Edwards Spectron 600 Helium Leak Detectors

Edwards Spectron 600 Helium Leak Detectors
D 155-01-880
Revision C
Operation and Maintenance
CE
Manual
Spectron 600 Portable Leak Detector
Spectron
Spectron
Spectron
Spectron
Spectron
Spectron
e
FM 32104
600T
600T
600D
600D
600DS
600DS
230V,
I 15V,
230V,
I 15V,
230V,
I 15V,
50Hz
60Hz
50Hz
60Hz
50Hz
60Hz
D 155-0 1-000
D 155-02-000
D 155-03-000
D 155-04-000
D 155-05-000
DIS 5-06-000
~EDWARDS
SPECT 0
600
PORTABLE AUTOMATIC
LEAK DETECTORS
OPERATIONS AND
MAINTENANCE MANUAL
~ff/
EDWARDS
Edwards High Vacuum International is part of BOC Ltd. The stripe symbol is a trademark of the BOC Group
Part No. 0155·01·880 (Rev C)
Declaration of Conformity
We,
Edwards High Vacuum International,
Manor Royal,
Crawley,
WestSussex RH102LW, UK
declare under our sole responsibility that the product(s)
D15S01000
D15502000
D15503000
D15S04000
D1550S000
D15S06000
D15501510
D15501540
Spectron 6OOT, 230V, 50Hz
Spectron 600T, 115V,60Hz
Spectron 6OOD, 230V, SOHz
Spectron 600D, 115V, 60Hz
Spectron 600DS, 230V, 50Hz
Spectron 6OODS, 115V, 60Hz
Hand Held Remote
External Roughing Kit
to which this declaration relates is in conformity with the following standard(s)
or other normative document(s)
EN6101O-1:1993/A2 Safety Requirements for Electrical Equipment for
Measurement, Control and Laboratory use.
ENS0081-2
EN50082-2
Electromagnetic Compatibility, General Emission Standard.
Generic Standard Class: Industrial Environment
Electromagnetic Compatibility, General Immunity
Standard.
Generic Standard Class: Industrial Environment.
following the provisions of
73/023/EEC
89/336/EEC
Low Voltage Directive.
Electromagnetic Compatibility Directive.
Dr. AP. Troup. Director of Technology
~EDWARDS
Date and Pla,ce
Table Of Contents
Section 1: General Information
1.1
1.2
1.3
1.4
1.5
1.6
1-1
1-3
1-7
1-8
1-11
1-14
Introduction
Unpacking & ~spection
Installation
Features & Specifications
General Description
Disposal
Section 2: Operating the Spectron 600
2.1
2.2
2.3
2.4
2.5
2.6
2.7
2.8
2.9
2.10
2.11
Introduction
Operator Controls & Indicators
Starting the Spectron 600 Leak Detector
Leak Testing
Operation With an External Pump
Sniff Testing
High Sensitivity Power Sniff Testing
Shut Down Procedure
Setting Test Parameters
Setting Additional Parameters
Test Aids & Procedures
2-1
2-3
2-19
2-20
2-22
2-23
2-24
2-25
2-25
2-31
2-32
Section 3: Theory of Operation
3.1
3.2
3.3
3.4
Introduction
Direct Flow & Reverse Flow Modes.
Functional Description of Operation
Description of Major Components
3-1
3-4
3-6
3-11
Section 4: Service & Maintenance
4.1
4.2
4.3
4-1
4-2
4-4
Introduction
Service Mode
Calibration & Tuning
i
4.5
4.6
4.7
4.8
4.9
4.10
Contamination of the Vacuum System
Venting the Vacuum System
Cleaning Requirements
Calibration Requirements
General Service & Repair
Troubleshooting Aids
4-11
4-14
4-15
4-23
4-26
4-36
Section 5: Parts List
5.1
5.2
5.3
5.4
Introduction
Recommended Spare Parts for the Spectron 600
Optional Accesories
Other Components
5-1
5-2
5-4
5-6
Appendix A:
Glossary of Terms Used in Leak Detectio)1
Appendix B:
A.Y.S. Standards for Testing of Mass Spectrometer Leak Detectors
Appendix C:
Leakage Conversion Factors
Appendix D:
Remote Port Specifications
Appendix E:
Profile and Revision Switch Positions
Appendix F:
Spectron 600 Quick Reference
Appendix G:
Spectron 600D Manual Addendum
G.1
G.2
G.3
G.4
General Information
Operating the Spectron 600D
Service and Maintenance
Parts
ii
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General Information
1.1
Introduction
This Operations & Maintenance Manual describes in detail the infonnation
needed to understand the operation and functions of the Edwards Spectron 600
Fully Automatic Portable Leak Detector (illustrated in Figure 1-1), and provides
the infonnation needed to service and maintain the unit in optimal working
condition. This manual has been divided into five chapters:
•
•
•
•
•
Chapter 1
Chapter 2
Chapter 3
Chapter 4
Chapter 5
Generallnfonnation
Operating the Spectron 600
Theory of Operation
Service & Maintenance
Parts Lists
Chapter 1, General Information, describes the features of the Spectron 600
Leak Detector, its basic operation, unpacking and inspection of the unit, installation requirements as well as specifications for the unit.
Chapter 2, Operating the Spectron 600, details the controls necessary to
operate the Spectron 600, both during nonnal operation of the unit as well as
when placed in its Service Mode. All external connectors and their applicability
to the unit and its functions are also discussed. This chapter also includes an
explanation of what occurs during the unit's start-up procedure, a description of
the leak test modes, an explanation of sniff testing procedures, a step-by-step
description of how to perfonn actual leak testing, operations involving the
optional external pump, an explanation of what occurs during the unit's
shutdown procedure, the setting of the unit's testing parameters, and Spectron
600 self-testing procedures.
Chapter 3, Theory of Operation, has been included in order to give the
Spectron 600 user infonnation on how the unit functions. Maintenance personnel
servicing the unit will find this most useful, since a thorough technical understanding of how the unit operates is critical when performing the repairs and
service discussed in the following chapter.
1-1
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Chapter 4, Service & Maintenance, describes in further detail the unit's
Service Mode, the necessary tuning/calibration procedures for the Spectron 600,
required periodic service procedures and recommended service intervals,
detection and correction of contamination within the vacuum system, procedures
for venting the vacuum system, cleaning requirements and procedures, calibration of measurement components, valve block service and repair, repair or
replacement of the unit's electronics and a full listing of front panel error codes,
their probable causes and our recommended corrective actions.
Chapter 5, Spectron 600 Parts Lists, contains a full list of recommended spare
parts and a complete listing of the spare parts available from Edwards.
This manual provides the specific documentation needed to operate and service
the Spectron 600 Leak Detector. The Spectron 600 System is a highly technical
system that incorporates many sophisticated technologies. In view of this, every
effort has been made to automate both the unit's operation and maintenance procedures. It is imperative, however, that operations and service personnel
familiarize themselves with the operations and maintenance procedures in this
manual in order to maximize the efficiency of the unit, as well as minimize
downtime caused by improper service and repair.
1.2
Unpacking & Inspection
The Spectron 600 is shipped in a specially constructed package that minimizes
the possibility of damage during transit. The shipping carton and packing
materials should be saved for future use.
Prior to unpacking the unit, inspect the exterior carton for any signs of damage.
After unpacking the unit, inspect the leak detector itself for any obvious damage.
Should the Spectron 600 fail to function as required, or fail to meet its specifications, contact the Edwards Service Department. Edwards High Vacuum
International must be contacted and a Health and Safety Form must be
completed prior to the return of any equipment (see end of manual for Service
Department contacts and forms).
Once the leak detector has been removed from its package, the Spectron 600
must be opened and all shipping material removed from the unit's internal
roughing and turbomolecular pumps. To access the internal roughing pump, the
front panel must be opened; to access the turbomolecular pump, the back panel
must be opened. Both panels are hinged at the bottom and held with a single
screw at the top of each panel. To open a panel, loosen the captive screw at the
top of the panel (a 1/4 turn is sufficient to unloosen the screw) and gently lower
1-3
the door. Make sure that the unit is placed on a flat surface (Edwards Cart, part
number D155-01-500, recommended). Remove all shipping materials and tiedown wraps from the internal pumps.
The Spectron 600T is shipped without oil in the internal roughing pump, which
must be filled prior to use (see the Edwards 600D manual addendum for shipping
information specific to the 600D Dry Leak Detector. In addition, to protect the
pump during shipment, it is fitted with two blanks that cover its intake and filter
connections. Remove these blanks and attach the flex hosing and filter (refer to
Figure 1-2 for a diagram illustrating the proper installation for the hose and filter
connections). Attach the flex hosing with the provided centering ring and clamp,
and thread the exhaust filter into the adaptor on the pump (item 9). Also, the unit's
purge tubing (refer to Figure 1-2) is fitted with a 1/4" ferrule blank. Unscrew the
blank and reattach the tubing as indicated in Figure 1-2.
Parts List for Figure 1-2:
PART NUMBER
OESCRIPTION
1
A371-22-902 (115V)
A371-22-919 (230V)
Rotary Vane Mechanical
Pump
2
0155-02-836
0155-02-837
Polyflow Cap, 1/4"
Ferrule Nut
3
0155-02-876
Polyflow Tubing, Purge
Line
ILLUSTRATION #
Blank Cap
4
5
C105-12-345
NW16/10 Centering Ring
Adaptor
6
C105-12-304
NW16 Clamp
7
0155-02-821
Manifold, Roughing Pump
Blank Cap
8
9
0155-02-868
Pump Filter Adaptor
10
0155-02-840
Exhaust Filter
NW16 to 1/4 NPT Adaptor
To fill the pump with oil, unscrew the black cap labeled "OIL" to the left of the
exhaust filter. Using the oil (HllO-26-015) and the funnel (D155-02-829)
provided in the installation kit, slowly fill the pump until the level in the sight
glass is just 1/4" below the fill line. Replace the oil fill cap.
1-4
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1-5
When all shipping material has been removed, all pump connections have been
made, and the pump has been filled with oil, replace the right side panel and
close the front and rear doors.
NOTE
The Spectron 600 Leak Detector is factory tested and calibrated
prior to shipment and once installed, is ready for use.
An Installation Kit is included with the unit when it is shipped. The 600T kit
(D155-01-81O) contains (refer to addendum for 600D installation kit and
contents):
Part Number
Description
0155-02-840
Exhaust Filter
0155-01-820
Filament Kit (box of 5)
0155-02-829
Funnel
0155-02-828
7/64 Allen Wrench
H11D-26-015
VMP-19 Oil (1 liter)
0155-01-840
Kit, Cart Mounting
0155-01-830
N2 Kit
0155-02-838
QC Adaptor, NW25 to 1 1/8"
0155-02-815
Blank Plug, 1/18
0155-02-833
Elbow, 1/4 NPT to 3/8 Tube
0155-02-841
Tubing, Tygon, 1/4"
1-6
1.3
Installation
The Spectron 600 has been designed as a completely self-contained portable
leak detector and therefore has the capability to work in a wide range of environments. However, before installation in a work area, certain requirements must be
met.
• A properly grounded electrical supply (115V/60Hz/lOA,
230-240V/50Hz/5A, or 100V/50-60Hz/IOA as
labeled on rear of unit) must be available.
• A user supplied helium supply is usually necessary for the unit
(but not for all testing, e.g., sealed parts should already be prebombed with helium). The Spectron 600 can "use either a Mass 3 or
Mass 4 helium supply. Virtually any standard purity helium
may be used during leak testing. Depending on the type of leak
testing that will be performed, a spray probe (for vacuum
testing), a sniffer assembly (for sniff testing) or a test cup (for
pressure bombing testing) will be necessary. All of these items
are available directly from Edwards .
.
• The recommended ambient temperature range for the unit is
from lOoe to 40°C. Also, excessively humid environments
should be avoided.
• Depending upon the immediate environment, an external
exhaust facility may be necessary. A bulkhead is installed on
the rear of the Spectron 600 that is intended for user-provided 3/8"
polyflow tubing. Note that the bulkhead is not connected to the
internal exhaust filter of the unit but must be connected by the
user. The tubing is then attached to a functional exhaust system.
WARNING!
Only qualified service personnel should operate the unit when either
the front or rear panels are open. Potentially lethal high voltages are
continually applied to the circuit boards and other areas within the unit
during its operation. Although these areas are shielded and well
marked, failure to follow this precaution may possibly lead to severe
injury or death.
1-7
1.4
Spectron 600T Features & Specifications
FEATURES
(refer to addendum for Spectron 6000 specifications)
Sensitivity:
6 X 10- 11 std cc/sec air equivalent
Leak Rate Range:
10 x 10° to 6 X 10- 11 std cc/sec air equivalent
(with optional external pump)
10 X 10-4 to 6 X 10- 11 std cc/sec air equivalent
(without external pump)
Start-Up:
Fully functional in less than 5 minutes. Consists of:
turbomolecular pump acceleration, a complete set of
self-diagnostics, turning on filament, checking and
assuring hi-vac status, measuring system offsets and
measuring background helium
Internal Calibrator:
Helium 4, 1 x 10-8 to 3 X 10-8 std cc/sec air
equivalent with integral solenoid valve
Testable Masses:
Helium Mass 3 or 4
Thning:
Automatic
Calibration:
Automatic for Helium 4 using an internal calibrator of
1 x 10-8 to 3 X 10-8 std cc/sec air equivalent
Auto Zero:
Automatic zeroing of leak rate while in test mode.
Initiated by pressing the ZERO pushbutton.
Background
Compensation:
Continuous automatic compensation for system background
Remote Control
membrane Unit:
Molded A.B.S. case. Plastic laminate over tactile
switch array. Controls similar to User Panel.
RS-232C Port:
Two standard bidirectional ports. One port dedicated
to the remote control unit. The second port (DB9) is
dedicated to data transfer to an external computer or
control module.
1-8
Ranging:
[Automatic/Standard
Mode]
Without an external roughing pump, begins at the
least sensitive gross range (10-4 ). The unit ranges
downward until a leak is detected or until it reaches
its most sensitive range (10- 10). With the optional
external pump, if a gross leak is detected, the unit
ranges up to the appropriate decade. If a gross leak is
not detected, the unit ranges downward until a leak is
detected or until it reaches its most sensitive range.
Ranging:
[Manual Mode]
May operate at any range, selectable by the operator.
The 10° to 10-3 range is only available when the
optional external pump has been installed.
Measurement Units:
Pressure: milliTorr or millibar (selectable with a
switch located underneath the Service Panel accessible
when the unit's front panel has been opened)
Leak Rate: std cc/sec (standard cubic centimeters/
second) or mbar l/sec (millibar liters/second)
PUMPS
Mechanical Pump:
Edwards E2M1.5 rotary vane pump
Thrbo Pump:
Edwards EXT70 turbomolecular pump
External Pump:
Optional 7 or 16 cfm dual stage rotary vane
(mechanical) pump
PERFORMANCE SPECIFICATIONS
Sensitivity:
6 X 10- 11 std cc/sec air equivalent (direct mode)
6 x 10-10 std cc/sec air equivalent (reverse mode)
Resolution:
14 at Mass 4
Response Time:
Reverse Mode < 3.5 seconds
Fine Mode < 2 seconds
Test Time:
<3.5 seconds on a blank port to a pre-selected range
in the reverse flow test mode
1-9
Noise & Drift:
<6% on 10- 10 range
Testable Masses:
3 and 4
Maximum
Measurable Leak:
10 X 10-4 std cc/sec air equivalent (without external
pump) 10 std cc/sec air equivalent (with optional
external pump)
Maximum Inlet
Pressure:
Gross Mode: Atm (with optional external pump)
Reverse Mode: 720 mTorr
Direct Mode: 2SmTorr
Test Mode Leak
Gross: 10 to 1 X 10-3 std cc/sec helium
Intermediate (Reverse): 10 x 10-4 to 6 X 10- 10
Fine (Direct): 10 x 10-9 to 6 X 10- 11
ELECTRONICS & USER INTERFACE
System Controller:
Microprocessor based; four integrated boards used:
A controls the unit's computer, logic and sensors
B controls the unit's mass spectrometer voltage supplies
C controls the unit's displays and controls
D controls the unit's handheld remote
Display: LED alphanumeric and bar graph
displays
Data Input: Through dedicated function keys
MISCELLANEOUS
Power Requirements:
l1SV, SO-60Hz, 10 Amp
(Fuse: 10AB "Slo-Blo" [MDAlOD
230-240V, SO-60Hz, S Amp
(Fuse: SAB "Slo-Blo" [MDAS])
100V, SO-60Hz, 10 Amp
(Fuse: lOAB "Slo-Blo" [MDA10])
Dimensions:
lS.S"H x 20.S"W x 14.2S"D
(38.1 cm H x S2.1 cm W x 3S.6 cm D)
Weight:
8S lbs.
(38.6 kg)
1-10
1.5
General Description
The Spectron 600 is a fully automatic, dual mode, turbomolecular pumped
portable leak detector. Each of its two modes (Reverse Flow or Direct Flow) is
automatically selected by the leak detector based on the currently selected leak
rate range.
Reverse Flow Mode permits rapid testing for leaks in test objects that are characterized by a high degree of outgassing. Testing can start at test port pressures of
Atm for leaks from 10 to 1 X 10-3 std cc/sec (Gross Mode testing) when using the
optional external pump or pressures of 720 mTorr for leaks between 10 x 10-4
and 6 x 10- 10 std cc/sec (Intermediate Mode testing) for units not equipped with
an external pump.
Direct Flow Mode is most useful for testing objects that demand clean testing
and higher sensitivity. In this mode, the leak detector measures leaks from
10 x 10-9 to 6 X lO- ll std cc/sec, at a test port pressure of 25 mTorr or less.
However, this mode is also capable of determining larger leaks. Once the unit is
in this mode and a larger leak has been detected, the unit will range back to the
appropriate decade.
The Spectron 600 uses two types of automatic testing: an automatic test mode
with automatic ranging and an automatic test mode with manual ranging. In
automatic ranging mode, the leak detector automatically ranges downward (to
more sensitive leak rate ranges) until a leak is found. When using manual
ranging, the operator of the leak detector controls the range in which a particular
test object is tested
NOTE.
Refer to the Spectron 600D Manual Addendum for information on the special
Product Testing and Process System Testing modes for the 600D.
In the Automatic Test Mode, when using Automatic Ranging, all the functions of
the leak detector, including the evacuation (pump down) of the test object and
the functions of all pumps and valves are controlled by the Spectron 600
computer. Additionally, all measurements and display information about the leak
rate and system performance are under the control of the computer.
The Automatic Test Mode, when using Manual Ranging, is identical to the
Automatic Testing!Automatic Ranging mode except that the user preselects the
range (e.g., 10-5 std cc/sec) for testing. If a measured leak is either above or
below the preselected decade, the leak detector operator can manually range the
*Also referred to as Standard Operation. Standard Mode. or Normal Mode
1-11
unit either up or down. The remainder of the testing procedure is handled by the
Spectron 600 computer in exactly the same manner as with the Automatic
Ranging Mode.
1.5.1 Standard Operation
This is the normal operating mode for the Spectron 600. During operation, the
user need only use the-right (uncovered) portion of the display panel (the User
Panel is illustrated in Figure 2-1). All functions to be accessed and display information needed to leak test an object are found on this panel. The panel displays
bar graphs indicating test port pressure and leak rate values. Additionally, the
panel indicates the current leak range mode, an accept/reject indicator that
indicates if the leak being tested is above or below the test set point, and whether
the unit is in test or standby mode. The user panel also has toggles for automatic
or manual ranging (including greaternesser pushbuttons), audio volume pushbuttons, an auto-zero pushbutton, a sniff mode indicator and START and VENT
pushbuttons (START is used to commence the testing cycle as well as to interrupt
the testing cycle without the chance of accidentally venting the system, while
VENT is used to interrupt testing and/or to vent the test port).
1.5.2 Service Mode
WARNING!
The Service Mode of the Spectron 600 is intended for use by qualified Edwards
personnel or Users specifically trained by Edwards. Under no circumstances
should any individual be assigned access to this mode without a complete
knowledge of vacuum systems as well as the Spectron 600 System. Use by an
unqualified operator may result in damage to the unit and/or personal injury.
Service Mode is initiated by first opening the rear panel of the unit (loosen the
114-turn screw at the top of the panel, then gently lower the door) and then
pressing the black toggle button at the top right hand side of the circuit board
that is attached to the panel. Once the toggle has been pressed, the unit is placed
in Service Mode and the Service Mode indicator is illuminated.
Service Mode disables the automatic valve controls and allows the user to
manually control all of the valves within the vacuum system. The valves are
controlled by a cluster of labeled momentary switches located on the left of the
User Panel. The LED indicator on each switch is lit when the valve is open.
Included within the vacuum system are: the auto-calibrator valve, external rough
valve, fine (direct) valve, foreline (reverse) valve, gross testing valve, purge
valve, roughing valve, sniffer valve and the vent valve.
1-12
Grouped to the right of the Service Mode Indicator are a series of LED indicators. The Service Mode allows the setting of the unit's Amplifier Gain, Anode
Voltage, Calibration Temperature and Internal Calibration Value in conjunction
with the arrow buttons and LED alphanumeric display to the right of the indicators. Additionally, the user may view the unit's calibration temperature, the
emission current of the filament within the unit's spectrometer, the error code
present (indicating a possible fault within the unit), the current supplied to the
filament in the mass spectrometer, the calibration standard (e.g., 2 x 10-8 std
cc/sec @ 24°C) of the internal calibrator, the leak rate of the test object (a
numeric value the same leak rate as displayed by the bar graph on the User
Panel), the pressure measured at the test port and the total number of hours the
unit has been in operation.
Below the indicators and to the right of the valve controls are two sets of
momentary switches. In either Standard or Service Modes, they allow the user
to tum on/off the filament within the mass spectrometer, choose between two
different filaments within the spectrometer, and perform an actual test on the
calibrator or optimize the mass spectrometer. When strictly in Service Mode, the
user is also able to choose between either a helium or air standard for leak rate
measurement or choose whether the Spectron 600 will measure either with Mass
3 or 4 helium.
1-13
1- 6
Disposal of the Spectron 600
Dispose of the Spectron 600 and any components and accessories safely in accordance
with all local and national safety and environmental requirements.
Particular care must be taken with the following:
The waste oil from the rotary vane mechanical pump (Spectron 600T).
Consult with local authorities for rules and regulations for proper disposal
of waste oil.
Any components which have been contaminated with dangerous process
substances.
•
The system computer uses a lithium battery (mounted to the "A" board)
which may be subject to special disposal requirements depending upon the
locality. Consult with local authorities for proper disposal information.
WARNING!
The Spectron 600 should not be incinerated, as the following parts must be
removedfrom the unit prior to incineration. Incineration of these parts may
cause injury to people.
Do not incinerate the EXT Turbomolecular pump. The pump contains
phenolic and tluorosilicone materials which can decompose to very
dangerous substances when heated to high temperatures.
Do not incinerate the EXCIOO Turbomolecular Pump Controller. If the
controller is heated to very high temperatures, dangerous gases may be
emitted and internal components may explode.
Do not incinerate any of the PC Boards in the Spectron 600. If the boards
are heated to very high temperatures, dangerous gases may be emitted and
components mounted on the boards may explode.
Do not incinerate the system power supply. Heating the power supply to
very high temperatures may cause dangerous gases to be emitted and
internal components may explode.
Do not incinerate tluoroelastomer seals, O-rings or valve seats.
1-14
©[XJ&~u~~ [email protected]
Operating The Spectron 600
2.1
Introduction
This chapter contains the information needed by the user to operate the Spectron
600 Leak Detector and perform leak checks on a test object. This chapter is
grouped into three general divisions:
Operator Controls & Indicators
2 Starting & Operating the Leak Detector
3 Testing Aids & Procedures
1
While this chapter contains sufficient information to operate the Spectron 600
leak detector, we suggest that you read Chapter 3, Theory of Operation, prior to
performing any testing. An overall understanding of the various phases of a test
cycle will help the operator use the leak detector more effectively and efficiently.
2-1
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User Controls
Figure 2-1
Spectron 600 User Panel
START
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2.2
Controls & Indicators
The following Controls & Indicators are available from the User Panel at the top
right front of the unit (see Figure 2-1 for an illustration of the User Panel).
2.2.1 User Controls
LEAK RATE
An LED bar graph indicating the mantissa of the measured
leak rate of the test object. For a full leak rate reading, this
meter is used in conjunction with the Numeric Display. The
bar graph display is in standard cubic centimeters per second
(std cc/sec) or in millibar liters per second (mBar lIsec).
NUMERIC DISPLAY
A two digit alphanumeric display with two separate functions, as
follows:
1. During testing, the display will normally indicate the exponent
of the current leak rate. For example, if the leak rate is 3 x 10-7
std cc/sec, the Leak Rate bar graph will indicate 3 and the
numeric display will indicate the number 7.
2. The numeric display provides error codes when a system fault
occurs (see section 4.10 for a list of error codes, their description
and corrective action). During a system fault condition, the numeric
display will indicate code EE, the Service Panel Error Code
indicator will be lit and the alphanumeric display will indicate the
error code.
TEST PORT
A bar graph that displays the pressure at the test port. Scaled
for either milliTorr or millibar. The test port pressure is also
displayed in digital format on the Service Panel alphanumeric
display.
ACCEPT
During leak testing, this indicator will light when the leak
measured is less than the programmed reject rate (maximum
acceptable leak rate) and the unit is also within or below
the range of the reject value. The reject rate is set by the
user from the Service Panel (see Section 2.7).
2-3
REJECT
During leak testing, this indicator will light when the leak
measured is greater than or equal to the programmed reject
rate (maximum acceptable leak rate). The reject rate is
set by the user from the Service Panel (see Section 2.7).
READY
When lit, the unit is in standby mode (all valves except the
foreline valve are closed). Pressing the START pushbutton
commences a test cycle.
AUTO/MANUAL
Prior to and during leak testing, this momentary switch allows
the user to toggle between Automatic and Manual Ranging modes.
RANGING
While leak testing in Manual Ranging mode, each press of .
either the up or down arrow buttons will cause the unit to leak
test in the decade (or range) above or below the current
decade being tested (pressing and holding either arrow button
will cause the unit to sequentially pass through one or more
decades). The numeric display (the exponent of the leak rate)
will indicate the change. Also, when leak testing in the
automatic ranging mode, pressing either arrow button will
force the unit to test in manual ranging mode, at a decade
higher or lower than the decade previously being tested
(corresponding to the arrow key pressed).
AUDIO
During actual testing and while in service mode, the audio
signal of the unit is always turned on. The arrow keys
dedicated to the Audio section of the panel control the
volume. Pressing the down arrow key several times (or
pressing and holding the down arrow key) reduces the volume
to an inaudible level. Note that this function is also available
when using the optional headphones. A connecter for a set of
headphones is located under the bottom rear panel of the unit.
The audio signal may be set, if desired, to trigger only
when the leak rate exceeds the reject point. This is done by
enabling profile switch 5 on the A circuit board. Contact Edwards
Service, or refer to Appendix E for more information.
NOTE:
2-4
ZERO
In Standard Mode, The ZERO momentary switch is active
only during actual leak testing. When pressed, this unit's
computer reduces the measured leak rate displayed by the unit
to zero within the decade being measured (e.g., a 4 x 10-6 std
cc/sec leak rate would now be displayed as a 0 x 10-6 std
cc/sec leak rate). This function is usually used when
background helium causes measurement problems during
testing. Note that this function also limits the maximum
sensitivity of testing to two decades (or ranges) below the
zeroed decade.
When the unit is in Service Mode, pressing the ZERO
momentary switch will toggle the turbomolecular pump on or
off. When the ZERO LED indicator is lit, the turbomolecular
pump is on.
SNIFF MODE INDICATOR
When lit, the unit has been placed in the Sniff Mode. When
in Standard Mode, the unit is placed in the Sniff Mode by
pressing the SNIFF valve momentary switch located on the
left of the Service Panel. When the unit has been placed in
Service Mode, pressing the SNIFF valve momentary switch
opens the Sniffer Valve.
WARNINGI
Never operate the Spectron 600 in Sniff Mode without the optional
Sniffer Assembly or without the standard plug in place on the
Sniffer Quick Connect Fitting (QCF). Running the unit without
covering the Sniffer QCF will cause a dramatic increase in foreline
pressure within the unit, and will thereby cause the unit's turbomolecular pump to rapidly shut down.
START
Pressing this pushbutton begins a test cycle. During testing,
pressing the START pushbutton again will halt all testing by
closing all vacuum system valves (except the foreline valve).
This also places the unit into its standby (wait) mode. Pressing
the START pushbutton instead of the VENT pushbutton eliminates
the chance of the user inadvertently venting the system (refer to
the VENT function, below).The START pushbutton lights when a
test cycle has been initiated.
2-5
VENT
Dual function pushbutton. When pressed momentarily, the
Spectron 600 is interrupted from its current testing cycle and
placed in standby (wait) mode. The green READY indicator
will light. When pressed and held for a preprogrammed time
(as programmed by the user; factory default is 1.0 second) the
pushbutton initiates an AUTO-VENT cycle and returns the
test port to atmospheric pressure. The delay may be
programmed for up to 999.9 seconds.
ON/OFF
Applies or disengages AC power to the unit. Toggling this
switch is all that is needed to tum the unit ON or OFF.
2.2.2 Service Mode Controls
The following Controls & Indicators are accessible from the Service
Panel (the left half of the panel, as shown in figure 2-1).
SERVICE MODE INDICATOR
When lit, the Spectron 600 has been placed in Service Mode. The
unit is placed in Service Mode by pressing the Service Mode
Interlock toggle located on the upper right side of the circuit
board, mounted on the inside of the unit's rear door.
AMP GAIN
Amplifier Gain. When this function is selected, the
alphanumeric display indicates the setting of the leak rate
amplifier (1.0 to 1O.0).
Three different gains are used on the unit. The first, Gl,
is used for the unit's gross flow mode; the second, G2, is
used for the unit's reverse flow mode and the third, G3, is
used for the unit's direct flow mode.
G 1 may be selected using the SELECT momentary switches
when the AMP GAIN function has been selected. Gain
(calibration) of the Spectron 600 is changed by the SET
momentary switches. Normally G2 and G3 are set
automatically by the Spectron 600 during a Tune and Calibration
cycle. The G2 and G3 settings may only be altered only in
Service Mode. The actual setting may be viewed in eith~r
2-6
Service or Standard Modes. Note that G 1 is not controlled by
the Spectron 600 and must be set by the user. G 1 may be set by the
user when the Spectron 600 is leak testing in the Gross Mode, or
when the unit is in the service mode.
ANODE VOLT
Anode Voltage. When this function is selected, the
alphanumeric display indicates the anode voltage of the unit.
In Service Mode, the anode voltage may be altered
incrementally by pressing either of the SET momentary
switches. Note that the other peak voltages associated with
the mass spectrometer follow the anode voltage setting;
therefore the Spectron 600 can be manually tuned by changing the
peak voltage.
CAUTION
Only qualified personnel should attempt to alter the anode voltage
setting while the unit is in Service Mode. As stated above, altering
the peak tuning voltages will retune the mass spectrometer.
Improper tuning will greatly effect the accuracy and reliability of the
leak detector.
While the unit is in Standard Mode, pressing either the left or
right SET momentary switches adjusts the unit's peak tuning
voltages either -30 or +30V. This function is referred to as
peak scan and is used to quickly verify if the mass spectrometer is
properly tuned (refer to Section 2.9 for further information on
the Peak Scan function). Releasing either momentary switch
returns the anode voltage of the unit to its prior value.
CAL TEMP
Calibrator Temperature. When selected in Standard Mode, the
alphanumeric display will indicate the current temperature of
the calibrator. When selected in Service Mode, the
alphanumeric display will indicate the temperature at which
the internal helium reference standard was originally
calibrated. This parameter may be altered in Service Mode
(using the SET pushbuttons), however, this setting should
not be altered unless a new calibrator is installed in the unit.
2-7
CROSSOVER 1 (Reverse Crossover)
The alphanumeric display indicates the programmed test port
pressure needed to crossover from the unit's gross testing
mode to reverse testing mode (when using the optional
external pump). If an external pump is not connected to the
unit, the crossover setpoint is the pressure needed to crossover
from the unit's roughing mode to the reverse testing mode.
This parameter may be altered while the unit is in either
Standard or Service Mode, by using the SET momentary
switches (Max. Crossover 1 = 2000 mTorr; factory default =
500mTorr).
CROSSOVER 2 (Direct Crossover)
The alphanumeric display indicates the programmed test port
pressure needed to crossover from the unit's reverse testing
mode to its fine (direct) testing mode. This parameter may be
altered while the unit is in either Standard or Service Mode,
by using the SET momentary switches (Max. Crossover 2 = 75
mTorr,600D; 150 mTorr, 600T. Factory default = 25 mTorr).
DELAY
Seven delays are available and may be set while the unit is in
Standard mode:
Dl/Fine (Direct) Crossover Delay: The time delay after
Crossover 2 has been reached and the onset of Fine
(Direct) Testing. The Spectron 600 stays in Reverse Flow
Testing during this time. The factory default is 1.0
second; the parameter may be set between 0.1 to 999.9
seconds. Note that if the Spectron 600 is set for Manual
ranging in the 10- 10 range, the unit will remain in the
roughing state for the time set in D I after Crossover 2
has been reached.
D2/Direct Rough Valve Close Delay: When Crossover 2
has been reached, the Rough valve will remain open for
this value and then close. The factory default is 0.1
second; the parameter may be set between 0.1 to 999.9
seconds. If D2 is set to 999.9 seconds, the Rough valve
will remain open for the entire length of the test cycle.
2-8
D3/Vent Delay: The amount of time needed to hold the
VENT pushbutton before the venting cycle begins. The
factory default is 1.0 seconds; the parameter may be set
between 0.1 to 999.9 seconds.
D4/Vent Duration: The amount of time the vent valve
will stay open after the unit's pirani gauge indicates
atmosphere has been reached. The factory default is 1.0
second; the parameter may be set between 0.1 to 999.9
seconds. If D4 is set to 999.9 seconds, the Vent valve
will remain open until next test cycle is started.
D5/Minimum Gross Testing Time: Sets the minimum
amount of time that the Spectron 600 will remain in the
Gross test mode. Prevents unit from auto ranging
and crossing over into Reverse flow mode before a gross
leak is detected. Useful when testing large parts that may
have long helium response time.May be set from 1.0
to 999.9 seconds; the factory default is 1.0 second.
D6/Minimum Rough Time: Specifies minimum amount of
time that Spectron 600 will remain in Roughing state before
crossing over into a testing state. Useful for testing parts with
high gas load which require extended pumping. May be set
from 1.0 to 999.9 seconds; the factory default is 1.0 second.
D7/Reverse Rough Close Delay: Keeps external
Rough valve open for specified amount of time after
reverse flow valve has opened. Only active on units
equipped with external Rough valve option. May be set
from 0.1 to 999.9 seconds; the factory default is 0.1
second. If set to 999.9 seconds, external Rough valve will
remain open for entire duration of reverse flow testing.
NOTE: In Service mode, the delay function displays:
Dl: the current software version stored in flash memory (e.g.,
FLASH 4.3).
D2: the current software version stored in ROM (e.g.,
EPROM 1.5).
2-9
D3: Seven Range electrical offsets; the value is expressed as a
fraction of a volt (e.g., O.OOxx).
D4: Ten Range electrical offsets; the value is expressed as a
fraction of a volt (e.g., O.OOxx).
D5: Shows DS value.
D6: Shows D6 value.
D7: Shows D7 value.
EMISSION
Emission Current. Indicates the filament emission current.
The alphanumeric display will indicate the current in mAo A
normally operating filament will have an emission current of
SmA, as regulated by the filament control circuit.
ERROR CODE
This function automatically appears after an error has occurred
with the unit. When an error occurs, the unit automatically switches
to this function, the LED corresponding to the function is lit, and the
alphanumeric display indicates the error code. The unit will
display the code until the problem is resolved. This function
is also selectable when using the SELECT momentary
switches on the Service Panel. If in Standard Mode, and this
function is selected when a system error has not occurred, the
word NONE will appear on the alphanumeric display. In
Service Mode, selecting this function will display the current date.
FIL CURRENT
Filament Current. The alphanumeric display indicates the
filament supply current, in D.C. Amps. The maximum current
is 6 amps.
FORELINE
Foreline Pressure. The alphanumeric display indicates foreline
pressure. May be displayed in milliTorr or millibar. The
selection of units to be displayed is made by a blue toggle
switch located underneath the Service Panel. The switch is
accessed by opening the front panel and is mounted on the
circuit board located and attached directly under the Se~ice Panel.
2-10
HIGH VACUUM
The alphanumeric display indicates pressure in the highvacuum section (the area surrounding the filament within the
spectrometer housing). If the unit's filament has been turned
off, the display will state OFF, otherwise the display
indicates the high vacuum pressure in either Torr or bar. The
selection of units to be displayed is made by a blue toggle
switch located underneath the Service Panel. The switch is
accessed by opening the front panel and is mounted on the
circuit board located and attached directly under the Service
Panel. If the unit is in Standby mode, the alphanumeric
display will occasionally display SPECTRON. When this
occurs, the unit is checking system offsets and not measuring
hi-vac pressure.
INT CALIBRATOR
Internal Calibrator. In Standard Mode, this function displays the
current temperature-compensated value of the internal calibrator.
This parameter may not be changed, since this value is derived from
the leak: rate value of the internal calibrator. In Service Mode, the
alphanumeric display indicates the leak: rate value stored in the unit's
computer for the internal calibrator. This parameter may be altered
only in Service Mode, by using the SET momentary switches. This
parameter should only be changed when the internal calibrator has
been replaced.
LEAK RATE
The alphanumeric display indicates the actual current leak:
rate. Measurement is in either std cc/sec or millibar liter/sec.
REJECT POINT
The alphanumeric display indicates the programmed leak: rate
value for the Reject/Accept indicator (the setpoint that
indicates if the test object is below the maximum acceptable
leak: rate). This parameter may be altered only in Standard
Mode, by using the SET pushbuttons. In Service Mode, this
function is used to indicate the speed of the turbomolecular
pump (the alphanumeric display indicates the percentage of
the pump's rated speed).
2-11
TEST PORT
Test Port Pressure. The alphanumeric display indicates the
pressure of the test port. May be displayed in milliTorr or
millibar. The selection of units to be displayed is made by a
blue toggle switch located underneath the Service Panel. The
switch is accessed by opening the front panel and is mounted
on the circuit board located and attached directly under the
Service Panel.
TOTAL HRS
Total Hours. In Standard Mode, the alphanumeric display
indicates the total number of hours the unit has been in
operation. In Service Mode, the display indicates the time of
day. The time (a 24 hour clock) can be altered by using the
SET arrow keys (to select hrs., min. sec.) and the AUDIO
arrow keys to set the new time for the unit.
SELECT
Up/Down Arrow Keys. Momentary switches that allow the
user to scroll through the sixteen functions located on the
Service Panel. The LED next to each function indicates that
the function has been selected. The function's current
readout, measurement, etc. is displayed on the alphanumeric
display.
ALPHANUMERIC DISPLAY
Eight character display. Used to indicate messages as well as
the status of the sixteen selectable functions on the Service
Panel (from AMP GAIN to TOTAL HRS). An LED next to
the function indicates that the function has been selected,
while this display indicates its current status or measurement.
The display also indicates Error Message Codes (see Table 4-1
for a list of Error Codes).
SET
Up/Down Arrow Keys. Momentary switches that allow the
user to increase or decrease the value of the setable
functions (AMP GAIN, ANODE VOLTAGE, CAL TEMP,
CROSSOVER 1, CROSSOVER 2, DELAY, INT
CALIBRATOR and REJECT POINT).
2-12
FIL ON/OFF
Filament ON/OFF. Momentary switch. When the unit is in
Service Mode, pressing this switch will toggle the active
filament on or off.
When the unit is in Standard Mode, this switch also toggles
the active filament on or off. However, whenever the unit is
in Standard Mode, the filament may be turned on only when
the high-vacuum section has been sufficiently evacuated (as
detennined by the Spectron 600's computer). The filament may
never be turned off while the Spectron 600 is in a testing mode.
CAUTION
As described above, in Service Mode, the spectrometer's filament
may be turned on or off at any time. In this mode, care should be
taken to make sure that the high-vacuum section has been pumped
down. If the filament is turned on when the high-vacuum section
is at or near atmosphere, the filament will quickly burn out.
FIL 1/2
Filament 1 or 2. Momentary Switch. By pressing this switch,
the user is allowed to toggle between Filament 1 and 2. A
green indicator next to the 1 or 2 on this switch indicates
that the respective filament is working properly. If a red LED
appears next to the 1 or 2 on the switch, the filament is
malfunctioning.
HELIUM/AIR
Momentary Switch. Not active in Standard Mode. By
pressing this switch in Service Mode, the user is allowed to
toggle between air equivalent and helium leak rate readings.
The LED next to the HELIUM or AIR labels indicates which
standard is active.
MASS 314
Momentary Switch. Not active in Standard Mode. By pressing this
switch in Service Mode, the user is allowed to toggle between Mass
3 or Mass 4 helium tuning voltages. The LED next to the 3 or 4
indicates for which the Spectron 600 is tuned.
2-13
CAL CHECK
Calibration Check. Momentary Switch. Active only in
Standard Mode. Pressing this switch allows the user to
initiate the unit's calibration check sequence in conjunction
with the Spectron 600 internal calibrator. See Section 2.9 for a full
description of the Calibration Check function.
CAL
Calibrate. Momentary Switch. Active only at the end of a
Calibration Check sequence. Pressing this switch allows the
user to initiate the unit's Auto Calibrating function (when
using Mass 4 helium). Note that this function uses the unit's
internal calibrator. The LED on the switch is lit while this
sequence is in progress. See Section 2.9 for a full description
of the Calibration function.
TUNE
Momentary Switch. Active only in Standard Mode. Pressing
this switch allows the user to initiate the unit's Auto Tune
sequence in conjunction with the unit's internal calibrator.
The Spectron 600 computer subsequently adjusts the detector s
voltages for maximum sensitivity. The LED on the switch is
lit while this sequence is in progress. See Section 2.9 for a
full description of the Tune function
2.2.3
Rear Panel Connections
The connectors that are listed below allow the Spectron 600 to interface with
various external equipment. An illustration of these rear panel connectors is
presented in Figure 2-2. All of the connectors are located on the rear of the unit,
below the rear panel (from left to right):
SNIFF CONNECTOR
This port (a quick-connect fitting is attached to the port) is
used to connect to Edwards external sniffer probe. When the
sniff probe is not connected to the unit, a plug (provided)
should be covering the connector whenever the unit is
operating.
2-14
HANDHELD
SNIFF
~
....
01
(9)
N2
EXH
@
@
AUDIO
CHART
[email protected]@
dc;c;ooob I"'~~ I
EXTERNAL
ROUGH
MO.
'"'"~"
00
115VAC, 60Hz,
230VAC, 50Hz,
100VAC, 50Hz,
100VAC, 60Hz,
Figure 2-2
Spectron 600 Rear Panel Connections
8 Amp
4 Amp
8 Amp
8 Amp
N2
A standard 1/4" bulkhead connector. Allows the user to
connect N2 to the purge fitting on the mechanical pump or to
the vacuum system vent port. Must be internally connected by
the user. Refer to the N2 kit instructions included in the installation
kit for N2 connection information
EXHAUST LINE CONNECTOR
A standard 3/8" bulkhead connector. Allows the normal
exhaust that the Spectron 600 produces during testing to be
channeled directly to a user-provided exhaust system.
Standard 3/8" tubing is used between the detector and the
exhaust system. Must be internally connected by the user.
HEADPHONE JACK
A standard mini audio connector. Allows the user to listen to audio
tones. The audio tones indicates leak status - the higher the
tone, the larger the leak. Most useful in noisy environments
when the audio volume of the unit is not loud enough for an
operator to clearly hear.
CHART
Double mini banana jack. Allows the use of a chart
recorder, or similar device, to monitor leak testing as it
progresses. Provides a 0-5V DC output corresponding to the
leak rate mantissa of 0 to 10 (i.e., 2V represents 4.0 x lOx).
EXTERNAL ROUGH VALVE CONNECTOR
A standard 5-pin Molex connector. This port allows the
connection of the external roughing option to the Spectron 600.
With the external roughing option, the unit's gross testing
mode (10 x 10° to 1 X 10-3 std cc/sec) is automatically
available. The connector has a sensing line that is engaged
and then monitored by the Spectron 600 computer whenever the
external rough valve is attached to the connector.
HANDHELD REMOTE PORT
Allows the handheld remote control to operate the Spectron 600.
Most of the features of the User Panel are duplicated on the
remote control. Specifically, the remote control has an LED
bar graph and numeric display indicating the measured leak
rate of the test object, switches to select between Auto/Manual
ranging, up/down arrow keys for use during manual ranging, a
2-16
START button as well as a VENT button. The port itself is a
four wire RJ-ll telephone-type connector. The remote is illustrated
in figure 2-3.
RS-232C PC REMOTE PORT
Allows a remote computer to operate the Spectron 600 in Standard
Mode and to record the leak rate/testing results of every leak
rate measurement cycle. The port itself is a standard RS-232C
connector (DB9).
PRINTER PORT
Allows a standard pin PC-compatible printer cable (DB2S) to
be connected to the unit. The printer is used to document the
leak rate/testing results of every leak rate measurement cycle.
The data sent to the printer is encoded with the time and date of
the measurement as well as the tested leak rate, AcceptlReject
indication and Reject setpoint. The data is printed in a
columnar format so that it may be easily compared. Information is
sent to the printer whenever the user terminates the test cycle by
either pressing the VENT pushbutton or by pressing the START
pushbutton a second time ..
POWER INPUT MODULE
Allows AC power to be connected to the Spectron 600. A standard
plug/cord is used.
Two fuses are installed in a removable holder located to the right of
the AC power input (see fig. 2-2). Release the holder by gently
pushing in the tab on its left side. Refer to page 1-10 to determine
your unit's power requirements and appropriate fuse rating.
2-17
LEAK RATE
X1o-D
9
8
EJw
8
aITJ
7
6
RANGING
5
4
TESTING
READY
•
•
3
[ ST:RT
1[
VE:T
1
2
1
or std
cc/sec
mbar I/sec
I I I ' EDWARDS
Figure 2-3
Spectron 600 Hand Held Remote Control Unit
2-18
2.3
Starting the Spectron 600 Leak Detector
The Spectron 600 is started from the User Panel simply by pressing the ON/OFF
(I/O) switch. During the 5-minute Start-Up mode, the following will occur
within the unit:
1
The unit will activate a self-diagnostic routine.
2
The foreline area will be pumped down.
3
The turbomolecular pump will spin up to its rated speed;
4
If the filament was on when the unit was last turned off, the
filament will be on again at the end of the start-up mode. If the
filament was off when the unit was turned off, the user will
have to press the FIL ON momentary switch to tum on the filament.
NOTE:
During the start up procedure, all LED s on the User Panel will be tested
by being sequentially lit. After the LED s are tested, the Leak Rate bar graph
display will show the turbo speed increasing to full speed, and then will provide
a countdown to completion of start up.
When the Start-up mode has been completed, the Automatic Ranging indicator
will be lit, the test port measurement gauge will be activated, and the READY
light indicator will be lit.
Pre-Testing Start-Up Procedure:
Ensure that all connections are secure and all utilities are available. Check that:
•
A.C. power is connected.
•
A helium supply source is ready and available (when
applicable).
•
There is a sufficient supply of oil in both the internal and
external rough pumps (600T only).
•
All external accessories are properly connected.
2-19
2.4
Leak Testing
NOTE
Refer to the 600D addendum for leak test sequence information specific
to the 600D
Leak testing is most often performed on the Spectron 600 by connecting a test
object to the leak detector test port. The unit's leak detector test port is located
on the top right of the Spectron 600's housing.
Vacuum Testing:
Through the use of the detector's internal rough pump (and external rough pump,
if so equipped) the test object is evacuated. Once accomplished, the area of the
test object suspected to have a leak is sprayed with helium gas. As the helium
. (and other gases) pass through a hole in the test object and are collected by the
unit:
1
The gases entering the unit are ionized (positively charged)
2
Helium molecules are sepa'rated from all other gas molecules
3
Helium ions will then strike the collector plate causing an
electron flow equivalent to a minute current, which is measured
and amplified so that the measurement of the leak is displayed
on the User/Service Panel.
An alternate commonly used method is to test an object pre-filled with helium
gas. The test object is placed in a test chamber which is evacuated and tested (as
above). The Spectron 600 subsequently displays the measurement of the leak on
the User/Service Panel.
The procedure for leak testing an object in the Spectron 600 (without an external
pump connected) is as follows:
1
Connect the test object to the test port located at the top of the
Spectron 600.
2
Press the green START pushbutton.
3
The rough valve immediately opens. Gases are evacuated from
the test object (the object is pumped down).
2-20
.
4
When the test port pressure reaches Crossover 1 (1,000 mTorr
maximum), the reverse/foreline valve opens. The green start
switch illuminates.
5
If vacuum testing procedure is underway, spraying of the test
a
object with helium should now commence.
6
Leak testing begins in the 10-4 std cc/sec range.
7
The unit will continue to search for a leak, ranging downward
until it reaches the 10-9 std cc/sec range.
8
If a leak is still not found, the unit will automatically begin fine
(direct) testing. The rough valve will close, the fine valve will
open and the leak detector will range downward to the 10- 10 std
cc/sec range. If the test port pressure is above Crossover 2
(75 mTorr max, 600T; 150 mTorr max, 600D), the unit will return
to a roughing state, then will again test when Crossover 2 has
been reached.
9
If a leak is not found, the unit will continue to test at this level
until the VENT pushbutton is pressed. If a leak is found, the
UIut will range upward to the proper range. The unit stays in
direct mode when ranging upward until it reaches the 10-4 range,
where it crosses back into reverse mode testing.
10 When leak testing has been completed, pressing and holding the
VENT pushbutton (the default is for 0.5 second or may be
programmed by the user - the D3 time interval) closes all
vacuum system valves except for the foreline valve, opens the
vent valve and vents the test port and test object.
2-21
2.5
Operation With an External Pump
NOTE
Refer to the 600D addendum for leak test operational information specific
the 600D
1
Connect the test object to the test port.
2
Press the green START pushbutton.
3
The external rough valve immediately opens. Gases are evacuated
from the test object (the object is pumped down).
4
As soon as roughing has commenced, the gross valve opens.
The green start switch illuminates.
5
Leak testing begins in the 10-4 std cc/sec range.
6
If a vacuum testing procedure is underway, spraying of the test
object with helium should now commence.
7
If a gross leak is detected the unit will range up to the appropriate
decade, while the test object continues to be pumped down.
8
If no leak is found and the test port pressure has reached
Crossover 1, the unit will begin intermediate (reverse mode)
testing. The external rough valve and gross valve will close, the
internal rough valve will open and the leak detector will range
downward from the 10-4 std cc/sec range to the 10-9 std cc/sec range.
9
If again a leak is not found and the test port pressure has reached
programmed Crossover 2 pressure, the internal rough valve closes,
the fine valve opens and the unit ranges to the 10-10 std cc/sec range.
10 The unit will continue to test at this level unless a leak is found
or until the VENT pushbutton is pressed.
11 When leak testing has been completed, pressing and holding the
VENT pushbutton (the default is for 1.0 second or may be
programmed by the user - the D3 time interval) closes all
vacuum system valves except for the foreline valve, opens the
vent valve and vents the test port and test object.
2-22
2.6
Sniff Testing
Sniff Testing is performed by checking for escaping helium in a test object
already filled with helium gas. Sniff testing is unique in that:
1
Leak detection is performed through a small orifice (a sniffer
probe) that is attached to tubing that is then connected to the
leak detector, and
2
The test object itself is not evacuated during testing.
By passing the sniffer probe over a suspected leak, outflowing helium from the
test object is drawn into and measured by the system. This type of testing is most
useful when testing large objects (e.g., large tanks) or when testing items that
cannot withstand internal vacuum. Note that this type of testing is the least
sensitive the Spectron 600 performs, a sniffer probe ultimately draws in some
surrounding air which acts to dilute the helium leak tracer. Also note that
sniffing is primarily a qualitative form of testing rather than a quantitative test; it
is best used for locating leaks rather than measuring them.
The procedure for Sniff Testing is as follows:
1
Remove the plug that covers the sniffer port. Install the sniffer
assembly.
2
On the Service Panel press the SNIFF momentary switch. The
Sniffer indicator light is now lit.
3
The Automatic ranging mode indicator is also lit. If the manual
ranging mode is needed, press the AutomaticlManual Ranging
button and set the expected leak rate range with the arrow keys.
In either case, the unit will be able to test leaks within the 10-3 to
10-8 std cc/sec range.
4
Press the START pushbutton. The filament will be momentarily
extinguished while the sniffer is evacuated and the Spectron 600
crosses over into sniffing mode.
5
When the green Start light is illuminated, the unit is ready for
testing. Using the probe, examine the test object for leaks.
2-23
2.7
High Sensitivity Power Sniff Testing
High Sensitivity Sniff Testing is similar to the sniff testing procedure (above)
except:
I
The sniff probe and assembly is connected through the test port
instead of·a dedicated "sniff' port.
2
Provides for greater sensitivity during testing.
3
Uses the Reverse flow mode rather that the Sniffing mode.
The procedure for High Sensitivity Sniff Testing is as follows:
1
Remove the NW25 blank that covers the test port. Install the
sniffer assembly with the NW25 adaptor.
2
Make sure that the Spectron 600 is in the Standard mode, not the
Sniff mode.
3
Select either Automatic or Manual ranging. If Manual ranging
is chosen, set the Spectron 600 for the 10-9 range or higher; do not set
it for the 10-10 range. In either case, the unit will be able to test
leaks within the 10-4 to 10-9 std cc/sec range.
4
Press the START pushbutton. If the unit is set for Automatic
ranging, it will range down to the level of the ambient helium.
This background may be "zeroed out" for high sensitivity
sniffing by pressing the "ZERO" pushbutton).
5
The unit is now ready for testing. Using the probe, examine the
test object for leaks.
NOTE:
The Spectron 600 will remain in the Reverse flow mode when sniffing
through the test port. The pressure in the sniffer probe will prevent the
unit from crossing over into the Direct flow mode.
2-24
2.8
Shut Down Procedure
The Spectron 600 may be shut down at any time by pressing the on/off (1/0)
switch to the off (0) position. The unit automatically ensures that the vacuum
system and system electronics are properly powered down. Turn off all peripheral equipment (i.e., external rough pump, printer, etc.).
2.9
Setting Test !'arameters
This section dt(scribes the testing parameters that may be modified by the user
before and during actual leak testing, the function of the parameters and exactly
how they may be adjusted. For most of the following test parameters, the factory
default settings will be more than sufficient. However, specific tests may eventually require changes in these settings in order to optimally match any unique
requirements of the test object.
The adjustable test parameters consist of various methods for the selection and
timing of the opening and closing of the Spectron 6oo's vacuum system valves
(as controlled by the system computer). The purpose of these timing adjustments and their settings are explained below. Please also refer to Chapter 3,
Theory of Operation for further information.
Setting Crossover 1
The Spectron 600 has two specific and important setpoints while leak testing.
During testing, as the unit ranges downward, different testing modes are
required. Crossover 1 is defined as the setpoint (the point during pump down)
where the unit switches from its "Gross Mode Testing" to "Reverse Mode
Testing". All Gross Mode testing is performed in conjunction with the optional
external pump. When using an external pump, the unit determines that the leak is
smaller than a "gross" leak, the external roughing valve is closed and the unit's
testing mode "crosses over" into intermediate or reverse flow testing. When the
unit is used without an external pump, "crossover" is the point when roughing of
the test object ends and reverse mode testing begins.
To reset the Crossover 1 parameter:
1
Press either SELECT arrow key until the green indicator next
to the Crossover 1 is lit.
2
The Service Panel alphanumeric display will display a number
up to 2,000 indicating the crossover setpoint in milliTorr
(mTorr) or millibar. One mTorr is equal to 1 x 10-3 Torr. One
millibar (mbar) is equal to 1 x 10-3 bar. The default value is
500 mTorr.
2-25
3
To alter the Crossover 1 setpoint, press either of the "SET"
arrow keys. The alphanumeric display will change either down
or up in correspondence with the number of keypresses of the
left or right arrow keys. If a user tries to alter a setting outside
of its allowed range, the piezoelectric beeper within the unit will
emit a short sound. Once the Crossover 1 entry has been
altered, it will remain at the new setting until it is altered once
again. If testing is interrupted by an ERROR 01 or ERROR OS,
Crossover 1 has been set too high for this application and should
be lowered.
Setting Crossover 2
The second "crossover", Crossover 2 is defined as the setpoint (the point during
pump down) where the unit switches from its "Intermediate (Reverse) Mode
Testing" to "Fine (Direct) Mode Testing." When the unit determines that the leak
is smaller than an "intermediate" leak, the fine valve opens, the internal rough
valve closes and the unit "crosses over" into fine (or direct) flow testing.
To reset the Crossover 2 parameter:
1
Press either "SELECT" momentary switch until the green
indicator next to the Crossover 2 is lit.
2
The Service Mode alphanumeric display will display a number
(between 1 and 75 for the 600T, 1 and 150 for the 600D)
indicating the crossover setpoint in milliTorr
(mTorr) or millibar. One mTorr is equal to 1 x 10-3 Torr. One
millibar (mbar) is equal to 1 x 10-3 bar. The default crossover
value is 25 mTorr.
3
To alter the Crossover 2 setpoint, press either of the "SET"
momentary switches. The alphanumeric display will change
either down or up in correspondence with the number of
keypresses of the left or right arrow keys. If a user tries to alter
a setting outside of its allowed range, the piezoelectric beeper
within the unit will emit a short sound. Once the Crossover 2
entry has been altered, it will remain at the new setting until it is
altered once again. If testing is interrupted by an ERROR 02,
Crossover 2 has been set too high for this application and should
be lowered. It may also help to increase the "Dl" parameter,
"Fine Crossover Delay."
2-26
Setting the Accept/Reject Point
The Accept/Reject setpoint is the designated leak rate value that indicates
whether or not the leak rate of the test object meets or fails a predefined
maximum leak rate standard. For example, if the accept/reject setpoint has been
set to 5 x 10-5 std cc/sec, any test object that has a leak rate of less than 5 x 10-5
std cc/sec would fall below the setpoint (into the accept area). Conversely, any
test object that has a leak rate of 5 x 10-5 std cc/sec or greater falls into the predefined reject leak rate area.
To set the Accept/Reject setpoint:
1
On the Service Panel Press either "Select" momentary switch
until the green indicator next to the Reject Point is lit.
2
The Service Mode alphanumeric display will display the current
Accept/Reject setpoint.
3
To alter the Accept/Reject setpoint, press either of the "SET"
momentary switches. The c1lphanumeric display will change
either down or up in correspondence with the number of
keypresses of the left or right switches. If a user tries to alter a
setting outside of its available range, the piezoelectric beeper
within the unit will emit a short sound. Once the Accept/Reject
entry has been altered, it will remain at the new setting until it is
altered once again.
Delay Settings (Valve Timing Settings)
The Spectron 600 provides the user with the capability to set time intervals
between the opening and closing of certain vacuum system valves. This allows
the user to customize testing cycles to the unique requirements of any test object.
In order to properly optimize testing procedures, we recommend that the
Spectron 600 operator review the third chapter of this manual, Theory of
Operation, prior to altering the default valve timing settings.
The Valve Timing Schematic (illustrated in Figure 2-4) displays the relationship
between the opening and closing of the internal vacuum system valves. Also
displayed in the schematic are the user-adjustable time delays of the rough, fine
and vent valves and how they impact the test cycle.
2-27
01
06
04
03
02
.Spectron 600
Standard
Press Start
1 L
06
05
TestPort
pressure at
Crossover 1
l
TestPort
pressure at
Crossover 2
01
07
l
Press
Vent
L
04
03
02
Test Port at
atmosphere
Spectron 600
with External
Rough Pump
Option
Press Start
1
l
TestPort
pressure at
Crossover 1
l
TestPort
pressure at
Crossover 2
l
01: Fine Crossover Delay
03: Vent Open Delay
05: Minimum Gross Time
02: Direct Rough Close Delay
04: Vent Duration
06: Minimum Rough Time
Press
Vent
Figure 2-4
Spectron 600 Valve Timing Diagrams
2-28
L
Test Port at
atmosphere
07: Reverse Rough Close Delay
The ways in which delay settings may be used to benefit certain testing conditions are described below:
Dl/Fine Crossover Delay: Occurs after Crossover 2 has been reached and
refers to the delay (in seconds) between the attainment of Crossover 2 and the
onset of Direct (Fine) testing (the opening of the fine valve). With Dl at the
factory default setting (1.0), the Fine valve will open 1.0 seconds after the
Crossover 2 setpoint has been reached, the Spectron 600 remains in Reverse flow
testing for the duration of D 1.
Note that if the Spectron 600 is set for Manual ranging on the lO-lOrange, the unit
will remain in the roughing state after reaching Crossover 2 for the duration of D 1.
The ability to delay the actual crossover is useful for testing objects greater than
one liter or when the test object has a high outgassing rate. The additional
roughing of the test object prior to opening the Fine valve reduces the possibility
of a crossover (pressure) burst and limits the chance of burning out the mass
spectrometer filament. Dl may be set from 0.1 to 999.9 seconds.
D2JDirect Rough Valve Close Delay: Occurs when Crossover 2 has been
reached; represents the amount of time (in seconds) that the Rough valve
remains open after the Fine valve opens (the Rough valve needs to be closed so
that Fine Testing may occur). With D2 at the factory default setting, the Rough
valve closes 0.1 second after the Fine (Direct) valve opens (i.e., after Crossover
2 setpoint has been reached). D2 may be set from 0.1 to 999.9 seconds.
If the test object has a large volume, or the test material produces a larger than
normal amount of outgassing, it will probably be helpful to increase this delay
limit in order to limit the pressure burst that occurs during crossover.
D3/Vent Delay: The Vent Delay is the period of time (in seconds) that the
Spectron 600 operator must hold down the "VENT" pushbutton before venting
of the test object will proceed. The delay is useful to prevent accidental venting
of the system. The factory default for D3 is 1.0 seconds. This duration is usually
sufficient to prevent accidental activation of the vent cycle. The vent delay may
be programmed from 0.1 to 999.9 seconds.
D4/Vent Duration: Vent Duration refers to the amount of time (in seconds)
that the Vent valve will remain open after the test port pirani gauge indicates that
atmosphere has been reached. D4 is adjustable between 0.1 to 999.9 seconds (the
factory default setting is 1.0 seconds) allowing the operator to optimize the
venting of a particular test object.
2-29
D5/Minimum Gross Testing Time: Sets the minimum amount of time that the
Spectron 600 will remain in the Gross test mode. Operator adjusts D5 to prevent
unit from auto ranging and crossing over into Reverse flow mode before a gross
leak is detected. Useful when testing large parts that may have long helium
response time. D5 can be set from 0.1 to 999.9 seconds (the factory default
setting is 1.0 seconds).
D6/Minimum Rough Time: Specifies minimum amount of time that Spectron
600 will remain in Roughing state before crossing over into a testing state.
Useful for testing parts with high gas load which require extended pumping. D6
can be set from 1.0 to 999.9 seconds (the factory default setting is 1.0 seconds).
D7/Reverse Rough Close Delay: Keeps external rough valve open for
specified amount of time after reverse flow valve has opened. D7 can be set from
0.1 to 999.9 seconds (if set to 999.9 seconds, external rough valve will remain
open for entire duration of Reverse Flow testing). The factory default setting for
D7 is 1.0 seconds. D7 is active only on units equipped with the external rough
option.
Changing Delay Settings (DI-D7)
All delay settings may be altered by the operator via the Spectron 600 User
Panel using the same basic procedure, as follows:
1
On the User Panel, press either SELECT momentary switch
until the green indicator next to the word Delay lights (see User
Panel diagram, figure 2-2).
2
The alphanumeric display will show the first delay parameter,
Dl and the currently selected delay interval for Dl (for
example, a display of Dl 0.5 S indicates that the Fine Crossover
Delay is set to 0.5 seconds).
3
The delay interval can now be increased or decreased by
pressing the SET keys until the desired setting appears.
4
To display D2 through D7, continue pressing the same SELECT
momentary switch; the indicator light will not move to the next
function (in this case, EMISSION) until all seven delay
parameters have been cycled. When the desired delay parameter
appears in the alphanumeric display, it can he adjusted as in Step 3.
2-30
2.10
Setting Additional Parameters
Amplifier Gain
When this function is selected, the alphanumeric display indicates the gain
setting of the leak rate amplifier (from 0.1 to 10.0). The amplifier gain is the
multiplier used by the computer to compensate for changes in sensitivity of the
mass spectrometer. The user will only use this function when calibrating using a
known external leak source or when unable to otherwise properly calibrate the
unit.
Three separate gains are available:
G 1 refers to the gain while the unit is in gross flow mode
G2 refers to the gain while the unit is in reverse flow mode
G3 refers to the gain while the unit is in direct flow mode.
To alter the Amplifier Gain settings:
1
While in Service Mode, press either SELECT key on the User
Panel until the indicator light beside AMP GAIN is illuminated.
Continuing to press the same SELECT key will display each
gain parameter (G 1 - G3) in sequence before the indicator
moves to the next function (in this case, ANODE VOLT).
2
When the desired gain parameter is displayed, press either the
left or right SET key to decrease or increase the Amplifier Gain.
NOTE
G 1 (Gross Mode gain) may be set in the Standard mode when
the Spectron 600 is leak testing in a gross mode range.
G2 and G3 are normally set by the unit's computer so it may
properly calibrate the unit. When in Service mode, If the operator
changes the gain, the calibration will no longer be correct. However,
G 1 is always set by the user.
Anode Voltage
Displays the anode voltage of the mass spectrometer source. When this function
is selected while the unit is in Standard Mode, and then subsequently pressing
either SET momentary switch, the Peak Scan function will be activated (see
2-31
below). When the unit is in Service Mode, pressing either of the SET switches
alters the unit's peak voltages and allows the user to manually tune the mass
spectrometer.
Helium/Air :Measurement
This toggle switch allows the user to select either air equivalent or helium leak
rate readings. This function is only available in Service Mode.
Mass 3/4 Helium
This toggle switch allows the Spectron 600 to switch between Mass 3 and Mass
4 tuning voltages. This function is only available in Service Mode.
2.11
Test Aids & Procedures
Using the Handheld Remote
The controls and indicators of the Handheld Remote include the leak rate measurement displays, ranging functions, and the Start and Vent functions. The
remote itself is physically attached to the unit, via a coiled cable that is
connected to the Remote Port, located below the rear panel of the leak detector.
The remote is automatically activated when connected to the Remote Port. Note
that use of the handheld remote does not in any way effect usage of the User
Panel nor the remote computer (if installed).
Auto Zero
The "Auto-Zero" or "Zero" feature, activated from the User Panel, allows the
unit's operator to test with the presence of residual helium. Pressing the ZERO
button will cancel out the measurement of any helium present in the vacuum
system or test object (the unit will display the amount of helium above the
"zeroed out" amount).
The Zero function works in all test modes (Gross, Intermediate and Fine, and
also when using the Sniffer Assembly). When activated, helium present and
being measured in the vacuum system is "zeroed" out on the leak test gauge
graph and therefore not counted as part of the test.
When the Zero function has been activated, leak test measurement is automatically restricted to one decade below the range active when the Zero button was
pressed. When auto-ranging, the unit will automatically stop one decade below
2-32
the point when the Zero button was pressed. When manually ranging, the unit
will emit a short beep whenever the user attempts to range more than one decade
below the point when the Zero button was pressed.
Note that when the Zero function is activated, it does not inhibit ranging upward
during testing. The Zero function is canceled at the end of a test cycle (i.e., when
the VENT button is pushed); it can also be cancelled by halting the test cycle
(pushing the START button a second time).
Peak Scan
Peak Scan is a function the operator of the Spectron 600 can use to quickly
verify that the unit is operating correctly. By using this function while in
Standard Mode, the user will be able to ascertain whether the leak rate indication
is due to either helium or is the result of a poorly tuned spectrometer.
By changing the function on the Service Panel to Anode Voltage while still in
Standard Mode, and by then pressing either the left or right SET buttons, the
user will temporarily alter the spectrometer peak tuning voltages either -30 or
+30 volts from their prior position (releasing either button will return the
voltages to their normal condition). If this is done to an optimally tuned spectrometer, the displayed leak rate (due to either background helium or helium
from a calibrator) will decrease to zero indicating that the measurement is
actually due to the presence of helium. Both SET buttons should be used for this
test.
If the displayed leak rate does not decrease to zero after either set button is
pressed, the spectrometer is not tuned and the TUNE function (see below) must
be initiated to retune the mass spectrometer.
Calibration Check (Cal-Check)
Cal-Check is the feature that allows the user to verify the measurement accuracy
of the Spectron 600 leak detector. The unit automatically connects the internal
leak rate standard of the unit to the test port, measures the internal calibrator,
subtracts the background helium measurement and displays the results on the
Leak Rate Bar Graph located on the User Panel. The Cal Check function is
activated by pressing the CAL CHECK momentary switch on the Service Panel.
When the indicator on the Cal Check momentary switch begins flashing, the
Spectron 600 has completed its measurement cycle and the Cal-Check reading
from the User Panel should now be compared to the display on the Service
2-33
Panel. The alphanumeric display of the Service Panel indicates the calculated
temperature compensated value of the internal leak rate standard. The leak rate
bar graph indicates the measured value of the internal calibrator.
The unit is considered to be measuring accurately whenever the two readings are
within 10% of each other. If the difference between the two readings is greater
than 10%, the measurement gain may be adjusted by pressing the CAL (Calibrate)
button (see below) or the leak: detector may be retuned and recalibrated by pressing
the TUNE button (again, see below). If the two readings are within 10%, pressing
the Cal Check momentary switch ends the Cal-Check cycle.
NOTE
During the warm-up period of the unit (approximately
one-half hour), the leak detector s calibration will not
be as accurate as during normal operation. When
using the Spectron 600 during warm-up, perform the CalCheck function to ensure the integrity of the unit s
measurement accuracy.
Calibration (Cal)
The Calibration function is activated by pressing the CAL momentary switch.
The Calibration function of the leak detector is available only after the CalCheck procedure has been completed. After the Cal-Check cycle is completed,
when the actual leak rate measured by the unit is close to, but not exactly the
same as the internal leak rate standard, the Calibration function may be used.
Since the Calibration function adjusts the amplifier gain, once initiated, the leak
check of the Cal-Check function will now conform to the internal leak rate
standard. Note that consistent differences greater than 15% may indicate an
improperly tuned mass spectrometer or a fault within the unit.
Thne
Pressing the TUNE momentary switch initiates an automatic tuning cycle.
During the tuning cycle, voltages applied to the mass spectrometer are adjusted
and optimized for peak sensitivity and performance. It is recommended that the
Tune function be used in conjunction with the Cal-Check function. Since the
Calibration function basically increases or decreases the measurement gain of the
unit, without the optimization of the Tune function, the unit eventually may not
be able to self-calibrate.
2-34
Auto TIme Alert
When Auto TIme Alert is enabled, the user is reminded to Auto Tune the leak
detector every 50 hours or whenever system gains G2 and/or G3 rise above 7.5.
When an Auto Tune Alert condition exists, the leak detector's alphanumeric
display indicates PLS TUNE and the READY light flashes.
If the Auto Tune AlerUs triggered by the end of a 50 hour interval, the user may
either Auto Tune the leak detector (by depressing the TUNE key on the user
panel) or ignore the alert and continue testing. To continue testing, press the
ZERO button on the user panel. This resets the 50 hour alert timer to 0.0 hours;
the alert will not be displayed again until another 50 hours have elapsed.
If, upon conclusion of an Auto Tune or a Calibration cycle, system gains G2
and/or G3 exceed 7.5, the Auto Tune Alert will appear. In this circumstance, the
user cannot continue testing without first performing an additional Auto Tune.
The leak detector will "beep" until the Auto Tune is initiated.
If system gains of greater than 7.5 persist after the second Auto Tune, the Auto
Tune Alert will reappear. This is a possible indication that the leak detector's
mass spectrometer has become contaminated and needs to be cleaned. It may
also be caused by a failure of either the mass spectrometer source or collector, in
which case the failed component should be replaced (see Chapter Four, Service
and Maintenance).
Another possible cause of high gains is high system background. Background
can be eliminated by purging the system or changing the oil in the unit's internal
mechanical pump (Spectron 600T only).
NOTE:
The Auto Tune Alert is enabled by setting Profile Switch #4 on the f.1' circuit
board to the down position. If the Auto Tune Alert signals due to a gain
greater than 7.5, and the user wishes to continue testing, the feature may be
deactivated by moving Profile Switch #4 into the up position (although this is
not recommended). Please refer to Appendix E for the location and description of the Profile Switches.
2-35
Automatic Auto Tune
When Automatic Auto Tune is enabled, the leak detector will automatically
Auto Tune each time it is powered-up. Once the Auto Tune is completed, testing
may commence. Pressing the TUNE button on the user panel at any time during
the Auto Tune cycle will terminate the Auto Tune.
NOTE:
Automatic Auto Tune is enabled by setting Profile Switch #3 on the j4' board to
the down position. Moving Profile Switch #3 into the up position will disable
the Automatic Auto Tune feature. Please refer to Appendix E for the location
and description of the Profile Switches.
2-36
©[X]&[p[J~~ 1I[X]~~~
Theory Of Operation
3.1
Introduction: Leak Detection Theory
When designing and manufacturing systems that contain gases or fluids, or
systems that are normally evacuated, the manufacturer or tester must take into
account the degree of leakage that can occur. To qualify these products, various
methods may be selected to test these products for leaks. The amount of actual
leakage that can be tolerated is different for every application and therefore must
be determined from the conditions of the application itself. From this data the
manufacturer will be able to establish the limits of maximum permissible
leakage standards and will also be able to determine the maximum permissible
pressure levels within a product or system under actual working conditions.
Further, the manufacturer will need the ability to discover and localize any leaks
in the product or system tested. In all cases, the maximum allowable leak rate,
as well as the testing methods and procedures, should be specified before a
product or system is manufactured.
Many commercial, industrial and military products and processes require
hermetic sealing. In general, these products include equipment exposed to
pressures above or below those of its immediate environment, vacuum
equipment used in the manufacture of semiconductors and related research, and
items produced for industrial and commercial applications, most notably the
refrigeration and automotive industries. Hermetic tightness (sealing) is narrowly
defined as the absence of leakage, however, no manufactured object can be considered leak tight. Statements such as "no detectable leaks" or "zero leakage"
are not valid specifications for acceptance testing. Even in the absence of defect
within a product or system, gas will always permeate through metal, crystals,
polymers and glasses. Therefore, "leak tightness" is only a relative term.
The degree of permissible leakage depends on how and where the product or
system is to be used, the amount of the object's content (liquid or gas) that is
permitted to escape over a certain time period, or the amount of external atmosphere or liquid that is permitted to penetrate the object over a certain time period.
The size of the permissible leak is defined as part of the performance requirements
of the product or system. Leak standards are set for the following reasons:
3-1
•
To prevent the loss of contained gases or liquids
•
To prevent hazards caused by escaping toxic materials
•
To prevent contamination due to materials leaking from or
leaking into an object
•
To test the projected reliability of sealed systems or the
components .within the systems.
When setting the limits of allowable leakage, it is always necessary to set a
practical leakage level for the product under testing. Decreasing the permissible
leak rate below a practical level and increasing the sensitivity of the required test
method only brings with it an unnecessary increase in the time required and the
cost of performing a test.
Leak testing is divided into two general categories, Leak Measurement and Leak
Location.
Leak Measurement is the quantified assessment of an object's or system's leak
rate and is also the preferred method of determining that a leak does exist. Leak
Location is the procedure of pinpointing the precise location of individual leaks.
When testing an object, the most reliable sequence is to first measure the total
leakage of a test object, then, if necessary, determine the location of individual
leaks.
A leak rate specification should take into account the effect of leakage on the
system and its application. Long term storage of the object or system may be
necessary and should be considered when creating a leakage standard.
Any leak detection procedure requires careful planning. Ample consideration to
test sensitivity and response time is required when testing any object. At times,
it may be preferable to specify a maximum tolerable leakage rather than specifying a maximum allowable leak rate. The maximum tolerable leak rate may be
calculated by multiplying the maximum allowable leak rate by the length of time
a system or object is expected to be used (including storage time). If a gas or
liquid is not introduced to the system or object until it becomes operational (at
some future date), the maximum tolerable leakage need be only specified for the
duration of its operation. The level of the maximum tolerable leakage should
always be specified when the total amount of leakage is more important than the
leak rate.
3-2
A commonly used method for determining the maximum allowable leak rate is
derived from the consideration of leaks in the following situations:
•
System failure during the operational life of the system
•
Hazards to personnel and equipment when leaks occur
•
Unacceptable appearance of the system
•
Assurance of proper design and construction of the
manufactured equipment.
When considering these four factors, when determining system specifications,
the smallest leak rate will be the maximum allowable leak rate. If the content of
the test object is liquid, it is necessary to correlate the maximum liquid leak rate
to the leak rate of helium. Once the maximum leak rate of the liquid in the test
object has been calculated, it is very simple to conduct an accurate leak test for
an object designed to contain liquid, since a calibrated helium gas standard is an
integral part of the Spectron 600.
Of all the instruments and devices used for leak detection, helium-sensitive mass
spectrometer based leak detectors such as the Spectron 600 have been proven to
be by far the most sensitive and accurate. Further, this type of unit is generally
easily calibrated, does not require operator judgement to be used effectively, and
most importantly, is not destructive or harmful to test personnel or the tested
object.
•••
The remainder of this chapter describes in detail the operation of the Spectron
600 portable leak detector. It is divided into a discussion of direct and reverse
flow modes, a functional description of the leak detector and a description
of the major components and their functions within the Spectron 600.
3-3
3.2
Direct Flow & Reverse Flow Modes
NOTE
Refer to the 600D addendum for information on selecting Product Testing or
Process System Testing modes on the Spectron 600D
The Spectron 600 is capable of detecting leaks in three separate ranges: gross
mode range, intermediate mode range and fine mode range. The gross and intermediate modes use a form of detection known as "Reverse Flow" while the fine
mode uses a form of detection known as "Direct Flow." All flow modes are controlled directly and automatically by the Spectron 6oo's computer.
Reverse Flow:
The Reverse Flow Mode is particularly useful for detecting and measuring leaks
in test objects that have a high degree of outgassing or when a fast crossover at a
high test port pressure is desired. In this mode, testing for "Gross" leaks is
accomplished by connecting the external roughing pump to the vacuum system,
opening the external rough valve, the foreline valve and the gross valve. All other
valves are closed. The test port is connected to the foreline of the turbomolecular
pump through a restriction. This allows the sample helium to back-diffuse
through the pump. When testing in reverse mode, the foreline pressure is usually
in the 10-3 Torr range or greater, the turbomolecular pump actually acts as a buffer
against pressure bursts into the high vacuum region (the area containing the mass
spectrometer). Therefore, crossover can occur at much higher pressures in
reverse flow mode than in direct flow mode. For the Spectron 600, the Gross
Mode Leak Range is defined as 10 x 100 to 1 x 10-3 std cc/sec.
Without an external pump, Gross Mode is not available. If the unit is unable to
pump down the test object to a sufficient level to begin testing in the unit's
"intermediate" or reverse flow mode, actual leak testing will not begin. The unit
will remain in its roughing state until the operator cancels the test cycle. Since
the maximum crossover for the Spectron 600 is quite high, this may be an indication that the test object has a very large leak.
The unit's intermediate mode also uses Reverse Flow Mode testing. When the
test port pressure reaches the pre-designated "crossover" setpoint (1,000 mTorr
maximum) the unit will "crossover" to "intermediate mode" testing (the actual
point of crossover may be set by the system operator). At crossover, the foreline
valve opens, the internal rough valve remains open, while all other valves are
closed. Gases from the test object are introduced into the foreline of the turbomolecular pump, and "back-diffuse" through the pump. As in gross mode
testing, the turbomolecular pump acts as a buffer against pressure bursts into the
3-4
high vacuum region (the area containing the mass spectrometer). For the
Spectron 600, the Intermediate Mode Leak Range is defined as 10 x 10-4 to
6 X 10- 10 std cc/sec.
Direct Flow:
The Direct Flow Mode is suited for testing parts that have a leak rate specification less than 6 x 10- 10 std cc/sec, or when testing objects that are clean, dry and
cannot tolerate exposure to backstrearning of molecular oil during testing. In
this mode, the test object is directly connected to the high vacuum section and
therefore the mass spectrometer. This allows for much higher sensitivity and
ultra-clean testing in comparison with the reverse flow mode, but requires a
much lower crossover pressure.
In the Spectron 600 direct flow mode testing is also known as Fine Mode
testing. During Fine Mode testing, the fine valve and foreline valves are open.
All other valves are closed. Crossover takes place when the test port is at
approximately 75 mTorr for the 600T (ISO mTorr for the 6ooD) or less, as
adjusted by the system operator. The fine mode test leak range is between
10 x 10-5 to 4 X 10-11 std cc/sec.
NOTE
Once the Spectron 600 has crossed over into its direct flow
mode, and needs to range upward, it will stay in this
mode until it reaches the top of the 10-5 range.
3-5
3.3
Functional Description of Operation
The Spectron 600 Portable is a helium based mass spectrometer leak detector
that may be used for both quantifying and locating leaks in objects that can be
evacuated or pressurized. Helium that is present in a test object is drawn into the
unit (either through the test port or through the sniffer valve), isolated and
detected by a mass spectrometer, and converted into an electric signal. The
electric signal generated is proportional to the leak rate of the helium drawn
through the leak found in the test object. Once this signal is amplified, the signal
is displayed as a leak rate on the User Panel of the Spectron 600.
Helium is used as a tracer gas because of its unique combination of properties:
•
Helium is present in the atmosphere at a rate of only 5 parts per
million, therefore it is unusual to find a high atmospheric
background of helium that may disrupt testing
•
Helium is neither explosive nor toxic it is completely inert and
will not contaminate a test object
•
Helium does not contaminate or desensitize its own detector as
is common with detectors using other tracer gases
•
Helium molecules are small (mass 3 or 4 helium may be used
for the Spectron 6(0) and therefore flow readily through extremely
small leaks.
The operation of the Spectron 600 is discussed below. The operator of the unit
should use this information in conjunction with the unit's Vacuum Schematic (as
illustrated in Figure 3-1). The description follows the sequence of a basic test
cycle. A test cycle is started by connecting a test object to the test port (or by connecting the sniffer assembly to the sniffer port) and by pressing the START button.
Prior to testing ensure that the unit is in its functional READY state. The
START-UP procedure is described in Section 2.3. When the unit is ready for
testing, the vacuum system will have the following status:
I
The internal mechanical pump and the turbomolecular pump
will be functioning; the external mechanical pump will also be
functioning (if installed).
2
The foreline valve will be open; all other valves will be closed.
3
The "Hi-Vac" system will be fully evacuated by the turbomolecular
pump.
3-6
TEST PORT
MASS SPECTROMETER
FlNE VALVE
( i
----------------------l
I
~) TEST PORT PI RANI
I
.v.
I
I
\7
LSJ--j( EXT ROUGH VALVE
t
LI.l
TURBO PUMP
I
I
I
{,\ >
..I.
EXT ROUGH PUMP
\~Lj
r~-'II
~
......
ROUGH VALVE
ROUGH/FOREUNE PUMP
Figure 3-1
Spectron 600 Vacuum System Schematic Diagram
I
I
I
I
I
I HEUUM
I
I
Pressing the START pushbutton opens the rough valve. The internal rotary vane
mechanical pump (the roughing pump) or the external roughing pump (when
equipped with the unit) will begin to evacuate the test object. The falling
pressure within the test port and test object is monitored by a pirani gauge
attached to the. test port.
In systems without an external roughing pump, the internal mechanical pump
serves as both the roughing and foreline pump. Consequently, during the
roughing state, the foreline is not being serviced.
The Spectron 600's computer monitors foreline pressure using its foreline pirani
gauge. If foreline pressure reaches 1,000 milliTorr, the Spectron 600 computer
will stop the roughing cycle by closing the internal roughing valve, opening the
foreline valve and servicing the foreline. When foreline pressure has been
reduced to 150 milliTorr, the roughing cycle is resumed.
Testing begins once the pressure at the test port reaches the pre-set crossover
setpoint for the appropriate test mode.
The sample gases of the test object disperse throughout the confines of the hi-vac
system. As gas molecules enter the ion source chamber of the mass spectrometer, an electrically heated filament provides a source of electrons that collide with
the gas molecules and produce positively charged ions. The production of these
ions is referred to as ionization. Due to the differences in mass of the ionized
gases, only helium ions have the ability to traverse the two 90° magnetic sections
of the spectrometer housing to the collector. It is at the collector that the ions are
converted into electrical current and processed by the Spectron 600 computer for
display on the User Panel. The Spectron 600 has been programmed with the
ability to test using either Mass 3 or Mass 4 helium.
When the unit is equipped with an external mechanical pump, once Gross Mode
operation is complete (assuming a leak has not been discovered) the unit
"crosses over" into intermediate mode (reverse flow) testing. In the vacuum
system the internal rough valve is opened and the foreline valve remains open.
All other valves are closed. During crossover, the equalization of pressures may
cause a temporary increase in foreline pressure. This increase is termed a burst.
Measured by a pirani gauge in the foreline, if the burst causes the foreline
pressure to increase to over 2,500 milliTorr, the test cycle will be aborted and
ERROR 05 will be posted. If a burst causes foreline pressure to increase to over
4,000 milliTorr, the filament will be turned off, all valves except the foreline will
be closed, the turbo pump will be turned off, and ERROR 01 will be posted (see
Error Codes in section 4.10 for further information). The crossover pressure
3-8
(Crossover 1) should be adjusted by the user to provide the shortest possible test
cycle duration without producing excessive pressure bursts into the foreline
region of the unit. Note that since foreline tolerance is very high, the usual
result of the increase of fore line pressure will be a variable background reading.
Once Intermediate Mode operation is complete, the Fine (Direct Flow) Mode
testing begins. Within the vacuum system, the fine valve is opened while the
rough valves close. At this point the test port is fully connected to the highvacuum section. The equalization of the two pressures will cause a pressure
burst in the high-vacuum section. If the burst is over 5 x 10-4 Torr, the mass
spectrometer filament will be turned off for 10 seconds and ERROR 02 will be
posted. The system will then tum the filament back on and attempt to resume
testing (see Error Codes, section 4.10, for further information).
To prevent an excessive pressure burst, the test port may be evacuated for a
longer period by lowering the crossover pressure (Crossover 2 - refer to Section
2.7 for information on how to adjust this parameter) or by changing the "delay"
setting (refer to Section 2.7 for detailed information on delay parameters). In
this case, delay refers to either delaying the opening of the fine valve (the direct
gateway between the high-vacuum section and the test port) or the closing of the
rough valve (allowing further evacuation of the test port/test object area).
Optimizing these two parameters allows the user to shorten the test cycle while
still being able to safely operate the unit.
Often the setting of delays will depend on the size of the test object. Smaller,
cleaner objects will tend to produce small pressure bursts and therefore use relatively high crossover setpoints, larger, dirtier objects tend to produce larger
bursts that can be prevented by extending the roughing time by delaying the
onset of Fine Mode testing.
After Crossover 2 has been reached, and the unit is in the Fine testing mode,
pressure in the test object continues to be reduced until it is equalized with the
high-vacuum section. Concurrently, the Spectron 600 ranges downward to the
ultimate Direct Flow sensitivity of 6 x 10-1\ std cc/sec, unless a larger leak is found.
After the leak (or leaks) in the test object is/are found and quantified, the test is
terminated by pressing either the VENT or START pushbuttons. The unit's
computer will then close either the fine, rough or gross valve (dependent on the
current testing mode). Note that once the START pushbutton is pressed, the unit
is placed in its STANDBY mode (without any venting the test port). If the
VENT button is depressed for a period of time (as adjusted by the user, see
Section 2.7 for instructions on setting this "delay") the unit will open the vent
valve. The op~ning of the vent valve allows the test object to be brought to
3-9
atmosphere, thereby allowing it to be removed from the leak detector s test port.
The duration of venting is also adjustable (again see Section 2.7 for instructions
on setting the delay of the venting period). If the ambient air in the testing area
has a high moisture content, it is advisable to vent the unit with dry nitrogen.
U sing dry nitrogen prevents water vapor from collecting in the unit, which then
must be pumped out during the next testing cycle.
The Spectron 600 is automatically tuned and calibrated by using the factoryinstalled temperature compensated helium standard, traceable to NIST, as a
reference. During tuning, the unit's computer controls the vacuum system's
valves and adjusts the various voltages of the mass spectrometer to obtain an
optimum response to the helium signal from the reference standard. After the
voltages are optimized, the gain of the amplifier is adjusted until the displayed
leak rate value corresponds to the temperature compensated value of the helium
standard.
In the Sniff Test Mode, the sniffer port has a direct internal connection to the test
port. The flow rate of the sniffed gases is limited by the size of the sniffer probe,
sniffer assembly and most importantly the fixed leak in the sniffer probe.
In the event of a power failure, all valves within the vacuum system will automatically close. The mechanical pump will shut off, the turbomolecular pump
will also shut off, however, it will take several minutes for the blades of the
pump to stop spinning. When power is again available, the unit will automatically begin its normal "power-up" sequence. If, before the power failure, the
filament was activated, the unit will power-up with the filament on. If the
filament was off prior to power loss, the user will have to manually activate the
filament (by pressing the FIL ON momentary switch located on the User Panel).
3-10
3.4
Description of Major Components
VACUUM SYSTEM
Mass Spectrometer: The mass spectrometer is the component of the vacuum
system that detects the helium tracer gas present in the test object. The unit
ionizes the gas molecules, separates the helium ions from other gas ions, and
converts the helium ions into an electrical current that represents the size of the
leak. The spectrometer consists of three parts:
•
The gas to ion converter,
•
The magnetic deflector assembly, and
•
The ion collector.
Gas to ion converter (for ion production): To permit neutral atoms and
molecules of gas to be separated by a magnetic mass spectrometer, they must
first be converted to positively charged ions. Energy for this conversion is
provided by the ion source. Inside of the ion source, there is an electrically
heated filament that provides a source of electrons. As these electrons collide
with gas molecules, they split off electrons from the gas molecules and therefore
create positively charged gas ions. These ions then encounter the electrostatic
fields, established within the ion source by the ion repeller, the ion chamber, the
focusing plates and the object plate. The end-result of this arrangement is to
accelerate the gas ions into a well defined, mono-energetic beam.
Magnetic DeHector Assembly (Ion Separation): Since the gas entering the
spectrometer contains atoms and molecules of different kinds, the ion beam will
likewise contain a variety of ions including nitrogen, oxygen, carbon dioxide,
and, if a leak has been found, helium. Magnets are mounted on the outer portion
of the spectrometer, outside of the vacuum system, and are used to create
magnetic fields that are perpendicular to the beam of gas ions. A magnetic field
causes the ions to deflect off their current trajectories, the amount of deflection
depends upon the mass of the gas ion. Lighter ions such as hydrogen are
deflected to a greater extent than heavier ions such as oxygen.
Two identical magnetic fields are used in the Spectron 6oo's mass spectrometer.
The first magnetic field is organized so that only helium has the right mass to
pass through the field and through the narrow opening in the baffle on the far
side of the magnetic field. Most of the other ions will be deflected in a different
direction (they will be either too heavy or too light) and will be intercepted by
the baffle. A few of the non-helium ions will be able to pass through the baffle
3-11
(due to random scattering and bouncing of the ions within the mass spectrometer). Therefore, a second identical magnetic field and baffle is used again, which
acts to virtually eliminate all ions except for helium ions. By using this construction of two separate magnets and baffles, helium is selectively transmitted to
its target, while other gases, even if present in large quantities, are rejected.
Ion Collector: Mter the gas ions pass through the magnetic fields and baffles of
the spectrometer, is a slit plate (a plate with a thin and narrow aperture). Behind
this plate is a metal plate termed the target. As the helium ion strikes the target,
the target becomes positively charged, causing an extremely small electron flow,
as low as 1 x 10- 15 amperes. The current flow is detected and magnified by an
amplifier within the collector. The first stage of amplification is within the high
vacuum environment to assure stability, minimize the time constant and reduce
stray "noise" pick-up. The amplified signal is proportional to the partial pressure
of helium within the source. This signal, the actual leak rate, is sent to the
Spectron 600 computer for display on the User Panel.
VALVE BLOCK ASSEMBLY
The valve block assembly consists of:
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
•
Calibrator Valve (with Calibrator Assembly)
Fine Valve
Vent Valve
Rough Valve
ForelineiReverse Valve
Gross Valve
Sniffer Valve
Purge Valve
Test Port
Test Port Pirani
Vent Filter
Purge Hose Connection
Sniff Hose Connection
Internal Mechanical Pump flex Line
Foreline "flex" Line
Purge Sintered Filter
Note that the external rough valve, while part of the vacuum system, is not
located on the valve block.
Calibrator Valve: A three-way valve that connects the calibrator to the test
port. With the use of a filter, this valve is also used to vent the calibrator to
atmosphere.
3-12
Fine Valve: Connects the test port to the high-vacuum section (mass spectrometer housing). Open during Direct (Fine) Mode testing.
Vent Valve: Connects the test port to atmosphere through a sintered metal filter.
Rough Valve: Connects the inlet port to the internal mechanical pump for initial
evacuation of the test object.
Foreline/Reverse Valve: Connects the foreline of the turbomolecular pump to
the internal rotary vane mechanical pump and is also used in conjunction with
the rough valve for reverse flow testing. This valve is always open on units
equipped with an external roughing pump.
Gross Valve: Connects the test port to the foreline of the turbomolecular pump
(through a restriction). Open during Gross Mode testing.
Sniffer Valve: Connects the sniffer port to the foreline of the turbo- molecular
pump. Open during sniff testing.
Purge Valve: Connects the gas ballast port of the internal mechanical pump
(through polyflow tubing) to atmosphere through a sintered filter. Can be
connected to dry nitrogen. Opening this valve assists in "purging" the system of
trapped gases and "condensables" from the pump's oil.
Test Port: A standard NW-25 vacuum connection. Used to attach test objects to
the Spectron 600.
Test Port Pirani: A pressure gauge that monitors the test port pressure from
atmosphere to 10-3 Torr.
Vent Filter: A sintered metal filter that prevents particles from being drawn into
the valve block during venting.
Sniff Hose Connection: 114" polyflow tube fitting and tubing. Connects the
rear sniff QCF to the sniff valve.
Purge Hose Connection: 114" polyflow tube fitting and tubing. Connects the
purge valve to the purge fitting on the internal mechanical pump.
Internal Mechanical Pump "Flex" Line: NWl6 size stainless steel flex hose.
Connects the valve block to the internal mechanical pump.
3-13
Foreline "Flex" Line: NW16 size stainless steel flex hose. Connects the valve
block to the foreline of the turbomolecular pump.
Purge Sintered Filter: Prevents contaminants from being drawn into the
internal mechanical pump through the purge valve.
PUMPS
External Roughing Pump: Optional equipment with the Spectron 600. A 7 or
16 cfm dual stage rotary vane (mechanical) pump. The pump is capable of
reducing pressure from atmosphere to 10-3 Torr. Assists in providing a leak test
range from 10 to 1 X 10-3 std cc/sec helium. The pump is necessary when
testing large objects.
Internal Roughing Pump:
600T: Edwards E2Ml.5 dual stage rotary vane (mechanical) pump.
600D: Dual stage diaphragm/drag dry pump. Enables the pumpdown of the test
port and test object. Provides "backing" for the turbomolecular pump.
High-Vacuum Pump: Edwards EXTIO turbomolecular pump. In fine (direct)
mode testing, the pump allows the Spectron 600 to measure leak rate ranges as
low as 6 x 10-11 std cc/sec helium. In this mode, the test port is directly
connected to the high-vacuum system.
When performing intermediate (reverse) mode testing, test port gases are
channeled to the exhaust area of the turbomolecular pump. The spinning blades
of the pump protect the mass spectrometer from these test port gases. Helium
molecules however, due to their relatively small mass, are able to "back diffuse"
through the blades of the pump. Since heavier gas molecules are trapped by the
blades of the pump, only helium enters the high-vacuum system, where the mass
spectrometer is able to accurately measure the leak rate.
GAUGES
Test Port Pirani: A gauge that measures pressures from atmosphere to 10-3 Torr
in the test port.
Foreline Pirani: A gauge that measures pressure at the exhaust of the turbomolecular (high-vacuum) pump.
3-14
CALIBRATORS
The Spectron 600 uses three separate testing modes (gross, intennediate and
fine) in order to test leak ranges between 10 std cc/sec to 6 x lO- JI std cc/sec.
Gross Mode: The gross mode calibration covers the range between 10 std
cc/sec to I x 10-5 std cc/sec. The gross valve has a constriction that allows only a
small percentage of the test port gas to enter the high-vacuum section and reach
the mass spectrometer. If helium is detected, the signal is amplified (multiplied)
by the Gross Mode Gain (GI) to correct the measurement. An external calibrator is required to perfonn this calibration.
Intermediate and Fine Modes: An internal calibrator that emits helium at a
rate between I x 10-8 to 3 X 10-8 std cc/sec is standard equipment with every
Spectron 600. External models of differing ranges are also available. Contact
Edwards Instruments for further infonnation.
ELECTRONICS
The Spectron 600's electronics consists of five separate circuit boards (labeled A
through D):
A board - controls the unit's main processor, logic and sensors
B board - controls the unit's mass spectrometer voltage supplies
C board - controls the unit's displays and controls
D board - controls the unit's handheld remote (optional).
CPU board - mounts to the A board
3-15
©C=D8[[email protected];[FJ [[email protected][FJ
Service & Maintenance
4.1
Introduction
This chapter has been divided into three separate sections. The first section
describes the different periodic and maintenance procedures required by the
Spectron 600. The second section details vacuum system contamination, its
causes and effects and the methods required to eliminate it. The third section
provides information on identifying system faults and provides recommended
corrections.
4-1
4.2
Service Mode
WARNINGI
Only qualified service personnel should operate the unit
when either the front or rear panels are open. Potentially
lethal high voltages are continually applied to the circuit
boards and other areas within the unit during its operation.
Failure to follow this precaution may lead to severe injury
or death.
WARNING I
The Service Mode of the Spectron 600 is intended for use by
qualified Edwards personnel or users specifically trained by
Edwards. Under no circumstances should any individual be
assigned access to this mode without a thorough knowledge of
vacuum systems as well as the Spectron 600 System. Use by an
unqualified operator may result in damage to the unit
and/or personal injury.
NOTE: In Service Mode the Spectron 600 may be operated as a
totally manually operated and sequenced leak detector. In this
mode the vacuum system of the unit operates without its
normal computer protected safeguards. Contamination
and/or damage to the unit will occur if the vacuum system
is not properly sequenced. If in any doubt, operate the
various valves and controls that comprise the vacuum system
in the same sequence as the Spectron 600 operates in its
standard/fully automatic mode.
To perform many of the service and/or repair procedures described in this
chapter, the Spectron 600 will have to be placed into its Service Mode. To place
the unit in Service Mode:
1.
Open the rear panel of the unit (loosen the 1/4-turn screw at the top
of the panel, then gently lower the door)
2.
A circuit board is mounted on the inside of the rear panel. On the
right side towards the top of the board a black pushbutton is found.
Press the pushbutton. The unit is now in Service Mode and the
Service Mode indicator on the unit's front panel is illuminated.
4-2
To return to the Standard mode, press the SERVICE pushbutton a second time.
The Service Mode indicator will be extinguished and the Spectron 600 will
return to its normal operating mode.
NOTE
After exiting from the Service Mode, the Spectron 600 requires
fifteen s,econds to accurately acquire background and other system
measurements. During this time, the system computer will prohibit
any testing from occurring and the system will "beep" whenever the
Start switch is pressed. At the end of this fifteen second time period,
a test cycle may be commenced normally by pressing the Start switch.
4.3
Calibration & Tuning
The Spectron 600 may be tuned and calibrated automatically or manually. The
automatic (computer assisted) procedures follow:
With the unit in "standby" mode, use the following procedure to calibrate the
leak detector:
1.
Press the CAL CHECK momentary switch. The unit will begin the
"calibration check" sequence.
2.
The Spectron 600's computer will sequence the vacuum system so
that:
a. The internal leak rate standard is connected to the test port
b. The internal calibrator is then measured by the unit
c. The background helium is then subtracted from the initial
measurement
d. The results of the measurement are then displayed on the leak
rate bar graph and numeric display of the user panel
3.
The indicator on the CAL CHECK switch will now be flashing.
This indicates that the measurement has been completed.
4.
The alphanumeric display will now indicate the calculated
temperature compensated value of the internal leak rate standard.
Compare this with the measurement displayed on the leak rate bar
graph and numeric display. If the two readings are within 10% of
each other, the unit should be considered properly calibrated.
If the difference between the two readings is greater than 10%, the measurement
gain may be adjusted by pressing the CAL (Calibrate) button (see below) or the
leak detector may be retuned and recalibrated by pressing the TUNE button
(again, see below). If the difference between the two readings is acceptable
(generally less than 10%) the Cal Check cycle can be ended by pressing the
CAL CHECK momentary switch once more.
NOTE
During the warm-up period of the unit (approximately
one-half hour), the leak detector s calibration will not be
as accurate as during normal operation. When using the
Spectron 600 during wann-up, perform the Cal-Check function
to ensure the integrity of the unit's measurement accuracy.
Another method of checking calibration is a function exclusive to Edwards
Spectron 600 series leak detectors: the "Peak Scan" function. Peak Scan allows
a user to quickly ascertain whether the leak rate indication is due to either
helium or is the result of a poorly tuned spectrometer. To initiate the Peak Scan
function:
1.
When the unit is leak testing in Standard Mode, press and hold either
SELECT momentary switch until the indicator LED for the ANODE
VOLTAGE function is lit.
2.
Press and hold either the left or right "SET" momentary switch.
Pressing the left arrow switch will alter the spectrometer peak tuning
voltage by -30 volts while pressing the right arrow switch will alter
the voltage by +30 volts. Releasing either switch returns the
spectrometer voltage back to normal. When this test is made on an
optimally tuned spectrometer, the displayed leak rate (due to either
background helium or helium from a calibrator) will decrease to zero
indicating that the measurement is actually due to the presence of
helium. Both SET buttons should be used for this test.
If the displayed leak rate does not decrease to zero after either SET button is
pressed, the spectrometer is not tuned and the TUNE function (see below) must
be initiated to retune the mass spectrometer.
To "Thne" the Spectron 600:
1.
When the unit is in Standard Mode, press the TUNE momentary
switch (located on the left side of the User Panel).
2.
The Spectron 600 will The Spectron 600 will sequence through a full
"Auto Tune" cycle. This includes optimizing all mass spectrometer
voltages, finding the optimum voltage, measuring background,
adjusting G3 (direct mode) gain and adjusting G2 (reverse mode)
gain.
3.
When the unit is fully tuned and calibrated, the TUNE indicator light
will turn off and the READY LED will be lit.
4-5
4.4
Periodic Service
Grease Test Port Centering Ring:
A properly sealing test port O-ring is essential in assuring rapid pump down of a
test object. The O-ring should be inspected frequently, at least once each week.
To access the O-ring remove the NW clamp and centering ring atop the test port.
With a nonmetallic instrument or by hand, remove the O-ring carefully. Be
careful not to nick or damage the O-ring. Once removed, wipe it with a lint free
cloth and inspect it carefully for any damage. Specifically, look for any cuts,
wear or flat spots. Replace the O-ring if any damage is observed. Whether
installing a new or old O-ring, lubricate the O-ring with a thin film of vacuum
grease (Dow Corning vacuum grease is recommended). Re-install the O-ring
into the test port. Reattach the centering ring and clamp.
Check Air Filters:
The Spectron 600 has a filter that cleans the cooling air drawn into the unit. The
filter is located within the left side panel (as viewed from the front of the unit).
The reusable wire mesh filter can be removed for cleaning by removing the nuts
that attach the filters to the outer panel. They may be cleaned with compressed
air (in the reverse direction of normal air intake) or can be washed with soap and
water.
Check Oil Level in Internal and External Rotary Vane (Mechanical) Pumps
The Spectron 600 is equipped with either one (internal only) or two (internal and
external) pumps depending on its configuration. Each pump has a transparent oil
level gauge that allows the user to observe the amount of oil in the pump as well
as the oil's coloration.
To observe the oil level, and to access the drain plug and filler port for the internal
pump, remove the right side panel (when facing the unit). The level, plug and
filler are on the right side of the pump (the pump is illustrated in Figure 1-2).
Oil should be added to the pump whenever the oil level window indicates that
the pump's oil supply is low. If the oil is darker in color then when initially
added to the pump or if the oil is discolored, change the oil immediately. Use
only oil recommended by the pump's manufacturer, for the internal and external
pumps use Edwards Ultra Grade 15 oil or its equivalent. The procedure for
changing pump oil is described later in this section.
Note also that it is possible for the internal pump's oil to become contaminated
with helium. Refer to Section 4.5 for the information on indications of heliumbased oil contamination.
Check Exhaust Filter on Internal Rotary Vane (Mechanical) Pump
The internal pump has-a disposable exhaust filter. To check the filter, open the
front panel of the unit. The filter is attached to the top of the mechanical pump,
threaded into an adaptor. The filter may be removed by rotating it in a counterclockwise direytion. Check the filter, if it is discolored or saturated replace it
with a new filter (PIN DI55-02-840).
This filter is not a sealed filter. If it is desired to connect to external facilities
exhaust, replace the filter with a sealed, coalescing type filter and connect the
exhaust port of the filter to the inside of the rear bulkhead exhaust connector
using flexible tubing, such as Tygon tubing. The exhaust port on the Spectron
600 may then be connected to facilities exhaust. The filter medium should be
checked periodically and changed according to the manufacturer's instructions.
4-7
Figure 4-1
Changing the Pump Exhaust Filter
4-8
Changing the Oil in Rotary Vane (Mechanical) Pumps
When changing the oil in either the internal or external pump, the oil must be hot
to obtain comp,lete drainage. If the oil is not hot, run the pumps for at least
fifteen minutes to warm up the oil. However, if the unit, and therefore the
pumps, have been running for several hours, it is advisable to shut down the unit
and wait several minutes before changing the oil.
The pumps must be shut down to change the oil. Running a pump without a sufficient amount of oil will quickly damage the pump.
To change the oil in the internal rough pump:
1.
Turn off the Spectron 600. The A.c. power toggle switch is located
to the right of the User Panel (when facing the unit).
2.
Remove the right side panel (when facing the unit). Place the unit so
that the right side of the unit rests on the edge of its utility cart or on
the edge of a table or other flat surface.
3.
Place a funnel directly underneath the drain on the pump to collect
the drained oil into a suitable container. Open the drain plug and
wait for the oil to drain out of the pump. Once the oil has been
completely drained from the pump replace the drain plug.
In order to quickly drain the oil from the pump, open the fill plug
located on top of the pump. Make sure to use a large enough object
to collect the oil, removing the oil in this manner may cause the used
oil to splash within its container.
4.
On the top of the pump is a fill plug. If it has not been removed yet,
remove the plug and with a narrow funnel refill the pump. Pour
enough oil into the pump so that the oil level as seen through the
sight glass (located on the side of the unit) is just below the top fill
line. Replace the plug.
CAUTION:
Use recommended oil such as Edwards Ultra Grade 15 or
equivalent. Use of other oils will produce poor pressure peiformance
and rapid contamination. Also, do not use solvents or light
flushing oils since complete removal is difficult and their
higher vapor pressure prevents attainment of required vacuum.
4-9
5.
Run the Spectron 600 for at least five minutes. This will circulate oil
through the pump and "flush" out any contaminants. Repeat steps 3
& 4. If any visible contaminants still appear in the pump oil repeat
steps 3 & 4 again until the pump oil appears free of contaminants.
Make sure that before the Spectron 600 is to be used that the pump is
filled with a sufficient amount of oil (as described in step 4).
To change the oil in the external rough pump:
1.
Turn off the Spectron 600. The A.C. power toggle switch is located
to the right of the User Panel (when facing the unit). Turn off the
power to the external rough pump.
2.
Place the pump on a raised flat surface (e.g., a table or workbench)
so that the pump's oil drain is over a used oil container.
3. Open the drain valve and wait for the oil to drain out of the pump.
In order to quickly drain the oil from the pump, open the fill plug
located on top of the pump. Make sure to use a large enough object
to collect the oil, removing the oil in this manner may cause the used
oil to splash within its container. Once the oil has been completely
drained from the pump replace the drain plug.
4.
On the top of the pump is a fill plug. If it has not already been
removed, unloosen the plug and with a funnel refill the pump. Pour
enough oil into the pump so that the oil level as seen through the
sight glass (located on the side of the unit) is just below the top fill
line. Replace the plug.
CAUTION:
Use recommended oil such as Edwards Ultra Grade 15 or equivalent. Use of other oils will produce poor pressure peiformance and
rapid contamination. Also, do not use solvents or light flushing oils
since complete removal is difficult and their higher vapor pressure
prevents attainment of required vacuum.
5.
Run the mechanical pumps for at least five minutes. This will
circulate oil through the pump and flush out any contaminants.
Repeat Steps 3 & 4. If any visible contaminants still appear in the
pump oil repeat Steps 3 & 4 again until the pump oil appears free of
contaminants. Make sure that before the pump is used that it is filled
with a sufficient amount of oil (as described in Step 4).
4-10
4.5
Contamination of the Vacuum System
All leak detectors are subjected to contamination of the vacuum system by
repeated exposure to gases and other matter drawn from test objects during
ordinary testing. This matter will settle throughout the vacuum system. Special
consideration should always be given for contamination of the mass spectrometer and the oil and filter of the rotary vane mechanical pump. As a result of
contamination, system.performance will drop and sensitivity will decrease.
Cleaning and recalibration of the vacuum system is necessary to restore the unit
to optimum performance.
Indications of Contamination
The vacuum system is considered contaminated if any of the following conditions exist:
1.
The amplifier gain (either G2 or G3) indicator displays a gain of 8 or
higher. This indicates that the sensitivity of the mass spectrometer
has decreased and the automatic gain compensation of the unit is
reaching its limit. Verify tuning by performing the 'Tune" function
(as described in Section (2.9). If after the Tune function has been
performed, the gain value is not lower than previously reported, the
mass spectrometer should be removed from the high-vacuum system
and cleaned (the procedure is described in Section 4.7).
2.
The high-vacuum pressure display is erratic. This can be observed
by selecting the High Vacuum function on the Service Panel. This
requires that the high-vacuum section be opened and cleaned (this
procedure is described in Section 4.7).
3.
The plugged test port cannot be pumped to less than 50 milliTorr.
This condition indicates that the oil in the internal rough pump (or
external rough pump, when equipped) may be contaminated and
needs to be replaced (this procedure is described in Section 4.4).
4.
The foreline pressure cannot be pumped to less than 50 milliTorr.
This condition indicates that the oil in the internal rough pump may
be contaminated and needs to be replaced (this procedure is
described in Section 4.3).
5.
With the test port plug in place, the leak rate indicator does not reach
a "zero" reading even after prolonged pumping. This condition
4-11
indicates that the accumulated contaminants within the unit have
absorbed a high amount of test helium. When this occurs, place the
unit in its "standby" mode for a minimum of three minutes. The unit
will be able to pump away some of the background helium and to
take new measurements. Re-testing of the test object is
recommended at this point. If the situation is still not remedied,
changing the oil in the internal rough pump as well as a system-wide
cleansing of the internal components of the unit is in order.
Note that it is possible that the symptoms listed above may also be due to causes
other than contamination. The following problems should be considered and
eliminated priqr to proceeding with contamination-related service:
•
•
•
leak in the vacuum system
incorrectly tuned spectrometer
malfunctioning turbomolecular pump
Sensitivity Check
A sensitivity check provides an indication on how the leak detector is responding
to repeated exposure to gases drawn into its vacuum system. Matter contained in
these gases tends to contaminate the mass spectrometer and reduce its sensitivity.
The unit's computer senses this reduction and automatically compensates for this
loss by increasing the helium signal amplifier gain (the Amplifier Gain function
divided into G2: gain during reverse mode testing or G3: gain during direct
mode testing). Ultimately, if the unit were to be left unserviced, through continuing computer adjustment in response to increasing contamination, the "reserve"
gain would be exhausted. A cleaning and recalibration of the mass spectrometer
components is necessary to prevent this condition.
A sensitivity check is made by pressing the SELECT momentary switches on the
Service Panel until the AMP GAIN function is reached. As stated above, three
Gain measurements are available: Gl, G2 and G3. Gl (gross mode gain) is set
by the user, so a high value of this gain is not necessarily an indication of contamination. The SELECT switches are also used to toggle between the three
values. The scale of amplifier gain is between 1 and 10. Typical gains for a
clean system are:
G2: 2 - 3
G3: 3 - 4
4-12
As the system progressively becomes more contaminated, the gain also increases
(becomes closer to 10).
To correct this condition, the TIme function must be used (as described in
Section 2.9). If the Tune function has been performed, and either G2 or G3
value is greater than 8, the mass spectrometer assembly should be removed,
cleaned and recalibrated as described in Sections 4.7 and 4.8.
Internal Rotary Vane Pump Oil Contamination (6OOT)
Repeated exposure to high levels of helium, particularly when testing objects
with large leaks, may cause the mechanical pump's oil to become contaminated.
Helium, along with other gases, becomes dissolved in the oil and trapped in the
internal mechanical pump. This type of contamination is found when:
•
A high background of helium is measured that cannot be pumped
away
•
An unstable leak rate caused by excess helium that is released
from the internal mechanical pump at regular intervals
A high background level of helium will prevent the Spectron 600 from testing in
its most sensitive ranges. An unstable leak rate will complicate testing and will
make the tuning and calibration functions unreliable.
The gas ballast may be opened periodically to "de-gas" the pump's oil. This
should be done only if the background helium rate is excessive or if the leak rate
becomes unstable as a result of helium loading. The pump gas ballast is
connected to a "purge" valve in the vacuum system, which allows the ballast to
be opened to atmosphere through a sintered filter.
Purging the internal pump with dry nitrogen will help prevent contamination.
Nitrogen is connected through a 114" bulkhead marked N2 on the rear paneL
The nitrogen line must be connected internally by removing the sintered filter
(item 13, figure 5-2) and replacing it with a 114" NPT to 114" poly flow tubing
elbow adaptor (PIN D155-0832) and connecting a length of polyflow tubing
between the adaptor and the inside of the bulkhead fitting. The required connectors, tubing, and instructions are included in the N2 kit, which is part of the
installation kit.
The pump may be purged either to atmosphere through the sintered filter, or with
dry nitrogen. Dry nitrogen is recommended in areas with high ambient helium.
4-13
The dry nitrogen supply should be limited to 0.5 to 1.5 psi so that only a gentle
stream of nitrogen enters the ballast port.
To open or close the gas ballast, press the purge momentary switch on the
Service Panel (left side of User Panel). The purge valve may only be opened
when the unit is in "standby" mode (the READY light will be lit on the User
Panel). The ballast should be kept open for a minimum of three minutes to
allow the helium to be-completely expelled from the oil. The purge valve will
automatically close after five minutes, or when the START switch is pressed.
The computer will prevent any testing for fifteen seconds after the purge valve
closes. This allows the background level to settle and the computer to update the
background information.
Occasionally, the internal pump's oil will become saturated with helium to the
point that purging with dry nitrogen and "de-gassing" the oil through the gas
ballast will not be entirely effective. If the background and instability problems
are not sufficiently solved through these measures, change the pump's oil (refer
to Section 4.4 for this procedure).
4.6
Venting the Vacuum System
Cleaning, service and repair of vacuum system components usually requires the
venting of the Vacuum System. Venting is always necessary for removal of
component parts. Service must be performed by adhering to procedures that
minimize the pumpdown time when the system is restarted (e.g., using latex
gloves when touching internal equipment - without gloves, the fingerprints left
behind are a source of outgassing and contamination that effect the efficiency of
the Spectron 600).
WARNINGI
Venting of the Vacuum System should be performed by
qualified personnel only. Improper sequencing of the
vacuum system may lead to damage to the unit or injury to
service personnel
To Vent the Vacuum System:
1.
Place the unit in Service Mode. The unit may be placed in service
mode by:
a. Turning the screw at the top of the rear door 114 turn and gently
lowering the door;
4-14
b. Pressing the black pushbutton on the upper right of the circuit
board (mounted on the rear door).
2.
From the Valve section of the Service Panel, close all valves except
the foreline valve.
3.
Press the ZERO momentary switch. This will shut down the turbomolecular pump. Wait three minutes for the turbomolecular pump
to spin down.
4.
Press the FORE momentary switch on the Service Panel to close
the foreline valve.
5.
Disconnect the power supply to the internal pump
(Molex connector).
6.
Open the vent valve from the momentary switch on the Service Panel.
7.
Open the fine valve from the momentary switch on the Service
PaneL The turbomolecular pump will rapidly decelerate (this
produces a highly distinctive noise).
8.
Open the foreline valve from the momentary switch on the Service
Panel. This vents the mechanical pump.
9.
Close the vent, fine and foreline valves.
10. Tum off the unit.
To restart the Spectron 600: Reconnect the power switch to the internal mechanical pump, press I/O switch to I and perform a normal start-up procedure (as
described in Section 2.3).
4.7
Cleaning Requirements
When it has been determined that the vacuum system is contaminated, components of the vacuum system will need to be cleaned and serviced as stated in the
remainder of this Section. Since contamination should not be a frequent occurrence, it is recommended that as many as possible of the components listed in
this section be cleaned and/or serviced at the same time.
4-15
Parts that require cleaning are:
•
•
•
Mass Spectrometer (including the source, collector and housing)
Turbomolecular pump
Vacuum system valves
To obtain complete and unimpeded access to the internal systems of the
Spectron 600:
•
Front & Rear Panels: With a screwdriver, turn the screw located on
top of each panel 114 turn and gently lower the doors
•
Side Panels: Each panel lifts off the unit's housing by grasping the
panel on the lower rear comer and pulling outward.
Cleaning Procedure for Contaminated Parts
Whenever the vacuum system becomes contaminated, it will be necessary to disassemble and clean all components that are effected. Cleaning procedures for
vacuum apparatus such as electron tube parts, test chambers, etc., are generally
appropriate for cleaning Spectron 600 vacuum components.
WARNING!
At all times, the inhalation of cleaning fluid vapors
must be avoided. Also, extreme care should be taken
with flammable substances such as acetone.
NOTE
When handling any components normally exposed to
vacuum, use only lint-free gloves. Touching any object
with bare hands will leave an organic residue on the
component that will outgas and negatively effect the
subsequent leak detection procedure.
The solvents referred to in this section are freon and acetone. Acetone is used
whenever large deposits of grease or oil are to be removed. Remember,
however, to use acetone in a well ventilated area. Since acetone is highly
flammable, all standard safety precautions when dealing with flammable objects
should be taken whenever acetone is used.
Immerse components in a cleaning solvent for five minutes. Thoroughly rinse in
hot water and dry immediately. Heating the components, prior to their reassembly is the final stage of cleaning.
4-16
NOTE
Never remove O-rings with a metal tool, as this could
scratch the O-ring groove, and cause a leak. Use a plastic
or wood (or any soft material) tool to remove the O-ring
by inserting the tool between the inside of the O-ring and
its groove and then sliding the tool around the inside of the
O-ring. This will cause the O-ring to pop up. An O-ring
may have to be held on its opposite side to prevent its
turning in the groove. This procedure usually gives much
better results than trying to pry the O-ring from its groove.
O-rings are susceptible to absorbing large quantities of the solvents used in
cleaning. Subsequent evaporation of these solvents when the system is later
evacuated (during testing) must be avoided, therefore O-rings and gaskets should
be removed from flange grooves and treated as a separate cleaning problem. 0rings and gaskets are either replaced at the time of reassembly (recommended),
or carefully wiped clean with a lint-free material and inspected for surface
damage of any kind before they are used again. If a new O-ring is used, it
should be wiped clean, inspected and lubricated with a light film of vacuum
grease, essentially the same procedure as would take place when reusing an old
O-ring. Use vacuum grease as sparingly as possible since it later may become a
source of system contamination.
Cleaning the Mass Spectrometer
Refer to Figure 4-2 for an exploded view of the mass spectrometer.
1.
Refer to Section 4.9 for an explanation of how to remove the source
from the Spectron 600.
2
Disassemble the two half sections of the spectrometer housing and
remove the center slit plate and O-ring.
3.
Clean the two sections. The interior of both sections should be
lightly sanded or bead blasted to remove all stains. Blowout the
bead blast residue with dry, oil-free air. The sections should then be
cleaned ultrasonically in freon and dried with a hot air gun. Make
sure to handle the sections when wearing lint free gloves.
Reassemble the two sections and install a new O-ring.
4-17
4.
The source may be cleaned as follows:
a. Remove the source's O-ring and wipe away any excess grease
from the O-ring groove.
b. Remove the source's filaments as stated in the Section 4.9.
Clean the area using a fine emery cloth held with needle nose
pliers or a tweezer. Be careful to not use excessive force, any
.bending or shifting of the filament area may cause an electrical
'short. Rinse the source in freon and clean it ultrasonically.
Install new filaments as described in Section 4.9).
5.
The collector may be cleaned as follows:
a. Remove the collector's O-ring and wipe away any excess
grease from the O-ring groove.
b. Clean ultrasonically in boiling freon for two minutes.
c. Bake the entire assembly at 50°C for 30 minutes.
d. Apply a light film of vacuum grease on the O-ring and reinstall
the collector assembly into the mass spectrometer.
4-18
.
I ~10
i~9
~11
.
Figure 4-2
Spectron 600 Mass Spectrometer
(Exploded View)
4-19
Parts List for the Spectron 600 Mass Spectrometer (as illustrated in
Figure 4-2):
EDWARDS PIN
DESCRIPTION
1
D155-01-S17
Source Assembly
2
D155-01-S1S
Collector Assembly
3
D155-02-S05
O-Ring, 2 112 x 1116
4
D155-01-S11
Source Body
5
D155-01-S12
Collector Body
6
D155-01-S13
Magnet
7
Commercial
Lockwasher, Split #4
S
Commercial
Screw, #4-40 x 3/S
9
D155-0l-S14
Slit Plate
10
D155-01-S19
Screw, vented, #2-56 x 3/16
11
D155-02-S03
(?-Ring, 1 lIS x 1/16
12
Commercial
Lockwasher, Split #6
13
Commercial
Screw, Socket Head, #6-32 x 112
14
Commercial
Lockwasher, Split #6
15
Commercial
Screw, Socket Head, #6-32 x 112
ITEM #
4-20
Cleaning the Turbomolecular Pump
Cleaning of this pump must be in accordance with the procedures in the EXTIO
manual. For questions regarding servicing the turbomolecular pump, contact the
Customer Service Department at Edwards.
1.
Vent the Spectron 600 (as stated in Section 4.6).
2.
Open the rear door of the unit. With a screwdriver turn the screw
the door 114 turn and gently lower the door.
NOTE
Note the alignment and orientation of all parts removed.
Proper alignment is critical when replacing the
components removed in this procedure.
3.
Disconnect the electrical connector to the turbomolecular pump.
4.
Disconnect the electrical connector to the source and mass
spectrometer.
5.
Remove the NW clamp and centering ring from foreline of the turbo
pump. Be careful not to drop the centering ring.
6.
Note the orientation of the claw clamps that connect the pump to the
vacuum manifold and the manifold to the foreline section.
7.
Loosen the nuts on the claw clamps. Remove the clamps. Make
sure to record the position of each clamp.
8.
Lift off the manifold and the centering ring between the pump and
the manifold. Place on a clean, flat surface near the unit.
9.
Lift off the turbomolecular pump and place on a clean, flat surface
the unit.
10. Refer to the instructions in the EXTIO manual for cleaning
the pump. Pump service should be limited to cleaning procedures
only - additional work performed on the pump may void the warranty.
11. Clean and regrease the a-ring on the large centering ring assembly
as necessary. Replace the turbomolecular pump, manifold and
centering ring within the unit.
4-21
12. Replace all of the claw clamps removed in Step 7. Replace the
clamps to the same positions from which they were removed earlier.
Replace and tighten the nuts removed in Step 7.
13. Clean and regrease the O-ring on the NWI6 centering ring as
necessary. Replace the NWI6 clamp and centering ring removed in
Step 5 onte the turbomolecular pump.
14. Reconnect the electrical connector to the source and mass
spectrometer.
15. Reconnect the electrical connector to the turbomolecular pump.
4-22
4.8
Calibration Requirements
Calibration is required when components associated with a measurement
function are serviced, repaired or replaced.
The items that need to be calibrated and reset after service, repair or
replacement are:
.
• test port and foreline pirani gauges
• hi-vac gauge
• temperature sensor
Test Port Pirani Calibration
NOTE
Calibration is required whenever a gauge is replaced.
1.
Ensure that a blank plug is attached to the test port and that all
valves except the foreline valve are closed. Verify that the Spectron
600 is in the Standard mode.
2.
Open the rear panel. To open the rear panel turn the captive screw at
the top of the panel 114 turn counterclockwise and gently lower the
door.
3.
Using either of the SELECT arrow keys on the left side of the
User Panel, select the Test Port Pressure function. The function has
been selected when the green indicator light to its left is lit.
4.
Set the unit to manually range downward to 10- 10 range (to ensure
that the unit is in direct mode) by pressing the AUTOIMANUAL
momentary switch so that the manual ranging mode is initiated and
then pressing the "down arrow" key so that the "10 range" is
selected as the eventual "pumpdown" goal.
5.
Press the START pushbutton to start the test cycle. Allow the unit
to pumpdown so that it reaches Crossover 2. The fine valve will be
open (the green indicator next to FINE VALVE on the User Panel
will be lit).
4-23
6.
On the A board mounted on the interior of the rear door, adjust the
R101 potentiometer (at the bottom center of the board) so that the
test port pressure is reading one milliTorr on the alphanumeric
display. The optimal method is to adjust the potentiometer to
slightly greater than one milliTorr, then slowly turn the
potentiometer down until the display just indicates 1 mTorr.
NOTE
Be careful not to over-adjust this setting, while the
potentiometer can be set to a value less than 1 mTorr, the
alphanumeric display will still indicate a reading of 1 mTorr.
Foreline Pirani Calibration
1.
Ensure that a blank plug is attached to the test port and that all
valves except the foreline valve are closed. Verify that the Spectron
600 is in the Standard mode.
2.
Open the rear panel. To open the rear panel turn the captive screw at
the top of the panel 114 tum counterclockwise and gently lower the
door.
NOTE
The test port pirani must be calibrated prior to calibration
of the foreline pirani.
3.
U sing either of the SELECT arrow keys on the left side of the
User Panel, select the TEST PORT (pressure) function. The
function has been selected when the green indicator light to its left
is lit.
4.
Set the unit to manually range downward to a decade that the unit
will run in while in reverse mode (e.g., the 10-8 range). Make sure
not to range down too far (e.g., ranging down to the 10-10 range
then up to the 10-8 range the unit will be in direct mode instead of
reverse mode). Wait until test port pressure stabilizes. Record the
test port pressure.
5.
Using either of the SELECT arrow keys on the left side of the
User Panel, select the FORELINE function so that foreline pressure
reading appears on the alphanumeric display.
4-24
6.
On the A board mounted on the interior of the rear door, adjust the
R79 potentiometer (at the bottom center of the board) until the
current foreline pressure reading is the same as the test port pressure
reading recorded in Step 4.
7.
Re-select the TEST PORT function. Verify that the test port
pressure is still the same as recorded in Step 4. If the reading has
changed, repeat the procedure until the foreline pressure and test port
pressure continually match.
Calibrating the Temperature Sensor
1.
Ensure that the unit is in standard mode. Open the rear panel. To
open the rear panel turn the captive screw at the top of the panel 114
turn counterclockwise and gently lower the door.
2.
Connect a temperature probe to the temperature sensor located on
the body of the internal calibrator.
3.
Using either of the SELECT arrow keys on the left side of the
User Panel, select the CAL TEMP function so that the temperature
reading appears on the alphanumeric display.
NOTE
The temperature probe should have a resolution 01 O. re .
4.
On the A board mounted on the interior of the rear door, adjust the
R53 potentiometer (at the bottom right of the board) until the
temperature reading of the alphanumeric display matches the
temperature indicated by the temperature probe.
4-25
4.9
General Service & Repair
Servicing the Valves
The most prevalent cause for a leaky vacuum system is faulty valve closure. A
valve's seat and seal become dirty or contaminated with use, causing small leaks
that must be corrected for the leak detector to function as required. The valves
must be cleaned when·a leak develops or the system becomes contaminated as
described in Section 4.5. If a valve seal is damaged the valve should be
replaced.
Generally, valves exposed to low pressure and high flow are the most likely to be
the cause of a leak and should be serviced first. Cleaning procedures are
discussed in Section 4.7.
All valve servicing is performed while the unit is in Service Mode. In order to
easily access the valve block the rear panel needs to be opened. Refer to Figure
5-2 for an exploded view of the valve block.
CAUTION
Do not use metal tools or sharp objects to inspect a valve
seat in the valve block. Any scratch will irreparably
damage the seat.
Servicing the Vent Valve
1.
Vent the test port.
2.
Open the rear panel. To open the rear panel, tum the captive screw
at the top of the panel 114 turn counterclockwise and gently lower
the door.
3.
Remove the two wires from the electrical connectors on the valve.
Make note of which wire is connected to each metal prong (yellow
wire to upper prong/striped wire to lower prong).
4.
Remove the four screws and washers. Remove the valve coil.
5.
Remove the plunger and the seal assembly from the valve coil.
Wipe only the outer area of the seal. Do not remove the seal.
4-26
6.
The valve's O-ring is in the body of the valve. Remove it with a
plastic or other non-metallic instrument. Do not use metal or any
other "hard" instruments as they may scratch the O-ring groove.
Wipe each O-ring with a lint-free cloth and check each carefully for
nicks, dents or flat spots. Replace when necessary.
7.
Wipe the seat on the valve block with a clean, lint free cloth to
remove any contaminants. If necessary, a small amount of alcohol
may be used on the valve block.
CAUTION
Acetone or alcohol is destructive to rubber surfaces such as
the valve s O-ring. When cleaning rubber surfaces use a
clean and dry lint-free cloth.
8.
Wipe the O-ring with a clean, lint-free cloth, then coat it with a thin
film of vacuum grease (Dow Corning High Vacuum Grease is
recommended). The coating should be thin enough so that the
grease is barely visible except for leaving a glossy coat on the
rubber. Replace the O-ring in the valve body.
9.
Wipe the rubber seal on the end of the valve plunger with a clean,
lint-free cloth. Coat the rubber with a thin film of vacuum grease.
10. Replace the spring into the plunger.
11. Replace the plunger into the valve coil.
12. Replace the valve assembly onto the valve block. Be very careful
not to pinch the O-ring. Reattach the four screws and washers.
13. Reattach the two wires onto the proper electrical connectors.
Servicing the Fine, Rough & Reverse Valves
1.
Vent the entire system. Follow the procedure stated in Section 4.6.
2.
Open the rear panel. To open the rear panel, tum the captive screw
at the top of the panel 114 turn counterclockwise and gently lower
the door.
4-27
3.
Remove the two wires from the electrical connectors on the valve.
Make note of which wire is connected to each metal prong (the fine
and reverse valves: the yellow wire is connected to the upper
prong/the striped wire to the lower prong; rough valve: the white
wire to the upper prong, the striped wire to the lower prong and the
green and yellow wire to the outer prong).
4.
Remove the four screws and washers. Remove the valve assembly.
5.
Remove the plunger and spring out of the valve coil.
6.
The valve's O-ring is in the valve block. Remove it with a plastic or
other non-metallic instrument. Do not use metal or any other hard
instruments as they may scratch the O-ring groove. Wipe the O-ring
with a lint-free cloth and check each carefully for nicks, dents or fiat
spots. Replace when necessary.
7.
Wipe the seat on the valve block with a clean, lint-free cloth to
remove any contaminants. If necessary, a small amount of alcohol
may be used on the valve block.
CAUTION
Acetone or alcohol is destructive to rubber surfaces such as
the valve s O-ring. When cleaning rubber surfaces use
clean and dry lint-free cloth.
a
8.
Clean the plunger and the rubber seal with a lint-free cloth. Coat the
face of the seal completely with a very thin covering of vacuum
grease (Dow Coming High Vacuum Grease is recommended). The
coating should be thin enough so that the grease is barely visible
except for leaving a glossy coat on the seat.
9.
Replace the spring into the plunger and the plunger into the valve
coil.
10. Coat the O-ring with a thin covering of vacuum grease. Replace the
O-ring into the groove on the valve block.
11. Align the valve assembly with the holes on the valve block (the
electrical connector should be on the right side). Replace the screws
and washers removed in Step 4. Reattach the wires onto the proper
electrical connectors.
4-28
Servicing the Gross Valve
1.
Vent the entire system. Follow the procedure stated in Section 4.6.
2.
Open the rear panel. To open the rear panel, turn the captive screw
at the top of the panel 114 turn counterclockwise and gently lower
the door.
3.
The gross valve is labeled and is mounted near the middle of the
valve block. Remove the screws that hold the internal valve
mechanism and the valve restrictor plate. Identify each screw as
they are removed; the two pairs are different in length.
4.
While using lint-free gloves, remove the two O-rings with a plastic
tool. Do not use metal or any other hard instruments as they may
scratch the O-ring groove. Wipe each O-ring with a lint-free cloth
and check each carefully for nicks, dents or fiat spots. Replace when
necessary.
5.
Remove the restrictor plate from the valve. Special attention should
be given to the hole at the mid-point of the restrictor plate. It is very
small and this passage must not be impeded in any way if the
Spectron 600 is to function properly. Clean the restrictor plate and
its seat with a lint-free cloth. The coating should be thin enough so
that the grease is barely visible except for leaving a glossy coat on
the, plate.
6.
Coat each O-ring completely with a very thin covering of vacuum
grease (Dow Corning High Vacuum Grease recommended). The
coating should be thin enough so that the grease is barely visible
except for leaving a glossy coat on the O-ring.
7.
With a lint-free cloth wipe off any grease or dirt on the O-ring seats.
8.
With even pressure replace the O-rings into their respective O-ring
seats. Make sure that each O-ring is securely mounted, failure to
mount the ring properly will cause the valve to malfunction or fail
completely.
9.
Re-attach the valve coil and restrictor plate with the two screws
removed in Step 3.
4-29
Servicing the Purge and Sniff Valves
1.
Vent the entire system. Follow the procedure stated in Section 4.6.
2.
Open the rear panel. To open the rear panel, turn the captive screw
at the top of the panel 114 turn counterclockwise and gently lower
the door.
3.
The valves are labeled and mounted on the valve block. Remove the
lower left and upper right screws to access the internal valve
mechanism.
4.
While using lint-free gloves, remove the two O-rings, the small inner
O-ring and the larger outer O-ring with a plastic tool. Do not use
metal or any other hard instruments as they may scratch the O-ring
groove. Wipe each O-ring with a lint-free cloth and check each
carefully for nicks, dents or flat spots. Replace when necessary.
5.
Coat each O-ring completely with a very thin covering of vacuum
grease (Dow Corning High Vacuum grease recommended). The
coating should be thin enough so that the grease is barely visible
except for leaving a glossy coat on the O-ring.
6.
With a lint-free cloth wipe off any grease or dirt on the O-ring seats.
7.
With even pressure replace the O-rings into their respective O-ring
seats. Make sure that each O-ring is securely mounted, failure to
mount the ring properly will cause the valve to malfunction or fail
completely.
8.
Re-attach the valve coil with the two screws removed in Step 3.
Replacing the Filaments
To replace burned out filaments the Spectron 600 must be vented to permit the
removal of the source from the mass spectrometer (illustrated in Figure 4-4).
The procedure to replace the filaments is:
1.
Vent the entire system. Follow the procedure stated in Section 4.6.
2.
While holding the source assembly, gently pull off the source
connector.
4-30
3.
Loosen the four screws that hold the heat sink onto the source
assembly. Remove the four screws and pull the heat sink off the
source assembly.
4. Loosen and remove the remaining two screws holding the source
assembly in place.
5.
Remove the source assembly.
6.
On the source assembly, remove the two outer nuts that hold the
filament contacts in place.
7.
Gently bend (away and down) the filament contacts away from the
source assembly.
8.
Remove the two nuts that hold the ceramic spacer in place. Remove
the spacer.
9.
ReplOve the filament assembly.
Installation:
10. Carefully bend both filament contacts slightly more then 90° away
from the filament side of the assembly.
11. Place the filament on the source assembly. Guide the contacts with
the slots provided on the ceramic block.
12. Place the ceramic spacer on the source assembly. Reattach the
spacer with the nuts removed in Step 8.
13. Slide the filament up or down in the slots of the ceramic block until
the top edge of the filament is aligned with the center slit of the
source assembly (refer to Figure 4-3).
Figure 4-3
Filament Alignment
4-31
Figure 4-4
The Source
(Filament Replacement)
4-32
14. Lightly tighten the nuts removed in Step 6 so that the filament
assembly is secured to the source housing.
NOTE
Do not over-tighten the nuts. Over tightening will cause
the ceramic block to crack.
15. Bend the filament contacts so that they touch the stud posts of the
source. Make sure that the nuts holding the contacts are tight.
16. Remove the O-ring with the bottom of the source assembly. Clean
with a dry cloth. Refer to Section 4.7 for information on how to
remove, clean and install O-rings.
17. Apply a thin coating of vacuum grease and re-insert the O-ring back
into the O-ring slot.
18. Reattach the source assembly with the two screws removed in
Step 4.
19. Reattach the heat sink that covers the source assembly with the
screws removed in Step 3.
20. Reattach the source connector to the source assembly.
Replacing the Internal Leak Standard
The internal leak standard, installed in the Spectron 600 at the factory, wi111ast
indefinitely but should be returned annually to Edwards for recalibration (contact
Edwards Customer Service for information). removal or replacement of the
standard must be performed with the unit powered down and the unit vented (as
stated in Section 4.6).
The procedure for replacing the internal leak standard is:
1.
Power down the Spectron 600.
2.
Open the rear panel by loosening the captive screw at the top of the
panel and gently lowering the door.
3.
Disconnect the temperature sensor electrical connector.
4-33
4.
Cut any tie wraps surrounding the sensor make sure that the only
object connected to the sensor is the calibrator.
5.
Push the quick release button on the calibrator body. Remove the
temperature sensor and leak standard by pulling the fitting down,
angling it out and then pulling out the fitting while the temperature
sensor is still attached to it.
6.
Remove the temperature sensor from the leak standard and reattach
to a new leak standard.
7.
Install the new leak standard and temperature sensor onto the
calibrator body. Place the fitting in the unit, angling the fitting in
the same manner as in Step 5 and then pressing the fitting into the
calibrator body. A positive click indicates that the standard has been
correctly installed.
Circuit Board Replacement
The Spectron 600 contains three circuit boards in the unit and one circuit board
in the optional hand held remote. Circuit Board A is mounted on the inside of
the unit's rear panel, Circuit Board B is mounted on the inside of the unit's front
panel, Circuit Board C is located underneath and attached to the User Panel and
Circuit Board D is the board within the handheld remote.
NOTE:
The CPU board mounts to the A board.
WARNING I
The Spectron 600 must be turned OFF and disconnected from the
electrical supply prior to any repair or replacement of any of the circuit
boards. When the unit is powered ON, potentially lethal high voltages
are continually applied to the circuit boards and other areas within the
unit during its operation. Failure to follow this precaution may lead to
severe injury or death.
To replace Circuit Board A:
1.
Open the rear door of the unit by turning the captive screw at the top
of door 114 tum and then gently lowering the door.
2.
Loosen and remove the screws that hold the shield that covers the
board. Remove the shield.
4-34
3.
Remove all of the electrical connectors from the board. Label each
connector prior to removal. Note the polarity of each connector.
4.
Loosen and remove the screws that hold down the board. Remove
the board.
5.
Place the new circuit board on the door. Re-attach the board to the
door with .the screws removed in Step 4.
6.
Re-attach the electrical connectors removed in Step 3. Be careful to
note the polarity of each connector.
7.
Re-attach the shield removed in Step 2.
To replace Circuit Board B:
1.
Open the front door of the unit by turning the captive screw at the
top of door 1/4 turn and then gently lowering the door.
2.
Loosen and remove the screws on the shield that covers the board.
Remove the shield.
3.
Remove all of the electrical connectors from the board. Label each
connector prior to removal. Note the polarity of each connector.
4.
Loosen and remove the screws that hold down the board. Remove
the board.
5.
Place the new circuit board on the door. Re-attach the board to the
door with the screws removed in Step 4.
6.
Re-attach the electrical connectors removed in Step 3. Be careful to
note the polarity of each connector.
7.
Re-attach the shield removed in Step 2.
To replace Circuit Board C:
Replacement by Edwards service personnel is recommended.
To replace Circuit Board D:
Replacement for the entire assembly (the handheld remote) is required.
4-35
Replacing Fuses
Two fuses are installed in a removable holder located to the right of the AC
power input (see figure 2-2). Release the holder by gently pushing in the tab on
its left side. Refer to page 1-10 to determine your unit's power requirements and
appropriate fuse rating.
4.10
Troubleshooting Aids
The Spectron 600 computer continually monitors all system status and operational data. If an error is detected, it will immediately display that error on the
User Panel. If any part of the leak detector's equipment needs to be shut down
or if its operation needs to be altered in any way, the computer will instantaneously perform the neccesary function.
The Error Code will appear on the Control Panel. Specifically, the error code
EE appears in the numeric display of the User Panel. At the same time, the
alphanumeric display indicates the specific Error Code (e.g., ERROR 08).
The following table lists and describes the unit's error or fault and explains the
unit's reaction to the problem. Also included in the table are the probable causes
and recommended corrective actions necessary for repair of the unit.
4-36
Table 4-1: Spectro" 600 Error Codes
ERROR 01:
Forellne Maximum Error.
Forellne Pressure has exceeded
4,000 mliliTorr.
ERROR 02:
HI-Vac Error
1) High-vacuum section
pressure higher than
5 x 1Q-4 Torr In testing mode.
2) High-vacuum section
pressure higher than 5 x 1Q-4
Torr during a TUNE procedure
ERROR 04:
Auto Zero Error
The Leak the User has
attempted to "Auto Zero" Is too
large for the system s Auto Zero
function to handle.
ERROR 05:
Forellne Test Error
The forellne region pressure has
exceeded 2,500 mllliTorr.
System senses high pressure In the forellne
region. The unit has switched off the filament,
closed all valves except the fore line valve and
has shut down the turbomolecular pump. The
system will walt 20 seconds and will determine
If the pressure In the forellne section has
dropped below 100 mlillTorr. If the pressure has
not dropped, the system will repeat this
procedure ten times. If the pressure Is stili
too high the unit will shut off.
1) Vacuum System Leak.
2) Crossover 1 Is set too high for
the size or gas load of the test
object.
3) Uncallbrated forellne plrani.
4) Defective circuit board A.
1) Isolate and repair leaking
valve or O-ring.
2) a. Lower the Crossover 1
setpolnt.
b. Increase the Reverse
Rough Close Delay (D7).
3) Calibrate the forellne plrani.
4) Replace circuit board A.
The system has switched off the filament,
waited ten seconds and turned the filament
back on. If this condition persists, the User
should cancel the testing procedure. If the
unit Is already In the Standby mode, no
testing Is allowed.
1) High-vacuum pressure burst Is
too powerful.
2) Vacuum system leak.
3) Defective circuit board B.
1) a. Lower the Crossover 2
setpoint.
b. Increase the Fine
Crossover Delay (D1)
and or the Direct Rough
Close Delay (02).
2) Isolate and repair the
leaking valve or O-ring.
3) Replace circuit board B.
The Auto Zero function will not be enabled. This
error Is not self clearing. To clear the error and
start another test cycle, place the unit In
Standby Mode and press the ZERO momentary
switch again.
The test object has a leak that Is
too large for the current test
mode.
1) Change the test mode.
2) Allow the unit to pump away
excess helium (while In
Standby mode).
With the exception of the forellne valve, all vacuum system valves that are open will be closed.
The unit places Itself In Standby mode.
1) Crossover 1 setpolnt has been
set at too high a level.
2) Vacuum system leak.
1) a. Lower the Crossover 1
setpolnt.
b. Increase the Reverse
Rough Close Delay (07).
2) Isolate and repair the
leaking valve or C-rlng.
ERROR 07:
High Voltage Error
The system will shut off the filament, shut all
valves and turn off all pumps.
1) Short In the Mass
Spectrometer source (usually
have Error 10 at the same
time).
2) Malfunctioning Circuit
Board B.
3) Malfunctioning power supply.
1) Clean the Mass
Spectrometer source.
2) Replace Circuit Board B
3) The power supply should be
replaced. Contact the
Service Department at
Edwards.
System will keep working, the error will still
be displayed on the User Panel.
The useful life of the filament
has expired or the filament is
defective.
1) Change to other filament
(using the Filament 1/2
momentary switch on the
Service Panel).
2) Replace the filament.
After a twenty second delay, the unit will"
again measure the temperature. If the
temperature Is still too high, the unit will
measure the temperature ten successive
times to see If the temperature Is within an
acceptable range. If the temperature is still
too high the unit will shut down.
1) Ambient temperature may
be too high for the unit to
function.
2) Internal fan may have failed.
3) Temperature sensor defective.
1) The unit must be placed in
an area with a lower
ambient temperature.
2) Replace the Internal fan.
3) Replace temperature
sensor.
During testing, the system will display the error
on the User Panel. If the unit Is performing a
Tune or Calibration Check sequence, the system
will abort the procedure. The User cannot perform a Calibration Check sequence after this
error has occurred.
1) Unit Is improperly tuned
2) The filament Is not properly
aligned within the Source.
3) Short In the Mass
Spectrometer Source (usually
accompanied by Error 07).
1) Perform the TUNE sequence.
2) Re-align or replace the
filament.
3) Clean the Mass Spectrometer
Source.
One or more of the high-voltage
supplies on Circuit Board B
has/have failed.
ERROR 08:
Low Filament Error
Filament current has dropped
below 1 Ampere.
ERROR 09:
High Temperature Error
Temperature within the unit is too
high for the leak detector to functlon accurately (the temperature
sensor reading is >60°C).
ERROR 10:
Emission Error
The filament emission current Is
below Its allowable limit (4.7
mAl·
:.:::::~:~:;::::::::.
:::::::~:~:.:.~.
ERROR 11:
PC Remote Error
Optional remote computer error.
ERROR 13:
Rough Time Error
Test port pressure cannot be
pumped to crossover pressure
within the allotted time (5
minutes). This error will only
occur when the unit Is
performing a Calibration Check
or during the Tune procedure.
ERROR 18
Printer Error
Optional printer Is not
responding.
The system Is stili usable, however, the
remote computer Is probably Inoperative.
This error Is not self clearing. To clear the
error and resume testing, place the unit In
Standby Mode and press the ZERO
momentary switch.
1) Improper connection between
the leak detector and the
remote.
2) Defective cable.
3) Defective remote PC.
1) Re-connect cable between
the leak detector and the
remote computer.
2) Replace cable.
3) Repalrlreplace remote PC.
The system will abort the Calibration Check
or the Tune procedure. This error Is not self
clearing. To clear the error and to resume
testing, place the unit In Standby Mode and
press the ZERO momentary switch.
1) ObJect attached to the test
port Is not secure.
2) Contaminated 011 In the rough .
pump.
3) Mlscallbrated test port plranl.
4) Defective test port plranl.
1) Reattach the Test ObJect to
the Test Port.
2) Change the 011 In the Rough
Pump.
3) Recallbrate the Test Port
Plranl.
4) Replace the Test Port Plranl.
The system will display the error. All other
functions will continue. This error Is not
self clearing. To clear the error, place the
unit In Standby mode and press the Zero
momentary switch.
1) Printer not switched on.
2) No paper In printer.
3) Defective cable between the
unit and the printer.
4) Cable not securely attached to
the printer or to the leak
detector
5) Defective printer.
1)
2)
3)
4)
5)
1) The value of the Internal
calibrator has been
programmed Incorrectly.
2) The Tune cycle was
Interrupted, or there Is a
problem with the selected
filament.
1) Reprogram the Internal
calibrator leak rste and
temperature to the values
stamped on the calibrator.
2) Switch to the other filament
and re-tune the unit.
..
ERROR 20
Gain Too Low Error
At end of a Tune or Calibration
cycle, one of the system gains
(either G2 or G3) has been set
below the allowable limits.
The system will display the error on the
user panel. Testing will not be allowed.
This error Is not self clearing and may only
be cleared by performing a successful Tune
or Cal CheckiCal sequence
Switch printer on.
Add paper to printer.
Replace printer cable.
Reattach printer cable.
Repair or replace printer.
ERROR 22:
Temperatura Low Error
The temperatura sensor
Indicates a raadlng below 10·C.
ERROR 23:
Can t Peak Error
During a Tune cycle, while the
unit scans the voltages emitted
by the source, the unit cannot
Identify a leak rate peak
(Indicating helium).
ERROR 24:
High Gain Error
At the end of a Tune cycle or a
Calibration function, the unit
cannot supply a "gain" (G2 or
G3) within system limits
(maximum 10.0)
After a twenty second delay, the unit will
again measure the temperature. If the
temperature Is stili too low, the unit will
measure the temperature ten successive
times to see If the temperature Is within an
acceptable range. If the temperature Is stili
too low the unit will shut down.
1) Ambient temperature Is
too low for the unit to function
properly.
2) Defective temperature sensor.
3) Defective circuit board A.
1) The unit must be placed In
an area with a higher
ambient temperature.
2) Replace sensor.
3) Replace circuit board A.
System aborts the Tune cycle. In order to
resume testing or to attempt to re-tune the
unit, place the unit In Standby Mode and
press the ZERO momentary switch.
1) Filament was shut off or
switched during tuning
2) Filament failed during the
Tune
cycle.
3) Magnets attached to Mass
Spectrometer housing are
Improperly aligned.
4) Contaminated Source.
1) Verify that the desired filament
Is selected and on, and
reattempt the Tune cycle.
2) Switch to the other filament,
verify that It Is working (green
LED) and reattempt Tune
cycle.
3) Realign or raplace the
magnets attached to the
spectrometer housing.
4) Clean the Source.
The system will display the error on the
User Panel. This error Is not seH-clearlng.
The error may only be cleared by
performing a successful Tune or Cal
Check/Cal sequence.
1) Tune cycle was Interrupted
2) The Internal calibrator leak
rate has been programmed
Incorrectly.
3) Filament emission Is unstable
or below five milliamps.
4) Mass Spectrometer has
become significantly
contaminated.
5) Internal calibrator has failed.
1) Perform another Tune or
Calibration Check
procedure.
2) Reprogram the calibrator
leak rate and temperature to
the values stamped on the
calibrator.
3) Check that the filament
emission Is stable and at
approximately 5 milliamps
(by using the Emission
function on the Service Panel).
If the emission Is not stable
replace the filament.
4) Clean the Mass Spectrometer
housing, then retune.
5) Replace the Internal leak
standard.
....;.:::::::::::;:::.:.:......... .
ERROR 26:
Turbo Fall Error
The system has shut off the filament, rough
pumps, turbomolecular pump and has
closed all valves
1) Defective "A" circuit board.
2) Turbomolecular pump
electronic controller has
failed.
3) Turbomolecular pump has
failed.
1) Replace the "A" circuit
board
2) Replace the turbomolecular
pump controller
3) Replace the turbomolecular
pump
The handheld remote functions are
Inoperative. This error Is not self-clearlng.
To clear the error and resume the test
cycle, place the unit In Standby Mode and
press the ZERO momentary switch.
1) Plug for cable Is not properly
connected.
2) Handheld remote cable Is
defective.
3) Defective remote.
1) Ensure that the connection
between the cable and the
unit Is secure.
2) Replace the cable.
3) Replace the remote.
The system will continue to operate, but
testing will not be allowed.
1) The Source repeller Is broken
or contaminated.
2) The circuit board card B Is
defective.
1) Rebuild or replace the
Source.
2) Replace circuit board B.
The system has detected an
error with the turbomolecular
pump system
ERROR 30:
Handheld Remote Error
Transmission error between the
handheld remote and the main
unit.
ERROR 33:
Repeller Fall Error
There Is a discontinuity In the
circuitry for the Mass
Spectrometer Source repeller.
I
I
©[XJ8[J)VB[RS CSDWB
Parts List
5.1
Introduction
This chapter contains a listing of recommended spare parts for the Spectron 600
(Section 5.2) plus a detailed listing of vacuum system and valve block components necessary for service and repair of the unit (Section 5.3). Exploded views
of the vacuum system and valve block are illustrated in Figures 5-1 and 5-2.
Both illustrations contain item numbers for the replaceable components of the
sub-system. Each illustration has an accompanying table where the numbered
components in the illustration are listed, along with an Edwards part (catalog)
number and a brief description of the item. The information in this chapter, in
conjunction with the instructions found in the preceding chapters will allow
service personnel to disassemble, repair and reassemble virtually any worn or
malfunctioning component contained within the Spectron 600.
5-1
5.2
Recommended Spare Parts for the Spectron 600
PART NUMBER
DESCRIPTION
DI55-01-816
Mass Spectrometer:
Source Assem~ly
D155-01-817
Source Rebuild Kit
D155-01-815
Collector Assembly
D155-01-818
Filament Kit
D155-01-820
Internal Rough Pump (600T):
E2M1.5 Pump - 115V/50-60 Hz
A371-22-902
E2M1.5 Pump - 230V/50-60 Hz
A371-22-919
Internal Rough Pump (600D):
Diaphragm Pump - 115V/60Hz
D155-04-115
Diaphragm Pump - 230V150Hz
D155-03-230
Diaphragm Pump - 1OOV150Hz
D155-03-100
Drag Pump
D155-03-300
Drag Pump Power Supply
D155-03-310
External Rough Option Kit
D155-01-540
Turbomolecular Pump (EXT70):
B722-01-000
Turbo Controller
D396-20-000
Cable
D396-18-010
DI55-02-826
Pirani Gauge:
5-2
PART NUMBER
DESCRIPTION
Circuit Boards:
8Ss
A Board
D155-01~
B Board
D155-01-S51
C Board
D155-01-S52
D Board
D155-01-S53
CPU Board
D155-0l-S54
Maintenance Kit (600T):
D155-01-Soo
a-Ring Kit
D155-02-Soo
Air Filter
D155-02-S27
Pump Exhaust Filter
D155-02-S40
Filament Kit, Box of 5
D155-02-S20
High Vacuum Grease
U3OO-02-075
Mechanical Pump Oil
Hll0-26-015
Tool Kit
D155-0l-S25
LED Start Switch
D155-02-S54
Fuse; 90 - 115V
D155-02-S53
Fuse; 200 - 260V
D155-02-S52
Filter, Silencer, 1/4" NPT
DI55-02-S42
Filter, Silencer, 1/S" NPT
D155-02-S44
3t>./ f/qcr
See Spectron 600D Addendum
Maintenance Kit (600D):
5-3
5.3
Optional Accessories
DESCRIPTION
PART NUMBER
Cart
D155-0l-500
Stanless Steel Cart
D155-05-500
Hand Held Remote
D155-01-510
Vacuum Sniffer Probe
D155-01-520
Hard Travel Case
D155-0l-530
External Roughing Option Kit
D155-0l-540
.
5-4
-.., --
5-5
5.4
Other Components
Refer to figures 5-1 and 5-2 for exploded views of the Spectron 600 Vacuum
System and Valve Block, respectively. The numbered parts in each illustration
are listed, along with their Edwards part number and a brief description, in the
accompanying tables.
TABLE 5-1
VACUUM SYSTEM
EDWARDS PIN
DESCRIPTION
1
DI55-02-S20
Test Port
2
DI55-02-S0S
O-ring, Test Port Manifold
3
Commercial
Screw, #10-32 x 7/16"
Commercial
Lockwasher, # 10
ITEM #
4
-----------
Valve Block Assembly
5
DI55-02-S34
Elbow, 114" NPT, MIF
6
DI55-02-S26
Pirani Gauge, Foreline
7
DI55-02-S25
Manifold, Foreline
S
CI05-12-304
Clamp, NW16
9
CI05-12-394
Centering Ring, NW16
10
B722-01-000
Turbomolecular Pump
11
B271-5S-170
Centering Ring, ISO 63
12
D155-02-S30
Claw Clamp
13
DI55-02-S23
Manifold, High Vacuum
14
CI05-12-304
Clamp, NW16
15
CI05-12-394
Centering Ring, NW 16
16
Commercial
Screw, #10-32 x 7/16"
Commercial
Lockwasher, # 10
17
DI55-02-S07
O-Ring, High Vacuum Manifold
IS
DI55-0l-S16
Mass Spectrometer Assembly
19
D155-02-S24
Heat Sink
20
Commercial
Screw, #6-32 x 1/2", Socket Head Cap
Commercial
Lockwasher
D155-02-S16
Calibrator Body
D155-02-S51
Calibrator Temperature Sensor Assembly
21
Calibrator Valve Block
22
D155-02-S50
Calibrator Valve
D155-02-S44
Filter, Sintered, 1/S" NPT
Commercial
Screw, #S-32 x 1 3/S"
Commercial
Lockwasher, #S
25
D155-02-S06
O-Ring, Foreline Manifold
26
Commercial
Screw, 10-32 x 7/16", Socket Head Cap
Commercial
Lockwasher, #10
23
24
5-7
e
C-'
c.a
(
--
T
TABLE 5-2
VALVE BLOCK ASSEMBLY
EDWARDS PIN
DESCRIPTION
1
DI55-02-817
Upper Valve Block
2
DI55-02-845
-
Fine (Direct Valve)
DI55-02-802
Replacement O-Ring, Fine Valve
DI55-02-846
Vent Valve
DI55-02-814
Replacement O-Ring, Vent Valve
DI55-02-847
Rough Valve (100 - 115V Systems)
DI55-02-848
Rough Valve (230 - 240V Systems)
DI55-02-802
Replacement O-ring, Rough Valve
DI55-02-845
Foreline (Reverse) Valve
DI55-02-802
Replacement O-Ring, Foreline Valve
DI55-02-849
Gross Valve
DI55-02-831
Screw, Pan Head, M3 x .5, 45mm Ig.
ITEM #
3
4
5
6
D 155-02-811
Replacement O-Ring, Gross Valve Manifold
DI55-02-812
Replacement O-Ring, Gross Valve Manifold
DI55-02-813
Replacement O-Ring, Gross Valve Body
7
DI55-02-822
Gross Restrictor Plate
8
DI55-02-81O
O-Ring, Gross Restrictor Plate
9
DI55-02-801
O-Ring, Gross Restrictor Plate
10
DI55-02-849
Sniff Valve
DI55-02-811
Replacement O-Ring, Sniff Valve Body
DI55-02-812
Replacement O-Ring, Sniff Valve Body
DI55-02-813
Replacement O-Ring, Sniff Valve Body
5-9
13
DI55-02-S44
Filter, Sintered, 1/S" NPT
14
DI55-02-S49
Purge Valve
0155-02-S11
Replacement O-Ring, Purge Valve Manifold
DI55-02-S12
Replacement O-Ring, Purge Valve Manifold
D155-02-S13
.
Commercial
Replacement O-Ring, Purge Valve Body
Commercial
Lockwasher, # 10
16
DI55-02-S32
Elbow, 1/S" NPT to 1/4" Tube, Purge
17
DI55-02-S32
Elbow, 1/S" NPT to 1/4" Tube, Sniff
IS
DI55-02-S1S
Lower Valve Block
19
DI55-02-S06
O-Ring, Valve Block
20
DI55-02-S42
Filter, Sintered, 1/4" NPT
21
DI55-02-S09
O-Ring, Valve Block Cover
22
DI55-02-S19
Valve Block Cover
23
Commercial
Screw, #10-32 x 7/S", Flat Head
24
DI55-02-S35
Nipple, 1/4"NPT, Long
25
DI55-02-S39
Elbow, 1/4" NPT, Female
26
DI55-02-S26
Pirani Gauge, Test Port
15
Screw, #10-32 x 1 3/4", Socket Head Cap
5-10
&[email protected])DM
&
Glossary Of Terms Used In
Leak Detection
1.
Leak - In vacuum technology a hole, or porosity, in the wall of an
enclosure capable -of passing gas from one side of the wall to the
other under action of a pressure or concentration differential existing
across the wall.
2.
Gross Leak - A leak which exhibits a leak rate in the range of 10-4 to
1 atm cc/sec or higher.
3.
Fine Leak - A leak which exhibits a leak rate in the range of 10-5 to
lO- n atm cc/sec or lower.
4.
Leak Rate - In leak detection practice, leak rate is defined as the rate
of flow (in pressure-volume units per unit time) through a leak with
gas at a specified high pressure (usually atmospheric pressure) on the
inlet side and gas at a pressure on the exit side which is low enough
to have negligible effect on the rate of flow.
5.
Leak Detector - A device for detecting and locating leaks, and
indicating the magnitude thereof.
6.
Tracer Gas - A gas which, passing through a leak, can then be
detected by a specific leak detector and thus disclose the presence of
a leak. Also called search gas.
7.
Probe Gas - A tracer gas which issues from a more-or-Iess fine
orifice so as to impinge on a restricted test area.
8.
Pressure Testing - A leak detecting procedure in which tracer gas is
introduced under pressure into the enclosure under examination, and
detected as it is emitted from a leak.
9.
Soap Bubble Test - A type of pressure testing in which the tracer gas
is detected by bubbles formed in a layer of soap solution applied to
the surface of the test object.
B-i
10. Vacuum Testing - A leak detecting procedure in which the enclosure
under examination is evacuated, a tracer gas applied to the outside
surface of the enclosure, and the gas detected after entering the
enclosure.
11. Mass Spectrometer Leak Detector - A mass spectrometer adjusted to
respond only to tracer gas. Helium is commonly used as the tracer
gas, and thus the instrument is normally referred to as a helium leak
detector
12. Spectrometer Thbe - The sensing element of a mass spectrometer
leak detector.
13. Ion Source - That part of a spectrometer tube in which tracer gas is
ionized preliminary to being detected.
14. Noise Level- In the case of a leak detector, the spurious output,
expressed in suitable terms, exhibited by the detector in the absence
of an output due to tracer gas.
15. Background - In the case of a leak detector, the spurious output,
expressed in suitable terms, due to the response to other gases than
the actual gas being used for probing. The background may be
inherent in the detector, or accidental.
16. Minimum Detectable Pressure Change - The pressure producing an
indication of three times the noise level.
17. Minimum Detectable Leak
a. The size of the smallest leak, expressed in terms of mass flow
per unit time that can be unambiguously detected by a leak
detector in the presence of noise and background.
b. The product of the minimum detectable pressure change and the
pumping speed at the detector
18. Probe Test - A leak test in which the tracer gas is applied by means
of a probe (see below) so that the area covered by the tracer gas is
localized. This enables the individual leaks to be located.
19. Probe - A tube having a fine opening at one end, used for directing a
stream of tracer gas.
B-ii
20. Sampling Probe - A device used in pressure testing and so designed
as to collect tracer gas from a restricted area of the test object and
feed it to the leak detector. Also called pressure probe or sniffer.
21. Hood Test - An overall test in which an object under vacuum test is
enclosed by a "hood" which is filled with tracer gas so as to subject
all parts of the test object to examination at one time.
22. Isolation Test - A method of determining whether a leak is present in
a system, or of obtaining an estimate of its magnitude, by observing
the rate of rise of pressure in the evacuated system when the system
is isolated from the pump. Also called rate of rise test.
23. Masking - The covering of a section of a test object so as to prevent
tracer gas from entering leaks that may exist in the covered section.
24. Flooded System - A system which, while being leak tested under .
vacuum, becomes so filled with tracer gas as to make impracticable
further leak detection by means of a probe.
25. Helium Drift - In the case of leak detection with a helium probe, the
drift of helium to a leak or permeable gasket located at a point
sufficiently remote from the end of the probe to mislead the operator
into suspecting the area near the probe.
26. Standard Leak
a. A device which permits leakage through it, at a specified rate, of
a specified gas, with atmospheric pressure at one end of the
device and a pressure on the other side sufficiently low to have
negligible effect on the leak rate.
b. A capillary or porous wall leak, usually in a glass or metal tube,
whose dimensions have been adjusted to give a conductance
within specified limits for a specified gas at a standard reference
temperature with specified inlet and exit pressures. Standard
leaks for attaching to vacuum test manifolds with air at
atmospheric pressure exposed to the inlet are usually protected
by filters to avoid clogging by dust particles. Standard leaks for
calibrating mass spectrometers are usually fused to a glass
reservoir containing the specified gas at a known high pressure.
c. A device providing a known throughput into a vacuum system.
Also referred to as a calibrated leak.
a-iii
&[P[[email protected])DM
[ID
A. V.S. Standards
Standards of the American Vacuum Society for the
Testing of Mass Spectrometer Leak Detectors
The following paragraphs are extracted, with pennission of the American
Vacuum Society, from AVS Standards used in defining and testing the
operation of mass spectrometer leak detectors. They have been selected
because of their application in the testing of Edwards leak detectors.
Copies of complete AVS Standard 2.1 ("Calibration of Leak Detectors of
the Mass Spectrometer Type") and AVS Standard 2.3 ("Procedure for the
Calibration of Gas Analyzers of the Mass Spectrometry Type") are
available by writing to Edwards.
© Copyrights 1972, 1973 by the American Vacuum Society
AVS Standard 2.1
3.1 BACKGROUND
3.1.1 General
In general, background is the total spurious indication given by the leak
detector without injected search gas. Background can originate in either
the mass spectrometer tube or the associated electric and electronic
circuitry, or both. (Frequently, the term is used to refer specifically to the
indication due to ions other than those produced from injected search gas).
3.1.2 Drift
The relatively slow change in the background. The significant parameter
is the maximum drift measured in a specified period of time.
3.1.3 Noise
The relatively rapid changes in the background. The significant parameter
is the noise measured in a specified period of time.
b-I
3.1.4 Helium Background
Background due to helium released from the walls of the leak detector or
leak detection system.
3.4 LEAKS
3.4.1 Leak (n)
In vacuum technology a hole, porosity, permeable element, or other
structure in the wall of an enclosure capable of passing gas from one side
of the wall to the other under action of a pressure or concentration
difference existing across the wall.
Also, a device which can be used to introduce gas into an evacuated
system.
3.4.1.1 Channel Leak
A leak which consists of one or more discrete passages that may be ideally
treated as long capillaries.
3.4.1.2 Membrane Leak
A leak which permits gas flow by permeation of the gas through a
nonporous wall. For helium, this may be a wall of glass, quartz, or other
suitable material.
3.4.1.3 Molecular Leak
A leak through which the mass rate of flow is substantially proportional to
the reciprocal of the square root of the molecular weight of the flowing
gas.
3.4.1.4 Viscous Leak
A leak through which the mass rate of flow is substantially proportional to
the reciprocal of the viscosity of the flowing gas.
3.4.2 Calibrated Leak
A calibrated leak for which the rate of leakage is known under standard
conditions, namely, 23±3°C, a pressure of 760 Torr ±5% at one end of the
leak, and a pressure at the other end so low as to have a negligible effect
on the leak rate.
b-ii
3.4.3 Virtual J..eak
The semblance of a leak. due to the evolution of a gas or vapor within a
system.
3.5 LEAK RATES
3.5.1 Leak Rate
The mass rate (also called "throughput"; differentiated from volume rate
of flow (liters/sec) also called pumping speed), in Torr liters/sec (or Pa
m3/sec) at which a specified gas passes through a leak. under specific
conditions.
3.5.2 Standard Air Leak Rate
The mass rate of flow, through a leak, of atmospheric air of dew point less
than -25°C under standard conditions specified as follows: the inlet
pressure shall be less than 760 Torr ±5%, the outlet pressure shall be less
than 10 Torr and the temperature shall be 23±3 0c.
3.5.3
Equivalent Standard Air Leak Rate
Short path leaks having standard air leak. rates less than 10-6-10-7 Torr
liters/sec (10- 7-10-8 Pa m3/sec) are of the molecular type (see Sec 3.4.1.3).
Consequently, helium (mol. wt 4) passes through such leaks more rapidly
than air (mol. wt 29) and a given flow rate of helium corresponds to a
smaller flow rate of air. In this recommendation, helium flow is measured
and the "equivalent standard air leak. rate" is taken as (4/29)' = 0.37 times
the helium leak. rate under standard conditions (see Sec 3.5.2).
3.8 SENSITIVITY TERMS
3.8.1 Sensitivity
The sensitivity of a device is the change in output of the device divided by
the change in input which caused the response.
3.8.2 Minimum Detectable Signal
An output signal due to incoming search gas which is equal in magnitude
to the sum of the noise and the drift.
3.8.3 Minimum Detectable Leak (or Minimum Detectable Leak Rate)
The smallest leak., as specified by its standard air leak. rate, that can be
detected unambiguously by a given leak. detector. The minimum
b-iii
detectable leak rate depends on a number of factors. One of the purposes
of this Standard is to describe practical procedures for determining
minimum detectable leak rate, taking into account background, volume
rate of flow (pumping speed), and time factor.
3.8.4 Minimum Detectable Concentration Ratio
The smallest concentration ratio of a given search gas in an air mixture
that can be detected unambiguously by a given leak detector when the
mixture is fed to the detector at such a rate as to raise the pressure in the
instrument to some optimum high value. In this Standard, the minimum
detectable leak rate is calculated by a somewhat arbitrary procedure
from observations of the response of leak detector to a helium-air mixture
of known helium concentration ratio.
5 Test Procedure Minimum Detectable Leak
5.1 DRIFT AND NOISE OBSERVATION
5.1.1
The output of the leak detector is connected to the recorder, the leak
detector being at its maximum sensitivity setting and the inlet valve
closed.
5.1.2
The leak detector backing-off (or zero) control is adjusted so that the
recorder reading is approximately 50% of full scale, the filament being on.
5.1.3
The output is recorded for 20 min. or until the output has reached full
scale, for positive drift, or zero, for negative drift.
5.1.4
Draw a series of line segments intersecting the curve recorded in Sec. 5.1.3, the
lines to be drawn at I-min. intervals at right angles to the time axis (abscissa) of
the chart, and to commence at the point where the procedure of Sec. 5.1.3 is
started. The lines so drawn will be called the "I-min lines."
Draw straight-line approximations for each segment of the curve between
adjacent I-min lines.
b-iv
5.2 DRIFT AND NOISE DETERMINATION
5.2.1
Examine the straight line approximations of Sec. 5.1.4 to determine that
I-min segment of the output curve having the greatest slope. This greatest
slope is measured in scale divisions per minute and is called the drift. If
the greatest slope is less than the scale divisions corresponding to 2% of
full scale of the recorder, the total (absolute) change in output over the
20-min period is determined. The total change is divided by 20 is then called
the drift.
5.2.2
For each I-min segment of the curve, determine the maximum (absolute)
deviation of the recorded curve from the straight-line approximation.
5.2.3
The average of these maximum deviations, multiplied by 2, is called the
noise (scale divisions).
Note: In detennining the noise, neglect any large deviation (spike) which
occurs less frequently than once in any 5-min interval.
5.3 MINIMUM DETECTABLE SIGNAL
The minimum detectable signal is taken to be equal to the sum of the
absolute values of the drift and of the noise. It should be measured in scale
divisions. If the sum is less than the scale divisions corresponding to 2%
of full scale, then the scale divisions corresponding to 2% of full scale is
called the minimum detectable signal.
5.4 SENSITIVITY DETERMINATION
5.4.1 Arrangement of Apparatus
The leak detector is connected to an auxiliary system. (Frequently, the
auxiliary system is included with the leak detector as an integral part
thereof).
The system should contain a minimum of rubber or other polymeric
surfaces. Preferably, such surfaces should consist only of the exposed
surfaces of an O-ring or O-rings. Accordingly, the "Leak Isolation Valve"
b-v
should 'preferably be of all-metal construction, but in any case should not
act as a significant source of adsorbed or absorbed helium.
5.4.2 Spurious Signal Correction
Note: This determination requires the use of the small calibrated leak. If
the calibrated leak has its own integral valve, and the leak and valve are allmetal construction (except perhaps for the membrane in a membrane-type
leak), Sec. 5.4.2 may be omitted from the procedure.
5.4.2.1
A metal plug is connected to the leak detector
5.4.2.2
The output is zeroed, with the filament on.
5.4.2.3
The leak isolation valve is opened.
5.4.2.4
The pump valve is opened. (Note: For its safety, the filament of the
mass spectrometer tube may be turned off at this point).
5.4.2.5
When the atmospheric air present between the plug and the inlet valve has
been evacuated, the pump valve is closed.
5.4.2.6
The inlet valve is opened promptly, but gradually. The pressure in the
leak detector is allowed to reach a steady value, showing no observable
change in a I-min period.
5.4.2.7
Turn on filament of mass spectrometer tube if it is not on.
5.4.2.8
When the output has reached a steady value, but in any case not longer
than 3 min after Sec. 5.4.2.6. the output reading is noted. If the leak
detector has been set at reduced sensitivity, the reading should be
converted to equivalent scale divisions for full-sensitivity setting.
5.4.2.9
Close the leak isolation valve as rapidly as feasible.
b-v;
5.4.2.10
Note the output reading 10 seconds after closing the isolation valve. As in
5.4.2.8., convert the reading if necessary.
5.4.2.11
Subtract the reading noted in 5.4.2.10 from that noted in 5.4.2.8. If the
difference is negative, it is to be considered equal to zero. The difference
will be called the "spurious-signal correction" and will be applied in Sec.
5.4.3.14.
5.4.2.12
Close the inlet valve.
5.4.2.13
Open the vent valve.
5.4.2.14
Remove only the plug from the inlet line; all connections are to remain in
place.
5.4.2.15
Close the vent valve.
5.4.3 SENSITIVITY
5.4.3.1
Connect the all-meta1leak to the leak detector. However, if the procedure
of 5.4.2. was necessary, the small calibrated leak is put in place of the
plug removed in 5.4.2.14 above, the leak being inserted the same distance
into the connection as the plug had been.
5.4.3.2
The output is zeroed with the filament on.
5.4.3.3
The leak isolation valve is opened.
5.4.3.4
The pump valve is opened.
b-vii
5.4.3.5
Heliwn at 760 Torr ±5% pressure is applied to the leak. If the leak has its
own supply of helium, this step is omitted. (Note: the filament of the
mass spectrometer tube may be turned off before Sec. 5.4.3.6.)
5.4.3.6
When the atmospheric air present between the calibrated leak and the leak
detector has been evacuated, the pump valve is closed.
5.4.3.7
The inlet valve is opened promptly after Sec. 5.4.3.6. The pressure in the
leak detector is allowed to reach a steady value, showing no observable
change in I min.
5.4.3.8
Turn on filament of mass spectrometer tube if it is not on.
5.4.3.9
At this point it may be necessary to change the sensitivity setting. When
the output signal has reached a steady value, showing a change in I min
which is not greater than the drift (as corrected for the sensitivity setting),
the output reading in scale divisions is noted. If the leak detector has been
set at reduced sensitivity, the reading should be converted to the
equivalent scale divisions for full-sensitivity setting.
5.4.3.10
Immediately after the proceeding step, the stopwatch is started and
simultaneously the leak isolation valve is closed as rapidly as practical.
Alternatively, the recorder chart may be marked to indicate the beginning
of the timed period and the leak isolation valve then closed rapidly.
5.4.3.11
The output is observed continuously and the stopwatch is stopped when
the reading has decreased to 37% of the reading observed in Sec. 5.4.3.9.
The reading of the stopwatch is noted (T sec.). Alternatively, the recorder
chart is examined to determine the time T required for the specific
decrease in output. T is the response time (Sec. 3.9.2).
Note: Should response time be a function of sensitivity setting, T as
observed should be corrected to response time at full sensitivity setting,
any other setting was used.
b-viii
if
5.4.3.12
One minute after closing the leak valve (see Sec. 5.4.3.10), the output is
read and noted. Correct for sensitivity setting as in 5.4.3.9.
5.4.3.13
The uncorrected signal due to the calibrated leak shall be taken as the
difference between the reading noted in 5.4.3.9, and that noted in 5.4.3.12,
the required conversion of these readings to equivalent scale divisions at
full-sensitivity setting have been made.
5.4.3.14
The corrected signal due to the calibrated leak is taken as the difference
between the uncorrected signal, Sec. 5.4.3.13, and the spurious signal
correction in 5.4.2.11. The sensitivity is calculated by the formula below
and should always be stated together with the response time, T:
The units are scale divisions (on full sensitivity setting) per unit leak rate
(Sees. 3.5 and 3.8).
Sensitivity, with Response Time, T =
Signal due to Calibrated Leak
Standard or Equivalent Standard Air Leak Rate of
Calibrated Leak
5.5 MINIMUM DETECTABLE LEAK
Referring to Secs. 5.3 and 5.4.3.14, this is calculated from the formula
Minimum Detectable Leak, with Response Time T =
Minimum Detectable Signal
Sensitivity
The units are those of leak rate.
b-ix
AVS Standard 2.3
2.3 SCANS
A scan is usually shown as a trace on a recorder chart, the abscissa is time,
mass, voltage, gauss, etc., and the ordinate is assumed proportional to ion
current or "output". It can also be shown as a table of values, an
oscilloscope trace, etc.·(The term "mass spectrum" is synonymous with
scan or mass scan.) In this standard, it will be assumed for sake of
simplicity that the scan is a recorder trace (see Sec. 7.4 "Recorder"), and
that the recorder displacements are proportional to input currents.
3.11 PEAK WIDTH, W
In a graphical spectrum, the length of the base of a peak, the base being
defined by the intersection or tangency of the legs of the peak with a
reference base line. The specification of such a reference line is an
important function of this standard. In some discussions, the symbol L\m
or L\M is used for peak width rather than W. The units of W are atomic
mass units; in some cases, a conversion of units may be necessary (see 2.3
and 4.1).
3.16 RESOLUTION
3.16.1 General Definition
The ability, or a measure of the ability, of a mass spectrometer to separate
the peaks produced by ions of different mass/charge ratios.
3.16.2 Absolute Resolution. (See General Definition above).
A measure of the ion-separating ability of a mass spectrometer, at a given
mass M, given' by the peak width, W, at M :
Absolute resolution (at M)
=W amu
3.16.3 Unity Resolution Mass(es).
The mass number(s) at which the absolute resolution is one (amu) or ''unity''.
b-x
3.16.4 Resolving Power.
At a given mass M, the ratio of M to peak width W:
Resolving Power
=
M
W
=
M
(see 3.11)
M
4 Discussion of Resolution
4.1 MASS SCALE
Some mass spectrometers produce a graphical scan having an abscissa
which is not linear in mass number. It then becomes necessary, for the
calculation of resolution, to convert the abscissa to a linear mass scale. To
do this, it is assumed that, for a sufficiently small range of mass numbers,
the abscissa is actually linear in mass number. To convert from the
abscissa scale to mass units, the following formula is used:
S'
L=
S'
= ---
where:
S =
peak separation in any convenient units (centimeters, volts,
cycles per second, etc.)
L=
the number of units., of the kind chosen for S , equivalent
to 1 mass unit
Ml =
mass of peak at which resolution is to be determined
M z=
mass of a neighboring peak L\M = M\ - M2
Then, if W' is the peak width in the same units as those of S' ,
Absolute Resolution
=
W'
(by definition)
L
= M xW IS
b-xi
7.4 RECORDER
This standard requires that the output of the gas analyzer being tested be
graphically presented by means of chart recorder. The recorder shall be an
instrument which traces a continuous line and which has a time constant
(63%) not greater than one second. The recorder shall be so buffered that
there is no interaction between the recorder and the meter or other outputindicating device of the gas analyzer; i.e., so that the velocity of response
of neither generates sufficient electrical signal to affect the indication of
the other. If the recorder is connected in parallel with the output indicator,
this interaction will become negligible if each has an input resistance 1000
times that of their common voltage source, or if the recorder draws 111000
as much current as the indicator.
While some recorders have automatic decade-switching capabilities, it
will be assumed that this recorder can cover only a single linear range; it
is also assumed that the recorder displacement is proportional to the input
current. In those cases where the analyzer has an output meter, controls
shall be available which permit adjusting the zero of the recorder to the
zero of the meter, and full-scale deflection of the recorder to full-scale
deflection of the meter. This is necessary to permit direct correlation of
the meter and recorder indications and also to prevent possible injury to
one or more of these devices. However, in order to prevent complications
in the languag~ of this standard, it will be assumed that the recorder is the
only output indicating device, and that controls for adjusting zero
indication and for attenuating output indication act directly on the
recorder.
b-xii
&~[[email protected])DM
©
Unit Co,",version Tables
The following tables are provided for easy conversion of values between
commonly used units of pressure and leak rate
• Table A: Pressure Conversion Chart
• Table B: Leak Rate Conversion Chart
c-i
[email protected][Q)O® 8::,
Pressure Conversion Chart
?
:::
•
6.8x10"
1
S.17x10'
S.17x10"
6.89x10'
S.17x10'
2.04
2.04
27.71
6.89x10"
6.89x10"'
6.89x10'
1.32x10"'
1.93x10"
1
1.0x10'
1.33x10'
1.0
3.94x10"'
3.9Sx10"'
S.36x10"'
1.33x10'
1.33x10"'
1.33
1.32x10"'
1.93x10"
1.0x10"
1
1.33x10"'
1.0 x10"'
3.94x10"'
3.9Sx10"
S.36x10"'
1.33
1.33x10"'
1.33x10"
9.87x10"'
1.4Sx10"
7.Sx10"
7.5
7.Sx10"'
2.9Sx10"'
2.96x10"'
4.02x10"'
10
1.0x10"
1.0x10"'
1.32x10"'
1.93x10"
1.0
1.0x10'
1.33x10'
1
3.94x10"'
3.9Sx10"'
S.36x10"'
1.33x10'
1.33x10"'
1.33
3.34x10"'
4.91 x1 0"'
2.54x10'
2.54x10"
3.39x10'
2.54x10'
1
1.00
1.36x10'
3.39x10"
3.39x10"'
3.39x10'
3. 33x10"'
4.90x10·'
2.S3x10'
2.S3x10"
3.38x10'
2.S3x10'
9.97x10"'
1
1.36x10'
3. 38x10"
3.38x10"'
3.38x10'
2.46x10"'
3.61x10"
1.87
1.87x10'
2.49x10'
1.87
7.3Sx10"'
7.37x10"'
1
2.49x10'
2.49x10"'
2.49
9.87x10"'
1.4Sx10"
7.S0x10"'
7.Sx10"'
0.1
7.Sx10"'
2.9Sx10"'
2.96x10"'
4.02x10"'
1
1.0x10"
1.0x10"'
9.87x10"'
1.4Sx10'
7.S2x10'
7.Sx10'
1.0x10'
7.Sx10'
2.9Sx10'
2.96x10'
4.02x10'
1.0x10'
1
1.0x10'
9.87x10"'
1.4Sx10"
7.SX10"'
7.Sx10'
1.0x10'
7.Sx10"'
2.9Sx10"'
2.96x10"
4.02x10"'
1.0x10·
1.0x10"
[email protected]@ []3
Leak Rate Conversion Chart
0.10
-.-.
I:~:~::;:::;::!::::::::;:::;:;:
·;:;:·:·:·:::::::::::::::::::::::::::::~:I
9.87
1
1.00x1OS
10.00
7.50
4.40x10"'
2.65x10'"
1.42x1OS
12.75
9.87x10"'
1.00x10"'
1
0.01
7.50x10"'
4.40x10"'o
2.65x10"
14.19
1.28x10"·
0.99
0.10
100.00
0.75
4.40x1o-'
2.65x10"
1.42x1OS
1.28
1.32
0.13
133.32
1.33
1
5.87x1o-'
3.54x10'·
1.89x1OS
1.70
2.24x10'
2.27x1OS
2.27x1D"
2.27x10'
1.70x10'
1
6.02x10'"
3.22x10'o
2.90x10'
3.72x10"20
3.77x1o-"
3.77x10"tI
3.77x10"20
2.83x10"20
1.66x10"27
1
5.35x10""
4.81 x1 0"20
6.96x1o-'
7.05x1o-'
7.05x10"·
7.05x1o-'
5.29x1o-'
3.10x10""
1.87x10"
1
8.99x1o-'
0.77
7.84x10"·
78.41
0.78
0.59
3.45x1o-'
2.08x10"
1.11x1OS
1
~
I
H}~,',~,MlUti,'l,';fj['~'~'~I',1
&~~[§[[email protected])DTI
@)
Remote Port Specification
For Edwards Spectron 600 Series
Leak Detectors
(Revision 3-15-97)
WARNING:
This informatiqn should only be used by experienced and
knowledgeable personnel!
Full PC Remote Control Specification
U sing the following specification, software can be written to enable a remote
computer to completely control the Spectron 600 Leak Detector. The remote
computer can control every function of the leak detector except for service functions. Service Mode cannot be entered by the remote computer.
Pressures, valve status, current state, and other operating parameters can all be
monitored over this communications link. All data are transmitted serially and
each byte consists of one ASCII character. Each packet of information begins
with an ASCII character between the letter 'ft: and the letter 'g'. Packets contain
a fixed number of bytes and contain all numbers. The description of each packet
will clarify this point. Every packet, minus its initial letter, is made up of the
ASCII numbers '0' through '9'. The beginning of each packet dictates the end
of the previous packet (unless terminated as discussed below).
'A' -
Followed by a number.
, l' - indicates that an invalid command was sent by theremote Pc. It
could mean that the format of the command was incorrect, or an attempt
was made to change a parameter to an invalid value.
'0' - indicates no command errors.
'B' -
Not used in the Spectron 600 at this time.
'C' -
Followed by 5 numbers.
Leak Rate Value measured in atm-cc/sec or mbar-Usec.
(e.g. 05708
(e.g. 10010
=5.7 X 1~ atm-cc/sec)
=10.0 X 10.
10
atm-cc/sec)
d-I
'D' -
Followed by 6 numbers.
Foreline Pressure measured in Millitorr (from 0 to 760000 millitorr).
=
=
(e.g. 0f001oo 100 millitorr)
(e.g. 760000 760000 millitorr)
'E' -
Followed by 6 numbers.
Testport Pressure measured in Millitorr (from 0 to 760000 Millitorr).
(e.g. 000100
(e.g. 760000
'F' -
Followed by 3 numbers.
High Vacuum Pressure measured in Torr (from 7.5 x 10-4 to 2.6 x 10-5).
(e.g. 105
(e.g. 384
'G' -
=1.0 X 10.a Torr)
=3.8 X 10- Torr)
4
Followed by 3 numbers.
Filament Current measured in amperes.
(e.g. 023
'R' -
=100 millitorr)
=760000 millitorr)
=2.3 Amps.)
Followed by 7 numbers.
Emission Current (first 3 numbers, measured in milliamps):
4th #: Reject Status ('0', or '1' =Invalid, '2' =Accept, '3' = Reject)
5th #: Ready Light ('0' = OFF, '1' = ON)
6th #: Testing Light ('0' = OFF, '1' = ON)
7th #: Start Light ('0' = OFF, '1' = ON)
(e.g. 0470100 = 4.7 milliamps, Invalid, Ready ON, Testing OFF, Start OFF
'I' -
Followed by 2 numbers.
Present State of the leak detector.
States 0 - 9 preceeded by a 0 (00 - 09).
00 - First Power
01 - Power Up
02 - Power Up
03 - Power Up
{States 4 - 11 are for Vacuum Mode, Auto-Ranging}
04 - Standby
05 - Standby
06 - Roughing Testport
07 - Gross Mode Leak Testing
08 - Reverse Rough Close Delay
09 - Reverse Mode Leak Testing
10 - Direct Rough Close Delay
11 - Direct Mode Fine Leak Testing
d-/i
{States 12 -19 are for Vacuum Mode, Manual-Ranging}
12 - Standby
13 - Standby
14 - Roughing Testport
15 - Gross Mode Leak Testing
16 - Reverse Rough Close Delay
17 - Reverse Mode Leak Testing
18 - Direct Rough Close Delay
19 - Direct Mode Leak Testing
{States 20 - 23 are for Sniffer Mode, Auto-Ranging}
20 - Standby
21 - Standby
22 - Roughing Sniffer Probe
23 - Sniffer Mode Leak Testing
{States 24 - 27 are for Sniffer Mode, Manual-Ranging}
24 - Standby
25 - Standby
26 - Roughing Sniffer Probe
27 - Sniffer Mode Leak Testing
28 - 38 - Automatic Tuning
39 - 44 - Checking Calibration
45 - Service Mode
'1' -
Followed by 4 numbers.
Reject Set Point in atm-cc/sec.
(e.g. 2308
'K' -
A mantissa of 10.-4 will never be sent.)
Followed by 3 numbers.
Crossover #2 or Direct Flow Crossover in millitOIT.
(e.g. 020
'L' -
=2.3 x 1o-a atm-cclsec.
=20 millitorr)
Followed by 14 numbers.
System Status information.
1!.
1
2
3
4
5
6
7
8
-
Turbo Pump Status ('0' = OFF, '1' = ON)
Filament Status ('0' = OFF, '1' = ON)
Vent Valve Status ('0' = CLOSED, '1' = OPEN)
Sniff Valve Status ('0' = CLOSED, '1' = OPEN)
Gross Valve Status ('0' = CLOSED, '1' = OPEN)
Foreline Valve Status ('0' = CLOSED, '1' = OPEN)
Fine Valve Status ('0' =CLOSED, '1' = OPEN)
Calibrator Valve Status ('0' = CLOSED, '1' = OPEN)
d-iii
9 - Rough Valve Status ('0' = CLOSED, '1' = OPEN)
10 - External Rough Valve Status ('0' = CLOSED, '1' = OPEN)
11- Purge Valve Status ('0' = CLOSED, '1' = OPEN)
12 - Zero Light Status ('0' = OFF, '1' = ON)
13 & 14 Error Status (see below)
01
02
04
05
07
08
09
10
11
13
18
22
Foreline Pressure Too High
High Vacuum Pressure Too High
Auto Zero Error
Foreline Pressure Too High To Test
High Voltage Failure
Filament Current Too Low
Temperature Too High
Emission Current Too Low
PC Remote Communications Error
Rough Time Exceeded
Printer Error
Temperature Too Low
~3 Cannot Find Helium Peak
24 Gain Too High
26 Turbo Pump Failure
30 Hand Held Remote Communications Error
33 Repeller Heat Failure
51 No Errors
=
(e.g. L11000111000151 Turbo Pump On, Filament On, Vent Valve Closed,Sniff
Valve Closed, Gross Valve Closed, Foreline Valve Open, Fine Valve Open,
Calibrator Valve Open, Rough Valve Closed, External Rough Valve Closed, Purge
Valve Closed, Auto Zero Light On, No Errors)
'M' - Not used in the Spectron 600.
'N' -
Followed by 3 numbers.
Current Calibrator Temperature in Degrees Celsius.
(e.g. 273
'0' -
=27.3 °C)
Followed by 3 numbers.
Anode Voltage measured in Volts.
(e.g. 265
(e.g. 310
=265 Volts)
=310 Volts)
d-iv
'P' -Followed by 2 numbers.
For Edwards internal use only!
'Q' -
Followed by 2 numbers.
For Edwards internal use only!
'R' -
Followed by 2 numbers.
For Edwards internal use only!
'S' -
Followed by 4 numbers
Restricted or Gross Flow Gain (GI).
=9.71 x Gain)
(e.g. 0971
'T' -
Followed by 4 numbers.
Reverse Flow Gain (G2).
(e.g. 0971
'U' -
=9.71 x Gain)
Followed by 4 numbers
Direct Flow Gain (G3).
(e.g. 0971
'V' -
=9.71 x Gain)
Followed by 4 numbers.
Crossover #1 or Reverse Flow Crossover in millitorr.
(e.g. 0300
=300 millitorr)
'W' - Followed by 4 numbers
Stamped Leak Rate on Internal Calibrator in atm-cc/sec when state of
leak detector is in any state except 1-47. When the leak detector is in state
1-47, this field will be the temperature compensated value of the internal
calibrator. This value is what the leak detector is calibrating to when the
internal calibrator is selected as the active calibrator.
(e.g. 6304
'X' -
=6.3 x 10" atm-cc/sec. A mantissa of 100 will never be sent.)
Followed by 2 numbers.
Stamp~d
Temperature on Internal Calibrator in Degrees Celsius.
(e.g. 25'= 25°C)
'Y' -
Followed by 4 numbers
Fine Crossover Delay (D I) in Tenths of seconds.
('Y' + 4 numbers).
(e.g. 0010 1.0 seconds)
=
d-v
Z' -
Followed by 4 numbers
Direct Rough Close Delay (02) in Tenths of seconds.
(e.g. 0010
'[' -
Followed by 4 numbers
Vent Valve Open Delay (03) in Tenths of seconds.
(e.g. 0010
'\' -
=1.0 seconds)
Followed by 4 numbers
Vent Valve Close Delay (04) in Tenths of seconds.
(e.g. 0010
']' -
=1.0 seconds)
=1.0 seconds)
Followed by 9 numbers
Filament #, Helium Mass, Gas Type, Pressure Units, FLASH Rev.,
EPROM Rev, and 1 number for Edwards internal use.
tl.
1 - Filament Status ('1' = Filament #1, '2' = Filament #2)
2 - Helium Mass ('3' = He3, '4' = He4)
3 - Gas Type ('0' = Air Equiv. Units, '1' = Helium Units)
4 - Pressure Units ('0' = mTorr, '1' = mBar)
5 & 6 - FLASH Rev. ('33' = FLASH Rev. 3.3)
7 & 8 - EPROM Rev. ('15' = EPROM Rev. 1.5)
9 - Edwards internal use
=
(e.g. ]140031141
Filament On, He4, Air Equiv. Units, mTorr, FLASH 3.1,
EPROM 1.4, and a '1' for Edwards internal use.
mode)
, " '- Followed by 4 numbers.
For Edwards internal use only!
Followed by 4 numbers.
For Edwards internal use only!
,
,,
Followed by 3 numbers.
Turbo Pump Speed in percent of full speed.
(e.g. 025
(e.g. 100
=25% of full speed)
=100% of full speed)
d-vi
'a' - Followed by 4 numbers.
Minimum Gross Testing Time (D5) in Tenths of seconds.
(e.g. 0100
=10.0 seconds)
'b' - Followed by 6 numbers.
Total Running Time in Hours.
(e.g. 000047
=47 hours)
'c' - Followed, by 4 numbers.
Minimum Roughing Time (D6) in Tenths of seconds.
=
(e.g. 0001 0.1 seconds)
(e.g. 0142 = 14.2 seconds)
'd' - Followed by 4 numbers.
Reverse Rough Close Delay (D7) in Tenths of seconds.
(e.g. 0001
(e.g. 0142
=0.1 seconds)
=14.2 seconds)
'e' - Followed by 3 numbers.
Profile Switch Setting (0 = 255)
(e.g. 001
(e.g. 128
=1)
=128)
'f' - Followed by 3 numbers.
Revision Switch Setting (0 = 255)
(e.g. 001
(e.g. 128
'g' -
=1)
=128»
Followed by 6 numbers. (first 5 are the leak rate and the last is reject
status). Previous Test Final Leak Rate Value & Reject Status measured in
atm-cc/sec or mbar-l/sec. See 'H' for reject status values. This is the leak
rate value and reject status of the previous leak test cycle just prior to the
termination of the test. It is used for data logging.
(e.g. 057082
(e.g. 100103
=5.7 x 1~ atm cc/sec & Accept or Pass)
=10.0 x 10-
10
atm cc/sec & Reject or Fail)
Compatibility mode transmission is as follows:
• Packets 'P: and 'B' are only sent when necessary.
• Packets 'C' through'!' are sent all the time.
• Packets 'J', 'K', and '0' through 'g' are sent every 33 times after
packets 'L' and 'N'.
• Packets 'L' and 'N' are send every third time after packet '1'.
d-vii
The following options are available for serial stream transmission:
1.
'SIZ' will cause packet(s) to be sent continuously. 'SOZ'will halt
packet transmission.
2.
The us~r can select individual packet(s) to be sent all
the time or on demand.
3.
On power-up the Spectron 600 will default to the compatibility mode for
serial stream transmission. Transmission will not begin until a remote
command to start is issued.
4.
The user can terminate each packet with either a carriage return or a line
feed. The default will be no terminators. The terminator instruction will
be 'TOZ' for no termination. 'TIZ' will enable the carriage return as the
terminator. 'T2Z' will enable the line feed as the terminator. Each
command will override the previous.
5.
The default packet set will be all packets. If a smaller number of packets
is desired, then the array can either be cleared or a specific packet can be
eliminated from the set. The clear instruction is 'EOZ'. If the Spectron
600 receives this command, only the 'IV packet will be sent. To reset the
stream to all packets, the command 'EIZ' should be sent. To stop a
specific packet from being sent, the 'GabOZ' command can be sent to the
MS-50 where 'ab' is the packet number (Le. if 'ab' = '02', then the 2nd
packet or 'C' packet will never be sent). To add a packet to the stream,
the 'GabIZ' command must be. sent (i.e. if 'ab' = '17', then the 17th
packet or 'R' packet will now be sent in the stream).
NOTE:
The '00' or 'IV packet will always be included in the stream. This will
force all serial stream lengths to be the same.
6.
To cause the stream to be sent using the Spectron 600 compatibility
mode format, then send the 'I1Z' instruction. 'IOZ' will terminate the
stream and revert back to the previously selected format.
7.
'PxyZ' is the single packet query instruction. This will send only the
'xy'th packet and no others (e.g., if x=2 and y=3, the 23rd packet will
be sent). Issuing this instruction will cause the serial stream to stop after
its last packet. If the user has 5 packets being sent, the array will not be
cleared! but if they were being sent out continuously, this would stop.
d-viii
Once the stream stops, then the desired packet 'xy' will follow and nothing more will be sent.
8.
'QIZ' is the multiple packet query instruction. This will only send the
packet(s) in the array once. If packets 'C', 'D', and 'G' are in the
array, then all three packets will be sent and nothing more. If the packets
were being sent out continuously, the serial stream will stop with this last
burst of packets.
Note: The packets are transmitted in the following order:
PACKET #
00
01
02
03
PACKET LETTER
PACKET #
A
B
C
19
20
21
22
23
24
25
26
27
28
29
30
31
32
33
0
04
E
05
F
06
G
07
08
H
I
L
N
J
K
09
10
11
12
13
14
15
16
17
18
0
P
Q
R
S
T
PACKET LETTER
U
V
W
X
Y
Z
[
\
]
1\
_ (underscore)
' (left single quote)
a
b
c
34
d
35
36
37
e
f
g
The remote PC or controller has the ability to send many different commands to
the Spectron 600. There are two basic types of commands. One command is
equivalent to pressing a key on the Spectron 600's user panel and the other type
is equivalent to a parameter change. The key press commands allow for remote
control and the parameter changing commands allow the remote computer or
controller to change either the system delay, testing crossover pressures, or the
REJECT setpoint.
Most remote commands will be sent to control nonnal operation/cycling of the
Spectron 600 leak detector. Nonnal starting and stopping of test cycles will be
controlled remotely. If the remote computer is making leak test decisions, such
as how long to test a specific part, the software must be aware that accurate
d-ix
leak rates only occur in the GROSS, REVERSE, DIRECT and SNIFFER
testing states. Roughing states do not test for the presence of helium and rough
close delay states corrupt the flow of helium by pumping some of the helium
away with the rough pump. Leak test decisions should not be made in these
states. Also, during normal test cycles, if the high vacuum pressure exceeds
5.0 x 10-4 Torr, the filament is turned OFF but the leak test cycle is not terminated. This is called the PRESSURE BURST CLEANUP mode. The filament
on/off flag sent with the 'L' packet is one method of monitoring this state.
However, if using the old compatible serial stream format, monitoring the filament current will give the remote computer a faster response to this situation.
Filament on/off status is sent on every third transmission of the filament current
as mentioned above. The filament will be turned back on every 10 seconds to
check the high vacuum pressure. If the pressure is still too high, the filament
will shut itself back off, otherwise it will remain on and testing will continue.
If the remote computer or controller wants to terminate a test cycle based upon a
certain length of time in testing mode, the time spent in PRESSURE BURST
CLEANUP should not be included in this time. Testing parts for helium does
not occur at these times. Also, if the remote computer terminates the test
because of an ACCEPT or REJECT indication, do not terminate the test cycle
when the reject status is INVALID. This will not harm the Spectron 600, but
will not give a positive ACCEPT or REJECT signal.
Below is a list of all possible remote PC commands that may be sent to the
Spectron 600 and do not control the format of the serial stream. All commands
begin with one of these letters ['D', 'F', 'K', 'M', 'R'] and are all terminated by
the letter 'Z'. The numbers in the middle make up the desired command.
All 'keypress commands' start with the letter 'K' and end with the letter 'Z'.
Each keypress command works in exactly the same fashion as if an operator had
pressed the corresponding key on the leak detector. There are 29 different keypress commands, each requiring 2 numbers, as follows:
Command #
00 01 02 03 -
04 05 06 07 -
Start Button
Vent Button
Select Up
Select Down
Set Right
Set Left
Calibrator Valve Button
,Ext Rough Valve Button
d-x
08 09 -
10 11 12 13 14 15 16 17 18 19 20 21 -
22 23 24 25 26 27 28 -
Fine Valve Button
Foreline Valve Button
Gross Valve Button
Purge Valve Button
Rough Valve Button
Sniffer Valve Button
Vent Valve Button
System Vent Command (Can only be sent in 'STANDBY' states)
Filament ON/OFF button
Filament Button
Helium/Air Units Button
Helium Mass 314 Button
Cal-Check Button
Calibrate (CAL) Button
Tune Button
~uto/Manual Ranging Button
Range Up Button
Range Down Button
Volume Up Button
Volume Down Button
Zero Button
To send a command to Auto-Zero the testport helium background, the remote PC
or controller must send the following command string:
'K28Z'
To send a command to Start a leak test cycle, the following string must be sent
to the Spectron 600:
'KOOZ'
To set one of the 6 system delays, the PC must send a command that starts with
a 'D', followed by 5 numbers, and ends with a 'Z'. The first number is the delay
number [1, 2, 3,4,5,6, 7] and the last 4 numbers make up the desired delay in
tenths of a second, with a maximum delay of 999.9 seconds.
For a FINE CROSSOVER DELAY (Delay #1) of 2.0 seconds, the
following string must be sent:
'D10020Z'
For a DIRECT ROUGH CLOSE DELAY (Delay #2) of 0.1 seconds, the
following string must be sent:
'D20001Z'
For a VENT OPEN DELAY (Delay #3) of 5.0 seconds, the following
string must be sent:
'D30050Z'
d-xi
For a VENT CLOSE DELAY (Delay #4) of 12.5 seconds, the following
string must be sent:
'D40125Z'
For a MINIMUM GROSS LEAK TEST TIME (Delay #5) of7.0 seconds, the
following string must be sent:
'D5OO70Z'
For a MINIMUM ROUGHING TIME (Delay #6) of 20.0 seconds, the
following string must be sent:
'D60200Z'
For a REVERSE ROUGH CLOSE DELAY (Delay #7) of 0.1 seconds, the
following string must be sent:
'D20001Z'
If an attempt is made to change a delay to an invalid value, the Spectron 600 will
clip the value to either its upper or lower limits and will send back an error indication in its stream of data ('AI '). Its new value will show up in the appropriate
portion of the data stream.
To set one of the crossovers, either # 1 or #2, the PC must send a command that
starts with an 'F', followed by 5 numbers, and ends with a 'Z'. The first number
is the crossover number. '1' for crossover # 1 and '2' for crossover #2. The next
4 numbers make up the desired crossover pressure in millitorr.
For a REVERSE CROSSOVER (#1) of 350 millitorr, the following string must
be sent:
'FI0350Z'
For a DIRECT CROSSOVER (#2) of 25 millitorr, the following string must
be sent:
'F2oo25Z'
If an attempt is made to change a crossover to an invalid value, the Spectron 600
will clip the value to either its upper or lower limits and will send back an error
indication in its stream of data ('AI '). Its new value will show up in the appropriate portion of the data stream.
The REJECT setpoint change command starts with an 'R', has 4 numbers, and is
ended with a 'Z'. The first two numbers make up the reject mantissa and the last
two make up the reject exponent. Here the exponent is assumed to be negative.
d-xii
For a REJECT POINT of 2.0 x 10-8, the following string must be sent to the
Spectron 600:
'R2008Z'
For a REJECT POINT of 5.0 x 10- 10, the following string must be sent:
'R501OZ'
For a REJECT POINT-of 6.3 x 10-7 , the following string must be sent:
'R6307Z'
If an attempt is made to change the REJECT setpoint to an invalid value, the
Spectron 600 will clip the value to either its upper or lower limits and will send
back an error indication in its stream of data (,AI '). Its new value will show up
in the appropriate portion of the data stream.
As an example, let's go through the sequence of a remotely controlled leak test
cycle. First we monitor the present state packet '1'. We wait for the Sp~tron
600 to power-up and go into the standby states 04, 05, 12, or 13. At this time we
can check the crossover points, the delays, and the REJECT setpoint to make
sure they are appropriate for the part being tested. If they are not correct, we can
change them using the appropriate commands. We will set the Reverse crossover
pressure to 200 millitorr by sending the string 'F10200Z' (because this is
crossover #1). We will set the REJECT setpoint to 2.0 x 10-8 atm-cc/sec by sending the string of 'R2008Z'. Mter we send each of the following strings, we must
monitor the Spectron 600 data stream to verify that both an error ('AI ') has not
occurred and that the crossover and reject values have been updated.
We can now start the test cycle. To start the test cycle we must send the string
'KOOZ'. At this time we monitor the data stream to make sure an error ('AI ')
was not generated, and that the leak detector has changed to the ROUGHING
TESTPORT state (06 or 14). After this happens, we continue to monitor the
present state and the reject status. Once the reject status changes to either an
ACCEPT or a REJECT, we can terminate the test cycle by sending the string
'KOlZ'. At this time the present state will change to 04,05, 12, or 13 and we
will need to vent the testport to enable the operator to remove the test object.
For this we need to send the string 'K15Z'.
Now the sequence can be repeated for more test objects.
If we want to SNIFF test, the sequence wouldn't change except for the present
state values. First we would have to change the present state from Vacuum
Mode - Standby to a Sniffer Mode - Standby, by sending the string 'K13Z'
d-xiii
(when the Sp~tron 600 was in one of the vacuum mode standby states of 04, 05,
12, or 13). In Auto ranging mode, this causes the Spectron 600 to change to
state 20 or 21; in Manual ranging mode, the unit changes to state 24 or 25. Once
the correct standby state has been entered, we can continue with the normal
operational sequence.
During a test cycle, if we wanted to change from manual ranging to automatic
ranging or vice-versa, illl we have to do is send the string 'K23Z' (equivalent to
pressing the AutolManual Ranging Button on the Spectron 600 user panel).
The RS-232 data format is:
a.
b.
c.
d.
8 Data Bits
Even Parity
9600 Baud
1 Stop Bit
Hand-shaking is done by using a NULL MODEM adapter or equivalent and
observing the following rules:
1.
The Spectron 600 will start sending the data stream when it is issued the
appropriate command ('SlZ').
2.
The Sp~ctron 600 will not transmit when its CTS line (RTS line of
remote PC) is driven low. This should only be done during serial port
interrupts on the remote PC.
3.
The remote PC must not send data to the Spectron 600 when the
Spectron 600 has driven its RTS line (CTS line of PC remote) low.
d-xiv
Point To Point Wiring for Spectron 600 and Remote
Computer:
NOTE:
A standard NULL MODEM cable will work or a straight through
RS-232 cablewith a NULL MODEM adapter can be used.
The Spectron 600 9-pin connector is designated RS232 on the rear of the leak
detector.
Spectron 600 9-pin Connector - - > Computer 25-Pin Connector
1,
6,20
2
3
4
5
7
8
9
2
3
6,8
7
5
4
22
not connected
Spectron 600 9-pin Connector - - > Computer 9-Pin Connector
6,4
1,
2
3
4
5
7
8
9
3
2
6,1
5
8
7
9
not connected
d-xv
&[;)[;)[email protected])OM ~
Profile And Revision Switch Positions For
Edwards Spectron 600 Series Leak Detectors
The Profile and Revision switches are located on the A board, mounted inside the
rear door of the Spectron 600. To change the setting of the switches:
1
Turn off power to the Spectron 600.
2
Using a Philips head screwdriver, open the rear door.
3
Find the two eight-position dip switches located on the A board in the right
corner close to the rear door hinge (near the Service toggle switch). They
are marked "SWl, Profile" and "SW2, Rev."
4
Use a small instrument, such as a jeweller'S screwdriver, to change the
switch positions.
LOCATION OF PROFILE
AND REVISION SWITCHES
ON THE
A
BOARD
[~
Profile Switch --~~:
JODDDDDI19j
Revision Switch --~
.
, .
iDDDDDDDDj
0-4-[]
@0-14---
O~--
e-i
Service Switch
Green LED
Red LED
Profile Switch:
8
7
6
5
4
3
2
1
Up at all times
Roughing Pump System rNet = UP, Dry = DOWN)
Reverse Flow (Enabled = UP, Disabled = DOWN)
Speaker Ttiggered from Reject Pt. (Disabled = UP,
Enabled = DOWN)
Auto Tune Alert (Enabled = DOWN, Disabled = UP)
Automatic Auto Tune (Enable = DOWN, Disabled UP)
Used by Edwards Test Personnel Only (normal operation = UP)
Used by Edwards Test Personnel Only (normal operation = UP)
Revision Switch:
8
7
6
5
4
3
2
1
Testing Led (Not Present = UP, Present = DOWN)
Up at all times
Up at all times
Unused
Unused
Unused
Used by Edwards Test Personnel Only (normal operation = UP)
Used by Edwards Test Personnel Only (normal operation = UP)
e-ii
&~~B~[Q)DM [?
Spectron 600 Quick Reference
This section contains quick reference charts for the following functions and displays:
•
•
•
•
•
The User/Control Panel
The Service Panel
The Alphanumeric Display
Spectron 600 Error Codes
Periodic Maintenance Functions
A more complete description of these functions is contained within the main body of the
Spectron 600 User Manual.
f-i
@[email protected]~ ~®U®[[email protected][][email protected]®
Spectron 600 User Control Panel
Displays mantissa of leak rate,
including system background.
Displays exponent of leak rate.
if error occurs.
Lights during testing if leak rate is less than
the user-set Reject Point and the Spectron
600 is in or below the range of the Reject
Point.
Disabled.
Lights during testing if the leak rate is greater
than or equal to the user-set Reject Point.
Disabled.
Displays test port pressure on bar graph.
Displays test port pressure.
Selects either automatic or manual ranging
during testing.
Disabled.
Changes selected leak rate range for testing
either up or down. Pressing one of the arrow
keys while in Auto Ranging mode will switch
Spectron 600 to Manual Ranging.
Changes selected leak rate
range for testing either up or
down.
Increases or decreases volume of speaker
and headphone output.
Increases or decreases speaker
(or headphone) volume. Also
used to set time and date if
selected on alphanumeric display.
"Zeros" out any helium being measured. Only
active during testing. Limits ranging to two
ranges below zeroed range. Cancelled at the
end of the test cycle.
Turns turbo pump on or off. LED
indicates status.
Indicates that Spectron 600 has been
switched to Sniff mode.
Disabled.
Indicates that Spectron 600 is in the Standby
mode and is ready for the next test.
Disabled.
Used to start a pump/test cycle. Pressing a
second time will interrupt the test cycle without the qhance of venting. Switch is illuminated when test cycle is initiated.
Disabled.
Used to stop a test cycle and to vent the test
port. Pressing momentarily stops cycle.
Pressing and holding vents test port.
Disabled.
f-;;
@Q[]D©~ [email protected])]@~Oll©@
Spectron 600 Service Panel
Opens/Shuts Cal Valve.
Opens/Shuts External Rough Valve.
Opens/Shuts Fine Valve.
Opens/Shuts Gross Valve.
Ili~.......................................... I Opens/Shuts Purge Valve (Standby mode only).
Opens/Shuts Rough Valve.
Disabled
1I1111111I1
I
I
Switches Spectron 600 to Sniff mode.
IlliI• ••• ,
I}}}\{> {{.}}/::::>:{}{I
Opens/Shuts Sniff Valve.
Opens/Shuts Vent Valve.
Disabled
I"~
Opens/Shuts Purge Valve.
Toggles filament on or off; can only be turned on
if high vacuum pressure is good; cannot be
turned off during leak testing.
~Fir11:• :.· • ••• • .• • .·• •
I Selects filament 1 or 2; Green LED indicates
~iil;lli)'t1 good filament; Red LED indicates bad filament.
Toggles filament on or off
(totally unprotected).
Selects filament 1 or 2; Green LED indicates good filament; Red LED indicates
bad filament.
Switches between helium and air equivalent leak rate units.
Switches accelerating voltage in mass
spectrometer from Mass 3 to Mass 4.
Performs check of calibration using internal
>1 helium leak standard.
Disabled
» 1 Adjusts amplifier gain to calibrate leak rate.
Disabled
iti<}}It
k:~'c~r:.::::::::.::::i
r:.
. ·1..................................1 Only available after Cal Check.
I::.:..:::::::::}:/::.}}::::::::·•••••••:·:·:·:·:·:···:·:··:.:.:.::.:?:,.
Performs full automatic tune and calibration
demand.
Disabled
Chooses which function is shown on alphanumeric display.
Chooses which function is shown on
alphanumeric display.
Sets value for those functions on alphanumeric
display that can be changed.
Sets value for those functions on
alphanumeric display that can be
changed.
'-iii
@(]][email protected]~ [[email protected]@[email protected]@
Spectron 600 Service Panel Alphanumeric Display
• Choose function using "Select" switches
• Set value using "Set" switches
_=111111111
G1 is Gross Mode Gain. G2 is Reverse mode gain.
1::::{}}:O::o.:::::o,:::':}::::}}:::::: ::;1 G3 is Direct Flow gain.
I• • • • • • • • • \
i·.·.··• • • • • • • • • • • • •.
Changing G2 & G3 will uncalibrate system. G 1 must be set by
user.
I
G2 & G3 gains cannot be changed in Standard
I}}}':::::: ;;(}::::;}':::::::::::':l mode. G1 may be changed in Standard mode during
[«:~:,,:,} }}}":::>~,:::<::;:::::"::il
leak testing in the Gross mode. Can change any gain
in Service mode. (G2 is not used on the Spectron
flllllllllllllj6000
:,:,}.,:,:'::'::::},:':./::::O:/::/::::,::::::::::::::\:,\i::.:,:.:j
when it is operating in Product Testing mode).
Displays accelerating voltage of mass spec.
I.:• • • • • • • • • • • • • i I
Ii.................
:. . . . . . . . . . . . . . . . . . . . . . . . .
lil:.i;f~tnp:
Holding Set switches while leak testing will cause
I peak to "de-scan" ±30V.
:,:.:• .•.,'.~• •.: ~l Shows current temperature of internal calibrator.
1~:r§~~~\y!lr1
• ·• • • ·.• I User settable crossover pressure for reverse flow
Displays accelerating voltage of
mass spec. Press Set switches
to change anode voltage in one
volt steps.
Used to set the temperature at
which the calibrator was calibrated. Should only be changed if
the calibrator is changed.
Not Applicable.
I i )}
) )i );I()l mode (not used on the Spectron 6000 when it is
ro':;>::;::::Oo:::::::;O:::::::\::;:::;;::,;\J operating in Product Testing mode).
II)) I) i }): ) l Max: 2000 mTorr (600T & 6000); Default: 500 mTorr
I User settable crossover pressure for direct flow
Ig:r9~;~~v~rg
l
Ii:.:':::::':::':: {ii?){
)?J
I• • • • • :. . . . . . . . . . . . . I
Not Applicable.
mode. Max: 75 mTorr (6ooT), 150mTorr (6000);
Default: 25 mTorr.
Shows software revision in flash
Eprom.
;::::::;:}:;;::;O:;;:};:::;;;}':::J Fine crossover delay.
Shows software revision in
Eprom.
Shows high collector range
electrical offset.
Shows low collector range
electrical offset.
f-iv
®QDD©~ [email protected]@[[email protected][]U©@
Spectron 600 Service Panel Alphanumeric Display
filIi:
1• • • • • • • • • • • •••••• • •
I
(cont.)
Not Applicable.
Minimum Gross testing time.
Not Applicable.
Reverse Rough Close delay (used on units with
external roughing option only).
Not Applicable.
Displays filament emission current in milliamps (rnA).
Properly operating filament has emission of SmA.
Same as Standard mode.
Shows any errors present. Codes are automatically
displayed if errors occur. If no errors detected,
displays NONE.
Displays current date. Date can
be changed using the Set and
Audio keys.
,
1'.IIII.Ilil
I
}}}}::,i,}}},\\{{{{{{{}(]
I:}:,::::~~,::~~H,.I.,~'
I Displays filament supply current in DC amps.
Same as Standard mode.
Maximum: 6.0 amps.
Displays fore line pressure in mTorr or mBar.
Same as Standard mode.
Il'iiiI11,ml
• • • ·••••·.••••• ••.•••••••••••
f.111~~II~~11
I
'1111111
1)(,
Displays high vacuum pressure in Torr or Bar. If
I
1~~I!iI~li~
• • '• '. I
~'IIIIIJII
t!l!
standby, system will periodically check offsets (while
display shows SPECTRON).
Displays current temperature compensated value of
internal calibrator.
Used to program leak rate value
of calibrator from certificate.
Should only be changed if calibrator is changed.
Same as Standard mode.
Digital display of leak rate.
Used to set leak rate reject point.
Shows percent of full speed of
turbo pump.
Digital display of test port pressure in mTorr or mBar.
Select units feature switch on back of C board.
Same as Standard mode.
• • '• ·• .·• .•·• II Displays total number or hours that unit has been
running.
I Iii
1i1J~llt!l~y!!
.,:,',',::"":,:,',:,:·:,:":,:,:,,,,a
i
Same as Standard mode.
?{: :\:),1 filament if off, hi vac display shows OFF. During
f-v
Displays current time. Time can
be changed using Set and Audio
keys.
@Q[]D©~ [email protected]]@~ou©@
Spectron 600 Error Codes
Foreline max error
Foreline has exceeded 4000 mTorr. All valves except foreline shut, turbo
sh\Jts
, down. Will restart when foreline recovers.
Hi Vac too high
Hi vac above 5 x 10-4 Torr. Shuts off filament, then turns filament on every ten
seconds. If does not "catch" after several tries, shuts off unit.
Auto Zero error
User has attempted to zero out leak beyound the capability of the unit.
Foreline Test error
Foreline pressure has exceeded 2500 mTorr (probably during test, after
reverse crossover). Aborts test cycle, goes into standby mode.
High Voltage Error
High voltage supply from B board to Source has failed.
System shuts off filament, all valves, and pump(s).
Filament current low
Filament current has dropped below 1 ampere. The filament should be
replaced.
Temp too high
Temperature sensor is reading above 60°C. Fan may have failed. Sensor
may be defective or unplugged.
Emisssion too low.
Emission has dropped below 4.7 rnA. If occurs during Cal Check or Tune,
will abort procedure.
PC remote error
Problem with remote PC. System will still operated properly without PC.
Rough time exceeded
During Cal Check or Tune, unit can not pump down to crossover within five
(5) minutes.
Printer error
Printer is not responding.
Gain too low error
One of the system gains (G2 or G3) has been set below allowable limits
during a Tune or Calibration cycle.
Temp too low
Temperature is below 10°C. System shuts down.
Cannot Peak Tune
System computer cannot find helium peak.
Gain too high
One of the system gains (G2, Reverse; G3, Fine) is at the maximum (10).
Error will continue to be displayed until unit is retuned.
Turbo fail
The turbo pump or controller has failed. System is shut down.
HH remote error
Transmission error between main unit and hand held remote control.
Repeller fail
Discontinuity in circuity for mass spec source repeller. System will continue
to operate, but testing will not be allowed.
'-vi
@[email protected] [[email protected]@u®[email protected]@
Spectron 600 Recommended Periodic Maintenance
Description
Frequency
See Manual Pagels):
Twice per shift
(minimum)
4-4
As Required (at least
weekly)
4-5
Weekly
4-6
Weekly
4-6
Monthly
4-6
Monthly
4-7
Semi-Annually
4-9,10
Annually
4-17
Annually
4-33
(-vii
&~~B~[00M @
Spectron 600D Manual Addendum
Section 1: General Information
1.1
Introduction'
This Spectron 600D Manual Addendum is intended to be used in conjunction
with the Spectron 600 Operations and Maintenance Manual. This addendum provides full system performance specifications for the Spectron 600D Leak
Detector, as well as highlighting operational and maintenance items which differ
from the Spectron 600T Leak Detector.
1.2
Unpacking
Before initially turning on the Spectron 600D Leak Detector, it is necessary to
remove shipping material from around the turbo molecular pump and the internal
dry pump.
Using a Philips head screwdriver, open the rear door of the Spectron 600D.
Remove all shipping material from underneath the turbo molecular pump. Close
the rear door.
Using a Philips head screwdriver, open the front door. Remove all shipping
material from around the internal dry pump and cut and remove any shipping
straps. Close the front door.
An installation kit (part No. D155-03-81O) is included with the unit when it is
shipped. The kit contains:
Part Number
Description
D155-01-820
D155-02-828
D155-01-830
D155-01-840
D155-02-838
D155-02-815
Filament Kit (box of 5)
Allen Wrench, 7/64
Nitrogen Kit
Cart Mounting Kit
NW25 to 1 118 Quick Connect Adaptor
1 118 Quick Connect Plug
g-i
The filament kit and Allen wrench are not needed at the time of installation, but
are provided as a courtesy. The Nitrogen Kit may be used at any time if it is
desired to connect dry nitrogen to the vent valve of the Spectron 6ooD.
Instructions for connection of the nitrogen are included in the Nitrogen Kit. If
the Spectron 600 Cart has been purchased with the unit, the Cart Mounting kit
includes the hardware and instructions necessary for mounting the leak detector
to the cart.
1.3
Installation
The Spectron 600D is configured for operation at specific voltage and frequency
combinations, as determined at the time of the order. The unit should be connected to the appropriate grounded electrical supply of the following:
•
•
•
•
1.4
115 Vl60 Hz; 10A
230-240 VISO Hz; 5A
100 VISO Hz; 10A
100 Vl60 Hz; 10A
General Description
The Spectron 600D is an automatic microprocessor based portable leak detector
suitable for leak testing with no possibility of oil contamination of the test parts.
The system uses a turbo molecular high vacuum pump and a drag-diaphragm
foreline/roughing pump for sensitive, ultra-clean testing in the Direct Flow
mode. The Spectron 600 features automatic tuning and calibration with a built-in
calibrated leak, an internal 16 cfm dry mechanical pump, reject/accept settings
and indication, automatic ranging, auto-zeroing, audio output, and built-in sniffing capability.
The Spectron 600D offers two performance modes:
Product Testing mode using Direct flow only for highly accurate and
repeatable testing to exact leak tightness specifications
Process System Testing mode using Reverse and Direct flows to allow
for quick and precise location of leaks in clean room vacuum systems
and chambers.
The Spectron 600D is shipped in the Process System Testing mode. A complete
description of how to set up the Spectron 600D for Product Testing mode is
included in Section 2, Operating the Spectron 600D.
g-ii
1.5
Features & Specifications
OVERALL SYSTEM
Start-Up:
Fully functional in less than 4 minutes. Consists of turbo
molecular pump acceleration, a complete set of
self-diagnostics, turning on filament, checking and
assuring hi-vac status, measuring system offsets and
background helium
Tuning:
Automatic
Calibration:
Automatic for Helium 4 using an internal calibrator of
lxlO-8 to 3xlO-8 std cc Isec air equivalent
Internal Calibrator: Temperature compensated Helium (4) leak standard
between IxlO-8 to 3xlO-8 atm cc/sec air equivalent
with integral solenoid valve. Traceable to NIST. Quick
disconnect for easy re-calibration.
Testable Masses:
Helium Mass 3 or 4
Auto Zero:
Automatic "zeroing" of leak rate while in test mode
initiated by pressing the ZERO push-button
Background
Compensation:
Continuous automatic compensation of system background
Ranging:
Automatic or Manual
Measurement
Units:
Pressure: milliTorr or millibar (selectable with a switch
located underneath the Service Panel accessible when the
unit's front panel has been opened)
Leak Rate: atm cdsec (atmospheric cubic centimeters/second) or mbar Usec (millibar liters/second)
g-iii
PERFORMANCE SPECIFICATIONS/PRODUCT TESTING MODE
Flow Modes:
Direct flow for leaks between 10xlQ-5 atm cc/sec and
6xlQ-1l atm cc/sec air equivalent. Reverse flow (gross
mode) for leaks above IQxlQ-5 atm cc/sec (with external
pump only)
Sensitivity:
6xlQ-1l atm cc/sec air equivalent at full pumping speed
Response Time:
< 2 sec for fine leaks
< 3.5 sec for gross leaks
Resolution:
Resolving Power of 14 at Mass 4
Noise Level:
< 6% of full scale on the 10-10 scale
Leak Range:
IQxlQ-5 atm cc/sec to 6xlQ-l atm cc/sec air equivalent
10 to 6xlQ-1l atm cc/sec air equiv. with optional external
pump
Max. Inlet
Pressure:
25 mTorr (Direct Test Mode)
Max. Crossover
Pressure:
150 mTorr (Direct Test Mode)
Time to Test:
8 seconds oil a blank port to a pre-selected mode in a fine
leak range
Gross Testing:
Available with optional external pump
Sniffing:
Built-in capability. Optional Sniffer probe.
*All performanc~ data is determined in accordance with the applicable AVS Standard
g-iv
PERFORMANCE SPECIFICATIONS/PROCESS SYSTEM TESTING MODE
Flow Modes:
Automatically switches between Reverse and Direct flow
for leaks between IOxlO-4 atm cc/sec to 6xlO- 11 atm
cc/sec air equivalent. Reverse flow (gross mode) for leaks
above IOxlO-4 atm cc/sec (with external pump only).
Sensitivity:
_6xlO-9 atm cc/sec air equivalent in Reverse Flow
6xlO- 11 atm cc/sec air equivalent in Direct Flow
Response Time:
< 3.5 sec in Reverse Flow
< 2 sec in Direct Flow
Leak Range:
IOxlO-4 atm cc/sec to 6xlO- 11 atm cc/sec air equivalent
10 to 6xlO- 11 atm cc/sec air equiv. with optional external
pump.
Max. Inlet
Pressure:
>I 0 Torr
750 mTorr
25 mTorr
Gross Test Mode with optional external
pump
Reverse Flow (to 6xlO-9 atm cc/sec air
equivalent)
Direct Flow (to 6xlO- 11 atm cc/sec air
equivalent)
Max. Crossover
Pressure:
> 10 Torr
Time to Test:
<6 secs on a blank port in Reverse Mode
<8 secs on a blank port to a preselected range in Direct
Flow Mode:
(10-9 or 10- 10 range)
Gross Testing:
Available with optional external pump
Sniffing:
Built-in capability. Optional external sniffer probe.
Gross Test Mode with optional external
pump
2000 mTorr Reverse Flow (to 6x10-9 atm cc/sec air
equivalent)
150 mTorr Direct Flow (to 6x10- ll atm cc/sec air
equivalent)
g-v
VACUUM SYSTEM
Mechanical Pump: Built in 16 cfm drag/dual stage diaphragm dry mechanical
pump serves as foreline pump and internal roughing pump.
Turbomolecular
Pump:
Edwards EXTIO Turbo molecular Pump.
External Pum'p:
Optional dry,
Valves:
Reliable, fast acting solenoid valves rated for> 1 million
cycles. Provide positive fail safe sealing in case of power
failure.
Pressure Sensors:
Two Pirani gauges monitor test port and foreline pressures.
A built-in ionization gauge in the mass spectrometer tube
monitors high vacuum pressure.
Mass Spectrometer: Dual sector mass spectrometer tube (dual 90" deflection)
completely eliminates unwanted background scattering
effects and reduces background signals below the limit of
detectability to provide an excellent signal to noise ratio. A
heavy ion trap extends the time of operation between
maintenance cycles. The helium ion beam exiting from
the second magnet has an extremely high order of mass
purity. Source and collector assemblies are flanged and
self-aligning. Patented self-cleaning heated repeller
continually heats the spectrometer ion source preventing
the formation of condensible contaminants. Two nonwarping, self-aligning filaments allow uninterrupted
testing. Automatic closed loop emission control lowers
filament current and extends life. The operational amplifier
is mounted under vacuum for maximum stability.
g-vi
ELECTRONICS
General:
Microprocessor controlled, completely protected from user errors.
Diagnostics automatically display error codes and messages on
alphanumeric display. State of the art Flash EPROM enables
:remote upgrading of software. NOVRAM retains user settings and
total running time when the unit is powered off. Real time clock
with battery backup maintains time and date.
RS-232
Port:
Two standard bidirectional ports. One port dedicated to the
optional remote control unit. The second port is dedicated to data
transfer to an external computer or control module. Provides for
remote computer control and data transfer, as well as remote
diagnostics and downloading of new software releases directly
from Edwards. Uniform field lengths allow for easy integration
and downloading of data into automated systems.
Printer Port: A parallel printer port is provided to transmit test results to any
PC-compatible printer. At the conclusion of a test, the leak rate,
the reject set point, reject or accept indication and the time and
date are sent to the printer.
OPERATOR INTERFACE
Control
Panel:
User friendly, highly reliable tactile membrane switch panel. Bar
graphs clearly display leak rate and test port pressure information.
Start/vent switches with Ready indication light and ranging
switches control test cycle. Reject and Accept indications are
made with red and green LEDs.
Thning
Controls:
Single button for complete automatic tuning. Cal Check button
verifies tuning and calibration at any time. Single Calibrate
button adjusts gain automatically at the end of a Calibration Check.
Service
Panel:
A flip-open door provides easy access to settings and diagnostic
functions for maintenance personnel. A switch inside the unit
enables the service mode.
Remote:
Optional remote unit provides start/vent switches and ranging
controls along with leak rate readout up to 100 feet from the leak
detector. Highly reliable tactile membrane switches and light
weight rugged design. Standard coiled cord length of 25 feet.
g-vii
PHYSICAL
Size:
15" H x 20.5" W x 14" D
(38 em H x 52 em W x 35 em D)
Weight:
Standard Enclosure: 961bs. (43.6 kg)
·Stainless Steel 116 lbs (52.7 kg)
Power
Requirements:
115V/60 Hz/I0A
230-240V/50 Hz/5A
l00V/50 Hz/lOA
l00V/60 Hz/IOA
g-viii
Section 2: Operating the Spectron 6000
2.1
Selecting the Mode of Operation
Before beginning any leak testing, the Spectron 600D must be set for the desired
mode of operation, either Product Testing mode (Direct flow) or Process
System Testing mode (auto-switching between Reverse and Direct modes). The
Spectron 600D is shipped set for Process System Testing mode.
It is recommended that Process System Testing mode be used if the intent is to
locate a leak in a process system, vacuum system or chamber, or if the parts
under test can not be sufficiently evacuated for Product Testing mode. This
mode utilizes both Reverse and Direct flows, automatically switching between
flows depending upon leak rate and inlet pressure. Leak testing in Reverse flow
can begin at an inlet pressure of 750 m Torr, and extends to a maximum sensitivity of 6xlO-9 atm cc/sec air equivalent. This allows finding of moderate leaks at
an extremely high inlet pressure.
While operating in Process System Testing mode, if the object under test may
be evacuated sufficiently (to approximately 25 mTorr or less, depending upon
volume), and the leak rate is less than 0.6 on the 10-8 range, the Spectron 600D
will automatically cross over into the Direct flow mode. Leak testing in Direct
flow extends to a maximum sensitivity of 6xlO- 11 atm cc/sec air equivalent. Once
cross over has been achieved, the leak detector will remain in Direct flow unless
the leak rate increases to a value greater than 9xlO-5 atm cc/sec, or the inlet pressure increases significantly.
Product Testing mode provides highly accurate and repeatable leak testing to
exact leak tightness specifications, but requires parts to be evacuated to a low
pressure (typically under 25 mTorr, depending upon volume and cleanliness)
before they may be tested. It is recommended that this mode be used if the parts
being tested require leak checking to a preset Reject point or leak rate value. The
leak rate range in Product Testing mode is from lOxlO-5 atm cc/sec to 6xlO- 11 atm
cc/sec air equivalent.
In either Product Testing or Process System Testing mode, the addition of the
external pump and external roughing valve allows for Gross leak testing and
extends the leak rate range to a maximum leak of 10 atm cc/sec air equivalent.
g-ix
2.2
Setting the Mode of Operation
The Spectron 600D is shipped set for Process System Testing mode (Reverse
and Direct Row modes). To change the mode of operation:
1.
Tum off power to the Spectron 600D
2.
Using a Philips head screwdriver, open the rear door.
3.
Find the two eight-position dip switches, located on the A board
in the right comer close to the rear door hinge, near the Service
toggle switch. They are marked SWl, Profile and SW2, Rev.
LOCATION OF PROFILE
1· .... •• .... ·1
AND REVISION SWITCHES
ON THE
A BOARD
I
I
Profile Switch
--~.: loo~~~~"$l
Revision Switch
-_~.: loo~o~~~ol
o
04-[]
@
o~-­
o~--
4.
Service Switch
Green LED
Red LED
All tabs on the Revision switch should be in the up position.
Tab #7 on the Profile switch should be in the down position.
All other tabs on the Profile switch should be in the up
position. This configuration indicates that the Spectron 600D is
,operating in the Process System Testing mode (Reverse and
Direct Row modes).
SPECTRON
6000,
PROCESS
SYSTEM TESTING MODE
000000
PROFILE SWITCH
(POSITION
#7
DOWN)
g-x
5.
To switch to Product Testing Mode (Direct Flow mode only), put
Tab #6 on the Profile switch in the down position. Leave Tab #7
down.
SPECTRON
6000,
PRODUCT TESTING MODE
o
PROFILE SWITCH
(POSITIONS
0 [10 0
#6 AND #7
DOWN)
2.3
6.
Close the rear door. Turn on the power switch. The Spectron
600D will power up the Product Testing Mode.
7.
To return to Process System Testing mode, turn off the Spectron
600D, open the rear door, and set Tab #6 on the Profile switch
back to the up position.
Operator Controls and Indicators
The Operator Controls and Indicators are fully described in the Spectron 600
Operations and Maintenance Manual, Section 2.2.
In Product Testing Mode, G2 (Reverse Flow Gain) and Crossover 2 (Reverse
Flow Crossover) are not used, as the system is operating in Direct Flow only.
Refer to the Quick Reference Guide for User and Service Panel functions.
g-xi
2.4
Vacuum Leak Testing, Product Testing Mode
(without optional external pump)
1.
Connect the test object to the test port located on top of the
Spectron 600D.
2.
:Press the green Start push-button.
3.
The rough valve opens and the test port and test object are
pumped down. The Test Port pressure bar graph will indicate the
decrease in test port pressure. The Minimum Roughing timer
(D6) starts.
4.
When the test port pressure reaches Crossover 2 (Direct How
Crossover), and the Minimum Roughing timer has expired, the
Fine Crossover Delay (D 1) will commence. This delay may be
increased from the default value of 0.1 seconds if the testpart is
large or has a high gas load in order to minimize the high vacuum
burst at crossover and the stress on the filament.
5.
When the Fine Crossover Delay expires, the Fine valve will open
and the Rough Close Delay (D2) will commence. In most cases
this delay should be set for 0.1 seconds. When the Rough Close
Delay expires, the rough valve will close.
6.
Begin spraying helium around the object under test. If the system
is set for Automatic ranging, leak testing will start in the 10-5
atm cc/sec range. If the unit is set for Manual ranging, leak test
will start in whichever range, between 10-5 and 10-10 atm cc/sec,
is chosen.
7.
If the unit is in Manual ranging, leak testing will continue in the
range chosen until the StopNent push-button is pressed (or the
Start push-button is pressed to interrupt the cycle). To change
ranges during testing, press the Range Up or Down arrows on the
User Panel.
8.
If the unit is in Automatic Ranging, the Spectron 600D will look
for leaks in the 10-5 atm cc/sec range, then range downward if no
leaks are found. If no leaks are found on any range, the unit will
continue to range downward to the most sensitive level, the 10- 10
atm cc/sec range. If a leak is found on any particular range, the
g-xii
Spectron 600D will stop at that range. If a larger leak is found, the
leak detector will range upward to the level of the leak.
9.
'At any time during testing, the Spectron 600D may be switched to
Manual Ranging by pressing the AutolManual Ranging switch, or
the Range Up or Down Arrow switches.
10.
If the leak rate specification is tight, and the object under test is
believed to have significant background levels, it is suggested that
the object be allowed to range down to the level of its background
before helium is sprayed. When the background level is stable,
press the Zero switch to cancel out the background, then begin
spraying helium. The Zero function will cancel out a maximum of
two decades of background helium. This will allow the leak rate
of the part to be identified separately from the background.
11.
2.5
When leak testing is complete, press the StopNent push-button.
Holding the switch for a period longer than the Vent Delay (D3)
will automatically vent the test port and the test object. The vent
valve will remain open until the test port pirani has indicated a
reading of Atm (atmosphere) for a the time set as Vent Duration
(04). Remove the test object from the test port.
Vacuum Leak Testing, Product Testing Mode
(with optional external pump)
1.
Connect the test object to the test port located on top of the
Spectron 600D.
2.
Press the green Start push-button.
3.
The external rough valve opens and the test port and test object
are pumped down. The Test Port pressure bar graph will indicate
the decrease in test port pressure. The Minimum Roughing timer
(D6) starts.
4.
When the test port pressure reaches the gross test crossover (set
by the internal computer), and the Minimum Roughing timer has
expired, the Gross valve opens and the minimum Gross Test timer
(D5) starts.
g-xiii
5.
Begin spraying .helium around the object to be tested. Leak testing
starts in the 10-3 atm cc/sec range. If a leak larger than 9 x 10-3
atm cc/sec is found, the Spectron 600D will range upward to the
level of the leak. If no leak larger than 0.6 x 10-3 atm cc/sec is
found, the unit will range downward to the 10-4 range.
6.
If no leak larger than 0.6 x 10-4 atm cc/sec is found, and the
Minimum Gross Test timer has expired, the Spectron 600D
internal computer will check the test port pressure.
7.
When the test port pressure reaches Crossover 2 (Direct Flow
Crossover), the Fine Crossover Delay (01) will commence. This
delay may be increased from the default value of 0.1 seconds if
the test part is large or has a high gas load in order to minimize
the high vacuum burst at crossover and the stress on the filament.
8.
When the Fine Crossover Delay expires, the Fine valve will open
and the Rough Close Delay (02) will commence. In most cases
,this delay should be set for 0.1 seconds. When the Rough Close
Delay expires, the external rough valve will close.
9.
Continue spraying helium around the object under test. The
Spectron 600D will switch to the 10-5 atm cc/sec range for
testing for fine leaks in the Direct Flow mode.
10.
The Spectron 600D will look for leaks in the 10-5 atm cc/sec
range, then range downward if no leaks are found. If no leaks are
found on any range, the unit will continue to range downward to
the most sensitive level, the 10-10 atm cc/sec range. If a leak is
found on any particular range, the unit will stop at that range. If a
larger leak is found, the Spectron 600D will range upward to the
level of the leak.
11.
At any time during testing or in standby, the Spectron 600D may
be switched to Manual Ranging by pressing the AutolManual
Ranging switch, or the Range Up or Down Arrow switches.
12.
If the unit is in Manual ranging, leak testing will occur in the
range chosen and in the appropriate flow mode; Gross Testing in
the ranges between 100 and 10-4 atm cc/sec and Direct Flow
Testing in the ranges between 10-5 and 10- 10 atm cc/sec. To
change ranges during testing, press the Range Up or Down arrows
on the User PaneL
g-xiv
2.6
13.
If the leak rate specification is tight, and the object under test is
believed to have significant background levels, it is suggested that
the object be allowed to range down to the level of its background
before helium is sprayed. When the background level is stable,
press the Zero switch to cancel out the background, then begin
spraying helium. The Zero function will cancel out a maximum of
two decades of background helium. This will allow the leak rate
of the part to be identified separately from the background.
14.
When leak testing is complete, press the StopNent push-button.
Holding the switch for a period longer than the Vent Delay (D4)
will automatically vent the test port and the test object. The vent
valve will remain open until the test port pirani has indicated a
reading of Atm (atmosphere) for a the time set as Vent Duration
(04). Remove the test object from the test port.
Vacuum Leak Testing, Process System Testing Mode
(without the optional external pump)
1.
Connect the test object to the test port located on top of the
Spectron 600D.
2.
Press the green Start push-button.
3.
The rough valve opens and the test port and test object are
pumped down. The Test Port pressure bar graph will indicate the
decrease in test port pressure. The minimum Roughing timer
(D6) starts.
4.
When the test port pressure reaches Crossover 1 (Reverse Flow
Crossover), and the Minimum Roughing timer has expired, the
foreline valve opens and leak testing starts in Reverse Flow mode
in the 10-4 atm cc/sec range.
,
5.
Begin spraying helium around the object under test. If no leak
larger than 0.6xlO-4 atm cc/sec is found, the Spectron 600D will
range downward until a leak is found.
6.
If the Spectron 600D ranges down to the 10-8 atm cc/sec range
and finds no leak larger than 0.6xlO-8 atm cc/sec, the internal
computer will check the test port pressure to determine if the unit
can cross over into Direct Flow.
g-xv
7.
When the test port pressure reaches Crossover 2 (Direct Flow
Crossover), the Fine Crossover Delay (Dl) will commence. This
delay may be increased from the default value of 0.1 seconds if
the test part is large or has a high gas load in order to minimize
the high vacuum burst at crossover and the stress on the filament.
8.
When the Fine Crossover Delay expires, the Fine valve will open
and the Rough Close Delay (D2) will commence. In most cases
this delay should be set for 0.1 seconds. When the Rough Close
Delay expires, the rough valve will close.
9.
Continue spraying helium around the object under test. Leak
testing in the Direct Flow mode will start in the 10-9 atm cc/sec
range. If no leak larger than 0.6xlO-9 atm cc/sec is found, the
Spectron 600D will range downward to the 10- 10 range.
10.
If a larger leak is found, the Spectron 600D will remain in the
Direct Flow mode and range upward to the level of the leak. If the
leak rate exceeds 9xl0-5 , the unit will cross back into the
Reverse Flow mode.
11.
At any time during testing or in Standby, the Spectron 600D may
be switched to Manual Ranging by pressing the AutolManual
Ranging switch, or the Range Up or Down Arrow switches. The
unit will leak test in the range chosen and in the appropriate flow
mode (Direct or Reverse) unit the range is changed by the operator.
12.
If the leak rate specification is tight, and the object under test is
believed to have significant background levels, it is suggested that
;the object be allowed to range down to the level of its background
before helium is sprayed. When the background level is stable,
press the Zero switch to cancel out the background, then begin
spraying helium. The Zero function will cancel out a maximum of
two decades of background helium. This will allow the leak rate
of the part to be identified separately from the background.
13.
When leak testing is complete, press the StopNent push-button.
Holding the switch for a period longer than the Vent Delay (D3)
will automatically vent the test port and the test object. The vent
valve will remain open until the test port pirani has indicated a
reading of Atm (atmosphere) for a the time set as Vent Duration
(D4). Remove the test object from the test port.
g-xvi
2.7
Vacuum Leak Testing, Process System Testing
(with the optional external pump)
1.
Connect the test object to the test port located on top of the
Spectron 600D.
2.
Press the green Start push-button.
3.
The external rough valve opens and the test port and test object
are pumped down. The Test Port pressure bar graph will indicate
the decrease in test port pressure. The Minimum Roughing timer
(D6) starts.
4.
When the test port pressure reaches the gross test crossover (set
by the internal computer), the Gross valve opens and the
minimum Gross Test timer (D5) starts.
5.
Begin spraying helium around the object to be tested. Leak testing
starts in the 10-3 atm cc/sec range. If a leak larger than 9xlO-3
atm cc/sec is found, the Spectron 600D will range upward to the
level of the leak. If no leak larger than O.6xlO-3 atm cc/sec is
found, the unit will range downward to the 101 range.
6.
If no leak larger than O.6xlO-4 atm cc/sec is found, and the
Minimum Gross Test timer has expired, the Spectron 600D
internal computer will check the test port pressure.
!
7.
When the test port pressure reaches Crossover 1 (Reverse Flow
Crossover), and the Minimum Roughing timer has expired, the
external rough valve closes and leak testing starts in Reverse
Flow mode in the 10-5 atm cc/sec range.
8.
Begin spraying helium around the object under test. If no leak
larger than O.6xlO-5 atm cc/sec is found, the Spectron 600D will
range downward until a leak is found.
9.
If the Spectron 600D ranges down to the 10-8 atm cc/sec range
and finds no leak larger than O.6xlO- 8 atm cc/sec, the internal
computer will check the test port pressure to determine if the unit
can cross over into Direct Flow.
g-xvii
10.
When the test port pressure reaches Crossover 2 (Direct Flow
Crossover), the Fine Crossover Delay (Dl) will commence. This
delay may be increased from the default value of 0.1 seconds if
the test part is large or has a high gas load in order to minimize
the high vacuum burst at crossover and the stress on the filament.
11.
When the Fine Crossover Delay expires, the Fine valve will open
and the Rough Close Delay (D2) will commence. In most cases
this delay should be set for 0.1 seconds. When the Rough Close
Delay expires, the external rough valve will close.
12.
Continue spraying helium around the object under test. The
Spectron 600D will begin leak testing in the Direct flow mode in
the 10-9 atm cc/sec range.
13.
If no leaks are found in the 10-9 atm cc/sec range, the Spectron
600D will range downward to the most sensitive level, the 10- 10
atm cc/sec range. If the leak rate increases to be greater than
9xlO-5 atm cc/sec, the Spectron 600D will cross back into the
Gross testing 'mode.
14.
At any time during testing or in standby, the Spectron 600D may
,be switched to Manual Ranging by pressing the AutolManual
'Ranging switch, or the Range Up or Down Arrow switches.
15.
If the unit is in Manual ranging, leak testing will occur in the
range chosen and in the appropriate flow mode; Gross Testing in
the ranges between 100 and 10-4 atm cc/sec, Reverse Flow
testing in the ranges between 10-5 and 10-8 atm cc/sec and
Direct Flow Testing in the ranges between 10-9 and 10- 10
atm cc/sec. To change ranges during testing, press the Range Up
or Down arrows on the User Panel.
g-xviii
16.
If the leak rate specification is tight, and the object under test is
believed to have significant background levels, it is suggested that
the object be allowed to range down to the level of its background
before helium is sprayed. When the background level is stable,
press the Zero switch to cancel out the background, then begin
spraying helium. The Zero function will cancel out a maximum of
two decades of background helium. This will allow the leak rate
of the part to be identified separately from the background.
17.
2.8
When leak testing is complete, press the StopNent push-button.
Holding the switch for a period longer than the Vent Delay (D3)
will automatically vent the test port and the test object. The vent
valve will remain open until the test port pirani has indicated a
reading of Atm (atmosphere) for a the time set as Vent Duration
(D4). Remove the test object from the test port.
Sniff Testing
Sniff Testing is available in both Product Testing and Process System testing
modes. Refer tp the Spectron 600 Operations and Maintenance Manual for a
complete description.
2.9
Setting Test and System Parameters; Test Aides
Refer to the Spectron 600 Operations Manual, Sections 2.7, 2.8 and 2.9.
2.10
Shut Down Procedure
The Spectron 600D may be shut down at any time by pressing the main On/Off
switch to the Off position. No special procedure is required.
WARNING!
If the Spectron 600D has been running and is turned Off, wait at least thirty
(30) seconds before turning power back On. Failure to do this may result in
the diaphragm stage of the internal dry pump not properly re-powering, and
could cause damage to the pump.
g-xix
Section 3 Service and Maintenance
3.1
Service Mode
WARNINGI
Only qualified service personnel should operate the unit when either the front
or rear panels are open. PotentiaUy lethal high voltages are continuaUy
applied to the circuit boards and other areas within the unit during its operation. F ai/ure to foUow this precaution may lead to severe injury or death.
The Service Mode of the Spectron 600 is intended for use by qualified Edwards
Service personnel or users specifically trained by Edwards. Under no circumstances should any individual be assigned access to this mode without a thorough knowledge of vacuum systems as well as the Spectron 600D System. Use
by an unqualified operator may result in damage to the unit and/or personal
i
injury.
In Service Mode the Spectron 600D may be operated as a totally manually operated and sequenced leak detector. In this mode the vacuum system of the unit
operates without its normal computer protected safeguards. Contamination
and/or damage to the unit will occur if the vacuum system is not properly
sequenced. If in any doubt, operate the various valves and controls that comprise the vacuum system in the same sequence as the Spectron 600D operates in
its standard/fully automatic mode.
To perform many of the service and/or repair procedures described in this
section, the Spectron 600D will have to be placed into its Service Mode. To
place the unit in Service Mode:
1)
Open the rear panel of the unit (loosen the 114-turn screw at the
top of the panel, then gently lower the door).
2)
A circuit board is mounted on the inside of the rear panel. On the
pght side towards the top of the board a black push-button is
found. Press the push-button. The unit is now in Service Mode
and the Service Mode indicator on the unit's front panel is
illuminated.
g-xx
3.2
Calibration and Tuning
The Spectron 600D Automatically tunes and calibrates in the same manner as the
Spectron 600T, except that when set for Product Testing mode, the Reverse flow
mode is not calibrated.
It is recommended that a Cal Check be performed regularly on the Spectron
600D. This should be done at least once a day and more often if the leak detector
is under heavy use or if required by the testing specification.
A full Automatic Tune cycle should be initiated on the Spectron 600D weekly.
This will ensure that the system mass spectrometer remains optimized.
i
Refer to the Spectron 600 Operations and Maintenance Manual for a complete
description of Cal Check and Automatic Tuning.
3.3
Periodic Service
Clean Test Port Centering Ring:
A properly sealing test port O-ring is essential in assuring rapid pump down of a
test object. The O-ring should be inspected frequently, at least once each week.
To access the O-ring, remove the NW clamp and centering ring atop the test
port. With a nonmetallic instrument or by hand, carefully remove the O-ring.
Wipe the O-ring with a lint free cloth and inspect it carefully for any damage
such as any cuts, wear or flat spots. Replace the O-ring if any damage is
observed. Re-install the O-ring onto the centering ring. Reattach the centering
ring and clamp, being careful to avoid damaging the O-ring.
Check Air Filters:
The Spectron 600D has one large filter that cleans the cooling air drawn into the
unit. The filter is located within the left side panel (as viewed from the front of
the unit).
The reusable wire mesh filter can be removed for cleaning by removing the screws
that attaches the filter to the outer panel. It may be cleaned with compressed air
(in the reverse direction of normal air intake) or can be washed with soap and
water. The HEPA filters on the Stainless Steel unit can not be cleaned and must be
replaced. Refer to Section 4, Parts, for the HEPA filter Part Numbers.
g-xxi
Check Exhaust Filter on Internal Dry Pump
The internal Dry pump has an exhaust filter/muffler on the diaphragm section of
the pump. Check this filter periodically to ensure that excess particles or dust
which could inhibit proper exhausting of the pump have not accumulated. The
filter/muffler may be removed and cleaned with clean, high pressure air, or
replaced.
3.4
Contamination of the Vacuum System and Dry Pump
Problems
All leak detectors are subjected to contamination of the vacuum system by
repeated exposure to gases and other matter drawn from test objects during ordinary testing. This matter will settle throughout the vacuum system. Special consideration should always be given for contamination of the mass spectrometer
and the diaphragms of the dry drag/diaphragm pump. As a result of contamination, system performance will drop and sensitivity will decrease. Cleaning and
re-calibration of the vacuum system is necessary to restore the unit to optimum
performance.
Drag/diaphragm dry pumps have rubber diaphragms which may become worn,
tom or saturated with helium. Troubleshooting aides for the dry pump are included below. Replacement diaphragms may be obtained from Edwards, either as
part of the Maintenance Kit or individually (see the Recommended Spare Parts
in Section 4, Parts).
Indications of Contamination or, Dry Pump Problems
i
1.
The amplifier gain is excessively high (G2 > 8 or G3 > 6). This indicates
that the sensitivity of the mass spectrometer has decreased and the automatic
gain compensation of the unit is reaching its limit. Verify tuning by performing
the Tune function. If after the Tune function has been performed, the gain value
is not lower than previously reported, the mass spectrometer should be removed
from the high-vacuum system and cleaned (the procedure is described in the
Spectron 600 Operations and Maintenance Manual).
2.
The foreline pressure cannot be reduced to less than 15 Torr. This may
be an indication that one or both of the diaphragms in the internal dry pump is
tom or unseated, due to wear. The diaphragm(s) should be replaced (see Section
4, Parts).
g-xxii
3.
The foreline pressure cannot be pumped to less than 4 Torr. This may be
an indication that the drag section of the internal dry pump is not functioning
properly. Contact Edwards Service.
4.
With the test port plug in place, the leak rate indicator does not reach a
zero reading eyen after prolonged pumping. This condition indicates that the
accumulated contaminants within the unit have absorbed a high amount of test
helium. When this occurs, place the unit in its standby mode for a minimum of
three minutes. The unit will be able to pump away some of the background helium and to take new measurements. Re-testing of the test object is recommended
at this point. If the situation is still not remedied, a system-wide cleansing of the
internal components of the unit is in order. It may also help to change the
diaphragms on the internal dry pump, as they may have become excessively saturated with helium.
Note that it is possible that the symptoms listed above may also be due to causes
other than contamination. The following problems should be considered and
eliminated prior to proceeding with contamination-related service:
• leak in the vacuum system
• incorrectly tuned spectrometer
• malfunctioning turbo molecular pump
Sensitivity Check
A sensitivity check provides an indication of how the leak detector is responding
to repeated exposure to gases drawn into its vacuum system. Matter contained in
these gases tends to contaminate the mass spectrometer and reduce its sensitivity.
The unit's computer senses this reduction and automatically compensates for this
loss by increasing the helium signal amplifier gain (the Amplifier Gain function
divided into G 1, gain during gross mode testing; G2, gain during reverse mode
testing; or G3, gain during direct mode testing). Ultimately, if the unit were to be
left unserviced, through continuing computer adjustment in response to increasing
contamination, the reserve gain would be exhausted. A cleaning and re-calibration of the mass spectrometer components is necessary to prevent this condition.
A sensitivity check is made by first performing a Cal Check. When the Cal
Check has been completed and the unit is fully calibrated, press the SELECT
momentary switches on the Service Panel until the AMP GAIN function is
reached. As stated above, three Gain measurements are available: G 1, G2 and
G3. The SELECT switches are also used to toggle between the three measurements. The scale of amplifier gain is between 0.1 and 10.
g-xxiii
Typical gains for a clean system are:
G1:
G2:
G3:
(set by the User, not affected by Auto Tune or Cal Check)
:2 - 4
1 - 3.
As the system progressively becomes more contaminated, the gain also increases
(becomes closer to 10).
To correct this condition, the Tune function must be used (as described in the
Spectron 600 Operations and Maintenance Manual). It is recommended that the
Spectron 600D be tuned weekly to ensure that the mass spectrometer remains
optimized. If the Tune function has been performed, and either G2 is greater than
8 or G3 is greater than 6, the mass spectrometer assembly should be removed,
cleaned and re-calibrated as described in the Spectron 600 Operations and
Maintenance Manual.
Pump Contamination
Unlike the Spectron 6OOT, the Spectron 600D Leak Detector does not have the
internal Purge valve connected to the internal pump. As the internal
drag/diaphragm pump contains no oil, purging of the pump to drive contaminants out of the oil is obviously unnecessary. If excess helium accumulates in the
pump, allow the system to remain in standby until the internal pump cleans up
the helium (pumps it away).
3.5
Venting and Cleaning the Vacuum System
Refer to the Spectron 600 Operations and Maintenance Manual for complete
instructions on venting and cleaning the vacuum system of the Spectron 600D.
Refer to the manufacturer's manual for cleaning instructions for the drag section
of the internal dry pump.
3.6
Calibration Requirements
Refer to the Spectron 600 Operations and Maintenance Manual for Calibration
requirements.
3.7
General Service & Repair
Refer to the Spectron 600 Operations and Maintenance Manual for General
Service and Repair, including Servicing the Valves, Replacing the Filaments,
Replacing the Internal Leak Standard and Circuit Board Replacement.
g-xxiv
Section 4: Parts
4.1
Introduction
This section contains a listing of recommended spare parts for the Spectron
6ooD, as well as an illustration of the internal dry pump with major components
and replaceable parts identified.
Illustrated parts lists of the vacuum system and the valve block are included in
the Spectron 600 Operations and Maintenance Manual, Chapter 5.
4.2
Recommended Spare Parts for the Spectron 6000
Description
Part Number
Mass Spectrometer
Source Assembly
Source Rebuild Kit
Collector Assembly
Filament Kit
D155-01-816
D155-01-817
D155-01-815
D155-01-818
D155-01-820
Diaphragm Pump
115V/60 Hz & looV/60 Hz
230-240VI 50 Hz
looV/50 Hz
D155-04-115
D155-03-230
D155-03-1oo
Drag Pump
Pump
Pump Power Supply
Inlet Screen
D155-03-3oo
D155-03-310
D155-02-873
Turbomolecular Pump
Turbo Controller
Turbo Cable
B722-01-000
D396-20-000
D396-18-010
Pirani Gauge
D155-02-826
Circuit Boards
ABoard
B Board
C Board
D Board
CPU Board
D155-01-850
D155-01-851
D155-01-852
D155-0l-853
D155-0l-854
g-xxv
Maintenance Kit
O-Ring Kit
Air Filter
Filament Kit
High Vacuum Grease
Tool Kit
LED - Start Switch
Fuse; 90 - 115V
Fuse; 200 - 260V
Filter, Silencer, 114 NPT
Filter, Silencer, liS NPT
Filter, liS NPT, male
Muffler, 114 NPT, male
Diaphragm, Dry Pump
'Grease Syringe, Dry
Pump Drag Stage
O-Ring, 3 liS ill x 3116
Cabinet Air Filters
Standard Unit:
Mesh Filter
Stainless Steel Unit:
HEPA Filter, Rear Panel
HEPA Filter, Side Panel
4.3
D155-03-800
DI55-02-S00
D155-02-S27
D155-01-S20
U300-02-075
D155-01-S25
D155-02-S54
D155-02-S53
D155-02-S52
D155-02-S42
D155-02-S44
DI55-02-S55
DI55-02-S56
D155-02-S57
D155-02-S5S
D155-02-S59
DI55-02-S27
D155-02-S60
D155-02-S61
Spectron 6000 Optional Accessories
Cart
Stainless Steel Cart
Hand Held Remote
Vacuum Sniffer Probe
Hard Travel Case
External Roughing Option Kit
g-xxvi
D155-01-500
D155-05-500
D155-0l-51O
D155-0l-520
D155-0l-530
D155-01-540
4.4
Internal Dry Pump Illustrated Parts List
Item #
Description
1
Diaphragm Pump Assembly:
115V/60 Hz, l00V/60 Hz
230-240V/50 Hz
l00V/50 Hz
Part Number
DI55-04-115
DI55-03-230
DI55-03-100
Vent Valve:
115V160 Hz, l00V160Hz
230-240V/50 Hz
l00V/50 Hz
DI55-02-863
DI55-02-864
DI55-02-865
3
Vacuum Switch
DI55-02-866
4
Timer
DI55-02-867
5
Filter, 1/8 NPT, male
DI55-02-855
6
Vent Orifice
DI55-02-869
7
Muffler, 1/4 NPT, male
DI55-02-856
8
Tubing, Flexible, SST
DI55-02-871
9
Drag Pump
DI55-03-300
10
Inlet Screen, Drag Pump
DI55-02-873
11
Manifold, Drag Pump
DI55-02-874
12
Centering Ring, ISO 63
B271-58-170
13
Claw Clamp
DI55-02-830
14
Power Supply, Drag Pump
DI55-03-310
g-xxvii
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g-xxviii
Return of Edwards Equipment - Procedure
(Fonn HS1)
Introduction
Before you return your equipment you must warn your supplier if the substances you used (and produced) in the
equipment can be dangerous. You must do this to comply with health and safety at work laws.
You must complete the Declaration (HS2) on the next page and sent it to your supplier before you dispatch
the equipment. If you do not, your supplier will assume that the equipment is dangerous and he will refuse to
accept it. If the Declaration is not completed correctly, there may be a delay in processing your equipment.
Guidelines
Take note of the following guidelines:
•
•
•
Your equipment is 'uncontaminated' if it has not been used or if it has only been used with substances that
are not dangerous. Your equipment is 'contaminated' if it has been used with any dangerous substances.
If your equipment has been used with radioactive substances, you must decontaminate it before you return it to
your supplier. You must send independent proof of decontamination (for example a certificate of analysis) to
your supplier with the Declaration (HS2). Phone your supplier for advice.
We recommend that contaminated equipment is transported in vehicles where the driver does not share the
same air space as the equipment.
PROCEDURE
Use the following procedure:
1.
Contact your supplier and obtain a Return Authorization Number for your equipment.
2.
Turn to the next page(s), photocopy and then complete the Declaration (HS2).
3.
Remove all traces of dangerous gases: pass an inert gas through the equipment and any accessories which will
be returned to your supplier. Drain all fluids and lubricants from the equipment and its accessories.
4.
Disconnect all accessories from the equipment. Safely dispose of the filter elements from any dl mist filters.
5.
Seal up all of the equipment's inlets and outlets (including those where accessories were attached). You may
seal the inlets and outlets with blanking flanges or heavy gauge PVC tape.
6.
Seal contaminated equipment in a thick polythene bag. If you do not have a polythene bag large enough to
contain the equipment, you can use a thick polythene sheet.
7.
If your equipment is a large pump (or any other large piece of equipment), strap the equipment and its
accessories to a wooden pallet. Preferably, the pallet should be no larger than 510mm x 915mm (20" x 35');
contact your supplier if you cannot meet this requirement.
8.
If your equipment is too small to be strapped to a pallet, pack it in a suitable strong box.
9.
If the equipment is contaminated, label the pallet (or box) in accordance with laws covering the transport
dangerous substances.
10. Fax or post a copy of the Declaration (HS2) to your supplier. The Declaration must arrive before the
equipment.
11. Give a copy of the Declaration to the carrier. You must tell the carrier if the equipment is contaminated.
12. Seal the original Declaration in a suitable envelopes attach the envelope securely to the outside of the
equipment package. WRITE YOUR RETURN AUTHORISATION NUMBER CLEARLY ON THE
OUTSIDE OF THE ENVELOPE OR ON THE OUTSIDE OF THE EQUIPMENT PACKAGE.
of
Return of Edwards Equipment- Declaration
I
(FormHS2)
Return Authorization Number:
You must:
Know about all of the substances which have been used and produced in the equipment before you complete this Declaration
•
Read the Procedure (HS 1) on the previous page before you attempt to complete this Declaration
•
Contact your supplier to obtain a Return Authorization Number and to obtain advice if you have any questions
•
Send this form to your supplier before you return your equipment
SECTION 1 : EQUIPMENT
FOR SEMICONDUCTOR APPLICATIONS ONLY:
Tool Reference Number _ _ _ _ _ _ _ _ _ __
Proc~ ________________________
Equipment model ________________
Serial Number ___________________
Failure Date ___________________________
Has the equipment been used, tested, or operated?
yes
0
Go to Section 2
no
0
Serial Number of Replacement Pump _____________
Go to Section 4
SECTION 2: SUBSTANCES IN CONTACT WITH THE EQUIPMENT
Are any of the substances used or produced in the equipment
•
Radioactive
•
yes 0
yes 0
noD
Biologically active
Dangerous to human health and safety?
yes 0
noD
If you have answered 'no' to all oftbese questions,
go to Section 4.
noD
Your supplier will not accept delivery of any
equipment that is contaminated with radioactive
substances, unl~ you:
•
Decontaminate the equipment
•
Provide proof of decontamination
YOU MUST CONTACT YOUR SUPPLIER FOR
ADVICE BEFORE YOU RETURN SUCH
EQUIPMENT
SECTION 3: LIST OF SUBSTANCES IN CONTACT WITH THE EQUIPMENT
Substance name
Chemical
symbol
Precautions required
(for example, use protective gloves, etc.)
Action required after spillage
or human contact.
1
2
3
4
5
6
SECTION 4 : RETURN INFORMATION
Reason for return and symptoms of malfunction: ________________________________________________________
If you have a warranty claim:
who did you buy the equipment from ? _________________________________________________________
•
give the supplier's invoice number _____________________________________________________________
SECTION 5: DECLARATION
Print your nrune: ________________________ Print your job title: ______________________________________
Print your organization: __________________________________________________________
Print your address:
Telephone number: ______________________
Date of equipment delivery: ______________________________
I have made reasonable inquiry and I have supplied accurate information in this Declaration. I have not withheld any information. I have followed the
Return of Edwards Equipment Procedure (HS 1) on the previous page.
Signed:
Edwards International Service
Europe
Americas
Pacific
United Kingdom
USA
Singapore
Edwards High Vacuum International
Manor Royal
Crawley
West Sussex
RH102LW
Tel: +44 (0) 1293528844
Fax: +44 (0) 1293 533453
Edwards High Vacuum International
One Edwards Park
301 Ballardvale Street
Wilmington
MA 01887-1075
Tel: + I (1) 508 658 541 0
Fax: + I (1) 508 658 7969
Edwards High Vacuum
338 Swee Hong Industrial Building
Circuit Road
Singapore 1337
Tel: +65 841 061 S
Fax: +65841 0625
Edwards High Vacuum Intentional
Sierra Technology Center
Building 'A' Suite 120
3 1-00 Alvin Devane Boulevard
Austin TX 78741
Tel: + I (1) 5123893883
Fax: + I (1) 512 389 3890
Japan
Belgium
Edwards
Bergensesteenweg 709
B 1600 Sint-Pieters-Leeuw
Tel: +32 (0) 2 363 0030
Fax: +32 (0) 2 363 0064
France
Edwards SA
125 Avenue Louis Roche
92238 Gennevilliers, Cedex
Tel: +331 (1) 47 98 24 01
Fax: +331 (1) 47 98 44 54
Germany
Edwards Hockyakuum GmbH
Postfach 1409
035004 Marburg
Tel: +49 (0) 6420 82410
Fax: +49 (0) 6420 824111
Haly
Edwards Alto Vuoto SpA
Via Carpaccio 35
20090 Trezzano Sui Naviglio
Milano
Tel: +39 (0) 248402258
Fax: +39 (0) 2 4840 1638
Switzerland
Edwards (ECH)
Postfach
CH-4104 Oberwil-Basel
Tel: +41 (0) 61 401 4344
Fax: +41 (0) 61 401 4352
1M!»?
EDWARDS
Edwards High Vacuum International
550 Sycamore Drive
.
Milpitas CA 95035
Tel: + I (1) 408 946 4707
Fax: + I (1) 408 946 8510
Edwards High Vacuum International
1810W. Drake Drive
Suite 101
Tempe, AZ 85283
Tel: + I (1) 602-777-7007
Sales Fax: + I (1) 602-777-2244
Service Fax:+ I (1) 602-777-2202
Canada
Edwards High Vacuum
Tel: + I (1) 800 387 4076
Fax: + I (1) 905 845 4924
Brazil
Edwards Alto Vacuo
Rua Bernardo Wrona, 222
Bairro do Limlo
02710 - Sao Paulo - SP
Tel: +55 (0) 11 8580377
Fax: +55 (0) 11 2652766
Nippon Edwards KK
Shuwa Shiba Park Building A-3 F
2-4-1 Shibakoen
Minato-Ku
Tokyo 105
Tel: +81 (0) 3 5470 6530
Fax: +81 (0) 3 5470 6521
Nippon Edwards KK
EsakaYodo Building SF
16-34 Enoki-cho
Suita-shi
Osaka 564
Tel: +81 (0) 6 384 7052
Fax: +81 (0) 6 384 7504
Nippon Edwards KK
508-1 Yomogi-machi
Kumamoto-shi
Kumamoto 861-55
Tel: +81 (0) 96 326 7300
Fax: +81 (0) 96 326 7302
Hong Kong
Edwards High Vacuum (Pacific)
1308 Tower 11
World Trade Square
123 Hoi Bun Road
Kwun Tong
Kowloon
Hong Kong
Tel: +(852) 2796 9111
Fax: +(852) 2796 9095
Republic of Korea
Songwon Edwards Ltd
Sun In Building
738-41 Panpo-Dong
Sochu Gu
Seoul
Tel: +82 (0) 25151811
Fax: +82 (0) 2 5151818
Edwards High Vacuum International is part ofBOC Limited
The stripe symbol is a trademark of the BOC Group
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