camLine Product Catalog - All

camLine Product Catalog - All
LineWorks
products
Jetzendorfer Str. 6 ƒ D-85238 Petershausen ƒ Germany ƒ Tel +49-8137-935-0 ƒ Fax +49-8137-935-235
www.camline.com
The information contained in this
document is subject to change without
notice. camLine GmbH assumes no
responsibility for any errors which may
appear in this document. All company
names and product names are trademarks or registered trademarks of
their respective holders. The following
are trademarks of camLine Datensysteme für die Mikroelektronik GmbH:
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camLine
CAPS
LineWorks
LineWorks ECoFrame
LineWorks ETM
LineWorks PR
LineWorks RM
LineWorks SPACE
LineWorks WIP
LineWorks UA
Company Profile and Fact Sheet
LineWorks SPACE
Statistical Process Analysis and Control Environment
LineWorks PULSE
Equipment Efficiency Monitoring and Optimization
LineWorks RM
Recipe Management
LineWorks WIP
Work in Process Tracking
LineWorks ECoFrame
Equipment Connection Framework
LineWorks iGate
Information Gateway
LineWorks UA
User Administration
CAPS
camLine Application Server
PAA
Part Average Analysis
Company Profile and Fact Sheet
Company Name
Founded
Headquarter
Mission
camLine GmbH, a company of the camLine Holding AG
X
August 1989
X
camLine is profitable since 1993.
X
The company has about 46 employees.
Jetzendorfer Str. 6
85238 Petershausen, Germany
Phone: +49-8137-935-0
Fax: +49-8137-935-235
Email: sales@camline.com
www.camline.com
camLine GmbH distributes effective IT solutions for production automation,
process data management and process data analysis worldwide. The manufacturing execution systems (MES) of camLine are designed for extreme reliability and massive data throughput to meet the requirements of a 24/7
production.
camLine’s IT solutions are installed in various business sectors such as microelectronics, solar cell production, semiconductor production, or the automotive industry. Customers include Audi, Bosch, Continental TEMIC, Fujitsu,
IBM, Infineon, OSRAM, and SolarWorld, to name but a few. The company
provides worldwide support through local distribution partners in the U.S.,
Taiwan, Japan, and Singapore.
Business Units
7. September 2006
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Customer Specific IT Projects
X
Software Product Development
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Consulting
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Product Integration and Tool Connection
Company Profile and Fact Sheet
1
Company Profile
and Fact Sheet
Product
Overview
TM
LineWorks Product Family
TM
The LineWorks product family provides software modules for a fabwide
production automation solution. Each LineWorks module can be employed
separately in production. The combined usage makes up a comprehensive
CIM solution (Computer Intergrated Manufacturing) meeting the IT requirements between the planning systems (e.g. SAP/R3) and production tools.
X
LineWorks SPACE (Statistical Process Analysis and Control Environment)
Online process and product data management and analysis,
online SPC, offline SPC, SPC reporting
X
LineWorks SQM (Supplier Quality Management)
Generic quality portal for suppliers: quality checks and reporting of incoming materials before shipment
X
LineWorks STARGATE (SPC Quality Reporting)
Overview of the performance indexes for production processes to assess
the quality of SPC activities
X
LineWorks PULSE (Equipment Efficiency Monitoring and Optimization)
Recording of any equipment data
Fabwide OEE analysis (Overall Equipment Efficiency)
X
LineWorks RM (Recipe Management)
Central administration of process recipes and control parameters for all production tools
7. September 2006
Company Profile and Fact Sheet
2
Company Profile
and Fact Sheet
X
LineWorks WIP (Work in Process Tracking)
Process security and transparency through tracing and verification of process steps (sequence) including order, lot, serial number and used material
tracking
X
LineWorks ECoFrame (Equipment Connection Framework)
Generic tool connection
X
LineWorks iGate (Information Gateway)
Visualization framework for Web based reporting
X
LineWorks UA (User Administration)
Common user access control for all LineWorks products
camLine Application Server CAPS
TM
All LineWorks products are based on the CAPS libraries guaranteeing the
performance and stability required in 24/7 environments.
Customers
Contacts outside
Germany and
Distribution
Partners
7. September 2006
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AMS
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OSRAM Opto Semiconductors
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Atmel
X
Panasonic
X
Audi AG
X
Pari
X
Chartered Semiconductors
X
ProMOS
X
Continental TEMIC
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Qimonda
X
Deutsche Cell GmbH
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Robert Bosch GmbH
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Dialog Semiconductor GmbH
X
Samsung
X
EPCOS AG
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Sandia
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Fujitsu
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Silterra
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Honeywell
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Sonion
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IBM
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ST Microelectronics
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Infineon Technologies AG
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Sumco
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Innolux
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Sunpower
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International Rectifier
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SVA NEC
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LSI Logic Corporation
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Toppan
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Microchip
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Trecenti Technologies Inc.
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NEC
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TSMC
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Nokia Mobile Phones
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Winbond
X
Olympus
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ZMD Zentrum Mikroelektronik
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David Hsu, Taiwan – email: david.hsu@camline.com
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Aneric Enterprises, Singapore
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Brooks Automation Inc., USA, worldwide distribution of LineWorks SPACE
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Yamatake Industrial Systems Co. Ltd., Japan
Company Profile and Fact Sheet
3
LineWorks SPACE
TM
Statistical Process Analysis and Control Environment
LineWorks SPACE provides enterprise-wide SPC including online analysis of
measurement and process data. SPACE stores all collected data in one central database for traceability according to ISO 9000 standards. Operators
and engineers are instantly informed about SPC violations.
SPACE Navigator for Offline SPC
SPACE Monitor for Online SPC
SPACE Reporting
for Reports
25. August 2006
LineWorks SPACE 5.1
1
Online SPC with SPACE Monitor
The online component SPACE Monitor can be interactively integrated into
the production process. Samples sent to SPACE are evaluated according to
definable rules within a fraction of a second. The result is immediately
available to the operator or to the equipment. SPACE extends classic SPC by
providing Corrective Actions and Trouble Shooting Guides.
After a violation has occurred in production operators or engineers are informed
Flexible SPC Administration
X
SPC administrator can configure under
by immediately receiving a chart. The
which conditions which work stations
chart will be automatically displayed by
will receive a chart to be displayed.
SPACE Monitor with the doubtful sample highlighted.
X
SPC administrator can define the data
and attributes to be displayed for the
The operator is offered a list of typical actions to correct the problem. If unsure
selected sample.
X
which corrective action (CA) to take
they can inform themselves in a trouble
shooting guide (TSG). At last the opera-
tor is requested to comment their action.
Raw value chart and attributes on raw
value level
Flexible Display
X
Users can reset the date for moving
charts
A CA can have some attributes which
control further actions. You can auto-
X
ments for each sample.
matically flag samples as invalid to prevent it from being included in further cal-
X
Click on a sample to view corrective
action or comment input
culations, e.g. in case of wrong measureX
ments.
Users may choose CAs, TSGs, or com-
View pre-process data in sample history for selected sample
Or you might want to build a direct connection to the production equipment
(through SPACE Listener). SPACE Moni-
X
Launch external program, e.g. wafermap viewer
tor offers the following features:
Show or Hide
¾ histograms
¾ grid
¾ calendar axis
¾ markers for violations, com-
ments, missing comments, etc.
¾ flagged samples
¾ specifications
¾ configurable axis labels
¾ linear / logarithmic,
automatic / manual scaling
25. August 2006
LineWorks SPACE 5.1
2
Offline SPC with SPACE Navigator
The process engineer is offered a powerful tool to analyse and administer
process data. You can view the data in offline charts as soon as they have
been collected by LineWorks SPACE.
Offline SPC with SPACE Navigator offers
X
the following features:
Raw value chart and attributes on raw
value level
Sample Processing
Calculation Control
X
Calculate control limits
X
Assign corrective action
X
Calculate process indexes
X
Add comment to any sample
X
Flag samples and exclude them from
Flexible Display
X
displayed for the selected sample.
X
X
X
View pre-process data in sample histo-
Launch external programs,
e.g. wafermap viewer
Click on a sample to view corrective
action or comments
X
calculations
Define the data and attributes to be
Export data to external tools like
qs-STAT, Microsoft EXCEL etc.
ry for selected sample
Show or Hide
¾ histograms
¾ grid
¾ calendar axis
¾ markers for violations,
available comments, missing comments, etc.
¾ specifications
¾ configurable x-tick labels
¾ linear / logarithmic, auto-
matic / manual scaling
25. August 2006
LineWorks SPACE 5.1
3
Reports with SPACE Reporting
The generation of regular reports makes sure that the management will always get an up-to-date overview. Reports are generated periodically – such
as daily, weekly, monthly, or quarterly. Standard reports are provided, Cpk
and other process index values can be automatically scheduled and calculated.
SPACE Reporting is integrated into
X
SPACE Navigator and offers the following features:
X
X
customer-specific formulas
X
sults can be visualized and exported in
date or at periodical time intervals
various formats such as PDF (Adobe
Acrobat), HTML (Web browsers) or
User-definable report cycles
CSV (MS Excel)
Calculation of thousands of process
X
PDF format.
batch processes
Cpk calculation from non-normal
data for supported distribution mod-
els (requires qs-STAT)
25. August 2006
LineWorks SPACE 5.1
Use Web Reporting to view already
calculated reports in the Intranet in
capability coefficients in overnight
X
Export report results – calculation re-
Calculations performed at an absolute
(e.g. bi-weekly)
X
Customer calculations by integrating
X
Searches that search for specific re-
port results (like »bad performing
charts«)
4
SPC Administration with SPACE Navigator
SPACE Navigator presents the SPACE system as a tree hierarchy. You are enabled to arrange even thousands of control charts in a clear and easy-to-use
structure.
Easy Navigation
X
Powerful Search
Easy navigation like in Windows Ex-
X
plorer
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or »Search and Replace« features
All key structures, control charts and
reports are arranged under the »Data
Sources« node.
X
Quick changes by powerful »Search«
Multi-Language Support
SPACE Navigator, as well as SPACE Monitor can be used with the following GUI
Corrective actions, trouble shooting
languages:
guides and alarms can be found under
the »Events« node.
X
Bookmarks for a fast view of objects
or charts of interest
Fast Control Chart
Administration
X
X
X
English
X
German
X
Japanese
X
Chinese
Asian Character Support
Existing control charts can be used as
SPACE fully supports the usage of texts
templates.
with Multibyte characters, e.g. to enter
Properties can be inherited through
comments in Chinese language.
SPACE Navigator object hierarchy.
X
Pasting attributes to copy settings
from one chart to multiple other charts
25. August 2006
LineWorks SPACE 5.1
5
Integrated
SPC Violation Handling
The online-violation handling together
X
Use your existing instructions as
with the chart display allows immediate
SPACE trouble shooting guides by
reactions in the production line.
simply defining the visualization program and the document path.
Operators or engineers are informed
about violations by charts sent to their
Track Corrective Actions
SPACE Monitor or via Email.
X
Sequential assignment of different
The integration of customer business
corrective actions to the same rule vio-
rules is provided through an open event-
lation of a sample will automatically
broadcasting interface.
create an audit trail.
Appropriate Reactions
The operator can perform various actions when a sample has violated a specific SPC rule:
X
X
X
Append comments to a sample:
– Choose comments from predefined
list
– Enter free comments
– Pre-defined lists can be linked to
Enter an online comment when the
specific rule violations in specifc
chart is displayed.
charts
Assign the appropriate corrective
– Corrective action attributes track
current state (immediate, in-
actions to the sample.
progress, resolved)
25. August 2006
LineWorks SPACE 5.1
6
Configurable
SPC Violation Types
X
X
Violation of specification limits with
X
N in zone C
one- or two-sided limits
X
N rising or falling in a row
X
N[%] raw values above/below specifi-
Violations of control limits
x , S, R,
one- or two-sided limits for each statistical value
X
cation limit
X
Moving average of mean values,
standard deviation, or range (identical-
limit
X
ly or exponentially weighted)
X
Run above/below center line
X
Linear trend up and trend down esti-
N[%] raw values above/below control
Mean value above/below specification
limit
x , S, R alternating up and down
X
N
X
N violations of specific types within the
mation of mean values
last M samples (4 configurable repeat
X
N of M in zone A or B
X
N of M in zone A or beyond
rules)
Specification Administration
Specification limits are delivered by the
X
A Learning Mode is provided to cause
input process together with the sample
specification changes sent together
data or they are administered within
with the sample automatically change
SPACE Navigator.
the specification limits administered by
X
Special cases can be handled individu-
LineWorks SPACE.
ally.
25. August 2006
LineWorks SPACE 5.1
7
Control Limit Calculation
SPACE allows to automatically calculate
Automatic control limit checks can be set
control limits. Calculated limits are dis-
up, e.g. limits within spec, not wider
played together with the existing limits
than previous limits, no violations, etc.
to accept or reject them.
A control limit wizard allows to calculate,
accept or reject new limits for a larger set
of charts.
Benefits
X
X
X
X
Statistical Designs
Extended limits for process models
Calculation options are administered as
with considerable sample-to-sample
statistical designs. A statistical design is
spread (e.g. for batched processing)
provided as a standard (e.g. »6-sigma«)
Calculation with customer specific for-
by the inheritance mechanism of SPACE.
mulas through an open interface (see
If parameters need special treatment
»Integration Kit« below)
they can override the standard.
Wizard to quickly review or recalculate
Once a chart is assigned to a statistical
control limits for a numerous charts
design, control limits can be calculated
Limits can be marked as fixed to pre-
with a one button-click.
vent them from being overwritten by
Advanced calculation options can be
subsequent calculations.
used, such as distribution models, several choices for location and spread estimators, acceptance limits, etc.
25. August 2006
LineWorks SPACE 5.1
8
Non-Normal Distributed Data
Calculation of process indexes and con-
X
Rayleigh distribution
trol limits for non-normal distributed
X
Weibull distribution
X
Johnson transformation
X
Mixed distribution
X
Box-Cox transformations
X
Pearson distribution system
data is supported by the following distribution models (qs-STAT is required):
X
log-normal distribution
X
root transformed normal distribution
X
folded and extended normal distr.
Automated Prerun
With the »Automated Prerun Support«
After prerun completion the control lim-
feature the SPC administrator's work will
its are automatically checked against a
be made easier. After a predefinable
choice of rules. An email address can be
number of samples have been collected,
provided to automatically send a notifi-
the calculation of control limits is auto-
cation. A prerun can be started at any
matically triggered without any human
time.
intervention.
Variable Sample Sizes
The »Variable Sample Sizes« feature al-
This enables the fast adjustment of con-
lows dynamic adjustment of control lim-
trol limits to the actual sample size with-
its in the case of missing data or extend-
out any recalculation needed:
ed sample sizes due to dynamic sampling
strategies.
X
ple size cannot be fixed, for example
For each possible sample size, control
limits are calculated in advance and
stored in a look-up table.
25. August 2006
Handling of situations where the sam100% sampling with varying lot sizes
X
Zero-effort implementation of adaptive sampling techniques
LineWorks SPACE 5.1
9
Notification
Notifications allow the automatic gener-
The mail contains all important data
ation of emails to inform all responsible
about the incident and the violating
persons about particular incidents, e.g.
sample. The mail contents are configura-
an SPC rule violation. By simply clicking
ble via mail templates.
on the link the receiver can display the
SPACE chart.
LineWorks Notification
Manager
LineWorks Notification Manager (NFM)
It offers an elegant way to manage mail
is an extension of LineWorks SPACE.
templates, mail addresses and mailing
lists.
25. August 2006
LineWorks SPACE 5.1
10
Sample History
The sample history function provides
Simply click a button in the chart to dis-
support for:
play all samples collected for a given key
X
X
Checking for problems in upstream
such as lot, tool and/or vendor.
process steps for a given lot or wafer
The sample list shows keys, collection
Displaying data for all lots from a given
date and sample value. Mean, Minimum
wafer manufacturer within the last
and Maximum values are displayed as
week
dot and whiskers, and the values are
X
Jumping to the chart of a pre-process
X
Launching external program, e.g. for
the wafermap of a pre-process
normalized to upper (= 1.0) and lower
(= -1.0) specification limits.
By filtering and sorting the sample list
can be narrowed down.
25. August 2006
LineWorks SPACE 5.1
11
Searches
Based on freely defined conditions you
X
Search for charts with specific settings
can search for various objects or individ-
X
Search for charts with low Cpk or high
ual samples. Searches are stored in the
SPACE Navigator tree for repeated execution. You can work with the results as
violation percentage
X
tools or processes
if with objects, all actions are supported,
X
such as:
Search for charts for specific products,
Search for charts with no data collected since a certain time period and set
X
Search for uncommented SPC violations and add a comment
X
X
Search for unwanted sample data belonging to a specific lot and flag them
X
them to »Archived«
Search for charts with limits being too
Specific report results (like »bad performing charts«)
Over 25 different conditions can be combined to define the search criteria.
old or wide and change the control
limits
25. August 2006
LineWorks SPACE 5.1
12
Revisioning
Changes of logical data sources and subordinated objects and even of samples
are automatically determined. They
cause to generate revisions of these objects resulting in an audit trail by whom,
when and why an object was changed.
An additional revision tab allows to review the old revisions in detail, perform
comparisons and to revert to a previous
object revision.
Export Interfaces
The »Export Interfaces« feature allows
the export of sample data from control
charts, queries or query groups to various file formats. The export can be automated, e.g. to provide external systems
with measurement data from SPACE.
There are export interfaces available for:
X
qs-STAT
X
Microsoft Excel (.csv)
X
ASCII files (.txt)
Further formats are supported on
demand.
25. August 2006
LineWorks SPACE 5.1
13
User Permissions
The »User Permissions« feature is used
to administer users, user groups, responsibility domains and security levels in
LineWorks SPACE.
Objects are assigned to an owner and a
responsibility domain, e.g. »furnace
cell«, »lithography« etc.
Only users who are either owner of the
object, or have appropriate rights in the
objects responsibility domain, can perform an administrative function. Without read permission, the corresponding
objects is invisible.
25. August 2006
LineWorks SPACE 5.1
Permission Objects
X
Data Sources
X
Logical Data Sources
X
SPC Channels
X
Specification Channels
X
Folders
X
Alarms
X
Corrective Actions
X
Trouble Shooting Guides etc.
Permissions per Object
X
Read
X
Write
X
Delete
X
Delete cascading
X
Create subordinated objects etc.
14
Calculated Characteristics
The »Calculated Characteristics« feature
Advanced Calculation
Option (ACO)
offers the ability to define characteristics
In addition to the standard formulas pro-
which are determined from other (not-
vided by SPACE, you can add your own
calculated) characteristics using standard
formulas by supplying a compiled Java
or custom formulas.
class. The class calculates the new pa-
It allows the calculation from two subse-
rameter at runtime.
quent measurements with the result
Furthermore, runtime parameters can be
stored as new calculated sample.
supplied in a formula text area that con-
You may want to measure the film thick-
trol the calculation, such as the parame-
ness of the oxygen layer before and after
ters a,b,c in »c log( a x + b)«.
etching. The calculated characteristic
Specification limits for calculated param-
may be the etch removal, i.e. the differ-
eters are provided by the SPACE specifi-
ence of the film thickness before and af-
cation administration or by the formula
ter the etching.
itself.
For more information, see the separate
LineWorks SPACE ACO specification
sheet.
25. August 2006
LineWorks SPACE 5.1
15
Moving Charts
The »Moving Charts« feature offers the
X
following possibilites:
The moving value computations start
anew after process target shifts, after a
x , R, S
X
EWMA of
X
Overlay display of EWMA and
Shewhart chart
X
Moving standard deviation
reset of the calculation start or after control limit violations in the x-bar chart.
Moving average (MA) or Moving Median (MM)
25. August 2006
LineWorks SPACE 5.1
16
Normalized Charts
By displaying normalized values you can
Each unit inspected is usually classified as
combine charts with different specifica-
either »conforming« (nondefective) or
tions. For example, you might want to
»nonconforming« (defective) to the
see different products in a single chart to
specifications. The attributes charts of-
detect equipment trends earlier.
fered by SPACE are:
Normalized charts offer the following
X
p chart for fraction nonconforming
features:
X
np chart for number nonconforming
X
Normalize to target
X
c chart for nonconformities
X
Normalize to specification
X
u chart for average number of non-
X
Normalize to control limits
X
Normalized and real-value scale
X
Cpk value calculation across different
conformities per unit
specs
Attributes Charts
The »Attributes Charts« feature offers
the possibility to display the defects in a
unit without representing any numerical
values of the measurement parameter.
25. August 2006
LineWorks SPACE 5.1
17
Matching Charts
To facilitate commonality analysis, you
can configure the chart to connect samples with common attributes using colored lines, e.g. one line per tool/chamber
combination.
You show or hide each line by a simple
mouse-click.
25. August 2006
LineWorks SPACE 5.1
18
Multi-Parameter Charts
Multi-parameter charts (MPC) are built
Monitor for displaying simultaneously
to align samples of related parameters
transmitted parameters. In SPACE Navi-
together into one window. Multi-param-
gator, you can show arbitrary parameter
eter charts can be used online in SPACE
combinations in MPCs offline.
25. August 2006
LineWorks SPACE 5.1
19
Displaying the
offline chart
for a query
Queries
Using the »Queries« offline SPC feature,
Once a query is defined, it will be saved
you can easily create free queries against
in the database and can be re-
the LineWorks SPACE database using a
executed with one button click.
GUI instead of SQL.
Query results are represented in offline
Queries can be defined independently
from the control charts, or can be aliased
to an existing control chart.
charts and can be used to export data
Simple query building...
... with the aid of query templates.
Queries can ask for raw values or compressed data only
25. August 2006
LineWorks SPACE 5.1
20
Seamless
embedding...
...of input forms in an
existing Intranet structure using URL referencing of input forms
and follow-up URLs
after data collection
Supply of...
...logical context keys with:
¾ fixed values from URL or generator property file
¾ choice lists
¾ input fields from URL or generator property file
Web Data Collection
with SPISE
SPISE (LineWorks SPACE Input Server) is a
X
Web server that provides an HTML gen-
Automatic generation of input fields
on raw value level
erator for manual data input forms.
X
Input of raw values or statistical values
It validates the entered data and delivers
X
Validation of input against limits, data
it to the LineWorks SPACE online server,
providing feedback on violations to the
formats and missing values
X
operator. SPISE offers features such as:
X
tion: p, np, u, or c data can be collected for various defect classes
Include mechanism for form generator
property files and overwriting proper-
Support of attributes chart data collec-
X
Optional user login protection using
ties in the URL reduces effort for crea-
the LineWorks SPACE »User Permis-
tion of similar forms
sions« feature and the cookie mechanism
25. August 2006
LineWorks SPACE 5.1
21
Customer Specific
Calculation Server
Customer specific calculation strategies
X
OLE Automation proxy related to the
for control limits and process indexes can
camline Application Server (CAPS) or
be realized by the use of an extra server
CORBA middleware including a type li-
that is integrated into LineWorks SPACE
brary to integrate arbitrary OLE auto-
via the »Integration Kit«. The open inter-
mation capable clients such as Delphi,
face supports calculations from individu-
Visual Basic, Java and C++
als or compressed statistical data.
X
Java sample input API as jar library
Integration Kit
X
C-DLLs with generated C style stub
functions via the camline Application
The »Integration Kit« forms the basis for
Server (CAPS) middleware and CORBA
customer input processes, event sub-
for Windows clients (further clients on
scribers and hook functions.
demand)
It comes with support and example programs for several middleware, programming languages and platforms. The following connections are supplied:
X
X
X
Java Administration API to manage
various SPACE objects such as
– SPC channels
– Folders
Data upload from MS-Excel compati-
– Bookmarks
ble CSV (comma separated value) files
– Multi-parameter charts
IDL files for any CORBA IIOP clients
– CAs, TSGs, Alarms
25. August 2006
LineWorks SPACE 5.1
22
Glossary
Advanced Calculation Option (ACO)
Normalized Charts
Support for customer-specific formulas
Normalized charts plot values relative to
for calculated characteristics.
their specification or control limits, allowing to compare data with different
Calculated Characteristics
Definition and usage of parameters that
are calculated from other parameters.
specs in a common chart.
Attributes Charts
SPACE offers p, np, c, or u charts for at-
Control Limit Calculation
Automatic calculation of control limits
tribute characteristics.
from control charts and automatic im-
Queries
port of the calculated control limits with
Point and click definition and storage of
or without manual interaction (prerun).
free queries against the SPACE database
using a GUI instead of SQL.
Email and LineWorks NFM
(Notification Manager)
Reporting
Automatic generation of emails when an
Automatic scheduling and generation of
SPC violation is detected or after auto-
Cpk and other process index values for a
mated preruns. NFM is used to manage
group of queries; visualization in reports
email addresses, mailing lists, and mail
and export in various formats like PDF,
content templates.
HTML or CSV.
Export Interfaces
Specification Administration
Export of sample data from control
Maintenance of specification limits pro-
charts or queries to various file formats.
vided by fab data sources or manual in-
Integration Kit
put.
Implementation of your own customer
Trouble Shooting Guides
input processes, event subscribers, hook
Assignment of documents like flow-
functions, or calculation strategies for
charts or intranet web pages to an SPC
SPC indices and control limits.
violation to assist the operator or engi-
Matching Charts
neer in handling SPC violations.
To faciliate commonality analysis the user
User Permissions
can configure the chart to color by com-
Administration of users, groups, respon-
mon attributes, e.g. one line per tool/
sibility domains and security levels.
chamber combination.
Variable Sample Sizes
Moving Statistics
Dynamical adjustment of control limits in
Moving charts are based on statistics
the case of missing readings or extended
that are calculated from more than the
sample sizes due to dynamic sampling
current sample. SPACE supports EWMA
strategies.
( x ), EWMA (S), EWMA (R), Moving Average (x), Moving Median (x), Moving
Web Data Collection (SPISE)
HTML form generator for manual data
Stdev ( x ).
input forms.
Multi-Parameter Charts
Alignment of samples of related param-
Web Reporting
Browser access to reports and automatic
eters in one window.
generation of PDFs from report results.
25. August 2006
LineWorks SPACE 5.1
23
Jetzendorfer Strasse 6
85238 Petershausen, Germany
phone: +49-8137-935-0
fax: +49-8137-935-235
email: sales@camline.com
web: www.camline.com
LineWorks Product Family
LineWorks products include:
The LineWorks product family provides
X
SPACE – Statistical Process Control
an automation solution with or without
X
SQM – Supplier Quality Management
MES system. Like every other LineWorks
X
product LineWorks SPACE is based on
X
the camLine Application Server (CAPS).
STARGATE – SPC Quality Reporting
PULSE – Equipment Efficiency and Optimization
X RM – Recipe Management
All interfacing technologies supported
X
WIP – Work in Process Tracking
by CAPS (CDLB, CORBA, COM, TIB/Ren-
X
dezvous) are also available to LineWorks
X
ECoFrame – Equipment Connection Framework
iGate – Information Gateway
SPACE.
X
UA – User Administration
LineWorks SPACE Server Operating Systems
X
HP-UX 11.i
X
Sun Solaris 5.8 and 5.9
X
SuSE Enterprise Server 8 and 9
X
MS Windows NT, 2000, XP
Further systems or versions on demand
LineWorks SPACE Client Operating Systems
X
MS Windows NT, 2000, XP
Further systems or versions on demand
LineWorks SPACE Middleware
X
camLine Application Server (CAPS) with camLine Dynamic Load Balancing (CDLB)
X
CORBA/IIOP (Load Balancing for UNIX server operating systems)
X
COM (via CAPS OLE Gateway)
X
TIB/Rendezvous TIBCO Load Balancing
LineWorks SPACE RDBMS Support
X
Oracle 9i
Further database systems on demand
The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility for any errors
which may appear in this document. All company names and product names are trademarks or registered trademarks of their respective
holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM, LineWorks SPACE,
LineWorks STARGATE, LineWorks WIP and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.
25. August 2006
LineWorks SPACE 5.1
24
LineWorks SQM
Supplier Quality Management
LineWorks SQM is an additional LineWorks SPACE module to manage quality checks and reporting of incoming materials. SQM provides an electronic
Certificate of Analysis (eCOA) for the goods receipt.
LineWorks SQM provides a generic qual-
each material. With this B2B extension of
ity portal for suppliers, state of the art
LineWorks SPACE the quality of incom-
data tracking with SPC, scheduled quali-
ing material can be automatically
ty reports and automated feedback
checked and the supplier notified before
based on the latest specifications for
the physical shipment happens.
Value Added
X
X
Save cost and time by checking quality
need to ship material until it has been
Eliminate human errors for data entry
checked and released
X
Take advantage of powerful Line-
Collect all data to do analysis – corre-
Works SPACE reporting capabilities;
late supplier quality data to IQC meas-
every night, all important quality in-
urements or Final Yield
dexes can be calculated automatically
X
Easily share data throughout the fab
X
Utilize the SQM Web Portal for data
upload and notification
2-May-2006
Suppliers can avoid costly rejects – no
of incoming material before shipment
and spec checking
X
X
X
Benefit from Web reports based on
iGate to show trends of delivered quality or compare similar materials delivered by different vendors
LineWorks SQM 3.0
1
System Overview
SQM Web Portal
For each of your vendors, you define a
The SQM Web Portal offers:
Quality Schema describing the parameters and measurement values the vendor
X
Upload of quality data contained in
XML files structured according to a
has to supply for each material.
given schema description; further-
In compliance with that Quality Schema,
more, upload by manual input, or op-
vendors collect their quality data and up-
tionally using CSV files
load it over the SQM Web Portal.
X
Traceability of history
On your Web server, the vendors' data is
X
Notification to supplier if format is
validated against your requirements implemented in the Quality Schema. Based
on the validation results, the materials
wrong or data is missing
Analysis
will be released for shipment or the re-
SQM offers the following Analysis fea-
lease will be denied.
tures:
The release decision will automatically be
X
Automated verification of file formats
distributed by email to the supplier and
X
Easy to use SQM viewer
the input quality department. Vendors
– View the contents by lot – out of
spec items highlighted
can retrieve the validation results regarding their materials in the Web portal as
– Manual acceptance or rejection
allowed
well.
With LineWorks SQM, you can perform
quality checks of nearly all types of ma-
X
Automated spec checking
X
Full featured SPC with LineWorks
SPACE
terials, such as Wafer, Pellicle, Gas,
Chemical, Quartz, Target, or Photo
Chemical etc.
X
Quality reports
– Cp/Cpk by material, supplier,
location, etc.
– Trend quality over time (weeks,
months, quarters)
– Scheduled report runs, no additional
engineering effort
– SPACE chart display in the Web
browser
2-May-2006
LineWorks SQM 3.0
2
SQM Adminstration
The SQM Administration enables you to
For each of the parameters, specification
define all the details regarding your
limits and the type of samples like raw
measurement parameters.
values or condensed values, is specified.
Materials with their measurement parameters and related context keys are
defined.
For each vendor, a Quality Schema is created describing which materials and
measurement values they have to provide.
Specification Management
SQM offers a complete Specification
X
Audit trail for spec changes
Management system.
X
Definition of measurement data for
X
Definition of materials supplied
X
Administration of measurable parame-
X
Supplier specific XML schemas to be
used for data validation
ters
X
each supplier and material
Supplier specific alias names for parameters
X
Storage of specs for materials and suppliers
2-May-2006
LineWorks SQM 3.0
3
Reporting
Engineering Reports
With LineWorks SPACE, reports can be
Engineering Reports show the quality
calculated on SQM quality data over-
trend (Cpk and OOC) of all materials
night. They are provided as Web reports
with a drill-down to part names. Further-
based on LineWorks iGate.
more, a comparison of material groups
as well as a comparison of suppliers is
available.
Management Reports
Management Reports show the maturity
Comparison of material groups as well
trend (combination of Cpk and OOC) of
as a comparison of suppliers is provided.
all materials with a drill-down to part
The supplier comparison enables you to
names.
clearly see the differences between vendors.
2-May-2006
LineWorks SQM 3.0
4
Jetzendorfer Strasse 6
85238 Petershausen, Germany
phone: +49-8137-935-0
fax: +49-8137-935-235
email: sales@camline.com
web: www.camline.com
LineWorks Product Family
The LineWorks product family provides an automation solution with or without MES system.
The LineWorks product family includes:
X
SPACE – Statistical Process Control
X
SQM – Supplier Quality Management
X
STARGATE – SPC Quality Reporting
X
PULSE – Equipment Efficiency Monitoring and Optimization
X
RM – Recipe Management
X
WIP – Work in Process Tracking
X
iGate – Information Gateway
X
ECoFrame – Equipment Connection Framework
X
UA – User Administration
LineWorks SQM Server Operating Systems
X
HP-UX 11.i
X
IBM AIX 4.3.3
X
Sun Solaris 5.8
X
SuSE Enterprise Server 8
X
MS Windows 2000, XP
Further systems or versions on demand
LineWorks SQM Client Operating Systems
X
MS Windows 2000, XP
Further systems or versions on demand
LineWorks SQM Middleware
X
CORBA/IIOP
X
RMI (Java Remote Method Invocation)
LineWorks SQM RDBMS Support
X
Oracle 9i
Further database systems on demand
The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility for any errors
which may appear in this document. All company names and product names are trademarks or registered trademarks of their respective
holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM, LineWorks SPACE,
LineWorks STARGATE, LineWorks WIP and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.
2-May-2006
LineWorks SQM 3.0
5
LineWorks SPACE ACO
Advanced Calculation Option
LineWorks SPACE Advanced Calculation Option (ACO) adds support for
customer-definable calculations to the Calculated Parameter feature of
SPACE. Arbitrary Java code can be provided through a plugin architecture,
for applications from outlier removal and data normalization up to
Advanced Process Control (APC).
Features
X
Extend the list of available formulas
in the Calculated Parameter Editor
X
Easy deployment by auto-detection
of new customer calculation formulas
through plugin manager
X
Supports an arbitrary number of reference parameters
X
Supports passing additional calculation constants through the formula
text GUI field
X
Centralized management of all formulas and constants
X
Support to compute specification limit
intervals for calculated parameters
from original specifications
X
Build-in functions: Plus, minus, times,
divide, log, clip
X
API Javadoc and example source
1. August 2006
Value Added
X
Derive relevant parameters like etch
rates from combined measurements
X
Reduce control chart numbers and
administration by normalizing data
first
X
Implement your own outlier removal
strategies and reduce false alarms
X
Split data into subsets and control
zones on a wafer in separate charts
X
Plug-in your favourite math tool
X
Derive new recipe parameters based
on the measured values (APC)
LineWorks SPACE ACO
1
Jetzendorfer Strasse 6
85238 Petershausen, Germany
phone: +49-8137-935-0
fax: +49-8137-935-235
email: sales@camline.com
web: www.camline.com
LineWorks Product Family
LineWorks products include:
The LineWorks product family provides
X
SPACE – Statistical Process Control
an automation solution with or without
X
SQM – Supplier Quality Management
MES system. Like every other LineWorks
X
product LineWorks SPACE ACO is based
X
on the camLine Application Server
STARGATE – SPC Quality Reporting
PULSE – Equipment Efficiency and Optimization
X RM – Recipe Management
(CAPS). All interfacing technologies sup-
X
ported by CAPS (CDLB, CORBA, COM,
X
TIB/Rendezvous) are also available to
ECoFrame – Equipment Connection Framework
X iGate – Information Gateway
X
LineWorks SPACE ACO.
WIP – Work in Process Tracking
UA – User Administration
LineWorks SPACE ACO Server Operating Systems
X
HP-UX 11.i
X
IBM AIX 4.3.3
X
Sun Solaris 5.8
X
SuSE Enterprise Server 8
X
MS Windows NT, 2000, XP
Further systems or versions on demand
LineWorks SPACE ACO Client Operating Systems
X
MS Windows NT, 2000, XP
Further systems or versions on demand
LineWorks SPACE ACO Middleware
X
camLine Application Server (CAPS) with camLine Dynamic Load Balancing (CDLB)
X
CORBA/IIOP
X
COM (via CAPS OLE Gateway)
X
TIB/Rendezvous TIBCO Load Balancing
LineWorks SPACE ACO RDBMS Support
X
Oracle 9i
Further database systems on demand
The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility for any errors
which may appear in this document. All company names and product names are trademarks or registered trademarks of their respective
holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM, LineWorks SPACE,
LineWorks STARGATE, LineWorks WIP and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.
1. August 2006
LineWorks SPACE ACO
2
LineWorks STARGATE
TM
SPC Quality Reporting
To guarantee serious SPC, statistics should be examined on a regular basis.
LineWorks STARGATE provides an overview of performance indexes for
production processes to assess the quality of SPC activities.
In LineWorks SPACE, thousands of SPC
With a growing variety of products,
charts are running to control various
managers and process engineers need to
process parameters during production
keep a clear overview of the production
online.
quality.
How good is the quality within the area
Proper Charts
of responsibility? Which process areas or
Have the control limits been set »reason-
individual processes don’t reach the
ably« or »inadequately«?
quality requirements? Which charts are
SPC Maturity
not maintained properly?
Are charts maintained well?
To get a fast summary of quality being
Matching Charts
processed LineWorks STARGATE pro-
Is the process close enough to the target
vides important analysis reports.
value?
SPC Management
Limit Changes
Process capability (Cpk) and process sta-
How often have the limits been
bility (%OOC)
changed?
SPC Engineering
Frequency of WE rule violations
5. September 2006
LineWorks STARGATE 2.0
1
Drill-down from the overview
to the individual SPACE chart
Click in summary report to see the details table. Click in
details table to open individual control chart in SPACE
Drill-Down
It is very likely that you have to deal with
X
Pareto analysis, e.g. find the most fre-
thousands of control charts. Which of
quent process step within 500 control
them have a Cpk < 1..33? With a simple
charts with Cpk < 1.33.
mouse click you navigate from the com-
There are numerous other filter methods
pany-wide summary down to the indi-
available, e.g. »only critial processes«.
vidual SPACE chart.
User Permissions
Depending on the permissions granted
during login, users might be allowed to
view only results belonging to specific
lots from particular customers.
STARGATE Summary Views
The summary views show statistics over
SPC charts, e.g. in one technology are
10000 control charts with 500 having a
Cpk < 1.33. You will find the 5% marked
In configurable trees you create appro-
red. In general, there are three summary
priate groupings of your data, e.g. by
views available:
Site, Technology, Product, and Process
X
Summary over time, e.g. days, weeks,
Step.
or months
X
Summary over levels, e.g. site, technology, or recipe
5. September 2006
LineWorks STARGATE 2.0
2
SPC Management
The »SPC Management« report shows
Quality managers can decide at first
summaries about process capability and
glance whether everything is okay, proc-
process stability. You can see immediate-
esses have to be improved, or the SPC
ly if your process behaviour is excellent
system has to be adjusted by modifiying
(green color) or the process behaviour is
specification or control limits.
not satisfying (yellow to red).
Proper Charts
The »Proper Charts« report compares
If the configured limits are too tight the
the control limits configured in the charts
manufacturing process will be inferred
with the control limits resulting from the
too often resulting in reduced through-
actual process values.
put and less acceptance of SPC.
If the configured limits are too wide
Even if it seems to be an unsoluble task
process instabilities will not be detected
with thousands of charts to look for bad-
and parts will not be processed with op-
ly configured control limits you can do it
timum quality.
in this report with one mouse-click.
5. September 2006
LineWorks STARGATE 2.0
3
SPC Maturity
The »SPC Maturity« report shows how
must be fulfilled and the control limits
well your charts are maintained. First, the
must be state-of-the-art.
charts are checked against several minimum standards, e.g. if control limits exist
and corresponding rules are enabled.
Charts which utilize SPC evaluations intensely and define limits reasonably are
rated excellent (green). Charts with im-
To reach the highest maturity level, com-
proper or insufficient valuations are rat-
pany-wide objectives regarding process
ed bad (red).
capability (Cpk) and stability (%OOC)
SPC Engineering
The »SPC engineering« report is mainly
curred in your production and the ac-
designed for process engineers to get an
tions performed by the operators.
overview over all technical processes for
a certain time period.
You can individually sort by all available
violation types, e.g. trends in the Sigma
From this report you can see how often
chart.
the various violation types have been oc-
5. September 2006
LineWorks STARGATE 2.0
4
Matching Charts
The »Matching Charts« report shows if
value. Alternatively, the comparison can
the process average is close enough to
be done with the values of a master
the target values. Usually, the control li-
chart. This might be useful with a pro-
mit center is compared with the target
cess running on several tools.
Limit Changes
The »Limit Changes« report shows how
SPC managers get a quick overview of
often the SPC system is adjusted to the
charts with frequent limit changes to de-
process behaviour. Excellent processes
cide if processes are really controlled.
usually do not need much adjustments.
5. September 2006
LineWorks STARGATE 2.0
5
Jetzendorfer Strasse 6
85238 Petershausen, Germany
phone: +49-8137-935-0
fax: +49-8137-935-235
email: sales@camline.com
web: www.camline.com
LineWorks Product Family
The LineWorks product family provides an automation solution with or without MES system.
The LineWorks product family includes:
X
SPACE – Statistical Process Control
X
SQM – Supplier Quality Management
X
STARGATE – SPC Quality Reporting
X
PULSE – Equipment Efficiency and Optimization
X
RM – Recipe Management
X
WIP – Work in Process Tracking
X
iGate – Information Gateway
X
ECoFrame – Equipment Connection Framework
X
UA – User Administration
LineWorks STARGATE Server Operating Systems
X
HP-UX 11.i
X
IBM AIX 4.3.3
X
Sun Solaris 5.8
X
SuSE Enterprise Server 8
X
MS Windows 2000, XP
For all operating systems Java Development Kit 1.4 is required.
LineWorks STARGATE Client Operating Systems
X
MS Windows 2000, XP
For all operating systems, Internet Explorer 6 or higher is required.
LineWorks STARGATE RDBMS Support
X
Oracle 9.2 Enterprise Edition
Further database systems on demand.
The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility for any errors
which may appear in this document. All company names and product names are trademarks or registered trademarks of their respective
holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM, LineWorks SPACE,
LineWorks STARGATE, LineWorks WIP and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.
5. September 2006
LineWorks STARGATE 2.0
6
LineWorks PULSE
Using LineWorks PULSE managers and engineers get the ideal tool to
improve the efficiency of manufacturing equipment. With LineWorks PULSE
as a fabwide standard tool you achieve complete production traceability.
LineWorks PULSE is the key tool to ana-
turn on invest (ROI). Overall Equipment
lyse downtime problem areas, to achieve
Efficiency (OEE) as well as RAM metrics
higher equipment uptime, to enhance
are calculated according to SEMI-E10
the throughput and to increase your re-
and SEMI-E79 in real-time.
Advantages
X
Real-time processing of online equip-
X
ment messages
X
X
X
required time
Centralized storage in standard data-
X
RAM measurement
bases (Oracle, etc.)
X
Recipe time analysis and material
tracking
Powerful Monitoring & Reporting
based on modern Web technology
X
Flexible equipment modelling
Comfortable analysis and drilldown
X
Support of cluster tools
X
High Reliability = 24 hours per day / 7
features
X
Automatic determination of the
Overall Equipment Efficiency (OEE)
days a week
analysis
17. Juli 2006
LineWorks PULSE 1.1
1
LineWorks PULSE Features
Real Time State Processing
X
X
X
X
Equipment Online Connection
Real time interpretation of equipment
Connect your equipment to LineWorks
messages according to your freely de-
PULSE and see the real life of your ma-
finable equipment models
chines. There is a broad range of possibil-
Configurable recipe tracking and ma-
ities to connect your equipment to the
terial tracking
PULSE software online.
Processing of individual production
X
PULSE Online Input Interface via:
Online alarming based on configura-
–
–
–
–
ble alarm conditions for real time state
monitoring
Centralized
Administration Tool
X
Send your equiment states using the
keys
X
CORBA /IIOP
COM
CAPS/DLB
TIB/Rendezvous
Connect SECS equipment using
LineWorks ECoFrame
Comfortable administration and or-
X
Implement the LineWorks PULSE input
ganization of state models, state inter-
client in your existing equipment con-
pretation, watchdog settings etc.
troller or in your MES system. The
X
Advanced modelling of cluster tools
PULSE client function is avaliable in
X
Modern Java GUI
X
Hardware independent
X
User authentification for functions, di-
–
–
–
–
–
alogs and administration data
17. Juli 2006
LineWorks PULSE 1.1
C, C++
Java
Turbo Pascal
Visual Basic
Further languages on demand.
2
Web Based Monitoring
and Reporting
X
PULSE Web Server allows any web
X
browser to become an efficient monitoring tool to show real time equipment efficiency summaries, states and
the situation of your production.
X
find improvements
X
Individual analysis hierarchies
X
Using trace functions you will have a
powerful search engine.
Fab wide real time data access
Equipment Log Book
X
Advanced drill down features help to
Equipment State Monitor
Visualization of equipment state histo-
X
Real time visualization of current tool
ry, material flows, recipe loading, used
states, material and recipe informa-
equipment programs, etc.
tion, process variables etc.
X
Comparison of tools or modules
X
Comfortable zoom functions to visualize detailed time slices
X
Select your tool group, using the
hierarchy tree
X
See lot names, operation numbers,
material identifications, etc.
17. Juli 2006
LineWorks PULSE 1.1
3
Comfortable Time Analysis
X
Get more information about
time states of your process cycles
X
Detect trends of tools and tool groups
X
Compare divisions, tools and modules
X
Target group oriented detail levels:
– main states (time model) for
management
– sub and detail states (original tool
states) for engineering
drill down ...
Drill Down Features
X
Drill down to learn from detailed
equipment states and events
X
Interactive charts offer a simple way
to drill down from trend views to compare views and detail reports
17. Juli 2006
LineWorks PULSE 1.1
4
Overall Equipment
Efficiency Analysis
Overall Equipment Efficiency (OEE) is an
X
See trend reports, comparison reports
important metrics, that will help manag-
and OEE detail reports for tools, mod-
ers benchmark the efficiency of their
ules, tool groups – using your own
production. While the expenses for lead-
analysis hierarchies
ing edge equipment are increasing, the
X
technological lifespan is decreasing.
–
–
–
–
Equipment productivity is a highly controllable factor which influences the
overall return on investment (ROI) signifX
icantly.
Analyse the OEE figures
OEE, speed loss, quality loss
OEE efficiency factors
productive losses
OEE and SEMI E10 time analysis
Find the most important losses in the
OEE loss pareto view
LineWorks PULSE is designed to support
managers in decision-making:
X
X
Using the SOT method, LineWorks
PULSE can automatically retrive theo-
OEE review or drill down for detailed
retical production times.
equipment analysis
17. Juli 2006
LineWorks PULSE 1.1
5
RAM Measurement
Take an overview of equipment utiliza-
See trends, tool-compare and detail re-
tion, reliability, availability and maintain-
ports with one mouse-click.
ability.
Tracing Features
Powerful search engine, to find states,
material, comments, failures, alarms,
etc. – using flexible filter conditions.
17. Juli 2006
LineWorks PULSE 1.1
6
Jetzendorfer Strasse 6
85238 Petershausen, Germany
phone: +49-8137-935-0
fax: +49-8137-935-235
email: sales@camline.com
web: www.camline.com
LineWorks Product Family
LineWorks products include:
The LineWorks product family provides
X
SPACE – Statistical Process Control
an automation solution with or without
X
SQM – Supplier Quality Management
MES system. Like every other LineWorks
X
product LineWorks PULSE is based on
X
the camLine Application Server (CAPS).
STARGATE – SPC Quality Reporting
PULSE – Equipment Efficiency and Optimization
X RM – Recipe Management
All interfacing technologies supported
X
by CAPS (CDLB, CORBA, COM, TIB/Ren-
X
dezvous) are also available to LineWorks
ECoFrame – Equipment Connection Framework
X iGate – Information Gateway
X
PULSE.
WIP – Work in Process Tracking
UA – User Administration
LineWorks PULSE Server Operating Systems
X
HP-UX 11.i
X
IBM AIX 4.3.3
X
Sun Solaris 5.8
X
SuSE Enterprise Server 8
X
MS Windows NT, 2000, XP
Further systems or versions on demand
LineWorks PULSE Client Operating Systems
X
MS Windows NT, 2000, XP
Further systems or versions on demand
LineWorks PULSE Middleware
X
camLine Application Server (CAPS) with camLine Dynamic Load Balancing (CDLB)
X
CORBA/IIOP
X
COM (via CAPS OLE Gateway)
X
TIB/Rendezvous TIBCO Load Balancing
LineWorks PULSE RDBMS Support
X
Oracle 9i
Further database systems on demand
The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility for
any errors which may appear in this document. All company names and product names are trademarks or registered trademarks
of their respective holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM,
LineWorks SPACE, LineWorks WIP and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.
17. Juli 2006
LineWorks PULSE 1.1
7
TM
LineWorks RM
Recipe Management
LineWorks RM offers enterprise wide process security. It ensures that a
product is processed by a piece of equipment correctly. As a full-featured
Recipe Management System (RMS), LineWorks RM assures that all required
data for processing is ready on the equipment.
All process recipes and control parame-
proval and release of recipes makes sure
ters are centrally stored in a database.
that a recipe is only used after having
Each modification is recorded. The ap-
been confirmed by certain persons.
Features
X
X
X
Management of all recipes in a central
X
Version control
database
X
Approval for recipe releases
Cluster Tool Support: Management of
X
Audit trail
sequence and module recipes
X
Administration of documents related
APS (Adjustable Parameter Sets)
X
Recipe filters for context /process specific recipe and parameter utilization
X
to equipment, recipe, or recipe filter
APC support via SEMI E42 compliant
X
Basic reticle management
X
Web Reports showing recipe history
Support of recipe upload and download
17. July 2006
LineWorks RM 3.2
1
Value Added
LineWorks RM can save companies several million dollars in material and rework by helping reduce the scrap generated due to wrong recipes and recipe parameter values to almost ZERO and
... of Recipes,
With a centralized recipe management
solution corrections and modifications
of the recipes don’t need to be done at
the individual tool.
guarantee on-time delivery to customUsing LineWorks RM as an enterprise
ers.
wide tool, from one central office the
LineWorks RM provides access to recipes
anywhere in the corporate intranet, allowing process engineers to access them
recipes of all equipments can be administered and distributed to all production
lines as and when required.
from their offices.
use of any recipe that may have potential
...and APS (Adjustable
Parameter Sets)
to scrap the material or cause an acci-
Adjustable Parameter Sets (APS) offer
dent.
variable parameters which are provided
Recipe management history can play a
to the equipment in addition to the reci-
vital role and give a new dimension in
pe, but can be adjusted to individual pro-
yield analysis.
duction conditions.
Recipe approval processes avoid the
LineWorks RM as
Central Storage ...
To improve throughput time and yield
the production line should avoid handling errors and mis-processing due to
incorrect settings.
17. July 2006
LineWorks RM 3.2
2
APS for Processes
and Equipment
LineWorks RM handles generic recipe
bodies and APS. The adjustable parameter sets might either depend on the process (recipe filters) the recipe is associated
with or on the equipment that executes
the recipe.
Recipe Filters
Recipe filters provide context-sensitive
access to recipes and their adjustable parameters. A recipe filter determines the
process-specific context for which the
recipe is chosen, together with appropri-
While running a specific manufacturing
ate process-specific parameters. Needed
process the original recipe may be tem-
documents and additional customer
porarily modified by process-specific
data are provided as well.
parameters at the tool. Individual tool
adjustments may be necessary to make
equipment interchangeable and to track
The filter enriches the recipe by user-definable keys and parameters for processspecific adjustments.
and follow-up the adjustment of wear
By assigning various filters, a physical
and tear.
recipe stored in the LineWorks RM recipe
Searches
pool can be utilized very effectively.
Searches can be used to find recipe filters
with certain process-specific information
or parameters. The retrieved parameters
might be updated then simultaneously.
17. July 2006
LineWorks RM 3.2
3
Cluster Tool Support
LineWorks RM provides the possibility to
module recipes controls one individual
link one recipe to other recipes. This
process and can be a sequence recipe it-
might be useful for a multi-chamber tool
self. For each recipe, the recipe structure
where each main recipe controls a se-
stored in the database defines its mod-
quence of module recipes. Each of the
ule recipes.
Recipe Download ...
At the tool, configuration settings and
individual adjustments are necessary to
run a required manufacturing process.
LineWorks RM always provides the production with the matching recipe version
and the current adjusted parameters.
LineWorks RM Opens the
Way for APC
The usage of LineWorks RM support the
realization of automated control loops of
Advanced Process Control (APC). In Line-
... and Upload
Works RM, all parameters needed for
The efficient usage of the central recipe
APC can be defined.
storage relies on how fast the storage
may be supplied with the up-to-date recipes.
The recipe upload facility enables the
rapid transfer of productve recipes to the
central recipe storage.
17. July 2006
LineWorks RM 3.2
4
Automated Recipe
Approval
LineWorks RM offers an recipe approval
process. Using Approval Manager, various approval boards can be configured
containing certain persons.
Traceability through
Versioning
Learning from experience is only reliable
if all changes of recipes are recorded
In LineWorks RM you define, if a recipe
correctly. LineWorks RM gives full admin-
has to be approved by certain boards or
istrative control to all modifications to
persons, or if they will simply be notified
guarantee full traceability.
via e-mail of the changes made in a recipe.
LineWorks RM maintains the history of
various activities. It has a record of the
Reticle Management
user activities as well as a history related
The Reticle Management allows to store
to a given recipe and its versions.
all needed reticles in the central reticle
Security
pool. From that pool, recipes can be assigned the reticles needed with certain
parameters for particular process steps
from.
LineWorks RM can be employed with an
extensive security management system. After users has logged in using
their individual passwords, LineWorks
RM provides them with their particular
security settings and permissions.
Permissions apply to the authorized recipe import or export, the recipe locking
while it is being edited by another user,
and the recipe approval for production
release.
17. July 2006
LineWorks RM 3.2
5
Web Reporting
LineWorks RM generates reports to be
viewed in the Web browser. The Web reports provide easy and fast access to all
information relevant in recipe management. They are based on the Web repor-
Interfaces
LineWorks RM communicates with the
manufacturing tool using a station controller, e.g. LineWorks ECoFrame, via a
common SECS/GEM interface.
ting tool LineWorks iGate.
LineWorks RM offers reports about recipes, their history and usage. They allow
easy navigation between different
views on your production by just click-
ing on the information of interest.
17. July 2006
LineWorks RM 3.2
6
Jetzendorfer Strasse 6
85238 Petershausen, Germany
phone: +49-8137-935-0
fax: +49-8137-935-235
email: sales@camline.com
web: www.camline.com
LineWorks Product Family
LineWorks products include
The LineWorks product family provides
X
SPACE – Statistical Process Control
an automation solution with or without
X
SQM – Supplier Quality Management
MES system. Like every other LineWorks
X
product LineWorks RM is based on the
X
camLine Application Server (CAPS). All
interfacing technologies supported by
CAPS (CDLB, CORBA, COM/DCOM, TIB/
Rendezvous) are also available to LineWorks RM.
STARGATE – SPC Quality Reporting
PULSE – Equipment Efficiency and Optimization
X RM – Recipe Management
X
WIP – Work in Process Tracking
ECoFrame – Equipment Connection Framework
X iGate – Information Gateway
X
X
UA – User Administration
LineWorks RM Server Operating Systems
X
HP-UX 11.i
X
IBM AIX 4.3.3
X
Sun Solaris 5.8
X
SuSE Enterprise Server 8
X
MS Windows 2000, XP
Further systems or versions on demand
LineWorks RM Client Operating Systems
X
MS Windows 2000, XP
Further systems or versions on demand
LineWorks RM Middleware
X
CORBA/IIOP
X
COM (via CAPS OLE Gateway)
X
TIB/Rendezvous TIBCO Load Balancing
LineWorks RM RDBMS Support
X
Oracle 9i
Further database systems on demand
The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility for any errors
which may appear in this document. All company names and product names are trademarks or registered trademarks of their respective
holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM, LineWorks SPACE,
LineWorks STARGATE, LineWorks WIP, and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.
17. July 2006
LineWorks RM 3.2
7
LineWorks RM
TM
Recipe Management 4.1
Optimized equipment efficiency, traceability and process security are essential requests
asking for a comprehensive control of all factors influencing a manufacturing process.
Without the right recipe at the right place and all additional information needed for the
process to run properly, the fab looses efficiency due to lost time, rework, or scrapped
product. As a full-featured Recipe Management System (RMS), LineWorks RM assures
that all required data for processing is ready on the equipment.
Features
X
Management of recipes in a central database
X
Cluster tool support: management of se-
X
X
Registration of recipe objects for context/process specific recipe and parameter utilization
quence and module recipes and their relation-
X
Support of recipe object upload and download
ship
X
Advanced version control and audit trail
Recipe objects representing recipe bodies, pa-
X
Configurable approval and release procedures
X
Notification management
rameters, equipment constants, FDC strategies
(Fault Detection and Classification), processspecific documents, etc.
17. July 2006
LineWorks RM 4.1
1/6
Fulfill the Paradigm Change
As a modern RMS, LineWorks RM 4.1 represents
more than pure recipe and parameter administration. It offers the management of all controllable
Paradigm Shift
From Recipes to Recipe Objects
components, so-called Recipe Objects. Recipe
Recipe Objects
Objects cover all pieces of information needed to
Sequence Recipe, Module Recipe, Parameter,
define the process target.
Equipment Constant, Reticle, etc.
Each equipment type is described by means of a
Registrations
Recipe Object. A recipe object contains a distinct
An easy but powerful access to the recipe
collection of Data Items. Which data items are al-
objects
lowed or required is determined by the structure
Variants
definition. Among others, data items can be:
Prepare specialized variants of your recipe
Recipe body, module and sequence recipe,
objects
binary or formatted
Version Branching
X
Internal recipe structure
Develop several versions of your recipe object
X
Recipe parameters
in parallel
X
Equipment constants
Notification
X
Rules and control limits for parameters, e.g. for
Be informed about the changes of your recipe
supporting Advanced Process Control (APC)
objects
X
X
Additional process relevant documents, e.g.
FDC strategies (Fault Detection Control)
X
Attributes used by the equipment automation
Once defined for the equipment type, a Recipe
Object can be used for all corresponding pieces
of equipment.
To meet all requirements made on a modern
RMS, LineWorks RM offers:
X
Approval
Approve a recipe before releasing it to production
Recipe Object Compare
Binary, masked and range compare
Integration
XML based API via TIB/Rendezvous and CORBA
Management of automatich notifications, e.g.
via email
X
Approval of recipes
X
Versioning of recipes
X
User authorization and permissions
17. July 2006
LineWorks RM 4.1
2/6
Release Your Recipe Objects
To avoid misprocessing due to wrong or invalid
Access Recipe Objects by
Cluster Tool Support
recipe objects, they need to be explicitly released
LineWorks RM provides the possibility to link one
by particular authorities. LineWorks RM supports
recipe to other recipes, e.g. for a multi-chamber
all phases of the release procedure.
tool with a main (sequence) recipe controlling a
Validation
sequence of module recipes for individual proc-
It is checked if the source data recipe object is
syntactically correct, if all required data items are
specified and if the values are in the range given
by the control information.
esses. Module recipes can be sequence recipes as
well. The structure of a recipe stored in the database defines the linked optional or mandatory
module recipes.
Registrations
Approval
Make sure that the control information of the
recipe object (parameter limits) meet the process
target. Rules enable the concept of »minor and
major changes«. All changes which violate a rule
are »major« which means that an approval has to
be performed.
Rules can contain minimum or maximum limits, a
distinct set of values, or free definable expressions which are based on JavaScript, for example.
What really determines the recipe object is a set
of attributes describing how and when it is to be
used, e. g. process step, tool id, product, etc.
LineWorks RM registers a recipe object with a set
of context keys which can be used to retrieve it
later.
Using different context information, users can
register one recipe object for various purposes
more than once.
Qualification
The recipe object is tested on each process equipment to ensure the process capability of the recipe object.
Release
A recipe object has to be approved before it can
be released for production.
17. July 2006
LineWorks RM 4.1
3/6
Keep Your Recipe Objects
Up to Date
Track Your Recipe Objects
LineWorks RM supports advanced event-driven
ject as they happen to guarantee full traceability.
synchronization by a Notification Service. Every
New recipe object versions are created based on
recipe object modification is broadcasted to all
incrementing minor or major version numbers.
users and third-party systems such as MES (Man-
Rework, Design and Experiments
LineWorks RM records all changes of a recipe ob-
ufacturing Execution System), document management system, or external approval system,
that have been registered to be informed about
Engineers can prepare special recipes for distinct
lots, products, experiments or tools. New recipe
object versions as well as rework or emergency
modifications.
recipes can be created within dedicated developReceivers, rules and contents of a notification can
ment branches. Via a priority matrix, branches
be administered in LineWorks Notification Man-
can be provided with priorities.
ager. The effective use of the notification service
enables process engineers to be always up-todate regarding the latest recipe object changes.
Furthermore, variants can be used to implement
special APS configurations for a recipe object, for
example.
Full Version Control
LineWorks RM provides a Version Control System
similar to the Concurrent Version System (CVS).
17. July 2006
LineWorks RM 4.1
4/6
Open Architecture
The advanced level of automation of modern fac-
LineWorks RM Opens
the Way for APC
tories makes high demands on the data ex-
The usage of LineWorks RM support the realiza-
change between the involved systems such as
tion of automated control loops of Advanced
MES, RMS, APC, or equipment automation.
Process Control (APC). In LineWorks RM, all pa-
Lineworks RM supports the upload and downlo-
rameters needed for APC can be defined.
ag of recipe objects from and to the equipment
Security
automation. In addition, it provides information
about the state and the availability of certain recipe objects which can be used to plan further
processing.
The security system of LineWorks RM is based on
user authorization and permission management.
With a single login and password, LineWorks RM
provides finely graded security and access rights.
LineWorks RM publishes all its system interfaces
so that you can extend each of the LineWorks RM
user interface by own functions or replace it completely with your own client program.
This includes authorized recipe import/export,
recipe locking while it is being edited by another
user, and built-in recipe approval for production
release.
Information is exchanged with XML-based messages over the middleware CORBA/IIOP or TIB/
Rendezvous. All server components of LineWorks
RM are implemented in pure Java and are therefore available on all server systems supporting a
Java Runtime Environment (JRE).
17. July 2006
LineWorks RM 4.1
5/6
Jetzendorfer Strasse 6
85238 Petershausen, Germany
phone: +49-8137-935-0
fax: +49-8137-935-235
email: sales@camline.com
web: www.camline.com
LineWorks Product Family
LineWorks products include
The LineWorks product family provides
X
SPACE – Statistical Process Control
an automation solution with or without
X
SQM – Supplier Quality Management
MES system. Like every other LineWorks
X
product LineWorks RM is based on the
X
camLine Application Server (CAPS). All
interfacing technologies supported by
CAPS (CDLB, CORBA, COM/DCOM, TIB/
Rendezvous) are also available to LineWorks RM.
STARGATE – SPC Quality Reporting
PULSE – Equipment Efficiency and Optimization
X RM – Recipe Management
X
WIP – Work in Process Tracking
ECoFrame – Equipment Connection Framework
X iGate – Information Gateway
X
X
UA – User Administration
LineWorks RM Server Operating Systems
X
HP-UX
X
IBM AIX
X
Sun Solaris
X
SuSE Enterprise Server
X
SuSE Linux
X
MS Windows 2000, XP
Further systems or versions on demand
LineWorks RM Client Operating Systems
X
MS Windows 2000, XP
Further systems or versions on demand
LineWorks RM Middleware
X
CORBA/IIOP
X
TIB/Rendezvous TIBCO Load Balancing
LineWorks RM RDBMS Support
X
Oracle 9i
Further database systems on demand
The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility for
any errors which may appear in this document. All company names and product names are trademarks or registered trademarks
of their respective holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM,
LineWorks SPACE, LineWorks WIP and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.
17. July 2006
LineWorks RM 4.1
6/6
TM
LineWorks WIP
Work in Process Tracking
LineWorks WIP is the tool for tracking and monitoring jobs and material
throughout the enterprise manufacturing process, offering views from the
bird's-eye view right down to the individual process steps of each job.
LineWorks WIP can be used indepen-
LineWorks WIP supports production con-
dently or integrated with existing Pro-
trol and the monitoring of material flow,
duction Planning (PPS) or Enterprise Re-
and is the key element in a reliable pro-
source Planning (ERP) Systems.
duction environment.
LineWorks WIP allows managers or engi-
LineWorks WIP can simultaneously mon-
neers to track jobs within shopfloor pro-
itor various types of material flows which
duction areas in various industries.
can be orders, charges, lots or serial
"Work In Process Tracking" means monitoring the previous, current and future
numbers – LineWorks WIP summarises
them all as jobs.
process steps, with regard to the numbers of good, failed and scrapped parts
resulting from each individual process
step.
3-Oct-2005
LineWorks WIP 4.2
1
LineWorks WIP Features
LineWorks WIP offers the following
features:
X
Tracking production units
during manufacturing
X
Displaying and recording the current
production status of each job
X
Job split and merge
X
Carrier management, e.g. SMIF pod
X
Identifiable and non-identifiable
progress messages
X
Documentation of losses and related
reasons
Locking the parts on each level (job,
process step, subset)
Calculation of various indexes: yield,
cycle time, throughput, rework
Standard jobs or development jobs for
new products
Detailed messages (check-in, process
start, process end, check-out) or
X
subsets
X
Guaranteed backtracing for related
production data
X
Interactive dispatch lists
X
X
Documented manufacturing
X
Loss and loss rate statistics
X
Fast database access by separating
current from historic data
Verifying process steps
and used materials
X
X
Full traceability
X
Optional process steps
X
Rework with flexible capabilites for
Attachments
repair and re-process
X
Alternative process step sequences
X
Check if equipment is released for processing
X
Provides data for verification of materials to be used
3-Oct-2005
LineWorks WIP 4.2
2
LineWorks WIP Modules
WIP Core
WIP ERP Interface
Overview of the current state of
production
Information exchange with systems like SAP, Workstream, Promis
WIP Core makes sure that a product is
manufactured according to the process plan. It documents the individual
process steps and the used material
and provides an overview of the current state of your production.
LineWorks WIP can be provided with
data from an Enterprise Resource Planning System (ERP) through the CAPS
client interface, e.g. Job (lot Id, charge
Id, work order), Product Id, Process
Plan, Feedback Indicator, or Parts List
as well as various other parameters to
synchronize the ERP information with
the LineWorks WIP module.
WIP PMDA
Administration of product
definitions and parts lists
LineWorks PMDA (Product Main Data
Adminsitration) is used to define the
main data for a product. This data is
the basis for the jobs in WIP.
A process plan and a parts list describe
how to produce the product. The parts
in the parts list can be linked to process
steps or directly to the job. Multiple
structuring levels can be arranged to
build a process plan.
A public interface is provided to support the integration of WIP with the
ERP to share the required data. In many
systems the WIP interface can be directly embedded into the ERP environment.
Besides the »create job« feature the
LineWorks WIP ERP interface offers a
flexible feedback to the superordinate
production planning system.
WIP MaMa
Tracking and monitoring of
materials
WIP CarMa
Administration of production units
WIP Carrier Management allows the
flexible administration of carriers
(FOUP, SMIF pods, cassettes, boxes)
and the contained material. Production
units can be arranged in groups on various hierarchy levels, e.g. serial numbers on carriers in boxes on palettes.
WIP Material Management provides
the tracking and monitoring of materials based on the defined stock.
LineWorks UA
User administration
LineWorks User Administration manages users, user groups, divisions and
object permissions.
3-Oct-2005
LineWorks WIP 4.2
3
Detailed Control of Process
Sequences and Routes
LineWorks WIP allows detailed control of
Loss or failure reasons can be recorded
process sequences and routes.
during the production process and anal-
The production units are either identi-
ysed via statistics.
fied, e.g. via a production key, a number,
The data gathered and managed in Line-
a name or a barcode, or exist as non-
Works WIP contains basic information
identified subsets.
for the other LineWorks modules such as
Using LineWorks WIP you will get an
overview of the current state of your pro-
PULSE, SPACE, ECoFrame, or Recipe
Management.
duction which can be used for feedback
Therefore, the features offered by Line-
to the production planning system or op-
Works WIP are of essential significance
timized capacity planning and utilization.
for the area of production data acquisi-
LineWorks WIP makes sure that the indi-
tion.
vidual process steps are performed in the
correct order. In addition, it documents
all used materials so that you can check
if your products are manufactured exactly according to the appropriate process
plan and parts list.
3-Oct-2005
LineWorks WIP 4.2
4
Alternate Process Steps
LineWorks WIP supports alternate pro-
LineWorks WIP offers the possibility to
cess steps or routes, any number of
define alternative process steps or routes
which are defined in the Process Plan.
and select them for execution. Line-
The Process Plan is defined in the WIP
Works WIP tracks which one of the alter-
PMDA module or an external ERP system
nate process steps is used and verifies
and sent to Lineworks WIP at run-time.
the correct sequence of steps.
Split & Merge Job
LineWorks WIP internally supports Split
Via the LineWorks WIP API you can de-
& Merge of jobs. Using WIP you specify
scribe the details for each split, e.g. the
how many pieces from the master job
number, quantity, process plan and parts
should be sent to the Split job, for exam-
list.
ple. A Split job carries a new job id, a
new process plan and a new parts list.
The Merge function does exactly the
same as the Split function in reverse,
moving pieces back to a defined process
step in the master job.
3-Oct-2005
LineWorks WIP 4.2
5
Rework
In LineWorks WIP it is possible to define
Scheduled Rework
two different rework scenarios: sched-
Scheduled rework usually depends on
uled and non-scheduled rework.
measurements taken during the produc-
Non-Scheduled Rework
tion process. If the result of the measure-
Non-scheduled rework is called for if an
unexpected event occurs, for example, a
process step may fail due to equipment
ment is outside of the required limits a
rework route will be used for reworking
the failed piece.
After rework, the piece could be routed
malfunction.
To repair the failure a Repair Job can be
generated with an individual process
plan and parts list and delivered to WIP.
The Repair Job works similar to the Split
& Merge procedure. However, all pieces
are moved to the repair job.
back to the measurement process step,
or routed to a different process step as
required.
When failed units are detected regularly,
a scheduled rework route will be specified in the process plan for failed pieces
and will be defined in the Product Main
After completion they are moved back
Data Administration (PMDA) or in the ex-
into the defined process step to progress
ternal Enterprise Resource Planning (ERP)
the original job.
system.
3-Oct-2005
LineWorks WIP 4.2
6
WIP Online Reports
WIP Online offers Web reports which can
X
Jobs and split jobs per process step
be viewed in the Web browser. WIP On-
X
Production time per job, process step,
line reports offer:
X
subset or individual part, respectively
Current list of all jobs that are not
started, started, in progress or finished
X
Various yield calculations
X
Numerous other reports regarding
jobs, process steps, stations and pro-
Dispatch list with jobs related to process steps
X
X
Overall set, subset, failure per job and
process step
duction time
X
»Diary« of individual subsets (serial
numbers)
WIP API
WIP Online Acquisition
Using the LineWorks WIP API (Applica-
WIP integration can be facilitated by de-
tion Programming Interface) you can in-
ploying the camLine product LineWorks
tegrate numerous WIP functions into the
ECoFrame providing powerful client
program environment of your produc-
functions to accomplish equipment au-
tion equipment.
tomation.
Using LineWorks ECoFrame, WIP can be
employed for online data acquisition
and monitoring.
3-Oct-2005
LineWorks WIP 4.2
7
Jetzendorfer Strasse 6
85238 Petershausen, Germany
phone: +49-8137-935-0
fax: +49-8137-935-235
email: sales@camline.com
web: www.camline.com
LineWorks Product Family
The LineWorks product family provides
LineWorks products include:
X
SPACE – Statistical Process Control
X
SQM – Supplier Quality Management
X
STARGATE – SPC Quality Reporting
X
PULSE – Equipment Efficiency and Optimization
X
RM – Recipe Management
CAPS (CDLB, CORBA, COM, TIB/Rendez-
X
WIP – Work in Process Tracking
vous) are also available to LineWorks
X
ECoFrame – Equipment Connection Framework
WIP.
X
iGate – Information Gateway
X
UA – User Administration
an automation solution with or without
MES system. Like every other LineWorks
product LineWorks WIP is based on the
camLine Application Server (CAPS). All
interfacing technologies supported by
LineWorks WIP Server Operating Systems
X
HP-UX 11.i
X
IBM AIX 4.3.3
X
Sun Solaris 5.8
X
SuSE Enterprise Server 8 and 9
X
MS Windows NT, 2000, XP
Further systems or versions on demand
LineWorks WIP Client Operating Systems
X
MS Windows NT, 2000, XP
Further systems or versions on demand
LineWorks WIP Supported Web Browsers
X
Microsoft Internet Explorer 5.5 or higher
LineWorks WIP Middleware
X
camLine Application Server (CAPS) with camLine Dynamic Load Balancing (CDLB)
X
CORBA/IIOP
X
COM (via CAPS OLE Gateway)
X
TIB/Rendezvous TIBCO Load Balancing
LineWorks WIP RDBMS Support
X
Oracle 9i
Further database systems on demand
The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility for
any errors which may appear in this document. All company names and product names are trademarks or registered trademarks
of their respective holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM,
LineWorks SPACE, LineWorks WIP and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.
3-Oct-2005
LineWorks WIP 4.2
8
LineWorks ECoFrame
TM
Equipment Connection Framework
LineWorks ECoFrame offers an efficient way to automate equipment including equipment data collection, data routing and remote equipment control.
Data is automatically retrieved from the equipment guaranteeing highest
data quality as well as most detailed information.
Using LineWorks ECoFrame, equipment
other LineWorks modules. Data routing
automation can be realized with little ef-
to third party solutions can be integrated
fort. By simple configuration, alarms,
as well.
events, or process data are routed to
Features
X
Broad range of equipment connec-
X
Optional equipment control
tions via SECS, HSMS, OPC, Profibus
X
SEC (Statistical Equipment Control) in
OPC, CORBA, Digital I/O
X
combination with LineWorks SPACE
Combining and selecting relevant
X
equipment parameters
X
Monitoring equipment via LineWorks
PULSE
Enabling facility alarms, event reports,
or process data logging
X
Configurable data routing of alarms,
events or process data to other LineWorks modules or third party solutions
X
Recipe download, upload or select
7. August 2006
LineWorks ECoFrame 1.8
1
Equipment Data Ö
Alarms, Events, Variables
All equipment data provided by the man-
The process start and process end events
ufacturer can be used for processing.
are sent to LineWorks PULSE to record
The user chooses the relevant data and
defines how to use them further. For example:
the productive time as well as the idle
time of the equipment.
With the aid of the administration fea-
A variable to be monitored via SPC will
be collected during processing and sent
to LineWorks SPACE.
tures of LineWorks ECoFrame the data
collection for a complete facility logging
file can be specified in LineWorks PULSE.
By that a lot track, recipe track, info
track, alarm track and/or time track can
be written.
Data Routing
Contextual Information
In the ECoFrame Administration, it can
In the ECoFrame Administration, individ-
be defined for all equipment data where
ual contextual data and constants such
the data is to be further processed.
as operation or lot number can be de-
For further processing the LineWorks
fined.
modules SPACE, PULSE, PDC and/or oth-
The contextual information can be com-
er existing applications can be specified.
bined with the equipment data and sent
to other applications.
7. August 2006
LineWorks ECoFrame 1.8
2
Comprehensive
CIM Automation
Facility Specific Dispatch
Recipe Management
The interface to Lineworks WIP offers the
LineWorks RM provides central manage-
possibility to link contextual information
ment of programs and recipe files. Using
with the equipment data. This interface
keys from the facility dispatch the correct
can be extended to existing MES sys-
recipe is automatically provided for the
tems, e.g. SAP/R3, Workstream, or
lot to be processed.
Promis.
User Administration
Extension of LineWorks ECoFrame for
the administration of users, divisions and
security levels.
ECoFrame Multiplatform
Client
The ECoFrame Multiplatform Client offers the same features as the ECoFrame
Standard Client 1.8. It supports equipment connection via SECS, OPC, Profibus OPC, CORBA, and Digital I/O.
7. August 2006
LineWorks ECoFrame 1.8
3
Jetzendorfer Strasse 6
85238 Petershausen, Germany
phone: +49-8137-935-0
fax: +49-8137-935-235
email: sales@camline.com
web: www.camline.com
LineWorks Product Family
LineWorks products include:
The LineWorks product family provides
X
SPACE – Statistical Process Control
an automation solution with or without
X
SQM – Supplier Quality Management
MES system. Like every other LineWorks
X
product LineWorks ECoFrame is based
X
on the camLine Application Server
STARGATE – SPC Quality Reporting
PULSE – Equipment Efficiency and Optimization
X RM – Recipe Management
(CAPS). All interfacing technologies sup-
X
WIP – Work in Process Tracking
ported by CAPS (CDLB, CORBA, COM,
X
X
ECoFrame – Equipment Connection Framework
iGate – Information Gateway
X
UA – User Administration
TIB/Rendezvous) are also available to
LineWorks ECoFrame.
LineWorks ECoFrame Server Operating Systems
X
HP-UX 11.i
X
IBM AIX 4.3.3
X
Sun Solaris 5.8
X
SuSE Enterprise Server 8
X
MS Windows NT, 2000, XP
Further systems or versions on demand
LineWorks ECoFrame Client Operating Systems
X
MS Windows NT, 2000, XP / Further systems or versions on demand
LineWorks ECoFrame Middleware
X
camLine Application Server (CAPS) with camLine Dynamic Load Balancing (CDLB)
X
CORBA/IIOP
X
COM (via CAPS OLE Gateway)
X
TIB/Rendezvous TIBCO Load Balancing
LineWorks ECoFrame Communication Protocols
X
camLine Application Server (CAPS) with camLine Dynamic Load Balancing (CDLB)
X
CORBA/IIOP, COM (via CAPS OLE Gateway), TIB/Rendezvous TIBCO Load Balancing
X
SECS I, HSMS-SS, Digital I/O, OPC, Profibus-OPC
LineWorks ECoFrame RDBMS Support
X
Oracle 9i
The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility for any errors
which may appear in this document. All company names and product names are trademarks or registered trademarks of their respective
holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM, LineWorks SPACE,
LineWorks STARGATE, LineWorks WIP and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.
7. August 2006
LineWorks ECoFrame 1.8
4
LineWorks iGate
TM
Information Gateway
LineWorks iGate is a component-oriented visualization framework for
Web-based reporting. It is developed to provide easy and fast access to all
information available in various databases. It is a powerful reporting tool
to meet the requirements typical in production. The so-called 80%
solution can be achieved very quickly on the basis of re-usable components.
Integration of data from
Web
Browser
XML
LineWorks iGate
¾ LineWorks products
Configuration
such as WIP or RM
Files
¾ Third party products
¾ Local customer database
WIP
RM
Third
Party
Local
DBs
Other
Data Sources
¾ All accessible data sources
LineWorks iGate Features
X
Dashboard functionality: define a col-
X
lection of reports you are interested in
X
Plugin support for
– user-defined modifications of charts
Publishing by configuration
and data sources
– easy and fast creation of reports
– the import of arbitrary data like csv
– configuration using XML files
– Uniform configuration with style
sheets stored centrally on a server
X
Best support for drill down approaches
X
Easy linking of reports over different
files, text files etc.
X
Blob support. Storage of any files such
as MS-Excel, images, zip-files etc.
databases
X
Servlet library with common report
layout components which is regularly
extended by camLine
X
Online modification of reports without
restarting
X
Authentication and access control,
X
Hierarchical menus
X
e.g. with LineWorks User Administration (UA)
8. August 2006
LineWorks iGate 2.3
1
High Security
X
Login required
X
Different users have
different permissions
X
Central permission and
password administration
X
Users can view a piece of
information only if they have
the corresponding
permissions
Common Web Page Layout
X
Main menus and sub menus
X
Navigation trees
X
Results area
Main and Sub Menus
X
Main menu used to separate by products, user groups, etc.
X
Sub menu depends on the main
menu selection, displays detailed
views or adds constraints
X
Period under observation can be
specified
X
Each menu item can be provided with
user access control, e.g. by LineWorks User Administration (UA)
8. August 2006
LineWorks iGate 2.3
2
Trees
X
X
X
Filtering and Sorting
Trees used to change the detail level of
A table can be sorted by clicking on the
the report with drill down
heading of a table column by which the
Flexible linkage with reports per tree
data recoreds should be sorted.
level
You can filter data to only display the sig-
Main menu, sub menus and trees may
nificant information.
be linked together in any combination.
Results Area
X
X
Drill Down and Linking
Results Area with header, body, and
Drill down means to create a new report
summary section
via clicking on a sensitive area within the
Body section with visual components
original report. Underlined data items
and their configuration such as tables-
contain so called drill down links. By
charts, and text. The contents can be
clicking such a link you receive a more
linked, filtered, sorted, or exported in
detailed report, based on the selected
various file formats.
item.
8. August 2006
LineWorks iGate 2.3
3
Supported Charts
Charts provide a convenient way to analyze the data. Especially interactive charts
make work much easier.
By simply clicking on a linked data you
can drill down from a first overview to
various detail views.
LineWorks iGate provides the following
chart types. You can adjust them to your
own needs.
X
Category chart
X
Box plot chart
X
Bar chart
X
Line chart
X
Combined line and bar chart
X
Pie chart
X
Wafermap chart
X
XY plot chart
Dynamic Navigation
Functions
¾ Zoom in / out the whole plot area
¾ Zoom in a chart sector
¾ Scroll up / down the value axis
¾ Scroll forward / backward the domain axis
¾ Reset the chart navigation
¾ Scale up / down the chart
8. August 2006
LineWorks iGate 2.3
4
The Dashboard
The dashboard provides an easy and fast
X
With a few simple touches you create
way to show how well your production is
your own dashboard with all wanted
performing right now. You will receive
reports:
an up-to-date snapshot into production
– Defining the number and size of
at various places of your site.
dashboard segments
With one mouse-click, you display the
collection of reports of your personal in-
– Placing the desired reports in the
dashboard
terest.
Creating a
dashboard with all
wanted reports
8. August 2006
LineWorks iGate 2.3
5
LineWorks UA
TM
User Administration
LineWorks UA offers the possibility to manage users, user groups, divisions
and permissions. Users have access to an object if they are assigned to a
user group which has the corresponding permissions in the division the
object belongs to.
In the Division »Frontend«, User Meyer belongs to the Group »Gast«,
which has the permission to view charts. As member of Group »Expert«
in Division »Lithography«, User Meyer can create and delete reports.
User Groups ...
Divisions ...
... state which access rights to which ob-
make up a category above users and user
jects are granted. Each group defines a
groups. In each division users can belong
specific permission profile. These permis-
to a certain group, i.e. in each division
sions have no influence on the data entry
they can have specific object permis-
itself, but are related to the administra-
sions.
tion, this means the viewing, creating
and editing of objects.
If users miss the ’read’ permission
the object will even be invisible
for them.
16. August 2006
LineWorks UA 2.3
1
Jetzendorfer Strasse 6
85238 Petershausen, Germany
phone: +49-8137-935-0
fax: +49-8137-935-235
email: sales@camline.com
web: www.camline.com
LineWorks Product Family
LineWorks products include
The LineWorks product family provides
X
SPACE – Statistical Process Control
an automation solution with or without
X
SQM – Supplier Quality Management
MES system. Like every other LineWorks
X
product, LineWorks UA is based on the
X
camLine Application Server (CAPS). All
STARGATE – SPC Quality Reporting
PULSE – Equipment Efficiency and Optimization
X RM – Recipe Management
interfacing technologies supported by
X
WIP – Work in Process Tracking
CAPS (CDLB, CORBA, COM, TIB/Rendez-
X
vous) are also available to LineWorks UA.
X
ECoFrame – Equipment Connection Framework
iGate – Information Gateway
X
UA – User Administration
LineWorks UA Server Operating Systems
X
HP-UX 11.i
X
Sun Solaris 6, 7
X
SuSE Enterprise Server 8, 9
X
MS Windows 2000
Further systems or versions on demand
LineWorks UA Client Operating Systems
X
MS Windows 2000
Further systems or versions on demand
LineWorks UA Middleware
X
camLine Application Server (CAPS) with camLine Dynamic Load Balancing (CDLB)
X
CORBA/IIOP
X
COM (via CAPS OLE Gateway)
X
TIB/Rendezvous TIBCO Load Balancing
LineWorks UA RDBMS Support
X
Oracle 9i
Further database systems on demand
The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility for any errors
which may appear in this document. All company names and product names are trademarks or registered trademarks of their respective
holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM, LineWorks SPACE,
LineWorks STARGATE, LineWorks WIP and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.
16. August 2006
LineWorks UA 2.3
2
CAPS
TM
camLine Application Server
camLine presents the CAPS framework for your manufacturing infrastructure. Plug your different IT components together and take advantage of the
CAPS integration capabilities.
Based on a range of field proven middle-
and maintenance, fault tolerance, ro-
ware and database architectures, CAPS
bustness and high availability, offline and
links your business systems together us-
recovery capabilities, and high transpar-
ing a three-tiered client server architec-
ency as well as support for a wide range
ture. Major advantages are ease of use
of software standards.
camLine Application Server (CAPS) – Architecture
True Three Tiered
Client Server
Architecture
CAPS is a three-tiered client server architecture with distinct presentation, application and database layers.
Core Layer
RDBMS Layer
SQL
Mapping
DB API
CAPS Core
, ORACLE
... others ...
Business Logic Layer
Service 1
Service 3
Service 2
Service 4
Service n
Any number of application
specific services
Communication Layer
CDLB
CORBA / IIOP
TIB / Rendezvous
Factory Network
The user may replace, upgrade or take
Performance of a transaction is reliable
off-line a single layer without affecting
and stays within predictable ranges. No
the others. This provides the open frame-
matter if you are using CAPS with ten or
work for easy future updates of software
a hundreds of clients, if you do one
or even of hardware components.
transaction per hour or a thousand
Compared to the more simple message
bus systems a three-tiered client server
architecture provides overall higher reliability. Even complex client server transac-
transactions per minute: the system
keeps up performance, scales with the
requirements, stays reliable and is still
easy to maintain.
tions remain simple and easy to monitor
and debug, but are still fully transparent
to the user.
6. September 2006
camLine Application Server – CAPS
1
Join the Future with
Software Standards
In addition to the camLine Dynamic Load
Multiple instances of the same applica-
Balancing Protocol (CDLB), CAPS sup-
tion server image may run in different
ports most of the communication stand-
communication modes at the same time.
ards that are currently available.
The benefit from this is that it is not dependent on a single middleware strategy
Application servers can be started in
and may use different middleware com-
CORBA/IIOP mode, camLine DLB Proto-
ponents simultaneously or even change
col mode, COM (using the CAPS OLE
the underlying middleware component
Gateway) or TIB/Rendezvous mode de-
of a business application at runtime.
pending on a startup flag and without
the need for any recompilation.
camLine Application Server (CAPS) – Application Scenarios
ORACLE
camLine
Application
Server 1
camLine
Application
Server 1
camLine
Application
Server 1
CORBA / IIOP
CDLB
TIB / Rendezvous
Factory Network
CDLB
CDLB
CORBA / IIOP
CORBA / IIOP
TIB / Rendezvous
DLL WIN
WIN 16/32
16/32
DLL
(C-Lib
UNIX //
(C Lib UNIX
ANSI C)
C)
ANSI
OLE Gateway
Gateway
OLE
OLE Gateway
Gateway
OLE
RAD:
Visual Basic
Borland Delphi
RAD:
Visual Basic
Borland Delphi
ORB:
any supported
programming
language
e.g. JAVA
(recommended)
C/C++
DLL WIN16/32
C Lib UNIX /
ANSI C
MS Visual C
Borland C
MS Visual Basic
Smalltalk
The CAPS to database connection con-
Furthermore you can use the de facto
forms to the ANSI SQL standard. Other
middleware standard CORBA to access
databases can be supported on custom-
your application servers through an Ob-
er request.
ject Request Broker (ORB).
Building clients with Java ensures that
The CAPS COM / OLE Automation Gate-
your application front-ends are highly
way enables you to connect to CAPS ob-
portable and run over a variety of plat-
jects from popular developing environ-
forms with the same look and feel.
ments like Microsoft Visual Basic or Borland Delphi without any knowledge of
communication internals.
6. September 2006
camLine Application Server – CAPS
2
Dynamic Load Balancing
The camLine Dynamic Load Balancing
Protocol (CDLB) is a key feature of the
CDLB offers
CAPS framework. CDLB offers various
X
enterprise wide naming service
features like a naming service and adap-
X
application transparent adaptive client
tive client routing.
routing
Based on CDLB and Oracle Parallel Serv-
X
ities
er, for example, fault tolerant, high availability systems can be set up.
X
ware stability and minimizes administra-
fault tolerant and highly available infrastructure
Together with the advanced offline capabilities CDLB improves overall middle-
application transparent offline capabil-
X
highly efficient administration of CDLB
clients on shopfloor level
tion overhead on the enterprise framework architecture.
Performance, Fault Tolerance,
High Availability
CAPS provides a fault tolerant middleware architecture based on the camLine
Enterprise wide name services and dynamic client routing in combination with
Oracle Parallel Server allows for a fault
tolerant and highly available system.
Dynamic Load Balancing Protocol
(CDLB).
Loads are distributed over distinct nodes
Additional information or technical
specification: can be found under:
and application server instances by a
¾ General: http://www.camline.com
¾ CORBA 2.2: http://www.omg.org
ticketing mechanism.
¾ ANSI-SQL: http://www.oracle.com
¾ TIB/Rendezvous: http://www.rv.tibco.com
6. September 2006
camLine Application Server – CAPS
3
Adaptive Client Routing
CAPS provides the possibility to start
more than one instance of an application
service. Those CDLB application servers
offer so called ’tickets’ to indicate if they
are currently idle and ready to process
new requests.
This is done via a round robin algorithm,
i.e. the client starts at an arbitrary node,
scans the application server(s) – one after
another – for available tickets until it has
successfully got one. This ticket is the
permission to send a request to the application server.
In the first phase the CDLB client asks the
naming services on the different nodes
for the address of the application servers
it wants to call.
For the next request, the CDLB client performs the same tasks again (though for
performance reasons it starts where it
got the ticket last time). This mechanism
The naming service on each node pro-
assures that – if an application server is
vides a list of application servers that are
busy or a whole node is down – the cli-
currently available. In the second phase
ent is able to perform its request possibly
the client tries to obtain a ticket from
on another application server or node.
one of those application servers.
Very Fast and
Fully Transparent
The client application isn’t aware of a
The whole task of allocating an applica-
other nor does it notice a switch from
tion server is very fast and fully transpar-
one node to another.
switch from one application server to an-
ent to the client.
6. September 2006
camLine Application Server – CAPS
4
Advanced Offline
Capabilities
If the network connection from a client
The offline feature is broadly configura-
machine to the application server is com-
ble to provide the following options:
pletely down for example, clients can’t
obtain tickets. CDLB provides another
useful feature to move around problems
X
Store all data
X
Store data for specific applications
only
like this.
With the CAPS advanced offline capabilites a client can be configured to log
X
Try to go online at each new request
X
Stay offline and try to upload only after a specified downtime
its data and requests into an offline file in
case of a network breakdown, for exam-
X
Full recovery of stored data
ple.
X
Filtered recovery of stored data
The data is stored in a local file and can
X
Partial recovery of stored data
be uploaded later, when the application
servers are back online. The stored requests are performed when the connection is working again.
Not all applications are fully able to work
properly with the advanced offline capabilities. A client that is uploading test
As you see, though there might be no
data to an application server would be
server connection at all, the client can
able to continue working, but a client
continue to process. Furthermore this
that is downloading data (e.g. recipes)
feature is fully transparent to the client
from the application server may not be
application - depending on the configu-
able to continue when the network is
ration the client doesn’t even notice
down.
whether it is currently online or offline.
6. September 2006
camLine Application Server – CAPS
5
CAPS OLE Gateway
The CAPS architecture is a leading three-
Several software development tools such
tier client server environment to build en-
as Microsoft Visual Basic, Visual C++ or
terprise wide CIM frameworks. The
Borland Delphi are supported.
CAPS client provides a dynamic interface
structure similar to the CORBA IDL specification.
By using the CAPS OLE Gateway, the end
user can take the advantage of interfacing independent GUI front-ends to the
Besides CORBA, the Microsoft COM
field proven CAPS client server architec-
specification is an emerging middleware
ture.
interface standard. CAPS clients support
the OLE 2.0 Automation specification by
providing a dynamic OLE Automation in-
The CAPS OLE Gateway support can only
be used together with the CAPS client
server architecture.
terface.
The CAPS OLE
Gateway offers
¾ Transparent and dynamic OLE
Automation interface structure
¾ Automated CAPS interface
definition query support
¾ Windows 32-bit support (only)
¾ Automated type library
generator
¾ Compliance to the OLE 2.0
Automation specification
The Common Interface
Structure
The OLE Gateway offers the common in-
The OLE Gateway combines the free
terface structure to several software sys-
choice between various OLE capable de-
tems and applications such as Microsoft
velopment environments on the client
Excel or Java, for example.
side with the benefits of the CAPS
framework on the server side.
6. September 2006
camLine Application Server – CAPS
6
Jetzendorfer Strasse 6
85238 Petershausen, Germany
phone: +49-8137-935-0
fax: +49-8137-935-235
email: sales@camline.com
web: www.camline.com
LineWorks Product Family
LineWorks products include
The LineWorks product family offered by
X
SPACE – Statistical Process Control
camLine provides an automation solu-
X
SQM – Supplier Quality Management
tion with or without MES system. Each
X
LineWorks product is based on CAPS. All
X
interfacing technologies supported by
STARGATE – SPC Quality Reporting
PULSE – Equipment Efficiency and Optimization
X RM – Recipe Management
CAPS (CDLB, CORBA, COM, TIB/Rendez-
X
WIP – Work in Process Tracking
vous) are available to all LineWorks prod-
X
ucts.
X
ECoFrame – Equipment Connection Framework
iGate – Information Gateway
X
UA – User Administration
CAPS Communication Layers
X
camLine Dynamic Load Balancing (CDLB)
X
CORBA/IIOP
X
COM (via CAPS OLE Gateway)
X
TIB/Rendezvous TIBCO Load Balancing
CAPS Server Operating Systems
X
HP-UX 11.i
X
IBM AIX 4.3.3
X
Sun Solaris 5.8
X
SuSE Enterprise Server 8
X
MS Windows NT, 2000, XP
CAPS Client Operating Systems
X
Windows NT, 2000, XP and all the server platforms mentioned above
CAPS RDBMS Support
X
Oracle 9i and further databases on demand
Client Programming Language Support
X
Microsoft VisualBasic, Microsoft Visual C/C++
X
Borland C, Borland Delphi
X
Smalltalk
X
Java
X
and all others that are capable of using CORBA/IIOP or COM
The information contained in this document is subject to change without notice. camLine GmbH assumes no responsibility for any errors
which may appear in this document. All company names and product names are trademarks or registered trademarks of their respective
holders. camLine, CAPS, LineWorks, LineWorks ECoFrame, LineWorks iGate, LineWorks PULSE, LineWorks RM, LineWorks SPACE,
LineWorks STARGATE, LineWorks WIP and LineWorks UA are trademarks of camLine Datensysteme für die Mikroelektronik GmbH.
6. September 2006
camLine Application Server – CAPS
7
PAA (Part Average Analysis)
camLine offers a new self-contained online software solution for the mass
production that is highly specialized in the treatment of abnormal test data
(PAA). The long-term employment inside a productive environment at test
stations enables the consistent evaluation of all (semi finished) goods at serial number level.
The application is designed for high
behavior of good parts that otherwise
product variety and also for shortest re-
would pass the test will be instantly de-
sponse times to meet the demands of
tected at serial number level. Parts with
the electronic and semiconductor indus-
increased risk are being filtered out and
tries. An ORACLE database forms the
rejected.
backbone of the application and guarantees the complete documentation of all
PAA results.
The implementation into the mass production requires short response time that
are of particular importance to validate
A powerful web based reporting tool en-
the parts and their test results in real
ables all kinds of traceability queries. The
time. Every test station sends its test data
PAA module is easily integrated into al-
to the central PAA server which will in-
ready existing computing environments.
stantly analyze the data. These server
The solution is scalable and applicable
calls transfer the PAA results back to the
across diverse system platforms.
test stations as return values. At the test
camLine's LineWorks product family is
complemented by a new and independently working PAA module that is devel-
stations the test programs can proceed
and instantaneously make use of the
PAA validations.
oped to implement the part average
The high variety of products and manu-
analysis into a manufacturing environ-
facturing processes requires parallel
ment.
processing of different part average
The module is designed to facilitate the
early detection of parts with high risk of
later failure. In all test areas abnormal
10-Oct-2005
analyses. The PAA module offers an own
caching mechanism to hold a PAA instance, separately for each analysis.
PAA (Part Average Analysis)
1
The PAA instances follow a specific con-
The PAA module itself makes use of Line-
cept that was originally developed by
Works iGate to provide standardized or
camLine and is proven in practice due to
customer specific web reporting. The
its high flexibility within other LineWorks
data are taken either from the history
products: Each instance, i.e. each PAA
but also from the online databases.
analysis, is identified by an arbitrary set
of key names that enable the introduction of sorting and grouping criteria.
To communicate and configure the PAA
module camLine offers a standardized
API that may be integrated into the test
programs. Doing so the programmer is
able to determine and control all PAA instances via the already existing test programs. The advantage is evident: Using
the API the PAA module becomes totally
configurable from the test stations.
There is no need for an extra GUI to setup and administrate PAA.
The application server of the PAA module is based on the CAPS (camLine application server) middleware architecture.
For many years CAPS has proven itself to
be noticeably well suited for a long-term
usage inside a manufacturing environment. CAPS is designed to operate and
communicate across diverse platforms
In the background an online database is
that facilitates the integration into an al-
kept as slim as possible to support the
ready existing IT landscape.
cache mechanism of the PAA instances.
The cache itself is operating with test
data and PAA results that are taken only
from a short-term sliding window.
Furthermore CAPS offers a proven concept for dynamic load balancing (DLB)
which is an essential aspect to guarantee
short response times. CAPS consists of
This approach is essential to guarantee
an inherent scaleable architecture that
the required high performance for all
allows adapting the PAA module to in-
real-time analyses. The long-term docu-
creasing system load and data through-
mentation of the PAA results is provided
put. Due to its modularity the deploy-
by an own history database that is being
ment of the server software onto diverse
supplied with data from the online data-
server hardware permits flexible arrange-
base section by a separate PAA back-
ments and meets all practical demands
ground server.
for system integration.
10-Oct-2005
PAA (Part Average Analysis)
2
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