GCI E84 Emulator Application Users Manual

GCI E84 Emulator Application Users Manual
GCI E84 Emulator Application
Users Manual
Version 2.3
GCI E84 Emulator Application Users Manual
Version 2.3
Table of Contents
Overview ............................................................................................................................................................. 1
Getting Started ....................................................................................................................................................
Minimum System Requirements ..........................................................................................................
E84 Emulator Package Contents .........................................................................................................
E84 Interface Controller Power Requirements ...................................................................................
Typographical Conventions ..................................................................................................................
Installation .............................................................................................................................................
Troubleshooting WinNT / Win2000 / WinXP Installation .......................................................
Uninstalling the E84 Emulator Application ..........................................................................................
PC to E84 Emulator Connection ..........................................................................................................
Connecting to Parallel Port Version .......................................................................................
Connecting to USB Version ....................................................................................................
Powering Up the E84 Emulator ..............................................................................................
Connection Status Indicator ....................................................................................................
Using Optical Transceivers .....................................................................................................
2
2
2
2
2
3
3
3
4
4
4
4
4
5
E84 Handoff Modes ............................................................................................................................................
Single Handoff Mode ............................................................................................................................
Simultaneous Handoff Mode ................................................................................................................
Continuous Handoff Mode ....................................................................................................................
6
6
6
7
Using the E84 Emulator GUI .............................................................................................................................. 8
Main Menu ............................................................................................................................................ 8
Automated Active Test Setup Screen .................................................................................................. 9
Automated Passive Test Setup Screen ............................................................................................... 9
Select Default Tests Button .................................................................................................. 10
Select Unload Port Tests Button .......................................................................................... 10
De-Select All Tests Button .................................................................................................... 10
Test Setup Option Buttons .................................................................................................... 10
Run Selected Tests Button ..................................................................................... 10
New Test Button ...................................................................................................... 10
Save Test Button ..................................................................................................... 11
Recall Test Button ................................................................................................... 11
Return to Main Menu Button ................................................................................... 11
Continuous Handoff Test Setup Screen ............................................................................................ 12
Defining the Continuous Mode Test Sequence List ............................................................. 12
SELECTED CYCLES List ............................................................................................. 12
AVAILABLE CYCLES List ............................................................................................. 12
Add / Remove Buttons ............................................................................................ 13
Clear List Button ...................................................................................................... 13
Cycle Sorting Buttons .............................................................................................. 13
Default Cycles Buttons ............................................................................................ 13
Test Setup Option Buttons .................................................................................................... 13
Automated Test Screens .................................................................................................................... 14
Operator Action Required Screen ........................................................................................ 15
Default Timer Settings Screen .............................................................................................. 15
Operator Prompted Pass / Fail Screen ................................................................................ 16
Test NOTES Field ................................................................................................................... 16
Previous Test Button ............................................................................................................. 16
Run Current Test Button ....................................................................................................... 16
Next Test Button .................................................................................................................... 16
Abort Current Test Button ..................................................................................................... 17
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Abort Automated Testing Button .......................................................................................... 17
Automated Testing Completed Screen .............................................................................................. 17
Manual Control Screens ..................................................................................................................... 18
Active Mode Manual Control Screen ................................................................................... 18
Passive Mode Manual Control Screen ................................................................................ 18
Saved Test Information .................................................................................................................................... 18
Active Mode Test Report .................................................................................................................... 19
Active Mode Test Report - Unload Port Test ..................................................................................... 23
Passive Mode Test Report ................................................................................................................. 26
Continuous Mode Test Report ........................................................................................................... 29
Test Plans ......................................................................................................................................................... 31
Signal Status Verification Errors ......................................................................................................... 31
Active Mode Test Plan ........................................................................................................................ 31
TP Timer Settings ................................................................................................................. 31
Load / Unload Cycle Test ..................................................................................................... 32
SEMI® E87 Requirements Note ............................................................................................ 33
E84 Specification References .............................................................................................. 33
Active Mode Static Tests ....................................................................................................... 34
Active Mode Static Test A ........................................................................................ 34
Verify labeled DB-25 female E84 plug exists.
Active Mode Static Test B ........................................................................................ 34
Verify proper plug location.
Active Mode Static Test C ....................................................................................... 35
Verify Documented Recovery Procedures Exist.
Active Mode Functionality Tests ........................................................................................... 36
Active Mode Functionality Test A ............................................................................ 36
Verify Configurable Passive Equipment Timers
Active Mode Functionality Test B ............................................................................ 37
Verify Full Load / No Load Voltage
Active Mode Functionality Test C ............................................................................ 38
Verify Single Handoff Load Sequence
Active Mode Functionality Test C - 2nd Run ............................................................ 39
Verify Single Handoff Load Sequence 2
Active Mode Functionality Test D ............................................................................ 40
Verify Single Handoff Unload Sequence
Active Mode Functionality Test D - 2nd Run ............................................................ 41
Verify Single Handoff Unload Sequence - 2
Active Mode Functionality Test E ............................................................................ 42
Verify Handoff Available Signal Test for Load
Active Mode Functionality Test F ............................................................................ 43
Verify Handoff Available Sequence
Active Mode Functionality Test G ............................................................................ 44
Verify TP1 Timeout Error
Active Mode Functionality Test H ............................................................................ 45
Verify TP2 Timeout Error
Active Mode Functionality Test I .............................................................................. 46
Verify TP3 Timeout Error
Active Mode Functionality Test J ............................................................................. 47
Verify TP4 Timeout Error
Active Mode Functionality Test K ............................................................................ 48
Verify TP5 Timeout Error
Active Mode Functionality Test L ............................................................................ 49
Verify Access Mode Selection
Active Mode Functionality Test M ........................................................................... 50
Verify Port Sensors - Part 1
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Active Mode Functionality Test N ............................................................................ 51
Verify Port Sensors - Part 2
Active Mode Functionality Test O ............................................................................ 52
Verify Port Sensors - Part 3
Active Mode Functionality Test P ............................................................................ 54
Verify Port Sensors - Part 4
Active Mode Functionality Test Q ............................................................................ 56
Verify Emergency Stop
Passive Mode Test Plan ..................................................................................................................... 57
Passive Mode Static Tests .................................................................................................... 58
Passive Mode Static Test A ..................................................................................... 58
Verify labeled DB-25 male E84 plug exists
Passive Mode Static Test B ..................................................................................... 59
Verify proper plug location
Passive Mode Static Test C .................................................................................... 59
Verify Documented Recovery Procedures Exist
Passive Mode Functionality Tests ........................................................................................ 60
Passive Mode Functionality Test A ......................................................................... 60
Verify Configurable Active Equipment Timers
Passive Mode Functionality Test B ......................................................................... 61
Verify Full Load / No Load Voltage
Passive Mode Functionality Test C ......................................................................... 62
Verify Single Handoff Load Sequence
Passive Mode Functionality Test D ......................................................................... 63
Verify Single Handoff Unload Sequence
Passive Mode Functionality Test E ......................................................................... 64
Verify Handoff Available Sequence 1
Passive Mode Functionality Test F ......................................................................... 65
Verify Handoff Available Sequence 2
Passive Mode Functionality Test G ......................................................................... 66
Verify Handoff Available Sequence 3
Passive Mode Functionality Test H ......................................................................... 67
Verify TA1 Timeout Error
Passive Mode Functionality Test I ........................................................................... 68
Verify TA2 Timeout Error
Passive Mode Functionality Test J .......................................................................... 69
Verify TA3 Timeout Error
Passive Mode Functionality Test K ......................................................................... 71
WIPS Jeopardy Test 1 (L_REQ stays ON)
Passive Mode Functionality Test L .......................................................................... 72
WIPS Jeopardy Test 2 (L_REQ turns OFF early)
Passive Mode Functionality Test M ......................................................................... 73
WIPS Jeopardy Test 3 (U_REQ stays ON)
Passive Mode Functionality Test N ......................................................................... 74
Verify Emergency Stop 1 (Load Sequence)
Passive Mode Functionality Test O ......................................................................... 75
Verify Emergency Stop 2 (Unload Sequence)
Continuous Mode Test Plan ............................................................................................................... 76
Continuous Mode Tests ........................................................................................................ 76
Continuous Mode Test A ......................................................................................... 76
Test Continuous Handoff Sequence (Active Mode)
Continuous Mode Test B ......................................................................................... 76
Test TP6 Timeout Error (Active Mode)
Continuous Mode Test C ......................................................................................... 77
Test Continuous Handoff Sequence (Passive Mode)
Appendix ........................................................................................................................................................... 78
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E84 Interface Controller Connector Pinout ....................................................................................... 79
Version History .................................................................................................................................... 80
Version 2.3 ............................................................................................................................. 80
Version 2.2a .......................................................................................................................... 80
Version 2.2 ............................................................................................................................. 80
Version 2.1.1 ......................................................................................................................... 80
Version 2.1b .......................................................................................................................... 80
Version 2.1 ............................................................................................................................. 80
Version 2.0 ............................................................................................................................. 81
Technical Support ............................................................................................................................... 81
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List of Figures
Emulator Online Help System ............................................................................................................................ 1
Driver Error Message ......................................................................................................................................... 3
Parallel Port Connection .................................................................................................................................... 4
USB Cable Connection ...................................................................................................................................... 4
Found New Hardware Message ........................................................................................................................ 4
E84 Emulator Main Menu ................................................................................................................................... 5
Optical Transceiver connects to the Emulator as Passive Equipment female DB-25 connector ............... 5
Example Single Handoff Mode Transfer ........................................................................................................... 6
Example Simultaneous Handoff Mode Transfer ............................................................................................... 6
Example Continuous Handoff Mode Transfer ................................................................................................... 7
Main Menu .......................................................................................................................................................... 8
Automated Active Mode Test Setup Screen ..................................................................................................... 9
Automated Passive Mode Test Setup Screen .................................................................................................. 9
Save Test Setup Screen .................................................................................................................................. 11
Recall Test Setup Screen ................................................................................................................................ 11
Continuous Mode Test Setup Screen ............................................................................................................. 12
Automated Active Mode Test Screen .............................................................................................................. 14
Figure 1 - E84 Plug Locations ......................................................................................................................... 14
Continuous Mode Test Step Details ................................................................................................................ 14
Operator Action Required Screen ................................................................................................................... 15
Default Timer Settings Screen ......................................................................................................................... 15
Timer Test Pass/Fail Screen ............................................................................................................................ 16
Abort Current Test Verification ........................................................................................................................ 17
Abort Active (Passive) Mode Testing Verification ........................................................................................... 17
Active Testing Completed Screen ................................................................................................................... 17
Active Mode Manual Control Screen ............................................................................................................... 18
Passive Mode Manual Control Screen ............................................................................................................ 18
Run Load Cycle Test Warning ........................................................................................................................ 32
Run Unload Cycle Test Warning ..................................................................................................................... 32
Figure 1 - E84 Plug Locations ......................................................................................................................... 34
E84 Recovery Procedures Description ........................................................................................................... 35
Default TP Timer Entry Screen ........................................................................................................................ 36
Figure 2 - Single Handoff (Load) Signal Timing Diagram ............................................................................... 38
Figure 2 - Single Handoff (Load) Signal Timing Diagram ............................................................................... 39
Figure 3 - Single Handoff (Unload) Signal Timing Diagram ........................................................................... 40
Figure 3 - Single Handoff (Unload) Signal Timing Diagram ........................................................................... 41
Figure 4 - Handoff Available Signal Timing Diagram ...................................................................................... 43
Figure 1 - E84 Plug Locations ......................................................................................................................... 59
Default TA Timer Entry Screen ........................................................................................................................ 60
Figure 2 - Single Handoff (Load) Signal Timing Diagram ............................................................................... 62
Figure 3 - Single Handoff (Unload) Signal Timing Diagram ........................................................................... 63
Figure 4 - Handoff Available Signal Timing Diagram ...................................................................................... 64
Figure 5 - Handoff Available Signal Timing Diagram ...................................................................................... 66
List of Tables
Table 1 - E84 Interface Controller Pin Out
............................................................................................................................................................. 79
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Overview
Due to the migration to large wafer sizes, semiconductor factories are moving toward highly automated
material handling systems (AMHS) to transfer wafer carriers of increasing weight. The parallel input /
output (PI/O) control signals between the production equipment and the AMHS must be better defined for
more reliable and efficient carrier hand-offs (load/unload) at production equipment Load Ports.
To accomplish this, a new communications specification was created (SEMI® E84) to enhance the
capabilities of the parallel I/O interface defined in SEMI® E84. SEMI® E84 supports the improvements in
reliability and efficiency of carrier transfer required. The enhanced capabilities include continuous handoff,
simultaneous handoff, and the capabilities of error detection on the interface.
The E84 Emulator provides an automated method to test the active and passive E84 interfaces on
semiconductor processing equipment. The emulator utilizes a software based platform that runs on a
laptop PC using the Windows 95/98, NT, 2000 or XP operating system. This software provides the
graphical user interface (GUI) and the control algorithms. The E84 Interface Controller provides the
hardware required to interface with the active or passive process equipment. The E84 Interface
Controller interfaces with the laptop computers parallel printer port, or optionally it’s USB port.
The E84 Emulator performs automated E84 interface testing following pre-defined industry standard test
plans. These test plans provide a means of verifying the E84 compliance of both active and passive
process equipment. All defined handoff sequences are supported, including Single, Simultaneous and
Continuous modes (GUI Revision 2.1 and higher).
The E84 Emulator GUI was developed in Corel ® Paradox, an object-oriented database package. The
GUI utilizes the laptop’s display, keyboard, and mouse to provide the physical operator interface. The GUI
provides a menu driven system consisting of configuration and test screens. The database capabilities of
Paradox provide for the storage and retrieval of test configuration and results by the operator.
The pre-defined test plans are implemented both in Paradox database tables and as a Windows dynamic
link library (DLL) that was developed in C++. The DLL interfaces with the GUI using DLL function calls
from the Paradox application. The DLL interfaces with the E84 Interface Controller through the parallel
printer port (LPT1). The DLL provides the algorithms that perform the signal handshaking of active (or
passive) signals to match the E84 interface specification. The E84 Interface Controller also provides
algorithms and hardware required to perform the +24V tests defined by the E84 interface specification. It
includes additional hardware to implement an accurate hardware timer circuit for timing the E84
handshaking signals.
Starting with version 2.2, a new online help system is
available through a Help option on the menu toolbar.
This option is available through all screen of the GUI.
Selecting it will open a standard Windows Help system
containing an indexed copy of this Users Manual.
Navigate the help system using the index displayed on
the left side of the window. Subjects are arranged to
match section headings in this Users Manual.
Emulator Online Help System
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Getting Started
Minimum System Requirements
The E84 Emulator Application requires the following minimum system configuration:
•
•
•
•
•
•
•
486, or Pentium processor-based personal computer, laptop or desktop.
Windows 95/98, NT 4.0 (SP5) or Windows 2000 operating system.
One parallel printer port (ECP support required) for Parallel Interface version
Note: The parallel printer port must be assigned to one of the standard memory addresses (378,
278, 3BC).
One USB port for USB Interface version.
16 MB RAM
40 MB of available hard disk space.
CD-ROM drive (1.44 MB floppy disks available on request).
E84 Emulator Package Contents
The E84 Emulator package includes the following:
•
The E84 Emulator Application installation CD-ROM, with separate setup programs for Win 95/98
and Win NT/2000.
•
The E84 Interface Controller.
•
1 - 15', male-to-female, 25-pin, straight-through interface cable (connects the E84 Interface
Controller to the process equipment under test).
•
1 - 6' power cable.
•
Printed Getting Started manual.
•
1 - 6', male-to-male, 25-pin, straight-through connecting cable (for Parallel Interface version)
Or
•
1 - USB cable (for USB Interface version)
E84 Interface Controller Power Requirements
•
110 to 220 VAC 50 - 60 Hz (see rear panel).
Typographical Conventions
Throughout this manual, various type is used in describing the E84 Emulator’s GUI. The styles defined
here are used for:
Italics Underlined SMALL CAPS -
Used for screen names.
Used for option button names.
Used for data entry fields.
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Installation
To install the E84 Emulator Application, run the GCI_E84EmulatorSetup.exe program from the
E84 Emulator Installation CD.
1
2
4
6
7
Insert the E84 Emulator Installation CD-ROM.
Double-click the file D:\GCI_E84EmulatorSetup.exe (where D: is the CD-ROM drive indicator)
using Windows Explorer.
The E84 Emulator installation dialog box appears. Follow the on-screen instructions, selecting
the destination directory (either accept the default, or enter a new destination).
Click Install to begin the installation.
When installation is complete, a dialog box is displayed indicating the completion of the
installation. You must re-boot your system before using the E84 Emulator Application.
message appears indicating that the installation was successful.
The setup program will add a shortcut to the E84 Emulator Application to your Start Menu
(Programs\GCI E84 Emulator\GCI E84 Emulator) . Use this shortcut to start the E84 Emulator
Application.
Troubleshooting WinNT / Win2000 / WinXP Installation
If, when starting the E84 Emulator GUI, you receive an error message of the form:
Driver Error Message
the E84 NT Driver was not properly loaded or started. Verify that the correct System Registry entries were
made during installation using regedt32.exe. Four keys need to be entered as follows:
[HKEY_LOCAL_MACHINE\SYSTEM\CurrentControlSet\services\HDLCDRVR]
“ErrorControl” = dword: 00000001
“Start” = dword: 00000002
“Type” = dword: 00000001
“ImagePath” = string:”\??\c:\Program Files\Get Control, Inc\E84 Emulator\hdlcdrvr.sys”
Note: The ImagePath string must contain the path used during installation. The path listed in the example
is the default installation directory.
Uninstalling the E84 Emulator Application
The E84 Emulator Installation program adds a shortcut to an uninstall program that will completely
remove the E84 Emulator Application from your system. If it becomes necessary to remove the
Application, simply click on the Uninstall shortcut and follow the on-screen instructions.
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PC to E84 Emulator Connection
Connecting to Parallel Port Version
Connect the provided male-to-male, 25-pin connection
cable between the laptop’s parallel printer port, and the
female DB-25 connector on the back end of the E84
Emulator. The connector is labeled PC INTERFACE,
and is located next to the AC power input module.
Note: the parallel port cable should be connected
between the Emulator and the PC with the Emulator
Controller’s power turned off.
Connecting to USB Version
Parallel Port Connection
Connect the E84 Emulator to a Host PC USB Port and
turn Controller’s power on before running the E84
Emulator Application.
Connect the provided USB cable into a USB Port on the
Host Computer and to the USB Port on the E84
Emulator as shown. The USB Port is located on the
back panel next to the AC power input module. It is
labeled PC INTERFACE.
Powering Up the E84 Emulator
USB Cable Connection
Plug the provided standard power cord into the E84
Emulator and into a 100V - 240V AC wall outlet. Turn the power switch on. The power switch is located
on the power input module.
The top of the E84 Emulator has cut-outs showing a series of status LEDs. Make sure the two green
power LEDs are both illuminated (+24V and +5V). If either of these LEDs are not illuminated when the
E84 Emulator is connected to a known good AC power source (and the power switch is in the ON
position), there may be a problem with the power supply in the unit.
When the E84 Emulator USB Interface is turned on,
Windows will display a brief message indicating that it
has found new hardware (as shown at right - Windows
2000). The E84 Emulator USB interface utilizes the
Human Interface Device (HID) Class of USB drivers.
Found New Hardware Message
Windows XP and 2000 provide HID Class Drivers. It is
not necessary to install any additional drivers. Note, this
message only appears the first time you start up the E84 Emulator USB Interface, and does not apply to
the Parallel Interface version.
Connection Status Indicator
Launch the E84 Emulator Application from the Windows desktop. The Communications status is
displayed in the lower left of the Main Menu. It will display Communications Mode - USB (for USB
connection) when the E84 Emulator Application is properly communicating with the E84 Emulator USB
Interface. When the user attempts to use any of the four test buttons, the E84 Emulator Application
attempts to communicate with the E84 Emulator. With communication established, testing continues
normally. If the E84 Emulator Application cannot communicate with the E84 Emulator, a
Communication Error Message will be displayed, and testing will be disabled.
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E84 Emulator Main Menu
Using Optical Transceivers
The Get Control E84 Emulator is shipped with a 15' connecting cable used for hardwired E84 emulation.
The E84 Emulator is compatible with all E84 compatible Optical Transceivers. GCI produces several
optical transceivers that can be used with the E84 Emulator.
P/N GCI04002 - GCI E84 Optical Transceiver (available in 2 and 5 meter cable lengths)
P/N GCI04100 - GCI RJ-11 E84 Optical Transceiver (with data logging)
P/N GCI04100ND - GCI RJ-11 E84 Optical Transceiver (without data logging)
Optical transceivers from GCI are compatible as shipped. Other optical transceivers must first be properly
terminated with a male DB-25 connector, according to the E84 specification.
Plug an E84 compatible optical transceiver
into the female DB-25 port on the E84
Emulator labeled Emulator as Passive
Equipment as shown. With an optical
transceiver connected in this way, the E84
Emulator Application can run both Active and
Passive mode tests.
Do not attempt to install a gender changer
between the optical transceiver and the E84
Emulator. Connecting the optical
transceiver to the male DB-25 port labeled
Emulator as Active Equipment using a
gender changer will not work.
Optical Transceiver connects to the Emulator as
Passive Equipment female DB-25 connector
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E84 Handoff Modes
The SEMI® E84 Specification defines three types of handoff modes, Single, Simultaneous, and
Continuous. The E84 Emulator supports all three handoff modes. This section briefly describes each
mode, and explains the associated testing capabilities of the E84 Emulator.
Single Handoff Mode
Single Handoff Mode is used to transfer a single carrier to or from a Load Port. The AMHS equipment
defines the target Load Port at the beginning of the handoff sequence, using one of the Load Port select
signals (CS_0, CS_1). Only one of the two signals is activated during the handoff sequence.
The figure at right shows E84 interface signals recorded
(using the Get Control E84 Data Recorder RE84CORDER) during a typical Single Handoff Mode
transfer. The timing diagram shows the CS_0 signal
turning ON to indicate a Single Handoff Mode transfer.
10:30:54 - 09/25/2000
Single Handoff Example
Recorded E84 Signals
Test Area :Get Control, Inc.
Tested By :AJG
Active Eq. Mfg Get
:
Control, Inc.
Active Eq. Model E84
:
Emulator 1
TA1 - TA3 :2, 2, 2
Ref Voltage :1.8 Volts
Load Port # :
Passive Eq. Mfg :Get Control, Inc.
Passive Eq. Model E84
:
Emulator 2
TP1 - TP5 :2, 2, 60, 60, 2
To Zoom In: Right-Click and drag to select Zoom Window
Time
-----------03.853
03.991
05.788
05.990
06.653
06.897
35.881
36.086
36.152
36.287
36.829
37.054
37.154
37.254
L_REQ
U_REQ
READY
CS_0
CS_1
The E84 Emulator Application provides 17 active
mode tests (Emulator acts as the active equipment) that
can be run using Single Handoff Mode. These tests are
selectable from the Active Mode Test Setup Screen,
which can be reached from the Main Menu using the
Automatic Active Mode Testing button. To configure a
Single Handoff Mode test, simply select either the CS_0
or CS_1 button from the LOAD PORT NUMBER field on the Example Single Handoff Mode Transfer
Active Mode Test Setup Screen.
VALID
Signal
-----CS_0
VALID
L_REQ
TR_REQ
READY
BUSY
L_REQ
BUSY
TR_REQ
COMPT
READY
COMPT
VALID
CS_0
St
-1
1
1
1
1
1
0
0
0
1
0
0
0
0
TR_REQ
BUSY
COMPT
CONT
HO_AVBL
ES
0
10
20
30
40
50
The E84 Emulator Application provides 15 passive mode tests (Emulator acts as the passive equipment)
that can be run using Single Handoff Mode. These tests are selectable from the Passive Mode Test Setup
Screen, which can be reached from the Main Menu using the Automatic Passive Mode Testing button.
The active equipment sets the Load Port select signals. Therefor, in passive mode testing there are no
Load Port select options. The Emulator simply provides the proper transfer handshaking, while monitoring
and verifying the Load Port select signals detected at the beginning of the transfer.
Simultaneous Handoff Mode
Simultaneous Handoff Mode is used to transfer two
carriers concurrently to or from two separate Load Ports.
The AMHS equipment indicates a Simultaneous Handoff
by setting both Load Port select signals (CS_0 and
CS_1). Both signals remain activated during the handoff
sequence.
10:35:03 - 09/25/2000
Simultaneous Handoff Example
Recorded E84 Signals
Test Area :Get Control, Inc.
Tested By :AJG
Active Eq. Mfg Get
:
Control, Inc.
Active Eq. Model E84
:
Emulator 1
TA1 - TA3 :2, 2, 2
Ref Voltage :1.8 Volts
Load Port # :
Passive Eq. Mfg :Get Control, Inc.
Passive Eq. Model E84
:
Emulator 2
TP1 - TP5 :2, 2, 60, 60, 2
To Zoom In: Right-Click and drag to select Zoom Window
Time
-----------03.273
03.273
03.411
04.865
05.115
05.756
06.021
40.282
40.508
40.550
40.692
41.067
41.251
41.352
41.452
41.452
L_REQ
U_REQ
READY
CS_0
CS_1
VALID
The figure at right shows E84 interface signals recorded
(using the Get Control E84 Data Recorder RE84CORDER) during a typical Simultaneous Handoff
Mode transfer. The timing diagram shows the CS_0 and
CS_1 signals turning ON, indicating a Simultaneous
Handoff Mode transfer.
TR_REQ
Signal
-----CS_0
CS_1
VALID
L_REQ
TR_REQ
READY
BUSY
L_REQ
BUSY
TR_REQ
COMPT
READY
COMPT
VALID
CS_0
CS_1
St
-1
1
1
1
1
1
1
0
0
0
1
0
0
0
0
0
BUSY
COMPT
CONT
HO_AVBL
ES
0
10
20
30
40
50
Example Simultaneous Handoff Mode Transfer
The 17 active mode tests provided by the E84 Emulator
Application can be run in Simultaneous Handoff Mode as well as Single Handoff Mode. The only
difference between Single and Simultaneous Handoff Modes is the use of the two Load Port select
signals. This allows the E84 Emulator Application to use the same pre-defined tests to verify both
Single and Simultaneous Handoff sequences. To configure a Simultaneous Handoff Mode test, simply
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select the Simultaneous button from the LOAD PORT NUMBER field on the Active Mode Test Setup Screen.
The 15 passive mode tests provided by the E84 Emulator Application can be also run in Simultaneous
Handoff Mode as well as Single Handoff Mode.
Continuous Handoff Mode
Continuous Handoff Mode is used to transfer multiple carriers sequentially to or from a specific Load Port.
The AMHS equipment indicates a Continuous Handoff by setting the CONT signal during the first carrier
handoff, at the time the BUSY signal is turned ON. The AMHS keeps the CONT signal ON through
subsequent carrier handoff’s, turning it OFF during the last carrier handoff.
The figure at right shows E84 interface signals recorded
(using the Get Control E84 Data Recorder RE84CORDER) during a typical Continuous Handoff
Mode transfer. The timing diagram shows a four carrier,
Continuous Handoff sequence: Unload CS_0, Load
CS_0, Unload CS_1, Load CS_1. Note how the CONT
signal turns ON during the first carrier handoff, and
remains ON until the last carrier handoff.
10:26:08 - 09/25/2000
Continuous Handoff Example
Recorded E84 Signals
Test Area :Get Control, Inc.
Tested By :AJG
Active Eq. Mfg Get
:
Control, Inc.
Active Eq. Model E84
:
Emulator 1
TA1 - TA3 :2, 2, 2
Ref Voltage :1.8 Volts
Load Port # :
Passive Eq. Mfg :Get Control, Inc.
Passive Eq. Model E84
:
Emulator 2
TP1 - TP5 :2, 2, 60, 60, 2
To Zoom In: Right-Click and drag to select Zoom Window
Time
-----------04.904
05.039
06.814
07.039
08.324
08.554
08.554
30.699
30.929
30.978
31.117
31.606
31.780
31.880
31.980
34.823
34.960
35.868
36.069
36.778
36.960
01:00.505
01:00.740
01:00.783
01:00.928
01:01.386
01:01.584
01:01.684
01:01.785
L_REQ
U_REQ
READY
CS_0
CS_1
VALID
TR_REQ
BUSY
The E84 Emulator Application provides three
Continuous Handoff Mode tests; two active mode, and
one passive mode. These tests are selectable from the
Continuous Mode Test Setup Screen, which can be
reached from the Main Menu using the Continuous
Mode Testing button.
GCI E84 Emulator Application Users Manual
COMPT
CONT
HO_AVBL
ES
0:00:00.0000
0:00:28.0000
0:00:56.0000
0:01:24.0000
0:01:52.0000
Signal
-----CS_0
VALID
U_REQ
TR_REQ
READY
BUSY
CONT
U_REQ
BUSY
TR_REQ
COMPT
READY
COMPT
VALID
CS_0
CS_0
VALID
L_REQ
TR_REQ
READY
BUSY
L_REQ
BUSY
TR_REQ
COMPT
READY
COMPT
VALID
CS_0
St
-1
1
1
1
1
1
1
0
0
0
1
0
0
0
0
1
1
1
1
1
1
0
0
0
1
0
0
0
0
0:02:20.0000
Example Continuous Handoff Mode Transfer
7
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Using the E84 Emulator GUI
The user interface is broken down into a series of menu, configuration, and test screens. The user
navigates through these screens by selecting option buttons (with mouse clicks, or keystrokes) provided
on each screen.
Main Menu
At startup, the E84 Emulator Main Menu is displayed.
The Main Menu provides the user with options for
Automatic and Manual testing for both Active and
Passive equipment.
At the lower left corner of the Main Menu, version
number information is displayed for both the GUI and
the E84 Interface Controller firmware. The
communications mode in use between the GUI and the
E84 Interface Controller is also shown.
Each menu option is associated with a button on the
Main Menu. The desired menu option is selected by
clicking the button with the mouse, or using the
Main Menu
keyboard to activate the associated hot key. An
underlined character in the text of the button designates
the buttons hot key. Generally, the first unique character in the buttons text is used for the hot key.
Six option buttons are available on the Main Menu.
Automated Active Mode Testing
Provides automated testing of passive equipment using predefined test plans. In this mode, the E84 Emulator acts as the
active equipment. This option allows the user to run test plans in
either Single or Simultaneous Handoff Modes.
Manual Active Mode Testing
Allows the user to manipulate each of the 7 Active mode signals,
while monitoring the 5 Passive mode signals.
Automated Passive Mode Testing
Provides automated testing of active equipment using predefined test plans. In this mode, the E84 Emulator acts as the
passive equipment. This option allows the user to run test plans
in either Single or Simultaneous Handoff Modes.
Manual Passive Mode Testing
Allows the user to manipulate each of the 5 Passive mode
signals, while monitoring the 7 Active mode signals.
Continuous Mode Testing
This option provides automated testing of either active or passive
equipment using the Continuous Handoff Mode. Options on the
Continuous Mode Test Setup Screen configure the E84
Emulator to act as either the active or passive equipment.
Exit
Closes the E84 Emulator Application.
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Automated Active Test Setup Screen
Automated Passive Test Setup Screen
The Automated Active Mode and Automated Passive
Mode Test Setup screens are very similar. They are
both described here with their differences noted where
applicable. The Automated Test Setup Screens are
displayed when the user selects the Automated Active
Mode Testing or Automated Passive Mode Testing
buttons from the Main Menu.
The Automated Test Setup Screen is used to configure
an Automated Test. When running Active Mode tests,
the E84 Interface Controller is testing as the Active
entity. Attach the female end of a straight through, 25pin, male-to-female cable (provided) to the DB-25
connector labeled EMULATOR IS ACTIVE
Automated Active Mode Test Setup Screen
EQUIPMENT on the E84 Interface Controller. Attach
the male end of the cable to the DB-25 E84 plug on the passive equipment being tested.
When running Passive Mode tests, the E84 Interface
Controller is testing as the Passive entity. Attach the
male end of a straight through, 25-pin, male-to-female
cable (provided) to the DB-25 connector labeled
EMULATOR IS PASSIVE EQUIPMENT on the E84
Interface Controller. Attach the female end of the
cable to the DB-25 E84 plug on the active equipment
being tested.
The Automated Test Setup Screen is divided into two
main sections. The left side of the screen provides data
fields for entering details about the equipment being
tested. Data fields provided include the TESTER’S NAME,
the TEST DATE (defaulted to today’s date), the equipment Automated Passive Mode Test Setup Screen
SUPPLIER NAME and EQUIPMENT MODEL.
For Active Mode Tests, the desired Active Mode timeouts can be entered in the three ACTIVE EQUIPMENT
TIMER SETTINGS box fields (TA1, TA2, TA3). The Load Port being tested is defined using the LOAD PORT
NUMBER buttons and field. For Simultaneous Handoff Mode testing, select the Simultaneous button. For
Single Handoff Mode testing, select either the CS_0 or CS_1 button.
For Passive Mode Tests, the desired Passive Mode timeouts can be entered in the five PASSIVE
EQUIPMENT TIMER SETTINGS box fields (TP1, TP2, TP3, TP4, TP5). The Load Port being tested is defined
using the LOAD PORT NUMBER field. Passive Mode testing does not require the definition of a specific Load
Port select signal (CS_0, CS_1). The E84 Emulator notes which signal is activated at the beginning of
the handoff sequence. This allows for passive mode testing of both Single and Simultaneous Handoff
Modes.
A COMMENTS field is also provided to allow the user to enter test specific comments. All fields (with the
exception of the COMMENTS field) must be entered before automated testing can begin.
The right side of the screen lists check-off boxes to select pre-defined Automated Tests provided by the
E84 Emulator. The user simply checks off the desired tests. Next to each test definition on the right side
of the screen is a field that shows the current test results for each test. Initially, the fields are empty since
no tests have been run. Once each test is executed, the individual test results (Pass, Fail, Untested) are
displayed in these fields. For details on the available active and passive mode tests, see the Test Plans
section towards the end of this manual.
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Select Default Tests Button
The Select Default Tests button selects default load cycle testing, and marks all tests to run. This
provides a quick method of selecting all tests. For Passive Mode testing, this is the only function of the
Select Default Tests button. For Active Mode testing, this button has one additional function.
The E84 Emulator can test certain Active Mode tests using either the Load or Unload Cycle sequences.
The default testing method uses the Load Cycle. This button sets the E84 Emulator to use the Load
Cycle tests.
Select Unload Port Tests Button
The Select Unload Port Tests button selects only those tests that can be tested using the Unload Cycle
sequence. The tests included during Unload Port Testing are the five TP Timer tests, a handoff available
test, Access Mode Selection, two Port Sensor tests, and the Emergency Stop test.
When the Select Unload Port Tests button is selected, a note is added to the text report.
Note that the test steps described in the Active Mode Test Plan section change to match the Unload
Cycle when testing with the Select Unload Port Tests button selected.
De-Select All Tests Button
The De-Select All Tests button un-checks all tests, allowing the user to quickly remove all tests from the
test plan. This is useful when the user wishes to run only one or two tests. Instead of having to un-click
each unwanted test individually, the user can un-click all tests, then add only those tests desired.
Test Setup Option Buttons
A series of option buttons are provided at the lower left of the screen. These buttons allow the user to:
Run Selected Tests -
Initiates the selected Automated Tests.
New Test -
Clears all test information fields and selects all tests.
Save Test -
Saves current test setup details and test results to disk.
Recall Test -
Recalls previously saved test setup details and results from disk.
Return to Main Menu -
Closes the Automated Test Setup Screen and returns the user to the
Main Menu.
Run Selected Tests Button
Selecting the Run Selected Tests button displays the Automated Test Screen, and starts the first selected
test. The Automated Test Screen displays detailed information about the current Automated Test being
executed. The same Automated Test Screen is used for both Active and Passive mode testing. Test titles
and details are used to define the type of tests being run.
New Test Button
Selecting the New Test button clears all test information fields, clears all individual test comments, and
selects all tests. If the current test setup has not been saved yet, the system will prompt the user for
verification.
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Save Test Button
Selecting the Save Test button allows the user to save the
current test setup and test results from completed tests to a file
on the hard disk. The user is prompted for a file name through a
standard Windows Save As dialog box. The user can enter a
new file name, or select an existing one to overwrite. If an
existing file is selected, the user will be warned before
overwriting the file. The Save Test option saves the test
information, setup and results in three separate files. The
default location for saving Active Mode test files is a subdirectory named “Active Test Files” under the destination
directory chosen during installation. The default location for
Save Test Setup Screen
saving Passive Mode test files is a sub-directory named
“Passive Test Files” under the destination directory chosen during installation.
The main file saved is an ASCII text file formatted for printing. This text file contains all of the equipment
information entered by the user, along with information about each Automated Test provided by the E84
Emulator. Test details include test title, results, and any comments entered by the user during testing.
Two additional database formatted files are saved to allow the E84 Application to easily recall saved test
details. These two files are associated with the main ASCII text file, and are only accessed when the user
chooses to recall the saved test. The user should take care in not deleting any of the three files. If any of
the three files are removed from the system, the E84 Application cannot recall the test.
Recall Test Button
Selecting the Recall Test button allows the user to restore test
details that were previously saved to the hard disk. The user is
prompted for a file name through a standard Windows Select
File dialog box. When the user selects a previously saved test
file, the E84 Application loads the test information and setup
details from the two database formatted files associated with the
recalled text file.
After reading the test details, all test screens are updated with
the recalled information. The test results of any completed tests
are displayed in the results fields next to the test definitions, and Recall Test Setup Screen
all Failed or Untested tests are selected.
Return to Main Menu Button
Pressing this button will close the Automated Test Setup Screen and return the user to the Main Menu. If
the current test setup has not been saved, the user is first prompted to save the test.
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Continuous Handoff Test Setup Screen
The Continuous Mode Test Setup screen is displayed
when the user selects the Continuous Mode Testing
button from the Main Menu.
The Continuous Mode Test Setup Screen is used to
configure Continuous Handoff Mode tests. The
Continuous Mode Test Setup Screen is divided into
several sections.
Data entry fields allow the user to enter details about the
equipment being tested. Data fields provided include
the TESTER’S NAME, the TEST DATE (defaulted to today’s
date), the equipment SUPPLIER NAME and EQUIPMENT
MODEL.
Continuous Mode Test Setup Screen
Active Mode timeouts can be entered in the three ACTIVE EQUIPMENT TIMER SETTINGS box fields (TA1, TA2,
TA3). Passive Mode timeouts can be entered in the six PASSIVE EQUIPMENT TIMER SETTINGS box fields (TP1,
TP2, TP3, TP4, TP5, TP6). Delay timer settings can be entered in the C ONTINUOUS MODE DELAY TIMER box
field (TD1).
A COMMENTS field is also provided to allow the user to enter test specific comments.
All fields (with the exception of the COMMENTS field) must be entered before automated testing can begin.
The bottom right side of the screen lists check-off boxes to select pre-defined Continuous Mode Tests
provided by the E84 Emulator. The user simply checks off the desired tests. Next to each test definition
on the right side of the screen is a field that shows the current test results for each test. Initially, the fields
are empty since no tests have been run. Once each test is executed, the individual test results (Pass,
Fail, Untested) are displayed in these fields. For details on the available Continuous Mode tests, see the
Test Plans section towards the end of this manual.
Defining the Continuous Mode Test Sequence List
A DEFINE CONTINUOUS MODE TEST SEQUENCE box allows the user to define the specific order of handoff’s
to run during Continuous Handoff Mode testing. This box contains an AVAILABLE CYCLES list, a set of
DEFAULT CYCLE buttons, the current set of selected handoff’s (SELECTED CYCLES list), a Clear List button,
an Add Cycle button, a Remove Cycle button, and two sorting buttons (Move Up, Move Down) displayed
as arrows.
SELECTED CYCLES List
This field shows the list of currently selected handoff’s. When running test A (active mode), this list
defines the sequence of handoff’s requested by the E84 Emulator acting as the active equipment. When
running test C (passive mode), this list defines the sequence of handoff’s the E84 Emulator expects to
see when acting as the passive equipment. When running test B (TP6 Timeout Error), the first handoff in
the list is requested by the E84 Emulator, after which the TP6 timeout error is verified.
At least one handoff must be placed in this list before testing can begin.
AVAILABLE CYCLES List
There are four available handoff’s: Load CS_0, Unload CS_0, Load CS_1, Unload CS_1. Double-clicking
one of these cycles will add that cycle to the SELECTED CYCLES list.
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Add / Remove Buttons
The Add and Remove buttons are located between the AVAILABLE CYCLES list and the SELECTED CYCLES
list, and take the shape of right and left arrows respectively. To Add a cycle, single click the desired cycle
in the AVAILABLE CYCLES list (the selected cycle will be highlighted in blue) and click the Add (right arrow)
button. The selected cycle will be added to the SELECTED CYCLES list.
To remove a cycle, single click the desired cycle in the SELECTED CYCLES list, and click the Remove (left
arrow) button. The selected cycle will be removed from the SELECTED CYCLES list.
Clear List Button
This button clears the SELECTED CYCLES list.
Cycle Sorting Buttons
Two cycle sorting buttons positioned to the right of the SELECTED CYCLES list. The top button (displayed as
an upward pointing arrow) moves the selected cycle up one step in the SELECTED CYCLES list. The bottom
button (displayed as a downward pointing arrow) moves the selected cycle down one step in the
SELECTED CYCLES list.
Default Cycles Buttons
A set of Default Cycle buttons are provided that allow the user to quickly define one of four standard
Continuous Handoff sequences. These standard sequences include:
•
•
•
•
Unload CS_0 - Load CS_0
Unload CS_1 - Load CS_1
Load CS_0 - Load CS_1
Load CS_1 - Load CS_0
Test Setup Option Buttons
A series of option buttons are provided at the lower left of the screen. These buttons are identical to those
found on the Automated Active Mode and Automated Passive Mode Test Setup screens, and allow the
user to:
Run Selected Tests -
Initiates the selected Automated Tests.
New Test -
Clears all test information fields.
Save Test -
Saves current test setup details and test results to disk.
Recall Test -
Recalls previously saved test setup details and results from disk.
Return to Main Menu -
Closes the Continuous Test Setup Screen and returns the user to the
Main Menu.
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Automated Test Screens
An Automated Test Screen is used to display test status
information during automated testing. The Automated
Test Screen is displayed when the user selects the Run
Selected Tests button from any of the three Test Setup
Screens.
Details for the current test are displayed, including the
test title, any test specific information, the test status
(Passed, Failed, Untested), along with a user comment
field and a series of option buttons.
The E84 Test Plan for Single and Simultaneous Handoff
mode testing includes two types of Automated Tests,
Static and Functionality. Static mode tests require the
Automated Active Mode Test Screen
user to mark the test results manually. Typical Static
tests include verification of proper E84 plug location. The user can mark the test results by clicking with
the mouse, or using the hot-key combination from the keyboard. Hot keys for the three available test
results are: Alt-P (Pass), Alt-F (Fail), Alt-U (Untested).
For static tests, the test title will instruct the user to mark the test
results. If additional test instructions are required, a large
window will be displayed in the center of the screen, containing
detailed information for the user to complete the static test.
Additional information is available for some Single and
Simultaneous Handoff mode tests in the form of graphic
representations of E84 Specification details (for example, proper
plug locations, and various timing diagrams). When an
additional figure is available for the current test, an option button
Figure 1 - E84 Plug Locations
(labeled Figure: #) is displayed at the right side of the screen,
just below the test title. Information in the test title will indicate to
the user what details are available through this option button. This option button is enable throughout the
current test, and can be selected at any time.
The second type of Automated Tests defined by the E84
Test Plan is Functionality tests. These tests are
automated by the E84 Emulator, and include several
individual steps to complete. During Functionality
testing, a flashing “Please Wait - Testing” message is
displayed directly below the test title. As each step of
the current Functionality test is completed, a test step
message is displayed in the large, center window of the
Automated Test Screen. This window gives a detailed
history of the steps completed for the given test. If the
test fails, the test step that the failure occurred is
displayed in this window, along with a failure message.
Continuous Mode Test Step Details
Continuous Handoff Mode testing involves running
several separate handoff’s sequentially. An typical
Continuous Handoff Mode test might first Unload the carrier on Load Port CS_0, then load a new carrier to
the same Load Port. For Continuous Handoff Mode testing, the test step details for each individual
handoff is displayed during the handoff. At the end of each individual handoff, the message is displayed
indicating that the E84 Emulator is processing the TD1 delay timer. This timer (defined by the SEMI® E84
Specification as a delay time between the VALID signals of two successive handoff’s) is used to separate
two handoff’s.
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When the TD1 timer has expired, the center window on the Automated Test Screen is cleared, and the
test steps for the next handoff are displayed.
During Continuous Handoff Mode testing, a CURRENT CYCLE field is displayed above the test step detail
window, indicating the current handoff being tested.
Operator Action Required Screen
Most Functionality tests include at least one test step
that requires the user to perform some action. A typical
action would be loading a FOUP onto the Load Port
during a Load Cycle test. When one of these test steps
is processed, an Operator Action Required Screen is
displayed, detailing the specific action required by the
user.
Some of these required actions must be completed
within a certain time frame. Continuing the example
started above, during a Load cycle test, the E84
Emulator follows the proper handshaking with the
process equipment until the point where the process
equipment expects to see the FOUP loaded into its Load Operator Action Required Screen
Port. The process equipment places a timeout (TP3) on
seeing the FOUP loaded. If the FOUP is not positioned properly on the Load Port before the timeout
expires, the process equipment will report an error.
Default Timer Settings Screen
The E84 Emulator uses timer information entered by
the user during Active and Passive mode Functionality
Test A to inform the user of the time available to
complete the required action. If the user does not run
Functionality Test A, the E84 Emulator uses the default
timer values defined by the E84 specification. It is
therefor very important that the user select the
Functionality Test A during test setup.
For Continuous Handoff Mode testing, all timer values
are entered in the Test Setup Screen, therefor the
Default Timer Settings Screen is not seen while running
Continuous Handoff Mode tests.
Default Timer Settings Screen
When the Operator Action Required Screen is displayed, the value entered for the applicable timer setting
is displayed on the Operator Action Required Screen. The display will decrement that timer value each
second, showing the user the remaining time available to complete the required action.
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Operator Prompted Pass / Fail Screen
Some Functionality tests (specifically the Timer tests)
require the user to mark the final Pass/Fail status of the
test based on feedback (unavailable to the E84
Emulator) from the equipment being tested. For
example, when testing passive equipment timeout
settings, the E84 Emulator will force a timeout error by
not following the specified handshaking signals. The
passive equipment being tested is required to issue a
timeout alarm on its user interface. The details of this
timeout alarm are not reported through the handshaking
interface. The user is required to make the final
Pass/Fail determination. The user is prompted for the
Timer Test Pass/Fail Screen
Pass/Fail status of the test through a special Timer Test
Screen. This screen provides the user with details on how to determine the Pass/Fail status of the test,
along with two option buttons (Pass and Fail) to mark the actual test results.
Test NOTES Field
A NOTES entry field is provided for each Static and Functionality test. The notes field is a free format field
(maximum of 32,768 characters) where the user can make notes concerning the current test. These notes
are stored along with the rest of the test details when the user saves the test from the associated Test
Setup Screen.
Five option buttons are displayed at the bottom of the Automated Test Screen. These buttons allow the
user to:
Previous Test -
Moves back to the previous automated Test, and makes it the
current test.
Run Current Test -
Runs the current test.
Next Test -
Advances to the next selected automated test, and makes it the
current test.
Abort Current Test -
Aborts operation of the current automated test.
Abort Active Mode Testing -
Aborts all automated testing.
Previous Test Button
This option button moves back one test in the list of selected automated tests, and makes it the current
test. If the current test is the first selected automated test, this button has no affect. The new current test
is marked as “Untested”. The user can then start the test using the Run Current Test button.
This button is not enabled while the E84 Emulator is processing a test.
Run Current Test Button
This option button starts the current test. The current test can be re-run as often as desired. This is useful
for trouble-shooting tests that fail. The test results is reset to “Untested”, and the test is initiated.
This button is not enabled while the E84 Emulator is processing a test.
Next Test Button
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This option button moves forward one test in the list of selected automated tests, and makes it the current
test. If the current test is the last selected automated test, this button advances to the Testing Completed
Screen.
This button is not enabled while the E84 Emulator is processing a test.
Abort Current Test Button
This option button Aborts operation of the
current automated Test. It marks the test
results “Untested”. If an automated Test seems
to lock up for any reason, this option button
allows the operator to terminate it. All E84
output signals controlled by the E84 Emulator
are dropped, and the E84 Interface Controller
Abort Current Test Verification
is reset. The user is first prompted for
verification before the current test is aborted.
Abort Automated Testing Button
This option button aborts all automated testing.
The current, and all remaining test results are
marked as “Untested”.
If the current test has completed prior selecting
the Abort Automated Testing button, its test
results are not set to “Untested”.
Abort Active (Passive) Mode Testing Verification
All E84 output signals controlled by the E84 Emulator are dropped, and the E84 Interface Controller is
reset. The user is first prompted for verification before the current test is aborted.
Automated Testing Completed Screen
When all selected tests have completed (or when the
user has aborted the test sequence) the Automated
Tests Completed Screen is displayed. All automated
testing terminates with this screen to inform the user that
Automated Testing has ended.
This screen acts as a finishing point for Automated
Testing. One of two messages is displayed on the
screen, depending on whether the Automated Tests
were aborted or not. This example shows the aborted
message.
One option button is displayed that takes the user back
to the associated Test Setup Screen. The Test Setup
Screen will then display the current test results, along
Active Testing Completed Screen
with the New Test button. The Comments field is still
active for the current test. This allows the user to add any additional comments about the test results, or
action items for the equipment supplier.
It is important to remember that the test information and results are not automatically saved. The operator
must select the Save Test button to save the current test setup and results. If the user selects either the
New Test or Return to Main Menu buttons before saving the current test, the system warns the user that
the current test results will be lost without saving.
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Manual Control Screens
Active Mode Manual Control Screen
When the user selects the Manual Active Mode Testing,
the Active Mode Manual Control Screen is displayed.
This screen is used to manually toggle E84 output
signals that are under Active Mode control. Toggle
buttons are provided for each signal, allowing the user to
switch each signal’s state ON and OFF.
Along with the E84 output signals under Active Mode
control, the screen displays the live status of the
Passive equipment’s output signals.
New in Rev. 2.1.1 are toggle buttons for Interbay Active
Mode Output signals, and live status for Interbay Active
Mode Input signals.
Active Mode Manual Control Screen
No automated timing sequences are followed on the Active Mode Manual Control Screen. The E84 Tester
simply sets the Active Mode signals based on the state of the toggle buttons, and displays the Passive
equipment’s output signals based on their current state.
To close the Active Mode Manual Control Screen and return to the Main Menu, the user selects the Return
to Main Menu button.
Passive Mode Manual Control Screen
When the user selects the Manual Passive Mode
Testing, the Passive Mode Manual Control Screen is
displayed. This screen is used to manually toggle E84
output signals that are under Passive Mode control.
Toggle buttons are provided for each signal, allowing the
user to switch each signal’s state ON and OFF.
Along with the E84 output signals under Passive Mode
control, the screen displays the live status of the Active
equipment’s output signals.
New in Rev. 2.1.1 are toggle buttons for Interbay
Passive Mode Output signals, and live status for
Interbay Passive Mode Input signals.
Passive Mode Manual Control Screen
No automated timing sequences are followed on the Passive Mode Manual Control Screen. The E84
Tester simply sets the Passive Mode signals based on the state of the toggle buttons, and displays the
Active equipment’s output signals based on their current state.
To close the Passive Mode Manual Control Screen and return to the Main Menu, the user selects the
Return to Main Menu button.
Saved Test Information
This section details the format of saved test information. When the user elects to save the current test
information during Active, Passive, or Continuous Mode testing, the E84 Emulator writes an ASCII text
file that is formatted for printing. Examples of saved test results for each testing mode are included below.
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Active Mode Test Report
E84 Automated Test Results File Report Date: 4/01/2005
Generated by E84 Test Application 2.2 (April 2005) - Testing as Active Entity
-----------------------------------------------------------------------------Test Information
---------------Tested By
Test Date
Supplier Name
Equipment Model
:
:
:
:
Test Comments :
Andrew J. Giusti
4/01/2005
Get Control, Inc.
E84
Test Comments
Active Timeout Settings
----------------------TA1 : 30 seconds
TA2 : 30 seconds
TA3 : 30 seconds
Load Port Number :
1
(CS_0).
Test Details
-----------Static Tests
-----------Test A.
Is a labeled DB-25 female E84 plug (as specified in ISO 4902)
present for each Load Port on the equipment?
Results : Pass
Notes : Static Test A comments.
Test B. Are the plugs mounted in the correct location?
Results : Pass
Notes : Static Test B comments.
Test C. Do documented E84 recovery procedures exist?
Results : Pass
Notes : Static Test C comments.
Functionality Tests
------------------Test A.
Using the equipments User Interface, verify that the Passive
Equipment timers (TP1 - TP5) are configurable within the range
specified in E84 (1 to 999 seconds). Note Default Settings.
Results : Pass
Notes : Functional Test A comments.
Passive Equipment Timers Default Settings
----------------------------------------TP1 : 30 seconds
TP2 : 30 seconds
TP3 : 60 seconds
GCI E84 Emulator Application Users Manual
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GCI E84 Emulator Application Users Manual
TP4 :
TP5 :
Version 2.3
60 seconds
30 seconds
Test B.
Verify for hard wired implementation the voltage provided by the
equipment under test is within the range specified in E84 under
Full Load [100mA] and No Load [<2mA].
Results : Pass
Notes : Functional Test B comments.
Test C.
Verify single handoff sequence for Loading.
Results :
Notes :
Test C.
Verify single handoff sequence for Loading (signal order
independency verification).
Results :
Notes :
Test D.
Pass
Functional Test C (2nd run) comments.
Verify single handoff sequence for Unloading.
Results :
Notes :
Test D.
Pass
Functional Test C comments.
Pass
Functional Test D comments.
Verify single handoff sequence for Unloading (signal order
independency verification).
Results :
Notes :
Pass
Functional Test D (2nd run) comments.
Test E. Verify handoff available signal test for load.
Results : Pass
Notes : Functional Test E comments.
Test F. Verify handoff available sequence.
Results : Pass
Notes : Functional Test F comments.
Test G. Verify TP1 timeout error.
Results : Fail
Notes : Functional Test G comments.
Sample failed test.
Failed during test step 8.
Failure - TP1 timeout error did not occur at appropriate time (or did not
occur at all).
Test H. Verify TP2 timeout error.
Results : Pass
Notes : Functional Test H comments.
Test I. Verify TP3 timeout error.
Results : Pass
Notes : Functional Test I comments.
Test J. Verify TP4 timeout error.
Results : Pass
Notes : Functional Test J comments.
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Test K. Verify TP5 timeout error.
Results : Pass
Notes : Functional Test K comments.
Test L. Verify access mode selection.
Results : Pass
Notes : Functional Test L comments.
Test M.
Verify Port Sensors tied to E84 signals - Part 1 (Placement
sensor(s) activated during Load, but Presence sensor(s) is not).
Results : Pass
Notes : Functional Test M comments.
Test N.
Verify Port Sensors tied to E84 signals - Part 2 (Presence
sensor(s) activated during Load, but Placement sensor(s) is not).
Results : Pass
Notes : Functional Test N comments.
Test O.
Verify Port Sensors tied to E84 signals - Part 3 (Placement
sensor(s) deactivated during Unload, but Presence sensor(s) is
not).
Results : Pass
Notes : Functional Test O comments.
Test P.
Verify Port Sensors tied to E84 signals - Part 4 (Presence
sensor(s) deactivated during Unload, but placement sensor(s) is
not).
Results : Pass
Notes : Functional Test P comments.
Test Q. Verify Emergency Stop operation.
Results : Pass
Notes : Functional Test Q comments.
Test Summary
-----------Supplier Name :
Equipment Model :
LP Number :
Get Control, Inc.
E84
1
Static Tests
-----------A
B
C
P
P
P
Functionality Tests
------------------A
B
CC
DD
E
--P
P
PP
PP
P
Test Comments :
Date : 4/01/2005
F
P
G
F
H
P
I
P
J
P
K
P
L
P
M
P
N
P
O
P
P
P
Q
P
Test Comments
Tested By :
GCI E84 Emulator Application Users Manual
Andrew J. Giusti
Results :
Failed
21
GCI E84 Emulator Application Users Manual
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Version 2.3
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GCI E84 Emulator Application Users Manual
Version 2.3
Active Mode Test Report - Unload Port Test
E84 Automated Test Results File Report Date: 4/01/2005
Generated by E84 Test Application 2.2 (April 2005) - Testing as Active Entity
-----------------------------------------------------------------------------Test Information
---------------Tested By
Test Date
Supplier Name
Equipment Model
NOTE:
: Andrew J. Giusti
: 4/01/2005
: Get Control, Inc.
: E84
Unload Sequence used for Test F (Verify Handoff Available Sequence) and
Tests G through K (TP Timer Tests)
Test Comments :
Sample "Select Unload Port Tests" test plan.
Active Timeout Settings
----------------------TA1 : 30 seconds
TA2 : 30 seconds
TA3 : 30 seconds
Load Port Number :
1
(CS_0).
Test Details
-----------Static Tests
-----------Test A.
Is a labeled DB-25 female E84 plug (as specified in ISO 4902)
present for each Load Port on the equipment?
Results : Pass
Test B. Are the plugs mounted in the correct location?
Results : Pass
Test C. Do documented E84 recovery procedures exist?
Results : Pass
Functionality Tests
------------------Test A.
Using the equipments User Interface, verify that the Passive
Equipment timers (TP1 - TP5) are configurable within the range
specified in E84 (1 to 999 seconds). Note Default Settings.
Results : Pass
Passive Equipment Timers Default Settings
----------------------------------------TP1 : 30 seconds
TP2 : 30 seconds
TP3 : 30 seconds
TP4 : 30 seconds
TP5 : 30 seconds
GCI E84 Emulator Application Users Manual
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Test B.
Verify for hard wired implementation the voltage provided by the
equipment under test is within the range specified in E84 under
Full Load [100mA] and No Load [<2mA].
Results : Pass
Test C.
Verify single handoff sequence for Loading.
Results :
Test C.
Verify single handoff sequence for Loading (signal order
independency verification).
Results :
Test D.
Untested
Verify single handoff sequence for Unloading.
Results :
Test D.
Untested
Pass
Verify single handoff sequence for Unloading (signal order
independency verification).
Results :
Pass
Test E. Verify handoff available signal test for load.
Results : Untested
Test F. Verify handoff available sequence.
Results : Pass
Test G. Verify TP1 timeout error.
NOTE: Unload Sequence used for TP Timer Test
Results : Pass
Test H. Verify TP2 timeout error.
NOTE: Unload Sequence used for TP Timer Test
Results : Pass
Test I. Verify TP3 timeout error.
NOTE: Unload Sequence used for TP Timer Test
Results : Pass
Test J. Verify TP4 timeout error.
NOTE: Unload Sequence used for TP Timer Test
Results : Pass
Test K. Verify TP5 timeout error.
NOTE: Unload Sequence used for TP Timer Test
Results : Pass
Test L. Verify access mode selection.
Results : Pass
Test M.
Verify Port Sensors tied to E84 signals - Part 1 (Placement
sensor(s) activated during Load, but Presence sensor(s) is not).
Results : Untested
Test N.
Verify Port Sensors tied to E84 signals - Part 2 (Presence
sensor(s) activated during Load, but Placement sensor(s) is not).
GCI E84 Emulator Application Users Manual
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GCI E84 Emulator Application Users Manual
Results :
Version 2.3
Untested
Test O.
Verify Port Sensors tied to E84 signals - Part 3 (Placement
sensor(s) deactivated during Unload, but Presence sensor(s) is
not).
Results : Pass
Test P.
Verify Port Sensors tied to E84 signals - Part 4 (Presence
sensor(s) deactivated during Unload, but placement sensor(s) is
not).
Results : Pass
Test Q. Verify Emergency Stop operation.
Results : Pass
Test Summary
-----------Supplier Name :
Equipment Model :
LP Number :
Get Control, Inc.
E84
1
Static Tests
-----------A
B
C
P
P
P
Functionality Tests
------------------A
B
CC
DD
E
--P
P
UU
PP
U
Test Comments :
Date : 4/01/2005
F
P
G
P
H
P
I
P
J
P
K
P
L
P
M
U
N
U
O
P
P
P
Q
P
Sample "Select Unload Port Tests" test plan.
Tested By :
GCI E84 Emulator Application Users Manual
Andrew J. Giusti
Results :
Passed
25
GCI E84 Emulator Application Users Manual
Version 2.3
Passive Mode Test Report
E84 Automated Test Results File Report Date: 4/01/2005
Generated by E84 Test Application 2.2
(April 2005)- Testing as Passive Entity
-----------------------------------------------------------------------------Test Information
---------------Tested By
Test Date
Supplier Name
Equipment Model
Test Comments
:
:
:
:
:
Andrew J. Giusti
4/01/2005
Get Control, Inc.
E84
Test Comments.
Passive Timeout Settings
-----------------------TP1 : 60 seconds
TP2 : 60 seconds
TP3 : 60 seconds
TP4 : 60 seconds
TP5 : 60 seconds
Load Port Number :
CS0
Test Details
-----------Static Tests
-----------Test A.
Does a labeled DB-25 male E84 plug (as specified in ISO 4902)
exist for each Load Port that is part of the test set-up?
Results : Pass
Notes : Static Test A comments.
Test B. Are the male AMHS plug ends mounted in the correct location?
Results : Pass
Notes : Static Test B comments.
Test C. Do documented E84 recovery procedures exist?
Results : Pass
Notes : Static Test C comments.
Functionality Tests
------------------Test A.
Using the equipment User Interface, verify that the Active
Equipment timers (TA1 - TA3) are configurable within specified
range (between 1 and 999 seconds). Note Default Settings.
Results : Pass
Notes : Functional Test A comments.
Active Equipment Timers Default Settings
---------------------------------------TA1 : 30 seconds
TA2 : 30 seconds
TA3 : 30 seconds
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Test B.
Verify for hard wired implementation the voltage provided by the
equipment under test is within the range specified in E84 under
Full Load [100mA] and No Load [<2mA].
Results : Untested
Test C. Verify single handoff sequence for Loading.
Results : Pass
Notes : Functional Test C comments.
Test D. Verify single handoff sequence for Unloading.
Results : Pass
Notes : Functional Test D comments.
Test E. Verify handoff available sequence test 1.
Results : Fail
Notes : Functional Test E comments. Sample failed test.
Failed during test step 6.
Failure - Load Port select signals (CS_0, CS_1) did not turn OFF following
drop of HO_AVBL signal.
Test F. Verify handoff available sequence test 2.
Results : Pass
Notes : Functional Test F comments.
Test G. Verify handoff available sequence test 3.
Results : Pass
Notes : Functional Test G comments.
Test H. Verify TA1 timeout error.
Results : Pass
Notes : Functional Test H comments.
Test I. Verify TA2 timeout error.
Results : Pass
Notes : Functional Test I comments.
Test J. Verify TA3 timeout error.
Results : Pass
Notes : Functional Test J comments.
Test K. WIPS Jeopardy Test 1 (L_REQ stays ON).
Results : Pass
Notes : Functional Test K comments.
Test L. WIPS Jeopardy Test 2 (L_REQ turns OFF early).
Results : Pass
Notes : Functional Test L comments.
Test M. WIPS Jeopardy Test 3 (U_REQ stays ON).
Results : Pass
Notes : Functional Test M comments.
Test N. Verify Emergency Stop operation - Test 1 (Load sequence).
Results : Pass
Notes : Functional Test N comments.
Test O.
Verify Emergency Stop operation - Test 2 (Unload sequence).
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GCI E84 Emulator Application Users Manual
Results :
Notes :
Version 2.3
Pass
Functional Test O comments.
Test Summary
-----------Supplier Name :
Equipment Model :
LP Number :
Get Control, Inc.
E84
CS0
Static Tests
-----------A
B
C
P
P
P
Functionality Tests
------------------A
B
C
D
E
F
P
U
P
P
F
P
Test Comments :
Date :
4/01/2005
G
P
H
P
I
P
J
P
K
P
L
P
M
P
N
P
O
P
Test Comments.
Tested By :
GCI E84 Emulator Application Users Manual
Andrew J. Giusti
Results :
Failed
28
GCI E84 Emulator Application Users Manual
Version 2.3
Continuous Mode Test Report
E84 Automated Test Results File Report Date: 4/01/2005
Generated by E84 Test Application 2.2 (April 2000) Continuous Mode Testing
-----------------------------------------------------------------------------Test Information
---------------Tested By
Test Date
Supplier Name
Equipment Model
:
:
:
:
Andrew
4/01/2005
Get Control
E84
Active Timeout Settings
----------------------TA1 : 30 seconds
TA2 : 30 seconds
TA3 : 30 seconds
Passive Timeout Settings
----------------------TP1 : 30 seconds
TP2 : 30 seconds
TP3 : 60 seconds
TP4 : 60 seconds
TP5 : 30 seconds
TP6 : 30 seconds
Delay Timer Settings
-------------------TD1 : 2 seconds
Test Sequence
------------1 - Unload CS_0
2 - Load CS_0
3 - Unload CS_1
4 - Load CS_1
Test Details
-----------Continuous Mode Tests
------------------Test A. Test Active Mode Continuous Handoff Sequence.
Results : Fail
Failed during Cycle 2, test step 5.
L_REQ signal is ON when it should be OFF.
Test B. Verify TP6 timeout error.
Results : Pass
Test C. Test Passive Mode Continuous Handoff Sequence.
Results : Untested
GCI E84 Emulator Application Users Manual
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Test Summary
-----------Supplier Name :
Equipment Model :
Get Control
E84
Continuous Mode Tests
--------------------A
B
C
F
P
U
Date :
4/01/2005
Tested By :
GCI E84 Emulator Application Users Manual
Andrew
Results :
Failed
30
GCI E84 Emulator Application Users Manual
Version 2.3
Test Plans
The E84 Emulator Application has two built-in test plans, one for Active Mode Testing and one for
Passive Mode Testing. Additionally, the E84 Emulator Application allows for customized Continuous
Mode testing, using the Load and Unload tests defined in the standard test plans.
This section details both the Active and Passive Mode test plans, along with the three available
Continuous Mode tests. Functional tests are broken down into a series of numbered test steps. Each test
step is described using the text that is displayed by the E84 Emulator during automated testing. When a
failure occurs during a Functional test, a failure message is displayed in place of the test step text. Failure
messages appear in the lists below using a bold typeface, and are noted by the step number on screen
and in generated reports.
Not all tests begin with step 1. Some tests require setup sequences that do not involve any user prompts.
Also, some tests skip step numbers. This is required to simulate certain tested error conditions. The
numbered steps described in this section match step numbers reported during actual testing.
Signal Status Verification Errors
The E84 Specification defines the state of all E84 signals during sequence handshaking. The E84
Emulator verifies all signal states against the E84 Specification during every Functionality test. If the E84
Emulator detects an invalid signal state (OFF when it should be ON, or ON when it should be OFF), a
verification error is displayed, and the test is terminated with a failure. Verification error messages take
one of the following forms:
[signal name] signal is OFF when it should be ON
[signal name] signal is ON when it should be OFF
Active Mode Test Plan
Active Mode testing includes both Static and Functionality tests. Static tests verify interface plug location
and labeling, along with documentation issues. Functionality tests verify that the equipment under test
adheres to the E84 handshaking specification. This section describes the pre-defined tests supplied by
the E84 Emulator.
Static tests are described by the tests title. Functionality tests are described by the tests title, along with
detailed information about the steps required to complete the test.
TP Timer Settings
During Active Mode Functionality testing, the E84 Emulator uses TP timer settings to verify timing critical
sections of the load/unload sequences. Active Mode Functionality Test A allows the user to enter the TP
settings of the equipment under test. If Active Mode Functionality Test A is not selected to run, the E84
Emulator reverts the TP timer values to the defaults defined by the E84 Specification.
It is critical that the TP timer values used by the E84 Emulator match those in use by the equipment under
test. If the values differ, false test failures may occur. If Active Mode Functionality Test A is not selected,
the following warning message is displayed before automated testing begins.
You have not selected Functionality Test A, which allows you to enter the current TP timer values
for the equipment under test. These values are used for timing various steps during Active Mode
testing. If the timer settings don't match, test results may be invalid.
If you do not enter the current values, the TP settings will revert to the defaults listed in the E84
Specification:
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TP1 = 2 Seconds
TP2 = 2 Seconds
TP3 = 60 Seconds
TP4 = 60 Seconds
TP5 = 2 Seconds
Press "Yes" to run Functionality Test A.
Press "No" to test using the E84 default settings.
Press "Cancel" to abort testing.
Load / Unload Cycle Test
Starting with E84 Emulator Application, Rev 2.0, two new test sequences were added to Active Mode
testing.
The Load Cycle contains two places where several signals are changing states concurrently.
Case 1: The first of these occurs just after the FOUP is detected on the Load Port. The AMHS
(Active Equipment) turns the TR_REQ and BUSY signals OFF, and the COMPT signal
ON.
Case 2: The second concurrent change occurs at the end of the Load Cycle, where the AMHS
turns the CS_0, VALID and COMPT signals OFF.
In Case 1, the Passive Equipment responds to the signal changes by turning it’s READY signal OFF. In
Case 2, the Passive Equipment uses the signal changes to determine the end of the handoff sequence.
The SEMI® E84 Specification implies an order for these signal changes, but does not define one explicitly.
This can cause confusion between different equipment manufacturers, and may result in different
implementations of the E84 communication protocol.
To resolve this, industry leaders have defined a standard trigger signal that can be used by the Passive
Equipment to determine the completion of each sequence.
In Case 1, the Passive Equipment uses the COMPT signal turning ON to determine when to turn the
READY signal OFF. The Passive Equipment should ignore the state of the TR_REQ and BUSY signals.
In Case 2, the Passive Equipment uses the COMPT signal turning OFF to determine the end of the
handoff sequence. The Passive Equipment should ignore the state of the VALID and CS_0 signals.
To test adherence of Passive Equipment to this standard, the E84 Emulator now runs the Load and
Unload Cycle tests twice, using a different sequence of signal state changes for each test. This verifies
that the Passive Equipment under test is not dependant on a specific sequence of signal state changes.
Following Active Mode, Functional
Test C (Load Cycle Test), the user is
prompted to run the test a second
time. The second time the test is run,
Run Load Cycle Test Warning
the sequence of signal state changes
is modified. The first Load Cycle test uses the sequence: BUSY, TR_REQ, COMPT followed by COMPT,
VALID, CS_0. The second Load Cycle test uses the sequence: TR_REQ, BUSY, COMPT followed by
VALID, COMPT, CS_0.
Similarly, following Active Mode,
Functional Test D (Unload Cycle Test),
the user is prompted to run the test a
second time. The second time the test
is run, the sequence of signal state
GCI E84 Emulator Application Users Manual
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GCI E84 Emulator Application Users Manual
Version 2.3
changes is modified. The first Unload Cycle test uses the sequence: BUSY, TR_REQ, COMPT followed
by COMPT, VALID, CS_0. The second Unload Cycle test uses the sequence: TR_REQ, BUSY, COMPT
followed by COMPT, CS_0, VALID.
If the equipment under test fails the Load (or Unload) Cycle test when the E84 Emulator changes the
signal state change order, a special error message is added to the saved test report.
If the failure occurs when the E84 Emulator is turning the TR_REQ and BUSY signals OFF, and the
COMPT signal ON, the error message takes the form:
***** Failure at this step may indicate that the Passive
Equipment expects a specific order of the signals
TR_REQ, BUSY and COMPT.
Please consult an E84 Standards expert.
If the failure occurs when the E84 Emulator is turning the VALID, CS_0 and COMPT signals OFF, the
error message takes the form:
***** Failure at this step may indicate that the Passive
Equipment expects a specific order of the signals
CS_0 and VALID.
Please consult an E84 Standards expert.
If one of the two Load (or Unload) Cycle tests passes, and the other fails, an additional error message is
added to the saved test report.
***** When one Load test fails, and one passes, it may indicate that the
Passive Equipment expects a specific order of the signals
BUSY, TR_REQ, COMPLT or COMPT, VALID, CS_0.
Please consult an E84 Standards expert.
SEMI® E87 Requirements Note
During several Active Mode Automatic tests, the operator is prompted to place a FOUP onto the Load Port
whose E84 interface is being tested. It is important to note that the SEMI® E87 specification requires that
Load Ports be placed in Manual Access Mode before allowing manual loading or unloading of FOUPs.
To avoid possible SEMI® E87 related alarms, the Load Port being tested must be placed in Manual Access
Mode whenever a FOUP is manually loaded or unloaded.
When prompted by the software to manually place a FOUP onto the Load Port, first switch the Load Port
to Manual Access Mode, then load the FOUP, then switch the Load Port back to Automatic Access Mode.
E84 Specification References
All references to E84 Specification sections or figures in the description of Active Mode tests are taken
from E84-0304.
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Active Mode Static Tests
There are three Active Mode, Static tests. These tests verify the following:
•
•
•
Proper labeling of DB-25 female E84 plug.
Proper location of DB-25 female E84 plug.
Existence of documented E84 recovery procedures.
Active Mode Static Test A
Verify labeled DB-25 female E84 plug exists.
Is a labeled DB-25 female E84 plug (as specified in ISO 4902) present for each Load Port on the
equipment?
Why we run this test
Section 6.4 of the E84 Specification requires that the passive equipment supply a female DB-25
connector for the E84 interface. This connector must also comply with all electrical and pin
assignments defined by the Specification. The Emulator verifies I/O pin assignments during each
test in the functional test suite. Functional test B verifies the pin assignment for supply voltage.
The Emulator does not verify I/O electrical specifications. Signals are considered OFF if their
voltage level is greater than 1.8 VDC. Signals are considered ON if their voltage level drops
below 1.8 VDC. Use the GCI Handheld Tester for thorough electrical specification testing.
This test is a visual examination by the operator to verify that the equipment provides the required
female DB-25 connector. The operator is required to manually pass or fail this test.
Active Mode Static Test B
Verify proper plug location.
Are the plugs mounted in the correct location? Figure 1 defines the zone where the plug(s) can
be located. The plug(s) can be mounted anywhere in this zone on the top or top edge of the
equipment.
Figure 1 - E84 Plug Locations
Why we run this test
Application note A1 of the E84 Specification (section A1-1.1) defines a zone on the process
equipment where the E84 interface connector should be placed.
This test is a visual examination by the operator to verify that the E84 interface connector is
located in the correct zone. The operator is required to manually pass or fail this test.
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Active Mode Static Test C
Verify Documented Recovery Procedures Exist.
Do documented E84 recovery procedures exist?
E84 Recovery Procedures Description
Why we run this test
The E84 Specification recommends (in section 6.3.3.1) that recovery procedures be provided on
the passive equipment. The Specification also requires (6.3.1.1) that the passive equipment
display error messages on it’s user interface. These error messages must (according to section
A1-4.7) include the timer name, timer description and current timer setting.
This test is a visual examination by the operator to verify that proper recovery procedures exist,
and that the tool properly displays error messages on it’s user interface.
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Active Mode Functionality Tests
There are 17 Active Mode, Functionality tests. These tests verify that the equipment under test adheres to
the E84 interface specification under the following conditions:
•
•
•
•
•
•
•
•
User configurable passive equipment timers.
+24 Volts Full Load and No Load voltage level.
Load, and Unload Sequences.
Handoff available 1, and 2.
TP1 - TP5 Timeouts.
Access Mode Change.
Port Sensor Tests 1 - 4.
Emergency Stop operation.
Active Mode Functionality Test A
Verify Configurable Passive Equipment Timers
Using the equipment user interface, verify that the passive equipment timers (TP1 through TP5)
are configurable within the range specified in E84
(1 to 999) and make note of the default settings:
1.
2.
3.
Operator action required...
Waiting for operator to enter default TP
timer settings.
This test Passes if all TP timers can be
configured at the equipment User
Interface. Timers must be configurable
between 1 and 999 Seconds. Please
mark test results before continuing.
Why we run this test
Section 6.3.2.1 of the E84 Specification requires
that interlock timeout values be user
programmable. The Load Port uses five different
timeout (TP1 - TP5) values for normal E84
Default TP Timer Entry Screen
hand-offs. A sixth timeout (TP6) is used during
continuous mode hand-offs.
The Emulator uses the values of the Load Port’s interlock timeouts during functional testing. The
operator is asked to verify that the timeout settings are user programmable through the tools user
interface. The current settings are entered into a dialog box so the Emulator can reference them
in other functional tests.
After entering the five timeout values, the Emulator will automatically set the test results to ‘Pass’.
If the tool does not properly allow the timeouts to be modified, or if the allowable range for each
timeout is not valid, the operator should manually fail the test.
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Active Mode Functionality Test B
Verify Full Load / No Load Voltage
Verify for hard wired implementation the voltage provided by the equipment under test is within the
range specified in E84 under Full Load [100mA] and No Load [<2mA].
1.
2.
3.
4.
5.
6.
7.
8.
No Load Voltage Pre-Check
No Load Voltage Pre-Check Verified. Testing Full Load Voltage.
Failure - Voltage not detected, or is below 18Vdc. Verify cable connection.
Full Load Voltage verified greater than or equal to 18Vdc.
Failure - Full Load Voltage is less than 18Vdc.
Full Load Voltage verified less than or equal to 30Vdc.
Failure - Full Load Voltage is greater than 30Vdc.
Testing No Load Voltage.
No Load Voltage verified greater than or equal to 18Vdc.
Failure - No Load Voltage is less than 18Vdc.
No Load Voltage verified less than or equal to 30Vdc.
Failure - No Load Voltage is greater than 30Vdc.
Voltage Test Passed.
Why we run this test
Figure 35 of the E84 Specification defines the pin assignment for Power and Power COM on the
passive equipment’s E84 interface connector be on pins 23 and 24 respectively. Additionally, in
section 6.4.2.1 the Specification defines that the power supply voltage be +24 VDC Nominal, with
a minimum of +18 VDC and a maximum of +30 VDC (for both no load and full load of 100 mA).
This test verifies that the Load Port is supplying +24 VDC on pin 23, referenced to pin 24. No
operator interaction is required for this test.
This test is only valid for hardwired applications. When testing with an attached Optical
Transceiver, this test will always pass, but will not actually test the tools power supply pins.
The Optical Transceiver connects to the Emulators female DB-25 connector, which is it’s
passive emulation port. This is required because of the pin assignments for the Optical
Transceiver. The Emulator supplies +24 VDC to the attached Optical Transceiver through pin
23 of this female connector. The E84 Specification defines (Figure 32) that the Optical
Transceiver tie pins 22 and 23 together. This brings the Emulator supplied +24 VDC back on
pin 22 of the female connector, which is the pin that the active equipment normally supplies
voltage on.
When running the voltage test through an attached Optical Transceiver, the Emulator will end
up verifying it’s own +24 VDC supply voltage.
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Version 2.3
Active Mode Functionality Test C
Verify Single Handoff Load Sequence
Verify single handoff sequence for Loading.
See Figure 2 for example signal timing diagram.
3.
4.
5.
6.
7.
8.
9.
HO_AVBL signal verified ON on
equipment under test.
Failure - HO_AVBL signal is OFF on
equipment under test.
Setting Load Port select signals (CS_0,
CS_1) based on test configuration.
Setting VALID signal ON.
L_REQ signal verified ON on equipment
under test.
Failure - L_REQ signal failed to turn Figure 2 - Single Handoff (Load) Signal Timing
ON within timeout specified (TA1).
Diagram
Setting TR_REQ signal ON.
READY signal verified ON on equipment under test.
Failure - READY signal failed to turn ON within timeout specified (TA2).
Setting BUSY signal ON. Operator action required...
Please load a FOUP onto the Load Port associated with the E84 interface being tested.
The FOUP must be loaded before the timeout shown expires. This window will close
automatically when the equipment under test detects the loaded FOUP.
10.
11.
Waiting for operator to load FOUP.
L_REQ signal verified OFF on equipment under test.
Failure - L_REQ signal failed to turn OFF after FOUP loaded onto Load Port.
12-14. Setting BUSY signal OFF, TR_REQ signal OFF, and COMPT signal ON.
15.
READY signal verified OFF on equipment under test.
Failure - READY signal failed to turn OFF within timeout specified (TA3).
16-18. Setting COMPT, VALID and Load Port select (CS_0, CS_1) signals OFF.
19.
Load Test Passed.
Why we run this test
The E84 Specification defines (in section 6.2.4) a specific sequence of signal state changes that
must be followed to process an automatic E84 load cycle. This test runs the Active side of that
defined sequence, and verifies that the Load Port being tested properly follows the Passive side.
This test requires the operator to load a FOUP onto the Load Port at the correct time in the
handoff sequence.
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GCI E84 Emulator Application Users Manual
Version 2.3
Active Mode Functionality Test C - 2nd Run
Verify Single Handoff Load Sequence 2
Verify single handoff sequence for Loading
(signal order independency verification). See
Figure 2 for example signal timing diagram.
3.
4.
5.
6.
7.
8.
9.
HO_AVBL signal verified ON on
equipment under test.
Failure - HO_AVBL signal is OFF on
equipment under test.
Setting Load Port select signals (CS_0,
CS_1) based on test configuration.
Setting VALID signal ON.
L_REQ signal verified ON on equipment
under test.
Figure 2 - Single Handoff (Load) Signal Timing
Failure - L_REQ signal failed to turn Diagram
ON within timeout specified (TA1).
Setting TR_REQ signal ON.
READY signal verified ON on equipment under test.
Failure - READY signal failed to turn ON within timeout specified (TA2).
Setting BUSY signal ON. Operator action required...
Please load an FOUP onto the Load Port associated with the E84 interface being tested.
The FOUP must be loaded before the timeout shown expires. This window will close
automatically when the equipment under test detects the loaded FOUP.
10.
11.
Waiting for operator to load FOUP.
L_REQ signal verified OFF on equipment under test.
Failure - L_REQ signal failed to turn OFF after FOUP loaded onto Load Port.
12-14. Setting TR_REQ signal OFF, BUSY signal OFF, and COMPT signal ON.
15.
READY signal verified OFF on equipment under test.
Failure - READY signal failed to turn OFF within timeout specified (TA3).
16-18. Setting VALID, COMPT and Load Port select (CS_0, CS_1) signals OFF.
19.
Load Test Passed.
Why we run this test
Early versions of the E84 Specification did not clearly define the order of two key sequences of
signal state changes. The first sequence is when the FOUP has been loaded / unloaded, and the
Active equipment turns BUSY and TR_REQ off, and COMPT on. The second sequence is when
the Active equipment turns COMPT, VALID and CS_0 / CS_1 off to complete the handoff.
It was found in early testing that some process equipment vendors were depending on a specific
order of signal state changes. Because of the ambiguity in the early E84 Specifications, it was
decided to test for that dependancy by running the Load and Unload cycle tests twice, altering the
order of signals state changes with each test. This verifies that the Load Port being tested does
not depend on any specific signal order sequence.
The current E84 Specification has clarified the order of these signal state changes, but adds a
note that indicates the Load Port should not be dependant on it (Note 3 in section 6.2.4.1).
GCI E84 Emulator Application Users Manual
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GCI E84 Emulator Application Users Manual
Version 2.3
Active Mode Functionality Test D
Verify Single Handoff Unload Sequence
Verify single handoff sequence for Unloading.
See Figure 3 for example signal timing diagram.
1.
Operator action required...
Please load a FOUP onto the Load Port
associated with the E84 interface being tested.
There is no specified time limit for this action,
but testing cannot continue until the FOUP is
loaded. Please press the Close button when
finished.
Note: SEMI® E87 requires that the Load Port be Figure 3 - Single Handoff (Unload) Signal Timing
placed in Manual Access Mode before loading Diagram
or unloading a FOUP by hand. To avoid
possible E87 related alarms, please place the Load Port in Manual Access Mode. Then
load a FOUP. Place the Load Port back in Automatic Access Mode before continuing
with the Unload Test.
2.
3.
4.
5.
6.
7.
8.
9.
Waiting for operator to load FOUP.
HO_AVBL signal verified ON on equipment under test.
Failure - HO_AVBL signal is OFF on equipment under test.
Setting Load Port select signals (CS_0, CS_1) based on test configuration.
Setting VALID signal ON.
U_REQ signal verified ON on equipment under test.
Failure - U_REQ signal failed to turn ON within timeout specified (TA1).
Setting TR_REQ signal ON.
READY signal verified ON on equipment under test.
Failure - READY signal failed to turn ON within timeout specified (TA2).
Setting BUSY signal ON. Operator action required...
Please unload the FOUP from the Load Port associated with the E84 interface being
tested. The FOUP must be removed before the timeout shown expires. This window will
close automatically when the equipment under test detects the removal of the FOUP.
10.
11.
Waiting for operator to unload FOUP.
U_REQ signal verified OFF on equipment under test.
Failure - U_REQ signal failed to turn OFF after FOUP unloaded from Load Port.
12-14. Setting BUSY signal OFF, TR_REQ signal OFF, and COMPT signal ON.
15.
READY signal verified OFF on equipment under test.
Failure - READY signal failed to turn OFF within timeout specified (TA3).
16-18. Setting COMPT, VALID and Load Port select (CS_0, CS_1) signals OFF.
19.
Unload Test Passed.
Why we run this test
The E84 Specification defines (in section 6.2.4) a specific sequence of signal state changes that
must be followed to process an automatic E84 unload cycle. This test runs the Active side of that
defined sequence, and verifies that the Load Port being tested properly follows the Passive side.
This test requires the operator to unload a FOUP onto the Load Port at the correct time in the
handoff sequence.
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GCI E84 Emulator Application Users Manual
Version 2.3
Active Mode Functionality Test D - 2nd Run
Verify Single Handoff Unload Sequence - 2
Verify single handoff sequence for Unloading
(signal order independency verification). See
Figure 3 for example signal timing diagram.
1.
Operator action required...
Please load a FOUP onto the Load Port
associated with the E84 interface being tested.
There is no specified time limit for this action,
but testing cannot continue until the FOUP is
loaded. Please press the Close button when
finished.
Figure 3 - Single Handoff (Unload) Signal Timing
Note: SEMI® E87 requires that the Load Port be Diagram
placed in Manual Access Mode before loading
or unloading a FOUP by hand. To avoid possible E87 related alarms, please place the
Load Port in Manual Access Mode. Then load a FOUP. Place the Load Port back in
Automatic Access Mode before continuing with the Unload Test.
2.
3.
4.
5.
6.
7.
8.
9.
Waiting for operator to load FOUP.
HO_AVBL signal verified ON on equipment under test.
Failure - HO_AVBL signal is OFF on equipment under test.
Setting Load Port select signals (CS_0, CS_1) based on test configuration.
Setting VALID signal ON.
U_REQ signal verified ON on equipment under test.
Failure - U_REQ signal failed to turn ON within timeout specified (TA1).
Setting TR_REQ signal ON.
READY signal verified ON on equipment under test.
Failure - READY signal failed to turn ON within timeout specified (TA2).
Setting BUSY signal ON. Operator action required...
Please unload the FOUP from the Load Port associated with the E84 interface being
tested. The FOUP must be removed before the timeout shown expires. This window will
close automatically when the equipment under test detects the removal of the FOUP.
10.
11.
Waiting for operator to unload FOUP.
U_REQ signal verified OFF on equipment under test.
Failure - U_REQ signal failed to turn OFF after FOUP unloaded from Load Port.
12-14. Setting TR_REQ signal OFF, BUSY signal OFF, and COMPT signal ON.
15.
READY signal verified OFF on equipment under test.
Failure - READY signal failed to turn OFF within timeout specified (TA3).
16-18. Setting COMPT, Load Port select (CS_0, CS_1) and VALID signals OFF.
19.
Unload Test Passed.
Why we run this test
See note on Test C - 2nd Run.
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GCI E84 Emulator Application Users Manual
Version 2.3
Active Mode Functionality Test E
Verify Handoff Available Signal Test for Load
Handoff available signal test for load:
1.
HO_AVBL signal verified ON on equipment under test.
This test verifies that the equipment does not allow for the delivery of a FOUP when the
presence sensor(s) are activated. There are three acceptable communication scenarios:
1 - HO_AVBL signal is turned OFF immediately following activation of the presence
sensor(s).
2 - L_REQ signal is not turned ON after the VALID signal is turned ON.
3 - READY signal is not turned ON after the TR_REQ signal is turned ON.
Activate the presence sensor(s) on the Load Port associated with the E84 interface being
tested.
2.
3.
4.
5.
6.
7.
8.
Setting Load Port select signals (CS_0, CS_1) based on test configuration.
Waiting for operator to activate placement sensor(s).
Setting VALID signal ON.
L_REQ signal verified ON on equipment under test.
Setting TR_REQ signal ON.
Verified - equipment does not allow for the delivery of a FOUP.
Failure - READY signal turned ON on equipment under test when presence
sensor(s) activated.
Handoff available signal test for load Passed.
Why we run this test
The E84 Specification states that the HO_AVBL signal should turn OFF if the Presence Sensor is
ON, but the Placement Sensor is OFF (Table A1-6). If only one sensor is ON, then the FOUP is
not properly positioned on the Load Port.
This test verifies that, if the Presence sensor is blocked before a load cycle is started, the tool
does not allow a load cycle to proceed. If only the Presence sensor is blocked, then a potential
collision situation is present on the Load Port, and the tool should not allow a load or an unload to
occur.
If the tool allows the load cycle to proceed past the point where the delivery vehicle would start
moving the FOUP onto the Load Port, then the test fails.
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GCI E84 Emulator Application Users Manual
Version 2.3
Active Mode Functionality Test F
Verify Handoff Available Sequence
Note: This test uses a standard load cycle to verify the Handoff Available sequence. The Load
Port under test must be empty prior to initiating the test.
Verify handoff available sequence. See Figure
4 for example signal timing diagram.
1.
Operator action required...
For this test only, set the passive equipments
TP1 timeout to 15 seconds. Please press the
Close button when ready to continue.
2.
Waiting for operator to configure the
TP1 setting.
HO_AVBL signal verified ON on
equipment under test.
Failure - HO_AVBL signal is OFF on Figure 4 - Handoff Available Signal Timing
Diagram
equipment under test.
Setting Load Port select signals (CS_0, CS_1) based on test configuration.
Setting VALID signal ON. Operator action required...
3.
4.
5.
Manually induce a condition on the equipment (switch the equipment to manual mode)
that causes the HO_AVBL signal to go OFF. The operator must switch the equipment to
manual mode before the timeout shown below expires.
6.
7.
Waiting for operator to cause error condition on equipment under test.
HO_AVBL signal verified OFF on equipment under test.
Failure - HO_AVBL signal did not turn OFF following operator induced error.
Setting VALID and Load Port select (CS_0, CS_1) signals OFF. Operator action
required...
8.
Clear the condition on the equipment (switch the equipment back to automatic mode) that
caused the HO_AVBL signal to go OFF. There is no specified time limit for this action.
9.
10.
Waiting for operator to clear error condition on equipment under test.
HO_AVBL signal verified ON on equipment under test. Operator action required...
Change the passive equipments TP1 timer setting back to the original default setting.
Press the Close button when ready to continue.
11.
12.
Failure - HO_AVBL did not turn ON.
Waiting for operator to re-configure the TP1 setting.
Handoff Available Test Passed.
Why we run this test
The HO_AVBL signal should turn OFF when the Load Port is not available for an automatic
handoff. This test verifies that the Load Port turns the HO_AVBL signal OFF when entering
manual mode after a handoff has started.
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GCI E84 Emulator Application Users Manual
Version 2.3
Active Mode Functionality Test G
Verify TP1 Timeout Error
Verify TP1 timeout error.
3.
HO_AVBL signal verified ON on equipment under test.
Failure - HO_AVBL signal is OFF on equipment under test.
Setting Load Port select signals (CS_0, CS_1) based on test configuration.
Setting VALID signal ON.
L_REQ signal verified ON on equipment under test.
Failure - L_REQ signal failed to turn ON within timeout specified (TA1).
Testing TP1 Timeout. Waiting for TP1 timeout period to expire.
4.
5.
6.
7.
TP1 Timer Test in progress. When the timeout shown decrements to zero, the Passive
Equipment under test should generate a TP1 alarm on its User Interface. If the alarm
does not occur at the appropriate time (either before, or after the timeout expires) the
timer test has failed, and the user should press the Fail Button. If the alarm does occur at
the proper time, the timer test has passed, and the user should press the Pass Button.
8.
20.
21.
TP1 timeout error verified on equipment under test User Interface.
Failure - TP1 timeout error did not occur at appropriate time (or did not occur at all).
Setting VALID and Load Port select (CS_0, CS_1) signals OFF.
TP1 Timeout Test Passed.
Passive Equipment must be reset before continuing to next test. Please verify that the
Passive Equipment is ready before proceeding.
Why we run this test
The E84 Specification defines TP1 as the maximum time between L_REQ / U_REQ ON and
TR_REQ ON (Table 8). Section 6.3 specifies that equipment should inform the operator about
handoff timeout errors. Additionally, in section A1-4.71 requires that the equipment display details
about the timeout error including: “Timer name, Timer Description and current Timer setting.”
This test will force a TP1 timeout error by advancing the handoff up to the point where the
equipment is expecting the TR_REQ signal to turn ON. At this point, the Emulator locks it’s
outputs and displays a timeout dialog box. This timeout box counts down from the TP1 value set
during Test A. When the counter reaches zero, the timeout should have expired on the
equipment.
The Emulator requires the operator to visually inspect the equipments GUI to verify that an
appropriate timeout error message has been displayed. After the operator passes, or fails the test
based on the visual display of an error message, the Emulator checks the HO_AVBL signal.
When the timeout occurs, the the HO_AVBL signal should turn OFF. If the operator passes the
test based on the display of an error message, but the equipment fails to turn OFF the HO_AVBL
signal, the Emulator will fail the test. Note, this applies to E84 Emulator Application 2.2 or greater.
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GCI E84 Emulator Application Users Manual
Version 2.3
Active Mode Functionality Test H
Verify TP2 Timeout Error
Verify TP2 timeout error.
3.
HO_AVBL signal verified ON on equipment under test.
Failure - HO_AVBL signal is OFF on equipment under test.
Setting Load Port select signals (CS_0, CS_1) based on test configuration.
Setting VALID signal ON.
L_REQ signal verified ON on equipment under test.
Failure - L_REQ signal failed to turn ON within timeout specified (TA1).
Setting TR_REQ signal ON.
READY signal verified ON on equipment under test.
Failure - READY signal failed to turn ON within timeout specified (TA2).
Testing TP2 Timeout. Waiting for TP2 timeout period to expire.
4.
5.
6.
7.
8.
9.
TP2 Timer Test in progress. When the timeout shown decrements to zero, the Passive
Equipment under test should generate a TP2 alarm on its User Interface. If the alarm
does not occur at the appropriate time (either before, or after the timeout expires) the
timer test has failed, and the user should press the Fail Button. If the alarm does occur at
the proper time, the timer test has passed, and the user should press the Pass Button.
10.
20.
21.
TP2 timeout error verified on equipment under test User Interface.
Failure - TP2 timeout error did not occur at appropriate time (or did not occur at all).
Setting VALID, TR_REQ and Load Port select (CS_0, CS_1) signals OFF.
TP2 Timeout Test Passed.
Passive Equipment must be reset before continuing to next test. Please verify that the
Passive Equipment is ready before proceeding.
Why we run this test
The E84 Specification defines TP2 as the maximum time between READY ON and BUSY ON
(Table 8). Section 6.3 specifies that equipment should inform the operator about handoff timeout
errors. Additionally, in section A1-4.71 requires that the equipment display details about the
timeout error including: “Timer name, Timer Description and current Timer setting.”
This test will force a TP2 timeout error by advancing the handoff up to the point where the
equipment is expecting the BUSY signal to turn ON. At this point, the Emulator locks it’s outputs
and displays a timeout dialog box. This timeout box counts down from the TP2 value set during
Test A. When the counter reaches zero, the timeout should have expired on the equipment.
The Emulator requires the operator to visually inspect the equipments GUI to verify that an
appropriate timeout error message has been displayed. After the operator passes, or fails the test
based on the visual display of an error message, the Emulator checks the HO_AVBL signal.
When the timeout occurs, the the HO_AVBL signal should turn OFF. If the operator passes the
test based on the display of an error message, but the equipment fails to turn OFF the HO_AVBL
signal, the Emulator will fail the test. Note, this applies to E84 Emulator Application 2.2 or greater.
GCI E84 Emulator Application Users Manual
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GCI E84 Emulator Application Users Manual
Version 2.3
Active Mode Functionality Test I
Verify TP3 Timeout Error
Verify TP3 timeout error.
3.
4.
5.
6.
7.
8.
9.
10.
HO_AVBL signal verified ON on equipment under test.
Failure - HO_AVBL signal is OFF on equipment under test.
Setting Load Port select signals (CS_0, CS_1) based on test configuration.
Setting VALID signal ON.
L_REQ signal verified ON on equipment under test.
Failure - L_REQ signal failed to turn ON within timeout specified (TA1).
Setting TR_REQ signal ON.
READY signal verified ON on equipment under test.
Failure - READY signal failed to turn ON within timeout specified (TA2).
Setting BUSY signal ON.
Testing TP3 Timeout. Waiting for TP3 timeout period to expire.
TP3 Timer Test in progress. When the timeout shown decrements to zero, the Passive
Equipment under test should generate a TP3 alarm on its User Interface. If the alarm
does not occur at the appropriate time (either before, or after the timeout expires) the
timer test has failed, and the user should press the Fail Button. If the alarm does occur at
the proper time, the timer test has passed, and the user should press the Pass Button.
11.
20.
21.
TP3 timeout error verified on equipment under test User Interface.
Failure - TP3 timeout error did not occur at appropriate time (or did not occur at all).
Setting BUSY, TR_REQ, VALID and Load Port select (CS_0, CS_1) signals OFF.
TP3 Timeout Test Passed.
Passive Equipment must be reset before continuing to next test. Please verify that the
Passive Equipment is ready before proceeding.
Why we run this test
The E84 Specification defines TP3 as the maximum time between BUSY ON and carrier detect /
removal (Table 8). Section 6.3 specifies that equipment should inform the operator about handoff
timeout errors. Additionally, in section A1-4.71 requires that the equipment display details about
the timeout error including: “Timer name, Timer Description and current Timer setting.”
This test will force a TP3 timeout error by advancing the handoff up to the point where the
equipment is expecting the arrival of a FOUP. At this point, the Emulator locks it’s outputs and
displays a timeout dialog box. This timeout box counts down from the TP3 value set during Test
A. When the counter reaches zero, the timeout should have expired on the equipment.
The Emulator requires the operator to visually inspect the equipments GUI to verify that an
appropriate timeout error message has been displayed. After the operator passes, or fails the test
based on the visual display of an error message, the Emulator checks the HO_AVBL signal.
When the timeout occurs, the the HO_AVBL signal should turn OFF. If the operator passes the
test based on the display of an error message, but the equipment fails to turn OFF the HO_AVBL
signal, the Emulator will fail the test. Note, this applies to E84 Emulator Application 2.2 or greater.
GCI E84 Emulator Application Users Manual
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GCI E84 Emulator Application Users Manual
Version 2.3
Active Mode Functionality Test J
Verify TP4 Timeout Error
Verify TP4 timeout error.
3.
HO_AVBL signal verified ON on equipment under test.
Failure - HO_AVBL signal is OFF on equipment under test.
Setting Load Port select signals (CS_0, CS_1) based on test configuration.
Setting VALID signal ON.
L_REQ signal verified ON on equipment under test.
Failure - L_REQ signal failed to turn ON within timeout specified (TA1).
Setting TR_REQ signal ON.
READY signal verified ON on equipment under test.
Failure - READY signal failed to turn ON within timeout specified (TA2).
Setting BUSY signal ON. Operator action required...
4.
5.
6.
7.
8.
9.
Please load an FOUP onto the Load Port associated with the E84 interface being tested.
The FOUP must be loaded before the timeout shown expires.
10.
11.
12.
Waiting for operator to load FOUP.
L_REQ signal verified OFF on equipment under test.
Failure - L_REQ signal failed to turn OFF after FOUP loaded onto Load Port.
Testing TP4 Timeout. Waiting for TP4 timeout period to expire.
TP4 Timer Test in progress. When the timeout shown decrements to zero, the Passive
Equipment under test should generate a TP4 alarm on its User Interface. If the alarm
does not occur at the appropriate time (either before, or after the timeout expires) the
timer test has failed, and the user should press the Fail Button. If the alarm does occur at
the proper time, the timer test has passed, and the user should press the Pass Button.
13.
20.
21.
TP4 timeout error verified on equipment under test User Interface.
Failure - TP4 timeout error did not occur at appropriate time (or did not occur at all).
Setting BUSY, TR_REQ, VALID and Load Port select (CS_0, CS_1) signals OFF.
TP4 Timeout Test Passed.
Passive Equipment must be reset before continuing to next test. Please verify that the
Passive Equipment is ready before proceeding.
Why we run this test
The E84 Specification defines TP4 as the maximum time between L_REQ / U_REQ OFF and
BUSY OFF (Table 8). Section 6.3 specifies that equipment should inform the operator about
handoff timeout errors. Additionally, in section A1-4.71 requires that the equipment display details
about the timeout error including: “Timer name, Timer Description and current Timer setting.”
This test will force a TP4 timeout error by advancing the handoff up to the point where the
equipment is expecting the BUSY signal to turn OFF. At this point, the Emulator locks it’s outputs
and displays a timeout dialog box. This timeout box counts down from the TP4 value set during
Test A. When the counter reaches zero, the timeout should have expired on the equipment.
Note: the operator must load a FOUP onto the Load Port within the TP3 timeout period.
The Emulator requires the operator to visually inspect the equipments GUI to verify that an
appropriate timeout error message has been displayed. After the operator passes, or fails the test
based on the visual display of an error message, the Emulator checks the HO_AVBL signal.
When the timeout occurs, the the HO_AVBL signal should turn OFF. If the operator passes the
test based on the display of an error message, but the equipment fails to turn OFF the HO_AVBL
signal, the Emulator will fail the test. Note, this applies to E84 Emulator Application 2.2 or greater.
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GCI E84 Emulator Application Users Manual
Version 2.3
Active Mode Functionality Test K
Verify TP5 Timeout Error
Verify TP5 timeout error.
3.
4.
5.
6.
7.
8.
9.
HO_AVBL signal verified ON on equipment under test.
Failure - HO_AVBL signal is OFF on equipment under test.
Setting Load Port select signals (CS_0, CS_1) based on test configuration.
Setting VALID signal ON.
L_REQ signal verified ON on equipment under test.
Failure - L_REQ signal failed to turn ON within timeout specified (TA1).
Setting TR_REQ signal ON.
READY signal verified ON on equipment under test.
Failure - READY signal failed to turn ON within timeout specified (TA2).
Setting BUSY signal ON. Operator action required...
Please load an FOUP onto the Load Port associated with the E84 interface being tested.
The FOUP must be loaded before the timeout shown expires.
10.
11.
Waiting for operator to load FOUP.
L_REQ signal verified OFF on equipment under test.
Failure - L_REQ signal failed to turn OFF after FOUP loaded onto Load Port.
12-14. Setting BUSY signal OFF, TR_REQ signal OFF, and COMPT signal ON.
15.
READY signal verified OFF on equipment under test.
Failure - READY signal failed to turn OFF within timeout specified (TA3).
16.
Testing TP5 Timeout. Waiting for TP5 timeout period to expire.
TP5 Timer Test in progress. When the timeout shown decrements to zero, the Passive
Equipment under test should generate a TP5 alarm on its User Interface. If the alarm
does not occur at the appropriate time (either before, or after the timeout expires) the
timer test has failed, and the user should press the Fail Button. If the alarm does occur at
the proper time, the timer test has passed, and the user should press the Pass Button.
17.
20.
21.
TP5 timeout error verified on equipment under test User Interface.
Failure - TP5 timeout error did not occur at appropriate time (or did not occur at all).
Setting COMPT, VALID and Load Port select (CS_0, CS_1) signals OFF.
TP5 Timeout Test Passed.
Passive Equipment must be reset before continuing to next test. Please verify that the
Passive Equipment is ready before proceeding.
Why we run this test
The E84 Specification defines TP5 as the maximum time between READY OFF and VALID OFF
(Table 8). Section 6.3 specifies that equipment should inform the operator about handoff timeout
errors. Additionally, in section A1-4.71 requires that the equipment display details about the
timeout error including: “Timer name, Timer Description and current Timer setting.”
This test will force a TP5 timeout error by advancing the handoff up to the point where the
equipment is expecting the VALID signal to turn OFF. At this point, the Emulator locks it’s outputs
and displays a timeout dialog box. This timeout box counts down from the TP5 value set during
Test A. When the counter reaches zero, the timeout should have expired on the equipment.
Note: the operator must load a FOUP onto the Load Port within the TP3 timeout period.
The Emulator requires the operator to visually inspect the equipments GUI to verify that an
appropriate timeout error message has been displayed. After the operator passes, or fails the test
based on the visual display of an error message, the Emulator checks the HO_AVBL signal.
When the timeout occurs, the the HO_AVBL signal should turn OFF. If the operator passes the
test based on the display of an error message, but the equipment fails to turn OFF the HO_AVBL
signal, the Emulator will fail the test. Note, this applies to E84 Emulator Application 2.2 or greater.
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GCI E84 Emulator Application Users Manual
Version 2.3
Active Mode Functionality Test L
Verify Access Mode Selection
Verify access mode selection.
1.
HO_AVBL signal verified ON on equipment under test. Operator action required...
Please place the equipment being tested into Manual Access Mode. This should cause
the HO_AVBL signal to turn OFF. There is no specified time limit for this action. This
window will close automatically when the E84 tester detects the HO_AVBL signal has
turned OFF.
2.
3.
Failure - HO_AVBL signal is OFF on equipment under test.
Waiting for Manual Access Mode.
1HO_AVBL signal verified OFF on equipment under test. Operator action required...
Please place the equipment being tested into Automated Access Mode. This should
cause the HO_AVBL signal to turn ON. There is no specified time limit for this action.
This window will close automatically when the E84 tester detects the HO_AVBL signal
has turned ON.
4.
5.
6.
Failure - HO_AVBL signal did not turn OFF following operator switch to manual
access mode.
Waiting for automated access mode.
HO_AVBL signal verified ON on equipment under test.
Failure - HO_AVBL signal did not turn ON following operator switch to automated
access mode.
Access Mode Test Passed.
Why we run this test
The E84 Specification requires the HO_AVBL signal be turned OFF when the equipment is in
Manual Access Mode (Table A1-6). This test requests the operator to switch the equipment into
Manual Access Mode, and monitors the HO_AVBL signal to verify that it turns OFF. After
verification, the operator is instructed to switch the equipment back to Automatic Access Mode.
The HO_AVBL signal should turn back ON.
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Active Mode Functionality Test M
Verify Port Sensors - Part 1
Verify Port Sensors tied to E84 signals - Part 1 (Placement sensor(s) activated during Load, but
Presence sensor(s) is not).
1.
2.
3.
4.
5.
6.
7.
HO_AVBL signal verified ON on equipment under test.
Failure - HO_AVBL signal is OFF on equipment under test.
Setting Load Port select signals (CS_0, CS_1) based on test configuration.
Setting VALID signal ON.
L_REQ signal verified ON on equipment under test.
Failure - L_REQ signal failed to turn ON within timeout specified (TA1).
Setting TR_REQ signal ON.
READY signal verified ON on equipment under test.
Failure - READY signal failed to turn ON within timeout specified (TA2).
Setting BUSY signal ON. Operator action required...
Please activate the Placement sensor(s) ONLY on the Load Port associated with the E84
interface being tested before the timeout shown expires. Operator must activate ALL
Placement sensor(s). Please press the Close button when finished.
8.
9.
10.
11.
12.
Waiting for operator to activate placement sensor(s) only.
L_REQ signal verified remained ON following placement sensor(s) activation. TP3
timeout expired. Verifying that HO_AVBL is OFF with timeout error.
Failure - L_REQ signal signal turned OFF following placement sensor(s) activation.
Note: False failures may occur if entered TP timer values do not match equipment
under test.
Failure - HO_AVBL signal did not turn OFF following the TP3 timeout error. The
equipment under test properly kept L_REQ ON throughout timeout period, but
should have dropped HO_AVBL when the timeout expired. Test has Failed
Setting BUSY, TR_REQ, VALID and Load Port select (CS_0, CS_1) signals OFF.
Port Sensors Test (Part 1) Passed
Why we run this test
The E84 Specification states that the HO_AVBL signal should turn OFF if the Placement Sensor
is ON, but the Presence Sensor is OFF (Table A1-6). If only one sensor is ON, then the FOUP is
not properly positioned on the Load Port.
This test simulates an improperly positioned FOUP during a load cycle. The operator is asked to
block ONLY the Placement Sensor during the load cycle. The equipment should continue to
monitor it’s TP3 timeout, and fail the handoff when that timeout expires.
The test fails if the equipment turns L_REQ OFF. L_REQ should not turn OFF until both
Placement AND Presence sensors have turned ON. The test will also fail if the equipment does
not turn the HO_AVBL signal OFF at the end of the timeout period.
The test passes if the equipment’s TP3 timeout expires, and the HO_AVBL signal turns OFF.
This indicates that the equipment requires both Placement AND Presence sensor activation on a
load cycle.
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Active Mode Functionality Test N
Verify Port Sensors - Part 2
Verify Port Sensors tied to E84 signals - Part 2 (Presence sensor(s) activated during Load, but
Placement sensor(s) is not).
1.
2.
3.
4.
5.
6.
7.
HO_AVBL signal verified ON on equipment under test.
Failure - HO_AVBL signal is OFF on equipment under test.
Setting Load Port select signals (CS_0, CS_1) based on test configuration.
Setting VALID signal ON.
L_REQ signal verified ON on equipment under test.
Failure - L_REQ signal failed to turn ON within timeout specified (TA1).
Setting TR_REQ signal ON.
READY signal verified ON on equipment under test.
Failure - READY signal failed to turn ON within timeout specified (TA2).
Setting BUSY signal ON. Operator action required...
Please activate the Presence sensor(s) ONLY on the Load Port associated with the E84
interface being tested before the timeout shown expires. Operator must activate ALL
Presence sensor(s). Please press the Close button when finished.
8.
9.
10.
11.
Waiting for operator to activate presence sensor(s) only.
L_REQ signal verified remained ON following presence sensor(s) activation. TP3 timeout
expired. Verifying that HO_AVBL is OFF with timeout error.
Failure - L_REQ signal turned OFF following presence sensor(s) activation. Note:
False failures may occur if entered TP timer values do not match equipment under
test.
Setting BUSY, TR_REQ, VALID and Load Port select (CS_0, CS_1) signals OFF.
Failure - HO_AVBL signal did not turn OFF following the TP3 timeout error. The
equipment under test properly kept L_REQ ON throughout timeout period, but
should have dropped HO_AVBL when the timeout expired. Test has Failed
Port Sensors Test (Part 2) Passed
Why we run this test
The E84 Specification states that the HO_AVBL signal should turn OFF if the Presence Sensor is
ON, but the Placement Sensor is OFF (Table A1-6). If only one sensor is ON, then the FOUP is
not properly positioned on the Load Port.
This test simulates an improperly positioned FOUP during a load cycle. The operator is asked to
block ONLY the Presence Sensor during the load cycle. The equipment should continue to
monitor it’s TP3 timeout, and fail the handoff when that timeout expires.
The test fails if the equipment turns L_REQ OFF. L_REQ should not turn OFF until both
Placement AND Presence sensors have turned ON. The test will also fail if the equipment does
not turn the HO_AVBL signal OFF at the end of the timeout period.
The test passes if the equipment’s TP3 timeout expires, and the HO_AVBL signal turns OFF.
This indicates that the equipment requires both Placement AND Presence sensor activation on a
load cycle.
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Active Mode Functionality Test O
Verify Port Sensors - Part 3
Verify Port Sensors tied to E84 signals - Part 3 (Placement sensor(s) deactivated during Unload,
but Presence sensor(s) is not).
1.
Operator action required...
Please activate ALL Placement sensor(s) and ALL Presence sensor(s) on the Load Port
associated with the E84 interface being tested. This simulates the proper placement of a
FOUP on the Load Port. There is no specified time limit for this action, but testing cannot
continue until ALL sensor(s) are activated. Please press the Close button when finished.
Note: SEMI® E87 requires that the Load Port be placed in Manual Access Mode before
loading or unloading a FOUP by hand. The Load Port being tested may issue an E87
related alarm when the Placement and Presence Sensor(s) are activated while in
Automatic Access Mode. To avoid possible E87 related alarms, please place the Load
Port in Manual Access Mode. Then activate the sensor(s). Place the Load Port back in
Automatic Access Mode before continuing with the Test.
2.
3.
4.
5.
6.
7.
8.
9.
Waiting for operator to activate both placement and presence sensor(s) on Load Port
under test.
HO_AVBL signal verified ON on equipment under test.
Failure - HO_AVBL signal is OFF on equipment under test.
Setting Load Port select signals (CS_0, CS_1) based on test configuration.
Setting VALID signal ON.
U_REQ signal verified ON on equipment under test.
Failure - U_REQ signal failed to turn ON within timeout specified (TA1).
Setting TR_REQ signal ON.
READY signal verified ON on equipment under test.
Failure - READY signal failed to turn ON within timeout specified (TA2).
Setting BUSY signal ON. Operator action required.
Please de-activate the Placement sensor(s) ONLY on the Load Port associated with the
E84 interface being tested before the timeout shown expires. Operator must de-activate
ALL Placement sensor(s). Please press the Close button when finished.
10.
11.
12.
13.
Waiting for operator to de-activate placement sensor(s) only.
U_REQ signal verified remained ON following placement sensor(s) de-activation. TP3
timeout expired. Verifying that the HO_AVBL is OFF with timeout error.
Failure - U_REQ signal turned OFF following placement sensor(s) de-activation.
Note: False failures may occur if entered TP timer values do not match equipment
under test.
Setting BUSY, TR_REQ, VALID and Load Port select (CS_0, CS_1) signals OFF.
Failure - HO_AVBL signal did not turn OFF following the TP3 timeout error. The
equipment under test properly kept U_REQ ON throughout timeout period, but
should have dropped HO_AVBL when the timeout expired.
Port Sensors Test (Part 3) Passed
Why we run this test
The E84 Specification states that the HO_AVBL signal should turn OFF if the Presence Sensor is
ON, but the Placement Sensor is OFF (Table A1-6). If only one sensor is ON, then the FOUP is
not properly positioned on the Load Port.
This test simulates a failed unload cycle, where the FOUP is not fully removed from the Load Port.
The operator is asked to de-activate ONLY the Placement Sensor during the unload cycle. The
equipment should continue to monitor it’s TP3 timeout, and fail the handoff when that timeout
expires.
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The test fails if the equipment turns U_REQ OFF. U_REQ should not turn OFF until both
Placement AND Presence sensors have turned OFF. The test will also fail if the equipment does
not turn the HO_AVBL signal OFF at the end of the timeout period.
The test passes if the equipment’s TP3 timeout expires, and the HO_AVBL signal turns OFF.
This indicates that the equipment requires both Placement AND Presence sensor clear during an
unload cycle.
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Active Mode Functionality Test P
Verify Port Sensors - Part 4
Verify Port Sensors tied to E84 signals - Part 4 (Presence sensor(s) deactivated during Unload,
but placement sensor(s) is not).
1.
Operator action required...
Please activate ALL Placement sensor(s) and ALL Presence sensor(s) on the Load Port
associated with the E84 interface being tested. This simulates the proper placement of a
FOUP on the Load Port. There is no specified time limit for this action, but testing cannot
continue until ALL sensor(s) are activated. Please press the Close button when finished.
Note: SEMI® E87 requires that the Load Port be placed in Manual Access Mode before
loading or unloading a FOUP by hand. The Load Port being tested may issue an E87
related alarm when the Placement and Presence Sensor(s) are activated while in
Automatic Access Mode. To avoid possible E87 related alarms, please place the Load
Port in Manual Access Mode. Then activate the sensor(s). Place the Load Port back in
Automatic Access Mode before continuing with the Test.
2.
3.
4.
5.
6.
7.
8.
9.
Waiting for operator to activate both placement and presence sensor(s) on Load Port
under test.
HO_AVBL signal verified ON on equipment under test.
Failure - U_REQ signal turned OFF following placement sensor(s) de-activation.
Setting Load Port select signals (CS_0, CS_1) based on test configuration.
Setting VALID signal ON.
U_REQ signal verified ON on equipment under test.
Failure - U_REQ signal failed to turn ON within timeout specified (TA1).
Setting TR_REQ signal ON.
READY signal verified ON on equipment under test.
Failure - READY signal failed to turn ON within timeout specified (TA2).
Setting BUSY signal ON. Operator action required.
Please de-activate the Presence sensor(s) ONLY on the Load Port associated with the
E84 interface being tested before the timeout shown expires. Operator must de-activate
ALL Presence sensor(s). Please press the Close button when finished.
10.
11.
12.
13.
Waiting for operator to de-activate presence sensor(s) only.
U_REQ signal verified remained ON following presence sensor(s) de-activation. TP3
timeout expired. Verifying that the HO_AVBL is OFF with timeout error.
Failure - U_REQ signal turned OFF following presence sensor(s) de-activation.
Note: False failures may occur if entered TP timer values do not match equipment
under test.
Setting BUSY, TR_REQ, VALID and Load Port select (CS_0, CS_1) signals OFF.
Failure - HO_AVBL signal did not turn OFF following the TP3 timeout error. The
equipment under test properly kept U_REQ ON throughout timeout period, but
should have dropped HO_AVBL when the timeout expired.
Port Sensors Test (Part 3) Passed
Why we run this test
The E84 Specification states that the HO_AVBL signal should turn OFF if the Placement Sensor
is ON, but the Presence Sensor is OFF (Table A1-6). If only one sensor is ON, then the FOUP is
not properly positioned on the Load Port.
This test simulates a failed unload cycle, where the FOUP is not fully removed from the Load Port.
The operator is asked to de-activate ONLY the Placement Sensor during the unload cycle. The
equipment should continue to monitor it’s TP3 timeout, and fail the handoff when that timeout
expires.
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The test fails if the equipment turns U_REQ OFF. U_REQ should not turn OFF until both
Placement AND Presence sensors have turned OFF. The test will also fail if the equipment does
not turn the HO_AVBL signal OFF at the end of the timeout period.
The test passes if the equipment’s TP3 timeout expires, and the HO_AVBL signal turns OFF.
This indicates that the equipment requires both Placement AND Presence sensor clear during an
unload cycle.
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Active Mode Functionality Test Q
Verify Emergency Stop
Verify Emergency Stop operation.
1.
Operator action required...
Please load an FOUP onto the Load Port associated with the E84 Interface being tested.
There is no specified time limit for this action, but testing cannot continue until FOUP is
loaded. Please press the Close button when finished.
Note: SEMI® E87 requires that the Load Port be placed in Manual Access Mode before
loading or unloading a FOUP by hand. To avoid possible E87 related alarms, please
place the Load Port in Manual Access Mode. Then load a FOUP. Place the Load Port
back in Automatic Access Mode before continuing with the Test.
2.
3.
4.
5.
6.
7.
8.
9.
Waiting for operator to load FOUP.
HO_AVBL signal verified ON on equipment under test.
Failure - HO_AVBL signal is OFF on equipment under test.
Setting Load Port select signals (CS_0, CS_1) based on test configuration.
Setting VALID signal ON.
U_REQ signal verified ON on equipment under test.
Failure - U_REQ signal failed to turn ON within timeout specified (TA1).
Setting TR_REQ signal ON.
READY signal verified ON on equipment under test.
Failure - READY signal failed to turn ON within timeout specified (TA2).
Setting BUSY signal ON. Operator action required...
Please press the equipments Emergency Stop (E-Stop) button before the timeout shown expires.
This should turn the ES signal OFF.
10.
11.
12.
13.
Waiting for operator to press E-Stop button.
ES signal verified OFF on equipment under test.
Failure - ES signal failed to turn OFF within timeout specified (TP3).
Setting BUSY, TR_REQ, VALID and Load Port select (CS_0, CS_1) signals OFF.
Failure - ES signal failed to stay OFF following 500 mSec debounce period.
E-Stop condition must be cleared on equipment under test. Operator action required...
Please clear the E-Stop condition on the equipment being tested. This should turn the ES
signal ON. There is no specified time limit for this action.
14.
15.
16.
Waiting for operator to clear the E-Stop condition.
ES signal verified ON on equipment under test.
Failure - ES signal failed to turn ON after E-Stop condition cleared by operator.
E-Stop Test Passed.
Why we run this test
The E84 Specification states that the ES signal should turn OFF when the equipment detects a
hazardous situation (Table 1). It can also turn OFF when the equipments EMO button is pressed.
This test verifies that the equipment properly turns the ES signal OFF when the EMO is pressed.
The operator is asked to press the EMO button during an unload cycle. The equipment should
turn the ES signal OFF. The operator is then asked to release the EMO. The ES signal should
turn back ON.
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Passive Mode Test Plan
Passive Mode testing includes both Static and Functionality tests. Static tests verify interface plug location
and labeling, along with documentation issues. Functionality tests verify that the equipment under test
adheres to the E84 handshaking specification. This section describes the pre-defined, Passive Mode
tests supplied by the E84 Emulator.
Static tests are described by the tests title. Functionality tests are described by the tests title, along with
detailed information about the steps required to complete the test.
During Passive Mode Functionality testing, the E84 Emulator uses TA timer settings to verify timing
critical sections of the load/unload sequences. Passive Mode Functionality Test A allows the user to enter
the TA settings of the equipment under test. If Passive Mode Functionality Test A is not selected to run,
the E84 Emulator reverts the TA timer values to the defaults defined by the E84 Specification.
It is critical that the TA timer values used by the E84 Emulator match those in use by the equipment under
test. If the values differ, false test failures may occur. If Passive Mode Functionality Test A is not
selected, the following warning message is displayed before automated testing begins.
You have not selected Functionality Test A, which allows you to enter the current TA timer values
for the equipment under test. These values are used for timing various steps during Passive Mode
testing. If the timer settings don't match, test results may be invalid.
If you do not enter the current values, the TA settings will revert to the defaults listed in the E84
Specification:
TA1 = 2 Seconds
TA2 = 2 Seconds
TA3 = 2 Seconds
Press "Yes" to run Functionality Test A.
Press "No" to test using the E84 default settings.
Press "Cancel" to abort testing.
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Passive Mode Static Tests
There are three Passive Mode Static tests. These tests verify the following:
•
•
•
Proper labeling of DB-25 male E84 plug.
Proper location of DB-25 male E84 plug.
Existence of documented E84 recovery procedures.
Passive Mode Static Test A
Verify labeled DB-25 male E84 plug exists
Is a labeled DB-25 male E84 plug (as specified in ISO 2110:1989) present for each Load Port that
is part of the test set-up? Note: this test applies to hardwired applications only.
Why we run this test
This test applies to hardwired applications only. For applications using optical transceivers, the
AMHS connector is not covered by the E84 Specification.
Section 6.4 of the E84 Specification requires that the passive equipment supply a female DB-25
connector for the E84 interface. The specification does not define the type of connector supplied
by the active equipment. It is industry standard to use a male DB-25 connector. This connector
must also comply with all electrical and pin assignments defined by the Specification. The
Emulator verifies I/O pin assignments during each test in the functional test suite. Functional test
B verifies the pin assignment for supply voltage. The Emulator does not verify I/O electrical
specifications. Signals are considered OFF if their voltage level is greater than 1.8 VDC. Signals
are considered ON if their voltage level drops below 1.8 VDC. Use the GCI Handheld Tester for
thorough electrical specification testing.
This test is a visual examination by the operator to verify that the AMHS provides a male DB-25
connector. The operator is required to manually pass or fail this test.
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Passive Mode Static Test B
Verify proper plug location
Are the male AMHS plug ends located so they can easily connect to a female equipment plug
interface within the zones defined in Figure 1? Note: this test applies to hardwired applications
only.
Figure 1 - E84 Plug Locations
Why we run this test
Application note A1 of the E84 Specification (section A1-1.1) defines a zone on the process
equipment where the E84 interface connector should be placed. It also indicates that for
hardwired applications, the AMHS should provide a male connector that is easily reached from
this zone.
This test is a visual examination by the operator to verify that the E84 interface connector is
located near the correct zone. The operator is required to manually pass or fail this test.
Passive Mode Static Test C
Verify Documented Recovery Procedures Exist
Do documented E84 recovery procedures exist?
Why we run this test
The E84 Specification recommends (in section 6.3.3.1) that recovery procedures be provided on
the active equipment.
This test is a visual examination by the operator to verify that proper recovery procedures exist.
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Passive Mode Functionality Tests
There are 15 Passive Mode, Functionality tests. These tests verify that the equipment under test adheres
to the E84 interface specification under the following conditions:
•
•
•
•
•
•
•
•
•
•
•
User configurable active equipment timers.
+24 Volts Full Load and No Load voltage test.
Load Sequence.
Unload Sequence.
Handoff available 1.
Handoff available 2.
Handoff available 3.
Emergency Stop operation (Load).
Emergency Stop operation (Unload).
TA1 - TA3 Timeout.
WIPS Jeopardy Test 1 - 3.
Passive Mode Functionality Test A
Verify Configurable Active Equipment Timers
Verify that the Active Equipment timers (TA1 - TA3) are configurable within specified range
(between 1 and 999 seconds). Note Default Settings.
1.
2.
3.
Operator action required...
Waiting for operator to enter TA timer
settings.
This test Passes if all TA timers can be
configured between 1 and 999 seconds.
Please mark test Results before
continuing.
Why we run this test
Section 6.3.2.1 of the E84 Specification requires
that interlock timeout values be user
programmable. The active equipment uses
three different timeout (TA1 - TA3) values for
normal E84 hand-offs.
Default TA Timer Entry Screen
The Emulator uses the values of the active equipments interlock timeouts during functional
testing. The operator is asked to verify that the timeout settings are user programmable through
the equipments user interface. The current settings are entered into a dialog box so the Emulator
can reference them in other functional tests.
After entering the three timeout values, the Emulator will automatically set the test results to
‘Pass’. If the AMHS does not properly allow the timeouts to be modified, or if the allowable range
for each timeout is not valid, the operator should manually fail the test.
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Passive Mode Functionality Test B
Verify Full Load / No Load Voltage
Verify for hard wired implementation the voltage provided by the equipment under test is within the
range specified in E84 under Full Load [100mA] and No Load [<2mA].
1.
2.
3.
4.
5.
6.
7.
8.
No Load Voltage Pre-Check
No Load Voltage Pre-Check Verified. Testing Full Load Voltage.
Failure - Voltage not detected, or is below 18Vdc. Verify cable connection.
Full Load Voltage verified greater than or equal to 18Vdc.
Failure - Full Load Voltage is less than 18Vdc.
Full Load Voltage verified less than or equal to 30Vdc.
Failure - Full Load Voltage is greater than 30Vdc.
Testing No Load Voltage.
No Load Voltage verified greater than or equal to 18Vdc.
Failure - No Load Voltage is less than 18Vdc.
No Load Voltage verified less than or equal to 30Vdc.
Failure - No Load Voltage is greater than 30Vdc.
Voltage Test Passed.
Why we run this test
Figure 36 of the E84 Specification defines the pin assignment for Power and Power COM on the
active equipment’s E84 interface connector be on pins 22 and 25 respectively. Additionally, in
section 6.4.2.1 the Specification defines that the power supply voltage be +24 VDC Nominal, with
a minimum of +18 VDC and a maximum of +30 VDC (for both no load and full load of 100 mA).
This test verifies that the Load Port is supplying +24 VDC on pin 22, referenced to pin 25. No
operator interaction is required for this test.
This test is only valid for hardwired applications. When testing with an attached Optical
Transceiver, this test will always pass, but will not actually test the active equipment power
supply pins.
The Optical Transceiver connects to the Emulators female DB-25 connector. The Emulator
supplies +24 VDC to the attached Optical Transceiver through pin 23 of this female connector.
The E84 Specification defines (Figure 32) that the Optical Transceiver tie pins 22 and 23
together. This brings the Emulator supplied +24 VDC back on pin 22 of the female connector,
which is the pin that the active equipment normally supplies voltage on.
When running the voltage test through an attached Optical Transceiver, the Emulator will end
up verifying it’s own +24 VDC supply voltage.
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Passive Mode Functionality Test C
Verify Single Handoff Load Sequence
Verify single handoff sequence for Loading.
See Figure 2 for example signal timing diagram.
1.
Setting HO_AVBL and ES signals ON.
Issue an E84 based AMHS move command
(load).
2.
Waiting for Load Port select signals
(CS_0, CS_1) from AMHS equipment
under test.
Failure - VALID signal turned ON
before Load Port select signals
Figure 2 - Single Handoff (Load) Signal Timing
(CS_0, CS_1) were configured.
Diagram
Waiting for VALID signal ON from
AMHS equipment under test.
Setting L_REQ signal ON.
TR_REQ signal verified ON on AMHS equipment under test.
Failure - TR_REQ signal failed to turn ON within timeout specified (TP1).
Setting READY signal ON.
BUSY signal verified ON on AMHS equipment under test.
Failure - BUSY signal failed to turn ON within timeout specified (TP2).
Waiting for AMHS equipment to deliver the FOUP...
3.
4.
5.
6.
7.
8.
Waiting for FOUP to be loaded. The AMHS equipment should be delivering the FOUP.
The AMHS equipment should place the FOUP onto the "Load Port" before the timeout
shown below expires. Please press the PASS button if the FOUP is loaded within the
timeout period. Press the FAIL button if the FOUP is not loaded successfully.
10.
12.
13.
14.
15.
16.
17.
18.
19.
FOUP load successful. Setting L_REQ signal OFF.
Failure - Operator indicated that the AMHS failed to load the FOUP properly within
timeout specified (TP3 ).
BUSY signal verified OFF,
Failure - BUSY signal failed to turn OFF within timeout specified (TP4).
TR_REQ signal verified OFF,
Failure - TR_REQ signal failed to turn OFF within timeout specified (TP4).
COMPT signal verified ON on AMHS equipment under test.
Failure - COMPT signal failed to turn ON within timeout specified (TP4).
Setting READY signal OFF.
COMPT signal verified OFF,
Failure - COMPT signal failed to turn OFF within timeout specified (TP5).
VALID signal verified OFF on AMHS equipment under test.
Failure - VALID signal failed to turn OFF within timeout specified (TP5).
Load Port select signals (CS_0, CS_1) verified OFF on AMHS equipment under test.
Failure - Load Port select signals (CS_0, CS_1) failed to turn OFF within timeout
specified (TP5).
Load Test Passed.
Why we run this test
The E84 Specification defines (in section 6.2.4) a specific sequence of signal state changes that
must be followed to process an automatic E84 load cycle. This test runs the Passive side of that
defined sequence, and verifies that the AMHS being tested properly follows the Active side. This
test requires the operator to indicate when the AMHS has loaded the FOUP onto the dummy Load
Port.
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Passive Mode Functionality Test D
Verify Single Handoff Unload Sequence
Verify single handoff sequence for Unloading.
1.
Setting HO_AVBL and ES signals ON.
Issue an E84 based AMHS move command
(unload).
2.
3.
4.
5.
6.
7.
8.
Waiting for Load Port select signals
(CS_0, CS_1) from AMHS equipment
under test.
Failure - VALID signal turned ON
before Load Port select signals
(CS_0, CS_1) were configured.
Figure 3 - Single Handoff (Unload) Signal Timing
Waiting for VALID signal ON from AMHS Diagram
equipment under test.
Setting U_REQ signal ON.
TR_REQ signal verified ON on AMHS equipment under test.
Failure - TR_REQ signal failed to turn ON within timeout specified (TP1).
Setting READY signal ON.
BUSY signal verified ON on AMHS equipment under test.
Failure - BUSY signal failed to turn ON within timeout specified (TP2).
Waiting for AMHS equipment to unload the FOUP...
Waiting for FOUP to be unloaded. The AMHS equipment should be unloading the FOUP.
The AMHS equipment should remove the FOUP from the "Load Port" before the timeout
shown below expires. Please press the PASS button if the FOUP is unloaded within the
timeout period. Press the FAIL button if the FOUP is not unloaded successfully.
10.
12.
13.
14.
15.
16.
17.
18.
19.
FOUP unloaded successfully. Setting U_REQ signal OFF.
Failure - Operator indicated that the AMHS failed to unload the FOUP properly
within timeout specified (TP3).
BUSY signal verified OFF,
Failure - BUSY signal failed to turn OFF within timeout specified (TP4).
TR_REQ signal verified OFF,
Failure - TR_REQ signal failed to turn OFF within timeout specified (TP4).
COMPT signal verified ON on AMHS equipment under test.
Failure - COMPT signal failed to turn ON within timeout specified (TP4).
Setting READY signal OFF.
COMPT signal verified OFF,
Failure - COMPT signal failed to turn OFF within timeout specified (TP5).
VALID signal verified OFF on AMHS equipment under test.
Failure - VALID signal failed to turn OFF within timeout specified (TP5).
Load Port select signals (CS_0, CS_1) verified OFF on AMHS equipment under test.
Failure - Load Port select signals (CS_0, CS_1) failed to turn OFF within timeout
specified (TP5).
Unload Test Passed.
Why we run this test
The E84 Specification defines (in section 6.2.4) a specific sequence of signal state changes that
must be followed to process an automatic E84 unload cycle. This test runs the Passive side of
that defined sequence, and verifies that the AMHS being tested properly follows the Active side.
This test requires the operator indicate when the AMHS has removed the FOUP from the dummy
Load Port.
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Passive Mode Functionality Test E
Verify Handoff Available Sequence 1
Verify handoff available sequence 1.
1.
Setting HO_AVBL and ES signals ON.
Issue an E84 based AMHS move command
(load or unload).
2.
3.
4.
5.
6.
7.
8.
Waiting for Load Port select signals
(CS_0, CS_1) from AMHS equipment
under test.
Failure - VALID signal turned ON
before Load Port select signals
(CS_0, CS_1) were configured.
Figure 4 - Handoff Available Signal Timing
Waiting for VALID signal ON from
Diagram
AMHS equipment under test.
Setting HO_AVBL signal OFF.
VALID signal verified OFF on AMHS equipment under test.
Failure - VALID signal did not turn OFF following drop of HO_AVBL signal.
Load Port select signals (CS_0, CS_1) verified OFF on AMHS equipment under test.
Failure - Load Port select signals (CS_0, CS_1) did not turn OFF following drop of
HO_AVBL signal.
Setting HO_AVBL signal ON.
Handoff Available 1 Test Passed.
Why we run this test
The E84 Specification states that the active equipment must monitor the HO_AVBL signal (in
section 6.2.7.1). When the HO_AVBL signal turns OFF, the active equipment should terminate
the handoff, and drop it’s VALID signal.
This test simulates an error condition on the Load Port by dropping the HO_AVBL signal after the
AMHS has turned the VALID signal ON (Figure 21). The AMHS should detect HO_AVBL is OFF,
and terminate the handoff.
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Passive Mode Functionality Test F
Verify Handoff Available Sequence 2
Verify handoff available sequence 2.
1.
Setting HO_AVBL signal OFF, ES signal ON.
Issue an E84 based AMHS move command (load or unload).
Verify that the AMHS equipment arrives at the Load Port and errors out.
Press PASS if the AMHS equipment arrives at the Load Port and displays an error. Press
FAIL if the AMHS equipment does not arrive, or does not error out.
2.
3.
4.
5.
Waiting for AMHS...
AMHS arrival and error display verified.
Failure - Operator indicates AMHS did not arrive at Load Port, or did not issue an
error.
Setting HO_AVBL signal ON.
Handoff Available 2 Test Passed.
Why we run this test
The E84 Specification states that the active equipment must monitor the HO_AVBL signal (in
section 6.2.7.1). When the HO_AVBL signal turns OFF, the active equipment should terminate
the handoff, and drop it’s VALID signal.
This test simulates an error condition on the Load Port prior to the arrival of the AMHS (Figure 22).
When the AMHS arrives, it should detect HO_AVBL is OFF, and not initiate a handoff.
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Passive Mode Functionality Test G
Verify Handoff Available Sequence 3
Verify handoff available sequence 3.
1.
Setting HO_AVBL and ES signals ON.
Issue an E84 based AMHS move command
(load)
2.
3.
4.
5.
6.
7.
8.
9.
10.
11.
12.
Waiting for Load Port select signals
(CS_0, CS_1) from AMHS equipment
under test.
Failure - VALID signal turned ON
before Load Port select signals
Figure 5 - Handoff Available Signal Timing
(CS_0, CS_1) were configured.
Diagram
Waiting for VALID signal ON from
AMHS equipment under test.
Setting L_REQ signal ON.
TR_REQ signal verified ON on AMHS equipment under test.
Failure - TR_REQ signal failed to turn ON within timeout specified (TP1).
Setting HO_AVBL signal OFF.
VALID signal verified OFF,
Failure - VALID signal did not turn OFF following drop of HO_AVBL signal.
TR_REQ signal verified OFF on AMHS equipment under test.
Failure - TR_REQ signal did not turn OFF following drop of HO_AVBL signal.
Load Port select signals (CS_0, CS_1) verified OFF on AMHS equipment under test.
Failure - Load Port select signals (CS_0, CS_1) did not turn OFF following drop of
HO_AVBL signal.
Setting L_REQ signal OFF.
Setting HO_AVBL signal ON.
Handoff Available 3 Test Passed.
Why we run this test
The E84 Specification states that the active equipment must monitor the HO_AVBL signal (in
section 6.2.7.1). When the HO_AVBL signal turns OFF, the active equipment should terminate
the handoff, and drop it’s VALID signal.
This test simulates an error condition on the Load Port by dropping the HO_AVBL signal after the
AMHS has turned the TR_REQ signal ON (Figure 24). The AMHS should detect HO_AVBL is
OFF, and terminate the handoff.
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Passive Mode Functionality Test H
Verify TA1 Timeout Error
Verify TA1 timeout error.
1.
Setting HO_AVBL and ES signals ON.
Issue an E84 based AMHS move command (load)
2.
3.
4.
Waiting for Load Port select signals (CS_0, CS_1) from AMHS equipment under test.
Failure - VALID signal turned ON before Load Port select signals (CS_0, CS_1) were
configured.
Waiting for VALID signal ON from AMHS equipment under test.
Testing TA1 Timeout. Waiting for TA1 timeout period to expire.
TA1 Timer Test in progress. When the timeout shown decrements to zero, the AMHS
equipment under test should generate a TA1 alarm on its User Interface. If the alarm does
not occur at the appropriate time (either before, or after the timeout expires) the timer test
has failed, and the user should press the Fail Button. If the alarm does occur at the proper
time, the timer test has passed, and the user should press the Pass Button.
5.
7.
TA1 timeout error verified on AMHS equipment under test User Interface.
Failure - TA1 timeout error did not occur at appropriate time (or did not occur at all).
TA1 Timeout Test Passed.
AMHS Equipment must be reset before continuing to next test. Please verify that the
AMHS Equipment is ready before proceeding.
Why we run this test
The E84 Specification defines TA1 as the maximum time between VALD ON and
L_REQ / U_REQ ON (Table 7).
This test will force a TA1 timeout error by advancing the handoff up to the point
where the AMHS is expecting the L_REQ signal to turn ON. At this point, the
Emulator locks it’s outputs and displays a timeout dialog box. This timeout box
counts down from the TA1 value set during Test A. When the counter reaches
zero, the AMHS should timeout, and terminate the handoff.
The Emulator requires the operator to visually inspect the AMHS GUI to verify
that an appropriate timeout error has occurred.
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Passive Mode Functionality Test I
Verify TA2 Timeout Error
Verify TA2 timeout error.
1.
Setting HO_AVBL and ES signals ON.
Issue an E84 based AMHS move command (load)
2.
3.
4.
5.
6.
Waiting for Load Port select signals (CS_0, CS_1) from AMHS equipment under test.
Failure - VALID signal turned ON before Load Port select signals (CS_0, CS_1) were
configured.
Waiting for VALID signal ON from AMHS equipment under test.
Setting L_REQ signal ON.
TR_REQ signal verified ON on AMHS equipment under test.
Failure - TR_REQ signal failed to turn ON within timeout specified (TP1).
Testing TA2 Timeout. Waiting for TA2 timeout period to expire.
TA2 Timer Test in progress. When the timeout shown decrements to zero, the AMHS
equipment under test should generate a TA2 alarm on its User Interface. If the alarm does
not occur at the appropriate time (either before, or after the timeout expires) the timer test
has failed, and the user should press the Fail Button. If the alarm does occur at the proper
time, the timer test has passed, and the user should press the Pass Button.
7.
8.
9.
TA2 timeout error verified on AMHS equipment under test User Interface.
Failure - TA2 timeout error did not occur at appropriate time (or did not occur at all).
Setting L_REQ signal OFF.
TA2 Timeout Test Passed.
AMHS Equipment must be reset before continuing to next test. Please verify that the
AMHS Equipment is ready before proceeding.
Why we run this test
The E84 Specification defines TA2 as the maximum time between TR_REQ ON and READY ON
(Table 7).
This test will force a TA2 timeout error by advancing the handoff up to the point where the AMHS
is expecting the READY signal to turn ON. At this point, the Emulator locks it’s outputs and
displays a timeout dialog box. This timeout box counts down from the TA2 value set during Test
A. When the counter reaches zero, the AMHS should timeout, and terminate the handoff.
The Emulator requires the operator to visually inspect the AMHS GUI to verify that an appropriate
timeout error has occurred.
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Passive Mode Functionality Test J
Verify TA3 Timeout Error
Verify TA3 timeout error.
1.
Setting HO_AVBL and ES signals ON.
Issue an E84 based AMHS move command (load)
2.
Waiting for Load Port select signals (CS_0, CS_1) from AMHS equipment under test.
Failure - VALID signal turned ON before Load Port select signals (CS_0, CS_1) were
configured.
Waiting for VALID signal ON from AMHS equipment under test.
Setting L_REQ signal ON.
TR_REQ signal verified ON on AMHS equipment under test.
Failure - TR_REQ signal failed to turn ON within timeout specified (TP1).
Setting READY signal ON.
BUSY signal verified ON on the AMHS equipment under test.
Failure - BUSY signal failed to turn ON within timeout specified (TP2).
Waiting for AMHS equipment to deliver the FOUP...
3.
4.
5.
6.
7.
8.
Waiting for FOUP to be loaded. The AMHS equipment should be delivering the FOUP.
The AMHS equipment should place the FOUP onto the "Load Port" before the timeout
shown below expires. Please press the PASS button if the FOUP is loaded within the
timeout period. Press the FAIL button if the FOUP is not loaded successfully.
10.
12.
13.
14.
15.
16.
FOUP load successful. Setting L_REQ signal OFF.
Failure - Operator indicated that the AMHS failed to load the FOUP properly within
timeout specified (TP3 ).
BUSY signal verified OFF,
Failure - BUSY signal failed to turn OFF within timeout specified (TP4).
TR_REQ signal verified OFF,
Failure - TR_REQ signal failed to turn OFF within timeout specified (TP4).
COMPT signal verified ON on AMHS equipment under test.
Failure - COMPT signal failed to turn ON within timeout specified (TP4).
Testing TA3 Timeout.
Waiting for TA3 timeout period to expire.
TA3 Timer Test in progress. When the timeout shown decrements to zero, the AMHS
equipment under test should generate a TA3 alarm on its User Interface. If the alarm does
not occur at the appropriate time (either before, or after the timeout expires) the timer test
has failed, and the user should press the Fail Button. If the alarm does occur at the proper
time, the timer test has passed, and the user should press the Pass Button.
17.
18.
19.
TA3 timeout error verified on AMHS equipment under test User Interface.
Failure - TA3 timeout error did not occur at appropriate time (or did not occur at all).
Setting READY signal OFF.
TA3 Timeout Test Passed.
AMHS Equipment must be reset before continuing to next test. Please verify that the
AMHS Equipment is ready before proceeding.
Why we run this test
The E84 Specification defines TA3 as the maximum time between COMPT ON and READY OFF
(Table 7).
This test will force a TA3 timeout error by advancing the handoff up to the point where the AMHS
is expecting the READY signal to turn OFF. At this point, the Emulator locks it’s outputs and
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displays a timeout dialog box. This timeout box counts down from the TA3 value set during Test
A. When the counter reaches zero, the AMHS should timeout, and terminate the handoff.
The Emulator requires the operator to visually inspect the AMHS GUI to verify that an appropriate
timeout error has occurred.
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Passive Mode Functionality Test K
WIPS Jeopardy Test 1 (L_REQ stays ON)
WIPS Jeopardy Test 1 - L_REQ stays ON.
1.
Setting HO_AVBL and ES signals ON.
Issue an E84 based AMHS move command (load)
2.
3.
4.
5.
6.
7.
8.
Waiting for Load Port select signals (CS_0, CS_1) from AMHS equipment under test.
Failure - VALID signal turned ON before Load Port select signals (CS_0, CS_1) were
configured.
Waiting for VALID signal ON from AMHS equipment under test.
Setting L_REQ signal ON.
TR_REQ signal verified ON on AMHS equipment under test.
Failure - TR_REQ signal failed to turn ON within timeout specified (TP1).
Setting READY signal ON.
BUSY signal verified ON on the AMHS equipment under test.
Failure - BUSY signal failed to turn ON within timeout specified (TP2).
Waiting for AMHS OHV to lower the FOUP onto the Load Port.
Waiting for FOUP to be loaded. The AMHS OHV should be lowering the FOUP. The
AMHS should place the FOUP onto the "Load Port" before the timeout shown below
expires. The AMHS should not release the FOUP, because the E84 Emulator has not
turned the L_REQ signal OFF. This simulates a misplaced FOUP on the Load Port.
Please press the PASS button if the AMHS OHV grippers fully support the FOUP. Press
the FAIL button if the AMHS OHV releases the FOUP onto the "Load Port".
10.
11.
AMHS OHV properly supporting FOUP.
Failure - Operator indicated that the AMHS OHV released the FOUP before the
L_REQ signal is turned OFF.
WIP Jeopardy Test Passed.
Why we run this test
The E84 Specification defines the relationship between the L_REQ signal and the release of the
FOUP by the AMHS during a load cycle (A1-4.6.1.1). The L_REQ signal turns OFF to indicate
that the FOUP has been properly loaded onto the Load Port. The AMHS should not release the
FOUP until the L_REQ signal turns OFF.
This test simulates a misplaced FOUP delivery by holding L_REQ ON throughout the TP3 timeout
period. The operator is asked to verify that the AMHS fully supports the FOUP throughout this
timeout period.
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Passive Mode Functionality Test L
WIPS Jeopardy Test 2 (L_REQ turns OFF early)
WIPS Jeopardy Test 2 - L_REQ turns OFF early.
1.
Setting HO_AVBL and ES signals ON.
Issue an E84 based AMHS move command (load)
2.
3.
4.
5.
6.
7.
8.
Waiting for Load Port select signals (CS_0, CS_1) from AMHS equipment under test.
Failure - VALID signal turned ON before Load Port select signals (CS_0, CS_1) were
configured.
Waiting for VALID signal ON from AMHS equipment under test.
Setting L_REQ signal ON.
TR_REQ signal verified ON on AMHS equipment under test.
Failure - TR_REQ signal failed to turn ON within timeout specified (TP1).
Setting READY signal ON.
BUSY signal verified ON on the AMHS equipment under test.
Failure - BUSY signal failed to turn ON within timeout specified (TP2).
Setting L_REQ signal OFF to simulate loadport obstruction.
Waiting for FOUP to be loaded. The AMHS OHV should be lowering the FOUP. Before
the FOUP is placed onto the "Load Port" the E84 Emulator has turned the L_REQ signal
OFF early. This simulates an obstruction on the Load Port during the load. The AMHS
OHV should not release the FOUP.
Please press the PASS button if the AMHS OHV grippers fully support the FOUP. Press
the FAIL button if the AMHS OHV releases the FOUP onto the "Load Port".
10.
11.
AMHS OHV properly supporting FOUP.
Failure - Operator indicated that the AMHS OHV released the FOUP before the
L_REQ signal is turned OFF.
WIP Jeopardy Test 2 Passed.
Why we run this test
The E84 Specification defines does not address the situation where the Load Port determines that
an obstruction occurs during the physical handoff portion of a load cycle. Typically, the Load Port
would drop HO_AVBL when it determines a problem with the load cycle. The E84 Specification
does not require the AMHS to monitor HO_AVBL during the physical handoff. The AMHS must
verify HO_AVBL up to the point where READY turns ON. Once the physical handoff begins (with
BUSY turning ON) the AMHS is not required to monitor HO_AVBL.
To handle this situation, some Load Port manufacturers have chosen to drop the L_REQ signal as
soon as the obstruction is detected, before the FOUP approaches the Presence and Placement
sensors. Many AMHS manufacturers treat L_REQ turning OFF prematurely as an error condition.
This test simulates this situation by dropping L_REQ as soon as BUSY turns ON. The AMHS
should abort the handoff, without releasing the FOUP.
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Passive Mode Functionality Test M
WIPS Jeopardy Test 3 (U_REQ stays ON)
WIPS Jeopardy Test 3 - U_REQ stays ON.
1.
Setting HO_AVBL and ES signals ON.
Issue an E84 based AMHS move command (unload)
2.
3.
4.
5.
6.
7.
8.
Waiting for Load Port select signals (CS_0, CS_1) from AMHS equipment under test.
Failure - VALID signal turned ON before Load Port select signals (CS_0, CS_1) were
configured.
Waiting for VALID signal ON from AMHS equipment under test.
Setting U_REQ signal ON.
TR_REQ signal verified ON on AMHS equipment under test.
Failure - TR_REQ signal failed to turn ON within timeout specified (TP1).
Setting READY signal ON.
BUSY signal verified ON on the AMHS equipment under test.
Failure - BUSY signal failed to turn ON within timeout specified (TP2).
Waiting for AMHS OHV to lower to the Load Port.
Waiting for AMHS OHV to lower the gripper and pick up the FOUP. The AMHS
equipment should lower the gripper and unload the FOUP before the timeout shown
below expires. The AMHS OHV should grip the FOUP, but abort the handoff when the
unload movement completes with the U_REQ signal still ON.
Please press the PASS button if the AMHS OHV grippers fully support the FOUP. Press
the FAIL button if the AMHS OHV releases the FOUP onto the "Load Port".
10.
11.
AMHS OHV properly supporting FOUP.
Failure - Operator indicated that the AMHS OHV released the FOUP before the
U_REQ signal is turned OFF.
WIP Jeopardy Test 3 Passed.
Why we run this test
This test simulates the condition where the Load Port does not see the FOUP being properly
removed during an unload cycle. If the AMHS sensors indicate that the unload was successful,
but the Load Port does not drop it’s U_REQ signal, the handoff must be aborted.
The E84 Specification indicates (A1-4.6.1.1) that the AMHS should ensure that the carrier is safely
and securely contained aboard the vehicle, and if possible, continue to it’s destination. Typically
the OHT will not stop part way up, waiting for the U_REQ to turn OFF. Instead, the AMHS should
verify that U_REQ is OFF after the unload movement is complete, and continue or abort the
handoff at that time.
This test simulates this situation, and asks the operator to verify that the AMHS fully supports the
FOUP following the unload attempt.
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Passive Mode Functionality Test N
Verify Emergency Stop 1 (Load Sequence)
Verify Emergency Stop Test 1 - Load Sequence.
1.
Setting HO_AVBL and ES signals ON.
Issue an E84 based AMHS move command (load).
2.
3.
4.
5.
6.
7.
8.
Waiting for Load Port select signals (CS_0, CS_1) from AMHS equipment under test.
Failure - VALID signal turned ON before Load Port select signals (CS_0, CS_1) were
configured.
Waiting for VALID signal ON from AMHS equipment under test.
Setting L_REQ signal ON.
TR_REQ signal verified ON on AMHS equipment under test.
Failure - TR_REQ signal failed to turn ON within timeout specified (TP1).
Setting READY signal ON.
BUSY signal verified ON on the AMHS equipment under test.
Failure - BUSY signal failed to turn ON within timeout specified (TP2).
Turning ES and HO_AVBL signals OFF to simulate E-Stop button press.
E-Stop condition simulated. The AMHS equipment should immediately stop all motion.
Press the PASS button if the AMHS has stopped all motion. Press the FAIL button if the
AMHS continued with the load cycle.
9.
10.
11.
12.
Waiting for operator input...
Verified that all AMHS equipment motion has stopped.
Failure - AMHS equipment continued with load cycle following ES signal OFF.
Setting HO_AVBL and ES signals ON.
E-Stop Test 1 Passed.
Why we run this test
The E84 Specification defines the ES signal (Table 1) as a request to stop active equpment
activity immediately. The Load Port uses this signal to inform the active equipment of a
hazardous situation, where harm may be caused to material, product, or operation.
This test simulates a hazardous situation by dropping the ES signal in the middle of a load cycle.
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Passive Mode Functionality Test O
Verify Emergency Stop 2 (Unload Sequence)
Verify Emergency Stop Test 2 - Unload Sequence
1.
Setting HO_AVBL and ES signals ON.
Issue an E84 based AMHS move command (unload).
2.
3.
4.
5.
6.
7.
8.
Waiting for Load Port select signals (CS_0, CS_1) from AMHS equipment under test.
Failure - VALID signal turned ON before Load Port select signals (CS_0, CS_1) were
configured.
Waiting for VALID signal ON from AMHS equipment under test.
Setting U_REQ signal ON.
TR_REQ signal verified ON on AMHS equipment under test.
Failure - TR_REQ signal failed to turn ON within timeout specified (TP1).
Setting READY signal ON.
BUSY signal verified ON on the AMHS equipment under test.
Failure - BUSY signal failed to turn ON within timeout specified (TP2).
Turning ES and HO_AVBL signals OFF to simulate E-Stop button press.
E-Stop condition simulated. The AMHS equipment should immediately stop all motion.
Press the PASS button if the AMHS has stopped all motion. Press the FAIL button if the
AMHS continued with the load cycle.
9.
10.
11.
12.
Waiting for operator input...
Verified that all AMHS equipment motion has stopped.
Failure - AMHS equipment continued with load cycle following ES signal OFF.
Setting HO_AVBL and ES signals ON.
E-Stop Test 2 Passed.
Why we run this test
The E84 Specification defines the ES signal (Table 1) as a request to stop active equpment
activity immediately. The Load Port uses this signal to inform the active equipment of a
hazardous situation, where harm may be caused to material, product, or operation.
This test simulates a hazardous situation by dropping the ES signal in the middle of an unload
cycle.
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Continuous Mode Test Plan
Continuous Mode testing involves running a customized sequence of handoff’s. The user can string
together a list of handoff’s that are processed in a sequential manner, using the Continuous Handoff Mode
defined by the SEMI® specification. The list is comprised of a sequence of Load and Unload cycles using
either Load Port.
Continuous Mode testing uses the standard Load and Unload cycles defined above (for Active and
Passive Modes) to test each individual handoff in the list. The CONT signal is also monitored and verified
throughout the Continuous Mode test.
Continuous Mode Tests
Continuous Mode testing allows for three separate tests. These include:
•
•
•
Test Continuous Handoff Sequence (Active Mode)
Test TP6 Timeout Error (Active Mode)
Test Continuous Handoff Sequence (Passive Mode)
Continuous Mode Test A
Test Continuous Handoff Sequence (Active Mode)
Continuous Mode Test A runs the selected sequence of handoff’s, with the E84 Emulator acting as the
active equipment. The E84 Emulator runs each handoff in order, setting the CONT signal to indicate
Continuous Mode operation.
Why we run this test
The E84 Specification defines the proper sequence for continuous mode handoffs (6.2.6).
This test runs the Active equipment’s side of the continuous handoff sequence, and verifies that
the Load Port being tested properly processes the Passive side.
Continuous Mode Test B
Test TP6 Timeout Error (Active Mode)
Continuous Mode Test B runs the first selected handoff, then forces a delay greater than the entered TP6
Timer value. This should force the passive equipment being tested to respond with a TP6 timer error.
The operator is asked to verify the TP6 Timeout error on the passive equipment.
Why we run this test
The E84 Specification defines TP6 as the maximum time between VALID OFF and VALID ON
during a continuous mode handoff (Table 8).
This test will force a TP6 timeout error by advancing the handoff up to the point where the Load
Port is expecting the VALID signal to turn ON again, after the initial handoff completes. At this
point, the Emulator locks it’s outputs and displays a timeout dialog box. This timeout box counts
down from the TP6 value set in the Continuous Test Setup screen. When the counter reaches
zero, the Load Port should timeout, and display a TP6 timeout message on it’s GUI.
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Continuous Mode Test C
Test Continuous Handoff Sequence (Passive Mode)
Continuous Mode Test C causes the E84 Emulator to act as the passive equipment. The E84 Emulator
waits for the sequence of tests defined by the user, while monitors the active equipments CONT signal for
proper adherence to the SEMI® specification.
Why we run this test
The E84 Specification defines the proper sequence for continuous mode handoffs (6.2.6).
This test runs the Passive equipment’s side of the continuous handoff sequence, and verifies that
the AMHS being tested properly processes the Active side.
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E84 Interface Controller Connector Pinout
The E84 Interface Controller provides two DB-25 connectors (labeled EMULATOR AS ACTIVE
EQUIPMENT and EMULATOR AS PASSIVE EQUIPMENT). The following table provides pinouts for the
two connectors.
Table 1 - E84 Interface Controller Pin Out
Male
DB-25
Emulator as
Active
Equipment
IN 1
IN 2
IN 3
Symbol
Direction
1
2
3
Female
DB-25
Emulator as
Passive
Equipment
OUT 1
OUT 2
OUT 3
L_REQ
U_REQ
VA
P -> A
P -> A
P -> A
4
5
OUT 4
OUT 5
IN 4
IN 5
READY
VS_0
P -> A
P -> A
6
OUT 6
IN 6
VS_1
P -> A
7
8
9
10
OUT 7
OUT 8
NC *
NC *
IN 7
IN 8
NC *
NC *
HO_AVBL
ES
NC *
P -> A
P -> A
11
NC *
NC *
12
NC *
NC *
13
14
15
16
17
NC *
IN 1
IN 2
IN 3
IN 4
NC *
OUT 1
OUT 2
OUT 3
OUT 4
NC *
VALID
CS_0
CS_1
AM_AVBL
18
19
20
21
22
IN 5
IN 6
IN 7
IN 8
NC *
OUT 5
OUT 6
OUT 7
OUT 8
Power
TR_REQ
BUSY
COMPT
CONT
not applicable
23
Power
NC*
not applicable
24
Power COM
Signal COM
not applicable
25
Signal COM
Power COM
not applicable
Pin #
Remarks
Interbay AMHS (used with
passive OHS, stockers)
Interbay AMHS (used with
passive OHS, stockers)
Interbay AMHS (used with
passive OHS, stockers)
Reserved per SEMI®
Standard
Reserved per SEMI®
Standard
Reserved per SEMI®
Standard
A -> P
A -> P
A -> P
A -> P
Interbay AMHS (used with
passive OHS, stockers)
A -> P
A -> P
A -> P
A -> P
for wire based communication,
power is isolated
for wire based communication,
power is isolated
for wire base communication,
Power com is routed to signal
com
for wire base communication,
Power com is routed to signal
com
* NC = Not Connected
GCI E84 Emulator Application Users Manual
79
GCI E84 Emulator Application Users Manual
Version 2.3
Version History
Version 2.3
•
Previous version would issue a system error if communications with the USB Emulator were
interrupted. This version captures that error condition, displays an error message, and provides a
retry option to the operator.
•
The working directory is now displayed on the Main Menu. The Load Port Number entered during
Active Mode Test Setup is now displayed on the Active Mode Test screens. These two changes
help in distinguishing which Application instance is controlling each USB Emultor.
Version 2.2a
•
Modifications to allow multiple instances of the Application to be running on the same PC at the
same time. Multiple USB E84 Emulators can be controlled on the same PC by running multiple
instances of the Application.
Version 2.2
•
The ES signal is now monitored during all Active Mode tests. Previous versions did not monitor
the ES signal during timeout and port sensor tests. This falsely passed equipment that dropped
ES along with HO_AVBL on timeout errors. This change properly implements testing the ES
signal as defined in section A1-4.5 of the E84 standard.
•
HO_AVBL is now checked following completion of timeout tests (in Active Mode). The software
asks the operator to pass / fail the test based on the load ports display of the timeout error on its
GUI. When the operator passes the test, the Emulator now checks the HO_AVBL signal to make
sure it has turned OFF. The equipment should turn HO_AVBL OFF with the timeout error. If the
equipment properly displays the timeout message, but fails to drop HO_AVBL, the test is failed.
•
An online help system has been added, duplicating this Users Manual as a Windows Help system.
Version 2.1.1
•
The Active Mode E-Stop test reported false failures on certain equipment. The 500 mSecond
debounce window incorrectly monitored the L_REQ signal. All signals are now allowed to
fluctuate during the 500 mSecond window.
•
A fix was added to correct for a database lock-up condition reported by some users.
•
Interbay signals are now supported in Manual Mode Testing.
Version 2.1b
•
Additional text has been added to operator prompts to call attention to SEMI® E87 requirements
for manually loading and unloading Load Ports. Several tests require the operator to manually
load a FOUP onto the Load Port being tested. When the Load Port is in Automatic Access Mode,
an alarm is required (by SEMI® E87) if a FOUP is loaded or unloaded manually. The additional
text warns the operator to first place the Load Port in Manual Access Mode, then load the FOUP,
then return the Load Port to Automatic Access Mode before continuing the test.
Version 2.1
•
Simultaneous Handoff Mode testing is now supported. Simultaneous Handoff testing is enable in
Active Mode testing by selecting the new Simultaneous button in the LOAD PORT NUMBER option
box.
•
Continuous Handoff Mode testing is now supported. Continuous Handoff Mode tests can be
configured using the new Continuous Mode Test Setup Screen, reached through a new option
button on the Main Menu.
GCI E84 Emulator Application Users Manual
80
GCI E84 Emulator Application Users Manual
Version 2.3
Version 2.0
•
The Verify Handoff Available Test no longer monitors the ES signal once the HO_AVBL signal
drops. This occurs during transition from Auto to Manual mode on the tool.
•
Test Plans have been re-arranged to place the E-Stop tests at the end of the testing sequence.
•
The Active Mode E-Stop test now provides a debounce window of 500 mSeconds on the ES
signal. This keeps the test from reporting a false failure due to signal noise during the equipments
power down cycle.
•
A new option to run certain Active Mode tests using the Unload Cycle instead of the Load Cycle.
In previous versions, the TP Timer Tests were performed using the standard Load Cycle
handshaking. This new feature allows for TP Timer testing during Unloads.
•
The Active Mode Load Cycle test is run twice, to verify that the Passive Equipment is not
dependant on signal state change order.
•
The Active Mode Unload Cycle test is run twice, to verify that the Passive Equipment is not
dependant on signal state change order.
•
The system now pauses between tests to allow more setup time.
Technical Support
If you encounter problems using your E84 Emulator, Get Control technical support can be reached the
following ways.
By email at support@getcontrol.com.
Please include GUI and E84 Interface Controller version numbers in your email, along with the following
details:
•
•
•
The Test Mode (Active, Passive or Continuous) you are running.
The Test Number and State where the problem is occurring.
Any Error messages displayed.
By phone at 1-480-539-0478 (9 - 5, Mountain Standard Time).
Please have the same information available when calling.
Also, see our web site at www.getcontrol.com for additional information about Get Control, Inc.. Software
upgrades (when released) can also be found at www.getcontrol.com/products/e84emulator.html.
GCI E84 Emulator Application Users Manual
81
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