On-Board IS 1000 Compressor
On-Board IS 1000 Compressor
Installation, Operation and
Maintenance Manual
8040597 Revision A
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Information provided within this document is subject to change without notice, and although believed to be
accurate, Brooks Automation assumes no responsibility for any errors, omissions, or inaccuracies.
AcuLigner™, Align™, AquaTran™, AutoTeach™, ATR™, AXM™, Basic Blue™, BiSymmetrik™,
CenterSmart™, Cool Solutions™, Crate to Operate™, e-RMA™, e-Spares™, e-Volution™, FastRegen™,
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Mini-Ion™, PASIV™, PowerPak™, PerformanceBlue™, PowerPak™, PowerTools™, QuadraFly™, Radius™,
Radient™, Radient Express™, Reliance™, Reliance ATR™, RetroEase™, SCARA™, SmartPM™,
SPOTLevel™, Synetics™, The New Pathway to Productivity™, Time Optimized Trajectory™, Time Optimal
Trajectory™, Time Optimized Path™, TopCooler™, TopLigner™, Ultimate Blue™, VAC-407™, VacuTran™,
Vacuum Quality Monitor™, VQM™, Vacuum Quality Index™, VQI™, and the Brooks logo are trademarks of
Brooks Automation, Inc.
AcuTran®, AquaTrap®, Conductron®, Convectron®, the Cool Solutions logo, Cryodyne®, Cryotiger®,
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TurboPlus®, Vision®, Zaris®, and the Brooks Automation logo are registered U.S. trademarks of Brooks
Automation, Inc.
All other trademarks are properties of their respective owners.
© 2013 Brooks Automation, Inc. All Rights Reserved. The information included in this manual is Proprietary
Information of Brooks Automation and is provided for the use of Brooks Automation customers only and cannot
be used for distribution, reproduction, or sale without the express written permission of Brooks Automation.
This information may be incorporated into the user’s documentation, however any changes made by the user
to this information is the responsibility of the user.
For Technical Support:
Location
GUTS® Contact Number
North America
+1-800-FOR-GUTS (1-800-367-4887)
+1-978-262-2900
Europe
+49-1804-CALL-GUTS (+49-1804-2255-4887)
Japan
+81-45-477-5980
China
+86-21-5131-7066
Taiwan
+886-3-5525225
Korea
+82-31-288-2500
Singapore
+65-6464-1481
Visit us online: www.brooks.com
January 11, 2013
Part Num 8040597 Revision A
This technology is subject to United States export Administration Regulations and authorized to the destination
only; diversion contrary to U.S. law is prohibited.
Printed in the U.S.A.
Brooks Automation
8040597 Revision A
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Contents
Contents
Introduction
Helium Refrigeration System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
Component Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10
On-Board IS Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-14
Safety
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
Signal Word Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3
Safety Shape Descriptions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
Unpacking and Inspection
Shipping Carton Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2
Removal from Shipping Carton. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2
Compressor Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4
Installation
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-2
Cooling Water Line Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-3
Helium Flex Line Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-5
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Installation, Operation and Maintenance Manual
Compressor EMO Remote Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-7
EMO Remote Operation and EMO Box Installation. . . . . . . . . . . . . . . . . . . . . . . . .4-9
Power Cable Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-10
Phase Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-13
Compressor Logic Module Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-14
Protection from Seismic Events . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-17
Operation
Adjusting System Helium Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-2
OFF Condition Helium System Pressure Verification . . . . . . . . . . . . . . . . . . . . . . .5-3
Compressor Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4
Replacement of Helium Circuit Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-6
Maintenance
Scheduled Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2
Adjusting System Helium Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-5
Appendices
Appendix A: Customer Brooks Automation Technical Support Information. . .7-2
Appendix B: Troubleshooting Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-3
Appendix C: Diagrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-9
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Tables
Tables
1-1
Compressor Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
2-1
Safety Signal Words. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3
5-1
On-Board IS 1000 Compressor Helium Charge (OFF Condition) . . . . . . .5-3
6-1
Suggested Maintenance Equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2
7-1
Compressor Troubleshooting Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . .7-4
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Figures
Figures
1-1
1-2
1-3
1-4
1-5
1-6
On-Board IS 1000 Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-4
On-Board IS 1000 Compressor Dimensions . . . . . . . . . . . . . . . . . . . . . . . . .1-5
Water Flow Rate Versus Pressure Drop . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8
Cooling Water Flow Versus Inlet Temperature (High Voltage Configuration)
1-9
On-Board IS 1000 Compressor Front Panel Component Locations . . . . . .1-10
On-Board IS 1000 Compressor Rear Panel Component Locations. . . . . . .1-11
3-1
Using the Shipping Carton Ramp . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-3
4-1
4-2
4-3
4-4
4-5
4-6
On-Board IS 1000 Compressor Installation Flowchart . . . . . . . . . . . . . . . . .4-2
Connecting/Disconnecting Helium Flex Line Self Sealing Couplings. . .4-6
EMO Remote Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-7
On-Board IS 1000 Compressor Connection Covers . . . . . . . . . . . . . . . . . . .4-11
Circuit Breaker Area . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-11
Single On-Board IS 1000 Compressor - Multiple On-Board IS Cryopump Configuration4-15
Multiple On-Board IS 1000 Compressor Multiple On-Board IS Cryopump Configuration4-16
Removing the Caster Hex Bolts from the Compressor Bottom . . . . . . . . .4-18
Seismic Mount Mounting Points . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-19
4-7
4-8
4-9
6-1
6-2
6-3
7-1
7-2
7-3
7-4
Disconnecting Self Sealing Couplings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-3
Adsorber Location within the On-Board IS 1000 Compressor
(Rear Panel Removed)6-4
Helium Pressure Control Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-5
On-Board IS 1000 Compressor Front Panel Indicators . . . . . . . . . . . . . . . .7-4
On-Board IS 1000 Compressor Helium Flow Diagram . . . . . . . . . . . . . . . .7-10
On-Board IS 1000 Compressor Electrical Schematic
(8135399P002, High Voltage)7-10
On-Board IS 1000 Compressor Electrical Schematic
(8135399P001, Low Voltage)7-11
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1
Introduction
Introduction
Overview
This manual provides the information required to install, operate, and maintain the
On-Board IS 1000 Compressor.
NOTE: All personnel with installation, operation, and maintenance responsibilities should
become familiar with the contents of both the On-Board IS 1000 Compressor Installation, Operation, Maintenance, and appropriate cryopump manuals to ensure
safe, high quality, and reliable system performance.
NOTE: There are no user serviceable components in the On-Board IS 1000 Compressor
except for the adsorber. Refer to Maintenance on page 6-1 for instructions on
adsorber replacement.
Refer to Appendix A: Customer Brooks Automation Technical Support Information
on page 7-2 and contact your local Customer Support Center for information on connecting On-Board IS 1000 Compressors to a manifold with other Brooks Automation
compressors.
Chapter Contents
Helium Refrigeration System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-3
Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-5
Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
Electrical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-6
Cooling Water. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-7
General. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-8
Component Description . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10
Front Panel Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-10
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Rear Panel Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-11
System Circuit Breaker . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-11
Control Circuit Breaker . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12
Power ON Indicator . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12
Gas Charge Flared Fitting. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12
Compressor Logic Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12
Helium Pressure Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12
Power Inlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12
On-Board IS Cryopump Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-14
Return Gas Coupling. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-12
Cooling Water IN . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-13
Cooling Water OUT. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-13
EMO Remote Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-13
Supply Gas Coupling . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .1-13
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Introduction
Helium Refrigeration System
Helium Refrigeration System
The operation of Brooks Automation cryopumps is based upon a closed loop helium
expansion cycle. The system is made up of two major components: the cryopump,
which contains the cold head, and the helium Compressor which compresses the
helium gas.
Refrigeration is produced in the cryopump cold head through periodic expansion of
high pressure helium in a regenerative process. The high pressure helium is provided
by the Compressor. Low pressure helium returning from the cold head is compressed
into the necessary high pressure to be returned to the cold head. The energy required
to compress the helium is rejected as heat through the cooling water.
High pressure room temperature helium is transferred to the cold head through the
supply lines. After expansion, low pressure helium is returned to the Compressor (at
or near room temperature) to repeat the cycle in a closed loop fashion. Large separation distances can be accommodated between the Compressor and the cryopump.
In the Compressor, helium is compressed using a highly reliable oil lubricated commercial Compressor. Helium purification takes place via several stages of oil removal.
The final stage of purification is performed with a replaceable adsorber cartridge. In
order to maintain peak efficiency, the adsorber must be replaced every three years.
The On-Board IS 1000 Compressor is shown in Figure 1-1.
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Helium Refrigeration System
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Figure 1-1: On-Board IS 1000 Compressor
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Introduction
Specifications
Specifications
Dimensions
The dimensions of the Compressor are shown in Figure 1-2.
Figure 1-2: On-Board IS 1000 Compressor Dimensions
Compressor Damage
To avoid damaging the compressor unit, do not place a weight greater than 75
lbs. (34Kg) on top of the compressor.
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On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Weight
The weight of the Compressor is listed in Table 1-1.
Table 1-1: Compressor Weight
Compressor Type
Weight lbs./kg
IS 1000 Low Volt
210/95
IS 1000 High Volt
222/102
NOTE: It is recommended that proper heavy-lifting equipment such as a pallet jack be used,
if the compressor needs to be lifted.
Electrical
The electrical specifications of the Compressor are listed in Table 1-2.
Table 1-2: Compressor Electrical Input Specifications
Parameter
Low Volt
High Volt
Operating Voltage
180 - 253 VAC
342 - 528 VAC
Line Frequency
50/60 Hz
50/60 Hz
Phase
3
3
Nominal Input Power
5.8 KW
5.8 KW
Rated Full Load/Locked Rotor
Current
19/85
10/42
Minimum Electrical Service
30 Amps
20 Amps
NOTE: The main disconnect with lock out/tag out function must be positioned immediately adjacent to the compressor.
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Specifications
Cooling Water
The water used to cool the Compressor must meet the specifications shown in Table
1-3 for proper system operation.
Table 1-3: Cooling Water Specifications
Parameter
Value
Maximum Inlet Temperature
90°F (32°C)
Minimum Inlet Temperature
50°F (10°C)
Flow Rate 1
2.75 ±1.25 gpm (10.4 ± 4.7 lpm)
Pressure Drop (inlet-to-outlet)
See Figure 1-3 on page 1-8
Maximum Inlet Pressure
100 psi (6.9 bars)
Alkalinity
6.0 - 8.0 pH
Calcium Carbonate
< 75 ppm
Deionized Water Usage
Do not use above 100,000ohm-cm
resistivity
NOTE: Water conditioning may be required for applications not meeting these requirements.
NOTE: 1For 60 Hz operation with voltage less than 375V, refer to Figure 1-4 on page 1-9
for additional water flow requirements.
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On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
4.00
.21
.07
.35
.63
.49
.77
15.2
13.3
3.50
LINE
3.00
11.40
ING
RAT
OP E
2.50
2.00
A
1.50
9.50
LE
AB
PT
E
CC
7.60
5.70
1.00
3.80
0.50
1.90
1
3
5
7
9
WATER FLOW RATE (LPM)
WATER FLOW RATE (GPM)
WATER PRESSURE DROP (Bars)
11
WATER PRESSURE DROP (PSID)
NOTE: Figure 1-3 defines the water flow rate through the Compressor as a function of
the pressure drop from water inlet to water outlet. You must provide the correct pressure drop in your water supply system to ensure that the water flow
condition meets the requirements specified in Table 1-3 on page 1-7.
Figure 1-3: Water Flow Rate Versus Pressure Drop
General
The information in Table 1-4 provides general Compressor operating specifications.
See Figure 1-4 on page 1-9 for specifications of cooling water flow versus inlet temperature for the high voltage IS 1000 configuration.
Table 1-4: General Compressor Operating Specifications
Specification
Part Number
Input Power Cable
(Customer Supplied)
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Values
8135921G002, 8135926G002
600 VAC
10 Gauge, 3 conductor wire with ground
Must conform to local electrical codes
Nominal Helium Pressure
Refer to Figure 3-1 on page 3-3
Ambient Operating Temperature Range
50 - 100º F (10 - 38º C)
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Specifications
Table 1-4: General Compressor Operating Specifications (Continued)
Specification
Values
Gas Supply Connector
Gas Return Connector
EMO Remote Control
Receptacle
1/2 in. Aeroquip self-sealing coupling, male thread.
1/2 in. Aeroquip self-sealing coupling, female thread.
Mates with P5 connector part number MS3106A*
Adsorber Service Schedule
3 Years
* Supplied by Brooks Automation
NOTE: The On-Board IS 1000 Compressor is designed for continuous operation and
should remain ON when the cryopumps are in a regeneration cycle.
Figure 1-4: Cooling Water Flow Versus Inlet Temperature (High Voltage Configuration)
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Component Description
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Component Description
Front Panel Components
The front panel components of the On-Board IS 1000 Compressor are shown in Figure
1-4 on page 1-9 and described in the following paragraphs.
STATUS INDICATOR
COMPRESSOR PUMP ON/OFF INDICATOR
COMPRESSOR PUMP ON/OFF SWITCH
Figure 1-5: On-Board IS 1000 Compressor Front Panel Component Locations
Compressor Pump ON/OFF Switch
The Compressor Pump ON/OFF Switch is a push button switch that turns the
Compressor Pump ON or OFF.
Compressor Pump ON/OFF Indicator
The Compressor Pump ON/OFF Indicator is green when the compressor
pump is operating, and OFF when the compressor pump is OFF.
Status Indicator
Status Indicator is red when a fault condition exists within the On-Board IS
1000 Compressor. Refer to Appendix B: Troubleshooting Procedures on page
7-3 for more information.
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Component Description
Rear Panel Components
The components of the On-Board IS 1000 Compressor that are accessible from the rear
panel are shown in Figure 1-6 and described in the following paragraphs.
EMO
REMOTE
CONNECTOR
POWER ON
INDICATOR
CONTROL CIRCUIT
BREAKER
GAS CHARGE
FLARE FITTING
(.438-20 UNF-2A)
HELIUM PRESSURE
GAUGE
SYSTEM CIRCUIT BREAKER
SERVICE I/O
CONNECTOR
NETWORK
CONNECTORS
ADDRESS SWITCH
COMPRESSOR
LOGIC
MODULE
SUPPLY GAS
RETURN GAS
(SELF-SEALING COULPING)
(SELF-SEALING COULPING)
REAR PANEL
COOLING WATER IN
POWER INLET
(1/2 FNPT)
WITH CABLE STRAIN RELIEF
COOLING WATER OUT
(1/2 FNPT)
Figure 1-6: On-Board IS 1000 Compressor Rear Panel Component Locations
System Circuit Breaker
The System Circuit Breaker protects main input power to the Compressor pump and
module. The circuit breaker positions are labeled ON (1), which is in the UP position,
and OFF (0), which is in the DOWN position.
NOTE: The phase monitor within the Compressor will cause the system circuit breaker to
open when input power phases are incorrect.
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Component Description
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Control Circuit Breaker
The Control Circuit Breaker provides current overload protection for all internal components of the Compressor except the Compressor motor. The Compressor motor is
protected by a separate overload protector. The Control Circuit Breaker opens automatically and must be reset manually.
Power ON Indicator
The Power On Indicator illuminates when the system and control circuit breakers are
placed in the ON position and the Remote connector is closed.
Gas Charge Flared Fitting
The Gas Charge Flared Fitting is used to connect a 99.999% pure helium supply to the
Compressor when helium charging is required. The fitting has SAE 45º flare.
NOTE: Refer to Maintenance on page 6-1 for information on adding helium to the Compressor.
Compressor Logic Module
The Compressor Logic Module monitors the status of the compressor and communicates with the On-Board IS Controller via channel C of the Intercomponent Network.
Helium Pressure Gauge
The Helium Pressure Gauge indicates system helium charge pressure (OFF condition)
when the Compressor and cryopumps are OFF and Compressor suction or inlet pressure when the Compressor is ON. Refer to Table 5-1 on page 5-3 for the appropriate
helium charge pressure (OFF condition).
Power Inlet
The Power Inlet is used to connect your power cable to the Compressor. Refer to
Installation on page 4-1 for information on power cable installation.
Return Gas Coupling
The Return Gas Coupling returns the helium, which has been cycled through the
cryopump, back to the Compressor. Refer to Helium Refrigeration System on page 13 within this section for more information.
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Installation, Operation and Maintenance Manual
Introduction
Component Description
Cooling Water IN
The Cooling Water IN connector provides water to the Compressor from your facility
to cool the Compressor during operation. The connector thread size is a 1/2 in. female
pipe thread. The water must meet the specifications outlined in Table 1-3 on page 1-7.
Refer to Installation on page 4-1 for more information on cooling water connections.
Cooling Water OUT
The Cooling Water OUT connector returns the water that has been used to cool the
Compressor to your facility. The connector thread size is a 1/2 in. female pipe thread.
Refer to Installation on page 4-1 for more information on cooling water connections.
EMO Remote Connector
The EMO Remote Connector is a two-pin connector. Refer to Installation on page 4-1
for more information on Compressor remote connections.
NOTE: The Compressor is shipped with a mating plug which must remain installed in the
EMO Remote Connector to ensure Compressor operation when the remote EMO
feature is not being used.
Supply Gas Coupling
The Supply Gas Coupling provides a connection for high pressure compressed
helium to the cryopump cold head. Refer to Helium Refrigeration System on page 13 within this section for more information.
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Introduction
On-Board IS Cryopump Connections
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
On-Board IS Cryopump Connections
The On-Board IS 1000 Compressor supports the connection of multiple On-Board IS
Cryopumps as shown in Installation on page 4-1.
NOTE: Refer to Appendix A: Customer Brooks Automation Technical Support Information on page 7-2 and contact your local Brooks Automation Customer Support
Center if you need more information on specific compressor/pump applications.
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Revision A
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
2
Safety
Safety
Overview
This section describes safety conventions for the Brooks Automation Product. All
personnel involved in the operation or maintenance of the product must be familiar
with the safety precautions outlined in this section.
NOTE: These safety recommendations are basic guidelines. If the facility where the Product is installed has additional safety guidelines they should be followed as well,
along with the applicable national and international safety codes.
Chapter Contents
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-2
Signal Word Descriptions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-3
Safety Shape Descriptions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
References . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-4
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Safety
Introduction
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Introduction
Follow all safety precautions during installation, normal operation, and when servicing BROOKS-Cryogenics products.
This chapter explains the safety conventions used throughout this manual.
BROOKS-Cryogenics uses a specific format for cautions and warnings, which
includes standard signal words and safety shapes.
See also the Customer Support appendix or call your local Customer Support Center for
assistance.
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Safety
Signal Word Descriptions
Signal Word Descriptions
All cautions and warnings contain signal words, which call attention to safety messages and designate the degree of hazard seriousness. The following table shows the
signal words and their meanings that may be used in this document.
Table 2-1: Safety Signal Words
Term
Example
Definition
CAUTION
A signal word that indicates a situation or unsafe practice, which if not
avoided may result in equipment
damage. A CAUTION is highlighted
in yellow.
CAUTION
A signal word accompanied by a
safety shape that indicates a potentially hazardous situation or unsafe
practice.
If not avoided, the action may result in
minor or moderate personal injury or
equipment damage. A CAUTION is
highlighted in yellow.
WARNING
A signal word accompanied by a
safety shape that indicates indicates a
potentially hazardous situation.
If not avoided, the action may result in
serious injury or death. A WARNING
is highlighted in orange.
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Safety
Safety Shape Descriptions
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Safety Shape Descriptions
All cautions and warnings contain safety shapes, which have specific safety meanings. The following table shows some of the safety shapes used in this document and
their meanings.
Table 2-2: Safety Shapes
Example
Term
Shape Definition
General Warning
Indicates a general hazard. Details
about this hazard appear in the safety
notice explanation.
High Voltage
Hot Surface
Indicates a high voltage hazard.
Indicates a surface is hot enough to
cause discomfort or a burn.
References
For more information about safety standards, see the following documents:
•
ISO 7010: 2003(E), Graphic symbols - Safety colours and safety signs - Safety
signs used in workplaces and public areas
•
ISO 3864-1: 2002(E), Graphic symbols - Safety colours and safety signs - Part 1:
Design principles for safety signs in workplaces and public areas
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3
Unpacking and Inspection
Unpacking and Inspection
Overview
This chapter details the specifications of the unpacking and inspection of the Brooks
Automation product.
The On-Board IS 1000 Compressor is shipped in a shipping carton incorporating a
ramp system which makes removing the Compressor from the carton safe and easy.
Chapter Contents
Shipping Carton Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2
Removal from Shipping Carton. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2
Using the Ramp . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-2
Compressor Inspection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4
Compressor. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4
Helium Static Pressure Verification . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4
Shipping Carton Contents . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .3-4
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Unpacking and Inspection
Shipping Carton Inspection
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Shipping Carton Inspection
Inspect the exterior of the shipping carton for visible signs of damage before opening
the shipping carton. Report any damage to the shipping company at once.
Removal from Shipping Carton
There are two methods of removing the On-Board IS 1000 Compressor from the shipping carton: using the ramp within the carton, or using a lifting device.
Using the Ramp
1.
Cut the two straps on the exterior of the shipping pallet.
2.
Lift the cardboard carton straight up and remove it from the pallet.
3.
Cut the tape which holds the ramp in the vertical position.
4.
Swing the ramp down until the end touches the floor as shown in Figure 3-1 on
page 3-3.
5.
Remove any excess shipping material from around the Compressor.
Personal Injury
To avoid personal injury or euipment damage, maintain control of the
compressor as it rolls down the ramp.
6.
Unlock the swivel casters as shown in Figure 3-1 on page 3-3.
7.
Carefully roll the Compressor down the ramp and onto the floor as shown in
Figure 3-1 on page 3-3.
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Unpacking and Inspection
Removal from Shipping Carton
UNLOCK SWIVEL CASTERS
Figure 3-1: Using the Shipping Carton Ramp
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Unpacking and Inspection
Compressor Inspection
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Compressor Inspection
Inspect the Compressor for visible signs of damage as indicated in the following paragraphs.
Compressor
Inspect the exterior of the Compressor for visible signs of damage, evidence of an oil
leak, and check the Helium Pressure Gauge for proper helium pressure. Report any
damage to the shipping company at once.
Helium Static Pressure Verification
Refer to Operation on page 5-1 for more information on the static helium charge pressure of the On-Board IS 1000 Compressor.
Shipping Carton Contents
The shipping carton should contain the following items:
•
Compressor
•
Two barbed fittings for flexible water lines
•
Installation, Operation, and Maintenance manual
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Installation, Operation and Maintenance Manual
4
Installation
Installation
Overview
This chapter provides complete installation procedures for the Brooks Automation
Product including: unpacking, assembly, facilities connections, initial setup, and initial check-out.
This section provides you with the information required to install the On-Board IS
1000 Compressor and connect it to multiple On-Board IS Cryopump configurations.
Chapter Contents
Introduction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-2
Cooling Water Line Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-3
Hard Water Lines. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-3
Flexible Water Lines . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-3
Helium Flex Line Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-5
Disconnecting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-6
Compressor EMO Remote Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-7
EMO Remote Operation and EMO Box Installation. . . . . . . . . . . . . . . . . . . . . . . . .4-9
Power Cable Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-10
Phase Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-13
Compressor Logic Module Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-14
Protection from Seismic Events . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-17
Before You Start . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .4-17
Attaching a Seismic Mount to an On-Board IS 1000 Compressor . . . . . . .4-17
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Installation
Introduction
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Introduction
Figure 4-1 highlights the major tasks for Compressor installation and refers to the
appropriate installation procedures within this section.
START
Cooling Water
Line Connections
Power Cable
Connections
(Refer to 4-3)
(Refer to 4-10)
Helium Flexline
Connections
Phase Check
(Refer to 4-13)
(Refer to 4-5)
EMO Remote
Operations*
Compressor Logic Module
Connections
(Refer to 4-14)
(Refer to 4-9)
END
* ONLY REQUIRED FOR REMOTE EMO COMPRESSOR
Figure 4-1: On-Board IS 1000 Compressor Installation Flowchart
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Installation, Operation and Maintenance Manual
Installation
Cooling Water Line Connections
Cooling Water Line Connections
NOTE: The water used for cooling the Compressor must meet the specifications outlined in
Table 1-1 on page 1-6.
Hard Water Lines
1.
Apply a light coating of standard plumbing thread sealant to the hard line pipe
threads.
2.
Install the Supply hard line into the INPUT connection on the rear panel of the
Compressor. Tighten the fitting by hand.
3.
Install the Return hard line into the OUTPUT connection on the rear panel of
the Compressor. Tighten the fitting by hand.
Connector Thread Damage
To avoid damaging the input and output connector threads, do not overtighten
the ferrules.
4.
Using a wrench, tighten the fittings.
5.
Allow water to flow and check for leaks at the rear of the Compressor.
Flexible Water Lines
1.
Apply a light coating of standard plumbing thread sealant to the barbed fitting
threads.
2.
Install the barbed fittings into the INPUT and OUTPUT connections on the rear
panel of the Compressor.
Connector Thread Damage
To avoid damaging the input and output connector threads, do not overtighten
the barbed fittings.
3.
Using a wrench, tighten the barbed fittings.
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Installation
Cooling Water Line Connections
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
4.
Connect the Supply flexible water line to the INPUT barbed fitting and secure
with a hose clamp.
5.
Connect the Return flexible water line to the OUTPUT barbed fitting and
secure with a hose clamp.
6.
Allow water to flow and check for leaks at the rear of the Compressor.
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On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Installation
Helium Flex Line Connections
Helium Flex Line Connections
Equipment Damage
To avoid damaging equipment from excessive or insufficient pressure, do not
connect the On-Board IS Cryopump to a manifold with other compressors, OnBoard, or Cryo-Torr cryopumps.
The use of several On-Board IS 1000 Compressors on a single manifold feeding a common supply header and a common return header requires special precautions. Contact Brooks Automation for a review of the intended installation and for specific
technical instructions.
Equipment Damage
To avoid damaging the connector, O-ring seals, or causing a helium circuit leak,
connect and disconnect the helium flex lines from the On-Board IS 1000
Compressor using the following procedure and as shown in Figure 4-2 on page
4-6.
The number of On-Board IS Cryopumps connected to an On-Board IS 1000 Compressor will vary based upon the On-Board IS Cryopump models used. Refer to Appendix
A: Customer Brooks Automation Technical Support Information on page 7-2 for
information about specific compressor/pump applications.
Connecting
1.
Remove all dust plugs and caps from the Gas Supply and Return lines, and the
Compressor and cryopump Supply and Return connectors. Check for the presence of a flat gasket in the male connector, and no gasket in the female connector.
2.
Connect the Gas Return line to the GAS RETURN connector on the rear of the
Compressor and then to the GAS RETURN connector on the On-Board IS
Cryopump or helium manifold. Using two wrenches as shown in Figure 4-2 on
page 4-6, tighten the connector.
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Installation
Helium Flex Line Connections
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
TO TIGHTEN
TURN WITH 1 3/16 INCH WRENCH
HOLD WITH 1 INCH WRENCH
HOLD WITH 1 1/8 INCH WRENCH
TURN WITH 1 3/16 INCH WRENCH
TO LOOSEN
Figure 4-2: Connecting/Disconnecting Helium Flex Line Self Sealing Couplings
3.
Connect the Gas Supply line to the GAS SUPPLY connector on the rear of the
Compressor and then to the GAS SUPPLY connector on the On-Board IS
Cryopump or helium manifold. Using two wrenches as shown in Figure 4-2,
tighten the connector.
4.
Attach the Supply and Return line identification labels to each end of the
appropriate lines.
Disconnecting
•
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4-6
Using two wrenches as shown in Figure 4-2, disconnect the two self sealing
coupling connectors quickly to minimize helium leakage.
Brooks Automation
Revision A
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Installation
Compressor EMO Remote Connections
Compressor EMO Remote Connections
NOTE: Connections to the EMO Remote Connector are only required if the Compressor
uses the remote EMO box.
NOTE: The Compressor is shipped with a mating plug which must remain installed in the
EMO Remote Connector to ensure Compressor operation when the EMO remote
feature is not being used.
1.
Remove the EMO Remote plug from the EMO REMOTE connector on the
Compressor rear panel.
2.
Disassemble the plug connector.
3.
Unsolder the jumper wire between the pins.
4.
Slide the connector components over the cable as shown in Figure 4-3.
LOCKING RING
LOCK WASHER
SHELL
REMOTE EMO
CONNECTOR
STRAIN RELIEF
BODY
PIN ASSEMBLY
Figure 4-3: EMO Remote Connections
5.
Strip the insulation from the customer supplied cable conductors and tin the
conductors with solder.
6.
Solder the conductors of the customer supplied cable to the plug pins as shown
in Figure 4-3.
7.
Align the key in the connector shell with the pin assembly and install the pin
assembly into the shell.
8.
Install the lock washer around the pin assembly.
9.
Slide the locking ring over the shell.
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Installation
Compressor EMO Remote Connections
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
10.
Screw the connector body into the shell threads.
11.
Connect the plug to the REMOTE EMO CONNECTOR on the Compressor.
12.
Connect the opposite end to the EMO box.
13.
Assemble and screw the strain relief on the body and tighten the cable clamp
screws.
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On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Installation
EMO Remote Operation and EMO Box Installation
EMO Remote Operation and EMO Box Installation
Installing the EMO box is optional. The remote EMO is mounted on the compressor
with the kit provided. If the EMO box is not used, the jumper connector must be
installed.
To initiate the EMO function, push the red button in. The EMO circuit immediately
locks out the compressor to keep it from running. To reset power to the unit, make
sure the main circuit breaker (CB1) is in the off position. Turn the EMO button clockwise and pull it out. Turn the unit back on with the circuit breakers and front power
switch.
To reset the EMO, remove power by initiating these procedures:
1.
Push the start button off and on.
2.
Turn the control circuit breaker off then back on.
3.
Turn the main circuit breaker off and on.
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Installation
Power Cable Connections
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Power Cable Connections
The following procedure provides information for making all three phase (342-528
VAC for high voltage and 180 - 250 VAC for low voltage) electrical connections to the
Compressor.
NOTE: Input phasing sequence = counter-clockwise. Make sure that the lockout procedure
(as defined by the facility) has been followed before initiating the following procedure.
High Voltage
To avoid severe injury or loss of life from high voltage electric shock, turn off all
electrical power before proceeding.
Equipment Failure
To avoid equipment failure, use a 10 gauge, 3 conductor cable with ground
rating at 600 VAC for the Compressor
1.
Cut a 10 AWG (6.00 mm2), 3 conductor cable with ground to an appropriate
length.
2.
Strip the cable jacket back 4 in. (101.6 mm).
3.
Strip the insulation back 3/8 in. (9.3 mm) on each individual conductor.
4.
Install a #10 ring tongue terminal on the end of each conductor using the
appropriate size double crimping tool.
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On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Installation
Power Cable Connections
MODULE
CIRCUIT BREAKER
TERMINAL COVER
CABLE STRAIN RELIEF
REAR PANEL
SEE FIGURE 3-5
FOR CIRCUIT BREAKER
DETAILS
Figure 4-4: On-Board IS 1000 Compressor Connection Covers
5.
Remove the rear panel and the circuit breaker terminal cover in Figure 4-4.
6.
Thread the conductor cable through the cable strain relief in Figure 4-4.
GROUND STUD WITH
10-32 NUT
CIRCUIT BREAKER
TERMINALS
Figure 4-5: Circuit Breaker Area
7.
Remove the 10-32 nut from the ground stud and install the grounding wire.
8.
Replace the 10-32 nut on the ground stud and tighten to 18 in.-lbs (0.21m-kg).
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Installation
Power Cable Connections
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
NOTE: Use a slotted screwdriver that is capable of holding a screw when performing Step
9 and Step 11.
9.
Remove the terminal screws from the circuit breaker terminals X, Y, and Z in
Figure 4-5 on page 4-11.
NOTE: The phase order in which the conductor terminal lugs are connected to circuit
breaker terminals X, Y, and Z are determined during the Phase Check Procedure.
NOTE: For installation where one of the three phase legs is at or near ground potential,
connect that leg to terminal Y on the Compressor.
10.
Install the conductor terminal lugs to the circuit breaker terminals X, Y, and Z.
11.
Replace and tighten the terminal screws to 12 in.-lbs (0.14m-kg).
12.
Allow enough cable to stay in the circuit breaker area to prevent strain on the
termianl connections, and then tighten the screws on the cable strain relief in
Figure 4-4 on page 4-11.
13.
Install the power source end of the conductor cable according to the local electrical codes.
14.
Replace the circuit breaker terminal cover from Figure 4-4 on page 4-11.
Proceed with Phase Check on page 4-13.
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On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Installation
Phase Check
Phase Check
High Voltage
To avoid severe injury or loss of life from high voltage electric shock, ensure that
all steps in the previous section, Power Cable Connections on page 4-10, and
the current section are followed precisely.
1.
Apply 208 VAC (for low voltage) or 380/480 VAC (for high voltage) power to
the On-Board IS 1000 Compressor circuit.
NOTE: The System Circuit Breaker will trip immediately during step 2 if the power phase
connections are not correct.
2.
Set the System Circuit Breaker (CB1) to the ON position.
3.
If the System Circuit Breaker trips, refer to step Step 4. If the System Circuit
Breaker does not trip, refer to step Step 5.
4.
If the System Circuit Breaker trips, perform the following steps:
1.
Set the System Circuit Breaker (CB1) to the OFF position.
2.
Disconnect the power cord from the power source.
3.
Remove the circuit breaker terminal cover.
4.
Reverse the wiring order of terminals X and Y.
5.
Torque the circuit breaker terminal screws to 12 in.-lbs.
6.
Install the circuit breaker terminal cover.
7.
Repeat Step 1 through Step 3 of this procedure.
5.
Make sure the Power On indicator is illuminated.
6.
Set the System Circuit Breaker (CB1) to the OFF position.
7.
Install the rear panel.
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Installation
Compressor Logic Module Connections
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Compressor Logic Module Connections
High Voltage
To avoid severe injury or loss of life from high voltage electric shock, turn off the
compressor power before making any connections to the rear panel.
1.
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Refer to the On-Board IS Controller Quick Installation Guide (8040648 or
8040657) for information on connecting the On-Board IS 1000 Compressor to
the Intercomponent Network.
Brooks Automation
Revision A
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
208 VAC
50/60 HZ
Installation
Compressor Logic Module Connections
208 VAC
50/60 HZ
208 VAC
50/60 HZ
208 VAC
50/60 HZ
208 VAC
50/60 HZ
HELIUM RETURN
HELIUM SUPPLY
ON-BOARD IS 1000 COMPRESSOR
COOLING WATER IN
COOLING WATER OUT
208 VAC, 50/60 HZ (low voltage) or
380/480 VAC, 50/60 HZ (high voltage)
Figure 4-6: Single On-Board IS 1000 Compressor - Multiple On-Board IS Cryopump Configuration
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Installation
Compressor Logic Module Connections
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
208 VAC
50/60 HZ
208 VAC
50/60 HZ
208 VAC
50/60 HZ
208 VAC
50/60 HZ
208 VAC
50/60 HZ
208 VAC
50/60 HZ
208 VAC
50/60 HZ
208 VAC
50/60 HZ
HELIUM RETURN
HELIUM SUPPLY
On-Board IS 1000 COMPRESSORS
FLOW
W
FLO
FLOW
FLOW
208 VAC, 50/60 HZ (low voltage) or
208 VAC, 50/60 HZ (low voltage) or
380/480 VAC, 50/60 HZ (high voltage)
380/480 VAC, 50/60 HZ (high voltage)
Figure 4-7: Multiple On-Board IS 1000 Compressor Multiple On-Board IS Cryopump Configuration
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Revision A
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Installation
Protection from Seismic Events
Protection from Seismic Events
The On-Board IS 1000 Compressor unit is designed to be secured from movement and
overturning in the case of a seismic event. This is to prevent risk of injury to personnel
and equipment damage in compliance with semi-S2, section 19.
Brooks Automation offers an optional seismic mount kit (8187012K001) to secure the
compressor. The mount can be installed using the On-Board IS 1000 Compressor Seismic
Mount Kit Quick Installation Guide (8040704).
If you choose to mount your own device, please use the following guidelines.
Before You Start
Before installing a seismic mount:
1.
Disconnect the On-Board IS 1000 Compressor from all electrical, gas and water
connections.
2.
Disconnect any On-Board IS 1000 Compressor pump connections.
3.
Use a lifting device that can safely lift and hold the On-Board IS 1000 Compressor as indicated in Step 1 of the Attaching a Seismic Mount to an On-Board IS
1000 Compressor procedure below.
Attaching a Seismic Mount to an On-Board IS 1000 Compressor
To attach a seismic mount to the compressor:
1.
Use a lifting device that can safely lift and hold the On-Board IS 1000 Compressor (222 lbs [102 kg]) so that you can safely access the bottom.
2.
Place mounting blocks for added safety to ensure that the compressor is secure
and stationary.
3.
Use a 7/16” wrench or socket to remove the eight 1/4-20 x 0.75 hex bolts (PN
MS35307-305) and 1/4” lock washer (PN 7001015P008) that secure each of the
four casters at the bottom of the compressor. See Figure 4-8 on page 4-18 for
bolt and caster locations.
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Installation
Protection from Seismic Events
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
REMOVE CASTER HEX BOLTS
Figure 4-8: Removing the Caster Hex Bolts from the Compressor Bottom
4.
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4-18
If you raised the unit using a lifting device, remove the mounting blocks and
carefully, slowly and safely lower the IS 1000 Compressor to the mounting
locations.
Brooks Automation
Revision A
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Installation, Operation and Maintenance Manual
Installation
Protection from Seismic Events
ATTACH SEISMIC MOUNTS AT POINTS INDICATED
Figure 4-9: Seismic Mount Mounting Points
5.
Attach the seismic mounts to the four 1/4-20 mounting points shown in Figure
4-9.
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Protection from Seismic Events
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
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Revision A
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Installation, Operation and Maintenance Manual
5
Operation
Operation
Overview
This chapter provides operation instructions for the Brooks Automation Product.
Chapter Contents
Adjusting System Helium Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-2
OFF Condition Helium System Pressure Verification . . . . . . . . . . . . . . . . . . . . . . .5-3
Compressor Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-4
Replacement of Helium Circuit Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .5-6
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Operation
Adjusting System Helium Pressure
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Adjusting System Helium Pressure
Your high vacuum pump system is comprised of several pressurized components i.e.
compressor, flex lines, and cryopumps. Each component is charged with helium
before shipment. After all cryopumps, helium lines, and manifolds are attached to the
compressor, the system helium charge pressure (OFF condition) must be verified before
system operation. Once the helium system pressure (OFF condition) has been verified, the system is ready for operation. After cooldown, the normal system operating
pressure is recorded.
NOTE: The On-Board IS 1000 Compressor is designed for continuous operation and
should remain ON even when the cryopumps are in a regeneration cycle.
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On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Operation
OFF Condition Helium System Pressure Verification
OFF Condition Helium System Pressure Verification
The proper system helium charge pressure (OFF condition) is necessary so that the
cryopumps operate at maximum performance as well as to assure that the compressor
will operate below the maximum design motor winding temperature which will maximize the life of the compressor motor.
1.
Make sure the Compressor and Cryopump(s) are OFF.
2.
Make sure all system components are connected together as described in
Installation on page 4-1.
3.
Allow all system components to acclimate to a temperature between 60º F and
80º F (15.5º C - 26.6º C).
4.
Read the compressor helium pressure gauge located on the compressor rear
panel as shown in Figure 1-1 on page 1-4. Compare the gauge reading to the
appropriate 50/60 Hz line frequency value (depending upon your system
installation) indicated in Table 5-1.
Table 5-1: On-Board IS 1000 Compressor Helium Charge (OFF Condition)
Line Frequency
Helium Charge Pressure
(OFF Condition)
60 Hz
340 - 350 psig (23.4 - 24.1 bar)
50 Hz
355 - 365 psig (24.5 - 25.2 bar)
NOTE: The use of a higher helium charge pressure for 50 HZ operation is necessary in
order to compensate for the slower speed at which the compressor operates at 50
HZ. The charge level (OFF condition) for 60 Hz remains at 340 - 350 PSIG.
Relief Valve Damage
To avoid damaging relief valves, do not exceed the recommended system
helium charge pressure (OFF condition).
5.
If the helium charge pressure (OFF condition) is not within the ranges as indicated in Table 5-1, then adjust the charge pressure as described in Maintenance
on page 6-1.
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Operation
Compressor Operation
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Compressor Operation
Equipment Damage
To avoid damaging equipment from excessive or insufficient pressure, maintain
between 140 psig and 240 psig.
NOTE: If the gauge indicator is below 140 psig, then check the system for insufficient
helium or helium leaks. If the gauge indicator is above 240 psig, then the system has
been over pressurized. Refer to Maintenance on page 6-1 and either add or
remove helium before operating the On-Board IS 1000 Compressor.
The system may be operated once the helium charge pressure is correct. Perform the
following steps to start the compressor:
1.
Close all On-Board IS Cryopump gate valves.
2.
Set the On-Board IS 1000 Compressor System Circuit Breaker to the ON (UP)
position.
3.
Set the On-Board IS 1000 Compressor Control Circuit Breaker to the ON (UP)
position.
4.
Set the power switch on the front panel of the On-Board IS 1000 Compressors
to the ON position.
5.
Refer to Section 1 of the On-Board IS Cryopump System Operation Guide, part
number 8040647 (that came with your On-Board IS Controller) for additional
system startup information.
6.
Once the second stage temperature for all cryopumps is below 17K, record the
compressor pressure gauge reading as the normal system operating pressure.
NOTE: During compressor operation, the compressor gauge reads the pressure of the gas
entering the compressor prior to it being compressed.
7.
Affix a copy of the data next to the compressor gauge on each compressor. This
data is to be verified for each tool installation and whenever a configuration
change is made affecting the amount of system helium gas and line volume.
The compressor pressure reading will decrease from the normal system operating pressure during cryopump regeneration or if fewer cryopumps are being
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Installation, Operation and Maintenance Manual
Operation
Compressor Operation
operated. These are normal variations in the compressor pressure reading and
should not be cause for concern.
NOTE: If you have concerns about system performance changing, then check the normal
system operating pressure which was determined in Compressor Operation on
page 5-4. If the normal system operating pressure is not correct, check the system
for leaks.
Once the leaks have been repaired, helium must be added to return the system to normal operating system pressure as described in Maintenance on page 6-1.
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Operation
Replacement of Helium Circuit Components
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Replacement of Helium Circuit Components
On occasion, it may be necessary to replace components such as cryopumps, helium
gas lines or compressors, or change the configuration of the system. Whenever any of
these conditions occur, OFF Condition Helium System Pressure Verification on page
5-3 should be performed to ensure that (OFF condition) helium pressure has not
changed.
Relief Valve Damage
To avoid damaging relief valves when using other compressor models, reduce
the system helium charge pressure to 200 - 210 psig.
The use of several On-Board IS 1000 Compressors on a single manifold feeding a common supply header and a common return header requires special precautions. Contact Brooks Automation for a review of the intended installation and for specific
technical instructions.
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Revision A
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
6
Maintenance
Maintenance
Overview
This chapter provides maintenance directions for the Brooks Automation Product.
Chapter Contents
Scheduled Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2
Suggested Maintenance Equipment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2
Adsorber Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-2
Adjusting System Helium Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-5
Reducing Helium Pressure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-5
Increasing Helium Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-6
Adding Helium . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .6-6
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Maintenance
Scheduled Maintenance
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Scheduled Maintenance
Suggested Maintenance Equipment
It is recommended to have the following equipment and disposable supplies available as listed in Table 6-1.
Table 6-1: Suggested Maintenance Equipment
Supply
Part Number
Helium, 99.999% pure
-
Pressure regulator (0-3000/0-400 psi)
Assy.
8031403
Helium charging line terminating in a 1/
4-inchfemale flare fitting
7021002P001
Lint-free gloves and cloth
-
Oakite or equivalent detergent soap
-
Denatured alcohol
-
NOTE: NOTE: Refer to Appendix A: Customer Brooks Automation Technical
Support Information on page 7-2 and contact your local Brooks Automation Support Center to obtain the parts listed in this table.
NOTE: NOTE: MSDS sheet for oil used in the compressor is available upon
request.
Adsorber Replacement
Use the following procedure to replace the adsorber every three years.
1.
Set the System Circuit Breaker, on the rear of the On-Board IS 1000 Compressor, to the OFF position.
2.
Remove the four screws which secure the rear panel to the Compressor and
remove the rear panel.
NOTE: Use two wrenches in Step 3 to prevent loosening the body of the coupling.
3.
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Using a 1-3/16 in. wrench, and a 1-1/8 in. wrench, as shown in Figure 6-1 on
page 6-3, disconnect the two self sealing coupling connectors quickly to minimize helium leakage.
Brooks Automation
Revision A
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Maintenance
Scheduled Maintenance
TO TIGHTEN
TURN WITH 1 3/16 INCH WRENCH
HOLD WITH 1 INCH WRENCH
HOLD WITH 1 1/8 INCH WRENCH
TURN WITH 1 3/16 INCH WRENCH
TO LOOSEN
Figure 6-1: Disconnecting Self Sealing Couplings
4.
Using a 7/16 in. (11mm) wrench, remove the adsorber mounting bolt as shown
in Figure 6-2 on page 6-4.
5.
Move the adsorber from under the mounting tabs in the base as shown in Figure 6-2 on page 6-4 and remove the adsorber from the Compressor.
6.
Install the replacement adsorber under the mounting tabs and secure it into
place with the bolt removed in Step 4.
7.
Using two wrenches as shown in Figure 6-1, connect the two self sealing couplings quickly to minimize helium leakage.
8.
Install the Compressor rear panel.
9.
Ensure that the pressure gauge reads the proper value as shown in Table 5-1 on
page 5-3. If additional gas pressure is required, refer to Adding Helium within
this section. If gas pressure needs to be reduced, refer to Reducing Helium
Pressure within this section.
10.
Record the adsorber replacement date on the adsorber label and also note that
the next adsorber replacement should be performed in three years.
NOTE: Follow local, state and federal guidelines when disposing of the adsorber.
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Maintenance
Scheduled Maintenance
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
ADSORBER
Adsorber
Mounting
Bolt
Figure 6-2: Adsorber Location within the On-Board IS 1000 Compressor
(Rear Panel Removed)
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Installation, Operation and Maintenance Manual
Maintenance
Adjusting System Helium Pressure
Adjusting System Helium Pressure
NOTE: These procedures can be performed on a compressor that is turned ON or OFF.
However, the helium pressure gauge should be set to the helium charge pressure
(OFF condition) value if the compressor is turned OFF or set to the normal system
operating pressure if the compressor is turned ON. Refer to Operation on page 5-1
for more information.
Reducing Helium Pressure
NOTE: You must obtain the normal system operating pressure from Table 5-1 on page 5-3
in order to perform this procedure. If the normal system operating pressure is
unknown, then shut the compressor OFF and perform the OFF Condition
Helium System Pressure Verification on page 5-3 procedure instead.
1.
Remove the flare cap from the gas charge flared fitting as shown in Figure 6-3.
GAS CHARGE FLARED FITTING
HELIUM PRESSURE GUAGE
REAR PANEL
GAS CHARGE CONTROL VALVE
Figure 6-3: Helium Pressure Control Components
2.
3.
Open the gas charge control valve very slowly to allow a slight amount of
helium to escape. Leave the valve open until the helium pressure gauge indicates one of the following:
•
To the appropriate value in Table 5-1 on page 5-3 if the compressor is OFF
and acclimated to a temperature between 60º F and 80º F (15.5º C - 26.6º
C).
•
To the value previously recorded in the Compressor Operation on page
5-4 procedure if the compressor is ON.
Close the gas charge control valve and replace the flare cap.
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Maintenance
Adjusting System Helium Pressure
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Increasing Helium Pressure
Use the following procedure to increase the helium pressure if the indicated pressure
is below the appropriate value as shown in Table 5-1 on page 5-3.
Equipment Damage
To avoid damaging equipment due to insufficient helium, check for leaks if
helium must be added to the system more than once every few months. A
helium leak may be caused by improperly connected self-sealing connections or
any mechanical joint within the compressor
Adding Helium
NOTE: You must obtain the normal system operating pressure from Table 5-1 on page 5-3
in order to perform this procedure. If the normal system operating pressure is
unknown, then shut the compressor OFF and perform the OFF Condition
Helium System Pressure Verification on page 5-3 procedure instead.
This procedure ensures that both the regulator and the charging line will be purged of
air and that the air trapped in the regulator will not diffuse back into the helium bottle. For best results, use a dedicated helium bottle, regulator, and line, which are never
separated, for adding helium.
NOTE: You are required to supply the helium charging line terminating in a 1/4-inch
female flare fitting, and a two-stage pressure regulator rated at 0-3000/0-400 psig
for this operation.
Equipment Failure
Use only 99.999% pure helium gas. Helium circuit contamination may result if a
lower quality of helium is used.
1.
Attach a regulator (0-3000/0-400 psig) and charging line to a helium bottle
(99.999% pure).
NOTE: Do not open the bottle at this time.
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Revision A
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
2.
Maintenance
Adjusting System Helium Pressure
Purge the regulator and charging lines as follows:
1.
Open the regulator a small amount by turning the adjusting knob clockwise until it contacts the diaphragm, then turn approximately 1/8 to 1/
4 turn more, so that the regulator is barely open.
2.
Loosely connect the charge line to the helium pressure regulator.
3.
Slowly open the bottle valve, and purge the regulator and line for 10 to
15 seconds. Turn the regulator knob counterclockwise until the helium
stops flowing.
3.
Remove the flare cap of the gas charge flared fitting on the rear of the Compressor.
4.
Loosely connect the charging line from the helium pressure regulator to the 1/
4-inch male flare fitting installed on the helium charge valve. Purge the charge
line again, as in step a, for 30 seconds, and tighten the charge line flare fitting
onto the gas charge fitting while the helium is flowing.
5.
Set the helium pressure regulator to 300 psig (20.7 bars). If the compressor is
ON, proceed with step a. If the compressor is OFF, proceed with Step 2.
6.
1.
Obtain the previously recorded normal system operating pressure operating pressure from Table 5-1 on page 5-3. Open the gas charge control
valve very slowly and allow helium to flow until the compressor gauge
reading is the same as the value obtained from Section 4. Quickly close
the gas charge control valve.Table 5-1 on page 5-3
2.
Obtain the appropriate (50 or 60 Hz) system operating pressure (OFF condition) from Table 5-1 on page 5-3. Open the gas charge control valve very
slowly and allow helium to flow until the compressor gauge reading is
the same as the appropriate value in Table 5-1 on page 5-3. Quickly close
the gas charge control valve.
Ensure that the helium charge valve on the Compressor is tightly closed. Shut
off the helium pressure regulator on the helium bottle and remove the charging
line from the male flare fitting. Reinstall the flare cap.
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Maintenance
Adjusting System Helium Pressure
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
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Installation, Operation and Maintenance Manual
7
Appendices
Appendices
Overview
The following appendices are included to provide the user with a single location for
specific information related to the Brooks Automation Product.
Chapter Contents
Appendix A: Customer Brooks Automation Technical Support Information . . .7-2
Appendix B: Troubleshooting Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-3
Troubleshooting the Compressor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-3
Technical Inquiries. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-3
Front Panel Indicators . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-3
Appendix C: Diagrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .7-9
Brooks Automation
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Appendices
Appendix A: Customer Brooks Automation Technical Support Information
On-Board IS 1000 Compressor
Installation, Operation and Mainte-
Appendix A: Customer Brooks Automation Technical Support Information
When contacting Brooks Automation for Technical Support, please have the following information available.
1.
Record the part number and serial number from the equipment.
2.
Provide the installed location of the equipment.
3.
Provide name, e-mail address, and telephone number of the person to contact.
4.
List any error codes received during the failure.
5.
Prepare a detailed description of the events relating to the error.
6.
•
Time that the equipment has been in operation
•
Work that was done on the equipment prior to the error
•
Functions that the equipment was performing when the error occurred
•
Actions taken after the error and the results of those actions
•
Other information that may assist the Specialist
Contact Brooks Automation Technical Support at these numbers:
Brooks
Location
North
America
Europe
Japan
China
Taiwan
Korea
Singapore
GUTS® Contact Number
1-800-FOR-GUTS (1-800-367-4887) US/Canada
+1-978-262-2900
+49 1804 CALL GUTS (+49 1804 2255 4887)
+81-45-477-5980
+86-21-5131-7066
+886-3-552-5225
+82-31-288-2500
+65-6464-1481
For additional contact information, please go to the Brooks Automation web
site at www.brooks.com or send an E-mail to [email protected]
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Revision A
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Appendices
Appendix B: Troubleshooting Procedures
Appendix B: Troubleshooting Procedures
Troubleshooting the Compressor
The Compressor troubleshooting procedures are summarized in Table 7-1 on page 74.
NOTE: Disconnect the compressor before performing any troubleshooting procedures.
Hot Surface
To avoid burns, wait for the pump to cool down before working on the inside of
the compressor.
Compressor Damage
To avoid damaging the compressor, do not change or modify any compressor
internal wiring circuits.
Technical Inquiries
NOTE: Refer to Appendix A: Customer Brooks Automation Technical Support Information on page 7-2 for customer support information and contact Brooks Automation
for assistance if required.
Front Panel Indicators
The On-Board IS 1000 Compressor front panel contains two indicators; a green power
indicator and a red status indicator as shown in Figure 7-1 on page 7-4. When the red
status indicator is illuminated, a fault condition exists. Refer to Table 7-1 on page 7-4
to locate the problem.
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Revision A
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Appendices
Appendix B: Troubleshooting Procedures
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
GREEN POWER ON INDICATOR
RED STATUS INDICATOR
I/O On/Off
Status
Figure 7-1: On-Board IS 1000 Compressor Front Panel Indicators
Table 7-1: Compressor Troubleshooting Procedures
Problem
1. System circuit breaker
(CB1) trips immediately
to the OFF (0) position
when switched to the ON
(1) position.
Power Indicator OFF
Status Indicator OFF
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Possible Cause
1a. Incorrect phasing of
input power.
Corrective Action
1a. Check phasing of input
power. Refer to Phase
Check on page 4-13.
Brooks Automation
Revision A
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Appendices
Appendix B: Troubleshooting Procedures
Table 7-1: Compressor Troubleshooting Procedures
Problem
Possible Cause
2a. No power coming from
source.
2a. Check source fuses,
circuit breakers, and wiring associated with the
power source. Repair as
needed.
2b. Insufficient power.
2b. Verify adequate phaseto-phase input voltage.
Refer to Table 1-1 on page
1-6.
2. System (CB1) and Control Circuit (CB2) circuit
2c. EMO remote jumper
breakers remain in the
plug is not properly
ON (1) position when
installed.
switched ON but the
compressor will not run.
Power Indicator OFF
Status Indicator OFF
3. System circuit breaker
(CB1) will not remain in
the ON (1) position when
switched ON. The Control Circuit circuit
breaker (CB2) trips when
excessive current is being
drawn by 24 volt compressor control circuits.
Power Indicator OFF
Status Indicator OFF
Brooks Automation
Revision A
Corrective Action
2c. Check that the EMO
remote jumper plug is
fully seated. See Figure 6-1
on page 6-3 for location.
Refer to EMO Remote
Operation and EMO Box
Installation on page 4-9
for more information.
Reset the CB1 circuit
breaker.
2d. Improperly wired
external EMO remote control circuit. NOTE: Only
applies if EMO remote control feature is being used.
2d. Verify correct installation of EMO remote control feature.
3a. Damaged component in
the compressor power or
control circuit.
3a. Refer to Appendix A:
Customer Brooks Automation Technical Support
Information on page 7-2
and contact your local
Brooks Automation Customer Support Center.
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Appendices
Appendix B: Troubleshooting Procedures
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Table 7-1: Compressor Troubleshooting Procedures
Problem
4. System circuit breaker
(CB1) remains in the ON
(1) position and the compressor stops after several minutes of operation
and remains OFF (0).
Power Indicator OFF
Status Indicator ON
5. System circuit breaker
(CB1) trips after a period
of running.
Power Indicator OFF
Status Indicator OFF
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Possible Cause
Corrective Action
4a. Thermal protective
switches are open.
4a. Check for inadequate
water cooling. Refer to
Table 1-3 on page 1-7.
4b. Very cold water has
caused a restriction of oil
flow through the oil injection orifice during start-up.
4b. Recheck for proper
cooling water temperature. Refer to Table 1-3 on
page 1-7. Restart compressor repeatedly until continuous operation is
achieved.
NOTE: The control circuit
breaker will have to be
reset if the compressor has
shutdown three times.
4c. Defective compressor
motor.
4c. Refer to Appendix A:
Customer Brooks Automation Technical Support
Information on page 7-2
and contact your local
Brooks Automation Customer Support Center.
5a. Loss or degradation of
power from the source.
5a. Check that line voltage
is correct on all phases.
5b. Defective motor windings.
5b. Check running current on all phases.
Refer to Appendix A: Customer Brooks Automation Technical Support
Information on page 7-2
and contact your local
Brooks Automation Customer Support Center.
Brooks Automation
Revision A
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Appendices
Appendix B: Troubleshooting Procedures
Table 7-1: Compressor Troubleshooting Procedures
Problem
Possible Cause
Corrective Action
6a. Cooling water tempera- 6a. Refer to Table 1-3 on
ture or heat exchanger tem- page 1-7 and verify proper
perature is too high.
operation of facility cooling water.
6b. Compressor Motor
Temperature is too high.
6b. Check the voltage on
the three input legs.
Check the current on the
three input legs.
Refer to Appendix A: Customer Brooks Automation Technical Support
Information on page 7-2
and contact your local
Brooks Automation Customer Support Center.
6c. Voltage has been lower
than 342 VAC @ 60 Hz for
longer than 60 minutes.
6c. Check voltage.
Refer to Appendix A.
6d. Voltage has been 342
VAC, 60 Hz with insufficient water flow of 3.25
gpm for 60 minutes.
6d. Increase water flow
rate to 3.25 gpm.
Refer to Appendix A: Customer Brooks Automation Technical Support
Information on page 7-2.
7a. Front panel power
switch in OFF position.
7a. Set front panel power
switch to ON position.
6. Compressor has been
automatically shut off.
CB1 and CB2 are in the
ON (1) position.
Power Indicator OFF
Status Indicator ON
7. CB1 and CB2 in ON (1)
position but compressor
will not run or start.
Power Indicator OFF
Status Indicator OFF
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Appendices
Appendix B: Troubleshooting Procedures
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Table 7-1: Compressor Troubleshooting Procedures
Problem
8. Compressor is running.
Power Indicator ON
Status Indicator ON
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Possible Cause
Corrective Action
8a. Cooling water temperature is out of range.
8a. Refer to Appendix A:
Customer Brooks Automation Technical Support
Information on page 7-2
and verify proper operation of facility cooling
water.
8b. Helium Supply/Return
pressure ratio is below 150
psig.
8b. Refer to Section 4 and
verify OFF Condition
Helium System Pressure
Verification on page 5-3.
8c. Helium Return pressure
is below 100 psig.
8c. Check for loose helium
flex line couplings or
leaks.
8d. Defective component.
8d. Refer to Appendix A:
Customer Brooks Automation Technical Support
Information on page 7-2
and contact your local
Brooks Automation Customer Support Center.
Brooks Automation
Revision A
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Appendices
Appendix C: Diagrams
Appendix C: Diagrams
Brooks Automation
Revision A
8040597
7-9
2.5A
CB2
1 2
1 2
3
3 4
3 4
PS
1
2
2
2
1
WHT
6
6
P14
J11
P11
A
J6
2
P2
ENL13
IXFM1
C3
MOL1
B
8135023G001
Compressor Analog Interface
C2
Compressor Control Module
J2
5
5
LAMP, 24V
P6
6
4
4
4
LT1
P16
WHT/RED
WHT/BLU
T
A
M1
C1
3
3
J16
P15
R
S
C
PHASE MONITOR
PM1
1
BLK,#12
5
3
M1OL
98
YEL,#12
RED,#12
97
#12
GRN/YEL,
2
2
WHT
5
5
X
1
P4
T2
N
.02A
GND
B
T3
T2
T1
BLK
U
RED
YEL
V
W
COMPRESSOR
P4
J4
P10
J10
J9
P5
P9
REGULATIONS.
APPLICABLE
7671A) OR ANY NEW
ACT (42 USC SECTION
THE FEDERAL CLEAN AIR
UNDER SECTION 602 OF
I ODS'S AS DEFINED
WITH OR CONTAIN CLASS
NOT BE MANUFACTURED
SELLER'S GOODS SHALL
STATEMENT
ENVIRONMENTAL
J5
1 2 3 4 5 6 7 8
1
2
3
4
CB1
Y
P3
BLK
BRN
U
Z
P2
RED
P1
YEL
V
BLU
BLU
Z
2
X Y
1
1
WHT/BLU
2
1
1
Hel1
Hel2
CLR
WHT
WHT/ORN
WHT/BLU
WHT/YEL
WHT
ORN
WHT
WHT
C
Hel1R
CLR
WHT/BLU
(Hel2R)
BLK
+5
BLK
+5
RED
RED
WHT/BLU
LT1
Red, Status Indicator
P27
J26
J27
IN STRICT CONFIDENCE.
THIS INFORMATION AND DESIGN
SHIP AND AGREE TO MAINTAIN
LEDGE CTI-CRYOGENICS OWNER-
WHO BY THE USE HEREOF ACKNOW-
WITH A GENUINE NEED-TO-KNOW
EXCEPT TO AUTHORIZED PERSONS
OUTSIDE CTI-CRYOGENICS
BE COPIED OR DISTRIBUTED
CTI-CRYOGENICS AND MUST NOT
ARE THE PROPERTY OF
AND DESIGN DISCLOSED HEREIN
IN WRITING, THE INFORMATION
EXCEPT AS OTHERWISE AGREED
PROPRIETARY NOTICE
P26
He
130 °F
SW1
TS1
WHT/ORN
THERMISTER
WATER IN
THERMISTER
WATER OUT
TS2
130 °F
Water
QA APPVL
PROD
PRE-PROD
ENG APPVL
ENG APPVL
ENG APPVL
CHECKED
DRAWN
SUPPLY PRESSURE
RETURN PRESSURE
LT2
Green, Pump Run
NOTES: SHIELDING ON PRESSURE SENSE CABLES ARE NOT SHOWN.
-
YEL
+
-
+
BLK
RED
BLU
C
REV
2
JS
BC
D
MR
BC
PA
BW
BW
BW
BY
Comp
TS3
D
01/00
01/00
01/00
01/00
01/00
01/00
01/00
01/00
DATE
B
SIZE
WHT/YEL
WHT/BLU
4
31949
CAGE CODE
K1-COMMON
WHT/BLU
Thursday, June 16, 2005
DWG NO
3
06/05
95
1
E
SHEET
K1b
K1
Lockout relay
DATE
E
8135399P002
HELIX TECHNOLOGY CORPORATION
CTI-CRYOGENICS
K1a
M1
WHT/BLU
ON-BOARD IS-1000 HV
WHT/YEL
A1
CONTACTOR
A2
UNLOAD SOLENOID
OIL SOLENOID
Release per ECO 17233
DESCRIPTION
REVISIONS
2
5
M1OL
1
96
HH
B
OF
EMO
REMOTE
APPROVED
A
A
WHT/BRN
380-480 VAC,50/60 Hz
1 2 3 4 5 6 7 8
1
2
12
12
2
11
11
1
10
9 10
2
1 2 3 4 5 6 7 8
1
1 2 3 4 5 6 7 8 9
1
A B C
A B C
B
A
WHT/BRN
3 4
3 4
1
WHT/ORN
8040597
7-10
1 2
1 2
2
2
REV
1
2
3
4
Appendices
Appendix C: Diagrams
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Figure 7-2: On-Board IS 1000 Compressor Helium Flow Diagram
6
6
Figure 7-3: On-Board IS 1000 Compressor Electrical Schematic
Brooks Automation
Revision A
2.5A
CB2
X
P3
3 4
3 4
1 2
1 2
PS
2
3
FILTER
2
2
1
1
WHT
6
6
P14
J11
P11
P2
ENL13
IXFM1
MOL1
B
8135023G001
Compressor Analog Interface
Compressor Control Module
J2
5
5
A
J6
4
4
LAMP-24V
P6
2
4
6
3
3
LT1
WHT/RED
WHT/BLU
C
A
M1
SET OL TO 21A
T3
T2
T1
U
W
V
BLK
YEL
RED
COMPRESSOR
P4
J4
P10
J10
J9
P5
P9
REGULATIONS.
APPLICABLE
7671A) OR ANY NEW
ACT (42 USC SECTION
THE FEDERAL CLEAN AIR
UNDER SECTION 602 OF
I ODS'S AS DEFINED
WITH OR CONTAIN CLASS
NOT BE MANUFACTURED
SELLER'S GOODS SHALL
STATEMENT
ENVIRONMENTAL
J5
1 2 3 4 5 6 7 8
J16
P16
P15
R
S
T
1
PHASE MONITOR
PM1
3
5
BLK,#12
M1OL
98
YEL,#12
RED,#12
97
#12
GRN/YEL,
2
2
WHT
5
5
1
RED
N
.02A
GND
1 2 3 4 5 6 7 8
1
2
3
4
CB1
P2
Y
P1
Z
BLK
U
BLK
YEL
V
YEL
P4
BLU
Z
2
X Y
2
1
1
WHT
WHT
WHT/ORN
WHT/BLU
WHT/YEL
WHT
ORN
C
CLR
He
P27
J26
130 °F
TS1
J27
PROPRIETARY NOTICE
P26
IN STRICT CONFIDENCE.
THIS INFORMATION AND DESIGN
SHIP AND AGREE TO MAINTAIN
LEDGE CTI-CRYOGENICS OWNER-
SW1
WHT/ORN
WHO BY THE USE HEREOF ACKNOW-
WITH A GENUINE NEED-TO-KNOW
EXCEPT TO AUTHORIZED PERSONS
OUTSIDE CTI-CRYOGENICS
BE COPIED OR DISTRIBUTED
CTI-CRYOGENICS AND MUST NOT
ARE THE PROPERTY OF
AND DESIGN DISCLOSED HEREIN
IN WRITING, THE INFORMATION
EXCEPT AS OTHERWISE AGREED
Hel1
Hel2
CLR
WHT/BLU
Hel1R
BLK
+5
(Hel2R)
+5
RED
WHT/BLU
LT1
Red, Status Indicator
Water
TS2
130 °F
THERMISTER
WATER IN
TS3
Comp
QA APPVL
PROD
PRE-PROD
ENG APPVL
ENG APPVL
ENG APPVL
CHECKED
DRAWN
THERMISTER
WATER OUT
SUPPLY PRESSURE
RETURN PRESSURE
LT2
Green, Pump Run
NOTES: SHIELDING ON PRESSURE SENSE CABLES ARE NOT SHOWN.
RED
BLK
WHT
+
-
+
-
YEL
BLK
RED
BLU
C
A B C
AB C
B
REV
6
JS
BC
D
MR
BC
PA
HH
HH
HH
BY
WHT/YEL
WHT/BLU
D
01/00
01/00
01/00
01/00
01/00
6/03
6/03
6/03
DATE
WHT/YEL
A1
4
B
SIZE
K1a
M1
CONTACTOR
OIL SOLENOID
WHT/BLU
3
1
K1b
K1
5
Lockout relay
95
2
M1OL
HELIX TECHNOLOGY CORPORATION
CTI-CRYOGENICS
K1-COMMON
WHT/BLU
31949
CAGE CODE
Thursday, June 16, 2005
DWG NO
E
96
6/16/05
E
DATE
8135399P001
ON-BOARD IS-1000 COMPRESSOR
A2
UNLOAD SOLENOID
Release per ECO 17233
REVISIONS
WHT/BRN
DESCRIPTION
WHT/ORN
SHEET
APPROVED
1
OF
REMOTE EMO
HH
B
A
1
1
WHT/BLU
2
12
2
12
11
1
11
1
10
9 10
1
2
1 2 3 4 5 6 7 8
1
2
1 2 3 4 5 6 7 8 9
WHT/BRN
B
3 4
3 4
A
Brooks Automation
Revision A
1 2
1 2
A
200-230 VAC, 50/60Hz
1
REV
6
1
2
3
4
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
Appendices
Appendix C: Diagrams
(8135399P002, High Voltage)
6
6
Figure 7-4: On-Board IS 1000 Compressor Electrical Schematic
(8135399P001, Low Voltage)
8040597
7-11
Appendices
Appendix C: Diagrams
On-Board IS 1000 Compressor
Installation, Operation and Maintenance Manual
This Page Intentionally Left Blank
8040597
7-12
Brooks Automation
Revision A
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