.
◇
◇
◇
◇
Use clean water as much as possible.
Cooling water containing foreign materials may corrode or clog the
cooling water pipe.
When the cooling system is clogged with foreign materials, clogs
may possibly be removed by feeding cooling water reversibly.
When the STP pump is overheated due to shortage or suspension of
water, the protective function detects the overheated condition in
the STP pump and stops the STP pump.
As a further safety procedure, attach a flow switch to the cooling
water exit so that the STP pump stops if abnormal cooling water
flow occurs (A flow switch is available on the market).
When the STP pump is not to be used for a long period of time or it
is to be moved after use, introduce compressed air from one side of
the cooling water port so that no water will remain inside.
The joint for water cooling unit is made of stainless steel.
To prevent corrosion, connect the stainless steel joint.
5-2
STP-A803/A1303 Series Instruction Manual
Baking the STP Pump
To attain a less pressure in a shorter time and reduce the exhaust time, bake the
vacuum equipment and STP pump.
◇
The surfaces of the STP pump and its peripheral equipment will
become extremely hot when performing baking. NEVER touch
them with bare hands.
◇
The TMS unit and the baking heater cannot be used together at the
same time.
When baking the STP pump, always cool it to prevent overheating.
Start baking after cooling is started.
Set the temperature of the baking heater to 120 °C or less.
DO NOT pump gases during baking to prevent overheating.
◇
◇
◇
◇
5.3.1
To exhaust the gas discharged from the vacuum equipment and the
inner wall of the STP pump, run the STP pump during baking.
Attaching a Baking Heater
1)
Install the backing heater (special accessory) near the inlet port flange in
the perimeter of the envelope.
2)
Affix the hot surface warning label attached on the surface of the pump seen
well. (see Figure 5.1, "Attaching Positions of the Cooling Unit and Baking
Heater")
◇
◇
◇
◇
Check the rated voltage of the baking heater before use. (The range
of the available voltage of the backing heater (special accessory) is
display voltage ±10%.
Wind the baking heater around the surface of the STP pump tightly.
If the baking heater is not wound tightly, the loose parts will
overheat.
Procure protective parts for the baking heater, such as an earth
leakage breaker or fuses when using the baking heater.
DO NOT apply excessive force to the cable for the baking heater.
5-3
Installation
5.3
STP-A803/A1303 Series Instruction Manual
Installation
Baking Heater
Cooling Water Port
PT(RC)1/4
Figure 5.1 Attaching Positions of the Cooling Unit and Baking Heater
5-4
6
Installation of the STP Control Unit
6.1
Name and Function of Each Part
6.1.1
Front Panel
(1) "START" Switch (flat panel switch, green)
・ STP pump rotating function (valid in MANUAL operation only).
(2) "STOP" Switch (flat panel switch, dark gray)
・ STP pump stop operation function (valid in MANUAL operation
only).
(3) "RESET" Switch (flat panel switch, gray)
・ Alarm reset function (valid in MANUAL operation only).
・ Tuning function (valid in both MANUAL and REMOTE operation).
(4) "MANUAL/REMOTE" Changeover Switch (slide switch, black)
・ Operation mode changeover function.
(5) "SELECT" Switch (flat panel switch, gray)
・ LCD display (Confirmation mode change) function (valid in both
MANUAL and REMOTE operations).
・ Setting mode change function (valid in both MANUAL and REMOTE
operations).
Press both of "SELECT" and "UP" switches simultaneously to enter
the setting mode.
(6) "UP" Switch (flat panel switch, gray)
(7) "DOWN" Switch (flat panel switch, gray)
・ Abnormality/error display change function (valid in both MANUAL
and REMOTE operations).
・ Setting content confirmation function (valid in both MANUAL and
REMOTE operations).
・ Setting content change function (valid in both MANUAL and
REMOTE operations).
(8) "ENTER" Switch (flat panel switch, gray)
・ Setting content determination function (valid in both MANUAL and
REMOTE operations).
・ WARNING message display function (valid in both MANUAL and
REMOTE operations).
6-1
Installation
STP-A803/A1303 Series Instruction Manual
STP-A803/A1303 Series Instruction Manual
Installation
(9) LCD
・ The LCD displays a pump’s operation state, speed, or other messages.
・ The LCD displays an error message when an abnormality/error
occurs in the STP pump.
(10) "ACCEL." Lamp (green LED)
・ Lights during acceleration (ACCELERATION state).
(11) "NORMAL" Lamp (green LED)
・ Lights during rated speed operation (NORMAL OPERATION state).
(12) "BRAKE" Lamp (green LED)
・ Lights during deceleration (BRAKE state).
(13) "POWER" Lamp (green LED)
・ Lights while the power is ON.
・ Goes out while the backup power is being supplied.
(14) "FAILURE" Lamp (red LED)
・ Lights when any of the abnormalities/errors occurs on the STP pump
and the STP control unit. The LCD displays an error message
simultaneously.
(15) "REMOTE" Lamp (green LED)
・ Lights while the operation mode is remote.
(16) "TEMP CTRL" Lamp (green LED)
・ Lights while the TMS unit (optional accessory) is in operation.
6-2
STP-A803/A1303 Series Instruction Manual
(3)
(14)
(15)
(6)
(4)
(5)
STP CONTROL UNIT
(13)
POWER
FAILURE
(11)
(10)
(1)
ON
TEMP CTRL
RESET
NORMAL
(16)
REMOTE
ACCEL
START
UP
SELECT
DOWN
ENTER
BRAKE
STOP
(12)
(2) (7)
(8)
Figure 6.1 STP Control Unit Front Panel
6-3
Installation
(9)
STP-A803/A1303 Series Instruction Manual
6.1.2
Rear Panel
Installation
◇
A hazardous live voltage may exist at connector that marked
.
DO NOT touch the terminal. Doing so may result in electric shock.
When operating connection/disconnection to connector, always
power OFF the STP pump (Switch the breaker "OFF").
(17) AC POWER Connector (X2)
A maximum voltage: Equal to the input voltage of this connector. (MAX
240VAC)
・ For primary power input.
(18) MAIN POWER Breaker
・ Switches ON/OFF the primary power.
(19) P.CONNECTOR Connector (X1)
A maximum voltage: 79VAC
・ For connection of the STP connection cable.
(20) REMOTE Connector (X7)
A maximum voltage: Equal to the input voltage of this connector. (MAX
125VAC)
・ For the remote operation.
(21) TMS Connector (X5)
A maximum voltage: Equal to the input voltage of "AC POWER"
connector. (MAX 240VAC)
・ For the connection of the TMS unit (optional accessory).
(22) Ground Terminal
・ For connection of the ground.
(22)(19)
(20)
ON・1
X1 P.CONNECTOR
X7 REMOTE
X5 TMS
(18)
OFF・0
MAIN POWER
X2
AC POWER
N PE L
(21)
(17)
Figure 6.2 STP Control Unit Rear Panel
6-4
STP-A803/A1303 Series Instruction Manual
Precautions Before Installation
6.2.1
Operating Environment
Install the STP control unit in a place meeting the following requirements:
Ambient Temperature
0 to 40 °C
Ambient Relative Humidity
30 to 95% (no dew condensing)
Environment
•
•
•
•
•
•
•
•
•
•
•
•
Installation Condition
6.2.2
A place free of exposure to direct sunlight.
A place free of high humidity.
A place free of dust.
A place free of salty air.
A place free of dripping water.
A place free of explosive or inflammable gas.
A place free of corrosive gas.
A place free of radiation.
A place free of strong magnetic and electric fields.
A place free of excessive vibration.
A place free of a source of electric noise.
Install the STP control unit horizontally
(within ±10°C).
Insulation Test
Do not perform the insulation test (insulation resistance test and withstand
voltage test) to the STP control unit.
When performing the insulation test to your equipment, turn "OFF" the STP
control unit so that the test voltage is not applied to the STP control unit.
◇
The varistor for the power supply line protection is installed to the
STP control unit.
DO NOT perform the insulation test with the varistor installed.
Doing so may result in product damage.
6-5
Installation
6.2
STP-A803/A1303 Series Instruction Manual
6.2.3
Installation Area
•
•
Space for maintenance and inspection
Space for inlet and outlet of air for cooling
- Top and side: 5 cm or more
- Bottom:
1.8 cm or more (height of the rubber feet)
Space for connecting the cables
- Rear:
11.5 cm or more
•
The minimum bending radius of the STP connection cable is
100 mm (See Section 13, "External Appearance of the STP Control
Unit" [Cable Space]).
DO NOT excessively bend the cables and beware of any obstacles
when installing the STP pump.
Also, leave enough space to install other cables without bending
them excessively.
5cm
or more
◇
5cm
or more
5cm
or more
1.8cm
or more
Installation
Leave enough space for the following in addition to that for the STP control unit
5cm
or more
11.5cm
or more
Figure 6.3 Peripheral Space of the STP Control Unit
6-6
STP-A803/A1303 Series Instruction Manual
Attaching the STP Control Unit to a Rack
The dimensions of the STP control unit front panel conform to EIA standard.
Therefore, this panel can be attached to any type of commercially-available racks.
Attach the STP control unit to the rack according to the following steps:
•
•
•
Attach the front panel to a rack using the screw holes for the front panel.
Also support the STP control unit from the bottom using a support angle
or a similar tool.
When attaching the STP control unit to a movable rack, to protect the
STP control unit during transport, remove the rubber foot from the
bottom and attach the STP control unit to the rack using the screw holes
for the rubber foot.
◇
◇
◇
The STP control unit cannot be supported with only the screws on
the front panel (The STP control unit is a heavy product).
Always support it from the bottom.
When installing the STP control unit, DO NOT block the ventilation
port of the STP control unit by the support angle or other things. It
causes the control unit to overheat.
For the dimensions of the front panel and positions of screw holes
for the rubber feet, see Section 13, "External Appearance of the STP
Control Unit."
Support Angle
Part: Secure with Screw
Figure 6.4 Example of Securing the STP Control Unit
6-7
Installation
6.3
STP-A803/A1303 Series Instruction Manual
6.4
Cable Connection
Name and Dimensions of Each Cable
Unit:mm
STP Control Unit Side
105
STP Pump Side
Blue label(see NOTICE)
100
φ20.6
99
54
29
STP Connection Cable
54
60 Pin ( Pin )
60 Pin ( Socket )
105
97
Installation
6.4.1
L-Type Connector
Figure 6.5 External Dimensions of Each Cable
◇
There are two types of STP connection cables. These cables can be
distinguished by a blue label.
This series pump can use either STP connection cable.
*
6-8
STP-A803/A1303 Series Instruction Manual
Unit:mm
STP Control Unit Side
Installation
Power Side (Primary)
51
Crimp-Type Terminal Lug (M4 *1)
36
54
Power Cable
φ
8.1
25
1.5mm2×3 cores
φ8.1 (Brown, Blue, Yellow/Green)
or φ8.8 (Black1, Black2, Yellow/Green)
3 Pin (Socket)
N (L2)
L (L1)
PE(
)
a) without power plug*1
STP Control Unit Side
51
Power Side (Primary)
Plug type:NEMA6-15
49.5
N (L2)
38
φ
36
54
Power Cable
φ
8.1
25
3 Pin (Socket)
L (L1)
L (L1)
φ8.1 (Brown, Blue, Yellow/Green)
or φ8.8 (Black1, Black2, Yellow/Green)
N (L2)
PE(
1.5mm2×3 cores
)
b) with power plug
Figure 6.6 External Dimensions of Each Cable
*1
: JIS
6-9
PE(
)
STP-A803/A1303 Series Instruction Manual
6.4.2
How to Connect the Cables
Installation
◇
◇
◇
◇
◇
◇
Use the STP connection cable that BOC Edwards has specified. The
use of other cables may result in product damage.
When connecting/disconnecting cables, always power OFF the STP
pump (switch the breaker "OFF").
Failure to do so may result in electric shock or product damage.
With each connector, align the position of the guide key and insert
the pin vertically so as not to bend it.
If the pin is bent, not only may the connector not function normally,
but may make the pins contact, resulting in a malfunction.
Lock and securely tighten each connector and screw.
DO NOT apply voltage to each pin and DO NOT cause any
short-circuiting between pins.
Connect each cable securely. DO NOT place heavy objects on the
cables nor bend them excessively.
Support each cable so as not to apply direct force to the connectors
or terminals.
If any problem occurs in cables, connectors or terminals, the STP
pump may not function normally.
(1) Connecting the STP Connection Cable
Connect the receptacle (socket) side of the STP connection cable to the STP
connector of the STP pump and connect the plug (pin) side to "P.CONNECTOR
X1" of the STP control unit.
(2) Connecting the TMS Connection Cable (for Use with the TMS unit only)
Connect the plug (pin) side of the TMS connection cable to the "TMS X5" of the
TMS control unit.
(3) Connecting the Power (Primary Side) Cable
Connect the power cable to the "AC POWER X2" on the STP control unit rear
panel as shown in Table 6.1.
6-10
STP-A803/A1303 Series Instruction Manual
CON1
Pin No.
Cable Color
L(L1)
Brown or
Black1
N(L2)
Blue or
Black2
) Yellow/Green
PE(
◇
◇
◇
◇
Remarks
Rear Panel
"AC POWER"
Outline of
Connector
Single phase 200 to 240 V AC ±10%
Both 50/60 Hz
N
Ground
PE
L
Confirm the power voltage on the name plate.
Connect the power cable securely to prevent incorrect wiring.
DO NOT apply surge voltage exceeding 1 kV to the input power line.
Always ground the power cable to prevent electric shock.
6-11
Installation
Table 6.1 Connecting the Power Cable
STP-A803/A1303 Series Instruction Manual
6.5
Connecting to Semiconductor Equipment
Installation
The STP pump is a component system when installing to the semiconductor
equipment.
Consider the followings when designing the semiconductor equipment.
6.5.1
Connecting to Power
The STP control unit receives its power from the semiconductor equipment
electrical distribution system via a circuit breaker.
Electrical energy isolation (Lockout/Tagout) is achieved by opening the main
disconnect device or circuit breaker of the semiconductor equipment, thereby:
removing power from the STP pump.
Provide the equipment with the main disconnect or circuit breaker devices rated
for at least 10,000 Arms symmetrical amperes interrupting capacity (AIC).
6.5.2
Emergency Off Circuit (EMO Circuit)
Activation of EMO circuit of the equipment will interrupt electrical power from
the STP control unit.
When the power is shut off, the STP pump performs the same as a power failure.
(After backup operation of a power failure, the rotor lands on the touch down
bearing)
Consider the followings when establishing the EMO circuit.
◇
◇
◇
Unite the exhaust gas system to prevent atmosphere from being
introduced into the STP pump when the EMO circuit operates.
(example: shut the valve) When atmosphere is introduced into the
STP pump, the touch down bearing may not operate normally.
The STP pump rotates for a while after the EMO circuit shuts off the
power. Perform a recovery operation after the STP pump has
stopped completely.
Before performing the operation check of the EMO circuit with
regular maintenance, stop the STP pump to prevent damage to the
touch down bearing.
6-12
STP-A803/A1303 Series Instruction Manual
How to Start/Stop the STP Pump
◇
◇
◇
7.1
NEVER connect or disconnect any cables while the power is ON.
NEVER turn the primary power OFF (switch the breaker "OFF") while
the STP pump is in rotation.
DO NOT release the inlet port flange or outlet port flange into the
atmosphere while the STP pump is in rotation.
Before Starting
After completing installation, piping, leakage test of the STP pump, installation
of the STP control unit, and wiring of cables, the STP pump is ready for start.
Check the following items before starting:
1) Are the STP pump and the STP control unit secured according to the
appropriate method?
2) Is the power cable connected correctly to the power supply?
3) Is the power voltage selected properly?
4) Are the STP connection cable and other cables securely connected?
Are each terminal and each connector securely locked?
5) Is the serial number of the STP pump the same as that of the STP control
unit?
If they are different, perform the tuning according to Section 9.1, "Tuning."
6) Did you change the STP connection cable length? If you did, perform the
tuning by reference to Section 9.1, "Tuning."
7-1
Operation
7
STP-A803/A1303 Series Instruction Manual
7.2
Start Procedures
Start the backing pump before or simultaneously with start of the STP pump.
Open the vacuum valve located at the outlet port flange side after starting the
backing pump.
◇
◇
Operation
7.3
DO NOT open the vacuum valve without operating the backing pump.
Depending upon the type of the backing pump, doing so may cause a
reverse flow of oil, which could contaminate the inside of the STP
pump.
When start/stop operations are frequently performed, the STP pump
may overheat. Avoid doing so.
Stop Procedures
Close the vacuum valve located at the outlet port flange side just before or after
stopping the STP pump.
After closing the valve, stop the backing pump.
◇
DO NOT stop the backing pump without closing the vacuum valve.
Depending upon the type of the backing pump, doing so could cause
a reverse flow of atmospheric air into the STP pump, which may
result in a malfunction.
◇
DO NOT stop the backing pump without closing the valve.
Depending upon the type of the backing pump, doing so may cause a
reverse flow of oil, which could contaminate the inside of the STP
pump.
7-2
STP-A803/A1303 Series Instruction Manual
There are two methods of operating the STP pump: MANUAL and
REMOTE.
Select one which fits your vacuum equipment.
7.4
Manual Operation
(See Figure 7.1.)
Slide the "MANUAL/REMOTE" changeover switch on the STP control unit front
panel to the position opposite to "ON." At this time, the "REMOTE" lamp is off.
Powering ON
1) Switch "ON" the breaker on the rear panel. (To prevent incorrect operation, a
metal fitting is attached to the breaker. Loosen the screw, lift the metal
fitting, and secure it.)
The magnetic bearing functions and the rotor levitates (POWER ON state).
The "POWER" lamp lights.
2) The STP control unit executes the self test. If no error is found, the LCD
displays "Levitation".
In case of the STP pump with the TMS unit (optional accessory), the "TEMP
CTRL" lamp also lights and the TMS unit starts.
7.4.2
Starting the STP Pump
1) Press the "START" switch on the front panel to start and accelerate the STP
pump. The "ACCEL." lamp lights. The LCD displays the current rotational
speed in "ACCEL: ***00rpm" in units of 500 rpm (ACCELERATION state).
◇
Until "ACCEL: 500 rpm" is displayed, "ACCEL:
for Approx. 1 minute on the LCD.
rpm" is displayed
2) When the STP pump attains the rated speed of rotations, the "ACCEL." lamp
goes out, and the "NORMAL" lamp lights. Also, the LCD displays
"NORMAL: ***00rpm" (NORMAL OPERATION state).
7-3
Operation
7.4.1
STP-A803/A1303 Series Instruction Manual
7.4.3
Stopping the STP Pump
1) Press the "STOP" switch on the front panel to stop the STP pump.
The "NORMAL" lamp or "ACCEL." lamp goes out, and the "BRAKE" lamp
lights (BRAKE state).
2) The "BRAKE" lamp goes out when the rotational speed goes below 500 rpm.
7.4.4
Starting the STP Pump after Stopping
Press the "START" switch on the front panel to reaccelerate the STP pump.
The STP pump can be reaccelerated even while it is stopping.
7.4.5
Powering OFF
Operation
Switch "OFF" the breaker on the rear panel when all three lamps of "ACCEL.",
"NORMAL", and "BRAKE" are off.
The magnetic bearing stops, the rotor lands, and the "POWER" lamp goes out
(POWER OFF state).
In case of the STP pump with the TMS unit (optional accessory), the "TEMP
CTRL" lamp also goes out and the TMS unit stops.
7.4.6
Starting the STP Pump after a Safety Function Operates
A safety function operates when an abnormality/error occurs in the STP pump or
peripheral equipment. To restart the STP pump, remove the cause of the
abnormality/error after the "BRAKE" lamp goes out, and press the "RESET"
switch. The "FAILURE" lamp goes out and the safety function is released
(RESET operation). Then, press the "START" switch.
For the safety functions and troubleshooting, see Section 11, "Troubleshooting,
Maintenance, and Inspections."
7-4
STP-A803/A1303 Series Instruction Manual
7.5
Remote Operation
(See Figures 7.1.)
(Read through Section 8, "Remote Input/Output Signal Connector" before
use.)
Slide the "MANUAL/REMOTE" changeover switch on the STP control unit front
panel to "ON." The "REMOTE" lamp lights.
Powering ON
1) Switch "ON" the breaker on the STP control unit rear panel. (To prevent
incorrect operation, a metal fitting is attached to the breaker. Loosen the
screw, lift the metal fitting, and secure it.)
The magnetic bearing functions and the rotor levitates (POWER ON state).
The "POWER" lamp lights.
2) The STP control unit executes the self test. If no error is found, the LCD
displays "Levitation".
In case of the STP pump with the TMS unit (optional accessory), the "TEMP
CTRL" lamp also lights and the TMS unit starts.
7.5.2
Starting/Stopping the STP Pump
There are two methods of starting/stopping the STP pump.
Use one of them.
Table 7.1 Starting/Stopping the STP Pump during Remote Operation
(REMOTE X7)
Method
1
Starting the Pump
1) Short the circuit between (1)-(21).
2) Short the circuit between (3)-(21) for 0.3
seconds or more.
However, when inputting this signal
simultaneously with switching "ON" the
breaker on the rear panel, short the
circuit between (3)-(21) for 10 seconds or
more.
2
Short the circuit between (1)-(3). In this
case, (21) is not used.
7-5
Stopping the Pump
Open the circuit
between (1)-(21).
Open the circuit
between (1)-(3).
Operation
7.5.1
STP-A803/A1303 Series Instruction Manual
7.5.3
Starting the STP Pump after Stopping
Perform the start operation to reaccelerate the STP pump. See Section 7.5.2,
"Starting/Stopping the STP Pump."
The STP pump can be reaccelerated even while it is stopping.
7.5.4
Powering OFF
Switch "OFF" the breaker on the rear panel when all three lamps of "ACCEL.",
"NORMAL", and "BRAKE" are off.
The magnetic bearing stops, the rotor lands, and the "POWER" lamp goes out
(POWER OFF state).
Operation
In case of the STP pump with the TMS unit (optional accessory), the "TEMP
CTRL" lamp also goes out and the TMS unit stops.
7.5.5
Starting the STP Pump after a Safety Function Operates
A safety function operates when an abnormality/error occurs in the STP pump or
peripheral equipment. To restart the STP pump, remove the cause of the
abnormality/error after the "BRAKE" lamp goes out, and perform the operation
shown in Table 7.2. The "FAILURE" lamp goes out and the safety function is
released (RESET operation). Then, restart the STP pump.
For the safety functions and troubleshooting, see Section 11, "Troubleshooting,
Maintenance, and Inspections."
Table 7.2 Reset Operation during Remote Operation (REMOTE X7)
Method
1
Reset Operation
Short the circuit between (1)-(22) for 0.3 seconds or more.
7-6
STP-A803/A1303 Series Instruction Manual
7.6
Operating the TMS Unit (For use with the TMS unit only)
7.6.1
Starting/Stopping
Power on the STP pump to automatically start the TMS unit. Power off the STP
pump to automatically stop the TMS unit. While the TMS unit is in operation,
the "TEMP CTRL" lamp of the STP control unit lights. When the STP pump is in
the power ON state, the TMS unit operates regardless of the status of the STP
control unit. When the STP pump is the malfunction, the TMS unit is stopped.
Temperature Control
•
•
When the temperature of the STP pump base is lower than the setting
value, the TMS heater is turned "ON", and the cooling water value is
turned "OFF" to heat the STP pump.
When the temperature of the STP pump base is higher than the setting
value, the TMS heater is turned "OFF," and the cooling water value is
turned "ON" to cool the STP pump.
The LCD displays the actual temperature of the STP pump base as "TMS
TEMP:**°C".
7-7
Operation
7.6.2
STP-A803/A1303 Series Instruction Manual
<Operation>
<STP Pump State>
<LCD Message>
Breaker ON
Software Version
v *.* 1997 *****
Autotest
Execute Self Test
Version
Self test in progress
(upper only)
Autotest complete
Self test completed
(upper only)
Operation
Start Operation of
the STP Pump
Levitation State
Levitation
TMS TEMP : **℃
Upper:Levitation state
Lower:TMS actual temp
(for only with TMS unit).
Acceleration State
ACCEL : ***00rpm
TMS TEMP :**゚C
Upper:Acceleration state
Lower:TMS actual temp
(for only with TMS unit).
Normal Operation State
NORMAL ***00rpm
TMS TEMP :**゚C
Upper:Normal operation state
Lower:TMS actual temp
(for only with TMS unit).
BRAKE : ***00rpm
TMS TEMP :**゚C
Upper:Brake state
Lower:TMS actual temp
(for only with TMS unit).
Stop Operation of
the STP Pump
Brake State
Figure 7.1 STP Pump Operation Procedures
7-8
STP-A803/A1303 Series Instruction Manual
8
Remote Input/Output Signal Connector
The remote input/output signal connector (REMOTE X7) is used for input/output
remote signals.
This connector is of D-Sub∗1 type (37-pins, socket type).
The screw for connector is M2.6*2.
(19)
(1)
(20)
REMOTE X7 Pin Arrangement
◇
8.1
Procure the connector for remote connection at your company.
Input Signal Pins
Use input signal pins according to Table 8.1 and Figure 8.1.
Remote input signals function during REMOTE operation only, except the
ROTATION INHIBIT signal is input.
Two abbreviations are used in Table 8.1:
COM:
∗1
*2
Common IN:
Input Pin
: D-Subminiature connector (Conforms to MIL-C-24308)
: JIS
8-1
Operation
(37)
STP-A803/A1303 Series Instruction Manual
Table 8.1 REMOTE X7 Input Signal Pins
Pin
Description
(1)
(3)
COM
START IN
Operation
(1)
COM
Pins for inputting the START signal. The following
two methods are available:
1) Short the circuits between (1)-(21). Then, short the
circuits between (3)-(21) for 0.3 seconds or more.
However, when inputting this START signal
simultaneously with switching "ON" the breaker on
the rear panel, continue to short these pins for 10
seconds or more.
2) Short the circuits between (1)-(3).
In this case, (21) is not used.
Pins for inputting the STOP signal.
1) When 1) above is used to start the STP pump, open
the circuits between (1)-(21) to stop the STP pump.
2)
When
2) above is used to start the STP pump, open
STOP IN
the circuits between (1)-(3) to stop the pump.
(21)
(1)
(22)
COM
RESET IN
(1)
(5)
COM
INHIBIT
(2), (4), (6), (18), (19),
(20), (23), (24), (31),
(34), (36), (37)
Pins for inputting the abnormality RESET signal.
Short the circuits between (1)-(22) for 0.3 seconds or
more to turn off the "FAILURE" lamp.
Pins for inputting the rotation INHIBIT signal (valid in
both MANUAL and REMOTE operations).
When pins (1)-(5) are set to open, the STP pump does
not rotate even by performing the start operation.
When these pins are set to open when the pump is in
rotation, the pump will stop (The pump does not rotate
even by manually starting the pump).
When not using this function, set the rotation INHIBIT
signal function to the "DISABLE" (See Section 9.3,
"Setting Mode").
These pins are not used.
◇
8-2
DO NOT connect anything to
these pins. Doing so may
damage the STP control unit
or the vacuum equipment.
STP-A803/A1303 Series Instruction Manual
スタート1)の場合
In case of Start 1)
スタート2)の場合
In case of Start 2)
リモート入力信号 / Remote Input Signal
STOP
リセット信号
RESET signal
RESET
回転禁止信号
Rotation INHIBIT signal
INHIBIT
未使用ピン
Unused Pins
Figure 8.1 REMOTE X7 Input Signal Pins
◇
◇
1 pin (0V) is insulated from the frame ground.
The input current of remote input signal is approx. 5mA. Make
sure the minimum applicable load of the relay contact when the
remote operation with the relay.
8-3
Operation
START
STP-A803/A1303 Series Instruction Manual
8.2
Output Signal Pins
Use output signal pins according to Table 8.2 and Figure 8.2.
Remote output signals function during MANUAL and REMOTE operations.
Four abbreviations are used in Table 8.2:
N.O: Normal Open
COM: Common
N.C: Normal Close
OUT: Output Pin
Table 8.2
REMOTE X7 Output Signal Pins(1/2)
Pin
Description
REMOTE (27)
N.O OUT
(8)
Operation
POWER
N.O OUT
(9)
(28)
Pins for outputting the STP pump REMOTE
SELECTION state signal.
When the MANUAL/REMOTE changeover switch on
the front panel is set to ON (remote side), these pins
are closed ("REMOTE" operation).
Pins for outputting the POWER ON state signal.
These pins are closed when the magnetic bearing
functions and the rotor levitates.
This output is cut OFF at a power failure.
(10) ACCELERATION(29) Pins for outputting the ACCELERATION state signal.
N.O OUT
These pins are closed when the STP pump is in
acceleration.
Pins for outputting the NORMAL OPERATION state
signal.
When the STP pump is in rated operation, the pins
COM
(30) between (11)-(30) are closed, and the pins between
(12)-(30) are opened.
(11) NORMAL OUT
N.O
(12)
N.C
(13)
BRAKE
N.O OUT
(32) Pins for outputting the BRAKE state signal.
These pins are closed when the STP pump is in brake.
Pins for outputting the ALARM signal.
When an abnormality/error is detected under the
POWER ON state, the pins between (14)-(33) are
COM
(33) closed, and the pins between (15)-(33) are opened.
(14) ALARM OUT
N.O
(15)
N.C
8-4
STP-A803/A1303 Series Instruction Manual
Table 8.2
REMOTE X7 Output Signal Pins(2/2)
Pin
Description
(16) AT TEMP. OUT
N.O
COM
(17)
N.C
(7)
L.VALVE
N.O OUT
(26) Pins for the emergency vent. valve operation signal.
These pins are closed while this valve functions.
◇ The emergency vent. valve is not
used in this specification. DO
NOT use these pins.
8-5
Operation
(35)
Pins for the TMS unit rated state signal output.
When the actual temperature of the TMS unit is
within the setting temperature range ±10°C, the pins
between (17)-(16) are closed and the pins between
(17)-(35) are opened.
If the TMS unit function is not valid, the pins do not
function.
STP-A803/A1303 Series Instruction Manual
N.O :Normal Open
N.C :Normal Close
Remote Output Signals
COM :Common
8
R EM OT E
27
N .O O UT
9
P OW ER
28
N .O O UT
10
A CC EL ER TI ON
29
N .O O UT
REMOTE selection state
signal output pins
CR2
POWER ON state
signal output pins
CR3
CR4
Operation
11
N.O OUT
CR5
30
ACCELERATION state
signal output pins
N OR MA L CO M
NORMAL OPERATION
state signal output pins
CR5
N .C O UT
12
13
B RA KE
32
N O. O UT
BRAKE state
signal output pins
CR6
14
N.O OUT
CR7
33
A LA RM C OM
CR7
15
N.C OUT
16
N.O OUT
CR8
17
A T TE MP .C OM
CR8
ALARM state
signal output pins
TMS unit rated state
signal output pins
N .C O UT
35
7
L .V AL VE
26
N O. O UT
CR1
Emergency vent.valve
open signal output pins
Figure 8.2 REMOTE X7 Output Signal Pins
8-6
STP-A803/A1303 Series Instruction Manual
Table 8.3 shows the rated contacts for relays CR1 to 8 in Figure 8.2.
Table 8.3 Rated Contacts for Relays CR1 to CR8
Resistance Load
(COSφ=1)
125V AC 0.5A
24V DC 1A
2A
Rated Load
Rated Current
Maximum Contact
Point Current
Maximum
Open/Close Capacity
Minimum Applicable
Load
1A
AC: 62.5 VA
DC: 30W
Operation
5V DC 1mA
8-7
STP-A803/A1303 Series Instruction Manual
9
Adjustment Methods
9.1
Tuning
For the STP pump, tuning is required to align the position of levitation in the
axial direction with the center of the rotor's movable range.
Tuning can be performed simply by pressing the "RESET" switch on the front panel.
◇
◇
9.1.1
When changing the length of the STP connection cable (not when
changing the length of the power cable).
When changing the combination of the STP pump and the STP
control unit (The error message "CAUTION: Bad EEPROM content" is
displayed upon performing the self test).
Tuning Method
1) Connect each cable.
2) Switch "ON" the breaker on the rear panel.
3) After the STP pump completes the self test and enters the levitation state or
the error message "CAUTION: Bad EEPROM content" is displayed, set
MANUAL/REMOTE changeover switch to the manual and press the
"RESET" switch on the front panel for approx. 5 seconds. Tuning starts
with "Tuning!" displayed on the LCD.
When the tunable error message such as "CAUTION: Bad EEPROM content"
is displayed, it takes approx. 20 seconds until the display changes "Tuning".
4) Approx. one minute later the LCD displays "Tuning Complete", next it
displays "Levitation". This completes the tuning. (When changing the
MANUAL/REMOTE changeover switch, set to its setting before tuning.)
◇
DO NOT turn off the primary power (DO NOT switch the breaker
"OFF") during tuning. When doing so, perform tuning again.
"CAUTION:PCB&Pump EEPROM Failure" may be displayed after
powering ON again. When tuning is performed with this message,
the setting is initialized. Reconfigure the setting if it has been
changed by customer.
9-1
Operation
Tuning is completed before delivery, so it is not required before use. However,
re-tuning is required in the following cases in which the position of levitation
may deviate from the center of the rotor's movable range:
STP-A803/A1303 Series Instruction Manual
◇
◇
◇
◇
Operation
9.1.2
Tuning can be performed only while the STP pump is in the
LEVITATION state (It cannot be performed while the STP pump is in
the ACCELERATION, NORMAL OPERATION, or BRAKE state).
When performing the tuning during remote operation, use the
"RESET" switch on the front panel after switching the "REMOTE"
switch to the manual. (The remote signal cannot be used for tuning.)
Once tuning is completed, re-tuning is not required unless the
configuration (the STP pump serial number, the STP control unit
serial number, and the STP connection cable length) is changed.
Although the STP pump sounds during tuning, this is not an
indication of abnormality.
Each of data after tuning
The specific information and the user setting are recorded in the STP pump and
STP control unit.
When tuning after changing the configuration (the STP pump serial number, the
STP control unit serial number), the STP pump data overrides the STP control
unit data except control unit serial No. and total hours of running (control unit).
Table 9.1 shows the data recorded in the STP control unit.
The user setting may be changed when replacing the STP pump. Confirm the
setting after tuning, and reconfigure the setting when the user setting has
changed.
Table 9.1 Data List
Data
Data priority
Pump serial No.
Reconfiguration
Pump
Control unit serial No.
Control unit
Total hours of running (Pump)
Pump
Total hours of running (Control unit)
Control unit
Number of starts
Pump
Error record
Pump
Remote operation mode/Detailed
Pump
Rated speed
Pump
Valid/invalid TMS function
Pump
Valid/invalid of inhibit function
Pump
Valid/invalid of Emergency vent.
Pump
9-2
Unnecessary
(specific
information)
Necessary
(user setting)
STP-A803/A1303 Series Instruction Manual
<Contents>
<Pump Operation>
<LCD Display Example>
Breaker "ON"
Software Version
v1.0 1997 *****
Self Test
Autotest Complete
Levitation State
When the serial numbers
do not match:
CAUTION
Bad EEPROM content
Operation
Autotest
Levitation
or
Software Version
VER *.*
Press the
"RESET" switch
for about 5 sec.
etc., a status is displayed.
Tuning
Tuning
Tuning
Tuning Complete
Tuning Complete
Tuning Complete
Levitation
Figure 9.1 Tuning Procedures
9-3
STP-A803/A1303 Series Instruction Manual
9.2
Confirmation Mode
Confirmation Mode is used to check the status of the STP pump and STP control
unit. The following items can be checked in Confirmation Mode:
(1) Version information
(2) Individual information (serial number, total hours of running, and
number of starts)
(3) Current settings (rated speed, TMS temperature setting, and acutual
pump temperature)
(4) Current function settings (remote mode, TMS function, inhibit command,
and emergency vent. valve)
(5) Error record (lists up to 10 of the most recent errors)
Operation
◇
The emergency vent. valve is not used with this series of STP pump.
<Confirmation Method> (See Figure 9.2)
1) Press the "SELECT" switch to enter Confirmation Mode.
The available menu groups (items (1) through (5) above) are displayed in
order.
2) Press the "UP" switch to display the next item. Press the "DOWN" switch to
display the previous item.
3) Press the "SELECT" switch to display the next menu group.
4) Press the "UP" and "DOWN" switch to confirm the status of the items of the
currently selected menu group.
5) Press the "SELECT" switch to return to Operation Mode when viewing the
Error Record. Or, if no switch is pressed for approx. 1 minute, the display
will automatically revert to Operation Mode.
9-4
Error Record
Current Function
Settings
Current Settings
Individual Information
Version Information
Operation Mode
Rated speed
Remote mode
"SELECT"
Error Record n°1/n
failure message
"SELECT"
Remote mode
I/O remote
"SELECT"
Speed Set Point
xxxx rpm
"SELECT"
Driver ROM Version
PM x.x.x
"UP/DOWN"
Previous item
"DOWN":
TMS Function
Figure 9.2
Inhibit function
Error Record n°n/n
failure message
Inhibit function
DISABLE
9-5
Confirmation Mode Operation Method
Error Record n°2/n
failure message
"UP/DOWN"
(When equipped with a TMS only)
TMS Function
DISABLE
"UP/DOWN"
(When equipped with a TMS only)
MOTOR TEMP
xxx ℃
Actual pump temperature
Ctrl Hour Counter
xxxxx H
or
Emergency vent. valve
ENABEL
or
DISABLE
Total hours of running (pump):
Total hours of acceleration, normal
operation and deceleration.
Total hours of running (control unit):
Total hours of power on state (include
levitation).
Number of starts:
Number of times the start operation is
performed
Emergency vent. valve
DISABLE
•
•
•
Digital AMB Version
AM x.x.x
Error Record:
The control unit can store infomation about up to
10 of the most recent errors.
"1/n" denotes the most recent error.
Total hours of running (control unit)
Pump Hour Counter
xxxx H
Total hours of running (pump)
Analog Control Loop
"SELECT": Next group
Next item
"UP":
TMS temperature setting
TMS Set Point
xxx ℃
"UP/DOWN"
Start Counter
xxxxx
Number of starts
Pump Serial Number
xxxxx
Control unit serial no."UP/DOWN" Pump serial no.
Ctrl Serial Number
xxxxx
"SELECT"
Software Version
VER x.x
"SELECT"
NORM : ******rpm
STP-A803/A1303 Series Instruction Manual
STP-A803/A1303 Series Instruction Manual
9.3
Parameter Set Mode
Parameter Set Mode is used to set the different parameters of the STP pump and
STP control unit. The following items can be set in Parameter Set Mode:
(1)
(2)
(3)
(4)
(5)
(6)
Operation
◇
Remote mode
Rated speed
TMS function enable/disable
Inhibit function enable/disable
Emergency vent. valve function enable/disable
Remote mode configuration
The emergency vent. valve is not used with this series of STP pump.
<Parameter Set Mode> (See Figure 9.3)
1) Push the "SELECT" and "UP" switches at the same time to enter Parameter
Set Mode.
The available menu items (items (1) through (6) above) are displayed in order.
2) Press the "UP" switch to display the next parameter and the "DOWN" switch
to display the previous one.
3) Press the "ENTER" switch to set the parameter to the new setting.
4) Press the "SELECT" switch to display the next item.
5) Change the parameter by pressing the "UP" and "DOWN" switches, then set
it by pressing the "ENTER" switch.
6) When the save screen is displayed, select "YES" then press the "ENTER"
switch to store the new parameters. "IN PROGRESS" is displayed on the
LCD followed by "STORAGE OK", when the new parameters have been
stored successfully, or "STORAGE NOT OK", when the new parameters have
been stored unsuccessfully.
7) Press the "SELECT" switch to return to Operation Mode.
Or, do not press any switch for approx. 1 minute and the display will
automatically revert to Operation Mode.
8) Select "NO" and press the "SELECT" switch to return to Operation Mode
without saving the new parameters.
9-6
STP-A803/A1303 Series Instruction Manual
Do not set the "RS232/485 Com", "RS232/485 Modbus", and
"LONWORKS" settings of Remote Mode because they cannot be set
in the current configuration.
NORM : ******rpm
Operation Mode
"UP" & "SELECT"
Select Remote Mode
"UP" Switch
"DOWN" Switch
"SELECT" Switch
"ENTER" Switch
:Change to the next value
:Change to the previous value
:Next menu
:Set to new parameter
"UP/DOWN"
Remote Mode
I/O Remote
Remote Mode
RS232/485 Modbus
Remote Mode
RS232/485 Com
"RS232/485 Com", "RS232/485 Modbus", and
"LONWORKS" cannot be set in the current
configuration.
Press "SELECT" to go to next menu
or "ENTER" to set to new parameter
Remote Mode
LONWORKS
"UP/DOWN"
Rated Speed Setting
Speed Set Point
xxxx rpm
"UP/DOWN"
TMS Function
DISABLE
Press "SELECT" to go to next menu
or "ENTER" to set to new parameter
INHIBIT Function Setting
TMS Function
ENABLE
"UP/DOWN"
Inhibit Command
DISABLE
Press "SELECT" to go to next menu
or "ENTER" to set to new parameter
Emergency vent. valve
Setting
"UP"
:+500rpm
"DOWN" :-500rpm
Allowable range:
1/2 rated speed to rated speed
Press "SELECT" to go to next menu
or "ENTER" to set to new parameter
TMS Function Setting
Speed Set Point
xxxx rpm
Inhibit Command
ENABLE
ENABLE
or
DISABLE
"UP/DOWN"
LEAK VALVE Option
DISABLE
LEAK VALVE Option
ENABLE
Press "SELECT" to go to next menu
or "ENTER" to set to new parameter
Remote Mode Detail
Settings
See next page for details
Press "SELECT" to go to next menu
or "ENTER" to set to new parameter
Save Screen
Not displayed when "I/O
Remote"
"UP/DOWN"
STORAGE
NO
STORAGE
YES
Press "ENTER" to store
the new parameters.
IN PROGRESS
Saving
Successful
STORAGE
OK
Setting Complete
Operation Mode
"SELECT"
"SELECT"
NORM : ******rpm
NORM : ******rpm
Figure 9.3
Parameter Setting Method
9-7
Unsuccessful
STORAGE
NOT OK
Operation
◇
STP-A803/A1303 Series Instruction Manual
Remote Mode Detail
Settings
Baud Rate
The settings listed here are for "RS232/485 Com", "RS232/485
Modbus", and "LONW ORKS" only. They are not displayed in "I/O
Remote Mode."
Baud Rate
9600
Baud Rate
xxxx
Bit Length
8
Bit Length
x
Press "SELECT" to go to next
menu or "ENTER" to set to new
parameter
Bit Length
Press "SELECT" to go to next
menu or "ENTER" to set to new
parameter
Stop bit
"UP/DOW N"
Stop bit
1
Stop bit
x
Parity
None
Parity
Even
Drive Type
RS232
Drive Type
RS485
Press "SELECT" to go to next
menu or "ENTER" to set to new
parameter
Operation
Parity
Press "SELECT" to go to next
menu or "ENTER" to set to new
parameter
Drive Type
Press "SELECT" to go to next
menu or "ENTER" to set to new
parameter
To STORAGE Menu
Figure 9.4
Remote Mode Setting Method
9-8
Parity
Odd
STP-A803/A1303 Series Instruction Manual
10
Safety Functions
10.1
Power Failure
<Ⅰ.
Operation at a Power Failure>
When the power voltage drops below 80 V due to a power failure or other, the
normal operation of the magnetic bearing is maintained using the regenerative
energy of the rotating rotor (backup operation during a power failure).
1) When the rotational speed is 8,000 rpm or more at a power failure:
i. The STP control unit detects any power failure of 2 seconds or more and
the STP pump decelerates.
At this time, the "POWER" lamp goes out and the "FAILURE" lamp
lights. The LCD displays "Mains Failure". Also, an alarm signal is
output from REMOTE X7 pins (14)-(33) and (15)-(33).
When the rotational speed goes down to approx. 8,000 rpm, the rotor
lands on the touch down bearing and stops. The "FAILURE" lamp
goes out and the LCD is turned off. Also, the alarm signal output is
reset.
ii. The STP control unit does not detect a power failure of less than approx. 2
seconds, continuing rotating the STP pump.
The STP control unit does not detect the power failure.
the touch down bearing and stops.
<Ⅱ.
The rotor lands on
Operation after a Power Recovery>
1) MANUAL operation
The magnetic bearing operation and LED lamp and LCD messages are
recovered after a power recovery. The "FAILURE" lamp goes out.
•
The STP pump continues decelerating even after a power recovery.
the "START" switch to reaccelerate the STP pump.
Press
2) REMOTE operation
The magnetic bearing operation and LED lamp and LCD messages are
recovered after a power recovery. The "FAILURE" lamp goes out.
•
•
When the START signal is input to the REMOTE input pin after a power
recovery, the STP pump reaccelerates.
When the START signal is not input to the REMOTE input pin after the
power recovery, the STP pump continues the BRAKE operation.
10-1
Troubleshooting
2) When the rotational speed is less than approx. 8,000 rpm at a power failure:
STP-A803/A1303 Series Instruction Manual
◇
Establish a sequence so that the power can be supplied to the STP
control unit immediately after a power recovery.
Table 10.1 shows the states of LCD, LED lamps, and REMOTE output signals at
a power failure.
Also, Table 10.2 shows the operations of the STP pump after a power recovery.
Table 10.1
States of Lamps and REMOTE Output Signals at a Power Failure
Rotational speed
(rpm)
REMOTE output
signals
(REMOTE X7)
LED lamps
LCD Message
POWER
lamp
FAILURE
lamp
Power ON
signal
ALARM
signal
8,000 or more
Mains Failure
OFF
ON
OFF
ON
Less than 8,000
OFF
OFF
OFF
OFF
OFF
Troubleshooting
Table 10.2
Rotational
speed
(rpm)
8,000 or more
Less than
8,000
Operations of the STP Pump after a Power Recovery
Duration of
power failure
MANUAL operation
REMOTE operation
STP pump operation
after a power
recovery
"START"
REMOTE signal STP pump operation
after a power recovery
input after a
power recovery
Approx. 2 sec.
or more
Deceleration/Stop
Less than
approx. 2 sec.
Continues as before.
Deceleration/Stop
10-2
Yes
Reacceleration
No
Deceleration/Stop
Yes
Reacceleration
No
Deceleration/Stop
STP-A803/A1303 Series Instruction Manual
10.2
Abnormal State of Magnetic Bearing
When the magnetic bearing does not function normally due to a breakage of the
STP connection cable, disconnection of connectors or any abnormality/error of the
STP control circuit, the rotor falls on the touch down bearing and stops.
The "FAILURE" lamp lights and the LCD displays error message
"Disturbance*_*".
◇
10.3
When an abnormality/error occurs in the magnetic bearing, check the
STP pump as well as the STP control unit. If "FAILURE" cannot be
released after reset operation, contact Service office.
Excessive Vibration
10.4
Motor Driver Overload
When the STP pump does not attain the rated speed within approx. 30 minutes
after starting or when the ACCELERATION state remains unchanged during
operation for approx. 30 minutes, the STP pump decelerates and stops.
The "FAILURE" lamp lights and the LCD displays error message "DRIVER
Overload".
10.5
Overheating Inside the STP Pump
When the temperature of the motor inside the STP pump overheats due to an
abnormal baking temperature or overload operation, the STP pump decelerates
and stops.
The "FAILURE" lamp lights and the LCD displays error message "MOTOR
Overheat".
10-3
Troubleshooting
When serious vibration or mechanical shock causes the rotor to touch the touch
down bearing (due to external vibration/impact, intrusion of atmosphere or
foreign materials into the STP pump or rotor imbalance), the STP pump
decelerates and stops.
The "FAILURE" lamp lights and the LCD displays error message
"Disturbance*_*".
STP-A803/A1303 Series Instruction Manual
10.6
Overheating Inside the STP Control Unit
When the temperature inside the STP control unit overheats due to a failure in
the air cooling fan, external heat source, and other, the WARNING message
"CAUTION: CNTheat*" is displayed. In this case, the STP pump does not stop.
If the STP control unit overheats further, the STP pump decelerates and stops.
The "FAILURE" lamp lights and the LCD displays error message
"CNT Overheat".
10.7
Overspeed
When the rotational speed of the STP pump exceeds the specified rotational
value due to a failure in the motor driver, the breaker in the STP control unit
switches "OFF." The STP pump has no power supplied and stops.
The "FAILURE" lamp lights and the LCD displays error message
"OVERSPEED*".
10.8
Abnormality/Error in the TMS Unit (for Use with the TMS Unit)
1) Abnormality/Error in the TMS Unit
Troubleshooting
i.
◇
If the temperature of the STP pump base unit is +10°C higher or -10°C
lower than the setting value due to the occurrence of an
abnormality/error in the TMS heater or other causes, the STP pump
decelerates and stops.
Output of the heater and the cooling water unit is OFF.
The "FAILURE" lamp lights and the LCD displays error message "TMS
Higher Temp." (over +10°C) or "TMS Lower Temp." (below -10°C).
An abnormality/error is not detected even at -10°C or less lower than
the setting value within approx. one hour after the STP pump starts.
ii. If an abnormality/error shown in "i" above is not detected and the TMS
heater overheats, the STP pump decelerates and stops.
Output of the heater and the cooling water unit is OFF.
The "FAILURE" lamp lights and the LCD displays error message "TMS
Overheat".
10-4
STP-A803/A1303 Series Instruction Manual
2) Disconnecting of the TMS Connection Cable and Connectors
Troubleshooting
When an abnormality/error occurs in the TMS connection cable, the STP
pump decelerates and stops.
Output of the heater and the cooling water unit is OFF.
The "FAILURE" lamp lights and the LCD displays error message "T.Cable
Disconnect".
10-5
"ALARM"
Overload of
motor driver
10-6
The STP pump decelerates
and stops.
The STP pump decelerates
and stops.
Leakage from the vacuum
equipment or piping.
Insufficient pressure at
inlet and outlet port sides.
Failure of starting of the
backing pump.
External vibration and
impact.
Intrusion of atmospheric
air.
Intrusion of foreign
materials.
STP connection cable
breakage.
STP connection cable
disconnection.
Abnormal control circuit.
"FAILURE" "Driver Overload"
The STP pump
does not attain
the rated speed 30
minutes or more
after it starts.
Rotor vibrates
excessively to
come into contact
with the touch
down bearing.
Excessive
vibration
The STP pump stops.
"ALARM"
Rotor descends
onto the touch
down bearing.
Abnormal
magnetic
bearing
"POWER"
goes out.
"ALARM"
"FAILURE" "Disturbance *_*"
Power failure
time: 2 seconds or
more
"ALARM"
State of the STP pump
Probable causes of an
abnormality/error
"FAILURE" "Disturbance *_*"
LCD
REMOTE
output signal
Safety Functions (1/2)
Power failure.
The magnetic bearing
Power cable breakage.
continues to operate using
Power cable disconnection.
regenerative energy.
"POWER ON" The STP pump decelerates
output
and stops.
cut-off
The rotor lands on the touch
down bearing.
Lamp
indication
Table 10.3
"FAILURE" "Main Failure"
lights.
Operation
state of
safety functions
Power failure
Abnormality
/Error
STP-A803/A1303 Series Instruction Manual
Possible
Possible
Possible
Impossible
Reset by
RESET
switch
Temperature of
the STP pump
motor rises.
Temperature
inside the STP
control unit rises.
Rotational speed
of the STP pump
over the specified
speed.
Overheating
inside the
STP control
unit
Overspeed
Operation
state of
safety functions
Overheating
inside the
STP pump
Abnormality
/Error
LCD
"FAILURE" "OVERSPEED*"
"FAILURE" "CNT Overheat*"
"CAUTION: CNT
heat*"
"FAILURE" "MOTOR Overheat"
Lamp
indication
10-7
Probable causes of an
abnormality/error
Failure in the motor driver.
Failure in the cooling fan.
Shielding of cooling air
inlet and ventilation port.
The STP pump decelerates Extraordinarily-high
and stops.
temperature.
The STP pump does not
stop.
The STP pump decelerates Abnormal baking
and stops.
temperature.
Insufficient cooling.
Leakage of vacuum
equipment or piping.
Continuous repetition of
startup/stop.
Extraordinarily-high
temperature.
Breaker OFF.
Power failure state is
entered and the STP
"POWER ON" pump stops.
output
cut-off
"ALARM"
"ALARM"
"ALARM"
State of the STP pump
Safety Functions (2/2)
REMOTE
output signal
Table 10.3
Impossible
Possible
Possible
Reset by
RESET
switch
STP-A803/A1303 Series Instruction Manual
TMS heater
overheats
-10°C or less
+10°C or more
Setting
temperature
Abnormal
temperature
Operation
state of
safety functions
Failure of TMS TMS connection
cable or its
connection
connector is
cable
disconnected.
Failure of
TMS unit
Abnormality
/Error
LCD
REMOTE
output signal
"ALARM"
10-8
"FAILURE" "T.Cable Disconnect" "ALARM"
"FAILURE" "TMS Overheat"
"TMS Lower Temp."
or
"FAILURE" "TMS Higher Temp." "ALARM"
Lamp
indication
TMS connection cable
breakage.
TMS connection cable
disconnection.
Output of heater and
cooling water valve is OFF.
Error/abnormality
detection above does not
function.
Abnormal cooling water.
Heater disconnect.
Probable causes of an
abnormality/error
The STP pump decelerates
and stops.
The STP pump decelerates
and stops.
Output of heater and
cooling water valve is OFF.
The STP pump decelerates
and stops.
Output of heater and
cooling water valve is OFF.
State of the STP pump
Table 10.4 Safety Functions (When the TMS Unit is Used)
STP-A803/A1303 Series Instruction Manual
Impossible
Impossible
Possible
Reset by
RESET
switch
STP-A803/A1303 Series Instruction Manual
11
Troubleshooting, Maintenance, and Inspection
The STP pump is provided with safety functions for various abnormality/errors.
When an abnormality/errors occurs in the pump or control unit, the safety
function operates with the "FAILURE" lamp lit, and an alarm signal is output
from the remote output pins. An error message showing the number of the error
in the form "Error n°**/**" and the contents of the error are displayed
alternately on the lower line of the LCD.
If an abnormality/error is found when using the STP pump, check it and take
measures in accordance with the following procedures.
If you cannot trace it or if the STP pump does not function normally after the
troubleshooting, fill in the necessary information in the "Malfunction
information" and fax it to Service office.
11.1
Troubleshooting Immediately after an Abnormality/Error Occurs
11.1.1
Troubleshooting Power Failure
Establish a sequence so that the power can be supplied to the STP control unit
immediately after a power recovery.
Troubleshooting Other Abnormality/Error
Refer to Section 7.4.6 and 7.5.5, "Starting the STP Pump after a Safety Function
Operates."
i.
After confirming the "BRAKE" lamp goes out and the STP pump stops,
remove the probable cause of the abnormality.
When the LCD displays an error message, take the necessary action
according to Section 11.2, "When Error Message is Displayed on LCD."
ii. Perform the RESET operation according to turn off the "FAILURE" lamp.
iii. Perform the START operation. Check if the STP pump operates
correctly.
◇
◇
When disconnecting cables from the STP pump and/or the STP
control unit to perform troubleshooting and take the necessary
action, confirm that the STP pump stops, turn OFF the primary power
(Switch the breaker "OFF"), then disconnect the cables.
If the RESET operation does not turn off the "FAILURE" lamp,
confirm that the STP pump stops, turn OFF the primary power
(Switch the breaker "OFF"), then turn ON the primary power again
(Switch the breaker "ON").
11-1
Troubleshooting
11.1.2
STP-A803/A1303 Series Instruction Manual
11.2
When Error Message is Displayed on LCD
11.2.1
Error Messages
When error is detected, "Error n˚ **/**" and the error message are displayed on
the lower line of the LCD alternately. The first number of "**/**" is the order of
detected errors that have occured. Thus, a "1/3" would denote the fastest error
of 3 errors. Press the "UP" or "DOWN" switch to scroll display the contents of
the next or previous error message. (The "UP" or "DOWN" switch can also be
input in Remote Mode.)
Example)
Displayed alternately
BRAKE : ***00rpm
Disturbance Y_H 1/3
BRAKE : ***00rpm
Error n° 1/3
Press
"DOWN" Switch
Press "UP" Switch
Displayed alternately
BRAKE : ***00rpm
Error n° 2/3
BRAKE : ***00rpm
Mains Failure
1/3
Troubleshooting
Press "UP" Switch
◇
◇
The upper message on the LCD shows the current STP pump
operation state.
When the message on the LCD is in Conformation mode or
Parameter Set mode, press the "SELECT" switch several times to
change it to the status display mode.
11-2
STP-A803/A1303 Series Instruction Manual
LCD Messages
Error Messages (1/5)
Probable Causes
Countermeasures
CAUTION
Bad PCB EEPROM
1) Turning on the power after
1) Perform tuning.
"Tuning Error" is detected.
2) Abnormal data in STP
2) Perform tuning.
control unit.
3) Failure of the STP control
3) Contact Service office.
unit.
CAUTION
Use of different series of the STP Use the same series of the
Bad Pump Identifier pump and the STP control unit. STP pump and the STP
control unit.
CAUTION
Use of different serial No. of the Perform tuning.
Bad EEPROM
STP pump and the STP control
content
unit.
CAUTION
1) Abnormal data in STP
1) Perform tuning.
Bad Pump
pump unit.
EEPROM
2) Failure of the STP pump.
2) Contact Service office.
CAUTION
Different Pump ID
CAUTION :PCB&
Pump EEPROM
Failure
CAUTION : CNT
heat 1
CAUTION : CNT
heat 2
CAUTION
PCB & Pump
Failure
CNT Overheat 1
CNT Overheat 2
Failure of the STP pump.
Contact Service office.
1) Power is turned off during
turning
2) Use of different version of
the software.
3) Failure of the STP pump or
the STP control unit..
Overheat inside the STP control
unit (the STP pump does not
stop):
1) High ambient temperatures
1) Perform turning again.
Reconfigure the
initialized settings.
2) Perform tuning.
3) Contact Service office.
1) Set the ambient
temperature to 40 °C or
less.
2) Insufficient cooling of the
2) Remove obstacle from
STP control unit
the ventilation port.
3) Failure of the air cooling
3) Repair is needed.
fan in the control unit
Contact Service office.
Failures of the STP pump and the Contact Service office.
STP control unit.
Overheat inside the STP control
unit:
1) High ambient temperature
2) Insufficient cooling of the
STP control unit
3) Failure of the air cooling
fan in the control unit
11-3
1) Set the ambient
temperature to 40 °C or
less.
2) Remove obstacle from
the ventilation port.
3) Repair is needed.
Contact Service office.
Referred
Section
9.1
9.1
Malfunction
information
-
9.1
9.1
Malfunction
information
Malfunction
information
9.1
9.3
9.1
Malfunction
information
6.2.1
6.2.2
Malfunction
information
Malfunction
information
6.2.1
6.2.1
Malfunction
information
Troubleshooting
Table 11.1
STP-A803/A1303 Series Instruction Manual
Table 11.1
LCD Messages
DRIVER Overload
Error Messages (2/5)
Probable Causes
Countermeasures
The motor driver overload.
(when the rated operation does not
start approx. 30 min. after start
operation is executed:
ACCELERATION state continues
for approx. 30 minutes:
1) High pressure at the inlet
port
1) Use the maximum
working pressure or
less.
2) Use the allowable
2) High pressure at the outlet
backing pressure or
port
less.
3) Check the vacuum
3) Leakage of the piping system
piping system for
leakage.
4) Failure of the backing pump
4) Check the backing
pump for its capacity
and START state
(use a pump with the
recommended capacity
or more)
Failure of the STP control unit.
Contact Service office.
Troubleshooting
DRIVER
Overvoltage
DRIVER Sensor
Failure of the STP control unit.
Lost
DRIVER com.
Failure of the STP control unit.
Failure
DSP->PCB com fail Failure of the STP control unit.
Disturbance X_B
Disturbance X_H
Disturbance Y_B
Disturbance Y_H
Disturbance Z
Abnormal magnetic bearing:
1) Change of the cable length
2) Disconnection of the STP
connection cable or control
circuit error
Excessive vibration applied
externally to the STP pump:
1) External vibration/impact.
2) Atmospheric air flows the
STP pump
3) Foreign materials fall into
the STP pump
Contact Service office.
Contact Service office.
Contact Service office.
1) When changing the
cable length, perform
tuning.
2) Contact Service office.
1) Remove external
vibration so as not to
transmit it to the STP
pump.
2) Check the vacuum
piping.
3) Install the STP pump
in a way that no
foreign materials fall
into the STP pump.
Contact Service office.
EPROM Error
Failure of the STP control unit.
Error Message n°
**/**
If an error occurs
Refer to the respective error
(**/** shows the number of errors message.
occurred).
11-4
Referred
Section
4.3.4
13.1
4.3.4
13.1
4.3.4
13.1
4.3.4
13.1
Malfunction
information
Malfunction
information
Malfunction
information
Malfunction
information
9.1
Malfunction
information
4.3.4
4.3.4
4.2.1
Malfunction
information
11.2
STP-A803/A1303 Series Instruction Manual
LCD Messages
Error Messages (3/5)
Probable Causes
Countermeasures
First Damage Limit First damage phenomenon
appeared on the touch down
bearing (the STP pump does not
stop).
E.Valve Disconnect Disconnection of the emergency
vent valve cable (not used in this
specification model).
Failure of the emergency vent
valve cable (not used in this
specification model).
Incorrect setting of the emergency
vent valve (not used in this
specification model).
MOTOR Overheat
Overheating inside the STP pump:
1) Overheating during baking
2) Insufficient cooling
3) Leakage of the vacuum
piping system
4) Repetitious start/stop
operations
M_TEMP SENSOR Failure of the STP pump.
LOST
Mains Failure
Insufficient power supply:
1) Power failure
2) Incorrect connection of the
power cable.
3) Failure of the power cable
4) Failure of the power voltage
No Levitation
The rotor does not levitate.
OVERSPEED 1
OVERSPEED 2
OVERSPEED 3
P.Cable
Disconnected
Overspeed of the STP pump.
Incorrect connection of the STP
connection cable.
Failure of the STP connection
cable.
PCB->DSP com fail Failure of the STP control unit.
11-5
Overhaul is needed. Contact
Service office.
Referred
Section
Malfunction
information
Connect the cable correctly.
If the cable connector is not
locked, lock it securely.
Contact Service office.
When the emergency vent
valve function is set to
"ENABLE," set it to
"DISABLE."
9.3
1) Set the temperature of
the baking heater to
120°C or less.
2) At the time of baking
or gas pumping,
always cool the STP
pump.
3) Check the piping
system for leakage.
4) Repetitious start/stop
operations may cause
the STP pump to
overheat.
Contact Service office.
5.3
1) Check whether or not a
power failure has
occurred.
2) Connect the power
cable correctly.
3) Replace the power
cable.
4) Set the voltage to the
rated voltage±10%.
Refer to the respective error
message.
Contact Service office.
Connect the cable correctly.
If the cable connector is not
locked, lock it securely.
Contact Service office.
Contact Service office.
5.2
4.3.4
7.3
Malfunction
information
10.1
6.4.2
Malfunction
information
6.4.2
13.2
11.2
Malfunction
information
6.4.2
Malfunction
information
Malfunction
information
Troubleshooting
Table 11.1
STP-A803/A1303 Series Instruction Manual
Table 11.1
LCD Messages
Power Supply
Failure
RAM Error
START NOT
ALLOWED
Second Damage
Limit
Speed Pulse Lost
Error Messages (4/5)
Failure of the STP control unit.
Contact Service office.
Failure of the STP control unit.
Contact Service office.
When the extent of the damage on
the touch down bearing exceeds
the second damage limit and the
start is not allowed.
When the extent of the damage on
the touch down bearing exceeds
the second damage limit and the
start is not allowed.
Failure of the STP pump.
Overhaul is needed.
Contact Service office.
Referred
Section
Malfunction
information
Malfunction
information
Malfunction
information
Overhaul is needed.
Contact Service office.
Malfunction
information
Contact Service office.
Failure of the STP control unit.
Contact Service office.
Malfunction
information
Malfunction
information
6.4.2
Probable Causes
Countermeasures
T.Cable Disconnect Disconnection of the TMS
connection cable.
Failure of the TMS connection
cable.
Disconnection of the TMS sensor.
Incorrect setting of the TMS
function.
Troubleshooting
TMS Breaker Trip
The TMS unit earth leakage
breaker (optional) is "OFF"
1) Incorrect setting of the TMS
unit earth leakage breaker.
2) Failure of the TMS heater or
the valve
11-6
Connect the cable correctly.
If the cable is not locked, lock
it securely.
Contact Service office.
Malfunction
information
Contact Service office.
Malfunction
information
When the TMS function is in
9.3
no use, set the TMS function
to "DISABLE."
1) Always remain the
TMS unit earth
leakage breaker "ON."
2) Contact Service office.
Instruction
Manual of
TMS Unit
Malfunction
information
STP-A803/A1303 Series Instruction Manual
LCD Messages
Error Messages (5/5)
Probable Causes
Countermeasures
TMS Higher Temp. TMS temperature control error
(when the TMS unit detection
temperature becomes +10°C or
more):
1) Insufficient cooling of the
TMS unit
2) Failure of the TMS unit
TMS Lower Temp.
TMS overheat
Tuning Error 1
Tuning Error 2
Tuning Error 3
Tuning Error 4
Tuning Error 5
w
(appears on the
upper right LCD
display)
TMS temperature control error
(when the detection temperature of
the TMS unit becomes -10°C or
less: such error cannot be detected
within 1 hour after startup):
1) Failure of the TMS heater
1) Connect the cooling
water electromagnetic
valve correctly.
Check the amount and
the temperature of
cooling water.
2) Contact Service office.
1) Contact Service office.
2) Failure of the TMS unit
2) Contact Service office.
Overheat of the TMS heater:
1) Failure of the TMS heater
1) Contact Service office.
2) Failure of the TMS unit
2) Contact Service office.
Tuning errors
"No LEVITATION" is
displayed.
Perform tuning again after
turning on the power.
When any warning message
appears on the LCD display.
Refer to the respective
warning message.
11-7
Referred
Section
Instruction
Manual of
TMS Unit
Malfunction
information
Malfunction
information
Malfunction
information
Malfunction
information
Malfunction
information
9.1
11.4
Troubleshooting
Table 11.1
STP-A803/A1303 Series Instruction Manual
11.3
Other Abnormalities
11.3.1
Abnormalities When Powering ON
(When the "FAILURE" lamp lights and the LCD displays an error message, see
Section 11.2, "When Error Message is Displayed on LCD.")
Table 11.2 Troubleshooting after Powering ON
No.
1
Symptom
The "POWER" lamp
does not light when
powering ON.
11.3.2
Probable cause
Referred
Countermeasures
Section
Incorrect connection of
power cable
Connect the power cable
correctly.
6.4.2
Abnormal power voltage
Set the voltage to rated
voltage±10%.
6.4.2
13.2
Power failure
Check whether or not a
power failure has occurred.
10.1
Abnormalities When Performing the STP Pump Start Operation
(When the "FAILURE" lamp lights and the LCD displays an error message, see
Section 11.2, "When Error Message is Displayed on LCD.")
Table 11.3 Troubleshooting When Performing the STP Pump Start Operation
Troubleshooting
No.
1
Symptom
The "ACCEL."
lamp does not
light.
Probable cause
Countermeasures
The "MANUAL/
REMOTE" changeover
switch is not at the
correct position.
Slide the "MANUAL/
REMOTE" changeover
switch to the correct
position.
ROTATION INHIBIT
signal input pins
(REMOTE X7 (1)-(5)) are
opened.
When not using this
function, short the
circuits between (1)-(5), or
set "Inhibit Command" to
"DISABLE."
If these pins are opened,
the STP pump will not
rotate after performing
start operation.
11-8
Referred
Section
6.1.1
7.5
7.6
8.1
9.3
STP-A803/A1303 Series Instruction Manual
11.3.3
Other Abnormalities
(When the "FAILURE" lamp lights and the LCD displays an error message, see
Section 11.2, "When Error Message is Displayed on LCD.")
Table 11.4 Troubleshooting While the STP Pump Is Rotating
No.
Symptom
Probable causes
Countermeasures
Referred
Section
Insufficient
ultimate
pressure
Check the capacity and
starting state (use a backing
pump having more capacity
that we specified).
4.3.4
Leakage of the piping system Check the piping system for
leakage.
4.3.4
Failure of the backing pump
Residual molecules
If the main composition is H2
or H2O, perform baking; if it
is other gases, clean the
inside of the vacuum
equipment
(If gases remain inside the
STP pump, contact Service
office when it is needed to be
cleaned).
13.1
5.3
11.6.3
2
The STP pump
stops.
ROTATION INHIBIT signal
input pins (REMOTE X7
(1)-(5)) are opened.
When not using this
function, short the circuit
between (1)-(5), or set
"Inhibit Command" to
"DISABLE".
If these pins are opened, the
STP pump will not rotate
after performing start
operation.
8.1
9.3
3
The TMS unit
does not
function
Incorrect settings of TMS
function
When using the TMS unit,
set "TMS Function" to
"ENABLE".
9.3
4
ROTATION
INHIBIT signal
does not
function
correctly.
Incorrect settings of Inhibit
function
When using the ROTATION
INHIBIT signal, set "Inhibit
Command" to "ENABLE".
9.3
5
The E. V. valve Incorrect settings of the E. V. When using the E. V. valve,
does not
valve function
set "emergency vent. Valve
function (The
function" to "ENABLE".
E.V. valve is not
used with this
series of the
STP pump).
11-9
Troubleshooting
1
STP-A803/A1303 Series Instruction Manual
11.4
"WARNING" Message Display Function
The STP control unit is provided with a "WARNING" message to display when an
overhaul is needed following a self test.
When a "w" appears in the upper left hand corner of the LCD, press and hold the
"ENTER" switch to display the warning message. The warning message
indicates that an overhaul is necessary. Please contact Service office for an
overhaul. (The "ENTER" switch can also be used in Remote Mode.)
Example:
w
Levitation
"ENTER"
WARNING
First Damage Limit
◇
◇
Troubleshooting
◇
11.4.1
The upper line of the LCD displays the
operation status of the STP pump. The "w"
is displayed in each state (acceleration,
normal operation, and deceleration) of the
pump.
Warning message
The "WARNING" message cannot be reset by the "RESET" switch.
Service office is in charge of resetting the "WARNING" message.
The STP pump can operate even when the "WARNING" message is
displayed.
It is recommended to have the STP pump overhauled as soon as
possible.
The STP pump can operate even when the "WARNING" message is
displayed except when "Second Damage Limit" is displayed.
Overhaul the STP pump when "Warning" message is displayed.
First Damage Limit
The touch down bearing inside the STP pump will be worn out caused by impact
or air in rush from outside. Also, touch down at the power failure causes wear.
The STP control unit adds the damage point at each "Disturbance" and "Mains
Failure" error. "First Damage Limit" is displayed when the accumulation point
attains the prime setting value. "First Damage Limit" cannot be reset. It is
recommended to have the STP pump overhauled as soon as possible.
11-10
STP-A803/A1303 Series Instruction Manual
11.4.2
Second Damage Limit
"Second Damage Limit" is displayed when continuing to operate the STP pump
after "First Damage Limit" is displayed, and the accumulation of the damage
point attains the second setting value by generating second "Disturbance" or
"Mains Failure." Overhaul the STP pump because the STP pump cannot
perform the rotational operation when "Second Damage Limit" is displayed.
11.5
"ERROR RECORD" Message Display Function
To view the error record, push the "SELECT" switch follow the instructions for
entering Confirmation Mode in Section 9. The error number of up to the last 10
errors is displayed on the upper line of the LCD in the form "Error Record n°*/*",
and the contents of the error is displayed on the lower line.
The first number of "**/**" shows the number of the error (the most recent error
is number 1) and the second number shows the number of errors that have
occurred up to 10. Thus, a "1/3" would denote the most recent error of 3 errors.
Press the "UP" or "DOWN" switch to scroll display the contents of the next or
previous error in the error record. (The "UP" and "DOWN" switch can also be
input in Remote Mode. See Section 9.3 for a more detailed explanation of
Confirmation Mode.
11-11
Troubleshooting
The STP control unit can display the contents of up to the last 10 errors on the
LCD.
STP-A803/A1303 Series Instruction Manual
11.6
Maintenance and Inspection
◇
When performing maintenance and inspections of the STP pump,
exhaust gases inside the STP pump thoroughly.
Residual gases may cause an accident when removing the STP
pump.
Confirm the characteristics of gas to be used, referring to the
Material Safety Data Sheet (MSDS) you obtain from the gas supplier.
Wear personal protective equipment if necessary.
◇
Stop the STP pump, and turn OFF the primary power (Switch the
breaker "OFF"), before performing maintenance and inspections of
the STP pump and STP control unit.
Failure to do so may result in the inadvertent rotation of the STP
pump, which may result in an accident.
Do not touch any place other those specified when performing
maintenance or inspecting the pump and NEVER open any panel
because it could cause shock, malfunction, or short circuit.
Power OFF the baking heater and other peripheral equipment before
performing maintenance and inspections.
The wipes used for clean and decontamination might become
hazardous waste depending upon the solvent (alcohol). Dispose of
the contaminated wipes appropriately according to the regulations of
each national and/or local government.
◇
Troubleshooting
◇
◇
11-12
STP-A803/A1303 Series Instruction Manual
11.6.1
Cleaning and Decontamination
The method of cleaning and decontamination of the STP pump and STP control
unit is shown below.
Table 11.5 Cleaning and Decontamination
Area
Exterior Wipe with proper solvent (such as alcohol).
Clean off with a pure gas when dust has accumulated in the
connector.
When the label of the STP pump has been damaged, contact
Service office.
Interior
STP
Control unit
The decontamination (overhaul) in the STP pump is executed
in Service office. When overhaul is needed, contact Service
office.
Exterior Wipe with proper solvent (such as alcohol).
When dust has accumulated in the ventilation port, wipe off or
vacuum it with the cleaner. In this case, dust must not enter
in the STP control unit.
Clean off with a pure gas when dust has accumulated in the
connector.
When the label of the STP control unit has been damaged,
contact Service office.
Interior
The cleaning (overhaul) in the STP control unit is executed in
Service office. When overhaul is needed, contact Service office.
Troubleshooting
STP Pump
Cleaning and Decontamination
11-13
STP-A803/A1303 Series Instruction Manual
11.6.2
Inspecting the Deposit
Leaving the STP pump without removing the deposit may cause the
STP pump to be corroded beyond repair.
Deposit may have accumulated inside the STP pump depending upon the type of
the vacuum equipment installed in the STP pump. An increase in the amount of
deposit may lead to a malfunction of the STP pump.
Therefore, perform regular maintenance (once every three to six months as a
target).
Inspect the inside of the outlet port flange for adhesion of deposit while watching
the outlet port flange. If deposit has accumulated to some extent, an overhaul
(cleaning) is required. Contact Service office.
Note that the costs of troubleshooting problems resulting from deposit will be at
your own charge even during the warranty period.
If a problem resulting from deposit occurs inside the STP pump, hermetically
seal inlet port, outlet port, purge port, and leak port flanges, and immediately
return them to Service office.
For the transport method, see Section 11.6.4, "Transport for Repair or Overhaul."
Troubleshooting
◇
◇
Contact with atmospheric air may cause a reaction of the deposit.
DO NOT open the STP pump to atmospheric air as much as possible.
BOC Edwards supplies you the Temperature Management System
(TMS) unit to keep the temperature high inside the STP pump and
prevent the accumulation of deposit.
For details, contact BOC Edwards.
11-14
STP-A803/A1303 Series Instruction Manual
11.6.3
Overhaul
The recommended maintenance intervals for different process applications are
tabulated below:
Etching*1
Process
Metal Etch
Period
1 year
Remarks
Ensure that TMS (Temperature Management
System) is fitted and operational to prevent
accumulation of by-product deposition in the
pump.
◇
The touch down bearing inside the STP pump will be worn out after a
number of full speed touch downs. When the STP control unit
displays "w," it is essential to have the touch down bearings
replaced.
The costs of replacing parts that need to be replaced because of deterioration or
abrasion will be at your own charge.
When overhaul of the STP pump or the STP control unit is needed, contact
Service office.
*1
"Etching" includes semiconductor etching and LCD etching.
11-15
Troubleshooting
Other Etch
2 years
Processes
It is recommended to change the pump rotor after 5 years due to accumulated wear of
the protective plating material
Other semiconductor
2 years
Processes resulting in accumulation of deposits in
process
the pump will require more frequent service.
Clean applications
5 years
(Only vacuum pumping)
Other use
(2 years)
Dependent on application, contact BOC Edwards.
STP-A803/A1303 Series Instruction Manual
11.6.4
◇
◇
◇
Transporting for Repair or Overhaul
When returning the STP pump which has used any kind of gases to
Service office, fill the type of gas and handling precautions in the
"Malfunction Information " and fax it to Service office.
Confirm the characteristics of gas to be used, referring to the
Material Safety Data Sheet (MSDS) you obtain from the gas supplier.
Follow the instruction of "Return Procedure" to prevent an accident
during the transportation, repair or overhaul.
When returning the STP pump to Service office, be sure to pack it
well to prevent external damage.
If "Return Procedure" has not been satisfied, BOC Edwards will not
be responsible for any troubles.
Troubleshooting
i) Always contact Service office before returning the STP pump for repairs,
overhaul, or other purposes. To avoid any accident by gases or corrosion inside
the STP pump, particularly when corrosive, reactive or flammable gases have
been used, ii) Vacuum and hermetically seal the STP pump before transport. iii)
Specify the type of gases used and handling precautions in the "Malfunction
Information" and return the STP pump to Service office.
When returning the STP pump to Service office, be sure to pack it well to prevent
external damage. Use similar or superior packaging material as originally
supplied.
"Return Procedure" and the "Malfunction Information" are in the end of the
Instruction Manual. When additional sheet is needed, contact Service office.
◇
◇
The costs of cleaning and overhaul of the STP pump will be at your
own charge.
When returning the STP pump to Service office, fill in the necessary
items in the "Malfunction Information " and fax it to Service office.
11-16
STP-A803/A1303 Series Instruction Manual
12
Storage and Disposal
12.1
Storage of the STP Pump
When the STP pump is left unused over a long period (more than a few months),
follow the precautions below:
Close the inlet port of the STP pump and vacuum it using a backing pump.
Introduce dry N2 gas or dry air from the outlet port or the purge port.
Close the outlet port and purge port.
If the STP pump is water cooled, introduce compressed air from one side of
the cooling water port so that no water remains in the STP pump.
5) Store the STP pump in a vertical position.
6) DO NOT store the STP pump in the following places:
• Place of high humidity.
(If it must be stored in a place of high humidity, insulate it from the
outside and use a dehumidifying agent.)
• Place of high temperatures (more than + 55 °C) and low temperatures
(less than - 25 °C).
• Place where there are corrosive gases.
• Place subjected to dripping water.
• Place with a lot of dust.
• Place with insufficient ventilation.
• Place subjected to strong magnetic or electric fields.
• Place subjected to radiation.
12.2
Storage of the STP Control Unit
If the STP control unit (including cables) is not used for a long period (more than
a few months), follow the precautions below:
1) Store the STP control unit in a horizontal position.
2) DO NOT store the STP control unit in the following places:
• Place of high humidity.
(If it must be stored in a place of high humidity, insulate it from the
outside and use a dehumidifying agent.)
• Place of high temperature (more than + 55 °C) and low temperature (less
than - 25 °C) (excluding the battery).
• Place subjected to direct sunlight.
• Place where there are corrosive gases.
• Place subjected to dripping water.
• Place with a lot of dust.
• Place of insufficient ventilation.
• Place subjected to strong magnetic or electric field.
• Place subjected to radiation.
• Place subjected to mist.
• Place with electric noise.
• Place with vibration.
12-1
Troubleshooting
1)
2)
3)
4)
STP-A803/A1303 Series Instruction Manual
12.3
Disposal
Dispose of the STP pump and the STP control unit as industrial waste according
to the guidelines given by each national and/or local government.
◇
When disposing of the STP pump, exhaust gases inside the STP
pump thoroughly.
Residual gases may result in an accident when disposing of the STP
pump.
If the STP pump has been used with reactive or corrosive gasses,
always clean thoroughly before disposing of it to avoid any injury.
Confirm the characteristics of gas to be used, referring to the
Material Safety Data Sheet (MSDS) you obtain from the gas supplier.
◇
BOC Edwards is not responsible for problems during or after
disposal.
Troubleshooting
12-2
STP-A803/A1303 Series Instruction Manual
13
Specifications
13.1
Specifications for the STP Pump
Table 13.1 Specifications for the STP Pump
Item
Flange size
Pumping speed
Compression ratio
Inlet port flange
A803 Series
A1303 Series
VG150/ISO160
VG200/ISO200
KF40
KF40
1300
Outlet port flange
N2
L/s
800
H2
L/s
520
800
N2
>108
H2
103
Ultimate pressure
Pa (Torr)
10-7(10-9) order (after baking)
Maximum working pressure∗1
Pa (Torr)
13.3 (0.1): Water cooling
Allowable backing pressure*1
Pa (Torr)
270 (2): Water cooling
Rated speed
rpm
32,500
Starting time
min
7
Stopping time
min
8
Noise
dB
<50 (at 32,500 rpm)
Baking temperature
°C
<120
Lubricating oil
Not necessary
Installation position
Free
Cooling method
Standard auxiliary pump
Mass*2
Dimensions
Water cooling
L/min
>1,300
kg
mm
39
Φ270×H343(VG150)
Φ270×H350(ISO160F)
Φ270×H312
Ambient temperature range
°C
0 to 40
Storage temperature range
°C
- 25 to + 55
Specification
The values shown in the table are typical; they are not guaranteed.
∗1
: The pressure is applicable under conditions that N2 or other similar gas is vacuumed and the backing pump
(pumping speed: 1,300 L/min) is used.
*2
: Mass is a value of state that the only standard accessory was installed (except the optional accessory).
13-1
STP-A803/A1303 Series Instruction Manual
φ 225
Inlet port flange
(ISO160F)
21
0
2 2 . 5゚
25
45
゚
(1
80
゚
2 0゚
3 0゚
3 0゚
80
φ2
Outlet port flange KF * 1 40
Cooling water port PT* 2 (RC* 1 )1/4
Screw hole for leg
8-M12* 1 Depth24
Unit: mm
*2:Conform to ISO
*1:JIS
Viewed from Arrow A
Purge port KF* 1 10
10
φ1
(Optional accessory)
147.5
157
φ 235
φ165
STP connector
35゚
Temperature sensor connector
M12 Depth20
342
)
External Appearance of the STP Pump (STP-A 803 Series)
Specification
13-2
φ 170
φ 270
φ 237
↑
A
37
16
32
φ
335 or more
2 2 .5 ゚
Figure 13.1
246
300
87
0
20
φ
(9)
(8)
12
30
35
15
Inlet port flange
(VG150)
335
293
239
(Bending dimensions of the STP connection cable)
27
Figure 13.1 External Appearance of the STP Pump (STP-H803 Series)
335 or less
φ 300
27
304
0
26
φ
φ 237
φ 270
Figure 13.2 External Appearance of the STP Pump (STP-H1303 Series)
Specification
Figure 13.2
(Optional accessory)
Temperature sensor connector
M12 Depth 20
゚
2 0゚
3 0゚
Unit: mm
*1:JIS
*2:Conform to ISO
8-M12* 1 Depth 24
Screw hole for leg
Cooling water port PT* 2 (RC* 1 )1/4
Purge port KF* 1 10
φ2
10
3 0゚
Viewed from Arrow A
STP connector
゚
25
45
Outlet port flange KF* 1 40
External Appearance of the STP Pump (STP-A1303 Series)
A
↑
φ 285
Inlet port flange
(ISO200F)
)
(Bending dimensions of the STP connection cable)
(VG200)
208
262
Inlet port flange
0
3 5゚
27
147.5
2 2.5゚
16
35
15
13-3
(9)
(8)
1 5゚
80
80
87
φ1
37
(1
157
φ
STP-A803/A1303 Series Instruction Manual
:
:
RATED SPEED
kg
rpm
CE
turbomolecular pump
MANUFACTURED BY:BOC Edwards Technologies Ltd.Narashino,Japan
Manufactured by BOC Edwards at the former
Seiko Seiki plant in Narashino,Japan
:
WEIGHT
MANUFACTURING DATE :
SERIAL NO
STP-
13-4
Figure 13.3 Label Affixing Positions for the STP Pump
STP-A803/A1303 Series Instruction Manual
STP-A803/A1303 Series Instruction Manual
13.2
Specifications for the STP Control Unit
Table 13.2 Specifications for the STP Control Unit (1/2)
Item
Input voltage
Specifications
V AC
200 to 240±10%
Without the TMS unit:
VA
Max. 850
With the TMS unit:
VA
Max. 1,200
Input frequency
Hz
50/60±2
Leakage current value
mA
Max. 3.5
Input phase
Main breaker spec.
Single phase
Rated current
A
AIC: Ampere
A
15
1000 (AC240V, 50/60Hz)
Interrupting Capacity
Motor drive system
Output voltage under rated operation
3-phase DC brushless motor driver
V AC
79
Output frequency under rated operation
Hz
542
Ambient temperature range
°C
0 to 40
Storage temperature range
°C
- 25 to + 55
Mass*1
kg
9
Dimensions
mm
W210 × H132.5 × D401.6
TMS control unit
Internal
Operation switches
• START switch
•
•
•
•
•
•
•
*1
(flat panel switch, green)
STOP switch
(flat panel switch, dark gray)
RESET switch
(flat panel switch, gray)
SELECT switch
(flat panel switch, gray)
UP switch
(flat panel switch, gray)
DOWN switch
(flat panel switch, gray)
ENTER switch
(flat panel switch, gray)
MANUAL/REMOTE changeover switch
(slide switch, black)
Panel indication lamps
•
•
•
•
•
•
•
Panel display
• LCD panel (20×2 characters)
ACCEL. lamp
NORMAL lamp
BRAKE lamp
TEMP CTRL lamp
POWER lamp
FAILURE lamp
REMOTE lamp
(green LED)
(green LED)
(green LED)
(green LED)
(green LED)
(red LED)
(green LED)
: Mass is a value of state that the only standard accessory was installed (except the optional accessory).
13-5
Specification
Input power
STP-A803/A1303 Series Instruction Manual
Table 13.2 Specifications for the STP Control Unit (2/2)
Item
Specifications
Input/output terminals
•
•
•
•
AC POWER X2
P.CONNECTOR X1
TMS X5
REMOTE X7
Input/output cables
•
•
•
•
Power (primary) cable
STP connection cable
TMS connection cable (optional accessory)
Safety functions
•
•
•
•
•
( 3 pins)
(60 pins)
(26 pins)
(37 pins)
Magnetic bearing abnormality/error
detection
STP pump overheat detection
Driver overload detection
Power failure detection
STP pump overspeed detection
STP control unit overheat detection
• TMS unit failure detection
• Other TMS unit failure detection
Specification
13-6
13-7
Figure 13.4 External Appearance of the STP Control Unit
STP-A803/A1303 Series Instruction Manual
kg
Manufactured by BOC Edwards at the former Seiko Seiki plant in Narashino,Japan.
MANUFACTURED BY:BOC Edwards Tecnologies Ltd.Narashino,Japan
VA WEIGHT:
POWER SUPPLY(50/60Hz):1φ AC
SERIAL No.:
Turbomorecular pump Control Unit
MODEL: SCUMANUFACTURING DATE:
POWER CONSUMPTION:
CE
V
13-8
Figure 13.5 Label Affixing Positions for the STP Control Unit
STP-A803/A1303 Series Instruction Manual
UNIT CONVERSION TABLE
Length
m
cm
mm
1
100
1.00x10
1
10.0
0.394
0.10
1
39.4x10
2.54
25.4
1
0.01
1x10
-3
25.4x10
-3
inch
3
Weight
g
kg
1.00x10
1
1x10
-3
lb.
-3
2.20x10
1
2.20
0.454
1
Pa
Torr
kgf/cm
1
7.50x10
133
454
-3
Pressure
9.81 x 10
4
-3
2
1.02x10
-5
1
1.36x10
-3
736
1
39.4
-3
For more information, contact to the nearest Service Office.
Manufacture:
BOC Edwards Japan Limited
2-4-1, Shibakoen, Minato-ku, Tokyo 105-0011 JAPAN
Telephone: Domestic
03-5470-6530
International
+81-3-5470-6530
Facsimile: Domestic
03-5470-6521
International
+81-3-5470-6521
Copyright 2003 BOC Edwards Japan Limited. All rights reserved.
Form HS1
Return of BOC Edwards Equipment - Procedure
INTRODUCTION
Before returning your equipment, you must warn BOC Edwards if substances you used (and produced)
in the equipment can be hazardous. This information is fundamental to the safety of our Service Centre
employees and will determine the procedures employed to service your equipment.
Complete the Declaration (HS2) and send it to BOC Edwards before you dispatch the
equipment. It is important to note that this declaration is for BOC Edwards internal use only, and
has no relationship to local, national or international transportation safety or environmental
requirements. As the person offering the equipment for shipment, it is your responsibility to ensure
compliance with applicable laws.
P900-70-000 Issue K
GUIDELINES
• Equipment is 'uncontaminated' if it has not been used, or if it has only been used with substances
that are not hazardous. Your equipment is 'contaminated' if it has been used with any substances
classified as hazardous under EU Directive 67/548/EEC (as amended) or OSHA Occupational Safety
(29 CFR 1910).
• If your equipment has been used with radioactive substances, biological or infectious agents,
mercury, polychlorinated biphenyls (PCB’s), dioxins or sodium azide, you must decontaminate it
before you return it to BOC Edwards. You must send independent proof of decontamination (for
example a certificate of analysis) to BOC Edwards with the Declaration (HS2). Phone BOC
Edwards for advice.
• If your equipment is contaminated, you must either:
• Remove all traces of contamination (to the satisfaction of laws governing the transportation of
dangerous/hazardous substances).
• Or, properly classify the hazard, mark, manifest and ship the equipment in accordance with
applicable laws governing the shipment of hazardous materials.
Note: Some contaminated equipment may not be suitable for airfreight.
PROCEDURE
1. Contact BOC Edwards and obtain a Return Authorisation Number for your equipment.
2. Complete the Return of BOC Edwards Equipment - Declaration (HS2).
3. If the equipment is contaminated, you must contact your transporter to ensure that you properly
classify the hazard, mark, manifest and ship the equipment, in accordance with applicable laws
governing the shipment of contaminated/hazardous materials. As the person offering the equipment
for shipment, it is your responsibility to ensure compliance with applicable law. Note: Equipment
contaminated with some hazardous materials, such as semiconductor by-products,
may not be suitable for airfreight - contact your transporter for advice.
4. Remove all traces of hazardous gases: pass an inert gas through the equipment and any accessories
that will be returned to BOC Edwards. Where possible, drain all fluids and lubricants from the
equipment and its accessories.
5. Seal up all of the equipment's inlets and outlets (including those where accessories were attached)
with blanking flanges or, for uncontaminated product, with heavy gauge tape.
6. Seal equipment in a thick polythene/polyethylene bag or sheet.
7. If the equipment is large, strap the equipment and its accessories to a wooden pallet. If the
equipment is too small to be strapped to a pallet, pack it in a suitable strong box.
8. Fax or post a copy of the Declaration (HS2) to BOC Edwards. The Declaration must arrive before
the equipment.
9. Give a copy of the Declaration (HS2) to the transporter. You must tell your transporter if the
equipment is contaminated.
10. Seal the original Declaration in a suitable envelope: attach the envelope securely to the outside of
the equipment package, in a clear weatherproof bag.
WRITE YOUR RETURN AUTHORISATION NUMBER CLEARLY ON THE
OUTSIDE OF THE ENVELOPE OR ON THE OUTSIDE OF THE EQUIPMENT
PACKAGE.
Form HS2
Return of BOC Edwards Equipment - Declaration
Return Authorisation Number:
You must:
•
Know about all of the substances which have been used and produced in the equipment before you complete this Declaration
•
Read the Return of BOC Edwards Equipment - Procedure (HS1) before you complete this Declaration
•
Contact BOC Edwards to obtain a Return Authorisation Number and to obtain advice if you have any questions
•
Send this form to BOC Edwards before you return your equipment
SECTION 1: EQUIPMENT
Equipment/System Name_________________________
IF APPLICABLE:
Part Number _________________________________
Tool Reference Number_________________
Serial Number_________________________________
Process ______________________________
Has the equipment been used, tested or operated ?
Failure Date___________________________
YES
Serial Number of
Replacement Equipment_________________
R Go to Section 2
NO
R Go to Section 4
SECTION 2: SUBSTANCES IN CONTACT WITH THE EQUIPMENT
Are any substances used or produced in the equipment:
•
•
Radioactive, biological or infectious agents, mercury,
poly chlorinated biphenyls (PCBs), dioxins
or sodium azide? (if YES, see Note 1) YES
NO
R
YES R
Hazardous to human
health and safety?
R
NO R
Note 1 : BOC Edwards will not accept delivery of any
equipment that is contaminated with radioactive substances,
biological/infectious agents, mercury, PCB’s, dioxins or
sodium azide, unless you:
•
•
Decontaminate the equipment
Provide proof of decontamination
YOU MUST CONTACT BOC EDWARDS FOR ADVICE
BEFORE YOU RETURN SUCH EQUIPMENT
SECTION 3: LIST OF SUBSTANCES IN CONTACT WITH THE EQUIPMENT
Chemical
Symbol
Substance name
Precautions required (for example,
use protective gloves, etc.)
Action required after a spill,
leak or exposure
SECTION 4: RETURN INFORMATION
Reason for return and symptoms of malfunction _________________________________________________
_________________________________________________________________________________
If you have a warranty claim:
•
who did you buy the equipment from ? _____________________________
•
give the supplier’s invoice number_________________________________
SECTION 5: DECLARATION
Print your name:_________________________________Print your job title:_________________________
Print your organisation:____________________________________________________________________
Print your address:_______________________________________________________________________
Telephone number: ___________________________Date of equipment delivery: ______________
I have made reasonable enquiry and I have supplied accurate information in this
Declaration. I have not withheld any information, and I have followed the Return of
BOC Edwards Equipment - Procedure (HS1).
Signed: _____________________________________Date______________
Note: Please print out this
form, sign it and return the
signed form as hard copy.
P900-71-000 Issue K
_______________________________________________________________________
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EDWARDS TECHNOLOGIES
LIMITED
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PLEASE CONTACT ANY OF THESE COMPANIES FOR DETAILS OF OTHER SALES AND
SERVICE CENTRES IN YOUR AREA.
BOC Edwards is part of BOC Limited. BOC Edwards and the stripe symbol are trade marks of The BOC Group.
© BOC Edwards 2003
Produced by Technical Publicity [email protected]
http://www.bocedwards.com
[email protected]
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