HITACHI SU-70 SEM CHEAT SHEET INITIAL CHECK 1. On

HITACHI SU-70 SEM CHEAT SHEET
INITIAL CHECK
1. On right of column
FIL light should be on
HV light should be off
2. If the Hitachi PC-SEM control program is not running then start it from the
desktop. The user name is “user” and the password is “yinqe”.
If you had to reboot then note that WINDOWS has no password. Just
press ENTER.
3. Check the detector: while in high-mag mode, choose the SEM tab and then
look at the detector setting. It should be set to the upper detector, without
any “BSE” filtering.
LOAD SAMPLE
1. Check the height with the height gauge. If your sample is a little high or a little
low, then set the height and size from the STAGE tab. Your sample should
not be more than 2 mm higher than standard.
2. Make sure that NOTHING PROTRUDES from the bottom of the stub.
Your sample should not wiggle around. NEVER put a pin stub
directly in a threaded post (that would be really, really stupid.)
3. Put your sample in the load lock and pump it down... while wearing gloves.
4. BEFORE moving the sample inside the SEM, be sure to set the sample size
(diameter) and height from the STAGE tab.
GET AN IMAGE
1. Select voltage and turn on HV
Did you remember to set the sample diameter and height?
Do not change the extraction voltage (leave it at 1.8 kV).
Make sure that “deceleration” is NOT selected. (Well, unless
that’s really what you want. But that’s unlikely.)
Feel free to discard any stage history, if you are asked.
2. Move to HOME position
3. Turn down Magnification all the way
4. Try using low-res mode initially- click on the H/L button
5. Center some prominent feature while in Low-res mode, then switch to high-res
mode (with the H/L button). You are probably far out of focus. Look at the
working distance at the bottom of the video window. Is it close to your
actual Z coordinate? If not, crank the coarse focus knob in the direction
which brings that number closer to the actual height.
Also check that you are using the upper detector (in high-res).
If the sample is close to the objective, then you will get
a poor signal from the lower detector.
6. For best resolution, move the sample close to the objective.
Choose a Z coordinate of 3 to 5 mm, using the stage menu.
ALIGNMENT
1. In high-res mode, find a nice piece of dirt or colloidal gold, or a lump of
something. Do not use a straight edge.
2. Click on ALIGN button. By default this function will wobble the focus, and the
two alignment knobs will allow you to move the beam to the center of the
objective aperture. Do not adjust anything else in the ALIGN box.
Do NOT use the “stigma align x/y” function in the alignment menu box.
These functions are for ajusting the stigmator balance, not the stigmation.
You do NOT need to adjust the stigmator balance.
3. Stigmation: Close the alignment dialog box. Look at something
bumpy or round to adjust the stigmation. Do not use a grating!
Adjusting the stigmation is critical. Find out how to do it right.
TAKE A PICTURE
1. Choose scan speed, then use the “M” button (on top) to grab a high resolution
image. The thumbnail image will appear on the lower-left.
2. Click on the “PCI” button on the LOWER LEFT to start the Quartz PCI
program. The selected images will appear in this program.
3. From PCI, use File: Export to save the images to a file. “Export” will let you
save all the annotation to the image file. If instead you use “save” then
your annotation will not appear in the image.
TAKE AWAY
If you store images on the local drive, then these files will NOT be backed up. If
you store images on the YINQE file server (gir.eng.yale.internal) then they will be
backed up.
Use a USB memory stick to take your image files, or transfer the files to the
YINQE file server – there is a shortcut icon on the Windows desktop. You can
retrieve files from the public server by mounting it as the “Windows network
location” \\gir.eng.yale.internal\data On a Macintosh, use the finder’s menu “Go”
to “connect to server”, named smb://gir.eng.yale.internal/data
BEFORE YOU LEAVE
1. Shut off the high voltage
2. Remove your sample. Put the sample holder parts away neatly.
3. Delete images from PCI-Quartz and from the Hitachi control program
4. Look around and clean up after yourself.
5. Do not log off Windows. Do not shut down the Hitachi control program.
6. Leave the sample stubs in the drawer. DO NOT TAKE THE STUBS. Buy your
own stubs at tedpella.com
DO NOT LEAVE YOUR SAMPLES OR OTHER JUNK IN THE SEM ROOM.
LOOK FOR LOST ITEMS IN THE LOST-AND-FOUND DRAWER OR TRASH
CAN.
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